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Sample records for factor silicon cantilever

  1. MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

  2. Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Suryo Wasisto, Hutomo; Peiner, Erwin

    2016-10-01

    The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor (Q) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 × 10-6. This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor.

  3. Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

    International Nuclear Information System (INIS)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Wasisto, Hutomo Suryo; Peiner, Erwin

    2016-01-01

    The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor ( Q ) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 × 10 -6 . This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor. (paper)

  4. Size-dependent effective Young’s modulus of silicon nitride cantilevers

    NARCIS (Netherlands)

    Babaei Gavan, K.; Westra, H.J.R.; Van der Drift, E.W.J.M.; Venstra, W.J.; Van der Zant, H.S.J.

    2009-01-01

    The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations

  5. Cantilever surface stress sensors with single-crystalline silicon piezoresistors

    DEFF Research Database (Denmark)

    Rasmussen, Peter Andreas; Hansen, Ole; Boisen, Anja

    2005-01-01

    We present a cantilever with piezoresistive readout optimized for measuring the static deflection due to isotropic surface stress on the surface of the cantilever [Sens. Actuators B 79(2-3), 115 (2001)]. To our knowledge nobody has addressed the difference in physical regimes, and its influence o...

  6. Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

    2017-06-01

    In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next

  7. Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT

    NARCIS (Netherlands)

    Nazeer, H.; Woldering, L.A.; Abelmann, Leon; Nguyen, Duc Minh; Rijnders, Augustinus J.H.M.; Elwenspoek, Michael Curt

    In this work we show for the first time that the effective in-plane Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films, deposited by pulsed laser deposition (PLD) on dedicated single crystal silicon cantilevers, is independent of the in-plane orientation of cantilevers.

  8. Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

    Science.gov (United States)

    Buettel, G.; Joppich, J.; Hartmann, U.

    2017-12-01

    Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

  9. Electroless porous silicon formation applied to fabrication of boron–silica–glass cantilevers

    International Nuclear Information System (INIS)

    Teva, J; Davis, Z J; Hansen, O

    2010-01-01

    This work describes the characterization and optimization of anisotropic formation of porous silicon in large volumes (0.5–1 mm 3 ) of silicon by an electroless wet etching technique. The main goal is to use porous silicon as a sacrificial volume for bulk micromachining processes, especially in cases where etching of the full wafer thickness is needed. The porous silicon volume is formed by a metal-assisted etching in a wet chemical solution composed of hydrogen peroxide (30%), hydrofluoric acid (40%) and ethanol. This paper focuses on optimizing the etching conditions in terms of maximizing the etching rate and reproducibility of the etching. In addition to that, a study of the morphology of the pore that is obtained by this technique is presented. The results from the characterization of the process are applied to the fabrication of boron–silica–glass cantilevers that serve as a platform for bio-chemical sensors. The porous silicon volume is formed in an early step of the fabrication process, allowing easy handling of the wafer during all of the micromachining processes in the process flow. In the final process step, the porous silicon is quickly etched by immersing the wafer in a KOH solution

  10. Optimization of sensitivity and noise in piezoresistive cantilevers

    DEFF Research Database (Denmark)

    Yu, Xiaomei; Thaysen, Jacob; Hansen, Ole

    2002-01-01

    In this article, the sensitivity and the noise of piezoresistive cantilevers were systematically investigated with respect to the piezoresistor geometry, the piezoresistive materials, the doping dose, the annealing temperature, and the operating biased voltage. With the noise optimization results......(-6), the biggest gauge factors was 95, and the minimum detectable deflection (MDD) at 6 V and 200 Hz-measurement bandwidth was 0.3 nm for a single-crystal silicon cantilever. Of the two LPCVD silicon piezoresistive cantilevers, amorphous silicon piezoresistors had relatively lower 1/f noise. The MDD for a LPCVD...

  11. Computational analysis of the effect of surface roughness on the deflection of gold coated silicon micro-cantilevers due to molecular adsorption

    Science.gov (United States)

    Hayden, Victor

    In this work numerical simulations were performed in order to study the effects of surface roughness on the deflection of gold coated silicon cantilevers due to molecular adsorption. The cantilever was modeled using a ball and spring system where the spring constants for the Si-Si, Si-Au, and Au-Au bonds were obtained from first principal calculations. The molecular adsorption process was simulated by elongating the natural bond length at available bonding sites chosen randomly on the cantilever. Increasing the bond length created a surface stress on the cantilever causing it to deflect. In all cases the structure refinement was performed by minimizing the energy of the system using a simulated annealing algorithm and a high quality random number generator called Mersenne Twister. The system studied consisted of a 1 micrometer by 1 micrometer portion of a cantilever of various surface roughnesses with variable boundary condition and was processed in parallel on the ACEnet (Atlantic Computational Excellence Network) cluster. The results have indicated that cantilevers with a rougher gold surface deflected more than those with a smoother surface. The increase in deflection is attributed to an increase in stress raisers in the gold film localized around the surface features. The onset of stress raisers increases the differential stress between the top and bottom surfaces and results in an increase in the deflection of the cantilever.

  12. Optimization of Q-factor of AFM cantilevers using genetic algorithms

    Energy Technology Data Exchange (ETDEWEB)

    Perez-Cruz, Angel, E-mail: elapc27@gmail.com [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico); Dominguez-Gonzalez, Aurelio [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico); Stiharu, Ion [Department of Mechanical and Industrial Engineering, Concordia University, Montreal (Canada); Osornio-Rios, Roque A. [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico)

    2012-04-15

    Micro cantilever beams have been intensively used in sensing applications including to scanning profiles and surfaces where there resolution and imaging speed are critical. Force resolution is related to the Q-factor. When the micro-cantilever operates in air with small separation gaps, the Q-factor is even more reduced due to the squeeze-film damping effect. Thus, the optimization of the configuration of an AFM micro-cantilever is presented in this work with the objective of improving its Q-factor. To accomplish this task, we propose the inclusion of holes as breathing chimneys in the initial design to reduce the squeeze-film damping effect. The evaluation of the Q-factor was carried out using finite element model, which is implemented to work together with the squeeze-film damping model. The methodology applied in the optimization process was genetic algorithms, which considers as constraints the maximum allowable stress, fundamental frequency and spring constant with respect to the initial design. The results show that the optimum design, which includes holes with an optimal location, increases the Q-factor almost five times compared to the initial design. -- Highlights: Black-Right-Pointing-Pointer It was optimized the Q-factor of a cantilever, which operates near to the surface in air. Black-Right-Pointing-Pointer It was proposed the inclusion of holes as breathing chimneys in the cantilever's surface. Black-Right-Pointing-Pointer Genetic algorithms and finite element analysis were applied to find the optimum configuration for the Q-factor. Black-Right-Pointing-Pointer Optimum design keeps first frequency and the spring constant very close to the original and has a better force resolution. Black-Right-Pointing-Pointer Final design can be easily manufactured through a mask.

  13. Electroless porous silicon formation applied to fabrication of boron-silica-glass cantilevers

    DEFF Research Database (Denmark)

    Teva, Jordi; Davis, Zachary James; Hansen, Ole

    2010-01-01

    This work describes the characterization and optimization of anisotropic formation of porous silicon in large volumes (0.5-1 mm3) of silicon by an electroless wet etching technique. The main goal is to use porous silicon as a sacrificial volume for bulk micromachining processes, especially in cases...... where etching of the full wafer thickness is needed. The porous silicon volume is formed by a metal-assisted etching in a wet chemical solution composed of hydrogen peroxide (30%), hydrofluoric acid (40%) and ethanol. This paper focuses on optimizing the etching conditions in terms of maximizing...... for bio-chemical sensors. The porous silicon volume is formed in an early step of the fabrication process, allowing easy handling of the wafer during all of the micromachining processes in the process flow. In the final process step, the porous silicon is quickly etched by immersing the wafer in a KOH...

  14. Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

    Science.gov (United States)

    Hoof, Sebastian; Nand Gosvami, Nitya; Hoogenboom, Bart W.

    2012-12-01

    Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here, we show that a high-quality resonance (Q >20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity—as expressed via the minimum detectable force gradient—is hardly affected, because of the enhanced quality factor. Through the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up that includes magnetic actuation of the cantilevers and that can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

  15. Measurement of contractile stress generated by cultured rat muscle on silicon cantilevers for toxin detection and muscle performance enhancement.

    Directory of Open Access Journals (Sweden)

    Kerry Wilson

    2010-06-01

    Full Text Available To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications.We have demonstrated a biological microelectromechanical system (BioMEMS based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT, the time to half relaxation ((1/2RT were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and (1/2RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine.The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery applications.

  16. Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films

    NARCIS (Netherlands)

    Nazeer, H.; Woldering, L.A.; Abelmann, Leon; Nguyen, Duc Minh; Rijnders, Augustinus J.H.M.; Elwenspoek, Michael Curt

    The Young’s modulus of thin films can be determined by deposition on a micronsized Si cantilever and measuring the resonance frequency before and after deposition. The accuracy of the method depends strongly on the initial determination of the mechanical properties and dimensions of the cantilever.

  17. Accurate measurement of Atomic Force Microscope cantilever deflection excluding tip-surface contact with application to force calibration

    Energy Technology Data Exchange (ETDEWEB)

    Slattery, Ashley D.; Blanch, Adam J.; Quinton, Jamie S.; Gibson, Christopher T., E-mail: christopher.gibson@flinders.edu.au

    2013-08-15

    Considerable attention has been given to the calibration of AFM cantilever spring constants in the last 20 years. Techniques that do not require tip-sample contact are considered advantageous since the imaging tip is not at risk of being damaged. Far less attention has been directed toward measuring the cantilever deflection or sensitivity, despite the fact that the primary means of determining this factor relies on the AFM tip being pressed against a hard surface, such as silicon or sapphire; which has the potential to significantly damage the tip. A recent method developed by Tourek et al. in 2010 involves deflecting the AFM cantilever a known distance from the imaging tip by pressing the cantilever against a sharpened tungsten wire. In this work a similar yet more precise method is described, whereby the deflection of the cantilever is achieved using an AFM probe with a spring constant much larger than the test cantilever, essentially a rigid cantilever. The exact position of loading on the test cantilever was determined by reverse AFM imaging small spatial markers that are milled into the test cantilever using a focussed ion beam. For V shaped cantilevers it is possible to reverse image the arm intersection in order to determine the exact loading point without necessarily requiring FIB milled spatial markers, albeit at the potential cost of additional uncertainty. The technique is applied to tip-less, beam shaped and V shaped cantilevers and compared to the hard surface contact technique with very good agreement (on average less than 5% difference). While the agreement with the hard surface contact technique was very good the error on the technique is dependent upon the assumptions inherent in the method, such as cantilever shape, loading point distance and ratio of test to rigid cantilever spring constants. The average error ranged between 2 to 5% for the majority of test cantilevers studied. The sensitivity derived with this technique can then be used to

  18. Highly sensitive polymer-based cantilever-sensors for DNA detection

    International Nuclear Information System (INIS)

    Calleja, M.; Nordstroem, M.; Alvarez, M.; Tamayo, J.; Lechuga, L.M.; Boisen, A.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers

  19. Highly sensitive polymer-based cantilever-sensors for DNA detection

    Energy Technology Data Exchange (ETDEWEB)

    Calleja, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain) and Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)]. E-mail: mcalleja@imm.cnm.csic.es; Nordstroem, M. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark); Alvarez, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Tamayo, J. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Lechuga, L.M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Boisen, A. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)

    2005-11-15

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.

  20. Biosensors based on cantilevers.

    Science.gov (United States)

    Alvarez, Mar; Carrascosa, Laura G; Zinoviev, Kiril; Plaza, Jose A; Lechuga, Laura M

    2009-01-01

    Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in diverse fields, such as genomic or proteomic, because of the biosensor flexibility, the low sample consumption, and the non-pretreated samples required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an example. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.

  1. Piezoresistive Cantilever Performance-Part I: Analytical Model for Sensitivity.

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C; Pruitt, Beth L

    2010-02-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.

  2. Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C.; Pruitt, Beth L.

    2010-01-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors. PMID:20336183

  3. Cantilever-like micromechanical sensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest

    2011-01-01

    The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has...... increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus...... on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection....

  4. Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

    Science.gov (United States)

    Wasisto, H. S.; Merzsch, S.; Stranz, A.; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.

    2011-06-01

    A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanoparticles mass detection is presented in this work. The cantilever is actuated using a piezoactuator at the bottom end of the cantilever supporting frame. The oscillation of the microcantilever is detected by a self-sensing method utilizing an integrated full Wheatstone bridge as a piezoresistive strain gauge for signal read out. Fabricated piezoresistive cantilevers of 1.5 mm long, 30 μm wide and 25 μm thick have been employed. This self-sensing cantilever is used due to its simplicity, portability, high-sensitivity and low-cost batch microfabrication. In order to investigate air pollution sampling, a nanoparticles collection test of the piezoresistive cantilever sensor is performed in a sealed glass chamber with a stable carbon aerosol inside. The function principle of cantilever sensor is based on detecting the resonance frequency shift that is directly induced by an additional carbon nanoparticles mass deposited on it. The deposition of particles is enhanced by an electrostatic field. The frequency measurement is performed off-line under normal atmospheric conditions, before and after carbon nanoparticles sampling. The calculated equivalent mass-induced resonance frequency shift of the experiment is measured to be 11.78 +/- 0.01 ng and a mass sensitivity of 8.33 Hz/ng is obtained. The proposed sensor exhibits an effective mass of 2.63 μg, a resonance frequency of 43.92 kHz, and a quality factor of 1230.68 +/- 78.67. These results and analysis indicate that the proposed self-sensing piezoresistive silicon cantilever can offer the necessary potential for a mobile nanoparticles monitor.

  5. Highly Sensitive Polymer-based Cantilever-sensors for DNA Detection

    DEFF Research Database (Denmark)

    Gomez, Montserrat; Nordström, Maria; Alvarez, M.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel...... polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized...

  6. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad; Chappanda, Karumbaiah N.; Hafiz, Md Abdullah Al; Ramini, Abdallah; Younis, Mohammad I.

    2016-01-01

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever

  7. Piezoelectric cantilever sensors

    Science.gov (United States)

    Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

    2008-01-01

    A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

  8. Lorentz force actuation of a heated atomic force microscope cantilever.

    Science.gov (United States)

    Lee, Byeonghee; Prater, Craig B; King, William P

    2012-02-10

    We report Lorentz force-induced actuation of a silicon microcantilever having an integrated resistive heater. Oscillating current through the cantilever interacts with the magnetic field around a NdFeB permanent magnet and induces a Lorentz force that deflects the cantilever. The same current induces cantilever heating. With AC currents as low as 0.2 mA, the cantilever can be oscillated as much as 80 nm at resonance with a DC temperature rise of less than 5 °C. By comparison, the AC temperature variation leads to a thermomechanical oscillation that is about 1000 times smaller than the Lorentz deflection at the cantilever resonance. The cantilever position in the nonuniform magnetic field affects the Lorentz force-induced deflection, with the magnetic field parallel to the cantilever having the largest effect on cantilever actuation. We demonstrate how the cantilever actuation can be used for imaging, and for measuring the local material softening temperature by sensing the contact resonance shift.

  9. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Grutzik, Scott J.; Zehnder, Alan T. [Field of Theoretical and Applied Mechanics, Cornell University, Ithaca, New York 14853 (United States); Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F. [Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)

    2013-11-15

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included.

  10. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Grutzik, Scott J.; Zehnder, Alan T.; Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F.

    2013-01-01

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included

  11. Fabrication of biopolymer cantilevers using nanoimprint lithography

    DEFF Research Database (Denmark)

    Keller, Stephan Sylvest; Feidenhans'l, Nikolaj Agentoft; Fisker-Bødker, Nis

    2011-01-01

    The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major...... challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus...

  12. Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

    Science.gov (United States)

    Sökmen, Ü.; Stranz, A.; Waag, A.; Ababneh, A.; Seidel, H.; Schmid, U.; Peiner, E.

    2010-06-01

    We report on a micro-machined resonator for mass sensing applications which is based on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin film actuator. An inductively coupled plasma (ICP) cryogenic dry etching process was applied for the micro-machining of the silicon substrate. A shift in resonance frequency was observed, which was proportional to a mass deposited in an e-beam evaporation process on top. We had a mass sensing limit of 5.2 ng. The measurements from the cantilevers of the two arrays revealed a quality factor of 155-298 and a mass sensitivity of 120.34 ng Hz-1 for the first array, and a quality factor of 130-137 and a mass sensitivity of 104.38 ng Hz-1 for the second array. Furthermore, we managed to fabricate silicon cantilevers, which can be improved for the detection in the picogram range due to a reduction of the geometrical dimensions.

  13. Improving tapping mode atomic force microscopy with piezoelectric cantilevers

    International Nuclear Information System (INIS)

    Rogers, B.; Manning, L.; Sulchek, T.; Adams, J.D.

    2004-01-01

    This article summarizes improvements to the speed, simplicity and versatility of tapping mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric microcantilever with a sharp silicon tip and a thin, low-stress zinc oxide (ZnO) film to both actuate and sense deflection. First, we demonstrate self-sensing tapping mode without laser detection. Similar previous work has been limited by unoptimized probe tips, cantilever thicknesses, and stress in the piezoelectric films. Tests indicate self-sensing amplitude resolution is as good or better than optical detection, with double the sensitivity, using the same type of cantilever. Second, we demonstrate self-oscillating tapping mode AFM. The cantilever's integrated piezoelectric film serves as the frequency-determining component of an oscillator circuit. The circuit oscillates the cantilever near its resonant frequency by applying positive feedback to the film. We present images and force-distance curves using both self-sensing and self-oscillating techniques. Finally, high-speed tapping mode imaging in liquid, where electric components of the cantilever require insulation, is demonstrated. Three cantilever coating schemes are tested. The insulated microactuator is used to simultaneously vibrate and actuate the cantilever over topographical features. Preliminary images in water and saline are presented, including one taken at 75.5 μm/s - a threefold improvement in bandwidth versus conventional piezotube actuators

  14. Realization of cantilever arrays for parallel proximity imaging

    International Nuclear Information System (INIS)

    Sarov, Y; Ivanov, Tz; Frank, A; Zoellner, J-P; Nikolov, N; Rangelow, I W

    2010-01-01

    This paper reports on the fabrication and characterisation of self-actuating, and self-sensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.

  15. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

    Directory of Open Access Journals (Sweden)

    Xinxin Li

    2009-01-01

    Full Text Available The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.

  16. Three Dimensional Parametric Analyses on Effect of Fibre Orientation for Stress Concentration Factor in Fibrous Composite Cantilever Plate with Central Circular Hole under Transverse Loading

    Directory of Open Access Journals (Sweden)

    Nitin Jain

    2012-10-01

    Full Text Available Normal 0 false false false EN-IN X-NONE X-NONE ABSTRACT: A number of analytical and numerical techniques are available for the two dimensional study of stress concentration around the hole(s in isotropic and composite plates subjected to in-plane or transverse loading conditions. The information on the techniques for three dimensional analyses of stress concentration factor (SCF around the hole in isotropic and composite plates subjected to transverse loading conditions is, however, limited. The present work emphasizes on the effect of fibre orientation (q on the stress concentration factor in fibrous composite plates with central circular hole under transverse static loading condition. The work is carried out for cantilever fibrous composite plates. The effects of thickness -to- width (T/A and diameter-to-width (D/A ratios upon SCF at different fibre orientation are studied. Plates of four different composite materials were considered for hole analysis in order to determine the sensitivity of SCF with elastic constants. Deflections in transverse direction were calculated and analysed. All results are presented in graphical form and discussed. The finite element formulation and its analysis were carried out using ANSYS package.ABSTRAK: Terdapat pelbagai teknik analitikal dan numerical untuk kajian tumpuan tegasan dua dimensi di sekeliling lubang-lubang dalam komposit isotropik dan plat pada satah atau keadaan bebanan melintang. Bagaimanapun, maklumat mengenai kaedah analisis tiga dimensi untuk faktor ketumpatan tegasan (SCF sekitar lubang dalam komposit isotropik dan plat pada keadaan bebanan melintang adalah terhad. Kertas ini menekankan kesan orientasi gentian (q pada faktor tumpuan tegasan dalam komposit plat bergentian dengan lubang berpusat di bawah keadaan bebanan melintang. Kajian ini dilkukan untuk cantilever plat komposit bergentian. Kesan ketebalan terhadap kelebaran plat (T/A dan diameter terhadap kelebaran komposit (D/A dengan SCF

  17. A more comprehensive modeling of atomic force microscope cantilever

    International Nuclear Information System (INIS)

    Mahdavi, M.H.; Farshidianfar, A.; Tahani, M.; Mahdavi, S.; Dalir, H.

    2008-01-01

    This paper focuses on the development of a complete model of an atomic force microscope (AFM) micro-cantilever beam, based on considering the effects of four major factors in modeling the cantilever. They are: rotary inertia and shear deformation of the beam and mass and rotary inertia of the tip. A method based on distributed-parameter modeling approach is proposed to solve the governing equations. The comparisons generally show a very good agreement between the present results and the results of other investigators. As expected, rotary inertia and shear deformation of the beam decrease resonance frequency especially at high ratio of cantilever thickness to its length, and it is relatively more pronounced for higher-order frequencies, than lower ones. Mass and rotary inertia of the tip have similar effects when the mass-ratio of the tip to the cantilever is high. Moreover, the influence of each of these four factors, thickness of the cantilever, density of the tip and inclination of the cantilever on the resonance frequencies has been investigated, separately. It is felt that this work might help the engineers in reducing AFM micro-cantilever design time, by providing insight into the effects of various parameters with the micro-cantilever.

  18. High mechanical Q-factor measurements on silicon bulk material

    Energy Technology Data Exchange (ETDEWEB)

    Schwarz, Christian; Nawrodt, Ronny; Heinert, Daniel; Schroeter, Anja; Neubert, Ralf; Thuerk, Matthias; Vodel, Wolfgang; Seidel, Paul [Institut fuer Festkoerperphysik, Helmholtzweg 5, D-07743 Jena (Germany); Tuennermann, Andreas [Institut fuer Angewandte Physik, Albert-Einstein-Strasse 15, D-07745 Jena (Germany)

    2008-07-01

    The direct observation of gravitational waves is one of the biggest challenges in science. Current detectors are limited by different kinds of noise. One of the fundamental noise sources is thermal noise arising from the optical components. One of the most promising attempts to reduce the thermal noise contribution in future detectors will be the use of high Q-factor materials at cryogenic temperatures. Silicon seems to be the most interesting material due to its excellent optical and thermal properties. We present high Q-factor measurements on bulk samples of high purity silicon in a temperature range from 5 to 300 K. The sample dimensions vary between 76.2 mm x 12..75 mm. The Q-factor exceeds 4.10{sup 8} at 6 K. The influence of the crystal orientation, doping and the sample preparation on the Q-factor is discussed.

  19. Optimised cantilever biosensor with piezoresistive read-out

    DEFF Research Database (Denmark)

    Rasmussen, Peter; Thaysen, J.; Hansen, Ole

    2003-01-01

    We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well sui...

  20. Quality factor improvement of silicon nitride micro string resonators

    DEFF Research Database (Denmark)

    Schmid, Silvan; Malm, Bjarke; Boisen, Anja

    2011-01-01

    Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed...... by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor...

  1. Graphene cantilever under Casimir force

    Science.gov (United States)

    Derras-Chouk, Amel; Chudnovsky, Eugene M.; Garanin, Dmitry A.; Jaafar, Reem

    2018-05-01

    The stability of graphene cantilever under Casimir attraction to an underlying conductor is investigated. The dependence of the instability threshold on temperature and flexural rigidity is obtained. Analytical work is supplemented by numerical computation of the critical temperature above which the graphene cantilever irreversibly bends down and attaches to the conductor. The geometry of the attachment and exfoliation of the graphene sheet is discussed. It is argued that graphene cantilever can be an excellent tool for precision measurements of the Casimir force.

  2. Assessment on thermoelectric power factor in silicon nanowire networks

    Energy Technology Data Exchange (ETDEWEB)

    Lohn, Andrew J.; Kobayashi, Nobuhiko P. [Baskin School of Engineering, University of California Santa Cruz, CA (United States); Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz, NASA Ames Research Center, Moffett Field, CA (United States); Coleman, Elane; Tompa, Gary S. [Structured Materials Industries, Inc., Piscataway, NJ (United States)

    2012-01-15

    Thermoelectric devices based on three-dimensional networks of highly interconnected silicon nanowires were fabricated and the parameters that contribute to the power factor, namely the Seebeck coefficient and electrical conductivity were assessed. The large area (2 cm x 2 cm) devices were fabricated at low cost utilizing a highly scalable process involving silicon nanowires grown on steel substrates. Temperature dependence of the Seebeck coefficient was found to be weak over the range of 20-80 C at approximately -400 {mu}V/K for unintentionally doped devices and {+-}50 {mu}V/K for p-type and n-type devices, respectively. (Copyright copyright 2012 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  3. High mechanical Q-factor measurements on silicon bulk samples

    Energy Technology Data Exchange (ETDEWEB)

    Nawrodt, R; Zimmer, A; Koettig, T; Schwarz, C; Heinert, D; Hudl, M; Neubert, R; Thuerk, M; Nietzsche, S; Vodel, W; Seidel, P [Friedrich-Schiller-Universitaet, Institut fuer Festkoerperphysik, Helmholtzweg 5, D-07743 Jena (Germany); Tuennermann, A [Friedrich-Schiller-Universitaet, Institut fuer Angewandte Physik, Max-Wien-Platz 1, D-07743 Jena (Germany)], E-mail: ronny.nawrodt@uni-jena.de

    2008-07-15

    Future gravitational wave detectors will be limited by different kinds of noise. Thermal noise from the coatings and the substrate material will be a serious noise contribution within the detection band of these detectors. Cooling and the use of a high mechanical Q-factor material as a substrate material will reduce the thermal noise contribution from the substrates. Silicon is one of the most interesting materials for a third generation cryogenic detector. Due to the fact that the coefficient of thermal expansion vanishes at 18 and 125 K the thermoelastic contribution to the thermal noise will disappear. We present a systematic analysis of the mechanical Q-factor at low temperatures between 5 and 300 K on bulk silicon (100) samples which are boron doped. The thickness of the cylindrical samples is varied between 6, 12, 24, and 75mm with a constant diameter of 3 inches. For the 75mm substrate a comparison between the (100) and the (111) orientation is presented. In order to obtain the mechanical Q-factor a ring-down measurement is performed. Thus, the substrate is excited to resonant vibrations by means of an electrostatic driving plate and the subsequent ring-down is recorded using a Michelson-like interferometer. The substrate itself is suspended as a pendulum by means of a tungsten wire loop. All measurements are carried out in a special cryostat which provides a temperature stability of better than 0.1K between 5 and 300K during the experiment. The influence of the suspension on the measurements is experimentally investigated and discussed. At 5.8K a highest Q-factor of 4.5 x 10{sup 8} was achieved for the 14.9 kHz mode of a silicon (100) substrate with a diameter of 3 inches and a thickness of 12 mm.

  4. Design and Fabrication of Piezoresistive Based Encapsulated Poly-Si Cantilevers for Bio/chemical Sensing

    Science.gov (United States)

    Krishna, N. P. Vamsi; Murthy, T. R. Srinivasa; Reddy, K. Jayaprakash; Sangeeth, K.; Hegde, G. M.

    Cantilever-based sensing is a growing research field not only within micro regime but also in nano technology. The technology offers a method for rapid, on-line and in-situ monitoring of specific bio/chemical substances by detecting the nanomechanical responses of a cantilever sensor. Cantilever with piezoresistive based detection scheme is more attractive because of its electronics compatibility. Majority of commercially available micromachined piezoresistive sensors are bulk micromachined devices and are fabricated using single crystal silicon wafers. As substrate properties are not important in surface micromachining, the expensive silicon wafers can be replaced by cheaper substrates, such as poly-silicon, glass or plastic. Here we have designed SU-8 based bio/chemical compatible micro electro mechanical device that includes an encapsulated polysilicon piezoresistor for bio/chemical sensing. In this paper we report the design, fabrication and analysis of the encapsulated poly-Si cantilevers. Design and theoretical analysis are carried out using Finite Element Analysis software. For fabrication of poly-silicon piezoresistive cantilevers we followed the surface micromachining process steps. Preliminary characterization of the cantilevers is presented.

  5. SU-8 hollow cantilevers for AFM cell adhesion studies

    Science.gov (United States)

    Martinez, Vincent; Behr, Pascal; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva; Vörös, Janos; Zambelli, Tomaso

    2016-05-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m-1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification.

  6. SU-8 hollow cantilevers for AFM cell adhesion studies

    International Nuclear Information System (INIS)

    Martinez, Vincent; Behr, Pascal; Vörös, Janos; Zambelli, Tomaso; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva

    2016-01-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m −1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification. (paper)

  7. Chemical sensor with oscillating cantilevered probe

    Science.gov (United States)

    Adams, Jesse D

    2013-02-05

    The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

  8. Investigation of polymer derived ceramics cantilevers for application of high speed atomic force microscopy

    Science.gov (United States)

    Wu, Chia-Yun

    High speed Atomic Force Microscopy (AFM) has a wide variety of applications ranging from nanomanufacturing to biophysics. In order to have higher scanning speed of certain AFM modes, high resonant frequency cantilevers are needed; therefore, the goal of this research is to investigate using polymer derived ceramics for possible applications in making high resonant frequency AFM cantilevers using complex cross sections. The polymer derived ceramic that will be studied, is silicon carbide. Polymer derived ceramics offer a potentially more economic fabrication approach for MEMS due to their relatively low processing temperatures and ease of complex shape design. Photolithography was used to make the desired cantilever shapes with micron scale size followed by a wet etching process to release the cantilevers from the substrates. The whole manufacturing process we use borrow well-developed techniques from the semiconducting industry, and as such this project also could offer the opportunity to reduce the fabrication cost of AFM cantilevers and MEMS in general. The characteristics of silicon carbide made from the precursor polymer, SMP-10 (Starfire Systems), were studied. In order to produce high qualities of silicon carbide cantilevers, where the major concern is defects, proper process parameters needed to be determined. Films of polymer derived ceramics often have defects due to shrinkage during the conversion process. Thus control of defects was a central issue in this study. A second, related concern was preventing oxidation; the polymer derived ceramics we chose is easily oxidized during processing. Establishing an environment without oxygen in the whole process was a significant challenge in the project. The optimization of the parameters for using photolithography and wet etching process was the final and central goal of the project; well established techniques used in microfabrication were modified for use in making the cantilever in the project. The techniques

  9. Measurement of Mechanical Properties of Cantilever Shaped Materials

    Directory of Open Access Journals (Sweden)

    Thomas Thundat

    2008-05-01

    Full Text Available Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young’s modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature

  10. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

    Science.gov (United States)

    Mathew, Ribu; Ravi Sankar, A.

    2018-06-01

    In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.[Figure not available: see fulltext.

  11. Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Wu, Wenze; Uhde, Erik; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%.

  12. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al; Jabbour, Ghassan E.

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films

  13. Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

    International Nuclear Information System (INIS)

    Yang, Yongliang; Ma, Eric Yue; Cui, Yong-Tao; Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael; Shen, Zhi-Xun; Haemmerli, Alexandre; Harjee, Nahid; Pruitt, Beth L

    2014-01-01

    This paper presents the design and fabrication of piezoresistive cantilever probes for microwave impedance microscopy (MIM) to enable simultaneous topographic and electrical imaging. Plasma enhanced chemical vapor deposited Si 3 N 4  cantilevers with a shielded center conductor line and nanoscale conductive tip apex are batch fabricated on silicon-on-insulator wafers. Doped silicon piezoresistors are integrated at the root of the cantilevers to sense their deformation. The piezoresistive sensitivity is 2 nm for a bandwidth of 10 kHz, enabling topographical imaging with reasonable speed. The aluminum center conductor has a low resistance (less than 5 Ω) and small capacitance (∼1.7 pF) to ground; these parameters are critical for high sensitivity MIM imaging. High quality piezoresistive topography and MIM images are simultaneously obtained with the fabricated probes at ambient and cryogenic temperatures. These new piezoresistive probes remarkably broaden the horizon of MIM for scientific applications by operating with an integrated feedback mechanism at low temperature and for photosensitive samples. (paper)

  14. A closed-loop system for frequency tracking of piezoresistive cantilever sensors

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Zhang, Qing; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    A closed loop circuit capable of tracking resonant frequencies for MEMS-based piezoresistive cantilever resonators is developed in this work. The proposed closed-loop system is mainly based on a phase locked loop (PLL) circuit. In order to lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator (VCO) is locked to the phase of the input reference signal of the cantilever sensor. In addition to the PLL component, an instrumentation amplifier and an active low pass filter (LPF) are connected to the system for gaining the amplitude and reducing the noise of the cantilever output signals. The LPF can transform a rectangular signal into a sinusoidal signal with voltage amplitudes ranging from 5 to 10 V which are sufficient for a piezoactuator input (i.e., maintaining a large output signal of the cantilever sensor). To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is utilized for actuating the cantilever into resonance. Implementation of this closed loop system is used to track the resonant frequency of a silicon cantilever-based sensor resonating at 9.4 kHz under a cross-sensitivity test of ambient temperature. The changes of the resonant frequency are interpreted using a frequency counter connected to the system. From the experimental results, the temperature sensitivity and coefficient of the employed sensor are 0.3 Hz/°C and 32.8 ppm/°C, respectively. The frequency stability of the system can reach up to 0.08 Hz. The development of this system will enable real-time nanoparticle monitoring systems and provide a miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors.

  15. Intrinsically aligned chemo-mechanical functionalization of twin cantilever structures

    International Nuclear Information System (INIS)

    Toffoli, V; Esch, F; Melli, M; Pozzato, A; Tormen, M; Lazzarino, M; Cataruzza, F; Carrato, S; Scoles, G

    2008-01-01

    Mechanical oscillators became a main focus of research in recent years for potential applications in biomolecule detectors. We recently demonstrated the feasibility of a scheme based on twin cantilevers with a sensitivity down to the single molecule. This approach is extremely promising under the condition that the two terminals of the device can be functionalized with high selectivity and nanometric accuracy by linker molecules. Here we demonstrate a chemo-mechanical method to achieve the intrinsically aligned functionalization of two silicon surfaces, which can be separated by a gap controllable with nanometric precision. The chemical binding of the target molecules in the selected position is obtained through a cycloaddition reaction which exploits the reactivity of the freshly cleaved surfaces that form when the cantilever gap is created. The general validity of this approach is shown by the use in different chemical environments of two compounds with different reactive functional groups.

  16. Polymeric Cantilever Arrays for Biosensing Applications

    DEFF Research Database (Denmark)

    Calleja, M.; Tamayo, J.; Johansson, Alicia

    2003-01-01

    We report the fabrication of arrays of polymeric cantilevers for biochemistry applications. The cantilevers are fabricated in the polymer SU-8. The use of a polymer as the component material for the cantilevers provides the sensors with very high sensitivity due to convenient mechanical material...... properties. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. The method allows obtaining well-controlled and uniform mechanical properties of the cantilevers. The elastic constant of the cantilevers was measured, and their dynamic response...

  17. Design optimization of piezoresistive cantilevers for force sensing in air and water

    Science.gov (United States)

    Doll, Joseph C.; Park, Sung-Jin; Pruitt, Beth L.

    2009-01-01

    Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrated noise over the bandwidth of interest. Existing analytical design methods are insufficient for modeling complex dopant profiles, design constraints, and nonlinear phenomena such as damping in fluid. Here we present an optimization method based on an analytical piezoresistive cantilever model. We use an existing iterative optimizer to minimimize a performance goal, such as minimum detectable force. The design tool is available as open source software. Optimal cantilever design and performance are found to strongly depend on the measurement bandwidth and the constraints applied. We discuss results for silicon piezoresistors fabricated by epitaxy and diffusion, but the method can be applied to any dopant profile or material which can be modeled in a similar fashion or extended to other microelectromechanical systems. PMID:19865512

  18. Cantilevered probe detector with piezoelectric element

    Science.gov (United States)

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2013-04-30

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  19. Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

    DEFF Research Database (Denmark)

    Xu, R.; Lei, A.; Christiansen, T. L.

    2011-01-01

    We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material...

  20. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    Energy Technology Data Exchange (ETDEWEB)

    Schmidsfeld, A. von, E-mail: avonschm@uos.de; Reichling, M., E-mail: reichling@uos.de [Fachbereich Physik, Universität Osnabrück, Barbarastraße 7, 49076 Osnabrück (Germany)

    2015-09-21

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavity via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.

  1. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    Energy Technology Data Exchange (ETDEWEB)

    Sader, John E. [Department of Mathematics and Statistics, University of Melbourne, Victoria 3010 (Australia); Kavli Nanoscience Institute and Department of Physics, California Institute of Technology, Pasadena, California 91125 (United States); Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J. [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Monty, Jason P.; Marusic, Ivan [Department of Mechanical Engineering, University of Melbourne, Victoria 3010 (Australia); Wei Xingzhan; Mulvaney, Paul [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Bio21 Institute, University of Melbourne, Victoria 3010 (Australia); Crawford, Simon A. [School of Botany, University of Melbourne, Victoria 3010 (Australia); Friend, James R. [Melbourne Centre for Nanofabrication, Clayton, Victoria 3800 (Australia); MicroNanophysics Research Laboratory, RMIT University, Melbourne, Victoria 3001 (Australia)

    2012-10-15

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  2. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    International Nuclear Information System (INIS)

    Sader, John E.; Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J.; Monty, Jason P.; Marusic, Ivan; Wei Xingzhan; Mulvaney, Paul; Crawford, Simon A.; Friend, James R.

    2012-01-01

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  3. Chemomechanical nanolithography: nanografting on silicon and factors impacting linewidth.

    Science.gov (United States)

    Lee, Michael V; Hoffman, Melinda Tonks; Barnett, Katherine; Geiss, John-Mark; Smentkowski, Vincent S; Linford, Matthew R; Davis, Robert C

    2006-06-01

    We present a two-fold extension of previous work on Atomic Force Microscope-based chemomechanical functionalization: (1) chemomechanical nanografting, which extends chemomechanical functionalization to a more stable initial surface, and (2) linewidth studies that show the impact of force and Atomic Force Microscope probe tip wear on patterning resolution. Alkene, alcohol, and alkyl halide molecules were nanografted to silicon and imaged with in situ atomic force microscopy, time-of-flight secondary ion mass spectrometry with Automated eXpert Spectrum Image Analysis, and scanning electron microscopy. Chemomechanical nanografting demonstrated linewidths down to 50 nm. Lines written on hydrogen-terminated silicon were used to explore the impact of tip radius and tip wear on linewidth when using Si3N4 coated tips.

  4. Fabrication of resonant micro cantilevers with integrated transparent fluidic channel

    DEFF Research Database (Denmark)

    Khan, Faheem; Schmid, Silvan; Davis, Zachary James

    2011-01-01

    Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density...

  5. Cantilevers orthodontics forces measured by fiber sensors

    Science.gov (United States)

    Schneider, Neblyssa; Milczewski, Maura S.; de Oliveira, Valmir; Guariza Filho, Odilon; Lopes, Stephani C. P. S.; Kalinowski, Hypolito J.

    2015-09-01

    Fibers Bragg Gratings were used to evaluate the transmission of the forces generates by orthodontic mechanic based one and two cantilevers used to move molars to the upright position. The results showed levels forces of approximately 0,14N near to the root of the molar with one and two cantilevers.

  6. Cantilever sensors: Nanomechanical tools for diagnostics

    DEFF Research Database (Denmark)

    Datar, R.; Kim, S.; Jeon, S.

    2009-01-01

    Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science and microfab......Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science...... and microfabrication technology for the label-free detection of biological molecules, allowing miniaturization. Molecular adsorption, when restricted to a single side of a deformable cantilever beam, results in measurable bending of the cantilever. This nanoscale deflection is caused by a variation in the cantilever...... surface stress due to biomolecular interactions and can be measured by optical or electrical means, thereby reporting on the presence of biomolecules. Biological specificity in detection is typically achieved by immobilizing selective receptors or probe molecules on one side of the cantilever using...

  7. Modeling silicon diode energy response factors for use in therapeutic photon beams.

    Science.gov (United States)

    Eklund, Karin; Ahnesjö, Anders

    2009-10-21

    Silicon diodes have good spatial resolution, which makes them advantageous over ionization chambers for dosimetry in fields with high dose gradients. However, silicon diodes overrespond to low-energy photons, that are more abundant in scatter which increase with large fields and larger depths. We present a cavity-theory-based model for a general response function for silicon detectors at arbitrary positions within photon fields. The model uses photon and electron spectra calculated from fluence pencil kernels. The incident photons are treated according to their energy through a bipartition of the primary beam photon spectrum into low- and high-energy components. Primary electrons from the high-energy component are treated according to Spencer-Attix cavity theory. Low-energy primary photons together with all scattered photons are treated according to large cavity theory supplemented with an energy-dependent factor K(E) to compensate for energy variations in the electron equilibrium. The depth variation of the response for an unshielded silicon detector has been calculated for 5 x 5 cm(2), 10 x 10 cm(2) and 20 x 20 cm(2) fields in 6 and 15 MV beams and compared with measurements showing that our model calculates response factors with deviations less than 0.6%. An alternative method is also proposed, where we show that one can use a correlation with the scatter factor to determine the detector response of silicon diodes with an error of less than 3% in 6 MV and 15 MV photon beams.

  8. Modeling silicon diode energy response factors for use in therapeutic photon beams

    International Nuclear Information System (INIS)

    Eklund, Karin; Ahnesjoe, Anders

    2009-01-01

    Silicon diodes have good spatial resolution, which makes them advantageous over ionization chambers for dosimetry in fields with high dose gradients. However, silicon diodes overrespond to low-energy photons, that are more abundant in scatter which increase with large fields and larger depths. We present a cavity-theory-based model for a general response function for silicon detectors at arbitrary positions within photon fields. The model uses photon and electron spectra calculated from fluence pencil kernels. The incident photons are treated according to their energy through a bipartition of the primary beam photon spectrum into low- and high-energy components. Primary electrons from the high-energy component are treated according to Spencer-Attix cavity theory. Low-energy primary photons together with all scattered photons are treated according to large cavity theory supplemented with an energy-dependent factor K(E) to compensate for energy variations in the electron equilibrium. The depth variation of the response for an unshielded silicon detector has been calculated for 5 x 5 cm 2 , 10 x 10 cm 2 and 20 x 20 cm 2 fields in 6 and 15 MV beams and compared with measurements showing that our model calculates response factors with deviations less than 0.6%. An alternative method is also proposed, where we show that one can use a correlation with the scatter factor to determine the detector response of silicon diodes with an error of less than 3% in 6 MV and 15 MV photon beams.

  9. Oscillations of end loaded cantilever beams

    International Nuclear Information System (INIS)

    Macho-Stadler, E; Elejalde-García, M J; Llanos-Vázquez, R

    2015-01-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam. (paper)

  10. Oscillations of end loaded cantilever beams

    Science.gov (United States)

    Macho-Stadler, E.; Elejalde-García, M. J.; Llanos-Vázquez, R.

    2015-09-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam.

  11. Finite-Element Simulation of Cantilever Vibrations in Atomic Force Acoustic Microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Beltran, F J Espinoza [Centro de Investigacion y Estudios Avanzados del IPN. Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico); Scholz, T [Hamburg University of Technology, Institute of Advanced Ceramics, Denickestrasse 15, D-21073 Hamburg (Germany); Schneider, G A [Hamburg University of Technology, Institute of Advanced Ceramics, Denickestrasse 15, D-21073 Hamburg (Germany); Munoz-Saldana, J [Centro de Investigacion y Estudios Avanzados del IPN. Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico); Rabe, U [Fraunhofer Institute for Non-Destructive Testing (IZFP), Bldg. E3.1, University, D-66123 Saarbruecken (Germany); Arnold, W [Fraunhofer Institute for Non-Destructive Testing (IZFP), Bldg. E3.1, University, D-66123 Saarbruecken (Germany)

    2007-03-15

    Atomic Force Acoustic Microscopy has been proven to be a powerful technique for materials characterization with nanoscale lateral resolution. This technique allows one to obtain images of elastic properties of materials. By means of spectroscopic measurements of the tip-sample contact-resonance frequencies, it is possible to obtain quantitative values of the mechanical stiffness of the sample surface. For quantitative analysis a reliable relation between the spectroscopic data and the contact stiffness is required based on a correct geometrical model of the cantilever vibrations. This model must be precise enough for predicting the resonance frequencies of the tip-sample interaction when excited over a wide range of frequencies. Analytical models have served as a good reference for understanding the vibrational behavior of the AFM cantilever. They have certain limits, however, for reproducing the tip-sample contact-resonances due to the cantilever geometries used. For obtaining the local elastic modulus of samples, it is necessary to know the tip-sample contact area which is usually obtained by a calibration procedure with a reference sample. In this work we show that finiteelement modeling may be used to replace the analytical inversion procedure for AFAM data. First, the three first bending modes of cantilever resonances were used for finding the geometrical dimension of the cantilever employed. Then the normal and in-plane stiffness of the sample were obtained for each measurement on the surface to be measured. A calibration was needed to obtain the tip position of the cantilever by making measurements on a sample with known surface elasticity, here crystalline silicon. The method developed in this work was applied to AFAM measurements on silicon, zerodur, and strontium titanate.

  12. Modular design of AFM probe with sputtered silicon tip

    DEFF Research Database (Denmark)

    Rasmussen, Peter; Thaysen, Jacob; Bouwstra, Siebe

    2001-01-01

    of the thin films constituting the cantilever. The AFM probe has an integrated tip made of a thick sputtered silicon layer, which is deposited after the probe has been defined and just before the cantilevers are released. The tips are so-called rocket tips made by reactive ion etching. We present probes...

  13. Fabrication and characterization of large arrays of mesoscopic gold rings on large-aspect-ratio cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Ngo, D. Q.; Petković, I., E-mail: ivana.petkovic@yale.edu; Lollo, A. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Castellanos-Beltran, M. A. [National Institute for Standards and Technology, Boulder, Colorado 80305 (United States); Harris, J. G. E. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Department of Applied Physics, Yale University, New Haven, Connecticut 06520 (United States)

    2014-10-15

    We have fabricated large arrays of mesoscopic metal rings on ultrasensitive cantilevers. The arrays are defined by electron beam lithography and contain up to 10{sup 5} rings. The rings have a circumference of 1 μm, and are made of ultrapure (6N) Au that is deposited onto a silicon-on-insulator wafer without an adhesion layer. Subsequent processing of the SOI wafer results in each array being supported at the end of a free-standing cantilever. To accommodate the large arrays while maintaining a low spring constant, the cantilevers are nearly 1 mm in both lateral dimensions and 100 nm thick. The extreme aspect ratio of the cantilevers, the large array size, and the absence of a sticking layer are intended to enable measurements of the rings' average persistent current in the presence of relatively small magnetic fields. We describe the motivation for these measurements, the fabrication of the devices, and the characterization of the cantilevers' mechanical properties. We also discuss the devices' expected performance in measurements of .

  14. Residual stress and Young's modulus of pulsed laser deposited PZT thin films: Effect of thin film composition and crystal direction of Si cantilevers

    NARCIS (Netherlands)

    Nazeer, H.; Nguyen, Duc Minh; Rijnders, Augustinus J.H.M.; Abelmann, Leon; Sardan Sukas, Ö.

    2016-01-01

    We investigated the residual stress and Young's modulus of Pb(ZrxTi1 - x)O3 (PZT) thin films with a (110) preferred orientation and a composition x ranging from 0.2 to 0.8. The films are grown by pulsed laser deposition on silicon cantilevers aligned along the <110> and <100> silicon crystal

  15. Correction factors to convert microdosimetry measurements in silicon to tissue in 12C ion therapy.

    Science.gov (United States)

    Bolst, David; Guatelli, Susanna; Tran, Linh T; Chartier, Lachlan; Lerch, Michael L F; Matsufuji, Naruhiro; Rosenfeld, Anatoly B

    2017-03-21

    Silicon microdosimetry is a promising technology for heavy ion therapy (HIT) quality assurance, because of its sub-mm spatial resolution and capability to determine radiation effects at a cellular level in a mixed radiation field. A drawback of silicon is not being tissue-equivalent, thus the need to convert the detector response obtained in silicon to tissue. This paper presents a method for converting silicon microdosimetric spectra to tissue for a therapeutic 12 C beam, based on Monte Carlo simulations. The energy deposition spectra in a 10 μm sized silicon cylindrical sensitive volume (SV) were found to be equivalent to those measured in a tissue SV, with the same shape, but with dimensions scaled by a factor κ equal to 0.57 and 0.54 for muscle and water, respectively. A low energy correction factor was determined to account for the enhanced response in silicon at low energy depositions, produced by electrons. The concept of the mean path length [Formula: see text] to calculate the lineal energy was introduced as an alternative to the mean chord length [Formula: see text] because it was found that adopting Cauchy's formula for the [Formula: see text] was not appropriate for the radiation field typical of HIT as it is very directional. [Formula: see text] can be determined based on the peak of the lineal energy distribution produced by the incident carbon beam. Furthermore it was demonstrated that the thickness of the SV along the direction of the incident 12 C ion beam can be adopted as [Formula: see text]. The tissue equivalence conversion method and [Formula: see text] were adopted to determine the RBE 10 , calculated using a modified microdosimetric kinetic model, applied to the microdosimetric spectra resulting from the simulation study. Comparison of the RBE 10 along the Bragg peak to experimental TEPC measurements at HIMAC, NIRS, showed good agreement. Such agreement demonstrates the validity of the developed tissue equivalence correction factors and of

  16. First application of multilayer graphene cantilever for laser photoacoustic detection

    Czech Academy of Sciences Publication Activity Database

    Suchánek, Jan; Dostál, Michal; Vlasáková, T.; Janda, Pavel; Klusáčková, Monika; Kubát, Pavel; Nevrlý, V.; Bitala, P.; Civiš, Svatopluk; Zelinger, Zdeněk

    2017-01-01

    Roč. 101, APR 2017 (2017), s. 9-14 ISSN 0263-2241 R&D Projects: GA ČR(CZ) GA14-14696S; GA MŠk(CZ) LD14022 Grant - others:COST(XE) TD1105 Institutional support: RVO:61388955 Keywords : Cantilever * Multilayer graphene * Photoacoustic detection * Methanol detection Subject RIV: CF - Physical ; Theoretical Chemistry OBOR OECD: Physical chemistry Impact factor: 2.359, year: 2016

  17. Three-way flexible cantilever probes for static contact

    DEFF Research Database (Denmark)

    Wang, Fei; Petersen, Dirch Hjorth; Jensen, Helle Vendelbo

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze...

  18. Gamma non-ionizing energy loss: Comparison with the damage factor in silicon devices

    Science.gov (United States)

    El Allam, E.; Inguimbert, C.; Meulenberg, A.; Jorio, A.; Zorkani, I.

    2018-03-01

    The concept of non-ionizing energy loss (NIEL) has been demonstrated to be a successful approach to describe the displacement damage effects in silicon materials and devices. However, some discrepancies exist in the literature between experimental damage factors and theoretical NIELs. 60Co gamma rays having a low NIEL are an interesting particle source that can be used to validate the NIEL scaling approach. This paper presents different 60Co gamma ray NIEL values for silicon targets. They are compared with the radiation-induced increase in the thermal generation rate of carriers per unit fluence. The differences between the different models, including one using molecular dynamics, are discussed.

  19. Electrical Control of g-Factor in a Few-Hole Silicon Nanowire MOSFET.

    Science.gov (United States)

    Voisin, B; Maurand, R; Barraud, S; Vinet, M; Jehl, X; Sanquer, M; Renard, J; De Franceschi, S

    2016-01-13

    Hole spins in silicon represent a promising yet barely explored direction for solid-state quantum computation, possibly combining long spin coherence, resulting from a reduced hyperfine interaction, and fast electrically driven qubit manipulation. Here we show that a silicon-nanowire field-effect transistor based on state-of-the-art silicon-on-insulator technology can be operated as a few-hole quantum dot. A detailed magnetotransport study of the first accessible hole reveals a g-factor with unexpectedly strong anisotropy and gate dependence. We infer that these two characteristics could enable an electrically driven g-tensor-modulation spin resonance with Rabi frequencies exceeding several hundred mega-Hertz.

  20. Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

    NARCIS (Netherlands)

    Nazeer, H.; Abelmann, Leon; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt

    2009-01-01

    This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the

  1. Micromechanical testing of SU-8 cantilevers

    OpenAIRE

    Hopcroft, M; Kramer, T; Kim, G; Takashima, K; Higo, Y; Moore, D; Brugger, J

    2005-01-01

    SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

  2. Photothermal cantilever deflection spectroscopy of a photosensitive polymer

    Energy Technology Data Exchange (ETDEWEB)

    Yun, Minhyuk; Lee, Dongkyu; Jung, Namchul; Jeon, Sangmin [Department of Chemical Engineering, Pohang University of Science and Technology, Pohang (Korea, Republic of); Kim, Seonghwan; Chae, Inseok; Thundat, Thomas [Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta T6G 2V4 (Canada)

    2012-05-14

    The mechanical and chemical information of a poly(methyl methacrylate) (PMMA) film on a microcantilever were simultaneously acquired by photothermal cantilever deflection spectroscopy as a function of ultraviolet (UV) irradiation time. Nanomechanical infrared (IR) spectra from the PMMA-coated microcantilever agreed well with the Fourier transform infrared spectroscopy (FTIR) spectra of PMMA on gold-coated silicon wafer. The decreasing intensities of nanomechanical IR peaks represent chemical as well as mechanical information of UV radiation-induced photodegradation processes in the PMMA which cannot be obtained by a conventional FTIR technique. The observed decrease in the resonance frequency of the microcantilever is related to the change in the Young's modulus of the PMMA under UV exposure.

  3. Microstructuring of piezoresistive cantilevers for gas detection and analysis

    International Nuclear Information System (INIS)

    Sarov, Y.; Sarova, V.; Bitterlich, Ch.; Richter, O.; Guliyev, E.; Zoellner, J.-P.; Rangelow, I. W.; Andok, R.; Bencurova, A.

    2011-01-01

    In this work we report on a design and fabrication of cantilevers for gas detection and analysis. The cantilevers have expanded area of interaction with the gas, while the signal transduction is realized by an integrated piezoresistive deflection sensor, placed at the narrowed cantilever base with highest stress along the cantilever. Moreover, the cantilevers have integrated bimorph micro-actuator detection in a static and dynamic mode. The cantilevers are feasible as pressure, temperature and flow sensors and under chemical functionalization - for gas recognition, tracing and composition analysis. (authors)

  4. Modelling the structure factors and pair distribution functions of amorphous germanium, silicon and carbon

    International Nuclear Information System (INIS)

    Dalgic, Seyfettin; Gonzalez, Luis Enrique; Baer, Shalom; Silbert, Moises

    2002-01-01

    We present the results of calculations of the static structure factor S(k) and the pair distribution function g(r) of the tetrahedral amorphous semiconductors germanium, silicon and carbon using the structural diffusion model (SDM). The results obtained with the SDM for S(k) and g(r) are of comparable quality with those obtained by the unconstrained Reverse Monte Carlo simulations and existing ab initio molecular dynamics simulations for these systems. We have found that g(r) exhibits a small peak, or shoulder, a weak remnant of the prominent third neighbour peak present in the crystalline phase of these systems. This feature has been experimentally found to be present in recently reported high energy X-ray experiments of amorphous silicon (Phys. Rev. B 60 (1999) 13520), as well as in the previous X-ray diffraction of as-evaporated amorphous germanium (Phys. Rev. B 50 (1994) 539)

  5. Modelling the structure factors and pair distribution functions of amorphous germanium, silicon and carbon

    Energy Technology Data Exchange (ETDEWEB)

    Dalgic, Seyfettin; Gonzalez, Luis Enrique; Baer, Shalom; Silbert, Moises

    2002-12-01

    We present the results of calculations of the static structure factor S(k) and the pair distribution function g(r) of the tetrahedral amorphous semiconductors germanium, silicon and carbon using the structural diffusion model (SDM). The results obtained with the SDM for S(k) and g(r) are of comparable quality with those obtained by the unconstrained Reverse Monte Carlo simulations and existing ab initio molecular dynamics simulations for these systems. We have found that g(r) exhibits a small peak, or shoulder, a weak remnant of the prominent third neighbour peak present in the crystalline phase of these systems. This feature has been experimentally found to be present in recently reported high energy X-ray experiments of amorphous silicon (Phys. Rev. B 60 (1999) 13520), as well as in the previous X-ray diffraction of as-evaporated amorphous germanium (Phys. Rev. B 50 (1994) 539)

  6. Cantilever piezoelectric energy harvester with multiple cavities

    International Nuclear Information System (INIS)

    S Srinivasulu Raju; M Umapathy; G Uma

    2015-01-01

    Energy harvesting employing piezoelectric materials in mechanical structures such as cantilever beams, plates, diaphragms, etc, has been an emerging area of research in recent years. The research in this area is also focused on structural tailoring to improve the harvested power from the energy harvesters. Towards this aim, this paper presents a method for improving the harvested power from a cantilever piezoelectric energy harvester by introducing multiple rectangular cavities. A generalized model for a piezoelectric energy harvester with multiple rectangular cavities at a single section and two sections is developed. A method is suggested to optimize the thickness of the cavities and the number of cavities required to generate a higher output voltage for a given cantilever beam structure. The performance of the optimized energy harvesters is evaluated analytically and through experimentation. The simulation and experimental results show that the performance of the energy harvester can be increased with multiple cavities compared to the harvester with a single cavity. (paper)

  7. Self-heating in piezoresistive cantilevers.

    Science.gov (United States)

    Doll, Joseph C; Corbin, Elise A; King, William P; Pruitt, Beth L

    2011-05-30

    We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

  8. Design & fabrication of cantilever array biosensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Thundat, T

    2009-01-01

    Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes......, electronic processing, and even local telemetry on a single chip have the potential of satisfying the need for highly sensitive and selective multiple-target detection in very small samples. Here we will review the design and fabrication process of cantilever-based biosensors....

  9. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films. During the impact, the droplet kinetic energy is transferred into the form of mechanical stress forcing the piezoelectric structure to vibrate. Experimental results show energy of 0.3 μJ per droplet. The scenario of moderate falling drop intensity, i.e. 230 drops per second, yields a total energy of 400 μJ. © 2012 The Institution of Engineering and Technology.

  10. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  11. Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

    DEFF Research Database (Denmark)

    Jiang, Chenhui; Johansen, Tom Keinicke; Jónasson, Sævar Þór

    2011-01-01

    This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC...

  12. Polymeric cantilever-based biosensors with integrated readout

    DEFF Research Database (Denmark)

    Johansson, Alicia; Blagoi, Gabriela; Boisen, Anja

    2006-01-01

    The authors present an SU-8 cantilever chip with integrated piezoresistors for detection of surface stress changes due to adsorption of biomolecules on the cantilever surface. Mercaptohexanol is used as a model biomolecule to study molecular interactions with Au-coated SU-8 cantilevers and surfac...

  13. Enhancement of the power factor in two-phase silicon-boron nanocrystalline alloys

    Energy Technology Data Exchange (ETDEWEB)

    Narducci, Dario; Lorenzi, Bruno [Department of Materials Science, University of Milano Bicocca, Milan (Italy); Zianni, Xanthippe [Department of Aircraft Technologies, Technological Educational Institution of Sterea Ellada, Psachna (Greece); Department of Microelectronics, IAMPPNM, NCSR Demokritos, Athens (Greece); Neophytou, Neophytos [Institute for Microelectronics, TUV, Vienna (Austria); School of Engineering, University of Warwick, Coventry (United Kingdom); Frabboni, Stefano [Department of FIM, University of Modena and Reggio Emilia, Modena (Italy); CNR-Institute of Nanoscience-S3, Modena (Italy); Gazzadi, Gian Carlo [CNR-Institute of Nanoscience-S3, Modena (Italy); Roncaglia, Alberto; Suriano, Francesco [IMM-CNR, Bologna (Italy)

    2014-06-15

    In previous publications it was shown that the precipitation of silicon boride around grain boundaries may lead to an increase of the power factor in nanocrystalline silicon. Such an effect was further explained by computational analyses showing that the formation of an interphase at the grain boundaries along with high boron densities can actually lead to a concurrent increase of the electrical conductivity σ and of the Seebeck coefficient S. In this communication we report recent evidence of the key elements ruling such an unexpected effect. Nanocrystalline silicon films deposited onto a variety of substrates were doped to nominal boron densities in excess of 10{sup 20} cm{sup -3} and were annealed up to 1000 C to promote boride precipitation. Thermoelectric properties were measured and compared with their microstructure. A concurrent increase of σ and S with the carrier density was found only upon formation of an interphase. Its dependency on the film microstructure and on the deposition and processing conditions will be discussed. (copyright 2014 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  14. Near-field optical microscope using a silicon-nitride probe

    NARCIS (Netherlands)

    van Hulst, N.F.; Moers, M.H.P.; Moers, M.H.P.; Noordman, O.F.J.; Noordman, O.F.J.; Tack, R.G.; Segerink, Franciscus B.; Bölger, B.; Bölger, B.

    1993-01-01

    Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging o­n arbitrary surfaces without

  15. Calibration of higher eigenmodes of cantilevers

    International Nuclear Information System (INIS)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger; Lysy, Martin

    2016-01-01

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  16. Microstructure cantilever beam for current measurement

    Directory of Open Access Journals (Sweden)

    M.T.E. Khan

    2010-01-01

    Full Text Available Most microelectromechanical systems (MEMS sensors are based on the microcantilever technology, which uses a broad range of design materials and structures. The benefit ofMEMStechnology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. A free-end cantilever beam with a magnetic material mass has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever beam to an externally-applied magnetic field. The cantilever was designed to form a capacitance transducer, which consisted of variable capacitance where electrical and mechanical energies were exchanged. The aim of this paper was to analyse the system design of the microcantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency, was applied, the cantilever beam exhibited a vibration motion along the vertical axis when placed closer to the line current. This motion created corresponding capacitance changes and generated a voltage output proportional to the capacitive change in the signal-processing circuitry attached to the microcantilever. The equivalent massspring system theory was used to describe and analyse the effect of the natural frequency of the system vibrations and motion due to the applied magnetic field, in a single-degree of freedom. The main application of this microcantilever is in current measurements to develop a non-contact current sensor mote.

  17. Calibration of higher eigenmodes of cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger [Asylum Research, an Oxford Instruments Company, Santa Barbara, California 93117 (United States); Lysy, Martin [Department of Statistics and Actuarial Science, University of Waterloo, Waterloo, Ontario N2L 3G1 (Canada)

    2016-07-15

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  18. Performance Analysis of Wind-Induced Piezoelectric Vibration Bimorph Cantilever for Rotating Machinery

    Directory of Open Access Journals (Sweden)

    Gongbo Zhou

    2015-01-01

    Full Text Available Harvesting the energy contained in the running environment of rotating machinery would be a good way to supplement energy to the wireless sensor. In this paper, we take piezoelectric bimorph cantilever beam with parallel connection mode as energy collector and analyze the factors which can influence the generation performance. First, a modal response theory model is built. Second, the static analysis, modal analysis, and piezoelectric harmonic response analysis of the wind-induced piezoelectric bimorph cantilever beam are given in detail. Finally, an experiment is also conducted. The results show that wind-induced piezoelectric bimorph cantilever beam has low resonant frequency and stable output under the first modal mode and can achieve the maximum output voltage under the resonant condition. The output voltage increases with the increase of the length and width of wind-induced piezoelectric bimorph cantilever beam, but the latter increasing amplitude is relatively smaller. In addition, the output voltage decreases with the increase of the thickness and the ratio of metal substrate to piezoelectric patches thickness. The experiment showed that the voltage amplitude generated by the piezoelectric bimorph cantilever beam can reach the value simulated in ANSYS, which is suitable for actual working conditions.

  19. Investigation on the Quality Factor Limit of the (111 Silicon Based Disk Resonator

    Directory of Open Access Journals (Sweden)

    Xin Zhou

    2018-01-01

    Full Text Available Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED. This paper demonstrates that the TED in a disk resonator that is made of (111 single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111 disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation.

  20. Factors having implications on re-retinal detachments after silicone oil removal

    Directory of Open Access Journals (Sweden)

    Manish P Nagpal

    2012-01-01

    Full Text Available Aim: To investigate factors having implications on re-retinal detachments (reRD after silicone oil removal (SOR. Materials and Methods: A retroprospective study of 412 eyes (with attached retina after vitrectomy with silicone oil for rhegmatogenous RD which underwent SOR was conducted and were followed up for six months after SOR. They were studied for various factors like encirclage, 360° retinopexy, oil emulsification at the time of SOR, duration of oil tamponade and previous retinal surgeries prior to SOR with their implications on reRD after SOR. Results: Encirclage, 360 laser barrage, both, emulsification of oil (P=0.021, P=0.001, P=0.001, P=0.001, respectively were associated with lower risks of reRD after SOR whereas duration of tamponade (P=0.980 was not. Conclusion: Factors like encirclage, 360 retinopexy, their combination, oil emulsification reduced the incidence of re RD after SOR whereas duration of tamponade does not have statistical significant correlation with re RD after SOR.

  1. Development of a microfabricated electrochemical-cantilever hybrid platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Pedersen, Christoffer; Elkjær, Karl

    2011-01-01

    The design and fabrication of a combined electrochemical-cantilever microfluidic system is described. A chip integrating cantilevers with electrodes into a microchannel is presented with the accompanying polymer flow cell. Issues such as electrical and fluid connections are addressed......, electromechanical behavior in ionic solution is investigated, and two uses of the system are demonstrated. First, all cantilevers are functionalized with cysteine, to facilitate detection of Cu2+ ions, then one cantilever is electrochemically cleaned in situ to generate a reference cantilever for differential...

  2. Influence of tip mass on dynamic behavior of cracked cantilever pipe conveying fluid with moving mass

    International Nuclear Information System (INIS)

    Yoon, Han Ik; Son, In Soo

    2005-01-01

    In this paper, we studied about the effect of the open crack and a tip mass on the dynamic behavior of a cantilever pipe conveying fluid with a moving mass. The equation of motion is derived by using Lagrange's equation and analyzed by numerical method. The cantilever pipe is modelled by the Euler-Bernoulli beam theory. The crack section is represented by a local flexibility matrix connecting two undamaged pipe segments. The influences of the crack, the moving mass, the tip mass and its moment of inertia, the velocity of fluid, and the coupling of these factors on the vibration mode, the frequency, and the tip-displacement of the cantilever pipe are analytically clarified

  3. Effect of loose spring skirt mounting position on vibration damping in a multi segment hanging cantilever

    International Nuclear Information System (INIS)

    Nazeer, M.M.; Khan, A.F.; Shah, R.H; Afzal, M.; Ahmed, N.

    2001-01-01

    The loose spring skirt clearance is the major factor effecting the damping and amplitude control of randomly excited vibrations in a vertically hanging cantilever. However, the spring's mounting position also has an important role to play. In this work, the results of computational model as well as that of experimental set-up for various spring mounting positions having optimum annular clearance between skirted member and the skirt are presented and their vibration damping response is analyzed. It is observed that lower is the mounting position, the better is the damping and its maximum value is attained when the bottom end of spring skirt and the hanging cantilever are mutually flushed. (author)

  4. Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for microelectromechanical systems applications

    International Nuclear Information System (INIS)

    Mouro, J.; Gualdino, A.; Chu, V.; Conde, J. P.

    2013-01-01

    Thin-film silicon allows the fabrication of MEMS devices at low processing temperatures, compatible with monolithic integration in advanced electronic circuits, on large-area, low-cost, and flexible substrates. The most relevant thin-film properties for applications as MEMS structural layers are the deposition rate, electrical conductivity, and mechanical stress. In this work, n + -type doped hydrogenated amorphous and nanocrystalline silicon thin-films were deposited by RF-PECVD, and the influence of the hydrogen dilution in the reactive mixture, the RF-power coupled to the plasma, the substrate temperature, and the deposition pressure on the structural, electrical, and mechanical properties of the films was studied. Three different types of silicon films were identified, corresponding to three internal structures: (i) porous amorphous silicon, deposited at high rates and presenting tensile mechanical stress and low electrical conductivity, (ii) dense amorphous silicon, deposited at intermediate rates and presenting compressive mechanical stress and higher values of electrical conductivity, and (iii) nanocrystalline silicon, deposited at very low rates and presenting the highest compressive mechanical stress and electrical conductivity. These results show the combinations of electromechanical material properties available in silicon thin-films and thus allow the optimized selection of a thin silicon film for a given MEMS application. Four representative silicon thin-films were chosen to be used as structural material of electrostatically actuated MEMS microresonators fabricated by surface micromachining. The effect of the mechanical stress of the structural layer was observed to have a great impact on the device resonance frequency, quality factor, and actuation force

  5. Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for microelectromechanical systems applications

    Energy Technology Data Exchange (ETDEWEB)

    Mouro, J.; Gualdino, A.; Chu, V. [Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias (INESC-MN) and IN – Institute of Nanoscience and Nanotechnology, 1000-029 Lisbon (Portugal); Conde, J. P. [Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias (INESC-MN) and IN – Institute of Nanoscience and Nanotechnology, 1000-029 Lisbon (Portugal); Department of Bioengineering, Instituto Superior Técnico (IST), 1049-001 Lisbon (Portugal)

    2013-11-14

    Thin-film silicon allows the fabrication of MEMS devices at low processing temperatures, compatible with monolithic integration in advanced electronic circuits, on large-area, low-cost, and flexible substrates. The most relevant thin-film properties for applications as MEMS structural layers are the deposition rate, electrical conductivity, and mechanical stress. In this work, n{sup +}-type doped hydrogenated amorphous and nanocrystalline silicon thin-films were deposited by RF-PECVD, and the influence of the hydrogen dilution in the reactive mixture, the RF-power coupled to the plasma, the substrate temperature, and the deposition pressure on the structural, electrical, and mechanical properties of the films was studied. Three different types of silicon films were identified, corresponding to three internal structures: (i) porous amorphous silicon, deposited at high rates and presenting tensile mechanical stress and low electrical conductivity, (ii) dense amorphous silicon, deposited at intermediate rates and presenting compressive mechanical stress and higher values of electrical conductivity, and (iii) nanocrystalline silicon, deposited at very low rates and presenting the highest compressive mechanical stress and electrical conductivity. These results show the combinations of electromechanical material properties available in silicon thin-films and thus allow the optimized selection of a thin silicon film for a given MEMS application. Four representative silicon thin-films were chosen to be used as structural material of electrostatically actuated MEMS microresonators fabricated by surface micromachining. The effect of the mechanical stress of the structural layer was observed to have a great impact on the device resonance frequency, quality factor, and actuation force.

  6. Output factor determination for dose measurements in axial and perpendicular planes using a silicon strip detector

    Science.gov (United States)

    Abou-Haïdar, Z.; Bocci, A.; Alvarez, M. A. G.; Espino, J. M.; Gallardo, M. I.; Cortés-Giraldo, M. A.; Ovejero, M. C.; Quesada, J. M.; Arráns, R.; Prieto, M. Ruiz; Vega-Leal, A. Pérez; Nieto, F. J. Pérez

    2012-04-01

    In this work we present the output factor measurements of a clinical linear accelerator using a silicon strip detector coupled to a new system for complex radiation therapy treatment verification. The objective of these measurements is to validate the system we built for treatment verification. The measurements were performed at the Virgin Macarena University Hospital in Seville. Irradiations were carried out with a Siemens ONCOR™ linac used to deliver radiotherapy treatment for cancer patients. The linac was operating in 6 MV photon mode; the different sizes of the fields were defined with the collimation system provided within the accelerator head. The output factor was measured with the silicon strip detector in two different layouts using two phantoms. In the first, the active area of the detector was placed perpendicular to the beam axis. In the second, the innovation consisted of a cylindrical phantom where the detector was placed in an axial plane with respect to the beam. The measured data were compared with data given by a commercial treatment planning system. Results were shown to be in a very good agreement between the compared set of data.

  7. Key Success Factors and Future Perspective of Silicon-Based Solar Cells

    Directory of Open Access Journals (Sweden)

    S. Binetti

    2013-01-01

    Full Text Available Today, after more than 70 years of continued progress on silicon technology, about 85% of cumulative installed photovolatic (PV modules are based on crystalline silicon (c-Si. PV devices based on silicon are the most common solar cells currently being produced, and it is mainly due to silicon technology that the PV has grown by 40% per year over the last decade. An additional step in the silicon solar cell development is ongoing, and it is related to a further efficiency improvement through defect control, device optimization, surface modification, and nanotechnology approaches. This paper attempts to briefly review the most important advances and current technologies used to produce crystalline silicon solar devices and in the meantime the most challenging and promising strategies acting to increase the efficiency to cost/ratio of silicon solar cells. Eventually, the impact and the potentiality of using a nanotechnology approach in a silicon-based solar cell are also described.

  8. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    International Nuclear Information System (INIS)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-01-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials. (paper)

  9. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    Science.gov (United States)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-08-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

  10. Calibration of optical cantilever deflection readers

    International Nuclear Information System (INIS)

    Hu Zhiyu; Seeley, Tim; Kossek, Sebastian; Thundat, Thomas

    2004-01-01

    Because of its ultrahigh sensitivity, the optical lever detection method similar to that used in the atomic force microscope (AFM) has been widely employed as a standard technique for measuring microcantilever deflection. Along with the increasing interest in using the microcantilever as a sensing platform, there is also a requirement for a reliable calibration technique. Many researchers have used the concept of optical lever detection to construct microcantilever deflection readout instruments for chemical, physical, and biological detection. However, without an AFM piezo z scanner, it is very difficult to precisely calibrate these instruments. Here, we present a step-by-step method to conveniently calibrate an instrument using commercially available piezoresistive cantilevers. The experimental results closely match the theoretical calculation. Following this procedure, one can easily calibrate any optical cantilever deflection detection system with high reproducibility, precision, and reliability. A detailed discussion of the optical lever readout system design has been addressed in this article

  11. Orthodontic Traction of Impacted Canine Using Cantilever

    OpenAIRE

    Nakandakari, Cláudia; Gonçalves, João Roberto; Cassano, Daniel Serra; Raveli, Taísa Boamorte; Bianchi, Jonas; Raveli, Dirceu Barnabé

    2016-01-01

    The impaction of the maxillary canines causes relevant aesthetic and functional problems. The multidisciplinary approach to the proper planning and execution of orthodontic traction of the element in question is essential. Many strategies are cited in the literature; among them is the good biomechanical control in order to avoid possible side effects. The aim of this paper is to present a case report in which a superior canine impacted by palatine was pulled out with the aid of the cantilever...

  12. Cantilever steel post damaged by wind

    Directory of Open Access Journals (Sweden)

    Wei Sha

    2014-10-01

    Full Text Available An analysis for the cause of fracture failure of a cantilever steel sign post damaged by wind has been carried out. An unusual cause of failure has been identified, which is the subject of this paper. Microscopy and microanalysis of the fracture surface showed that the failure was due to pre-existing cracks, from the fabrication of the post. This conclusion was reached after detecting and analysing a galvanised layer on the fracture surfaces.

  13. Effect of cantilever geometry on the optical lever sensitivities and thermal noise method of the atomic force microscope.

    Science.gov (United States)

    Sader, John E; Lu, Jianing; Mulvaney, Paul

    2014-11-01

    Calibration of the optical lever sensitivities of atomic force microscope (AFM) cantilevers is especially important for determining the force in AFM measurements. These sensitivities depend critically on the cantilever mode used and are known to differ for static and dynamic measurements. Here, we calculate the ratio of the dynamic and static sensitivities for several common AFM cantilevers, whose shapes vary considerably, and experimentally verify these results. The dynamic-to-static optical lever sensitivity ratio is found to range from 1.09 to 1.41 for the cantilevers studied - in stark contrast to the constant value of 1.09 used widely in current calibration studies. This analysis shows that accuracy of the thermal noise method for the static spring constant is strongly dependent on cantilever geometry - neglect of these dynamic-to-static factors can induce errors exceeding 100%. We also discuss a simple experimental approach to non-invasively and simultaneously determine the dynamic and static spring constants and optical lever sensitivities of cantilevers of arbitrary shape, which is applicable to all AFM platforms that have the thermal noise method for spring constant calibration.

  14. Dynamic state switching in nonlinear multiferroic cantilevers

    Science.gov (United States)

    Wang, Yi; Onuta, Tiberiu-Dan; Long, Christian J.; Lofland, Samuel E.; Takeuchi, Ichiro

    2013-03-01

    We demonstrate read-write-read-erase cyclical mechanical-memory properties of all-thin-film multiferroic heterostructured Pb(Zr0.52Ti0.48) O3 / Fe0.7Ga0.3 cantilevers when a high enough voltage around the resonant frequency of the device is applied on the Pb(Zr0.52Ti0.48) O3 piezo-film. The device state switching process occurs due to the presence of a hysteresis loop in the piezo-film frequency response, which comes from the nonlinear behavior of the cantilever. The reference frequency at which the strain-mediated Fe0.7Ga0.3 based multiferroic device switches can also be tuned by applying a DC magnetic field bias that contributes to the increase of the cantilever effective stiffness. The switching dynamics is mapped in the phase space of the device measured transfer function characteristic for such high piezo-film voltage excitation, providing additional information on the dynamical stability of the devices.

  15. Clinical observation of serum tumor necrosis factor in old patients with silicon-tuberculosis

    International Nuclear Information System (INIS)

    Ye Yixiu; Wang Wei; Liu Weimin; Li Hongmin; Yao Hao; Jiang Ping; Chen Dongjin; Feng Bai

    2001-01-01

    To observe the immune condition of old patients with silicon-tuberculosis, serum TNF was detected in 69 old patients with silicon-tuberculosis by RIA and compared with patients with pulmonary tuberculosis and normal old people. Serum TNF in patients with silicon-tuberculosis or pulmonary tuberculosis was significantly lower than that in normal old people (P < 0.01, P < 0.05). There is no significant difference in TNF between silicon-tuberculosis group and pulmonary tuberculosis group. In conclusion, the immunity of old patients with silicon-tuberculosis or pulmonary tuberculosis was poor, they should be given immunomodulator

  16. Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

    DEFF Research Database (Denmark)

    Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

    2012-01-01

    We present a microelectromechanical system (MEMS) based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. Most piezoelectric energy harvesting devices use a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric...... elements. We show experimental results from two types PZT/PZT harvesting devices, one where the Pb(ZrxTi1−x)O3 (PZT) thick films are high pressure treated during the fabrication and the other where the treatment is omitted. We find that with the high pressure treatment prior to PZT sintering, the films...

  17. Cantilever-based optical interfacial force microscope in liquid using an optical-fiber tip

    Directory of Open Access Journals (Sweden)

    Byung I. Kim

    2013-03-01

    Full Text Available We developed a novel cantilever-based optical interfacial force microscope (COIFM to study molecular interaction in liquid environments. The force sensor was created by attaching a chemically etched optical-fiber tip to the force sensor with UV epoxy, and characterized by imaging on a calibration grid. The performance of the COIFM was then demonstrated by measuring the force between two oxidized silicon surfaces in 1 mM KCl as a function of distance. The result was consistent with previously reported electrical double layer forces, suggesting that a COIFM using an optical-fiber tip is capable of measuring force in a liquid environment.

  18. Extraction of depth-dependent perturbation factors for silicon diodes using a plastic scintillation detector.

    Science.gov (United States)

    Lacroix, Frederic; Guillot, Mathieu; McEwen, Malcolm; Gingras, Luc; Beaulieu, Luc

    2011-10-01

    This work presents the experimental extraction of the perturbation factor in megavoltage electron beams for three models of silicon diodes (IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded) using a plastic scintillation detector (PSD). The authors used a single scanning PSD mounted on a high-precision scanning tank to measure depth-dose curves in 6-, 12-, and 18-MeV clinical electron beams. They also measured depth-dose curves using the IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded diodes. The authors used the depth-dose curves measured with the PSD as a perturbation-free reference to extract the perturbation factors of the diodes. The authors found that the perturbation factors for the diodes increased substantially with depth, especially for low-energy electron beams. The experimental results show the same trend as published Monte Carlo simulation results for the EFD diode; however, the perturbations measured experimentally were greater. They found that using an effective point of measurement (EPOM) placed slightly away from the source reduced the variation of perturbation factors with depth and that the optimal EPOM appears to be energy dependent. The manufacturer recommended EPOM appears to be incorrect at low electron energy (6 MeV). In addition, the perturbation factors for diodes may be greater than predicted by Monte Carlo simulations.

  19. Extraction of depth-dependent perturbation factors for silicon diodes using a plastic scintillation detector

    International Nuclear Information System (INIS)

    Lacroix, Frederic; Guillot, Mathieu; McEwen, Malcolm; Gingras, Luc; Beaulieu, Luc

    2011-01-01

    Purpose: This work presents the experimental extraction of the perturbation factor in megavoltage electron beams for three models of silicon diodes (IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded) using a plastic scintillation detector (PSD). Methods: The authors used a single scanning PSD mounted on a high-precision scanning tank to measure depth-dose curves in 6-, 12-, and 18-MeV clinical electron beams. They also measured depth-dose curves using the IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded diodes. The authors used the depth-dose curves measured with the PSD as a perturbation-free reference to extract the perturbation factors of the diodes. Results: The authors found that the perturbation factors for the diodes increased substantially with depth, especially for low-energy electron beams. The experimental results show the same trend as published Monte Carlo simulation results for the EFD diode; however, the perturbations measured experimentally were greater. They found that using an effective point of measurement (EPOM) placed slightly away from the source reduced the variation of perturbation factors with depth and that the optimal EPOM appears to be energy dependent. Conclusions: The manufacturer recommended EPOM appears to be incorrect at low electron energy (6 MeV). In addition, the perturbation factors for diodes may be greater than predicted by Monte Carlo simulations.

  20. Search for the optimally suited cantilever type for high-frequency MFM

    International Nuclear Information System (INIS)

    Koblischka, M R; Wei, J D; Kirsch, M; Lessel, M; Pfeifer, R; Brust, M; Hartmann, U; Richter, C; Sulzbach, T

    2007-01-01

    To optimize the performance of the high-frequency MFM (HF-MFM) technique [1-4], we performed a search for the best suited cantilever type and magnetic material coating. Using a HF-MFM setup with hard disk writer poles as test samples, we carried out HF-MFM imaging at frequencies up to 2 GHz. For HF-MFM, it is an essential ingredient that the tip material can follow the fast switching of the high-frequency fields. In this contribution, we investigated 6 different types of cantilevers (i) the 'standard' MFM tip (Nanoworld Pointprobe) with 30 nm CoCr coating, (ii) a 'SSS' (Nanoworld SuperSharpSilicon TM ) cantilever with a 10 nm CoCr coating, (iii) a (Ni, Zn)-ferrite coated pointprobe tip (iv) a Ba 3 Co 2 Fe 23 O 41 (BCFO) coated pointprobe tip, (v) a low-coercivity NiCo alloy coated tip, and (vi) a permalloy-coated tip

  1. Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

    Science.gov (United States)

    Cho, Hyunok; Park, Jongcheol; Park, Jae Yeong

    2017-12-01

    This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it with ICs. The d33 piezoelectric mode was applied to achieve a large output voltage by using inter-digitated electrodes, and the PZT thin film on polyimide layer has a remnant polarization and coercive filed of approximately 2 P r = 47.9 μC/cm2 and 2 E c = 78.8 kV/cm, respectively. The relative dielectric constant was 900. The fabricated micro-electromechanical systems energy harvester generated output voltages of 1.2 V and output power of 117 nW at its optimal resistive load of 6.6 MΩ from its resonant frequency of 97.8 Hz with an acceleration of 5 m/s2.

  2. Label-free glucose detection using cantilever sensor technology based on gravimetric detection principles.

    Science.gov (United States)

    Hsieh, Shuchen; Hsieh, Shu-Ling; Hsieh, Chiung-Wen; Lin, Po-Chiao; Wu, Chun-Hsin

    2013-01-01

    Efficient maintenance of glucose homeostasis is a major challenge in diabetes therapy, where accurate and reliable glucose level detection is required. Though several methods are currently used, these suffer from impaired response and often unpredictable drift, making them unsuitable for long-term therapeutic practice. In this study, we demonstrate a method that uses a functionalized atomic force microscope (AFM) cantilever as the sensor for reliable glucose detection with sufficient sensitivity and selectivity for clinical use. We first modified the AFM tip with aminopropylsilatrane (APS) and then adsorbed glucose-specific lectin concanavalin A (Con A) onto the surface. The Con A/APS-modified probes were then used to detect glucose by monitoring shifts in the cantilever resonance frequency. To confirm the molecule-specific interaction, AFM topographical images were acquired of identically treated silicon substrates which indicated a specific attachment for glucose-Con A and not for galactose-Con A. These results demonstrate that by monitoring the frequency shift of the AFM cantilever, this sensing system can detect the interaction between Con A and glucose, one of the biomolecule recognition processes, and may assist in the detection and mass quantification of glucose for clinical applications with very high sensitivity.

  3. Understanding interferometry for micro-cantilever displacement detection

    Directory of Open Access Journals (Sweden)

    Alexander von Schmidsfeld

    2016-06-01

    Full Text Available Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM operated in ultra-high vacuum is demonstrated for the Michelson and Fabry–Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end delivering and collecting light and a highly reflective micro-cantilever, both together forming the interferometric cavity. For a precise measurement of the cantilever displacement, the relative positioning of fiber and cantilever is of critical importance. We describe a systematic approach for accurate alignment as well as the implications of deficient fiber–cantilever configurations. In the Fabry–Pérot regime, the displacement noise spectral density strongly decreases with decreasing distance between the fiber-end and the cantilever, yielding a noise floor of 24 fm/Hz0.5 under optimum conditions.

  4. Micro‑cantilevers for optical sensing of biogenic amines

    DEFF Research Database (Denmark)

    Wang, Ying; Bravo Costa, Carlos André; Sobolewska, Elżbieta Karolina

    2017-01-01

    molecules in the gas phase. Different functionalization conditions were investigated by immersing gold coated AFM cantilevers in cyclam solutions at different concentrations, for different functionalization times, and for different post-annealing treatments. The optimum morphology for high capture...... micro-cantilever based mass detection. We demonstrate that besides conventional AFM systems a MEMS cantilever in combination with an optical read out is a powerful analytic system which is highly attractive for widespread use in diagnostic applications, with optimized functionalization conditions...

  5. An electrochemical-cantilever platform for hybrid sensing applications

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Dohn, Søren; Boisen, Anja

    2011-01-01

    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined...... mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM....

  6. Cantilever arrayed blood pressure sensor for arterial applanation tonometry.

    Science.gov (United States)

    Lee, Byeungleul; Jeong, Jinwoo; Kim, Jinseok; Kim, Bonghwan; Chun, Kukjin

    2014-03-01

    The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-microm-thick-arrayed perforated membrane and 20-microm-thick metal pads. The length and the width of the unit membrane are 210 and 310 microm, respectively. The width of the insensible zone between the adjacent units is only 10 microm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg (= 120 kPa) and less than 1 mmHg (= 133.3 Pa), respectively.

  7. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad

    2016-06-16

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.

  8. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy.

    Science.gov (United States)

    Lai, Y W; Hamann, S; Ehmann, M; Ludwig, A

    2011-06-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent. © 2011 American Institute of Physics

  9. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy

    International Nuclear Information System (INIS)

    Lai, Y. W.; Ludwig, A.; Hamann, S.; Ehmann, M.

    2011-01-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent.

  10. Difficulties in fitting the thermal response of atomic force microscope cantilevers for stiffness calibration

    International Nuclear Information System (INIS)

    Cole, D G

    2008-01-01

    This paper discusses the difficulties of calibrating atomic force microscope (AFM) cantilevers, in particular the effect calibrating under light fluid-loading (in air) and under heavy fluid-loading (in water) has on the ability to use thermal motion response to fit model parameters that are used to determine cantilever stiffness. For the light fluid-loading case, the resonant frequency and quality factor can easily be used to determine stiffness. The extension of this approach to the heavy fluid-loading case is troublesome due to the low quality factor (high damping) caused by fluid-loading. Simple calibration formulae are difficult to realize, and the best approach is often to curve-fit the thermal response, using the parameters of natural frequency and mass ratio so that the curve-fit's response is within some acceptable tolerance of the actual thermal response. The parameters can then be used to calculate the cantilever stiffness. However, the process of curve-fitting can lead to erroneous results unless suitable care is taken. A feedback model of the fluid–structure interaction between the unloaded cantilever and the hydrodynamic drag provides a framework for fitting a modeled thermal response to a measured response and for evaluating the parametric uncertainty of the fit. The cases of uncertainty in the natural frequency, the mass ratio, and combined uncertainty are presented and the implications for system identification and stiffness calibration using curve-fitting techniques are discussed. Finally, considerations and recommendations for the calibration of AFM cantilevers are given in light of the results of this paper

  11. Nanoscale microwave microscopy using shielded cantilever probes

    KAUST Repository

    Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael A.; Shen, Zhi-Xun

    2011-01-01

    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.

  12. Cantilever torque magnetometry on coordination compounds

    DEFF Research Database (Denmark)

    Perfetti, Mauro

    2017-01-01

    compounds, such as quantum computation or information storage. This review enlightens that CTM offers a unique combination of accuracy and precision to disentangle noncollinear contributions inside Single Crystals as well as the sensitivity to detect molecular order of thin films. CTM can also detect......Cantilever Torque Magnetometry (CTM) is one of the leading techniques to deeply understand magnetic anisotropy of coordination compounds. The knowledge of magnetic anisotropy is a mandatory requirement before proceeding with any future application related to the magnetic properties of coordination...... quantum phenomena such as magnetization steps and molecular hysteresis curves. Moreover, it can also provide the energy levels splitting and avefunctions composition, especially if coupled with microwave radiation....

  13. Nanoscale microwave microscopy using shielded cantilever probes

    KAUST Repository

    Lai, Keji

    2011-04-21

    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.

  14. A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure.

    Science.gov (United States)

    Wang, Yu-Hsiang; Lee, Chia-Yen; Chiang, Che-Ming

    2007-10-17

    This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms -1 ), a high velocity measurement limit (45ms -1 ) and a rapid response time (0.53 s).

  15. A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

    Directory of Open Access Journals (Sweden)

    Che-Ming Chiang

    2007-10-01

    Full Text Available This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms-1, a high velocity measurement limit (45ms-1 and a rapid response time (0.53 s.

  16. Factors affecting alcohol-water pervaporation performance of hydrophobic zeolite-silicone rubber mixed matrix membranes

    Science.gov (United States)

    Mixed matrix membranes (MMMs) consisting of ZSM-5 zeolite particles dispersed in silicone rubber exhibited ethanol-water pervaporation permselectivities up to 5 times that of silicone rubber alone and 3 times higher than simple vapor-liquid equilibrium (VLE). A number of conditi...

  17. Three-way flexible cantilever probes for static contact

    International Nuclear Information System (INIS)

    Wang, Fei; Petersen, Dirch H; Hansen, Christian; Mortensen, Dennis; Friis, Lars; Hansen, Ole; Jensen, Helle V

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze the geometrical design space that must be fulfilled for the cantilevers to obtain static contact with the test sample. The design space relates the spring constant tensor of the cantilevers to the minimal value of the static tip-to-sample friction coefficient. Using an approximate model, we provide the analytical calculation of the compliance matrix of the L-shaped cantilever. Compared to results derived from finite element model simulations, the theoretical model provides a good qualitative analysis while deviations for the absolute values are seen. From a statistical analysis, the deviation is small for cantilevers with low effective spring constants, while the deviation is significant for large spring constants where the quasi one-dimensional approximation is no longer valid

  18. Development of an Electrochemical-Cantilever Hybrid Platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie

    . For at binde kobber (II) ioner blev rækker af cantilevere funktionaliseret med aminosyre L-cysteine(Cys) og tetrapeptid Cys-Gly-Gly-His (CGGH). Dette funktionelle lag blev fjernet fra en enkelt cantilever, ved selektivt at anvende et voltammetrisk signal til at generere en ren reference cantilever til brug...

  19. SU-8 Cantilever Sensor with Integrated Read-Out

    DEFF Research Database (Denmark)

    Johansson, Alicia Charlotte

    2007-01-01

    Cantilever baserede biosensorer kan bruges til så kaldet label-free detektion af små koncentrationer af molekyler i en opløsning. Når et specifikt molekyle binder til overfladen af en cantilever induceres et overfladestress som resulterer i en udbøjning af cantileveren. Cantileverens udbøjningen ...

  20. Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement

    International Nuclear Information System (INIS)

    Yu Haitao; Li Xinxin; Gan Xiaohua; Liu Yongjing; Liu Xiang; Xu Pengcheng; Li Jungang; Liu Min

    2009-01-01

    With an integrated resonance exciting heater and a self-sensing piezoresistor, resonant micro-cantilever bio/chemical sensors are optimally designed and fabricated by micromachining techniques. This study is emphasized on the optimization of the integrated heating resistor. Previous research has put the heater at either the cantilever clamp end, the midpoint or the free end. Aiming at sufficiently high and stable resonant amplitude, our research indicates that the optimized location of the thermal-electric exciting resistor is the clamp end instead of other positions. By both theoretical analysis and resonance experiments where three heating resistors are placed at the three locations of the fabricated cantilever, it is clarified that the clamp end heating provides the most efficient resonance excitation in terms of resonant amplitude, Q-factor and resonance stability. Besides, the optimized combination of dc bias and ac voltage is determined by both analysis and experimental verification. With the optimized heating excitation, the resonant cantilever is used for biotin–avidin-specific detection, resulting in a ±0.1 Hz ultra-low noise floor of the frequency signal and a 130 fg mass resolution. In addition to resonance excitation, the heater is used to heat up the cantilever for speed-up desorption after detection that helps rapid and repeated sensing to chemical vapor. The clamp end is determined (by simulation) as the optimal heating location for uniform temperature distribution on the cantilever. Using the resonant cantilever, a rapid and repeated sensing experiment on dimethyl methylphosphonate (DMMP) vapor shows that a short-period heating at the detection interval significantly quickens the signal recovery and enhances the sensing repeatability

  1. Orthodontic Traction of Impacted Canine Using Cantilever

    Directory of Open Access Journals (Sweden)

    Cláudia Nakandakari

    2016-01-01

    Full Text Available The impaction of the maxillary canines causes relevant aesthetic and functional problems. The multidisciplinary approach to the proper planning and execution of orthodontic traction of the element in question is essential. Many strategies are cited in the literature; among them is the good biomechanical control in order to avoid possible side effects. The aim of this paper is to present a case report in which a superior canine impacted by palatine was pulled out with the aid of the cantilever on the Segmented Arch Technique (SAT concept. A 14.7-year-old female patient appeared at clinic complaining about the absence of the upper right permanent canine. The proposed treatment prioritized the traction of the upper right canine without changing the occlusion and aesthetics. For this, it only installed the upper fixed appliance (Roth with slot 0.018, opting for SAT in order to minimize unwanted side effects. The use of cantilever to the traction of the upper right canine has enabled an efficient and predictable outcome, because it is of statically determined mechanics.

  2. Electrostatic force microscopy with a self-sensing piezoresistive cantilever

    International Nuclear Information System (INIS)

    Pi, U. H.; Kye, J. I.; Shin, S.; Khim, Z. G.; Hong, J. W.; Yoon, S.

    2003-01-01

    We present a new method for electrostatic force microscopy (EFM) using a piezoresistive cantilever instead of the conventional cantilever with an optical detector. In EFM with a piezoresistive cantilever, the electrostatic force between the tip and the sample is monitored by sensing the change in the resistance of the piezoresistive cantilever at a frequency of several tens of kHz. A large stray capacitance effect can be rejected by using an appropriate phase tuning of the phase-sensitive detection. We observed the ferroelectric domain images of a triglycine sulfate single crystal. We could also write fine patterns on a lead-zirconate-titanate (PZT) thin film through domain reversal by applying various dc voltages between the tip and the sample. We suggest that the EFM technique using a self-sensing and self-actuating piezoresistive cantilever can be applied to a high-density data storage field

  3. Magnetic force driven magnetoelectric effect in bi-cantilever composites

    Science.gov (United States)

    Zhang, Ru; Wu, Gaojian; Zhang, Ning

    2017-12-01

    The magnetic force driven magnetoelectric (ME) effect in bi-cantilever Mn-Zn-Ferrite /PZT composites is presented. Compared with single cantilever, the ME voltage coefficient in bi-cantilever composite is a little lower and the resonance frequency is higher, but the bi-cantilever structure is advantageous for integration. When the magnetic gap is 3 mm, the ME voltage coefficient can achieve 6.2 Vcm-1Oe-1 at resonance under optimum bias field Hm=1030 Oe; when the magnetic gap is 1.5 mm, the ME voltage coefficient can get the value as high as 4.4 Vcm-1Oe-1 under much lower bias field H=340 Oe. The stable ME effect in bi-cantilever composites has important potential application in the design of new type ME device.

  4. Cantilever arrays with self-aligned nanotips of uniform height

    International Nuclear Information System (INIS)

    Koelmans, W W; Peters, T; Berenschot, E; De Boer, M J; Siekman, M H; Abelmann, L

    2012-01-01

    Cantilever arrays are employed to increase the throughput of imaging and manipulation at the nanoscale. We present a fabrication process to construct cantilever arrays with nanotips that show a uniform tip–sample distance. Such uniformity is crucial, because in many applications the cantilevers do not feature individual tip–sample spacing control. Uniform cantilever arrays lead to very similar tip–sample interaction within an array, enable non-contact modes for arrays and give better control over the load force in contact modes. The developed process flow uses a single mask to define both tips and cantilevers. An additional mask is required for the back side etch. The tips are self-aligned in the convex corner at the free end of each cantilever. Although we use standard optical contact lithography, we show that the convex corner can be sharpened to a nanometre scale radius by an isotropic underetch step. The process is robust and wafer-scale. The resonance frequencies of the cantilevers within an array are shown to be highly uniform with a relative standard error of 0.26% or lower. The tip–sample distance within an array of up to ten cantilevers is measured to have a standard error around 10 nm. An imaging demonstration using the AFM shows that all cantilevers in the array have a sharp tip with a radius below 10 nm. The process flow for the cantilever arrays finds application in probe-based nanolithography, probe-based data storage, nanomanufacturing and parallel scanning probe microscopy. (paper)

  5. A bulk micromachined lead zinconate titanate cantilever energy harvester with inter-digital IrO(x) electrodes.

    Science.gov (United States)

    Park, Jongcheol; Park, Jae Yeong

    2013-10-01

    A piezoelectric vibration energy harvester with inter-digital IrO(x) electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800 x 1000 x 20 microm3, which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr52, Ti48)O3 thin film, and sputtered inter-digitally shaped IrO(x) electrodes, and silicon inertial mass with 1000 x 1000 x 500 microm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 microW of electrical power to 470 komega of load resistance and 1.4 V(peak-to-peak) from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW x cm(-3) x g(-2). As expected, its electrical failure was significantly improved.

  6. Prolonged controlled delivery of nerve growth factor using porous silicon nanostructures.

    Science.gov (United States)

    Zilony, Neta; Rosenberg, Michal; Holtzman, Liran; Schori, Hadas; Shefi, Orit; Segal, Ester

    2017-07-10

    Although nerve growth factor (NGF) is beneficial for the treatment of numerous neurological and non-neurological diseases, its therapeutic administration represents a significant challenge, due to the difficulty to locally deliver relevant doses in a safe and non-invasive manner. In this work, we employ degradable nanostructured porous silicon (PSi) films as carriers for NGF, allowing its continuous and prolonged release, while retaining its bioactivity. The PSi carriers exhibit high loading efficacy (up to 90%) of NGF and a continuous release, with no burst, over a period of>26days. The released NGF bioactivity is compared to that of free NGF in both PC12 cells and dissociated dorsal root ganglion (DRG) neurons. We show that the NGF has retained its bioactivity and induces neurite outgrowth and profound differentiation (of >50% for PC12 cells) throughout the period of release within a single administration. Thus, this proof-of-concept study demonstrates the immense therapeutic potential of these tunable carriers as long-term implants of NGF reservoirs and paves the way for new localized treatment strategies of neurodegenerative diseases. Copyright © 2016 Elsevier B.V. All rights reserved.

  7. Microthermogravimetry of a single microcapsule using silicon microresonators.

    Science.gov (United States)

    Lee, Dongkyu; Park, Yongbeom; Cho, Soo Hyoun; Yoo, Myungsun; Jung, Namchul; Yun, Minhyuk; Ko, Wooree; Jeon, Sangmin

    2010-07-01

    A chlorobenzene-containing polyurethane microcapsule was placed on the free end of a silicon cantilever, and the temperature dependence of the resonance frequency was measured. As the cantilever was heated, the resonance frequency showed steplike increases at 109 and 270 degrees C that were due to the rupture of the capsule and the thermal degradation of the polyurethane shell, respectively. The frequency changes due to the rupture of a single capsule measured by the cantilever were much sharper than the transitions measured by conventional thermogravimetric analysis (TGA), which measures the average mass change of a collection of capsules characterized by a large size distribution. When two capsules were placed on the cantilever, their individual rupture temperatures could be clearly identified. In addition, the permeability of the polyurethane shell, with respect to chlorobenzene, was measured, and the rupture temperature was observed to decrease with increasing permeability.

  8. Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants between 0.01 and 4 N/m

    International Nuclear Information System (INIS)

    Cumpson, Peter J.; Hedley, John; Clifford, Charles A.; Chen Xinyong; Allen, Stephanie

    2004-01-01

    Calibration of atomic force microscope (AFM) cantilevers is necessary for the measurement of nano-newton and pico-newton forces, which are critical to analytical application of AFM in the analysis of polymer surfaces, biological structures and organic molecules. Previously we have described microfabricated array of reference spring (MARS) devices for AFM cantilever spring-constant calibration. Hitherto, these have been limited to the calibration of AFM cantilevers above 0.03 N/m, although they can be used to calibrate cantilevers of lower stiffness with reduced accuracy. Below this limit MARS devices similar to the designs hitherto described would be fragile and difficult to manufacture with reasonable yield. In this work we describe a device we call torsional MARS. This is a large-area torsional mechanical resonator, manufactured by bulk micromachining of a 'silicon-on-insulator' wafer. By measuring its torsional oscillation accurately in vacuum we can deduce its torsional spring constant. The torsional reference spring spans the range of spring constant (from 4 down to 0.01 N/m) that is important in biological AFM, allowing even the most compliant AFM cantilever to be calibrated easily and rapidly

  9. The effects of incomplete annealing on the temperature dependence of sheet resistance and gage factor in aluminum and phosphorus implanted silicon on sapphire

    Science.gov (United States)

    Pisciotta, B. P.; Gross, C.

    1976-01-01

    Partial annealing of damage to the crystal lattice during ion implantation reduces the temperature coefficient of resistivity of ion-implanted silicon, while facilitating controlled doping. Reliance on this method for temperature compensation of the resistivity and strain-gage factor is discussed. Implantation conditions and annealing conditions are detailed. The gage factor and its temperature variation are not drastically affected by crystal damage for some crystal orientations. A model is proposed to account for the effects of electron damage on the temperature dependence of resistivity and on silicon piezoresistance. The results are applicable to the design of silicon-on-sapphire strain gages with high gage factors.

  10. On the effects of hydrogenation of thin film polycrystalline silicon: A key factor to improve heterojunction solar cells

    Czech Academy of Sciences Publication Activity Database

    Qiu, Y.; Kunz, O.; Fejfar, Antonín; Ledinský, Martin; Teik Chan, B.; Gordon, I.; Van Gestel, D.; Venkatachalm, S.; Egan, R.

    2014-01-01

    Roč. 122, MAR (2014), s. 31-39 ISSN 0927-0248 R&D Projects: GA MŠk 7E10061; GA MŠk(CZ) LM2011026 EU Projects: European Commission(XE) 240826 - PolySiMode Institutional support: RVO:68378271 Keywords : silicon * thin films * polycrystalline * hydrogenation * Raman spectroscopy Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 5.337, year: 2014 http://www.sciencedirect.com/science/article/pii/S0927024813006016

  11. In-situ piezoresponse force microscopy cantilever mode shape profiling

    International Nuclear Information System (INIS)

    Proksch, R.

    2015-01-01

    The frequency-dependent amplitude and phase in piezoresponse force microscopy (PFM) measurements are shown to be a consequence of the Euler-Bernoulli (EB) dynamics of atomic force microscope (AFM) cantilever beams used to make the measurements. Changes in the cantilever mode shape as a function of changes in the boundary conditions determine the sensitivity of cantilevers to forces between the tip and the sample. Conventional PFM and AFM measurements are made with the motion of the cantilever measured at one optical beam detector (OBD) spot location. A single OBD spot location provides a limited picture of the total cantilever motion, and in fact, experimentally observed cantilever amplitude and phase are shown to be strongly dependent on the OBD spot position for many measurements. In this work, the commonly observed frequency dependence of PFM response is explained through experimental measurements and analytic theoretical EB modeling of the PFM response as a function of both frequency and OBD spot location on a periodically poled lithium niobate sample. One notable conclusion is that a common choice of OBD spot location—at or near the tip of the cantilever—is particularly vulnerable to frequency dependent amplitude and phase variations stemming from dynamics of the cantilever sensor rather than from the piezoresponse of the sample

  12. Forced vibrations of a cantilever beam

    International Nuclear Information System (INIS)

    Repetto, C E; Roatta, A; Welti, R J

    2012-01-01

    The theoretical and experimental solutions for vibrations of a vertical-oriented, prismatic, thin cantilever beam are studied. The beam orientation is ‘downwards’, i.e. the clamped end is above the free end, and it is subjected to a transverse movement at a selected frequency. Both the behaviour of the device driver and the beam's weak-damping resonance response are compared for the case of an elastic beam made from PVC plastic excited over a frequency range from 1 to 30 Hz. The current analysis predicts the presence of ‘pseudo-nodes’ in the normal modes of oscillation. It is important to note that our results were obtained using very simple equipment, present in the teaching laboratory. (paper)

  13. Resonance frequencies of AFM cantilevers in contact with a surface

    Energy Technology Data Exchange (ETDEWEB)

    Verbiest, G.J., E-mail: Verbiest@physik.rwth-aachen.de [JARA-FIT and II. Institute of Physics, RWTH Aachen University, 52074 Aachen (Germany); Rost, M.J., E-mail: Rost@physics.leidenuniv.nl [Huygens-Kamerlingh Onnes Laboratory, Leiden University, P.O. Box 9504, 2300 RA Leiden (Netherlands)

    2016-12-15

    To make the forces in an Atomic Force Microscope that operates in a dynamic mode with one or multiple vibrations applied to the cantilever, quantitative, one needs to relate a change in resonance frequency of the cantilever to a specific tip–sample interaction. Due to the time dependence of the force between the tip and sample caused by the vibrations, this task is not only difficult, but in fact only possible to solve for certain limiting cases, if one follows common theoretical approaches with a Taylor expansion around the deflection point. Here, we present an analytical method for calculating the resonance frequencies of the cantilever that is valid for any tip–sample interaction. Instead of linearizing the tip–sample interaction locally, we calculate an averaged, weighted linearization taking into account all positions of the tip while vibrating. Our method bridges, therefore, the difficult gap between a free oscillating cantilever and a cantilever that is pushed infinitely hard into contact with a surface, which describes a clamped-pinned boundary condition. For a correct description of the cantilever dynamics, we take into account both the tip mass and the tip moment of inertia. Applying our model, we show that it is possible to calculate the modal response of a cantilever as a function of the tip–sample interaction strength. Based on these modal vibration characteristics, we show that the higher resonance frequencies of a cantilever are completely insensitive to the strength of the tip–sample interaction. - Highlights: • A method to calculate the resonances of AFM cantilevers under any force is proposed. • The analytical model is based on Euler-beam theory. • The shift in resonance frequency due to forces decrease with increasing mode number. • The proposed method enables quantitative ultrasound AFM experiments. • Our results explain also the applicability of the higher modes in SubSurface-AFM.

  14. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud

    2012-02-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates in the line it sets an alternating current in the actuator electrodes. This flowing current drives the piezoelectric cantilever to mechanical movement, especially when the frequency of the RF signal matches the mechanical resonant frequency of the cantilever. Output voltage signals versus frequency for both mechanical vibrational and RF signal excitations have been measured using different loads.© 2011 Elsevier Ltd. All rights reserved.

  15. Polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes

    DEFF Research Database (Denmark)

    Johansson, Alicia; Calleja, M.; Dimaki, Maria

    2004-01-01

    A polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes has been designed and realized. Multi-walled carbon nanotubes from aqueous solution have been assembled between two metal electrodes that are separated by 2 mu m and embedded in the polymer cantilever. The entire chip......, except for the metallic electrodes and wiring, was fabricated in the photoresist SU-8. SU-8 allows for an inexpensive, flexible and fast fabrication method, and the cantilever platform provides a hydrophobic surface that should be well suited for nanotube assembly. The device can be integrated in a micro...

  16. On the calibration of rectangular atomic force microscope cantilevers modified by particle attachment and lamination

    International Nuclear Information System (INIS)

    Bowen, James; Zhang, Zhibing; Adams, Michael J; Cheneler, David; Ward, Michael C L; Walliman, Dominic; Arkless, Stuart G

    2010-01-01

    A simple but effective method for estimating the spring constant of commercially available atomic force microscope (AFM) cantilevers is presented, based on estimating the cantilever thickness from knowledge of its length, width, resonant frequency and the presence or absence of an added mass, such as a colloid probe at the cantilever apex, or a thin film of deposited material. The spring constant of the cantilever can then be estimated using standard equations for cantilever beams. The results are compared to spring constant calibration measurements performed using reference cantilevers. Additionally, the effect of the deposition of Cr and Ti thin films onto rectangular Si cantilevers is investigated

  17. Numerical analysis of dynamic force spectroscopy using the torsional harmonic cantilever

    International Nuclear Information System (INIS)

    Solares, Santiago D; Hoelscher, Hendrik

    2010-01-01

    A spectral analysis method has been recently introduced by Stark et al (2002 Proc. Natl Acad. Sci. USA 99 8473-8) and implemented by Sahin et al (2007 Nat. Nanotechnol. 2 507-14) using a T-shaped cantilever design, the torsional harmonic cantilever (THC), which is capable of performing simultaneous tapping-mode atomic force microscopy imaging and force spectroscopy. Here we report on numerical simulations of the THC system using a simple dual-mass flexural-torsional model, which is applied in combination with Fourier data processing software to illustrate the spectroscopy process for quality factors corresponding to liquid, air and vacuum environments. We also illustrate the acquisition of enhanced topographical images and deformed surface contours under the application of uniform forces, and compare the results to those obtained with a previously reported linear dual-spring-mass model.

  18. Influence of cantilevered sheet pile deflection on adjacent roadways.

    Science.gov (United States)

    2009-06-01

    Cantilevered sheet pile walls are often used adjacent roadways as temporary support during construction. Excess movement of these walls has led to excessive roadway distress causing additional repairs to be necessary. This study assessed the effects ...

  19. Squeeze-film damping characteristics of cantilever microresonators ...

    African Journals Online (AJOL)

    user

    perturbation approach does not apply to cantilever plates because of ...... Direct coupling of electrostatic and structural domain has been achieved using ... forces are computed to obtain the modal squeeze stiffness and damping parameters.

  20. Piezoresistive cantilever force-clamp system

    Energy Technology Data Exchange (ETDEWEB)

    Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L. [Department of Mechanical Engineering, Stanford University, Stanford, California 94305 (United States); Goodman, Miriam B. [Department of Molecular and Cellular Physiology, Stanford University, Stanford, California 94305 (United States)

    2011-04-15

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.

  1. Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Fowler, Anthony G.; Maroufi, Mohammad; Moheimani, S. O. Reza, E-mail: Reza.Moheimani@newcastle.edu.au [School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308 (Australia)

    2015-04-15

    A new microelectromechanical systems-based 2-degree-of-freedom (DoF) scanner with an integrated cantilever for on-chip atomic force microscopy (AFM) is presented. The silicon cantilever features a layer of piezoelectric material to facilitate its use for tapping mode AFM and enable simultaneous deflection sensing. Electrostatic actuators and electrothermal sensors are used to accurately position the cantilever within the x-y plane. Experimental testing shows that the cantilever is able to be scanned over a 10 μm × 10 μm window and that the cantilever achieves a peak-to-peak deflection greater than 400 nm when excited at its resonance frequency of approximately 62 kHz.

  2. Silicon Microspheres Photonics

    International Nuclear Information System (INIS)

    Serpenguzel, A.

    2008-01-01

    Electrophotonic integrated circuits (EPICs), or alternatively, optoelectronic integrated circuit (OEICs) are the natural evolution of the microelectronic integrated circuit (IC) with the addition of photonic capabilities. Traditionally, the IC industry has been based on group IV silicon, whereas the photonics industry on group III-V semiconductors. However, silicon based photonic microdevices have been making strands in siliconizing photonics. Silicon microspheres with their high quality factor whispering gallery modes (WGMs), are ideal candidates for wavelength division multiplexing (WDM) applications in the standard near-infrared communication bands. In this work, we will discuss the possibility of using silicon microspheres for photonics applications in the near-infrared

  3. Efficiency Enhancement of a Cantilever-Based Vibration Energy Harvester

    Directory of Open Access Journals (Sweden)

    Ali E. Kubba

    2013-12-01

    Full Text Available Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA was used as an initial tool to compare the three geometries’ stiffness (K, output open-circuit voltage (Vave, and average normal strain in the piezoelectric transducer (εave that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3, has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle.

  4. All-thin-film PZT/FeGa Multiferroic Cantilevers and Their Applications in Switching Devices and Parametric Amplification

    Science.gov (United States)

    Wang, Yi; Onuta, Tiberiu-Dan; Long, Chris; Lofland, Samuel; Takeuchi, Ichiro

    2014-03-01

    We are investigating the characteristics of microfabricated PZT/FeGa multiferroic cantilevers. The cantilevers can be driven by AC or DC magnetic and electric field, and the device response can be read off as a piezo-induced voltage. We can use the multiple input parameters to operate the devices in a variety of manners for different applications. They include electromagnetic energy harvesting, pulse triggered nonlinear memory devices, and parametrically amplified ME sensors. Due to the competition of anisotropy and Zeeman energies, the mechanical resonant frequency of the cantilevers was found to follow a hysteresis behavior with DC bias magnetic field applied in the cantilever easy axis. We can also control and tune the occurrence of nonlinear bifurcation in the frequency spectrum. The resulting hysteresis in the frequency spectrum can be used to make switching devices, where the input can be DC electric and magnetic fields, as well as pulses of AC fields. We have also demonstrated parametric pumping of the response from an AC magnetic field using frequency-doubled AC electric field. The enhanced equivalent ME coefficient is as high as 10 million V/(cm*Oe), when the pumping voltage is very close to a threshold voltage. The quality factor also increases from 2000 to 80000 with pumping.

  5. Effect of loading rate on dynamic fracture of reaction bonded silicon nitride

    Science.gov (United States)

    Liaw, B. M.; Kobayashi, A. S.; Emery, A. F.

    1986-01-01

    Wedge-loaded, modified tapered double cantilever beam (WL-MTDCB) specimens under impact loading were used to determine the room temperature dynamic fracture response of reaction bonded silicon nitride (RBSN). The crack extension history, with the exception of the terminal phase, was similar to that obtained under static loading. Like its static counterpart, a distinct crack acceleration phase, which was not observed in dynamic fracture of steel and brittle polymers, was noted. Unlike its static counterpart, the crack continued to propagate at nearly its terminal velocity under a low dynamic stress intensity factor during the terminal phase of crack propagation. These and previously obtained results for glass and RBSN show that dynamic crack arrest under a positive dynamic stress intensity factor is unlikely in static and impact loaded structural ceramics.

  6. Conductive oxide cantilever for cryogenic nano-potentiometry

    International Nuclear Information System (INIS)

    Hiroya, Tsutomu; Inagaki, Katsuhiko; Tanda, Satoshi; Tsuneta, Taku; Yamaya, Kazuhiko

    2003-01-01

    Nanoscale electrical transport properties have attracted attentions because of new phenomena such as ballistic transport, quantized resistance, and Coulomb blockade. For measurement of nanoscale resistance, we have been developing a cryogenic atomic force microscope that can operate at 1.8 K. To use it as an electrode, we coated the cantilever with conductive oxides of TiO and indium tin oxide (ITO). We verified that TiO and ITO thin films remain conductive even at 4.2 K. Also we measured I-V characteristics of the tip-sample contact with a standard sample of NbSe 2 single crystal, and found that the conductive coats were not lost under large stresses due to the tip-sample contact. Moreover, we succeeded in obtaining a room temperature nano-potentiometry of a gold thin film with the ITO coated cantilever. In conclusion, the TiO and ITO coated cantilevers are applicable to cryogenic nano-potentiometry

  7. Improved Noninterferometric Test of Collapse Models Using Ultracold Cantilevers

    Science.gov (United States)

    Vinante, A.; Mezzena, R.; Falferi, P.; Carlesso, M.; Bassi, A.

    2017-09-01

    Spontaneous collapse models predict that a weak force noise acts on any mechanical system, as a consequence of the collapse of the wave function. Significant upper limits on the collapse rate have been recently inferred from precision mechanical experiments, such as ultracold cantilevers and the space mission LISA Pathfinder. Here, we report new results from an experiment based on a high-Q cantilever cooled to millikelvin temperatures, which is potentially able to improve the current bounds on the continuous spontaneous localization (CSL) model by 1 order of magnitude. High accuracy measurements of the cantilever thermal fluctuations reveal a nonthermal force noise of unknown origin. This excess noise is compatible with the CSL heating predicted by Adler. Several physical mechanisms able to explain the observed noise have been ruled out.

  8. A new approach for elasto-plastic finite strain analysis of cantilever ...

    Indian Academy of Sciences (India)

    A new approach for elasto-plastic finite strain analysis of cantilever beams subjected to uniform bending moment ... Curvature; deflection curve; cantilever beam; elasto-plastic analysis; tapered beam subjected to tipmoment; ... Sadhana | News.

  9. Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications

    NARCIS (Netherlands)

    Iannuzzi, D.; Deladi, S.; Schreuders, H.; Slaman, M.; Rector, J.H.; Elwenspoek, Michael Curt

    2006-01-01

    Fiber-top cantilevers are new monolithic devices obtained by carving a cantilever out of the edge of a single-mode optical fiber. Here we report evidences of their potential impact as sensing devices for multipurpose applications.

  10. Pembuatan Cantilever Bridge Anterior Rahang Atas sebagai Koreksi Estetik

    Directory of Open Access Journals (Sweden)

    Yusrina Sumartati

    2012-12-01

    Full Text Available Latar belakang. Kehilangan gigi anterior rahang atas mengakibatkan gangguan fungsi fonetik dan estetik. Gangguan fungsi estetik menyebabkan pasie menjadi rendah diri. Kondisi ini dapat diatasi oleh dokter gigi, salah satunya dengan pembuatan cantilever bridge. Tujuan. Penulisan ini yaitu untuk memberi informasi bahwa pada kasus kehilangan gigi-gigi anterior rahang atas dengan space yang telah menyempit dan malposisi gigi dapat dibuatkan protesa berupa gigi tiruan cekat dengan desain cantilever bridge. Kasus dan perawatan. Laporan kasus ini membahas tentang pasien perempuan umur 39 tahun yang datang ke Rumah Sakit Gigi dan Mulut Prof. Soedomo, dengan keluhan merasa kurang percaya diri karena gigi depan rahang atas hilang sejak 5 tahun yang lalu akibat kecelakaan. Gigi-gigi anterior rahang atas yang masih ada mengalami malposisi akibat pemakaian gigi tiruan sebagian lepasan yang tidak baik. Perawatan yang dilakukan adalah dengan pembuatan cantilever bridge pada gigi 11, 12, 13 dan 21, 22, 23. Kesimpulan. Gangguan fungsi estetik pada gigi anterior rahang atas dapat diatasi dengan pembuatan cantilever bridge.   Background. Maxillary anteriortooth loss resulting in impaired function of phonetic and aesthetic. Impaired function of aesthetic cause patients to become self conscious. This condition can be treated by a dentist, one with a cantilever bridge. Purpose. To inform that in case of missing anterior teeth of the upper jaw with a space that has been narrowed, and malposition of teeth can be made prosthesis denture fixed bridge with a cantilever design. Case and treatment. This case report discusses the 39 years old female patient who came to he Dental Hospital Prof. Soedomo, with complaints of feeling less confident due to the maxillary front teeth missing since 5 years ago due to an accident. Anterior teeth of the upper jaw are still experiencing malposition due to the use of removable partial dentures are not good. The treatment is done is by

  11. Integrated optical readout for miniaturization of cantilever-based sensor system

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts...

  12. Silicone metalization

    Energy Technology Data Exchange (ETDEWEB)

    Maghribi, Mariam N. (Livermore, CA); Krulevitch, Peter (Pleasanton, CA); Hamilton, Julie (Tracy, CA)

    2008-12-09

    A system for providing metal features on silicone comprising providing a silicone layer on a matrix and providing a metal layer on the silicone layer. An electronic apparatus can be produced by the system. The electronic apparatus comprises a silicone body and metal features on the silicone body that provide an electronic device.

  13. Factors affecting the energy resolution in alpha particle spectrometry with silicon diodes

    International Nuclear Information System (INIS)

    Camargo, Fabio de.

    2005-01-01

    In this work are presented the studies about the response of a multi-structure guard rings silicon diode for detection and spectrometry of alpha particles. This ion-implanted diode (Al/p + /n/n + /Al) was processed out of 300 μm thick, n type substrate with a resistivity of 3 kΩ·cm and an active area of 4 mm 2 . In order to use this diode as a detector, the bias voltage was applied on the n + side, the first guard ring was grounded and the electrical signals were readout from the p + side. These signals were directly sent to a tailor made preamplifier, based on the hybrid circuit A250 (Amptek), followed by a conventional nuclear electronic. The results obtained with this system for the direct detection of alpha particles from 241 Am showed an excellent response stability with a high detection efficiency (≅ 100 %). The performance of this diode for alpha particle spectrometry was studied and it was prioritized the influence of the polarization voltage, the electronic noise, the temperature and the source-diode distance on the energy resolution. The results showed that the major contribution for the deterioration of this parameter is due to the diode dead layer thickness (1 μm). However, even at room temperature, the energy resolution (FWHM = 18.8 keV) measured for the 5485.6 MeV alpha particles ( 241 Am) is comparable to those obtained with ordinary silicon barrier detectors frequently used for these particles spectrometry. (author)

  14. An Astigmatic Detection System for Polymeric Cantilever-based Sensors

    DEFF Research Database (Denmark)

    Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo

    2012-01-01

    fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially...

  15. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud; Alshareef, Husam N.

    2012-01-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates

  16. A new detection system for extremely small vertically mounted cantilevers

    International Nuclear Information System (INIS)

    Antognozzi, M; Ulcinas, A; Picco, L; Simpson, S H; Miles, M J; Heard, P J; Szczelkun, M D; Brenner, B

    2008-01-01

    Detection techniques currently used in scanning force microscopy impose limitations on the geometrical dimensions of the probes and, as a consequence, on their force sensitivity and temporal response. A new technique, based on scattered evanescent electromagnetic waves (SEW), is presented here that can detect the displacement of the extreme end of a vertically mounted cantilever. The resolution of this method is tested using different cantilever sizes and a theoretical model is developed to maximize the detection sensitivity. The applications presented here clearly show that the SEW detection system enables the use of force sensors with sub-micron size, opening new possibilities in the investigation of biomolecular systems and high speed imaging. Two types of cantilevers were successfully tested: a high force sensitivity lever with a spring constant of 0.17 pN nm -1 and a resonant frequency of 32 kHz; and a high speed lever with a spring constant of 50 pN nm -1 and a resonant frequency of 1.8 MHz. Both these force sensors were fabricated by modifying commercial microcantilevers in a focused ion beam system. It is important to emphasize that these modified cantilevers could not be detected by the conventional optical detection system used in commercial atomic force microscopes

  17. Global consequences of a local Casimir force : Adhered cantilever

    NARCIS (Netherlands)

    Svetovoy, V. B.; Melenev, A. E.; Lokhanin, M. V.; Palasantzas, G.

    2017-01-01

    Although stiction is a cumbersome problem for microsystems, it stimulates investigations of surface adhesion. In fact, the shape of an adhered cantilever carries information of the adhesion energy that locks one end to the substrate. We demonstrate here that the system is also sensitive to the

  18. Strategy Guideline: Quality Management in Existing Homes - Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Sikora, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wiehagen, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wood, A. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States)

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented.

  19. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  20. Aluminum nano-cantilevers for high sensitivity mass sensors

    DEFF Research Database (Denmark)

    Davis, Zachary James; Boisen, Anja

    2005-01-01

    We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Further...

  1. A Micro-Preconcentrator Combined Olfactory Sensing System with a Micromechanical Cantilever Sensor for Detecting 2,4-Dinitrotoluene Gas Vapor

    Directory of Open Access Journals (Sweden)

    Myung-Sic Chae

    2015-07-01

    Full Text Available Preventing unexpected explosive attacks and tracing explosion-related molecules require the development of highly sensitive gas-vapor detection systems. For that purpose, a micromechanical cantilever-based olfactory sensing system including a sample preconcentrator was developed to detect 2,4-dinitrotoluene (2,4-DNT, which is a well-known by-product of the explosive molecule trinitrotoluene (TNT and exists in concentrations on the order of parts per billion in the atmosphere at room temperature. A peptide receptor (His-Pro-Asn-Phe-Ser-Lys-Tyr-Ile-Leu-His-Gln-Arg that has high binding affinity for 2,4-DNT was immobilized on the surface of the cantilever sensors to detect 2,4-DNT vapor for highly selective detection. A micro-preconcentrator (µPC was developed using Tenax-TA adsorbent to produce higher concentrations of 2,4-DNT molecules. The preconcentration was achieved via adsorption and thermal desorption phenomena occurring between target molecules and the adsorbent. The µPC directly integrated with a cantilever sensor and enhanced the sensitivity of the cantilever sensor as a pretreatment tool for the target vapor. The response was rapidly saturated within 5 min and sustained for more than 10 min when the concentrated vapor was introduced. By calculating preconcentration factor values, we verified that the cantilever sensor provides up to an eightfold improvement in sensing performance.

  2. Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media

    International Nuclear Information System (INIS)

    Ruiz-Díez, V; Hernando-García, J; Toledo, J; Manzaneque, T; Sánchez-Rojas, J L; Kucera, M; Pfusterschmied, G; Schmid, U

    2016-01-01

    In this work, roof tile-shaped modes of MEMS (micro electro-mechanical systems) cantilever resonators with various geometries and mode orders are analysed. These modes can be efficiently excited by a thin piezoelectric film and a properly designed top electrode. The electrical and optical characterization of the resonators are performed in liquid media and the device performance is evaluated in terms of quality factor, resonant frequency and motional conductance. A quality factor as high as 165 was measured in isopropanol for a cantilever oscillating in the seventh order roof tile-shaped mode at 2 MHz. To support the results of the experimental characterization, a 2D finite element method simulation model is presented and studied. An analytical model for the estimation of the motional conductance was also developed and validated with the experimental measurements. (paper)

  3. Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

    International Nuclear Information System (INIS)

    Sathishkumar, P.; Punyabrahma, P.; Sri Muthu Mrinalini, R.; Jayanth, G. R.

    2015-01-01

    A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array

  4. Modified cantilevers to probe unambiguously out-of-plane piezoresponse

    Science.gov (United States)

    Alyabyeva, Natalia; Ouvrard, Aimeric; Lindfors-Vrejoiu, Ionela; Kolomiytsev, Alexey; Solodovnik, Maxim; Ageev, Oleg; McGrouther, Damien

    2018-06-01

    We demonstrate and investigate the coupling of contributions from both in-plane (IP) polarization and out-of-plane (OP) components in BiFeO3 (BFO) thin-film polarization probed by piezoresponse force microscopy (PFM). Such coupling leads to image artifacts which prevent the correct determination of OP polarization vector directions and the corresponding piezoelectric coefficient d33. Using material strength theory with a one-dimensional modeling of the cantilever oscillation amplitude under electrostatic and elastic forces as a function of the tip length, we have evidenced the impact of IP piezoresponse to the OP signal for tip length longer than 4 μm. The IP polarization vector induces a significant longitudinal bending of the cantilever, due to the small spring constant of long tips, which provokes a normal deviation superimposed to the OP piezoresponse. These artifacts can be reduced by increasing the longitudinal spring constant of the cantilever by shortening the tip length. Standard cantilevers with 15-μm-long tips were modified to reach the desired tip length, using focused ion-beam techniques and tested using PFM on the same BFO thin film. Tip length shortening has strongly reduced IP artifacts as expected, while the impact of nonlocal electrostatic forces, becoming predominant for tips shorter than 1 μm, has led to a non-negligible deflection offset. For shorter tips, a strong electric field from a cantilever beam can induce polarization switching as observed for a 0.5-μm-long tip. Tip length ranging from 1 to 4 μm allowed minimizing both artifacts to probe unambiguously OP piezoresponse and quantify the d33 piezoelectric coefficient.

  5. The absorption factor of crystalline silicon PV cells: a numerical and experimental study

    NARCIS (Netherlands)

    Santbergen, R.; Zolingen, van R.J.C.

    2008-01-01

    The absorption factor of a PV cell is defined as the fraction of incident solar irradiance that is absorbed by the cell. This absorption factor is one of the major parameters determining the cell temperature under operational conditions. Experimentally the absorption factor can be derived from

  6. Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles

    Science.gov (United States)

    Korayem, M. H.; Taheri, M.; Ghahnaviyeh, S. D.

    2015-08-01

    Due to the more delicate nature of biological micro/nanoparticles, it is necessary to compute the critical force of manipulation. The modeling and simulation of reactions and nanomanipulator dynamics in a precise manipulation process require an exact modeling of cantilevers stiffness, especially the stiffness of dagger cantilevers because the previous model is not useful for this investigation. The stiffness values for V-shaped cantilevers can be obtained through several methods. One of them is the PBA method. In another approach, the cantilever is divided into two sections: a triangular head section and two slanted rectangular beams. Then, deformations along different directions are computed and used to obtain the stiffness values in different directions. The stiffness formulations of dagger cantilever are needed for this sensitivity analyses so the formulations have been driven first and then sensitivity analyses has been started. In examining the stiffness of the dagger-shaped cantilever, the micro-beam has been divided into two triangular and rectangular sections and by computing the displacements along different directions and using the existing relations, the stiffness values for dagger cantilever have been obtained. In this paper, after investigating the stiffness of common types of cantilevers, Sobol sensitivity analyses of the effects of various geometric parameters on the stiffness of these types of cantilevers have been carried out. Also, the effects of different cantilevers on the dynamic behavior of nanoparticles have been studied and the dagger-shaped cantilever has been deemed more suitable for the manipulation of biological particles.

  7. Drift study of SU8 cantilevers in liquid and gaseous environments.

    Science.gov (United States)

    Tenje, Maria; Keller, Stephan; Dohn, Søren; Davis, Zachary J; Boisen, Anja

    2010-05-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

  8. Drift study of SU8 cantilevers in liquid and gaseous environments

    DEFF Research Database (Denmark)

    Tenje, Maria; Keller, Stephan Sylvest; Dohn, Søren

    2010-01-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1 mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe...... coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum....... this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we...

  9. A high-quality factor of 267 000 micromechanical silicon resonator utilizing TED-free torsional vibration mode

    Science.gov (United States)

    Nakamura, K.; Naito, Y.; Onishi, K.; Kawakatsu, H.

    2012-12-01

    In industrial applications of a micromechanical silicon resonator as a physical sensor, a high-quality factor Q and a low-temperature coefficient of Q (TCQ) are required for high sensitivity in a wide temperature range. Although the newly developed thin film encapsulation technique enables a beam to operate with low viscous damping in a vacuum cavity, the Q of a flexural vibration mode is limited by thermo-elastic damping (TED). We proposed a torsional beam resonator which features both a high Q and a low TCQ because theoretically the torsional vibration mode does not suffer from TED. From experiments, Q of 267 000 and TCQ of 1.4 for the 20 MHz torsional vibration mode were observed which were superior to those of the flexural mode. The pressure of the residual gas in the cavity of only 20 pl volume, which is one of the energy loss factors limiting the Q, was successfully estimated to be 1-14 Pa. Finally, the possibilities of improving the Q and the difference of the measured TCQ from a theoretical value were discussed.

  10. Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Guillon, Samuel; Saya, Daisuke; Mazenq, Laurent; Nicu, Liviu [CNRS, LAAS, 7 Avenue du Colonel Roche, F-31077 Toulouse Cedex 4 (France); Perisanu, Sorin; Vincent, Pascal [LPMCN, Universite Claude Bernard Lyon 1 et CNRS, 43 boulevard du 11 novembre 1918, 69622 Villeurbanne Cedex (France); Lazarus, Arnaud; Thomas, Olivier, E-mail: sguillon@laas.fr [Structural Mechanics and Coupled Systems Laboratory, Conservatoire National des Arts et Metiers, 2 rue Conte, 75003 Paris (France)

    2011-06-17

    In this paper, we investigate the effects of non-ideal clamping shapes on the dynamic behavior of silicon nanocantilevers. We fabricated silicon nanocantilevers using silicon on insulator (SOI) wafers by employing stepper ultraviolet (UV) lithography, which permits a resolution of under 100 nm. The nanocantilevers were driven by electrostatic force inside a scanning electron microscope (SEM). Both lateral and out-of-plane resonance frequencies were visually detected with the SEM. Next, we discuss overhanging of the cantilever support and curvature at the clamping point in the silicon nanocantilevers, which generally arises in the fabrication process. We found that the fundamental out-of-plane frequency of a realistically clamped cantilever is always lower than that for a perfectly clamped cantilever, and depends on the cantilever width and the geometry of the clamping point structure. Using simulation with the finite-elements method, we demonstrate that this discrepancy is attributed to the particular geometry of the clamping point (non-zero joining curvatures and a flexible overhanging) that is obtained in the fabrication process. The influence of the material orthotropy is also investigated and is shown to be negligible.

  11. Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Yeh, M.-K.; Tai, N.-Ha; Chen, B.-Y.

    2008-01-01

    Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 deg. and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1 μN landing force and decrease 18.60% for the V-shaped cantilever with 50 nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy

  12. Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes

    Science.gov (United States)

    Hsu, Wei-Chun; Tong, Jonathan Kien-Kwok; Liao, Bolin; Chen, Gang

    2015-04-21

    A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.

  13. Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.

    Science.gov (United States)

    Gall-Borrut, P; Belier, B; Falgayrettes, P; Castagne, M; Bergaud, C; Temple-Boyer, P

    2001-04-01

    We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.

  14. Simulation Study on Material Property of Cantilever Piezoelectric Vibration Generator

    Directory of Open Access Journals (Sweden)

    Yan Zhen

    2014-06-01

    Full Text Available For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, relation between output voltage, inherent frequency and material parameter of unimorph, bimorph in series type and bimorph in parallel type piezoelectric vibration generator is analyzed respectively by mechanical model and finite element modeling. The results indicate PZT-4, PZT- 5A and PZT-5H piezoelectric materials and stainless steel, nickel alloy substrate material should be firstly chosen.

  15. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    OpenAIRE

    Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco

    2013-01-01

    The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using mill...

  16. Unstable oscillation of tubular cantilevered beams conveying a compressible fluid

    International Nuclear Information System (INIS)

    Johnson, R.O.; Stoneking, J.E.; Carley, T.G.

    1986-01-01

    This paper is concerned with establishing the conditions of stability of a cantilevered tube conveying a compressible fluid. Solutions to Niordson's eigenvalue problem associated with the equations of motion are computed using Muller's method. The effects on critical velocity of compressibility which are accommodated by specifying the tube aspect ratio and fluid sonic velocity are parametrically studied. Aspect ratio is found to have a more pronounced effect on critical velocity than sonic velocity over the parameter range that was considered. (orig.)

  17. Optimization of Controllable Factors in the Aluminum Silicon Eutectic Paste and Rear Silicon Nitride Mono-Passivation Layer of PERC Solar Cells

    Science.gov (United States)

    Park, Sungeun; Park, Hyomin; Kim, Dongseop; Yang, JungYup; Lee, Dongho; Kim, Young-Su; Kim, Hyun-Jong; Suh, Dongchul; Min, Byoung Koun; Kim, Kyung Nam; Park, Se Jin; Kim, Donghwan; Lee, Hae-Seok; Nam, Junggyu; Kang, Yoonmook

    2018-05-01

    Passivated emitter and rear contact (PERC) is a promising technology owing to high efficiency can be achieved with p-type wafer and their easily applicable to existing lines. In case of using p-type mono wafer, 0.5-1% efficiency increase is expected with PERC technologies compared to existing Al BSF solar cells, while for multi-wafer solar cells it is 0.5-0.8%. We addressed the optimization of PERC solar cells using the Al paste. The paste was prepared from the aluminum-silicon alloy with eutectic composition to avoid the formation of voids that degrade the open-circuit voltage. The glass frit of the paste was changed to improve adhesion. Scanning electron microscopy revealed voids and local back surface field between the aluminum electrode and silicon base. We confirmed the conditions on the SiNx passivation layer for achieving higher efficiency and better adhesion for long-term stability. The cell characteristics were compared across cells containing different pastes. PERC solar cells with the Al/Si eutectic paste exhibited the efficiency of 19.6%.

  18. Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing

    Directory of Open Access Journals (Sweden)

    Bernhard Jakoby

    2008-10-01

    Full Text Available Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers. Miniaturized cantilever-based devices are interesting alternatives for such applications, but here the interaction between the liquid and the oscillating beam is more involved. In our contribution, we describe a measurement setup, which allows the investigation of this interaction for different beam cross-sections. We present an analytical model based on an approximation of the immersed cantilever as an oscillating sphere comprising the effective mass and the intrinsic damping of the cantilever and additional mass and damping due to the liquid loading. The model parameters are obtained from measurements with well-known sample liquids by a curve fitting procedure. Finally, we present the measurement of viscosity and density of an unknown sample liquid, demonstrating the feasibility of the model.

  19. Scanning probe microscopy with vertically oriented cantilevers made easy

    International Nuclear Information System (INIS)

    Valdrè, G; Moro, D; Ulian, G

    2012-01-01

    Non-contact imaging in scanning probe microscopy (SPM) is becoming of great importance in particular for imaging biological matter and in general soft materials. Transverse dynamic force microscopy (TDFM) is an SPM-based methodology that exploiting a cantilever oriented in a vertical configuration with respect to the sample surface may work with very low tip to sample interaction forces. The probe is oscillated parallel to the sample surface, usually by a piezoelectric element. However, this methodology often requires complex microscope setups and detection systems, so it is usually developed in specific laboratories as a prototype microscope. Here, we present a very simple device that easily enables a commercial SPM head to be oriented in such a way to have the cantilever long axis perpendicular to the sample surface. No modifications of the SPM hardware and software are required and commercial available cantilevers can be used as probes. Performance tests using polystyrene spheres, muscovite crystallographic steps and DNA single molecules were successful and all resulted in agreement with other TDFM and SPM observations demonstrating the reliability of the device. (paper)

  20. Dynamic modelling and experimental study of cantilever beam with clearance

    International Nuclear Information System (INIS)

    Li, B; Jin, W; Han, L; He, Z

    2012-01-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  1. Dynamic modelling and experimental study of cantilever beam with clearance

    Science.gov (United States)

    Li, B.; Jin, W.; Han, L.; He, Z.

    2012-05-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  2. Fabrication Effects on Polysilicon-based Micro cantilever Piezo resistivity for Biological Sensing Application

    International Nuclear Information System (INIS)

    Nina Korlina Madzhi; Balkish Natra; Mastura Sidek; Khuan, L.Y.; Anuar Ahmad

    2011-01-01

    In principle, adsorption of biological molecules on a functionalized surface of a micro fabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezo resistive micro cantilever sensors were designed to increase the sensitivity of the micro cantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezo resistors as a function of the cantilever vertical displacements. The resistivity of the piezo resistivity micro cantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezo resistor length. The results show that although the thickness of piezo resistor was the same at 0.5 μm the resistance value was varied. (author)

  3. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    Directory of Open Access Journals (Sweden)

    Aamand Jens

    2011-01-01

    Full Text Available Abstract The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide immobilized on a cantilever surface to anti-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system.

  4. Calibration of atomic force microscope cantilevers using standard and inverted static methods assisted by FIB-milled spatial markers

    International Nuclear Information System (INIS)

    Slattery, Ashley D; Blanch, Adam J; Quinton, Jamie S; Gibson, Christopher T

    2013-01-01

    Static methods to determine the spring constant of AFM cantilevers have been widely used in the scientific community since the importance of such calibration techniques was established nearly 20 years ago. The most commonly used static techniques involve loading a trial cantilever with a known force by pressing it against a pre-calibrated standard or reference cantilever. These reference cantilever methods have a number of sources of uncertainty, which include the uncertainty in the measured spring constant of the standard cantilever, the exact position of the loading point on the reference cantilever and how closely the spring constant of the trial and reference cantilever match. We present a technique that enables users to minimize these uncertainties by creating spatial markers on reference cantilevers using a focused ion beam (FIB). We demonstrate that by combining FIB spatial markers with an inverted reference cantilever method, AFM cantilevers can be accurately calibrated without the tip of the test cantilever contacting a surface. This work also demonstrates that for V-shaped cantilevers it is possible to determine the precise loading position by AFM imaging the section of the cantilever where the two arms join. Removing tip-to-surface contact in both the reference cantilever method and sensitivity calibration is a significant improvement, since this is an important consideration for AFM users that require the imaging tip to remain in pristine condition before commencing measurements. Uncertainties of between 5 and 10% are routinely achievable with these methods. (paper)

  5. On the electromechanical modelling of a resonating nano-cantilever-based transducer

    DEFF Research Database (Denmark)

    Teva, J.; Abadal, G.; Davis, Zachary James

    2004-01-01

    deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real deflection shape of the cantilever and the contribution to the cantilever-driver capacitance of the fringing field....... Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope. (C) 2004 Elsevier B.V. All rights reserved....

  6. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    Energy Technology Data Exchange (ETDEWEB)

    Hoogenboom, B W [London Centre for Nanotechnology and Department of Physics and Astronomy, University College London, 17-19 Gordon Street, London WC1H 0AH (United Kingdom); Frederix, P L T M; Engel, A [M E Mueller Institute, Biozentrum, University of Basel, Klingelbergstrasse 70, 4056 Basel (Switzerland); Fotiadis, D [Institute of Biochemistry and Molecular Medicine, University of Berne, Buehlstrasse 28, 3012 Berne (Switzerland); Hug, H J [Swiss Federal Laboratories for Materials Testing and Research, EMPA, Ueberlandstrasse 129, 8600 Duebendorf (Switzerland)], E-mail: b.hoogenboom@ucl.ac.uk

    2008-09-24

    We have developed an optical cantilever deflection detector with a spot size <3 {mu}m and fm Hz{sup -1/2} sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes.

  7. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    International Nuclear Information System (INIS)

    Hoogenboom, B W; Frederix, P L T M; Engel, A; Fotiadis, D; Hug, H J

    2008-01-01

    We have developed an optical cantilever deflection detector with a spot size -1/2 sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes

  8. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    International Nuclear Information System (INIS)

    Xu, J.; Tang, J.

    2015-01-01

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined

  9. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Loganathan, Muthukumaran; Bristow, Douglas A., E-mail: dbristow@mst.edu [Department of Mechanical and Aerospace Engineering, Missouri University of Science and Technology, Rolla, Missouri 65401 (United States)

    2014-04-15

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  10. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy.

    Science.gov (United States)

    Loganathan, Muthukumaran; Bristow, Douglas A

    2014-04-01

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  11. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    Energy Technology Data Exchange (ETDEWEB)

    Xu, J.; Tang, J., E-mail: jtang@engr.uconn.edu [Department of Mechanical Engineering, The University of Connecticut, Storrs, Connecticut 06269 (United States)

    2015-11-23

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined.

  12. Cantilever-based micro-particle filter with simultaneous single particle detection

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2011-01-01

    Currently, separation of whole blood samples on lab-on-a-chip systems is achieved via filters followed by analysis of the filtered matter such as counting of blood cells. Here, a micro-chip based on cantilever technology is developed, which enables simultaneous filtration and counting of micro-particles...... from a liquid. A hole-array is integrated into a micro-cantilever, which is inserted into a microfluidic channel perpendicular to the flow. A metal pad at the apex of the cantilever enables an optical read-out of the deflection of the cantilever. When a micro-particle is too large to pass a hole...

  13. Silicon detectors

    International Nuclear Information System (INIS)

    Klanner, R.

    1984-08-01

    The status and recent progress of silicon detectors for high energy physics is reviewed. Emphasis is put on detectors with high spatial resolution and the use of silicon detectors in calorimeters. (orig.)

  14. Silicon Micromachined Sensor for Broadband Vibration Analysis

    Science.gov (United States)

    Gutierrez, Adolfo; Edmans, Daniel; Cormeau, Chris; Seidler, Gernot; Deangelis, Dave; Maby, Edward

    1995-01-01

    The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

  15. Fabrication and Characterization of Nanopillars for Silicon-Based Thermoelectrics

    Science.gov (United States)

    Stranz, A.; Sökmen, Ü.; Wehmann, H.-H.; Waag, A.; Peiner, E.

    2010-09-01

    Si-based nanopillars of various sizes were fabricated by lateral structuring using anisotropic etching and thermal oxidation. We obtained pillars of diameter <500 nm, about 25 μm in height, with an aspect ratio of more than 50. The distance between pillars was varied from 500 nm to 10 μm. Besides the fabrication and structural characterization of silicon nanopillars, implementation of adequate metrology for measuring single pillars is described. Commercial tungsten probes, self-made gold probes, and piezoresistive silicon cantilever probes were used for measurements of nanopillars in a scanning electron microscope (SEM) equipped with nanomanipulators.

  16. Nonlinear Dynamics of Cantilever-Sample Interactions in Atomic Force Microscopy

    Science.gov (United States)

    Cantrell, John H.; Cantrell, Sean A.

    2010-01-01

    The interaction of the cantilever tip of an atomic force microscope (AFM) with the sample surface is obtained by treating the cantilever and sample as independent systems coupled by a nonlinear force acting between the cantilever tip and a volume element of the sample surface. The volume element is subjected to a restoring force from the remainder of the sample that provides dynamical equilibrium for the combined systems. The model accounts for the positions on the cantilever of the cantilever tip, laser probe, and excitation force (if any) via a basis set of set of orthogonal functions that may be generalized to account for arbitrary cantilever shapes. The basis set is extended to include nonlinear cantilever modes. The model leads to a pair of coupled nonlinear differential equations that are solved analytically using a matrix iteration procedure. The effects of oscillatory excitation forces applied either to the cantilever or to the sample surface (or to both) are obtained from the solution set and applied to the to the assessment of phase and amplitude signals generated by various acoustic-atomic force microscope (A-AFM) modalities. The influence of bistable cantilever modes of on AFM signal generation is discussed. The effects on the cantilever-sample surface dynamics of subsurface features embedded in the sample that are perturbed by surface-generated oscillatory excitation forces and carried to the cantilever via wave propagation are accounted by the Bolef-Miller propagating wave model. Expressions pertaining to signal generation and image contrast in A-AFM are obtained and applied to amplitude modulation (intermittent contact) atomic force microscopy and resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM). The influence of phase accumulation in A-AFM on image contrast is discussed, as is the effect of hard contact and maximum nonlinearity regimes of A-AFM operation.

  17. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    Directory of Open Access Journals (Sweden)

    Valeria Toffoli

    2013-12-01

    Full Text Available The design and characteristics of a micro-system for thermogravimetric analysis (TGA in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

  18. Piezoelectric Bimorph Cantilever for Vibration-Producing-Hydrogen

    Directory of Open Access Journals (Sweden)

    Guangming Cheng

    2012-12-01

    Full Text Available A device composed of a piezoelectric bimorph cantilever and a water electrolysis device was fabricated to realize piezoelectrochemical hydrogen production. The obvious output of the hydrogen and oxygen through application of a mechanical vibration of ~0.07 N and ~46.2 Hz was observed. This method provides a cost-effective, recyclable, environment-friendly and simple way to directly split water for hydrogen fuels by scavenging mechanical waste energy forms such as noise or traffic vibration in the environment.

  19. Micro-cantilever flow sensor for small aircraft

    KAUST Repository

    Ghommem, Mehdi; Calo, Victor M.; Claudel, Christian G.

    2013-01-01

    We extend the use of cantilever beams as flow sensors for small aircraft. As such, we propose a novel method to measure the airspeed and the angle of attack at which the air travels across a small flying vehicle. We measure beam deflections and extract information about the surrounding flow. Thus, we couple a nonlinear beam model with a potential flow simulator through a fluid-structure interaction scheme. We use this numerical approach to generate calibration curves that exhibit the trend for the variations of the limit cycle oscillations amplitudes of flexural and torsional vibrations with the air speed and the angle of attack, respectively. © The Author(s) 2013.

  20. APPARATUS FOR NON-DESTRUCTIVE INSPECTION OF CANTILEVERED MEMBERS

    Science.gov (United States)

    Taylor, E.R.; Mahoney, C.H.; Lay, C.R.

    1961-10-24

    An apparatus for non-destructive inspection of cantilevered members, such as compressor blades, is described. The member under inspection is vibrated with a regulated source of air under pressure. The amplitude of vibration of the member is maintained at its natural frequency. The frequency of vibration of the member is measured. An indication of an excessive decay or erratic shifting in the measured frequency above an allowable hysteretic decay is provided as an indication of a fault in the member. The member is vibrated for a selected test period. (AEC)

  1. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    Science.gov (United States)

    Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco

    2013-01-01

    The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

  2. Desain Cantilever Beam Piezoelectric Untuk Aplikasi Energi Harvesting

    Directory of Open Access Journals (Sweden)

    Roer Pawinanto

    2016-12-01

    Full Text Available Material piezoelektrik sudah mulai diaplkasikan dalam beberapa aplikasi seperti sebagai transduser untuk energi harvesting. Dalam studi ini kami menggunakan metode FEA untuk mengoptimasi beam piezoelektrik. Defleksi yang diperoleh pada studi ini yaitu sebesar 83 nm manakala frekuensi resonansi nya diperoleh di 13.4 Hz. Material piezoelektrik ini dapat menghasilkan defleksi yang besar ketika bergetar pada frekuensi resonansinya. Hasil optimisasi juga menunjukkan bahwa daya listrik yang dihasilkan mengindikasikan resistansi yang besar juga dan berkaitan dengan panjang material PZT serta dapat mempengaruhi defleksi dari cantilever beam.

  3. Analytical simulation of the cantilever-type energy harvester

    Directory of Open Access Journals (Sweden)

    Jie Mei

    2016-01-01

    Full Text Available This article describes an analytical model of the cantilever-type energy harvester based on Euler–Bernoulli’s beam theory. Starting from the Hamiltonian form of total energy equation, the bending mode shapes and electromechanical dynamic equations are derived. By solving the constitutive electromechanical dynamic equation, the frequency transfer function of output voltage and power can be obtained. Through a case study of a unimorph piezoelectric energy harvester, this analytical modeling method has been validated by the finite element method.

  4. Micro-cantilever flow sensor for small aircraft

    KAUST Repository

    Ghommem, Mehdi

    2013-10-01

    We extend the use of cantilever beams as flow sensors for small aircraft. As such, we propose a novel method to measure the airspeed and the angle of attack at which the air travels across a small flying vehicle. We measure beam deflections and extract information about the surrounding flow. Thus, we couple a nonlinear beam model with a potential flow simulator through a fluid-structure interaction scheme. We use this numerical approach to generate calibration curves that exhibit the trend for the variations of the limit cycle oscillations amplitudes of flexural and torsional vibrations with the air speed and the angle of attack, respectively. © The Author(s) 2013.

  5. Dual frequency modulation with two cantilevers in series: a possible means to rapidly acquire tip–sample interaction force curves with dynamic AFM

    International Nuclear Information System (INIS)

    Solares, Santiago D; Chawla, Gaurav

    2008-01-01

    One common application of atomic force microscopy (AFM) is the acquisition of tip–sample interaction force curves. However, this can be a slow process when the user is interested in studying non-uniform samples, because existing contact- and dynamic-mode methods require that the measurement be performed at one fixed surface point at a time. This paper proposes an AFM method based on dual frequency modulation using two cantilevers in series, which could be used to measure the tip–sample interaction force curves and topography of the entire sample with a single surface scan, in a time that is comparable to the time needed to collect a topographic image with current AFM imaging modes. Numerical simulation results are provided along with recommended parameters to characterize tip–sample interactions resembling those of conventional silicon tips and carbon nanotube tips tapping on silicon surfaces

  6. Real-time moving horizon estimation for a vibrating active cantilever

    Science.gov (United States)

    Abdollahpouri, Mohammad; Takács, Gergely; Rohaľ-Ilkiv, Boris

    2017-03-01

    Vibrating structures may be subject to changes throughout their operating lifetime due to a range of environmental and technical factors. These variations can be considered as parameter changes in the dynamic model of the structure, while their online estimates can be utilized in adaptive control strategies, or in structural health monitoring. This paper implements the moving horizon estimation (MHE) algorithm on a low-cost embedded computing device that is jointly observing the dynamic states and parameter variations of an active cantilever beam in real time. The practical behavior of this algorithm has been investigated in various experimental scenarios. It has been found, that for the given field of application, moving horizon estimation converges faster than the extended Kalman filter; moreover, it handles atypical measurement noise, sensor errors or other extreme changes, reliably. Despite its improved performance, the experiments demonstrate that the disadvantage of solving the nonlinear optimization problem in MHE is that it naturally leads to an increase in computational effort.

  7. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2008-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  8. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2011-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  9. A new approach to integrate PLZT thin films with micro-cantilevers

    Indian Academy of Sciences (India)

    Home; Journals; Sadhana; Volume 34; Issue 4. A new approach to integrate PLZT thin films with micro-cantilevers ... Different types of cantilever beams incorporating PLZT films have been successfully fabricated using 'lift-off' process and bulk micromachining technology. The proposed process can be advantageously ...

  10. Determination of young's modulus of PZT-influence of cantilever orientation

    NARCIS (Netherlands)

    Nazeer, H.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

    Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This

  11. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    DEFF Research Database (Denmark)

    Bache, Michael; Taboryski, Rafael Jozef; Schmid, Silvan

    2011-01-01

    -BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending...

  12. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    DEFF Research Database (Denmark)

    Nordström, M.; Calleja, M.; Hübner, Jörg

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever...

  13. Monolithic Concrete vs Precast Concrete for the Construction of Bridge by Th Cantilever Method

    Directory of Open Access Journals (Sweden)

    Morlova Dumitru Daniel

    2015-07-01

    Full Text Available In the article "Monolithic Concrete vs Precast Concrete for the Construction of Bridges by the Cantilever Method", there are approached a number of issues that come out in the design and execution of prestressed concrete bridge structures using the cantilever method.

  14. Instability of a cantilevered flexible plate in viscous channel flow

    Science.gov (United States)

    Balint, T. S.; Lucey, A. D.

    2005-10-01

    The stability of a flexible cantilevered plate in viscous channel flow is studied as a representation of the dynamics of the human upper airway. The focus is on instability mechanisms of the soft palate (flexible plate) that cause airway blockage during sleep. We solve the Navier Stokes equations for flow with Reynolds numbers up to 1500 fully coupled with the dynamics of the plate motion solved using finite-differences. The study is 2-D and based upon linearized plate mechanics. When both upper and lower airways are open, the plate is found to lose its stability through a flutter mechanism and a critical Reynolds number exists. When one airway is closed, the plate principally loses its stability through a divergence mechanism and a critical flow speed exists. However, below the divergence-onset flow speed, flutter can exist for low levels of structural damping in the flexible plate. Our results serve to extend understanding of flow-induced instability of cantilevered flexible plates and will ultimately improve the diagnosis and treatment of upper-airway disorders.

  15. Fluid-structure interactions of photo-responsive polymer cantilevers

    Science.gov (United States)

    Bin, Jonghoon; Oates, William S.; Yousuff Hussaini, M.

    2013-02-01

    A new class of photomechanical liquid crystal networks (LCNs) has emerged, which generate large bending deformation and fast response times that scale with the resonance of the polymer films. Here, a numerical study is presented that describes the photomechanical structural dynamic behavior of an LCN in a fluid medium; however, the methodology is also applicable to fluid-structure interactions of a broader range of adaptive structures. Here, we simulate the oscillation of photomechanical cantilevers excited by light while simultaneously modeling the effect of the surrounding fluid at different ambient pressures. The photoactuated LCN is modeled as an elastic thin cantilever plate, and gradients in photostrain from the external light are computed from the assumptions of light absorption and photoisomerization through the film thickness. Numerical approximations of the equations governing the plate are based on cubic B-spline shape functions and a second order implicit Newmark central scheme for time integration. For the fluid, three dimensional unsteady incompressible Navier-Stokes equations are solved using the arbitrary Lagrangian-Eulerian (ALE) method, which employs a structured body-fitted curvilinear coordinate system where the solid-fluid interface is a mesh line of the system, and the complicated interface boundary conditions are accommodated in a conventional finite-volume formulation. Numerical examples are given which provide new insight into material behavior in a fluid medium as a function of ambient pressure.

  16. Higher Order Modes Excitation of Micro Cantilever Beams

    KAUST Repository

    Jaber, Nizar

    2014-05-01

    In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.

  17. A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process

    International Nuclear Information System (INIS)

    Ji Xu; Li Zhihong; Li Juan; Wang Yangyuan; Xi Jianzhong

    2008-01-01

    This paper presents a post-CMOS process to monolithically integrate a piezoresistive cantilever for lateral force detection and signal processing circuitry. The fabrication process includes a standard CMOS process and one more lithography step to micromachine the cantilever structure in the post-CMOS process. The piezoresistors are doped in the CMOS process but defined in the post-CMOS micromachining process without any extra process required. A partially split cantilever configuration is developed for the lateral force detection. The piezoresistors are self-aligned to the split cantilever, and therefore the width of the beam is only limited by lithography. Consequently, this kind of cantilever potentially has a high resolution. The preliminary experimental results show expected performances of the fabricated piezoresistors and electronic circuits

  18. Nonlinear dynamic response of cantilever beam tip during atomic force microscopy (AFM) nanolithography of copper surface

    International Nuclear Information System (INIS)

    Yeh, Y-L; Jang, M-J; Wang, C-C; Lin, Y-P; Chen, K-S

    2008-01-01

    This paper investigates the nonlinear dynamic response of an atomic force microscope (AFM) cantilever beam tip during the nanolithography of a copper (Cu) surface using a high-depth feed. The dynamic motion of the tip is modeled using a combined approach based on Newton's law and empirical observations. The cutting force is determined from experimental observations of the piling height on the Cu surface and the rotation angle of the cantilever beam tip. It is found that the piling height increases linearly with the cantilever beam carrier velocity. Furthermore, the cantilever beam tip is found to execute a saw tooth motion. Both this motion and the shear cutting force are nonlinear. The elastic modulus in the y direction is variable. Finally, the velocity of the cantilever beam tip as it traverses the specimen surface has a discrete characteristic rather than a smooth, continuous profile

  19. The importance of cantilever dynamics in the interpretation of Kelvin probe force microscopy.

    Science.gov (United States)

    Satzinger, Kevin J; Brown, Keith A; Westervelt, Robert M

    2012-09-15

    A realistic interpretation of the measured contact potential difference (CPD) in Kelvin probe force microscopy (KPFM) is crucial in order to extract meaningful information about the sample. Central to this interpretation is a method to include contributions from the macroscopic cantilever arm, as well as the cone and sharp tip of a KPFM probe. Here, three models of the electrostatic interaction between a KPFM probe and a sample are tested through an electrostatic simulation and compared with experiment. In contrast with previous studies that treat the KPFM cantilever as a rigid object, we allow the cantilever to bend and rotate; accounting for cantilever bending provides the closest agreement between theory and experiment. We demonstrate that cantilever dynamics play a major role in CPD measurements and provide a simulation technique to explore this phenomenon.

  20. Accurate Calibration and Uncertainty Estimation of the Normal Spring Constant of Various AFM Cantilevers

    Directory of Open Access Journals (Sweden)

    Yunpeng Song

    2015-03-01

    Full Text Available Measurement of force on a micro- or nano-Newton scale is important when exploring the mechanical properties of materials in the biophysics and nanomechanical fields. The atomic force microscope (AFM is widely used in microforce measurement. The cantilever probe works as an AFM force sensor, and the spring constant of the cantilever is of great significance to the accuracy of the measurement results. This paper presents a normal spring constant calibration method with the combined use of an electromagnetic balance and a homemade AFM head. When the cantilever presses the balance, its deflection is detected through an optical lever integrated in the AFM head. Meanwhile, the corresponding bending force is recorded by the balance. Then the spring constant can be simply calculated using Hooke’s law. During the calibration, a feedback loop is applied to control the deflection of the cantilever. Errors that may affect the stability of the cantilever could be compensated rapidly. Five types of commercial cantilevers with different shapes, stiffness, and operating modes were chosen to evaluate the performance of our system. Based on the uncertainty analysis, the expanded relative standard uncertainties of the normal spring constant of most measured cantilevers are believed to be better than 2%.

  1. Anterior Cantilever Resin-Bonded Fixed Dental Prostheses: A Review of the Literature.

    Science.gov (United States)

    Mourshed, Bilal; Samran, Abdulaziz; Alfagih, Amal; Samran, Ahalm; Abdulrab, Saleem; Kern, Matthias

    2018-03-01

    This review evaluated the survival rate of single retainer anterior resin-bonded fixed dental prostheses (RBFDPs) to determine whether the choice of material affects their clinical outcome. An electronic search of the English peer-reviewed dental literature in PubMed was conducted to identify all publications reporting on cantilever RBFDPs until May 2016. Study information extraction and methodological quality assessments were accomplished by two reviewers independently. The searched keywords were as follows: "resin-bonded, single retainer, all-ceramic resin-bonded fixed dental prostheses (RBFDPs), all-ceramic RBFDPs, cantilever resin, RBFDPs, cantilever resin-bonded bridge, two units cantilevered, two-unit cantilevered, metal-ceramic cantilever, and metal-ceramic." Furthermore, the ''Related Articles'' feature of PubMed was used to identify further references of interest within the primary search. The bibliographies of the obtained references were used to identify pertinent secondary references. Review articles were also used to identify relevant articles. After the application of exclusion criteria, the definitive list of articles was screened to extract the qualitative data, and the results were analyzed. Overall 2588 articles were dedicated at the first review phase; however, only 311 studies were left after the elimination of duplicates and unrelated studies. Seventeen studies passed the second review phase. Five studies were excluded because they were follow-up studies of the same study cohort. Twelve studies were finally selected. The use of cantilever RBFDPs showed promising results and high survival rates. © 2016 by the American College of Prosthodontists.

  2. Investigation of Subcombination Internal Resonances in Cantilever Beams

    Directory of Open Access Journals (Sweden)

    Haider N. Arafat

    1998-01-01

    Full Text Available Activation of subcombination internal resonances in transversely excited cantilever beams is investigated. The effect of geometric and inertia nonlinearities, which are cubic in the governing equation of motion, is considered. The method of time-averaged Lagrangian and virtual work is used to determine six nonlinear ordinary-differential equations governing the amplitudes and phases of the three interacting modes. Frequency- and force-response curves are generated for the case ω ≈ ω4 ≈ 1/2(ω2 + ω5. There are two possible responses: single-mode and three-mode responses. The single-mode periodic response is found to undergo supercritical and subcritical pitchfork bifurcations, which result in three-mode interactions. In the case of three-mode responses, there are conditions where the low-frequency mode dominates the response, resulting in high-amplitude quasiperiodic oscillations.

  3. Strategy Guideline: Quality Management in Existing Homes; Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J.; Sikora, J.; Wiehagen, J.; Wood, A.

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented. The goal of existing home high performing remodeling quality management systems (HPR-QMS) is to establish practices and processes that can be used throughout any remodeling project. The research presented in this document provides a comparison of a selected retrofit activity as typically done versus that same retrofit activity approached from an integrated high performance remodeling and quality management perspective. It highlights some key quality management tools and approaches that can be adopted incrementally by a high performance remodeler for this or any high performance retrofit. This example is intended as a template and establishes a methodology that can be used to develop a portfolio of high performance remodeling strategies.

  4. Determination of elastic-plastic properties of Alporas foam at the cell-wall level using microscale-cantilever bending tests

    Czech Academy of Sciences Publication Activity Database

    Doktor, Tomáš; Kytýř, Daniel; Koudelka_ml., Petr; Zlámal, Petr; Fíla, Tomáš; Jiroušek, Ondřej

    2015-01-01

    Roč. 49, č. 2 (2015), s. 203-206 ISSN 1580-2949 R&D Projects: GA ČR(CZ) GAP105/12/0824 Institutional support: RVO:68378297 Keywords : aluminium foam * cantilever bending * micromechanics * optical strain measurement Subject RIV: JI - Composite Materials Impact factor: 0.439, year: 2015 http://mit.imt.si/Revija/izvodi/mit152/doktor.pdf

  5. Enhanced Raman scattering in porous silicon grating.

    Science.gov (United States)

    Wang, Jiajia; Jia, Zhenhong; Lv, Changwu

    2018-03-19

    The enhancement of Raman signal on monocrystalline silicon gratings with varying groove depths and on porous silicon grating were studied for a highly sensitive surface enhanced Raman scattering (SERS) response. In the experiment conducted, porous silicon gratings were fabricated. Silver nanoparticles (Ag NPs) were then deposited on the porous silicon grating to enhance the Raman signal of the detective objects. Results show that the enhancement of Raman signal on silicon grating improved when groove depth increased. The enhanced performance of Raman signal on porous silicon grating was also further improved. The Rhodamine SERS response based on Ag NPs/ porous silicon grating substrates was enhanced relative to the SERS response on Ag NPs/ porous silicon substrates. Ag NPs / porous silicon grating SERS substrate system achieved a highly sensitive SERS response due to the coupling of various Raman enhancement factors.

  6. Radiation Hardening of Silicon Detectors

    CERN Multimedia

    Leroy, C; Glaser, M

    2002-01-01

    %RD48 %title\\\\ \\\\Silicon detectors will be widely used in experiments at the CERN Large Hadron Collider where high radiation levels will cause significant bulk damage. In addition to increased leakage current and charge collection losses worsening the signal to noise, the induced radiation damage changes the effective doping concentration and represents the limiting factor to long term operation of silicon detectors. The objectives are to develop radiation hard silicon detectors that can operate beyond the limits of the present devices and that ensure guaranteed operation for the whole lifetime of the LHC experimental programme. Radiation induced defect modelling and experimental results show that the silicon radiation hardness depends on the atomic impurities present in the initial monocrystalline material.\\\\ \\\\ Float zone (FZ) silicon materials with addition of oxygen, carbon, nitrogen, germanium and tin were produced as well as epitaxial silicon materials with epilayers up to 200 $\\mu$m thickness. Their im...

  7. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    Science.gov (United States)

    Larsson, David; Greve, Anders; Hvam, Jørn M.; Boisen, Anja; Yvind, Kresten

    2009-03-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was ˜60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.

  8. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    DEFF Research Database (Denmark)

    Larsson, David; Greve, Anders; Hvam, Jørn Märcher

    2009-01-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power...... and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was 60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed....

  9. Feedback cooling of cantilever motion using a quantum point contact transducer

    International Nuclear Information System (INIS)

    Montinaro, M.; Mehlin, A.; Solanki, H. S.; Peddibhotla, P.; Poggio, M.; Mack, S.; Awschalom, D. D.

    2012-01-01

    We use a quantum point contact (QPC) as a displacement transducer to measure and control the low-temperature thermal motion of a nearby micromechanical cantilever. The QPC is included in an active feedback loop designed to cool the cantilever's fundamental mechanical mode, achieving a squashing of the QPC noise at high gain. The minimum achieved effective mode temperature of 0.2 K and the displacement resolution of 10 -11 m/√(Hz) are limited by the performance of the QPC as a one-dimensional conductor and by the cantilever-QPC capacitive coupling.

  10. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    Directory of Open Access Journals (Sweden)

    Felix Ströer

    2018-02-01

    Full Text Available Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective description of the stylus cantilever dynamics with system-theoretical techniques and show a simple iterative approach to optimize closed-loop control parameters with boundary conditions.

  11. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    International Nuclear Information System (INIS)

    Nordström, Maria; Hübner, Jörg; Boisen, Anja; Calleja, Montserrat

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps

  12. Integrated MOSFET-Embedded-Cantilever-Based Biosensor Characteristic for Detection of Anthrax Simulant

    Energy Technology Data Exchange (ETDEWEB)

    Mostafa, Salwa [University of Tennessee, Knoxville (UTK); Lee, Ida [ORNL; Islam, Syed K [University of Tennessee, Knoxville (UTK); Eliza, Sazia A. [University of Tennessee, Knoxville (UTK); Shekhawat, Gajendra [Northwestern University, Evanston; Dravid, Vinayak [Northwestern University, Evanston; Tulip, Fahmida S [ORNL

    2011-01-01

    In this work, MOSFET-embedded cantilevers are configured as microbial sensors for detection of anthrax simulants, Bacillus thuringiensis. Anthrax simulants attached to the chemically treated gold-coated cantilever cause changes in the MOSFET drain current due to the bending of the cantilever which indicates the detection of anthrax simulant. Electrical properties of the anthrax simulant are also responsible for the change in the drain current. The test results suggest a detection range of 10 L of stimulant test solution (a suspension population of 1.3 107 colony-forming units/mL diluted in 40% ethanol and 60% deionized water) with a linear response of 31 A/ L.

  13. Factors responsible for the stability and the existence of a clean energy gap of a silicon nanocluster

    International Nuclear Information System (INIS)

    Liu, Lei; Jayanthi, C. S.; Wu, Shi-Yu

    2001-01-01

    We present a critical theoretical study of electronic properties of silicon nanoclusters, in particular the roles played by symmetry, relaxation, and hydrogen passivation on the stability, the gap states and the energy gap of the system using the order N [O(N)] nonorthogonal tight-binding molecular dynamics and the local analysis of electronic structure. We find that for an unrelaxed cluster with its atoms occupying the regular tetrahedral network, the presence of undistorted local bonding configuration is sufficient for the appearance of a small clean energy gap. However, the energy gap of the unrelaxed cluster does not start at the highest occupied molecular orbital (HOMO). In fact, between the HOMO and the lower edge of the energy gap, localized dangling bond states are found. With hydrogen passivation, the localized dangling bond states are eliminated, resulting in a wider and clean energy gap. Relaxation of these hydrogen passivated clusters does not alter either the structure or the energy gap appreciably. However, if the silicon clusters are allowed to relax first, the majority of the dangling bonds are eliminated but additional defect states due to bond distortion appear, making the energy gap dirty. Hydrogen passivation of these relaxed clusters will further eliminate most of the remnant dangling bonds but no appreciable effect on the defect states associated with bond distortions will take place, thus still resulting in a dirty gap. For the hydrogen-passivated Si N nanoclusters with no bond distortion and no overall symmetry, we have studied the variation of the energy gap as a function of size of the cluster for N in the range of 80< N<6000. The dependence of the energy gap on the size shows similar behavior to that for silicon nanoclusters with no bond distortion but possessing overall symmetry

  14. Thermoelectric Properties of Silicon Germanium: An Investigation of the Reduction of Lattice Thermal Conductivity and Enhancement of Power Factor

    Science.gov (United States)

    Lahwal, Ali Sadek

    Thermoelectric materials are of technological interest owing to their ability of direct thermal-to-electrical energy conversion. In thermoelectricity, thermal gradients can be used to generate an electrical power output. Recent efforts in thermoelectrics are focused on developing higher efficient power generation materials. In this dissertation, the overall goal is to investigate both the n-type and p-type of the state of the art thermoelectric material, silicon germanium (SiGe), for high temperature power generation. Further improvement of thermoelectric performance of Si-Ge alloys hinges upon how to significantly reduce the as yet large lattice thermal conductivity, and optimizing the thermoelectric power factor PF. Our methods, in this thesis, will be into two different approaches as follow: The first approach is manipulating the lattice thermal conductivity of n and p-type SiGe alloys via direct nanoparticle inclusion into the n-type SiGe matrix and, in a different process, using a core shell method for the p-type SiGe. This approach is in line with the process of in-situ nanocomposites. Nanocomposites have become a new paradigm for thermoelectric research in recent years and have resulted in the reduction of thermal conductivity via the nano-inclusion and grain boundary scattering of heat-carrying phonons. To this end, a promising choice of nano-particle to include by direct mixing into a SiGe matrix would be Yttria Stabilized Zirconia ( YSZ). In this work we report the preparation and thermoelectric study of n-type SiGe + YSZ nanocomposites prepared by direct mechanical mixing followed by Spark Plasma Sintering (SPS) processing. Specifically, we experimentally investigated the reduction of lattice thermal conductivity (kappaL) in the temperature range (30--800K) of n-type Si 80Ge20P2 alloys with the incorporation of YSZ nanoparticles (20 ˜ 40 nm diameter) into the Si-Ge matrix. These samples synthesized by SPS were found to have densities > 95% of the

  15. Nonlinear Phenomena in the Single-Mode Dynamics in an AFM Cantilever Beam

    KAUST Repository

    Ruzziconi, Laura; Lenci, Stefano; Younis, Mohammad I.

    2016-01-01

    This study deals with the nonlinear dynamics arising in an atomic force microscope cantilever beam. After analyzing the static behavior, a single degree of freedom Galerkin reduced order model is introduced, which describes the overall scenario

  16. Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

    Energy Technology Data Exchange (ETDEWEB)

    Siwak, N. P. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States); Fan, X. Z.; Ghodssi, R. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Kanakaraju, S.; Richardson, C. J. K. [Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States)

    2014-10-06

    An integrated photodiode displacement readout scheme for a microelectromechanical cantilever waveguide resonator sensing platform is presented. III-V semiconductors are used to enable the monolithic integration of passive waveguides with active optical components. This work builds upon previously demonstrated results by measuring the displacement of cantilever waveguide resonators with on-chip waveguide PIN photodiodes. The on-chip integration of the readout provides an additional 70% improvement in mass sensitivity compared to off-chip photodetector designs due to measurement stability and minimized coupling loss. In addition to increased measurement stability, reduced packaging complexity is achieved due to the simplicity of the readout design. We have fabricated cantilever waveguides with integrated photodetectors and experimentally characterized these cantilever sensors with monolithically integrated PIN photodiodes.

  17. Fracture strength of fiber-reinforced surface-retained anterior cantilever restorations

    NARCIS (Netherlands)

    Oezcan, Mutlu; Kumbuloglu, Ovul; User, Atilla

    2008-01-01

    Purpose: This study compared the fracture strength of direct anterior cantilever fiber-reinforced composite (FRC) fixed partial dentures (FPD) reinforced with 3 types of E-glass fibers preimpregnated with either urethane tetramethacrylate, bisphenol glycidylmethacrylate/polymethyl methacrylate, or

  18. The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever

    Science.gov (United States)

    Palosaari, Jaakko; Leinonen, Mikko; Juuti, Jari; Jantunen, Heli

    2018-06-01

    In this research four piezoelectric bimorph type cantilevers for energy harvesting were manufactured, measured and analyzed to study the effects of substrate layer thickness on energy harvesting efficiency and durability under different accelerations. The cantilevers had the same dimensions of the piezoelectric ceramic components, but had different thicknesses of the steel substrate (no steel, 30 μm, 50 μm and 75 μm). The cantilevers were tuned to the same resonance frequency with different sizes of tip mass (2.13 g, 3.84 g, 4.17 g and 5.08 g). The energy harvester voltage outputs were then measured across an electrical load near to the resonance frequency (∼40 Hz) with sinusoidal vibrations under different accelerations. The stress exhibited by the four cantilevers was compared and analyzed and their durability was tested with accelerations up to 2.5 g-forces.

  19. Computer aided design of Langasite resonant cantilevers: analytical models and simulations

    Science.gov (United States)

    Tellier, C. R.; Leblois, T. G.; Durand, S.

    2010-05-01

    Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.

  20. Sensing technology for damage assessment of sign supports and cantilever poles : final report, August 31, 2010.

    Science.gov (United States)

    2010-08-31

    This report presents the results of research activities conducted under Contract No. 519691-PIT 008 on Sensing Technology for : Damage Assessment of Sign Supports and Cantilever Poles between the University of Pittsburgh and the Pennsylvania De...

  1. The Correlated Dynamics of Micron-Scale Cantilevers in a Viscous Fluid

    Science.gov (United States)

    Robbins, Brian A.

    A number of microcantilever systems of fundamental importance are explored using theoretical and numerical methods to quantify and provide physical insights into the dynamics of experimentally accessible systems that include a variety of configurations and viscous fluids. It is first shown that the correlated dynamics of both a laterally and vertically offset cantilever pair can be accurately predicted by numerical simulations. This is verified by comparing the correlated dynamics yielded by numerical simulations with experimental measurement. It is also demonstrated that in order to obtain these accurate predictions, geometric details of the cantilever must be included in the numerical simulation to directly reflect the experimental cantilever. A microrheology technique that utilizes the fluctuation-dissipation theorem is proposed. It is shown that by including the frequency dependence of the fluid damping, improvements in accuracy of the predictions of the rheological properties of the surrounding fluid are observed over current techniques. The amplitude spectrum of a 2-D cantilever in a power-law fluid is studied. The resulting amplitude spectrum yielded a curve similar to an overdamped system. It is observed that the amplitude and noise spectrum yield the same qualitative response for a 2-D cantilever in a shear-thinning, power-law fluid. The correlated dynamics of a tethered vertically offset cantilever pair is investigated. It is shown that for a range of stiffness ratios, which is the ratio of the spring constant of the tethering relative to the cantilever spring constant, the change in the correlated dynamics of a Hookean spring tethered cantilever pair can be seen in the presence of fluid coupling. The dynamics of a spring-mass tethered, vertically offset cantilever pair is qualitatively studied by simplifying the model to an array of springs and masses. The resulting study found that the correlated dynamics of the displacement of mass of the tethered

  2. DESIGN of MICRO CANTILEVER BEAM for VAPOUR DETECTION USING COMSOL MULTI PHYSICS SOFTWARE

    OpenAIRE

    Sivacoumar R; Parvathy JM; Pratishtha Deep

    2015-01-01

    This paper gives an overview of micro cantilever beam of various shapes and materials for vapour detection. The design of micro cantilever beam, analysis and simulation is done for each shape. The simulation is done using COMSOL Multi physics software using structural mechanics and chemical module. The simulation results of applied force and resulting Eigen frequencies will be analyzed for different beam structures. The vapour analysis is done using flow cell that consists of chemical pill...

  3. A Novel Approach to the Sensing of Liquid Density Using a Plastic Optical Fibre Cantilever Beam

    Science.gov (United States)

    Kulkarni, Atul; Kim, Youngjin; Kim, Taesung

    2009-01-01

    This article reports for the first time the use of a plastic optical fibre (POF) cantilever beam to measure the density of a liquid. The sensor is based on the Archimedes buoyancy principle. The sensor consists of a POF bonded on the surface of a metal beam in the form of a cantilever configuration, and at the free end of the beam a displacer is…

  4. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    OpenAIRE

    Felix Ströer; Katharina Trinkaus; Indek Raid; Jörg Seewig

    2018-01-01

    Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective de...

  5. Fabrication of a cantilever-based microfluidic flow meter with nL min(-1) resolution

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2011-01-01

    A microfluidic flow meter based on cantilever deflection is developed, showing a resolution down to 3 nL min(-1) for flows in the microliter range. The cantilevers are fabricated in SU-8 and have integrated holes with dimensions from 5 x 5 to20x 20 mu m(2). The holes make it possible to measure i......, hole-to-hole distance, amount of holes, etc) the sensitivity of the sensor can be changed....

  6. Innovative multi-cantilever array sensor system with MOEMS read-out

    Science.gov (United States)

    Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

    2016-11-01

    Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

  7. GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs

    International Nuclear Information System (INIS)

    Gregušová, Dagmar; Kúdela, Róbert; Eliáš, Peter; Šoltýs, Ján; Cambel, Vladimír; Kostič, Ivan

    2010-01-01

    We report on the design, fabrication and initial mechanical testing of cantilevers with tips based on a GaAs/In 0.485 Ga 0.515 P/AlAs heterostructure grown by metal organic chemical vapor deposition. They were produced using a dedicated technological process based on (1) the formation of integrated tips through an AlAs-assisted surface sacrificial wet-etching process and (2) the GaAs cantilever release fully protected between two InGaP etch-stop layers. 2 µm thick InGaP/GaAs/InGaP cantilevers had integrated pyramidal tips with the sides at ∼45° to (1 0 0). Metallic elements were processed close to the tip apexes using non-standard optical lithography. The cantilever release was accomplished using photolithography, Ar ion milling of InGaP and wet chemical etching of GaAs via resist layers deposited by a draping technique. A tip–cantilever prototype with length, width and thickness of 150, 35 and 2 µm, respectively, exhibited a resonance frequency of 66.2 kHz, which correlated well with a theoretical value of 57 kHz for a GaAs cantilever of identical dimensions. (technical note)

  8. Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

    International Nuclear Information System (INIS)

    Cheng, Chao-Lin; Fang, Weileun; Tsai, Ming-Han

    2015-01-01

    Many standard CMOS processes, provided by existing foundries, are available. These standard CMOS processes, with stacking of various metal and dielectric layers, have been extensively applied in integrated circuits as well as micro-electromechanical systems (MEMS). It is of importance to determine the material properties of the metal and dielectric films to predict the performance and reliability of micro devices. This study employs an existing approach to determine the coefficients of thermal expansion (CTEs) of metal and dielectric films for standard CMOS processes. Test cantilevers with different stacking of metal and dielectric layers for standard CMOS processes have been designed and implemented. The CTEs of standard CMOS films can be determined from measurements of the out-of-plane thermal deformations of the test cantilevers. To demonstrate the feasibility of the present approach, thin films prepared by the Taiwan Semiconductor Manufacture Company 0.35 μm 2P4M CMOS process are characterized. Eight test cantilevers with different stacking of CMOS layers and an auxiliary Si cantilever on a SOI wafer are fabricated. The equivalent elastic moduli and CTEs of the CMOS thin films including the metal and dielectric layers are determined, respectively, from the resonant frequency and static thermal deformation of the test cantilevers. Moreover, thermal deformations of cantilevers with stacked layers different to those of the test beams have been employed to verify the measured CTEs and elastic moduli. (paper)

  9. Three-electrode self-actuating self-sensing quartz cantilever: design, analysis, and experimental verification.

    Science.gov (United States)

    Chen, C Julian; Schwarz, Alex; Wiesendanger, Roland; Horn, Oliver; Müller, Jörg

    2010-05-01

    We present a novel quartz cantilever for frequency-modulation atomic force microscopy (FM-AFM) which has three electrodes: an actuating electrode, a sensing electrode, and a ground electrode. By applying an ac signal on the actuating electrode, the cantilever is set to vibrate. If the frequency of actuation voltage closely matches one of the characteristic frequencies of the cantilever, a sharp resonance should be observed. The vibration of the cantilever in turn generates a current on the sensing electrode. The arrangement of the electrodes is such that the cross-talk capacitance between the actuating electrode and the sensing electrode is less than 10(-16) F, thus the direct coupling is negligible. To verify the principle, a number of samples were made. Direct measurements with a Nanosurf easyPPL controller and detector showed that for each cantilever, one or more vibrational modes can be excited and detected. Using classical theory of elasticity, it is shown that such novel cantilevers with proper dimensions can provide optimized performance and sensitivity in FM-AFM with very simple electronics.

  10. Cancelation of thermally induced frequency shifts in bimaterial cantilevers by nonlinear optomechanical interactions

    Energy Technology Data Exchange (ETDEWEB)

    Vy, Nguyen Duy, E-mail: nguyenduyvy@tdt.edu.vn [Theoretical Physics Research Group, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Tri Dat, Le [Faculty of Physics and Engineering Physics, University of Science, Ho Chi Minh City 748355 (Viet Nam); Iida, Takuya [Department of Physical Science, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531 (Japan)

    2016-08-01

    Bimaterial cantilevers have recently been used in, for example, the calorimetric analysis with picowatt resolution in microscopic space based on state-of-the-art atomic force microscopes. However, thermally induced effects usually change physical properties of the cantilevers, such as the resonance frequency, which reduce the accuracy of the measurements. Here, we propose an approach to circumvent this problem that uses an optical microcavity formed between a metallic layer coated on the back of the cantilever and one coated at the end of an optical fiber irradiating the cantilever. In addition to increasing the sensitivity, the optical rigidity of this system diminishes the thermally induced frequency shift. For a coating thickness of several tens of nanometers, the input power is 5–10 μW. These values can be evaluated from parameters derived by directly irradiating the cantilever in the absence of the microcavity. The system has the potential of using the cantilever both as a thermometer without frequency shifting and as a sensor with nanometer-controlled accuracy.

  11. Q-factor control of multilayer micromembrane using PZT composite material

    Science.gov (United States)

    Čekas, Elingas; Janušas, Giedrius; Palevicius, Arvydas; Janušas, Tomas; Ciganas, Justas

    2018-02-01

    Cantilever and membrane based sensors, which are capable of providing accurate detection of target analytes have been always an important research topic of medical diagnostics, food testing, and environmental monitoring fields. Here, the mechanical detection is achieved by micro- and nano-scale cantilevers for stress sensing and mass sensing, or micro- and nano-scale plates or membranes. High sensitivity is a major issue for the active element and it could be achieved via increased Q-factor. The ability to control the Q factor expands the range of application of the device and allows to achieve more accurate results. The aim of this paper is to investigate the mechanical and electrical properties, as well as, the ability to control the Q factor of the membrane with PZT nanocomposite. This multilayered membrane was formatted using the n-type silicon substrate by implementing the Low Pressure Chemical Vapor Deposition (LPCVD), photolithography by using photomask with defined dimensions, deep etching, and e-beam evaporation techniques. Dynamic and electrical characteristics of the membrane were numerically investigated using COMSOL Multiphysics software. The use of the multilayered membrane can range from simple monitoring of particles concentration in a closed environment to inspecting glucose levels in human fluids (blood, tears, sweat, etc.).

  12. Cantilever beam test in Zr-2.5%Nb: Comparative study between pipe material obtained by laminating and wire drawing

    International Nuclear Information System (INIS)

    Gomez, A G; Szieber, W C; Vizcaino, P; Loureiro, N; Bianchi, D R; Banchik, A D

    2012-01-01

    The Zr-2.5Nb alloy is used in the manufacture of pressure tubes for the CANDU nuclear power reactors. These tubes are subjected to severe service conditions: one o f them, the heavy water corrosion due to the coolant generates release of hydrogen, part of which ingress in the material raising its initial concentration and exposing them to a phenomena referred as delay hydrogen cracking. The results presented in this paper show the performance of a pressure tube of domestic manufacture under conditions of tension and hydrogen content in order to be compared with the behavior of a standard pressure tube in operation in the nuclear power plant. To do this is, cantilever notched and pre cracked samples were hydrided from both kinds of tubes. Each one of these samples was subjected to the cantilever beam test, which consists in a bending test performed in a furnace at 250 o C. Starting from a stress intensity factor Ki which determines the propagation start of the crack, the growth is followed by the acoustic emission technique up to the arrest of the crack by controlling the bending load. This work presents the comparative data such as critical voltages, behavior of hydrides, and DHC parameters from both trials. Although the number of tests is reduced; results show a good performance of the tubes of domestic manufacture (author)

  13. Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Yu, Feng; Doering, Lutz; Völlmeke, Stefan; Brand, Uwe; Bakin, Andrey; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for high-speed surface roughness scanning systems. The fabrication steps of the high-aspect-ratio silicon microprobe tips were started with photolithography and wet etching of potassium hydroxide (KOH) resulting in crystal-dependent micropyramids. Subsequently, thin conformal wear-resistant layer coating of aluminum oxide (Al2O3) was demonstrated on the backside of the piezoresistive cantilever free end using atomic layer deposition (ALD) method in a binary reaction sequence with a low thermal process and precursors of trimethyl aluminum and water. The deposited Al2O3 layer had a thickness of 14 nm. The captured atomic force microscopy (AFM) image exhibits a root mean square deviation of 0.65 nm confirming the deposited Al2O3 surface quality. Furthermore, vacuum-evaporated 30-nm/200-nm-thick Au/Cr layers were patterned by lift-off and served as an etch mask for Al2O3 wet etching and in ICP cryogenic dry etching. By using SF6/O2 plasma during inductively coupled plasma (ICP) cryogenic dry etching, micropillar tips were obtained. From the preliminary friction and wear data, the developed silicon cantilever sensor has been successfully used in 100 fast measurements of 5- mm-long standard artifact surface with a speed of 15 mm/s and forces of 60-100 μN. Moreover, the results yielded by the fabricated silicon cantilever sensor are in very good agreement with those of calibrated profilometer. These tactile sensors are targeted for use in high-aspect-ratio microform metrology.

  14. A single nano cantilever as a reprogrammable universal logic gate

    KAUST Repository

    Chappanda, K. N.

    2017-02-24

    The current transistor-based computing circuits use multiple interconnected transistors to realize a single Boolean logic gate. This leads to higher power requirements and delayed computing. Transistors are not suitable for applications in harsh environments and require complicated thermal management systems due to excessive heat dissipation. Also, transistor circuits lack the ability to dynamically reconfigure their functionality in real time, which is desirable for enhanced computing capability. Further, the miniaturization of transistors to improve computational power is reaching its ultimate physical limits. As a step towards overcoming the limitations of transistor-based computing, here we demonstrate a reprogrammable universal Boolean logic gate based on a nanoelectromechanical cantilever (NC) oscillator. The fundamental XOR, AND, NOR, OR and NOT logic gates are condensed in a single NC, thereby reducing electrical interconnects between devices. The device is dynamically switchable between any logic gates at the same drive frequency without the need for any change in the circuit. It is demonstrated to operate at elevated temperatures minimizing the need for thermal management systems. It has a tunable bandwidth of 5 MHz enabling parallel and dynamically reconfigurable logic device for enhanced computing.

  15. Nonlinear Response of Cantilever Beams to Combination and Subcombination Resonances

    Directory of Open Access Journals (Sweden)

    Ali H. Nayfeh

    1998-01-01

    Full Text Available The nonlinear planar response of cantilever metallic beams to combination parametric and external subcombination resonances is investigated, taking into account the effects of cubic geometric and inertia nonlinearities. The beams considered here are assumed to have large length-to-width aspect ratios and thin rectangular cross sections. Hence, the effects of shear deformations and rotatory inertia are neglected. For the case of combination parametric resonance, a two-mode Galerkin discretization along with Hamilton’s extended principle is used to obtain two second-order nonlinear ordinary-differential equations of motion and associated boundary conditions. Then, the method of multiple scales is applied to obtain a set of four first-order nonlinear ordinary-differential equations governing the modulation of the amplitudes and phases of the two excited modes. For the case of subcombination resonance, the method of multiple scales is applied directly to the Lagrangian and virtual-work term. Then using Hamilton’s extended principle, we obtain a set of four first-order nonlinear ordinary-differential equations governing the amplitudes and phases of the two excited modes. In both cases, the modulation equations are used to generate frequency- and force-response curves. We found that the trivial solution exhibits a jump as it undergoes a subcritical pitchfork bifurcation. Similarly, the nontrivial solutions also exhibit jumps as they undergo saddle-node bifurcations.

  16. A single nano cantilever as a reprogrammable universal logic gate

    International Nuclear Information System (INIS)

    Chappanda, K N; Ilyas, S; Kazmi, S N R; Younis, M I; Holguin-Lerma, J; Batra, N M; Costa, P M F J

    2017-01-01

    The current transistor-based computing circuits use multiple interconnected transistors to realize a single Boolean logic gate. This leads to higher power requirements and delayed computing. Transistors are not suitable for applications in harsh environments and require complicated thermal management systems due to excessive heat dissipation. Also, transistor circuits lack the ability to dynamically reconfigure their functionality in real time, which is desirable for enhanced computing capability. Further, the miniaturization of transistors to improve computational power is reaching its ultimate physical limits. As a step towards overcoming the limitations of transistor-based computing, here we demonstrate a reprogrammable universal Boolean logic gate based on a nanoelectromechanical cantilever (NC) oscillator. The fundamental XOR, AND, NOR, OR and NOT logic gates are condensed in a single NC, thereby reducing electrical interconnects between devices. The device is dynamically switchable between any logic gates at the same drive frequency without the need for any change in the circuit. It is demonstrated to operate at elevated temperatures minimizing the need for thermal management systems. It has a tunable bandwidth of 5 MHz enabling parallel and dynamically reconfigurable logic device for enhanced computing. (paper)

  17. Nonlinear Phenomena in the Single-Mode Dynamics in an AFM Cantilever Beam

    KAUST Repository

    Ruzziconi, Laura

    2016-12-05

    This study deals with the nonlinear dynamics arising in an atomic force microscope cantilever beam. After analyzing the static behavior, a single degree of freedom Galerkin reduced order model is introduced, which describes the overall scenario of the structure response in a neighborhood of the primary resonance. Extensive numerical simulations are performed when both the forcing amplitude and frequency are varied, ranging from low up to elevated excitations. The coexistence of competing attractors with different characteristics is analyzed. Both the non-resonant and the resonant behavior are observed, as well as ranges of inevitable escape. Versatility of behavior is highlighted, which may be attractive in applications. Special attention is devoted to the effects of the tip-sample separation distance, since this aspect is of fundamental importance to understand the operation of an AFM. We explore the metamorphoses of the multistability region when the tip-sample separation distance is varied. To have a complete description of the AFM response, comprehensive behavior charts are introduced to detect the theoretical boundaries of appearance and disappearance of the main attractors. Also, extensive numerical simulations investigate the AFM response when both the forcing amplitude and the tip-sample separation distance are considered as control parameters. The main features are analyzed in detail and the obtained results are interpreted in terms of oscillations of the cantilever-tip ensemble. However, we note that all the aforementioned results represent the limit when disturbances are absent, which never occurs in practice. Here comes the importance of overcoming local investigations and exploring dynamics from a global perspective, by introducing dynamical integrity concepts. To extend the AFM results to the practical case where disturbances exist, we develop a dynamical integrity analysis. After performing a systematic basin of attraction analysis, integrity

  18. Effects of size and defects on the elasticity of silicon nanocantilevers

    International Nuclear Information System (INIS)

    Sadeghian, Hamed; Goosen, Johannes F L; Van Keulen, Fred; Yang, Chung-Kai; Bossche, Andre; French, Paddy J; Staufer, Urs

    2010-01-01

    The size-dependent elastic behavior of silicon nanocantilevers and nanowires, specifically the effective Young's modulus, has been determined by experimental measurements and theoretical investigations. The size dependence becomes more significant as the devices scale down from micro- to nano-dimensions, which has mainly been attributed to surface effects. However, discrepancies between experimental measurements and computational investigations show that there could be other influences besides surface effects. In this paper, we try to determine to what extent the surface effects, such as surface stress, surface elasticity, surface contamination and native oxide layers, influence the effective Young's modulus of silicon nanocantilevers. For this purpose, silicon cantilevers were fabricated in the top device layer of silicon on insulator (SOI) wafers, which were thinned down to 14 nm. The effective Young's modulus was extracted with the electrostatic pull-in instability method, recently developed by the authors (H Sadeghian et al 2009 Appl. Phys. Lett. 94 221903). In this work, the drop in the effective Young's modulus was measured to be significant at around 150 nm thick cantilevers. The comparison between theoretical models and experimental measurements demonstrates that, although the surface effects influence the effective Young's modulus of silicon to some extent, they alone are insufficient to explain why the effective Young's modulus decreases prematurely. It was observed that the fabrication-induced defects abruptly increased when the device layer was thinned to below 100 nm. These defects became visible as pinholes during HF-etching. It is speculated that they could be the origin of the reduced effective Young's modulus experimentally observed in ultra-thin silicon cantilevers.

  19. Vitamin D deficiency as a risk factor for the development of autoantibodies in patients with ASIA and silicone breast implants: a cohort study and review of the literature.

    Science.gov (United States)

    Colaris, Maartje J L; van der Hulst, Rene R; Tervaert, Jan Willem Cohen

    2017-05-01

    The development of autoimmunity and/or autoimmune diseases is multifactorial. Vitamin D is one of the factors that might play a role. We postulated that both the presence of adjuvants and insufficient levels of vitamin D may result in the development of autoimmunity in patients with autoimmune/inflammatory syndrome induced by adjuvants (ASIA) in relation to silicone implant incompatibility. We measured vitamin D levels in 135 patients with ASIA in relation to silicone implant incompatibility and related findings to the presence of autoantibodies that are commonly used to diagnose systemic autoimmune diseases. Furthermore, we systematically reviewed the literature regarding vitamin D deficiency as a risk factor for the development of autoantibodies. Vitamin D measurements were available for analysis in 131 of 135 patients with ASIA in relation to SIIS. Twenty-three patients (18%) tested positive for autoantibodies, from which 18 patients (78%) had either a vitamin D deficiency or insufficiency (median vitamin D level 60.5 mmol/L), whereas five patients (22%) had sufficient vitamin D levels. The risk to develop autoantibodies was significantly increased in vitamin D deficient and/or insufficient patients [RR 3.14; 95% CI, 1.24-7.95; p = 0.009]. Reviewed literature suggested an association between vitamin D levels and the presence and/or titer levels of autoantibodies in different autoimmune diseases. From our current study and from our review of the literature, we conclude that vitamin D deficiency is related to the presence of autoantibodies. Whether vitamin D supplementation results in a decrease of autoimmunity needs to be studied prospectively.

  20. Strategies for doped nanocrystalline silicon integration in silicon heterojunction solar cells

    Czech Academy of Sciences Publication Activity Database

    Seif, J.; Descoeudres, A.; Nogay, G.; Hänni, S.; de Nicolas, S.M.; Holm, N.; Geissbühler, J.; Hessler-Wyser, A.; Duchamp, M.; Dunin-Borkowski, R.E.; Ledinský, Martin; De Wolf, S.; Ballif, C.

    2016-01-01

    Roč. 6, č. 5 (2016), s. 1132-1140 ISSN 2156-3381 R&D Projects: GA MŠk LM2015087 Institutional support: RVO:68378271 Keywords : microcrystalline silicon * nanocrystalline silicon * silicon heterojunctions (SHJs) * solar cells Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 3.712, year: 2016

  1. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    International Nuclear Information System (INIS)

    Keller, Stephan; Boisen, Anja; Haefliger, Daniel

    2010-01-01

    SU-8 cantilevers with a thickness of 2 µm were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T PEB = 50 °C followed by a hard bake at T HB = 90 °C proved to be optimal to ensure low cantilever bending and low rotational deformation due to excellent device release and low change of these properties with time. With the optimized process, the reproducible fabrication of arrays with 2 µm thick cantilevers with a length of 500 µm and an initial bending of less than 20 µm was possible. The theoretical spring constant of these cantilevers is k = 4.8 ± 2.5 mN m −1 , which is comparable to the value for Si cantilevers with identical dimensions and a thickness of 500 nm.

  2. Integrated cantilever-based flow sensors with tunable sensitivity for in-line monitoring of flow fluctuations in microfluidic systems

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2014-01-01

    For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different...... is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external...

  3. Silicon Qubits

    Energy Technology Data Exchange (ETDEWEB)

    Ladd, Thaddeus D. [HRL Laboratories, LLC, Malibu, CA (United States); Carroll, Malcolm S. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

    2018-02-28

    Silicon is a promising material candidate for qubits due to the combination of worldwide infrastructure in silicon microelectronics fabrication and the capability to drastically reduce decohering noise channels via chemical purification and isotopic enhancement. However, a variety of challenges in fabrication, control, and measurement leaves unclear the best strategy for fully realizing this material’s future potential. In this article, we survey three basic qubit types: those based on substitutional donors, on metal-oxide-semiconductor (MOS) structures, and on Si/SiGe heterostructures. We also discuss the multiple schema used to define and control Si qubits, which may exploit the manipulation and detection of a single electron charge, the state of a single electron spin, or the collective states of multiple spins. Far from being comprehensive, this article provides a brief orientation to the rapidly evolving field of silicon qubit technology and is intended as an approachable entry point for a researcher new to this field.

  4. Nonlinear motion of cantilevered SWNT and Its Meaning to Phonon Dynamics

    Science.gov (United States)

    Koh, Heeyuen; Cannon, James; Chiashi, Shohei; Shiomi, Junichiro; Maruyama, Shigeo

    2013-03-01

    Based on the finding that the lowest frequency mode of cantilevered SWNT is described by the continuum beam theory in frequency domain, we considered its effect of the symmetric structure for the coupling of orthogonal transverse modes to explain the nonlinear motion of free thermal vibration. This nonlinear motion calculated by our molecular dynamics simulation, once regarded as noise, is observed to have the periodic order with duffing and beating, which is dependent on aspect ratio and temperature. It could be dictated by the governing equation from the Green Lagrangian strain tensor. The nonlinear beam equation from strain tensor described the motion well for various models which has different aspect ratio in molecular dynamics simulation. Since this motion is nothing but the interaction between 2nd mode of radial, tangential mode and 1st longitudinal mode, it was found that Green Lagrangian strain tensor is capable to deal such coupling. The free thermal motion of suspended SWNT is also considered without temperature gradient. The Q factor measured by this theoretical analysis will be discussed. Part of this work was financially supported by Grant-in-Aid for Scientific Research (19054003 and 22226006), and Global COE Program 'Global Center for Excellence for Mechanical Systems Innovation'

  5. Silicon concentrator cells in a two-stage photovoltaic system with a concentration factor of 300x

    Energy Technology Data Exchange (ETDEWEB)

    Mohr, A.

    2005-06-15

    In this work a rear contacted silicon concentrator cell was developed for an application in a two stage concentrator photovoltaic system. This system was developed at Fraunhofer ISE some years ago. The innovation of this one-axis tracked system is that it enables a high geometrical concentration of 300x in combination with a high optical efficiency (around 78%) and a large acceptance angle of {+-}23.5 all year through. For this, the system uses a parabolic mirror (40.4x) and a three dimensional second stage consisting of compound parabolic concentrators (CPCs, 7.7x). For the concentrator concept and particularly for an easy cell integration, the rear line contacted concentrator (RLCC) cells with a maximum efficiency of 25% were developed and a hybrid mounting concept for the RLCC cells is presented. The optical performance of different CPC materials was tested and analysed in this work. Finally, small modules consisting of six series interconnected RLCC cells and six CPCs were integrated into the concentrator system and tested outdoor. A system efficiency of 16.2% was reached at around 800 W/m2 direct irradiance under realistic outdoor conditions. (orig.)

  6. MicroCantilever (MC) based nanomechanical sensor for detection of molecular interactions

    Energy Technology Data Exchange (ETDEWEB)

    Kang, Kyung [Iowa State Univ., Ames, IA (United States)

    2011-01-01

    Specific aims of this study are to investigate the mechanism governing surface stress generation associated with chemical or molecular binding on functionalized microcantilevers. Formation of affinity complexes on cantilever surfaces leads to charge redistribution, configurational change and steric hindrance between neighboring molecules resulting in surface stress change and measureable cantilever deformation. A novel interferometry technique employing two adjacent micromachined cantilevers (a sensing/reference pair) was utilized to measure the cantilever deformation. The sensing principle is that binding/reaction of specific chemical or biological species on the sensing cantilever transduces to mechanical deformation. The differential bending of the sensing cantilever respect to the reference cantilever ensures that measured response is insensitive to environmental disturbances. As a proof of principle for the measurement technique, surface stress changes associated with: self-assembly of alkanethiol, hybridization of ssDNA, and the formation of cocaine-aptamer complexes were measured. Dissociation constant (Kd) for each molecular reaction was utilized to estimate the surface coverage of affinity complexes. In the cases of DNA hybridization and cocaine-aptamer binding, measured surface stress was found to be dependent on the surface coverage of the affinity complexes. In order to achieve a better sensitivity for DNA hybridization, immobilization of receptor molecules was modified to enhance the deformation of underlying surface. Single-stranded DNA (ssDNA) strands with thiol-modification on both 3-foot and 5-foot ends were immobilized on the gold surface such that both ends are attached to the gold surface. Immobilization condition was controlled to obtain similar receptor density as single-thiolated DNA strands. Hybridization of double-thiolated DNA strands leads to an almost two orders of magnitude increase in cantilever deformation. In both DNA

  7. An AlN cantilever for a wake-up switch triggered by air pressure change

    International Nuclear Information System (INIS)

    Kaiho, Y; Itoh, T; Maeda, R; Takahashi, H; Matsumoto, K; Shimoyama, I; Tomimatsu, Y; Kobayashi, T

    2013-01-01

    This research reports an AlN cantilever with an air chamber for a wake-up switch triggered by air pressure change. The proposed sensor is designed to fulfil both high sensitivity and low power consumption. By combining an air chamber to the one side of the AlN cantilever surface, the barometric pressure change generates a piezoelectric voltage. Thus, a wake-up switch triggered by air pressure change can be achieved using an AlN cantilever. The size of the fabricated AlN cantilever was 2000 μm × 1000 μm × 2 μm. The sensitivity to static differential pressure was 11.5 mV/Pa at the range of −20 Pa to 20 Pa. We evaluated the response of the sensor, which was composed of the AlN cantilever and the chamber of 60 ml in volume, when air pressure change was applied. The output voltage increased with increasing the applied air pressure change. It was observed that the maximum output voltage of 50 mV was generated when the air pressure change was 13 Pa

  8. Numerical investigation of band gaps in 3D printed cantilever-in-mass metamaterials

    Science.gov (United States)

    Qureshi, Awais; Li, Bing; Tan, K. T.

    2016-06-01

    In this research, the negative effective mass behavior of elastic/mechanical metamaterials is exhibited by a cantilever-in-mass structure as a proposed design for creating frequency stopping band gaps, based on local resonance of the internal structure. The mass-in-mass unit cell model is transformed into a cantilever-in-mass model using the Bernoulli-Euler beam theory. An analytical model of the cantilever-in-mass structure is derived and the effects of geometrical dimensions and material parameters to create frequency band gaps are examined. A two-dimensional finite element model is created to validate the analytical results, and excellent agreement is achieved. The analytical model establishes an easily tunable metamaterial design to realize wave attenuation based on locally resonant frequency. To demonstrate feasibility for 3D printing, the analytical model is employed to design and fabricate 3D printable mechanical metamaterial. A three-dimensional numerical experiment is performed using COMSOL Multiphysics to validate the wave attenuation performance. Results show that the cantilever-in-mass metamaterial is capable of mitigating stress waves at the desired resonance frequency. Our study successfully presents the use of one constituent material to create a 3D printed cantilever-in-mass metamaterial with negative effective mass density for stress wave mitigation purposes.

  9. Research on fiber-optic cantilever-enhanced photoacoustic spectroscopy for trace gas detection

    Science.gov (United States)

    Chen, Ke; Zhou, Xinlei; Gong, Zhenfeng; Yu, Shaochen; Qu, Chao; Guo, Min; Yu, Qingxu

    2018-01-01

    We demonstrate a new scheme of cantilever-enhanced photoacoustic spectroscopy, combining a sensitivity-improved fiber-optic cantilever acoustic sensor with a tunable high-power fiber laser, for trace gas detection. The Fabry-Perot interferometer based cantilever acoustic sensor has advantages such as high sensitivity, small size, easy to install and immune to electromagnetic. Tunable erbium-doped fiber ring laser with an erbium-doped fiber amplifier is used as the light source for acoustic excitation. In order to improve the sensitivity for photoacoustic signal detection, a first-order longitudinal resonant photoacoustic cell with the resonant frequency of 1624 Hz and a large size cantilever with the first resonant frequency of 1687 Hz are designed. The size of the cantilever is 2.1 mm×1 mm, and the thickness is 10 μm. With the wavelength modulation spectrum and second-harmonic detection methods, trace ammonia (NH3) has been measured. The gas detection limits (signal-to-noise ratio = 1) near the wavelength of 1522.5 nm is achieved to be 3 ppb.

  10. Cantilever contribution to the total electrostatic force measured with the atomic force microscope

    International Nuclear Information System (INIS)

    Guriyanova, Svetlana; Golovko, Dmytro S; Bonaccurso, Elmar

    2010-01-01

    The atomic force microscope (AFM) is a powerful tool for surface imaging at the nanometer scale and surface force measurements in the piconewton range. Among long-range surface forces, the electrostatic forces play a predominant role. They originate if the electric potentials of the substrate and of the tip of the AFM cantilever are different. A quantitative interpretation of the AFM signal is often difficult because it depends in a complicated fashion on the cantilever–tip–surface geometry. Since the electrostatic interaction is a long-range interaction, the cantilever, which is many microns from the surface, contributes to the total electrostatic force along with the tip. Here we present results of the electrostatic interaction between a conducting flat surface and horizontal or tilted cantilevers, with and without tips, at various distances from the surface. As addressed in a previous work, we show that the contribution of the cantilever to the overall force cannot be neglected. Based on a predictive model and on 3D confocal measurements, we discuss the influence of the tilting angle of the cantilever

  11. Stress Measurement around a Circular Role in a Cantilever Beam under Bending Moment Using Strain Gage and Reflective Photoelasticity

    Energy Technology Data Exchange (ETDEWEB)

    Baek, Tae Hyun; Park, Tae Geun; Yang, Min Bok [Kunsan National University, Gunsan (Korea, Republic of)

    2006-10-15

    It is necessary to study on the stress concentration experimentally, which is the main reason to avoid mechanical dilapidation and failure, when designing a mechanical structure. Stress concentration factor of a specimen of cantilever beam with a circular hole in the center was measured using both strain gage and photoelastic methods in this paper. In strain-gage measurement, three strain gages along the line near a hole of the specimen were installed and maximum strain was extrapolated from three measurements. In photoelastic measurement, two methods were employed. First, the Babinet-Soleil compensation method was used to measure the maximum strain. Secondly, photoelastic 4-step phase shilling method was applied to observe the strain distribution around the hole. Measurements obtained by different experiments were comparable within the range of experimental error

  12. Stress Measurement around a Circular Role in a Cantilever Beam under Bending Moment Using Strain Gage and Reflective Photoelasticity

    International Nuclear Information System (INIS)

    Baek, Tae Hyun; Park, Tae Geun; Yang, Min Bok

    2006-01-01

    It is necessary to study on the stress concentration experimentally, which is the main reason to avoid mechanical dilapidation and failure, when designing a mechanical structure. Stress concentration factor of a specimen of cantilever beam with a circular hole in the center was measured using both strain gage and photoelastic methods in this paper. In strain-gage measurement, three strain gages along the line near a hole of the specimen were installed and maximum strain was extrapolated from three measurements. In photoelastic measurement, two methods were employed. First, the Babinet-Soleil compensation method was used to measure the maximum strain. Secondly, photoelastic 4-step phase shilling method was applied to observe the strain distribution around the hole. Measurements obtained by different experiments were comparable within the range of experimental error

  13. Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

    Science.gov (United States)

    Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

    2018-04-01

    This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

  14. Cantilever-based bio-chemical sensor integrated in a microliquid handling system

    DEFF Research Database (Denmark)

    Thaysen, Jacob; Marie, Rodolphe; Boisen, Anja

    2001-01-01

    The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication...... based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been...... monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system....

  15. High-speed imaging upgrade for a standard sample scanning atomic force microscope using small cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Adams, Jonathan D.; Nievergelt, Adrian; Erickson, Blake W.; Yang, Chen; Dukic, Maja; Fantner, Georg E., E-mail: georg.fantner@epfl.ch [Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)

    2014-09-15

    We present an atomic force microscope (AFM) head for optical beam deflection on small cantilevers. Our AFM head is designed to be small in size, easily integrated into a commercial AFM system, and has a modular architecture facilitating exchange of the optical and electronic assemblies. We present two different designs for both the optical beam deflection and the electronic readout systems, and evaluate their performance. Using small cantilevers with our AFM head on an otherwise unmodified commercial AFM system, we are able to take tapping mode images approximately 5–10 times faster compared to the same AFM system using large cantilevers. By using additional scanner turnaround resonance compensation and a controller designed for high-speed AFM imaging, we show tapping mode imaging of lipid bilayers at line scan rates of 100–500 Hz for scan areas of several micrometers in size.

  16. Vibrational fatigue failures in short cantilevered piping with socket-welding fittings

    International Nuclear Information System (INIS)

    Smith, J.K.

    1996-01-01

    Approximately 80% of the vibrational fatigue failures in nuclear power plants have been caused by high cycle vibrational fatigue. Many of these failures have occurred in short, small bore (2 in. nominal diameter and smaller), unbraced, cantilevered piping with socket-welding fittings. The fatigue failures initiated in the socket welds. These failures have been unexpected, and have caused costly, unscheduled outages in some cases. In order to reduce the number of vibrational fatigue failures in these short cantilevered pipes, an acceleration based vibrational fatigue screening criteria was developed under Electric Power Research Institute (EPRI) sponsorship. In this paper, the acceleration based criteria will be compared to the results obtained from detailed dynamic modeling of a short, cantilevered pipe

  17. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

    Directory of Open Access Journals (Sweden)

    Jian Yang

    2018-02-01

    Full Text Available A novel design of piezoelectric aluminum nitride (AlN-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.

  18. Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers

    International Nuclear Information System (INIS)

    Fu, Y Q; Milne, S B; Luo, J K; Flewitt, A J; Wang, L; Miao, J M; Milne, W I

    2006-01-01

    A variable RF capacitor with a-Si:H (doped with phosphine) cantilevers as the top electrode were designed and fabricated. Because the top multi-cantilever electrodes have different lengths, increasing the applied voltage pulled down the cantilever beams sequentially, thus realizing a gradual increase of the capacitance with the applied voltage. A high-k material, H f O 2 , was used as an insulating layer to increase the tuning range of the capacitance. The measured capacitance from the fabricated capacitor was much lower and the pull-in voltage was much higher than those from theoretical analysis because of incomplete contact of the two electrodes, existence of film differential stresses and charge injection effect. Increase of sweeping voltage rate could significantly shift the pull-in voltage to higher values due to the charge injection mechanisms

  19. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    DEFF Research Database (Denmark)

    Keller, Stephan Urs; Haefliger, D.; Boisen, Anja

    2010-01-01

    SU-8 cantilevers with a thickness of 2 mu m were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel......, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after...... development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T-PEB = 50 degrees C followed by a hard...

  20. A DVD-ROM based high-throughput cantilever sensing platform

    DEFF Research Database (Denmark)

    Bosco, Filippo

    and October 2011. The project was part of the Xsense research network, funded by the Strategic Danish Research Council, and supervised by Prof. Anja Boisen. The goal of the Xsense project is to design and fabricate a compact and cheap device for explosive sensing in air and liquid. Four different technologies...... of a high-throughput label-free sensor platform utilizing cantilever based sensors. These sensors have often been acclaimed to facilitate highly parallelized operation. Unfortunately, so far no concept has been presented which offers large data sets as well as easy liquid sample handling. We use optics...... and mechanics from a DVD player to handle liquid samples and to read-out cantilever deflection and resonant frequency. In a few minutes, several liquid samples can be analyzed in parallel, measuring over several hundreds of individual cantilevers. Three generations of systems have been developed and tested...

  1. Development of Robust and Standardized Cantilever Sensors Based on Biotin/Neutravidin Coupling for Antibody Detection

    Directory of Open Access Journals (Sweden)

    Christoph Gerber

    2013-04-01

    Full Text Available A cantilever-based protein biosensor has been developed providing a customizable multilayer platform for the detection of antibodies. It consists of a biotin-terminated PEG layer pre-functionalized on the gold-coated cantilever surface, onto which NeutrAvidin is adsorbed through biotin/NeutrAvidin specific binding. NeutrAvidin is used as a bridge layer between the biotin-coated surface and the biotinylated biomolecules, such as biotinylated bovine serum albumin (biotinylated BSA, forming a multilayer sensor for direct antibody capture. The cantilever biosensor has been successfully applied to the detection of mouse anti-BSA (m-IgG and sheep anti-BSA(s-IgG antibodies. As expected, the average differential surface stress signals of about 5.7 ± 0.8 ´ 10−3 N/m are very similar for BSA/m-IgG and BSA/s-IgG binding, i.e., they are independent of the origin of the antibody. A statistic evaluation of 112 response curves confirms that the multilayer protein cantilever biosensor shows high reproducibility. As a control test, a biotinylated maltose binding protein was used for detecting specificity of IgG, the result shows a signal of bBSA layer in response to antibody is 5.8 ´ 10−3 N/m compared to bMBP. The pre-functionalized biotin/PEG cantilever surface is found to show a long shelf-life of at least 40 days and retains its responsivity of above 70% of the signal when stored in PBS buffer at 4 °C. The protein cantilever biosensor represents a rapid, label-free, sensitive and reliable detection technique for a real-time protein assay.

  2. SU-8 cantilevers for bio/chemical sensing; Fabrication, characterisation and development of novel read-out methods

    DEFF Research Database (Denmark)

    Nordström, M.; Keller, Stephan Urs; Lillemose, Michael

    2008-01-01

    Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young's modulus. We show...

  3. Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

    DEFF Research Database (Denmark)

    Abadal, G.; Davis, Zachary James; Helbo, Bjarne

    2001-01-01

    A simple linear electromechanical model for an electrostatically driven resonating cantilever is derived. The model has been developed in order to determine dynamic quantities such as the capacitive current flowing through the cantilever-driver system at the resonance frequency, and it allows us ...

  4. Fiber Bragg grating sensor based on cantilever structure embedded in polymer 3D printed material

    Science.gov (United States)

    Lima, Rita; Tavares, R.; Silva, S. O.; Abreu, P.; Restivo, Maria T.; Frazão, O.

    2017-04-01

    A cantilever structure in 3D printed based on a fiber Bragg grating (FBG) sensor embedded in polymer material is proposed. The FBG sensor was embedded in 3D printed coating and was tested under three physical parameters: displacement, temperature and vibration. The sensor was tested in displacement in two different regions of the cantilever, namely, on its midpoint and end point. The maximum displacement sensitivity achieved was (3 +/- 0.1) pm/mm for end point displacement, and a temperature sensitivity of (30 +/- 1) pm/°C was also attained. In the case of vibration measurements it was possible to obtain a 10.23Hz-low frequency oscillation.

  5. Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems

    DEFF Research Database (Denmark)

    Kim, H.; In, C.; Yoon, Gil Ho

    2005-01-01

    In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating......, dielectric constant, and dielectric loss. Tip deflections of 12 mu m at 5 V are measured, which agreed well with the predicted value. The 18 mu l/s leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed....

  6. Design optimization and fatigue testing of an electronically-driven mechanically-resonant cantilever spring mechanism

    International Nuclear Information System (INIS)

    Kheng, Lim Boon; Kean, Koay Loke; Gitano-Briggs, Horizon

    2010-01-01

    A light scanning device consisting of an electronically-driven mechanically-resonant cantilever spring-mirror system has been developed for innovative lighting applications. The repeated flexing of the cantilever spring during operation can lead to premature fatigue failure. A model was created to optimize the spring design. The optimized spring design can reduce stress by approximately one-third from the initial design. Fatigue testing showed that the optimized spring design can operate continuously for over 1 month without failure. Analysis of failures indicates surface cracks near the root of the spring are responsible for the failures.

  7. Cantilever-based sensor with integrated optical read-out using single mode waveguides

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its...... surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication...

  8. Environmental sensors based on micromachined cantilevers with integrated read-out

    DEFF Research Database (Denmark)

    Boisen, Anja; Thaysen, Jacob; Jensenius, Henriette

    2000-01-01

    -out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C......An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read...

  9. Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

    International Nuclear Information System (INIS)

    Ghatnekar-Nilsson, S; Graham, J; Hull, R; Montelius, L

    2006-01-01

    We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Δf/f 0 for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection

  10. Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems

    Directory of Open Access Journals (Sweden)

    Nadine Noeth

    2013-12-01

    Full Text Available For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN and with different thicknesses. The integration of arrays of holes with different hole size and number of holes allows the modification of device sensitivity, theoretical detection limit and measurement range. For an average flow in the microliter range, the cantilever deflection is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external pumps connected to the microfluidic system.

  11. Study of the reduced indium oxide (In2O3)/mc-silicon:hydrogen interface by means of factor analysis

    NARCIS (Netherlands)

    Nijs, de J.M.M.; Aarts, R.G.K.M.

    1991-01-01

    The overgrowth of an In2O3 layer by a µc-Si:H layer, deposited by means of plasma-enhanced chemical vapour deposition, will inflict the reduction of the In2O3. AES is combination with Ar+ depth profiling is used for the study of the interfacial deterioration that takes place. The results of a factor

  12. Incidence, risk factors, and clinical characteristics of unexplained visual loss after intraocular silicone oil for macula-on retinal detachment

    NARCIS (Netherlands)

    Scheerlinck, Laura M.; Schellekens, Peter A.; Liem, Albert T.; Steijns, Daan; van Leeuwen, R

    2016-01-01

    Purpose: To investigate the incidence, risk factors, and clinical characteristics of unexplained visual loss after macula-on rhegmatogenous retinal detachment (RRD). Methods: Retrospective cohort of patients with primary macula-on rhegmatogenous retinal detachment treated by vitrectomy with gas or

  13. Buried MoO x/Ag Electrode Enables High-Efficiency Organic/Silicon Heterojunction Solar Cells with a High Fill Factor.

    Science.gov (United States)

    Xia, Zhouhui; Gao, Peng; Sun, Teng; Wu, Haihua; Tan, Yeshu; Song, Tao; Lee, Shuit-Tong; Sun, Baoquan

    2018-04-25

    Silicon (Si)/organic heterojunction solar cells based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) and n-type Si have attracted wide interests because they promise cost-effectiveness and high-efficiency. However, the limited conductivity of PEDOT:PSS leads to an inefficient hole transport efficiency for the heterojunction device. Therefore, a high dense top-contact metal grid electrode is required to assure the efficient charge collection efficiency. Unfortunately, the large metal grid coverage ratio electrode would lead to undesirable optical loss. Here, we develop a strategy to balance PEDOT:PSS conductivity and grid optical transmittance via a buried molybdenum oxide/silver grid electrode. In addition, the grid electrode coverage ratio is optimized to reduce its light shading effect. The buried electrode dramatically reduces the device series resistance, which leads to a higher fill factor (FF). With the optimized buried electrode, a record FF of 80% is achieved for flat Si/PEDOT:PSS heterojunction devices. With further enhancement adhesion between the PEDOT:PSS film and Si substrate by a chemical cross-linkable silance, a power conversion efficiency of 16.3% for organic/textured Si heterojunction devices is achieved. Our results provide a path to overcome the inferior organic semiconductor property to enhance the organic/Si heterojunction solar cell.

  14. Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor

    DEFF Research Database (Denmark)

    Gammelgaard, Lauge; Rasmussen, Peter Andreas; Calleja, M.

    2006-01-01

    We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated...

  15. Energy harvesting from the interaction of a Lamb dipole with a flexible cantilever

    Science.gov (United States)

    Tang, Hui; Wang, Chenglei

    2017-11-01

    Energy harvesting from interactions of coherent flow structures with flexible solid structures can be used for powering miniature electronic devices. Although effective, the fundamental mechanism of such an energy extraction process has not been fully understood. Therefore, this study aims to provide more physical insights into this problem. The coherent flow structure is represented by a Lamb dipole, and the solid structure is assumed as a two-dimensional flexible cantilever. The cantilever is placed along the propagation direction of the dipole, with its fixed end initially towards or away from the dipole and its lateral distance from the dipole center varied. As the dipole passes through the cantilever, the latter can extract energy from the former through effective interactions. Such a two-dimensional fluid-structure interaction problem is numerically studied at a low Reynolds number of 200 using a lattice Boltzmann method (LBM) based numerical framework. The simulation results reveal that the flexible cantilever with a moderate stiffness is more beneficial to the energy harvesting, and it can scavenge more energy from the ambient vortices when its fixed end is initially away from the dipole with a relatively small lateral distance. The authors gratefully acknowledge the financial support for this study from the Research Grants Council of Hong Kong under General Research Fund (Project No. PolyU 152493/16E).

  16. Development and characterization of electrochemical cantilever sensor for bio/chemical sensing applications

    DEFF Research Database (Denmark)

    Quan, Xueling; Fischer, Lee MacKenzie; Boisen, Anja

    2011-01-01

    We report the improvements made to our previously developed electrochemical cantilever (EC) sensor, where nanoporous gold material is employed as working electrodes in microcantilever arrays, while combined counter-reference electrodes are integrated on the chip. For a surface stress change of 1m...

  17. Investigation of cleaning and regeneration methods for reliable construction of DNA cantilever biosensors

    DEFF Research Database (Denmark)

    Quan, Xueling; Yi, Sun; Heiskanen, Arto

    to clean and regenerate the sensing surface of cantilever biosensors. Perchloric acid potential sweep, potassium hydroxide-hydrogen peroxide, and piranha cleaning are investigated here. Peak-current potential differences from cyclic voltammetry, X-ray photo-electron spectroscopy and fluorescence detection...

  18. Analysis of dynamic cantilever behavior in tapping mode atomic force microscopy.

    Science.gov (United States)

    Deng, Wenqi; Zhang, Guang-Ming; Murphy, Mark F; Lilley, Francis; Harvey, David M; Burton, David R

    2015-10-01

    Tapping mode atomic force microscopy (AFM) provides phase images in addition to height and amplitude images. Although the behavior of tapping mode AFM has been investigated using mathematical modeling, comprehensive understanding of the behavior of tapping mode AFM still poses a significant challenge to the AFM community, involving issues such as the correct interpretation of the phase images. In this paper, the cantilever's dynamic behavior in tapping mode AFM is studied through a three dimensional finite element method. The cantilever's dynamic displacement responses are firstly obtained via simulation under different tip-sample separations, and for different tip-sample interaction forces, such as elastic force, adhesion force, viscosity force, and the van der Waals force, which correspond to the cantilever's action upon various different representative computer-generated test samples. Simulated results show that the dynamic cantilever displacement response can be divided into three zones: a free vibration zone, a transition zone, and a contact vibration zone. Phase trajectory, phase shift, transition time, pseudo stable amplitude, and frequency changes are then analyzed from the dynamic displacement responses that are obtained. Finally, experiments are carried out on a real AFM system to support the findings of the simulations. © 2015 Wiley Periodicals, Inc.

  19. Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers.

    Science.gov (United States)

    An, Kun; Jin, Xuechen; Meng, Jiang; Li, Xiao; Ren, Yifeng

    2018-05-13

    Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb 0.97 La 0.02 )(Zr 0.95 Ti 0.05 )O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

  20. An Experimental Study of the Local Parameters of a Damaged Cantilever

    DEFF Research Database (Denmark)

    Rytter, A.; Brincker, Rune; Kirkegaard, Poul Henning

    of results from experimental tests with six hollow section steel cantilevers containing a fatigue crack introduced from a narrow laser cut slot. The modal parameters have been identified for different size and location of a crack. The modal parameters have been estimated by mean of frequency domain and time...

  1. An Experimental Study of the Modal Parameters of a Damaged Cantilever

    DEFF Research Database (Denmark)

    Rytter, A.; Brincker, Rune; Kirkegaard, Poul Henning

    of results from experimental tests with six hollow section steel cantilevers containing a fatigue crack introduced from a narrow laser cut slot. The modal parameters have been identified for different size and location of a crack. The modal parameters have been estimated by mean of frequency domain and time...

  2. Determining shear modulus of thin wood composite materials using a cantilever beam vibration method

    Science.gov (United States)

    Cheng Guan; Houjiang Zhang; John F. Hunt; Haicheng Yan

    2016-01-01

    Shear modulus (G) of thin wood composite materials is one of several important indicators that characterizes mechanical properties. However, there is not an easy method to obtain this value. This study presents the use of a newly developed cantilever beam free vibration test apparatus to detect in-plane G of thin wood composite...

  3. Multifrequency Piezoelectric Energy Harvester Based on Polygon-Shaped Cantilever Array

    Directory of Open Access Journals (Sweden)

    Dalius Mažeika

    2018-01-01

    Full Text Available This paper focuses on numerical and experimental investigations of a novel design piezoelectric energy harvester. Investigated harvester is based on polygon-shaped cantilever array and employs multifrequency operating principle. It consists of eight cantilevers with irregular design of cross-sectional area. Cantilevers are connected to each other by specific angle to form polygon-shaped structure. Moreover, seven seismic masses with additional lever arms are added in order to create additional rotation moment. Numerical investigation showed that piezoelectric polygon-shaped energy harvester has five natural frequencies in the frequency range from 10 Hz to 240 Hz, where the first and the second bending modes of the cantilevers are dominating. Maximum output voltage density and energy density equal to 50.03 mV/mm3 and 604 μJ/mm3, respectively, were obtained during numerical simulation. Prototype of piezoelectric harvester was made and experimental investigation was performed. Experimental measurements of the electrical characteristics showed that maximum output voltage density, energy density, and output power are 37.5 mV/mm3, 815.16 μJ/mm3, and 65.24 μW, respectively.

  4. Energy Harvesting & Recapture from Human Subjects: Dual-Stage MEMS Cantilever Energy Harvester

    Science.gov (United States)

    2015-03-01

    beam must be anchored to a thermally insulating layer that separates the cantilever from the substrate. Thermal 52 isolation is paramount because the...34Squeeze film air damping in MEMS," Sensors and Actuators A: Physical, vol. 136, pp. 3-27, 2007. 86 [12] Y. Arakawa, "Micro Seismic Power Generator

  5. Temperature effects in Au piezoresistors integrated in SU-8 cantilever chips

    DEFF Research Database (Denmark)

    Johansson, Alicia; Hansen, Ole; Hales, Jan Harry

    2006-01-01

    We present a cantilever-based biosensor chip made for the detection of biochemical molecules. The device is fabricated entirely in the photosensitive polymer SU-8 except for integrated piezoresistors made of Au. The integrated piezoresistors are used to monitor the surface stress changes due to b...

  6. Geochemistry of silicon isotopes

    Energy Technology Data Exchange (ETDEWEB)

    Ding, Tiping; Li, Yanhe; Gao, Jianfei; Hu, Bin [Chinese Academy of Geological Science, Beijing (China). Inst. of Mineral Resources; Jiang, Shaoyong [China Univ. of Geosciences, Wuhan (China).

    2018-04-01

    Silicon is one of the most abundant elements in the Earth and silicon isotope geochemistry is important in identifying the silicon source for various geological bodies and in studying the behavior of silicon in different geological processes. This book starts with an introduction on the development of silicon isotope geochemistry. Various analytical methods are described and compared with each other in detail. The mechanisms of silicon isotope fractionation are discussed, and silicon isotope distributions in various extraterrestrial and terrestrial reservoirs are updated. Besides, the applications of silicon isotopes in several important fields are presented.

  7. Various methods of determining the natural frequencies and damping of composite cantilever plates. 3. The Ritz method

    Science.gov (United States)

    Ekel'chik, V. S.; Ryabov, V. M.

    1997-03-01

    The Ritz method was used to determine the frequencies and forms of free vibrations of rectangular cantilever plates made of anisotropic laminated composites. Orthogonal Jacobi and Legendre polynomials were used as coordinate functions. The results of the calculations are in good agreement with the published experimental and calculated data of other authors for plates made of boron and carbon fiber reinforced plastics with different angles of reinforcement of unidirectional layers and different sequence of placing the layers, and also of isotropic plates. The dissipative characteristics in vibrations were determined on the basis of the concept of complex moduli. The solution of the frequency equation with complex coefficients yields a complex frequency; the loss factors are determined from the ratio of the imaginary component of the complex frequency to the real component. For plates of unidirectionally reinforced carbon fiber plastic with different relative length a detailed analysis of the influence of the angle of reinforcement on the interaction and frequency transformation and on the loss factor was carried out. The article shows that the loss factor of a plate depends substantially on the type of vibration mode: bending or torsional. It also examines the asymptotics of the loss factors of plates when their length is increased, and it notes that the binomial model of deformation leads to a noticeable error in the calculation of the loss factor of long plates when the angle of reinforcement lies in the range 20°<φ<70°.

  8. Continuum modeling of post-implantation damage and the effective plus factor in crystalline silicon at room temperature

    International Nuclear Information System (INIS)

    Chan, H.Y.; Srinivasan, M.P.; Benistant, F.; Mok, K.R.; Chan, Lap; Jin, H.M.

    2006-01-01

    The role of computer simulation in predicting intrinsic diffusion effects is amplified with the shrinkage of MOS devices. In this work, post-implant damage distributions are obtained from atomistic Monte Carlo (MC) simulations. Based on diffusion-limiting kinetics, the evolution of the damage at room temperature with time is studied. It is shown that evolution of the point defects follow the Ostwald ripening process, where larger defect clusters grow at the expense of smaller ones. A qualitative study of the effective plus factor is also conducted, taking into account various clustering and recombination processes. Clustering is found to significantly affect the remaining amount of damage, which in turn affects subsequent diffusion processes

  9. A wall shear stress sensor using a pair of sidewall doped cantilevers

    Science.gov (United States)

    Nguyen, Thanh-Vinh; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi; Shimoyama, Isao

    2017-07-01

    In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µm thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µm  ×  400 µm plate supported by two 150 µm long, 4 µm wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  -10 and 10 m s-1 is demonstrated.

  10. A wall shear stress sensor using a pair of sidewall doped cantilevers

    International Nuclear Information System (INIS)

    Nguyen, Thanh-Vinh; Shimoyama, Isao; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi

    2017-01-01

    In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µ m thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µ m  ×  400 µ m plate supported by two 150 µ m long, 4 µ m wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  −10 and 10 m s −1 is demonstrated. (paper)

  11. Experimental Determination of Bending Resonances of Millimeter Size PVF2 Cantilevers

    Directory of Open Access Journals (Sweden)

    David F. Thompson

    2003-07-01

    Full Text Available The polymer piezoelectric polvinylidene fluoride has found widespread use in sensors and actuators. The bending mode of piezoelectricity offers very high sensitivities and low mechanical input impedance, but has not been studied in as much detail for sensor applications. We report the dynamic electromechanical properties of millimeter size cantilevers made from electroded films of PVF2. All devices tested had a single polymer layer. Several resonances are found below 1 kHz and the experimentally observed resonance frequency dependence on cantilever thickness and length are seen to agree well with published models which take the properties of the electrodes into account. It is found that bending resonances are also modulated by the width of the cantilever. Therefore, though the length and thickness control the resonance frequency most strongly, the actual realized value can be fine-tuned by changing cantilever width and the electrode material and its thickness. Further, all resonances display high piezoelectric coupling coefficients (keff, ranging between 0.2 - 0.35. The data presented here will be extremely useful in the design of sensors and actuators for a number of applications, since the combination of millimeter size scales and high piezoelectric sensitivities in the low audio range can be realized with this marriage of polymeric materials and cantilever geometries. Such an array of sensors can be used in cochlear implant applications, and when integrated with a resonance interrogation circuit can be used for the detection of low frequency vibrations of large structures. If appropriate mass/elasticity sensitive layers are coated on the electrodes, such a sensor can be used for the detection of a wide range of chemicals and biochemicals.

  12. A comparative finite elemental analysis of glass abutment supported and unsupported cantilever fixed partial denture.

    Science.gov (United States)

    Ramakrishaniah, Ravikumar; Al Kheraif, Abdulaziz A; Elsharawy, Mohamed A; Alsaleh, Ayman K; Ismail Mohamed, Karem M; Rehman, Ihtesham Ur

    2015-05-01

    The purpose of this study was to investigate and compare the load distribution and displacement of cantilever prostheses with and without glass abutment by three dimensional finite element analysis. Micro-computed tomography was used to study the relationship between the glass abutment and the ridge. The external surface of the maxilla was scanned, and a simplified finite element model was constructed. The ZX-27 glass abutment and the maxillary first and second premolars were created and modified. The solid model of the three-unit cantilever fixed partial denture was scanned, and the fitting surface was modified with reference to the created abutments using the 3D CAD system. The finite element analysis was completed in ANSYS. The fit and total gap volume between the glass abutment and dental model were determined by Skyscan 1173 high-energy spiral micro-CT scan. The results of the finite element analysis in this study showed that the cantilever prosthesis supported by the glass abutment demonstrated significantly less stress on the terminal abutment and overall deformation of the prosthesis under vertical and oblique load. Micro-computed tomography determined a gap volume of 6.74162 mm(3). By contacting the mucosa, glass abutments transfer some amount of masticatory load to the residual alveolar ridge, thereby preventing damage to the periodontal microstructures of the terminal abutment. The passive contact of the glass abutment with the mucosa not only preserves the health of the mucosa covering the ridge but also permits easy cleaning. It is possible to increase the success rate of cantilever FPDs by supporting the cantilevered pontic with glass abutments. Copyright © 2015 Academy of Dental Materials. Published by Elsevier Ltd. All rights reserved.

  13. Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Johnson, Raegan Lynn [Iowa State Univ., Ames, IA (United States)

    2005-01-01

    In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the cantilever beam. This design not only improves the speed of imaging because the piezoelectric film replaces the piezo-tube as an actuator, but the film can also act as a sensor. In addition, the piezoelectric film can excite the cantilever beam near its resonance frequency. This project aims to fabricate piezoelectric microcantilevers for use in the AFM. Prior to fabricating the cantilevers and also part of this project, a systematic study was performed to examine the effects of deposition conditions on the quality of piezoelectric ZnO thin films deposited by RF sputtering. These results will be presented. The deposition parameters that produced the highest quality ZnO film were used in the fabrication of the piezoelectric cantilevers. Unfortunately, the fabricated cantilevers warped due to the intrinsic stress of the ZnO film and were therefore not usable in the AFM. The complete fabrication process will be detailed, the results will be discussed and reasons for the warping will be examined.

  14. An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations

    International Nuclear Information System (INIS)

    Erturk, A; Inman, D J

    2009-01-01

    Piezoelectric transduction has received great attention for vibration-to-electric energy conversion over the last five years. A typical piezoelectric energy harvester is a unimorph or a bimorph cantilever located on a vibrating host structure, to generate electrical energy from base excitations. Several authors have investigated modeling of cantilevered piezoelectric energy harvesters under base excitation. The existing mathematical modeling approaches range from elementary single-degree-of-freedom models to approximate distributed parameter solutions in the sense of Rayleigh–Ritz discretization as well as analytical solution attempts with certain simplifications. Recently, the authors have presented the closed-form analytical solution for a unimorph cantilever under base excitation based on the Euler–Bernoulli beam assumptions. In this paper, the analytical solution is applied to bimorph cantilever configurations with series and parallel connections of piezoceramic layers. The base excitation is assumed to be translation in the transverse direction with a superimposed small rotation. The closed-form steady state response expressions are obtained for harmonic excitations at arbitrary frequencies, which are then reduced to simple but accurate single-mode expressions for modal excitations. The electromechanical frequency response functions (FRFs) that relate the voltage output and vibration response to translational and rotational base accelerations are identified from the multi-mode and single-mode solutions. Experimental validation of the single-mode coupled voltage output and vibration response expressions is presented for a bimorph cantilever with a tip mass. It is observed that the closed-form single-mode FRFs obtained from the analytical solution can successfully predict the coupled system dynamics for a wide range of electrical load resistance. The performance of the bimorph device is analyzed extensively for the short circuit and open circuit resonance

  15. Local photoconductivity of microcrystalline silicon thin films measured by conductive atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Ledinsky, Martin; Fejfar, Antonin; Vetushka, Aliaksei; Stuchlik, Jiri; Rezek, Bohuslav; Kocka, Jan [Institute of Physics, Academy of Sciences of the Czech Republic, v.v.i. Cukrovarnicka 10, 162 00 Praha 6 (Czech Republic)

    2011-11-15

    Local currents measured under standard conductive atomic force microscopy (C-AFM) conditions on microcrystalline silicon ({mu}c-Si:H) thin films were studied. It was shown that the AFM detection diode illuminating the AFM cantilever (see the figure on the right side) 100 x enhanced the current flows through the photosensitive {mu}c-Si:H layer. The local current map and current-voltage characteristics were measured under dark conditions. This study enables mapping of both the dark current and photocurrent. C-AFM cantilever illuminated by the detection diode during measurement on {mu}c-Si:H thin film. (copyright 2011 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  16. Micro-/nanosized cantilever beams and mass sensors under applied axial tensile/compressive force vibrating in vacuum and viscous fluid

    Directory of Open Access Journals (Sweden)

    Ivo Stachiv

    2015-11-01

    Full Text Available Vibrating micro-/nanosized cantilever beams under an applied axial force are the key components of various devices used in nanotechnology. In this study, we perform a complete theoretical investigation of the cantilever beams under an arbitrary value of the axial force vibrating in a specific environment such as vacuum, air or viscous fluid. Based on the results easy accessible expressions enabling one the fast and highly accurate estimations of changes in the Q-factor and resonant frequencies of beam oscillating in viscous fluid caused by the applied axial force are derived and analyzed. It has been also shown that for beam-to-string and string vibrational regimes the mode shape starts to significantly deviate from the one known for a beam without axial force. Moreover, a linear dependency of the vibrational amplitude in resonance on the dimensionless tension parameter has been found. We revealed that only a large axial force, i.e. the string vibrational regime, significantly improves the Q-factor of beams submerged in fluid, while an increase of the axial force in beam and beam-to-string transition regimes has a negligibly small impact on the Q-factor enhancement. Experiments carried out on the carbon nanotubes and nanowires are in a good agreement with present theoretical predictions.

  17. Reduced thermal conductivity of isotopically modulated silicon multilayer structures

    DEFF Research Database (Denmark)

    Bracht, H.; Wehmeier, N.; Eon, S.

    2012-01-01

    We report measurements of the thermal conductivity of isotopically modulated silicon that consists of alternating layers of highly enriched silicon-28 and silicon-29. A reduced thermal conductivity of the isotopically modulated silicon compared to natural silicon was measured by means of time......-resolved x-ray scattering. Comparison of the experimental results to numerical solutions of the corresponding heat diffusion equations reveals a factor of three lower thermal conductivity of the isotope structure compared to natural Si. Our results demonstrate that the thermal conductivity of silicon can...

  18. Note: Determination of torsional spring constant of atomic force microscopy cantilevers: Combining normal spring constant and classical beam theory

    DEFF Research Database (Denmark)

    Álvarez-Asencio, R.; Thormann, Esben; Rutland, M.W.

    2013-01-01

    A technique has been developed for the calculation of torsional spring constants for AFM cantilevers based on the combination of the normal spring constant and plate/beam theory. It is easy to apply and allow the determination of torsional constants for stiff cantilevers where the thermal power s...... spectrum is difficult to obtain due to the high resonance frequency and low signal/noise ratio. The applicability is shown to be general and this simple approach can thus be used to obtain torsional constants for any beam shaped cantilever. © 2013 AIP Publishing LLC....

  19. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

    OpenAIRE

    Anja Boisen; Mogens Havsteen-Jakobsen; Gabriela Blagoi; Daniel Haefliger; Søren Dohn; Alicia Johansson; Michael Lillemose; Stephan Keller; Maria Nordström

    2008-01-01

    Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young's modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the bu...

  20. Study on Vibration of Heavy-Precision Robot Cantilever Based on Time-varying Glowworm Swarm Optimization Algorithm

    Science.gov (United States)

    Luo, T. H.; Liang, S.; Miao, C. B.

    2017-12-01

    A method of terminal vibration analysis based on Time-varying Glowworm Swarm Optimization algorithm is proposed in order to solve the problem that terminal vibration of the large flexible robot cantilever under heavy load precision.The robot cantilever of the ballastless track is used as the research target and the natural parameters of the flexible cantilever such as the natural frequency, the load impact and the axial deformation is considered. Taking into account the change of the minimum distance between the glowworm individuals, the terminal vibration response and adaptability could meet. According to the Boltzmann selection mechanism, the dynamic parameters in the motion simulation process are determined, while the influence of the natural frequency and the load impact as well as the axial deformation on the terminal vibration is studied. The method is effective and stable, which is of great theoretical basis for the study of vibration control of flexible cantilever terminal.

  1. Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

    Energy Technology Data Exchange (ETDEWEB)

    Pandey, Vibhuti Bhushan; Parashar, Sandeep Kumar, E-mail: skparashar@rtu.ac.in [Department of Mechanical Engineering, Rajasthan Technical University, Kota (India)

    2016-04-13

    In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d{sub 15} has much higher value than coupling coefficients d{sub 31} and d{sub 33}, hence in the present work the micro cantilever beam actuated by d{sub 15} effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.

  2. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

    Directory of Open Access Journals (Sweden)

    Anja Boisen

    2008-03-01

    Full Text Available Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.

  3. Analysis the effect of different geometries of AFM's cantilever on the dynamic behavior and the critical forces of three-dimensional manipulation

    Energy Technology Data Exchange (ETDEWEB)

    Korayem, Moharam Habibnejad, E-mail: hkorayem@iust.ac.ir; Saraie, Maniya B.; Saraee, Mahdieh B.

    2017-04-15

    An important challenge when using an atomic force microscope (AFM) is to be able to control the force exerted by the AFM for performing various tasks. Nevertheless, the exerted force is proportional to the deflection of the AFM cantilever, which itself is affected by a cantilever's stiffness coefficient. Many papers have been published so far on the methods of obtaining the stiffness coefficients of AFM cantilevers in 2D; however, a comprehensive model is yet to be presented on 3D cantilever motion. The discrepancies between the equations of the 2D and 3D analysis are due to the number and direction of forces and moments that are applied to a cantilever. Moreover, in the 3D analysis, contrary to the 2D analysis, due to the interaction between the forces and moments applied on a cantilever, its stiffness values cannot be separately expressed for each direction; and instead, a stiffness matrix should be used to correctly derive the relevant equations. In this paper, 3D stiffness coefficient matrices have been obtained for three common cantilever geometries including the rectangular, V-shape and dagger-shape cantilevers. The obtained equations are validated by two methods. In the first approach, the Finite Element Method is combined with the cantilever deflection values computed by using the obtained stiffness matrices. In the second approach, by reducing the problem's parameters, the forces applied on a cantilever along different directions are compared with each other in 2D and 3D cases. Then the 3D manipulation of a stiff nanoparticle is modeled and simulated by using the stiffness matrices obtained for the three cantilever geometries. The obtained results indicate that during the manipulation process, the dagger-shaped and rectangular cantilevers exert the maximum and minimum amounts of forces on the stiff nanoparticle, respectively. Also, by examining the effects of different probe tip geometries, it is realized that a probe tip of cylindrical geometry

  4. Analysis the effect of different geometries of AFM's cantilever on the dynamic behavior and the critical forces of three-dimensional manipulation

    International Nuclear Information System (INIS)

    Korayem, Moharam Habibnejad; Saraie, Maniya B.; Saraee, Mahdieh B.

    2017-01-01

    An important challenge when using an atomic force microscope (AFM) is to be able to control the force exerted by the AFM for performing various tasks. Nevertheless, the exerted force is proportional to the deflection of the AFM cantilever, which itself is affected by a cantilever's stiffness coefficient. Many papers have been published so far on the methods of obtaining the stiffness coefficients of AFM cantilevers in 2D; however, a comprehensive model is yet to be presented on 3D cantilever motion. The discrepancies between the equations of the 2D and 3D analysis are due to the number and direction of forces and moments that are applied to a cantilever. Moreover, in the 3D analysis, contrary to the 2D analysis, due to the interaction between the forces and moments applied on a cantilever, its stiffness values cannot be separately expressed for each direction; and instead, a stiffness matrix should be used to correctly derive the relevant equations. In this paper, 3D stiffness coefficient matrices have been obtained for three common cantilever geometries including the rectangular, V-shape and dagger-shape cantilevers. The obtained equations are validated by two methods. In the first approach, the Finite Element Method is combined with the cantilever deflection values computed by using the obtained stiffness matrices. In the second approach, by reducing the problem's parameters, the forces applied on a cantilever along different directions are compared with each other in 2D and 3D cases. Then the 3D manipulation of a stiff nanoparticle is modeled and simulated by using the stiffness matrices obtained for the three cantilever geometries. The obtained results indicate that during the manipulation process, the dagger-shaped and rectangular cantilevers exert the maximum and minimum amounts of forces on the stiff nanoparticle, respectively. Also, by examining the effects of different probe tip geometries, it is realized that a probe tip of cylindrical geometry exerts the

  5. Buried oxide layer in silicon

    Science.gov (United States)

    Sadana, Devendra Kumar; Holland, Orin Wayne

    2001-01-01

    A process for forming Silicon-On-Insulator is described incorporating the steps of ion implantation of oxygen into a silicon substrate at elevated temperature, ion implanting oxygen at a temperature below 200.degree. C. at a lower dose to form an amorphous silicon layer, and annealing steps to form a mixture of defective single crystal silicon and polycrystalline silicon or polycrystalline silicon alone and then silicon oxide from the amorphous silicon layer to form a continuous silicon oxide layer below the surface of the silicon substrate to provide an isolated superficial layer of silicon. The invention overcomes the problem of buried isolated islands of silicon oxide forming a discontinuous buried oxide layer.

  6. Giant piezoresistance of p-type nano-thick silicon induced by interface electron trapping instead of 2D quantum confinement

    International Nuclear Information System (INIS)

    Yang Yongliang; Li Xinxin

    2011-01-01

    The p-type silicon giant piezoresistive coefficient is measured in top-down fabricated nano-thickness single-crystalline-silicon strain-gauge resistors with a macro-cantilever bending experiment. For relatively thicker samples, the variation of piezoresistive coefficient in terms of silicon thickness obeys the reported 2D quantum confinement effect. For ultra-thin samples, however, the variation deviates from the quantum-effect prediction but increases the value by at least one order of magnitude (compared to the conventional piezoresistance of bulk silicon) and the value can change its sign (e.g. from positive to negative). A stress-enhanced Si/SiO 2 interface electron-trapping effect model is proposed to explain the 'abnormal' giant piezoresistance that should be originated from the carrier-concentration change effect instead of the conventional equivalent mobility change effect for bulk silicon piezoresistors. An interface state modification experiment gives preliminary proof of our analysis.

  7. Silicon quantum dots: surface matters

    Czech Academy of Sciences Publication Activity Database

    Dohnalová, K.; Gregorkiewicz, T.; Kůsová, Kateřina

    2014-01-01

    Roč. 26, č. 17 (2014), 1-28 ISSN 0953-8984 R&D Projects: GA ČR GPP204/12/P235 Institutional support: RVO:68378271 Keywords : silicon quantum dots * quantum dot * surface chemistry * quantum confinement Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 2.346, year: 2014

  8. A Quad-Cantilevered Plate micro-sensor for intracranial pressure measurement.

    Science.gov (United States)

    Lalkov, Vasko; Qasaimeh, Mohammad A

    2017-07-01

    This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.

  9. Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

    International Nuclear Information System (INIS)

    Wehrmeister, Jana; Fuss, Achim; Saurenbach, Frank; Berger, Ruediger; Helm, Mark

    2007-01-01

    The increasing use of micromechanical cantilevers in sensing applications causes a need for reliable readout techniques of micromechanical cantilever sensor (MCS) bending. Current optical beam deflection techniques suffer from drawbacks such as artifacts due to changes in the refraction index upon exchange of media. Here, an adaptation of the Fabry-Perot interferometer is presented that allows simultaneous determination of MCS bending and changes in the refraction index of media. Calibration of the instrument with liquids of known refraction index provides an avenue to direct measurement of bending with nanometer precision. Versatile construction of flow cells in combination with alignment features for substrate chips allows simultaneous measurement of two MCS situated either on the same, or on two different support chips. The performance of the instrument is demonstrate in several sensing applications, including adsorption experiments of alkanethioles on MCS gold surfaces, and measurement of humidity changes in air

  10. Clustering mechanism of ethanol-water mixtures investigated with photothermal microfluidic cantilever deflection spectroscopy

    Science.gov (United States)

    Ghoraishi, M. S.; Hawk, J. E.; Phani, Arindam; Khan, M. F.; Thundat, T.

    2016-04-01

    The infrared-active (IR) vibrational mode of ethanol (EtOH) associated with the asymmetrical stretching of the C-C-O bond in pico-liter volumes of EtOH-water binary mixtures is calorimetrically measured using photothermal microfluidic cantilever deflection spectroscopy (PMCDS). IR absorption by the confined liquid results in wavelength dependent cantilever deflections, thus providing a complementary response to IR absorption revealing a complex dipole moment dependence on mixture concentration. Solvent-induced blue shifts of the C-C-O asymmetric vibrational stretch for both anti and gauche conformers of EtOH were precisely monitored for EtOH concentrations ranging from 20-100% w/w. Variations in IR absorption peak maxima show an inverse dependence on induced EtOH dipole moment (μ) and is attributed to the complex clustering mechanism of EtOH-water mixtures.

  11. Precise mass determination of single cell with cantilever-based microbiosensor system.

    Directory of Open Access Journals (Sweden)

    Bogdan Łabędź

    Full Text Available Having determined the mass of a single cell of brewer yeast Saccharomyces cerevisiae by means of a microcantilever-based biosensor Cantisens CSR-801 (Concentris, Basel, Switzerland, it was found that its dry mass is 47,65 ± 1,05 pg. Found to be crucial in this mass determination was the cell position along the length of the cantilever. Moreover, calculations including cells positions on the cantilever provide a threefold better degree of accuracy than those which assume uniform mass distribution. We have also examined the influence of storage time on the single cell mass. Our results show that after 6 months there is an increase in the average mass of a single yeast cell.

  12. Precise mass determination of single cell with cantilever-based microbiosensor system.

    Science.gov (United States)

    Łabędź, Bogdan; Wańczyk, Aleksandra; Rajfur, Zenon

    2017-01-01

    Having determined the mass of a single cell of brewer yeast Saccharomyces cerevisiae by means of a microcantilever-based biosensor Cantisens CSR-801 (Concentris, Basel, Switzerland), it was found that its dry mass is 47,65 ± 1,05 pg. Found to be crucial in this mass determination was the cell position along the length of the cantilever. Moreover, calculations including cells positions on the cantilever provide a threefold better degree of accuracy than those which assume uniform mass distribution. We have also examined the influence of storage time on the single cell mass. Our results show that after 6 months there is an increase in the average mass of a single yeast cell.

  13. Cantilever-based sensing: the origin of surface stress and optimization strategies

    International Nuclear Information System (INIS)

    Godin, Michel; Tabard-Cossa, Vincent; Miyahara, Yoichi; Grutter, Peter; Monga, Tanya; Bruce Lennox, R; Williams, P J; Beaulieu, L Y

    2010-01-01

    Many interactions drive the adsorption of molecules on surfaces, all of which can result in a measurable change in surface stress. This article compares the contributions of various possible interactions to the overall induced surface stress for cantilever-based sensing applications. The surface stress resulting from adsorption-induced changes in the electronic density of the underlying surface is up to 2-4 orders of magnitude larger than that resulting from intermolecular electrostatic or Lennard-Jones interactions. We reveal that the surface stress associated with the formation of high quality alkanethiol self-assembled monolayers on gold surfaces is independent of the molecular chain length, supporting our theoretical findings. This provides a foundation for the development of new strategies for increasing the sensitivity of cantilever-based sensors for various applications.

  14. Nonlinear mathematical modeling of vibrating motion of nanomechanical cantilever active probe

    Directory of Open Access Journals (Sweden)

    Reza Ghaderi

    Full Text Available Nonlinear vibration response of nanomechanical cantilever (NMC active probes in atomic force microscope (AFM application has been studied in the amplitude mode. Piezoelectric layer is placed piecewise and as an actuator on NMC. Continuous beam model has been chosen for analysis with regard to the geometric discontinuities of piezoelectric layer attachment and NMC's cross section. The force between the tip and the sample surface is modeled using Leonard-Jones potential. Assuming that cantilever is inclined to the sample surface, the effect of nonlinear force on NMC is considered as a shearing force and the concentrated bending moment is regarded at the end. Nonlinear frequency response of NMC is obtained close to the sample surface using the dynamic modeling. It is then become clear that the distance and angle of NMC, the probe length, and the geometric dimensions of piezoelectric layer can affect frequency response bending of the curve.

  15. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Wu, Meng; Mao, Haiyang; Li, Zhigang; Liu, Ruiwen; Ming, Anjie [Key laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academic of Sciences, Beijing 100029 (China); Ou, Yi; Ou, Wen [Key laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academic of Sciences, Beijing 100029 (China); Smart Sensor Engineering Center, Jiangsu R& D Center for Internet of Things, Wuxi 214315 (China)

    2015-07-15

    This article reports a compact wideband piezoelectric vibration energy harvester consisting of three proof masses and an asymmetric M-shaped cantilever. The M-shaped beam comprises a main beam and two folded and dimension varied auxiliary beams interconnected through the proof mass at the end of the main cantilever. Such an arrangement constitutes a three degree-of-freedom vibrating body, which can tune the resonant frequencies of its first three orders close enough to obtain a utility wide bandwidth. The finite element simulation results and the experimental results are well matched. The operation bandwidth comprises three adjacent voltage peaks on account of the frequency interval shortening mechanism. The result shows that the proposed piezoelectric energy harvester could be efficient and adaptive in practical vibration circumstance based on multiple resonant modes.

  16. Experimental characterization of cantilever-type piezoelectric generator operating at resonance for vibration energy harvesting

    Energy Technology Data Exchange (ETDEWEB)

    Montanini, Roberto, E-mail: rmontanini@unime.it; Quattrocchi, Antonino, E-mail: aquattrocchi@unime.it [University of Messina, Dept. of Engineering, Contrada di Dio, Messina (Italy)

    2016-06-28

    A cantilever-type resonant piezoelectric generator (RPG) has been designed by gluing a PZT patch working in d{sub 31} mode onto a glass fibre reinforced composite cantilever beam with a discrete mass applied on its free end. The electrical and dynamic behaviour of the RPG prototype has been investigated by carrying out laboratory tests aimed to assess the effect of definite design parameters, specifically the electric resistance load and the excitation frequency. Results showed that an optimum resistance load exists, at which power generation is maximized. Moreover, it has been showed that power generation is strongly influenced by the vibration frequency highlighting that, at resonance, output power can be increased by more than one order of magnitude. Possible applications include inertial resonant harvester for energy recovery from vibrating machines, sea waves or wind flux and self-powering of wireless sensor nodes.

  17. MODELLING AND OPTIMISATION OF A BIMORPH PIEZOELECTRIC CANTILEVER BEAM IN AN ENERGY HARVESTING APPLICATION

    Directory of Open Access Journals (Sweden)

    CHUNG KET THEIN

    2016-02-01

    Full Text Available Piezoelectric materials are excellent transducers in converting vibrational energy into electrical energy, and vibration-based piezoelectric generators are seen as an enabling technology for wireless sensor networks, especially in selfpowered devices. This paper proposes an alternative method for predicting the power output of a bimorph cantilever beam using a finite element method for both static and dynamic frequency analyses. Experiments are performed to validate the model and the simulation results. In addition, a novel approach is presented for optimising the structure of the bimorph cantilever beam, by which the power output is maximised and the structural volume is minimised simultaneously. Finally, the results of the optimised design are presented and compared with other designs.

  18. The output characteristic of cantilever-like tactile sensor based on the inverse magnetostrictive effect

    Directory of Open Access Journals (Sweden)

    Lili Wan

    2017-05-01

    Full Text Available The output characteristic model of a magnetostrictive cantilever-like tactile sensor has been founded based on the inverse-magnetostrictive effect, the flexure mode, and the Jiles-Atherton model. The magnetostrictive sensor has been designed and an output voltage is analyzed under the conditions of bias magnetic field, contact pressure and deflection of cantilever beam. The experiment has been performed to determine the relation among the induced output voltage, bias magnetic field, and pressure. It is found that the peak of the induced output voltage increases with an increasing pressure under the bias magnetic field of 4.8kA/m. The experimental result agrees well with the theoretical one and it means that the model can describe the relation among the induced output voltage, bias magnetic field, and pressure. The sensor with a Galfenol sheet may hold potentials in sample characterization and deformation predication in artificial intelligence area.

  19. Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

    Directory of Open Access Journals (Sweden)

    Francesc Torres

    2016-10-01

    Full Text Available Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm.

  20. High-speed force mapping on living cells with a small cantilever atomic force microscope

    International Nuclear Information System (INIS)

    Braunsmann, Christoph; Seifert, Jan; Rheinlaender, Johannes; Schäffer, Tilman E.

    2014-01-01

    The imaging speed of the wide-spread force mapping mode for quantitative mechanical measurements on soft samples in liquid with the atomic force microscope (AFM) is limited by the bandwidth of the z-scanner and viscous drag forces on the cantilever. Here, we applied high-speed, large scan-range atomic force microscopy and small cantilevers to increase the speed of force mapping by ≈10−100 times. This allowed resolving dynamic processes on living mouse embryonic fibroblasts. Cytoskeleton reorganization during cell locomotion, growth of individual cytoskeleton fibers, cell blebbing, and the formation of endocytic pits in the cell membrane were observed. Increasing the force curve rate from 2 to 300 Hz increased the measured apparent Young's modulus of the cells by about 10 times, which facilitated force mapping measurements at high speed

  1. High-speed force mapping on living cells with a small cantilever atomic force microscope

    Energy Technology Data Exchange (ETDEWEB)

    Braunsmann, Christoph; Seifert, Jan; Rheinlaender, Johannes; Schäffer, Tilman E., E-mail: Tilman.Schaeffer@uni-tuebingen [Institute of Applied Physics and LISA, University of Tübingen, Auf der Morgenstelle 10, 72076 Tübingen (Germany)

    2014-07-15

    The imaging speed of the wide-spread force mapping mode for quantitative mechanical measurements on soft samples in liquid with the atomic force microscope (AFM) is limited by the bandwidth of the z-scanner and viscous drag forces on the cantilever. Here, we applied high-speed, large scan-range atomic force microscopy and small cantilevers to increase the speed of force mapping by ≈10−100 times. This allowed resolving dynamic processes on living mouse embryonic fibroblasts. Cytoskeleton reorganization during cell locomotion, growth of individual cytoskeleton fibers, cell blebbing, and the formation of endocytic pits in the cell membrane were observed. Increasing the force curve rate from 2 to 300 Hz increased the measured apparent Young's modulus of the cells by about 10 times, which facilitated force mapping measurements at high speed.

  2. MEMS Tunneling Micro Thermometer Based onTip Deflection of Bimetallic Cantilever Beam

    Directory of Open Access Journals (Sweden)

    Samrand K. Nezhadian

    2007-10-01

    Full Text Available Micro-electro-mechanical (MEM technology promises to significantly reduce the size, weight and cost of a variety of sensor systems. In this article has been described a highly sensitive novel type of thermometer based on deflection of a “bimetallic” microbeam. The proposed thermometer converts the thermal changes of a cantilevered bimetallic beam of submillimeter size into an electrical signal through tunneling-current modulation. The governing thermo-mechanical equation of a bimetallic cantilever beam has been derived and solved analytically. The obtained results show that the proposed tunneling micro thermometer is very sensitive to temperature changes due to exponential increasing of tunneling current but because of small gap between metallic electrodes, measurable range of temperature changes is small.

  3. Approximations for Large Deflection of a Cantilever Beam under a Terminal Follower Force and Nonlinear Pendulum

    Directory of Open Access Journals (Sweden)

    H. Vázquez-Leal

    2013-01-01

    Full Text Available In theoretical mechanics field, solution methods for nonlinear differential equations are very important because many problems are modelled using such equations. In particular, large deflection of a cantilever beam under a terminal follower force and nonlinear pendulum problem can be described by the same nonlinear differential equation. Therefore, in this work, we propose some approximate solutions for both problems using nonlinearities distribution homotopy perturbation method, homotopy perturbation method, and combinations with Laplace-Padé posttreatment. We will show the high accuracy of the proposed cantilever solutions, which are in good agreement with other reported solutions. Finally, for the pendulum case, the proposed approximation was useful to predict, accurately, the period for an angle up to 179.99999999∘ yielding a relative error of 0.01222747.

  4. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever

    International Nuclear Information System (INIS)

    Wu, Meng; Mao, Haiyang; Li, Zhigang; Liu, Ruiwen; Ming, Anjie; Ou, Yi; Ou, Wen

    2015-01-01

    This article reports a compact wideband piezoelectric vibration energy harvester consisting of three proof masses and an asymmetric M-shaped cantilever. The M-shaped beam comprises a main beam and two folded and dimension varied auxiliary beams interconnected through the proof mass at the end of the main cantilever. Such an arrangement constitutes a three degree-of-freedom vibrating body, which can tune the resonant frequencies of its first three orders close enough to obtain a utility wide bandwidth. The finite element simulation results and the experimental results are well matched. The operation bandwidth comprises three adjacent voltage peaks on account of the frequency interval shortening mechanism. The result shows that the proposed piezoelectric energy harvester could be efficient and adaptive in practical vibration circumstance based on multiple resonant modes

  5. 〈c + a〉 Dislocations in deformed Ti–6Al–4V micro-cantilevers

    International Nuclear Information System (INIS)

    Ding, Rengen; Gong, Jicheng; Wilkinson, Angus J.; Jones, Ian P.

    2014-01-01

    Single α–β colony micro-cantilevers with an equilateral triangular cross-section and an apex at the bottom were machined from a polycrystalline commercial Ti–6Al–4V sample using a focused ion beam (FIB). Each cantilever contained several α lamellae separated by thin fillets of β. A nano-indenter was used to perform micro-bending tests (Ding et al., 2012) [1]. 〈c + a〉 Slip systems were selectively activated in the cantilevers by controlling the crystal direction along the micro-cantilever to be [0 0 0 1]. Specimens for transmission electron microscopy were prepared from the deformed micro-cantilevers using a dual-beam FIB. Bright field scanning transmission electron microscopy was used to investigate the processes of slip nucleation, propagation and transmission through the α/β interface. Dislocations initiate first near the bottom of the cantilever and subsequently from the top. Both sets of dislocations move inward toward the neutral axis. Planar pyramidal {101 ¯ 1} slip was observed at the top (tension) but cross-slip was observed at the bottom (compression). All the 〈c + a〉 slip systems are equally stressed, but only a limited number is activated. This is tentatively interpreted in terms of dislocation transmission through the β fillets

  6. Segmentation of a Vibro-Shock Cantilever-Type Piezoelectric Energy Harvester Operating in Higher Transverse Vibration Modes

    Directory of Open Access Journals (Sweden)

    Darius Zizys

    2015-12-01

    Full Text Available The piezoelectric transduction mechanism is a common vibration-to-electric energy harvesting approach. Piezoelectric energy harvesters are typically mounted on a vibrating host structure, whereby alternating voltage output is generated by a dynamic strain field. A design target in this case is to match the natural frequency of the harvester to the ambient excitation frequency for the device to operate in resonance mode, thus significantly increasing vibration amplitudes and, as a result, energy output. Other fundamental vibration modes have strain nodes, where the dynamic strain field changes sign in the direction of the cantilever length. The paper reports on a dimensionless numerical transient analysis of a cantilever of a constant cross-section and an optimally-shaped cantilever with the objective to accurately predict the position of a strain node. Total effective strain produced by both cantilevers segmented at the strain node is calculated via transient analysis and compared to the strain output produced by the cantilevers segmented at strain nodes obtained from modal analysis, demonstrating a 7% increase in energy output. Theoretical results were experimentally verified by using open-circuit voltage values measured for the cantilevers segmented at optimal and suboptimal segmentation lines.

  7. Discussion of the Improved Methods for Analyzing a Cantilever Beam Carrying a Tip-Mass under Base Excitation

    Directory of Open Access Journals (Sweden)

    Wang Hongjin

    2014-01-01

    Full Text Available Two improved analytical methods of calculations for natural frequencies and mode shapes of a uniform cantilever beam carrying a tip-mass under base excitation are presented based on forced vibration theory and the method of separation of variables, respectively. The cantilever model is simplified in detail by replacing the tip-mass with an equivalent inertial force and inertial moment acting at the free end of the cantilever based on D’Alembert’s principle. The concentrated equivalent inertial force and inertial moment are further represented as distributed loads using Dirac Delta Function. In this case, some typical natural frequencies and mode shapes of the cantilever model are calculated by the improved and unimproved analytical methods. The comparing results show that, after improvement, these two methods are in extremely good agreement with each other even the offset distance between the gravity center of the tip-mass and the attachment point is large. As further verification, the transient and steady displacement responses of the cantilever system under a sine base excitation are presented in which two improved methods are separately utilized. Finally, an experimental cantilever system is fabricated and the theoretical displacement responses are validated by the experimental measurements successfully.

  8. Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning.

    Science.gov (United States)

    Kan, Tetsuo; Matsumoto, Kiyoshi; Shimoyama, Isao

    2007-08-01

    Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-microm-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1 x 10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300 x 300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices.

  9. Chemical gas sensors based on functionalized self-actuated piezo-resistive cantilevers

    OpenAIRE

    Filenko, Denys

    2008-01-01

    Der Schwerpunkt dieser Arbeit liegt in der Anwendung funktionalisierter Mikrocantilever mit integrierter bimorpher Aktuation und piezo-resistiver Detektion als chemische Gassensoren für den schnellen, tragbaren und preisgünstigen Nachweis verschiedener flüchtiger Substanzen. Besondere Beachtung erfährt die Verbesserung der Cantilever-Arbeitsleistung durch den Betrieb in speziellen Modi. Weiterer Schwerpunkt liegt in der Untersuchung von spezifischen Sorptionswechselwirkungen und Anwendung von...

  10. Vibration energy harvesting using piezoelectric unimorph cantilevers with unequal piezoelectric and nonpiezoelectric lengths

    OpenAIRE

    Gao, Xiaotong; Shih, Wei-Heng; Shih, Wan Y.

    2010-01-01

    We have examined a piezoelectric unimorph cantilever (PUC) with unequal piezoelectric and nonpiezoelectric lengths for vibration energy harvesting theoretically by extending the analysis of a PUC with equal piezoelectric and nonpiezoelectric lengths. The theoretical approach was validated by experiments. A case study showed that for a fixed vibration frequency, the maximum open-circuit induced voltage which was important for charge storage for later use occurred with a PUC that had a nonpiezo...

  11. Force Measurement with a Piezoelectric Cantilever in a Scanning Force Microscope

    OpenAIRE

    Tansock, J.; Williams, C. C.

    1992-01-01

    Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conventional optical force-sensing methods can significantly modify the local carrier density. Additionally, the piezoelectric sensors are simple, provide good sensitivity to force, and can be batch fabricated. Our piezoelectric fo...

  12. Bleaching and stimulated recovery of dyes and of photo-cantilevers

    OpenAIRE

    Corbett, D.; Warner, M.

    2008-01-01

    We examine how intense optical beams can penetrate deeply into highly absorbing media by a non-linear, photo-bleaching process. The role of stimulated recovery to the dye ground state can be important and is delineated. This analysis of non-linear absorption processes is applicable in general to situations where chromophores are irradiated, for instance in biology. We examine the implications for the bending of cantilevers made of heavily dye-loaded nematic photo-solids, that is nematic glass...

  13. Improving Performance of Cantilevered Momentum Wheel Assemblies by Soft Suspension Support

    OpenAIRE

    Zhou, Weiyong; Li, Dongxu

    2013-01-01

    This paper focuses on improving the performance of the rigid support cantilevered momentum wheel assemblies (CMWA) by soft suspension support. A CMWA, supported by two angular contact ball bearings, was modeled as a Jeffcott rotor. The support stiffness, before and after in series with a linear soft suspension support, were simplified as two Duffing's type springs respectively. The result shows that the rigid support CMWA produces large disturbance force at the resonance speed range. The soft...

  14. Disimpaction of maxillary canines using temporary bone anchorage and cantilever springs.

    Science.gov (United States)

    Thebault, Benoit; Dutertre, Eric

    2015-03-01

    Impacted canines, particularly in the maxilla, are frequently encountered in orthodontic practice. Unfortunately, depending on their position, correction can often be difficult and sometimes unsuccessful. Thorough diagnosis along with orthodontic treatment combining bone-supported anchorage and cantilever springs appears, in our view, to offer the best solution to this tricky orthodontic challenge while limiting, as far as possible, the risk of failure. Copyright © 2015. Published by Elsevier Masson SAS.

  15. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Directory of Open Access Journals (Sweden)

    Yingxiang Liu

    Full Text Available BACKGROUND: Ultrasonic motors (USM are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS: A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. CONCLUSIONS: The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  16. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Science.gov (United States)

    Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

    2010-04-02

    Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  17. Application of ADM Using Laplace Transform to Approximate Solutions of Nonlinear Deformation for Cantilever Beam

    Directory of Open Access Journals (Sweden)

    Ratchata Theinchai

    2016-01-01

    Full Text Available We investigate semianalytical solutions of Euler-Bernoulli beam equation by using Laplace transform and Adomian decomposition method (LADM. The deformation of a uniform flexible cantilever beam is formulated to initial value problems. We separate the problems into 2 cases: integer order for small deformation and fractional order for large deformation. The numerical results show the approximated solutions of deflection curve, moment diagram, and shear diagram of the presented method.

  18. Application of ADM Using Laplace Transform to Approximate Solutions of Nonlinear Deformation for Cantilever Beam

    OpenAIRE

    Theinchai, Ratchata; Chankan, Siriwan; Yukunthorn, Weera

    2016-01-01

    We investigate semianalytical solutions of Euler-Bernoulli beam equation by using Laplace transform and Adomian decomposition method (LADM). The deformation of a uniform flexible cantilever beam is formulated to initial value problems. We separate the problems into 2 cases: integer order for small deformation and fractional order for large deformation. The numerical results show the approximated solutions of deflection curve, moment diagram, and shear diagram of the presented method.

  19. Methodology of structures damage estimation in case of cantilever isotropic beam

    Directory of Open Access Journals (Sweden)

    Sylwester Samborski

    2015-12-01

    Full Text Available This paper focuses on analysis of damage detection cantilever beam. Finite Element Method was used to simulate vibrations of the intact and the damaged beams. Analysis of natural frequencies of both the intact and the damaged beams was performed in order to observe the effect of damage on the beams dynamics. Next, the phase diagrams technique was applied and finally, experimental verification was performed to check the numerical results.

  20. Nonlinear behaviour of cantilevered carbon nanotube resonators based on a new nonlinear electrostatic load model

    Science.gov (United States)

    Farokhi, Hamed; Païdoussis, Michael P.; Misra, Arun K.

    2018-04-01

    The present study examines the nonlinear behaviour of a cantilevered carbon nanotube (CNT) resonator and its mass detection sensitivity, employing a new nonlinear electrostatic load model. More specifically, a 3D finite element model is developed in order to obtain the electrostatic load distribution on cantilevered CNT resonators. A new nonlinear electrostatic load model is then proposed accounting for the end effects due to finite length. Additionally, a new nonlinear size-dependent continuum model is developed for the cantilevered CNT resonator, employing the modified couple stress theory (to account for size-effects) together with the Kelvin-Voigt model (to account for nonlinear damping); the size-dependent model takes into account all sources of nonlinearity, i.e. geometrical and inertial nonlinearities as well as nonlinearities associated with damping, small-scale, and electrostatic load. The nonlinear equation of motion of the cantilevered CNT resonator is obtained based on the new models developed for the CNT resonator and the electrostatic load. The Galerkin method is then applied to the nonlinear equation of motion, resulting in a set of nonlinear ordinary differential equations, consisting of geometrical, inertial, electrical, damping, and size-dependent nonlinear terms. This high-dimensional nonlinear discretized model is solved numerically utilizing the pseudo-arclength continuation technique. The nonlinear static and dynamic responses of the system are examined for various cases, investigating the effect of DC and AC voltages, length-scale parameter, nonlinear damping, and electrostatic load. Moreover, the mass detection sensitivity of the system is examined for possible application of the CNT resonator as a nanosensor.

  1. Comment on 'Modeling and analysis of a bimorph piezoelectric cantilever beam for voltage generation'

    International Nuclear Information System (INIS)

    Erturk, A; Inman, D J

    2008-01-01

    In a recent paper, Ajitsaria et al (2007 Smart Mater. Struct. 16 447–54) presented a mathematical formulation for the modeling and analysis of a bimorph piezoelectric cantilever beam for voltage generation. Their motivation was the recent increasing trend in using the piezoelectric effect to harvest electrical energy from ambient vibrations. This comment addresses the modeling errors and numerous undefined and missing terms in the mentioned work. (comment)

  2. Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

    Directory of Open Access Journals (Sweden)

    Rui Zhao

    2018-02-01

    Full Text Available In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene/poly (styrene sulfonate (PEDOT/PSS was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10−7 nm−1, respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG. The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.

  3. Peculiarities of the Third Natural Frequency Vibrations of a Cantilever for the Improvement of Energy Harvesting

    Directory of Open Access Journals (Sweden)

    Vytautas Ostasevicius

    2015-05-01

    Full Text Available This paper focuses on several aspects extending the dynamical efficiency of a cantilever beam vibrating in the third mode. A few ways of producing this mode stimulation, namely vibro-impact or forced excitation, as well as its application for energy harvesting devices are proposed. The paper presents numerical and experimental analyses of novel structural dynamics effects along with an optimal configuration of the cantilever beam. The peculiarities of a cantilever beam vibrating in the third mode are related to the significant increase of the level of deformations capable of extracting significant additional amounts of energy compared to the conventional harvester vibrating in the first mode. Two types of a piezoelectric vibrating energy harvester (PVEH prototype are analysed in this paper: the first one without electrode segmentation, while the second is segmented using electrode segmentation at the strain nodes of the third vibration mode to achieve effective operation at the third resonant frequency. The results of this research revealed that the voltage generated by any segment of the segmented PVEH prototype excited at the third resonant frequency demonstrated a 3.4–4.8-fold increase in comparison with the non-segmented prototype. Simultaneously, the efficiency of the energy harvester prototype also increased at lower resonant frequencies from 16% to 90%. The insights presented in the paper may serve for the development and fabrication of advanced piezoelectric energy harvesters which would be able to generate a considerably increased amount of electrical energy independently of the frequency of kinematical excitation.

  4. A novel approach to the sensing of liquid density using a plastic optical fibre cantilever beam

    Science.gov (United States)

    Kulkarni, Atul; Kim, Youngjin; Kim, Taesung

    2009-01-01

    This article reports for the first time the use of a plastic optical fibre (POF) cantilever beam to measure the density of a liquid. The sensor is based on the Archimedes buoyancy principle. The sensor consists of a POF bonded on the surface of a metal beam in the form of a cantilever configuration, and at the free end of the beam a displacer is attached. Due to the apparent loss of the true weight of the displacer there is a deflection in the cantilever beam, which causes macro bending in the POF. The loss of intensity due to macro bending of the POF is a measure of the density of the liquid under test. The variation of weight loss with the density of different liquids showed that the weight loss is proportional to density. This sensor is capable of detecting the weight loss with respect to their densities even for liquids having close values of density like distilled water, tap water, and milk of various brands. The resolution of the sensor is observed to be 1.1 mg cm-3.

  5. Enhancing output power of a piezoelectric cantilever energy harvester using an oscillator

    International Nuclear Information System (INIS)

    Liu, Haili; Huang, Zhenyu; Xu, Tianzhu; Chen, Dayue

    2012-01-01

    The piezoelectric cantilever with a tip mass (Mass-PC), as a conventional vibration energy harvester, usually works at its fundamental frequency matching ambient excitation. By attaching an oscillator to a piezoelectric cantilever (Osc-PC), a double-mode energy harvester is developed to harvest more power from two matched ambient driving frequencies. Meanwhile, it allows the first operating frequency of the Osc-PC to be adjusted to be very low with only a limited mass attached. A distributed-parameter model of this harvester and the explicit expressions of its operating frequencies are derived to analyze and design the Osc-PC. Numerical investigations reveal that a heaver oscillator placed near the clamped end of the piezoelectric cantilever has better performance at the given exciting frequencies. Following the specified design criteria, an Osc-PC whose operating frequencies match two given exciting frequencies was constructed for the purpose of experimental testing. The results show that, compared to that of a corresponding Mass-PC whose operating frequency matches the lower exciting frequency, the energy harvesting efficiency of the Osc-PC increases by almost four times at the first operating frequency, while the output power at the second operating frequency of the Osc-PC accounts for 68% of that of the Mass-PC. (paper)

  6. Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

    Science.gov (United States)

    Ali, Shaikh M.; Phinney, Leslie M.

    2003-01-01

    °Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

  7. Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer.

    Science.gov (United States)

    Zhao, Rui; Sun, Ying

    2018-02-03

    In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS) was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10 -7 nm -1 , respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG). The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD) of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.

  8. Nonlinear vibration of rectangular atomic force microscope cantilevers by considering the Hertzian contact theory

    Energy Technology Data Exchange (ETDEWEB)

    Sadeghi, A., E-mail: a_sadeghi@srbiau.ac.ir [Islamic Azad Univ., Dept. of Mechanical and Aerospace Engineering, Science and Research Branch, Tehran (Iran, Islamic Republic of); Zohoor, H. [Sharif Univ. of Technology, Center of Excellence in Design, Robotics and Automation, Tehran (Iran, Islamic Republic of); The Academy of Sciences if I.R. Iran (Iran, Islamic Republic of)

    2010-05-15

    The nonlinear flexural vibration for a rectangular atomic force microscope cantilever is investigated by using Timoshenko beam theory. In this paper, the normal and tangential tip-sample interaction forces are found from a Hertzian contact model and the effects of the contact position, normal and lateral contact stiffness, tip height, thickness of the beam, and the angle between the cantilever and the sample surface on the nonlinear frequency to linear frequency ratio are studied. The differential quadrature method is employed to solve the nonlinear differential equations of motion. The results show that softening behavior is seen for most cases and by increasing the normal contact stiffness, the frequency ratio increases for the first mode, but for the second mode, the situation is reversed. The nonlinear-frequency to linear-frequency ratio increases by increasing the Timoshenko beam parameter, but decreases by increasing the contact position for constant amplitude for the first and second modes. For the first mode, the frequency ratio decreases by increasing both of the lateral contact stiffness and the tip height, but increases by increasing the angle α between the cantilever and sample surface. (author)

  9. Fabrication and energy harvesting characteristics of unimorph piezoelectric cantilever generators with interdigitated electrode lead zirconate titanate laminates

    Science.gov (United States)

    Lee, Min-seon; Yun, Ji-sun; Park, Woon-ik; Hong, Youn-woo; Cho, Jeong-ho; Paik, Jong-hoo; Park, Yong Ho; Son, Chun-myung; Jeong, Young Hun

    2017-12-01

    Interdigitated electrode (IDE) unimorph piezoelectric cantilever generators (UPCGs) were fabricated and their energy harvesting characteristics were investigated. A hard lead zirconate titanate (PZT) material with a high mechanical quality factor (Q m) of 1280 was used for the active piezoelectric film of the IDE UPCGs. Two different laminated IDE UPCGs were prepared; one has Ag/Pd interdigitated electrode (IDE) formed only on the top and bottom PZT sheets (D-IDE), while the other has Ag/Pd IDE on all of the PZT sheets (M-IDE). Cofiring was conducted at 1050 °C for 2 h for PZT laminates with IDEs. The fabricated IDE UPCGs exhibited power densities of 50.4 µW/cm3 for the D-IDE and 820 µW/cm3 for the M-IDE. The UPCG with the M-IDE exhibited a higher performance than that with the D-IDE. Specifically, a significantly enhanced normalized power factor of 670 µW/(g2·cm3) was found at 118 Hz across 100 kΩ.

  10. Fatigue study and improve reliability of cantilever type micro piezoelectric energy harvesters reinforced with flexible adhesive conductive tape

    Science.gov (United States)

    Lin, T. K.; Hsieh, Y. C.; Chen, C. T.; Chen, J. J.; Wu, W. J.

    2016-04-01

    Cantilever type piezoelectric energy harvester (PEH) is widely adopted in the design of vibration energy harvesters because of simple, effective and easy to fabricate. When the PEH is working under excitation of continuous vibration sources, like mounting on motors, reliability and durability is a major concern. The failure mode and fatigue issues will be important design considerations in field applications. Since the largest strain of a cantilever structure is located in the clamping position of fixed end, the location is therefore the weakest point of the structure and the hot zone of mechanical cracks. The failure mode due to fatigue under long time excitation of vibration sources is typically continuously developing small cracks on the piezoelectric PZT films till tearing the surface electrodes and caused open circuit to the output circuitry. Therefore, extending the lifetime with minimize the surface electrodes cracking becomes a key point for field applications. Previously, we focused on the output performance of PEH. At PowerMEMS 2014 [1], we presented a high performance PEH based on PZT thin films fabricated with a homemade PZT deposition equipment on stainless steel substrates. We confirmed that the stainless steel based PEH can generate better output power than silicon based devices under the same vibration excitation levels, and also the stainless based PEH can have longer lifetime when excited at higher vibration levels due to better mechanical strength. In this study, we tried to further reinforce the PEH with a conductive adhesive tape sticking on the surface electrode near the clamping position. We investigated the change of failure mode and mechanical behaviors, including the frequency bandwidth and non-linearity of the piezoelectric energy harvester. The PEH devices was mounted on a shaker for long time testing with vibration frequency set around 120Hz at 0.5g, 0.6g, and 0.7g acceleration vibration levels. The electrodes of the PEH device were

  11. Passivating electron contact based on highly crystalline nanostructured silicon oxide layers for silicon solar cells

    Czech Academy of Sciences Publication Activity Database

    Stuckelberger, J.; Nogay, G.; Wyss, P.; Jeangros, Q.; Allebe, Ch.; Debrot, F.; Niquille, X.; Ledinský, Martin; Fejfar, Antonín; Despeisse, M.; Haug, F.J.; Löper, P.; Ballif, C.

    2016-01-01

    Roč. 158, Dec (2016), s. 2-10 ISSN 0927-0248 R&D Projects: GA MŠk LM2015087 Institutional support: RVO:68378271 Keywords : surface passivation * passivating contact * nanostructure * silicon oxide * nanocrystalline * microcrystalline * poly-silicon * crystallization * Raman * transmission line measurement Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 4.784, year: 2016

  12. Silicon: electrochemistry and luminescence

    NARCIS (Netherlands)

    Kooij, Ernst Stefan

    1997-01-01

    The electrochemistry of crystalline and porous silicon and the luminescence from porous silicon has been studied. One chapter deals with a model for the anodic dissolution of silicon in HF solution. In following chapters both the electrochemistry and various ways of generating visible

  13. Silicon heterojunction transistor

    International Nuclear Information System (INIS)

    Matsushita, T.; Oh-uchi, N.; Hayashi, H.; Yamoto, H.

    1979-01-01

    SIPOS (Semi-insulating polycrystalline silicon) which is used as a surface passivation layer for highly reliable silicon devices constitutes a good heterojunction for silicon. P- or B-doped SIPOS has been used as the emitter material of a heterojunction transistor with the base and collector of silicon. An npn SIPOS-Si heterojunction transistor showing 50 times the current gain of an npn silicon homojunction transistor has been realized by high-temperature treatments in nitrogen and low-temperature annealing in hydrogen or forming gas

  14. The chemistry of silicon

    CERN Document Server

    Rochow, E G; Emeléus, H J; Nyholm, Ronald

    1975-01-01

    Pergamon Texts in Organic Chemistry, Volume 9: The Chemistry of Silicon presents information essential in understanding the chemical properties of silicon. The book first covers the fundamental aspects of silicon, such as its nuclear, physical, and chemical properties. The text also details the history of silicon, its occurrence and distribution, and applications. Next, the selection enumerates the compounds and complexes of silicon, along with organosilicon compounds. The text will be of great interest to chemists and chemical engineers. Other researchers working on research study involving s

  15. Optimization of technique factors for a silicon diode array full-field digital mammography system and comparison to screen-film mammography with matched average glandular dose

    International Nuclear Information System (INIS)

    Berns, Eric A.; Hendrick, R. Edward; Cutter, Gary R.

    2003-01-01

    Contrast-detail experiments were performed to optimize technique factors for the detection of low-contrast lesions using a silicon diode array full-field digital mammography (FFDM) system under the conditions of a matched average glandular dose (AGD) for different techniques. Optimization was performed for compressed breast thickness from 2 to 8 cm. FFDM results were compared to screen-film mammography (SFM) at each breast thickness. Four contrast-detail (CD) images were acquired on a SFM unit with optimal techniques at 2, 4, 6, and 8 cm breast thicknesses. The AGD for each breast thickness was calculated based on half-value layer (HVL) and entrance exposure measurements on the SFM unit. A computer algorithm was developed and used to determine FFDM beam current (mAs) that matched AGD between FFDM and SFM at each thickness, while varying target, filter, and peak kilovoltage (kVp) across the full range available for the FFDM unit. CD images were then acquired on FFDM for kVp values from 23-35 for a molybdenum-molybdenum (Mo-Mo), 23-40 for a molybdenum-rhodium (Mo-Rh), and 25-49 for a rhodium-rhodium (Rh-Rh) target-filter under the constraint of matching the AGD from screen-film for each breast thickness (2, 4, 6, and 8 cm). CD images were scored independently for SFM and each FFDM technique by six readers. CD scores were analyzed to assess trends as a function of target-filter and kVp and were compared to SFM at each breast thickness. For 2 cm thick breasts, optimal FFDM CD scores occurred at the lowest possible kVp setting for each target-filter, with significant decreases in FFDM CD scores as kVp was increased under the constraint of matched AGD. For 2 cm breasts, optimal FFDM CD scores were not significantly different from SFM CD scores. For 4-8 cm breasts, optimum FFDM CD scores were superior to SFM CD scores. For 4 cm breasts, FFDM CD scores decreased as kVp increased for each target-filter combination. For 6 cm breasts, CD scores decreased slightly as k

  16. An elastography method based on the scanning contact resonance of a piezoelectric cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Fu, Ji; Li, Faxin, E-mail: lifaxin@pku.edu.cn [State Key Lab for Turbulence and Complex Systems, College of Engineering, Peking University, Beijing 100871, China and HEDPS, Center for Applied Physics and Technologies, Peking University, Beijing 100871 (China)

    2013-12-15

    Purpose: Most tissues may become significantly stiffer than their normal states when there are lesions inside. The tissue's modulus can then act as an identification parameter for clinic diagnosis of tumors or fibrosis, which leads to elastography. This study introduces a novel elastography method that can be used for modulus imaging of superficial organs. Methods: This method is based on the scanning contact-resonance of a unimorph piezoelectric cantilever. The cantilever vibrates in its bending mode with the tip pressed tightly on the sample. The contact resonance frequency of the cantilever-sample system is tracked at each scanning point, from which the sample's modulus can be derived based on a beam dynamic model and a contact mechanics model. Scanning is performed by a three-dimensional motorized stage and the whole system is controlled by a homemade software program based on LabVIEW. Results: Testing onin vitro beef tissues indicates that the fat and the muscle can be easily distinguished using this system, and the accuracy of the modulus measurement can be comparable with that of nanoindentation. Imaging on homemade gelatin phantoms shows that the depth information of the abnormalities can be qualitatively obtained by varying the pressing force. The detection limit of this elastography method is specially examined both experimentally and numerically. Results show that it can detect the typical lesions in superficial organs with the depth of several centimeters. The lateral resolution of this elastography method/system is better than 0.5 mm, and could be further enhanced by using more scanning points. Conclusions: The proposed elastography system can be regarded as a sensitive palpation robot, which may be very promising in early diagnosis of tumors in superficial organs such as breast and thyroid.

  17. An elastography method based on the scanning contact resonance of a piezoelectric cantilever.

    Science.gov (United States)

    Fu, Ji; Li, Faxin

    2013-12-01

    Most tissues may become significantly stiffer than their normal states when there are lesions inside. The tissue's modulus can then act as an identification parameter for clinic diagnosis of tumors or fibrosis, which leads to elastography. This study introduces a novel elastography method that can be used for modulus imaging of superficial organs. This method is based on the scanning contact-resonance of a unimorph piezoelectric cantilever. The cantilever vibrates in its bending mode with the tip pressed tightly on the sample. The contact resonance frequency of the cantilever-sample system is tracked at each scanning point, from which the sample's modulus can be derived based on a beam dynamic model and a contact mechanics model. Scanning is performed by a three-dimensional motorized stage and the whole system is controlled by a homemade software program based on LabVIEW. Testing on in vitro beef tissues indicates that the fat and the muscle can be easily distinguished using this system, and the accuracy of the modulus measurement can be comparable with that of nanoindentation. Imaging on homemade gelatin phantoms shows that the depth information of the abnormalities can be qualitatively obtained by varying the pressing force. The detection limit of this elastography method is specially examined both experimentally and numerically. Results show that it can detect the typical lesions in superficial organs with the depth of several centimeters. The lateral resolution of this elastography method∕system is better than 0.5 mm, and could be further enhanced by using more scanning points. The proposed elastography system can be regarded as a sensitive palpation robot, which may be very promising in early diagnosis of tumors in superficial organs such as breast and thyroid.

  18. Quantitative electromechanical impedance method for nondestructive testing based on a piezoelectric bimorph cantilever

    International Nuclear Information System (INIS)

    Fu, Ji; Tan, Chi; Li, Faxin

    2015-01-01

    The electromechanical impedance (EMI) method, which holds great promise in structural health monitoring (SHM), is usually treated as a qualitative method. In this work, we proposed a quantitative EMI method based on a piezoelectric bimorph cantilever using the sample’s local contact stiffness (LCS) as the identification parameter for nondestructive testing (NDT). Firstly, the equivalent circuit of the contact vibration system was established and the analytical relationship between the cantilever’s contact resonance frequency and the LCS was obtained. As the LCS is sensitive to typical defects such as voids and delamination, the proposed EMI method can then be used for NDT. To verify the equivalent circuit model, two piezoelectric bimorph cantilevers were fabricated and their free resonance frequencies were measured and compared with theoretical predictions. It was found that the stiff cantilever’s EMI can be well predicted by the equivalent circuit model while the soft cantilever’s cannot. Then, both cantilevers were assembled into a homemade NDT system using a three-axis motorized stage for LCS scanning. Testing results on a specimen with a prefabricated defect showed that the defect could be clearly reproduced in the LCS image, indicating the validity of the quantitative EMI method for NDT. It was found that the single-frequency mode of the EMI method can also be used for NDT, which is faster but not quantitative. Finally, several issues relating to the practical application of the NDT method were discussed. The proposed EMI-based NDT method offers a simple and rapid solution for damage evaluation in engineering structures and may also shed some light on EMI-based SHM. (paper)

  19. The effect of rotatory inertia on the dynamic response of cantilever structures

    International Nuclear Information System (INIS)

    Lin, Y.J.; Hadjian, A.H.

    1977-01-01

    For the dynamic response of cantilever beams, the error introduced by the bending theory becomes significant as the ratio of the radius of gyration to the beam length (r/l), exceeds 0.1. In this case, the use of Timoshenko's beam equation becomes more appropriate. This equation includes, in addition to the bending effects, both shear deformation and rotatory inertia effects. In the discrete modeling of beam elements, both the shear deformation and rotatory inertia terms play roles in the mass matrix, while only the shear deformation terms appear in the stiffness matrix. The effect of rotatory inertia on the frequencies and dynamic response of cantilever structures subjected to lateral earthquake excitation is thoroughly studied. This is done by using both the consistent and lumped mass matrices and analytical solution. The beam support is treated either as fixed or elastically restrained to consider soil-structure interaction effects. Since containment structures can be treated as hollow beams, the cantilever beam of uniform cross-section is examined first. For those cases where the ratio of the radius of gyration to beam length lies within the range of interest, all the solutions show that rotatory inertia has an important impact on both the frequencies (other than that of the fundamental mode) and the vertical component of the response. However, as the soil-structure interaction effects become significant rotatory inertia effects become secondary. For shear wall structures used in nuclear power plants, the floors may be treated as rigid diaphragms and the shear walls between floors are usually considered to be beam elements of uniform cross-section

  20. Thin-film silicon solar cell technology

    Czech Academy of Sciences Publication Activity Database

    Shah, A. V.; Schade, H.; Vaněček, Milan; Meier, J.; Vallat-Sauvain, E.; Wyrsch, N.; Kroll, U.; Droz, C.; Bailat, J.

    2004-01-01

    Roč. 12, - (2004), s. 113-142 ISSN 1062-7995 R&D Projects: GA MŽP SN/320/11/03 Institutional research plan: CEZ:AV0Z1010914 Keywords : thin-film silicon modules * hydrogenerated amorphous silicon(a-Si:H) * hydrogenerated microcrystalline (ćc-Si:H) * transparent conductive oxydes(TCOs) * building-integrated photovoltaics(BIPV) Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 1.196, year: 2004

  1. Dynamic stability of a cantilevered Timoshenko beam on partial elastic foundations subjected to a follower force

    International Nuclear Information System (INIS)

    Ryu, Bong Jo; Shin, Kwang Bok; Yim, Kyung Bin; Yoon, Young Sik

    2006-01-01

    This paper presents the dynamic stability of a cantilevered Timoshenko beam with a concentrated mass, partially attached to elastic foundations, and subjected to a follower force. Governing equations are derived from the extended Hamilton's principle, and FEM is applied to solve the discretized equation. The influence of some parameters such as the elastic foundation parameter, the positions of partial elastic foundations, shear deformations, the rotary inertia of the beam, and the mass and the rotary inertia of the concentrated mass on the critical flutter load is investigated. Finally, the optimal attachment ratio of partial elastic foundation that maximizes the critical flutter load is presented

  2. Bandwidth increasing mechanism by introducing a curve fixture to the cantilever generator

    Energy Technology Data Exchange (ETDEWEB)

    Liu, Weiqun, E-mail: weiqunliu@home.swjtu.edu.cn; Liu, Congzhi; Ren, Bingyu; Zhu, Qiao; Hu, Guangdi [School of Mechanical Engineering, Southwest Jiaotong University, 610031 Chengdu (China); Yang, Weiqing [School of Materials Science and Engineering, Southwest Jiaotong University, 610031 Chengdu (China)

    2016-07-25

    A nonlinear wideband generator architecture by clamping the cantilever beam generator with a curve fixture is proposed. Devices with different nonlinear stiffness can be obtained by properly choosing the fixture curve according to the design requirements. Three available generator types are presented and discussed for polynomial curves. Experimental investigations show that the proposed mechanism effectively extends the operation bandwidth with good power performance. Especially, the simplicity and easy feasibility allow the mechanism to be widely applied for vibration generators in different scales and environments.

  3. Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

    Science.gov (United States)

    2015-08-01

    surface coating developed during the NiTi deposition or anneal that is relatively resistant to the wet etch. Fig. 2 SEMs after the NiTi wet -etch...SEMs of NiTi devices after the 600 °C anneal , wet -etch patterning of the NiTi. A 120-nm Au capping layer was also sputtered. Figure 3a shows a 200-nm...Ni50Ti50 Cantilever 2 3. Results and Discussion 3 3.1 Wet -Etch Patterning NiTi 3 3.2 Dry-Etch Release of NiTi Devices 5 3.3 Thermal Actuation of

  4. Position and mass determination of multiple particles using cantilever based mass sensors

    International Nuclear Information System (INIS)

    Dohn, Soeren; Schmid, Silvan; Boisen, Anja; Amiot, Fabien

    2010-01-01

    Resonant microcantilevers are highly sensitive to added masses and have the potential to be used as mass-spectrometers. However, making the detection of individual added masses quantitative requires the position determination for each added mass. We derive expressions relating the position and mass of several added particles to the resonant frequencies of a cantilever, and an identification procedure valid for particles with different masses is proposed. The identification procedure is tested by calculating positions and mass of multiple microparticles with similar mass positioned on individual microcantilevers. Excellent agreement is observed between calculated and measured positions and calculated and theoretical masses.

  5. Improved process for forming a three-dimensional undersurface on a printed cantilever

    Science.gov (United States)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

    2018-05-01

    An improvement in the lift-on offset printing process is reported as a means of enabling the structural customization of hollow structures used as moving parts of sensors and actuators. The improved process can add structures to the underside of a hollow structure by modifying the preparation of the pre-structure. As a demonstration, the mechanical displacement of a cantilever in a gravitational acceleration sensor was enhanced by the addition of a proof mass. The improved process can be expected to further produce functionalized hollow structures by an efficient manufacturing process.

  6. Modelling the double cantilever beam test with bending moments by using bilinear discontinuous cohesive laws

    DEFF Research Database (Denmark)

    Valvo, Paolo S.; Sørensen, Bent F.; Toftegaard, Helmuth Langmaack

    2015-01-01

    A theoretical model of the double cantilever beam tests with bending moments (DCB-UBM) is presented. The specimen is modelled as the assemblage of two laminated beams connected by a cohesive interface. It is assumed that the traction-separation laws – i.e. the relationships between the interfacial...... the cohesive law parameters from experiments. Experimental tests have been conducted on glass fibre reinforced specimens under pure mode I and II loading conditions. The predictions of the theoretical model turn out to be in very good agreement with the experimental results....

  7. Fracture probability properties of pure and cantilever bending fatigue of STS304 steel

    International Nuclear Information System (INIS)

    Roh, Sung Kuk; Park, Dae Hyun; Jeong, Soon Uk

    2001-01-01

    Big accidents of flyings, vessel, subways, gas equipments, buildings and bridge happens frequently. Therefore many people are suffering harm of property. The destruction cause of marcaine components is almost accused by fatigue. This study is test for STS304 specimen using pure and cantilever bending state. Rounded and notched specimen including fracture surface investigation was comparatively experimented, fatigue life according to degree of surface finishing was examined. Fatigue fracture probability of notched canilever specimens were predicted by P-S-N curve, median rank and Weibull distribution. And at the relation with the rotational speed and stress, the fatigue life of the test specimen was higher at high speed than low speed

  8. Analysis of the FELIX experiments with cantilevered beams and hollow cylinders

    International Nuclear Information System (INIS)

    Turner, L.R.; Hua, T.Q.; Lee, S.-Y.

    1986-01-01

    Experiments have been performed with the FELIX facility at Argonne National Laboratory to study the coupling between eddy currents and deflections and to provide data for validating eddy current computer programs. Experiments with cantilevered beams in crossed steady and decaying magnetic fields verify that coupling effects act to alleviate the large currents, deflections, and stresses predicted by uncoupled analyses. Measurements of magnetic fields induced in conducting hollow cylinders are analyzed by exponential fitting and by transfer functions. Spatial variation in the parameters of the exponential fit and in those of the one-and two-pole transfer functions suggests that several eddy current modes are acting in the cylinder test pieces. (author)

  9. Analysis of the FELIX experiments with cantilevered beams and hollow cylinders

    International Nuclear Information System (INIS)

    Turner, L.R.; Hua, T.Q.; Lee, S.Y.

    1986-01-01

    Experiments have been performed with the FELIX facility at Argonne National Laboratory to study the coupling between eddy currents and deflections and to provide data for validating eddy current computer programs. Experiments with cantilevered beams in crossed steady and decaying magnetic fields verify that coupling effects act to alleviate the large currents, deflections, and stresses predicted by uncoupled analyses. Measurements of magnetic fields induced in conducting hollow cylinders are analyzed by exponential fitting and by transfer functions. Spatial variation in the parameters of the exponential fit and in those of the one- and two-pole transfer functions suggests that several eddy current modes are acting in the cylinder test pieces

  10. Application of a Cantilevered SWCNT with Mass at the Tip as a Nanomechanical Sensor

    DEFF Research Database (Denmark)

    Mehdipour, I.; Barari, Amin; Domairry, G.

    2011-01-01

    In this paper, the continuum mechanics method and a bending model is applied to obtain the resonant frequency of the fixed-free SWCNT where the mass is rigidly attached to the tip. This method used the Euler–Bernoulli theory with cantilevered boundary conditions where the effect of attached mass ...... of resonant frequency are decreased. The validity and the accuracy of these formulas are examined with other sensor equations in the literatures. The results indicate that the new sensor equations can be used for CNT like CNT-based biosensors with reasonable accuracy....

  11. Stress Concentration Factor and Stress Intensity Factor with U-notch and Crack in the Beam

    Energy Technology Data Exchange (ETDEWEB)

    Seo, Bo Seong; Lee, Kwang Ho [Kyungpook National Univ., Daegu (Korea, Republic of)

    2016-05-15

    The stress concentration factors and stress intensity factors for a simple beam and a cantilever are analyzed by using finite element method and photoelasticity. Using the analyzed results, the estimated graphs on stress concentration factors and stress intensity factors are obtained. To analyze stress concentration factors of notch, the dimensionless notch length H(height of specimen)/h=1.1-2 and dimensionless gap space r(radius at the notch tip)/h=0.1~0.5 are used, where h=H-c and c is the notch length. As the notch gap length increases and the gap decreases, the stress concentration factors increase. Stress concentration factors of a simple beam are greater than those of a cantilever beam. However, actually, the maximum stress values under a load, a notch length and a gap occur more greatly in the cantilever beam than in the simple beam. To analyze stress intensity factors, the normalized crack length α(crack length)/H=0.2~0.5 is used. As the length of the crack increases, the normalized stress intensity factors increase. The stress intensity factors under a constant load and a crack length occur more greatly in the cantilever beam than in the simple beam.

  12. Modelling of Spring Constant and Pull-down Voltage of Non-uniform RF MEMS Cantilever Incorporating Stress Gradient

    Directory of Open Access Journals (Sweden)

    Shimul Chandra SAHA

    2008-11-01

    Full Text Available We have presented a model for spring constant and pull-down voltage of a non-uniform radio frequency microelectromechanical systems (RF MEMS cantilever that works on electrostatic actuation. The residual stress gradient in the beam material that may arise during the fabrication process is also considered in the model. Using basic force deflection calculation of the suspended beam, a stand-alone model for the spring constant and pull-down voltage of the non-uniform cantilever is developed. To compare the model, simulation is performed using standard Finite Element Method (FEM analysis tolls from CoventorWare. The model matches very well with the FEM simulation results. The model will offer an efficient means of design, analysis, and optimization of RF MEMS cantilever switches.

  13. SEM in situ MiniCantilever Beam Bending of U-10Mo/Zr/Al Fuel Elements

    Energy Technology Data Exchange (ETDEWEB)

    Mook, William [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Baldwin, Jon K. [Los Alamos National Lab. (LANL), Los Alamos, NM (United States); Martinez, Ricardo M. [Los Alamos National Lab. (LANL), Los Alamos, NM (United States); Mara, Nathan A. [Los Alamos National Lab. (LANL), Los Alamos, NM (United States)

    2014-06-16

    In this work, the fracture behavior of Al/Zr and Zr/dU-10Mo interfaces was measured via the minicantilever bend technique. The energy dissipation rates were found to be approximately 3.7-5 mj/mm2 and 5.9 mj/mm2 for each interface, respectively. It was found that in order to test the Zr/U-10Mo interface, location of the hinge of the cantilever was a key parameter. While this test could be adapted to hot cell use through careful alignment fixturing and measurement of crack lengths with an optical microscope (as opposed to SEM, which was used here out of convenience), machining of the cantilevers via MiniMill in such a way as to locate the interfaces at the cantilever hinge, as well as proper placement of a femtosecond laser notch will continue to be key challenges in a hot cell environment.

  14. High-speed dynamic atomic force microscopy by using a Q-controlled cantilever eigenmode as an actuator

    Energy Technology Data Exchange (ETDEWEB)

    Balantekin, M., E-mail: mujdatbalantekin@iyte.edu.tr

    2015-02-15

    We present a high-speed operating method with feedback to be used in dynamic atomic force microscope (AFM) systems. In this method we do not use an actuator that has to be employed to move the tip or the sample as in conventional AFM setups. Instead, we utilize a Q-controlled eigenmode of an AFM cantilever to perform the function of the actuator. Simulations show that even with an ordinary tapping-mode cantilever, imaging speed can be increased by about 2 orders of magnitude compared to conventional dynamic AFM imaging. - Highlights: • A high-speed imaging method is developed for dynamic-AFM systems. • An eigenmode of an AFM cantilever is utilized to perform fast actuation. • Simulations show 2 orders of magnitude increase in scan speed. • The time spent for dynamic-AFM imaging experiments will be minimized.

  15. Determination of Young's modulus of epoxy coated polyethylene micro-cantilever using phase-shift shadow moiré method

    Science.gov (United States)

    Lim, J. H.; Ratnam, M. M.; Azid, I. A.; Mutharasu, D.

    2011-11-01

    Young's moduli of various epoxy coated polyethylene terephthalate (PET) micro-cantilevers were determined from the deflection results obtained using the phase-shift shadow moiré (PSSM) method. The filler materials for epoxy coatings were aluminum and graphite powders that were mixed with epoxy at various percentages. Young's moduli were calculated from theory based on the deflection results. The PET micro-cantilever coated with aluminum-epoxy coating showed increasing value of Young's modulus when the ratios of the aluminum-epoxy were increased. The graphite-epoxy coating on the PET micro-cantilever also showed the same trend. The experimental results also show that Young's modulus of the graphite-epoxy coating is higher than aluminum-epoxy coating in comparison at the same mixing ratio.

  16. In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

    Directory of Open Access Journals (Sweden)

    Ribu Mathew

    2017-03-01

    Full Text Available Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio

  17. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    Science.gov (United States)

    Yi, Zhenxiang; Liao, Xiaoping

    2013-03-01

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

  18. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    International Nuclear Information System (INIS)

    Yi, Zhenxiang; Liao, Xiaoping

    2013-01-01

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW −1 at 8, 10 and 12 GHz, respectively. (paper)

  19. The fabrication of silicon nanostructures by focused-ion-beam implantation and TMAH wet etching

    International Nuclear Information System (INIS)

    Sievilae, Paeivi; Chekurov, Nikolai; Tittonen, Ilkka

    2010-01-01

    Local gallium implantation of silicon by a focused ion beam (FIB) has been used to create a mask for anisotropic tetramethylammonium hydroxide (TMAH) wet etching. The dependence of the etch stop properties of gallium-doped silicon on the implanted dose has been investigated and a dose of 4 x 10 13 ions cm -2 has been determined to be the threshold value for achieving observable etching resistance. Only a thin, approx. 50 nm, surface layer is found to be durable enough to serve as a mask with a high selectivity of at least 2000:1 between implanted and non-implanted areas. The combined FIB-TMAH process has been used to generate various types of 3D nanostructures including nanochannels separated by thin vertical sidewalls with aspect ratios up to 1:30, ultra-narrow (approx. 25 nm) freestanding bridges and cantilevers, and gratings with a resolution of 20 lines μm -1 .

  20. Excitation dependence of photoluminescence in silicon quantum dots

    International Nuclear Information System (INIS)

    Wen Xiaoming; Lap Van Dao; Hannaford, Peter; Cho, E-C; Cho, Young H; Green, Martin A

    2007-01-01

    We have studied the optical properties of silicon quantum dots (QDs) embedded in a silicon oxide matrix using photoluminescence (PL) and time-resolved PL. A broad luminescence band is observed in the red region, in which the time evolution exhibits a stretched exponential decay. With increasing excitation intensity a significant saturation effect is observed. Direct electron-hole recombination is the dominant effect in the red band. A relatively narrow peak appears around 1.5 eV, which is attributed to the interface states overlapping with transition from the ground state of the silicon QDs. The saturation factor increases slowly with detection photon energy between 1.5 and 1.8 eV, which is attributed to the emission from zero-phonon electron-hole recombination. At higher photon energies the significantly increased saturation factor suggests a different emission mechanism, most likely the defect states from silicon, silicon oxide or silicon rich oxide

  1. Multiple regimes of operation in bimodal AFM: understanding the energy of cantilever eigenmodes

    Directory of Open Access Journals (Sweden)

    Daniel Kiracofe

    2013-06-01

    Full Text Available One of the key goals in atomic force microscopy (AFM imaging is to enhance material property contrast with high resolution. Bimodal AFM, where two eigenmodes are simultaneously excited, confers significant advantages over conventional single-frequency tapping mode AFM due to its ability to provide contrast between regions with different material properties under gentle imaging conditions. Bimodal AFM traditionally uses the first two eigenmodes of the AFM cantilever. In this work, the authors explore the use of higher eigenmodes in bimodal AFM (e.g., exciting the first and fourth eigenmodes. It is found that such operation leads to interesting contrast reversals compared to traditional bimodal AFM. A series of experiments and numerical simulations shows that the primary cause of the contrast reversals is not the choice of eigenmode itself (e.g., second versus fourth, but rather the relative kinetic energy between the higher eigenmode and the first eigenmode. This leads to the identification of three distinct imaging regimes in bimodal AFM. This result, which is applicable even to traditional bimodal AFM, should allow researchers to choose cantilever and operating parameters in a more rational manner in order to optimize resolution and contrast during nanoscale imaging of materials.

  2. Fifteen-year survival of anterior all-ceramic cantilever resin-bonded fixed dental prostheses.

    Science.gov (United States)

    Kern, Matthias

    2017-01-01

    The aim of this follow-up study was to report the long-term outcome of all-ceramic cantilever resin-bonded fixed dental prostheses (RBFDPs). In 16 patients (mean age of 33.3±17.5years) 22 RBFDPs made from a glass-infiltrated alumina ceramic (In-Ceram) were inserted with a phosphate monomer containing luting agent after air-abrasion of the retainer wings. The abutment preparation included a shallow groove on the cingulum and a small proximal box. The restorations replacing 16 maxillary and 6 mandibular incisors were followed over a mean observation time of 188.7 months. No restoration debonded. Two RBFDPs fractured and were lost 48 and 214 months after insertion, respectively. The 10-year and 15-year survival rates were both 95.4% and dropped to 81.8% after 18 years. Anterior all-ceramic cantilever RBFDPs exhibited an excellent clinical longevity. Copyright © 2016 Elsevier Ltd. All rights reserved.

  3. Cantilever-detected high-frequency ESR measurement using a backward travelling wave oscillator

    International Nuclear Information System (INIS)

    Tokuda, Y; Hirano, S; Ohmichi, E; Ohta, H

    2012-01-01

    Our cantilever-detected electron spin resonance (ESR) technique is motivated for terahertz ESR spectroscopy of a tiny single crystal at low temperature. In this technique, ESR signal is detected as deflection of a sample-mounted cantilever, which is sensitively detected by built-in piezoresistors. So far, ESR detection at 315 GHz was succeeded using Gunn oscillator. In this study, we combine our ESR technique with a backward traveling wave oscillator (BWO), which can cover a wide frequency range 120-1200 GHz, to achieve better spectral resolution. Experiments were carried out at 4.2 K for a single crystal of Co Tutton salt with a newly constructed optical system. We successfully observed two ESR absorption lines in BWO frequencies up to 370 GHz. From multi-frequency measurements, the observed ESR lines shifted linearly with BWO frequency, being consistent with paramagnetic resonance. The estimated g values are g 1 = 3.00 and g 2 = 3.21. The spin sensitivity was estimated to ∼10 12 spins/gauss at 370 GHz.

  4. Accurate characterization of wafer bond toughness with the double cantilever specimen

    Science.gov (United States)

    Turner, Kevin T.; Spearing, S. Mark

    2008-01-01

    The displacement loaded double cantilever test, also referred to as the "Maszara test" and the "crack opening method" by the wafer bonding community, is a common technique used to evaluate the interface toughness or surface energy of direct wafer bonds. While the specimen is widely used, there has been a persistent question as to the accuracy of the method since the actual specimen geometry differs from the ideal beam geometry assumed in the expression used for data reduction. The effect of conducting the test on whole wafer pairs, in which the arms of cantilevers are wide plates rather than slender beams, is examined in this work using finite element analysis. A model is developed to predict the equilibrium shape of the crack front and to develop a corrected expression for calculating interface toughness from crack length measurements obtained in tests conducted on whole wafer pairs. The finite element model, which is validated through comparison to experiments, demonstrates that using the traditional beam theory-based expressions for data reduction can lead to errors of up to 25%.

  5. The small length scale effect for a non-local cantilever beam: a paradox solved.

    Science.gov (United States)

    Challamel, N; Wang, C M

    2008-08-27

    Non-local continuum mechanics allows one to account for the small length scale effect that becomes significant when dealing with microstructures or nanostructures. This paper presents some simplified non-local elastic beam models, for the bending analyses of small scale rods. Integral-type or gradient non-local models abandon the classical assumption of locality, and admit that stress depends not only on the strain value at that point but also on the strain values of all points on the body. There is a paradox still unresolved at this stage: some bending solutions of integral-based non-local elastic beams have been found to be identical to the classical (local) solution, i.e. the small scale effect is not present at all. One example is the Euler-Bernoulli cantilever nanobeam model with a point load which has application in microelectromechanical systems and nanoelectromechanical systems as an actuator. In this paper, it will be shown that this paradox may be overcome with a gradient elastic model as well as an integral non-local elastic model that is based on combining the local and the non-local curvatures in the constitutive elastic relation. The latter model comprises the classical gradient model and Eringen's integral model, and its application produces small length scale terms in the non-local elastic cantilever beam solution.

  6. 2D MEMS electrostatic cantilever waveguide scanner for potential image display application

    Directory of Open Access Journals (Sweden)

    Gu Kebin

    2015-01-01

    Full Text Available This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input. A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5μm beam diameter is observed at the focal plane. The transmission efficiency is low (~10% and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

  7. Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems

    Directory of Open Access Journals (Sweden)

    Péter Udvardi

    2017-10-01

    Full Text Available Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully implantable in the middle/inner ear and includes the following components: frequency selective microphone or accelerometer, energy harvesting device, speech processor, and cochlear multielectrode. Here we demonstrate a low volume, piezoelectric micro-electromechanical system (MEMS cantilever array which is sensitive, even in the lower part of the voice frequency range (300–700 Hz. The test array consisting of 16 cantilevers has been fabricated by standard bulk micromachining using a Si-on-Insulator (SOI wafer and aluminum nitride (AlN as a complementary metal-oxide-semiconductor (CMOS and biocompatible piezoelectric material. The low frequency and low device footprint are ensured by Archimedean spiral geometry and Si seismic mass. Experimentally detected resonance frequencies were validated by an analytical model. The generated open circuit voltage (3–10 mV is sufficient for the direct analog conversion of the signals for cochlear multielectrode implants.

  8. Nonlinear dynamic analysis of cantilevered piezoelectric energy harvesters under simultaneous parametric and external excitations

    Science.gov (United States)

    Fang, Fei; Xia, Guanghui; Wang, Jianguo

    2018-02-01

    The nonlinear dynamics of cantilevered piezoelectric beams is investigated under simultaneous parametric and external excitations. The beam is composed of a substrate and two piezoelectric layers and assumed as an Euler-Bernoulli model with inextensible deformation. A nonlinear distributed parameter model of cantilevered piezoelectric energy harvesters is proposed using the generalized Hamilton's principle. The proposed model includes geometric and inertia nonlinearity, but neglects the material nonlinearity. Using the Galerkin decomposition method and harmonic balance method, analytical expressions of the frequency-response curves are presented when the first bending mode of the beam plays a dominant role. Using these expressions, we investigate the effects of the damping, load resistance, electromechanical coupling, and excitation amplitude on the frequency-response curves. We also study the difference between the nonlinear lumped-parameter and distributed-parameter model for predicting the performance of the energy harvesting system. Only in the case of parametric excitation, we demonstrate that the energy harvesting system has an initiation excitation threshold below which no energy can be harvested. We also illustrate that the damping and load resistance affect the initiation excitation threshold.

  9. Aeroelastic oscillations of a cantilever with structural nonlinearities: theory and numerical simulation.

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Brandon [Carleton Univ., Ottawa, ON (Canada). Dept. of Civil and Environmental Engineering; Rocha da Costa, Leandro Jose [Carleton Univ., Ottawa, ON (Canada). Dept. of Civil and Environmental Engineering; Poirel, Dominique [Royal Military College of Canada, Kingston (Canada). Dept. of Mechanical and Aerospace Engineering; Pettit, Chris [US Naval Academy, Annapolis, MD (United States). Dept. of Mechanical and Aerospace Engineering; Khalil, Mohammad [Sandia National Lab. (SNL-CA), Livermore, CA (United States); Sarkar, Abhijit [Carleton Univ., Ottawa, ON (Canada). Dept. of Civil and Environmental Engineering

    2017-09-01

    Our study details the derivation of the nonlinear equations of motion for the axial, biaxial bending and torsional vibrations of an aeroelastic cantilever undergoing rigid body (pitch) rotation at the base. The primary attenstion is focussed on the geometric nonlinearities of the system, whereby the aeroelastic load is modeled by the theory of linear quasisteady aerodynamics. This modelling effort is intended to mimic the wind-tunnel experimental setup at the Royal Military College of Canada. While the derivation closely follows the work of Hodges and Dowell [1] for rotor blades, this aeroelastic system contains new inertial terms which stem from the fundamentally different kinematics than those exhibited by helicopter or wind turbine blades. Using the Hamilton’s principle, a set of coupled nonlinear partial differential equations (PDEs) and an ordinary differential equation (ODE) are derived which describes the coupled axial-bending-bending-torsion-pitch motion of the aeroelastic cantilever with the pitch rotation. The finite dimensional approximation of the coupled system of PDEs are obtained using the Galerkin projection, leading to a coupled system of ODEs. Subsequently, these nonlinear ODEs are solved numerically using the built-in MATLAB implicit ODE solver and the associated numerical results are compared with those obtained using Houbolt’s method. It is demonstrated that the system undergoes coalescence flutter, leading to a limit cycle oscillation (LCO) due to coupling between the rigid body pitching mode and teh flexible mode arising from the flapwise bending motion.

  10. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.; Younis, Mohammad I.

    2016-01-01

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator's nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli's beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  11. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.

    2016-09-15

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator\\'s nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli\\'s beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  12. Silver nanowires for highly reproducible cantilever based AFM-TERS microscopy: towards a universal TERS probe.

    Science.gov (United States)

    Walke, Peter; Fujita, Yasuhiko; Peeters, Wannes; Toyouchi, Shuichi; Frederickx, Wout; De Feyter, Steven; Uji-I, Hiroshi

    2018-04-26

    Tip-enhanced Raman scattering (TERS) microscopy is a unique analytical tool to provide complementary chemical and topographic information of surfaces with nanometric resolution. However, difficulties in reliably producing the necessary metallized scanning probe tips has limited its widespread utilisation, particularly in the case of cantilever-based atomic force microscopy. Attempts to alleviate tip related issues using colloidal or bottom-up engineered tips have so far not reported consistent probes for both Raman and topographic imaging. Here we demonstrate the reproducible fabrication of cantilever-based high-performance TERS probes for both topographic and Raman measurements, based on an approach that utilises noble metal nanowires as the active TERS probe. The tips show 10 times higher TERS contrasts than the most typically used electrochemically-etched tips, and show a reproducibility for TERS greater than 90%, far greater than found with standard methods. We show that TERS can be performed in tapping as well as contact AFM mode, with optical resolutions around or below 15 nm, and with a maximum resolution achieved in tapping-mode of 6 nm. Our work illustrates that superior TERS probes can be produced in a fast and cost-effective manner using simple wet-chemistry methods, leading to reliable and reproducible high-resolution and high-sensitivity TERS, and thus renders the technique applicable for a broad community.

  13. White Noise Responsiveness of an AlN Piezoelectric MEMS Cantilever Vibration Energy Harvester

    International Nuclear Information System (INIS)

    Jia, Y; Seshia, A A

    2014-01-01

    This paper reports the design, analysis and experimental characterisation of a piezoelectric MEMS cantilever vibration energy harvester, the enhancement of its power output by adding various values of end mass, as well as assessing the responsiveness towards white noise. Devices are fabricated using a 0.5 μm AlN on 10 μm doped Si process. Cantilevers with 5 mm length and 2 mm width were tested at either unloaded condition (MC0: f n 577 Hz) or subjected to estimated end masses of 2 mg (MC2: f n 129 Hz) and 5 mg (MC5: f n 80 Hz). While MC0 was able to tolerate a higher drive acceleration prior to saturation (7 g with 0.7 μW), MC5 exhibited higher peak power attainable at a lower input vibration (2.56 μW at 3 ms −2 ). MC5 was also subjected to band-limited (10 Hz to 2 kHz) white noise vibration, where the power response was only a fraction of its resonant counterpart for the same input: peak instantaneous power >1 μW was only attainable beyond 2 g of white noise, whereas single frequency resonant response only required 2.5 ms −2 . Both the first resonant response and the band-limited white noise response were also compared to a numerical model, showing close agreements

  14. Hydrogen Incorporation during Aluminium Anodisation on Silicon Wafer Surfaces

    International Nuclear Information System (INIS)

    Lu, Pei Hsuan Doris; Strutzberg, Hartmuth; Wenham, Stuart; Lennon, Alison

    2014-01-01

    Hydrogen can act to reduce recombination at silicon surfaces for solar cell devices and consequently the ability of dielectric layers to provide a source of hydrogen for this purpose is of interest. However, due to the ubiquitous nature of hydrogen and its mobility, direct measurements of hydrogen incorporation in dielectric layers are challenging. In this paper, we report the use of secondary ion mass spectrometry measurements to show that deuterium from an electrolyte can be incorporated in an anodic aluminium oxide (AAO) layer and be introduced into an underlying amorphous silicon layer during anodisation of aluminium on silicon wafers. After annealing at 400 °C, the concentration of deuterium in the AAO was reduced by a factor of two, as the deuterium was re-distributed to the interface between the amorphous silicon and AAO and to the amorphous silicon. The assumption that hydrogen, from an aqueous electrolyte, could be similarly incorporated in AAO, is supported by the observation that the hydrogen content in the underlying amorphous silicon was increased by a factor of ∼ 3 after anodisation. Evidence for hydrogen being introduced into crystalline silicon after aluminium anodisation was provided by electrochemical capacitance voltage measurements indicating boron electrical deactivation in the underlying crystalline silicon. If introduced hydrogen can electrically deactivate dopant atoms at the surface, then it is reasonable to assume that it could also deactivate recombination-active states at the crystalline silicon interface therefore enabling higher minority carrier lifetimes in the silicon wafer

  15. Reprogramming hMSCs morphology with silicon/porous silicon geometric micro-patterns.

    Science.gov (United States)

    Ynsa, M D; Dang, Z Y; Manso-Silvan, M; Song, J; Azimi, S; Wu, J F; Liang, H D; Torres-Costa, V; Punzon-Quijorna, E; Breese, M B H; Garcia-Ruiz, J P

    2014-04-01

    Geometric micro-patterned surfaces of silicon combined with porous silicon (Si/PSi) have been manufactured to study the behaviour of human Mesenchymal Stem Cells (hMSCs). These micro-patterns consist of regular silicon hexagons surrounded by spaced columns of silicon equilateral triangles separated by PSi. The results show that, at an early culture stage, the hMSCs resemble quiescent cells on the central hexagons with centered nuclei and actin/β-catenin and a microtubules network denoting cell adhesion. After 2 days, hMSCs adapted their morphology and cytoskeleton proteins from cell-cell dominant interactions at the center of the hexagonal surface. This was followed by an intermediate zone with some external actin fibres/β-catenin interactions and an outer zone where the dominant interactions are cell-silicon. Cells move into silicon columns to divide, migrate and communicate. Furthermore, results show that Runx2 and vitamin D receptors, both specific transcription factors for skeleton-derived cells, are expressed in cells grown on micropatterned silicon under all observed circumstances. On the other hand, non-phenotypic alterations are under cell growth and migration on Si/PSi substrates. The former consideration strongly supports the use of micro-patterned silicon surfaces to address pending questions about the mechanisms of human bone biogenesis/pathogenesis and the study of bone scaffolds.

  16. Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

    Energy Technology Data Exchange (ETDEWEB)

    Balpande, Suresh S., E-mail: balpandes@rknec.edu [Ph.D.. Scholar, Department of Electronics Engineering Shri Ramdeobaba College of Engineering & Management, Nagpur-13, (M.S.) (India); Pande, Rajesh S. [Professor, Department of Electronics Engineering Shri Ramdeobaba College of Engineering & Management, Nagpur-13, (M.S.) (India)

    2016-04-13

    Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition to this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of

  17. Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

    Science.gov (United States)

    Balpande, Suresh S.; Pande, Rajesh S.

    2016-04-01

    Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition to this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of harvester and

  18. Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

    International Nuclear Information System (INIS)

    Balpande, Suresh S.; Pande, Rajesh S.

    2016-01-01

    Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition to this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of

  19. Chiral silicon nanostructures

    International Nuclear Information System (INIS)

    Schubert, E.; Fahlteich, J.; Hoeche, Th.; Wagner, G.; Rauschenbach, B.

    2006-01-01

    Glancing angle ion beam assisted deposition is used for the growth of amorphous silicon nanospirals onto [0 0 1] silicon substrates in a temperature range from room temperature to 475 deg. C. The nanostructures are post-growth annealed in an argon atmosphere at various temperatures ranging from 400 deg. C to 800 deg. C. Recrystallization of silicon within the persisting nanospiral configuration is demonstrated for annealing temperatures above 800 deg. C. Transmission electron microscopy and Raman spectroscopy are used to characterize the silicon samples prior and after temperature treatment

  20. Silicon web process development

    Science.gov (United States)

    Duncan, C. S.; Seidensticker, R. G.; Mchugh, J. P.; Skutch, M. E.; Driggers, J. M.; Hopkins, R. H.

    1981-01-01

    The silicon web process takes advantage of natural crystallographic stabilizing forces to grow long, thin single crystal ribbons directly from liquid silicon. The ribbon, or web, is formed by the solidification of a liquid film supported by surface tension between two silicon filaments, called dendrites, which border the edges of the growing strip. The ribbon can be propagated indefinitely by replenishing the liquid silicon as it is transformed to crystal. The dendritic web process has several advantages for achieving low cost, high efficiency solar cells. These advantages are discussed.

  1. Factors affecting the energy resolution in alpha particle spectrometry with silicon diodes; Fatores que influenciam a resolucao em energia na espectrometria de particulas alfa com diodos de Si

    Energy Technology Data Exchange (ETDEWEB)

    Camargo, Fabio de. E-mail: f.camargo@bol.com.br

    2005-07-01

    In this work are presented the studies about the response of a multi-structure guard rings silicon diode for detection and spectrometry of alpha particles. This ion-implanted diode (Al/p{sup +}/n/n{sup +}/Al) was processed out of 300 {mu}m thick, n type substrate with a resistivity of 3 k{omega}{center_dot}cm and an active area of 4 mm{sup 2}. In order to use this diode as a detector, the bias voltage was applied on the n{sup +} side, the first guard ring was grounded and the electrical signals were readout from the p{sup +} side. These signals were directly sent to a tailor made preamplifier, based on the hybrid circuit A250 (Amptek), followed by a conventional nuclear electronic. The results obtained with this system for the direct detection of alpha particles from {sup 241}Am showed an excellent response stability with a high detection efficiency ({approx_equal} 100 %). The performance of this diode for alpha particle spectrometry was studied and it was prioritized the influence of the polarization voltage, the electronic noise, the temperature and the source-diode distance on the energy resolution. The results showed that the major contribution for the deterioration of this parameter is due to the diode dead layer thickness (1 {mu}m). However, even at room temperature, the energy resolution (FWHM = 18.8 keV) measured for the 5485.6 MeV alpha particles ({sup 241}Am) is comparable to those obtained with ordinary silicon barrier detectors frequently used for these particles spectrometry. (author)

  2. Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping

    Science.gov (United States)

    Van Toan, Nguyen; Inomata, Naoki; Trung, Nguyen Huu; Ono, Takahito

    2018-05-01

    This work describes the fabrication and evaluation of the Knudsen pump for on-chip vacuum pumping that works based on the principle of a thermal transpiration. Three AFM (atomic force microscope) cantilevers are integrated into small chambers with a size of 5 mm  ×  3 mm  ×  0.4 mm for the pump’s evaluation. Knudsen pump is fabricated using deep RIE (reactive ion etching), wet thermal oxidation and anodic bonding processes. The fabricated device is evaluated by monitoring the quality (Q) factor of the integrated cantilevers. The Q factor of the cantilever is increased from 300 -1150 in cases without and with a temperature difference approximately 25 °C between the top (the hot side at 40 °C) and bottom (the cold side at 15 °C) sides of the fabricated device, respectively. The evacuated chamber pressure of around 10 kPa is estimated from the Q factor of the integrated cantilevers.

  3. Flexible SiO2 cantilevers for torsional self-aligning micro scale four-point probes

    DEFF Research Database (Denmark)

    Kjær, Daniel; Gammelgaard, Lauge; Bøggild, Peter

    2007-01-01

    In order to successfully measure the conductivity of a sample with a four- point probe, good alignment of the electrodes to the sample is important to establish even contact pressure and contact areas of the electrodes. By incorporating a hinge in a microfabricated SiO2 mono- cantilever the ability...

  4. A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

    Directory of Open Access Journals (Sweden)

    Tobias Meier

    2015-02-01

    Full Text Available We describe an atomic force microscope (AFM for the characterization of self-sensing tunneling magnetoresistive (TMR cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm3 is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm3. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the deflection of the cantilevers independently. The instrument is based on a commercial AFM controller and capable to perform large-area scanning directly without stitching of images. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.

  5. Surface stress-induced change in overall elastic behavior and self-bending of ultrathin cantilever plates

    NARCIS (Netherlands)

    Sadeghian, H.; Goosen, J.F.L.; Bossche, A.; Van Keulen, F.

    2009-01-01

    In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption,

  6. Method of mechanical holding of cantilever chip for tip-scan high-speed atomic force microscope

    Energy Technology Data Exchange (ETDEWEB)

    Fukuda, Shingo [Department of Physics, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Uchihashi, Takayuki; Ando, Toshio [Department of Physics, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Bio-AFM Frontier Research Center, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Core Research for Evolutional Science and Technology of the Japan Science and Technology Agency, 7 Goban-cho, Chiyoda-ku, Tokyo 102-0076 (Japan)

    2015-06-15

    In tip-scan atomic force microscopy (AFM) that scans a cantilever chip in the three dimensions, the chip body is held on the Z-scanner with a holder. However, this holding is not easy for high-speed (HS) AFM because the holder that should have a small mass has to be able to clamp the cantilever chip firmly without deteriorating the Z-scanner’s fast performance, and because repeated exchange of cantilever chips should not damage the Z-scanner. This is one of the reasons that tip-scan HS-AFM has not been established, despite its advantages over sample stage-scan HS-AFM. Here, we present a novel method of cantilever chip holding which meets all conditions required for tip-scan HS-AFM. The superior performance of this novel chip holding mechanism is demonstrated by imaging of the α{sub 3}β{sub 3} subcomplex of F{sub 1}-ATPase in dynamic action at ∼7 frames/s.

  7. A longitudinal thermal actuation principle for mass detection using a resonant micro -cantilever in a fluid medium

    DEFF Research Database (Denmark)

    Grigorov, Alexander; Davis, Zachary James; Rasmussen, Peter

    2004-01-01

    We propose a new thermal actuation mechanical principle, which allows dynamic actuation in most media: air, water, etc. It is used to excite a cantilever, aiming to perform mass detection using resonance shifts, in place of the electrostatic or magnetic actuation that are normally used. It differs...... configuration, subject of investigation in the following paper. (C) 2004 Elsevier B.V. All rights reserved....

  8. Determination of Fluid Density and Viscosity by Analyzing Flexural Wave Propagations on the Vibrating Micro-Cantilever

    Directory of Open Access Journals (Sweden)

    Deokman Kim

    2017-10-01

    Full Text Available The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone, and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases.

  9. Robust energy harvesting from walking vibrations by means of nonlinear cantilever beams

    Science.gov (United States)

    Kluger, Jocelyn M.; Sapsis, Themistoklis P.; Slocum, Alexander H.

    2015-04-01

    In the present work we examine how mechanical nonlinearity can be appropriately utilized to achieve strong robustness of performance in an energy harvesting setting. More specifically, for energy harvesting applications, a great challenge is the uncertain character of the excitation. The combination of this uncertainty with the narrow range of good performance for linear oscillators creates the need for more robust designs that adapt to a wider range of excitation signals. A typical application of this kind is energy harvesting from walking vibrations. Depending on the particular characteristics of the person that walks as well as on the pace of walking, the excitation signal obtains completely different forms. In the present work we study a nonlinear spring mechanism that is composed of a cantilever wrapping around a curved surface as it deflects. While for the free cantilever, the force acting on the free tip depends linearly on the tip displacement, the utilization of a contact surface with the appropriate distribution of curvature leads to essentially nonlinear dependence between the tip displacement and the acting force. The studied nonlinear mechanism has favorable mechanical properties such as low frictional losses, minimal moving parts, and a rugged design that can withstand excessive loads. Through numerical simulations we illustrate that by utilizing this essentially nonlinear element in a 2 degrees-of-freedom (DOF) system, we obtain strongly nonlinear energy transfers between the modes of the system. We illustrate that this nonlinear behavior is associated with strong robustness over three radically different excitation signals that correspond to different walking paces. To validate the strong robustness properties of the 2DOF nonlinear system, we perform a direct parameter optimization for 1DOF and 2DOF linear systems as well as for a class of 1DOF and 2DOF systems with nonlinear springs similar to that of the cubic spring that are physically realized

  10. Frequency and deflection analysis of cenosphere/glass fiber interply hybrid composite cantilever beam

    Science.gov (United States)

    Bharath, J.; Joladarashi, Sharnappa; Biradar, Srikumar; Kumar, P. Naveen

    2018-04-01

    Interply hybrid laminates contain plies made of two or more different composite systems. Hybrid composites have unique features that can be used to meet specified design requirements in a more cost-effective way than nonhybrid composites. They offer many advantages over conventional composites including balanced strength and stiffness, enhanced bending and membrane mechanical properties, balanced thermal distortion stability, improved fatigue/impact resistance, improved fracture toughness and crack arresting properties, reduced weight and cost. In this paper an interply hybrid laminate composite containing Cenosphere reinforced polymer composite core and glass fiber reinforced polymer composite skin is analysied and effect of volume fraction of filler on frequency and load v/s deflection of hybrid composite are studied. Cenosphere reinforced polymer composite has increased specific strength, specific stiffness, specific density, savings in cost and weight. Glass fiber reinforced polymer composite has higher torsional rigidity when compared to metals. These laminate composites are fabricated to meet several structural applications and hence there is a need to study their vibration and deflection properties. Experimental investigation starts with fabrication of interply hybrid composite with cores of cenosphere reinforced epoxy composite volume fractions of CE 15, CE 25, CE15_UC as per ASTM E756-05C, and glasss fiber reinforced epoxy skin, cast product of required dimension by selecting glass fibre of proper thickness which is currently 0.25mm E-glass bidirectional woven glass fabric having density 2500kg/m3, in standard from cast parts of size 230mmX230mmX5mm in an Aluminum mould. Modal analysis of cantilever beam is performed to study the variation of natural frequency with strain gauge and the commercially available Lab-VIEW software and deflection in each of the cases by optical Laser Displacement Measurement Sensor to perform Load versus Deflection Analysis

  11. Periodically poled silicon

    Science.gov (United States)

    Hon, Nick K.; Tsia, Kevin K.; Solli, Daniel R.; Khurgin, Jacob B.; Jalali, Bahram

    2010-02-01

    Bulk centrosymmetric silicon lacks second-order optical nonlinearity χ(2) - a foundational component of nonlinear optics. Here, we propose a new class of photonic device which enables χ(2) as well as quasi-phase matching based on periodic stress fields in silicon - periodically-poled silicon (PePSi). This concept adds the periodic poling capability to silicon photonics, and allows the excellent crystal quality and advanced manufacturing capabilities of silicon to be harnessed for devices based on χ(2)) effects. The concept can also be simply achieved by having periodic arrangement of stressed thin films along a silicon waveguide. As an example of the utility, we present simulations showing that mid-wave infrared radiation can be efficiently generated through difference frequency generation from near-infrared with a conversion efficiency of 50% based on χ(2) values measurements for strained silicon reported in the literature [Jacobson et al. Nature 441, 199 (2006)]. The use of PePSi for frequency conversion can also be extended to terahertz generation. With integrated piezoelectric material, dynamically control of χ(2)nonlinearity in PePSi waveguide may also be achieved. The successful realization of PePSi based devices depends on the strength of the stress induced χ(2) in silicon. Presently, there exists a significant discrepancy in the literature between the theoretical and experimentally measured values. We present a simple theoretical model that produces result consistent with prior theoretical works and use this model to identify possible reasons for this discrepancy.

  12. Nonlinear silicon photonics

    Science.gov (United States)

    Tsia, Kevin K.; Jalali, Bahram

    2010-05-01

    An intriguing optical property of silicon is that it exhibits a large third-order optical nonlinearity, with orders-ofmagnitude larger than that of silica glass in the telecommunication band. This allows efficient nonlinear optical interaction at relatively low power levels in a small footprint. Indeed, we have witnessed a stunning progress in harnessing the Raman and Kerr effects in silicon as the mechanisms for enabling chip-scale optical amplification, lasing, and wavelength conversion - functions that until recently were perceived to be beyond the reach of silicon. With all the continuous efforts developing novel techniques, nonlinear silicon photonics is expected to be able to reach even beyond the prior achievements. Instead of providing a comprehensive overview of this field, this manuscript highlights a number of new branches of nonlinear silicon photonics, which have not been fully recognized in the past. In particular, they are two-photon photovoltaic effect, mid-wave infrared (MWIR) silicon photonics, broadband Raman effects, inverse Raman scattering, and periodically-poled silicon (PePSi). These novel effects and techniques could create a new paradigm for silicon photonics and extend its utility beyond the traditionally anticipated applications.

  13. Nonlinear silicon photonics

    Science.gov (United States)

    Borghi, M.; Castellan, C.; Signorini, S.; Trenti, A.; Pavesi, L.

    2017-09-01

    Silicon photonics is a technology based on fabricating integrated optical circuits by using the same paradigms as the dominant electronics industry. After twenty years of fervid development, silicon photonics is entering the market with low cost, high performance and mass-manufacturable optical devices. Until now, most silicon photonic devices have been based on linear optical effects, despite the many phenomenologies associated with nonlinear optics in both bulk materials and integrated waveguides. Silicon and silicon-based materials have strong optical nonlinearities which are enhanced in integrated devices by the small cross-section of the high-index contrast silicon waveguides or photonic crystals. Here the photons are made to strongly interact with the medium where they propagate. This is the central argument of nonlinear silicon photonics. It is the aim of this review to describe the state-of-the-art in the field. Starting from the basic nonlinearities in a silicon waveguide or in optical resonator geometries, many phenomena and applications are described—including frequency generation, frequency conversion, frequency-comb generation, supercontinuum generation, soliton formation, temporal imaging and time lensing, Raman lasing, and comb spectroscopy. Emerging quantum photonics applications, such as entangled photon sources, heralded single-photon sources and integrated quantum photonic circuits are also addressed at the end of this review.

  14. Core barrel motion calibration factor calculation

    International Nuclear Information System (INIS)

    Shahrokhi, F.; Robinson, J.C.

    1976-01-01

    Neutron transport theory calculations were performed to obtain a calibration factor for inferring core-barrel motion from spectral density data using excore ionization chambers in PWRs. The analysis of core-barrel movement was based on the postulate that the movement is a cantilevered type, with the preferred direction x-x'

  15. Silicon germanium mask for deep silicon etching

    KAUST Repository

    Serry, Mohamed

    2014-07-29

    Polycrystalline silicon germanium (SiGe) can offer excellent etch selectivity to silicon during cryogenic deep reactive ion etching in an SF.sub.6/O.sub.2 plasma. Etch selectivity of over 800:1 (Si:SiGe) may be achieved at etch temperatures from -80 degrees Celsius to -140 degrees Celsius. High aspect ratio structures with high resolution may be patterned into Si substrates using SiGe as a hard mask layer for construction of microelectromechanical systems (MEMS) devices and semiconductor devices.

  16. Silicon germanium mask for deep silicon etching

    KAUST Repository

    Serry, Mohamed; Rubin, Andrew; Refaat, Mohamed; Sedky, Sherif; Abdo, Mohammad

    2014-01-01

    Polycrystalline silicon germanium (SiGe) can offer excellent etch selectivity to silicon during cryogenic deep reactive ion etching in an SF.sub.6/O.sub.2 plasma. Etch selectivity of over 800:1 (Si:SiGe) may be achieved at etch temperatures from -80 degrees Celsius to -140 degrees Celsius. High aspect ratio structures with high resolution may be patterned into Si substrates using SiGe as a hard mask layer for construction of microelectromechanical systems (MEMS) devices and semiconductor devices.

  17. On the dynamics of tapered vibro-impacting cantilever with tip mass

    Energy Technology Data Exchange (ETDEWEB)

    Gandhi, P. S.; Vyas, Vishal [Suman Mashruwala Advanced Microengineering Laboratory, Dept. of Mechanical Engineering, Indian Institute of Technology - Bombay, Mumai (India)

    2017-01-15

    This paper explores nonlinear dynamic behavior of vibro-impacting tapered cantilever with tip mass with regard to frequency response analysis. A typical frequency response curve of vibro-impacting beams displays well-known resonance frequency shift along with a hysteric jump and drop phenomena. We did a comprehensive parametric analysis capturing the effects of taper, tip-mass, stop location, and gap on the non-smooth frequency response. Analysis is presented in a non-dimensional form useful for other similar cases. Simulation results are further validated with corresponding experimental results for a few cases. Illustrative comparison of simulation results for varying parameters brings out several interesting aspects of variation in the nonlinear behavior.

  18. Modeling and analysis of Galfenol cantilever vibration energy harvester with nonlinear magnetic force

    Science.gov (United States)

    Cao, Shuying; Sun, Shuaishuai; Zheng, Jiaju; Wang, Bowen; Wan, Lili; Pan, Ruzheng; Zhao, Ran; Zhang, Changgeng

    2018-05-01

    Galfenol traditional cantilever energy harvesters (TCEHs) have bigger electrical output only at resonance and exhibit nonlinear mechanical-magnetic-electric coupled (NMMEC) behaviors. To increase low-frequency broadband performances of a TCEH, an improved CEH (ICEH) with magnetic repulsive force is studied. Based on the magnetic dipole model, the nonlinear model of material, the Faraday law and the dynamic principle, a lumped parameter NMMEC model of the devices is established. Comparisons between the calculated and measured results show that the proposed model can provide reasonable data trends of TCEH under acceleration, bias field and different loads. Simulated results show that ICEH exhibits low-frequency resonant, hard spring and bistable behaviors, thus can harvest more low-frequency broadband vibration energy than TCEH, and can elicit snap-through and generate higher voltage even under weak noise. The proposed structure and model are useful for improving performances of the devices.

  19. Parametric Study of Cantilever Plates Exposed to Supersonic and Hypersonic Flows

    Science.gov (United States)

    Sri Harsha, A.; Rizwan, M.; Kuldeep, S.; Giridhara Prasad, A.; Akhil, J.; Nagaraja, S. R.

    2017-08-01

    Analysis of hypersonic flows associated with re-entry vehicles has gained a lot of significance due to the advancements in Aerospace Engineering. An area that is studied extensively by researchers is the simultaneous reduction aerodynamic drag and aero heating in re-entry vehicles. Out of the many strategies being studied, the use of aerospikes at the stagnation point of the vehicle is found to give favourable results. The structural stability of the aerospike becomes important as it is exposed to very high pressures and temperatures. Keeping this in view, the deflection and vibration of an inclined cantilever plate in hypersonic flow is carried out using ANSYS. Steady state pressure distribution obtained from Fluent is applied as load to the transient structural module for analysis. After due validation of the methods, the effects of parameters like flow Mach number, plate inclination and plate thickness on the deflection and vibration are studied.

  20. Broadband characteristics of vibration energy harvesting using one-dimensional phononic piezoelectric cantilever beams

    International Nuclear Information System (INIS)

    Chen Zhongsheng; Yang Yongmin; Lu Zhimiao; Luo Yanting

    2013-01-01

    Nowadays broadband vibration energy harvesting using piezoelectric effect has become a research hotspot. The innovation in this paper is the widening of the resonant bandwidth of a piezoelectric harvester based on phononic band gaps, which is called one-dimensional phononic piezoelectric cantilever beams (PPCBs). Broadband characteristics of one-dimensional PPCBs are analyzed deeply and the vibration band gap can be calculated. The effects of different parameters on the vibration band gap are presented by both numerical and finite element simulations. Finally experimental tests are conducted to validate the proposed method. It can be concluded that it is feasible to use the PPCB for broadband vibration energy harvesting and there should be a compromise among related parameters for low-frequency vibrations.

  1. Micro-cantilevers for non-destructive characterization of nanograss uniformity

    DEFF Research Database (Denmark)

    Petersen, Dirch Hjorth; Wang, Fei; Olesen, Mikkel Buster

    2011-01-01

    We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance...... measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability...... of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy....

  2. Resonant magnetoelectric response of cantilevers with magnetostrictive and piezoelectric layers on opposite sides of the substrate

    Directory of Open Access Journals (Sweden)

    Matthias C. Krantz

    2013-06-01

    Full Text Available A theory is derived for the bending-mode magnetoelectric coefficients at resonance for magnetostrictive and piezoelectric layers on opposite sides of a substrate. Results are given for the transverse ME coefficient in the Metglas-Si-AlN system with magnetic field excitation parallel and electric polarization perpendicular to the cantilever. The center-substrate layer sequence is found to produce about 50 % enhancement of the magnetoelectric effect compared to magnetoelectric bilayers on one side of a substrate. Up to about 10 % additional enhancement of the ME effect is predicted if the magnetostrictive and piezoelectric layers are separated from the substrate by spacer layers with lower Youngs modulus. Lowest order bending mode resonance frequencies are given.

  3. Vibration suppression of a rotating flexible cantilever pipe conveying fluid using piezoelectric layers

    Directory of Open Access Journals (Sweden)

    S. Khajehpour

    Full Text Available AbstractIn this study, the governing equations of a rotating cantilever pipe conveying fluid are derived and the longitudinal and lateral induced vibrations are controlled. The pipe considered as an Euler Bernoulli beam with tip mass which piezoelectric layers attached both side of it as sensors and actuators. The follower force due to the fluid discharge causes both conservative and non-conservative work. For mathematical modeling, the Lagrange-Rayleigh-Ritz technique is utilized. An adaptive-robust control scheme is applied to suppress the vibration of the pipe. The adaptive-robust control method is robust against parameter uncertainties and disturbances. Finally, the system is simulated and the effects of varying parameters are studied. The simulation results show the excellent performance of the controller.

  4. Broadband characteristics of vibration energy harvesting using one-dimensional phononic piezoelectric cantilever beams

    Energy Technology Data Exchange (ETDEWEB)

    Chen Zhongsheng, E-mail: czs_study@sina.com [Key Laboratory of Science and Technology on Integrated Logistics Support, College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha, Hunan 410073 (China); Yang Yongmin; Lu Zhimiao; Luo Yanting [Key Laboratory of Science and Technology on Integrated Logistics Support, College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha, Hunan 410073 (China)

    2013-02-01

    Nowadays broadband vibration energy harvesting using piezoelectric effect has become a research hotspot. The innovation in this paper is the widening of the resonant bandwidth of a piezoelectric harvester based on phononic band gaps, which is called one-dimensional phononic piezoelectric cantilever beams (PPCBs). Broadband characteristics of one-dimensional PPCBs are analyzed deeply and the vibration band gap can be calculated. The effects of different parameters on the vibration band gap are presented by both numerical and finite element simulations. Finally experimental tests are conducted to validate the proposed method. It can be concluded that it is feasible to use the PPCB for broadband vibration energy harvesting and there should be a compromise among related parameters for low-frequency vibrations.

  5. Improving Performance of Cantilevered Momentum Wheel Assemblies by Soft Suspension Support

    Directory of Open Access Journals (Sweden)

    Weiyong Zhou

    2013-01-01

    Full Text Available This paper focuses on improving the performance of the rigid support cantilevered momentum wheel assemblies (CMWA by soft suspension support. A CMWA, supported by two angular contact ball bearings, was modeled as a Jeffcott rotor. The support stiffness, before and after in series with a linear soft suspension support, were simplified as two Duffing's type springs respectively. The result shows that the rigid support CMWA produces large disturbance force at the resonance speed range. The soft suspension CMWA can effectively reduce the force on the bearing (also disturbance forces produced by the CMWA at high rotational speed, and also reduce the nonlinear characteristic of the stiffness. However, the instability of the soft suspension CMWA will limit the maximum rotational speed of the CMWA. Thus, a "proper" stiffness of the soft suspension system is a trade-off strategy between reduction of the force and extension of the speed range simultaneously.

  6. Adaptation of the IBM ECR [electric cantilever robot] robot to plutonium processing applications

    International Nuclear Information System (INIS)

    Armantrout, G.A.; Pedrotti, L.R.; Halter, E.A.; Crossfield, M.

    1990-12-01

    The changing regulatory climate in the US is adding increasing incentive to reduce operator dose and TRU waste for DOE plutonium processing operations. To help achieve that goal the authors have begun adapting a small commercial overhead gantry robot, the IBM electric cantilever robot (ECR), to plutonium processing applications. Steps are being taken to harden this robot to withstand the dry, often abrasive, environment within a plutonium glove box and to protect the electronic components against alpha radiation. A mock-up processing system for the reduction of the oxide to a metal was prepared and successfully demonstrated. Design of a working prototype is now underway using the results of this mock-up study. 7 figs., 4 tabs

  7. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    International Nuclear Information System (INIS)

    Joyce, Bryan S; Tarazaga, Pablo A

    2014-01-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity. (papers)

  8. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    Science.gov (United States)

    Joyce, Bryan S.; Tarazaga, Pablo A.

    2014-07-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity.

  9. Free Vibrations of a Cantilevered SWCNT with Distributed Mass in the Presence of Nonlocal Effect

    Directory of Open Access Journals (Sweden)

    M. A. De Rosa

    2015-01-01

    Full Text Available The Hamilton principle is applied to deduce the free vibration frequencies of a cantilever single-walled carbon nanotube (SWCNT in the presence of an added mass, which can be distributed along an arbitrary part of the span. The nonlocal elasticity theory by Eringen has been employed, in order to take into account the nanoscale effects. An exact formulation leads to the equations of motion, which can be solved to give the frequencies and the corresponding vibration modes. Moreover, two approximate semianalytical methods are also illustrated, which can provide quick parametric relationships. From a more practical point of view, the problem of detecting the mass of the attached particle has been solved by calculating the relative frequency shift due to the presence of the added mass: from it, the mass value can be easily deduced. The paper ends with some numerical examples, in which the nonlocal effects are thoroughly investigated.

  10. Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers

    DEFF Research Database (Denmark)

    Keller, Stephan Urs; Häfliger, Daniel; Boisen, Anja

    2008-01-01

    during fluorocarbon deposition, the surface free energy of the coating can be tuned to allow for uniform wetting during spin coating of arbitrary thin SU-8 films. Further, they define an optimal pressure regime for the release of thin polymer structures at high yield. They demonstrate the successful......Plasma-deposited fluorocarbon coatings are introduced as a convenient method for the dry release of polymer structures. In this method, the passivation process in a deep reactive ion etch reactor was used to deposit hydrophobic fluorocarbon films. Standard photolithography with the negative epoxy......-based photoresist SU-8 was used to fabricate polymer structures such as cantilevers and membranes on top of the nonadhesive release layer. The authors identify the plasma density as the main parameter determining the surface properties of the deposited fluorocarbon films. They show that by modifying the pressure...

  11. Pull-in behavior analysis of vibrating functionally graded micro-cantilevers under suddenly DC voltage

    Directory of Open Access Journals (Sweden)

    Jamal Zare

    2015-01-01

    Full Text Available The present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step DC voltage while the fringing-field effect is taken into account in the vibrational equation of motion. By employing modern asymptotic approach namely Homotopy Perturbation Method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the influences of material properties and actuation voltage on dynamic pull-in behavior are investigated. It is demonstrated that the auxiliary term in the homotopy perturbation method is extremely effective for higher order approximation and two terms in series expansions are sufficient to produce an acceptable solution. The strength of this analytical procedure is verified through comparison with numerical results.

  12. Two-dimensional dopant profiling by electrostatic force microscopy using carbon nanotube modified cantilevers

    International Nuclear Information System (INIS)

    Chin, S.-C.; Chang, Y.-C.; Chang, C.-S.; Tsong, T T; Hsu, Chen-Chih; Wu, Chih-I; Lin, W-H; Woon, W-Y; Lin, L-T; Tao, H-J

    2008-01-01

    A two-dimensional (2D) dopant profiling technique is demonstrated in this work. We apply a unique cantilever probe in electrostatic force microscopy (EFM) modified by the attachment of a multiwalled carbon nanotube (MWNT). Furthermore, the tip apex of the MWNT was trimmed to the sharpness of a single-walled carbon nanotube (SWNT). This ultra-sharp MWNT tip helps us to resolve dopant features to within 10 nm in air, which approaches the resolution achieved by ultra-high vacuum scanning tunnelling microscopy (UHV STM). In this study, the CNT-probed EFM is used to profile 2D buried dopant distribution under a nano-scale device structure and shows the feasibility of device characterization for sub-45 nm complementary metal-oxide-semiconductor (CMOS) field-effect transistors

  13. Vibration based algorithm for crack detection in cantilever beam containing two different types of cracks

    Science.gov (United States)

    Behzad, Mehdi; Ghadami, Amin; Maghsoodi, Ameneh; Michael Hale, Jack

    2013-11-01

    In this paper, a simple method for detection of multiple edge cracks in Euler-Bernoulli beams having two different types of cracks is presented based on energy equations. Each crack is modeled as a massless rotational spring using Linear Elastic Fracture Mechanics (LEFM) theory, and a relationship among natural frequencies, crack locations and stiffness of equivalent springs is demonstrated. In the procedure, for detection of m cracks in a beam, 3m equations and natural frequencies of healthy and cracked beam in two different directions are needed as input to the algorithm. The main accomplishment of the presented algorithm is the capability to detect the location, severity and type of each crack in a multi-cracked beam. Concise and simple calculations along with accuracy are other advantages of this method. A number of numerical examples for cantilever beams including one and two cracks are presented to validate the method.

  14. Bidirectional frequency tuning of a piezoelectric energy converter based on a cantilever beam

    International Nuclear Information System (INIS)

    Eichhorn, C; Goldschmidtboeing, F; Woias, P

    2009-01-01

    A piezoelectric energy converter is presented, whose resonance frequency can be tuned by applying mechanical stress to its structure. The converter consists of a piezo-polymer cantilever beam with two additional thin arms, which are used to apply an axial preload to the tip of the beam. The compressive or tensile prestress applied through the arms leads to a shift of the beam's resonance frequency. Experiments with this structure indicate a high potential: the resonance frequency of a harvester to which a compressive preload was applied could be altered from 380 Hz to 292 Hz. In another experiment, a harvester with stiffened arms was tuned from 440 Hz to 460 Hz by applying a tensile preload. In combination with automatic control of the applied force, this type of structure could be used to enhance the performance of energy harvesters in vibrating environments with occasional shifts of the vibrational frequency

  15. Ion beam figuring of silicon aspheres

    Science.gov (United States)

    Demmler, Marcel; Zeuner, Michael; Luca, Alfonz; Dunger, Thoralf; Rost, Dirk; Kiontke, Sven; Krüger, Marcus

    2011-03-01

    Silicon lenses are widely used for infrared applications. Especially for portable devices the size and weight of the optical system are very important factors. The use of aspherical silicon lenses instead of spherical silicon lenses results in a significant reduction of weight and size. The manufacture of silicon lenses is more challenging than the manufacture of standard glass lenses. Typically conventional methods like diamond turning, grinding and polishing are used. However, due to the high hardness of silicon, diamond turning is very difficult and requires a lot of experience. To achieve surfaces of a high quality a polishing step is mandatory within the manufacturing process. Nevertheless, the required surface form accuracy cannot be achieved through the use of conventional polishing methods because of the unpredictable behavior of the polishing tools, which leads to an unstable removal rate. To overcome these disadvantages a method called Ion Beam Figuring can be used to manufacture silicon lenses with high surface form accuracies. The general advantage of the Ion Beam Figuring technology is a contactless polishing process without any aging effects of the tool. Due to this an excellent stability of the removal rate without any mechanical surface damage is achieved. The related physical process - called sputtering - can be applied to any material and is therefore also applicable to materials of high hardness like Silicon (SiC, WC). The process is realized through the commercially available ion beam figuring system IonScan 3D. During the process, the substrate is moved in front of a focused broad ion beam. The local milling rate is controlled via a modulated velocity profile, which is calculated specifically for each surface topology in order to mill the material at the associated positions to the target geometry. The authors will present aspherical silicon lenses with very high surface form accuracies compared to conventionally manufactured lenses.

  16. The Role of Geometrically Necessary Dislocations in Cantilever Beam Bending Experiments of Single Crystals

    Directory of Open Access Journals (Sweden)

    Edgar Husser

    2017-03-01

    Full Text Available The mechanical behavior of single crystalline, micro-sized copper is investigated in the context of cantilever beam bending experiments. Particular focus is on the role of geometrically necessary dislocations (GNDs during bending-dominated load conditions and their impact on the characteristic bending size effect. Three different sample sizes are considered in this work with main variation in thickness. A gradient extended crystal plasticity model is presented and applied in a three-dimensional finite-element (FE framework considering slip system-based edge and screw components of the dislocation density vector. The underlying mathematical model contains non-standard evolution equations for GNDs, crystal-specific interaction relations, and higher-order boundary conditions. Moreover, two element formulations are examined and compared with respect to size-independent as well as size-dependent bending behavior. The first formulation is based on a linear interpolation of the displacement and the GND density field together with a full integration scheme whereas the second is based on a mixed interpolation scheme. While the GND density fields are treated equivalently, the displacement field is interpolated quadratically in combination with a reduced integration scheme. Computational results indicate that GND storage in small cantilever beams strongly influences the evolution of statistically stored dislocations (SSDs and, hence, the distribution of the total dislocation density. As a particular example, the mechanical bending behavior in the case of a physically motivated limitation of GND storage is studied. The resulting impact on the mechanical bending response as well as on the predicted size effect is analyzed. Obtained results are discussed and related to experimental findings from the literature.

  17. 3D Printing of Cantilever-Type Microstructures by Stereolithography of Ferromagnetic Photopolymers.

    Science.gov (United States)

    Credi, Caterina; Fiorese, Alessandro; Tironi, Marco; Bernasconi, Roberto; Magagnin, Luca; Levi, Marinella; Turri, Stefano

    2016-10-05

    In the present work, prototypes of polymeric cantilever-based magnetic microstructures were fabricated by means of stereolithography (SL). To this end, a UV-curable system suitable for high-resolution SL-processing was formulated by blending a bifunctional acrylic monomer with photoinitiator and visible dye whose content was tuned to tailor resin SL sensitivity. Subsequently, to confer ferromagnetic properties to the photopolymer, two different strategies were implemented. A two-step approach involved selective deposition of a metal layer on photopolymer SL-cured surfaces through an electroless plating process. On the other hand, SL-processable ferromagnetically responsive nanocomposites (FRCs) were obtained by directly loading magnetite nanoparticles within the photopolymer matrix. In order to achieve high-printing resolution, resin SL sensitivities were studied as a function of the various additives contents. Photocalorimetric analyses were also performed to investigate the photopolymer conversion efficiency upon light exposure. High-performing formulations were characterized by reduced penetration depth (printing of micrometric structures. Finally, the self-standing characteristics of the resin combined with the layered-fashion deposition typical of the 3D printing technologies were exploited for the fabrication of cantilever (CL)-based beams presented as possible magnetic sensors. As a demonstration of the feasibility of the two approaches, the magnetic beams were successfully actuated and their sensing performances in terms of static deflection vs applied magnetic field applied were qualitatively studied. Being not restricted to CL-based geometries, the combination of SL-printing with the formulation of novel smart photopolymers open the way toward the fabrication of high-customized complex 3D models integrating functional microstructures.

  18. Modelling and analysis of piezoelectric cantilever energy harvester for different proof mass and material proportion

    Science.gov (United States)

    Shashank, R.; Harisha, S. K., Dr; Abhishek, M. C.

    2018-02-01

    Energy harvesting using ambient energy sources is one of the fast growing trends in the world, research and development in the area of energy harvesting is moving progressively to get maximum power output from the existing resources. The ambient sources of energy available in the nature are solar energy, wind energy, thermal energy, vibrational energy etc. out of these methods energy harvesting by vibrational energy sources gain more importance due to its nature of not getting influenced by any environmental parameters and its free availability at anytime and anywhere. The project mainly deals with validating the values of voltage and electrical power output of experimentally conducted energy harvester, varying the parameters of the energy harvester and analyse the effect of the parameters on the performance of the energy harvester and compare the results. The cantilever beam was designed, analysed and simulated using COMSOL multi-physics software. The energy harvester gives an electrical output voltage of the 2.75 volts at a natural frequency of 37.2 Hz and an electrical power of 29μW. Decreasing the percentage of the piezoelectric material and simultaneously increasing the percentage of polymer material (so that total percentage of proportion remains same) increases the electrical voltage and decreases the natural frequency of the beam linearly upto 3.9V and 28.847 Hz till the percentage proportion of the beam was 24% piezoelectric beam and 76% polymer beam when the percentage proportion increased to 26% and 74% natural frequency goes on decreases further but voltage suddenly drops to 2.8V. The voltage generated by energy harvester increases proportionally and reaches 3.7V until weight of the proof mass reaches 4 grams and further increase in the weight of the proof mass decreases the voltage generated by energy harvester. Thus the investigation conveys that the weight of the proof mass and the length of the cantilever beam should be optimised to obtain maximum

  19. Nano-DTA and nano-DSC with cantilever-type calorimeter

    International Nuclear Information System (INIS)

    Nakabeppu, Osamu; Deno, Kohei

    2016-01-01

    Highlights: • Nanocalorimetry with original cantilever type calorimeters. • The calorimeters showed the enthalpy resolution of 200 nJ level. • Nano-DTA of a binary alloy captured a probabilistic peak after solidification. • Power compensation DSC of a microgram level sample was demonstrated. • The DSC and DTA behavior were explained with a lumped model. - Abstract: Differential thermal analysis (DTA) and differential scanning calorimetry (DSC) of the minute samples in the range of microgram to nanogram were studied using original cantilever-type calorimeters. The micro-fabricated calorimeter with a heater and thermal sensors was able to perform a fast temperature scan at above 1000 K/s and a high-resolution heat measurement. The DTA of minuscule metal samples demonstrated some advances such as the thermal analysis of a 20 ng level indium and observation of a strange phase transition of a binary alloy. The power compensation type DSC using a thermal feedback system was also performed. Thermal information of a microgram level sample was observed as splitting into the DSC and DTA signals because of a mismatch between the sample and the calorimeter. Although there remains some room for improvement in terms of the heat flow detection, the behavior of the compensation system in the DSC was theoretically understood through a lumped model. Those experiments also produced some findings, such as a fin effect with sample loading, a measurable weight range, a calibration of the calorimeter and a product design concept. The development of the nano-DTA and nano-DSC will enable breakthroughs for the fast calorimetry of the microscopic size samples.

  20. Characterization of the Young's modulus and residual stresses for a sputtered silicon oxynitride film using micro-structures

    International Nuclear Information System (INIS)

    Dong, Jian; Du, Ping; Zhang, Xin

    2013-01-01

    Silicon oxynitride (SiON) is an important material to fabricate micro-electro-mechanical system (MEMS) devices due to its composition-dependent tunability in electronic and mechanical properties. In this work, the SiON film with 41.45% silicon, 32.77% oxygen and 25.78% nitrogen content was deposited by RF magnetron sputtering. Two types of optimized micro-structures including micro-cantilevers and micro-rotating-fingers were designed and fabricated using MEMS surface micromachining technology. The micro-cantilever bending tests were conducted using a nanoindenter to characterize the Young's modulus of the SiON film. Owing to the elimination of the residual stress effect on the micro-cantilever structure, higher accuracy in the Young's modulus was achieved from this technique. With the information of Young's modulus of the film, the residual stresses were characterized from the deflection of the micro-rotating-fingers. This structure was able to locally measure a large range of tensile or compressive residual stresses in a thin film with sufficient sensitivities. The results showed that the Young's modulus of the SiON film was 122 GPa and the residual stresses of the SiON film were 327 MPa in the crystallographic orientation of the wafer and 334 MPa in the direction perpendicular to the crystallographic orientation, both in compression. This work presents a comprehensive methodology to measure the Young's modulus and residual stresses of a thin film with improved accuracy, which is promising for applications in mechanical characterization of MEMS devices. - Highlight: • We measured the Young's modulus and residual stress of SiON film by microstructure. • Micro cantilever structure improved the Young's modulus' measurement accuracy. • We explored the reason for the deviations of residual stress value of SiON film

  1. Porosity and thickness effect of porous silicon layer on photoluminescence spectra

    Science.gov (United States)

    Husairi, F. S.; Eswar, K. A.; Guliling, Muliyadi; Khusaimi, Z.; Rusop, M.; Abdullah, S.

    2018-05-01

    The porous silicon nanostructures was prepared by electrochemical etching of p-type silicon wafer. Porous silicon prepared by using different current density and fix etching time with assistance of halogen lamp. The physical structure of porous silicon measured by the parameters used which know as experimental factor. In this work, we select one of those factors to correlate which optical properties of porous silicon. We investigated the surface morphology by using Surface Profiler (SP) and photoluminescence using Photoluminescence (PL) spectrometer. Different physical characteristics of porous silicon produced when current density varied. Surface profiler used to measure the thickness of porous and the porosity calculated using mass different of silicon. Photoluminescence characteristics of porous silicon depend on their morphology because the size and distribution of pore its self will effect to their exciton energy level. At J=30 mA/cm2 the shorter wavelength produced and it followed the trend of porosity with current density applied.

  2. Process for making silicon

    Science.gov (United States)

    Levin, Harry (Inventor)

    1987-01-01

    A reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH.sub.4), is disclosed. The reactor apparatus (10) includes an elongated reactor body (32) having graphite or carbon walls which are heated to a temperature exceeding the melting temperature of silicon. The precursor gas enters the reactor body (32) through an efficiently cooled inlet tube assembly (22) and a relatively thin carbon or graphite septum (44). The septum (44), being in contact on one side with the cooled inlet (22) and the heated interior of the reactor (32) on the other side, provides a sharp temperature gradient for the precursor gas entering the reactor (32) and renders the operation of the inlet tube assembly (22) substantially free of clogging. The precursor gas flows in the reactor (32) in a substantially smooth, substantially axial manner. Liquid silicon formed in the initial stages of the thermal reaction reacts with the graphite or carbon walls to provide a silicon carbide coating on the walls. The silicon carbide coated reactor is highly adapted for prolonged use for production of highly pure solar grade silicon. Liquid silicon (20) produced in the reactor apparatus (10) may be used directly in a Czochralski or other crystal shaping equipment.

  3. Hydrogen in amorphous silicon

    International Nuclear Information System (INIS)

    Peercy, P.S.

    1980-01-01

    The structural aspects of amorphous silicon and the role of hydrogen in this structure are reviewed with emphasis on ion implantation studies. In amorphous silicon produced by Si ion implantation of crystalline silicon, the material reconstructs into a metastable amorphous structure which has optical and electrical properties qualitatively similar to the corresponding properties in high-purity evaporated amorphous silicon. Hydrogen studies further indicate that these structures will accomodate less than or equal to 5 at.% hydrogen and this hydrogen is bonded predominantly in a monohydride (SiH 1 ) site. Larger hydrogen concentrations than this can be achieved under certain conditions, but the excess hydrogen may be attributed to defects and voids in the material. Similarly, glow discharge or sputter deposited amorphous silicon has more desirable electrical and optical properties when the material is prepared with low hydrogen concentration and monohydride bonding. Results of structural studies and hydrogen incorporation in amorphous silicon were discussed relative to the different models proposed for amorphous silicon

  4. Transformational silicon electronics

    KAUST Repository

    Rojas, Jhonathan Prieto

    2014-02-25

    In today\\'s traditional electronics such as in computers or in mobile phones, billions of high-performance, ultra-low-power devices are neatly integrated in extremely compact areas on rigid and brittle but low-cost bulk monocrystalline silicon (100) wafers. Ninety percent of global electronics are made up of silicon. Therefore, we have developed a generic low-cost regenerative batch fabrication process to transform such wafers full of devices into thin (5 μm), mechanically flexible, optically semitransparent silicon fabric with devices, then recycling the remaining wafer to generate multiple silicon fabric with chips and devices, ensuring low-cost and optimal utilization of the whole substrate. We show monocrystalline, amorphous, and polycrystalline silicon and silicon dioxide fabric, all from low-cost bulk silicon (100) wafers with the semiconductor industry\\'s most advanced high-κ/metal gate stack based high-performance, ultra-low-power capacitors, field effect transistors, energy harvesters, and storage to emphasize the effectiveness and versatility of this process to transform traditional electronics into flexible and semitransparent ones for multipurpose applications. © 2014 American Chemical Society.

  5. Silicon micromachined vibrating gyroscopes

    Science.gov (United States)

    Voss, Ralf

    1997-09-01

    This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

  6. Porous silicon gettering

    Energy Technology Data Exchange (ETDEWEB)

    Tsuo, Y.S.; Menna, P.; Pitts, J.R. [National Renewable Energy Lab., Golden, CO (United States)] [and others

    1996-05-01

    The authors have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. They found that a high density of photons during annealing enhanced the impurity diffusion to the gettering sites. The authors used metallurgical-grade Si (MG-Si) prepared by directional solidification casing as the starting material. They propose to use porous-silicon-gettered MG-Si as a low-cost epitaxial substrate for polycrystalline silicon thin-film growth.

  7. Silicon etch process

    International Nuclear Information System (INIS)

    Day, D.J.; White, J.C.

    1984-01-01

    A silicon etch process wherein an area of silicon crystal surface is passivated by radiation damage and non-planar structure produced by subsequent anisotropic etching. The surface may be passivated by exposure to an energetic particle flux - for example an ion beam from an arsenic, boron, phosphorus, silicon or hydrogen source, or an electron beam. Radiation damage may be used for pattern definition and/or as an etch stop. Ethylenediamine pyrocatechol or aqueous potassium hydroxide anisotropic etchants may be used. The radiation damage may be removed after etching by thermal annealing. (author)

  8. Silicon integrated circuit process

    International Nuclear Information System (INIS)

    Lee, Jong Duck

    1985-12-01

    This book introduces the process of silicon integrated circuit. It is composed of seven parts, which are oxidation process, diffusion process, ion implantation process such as ion implantation equipment, damage, annealing and influence on manufacture of integrated circuit and device, chemical vapor deposition process like silicon Epitaxy LPCVD and PECVD, photolithography process, including a sensitizer, spin, harden bake, reflection of light and problems related process, infrared light bake, wet-etch, dry etch, special etch and problems of etching, metal process like metal process like metal-silicon connection, aluminum process, credibility of aluminum and test process.

  9. Silicon integrated circuit process

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Jong Duck

    1985-12-15

    This book introduces the process of silicon integrated circuit. It is composed of seven parts, which are oxidation process, diffusion process, ion implantation process such as ion implantation equipment, damage, annealing and influence on manufacture of integrated circuit and device, chemical vapor deposition process like silicon Epitaxy LPCVD and PECVD, photolithography process, including a sensitizer, spin, harden bake, reflection of light and problems related process, infrared light bake, wet-etch, dry etch, special etch and problems of etching, metal process like metal process like metal-silicon connection, aluminum process, credibility of aluminum and test process.

  10. Silicon nanowire hybrid photovoltaics

    KAUST Repository

    Garnett, Erik C.; Peters, Craig; Brongersma, Mark; Cui, Yi; McGehee, Mike

    2010-01-01

    Silicon nanowire Schottky junction solar cells have been fabricated using n-type silicon nanowire arrays and a spin-coated conductive polymer (PEDOT). The polymer Schottky junction cells show superior surface passivation and open-circuit voltages compared to standard diffused junction cells with native oxide surfaces. External quantum efficiencies up to 88% were measured for these silicon nanowire/PEDOT solar cells further demonstrating excellent surface passivation. This process avoids high temperature processes which allows for low-cost substrates to be used. © 2010 IEEE.

  11. Silicon nanowire hybrid photovoltaics

    KAUST Repository

    Garnett, Erik C.

    2010-06-01

    Silicon nanowire Schottky junction solar cells have been fabricated using n-type silicon nanowire arrays and a spin-coated conductive polymer (PEDOT). The polymer Schottky junction cells show superior surface passivation and open-circuit voltages compared to standard diffused junction cells with native oxide surfaces. External quantum efficiencies up to 88% were measured for these silicon nanowire/PEDOT solar cells further demonstrating excellent surface passivation. This process avoids high temperature processes which allows for low-cost substrates to be used. © 2010 IEEE.

  12. Characterisation of silicon carbide films deposited by plasma-enhanced chemical vapour deposition

    International Nuclear Information System (INIS)

    Iliescu, Ciprian; Chen Bangtao; Wei Jiashen; Pang, A.J.

    2008-01-01

    The paper presents a characterisation of amorphous silicon carbide films deposited in plasma-enhanced chemical vapour deposition (PECVD) reactors for MEMS applications. The main parameter was optimised in order to achieve a low stress and high deposition rate. We noticed that the high frequency mode (13.56 MHz) gives a low stress value which can be tuned from tensile to compressive by selecting the correct power. The low frequency mode (380 kHz) generates high compressive stress (around 500 MPa) due to ion bombardment and, as a result, densification of the layer achieved. Temperature can decrease the compressive value of the stress (due to annealing effect). A low etching rate of the amorphous silicon carbide layer was noticed for wet etching in KOH 30% at 80 o C (around 13 A/min) while in HF 49% the layer is practically inert. A very slow etching rate of amorphous silicon carbide layer in XeF 2 -7 A/min- was observed. The paper presents an example of this application: PECVD-amorphous silicon carbide cantilevers fabricated using surface micromachining by dry-released technique in XeF 2

  13. Joining elements of silicon carbide

    International Nuclear Information System (INIS)

    Olson, B.A.

    1979-01-01

    A method of joining together at least two silicon carbide elements (e.g.in forming a heat exchanger) is described, comprising subjecting to sufficiently non-oxidizing atmosphere and sufficiently high temperature, material placed in space between the elements. The material consists of silicon carbide particles, carbon and/or a precursor of carbon, and silicon, such that it forms a joint joining together at least two silicon carbide elements. At least one of the elements may contain silicon. (author)

  14. Impact of Isolation and Immobilization Layers on the Electro-Mechanical Response of Piezoresistive Nano Cantilever Sensors.

    Science.gov (United States)

    Mathew, Ribu; Sankar, A Ravi

    2018-03-01

    In the last decade, piezoresistive nano cantilever sensors have been extensively explored, especially for chemical and biological sensing applications. Piezoresistive cantilever sensors are multi-layer structures with different constituent materials. Performance of such sensors is a function of their geometry and constituent materials. For a fixed material set, the pre-requisite for optimizing the performance of a composite piezoresistive cantilever sensor is careful geometrical design of its constituent layers. Even though, treatise encompasses various designs of such sensors, typically for computational simplicity the functional layers i.e., the isolation and immobilization layers are neglected in the modeling stages. In this paper, we elucidate the impact of the functional layers on the electro-mechanical response of composite piezoresistive nano cantilever sensors. Systematic and detailed computations are performed using theoretical models and numerical simulations. Results show that both the isolation and immobilization layers play a critical role in governing the sensor performance. Simulation results depict that compared to a sensor with an isolation layer of thickness 100 nm, a sensor without isolation layer has 36.29% and 42.51% better deflection sensitivity and electrical sensitivity respectively. Furthermore, it is found that when an immobilization layer of thickness 40 nm is added atop the isolation layer, the deflection sensitivity and electrical sensitivity reduces by 12.98% and 15.83% respectively. Through our investigation it is shown that the isolation and immobilization layers not only play a vital role in determining the stability and electro-mechanical response of the sensor but their negligence in the design stages can be detrimental. Apart from investigating the impact of the immobilization layer thickness, to model the sensor closer to real time operational conditions, we have performed analysis to understand the impact of non-uniformity in

  15. Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals

    International Nuclear Information System (INIS)

    Makarova, Maria; Sih, Vanessa; Vuckovic, Jelena; Warga, Joe; Li Rui; Dal Negro, Luca

    2008-01-01

    Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in order to enhance emission from the nanocrystal sensitized Erbium at the 1540 nm wavelength. Experimentally measured quality factors of ∼6000 were found to be consistent theoretical predictions. The Purcell factor of 1.4 was estimated from the observed 20-fold enhancement of Erbium luminescence

  16. Photoluminescence and electrical properties of silicon oxide and silicon nitride superlattices containing silicon nanocrystals

    International Nuclear Information System (INIS)

    Shuleiko, D V; Ilin, A S

    2016-01-01

    Photoluminescence and electrical properties of superlattices with thin (1 to 5 nm) alternating silicon-rich silicon oxide or silicon-rich silicon nitride, and silicon oxide or silicon nitride layers containing silicon nanocrystals prepared by plasma-enhanced chemical vapor deposition with subsequent annealing were investigated. The entirely silicon oxide based superlattices demonstrated photoluminescence peak shift due to quantum confinement effect. Electrical measurements showed the hysteresis effect in the vicinity of zero voltage due to structural features of the superlattices from SiOa 93 /Si 3 N 4 and SiN 0 . 8 /Si 3 N 4 layers. The entirely silicon nitride based samples demonstrated resistive switching effect, comprising an abrupt conductivity change at about 5 to 6 V with current-voltage characteristic hysteresis. The samples also demonstrated efficient photoluminescence with maximum at ∼1.4 eV, due to exiton recombination in silicon nanocrystals. (paper)

  17. Advances in silicon nanophotonics

    DEFF Research Database (Denmark)

    Hvam, Jørn Märcher; Pu, Minhao

    Silicon has long been established as an ideal material for passive integrated optical circuitry due to its high refractive index, with corresponding strong optical confinement ability, and its low-cost CMOS-compatible manufacturability. However, the inversion symmetry of the silicon crystal lattice.......g. in high-bit-rate optical communication circuits and networks, it is vital that the nonlinear optical effects of silicon are being strongly enhanced. This can among others be achieved in photonic-crystal slow-light waveguides and in nano-engineered photonic-wires (Fig. 1). In this talk I shall present some...... recent advances in this direction. The efficient coupling of light between optical fibers and the planar silicon devices and circuits is of crucial importance. Both end-coupling (Fig. 1) and grating-coupling solutions will be discussed along with polarization issues. A new scheme for a hybrid III...

  18. Integrated silicon optoelectronics

    CERN Document Server

    Zimmermann, Horst

    2000-01-01

    'Integrated Silicon Optoelectronics'assembles optoelectronics and microelectronics The book concentrates on silicon as the major basis of modern semiconductor devices and circuits Starting from the basics of optical emission and absorption and from the device physics of photodetectors, the aspects of the integration of photodetectors in modern bipolar, CMOS, and BiCMOS technologies are discussed Detailed descriptions of fabrication technologies and applications of optoelectronic integrated circuits are included The book, furthermore, contains a review of the state of research on eagerly expected silicon light emitters In order to cover the topic of the book comprehensively, integrated waveguides, gratings, and optoelectronic power devices are included in addition Numerous elaborate illustrations promote an easy comprehension 'Integrated Silicon Optoelectronics'will be of value to engineers, physicists, and scientists in industry and at universities The book is also recommendable for graduate students speciali...

  19. Silicon microfabricated beam expander

    International Nuclear Information System (INIS)

    Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.

    2015-01-01

    The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed

  20. Silicon microfabricated beam expander

    Science.gov (United States)

    Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.

    2015-03-01

    The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.