WorldWideScience

Sample records for euv radiometric standard

  1. Detection of mycobacteria by radiometric and standard plate procedures.

    OpenAIRE

    Damato, J J; Collins, M T; Rothlauf, M V; McClatchy, J K

    1983-01-01

    A group of 89 smear-positive sputum specimens were evaluated by radiometric and standard plate procedures to determine the methodology which would provide the earliest detection of mycobacteria and maximum test sensitivity. Digested non-decontaminated specimens were concentrated and inoculated into modified selective BACTEC radiometric 7H12 broth and Mitchison selective 7H10 agar. Sodium hydroxide (1.5% final concentration) was then used to decontaminate these specimens. They were then concen...

  2. Translating Radiometric Requirements for Satellite Sensors to Match International Standards

    OpenAIRE

    Pearlman, Aaron; Datla, Raju; Kacker, Raghu; Cao, Changyong

    2014-01-01

    International scientific standards organizations created standards on evaluating uncertainty in the early 1990s. Although scientists from many fields use these standards, they are not consistently implemented in the remote sensing community, where traditional error analysis framework persists. For a satellite instrument under development, this can create confusion in showing whether requirements are met. We aim to create a methodology for translating requirements from the error analysis frame...

  3. Translating Radiometric Requirements for Satellite Sensors to Match International Standards.

    Science.gov (United States)

    Pearlman, Aaron; Datla, Raju; Kacker, Raghu; Cao, Changyong

    2014-01-01

    International scientific standards organizations created standards on evaluating uncertainty in the early 1990s. Although scientists from many fields use these standards, they are not consistently implemented in the remote sensing community, where traditional error analysis framework persists. For a satellite instrument under development, this can create confusion in showing whether requirements are met. We aim to create a methodology for translating requirements from the error analysis framework to the modern uncertainty approach using the product level requirements of the Advanced Baseline Imager (ABI) that will fly on the Geostationary Operational Environmental Satellite R-Series (GOES-R). In this paper we prescribe a method to combine several measurement performance requirements, written using a traditional error analysis framework, into a single specification using the propagation of uncertainties formula. By using this approach, scientists can communicate requirements in a consistent uncertainty framework leading to uniform interpretation throughout the development and operation of any satellite instrument.

  4. Standards and Procedures for Application of Radiometric Sensors

    Science.gov (United States)

    2010-07-01

    CAD computer-aided design CCD charge-coupled device cd candela CFD computational fluid dynamics CHAMP Composite Hardbody and Missile Plume CIE...r, etc. meter m Luminous intensity Iν candela cd Mass m kilogram kg Thermodynamic temperature T Kelvin K Time t second s Standards and... candela per square meter cd/ m 2 Mass concentration ρ, γ kilogram per cubic meter kg/m 3 Refractive index n one (dimensionless) 1 Relative

  5. Broadband Radiometric LED Measurements.

    Science.gov (United States)

    Eppeldauer, G P; Cooksey, C C; Yoon, H W; Hanssen, L M; Podobedov, V B; Vest, R E; Arp, U; Miller, C C

    2016-01-01

    At present, broadband radiometric measurements of LEDs with uniform and low-uncertainty results are not available. Currently, either complicated and expensive spectral radiometric measurements or broadband photometric LED measurements are used. The broadband photometric measurements are based on the CIE standardized V(λ) function, which cannot be used in the UV range and leads to large errors when blue or red LEDs are measured in its wings, where the realization is always poor. Reference irradiance meters with spectrally constant response and high-intensity LED irradiance sources were developed here to implement the previously suggested broadband radiometric LED measurement procedure [1, 2]. Using a detector with spectrally constant response, the broadband radiometric quantities of any LEDs or LED groups can be simply measured with low uncertainty without using any source standard. The spectral flatness of filtered-Si detectors and low-noise pyroelectric radiometers are compared. Examples are given for integrated irradiance measurement of UV and blue LED sources using the here introduced reference (standard) pyroelectric irradiance meters. For validation, the broadband measured integrated irradiance of several LED-365 sources were compared with the spectrally determined integrated irradiance derived from an FEL spectral irradiance lamp-standard. Integrated responsivity transfer from the reference irradiance meter to transfer standard and field UV irradiance meters is discussed.

  6. Broadband Radiometric LED Measurements

    Science.gov (United States)

    Eppeldauer, G. P.; Cooksey, C. C.; Yoon, H. W.; Hanssen, L. M.; Podobedov, V. B.; Vest, R. E.; Arp, U.; Miller, C. C.

    2017-01-01

    At present, broadband radiometric measurements of LEDs with uniform and low-uncertainty results are not available. Currently, either complicated and expensive spectral radiometric measurements or broadband photometric LED measurements are used. The broadband photometric measurements are based on the CIE standardized V(λ) function, which cannot be used in the UV range and leads to large errors when blue or red LEDs are measured in its wings, where the realization is always poor. Reference irradiance meters with spectrally constant response and high-intensity LED irradiance sources were developed here to implement the previously suggested broadband radiometric LED measurement procedure [1, 2]. Using a detector with spectrally constant response, the broadband radiometric quantities of any LEDs or LED groups can be simply measured with low uncertainty without using any source standard. The spectral flatness of filtered-Si detectors and low-noise pyroelectric radiometers are compared. Examples are given for integrated irradiance measurement of UV and blue LED sources using the here introduced reference (standard) pyroelectric irradiance meters. For validation, the broadband measured integrated irradiance of several LED-365 sources were compared with the spectrally determined integrated irradiance derived from an FEL spectral irradiance lamp-standard. Integrated responsivity transfer from the reference irradiance meter to transfer standard and field UV irradiance meters is discussed. PMID:28649167

  7. High sensitivity chemically amplified EUV resists through enhanced EUV absorption

    Science.gov (United States)

    Ongayi, Owendi; Christianson, Matthew; Meyer, Matthew; Coley, Suzanne; Valeri, David; Kwok, Amy; Wagner, Mike; Cameron, Jim; Thackeray, Jim

    2012-03-01

    Resolution, line edge roughness, sensitivity and low outgassing are the key focus points for extreme ultraviolet (EUV) resist materials. Sensitivity has become increasingly important so as to address throughput concerns in device manufacturing and compensate for the low power of EUV sources. Recent studies have shown that increasing the polymer linear absorption absorption coefficient in EUV resists translates to higher acid generation efficiency and good pattern formation. In this study, novel high absorbing polymer platforms are evaluated. The contributing effect of the novel absorbing chromophore to the resultant chemically amplified photoresist is evaluated and compared with a standard methacrylate PAG Bound Polymer (PBP) platform. We report that by increasing EUV absorption, we cleanly resolved 17 nm 1:1 line space can be achieved at a sensitivity of 14.5 mJ/cm2, which is consistent with dose requirements dictated by the ITRS roadmap. We also probe the effect of fluorinated small molecule additives on acid yield generation (Dil C) at EUV of a PBP platform.

  8. Metrology qualification of EUV resists

    Science.gov (United States)

    Gershtein, Liraz; Peltinov, Ram; Ventola, Stefano; Masia, Claudio; Xing, Chanjuan

    2010-03-01

    The ASML extreme ultraviolet lithography (EUV) alpha demo tool is a 0.25NA fully functional lithography tool with a field size of 26×33 mm2, enabling process development for sub-40-nm technology. Two exposure tools are installed in two research centers. The main topic of this paper is the examination of the measured pattern roughness LER contributed by measurement (SEM), exposure (EUV exposure tool) and the resists itself. The authors also examined suspected metrology SEM challenges on different EUV resist types exposed by one of the EUV demo tools. Standard CD SEM tests, such as precision and shrinkage were performed in order to get best working conditions. As part of the research, special attention was given to expected electron - material interactions, such as resist's slimming, low contrast and contamination build up on both lines. LER was analyzed in order to determine separately the contribution effect of the exposure tool and the different resists. Additional comparison was performed on different CDs with different orientations and densities.

  9. Quality control of EUVE databases

    Science.gov (United States)

    John, L. M.; Drake, J.

    1992-01-01

    The publicly accessible databases for the Extreme Ultraviolet Explorer include: the EUVE Archive mailserver; the CEA ftp site; the EUVE Guest Observer Mailserver; and the Astronomical Data System node. The EUVE Performance Assurance team is responsible for verifying that these public EUVE databases are working properly, and that the public availability of EUVE data contained therein does not infringe any data rights which may have been assigned. In this poster, we describe the Quality Assurance (QA) procedures we have developed from the approach of QA as a service organization, thus reflecting the overall EUVE philosophy of Quality Assurance integrated into normal operating procedures, rather than imposed as an external, post facto, control mechanism.

  10. Spectrally Tunable Sources for Advanced Radiometric Applications.

    Science.gov (United States)

    Brown, S W; Rice, J P; Neira, J E; Johnson, B C; Jackson, J D

    2006-01-01

    A common radiometric platform for the development of application-specific metrics to quantify the performance of sensors and systems is described. Using this platform, sensor and system performance may be quantified in terms of the accuracy of measurements of standardized sets of source distributions. The prototype platform consists of spectrally programmable light sources that can generate complex spectral distributions in the ultraviolet, visible and short-wave infrared regions for radiometric, photometric and colorimetric applications. In essence, the programmable spectral source is a radiometric platform for advanced instrument characterization and calibration that can also serve as a basis for algorithm testing and instrument comparison.

  11. Radiometric instrumentation and measurements guide for photovoltaic performance testing

    Energy Technology Data Exchange (ETDEWEB)

    Myers, D.

    1997-04-01

    The Photovoltaic Module and Systems Performance and Engineering Project at the National Renewable Energy Laboratory performs indoor and outdoor standardization, testing, and monitoring of the performance of a wide range of photovoltaic (PV) energy conversion devices and systems. The PV Radiometric Measurements and Evaluation Team (PVSRME) within that project is responsible for measurement and characterization of natural and artificial optical radiation which stimulates the PV effect. The PV manufacturing and research and development community often approaches project members for technical information and guidance. A great area of interest is radiometric instrumentation, measurement techniques, and data analysis applied to understanding and improving PV cell, module, and system performance. At the Photovoltaic Radiometric Measurements Workshop conducted by the PVSRME team in July 1995, the need to communicate knowledge of solar and optical radiometric measurements and instrumentation, gained as a result of NREL`s long-term experiences, was identified as an activity that would promote improved measurement processes and measurement quality in the PV research and manufacturing community. The purpose of this document is to address the practical and engineering need to understand optical and solar radiometric instrument performance, selection, calibration, installation, and maintenance applicable to indoor and outdoor radiometric measurements for PV calibration, performance, and testing applications. An introductory section addresses radiometric concepts and definitions. Next, concepts essential to spectral radiometric measurements are discussed. Broadband radiometric instrumentation and measurement concepts are then discussed. Each type of measurement serves as an important component of the PV cell, module, and system performance measurement and characterization process.

  12. EUV Cross-Calibration Strategies for the GOES-R SUVI

    Science.gov (United States)

    Darnel, Jonathan; Seaton, Daniel

    2016-10-01

    The challenges of maintaining calibration for solar EUV instrumentation is well-known. The lack of standard calibration sources and the fact that most solar EUV telescopes are incapable of utilizing bright astronomical EUV sources for calibration make knowledge of instrument performance quite difficult. In the recent past, calibration rocket underflights have helped establish a calibration baseline. The EVE instrument on SDO for a time provided well-calibrated, high spectral resolution solar spectra for a broad range of the EUV, but has suffered a loss of coverage at the shorter wavelengths. NOAA's Solar UltraViolet Imager (SUVI), a solar EUV imager with similarities to SDO/AIA, will provide solar imagery over nearly an entire solar cycle. In order to maintain the scientific value of the SUVI's dataset, novel approaches to calibration are necessary. Here we demonstrate a suite of methods to cross-calibrate SUVI against other solar EUV instruments through the use of proxy solar spectra.

  13. Photovoltaics radiometric issues and needs

    Energy Technology Data Exchange (ETDEWEB)

    Myers, D.R. [National Renewable Energy Laboratory, Golden, CO (United States)

    1995-11-01

    This paper presents a summary of issues discussed at the photovoltaic radiometric measurements workshop. Topics included radiometric measurements guides, the need for well-defined goals, documentation, calibration checks, accreditation of testing laboratories and methods, the need for less expensive radiometric instrumentation, data correlations, and quality assurance.

  14. EUVE Observations of Nonmagnetic Cataclysmic Variables

    Energy Technology Data Exchange (ETDEWEB)

    Mauche, C W

    2001-09-05

    The authors summarize EUVE's contribution to the study of the boundary layer emission of high accretion-rate nonmagnetic cataclysmic variables, especially the dwarf novae SS Cyg, U Gem, VW Hyi, and OY Car in outburst. They discuss the optical and EUV light curves of dwarf nova outbursts, the quasi-coherent oscillations of the EUV flux of SS Cyg, the EUV spectra of dwarf novae, and the future of EUV observations of cataclysmic variables.

  15. Radiometry for the EUV lithography; Radiometrie fuer die EUV-Lithographie

    Energy Technology Data Exchange (ETDEWEB)

    Scholze, Frank [Physikalisch-Technische Bundesanstalt (PTB), Berlin (Germany). Arbeitsgruppe ' EUV-Radiometrie' ; Laubis, Christian; Barboutis, Annett; Buchholz, Christian; Fischer, Andreas; Puls, Jana; Stadelhoff, Christian

    2014-12-15

    The EUV reflectrometry at the PTB storage BESSY I and BESSY II is described. Results on the reflectivities of some EUV mirrors are presented. Finally the spectral sensitivities of different photodiodes used as EUV detectors are presented. (HSI)

  16. Stochastic exposure kinetics of EUV photoresists: a simulation study

    Science.gov (United States)

    Mack, Chris A.; Thackeray, James W.; Biafore, John J.; Smith, Mark D.

    2011-04-01

    BACKGROUND: The stochastic nature of extreme ultraviolet (EUV) resist exposure leads to variations in the resulting acid concentration, which leads to line-edge roughness (LER) of the resulting features. METHODS: Using a stochastic resist simulator, we predicted the mean and standard deviation of the acid concentration for an open-frame exposure and fit the results to analytical expressions. RESULTS: The EUV resist exposure mechanism of the PROLTIH Stochastic Resist Simulator is first order, and an analytical expression for the exposure rate constant C allows prediction of the mean acid concentration of an open-frame exposure to about 1% accuracy over a wide range of parameter values. A second analytical expression for the standard deviation of the acid concentration also matched the output of PROLITH to within about 1%. CONCLUSIONS: Predicting the stochastic uncertainty in acid concentration for EUV resists allows optimization of resist processing and formulations, and may form the basis of a comprehensive LER model.

  17. RADIOMETRIC BLOCK ADJUSMENT AND DIGITAL RADIOMETRIC MODEL GENERATION

    Directory of Open Access Journals (Sweden)

    A. Pros

    2013-05-01

    Full Text Available In this paper we present a radiometric block adjustment method that is related to geometric block adjustment and to the concept of a terrain Digital Radiometric Model (DRM as a complement to the terrain digital elevation and surface models. A DRM, in our concept, is a function that for each ground point returns a reflectance value and a Bidirectional Reflectance Distribution Function (BRDF. In a similar way to the terrain geometric reconstruction procedure, given an image block of some terrain area, we split the DRM generation in two phases: radiometric block adjustment and DRM generation. In the paper we concentrate on the radiometric block adjustment step, but we also describe a preliminary DRM generator. In the block adjustment step, after a radiometric pre-calibraton step, local atmosphere radiative transfer parameters, and ground reflectances and BRDFs at the radiometric tie points are estimated. This radiometric block adjustment is based on atmospheric radiative transfer (ART models, pre-selected BRDF models and radiometric ground control points. The proposed concept is implemented and applied in an experimental campaign, and the obtained results are presented. The DRM and orthophoto mosaics are generated showing no radiometric differences at the seam lines.

  18. EUV lithography at the 22nm technology node

    Science.gov (United States)

    Wood, Obert; Koay, Chiew-Seng; Petrillo, Karen; Mizuno, Hiroyuki; Raghunathan, Sudhar; Arnold, John; Horak, Dave; Burkhardt, Martin; McIntyre, Gregory; Deng, Yunfei; La Fontaine, Bruno; Okoroanyanwu, Uzo; Wallow, Tom; Landie, Guillaume; Standaert, Theodorus; Burns, Sean; Waskiewicz, Christopher; Kawasaki, Hirohisa; Chen, James H.-C.; Colburn, Matthew; Haran, Bala; Fan, Susan S.-C.; Yin, Yunpeng; Holfeld, Christian; Techel, Jens; Peters, Jan-Hendrik; Bouten, Sander; Lee, Brian; Pierson, Bill; Kessels, Bart; Routh, Robert; Cummings, Kevin

    2010-04-01

    We are evaluating the readiness of extreme ultraviolet (EUV) lithography for insertion into production at the 15 nm technology node by integrating it into standard semiconductor process flows because we believe that device integration exercises provide the truest test of technology readiness and, at the same time, highlight the remaining critical issues. In this paper, we describe the use of EUV lithography with the 0.25 NA Alpha Demo Tool (ADT) to pattern the contact and first interconnect levels of a large (~24 mm x 32 mm) 22 nm node test chip using EUV masks with state-of-the-art defectivity (~0.3 defects/cm2). We have found that: 1) the quality of EUVL printing at the 22 nm node is considerably higher than the printing produced with 193 nm immersion lithography; 2) printing at the 22 nm node with EUV lithography results in higher yield than double exposure double-etch 193i lithography; and 3) EUV lithography with the 0.25 NA ADT is capable of supporting some early device development work at the 15 nm technology node.

  19. Determining the Critcial Size of EUV Mask Substrate Defects

    Energy Technology Data Exchange (ETDEWEB)

    Mccall, Monnikue M; Han, Hakseung; Cho, Wonil; Goldberg, Kenneth; Gullikson, Eric; Jeon, Chan-Uk; Wurm, Stefan

    2008-02-28

    Determining the printability of substrate defects beneath the extreme ultraviolet (EUV) reflecting multilayer stack is an important issue in EUVL lithography. Several simulation studies have been performed in the past to determine the tolerable defect size on EUV mask blank substrates but the industry still has no exact specification based on real printability tests. Therefore, it is imperative to experimentally determine the printability of small defects on a mask blanks that are caused by substrate defects using direct printing of programmed substrate defect in an EUV exposure tool. SEMATECH fabricated bump type program defect masks using standard electron beam lithography and performed printing tests with the masks using an EUV exposure tool. Defect images were also captured using SEMATECH's Berkeley Actinic Imaging Tool in order to compare aerial defect images with secondary electron microscope images from exposed wafers. In this paper, a comprehensive understanding of substrate defect printability will be presented and printability specifications of EUV mask substrate defects will be discussed.

  20. Determining the critical size of EUV mask substrate defects

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Gullikson, Eric M.; Han, Hakseung; Cho, Wonil; Jeon, Chan-Uk; Wurm, Stefan

    2008-05-26

    Determining the printability of substrate defects beneath the extreme ultraviolet (EUV) reflecting multilayer stack is an important issue in EUVL lithography. Several simulation studies have been performed in the past to determine the tolerable defect size on EUV mask blank substrates but the industry still has no exact specification based on real printability tests. Therefore, it is imperative to experimentally determine the printability of small defects on a mask blanks that are caused by substrate defects using direct printing of programmed substrate defect in an EUV exposure tools. SEMATECH fabricated bump type program defect masks using standard electron beam lithography and performed printing tests with the masks using an EUV exposure tool. Defect images were also captured using SEMATECH's Berkeley Actinic Imaging Tool in order to compare aerial defect images with secondary electron microscope images from exposed wafers. In this paper, a comprehensive understanding of substrate defect printability will be presented and printability specifications of EUV mask substrate defects will be discussed.

  1. Energy effective dual-pulse bispectral laser for EUV lithography

    Science.gov (United States)

    Zhevlakov, A. P.; Seisyan, R. P.; Bespalov, V. G.; Elizarov, V. V.; Grishkanich, A. S.; Kascheev, S. V.; Sidorov, I. S.

    2016-03-01

    The power consumption in the two-pulse bispectral primary source could be substantially decreased by replacing the SRS converters from 1.06 μm into 10.6 μm wavelength as the preamplifier cascades in CO2 laser channel at the same efficiency radiation of EUV source. The creation of high volume manufacturing lithography facilities with the technological standard of 10-20 nm is related to the implementation of resist exposure modes with pulse repetition rate of 100 kHz. Low power consumption of the proposed scheme makes it promising for the creation of LPP EUV sources.

  2. Spectrally Tunable Sources for Advanced Radiometric Applications

    OpenAIRE

    Brown, S W; Rice, J. P.; Neira, J. E.; Johnson, B. C.; Jackson, J. D.

    2006-01-01

    A common radiometric platform for the development of application-specific metrics to quantify the performance of sensors and systems is described. Using this platform, sensor and system performance may be quantified in terms of the accuracy of measurements of standardized sets of source distributions. The prototype platform consists of spectrally programmable light sources that can generate complex spectral distributions in the ultraviolet, visible and short-wave infrared regions for radiomet...

  3. Secondary Electrons in EUV Lithography

    Energy Technology Data Exchange (ETDEWEB)

    Torok, Justin; Re, Ryan Del; Herbol, Henry; Das, Sanjana; Bocharova, Irina; Paolucci, Angela; Ocola, Leonidas E.; Ventrice Jr., Carl; Lifshin, Eric; Denbeaux, Greg; Brainard, Robert L.

    2013-01-01

    Secondary electrons play critical roles in several imaging technologies, including extreme ultraviolet (EUV) lithography. At longer wavelengths of light (e.g. 193 and 248 nm), the photons are directly involved in the photochemistry occurring during photolysis. EUV light (13.5 nm, 92 eV), however, first creates a photoelectron, and this electron, or its subsequent daughter electrons create most of the chemical changes that occur during exposure. Despite the importance of these electrons, the details surrounding the chemical events leading to acid production remain poorly understood. Previously reported experimental results using high PAG-loaded resists have demonstrated that up to five or six photoacids can be generated per incident photon. Until recently, only electron recombination events were thought to play a role in acid generation, requiring that at least as many secondary electrons are produced to yield a given number of acid molecules. However, the initial results we have obtained using a Monte Carlo-based modeling program, LESiS, demonstrate that only two to three secondary electrons are made per absorbed EUV photon. A more comprehensive understanding of EUV-induced acid generation is therefore needed for the development of higher performance resists

  4. Worldwide Status of EUV Astronomy

    Science.gov (United States)

    Kowalski, Michael P.; Wood, K. S.; Barstow, M. A.

    2013-01-01

    The bulk of radiation from million-degree plasmas is emitted at EUV wavelengths, which include critical spectral features containing diagnostic information often not available at other wavelengths (e.g., He II Ly series 228-304 Å). Thus, EUV astrophysics (Barstow & Holberg 2003) presents opportunities for intriguing results obtainable with sensitive high-resolution spectroscopy and particularly applicable to hot plasmas in stellar coronae, white dwarfs and the interstellar medium. The US-built J-PEX spectrometer has flown twice on sounding rockets, observing and publishing results on two white dwarf targets (Cruddace et al. 2002, Barstow et al. 2005, Kowalski et al. 2011). Using multilayer-grating technology, J-PEX delivers both high effective area and the world's highest resolution in EUV, greater than Chandra at adjacent energies, but in a waveband Chandra cannot reach. However, the US program has been stalled by inability to obtain further NASA sounding rocket flights. A high level of technology readiness, plus important questions answerable solely with that technology, does not seem sufficient to win support. Nor is the substantial amount of resources invested into technology development over two decades, supported by NASA, DoD, and European partners. Proposals to turn the instrument or its technology into small satellite-based surveys have been made (results to be described) in the US and Europe, but the overall situation is precarious. The entire EUV astrophysics field is losing out on an opportunity, and is at risk of fading away, with forced discard of established assets. Only mobilization of the international EUV community -- unifying European, US, and perhaps others -- can reverse this situation. Our poster summarizes science quests within reach of proven technology, gives a current snapshot of that technology, and provides a summary of worldwide efforts to obtain necessary space access in NASA, ESA, and elsewhere. A process for building and maintaining

  5. EUV optics in photoionization experiments

    Science.gov (United States)

    Bartnik, Andrzej; Wachulak, Przemysław; Fiedorowicz, Henryk; Fok, Tomasz; Jarocki, Roman; Kostecki, Jerzy; Szczurek, Anna; Szczurek, Mirosław; Pina, Ladislav; Sveda, Libor

    2013-05-01

    In this work photoionized plasmas were created by irradiation of He, Ne and Ar gases with a focused EUV beam from one of two laser-plasma sources employing Nd:YAG laser systems of different parameters. First of them was a 10-Hz laser-plasma EUV source, based on a double-stream gas-puff target, irradiated with the 3-ns/0.8J laser pulse. EUV radiation in this case was focused using a gold-plated grazing incidence ellipsoidal collector in the wavelength range λ = 9÷70 nm. The most intense emission was in the relatively narrow spectral region centred at λ = 11 +/- 1 nm. The second source was based on a 10 ns/10 J/10 Hz laser system. In this case EUV radiation was focused using a gold-plated grazing incidence multifoil collector or a Mo-coated ellipsoidal collector. The most intense emission in this case was in the 5 ÷ 15 nm spectral region. Radiation fluence ranged from 60 mJ/cm2 to 400 mJ/cm2. Different gases were injected into the interaction region, perpendicularly to an optical axis of the irradiation system, using an auxiliary gas puff valve. Irradiation of the gases resulted in ionization and excitation of atoms and ions. Spectra in EUV range were measured using a grazing incidence, flat-field spectrometer (McPherson Model 251), equipped with a 450 lines/mm toroidal grating. In all cases the most intense emission lines were assigned to singly charged ions. The other emission lines belong to atoms or doubly charged ions. The spectra were excited in low density gases of the order of 1 ÷ 10% atmospheric density.

  6. Nanoparticle Photoresists: Ligand Exchange as a New, Sensitive EUV Patterning Mechanism

    KAUST Repository

    Kryask, Marie

    2013-01-01

    Hybrid nanoparticle photoresists and their patterning using DUV, EUV, 193 nm lithography and e-beam lithography has been investigated and reported earlier. The nanoparticles have demonstrated very high EUV sensitivity and significant etch resistance compared to other standard photoresists. The current study aims at investigating and establishing the underlying mechanism for dual tone patterning of these nanoparticle photoresist systems. Infrared spectroscopy and UV absorbance studies supported by mass loss and dissolution studies support the current model. © 2013SPST.

  7. Highly Stable, Large Format EUV Imager Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Higher detection efficiency and better radiation tolerance imagers are needed for the next generation of EUV instruments. Previously, CCD technology has demonstrated...

  8. Radiometric calibration of optical microscopy and microspectroscopy apparata over a broad spectral range using a special thin-film luminescence standard

    Directory of Open Access Journals (Sweden)

    J. Valenta

    2015-04-01

    Full Text Available Application capabilities of optical microscopes and microspectroscopes can be considerably enhanced by a proper calibration of their spectral sensitivity. We propose and demonstrate a method of relative and absolute calibration of a microspectroscope over an extraordinary broad spectral range covered by two (parallel detection branches in visible and near-infrared spectral regions. The key point of the absolute calibration of a relative spectral sensitivity is application of the standard sample formed by a thin layer of Si nanocrystals with stable and efficient photoluminescence. The spectral PL quantum yield and the PL spatial distribution of the standard sample must be characterized by separate experiments. The absolutely calibrated microspectroscope enables to characterize spectral photon emittance of a studied object or even its luminescence quantum yield (QY if additional knowledge about spatial distribution of emission and about excitance is available. Capabilities of the calibrated microspectroscope are demonstrated by measuring external QY of electroluminescence from a standard poly-Si solar-cell and of photoluminescence of Er-doped Si nanocrystals.

  9. Radiometric surveys in underground environment

    Science.gov (United States)

    Bochiolo, Massimo; Chiozzi, Paolo; Verdoya, Massimo; Pasquale, Vincenzo

    2010-05-01

    Due to their ability to travel through the air for several metres, gamma-rays emitted from natural radioactive elements can be successfully used in surveys carried out both with airborne and ground equipments. Besides the concentration of the radio-elements contained in rocks and soils and the intrinsic characteristics of the gamma-ray detector, the detected count rate depends on the solid angle around the spectrometer. On a flat outcrop, ground spectrometry detects the radiation ideally produced by a cylindrical mass of rock of about two metres in diameter and thickness of about half a meter. Under these geometrical conditions, the natural radioactivity can be easily evaluated. With operating conditions different from the standard ones, such as at the edge of an escarpment, the count rate halves because of the missing material, whereas in the vicinity of a rock wall the count rate will increase. In underground environment, the recorded count rate may even double and the in situ assessment of the concentration of radio-elements may be rather difficult, even if the ratios between the different radio-elements may not be affected. We tested the applicability of gamma-ray spectrometry for rapid assessment of the potential hazard levels related to radon and radiation dose rate in underground environment. A mine shaft, located in a zone of uranium enrichment in Liguria (Italy), has been investigated. A preliminary ground radiometric survey was carried out to define the extent of the ore deposit. Then, the radiometric investigation was focussed on the mine shaft. Due to rock mass above the shaft vault, the background gamma radiation can be considered of negligible influence on measurements. In underground surveys, besides deviations from a flat geometry, factors controlling radon exhalation, emanation and stagnation, such as fractures, water leakage and the presence of ventilation, should be carefully examined. We attempted to evaluate these control factors and collected

  10. RADIOMETRIC PROPERTIES OFAGRICULTURAL PERMEABLE COVERINGS

    Directory of Open Access Journals (Sweden)

    Sergio Castellano

    2010-06-01

    Full Text Available Nets are commonly used for agricultural applications. However, only little is known about the radiometric properties of net types and how to influence them. In order to investigate the influence of net construction parameters on their radiometric properties, a set of radiometric tests were performed on 45 types of agricultural nets. Laboratory tests on large size net samples was performed using a large and a small integrating sphere. Open field radiometric test were carried out by means of an experimental set up (120x120x50 cm and a full scale shade house. Small differences (less than 5% occurred between laboratory and open field tests. Results highlighted that the porosity and the mesh size, combined with the colour and secondarily, with the fabric and the kind of threads of the net influenced the shading performance of the net. The colour influenced the spectral distribution of the radiation passing through the net absorbing its complementary colours. Since nets are three-dimensional structures the transmissivity of direct light under different angles of incident of solar radiation changes when installed in the warp or weft direction. Transmissivity could be considered one of the main parameters involved in the agronomic performances of the netting system.

  11. Contamination Effects on EUV Optics

    Science.gov (United States)

    Tveekrem, J.

    1999-01-01

    During ground-based assembly and upon exposure to the space environment, optical surfaces accumulate both particles and molecular condensibles, inevitably resulting in degradation of optical instrument performance. Currently, this performance degradation (and the resulting end-of-life instrument performance) cannot be predicted with sufficient accuracy using existing software tools. Optical design codes exist to calculate instrument performance, but these codes generally assume uncontaminated optical surfaces. Contamination models exist which predict approximate end-of-life contamination levels, but the optical effects of these contamination levels can not be quantified without detailed information about the optical constants and scattering properties of the contaminant. The problem is particularly pronounced in the extreme ultraviolet (EUV, 300-1,200 A) and far (FUV, 1,200-2,000 A) regimes due to a lack of data and a lack of knowledge of the detailed physical and chemical processes involved. Yet it is in precisely these wavelength regimes that accurate predictions are most important, because EUV/FUV instruments are extremely sensitive to contamination.

  12. EUV mask process specifics and development challenges

    Science.gov (United States)

    Nesladek, Pavel

    2014-07-01

    EUV lithography is currently the favorite and most promising candidate among the next generation lithography (NGL) technologies. Decade ago the NGL was supposed to be used for 45 nm technology node. Due to introduction of immersion 193nm lithography, double/triple patterning and further techniques, the 193 nm lithography capabilities was greatly improved, so it is expected to be used successfully depending on business decision of the end user down to 10 nm logic. Subsequent technology node will require EUV or DSA alternative technology. Manufacturing and especially process development for EUV technology requires significant number of unique processes, in several cases performed at dedicated tools. Currently several of these tools as e.g. EUV AIMS or actinic reflectometer are not available on site yet. The process development is done using external services /tools with impact on the single unit process development timeline and the uncertainty of the process performance estimation, therefore compromises in process development, caused by assumption about similarities between optical and EUV mask made in experiment planning and omitting of tests are further reasons for challenges to unit process development. Increased defect risk and uncertainty in process qualification are just two examples, which can impact mask quality / process development. The aim of this paper is to identify critical aspects of the EUV mask manufacturing with respect to defects on the mask with focus on mask cleaning and defect repair and discuss the impact of the EUV specific requirements on the experiments needed.

  13. Carbon contamination topography analysis of EUV masks

    Energy Technology Data Exchange (ETDEWEB)

    Fan, Y.-J.; Yankulin, L.; Thomas, P.; Mbanaso, C.; Antohe, A.; Garg, R.; Wang, Y.; Murray, T.; Wuest, A.; Goodwin, F.; Huh, S.; Cordes, A.; Naulleau, P.; Goldberg, K. A.; Mochi, I.; Gullikson, E.; Denbeaux, G.

    2010-03-12

    The impact of carbon contamination on extreme ultraviolet (EUV) masks is significant due to throughput loss and potential effects on imaging performance. Current carbon contamination research primarily focuses on the lifetime of the multilayer surfaces, determined by reflectivity loss and reduced throughput in EUV exposure tools. However, contamination on patterned EUV masks can cause additional effects on absorbing features and the printed images, as well as impacting the efficiency of cleaning process. In this work, several different techniques were used to determine possible contamination topography. Lithographic simulations were also performed and the results compared with the experimental data.

  14. EUV lithography imaging using novel pellicle membranes

    Science.gov (United States)

    Pollentier, Ivan; Vanpaemel, Johannes; Lee, Jae Uk; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Gallagher, Emily E.

    2016-03-01

    EUV mask protection against defects during use remains a challenge for EUV lithography. A stand-off protective membrane - a pellicle - is targeted to prevent yield losses in high volume manufacturing during handling and exposure, just as it is for 193nm lithography. The pellicle is thin enough to transmit EUV exposure light, yet strong enough to remain intact and hold any particles out of focus during exposure. The development of pellicles for EUV is much more challenging than for 193nm lithography for multiple reasons including: high absorption of most materials at EUV wavelength, pump-down sequences in the EUV vacuum system, and exposure to high intensity EUV light. To solve the problems of transmission and film durability, various options have been explored. In most cases a thin core film is considered, since the deposition process for this is well established and because it is the simplest option. The transmission specification typically dictates that membranes are very thin (~50nm or less), which makes both fabrication and film mechanical integrity difficult. As an alternative, low density films (e.g. including porosity) will allow thicker membranes for a given transmission specification, which is likely to improve film durability. The risk is that the porosity could influence the imaging. At imec, two cases of pellicle concepts based on reducing density have been assessed : (1) 3D-patterned SiN by directed self-assembly (DSA), and (2) carbon nanomaterials such as carbon nanotubes (CNT) and carbon nanosheets (CNS). The first case is based on SiN membranes that are 3D-patterned by Directed Self Assembly (DSA). The materials are tested relative to the primary specifications: EUV transmission and film durability. A risk assessment of printing performance is provided based on simulations of scattered energy. General conclusions on the efficacy of various approaches will provided.

  15. Nanoplasmonic generation of ultrashort EUV pulses

    Science.gov (United States)

    Choi, Joonhee; Lee, Dong-Hyub; Han, Seunghwoi; Park, In-Yong; Kim, Seungchul; Kim, Seung-Woo

    2012-10-01

    Ultrashort extreme-ultraviolet (EUV) light pulses are an important tool for time-resolved pump-probe spectroscopy to investigate the ultrafast dynamics of electrons in atoms and molecules. Among several methods available to generate ultrashort EUV light pulses, the nonlinear frequency upconversion process of high-harmonic generation (HHG) draws attention as it is capable of producing coherent EUV pulses with precise control of burst timing with respect to the driving near-infrared (NIR) femtosecond laser. In this report, we present and discuss our recent experimental data obtained by the plasmon-driven HHG method that generate EUV radiation by means of plasmonic nano-focusing of NIR femtosecond pulses. For experiment, metallic waveguides having a tapered hole of funnel shape inside were fabricated by adopting the focused-ion-beam process on a micro-cantilever substrate. The plasmonic field formed within the funnelwaveguides being coupled with the incident femtosecond pulse permitted intensity enhancement by a factor of ~350, which creates a hot spot of sub-wavelength size with intensities strong enough for HHG. Experimental results showed that with injection of noble gases into the funnel-waveguides, EUV radiation is generated up to wavelengths of 32 nm and 29.6 nm from Ar and Ne gas atoms, respectively. Further, it was observed that lower-order EUV harmonics are cut off in the HHG spectra by the tiny exit aperture of the funnel-waveguide.

  16. EUV-mirror, optical system with EUV-mirror and associated operating method

    NARCIS (Netherlands)

    Dinger, U.; Bijkerk, Frederik; Bayraktar, Muharrem; Dier, O.

    2016-01-01

    An EUV mirror (1000) has a mirror element which forms a mirror surface of the mirror. The mirror element has a substrate (1020) and a multilayer arrangement (1030) applied on the substrate and having a reflective effect with respect to radiation from the extreme ultraviolet range (EUV). The

  17. Correlation of experimentally measured atomic scale properties of EUV photoresist to modeling performance: an exploration

    Science.gov (United States)

    Kandel, Yudhishthir; Chandonait, Jonathan; Melvin, Lawrence S.; Marokkey, Sajan; Yan, Qiliang; Grzeskowiak, Steven; Painter, Benjamin; Denbeaux, Gregory

    2017-03-01

    Extreme ultraviolet (EUV) lithography at 13.5 nm stands at the crossroads of next generation patterning technology for high volume manufacturing of integrated circuits. Photo resist models that form the part of overall pattern transform model for lithography play a vital role in supporting this effort. The physics and chemistry of these resists must be understood to enable the construction of accurate models for EUV Optical Proximity Correction (OPC). In this study, we explore the possibility of improving EUV photo-resist models by directly correlating the parameters obtained from experimentally measured atomic scale physical properties; namely, the effect of interaction of EUV photons with photo acid generators in standard chemically amplified EUV photoresist, and associated electron energy loss events. Atomic scale physical properties will be inferred from the measurements carried out in Electron Resist Interaction Chamber (ERIC). This study will use measured physical parameters to establish a relationship with lithographically important properties, such as line edge roughness and CD variation. The data gathered from these measurements is used to construct OPC models of the resist.

  18. Fundamentals of EUV resist-inorganic hardmask interactions

    Science.gov (United States)

    Goldfarb, Dario L.; Glodde, Martin; De Silva, Anuja; Sheshadri, Indira; Felix, Nelson M.; Lionti, Krystelle; Magbitang, Teddie

    2017-03-01

    High resolution Extreme Ultraviolet (EUV) patterning is currently limited by EUV resist thickness and pattern collapse, thus impacting the faithful image transfer into the underlying stack. Such limitation requires the investigation of improved hardmasks (HMs) as etch transfer layers for EUV patterning. Ultrathin (lessons learned in this work can be directly applied to the engineering of EUV resist materials and processes specifically designed to work on such novel HMs.

  19. Design and fabrication of advanced EUV diffractive elements

    Energy Technology Data Exchange (ETDEWEB)

    Naulleau, Patrick P.; Liddle, J. Alexander; Salmassi, Farhad; Anderson, Erik H.; Gullikson, Eric M.

    2003-11-16

    As extreme ultraviolet (EUV) lithography approaches commercial reality, the development of EUV-compatible diffractive structures becomes increasingly important. Such devices are relevant to many aspects of EUV technology including interferometry, illumination, and spectral filtering. Moreover, the current scarcity of high power EUV sources makes the optical efficiency of these diffractive structures a paramount concern. This fact has led to a strong interest in phase-enhanced diffractive structures. Here we describe recent advancements made in the fabrication of such devices.

  20. Metal Oxide Nanoparticle Photoresists for EUV Patterning

    KAUST Repository

    Jiang, Jing

    2014-01-01

    © 2014SPST. Previous studies of methacrylate based nanoparticle have demonstrated the excellent pattern forming capability of these hybrid materials when used as photoresists under 13.5 nm EUV exposure. HfO2 and ZrO2 methacrylate resists have achieved high resolution (∼22 nm) at a very high EUV sensitivity (4.2 mJ/cm2). Further investigations into the patterning process suggests a ligand displacement mechanism, wherein, any combination of a metal oxide with the correct ligand could generate patterns in the presence of the suitable photoactive compound. The current investigation extends this study by developing new nanoparticle compositions with transdimethylacrylic acid and o-toluic acid ligands. This study describes their synthesis and patterning performance under 248 nm KrF laser (DUV) and also under 13.5 nm EUV exposures (dimethylacrylate nanoparticles) for the new resist compositions.

  1. EUV repair process optimization and integration

    Science.gov (United States)

    Nesládek, Pavel; Lajn, Alexander; Schedel, Thorsten; Bender, Markus

    2017-07-01

    EUV technology is according to current trend approaching the final development phase in which defect free EUV masks are of key importance for development and optimization of the lithography process. This task consists of three contributing aspects- defect free multilayer blank, mask manufacturing process with very low defect formation probability and availability of repair process for EUV mask. In comparison to optical mask, development of the repair process for EUV mask is different in several aspects. The fact, that the TaN absorber is placed on top of Mo/Si mirror is making the process very sensitive to variation of the mask material, as the etch rate of the mirror is significantly higher, than that of absorber, when no capping layer is present between the absorber and ML mirror. The presence of the Ru capping layer increases the process window due to significant selectivity improvement by one or two orders of magnitude, however, the capping layer is very sensitive to damage by preceding manufacturing processes. Its thickness and also it chemical purity - lack of modification by incorporation of impurities is crucial for successful mask repair. The repair process for optical masks is typically optimized using AIMS for both development and qualification of the process. The availability of EUV AIMS system is very limited, for what reason we have to rely on other measures during the process development and use the AIMS for process qualification only, or use correlation between e.g. CD SEM or AFM measurement and AIMS data for selection and qualification of the repair process. Also the usage of mask - exposure on the scanner is modifying the mask surface. Therefore the impact of the mask exposure needs to be investigated, when EUV gets in HVM stage. In the past, the influence of the mask cleaning process on the integrity of EUV mask was investigated, with respect to several lithography-critical parameters as actinic reflectivity, critical dimension (CD) shift, edge

  2. Gamma radiometric survey of Jamaica

    Energy Technology Data Exchange (ETDEWEB)

    Lalor, G.C.; Robotham, H. (West Indies Univ., Mona (Jamaica)); Miller, J.M.; Simpson, P.R. (British Geological Survey, Keyworth (UK))

    The results of a total gamma radiometric survey of Jamaica, carried out with car-borne instrumentation, are presented and the data compared with the contents of potassium, thorium and uranium in rocks and in surface (soil, stream-sediment, pan concentrate and water) samples obtained at six sites selected to be representative of the principal rock types and surface environments of Jamaica. The work formed part of an orientation study for a regional geochemical survey of the CARICOM countries of the Caribbean. The initial results indicate that enhanced gamma activity is correlated with enrichment in uranium and thorium, but not potassium, in terra rossa soils and/or bauxite deposits in limestone. Elsewhere, gamma levels are increased on the Above Rocks Cretaceous basement Inlier, where they correlate generally with the presence of volcanogenic sediments and a granodiorite intrusion. The lowest radioactivity was recorded in the vicinity of ultrabasic rocks in the Blue Mountains Inlier. (author).

  3. Radiometric studies of mycobacterium tuberculosis

    Directory of Open Access Journals (Sweden)

    Edwaldo E. Camargo

    1987-02-01

    Full Text Available An in vitro assay system that included automated radiometric quantification of 14CO2 released as a result of oxidation of 14C- substrates was applied for studying the metabolic activity of M. tuberculosis under various experimental conditions. These experiments included the study of a mtabolic pathways, b detection times for various inoculum sizes, c effect of filtration on reproducibility of results, d influence of stress environment e minimal inhibitory concentrations for isoniazid, streptomycin, ethambutol and rifampin, and f generation times of M. tuberculosis and M. bovis. These organisms were found to metabolize 14C-for-mate, (U-14C acetate, (U-14C glycerol, (1-14C palmitic acid, 1-14C lauric acid, (U-14C L-malic acid, (U-14C D-glucose, and (U-14C D-glucose, but not (1-14C L-glucose, (U-14C glycine, or (U-14C pyruvate to 14CO2. By using either 14C-for-mate, (1-14C palmitic acid, or (1-14C lauric acid, 10(7 organisms/vial could be detected within 24 48 hours and as few as 10 organisms/vial within 16-20 days. Reproducible results could be obtained without filtering the bacterial suspension, provided that the organisms were grown in liquid 7H9 medium with 0.05% polysorbate 80 and homogenized prior to the study. Drugs that block protein synthesis were found to have lower minimal inhibitory concentrations with the radiometric method when compared to the conventional agar dilution method. The mean generation time obtained for M. bovis and different strains of M. tuberculosis with various substrates was 9 ± 1 hours.

  4. Radiometric cross-calibration of KOMPSAT-3 with Landsat-8

    Science.gov (United States)

    Shin, Dongyoon; Jin, Cheonggil; Ahn, Hoyong; Choi, Chuluong

    2015-10-01

    This paper presents a radiometric cross calibration of KOMPSAT-3 AEISS based on Landsat-8 OLI. Cross calibration between the two sensors using simultaneous image pairs, acquired during an underfly event over the Libya 4 pseudo invariant calibration site (PICS) site. The spectral profile of the target comes from the near-simultaneous EO-1 Hyperion data over these sites for apply Spectral Band Adjustment Factor (SBAF). The results indicate that the Top Of Atmosphere (TOA) reflectance measurements for KOMPSAT-3 agree with Landsat-8 to within 5% after the application of SBAF. To validate radiometric coefficient, comparison TOA reflectance executed in north Virginia, USA. The difference in TOA reflectance was calculated to within a maximum ±1.55%. There was a huge improvement when the standard deviation altered from 0.1 to 0.01, when applying the SBAF. The result of radiometric coefficient presented here appear to be a good standard for maintaining the optical quality of the KOMPSAT-3, for which prelaunch, onboard, and vicarious calibration data are lacking.

  5. Oxidation and metal contamination of EUV optics

    NARCIS (Netherlands)

    Sturm, Jacobus Marinus; Liu, Feng; Pachecka, Malgorzata; Lee, Christopher James; Bijkerk, Frederik

    2013-01-01

    The next generation photolithography will use 13.5 nm Extreme Ultraviolet (EUV) for printing smaller features on chips. One of the hallenges is to optimally control the contamination of the multilayer mirrors used in the imaging system. The aim of this project is generating fundamental understanding

  6. EUV micropatterning for biocompatibility control of PET

    Science.gov (United States)

    Reisinger, B.; Fahrner, M.; Frischauf, I.; Yakunin, S.; Svorcik, V.; Fiedorowicz, H.; Bartnik, A.; Romanin, C.; Heitz, J.

    2010-08-01

    We have investigated the influence of oriented microstructures at modified polyethylene terephthalate (PET) on the adhesion and alignment of Chinese hamster ovary (CHO) cells. For surface modification, the PET foils were exposed to the radiation of a laser-plasma extreme ultraviolet (EUV) source based on a double-stream gas-puff target. The emission of the plasma was focused onto the samples by means of a gold-plated ellipsoidal collector. The spectrum of the focused radiation covered the wavelength range from 9 to 70 nm. The PET samples were irradiated with the EUV pulses at a repetition rate of 10 Hz in a high vacuum. For control experiments, PET samples were also irradiated in air with the light of a 193 nm ArF-excimer laser. Different kinds of surface microstructures were obtained depending on the EUV or laser fluence and pulse number, including oriented wall- and ripple-type structures with lateral structure periods of a few µm. The surface morphology of polymer samples after the irradiation was investigated using a scanning electron microscope (SEM). Changes in chemical surface structure of the irradiated samples were investigated using X-ray photoelectron spectroscopy (XPS). We demonstrated that the cells show good adhesion and align along oriented wall- and ripple-type microstructures on PET surfaces produced by the EUV irradiation.

  7. MISR Ancillary Radiometric Product V002

    Data.gov (United States)

    National Aeronautics and Space Administration — MISR Ancillary Radiometric Product is composed of 4 files covering instrument characterization data, pre-flight calibration data, in-flight calibration data, and...

  8. Automatic Radiometric Normalization of Multitemporal Satellite Imagery

    DEFF Research Database (Denmark)

    Canty, Morton J.; Nielsen, Allan Aasbjerg; Schmidt, Michael

    2004-01-01

    The linear scale invariance of the multivariate alteration detection (MAD) transformation is used to obtain invariant pixels for automatic relative radiometric normalization of time series of multispectral data. Normalization by means of ordinary least squares regression method is compared...

  9. Absolute Radiometric Calibration of KOMPSAT-3A

    OpenAIRE

    Ahn, H. Y.; Shin, D. Y.; Kim, J. S.; Seo, D. C.; Choi, C. U.

    2016-01-01

    This paper presents a vicarious radiometric calibration of the Korea Multi-Purpose Satellite-3A (KOMPSAT-3A) performed by the Korea Aerospace Research Institute (KARI) and the Pukyong National University Remote Sensing Group (PKNU RSG) in 2015.The primary stages of this study are summarized as follows: (1) A field campaign to determine radiometric calibrated target fields was undertaken in Mongolia and South Korea. Surface reflectance data obtained in the campaign were input to a rad...

  10. A Sounding Rocket Mission Concept to Acquire High-Resolution Radiometric Spectra Spanning the 9 nm - 31 nm Wavelength Range

    Science.gov (United States)

    Krause, L. Habash; Cirtain, Jonathan; McGuirck, Michael; Pavelitz, Steven; Weber, Ed.; Winebarger, Amy

    2012-01-01

    When studying Solar Extreme Ultraviolet (EUV) emissions, both single-wavelength, two- dimensional (2D) spectroheliograms and multi-wavelength, one-dimensional (1D) line spectra are important, especially for a thorough understanding of the complex processes in the solar magnetized plasma from the base of the chromosphere through the corona. 2D image data are required for a detailed study of spatial structures, whereas radiometric (i.e., spectral) data provide information on relevant atomic excitation/ionization state densities (and thus temperature). Using both imaging and radiometric techniques, several satellite missions presently study solar dynamics in the EUV, including the Solar Dynamics Observatory (SDO), Hinode, and the Solar-Terrestrial Relations Observatory (STEREO). The EUV wavelengths of interest typically span 9 nm to 31 nm, with the shorter wavelengths being associated with the hottest features (e.g., intense flares and bright points) and the longer wavelengths associated with cooler features (e.g., coronal holes and filaments). Because the optical components of satellite instruments degrade over time, it is not uncommon to conduct sounding rocket underflights for calibration purposes. The authors have designed a radiometric sounding rocket payload that could serve as both a calibration underflight for and a complementary scientific mission to the upcoming Solar Ultraviolet Imager (SUVI) mission aboard the GOES-R satellite (scheduled for a 2015 launch). The challenge to provide quality radiometric line spectra over the 9-31 nm range covered by SUVI was driven by the multilayer coatings required to make the optical components, including mirrors and gratings, reflective over the entire range. Typically, these multilayers provide useful EUV reflectances over bandwidths of a few nm. Our solution to this problem was to employ a three-telescope system in which the optical components were coated with multilayers that spanned three wavelength ranges to cover

  11. Plasma-based EUV light source

    Science.gov (United States)

    Shumlak, Uri; Golingo, Raymond; Nelson, Brian A.

    2010-11-02

    Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

  12. Thorough characterization of an EUV mask

    Science.gov (United States)

    Mizuno, Hiroyuki; McIntyre, Gregory; Koay, Chiew-seng; Burkhardt, Martin; He, Long; Hartley, John; Johnson, Corbet; Raghunathan, Sudharshanan; Goldberg, Kenneth; Mochi, Iacopo; La Fontaine, Bruno; Wood, Obert

    2009-04-01

    We reported that we were successful in our 45nm technology node device demonstration in February 2008 and 22nm node technology node device patterning in February 2009 using ASML's Alpha Demo Tool (ADT).1, 2, 3 In order to insert extreme ultraviolet (EUV) lithography at the 15nm technology node and beyond, we have thoroughly characterized one EUV mask, a so-called NOVACD mask. In this paper, we report on three topics. The first topic is an analysis of line edge roughness (LER) using a mask Scanning Electron Microscope (SEM), an Atomic Force Microscope (AFM) and the Actinic Inspection Tool (AIT) to compare resist images printed with the ASML ADT. The results of the analysis show a good correlation between the mask AFM and the mask SEM measurements. However, the resist printing results for the isolated space patterns are slightly different. The cause of this discrepancy may be resist blur, image log slope and SEM image quality and so on. The second topic is an analysis of mask topography using an AFM and relative reflectivity of mirror and absorber surface using the AIT. The AFM data show 6 and 7 angstrom rms roughness for mirror and absorber, respectively. The reflectivity measurements show that the mirror reflects EUV light about 20 times higher than absorber. The last topic is an analysis of a 32nm technology node SRAM cell which includes a comparison of mask SEM image, AIT image, resist image and simulation results. The ADT images of the SRAM pattern were of high quality even though the mask patters were not corrected for OPC or any EUV-specific effects. Image simulation results were in good agreement with the printing results.

  13. Physical processes in EUV sources for microlithography

    Energy Technology Data Exchange (ETDEWEB)

    Banine, V Y; Swinkels, G H P M [ASML Netherlands B.V., De Run 6501, 5504DR Veldhoven (Netherlands); Koshelev, K N [Institute of Spectroscopy RAS (ISAN), Fizicheskaya 5, Troitsk 142190 (Russian Federation)

    2011-06-29

    The source is an integral part of an extreme ultraviolet lithography (EUVL) tool. Such a source, as well as the EUVL tool, has to fulfil very high demands both technical and cost oriented. The EUVL tool operates at a wavelength of 13.5 nm, which requires the following new developments. - The light production mechanism changes from conventional lamps and lasers to relatively high-temperature emitting plasmas. - The light transport, mainly refractive for deep ultraviolet (DUV), should be reflective for EUV. - The source specifications as derived from the customer requirements on wafer throughput mean that the output EUV source power has to be hundreds of watts. This in its turn means that tens to hundreds of kilowatts of dissipated power has to be managed in a relatively small volume. - In order to keep lithography costs as low as possible, the lifetime of the components should be as long as possible and at least of the order of thousands of hours. This poses a challenge for the sources, namely how to design and manufacture components robust enough to withstand the intense environment of high heat dissipation, flows of several keV ions as well as the atomic and particular debris within the source vessel. - As with all lithography tools, the imaging requirements demand a narrow illumination bandwidth. Absorption of materials at EUV wavelengths is extreme with extinguishing lengths of the order of tens of nanometres, so the balance between high transmission and spectral purity requires careful engineering. All together, EUV lithography sources present technological challenges in various fields of physics such as plasma, optics and material science. These challenges are being tackled by the source manufacturers and investigated extensively in the research facilities around the world. An overview of the published results on the topic as well as the analyses of the physical processes behind the proposed solutions will be presented in this paper. (topical review)

  14. EUV lithography: NXE platform performance overview

    Science.gov (United States)

    Peeters, Rudy; Lok, Sjoerd; Mallman, Joerg; van Noordenburg, Martijn; Harned, Noreen; Kuerz, Peter; Lowisch, Martin; van Setten, Eelco; Schiffelers, Guido; Pirati, Alberto; Stoeldraijer, Judon; Brandt, David; Farrar, Nigel; Fomenkov, Igor; Boom, Herman; Meiling, Hans; Kool, Ron

    2014-04-01

    The first NXE3300B systems have been qualified and shipped to customers. The NXE:3300B is ASML's third generation EUV system and has an NA of 0.33. It succeeds the NXE:3100 system (NA of 0.25), which has allowed customers to gain valuable EUV experience. Good overlay and imaging performance has been shown on the NXE:3300B system in line with 22nm device requirements. Full wafer CDU performance of Manufacturing. With the development of the MOPA+prepulse operation of the source, steps in power have been made, and with automated control the sources have been prepared to be used in a preproduction fab environment. Flexible pupil formation is under development for the NXE:3300B which will extend the usage of the system in HVM, and the resolution for the full system performance can be extended to 16nm. Further improvements in defectivity performance have been made, while in parallel full-scale pellicles are being developed. In this paper we will discuss the current NXE:3300B performance, its future enhancements and the recent progress in EUV source performance.

  15. Studies of Solar EUV Irradiance from SOHO

    Science.gov (United States)

    Floyd, Linton

    2002-01-01

    The Extreme Ultraviolet (EUV) irradiance central and first order channel time series (COC and FOC) from the Solar EUV Monitor aboard the Solar and Heliospheric observatory (SOHO) issued in early 2002 covering the time period 1/1/96-31/1201 were analyzed in terms of other solar measurements and indices. A significant solar proton effect in the first order irradiance was found and characterized. When this effect is removed, the two irradiance time series are almost perfectly correlated. Earlier studies have shown good correlation between the FOC and the Hall core-to-wing ratio and likewise, it was the strongest component of the COC. Analysis of the FOC showed dependence on the F10.7 radio flux. Analysis of the CDC signals showed additional dependences on F10.7 and the GOES x-ray fluxes. The SEM FOC was also well correlated with thein 30.4 nm channel of the SOHO EUV Imaging Telescope (EIT). The irradiance derived from all four EIT channels (30.4 nm, 17.1 nm, 28.4 nm, and 19.5 nm) showed better correlation with MgII than F10.7.

  16. EUV Doppler Imaging for CubeSat Platforms Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Mature the design and fabricate the Flare Initiation Doppler Imager (FIDI) instrument to demonstrate low-spacecraft-resource EUV technology (most notably,...

  17. Analytical techniques for mechanistic characterization of EUV photoresists

    Science.gov (United States)

    Grzeskowiak, Steven; Narasimhan, Amrit; Murphy, Michael; Ackerman, Christian; Kaminsky, Jake; Brainard, Robert L.; Denbeaux, Greg

    2017-03-01

    Extreme ultraviolet (EUV, 13.5 nm) lithography is the prospective technology for high volume manufacturing by the microelectronics industry. Significant strides towards achieving adequate EUV source power and availability have been made recently, but a limited rate of improvement in photoresist performance still delays the implementation of EUV. Many fundamental questions remain to be answered about the exposure mechanisms of even the relatively well understood chemically amplified EUV photoresists. Moreover, several groups around the world are developing revolutionary metal-based resists whose EUV exposure mechanisms are even less understood. Here, we describe several evaluation techniques to help elucidate mechanistic details of EUV exposure mechanisms of chemically amplified and metal-based resists. EUV absorption coefficients are determined experimentally by measuring the transmission through a resist coated on a silicon nitride membrane. Photochemistry can be evaluated by monitoring small outgassing reaction products to provide insight into photoacid generator or metal-based resist reactivity. Spectroscopic techniques such as thin-film Fourier transform infrared (FTIR) spectroscopy can measure the chemical state of a photoresist system pre- and post-EUV exposure. Additionally, electrolysis can be used to study the interaction between photoresist components and low energy electrons. Collectively, these techniques improve our current understanding of photomechanisms for several EUV photoresist systems, which is needed to develop new, better performing materials needed for high volume manufacturing.

  18. Novel EUV mask black border suppressing EUV and DUV OoB light reflection

    Science.gov (United States)

    Ito, Shin; Kodera, Yutaka; Fukugami, Norihito; Komizo, Toru; Maruyama, Shingo; Watanabe, Genta; Yoshida, Itaru; Kotani, Jun; Konishi, Toshio; Haraguchi, Takashi

    2016-05-01

    EUV lithography is the most promising technology for semiconductor device manufacturing of the 10nm node and beyond. The image border is a pattern free dark area around the die on the photomask serving as transition area between the parts of the mask that is shielded from the exposure light by the Reticle Masking (REMA) blades and the die. When printing a die at dense spacing on an EUV scanner, the reflection from the image border overlaps edges of neighboring dies, affecting CD and contrast in this area. This is related to the fact that EUV absorber stack reflects 1-3% of actinic EUV light. To reduce this effect several types of image border with reduced EUV reflectance (HBB) has been developed to eliminate EUV and DUV OOB light reflection by applying optical design technique and special micro-fabrication technique. A new test mask with HBB is fabricated without any degradation of mask quality according to the result of CD performance in the main pattern, defectivity and cleaning durability. The imaging performance for N10 imaging structures is demonstrated on NXE:3300B in collaboration with ASML. This result is compared to the imaging results obtained for a mask with the earlier developed BB, and HBB has achieved ~3x improvement; less than 0.2 nm CD changes are observed in the corners of the die. A CD uniformity budget including impact of OOB light in the die edge area is evaluated which shows that the OOB impact from HBB becomes comparable with other CDU contributors in this area. Finally, we state that HBB is a promising technology allowing for CD control at die edges.

  19. A Review of LIDAR Radiometric Processing: From Ad Hoc Intensity Correction to Rigorous Radiometric Calibration

    Directory of Open Access Journals (Sweden)

    Alireza G. Kashani

    2015-11-01

    Full Text Available In addition to precise 3D coordinates, most light detection and ranging (LIDAR systems also record “intensity”, loosely defined as the strength of the backscattered echo for each measured point. To date, LIDAR intensity data have proven beneficial in a wide range of applications because they are related to surface parameters, such as reflectance. While numerous procedures have been introduced in the scientific literature, and even commercial software, to enhance the utility of intensity data through a variety of “normalization”, “correction”, or “calibration” techniques, the current situation is complicated by a lack of standardization, as well as confusing, inconsistent use of terminology. In this paper, we first provide an overview of basic principles of LIDAR intensity measurements and applications utilizing intensity information from terrestrial, airborne topographic, and airborne bathymetric LIDAR. Next, we review effective parameters on intensity measurements, basic theory, and current intensity processing methods. We define terminology adopted from the most commonly-used conventions based on a review of current literature. Finally, we identify topics in need of further research. Ultimately, the presented information helps lay the foundation for future standards and specifications for LIDAR radiometric calibration.

  20. A Review of LIDAR Radiometric Processing: From Ad Hoc Intensity Correction to Rigorous Radiometric Calibration.

    Science.gov (United States)

    Kashani, Alireza G; Olsen, Michael J; Parrish, Christopher E; Wilson, Nicholas

    2015-11-06

    In addition to precise 3D coordinates, most light detection and ranging (LIDAR) systems also record "intensity", loosely defined as the strength of the backscattered echo for each measured point. To date, LIDAR intensity data have proven beneficial in a wide range of applications because they are related to surface parameters, such as reflectance. While numerous procedures have been introduced in the scientific literature, and even commercial software, to enhance the utility of intensity data through a variety of "normalization", "correction", or "calibration" techniques, the current situation is complicated by a lack of standardization, as well as confusing, inconsistent use of terminology. In this paper, we first provide an overview of basic principles of LIDAR intensity measurements and applications utilizing intensity information from terrestrial, airborne topographic, and airborne bathymetric LIDAR. Next, we review effective parameters on intensity measurements, basic theory, and current intensity processing methods. We define terminology adopted from the most commonly-used conventions based on a review of current literature. Finally, we identify topics in need of further research. Ultimately, the presented information helps lay the foundation for future standards and specifications for LIDAR radiometric calibration.

  1. A new radiometric unit of measure to characterize SWIR illumination

    Science.gov (United States)

    Richards, A.; Hübner, M.

    2017-05-01

    We propose a new radiometric unit of measure we call the `swux' to unambiguously characterize scene illumination in the SWIR spectral band between 0.8μm-1.8μm, where most of the ever-increasing numbers of deployed SWIR cameras (based on standard InGaAs focal plane arrays) are sensitive. Both military and surveillance applications in the SWIR currently suffer from a lack of a standardized SWIR radiometric unit of measure that can be used to definitively compare or predict SWIR camera performance with respect to SNR and range metrics. We propose a unit comparable to the photometric illuminance lux unit; see Ref. [1]. The lack of a SWIR radiometric unit becomes even more critical if one uses lux levels to describe SWIR sensor performance at twilight or even low light condition, since in clear, no-moon conditions in rural areas, the naturally-occurring SWIR radiation from nightglow produces a much higher irradiance than visible starlight. Thus, even well-intentioned efforts to characterize a test site's ambient illumination levels in the SWIR band may fail based on photometric instruments that only measure visible light. A study of this by one of the authors in Ref. [2] showed that the correspondence between lux values and total SWIR irradiance in typical illumination conditions can vary by more than two orders of magnitude, depending on the spectrum of the ambient background. In analogy to the photometric lux definition, we propose the SWIR irradiance equivalent `swux' level, derived by integration over the scene SWIR spectral irradiance weighted by a spectral sensitivity function S(λ), a SWIR analog of the V(λ) photopic response function.

  2. RADIOMETRIC TECHNIQUES IN HEAVY MINERAL EXPLORATION AND EXPLOITATION

    NARCIS (Netherlands)

    DEMEIJER, RJ; TANCZOS, IC; STAPEL, C

    1994-01-01

    In recent years the Environmental Research Group of the KVI has been developing a number of radiometric techniques that may be employed in mineral sand exploration. These techniques involve: radiometric fingerprinting for assessing sand provenances and mineralogical composition; thermoluminescence

  3. Mars Thermospheric Temperature Sensitivity to Solar EUV Forcing from the MAVEN EUV Monitor

    Science.gov (United States)

    Thiemann, Ed; Eparvier, Francis; Andersson, Laila; Pilinski, Marcin; Chamberlin, Phillip; Fowler, Christopher; MAVEN Extreme Ultraviolet Monitor Team, MAVEN Langmuir Probe and Waves Team

    2017-10-01

    Solar extreme ultraviolet (EUV) radiation is the primary heat source for the Mars thermosphere, and the primary source of long-term temperature variability. The Mars obliquity, dust cycle, tides and waves also drive thermospheric temperature variability; and it is important to quantify the role of each in order to understand processes in the upper atmosphere today and, ultimately, the evolution of Mars climate over time. Although EUV radiation is the dominant heating mechanism, accurately measuring the thermospheric temperature sensitivity to EUV forcing has remained elusive, in part, because Mars thermospheric temperature varies dramatically with latitude and local time (LT), ranging from 150K on the nightside to 300K on the dayside. It follows that studies of thermospheric variability must control for location.Instruments onboard the Mars Atmosphere and Volatile EvolutioN (MAVEN) orbiter have begun to characterize thermospheric temperature sensitivity to EUV forcing. Bougher et al. [2017] used measurements from the Imaging Ultraviolet Spectrograph (IUVS) and the Neutral Gas and Ion Mass Spectrometer (NGIMS) to characterize solar activity trends in the thermosphere with some success. However, aside from restricting measurements to solar zenith angles (SZAs) below 75 degrees, they were unable to control for latitude and LT because repeat-track observations from either instrument were limited or unavailable.The MAVEN EUV Monitor (EUVM) has recently demonstrated the capability to measure thermospheric density from 100 to 200 km with solar occultations of its 17-22 nm channel. These new density measurements are ideal for tracking the long-term thermospheric temperature variability because they are inherently constrained to either 06:00 or 18:00 LT, and the orbit has precessed to include a range of ecliptic latitudes, a number of which have been revisited multiple times over 2.5 years. In this study we present, for the first-time, measurements of thermospheric

  4. Surface roughness control by extreme ultraviolet (EUV) radiation

    Science.gov (United States)

    Ahad, Inam Ul; Obeidi, Muhannad Ahmed; Budner, Bogusław; Bartnik, Andrzej; Fiedorowicz, Henryk; Brabazon, Dermot

    2017-10-01

    Surface roughness control of polymeric materials is often desirable in various biomedical engineering applications related to biocompatibility control, separation science and surface wettability control. In this study, Polyethylene terephthalate (PET) polymer films were irradiated with Extreme ultraviolet (EUV) photons in nitrogen environment and investigations were performed on surface roughness modification via EUV exposure. The samples were irradiated at 3 mm and 4 mm distance from the focal spot to investigate the effect of EUV fluence on topography. The topography of the EUV treated PET samples were studied by AFM. The detailed scanning was also performed on the sample irradiated at 3 mm. It was observed that the average surface roughness of PET samples was increased from 9 nm (pristine sample) to 280 nm and 253 nm for EUV irradiated samples. Detailed AFM studies confirmed the presence of 1.8 mm wide period U-shaped channels in EUV exposed PET samples. The walls of the channels were having FWHM of about 0.4 mm. The channels were created due to translatory movements of the sample in horizontal and transverse directions during the EUV exposure. The increased surface roughness is useful for many applications. The nanoscale channels fabricated by EUV exposure could be interesting for microfluidic applications based on lab-on-a-chip (LOC) devices.

  5. A swirling flare-related EUV jet

    Science.gov (United States)

    Zhang, Q. M.; Ji, H. S.

    2014-01-01

    Aims: We report our observations of a swirling flare-related extreme-ultraviolet (EUV) jet on 2011 October 15 at the edge of NOAA active region 11314. Methods: We used the multiwavelength observations in the EUV passbands from the Atmospheric Imaging Assembly (AIA) aboard the Solar Dynamics Observatory (SDO). We extracted a wide slit along the jet axis and 12 thin slits across its axis to investigate the longitudinal motion and transverse rotation. We also used data from the Extreme-Ultraviolet Imager (EUVI) aboard the Solar TErrestrial RElations Observatory (STEREO) spacecraft to investigate the three-dimensional (3D) structure of the jet. Ground-based Hα images from the El Teide Observatory, a member of the Global Oscillation Network Group (GONG), provide a good opportunity to explore the relationship between the cool surge and the hot jet. Line-of-sight magnetograms from the Helioseismic and Magnetic Imager (HMI) aboard SDO enable us to study the magnetic evolution of the flare/jet event. We carried out potential-field extrapolation to calculate the magnetic configuration associated with the jet. Results: The onset of jet eruption coincided with the start time of the C1.6 flare impulsive phase. The initial velocity and acceleration of the longitudinal motion were 254 ± 10 km s-1 and -97 ± 5 m s-2, respectively. The jet presented helical structure and transverse swirling motion at the beginning of its eruption. The counter-clockwise rotation slowed down from an average velocity of ~122 km s-1 to ~80 km s-1. The interwinding thick threads of the jet untwisted into multiple thin threads during the rotation that lasted for one cycle with a period of ~7 min and an amplitude that increases from ~3.2 Mm at the bottom to ~11 Mm at the upper part. Afterwards, the curtain-like leading edge of the jet continued rising without rotation, leaving a dimming region behind, before falling back to the solar surface. The appearance/disappearance of dimming corresponded to the

  6. KERNEL MAD ALGORITHM FOR RELATIVE RADIOMETRIC NORMALIZATION

    Directory of Open Access Journals (Sweden)

    Y. Bai

    2016-06-01

    Full Text Available The multivariate alteration detection (MAD algorithm is commonly used in relative radiometric normalization. This algorithm is based on linear canonical correlation analysis (CCA which can analyze only linear relationships among bands. Therefore, we first introduce a new version of MAD in this study based on the established method known as kernel canonical correlation analysis (KCCA. The proposed method effectively extracts the non-linear and complex relationships among variables. We then conduct relative radiometric normalization experiments on both the linear CCA and KCCA version of the MAD algorithm with the use of Landsat-8 data of Beijing, China, and Gaofen-1(GF-1 data derived from South China. Finally, we analyze the difference between the two methods. Results show that the KCCA-based MAD can be satisfactorily applied to relative radiometric normalization, this algorithm can well describe the nonlinear relationship between multi-temporal images. This work is the first attempt to apply a KCCA-based MAD algorithm to relative radiometric normalization.

  7. Radiometric considerations for ocean color remote sensors

    Science.gov (United States)

    Gordon, Howard R.

    1990-01-01

    A methodology for determination of the effects of radiometric noise on the performance of ocean color sensors is developed and applied to the Coastal Zone Color Scanner on Nimbus 7 and the Moderate Resolution Imaging Spectrometer planned for the Earth Observing System.

  8. Based on Narcissus of radiometric calibration technology

    Science.gov (United States)

    Jin, Libing; Tang, Shaofan; Liu, Jianfeng; Peng, Honggang

    2015-08-01

    Thermal radiation is an inherent property of all objects. Generally, it is believed that the body, which temperature is above absolute zero, can keep generating infrared radiation. Infrared remote sensing, using of satellite-borne or airborne sensors, collects infrared information to identify the surface feature and inversion of surface parameters, temperature, etc. In order to get more accurately feature information, quantitative measurement is required. Infrared radiometric calibration is one of the key technologies of quantitative infrared remote sensing. Most high-resolution thermal imaging systems are cooling. For the infrared optical system which is having a cooled detector, there are some special phenomenons. Since the temperature of the detector's photosensitive surface is generally low, which is very different from system temperature, it is a very strong cold radiation source. Narcissus refers to the case that the cooled detector can "see" its own reflecting image, which may affect the image quality of infrared system seriously. But for radiometric calibration of satellite-borne infrared camera, it can sometimes take advantage of the narcissus instead of cold cryogenic radiometric calibration. In this paper, the use of narcissus to carry out radiometric calibration is summarized, and simulation results show the feasibility.

  9. EUV mask manufacturing readiness in the merchant mask industry

    Science.gov (United States)

    Green, Michael; Choi, Yohan; Ham, Young; Kamberian, Henry; Progler, Chris; Tseng, Shih-En; Chiou, Tsann-Bim; Miyazaki, Junji; Lammers, Ad; Chen, Alek

    2017-10-01

    As nodes progress into the 7nm and below regime, extreme ultraviolet lithography (EUVL) becomes critical for all industry participants interested in remaining at the leading edge. One key cost driver for EUV in the supply chain is the reflective EUV mask. As of today, the relatively few end users of EUV consist primarily of integrated device manufactures (IDMs) and foundries that have internal (captive) mask manufacturing capability. At the same time, strong and early participation in EUV by the merchant mask industry should bring value to these chip makers, aiding the wide-scale adoption of EUV in the future. For this, merchants need access to high quality, representative test vehicles to develop and validate their own processes. This business circumstance provides the motivation for merchants to form Joint Development Partnerships (JDPs) with IDMs, foundries, Original Equipment Manufacturers (OEMs) and other members of the EUV supplier ecosystem that leverage complementary strengths. In this paper, we will show how, through a collaborative supplier JDP model between a merchant and OEM, a novel, test chip driven strategy is applied to guide and validate mask level process development. We demonstrate how an EUV test vehicle (TV) is generated for mask process characterization in advance of receiving chip maker-specific designs. We utilize the TV to carry out mask process "stress testing" to define process boundary conditions which can be used to create Mask Rule Check (MRC) rules as well as serve as baseline conditions for future process improvement. We utilize Advanced Mask Characterization (AMC) techniques to understand process capability on designs of varying complexity that include EUV OPC models with and without sub-resolution assist features (SRAFs). Through these collaborations, we demonstrate ways to develop EUV processes and reduce implementation risks for eventual mass production. By reducing these risks, we hope to expand access to EUV mask capability for

  10. Impact of EUV SRAF on Bossung tilt

    Science.gov (United States)

    Wang, Yow-Gwo; Hsu, Stephen; Socha, Robert; Neureuther, Andy; Naulleau, Patrick

    2017-03-01

    Mask 3D (M3D) effects remain a significant challenge affecting EUV lithography (EUVL) imaging performance due to the comparable sizes of the mask and the EUV wavelength. Pre-compensation with the insertion of sub-resolution assist features (SRAFs) has been proposed as a solution to compensate M3D effects and improve the process window for advanced technology nodes. In this paper, we discuss the possible positive impact of SRAFs on Bossung tilt, and provide physical insight into the optical mechanisms at play enabling M3D effect mitigation. In particular, we consider an example isolated 2-bar (CD = 16 nm) pattern imaged under delta function dipole illumination. We compare the scattered order distribution and Bossung tilt with and without SRAFs. The results show that SRAFs actually introduce stronger effective single pole aberrations in the imaging process. However, the opposite impacts on Bossung tilt from each pole results in an overall improvement for dipole illumination. Reduced Bossung tilt and a 21% improvement of the overlapping process window are achieved by the insertion of asymmetric SRAFs into the 2-bar mask design.

  11. Electron beam inspection of 16nm HP node EUV masks

    Science.gov (United States)

    Shimomura, Takeya; Narukawa, Shogo; Abe, Tsukasa; Takikawa, Tadahiko; Hayashi, Naoya; Wang, Fei; Ma, Long; Lin, Chia-Wen; Zhao, Yan; Kuan, Chiyan; Jau, Jack

    2012-11-01

    EUV lithography (EUVL) is the most promising solution for 16nm HP node semiconductor device manufacturing and beyond. The fabrication of defect free EUV mask is one of the most challenging roadblocks to insert EUVL into high volume manufacturing (HVM). To fabricate and assure the defect free EUV masks, electron beam inspection (EBI) tool will be likely the necessary tool since optical mask inspection systems using 193nm and 199nm light are reaching a practical resolution limit around 16nm HP node EUV mask. For production use of EBI, several challenges and potential issues are expected. Firstly, required defect detection sensitivity is quite high. According to ITRS roadmap updated in 2011, the smallest defect size needed to detect is about 18nm for 15nm NAND Flash HP node EUV mask. Secondly, small pixel size is likely required to obtain the high sensitivity. Thus, it might damage Ru capped Mo/Si multilayer due to accumulated high density electron beam bombardments. It also has potential of elevation of nuisance defects and reduction of throughput. These challenges must be solved before inserting EBI system into EUV mask HVM line. In this paper, we share our initial inspection results for 16nm HP node EUV mask (64nm HP absorber pattern on the EUV mask) using an EBI system eXplore® 5400 developed by Hermes Microvision, Inc. (HMI). In particularly, defect detection sensitivity, inspectability and damage to EUV mask were assessed. As conclusions, we found that the EBI system has capability to capture 16nm defects on 64nm absorber pattern EUV mask, satisfying the sensitivity requirement of 15nm NAND Flash HP node EUV mask. Furthermore, we confirmed there is no significant damage to susceptible Ru capped Mo/Si multilayer. We also identified that low throughput and high nuisance defect rate are critical challenges needed to address for the 16nm HP node EUV mask inspection. The high nuisance defect rate could be generated by poor LWR and stitching errors during EB writing

  12. EUV laser produced and induced plasmas for nanolithography

    Science.gov (United States)

    Sizyuk, Tatyana; Hassanein, Ahmed

    2017-10-01

    EUV produced plasma sources are being extensively studied for the development of new technology for computer chips production. Challenging tasks include optimization of EUV source efficiency, producing powerful source in 2 percentage bandwidth around 13.5 nm for high volume manufacture (HVM), and increasing the lifetime of collecting optics. Mass-limited targets, such as small droplet, allow to reduce contamination of chamber environment and mirror surface damage. However, reducing droplet size limits EUV power output. Our analysis showed the requirement for the target parameters and chamber conditions to achieve 500 W EUV output for HVM. The HEIGHTS package was used for the simulations of laser produced plasma evolution starting from laser interaction with solid target, development and expansion of vapor/plasma plume with accurate optical data calculation, especially in narrow EUV region. Detailed 3D modeling of mix environment including evolution and interplay of plasma produced by lasers from Sn target and plasma produced by in-band and out-of-band EUV radiation in ambient gas, used for the collecting optics protection and cleaning, allowed predicting conditions in entire LPP system. Effect of these conditions on EUV photon absorption and collection was analyzed. This work is supported by the National Science Foundation, PIRE project.

  13. Free-electron laser emission architecture impact on EUV lithography

    Science.gov (United States)

    Hosler, Erik R.; Wood, Obert R.; Barletta, William A.

    2017-03-01

    Laser-produced plasma (LPP) EUV sources have demonstrated approximately 125 W at customer sites, establishing confidence in EUV lithography as a viable manufacturing technology. However, beyond the 7 nm technology node existing scanner/source technology must enable higher-NA imaging systems (requiring increased resist dose and providing half-field exposures) and/or EUV multi-patterning (requiring increased wafer throughput proportional to the number of exposure passes. Both development paths will require a substantial increase in EUV source power to maintain the economic viability of the technology, creating an opportunity for free-electron laser (FEL) EUV sources. FEL-based EUV sources offer an economic, high-power/single-source alternative to LPP EUV sources. Should free-electron lasers become the preferred next generation EUV source, the choice of FEL emission architecture will greatly affect its operational stability and overall capability. A near-term industrialized FEL is expected to utilize one of the following three existing emission architectures: (1) selfamplified spontaneous emission (SASE), (2) regenerative amplification (RAFEL), or (3) self-seeding (SS-FEL). Model accelerator parameters are put forward to evaluate the impact of emission architecture on FEL output. Then, variations in the parameter space are applied to assess the potential impact to lithography operations, thereby establishing component sensitivity. The operating range of various accelerator components is discussed based on current accelerator performance demonstrated at various scientific user facilities. Finally, comparison of the performance between the model accelerator parameters and the variation in parameter space provides a means to evaluate the potential emission architectures. A scorecard is presented to facilitate this evaluation and provide a framework for future FEL design and enablement for EUV lithography applications.

  14. Reintroducing radiometric surface temperature into the Penman-Monteith formulation

    DEFF Research Database (Denmark)

    Mallick, Kaniska; Bøgh, Eva; Trebs, Ivonne

    2015-01-01

    Here we demonstrate a novel method to physically integrate radiometric surface temperature (TR) into the Penman-Monteith (PM) formulation for estimating the terrestrial sensible and latent heat fluxes (H and λE) in the framework of a modified Surface Temperature Initiated Closure (STIC). It combi......Here we demonstrate a novel method to physically integrate radiometric surface temperature (TR) into the Penman-Monteith (PM) formulation for estimating the terrestrial sensible and latent heat fluxes (H and λE) in the framework of a modified Surface Temperature Initiated Closure (STIC......). It combines TR data with standard energy balance closure models for deriving a hybrid scheme that does not require parameterization of the surface (or stomatal) and aerodynamic conductances (gS and gB). STIC is formed by the simultaneous solution of four state equations and it uses TR as an additional data...... source for retrieving the “near surface” moisture availability (M) and the Priestley-Taylor coefficient (α). The performance of STIC is tested using high-temporal resolution TR observations collected from different international surface energy flux experiments in conjunction with corresponding net...

  15. Mrk421: EUVE observations from 1994 to 1997

    OpenAIRE

    Cagnoni, Ilaria; Fruscione, Antonella; Papadakis, Iossif E.

    1998-01-01

    We present spectral and timing analysis of all the data collected by the Extreme Ultraviolet Explorer for the BL Lac object Mrk 421 from 1994 to 1997. During these years Mrk 421 has been observed by EUVE 4 times with the DS/Spectrograph and 2 times with the imaging telescopes for a total of ~1.4 millions seconds. The total EUVE light curve seems to be smoothly varying on the long time-scale while on a shorter time-scale there is evidence of an EUVE flare correlated to the 1995 TeV flare. We a...

  16. Development of a novel closed EUV pellicle for EUVL manufacturing

    Science.gov (United States)

    Ono, Yosuke; Kohmura, Kazuo; Okubo, Atsushi; Taneichi, Daiki; Ishikawa, Hisako; Biyajima, Tsuneaki

    2016-09-01

    As for the EUV pellicle, closed pellicle structure with the filters which has fundamentally no penetration path of particles is needed to keep the clean reliability level of photomask equivalent to the current photolithography. We proposed a novel closed EUV pellicle equipped with filters which has not only the particle intrusion prevention but also the ventilation performance. Full-size closed EUV pellicle was fabricated by forming the vent holes in the Si border part and putting the wide filters on the top side of Si border. As the result, we experimentally confirmed the suppression of the membrane deflection under the practical pumping down condition.

  17. Development of Laser-Produced Tin Plasma-Based EUV Light Source Technology for HVM EUV Lithography

    Directory of Open Access Journals (Sweden)

    Junichi Fujimoto

    2012-01-01

    Full Text Available Since 2002, we have been developing a carbon dioxide (CO2 laser-produced tin (Sn plasma (LPP extreme ultraviolet (EUV light source, which is the most promising solution because of the 13.5 nm wavelength high power (>200 W light source for high volume manufacturing. EUV lithography is used for its high efficiency, power scalability, and spatial freedom around plasma. We believe that the LPP scheme is the most feasible candidate for the EUV light source for industrial use. We have several engineering data from our test tools, which include 93% Sn ionization rate, 98% Sn debris mitigation by a magnetic field, and 68% CO2 laser energy absorption rate. The way of dispersion of Sn by prepulse laser is key to improve conversion efficiency (CE. We focus on prepulsed laser pulsed duration. When we have optimized pulse duration from nanosecond to picosecond, we have obtained maximum 4.7% CE (CO2 laser to EUV; our previous data was 3.8% at 2 mJ EUV pulse energy. Based on these data we are developing our first light source as our product: “GL200E.” The latest data and the overview of EUV light source for the industrial EUV lithography are reviewed in this paper.

  18. Radiometric characterization of Landsat Collection 1 products

    Science.gov (United States)

    Micijevic, Esad; Haque, Md. Obaidul; Mishra, Nischal

    2017-01-01

    Landsat data in the U.S. Geological Survey (USGS) archive are being reprocessed to generate a tiered collection of consistently geolocated and radiometrically calibrated products that are suitable for time series analyses. With the implementation of the collection management, no major updates will be made to calibration of the Landsat sensors within a collection. Only calibration parameters needed to maintain the established calibration trends without an effect on derived environmental records will be regularly updated, while all other changes will be deferred to a new collection. This first collection, Collection 1, incorporates various radiometric calibration updates to all Landsat sensors including absolute and relative gains for Landsat 8 Operational Land Imager (OLI), stray light correction for Landsat 8 Thermal Infrared Sensor (TIRS), absolute gains for Landsat 4 and 5 Thematic Mappers (TM), recalibration of Landsat 1-5 Multispectral Scanners (MSS) to ensure radiometric consistency among different formats of archived MSS data, and a transfer of Landsat 8 OLI reflectance based calibration to all previous Landsat sensors. While all OLI/TIRS, ETM+ and majority of TM data have already been reprocessed to Collection 1, a completion of MSS and remaining TM data reprocessing is expected by the end of this year. It is important to note that, although still available for download from the USGS web pages, the products generated using the Pre-Collection processing do not benefit from the latest radiometric calibration updates. In this paper, we are assessing radiometry of solar reflective bands in Landsat Collection 1 products through analysis of trends in on-board calibrator and pseudo invariant site (PICS) responses.

  19. GEOMETRIC AND RADIOMETRIC EVALUATION OF RASAT IMAGES

    Directory of Open Access Journals (Sweden)

    A. Cam

    2016-06-01

    Full Text Available RASAT, the second remote sensing satellite of Turkey, was designed and assembled, and also is being operated by TÜBİTAK Uzay (Space Technologies Research Institute (Ankara. RASAT images in various levels are available free-of-charge via Gezgin portal for Turkish citizens. In this paper, the images in panchromatic (7.5 m GSD and RGB (15 m GSD bands in various levels were investigated with respect to its geometric and radiometric characteristics. The first geometric analysis is the estimation of the effective GSD as less than 1 pixel for radiometrically processed level (L1R of both panchromatic and RGB images. Secondly, 2D georeferencing accuracy is estimated by various non-physical transformation models (similarity, 2D affine, polynomial, affine projection, projective, DLT and GCP based RFM reaching sub-pixel accuracy using minimum 39 and maximum 52 GCPs. The radiometric characteristics are also investigated for 8 bits, estimating SNR between 21.8-42.2, and noise 0.0-3.5 for panchromatic and MS images for L1R when the sea is masked to obtain the results for land areas. The analysis show that RASAT images satisfies requirements for various applications. The research is carried out in Zonguldak test site which is mountainous and partly covered by dense forest and urban areas.

  20. Characterization of highly transient EUV emitting discharges

    Energy Technology Data Exchange (ETDEWEB)

    Mullen, Joost van der; Kieft, Erik; Broks, Bart [Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven (Netherlands)

    2006-07-15

    The method of disturbed Bilateral Relations (dBR) is used to characterize highly transient plasmas that are used for the generation of Extreme Ultra Violet (EUV), i.e. radiation with a wavelength around 13.5 nm. This dBR method relates equilibrium disturbing to equilibrium restoring processes and follows the degree of equilibrium departure from the global down to the elementary plasma-level. The study gives global values of the electron density and electron temperature. Moreover, it gives a method to construct the atomic state distribution function (ASDF). This ASDF, which is responsible for the spectrum generated by the discharge, is found to be far from equilibrium. There are two reasons for this: first, systems with high charge numbers radiate strongly, second the highly transient behaviour makes that the distribution over the various ionization stages lags behind the temperature evolution.

  1. The EUV spectrophotometer on Atmosphere Explorer.

    Science.gov (United States)

    Hinteregger, H. E.; Bedo, D. E.; Manson, J. E.

    1973-01-01

    An extreme ultraviolet (EUV) spectrophotometer for measurements of solar radiation at wavelengths ranging from 140 to 1850 A will be included in the payload of each of the three Atmosphere-Explorer (AE) missions, AE-C, -D, and -E. The instrument consists of 24 grating monochromators, 12 of which can be telecommanded either to execute 128-step scans each covering a relatively small section of the total spectrophotometer wavelength range or to maintain fixed (command-selected) wavelength positions. The remaining 12 nonscan monochromators operate at permanently fixed wavelengths and view only a small fraction of the solar disk except for one viewing the whole sun in H Lyman alpha. Ten of the 12 scan-capable monochromators also view the entire solar disk since their primary function is to measure the total fluxes independent of the distribution of sources across the solar disk.

  2. Critical challenges for EUV resist materials

    Energy Technology Data Exchange (ETDEWEB)

    Naulleau, Patrick P.; Anderson, Christopher N.; Baclea-an, Lorie-Mae; Denham, Paul; George, Simi; Goldberg, Kenneth A.; Jones, Gideon; McClinton, Brittany; Miyakawa, Ryan; Rekawa, Seno; Smith, Nathan

    2011-02-28

    Although Extreme ultraviolet lithography (EUVL) is now well into the commercialization phase, critical challenges remain in the development of EUV resist materials. The major issue for the 22-nm half-pitch node remains simultaneously meeting resolution, line-edge roughness (LER), and sensitivity requirements. Although several materials have met the resolution requirements, LER and sensitivity remain a challenge. As we move beyond the 22-nm node, however, even resolution remains a significant challenge. Chemically amplified resists have yet to demonstrate the required resolution at any speed or LER for 16-nm half pitch and below. Going to non-chemically amplified resists, however, 16-nm resolution has been achieved with a LER of 2 nm but a sensitivity of only 70 mJ/cm{sup 2}.

  3. The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials.

    Science.gov (United States)

    Closser, Kristina D; Ogletree, D Frank; Naulleau, Patrick; Prendergast, David

    2017-04-28

    In order to increase computation power and efficiency, the semiconductor industry continually strives to reduce the size of features written using lithographic techniques. The planned switch to a shorter wavelength extreme ultraviolet (EUV) source presents a challenge for the associated photoresists, which in their current manifestation show much poorer photoabsorption cross sections for the same dose. Here we consider the critical role that an inner-shell electronic structure might play in enhancing photoabsorption cross sections, which one can control by the choice of substituent elements in the photoresist. In order to increase the EUV sensitivity of current photoresists, it is critical to consider the inner-shell atomic structure of the elements that compose the materials. We validate this hypothesis using a series of halogenated organic molecules, which all have similar valence structures, but differ in the character of their semi-core and deep valence levels. Using various implementations of time-dependent density functional theory, the absorption cross sections are computed for the model systems of CH3X, X = H, OH, F, Cl, Br, I, as well as a representative polymer fragment: 2-methyl-phenol and its halogenated analogues. Iodine has a particularly high cross section in the EUV range, which is due to delayed absorption by its 4d electrons. The computational results are compared to standard database values and experimental data when available. Generally we find that the states that dominate the EUV oscillator strength are generated by excitations of deep valence or semi-core electrons, which are primarily atomic-like and relatively insensitive to the specific molecular structure.

  4. Gadolinium EUV Multilayers for Solar Imaging Near 60 nm Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop and commercialize a new class of extreme ultraviolet (EUV) multilayer coatings containing the rare-earth element gadolinium (Gd), designed as...

  5. AlN Based Extreme Ultraviolet (EUV) Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — This Phase I project is to investigate the feasibility for achieving EUV detectors for space applications by exploiting the ultrahigh bandgap semiconductor - AlN. We...

  6. Film quantum yields of EUV& ultra-high PAG photoresists

    Energy Technology Data Exchange (ETDEWEB)

    Hassanein, Elsayed; Higgins, Craig; Naulleau, Patrick; Matyi, Richard; Gallatin, Greg; Denbeaux, Gregory; Antohe, Alin; Thackery, Jim; Spear, Kathleen; Szmanda, Charles; Anderson, Christopher N.; Niakoula, Dimitra; Malloy, Matthew; Khurshid, Anwar; Montgomery, Cecilia; Piscani, Emil C.; Rudack, Andrew; Byers, Jeff; Ma, Andy; Dean, Kim; Brainard, Robert

    2008-01-10

    Base titration methods are used to determine C-parameters for three industrial EUV photoresist platforms (EUV-2D, MET-2D, XP5496) and twenty academic EUV photoresist platforms. X-ray reflectometry is used to measure the density of these resists, and leads to the determination of absorbance and film quantum yields (FQY). Ultrahigh levels ofPAG show divergent mechanisms for production of photo acids beyond PAG concentrations of 0.35 moles/liter. The FQY of sulfonium PAGs level off, whereas resists prepared with iodonium PAG show FQY s that increase beyond PAG concentrations of 0.35 moles/liter, reaching record highs of 8-13 acids generatedlEUV photons absorbed.

  7. Design requirements for a stand alone EUV interferometer

    Science.gov (United States)

    Michallon, Ph.; Constancias, C.; Lagrange, A.; Dalzotto, B.

    2008-03-01

    EUV lithography is expected to be inserted for the 32/22 nm nodes with possible extension below. EUV resist availability remains one of the main issues to be resolved. There is an urgent need to provide suitable tools to accelerate resist development and to achieve resolution, LER and sensitivity specifications simultaneously. An interferometer lithography tool offers advantages regarding conventional EUV exposure tool. It allows the evaluation of resists, free from the deficiencies of optics and mask which are limiting the achieved resolution. Traditionally, a dedicated beam line from a synchrotron, with limited access, is used as a light source in EUV interference lithography. This paper identifies the technology locks to develop a stand alone EUV interferometer using a compact EUV source. It will describe the theoretical solutions adopted and especially look at the feasibility according to available technologies. EUV sources available on the market have been evaluated in terms of power level, source size, spatial coherency, dose uniformity, accuracy, stability and reproducibility. According to the EUV source characteristics, several optic designs were studied (simple or double gratings). For each of these solutions, the source and collimation optic specifications have been determined. To reduce the exposure time, a new grating technology will also be presented allowing to significantly increasing the transmission system efficiency. The optical grating designs were studied to allow multi-pitch resolution print on the same exposure without any focus adjustment. Finally micro mechanical system supporting the gratings was studied integrating the issues due to vacuum environment, alignment capability, motion precision, automation and metrology to ensure the needed placement control between gratings and wafer. A similar study was carried out for the collimation-optics mechanical support which depends on the source characteristics.

  8. Optical and EUV light curves of dwarf nova outbursts

    Energy Technology Data Exchange (ETDEWEB)

    Mauche, C W; Mattei, J A; Bateson, F M

    2000-11-15

    We combine AAVSO and VSS/RASNZ optical and Extreme Ultraviolet Explorer EUV light curves of dwarf novae in outburst to place constraints on the nature of dwarf nova outbursts. From the observed optical-EUV time delays of {approx} 0.75-1.5 days, we show that the propagation velocity of the dwarf nova instability heating wave is {approx} 3 km s{sup -1}.

  9. Consequences of high-frequency operation on EUV source efficiency

    Science.gov (United States)

    Sizyuk, Tatyana

    2017-08-01

    A potential problem of future extreme ultraviolet (EUV) sources, required for high volume manufacture regimes, can be related to the contamination of the chamber environment by products of preceding laser pulse/droplet interactions. Implementation of high, 100 kHz and higher, repetition rate of EUV sources using Sn droplets ignited with laser pulses can cause high accumulation of tin in the chamber in the form of vapor, fine mist, or fragmented clusters. In this work, the effects of the residual tin accumulation in the EUV chamber in dependence on laser parameters and mitigation system efficiency were studied. The effect of various pressures of tin vapor on the CO2 and Nd:YAG laser beam propagation and on the size, the intensity, and the resulting efficiency of the EUV sources was analyzed. The HEIGHTS 3D package was used for this analysis to study the effect of residual background pressure and spatial distribution on EUV photon emission and collection. It was found that background pressure in the range of 1-5 Pa does not significantly influence the EUV source produced by CO2 lasers. A larger volume with this pressure condition, however, can reduce the efficiency of the source. However, an optimized volume of mix with proper density could increase the efficiency of the sources produced by CO2 lasers.

  10. Development Of Teal Ruby Experiment Radiometric Test Requirements

    Science.gov (United States)

    Birtley, W. B.; Kowallis, O. K.; Molnar, L. A.; Wright, T. J.

    1981-12-01

    The Teal Ruby Experiment (TRE) sensor presents unique problems to radiometric performance testing and calibration of a mosaic infrared sensor because of the large number of resolution elements; the wide range of spectral, temporal, and flux level operating regions; and the cryogenic operating conditions. This paper contains a summary of the Teal Ruby test facilities and requirements at the infrared charge-coupled device (IRCCD) detector array, zone assembly, focal plane assembly, and sensor levels. Automated test facilities and capabilities are presented to highlight the development requirements and approaches to testing. Key issues concern the complexity of testing, selection of test parameters, commonality of test algorithms and data presentation, data needs for acceptance testing, optimization and integration, and test equipment standards for accuracy, operating range, and contamination control.

  11. Classification and printability of EUV mask defects from SEM images

    Science.gov (United States)

    Cho, Wonil; Price, Daniel; Morgan, Paul A.; Rost, Daniel; Satake, Masaki; Tolani, Vikram L.

    2017-10-01

    Classification and Printability of EUV Mask Defects from SEM images EUV lithography is starting to show more promise for patterning some critical layers at 5nm technology node and beyond. However, there still are many key technical obstacles to overcome before bringing EUV Lithography into high volume manufacturing (HVM). One of the greatest obstacles is manufacturing defect-free masks. For pattern defect inspections in the mask-shop, cutting-edge 193nm optical inspection tools have been used so far due to lacking any e-beam mask inspection (EBMI) or EUV actinic pattern inspection (API) tools. The main issue with current 193nm inspection tools is the limited resolution for mask dimensions targeted for EUV patterning. The theoretical resolution limit for 193nm mask inspection tools is about 60nm HP on masks, which means that main feature sizes on EUV masks will be well beyond the practical resolution of 193nm inspection tools. Nevertheless, 193nm inspection tools with various illumination conditions that maximize defect sensitivity and/or main-pattern modulation are being explored for initial EUV defect detection. Due to the generally low signal-to-noise in the 193nm inspection imaging at EUV patterning dimensions, these inspections often result in hundreds and thousands of defects which then need to be accurately reviewed and dispositioned. Manually reviewing each defect is difficult due to poor resolution. In addition, the lack of a reliable aerial dispositioning system makes it very challenging to disposition for printability. In this paper, we present the use of SEM images of EUV masks for higher resolution review and disposition of defects. In this approach, most of the defects detected by the 193nm inspection tools are first imaged on a mask SEM tool. These images together with the corresponding post-OPC design clips are provided to KLA-Tencor's Reticle Decision Center (RDC) platform which provides ADC (Automated Defect Classification) and S2A (SEM

  12. Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes

    CERN Document Server

    Dolgov, A; Abrikosov, A; Snegirev, E; Krivtsun, V M; Lee, C J; Bijkerk, F

    2014-01-01

    An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris mitigation system; collection and filtering optics; and an UHV experimental chamber, equipped with optical and plasma diagnostics. The first results, identifying the physical parameters and evolution of EUV-induced plasmas are presented. Finally, the applicability and accuracy of the in situ diagnostics is briefly discussed.

  13. Evaluation on Radiometric Capability of Chinese Optical Satellite Sensors.

    Science.gov (United States)

    Yang, Aixia; Zhong, Bo; Wu, Shanlong; Liu, Qinhuo

    2017-01-22

    The radiometric capability of on-orbit sensors should be updated on time due to changes induced by space environmental factors and instrument aging. Some sensors, such as Moderate Resolution Imaging Spectroradiometer (MODIS), have onboard calibrators, which enable real-time calibration. However, most Chinese remote sensing satellite sensors lack onboard calibrators. Their radiometric calibrations have been updated once a year based on a vicarious calibration procedure, which has affected the applications of the data. Therefore, a full evaluation of the sensors' radiometric capabilities is essential before quantitative applications can be made. In this study, a comprehensive procedure for evaluating the radiometric capability of several Chinese optical satellite sensors is proposed. In this procedure, long-term radiometric stability and radiometric accuracy are the two major indicators for radiometric evaluation. The radiometric temporal stability is analyzed by the tendency of long-term top-of-atmosphere (TOA) reflectance variation; the radiometric accuracy is determined by comparison with the TOA reflectance from MODIS after spectrally matching. Three Chinese sensors including the Charge-Coupled Device (CCD) camera onboard Huan Jing 1 satellite (HJ-1), as well as the Visible and Infrared Radiometer (VIRR) and Medium-Resolution Spectral Imager (MERSI) onboard the Feng Yun 3 satellite (FY-3) are evaluated in reflective bands based on this procedure. The results are reasonable, and thus can provide reliable reference for the sensors' application, and as such will promote the development of Chinese satellite data.

  14. Absolute Radiometric Calibration of KOMPSAT-3A

    Science.gov (United States)

    Ahn, H. Y.; Shin, D. Y.; Kim, J. S.; Seo, D. C.; Choi, C. U.

    2016-06-01

    This paper presents a vicarious radiometric calibration of the Korea Multi-Purpose Satellite-3A (KOMPSAT-3A) performed by the Korea Aerospace Research Institute (KARI) and the Pukyong National University Remote Sensing Group (PKNU RSG) in 2015.The primary stages of this study are summarized as follows: (1) A field campaign to determine radiometric calibrated target fields was undertaken in Mongolia and South Korea. Surface reflectance data obtained in the campaign were input to a radiative transfer code that predicted at-sensor radiance. Through this process, equations and parameters were derived for the KOMPSAT-3A sensor to enable the conversion of calibrated DN to physical units, such as at-sensor radiance or TOA reflectance. (2) To validate the absolute calibration coefficients for the KOMPSAT-3A sensor, we performed a radiometric validation with a comparison of KOMPSAT-3A and Landsat-8 TOA reflectance using one of the six PICS (Libya 4). Correlations between top-of-atmosphere (TOA) radiances and the spectral band responses of the KOMPSAT-3A sensors at the Zuunmod, Mongolia and Goheung, South Korea sites were significant for multispectral bands. The average difference in TOA reflectance between KOMPSAT-3A and Landsat-8 image over the Libya 4, Libya site in the red-green-blue (RGB) region was under 3%, whereas in the NIR band, the TOA reflectance of KOMPSAT-3A was lower than the that of Landsat-8 due to the difference in the band passes of two sensors. The KOMPSAT-3Aensor includes a band pass near 940 nm that can be strongly absorbed by water vapor and therefore displayed low reflectance. Toovercome this, we need to undertake a detailed analysis using rescale methods, such as the spectral bandwidth adjustment factor.

  15. Absolute Radiometric Calibration of KOMPSAT-3A

    Directory of Open Access Journals (Sweden)

    H. Y. Ahn

    2016-06-01

    Full Text Available This paper presents a vicarious radiometric calibration of the Korea Multi-Purpose Satellite-3A (KOMPSAT-3A performed by the Korea Aerospace Research Institute (KARI and the Pukyong National University Remote Sensing Group (PKNU RSG in 2015.The primary stages of this study are summarized as follows: (1 A field campaign to determine radiometric calibrated target fields was undertaken in Mongolia and South Korea. Surface reflectance data obtained in the campaign were input to a radiative transfer code that predicted at-sensor radiance. Through this process, equations and parameters were derived for the KOMPSAT-3A sensor to enable the conversion of calibrated DN to physical units, such as at-sensor radiance or TOA reflectance. (2 To validate the absolute calibration coefficients for the KOMPSAT-3A sensor, we performed a radiometric validation with a comparison of KOMPSAT-3A and Landsat-8 TOA reflectance using one of the six PICS (Libya 4. Correlations between top-of-atmosphere (TOA radiances and the spectral band responses of the KOMPSAT-3A sensors at the Zuunmod, Mongolia and Goheung, South Korea sites were significant for multispectral bands. The average difference in TOA reflectance between KOMPSAT-3A and Landsat-8 image over the Libya 4, Libya site in the red-green-blue (RGB region was under 3%, whereas in the NIR band, the TOA reflectance of KOMPSAT-3A was lower than the that of Landsat-8 due to the difference in the band passes of two sensors. The KOMPSAT-3Aensor includes a band pass near 940 nm that can be strongly absorbed by water vapor and therefore displayed low reflectance. Toovercome this, we need to undertake a detailed analysis using rescale methods, such as the spectral bandwidth adjustment factor.

  16. Optical Imaging and Radiometric Modeling and Simulation

    Science.gov (United States)

    Ha, Kong Q.; Fitzmaurice, Michael W.; Moiser, Gary E.; Howard, Joseph M.; Le, Chi M.

    2010-01-01

    OPTOOL software is a general-purpose optical systems analysis tool that was developed to offer a solution to problems associated with computational programs written for the James Webb Space Telescope optical system. It integrates existing routines into coherent processes, and provides a structure with reusable capabilities that allow additional processes to be quickly developed and integrated. It has an extensive graphical user interface, which makes the tool more intuitive and friendly. OPTOOL is implemented using MATLAB with a Fourier optics-based approach for point spread function (PSF) calculations. It features parametric and Monte Carlo simulation capabilities, and uses a direct integration calculation to permit high spatial sampling of the PSF. Exit pupil optical path difference (OPD) maps can be generated using combinations of Zernike polynomials or shaped power spectral densities. The graphical user interface allows rapid creation of arbitrary pupil geometries, and entry of all other modeling parameters to support basic imaging and radiometric analyses. OPTOOL provides the capability to generate wavefront-error (WFE) maps for arbitrary grid sizes. These maps are 2D arrays containing digital sampled versions of functions ranging from Zernike polynomials to combination of sinusoidal wave functions in 2D, to functions generated from a spatial frequency power spectral distribution (PSD). It also can generate optical transfer functions (OTFs), which are incorporated into the PSF calculation. The user can specify radiometrics for the target and sky background, and key performance parameters for the instrument s focal plane array (FPA). This radiometric and detector model setup is fairly extensive, and includes parameters such as zodiacal background, thermal emission noise, read noise, and dark current. The setup also includes target spectral energy distribution as a function of wavelength for polychromatic sources, detector pixel size, and the FPA s charge

  17. Analysis of the Radiometric Response of Orange Tree Crown in Hyperspectral Uav Images

    Science.gov (United States)

    Imai, N. N.; Moriya, E. A. S.; Honkavaara, E.; Miyoshi, G. T.; de Moraes, M. V. A.; Tommaselli, A. M. G.; Näsi, R.

    2017-10-01

    High spatial resolution remote sensing images acquired by drones are highly relevant data source in many applications. However, strong variations of radiometric values are difficult to correct in hyperspectral images. Honkavaara et al. (2013) presented a radiometric block adjustment method in which hyperspectral images taken from remotely piloted aerial systems - RPAS were processed both geometrically and radiometrically to produce a georeferenced mosaic in which the standard Reflectance Factor for the nadir is represented. The plants crowns in permanent cultivation show complex variations since the density of shadows and the irradiance of the surface vary due to the geometry of illumination and the geometry of the arrangement of branches and leaves. An evaluation of the radiometric quality of the mosaic of an orange plantation produced using images captured by a hyperspectral imager based on a tunable Fabry-Pérot interferometer and applying the radiometric block adjustment method, was performed. A high-resolution UAV based hyperspectral survey was carried out in an orange-producing farm located in Santa Cruz do Rio Pardo, state of São Paulo, Brazil. A set of 25 narrow spectral bands with 2.5 cm of GSD images were acquired. Trend analysis was applied to the values of a sample of transects extracted from plants appearing in the mosaic. The results of these trend analysis on the pixels distributed along transects on orange tree crown showed the reflectance factor presented a slightly trend, but the coefficients of the polynomials are very small, so the quality of mosaic is good enough for many applications.

  18. ANALYSIS OF THE RADIOMETRIC RESPONSE OF ORANGE TREE CROWN IN HYPERSPECTRAL UAV IMAGES

    Directory of Open Access Journals (Sweden)

    N. N. Imai

    2017-10-01

    Full Text Available High spatial resolution remote sensing images acquired by drones are highly relevant data source in many applications. However, strong variations of radiometric values are difficult to correct in hyperspectral images. Honkavaara et al. (2013 presented a radiometric block adjustment method in which hyperspectral images taken from remotely piloted aerial systems – RPAS were processed both geometrically and radiometrically to produce a georeferenced mosaic in which the standard Reflectance Factor for the nadir is represented. The plants crowns in permanent cultivation show complex variations since the density of shadows and the irradiance of the surface vary due to the geometry of illumination and the geometry of the arrangement of branches and leaves. An evaluation of the radiometric quality of the mosaic of an orange plantation produced using images captured by a hyperspectral imager based on a tunable Fabry-Pérot interferometer and applying the radiometric block adjustment method, was performed. A high-resolution UAV based hyperspectral survey was carried out in an orange-producing farm located in Santa Cruz do Rio Pardo, state of São Paulo, Brazil. A set of 25 narrow spectral bands with 2.5 cm of GSD images were acquired. Trend analysis was applied to the values of a sample of transects extracted from plants appearing in the mosaic. The results of these trend analysis on the pixels distributed along transects on orange tree crown showed the reflectance factor presented a slightly trend, but the coefficients of the polynomials are very small, so the quality of mosaic is good enough for many applications.

  19. High-performance next-generation EUV lithography light source

    Science.gov (United States)

    Choi, Peter; Zakharov, Sergey V.; Aliaga-Rossel, Raul; Benali, Otman; Duffy, Grainne; Sarroukh, Ouassima; Wyndham, Edmund; Zakharov, Vasily S.

    2009-03-01

    EUVL solution for HVM at the 22 nm node requires a high power long-term EUV source operation with hundreds of watts at the intermediate focus output. EUV mask blank and mask defects inspections require at-wavelength tools with high brightness. Theoretical analysis with a 2-D radiation MHD code Z* has been performed to address key issues in EUV plasma sources with radiation transfer. The study shows that self-absorption defines the limiting brightness of a single EUV source, which cannot meet the requirements of the HVM tool with high efficiency and is not sufficient for critical metrology applications, given the limiting etendue of the optics. It is shown that the required irradiance can be achieved by spatial multiplexing, using multiple small sources. We present here details of the study, as well as experimental results from a novel EUV light source with an intrinsic photon collector demonstrating high brightness, the i-SoCoMo concept, where an impulse micro discharge plasma source is integrated to a photon collector based on an active plasma structure. The small physical size and low etendue properties of the i-SoCoMo unit allows a large number of such sources to be put together in one physical package and be operated in a multiplexed fashion to meet necessary power requirements.

  20. Energy deposition and charging in EUV lithography: Monte Carlo studies

    Science.gov (United States)

    Wiseheart, Liam; Narasimhan, Amrit; Grzeskowiak, Steven; Neisser, Mark; Ocola, Leonidas E.; Denbeaux, Greg; Brainard, Robert L.

    2016-03-01

    EUV photons expose photoresists by complex interactions including photoionization to create primary electrons (~80 eV), and subsequent ionization steps that create secondary electrons (10-60 eV). The mechanisms by which these electrons interact with resist components are key to optimizing the performance of EUV resists and EUV lithography as a whole. As these photoelectrons and secondary electrons are created, they deposit their energy within the resist, creating ionized atoms along the way. Because many photo- and secondary electrons can escape the resist through the surface, resists can become charged. Charging and energy deposition profiles within the resist may play a role in the sensitivity and line-edge roughness of EUV resists. In this paper, we present computational analysis of charging-influenced electron behavior in photoresists using LESiS (Low energy Electron Scattering in Solids), a software developed to understand and model electron-matter interactions. We discuss the implementation of charge and tracking and the model used to influence electron behavior. We also present the potential effects of charging on EUV and electron beam lithography by investigating secondary electron blur in charging and non-charging models.

  1. The Influence of Colour on Radiometric Performances of Agricultural Nets

    NARCIS (Netherlands)

    Castellano, S.; Hemming, S.; Russo, G.

    2008-01-01

    The whole construction parameters of the net, combined with the shape of the structure, the position of the sun and the sky conditions affect the radiometric performance of the permeable covering system. The radiometric properties of the permeable membrane influence the quality of the agricultural

  2. Assessment of Aero-radiometric Data of Southern Anambra Basin ...

    African Journals Online (AJOL)

    ... value up to 5.43 μWm-3. The highest value of the radiogenic heat production in this basin has a value of 5.43 μWm-3 around Aimeke and Ogobia. The airborne total radiometric count of radio-elements and radiogenic heat maps were produced. Key Words: Aero-radiometric; Radiogenic Heat; Anambra Basin; Geothermal ...

  3. Statistical simulation of photoresists at EUV and ArF

    Science.gov (United States)

    Biafore, John J.; Smith, Mark D.; Mack, Chris A.; Thackeray, James W.; Gronheid, Roel; Robertson, Stewart A.; Graves, Trey; Blankenship, David

    2009-03-01

    Requirements of resist modeling strategies for EUV and low-k1 ArF nanolithography continue to become more stringent. Resist designers are consistently faced with the task of reducing exposure dose and line roughness while simultaneously improving exposure latitude, depth-of-focus and ultimate resolution. In this work, we briefly discuss a next-generation resist model for the prediction of statistical resist responses such as line-edge roughness, line-width roughness and CD variability, as well as base lithographic responses such as exposure latitude. The model's parameterized fit to experimental data from a state-of-the art polymer-bound PAG resist irradiated at ArF and EUV will be shown. The probabilistic computation of acid generation at ArF and EUV will be discussed. The factors influencing the hypothesized primary cause of resist roughness, acid shot noise, are discussed.

  4. EUV-multilayers on grating-like topographies

    Energy Technology Data Exchange (ETDEWEB)

    van Boogaard, A. J. R.; Louis, E.; Goldberg, K. A.; Mochi, I.; Bijkerk, F.

    2010-03-12

    In this study, multilayer morphology near the key anomalies in grating-like structures, namely sharp step-edges and steep walls, are examined. Different deposition schemes are employed. Based on cross section TEM analysis an explanatory model describing the morphology of the successive layers is developed. A further insight into the periodicity and the general performance of the multilayer is obtained by EUV microscopy. The main distortions in multilayer structure and hence EUV performance are found to be restricted to a region within a few hundred nanometers from the anomalies, which is very small compared to the proposed grating period (50-100 {micro}m). These multilayer coated blazed gratings can thus be considered a viable option for spectral purity enhancement of EUV light sources.

  5. LPP EUV source readiness for NXE 3300B

    Science.gov (United States)

    Brandt, David C.; Fomenkov, Igor V.; Farrar, Nigel R.; La Fontaine, Bruno; Myers, David W.; Brown, Daniel J.; Ershov, Alex I.; Böwering, Norbert R.; Riggs, Daniel J.; Rafac, Robert J.; De Dea, Silvia; Peeters, Rudy; Meiling, Hans; Harned, Noreen; Smith, Daniel; Pirati, Alberto; Kazinczi, Robert

    2014-03-01

    Laser produced plasma (LPP) light sources have been developed as the primary approach for EUV scanner imaging of circuit features in sub-20nm devices in high volume manufacturing (HVM). This paper provides a review of development progress and readiness status for the LPP extreme-ultra-violet (EUV) source. We present the latest performance results from second generation sources, including Prepulse operation for high power, collector protection for long lifetime and low cost of ownership, and dose stability for high yield. Increased EUV power is provided by a more powerful drive laser and the use of Prepulse operation for higher conversion efficiciency. Advanced automation and controls have been developed to provide the power and energy stability performance required during production fab operation. We will also discuss lifetesting of the collector in Prepulse mode and show the ability of the debris mitigation systems to keep the collector multi-layer coating free from damage and maintain high reflectivity.

  6. Lithographic performance evaluation of a contaminated EUV mask after cleaning

    Energy Technology Data Exchange (ETDEWEB)

    George, Simi; Naulleau, Patrick; Okoroanyanwu, Uzodinma; Dittmar, Kornelia; Holfeld, Christian; Wuest, Andrea

    2009-11-16

    The effect of surface contamination and subsequent mask surface cleaning on the lithographic performance of a EUV mask is investigated. SEMATECH's Berkeley micro-field exposure tool (MET) printed 40 nm and 50 nm line and space (L/S) patterns are evaluated to compare the performance of a contaminated and cleaned mask to an uncontaminated mask. Since the two EUV masks have distinct absorber architectures, optical imaging models and aerial image calculations were completed to determine any expected differences in performance. Measured and calculated Bossung curves, process windows, and exposure latitudes for the two sets of L/S patterns are compared to determine how the contamination and cleaning impacts the lithographic performance of EUV masks. The observed differences in mask performance are shown to be insignificant, indicating that the cleaning process did not appreciably affect mask performance.

  7. EUV mask reflectivity measurements with micro-scale spatial resolution

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Rekawa, Senajith B.; Kemp, Charles D.; Barty, Anton; Anderson, Erik; Kearney, Patrick; Han, Hakseung

    2008-02-01

    The effort to produce defect-free mask blanks for EUV lithography relies on increasing the detection sensitivity of advanced mask inspection tools, operating at several wavelengths. They describe the unique measurement capabilities of a prototype actinic (EUV) wavelength microscope that is capable of detecting small defects and reflectivity changes that occur on the scale of microns to nanometers. The defects present in EUV masks can appear in many well-known forms: as particles that cause amplitude or phase variations in the reflected field; as surface contamination that reduces reflectivity and contrast; and as damage from inspection and use that reduces the reflectivity of the multilayer coating. This paper presents an overview of several topics where scanning actinic inspection makes a unique contribution to EUVL research. They describe the role of actinic scanning inspection in defect repair studies, observations of laser damage, actinic inspection following scanning electron microscopy, and the detection of both native and programmed defects.

  8. Collecting EUV mask images through focus by wavelength tuning

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Mochi, Iacopo; Huh, Sungmin

    2009-02-23

    Using an extreme-ultraviolet (EUV) microscope to produce high-quality images of EUV reticles, we have developed a new wavelength tuning method to acquire through-focus data series with a higher level of stability and repeatability than was previously possible. We utilize the chromatic focal-length dependence of a diffractive Fresnel zoneplate objective lens, and while holding the mask sample mechanically still, we tune the wavelength through a narrow range, in small steps. In this paper, we demonstrate the method and discuss the relative advantages that this data collection technique affords.

  9. Precision radiometric surface temperature (PRST) sensor

    Science.gov (United States)

    Daly, James T.; Roberts, Carson; Bodkin, Andrew; Sundberg, Robert; Beaven, Scott; Weinheimer, Jeffrey

    2013-05-01

    There is a need for a Precision Radiometric Surface Temperature (PRST) measurement capability that can achieve noncontact profiling of a sample's surface temperature when heated dynamically during laser processing, aerothermal heating or metal cutting/machining. Target surface temperature maps within and near the heated spot provide critical quantitative diagnostic data for laser-target coupling effectiveness and laser damage assessment. In the case of metal cutting, this type of measurement provides information on plastic deformation in the primary shear zone where the cutting tool is in contact with the workpiece. The challenge in these cases is to measure the temperature of a target while its surface's temperature and emissivity are changing rapidly and with incomplete knowledge of how the emissivity and surface texture (scattering) changes with temperature. Bodkin Design and Engineering, LLC (BDandE), with partners Spectral Sciences, Inc. (SSI) and Space Computer Corporation (SCC), has developed a PRST Sensor that is based on a hyperspectral MWIR imager spanning the wavelength range 2-5 μm and providing a hyperspectral datacube of 20-24 wavelengths at 60 Hz frame rate or faster. This imager is integrated with software and algorithms to extract surface temperature from radiometric measurements over the range from ambient to 2000K with a precision of 20K, even without a priori knowledge of the target's emissivity and even as the target emissivity may be changing with time and temperature. In this paper, we will present a description of the PRST system as well as laser heating test results which show the PRST system mapping target surface temperatures in the range 600-2600K on a variety of materials.

  10. EUV photoresist performance results from the VNL and the EUV LLC

    Science.gov (United States)

    Cobb, Jonathan L.; Dentinger, Paul M.; Hunter, Luke L.; O'Connell, Donna J.; Gallatin, Gregg M.; Hinsberg, William D.; Houle, Frances A.; Sanchez, Martha I.; Domke, Wolf-Dieter; Wurm, Stefan; Okoroanyanwu, Uzodinma; Lee, Sang Hun

    2002-07-01

    If EUV lithography is to be inserted at the 65-nm node of the 2001 International Technology Roadmap for Semiconductors, beta-tool resists must be ready in 2004. These resists should print 35-65 nm lines on a 130-nm pitch with LER below 4 nm 3s. For throughput considerations, the sizing dose should be below 4 mJ/cm2. The VNL and EUV LLC resist development program has measured the resolution, LER, and sizing dose of approximately 60 ESCAP photoresists with the 10X exposure tools at Sandia National Laboratories. The NA of these tools is 0.088, and every resist measured would support the beta-tool resolution requirement if the resolution scales with NA as predicted by optics. 50-nm dense lines have been printed with monopole off-axis illumination, but 35-nm resolution on a 130-nm pitch remains to be demonstrated. Only one photoresist met the LER specification, but its sizing dose of 22 mJ/cm2 is over five times too large. The power spectral density of the roughness of every resist has a Lorentzian line shape, and most of the roughness comes from frequencies within the resolution of the exposure tools. This suggests a strong contribution from mask and optics, but more work needs to be done to determine the source of the roughness. Many resists have sizing doses below the 4 mJ/cm2 target, and neither resolution nor LER degrades with decreasing sizing dose, suggesting that shot noise is not yet affecting the results. The best overall resist resolved 80-nm dense lines with 5.3 nm 3s LER on 100-nm dense lines at a sizing dose of 3.2 mJ/cm2. Thus, it comes close to, but does not quite meet, the beta-tool resist targets.

  11. Geometry of the hemispherical radiometric footprint over plant canopies

    Science.gov (United States)

    Marcolla, B.; Cescatti, A.

    2017-11-01

    Radiometric measurements of hemispherical surface reflectance and long-wave irradiance are required to quantify the broadband albedo and the outgoing thermal radiation. These observations are typically integrated with eddy covariance measurements of sensible and latent heat fluxes to characterize the surface energy budget. While the aerodynamic footprint has been widely investigated, the geometry of the hemispherical radiometric footprint over plant canopies has been rarely tackled. In the present work, the size and shape of the hemispherical radiometric footprint are formalized for a bare surface and in presence of a vegetation cover. For this purpose, four idealized canopies are analyzed and the dependency of the radiometric footprint on leaf area index and canopy height is explored. Besides, the radiometric footprint is compared with the aerodynamic footprint in conditions of neutral stability. It was observed that almost 100% of the hemispherical radiometric signal originates within a distance of a few radiometer heights, while only about 50-80% of the cumulative aerodynamic signal is generated within a distance of about 20 sensor heights. In order to achieve comparable extensions of the footprint areas, hemispherical radiometric measurements should therefore be taken about 6-15 times higher than turbulent flux ones, depending on the vegetation type. The analysis also highlights that the size of the radiative footprint decreases at increasing leaf area index, whereas the aerodynamic footprint shows an opposite behavior. For the abovementioned reasons, this work may support the interpretation of energy flux measurements and the optimal design of eddy covariance stations located in heterogeneous sites.

  12. Radiometric Quality Evaluation of INSAT-3D Imager Data

    Science.gov (United States)

    Prakash, S.; Jindal, D.; Badal, N.; Kartikeyan, B.; Gopala Krishna, B.

    2014-11-01

    INSAT-3D is an advanced meteorological satellite of ISRO which acquires imagery in optical and infra-red (IR) channels for study of weather dynamics in Indian sub-continent region. In this paper, methodology of radiometric quality evaluation for Level-1 products of Imager, one of the payloads onboard INSAT-3D, is described. Firstly, overall visual quality of scene in terms of dynamic range, edge sharpness or modulation transfer function (MTF), presence of striping and other image artefacts is computed. Uniform targets in Desert and Sea region are identified for which detailed radiometric performance evaluation for IR channels is carried out. Mean brightness temperature (BT) of targets is computed and validated with independently generated radiometric references. Further, diurnal/seasonal trends in target BT values and radiometric uncertainty or sensor noise are studied. Results of radiometric quality evaluation over duration of eight months (January to August 2014) and comparison of radiometric consistency pre/post yaw flip of satellite are presented. Radiometric Analysis indicates that INSAT-3D images have high contrast (MTF > 0.2) and low striping effects. A bias of specifications.

  13. An Empirical Approach to Ocean Color Data: Reducing Bias and the Need for Post-Launch Radiometric Re-Calibration

    Science.gov (United States)

    Gregg, Watson W.; Casey, Nancy W.; O'Reilly, John E.; Esaias, Wayne E.

    2009-01-01

    A new empirical approach is developed for ocean color remote sensing. Called the Empirical Satellite Radiance-In situ Data (ESRID) algorithm, the approach uses relationships between satellite water-leaving radiances and in situ data after full processing, i.e., at Level-3, to improve estimates of surface variables while relaxing requirements on post-launch radiometric re-calibration. The approach is evaluated using SeaWiFS chlorophyll, which is the longest time series of the most widely used ocean color geophysical product. The results suggest that ESRID 1) drastically reduces the bias of ocean chlorophyll, most impressively in coastal regions, 2) modestly improves the uncertainty, and 3) reduces the sensitivity of global annual median chlorophyll to changes in radiometric re-calibration. Simulated calibration errors of 1% or less produce small changes in global median chlorophyll (less than 2.7%). In contrast, the standard NASA algorithm set is highly sensitive to radiometric calibration: similar 1% calibration errors produce changes in global median chlorophyll up to nearly 25%. We show that 0.1% radiometric calibration error (about 1% in water-leaving radiance) is needed to prevent radiometric calibration errors from changing global annual median chlorophyll more than the maximum interannual variability observed in the SeaWiFS 9-year record (+/- 3%), using the standard method. This is much more stringent than the goal for SeaWiFS of 5% uncertainty for water leaving radiance. The results suggest ocean color programs might consider less emphasis of expensive efforts to improve post-launch radiometric re-calibration in favor of increased efforts to characterize in situ observations of ocean surface geophysical products. Although the results here are focused on chlorophyll, in principle the approach described by ESRID can be applied to any surface variable potentially observable by visible remote sensing.

  14. Improved Absolute Radiometric Calibration of a UHF Airborne Radar

    Science.gov (United States)

    Chapin, Elaine; Hawkins, Brian P.; Harcke, Leif; Hensley, Scott; Lou, Yunling; Michel, Thierry R.; Moreira, Laila; Muellerschoen, Ronald J.; Shimada, Joanne G.; Tham, Kean W.; hide

    2015-01-01

    The AirMOSS airborne SAR operates at UHF and produces fully polarimetric imagery. The AirMOSS radar data are used to produce Root Zone Soil Moisture (RZSM) depth profiles. The absolute radiometric accuracy of the imagery, ideally of better than 0.5 dB, is key to retrieving RZSM, especially in wet soils where the backscatter as a function of soil moisture function tends to flatten out. In this paper we assess the absolute radiometric uncertainty in previously delivered data, describe a method to utilize Built In Test (BIT) data to improve the radiometric calibration, and evaluate the improvement from applying the method.

  15. Oxide Nanoparticle EUV (ONE) Photoresists: Current Understanding of the Unusual Patterning Mechanism

    KAUST Repository

    Jiang, Jing

    2015-01-01

    © 2015 SPST. In the past few years, industry has made significant progress to deliver a stable high power EUV scanner and a 100 W light source is now being tested on the manufacuring scale. The success of a high power EUV source demands a fast and high resolution EUV resist. However, chemcially amplied resists encounter unprecedented challenges beyond the 22 nm node due to resolution, roughness and sensitivity tradeoffs. Unless novel solutions for EUV resists are proposed and further optimzed, breakthroughs can hardly be achieved. Oxide nanoparticle EUV (ONE) resists stablized by organic ligands were originally proposed by Ober et al. Recently this work attracts more and more attention due to its extraordinanry EUV sensitivity. This new class of photoresist utilizes ligand cleavage with a ligand exchange mechanism to switch its solubilty for dual-tone patterning. Therefore, ligand selection of the nanoparticles is extremely important to its EUV performance.

  16. Transmission grating spectrometer for broadband characterization of EUV sources

    NARCIS (Netherlands)

    Bayraktar, Muharrem; Bastiaens, Hubertus M.J.; Bruineman, C.; Vratzov, B.; Bijkerk, Frederik

    2016-01-01

    Emission from extreme ultraviolet (EUV) light sources for lithography and metrology applications needs to be maximized in a narrow wavelength band. On the other hand, these sources also emit radiation outside this wavelength band, extending into the deep ultraviolet (DUV) and visible/IR range. To

  17. SDO-EVE multiple EUV grating spectrograph (MEGS) optical design

    Science.gov (United States)

    Crotser, David A.; Woods, Thomas N.; Eparvier, Francis G.; Ucker, Greg; Kohnert, Richard A.; Berthiaume, Gregory D.; Weitz, David M.

    2004-10-01

    The NASA Solar Dynamics Observatory (SDO), scheduled for launch in 2008, incorporates a suite of instruments including the EUV Variability Experiment (EVE). The EVE instrument package contains grating spectrographs used to measure the solar extreme ultraviolet (EUV) irradiance from 0.1 to 105 nm. The Multiple EUV Grating Spectrograph (MEGS) channels use concave reflection gratings to image solar spectra onto CCDs that are operated at -100°C. MEGS provides 0.1nm spectral resolution between 5-105nm every 10 seconds with an absolute accuracy of better than 25% over the SDO 5-year mission. MEGS-A utilizes a unique grazing-incidence, off-Rowland circle (RC) design to minimize angle of incidence at the detector while meeting high resolution requirements. MEGS-B utilizes a double-pass, cross-dispersed double-Rowland circle design. MEGS-P, a Ly-α monitor, will provide a proxy model calibration in the 60-105 nm range. Finally, the Solar Aspect Monitor (SAM) channel will provide continual pointing information for EVE as well as low-resolution X-ray images of the sun. In-flight calibrations for MEGS will be provided by the on-board EUV Spectrophotometer (ESP) in the 0.1-7nm and 17-37nm ranges, as well as from annual under-flight rocket experiments. We present the methodology used to develop the MEGS optical design.

  18. Extreme Ultraviolet (EUV) induced surface chemistry on Ru

    NARCIS (Netherlands)

    Liu, Feng; Sturm, Jacobus Marinus; Osorio, E.; van Kampen, M.; Lee, Christopher James; Bijkerk, Frederik

    2013-01-01

    Extreme UV, i.e. 13.5 nm, photons and photon-induced secondary electrons are the driving forces of mirror degradation in EUV lithography equipment. An understanding of the catalytic role of the mirror surface and the photochemical processes is required for controlling such mirror degradation. We

  19. Investigation of a novel discharge EUV source for microlithography

    Science.gov (United States)

    Bauer, Bruno S.; Makhin, Volodymyr; Fuelling, Stephan; Lindemuth, Irvin R.

    2006-03-01

    A plasma discharge could be an inexpensive and efficient EUV source for microlithography, if issues of brightness, lifetime, debris, repetition rate, and stability can be resolved. A novel discharge EUV source (international patent pending) is being investigated that may offer an economical solution to these issues. The novel EUV discharge seeks to efficiently assemble a hot, dense, uniform, axially stable plasma with magnetic pressure and inductive current drive, employing resonant theta-pinch-type compression of plasma confined in a magnetic mirror. This resonantly compressed mirror plasma (RCMP) source would be continuously driven by a radio frequency oscillator, to obtain an EUV conversion efficiency greater than that of sources in which the plasma is discarded after each radiation burst. An analytic calculation indicates the novel RCMP source could provide 115 W of 13.45 nm radiation in 3.3 mm2sr etendue to an intermediate focus. Numerical modeling of RCMP dynamics has been performed with MHRDR-EUVL, a magnetohydrodynamic (MHD) numerical simulation with atomic and radiation physics. The numerical simulation demonstrates the efficacy of resonant magneto-acoustic heating. An experiment is being developed to test the new concept.

  20. The EUV Spectrum of Sunspot Plumes Observed by SUMER on ...

    Indian Academy of Sciences (India)

    tribpo

    J. Astrophys. Astr. (2000) 21, .397-401. The EUV Spectrum of Sunspot Plumes Observed by SUMER on. SOHO. W. Curdt,. 1. B. N. Dwivedi. 2. & U. Feldman. 3. 1. Max-Planck-Institut für Aeronomie, D-37191, Katlenburg-Lindau, Germany. 2. Department of Applied Physics, Banaras Hindu University, Varanasi-221005, India.

  1. Benchmarking EUV mask inspection beyond 0.25 NA

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Mochi, Iacopo; Anderson, Erik H.; Rekawa, Seno B.; Kemp, Charles D.; Huh, S.; Han, H.-S.; Naulleau, P.; Gunion, R.F.

    2008-09-18

    The SEMATECH Berkeley Actinic Inspection Tool (AIT) is an EUV-wavelength mask inspection microscope designed for direct aerial image measurements, and pre-commercial EUV mask research. Operating on a synchrotron bending magnet beamline, the AIT uses an off-axis Fresnel zoneplate lens to project a high-magnification EUV image directly onto a CCD camera. We present the results of recent system upgrades that have improved the imaging resolution, illumination uniformity, and partial coherence. Benchmarking tests show image contrast above 75% for 100-nm mask features, and significant improvements and across the full range of measured sizes. The zoneplate lens has been replaced by an array of user-selectable zoneplates with higher magnification and NA values up to 0.0875, emulating the spatial resolution of a 0.35-NA 4 x EUV stepper. Illumination uniformity is above 90% for mask areas 2-{micro}m-wide and smaller. An angle-scanning mirror reduces the high coherence of the synchrotron beamline light source giving measured {sigma} values of approximately 0.125 at 0.0875 NA.

  2. Actinic EUV mask inspection beyond 0.25 NA

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Mochi, Iacopo; Anderson, Erik H.; Rekawa, Seno. B.; Kemp, Charles D.; Huh, S.; Han, H.-S.; Naulleau, P.; Huh, S.

    2008-03-24

    The SEMATECH Berkeley Actinic Inspection Tool (AIT) is an EUV-wavelength mask inspection microscope designed for direct aerial image measurements, and pre-commercial EUV mask research. Operating on a synchrotron bending magnet beamline, the AIT uses an off-axis Fresnel zoneplate lens to project a high-magnification EUV image directly onto a CCD camera. We present the results of recent system upgrades that have improved the imaging resolution, illumination uniformity, and partial coherence. Benchmarking tests show image contrast above 75% for 100-nm mask features, and significant improvements and across the full range of measured sizes. The zoneplate lens has been replaced by an array of user-selectable zoneplates with higher magnification and NA values up to 0.0875, emulating the spatial resolution of a 0.35-NA 4x EUV stepper. Illumination uniformity is above 90% for mask areas 2-{micro}m-wide and smaller. An angle-scanning mirror reduces the high coherence of the synchrotron beamline light source giving measured {sigma} values of approximately 0.125 at 0.0875 NA.

  3. Integrated approach to improving local CD uniformity in EUV patterning

    Science.gov (United States)

    Liang, Andrew; Hermans, Jan; Tran, Timothy; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Dusa, Mircea; Singhal, Akhil; van Schravendijk, Bart; Dixit, Girish; Shamma, Nader

    2017-03-01

    Extreme ultraviolet (EUV) lithography is crucial to enabling technology scaling in pitch and critical dimension (CD). Currently, one of the key challenges of introducing EUV lithography to high volume manufacturing (HVM) is throughput, which requires high source power and high sensitivity chemically amplified photoresists. Important limiters of high sensitivity chemically amplified resists (CAR) are the effects of photon shot noise and resist blur on the number of photons received and of photoacids generated per feature, especially at the pitches required for 7 nm and 5 nm advanced technology nodes. These stochastic effects are reflected in via structures as hole-to-hole CD variation or local CD uniformity (LCDU). Here, we demonstrate a synergy of film stack deposition, EUV lithography, and plasma etch techniques to improve LCDU, which allows the use of high sensitivity resists required for the introduction of EUV HVM. Thus, to improve LCDU to a level required by 5 nm node and beyond, film stack deposition, EUV lithography, and plasma etch processes were combined and co-optimized to enhance LCDU reduction from synergies. Test wafers were created by depositing a pattern transfer stack on a substrate representative of a 5 nm node target layer. The pattern transfer stack consisted of an atomically smooth adhesion layer and two hardmasks and was deposited using the Lam VECTOR PECVD product family. These layers were designed to mitigate hole roughness, absorb out-of-band radiation, and provide additional outlets for etch to improve LCDU and control hole CD. These wafers were then exposed through an ASML NXE3350B EUV scanner using a variety of advanced positive tone EUV CAR. They were finally etched to the target substrate using Lam Flex dielectric etch and Kiyo conductor etch systems. Metrology methodologies to assess dimensional metrics as well as chip performance and defectivity were investigated to enable repeatable patterning process development. Illumination

  4. Performance of the ASML EUV Alpha Demo Tool

    Science.gov (United States)

    Hermans, Jan V.; Hendrickx, Eric; Laidler, David; Jehoul, Christiane; Van Den Heuvel, Dieter; Goethals, Anne-Marie

    2010-04-01

    The 22nm technology node is the target for insertion of Extreme Ultra-Violet (EUV) lithography into pre-production. To prepare this insertion, the issues that arise with the use of an EUV lithographic scanner in a pre-production environment need to be addressed. To gain better understanding of the issues that come with an EUV lithographic scanner, the Alpha Demo Tool (ADT) from ASML was installed at IMEC and is now in use since mid of 2008. In July 2009, the source was upgraded to a 170W/2π source to allow for higher uptime and wafer output by means of the semi-automatic tin refill. Also a new advanced resist, the SEVR-59 resist was introduced after the installation of the 170W/2π source to allow printing of 32nm Lines-Spaces (LS). After these changes, the ADT has been monitored closely with respect to the imaging performance. In this paper, we report on both the CD fingerprint analysis and the exposure tool stability. For 32nm dense LS, the ADT shows a wafer CD Uniformity (CDU) of 2.5nm 3σ, without any corrections for process or reticle. As for 40nm LS, the wafer CDU is correlated to different factors that are known to influence the CD fingerprint from traditional lithography: reticle CD error, slit intensity uniformity, focal plane deviation but also EUV specific reticle shadowing. The ADT shows excellent wafer-to-wafer stability (tool (using the same etched silicon wafers as a reference). Below 32nm, the ADT shows good wafer CDU for 30nm dense LS (60nm pitch). First 27nm dense line CDU data are achieved (54nm pitch). The results indicate that the ADT can be used effectively for EUV process development before installation of the pre-production tool, the ASML NXE:3100 at IMEC.

  5. Data acquisition and processing - helicopter radiometric survey, Krageroe, 1998

    CERN Document Server

    Beard, L P

    2000-01-01

    On 07 October 1998 a helicopter radiometric survey was flown in the vicinity of Krageroe municipality. The purpose of the survey was to provide radiometric information to help assess radon hazard from radioactive rocks in the area. A total of 60 line-kilometres of radiometric data were acquired in a single flight, covering an area of approximately 3 square km with a 50-m line spacing. The data were collected by Geological Survey of Norway (NGU) personnel and processed at NGU. Radiometric data were reduced using the three-channel procedure recommended by the International Atomic Energy Association. All data were gridded using square cells with 30-m sides and geophysical maps were produced at a scale of 1:5000. This report covers aspects of data acquisition and processing (Author)

  6. Spectral and Radiometric Calibration using Tunable Lasers Project

    Data.gov (United States)

    National Aeronautics and Space Administration —  SIRCUS-based calibration relies on a set of monitoring radiometers and tunable laser sources to provide an absolute radiometric calibration that can approach...

  7. MISR radiometric camera-by-camera Cloud Mask V004

    Data.gov (United States)

    National Aeronautics and Space Administration — This file contains the Radiometric camera-by-camera Cloud Mask dataset. It is used to determine whether a scene is classified as clear or cloudy. A new parameter has...

  8. Data acquisition and processing - helicopter radiometric survey, Krageroe, 1998

    Energy Technology Data Exchange (ETDEWEB)

    Beard, Les P.; Mogaard, John Olav

    2000-07-01

    On 07 October 1998 a helicopter radiometric survey was flown in the vicinity of Krageroe municipality. The purpose of the survey was to provide radiometric information to help assess radon hazard from radioactive rocks in the area. A total of 60 line-kilometres of radiometric data were acquired in a single flight, covering an area of approximately 3 square km with a 50-m line spacing. The data were collected by Geological Survey of Norway (NGU) personnel and processed at NGU. Radiometric data were reduced using the three-channel procedure recommended by the International Atomic Energy Association. All data were gridded using square cells with 30-m sides and geophysical maps were produced at a scale of 1:5000. This report covers aspects of data acquisition and processing (Author)

  9. A Radiometric Uncertainty Tool for the Sentinel 2 Mission

    OpenAIRE

    Gorrono, Javier; Fomferra, N; Peters, M; Gascon, F; Underwood, Craig; Fox, NP; Kirches, G; Brockmann, C

    2017-01-01

    In the framework of the European Copernicus programme, the European Space Agency (ESA) has launched the Sentinel-2 (S2) Earth Observation (EO) mission which provides optical high spatial resolution imagery over land and coastal areas. As part of this mission, a tool (named S2-RUT, from Sentinel-2 Radiometric Uncertainty Tool) has been developed. The tool estimates the radiometric uncertainty associated with each pixel in the top-of-atmosphere (TOA) reflectance factor images provided by ESA. T...

  10. EUV sources for EUV lithography in alpha-, beta-, and high volume chip manufacturing: an update on GDPP and LPP technology

    Science.gov (United States)

    Stamm, U.; Kleinschmidt, J.; Gabel, K.; Hergenhan, G.; Ziener, C.; Schriever, G.; Ahmad, I.; Bolshukhin, D.; Brudermann, J.; de Bruijn, R.; Chin, T. D.; Geier, A.; Gotze, S.; Keller, A.; Korobotchko, V.; Mader, B.; Ringling, J.; Brauner, T.

    2005-05-01

    In the paper we report about the progress made at XTREME technologies in the development of EUV sources based on gas discharge produced plasma (GDPP) technologies and laser produced plasma (LPP) technologies. First prototype xenon GDPP sources of the type XTS 13-35 based on the Z-pinch principle with 35 W power in 2π sr have been integrated into micro-exposure tools from Exitech, UK. Specifications of the EUV sources and experience of integration as well as data about component and optics lifetime are presented. In the source development program for Beta exposure tools and high volume manufacturing exposure tools both tin and xenon have been investigated as fuel for the EUV sources. Development progress in porous metal cooling technology as well as pulsed power circuit design has led to GDPP sources with xenon fuel continuous operating with an output power of 200 W in 2π sr at 4500 Hz repetition rate. With tin fuel an output power of 400 W in 2π sr was obtained leaving all other conditions unaltered with respect to the xenon based source. The performance of the xenon fueled sources is sufficiently good to fulfill all requirements up to the beta tool level. For both the xenon and the tin GDPP sources detailed data about source performance are reported, including component lifetime and optics lifetime. The status of the integration of the sources with grazing incidence collector optics is discussed. Theoretical estimations of collection efficiencies are compared with experimental data to determine the loss mechanisms in the beam path. Specifically contamination issues related to tin as target material as well as debris mitigation in tin sources is addressed. As driver lasers for the LPP source research diode-pumped Nd:YAG lasers have been used to generate EUV emitting plasma. As target material xenon has been employed. Conversion efficiencies have been measured and currently the maximum conversion efficiency amounts to 1 %. The laser driver power of 1.2 kW is

  11. Blast investigation by fast multispectral radiometric analysis

    Science.gov (United States)

    Devir, A. D.; Bushlin, Y.; Mendelewicz, I.; Lessin, A. B.; Engel, M.

    2011-06-01

    Knowledge regarding the processes involved in blasts and detonations is required in various applications, e.g. missile interception, blasts of high-explosive materials, final ballistics and IED identification. Blasts release large amount of energy in short time duration. Some part of this energy is released as intense radiation in the optical spectral bands. This paper proposes to measure the blast radiation by a fast multispectral radiometer. The measurement is made, simultaneously, in appropriately chosen spectral bands. These spectral bands provide extensive information on the physical and chemical processes that govern the blast through the time-dependence of the molecular and aerosol contributions to the detonation products. Multi-spectral blast measurements are performed in the visible, SWIR and MWIR spectral bands. Analysis of the cross-correlation between the measured multi-spectral signals gives the time dependence of the temperature, aerosol and gas composition of the blast. Farther analysis of the development of these quantities in time may indicate on the order of the detonation and amount and type of explosive materials. Examples of analysis of measured explosions are presented to demonstrate the power of the suggested fast multispectral radiometric analysis approach.

  12. Radiometric packaging of uncooled bolometric infrared focal plane arrays

    Science.gov (United States)

    García-Blanco, Sonia; Pope, Timothy; Côté, Patrice; Leclerc, Mélanie; Ngo Phong, Linh; Châteauneuf, François

    2017-11-01

    INO has a wide experience in the design and fabrication of different kinds of microbolometer focal plane arrays (FPAs). In particular, a 512x3 pixel microbolometer FPA has been selected as the sensor for the New Infrared Sensor Technology (NIRST) instrument, one of the payloads of the SACD/Aquarius mission. In order to make the absolute temperature measurements necessary for many infrared Earth observation applications, the microbolometer FPA must be integrated into a package offering a very stable thermal environment. The radiometric packaging technology developed at INO presents an innovative approach since it was conceived to be modular and adaptable for the packaging of different microbolometer FPAs and for different sets of assembly requirements without need for requalification of the assembly process. The development of the radiometric packaging technology has broadened the position of INO as a supplier of radiometric detector modules integrating FPAs of microbolometers inside a radiometric package capable of achieving the requirements of different space missions. This paper gives an overview of the design of INO's radiometric package. Key performance parameters are also discussed and the test campaign conducted with the radiometric package is presented.

  13. The Radiometric Calibration Network (RadCalNet): a Global Calibration and Validation Test Site Network

    Science.gov (United States)

    Czapla-Myers, J.; Bouvet, M.; Wenny, B. N.

    2016-12-01

    The Radiometric Calibration Network (RadCalNet) Working Group (WG) consists of national and academic groups from various countries who are involved in the radiometric calibration and validation of Earth-observing sensors. The current WG is composed of members from France, Italy, the Netherlands, the UK, the USA, and China. RadCalNet has been on the agenda of the Committee on Earth Observation Satellites (CEOS) Working Group on Calibration and Validation (WGCV) for years, and in 2014 it was formally assembled. The primary goal is to develop an SI-traceable standardized network of sites and processing protocols for the absolute radiometric calibration, Intercalibration, and validation of Earth-observing sensors. Currently, RadCalNet is composed of four instrumented test sites that are located in the USA, France, Namibia, and China. A two-year prototyping phase was used to define the architecture of RadCalNet, demonstrate the operational concept using current satellite sensors, and to provide recommendations to CEOS WGCV for the transition of RadCalNet to an operational status. The final product is planned to be a daily hyperspectral (400-2500 nm) top-of-atmosphere reflectance in 30-minute intervals for a nadir-viewing sensor at each of the four test sites. The current schedule has RadCalNet becoming operational in late 2016 or early 2017.

  14. Fibrillar Chromospheric Spicule-Like Counterparts to an EUV and Soft X-Ray Blowout Coronal Jet

    Science.gov (United States)

    Sterling, Alphonse C.; Harra, Louise K.; Moore, Ronald L.

    2010-01-01

    We observe an erupting jet feature in a solar polar coronal hole, using data from Hinode/SOT, EIS, and XRT, with supplemental data from STEREO/EUVI. From EUV and soft X-ray (SXR) images we identify the erupting feature as a blowout coronal jet: in SXRs it is a jet with bright base, and in EUV it appears as an eruption of relatively cool (approximately 50,000 K) material of horizontal size scale approximately 30" originating from the base of the SXR jet. In SOT Ca II H images the most pronounced analog is a pair of thin (approximately 1") ejections, at the locations of either of the two legs of the erupting EUV jet. These Ca II features eventually rise beyond 45", leaving the SOT field of view, and have an appearance similar to standard spicules except that they are much taller. They have velocities similar to that of "type II" spicules, approximately 100 kilometers per second, and they appear to have spicule-like substructures splitting off from them with horizontal velocity approximately 50 kilometers per second, similar to the velocities of splitting spicules measured by Sterling et al. (2010). Motions of splitting features and of other substructures suggest that the macroscopic EUV jet is spinning or unwinding as it is ejected. This and earlier work suggests that a sub-population of Ca II type II spicules are the Ca II manifestation of portions of larger-scale erupting magnetic jets. A different sub-population of type II spicules could be blowout jets occurring on a much smaller horizontal size scale than the event we observe here.

  15. Extreme ultraviolet (EUV) surface modification of polytetrafluoroethylene (PTFE) for control of biocompatibility

    Energy Technology Data Exchange (ETDEWEB)

    Ahad, Inam Ul, E-mail: inam-ul.ahad@wat.edu.pl [Institute of Optoelectronics, Military University of Technology, 00-908 Warsaw (Poland); Advanced Processing Technology Research Centre, School of Mechanical and Manufacturing Engineering, Faculty of Engineering & Computing, Dublin City University, Dublin 9 (Ireland); Butruk, Beata [Department of Biotechnology and Bioprocess Engineering, Warsaw University of Technology, Ul. Waryńskiego 1, 00-645 Warsaw (Poland); Ayele, Mesfin; Budner, Bogusław; Bartnik, Andrzej; Fiedorowicz, Henryk [Institute of Optoelectronics, Military University of Technology, 00-908 Warsaw (Poland); Ciach, Tomasz [Department of Biotechnology and Bioprocess Engineering, Warsaw University of Technology, Ul. Waryńskiego 1, 00-645 Warsaw (Poland); Brabazon, Dermot [Advanced Processing Technology Research Centre, School of Mechanical and Manufacturing Engineering, Faculty of Engineering & Computing, Dublin City University, Dublin 9 (Ireland)

    2015-12-01

    Extreme ultraviolet (EUV) surface modification of polytetrafluoroethylene (PTFE) was performed in order to enhance the degree of biocompatibility. Polymer samples were irradiated by different number of EUV shots using a laser–plasma based EUV source in the presence of nitrogen gas. The physical and chemical properties of EUV modified PTFE samples were studied using Atomic Force Microscopy, X-ray photoelectron spectroscopy and water contact angle (WCA) methods. Pronounced wall type micro and nano-structures appeared on the EUV treated polymer surfaces resulting in increased surface roughness and hydrophobicity. Stronger cell adhesion and good cell morphology were observed on EUV modified surfaces by in-vitro cell culture studies performed using L929 fibroblasts.

  16. Basic issues associated with four potential EUV resist schemes

    Energy Technology Data Exchange (ETDEWEB)

    Wheeler, D.R. [Sandia National Labs., Albuquerque, NM (United States); Kubiak, G.; Ray-Chaudhuri, A.; Henderson, C. [Sandia National Labs., Livermore, CA (United States)

    1996-06-01

    Four of the better developed resist schemes that are outgrowths of DUV (248 and 193 nm) resist development are considered as candidates for EUV. They are as follows: trilayer, a thin imaging layer on top of a refractor masking/pattern transfer layer on top of a planarizing and processing layer (PPL); solution developed, organometallic bilayer where the imaging and masking layer have been combined into one material on top of a PPL; and finally silylated resists. They are examined in a very general form without regard to the specifics of chemistry of the variations within each group, but rather to what is common to each group and how that affects their effectiveness as candidates for a near term EUV resist. In particular they are examined with respect to sensitivity, potential resolution, optical density, etching selectivity during pattern transfer, and any issues associated with pattern fidelity such as swelling.

  17. Contribution of EUV mask CD variability on LCDU

    Science.gov (United States)

    Qi, Zhengqing John; Rankin, Jed; Sun, Lei; Levinson, Harry

    2017-03-01

    The shrink in feature sizes enabled by EUV lithography introduces a regime where stochastic limits to resolution can manifest in the form of line edge roughness (LER) for line/space patterns and local critical dimension uniformity (LCDU) for contact/holes. To meet increasing tolerances on edge placement error (EPE) and suppression of stochastic effects, an understanding of EUV mask contributions on lithographic patterning variability is essential. The work here explores stochastic noise originating from the mask patterning process and attempts to quantify its contributions towards on-wafer LCDU. A semiempirical approach was used to statistically decompose the mask variability component from the measured LCDU and provide a first-order understanding of the mask's impact on wafer. Taking a more direct approach, a one-to-one correlation of local CD variation between mask and wafer was also experimentally shown, presenting the possibility for predicting the contributions and impact of mask LCDU on wafer prior to exposure.

  18. Study of Novel EUV Absorber : Nickel and Nickel Oxide

    Energy Technology Data Exchange (ETDEWEB)

    Woo, Dong Gon; Kim, Jung Hwan; Kim, Jung Sik; Hong, Seongchul; Ahn, Jinho [Hanyang University, Seoul (Korea, Republic of)

    2017-03-15

    The shadowing effect is one of the most urgent issues yet to be solved in high-volume manufacturing using extreme ultraviolet lithography (EUVL). Many studies have been conducted to mitigate the unexpected results caused by shadowing effects. The simplest way to mitigate the shadowing effect is to reduce the thickness of the absorber. Since nickel has high extinction coefficients in the EUV wavelengths, it is one of more promising absorber material candidates. A Ni based absorber exhibited imaging performance comparable to a Tantalum nitride absorber. However, the Ni-based absorber showed a dramatic reduction in horizontal-vertical critical dimension (H-V CD) bias. Therefore, limitations in fabricating a EUV mask can be mitigated by using the Ni based absorber.

  19. Optical, UV, and EUV Oscillations of SS Cygni in Outburst

    Science.gov (United States)

    Mauche, Christopher W.

    2004-07-01

    I provide a review of observations in the optical, UV (HST), and EUV (EUVE and Chandra LETG) of the rapid periodic oscillations of nonmagnetic, disk-accreting, high mass-accretion rate cataclysmic variables (CVs), with particular emphasis on the dwarf nova SS Cyg in outburst. In addition, I drawn attention to a correlation, valid over nearly six orders of magnitude in frequency, between the frequencies of the quasi-periodic oscillations (QPOs) of white dwarf, neutron star, and black hole binaries. This correlation identifies the high frequency quasi-coherent oscillations (so-called ``dwarf nova oscillations'') of CVs with the kilohertz QPOs of low mass X-ray binaries (LMXBs), and the low frequency and low coherence QPOs of CVs with the horizontal branch oscillations (or the broad noise component identified as such) of LMXBs. Assuming that the same mechanisms produce the QPOs of white dwarf, neutron star, and black hole binaries, this correlation has important implications for QPO models.

  20. EUV mask reflectivity measurements with micron-scale spatial resolution

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Rekawa, S.B.; Kemp, C.D.; Barty, A.; Anderson, E.H.; Kearney, Patrick; Han, Hakseung

    2008-05-26

    The effort to produce defect-free mask blanks for EUV lithography relies on increasing the detection sensitivity of advanced mask inspection tools, operating at several wavelengths. We describe the unique measurement capabilities of a prototype actinic (EUV wavelength) microscope that is capable of detecting small defects and reflectivity changes that occur on the scale of microns to nanometers. Types of defects: (a) Buried Substrate Defects: particles & pits (causes amplitude and/or phase variations); (b) Surface Contamination (reduces reflectivity and (possibly) contrast); (c) Damage from Inspection and Use (reduces the reflectivity of the multilayer coating). This paper presents an overview of several topics where scanning actinic inspection makes a unique contribution to EUVL research. We describe the role of actinic scanning inspection in four cases: defect repair studies; observations of laser damage; after scanning electron microscopy; and native and programmed defects.

  1. TESIS experiment on EUV imaging spectroscopy of the Sun

    Science.gov (United States)

    Kuzin, S. V.; Bogachev, S. A.; Zhitnik, I. A.; Pertsov, A. A.; Ignatiev, A. P.; Mitrofanov, A. M.; Slemzin, V. A.; Shestov, S. V.; Sukhodrev, N. K.; Bugaenko, O. I.

    2009-03-01

    TESIS is a set of solar imaging instruments in development by the Lebedev Physical Institute of the Russian Academy of Science, to be launched aboard the Russian spacecraft CORONAS-PHOTON in December 2008. The main goal of TESIS is to provide complex observations of solar active phenomena from the transition region to the inner and outer solar corona with high spatial, spectral and temporal resolution in the EUV and Soft X-ray spectral bands. TESIS includes five unique space instruments: the MgXII Imaging Spectroheliometer (MISH) with spherical bent crystal mirror, for observations of the Sun in the monochromatic MgXII 8.42 Å line; the EUV Spectoheliometer (EUSH) with grazing incidence difraction grating, for the registration of the full solar disc in monochromatic lines of the spectral band 280-330 Å; two Full-disk EUV Telescopes (FET) with multilayer mirrors covering the band 130-136 and 290-320 Å; and the Solar EUV Coronagraph (SEC), based on the Ritchey-Chretien scheme, to observe the inner and outer solar corona from 0.2 to 4 solar radii in spectral band 290-320 Å. TESIS experiment will start at the rising phase of the 24th cycle of solar activity. With the advanced capabilities of its instruments, TESIS will help better understand the physics of solar flares and high-energy phenomena and provide new data on parameters of solar plasma in the temperature range 10-10K. This paper gives a brief description of the experiment, its equipment, and its scientific objectives.

  2. Theoretical EUV spectrum of near Pd-like Xe

    CERN Document Server

    Sasaki, A

    2003-01-01

    The EUV spectrum of multiple charged Xe ion is theoretically investigated. The strong emission in the 11 nm band is attributed to 4d-4f transitions of Xe sup 7 sup + to Xe sup 1 sup 8 sup +. The 4d-5p transition of Xe sup 1 sup 0 sup + contributes to the emission in the 13.5 nm band from low density plasma. (author)

  3. High-Resolution EUV Spectroscopy of White Dwarfs

    Science.gov (United States)

    Kowalski, Michael P.; Wood, K. S.; Barstow, M. A.

    2014-01-01

    We compare results of high-resolution EUV spectroscopic measurements of the isolated white dwarf G191-B2B and the binary system Feige 24 obtained with the J-PEX (Joint Plasmadynamic Experiment), which was sponsored jointly by the U.S. Naval Research Laboratory and NASA. J-PEX delivers the world's highest resolution in EUV and does so at high effective area (e.g., more effective area in a sounding rocket than is available with Chandra at adjacent energies, but in a waveband Chandra cannot reach). The capability J-PEX represents is applicable to the astrophysics of hot plasmas in stellar coronae, white dwarfs and the ISM. G191-B2B and Feige 24 are quite distinct hot white dwarf systems having in common that they are bright in the portion of the EUV where He emission features and edges occur, hence they can be exploited to probe both the stellar atmosphere and the ISM, separating those components by model-fitting that sums over all relevant (He) spectral features in the band. There is evidence from these fits that atmospheric He is being detected but the result is more conservatively cast as a pair of upper limits. We discuss how longer duration satellite observations with the same instrumentation could increase exposure to detect atmospheric He in these and other nearby hot white dwarfs.

  4. EUV: induced ablation and surface modifications of solids

    Science.gov (United States)

    Bartnik, A.; Fiedorowicz, H.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Szczurek, A.; Wachulak, P.

    2011-06-01

    In this work results of investigations concerning ablation and surface modification of polymers and some other solids using a laser-plasma EUV source are presented. The plasma radiation was produced using a gas puff target and was focused with a gold-plated grazing incidence ellipsoidal collector. The ablation process was investigated using a scanning electron microscope (SEM) and a quadrupole mass spectrometer (QMS). The chemical changes were investigated by X-ray photoelectron spectroscopy (XPS). Different kinds of micro- and nanostructures created in nearsurface layers of the materials were obtained. Forms of the structures depend on a particular material and the EUV exposure. In case of some polymers even a single shot was sufficient for creation of the visible changes in surface morphology. In case of inorganic solids visible changes required usually the exposure with tens or hundreds of EUV pulses. XPS investigations revealed chemical changes in near surface layers of polymers. Significant differences were revealed in the XPS spectra acquired for irradiated and not-irradiated polymers. Significant decrease of functional groups containing oxygen was indicated. Analysis of QMS spectra indicate emission of different kinds of fragments of the polymer chains including the repeating structural units. In case of some polymers only fragments of the repeating unit were detected.

  5. The Extreme Ultraviolet (EUV) Instrument for the MAVEN Mission

    Science.gov (United States)

    Chamberlin, Phillip C.

    2012-01-01

    The Mars Atmosphere and Volatile Evolution Mission (MAVEN) will explore the variability in the planet's upper atmosphere and ionosphere that is dominated by interactions with the sun, specifically the high-energy photons in the soft X-ray and extreme ultraviolet wavelengths as well as interactions with the solar wind. Scientists will use MAVEN data to determine the current loss rate of volatile compounds from the Mars atmosphere, then extrapolate back in time in order to give historical estimations of state of the Mars atmosphere and climate, its ability to sustain liquid water, and the potential for the Martian habitability. The EUV instrument is critical in measuring the Space Weather driver of this atmospheric variability. It will directly observe a three EUV wavelength ranges and their variability due to solar flares (time scales of seconds to hours) as well as active region evolution (months), which will then act as proxies for a model to determine the entire 0.1-200 nm solar spectrum at all times during the MAVEN mission. These EUV measurements and models results will compliment the other instruments that will provide direct in-situ as well as remote sensing observations of the Martian atmospheric response to this solar driver. This presentation will be an introduction of this instrument and its science measurements and goals to the larger community, as well as a status report on its progress.

  6. Solar Tornadoes Triggered by Interaction between Filaments and EUV Jets

    Energy Technology Data Exchange (ETDEWEB)

    Chen, Huadong; Zhang, Jun; Ma, Suli [Key Laboratory of Solar Activity, National Astronomical Observatories, Chinese Academy of Sciences, Beijing 100012 (China); Yan, Xiaoli [Yunnan Observatories, Chinese Academy of Sciences, Kunming 650011 (China); Xue, Jianchao, E-mail: hdchen@nao.cas.cn, E-mail: zjun@nao.cas.cn [Key Laboratory for Dark Matter and Space Science, Purple Mountain Observatory, Chinese Academy of Sciences, Nanjing 210008 (China)

    2017-05-20

    We investigate the formations and evolutions of two successive solar tornadoes in/near AR 12297 during 2015 March 19–20. Recurrent EUV jets close to two filaments were detected along a large-scale coronal loop prior to the appearances of the tornadoes. Under the disturbances from the activities, the filaments continually ascended and finally interacted with the loops tracked by the jets. Subsequently, the structures of the filaments and the loop were merged together, probably via magnetic reconnections, and formed tornado-like structures with a long spiral arm. Our observations suggest that solar tornadoes can be triggered by the interaction between filaments and nearby coronal jets, which has rarely been reported before. At the earlier development phase of the first tornado, about 30 small-scale sub-jets appeared in the tornado’s arm, accompanied by local EUV brightenings. They have an ejection direction approximately vertical to the axis of the arm and a typical maximum speed of ∼280 km s{sup −1}. During the ruinations of the two tornadoes, fast plasma outflows from the strong EUV brightenings inside tornadoes are observed, in company with the untangling or unwinding of the highly twisted tornado structures. These observational features indicate that self reconnections probably occurred between the tangled magnetic fields of the tornadoes and resulted in the rapid disintegrations and disappearances of the tornadoes. According to the reconnection theory, we also derive the field strength of the tornado core to be ∼8 G.

  7. Solar Tornadoes Triggered by Interaction between Filaments and EUV Jets

    Science.gov (United States)

    Chen, Huadong; Zhang, Jun; Ma, Suli; Yan, Xiaoli; Xue, Jianchao

    2017-05-01

    We investigate the formations and evolutions of two successive solar tornadoes in/near AR 12297 during 2015 March 19-20. Recurrent EUV jets close to two filaments were detected along a large-scale coronal loop prior to the appearances of the tornadoes. Under the disturbances from the activities, the filaments continually ascended and finally interacted with the loops tracked by the jets. Subsequently, the structures of the filaments and the loop were merged together, probably via magnetic reconnections, and formed tornado-like structures with a long spiral arm. Our observations suggest that solar tornadoes can be triggered by the interaction between filaments and nearby coronal jets, which has rarely been reported before. At the earlier development phase of the first tornado, about 30 small-scale sub-jets appeared in the tornado’s arm, accompanied by local EUV brightenings. They have an ejection direction approximately vertical to the axis of the arm and a typical maximum speed of ˜280 km s-1. During the ruinations of the two tornadoes, fast plasma outflows from the strong EUV brightenings inside tornadoes are observed, in company with the untangling or unwinding of the highly twisted tornado structures. These observational features indicate that self reconnections probably occurred between the tangled magnetic fields of the tornadoes and resulted in the rapid disintegrations and disappearances of the tornadoes. According to the reconnection theory, we also derive the field strength of the tornado core to be ˜8 G.

  8. Influence of Lossy Compressed DEM on Radiometric Correction for Land Cover Classification of Remote Sensing Images

    Science.gov (United States)

    Moré, G.; Pesquer, L.; Blanes, I.; Serra-Sagristà, J.; Pons, X.

    2012-12-01

    World coverage Digital Elevation Models (DEM) have progressively increased their spatial resolution (e.g., ETOPO, SRTM, or Aster GDEM) and, consequently, their storage requirements. On the other hand, lossy data compression facilitates accessing, sharing and transmitting large spatial datasets in environments with limited storage. However, since lossy compression modifies the original information, rigorous studies are needed to understand its effects and consequences. The present work analyzes the influence of DEM quality -modified by lossy compression-, on the radiometric correction of remote sensing imagery, and the eventual propagation of the uncertainty in the resulting land cover classification. Radiometric correction is usually composed of two parts: atmospheric correction and topographical correction. For topographical correction, DEM provides the altimetry information that allows modeling the incidence radiation on terrain surface (cast shadows, self shadows, etc). To quantify the effects of the DEM lossy compression on the radiometric correction, we use radiometrically corrected images for classification purposes, and compare the accuracy of two standard coding techniques for a wide range of compression ratios. The DEM has been obtained by resampling the DEM v.2 of Catalonia (ICC), originally having 15 m resolution, to the Landsat TM resolution. The Aster DEM has been used to fill the gaps beyond the administrative limits of Catalonia. The DEM has been lossy compressed with two coding standards at compression ratios 5:1, 10:1, 20:1, 100:1 and 200:1. The employed coding standards have been JPEG2000 and CCSDS-IDC; the former is an international ISO/ITU-T standard for almost any type of images, while the latter is a recommendation of the CCSDS consortium for mono-component remote sensing images. Both techniques are wavelet-based followed by an entropy-coding stage. Also, for large compression ratios, both techniques need a post processing for correctly

  9. Double slit interferometry to measure the EUV refractive indices of solids using high harmonics.

    Science.gov (United States)

    Wilson, Lucy A; Rossall, Andrew K; Wagenaars, Erik; Cacho, Cephise M; Springate, Emma; Turcu, I C Edmond; Tallents, Greg J

    2012-04-20

    Accurate values of the extreme ultraviolet (EUV) optical properties of materials are required to make EUV optics such as filters and multilayer mirrors. The optical properties of aluminum studied in this report are required, in particular, as aluminum is used as an EUV filter material. The complex refractive index of solid aluminum and the imaginary part of the refractive index of solid iron between 17 eV and 39 eV have been measured using EUV harmonics produced from an 800 nm laser focused to 10(14) Wcm(2) in an argon gas jet impinging on a double slit interferometer.

  10. Sounding rocket measurement of the absolute solar EUV flux utilizing a silicon photodiode

    Science.gov (United States)

    Ogawa, H. S.; Mcmullin, D.; Judge, D. L.; Canfield, L. R.

    1990-01-01

    A newly developed stable and high quantum efficiency silicon photodiode was used to obtain an accurate measurement of the integrated absolute magnitude of the solar extreme UV photon flux in the spectral region between 50 and 800 A. The adjusted daily 10.7-cm solar radio flux and sunspot number were 168.4 and 121, respectively. The unattenuated absolute value of the solar EUV flux at 1 AU in the specified wavelength region was 6.81 x 10 to the 10th photons/sq cm per s. Based on a nominal probable error of 7 percent for National Institute of Standards and Technology detector efficiency measurements in the 50- to 500-A region (5 percent on longer wavelength measurements between 500 and 1216 A), and based on experimental errors associated with the present rocket instrumentation and analysis, a conservative total error estimate of about 14 percent is assigned to the absolute integral solar flux obtained.

  11. Spectral, spatial and radiometric factors in cover type discrimination

    Science.gov (United States)

    Alexander, D.; Buis, J.; Acevedo, W.; Wrigley, R.

    1983-01-01

    The influence of spatial, spectral, and radiometric resolutions on the utilization of Thematic Mapper (TM) and Multispectral Scanner (MSS) data is assessed quantitatively using a 2 x 2 x 2 factorial design experiment. Eight possible factor combinations were examined for agricultural, urban, forestry, range, and water types of land covers for three levels of information. Spectral bandwidths were configured to simulate all four Landsat MSS channels and Landsat TM channels 1, 2, 3, 4, and 7. By means of bar charts and tables it is shown that the 8-bit radiometric and 75-meter spatial resolutions provide a higher overall accuracy than the 6-bit radiometric and 25-meter spatial resolutions. Spectrally, the difference between the four MSS channels and five TM channel configurations is noted to be insignificant.

  12. Rising from the Dead: the Revival of the EUVE E/PO

    Science.gov (United States)

    Cullison, J. L.; Craig, N.; Stroozas, B. A.; Malina, R. F.

    2000-05-01

    NASA's Extreme Ultraviolet Explorer (EUVE) is dedicated to gathering data on our sky via instrumentation sensitive to the region of light between 76 and 760 angstroms. Since the all-sky survey was completed in 1993, astronomers have made studies of selected objects with EUVE to determine their physical properties and chemical compositions. Also, they have learned about the conditions that prevail and the processes at work in stars, planets, and other sources of EUV radiation. In its pre-launch and early prime mission, EUVE had a thriving education and public outreach (E/PO) program formed expressly to spread the word on recent EUVE findings, but due to budgetary restraints in its extended mission, the project has been unable in recent years to support extensive E/PO efforts. Now in it's eighth year of operation, the EUVE Project has revived its E/PO efforts without significantly impacting its shoe-string budget. Web sites are being reconstructed, including sophisticated interactive learning environments where elementary through college level students, teachers, and the general public can select from lesson plans including, for example, an introductory astronomical module on the relationship between spectra and object classification, download three-dimensional cutouts of the EUVE skymap, view a slide show on the history and instrumentation of the satellite, take a virtual tour of the EUVE observatory, find where EUVE is in its orbit, and catch up on EUVE's most recent news and events. EUVE's revived internet E/PO presence is supplemented with staff and technical support (up to 10% of each staff person's time) of hands-on elementary and community projects coordinated by the UC Berkeley Center for Science Education (the now independent offshoot of the original EUVE E/PO). All elements of the EUVE E/PO are supported without impacting the efficient and highly productive science goals of the small-staffed mission. Additional EUVE E/PO efforts in the works include

  13. The Global Earth Observation System of Systems (GEOSS) and metrological support for measuring radiometric properties of objects of observations

    Science.gov (United States)

    Krutikov, V. N.; Sapritsky, V. I.; Khlevnoy, B. B.; Lisiansky, B. E.; Morozova, S. P.; Ogarev, S. A.; Panfilov, A. S.; Sakharov, M. K.; Samoylov, M. L.; Bingham, G.; Humpherys, T.; Thurgood, A.; Privalsky, V. E.

    2006-04-01

    The international Global Earth Observation System of Systems is at its initial stage. We present some general information about the program and formulate the task of ensuring the uniformity of radiometric measurements to be conducted by all the participating national systems. Methods of solving the task are suggested on the basis of the wide application of standard sources that use phase transition of eutectic alloys and pure metals as well as with the help of improved ground calibration facilities.

  14. Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

    NARCIS (Netherlands)

    Chen, Juequan; Chen, Juequan; Louis, Eric; Louis, Eric; Wormeester, Herbert; Harmsen, Rob; van de Kruijs, Robbert Wilhelmus Elisabeth; Lee, Christopher James; van Schaik, Willem; Bijkerk, Frederik

    2011-01-01

    Carbon deposition on extreme ultraviolet (EUV) optics was observed due to photon-induced dissociation of hydrocarbons in a EUV lithography environment. The reflectance loss of the multilayer mirror is determined by the carbon layer thickness and density. To study the influence of various forms of

  15. EUV multilayer mirror, optical system including a multilayer mirror and method of manufacturing a multilayer mirror

    NARCIS (Netherlands)

    Huang, Qiushi; Louis, Eric; Bijkerk, Frederik; de Boer, Meint J.; von Blanckenhagen, G.

    2016-01-01

    A multilayer mirror (M) reflecting extreme ultraviolet (EUV) radiation from a first wave-length range in a EUV spectral region comprises a substrate (SUB) and a stack of layers (SL) on the substrate, the stack of layers comprising layers comprising a low index material and a high index material, the

  16. Preliminary geological and radiometric studies of granitoids of Zing ...

    African Journals Online (AJOL)

    ... igneous texture that the enclaves are syngenetic probably representing remnants of pre-existing rocks from which the granitoids were derived. The enhanced radiometric counts in fine-grained granite and pegmatite may be related to uranium occurrences of magmatic/hydrothermal nature around Mika, Jada and Nyaza.

  17. Assessment of Aero-radiometric Data of Southern Anambra Basin ...

    African Journals Online (AJOL)

    ADOWIE PERE

    JASEM https://dx.doi.org/10.4314/jasem.v21i4.15. Key Words: Aero-radiometric; Radiogenic Heat; Anambra Basin; Geothermal. Anambra basin has not really been subjected to detailed radiogenic heat production despite the geological features that suggest that the area has prospect for geothermal energy production. This.

  18. Measurements and Modeling of Heliospheric EUV Spectral Irradiance and Luminosity

    Science.gov (United States)

    Floyd, L. E.; McMullin, D. R.; Auchere, F.

    2012-12-01

    For more than 15 years, The EIT and the later EUVI instruments aboard SoHO and STEREO, respectively, have provided a time series of images of the solar radiance in the HeII 30.4 nm transition region and three coronal emission lines (FeIX/X, FeXII, and FeXV) of differing temperatures. While the EIT measurements were gathered from a position very near to the Earth-Sun axis, the EUVI measurements were gathered at angles ranging up to and in excess of ±90 degrees in solar longitude from the Earth-Sun axis. Using a Differential Emission Measure (DEM) model, these measurements provide the basis for estimates of the spectral irradiance for the entire solar spectrum up to about 50 nm at any position in the heliosphere. These spectra are utilized in this work for two purposes. First, the photoionization rate of neutral He at each position is calculated. Neutral He is of interest because it traverses the heliopause relatively undisturbed and therefore provides a measure of isotopic parameters beyond the heliosphere. Second, we use these generate a time series of estimates of the solar EUV spectral luminosity extending from the recent post Solar Cycle 23 minimum into the current unusually weak rise of Solar Cycle 24. Because this EUV spectral luminosity is the sum of all solar radiation at each wavelength in every direction, their time series should not contain any systematic 27-day solar rotation periodicities as do typical solar activity indices and its presence would be an indication of time series reliability. This EUV luminosity time series is compared with other solar indices such as SSN and the F10.7 radio flux.

  19. Mirror contamination and secondary electron effects during EUV reflectivity analysis

    Science.gov (United States)

    Catalfano, M.; Kanjilal, A.; Al-Ajlony, A.; Harilal, S. S.; Hassanein, A.; Rice, B.

    2012-03-01

    We investigated Ru mirror contamination and subsequent EUV reflectivity loss using the IMPACT facility at Purdue University. Because Ru can either be used as a grazing mirror or as a capping layer for multilayer normal mirror, we examined the angular dependency of XPS peak area intensity at the O 1s and Ru 3d regions as well as the effects of sputtering. Although no change in intensity has been observed at lower take-off angles from the target surface, the peak area intensity starts changing with increasing θ (i.e., emission observation angle, representing the angle between the target surface plane and detector entrance). Among different components, the effect of water and oxidized carbon are found to be most notable when viewed at lower θ, and primarily responsible for degrading the reflectivity of the Ru layer. On the other hand, the effect of OH becomes dominant with increasing observation angle θ, and thus plays a key role to suppress optical transmission. Moreover, atomic carbon effect is found to peak when observed at 30°, and most likely plays an important role in degrading both reflectivity and transmission. This is also because of the total photon path length in the Ru film at different angles. During the contamination process, the EUV reflectivity of the Ru film is found to significantly degrade in the presence of additional secondary electrons from the focusing Ru mirror of the EUV setup. This effect could be explained in the light of a competition between oxidation and carbonization processes on Ru surface.

  20. TIMED solar EUV experiment: preflight calibration results for the XUV photometer system

    Science.gov (United States)

    Woods, Thomas N.; Rodgers, Erica M.; Bailey, Scott M.; Eparvier, Francis G.; Ucker, Gregory J.

    1999-10-01

    The Solar EUV Experiment (SEE) on the NASA Thermosphere, Ionosphere, and Mesosphere Energetics and Dynamics (TIMED) mission will measure the solar vacuum ultraviolet (VUV) spectral irradiance from 0.1 to 200 nm. To cover this wide spectral range two different types of instruments are used: a grating spectrograph for spectra between 25 and 200 nm with a spectral resolution of 0.4 nm and a set of silicon soft x-ray (XUV) photodiodes with thin film filters as broadband photometers between 0.1 and 35 nm with individual bandpasses of about 5 nm. The grating spectrograph is called the EUV Grating Spectrograph (EGS), and it consists of a normal- incidence, concave diffraction grating used in a Rowland spectrograph configuration with a 64 X 1024 array CODACON detector. The primary calibrations for the EGS are done using the National Institute for Standards and Technology (NIST) Synchrotron Ultraviolet Radiation Facility (SURF-III) in Gaithersburg, Maryland. In addition, detector sensitivity and image quality, the grating scattered light, the grating higher order contributions, and the sun sensor field of view are characterized in the LASP calibration laboratory. The XUV photodiodes are called the XUV Photometer System (XPS), and the XPS includes 12 photodiodes with thin film filters deposited directly on the silicon photodiodes' top surface. The sensitivities of the XUV photodiodes are calibrated at both the NIST SURF-III and the Physikalisch-Technische Bundesanstalt (PTB) electron storage ring called BESSY. The other XPS calibrations, namely the electronics linearity and field of view maps, are performed in the LASP calibration laboratory. The XPS and solar sensor pre-flight calibration results are primarily discussed as the EGS calibrations at SURF-III have not yet been performed.

  1. EUV lithography for 22nm half pitch and beyond: exploring resolution, LWR, and sensitivity tradeoffs

    Science.gov (United States)

    Putna, E. Steve; Younkin, Todd R.; Leeson, Michael; Caudillo, Roman; Bacuita, Terence; Shah, Uday; Chandhok, Manish

    2011-04-01

    The International Technology Roadmap for Semiconductors (ITRS) denotes Extreme Ultraviolet (EUV) lithography as a leading technology option for realizing the 22nm half pitch node and beyond. According to recent assessments made at the 2010 EUVL Symposium, the readiness of EUV materials remains one of the top risk items for EUV adoption. The main development issue regarding EUV resists has been how to simultaneously achieve high resolution, high sensitivity, and low line width roughness (LWR). This paper describes our strategy, the current status of EUV materials, and the integrated post-development LWR reduction efforts made at Intel Corporation. Data collected utilizing Intel's Micro- Exposure Tool (MET) is presented in order to examine the feasibility of establishing a resist process that simultaneously exhibits <=22nm half-pitch (HP) L/S resolution at <=11.3mJ/cm2 with <=3nm LWR.

  2. Surface modification by EUV laser beam based on capillary discharge

    Czech Academy of Sciences Publication Activity Database

    Frolov, Oleksandr; Koláček, Karel; Schmidt, Jiří; Štraus, Jaroslav; Prukner, Václav; Shukurov, A.

    -, č. 58 (2011), s. 484-487 ISSN 2010-376X. [International Conference on Fusion and Plasma Physics. Bali, Indonésie, 26.10.2011-28.10.2011] R&D Projects: GA AV ČR KAN300100702; GA MŠk LA08024; GA MŠk(CZ) LC528 Institutional research plan: CEZ:AV0Z20430508 Keywords : soft x-ray * EUV * laser * radiation * source * capillary * discharge * plasma * ablation * surface modification Subject RIV: BL - Plasma and Gas Discharge Physics http://www.waset.org/journals/waset/v58/v58-99.pdf

  3. High Accuracy Radiation TSP-type Thermometers for Radiometric Scale Realization in the Temperature Range from 600 to 3200 °C

    Science.gov (United States)

    Samoylov, M. L.; Ogarev, S. A.; Khlevnoy, B. B.; Khromchenko, V. B.; Mekhontsev, S. N.; Sapritsky, V. I.

    2003-09-01

    We have designed at VNIIOFI a high-accuracy radiation thermometer, model TSP-2 (Transfer Standard Pyrometer), for radiometric scale dissemination within the temperature range from 600°C to 3200 °C. This thermometer has been recently modified and investigated. The new TSP-4 model of radiation thermometer is under development now.

  4. Initial Radiometric Characteristics of KOMPSAT-3A Multispectral Imagery Using the 6S Radiative Transfer Model, Well-Known Radiometric Tarps, and MFRSR Measurements

    OpenAIRE

    Jong-Min Yeom; Jisoo Hwang; Jae-Heon Jung; Kwon-Ho Lee; Chang-Suk Lee

    2017-01-01

    On-orbit radiometric characterization of the multispectral (MS) imagery of the Korea Aerospace Research Institute (KARI)’s Korea Multi-Purpose Satellite-3A (KOMPSAT-3A), which was launched on 25 March 2015, was conducted to provide quantitative radiometric information about KOMPSAT-3A. During the in-orbit test (IOT), vicarious radiometric calibration of KOMPSAT-3A was performed using the Second Simulation of a Satellite Signal in the Solar Spectrum (6S) radiative transfer model. The character...

  5. Ukrainian radiometric realization of the candela

    Science.gov (United States)

    Kupko, A. D.; Nazarenko, L. A.

    1999-12-01

    The standard of luminous intensity unit, which is built on the base of the cryogen absolute radiometer and stabilized on the mercury lamp as monochromatic radiator, is described in here. The root-mean-square deviation of the random component of an error was roughly 0.1%. The system of unit transfer permits to pass to the characteristics of a continuous spectrum.

  6. Radiometric Calibration of Earth-Observing Sensors Using the Radiometric Calibration Test Site (RadCaTS)

    Science.gov (United States)

    Czapla-Myers, J.; Anderson, N. J.; Thome, K. J.; Biggar, S. F.

    2014-12-01

    The Remote Sensing Group (RSG) of the College of Optical Sciences at the University of Arizona uses the reflectance-based approach to perform the absolute radiometric calibration of such sensors as Landsat 5 TM, Landsat 7 ETM+, Landsat 8 OLI, Terra and Aqua MODIS, ASTER, RapidEye, and others. The reflectance-based approach requires that personnel be present at a test site during the sensor overpass, so the Radiometric Calibration Test Site (RadCaTS) was developed in order to capture data during every possible overpass, which assists in the temporal trending of the radiometric calibration of earth-observing sensors. The number of earth-observing sensors is rapidly increasing in recent years, and RadCaTS provides the ability to radiometrically calibrate them without the requirement of frequent field campaigns. The 2013 launch of Landsat 8 provides a unique opportunity for RadCaTS in that it is being used to supplement the in situ measurements by RSG ground personnel, and it will be used throughout the lifetime of the Landsat 8 mission. This allows more data to be collected throughout the year, and it also allows the accuracy and uncertainty of RadCaTS to be analyzed. The current top-of-atmosphere (TOA) spectral radiance uncertainty of the reflectance-based approach is ~2.6% in the mid-visible region of the spectrum, and current work indicates that the uncertainty of RadCaTS in TOA spectral radiance is ~3-4%. This work presents the radiometric calibration results of RadCaTS for a variety of sensors such as Landsat 7 ETM+, Landsat 8 OLI, Terra and Aqua MODIS, MISR, ASTER, and Suomi NPP VIIRS.

  7. Metrology tools for EUV-source characterization and optimization

    Science.gov (United States)

    Missalla, Thomas; Schuermann, Max C.; Lebert, Rainer; Wies, Christian; Juschkin, Larissa; Klein, Roman M.; Scholze, Frank; Ulm, Gerhard; Egbert, Andre; Tkachenko, Boris; Chichkov, Boris N.

    2004-05-01

    The development of suitable radiation sources for extreme ultraviolet lithography (EUVL) is a major challenge. For the optimization of these sources and for the determination of the parameters needed for the system design and the system integration these sources have to be characterized in terms of the absolute in-band power, the spectral distribution in the EUV spectral region and the out-of-band spectral regions, the spatial distribution of the emitting volume and the angular distribution of the emission. For improving the lifetime of such sources, generally accepted as one key risk with EUVL, another task, the debris emitted from sources under development has to be investigated. Therefore, JENOPTIK Mikrotechnik GmbH is co-operating with the Laser Laboratorium Goettingen, the Physikalisch-Technische Bundesanstalt (PTB) and the AIXUV GmbH in developing ready-for-use metrology tools for EUVL source characterization and optimization. The set of the tools employed for EUV-source characterization is presented in detail as well as concepts for calibration and measurement procedures.

  8. Optical, UV, and EUV Oscillations of SS Cygni in Outburst

    Energy Technology Data Exchange (ETDEWEB)

    Mauche, C W

    2003-12-19

    I provide a review of observations in the optical, UV (HST), and EUV (EUVE and Chandra LETG) of the rapid periodic oscillations of nonmagnetic, disk-accreting, high mass-accretion rate cataclysmic variables (CVs), with particular emphasis on the dwarf nova SS Cyg in outburst. In addition, I drawn attention to a correlation, valid over nearly six orders of magnitude in frequency, between the frequencies of the quasi-periodic oscillations (QPOs) of white dwarf, neutron star, and black hole binaries. This correlation identifies the high frequency quasi-coherent oscillations (so-called ''dwarf nova oscillations'') of CVs with the kilohertz QPOs of low mass X-ray binaries (LMXBs), and the low frequency and low coherence QPOs of CVs with the horizontal branch oscillations (or the broad noise component identified as such) of LMXBs. Assuming that the same mechanisms produce the QPOs of white dwarf, neutron star, and black hole binaries, this correlation has important implications for QPO models.

  9. Static and dynamic photoresist shrinkage effects in EUV photoresists

    Science.gov (United States)

    Bunday, Benjamin; Montgomery, Cecilia; Montgomery, Warren; Cordes, Aaron

    2012-03-01

    Photoresist shrinkage (a.k.a. line slimming) is an important systematic uncertainty source in critical dimension-scanning electron microscope (CD-SEM) metrology of lithographic features [1][2][3][4][5]. In terms of metrology gauge metrics, it influences both the precision and the accuracy of CD-SEM measurements, while locally damaging the sample. Minimization or elimination of shrinkage is desirable, yet elusive. This error source will furthermore be a factor in CDSEM metrology on such polymer materials into the era of EUV lithography, such that learning to work around this issue will continue to be necessary. Recent work has demonstrated improved understanding of the trends in the shrinkage response depending on electron beam and target parameters in the static measurement case [2][3][4][5][6]. Another recent work has highlighted a second mode of shrinkage that is apparent over time and progresses as a function of time between consecutive measurements, a form of "dynamic shrinkage" that appears to be activated by electron beam, in which the activated feature perpetually and logarithmically shrinks [7][8]. In this work, we will explore both the static and dynamic shrinkage behaviors of various EUV photoresists. The static shrinkage behaviors will be tested for compliance with the SEMATECH shrinkage model [5][6], and further studies will confirm whether or not the dynamic effects are observable. Knowledge of secondary trends in dynamic shrinkage will also be further explored, including how these vary with electron beam energy, activation dose, feature size, and other parameters.

  10. The EUV Emission in Comet-Solar Corona Interactions

    Science.gov (United States)

    Bryans, Paul; Pesnell, William Dean; Schrijver, Carolus J.; Brown, John C.; Battams, Karl; Saint-Hilaire, Pasal; Liu, Wei; Hudson, Hugh S.

    2011-01-01

    The Atmospheric Imaging Assembly (AlA) on the Solar Dynamics Observatory (SDO) viewed a comet as it passed through the solar corona on 2011 July 5. This was the first sighting of a comet by a EUV telescope. For 20 minutes, enhanced emission in several of the AlA wavelength bands marked the path of the comet. We explain this EUV emission by considering the evolution of the cometary atmosphere as it interacts with the ambient solar atmosphere. Water ice in the comet rapidly sublimates as it approaches the Sun. This water vapor is then photodissociated, primarily by Ly-alpha, by the solar radiation field to create atomic Hand O. Other molecules present in the comet also evaporate and dissociate to give atomic Fe and other metals. Subsequent ionization of these atoms can be achieved by a number of means, including photoionization, electron impact, and charge exchange with coronal protons and other highly-charged species. Finally, particles from the cometary atmosphere are thermalized to the background temperature of the corona. Each step could cause emission in the AlA bandpasses. We will report here on their relative contribution to the emission seen in the AlA telescopes.

  11. Overcoming etch challenges related to EUV based patterning (Conference Presentation)

    Science.gov (United States)

    Metz, Andrew W.; Cottle, Hongyun; Honda, Masanobu; Morikita, Shinya; Kumar, Kaushik A.; Biolsi, Peter

    2017-04-01

    Research and development activities related to Extreme Ultra Violet [EUV] defined patterning continue to grow for plasma etch trade-offs related to traditional approaches of PR smoothing, descum implementation and maintaining 2D aspect ratios of short lines or elliptical contacts concurrent with ultra-high photo resist [PR] selectivity. In this paper we will discuss sources of LER/LWR, impact of material choice, integration, and innovative plasma process techniques and describe how TELTM VigusTM CCP Etchers can enhance PR selectivity, reduce LER/LWR, and maintain 2D aspect ratio of incoming patterns. Beyond traditional process approaches this paper will show the utility of: [1] DC Superposition in enhancing EUV resist hardening and selectivity, increasing resistance to stress induced PR line wiggle caused by CFx passivation, and mitigating organic planarizer wiggle; [2] Quasi Atomic Layer Etch [Q-ALE] for ARC open eliminating the tradeoffs between selectivity, CD, and shrink ratio control; and [3] ALD+Etch FUSION technology for feature independent CD shrink and LER reduction. Applicability of these concepts back transferred to 193i based lithography is also confirmed.

  12. A comparative study of different radiometric methodologies for the determination of 226Ra in water

    Directory of Open Access Journals (Sweden)

    Ibrahim F. Al-Hamarneh

    2018-02-01

    Full Text Available An evaluation of various radiometric methods to analyze 226Ra in water has been employed on a set of 10 standard solutions of different concentrations in the range of 1–10 Bq/L−1. The analysis was carried out using well-established procedures by means of gamma-ray, alpha-particle and liquid scintillation spectrometry. The feasibility of the various methods has been quantified in terms of relative standard error and percentage error. Correlations between the various methods have been presented and discussed. In general, good agreement was found in the results of various methodologies, which assures the accuracy of the methods and allows for the validation of instrumentation and procedures. Of the different methods adopted here, a combined procedure for the determination of 226Ra along with 228Ra using Quantulus 1220 ultra-low level background liquid scintillation counting gave the most accurate results.

  13. Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

    Science.gov (United States)

    Makimura, Tetsuya; Torii, Shuichi; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Niino, Hiroyuki; Okada, Tatsuo; Murakami, Kouichi

    2011-06-01

    We have investigated responses of PDMS, PMMA and acrylic block copolymers (BCP) to EUV light from laserproduced plasma beyond ablation thresholds and micromachining. We generated wide band EUV light around 100 eV by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band EUV light at 11 and 13 nm were generated by irradiation of solid Xe and Sn targets, respectively, with pulsed CO2 laser light. The generated EUV light was condensed onto samples, using an ellipsoidal mirror. The EUV light was incident through windows of contact masks on the samples. We found that through-holes with a diameter of 1 μm can be fabricated in PDMS sheets with thicknesses of 10 μm. PDMS sheets are ablated if they are irradiated with EUV light beyond a threshold power density, while PDMS surfaces were modified by irradiation with the narrow band EUV light at lower power densities. Effective ablation of PMMA sheets can be applied to a LIGA-like process for fabricating micro-structures of metals using the practical apparatus. Furthermore, BCP sheets were ablated to have micro-structures. Thus, we have developed a practical technique for microma chining of PMMA, PDMS and BCP sheets in a micrometer scale.

  14. Physical and chemical modifications of PET surface using a laser-plasma EUV source

    Science.gov (United States)

    Bartnik, A.; Fiedorowicz, H.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Biliński, A.; Chernyayeva, O.; Sobczak, J. W.

    2010-06-01

    Extreme ultraviolet (EUV) radiation is the electromagnetic radiation ranging from vacuum ultraviolet to soft X-rays. A single EUV photon carries enough energy to ionize any atom or molecule. The penetration depth of the radiation in any material is very short, ranging from tens to hundreds nanometers. Intense EUV pulses can remove material from the surface or modify its morphology or/and chemical structure. In this work, the radiation from a laser-plasma EUV source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The PET samples were irradiated with the EUV pulses emitted from krypton plasma and focused with a gold-plated ellipsoidal collector. The spectrum of the focused radiation covered the wavelength range from 9 to 70 nm. The PET samples were irradiated for 1 s-2 min at a 10-Hz repetition rate. Surface morphology of polymer samples after irradiation was investigated using a scanning electron microscope. Changes in chemical surface structure of the irradiated samples were investigated using an X-ray photoelectron spectroscopy. Different kinds of surface microstructures were obtained depending on the EUV fluence in a single pulse and the total EUV fluence. XPS measurements also revealed a modification of the chemical structure.

  15. Effects of plasma spatial profile on conversion efficiency of laser produced plasma sources for EUV lithography

    Science.gov (United States)

    Hassanein, A.; Sizyuk, V.; Sizyuk, T.; Harilal, S.

    2009-03-01

    Extreme ultraviolet (EUV) lithography devices that use laser produced plasma (LPP), discharge produced plasma (DPP), and hybrid devices need to be optimized to achieve sufficient brightness with minimum debris generation to support the throughput requirements of High-Volume Manufacturing (HVM) lithography exposure tools with long lifetime. Source performance, debris mitigation, and reflector system are all critical to efficient EUV collection and component lifetime. Enhanced integrated models are continued to be developed using HEIGHTS computer package to simulate EUV emission at high power and debris generation and transport in multiple and colliding LPP. A new center for materials under extreme environments (CMUXE) is established to benchmark HEIGHTS models for various EUV related issues. The models being developed and enhanced include, for example, new ideas and parameters of multiple laser beams in different geometrical configurations and with different pre-pulses to maximize EUV production. Recent experimental and theoretical work show large influence of the hydrodynamic processes on EUV generation. The effect of plasma hydrodynamics evolution on the EUV radiation generation was analyzed for planar and spherical geometry of a tin target in LPP devices. The higher efficiency of planar target in comparison to the spherical geometry was explained with better hydrodynamic containment of the heated plasma. This is not the case if the plasma is slightly overheated. Recent experimental results of the conversion efficiency (CE) of LPP are in good agreement with HEIGHTS simulation.

  16. Towards a stand-alone high-throughput EUV actinic photomask inspection tool: RESCAN

    Science.gov (United States)

    Rajendran, Rajeev; Mochi, Iacopo; Helfenstein, Patrick; Mohacsi, Istvan; Redford, Sophie; Mozzanica, Aldo; Schmitt, Bernd; Yoshitake, Shushuke; Ekinci, Yasin

    2017-03-01

    With extreme ultraviolet (EUV) lithography getting ready to enter high volume manufacturing, there is an imminent need to address EUV mask metrology infrastructure. Actinic defect inspection of patterned EUV photomasks has been identified as an essential step for mask qualification, but there is no commercial tool available right now. We address this gap with the RESCAN tool, a defect inspection platform being built at Paul Scherrer Institut (PSI), co-developed in collaboration with Nuflare Inc, Japan. RESCAN uses Scanning Scattering Contrast Microscopy (SSCM) and Scanning Coherent Diffraction Imaging (SCDI) for fast defect detection and fine defect localization. The development of a stand-alone tool based on these techniques relies on the availability of (1) a bright coherent EUV source with a small footprint and (2) a high frame-rate pixel detector with extended dynamic range and high quantum efficiency for EUV. We present two in-house projects at PSI addressing the development of these components: COSAMI and JUNGFRAU. COSAMI (COmpact Source for Actinic Mask Inspection), is a high-brightness EUV source optimized for EUV photons with a relatively small footprint. JUNGFRAU (adJUstiNg Gain detector FoR the Aramis User station) is a silicon-based hybrid pixel detector, developed in house at PSI and prototyped for EUV. With a high frame rate and dynamic range at 13.5 nm, this sensor solution is an ideal candidate for the RESCAN platform. We believe that these ongoing source and sensor programs will pave the way towards a comprehensive solution for actinic patterned mask inspection bridging the gap of actinic defect detection and identification on EUV reticles.

  17. Geometric Calibration and Radiometric Correction of the Maia Multispectral Camera

    Science.gov (United States)

    Nocerino, E.; Dubbini, M.; Menna, F.; Remondino, F.; Gattelli, M.; Covi, D.

    2017-10-01

    Multispectral imaging is a widely used remote sensing technique, whose applications range from agriculture to environmental monitoring, from food quality check to cultural heritage diagnostic. A variety of multispectral imaging sensors are available on the market, many of them designed to be mounted on different platform, especially small drones. This work focuses on the geometric and radiometric characterization of a brand-new, lightweight, low-cost multispectral camera, called MAIA. The MAIA camera is equipped with nine sensors, allowing for the acquisition of images in the visible and near infrared parts of the electromagnetic spectrum. Two versions are available, characterised by different set of band-pass filters, inspired by the sensors mounted on the WorlView-2 and Sentinel2 satellites, respectively. The camera details and the developed procedures for the geometric calibrations and radiometric correction are presented in the paper.

  18. Radiometric microbiologic assay for the biologically active forms of niacin

    Energy Technology Data Exchange (ETDEWEB)

    Kertcher, J.A.; Guilarte, T.R.; Chen, M.F.; Rider, A.A.; McIntyre, P.A.

    1979-05-01

    A radiometric microbiologic assay has been developed for the determination of niacin in biologic fluids. Lactobacillus plantarum produced /sup 14/CO/sub 2/ from L-(U-/sup 14/C) malic acid in quantities proportional to the amount of niacin present. The assay is specific for the biologically active forms of niacin in humans. Thirty normal hemolysates were analyzed and the values ranged from 13.0 to 17.8 ..mu..g niacin/ml RBC (mean = 15.27 +- 1.33 s.d.). Good recovery and reproducibility studies were obtained with this assay. On thirty blood samples, correlation was excellent between the radiometric and the conventional turbidimetric assays.

  19. Initial examination of radar imagery of optical radiometric calibration sites

    Science.gov (United States)

    Teillet, Philippe M.; Fedosejevs, Gunar; Gauthier, D.; D'Iorio, Marie A.; Rivard, B.; Budkewitsch, P.

    1995-12-01

    In-flight absolute radiometric calibration is critical for multi-temporal and multi-sensor data comparisons. In the case of vicarious calibration of optical sensors based on ground-level measurements, the test site must be well characterized in spatial, radiometric, spectral, and temporal domains. Remotely sensed data acquired at other wavelengths can contribute to a baseline understanding of ground targets and provide insight into the usefulness of such targets for in-flight calibration of optical sensors. With these considerations in mind, multi-temporal ERS-1 SAR data have been obtained for White Sands, New Mexico, and Lunar Lake and Railroad Valley playas in Nevada. This paper reports on an initial examination of these SAR image data sets and the significant pattern changes observed in the scenes. It is concluded that surface roughness, soil moisture and run-off are major factors giving rise to the observed scene characteristics.

  20. Using aberration test patterns to optimize the performance of EUV aerial imaging microscopes

    Energy Technology Data Exchange (ETDEWEB)

    Mochi, Iacopo; Goldberg, Kenneth A.; Miyakawa, Ryan; Naulleau, Patrick; Han, Hak-Seung; Huh, Sungmin

    2009-06-16

    The SEMATECH Berkeley Actinic Inspection Tool (AIT) is a prototype EUV-wavelength zoneplate microscope that provides high quality aerial image measurements of EUV reticles. To simplify and improve the alignment procedure we have created and tested arrays of aberration-sensitive patterns on EUV reticles and we have compared their images collected with the AIT to the expected shapes obtained by simulating the theoretical wavefront of the system. We obtained a consistent measure of coma and astigmatism in the center of the field of view using two different patterns, revealing a misalignment condition in the optics.

  1. Radiometric consistency in source specifications for lithography

    Science.gov (United States)

    Rosenbluth, Alan E.; Tirapu Azpiroz, Jaione; Lai, Kafai; Tian, Kehan; Melville, David O. S.; Totzeck, Michael; Blahnik, Vladan; Koolen, Armand; Flagello, Donis

    2008-03-01

    There is a surprising lack of clarity about the exact quantity that a lithographic source map should specify. Under the plausible interpretation that input source maps should tabulate radiance, one will find with standard imaging codes that simulated wafer plane source intensities appear to violate the brightness theorem. The apparent deviation (a cosine factor in the illumination pupil) represents one of many obliquity/inclination factors involved in propagation through the imaging system whose interpretation in the literature is often somewhat obscure, but which have become numerically significant in today's hyper-NA OPC applications. We show that the seeming brightness distortion in the illumination pupil arises because the customary direction-cosine gridding of this aperture yields non-uniform solid-angle subtense in the source pixels. Once the appropriate solid angle factor is included, each entry in the source map becomes proportional to the total |E|^2 that the associated pixel produces on the mask. This quantitative definition of lithographic source distributions is consistent with the plane-wave spectrum approach adopted by litho simulators, in that these simulators essentially propagate |E|^2 along the interfering diffraction orders from the mask input to the resist film. It can be shown using either the rigorous Franz formulation of vector diffraction theory, or an angular spectrum approach, that such an |E|^2 plane-wave weighting will provide the standard inclination factor if the source elements are incoherent and the mask model is accurate. This inclination factor is usually derived from a classical Rayleigh-Sommerfeld diffraction integral, and we show that the nominally discrepant inclination factors used by the various diffraction integrals of this class can all be made to yield the same result as the Franz formula when rigorous mask simulation is employed, and further that these cosine factors have a simple geometrical interpretation. On this basis

  2. A Radiometric Uncertainty Tool for the Sentinel 2 Mission

    Directory of Open Access Journals (Sweden)

    Javier Gorroño

    2017-02-01

    Full Text Available In the framework of the European Copernicus programme, the European Space Agency (ESA has launched the Sentinel-2 (S2 Earth Observation (EO mission which provides optical high spatial resolution imagery over land and coastal areas. As part of this mission, a tool (named S2-RUT, from Sentinel-2 Radiometric Uncertainty Tool has been developed. The tool estimates the radiometric uncertainty associated with each pixel in the top-of-atmosphere (TOA reflectance factor images provided by ESA. This paper describes the design and development process of the initial version of the S2-RUT tool. The initial design step describes the S2 radiometric model where a set of uncertainty contributors are identified. Each of the uncertainty contributors is specified by reviewing the pre- and post-launch characterisation. The identified uncertainty contributors are combined following the guidelines in the ‘Guide to Expression of Uncertainty in Measurement’ (GUM model and this combination model is further validated by comparing the results to a multivariate Monte Carlo Method (MCM. In addition, the correlation between the different uncertainty contributions and the impact of simplifications in the combination model have been studied. The software design of the tool prioritises an efficient strategy to read the TOA reflectance factor images, extract the auxiliary information from the metadata in the satellite products and the codification of the resulting uncertainty image. This initial version of the tool has been implemented and integrated as part of the Sentinels Application Platform (SNAP.

  3. Accuracy assessment for the radiometric calibration of imaging sensors using preflight techniques relying on the sun as a source

    Science.gov (United States)

    Thome, K.; Czapla-Myers, J.; Kuester, M.; Anderson, N.

    2008-08-01

    The Remote Sensing Group (RSG) at the University of Arizona has performed high-accuracy radiometric calibration in the laboratory for more than 20 years in support of vicarious calibration of space-borne and airborne imaging sensors. Typical laboratory calibration relies on lamp-based sources which, while convenient to operate and control, do not simulate the solar spectrum that is the basic energy source for many of the imaging systems. Using the sun as a source for preflight radiometric calibration reduces uncertainties caused by the spectral mismatch between the preflight and inflight calibration, especially in the case in which a solar diffuser is the inflight calibration method. Difficulties in using the sun include varying atmospheric conditions, changing solar angle during the day and with season, and ensuring traceability to national standards. This paper presents several approaches using the sun as a radiometric calibration source coupled with the expected traceable accuracies for each method. The methods include direct viewing of the solar disk with the sensor of interest, illumination of the sensor's inflight solar diffuser by the sun, and illumination of an external diffuser that is imaged by the sensor. The results of the error analysis show that it is feasible to achieve preflight calibration using the sun as a source at the same level of uncertainty as those of lamp-based approaches. The error analysis is evaluated and compared to solar-radiation-based calibrations of one of RSG's laboratory-grade radiometers.

  4. Etch bias inversion during EUV mask ARC etch

    Science.gov (United States)

    Lajn, Alexander; Rolff, Haiko; Wistrom, Richard

    2017-07-01

    The introduction of EUV lithography to high volume manufacturing is now within reach for 7nm technology node and beyond (1), at least for some steps. The scheduling is in transition from long to mid-term. Thus, all contributors need to focus their efforts on the production requirements. For the photo mask industry, these requirements include the control of defectivity, CD performance and lifetime of their masks. The mask CD performance including CD uniformity, CD targeting, and CD linearity/ resolution, is predominantly determined by the photo resist performance and by the litho and etch processes. State-of-the-art chemically amplified resists exhibit an asymmetric resolution for directly and indirectly written features, which usually results in a similarly asymmetric resolution performance on the mask. This resolution gap may reach as high as multiple tens of nanometers on the mask level in dependence of the chosen processes. Depending on the printing requirements of the wafer process, a reduction or even an increase of this gap may be required. A potential way of tuning via the etch process, is to control the lateral CD contribution during etch. Aside from process tuning knobs like pressure, RF powers and gases, which usually also affect CD linearity and CD uniformity, the simplest knob is the etch time itself. An increased over etch time results in an increased CD contribution in the normal case. , We found that the etch CD contribution of ARC layer etch on EUV photo masks is reduced by longer over etch times. Moreover, this effect can be demonstrated to be present for different etch chambers and photo resists.

  5. Investigation of alternate mask absorbers in EUV lithography

    Science.gov (United States)

    Burkhardt, Martin

    2017-03-01

    In order to succeed with such low-k1 lithography at EUV wavelength, we need to be able to print a grating at high contrast similar to ArF immersion tools, where a contrast exceeding 0.95 is achieved routinely. All 2d printing is composed of interference of x and y-directed diffraction orders and high contrast in 2d thus depends on such 1d grating contrast. Any low-k1 imaging will use either dipole or some other sort of extreme off-axis illumination such as cross-quad (cQuad). The two relevant magnitudes for any high contrast are the intrinsic contrast due to a monopole, and the spatial shift of the two images that are generated by the two monopoles making up the dipole exposure. In EUV with current absorbers, high contrast can currently only be achieved using monopole illumination, a technique that does not lend itself to process integration due to removal of wafer side telecentricity and resulting overlay problems at all but preferred pitch. For dipole illumination at low-k1 pitches, we collect only 0th order light and only one 1st diffracted order for each pole. This means that for a dipole at the resolution limit, the final image for horizontal l/s patterns consists of only four incident waves, one TE and one TM wave for each of the poles. In this paper, we screen absorber by n and k values. In the process, we introduce phasor notation in order to gain insight into the behavior of the absorber and try to understand the metrics. We investigate intrinsic contrast and image blur due to monopole image shift.

  6. EUV lithography for 30nm half pitch and beyond: exploring resolution, sensitivity, and LWR tradeoffs

    Science.gov (United States)

    Putna, E. Steve; Younkin, Todd R.; Chandhok, Manish; Frasure, Kent

    2009-03-01

    The International Technology Roadmap for Semiconductors (ITRS) denotes Extreme Ultraviolet (EUV) lithography as a leading technology option for realizing the 32nm half-pitch node and beyond. Readiness of EUV materials is currently one high risk area according to assessments made at the 2008 EUVL Symposium. The main development issue regarding EUV resist has been how to simultaneously achieve high sensitivity, high resolution, and low line width roughness (LWR). This paper describes the strategy and current status of EUV resist development at Intel Corporation. Data is presented utilizing Intel's Micro-Exposure Tool (MET) examining the feasibility of establishing a resist process that simultaneously exhibits <=30nm half-pitch (HP) L/S resolution at <=10mJ/cm2 with <=4nm LWR.

  7. The Variability and Spectrum of NGC 4051 from Deep, Simultaneous EUVE and XTE Observations

    Science.gov (United States)

    Fruscione, Antonella; Cagnoni, Ilaria; Papadakis, Iossif; McHardy, Ian

    1998-01-01

    We present timing and spectral analysis of the data collected by the Extreme Ultraviolet Explorer Satellite (EUVE) for the Seyfert 1 galaxy NGC 4051 during 1996. NGC 4051 was observed twice in May 1996 and again in December 1996 for a total of more than 200 ksec. The observations were always simultaneous with hard X-ray observations conducted with the X-Ray Timing Explorer (XTE). The EUVE light curves are extremely variable during each observation, with the maximum variability during May 1996 when we registered changes by a factor of 21 over 8 hours and more than a factor of 24 variations from peak to minimum. We detected signal in the EUVE spectrograph in the 75-100 Arange which is well fitted by absorbed power law models. We will illustrate the results of our spectral and detailed power spectrum analysis for the simultaneous EUVE and XTE spectra and light curves and discuss the consequences on possible emission mechanisms.

  8. PVO VENUS ELECT TMP PROBE RESAMP SOLAR EUV 24 HR AVG VER 1.0

    Data.gov (United States)

    National Aeronautics and Space Administration — The Solar EUV Daily Values File. This file gives the magnitude of the photoemission current from the radial probe, Ipe, (in units of 10-9 amps). Ipe dominates the...

  9. Hemispherical Nature of EUV Shocks Revealed by SOHO, STEREO, and SDO Observations

    Science.gov (United States)

    Gopalswamy, Natchimuthuk; Nitta, N.; Akiyama, S.; Makela, P.; Yashiro, S.

    2011-01-01

    EUV wave transients associated with type II radio bursts are manifestation of CME-driven shocks in the solar corona. We use recent EUV wave observations from SOHO, STEREO, and SDO for a set of CMEs to show that the EUV transients have a spherical shape in the inner corona. We demonstrate this by showing that the radius of the EUV transient on the disk observed by one instrument is approximately equal to the height of the wave above the solar surface in an orthogonal view provided by another instrument. The study also shows that the CME-driven shocks often form very low in the corona at a heliocentric distance of 1.2 Rs, even smaller than the previous estimates from STEREO/CORl data (Gopalswamy et aI., 2009, Solar Phys. 259, 227). These results have important implications for the acceleration of solar energetic particles by CMEs

  10. Photoelectron scattering and acid release in EUV lithography: a simulation study (Conference Presentation)

    Science.gov (United States)

    Biafore, John J.

    2017-03-01

    Abstract BACKGROUND: The ionizing wavelength in extreme ultraviolet (EUV) resist exposure leads to photoelectron scattering and uncertainty in the resulting acid image, producing line-edge roughness (LER) and poor CD uniformity of the printed features. GOALS: Try to determine how photoelectron and acid exposure blur effects affect EUV lithography and how they might be better controlled. Try to determine whether or not, and if so under what conditions, high resist quantum yields are beneficial to EUV lithography. METHODS: Using a stochastic resist simulator, we study the effects of resist properties upon photoelectric scattering, the uncertainty in the acid release and the properties of the after-development photoresist image in high NA EUV lithography. Uncertainty in the release of acids is the fundamental cause of LER and the ultimate limiter of optical lithography technology.

  11. Wavelength dependence of prepulse laser beams on EUV emission from CO2 reheated Sn plasma

    Science.gov (United States)

    Freeman, J. R.; Harilal, S. S.; Sizyuk, T.; Hassanein, A.; Rice, B.

    2012-03-01

    Extreme ultraviolet (EUV) emission from laser-produced plasmas (LPP) centered at 13.5 nm is considered a leading candidate for the light source in future lithography systems. Tin is currently the best material for generating this EUV emission since it emits strongly within the 13.5 nm region due to its various ionic states (Sn8+-Sn14+). Highly efficient and low-debris LPPs are a pre-requisite for their use as light sources for EUV lithography. Tin plasmas generate debris that can damage collection optics over time. Techniques to mitigate debris are needed to extend the lifetime of these components and the system. Optimization of plasma conditions is necessary for increasing EUV emission and enhancing conversion efficiency (CE). Improving the source CE is necessary in order to reduce the cost of ownership and hence, develop a commercially viable lithography system for the semiconductor industry. One method to accomplish this is to reheat pre-formed plasma with a laser pulse to enhance EUV emission. This enhancement is achieved by controlling those plasma conditions necessary for optimizing EUV emission. We investigated the role of prepulse laser wavelength on prepulse plume formation and EUV in-band signal enhancement. A 6 ns Nd:YAG laser operating at 1064 nm and 266 nm was used for generating the prepulse plume. The expanding plume was then reheated by a 35 ns CO2 laser operating at 10.6 μm. The role of prepulse wavelength and energy on EUV conversion efficiency is discussed.

  12. Numerical simulations based on probe measurements in EUV-induced hydrogen plasma

    Science.gov (United States)

    Abrikosov, Alex; Reshetnyak, Viktor; Astakhov, Dmitry; Dolgov, Alexandr; Yakushev, Oleg; Lopaev, Dmitry; Krivtsun, Vladimir

    2017-04-01

    We use the two-dimensional particle-in-cell model with Monte Carlo collisions to study the plasma induced in hydrogen by short pulses of extreme ultraviolet (EUV) radiation at wavelengths in the range 10-20 nm with a pulse duration of about 40 ns (FWHM). This plasma is formed via both photoionization by the high-energy EUV photons and by the secondary photoelectrons emitted from the hydrogen molecules and the irradiated surface. The latter process can be enhanced by the external electric field that accelerates the electrons. In order to establish a base for our model so as to obtain accurate results, we record a temporally-resolved series of current-voltage characteristics for a small probing electrode inserted into EUV-induced hydrogen plasma. We then resort to simulating this plasma in the same geometry with the probe in our model which we validate by matching its results to the experimentally measured dynamics of the probe current-voltage curves. Having validated the model this way, we use this model as an independent instrument capable of obtaining the spatiotemporal picture of EUV-induced plasma evolution. We use this instrument to study the plasma formation during the EUV pulse and point out the processes that take part in forming this plasma, such as impact ionization and direct ionization by EUV photons.

  13. Assessing Radiometric Stability of the 17-Plus-Year TRMM Microwave Imager 1B11 Version-8 (GPM05 Brightness Temperature Product

    Directory of Open Access Journals (Sweden)

    Ruiyao Chen

    2017-12-01

    Full Text Available The NASA Tropical Rainfall Measuring Mission (TRMM Microwave Imager (TMI has produced a 17-plus-year time-series of calibrated microwave radiances that have remarkable value for investigating the effects of the Earth’s climate change over the tropics. Recently, the Global Precipitation Measurement (GPM Inter-Satellite Radiometric Calibration (XCAL Working Group have performed various calibration and corrections that yielded the legacy TMI 1B11 Version 8 (also called GPM05 brightness temperature product, which will be released in late 2017 by the NASA Precipitation Processing System. Since TMI served as the radiometric transfer standard for the TRMM constellation microwave radiometer sensors, it is important to document its accuracy. In this paper, the various improvements applied to TMI 1B11 V8 are summarized, and the radiometric calibration stability is evaluated by comparisons with a radiative transfer model and by XCAL evaluations with the Global Precipitation Measuring Microwave Imager during their 13-month overlap period. Evaluation methods will be described and results will be presented, which demonstrate that TMI has achieved a radiometric stability level of a few deciKelvin over almost two decades.

  14. Radiometric method for the rapid detection of Leptospira organisms

    Energy Technology Data Exchange (ETDEWEB)

    Manca, N.; Verardi, R.; Colombrita, D.; Ravizzola, G.; Savoldi, E.; Turano, A.

    1986-02-01

    A rapid and sensitive radiometric method for detection of Leptospira interrogans serovar pomona and Leptospira interrogans serovar copenhageni is described. Stuart's medium and Middlebrook TB (12A) medium supplemented with bovine serum albumin, catalase, and casein hydrolysate and labeled with /sup 14/C-fatty acids were used. The radioactivity was measured in a BACTEC 460. With this system, Leptospira organisms were detected in human blood in 2 to 5 days, a notably shorter time period than that required for the majority of detection techniques.

  15. Report of airborne radiometric and magnetic test survey

    Energy Technology Data Exchange (ETDEWEB)

    Koo, J.H.; Park, Y.S.; Woo, S.M. (Korean Inst. of Energy and Resources, Seoul (Republic of Korea))

    1982-12-01

    By the end of Oct. 1981, a complete set of GeoMetrics' air-borne radiometric and magnetic survey system was purchased by KIER using the ADB loan, and it took one week from Nov. 11 1981 to install the system on a Bell 206 B helicopter (HL 9102) owned by Asia Aeroservice Company. The test survey was flown over an area including Hongseong, Daecheon, Seosan and Manripo Sheets, from Nov. 19 to Dec. 14 1981. A Hongseong air-strip was used as the base.

  16. Virtual and remote experiments for radiometric and photometric measurements

    Science.gov (United States)

    Thoms, L.-J.; Girwidz, R.

    2017-09-01

    The analysis of spectra is fundamental to our modern understanding of wave optics and colour perception. Since spectrometers are expensive, and accurate calibration is necessary to achieve high quality spectra, we developed a remote lab on optical spectrometry. With this tool, students can carry out real experiments over the Internet. In this article the pros and cons of remote labs, the physical background of optical spectrometry, and the development and use of a radiometric remote lab for higher education are discussed. The remote lab is freely accessible to everyone at http://virtualremotelab.net.

  17. EUV magnetic-dipole lines from highly-charged high-Z ions with an open 3d shell

    CERN Document Server

    Osin, D; Reader, J; Ralchenko, Yu

    2012-01-01

    The electron beam ion trap (EBIT) at the National Institute of Standards and Technology was used to produce highly-charged ions of hafnium, tantalum and gold with an open 3d shell. The extreme-ultraviolet (EUV) spectra from these ions were recorded with a flat-field grazing-incidence spectrometer in the wavelength range of 4.5 nm to 25 nm. A total of 133 new spectral lines, primarily due to magnetic-dipole transitions within the ground-state $3d^n$ configurations of the Co-like to K-like ions, were identified by comparing energy-dependent experimental spectra with a detailed collisional-radiative modeling of the EBIT plasma.

  18. Novel EUV mask black border and its impact on wafer imaging

    Science.gov (United States)

    Kodera, Yutaka; Fukugami, Norihito; Komizo, Toru; Watanabe, Genta; Ito, Shin; Yoshida, Itaru; Maruyama, Shingo; Kotani, Jun; Konishi, Toshio; Haraguchi, Takashi

    2016-03-01

    EUV lithography is the most promising technology for semiconductor device manufacturing of the 10nm node and beyond. The EUV mask is a key element in the lithographic scanner optical path. The image border is a pattern free dark area around the die on the photomask serving as transition area between the parts of the mask that is shielded from the exposure light by the Reticle Masking (REMA) blades and the die. When printing a die at dense spacing on an EUV scanner, the EUV light reflection from the image border overlaps edges of neighboring dies, affecting CD and contrast in this area. To reduce this effect an etched multilayer type black border was developed, and it was demonstrated that CD impact at the edge of a die is strongly reduced with this type of the black border (BB). However, wafer printing result still showed some CD change influenced by the black border reflection. It was proven that the CD shift was caused by DUV Out of Band (OOB) light which is emitted from EUV light source. New types of a multilayer etched BB were evaluated and showed a good potential for DUV light suppression. In this study, a novel black border called Hybrid Black Border has been developed which allows to eliminate EUV and DUV OOB light reflection. Direct measurements of OOB light from HBB and Normal BB are performed on NXE:3300B ASML EUV scanner; it is shown that HBB OOB reflection is 3x lower than that of Normal BB. Finally, we state that HBB is a promising technology allowing for CD control at die edges.

  19. Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

    Science.gov (United States)

    Makimura, Tetsuya; Torii, Shuichi; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi

    2013-05-01

    We have investigated responses of polymers to EUV radiation from laser-produced plasmas beyond ablation thresholds and micromachining. We concentrated on fabricate precise 3D micro-structures of PDMS, PMMA, acrylic block copolymers (BCP), and silica. The micromachining technique can be applied to three-dimensional micro-fluidic and bio-medical devices. The EUV processing is a promising to realize a practical micromachining technique. In the present work, we used two EUV radiation sources; (a) Wide band EUV light in a range of 10{300 eV was generated by irradiation of Ta targets with Nd:YAG laser light at 500 mJ/pulse. (b) Narrow band EUV light at 11 and 13 nm was generated by irradiation of solid Xe and Sn targets, respectively, with pulsed TEA CO2 laser light. The generated EUV light was condensed onto the materials at high power density beyond the ablation thresholds, using ellipsoidal mirrors. We found that through-holes with a diameter of one micrometer an be fabricated in PMMA and PDMS sheets with thicknesses of 4-10 micrometers, at 250 and 230 nm/shot, respectively. The effective ablation of PMMA sheets can be applied to a LIGA-like process for fabricating micro-structures of metals for micro- and nano-molds. PDMS sheets are ablated if it is irradiated with EUV light beyond a distinct threshold power density, while PDMS surfaces were modified at lower power densities. Furthermore, BCP sheets were ablated to have 1-micrometer structures. Thus, we have developed a practical technique for micromachining of PMMA, PDMS and BCP sheets in a micrometer scale.

  20. Native pattern defect inspection of EUV mask using advanced electron beam inspection system

    Science.gov (United States)

    Shimomura, Takeya; Inazuki, Yuichi; Abe, Tsukasa; Takikawa, Tadahiko; Mohri, Hiroshi; Hayashi, Naoya; Wang, Fei; Ma, Long; Zhao, Yan; Kuan, Chiyan; Xiao, Hong; Jau, Jack

    2010-09-01

    Fabrication of defect free EUV mask is one of the most critical roadblocks for implementing EUV lithography into semiconductor high volume manufacturing for 22nm half-pitch (HP) node and beyond. At the same time, development of quality assurance process for the defect free EUV mask is also another critical challenge we need to address before the mass production. Inspection tools act important role in quality assurance process to ensure the defect free EUV mask. We are currently evaluating two types of inspection system: optical inspection (OPI) system and electron beam inspection (EBI) system [1, 2]. While OPI system is sophisticated technology and has an advantage in throughput, EBI system is superior in sensitivity and extendability to even small pattern. We evaluated sensitivity of EBI system and found it could detect 25 nm defects on 88nm L/S pattern which is as small as target defect size for 23 nm Flash HP pattern in 2013 in 2009 ITRS lithography roadmap [2, 3]. EBI system is effective inspection tool even at this moment to detect such small defects on 88nm HP pattern, though there are still some challenges such as the slow throughput and the reliability. Therefore, EBI system can be used as bridge tool to compensate insufficient sensitivity of current inspection tools and improve EUV mask fabrication process to achieve the defect free EUV mask. In this paper, we will present the results of native pattern defects founded on large field 88nm HP pattern using advance EBI system. We will also classify those defects and propose some ideas to mitigate them and realize the defect free EUV mask, demonstrating the capability of EBI as bridge tool.

  1. Solar Spectral Proxy Irradiance from GOES (SSPRING): a model for solar EUV irradiance

    Science.gov (United States)

    Suess, Katherine; Snow, Martin; Viereck, Rodney; Machol, Janet

    2016-02-01

    Several currently operating instruments are able to measure the full EUV spectrum at sufficient wavelength resolution for use in upper-atmosphere modeling, the effects of space weather, and modeling satellite drag. However, no missions are planned at present to succeed the Thermosphere Ionosphere Mesosphere Energetics and Dynamics (TIMED) and Solar Dynamics Observatory (SDO) missions, which currently provide these data sources. To develop a suitable replacement for these measurements, we use two broadband EUV channels on the NOAA GOES satellites, the magnesium core-to-wing ratio (Mg II index) from the SOlar Radiation and Climate Experiment (SORCE) as well as EUV and Mg II time averages to model the EUV spectrum from 0.1 to 105 nm at 5-nm spectral resolution and daily time resolution. A Levenberg-Marquardt least squares fitting algorithm is used to determine a coefficient matrix that best reproduces a reference data set when multiplied by input data. The coefficient matrix is then applied to model data outside of the fitting interval. Three different fitting intervals are tested, with a variable fitting interval utilizing all days of data before the prediction date producing the best results. The correlation between the model results and the observed spectrum is found to be above 95% for the 0.1-50 nm range, and between 74% and 95% for the 50-105 nm range. We also find a favorable comparison between our results and the Flare Irradiance Spectral Model (FISM). These results provide a promising potential source for an empirical EUV spectral model after direct EUV measurements are no longer available, and utilize a similar EUV modeling technique as the upcoming GOES-R satellites.

  2. Solar Spectral Proxy Irradiance from GOES (SSPRING: a model for solar EUV irradiance

    Directory of Open Access Journals (Sweden)

    Suess Katherine

    2016-01-01

    Full Text Available Several currently operating instruments are able to measure the full EUV spectrum at sufficient wavelength resolution for use in upper-atmosphere modeling, the effects of space weather, and modeling satellite drag. However, no missions are planned at present to succeed the Thermosphere Ionosphere Mesosphere Energetics and Dynamics (TIMED and Solar Dynamics Observatory (SDO missions, which currently provide these data sources. To develop a suitable replacement for these measurements, we use two broadband EUV channels on the NOAA GOES satellites, the magnesium core-to-wing ratio (Mg II index from the SOlar Radiation and Climate Experiment (SORCE as well as EUV and Mg II time averages to model the EUV spectrum from 0.1 to 105 nm at 5-nm spectral resolution and daily time resolution. A Levenberg-Marquardt least squares fitting algorithm is used to determine a coefficient matrix that best reproduces a reference data set when multiplied by input data. The coefficient matrix is then applied to model data outside of the fitting interval. Three different fitting intervals are tested, with a variable fitting interval utilizing all days of data before the prediction date producing the best results. The correlation between the model results and the observed spectrum is found to be above 95% for the 0.1–50 nm range, and between 74% and 95% for the 50–105 nm range. We also find a favorable comparison between our results and the Flare Irradiance Spectral Model (FISM. These results provide a promising potential source for an empirical EUV spectral model after direct EUV measurements are no longer available, and utilize a similar EUV modeling technique as the upcoming GOES-R satellites.

  3. Reduction of Radiometric Miscalibration—Applications to Pushbroom Sensors

    Directory of Open Access Journals (Sweden)

    Sigrid Roessner

    2011-06-01

    Full Text Available The analysis of hyperspectral images is an important task in Remote Sensing. Foregoing radiometric calibration results in the assignment of incident electromagnetic radiation to digital numbers and reduces the striping caused by slightly different responses of the pixel detectors. However, due to uncertainties in the calibration some striping remains. This publication presents a new reduction framework that efficiently reduces linear and nonlinear miscalibrations by an image-driven, radiometric recalibration and rescaling. The proposed framework—Reduction Of Miscalibration Effects (ROME—considering spectral and spatial probability distributions, is constrained by specific minimisation and maximisation principles and incorporates image processing techniques such as Minkowski metrics and convolution. To objectively evaluate the performance of the new approach, the technique was applied to a variety of commonly used image examples and to one simulated and miscalibrated EnMAP (Environmental Mapping and Analysis Program scene. Other examples consist of miscalibrated AISA/Eagle VNIR (Visible and Near Infrared and Hawk SWIR (Short Wave Infrared scenes of rural areas of the region Fichtwald in Germany and Hyperion scenes of the Jalal-Abad district in Southern Kyrgyzstan. Recovery rates of approximately 97% for linear and approximately 94% for nonlinear miscalibrated data were achieved, clearly demonstrating the benefits of the new approach and its potential for broad applicability to miscalibrated pushbroom sensor data.

  4. Parallel relative radiometric normalisation for remote sensing image mosaics

    Science.gov (United States)

    Chen, Chong; Chen, Zhenjie; Li, Manchun; Liu, Yongxue; Cheng, Liang; Ren, Yibin

    2014-12-01

    Relative radiometric normalisation (RRN) is a vital step to achieve radiometric consistency among remote sensing images. Geo-analysis over large areas often involves mosaicking massive remote sensing images. Hence RRN becomes a data-intensive and computing-intensive task. This study implements a parallel RNN method based on the iteratively re-weighted multivariate alteration detection (IR-MAD) transformation and orthogonal regression. To parallelise the method of IR-MAD and orthogonal regression, there are two key problems: the normalisation path determination and the task dependence on normalisation coefficients calculation. In this paper, the reference image and normalisation paths are determined based on the shortest distance algorithm to reduce normalisation error. Formulas of orthogonal regression are acquired considering the effect of the normalisation path to reduce the task dependence on the calculation of coefficients. A master-slave parallel mode is proposed to implement the parallel method, and a task queue and a process queue are used for task scheduling. Experiments show that the parallel RRN method provides good normalisation results and favourable parallel speed-up, efficiency and scalability, which indicate that the parallel method can handle large volumes of remote sensing images efficiently.

  5. MTG infrared sounder detection chain: first radiometric test results

    Science.gov (United States)

    Dumestier, D.; Pistone, F.; Dartois, T.; Blazquez, E.

    2017-11-01

    Europe's next fleet of geostationary meteorological satellites, MeteoSat Third Generation, will introduce new functions in addition to continuity of high-resolution meteorological data. The atmosphere Infrared Sounder (IRS), as high -end instrument, is part of this challenging program. IRS principle is a Fourier Transform Interferometer, which allows recomposing atmospheric spectrum after infrared photons detection. Transmission spectrums will be used to support numerical weather prediction. IRS instrument is able to offer full disk coverage in one hour, an on-ground resolution of 4 by 4 km, in two spectral bands (MWIR: 1600 to 2175cm-1 and LWIR: 700 to 1210cm-1) with a spectral resolution of 0.6cm-1. Among critical technologies and processes, IRS detection chain shall offer outstanding characteristics in terms of radiometric performance like Signal to Noise Ratio (SNR), dynamic range and linearity. Selected detectors are HgCdTe two-dimensions arrays, cooled at 55 Kelvins, hybridized on snapshot silicon read-out circuit at 160x160 format. Video electronics present 16 bits resolution, and the whole detection chain (Detectors and electronics) permits to reach SNR between 2 000 and 10 000 as requested by the application. Radiometric onground test results performed on design representative detection chains are presented and are confirming the challenging phase A design choices.

  6. Radiometric calibration of digital cameras using neural networks

    Science.gov (United States)

    Grunwald, Michael; Laube, Pascal; Schall, Martin; Umlauf, Georg; Franz, Matthias O.

    2017-08-01

    Digital cameras are used in a large variety of scientific and industrial applications. For most applications, the acquired data should represent the real light intensity per pixel as accurately as possible. However, digital cameras are subject to physical, electronic and optical effects that lead to errors and noise in the raw image. Temperature- dependent dark current, read noise, optical vignetting or different sensitivities of individual pixels are examples of such effects. The purpose of radiometric calibration is to improve the quality of the resulting images by reducing the influence of the various types of errors on the measured data and thus improving the quality of the overall application. In this context, we present a specialized neural network architecture for radiometric calibration of digital cameras. Neural networks are used to learn a temperature- and exposure-dependent mapping from observed gray-scale values to true light intensities for each pixel. In contrast to classical at-fielding, neural networks have the potential to model nonlinear mappings which allows for accurately capturing the temperature dependence of the dark current and for modeling cameras with nonlinear sensitivities. Both scenarios are highly relevant in industrial applications. The experimental comparison of our network approach to classical at-fielding shows a consistently higher reconstruction quality, also for linear cameras. In addition, the calibration is faster than previous machine learning approaches based on Gaussian processes.

  7. A COMPARISON OF LIDAR REFLECTANCE AND RADIOMETRICALLY CALIBRATED HYPERSPECTRAL IMAGERY

    Directory of Open Access Journals (Sweden)

    A. Roncat

    2016-06-01

    Full Text Available In order to retrieve results comparable under different flight parameters and among different flight campaigns, passive remote sensing data such as hyperspectral imagery need to undergo a radiometric calibration. While this calibration, aiming at the derivation of physically meaningful surface attributes such as a reflectance value, is quite cumbersome for passively sensed data and relies on a number of external parameters, the situation is by far less complicated for active remote sensing techniques such as lidar. This fact motivates the investigation of the suitability of full-waveform lidar as a “single-wavelength reflectometer” to support radiometric calibration of hyperspectral imagery. In this paper, this suitability was investigated by means of an airborne hyperspectral imagery campaign and an airborne lidar campaign recorded over the same area. Criteria are given to assess diffuse reflectance behaviour; the distribution of reflectance derived by the two techniques were found comparable in four test areas where these criteria were met. This is a promising result especially in the context of current developments of multi-spectral lidar systems.

  8. Radiometric measurement of differential metabolism of fatty acid by mycobacteria

    Energy Technology Data Exchange (ETDEWEB)

    Camargo, E.E.; Kertcher, J.A.; Larson, S.M.; Tepper, B.S.; Wagner, H.N. Jr.

    1982-06-01

    An assay system has been developed based on automated radiometric quantification of /sup 14/CO2 produced through oxidation of (1-/sup 14/C) fatty acids by mycobacteria. Two stains of M. tuberculosis (H37Rv and Erdman) and one of M. bovis (BCG) in 7H9 medium (ADC) with 1.0 microCi of one of the fatty acids (butyric, hexanoic, octanoic, decanoic, lauric, myristic, palmitic, stearic, oleic, linoleic and linolenic) were studied. Results previously published on M. lepraemurium (Hawaiian) were also included for comparison. Both strains of M. tuberculosis had maximum /sup 14/CO2 production from hexanoic acid. Oxidation of butyric and avid oxidation of lauric acids were also found with the H37Rv strain but not with Erdman. In contrast, /sup 14/CO2 production by M. bovis was greatest from lauric and somewhat less from decanoic acid. M. lepraemurium showed increasing oxidation rates from myristic, decanoic and lauric acids. Assimilation studies of M. tuberculosis H37Rv confirmed that most of the oxidized substrates were converted into by-products with no change in those from which no oxidation was found. These data suggest that the radiometric measurement of differential fatty acid metabolism may provide a basis of strain identification of the genus Mycobacterium.

  9. BREAKOUT RECONNECTION OBSERVED BY THE TESIS EUV TELESCOPE

    Energy Technology Data Exchange (ETDEWEB)

    Reva, A. A.; Ulyanov, A. S.; Shestov, S. V.; Kuzin, S. V., E-mail: reva.antoine@gmail.com [Lebedev Physical Institute, Russian Academy of Sciences (Russian Federation)

    2016-01-10

    We present experimental evidence of the coronal mass ejection (CME) breakout reconnection, observed by the TESIS EUV telescope. The telescope could observe solar corona up to 2 R{sub ⊙} from the Sun center in the Fe 171 Å line. Starting from 2009 April 8, TESIS observed an active region (AR) that had a quadrupolar structure with an X-point 0.5 R{sub ⊙} above photosphere. A magnetic field reconstructed from the Michelson Doppler Imager data also has a multipolar structure with an X-point above the AR. At 21:45 UT on April 9, the loops near the X-point started to move away from each other with a velocity of ≈7 km s{sup −1}. At 01:15 UT on April 10, a bright stripe appeared between the loops, and the flux in the GOES 0.5–4 Å channel increased. We interpret the loops’ sideways motion and the bright stripe as evidence of the breakout reconnection. At 01:45 UT, the loops below the X-point started to slowly move up. At 15:10 UT, the CME started to accelerate impulsively, while at the same time a flare arcade formed below the CME. After 15:50 UT, the CME moved with constant velocity. The CME evolution precisely followed the breakout model scenario.

  10. Breakout Reconnection Observed by the TESIS EUV Telescope

    Science.gov (United States)

    Reva, A. A.; Ulyanov, A. S.; Shestov, S. V.; Kuzin, S. V.

    2016-01-01

    We present experimental evidence of the coronal mass ejection (CME) breakout reconnection, observed by the TESIS EUV telescope. The telescope could observe solar corona up to 2 R⊙ from the Sun center in the Fe 171 Å line. Starting from 2009 April 8, TESIS observed an active region (AR) that had a quadrupolar structure with an X-point 0.5 R⊙ above photosphere. A magnetic field reconstructed from the Michelson Doppler Imager data also has a multipolar structure with an X-point above the AR. At 21:45 UT on April 9, the loops near the X-point started to move away from each other with a velocity of ≈7 km s-1. At 01:15 UT on April 10, a bright stripe appeared between the loops, and the flux in the GOES 0.5-4 Å channel increased. We interpret the loops’ sideways motion and the bright stripe as evidence of the breakout reconnection. At 01:45 UT, the loops below the X-point started to slowly move up. At 15:10 UT, the CME started to accelerate impulsively, while at the same time a flare arcade formed below the CME. After 15:50 UT, the CME moved with constant velocity. The CME evolution precisely followed the breakout model scenario.

  11. Mercury’s EUV Reflectance Spectrum From Mariner 10 Revisited

    Science.gov (United States)

    Vilas, Faith; Hendrix, Amanda R.; Jensen, Elizabeth A.

    2015-11-01

    Carbon, as graphite, has emerged from recent analyses of MESSENGER spectrophotometry and theoretical modeling as a possible source for the darkening component in the Low Reflectance Material (LRM), pervasive across Mercury’s surface. Murchie et al. (Icarus 254, 287, 2015) propose graphite, in amounts consistent with results from MESSENGER’s elemental experiments for the presence of C, as the most likely darkening component in LRM. Vander Kaaden and McCubbin (JGR Planets 120, 195, 2015) report that graphite would be the only buoyant phase in an early magma ocean, and any primary flotation crust would have retained C in the form of graphite. Alternatively, Gillis-Davis et al. (Abstract P1 1A-07, AGU, 2013) suggest that nanophase and microphase iron, produced by impacts into Mercury’s crust before and during the late heavy bombardment, could darken the LRM. Carbon in the forms of graphite and anthracite has distinctive far-UV spectral reflectance features. The MESSENGER MASCS UVVS spectrometer does not extend to wavelengths short enough to observe these features. The Mariner 10 EUV airglow spectrometer observed broad swaths of Mercury in 10 filters at wavelengths ranging from 304Å to 1657Å, each having 20Å passbands. We now re-analyze these data in a search for this distinctive UV signature of graphite across large areas of Mercury’s surface, and will report on the results.

  12. EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum

    Science.gov (United States)

    Frolov, Oleksandr; Kolacek, Karel; Schmidt, Jiri; Straus, Jaroslav; Choukourov, Andrei; Kasuya, Koichi

    2015-09-01

    In this paper we present results of study interaction of nanosecond EUV laser pulses at wavelength of 46.9 nm with silicon carbide (SiC), tungsten (W) and molybdenum (Mo). As a source of laser radiation was used discharge-plasma driver CAPEX (CAPillary EXperiment) based on high current capillary discharge in argon. The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on samples. Experimental study has been performed with 1, 5, 10, 20 and 50 laser pulses ablation of SiC, W and Mo at various fluence values. Firstly, sample surface modification in the nanosecond time scale have been registered by optical microscope. And the secondly, laser beam footprints on the samples have been analyzed by atomic-force microscope (AFM). This work supported by the Czech Science Foundation under Contract GA14-29772S and by the Grant Agency of the Ministry of Education, Youth and Sports of the Czech Republic under Contract LG13029.

  13. General-purpose configuration of radiometric instruments for measuring concentration profiles

    Energy Technology Data Exchange (ETDEWEB)

    Kubicek, P.; Wozniakova, B. (Ceskoslovenska Akademie Ved, Ostrava. Ustav Teorie Hutnickych Procesu); Drapala, J. (Vysoka Skola Banska, Ostrava (Czechoslovakia). Katedra Nezeleznych Kovu a Jaderne Metalurgie)

    1981-01-01

    The configuration of radiometric apparatuses for the automatic measuring of the concentration profile of active admixtures along the specimen applying the slot method and its three variants is described. A practical example is given of the adjustment of radiometric apparatuses. An equipment for automatic graphical recording of nuclear radiation spectra measured by a single-channel spectrometer is described.

  14. Investigation of EUV tapeout flow issues, requirements, and options for volume manufacturing

    Science.gov (United States)

    Cobb, Jonathan; Jang, Sunghoon; Ser, Junghoon; Kim, Insung; Yeap, Johnny; Lucas, Kevin; Do, Munhoe; Kim, Young-Chang

    2011-04-01

    Although technical issues remain to be resolved, EUV lithography is now a serious contender for critical layer patterning of upcoming 2X node memory and 14nm Logic technologies in manufacturing. If improvements continue in defectivity, throughput and resolution, then EUV lithography appears that it will be the most extendable and the cost-effective manufacturing lithography solution for sub-78nm pitch complex patterns. EUV lithography will be able to provide a significant relaxation in lithographic K1 factor (and a corresponding simplification of process complexity) vs. existing 193nm lithography. The increased K1 factor will result in some complexity reduction for mask synthesis flow elements (including illumination source shape optimization, design pre-processing, RET, OPC and OPC verification). However, EUV does add well known additional complexities and issues to mask synthesis flows such as across-lens shadowing variation, across reticle flare variation, new proximity effects to be modeled, significant increase in pre-OPC and fracture file size, etc. In this paper, we investigate the expected EUV-specific issues and new requirements for a production tapeout mask synthesis flow. The production EUV issues and new requirements are in the categories of additional physical effects to be corrected for; additional automation or flow steps needed; and increase in file size at different parts in the flow. For example, OASIS file sizes after OPC of 250GigaBytes (GB) and files sizes after mask data prep of greater than three TeraBytes (TB) are expected to be common. These huge file sizes will place significant stress on post-processing methods, OPC verification, mask data fracture, file read-in/read-out, data transfer between sites (e.g., to the maskshop), etc. With current methods and procedures, it is clear that the hours/days needed to complete EUV mask synthesis mask data flows would significantly increase if steps are not taken to make efficiency improvements

  15. On a Small-scale EUV Wave: The Driving Mechanism and the Associated Oscillating Filament

    Science.gov (United States)

    Shen, Yuandeng; Liu, Yu; Tian, Zhanjun; Qu, Zhining

    2017-12-01

    We present observations of a small-scale extreme-ultraviolet (EUV) wave that was associated with a mini-filament eruption and a GOES B1.9 micro-flare in the quiet-Sun region. The initiation of the event was due to the photospheric magnetic emergence and cancellation in the eruption source region, which first caused the ejection of a small plasma ejecta, then the ejecta impacted a nearby mini-filament and thereby led to the filament’s eruption and the associated flare. During the filament eruption, an EUV wave at a speed of 182{--}317 {km} {{{s}}}-1 was formed ahead of an expanding coronal loop, which propagated faster than the expanding loop and showed obvious deceleration and reflection during the propagation. In addition, the EUV wave further resulted in the transverse oscillation of a remote filament whose period and damping time are 15 and 60 minutes, respectively. Based on the observational results, we propose that the small-scale EUV wave should be a fast-mode magnetosonic wave that was driven by the expanding coronal loop. Moreover, with the application of filament seismology, it is estimated that the radial magnetic field strength is about 7 Gauss. The observations also suggest that small-scale EUV waves associated with miniature solar eruptions share similar driving mechanisms and observational characteristics with their large-scale counterparts.

  16. Reconstruction of the solar EUV irradiance from 1996 to 2010 based on SOHO/EIT images

    Directory of Open Access Journals (Sweden)

    Haberreiter Margit

    2014-01-01

    Full Text Available The solar Extreme UltraViolet (EUV spectrum has important effects on the Earth’s upper atmosphere. For a detailed investigation of these effects it is important to have a consistent data series of the EUV spectral irradiance available. We present a reconstruction of the solar EUV irradiance based on SOHO/EIT images, along with synthetic spectra calculated using different coronal features which represent the brightness variation of the solar atmosphere. The EIT images are segmented with the SPoCA2 tool which separates the features based on a fixed brightness classification scheme. With the SOLMOD code we then calculate intensity spectra for the 10–100 nm wavelength range and each of the coronal features. Weighting the intensity spectra with the area covered by each of the features yields the temporal variation of the EUV spectrum. The reconstructed spectrum is then validated against the spectral irradiance as observed with SOHO/SEM. Our approach leads to good agreement between the reconstructed and the observed spectral irradiance. This study is an important step toward understanding variations in the solar EUV spectrum and ultimately its effect on the Earth’s upper atmosphere.

  17. Laser-plasma EUV source dedicated for surface processing of polymers

    Science.gov (United States)

    Bartnik, A.; Fiedorowicz, H.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Wachulak, P. W.

    2011-08-01

    In this work, a 10 Hz laser-plasma extreme ultraviolet (EUV) source built for surface processing of polymers is presented. The source is based on a double-stream gas puff target created in a vacuum chamber synchronously with the pumping laser pulse. The target is formed by pulsed injection of Kr, Xe or a KrXe gas mixture into a hollow stream of helium. The EUV radiation is focused using a grazing incidence gold-plated ellipsoidal collector. Spectrum of the reflected radiation consists of a narrow feature with intensity maximum at 10-11 nm wavelength and a long-wavelength spectral tail up to 70 nm. The exact spectral distribution depends on a gas applied for plasma creation. To avoid strong absorption of the EUV radiation in a residual gas present in the chamber during the source operation a two step differential pumping system was employed. The system allows for polymer processing under relatively high vacuum conditions (10 -5 mbar) or in a reactive gas atmosphere. Polymer samples can be irradiated in a focal plane of the EUV collector or at some distance downstream the focal plane. This way fluence of the EUV beam at the polymer surface can be regulated.

  18. Cross sections of EUV PAGs: influence of concentration, electron energy, and structure

    Science.gov (United States)

    Grzeskowiak, Steven; Narasimhan, Amrit; Wisehart, Liam; Schad, Jonathon; Neisser, Mark; Ocola, Leonidas E.; Brainard, Robert L.; Denbeaux, Greg

    2016-03-01

    Optimizing the photochemistry of extreme ultraviolet (EUV) photoresists should provide faster, more efficient resists which would lead to greater throughput in manufacturing. The fundamental reaction mechanisms in EUV resists are believed to be due to interactions with energetic electrons liberated by ionization. Identifying the likelihood (or cross section) of how these photoelectrons interact with resist components is critical to optimizing the performance of EUV resists. Chemically amplified resists utilize photoacid generators (PAGs) to improve sensitivity; measuring the cross section of electron induced decomposition of different PAGs will provide insight into developing new resist materials. To study the interactions of photoelectrons generated by EUV absorption, photoresists were exposed to electron beams at energies between 80 and 250 eV. The reactions between PAG molecules and electrons were measured using a mass spectrometer to monitor the levels of small molecules produced by PAG decomposition that outgassed from the film. Comparing the cross sections of a variety of PAG molecules can provide insight into the relationship between chemical structure and reactivity to the electrons in their environments. This research is a part of a larger SEMATECH research program to understand the fundamentals of resist exposures to help in the development of new, better performing EUV resists.

  19. Comparison of EUV spectral and ion emission features from laser-produced Sn and Li plasmas

    Science.gov (United States)

    Coons, R. W.; Campos, D.; Crank, M.; Harilal, S. S.; Hassanein, A.

    2010-04-01

    Planar slabs of pure Sn and Li were irradiated with 1064 nm, 9 ns Nd:YAG laser pulses. The resulting plasmas were evaluated with an absolutely calibrated extreme ultraviolet (EUV) power tool, a transmission grating spectrograph, a pinhole camera, and a Faraday cup. These diagnostic tools have allowed us to determine EUV conversion efficiency (CE), EUV spectral emission features, EUV-emitting plasma size, and the kinetic energies and fluxes of ions at various laser intensities for both Sn and Li plasmas. The maximum estimated CE values for Li and Sn plasmas are 1 +/- 0.1 % and 2 +/- 0.2 %, respectively. The Li2+ Lyman-α line and Sn8-13+ lines generate the in-band emissions of Li and Sn. The intensity of Li2+ lines was found to increase with laser intensity. However, the Sn unresolved transmission array (UTA) showed remarkable changes with at higher laser intensities, including the appearance of a spectral dip. EUV plasma images showed that Sn plasmas take on a conical shape, as opposed to the hemispherical shape of Li plasmas. Ion debris analysis showed the kinetic energies for Li ions are less than that of Sn ions under similar conditions. Moreover, the kinetic spread of Li ions has been found to be narrower compared to the kinetic energy distribution of the Sn ions. We also compared the ion flux emitted by Sn and Li plasmas.

  20. EUV blank defect and particle inspection with high throughput immersion AFM with 1nm 3D resolution

    NARCIS (Netherlands)

    Es, M.H. van; Sadeghian Marnani, H.

    2016-01-01

    Inspection of EUV mask substrates and blanks is demanding. We envision this is a good target application for massively parallel Atomic Force Microscopy (AFM). We envision to do a full surface characterization of EUV masks with AFM enabling 1nm true 3D resolution over the entire surface. The limiting

  1. Laboratory Measurement of Bidirectional Reflectance of Radiometric Tarps

    Science.gov (United States)

    Knowlton, Kelly

    2004-01-01

    This experiment measured the reflectance of tarps with ground instruments in order to check radiometric calibration, validate atmospheric correction, and predict at-sensor radiance for satellite instruments. The procedure of this experiment is as follows: 1) Assemble laboratory apparatus to duplicate ground reference measurement geometry and satellite measurement geometry; 2) Measure spectral radiance with Optronics OL 750 double monochromator/spectroradiometer; 3) Measure radiance of NIST-calibrated Spectralon panel irradiated by collimated light at incidence angle of calibrated reflectance (20 deg, 30 deg, 40 deg, or 50 deg), viewing normal to panel surface; 4) Measure radiance of Spectralon panel irradiated at incidence angle equal to solar zenith angle at time of overpass; 5) Calculate reflectance of Spectralon panel irradiated at solar zenith angle, viewing normal to panel surface (ground geometry).

  2. Wavelength-specific reflections: A decade of EUV actinic mask inspection research

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth; Mochi, Iacopo

    2010-12-31

    Mask inspection is essential for the success of any pattern-transfer lithography technology, and EUV Lithography in particular faces unique challenges. EUV masks resonant-reflective multilayer coatings have a narrow, wavelength-specific response that dramatically affects the way that defects appear, or disappear, at various illuminating wavelengths. Furthermore, the ever-shrinking size of 'critical' defects limits the potential effectiveness of DUV inspection techniques over time. Researchers pursuing numerous ways of finding and characterizing defects on EUV masks and have met with varying degrees of success. Their lessons inform the current, urgent exploration to select the most effective techniques for high-volume manufacturing. Ranging from basic research and demonstration experiments to commercial inspection tool prototypes, we survey the recent history of work in this area, including sixteen projects in Europe, Asia, and America. Solutions range from scanning beams to microscopy, dark field imaging to pattern transfer.

  3. Modeling of EUV emission and conversion efficiency from laser-produced tin plasmas for nanolithography

    Science.gov (United States)

    Harilal, S. S.; MacFarlane, J. J.; Golovkin, I. E.; Woodruff, P. R.; Wang, P.

    2008-03-01

    Extreme ultraviolet lithography (EUVL) is a leading candidate for use in next-generation high volume manufacturing of semiconductor chips that require feature sizes less than 32 nm. The essential requirement for enabling this technology is to have a reliable, clean and powerful EUV source which efficiently emits light at a wavelength of 13.5 nm. Laser-produced plasma EUV sources are strong candidates for use in EUVL light source systems. The development and optimization of high-efficiency EUV sources requires not only well-diagnosed experiments, but also a good understanding of the physical processes affecting the emitting plasma, which can be achieved with the help of accurate numerical simulation tools. Here, we investigate the radiative properties of tin and tin-doped foam plasmas heated by 1.06 μm laser beams with 10 ns pulse widths. Results from simulations are compared with experimental conversion efficiencies and emission spectra.

  4. Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation

    Science.gov (United States)

    Freiberger, R.; Hauck, J.; Reininghaus, M.; Wortmann, D.; Juschkin, L.

    2011-05-01

    We report on our efforts in design and construction of a compact Extreme Ultraviolet (EUV)-pump-probe microscope. The goal is the observation of formation of nanostructures, induced by a femtosecond (fs)-laser pulse. The unique interaction processes of fs-laser radiation with matter open up new markets in laser material processing and, therefore, are actively investigated in the last decade. The resulting "sub 100 nm"-structures offer vast potential benefits in photonics, biotechnology, tribological surface design, plasmonic applications and production of nanoparticles. Focused fs-laser radiation causes a local modification resulting in nanostructures of high precision and reproducibility. However the formation dynamics is not well understood. Research in this field requires high temporal and spatial resolution. A combination of fs-laser and EUV-microscope provides a tool for "in situ"-observation of the formation dynamics. As exemplary structures to be investigated, we use nanojets on thin gold films and periodic surface structures (ripples) on dielectrics. In the future, the EUV-pump-probe microscope can become a versatile tool to observe physical or biological processes. Microscopy using EUV-light is capable of detecting structures on a scale down to several tens of nanometers. For detailed investigations a compact EUV-microscope has been realized utilizing OVI Balmer-alpha radiation at 17.3 nm coming from a discharge produced oxygen plasma. As optical elements a grazing incidence elliptical collector and a zone plate with a width of outermost zone of 50 nm and a spectral filter to avoid chromatic aberrations are used. The detector is a fast gated microchannel plate with a pore size of 2 microns contacted by a low impedance transmission line. The expected spatial resolution of the setup is better than 100 nm and the time resolution is better than 1 ns. The newly developed EUV-microscope is a powerful tool for a wide field of investigations that need high time

  5. New method of detection and classification of yield-impacting EUV mask defects

    Science.gov (United States)

    Graur, Ioana; Vengertsev, Dmitry; Raghunathan, Ananthan; Stobert, Ian; Rankin, Jed

    2015-10-01

    Extreme ultraviolet lithography (EUV) advances printability of small size features for both memory and logic semiconductor devices. It promises to bring relief to the semiconductor manufacturing industry, removing the need for multiple masks in rendering a single design layer on wafer. However, EUV also brings new challenges, one of which is of mask defectivity. For this purpose, much of the focus in recent years has been in finding ways to adequately detect, characterize, and reduce defects on both EUV blanks and patterned masks. In this paper we will present an efficient way to classify and disposition EUV mask defects through a new algorithm developed to classify defects located on EUV photomasks. By processing scanning electronmicroscopy images (SEM) of small regions of a photomask, we extract highdimensional local features Histograms of Oriented Gradients (HOG). Local features represent image contents compactly for detection or classification, without requiring image segmentation. Using these HOGs, a supervised classification method is applied which allows differentiating between nondefective and defective images. In the new approach we have developed a superior method of detection and classification of defects, using mask and supporting mask printed data from several metallization masks. We will demonstrate that use of the HOG method allows realtime identification of defects on EUV masks regardless of geometry or construct. The defects identified by this classifier are further divided into subclasses for mask defect disposition: foreign material, foreign material from previous step, and topological defects. The goal of disposition is to categorize on the images into subcategories and provide recommendation of prescriptive actions to avoid impact on the wafer yield.

  6. Preparations for EUV interferometry of the 0.3 NA MET optic

    Energy Technology Data Exchange (ETDEWEB)

    Goldberg, Kenneth A.; Naulleau, Patrick P.; Denham, Paul E.; Rekawa, Senajith B.; Jackson, Keith H.; Liddle, J. Alexander; Harteneck, Bruce; Gullikson, Eric; Anderson, Erik H.

    2003-10-30

    An at-wavelength interferometer is being created for the measurement and alignment of the 0.3 numerical aperture Micro Exposure Tool projection optic at EUV wavelengths. The prototype MET system promises to provide early learning from EUV lithographic imaging down to 20-nm feature size. The threefold increase to 0.3 NA in the image-side numerical aperture presents several challenges for the extension of ultra-high-accuracy interferometry, including pinhole fabrication and the calibration and removal of systematic error sources.

  7. Numerical and experimental studies of the carbon etching in EUV-induced plasma

    CERN Document Server

    Astakhov, D I; Lee, C J; Ivanov, V V; Krivtsun, V M; Yakushev, O; Koshelev, K N; Lopaev, D V; Bijkerk, F

    2015-01-01

    We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy resolved ion fluxes from the plasma to the surface. By relating the computed ion fluxes to the experimentally observed etching rate at various pressures and ion energies, we show that at low pressure and energy, carbon etching is due to chemical sputtering, while at high pressure and energy a reactive ion etching process is likely to dominate.

  8. Radiometric Normalization of Large Airborne Image Data Sets Acquired by Different Sensor Types

    Science.gov (United States)

    Gehrke, S.; Beshah, B. T.

    2016-06-01

    Generating seamless mosaics of aerial images is a particularly challenging task when the mosaic comprises a large number of im-ages, collected over longer periods of time and with different sensors under varying imaging conditions. Such large mosaics typically consist of very heterogeneous image data, both spatially (different terrain types and atmosphere) and temporally (unstable atmo-spheric properties and even changes in land coverage). We present a new radiometric normalization or, respectively, radiometric aerial triangulation approach that takes advantage of our knowledge about each sensor's properties. The current implementation supports medium and large format airborne imaging sensors of the Leica Geosystems family, namely the ADS line-scanner as well as DMC and RCD frame sensors. A hierarchical modelling - with parameters for the overall mosaic, the sensor type, different flight sessions, strips and individual images - allows for adaptation to each sensor's geometric and radiometric properties. Additional parameters at different hierarchy levels can compensate radiome-tric differences of various origins to compensate for shortcomings of the preceding radiometric sensor calibration as well as BRDF and atmospheric corrections. The final, relative normalization is based on radiometric tie points in overlapping images, absolute radiometric control points and image statistics. It is computed in a global least squares adjustment for the entire mosaic by altering each image's histogram using a location-dependent mathematical model. This model involves contrast and brightness corrections at radiometric fix points with bilinear interpolation for corrections in-between. The distribution of the radiometry fixes is adaptive to each image and generally increases with image size, hence enabling optimal local adaptation even for very long image strips as typi-cally captured by a line-scanner sensor. The normalization approach is implemented in HxMap software. It has been

  9. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey in the Storforshei area, Rana, Nordland

    Energy Technology Data Exchange (ETDEWEB)

    Rodionov, Alexei; Ofstad, Frode; Tassis, Georgios

    2012-07-01

    NGU conducted an airborne geophysical survey in Mo i Rana area in July 2012. This report describes and documents the aquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 1414 line km. The Geotech Ltd. Hummingbird frequency domain system supplemented by optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data aquisition. The survey was flown with 100 m line spacing, line direction of 180 deg North-South (in the west) and 150 deg NorthWest-SouthEast (in the east) with the average speed 96 km/h. The average terrain clearance of the bird was 55 m. Collected data were processed by AR GeoConsulting using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and levelled using standard micro levelling algorithm. EM data were filtered and levelled using both automated and manual levelling procedure. Apparent resistivity was calculated from in-phase and quadrature data for each of the five frequencies separately using a homogeneous half space model. Apparent resistivity dataset was levelled and filtered. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association (IAEA). All data were gridded with the cell size of 25 m and presented as shaded relief maps at the scale of 1:25 000.(Author)

  10. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey at Vanna, Karlsoey

    Energy Technology Data Exchange (ETDEWEB)

    Rodionov, Alexei; Ofstad, Frode

    2012-07-01

    NGU conducted an airborne geophysical survey in Vanna area in June 2011 as a part of MINN project. This report describes and documents the acquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 1336 line km. The modified Geotech Ltd. Hummingbird frequency domain system supplemented by optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data acquisition. The survey was flown with 200 m line spacing, line direction of 27 degrees NW and average speed 106 km/h. The average terrain clearance of the bird was 59 m. Collected data were processed in NGU using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and levelled using standard micro levelling algorithm. EM data were filtered and levelled using both -automated and manual levelling procedure. Apparent resistivity was calculated from in-phase and quadrature data for four frequencies separately using a homogeneous half space model. Apparent resistivity dataset was filtered and levelled. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association. All data were gridded with the cell size of 50 m and presented as a shaded relief maps at the scale of 1:50 000. (Author)

  11. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey in Mauken, Maalselv, Troms

    Energy Technology Data Exchange (ETDEWEB)

    Rodionov, Alexei; Koziel, Janusz; Lynum, Rolf

    2012-07-01

    NGU conducted an airborne geophysical survey in Mauken area in June 2011 as a part of MINN project. This report describes and documents the acquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 3680 line km. The modified Geotech Ltd. Hummingbird frequency domain system supplemented by optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data acquisition. The survey was flown with 200 m line spacing, line direction of 33 degrees NE and average speed 88km/h. The average terrain clearance of the bird was 45m. Collected data were processed in NGU using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and levelled using standard micro levelling algorithm. EM data were filtered and levelled using both -automated and manual levelling procedure. Apparent resistivity was calculated from in-phase and quadrature data for each of the five frequencies separately using a homogeneous half space model. Apparent resistivity dataset was filtered and levelled. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association. All data were gridded with the cell size of 50 m and presented as a shaded relief maps at the scale of 1:50 000. (Author)

  12. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey in Rombaken area, Narvik, Nordland

    Energy Technology Data Exchange (ETDEWEB)

    Rodionov, Alexei; Ofstad, Frode; Koziel, Janusz

    2012-07-01

    NGU conducted an airborne geophysical survey in Rombaken area in August - September 2011 as a part of MINN project. This report describes and documents the acquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 5218 line km. The modified Geotech Ltd. Hummingbird frequency domain system supplemented by optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data acquisition. The survey was flown with 200 m line spacing, line direction of 90 degrees East West and average speed 98 km/h. The average terrain clearance of the bird was 64 m. Collected data were processed in NGU using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and levelled using standard micro levelling algorithm. EM data were filtered and levelled using both automated and manual levelling procedure. Apparent resistivity was calculated from in-phase and quadrature data for each of the five frequencies separately using a homogeneous half space model. Apparent resistivity dataset was filtered and levelled. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association.All data were gridded with the cell size of 50 m and presented as a shaded relief maps at the scale of 1:50 000.(Author)

  13. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey in Finnsnes area, Lenvik, Troms

    Energy Technology Data Exchange (ETDEWEB)

    Rodionov, Alexei; Ofstad, Frode; Tassis, Georgios

    2012-07-01

    NGU conducted an airborne geophysical survey in Finnsnes area in July - August 2012. This report describes and documents the acquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 2715 line km. The Geotech Ltd. Hummingbird frequency domain EM system supplemented by optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data acquisition. The survey was flown with 200 m line spacing, line direction of 120 degrees NW-SE with the average speed 89 km/h. The average terrain clearance of the bird was 55 m. Collected data were processed in NGU using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and levelled using standard micro levelling algorithm. EM data were filtered and levelled using both automated and manual levelling procedure. Apparent resistivity was calculated from in-phase and quadrature data for each of the five frequencies separately using a homogeneous half space model. Apparent resistivity dataset was levelled and filtered. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association. All data were gridded with the cell size of 50 m and presented as a shaded relief maps at the scale of 1:50 000.(Author)

  14. Helicopter-borne magnetic, electromagnetic and radiometric geophysical survey in Kviteseid area, Lenvik, Troms

    Energy Technology Data Exchange (ETDEWEB)

    Baranwal, Vikas C.; Rodionov, Alexei; Ofstad, Frode

    2012-07-01

    In cooperation with the geologist for Buskerud, Telemark and Vestfold, the NGU conducted an airborne geophysical survey in Kviteseid area in May 2012. This report describes and documents the acquisition, processing and visualization of recorded datasets. The geophysical survey results reported herein are 3514 line km. The optically pumped cesium magnetometer and 1024 channels RSX-5 spectrometer was used for data acquisition. The survey was flown with 100 m line spacing, line direction of 130 degrees - 210 degrees and average speed of 98 km/h. A smaller area was also flown at 100 m line spacing 50 m away from larger flight lines so that smaller area could be covered with 50 m line spacing. The average terrain clearance of the helicopter was 65 m. Collected data were processed in NGU using Geosoft Oasis Montaj software. Raw total magnetic field data were corrected for diurnal variation and also for International Geomagnetic Reference Field (IGRF). Finally, some along-line noises were removed using standard micro-leveling algorithm. Radiometric data were processed using standard procedures recommended by International Atomic Energy Association (IAEA). Final processed data were gridded with the cell size of 25 m and 12 m for 100 m and 50 m line spacing, respectively. They are presented as a shaded relief maps at the scale of 1:20 000 and 1:10 000, respectively.(Author)

  15. Evaluation of the Radiometric Integrity of LANDSAT 4 Thematic Mapper Band 6 Data

    Science.gov (United States)

    Schott, J. R.

    1985-01-01

    Probably the most generally accepted method for processing radiometric data from space is to correct the observed radiance or apparent temperature to a surface radiance or temperature value using atmospheric propagation models. As part of NASA's Heat Capacity Mapping Mission (HCMM) experiment the atmospheric propagation models were used in reverse in an attempt to evaluate the post launch radiometric response of the radiometer. Techniques successfully used to radiometrically calibrate the HCMM sensor were extended. The HCMM experiment is described and used as a base for the evaluation of the TM band 6 (infrared) sensor.

  16. Hierarchical Bayesian Data Analysis in Radiometric SAR System Calibration: A Case Study on Transponder Calibration with RADARSAT-2 Data

    Directory of Open Access Journals (Sweden)

    Björn J. Döring

    2013-12-01

    Full Text Available A synthetic aperture radar (SAR system requires external absolute calibration so that radiometric measurements can be exploited in numerous scientific and commercial applications. Besides estimating a calibration factor, metrological standards also demand the derivation of a respective calibration uncertainty. This uncertainty is currently not systematically determined. Here for the first time it is proposed to use hierarchical modeling and Bayesian statistics as a consistent method for handling and analyzing the hierarchical data typically acquired during external calibration campaigns. Through the use of Markov chain Monte Carlo simulations, a joint posterior probability can be conveniently derived from measurement data despite the necessary grouping of data samples. The applicability of the method is demonstrated through a case study: The radar reflectivity of DLR’s new C-band Kalibri transponder is derived through a series of RADARSAT-2 acquisitions and a comparison with reference point targets (corner reflectors. The systematic derivation of calibration uncertainties is seen as an important step toward traceable radiometric calibration of synthetic aperture radars.

  17. EUV mask pattern inspection with an advanced electron beam inspection system

    Science.gov (United States)

    Shimomura, Takeya; Inazuki, Yuichi; Tsukasa, Abe; Takikawa, Tadahiko; Morikawa, Yasutaka; Mohri, Hiroshi; Hayashi, Naoya; Wang, Fei; Ma, Long; Zhao, Yan; Kuan, Chiyan; Xiao, Hong; Jau, Jack

    2009-12-01

    Readiness of defect-free mask is one of the biggest challenges to insert extreme ultraviolet (EUV) lithography into semiconductor high volume manufacturing for 22nm half pitch (HP) node and beyond. According to ITRS roadmap updated in 2008, minimum size of defect needed to be removed is 25nm for 22nm HP node in 2013 [1]. It is necessary, therefore, to develop EUV mask pattern inspection tool being capable of detecting 25nm defect. Electron beam inspection (EBI) is one of promising tools which will be able to meet such a tight defect requirement. In this paper, we evaluated defect detection sensitivity of electron beam inspection (EBI) system developed by Hermes Microvision, Inc. (HMI) using 88nm half-pitch (HP) line-and-space (L/S) pattern and 128nm HP contact-hole (C/H) pattern EUV mask. We found the EBI system can detect 25nm defects. We, furthermore, fabricated 4 types of EUV mask structures: 1) w/ anti-reflective (AR) layer and w/ buffer layer, 2) w/ AR layer and w/o buffer layer, 3) w/o AR layer and w/ buffer layer, 4) w/o AR layer and w/o buffer layer. And the sensitivity and inspectability for the EBI were compared. It was observed that w/o AR layer structure introduce higher image contrast and lead to better inspectability, although there is no significant different in sensitivity.

  18. Progress in resolution, sensitivity, and critical dimensional uniformity of EUV chemically amplified resists

    Science.gov (United States)

    Thackeray, James; Cameron, James; Jain, Vipul; LaBeaume, Paul; Coley, Suzanne; Ongayi, Owendi; Wagner, Mike; Rachford, Aaron; Biafore, John

    2013-03-01

    This paper will discuss further progress obtained at Dow for the improvement of the Resolution, Contact critical dimension uniformity(CDU), and Sensitivity of EUV chemically amplified resists. For resolution, we have employed the use of polymer-bound photoacid generator (PBP) concept to reduce the intrinsic acid diffusion that limits the ultimate resolving capability of CA resists. For CDU, we have focused on intrinsic dissolution contrast and have found that the photo-decomposable base (PDB) concept can be successfully employed. With the use of a PDB, we can reduce CDU variation at a lower exposure energy. For sensitivity, we have focused on more efficient EUV photon capture through increased EUV absorption, as well as more highly efficient PAGs for greater acid generating efficiency. The formulation concepts will be confirmed using Prolith stochastic resist modeling. For the 26nm hp contact holes, we get excellent overall process window with over 280nm depth of focus for a 10% exposure latitude Process window. The 1sigma Critical dimension uniformity [CDU] is 1.1 nm. We also obtain 20nm hp contact resolution in one of our new EUV resists.

  19. RapidNano: towards 20nm Particle Detection on EUV Mask Blanks

    NARCIS (Netherlands)

    Donck, J.C.J. van der; Bussink, P.G.W.; Fritz, E.C.; Walle, P. van der

    2016-01-01

    Cleanliness is a prerequisite for obtaining economically feasible yield levels in the semiconductor industry. For the next generation of lithographic equipment, EUV lithography, the size of yield-loss inducing particles for the masks will be smaller than 20 nm. Consequently, equipment for handling

  20. Investigating the intrinsic cleanliness of automated handling designed for EUV mask Pod-in-Pod systems

    NARCIS (Netherlands)

    Brux, O.; Walle, P. van der; Donck, J.C.J. van der; Dress, P.

    2011-01-01

    Extreme Ultraviolet Lithography (EUVL) is the most promising solution for technology nodes 16nm (hp) and below. However, several unique EUV mask challenges must be resolved for a successful launch of the technology into the market. Uncontrolled introduction of particles and/or contamination into the

  1. Cross-Calibration of the GOES-R SUVI with On-Orbit Solar EUV Instruments

    Science.gov (United States)

    Darnel, Jonathan; Seaton, Daniel B.

    2016-05-01

    Maintaining the calibration of on-orbit instruments has always been a challenge, but one which is crucial for the accuracy of the data record. This challenge is magnified for solar Extreme UltraViolet (EUV) instruments. Absolute calibration is out of the question as stable and known sources of EUV irradiance are not practical in on-orbit environments. This leaves relative calibration against other solar EUV instruments whose calibration has been well tracked. The need for such cross-calibration efforts is especially acute for an instrument like the Solar Ultraviolet Imager (SUVI), which will fly on the GOES-R spacecraft later this year and is expected to provide two decades of solar observation between four identical instruments. Not only must calibration between the four instruments in the SUVI line be maintained, but the relative calibration between SUVI and both present day imagers like SDO/AIA and PROBA2/SWAP and future instruments yet to be developed must be established as well. We present the methodology developed using current on-orbit solar EUV instruments in order to maintain the calibration of the SUVI instruments.

  2. SoFAST: Automated Flare Detection with the PROBA2/SWAP EUV Imager

    Science.gov (United States)

    Bonte, K.; Berghmans, D.; De Groof, A.; Steed, K.; Poedts, S.

    2013-08-01

    The Sun Watcher with Active Pixels and Image Processing (SWAP) EUV imager onboard PROBA2 provides a non-stop stream of coronal extreme-ultraviolet (EUV) images at a cadence of typically 130 seconds. These images show the solar drivers of space-weather, such as flares and erupting filaments. We have developed a software tool that automatically processes the images and localises and identifies flares. On one hand, the output of this software tool is intended as a service to the Space Weather Segment of ESA's Space Situational Awareness (SSA) program. On the other hand, we consider the PROBA2/SWAP images as a model for the data from the Extreme Ultraviolet Imager (EUI) instrument prepared for the future Solar Orbiter mission, where onboard intelligence is required for prioritising data within the challenging telemetry quota. In this article we present the concept of the software, the first statistics on its effectiveness and the online display in real time of its results. Our results indicate that it is not only possible to detect EUV flares automatically in an acquired dataset, but that quantifying a range of EUV dynamics is also possible. The method is based on thresholding of macropixelled image sequences. The robustness and simplicity of the algorithm is a clear advantage for future onboard use.

  3. The EUV Spectrum of Sunspot Plumes Observed by SUMER on SOHO

    Indian Academy of Sciences (India)

    In sunspot plumes the EUV spectrum differs from the quiet Sun; continua are observed with different slopes and intensities; emission lines from molecular hydrogen and many unidentified species indicate unique plasma conditions above sunspots. Sunspot plumes are sites of systematic downflow. We also discuss the ...

  4. Radiometric absolute noise-temperature measurement system features improved accuracy and calibration ease

    Science.gov (United States)

    Brown, W.; Ewen, H.; Haroules, G.

    1970-01-01

    Radiometric receiver system, which measures noise temperatures in degrees Kelvin, does not require cryogenic noise sources for routine operation. It eliminates radiometer calibration errors associated with RF attenuation measurements. Calibrated noise source is required only for laboratory adjustment and calibration.

  5. GALILEO SSI/IDA RADIOMETRICALLY CALIBRATED IMAGES V1.0

    Data.gov (United States)

    National Aeronautics and Space Administration — This data set includes Galileo Orbiter SSI radiometrically calibrated images of the asteroid 243 Ida, created using ISIS software and assuming nadir pointing. This...

  6. Experimental Research on Passive Millimeter Wave Radiometric Stealth Technology of Metal Objects

    Science.gov (United States)

    Zhang, Guangfeng; Lou, Guowei; Li, Xingguo

    2012-12-01

    Working all day and all weather, a passive millimeter wave radiometer (PMMW) can be widely used in civil and military affairs. It can get some specific information about the material characteristics different from radar and infrared detectors. On basis of the radiometric operating range equation, the radiation cross section and stealth effect of metal objects are presented for the PMMW near-sensing application. The measurement experiments of metal solid models adopts 3 mm band Dicke radiometer with the outdoor calibration system. The sky temperature and other different surface metal objects are also measured as the contrastive experiments. The results show the radiometric temperature contrasts of solid models have remarkable difference in the bare and coated conditions, and the radiometric operating range can decrease to 60.8 %. In addition, the PMMW stealth methods through different surface treatment respectively reduce the radiometric antenna temperature contrast in some degree.

  7. Susceptibility testing of filamentous fungi to amphotericin B by a rapid radiometric method

    Energy Technology Data Exchange (ETDEWEB)

    Merz, W.G.; Fay, D.; Thumar, B.; Dixon, D.

    1984-01-01

    A rapid, radiometric method was developed to determine the susceptibility of filamentous fungi to amphotericin B. The rapid, radiometric method depended on measurement of the inhibition of /sup 24/CO/sub 2/ production in the presence of amphotericin B. Thirty isolates of filamentous fungi were tested by the rapid, radiometric method and a reference agar dilution method. There was 93% agreement between the two methods when an 80% or greater decrease in CO/sub 2/ production was used to calculate the minimal inhibitory concentration with the rapid, radiometric method. Minimal inhibitory concentrations, based on 80% decrease of CO/sub 2/ production, were achieved within 24 h of incubation with all of the fungi tested.

  8. Sub-hundred Watt operation demonstration of HVM LPP-EUV source

    Science.gov (United States)

    Mizoguchi, Hakaru; Nakarai, Hiroaki; Abe, Tamotsu; Ohta, Takeshi; Nowak, Krzysztof M.; Kawasuji, Yasufumi; Tanaka, Hiroshi; Watanabe, Yukio; Hori, Tsukasa; Kodama, Takeshi; Shiraishi, Yutaka; Yanagida, Tatsuya; Yamada, Tsuyoshi; Yamazaki, Taku; Okazaki, Shinji; Saitou, Takashi

    2014-04-01

    Since 2002, we have been developing a CO2-Sn-LPP EUV light source, the most promising solution as the 13.5 nm high power (>200 W) light source for HVM EUV lithography. Because of its high efficiency, power scalability and spatial freedom around plasma. Our group has proposed several unique original technologies; 1) CO2 laser driven Sn plasma generation, 2) Double laser pulse shooting for higher Sn ionization rate and higher CE. 3) Sn debris mitigation with a magnetic field, 4) Hybrid CO2 laser system that is scalable with a combination of a short pulse oscillator and commercial cw-CO2 amplifiers. 5) High efficient out of band light reduction with grating structured C1 mirror. In past paper we demonstrated in small size (2Hz) experimental device, this experiment shoed the advantage of combining a laser beam at a wavelength of the CO2 laser system with Sn plasma to achieve high CE>4.7% (in maximum) from driver laser pulse energy to EUV in-band energy 1). In this paper we report the further updated results from last paper. (1) 20um droplets at 100kHz operation was successfully ejected by downsized nozzle and demonstrated dramatical improvement of debris on the collector mirror. We have been developing extension of high CE operation condition at 20kHz range, We have reported component technology progress of EUV light source system. (2)New generation collector mirror with IR reduction technology is equipped in mirror maker. (3)20kW CO2 laser amplifier system is demonstrated cooperate with Mitsubishi electric. (4) We develop new Proto #2 EUV LPP source system and demonstrated 200W EUV plasma power (43W EUV clean power at I/F ) at 100kHz operation was confirmed. (5) High conversion efficiency (CE) of 3.9% at 20kHz operation was confirmed in using pico-second pre-pulse laser. (6)Improvement of CO2 laser power from 8kW to 12kW is now on going by installation of new pre-amplifier. (7)Power-up scenario of HVM source is reported, target shipment of first customer beta LPP

  9. Radiometric Dating for Novice Learners: Visualizing, Modeling, and Simulating via Animated Spreadsheets

    Directory of Open Access Journals (Sweden)

    Scott A Sinex

    2010-10-01

    Full Text Available Radiometric dating is introduced to beginning students in a real-world fashion through animated spreadsheets. Students discover the behavior of the parent-daughter relationship in radioactive decay, how the parent-daughter ratio yields the age, and a number of assumptions involved in radiometric dating. After exploring the concepts, and with some elementary mathematical modeling skills, students analyze data from the literature.

  10. Four Years of EUVE Observations of the Bursting Gamma-Ray Emitting Blazar Markarian 421

    Science.gov (United States)

    Cagnoni, Ilaria; Fruscione, Antonella; Papadakis, Iossif

    1998-01-01

    We present spectral and timing analysis of all the data collected by the Extreme Ultraviolet Explorer Satellite (EUVE) for the bright, nearby BL Lacertae object, Markarian 421, during the four-year period 1994-1997. During these years Mrk 421 has been observed by EUVE 4 times with the Deep-Survey/Spectrograph and 2 times with the imaging telescopes for a total of approximately 1.4 7nillions seconds. From 1993 to 1996 three very bright gamma ray flares were also detected by the Whipple observatory. In 1994 Mrk 421 was observed simultaneously by EUVE (Apr 2-12) and IUE one month before the TeV flare; of the 2 EUVF, observations (Feb 4-7 and Apr 25-May 13) of 1995, the second was part of a multiwavelength campaign that mapped the evolution of the TeV flare. In 1996 we observed Mrk 421 twice simultaneously with XTE: one immediately before (Apr 17-30) and another one (May 10-11) right after the May 7 1996 TeV flare. And finally in 1997 from Feb. 7 to Feb. ll. The total light curve seems to be smoothly varying on the long time-scale while on a shorter time-scale there is evidence of an EUVE flare well correlated to the TeV energy 1995 flare. We have analysed the three spectral data set in an homogenous way using the appropriate calibration data for the off-axis observations and our analysis confirms the presence of the absorption features around approximately 70A, in the entire 1995 dataset and possibly in the 1996 data set. We also show the first power spectrum analysis of the Mrk 421 EUVE lightcurves and a comparison with the power spectra predicted by current theoretical models.

  11. Innovative CEA Information Server: Helping K--12 Teachers and Students Navigate the EUVE Mission Archive

    Science.gov (United States)

    Kronberg, F.; Hawkins, I.; Levandovsky, N.; Wong, L.; Arellano, V.; Ford, P.; Nguyen, K.; Malina, R. F.

    1995-12-01

    Internet access to the Extreme Ultraviolet Explorer (EUVE) mission archive for participants in the Science Online and Science Information Infrastructure programs will be facilitated by an innovative, World Wide Web--based data server being developed at the UC Berkeley Center for EUV Astrophysics (CEA). The Innovative CEA Information Server, being developed for the Science Education Program, will allow the user to easily select and access material from the EUVE mission archive. The entire archive, as part of an overarching CEA project, the EUVE Knowledge Base, will be logically structured into knowledge units. Each knowledge unit is defined as ``all of the information available at CEA about a given subject encapsulated into a self-contained, single, multimedia object.'' The user will be able to specify parameters that indicate the desired levels of complexity, breadth or scope, and format (e.g., text or graphics) of the requested knowledge units. The K--12 education materials for this Server are being developed at CEA via a ``Partners in Science'' teacher internship program funded by Research Corporation. Dr. Nelli Levandovsky, a physics teacher from San Francisco Unified School District's Galileo high school, created the following two tutorial plans this past summer: ``Be an Engineer---Learn How to Operate a Satellite'' and ``Be a Scientist---Learn How to Become a Space Researcher.'' Current development efforts are concentrated in two areas: (1) reviewing types of EUVE archival data and mission information and how these knowledge units can be packaged and presented; and (2) investigating how issues of breadth (e.g., scope or extent) and depth (e.g., complexity) of the knowledge units can be better presented in the construction of the Server. This work is supported by NASA contract NAS5-29298.

  12. Investigation of Aerodynamic and Aerodynamic and Radiometric Land Surface Temperatures

    Science.gov (United States)

    Crago, Richard D.; Friedl, Mark; Kustas, William; Wang, Ye-Qiao

    2003-01-01

    The overall goal of the project was to reconcile the difference between T(sub s,r) and T(sub aero), while maintaining consistency within models and with theory and data. The project involved collaboration between researchers at Bucknell University, Boston University, University of mode Island, and the USDNARS Hydrology Laboratory. This report focuses on the work done at Bucknell, which used an analytical continuous-source flux model developed by Crago (1998), based on work by Brutsaert and Sugita (1996) to generate fluxes at all levels of the canopy. Named ALARM [Analytical Land- Atmosphere-Radiometer Model] by Suleiman and Crago (2002), the model assumes the foliage has an exponential vertical temperature profile. The same profile is felt by the within-canopy turbulence and 'seen" by a radiometer viewing the surface from any zenith view angle. ALARM converts radiometric surface temperatures taken from any view angle into a clearly-defined version of Taero called the equivalent isothermal surface temperature T(sub s,j), and then calculates the sensible heat flux H using Monin-Obukhov similarity theory. This allows remotely sensed Ts,r measurements to be used to produce high quality sensible and latent heat flux estimates, or to validate or update the surface temperature produced by SVATs in climate or mesoscale models.

  13. Laser photothermal radiometric instrument for industrial steel hardness inspection

    Science.gov (United States)

    Guo, X.; Sivagurunathan, K.; Pawlak, M.; Garcia, J.; Mandelis, A.; Giunta, S.; Milletari, S.; Bawa, S.

    2010-03-01

    To meet the industrial demand for on-line steel hardness inspection and quality control, a non-contact, non-destructive laser photothermal radiometric instrument (HD-PTR) was developed. The instrument is equipped with a non-liquid-nitrogen-cooled HgCdZnTe (MCZT) detector, a National Instruments data acquisition card with a Dynamic System Analysis (DSA) module, and control software. A series of industrial steel samples which included automotive screws and aircraft gears (flat or curvilinear) were examined. The effective hardness case depths of these samples ranged from 0.21 mm to 1.78 mm. The results demonstrated that three measurement parameters (metrics) can be extracted when using a fast swept-sine photothermal method. These parameters include the phase minimum (or peak) frequency, fmin, the half width, W, and the area, S. It was found that they are complementary for evaluating widely different ranges of hardness case depths. fminis most suitable for large case depths, and W and S for shallower case depths.

  14. ESTIMATION OF RADIOMETRIC CALIBRATION COEFFICIENTS OF EGYPTSAT-1 SENSOR

    Directory of Open Access Journals (Sweden)

    A. H. Nasr

    2012-07-01

    Full Text Available Sensors usually must be calibrated as part of a measurement system. Calibration may include the procedure of correcting the transfer of the sensor, using the reference measurements, in such a way that a specific input-output relation can be guaranteed with a certain accuracy and under certain conditions. It is necessary to perform a calibration to relate the output signal precisely to the physical input signal (e.g., the output Digital Numbers (DNs to the absolute units of at-sensor spectral radiance. Generic calibration data associated with Egyptsat-1 sensor are not provided by the manufacturer. Therefore, this study was conducted to estimate Egyptsat-1 sensor specific calibration data and tabulates the necessary constants for its different multispectral bands. We focused our attention on the relative calibration between Egyptsat-1 and Spot-4 sensors for their great spectral similarity. The key idea is to use concurrent correlation of signals received at both sensors in the same day (i.e., sensors are observing the same phenomenon. Calibration formula constructed from Spot-4 sensor is used to derive the calibration coefficients for Egyptsat-1. A brief overview of the radiometric calibration coefficients retrieval procedures is presented. A reasonable estimate of the overall calibration coefficient is obtained. They have been used to calibrate reflectances of Egyptsat-1 sensor. Further updates to evaluate and improve the retrieved calibration data are being investigated.

  15. COMBINED GEOMETRIC/RADIOMETRIC POINT CLOUD MATCHING FOR SHEAR ANALYSIS

    Directory of Open Access Journals (Sweden)

    S. Gehrke

    2012-07-01

    Full Text Available In the recent past, dense image matching methods such as Semi-Global Matching (SGM became popular for many applications. The SGM approach has been adapted to and implemented for Leica ADS line-scanner data by North West Geomatics (North West in co-operation with Leica Geosystems; it is used in North West’s production workflow. One of the advantages of ADS imagery is the calibrated color information (RGB and near infrared, extending SGM-derived point clouds to dense “image point clouds” or, more general, information clouds (info clouds. With the goal of automating the quality control of ADS data, info clouds are utilized for Shear Analysis: Three-dimensional offsets of adjacent ADS image strips are determined from a pattern of info cloud pairs in strip overlaps by point cloud matching. The presented approach integrates geometry (height and radiometry (intensity information; matching is based on local point-to-plane distances for all points in a given cloud. The offset is derived in a least squares adjustment by applying it to each individual distance computation equation. Using intensities in addition to heights greatly benefits the offset computation, because intensity gradients tend to occur more frequently than height gradients. They can provide or complement the required information for the derivation of planimetric offset components. The paper details the combined geometric/radiometric point cloud matching approach and verifies the results against manual measurements.

  16. Laser photothermal radiometric instrument for industrial steel hardness inspection

    Energy Technology Data Exchange (ETDEWEB)

    Guo, X; Sivagurunathan, K; Pawlak, M; Garcia, J; Mandelis, A [Center for Advanced Diffusion-Wave Technologies, Department of MIE, University Toronto, 5 King' s College Road, Toronto, ON M5S 3G8 (Canada); Giunta, S; Milletari, S [Industrial Technologies Deparment of Avio S.p.A., Via I Maggio 99, 10040 Rivalta di Torino (Italy); Bawa, S, E-mail: guox@mie.utoronto.c [Metex Heat Treatment Ltd., 225 Wilkinson Road, Brampton, ON L6T 4M2 (Canada)

    2010-03-01

    To meet the industrial demand for on-line steel hardness inspection and quality control, a non-contact, non-destructive laser photothermal radiometric instrument (HD-PTR) was developed. The instrument is equipped with a non-liquid-nitrogen-cooled HgCdZnTe (MCZT) detector, a National Instruments data acquisition card with a Dynamic System Analysis (DSA) module, and control software. A series of industrial steel samples which included automotive screws and aircraft gears (flat or curvilinear) were examined. The effective hardness case depths of these samples ranged from 0.21 mm to 1.78 mm. The results demonstrated that three measurement parameters (metrics) can be extracted when using a fast swept-sine photothermal method. These parameters include the phase minimum (or peak) frequency, f{sub min}, the half width, W, and the area, S. It was found that they are complementary for evaluating widely different ranges of hardness case depths. f{sub min}is most suitable for large case depths, and W and S for shallower case depths.

  17. Radiometric prescreen for antitumor activity with Saccharomyces cerevisiae mutant strain.

    Science.gov (United States)

    Speedie, M K; Fique, D V; Blomster, R N

    1980-07-01

    After modification, a technique for radiometrically measuring bacterial growth has been applied to a mutant strain of Saccharomyces cerevisiae. The assay is based on inhibition of 14CO2 release from [14C]glucose, which provides an extremely sensitive measure of cellular respiratory activity and growth. The criterion for antitumor activity is the differential inhibition of wild-type and mutant (distorted cell membrane) strains of the yeast. The system was optimized for medium, time of incubation, temperature, and size of inoculum. Known antitumor agents, including bleomycin, actinomycin D, adriamycin, and ellipticine were tested in the system, and differential inhibition was observed. Vincristine showed no inhibitory effects at the concentrations tried. The sensitivity for 20% inhibition ranged from 0.8 micrograms of adriamycin per ml to 0.14 mg of ellipticine per ml. Antifungal agents such as amphotericin B exhibited no differential inhibition. Antibacterial agents were inactive. This method may provide a rapid, sensitive, in vitro quantitative assay for antitumor agents which could be applied to a variety of assay needs and which can be run with facilities and equipment available in most laboratories.

  18. JPSS-1 VIIRS Pre-Launch Radiometric Performance

    Science.gov (United States)

    Oudrari, Hassan; Mcintire, Jeffrey; Xiong, Xiaoxiong; Butler, James; Ji, Qiang; Schwarting, Tom; Zeng, Jinan

    2015-01-01

    The first Joint Polar Satellite System (JPSS-1 or J1) mission is scheduled to launch in January 2017, and will be very similar to the Suomi-National Polar-orbiting Partnership (SNPP) mission. The Visible Infrared Imaging Radiometer Suite (VIIRS) on board the J1 spacecraft completed its sensor level performance testing in December 2014. VIIRS instrument is expected to provide valuable information about the Earth environment and properties on a daily basis, using a wide-swath (3,040 km) cross-track scanning radiometer. The design covers the wavelength spectrum from reflective to long-wave infrared through 22 spectral bands, from 0.412 m to 12.01 m, and has spatial resolutions of 370 m and 740 m at nadir for imaging and moderate bands, respectively. This paper will provide an overview of pre-launch J1 VIIRS performance testing and methodologies, describing the at-launch baseline radiometric performance as well as the metrics needed to calibrate the instrument once on orbit. Key sensor performance metrics include the sensor signal to noise ratios (SNRs), dynamic range, reflective and emissive bands calibration performance, polarization sensitivity, bands spectral performance, response-vs-scan (RVS), near field response, and stray light rejection. A set of performance metrics generated during the pre-launch testing program will be compared to the sensor requirements and to SNPP VIIRS pre-launch performance.

  19. Making SAR Data Accessible - ASF's ALOS PALSAR Radiometric Terrain Correction Project

    Science.gov (United States)

    Meyer, F. J.; Arko, S. A.; Gens, R.

    2015-12-01

    While SAR data have proven valuable for a wide range of geophysical research questions, so far, largely only the SAR-educated science communities have been able to fully exploit the information content of internationally available SAR archives. The main issues that have been preventing a more widespread utilization of SAR are related to (1) the diversity and complexity of SAR data formats, (2) the complexity of the processing flows needed to extract geophysical information from SAR, (3) the lack of standardization and automation of these processing flows, and (4) the often ignored geocoding procedures, leaving the data in image coordinate space. In order to improve upon this situation, ASF's radiometric terrain-correction (RTC) project is generating uniformly formatted and easily accessible value-added products from the ASF Distributed Active Archive Center's (DAAC) five-year archive of JAXA's ALOS PALSAR sensor. Specifically, the project applies geometric and radiometric corrections to SAR data to allow for an easy and direct combination of obliquely acquired SAR data with remote sensing imagery acquired in nadir observation geometries. Finally, the value-added data is provided to the user in the broadly accepted Geotiff format, in order to support the easy integration of SAR data into GIS environments. The goal of ASF's RTC project is to make SAR data more accessible and more attractive to the broader SAR applications community, especially to those users that currently have limited SAR expertise. Production of RTC products commenced October 2014 and will conclude late in 2015. As of July 2015, processing of 71% of ASF's ALOS PALSAR archive was completed. Adding to the utility of this dataset are recent changes to the data access policy that allow the full-resolution RTC products to be provided to the public, without restriction. In this paper we will introduce the processing flow that was developed for the RTC project and summarize the calibration and validation

  20. Radiometric Measurement Comparison Using the Ocean Color Temperature Scanner (OCTS) Visible and Near Infrared Integrating Sphere.

    Science.gov (United States)

    Johnson, B Carol; Sakuma, F; Butler, J J; Biggar, S F; Cooper, J W; Ishida, J; Suzuki, K

    1997-01-01

    As a part of the pre-flight calibration and validation activities for the Ocean Color and Temperature Scanner (OCTS) and the Sea-viewing Wide Field-of-view Sensor (SeaWiFS) ocean color satellite instruments, a radiometric measurement comparison was held in February 1995 at the NEC Corporation in Yokohama, Japan. Researchers from the National Institute of Standards and Technology (NIST), the National Aeronautics and Space Administration/Goddard Space Flight Center (NASA/GSFC), the University of Arizona Optical Sciences Center (UA), and the National Research Laboratory of Metrology (NRLM) in Tsukuba, Japan used their portable radiometers to measure the spectral radiance of the OCTS visible and near-infrared integrating sphere at four radiance levels. These four levels corresponded to the configuration of the OCTS integrating sphere when the calibration coefficients for five of the eight spectral channels, or bands, of the OCTS instrument were determined. The measurements of the four radiometers differed by -2.7 % to 3.9 % when compared to the NEC calibration of the sphere and the overall agreement was within the combined measurement uncertainties. A comparison of the measurements from the participating radiometers also resulted in agreement within the combined measurement uncertainties. These results are encouraging and demonstrate the utility of comparisons using laboratory calibration integrating sphere sources. Other comparisons will focus on instruments that are scheduled for spacecraft in the NASA study of climate change, the Earth Observing System (EOS).

  1. Interlaboratory drug susceptibility testing of Mycobacterium tuberculosis by a radiometric procedure and two conventional methods

    Energy Technology Data Exchange (ETDEWEB)

    Siddiqi, S.H.; Hawkins, J.E.; Laszlo, A.

    1985-12-01

    A total of 224 recent isolates of Mycobacterium tuberculosis from 163 patients selected to have multidrug resistance were tested against streptomycin (SM), isoniazid, rifampin, and ethambutol (EMB) by the rapid radiometric BACTEC method and two conventional proportion methods: the World Health Organization (WHO) method, using Lowenstein-Jensen medium; and the Veterans Administration reference laboratory for mycobacteria (VA) method, using Middlebrook 7H10 agar medium. The results were compared, focusing on the concentrations of the drugs in all three methods. Among the four drugs tested, most of the discrepancies in measured activity were observed with SM and EMB, generally because of differences in the drug concentrations used by the three methods. A 4-micrograms amount of SM in the BACTEC method was found to be slightly less active than 10 micrograms in the VA method and significantly more active than 4 micrograms of dihydrostreptomycin in the WHO method. With EMB, 2.5 micrograms in BACTEC was similar to 5 micrograms in the VA method and 2 micrograms in the WHO method, while 10 micrograms in the BACTEC method was found to be more active than 10 and 2 micrograms in the VA and WHO methods, respectively. To attain close agreement, drug concentrations used in the BACTEC method should be carefully selected when a comparison is to be made with any conventional method employed in a laboratory. Standardization of in vitro susceptibility testing is greatly needed to achieve uniformity among the test methods used to evaluate tuberculosis therapeutics.

  2. On-orbit radiometric calibration over time and between spacecraft using the moon

    Science.gov (United States)

    Kieffer, H.H.; Stone, T.C.; Barnes, R.A.; Bender, S.; Eplee, R.E.; Mendenhall, J.; Ong, L.; ,

    2002-01-01

    The Robotic Lunar Observatory (ROLO) project has developed a spectral irradiance model of the Moon that accounts for variations with lunar phase through the bright half of a month, lunar librations, and the location of an Earth-orbiting spacecraft. The methodology of comparing spacecraft observations of the Moon with this model has been developed to a set of standardized procedures so that comparisons can be readily made. In the cases where observations extend over several years (e.g., SeaWiFS), instrument response degradation has been determined with precision of about 0.1% per year. Because of the strong dependence of lunar irradiance on geometric angles, observations by two spacecraft cannot be directly compared unless acquired at the same time and location. Rather, the lunar irradiance based on each spacecraft instrument calibration can be compared with the lunar irradiance model. Even single observations by an instrument allow inter-comparison of its radiometric scale with other instruments participating in the lunar calibration program. Observations by SeaWiFS, ALI, Hyperion and MTI are compared here.

  3. X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography; Proceedings of the Meeting, San Diego, CA, July 9-13, 1990

    Science.gov (United States)

    Hoover, Richard B. (Editor); Walker, Arthur B. C., Jr. (Editor)

    1991-01-01

    Topics discussed in this issue include the fabrication of multilayer X-ray/EUV coatings; the design, characterization, and test of multilayer X-ray/EUV coatings; multilayer X-ray/EUV monochromators and imaging microscopes; X-ray/EUV telescopes; the test and calibration performance of X-ray/EUV instruments; XUV/soft X-ray projection lithography; X-ray/EUV space observatories and missions; X-ray/EUV telescopes for solar research; X-ray/EUV polarimetry; X-ray/EUV spectrographs; and X-ray/EUV filters and gratings. Papers are presented on the deposition-controlled uniformity of multilayer mirrors, interfaces in Mo/Si multilayers, the design and analysis of an aspherical multilayer imaging X-ray microscope, recent developments in the production of thin X-ray reflecting foils, and the ultraprecise scanning technology. Consideration is also given to an active sun telescope array, the fabrication and performance at 1.33 nm of a 0.24-micron-period multilayer grating, a cylindrical proportional counter for X-ray polarimetry, and the design and analysis of the reflection grating arrays for the X-Ray Multi-Mirror Mission.

  4. Exploration of the Transition Region-Corona Interface With the Multi-Order Solar EUV Spectrograph Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to observe the solar upper transition region and lower corona in Ne VII 46.5 nm with the Multi-Order Solar EUV Spectrograph (MOSES) rocket payload. The...

  5. Uncooled Radiation Hard Large Area SiC X-ray and EUV Detectors and 2D Arrays Project

    Data.gov (United States)

    National Aeronautics and Space Administration — This project seeks to design, fabricate, characterize and commercialize large area, uncooled and radiative hard 4H-SiC EUV ? soft X-ray detectors capable of ultra...

  6. High Quality, Low-Scatter SiC Optics Suitable for Space-based UV & EUV Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — SSG Precision Optronics proposes the development and demonstration of a new optical fabrication process for the production of EUV quality Silicon Carbide (SiC)...

  7. Normal incidence spectrophotometer using high density transmission grating technology and highly efficiency silicon photodiodes for absolute solar EUV irradiance measurements

    Science.gov (United States)

    Ogawa, H. S.; Mcmullin, D.; Judge, D. L.; Korde, R.

    1992-01-01

    New developments in transmission grating and photodiode technology now make it possible to realize spectrometers in the extreme ultraviolet (EUV) spectral region (wavelengths less than 1000 A) which are expected to be virtually constant in their diffraction and detector properties. Time dependent effects associated with reflection gratings are eliminated through the use of free standing transmission gratings. These gratings together with recently developed and highly stable EUV photodiodes have been utilized to construct a highly stable normal incidence spectrophotometer to monitor the variability and absolute intensity of the solar 304 A line. Owing to its low weight and compactness, such a spectrometer will be a valuable tool for providing absolute solar irradiance throughout the EUV. This novel instrument will also be useful for cross-calibrating other EUV flight instruments and will be flown on a series of Hitchhiker Shuttle Flights and on SOHO. A preliminary version of this instrument has been fabricated and characterized, and the results are described.

  8. A solar type II radio burst from CME-coronal ray interaction: simultaneous radio and EUV imaging

    CERN Document Server

    Chen, Yao; Feng, Li; Feng, Shiwei; Kong, Xiangliang; Guo, Fan; Wang, Bing; Li, Gang

    2014-01-01

    Simultaneous radio and extreme ultraviolet (EUV)/white-light imaging data are examined for a solar type II radio burst occurring on 2010 March 18 to deduce its source location. Using a bow-shock model, we reconstruct the 3-dimensional EUV wave front (presumably the type-II emitting shock) based on the imaging data of the two STEREO spacecraft. It is then combined with the Nan\\c{c}ay radio imaging data to infer the 3-dimensional position of the type II source. It is found that the type II source coincides with the interface between the CME EUV wave front and a nearby coronal ray structure, providing evidence that the type II emission is physically related to the CME-ray interaction. This result, consistent with those of previous studies, is based on simultaneous radio and EUV imaging data for the first time.

  9. Initial Radiometric Characteristics of KOMPSAT-3A Multispectral Imagery Using the 6S Radiative Transfer Model, Well-Known Radiometric Tarps, and MFRSR Measurements

    Directory of Open Access Journals (Sweden)

    Jong-Min Yeom

    2017-02-01

    Full Text Available On-orbit radiometric characterization of the multispectral (MS imagery of the Korea Aerospace Research Institute (KARI’s Korea Multi-Purpose Satellite-3A (KOMPSAT-3A, which was launched on 25 March 2015, was conducted to provide quantitative radiometric information about KOMPSAT-3A. During the in-orbit test (IOT, vicarious radiometric calibration of KOMPSAT-3A was performed using the Second Simulation of a Satellite Signal in the Solar Spectrum (6S radiative transfer model. The characteristics of radiometric tarps, the atmospheric optical depth from multi-filter rotating shadowband radiometer (MFRSR measurements, and sun–sensor–geometry were carefully considered, in order to calculate the exact top of atmosphere (TOA radiance received by KOMPSAT-3A MS bands. In addition, the bidirectional reflectance distribution function (BRDF behaviors of the radiometric tarps were measured in the laboratory with a two-dimensional hyperspectral gonioradiometer, to compensate for the geometry discrepancy between the satellite and the ASD FieldSpec® 3 spectroradiometer. The match-up datasets between the TOA radiance and the digital number (DN from KOMPSAT-3A were used to determine DN-to-radiance conversion factors, based on linear least squares fitting for two field campaigns. The final results showed that the R2 values between the observed and simulated radiances for the blue, green, red, and near-infrared (NIR bands, are greater than 0.998. An approximate error budget analysis for the vicarious calibration of KOMPSAT-3A showed an error of less than 6.8%. When applying the laboratory-based BRDF correction to the case of higher viewing zenith angle geometry, the gain ratio was improved, particularly for the blue (1.3% and green (1.2% bands, which exhibit high sensitivity to the BRDF of radiometric tarps during the backward-scattering phase. The calculated gain ratio between the first and second campaigns showed a less than 5% discrepancy, indicating that

  10. Radiometric Cross-Calibration of GF-4 in Multispectral Bands

    Directory of Open Access Journals (Sweden)

    Aixia Yang

    2017-03-01

    Full Text Available The GaoFen-4 (GF-4, launched at the end of December 2015, is China’s first high-resolution geostationary optical satellite. A panchromatic and multispectral sensor (PMS is onboard the GF-4 satellite. Unfortunately, the GF-4 has no onboard calibration assembly, so on-orbit radiometric calibration is required. Like the charge-coupled device (CCD onboard HuanJing-1 (HJ or the wide field of view sensor (WFV onboard GaoFen-1 (GF-1, GF-4 also has a wide field of view, which provides challenges for cross-calibration with narrow field of view sensors, like the Landsat series. A new technique has been developed and used to calibrate HJ-1/CCD and GF-1/WFV, which is verified viable. The technique has three key steps: (1 calculate the surface using the bi-directional reflectance distribution function (BRDF characterization of a site, taking advantage of its uniform surface material and natural topographic variation using Landsat Enhanced Thematic Mapper Plus (ETM+/Operational Land Imager (OLI imagery and digital elevation model (DEM products; (2 calculate the radiance at the top-of-the atmosphere (TOA with the simulated surface reflectance using the atmosphere radiant transfer model; and (3 fit the calibration coefficients with the TOA radiance and corresponding Digital Number (DN values of the image. This study attempts to demonstrate the technique is also feasible to calibrate GF-4 multispectral bands. After fitting the calibration coefficients using the technique, extensive validation is conducted by cross-validation using the image pairs of GF-4/PMS and Landsat-8/OLI with similar transit times and close view zenith. The validation result indicates a higher accuracy and frequency than that given by the China Centre for Resources Satellite Data and Application (CRESDA using vicarious calibration. The study shows that the new technique is also quite feasible for GF-4 multispectral bands as a routine long-term procedure.

  11. State-of-the-art EUV materials and processes for the 7nm node and beyond

    Science.gov (United States)

    Buitrago, Elizabeth; Meeuwissen, Marieke; Yildirim, Oktay; Custers, Rolf; Hoefnagels, Rik; Rispens, Gijsbert; Vockenhuber, Michaela; Mochi, Iacopo; Fallica, Roberto; Tasdemir, Zuhal; Ekinci, Yasin

    2017-03-01

    Extreme ultraviolet lithography (EUVL, λ = 13.5 nm) being the most likely candidate to manufacture electronic devices for future technology nodes is to be introduced in high volume manufacturing (HVM) at the 7 nm logic node, at least at critical lithography levels. With this impending introduction, it is clear that excellent resist performance at ultra-high printing resolutions (below 20 nm line/space L/S) is ever more pressing. Nonetheless, EUVL has faced many technical challenges towards this paradigm shift to a new lithography wavelength platform. Since the inception of chemically amplified resists (CARs) they have been the base upon which state-of-the art photoresist technology has been developed from. Resist performance as measured in terms of printing resolution (R), line edge roughness (LER), sensitivity (D or exposure dose) and exposure latitude (EL) needs to be improved but there are well known trade-off relationships (LRS trade-off) among these parameters for CARs that hamper their simultaneous enhancement. Here, we present some of the most promising EUVL materials tested by EUV interference lithography (EUV-IL) with the aim of resolving features down to 11 nm half-pitch (HP), while focusing on resist performance at 16 and 13 nm HP as needed for the 7 and 5 nm node, respectively. EUV-IL has enabled the characterization and development of new resist materials before commercial EUV exposure tools become available and is therefore a powerful research and development tool. With EUV-IL, highresolution periodic images can be printed by the interference of two or more spatially coherent beams through a transmission-diffraction grating mask. For this reason, our experiments have been performed by EUV-IL at Swiss Light Source (SLS) synchrotron facility located at the Paul Scherrer Institute (PSI). Having the opportunity to test hundreds of EUVL materials from vendors and research partners from all over the world, PSI is able to give a global update on some of the

  12. Debris and radiation-induced damage effects on EUV nanolithography source collector mirror optics performance.

    Energy Technology Data Exchange (ETDEWEB)

    Allain, J. P.; Nieto, M.; Hendricks, M.; Harilal, S. S.; Hassanein, A.; Mathematics and Computer Science

    2007-01-01

    Exposure of collector mirrors facing the hot, dense pinch plasma in plasma-based EUV light sources to debris (fast ions, neutrals, off-band radiation, droplets) remains one of the highest critical issues of source component lifetime and commercial feasibility of nanolithography at 13.5-nm. Typical radiators used at 13.5-nm include Xe and Sn. Fast particles emerging from the pinch region of the lamp are known to induce serious damage to nearby collector mirrors. Candidate collector configurations include either multi-layer mirrors (MLM) or single-layer mirrors (SLM) used at grazing incidence. Studies at Argonne have focused on understanding the underlying mechanisms that hinder collector mirror performance at 13.5-nm under fast Sn or Xe exposure. This is possible by a new state-of-the-art in-situ EUV reflectometry system that measures real time relative EUV reflectivity (15-degree incidence and 13.5-nm) variation during fast particle exposure. Intense EUV light and off-band radiation is also known to contribute to mirror damage. For example offband radiation can couple to the mirror and induce heating affecting the mirror's surface properties. In addition, intense EUV light can partially photo-ionize background gas (e.g., Ar or He) used for mitigation in the source device. This can lead to local weakly ionized plasma creating a sheath and accelerating charged gas particles to the mirror surface and inducing sputtering. In this paper we study several aspects of debris and radiation-induced damage to candidate EUVL source collector optics materials. The first study concerns the use of IMD simulations to study the effect of surface roughness on EUV reflectivity. The second studies the effect of fast particles on MLM reflectivity at 13.5-nm. And lastly the third studies the effect of multiple energetic sources with thermal Sn on 13.5-nm reflectivity. These studies focus on conditions that simulate the EUVL source environment in a controlled way.

  13. Debris- and radiation-induced damage effects on EUV nanolithography source collector mirror optics performance

    Science.gov (United States)

    Allain, J. P.; Nieto, M.; Hendricks, M.; Harilal, S. S.; Hassanein, A.

    2007-05-01

    Exposure of collector mirrors facing the hot, dense pinch plasma in plasma-based EUV light sources to debris (fast ions, neutrals, off-band radiation, droplets) remains one of the highest critical issues of source component lifetime and commercial feasibility of nanolithography at 13.5-nm. Typical radiators used at 13.5-nm include Xe and Sn. Fast particles emerging from the pinch region of the lamp are known to induce serious damage to nearby collector mirrors. Candidate collector configurations include either multi-layer mirrors (MLM) or single-layer mirrors (SLM) used at grazing incidence. Studies at Argonne have focused on understanding the underlying mechanisms that hinder collector mirror performance at 13.5-nm under fast Sn or Xe exposure. This is possible by a new state-of-the-art in-situ EUV reflectometry system that measures real time relative EUV reflectivity (15-degree incidence and 13.5-nm) variation during fast particle exposure. Intense EUV light and off-band radiation is also known to contribute to mirror damage. For example offband radiation can couple to the mirror and induce heating affecting the mirror's surface properties. In addition, intense EUV light can partially photo-ionize background gas (e.g., Ar or He) used for mitigation in the source device. This can lead to local weakly ionized plasma creating a sheath and accelerating charged gas particles to the mirror surface and inducing sputtering. In this paper we study several aspects of debris and radiation-induced damage to candidate EUVL source collector optics materials. The first study concerns the use of IMD simulations to study the effect of surface roughness on EUV reflectivity. The second studies the effect of fast particles on MLM reflectivity at 13.5-nm. And lastly the third studies the effect of multiple energetic sources with thermal Sn on 13.5-nm reflectivity. These studies focus on conditions that simulate the EUVL source environment in a controlled way.

  14. Experimental methods of indoor millimeter-wave radiometric imaging for personnel concealed contraband detection

    Science.gov (United States)

    Hu, Taiyang; Xiao, Zelong; Li, Hao; Lv, Rongchuan; Lu, Xuan

    2014-11-01

    The increasingly emerging terrorism attacks and violence crimes around the world have posed severe threats to public security, so carrying out relevant research on advanced experimental methods of personnel concealed contraband detection is crucial and meaningful. All of the advantages of imaging covertly, avoidance of interference with other systems, intrinsic property of being safe to persons under screening , and the superior ability of imaging through natural or manmade obscurants, have significantly combined to enable millimeter-wave (MMW) radiometric imaging to offer great potential in personnel concealed contraband detection. Based upon the current research status of MMW radiometric imaging and urgent demands of personnel security screening, this paper mainly focuses on the experimental methods of indoor MMW radiometric imaging. The reverse radiation noise resulting from super-heterodyne receivers seriously affects the image experiments carried out at short range, so both the generation mechanism and reducing methods of this noise are investigated. Then, the benefit of sky illumination no longer exists for the indoor radiometric imaging, and this leads to the decrease in radiometric temperature contrast between target and background. In order to enhance the radiometric temperature contrast for improving indoor imaging performance, the noise illumination technique is adopted in the indoor imaging scenario. In addition, the speed and accuracy of concealed contraband detection from acquired MMW radiometric images are usually restricted to the deficiencies in traditional artificial interpretation by security inspectors, thus an automatic recognition and location algorithm by integrating improved Fuzzy C-means clustering with moment invariants is put forward. A series of original results are also presented to demonstrate the significance and validity of these methods.

  15. Improved Thermal-Vacuum Compatible Flat Plate Radiometric Souce for System-Level Testing of Optical Sensors

    Science.gov (United States)

    Schwarz, Mark A.; Kent, Craig J.; Bousquet, Robert; Brown, Steven W.

    2015-01-01

    This work describes the development of an improved vacuum compatible flat plate radiometric source used for characterizing and calibrating remote optical sensors, in situ, throughout their testing period. The original flat plate radiometric source was developed for use by the VIIRS instrument during the NPOESS Preparatory Project (NPP). Following this effort, the FPI has had significant upgrades in order to improve both the radiometric throughput and uniformity. Results of the VIIRS testing with the reconfigured FPI are reported and discussed.

  16. Arc-shaped slit effect of EUV lithography with anamorphic high-NA system in terms of critical dimension variation

    Science.gov (United States)

    Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

    2017-03-01

    EUV lithography is one of the promising technologies for 1X nm patterning. EUV lithography has high resolution capability because of short wavelength of source but it has some particular patterning problems which are not appeared a t optical lithography. Owing to reflective optics, EUV light incidents obliquely in mask and oblique incidence of EUV lithography leads shadow effect and arc-shaped exposure slit. The study of these particular optical problems are required for optical proximity correction (OPC). Arc-shaped exposure slit leads azimuthal angle variation, incident angle variation , and variation of shadow width. With these variations along exposure slit, patterning result is varied along the exposure slit. With understanding of these particular optical problems, lots of EUV OPC studies have been presented with 0.33 conventional NA system. However, suggested anamorphic high NA system has not only elliptical shaped mask NA and also different angle distribution. The incident angle variation as a function of azimuthal angle is different between isomorphic and anamorphic NA systems. In case of anamorphic NA system, incident angle distribution is decreased on horizontal direction but it is larger on vertical direction compared with case of isomorphic NA system. These differences make different arc-shaped slit effect. CD variation as a function of azimuthal angle is different between isomorphic and a namorphic NA systems. The study of CD variation along the exposure slit is very helpful for OPC in EUV lithography.

  17. Overcoming EUV mask blank defects: what we can, and what we should

    Science.gov (United States)

    Jonckheere, Rik

    2017-07-01

    This invited paper reviews progress over the past ten years of contributed effort to the understanding and the mitigation of multilayer defects on the EUV mask blank. These defects are an EUV-specific type of mask defects. Whereas the only true solution is to totally avoid the presence of such ML-defects during blank manufacturing, some level of capability of printability mitigation has been demonstrated, both by absorber compensation repair and by pattern shift. In both cases, it is essential that one can build on a full-proof blank inspection capability, that detects all printable blank defects, at a very low false detection rate, such as by using actinic blank inspection. This capability, together with providing accurate defect location information, establishes an essential prerequisite for their mitigation or avoidance. On the latter, the proposal is made to extend pattern shift to intentional pattern deformation.

  18. Systematic study of ligand structures of metal oxide EUV nanoparticle photoresists

    KAUST Repository

    Jiang, Jing

    2015-03-19

    Ligand stabilized metal oxide nanoparticle resists are promising candidates for EUV lithography due to their high sensitivity for high-resolution patterning and high etching resistance. As ligand exchange is responsible for the patterning mechanism, we systematically studied the influence of ligand structures of metal oxide EUV nanoparticles on their sensitivity and dissolution behavior. ZrO2 nanoparticles were protected with various aromatic ligands with electron withdrawing and electron donating groups. These nanoparticles have lower sensitivity compared to those with aliphatic ligands suggesting the structures of these ligands is more important than their pka on resist sensitivity. The influence of ligand structure was further studied by comparing the nanoparticles’ solubility for a single type ligand to mixtures of ligands. The mixture of nanoparticles showed improved pattern quality. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  19. Deposition and sputtering yields on EUV collector mirror from Laser Plasma Extreme Ultraviolet Sources

    Energy Technology Data Exchange (ETDEWEB)

    Wu Tao [Wuhan National Laboratory for Optoelectronics, School of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074 (China); Rao Zhiming [Depart of Computer Science, Jiangxi University of Traditional Chinese Medicine, Nanchang 330004, Jiangxi (China); Wang Shifang, E-mail: flatime@163.com [School of Physics and Electric Information, Hubei University of Education 1 Nanhuan Road, Wuhan East High-Tech. Zone, Wuhan 430205, Hubei (China)

    2011-02-01

    Based on the self-similar solution of gas dynamic equations, spherical expansion of the highly ionized plasma with limited mass into a vacuum is investigated for the droplet target laser-produced plasma extreme ultraviolet (LPP-EUV) sources. Using partially numerical and partially analytical technology, the velocity, the temperature and the density profiles in the plume versus ionization degree, adiabatic index and initial conditions are presented. Furthermore, the spatial thickness variations of the deposited substrate witness and ion sputtering yields for Ru, Mo, and Si under Sn ion bombardment are theoretically calculated, which can be useful to enable LPP-EUV sources suppliers to estimate collector lifetime and improve debris mitigation systems.

  20. Quantitative Chemically-Specific Coherent Diffractive Imaging of Buried Interfaces using a Tabletop EUV Nanoscope

    CERN Document Server

    Shanblatt, Elisabeth R; Gardner, Dennis F; Mancini, Giulia F; Karl, Robert M; Tanksalvala, Michael D; Bevis, Charles S; Vartanian, Victor H; Kapteyn, Henry C; Adams, Daniel E; Murnane, Margaret M

    2016-01-01

    Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interstitial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried ...

  1. EUV stimulated emission from MgO pumped by FEL pulses

    Directory of Open Access Journals (Sweden)

    Philippe Jonnard

    2017-09-01

    Full Text Available Stimulated emission is a fundamental process in nature that deserves to be investigated and understood in the extreme ultra-violet (EUV and x-ray regimes. Today, this is definitely possible through high energy density free electron laser (FEL beams. In this context, we give evidence for soft-x-ray stimulated emission from a magnesium oxide solid target pumped by EUV FEL pulses formed in the regime of travelling-wave amplified spontaneous emission in backward geometry. Our results combine two effects separately reported in previous works: emission in a privileged direction and existence of a material-dependent threshold for the stimulated emission. We develop a novel theoretical framework, based on coupled rate and transport equations taking into account the solid-density plasma state of the target. Our model accounts for both observed mechanisms that are the privileged direction for the stimulated emission of the Mg L2,3 characteristic emission and the pumping threshold.

  2. EUV actinic defect inspection and defect printability at the sub-32 nm half pitch

    Energy Technology Data Exchange (ETDEWEB)

    Huh, Sungmin; Kearney, Patrick; Wurm, Stefan; Goodwin, Frank; Han, Hakseung; Goldberg, Kenneth; Mochi, Iacopp; Gullikson, Eric M.

    2009-08-01

    Extreme ultraviolet (EUV) mask blanks with embedded phase defects were inspected with a reticle actinic inspection tool (AIT) and the Lasertec M7360. The Lasertec M7360, operated at SEMA TECH's Mask Blank Development Center (MBDC) in Albany, NY, has a sensitivity to multilayer defects down to 40-45 nm, which is not likely sufficient for mask blank development below the 32 nm half-pitch node. Phase defect printability was simulated to calculate the required defect sensitivity for a next generation blank inspection tool to support reticle development for the sub-32 nm half-pitch technology node. Defect mitigation technology is proposed to take advantage of mask blanks with some defects. This technology will reduce the cost of ownership of EUV mask blanks. This paper will also discuss the kind of infrastructure that will be required for the development and mass production stages.

  3. Embedded top-coat for reducing the effect out of band radiation in EUV lithography

    Science.gov (United States)

    Du, Ke; Siauw, Meiliana; Valade, David; Jasieniak, Marek; Voelcker, Nico; Trefonas, Peter; Thackeray, Jim; Blakey, Idriss; Whittaker, Andrew

    2017-03-01

    Out of band (OOB) radiation from the EUV source has significant implications for the performance of EUVL photoresists. Here we introduce a surface-active polymer additive, capable of partitioning to the top of the resist film during casting and annealing, to protect the underlying photoresist from OOB radiation. Copolymers were prepared using reversible addition-fragmentation chain transfer (RAFT) polymerization, and rendered surface active by chain extension with a block of fluoro-monomer. Films were prepared from the EUV resist with added surface-active Embedded Barrier Layer (EBL), and characterized using measurements of contact angles and spectroscopic ellipsometry. Finally, the lithographic performance of the resist containing the EBL was evaluated using Electron Beam Lithography exposure

  4. Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

    Energy Technology Data Exchange (ETDEWEB)

    Hu, M.H.; Le Guen, K.; Andre, J.M.; Jonnard, P. [UPMC Univ Paris 06, CNRS UMR 7614, Laboratoire Chimie Physique - Matiere Rayonnement, Paris (France); Zhou, S.K.; Li, H.C.; Zhu, J.T.; Wang, Z.S. [Tongji University, Institute of Precision Optical Engineering, Department of Physics, Shanghai (China); Meny, C. [CNRS UMR 7504, Institut de Physique et Chimie des Materiaux de Strasbourg (France); Mahne, N.; Giglia, A. [CNR-IOM Laboratorio TASC, Basovizza, Trieste (Italy); Nannarone, S. [CNR-IOM Laboratorio TASC, Basovizza, Trieste (Italy); Universita di Modenae R.E., Dipartimento Ingegneria Materiali, Modena (Italy); Esteve, I. [Univ. Paris 06 et 07, CNRS UMR 7590, Institut de Mineralogie et de Physique des Milieux Condenses, Paris (France); Walls, M. [Univ. Paris Sud, Laboratoire de Physiques des Solides, CNRS UMR 8502, Orsay (France)

    2012-03-15

    We present the results of the characterization of Mg/Co periodic multilayers and their thermal stability for the EUV range. The annealing study is performed up to a temperature of 400 {sup circle} C. Images obtained by scanning transmission electron microscopy and electron energy loss spectroscopy clearly show a good quality of the multilayer structure. The measurements of the EUV reflectivity around 25 nm ({proportional_to}49 eV) indicate that the reflectivity decreases when the annealing temperature increases above 300 {sup circle} C. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. Nuclear magnetic resonance used to determine the chemical state of the Co atoms and scanning electron microscopy images of cross sections of the Mg/Co multilayers reveal changes in the morphology of the stack from an annealing temperature of 305 {sup circle} C. This explains the observed reflectivity loss. (orig.)

  5. THE EUROSDR PROJECT "RADIOMETRIC ASPECTS OF DIGITAL PHOTOGRAMMETRIC IMAGES" – RESULTS OF THE EMPIRICAL PHASE

    Directory of Open Access Journals (Sweden)

    E. Honkavaara

    2012-09-01

    Full Text Available This article presents the empirical research carried out in the context of the multi-site EuroSDR project "Radiometric aspects of digital photogrammetric images" and provides highlights of the results. The investigations have considered the vicarious radiometric and spatial resolution validation and calibration of the sensor system, radiometric processing of the image blocks either by performing relative radiometric block equalization or into absolutely reflectance calibrated products, and finally aspects of practical applications on NDVI layer generation and tree species classification. The data sets were provided by Leica Geosystems ADS40 and Intergraph DMC and the participants represented stakeholders in National Mapping Authorities, software development and research. The investigations proved the stability and quality of evaluated imaging systems with respect to radiometry and optical system. The first new-generation methods for reflectance calibration and equalization of photogrammetric image block data provided promising accuracy and were also functional from the productivity and usability points of view. The reflectance calibration methods provided up to 5% accuracy without any ground reference. Application oriented results indicated that automatic interpretation methods will benefit from the optimal use of radiometrically accurate multi-view photogrammetric imagery.

  6. A new methodology for in-flight radiometric calibration of the MIVIS imaging sensor

    Directory of Open Access Journals (Sweden)

    G. Lechi

    2006-06-01

    Full Text Available Sensor radiometric calibration is of great importance in computing physical values of radiance of the investigated targets, but often airborne scanners are not equipped with any in-flight radiometric calibration facility. Consequently, the radiometric calibration or airborne systems usually relies only on pre-flight and vicarious calibration or on indirect approaches. This paper introduces an experimental approach that makes use of on-board calibration techniques to perform the radiometric calibration of the CNR’s MIVIS (Multispectral Infrared and Visible Imaging Spectrometer airborne scanner. This approach relies on the use of an experimental optical test bench originally designed at Politecnico di Milano University (Italy, called MIVIS Flying Test Bench (MFTB, to perform the first On-The-Fly (OTF calibration of the MIVIS reflective spectral bands. The main task of this study is to estimate how large are the effects introduced by aircraft motion (e.g., e.m. noise or vibrations and by environment conditions (e.g., environment temperature on the radiance values measured by the MIVIS sensor during the fly. This paper describes the first attempt to perform an On-The-Fly (OTF calibration of the MIVIS reflective spectral bands (ranging from 430 nm to 2.500 nm. Analysis of results seems to point out limitations of traditional radiometric calibration methodology based only on pre-flight approaches, with important implications for data quality assessment.

  7. Oxide nanoparticle EUV resists: toward understanding the mechanism of positive and negative tone patterning

    KAUST Repository

    Chakrabarty, Souvik

    2013-04-01

    DUV, EUV and e-beam patterning of hybrid nanoparticle photoresists have been reported previously by Ober and coworkers. The present work explores the underlying mechanism that is responsible for the dual tone patterning capability of these photoresist materials. Spectroscopic results correlated with mass loss and dissolution studies suggest a ligand exchange mechanism responsible for altering the solubility between the exposed and unexposed regions. © 2013 SPIE.

  8. Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization

    Energy Technology Data Exchange (ETDEWEB)

    Jiang, Hui, E-mail: jianghui@sinap.ac.cn [Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Zhangheng Road 239, Pudong District, Shanghai 201204 (China); King' s College London, Department of Physics, Strand, London WC2R 2LS (United Kingdom); Michette, Alan G. [King' s College London, Department of Physics, Strand, London WC2R 2LS (United Kingdom)

    2013-03-01

    A robust design idea for broadband EUV multilayer beam splitters is introduced that achieves the aim of decreasing the influence of layer thickness errors on optical performances. Such beam splitters can be used in interferometry to determine the quality of EUVL masks by comparing with a reference multilayer. In the optimization, particle swarm techniques were used for the first time in such designs. Compared to conventional genetic algorithms, particle swarm optimization has stronger ergodicity, simpler processing and faster convergence.

  9. Stellar and Laboratory XUV/EUV Line Ratios in Fe XVIII and Fe XIX

    Science.gov (United States)

    Träbert, Elmar; Beiersdorfer, P.; Clementson, J.

    2011-09-01

    A so-called XUV excess has been suspected with the relative fluxes of Fe XVIII and Fe XIX lines in XUV and EUV spectra of the star Capella as observed by the Chandra spacecraft [1] when comparing the observations with simulations of stellar spectra based on APEC or FAC. We have addressed this problem by laboratory studies using the Livermore electron beam ion trap (EBIT). Our understanding of the EBIT spectrum is founded on work by Brown et al. [2]. The electron density of the electron beam in an EBIT is compatible to the density in energetic stellar flares. In our experiments, the relative detection efficiencies of two flat-field grating spectrographs operating in the EUV (near 100 Å) and XUV (near 16 Å) ranges have been determined using the calculated branching ratio of 1-3 and 2-3 transition in the H-like spectrum O VIII. FAC calculations assuming several electron beam energies and electron densities serve to correct the EBIT observations for the Maxwellian excitation in a natural plasma. In the EUV, the line intensity pattern predicted by FAC agrees reasonably well with the laboratory and Capella observations. In the XUV wavelength range, agreement of laboratory and astrophysical line intensities is patchy. The spectral simulation results from FAC are much closer to stellar and laboratory observation than those obtained by APEC. Instead of claiming an XUV excess, the XUV/EUV line intensities can be explained by a somewhat higher temperature of Capella than the previously assumed T=6 MK. This work was performed under the auspices of the USDoE by LLNL under Contract DE-AC52-07NA27344 and was supported by the NASA under work order NNH07AF81I issued by the APRA Program. E.T. acknowledges support by DFG Germany. 1. P. Desai et al., ApJ 625, L59 (2005). 2. G. V. Brown et al., ApJS 140, 589 (2002).

  10. Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposure

    Science.gov (United States)

    Pollentier, Ivan; Vesters, Yannick; Jiang, Jing; Vanelderen, Pieter; de Simone, Danilo

    2017-10-01

    The interaction of 91.6eV EUV photons with photoresist is very different to that of optical lithography at DUV wavelength. The latter is understood quite well and it is known that photons interact with the resist in a molecular way through the photoacid generator (PAG) of the chemically amplified resist (CAR). In EUV however, the high energy photons interact with the matter on atomic scale, resulting in the generation of secondary electrons. It is believed that these secondary electrons in their turn are responsible in chemical modification and lead to switching reactions that enable resist local dissolution. However, details of the interaction are still unclear, e.g. which reaction an electron with a given energy can initiate. In this work we have introduced a method to measure the chemical interaction of the secondary electrons with the EUV resist. The method is based on electron gun exposures of low energy electrons (range 1eV to 80eV) in the photoresist. The chemical interaction is then measured by Residual Gas Analysis (RGA), which can analyze out of the outgassing which and how much reaction products are generated. In this way a `chemical yield' can be quantified as function of electron energy. This method has been successfully applied to understand the interaction of secondary electrons on the traditional CAR materials. The understanding was facilitated by testing different compositions of an advanced EUV CAR, where resp. polymer only, polymer+PAG, and polymer+PAG+quencher are tested with the electron gun. It was found that low energy electrons down to 3-4eV can activate PAG dissociation, which can lead to polymer deprotection. However it was observed too that energy electrons of 12eV and higher can do direct deprotection even in absence of the PAG. In addition, testing suggests that electrons can generate also other chemical changes on the polymer chain that could lead to cross-linking.

  11. Laser-plasma SXR/EUV sources: adjustment of radiation parameters for specific applications

    Science.gov (United States)

    Bartnik, A.; Fiedorowicz, H.; Fok, T.; Jarocki, R.; Kostecki, J.; Szczurek, A.; Szczurek, M.; Wachulak, P.; Wegrzyński, Ł.

    2014-12-01

    In this work soft X-ray (SXR) and extreme ultraviolet (EUV) laser-produced plasma (LPP) sources employing Nd:YAG laser systems of different parameters are presented. First of them is a 10-Hz EUV source, based on a double-stream gaspuff target, irradiated with the 3-ns/0.8J laser pulse. In the second one a 10 ns/10 J/10 Hz laser system is employed and the third one utilizes the laser system with the pulse shorten to approximately 1 ns. Using various gases in the gas puff targets it is possible to obtain intense radiation in different wavelength ranges. This way intense continuous radiation in a wide spectral range as well as quasi-monochromatic radiation was produced. To obtain high EUV or SXR fluence the radiation was focused using three types of grazing incidence collectors and a multilayer Mo/Si collector. First of them is a multfoil gold plated collector consisted of two orthogonal stacks of ellipsoidal mirrors forming a double-focusing device. The second one is the ellipsoidal collector being part of the axisymmetrical ellipsoidal surface. Third of the collectors is composed of two aligned axisymmetrical paraboloidal mirrors optimized for focusing of SXR radiation. The last collector is an off-axis ellipsoidal multilayer Mo/Si mirror allowing for efficient focusing of the radiation in the spectral region centered at λ = 13.5 ± 0.5 nm. In this paper spectra of unaltered EUV or SXR radiation produced in different LPP source configurations together with spectra and fluence values of focused radiation are presented. Specific configurations of the sources were assigned to various applications.

  12. Photoresist shrinkage effects in 16 nm node extreme ultraviolet (EUV) photoresist targets

    Science.gov (United States)

    Bunday, Benjamin; Montgomery, Cecilia; Montgomery, Warren; Cepler, Aron

    2013-04-01

    Photoresist shrinkage (i.e., line slimming) is an important systematic uncertainty source in critical dimension-scanning electron microscope (CD-SEM) metrology of lithographic features [1] [2] [3] [4] [5]. It influences both the precision and the accuracy of CD-SEM measurements, while locally damaging the sample. Minimization or elimination of shrinkage is desirable, yet elusive. This error source will be a factor in CD-SEM metrology on polymer materials in EUV lithography. Recent work has demonstrated improved understanding of the trends in the shrinkage response depending on electron beam and target parameters in static measurements [2] [3] [4] [5] [6]. Some research has highlighted a second mode of shrinkage that is apparent over time and progresses as a function of time between consecutive measurements, a form of "dynamic shrinkage" that appears to be activated by electron beam, in which the activated feature perpetually and logarithmically shrinks [7] [8]. Another work has demonstrated that as pitches continue to get smaller with resulting reductions in spaces between lines, charging may emerge as an additional, competing, unpredictable error source for CD-SEM metrology on dense photoresist features, an issue that is predicted to become more common as these spaces become more confined [9]. In this work, we explore the static shrinkage behaviors of various EUV photoresists into the 16 nm half-pitch node, with samples generated using the advanced EUV lithography capable of generating such tight pitches [10]. Dynamic shrinkage behavior was explored on these materials last year [15]. The static shrinkage behaviors will be validated to show compliance with the SEMATECH shrinkage model [5] [6] on small EUV resist features. Using the results of the model fits, a simulation study will predict the shrinkage trends at future nodes. Further studies will confirm whether or not charging phenomena are observable, and the beginning of a charging simulation study will be

  13. Photon flux requirements for EUV reticle imaging microscopy in the 22 and 16 nm nodes

    Energy Technology Data Exchange (ETDEWEB)

    Wintz, D.; Goldberg, K. A.; Mochi, I.; Huh, S.

    2010-03-12

    EUV-wavelength actinic microscopy yields detailed information about EUV mask patterns, architectures, defects, and the performance of defect repair strategies, without the complications of photoresist imaging. The measured aerial image intensity profiles provide valuable feedback to improve mask and lithography system modeling methods. In order to understand the photon-flux-dependent pattern measurement limits of EUV mask-imaging microscopy, we have investigated the effects of shot noise on aerial image linewidth measurements for lines in the 22 and 16-nm generations. Using a simple model of image formation near the resolution limit, we probe the influence of photon shot noise on the measured, apparent line roughness. With this methodology, we arrive at general flux density requirements independent of the specific EUV microscope configurations. Analytical and statistical analysis of aerial image simulations in the 22 and 16-nm generations reveal the trade-offs between photon energy density (controllable with exposure time), effective pixel dimension on the CCO (controlled by the microscope's magnification ratio), and image log slope (ILS). We find that shot-noise-induced linewidth roughness (LWR) varies imersely with the square root of the photon energy density, and is proportional to the imaging magnification ratio. While high magnification is necessary for adequate spatial resolution, for a given flux density, higher magnification ratios have diminishing benefits. With practical imaging parameters, we find that in order to achieve an LWR (3{sigma}) value of 5% of linewidth for dense, 88-nm mask features with 80% aerial image contrast and 13.5-nm effective pixel width (1000x magnification ratio), a peak photon flux of approximately 1400 photons per pixel per exposure is required.

  14. Modeling and optimization of mass-limited targets for EUV lithography

    Science.gov (United States)

    Sizyuk, T.; Hassanein, A.

    2012-03-01

    Current challenges in the development of efficient laser produced plasma (LPP) sources for EUV lithography are increasing EUV power at IF and maximizing lifetime and therefore, reducing cost of devices. Mass-limited targets such as small tin droplets are considered among the best choices for cleaner operation of the optical system because of lower mass of atomic debris produced by the laser beam. The small diameter of droplets, however, decreases the conversion efficiency (CE) of EUV photons emission, especially in the case of CO2 laser, where laser wavelength has high reflectivity from the tin surface. We investigated ways of improving CE in mass-limited targets. We considered in our modeling various possible target phases and lasers configurations: from solid/liquid droplets subjected to laser beam energy with different intensities and laser wavelength to dual-beam lasers, i.e., a pre-pulse followed by a main pulse with adjusted delay time in between. We studied the dependence of vapor expansion rate, which can be produced as a result of droplet heating by pre-pulse laser energy, on target configuration, size, and laser beam parameters. As consequence, we studied the influence of these conditions and parameters on the CE and debris mass accumulation. For better understanding and more accurate modeling of all physical processes occurred during various phases of laser beam/target interactions, plasma plume formation and evolution, EUV photons emission and collection, we have implemented in our HEIGHTS package state-of-the art models and methods, verified, and benchmarked against laboratory experiments in our CMUXE center as well as various worldwide experimental results.

  15. Coefficient of thermal expansion (CTE) in EUV lithography: LER and adhesion improvement

    Science.gov (United States)

    Higgins, Craig; Settens, Charles; Wolfe, Patricia; Petrillo, Karen; Auger, Robert; Matyi, Richard; Brainard, Robert

    2011-04-01

    Spin-on underlayers are currently being employed by the lithographic industry to improve the imaging performance of EUV resists. In this work, multiple examples have shown improved line-edge roughness (LER) of an open-source resist using new open-source underlayers in comparison to a primed silicon substrate. Additionally, several experiments demonstrate better resist adhesion on underlayers that have lower coefficients of thermal expansion (CTE). Both organic and inorganic underlayers provide better resist LER when their CTE is lower.

  16. Influence of pressure on ion energy distribution functions in EUV-induced hydrogen plasmas

    Science.gov (United States)

    van de Ven, T. H. M.; Reefman, P.; de Meijere, C. A.; Banine, V. Y.; Beckers, J.

    2016-09-01

    Next-generation lithography tools currently use Extreme Ultraviolet (EUV) radiation to create even smaller features on computer chips. The high energy photons (92 eV) induce a plasma in the low pressure background gas by photoionization. Industries have realized that these plasmas are of significant importance with respect to machine lifetime because impacting ions affect exposed surfaces. The mass resolved ion energy distribution function (IEDF) is therefore one of the main plasma parameters of interest. In this research an ion mass spectrometer is used to investigate IEDFs of ions impacting on surfaces in EUV-induced plasmas. EUV radiation is focused into a vessel with a low pressure hydrogen environment. Here, photoionization creates free electrons with energies up to 76 eV, which further ionize the background gas. The influence of the pressure on plasma composition and IEDFs has been investigated in the range 0.1-10 Pa. In general the ion fluxes towards the surface increase with pressure. However, above 5 Pa the flux of H2+ is not affected by the increase in pressure due to the balance between the creation of H2+ and the conversion of H2+ to H3+. These results will be used to benchmark plasma scaling models and verify numerical simulations.

  17. Testing the Interstellar Wind Helium Flow Direction with Galileo Euvs Data

    Science.gov (United States)

    Pryor, W. R.; Simmons, K. E.; Ajello, J. M.; Tobiska, W. K.; Retherford, K. D.; Stern, S. A.; Feldman, P. D.; Frisch, P. C.; Bzowski, M.; Grava, C.

    2014-12-01

    Forty years of measurements of the flow of interstellar helium through the heliosphere suggest that variations of the flow direction with time are possible. We will model Galileo Extreme Ultraviolet Spectrometer (EUVS) data to determine the best-fitting flow direction and compare it to values obtained by other spacecraft. The Galileo EUVS (Hord et al., 1992) was mounted on the spinning part of the spacecraft and obtained interstellar wind hydrogen Lyman-alpha 121.6 nm and helium 58.4 nm data on great circles passing near the ecliptic poles during the interplanetary cruise phase of the mission and also during the Jupiter orbital phase of the mission. The Galileo hydrogen cruise data have been previously published (Hord et al., 1991, Pryor et al., 1992; 1996; 2001), but the helium data have not. Our model was previously used by Ajello et al., 1978, 1979 to model Mariner 10 interstellar wind helium data, and by Stern et al., 2012 and Feldman et al., 2012 to model the interplanetary helium background near the moon in Lunar Reconnaissance Orbiter (LRO) Lyman-alpha Mapping Project (LAMP) data. The model has been updated to include recent determinations of daily helium 58.4 nm solar flux variations and helium losses due to EUV photoionization and electron impact ionization.

  18. Curved focal plane extreme ultraviolet detector array for a EUV camera on CHANG E lander.

    Science.gov (United States)

    Ni, Q; Song, K; Liu, S; He, L; Chen, B; Yu, W

    2015-11-30

    A novel curved focal plane extreme ultraviolet (EUV) detector array designed for a moon-based EUV camera is demonstrated. The curved focal plane detector array operating in a pulse-counting mode consists of a curved microchannel plate (MCP) stack and an induced charge wedge-strip anode (WSA). The curved MCP is fabricated by firstly thermally slumping of the MCPs, and then followed by optical polishing and core glass etching. By using this technology, curved MCPs with a length-to-diameter (L/D) ratio of 80:1 and a radius of curvature of 150 mm have been successfully achieved. The performance of the curved MCP detector is fully characterized in terms of the background noise, pulse height distribution, gain, image linearity and spatial resolution. It is measured that a spatial resolution of 7.13 lp/mm can be achieved with a background noise of less than 0.3 counts/cm2⋅s. The characterization results indicate that the curved focal plane detector can fulfill the requirements of the moon-based EUV camera.

  19. EUV mask blank defect inspection strategies for 32-nm half-pitch and beyond

    Science.gov (United States)

    Wurm, Stefan; Han, Hakseung; Kearney, Patrick; Cho, Wonil; Jeon, Chan-Uk; Gullikson, Eric

    2007-05-01

    The availability of defect-free masks remains one of the key challenges for inserting extreme ultraviolet lithography (EUVL) into manufacturing. Evidently, the success of the industry's mask blank defect reduction effort will critically depend on the timely availability of defect inspection tools that can find ever smaller defects. The first generation of defect inspection tools enabled SEMATECH's Mask Blank Development Center (MBDC) to reduce mask blank defects to a level sufficient for use in EUV alpha tools. The second tool generation is currently enabling the MBDC to meet EUV pilot line requirements by the end of 2007. However, to meet high volume manufacturing (HVM) mask blank defect requirements for 32 nm half-pitch (hp) patterning, the industry needs a third generation of defect inspection tools. This next EUV inspection tool generation must be able to find defects of tools will also need to support extendibility assessments of low defect deposition technologies and the associated infrastructure towards meeting 22 nm half-pitch defect specifications. While visible light inspection is likely to support defect inspection needs for mask substrates over several technology nodes, the industry must explore other options for mask blanks and patterned masks. Evaluating the use of inexpensive printing tools and wafer-based inspection to search for repeating defects must be part of an overall strategy to address mask blank and patterned mask defect inspection.

  20. EUV emission stimulated by use of dual laser pulses from continus liquid microjet targets

    Science.gov (United States)

    Higashiguchi, Takeshi; Rajyaguru, Chirag; Sasaki, Wataru; Kubodera, Shoichi

    2004-11-01

    A continuous water-jet or water-jet mixed with LiF with several tens μm diameter was formed in a vacuum chamber through a small capillary nozzle. Usage of two laser pulses is an efficient way to produce EUV emission, since a density and temperature of a plasma formed by the first laser pulse are regulated by the second laser pulse. By adjusting the delay of the second pulse, one could maximize the EUV emission. A subpicosecond Ti:Sapphire laser at a wavelength of 800 nm produced a maximum energy around 30 mJ. The beam was divided by a Michelson interferometer, which produced two laser pulses with energies of 5 mJ. The pulse duration was adjusted around 300 fs (FWHM). Both beams were focused on a micro-jet using a lens with a focal length of 15 cm. The delay time between the two pulses was varied from 100 to 800 ps by use of an optical delay line. Clear enhancement of the EUV emission yield was observed when the delay between the two pulses was around 500 ps. The experimentally observed delay agrees reasonably well with that of a plasma to expand to its critical density of 10^21 cm-3.

  1. Background pressure effects on EUV source efficiency and produced debris characteristics

    Science.gov (United States)

    Sizyuk, Tatyana

    2017-03-01

    The cost of future computer chips, among other things, will depend on the performance of EUV sources and on the duration of the efficient operation and lifetime of nanolithography devices. While the efficiency of the sources is continuously being improved, their operational cycle is still highly restricted due to optical mirrors degradation as well as necessity of cleaning chamber environment and components. One of the potential problems of EUV sources for high volume manufacture (HVM) regimes can be related to the contamination of chamber environment by products of preceding laser pulse/droplet interactions. Implementation of high, 100 kHz and higher, repetition rate of devices for Sn droplets and laser pulses generation can cause high accumulation of tin in the chamber in the form of vapor/clusters. Possible tin accumulation in the chamber in dependence on laser parameters and mitigation system efficiency was evaluated. Then, the effects of various pressures of tin vapor on the CO2 and Nd:YAG laser beams propagation and on the size, the intensity, and the efficiency of EUV sources produced were studied.

  2. Study of the early phase of a Coronal Mass Ejection driven shock in EUV images

    Science.gov (United States)

    Frassati, Federica; Susino, Roberto; Mancuso, Salvatore; Bemporad, Alessandro

    2017-10-01

    The November 1st, 2014 prominence eruption (associated with a C2.7 class flare) resulted in a fast, partial-halo Coronal Mass Ejection (CME). During its early propagation, the CME produced a type II radio burst (seen by the Bruny Island Radio Spectrometer) starting around 04:57 UT when the front entered into the LASCO/C2 field of view (FOV) and the top of the CME front was at the heliocentric distance of about 2.5 R_{⊙}. In order to identify the source of the type II radio burst, we studied the kinematic of the eruption with EUV images acquired by SDO/AIA. Profiles of the observed EUV front speed have been compared with the Alfvén speed profiles derived by combining the plasma electron densities obtained from Emission Measure analysis and model magnetic fields extrapolated on the plane of the sky. Our results show that the northern half of the front became super-Alfvénic at approximately the same time when the type-II radio burst started. A comparison between the starting frequency of the type II emission and the frequencies corresponding to the coronal densities of the locations where the EUV front became super-Alfvénic suggests that the radio sources should be located in the northern flank of the front.

  3. 4-D modeling of CME expansion and EUV dimming observed with STEREO/EUVI

    Directory of Open Access Journals (Sweden)

    M. J. Aschwanden

    2009-08-01

    Full Text Available This is the first attempt to model the kinematics of a CME launch and the resulting EUV dimming quantitatively with a self-consistent model. Our 4-D-model assumes self-similar expansion of a spherical CME geometry that consists of a CME front with density compression and a cavity with density rarefaction, satisfying mass conservation of the total CME and swept-up corona. The model contains 14 free parameters and is fitted to the 25 March 2008 CME event observed with STEREO/A and B. Our model is able to reproduce the observed CME expansion and related EUV dimming during the initial phase from 18:30 UT to 19:00 UT. The CME kinematics can be characterized by a constant acceleration (i.e., a constant magnetic driving force. While the observations of EUVI/A are consistent with a spherical bubble geometry, we detect significant asymmetries and density inhomogeneities with EUVI/B. This new forward-modeling method demonstrates how the observed EUV dimming can be used to model physical parameters of the CME source region, the CME geometry, and CME kinematics.

  4. Performance assessment of the TDRSS Onboard Navigation System (TONS) experiment on EP/EUVE

    Science.gov (United States)

    Gramling, C. J.; Hart, R. C.; Teles, Jerome; Long, A. C.; Maher, M. J.

    1993-01-01

    The National Aeronautics and Space Administration (NASA) Goddard Space Flight Center (GSFC) is currently developing an operational Tracking and Data Relay Satellite (TDRS) System (TDRSS) Onboard Navigation System (TONS) to provide onboard knowledge of high-accuracy navigation products autonomously to users of TDRSS and its successor, TDRS-2. A TONS experiment has been implemented on the Explorer Platform/Extreme Ultraviolet Explorer (EP/EUVE) spacecraft, launched June 7, 1992, to flight qualify the TONS operational system using TDRSS forward-link communications services. This paper assesses the performance of the TONS flight hardware, an ultrastable oscillator (USO) and Doppler extractor (DE) card in one of the TDRSS user transponders, and the protoype flight software, based on the TONS experiment results. An overview of onboard navigation via TDRSS is also presented for both the EP/EUVE experiment and for future users of TONS. USO and DE short-term and long-term stability performance has been excellent. TONS Flight Software analysis indicates that position accuracies of better than 25 meters root-mean-square are achievable with tracking every one to two orbits, for the EP/EUVE 525-kilometer altitudes, 28.5-degree inclination orbit. The success of the TONS experiment demonstrates the flight readiness of TONS, which is scheduled to provide autonomous navigation for the Earth Observing System (EOS)-AM mission.

  5. Identification of Worldwide Optimal Pseudo-Invariant Calibration Sites for Post-Launch Radiometric Calibration of Earth Observation Satellite Sensors

    Science.gov (United States)

    Basnet, Bikash

    The primary objective of this project was to identify extremely stable sites on the Earth's surface known as Pseudo-Invariant Calibration Sites (PICS). A recently developed technique for monitoring the long term stability of earth observing satellite sensors was based on using PICS for detecting trends in the radiometric response of these instruments. In a manner analogous to using a known reflectance or radiance source in a laboratory, this method relied on the stability of the Earth's surface over time. To perform this task, the Landsat 5 Thematic Mapper (TM) sensor was used to identify the most invariant locations or PICS on the Earth's surface by monitoring the temporal stability of carefully selected ground sites on Earth. Ground sites were selected to ensure minimal surface and atmosphere change that could affect the observed reflectance, thus enabling a means to monitor the radiometric stability of space instruments. PICS mainly consist of playa (dry lakebeds), salt flats and desert sand sites located in arid regions with low probability of cloud cover, spatial homogeneity, constant surface spectral reflectance and BRDF over short and long periods of time. Potential PICS were evaluated and chosen for the study based upon their size, location, climate characteristics, and scene availability in the USGS data archive. A grid-based approach was used to determine and recommend the areas of each PICS that was considered most invariant. This approach relied on the PICS min-noise algorithm developed recently at SDSU, where the mean radiance of each grid was calculated for each scene and the grid with lowest temporal standard deviation of the mean was considered as most invariant. The Levene Test of equality of variance was used to optimize the size of worldwide PICS, and uncertainties using those optimal locations were calculated for comparison. A catalog of recommended sites was developed: seven in the Sahara Desert and one each in North America, South America

  6. Evaluation of the Radiometric Integrity of LANDSAT-4 Thematic Mapper Band 6 Data

    Science.gov (United States)

    Schott, J. R.

    1984-01-01

    An approach for experimentally evaluating the radiometric calibration of the LANDSAT-4 band 6 data is described which draws on a method used to radiometrically calibrate the HCMR data which involved underflying the satellite with an infrared line scanner. By extending this technology to higher altitudes experimental radiance data suitable for radiometric calibration of the TM band 6 sensor can be generated. Repetition of this experiment can permit evaluation of long term drift in the sensor and provide a data base for evaluating atmospheric propagation models for radiation transfer. To date, efforts were concentrated on modifying the infrared line scanner to match the spectral response of the TM band 6 sensor. In addition, the LOWTRAN code corresponding to a satellite overpass of September 1982 was run to yield a plot of transmission and path radiance as a function of altitude.

  7. Detecting payload performance based on relative radiometric characteristic: case of the optical sensors

    Science.gov (United States)

    Han, Jie; Li, Shengyang; Zhang, Tao; Qin, Bangyong

    2016-10-01

    In this paper, we propose a novel algorithm for accurately estimating the degree of radiometric non-uniformity in remote sensing images. The algorithm was tested on high-quality images and heavily striping images, and quantitative analyses were conducted to evaluate the performance for each band by measuring the radiometric non-uniformity of the images. The results demonstrated that the proposed algorithm exhibits high accuracy and stability compared with traditional algorithms. The radiometric performance of TianGong-1 short-wave infrared images was calculated using this new method, and it was highly correlated with the solar angle, pitch angle and refrigerator thermal according to the Apriori algorithm. Based on these results, we have proposed a strategy for restricting increases in striping.

  8. Radiometric Calibration of Mars HiRISE High Resolution Imagery Based on Fpga

    Science.gov (United States)

    Hou, Yifan; Geng, Xun; Xing, Shuai; Tang, Yonghe; Xu, Qing

    2016-06-01

    Due to the large data amount of HiRISE imagery, traditional radiometric calibration method is not able to meet the fast processing requirements. To solve this problem, a radiometric calibration system of HiRISE imagery based on field program gate array (FPGA) is designed. The montage gap between two channels caused by gray inconsistency is removed through histogram matching. The calibration system is composed of FPGA and DSP, which makes full use of the parallel processing ability of FPGA and fast computation as well as flexible control characteristic of DSP. Experimental results show that the designed system consumes less hardware resources and the real-time processing ability of radiometric calibration of HiRISE imagery is improved.

  9. Radiometric survey in mammography: problems and challenges; Levantamento radiometrico em mamografia: problemas e desafios

    Energy Technology Data Exchange (ETDEWEB)

    Navarro, M.V.T.; Navarro, V.C.C.; Garcia, I.F.M.; Ferreira, M.J.; Macedo, E.M., E-mail: navarro@ifba.edu.br [Instituto Federal da Bahia (LABPROSAUD/IFBA), Salvador, BA (Brazil). Laboratorio de Produtos para a Saude

    2015-07-01

    In addition to being mandatory, the radiometric survey is a necessity, especially in the Brazilian reality with the construction of smaller and smaller rooms. However, calibration conditions, the instrumentation and its use, can produce underestimated factors. Measures made at Labprosaud/IFBA, with five different instruments and the ISO N 25 radiation quality, show the possibility of the values presented in the radiometric surveys are underestimated by up to 10 times. The results indicate the need for meters to be calibrated in ISO N qualities, in mammography energy range, in integrated dose mode and exposure times shorter or equal to 1 s. (author)

  10. Radiometric-microbiologic assay of niacin using Kloeckera brevis: analysis of human blood and food

    Energy Technology Data Exchange (ETDEWEB)

    Guilarte, T.R.; Pravlik, K.

    1983-12-01

    Kloeckera brevis, a yeast, was used as the test organism for the development of a radiometric-microbiologic (RMA) assay for niacin. The assay was determined to be sensitive to the 2 ng niacin per vial level and specific for the biologically active forms of this vitamin. The method was shown to be simple, accurate, and precise in the analysis of niacin in human blood and food. The application of the radiometric technique eliminates some of the problems encountered with conventional turbidimetric-microbiologic assay.

  11. Applications of compact laser-driven EUV/XUV plasma sources

    Science.gov (United States)

    Barkusky, Frank; Bayer, Armin; Döring, Stefan; Flöter, Bernhard; Großmann, Peter; Peth, Christian; Reese, Michael; Mann, Klaus

    2009-05-01

    In recent years, technological developments in the area of extreme ultraviolet lithography (EUVL) have experienced great improvements. So far, intense light sources based on discharge or laser plasmas, beam steering and imaging optics as well as sensitive detectors are available. Currently, applications of EUV radiation apart from microlithography, such as metrology, high-resolution microscopy, or surface analysis come more and more into focus. In this contribution we present an overview on the EUV/XUV activities of the Laser-Laboratorium Göttingen based on table-top laser-produced plasma (LPP) sources. As target materials gaseous or liquid jets of noble gases or solid Gold are employed. Depending on the applications, the very clean but low intense gaseous targets are mainly used for metrology, whereas the targets for high brilliances (liquid, solid) are used for microscopy and direct structuring. For the determination of interaction mechanisms between EUV radiation and matter, currently the solid Gold target is used. In order to obtain a small focal spot resulting in high EUV fluence, a modified Schwarzschild objective consisting of two spherical mirrors with Mo/Si multilayer coatings is adapted to this source. By demagnified (10x) imaging of the Au plasma an EUV spot of 3 μm diameter with a maximum energy density of ~1.3 J/cm2 is generated (pulse duration 8.8 ns). First applications of this integrated source and optics system reveal its potential for high-resolution modification and direct structuring of solid surfaces. For chemical analysis of various samples a NEXAFS setup was developed. It consists of a LPP, using gaseous Krypton as a broadband emitter in the water-window range, as well as a flat field spectrograph. The laboratory system is set to the XUV spectral range around the carbon K-edge (4.4 nm). The table-top setup allows measurements with spectral accuracy comparable to synchrotron experiments. NEXAFS-experiments in transmission and reflection are

  12. Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system

    Science.gov (United States)

    Shimomura, Takeya; Kawashima, Satoshi; Inazuki, Yuichi; Abe, Tsukasa; Takikawa, Tadahiko; Mohri, Hiroshi; Hayashi, Naoya; Wang, Fei; Ma, Long Eric; Zhao, Yan; Kuan, Chiyan; Xiao, Hong; Jau, Jack

    2011-04-01

    Fabrication of defect free EUV masks including their inspection is the most critical challenge for implementing EUV lithography into semiconductor high volume manufacturing (HVM) beyond 22nm half-pitch (HP) node. The contact to bit-line (CB) layers of NAND flash devices are the most likely the first lithography layers that EUV will be employed for manufacturing due to the aggressive scaling and the difficulty for making the pattern with the current ArF lithography. To assure the defect free EUV mask, we have evaluated electron beam inspection (EBI) system eXplore™ 5200 developed by Hermes Microvision, Inc. (HMI) [1]. As one knows, the main issue of EBI system is the low throughput. To solve this challenge, a function called Lightning Scan™ mode has been recently developed and installed in the system, which allows the system to only inspect the pattern areas while ignoring blanket areas, thus dramatically reduced the overhead time and enable us to inspect CB layers of NAND Flash device with much higher throughput. In this present work, we compared the Lightning scan mode with Normal scan mode on sensitivity and throughput. We found out the Lightning scan mode can improve throughput by a factor of 10 without any sacrifices of sensitivity. Furthermore, using the Lightning scan mode, we demonstrated the possibility to fabricate the defect free EUV masks with moderate inspection time.

  13. Texture analysis of radiometric signatures of new sea ice forming in Arctic leads

    Science.gov (United States)

    Eppler, Duane T.; Farmer, L. Dennis

    1991-01-01

    Analysis of 33.6-GHz, high-resolution, passive microwave images suggests that new sea ice accumulating in open leads is characterized by a unique textural signature which can be used to discriminate new ice forming in this environment from adjacent surfaces of similar radiometric temperature. Ten training areas were selected from the data set, three of which consisted entirely of first-year ice, four entirely of multilayer ice, and three of new ice in open leads in the process of freezing. A simple gradient operator was used to characterize the radiometric texture in each training region in terms of the degree to which radiometric gradients are oriented. New ice in leads has a sufficiently high proportion of well-oriented features to distinguish it uniquely from first-year ice and multiyear ice. The predominance of well-oriented features probably reflects physical processes by which new ice accumulates in open leads. Banded structures, which are evident in aerial photographs of new ice, apparently give rise to the radiometric signature observed, in which the trend of brightness temperature gradients is aligned parallel to lead trends. First-year ice and multiyear ice, which have been subjected to a more random growth and process history, lack this banded structure and therefore are characterized by signatures in which well-aligned elements are less dominant.

  14. Radiometric flight results from the HyperSpectral Imager for Climate Science (HySICS)

    Science.gov (United States)

    Kopp, Greg; Smith, Paul; Belting, Chris; Castleman, Zach; Drake, Ginger; Espejo, Joey; Heuerman, Karl; Lanzi, James; Stuchlik, David

    2017-04-01

    Long-term monitoring of the Earth-reflected solar spectrum is necessary for discerning and attributing changes in climate. High radiometric accuracy enables such monitoring over decadal timescales with non-overlapping instruments, and high precision enables trend detection on shorter timescales. The HyperSpectral Imager for Climate Science (HySICS) is a visible and near-infrared spatial/spectral imaging spectrometer intended to ultimately achieve ˜ 0.2 % radiometric accuracies of Earth scenes from space, providing an order-of-magnitude improvement over existing space-based imagers. On-orbit calibrations from measurements of spectral solar irradiances acquired by direct views of the Sun enable radiometric calibrations with superior long-term stability than is currently possible with any manmade spaceflight light source or detector. Solar and lunar observations enable in-flight focal-plane array (FPA) flat-fielding and other instrument calibrations. The HySICS has demonstrated this solar cross-calibration technique for future spaceflight instrumentation via two high-altitude balloon flights. The second of these two flights acquired high-radiometric-accuracy measurements of the ground, clouds, the Earth's limb, and the Moon. Those results and the details of the uncertainty analyses of those flight data are described.

  15. Radiometric Correction of Terrestrial LiDAR Data for Mapping of Harvest Residues Density

    Directory of Open Access Journals (Sweden)

    K. Koenig

    2013-10-01

    Full Text Available In precision agriculture detailed geoinformation on plant and soil properties plays an important role. Laser scanning already has been used to describe in-field variations of plant growth in 3D and over time and can serve as valuable complementary topographic data set for remote sensing, such as deriving soil properties from hyperspectral sensors. In this study full-waveform laser scanning data acquired with a Riegl VZ-400 instrument is used to classify 3D point clouds into post-harvest straw residues and bare soil. A workflow for point cloud based classification is presented using radiometric and geometric point features. A radiometric correction is performed by using a range-correction function f(r, which is derived from lab experiments with a reference target of known reflectance. Thereafter, the corrected signal amplitude and local height features are explored with respect to the target classes. The following procedure includes feature calculation, decision tree analysis, point cloud classification and finally result validation using detailed classified reference RGB images. The classification tree separates the classes of harvest residues and bare soil with an accuracy of 96% by using geometric and radiometric features. The LiDAR-derived harvest residue coverage value of 75% lies in accordance with the image-based reference (coverage of 68%. The results indicate the high potential of radiometric features for natural surface classification, particularly in combination with geometric features.

  16. Radiometric trace analysis of cobalt with diethyldithiocarbamate-35S, or 203Hg

    NARCIS (Netherlands)

    Erkelens, P.C. van

    1962-01-01

    Two radiometric methods for the determination of submugram amounts of cobalt are described. (A) Cobalt is extracted from an ammoniacal solution with a zinc-diethyldithiocarbamate-35S solution in chloroform. Excess reagent and interfering metals are removed with mercury(II) and cyanide. The 35S in

  17. South African initiative for pre-flight radiometric calibration of satellite imagers

    CSIR Research Space (South Africa)

    Griffith, D

    2009-07-01

    Full Text Available or the UUT to the collimated beam coming from the monochromator. m) A mounting region for the UUT. Calibration measurements are automated using LabView. Figure 1: Schematic of Spectral Calibration Bench 3.2. Radiometric Modeling The relative spectral...

  18. Effects of agrochemicals, ultra violet stabilisers and solar radiation on the radiometric properties of greenhouse films

    Directory of Open Access Journals (Sweden)

    Giuliano Vox

    2013-10-01

    Full Text Available Agrochemicals, based on iron, sulphur and chlorine, generate by products that lead to a degradation of greenhouse films together with a decrease in their mechanical and physical properties. The degradation due to agrochemicals depends on their active principles, method and frequency of application, and greenhouse ventilation. The aim of the research was to evaluate how agrochemical contamination and solar radiation influence the radiometric properties of ethylene-vinyl acetate copolymer greenhouse films by means of laboratory and field tests. The films, manufactured on purpose with the addition of different light stabiliser systems, were exposed to natural outdoor weathering at the experimental farm of the University of Bari (Italy; 41° 05’ N in the period from 2006 to 2008. Each film was tested for two low tunnels: one low tunnel was sprayed from inside with the agrochemicals containing iron, chlorine and sulphur while the other one was not sprayed and served as control. Radiometric laboratory tests were carried out on the new films and on samples taken at the end of the trials. The experimental tests showed that both the natural weathering together with the agrochemicals did not modify significantly the radiometric properties of the films in the solar and in the photosynthetically active radiation wavelength range. Within six months of experimental field tests the variations in these radiometric characteristics were at most 10%. Significant variations, up to 70% of the initial value, were recorded for the stabilised films in the long-wave infrared radiation wavelength range.

  19. Adjustments to the MODIS Terra Radiometric Calibration and Polarization Sensitivity in the 2010 Reprocessing

    Science.gov (United States)

    Meister, Gerhard; Franz, Bryan A.

    2011-01-01

    The Moderate-Resolution Imaging Spectroradiometer (MODIS) on NASA s Earth Observing System (EOS) satellite Terra provides global coverage of top-of-atmosphere (TOA) radiances that have been successfully used for terrestrial and atmospheric research. The MODIS Terra ocean color products, however, have been compromised by an inadequate radiometric calibration at the short wavelengths. The Ocean Biology Processing Group (OBPG) at NASA has derived radiometric corrections using ocean color products from the SeaWiFS sensor as truth fields. In the R2010.0 reprocessing, these corrections have been applied to the whole mission life span of 10 years. This paper presents the corrections to the radiometric gains and to the instrument polarization sensitivity, demonstrates the improvement to the Terra ocean color products, and discusses issues that need further investigation. Although the global averages of MODIS Terra ocean color products are now in excellent agreement with those of SeaWiFS and MODIS Aqua, and image quality has been significantly improved, the large corrections applied to the radiometric calibration and polarization sensitivity require additional caution when using the data.

  20. Landsat-8 Operational Land Imager (OLI) radiometric performance on-orbit

    Science.gov (United States)

    Morfitt, Ron; Barsi, Julia A.; Levy, Raviv; Markham, Brian L.; Micijevic, Esad; Ong, Lawrence; Scaramuzza, Pat; Vanderwerff, Kelly

    2015-01-01

    Expectations of the Operational Land Imager (OLI) radiometric performance onboard Landsat-8 have been met or exceeded. The calibration activities that occurred prior to launch provided calibration parameters that enabled ground processing to produce imagery that met most requirements when data were transmitted to the ground. Since launch, calibration updates have improved the image quality even more, so that all requirements are met. These updates range from detector gain coefficients to reduce striping and banding to alignment parameters to improve the geometric accuracy. This paper concentrates on the on-orbit radiometric performance of the OLI, excepting the radiometric calibration performance. Topics discussed in this paper include: signal-to-noise ratios that are an order of magnitude higher than previous Landsat missions; radiometric uniformity that shows little residual banding and striping, and continues to improve; a dynamic range that limits saturation to extremely high radiance levels; extremely stable detectors; slight nonlinearity that is corrected in ground processing; detectors that are stable and 100% operable; and few image artifacts.

  1. New radiometric and petrological constraints on the evolution of the Pichincha volcanic complex (Ecuador)

    NARCIS (Netherlands)

    Robin, Claude; Samaniego, Pablo; Le Pennec, Jean-Luc; Fornari, Michel; Mothes, Patricia; van der Plicht, Johannes; Stix, J.

    2010-01-01

    Fieldwork, radiometric ((40)Ar/(39)Ar and (14)C) ages and whole-rock geochemistry allow a reconstruction of eruptive stages at the active, mainly dacitic, Pichincha Volcanic Complex (PVC), whose eruptions have repeatedly threatened Quito, most recently from 1999 to 2001. After the emplacement of

  2. Application of radioisotopes Au -198 to radiometrical field investigation of spraying machine

    Energy Technology Data Exchange (ETDEWEB)

    Goraczko, W.; Kocorowska, E. [Technical Univeristy, Poznan (Poland). Radio and Photo-Chemistry Department

    1997-10-01

    The poster shows application of radioisotope {sup 198}Au to radiometrical field testing of spraying machine. In the research was tested the Polish suspensioned tractor OZS400 type spraying machine. The machine worked in two different variants: without and with the beam stabilisation (oscillatory stabilisation)

  3. Synergistic effect of EUV from the laser-sustained detonation plasma in a ground-based atomic oxygen simulation on fluorinated polymers

    Science.gov (United States)

    Tagawa, Masahito; Abe, Shingo; Kishida, Kazuhiro; Yokota, Kumiko; Okamoto, Akio

    2009-01-01

    The contribution of extreme ultraviolet (EUV) from a laser-sustained plasma on the mass loss phenomenon of fluorinated polymer in a ground-based laser-detonation atomic oxygen beam source was evaluated. The atomic oxygen beam and EUV from the oxygen plasma were separated by the high-speed chopper wheel installed in the beam source. The mass changes of the fluorinated polymer and polyimide were measured from the frequency shift of the quartz crystal microbalance during the beam exposures. It has been made clear that the fluorinated polymer erodes by EUV exposure alone. In contrast, no erosion was detected for polyimide by EUV alone. The atomic oxygen-induced erosion was measured for both materials even without EUV exposure. However, no strong synergistic effect was observed for a fluorinated polymer even under the simultaneous exposure condition of atomic oxygen and EUV. Similar results were observed even in simultaneous exposure of atomic oxygen (without EUV) and 172 nm vacuum ultraviolet (VUV) from an excimer lamp. These experiments suggest that the primary origin of the accelerated erosion of fluorinated polymer observed in a laser detonation atomic oxygen source is not the EUV from the laser-sustained plasma.

  4. Uncovering New Thermal and Elastic Properties of Nanostructured Materials Using Coherent EUV Light

    Science.gov (United States)

    Hernandez Charpak, Jorge Nicolas

    Advances in nanofabrication have pushed the characteristic dimensions of nanosystems well below 100nm, where physical properties are often significantly different from their bulk counterparts, and accurate models are lacking. Critical technologies such as thermoelectrics for energy harvesting, nanoparticle-mediated thermal therapy, nano-enhanced photovoltaics, and efficient thermal management in integrated circuits depend on our increased understanding of the nanoscale. However, traditional microscopic characterization tools face fundamental limits at the nanoscale. Theoretical efforts to build a fundamental picture of nanoscale thermal dynamics lack experimental validation and still struggle to account for newly reported behaviors. Moreover, precise characterization of the elastic behavior of nanostructured systems is needed for understanding the unique physics that become apparent in small-scale systems, such as thickness-dependent or fabrication-dependent elastic properties. In essence, our ability to fabricate nanosystems has outstripped our ability to understand and characterize them. In my PhD thesis, I present the development and refinement of coherent extreme ultraviolet (EUV) nanometrology, a novel tool used to probe material properties at the intrinsic time- and length-scales of nanoscale dynamics. By extending ultrafast photoacoustic and thermal metrology techniques to very short probing wavelengths using tabletop coherent EUV beams from high-harmonic upconversion (HHG) of femtosecond lasers, coherent EUV nanometrology allows for a new window into nanoscale physics, previously unavailable with traditional techniques. Using this technique, I was able to probe both thermal and acoustic dynamics in nanostructured systems with characteristic dimensions below 50nm with high temporal (sub-ps) and spatial (work is needed for a full theoretical quantitative picture of the experimental results. In other work, I used coherent EUV nanometrology to simultaneously

  5. ANALYZING SPECTRAL CHARACTERISTICS OF SHADOW AREA FROM ADS-40 HIGH RADIOMETRIC RESOLUTION AERIAL IMAGES

    Directory of Open Access Journals (Sweden)

    Y.-T. Hsieh

    2016-06-01

    Full Text Available The shadows in optical remote sensing images are regarded as image nuisances in numerous applications. The classification and interpretation of shadow area in a remote sensing image are a challenge, because of the reduction or total loss of spectral information in those areas. In recent years, airborne multispectral aerial image devices have been developed 12-bit or higher radiometric resolution data, including Leica ADS-40, Intergraph DMC. The increased radiometric resolution of digital imagery provides more radiometric details of potential use in classification or interpretation of land cover of shadow areas. Therefore, the objectives of this study are to analyze the spectral properties of the land cover in the shadow areas by ADS-40 high radiometric resolution aerial images, and to investigate the spectral and vegetation index differences between the various shadow and non-shadow land covers. According to research findings of spectral analysis of ADS-40 image: (i The DN values in shadow area are much lower than in nonshadow area; (ii DN values received from shadowed areas that will also be affected by different land cover, and it shows the possibility of land cover property retrieval as in nonshadow area; (iii The DN values received from shadowed regions decrease in the visible band from short to long wavelengths due to scattering; (iv The shadow area NIR of vegetation category also shows a strong reflection; (v Generally, vegetation indexes (NDVI still have utility to classify the vegetation and non-vegetation in shadow area. The spectral data of high radiometric resolution images (ADS-40 is potential for the extract land cover information of shadow areas.

  6. Enhanced radiometric detection of Mycobacterium paratuberculosis by using filter-concentrated bovine fecal specimens

    Energy Technology Data Exchange (ETDEWEB)

    Collins, M.T.; Kenefick, K.B.; Sockett, D.C.; Lambrecht, R.S.; McDonald, J.; Jorgensen, J.B. (Univ. of Wisconsin, Madison (USA))

    1990-11-01

    A commercial radiometric medium, BACTEC 12B, was modified by addition of mycobactin, egg yolk suspension, and antibiotics (vancomycin, amphotericin B, and nalidixic acid). Decontaminated bovine fecal specimens were filter concentrated by using 3-microns-pore-size, 13-mm-diameter polycarbonate filters, and the entire filter was placed into the radiometric broth. Comparison of the radiometric technique with conventional methods on 603 cattle from 9 Mycobacterium paratuberculosis-infected herds found that of 75 positive specimens, the radiometric technique detected 92% while conventional methods detected 60% (P less than 0.0005). Only 3.9% of radiometric cultures were contaminated. To measure the effect of filter concentration of specimens on the detection rate, 5 cattle with minimal and 5 with moderate ileum histopathology were sampled weekly for 3 weeks. M. paratuberculosis was detected in 33.3% of nonfiltered specimens and 76.7% of filtered specimens (P less than 0.005). Detection rates were directly correlated with the severity of disease, and the advantage of specimen concentration was greatest on fecal specimens from cattle with low-grade infections. Detection times were also correlated with infection severity: 13.4 +/- 5.9 days with smear-positive specimens, 27.9 +/- 8.7 days with feces from cows with typical subclinical infections, and 38.7 +/- 3.8 days with fecal specimens from cows with low-grade infections. Use of a cocktail of vancomycin, amphotericin B, and nalidixic acid for selective suppression of nonmycobacterial contaminants was better than the commercial product PANTA (Becton Dickinson Microbiologic Systems, Towson, Md.) only when specimens contained very low numbers of M. paratuberculosis.

  7. Rapid radiometric methods to detect and differentiate Mycobacterium tuberculosis/M. bovis from other mycobacterial species

    Energy Technology Data Exchange (ETDEWEB)

    Siddiqi, S.H.; Hwangbo, C.C.; Silcox, V.; Good, R.C.; Snider, D.E. Jr.; Middlebrook, G.

    1984-10-01

    Rapid methods for the differentiation of Mycobacterium tuberculosis/M. bovis (TB complex) from other mycobacteria (MOTT bacilli) were developed and evaluated in a three-phase study. In the first phase, techniques for identification of Mycobacterium species were developed by using radiometric technology and BACTEC Middlebrook 7H12 liquid medium. Based on /sup 14/CO/sub 2/ evolution, characteristic growth patterns were established for 13 commonly encountered mycobacterial species. Mycobacteria belonging to the TB complex were differentiated from other mycobacteria by cellular morphology and rate of /sup 14/CO/sub 2/ evolution. For further differentiation, radiometric tests for niacin production and inhibition by Q-nitro-alpha-acetyl amino-beta-hydroxy-propiophenone (NAP) were developed. In the second phase, 100 coded specimens on Lowenstein-Jensen medium were identified as members of the TB complex, MOTT bacilli, bacteria other than mycobacteria, or ''no viable organisms'' within 3 to 12 (average 6.4) days of receipt from the Centers for Disease Control. Isolation and identification of mycobacteria from 20 simulated sputum specimens were carried out in phase III. Out of 20 sputum specimens, 16 contained culturable mycobacteria, and all of the positives were detected by the BACTEC method in an average of 7.3 days. The positive mycobacterial cultures were isolated and identified as TB complex or MOTT bacilli in an average of 12.8 days. The radiometric NAP test was found to be highly sensitive and specific for a rapid identification of TB complex, whereas the radiometric niacin test was found to have some inherent problems. Radiometric BACTEC and conventional methodologies were in complete agreement in Phase II as well as in Phase III.

  8. EUV radiation from pinching discharges of magnetoplasma compressor type and its dependence on the dynamics of compression zone formation

    Science.gov (United States)

    Garkusha, I. E.; Cherednychenko, T. N.; Ladygina, M. S.; Makhlay, V. A.; Petrov, Yu V.; Solyakov, D. G.; Staltsov, V. V.; Yelisyeyev, D. V.; Hassanein, A.

    2014-05-01

    This paper is devoted to the investigation of plasma stream parameters and the intensity of extreme ultraviolet (EUV) radiation from the compression zone in various modes of operation of a magnetoplasma compressor (MPC). Two gases of different masses, either helium or argon, were used for the ignition of MPC discharge under the residual pressure. The plasma stream density along the axis and the EUV radiation energy were measured. It was shown that the compression zone position depends on the initial density of the residual gas. The EUV radiation energy was measured with a calibrated AXUV in the wavelength range of 12.2-15.8 nm. It was revealed that the radiation energy increased by 30-50% with decreasing initial gas pressure.

  9. Mask process correction (MPC) modeling and its application to EUV mask for electron beam mask writer EBM-7000

    Science.gov (United States)

    Kamikubo, Takashi; Ohnishi, Takayuki; Hara, Shigehiro; Anze, Hirohito; Hattori, Yoshiaki; Tamamushi, Shuichi; Bai, Shufeng; Wang, Jen-Shiang; Howell, Rafael; Chen, George; Li, Jiangwei; Tao, Jun; Wiley, Jim; Kurosawa, Terunobu; Saito, Yasuko; Takigawa, Tadahiro

    2010-09-01

    In electron beam writing on EUV mask, it has been reported that CD linearity does not show simple signatures as observed with conventional COG (Cr on Glass) masks because they are caused by scattered electrons form EUV mask itself which comprises stacked heavy metals and thick multi-layers. To resolve this issue, Mask Process Correction (MPC) will be ideally applicable. Every pattern is reshaped in MPC. Therefore, the number of shots would not increase and writing time will be kept within reasonable range. In this paper, MPC is extended to modeling for correction of CD linearity errors on EUV mask. And its effectiveness is verified with simulations and experiments through actual writing test.

  10. EUV high resolution imager on-board solar orbiter: optical design and detector performances

    Science.gov (United States)

    Halain, J. P.; Mazzoli, A.; Rochus, P.; Renotte, E.; Stockman, Y.; Berghmans, D.; BenMoussa, A.; Auchère, F.

    2017-11-01

    The EUV high resolution imager (HRI) channel of the Extreme Ultraviolet Imager (EUI) on-board Solar Orbiter will observe the solar atmospheric layers at 17.4 nm wavelength with a 200 km resolution. The HRI channel is based on a compact two mirrors off-axis design. The spectral selection is obtained by a multilayer coating deposited on the mirrors and by redundant Aluminum filters rejecting the visible and infrared light. The detector is a 2k x 2k array back-thinned silicon CMOS-APS with 10 μm pixel pitch, sensitive in the EUV wavelength range. Due to the instrument compactness and the constraints on the optical design, the channel performance is very sensitive to the manufacturing, alignments and settling errors. A trade-off between two optical layouts was therefore performed to select the final optical design and to improve the mirror mounts. The effect of diffraction by the filter mesh support and by the mirror diffusion has been included in the overall error budget. Manufacturing of mirror and mounts has started and will result in thermo-mechanical validation on the EUI instrument structural and thermal model (STM). Because of the limited channel entrance aperture and consequently the low input flux, the channel performance also relies on the detector EUV sensitivity, readout noise and dynamic range. Based on the characterization of a CMOS-APS back-side detector prototype, showing promising results, the EUI detector has been specified and is under development. These detectors will undergo a qualification program before being tested and integrated on the EUI instrument.

  11. Evaluating Printability of Buried Native EUV Mask Phase Defects through a Modeling and Simulation Approach

    Energy Technology Data Exchange (ETDEWEB)

    Upadhyaya, Mihir; Jindal, Vibhu; Basavalingappa, Adarsh; Herbol, Henry; Harris-Jones, Jenah; Jang, Il-Yong; Goldberg, Kenneth A.; Mochi, Iacopo; Marokkey, Sajan; Demmerle, Wolfgang; Pistor, Thomas V.; Denbeaux, Gregory

    2015-03-16

    The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, it is essential to have a good understanding of the printability of the native EUV mask defects. In this work, we performed a systematic study of native mask defects to understand the defect printability caused by them. The multilayer growth over native substrate mask blank defects was correlated to the multilayer growth over regular-shaped defects having similar profiles in terms of their width and height. To model the multilayer growth over the defects, a novel level-set multilayer growth model was used that took into account the tool deposition conditions of the Veeco Nexus ion beam deposition tool. The same tool was used for performing the actual deposition of the multilayer stack over the characterized native defects, thus ensuring a fair comparison between the actual multilayer growth over native defects, and modeled multilayer growth over regular-shaped defects. Further, the printability of the characterized native defects was studied with the SEMATECH-Berkeley Actinic Inspection Tool (AIT), an EUV mask-imaging microscope at Lawrence Berkeley National Laboratory (LBNL). Printability of the modeled regular-shaped defects, which were propagated up the multilayer stack using level-set growth model was studied using defect printability simulations implementing the waveguide algorithm. Good comparison was observed between AIT and the simulation results, thus demonstrating that multilayer growth over a defect is primarily a function of a defect’s width and height, irrespective of its shape. This would allow us to predict printability of the arbitrarily-shaped native EUV mask defects in a systematic and robust manner.

  12. Dawn-dusk difference of periodic oxygen EUV dayglow variations at Venus observed by Hisaki

    Science.gov (United States)

    Masunaga, Kei; Seki, Kanako; Terada, Naoki; Tsuchiya, Fuminori; Kimura, Tomoki; Yoshioka, Kazuo; Murakami, Go; Yamazaki, Atsushi; Tao, Chihiro; Leblanc, François; Yoshikawa, Ichiro

    2017-08-01

    We report a dawn-dusk difference of periodic variations of oxygen EUV dayglow (OII 83.4 nm, OI 130.4 nm and OI 135.6 nm) in the upper atmosphere of Venus observed by the Hisaki spacecraft in 2015. Observations show that the periodic dayglow variations are mainly controlled by the solar EUV flux. Additionally, we observed characteristic ∼1 day and ∼4 day periodicities in the OI 135.6 nm brightness. The ∼1 day periodicity was dominant on the duskside while the ∼4 day periodicity was dominant on the dawnside. Although the driver of the ∼1 day periodicity is still uncertain, we suggest that the ∼4 day periodicity is caused by gravity waves that propagate from the middle atmosphere. The thermospheric subsolar-antisolar flow and the gravity waves dominantly enhance eddy diffusion on the dawnside, and the eddy diffusion coefficient changes every ∼4 days due to large periodic modulations of wind velocity of the super-rotating atmosphere. Since the ∼4 day modulations on the dawnside are not continuously observed, it is possible that there is an intermittent coupling between the thermosphere and middle atmosphere due to variations of wave source altitudes. Moreover, if there are variations of the wind velocity in the mesosphere or lower thermosphere, it is possible that gravity waves occasionally propagate to the thermosphere even on the duskside due to periodic disappearance of the critical level and the ∼4 day periodic O atomic modulations occur. Thus, our observations imply that the ∼4 day periodicity of the EUV dayglow may reflect the dynamics of the middle atmosphere of Venus. We also examined the effects of the solar wind on the dayglow variations by shifting the solar wind measurements from earth to Venus. We did not find clear correlations between them. However, since there are no local measurements of the solar wind at Venus, the effect of the solar wind on the dayglow is still uncertain.

  13. Development of the negative-tone molecular resists for EB/EUVL having high EUV absorption capacity and molecular design method

    Science.gov (United States)

    Sato, Takashi; Takigawa, Tomoaki; Togashi, Yuta; Toida, Takumi; Echigo, Masatoshi; Harada, Tetsuo; Watanabe, Takeo; Kudo, Hiroto

    2017-10-01

    In this paper, we designed the synthesis of negative-type molecular resist materials for EB and EUVL exposure tools, and their properties were examined. The resist materials for EUVL have been required showing higher sensitivity for high throughput in the lithographic process, and expecting lower shot noise to improve a roughness. In EUVL process, the resist materials must be ionized by absorbing EUV to emit more secondary electrons. The EUV absorption of the synthesized resist materials was measured using their thin films on the silicon wafer, and it was observed that the ratio of EUV absorption of the synthesized resist was higher than in the comparison of that of PHS as a reference., i.e., 2.4 times higher absorption was shown. Furthermore, we examined the relationship between the ratios of EUV absorptions and functional groups of the resist materials. As the result, the sensitivity of resist materials under EUV exposure tool was consistent with their structures.

  14. The Foggy EUV Corona and Coronal Heating by MHD Waves from Explosive Reconnection Events

    Science.gov (United States)

    Moore, Ron L.; Cirtain, Jonathan W.; Falconer, David A.

    2008-01-01

    In 0.5 arcsec/pixel TRACE coronal EUV images, the corona rooted in active regions that are at the limb and are not flaring is seen to consist of (1) a complex array of discrete loops and plumes embedded in (2) a diffuse ambient component that shows no fine structure and gradually fades with height. For each of two not-flaring active regions, found that the diffuse component is (1) approximately isothermal and hydrostatic and (2) emits well over half of the total EUV luminosity of the active-region corona. Here, from a TRACE Fe XII coronal image of another not-flaring active region, the large sunspot active region AR 10652 when it was at the west limb on 30 July 2004, we separate the diffuse component from the discrete loop component by spatial filtering, and find that the diffuse component has about 60% of the total luminosity. If under much higher spatial resolution than that of TRACE (e. g., the 0.1 arcsec/pixel resolution of the Hi-C sounding-rocket experiment proposed by J. W. Cirtain et al), most of the diffuse component remains diffuse rather being resolved into very narrow loops and plumes, this will raise the possibility that the EUV corona in active regions consists of two basically different but comparably luminous components: one being the set of discrete bright loops and plumes and the other being a truly diffuse component filling the space between the discrete loops and plumes. This dichotomy would imply that there are two different but comparably powerful coronal heating mechanisms operating in active regions, one for the distinct loops and plumes and another for the diffuse component. We present a scenario in which (1) each discrete bright loop or plume is a flux tube that was recently reconnected in a burst of reconnection, and (2) the diffuse component is heated by MHD waves that are generated by these reconnection events and by other fine-scale explosive reconnection events, most of which occur in and below the base of the corona where they are

  15. The Development of a New Model of Solar EUV Irradiance Variability

    Science.gov (United States)

    Warren, Harry; Wagner, William J. (Technical Monitor)

    2002-01-01

    The goal of this research project is the development of a new model of solar EUV (Extreme Ultraviolet) irradiance variability. The model is based on combining differential emission measure distributions derived from spatially and spectrally resolved observations of active regions, coronal holes, and the quiet Sun with full-disk solar images. An initial version of this model was developed with earlier funding from NASA. The new version of the model developed with this research grant will incorporate observations from SoHO as well as updated compilations of atomic data. These improvements will make the model calculations much more accurate.

  16. ROSAT EUV and soft X-ray studies of atmospheric composition and structure in G191-B2B

    Science.gov (United States)

    Barstow, M. A.; Fleming, T. A.; Finley, D. S.; Koester, D.; Diamond, C. J.

    1993-01-01

    Previous studies of the hot DA white dwarf GI91-B2B have been unable to determine whether the observed soft X-ray and EUV opacity arises from a stratified hydrogen and helium atmosphere or from the presence of trace metals in the photosphere. New EUV and soft X-ray photometry of this star, made with the ROSAT observatory, when analyzed in conjunction with the earlier data, shows that the stratified models cannot account for the observed fluxes. Consequently, we conclude that trace metals must be a substantial source of opacity in the photosphere of G191-B2B.

  17. Improving Flare Irradiance Models with the Low Pass Filter Relation Between EUV Flare Emissions with Differing Formation Temperatures

    Science.gov (United States)

    Thiemann, Edward M. B.; Eparvier, Francis G.

    2016-10-01

    Solar flares are the result of magnetic reconnection in the solar corona which converts magnetic energy into kinetic energy resulting in the rapid heating of solar plasma. As this plasma cools, extreme ultraviolet (EUV) line emission intensities evolve as the plasma temperature passes through line formation temperatures, resulting in emission lines with cooler formation temperatures peaking after those with hotter formation temperatures. At the 2016 American Astronomical Society Solar Physics Division Meeting in Boulder (SPD2016), we showed that Fe XVIII solar flare light curves are highly correlated with Fe XXIII light curves that have been subjected to the single-pole Low Pass Filter Equation (LPFE) with a time constant equal to the time difference between the peak emissions. The single-pole (or equivalently, RC) LPFE appears frequently in analyses of systems which both store and dissipate heat, and the flare LPFE effect is believed to be related to the underlying cooling processes. Because the LPFE is constrained by a single parameter, this effect has implications for both operational EUV flare irradiance models and understanding thermal processes that occur in post-flare loops. At the time of SPD2016, it was ambiguous as to whether the LPFE effect relates hot thermal bremsstrahlung soft x-ray (SXR) or EUV line emissions with cooler EUV line emissions since Fe XXIII flare light curves are highly correlated with SXR flare light curves. In this study, we present new results characterizing the LPFE relation between multiple emission lines with differing formation temperatures ranging from 107.2 to 105.7 K observed by SDO/EVE and SXR thermal bremsstrahlung emissions observed by GOES/XRS. We show that the LPFE equation relates Fe XVIII with cooler EUV line emissions, providing unambiguous evidence that the LPFE effect exists between EUV line emissions rather than thermal bremsstrahlung and line emissions exclusively. The exact nature of this effect remains an open

  18. Accuracy of Flight Altitude Measured with Low-Cost GNSS, Radar and Barometer Sensors: Implications for Airborne Radiometric Surveys.

    Science.gov (United States)

    Albéri, Matteo; Baldoncini, Marica; Bottardi, Carlo; Chiarelli, Enrico; Fiorentini, Giovanni; Raptis, Kassandra Giulia Cristina; Realini, Eugenio; Reguzzoni, Mirko; Rossi, Lorenzo; Sampietro, Daniele; Strati, Virginia; Mantovani, Fabio

    2017-08-16

    Flight height is a fundamental parameter for correcting the gamma signal produced by terrestrial radionuclides measured during airborne surveys. The frontiers of radiometric measurements with UAV require light and accurate altimeters flying at some 10 m from the ground. We equipped an aircraft with seven altimetric sensors (three low-cost GNSS receivers, one inertial measurement unit, one radar altimeter and two barometers) and analyzed ~3 h of data collected over the sea in the (35-2194) m altitude range. At low altitudes (H barometer calibration as they are affected by a large noise due to the multipath from the sea. The ~1 m median standard deviation at 50 m altitude affects the estimation of the ground radioisotope abundances with an uncertainty less than 1.3%. The GNSS double-difference post-processing enhanced significantly the data quality for H > 80 m in terms of both altitude median standard deviation and agreement between the reconstructed and measured GPS antennas distances. Flying at 100 m the estimated uncertainty on the ground total activity due to the uncertainty on the flight height is of the order of 2%.

  19. Automated geographic registration and radiometric correction for UAV-based mosaics

    Science.gov (United States)

    Thomasson, J. Alex; Shi, Yeyin; Sima, Chao; Yang, Chenghai; Cope, Dale A.

    2017-05-01

    Texas A and M University has been operating a large-scale, UAV-based, agricultural remote-sensing research project since 2015. To use UAV-based images in agricultural production, many high-resolution images must be mosaicked together to create an image of an agricultural field. Two key difficulties to science-based utilization of such mosaics are geographic registration and radiometric calibration. In our current research project, image files are taken to the computer laboratory after the flight, and semi-manual pre-processing is implemented on the raw image data, including ortho-mosaicking and radiometric calibration. Ground control points (GCPs) are critical for high-quality geographic registration of images during mosaicking. Applications requiring accurate reflectance data also require radiometric-calibration references so that reflectance values of image objects can be calculated. We have developed a method for automated geographic registration and radiometric correction with targets that are installed semi-permanently at distributed locations around fields. The targets are a combination of black (≍5% reflectance), dark gray (≍20% reflectance), and light gray (≍40% reflectance) sections that provide for a transformation of pixel-value to reflectance in the dynamic range of crop fields. The exact spectral reflectance of each target is known, having been measured with a spectrophotometer. At the time of installation, each target is measured for position with a real-time kinematic GPS receiver to give its precise latitude and longitude. Automated location of the reference targets in the images is required for precise, automated, geographic registration; and automated calculation of the digital-number to reflectance transformation is required for automated radiometric calibration. To validate the system for radiometric calibration, a calibrated UAV-based image mosaic of a field was compared to a calibrated single image from a manned aircraft. Reflectance

  20. Dynamics of the spatial electron density distribution of EUV-induced plasmas

    Science.gov (United States)

    van der Horst, R. M.; Beckers, J.; Osorio, E. A.; Banine, V. Y.

    2015-11-01

    We studied the temporal evolution of the electron density distribution in a low pressure pulsed plasma induced by high energy extreme ultraviolet (EUV) photons using microwave cavity resonance spectroscopy (MCRS). In principle, MCRS only provides space averaged information about the electron density. However, we demonstrate here the possibility to obtain spatial information by combining multiple resonant modes. It is shown that EUV-induced plasmas, albeit being a rather exotic plasma, can be explained by known plasma physical laws and processes. Two stages of plasma behaviour are observed: first the electron density distribution contracts, after which it expands. It is shown that the contraction is due to cooling of the electrons. The moment when the density distribution starts to expand is related to the inertia of the ions. After tens of microseconds, the electrons reached the wall of the cavity. The speed of this expansion is dependent on the gas pressure and can be divided into two regimes. It is shown that the acoustic dominated regime the expansion speed is independent of the gas pressure and that in the diffusion dominated regime the expansion depends reciprocal on the gas pressure.

  1. Understanding EUV resist mottling leading to better resolution and linewidth roughness

    Science.gov (United States)

    Thackeray, James; Cameron, James; Jain, Vipul; LaBeaume, Paul; Coley, Suzanne; Ongayi, Owendi; Wagner, Mike; Biafore, John; Chun, Jun Sung

    2014-04-01

    We have shown that the dissolution properties can be successfully modified to improve the line/space profile and LWR of a low diffusion EUV CA resist. The surface roughness is a function of hot spots in the nominally unexposed regions of the resist material. We conjecture that the photoacid hot spots are formed due to DC flare present in the optical train of the exposure system. We also have shown that the PAGs can be further improved for out-of-band radiation (OOB) response. The improvement can be as much as 557% for 193nm exposure, and 838% by 248nm exposure. The improved OOB response leads to better contact hole performance. We also shared our continued improvement in resist witness plate performance with the majority of our resists passing for carbon growth, and all samples passing for non-cleanables. There does appear to be a site-to-site bias which we attribute to differences between e-beam and EUV exposure and/or substrate working distance from the source. Lastly, we show outstanding lithographic process window for 24 nm contact arrays on an NXE 3300 stepper as well as 15 nm half pitch lines and spaces on the PSI interferometric tool.

  2. Patterning with metal-oxide EUV photoresist: patterning capability, resist smoothing, trimming, and selective stripping

    Science.gov (United States)

    Mao, Ming; Lazzarino, Frederic; De Schepper, Peter; De Simone, Danilo; Piumi, Daniele; Luong, Vinh; Yamashita, Fumiko; Kocsis, Michael; Kumar, Kaushik

    2017-03-01

    Inpria metal-oxide photoresist (PR) serves as a thin spin-on patternable hard mask for EUV lithography. Compared to traditional organic photoresists, the ultrathin metal-oxide photoresist ( 12nm after development) effectively mitigates pattern collapse. Because of the high etch resistance of the metal-oxide resist, this may open up significant scope for more aggressive etches, new chemistries, and novel integration schemes. We have previously shown that metal-oxide PR can be successfully used to pattern the block layer for the imec 7-nm technology node[1] and advantageously replace a multiple patterning approach, which significantly reduces the process complexity and effectively decreases the cost. We also demonstrated the formation of 16nm half pitch 1:1 line/space with EUV single print[2], which corresponds to a metal 2 layer for the imec 7-nm technology node. In this paper, we investigate the feasibility of using Inpria's metal-oxide PR for 16nm line/space patterning. In meanwhile, we also explore the different etch process for LWR smoothing, resist trimming and resist stripping.

  3. EUV-induced oxidation of carbon on TiO2

    Science.gov (United States)

    Faradzhev, Nadir S.; Hill, Shannon B.

    2016-10-01

    Previously we reported estimates of the maximum etch rates of C on TiO2 by oxidizers including NO, O3 and H2O2 when irradiated by a spatially-non-uniform beam of extreme ultraviolet (EUV) radiation at 13.5 nm (Faradzhev et al., 2013 [6]). Here we extend that work by presenting temporally and spatially resolved measurements of the C etching by these oxidizers as a function of EUV intensity in the range (0.3 to 3) mW/mm2 [(0.2 to 2) × 10 [16] photons s- 1 cm- 2]. We find that the rates for NO scale linearly with intensity and are smaller than those for O3, which exhibit a weak, sub-linear intensity dependence in this range. We demonstrate that these behaviors are consistent with adsorption of the oxidizing precursor on the C surface followed by a photon-stimulated reaction resulting in volatile C-containing products. The kinetics of photon-induced C etching by hydrogen peroxide, however, appear to be more complex. The spatially resolved measurements reveal that C removal by H2O2 begins at the edges of the C spot, where the light intensity is the lowest, and proceeds toward the center of the spot. This localization of the reaction may occur because hydroxyl radicals are produced efficiently on the catalytically active TiO2 surface.

  4. EUV FLICKERING OF SOLAR CORONAL LOOPS: A NEW DIAGNOSTIC OF CORONAL HEATING

    Energy Technology Data Exchange (ETDEWEB)

    Tajfirouze, E.; Reale, F.; Peres, G. [Dipartimento di Fisica e Chimica, Università di Palermo, Piazza del Parlamento 1, I-90134 (Italy); Testa, P., E-mail: reale@astropa.unipa.it [Harvard-Smithsonian Center for Astrophysics, 60 Garden Street, Cambridge, MA 02138 (United States)

    2016-02-01

    A previous work of ours found the best agreement between EUV light curves observed in an active region core (with evidence of super-hot plasma) and those predicted from a model with a random combination of many pulse-heated strands with a power-law energy distribution. We extend that work by including spatially resolved strand modeling and by studying the evolution of emission along the loops in the EUV 94 Å and 335 Å channels of the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory. Using the best parameters of the previous work as the input of the present one, we find that the amplitude of the random fluctuations driven by the random heat pulses increases from the bottom to the top of the loop in the 94 Å channel and from the top to the bottom in the 335 Å channel. This prediction is confirmed by the observation of a set of aligned neighboring pixels along a bright arc of an active region core. Maps of pixel fluctuations may therefore provide easy diagnostics of nanoflaring regions.

  5. Performance evaluation of nonchemically amplified negative tone photoresists for e-beam and EUV lithography

    Science.gov (United States)

    Singh, Vikram; Satyanarayana, Vardhineedi Sri Venkata; Batina, Nikola; Reyes, Israel Morales; Sharma, Satinder K.; Kessler, Felipe; Scheffer, Francine R.; Weibel, Daniel E.; Ghosh, Subrata; Gonsalves, Kenneth E.

    2014-10-01

    Although extreme ultraviolet (EUV) lithography is being considered as one of the most promising next-generation lithography techniques for patterning sub-20 nm features, the development of suitable EUV resists remains one of the main challenges confronting the semiconductor industry. The goal is to achieve sub-20 nm line patterns having low line edge roughness (LER) of <1.8 nm and a sensitivity of 5 to 20 mJ/cm2. The present work demonstrates the lithographic performance of two nonchemically amplified (n-CARs) negative photoresists, MAPDST homopolymer and MAPDST-MMA copolymer, prepared from suitable monomers containing the radiation sensitive sulfonium functionality. Investigations into the effect of several process parameters are reported. These include spinning conditions to obtain film thicknesses <50 nm, baking regimes, exposure conditions, and the resulting surface topographies. The effect of these protocols on sensitivity, contrast, and resolution has been assessed for the optimization of 20 nm features and the corresponding LER/line width roughness. These n-CARs have also been found to possess high etch resistance. The etch durability of MAPDST homopolymer and MAPDST-MMA copolymer (under SF6 plasma chemistry) with respect to the silicon substrate are 7.2∶1 and 8.3∶1, respectively. This methodical investigation will provide guidance in designing new resist materials with improved efficiency for EUVL through polymer microstructure engineering.

  6. Difference in EUV photoresist design towards reduction of LWR and LCDU

    Science.gov (United States)

    Jiang, Jing; De Simone, Danilo; Vandenberghe, Geert

    2017-03-01

    Pattern fidelity of EUV lithography is crucial for high resolution features, since small variation can affect device performance and even cause short or open circuit. For 1D features, dense lines and contact holes are the most common features for active, metal and contact layer, therefore line width roughness (LWR) and local critical dimension uniformity (LCDU) are important indexes to monitor. Both LWR and LCDU are greatly influenced by photon and acid shot noise. In addition, LWR is also affected by resist mechanical properties, like pattern collapse. In this study, we studied the influence of different chemically amplified resist components, such as polymer, PAG and quencher for both types and concentrations in order to understand the relative extent of influences of deprotection, acid diffusion, and base neutralization on pattern fidelity. However, conventional methods to approach higher resolution or low LWR/LCDU by sacrificing the dose are not sustainable. In order to continue to improve resist performance, a new component, metal salt sensitizer, is introduced into the resist system. This metal salt is able to achieve 30% dose reduction by increasing EUV absorption, maintaining LWR. We believe metal sensitizer might give us a new way to challenge the RLS trade-off.

  7. EUV secondary electron blur at the 22nm half pitch node

    Science.gov (United States)

    Gronheid, Roel; Younkin, Todd R.; Leeson, Michael J.; Fonseca, Carlos; Hooge, Joshua S.; Nafus, Kathleen; Biafore, John J.; Smith, Mark D.

    2011-04-01

    In this paper the Arrhenius behavior of blur upon EUV exposure is investigated through variation of the PEB temperature. In this way, thermally activated parameters that contribute to blur (such as acid/base diffusion) can be separated from non-thermally activated parameters (such as secondary electron blur). The experimental results are analyzed in detail using multi-wavelength resist modeling based on the continuum approach and through fitting of the EUV data using stochastic resist models. The extracted blur kinetics display perfectly linear Arrhenius behavior, indicating that there is no sign for secondary electron blur at 22nm half pitch. At the lowest PEB setting the total blur length is ~4nm, indicating that secondary electron blur should be well below that. The stochastic resist model gives a best fit to the current data set with parameters that result in a maximum probability of acid generation at 2.4nm from the photon absorption site. Extrapolation of the model predicts that towards the 16nm half pitch the impact on sizing dose is minimal and an acceptable exposure latitude is achievable. In order to limit the impact on line width roughness at these dimensions it will be required to control acid diffusion to ~5nm.

  8. eBeam initiative survey reports confidence in EUV and multi-beam technology

    Science.gov (United States)

    Fujimura, Aki; Willis, Jan

    2017-07-01

    A record 73 industry luminaries representing more than 30 different companies from across the semiconductor ecosystem participated in the 2016 eBeam Initiative perceptions survey. The eBeam Initiative also completed its second annual mask makers' survey with feedback from 10 captive and merchant photomask manufacturers. Among the results of the members' perception survey, respondents remained optimistic in the implementation of EUV lithography for semiconductor high-volume manufacturing (HVM), with confidence in EUV increasing over other next-generation lithography (NGL) techniques compared with last year's survey. In addition, expectations on the use of multi-beam technology for advanced photomask HVM by the end of 2018 continue to remain strong. Results from the eBeam Initiative's second annual mask makers' survey indicate several surprising trends on mask making related to write times, turn-around time (TAT) for mask manufacturing, resists, mask yields and other critical issues. The author will review the key findings and offer his viewpoint on their significance.

  9. Studying secondary electron behavior in EUV resists using experimentation and modeling

    Science.gov (United States)

    Narasimhan, Amrit; Grzeskowiak, Steven; Srivats, Bharath; Herbol, Henry; Wisehart, Liam; Kelly, Chris; Earley, William; Ocola, Leonidas E.; Neisser, Mark; Denbeaux, Gregory; Brainard, Robert L.

    2015-03-01

    EUV photons expose photoresists by complex interactions starting with photoionization that create primary electrons (~80 eV), followed by ionization steps that create secondary electrons (10-60 eV). Ultimately, these lower energy electrons interact with specific molecules in the resist that cause the chemical reactions which are responsible for changes in solubility. The mechanisms by which these electrons interact with resist components are key to optimizing the performance of EUV resists. An electron exposure chamber was built to probe the behavior of electrons within photoresists. Upon exposure and development of a photoresist to an electron gun, ellipsometry was used to identify the dependence of electron penetration depth and number of reactions on dose and energy. Additionally, our group has updated a robust software that uses first-principles based Monte Carlo model called "LESiS", to track secondary electron production, penetration depth, and reaction mechanisms within materials-defined environments. LESiS was used to model the thickness loss experiments to validate its performance with respect to simulated electron penetration depths to inform future modeling work.

  10. High-resolution and large-area nanoparticle arrays using EUV interference lithography.

    Science.gov (United States)

    Karim, Waiz; Tschupp, Simon Andreas; Oezaslan, Mehtap; Schmidt, Thomas J; Gobrecht, Jens; van Bokhoven, Jeroen A; Ekinci, Yasin

    2015-04-28

    Well-defined model systems are needed for better understanding of the relationship between optical, electronic, magnetic, and catalytic properties of nanoparticles and their structure. Chemical synthesis of metal nanoparticles results in large size and shape dispersion and lack of lateral order. In contrast, conventional top-down lithography techniques provide control over the lateral order and dimensions. However, they are either limited in resolution or have low throughput and therefore do not enable the large patterning area needed to obtain good signal-to-noise ratio in common analytical and characterization techniques. Extreme ultraviolet (EUV) lithography has the throughput and simplicity advantages of photolithography as well as high resolution due to its wavelength. Using EUV achromatic Talbot lithography, we have obtained 15 nm particle arrays with a periodicity of about 100 nm over an area of several square centimeters with high-throughput enabling the use of nanotechnology for fabrication of model systems to study large ensembles of well-defined identical nanoparticles with a density of 10(10) particles cm(-2).

  11. Radiometric inter-sensor cross-calibration uncertainty using a traceable high accuracy reference hyperspectral imager

    Science.gov (United States)

    Gorroño, Javier; Banks, Andrew C.; Fox, Nigel P.; Underwood, Craig

    2017-08-01

    Optical earth observation (EO) satellite sensors generally suffer from drifts and biases relative to their pre-launch calibration, caused by launch and/or time in the space environment. This places a severe limitation on the fundamental reliability and accuracy that can be assigned to satellite derived information, and is particularly critical for long time base studies for climate change and enabling interoperability and Analysis Ready Data. The proposed TRUTHS (Traceable Radiometry Underpinning Terrestrial and Helio-Studies) mission is explicitly designed to address this issue through re-calibrating itself directly to a primary standard of the international system of units (SI) in-orbit and then through the extension of this SI-traceability to other sensors through in-flight cross-calibration using a selection of Committee on Earth Observation Satellites (CEOS) recommended test sites. Where the characteristics of the sensor under test allows, this will result in a significant improvement in accuracy. This paper describes a set of tools, algorithms and methodologies that have been developed and used in order to estimate the radiometric uncertainty achievable for an indicative target sensor through in-flight cross-calibration using a well-calibrated hyperspectral SI-traceable reference sensor with observational characteristics such as TRUTHS. In this study, Multi-Spectral Imager (MSI) of Sentinel-2 and Landsat-8 Operational Land Imager (OLI) is evaluated as an example, however the analysis is readily translatable to larger-footprint sensors such as Sentinel-3 Ocean and Land Colour Instrument (OLCI) and Visible Infrared Imaging Radiometer Suite (VIIRS). This study considers the criticality of the instrumental and observational characteristics on pixel level reflectance factors, within a defined spatial region of interest (ROI) within the target site. It quantifies the main uncertainty contributors in the spectral, spatial, and temporal domains. The resultant tool

  12. Calibration and Measurement Uncertainty Estimation of Radiometric Data: Preprint

    Energy Technology Data Exchange (ETDEWEB)

    Habte, A.; Sengupta, M.; Reda, I.; Andreas, A.; Konings, J.

    2014-11-01

    Evaluating the performance of photovoltaic cells, modules, and arrays that form large solar deployments relies on accurate measurements of the available solar resource. Therefore, determining the accuracy of these solar radiation measurements provides a better understanding of investment risks. This paper provides guidelines and recommended procedures for estimating the uncertainty in calibrations and measurements by radiometers using methods that follow the International Bureau of Weights and Measures Guide to the Expression of Uncertainty (GUM). Standardized analysis based on these procedures ensures that the uncertainty quoted is well documented.

  13. Development of absolute radiometric response functions for HyPlant & G-LiHT using SIRCUS Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The goal of this project is to provide absolute radiometric and cross-calibrated spectral characterizations for G-LiHT and HyPlant.  The objectives are: (i) to...

  14. Improved Thermal-Vacuum Compatible Flat Plate Radiometric Source For System-Level Testing Of Optical Sensors

    Science.gov (United States)

    Schwarz, Mark A.; Kent, Craig J.; Bousquet, Robert; Brown, Steven W.

    2016-01-01

    In this work, we describe an improved thermal-vacuum compatible flat plate radiometric source which has been developed and utilized for the characterization and calibration of remote optical sensors. This source is unique in that it can be used in situ, in both ambient and thermal-vacuum environments, allowing it to follow the sensor throughout its testing cycle. The performance of the original flat plate radiometric source was presented at the 2009 SPIE1. Following the original efforts, design upgrades were incorporated into the source to improve both radiometric throughput and uniformity. The pre-thermal-vacuum (pre-TVAC) testing results of a spacecraft-level optical sensor with the improved flat plate illumination source, both in ambient and vacuum environments, are presented. We also briefly discuss potential FPI configuration changes in order to improve its radiometric performance.

  15. Determining the Tropospheric Delay of a Radio Signal by the Radiometric Method

    Science.gov (United States)

    Ilyin, G. N.; Troitsky, A. V.

    2017-10-01

    We present a method and algorithm for real-time determination of the tropospheric delay of a radio signal and the radiometric complex developed on their basis. The method is based on the measurement of the atmospheric thermal microwave radiation intensity at the frequencies ν 1 = 20.7 GHz, ν 2 = 32 GHz, and ν 3 = 56.7 GHz and solution of the corresponding inverse problem with respect to the atmospheric parameters (temperature, pressure, humidity, and water content) which completely determine the tropospheric delay of a radio signal. The method was experimentally tested by comparing the radio-signal delay series obtained by the radiometric method and the GLONASS/GPS data. The error of determining the wet component of the radio-signal delay was about 3 mm.

  16. An information theory characterization of radar images and a new definition for radiometric resolution

    Science.gov (United States)

    Frost, V. S.; Shanmugan, K. S.; Holtzman, J. C.

    1982-01-01

    The noise properties of the radar image formation process are used in the present modeling of a communication channel in which the desired target properties are the information transmitted, and the final image represents the received signal. The average information rate over this communication channel is calculated together with appropriate bounds and approximations, and is found to be small on a per-sample basis. As a result, many samples must be averaged to allow for the discrimination, or classification, of several levels of target reflectivity. These information rate properties are consistent with known results concerning target detection and image quality in speckle, and the rate is applicable to the definition of radar image radiometric resolution. Radiometric resolution is functionally related to the degree of noncoherent averaging performed by the sensor.

  17. Direct antimicrobial drug susceptibility testing of Mycobacterium tuberculosis by the radiometric method

    Energy Technology Data Exchange (ETDEWEB)

    Libonati, J.P.; Stager, C.E.; Davis, J.R.; Siddiqi, S.H.

    1988-05-01

    Direct-drug-susceptibility tests were performed on clinical specimens positive for acid-fast bacilli by either Ziehl-Neelsen or fluorochrome staining. The results of conventional agar dilution and a modified radiometric (BACTEC) method were compared. A total of 580 smear-positive specimens were tested by the BACTEC method at three separate sites. Three hundred and seventy-seven of these were culture positive for M. tuberculosis, and 343 (91%) yielded acceptable direct-susceptibility-test results. We used the conventional method to determine that 343 of 519 smear-positive specimens were culture positive for M. tuberculosis, and 212 (62%) produced acceptable results within 3 wks. Conventional results were reported in 3-4 wks, while the time required to obtain results with the BACTEC method ranged from 5 to 21 days (average 11.5 days). Results indicate that the radiometric method provides reportable results more frequently with time savings as compared to the conventional method.

  18. Mississippi exploration field trials using microbial, radiometrics, free soil gas, and other techniques

    Energy Technology Data Exchange (ETDEWEB)

    Moody, J.S.; Brown, L.R.; Thieling, S.C.

    1995-12-31

    The Mississippi Office of Geology has conducted field trials using the surface exploration techniques of geomicrobial, radiometrics, and free soil gas. The objective of these trials is to determine if Mississippi oil and gas fields have surface hydrocarbon expression resulting from vertical microseepage migration. Six fields have been surveyed ranging in depth from 3,330 ft to 18,500 ft. The fields differ in trapping styles and hydrocarbon type. The results so far indicate that these fields do have a surface expression and that geomicrobial analysis as well as radiometrics and free soil gas can detect hydrocarbon microseepage from pressurized reservoirs. All three exploration techniques located the reservoirs independent of depth, hydrocarbon type, or trapping style.

  19. Extraction of Active Regions and Coronal Holes from EUV Images Using the Unsupervised Segmentation Method in the Bayesian Framework

    Science.gov (United States)

    Arish, S.; Javaherian, M.; Safari, H.; Amiri, A.

    2016-04-01

    The solar corona is the origin of very dynamic events that are mostly produced in active regions (AR) and coronal holes (CH). The exact location of these large-scale features can be determined by applying image-processing approaches to extreme-ultraviolet (EUV) data.

  20. Adaptive Optics to Counteract Thermal Aberrations : System Design for EUV-Lithography with Sub-nm Precision

    NARCIS (Netherlands)

    Saathof, R.

    2013-01-01

    In highly precise systems the thermal expansion of system-parts is of increasing concern, since it can severely compromise its performance at sub-nanometre level. An example of such a system is an Extreme UltraViolet (EUV)-lithography machine that is used in the semi-conductor industry to project

  1. Estimation of temporal evolution of the helium plasmasphere based on a sequence of IMAGE/EUV images

    Science.gov (United States)

    Nakano, S.; Fok, M.-C.; Brandt, P. C.; Higuchi, T.

    2014-05-01

    We have developed a technique for estimating the temporal evolution of the plasmaspheric helium ion density based on a sequence of extreme ultraviolet (EUV) data obtained from the IMAGE satellite. In the proposed technique, the estimation is obtained by incorporating EUV images from IMAGE into a two-dimensional fluid model of the plasmasphere using a data assimilation approach based on the ensemble transform Kalman filter. Since the motion and the spatial structure of the helium plasmasphere is strongly controlled by the electric field in the inner magnetosphere, the electric field around the plasmapause can also be estimated using the ensemble transform Kalman filter. We performed an experiment using synthetic images that were generated from the same numerical model under a certain condition. It was confirmed that the condition that generated the synthetic images was successfully reproduced. We also present some results obtained using real EUV imaging data. Finally, we discuss the possibility of estimating the density profile along a magnetic field line. Since each EUV image was taken from a different direction due to the motion of the IMAGE satellite, we could obtain the information on the density profile along a field line by combining multiple images.

  2. Design of a compact device to generate and test beams with orbital angular momentum in the EUV.

    Science.gov (United States)

    Pabon, D O; Ledesma, S A; Quinteiro, G F; Capeluto, M G

    2017-10-10

    We present a compact design to generate and test optical-vortex beams with possible applications in the extreme ultraviolet (EUV) region of the electromagnetic spectrum. The device consists of a diffractive mask where both the beam with orbital angular momentum and the reference wavefront to test its phase are generated. In order to show that the proposal would work in the EUV, simulations and proof-of-principle experiments were performed, using typical parameters for EUV holography scaled to visible wavelengths. As the simplest case, we consider the well-known Laguerre-Gaussian (LG)-like beams, which have a single vortex in the propagation axis. To further test the versatility of the device, we consider Mathieu beams, more complex structured beams that may contain several vortices. In the experiment, a spatial light modulator was used to display the mask. As examples, we show the results for a LG-like beam with topological charge ℓ=1 and Mathieu beams with topological charge ℓ=2 and ellipticity q=2. These results show the potential of the device to generate a variety of beam shapes at EUV wavelengths.

  3. Chemical Effect of Dry and Wet Cleaning of the Ru Protective Layer of the Extreme ultraviolet (EUV) Lithography Reflector

    Energy Technology Data Exchange (ETDEWEB)

    Belau, Leonid; Park, Jeong Y.; Liang, Ted; Seo, Hyungtak; Somorjai, Gabor A.

    2009-04-10

    The authors report the chemical influence of cleaning of the Ru capping layer on the extreme ultraviolet (EUV) reflector surface. The cleaning of EUV reflector to remove the contamination particles has two requirements: to prevent corrosion and etching of the reflector surface and to maintain the reflectivity functionality of the reflector after the corrosive cleaning processes. Two main approaches for EUV reflector cleaning, wet chemical treatments [sulfuric acid and hydrogen peroxide mixture (SPM), ozonated water, and ozonated hydrogen peroxide] and dry cleaning (oxygen plasma and UV/ozone treatment), were tested. The changes in surface morphology and roughness were characterized using scanning electron microscopy and atomic force microscopy, while the surface etching and change of oxidation states were probed with x-ray photoelectron spectroscopy. Significant surface oxidation of the Ru capping layer was observed after oxygen plasma and UV/ozone treatment, while the oxidation is unnoticeable after SPM treatment. Based on these surface studies, the authors found that SPM treatment exhibits the minimal corrosive interactions with Ru capping layer. They address the molecular mechanism of corrosive gas and liquid-phase chemical interaction with the surface of Ru capping layer on the EUV reflector.

  4. A New Automatic System for Angular Measurement and Calibration in Radiometric Instruments

    Directory of Open Access Journals (Sweden)

    Jose Manuel Andujar Marquez

    2010-04-01

    Full Text Available This paper puts forward the design, construction and testing of a new automatic system for angular-response measurement and calibration in radiometric instruments. Its main characteristics include precision, speed, resolution, noise immunity, easy programming and operation. The developed system calculates the cosine error of the radiometer under test by means of a virtual instrument, from the measures it takes and through a mathematical procedure, thus allowing correcting the radiometer with the aim of preventing cosine error in its measurements.

  5. A new automatic system for angular measurement and calibration in radiometric instruments.

    Science.gov (United States)

    Marquez, Jose Manuel Andujar; Bohórquez, Miguel Ángel Martínez; Garcia, Jonathan Medina; Nieto, Francisco Jose Aguilar

    2010-01-01

    This paper puts forward the design, construction and testing of a new automatic system for angular-response measurement and calibration in radiometric instruments. Its main characteristics include precision, speed, resolution, noise immunity, easy programming and operation. The developed system calculates the cosine error of the radiometer under test by means of a virtual instrument, from the measures it takes and through a mathematical procedure, thus allowing correcting the radiometer with the aim of preventing cosine error in its measurements.

  6. REDUCTION OF STRIPING NOISE IN OVERLAPPING LIDAR INTENSITY DATA BY RADIOMETRIC NORMALIZATION

    Directory of Open Access Journals (Sweden)

    W. Y. Yan

    2016-06-01

    Full Text Available To serve seamless mapping, airborne LiDAR data are usually collected with multiple parallel strips with one or two cross strip(s. Nevertheless, the overlapping regions of LiDAR data strips are usually found with unbalanced intensity values, resulting in the appearance of stripping noise. Despite that physical intensity correction methods are recently proposed, some of the system and environmental parameters are assumed as constant or not disclosed, leading to such an intensity discrepancy. This paper presents a new normalization technique to adjust the radiometric misalignment found in the overlapping LiDAR data strips. The normalization technique is built upon a second-order polynomial function fitted on the joint histogram plot, which is generated with a set of pairwise closest data points identified within the overlapping region. The method was tested on Teledyne Optech’s Gemini dataset (at 1064 nm wavelength, where the LiDAR intensity data were first radiometrically corrected based on the radar (range equation. Five land cover features were selected to evaluate the coefficient of variation (cv of the intensity values before and after implementing the proposed method. Reduction of cv was found by 19% to 59% in the Gemini dataset, where the striping noise was significantly reduced in the radiometrically corrected and normalized intensity data. The Gemini dataset was also used to conduct land cover classification, and the overall accuracy yielded a notable improvement of 9% to 18%. As a result, LiDAR intensity data should be pre-processed with radiometric correction and normalization prior to any data manipulation.

  7. Analysis of Ozone (O3 and Erythemal UV (EUV measured by TOMS in the equatorial African belt

    Directory of Open Access Journals (Sweden)

    Øyvind Frette

    2010-03-01

    Full Text Available We presented time series of total ozone column amounts (TOCAs and erythemal UV (EUV doses derived from measurements by TOMS (Total Ozone Mapping Spectrometer instruments on board the Nimbus-7 (N7 and the Earth Probe (EP satellites for three locations within the equatorial African belt for the period 1979 to 2000. The locations were Dar-es-Salaam (6.8° S, 39.26° E in Tanzania, Kampala (0.19° N, 32.34° E in Uganda, and Serrekunda (13.28° N, 16.34° W in Gambia. Equatorial Africa has high levels of UV radiation, and because ozone shields UV radiation from reaching the Earth’s surface, there is a need to monitor TOCAs and EUV doses. In this paper we investigated the trend of TOCAs and EUV doses, the effects of annual and solar cycles on TOCAs, as well as the link between lightning and ozone production in the equatorial African belt. We also compared clear-sky simulated EUV doses with the corresponding EUV doses derived from TOMS measurements. The TOCAs were found to vary in the ranges 243 DU − 289 DU, 231 DU − 286 DU, and 236 DU − 296 DU, with mean values of 266.9 DU, 260.9 DU, and 267.8 DU for Dar-es-Salaam, Kampala and Serrekunda, respectively. Daily TOCA time series indicated that Kampala had the lowest TOCA values, which we attributed to the altitude effect. There were two annual ozone peaks in Dar-es-Salaam and Kampala, and one annual ozone peak in Serrekunda. The yearly TOCA averages showed an oscillation within a five-year period. We also found that the EUV doses were stable at all three locations for the period 1979−2000, and that Kampala and Dar-es-Salaam were mostly cloudy throughout the year, whereas Serrekunda was mostly free from clouds. It was also found that clouds were among the major factors determining the level of EUV reaching the Earth´s surface. Finally, we noted that during rainy seasons, horizontal advection effects augmented by lightning activity may be responsible for enhanced ozone production in the tropics.

  8. Prototyping Radiometrically Terrain Corrected Sentinel-1A Large-Scale Processing

    Science.gov (United States)

    Hogenson, K.; Nicoll, J. B.; Logan, T. A.; Gens, R.; Garron, J.

    2016-12-01

    The Alaska Satellite Facility Distributed Active Archive Data Center (ASF DAAC) is undertaking prototyping and analysis of radiometrically terrain corrected (RTC) data products derived from Sentinel-1A SAR data, processed using different software packages. RTC products from both the GAMMA software and the Sentinel 1 toolbox were created for a variety of terrain types. Images were analyzed for residual terrain effects, number of looks, and noise floor. Radiometric terrain correction addresses two aspects of the effects of side-looking geometry of SAR imagery. First, the geometric distortions are corrected using the best digital elevation model available for a given region. Second, the radiometry is adjusted in the affected foreshortening and layover regions using the pixel-area integration approach for radiometric normalization. The RTC process provides improved backscatter estimates that can be used as input for applications such as the monitoring of deforestation, land-cover classification, and delineation of wet snow covered areas. The result of this prototyping effort, if approved, will be used to create an extensive archive of RTC products that can be easily combined with other geographically-projected datasets.

  9. Radiometric Correction of Multitemporal Hyperspectral Uas Image Mosaics of Seedling Stands

    Science.gov (United States)

    Markelin, L.; Honkavaara, E.; Näsi, R.; Viljanen, N.; Rosnell, T.; Hakala, T.; Vastaranta, M.; Koivisto, T.; Holopainen, M.

    2017-10-01

    Novel miniaturized multi- and hyperspectral imaging sensors on board of unmanned aerial vehicles have recently shown great potential in various environmental monitoring and measuring tasks such as precision agriculture and forest management. These systems can be used to collect dense 3D point clouds and spectral information over small areas such as single forest stands or sample plots. Accurate radiometric processing and atmospheric correction is required when data sets from different dates and sensors, collected in varying illumination conditions, are combined. Performance of novel radiometric block adjustment method, developed at Finnish Geospatial Research Institute, is evaluated with multitemporal hyperspectral data set of seedling stands collected during spring and summer 2016. Illumination conditions during campaigns varied from bright to overcast. We use two different methods to produce homogenous image mosaics and hyperspectral point clouds: image-wise relative correction and image-wise relative correction with BRDF. Radiometric datasets are converted to reflectance using reference panels and changes in reflectance spectra is analysed. Tested methods improved image mosaic homogeneity by 5 % to 25 %. Results show that the evaluated method can produce consistent reflectance mosaics and reflectance spectra shape between different areas and dates.

  10. RADIOMETRIC CORRECTION OF MULTITEMPORAL HYPERSPECTRAL UAS IMAGE MOSAICS OF SEEDLING STANDS

    Directory of Open Access Journals (Sweden)

    L. Markelin

    2017-10-01

    Full Text Available Novel miniaturized multi- and hyperspectral imaging sensors on board of unmanned aerial vehicles have recently shown great potential in various environmental monitoring and measuring tasks such as precision agriculture and forest management. These systems can be used to collect dense 3D point clouds and spectral information over small areas such as single forest stands or sample plots. Accurate radiometric processing and atmospheric correction is required when data sets from different dates and sensors, collected in varying illumination conditions, are combined. Performance of novel radiometric block adjustment method, developed at Finnish Geospatial Research Institute, is evaluated with multitemporal hyperspectral data set of seedling stands collected during spring and summer 2016. Illumination conditions during campaigns varied from bright to overcast. We use two different methods to produce homogenous image mosaics and hyperspectral point clouds: image-wise relative correction and image-wise relative correction with BRDF. Radiometric datasets are converted to reflectance using reference panels and changes in reflectance spectra is analysed. Tested methods improved image mosaic homogeneity by 5 % to 25 %. Results show that the evaluated method can produce consistent reflectance mosaics and reflectance spectra shape between different areas and dates.

  11. Radiometric Calibration of a Dual-Wavelength, Full-Waveform Terrestrial Lidar

    Science.gov (United States)

    Li, Zhan; Jupp, David L. B.; Strahler, Alan H.; Schaaf, Crystal B.; Howe, Glenn; Hewawasam, Kuravi; Douglas, Ewan S.; Chakrabarti, Supriya; Cook, Timothy A.; Paynter, Ian; Saenz, Edward J.; Schaefer, Michael

    2016-01-01

    Radiometric calibration of the Dual-Wavelength Echidna® Lidar (DWEL), a full-waveform terrestrial laser scanner with two simultaneously-pulsing infrared lasers at 1064 nm and 1548 nm, provides accurate dual-wavelength apparent reflectance (ρapp), a physically-defined value that is related to the radiative and structural characteristics of scanned targets and independent of range and instrument optics and electronics. The errors of ρapp are 8.1% for 1064 nm and 6.4% for 1548 nm. A sensitivity analysis shows that ρapp error is dominated by range errors at near ranges, but by lidar intensity errors at far ranges. Our semi-empirical model for radiometric calibration combines a generalized logistic function to explicitly model telescopic effects due to defocusing of return signals at near range with a negative exponential function to model the fall-off of return intensity with range. Accurate values of ρapp from the radiometric calibration improve the quantification of vegetation structure, facilitate the comparison and coupling of lidar datasets from different instruments, campaigns or wavelengths and advance the utilization of bi- and multi-spectral information added to 3D scans by novel spectral lidars. PMID:26950126

  12. Radiometric Calibration of a Dual-Wavelength, Full-Waveform Terrestrial Lidar

    Directory of Open Access Journals (Sweden)

    Zhan Li

    2016-03-01

    Full Text Available Radiometric calibration of the Dual-Wavelength Echidna® Lidar (DWEL, a full-waveform terrestrial laser scanner with two simultaneously-pulsing infrared lasers at 1064 nm and 1548 nm, provides accurate dual-wavelength apparent reflectance (ρapp, a physically-defined value that is related to the radiative and structural characteristics of scanned targets and independent of range and instrument optics and electronics. The errors of ρapp are 8.1% for 1064 nm and 6.4% for 1548 nm. A sensitivity analysis shows that ρapp error is dominated by range errors at near ranges, but by lidar intensity errors at far ranges. Our semi-empirical model for radiometric calibration combines a generalized logistic function to explicitly model telescopic effects due to defocusing of return signals at near range with a negative exponential function to model the fall-off of return intensity with range. Accurate values of ρapp from the radiometric calibration improve the quantification of vegetation structure, facilitate the comparison and coupling of lidar datasets from different instruments, campaigns or wavelengths and advance the utilization of bi- and multi-spectral information added to 3D scans by novel spectral lidars.

  13. Radiometric 81Kr dating identifies 120,000-year-old ice at Taylor Glacier, Antarctica.

    Science.gov (United States)

    Buizert, Christo; Baggenstos, Daniel; Jiang, Wei; Purtschert, Roland; Petrenko, Vasilii V; Lu, Zheng-Tian; Müller, Peter; Kuhl, Tanner; Lee, James; Severinghaus, Jeffrey P; Brook, Edward J

    2014-05-13

    We present successful (81)Kr-Kr radiometric dating of ancient polar ice. Krypton was extracted from the air bubbles in four ∼350-kg polar ice samples from Taylor Glacier in the McMurdo Dry Valleys, Antarctica, and dated using Atom Trap Trace Analysis (ATTA). The (81)Kr radiometric ages agree with independent age estimates obtained from stratigraphic dating techniques with a mean absolute age offset of 6 ± 2.5 ka. Our experimental methods and sampling strategy are validated by (i) (85)Kr and (39)Ar analyses that show the samples to be free of modern air contamination and (ii) air content measurements that show the ice did not experience gas loss. We estimate the error in the (81)Kr ages due to past geomagnetic variability to be below 3 ka. We show that ice from the previous interglacial period (Marine Isotope Stage 5e, 130-115 ka before present) can be found in abundance near the surface of Taylor Glacier. Our study paves the way for reliable radiometric dating of ancient ice in blue ice areas and margin sites where large samples are available, greatly enhancing their scientific value as archives of old ice and meteorites. At present, ATTA (81)Kr analysis requires a 40-80-kg ice sample; as sample requirements continue to decrease, (81)Kr dating of ice cores is a future possibility.

  14. Improved detection of Mycobacterium avium complex with the Bactec radiometric system

    Energy Technology Data Exchange (ETDEWEB)

    Hoffner, S.E.

    1988-05-01

    A reconsideration of the laboratory methods used for primary isolation of mycobacteria other than Mycobacterium tuberculosis is needed due to the increasingly recognized importance of such mycobacterial infections in immunocompromised patients. One example of this is the severe opportunistic infections caused by Mycobacterium avium complex among AIDS patients. In this study, the Bactec radiometric system was compared to conventional culture on solid medium for the detection of M. avium complex in 3,612 selected clinical specimens, mainly of extrapulmonary origin. Of a total number of 63 M. avium complex isolates, the Bactec system detected 58 (92%), compared to 37 (59%) for conventional culture. A much more rapid detection was attained with radiometric technique than with conventional culture. The mean detection time for the cultures positive with both methods was 7.1 and 28.3 days, respectively. The Bactec radiometric system achieves a rapid and significantly more sensitive detection and seems to be an excellent complement to conventional culture in the laboratory diagnosis of infections with the M. avium complex.

  15. Inflight Radiometric Calibration of New Horizons' Multispectral Visible Imaging Camera (MVIC)

    Science.gov (United States)

    Howett, C. J. A.; Parker, A. H.; Olkin, C. B.; Reuter, D. C.; Ennico, K.; Grundy, W. M.; Graps, A. L.; Harrison, K. P.; Throop, H. B.; Buie, M. W.; hide

    2016-01-01

    We discuss two semi-independent calibration techniques used to determine the inflight radiometric calibration for the New Horizons Multi-spectral Visible Imaging Camera (MVIC). The first calibration technique compares the measured number of counts (DN) observed from a number of well calibrated stars to those predicted using the component-level calibration. The ratio of these values provides a multiplicative factor that allows a conversation between the preflight calibration to the more accurate inflight one, for each detector. The second calibration technique is a channel-wise relative radiometric calibration for MVIC's blue, near-infrared and methane color channels using Hubble and New Horizons observations of Charon and scaling from the red channel stellar calibration. Both calibration techniques produce very similar results (better than 7% agreement), providing strong validation for the techniques used. Since the stellar calibration described here can be performed without a color target in the field of view and covers all of MVIC's detectors, this calibration was used to provide the radiometric keyword values delivered by the New Horizons project to the Planetary Data System (PDS). These keyword values allow each observation to be converted from counts to physical units; a description of how these keyword values were generated is included. Finally, mitigation techniques adopted for the gain drift observed in the near-infrared detector and one of the panchromatic framing cameras are also discussed.

  16. Radiometric 81Kr dating identifies 120,000 year old ice at Taylor Glacier, Antarctica

    CERN Document Server

    Buizert, Christo; Jiang, Wei; Purtschert, Roland; Petrenko, Vasilii V; Lu, Zheng-Tian; Mueller, Peter; Kuhl, Tanner; Lee, James; Severinghaus, Jeffrey P; Brook, Edward J

    2014-01-01

    We present the first successful 81Kr-Kr radiometric dating of ancient polar ice. Krypton was extracted from the air bubbles in four ~350 kg polar ice samples from Taylor Glacier in the McMurdo Dry Valleys, Antarctica, and dated using Atom Trap Trace Analysis (ATTA). The 81Kr radiometric ages agree with independent age estimates obtained from stratigraphic dating techniques with a mean absolute age offset of 6 +/- 2.5 ka. Our experimental methods and sampling strategy are validated by 1) 85Kr and 39Ar analyses that show the samples to be free of modern air contamination, and 2) air content measurements that show the ice did not experience gas loss. We estimate the error in the 81Kr ages due to past geomagnetic variability to be below 3 ka. We show that ice from the previous interglacial period (MIS 5e, 130-115 ka before present) can be found in abundance near the surface of Taylor Glacier. Our study paves the way for reliable radiometric dating of ancient ice in blue ice areas and margin sites where large samp...

  17. Relative Radiometric Normalization and Atmospheric Correction of a SPOT 5 Time Series

    Directory of Open Access Journals (Sweden)

    Matthieu Rumeau

    2008-04-01

    Full Text Available Multi-temporal images acquired at high spatial and temporal resolution are an important tool for detecting change and analyzing trends, especially in agricultural applications. However, to insure a reliable use of this kind of data, a rigorous radiometric normalization step is required. Normalization can be addressed by performing an atmospheric correction of each image in the time series. The main problem is the difficulty of obtaining an atmospheric characterization at a given acquisition date. In this paper, we investigate whether relative radiometric normalization can substitute for atmospheric correction. We develop an automatic method for relative radiometric normalization based on calculating linear regressions between unnormalized and reference images. Regressions are obtained using the reflectances of automatically selected invariant targets. We compare this method with an atmospheric correction method that uses the 6S model. The performances of both methods are compared using 18 images from of a SPOT 5 time series acquired over Reunion Island. Results obtained for a set of manually selected invariant targets show excellent agreement between the two methods in all spectral bands: values of the coefficient of determination (r² exceed 0.960, and bias magnitude values are less than 2.65. There is also a strong correlation between normalized NDVI values of sugarcane fields (r² = 0.959. Despite a relative error of 12.66% between values, very comparable NDVI patterns are observed.

  18. Full-sun synchronic EUV and coronal hole mapping using multi-instrument images: Data and software made available

    Science.gov (United States)

    Caplan, R. M.; Downs, C.; Linker, J.

    2015-12-01

    A method for the automatic generation of EUV and coronal hole (CH) maps using simultaneous multi-instrument imaging data is described. Synchronized EUV images from STEREO/EUVI A&B 195Å and SDO/AIA 193Å undergo preprocessing steps that include PSF-deconvolution and the application of nonlinear data-derived intensity corrections that account for center-to-limb variations (limb-brightening) and inter-instrument intensity normalization. The latter two corrections are derived using a robust, systematic approach that takes advantage of unbiased long-term averages of data and serve to flatten the images by converting all pixel intensities to a unified disk center equivalent. While the number of applications are broad, we demonstrate how this technique is very useful for CH detection as it enables the use of a fast and simplified image segmentation algorithm to obtain consistent detection results. The multi-instrument nature of the technique also allows one to track evolving features consistently for longer periods than is possible with a single instrument, and preliminary results quantifying CH area and shape evolution are shown.Most importantly, several data and software products are made available to the community for use. For the ~4 year period of 6/10/2010 to 8/18/2014, we provide synchronic EUV and coronal hole maps at 6-hour cadence as well as the data-derived limb brightening and inter-instrument correction factors that we applied. We also make available a ready-to-use MATLAB script EUV2CHM used to generate the maps, which loads EUV images, applies our preprocessing steps, and then uses our GPU-accelerated/CPU-multithreaded segmentation algorithm EZSEG to detect coronal holes.

  19. Analysis, simulation, and experimental studies of YAG and CO2 laser-produced plasma for EUV lithography sources

    Science.gov (United States)

    Hassanein, A.; Sizyuk, V.; Harilal, S. S.; Sizyuk, T.

    2010-04-01

    Efficient laser systems are essential for the realization of high volume manufacturing in extreme ultraviolet lithography (EUVL). Solid-state Nd:YAG lasers usually have lower efficiency and source suppliers are alternatively investigating the use of high power CO2 laser systems. However, CO2 laser-produced plasmas (LPP) have specific characteristics and features that should be taken into account when considering them as the light source for EUVL. The analysis of recent experimental and theoretical work showed significant differences in the properties of plasma plumes produced by CO2 and the Nd:YAG lasers including EUV radiation emission, source formation, debris generation, and conversion efficiency. The much higher reflectivity of CO2 laser from liquid, vapor, and plasma of a tin target results in the production of optically thinner plumes with higher velocity and in a better formation of plasma properties (temperature and density values) towards more efficient EUV source. However, the spikes in the temporal profiles of current CO2 laser will additionally affect the properties of the produced plasma. We have developed unique combination of state-of-the-art experimental facilities (CMUXE Laboratory) and advanced computer simulation (HEIGHTS) package for studying and optimizing various lasers, discharge produced plasmas (DPP), and target parameters as well as the optical collection system regarding EUV lithography. In this work, detailed characteristics of plasmas produced by CO2 and Nd:YAG lasers were analyzed and compared both experimentally and theoretically for optimizing EUV from LPP sources. The details of lower overheating of plasma produced by CO2 laser are given with time and explain how to utilize the high reflectivity of such lasers in plasmas produced in different target geometries to significantly enhance the conversion efficiency of EUV radiation.

  20. Anti-parallel filament flows and bright dots observed in the EUV with Hi-C

    Science.gov (United States)

    Alexander, C. E.; Regnier, S.; Walsh, R. W.; Winebarger, A. R.; Cirtain, J. W.

    2013-12-01

    The Hi-C instrument imaged the million degree corona at the highest spatial and temporal resolution to date. The instrument imaged a complicated active region which contained several interesting features. Scientists at UCLan in the UK, in collaboration with other members of the Hi-C science team, studied two of these festures: anti-parallel filament flows and bright EUV dots. Plasma flows within prominences/filaments have been observed for many years and hold valuable clues concerning the mass and energy balance within these structures. Evidence of ';counter-steaming' flows has previously been inferred from these cool plasma observations but now, for the first time, these flows have been directly imaged along fundamental filament threads within the million degree corona (at 193 Å). We present observations of an active region filament observed with Hi-C that exhibits anti-parallel flows along adjacent filament threads. The ultra-high spatial and temporal resolution of Hi-C allow the anti-parallel flow velocities to be measured (70 - 80 km/s) and gives an indication of the resolvable thickness of the individual strands (0.8' × 0.1'). The temperature distribution of the plasma flows was estimated to be log T(K) = 5.45 × 0.10 using EM loci analysis. Short-lived, small brightenings sparkling at the edge of the active region, calle EUV Bright Dots (EBDs) were also investigated. EBDs have a characteristic duration of 25 s with a characteristic length of 680 km. These brightenings are not fully resolved by the SDO/AIA instrument at the same wavelength, but can however be identified with respect to the Hi-C location of the EBDs. In addition, EBDs are seen in other chromospheric/coronal channels of SDO/AIA suggesting a temperature between 0.5 and 1.5 MK. Based on a potential field extrapolation from an SDO/HMI magnetogram, the EBDs appear at the footpoints of large-scale trans-equatorial coronal loops. The Hi-C observations provide the first evidence of small-scale EUV

  1. Enhancing EUV mask blanks usability through smart shift and blank-design pairing optimization

    Science.gov (United States)

    Soni, Rakesh Kumar; Paninjath, Sankaranarayanan; Pereira, Mark; Buck, Peter; Thwaite, Peter

    2016-10-01

    EUV Defect avoidance techniques will play a vital role in extreme ultraviolet lithography (EUVL) photomask fabrication with the anticipation that defect free mask blanks won't be available and that cost effective techniques will not be available for defect repairing. In addition, mask shops may not have a large inventory of expensive EUV mask blanks. Given these facts, defect avoidance can be used as cost effective technique to optimize the mask blank and design data (mask data) pair selection across mask blank manufacturers and mask shops so that overall mask blank utilization can be enhanced. In previous work, it was determined that the pattern shift based solution increases the chance that a defective mask blank can be used that would otherwise be discarded [1]. In pattern shift, design data is shifted such that defects are either moved to isolated regions or hidden under the patterns that are written. However pattern shifts techniques don't perform well with masks with higher defect counts. Pattern shift techniques in this form assume all defects to be equally critical. In addition, a defect is critical or important only if it lands on the main pattern. A defect landing on fill, sub-resolution assist feature (SRAF) or fiducial areas may not be critical. In this paper we assess the performance of pattern shift techniques assuming defects that are not critical based upon size or type, as well as defects landing in non-critical areas (smart shift) can be ignored. In a production mask manufacturing environment it is necessary to co-optimize and prioritize blank-design pairing for multiple mask layouts in the queue with the available blanks. A blank-design pairing tool maximizes the utilization of blanks by finding the best pairing between blanks and design data so that the maximum number of mask blanks can be used. In this paper we also propose a novel process which would optimize the usage of costly EUV mask blanks across mask blank manufacturers and mask shops

  2. Optimization of low-diffusion EUV resist for linewidth roughness and pattern collapse on various substrates

    Science.gov (United States)

    Thackeray, James W.; Cameron, James F.; Wagner, Michael; Coley, Suzanne; Ongayi, Owendi; Montgomery, Warren; Lovell, Dave; Biafore, John; Chakrapani, Vidhya; Ko, Akiteru

    2012-03-01

    This paper will report on our development of low diffusion EUV resists based on polymer-bound PAG technology. With our low diffusion resist, a wide process window for 30-nm hp of 280nm DOF over a 10% exposure range is achieved on a prototype ADT fullfield scanner. Linewidth roughness of 3.1nm is also achieved. Excellent resist profiles can be achieved on organic ULs or Si hardmask materials. This resist also shows only 1.1 nm carbon growth on witness plate mirrors for cleanables, and no reflectivity loss after mirror cleaning. These results clearly pass for use on all NXE exposure tools. We also have shown good pattern transfer for a Si HM stack using this resist. Finally, we report 17-nm hp resolution at a dose of 14.5mj for a higher absorption resist.

  3. Fast-mode Coronal EUV Wave Trains Associated with Solar Flares and CMEs

    Science.gov (United States)

    Liu, Wei; Ofman, Leon; Downs, Cooper; Karlicky, Marian; Chen, Bin

    2017-08-01

    As a new observational phenomenon, Quasi-periodic, Fast Propagating EUV wave trains (QFPs) are fast-mode magnetosonic waves closely related to quasi-periodic pulsations commonly detected in solar flares (traditionally with non-imaging observations). They can provide critical clues to flare energy release and serve as new tools for coronal seismology. We report recent advances in observing and modeling QFPs, including evidence of heating and cooling cycles revealed with differential emission measure (DEM) analysis that are consistent with alternating compression and rarefaction expected for magnetosonic waves. Through a statistical survey, we found a preferential association of QFPs with eruptive flares (with CMEs) rather than confined flares (without CMEs). We also identified some correlation with quasi-periodic radio bursts observed at JVLA and Ondrejov observatories. We will discuss the implications of these results and the potential roles of QFPs in coronal heating and energy transport.

  4. A study of defects on EUV mask using blank inspection, patterned mask inspection, and wafer inspection

    Energy Technology Data Exchange (ETDEWEB)

    Huh, S.; Ren, L.; Chan, D.; Wurm, S.; Goldberg, K. A.; Mochi, I.; Nakajima, T.; Kishimoto, M.; Ahn, B.; Kang, I.; Park, J.-O.; Cho, K.; Han, S.-I.; Laursen, T.

    2010-03-12

    The availability of defect-free masks remains one of the key challenges for inserting extreme ultraviolet lithography (EUVL) into high volume manufacturing. yet link data is available for understanding native defects on real masks. In this paper, a full-field EUV mask is fabricated to investigate the printability of various defects on the mask. The printability of defects and identification of their source from mask fabrication to handling were studied using wafer inspection. The printable blank defect density excluding particles and patterns is 0.63 cm{sup 2}. Mask inspection is shown to have better sensitivity than wafer inspection. The sensitivity of wafer inspection must be improved using through-focus analysis and a different wafer stack.

  5. Fabrication and performance of nanoscale ultra-smooth programmeddefects for EUV Lithography

    Energy Technology Data Exchange (ETDEWEB)

    Olynick, D.L.; Salmassi, F.; Liddle, J.A.; Mirkarimi, P.B.; Spiller, E.; Baker, S.L.; Robinson, J.

    2005-02-01

    We have developed processes for producing ultra-smooth nanoscale programmed substrate defects that have applications in areas such as thin film growth, EUV lithography, and defect inspection. Particle, line, pit, and scratch defects on the substrates between 40 and 140 nm wide 50 to 90 nm high have been successfully produced using e-beam lithograpy and plasma etching in both Silicon and Hydrosilsequioxane films. These programmed defect substrates have several advantages over those produced previously using gold nanoparticles or polystyrene latex spheres--most notably, the ability to precisely locate features and produce recessed as well as bump type features in ultra-smooth films. These programmed defects were used to develop techniques for film defect mitigation and results are discussed.

  6. Electron irradiation-enhanced water and hydrocarbon adsorption in EUV lithography devices

    Science.gov (United States)

    Al-Ajlony, A.; Kanjilal, A.; Catalfano, M.; Harilal, S. S.; Hassanein, A.

    2014-01-01

    The accumulation of water and hydrocarbons molecules on pure Au smooth surfaces were monitored during 100 eV electron bombardment at various beam current levels. Our studies showed that these low energy electrons could accelerate the physical adsorption processes of the gaseous contaminant molecules on the mirror surface. The 100 eV electron beam was used to provide a rough simulation of the secondary electrons generated during the interaction between the EUV beam at 13.5 nm wavelength and the mirror surface in an EUVL device. The adsorption enhancement phenomenon was explained in accordance with Langmuir's Adsorption model by the increase of the sticking coefficient of adsorbed molecules onto the mirror surface. We have also shown that a positive biasing of the top of mirror surface can be used for preventing the secondary electron emission from the mirror surface.

  7. Electron irradiation-enhanced water and hydrocarbon adsorption in EUV lithography devices

    Energy Technology Data Exchange (ETDEWEB)

    Al-Ajlony, A., E-mail: aalajlon@purdue.edu; Kanjilal, A.; Catalfano, M.; Harilal, S.S.; Hassanein, A.

    2014-01-15

    The accumulation of water and hydrocarbons molecules on pure Au smooth surfaces were monitored during 100 eV electron bombardment at various beam current levels. Our studies showed that these low energy electrons could accelerate the physical adsorption processes of the gaseous contaminant molecules on the mirror surface. The 100 eV electron beam was used to provide a rough simulation of the secondary electrons generated during the interaction between the EUV beam at 13.5 nm wavelength and the mirror surface in an EUVL device. The adsorption enhancement phenomenon was explained in accordance with Langmuir's Adsorption model by the increase of the sticking coefficient of adsorbed molecules onto the mirror surface. We have also shown that a positive biasing of the top of mirror surface can be used for preventing the secondary electron emission from the mirror surface.

  8. High resolution EUV spectroscopy of xenon ions with a compact electron beam ion trap

    Science.gov (United States)

    Ali, Safdar; Nakamura, Nobuyuki

    2017-09-01

    We performed high resolution extreme ultraviolet (EUV) spectroscopy measurements of highly charged xenon ions with a compact electron beam ion trap. The spectra were recorded with a flat-field grazing incidence spectrometer while varying the electron beam energy between 200 and 890 eV. We measured the wavelengths for several lines of Rh-like Xe9+ - Cd-like Xe6+ and Cu-like Xe25+- Se-like Xe20+ in the range of 150-200 Å with an uncertainty of 0.05 Å. Previously, most of these lines have been reported from EBITs with a wavelength uncertainty of 0.2 Å. Additionally, based on the electron beam energy dependence of the observed spectra we tentatively identified three new lines, which were reported as unidentified lines in the previous studies.

  9. The High-Resolution Lightweight Telescope for the EUV (HiLiTE)

    Energy Technology Data Exchange (ETDEWEB)

    Martinez-Galarce, D S; Boerner, P; Soufli, R; De Pontieu, B; Katz, N; Title, A; Gullikson, E M; Robinson, J C; Baker, S L

    2008-06-02

    The High-resolution Lightweight Telescope for the EUV (HiLiTE) is a Cassegrain telescope that will be made entirely of Silicon Carbide (SiC), optical substrates and metering structure alike. Using multilayer coatings, this instrument will be tuned to operate at the 465 {angstrom} Ne VII emission line, formed in solar transition region plasma at {approx}500,000 K. HiLiTE will have an aperture of 30 cm, angular resolution of {approx}0.2 arc seconds and operate at a cadence of {approx}5 seconds or less, having a mass that is about 1/4 that of one of the 20 cm aperture telescopes on the Atmospheric Imaging Assembly (AIA) instrument aboard NASA's Solar Dynamics Observatory (SDO). This new instrument technology thus serves as a path finder to a post-AIA, Explorer-class missions.

  10. EUV microexposures at the ALS using the 0.3-NA MET projectionoptics

    Energy Technology Data Exchange (ETDEWEB)

    Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik; Cain,Jason P.; Denham, Paul; Hoef, Brian; Jackson, Keith; Morlens,Anne-Sophie; Rekawa, Seno; Dean, Kim

    2005-09-01

    The recent development of high numerical aperture (NA) EUV optics such as the 0.3-NA Micro Exposure Tool (MET) optic has given rise to a new class of ultra-high resolution microexposure stations. Once such printing station has been developed and implemented at Lawrence Berkeley National Laboratory's Advanced Light Source. This flexible printing station utilizes a programmable coherence illuminator providing real-time pupil-fill control for advanced EUV resist and mask development. The Berkeley exposure system programmable illuminator enables several unique capabilities. Using dipole illumination out to {sigma}=1, the Berkeley tool supports equal-line-space printing down to 12 nm, well beyond the capabilities of similar tools. Using small-sigma illumination combined with the central obscuration of the MET optic enables the system to print feature sizes that are twice as small as those coded on the mask. In this configuration, the effective 10x-demagnification for equal lines and spaces reduces the mask fabrication burden for ultra-high-resolution printing. The illuminator facilitates coherence studies such as the impact of coherence on line-edge roughness (LER) and flare. Finally the illuminator enables novel print-based aberration monitoring techniques as described elsewhere in these proceedings. Here we describe the capabilities of the new MET printing station and present system characterization results. Moreover, we present the latest printing results obtained in experimental resists. Limited by the availability of high-resolution photoresists, equal line-space printing down to 25 nm has been demonstrated as well as isolated line printing down to 29 nm with an LER of approaching 3 nm.

  11. Automated finishing of diamond turned dies for hard x-ray and EUV optics replication

    Science.gov (United States)

    Beaucamp, Anthony T. H.; Namba, Yoshiharu; Freeman, Richard R.

    2012-10-01

    Ultra-precision diamond turning can deliver very accurate form, often less than 100nm P-V. A possible manufacturing method for thin Wolter type-1 mirrors in hard X-ray space telescopes thus involves generating electroless nickel plated mandrels by diamond turning, before coating them with a reflective film and substrate. However, the surface texture after turning falls far short from the requirements of X-ray and EUV applications. The machining marks need to be removed, with hand polishing still widely employed. There is thus a compelling need for automated finishing of turned dies. A two step finishing method is presented that combines fluid jet and precessed bonnet polishing on a common 7-axis CNC platform. This method is capable of finishing diamond turned electroless nickel plated dies down to 0.28nm rms roughness, while deterministically improving form error down to 30nm P-V. The fluid jet polishing process, which consists of pressurizing water and abrasive particles for delivery through a nozzle, has been specially optimized with a newly designed slurry delivery unit and computer simulations, to remove diamond turning marks without introducing another waviness signature. The precessed bonnet polishing method, which consists of an inflated membrane rotated at an angle from the local normal to the surface and controlled by geometrical position relative to the work-piece, is subsequently employed with a novel control algorithm to deliver scratch-free surface roughness down to 0.28 nm rms. The combination of these two deterministic processes to finish aspheric and freeform dies promises to unlock new frontiers in X-ray and EUV optics fabrication.

  12. Influence of the solar EUV flux on the Martian plasma environment

    Directory of Open Access Journals (Sweden)

    R. Modolo

    2005-02-01

    Full Text Available The interaction of the solar wind with the Martian atmosphere and ionosphere is investigated by using three-dimensional, global and multi-species hybrid simulations. In the present work we focus on the influence of the solar EUV flux on the Martian plasma environment by comparing simulations done for conditions representative of the extrema of the solar cycle. The dynamics of four ionic species (H+, He++, O+, O2+, originating either from the solar wind or from the planetary plasma, is treated fully kinetically in the simulation model in order to characterize the distribution of each component of the plasma, both at solar maximum and at solar minimum. The solar EUV flux controls the ionization frequencies of the exospheric species, atomic hydrogen and oxygen, as well as the density, the temperature, and thus the extension of the exosphere. Ionization by photons and by electron impacts, and the main charge exchange reactions are self-consistently included in the simulation model. Simulation results are in reasonable agreement with the observations made by Phobos-2 and Mars Global Surveyor (MGS spacecraft: 1 the interaction creates a cavity, void of solar wind ions (H+, He++, which depends weakly upon the phase of the solar cycle, 2 the motional electric field of the solar wind flow creates strong asymmetries in the Martian environment, 3 the spatial distribution of the different components of the planetary plasma depends strongly upon the phase of the solar cycle. The fluxes of the escaping planetary ions are computed from the simulated data and results for solar maximum are compared with estimates based on the measurements made by experiments ASPERA and TAUS on board Phobos-2.

  13. The Effects of Oxygen Plasma on the Chemical Composition and Morphology of the Ru Capping Layer of the Extreme Ultraviolet (EUV) Mask Blanks

    Energy Technology Data Exchange (ETDEWEB)

    Belau, Leonid; Park, Jeong Y.; Liang, Ted; Somorjai, Gabor A.

    2008-06-07

    Contamination removal from extreme ultraviolet (EUV) mask surfaces is one of the most important aspects to improve reliability for the next generation of EUV lithography. We report chemical and morphological changes of the ruthenium (Ru) mask surface after oxygen plasma treatment using surface sensitive analytical methods: X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and transmission electron microscopy (TEM). Chemical analysis of the EUV masks shows an increase in the subsurface oxygen concentration, Ru oxidation and surface roughness. XPS spectra at various photoelectron takeoff angles suggest that the EUV mask surface was covered with chemisorbed oxygen after oxygen plasma treatment. It is proposed that the Kirkendall effect is the most plausible mechanism that explains the Ru surface oxidation. The etching rate of the Ru capping layer by oxygen plasma was estimated to be 1.5 {+-} 0.2 {angstrom}/min, based on TEM cross sectional analysis.

  14. High-Density Diffraction Imaging and Non-Imaging Grating Elements for EUV and X-ray Spectroscopy Fabricated by DUV Reduction Photolithography Project

    Data.gov (United States)

    National Aeronautics and Space Administration — There is a need for lightweight high-density (4000+ lines/mm) novel diffraction grating elements in modern telescopes to advance EUV and X-ray astrophysics. Current...

  15. AERONET-OC: Strengths and Weaknesses of a Network for the Validation of Satellite Coastal Radiometric Products

    Science.gov (United States)

    Zibordi, Giuseppe; Holben, Brent; Slutsker, Ilya; Giles, David; D'Alimonte, Davide; Melin, Frederic; Berthon, Jean-Francois; Vandemark, Doug; Feng, Hui; Schuster, Gregory; hide

    2008-01-01

    The Ocean Color component of the Aerosol Robotic Network (AERONET-OC) has been implemented to support long-term satellite ocean color investigations through cross-site consistent and accurate measurements collected by autonomous radiometer systems deployed on offshore fixed platforms. The ultimate purpose of AERONET-OC is the production of standardized measurements performed at different sites with identical measuring systems and protocols, calibrated using a single reference source and method, and processed with the same code. The AERONET-OC primary data product is the normalized water leaving radiance determined at center-wavelengths of interest for satellite ocean color applications, with an uncertainty lower than 5% in the blue-green spectral regions and higher than 8% in the red. Measurements collected at 6 sites counting the northern Adriatic Sea, the Baltic Proper, the Gulf of Finland, the Persian Gulf, and, the northern and southern margins of the Middle Atlantic Bay, have shown the capability of producing quality assured data over a wide range of bio-optical conditions including Case-2 yellow substance- and sedimentdominated waters. This work briefly introduces network elements like: deployment sites, measurement method, instrument calibration, processing scheme, quality-assurance, uncertainties, data archive and products accessibility. Emphases is given to those elements which underline the network strengths (i.e., mostly standardization of any network element) and its weaknesses (i.e., the use of consolidated, but old-fashioned technology). The work also addresses the application of AERONET-OC data to the validation of primary satellite radiometric products over a variety of complex coastal waters and finally provides elements for the identification of new deployment sites most suitable to support satellite ocean color missions.

  16. Detection of anti-tuberculosis activity in some folklore plants by radiometric BACTEC assay.

    Science.gov (United States)

    Gupta, V K; Shukla, C; Bisht, G R S; Saikia, D; Kumar, S; Thakur, R L

    2011-01-01

    The anti-tubercular drugs are less effective because of the emergence of multi-drug resistant (MDR) and extensively drug resistant (XDR) strains of M. tuberculosis, so plants being an alternative source of anti-microbial compounds. The aim of this study was to investigate anti-tuberculosis potential of the plants using Mycobacterium smegmatis as a rapid screening model for detection of anti-mycobacterial activity and further to evaluate the active plants for anti-tuberculosis activity against M. tuberculosis using radiometric BACTEC assay. The 15 plants were screened for anti-mycobacterial activity against M. smegmatis by the disk diffusion assay. The ethanolic extracts of Mallotus philippensis, Vitex negundo, Colebrookea oppositifolia, Rumex hastatus, Mimosa pudica, Kalanchoe integra and Flacourtia ramontchii were active against M. smegmatis in primary screening. The anti-tuberculosis potential was identified in the leaves extracts of Mallotus philippensis by radiometric BACTEC assay. The ethanolic extract of M. philippensis showed anti-tuberculosis activity against virulent and avirulent strains of M. tuberculosis H(37) Rv and M. tuberculosis H(37) Ra with minimum inhibitory concentration 0·25 and 0·125 mg ml(-1), respectively. The inhibition in growth index values of M. tuberculosis was observed in the presence of ethyl acetate fraction at a minimum concentration of 0·05 mg ml(-1). We found that BACTEC radiometric assay is a valuable method for detection of anti-tuberculosis activity of the plant extracts. The results indicate that ethanolic extract and ethyl acetate fraction of M. philippensis exhibited significant anti-mycobacterial activity against M. tuberculosis. These findings provide scientific evidence to support the traditional medicinal uses of M. philippensis and indicate a promising potential of this plant for the development of anti-tuberculosis agent. © 2010 The Authors. Letters in Applied Microbiology © 2010 The Society for Applied

  17. Spatial and radiometric characterization of multi-spectrum satellite images through multi-fractal analysis

    Science.gov (United States)

    Alonso, Carmelo; Tarquis, Ana M.; Zúñiga, Ignacio; Benito, Rosa M.

    2017-03-01

    Several studies have shown that vegetation indexes can be used to estimate root zone soil moisture. Earth surface images, obtained by high-resolution satellites, presently give a lot of information on these indexes, based on the data of several wavelengths. Because of the potential capacity for systematic observations at various scales, remote sensing technology extends the possible data archives from the present time to several decades back. Because of this advantage, enormous efforts have been made by researchers and application specialists to delineate vegetation indexes from local scale to global scale by applying remote sensing imagery. In this work, four band images have been considered, which are involved in these vegetation indexes, and were taken by satellites Ikonos-2 and Landsat-7 of the same geographic location, to study the effect of both spatial (pixel size) and radiometric (number of bits coding the image) resolution on these wavelength bands as well as two vegetation indexes: the Normalized Difference Vegetation Index (NDVI) and the Enhanced Vegetation Index (EVI). In order to do so, a multi-fractal analysis of these multi-spectral images was applied in each of these bands and the two indexes derived. The results showed that spatial resolution has a similar scaling effect in the four bands, but radiometric resolution has a larger influence in blue and green bands than in red and near-infrared bands. The NDVI showed a higher sensitivity to the radiometric resolution than EVI. Both were equally affected by the spatial resolution. From both factors, the spatial resolution has a major impact in the multi-fractal spectrum for all the bands and the vegetation indexes. This information should be taken in to account when vegetation indexes based on different satellite sensors are obtained.

  18. Segmentation of Heritage Building by Means of Geometric and Radiometric Components from Terrestrial Laser Scanning

    Science.gov (United States)

    Aitelkadi, K.; Tahiri, D.; Simonetto, E.; Sebari, I.; Polidori, L.

    2013-07-01

    Nowadays, the terrestrial laser scanning represents an integral source of data for cultural heritage 3D storage and access through digital communication tools. The achievement of 3D models requires the implementation of several tasks such as segmentation. Segmentation is the key step during the point cloud processing where all homogeneous areas are identified, which describe a building facade. Usually, a large part of the segmentation approach focuses on the geometric information contained in the point cloud data by exploiting mathematical representation of a parametric surface. However, due to the complexity of the architecture, such segmentation does not suffice. Henceforth, other approaches turn to the use of color and laser intensity components. Although a variety of algorithms have been developed in this sense, problems of over-segmentation or under-segmentation are observed. In this context, we propose a new approach for point cloud segmentation aiming at a more accurate result. This approach relies on all the components of a colored point - both geometric and radiometric - combining the RGB values, laser intensity and geometric data. Our process begins with the extraction of homogeneous planar segments using the RANSAC algorithm. Next, the result is subjected to a radiometric-based segmentation, first through color similarity as one of the homogeneity criteria of a region growing algorithm, then through the use of intensity similarity for segment fusion. Experiments are performed on a facade presenting an example of Moroccan classical architecture located in Casablanca's Medina. Results show the importance of integrating all point cloud components, both geometric and radiometric.

  19. A novel solution for car traffic control based on radiometric microwave devices

    Science.gov (United States)

    Soldovieri, Francesco; Denisov, Alexander; Speziale, Victor

    2014-05-01

    The significant problem of traffic in big cities, connected with huge and building up quantity of automobile cars, demands for novel strategies, based on nonconventional solutions, in order to improve system traffic control, especially at crossroads. As well known, the usual solution is based on the time relay, which requires the installation of a fixed traffic interval (signal light switching) at a crossroad; this solution is low cost, but does not account for the actual traffic conditions. Therefore, in the recent years, attention is towards to new designs, where the monitoring of the and control of traffic is carried out by using various methods including, optical, the infrared, magnetic, radar tracking, acoustical ones. In this work, we discuss the deployment of high sensitivity radiometric systems and radiometers(sensor) in the microwave range [1, 2]. In fact, the radiometer as "sensor" can provide an always updated information about the car traffic in any weather condition and in absence or low visibility conditions. In fact, the radiometric sensor detects the cars thanks to the different behavior of the car roofs which reflect the cold sky whereas the road asphalt is visible as warm object (at around outside temperature). [1] A. G. Denisov, V. P. Gorishnyak, S. E. Kuzmin et al., "Some experiments concerning resolution of 32 sensors passive 8mm wave imaging system," in Proceedings of the International Symposium on Space Terahertz Technology (ISSTT '09), Charlottesville, Va, USA, April 2009. [2] F. Soldovieri, A. Natale, V. Gorishnyak, A. Pavluchenko, A. Denisov, and L. Chen, "Radiometric Imaging for Monitoring and Surveillance Issues," International Journal of Antennas and Propagation, vol. 2013, Article ID 272561, 8 pages, 2013. doi:10.1155/2013/272561.

  20. Analysis of Sentinel-1 Radiometric Stability and Quality for Land Surface Applications

    Directory of Open Access Journals (Sweden)

    Mohammad El Hajj

    2016-05-01

    Full Text Available Land monitoring using temporal series of Synthetic Aperture Radar (SAR images requires radiometrically well calibrated sensors. In this paper, the radiometric stability of the new SAR Sentinel-1A “S-1A” sensor was first assessed by analyzing temporal variations of the backscattering coefficient (σ° returned from invariant targets. Second, the radiometric level of invariant targets was compared from S-1A and Radarsat-2 “RS-2” data. The results show three stable sub-time series of S-1A data. The first (between 1 October 2014 and 19 March 2015 and third (between 25 November 2015 and 1 February 2016 sub-time series have almost the same mean σ°-values (a difference lower than 0.3 dB. The mean σ°-value of the second sub-time series (between 19 March 2015 and 25 November 2015 is higher than that of the first and the third sub-time series by roughly 0.9 dB. Moreover, our results show that the stability of each sub-time series is better than 0.48 dB. In addition, the results show that S-1A images of the first and third sub-time series appear to be well calibrated in comparison to RS-2 data, with a difference between S-1A and RS-2 lower than 0.3 dB. However, the S-1A images of the second sub-time series have σ°-values that are higher than those from RS-2 by roughly 1 dB.

  1. Initiation and early evolution of a Coronal Mass Ejection on May 13, 2009 from EUV and white-light observations

    Science.gov (United States)

    Reva, Anton; Kuzin, Sergey; Bogachev, Sergey; Ulyanov, Artyom

    In this talk we present results of the observations of a CME, which occurred on May 13, 2009. The most important feature of these observations is that the CME was observed from the very beginning stage (the solar surface) up to the distance of 15 solar radii (R_⊙). Below 2 R_⊙ we used the data from the TESIS EUV telescopes obtained in the Fe 171 Å and He 304 Å lines, and above 2 R_⊙ we used the observations of the LASCO C2 and C3 coronagraphs. Using data of these three instruments, we have studied the evolution of the CME in details. The CME had a curved trajectory -- its helio-latitude decreased with time. The mass ejection originated at a latitudes of about 50(°) and reached the ecliptic plane at a distance of 2.5 R_⊙ from the Sun’s center. The CME velocity and acceleration increased as the CME went away from the Sun. At the distance of 15 R_⊙ from the Sun’s center the CME had a velocity of 250 km/s and an acceleration of 5 m/s(2) . The CME was not associated with a flare, and didn’t have an impulsive acceleration phase. The mass ejection had U-shaped structure which was observed both in the 171 Å images and in white-light. The CME was formed at a distance of about 0.2 -- 0.5 R_⊙ from the Sun’s surface. Observations in the line 304 Å showed that the CME was associated with the erupting prominence, which was located in the lowest part of the U-shaped structure close to the X-point of the magnetic reconnection. The prominence disappeared at the height of 0.4 R_⊙ above the solar limb. Some aspects of these observations can’t be explained in the standard CME model, which predicts that the prominence should be located inside the U-shaped structure, and the CME should be associated with a flare and have an impulsive acceleration phase.

  2. Snapshot imaging spectroscopy of the solar transition region: The Multi-Order Solar EUV Spectrograph (MOSES) sounding rocket mission

    Science.gov (United States)

    Fox, James Lewis

    We have developed a revolutionary spectroscopic technique for solar research in the extreme ultraviolet. This slitless spectrographic technique allows snapshot imaging spectroscopy with data exactly cotemporal and cospectral. I have contributed to the successful realization of an application of this technique in the Multi-Order Solar EUV Spectrograph, MOSES . This instrument launched 2006 Feb 8 as a NASA sounding rocket payload and successfully returned remarkable data of the solar transition region in the He II 304Å spectral line. The unique design of this spectrometer allows the study of transient phenomena in the solar atmosphere, with spatial, spectral, and temporal resolution heretofore unachievable in concert, over a wide field of view. The fundamental concepts behind the MOSES spectrometer are broadly applicable to many solar spectral lines and phenomena and the instrument thus represents a new instrumentation technology. The early fruits of this labor are here reported: the first scientific discovery with the MOSES sounding rocket instrument, our observation of a transition region explosive event, phenomena observed with slit spectrographs since at least 1975, most commonly in lines of C IV (1548Å 1550Å) and Si IV (1393Å, 1402Å). This explosive event is the first seen in He II 304Å. With our novel slitless imaging spectrograph, we are able to see the spatial structure of the event. We observe a bright core expelling two jets that are distinctly non-collinear, in directions that are not anti-parallel, in contradiction to standard models of explosive events, which give collinear jets. The jets have sky-plane velocities of order 75 km s -1 and line-of-sight velocities of +75 km s-1 (blue) and -30 km s-1 (red). The core is a region of high non-thermal doppler broadening, characteristic of explosive events, with maximal broadening 380 km s-1 FWHM. It is possible to resolve the core broadening into red and blue line-of-sight components of maximum doppler

  3. On-Orbit Radiometric Performance of the Landsat 8 ThermalInfrared Sensor

    Directory of Open Access Journals (Sweden)

    Matthew Montanaro

    2014-11-01

    Full Text Available The Thermal Infrared Sensor (TIRS requirements for noise, stability, and uniformity were designed to ensure the radiometric integrity of the data products. Since the launch of Landsat 8 in February 2013, many of these evaluations have been based on routine measurements of the onboard calibration sources, which include a variable-temperature blackbody and a deep space view port. The noise equivalent change in temperature (NEdT of TIRS data is approximately 0.05 K @ 300 K in both bands, exceeding requirements by about a factor of 8 and Landsat 7 ETM+ performance by a factor of 3. Coherent noise is not readily apparent in TIRS data. No apparent change in the detector linearization has been observed. The radiometric stability of the TIRS instrument over the period between radiometric calibrations (about 40 min is less than one count of dark current and the variation in terms of radiance is less than 0.015 \\(W/m^2/sr/\\mu m\\ (or 0.13 K at 300 K, easily meeting the short term stability requirements. Long term stability analysis has indicated a degradation of about 0.2% or less per year. The operational calibration is only updated using the biases taken every orbit, due to the fundamental stability of the instrument. By combining the data from two active detector rows per band, 100% detector operability is maintained for the instrument. No trends in the noise, operability, or short term radiometric stability are apparent over the mission life. The uniformity performance is more difficult to evaluate as scene-varying banding artifacts have been observed in Earth imagery. Analyses have shown that stray light is affecting the recorded signal from the Earth and inducing the banding depending on the content of the surrounding Earth surface. As the stray light effects are stronger in the longer wavelength TIRS band11 (12.0 \\(\\mu m\\, the uniformity is better in the shorter wavelength band10 (10.9 \\(\\mu m\\. Both bands have exceptional noise and

  4. Radiometric and spectral calibrations of the Geostationary Imaging Fourier Transform Spectrometer (GIFTS) using principle component analysis

    Science.gov (United States)

    Tian, Jialin; Smith, William L.; Gazarik, Michael J.

    2008-10-01

    The ultimate remote sensing benefits of the high resolution Infrared radiance spectrometers will be realized with their geostationary satellite implementation in the form of imaging spectrometers. This will enable dynamic features of the atmosphere's thermodynamic fields and pollutant and greenhouse gas constituents to be observed for revolutionary improvements in weather forecasts and more accurate air quality and climate predictions. As an important step toward realizing this application objective, the Geostationary Imaging Fourier Transform Spectrometer (GIFTS) Engineering Demonstration Unit (EDU) was successfully developed under the NASA New Millennium Program, 2000-2006. The GIFTS-EDU instrument employs three focal plane arrays (FPAs), which gather measurements across the long-wave IR (LWIR), short/mid-wave IR (SMWIR), and visible spectral bands. The raw GIFTS interferogram measurements are radiometrically and spectrally calibrated to produce radiance spectra, which are further processed to obtain atmospheric profiles via retrieval algorithms. The radiometric calibration is achieved using internal blackbody calibration references at ambient (260 K) and hot (286 K) temperatures. The absolute radiometric performance of the instrument is affected by several factors including the FPA off-axis effect, detector/readout electronics induced nonlinearity distortions, and fore-optics offsets. The GIFTS-EDU, being the very first imaging spectrometer to use ultra-high speed electronics to readout its large area format focal plane array detectors, operating at wavelengths as large as 15 microns, possessed non-linearity's not easily removable in the initial calibration process. In this paper, we introduce a refined calibration technique that utilizes Principle Component (PC) analysis to compensate for instrument distortions and artifacts remaining after the initial radiometric calibration process, thus, further enhance the absolute calibration accuracy. This method is

  5. A Kalman Approach to Lunar Surface Navigation using Radiometric and Inertial Measurements

    Science.gov (United States)

    Chelmins, David T.; Welch, Bryan W.; Sands, O. Scott; Nguyen, Binh V.

    2009-01-01

    Future lunar missions supporting the NASA Vision for Space Exploration will rely on a surface navigation system to determine astronaut position, guide exploration, and return safely to the lunar habitat. In this report, we investigate one potential architecture for surface navigation, using an extended Kalman filter to integrate radiometric and inertial measurements. We present a possible infrastructure to support this technique, and we examine an approach to simulating navigational accuracy based on several different system configurations. The results show that position error can be reduced to 1 m after 5 min of processing, given two satellites, one surface communication terminal, and knowledge of the starting position to within 100 m.

  6. China radiometric calibration sites ground-based automatic observing systems for CAL/VAL

    Science.gov (United States)

    Zhang, Yong; Li, Xin; Rong, Zhiguo; Zhang, Lijun; Hu, Xiuqing; Ba, Xiutian

    2015-10-01

    A brand-new field observing station has been built up in the China radiometric calibration sites (CRCS) of Dunhuang Gobi for CAL/VAL, include house, observing field, power supply, tower crane, et al. Many automatic observation instruments designed and manufactured by Anhui Institute of Optics and Fine Mechanical Chinese Academy of Sciences were deployed in CRCS Dunhuang Site and introduced deeply in this paper. Followed with the finishing of the basic constructions of the field observing station, it will be an open field test and exchange platform for sharing of test data, research and infrastructure, promote exchanges and cooperation between the relevant disciplines and units.

  7. Titan Density Reconstruction Using Radiometric and Cassini Attitude Control Flight Data

    Science.gov (United States)

    Andrade, Luis G., Jr.; Burk, Thomas A.

    2015-01-01

    This paper compares three different methods of Titan atmospheric density reconstruction for the Titan 87 Cassini flyby. T87 was a unique flyby that provided independent Doppler radiometric measurements on the ground throughout the flyby including at Titan closest approach. At the same time, the onboard accelerometer provided an independent estimate of atmospheric drag force and density during the flyby. These results are compared with the normal method of reconstructing atmospheric density using thruster on-time and angular momentum accumulation. Differences between the estimates are analyzed and a possible explanation for the differences is evaluated.

  8. The plasma line revisited as an aeronomical diagnostic - Suprathermal electrons, solar EUV, electron-gas thermal balance

    Science.gov (United States)

    Carlson, H. C., Jr.; Mantas, G. P.; Wickwar, V. B.

    1977-01-01

    Spectra of plasma wave intensities in the ionosphere over Arecibo are calculated and compared with those from observations of the plasma line intensity. This approach involving directly observed quantities avoids the uncertainties that have plagued past comparisons with photoelectron theory. In addition, careful comparisons in physically relevant segments of the spectra show that any significant increase in the magnitude of the solar EUV flux would lead to a contradiction of the observed plasma wave intensities. Further, the comparisons indicate that resolution of the thermal electron-gas heat balance problem must be sought through better heat transfer rates (e.g., heating and cooling rates, etc.), rather than in the solar EUV. This approach utilizes more fully the potential of the plasma line experiment as a diagnostic tool for aeronomical studies, (e.g., photoelectrons, auroral secondaries, ionosphere-modification experiments, etc.).

  9. Effect of prepulse laser wavelength on EUV emission from CO2 reheated laser-produced Sn plasma

    Science.gov (United States)

    Freeman, J. R.; Harilal, S. S.; Hassanein, A.; Rice, B.

    2013-03-01

    We investigated the role of prepulse laser wavelength on extreme-ultraviolet (EUV) emission and ionic debris generation. A 6 ns Nd:YAG laser operating at 266 nm was used to generate a pre-plasma that was then reheated by a 35 ns CO2 laser pumping pulse at 10.6 μm. At an ideal delay time, improvement in EUV conversion efficiency (CE) of up to 30 % was seen compared to the CE from the pumping pulse alone. It was also shown that the most probable Sn ion kinetic energies were reduced significantly with the use of a prepulse, however, ion fluence increased. These results were compared to those obtained using a 1064 nm prepulse.

  10. Mesoscale, Radiometrically Referenced, Multi-Temporal Hyperspectral Data for Co2 Leak Detection by Locating Spatial Variation of Biophysically Relevant Parameters

    Science.gov (United States)

    McCann, Cooper Patrick

    Low-cost flight-based hyperspectral imaging systems have the potential to provide valuable information for ecosystem and environmental studies as well as aide in land management and land health monitoring. This thesis describes (1) a bootstrap method of producing mesoscale, radiometrically-referenced hyperspectral data using the Landsat surface reflectance (LaSRC) data product as a reference target, (2) biophysically relevant basis functions to model the reflectance spectra, (3) an unsupervised classification technique based on natural histogram splitting of these biophysically relevant parameters, and (4) local and multi-temporal anomaly detection. The bootstrap method extends standard processing techniques to remove uneven illumination conditions between flight passes, allowing the creation of radiometrically self-consistent data. Through selective spectral and spatial resampling, LaSRC data is used as a radiometric reference target. Advantages of the bootstrap method include the need for minimal site access, no ancillary instrumentation, and automated data processing. Data from a flight on 06/02/2016 is compared with concurrently collected ground based reflectance spectra as a means of validation achieving an average error of 2.74%. Fitting reflectance spectra using basis functions, based on biophysically relevant spectral features, allows both noise and data reductions while shifting information from spectral bands to biophysical features. Histogram splitting is used to determine a clustering based on natural splittings of these fit parameters. The Indian Pines reference data enabled comparisons of the efficacy of this technique to established techniques. The splitting technique is shown to be an improvement over the ISODATA clustering technique with an overall accuracy of 34.3/19.0% before merging and 40.9/39.2% after merging. This improvement is also seen as an improvement of kappa before/after merging of 24.8/30.5 for the histogram splitting technique

  11. Comparison of Helioseismic Far-Side Active Region Detections with STEREO Far-Side EUV Observations of Solar Activity

    Science.gov (United States)

    Liewer, P. C.; Qiu, J.; Lindsey, C.

    2017-10-01

    Seismic maps of the Sun's far hemisphere, computed from Doppler data from the Helioseismic and Magnetic Imager (HMI) on board the Solar Dynamics Observatory (SDO) are now being used routinely to detect strong magnetic regions on the far side of the Sun (http://jsoc.stanford.edu/data/farside/). To test the reliability of this technique, the helioseismically inferred active region detections are compared with far-side observations of solar activity from the Solar TErrestrial RElations Observatory (STEREO), using brightness in extreme-ultraviolet light (EUV) as a proxy for magnetic fields. Two approaches are used to analyze nine months of STEREO and HMI data. In the first approach, we determine whether new large east-limb active regions are detected seismically on the far side before they appear Earth side and study how the detectability of these regions relates to their EUV intensity. We find that while there is a range of EUV intensities for which far-side regions may or may not be detected seismically, there appears to be an intensity level above which they are almost always detected and an intensity level below which they are never detected. In the second approach, we analyze concurrent extreme-ultraviolet and helioseismic far-side observations. We find that 100% (22) of the far-side seismic regions correspond to an extreme-ultraviolet plage; 95% of these either became a NOAA-designated magnetic region when reaching the east limb or were one before crossing to the far side. A low but significant correlation is found between the seismic signature strength and the EUV intensity of a far-side region.

  12. Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

    Science.gov (United States)

    Powell, Forbes R.; Drake, Virginia A.; Sandel, Bill R.; Mitchell, Donald G.

    1994-09-01

    This paper briefly reviews the more traditional materials that have been used for Soft X-Ray (SXR) and Extreme Ultraviolet (EUV) filters and then discusses several applications where new multilayer combinations of materials are being employed. The new applications include projection lithography and the detection of Energetic Neutral Atom (ENA) populations from spacecraft. Also briefly discussed is the use of polyimides for spacecraft filters.

  13. Validation of the Earth atmosphere models using the EUV solar occultation data from the CORONAS and PROBA 2 instruments

    Science.gov (United States)

    Slemzin, Vladimir; Kuzin, Sergey; Berghmans, David; Pertsov, Andrey; Dominique, Marie; Ulyanov, Artyom; Gaikovich, Konstantin

    Absorption in the atmosphere below 500 km results in attenuation of the solar EUV flux, variation of its spectra and distortion of solar images acquired by solar EUV instruments operating on LEO satellites even on solar synchronous orbits. Occultation measurements are important for planning of solar observations from these satellites, and can be used for monitoring the upper atmosphere as well as for studying its response to the solar activity. We present the results of the occultation measurements of the solar EUV radiation obtained by the CORONAS-F/SPIRIT telescope at high solar activity (2002), by the CORONAS-Photon/TESIS telescope at low activity (2009), and by the SWAP telescope and LYRA radiometer onboard the PROBA 2 satellite at moderate activity (2010). The measured attenuation profiles and the retrieved linear extinction coefficients at the heights 200-500 km are compared with simulations by the NRLMSIS-00 and DTM2013 atmospheric models. It was shown that the results of simulations by the DTM2013 model are well agreed with the data of measurements at all stages of solar activity and in presence of the geomagnetic storm, whereas the results of the NRLMSISE-00 model significantly diverge from the measurements, in particular, at high and low activity. The research leading to these results has received funding from the European Union’s Seventh Programme for Research, Technological Development and Demonstration under Grant Agreement “eHeroes” (project No.284461, www.eheroes.eu).

  14. The EUV-observatory TESIS on board Coronas-Photon: scientific goals and initial plan of observations

    Science.gov (United States)

    Bogachev, Sergey

    The TESIS a EUV-observatory for solar research from space will be launched in 2008 September on board the satellite Coronas-Photon from cosmodrome Plesetsk. TESIS is a project of Lebedev Physical Institute of Russian Academy of Science with contribution from Space Research Center of Polish Academy of Science (the spectrometer SphinX). The experiment will focus on quasi-monochromatic imaging of the Sun and XUV spectroscopy of solar plasma. The scientific payload of TESIS contains five instruments: (1) Bragg crystal spectroheliometer for Sun monochromatic imaging in the line MgXII 8.42 A, (2) the normal-incidence Herschelian EUV telescopes with a resolution of 1.7 arc sec operated in lines FeXXII 133 A, FeIX 171 A and HeII 304 A, (3) the EUV imaging spectrometer, (4) the wide-field Ritchey-Chretien coronograph and (5) the X-ray spectrometer SphinX. The TESIS will focus on coordinated study of solar activity from the transition region to the outer corona up to 4 solar radii in wide temperature range from 5*104 to 2*107 K. We describe the scientific goals of the TESIS and its initial plan of observations.

  15. Solar wind- and EUV-dependent models for the shapes of the Martian plasma boundaries based on Mars Express measurements

    Science.gov (United States)

    Ramstad, Robin; Barabash, Stas; Futaana, Yoshifumi; Holmström, Mats

    2017-07-01

    The long operational life (2003-present) of Mars Express (MEX) has allowed the spacecraft to make plasma measurements in the Martian environment over a wide range of upstream conditions. We have analyzed ˜7000 MEX orbits, covering three orders of magnitude in solar wind dynamic pressure, with data from the on board Analyzer of Space Plasmas and Energetic Particles (ASPERA-3) package, mapping the locations where MEX crosses the main plasma boundaries, induced magnetosphere boundary (IMB), ionosphere boundary (IB), and bow shock (BS). A coincidence scheme was employed, where data from the Ion Mass Analyzer (IMA) and the Electron Spectrometer (ELS) had to agree for a positive boundary identification, which resulted in crossings from 1083 orbit segments that were used to create dynamic two-parameter (solar wind density, nsw, and velocity vsw) dependent global dynamic models for the IMB, IB, and BS. The modeled response is found to be individual to each boundary. The IMB scales mainly dependent on solar wind dynamic pressure and EUV intensity. The BS location closely follows the location of the IMB at the subsolar point, though under extremely low nsw and vsw the BS assumes a more oblique shape. The IB closely follows the IMB on the dayside and changes its nightside morphology with different trends for nsw and vsw. We also investigate the influence of extreme ultraviolet (EUV) radiation on the IMB and BS, finding that increased EUV intensity expands both boundaries.

  16. Experimental and theoretical study on emission spectra of a nitrogen photoionized plasma induced by intense EUV pulses

    Directory of Open Access Journals (Sweden)

    Saber Ismail

    2018-01-01

    Full Text Available Spectral lines of low-temperature nitrogen photoionized plasma were investigated. The photoionized plasma was created in the result of irradiation N2 gas using laser plasma EUV radiation pulses. The source was based on a 10J/10ns Nd:YAG (λ = 1064 nm laser system and a gas puff target. The EUV radiation pulses were collected and focused using a grazing incidence multifoil EUV collector. The emission spectra were measured in the ultraviolet and visible (UV/Vis range. It was found that the plasma emission lines in the lower region of the UV range are relativley weak. Nonetheless, a part of the spectra contains strong molecular band in the 300 - 430 nm originated from second positive and first negative systems band transitions of nitrogen. These molecular band transitions were identified using a code for study the diatomic molecules, LIFBASE. The vibrational band of Δv = 0 and ±1 transitions were significantly populated than of that with Δv = ±2 and 3 transitions. A comparison of the calculated and measured spectrum is presented. With an assumption of a local thermodynamic equilibrium (LTE, the vibrational temperature was determined from the integrated band intensities with the help of the Boltzmann plot method and compared to the temperature predicted by SPECAIR and LIFBASE simulations. A summary of the results and the variations in the vibrational temperatures was discussed.

  17. Measuring Solar Doppler Velocities in the He II 30.38 nm Emission Using the EUV Variability Experiment (EVE)

    Science.gov (United States)

    Chamberlin, Phillip Clyde

    2016-01-01

    The EUV Variability Experiment (EVE) onboard the Solar Dynamics Observatory has provided unprecedented measurements of the solar EUV irradiance at high temporal cadence with good spectral resolution and range since May 2010. The main purpose of EVE was to connect the Sun to the Earth by providing measurements of the EUV irradianceas a driver for space weather and Living With a Star studies, but after launch the instrument has demonstrated the significance of its measurements in contributing to studies looking at the sources of solar variability for pure solar physics purposes. This paper expands upon previous findings that EVE can in fact measure wavelength shifts during solar eruptive events and therefore provide Doppler velocities for plasma at all temperatures throughout the solar atmosphere from the chromosphere to hot flaring temperatures. This process is not straightforward as EVE was not designed or optimized for these types of measurements. In this paper we describe the many detailed instrumental characterizations needed to eliminate the optical effects in order to provide an absolute baseline for the Doppler shift studies. An example is given of a solar eruption on 7 September 2011 (SOL2011-09-07), associated with an X1.2 flare, where EVE Doppler analysis shows plasma ejected from the Sun in the He II 30.38 nm emission at a velocity of almost 120 km s(exp -1) along the line-of-sight.

  18. CORONAL MAGNETIC FIELDS DERIVED FROM SIMULTANEOUS MICROWAVE AND EUV OBSERVATIONS AND COMPARISON WITH THE POTENTIAL FIELD MODEL

    Energy Technology Data Exchange (ETDEWEB)

    Miyawaki, Shun; Nozawa, Satoshi [Department of Science, Ibaraki University, Mito, Ibaraki 310-8512 (Japan); Iwai, Kazumasa; Shibasaki, Kiyoto [Nobeyama Solar Radio Observatory, National Astronomical Observatory of Japan, Minamimaki, Nagano 384-1305 (Japan); Shiota, Daikou, E-mail: shunmi089@gmail.com [Solar-Terrestrial Environment Laboratory, Nagoya University, Nagoya, Aichi 464-8601 (Japan)

    2016-02-10

    We estimated the accuracy of coronal magnetic fields derived from radio observations by comparing them to potential field calculations and the differential emission measure measurements using EUV observations. We derived line-of-sight components of the coronal magnetic field from polarization observations of the thermal bremsstrahlung in the NOAA active region 11150, observed around 3:00 UT on 2011 February 3 using the Nobeyama Radioheliograph at 17 GHz. Because the thermal bremsstrahlung intensity at 17 GHz includes both chromospheric and coronal components, we extracted only the coronal component by measuring the coronal emission measure in EUV observations. In addition, we derived only the radio polarization component of the corona by selecting the region of coronal loops and weak magnetic field strength in the chromosphere along the line of sight. The upper limits of the coronal longitudinal magnetic fields were determined as 100–210 G. We also calculated the coronal longitudinal magnetic fields from the potential field extrapolation using the photospheric magnetic field obtained from the Helioseismic and Magnetic Imager. However, the calculated potential fields were certainly smaller than the observed coronal longitudinal magnetic field. This discrepancy between the potential and the observed magnetic field strengths can be explained consistently by two reasons: (1) the underestimation of the coronal emission measure resulting from the limitation of the temperature range of the EUV observations, and (2) the underestimation of the coronal magnetic field resulting from the potential field assumption.

  19. Experimental and theoretical study on emission spectra of a nitrogen photoionized plasma induced by intense EUV pulses

    Science.gov (United States)

    Saber, Ismail; Bartnik, Andrzej; Skrzeczanowski, Wojciech; Wachulak, Przemyslaw; Jarocki, Roman; Fiedorowicz, Henryk; Limpouch, Jiri

    2018-01-01

    Spectral lines of low-temperature nitrogen photoionized plasma were investigated. The photoionized plasma was created in the result of irradiation N2 gas using laser plasma EUV radiation pulses. The source was based on a 10J/10ns Nd:YAG (λ = 1064 nm) laser system and a gas puff target. The EUV radiation pulses were collected and focused using a grazing incidence multifoil EUV collector. The emission spectra were measured in the ultraviolet and visible (UV/Vis) range. It was found that the plasma emission lines in the lower region of the UV range are relativley weak. Nonetheless, a part of the spectra contains strong molecular band in the 300 - 430 nm originated from second positive and first negative systems band transitions of nitrogen. These molecular band transitions were identified using a code for study the diatomic molecules, LIFBASE. The vibrational band of Δv = 0 and ±1 transitions were significantly populated than of that with Δv = ±2 and 3 transitions. A comparison of the calculated and measured spectrum is presented. With an assumption of a local thermodynamic equilibrium (LTE), the vibrational temperature was determined from the integrated band intensities with the help of the Boltzmann plot method and compared to the temperature predicted by SPECAIR and LIFBASE simulations. A summary of the results and the variations in the vibrational temperatures was discussed.

  20. Combined effects of pre-pulsing and target geometry on efficient EUV production from laser produced plasma experiments and modeling

    Science.gov (United States)

    Hassanein, A.; Sizyuk, T.; Sizyuk, V.; Harilal, S. S.

    2011-04-01

    Laser produced plasmas (LPP) is currently a promising source of an efficient extreme ultraviolet (EUV) photon source production for advanced lithography. Optimum laser pulse parameters with adjusted wavelength, energy, and duration for simple planar or spherical tin target can provide 2-3% conversion efficiency (CE) in laboratory experiments. These values are also in good agreement with modeling results. Additional effects such as targets with complex geometry and tin-doped targets using pre-pulsing of laser beams can significantly increase CE. Recent studies showed that such improvements in LPP system are due to reduction in laser energy losses by decreasing photons transmission (higher harmonic of Nd:YAG laser) or photons reflection (for CO2 laser). Optimization of target heating using pre-pulses or ablating low-density and nanoporous tin oxide can further improve LLP sources by creating more efficient plasma plumes and as a result increasing CE, the most important parameter for EUV sources. The second important challenge in developing LPP devices is to decrease fast ions and target debris to protect the optical collection system and increase its lifetime. We investigated the combined effects of pre-pulsing with various parameters and different target geometries on EUV conversion efficiency and on energetic ions production. The much higher reflectivity of CO2 laser from a tin target leads to two possible ways for system improvement using pre-pulses with shorter laser wavelengths or using more complex targets geometries with special grooves as developed previously by the authors.

  1. Evolution analysis of EUV radiation from laser-produced tin plasmas based on a radiation hydrodynamics model.

    Science.gov (United States)

    Su, M G; Min, Q; Cao, S Q; Sun, D X; Hayden, P; O'Sullivan, G; Dong, C Z

    2017-03-23

    One of fundamental aims of extreme ultraviolet (EUV) lithography is to maximize brightness or conversion efficiency of laser energy to radiation at specific wavelengths from laser produced plasmas (LPPs) of specific elements for matching to available multilayer optical systems. Tin LPPs have been chosen for operation at a wavelength of 13.5 nm. For an investigation of EUV radiation of laser-produced tin plasmas, it is crucial to study the related atomic processes and their evolution so as to reliably predict the optimum plasma and experimental conditions. Here, we present a simplified radiation hydrodynamic model based on the fluid dynamic equations and the radiative transfer equation to rapidly investigate the evolution of radiation properties and dynamics in laser-produced tin plasmas. The self-absorption features of EUV spectra measured at an angle of 45° to the direction of plasma expansion have been successfully simulated and explained, and the evolution of some parameters, such as the plasma temperature, ion distribution and density, expansion size and velocity, have also been evaluated. Our results should be useful for further understanding of current research on extreme ultraviolet and soft X-ray source development for applications such as lithography, metrology and biological imaging.

  2. Analysis of Properties of Reflectance Reference Targets for Permanent Radiometric Test Sites of High Resolution Airborne Imaging Systems

    Directory of Open Access Journals (Sweden)

    Eero Ahokas

    2010-08-01

    Full Text Available Reliable and optimal exploitation of rapidly developing airborne imaging methods requires geometric and radiometric quality assurance of production systems in operational conditions. Permanent test sites are the most promising approach for cost-efficient performance assessment. Optimal construction of permanent radiometric test sites for high resolution airborne imaging systems is an unresolved issue. The objective of this study was to assess the performance of commercially available gravels and painted and unpainted concrete targets for permanent, open-air radiometric test sites under sub-optimal climate conditions in Southern Finland. The reflectance spectrum and reflectance anisotropy and their stability were characterized during the summer of 2009. The management of reflectance anisotropy and stability were shown to be the key issues for better than 5% reflectance accuracy.

  3. RF tests on the Etam Standard C antenna

    Science.gov (United States)

    Price, R.

    1982-05-01

    Radiometric measurements on the Etam Standard C antenna are described in this paper. Gain-to-noise temperature ratio (G/T), receive and transmit gain, noise temperature, return loss, and port-to-port isolation were measured, and communication and tracking patterns taken. Because of the very low spectral flux densities in the 14/11-GHz bands, it was necessary to use radiometric methods for measuring G/T, gain and temperature. Although in Standard A antennas Y-factors range between 3 and 6 dB, in Standard C antennas they are only 0.4-0.5 dB. Thus, errors and uncertainties, which are negligible in a 6/4-GHz test, become major at 14/11 GHz. This difficulty was overcome at Etam by applying a refinement in switched radiometry, which resulted in the collection of a large amount of useful data.

  4. METHOD OF RADIOMETRIC DISTORTION CORRECTION OF MULTISPECTRAL DATA FOR THE EARTH REMOTE SENSING

    Directory of Open Access Journals (Sweden)

    A. N. Grigoriev

    2015-07-01

    Full Text Available The paper deals with technologies of ground secondary processing of heterogeneous multispectral data. The factors of heterogeneous data include uneven illumination of objects on the Earth surface caused by different properties of the relief. A procedure for the image restoration of spectral channels by means of terrain distortion compensation is developed. The object matter of this paper is to improve the quality of the results during image restoration of areas with large and medium landforms. Methods. Researches are based on the elements of the digital image processing theory, statistical processing of the observation results and the theory of multi-dimensional arrays. Main Results. The author has introduced operations on multidimensional arrays: concatenation and elementwise division. Extended model description for input data about the area is given. The model contains all necessary data for image restoration. Correction method for multispectral data radiometric distortions of the Earth remote sensing has been developed. The method consists of two phases: construction of empirical dependences for spectral reflectance on the relief properties and restoration of spectral images according to semiempirical data. Practical Relevance. Research novelty lies in developme nt of the application theory of multidimensional arrays with respect to the processing of multispectral data, together with data on the topography and terrain objects. The results are usable for development of radiometric data correction tools. Processing is performed on the basis of a digital terrain model without carrying out ground works connected with research of the objects reflective properties.

  5. SENSOR CORRECTION AND RADIOMETRIC CALIBRATION OF A 6-BAND MULTISPECTRAL IMAGING SENSOR FOR UAV REMOTE SENSING

    Directory of Open Access Journals (Sweden)

    J. Kelcey

    2012-07-01

    Full Text Available The increased availability of unmanned aerial vehicles (UAVs has resulted in their frequent adoption for a growing range of remote sensing tasks which include precision agriculture, vegetation surveying and fine-scale topographic mapping. The development and utilisation of UAV platforms requires broad technical skills covering the three major facets of remote sensing: data acquisition, data post-processing, and image analysis. In this study, UAV image data acquired by a miniature 6-band multispectral imaging sensor was corrected and calibrated using practical image-based data post-processing techniques. Data correction techniques included dark offset subtraction to reduce sensor noise, flat-field derived per-pixel look-up-tables to correct vignetting, and implementation of the Brown- Conrady model to correct lens distortion. Radiometric calibration was conducted with an image-based empirical line model using pseudo-invariant features (PIFs. Sensor corrections and radiometric calibration improve the quality of the data, aiding quantitative analysis and generating consistency with other calibrated datasets.

  6. Radiometric research in soils cultivated with sugar cane in Pernambuco - Brazil

    Energy Technology Data Exchange (ETDEWEB)

    Santos Junior, Otavio P. dos; Santos Junior, Jose A. dos; Amaral, Romilton dos S.; Menezes, Romulo S.C.; Santos, Josineide M.N. dos; Silva, Arykerne N.C. da; Fernandez, Zahily H.; Rojas, Lino A.V.; Damascena, Kennedy F.R.; Silva, Rafael R.; Milan, Marvic O., E-mail: rodriguesrs19@gmail.com, E-mail: otavio.santos@vitoria.ifpe.edu.br, E-mail: lino.valcarcel@ufpe.br [Universidade Federal de Pernambuco (UFPE), Recife, PE (Brazil). Departamento de Energia Nuclear; Instituto Federal de Educacao, Ciencia e Tecnologia de Pernambuco (IFPE), Vitoria de Santo Antao, PE (Brazil); Centro de Aplicaciones Tecnologicas y Desarrollo Nuclear, La Habana (Cuba); Instituto Superior de Tecnologias y Ciencias Aplicadas Quinta de los Molinos, La Habana (Cuba)

    2017-11-01

    The state of Pernambuco is representative of Northeastern Brazil, with respect to the variability of climatic conditions, soil types, soil cover, as well as land use. The state is subdivided into five regions: Recife Metropolitan Region, Sao Francisco, Sertao, Agreste and Zona da Mata (Atlantic Forest Region). Each region presents peculiar climatic and economic activities. The Atlantic Forest region, the focus of this study, presents a humid tropical climate and is characterized by large farms and the monoculture of sugarcane. In this scenario, a radioecological investigation was carried out to determine the radiometric potential from the analysis of forty-five soil samples, collected in five soil profiles, to a depth of 60 cm. A non-destructive method was adopted for the radiometric analysis, using High- Resolution Gamma Spectrometry with an HPGe-Be type detector. This method allowed the determination of specific activities of U-238, Th-232 and K-40 in the soil samples. The results will be used as a basis for the determination of a reference value for the natural radioactivity of these soils, to predict the existence of possible environmental impacts resulting from their use for the cultivation of sugar cane, as well as to contribute to guarantee the safety of food crops cultivated in this region. (author)

  7. The importance of geoprocessing tools in radiometric monitoring of large areas

    Energy Technology Data Exchange (ETDEWEB)

    Dias, Danila Carrijo da Silva [Universidade Federal de Alfenas (UNIFAL), Pocos de Caldas, MG (Brazil); Comissao Nacional de Energia Nuclear (LAPOC/CNEN-MG), Pocos de Caldas, MG (Brazil). Lab. de Pocos de Caldas; Silva, Nivaldo Carlos da; Alberti, Heber Luiz Caponi; Guerrero, Eder Tadeu Zenun, E-mail: ncsilva@cnen.gov.b, E-mail: heber@cnen.gov.b, E-mail: edertzg@cnen.gov.b [Comissao Nacional de Energia Nuclear (LAPOC/CNEN-MG), Pocos de Caldas, MG (Brazil). Lab. de Pocos de Caldas

    2011-07-01

    Throughout history, the natural tendency of men to physically characterize their different surroundings has played an important role on the evolution of societies. Today, that tendency combined to the development of computer technologies, has allowed the accelerated growth of the Geographical Information Systems, which permits the analysis and manipulation of spatial data from diverse sources, producing geo referenced databases. The gamma radiation, one of the main contributors of human exposure to natural radiation, is known for its high penetration energy. Today, the environmental gamma radiation is measured through radiometric tracking mobile units, allowing large scale samplings and precise assessments. As a geo processing case study, a radiometric monitoring work was conducted in the town of Aguas da Prata-SP using a tracking mobile system, composed by a scintillator detector, a GPS and a computer, all installed in a vehicle. The data made of collected points and their respective doses and geographical references were captured and stored in a computer software and then inserted and treated in a GIS environment. After a cartographic base was created using a digitalized map of Aguas da Prata, the sampled points were plotted and interpolated with the cartographic base, producing two maps that demonstrate the tracking route and the gamma radiation dose range throughout the monitored area. Geo processing tools have shown great efficiency in this study, allowing agile manipulation and management of a large quantity of data, thus promoting a spatial analysis of natural radiation levels in the studied region. (author)

  8. Comparison of digital radiometric features between radicular cysts and periapical granulomas

    Energy Technology Data Exchange (ETDEWEB)

    Jin, Yeon Hwa; Lee, Keon Il [Dept. of Oral and Maxillofacial Radiology, College of Dentistry, Wankwang University, Yongin (Korea, Republic of)

    1999-02-15

    The purpose of this study was to investigate whether a radiometric analysis of radicular cysts and periapical granulomas is useful in the differential diagnosis. In this experiment, twenty-nine periapical radiographs of the radicular cyst and those periapical granuloma were used. The periapical radiography was taken by intraoral paralleling device. The X-ray film was digitized and digitally filtered to reduce film-grain noise. We estimated density difference of the inner/outer area, roundness or circularity, bone profile or scan line of the margin and cumulative percentage frequency curve of radicular cyst and periapical granuloma.The obtained results were as follows ; 1. The differences in density between ROIs of inner and outer area of radicular cysts were smaller than those of periapical granulomas.2. The equivalent circular diameter was over 6.3 mm, there was significant difference between periapical cyst and periapical granuloma.3. In differential diagnosis of radicular cyst and periapical granuloma using bone profile, sensitivity, spicificity and accuracy were considerably high (0.83, 0.86, 0.86) respectively.4. Cumulative percentage frequency curve of the radicular cyst was closer to the pseudo-pixel value of 50 than average curve, whereas periapical granuloma was closer to that of 0. Hence we conclude that digital radiometric features might be useful in the differential diagnosis between radicular cyst and periapical granuloma.

  9. Analysing the suitability of radiometrically calibrated full-waveform lidar data for delineating Alpine rock glaciers

    Directory of Open Access Journals (Sweden)

    A. Roncat

    2013-10-01

    Full Text Available With full-waveform (FWF lidar systems becoming increasingly available from different commercial manufacturers, the possibility for extracting physical parameters of the scanned surfaces in an area-wide sense, as addendum to their geometric representation, has risen as well. The mentioned FWF systems digitize the temporal profiles of the transmitted laser pulse and of its backscattered echoes, allowing for a reliable determination of the target distance to the instrument and of physical target quantities by means of radiometric calibration, one of such quantities being the diffuse Lambertian reflectance. The delineation of glaciers is a time-consuming task, commonly performed manually by experts and involving field trips as well as image interpretation of orthophotos, digital terrain models and shaded reliefs. In this study, the diffuse Lambertian reflectance was compared to the glacier outlines mapped by experts. We start the presentation with the workflow for analysis of FWF data, their direct georeferencing and the calculation of the diffuse Lambertian reflectance by radiometric calibration; this workflow is illustrated for a large FWF lidar campaign in the Ötztal Alps (Tyrol, Austria, operated with an Optech ALTM 3100 system. The geometric performance of the presented procedure was evaluated by means of a relative and an absolute accuracy assessment using strip differences and orthophotos, resp. The diffuse Lambertian reflectance was evaluated at two rock glaciers within the mentioned lidar campaign. This feature showed good performance for the delineation of the rock glacier boundaries, especially at their lower parts.

  10. Analysing the suitability of radiometrically calibrated full-waveform lidar data for delineating Alpine rock glaciers

    Science.gov (United States)

    Roncat, A.; Wieser, M.; Briese, C.; Bollmann, E.; Sailer, R.; Klug, C.; Pfeifer, N.

    2013-10-01

    With full-waveform (FWF) lidar systems becoming increasingly available from different commercial manufacturers, the possibility for extracting physical parameters of the scanned surfaces in an area-wide sense, as addendum to their geometric representation, has risen as well. The mentioned FWF systems digitize the temporal profiles of the transmitted laser pulse and of its backscattered echoes, allowing for a reliable determination of the target distance to the instrument and of physical target quantities by means of radiometric calibration, one of such quantities being the diffuse Lambertian reflectance. The delineation of glaciers is a time-consuming task, commonly performed manually by experts and involving field trips as well as image interpretation of orthophotos, digital terrain models and shaded reliefs. In this study, the diffuse Lambertian reflectance was compared to the glacier outlines mapped by experts. We start the presentation with the workflow for analysis of FWF data, their direct georeferencing and the calculation of the diffuse Lambertian reflectance by radiometric calibration; this workflow is illustrated for a large FWF lidar campaign in the Ötztal Alps (Tyrol, Austria), operated with an Optech ALTM 3100 system. The geometric performance of the presented procedure was evaluated by means of a relative and an absolute accuracy assessment using strip differences and orthophotos, resp. The diffuse Lambertian reflectance was evaluated at two rock glaciers within the mentioned lidar campaign. This feature showed good performance for the delineation of the rock glacier boundaries, especially at their lower parts.

  11. Simultaneous retrieval of aerosol and surface optical properties from combined airborne- and ground-based direct and diffuse radiometric measurements

    Directory of Open Access Journals (Sweden)

    C. K. Gatebe

    2010-03-01

    Full Text Available This paper presents a new method for simultaneously retrieving aerosol and surface reflectance properties from combined airborne and ground-based direct and diffuse radiometric measurements. The method is based on the standard Aerosol Robotic Network (AERONET method for retrieving aerosol size distribution, complex index of refraction, and single scattering albedo, but modified to retrieve aerosol properties in two layers, below and above the aircraft, and parameters on surface optical properties from combined datasets (Cloud Absorption Radiometer (CAR and AERONET data. A key advantage of this method is the inversion of all available spectral and angular data at the same time, while accounting for the influence of noise in the inversion procedure using statistical optimization. The wide spectral (0.34–2.30 μm and angular range (180° of the CAR instrument, combined with observations from an AERONET sunphotometer, provide sufficient measurement constraints for characterizing aerosol and surface properties with minimal assumptions. The robustness of the method was tested on observations made during four different field campaigns: (a the Southern African Regional Science Initiative 2000 over Mongu, Zambia, (b the Intercontinental Transport Experiment-Phase B over Mexico City, Mexico (c Cloud and Land Surface Interaction Campaign over the Atmospheric Radiation Measurement (ARM Central Facility, Oklahoma, USA, and (d the Arctic Research of the Composition of the Troposphere from Aircraft and Satellites (ARCTAS over Elson Lagoon in Barrow, Alaska, USA. The four areas are dominated by different surface characteristics and aerosol types, and therefore provide good test cases for the new inversion method.

  12. Multi-model radiometric slope correction of SAR images of complex terrain using a two-stage semi-empirical approach

    NARCIS (Netherlands)

    Hoekman, D.H.; Reiche, J.

    2015-01-01

    Practical approaches for the implementation of terrain type dependent radiometric slope correction for SAR data are introduced. Radiometric slope effects are modelled as the products of two models. The first is a simple physical model based on the assumption of a uniform opaque layer of isotropic

  13. Atomic structure calculations and identification of EUV and SXR spectral lines in Sr XXX

    Science.gov (United States)

    Goyal, Arun; Khatri, Indu; Aggarwal, Sunny; Singh, A. K.; Mohan, Man

    2015-08-01

    We report an extensive theoretical study of atomic data for Sr XXX in a wide range with L-shell electron excitations to the M-shell. We have calculated energy levels, wave-function compositions and lifetimes for lowest 113 fine structure levels and wavelengths of an extreme Ultraviolet (EUV) and soft X-ray (SXR) transitions. We have employed multi-configuration Dirac Fock method (MCDF) approach within the framework of Dirac-Coulomb Hamiltonian including quantum electrodynamics (QED) and Breit corrections. We have also presented the radiative data for electric and magnetic dipole (E1, M1) and quadrupole (E2, M2) transitions from the ground state. We have made comparisons with available energy levels compiled by NIST and achieve good agreement. But due to inadequate data in the literature, analogous relativistic distorted wave calculations have also been performed using flexible atomic code (FAC) to assess the reliability and accuracy of our results. Additionally, we have provided new atomic data for Sr XXX which is not published elsewhere in the literature and we believe that our results may be beneficial in fusion plasma research and astrophysical investigations and applications.

  14. Closed coronal structures. III - Comparison of static models with X-ray, EUV, and radio observations

    Science.gov (United States)

    Pallavicini, R.; Peres, G.; Serio, S.; Vaiana, G. S.; Golub, L.; Rosner, R.

    1981-01-01

    Numerical models of static coronal loops in energy balance are compared with high spatial resolution observations of extreme ultraviolet lines, broad-band X-ray emission, and interferometric observations at 2.8 cm of a solar active region. Difficulties of using scaling laws to test static models of coronal loops are reviewed. The theoretical model used for the comparison is summarized; the detailed X-ray, EUV, and microwave observations of the selected active region are presented; and the comparison of the model with the observations is performed. It is shown that simple static models with conductive flux vanishing at the loop base reproduce satisfactorily the observed properties in the upper portion of loop structures from compact, high-pressure loops in the core of the region to more extended, fainter loops and to large-scale loops interconnecting different active regions. Effects of changing loop parameters are investigated, and it is argued, that in contrast to the present approach, scaling laws cannot be used to discriminate between different static energy balance models. Some discrepancy is found between model predictions and observations for the lower sections of loop structures. Possible causes of the discrepancy are discussed.

  15. Laboratory Calibration of Density-Dependent Lines in the EUV and Soft X-Ray Regions

    Energy Technology Data Exchange (ETDEWEB)

    Lepson, J K; Beiersdorfer, P; Gu, M F; Desai, P

    2010-12-09

    We analyzed spectral data of Fe XXII and Ar XIV from laboratory sources in which the electron density varies by several orders of magnitude to help benchmark density-sensitive emission lines useful for astrophysics and to test the atomic models underlying the diagnostic line ratios. We found excellent agreement for Fe XXII, but poorer agreement for Ar XIV. A number of astrophysically important emission lines are sensitive to electron density in the EUV and soft X-ray regions. Lines from Fe XXII, for example, have been used in recent years as diagnostics of stellar coronae, such as the active variable AB Dor, Capella, and EX Hya (Sanz-Forcada et al. 2003, Mewe et al. 2001, Mauche et al. 2003). Here we report spectral data of Fe XXII and Ar XIV from laboratory sources in which the electron density is known from either K-shell density diagnostics (for electron beam ion traps) or from non-spectroscopic means (tokamaks), ranging from 5 x 10{sup 10} cm{sup -3} to 5 x 10{sup 14} cm{sup -3}. These measurements were used to test the atomic data underlying the density diagnostic line ratios, complementing earlier work (Chen et al. 2004).

  16. Scrape-off-layer current and EUV diagnostics and control on the HBT-EP tokamak

    Science.gov (United States)

    Levesque, J. P.; Mauel, M. E.; Bialek, J.; Navratil, G. A.; Delgado-Aparicio, L.; Hansen, C. J.

    2015-11-01

    Non-axisymmetric currents in the scrape-off-layer (SOL) and conducting structure of a tokamak can produce severe forces at high plasma performance, compromising the device's structural integrity. Diagnosing these currents during disruptions is important for extrapolating forces in future machines including ITER. Progress on designing components to measure and control SOL and vessel currents in the HBT-EP tokamak is presented. Movable tiles positioned around limiting surfaces will measure SOL and vessel currents during mode activity and disruptions. Biasable plates at divertor strike points will allow control of field-aligned SOL currents for kink mode control studies and will drive convection in the plasma edge. In-vessel Rogowski coils will measure currents in wall components with high spatial resolution. A planned EUV diagnostic upgrade is also presented. Four sets of 16 poloidal views will allow tomographic reconstruction of plasma emissivity and internal kink mode structure. A separate two-color, 16-chord tangential system will allow reconstruction of temperature profiles versus time. Measurements will be input to HBT-EP's GPU-based feedback system, providing active feedback for kink modes using only optical sensors and both magnetic and edge current actuators. Supported by U.S. DOE Grant DE-FG02-86ER53222.

  17. Heating Mechanisms for Intermittent Loops in Active Region Cores from AIA/SDO EUV Observations

    Science.gov (United States)

    Cadavid, A. C.; Lawrence, J. K.; Christian, D. J.; Jess, D. B.; Nigro, G.

    2014-11-01

    We investigate intensity variations and energy deposition in five coronal loops in active region cores. These were selected for their strong variability in the AIA/SDO 94 Å intensity channel. We isolate the hot Fe XVIII and Fe XXI components of the 94 Å and 131 Å by modeling and subtracting the "warm" contributions to the emission. HMI/SDO data allow us to focus on "inter-moss" regions in the loops. The detailed evolution of the inter-moss intensity time series reveals loops that are impulsively heated in a mode compatible with a nanoflare storm, with a spike in the hot 131 Å signals leading and the other five EUV emission channels following in progressive cooling order. A sharp increase in electron temperature tends to follow closely after the hot 131 Å signal confirming the impulsive nature of the process. A cooler process of growing emission measure follows more slowly. The Fourier power spectra of the hot 131 Å signals, when averaged over the five loops, present three scaling regimes with break frequencies near 0.1 min-1 and 0.7 min-1. The low frequency regime corresponds to 1/f noise; the intermediate indicates a persistent scaling process and the high frequencies show white noise. Very similar results are found for the energy dissipation in a 2D "hybrid" shell model of loop magneto-turbulence, based on reduced magnetohydrodynamics, that is compatible with nanoflare statistics. We suggest that such turbulent dissipation is the energy source for our loops.

  18. Center-to-Limb Variability of Hot Coronal EUV Emissions During Solar Flares

    Science.gov (United States)

    Thiemann, E. M. B.; Chamberlin, P. C.; Eparvier, F. G.; Epp, L.

    2018-02-01

    It is generally accepted that densities of quiet-Sun and active region plasma are sufficiently low to justify the optically thin approximation, and this is commonly used in the analysis of line emissions from plasma in the solar corona. However, the densities of solar flare loops are substantially higher, compromising the optically thin approximation. This study begins with a radiative transfer model that uses typical solar flare densities and geometries to show that hot coronal emission lines are not generally optically thin. Furthermore, the model demonstrates that the observed line intensity should exhibit center-to-limb variability (CTLV), with flares observed near the limb being dimmer than those occurring near disk center. The model predictions are validated with an analysis of over 200 flares observed by the EUV Variability Experiment (EVE) on the Solar Dynamics Observatory (SDO), which uses six lines, with peak formation temperatures between 8.9 and 15.8 MK, to show that limb flares are systematically dimmer than disk-center flares. The data are then used to show that the electron column density along the line of sight typically increases by 1.76 × 10^{19} cm^{-2} for limb flares over the disk-center flare value. It is shown that the CTLV of hot coronal emissions reduces the amount of ionizing radiation propagating into the solar system, and it changes the relative intensities of lines and bands commonly used for spectral analysis.

  19. Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures.

    Science.gov (United States)

    Yakunin, S N; Makhotkin, I A; Nikolaev, K V; van de Kruijs, R W E; Chuev, M A; Bijkerk, F

    2014-08-25

    We present a way to analyze the chemical composition of periodical multilayer structures using the simultaneous analysis of grazing incidence hard X-Ray reflectivity (GIXR) and normal incidence extreme ultraviolet reflectance (EUVR). This allows to combine the high sensitivity of GIXR data to layer and interface thicknesses with the sensitivity of EUVR to the layer densities and atomic compositions. This method was applied to the reconstruction of the layered structure of a LaN/B multilayer mirror with 3.5 nm periodicity. We have compared profiles obtained by simultaneous EUVR and GIXR and GIXR-only data analysis, both reconstructed profiles result in a similar description of the layered structure. However, the simultaneous analysis of both EUVR and GIXR by a single algorithm lead to a ∼ 2x increased accuracy of the reconstructed layered model, or a more narrow range of solutions, as compared to the GIXR analysis only. It also explains the inherent difficulty of accurately predicting EUV reflectivity from a GIXR-only analysis.

  20. Electron-impact induced fluorescence for EUV spectrometer-detector calibration

    Energy Technology Data Exchange (ETDEWEB)

    Knie, Andre, E-mail: knie@physik.uni-kassel.de [University of Kassel, Center for Interdisciplinary Nanostructure Science and Technology - CINSaT Heinrich-Plett-Str. 40, 34132 Kassel (Germany); Burbank, Nils; Schmidt, Philipp; Ozga, Christian; Ehresmann, Arno [University of Kassel, Center for Interdisciplinary Nanostructure Science and Technology - CINSaT Heinrich-Plett-Str. 40, 34132 Kassel (Germany)

    2012-11-15

    Highlights: Black-Right-Pointing-Pointer Introducing an easy-to-handle calibration method for UV-spectrometers (165-314 nm). Black-Right-Pointing-Pointer Complete electron impact induced UV fluorescence spectra of rare gas atoms. Black-Right-Pointing-Pointer Identification of 196 new fluorescence lines not observed before. Black-Right-Pointing-Pointer Additional line catalog of 1670 lines for calculation tests and comparison. Black-Right-Pointing-Pointer New challenge for theory - observation of 183 lines not yet identifiable. -- Abstract: EUV-Spectra of electron-impact induced fluorescence from rare gases were recorded for an impact energy of 3.5 keV intending their application in the first step for spectrometer wavelength scale calibrations. The spectra are in the investigated range of 165-314 nm in good agreement with previously measured and calculated spectra. Nearly all observed lines could be identified including 196 new lines. 183 lines mainly for krypton and xenon could not be identified. The spectra are presented and discussed. A compendium of 1670 lines and their identification is added as supplementary tables. The spectra show a number of strong lines which are well suited for spectrometer wavelength scale calibrations and once their intensity relation is deduced can be used for a sensitivity determination of a spectrometer-detector combination as described in the introductory and experimental sections of the paper.

  1. Modeling and simulation of low-energy electron scattering in organic and inorganic EUV photoresists

    Science.gov (United States)

    Vaglio Pret, Alessandro; Graves, Trey; Blankenship, David; Biafore, John J.

    2017-03-01

    Alternative photoresist platforms are being developed with the goal of meeting Resolution, Roughness and Sensitivity requirements for EUV lithography. Metal-based materials appear promising due to the high etch resistance, high absorption, and high resolution. However, the exposure mechanism of these materials is quite different from that of organic chemically amplified resists. The current electron-scattering model built into PROLITHTM X6.0 allows a direct comparison of the exposure mechanisms for different resist platforms: in particular, it is now possible to estimate the intrinsic resist uncertainty by evaluating electron, acid shot noise and spatial blurring, while forcing the photon shot noise contribution to zero. A comparison between organic resists and metal-based platforms reveals how the denser nature of the latter help containing the electron scattering in a much closer radius around the absorption event. The consequent electron-reaction (acid generation for photo-active-generator-containing organic materials, ligand dissociation for the metal-oxides) reflects the electron shot noise of the different platforms. The higher absorption combined with lower blur of the metaloxide materials seem to become of crucial importance for the 5 nm technology node and beyond.

  2. Growth and Printability of Multilayer Phase Defects on EUV MaskBlanks

    Energy Technology Data Exchange (ETDEWEB)

    Liang, Ted; Ultanir, Erdem; Zhnag, Guojing; Park, Seh-Jin; Anderson, Erik; Gullikson, Eric; Naulleau, Patrick; Salmassi, Farhad; Mirkarimi, Paul; Spiller, Eberhard; Baker, Sherry

    2007-06-10

    The ability to fabricate defect-free mask blanks is a well-recognized challenge in enabling extreme ultraviolet lithography (EUVL) for semiconductor manufacturing. Both the specification and reduction of defects necessitate the understanding of their printability and how they are generated and grow during Mo-Si multilayer (ML) deposition. A ML phase defect can be depicted by its topographical profile on the surface as either a bump or pit, which is then characterized by height or depth and width. The complexity of such seemingly simple phase defects lies in the many ways they can be generated and the difficulties of measuring their physical shape/size and optical effects on printability. An effective way to study phase defects is to use a programmed defect mask (PDM) as 'model' test sample where the defects are produced with controlled growth on a ML blank and accurate placement in varying proximity to absorber patterns on the mask. This paper describes our recent study of ML phase defect printability with resist data from exposures of a ML PDM on the EUV micro-exposure tool (MET, 5X reduction with 0.3NA).

  3. Ultrafast dynamics in helium nanodroplets probed by femtosecond time-resolved EUV photoelectron imaging

    Energy Technology Data Exchange (ETDEWEB)

    Kornilov, Oleg; Wang, Chia C.; Buenermann, Oliver; Healy, Andrew T.; Leonard, Mathew; Peng, Chunte; Leone, Stephen R.; Neumark, Daniel M.; Gessner, Oliver

    2010-07-09

    The dynamics of electronically excited helium nanodroplets are studied by femtosecond time-resolved photoelectron imaging. EUV excitation into a broad absorption band centered around 23.8 eV leads to an indirect photoemission process that generates ultraslow photoelectrons. A 1.58 eV probe pulse transiently depletes the indirect photoemission signal for pump-probe time delays <200 fs and enhances the signal beyond this delay. The depletion is due to suppression of the indirect ionization process by the probe photon, which generates a broad, isotropically emitted photoelectron band. Similar time scales in the decay of the high energy photoelectron signal and the enhancement of the indirect photoemission signal suggest an internal relaxation process that populates states in the range of a lower energy droplet absorption band located just below the droplet ionization potential (IP {approx} 23.0 eV). A nearly 70% enhancement of the ultraslow photoelectron signal indicates that interband relaxation plays a more dominant role for the droplet de-excitation mechanism than photoemission.

  4. Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering

    Energy Technology Data Exchange (ETDEWEB)

    Voronov, Dmitry L.; Cambie, Rossana; Ahn, Minseung; Anderson, Erik H.; Chang, Chih-Hao; Gullikson, Eric M.; Heilmann, Ralf K.; Salmassi, Farhad; Schattenburg, Mark L.; Yashchuk, Valeriy V.; Padmore, Howard A.

    2009-09-16

    We describe a revolutionary new approach to high spectral resolution soft x-ray optics. Conventionally in the soft x-ray energy range, high spectral resolution is obtained by use of a relatively low line density grating operated in 1st order with small slits. This severely limits throughput. This limitation can be removed by use of a grating either in very high order, or with very high line density, if one can maintain high diffraction efficiency. We have developed a new technology for achieving both of these goals which should allow high throughput spectroscopy, at resolving powers of up to 106 at 1 keV. Such optics should provide a revolutionary advance for high resolution lifetime free spectroscopy, such as RIXS, and for pulse compression of chirped beams. We report recent developmental fabrication and characterization of a prototype grating optimized for 14.2 nm EUV light. The prototype grating with a 200 nm period of the blazed grating substrate coated with 20 Mo/Si bilayers with a period of 7.1 nm demonstrates good dispersion in the third order (effective groove density of 15,000 lines per mm) with a diffraction efficiency of more than 33percent.

  5. Microwave and Millimeter-Wave Radiometric Studies of Temperature, Water Vapor and Clouds

    Energy Technology Data Exchange (ETDEWEB)

    Westwater, Edgeworth

    2011-05-06

    The importance of accurate measurements of column amounts of water vapor and cloud liquid has been well documented by scientists within the Atmospheric Radiation Measurement (ARM) Program. At the North Slope of Alaska (NSA), both microwave radiometers (MWR) and the MWRProfiler (MWRP), been used operationally by ARM for passive retrievals of the quantities: Precipitable Water Vapor (PWV) and Liquid Water Path (LWP). However, it has been convincingly shown that these instruments are inadequate to measure low amounts of PWV and LWP. In the case of water vapor, this is especially important during the Arctic winter, when PWV is frequently less than 2 mm. For low amounts of LWP (< 50 g/m{sup 2}), the MWR and MWRP retrievals have an accuracy that is also not acceptable. To address some of these needs, in March-April 2004, NOAA and ARM conducted the NSA Arctic Winter Radiometric Experiment - Water Vapor Intensive Operational Period at the ARM NSA/Adjacent Arctic Ocean (NSA/AAO) site. After this experiment, the radiometer group at NOAA moved to the Center for Environmental Technology (CET) of the Department of Electrical and Computer Engineering of the University of Colorado at Boulder. During this 2004 experiment, a total of 220 radiosondes were launched, and radiometric data from 22.235 to 380 GHz were obtained. Primary instruments included the ARM MWR and MWRP, a Global Positioning System (GPS), as well as the CET Ground-based Scanning Radiometer (GSR). We have analyzed data from these instruments to answer several questions of importance to ARM, including: (a) techniques for improved water vapor measurements; (b) improved calibration techniques during cloudy conditions; (c) the spectral response of radiometers to a variety of conditions: clear, liquid, ice, and mixed phase clouds; and (d) forward modeling of microwave and millimeter wave brightness temperatures from 22 to 380 GHz. Many of these results have been published in the open literature. During the third year of

  6. Using radiometric surface temperature for surface energy flux estimation in Mediterranean drylands from a two-source perspective

    Science.gov (United States)

    The recent paper by Morillas et al. [Morillas, L. et al. Using radiometric surface temperature for surface energy flux estimation in Mediterranean drylands from a two-source perspective, Remote Sens. Environ. 136, 234-246, 2013] evaluates the two-source model (TSM) of Norman et al. (1995) with revi...

  7. Development of radiometric assays for quantification of enzyme activities of the key enzymes of thyroid hormones metabolism

    Czech Academy of Sciences Publication Activity Database

    Pavelka, Stanislav

    2014-01-01

    Roč. 63, Suppl.1 (2014), S133-S140 ISSN 0862-8408 R&D Projects: GA MŠk(CZ) 7AMB12SK158; GA ČR(CZ) GA304/08/0256 Institutional support: RVO:67985823 Keywords : enzyme * metabolism * radiometric assay * thyroid hormone Subject RIV: FB - Endocrinology, Diabetology, Metabolism, Nutrition Impact factor: 1.293, year: 2014

  8. Optical detectors for integration into a low cost radiometric device for in-water applications: A feasibility study

    CSIR Research Space (South Africa)

    Ramkilowan, A

    2013-04-01

    Full Text Available -based remote sensing techniques, coupled with in-situ radiometric technology to offer a powerful and potentially cost effective method of addressing algal bloom related hazards. The work presented in this paper focuses on the decision making processes involved...

  9. Revising and Validating Spectral Irradiance Standards for Photovoltaic Performance: Preprint

    Energy Technology Data Exchange (ETDEWEB)

    Myers, D. R.; Emery, K.; Gueymard, C.

    2002-05-01

    In 1982, the American Society for Testing and Materials (ASTM) adopted consensus standard direct-normal and global-tilted solar terrestrial spectra (ASTM E891/E892). These standard spectra were intended to evaluate photovoltaic (PV) device performance and other solar-related applications. The International Standards Organization (ISO) and International Electrotechnical Commission (IEC) adopted these spectra as spectral standards ISO 9845-1 and IEC 60904-3. Additional information and more accurately representative spectra are needed by today's PV community. Modern terrestrial spectral radiation models, knowledge of atmospheric physics, and measured radiometric quantities are applied to develop new reference spectra for consideration by ASTM.

  10. A HISTORICAL OUTLINE OF RADIONUCLIDE CONTAMINATION OF THE YENISEY FLOODPLAIN BASED ON LANDSCAPE AND RADIOMETRIC SURVEY

    Directory of Open Access Journals (Sweden)

    Vitaly Linnik

    2013-01-01

    Full Text Available Distribution of technogenic radionuclides discharged by the Krasnoyarsk Mining and Chemical Combine (KMCC, Zheleznogorsk in the period from 1958 to 1992 has been studied in floodplain landscapes of the Yenisey river. After shutting down the direct-flow reactors the radioactive contamination of the Yenisey river became dozen times lower. Performed landscape and radiometric studies revealed factors responsible for radionuclide differentiation and the character of radionuclide distribution within two landscape segments of the Yenisey river floodplain. The first segment characterized the impact zone from 16 km to 20 downstream the discharge, the second one was studied in the remote zone as far as 2000 km down the river. Artificial radionuclide contamination was most intensive in the 60-ies of the past century when it reached the Kara Sea. Traces of that contamination were registered in soils of both sites at the depth of 20–50 cm.

  11. A Radiometric All-Sky Infrared Camera (RASICAM) for DES/CTIO

    Energy Technology Data Exchange (ETDEWEB)

    Lewis, Peter M.; Rogers, Howard; Schindler, Rafe H.; /SLAC

    2010-08-25

    A novel radiometric all-sky infrared camera [RASICAM] has been constructed to allow automated real-time quantitative assessment of night sky conditions for the Dark Energy Camera [DECam] located on the Blanco Telescope at the Cerro Tololo Inter-American Observatory in Chile. The camera is optimized to detect the position, motion and optical depth of thin, high (8-10km) cirrus clouds and contrails by measuring their apparent temperature above the night sky background. The camera system utilizes a novel wide-field equiresolution catadioptic mirror system that provides sky coverage of 2{pi} azimuth and 14-90{sup o} from zenith. Several new technological and design innovations allow the RASICAM system to provide unprecedented cloud detection and IR-based photometricity quantification. The design of the RASICAM system is presented.

  12. High-precision radiometric tracking for planetary approach and encounter in the inner solar system

    Science.gov (United States)

    Christensen, C. S.; Thurman, S. W.; Davidson, J. M.; Finger, M. H.; Folkner, W. M.

    1989-01-01

    The benefits of improved radiometric tracking data have been studied for planetary approach within the inner Solar System using the Mars Rover Sample Return trajectory as a model. It was found that the benefit of improved data to approach and encounter navigation was highly dependent on the a priori uncertainties assumed for several non-estimated parameters, including those for frame-tie, Earth orientation, troposphere delay, and station locations. With these errors at their current levels, navigational performance was found to be insensitive to enhancements in data accuracy. However, when expected improvements in these errors are modeled, performance with current-accuracy data significantly improves, with substantial further improvements possible with enhancements in data accuracy.

  13. Detection of group D and viridans streptococci in blood by radiometric methods

    Energy Technology Data Exchange (ETDEWEB)

    Beckwith, D.G.

    1979-01-01

    A prospective study was conducted to evaluate the radiometric detection of group D and viridans streptococci in blood, using three media preparations, Bactec 6A and 6B isotonic media and 8B hypertonic medium. All enterococci tested were detected by the 6A and 6B media. However, the 6A medium failed to detect 76% of the Streptococcus bovis isolates and 57% of the viridans streptococci, whereas all S. bovis isolates and 95% of the viridans streptococci were detected with the 6B formulation. No improvement in detection was noted in comparing the 6B and the 8B hypertonic media. The importance of adequate detection of this group of organisms, especially in patients with endocarditis, is discussed.

  14. Importance of radiometric survey in radiodiagnosis installationscalculated; Importancia del levantamiento radiometrico en instalaciones de radiodiagnostico

    Energy Technology Data Exchange (ETDEWEB)

    Leyton, Fernando; Alarcon, Luis; Zapata, Victor H.; Ortega, Dulia; Ramirez, Alfredo; Aravena, Gonzalo [Hospital Clinico Universidad de Chile, Santiago (Chile); Ubeda, Carlos [Universidad de Tarapaca, Arica (Chile); Oyarzun, Carlos [Comision Chilena de Energia Nuclear (CCHEN), Santiago (Chile); Inzulza, Alonso [Hospital Juan Noe (Chile)

    2005-07-01

    A radiometric survey was conducted in two services of imaging with a total of 7 evaluated radiology rooms. The Quality Control Protocol methodology was used in Radiology ARCAL (Regional Agreement of cooperation for the promotion of nuclear science and technology in Latin America and the Caribbean) XLIX of the International Atomic Energy Agency (IAEA). The effective dose in different positions of interest rates were calculated, from the point of view of radiation protection. All evaluated rooms have rates of effective doses that meet the values limits set in the Protocol ARCAL XLIX, for 82% of the positions evaluated. However operators located in the position A (controlled area) exceed on average 370% with a range of [1-870] the limit proposed by ARCAL XLIX.

  15. Local-scale flood mapping on vegetated floodplains from radiometrically calibrated airborne LiDAR data

    DEFF Research Database (Denmark)

    Malinowski, Radoslaw; Höfle, Bernhard; König, Kristina

    2016-01-01

    , but the exact strength of the recorded laser pulse depends on the area covered by the targets located within a laser pulse footprint area. To account for this we analysed the physical quantity of radiometrically calibrated ALS data, the backscattering coefficient, in relation to water and vegetation coverage...... of herbaceous vegetation. To address this problem, this study presents the application of full-waveform airborne laser scanning (ALS) data for detection of floodwater extent. In general, water surfaces are characterised by low values of backscattered energy due to water absorption of the infrared laser shots...... within a single laser footprint. The results showed that the backscatter was negatively correlated to water coverage, and that of the three distinguished classes of water coverage (low, medium, and high) only the class with the largest extent of water cover (>70%) had relatively distinct characteristics...

  16. Evaluation of susceptibility of Mycobacterium bovis to antituberculous drugs by radiometric BACTEC 460TB system.

    Science.gov (United States)

    Cavirani, S; Fanti, F; Benecchi, M; Calderaro, A; Taddei, S; Arcangeletti, C; Medici, M C; Dettori, G; Chezzi, C

    2003-04-01

    Susceptibility of Mycobacterium bovis strains to antituberculous drugs (isoniazid and rifampin) was detected by radiometric BACTEC 460TB system. M.bovis strains were isolated from tissue samples showing tuberculous lesions collected at an abbattoir from cattle belonging to 47 tuberculosis outbreaks occurring in Northern Italy in 1995-1999. Forty-six out of 61 strains (75.4%) resulted susceptible to both isoniazid and rifampin. Thirteen strains (21.3%) were resistant to isoniazid only. No strains showed resistance to rifampin only. Two strains (3.3%) resulted resistant to both drugs, showing antituberculous multidrug-resistance. Given the compulsory eradication program of bovine tuberculosis by elimination of infected animals and the ban on antituberculous drug treatments in animals, detection of resistant M. bovis strains appears of great interest.

  17. Radiometric, geometric, and image quality assessment of ALOS AVNIR-2 and PRISM sensors

    Science.gov (United States)

    Saunier, S.; Goryl, P.; Chander, G.; Santer, R.; Bouvet, M.; Collet, B.; Mambimba, A.; Kocaman, Aksakal S.

    2010-01-01

    The Advanced Land Observing Satellite (ALOS) was launched on January 24, 2006, by a Japan Aerospace Exploration Agency (JAXA) H-IIA launcher. It carries three remote-sensing sensors: 1) the Advanced Visible and Near-Infrared Radiometer type 2 (AVNIR-2); 2) the Panchromatic Remote-Sensing Instrument for Stereo Mapping (PRISM); and 3) the Phased-Array type L-band Synthetic Aperture Radar (PALSAR). Within the framework of ALOS Data European Node, as part of the European Space Agency (ESA), the European Space Research Institute worked alongside JAXA to provide contributions to the ALOS commissioning phase plan. This paper summarizes the strategy that was adopted by ESA to define and implement a data verification plan for missions operated by external agencies; these missions are classified by the ESA as third-party missions. The ESA was supported in the design and execution of this plan by GAEL Consultant. The verification of ALOS optical data from PRISM and AVNIR-2 sensors was initiated 4 months after satellite launch, and a team of principal investigators assembled to provide technical expertise. This paper includes a description of the verification plan and summarizes the methodologies that were used for radiometric, geometric, and image quality assessment. The successful completion of the commissioning phase has led to the sensors being declared fit for operations. The consolidated measurements indicate that the radiometric calibration of the AVNIR-2 sensor is stable and agrees with the Landsat-7 Enhanced Thematic Mapper Plus and the Envisat MEdium-Resolution Imaging Spectrometer calibration. The geometrical accuracy of PRISM and AVNIR-2 products improved significantly and remains under control. The PRISM modulation transfer function is monitored for improved characterization.

  18. Time-Series Hyperspectral and Multi-spectral Radiometric Measurements at the Martha's Vineyard Coastal Observatory

    Science.gov (United States)

    Lohrenz, S. E.; Sosik, H. M.; Crockford, E. T.; Chakraborty, S.

    2016-02-01

    High frequency temporal measurements are critical to resolving processes in dynamic coastal environments and geo-stationary satellites enable multiple observations over the course of a day. Such temporal resolution will be important in understanding rapid evolution of coastal physical processes (e.g., tides, wind forcing, water mass movement) as well as short-term changes in biological and chemical properties. The GEO-CAPE (Geostationary Coastal and Air Pollution Events) is one of 17 priority missions identified in the National Research Council's Earth Science Decadal Survey and will provide high spatial and temporal resolution observations of tropospheric trace gases and aerosols and coastal ocean phytoplankton, water quality and biogeochemistry. At present, however there are a limited number of hyperspectral ocean color observations in coastal waters and even fewer time-series observations. Such data sets, particularly when coupled with supporting optical and water property observations, would be highly beneficial in evaluating sensor requirements and algorithm performance. Here, we describe results of comparisons of hyperspectral and multi-spectral radiometric observations deployed at a cabled coastal ocean observatory on the New England continental shelf, the Martha's Vineyard Coastal Observatory (MVCO). The radiometric measurements are complemented by a broad suite of meteorological and hydrographic core measurements as well as efforts providing detailed characterization of changes in phytoplankton community structure with automated submersible flow cytometry and in-water optical properties (chl fluorescence, CDOM fluorescence, backscattering). Our findings illustrate the dynamic nature of this coastal ecosystem and the utility of hyperspectral radiometry and geostationary satellite observations to characterize short term variability in optical and biogeochemical properties of coastal environments.

  19. Accelerator physics and radiometric properties of superconducting wavelength shifters; Beschleunigerphysik und radiometrische Eigenschaften supraleitender Wellenlaengenschieber

    Energy Technology Data Exchange (ETDEWEB)

    Scheer, Michael

    2008-11-17

    Subject of this thesis is the operation of wave-length shifters at electron storage rings and their use in radiometry. The basic aspects of the radiometry, the technical requirements, the influence of wave-length shifters on the storage ring, and results of first measurements are presented for a device installed at BESSY. Most of the calculations are carried out by the program WAVE, which has been developed within this thesis. WAVE allows to calculate the synchrotron radiation spectra of wavelength shifters within an relative uncertainty of 1/100000. The properties of wave-length shifters in terms of accelerator physics as well as a generating function for symplectic tracking calculations can also be calculated by WAVE. The later was implemented in the tracking code BETA to investigate the influence of insertion devices on the dynamic aperture and emittance of the storage ring. These studies led to the concept of alternating low- and high-beta-sections at BESSY-II, which allow to operate superconducting insertion devices without a significant distortion of the magnetic optics. To investigate the experimental aspects of the radiometry at wave-length shifters, a program based on the Monte-Carlo-code GEANT4 has been developed. It allows to simulate the radiometrical measurements and the absorption properties of detectors. With the developed codes first radiometrical measurements by the PTB have been analysed. A comparison of measurements and calculations show a reasonable agreement with deviations of about five percent in the spectral range of 40-60 keV behind a 1-mm-Cu filter. A better agreement was found between 20 keV and 80 keV without Cu filter. In this case the measured data agreed within a systematic uncertainty of two percent with the results of the calculations. (orig.)

  20. Assessment of the Short-Term Radiometric Stability between Terra MODIS and Landsat 7 ETM+ Sensors

    Science.gov (United States)

    Choi, Taeyoung; Xiong, Xiaxiong; Chander, G.; Angal, Amit

    2009-01-01

    The Landsat 7 (L7) Enhanced Thematic Mapper (ETM+) sensor was launched on April 15th, 1999 and has been in operation for over nine years. It has six reflective solar spectral bands located in the visible and shortwave infrared part of the electromagnetic spectrum (0.5 - 2.5 micron) at a spatial resolution of 30 m. The on-board calibrators are used to monitor the on-orbit sensor system changes. The ETM+ performs solar calibrations using on-board Full Aperture Solar Calibrator (FASC) and the Partial Aperture Solar Calibrator (PASC). The Internal Calibrator Lamp (IC) lamps, a blackbody and shutter optics constitute the on-orbit calibration mechanism for ETM+. On 31 May 2003, a malfunction of the scan-line corrector (SLC) mirror assembly resulted in the loss of approximately 22% of the normal scene area. The missing data affects most of the image with scan gaps varying in width from one pixel or less near the centre of the image to 14 pixels along the east and west edges of the image, creating a wedge-shaped pattern. However, the SLC failure has no impacts on the radiometric performance of the valid pixels. On December 18, 1999, the Moderate Resolution Imaging Spectroradiometer (MODIS) Proto-Flight Model (PFM) was launched on-board the NASA's EOS Terra spacecraft. Terra MODIS has 36 spectral bands with wavelengths ranging from 0.41 to 14.5 micron and collects data over a wide field of view angle (+/-55 deg) at three nadir spatial resolutions of 250 m, 500 in 1 km for bands 1 to 2, 3 to 7, and 8 to 36, respectively. It has 20 reflective solar bands (RSB) with spectral wavelengths from 0.41 to 2.1 micron. The RSB radiometric calibration is performed by using on-board solar diffuser (SD), solar diffuser stability monitor (SDSM), space-view (SV), and spectro-radiometric calibration assembly (SRCA). Through the SV port, periodic lunar observations are used to track radiometric response changes at different angles of incidence (AOI) of the scan mirror. As a part of the AM

  1. Assessment of the Short-Term Radiometric Stability between Terra MODIS and Landsat 7 ETM+ Sensors

    Science.gov (United States)

    Choi, Taeyoung; Xiong, Xiaxiong; Chander, G.; Angal, Amit

    2009-01-01

    The Landsat 7 (L7) Enhanced Thematic Mapper (ETM+) sensor was launched on April 15th, 1999 and has been in operation for over nine years. It has six reflective solar spectral bands located in the visible and shortwave infrared part of the electromagnetic spectrum (0.5 - 2.5 micron) at a spatial resolution of 30 m. The on-board calibrators are used to monitor the on-orbit sensor system changes. The ETM+ performs solar calibrations using on-board Full Aperture Solar Calibrator (FASC) and the Partial Aperture Solar Calibrator (PASC). The Internal Calibrator Lamp (IC) lamps, a blackbody and shutter optics constitute the on-orbit calibration mechanism for ETM+. On 31 May 2003, a malfunction of the scan-line corrector (SLC) mirror assembly resulted in the loss of approximately 22% of the normal scene area. The missing data affects most of the image with scan gaps varying in width from one pixel or less near the centre of the image to 14 pixels along the east and west edges of the image, creating a wedge-shaped pattern. However, the SLC failure has no impacts on the radiometric performance of the valid pixels. On December 18, 1999, the Moderate Resolution Imaging Spectroradiometer (MODIS) Proto-Flight Model (PFM) was launched on-board the NASA's EOS Terra spacecraft. Terra MODIS has 36 spectral bands with wavelengths ranging from 0.41 to 14.5 micron and collects data over a wide field of view angle (+/-55 deg) at three nadir spatial resolutions of 250 m, 500 in 1 km for bands 1 to 2, 3 to 7, and 8 to 36, respectively. It has 20 reflective solar bands (RSB) with spectral wavelengths from 0.41 to 2.1 micron. The RSB radiometric calibration is performed by using on-board solar diffuser (SD), solar diffuser stability monitor (SDSM), space-view (SV), and spectro-radiometric calibration assembly (SRCA). Through the SV port, periodic lunar observations are used to track radiometric response changes at different angles of incidence (AOI) of the scan mirror. As a part of the AM

  2. Optical performance of grazing incidence X-ray/EUV telescopes for space science applications

    Science.gov (United States)

    Thompson, Patrick Louis

    In order to improve and expand the field of X-ray astronomy, and imaging in general, we find that these days a comprehensive systems engineering approach to X-ray image formation must be undertaken. While some industrial interests have taken steps in this direction, any academic approach is lacking from within the archival literature to date, and there are virtually no established university courses. Indeed, it would seem that top level, optical-systems-engineering is exclusively reserved for those seasoned professionals who have accumulated (though somewhat artistically) the ``know-how'' to efficiently conceive and implement excellent optical designs. Such expert knowledge is not and should not be mysterious. To this end, we attempt to formulate a highly comprehensive approach to X-ray optical systems engineering and implement it within the context of the Wolter Type-I and Type-II (grazing incidence) telescopes currently utilized for practical X-ray/EUV astronomy. In addition, we will transform the classical paraboloid- hyperboloid designs into `aplanatic' and `isoplanatic', hyperboloid-hyperboloid systems, where certain coma conditions are minimized. As will be shown, one gains little improvement in performance when choosing a quasi-aplanatic mirror design over a classical one, owing to scatter and other image degradation effects. Next we will show that a generalized hyperboloid-hyperboloid design can be comprehensively optimized for any imaging requirement, where the operational field-of-view is weighted according to spatial information content. Our H-H design has been optimized for the GOES Solar X-ray Imager mission and adopted by NASA and NOAA. It is currently undergoing fabrication by Raytheon Optical Systems Inc. who is under subcontract to the Lockheed-Martin Solar and Astrophysics Laboratory. Our design is expected to result in an 80% increase in optical system performance over the original SXI baseline design.

  3. Monte Carlo sensitivity analysis of EUV mask reflectivity and its impact on OPC accuracy

    Science.gov (United States)

    Chen, Yulu; Wood, Obert; Rankin, Jed; Gullikson, Eric; Meyer-Ilse, Julia; Sun, Lei; Qi, Zhengqing John; Goodwin, Francis; Kye, Jongwook

    2017-03-01

    Unlike optical masks which are transmissive optical elements, use of extreme ultraviolet (EUV) radiation requires a reflective mask structure - a multi-layer coating consisting of alternating layers of high-Z (wave impedance) and low-Z materials that provide enhanced reflectivity over a narrow wavelength band peaked at the Bragg wavelength.1 Absorber side wall angle, corner rounding,2 surface roughness,3 and defects4 affect mask performance, but even seemingly simple parameters like bulk reflectivity on mirror and absorber surfaces can have a profound influence on imaging. For instance, using inaccurate reflectivity values at small and large incident angles would diminish the benefits of source mask co-optimization (SMO) and result in larger than expected pattern shifts. The goal of our work is to calculate the variation in mask reflectivity due to various sources of inaccuracies using Monte Carlo simulations. Such calculation is necessary as small changes in the thickness and optical properties of the high-Z and low-Z materials can cause substantial variations in reflectivity. This is further complicated by undesirable intermixing between the two materials used to create the reflector.5 One of the key contributors to mask reflectivity fluctuation is identified to be the intermixing layer thickness. We also investigate the impacts on OPC when the wrong mask information is provided, and evaluate the deterioration of overlapping process window. For a hypothetical N7 via layer, the lack of accurate mask information costs 25% of the depth of focus at 5% exposure latitude. Our work would allow the determination of major contributors to mask reflectivity variation, drive experimental efforts of measuring such contributors, provide strategies to optimize mask reflectivity, and quantize the OPC errors due to imperfect mask modeling.

  4. Relationship of EUV Irradiance Coronal Dimming Slope and Depth to Coronal Mass Ejection Speed and Mass

    Science.gov (United States)

    Mason, James Paul; Woods, Thomas N.; Webb, David F.; Thompson, Barbara J.; Colaninno, Robin C.; Vourlidas, Angelos

    2016-01-01

    Extreme ultraviolet (EUV) coronal dimmings are often observed in response to solar eruptive events. These phenomena can be generated via several different physical processes. For space weather, the most important of these is the temporary void left behind by a coronal mass ejection (CME). Massive, fast CMEs tend to leave behind a darker void that also usually corresponds to minimum irradiance for the cooler coronal emissions. If the dimming is associated with a solar are, as is often the case, the are component of the irradiance light curve in the cooler coronal emission can be isolated and removed using simultaneous measurements of warmer coronal lines. We apply this technique to 37dimming events identified during two separate two-week periods in 2011, plus an event on 2010 August 7 analyzed in a previous paper, to parameterize dimming in terms of depth and slope. We provide statistics on which combination of wavelengths worked best for the flare-removal method, describe the fitting methods applied to the dimming light curves, and compare the dimming parameters with corresponding CME parameters of mass and speed. The best linear relationships found are nu(sub CME) [km/s] approx. equals 2.36 x 10 6 [km/%] x s(sub dim) [%/s] m(sub CME) [g] approx. equals 2.59 x 10(exp.15 [g/%] x the square root of d(sub dim) [%].These relationships could be used for space weather operations of estimating CME mass and speed using near-real-time irradiance dimming measurements.

  5. High-Resolution, Quantitative, and Three-Dimensional Coherent Diffractive Imaging with a Tabletop EUV Source

    Science.gov (United States)

    Shanblatt, Elisabeth Rose

    Imaging is a critical tool used across a broad range of applications in science, technology, medicine, and manufacturing. Microscopy, the type of imaging which allows us to access the elusive yet rich world of what is smaller than we can naturally see--makes it possible to observe and design the nano-world of biological, material, and nanofabricated systems. In this thesis, I describe the development of a new type of microscopy that combines two powerful tools: coherent extreme ultraviolet (EUV) light sources produced by high harmonic generation, and ptychographic coherent diffractive imaging. This microscope produces high-resolution, chemically-specific, phase- and amplitude-contrast images with large fields of view on the order of hundreds of microns, while preserving a high spatial resolution on the scale of tens of nanometers. Recently, we extended this new tabletop microscopy technique to image reflective samples, periodic samples, and to image dynamic nano-scale elastic and thermal processes. I will discuss these advances and in particular demonstrate two new capabilities: first, a new imaging technique with high compositionally- and morphologically-sensitive quantitative information, capable of imaging reactions and diffusion at a buried interface. This capability will open up a new, exquisitely sensitive layer-by-layer imaging that has many applications in nanoscience and nanotechnology, including surface and materials science and metrology. Secondly, I will demonstrate imaging of a thick sample in three dimensions. By accounting for diffraction within a thick sample, it is possible to obtain high-resolution three-dimensional images of biological and meta-material samples non-invasively, and without the use of staining or labeling.

  6. Multi-scaling Properties of EUV Intensity Fluctuations and Models for Impulsive Heating

    Science.gov (United States)

    Cadavid, A. C.; Rivera, Y.; Lawrence, J. K.; Christian, D. J.; Jennings, P.; Rappazzo, A. F.

    2016-12-01

    There is wide agreement on the importance of impulsive processes ("nanoflares") to explain coronal heating. Diagnostics of observational data are necessary to uncover signatures of the underlying mechanisms, and, by comparing to those of simulated data, to determine whether a model explains the observations. We have investigated the multi-scaling properties that characterize the intermittency of AIA/SDO radiance fluctuations. Lags between pairs of wavebands were used to distinguish coronal from transition region (TR) signals. Noise degrades the signals, so the 171Å emission, with the highest signal-to-noise ratio, provides the best information. In an active region core, for both loops and for diffuse emission, the probability distribution functions (PDFs) of the increments of both TR and coronal signals are "quasi-Gaussian" for large temporal scales and "leptokurtic" (peaked with heavy tails) for small time increments, as expected for turbulent systems. Multifractal Detrended Fluctuation Analysis (MF-DFA) shows that the variance of the fluctuations obeys a power law as a function of temporal scales in the range 15-45 min. The value of the scaling exponent indicates that, on average, the time series are nonstationary and anti-persistent with small fluctuations following large fluctuations and vice versa. Other moments of the fluctuations obey corresponding power laws and the multi-scaling exponents quantify the degree of the intermittency in the context of multifractality. The variation in the scaling exponents results from long term correlation in the time series. The multiscaling of the EUV data agrees qualitatively with simulated intensity from a simple model of impulsive bursts plus noise, and also with the ohmic dissipation in a Reduced Magnetohydrodynamic (RMHD) model for coronal loop heating. However, the observational data were found to disagree with the modeled PDFs of increments. There is indication that the multifractal properties in the observations

  7. Off-limb EUV observations of the solar corona and transients with the CORONAS-F/SPIRIT telescope-coronagraph

    Directory of Open Access Journals (Sweden)

    V. Slemzin

    2008-10-01

    Full Text Available The SPIRIT telescope aboard the CORONAS-F satellite (in orbit from 26 July 2001 to 5 December 2005, observed the off-limb solar corona in the 175 Å (Fe IX, X and XI lines and 304 Å (He II and Si XI lines bands. In the coronagraphic mode the mirror was tilted to image the corona at the distance of 1.1...5 Rsun from the solar center, the outer occulter blocked the disk radiation and the detector sensitivity was enhanced. This intermediate region between the fields of view of ordinary extreme-ultraviolet (EUV telescopes and most of the white-light (WL coronagraphs is responsible for forming the streamer belt, acceleration of ejected matter and emergence of slow and fast solar wind. We present here the results of continuous coronagraphic EUV observations of the solar corona carried out during two weeks in June and December 2002. The images showed a "diffuse" (unresolved component of the corona seen in both bands, and non-radial, ray-like structures seen only in the 175 Å band, which can be associated with a streamer base. The correlations between latitudinal distributions of the EUV brightness in the corona and at the limb were found to be high in 304 Å at all distances and in 175 Å only below 1.5 Rsun. The temporal correlation of the coronal brightness along the west radial line, with the brightness at the underlying limb region was significant in both bands, independent of the distance. On 2 February 2003 SPIRIT observed an expansion of a transient associated with a prominence eruption seen only in the 304 Å band. The SPIRIT data have been compared with the corresponding data of the SOHO LASCO, EIT and UVCS instruments.

  8. Off-limb EUV observations of the solar corona and transients with the CORONAS-F/SPIRIT telescope-coronagraph

    Directory of Open Access Journals (Sweden)

    V. Slemzin

    2008-10-01

    Full Text Available The SPIRIT telescope aboard the CORONAS-F satellite (in orbit from 26 July 2001 to 5 December 2005, observed the off-limb solar corona in the 175 Å (Fe IX, X and XI lines and 304 Å (He II and Si XI lines bands. In the coronagraphic mode the mirror was tilted to image the corona at the distance of 1.1...5 Rsun from the solar center, the outer occulter blocked the disk radiation and the detector sensitivity was enhanced. This intermediate region between the fields of view of ordinary extreme-ultraviolet (EUV telescopes and most of the white-light (WL coronagraphs is responsible for forming the streamer belt, acceleration of ejected matter and emergence of slow and fast solar wind. We present here the results of continuous coronagraphic EUV observations of the solar corona carried out during two weeks in June and December 2002. The images showed a "diffuse" (unresolved component of the corona seen in both bands, and non-radial, ray-like structures seen only in the 175 Å band, which can be associated with a streamer base. The correlations between latitudinal distributions of the EUV brightness in the corona and at the limb were found to be high in 304 Å at all distances and in 175 Å only below 1.5 Rsun. The temporal correlation of the coronal brightness along the west radial line, with the brightness at the underlying limb region was significant in both bands, independent of the distance. On 2 February 2003 SPIRIT observed an expansion of a transient associated with a prominence eruption seen only in the 304 Å band. The SPIRIT data have been compared with the corresponding data of the SOHO LASCO, EIT and UVCS instruments.

  9. Optical constants of materials in the EUV/soft x-ray region for multilayer mirror applications

    Energy Technology Data Exchange (ETDEWEB)

    Soufli, Regina [Univ. of California, Berkeley, CA (United States)

    1997-12-01

    The response of a given material to an incident electromagnetic wave is described by the energy dependent complex index of refraction n = 1 - δ + iβ. In the extreme ultraviolet (EUV)/soft x-ray spectral region, the need for accurate determination of n is driven by activity in areas such as synchrotron based research, EUV/x-ray lithography, x-ray astronomy and plasma applications. Knowledge of the refractive index is essential for the design of the optical components of instruments used in experiments and applications. Moreover, measured values of n may be used to evaluate solid state models for the optical behavior of materials. The refractive index n of Si, Mo and Be is investigated in the EUV/soft x-ray region. In the case of Si, angle dependent reflectance measurements are performed in the energy range 50-180 eV. The optical constants δ, β are both determined by fitting to the Fresnel equations. The results of this method are compared to the values in the 1993 atomic tables. Photoabsorption measurements for the optical constants of Mo are performed on C/Mo/C foils, in the energy range 60-930 eV. Photoabsorption measurements on Be thin films supported on silicon nitride membranes are performed, and the results are applied in the determination of the absorption coefficient of Be in the energy region 111.5-250 eV. The new results for Si and Mo are applied to the calculation of normal incidence reflectivities of Mo/Si and Mo/Be multilayer mirrors. These calculations show the importance of accurate knowledge of δ and β in the prediction and modeling of the performance of multilayer optics.

  10. High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas.

    Science.gov (United States)

    Musgrave, Christopher S A; Murakami, Takehiro; Ugomori, Teruyuki; Yoshida, Kensuke; Fujioka, Shinsuke; Nishimura, Hiroaki; Atarashi, Hironori; Iyoda, Tomokazu; Nagai, Keiji

    2017-03-01

    With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed.

  11. Variations in EUV Irradiance: Comparison between LYRA, ESP, and SWAP Integrated Flux

    Directory of Open Access Journals (Sweden)

    Mehmet Sarp Yalim

    2014-01-01

    Full Text Available The Sun Watcher Using Active Pixel System Detector and Image Processing (SWAP telescope and Large Yield Radiometer (LYRA are the two Sun observation instruments on-board PROBA2. SWAP extreme ultraviolet images, if presented in terms of the integrated flux over solar disk, in general, correlate well with LYRA channel 2–4 (zirconium filter and channels QD and 18 of EVE/ESP on-board SDO between 2010 and 2013. Hence, SWAP can be considered as an additional radiometric channel. We compare in detail LYRA channel 2–4 and SWAP integrated flux in July 2010 and in particular during the solar eclipse that occurred on July 11, 2010. During this eclipse, the discrepancy between the two data channels can be explained to be related to the occultation of active region 11087 by the Moon. In the second half of July 2010, LYRA channel 2–4 and SWAP integrated flux deviate from each other, but these differences can also be explained in terms of features appearing on the solar disk such as coronal holes and active regions. By additionally comparing with timeline of EVE/ESP, we can preliminarily interpret these differences in terms of the difference between the broad bandpass of LYRA channel 2–4 and the, relatively speaking, narrower bandpass of SWAP.

  12. Segmentation of photospheric magnetic elements corresponding to coronal features to understand the EUV and UV irradiance variability

    Science.gov (United States)

    Zender, J. J.; Kariyappa, R.; Giono, G.; Bergmann, M.; Delouille, V.; Damé, L.; Hochedez, J.-F.; Kumara, S. T.

    2017-09-01

    Context. The magnetic field plays a dominant role in the solar irradiance variability. Determining the contribution of various magnetic features to this variability is important in the context of heliospheric studies and Sun-Earth connection. Aims: We studied the solar irradiance variability and its association with the underlying magnetic field for a period of five years (January 2011-January 2016). We used observations from the Large Yield Radiometer (LYRA), the Sun Watcher with Active Pixel System detector and Image Processing (SWAP) on board PROBA2, the Atmospheric Imaging Assembly (AIA), and the Helioseismic and Magnetic Imager (HMI) on board the Solar Dynamics Observatory (SDO). Methods: The Spatial Possibilistic Clustering Algorithm (SPoCA) is applied to the extreme ultraviolet (EUV) observations obtained from the AIA to segregate coronal features by creating segmentation maps of active regions (ARs), coronal holes (CHs) and the quiet sun (QS). Further, these maps are applied to the full-disk SWAP intensity images and the full-disk (FD) HMI line-of-sight (LOS) magnetograms to isolate the SWAP coronal features and photospheric magnetic counterparts, respectively. We then computed full-disk and feature-wise averages of EUV intensity and line of sight (LOS) magnetic flux density over ARs/CHs/QS/FD. The variability in these quantities is compared with that of LYRA irradiance values. Results: Variations in the quantities resulting from the segmentation, namely the integrated intensity and the total magnetic flux density of ARs/CHs/QS/FD regions, are compared with the LYRA irradiance variations. We find that the EUV intensity over ARs/CHs/QS/FD is well correlated with the underlying magnetic field. In addition, variations in the full-disk integrated intensity and magnetic flux density values are correlated with the LYRA irradiance variations. Conclusions: Using the segmented coronal features observed in the EUV wavelengths as proxies to isolate the underlying

  13. LAI estimation in a Mediterranean grassland by in situ radiometric measurements and MODIS satellite data

    Science.gov (United States)

    Balzarolo, M.; Arriga, N.; Papale, D.

    2009-04-01

    Leaf Area Index (LAI) is one of a key variables in studying and understanding biogeochemical cycle mechanisms and ecosystem functionalities and, then, one of a main inputs for ecological modeling. Leaf area surface is related to the main interactions between leaves and the atmosphere as water interception, radiation extinction, energy, mass and gas exchange. Therefore LAI reduction, consequently the loss of productivity, is expression of any physiological and biochemical change of plant status due for example to summer water stress in Mediterranean areas. A good knowledge of seasonal trend and spatial variability of LAI can helps not only modelers but also local farmer to manage grasslands in a sustainable way (grazing, harvesting). In situ LAI measurements are often limited to relatively small areas whit a small number of samplings that can be sporadic, destructive and time-consuming. Nowadays an interesting alternative to estimate LAI is provided by a large variety of radiometric sensors (ground, airborne and satellite based) whit several spatial, temporal and spectral resolutions. However, few studies shown the effect of different radiometers set-up on VIs-LAI relationships that are also differently sensible to different ranges of LAI, management and to which method is used for LAI measurements. In this work, we analyzed the relations between several spectral vegetation indexes (VIs) and LAI for the Mediterranean grassland of Amplero, in the Abruzzo Region, Italy. In situ measurements were carried out in 2005 and 2006. Contemporaneously to destructive LAI measurements, radiometric measurements over the grass herbage were made by two different radiometric sensors: by hyperspectral Hand Held ASD spettroradiometer (HYS) field samplings and by broad band measurements (BNR) of incoming and outgoing global (shortwave) solar radiation components and of incident and reflected photosintetically active radiation (PAR). In addition we included in this analysis VIs

  14. CONTRIBUTION OF VELOCITY VORTICES AND FAST SHOCK REFLECTION AND REFRACTION TO THE FORMATION OF EUV WAVES IN SOLAR ERUPTIONS

    Energy Technology Data Exchange (ETDEWEB)

    Wang, Hongjuan; Liu, Siqing; Gong, Jiancun [Center for Space Science and Applied Research, Chinese Academy of Sciences, Beijing 100190 (China); Wu, Ning [School of Tourism and Geography, Yunnan Normal University, Kunming, Yunnan 650031 (China); Lin, Jun [Yunnan Observatories, Chinese Academy of Sciences, Kunming, Yunnan 650011 (China)

    2015-06-01

    We numerically study the detailed evolutionary features of the wave-like disturbance and its propagation in the eruption. This work is a follow-up to Wang et al., using significantly upgraded new simulations. We focus on the contribution of the velocity vortices and the fast shock reflection and refraction in the solar corona to the formation of the EUV waves. Following the loss of equilibrium in the coronal magnetic structure, the flux rope exhibits rapid motions and invokes the fast-mode shock at the front of the rope, which then produces a type II radio burst. The expansion of the fast shock, which is associated with outward motion, takes place in various directions, and the downward expansion shows the reflection and the refraction as a result of the non-uniform background plasma. The reflected component of the fast shock propagates upward and the refracted component propagates downward. As the refracted component reaches the boundary surface, a weak echo is excited. The Moreton wave is invoked as the fast shock touches the bottom boundary, so the Moreton wave lags the type II burst. A secondary echo occurs in the area where reflection of the fast shock encounters the slow-mode shock, and the nearby magnetic field lines are further distorted because of the interaction between the secondary echo and the velocity vortices. Our results indicate that the EUV wave may arise from various processes that are revealed in the new simulations.

  15. Rigorous 3D electromagnetic simulation of ultrahigh efficiency EUV contact-hole printing with chromeless phase shift mask

    Science.gov (United States)

    Sherwin, Stuart; Pistor, Thomas V.; Neureuther, Andrew; Naulleau, Patrick

    2017-03-01

    Contact-hole layer patterning is expected to be one of the first applications for EUV lithography. Conventional absorber masks, however, are extremely inefficient for these layers, placing even more burden on the already challenging source power demands. To address this concern, a chromeless checker-board phase-shift mask for 25- nm dense contacts has been shown to provide a throughput gain of 8x based on characterization with the SHARP EUV microscope and 7x based on micro field patterning with the Berkeley MET. These promising experimental results warrant both assessment for implementation in practice and rigorous simulations for diagnosing 3D mask effects. In this paper we verify the theoretical benefits of phase-shift masks over traditional absorber masks in idealized Kirchhoff analysis, explore the sensitivity of patterning to deviations from the ideal scattered orders, model the etched multilayer using thin-film characteristic matrix analysis, and finally use rigorous 3D Finite-Time Time Domain (FTTD) simulations of etched multilayer masks to explore mitigation of 3D effects to achieve optimal mask designs for minimum-pitch line-space and contact array patterns.

  16. A time dependent relation between EUV solar flare light-curves from lines with differing formation temperatures

    Directory of Open Access Journals (Sweden)

    Thiemann Edward M.B.

    2017-01-01

    Full Text Available Extreme ultraviolet (EUV solar flare emissions evolve in time as the emitting plasma heats and then cools. Although accurately modeling this evolution has been historically difficult, especially for empirical relationships, it is important for understanding processes at the Sun, as well as for their influence on planetary atmospheres. With a goal to improve empirical flare models, a new simple empirical expression is derived to predict how cool emissions evolve based on the evolution of a hotter emission. This technique is initially developed by studying 12 flares in detail observed by the EUV variability experiment (EVE onboard the Solar Dynamics Observatory (SDO. Then, over 1100 flares observed by EVE are analyzed to validate these relationships. The Cargill and Enthalpy Based Thermal Evolution of Loops (EBTEL flare cooling models are used to show that this empirical relationship implies the energy radiated by a population of hotter formed ions is approximately proportional to the energy exciting a population of cooler formed ions emitting when the peak formation temperatures of the two lines are up to 72% of each other and above 2 MK. These results have practical implications for improving flare irradiance empirical modeling and for identifying key emission lines for future monitoring of flares for space weather operations; and also provide insight into the cooling processes of flare plasma.

  17. Pathways to Earth-like atmospheres. Extreme ultraviolet (EUV)-powered escape of hydrogen-rich protoatmospheres.

    Science.gov (United States)

    Lammer, Helmut; Kislyakova, K G; Odert, P; Leitzinger, M; Schwarz, R; Pilat-Lohinger, E; Kulikov, Yu N; Khodachenko, M L; Güdel, M; Hanslmeier, M

    2011-12-01

    We discuss the evolution of the atmosphere of early Earth and of terrestrial exoplanets which may be capable of sustaining liquid water oceans and continents where life may originate. The formation age of a terrestrial planet, its mass and size, as well as the lifetime in the EUV-saturated early phase of its host star play a significant role in its atmosphere evolution. We show that planets even in orbits within the habitable zone of their host stars might not lose nebular- or catastrophically outgassed initial protoatmospheres completely and could end up as water worlds with CO2 and hydrogen- or oxygen-rich upper atmospheres. If an atmosphere of a terrestrial planet evolves to an N2-rich atmosphere too early in its lifetime, the atmosphere may be lost. We show that the initial conditions set up by the formation of a terrestrial planet and by the evolution of the host star's EUV and plasma environment are very important factors owing to which a planet may evolve to a habitable world. Finally we present a method for studying the discussed atmosphere evolution hypotheses by future UV transit observations of terrestrial exoplanets.

  18. On-orbit radiometric validation and field-of-view calibration of spaceborne microwave sounding instruments

    Science.gov (United States)

    Blackwell, William J.; Bickmeier, Laura J.; Jairam, Laura G.; Leslie, R. Vincent

    2008-12-01

    Two calibration/validation efforts planned for current and future spaceborne microwave sounding instruments will be presented. First, the NPOESS Aircraft Sounder Testbed-Microwave (NAST-M) airborne sensor is used to directly validate the microwave radiometers (AMSU and MHS) on several operational satellites. Comparison results for underflights of the Aqua, NOAA, and MetOp-A satellites will be shown. Second, a potential approach will be presented for on-orbit field-of-view (FOV) calibration of the Advanced Technology Microwave Sounder (ATMS). A variety of proposed spacecraft maneuvers that could facilitate the characterization of the radiometric boresight of all 22 ATMS channels will be discussed. Radiance observations from the NAST-M airborne sensor can be used to directly validate the radiometric performance of spaceborne sensors. NAST-M includes a total of four spectrometers, with three operating near the oxygen lines at 50-57, 118.75, and 424.76 GHz, and a fourth spectrometer centered on the water vapor absorption line at 183.31 GHz. All four feedhorns are co-located, have 3-dB (full-width at half-maximum) beamwidths of 7.5° (translating to 2.5-km nominal pixel diameter at nadir incidence), and are directed at a single mirror that scans cross-track beneath the aircraft with a nominal swath width of 100 km. We will present results for two recent validation efforts: 1) the Pacific THORpex (THe Observing-system Research and predictability experiment) Observing System Test (PTOST 2003, Honolulu, HI) and 2) the Joint Airborne IASI Validation Experiment (JAIVEx 2007, Houston, TX). Radiance differences between the NAST-M sensor and the Advanced Microwave Sounding Unit (AMSU) and the Microwave Humidity Sensor (MHS) were found to be less than 1K for most channels. Comparison results for ocean underflights of the Aqua, NOAA, and MetOp-A satellites are shown. We also present an approach for on-orbit FOV calibration of the ATMS satellite instrument using vicarious

  19. In-flight absolute calibration of radiometric sensors over dark targets using vicarious methods

    Science.gov (United States)

    Parada, Robert John, Jr.

    1997-10-01

    The ability to conduct in-flight, absolute radiometric calibrations of ocean color sensors will determine their usefulness in the decade to come. On-board calibration systems are often integrated into the overall design of such sensors and have claimed uncertainty levels below 5%. Independent means of system calibration are needed to confirm that the sensor is accurately calibrated. Vicarious (i.e. ground-referencing) methods are an attractive way to conduct this verification. This research describes the development of in-flight, absolute radiometric calibration methods which reference dark (i.e. low-reflectance) sites. The high sensitivity of ocean color sensors results in saturation over bright surfaces. Low-reflectance targets, such as water bodies, are therefore required for their vicarious calibration. Sensitivity analyses of the reflectance-based and radiance-based techniques, when applied to a water target, are performed. Uncertainties in atmospheric parameters, surface reflectance measurements, and instrument characterization are evaluated for calibrations of a representative ocean color sensor. For a viewing geometry near the sun glint region, reflectance-based uncertainties range between 1.6% and 2.3% for visible and near-IR wavelengths; radiance-based uncertainties range between 6.8% and 20.5%. These studies indicate that better characterization of aerosol parameters is desired and that radiometer pointing accuracy must be improved to make the radiance-based method useful. The uncertainty estimates are evaluated using data from a field campaign at Lake Tahoe in June, 1995. This lake is located on the California-Nevada border and has optical characteristics similar to oceanic waters. Aircraft-based radiance data and surface measurements of water reflectance are used to calibrate visible and near infrared bands of the Airborne Visible/InfraRed Imaging Spectrometer (AVIRIS). The vicariously-derived calibration coefficients are compared to those obtained

  20. High power and high repetition solid state laser for EUV lithography

    Energy Technology Data Exchange (ETDEWEB)

    Fujita, H.; Mitra, A.; Wang, T. and the others [Osaka Univ., Osaka (Japan)

    2004-07-01

    We have been developing a high repetition (5 kHz) and high power (5kW) Nd:YAG laser system for EUV lithography. Key subjects are (1) reliable front-end, (2) uniform and high density pumping of main amplifier rods, and (3) compensation of thermal effects. A stable and reliable front-end based on fiber lasers has been developed. As a cw oscillator using Yb-doped silica fiber operates single longitudinal mode at 1030 nm to 1080nm, various laser materials (Yb:YAG, Nd:YLF, Nd:YAG, Nd:YAP, etc) can be used as main laser medium. A fast LN EO modulator switches out arbitrary pulse shape with response time of 100 ps. Laser pulses from the modulator are amplified by 3 stage fiber amplifiers up to 1 J. We will focus our efforts to attain 1 mJ output from the fiber front-end. Output pulses from the front-end are amplified to 100 mJ level by two 4-mm rod amplifiers (Nd:YAG) and two 6-mm rod amplifiers. Main amplifier chain consists of eight 12-mm rod amplifiers pumped by cw laser diodes. Total output power of the laser diodes is 28.8 kW. Double pass geometry is required to get enough gain and to compensate thermal effects. Spatial filters are installed to adjust thermal lens in the amplifiers and to send an image into just the center of the amplifiers. Ninty degree rotators and faraday rotators are installed in order to compensate thermal birefringence. A test amplifier module was made for investigation on uniform pumping, thermal effects, gain properties, and so on. Six laser diode modules with 4.5 kW total output power are installed in symmetric configuration. Active medium is Nd:YAG rod with 0.6% doping. Diameter and length of the rod are 12 mm and 150 mm, respectively. Peak gain of 1.67 was obtained at 4.2 kW pumping power and 200s pumping duration. Pumping uniformity was measured by both gain distribution and spontaneous emission from the laser rod. Fairly good uniformity was achieved by adjusting pumping geometry. Detail system analysis suggests that 8 amplifier modules

  1. Experimental tests and radiometric calculations for the feasibility of fluorescence LIDAR-based discrimination of oil spills from UAV

    Science.gov (United States)

    Raimondi, Valentina; Palombi, Lorenzo; Lognoli, David; Masini, Andrea; Simeone, Emilio

    2017-09-01

    This paper presents experimental tests and radiometric calculations for the feasibility of an ultra-compact fluorescence LIDAR from an Unmanned Air Vehicle (UAV) for the characterisation of oil spills in natural waters. The first step of this study was to define the experimental conditions for a LIDAR and its budget constraints on the basis of the specifications of small UAVs already available on the market. The second step consisted of a set of fluorescence LIDAR measurements on oil spills in the laboratory in order to propose a simplified discrimination method and to calculate the oil fluorescence conversion efficiency. Lastly, the main technical specifications of the payload were defined and radiometric calculations carried out to evaluate the performances of both the payload and the proposed discrimination method.

  2. Evaluation of Radiometric and Atmospheric Correction Algorithms for Aboveground Forest Biomass Estimation Using Landsat 5 TM Data

    OpenAIRE

    Pablito M. López-Serrano; José J. Corral-Rivas; Ramón A. Díaz-Varela; Juan G. Álvarez-González; Carlos A. López-Sánchez

    2016-01-01

    Solar radiation is affected by absorption and emission phenomena during its downward trajectory from the Sun to the Earth’s surface and during the upward trajectory detected by satellite sensors. This leads to distortion of the ground radiometric properties (reflectance) recorded by satellite images, used in this study to estimate aboveground forest biomass (AGB). Atmospherically-corrected remote sensing data can be used to estimate AGB on a global scale and with moderate effort. The objectiv...

  3. Radiometric cross Calibration of Gaofen-1 WFV Cameras Using Landsat-8 OLI Images: A Simple Image-Based Method

    OpenAIRE

    Juan Li; Lian Feng; Xiaoping Pang; Weishu Gong; Xi Zhao

    2016-01-01

    WFV (Wide Field of View) cameras on-board Gaofen-1 satellite (gaofen means high resolution) provide unparalleled global observations with both high spatial and high temporal resolutions. However, the accuracy of the radiometric calibration remains unknown. Using an improved cross calibration method, the WFV cameras were re-calibrated with well-calibrated Landsat-8 OLI (Operational Land Imager) data as reference. An objective method was proposed to guarantee the homogeneity and sufficient dyna...

  4. Radiometric Cross Calibration of Landsat 8 Operational Land Imager (OLI) and Landsat 7 Enhanced Thematic Mapper Plus (ETM+)

    OpenAIRE

    Nischal Mishra; Md. Obaidul Haque; Larry Leigh; David Aaron; Dennis Helder; Brian Markham

    2014-01-01

    This study evaluates the radiometric consistency between Landsat-8 Operational Land Imager (OLI) and Landsat 7 Enhanced Thematic Mapper Plus (ETM+) using cross calibration techniques. Two approaches are used, one based on cross calibration between the two sensors using simultaneous image pairs, acquired during an underfly event on 29–30 March 2013. The other approach is based on using time series of image statistics acquired by these two sensors over the Libya 4 pseudo invariant calibration ...

  5. Validation of EO-1 Hyperion and Advanced Land Imager Using the Radiometric Calibration Test Site at Railroad Valley, Nevada

    Science.gov (United States)

    Czapla-Myers, Jeffrey; Ong, Lawrence; Thome, Kurtis; McCorkel, Joel

    2015-01-01

    The Earth-Observing One (EO-1) satellite was launched in 2000. Radiometric calibration of Hyperion and the Advanced Land Imager (ALI) has been performed throughout the mission lifetime using various techniques that include ground-based vicarious calibration, pseudo-invariant calibration sites, and also the moon. The EO-1 mission is nearing its useful lifetime, and this work seeks to validate the radiometric calibration of Hyperion and ALI from 2013 until the satellite is decommissioned. Hyperion and ALI have been routinely collecting data at the automated Radiometric Calibration Test Site [RadCaTS/Railroad Valley (RRV)] since launch. In support of this study, the frequency of the acquisitions at RadCaTS has been significantly increased since 2013, which provides an opportunity to analyze the radiometric stability and accuracy during the final stages of the EO-1 mission. The analysis of Hyperion and ALI is performed using a suite of ground instrumentation that measures the atmosphere and surface throughout the day. The final product is an estimate of the top-of-atmosphere (TOA) spectral radiance, which is compared to Hyperion and ALI radiances. The results show that Hyperion agrees with the RadCaTS predictions to within 5% in the visible and near-infrared (VNIR) and to within 10% in the shortwave infrared (SWIR). The 2013-2014 ALI results show agreement to within 6% in the VNIR and 7.5% in the SWIR bands. A cross comparison between ALI and the Operational Land Imager (OLI) using RadCaTS as a transfer source shows agreement of 3%-6% during the period of 2013-2014.

  6. Standards not that standard.

    Science.gov (United States)

    Vilanova, Cristina; Tanner, Kristie; Dorado-Morales, Pedro; Villaescusa, Paula; Chugani, Divya; Frías, Alba; Segredo, Ernesto; Molero, Xavier; Fritschi, Marco; Morales, Lucas; Ramón, Daniel; Peña, Carlos; Peretó, Juli; Porcar, Manuel

    2015-01-01

    There is a general assent on the key role of standards in Synthetic Biology. In two consecutive letters to this journal, suggestions on the assembly methods for the Registry of standard biological parts have been described. We fully agree with those authors on the need of a more flexible building strategy and we highlight in the present work two major functional challenges standardization efforts have to deal with: the need of both universal and orthogonal behaviors. We provide experimental data that clearly indicate that such engineering requirements should not be taken for granted in Synthetic Biology.

  7. Radiometric Correction of Simultaneously Acquired Landsat-7/Landsat-8 and Sentinel-2A Imagery Using Pseudoinvariant Areas (PIA): Contributing to the Landsat Time Series Legacy

    OpenAIRE

    Joan-Cristian Padró; Xavier Pons; David Aragonés; Ricardo Díaz-Delgado; Diego García; Javier Bustamante; Lluís Pesquer; Cristina Domingo-Marimon; Òscar González-Guerrero; Jordi Cristóbal; Daniel Doktor; Maximilian Lange

    2017-01-01

    The use of Pseudoinvariant Areas (PIA) makes it possible to carry out a reasonably robust and automatic radiometric correction for long time series of remote sensing imagery, as shown in previous studies for large data sets of Landsat MSS, TM, and ETM+ imagery. In addition, they can be employed to obtain more coherence among remote sensing data from different sensors. The present work validates the use of PIA for the radiometric correction of pairs of images acquired almost simultaneously (La...

  8. Radiometric Correction of Simultaneously Acquired Landsat-7/Landsat-8 and Sentinel-2A Imagery Using Pseudoinvariant Areas (PIA): Contributing to the Landsat Time Series Legacy

    OpenAIRE

    Padró, Joan-Cristian; Pons, Xavier; Aragonés, David; Díaz-Delgado, Ricardo; García, Diego; Bustamante, Javier; Pesquer, Lluís; Domingo-Marimon, Cristina; González-Guerrero, Óscar; Cristóbal, Jordi; Doktor, Daniel; Lange, Maximilian

    2017-01-01

    The use of Pseudoinvariant Areas (PIA) makes it possible to carry out a reasonably robust and automatic radiometric correction for long time series of remote sensing imagery, as shown in previous studies for large data sets of Landsat MSS, TM, and ETM+ imagery. In addition, they can be employed to obtain more coherence among remote sensing data from different sensors. The present work validates the use of PIA for the radiometric correction of pairs of images acquired almost sim...

  9. Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.

    Energy Technology Data Exchange (ETDEWEB)

    Sizyuk, V.; Hassanein, A.; Morozov, V.; Sizyuk, T.; Mathematics and Computer Science

    2007-01-16

    The HEIGHTS integrated model has been developed as an instrument for simulation and optimization of laser-produced plasma (LPP) sources relevant to extreme ultraviolet (EUV) lithography. The model combines three general parts: hydrodynamics, radiation transport, and heat conduction. The first part employs a total variation diminishing scheme in the Lax-Friedrich formulation (TVD-LF); the second part, a Monte Carlo model; and the third part, implicit schemes with sparse matrix technology. All model parts consider physical processes in three-dimensional geometry. The influence of a generated magnetic field on laser plasma behavior was estimated, and it was found that this effect could be neglected for laser intensities relevant to EUV (up to {approx}10{sup 12} W/cm{sup 2}). All applied schemes were tested on analytical problems separately. Benchmark modeling of the full EUV source problem with a planar tin target showed good correspondence with experimental and theoretical data. Preliminary results are presented for tin droplet- and planar-target LPP devices. The influence of three-dimensional effects on EUV properties of source is discussed.

  10. Particle qualification procedure for the TNO EUV reticle load port module of the HamaTech MaskTrackPro cleaning tool

    NARCIS (Netherlands)

    Stortelder, J.K.; Donck, J.C.J. van der; Oostrom, S.; Walle, P. van der; Brux, O.; Dress, P.

    2011-01-01

    Before new equipment for handling of EUV reticles can be used, it should be shown that the apparatus is qualified for operating at a sufficiently clean level. TNO developed a qualification procedure that is separated into two parts: reticle handling and transport qualification and the qualification

  11. Vesicoureteral reflux in young children: a study of radiometric thermometry as detection modality using an ex vivo porcine model

    Science.gov (United States)

    Jacobsen, Svein; Klemetsen, Øystein; Birkelund, Yngve

    2012-09-01

    Microwave radiometry is evaluated for renal thermometry tailored to detect the pediatric condition of vesicoureteral urine reflux (VUR) from the bladder through the ureter into the kidney. Prior to a potential reflux event, the urine is heated within the bladder by an external body contacting a hyperthermia applicator to generate a fluidic contrast temperature relative to normal body temperature. A single band, miniaturized radiometer (operating at 3.5 GHz) is connected to an electromagnetic-interference-shielded and suction-coupled elliptical antenna to receive thermal radiation from an ex vivo porcine phantom model. Brightness (radiometric) and fiberoptic temperature data are recorded for varying urine phantom reflux volumes (20-40 mL) and contrast temperatures ranging from 2 to 10 °C within the kidney phantom. The kidney phantom itself is located at 40 mm depth (skin-to-kidney center distance) and surrounded by the porcine phantom. Radiometric step responses to injection of urine simulant by a syringe are shown to be highly correlated with in situ kidney temperatures measured by fiberoptic probes. Statistically, the performance of the VUR detecting scheme is evaluated by error probabilities of making a wrong decision. Laboratory testing of the radiometric system supports the feasibility of passive non-invasive kidney thermometry for the detection of VUR classified within the two highest grades

  12. Radiometric ratio characterization for low-to-mid CPV modules operating in variable irradiance conditions

    Science.gov (United States)

    Vorndran, Shelby; Russo, Juan; Zhang, Deming; Gordon, Michael; Kostuk, Raymond

    2012-10-01

    In this work, a concentrating photovoltaic (CPV) design methodology is proposed which aims to maximize system efficiency for a given irradiance condition. In this technique, the acceptance angle of the system is radiometrically matched to the angular spread of the site's average irradiance conditions using a simple geometric ratio. The optical efficiency of CPV systems from flat-plate to high-concentration is plotted at all irradiance conditions. Concentrator systems are measured outdoors in various irradiance conditions to test the methodology. This modeling technique is valuable at the design stage to determine the ideal level of concentration for a CPV module. It requires only two inputs: the acceptance angle profile of the system and the site's average direct and diffuse irradiance fractions. Acceptance angle can be determined by raytracing or testing a fabricated prototype in the lab with a solar simulator. The average irradiance conditions can be found in the Typical Metrological Year (TMY3) database. Additionally, the information gained from this technique can be used to determine tracking tolerance, quantify power loss during an isolated weather event, and do more sophisticated analysis such as I-V curve simulation.

  13. Radiometric and geometric assessment of data from the RapidEye constellation of satellites

    Science.gov (United States)

    Chander, Gyanesh; Haque, Md. Obaidul; Sampath, Aparajithan; Brunn, A.; Trosset, G.; Hoffmann, D.; Roloff, S.; Thiele, M.; Anderson, C.

    2013-01-01

    To monitor land surface processes over a wide range of temporal and spatial scales, it is critical to have coordinated observations of the Earth's surface using imagery acquired from multiple spaceborne imaging sensors. The RapidEye (RE) satellite constellation acquires high-resolution satellite images covering the entire globe within a very short period of time by sensors identical in construction and cross-calibrated to each other. To evaluate the RE high-resolution Multi-spectral Imager (MSI) sensor capabilities, a cross-comparison between the RE constellation of sensors was performed first using image statistics based on large common areas observed over pseudo-invariant calibration sites (PICS) by the sensors and, second, by comparing the on-orbit radiometric calibration temporal trending over a large number of calibration sites. For any spectral band, the individual responses measured by the five satellites of the RE constellation were found to differ B2B) alignment of the image data sets. The position accuracy was assessed by comparing the RE imagery against high-resolution aerial imagery, while the B2B characterization was performed by registering each band against every other band to ensure that the proper band alignment is provided for an image product. The B2B results indicate that the internal alignments of these five RE bands are in agreement, with bands typically registered to within 0.25 pixels of each other or better.

  14. New radiometric ages on gneisses of the Oliverian domes in New Hampshire and Massachusetts

    Energy Technology Data Exchange (ETDEWEB)

    Zartman, R.E.; Leo, G.W.

    1985-03-01

    Gneissic plutons of the Oliverian domes, mantled by Ammonoosuc Volcanics, are located along the axis of the Bronson Hill anticlinorium from New Hampshire to Connecticut. The contacts between the plutonic and volcanic rocks appear to be concordant on a regional scale, but gneiss intrudes the volcanics in several domes. Available radiometric and fossil evidence suggests that the Ammonoosuc Volcanics have a Middle Ordovician age but are somewhat older than the Oliverian gneisses. New U-Pb zircon data from Oliverian gneisses of six domes plot on a concordia diagram as an almost colinear array that yields an upper intercept age of about 444 m.y. The plotted data vary from nearly concordant to moderately discordant, the degree of discordance, correlating with /sup 207/Pb//sup 206/Pb ages that range from 459 to 415 m.y. The pattern of discordance does not relate to the uranium contents of the zircons nor to the geographic distribution of the domes. If /sup 207/Pb//sup 206/Pb ages are considered individually without an assumed consanguinity of the units, however, they do not find particular support in geologic relationships. Thus, they prefer the concordia intercept age of 444 +/- 8 m.y. for the suite as the best estimate for the time of crystallization of the Oliverian gneisses. Possibly, the Whitefield, Gneiss in the Jefferson dome represents a 10 to 15 m.y. older unit, although they are cautious about claiming such resolution with the present data.

  15. Radiometric Cross-calibration of KOMPSAT-3A with Landsat-8

    Directory of Open Access Journals (Sweden)

    D. Y. Shin

    2016-06-01

    Full Text Available In this study, Cross calibration was conducted at the Libya 4 PICS site on 2015 using Landsat-8 and KOMPSAT-3A. Ideally a cross calibration should be calculated for each individual scene pair because on any given date the TOA spectral profile is influenced by sun and satellite view geometry and the atmospheric conditions. However, using the near-simultaneous images minimizes this effect because the sensors are viewing the same atmosphere. For the cross calibration, the calibration coefficient was calculated by comparing the at sensor spectral radiance for the same location calculated using the Landsat-8 calibration parameters in metadata and the DN of KOMPSAT-3A for the regions of interest (ROI. Cross calibration can be conducted because the satellite sensors used for overpass have a similar bandwidth. However, not all satellites have the same color filter transmittance and sensor reactivity, even though the purpose is to observe the visible bands. Therefore, the differences in the RSR should be corrected. For the cross-calibration, a calibration coefficient was calculated using the TOA radiance and KOMPSAT-3 DN of the Landsat-8 OLI overpassed at the Libya 4 Site, As a result, the accuracy of the calibration coefficient at the site was assumed to be ± 1.0%. In terms of the results, the radiometric calibration coefficients suggested here are thought to be useful for maintaining the optical quality of the KOMPSAT-3A.

  16. Experimental research for relative radiometric calibration of imaging spectrometer based on Savart plates

    Science.gov (United States)

    Li, Qiwei; Zhang, Chunmin; Yan, Tingyu

    2017-02-01

    The basic principle of tempo-spatially mixed modulated Fourier transform imaging spectrometer (FTIS) based on savart plates is outlined. A calibration method of pixel response non-uniformity of charge-coupled device (CCD) camera in such type of instrument is presented. The method which uses column-flat-fields can avoid the influence of interference fringes. The use of polychromatic calibration source can solve the problem of the slant of the fringes in large optical path difference areas. The procedure of calibration experiment and the algorithm of data processing are detailed described. Two groups of relative radiometric calibration coefficient are obtained through the method of least-square. The original images are corrected by using the coefficients to validate its calibration effect. The results indicated that the method can obviously improve the uniformity of pixels and the vignetting artifacts and defect of the instrument can be well corrected. This study provides a theoretical guidance for study, design, modulation, experiment and engineering of FTIS.

  17. Multispectral scanner flight model (F-1) radiometric calibration and alignment handbook

    Science.gov (United States)

    1981-01-01

    This handbook on the calibration of the MSS-D flight model (F-1) provides both the relevant data and a summary description of how the data were obtained for the system radiometric calibration, system relative spectral response, and the filter response characteristics for all 24 channels of the four band MSS-D F-1 scanner. The calibration test procedure and resulting test data required to establish the reference light levels of the MSS-D internal calibration system are discussed. The final set of data ("nominal" calibration wedges for all 24 channels) for the internal calibration system is given. The system relative spectral response measurements for all 24 channels of MSS-D F-1 are included. These data are the spectral response of the complete scanner, which are the composite of the spectral responses of the scan mirror primary and secondary telescope mirrors, fiber optics, optical filters, and detectors. Unit level test data on the measurements of the individual channel optical transmission filters are provided. Measured performance is compared to specification values.

  18. Assessment of S-NPP VIIRS On-Orbit Radiometric Calibration and Performance

    Directory of Open Access Journals (Sweden)

    Xiaoxiong Xiong

    2016-01-01

    Full Text Available The VIIRS instrument on board the S-NPP spacecraft has successfully operated for more than four years since its launch in October 2011. Many VIIRS environmental data records (EDR have been continuously generated from its sensor data records (SDR with improved quality, enabling a wide range of applications in support of users in both the operational and research communities. This paper provides a brief review of sensor on-orbit calibration methodologies for both the reflective solar bands (RSB and the thermal emissive bands (TEB and an overall assessment of their on-orbit radiometric performance using measurements from instrument on-board calibrators (OBC, as well as regularly scheduled lunar observations. It describes and illustrates changes made and to be made for calibration and data quality improvements. Throughout the mission, all of the OBC have continued to operate and function normally, allowing critical calibration parameters used in the data production systems to be derived and updated. The temperatures of the on-board blackbody (BB and the cold focal plane assemblies are controlled with excellent stability. Despite large optical throughput degradation discovered shortly after launch in several near- and short-wave infrared spectral bands and strong wavelength-dependent solar diffuser degradation, the VIIRS overall performance has continued to meet its design requirements. Also discussed in this paper are challenging issues identified and efforts to be made to further enhance the sensor calibration and characterization, thereby maintaining or improving data quality.

  19. Radiometric and Geometric Analysis of Hyperspectral Imagery Acquired from an Unmanned Aerial Vehicle

    Directory of Open Access Journals (Sweden)

    Nancy F. Glenn

    2012-09-01

    Full Text Available In the summer of 2010, an Unmanned Aerial Vehicle (UAV hyperspectral calibration and characterization experiment of the Resonon PIKA II imaging spectrometer was conducted at the US Department of Energy’s Idaho National Laboratory (INL UAV Research Park. The purpose of the experiment was to validate the radiometric calibration of the spectrometer and determine the georegistration accuracy achievable from the on-board global positioning system (GPS and inertial navigation sensors (INS under operational conditions. In order for low-cost hyperspectral systems to compete with larger systems flown on manned aircraft, they must be able to collect data suitable for quantitative scientific analysis. The results of the in-flight calibration experiment indicate an absolute average agreement of 96.3%, 93.7% and 85.7% for calibration tarps of 56%, 24%, and 2.5% reflectivity, respectively. The achieved planimetric accuracy was 4.6 m (based on RMSE with a flying height of 344 m above ground level (AGL.

  20. Assessment of S-NPP VIIRS On-Orbit Radiometric Calibration and Performance

    Science.gov (United States)

    Xiong, Xiaoxiong; Butler, James; Chiang, Kwofu; Efremova, Boryana; Fullbright, Jon; Lei, Ning; McIntire, Jeff; Oudrari, Hassan; Wang, Zhipeng; Wu, Aisheng

    2016-01-01

    The VIIRS instrument on board the S-NPP spacecraft has successfully operated for more than four years since its launch in October, 2011. Many VIIRS environmental data records (EDR) have been continuously generated from its sensor data records (SDR) with improved quality, enabling a wide range of applications in support of users in both the operational and research communities. This paper provides a brief review of sensor on-orbit calibration methodologies for both the reflective solar bands (RSB) and the thermal emissive bands (TEB) and an overall assessment of their on-orbit radiometric performance using measurements from instrument on-board calibrators (OBC) as well as regularly scheduled lunar observations. It describes and illustrates changes made and to be made for calibration and data quality improvements. Throughout the mission, all of the OBC have continued to operate and function normally, allowing critical calibration parameters used in the data production systems to be derived and updated. The temperatures of the on-board blackbody (BB) and the cold focal plane assemblies are controlled with excellent stability. Despite large optical throughput degradation discovered shortly after launch in several near and short-wave infrared spectral bands and strong wavelength dependent solar diffuser degradation, the VIIRS overall performance has continued to meet its design requirements. Also discussed in this paper are challenging issues identified and efforts to be made to further enhance the sensor calibration and characterization, thereby maintaining or improving data quality.