WorldWideScience

Sample records for driven on-chip micromachines

  1. Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Directory of Open Access Journals (Sweden)

    M. I. KILANI

    2009-08-01

    Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

  2. Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

    KAUST Repository

    Sallam, Mai

    2015-06-01

    This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

  3. System on chip module configured for event-driven architecture

    Science.gov (United States)

    Robbins, Kevin; Brady, Charles E.; Ashlock, Tad A.

    2017-10-17

    A system on chip (SoC) module is described herein, wherein the SoC modules comprise a processor subsystem and a hardware logic subsystem. The processor subsystem and hardware logic subsystem are in communication with one another, and transmit event messages between one another. The processor subsystem executes software actors, while the hardware logic subsystem includes hardware actors, the software actors and hardware actors conform to an event-driven architecture, such that the software actors receive and generate event messages and the hardware actors receive and generate event messages.

  4. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.

    2015-10-26

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  5. On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

    KAUST Repository

    Sallam, Mai O.

    2016-12-19

    In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

  6. On-Chip Single-Plasmon Nanocircuit Driven by a Self-Assembled Quantum Dot.

    Science.gov (United States)

    Wu, Xiaofei; Jiang, Ping; Razinskas, Gary; Huo, Yongheng; Zhang, Hongyi; Kamp, Martin; Rastelli, Armando; Schmidt, Oliver G; Hecht, Bert; Lindfors, Klas; Lippitz, Markus

    2017-07-12

    Quantum photonics holds great promise for future technologies such as secure communication, quantum computation, quantum simulation, and quantum metrology. An outstanding challenge for quantum photonics is to develop scalable miniature circuits that integrate single-photon sources, linear optical components, and detectors on a chip. Plasmonic nanocircuits will play essential roles in such developments. However, for quantum plasmonic circuits, integration of stable, bright, and narrow-band single photon sources in the structure has so far not been reported. Here we present a plasmonic nanocircuit driven by a self-assembled GaAs quantum dot. Through a planar dielectric-plasmonic hybrid waveguide, the quantum dot efficiently excites narrow-band single plasmons that are guided in a two-wire transmission line until they are converted into single photons by an optical antenna. Our work demonstrates the feasibility of fully on-chip plasmonic nanocircuits for quantum optical applications.

  7. Power Efficient Gigabit Communication Over Capacitively Driven RC-Limited On-Chip Interconnects

    NARCIS (Netherlands)

    Mensink, E.; Schinkel, Daniel; Klumperink, Eric A.M.; van Tuijl, Adrianus Johannes Maria; Nauta, Bram

    2010-01-01

    Abstract—This paper presents a set of circuit techniques to achieve high data rate point-to-point communication over long on-chip RC-limited wire-pairs. The ideal line termination impedances for a flat transfer function with linear phase (pure delay) are derived, using an s-parameter wire-pair

  8. A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

    NARCIS (Netherlands)

    Bohm, S.; Burger, G.J.; Burger, G.J.; Korthorst, M.T.; Roseboom, F.

    2000-01-01

    In this paper a novel combination of a micromachined silicon valve with low dead volume and a bi-stable electromagnetic actuator produced by conventional machining is presented. The silicon valve part, 7×7×1 mm3 in dimensions, is a sandwich construction of two KOH etched silicon wafers with a layer

  9. Property-driven functional verification technique for high-speed vision system-on-chip processor

    Science.gov (United States)

    Nshunguyimfura, Victor; Yang, Jie; Liu, Liyuan; Wu, Nanjian

    2017-04-01

    The implementation of functional verification in a fast, reliable, and effective manner is a challenging task in a vision chip verification process. The main reason for this challenge is the stepwise nature of existing functional verification techniques. This vision chip verification complexity is also related to the fact that in most vision chip design cycles, extensive efforts are focused on how to optimize chip metrics such as performance, power, and area. Design functional verification is not explicitly considered at an earlier stage at which the most sound decisions are made. In this paper, we propose a semi-automatic property-driven verification technique. The implementation of all verification components is based on design properties. We introduce a low-dimension property space between the specification space and the implementation space. The aim of this technique is to speed up the verification process for high-performance parallel processing vision chips. Our experimentation results show that the proposed technique can effectively improve the verification effort up to 20% for the complex vision chip design while reducing the simulation and debugging overheads.

  10. Micromachined, planar-geometry, atmospheric-pressure, battery-operated microplasma devices (MPDs) on chips for analysis of microsamples of liquids, solids, or gases by optical-emission spectrometry.

    Science.gov (United States)

    Karanassios, Vassili; Johnson, Kara; Smith, Andrea T

    2007-08-01

    Because of their desirable characteristics, for example small size, lightness, low power and gas consumption, and potential for portability, miniaturized plasma sources are receiving significant attention in the scientific literature. To take advantage of these characteristics we micromachined and fabricated new, planar-geometry, self-igniting, atmospheric-pressure microplasma devices (MPDs) on chips. These microplasmas required such low power for their operation they could be operated from a re-chargeable battery (of the type used in cordless power-tools). Despite their advantages, most miniaturized plasma sources reported in the literature have not performed well with liquid samples; analysis of powders or solids that can be converted to a powder (and processed and used as slurries) is even more difficult. To address these shortcomings we coupled an electrothermal, mini-in-torch vaporization (mini-ITV) "dry" sample-introduction system to the low-power planar microplasma devices we developed. In this preliminary investigation, absolute detection limits obtained from microsamples of single-element liquid standards and optical emission spectrometry with photomultiplier-tube detection and a spectral bandpass similar to that of portable, commercially available fiber-optic spectrometers were in the low-pg to ng range, for example 2 pg (for K) to 25 ng (for Pb). Mini-ITV also enabled (as far as we are aware, for the first time) measurement of analyte emission from microsamples of powdered solids (as slurries). In addition to the 3% H2 in Ar mixtures, the ac-operated microplasmas were sustained by use of a variety of electrode materials and different plasma-support gases (e.g. Ar, He and 3% H2 in He) thus indicating fabrication versatility and operational flexibility. Such flexibility has the potential to enable microplasmas to be tailored to analytical problems, and this is demonstrated by using a He MPD and chlorine emission measurements (837.594 nm) from gaseous

  11. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    Energy Technology Data Exchange (ETDEWEB)

    Schwinkendorf, Jan-Patrick

    2012-08-15

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  12. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    International Nuclear Information System (INIS)

    Schwinkendorf, Jan-Patrick

    2012-05-01

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  13. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  14. On-Chip Bondwire Magnetics with Ferrite-Epoxy Glob Coating for Power Systems on Chip

    Directory of Open Access Journals (Sweden)

    Jian Lu

    2008-01-01

    Full Text Available A novel concept of on-chip bondwire inductors and transformers with ferrite epoxy glob coating is proposed to offer a cost effective approach realizing power systems on chip (SOC. We have investigated the concept both experimentally and with finite element modeling. A Q factor of 30–40 is experimentally demonstrated for the bondwire inductors which represents an improvement by a factor of 3–30 over the state-of-the-art MEMS micromachined inductors. Transformer parameters including self- and mutual inductance and coupling factors are extracted from both modeled and measured S-parameters. More importantly, the bondwire magnetic components can be easily integrated into SOC manufacturing processes with minimal changes and open enormous possibilities for realizing cost-effective, high-current, high-efficiency power SOCs.

  15. Micromachined Precision Inertial Instruments

    National Research Council Canada - National Science Library

    Najafi, Khalil

    2003-01-01

    This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

  16. Omega-X micromachining system

    International Nuclear Information System (INIS)

    Miller, D.M.

    1978-01-01

    A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

  17. Micromachined droplet ejector arrays

    Science.gov (United States)

    Perçin, Gökhan; Yaralioglu, Göksenin G.; Khuri-Yakub, Butrus T.

    2002-12-01

    In this article we present a micromachined flextensional droplet ejector array used to eject liquids. By placing a fluid behind one face of a vibrating circular plate that has an orifice at its center, we achieve continuous ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels, organic polymers, photoresists, low-k dielectrics, adhesives, and chemical and biological samples. Micromachined two-dimensional array flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejections of water through a 4 μm diameter orifice at 3.45 MHz and a 10 μm diameter orifice at 2.15 MHz were demonstrated by using the developed micromachined two-dimensional array ejectors.

  18. Pressure-driven one-step solid phase-based on-chip sample preparation on a microfabricated plastic device and integration with flow-through polymerase chain reaction (PCR).

    Science.gov (United States)

    Tran, Hong Hanh; Trinh, Kieu The Loan; Lee, Nae Yoon

    2013-10-01

    In this study, we fabricate a monolithic poly(methylmethacrylate) (PMMA) microdevice on which solid phase-based DNA preparation and flow-through polymerase chain reaction (PCR) units were functionally integrated for one-step sample preparation and amplification operated by pressure. Chelex resin, which is used as a solid support for DNA preparation, can capture denatured proteins but releases DNA, and the purified DNA can then be used as a template in a subsequent amplification process. Using the PMMA microdevices, DNA was successfully purified from both Escherichia coli and human hair sample, and the plasmid vector inserted in E. coli and the D1S80 locus in human genomic DNA were successfully amplified from on-chip purified E. coli and human hair samples. Furthermore, the integration potential of the proposed sample preparation and flow-through PCR units was successfully demonstrate on a monolithic PMMA microdevice with a seamless flow, which could pave the way for a pressure-driven, simple one-step sample preparation and amplification with greatly decreased manufacture cost and enhanced device disposability. Copyright © 2013 Elsevier B.V. All rights reserved.

  19. Tunable on chip optofluidic laser

    DEFF Research Database (Denmark)

    Bakal, Avraham; Vannahme, Christoph; Kristensen, Anders

    2016-01-01

    On chip tunable laser is demonstrated by realizing a microfluidic droplet array. The periodicity is controlled by the pressure applied to two separate inlets, allowing to tune the lasing frequency over a broad spectral range.......On chip tunable laser is demonstrated by realizing a microfluidic droplet array. The periodicity is controlled by the pressure applied to two separate inlets, allowing to tune the lasing frequency over a broad spectral range....

  20. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  1. Stiction in surface micromachining

    NARCIS (Netherlands)

    Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1996-01-01

    Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

  2. Reconfigurable Networks-on-Chip

    CERN Document Server

    Chen, Sao-Jie; Tsai, Wen-Chung; Hu, Yu-Hen

    2012-01-01

    This book provides a comprehensive survey of recent progress in the design and implementation of Networks-on-Chip. It addresses a wide spectrum of on-chip communication problems, ranging from physical, network, to application layers. Specific topics that are explored in detail include packet routing, resource arbitration, error control/correction, application mapping, and communication scheduling. Additionally, a novel bi-directional communication channel NoC (BiNoC) architecture is described, with detailed explanation.   Written for practicing engineers in need of practical knowledge about the design and implementation of networks-on-chip; Includes tutorial-like details to introduce readers to a diverse range of NoC designs, as well as in-depth analysis for designers with NoC experience to explore advanced issues; Describes a variety of on-chip communication architectures, including a novel bi-directional communication channel NoC.     From the Foreword: Overall this book shows important advances over the...

  3. On-chip data communication

    NARCIS (Netherlands)

    Schinkel, Daniel

    2011-01-01

    On-chip data communication is an active research area, as interconnects are rapidly becoming a speed, power and reliability bottleneck for digital CMOS systems. Especially for global interconnects that have to span large parts of a chip, there is an increasing gap between transistor speed and

  4. Micromachining with copper lasers

    Science.gov (United States)

    Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

    1997-04-01

    In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

  5. Micromachined silicon seismic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Sniegowski, J.J.; Armour, D.L.; Fleming, R.P.

    1995-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of CTBT monitoring by providing inexpensive, easily depolyable sensor arrays. Although our goal is to fabricate seismic sensors that provide the same performance level as the current state-of-the-art ``macro`` systems, if necessary one could deploy a larger number of these small sensors at closer proximity to the location being monitored in order to compensate for lower performance. We have chosen a modified pendulum design and are manufacturing prototypes in two different silicon micromachining fabrication technologies. The first set of prototypes, fabricated in our advanced surface- micromachining technology, are currently being packaged for testing in servo circuits -- we anticipate that these devices, which have masses in the 1--10 {mu}g range, will resolve sub-mG signals. Concurrently, we are developing a novel ``mold`` micromachining technology that promises to make proof masses in the 1--10 mg range possible -- our calculations indicate that devices made in this new technology will resolve down to at least sub-{mu}G signals, and may even approach to 10{sup {minus}10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  6. On-chip optical processing

    Science.gov (United States)

    Motamedi, M. Edward; Wu, Ming C.; Pister, Kristofer S. J.

    1996-09-01

    Microoptical components, such as diffractive and refractive microlenses, micromirrors, beam splitter and beam combining have recently received considerable attention in the optics R&D centers and finally in the manufacturing community. This achievement is due to MEM technology that demonstrated major improvements in overall performance/cost of optical systems while offering the possibility of relatively rapid transition to products for military, industrial and consumer markets. Because of these technology advances, an industrial infrastructure is rapidly becoming established to provide combining microoptical components and MEM-based microactuators for on-chip optical processing. Optical systems that once were considered to be impractical due to the limitations of bulk optics can now easily be designed and fabricated with all required optical paths, signal conditioning, and electronic controls, integrated on a single chip. On-chip optical processing will enhance the performance of devices such as focal plane optical concentrator, smart actuators, color separation, beam shaping, FDDI switch, digital micromirror devices (DMDs), and miniature optical scanners. In this paper we review advances in microoptical components developed at Rockwell Science Center. We also review the potential of on-chip optical processing and recent achievement of free-space integrated optics and microoptical bench components developed at UCLA, and DMDs developed at Texas Instruments.

  7. Magnetically Driven Micromachines Created by Two-Photon Microfabrication and Selective Electroless Magnetite Plating for Lab-on-a-Chip Applications

    Directory of Open Access Journals (Sweden)

    Tommaso Zandrini

    2017-01-01

    Full Text Available We propose a novel method to fabricate three-dimensional magnetic microparts, which can be integrated in functional microfluidic networks and lab-on-a-chip devices, by the combination of two-photon microfabrication and selective electroless plating. In our experiments, magnetic microparts could be successfully fabricated by optimizing various experimental conditions of electroless plating. In addition, energy dispersive X-ray spectrometry (EDS clarified that iron oxide nanoparticles were deposited onto the polymeric microstructure site-selectively. We also fabricated magnetic microrotors which could smoothly rotate using common laboratory equipment. Since such magnetic microparts can be remotely driven with an external magnetic field, our fabrication process can be applied to functional lab-on-a-chip devices for analytical and biological applications.

  8. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    Science.gov (United States)

    Lin, Jintian; Xu, Yingxin; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-09-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality ( Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  9. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  10. On-Chip Detection of Cellular Activity

    Science.gov (United States)

    Almog, R.; Daniel, R.; Vernick, S.; Ron, A.; Ben-Yoav, H.; Shacham-Diamand, Y.

    The use of on-chip cellular activity monitoring for biological/chemical sensing is promising for environmental, medical and pharmaceutical applications. The miniaturization revolution in microelectronics is harnessed to provide on-chip detection of cellular activity, opening new horizons for miniature, fast, low cost and portable screening and monitoring devices. In this chapter we survey different on-chip cellular activity detection technologies based on electrochemical, bio-impedance and optical detection. Both prokaryotic and eukaryotic cell-on-chip technologies are mentioned and reviewed.

  11. Micromachined electrode array

    Science.gov (United States)

    Okandan, Murat; Wessendorf, Kurt O.

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  12. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  13. Towards Dependable Network-on-Chip Architectures

    NARCIS (Netherlands)

    Chen, C.

    2015-01-01

    The aggressive semiconductor technology scaling provides the means for doubling the amount of transistors on a single chip each and every 18 months. To efficiently utilize these vast chip resources, Multi-Processor Systems on Chip (MPSoCs) integrated with a Network-on-Chip (NoC) communication

  14. Photonic network-on-chip design

    CERN Document Server

    Bergman, Keren; Biberman, Aleksandr; Chan, Johnnie; Hendry, Gilbert

    2013-01-01

    This book provides a comprehensive synthesis of the theory and practice of photonic devices for networks-on-chip. It outlines the issues in designing photonic network-on-chip architectures for future many-core high performance chip multiprocessors. The discussion is built from the bottom up: starting with the design and implementation of key photonic devices and building blocks, reviewing networking and network-on-chip theory and existing research, and finishing with describing various architectures, their characteristics, and the impact they will have on a computing system. After acquainting

  15. Micromachined high-performance RF passives in CMOS substrate

    International Nuclear Information System (INIS)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-01-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

  16. On-chip power delivery and management

    CERN Document Server

    Vaisband, Inna P; Popovich, Mikhail; Mezhiba, Andrey V; Köse, Selçuk; Friedman, Eby G

    2016-01-01

    This book describes methods for distributing power in high speed, high complexity integrated circuits with power levels exceeding many tens of watts and power supplies below a volt. It provides a broad and cohesive treatment of power delivery and management systems and related design problems, including both circuit network models and design techniques for on-chip decoupling capacitors, providing insight and intuition into the behavior and design of on-chip power distribution systems. Organized into subareas to provide a more intuitive flow to the reader, this fourth edition adds more than a hundred pages of new content, including inductance models for interdigitated structures, design strategies for multi-layer power grids, advanced methods for efficient power grid design and analysis, and methodologies for simultaneously placing on-chip multiple power supplies and decoupling capacitors. The emphasis of this additional material is on managing the complexity of on-chip power distribution networks.

  17. Novel micromachined on-chip 10-elements wire-grid array operating at 60 GHz

    KAUST Repository

    Sallam, Mai O.

    2017-06-07

    This paper presents a new topology for a wire-grid antenna array which operates at 60 GHz. The array consists of ten λ/2 dipole radiators connected via non-radiating connectors. Both radiators and connectors are placed on top of narrow silicon walls. The antenna is fed with a coplanar microstrip lines placed at the other side of the wafer and is connected with its feeding transmission lines using through-silicon-vias. The antenna is optimized for two cases: using high- and low-resistivity silicon substrates. The former has better radiation characteristics while the later is more compatible with the driving electronic circuits. The antenna has high directivity, reasonable bandwidth and high polarization purity.

  18. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314 ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  19. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    OpenAIRE

    Dunzhu Xia; Cheng Yu; Lun Kong

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostati...

  20. Variation Tolerant On-Chip Interconnects

    CERN Document Server

    Nigussie, Ethiopia Enideg

    2012-01-01

    This book presents design techniques, analysis and implementation of high performance and power efficient, variation tolerant on-chip interconnects.  Given the design paradigm shift to multi-core, interconnect-centric designs and the increase in sources of variability and their impact in sub-100nm technologies, this book will be an invaluable reference for anyone concerned with the design of next generation, high-performance electronics systems. Provides comprehensive, circuit-level explanation of high-performance, energy-efficient, variation-tolerant on-chip interconnect; Describes design techniques to mitigate problems caused by variation; Includes techniques for design and implementation of self-timed on-chip interconnect, delay variation insensitive communication protocols, high speed signaling techniques and circuits, bit-width independent completion detection and process, voltage and temperature variation tolerance.                          

  1. Laser Micromachining of Glass, Silicon, and Ceramics

    Directory of Open Access Journals (Sweden)

    L. Rihakova

    2015-01-01

    Full Text Available A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

  2. Micromachined patch-clamp apparatus

    Science.gov (United States)

    Okandan, Murat

    2012-12-04

    A micromachined patch-clamp apparatus is disclosed for holding one or more cells and providing electrical, chemical, or mechanical stimulation to the cells during analysis with the patch-clamp technique for studying ion channels in cell membranes. The apparatus formed on a silicon substrate utilizes a lower chamber formed from silicon nitride using surface micromachining and an upper chamber formed from a molded polymer material. An opening in a common wall between the chambers is used to trap and hold a cell for analysis using the patch-clamp technique with sensing electrodes on each side of the cell. Some embodiments of the present invention utilize one or more electrostatic actuators formed on the substrate to provide mechanical stimulation to the cell being analyzed, or to provide information about mechanical movement of the cell in response to electrical or chemical stimulation.

  3. On-chip mode division multiplexing technologies

    DEFF Research Database (Denmark)

    Ding, Yunhong; Frellsen, Louise Floor; Guan, Xiaowei

    2016-01-01

    Space division multiplexing (SDM) is currently widely investigated in order to provide enhanced capacity thanks to the utilization of space as a new degree of multiplexing freedom in both optical fiber communication and on-chip interconnects. Basic components allowing the processing of spatial...... using one-dimensional (1D) photonic crystal silicon waveguides. We furthermore use the fabricated devices to demonstrate on-chip point-to-point mode division multiplexing transmission, and all-optical signal processing by mode-selective wavelength conversion. Finally, we report an efficient silicon...

  4. Asynchronous design of Networks-on-Chip

    DEFF Research Database (Denmark)

    Sparsø, Jens

    2007-01-01

    The Network-on-chip concept has evolved as a solution to a broad range of problems related to the design of complex systems-on-chip (SoC) with tenths or hundreds of (heterogeneous) IP-cores. The paper introduces the NoC concept, identifies a range of possible timing organizations (globally-synchronous......, mesochronous, globally-asynchronous locally-synchronous and fully asynchronous), discusses the circuitry needed to implement these timing methodologies, and provides some implementation details for a couple of asynchronous NoCs designed at the Technical University of Denmark (DTU). The paper is written...

  5. Communication architectures for systems-on-chip

    CERN Document Server

    Ayala, Jose L

    2011-01-01

    A presentation of state-of-the-art approaches from an industrial applications perspective, Communication Architectures for Systems-on-Chip shows professionals, researchers, and students how to attack the problem of data communication in the manufacture of SoC architectures. With its lucid illustration of current trends and research improving the performance, quality, and reliability of transactions, this is an essential reference for anyone dealing with communication mechanisms for embedded systems, systems-on-chip, and multiprocessor architectures--or trying to overcome existing limitations.

  6. Micromachined silicon seismic accelerometer development

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S. [and others

    1996-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  7. Chromosome Conformation Capture on Chip (4C)

    DEFF Research Database (Denmark)

    Leblanc, Benjamin Olivier; Comet, Itys; Bantignies, Frédéric

    2016-01-01

    4C methods are useful to investigate dependencies between regulatory mechanisms and chromatin structures by revealing the frequency of chromatin contacts between a locus of interest and remote sequences on the chromosome. In this chapter we describe a protocol for the data analysis of microarray-...... to analyze ChIP-on-chip data on broadly distributed chromatin components such as histone marks....

  8. System-on-Chip Design and Implementation

    Science.gov (United States)

    Brackenbury, L. E. M.; Plana, L. A.; Pepper, J.

    2010-01-01

    The system-on-chip module described here builds on a grounding in digital hardware and system architecture. It is thus appropriate for third-year undergraduate computer science and computer engineering students, for post-graduate students, and as a training opportunity for post-graduate research students. The course incorporates significant…

  9. Planar silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G. [Sandia National Labs., Albuquerque, NM (United States). Microelectronics Development Lab.

    1997-09-01

    Surface-micromachined silicon inertial sensors are limited to relatively high-G applications in part because of the fundamental limitations on proof mass imposed by the manufacturing technology. At the same time, traditional micromolding technologies such as LIGA do not lend themselves to integration with electronics, a capability which is equally necessary for high-performance inertial sensors. The silicon micromolding processes described in this report promise to offer both larger proof masses and integrability with on-chip electronics. In Sandia`s silicon micromolding process, the proof mass is formed using a mold which is first recessed into the substrate using a deep silicon trench etch, then lined with a sacrificial or etch-stop layer, and filled with mechanical polysilicon. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {micro}m) rather than the thickness of deposited polysilicon (typically 2 {micro}m). The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. The authors anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems including high-performance inertial sensing systems.

  10. Self-powered integrated systems-on-chip (energy chip)

    KAUST Repository

    Hussain, Muhammad Mustafa

    2010-04-23

    In today\\'s world, consumer driven technology wants more portable electronic gadgets to be developed, and the next big thing in line is self-powered handheld devices. Therefore to reduce the power consumption as well as to supply sufficient power to run those devices, several critical technical challenges need to be overcome: a. Nanofabrication of macro/micro systems which incorporates the direct benefit of light weight (thus portability), low power consumption, faster response, higher sensitivity and batch production (low cost). b. Integration of advanced nano-materials to meet the performance/cost benefit trend. Nano-materials may offer new functionalities that were previously underutilized in the macro/micro dimension. c. Energy efficiency to reduce power consumption and to supply enough power to meet that low power demand. We present a pragmatic perspective on a self-powered integrated System on Chip (SoC). We envision the integrated device will have two objectives: low power consumption/dissipation and on-chip power generation for implementation into handheld or remote technologies for defense, space, harsh environments and medical applications. This paper provides insight on materials choices, intelligent circuit design, and CMOS compatible integration.

  11. Mechanical Micro-Machining and Laser Micro-Machining

    Science.gov (United States)

    Lou, Ning

    Ever since the 2000s, the manufacturing industry has gained tremendous development in terms of precision. Therefore, micro-machining as a cutting-edge technique has drawn more and more attention in precision-machining realm and been able to take on challenges brought by this. This doctoral program explores the micro-machining realm and results are consisted of two major parts. First, the machinability of "difficult-to-cut" materials is of interest where Inconel 718 is selected as its characteristics include outstanding strength and lackluster thermal conductivity. For its extraordinary hardness and sustainability, coated cemented carbide tools are selected for micro-endmilling processes on Inconel. The cutting forces along x and y axis, respectively, are analyzed to reveal any impact from the inputs. Moreover, the chip morphology is examined. Suggestions are made for future research guidance. As first part serves as preliminary work of the program, the research carries onto the second part - laser micro-machining which is considerably different from conventional machining. The laser being considered employs pulsewidth in realm of picosecond (10-12 s) and frequency of tens of kilohertz. This results in a very small energy distribution per pulse (microJ) and is called ultrafast or ultrashort laser machining. To study this type of technology, an all-new machining system needs to be built incorporating highly advanced apparatus such as laser head, scan head, attenuator, and beam expander, et al. From exit of laser head to workpiece, laser need to travel through all optical components and any deviation may leads to severe out-of-focus error as the depth of focus is within micron level. Thus, optical alignment along laser travelling route is key to successful machining results. This part of research focuses on the design and assembly of this system as a reliable structure offering both support and alignment to the laser delivery. 3-Dimentional (3D) Computer

  12. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  13. Cache-aware network-on-chip for chip multiprocessors

    Science.gov (United States)

    Tatas, Konstantinos; Kyriacou, Costas; Dekoulis, George; Demetriou, Demetris; Avraam, Costas; Christou, Anastasia

    2009-05-01

    This paper presents the hardware prototype of a Network-on-Chip (NoC) for a chip multiprocessor that provides support for cache coherence, cache prefetching and cache-aware thread scheduling. A NoC with support to these cache related mechanisms can assist in improving systems performance by reducing the cache miss ratio. The presented multi-core system employs the Data-Driven Multithreading (DDM) model of execution. In DDM thread scheduling is done according to data availability, thus the system is aware of the threads to be executed in the near future. This characteristic of the DDM model allows for cache aware thread scheduling and cache prefetching. The NoC prototype is a crossbar switch with output buffering that can support a cache-aware 4-node chip multiprocessor. The prototype is built on the Xilinx ML506 board equipped with a Xilinx Virtex-5 FPGA.

  14. Microengineered physiological biomimicry: organs-on-chips.

    Science.gov (United States)

    Huh, Dongeun; Torisawa, Yu-suke; Hamilton, Geraldine A; Kim, Hyun Jung; Ingber, Donald E

    2012-06-21

    Microscale engineering technologies provide unprecedented opportunities to create cell culture microenvironments that go beyond current three-dimensional in vitro models by recapitulating the critical tissue-tissue interfaces, spatiotemporal chemical gradients, and dynamic mechanical microenvironments of living organs. Here we review recent advances in this field made over the past two years that are focused on the development of 'Organs-on-Chips' in which living cells are cultured within microfluidic devices that have been microengineered to reconstitute tissue arrangements observed in living organs in order to study physiology in an organ-specific context and to develop specialized in vitro disease models. We discuss the potential of organs-on-chips as alternatives to conventional cell culture models and animal testing for pharmaceutical and toxicology applications. We also explore challenges that lie ahead if this field is to fulfil its promise to transform the future of drug development and chemical safety testing.

  15. Routing algorithms in networks-on-chip

    CERN Document Server

    Daneshtalab, Masoud

    2014-01-01

    This book provides a single-source reference to routing algorithms for Networks-on-Chip (NoCs), as well as in-depth discussions of advanced solutions applied to current and next generation, many core NoC-based Systems-on-Chip (SoCs). After a basic introduction to the NoC design paradigm and architectures, routing algorithms for NoC architectures are presented and discussed at all abstraction levels, from the algorithmic level to actual implementation.  Coverage emphasizes the role played by the routing algorithm and is organized around key problems affecting current and next generation, many-core SoCs. A selection of routing algorithms is included, specifically designed to address key issues faced by designers in the ultra-deep sub-micron (UDSM) era, including performance improvement, power, energy, and thermal issues, fault tolerance and reliability.   ·         Provides a comprehensive overview of routing algorithms for Networks-on-Chip and NoC-based, manycore systems; ·         Describe...

  16. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  17. Integrated mold/surface-micromachining process

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S.; Sniegowski, J.J.; Hetherington, D.L.

    1996-03-01

    We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration vehicle, is that of an accelerometer with a large proof mass and compliant suspension. The proof mass is formed by etching a mold into the silicon substrate, lining the mold with oxide, filling it with mechanical polysilicon, and then planarizing back to the level of the substrate. The resulting molded structure is recessed into the substrate, forming a planar surface ideal for subsequent processing. We then add surface-micromachined springs and sense contacts. The principal advantage of this new monolithically integrated mold/surface-micromachining process is that it decouples the design of the different sections of the device: In the case of a sensitive accelerometer, it allows us to optimize independently the proof mass, which needs to be as large, stiff, and heavy as possible, and the suspension, which needs to be as delicate and compliant as possible. The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. We anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems.

  18. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  19. On-chip antenna: Practical design and characterization considerations

    KAUST Repository

    Shamim, Atif

    2012-07-28

    This paper highlights the challenges of an emergent field, namely, on-chip antenna design. Consistent with the RF System-on-Chip (SoC) concept, co-design strategy for circuits and on-chip antennas is described. A number of design and layout issues, arising from the highly integrated nature of this kind of systems, are discussed. The characterization difficulties related to on-chip antennas radiation properties are also highlighted. Finally, a novel on-wafer test fixture is proposed to measure the gain and radiation pattern of the on-chip antennas in the anechoic chamber.

  20. Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films.

    Science.gov (United States)

    Czurratis, Daniel; Beyl, Yvonne; Grimm, Alexander; Brettschneider, Thomas; Zinober, Sven; Lärmer, Franz; Zengerle, Roland

    2015-07-07

    Liquids on-chip describes a reagent storage concept for disposable pressure driven Lab-on-Chip (LoC) devices, which enables liquid storage in reservoirs without additional packaging. On-chip storage of liquids can be considered as one of the major challenges for the commercial break through of polymer-based LoC devices. Especially the ability for long-term storage and reagent release on demand are the most important aspects for a fully developed technology. On-chip storage not only replaces manual pipetting, it creates numerous advantages: fully automated processing, ease of use, reduction of contamination and transportation risks. Previous concepts for on-chip storage are based on liquid packaging solutions (e.g. stick packs, blisters, glass ampoules), which implicate manufacturing complexity and additional pick and place processes. That is why we prefer on-chip storage of liquids directly in reservoirs. The liquids are collected in reservoirs, which are made of high barrier polymers or coated by selected barrier layers. Therefore, commonly used polymers for LoC applications as cyclic olefin polymer (COP) and polycarbonate (PC) were investigated in the context of novel polymer composites. To ensure long-term stability the reservoirs are sealed with a commercially available barrier film by hot embossing. The barrier film is structured by pulsed laser ablation, which installs rated break points without affecting the barrier properties. A flexible membrane is actuated through pneumatic pressure for reagent release on demand. The membrane deflection breaks the barrier film and leads to efficient cleaning of the reservoirs in order to provide the liquids for further processing.

  1. Enhancing cavitation with micromachined surfaces

    Science.gov (United States)

    Fernandez Rivas, David; Stricker, Laura; Zijlstra, Aaldert G.; Gardeniers, Han; Lohse, Detlef; Prosperetti, Andrea; Mesoscale Chemical System Group Collaboration; Physics of Fluids Group Collaboration; Department of Mechanical Engineering Collaboration

    2012-11-01

    When a silicon surface with micromachined pits submerged in a liquid is exposed to continuous ultrasound at 200 kHz, bubbles are ejected from the air filled cavities. Depending on the pressure amplitude different scenarios are observed, as the bubbles ejected from the micropits interact in complex ways with each other, and with the silicon surface. We have determined the size distribution of bubbles ejected from one, two and three pits for three different electrical power settings, and correlated them with sonochemical OH* radical production. Numerical simulations of the sonochemical conversion reaction rates were obtained using the empirical bubble size distributions and are compared with experimental results. Experimental evidence of shock wave emission from the microbubble clusters, deformed microbubble shapes, jetting and surface erosion are also presented. Financially supported through the project 07391 of the Technology Foundation STW, The Netherlands.

  2. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  3. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.

    2006-01-01

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  4. Computer System Design System-on-Chip

    CERN Document Server

    Flynn, Michael J

    2011-01-01

    The next generation of computer system designers will be less concerned about details of processors and memories, and more concerned about the elements of a system tailored to particular applications. These designers will have a fundamental knowledge of processors and other elements in the system, but the success of their design will depend on the skills in making system-level tradeoffs that optimize the cost, performance and other attributes to meet application requirements. This book provides a new treatment of computer system design, particularly for System-on-Chip (SOC), which addresses th

  5. Development of a micromachined electrostatically suspended gyroscope

    OpenAIRE

    Damrongsak, Badin

    2009-01-01

    In this thesis, a new approach based on an electrostatically suspended gyroscope (ESG) was explored in order to improve the performance of micromachined gyroscopes. Typically, a conventional micromachined gyroscope consists of a vibrating mass suspended on elastic beams that are anchored to a substrate. It measures the rotation rate of a body of interest by detecting rotation-induced Coriolis acceleration of a vibrating structure. Such a gyro is sensitive to fabrication imperfections an...

  6. Influence of micromachined targets on laser accelerated proton beam profiles

    Science.gov (United States)

    Dalui, Malay; Permogorov, Alexander; Pahl, Hannes; Persson, Anders; Wahlström, Claes-Göran

    2018-03-01

    High intensity laser-driven proton acceleration from micromachined targets is studied experimentally in the target-normal-sheath-acceleration regime. Conical pits are created on the front surface of flat aluminium foils of initial thickness 12.5 and 3 μm using series of low energy pulses (0.5–2.5 μJ). Proton acceleration from such micromachined targets is compared with flat foils of equivalent thickness at a laser intensity of 7 × 1019 W cm‑2. The maximum proton energy obtained from targets machined from 12.5 μm thick foils is found to be slightly lower than that of flat foils of equivalent remaining thickness, and the angular divergence of the proton beam is observed to increase as the depth of the pit approaches the foil thickness. Targets machined from 3 μm thick foils, on the other hand, show evidence of increasing the maximum proton energy when the depths of the structures are small. Furthermore, shallow pits on 3 μm thick foils are found to be efficient in reducing the proton beam divergence by a factor of up to three compared to that obtained from flat foils, while maintaining the maximum proton energy.

  7. Silicon-micromachined microchannel plates

    Energy Technology Data Exchange (ETDEWEB)

    Beetz, Charles P. E-mail: NanoSystem@aol.com; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R. E-mail: winn@fair1.fairfield.edu

    2000-03-11

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of {approx}0.5 to {approx}25 {mu}m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  8. Silicon-micromachined microchannel plates

    Science.gov (United States)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-03-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ˜0.5 to ˜25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200°C, also compatible with high-temperture brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  9. Silicon-micromachined microchannel plates

    International Nuclear Information System (INIS)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

  10. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  11. Architecture, On-Chip Network and Programming Interface Concept for Multiprocessor System-on-Chip

    OpenAIRE

    Samman, Faizal Arya

    2017-01-01

    in Proc. of the International Conference onSmart Green Technology in Electrical and Information Systems (ICSGTEIS), 2016, publised in IEEE Explorer (indexed by SCOPUS) This paper presents a system architecture, data communnication scheme and application programming interface model or concept for a multiprocessor system based on a network-on-chip (NoC) platform. Each processing node connected to a mesh node has its own local (instruction and data) memory portion, and a global (shared) memor...

  12. Micromachined gyroscopes: challenges, design solutions, and opportunities

    Science.gov (United States)

    Shkel, Andrei M.

    2001-08-01

    Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gyroscopes could bring to everyday life, the miniaturization introduces many new technical challenges. Multi-degree of freedom dynamics, sensitivity to fabrication imperfections, dynamic instability, limited control resources - all these raise a number of fundamentally challenging issues in the design, analysis, and control of micromachined gyroscopes. In this paper, we summarize principles of operation, review recent research and development efforts, and discuss potential applications and the future market of silicon based micromachined gyroscopes.

  13. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  14. Interconnects and On-Chip Data Communication Techniques

    NARCIS (Netherlands)

    Mensink, E.; Schinkel, Daniel; Klumperink, Eric A.M.; van Tuijl, Adrianus Johannes Maria

    Global on-chip communication is rapidly becoming a speed and power bottleneck in CMOS circuits. In this paper, a ‘mixed-signal’ approach is taken to analyze on-chip interconnects and it is investigated how data-rates can be improved. It is shown that complex signaling schemes such as OFDM and CDMA

  15. Energy Model of Networks-on-Chip and a Bus

    NARCIS (Netherlands)

    Wolkotte, P.T.; Smit, Gerardus Johannes Maria; Kavaldjiev, N.K.; Becker, Jens E.; Becker, Jürgen; Nurmi, J.; Takala, J.; Hamalainen, T.D.

    2005-01-01

    A Network-on-Chip (NoC) is an energy-efficient onchip communication architecture for Multi-Processor Systemon-Chip (MPSoC) architectures. In earlier papers we proposed two Network-on-Chip architectures based on packet-switching and circuit-switching. In this paper we derive an energy model for both

  16. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  17. Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Smith, J. H.; Sniegowski, J. J.

    1998-10-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  18. An energy-efficient Network-on-Chip for a heterogeneous tiled reconfigurable System-on-Chip

    NARCIS (Netherlands)

    Kavaldjiev, N.K.; Smit, Gerardus Johannes Maria

    This paper proposes a Network-on-Chip architecture that offers high flexibility and performance. It is used in a System-on-Chip platform for future multimedia mobile devices. The network is packet switching wormhole network with virtual-channel flow control and source routing. The initial

  19. An energy-efficient Network-on-Chip for a heterogeneous tiled reconfigurable Systems-on-Chip

    NARCIS (Netherlands)

    Kavaldjiev, N.K.; Smit, Gerardus Johannes Maria

    This paper proposes a Network-on-Chip architecture that offers high flexibility and performance. It is used in a System-on-Chip platform for future multimedia mobile devices. The network is packet switching wormhole network with virtual-channel flow control and source routing. The initial

  20. Gas-driven microturbine

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.; McWhorter, P.J.; Aeschliman, D.P.; Miller, W.M.

    1996-06-27

    This paper describes an invention which relates to microtechnology and the fabrication process for developing microelectrical systems. It describes a means for fabricating a gas-driven microturbine capable of providing autonomous propulsion in which the rapidly moving gases are directed through a micromachined turbine to power devices by direct linkage or turbo-electric generators components in a domain ranging from tenths of micrometers to thousands of micrometers.

  1. Biosensors-on-chip: a topical review

    Science.gov (United States)

    Chen, Sensen; Shamsi, Mohtashim H.

    2017-08-01

    This review will examine the integration of two fields that are currently at the forefront of science, i.e. biosensors and microfluidics. As a lab-on-a-chip (LOC) technology, microfluidics has been enriched by the integration of various detection tools for analyte detection and quantitation. The application of such microfluidic platforms is greatly increased in the area of biosensors geared towards point-of-care diagnostics. Together, the merger of microfluidics and biosensors has generated miniaturized devices for sample processing and sensitive detection with quantitation. We believe that microfluidic biosensors (biosensors-on-chip) are essential for developing robust and cost effective point-of-care diagnostics. This review is relevant to a variety of disciplines, such as medical science, clinical diagnostics, LOC technologies including MEMs/NEMs, and analytical science. Specifically, this review will appeal to scientists working in the two overlapping fields of biosensors and microfluidics, and will also help new scientists to find their directions in developing point-of-care devices.

  2. SVM classifier on chip for melanoma detection.

    Science.gov (United States)

    Afifi, Shereen; GholamHosseini, Hamid; Sinha, Roopak

    2017-07-01

    Support Vector Machine (SVM) is a common classifier used for efficient classification with high accuracy. SVM shows high accuracy for classifying melanoma (skin cancer) clinical images within computer-aided diagnosis systems used by skin cancer specialists to detect melanoma early and save lives. We aim to develop a medical low-cost handheld device that runs a real-time embedded SVM-based diagnosis system for use in primary care for early detection of melanoma. In this paper, an optimized SVM classifier is implemented onto a recent FPGA platform using the latest design methodology to be embedded into the proposed device for realizing online efficient melanoma detection on a single system on chip/device. The hardware implementation results demonstrate a high classification accuracy of 97.9% and a significant acceleration factor of 26 from equivalent software implementation on an embedded processor, with 34% of resources utilization and 2 watts for power consumption. Consequently, the implemented system meets crucial embedded systems constraints of high performance and low cost, resources utilization and power consumption, while achieving high classification accuracy.

  3. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-14

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  4. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  5. Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

    Science.gov (United States)

    Ruan, Aiwu Y.; Tse, Man S.; Chong, Gang Y.

    2001-11-01

    Micromachined gyroscopes rely on tuned vibration mode frequencies to measure rotation rates and typically have complex modes of vibration for the mechanical microstructures. Although there are many reports on how to exactly tune the drive and sense modes of vibration to maximize sensitivity of micromachined gyroscope, there are only few reports on the detailed analysis of modes of vibration. Modes of vibration are strongly dependent on the design parameters of the mechanical structure of the gyroscope including the dimension of the proof mass, types and dimensions of the suspension, and residual mechanical stress of the high aspect-ratio polysilicon film used to form the microstructures of the micromachined gyroscope. In this paper, an electrostatic drive and capacitive sense in-plane decoupled gyroscope for measuring vertical angular velocity is proposed to study the effects of the geometrical variables on modes of vibration. Finite-element analysis (FEA) simulation was performed on simplifiedmodel of the in-plane decoupled micromachined gyroscope microstructure. For optimal result the drive-mode and sense-mode suspensions of the micromachined gyroscope should be fabricated from thick polysilicon microstructure to give large aspect ratio suspension systems for the in-plane decoupled micromachined gyroscope. Folded-beam suspension design is recommended for the drive-mode suspension in order to relieve the residual stress of the thick polysilicon film for high aspect-ratio micromachine dgyroscope. It is critical to control the process variations of the suspension beam dimension, especially the beam width variation in order to achieve the goal of accurately control resonant frequencies of micromachined gyrocope.

  6. System on chip thermal vacuum sensor based on standard CMOS process

    Energy Technology Data Exchange (ETDEWEB)

    Li Jinfeng; Tang Zhenan; Wang Jiaqi, E-mail: ljf970204@yahoo.com.c [Department of Electronic Engineering, Dalian University of Technology, Dalian 116024 (China)

    2009-03-15

    An on-chip microelectromechanical system was fabricated in a 0.5 mum standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate (MHP) and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register (SAR) A/D converter. A tungsten resistor was manufactured on the MHP as the sensing element, and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology. The operational amplifier was configured to make the sensor operate in constant current mode. A digital bit stream was provided as the system output. The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 10{sup 5} Pa. In the gas pressure range from 1 to 100 Pa, the sensitivity of the sensor is 0.23 mV/ Pa, the linearity is 4.95%, and the hysteresis is 8.69%. The operational amplifier can drive 200 omega resistors distortionlessly, and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate. The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.

  7. Micromachined glass chips for ion analysis

    NARCIS (Netherlands)

    Gardeniers, Johannes G.E.; Mulder, Micha; Lüttge, Regina; van den Berg, Albert

    2002-01-01

    This article describes recent developments at Micronit Microfluidics B.V. and MESA+ in the field of "Lab-on-a-chip" systems for ion analysis. Glass chips with typical micromachined channel geometries for capillary electrophoresis and integrated conductivity detection were developed, with which

  8. Package-friendly piezoresistive pressure sensors with on-chip integrated packaging-stress-suppressed suspension (PS3) technology

    International Nuclear Information System (INIS)

    Wang, Jiachou; Li, Xinxin

    2013-01-01

    An on-chip integrated packaging-stress-suppressed suspension (PS 3 ) technology for a packaging-stress-free pressure sensor is proposed and developed. With a MIS (microholes interetch and sealing) micromachining process implemented only from the front-side of a single-side polished (1 1 1) silicon wafer, a compact cantilever-shaped PS 3 is on-chip integrated surrounding a piezoresistive pressure-sensing structure to provide a packaging-process/substrate-friendly method for low-cost but high-performance sensor applications. With the MIS process, the chip size of the PS 3 -enclosed pressure sensor is as small as 0.8 mm × 0.8 mm. Compared with a normal pressure sensor without PS 3 (but with an identical pressure-sensing structure), the proposed pressure sensor has the same sensitivity of 0.046 mV kPa −1 (3.3 V) −1 . However, without using the thermal compensation technique, a temperature coefficient of offset of only 0.016% °C −1 FS is noted for the sensor with PS 3 , which is about 15 times better than that for the sensor without PS 3 . Featuring effective isolation and elimination of the influence from packaging stress, the PS 3 technique is promising to be widely used for packaging-friendly mechanical sensors. (paper)

  9. Packetizing OCP Transactions in the MANGO Network-on-Chip

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Sparsø, Jens

    2006-01-01

    The scaling of CMOS technology causes a widening gap between the performance of on-chip communication and computation. This calls for a communication-centric design flow. The MANGO network-on-chip architecture enables globally asynchronous locally synchronous (GALS) system-on-chip design, while...... facilitating IP reuse by standard socket access points. Two types of services are available: connection-less best-effort routing and connection-oriented guaranteed service (GS) routing. This paper presents the core-centric programming model for establishing and using GS connections in MANGO. We show how OCP...

  10. Solving advanced micromachining problems for ultra-rapid and ultra-high resolution on-chip liquid chromatography

    NARCIS (Netherlands)

    de Malsche, Wim

    2008-01-01

    High-performance liquid chromatography (HPLC) is one of the most versatile separation techniques available for the analysis of complex samples that are typically encountered in fields such as environmental monitoring, biology, pharmacy, biochemistry, etc. A distinction between different HPLC formats

  11. Crosstalk in modern on-chip interconnects a FDTD approach

    CERN Document Server

    Kaushik, B K; Patnaik, Amalendu

    2016-01-01

    The book provides accurate FDTD models for on-chip interconnects, covering most recent advancements in materials and design. Furthermore, depending on the geometry and physical configurations, different electrical equivalent models for CNT and GNR based interconnects are presented. Based on the electrical equivalent models the performance comparison among the Cu, CNT and GNR-based interconnects are also discussed in the book. The proposed models are validated with the HSPICE simulations. The book introduces the current research scenario in the modeling of on-chip interconnects. It presents the structure, properties, and characteristics of graphene based on-chip interconnects and the FDTD modeling of Cu based on-chip interconnects. The model considers the non-linear effects of CMOS driver as well as the transmission line effects of interconnect line that includes coupling capacitance and mutual inductance effects. In a more realistic manner, the proposed model includes the effect of width-dependent MFP of the ...

  12. Error Control for Network-on-Chip Links

    CERN Document Server

    Fu, Bo

    2012-01-01

    As technology scales into nanoscale regime, it is impossible to guarantee the perfect hardware design. Moreover, if the requirement of 100% correctness in hardware can be relaxed, the cost of manufacturing, verification, and testing will be significantly reduced. Many approaches have been proposed to address the reliability problem of on-chip communications. This book focuses on the use of error control codes (ECCs) to improve on-chip interconnect reliability. Coverage includes detailed description of key issues in NOC error control faced by circuit and system designers, as well as practical error control techniques to minimize the impact of these errors on system performance. Provides a detailed background on the state of error control methods for on-chip interconnects; Describes the use of more complex concatenated codes such as Hamming Product Codes with Type-II HARQ, while emphasizing integration techniques for on-chip interconnect links; Examines energy-efficient techniques for integrating multiple error...

  13. Signal processing for on-chip space division multiplexing

    DEFF Research Database (Denmark)

    Peucheret, Christophe; Ding, Yunhong; Xu, Jing

    2015-01-01

    Our recent results on the demonstration of on-chip mode-division multiplexing are reviewed, with special emphasis on nonlinear all-optical signal processing. Mode-selective parametric processes are demonstrated in a silicon-on-insulator waveguide.......Our recent results on the demonstration of on-chip mode-division multiplexing are reviewed, with special emphasis on nonlinear all-optical signal processing. Mode-selective parametric processes are demonstrated in a silicon-on-insulator waveguide....

  14. An overview about Networks-on-Chip with multicast suppor

    OpenAIRE

    Berejuck, Marcelo Daniel

    2016-01-01

    Modern System-on-Chip (SoC) platforms typically consist of multiple processors and a communication interconnect between them. Network-on-Chip (NoC) arises as a solution to interconnect these systems, which provides a scalable, reusable, and an efficient interconnect. For these SoC platforms, multicast communication is significantly used for parallel applications. Cache coherency in distributed sharedmemory,clock synchronization, replication, or barrier synchronization are examples of these re...

  15. Reliability, Availability and Serviceability of Networks-on-Chip

    CERN Document Server

    Cota, Érika; Soares Lubaszewski, Marcelo

    2012-01-01

    This book presents an overview of the issues related to the test, diagnosis and fault-tolerance of Network on Chip-based systems. It is the first book dedicated to the quality aspects of NoC-based systems and will serve as an invaluable reference to the problems, challenges, solutions, and trade-offs related to designing and implementing state-of-the-art, on-chip communication architectures.

  16. Integrated Millimeter-Wave Antennas for On-Chip Communication

    Directory of Open Access Journals (Sweden)

    S. Zainud-Deen

    2016-03-01

    Full Text Available This paper introduces the design and analysis of circularly polarized (CP and dual-polarized on-chip microstrip antennas for wireless communication at 60 GHz. The CP on-chip antenna consists of a circular aluminum patch with two overlapped circular slots fed by the transmission line. The radiation characteristics of the CP have been analyzed using the finite integration technique and finite element method based electromagnetic solvers. The CP antenna introduces left-hand circular polarization and employs as on-chip transmitter. A design of dual-polarized on-chip microstrip antenna at 60 GHz is investigated and is employed as on-chip receiver. The dual ports of the dual polarized antenna are designed with high isolation between them in order to be used as a two on-chip receivers. The radiation characteristics of the dual-port antenna have been calculated. The effect of the separation distance between the CP-antenna and the dual-polarized antenna on the same chip has been investigated. The performance parameters like the reflection coefficient, transmission coefficient, and the transmission gain of the two antennas at different separation distances have been introduced.

  17. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  18. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  19. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  20. In-pipe micromachine locomotion via the inertial stepping principle

    Energy Technology Data Exchange (ETDEWEB)

    Yum, Young Jin [University of Ulsan, Ulsan (Korea, Republic of); Hwang, Han Sub [Suweon Science College, Suweon (Korea, Republic of); Kelemen, Michal; Maxim, Vladislav; Frankovsky, Peter [Technical University of Kosice, Kosice (Slovakia)

    2014-08-15

    This paper discusses an in-pipe inspection micromachine intended for locomotion inside a small diameter pipe. The micromachine locomotion is based on the inertial stepping principle, which utilizes the drive force of the two-body impact. The in-pipe micromachine contacts the pipe through the elastic bristles installed on the in-pipe machine and in two lines and crossways with respect to the micromachine axle. The paper describes the principle of locomotion and the dynamics by which the unknown of both the parameters and the relations are experimentally identified. Based on the results, a simulation model was created, and the results of the simulations were compared with experimental results.

  1. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  2. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  3. Optical stretching on chip with acoustophoretic prefocusing

    DEFF Research Database (Denmark)

    Khoury Arvelo, Maria; Laub Busk, L.; Bruus, Henrik

    2012-01-01

    prefocusing. This focusing mechanism aims for target particles to always ow in the correct height relative to the optical stretcher, and is induced by a piezo-electric ultrasound transducer attached underneath the chip and driven at a frequency leading to a vertical standing ultrasound wave...... in the microchannel. Trapping and manipulation is demonstrated for dielectric beads. In addition, we show trapping, manipulation and stretching of red blood cells and vesicles, whereby we extract the elastic properties of these objects. Our design points towards the construction of a low-cost, high-throughput lab-on-a-chip...

  4. Pressure-driven reverse-phase liquid chromatography separations in ordered non-porous pillar array columns

    NARCIS (Netherlands)

    de Malsche, Wim; Eghbali, Hamed; Clicq, David; Vangelooven, Joris; Gardeniers, Johannes G.E.; Desmet, Gert

    2007-01-01

    Building upon the micromachined column idea proposed by the group of Regnier in 1998, we report on the first high-resolution reversed-phase separations in micromachined pillar array columns under pressure-driven LC conditions. A three component mixture could be separated in 3 s using arrays of

  5. The last barrier: On-chip antennas

    KAUST Repository

    Cheema, Hammad

    2013-01-01

    The last two decades have witnessed unprecedented development in the field of integrated circuits (ICs), driven by aggressive transistor scaling, unmatched levels of integration, advanced foundry processes, low cost, and improved yields. On one hand, digital integration, following the empirical prediction by Gordon Moore [1], has resulted in billions of transistors integrated in a few square millimeters, using processes that span the commercial range of 45 nm to 32 nm nodes [2] and transistors as small as 9 nm already demonstrated in research studies [3]. On the other hand, analog integration has also seen tremendous development (albeit at a relatively slower pace) resulting in highly integrated, multiband, multistandard transceivers for wireless communications [4][5]. © 2000-2012 IEEE.

  6. Effect of on-chip filter on Coulomb blockade thermometer

    International Nuclear Information System (INIS)

    Roschier, L; Penttilä, J S; Gunnarsson, D; Prunnila, M; Meschke, M; Savin, A

    2012-01-01

    Coulomb Blockade Thermometer (CBT) is a primary thermometer based on electric conductance of normal tunnel junction arrays. One limitation for CBT use at the lowest temperatures has been due to environmental noise heating. To improve on this limitation, we have done measurements on CBT sensors fabricated with different on-chip filtering structures in a dilution refrigerator with a base temperature of 10 mK. The CBT sensors were produced with a wafer scale tunnel junction process. We present how the different on-chip filtering schemes affect the limiting saturation temperatures and show that CBT sensors with proper on-chip filtering work at temperatures below 20 mK and are tolerant to noisy environment.

  7. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  8. The ReNoC Reconfigurable Network-on-Chip

    DEFF Research Database (Denmark)

    Stuart, Matthias Bo; Stensgaard, Mikkel Bystrup; Sparsø, Jens

    2011-01-01

    This article presents a reconfigurable network-on-chip architecture called ReNoC, which is intended for use in general-purpose multiprocessor system-on-chip platforms, and which enables application-specific logical NoC topologies to be configured, thus providing both efficiency and flexibility....... The article presents three novel algorithms that synthesize an application-specific NoC topology, map it onto the physical ReNoC architecture, and create deadlock-free, application-specific routing algorithms. We apply our algorithms to a mixture of real and synthetic applications and target three different...

  9. Advances on Microsized On-Chip Lithium-Ion Batteries.

    Science.gov (United States)

    Liu, Lixiang; Weng, Qunhong; Lu, Xueyi; Sun, Xiaolei; Zhang, Lin; Schmidt, Oliver G

    2017-12-01

    Development of microsized on-chip batteries plays an important role in the design of modern micro-electromechanical systems, miniaturized biomedical sensors, and many other small-scale electronic devices. This emerging field intimately correlates with the topics of rechargeable batteries, nanomaterials, on-chip microfabrication, etc. In recent years, a number of novel designs are proposed to increase the energy and power densities per footprint area, as well as other electrochemical performances of microsized lithium-ion batteries. These advances may guide the pathway for the future development of microbatteries. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  10. On-chip cell lysis by antibacterial non-leaching reusable quaternary ammonium monolithic column.

    Science.gov (United States)

    Aly Saad Aly, Mohamed; Gauthier, Mario; Yeow, John

    2016-02-01

    Reusable antibacterial non-leaching monolithic columns polymerized in microfluidic channels designed for on-chip cell lysis applications were obtained by the photoinitiated free radical copolymerization of diallyldimethylammonium chloride (DADMAC) and ethylene glycol diacrylate (EGDA) in the presence of a porogenic solvent. The microfluidic channels were fabricated in cross-linked poly(methyl methacrylate) (X-PMMA) substrates by laser micromachining. The monolithic columns have the ability to inhibit the growth of, kill and efficiently lyse Gram-positive Micrococcus luteus (Schroeter) (ATCC 4698) and Kocuria rosea (ATCC 186), and Gram-negative bacteria Pseudomonas putida (ATCC 12633) and Escherichia coli (ATCC 35218) by mechanically shearing the bacterial membrane when forcing the cells to pass through the narrow pores of the monolithic column, and simultaneously disintegrating the cell membrane by physical contact with the antibacterial surface of the column. Cell lysis was confirmed by off-chip PCR without the need for further purification. The influence of the cross-linking monomer on bacterial growth inhibition, leaching, lysis efficiency of the monolithic column and its mechanical stability within the microfluidic channel were investigated and analyzed for three different cross-linking monomers: ethylene glycol dimethacrylate (EGDA), ethylene glycol dimethacrylate (EGDMA) and 1,6-hexanediol dimethacrylate (1,6-HDDMA). Furthermore, the bonding efficiency of two X-PMMA substrates with different cross-linking levels was studied. The monolithic columns were shown to be stable, non-leaching, and reusable for over 30 lysis cycles without significant performance degradation or DNA carryover when they were back-flushed between lysis cycles.

  11. Optofluidic Microlasers based on Femtosecond Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Simoni F.

    2017-08-01

    Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

  12. Capacitive micromachined ultrasonic transducer based tilt sensing

    Science.gov (United States)

    Yu, Hongbin; Guo, Bin; Haridas, Kuruveettil; Lin, Tsu-Hui; Hao Cheong, Jia; Lin Tsai, Ming; Boon Yee, Tack

    2012-10-01

    In this paper, a tilt sensing mechanism based on the capacitive micromachined ultrasound transducers (CMUTs) is presented. By measuring the difference in the time of flight of various pulse-echo signals from different CMUT transmitting elements to one common receiving element in the oil bath, the tilt angle of the oil surface can be determined. With the proposed device, the maximum tilt angles of 20° and 28° have been measured in the clockwise and counterclockwise directions, respectively, and the difference between the measured and the theoretical values of the tilt angle was found to be within 0.05° during the whole test.

  13. Design of Networks-on-Chip for Real-Time Multi-Processor Systems-on-Chip

    DEFF Research Database (Denmark)

    Sparsø, Jens

    2012-01-01

    This paper addresses the design of networks-on-chips for use in multi-processor systems-on-chips - the hardware platforms used in embedded systems. These platforms typically have to guarantee real-time properties, and as the network is a shared resource, it has to provide service guarantees...... (bandwidth and/or latency) to different communication flows. The paper reviews some past work in this field and the lessons learned, and the paper discusses ongoing research conducted as part of the project "Time-predictable Multi-Core Architecture for Embedded Systems" (T-CREST), supported by the European...

  14. Modelling, Synthesis, and Configuration of Networks-on-Chips

    DEFF Research Database (Denmark)

    Stuart, Matthias Bo

    is an analytical method for deriving the worst-case traffic pattern caused by an application and the cache-coherence protocol in a cache-coherent shared-memory system. The contributions related to network-on-chip optimization problems consist of two parts: The development and evaluation of six heuristics...

  15. Exploration within the Network-on-Chip Paradigm

    NARCIS (Netherlands)

    Wolkotte, P.T.

    2009-01-01

    A general purpose processor used to consist of a single processing core, which performed and controlled all tasks on the chip. Its functionality and maximum clock frequency grew steadily over the years. Due to the continuous increase of the number of transistors available on-chip and the operational

  16. LABS, cells and organs on chip : Technologies and biomedical applications

    NARCIS (Netherlands)

    Van Den Berg, Albert

    2017-01-01

    Over the past few decades both micro/ nanofabrication and microfluidics technologies have been crucial for the rapid development of Lab on a Chip systems. Here we present a few examples of this. Firstly, a capillary electrophoresis system on chip for blood analysis will be presented. Secondly, we

  17. Field Programmable Gate Arrays with Hardwired Networks on Chip

    NARCIS (Netherlands)

    Wahlah, M.A.

    2012-01-01

    Technology down-scaling and platform-based designs have enforced a number of application and architecture trends for system-on-chip (SOC) designs. A modern SOC is now a multi-functional machine that can execute a large number of complex applications by using tens or even hundreds of intellectual

  18. Nano lab-on-chip systems for biomedical and environmental ...

    African Journals Online (AJOL)

    In recent years, nano lab-on-chip (NLOC) has emerged as a powerful tool for biosensing and an active area of research particularly in DNA genetic and genetic related investigations. Compared with conventional sensing techniques, distinctive advantages of using NLOC for biomedicine and other related area include ...

  19. On-chip integrated lasers for biophotonic applications

    DEFF Research Database (Denmark)

    Mappes, Timo; Wienhold, Tobias; Bog, Uwe

    Meeting the need of biomedical users, we develop disposable Lab-on-a-Chip systems based on commercially available polymers. We are combining passive microfluidics with active optical elements on-chip by integrating multiple solid-state and liquid-core lasers. While covering a wide range of laser ...

  20. Customizing and hardwiring on-chip interconnects in FPGAs

    NARCIS (Netherlands)

    Hur, J.Y.

    2011-01-01

    This thesis presents our investigations on how to efficiently utilize on-chip wires to improve network performance in reconfigurable hardware. A fieldprogrammable gate array (FPGA), as a key component in a modern reconfigurable platform, accommodates many-millions of wires and the on-demand

  1. Design and Simulation of a New Decoupled Micromachined Gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Sharaf, Abdelhameed [NCRRT, EAEA, 3 Ahmed Elzomer Street, Nasr City, Cairo (Egypt); STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Sedky, Sherif [STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Physics Department, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Habib, S E-D [Electronics and Communication Department, Faculty of Engineering, Cairo University, 12613, Giza (Egypt)

    2006-04-01

    This paper reports on a new decoupled micromachined gyroscope. The proposed sensor is a dual mass type, electrostatically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk. Three different designs are introduced in this work. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factors and approximate bandwidths are extracted analytically and the results are confirmed using finite element analysis. The first design shows drive and sense modes resonance frequencies of 4077 Hz and 4081 Hz respectively; with a frequency mismatch lower than 0.1%. The drive and sense capacitance are 0.213 pF and 0.142 pF respectively. The mechanical and electrical sensitivities are 0.011 {mu}m/ ({sup 0}/s) and 2.75 mV/ ({sup 0}/s) respectively. The third design shows significantly improved mechanical and electrical sensitivities of 0.027 {mu}m/ ({sup 0}/s) and 6.85 mV/ ({sup 0}/s) respectively.

  2. Comparison of a Ring On-Chip Network and a Code-Division Multiple-Access On-Chip Network

    Directory of Open Access Journals (Sweden)

    Xin Wang

    2007-01-01

    Full Text Available Two network-on-chip (NoC designs are examined and compared in this paper. One design applies a bidirectional ring connection scheme, while the other design applies a code-division multiple-access (CDMA connection scheme. Both of the designs apply globally asynchronous locally synchronous (GALS scheme in order to deal with the issue of transferring data in a multiple-clock-domain environment of an on-chip system. The two NoC designs are compared with each other by their network structures, data transfer principles, network node structures, and their asynchronous designs. Both the synchronous and the asynchronous designs of the two on-chip networks are realized using a hardware-description language (HDL in order to make the entire designs suit the commonly used synchronous design tools and flow. The performance estimation and comparison of the two NoC designs which are based on the HDL realizations are addressed. By comparing the two NoC designs, the advantages and disadvantages of applying direct connection and CDMA connection schemes in an on-chip communication network are discussed.

  3. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  4. Biosensors in Health Care: The Milestones Achieved in Their Development towards Lab-on-Chip-Analysis

    Directory of Open Access Journals (Sweden)

    Suprava Patel

    2016-01-01

    Full Text Available Immense potentiality of biosensors in medical diagnostics has driven scientists in evolution of biosensor technologies and innovating newer tools in time. The cornerstone of the popularity of biosensors in sensing wide range of biomolecules in medical diagnostics is due to their simplicity in operation, higher sensitivity, ability to perform multiplex analysis, and capability to be integrated with different function by the same chip. There remains a huge challenge to meet the demands of performance and yield to its simplicity and affordability. Ultimate goal stands for providing point-of-care testing facility to the remote areas worldwide, particularly the developing countries. It entails continuous development in technology towards multiplexing ability, fabrication, and miniaturization of biosensor devices so that they can provide lab-on-chip-analysis systems to the community.

  5. A Formal Approach to the Verification of Networks on Chip

    Directory of Open Access Journals (Sweden)

    Schmaltz Julien

    2009-01-01

    Full Text Available Abstract The current technology allows the integration on a single die of complex systems-on-chip (SoCs that are composed of manufactured blocks (IPs, interconnected through specialized networks on chip (NoCs. IPs have usually been validated by diverse techniques (simulation, test, formal verification and the key problem remains the validation of the communication infrastructure. This paper addresses the formal verification of NoCs by means of a mechanized proof tool, the ACL2 theorem prover. A metamodel for NoCs has been developed and implemented in ACL2. This metamodel satisfies a generic correctness statement. Its verification for a particular NoC instance is reduced to discharging a set of proof obligations for each one of the NoC constituents. The methodology is demonstrated on a realistic and state-of-the-art design, the Spidergon network from STMicroelectronics.

  6. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... capable of producing 62+62-element row-column addressed CMUT arrays with negligible charging issues. The arrays include an integrated apodization, which reduces the ghost echoes produced by the edge waves in such arrays by 15:8 dB. The acoustical cross-talk is measured on fabricated arrays, showing a 24 d...

  7. MEASUREMENT OF NANOSTRUCTURES WITH MICROMACHINED MICROSCOPES

    Energy Technology Data Exchange (ETDEWEB)

    G.S. KINO; W.E. MOERNER

    2005-04-30

    We have made reproducible scanning probes with high efficiency, and predictable and reproducible character-istics. We obtained good efficiency with dimensions well below the diffraction limit, so that rela-tively small laser powers in the milliwatt range can be used. For single frequency operation, only low power is necessary to obtain very high fields for the excitation of well-defined Raman scattering, and to work in a reflection mode with good scanning speeds; obtained predictable results with very high fields suitable for obtaining Raman scattering and two-photon scattering; made a scanning probe mounted on a micromachined cantilever to obtain high definition reflection mode images that can be scanned rapidly;and observed Raman scattering using bowtie antennas with CW excitation.

  8. Fabrication of a novel quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Liqiang Xie

    2015-04-01

    Full Text Available A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure’s mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z–axis quartz gyroscope is fabricated successfully.

  9. Micromachined two dimensional resistor arrays for determination of gas parameters

    NARCIS (Netherlands)

    van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

  10. Surface Micromachined Arrays of Transition-Edge Detectors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  11. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  12. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  13. Biasing of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

    2017-02-01

    Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

  14. On-chip Magnetic Separation and Cell Encapsulation in Droplets

    Science.gov (United States)

    Chen, A.; Byvank, T.; Bharde, A.; Miller, B. L.; Chalmers, J. J.; Sooryakumar, R.; Chang, W.-J.; Bashir, R.

    2012-02-01

    The demand for high-throughput single cell assays is gaining importance because of the heterogeneity of many cell suspensions, even after significant initial sorting. These suspensions may display cell-to-cell variability at the gene expression level that could impact single cell functional genomics, cancer, stem-cell research and drug screening. The on-chip monitoring of individual cells in an isolated environment could prevent cross-contamination, provide high recovery yield and ability to study biological traits at a single cell level These advantages of on-chip biological experiments contrast to conventional methods, which require bulk samples that provide only averaged information on cell metabolism. We report on a device that integrates microfluidic technology with a magnetic tweezers array to combine the functionality of separation and encapsulation of objects such as immunomagnetically labeled cells or magnetic beads into pico-liter droplets on the same chip. The ability to control the separation throughput that is independent of the hydrodynamic droplet generation rate allows the encapsulation efficiency to be optimized. The device can potentially be integrated with on-chip labeling and/or bio-detection to become a powerful single-cell analysis device.

  15. On-chip microsystems in silicon: opportunities and limitations

    Science.gov (United States)

    Wolffenbuttel, R. F.

    1996-03-01

    Integrated on-chip micro-instrumentation systems in silicon are complete data acquisition systems on a single chip. This concept has appeared to be the ultimate solution in many applications, as it enables in principle the metamorphosis of a basic sensing element, affected with many shortcomings, into an on-chip data acquisition unit that provides an output digital data stream in a standard format not corrupted by sensor non-idealities. Market acceptance would be maximum, as no special knowledge about the internal operation is required, self-test and self-calibration can be included and the dimensions are not different from those of the integrated circuit. The various aspects that are relevant in estimating the constraints for successful implementation of the integrated silicon smart sensor will be outlined in comparison with the properties of more conventional sensor fabrication technologies. It will be shown that the acceptance of on-chip functional integration in an application depends primarily on the added value in terms of improved specification or functionality that the resulting device provides in that application. The economic viability is therefore decisive rather than the technological constraints. This is in contrast to the traditional technology push prevailing in sensor research over market pull mechanisms.

  16. On-chip High-Voltage Generator Design

    CERN Document Server

    Tanzawa, Toru

    2013-01-01

    This book describes high-voltage generator design with switched-capacitor multiplier techniques.  The author provides various design techniques for switched-capacitor on-chip high-voltage generators, including charge pump circuits, regulators, level shifters, references, and oscillators.  Readers will see these techniques applied to system design in order to address the challenge of how the on-chip high-voltage generator is designed for Flash memories, LCD drivers, and other semiconductor devices to optimize the entire circuit area and power efficiency with a low voltage supply, while minimizing the cost.   ·         Shows readers how to design charge pump circuits with lower voltage operation, higher power efficiency, and smaller circuit area; ·         Describes comprehensive circuits and systems design of on-chip high-voltage generators; ·         Covers all the component circuit blocks, including charge pumps, pump regulators, level shifters, oscillators, and references.

  17. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  18. 60 GHz system-on-chip (SoC) with built-in memory and an on-chip antenna

    KAUST Repository

    Ghaffar, Farhan A.

    2014-04-01

    A novel 60 GHz transmitter SoC with an on-chip antenna and integrated memory in CMOS 65 nm technology is presented in this paper. This highly integrated transmitter design can support a data rate of 2 GBPS with a transmission range of 1 m. The transmitter consists of a fundamental frequency 60 GHz PLL which covers the complete ISM band. The modulator following the PLL can support both BPSK and OOK modulation schemes. Both stored data on the integrated memory or directly from an external source can be transmitted. A tapered slot on chip antenna is integrated with the power amplifier to complete the front end of the transmitter design. Size of the complete transmitter with on-chip antenna is only 1.96 mm × 1.96 mm. The core circuits consume less than 100 mW of power. The high data rate capability of the design makes it extremely suitable for bandwidth hungry applications such as unencrypted HD video streaming and transmission.

  19. Aging-Aware Routing Algorithms for Network-on-Chips

    OpenAIRE

    Bhardwaj, Kshitij

    2012-01-01

    Network-on-Chip (NoC) architectures have emerged as a better replacement of the traditional bus-based communication in the many-core era. However, continuous technology scaling has made aging mechanisms, such as Negative Bias Temperature Instability (NBTI) and electromigration, primary concerns in NoC design. In this work, a novel system-level aging model is proposed to model the effects of aging in NoCs, caused due to (a) asymmetric communication patterns between the network nodes, and (b) r...

  20. A Time-predictable Memory Network-on-Chip

    DEFF Research Database (Denmark)

    Schoeberl, Martin; Chong, David VH; Puffitsch, Wolfgang

    2014-01-01

    To derive safe bounds on worst-case execution times (WCETs), all components of a computer system need to be time-predictable: the processor pipeline, the caches, the memory controller, and memory arbitration on a multicore processor. This paper presents a solution for time-predictable memory...... arbitration and access for chip-multiprocessors. The memory network-on-chip is organized as a tree with time-division multiplexing (TDM) of accesses to the shared memory. The TDM based arbitration completely decouples processor cores and allows WCET analysis of the memory accesses on individual cores without...

  1. Advancing Software Development for a Multiprocessor System-on-Chip

    Directory of Open Access Journals (Sweden)

    Stephen Bique

    2007-06-01

    Full Text Available A low-level language is the right tool to develop applications for some embedded systems. Notwithstanding, a high-level language provides a proper environment to develop the programming tools. The target device is a system-on-chip consisting of an array of processors with only local communication. Applications include typical streaming applications for digital signal processing. We describe the hardware model and stress the advantages of a flexible device. We introduce IDEA, a graphical integrated development environment for an array. A proper foundation for software development is a UML and standard programming abstractions in object-oriented languages.

  2. Custom Topology Generation for Network-on-Chip

    DEFF Research Database (Denmark)

    Stuart, Matthias Bo; Sparsø, Jens

    2007-01-01

    This paper compares simulated annealing and tabu search for generating custom topologies for applications with periodic behaviour executing on a network-on-chip. The approach differs from previous work by starting from a fixed mapping of IP-cores to routers and performing design space exploration...... around an initial topology. The tabu search has been modified from its normally encountered form to allow easier escaping from local minima. A number of synthetic benchmarks are used for tuning the parameters of both heuristics and for testing the quality of the solutions each heuristic produces...

  3. On-chip photonic interconnects a computer architect's perspective

    CERN Document Server

    Nitta, Christopher J; Akella, Venkatesh

    2013-01-01

    As the number of cores on a chip continues to climb, architects will need to address both bandwidth and power consumption issues related to the interconnection network. Electrical interconnects are not likely to scale well to a large number of processors for energy efficiency reasons, and the problem is compounded by the fact that there is a fixed total power budget for a die, dictated by the amount of heat that can be dissipated without special (and expensive) cooling and packaging techniques. Thus, there is a need to seek alternatives to electrical signaling for on-chip interconnection appli

  4. Models and formal verification of multiprocessor system-on-chips

    DEFF Research Database (Denmark)

    Brekling, Aske Wiid; Hansen, Michael Reichhardt; Madsen, Jan

    2008-01-01

    , the configuration of the execution platform and the mapping of the application onto this platform. The computational model provides a basis for formal analysis of systems. The model is translated to timed automata and a tool for system verification and simulation has been developed using Uppaal as backend. We...... a discrete model of computation for such systems and characterize the size of the computation tree it suffices to consider when checking for schedulability. Analysis of multiprocessor system on chips is a major challenge due to the freedom of interrelated choices concerning the application level...

  5. A VLSI System-on-Chip for Particle Detectors

    CERN Document Server

    AUTHOR|(CDS)2078019

    In this thesis I present a System-on-Chip (SoC) I designed to oer a self- contained, compact data acquisition platform for micromegas detector mon- itoring. I carried on my work within the RD-51 collab oration of CERN. With a companion ADC, my architecture is capable to acquire the signal from a detector electro de, pro cess the data and p erform monitoring tests. The SoC is built around on a custom 8-bit micropro cessor with internal mem- ory resources and emb eds the p eripherals to b e interf...

  6. Microarchitecture of network-on-chip routers a designer's perspective

    CERN Document Server

    Dimitrakopoulos, Giorgos; Seitanidis, Ioannis

    2014-01-01

    This book provides a unified overview of network-on-chip router micro-architecture, the corresponding design opportunities and challenges, and existing solutions to overcome these challenges. The discussion focuses on the heart of a NoC, the NoC router, and how it interacts with the rest of the system. Coverage includes both basic and advanced design techniques that cover the entire router design space including router organization, flow control, pipelined operation, buffering architectures, as well as allocators' structure and algorithms. Router micro-architectural options are presented in a

  7. On-chip integrated lasers for biophotonic applications

    DEFF Research Database (Denmark)

    Mappes, Timo; Wienhold, Tobias; Bog, Uwe

    Meeting the need of biomedical users, we develop disposable Lab-on-a-Chip systems based on commercially available polymers. We are combining passive microfluidics with active optical elements on-chip by integrating multiple solid-state and liquid-core lasers. While covering a wide range of laser...... emission wavelengths, the chips have the size of microscope cover slips and use optical and fluidic interconnects only. Here, we present our latest realizations of integrated optofluidic lasers using whispering gallery mode or distributed feedback laser cavities....

  8. On-chip RF-to-optical transducer

    DEFF Research Database (Denmark)

    Simonsen, Anders; Tsaturyan, Yeghishe; Seis, Yannick

    2016-01-01

    interferometer. The coupling was mediated by a mechanical oscillator forming a mechanically compliant capacitor biased with a DC voltage. The latter enhances the electromechanical interaction all the way to the strong coupling regime. That scheme allowed optical detection of electronic signals with effective...... noise temperatures far below the actual temperature of the mechanical element. On-chip integration of the electrical, mechanical and optical elements is necessary for an implementation of the transduction scheme that is viable for commercial applications. Reliable assembly of a strongly coupled...

  9. Multicore systems on-chip practical software/hardware design

    CERN Document Server

    Abdallah, Abderazek Ben

    2013-01-01

    System on chips designs have evolved from fairly simple unicore, single memory designs to complex heterogeneous multicore SoC architectures consisting of a large number of IP blocks on the same silicon. To meet high computational demands posed by latest consumer electronic devices, most current systems are based on such paradigm, which represents a real revolution in many aspects in computing.The attraction of multicore processing for power reduction is compelling. By splitting a set of tasks among multiple processor cores, the operating frequency necessary for each core can be reduced, allowi

  10. Power and Thermal Management of System-on-Chip

    DEFF Research Database (Denmark)

    Liu, Wei

    , are necessary at the chip design level. In this work, we investigate the power and thermal management of System-on- Chips (SoCs). Thermal analysis is performed in a SPICE simulation approach based on the electrical-thermal analogy. We investigate the impact of inter- connects on heat distribution...... of temperature reduction, timing and area overhead to the general method, which enlarges the circuit area uniformly. A case study analyzes the design of Floating Point Units (FPU) from an energy and a thermal perspective. For the division operation, we compare different implementations and illustrate the impact...

  11. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  12. Acoustic lens for capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Firouzi, Kamyar; Park, Kwan Kyu; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T.

    2014-08-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing.

  13. Acoustic lens for capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Firouzi, Kamyar; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T; Kyu Park, Kwan

    2014-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  14. Robust Design of an Optical Micromachine for an Ophthalmic Application

    Directory of Open Access Journals (Sweden)

    Ingo Sieber

    2016-05-01

    Full Text Available This article describes an approach to the robust design of an optical micromachine consisting of a freeform optics, an amplification linkage, and an actuator. The robust design approach consists of monolithic integration principles to minimize assembly efforts and of an optimization of the functional components with respect to robustness against remaining assembly and manufacturing tolerances. The design approach presented involves the determination of the relevant tolerances arising from the domains manufacturing, assembly, and operation of the micromachine followed by a sensitivity analysis with the objective of identifying the worst offender. Subsequent to the above-described steps, an optimization of the functional design of the freeform optics with respect to a compensation of the effects of the tolerances is performed. The result leads to a robust design of the freeform optics and hence ensures a defined and optimal minimum performance of the micromachine in the presence of tolerances caused by the manufacturing processes and the operation of the micromachine. The micromachine under discussion is the tunable optics of an ophthalmic implant, an artificial accommodation system recently realized as a demonstration model at a scale of 2:1. The artificial accommodation system will be developed to replace the human crystalline lens in the case of a cataract.

  15. On-Chip Correlator for Passive Wireless SAW Multisensor Systems

    Directory of Open Access Journals (Sweden)

    Liqiang Xie

    2016-01-01

    Full Text Available For decoding the asynchronous superposition of response signals from different sensors, it is a challenge to achieve correlation in a code division multiplexing (CDM based passive wireless surface acoustic wave (SAW multisensor system. Therefore, an on-chip correlator scheme is developed in this paper. In contrast to conventional CDM-based systems, this novel scheme enables the correlations to be operated at the SAW sensors, instead of the reader. Thus, the response signals arriving at the reader are the result of cross-correlation on the chips. It is then easy for the reader to distinguish the sensor that is matched with the interrogating signal. The operation principle, signal analysis, and simulation of the novel scheme are described in the paper. The simulation results show the response signals from the correlations of the sensors. A clear spike pulse is presented in the response signals, when a sensor code is matched with the interrogating code. Simulations verify the feasibility of the on-chip correlator concept.

  16. 3D Printing of Organs-On-Chips

    Science.gov (United States)

    Yi, Hee-Gyeong; Lee, Hyungseok; Cho, Dong-Woo

    2017-01-01

    Organ-on-a-chip engineering aims to create artificial living organs that mimic the complex and physiological responses of real organs, in order to test drugs by precisely manipulating the cells and their microenvironments. To achieve this, the artificial organs should to be microfabricated with an extracellular matrix (ECM) and various types of cells, and should recapitulate morphogenesis, cell differentiation, and functions according to the native organ. A promising strategy is 3D printing, which precisely controls the spatial distribution and layer-by-layer assembly of cells, ECMs, and other biomaterials. Owing to this unique advantage, integration of 3D printing into organ-on-a-chip engineering can facilitate the creation of micro-organs with heterogeneity, a desired 3D cellular arrangement, tissue-specific functions, or even cyclic movement within a microfluidic device. Moreover, fully 3D-printed organs-on-chips more easily incorporate other mechanical and electrical components with the chips, and can be commercialized via automated massive production. Herein, we discuss the recent advances and the potential of 3D cell-printing technology in engineering organs-on-chips, and provides the future perspectives of this technology to establish the highly reliable and useful drug-screening platforms. PMID:28952489

  17. 3D Printing of Organs-On-Chips.

    Science.gov (United States)

    Yi, Hee-Gyeong; Lee, Hyungseok; Cho, Dong-Woo

    2017-01-25

    Organ-on-a-chip engineering aims to create artificial living organs that mimic the complex and physiological responses of real organs, in order to test drugs by precisely manipulating the cells and their microenvironments. To achieve this, the artificial organs should to be microfabricated with an extracellular matrix (ECM) and various types of cells, and should recapitulate morphogenesis, cell differentiation, and functions according to the native organ. A promising strategy is 3D printing, which precisely controls the spatial distribution and layer-by-layer assembly of cells, ECMs, and other biomaterials. Owing to this unique advantage, integration of 3D printing into organ-on-a-chip engineering can facilitate the creation of micro-organs with heterogeneity, a desired 3D cellular arrangement, tissue-specific functions, or even cyclic movement within a microfluidic device. Moreover, fully 3D-printed organs-on-chips more easily incorporate other mechanical and electrical components with the chips, and can be commercialized via automated massive production. Herein, we discuss the recent advances and the potential of 3D cell-printing technology in engineering organs-on-chips, and provides the future perspectives of this technology to establish the highly reliable and useful drug-screening platforms.

  18. On-Chip Reconfigurable Hardware Accelerators for Popcount Computations

    Directory of Open Access Journals (Sweden)

    Valery Sklyarov

    2016-01-01

    Full Text Available Popcount computations are widely used in such areas as combinatorial search, data processing, statistical analysis, and bio- and chemical informatics. In many practical problems the size of initial data is very large and increase in throughput is important. The paper suggests two types of hardware accelerators that are (1 designed in FPGAs and (2 implemented in Zynq-7000 all programmable systems-on-chip with partitioning of algorithms that use popcounts between software of ARM Cortex-A9 processing system and advanced programmable logic. A three-level system architecture that includes a general-purpose computer, the problem-specific ARM, and reconfigurable hardware is then proposed. The results of experiments and comparisons with existing benchmarks demonstrate that although throughput of popcount computations is increased in FPGA-based designs interacting with general-purpose computers, communication overheads (in experiments with PCI express are significant and actual advantages can be gained if not only popcount but also other types of relevant computations are implemented in hardware. The comparison of software/hardware designs for Zynq-7000 all programmable systems-on-chip with pure software implementations in the same Zynq-7000 devices demonstrates increase in performance by a factor ranging from 5 to 19 (taking into account all the involved communication overheads between the programmable logic and the processing systems.

  19. 3D Printing of Organs-On-Chips

    Directory of Open Access Journals (Sweden)

    Hee-Gyeong Yi

    2017-01-01

    Full Text Available Organ-on-a-chip engineering aims to create artificial living organs that mimic the complex and physiological responses of real organs, in order to test drugs by precisely manipulating the cells and their microenvironments. To achieve this, the artificial organs should to be microfabricated with an extracellular matrix (ECM and various types of cells, and should recapitulate morphogenesis, cell differentiation, and functions according to the native organ. A promising strategy is 3D printing, which precisely controls the spatial distribution and layer-by-layer assembly of cells, ECMs, and other biomaterials. Owing to this unique advantage, integration of 3D printing into organ-on-a-chip engineering can facilitate the creation of micro-organs with heterogeneity, a desired 3D cellular arrangement, tissue-specific functions, or even cyclic movement within a microfluidic device. Moreover, fully 3D-printed organs-on-chips more easily incorporate other mechanical and electrical components with the chips, and can be commercialized via automated massive production. Herein, we discuss the recent advances and the potential of 3D cell-printing technology in engineering organs-on-chips, and provides the future perspectives of this technology to establish the highly reliable and useful drug-screening platforms.

  20. Lab-on-chip systems for integrated bioanalyses.

    Science.gov (United States)

    Conde, João Pedro; Madaboosi, Narayanan; Soares, Ruben R G; Fernandes, João Tiago S; Novo, Pedro; Moulas, Geraud; Chu, Virginia

    2016-06-30

    Biomolecular detection systems based on microfluidics are often called lab-on-chip systems. To fully benefit from the miniaturization resulting from microfluidics, one aims to develop 'from sample-to-answer' analytical systems, in which the input is a raw or minimally processed biological, food/feed or environmental sample and the output is a quantitative or qualitative assessment of one or more analytes of interest. In general, such systems will require the integration of several steps or operations to perform their function. This review will discuss these stages of operation, including fluidic handling, which assures that the desired fluid arrives at a specific location at the right time and under the appropriate flow conditions; molecular recognition, which allows the capture of specific analytes at precise locations on the chip; transduction of the molecular recognition event into a measurable signal; sample preparation upstream from analyte capture; and signal amplification procedures to increase sensitivity. Seamless integration of the different stages is required to achieve a point-of-care/point-of-use lab-on-chip device that allows analyte detection at the relevant sensitivity ranges, with a competitive analysis time and cost. © 2016 The Author(s). Published by Portland Press Limited on behalf of the Biochemical Society.

  1. Dual axis operation of a micromachined rate gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Juneau, T. [BSAC, Berkeley, CA (United States); Pisano, A.P. [Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering; Smith, J. [Sandia National Lab., Albuquerque, NM (United States)

    1997-04-01

    Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

  2. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  3. The next generation platform for System-on-Chip; Neste generasjons plattform for System-on-Chip

    Energy Technology Data Exchange (ETDEWEB)

    Tallaksen, Espen

    2002-07-01

    An increasing demand for including analog functionality in order to have a complete system on one chip requires a new step in the methodology: second-generation System-on-Chip (SoC) platforms. The capacity, or amount of functionality, which can be put into an ASIC (Application Specific Integrated Circuit) chip is doubled for each one and a half year. The design methodology has not kept up with this development, which has resulted in a gap between what can go into the ASIC physically and our ability to do it in practice. This design gap is increasing and has led to increased attention to design efficiency. The semi conductor industry has introduced concepts such as Intellectual Property (P), Virtual Components (VC), System-on-Chip (SoC) and Platform Based Design (PBD). Digital design has been in focus, since traditionally it is digital design that has given momentum to the development of ASIC methodology and it is above all the digital part that increases in functionality. Today, however, the market increasingly demands increased analog functionality to have a complete system on one single chip.

  4. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  5. Multi-layer enhancement to polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-10-01

    A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

  6. Monolithic Micromachined Quartz Resonator based Infrared Focal Plane Arrays

    Science.gov (United States)

    2012-05-05

    prototypes of integrated micromachined IR detectors consisting of 200 μm diameter QCM resonators, 241 MHz (6.9 μm) thick 5 x 5 resonator arrays from Y-cut...of small QCM devices. • A novel measurement method for the real-time tracking of the resonance frequency based on impedance measurement around the...miniaturize QCM ? • Micromachining Quartz • Evaluation of QCM MicroArrays • Adsorption Experiments – Human Serum Albumin, IgG, and Human Fibrinogen Adsorption

  7. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    International Nuclear Information System (INIS)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-01-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated. (paper)

  8. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    Science.gov (United States)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-09-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated.

  9. Photonic crystal biosensors towards on-chip integration.

    Science.gov (United States)

    Threm, Daniela; Nazirizadeh, Yousef; Gerken, Martina

    2012-08-01

    Photonic crystal technology has attracted large interest in the last years. The possibility to generate highly sensitive sensor elements with photonic crystal structures is very promising for medical or environmental applications. The low-cost fabrication on the mass scale is as advantageous as the compactness and reliability of photonic crystal biosensors. The possibility to integrate microfluidic channels together with photonic crystal structures allows for highly compact devices. This article reviews different types of photonic crystal sensors including 1D photonic crystal biosensors, biosensors with photonic crystal slabs, photonic crystal waveguide biosensors and biosensors with photonic crystal microcavities. Their applications in biomolecular and pathogen detection are highlighted. The sensitivities and the detection limits of the different biosensors are compared. The focus is on the possibilities to integrate photonic crystal biosensors on-chip. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  10. On-Chip Architecture for Self-Homodyned Nonclassical Light

    Science.gov (United States)

    Fischer, Kevin A.; Kelaita, Yousif A.; Sapra, Neil V.; Dory, Constantin; Lagoudakis, Konstantinos G.; Müller, Kai; Vučković, Jelena

    2017-04-01

    In the last decade, there has been remarkable progress on the practical integration of on-chip quantum photonic devices, yet quantum-state generators remain an outstanding challenge. Simultaneously, the quantum-dot photonic-crystal-resonator platform has demonstrated a versatility for creating nonclassical light with tunable quantum statistics thanks to a newly discovered self-homodyning interferometric effect that preferentially selects the quantum light over the classical light when using an optimally tuned Fano resonance. In this work, we propose a general structure for the cavity quantum electrodynamical generation of quantum states from a waveguide-integrated version of the quantum-dot photonic-crystal-resonator platform, which is specifically tailored for preferential quantum-state transmission. We support our results with rigorous finite-difference time-domain and quantum-optical simulations and show how our proposed device can serve as a robust generator of highly pure single- and even multiphoton states.

  11. On-chip deposition of carbon nanotubes using CMOS microhotplates

    International Nuclear Information System (INIS)

    Haque, M S; Teo, K B K; Rupensinghe, N L; Ali, S Z; Haneef, I; Maeng, Sunglyul; Park, J; Udrea, F; Milne, W I

    2008-01-01

    The direct deposition of carbon nanotubes on CMOS microhotplates is demonstrated in this paper. Tungsten microhotplates, fabricated on thin SOI membranes aside CMOS control circuitry, are used to locally grow carbon nanotubes by chemical vapour deposition. Unlike bulk heating of the entire chip, which could cause degradation to CMOS devices and interconnects due to high growth temperatures in excess of 500 deg. C, this novel technique allows carbon nanotubes to be grown on-chip in localized regions. The microfabricated heaters are thermally isolated from the rest of the CMOS chip as they are on the membranes. This allows carbon nanotubes to be grown alongside CMOS circuitry on the same wafer without any external heating, thus enabling new applications (e.g. smart gas sensing) where the integration of CMOS and carbon nanotubes is required

  12. Various On-Chip Sensors with Microfluidics for Biological Applications

    Directory of Open Access Journals (Sweden)

    Hun Lee

    2014-09-01

    Full Text Available In this paper, we review recent advances in on-chip sensors integrated with microfluidics for biological applications. Since the 1990s, much research has concentrated on developing a sensing system using optical phenomena such as surface plasmon resonance (SPR and surface-enhanced Raman scattering (SERS to improve the sensitivity of the device. The sensing performance can be significantly enhanced with the use of microfluidic chips to provide effective liquid manipulation and greater flexibility. We describe an optical image sensor with a simpler platform for better performance over a larger field of view (FOV and greater depth of field (DOF. As a new trend, we review consumer electronics such as smart phones, tablets, Google glasses, etc. which are being incorporated in point-of-care (POC testing systems. In addition, we discuss in detail the current optical sensing system integrated with a microfluidic chip.

  13. On-Chip generation of polymer microcapsules through droplet coalescence

    Science.gov (United States)

    Eqbal, Md Danish; Gundabala, Venkat; Gundabala lab Team

    Alginate microbeads and microcapsules have numerous applications in drug delivery, tissue engineering and other biomedical areas due to their unique properties. Microcapsules with liquid core are of particular interest in the area of cell encapsulation. Various methods such as coacervation, emulsification, micro-nozzle, etc. exist for the generation of microbeads and microcapsules. However, these methods have several drawbacks like coagulation, non-uniformity, and polydispersity. In this work we present a method for complete on chip generation of alginate microcapsules (single core as well as double core) through the use of droplet merging technique. For this purpose, a combined Coflow and T-junction configuration is implemented in a hybrid glass-PDMS (Polydimethylsiloxane) microfluidic device. Efficient generation is achieved through precise matching of the generation rates of the coalescing drops. Through this approach, microcapsules with intact single and double (liquid) cores surrounded by alginate shell have been successfully generated and characterized.

  14. Lab-on-chip components for molecular detection

    Science.gov (United States)

    Adam, Tijjani; Dhahi, Th S.; Mohammed, Mohammed; Hashim, U.; Noriman, N. Z.; Dahham, Omar S.

    2017-09-01

    We successfully fabricated Lab on chip components and integrated for possible use in biomedical application. The sensor was fabricated by using conventional photolithography method integrated with PDMS micro channels for smooth delivery of sample to the sensing domain. The sensor was silanized and aminated with 3-Aminopropyl triethoxysilane (APTES) to functionalize the surface with biomolecules and create molecular binding chemistry. The resulting Si-O-Si- components were functionalized with oligonucleotides probe of HPV, which interacted with the single stranded HPV DNA target to create a field across on the device. The fabrication, immobilization and hybridization processes were characterized with current voltage (I-V) characterization (KEITHLEY, 6487). The sensor show selectivity for the HPV DNA target in a linear range from concentration 0.1 nM to 1 µM. This strategy presented a simple, rapid and sensitive platform for HPV detection and would become a powerful tool for pathogenic microorganisms screening in clinical diagnosis.

  15. Endocrine system on chip for a diabetes treatment model.

    Science.gov (United States)

    Nguyen, Dao Thi Thuy; van Noort, Danny; Jeong, In-Kyung; Park, Sungsu

    2017-02-21

    The endocrine system is a collection of glands producing hormones which, among others, regulates metabolism, growth and development. One important group of endocrine diseases is diabetes, which is caused by a deficiency or diminished effectiveness of endogenous insulin. By using a microfluidic perfused 3D cell-culture chip, we developed an 'endocrine system on chip' to potentially be able to screen drugs for the treatment of diabetes by measuring insulin release over time. Insulin-secreting β-cells are located in the pancreas, while L-cells, located in the small intestines, stimulate insulin secretion. Thus, we constructed a co-culture of intestinal-pancreatic cells to measure the effect of glucose on the production of glucagon-like peptide-1 (GLP-1) from the L-cell line (GLUTag) and insulin from the pancreatic β-cell line (INS-1). After three days of culture, both cell lines formed aggregates, exhibited 3D cell morphology, and showed good viability (>95%). We separately measured the dynamic profile of GLP-1 and insulin release at glucose concentrations of 0.5 and 20 mM, as well as the combined effect of GLP-1 on insulin production at these glucose concentrations. In response to glucose stimuli, GLUTag and INS-1 cells produced higher amounts of GLP-1 and insulin, respectively, compared to a static 2D cell culture. INS-1 combined with GLUTag cells exhibited an even higher insulin production in response to glucose stimulation. At higher glucose concentrations, the diabetes model on chip showed faster saturation of the insulin level. Our results suggest that the endocrine system developed in this study is a useful tool for observing dynamical changes in endocrine hormones (GLP-1 and insulin) in a glucose-dependent environment. Moreover, it can potentially be used to screen GLP-1 analogues and natural insulin and GLP-1 stimulants for diabetes treatment.

  16. Micromachined Silicon Stimulating Probes with CMOS Circuitry for Use in the Central Nervous System

    Science.gov (United States)

    Tanghe, Steven John

    1992-01-01

    Electrical stimulation in the central nervous system is a valuable technique for studying neural systems and is a key element in the development of prostheses for deafness and other disorders. This thesis presents a family of multielectrode probe structures, fulfilling the need for chronic multipoint stimulation tools essential for interfacing to the highly complex neural networks in the brain. These probes are batch-fabricated on silicon wafers, employing photoengraving techniques to precisely control the electrode site and array geometries and to allow the integration of on-chip CMOS circuitry for signal multiplexing and stimulus current generation. Silicon micromachining is used to define the probe shapes, which have typical shank dimensions of 3 mm in length by 100 mu m in width by 15 μm in thickness. Each shank supports up to eight planar iridium oxide electrode sites capable of delivering charge densities in excess of 3 mC/cm^2 during current pulse stimulation. Three active probe circuits have been designed with varied complexity and capability. All three can deliver biphasic stimulus currents through 16 sites using only 5 external leads, and they are all compatible with the same external control system. The most complex design interprets site addresses and stimulus current amplitudes from 16-bit words shifted into the probe at 4 MHz. Sixteen on-chip, biphasic, 8-bit digital-to-analog converters deliver analog stimulus currents in the range of +/- 254 muA to any combination of electrode sites. These DACs exhibit full-scale internal linearity to better than +/-1/2 LSB and can be calibrated by varying the positive power supply voltage. The entire probe circuit dissipates only 80 muW from +/-5 V supplies when not delivering stimulus currents, it includes several safety features, and is testable from the input pads. Test results from the fabricated circuits indicate that they all function properly at clocking frequencies as high as 10 MHz, meeting or exceeding

  17. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  18. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a

  19. Modeling Grinding Processes as Micro-Machining Operation ...

    African Journals Online (AJOL)

    A computational based model for surface grinding process as a micro-machined operation has been developed. In this model, grinding forces are made up of chip formation force and sliding force. Mathematical expressions for Modeling tangential grinding force and normal grinding force were obtained. The model was ...

  20. Micromachined palladium silver alloy membranes for hydrogen separation

    NARCIS (Netherlands)

    Tong, D.H.; Gielens, F.C.; Berenschot, Johan W.; de Boer, Meint J.; Gardeniers, Johannes G.E.; Jansen, Henricus V.; Nijdam, W.; van Rijn, C.J.M.; Elwenspoek, Michael Curt

    2002-01-01

    This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates

  1. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  2. Optimizing the on-chip communication architecture of low power Systems-on-Chip in Deep Sub-Micron technology

    OpenAIRE

    Leroy, Anthony

    2006-01-01

    Ce mémoire traite des systèmes intégrés sur puce (System-on-Chip) à faible consommation d'énergie tels que ceux qui seront utilisés dans les équipements portables de future génération (ordinateurs de poche (PDA), téléphones mobiles). S'agissant d'équipements alimentés par des batteries, la consommation énergétique est un problème critique. Ces plateformes contiendront probablement une douzaine de coeurs de processeur et une quantité importante de mémoire embarquée. Une architecture de communi...

  3. A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays for cell isolation

    Science.gov (United States)

    Dong, Tao; Su, Qianhua; Yang, Zhaochu; Zhang, Yulong; Egeland, Eirik B.; Gu, Dan D.; Calabrese, Paolo; Kapiris, Matteo J.; Karlsen, Frank; Minh, Nhut T.; Wang, K.; Jakobsen, Henrik

    2010-11-01

    A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays has been developed and demonstrated, which can merely employ one independent lab-on-chip to realize cell isolation. The simulation, design, microfabrication and test for the new electromagnetic micro separator were executed. The simulation results of the electromagnetic field in the separator show that special soft magnetic micro-pillar arrays can amplify and redistribute the electromagnetic field generated by the micro-coils. The separator can be equipped with a strong magnetic field to isolate the target cells with a considerably low input current. The micro separator was fabricated by micro-processing technology. An electroplating bath was hired to deposit NiCo/NiFe to fabricate the micro-pillar arrays. An experimental system was set up to verify the function of the micro separator by isolating the lymphocytes, in which the human whole blood mixed with Dynabeads® FlowComp Flexi and monoclonal antibody MHCD2704 was used as the sample. The results show that the electromagnetic micro separator with an extremely low input current can recognize and capture the target lymphocytes with a high efficiency, the separation ratio reaching more than 90% at a lower flow rate. For the electromagnetic micro separator, there is no external magnetizing field required, and there is no extra cooling system because there is less Joule heat generated due to the lower current. The magnetic separator is totally reusable, and it can be used to separate cells or proteins with common antigens.

  4. Omphale: Streamlining the Communication for Jobs in a Multi Processor System on Chip

    NARCIS (Netherlands)

    Bijlsma, T.; Bekooij, Marco Jan Gerrit; Smit, Gerardus Johannes Maria; Jansen, P.G.

    2007-01-01

    Our Multi Processor System on Chip (MPSoC) template provides processing tiles that are connected via a network on chip. A processing tile contains a processing unit and a Scratch Pad Memory (SPM). This paper presents the Omphale tool that performs the first step in mapping a job, represented by a

  5. On-chip graphene electrode, methods of making, and methods of use

    KAUST Repository

    Nayak, Pranati

    2018-01-25

    Embodiments of the present disclosure provide a device including an on-chip electrode platform including one or more three dimensional laser scribed graphene electrodes, methods of making the on-chip electrode platform, methods of analyzing (e.g., detecting, quantifying, and the like) chemicals and biochemicals, and the like.

  6. Avoiding Message-Dependent Deadlock in Network-Based Systems on Chip

    NARCIS (Netherlands)

    Hansson, A.; Goossens, K.; Rãdulescu, A.

    2007-01-01

    Networks on chip (NoCs) are an essential component of systems on chip (SoCs) and much research is devoted to deadlock avoidance in NoCs. Prior work focuses on the router network while protocol interactions between NoC and intellectual property (IP) modules are not considered. These interactions

  7. Microfluidic organ-on-chip technology for blood-brain barrier research.

    Science.gov (United States)

    van der Helm, Marinke W; van der Meer, Andries D; Eijkel, Jan C T; van den Berg, Albert; Segerink, Loes I

    2016-01-01

    Organs-on-chips are a new class of microengineered laboratory models that combine several of the advantages of current in vivo and in vitro models. In this review, we summarize the advances that have been made in the development of organ-on-chip models of the blood-brain barrier (BBBs-on-chips) and the challenges that are still ahead. The BBB is formed by specialized endothelial cells and separates blood from brain tissue. It protects the brain from harmful compounds from the blood and provides homeostasis for optimal neuronal function [corrected]. Studying BBB function and dysfunction is important for drug development and biomedical research. Microfluidic BBBs-on-chips enable real-time study of (human) cells in an engineered physiological microenvironment, for example incorporating small geometries and fluid flow as well as sensors. Examples of BBBs-on-chips in literature already show the potential of more realistic microenvironments and the study of organ-level functions. A key challenge in the field of BBB-on-chip development is the current lack of standardized quantification of parameters such as barrier permeability and shear stress. This limits the potential for direct comparison of the performance of different BBB-on-chip models to each other and existing models. We give recommendations for further standardization in model characterization and conclude that the rapidly emerging field of BBB-on-chip models holds great promise for further studies in BBB biology and drug development.

  8. A lab-on-chip for malaria diagnosis and surveillance.

    Science.gov (United States)

    Taylor, Brian J; Howell, Anita; Martin, Kimberly A; Manage, Dammika P; Gordy, Walter; Campbell, Stephanie D; Lam, Samantha; Jin, Albert; Polley, Spencer D; Samuel, Roshini A; Atrazhev, Alexey; Stickel, Alex J; Birungi, Josephine; Mbonye, Anthony K; Pilarski, Linda M; Acker, Jason P; Yanow, Stephanie K

    2014-05-09

    Access to timely and accurate diagnostic tests has a significant impact in the management of diseases of global concern such as malaria. While molecular diagnostics satisfy this need effectively in developed countries, barriers in technology, reagent storage, cost and expertise have hampered the introduction of these methods in developing countries. In this study a simple, lab-on-chip PCR diagnostic was created for malaria that overcomes these challenges. The platform consists of a disposable plastic chip and a low-cost, portable, real-time PCR machine. The chip contains a desiccated hydrogel with reagents needed for Plasmodium specific PCR. Chips can be stored at room temperature and used on demand by rehydrating the gel with unprocessed blood, avoiding the need for sample preparation. These chips were run on a custom-built instrument containing a Peltier element for thermal cycling and a laser/camera setup for amplicon detection. This diagnostic was capable of detecting all Plasmodium species with a limit of detection for Plasmodium falciparum of 2 parasites/μL of blood. This exceeds the sensitivity of microscopy, the current standard for diagnosis in the field, by ten to fifty-fold. In a blind panel of 188 patient samples from a hyper-endemic region of malaria transmission in Uganda, the diagnostic had high sensitivity (97.4%) and specificity (93.8%) versus conventional real-time PCR. The test also distinguished the two most prevalent malaria species in mixed infections, P. falciparum and Plasmodium vivax. A second blind panel of 38 patient samples was tested on a streamlined instrument with LED-based excitation, achieving a sensitivity of 96.7% and a specificity of 100%. These results describe the development of a lab-on-chip PCR diagnostic from initial concept to ready-for-manufacture design. This platform will be useful in front-line malaria diagnosis, elimination programmes, and clinical trials. Furthermore, test chips can be adapted to detect other

  9. Pipelined multiprocessor system-on-chip for multimedia

    CERN Document Server

    Javaid, Haris

    2014-01-01

    This book describes analytical models and estimation methods to enhance performance estimation of pipelined multiprocessor systems-on-chip (MPSoCs).  A framework is introduced for both design-time and run-time optimizations. For design space exploration, several algorithms are presented to minimize the area footprint of a pipelined MPSoC under a latency or a throughput constraint.  A novel adaptive pipelined MPSoC architecture is described, where idle processors are transitioned into low-power states at run-time to reduce energy consumption. Multi-mode pipelined MPSoCs are introduced, where multiple pipelined MPSoCs optimized separately are merged into a single pipelined MPSoC, enabling further reduction of the area footprint by sharing the processors and communication buffers. Readers will benefit from the authors’ combined use of analytical models, estimation methods and exploration algorithms and will be enabled to explore billions of design points in a few minutes.   ·         Describes the ...

  10. Multimedia Terminal System-on-Chip Design and Simulation

    Directory of Open Access Journals (Sweden)

    Barbieri Ivano

    2005-01-01

    Full Text Available This paper proposes a design approach based on integrated architectural and system-on-chip (SoC simulations. The main idea is to have an efficient framework for the design and the evaluation of multimedia terminals, allowing a fast system simulation with a definable degree of accuracy. The design approach includes the simulation of very long instruction word (VLIW digital signal processors (DSPs, the utilization of a device multiplexing the media streams, and the emulation of the real-time media acquisition. This methodology allows the evaluation of both the multimedia algorithm implementations and the hardware platform, giving feedback on the complete SoC including the interaction between modules and conflicts in accessing either the bus or shared resources. An instruction set architecture (ISA simulator and an SoC simulation environment compose the integrated framework. In order to validate this approach, the evaluation of an audio-video multiprocessor terminal is presented, and the complete simulation test results are reported.

  11. Hardware implementation of on -chip learning using re configurable FPGAS

    International Nuclear Information System (INIS)

    Kelash, H.M.; Sorour, H.S; Mahmoud, I.I.; Zaki, M; Haggag, S.S.

    2009-01-01

    The multilayer perceptron (MLP) is a neural network model that is being widely applied in the solving of diverse problems. A supervised training is necessary before the use of the neural network.A highly popular learning algorithm called back-propagation is used to train this neural network model. Once trained, the MLP can be used to solve classification problems. An interesting method to increase the performance of the model is by using hardware implementations. The hardware can do the arithmetical operations much faster than software. In this paper, a design and implementation of the sequential mode (stochastic mode) of backpropagation algorithm with on-chip learning using field programmable gate arrays (FPGA) is presented, a pipelined adaptation of the on-line back propagation algorithm (BP) is shown.The hardware implementation of forward stage, backward stage and update weight of backpropagation algorithm is also presented. This implementation is based on a SIMD parallel architecture of the forward propagation the diagnosis of the multi-purpose research reactor of Egypt accidents is used to test the proposed system

  12. Optically Driven Mobile Integrated Micro-Tools for a Lab-on-a-Chip

    Directory of Open Access Journals (Sweden)

    Yi-Jui Liu

    2013-04-01

    Full Text Available This study proposes an optically driven complex micromachine with an Archimedes microscrew as the mechanical power, a sphere as a coupler, and three knives as the mechanical tools. The micromachine is fabricated by two-photon polymerization and is portably driven by optical tweezers. Because the microscrew can be optically trapped and rotates spontaneously, it provides driving power for the complex micro-tools. In other words, when a laser beam focuses on the micromachine, the microscrew is trapped toward the focus point and simultaneously rotates. A demonstration showed that the integrated micromachines are grasped by the optical tweezers and rotated by the Archimedes screw. The rotation efficiencies of the microrotors with and without knives are 1.9 rpm/mW and 13.5 rpm/mW, respectively. The micromachine can also be portably dragged along planed routes. Such Archimedes screw-based optically driven complex mechanical micro-tools enable rotation similar to moving machines or mixers, which could contribute to applications for a biological microfluidic chip or a lab-on-a-chip.

  13. A Novel Architecture for Adaptive Traffic Control in Network on Chip using Code Division Multiple Access Technique

    OpenAIRE

    Fatemeh. Dehghani; Shahram. Darooei

    2016-01-01

    Network on chip has emerged as a long-term and effective method in Multiprocessor System-on-Chip communications in order to overcome the bottleneck in bus based communication architectures. Efficiency and performance of network on chip is so dependent on the architecture and structure of the network. In this paper a new structure and architecture for adaptive traffic control in network on chip using Code Division Multiple Access technique is presented. To solve the problem of synchronous acce...

  14. Co-design of on-chip antennas and circuits for a UNII band monolithic transceiver

    KAUST Repository

    Shamim, Atif

    2012-07-28

    The surge of highly integrated and multifunction wireless devices has necessitated the designers to think outside the box for solutions that are unconventional. The new trends have provided the impetus for low cost and compact RF System-on-Chip (SoC) approaches [1]. The major advantages of SoC are miniaturization and cost reduction. A major bottleneck to the true realization of monolithic RF SoC transceivers is the implementation of on-chip antennas with circuitry. Though complete integrated transceivers with on-chip antennas have been demonstrated, these designs are generally for high frequencies. Moreover, they either use non-standard CMOS processes or additional fabrication steps to enhance the antenna efficiency, which in turn adds to the cost of the system [2-3]. Another challenge related to the on-chip antennas is the characterization of their radiation properties. Most of the recently reported work (summarized in Table I) shows that very few on-chip antennas are characterized. Our previous work [4], demonstrated a Phase Lock Loop (PLL) based transmitter (TX) with an on-chip antenna. However, the radiation from the on-chip antenna experienced strong interference due to 1) some active circuitry on one side of the chip and 2) the PCB used to mount the chip in the anechoic chamber. This paper presents, for the first time, a complete 5.2 GHz (UNII band) transceiver with separate TX and receiver (RX) antennas. To the author\\'s best knowledge, its size of 3 mm2 is the smallest reported for a UNII band transceiver with two on-chip antennas. Both antennas are characterized for their radiation properties through an on-wafer custom measurement setup. The strategy to co-design on-chip antennas with circuits, resultant trade-offs and measurement challenges have also been discussed. © 2010 IEEE.

  15. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  16. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  17. A Router Architecture for Connection-Oriented Service Guarantees in the MANGO Clockless Network-on-Chip

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Sparsø, Jens

    2005-01-01

    On-chip networks for future system-on-chip designs need simple, high performance implementations. In order to promote system-level integrity, guaranteed services (GS) need to be provided. We propose a network-on-chip (NoC) router architecture to support this, and demonstrate with a CMOS standard...

  18. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Directory of Open Access Journals (Sweden)

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  19. Condensation of sodium on a micromachined surface for AMTEC

    International Nuclear Information System (INIS)

    Crowley, C.J.; Izenson, M.G.

    1993-01-01

    A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

  20. A system-level multiprocessor system-on-chip modeling framework

    DEFF Research Database (Denmark)

    Virk, Kashif Munir; Madsen, Jan

    2004-01-01

    We present a system-level modeling framework to model system-on-chips (SoC) consisting of heterogeneous multiprocessors and network-on-chip communication structures in order to enable the developers of today's SoC designs to take advantage of the flexibility and scalability of network-on-chip...... and rapidly explore high-level design alternatives to meet their system requirements. We present a modeling approach for developing high-level performance models for these SoC designs and outline how this system-level performance analysis capability can be integrated into an overall environment for efficient...

  1. Improved On-Chip Measurement of Delay in an FPGA or ASIC

    Science.gov (United States)

    Chen, Yuan; Burke, Gary; Sheldon, Douglas

    2007-01-01

    An improved design has been devised for on-chip-circuitry for measuring the delay through a chain of combinational logic elements in a field-programmable gate array (FPGA) or application-specific integrated circuit (ASIC). In the improved design, the delay chain does not include input and output buffers and is not configured as an oscillator. Instead, the delay chain is made part of the signal chain of an on-chip pulse generator. The duration of the pulse is measured on-chip and taken to equal the delay.

  2. High-speed Laser Micromachining with Copper Bromide Laser

    OpenAIRE

    Balchev, Ivaylo I.; Minkovski, Nikolai I.; Kostadinov, Ivan K.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  3. Applications of holographic on-chip microscopy (Conference Presentation)

    Science.gov (United States)

    Ozcan, Aydogan

    2017-02-01

    My research focuses on the use of computation/algorithms to create new optical microscopy, sensing, and diagnostic techniques, significantly improving existing tools for probing micro- and nano-objects while also simplifying the designs of these analysis tools. In this presentation, I will introduce a set of computational microscopes which use lens-free on-chip imaging to replace traditional lenses with holographic reconstruction algorithms. Basically, 3D images of specimens are reconstructed from their "shadows" providing considerably improved field-of-view (FOV) and depth-of-field, thus enabling large sample volumes to be rapidly imaged, even at nanoscale. These new computational microscopes routinely generate benefit of this technology is that it lends itself to field-portable and cost-effective designs which easily integrate with smartphones to conduct giga-pixel tele-pathology and microscopy even in resource-poor and remote settings where traditional techniques are difficult to implement and sustain, thus opening the door to various telemedicine applications in global health. Through the development of similar computational imagers, I will also report the discovery of new 3D swimming patterns observed in human and animal sperm. One of this newly discovered and extremely rare motion is in the form of "chiral ribbons" where the planar swings of the sperm head occur on an osculating plane creating in some cases a helical ribbon and in some others a twisted ribbon. Shedding light onto the statistics and biophysics of various micro-swimmers' 3D motion, these results provide an important example of how biomedical imaging significantly benefits from emerging computational algorithms/theories, revolutionizing existing tools for observing various micro- and nano-scale phenomena in innovative, high-throughput, and yet cost-effective ways.

  4. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

  5. High lane density slab-gel electrophoresis using micromachined instrumentation.

    Science.gov (United States)

    Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

    2001-10-01

    In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

  6. Tunable metamaterial-induced transparency with gate-controlled on-chip graphene metasurface.

    Science.gov (United States)

    Chen, Zan Hui; Tao, Jin; Gu, Jia Hua; Li, Jian; Hu, Di; Tan, Qi Long; Zhang, Fengchun; Huang, Xu Guang

    2016-12-12

    We propose and numerically investigate a gate-controlled on-chip graphene metasurface consisting of a monolayer graphene sheet and silicon photonic crystal-like substrate, to achieve an electrically-tunable induced transparency. The operation mechanism of the induced transparency of the on-chip graphene metasurface is analyzed. The tunable optical properties with different gate-voltages and polarizations have been discussed. Additionally, the spectral feature of the on-chip graphene metasurface as a function of the refractive index of the local environment is also investigated. The result shows that the on-chip graphene metasurface as a refractive index sensor can achieve an overall figure of merit of 8.89 in infrared wavelength range. Our study suggests that the proposed structure is potentially attractive as optoelectronic modulators and refractive index sensors.

  7. Essential issues in SOC design designing complex systems-on-chip

    CERN Document Server

    Lin, Youn-long Steve

    2007-01-01

    Covers issues related to system-on-chip (SoC) design. This book covers IP development, verification, integration, chip implementation, testing and software. It contains valuable academic and industrial examples for those involved with the design of complex SOCs.

  8. Implementation of Guaranteed Services in the MANGO Clockless Network-on-Chip

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Sparsø, Jens

    2006-01-01

    (clockless implementation, standard socket access points, and guaranteed communication services) make MANGO suitable for a modular SoC design flow is explained. Among the advantages of using clockless circuit techniques are inherent global timing closure, low forward latency in pipelines, and zero dynamic......Shared, segmented, on-chip interconnection networks, known as networks-on-chip (NoC), may become the preferred way of interconnecting intellectual property (IP) cores in future giga-scale system-on-chip (SoC) designs. A NoC can provide the required communication bandwidth while accommodating...... the effects of scaling microchip technologies. Equally important, a NoC facilitates a truly modular and scalable design flow. The MANGO (message-passing asynchronous network-on-chip providing guaranteed services over open core protocol (OCP) interfaces) NoC is presented, and how its key characteristics...

  9. A new 2D mesh routing approach for networks on chip Une nouvelle ...

    African Journals Online (AJOL)

    Keywords: Networks on chip, Dynamic routing algorithm, Clustering, Mesh topology, Systems on chip. Résumé. Dans le passé, les systèmes embarqués et numériques ont été confinés surtout aux systèmes informatiques. Aujourd'hui, ces systèmes sont appliqués dans un grand nombre de domaines et d'appareils tels que ...

  10. On-chip RF-to-optical transducer (Conference Presentation)

    Science.gov (United States)

    Simonsen, Anders; Tsaturyan, Yeghishe; Seis, Yannick; Schmid, Silvan; Schliesser, Albert; Polzik, Eugene S.

    2016-04-01

    Recent advances in the fabrication of nano- and micromechanical elements enable the realization of high-quality mechanical resonators with masses so small that the forces from optical photons can have a significant impact on their motion. This facilitates a strong interaction between mechanical motion and light, or phonons and photons. This interaction is the corner stone of the field of optomechanics and allows, for example, for ultrasensitive detection and manipulation of mechanical motion using laser light. Remarkably, today these techniques can be extended into the quantum regime, in which fundamental fluctuations of light and mechanics govern the system's behavior. Micromechanical elements can also interact strongly with other physical systems, which is the central aspect of many micro-electro-mechanical based sensors. Micromechanical elements can therefore act as a bridge between these diverse systems, plus technologies that utilize them, and the mature toolbox of optical techniques that routinely operates at the quantum limit. In a previous work [1], we demonstrated such a bridge by realizing simultaneous coupling between an electronic LC circuit and a quantum-noise limited optical interferometer. The coupling was mediated by a mechanical oscillator forming a mechanically compliant capacitor biased with a DC voltage. The latter enhances the electromechanical interaction all the way to the strong coupling regime. That scheme allowed optical detection of electronic signals with effective noise temperatures far below the actual temperature of the mechanical element. On-chip integration of the electrical, mechanical and optical elements is necessary for an implementation of the transduction scheme that is viable for commercial applications. Reliable assembly of a strongly coupled electromechanical device, and inclusion of an optical cavity for enhanced optical readout, are key features of the new platform. Both can be achieved with standard cleanroom fabrication

  11. Globally Stable Microresonator Turing Pattern Formation for Coherent High-Power THz Radiation On-Chip

    Science.gov (United States)

    Huang, Shu-Wei; Yang, Jinghui; Yang, Shang-Hua; Yu, Mingbin; Kwong, Dim-Lee; Zelevinsky, T.; Jarrahi, Mona; Wong, Chee Wei

    2017-10-01

    In nonlinear microresonators driven by continuous-wave (cw) lasers, Turing patterns have been studied in the formalism of the Lugiato-Lefever equation with emphasis on their high coherence and exceptional robustness against perturbations. Destabilization of Turing patterns and the transition to spatiotemporal chaos, however, limit the available energy carried in the Turing rolls and prevent further harvest of their high coherence and robustness to noise. Here, we report a novel scheme to circumvent such destabilization, by incorporating the effect of local mode hybridizations, and we attain globally stable Turing pattern formation in chip-scale nonlinear oscillators with significantly enlarged parameter space, achieving a record-high power-conversion efficiency of 45% and an elevated peak-to-valley contrast of 100. The stationary Turing pattern is discretely tunable across 430 GHz on a THz carrier, with a fractional frequency sideband nonuniformity measured at 7.3 ×10-14 . We demonstrate the simultaneous microwave and optical coherence of the Turing rolls at different evolution stages through ultrafast optical correlation techniques. The free-running Turing-roll coherence, 9 kHz in 200 ms and 160 kHz in 20 minutes, is transferred onto a plasmonic photomixer for one of the highest-power THz coherent generations at room temperature, with 1.1% optical-to-THz power conversion. Its long-term stability can be further improved by more than 2 orders of magnitude, reaching an Allan deviation of 6 ×10-10 at 100 s, with a simple computer-aided slow feedback control. The demonstrated on-chip coherent high-power Turing-THz system is promising to find applications in astrophysics, medical imaging, and wireless communications.

  12. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  13. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    International Nuclear Information System (INIS)

    Lani, Shane W.; Sabra, Karim G.; Wasequr Rashid, M.; Hasler, Jennifer; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  14. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  15. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2004-12-15

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  16. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Science.gov (United States)

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  17. Acoustic mode converters micromachined in silicon by proton beam writing

    International Nuclear Information System (INIS)

    Scholz, U.; Menzel, F.; Pluta, M.; Grill, W.; Butz, T.

    2011-01-01

    Proton beam writing is a powerful tool for the production of microstructures for acoustic applications because it allows to create structures inclined to the original sample surface which therefore can act as acoustic mode converters. We report on experiments, finding optimal structure sizes in p-type 12 Ω cm silicon for this purpose. For the creation of the structures the proton beam at the LIPSION laboratory was used. Furthermore, by investigating the micromachined silicon with a phase sensitive acoustic microscope we give evidence that inclined structures such as rods and walls can be used to change the mode of acoustic waves in the crystal.

  18. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  19. Photothermal self-excitation of the micromachined resonators

    Science.gov (United States)

    Churenkov, Alexander V.; Kozel, Stanislav M.; Listvin, Vladimir N.

    1990-07-01

    Recently interest has grown to the physical quantities fibre-optic sensors in which a micromachined resonator acts as a sensitive element. This resonator can change the resonant frequency when acted upon by an outside force. Energy supply necessary for the resonator excitation and transfer of information about the outer action are accomplished by optical fibres, that can be present in the zone of a higher aggressiveness, strong electromagnetic interferences atc. The frequency output of such sensors is easily processed by digital systems and is insensitive to signal level.

  20. A solvent resistant lab-on-chip platform for radiochemistry applications.

    Science.gov (United States)

    Rensch, Christian; Lindner, Simon; Salvamoser, Ruben; Leidner, Stephanie; Böld, Christoph; Samper, Victor; Taylor, David; Baller, Marko; Riese, Stefan; Bartenstein, Peter; Wängler, Carmen; Wängler, Björn

    2014-07-21

    The application of microfluidics to the synthesis of Positron Emission Tomography (PET) tracers has been explored for more than a decade. Microfluidic benefits such as superior temperature control have been successfully applied to PET tracer synthesis. However, the design of a compact microfluidic platform capable of executing a complete PET tracer synthesis workflow while maintaining prospects for commercialization remains a significant challenge. This study uses an integral system design approach to tackle commercialization challenges such as the material to process compatibility with a path towards cost effective lab-on-chip mass manufacturing from the start. It integrates all functional elements required for a simple PET tracer synthesis into one compact radiochemistry platform. For the lab-on-chip this includes the integration of on-chip valves, on-chip solid phase extraction (SPE), on-chip reactors and a reversible fluid interface while maintaining compatibility with all process chemicals, temperatures and chip mass manufacturing techniques. For the radiochemistry device it includes an automated chip-machine interface enabling one-move connection of all valve actuators and fluid connectors. A vial-based reagent supply as well as methods to transfer reagents efficiently from the vials to the chip has been integrated. After validation of all those functional elements, the microfluidic platform was exemplarily employed for the automated synthesis of a Gastrin-releasing peptide receptor (GRP-R) binding the PEGylated Bombesin BN(7-14)-derivative ([(18)F]PESIN) based PET tracer.

  1. A Low-Power Integrated Humidity CMOS Sensor by Printing-on-Chip Technology

    Directory of Open Access Journals (Sweden)

    Chang-Hung Lee

    2014-05-01

    Full Text Available A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 μm CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity sensing of the implemented printing-on-chip sensor system is experimentally tested. The sensor shows a sensitivity of 0.98% to humidity in the atmosphere. The maximum dynamic range of the readout circuit is 9.8 MΩ, which can be further tuned by the frequency of input signal to fit the requirement of the resistance of printed sensor. The power consumption keeps only 154 μW. This printing-on-chip sensor provides a practical solution to fulfill an ultra-small integrated sensor for the applications in miniaturized sensing systems.

  2. On-chip phase-change photonic memory and computing

    Science.gov (United States)

    Cheng, Zengguang; Ríos, Carlos; Youngblood, Nathan; Wright, C. David; Pernice, Wolfram H. P.; Bhaskaran, Harish

    2017-08-01

    The use of photonics in computing is a hot topic of interest, driven by the need for ever-increasing speed along with reduced power consumption. In existing computing architectures, photonic data storage would dramatically improve the performance by reducing latencies associated with electrical memories. At the same time, the rise of `big data' and `deep learning' is driving the quest for non-von Neumann and brain-inspired computing paradigms. To succeed in both aspects, we have demonstrated non-volatile multi-level photonic memory avoiding the von Neumann bottleneck in the existing computing paradigm and a photonic synapse resembling the biological synapses for brain-inspired computing using phase-change materials (Ge2Sb2Te5).

  3. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  4. Capacitive micromachined ultrasonic resonator for ultra sensitive trace gas detection

    Science.gov (United States)

    Ge, Li-Feng

    2013-01-01

    The ultra-sensitive trace gas detection has become increasingly important due to the demand for environment and sci-tech progress. In recent years a capacitive micromachined ultrasonic transducer (CMUT) with circular diaphragms used for imaging has been successfully used to detect chemical gases, and shows promising results. However, its behavior is the same as that of CMUTs for ranging, imaging and therapy applications, where the acoustic radiation with a certain power, produced by the vibration of circular diaphragms operating at the first bending mode, is required but is undesirable for gas sensing since it disturbs inevitably the environment to be measured. This paper, therefore, presents to optimize its behavior after an ideal capacitive micromachined ultrasonic resonator (CMUR) and then to utilize second-order and high-order bending modes of the circular diaphragm to minimize its acoustic radiation and obtain higher resonance frequency also. Since the resonance frequencies of high-order modes much higher than the fundamental frequency, an ultra-high operating frequency of GHz can be reached so that raising greatly the sensitivity of the CMUR and being able to realize the ultra-sensitive trace gas detections.

  5. Parametric studies on the nanosecond laser micromachining of the materials

    Science.gov (United States)

    Tański, M.; Mizeraczyk, J.

    2016-12-01

    In this paper the results of an experimental studies on nanosecond laser micromachining of selected materials are presented. Tested materials were thin plates made of aluminium, silicon, stainless steel (AISI 304) and copper. Micromachining of those materials was carried out using a solid state laser with second harmonic generation λ = 532 nm and a pulse width of τ = 45 ns. The effect of laser drilling using single laser pulse and a burst of laser pulses, as well as laser cutting was studied. The influence of laser fluence on the diameter and morphology of a post ablation holes drilled with a single laser pulse was investigated. The ablation fluence threshold (Fth) of tested materials was experimentally determined. Also the drilling rate (average depth per single laser pulse) of holes drilled with a burst of laser pulses was determined for all tested materials. The studies of laser cutting process revealed that a groove depth increases with increasing average laser power and decreasing cutting speed. It was also found that depth of the laser cut grooves is a linear function of number of repetition of a cut. The quantitative influence of those parameters on the groove depth was investigated.

  6. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

    2010-01-01

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  7. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  8. On-chip spin-controlled orbital angular momentum directional coupling

    Science.gov (United States)

    Xie, Zhenwei; Lei, Ting; Si, Guangyuan; Du, Luping; Lin, Jiao; Min, Changjun; Yuan, Xiaocong

    2018-01-01

    Optical vortex beams have many potential applications in the particle trapping, quantum encoding, optical orbital angular momentum (OAM) communications and interconnects. However, the on-chip compact OAM detection is still a big challenge. Based on a holographic configuration and a spin-dependent structure design, we propose and demonstrate an on-chip spin-controlled OAM-mode directional coupler, which can couple the OAM signal to different directions due to its topological charge. While the directional coupling function can be switched on/off by altering the spin of incident beam. Both simulation and experimental measurements verify the validity of the proposed approach. This work would benefit the on-chip OAM devices for optical communications and high dimensional quantum coding/decoding in the future.

  9. Blood cleaner on-chip design for artificial human kidney manipulation

    Science.gov (United States)

    Suwanpayak, N; Jalil, MA; Aziz, MS; Ismail, FD; Ali, J; Yupapin, PP

    2011-01-01

    A novel design of a blood cleaner on-chip using an optical waveguide known as a PANDA ring resonator is proposed. By controlling some suitable parameters, the optical vortices (gradient optical fields/wells) can be generated and used to form the trapping tools in the same way as optical tweezers. In operation, the trapping force is formed by the combination between the gradient field and scattering photons by using the intense optical vortices generated within the PANDA ring resonator. This can be used for blood waste trapping and moves dynamically within the blood cleaner on-chip system (artificial kidney), and is performed within the wavelength routers. Finally, the blood quality test is exploited by the external probe before sending to the destination. The advantage of the proposed kidney on-chip system is that the unwanted substances can be trapped and filtered from the artificial kidney, which can be available for blood cleaning applications. PMID:21720507

  10. Blood cleaner on-chip design for artificial human kidney manipulation.

    Science.gov (United States)

    Suwanpayak, N; Jalil, M A; Aziz, M S; Ismail, F D; Ali, J; Yupapin, P P

    2011-01-01

    A novel design of a blood cleaner on-chip using an optical waveguide known as a PANDA ring resonator is proposed. By controlling some suitable parameters, the optical vortices (gradient optical fields/wells) can be generated and used to form the trapping tools in the same way as optical tweezers. In operation, the trapping force is formed by the combination between the gradient field and scattering photons by using the intense optical vortices generated within the PANDA ring resonator. This can be used for blood waste trapping and moves dynamically within the blood cleaner on-chip system (artificial kidney), and is performed within the wavelength routers. Finally, the blood quality test is exploited by the external probe before sending to the destination. The advantage of the proposed kidney on-chip system is that the unwanted substances can be trapped and filtered from the artificial kidney, which can be available for blood cleaning applications.

  11. On-chip cell analysis platform: Implementation of contact fluorescence microscopy in microfluidic chips

    Science.gov (United States)

    Takehara, Hiroaki; Kazutaka, Osawa; Haruta, Makito; Noda, Toshihiko; Sasagawa, Kiyotaka; Tokuda, Takashi; Ohta, Jun

    2017-09-01

    Although fluorescence microscopy is the gold standard tool for biomedical research and clinical applications, their use beyond well-established laboratory infrastructures remains limited. The present study investigated a novel on-chip cell analysis platform based on contact fluorescence microscopy and microfluidics. Combined use of a contact fluorescence imager based on complementary metal-oxide semiconductor technology and an ultra-thin glass bottom microfluidic chip enabled both to observe living cells with minimal image distortion and to ease controlling and handling of biological samples (e.g. cells and biological molecules) in the imaged area. A proof-of-concept experiment of on-chip detection of cellular response to endothelial growth factor demonstrated promising use for the recently developed on-chip cell analysis platform. Contact fluorescence microscopy has numerous desirable features including compatibility with plastic microfluidic chips and compatibility with the electrical control system, and thus will fulfill the requirements of a fully automated cell analysis system.

  12. A Performance Analytical Strategy for Network-on-Chip Router with Input Buffer Architecture

    Directory of Open Access Journals (Sweden)

    WANG, J.

    2012-11-01

    Full Text Available In this paper, a performance analytical strategy is proposed for Network-on-Chip router with input buffer architecture. First, an analytical model is developed based on semi-Markov process. For the non-work-conserving router with small buffer size, the model can be used to analyze the schedule delay and the average service time for each buffer when given the related parameters. Then, the packet average delay in router is calculated by using the model. Finally, we validate the effectiveness of our strategy by simulation. By comparing our analytical results to simulation results, we show that our strategy successfully captures the Network-on-Chip router performance and it performs better than the state-of-art technology. Therefore, our strategy can be used as an efficiency performance analytical tool for Network-on-Chip design.

  13. Simulation-based Modeling Frameworks for Networked Multi-processor System-on-Chip

    DEFF Research Database (Denmark)

    Mahadevan, Shankar

    2006-01-01

    : namely ARTS and RIPE, that allows to model hardware (computation time, power consumption, network latency, caching effect, etc.) and software (application partition and mapping, operating system scheduling, interrupt handling, etc.) aspects from system-level to cycle-true abstraction. Thereby, we can......This thesis deals with modeling aspects of multi-processor system-on-chip (MpSoC) design affected by the on-chip interconnect, also called the Network-on-Chip (NoC), at various levels of abstraction. To begin with, we undertook a comprehensive survey of research and design practices of networked Mp...... realistically model the application executing on the architecture. This includes e.g. accurate modeling of synchronization, cache refills, context switching effects, so on, which are critically dependent on the architecture and the performance of the NoC. The foundation of the ARTS model is abstract tasks...

  14. On-chip optical phase locking of single growth monolithically integrated Slotted Fabry Perot lasers.

    Science.gov (United States)

    Morrissey, P E; Cotter, W; Goulding, D; Kelleher, B; Osborne, S; Yang, H; O'Callaghan, J; Roycroft, B; Corbett, B; Peters, F H

    2013-07-15

    This work investigates the optical phase locking performance of Slotted Fabry Perot (SFP) lasers and develops an integrated variable phase locked system on chip for the first time to our knowledge using these lasers. Stable phase locking is demonstrated between two SFP lasers coupled on chip via a variable gain waveguide section. The two lasers are biased differently, one just above the threshold current of the device with the other at three times this value. The coupling between the lasers can be controlled using the variable gain section which can act as a variable optical attenuator or amplifier depending on bias. Using this, the width of the stable phase locking region on chip is shown to be variable.

  15. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    Energy Technology Data Exchange (ETDEWEB)

    Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

    2006-04-15

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

  16. CMOS capacitive sensors for lab-on-chip applications a multidisciplinary approach

    CERN Document Server

    Ghafar-Zadeh, Ebrahim

    2010-01-01

    The main components of CMOS capacitive biosensors including sensing electrodes, bio-functionalized sensing layer, interface circuitries and microfluidic packaging are verbosely explained in chapters 2-6 after a brief introduction on CMOS based LoCs in Chapter 1. CMOS Capacitive Sensors for Lab-on-Chip Applications is written in a simple pedagogical way. It emphasises practical aspects of fully integrated CMOS biosensors rather than mathematical calculations and theoretical details. By using CMOS Capacitive Sensors for Lab-on-Chip Applications, the reader will have circuit design methodologies,

  17. An on-chip programmable instrumentation microsystem for gastrointestinal telemetry applications.

    Science.gov (United States)

    Wang, Lei; Hammond, Paul; Johannesson, Erik; Tang, Tong Boon; Astaras, Alexandros; Cumming, David R S; Beaumont, Steve P; Murray, Alan F; Cooper, Jonathan M

    2004-01-01

    We have developed an integrated circuit microsystem instrument using a design methodology akin to that for system-on-chip microelectronics. The microsystem is optimised for low-power gastrointestinal telemetry applications and includes mixed-signal sensor circuits, programmable digital system, a feedback clock control loop and RF circuits that were integrated on a 5 mm x 5 mm silicon chip using a 0.6 microm, 3 V CMOS process. Unintended signal coupling between circuit components has been investigated and current injection into sensitive instrumentation nodes has been minimised. Tests show that the wireless instrument-on-chip worked as intended.

  18. Avoiding Message-Dependent Deadlock in Network-Based Systems on Chip

    OpenAIRE

    Hansson, Andreas; Goossens, Kees; Rădulescu, Andrei

    2007-01-01

    Networks on chip (NoCs) are an essential component of systems on chip (SoCs) and much research is devoted to deadlock avoidance in NoCs. Prior work focuses on the router network while protocol interactions between NoC and intellectual property (IP) modules are not considered. These interactions introduce message dependencies that affect deadlock properties of the SoC as a whole. Even when NoC and IP dependency graphs are cycle-free in isolation, put together they may stil...

  19. ReNoC: A Network-on-Chip Architecture with Reconfigurable Topology

    DEFF Research Database (Denmark)

    Stensgaard, Mikkel Bystrup; Sparsø, Jens

    2008-01-01

    This paper presents a Network-on-Chip (NoC) architecture that enables the network topology to be reconfigured. The architecture thus enables a generalized System-on-Chip (SoC) platform in which the topology can be customized for the application that is currently running on the chip, including long...... on physical circuit switching as found in FPGAs. The paper presents the ReNoC (Reconfigurable NoC) architecture and evaluates its potential. The evaluation design shows a 56% decrease in power consumption compared to a static 2D mesh topology....

  20. Advanced Technology for Ultra-Low Power System-on-Chip (SoC)

    Science.gov (United States)

    2017-06-01

    AFRL-RY-WP-TR-2017-0115 ADVANCED TECHNOLOGY FOR ULTRA-LOW POWER SYSTEM-ON-CHIP (SoC) Jason Woo, Weicong Li, and Peng Lu University of California...Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law , no person...September 2015 – 31 March 2017 4. TITLE AND SUBTITLE ADVANCED TECHNOLOGY FOR ULTRA-LOW POWER SYSTEM-ON- CHIP (SoC) 5a. CONTRACT NUMBER FA8650-15-1-7574 5b

  1. Optical and Electric Multifunctional CMOS Image Sensors for On-Chip Biosensing Applications

    Directory of Open Access Journals (Sweden)

    Kiyotaka Sasagawa

    2010-12-01

    Full Text Available In this review, the concept, design, performance, and a functional demonstration of multifunctional complementary metal-oxide-semiconductor (CMOS image sensors dedicated to on-chip biosensing applications are described. We developed a sensor architecture that allows flexible configuration of a sensing pixel array consisting of optical and electric sensing pixels, and designed multifunctional CMOS image sensors that can sense light intensity and electric potential or apply a voltage to an on-chip measurement target. We describe the sensors’ architecture on the basis of the type of electric measurement or imaging functionalities.

  2. On-Chip SDM Switching for Unicast, Multicast and Traffic Grooming in Data Center Networks

    DEFF Research Database (Denmark)

    Kamchevska, Valerija; Ding, Yunhong; Dalgaard, Kjeld

    2017-01-01

    This paper reports on the use of a novel photonic integrated circuit that facilitates multicast and grooming in an optical data center architecture. The circuit allows for on-chip spatial multiplexing and demultiplexing as well as fiber core switching. Using this device, we experimentally verify...... that multicast and/or grooming can be successfully performed along the full range of output ports, for different group size and different power ratio. Moreover, we experimentally demonstrate SDM transmission and 5 Tbit/s switching using the on-chip fiber switch with integrated fan-in/fan-out devices and achieve...

  3. DESIGN AND PROTOTYPE OF RESOURCE NETWORK INTERFACES FOR NETWORK ON CHIP

    OpenAIRE

    Mahmood, Adnan; Mohammed, Zaheer Ahmed

    2009-01-01

    Network on Chip (NoC) has emerged as a competitive and efficient communication infrastructure for the core based design of System on Chip. Resource (core), router and interface between router and core are the three main parts of a NoC. Each core communicates with the network through the interface, also called Resource Network Interface (RNI). One approach to speed up the design at NoC based systems is to develop standardized RNI. Design of RNI depends to some extent on the type of routing tec...

  4. Embedded 3D Graphics Core for FPGA-based System-on-Chip Applications

    DEFF Research Database (Denmark)

    Holten-Lund, Hans Erik

    2005-01-01

    , and the video display which periodically reads from memory to display the final rendered graphics. The graphics core uses internal scratch-pad memory to reduce its external bandwidth requirement, this is achieved by implementing a tile-based rendering algorithm. Reduced external bandwidth means that the power...... such as a VRML viewer. The 3D graphics core is connected to a PLB 64-bit on-chip bus, and can render graphics into an on-chip tile buffer, which is later copied, using bus-master DMA transfers, to the frame-buffer in external DDR SDRAM memory. This memory is shared between the CPU, the 3D graphics core...

  5. Autonomic networking-on-chip bio-inspired specification, development, and verification

    CERN Document Server

    Cong-Vinh, Phan

    2011-01-01

    Despite the growing mainstream importance and unique advantages of autonomic networking-on-chip (ANoC) technology, Autonomic Networking-On-Chip: Bio-Inspired Specification, Development, and Verification is among the first books to evaluate research results on formalizing this emerging NoC paradigm, which was inspired by the human nervous system. The FIRST Book to Assess Research Results, Opportunities, & Trends in ""BioChipNets"" The third book in the Embedded Multi-Core Systems series from CRC Press, this is an advanced technical guide and reference composed of contributions from prominent re

  6. Standardized and modular microfluidic platform for fast lab on chip system development

    NARCIS (Netherlands)

    Dekker, Stefan; van den Berg, Albert; Odijk, Mathieu; Lee, Abraham; DeVoe, Don

    2017-01-01

    This paper reports a modular microfluidic system with standardized parts, enabling rapid prototyping of lab on chip systems. Herewith contributing to the technology transfer from academy to industry. The use of standardized parts also makes it possible to design a microfluidic systems in a top down

  7. A Network Traffic Generator Model for Fast Network-on-Chip Simulation

    DEFF Research Database (Denmark)

    Mahadevan, Shankar; Angiolini, Frederico; Storgaard, Michael

    2005-01-01

    For Systems-on-Chip (SoCs) development, a predominant part of the design time is the simulation time. Performance evaluation and design space exploration of such systems in bit- and cycle-true fashion is becoming prohibitive. We propose a traffic generation (TG) model that provides a fast...

  8. Technology for On-Chip Qubit Control with Microfabricated Surface Ion Traps

    Energy Technology Data Exchange (ETDEWEB)

    Highstrete, Clark [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Quantum Information Sciences Dept.; Scott, Sean Michael [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). RF/Optoelectronics Dept.; Nordquist, Christopher D. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). RF/Optoelectronics Dept.; Sterk, Jonathan David [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Photonic Microsystem Technologies Dept.; Maunz, Peter Lukas Wilhelm [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Photonic Microsystem Technologies Dept.; Tigges, Christopher P. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Photonic Microsystem Technologies Dept.; Blain, Matthew Glenn [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Photonic Microsystem Technologies Dept.; Heller, Edwin J. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Microsystems Integration Dept.; Stevens, James E. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). MESAFab Operations 2 Dept.

    2013-11-01

    Trapped atomic ions are a leading physical system for quantum information processing. However, scalability and operational fidelity remain limiting technical issues often associated with optical qubit control. One promising approach is to develop on-chip microwave electronic control of ion qubits based on the atomic hyperfine interaction. This project developed expertise and capabilities at Sandia toward on-chip electronic qubit control in a scalable architecture. The project developed a foundation of laboratory capabilities, including trapping the 171Yb+ hyperfine ion qubit and developing an experimental microwave coherent control capability. Additionally, the project investigated the integration of microwave device elements with surface ion traps utilizing Sandia’s state-of-the-art MEMS microfabrication processing. This effort culminated in a device design for a multi-purpose ion trap experimental platform for investigating on-chip microwave qubit control, laying the groundwork for further funded R&D to develop on-chip microwave qubit control in an architecture that is suitable to engineering development.

  9. Overview of status and challenges of system testing on chip with embedded DRAMS

    Science.gov (United States)

    Falter, T.; Richter, D.

    2000-05-01

    The combination of logic together with DRAM as a system on chip (SOC) has many advantages for a large variety of computing and network applications. The goal of testing a system is to detect the fabrication caused faults in order to guarantee the defined quality. The increasing size of memories, shrinking dimensions, higher demands on application (frequency and temperature range) and quality cause new problems and higher costs of testing. On the other hand the pressure to serve the market with low cost products forces the test engineer to reduce test costs by reducing test times and using low cost test equipment. Different solutions are discussed in this paper in order to meet these challenges. The variety of test approaches for testing SOC with embedded DRAMs reaches from testing with completely chip external test logic, a simple on-chip test logic up to a full blown built-in self test (BIST) on chip. Which choice is the right one depends on different criteria e.g. memory size, quality demands and application of the product. As an example the modular embedded DRAM core concept from Infineon Technologies is discussed, which includes a dedicated modular test concept based on on-chip integration of a test controller.

  10. A new 2D mesh routing approach for networks on chip Une nouvelle ...

    African Journals Online (AJOL)

    Traditionally, embedded systems and digital electronics technology were confined to computer systems. Today, embedded systems and systems on chip are applied in a wide range of areas such as television, communication systems, radar, military systems, medical instrumentation, and consumer electronics use digital ...

  11. DAEDALUS: System-Level Design Methodology for Streaming Multiprocessor Embedded Systems on Chips

    NARCIS (Netherlands)

    Stefanov, T.; Pimentel, A.; Nikolov, H.; Ha, S.; Teich, J.

    2017-01-01

    The complexity of modern embedded systems, which are increasingly based on heterogeneous multiprocessor system-on-chip (MPSoC) architectures, has led to the emergence of system-level design. To cope with this design complexity, system-level design aims at raising the abstraction level of the design

  12. MEMS-based wavelength and orbital angular momentum demultiplexer for on-chip applications

    DEFF Research Database (Denmark)

    Lyubopytov, Vladimir; Porfirev, Alexey P.; Gurbatov, Stanislav O.

    2017-01-01

    Summary form only given. We demonstrate a new tunable MEMS-based WDM&OAM Fabry-Pérot filter for simultaneous wavelength (WDM) and Orbital Angular Momentum (OAM) (de)multiplexing. The WDM&OAM filter is suitable for dense on-chip integration and dedicated for the next generation of optical...

  13. On-chip COMA cache-coherence protocol for microgrids of microthreaded cores

    NARCIS (Netherlands)

    Zhang, L.; Jesshope, C.

    2008-01-01

    This paper describes an on-chip COMA cache coherency protocol to support the microthread model of concurrent program composition. The model gives a sound basis for building multi-core computers as it captures concurrency, abstracts communication and identifies resources, such as processor groups

  14. An integrated fritless column for on-chip capillary electrochromatography with conventional stationary phases

    NARCIS (Netherlands)

    Ceriotti, Laura; De Rooij, Nico F.; Verpoorte, Elisabeth

    2002-01-01

    A new polymer device for use with conventional particulate stationary phases for on-chip, fritless, capillary electrochromatography (CEC) has been realized. The structure includes an injector and a tapered column in which the particles of the stationary phase are retained and stabilized. The chips

  15. On-chip measurement of the Brownian relaxation frequency of magnetic beads using magnetic tunneling junctions

    DEFF Research Database (Denmark)

    Donolato, M.; Sogne, E.; Dalslet, Bjarke Thomas

    2011-01-01

    We demonstrate the detection of the Brownian relaxation frequency of 250 nm diameter magnetic beads using a lab-on-chip platform based on current lines for exciting the beads with alternating magnetic fields and highly sensitive magnetic tunnel junction (MTJ) sensors with a superparamagnetic free...

  16. A low-cost 2D fluorescence detection system for mm sized beads on-chip

    NARCIS (Netherlands)

    Segerink, Loes Irene; Koster, Maarten J.; Sprenkels, A.J.; van den Berg, Albert

    2012-01-01

    In this paper we describe a compact fluorescence detection system for on-chip analysis of beads, comprising a low-cost optical HD-DVD pickup. The complete system consists of a fluorescence detection unit, a control unit and a microfluidic chip containing microchannels and optical markers. With these

  17. Versatile laser microfabrication techniques for lab-on-chip devices in ...

    Indian Academy of Sciences (India)

    2014-02-06

    Feb 6, 2014 ... The technology for the development of fully integrated lab-on-chip devices is still at a nascent stage considering the complexity of integration, the various effects of the micro domain that requires one to revisit one's intuitive perceptions of the physical world, and the multidisciplinary nature of the topic.

  18. An On-Chip interconnect and protocol stack for multiple communication paradigms and programming models

    NARCIS (Netherlands)

    Hansson, A.; Goossens, Kees

    2009-01-01

    A growing number of applications, with diverse requirements, are integrated on the same System on Chip (SoC) in the form of hardware and software Intellectual Property (IP). The diverse requirements, coupled with the IPs being developed by unrelated design teams, lead to multiple communication

  19. Low-Power, High-Speed Transceivers for Network-on-Chip Communication

    NARCIS (Netherlands)

    Schinkel, Daniel; Mensink, E.; Klumperink, Eric A.M.; van Tuijl, Adrianus Johannes Maria; Nauta, Bram

    Networks on chips (NoCs) are becoming popular as they provide a solution for the interconnection problems on large integrated circuits (ICs). But even in a NoC, link-power can become unacceptably high and data rates are limited when conventional data transceivers are used. In this paper, we present

  20. On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits.

    Science.gov (United States)

    Elshaari, Ali W; Zadeh, Iman Esmaeil; Fognini, Andreas; Reimer, Michael E; Dalacu, Dan; Poole, Philip J; Zwiller, Val; Jöns, Klaus D

    2017-08-30

    Quantum light plays a pivotal role in modern science and future photonic applications. Since the advent of integrated quantum nanophotonics different material platforms based on III-V nanostructures-, colour centers-, and nonlinear waveguides as on-chip light sources have been investigated. Each platform has unique advantages and limitations; however, all implementations face major challenges with filtering of individual quantum states, scalable integration, deterministic multiplexing of selected quantum emitters, and on-chip excitation suppression. Here we overcome all of these challenges with a hybrid and scalable approach, where single III-V quantum emitters are positioned and deterministically integrated in a complementary metal-oxide-semiconductor-compatible photonic circuit. We demonstrate reconfigurable on-chip single-photon filtering and wavelength division multiplexing with a foot print one million times smaller than similar table-top approaches, while offering excitation suppression of more than 95 dB and efficient routing of single photons over a bandwidth of 40 nm. Our work marks an important step to harvest quantum optical technologies' full potential.Combining different integration platforms on the same chip is currently one of the main challenges for quantum technologies. Here, Elshaari et al. show III-V Quantum Dots embedded in nanowires operating in a CMOS compatible circuit, with controlled on-chip filtering and tunable routing.

  1. A Metaheuristic Scheduler for Time Division Multiplexed Network-on-Chip

    DEFF Research Database (Denmark)

    Sørensen, Rasmus Bo; Sparsø, Jens; Pedersen, Mark Ruvald

    2014-01-01

    This paper presents a metaheuristic scheduler for inter-processor communication in multi-processor platforms using time division multiplexed (TDM) networks on chip (NOC). Compared to previous works, the scheduler handles a broader and more general class of platforms. Another contribution, which has...

  2. On-chip tunable long-period grating devices based on liquid crystal photonic bandgap fibers

    DEFF Research Database (Denmark)

    Wei, Lei; Weirich, Johannes; Alkeskjold, Thomas Tanggaard

    2009-01-01

    We design and fabricate an on-chip tunable long-period grating device by integrating a liquid crystal photonic bandgap fiber on silicon structures. The transmission axis of the device can be electrically rotated in steps of 45° as well as switched on and off with the response time...

  3. Waveguide filter-based on-chip differentiator for microwave photonic signal processing

    NARCIS (Netherlands)

    Taddei, Caterina; Nguyen, T.H.Yen; Zhuang, L.; Hoekman, M.; Leinse, Arne; Heideman, Rene; van Dijk, Paul; Roeloffzen, C.G.H.

    2013-01-01

    We propose and demonstrate a waveguide filterbased on-chip differentiator for microwave photonic signal processing. The system principle allows the operation of arbitrary-order differentiation. The realized device is constructed using the basic building blocks of photonic integrated circuits, and

  4. On-chip tunable long-period gratings in liquid crystal infiltrated photonic crystal fibers

    DEFF Research Database (Denmark)

    Wei, Lei; Weirich, Johannes; Alkeskjold, Thomas Tanggaard

    2009-01-01

    An on-chip tunable long-period grating device in a liquid crystal infiltrated photonic crystal fiber is experimentally demonstrated. The depth and position of the notch are tuned electrically and thermally. The transmission axis can be electrically controlled as well as switched on and off....

  5. An area-efficient network interface for a TDM-based Network-on-Chip

    DEFF Research Database (Denmark)

    Sparsø, Jens; Kasapaki, Evangelia; Schoeberl, Martin

    2013-01-01

    Network interfaces (NIs) are used in multi-core systems where they connect processors, memories, and other IP-cores to a packet switched Network-on-Chip (NOC). The functionality of a NI is to bridge between the read/write transaction interfaces used by the cores and the packet-streaming interface...

  6. Two-Dimensional Programmable Manipulation of Magnetic Nanoparticles on-Chip

    DEFF Research Database (Denmark)

    Sarella, Anandakumar; Torti, Andrea; Donolato, Marco

    2014-01-01

    A novel device is designed for on-chip selective trap and two-dimensional remote manipulation of single and multiple fluid-borne magnetic particles using field controlled magnetic domain walls in circular nanostructures. The combination of different ring-shaped nanostructures and field sequences ...

  7. Versatile laser microfabrication techniques for lab-on-chip devices in ...

    Indian Academy of Sciences (India)

    2014-02-06

    Feb 6, 2014 ... to fabricate microchips for lab-on-chip (LOC) applications in general and uranium analysis in water samples as a specific ... Point-of-care (POC) biomedical devices need to be fabricated using a cost. Pramana – J. ... the fabrication of microfluidic chips to be used in uranium detection in water samples. 2.

  8. Self-Powered Functional Device Using On-Chip Power Generation

    KAUST Repository

    Hussain, Muhammad Mustafa

    2012-01-26

    An apparatus, system, and method for a self-powered device using on-chip power generation. In some embodiments, the apparatus includes a substrate, a power generation module on the substrate, and a power storage module on the substrate. The power generation module may include a thermoelectric generator made of bismuth telluride.

  9. Integration of a Pulse Generator on Chip Into a Compact Ultrawideband Antenna

    NARCIS (Netherlands)

    Vorobyov, A.V.; Bagga, S.; Yarovoy, A.G.; Haddad, S.A.P.; Serdijn, W.A.; Long, J.R.; Irahhauten, Z.; Ligthart, L.P.

    For impulse radio ultrawideband communications an “antenna plus generator” system is co-designed and an on chip generator is integrated into the antenna. This approach does away with the need for intermediate transmission lines conventionally placed between an RF device/generator and an antenna and

  10. CoMPSoC: A Template for Composable and Predictable Multi-Processor System on Chips

    NARCIS (Netherlands)

    Hansson, A.; Goossens, Kees; Bekooij, Marco Jan Gerrit; Huisken, Jos

    2009-01-01

    A growing number of applications, often with firm or soft real-time requirements, are integrated on the same System on Chip, in the form of either hardware or software intellectual property. The applications are started and stopped at run time, creating different use-cases. Resources, such as

  11. Nanotechnology and the Developing World: Lab-on-Chip Technology for Health and Environmental Applications

    Science.gov (United States)

    Mehta, Michael D.

    2008-01-01

    This article argues that advances in nanotechnology in general, and lab-on-chip technology in particular, have the potential to benefit the developing world in its quest to control risks to human health and the environment. Based on the "risk society" thesis of Ulrich Beck, it is argued that the developed world must realign its science and…

  12. Simple and stable transendothelial electrical resistance measurement in organs-on-chips

    NARCIS (Netherlands)

    van der Helm, Marieke Willemijn; Odijk, Mathieu; Frimat, Jean-Philippe; Eijkel, Jan C.T.; van den Berg, Albert; Segerink, Loes Irene

    2015-01-01

    Measuring transendothelial electrical resistance (TEER) is a popular way to monitor cellular barrier tightness in organs-on-chips. However, in these devices integrated electrodes often block sight on the cells and the measured part often includes fluid-filled channels with variable resistance.

  13. Aelite: A Flit-Synchronous Network on Chip with Composable and Predictable Services.

    NARCIS (Netherlands)

    Hansson, A.; Subburaman, Mahesh; Goossens, Kees

    To accommodate the growing number of applications integrated on a single chip, Networks on Chip (NoC) must offer scalability not only on the architectural, but also on the physical and functional level. In addition, real-time applications require Guaranteed Services (GS), with latency and throughput

  14. An integrated lab-on-chip for rapid identification and simultaneous differentiation of tropical pathogens.

    Science.gov (United States)

    Tan, Jeslin J L; Capozzoli, Monica; Sato, Mitsuharu; Watthanaworawit, Wanitda; Ling, Clare L; Mauduit, Marjorie; Malleret, Benoît; Grüner, Anne-Charlotte; Tan, Rosemary; Nosten, François H; Snounou, Georges; Rénia, Laurent; Ng, Lisa F P

    2014-01-01

    Tropical pathogens often cause febrile illnesses in humans and are responsible for considerable morbidity and mortality. The similarities in clinical symptoms provoked by these pathogens make diagnosis difficult. Thus, early, rapid and accurate diagnosis will be crucial in patient management and in the control of these diseases. In this study, a microfluidic lab-on-chip integrating multiplex molecular amplification and DNA microarray hybridization was developed for simultaneous detection and species differentiation of 26 globally important tropical pathogens. The analytical performance of the lab-on-chip for each pathogen ranged from 102 to 103 DNA or RNA copies. Assay performance was further verified with human whole blood spiked with Plasmodium falciparum and Chikungunya virus that yielded a range of detection from 200 to 4×105 parasites, and from 250 to 4×107 PFU respectively. This lab-on-chip was subsequently assessed and evaluated using 170 retrospective patient specimens in Singapore and Thailand. The lab-on-chip had a detection sensitivity of 83.1% and a specificity of 100% for P. falciparum; a sensitivity of 91.3% and a specificity of 99.3% for P. vivax; a positive 90.0% agreement and a specificity of 100% for Chikungunya virus; and a positive 85.0% agreement and a specificity of 100% for Dengue virus serotype 3 with reference methods conducted on the samples. Results suggested the practicality of an amplification microarray-based approach in a field setting for high-throughput detection and identification of tropical pathogens.

  15. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    Polosky, M.A.; Garcia, E.J.; Allen, J.J.

    1998-01-01

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  16. Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy

    Science.gov (United States)

    Merrell, Willie C., II; Aslam, Shahid; Brown, Ari D.; Chervenak, James A.; Huang, Wei-Chung; Quijada, Manuel; Wollack, Edward

    2011-01-01

    The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.

  17. Characterization of bulk-micromachined direct-bonded silicon nanofilters

    Science.gov (United States)

    Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

    1998-03-01

    The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

  18. Performance Enhancement of the Patch Antennas Applying Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Mohamed N. Azermanesh

    2007-09-01

    Full Text Available This paper reports on the application of micromachining technology for performance enhancement of two types of compact antennas which are becoming a common practice in microsystems. Shorted patch antennas (SPA and folded shorted patch antennas operating in the 5-6 GHz ISM band, with intended application in short-range wireless communications, are considered. The electrical length of antennas are modified by etching the substrate of the antennas, thus providing a new degree of freedom to control the antenna operating properties, which is the main novelty of our work. The gain and bandwidth of the antennas are increased by increasing the etching depth. However, etching the substrate affects the operating frequency as well. To keep the operating frequency at a pre-specified value, the dimension of the antennas must be increased by deepening the etching depth. Therefore, a trade off between the performance enhancement of the antennas and the dimensional enlargement is required.

  19. Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

    International Nuclear Information System (INIS)

    Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

    2014-01-01

    Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

  20. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  1. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    Science.gov (United States)

    Khuri-Yakub, Butrus T.; Oralkan, Ömer

    2011-05-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications.

  2. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    International Nuclear Information System (INIS)

    Khuri-Yakub, Butrus T; Oralkan, Ömer

    2011-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

  3. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  4. Compact Micromachined Bandpass Filters for Infrared Planetary Spectroscopy

    Science.gov (United States)

    Brown, Ari D.; Aslam, Shahid; Chervenak, James A.; Huang, Wei-Chung; Merrell, Willie; Quijada, Manuel

    2011-01-01

    The thermal instrument strawman payload of the Jupiter Europa Orbiter on the Europa Jupiter Science Mission will map out thermal anomalies, the structure, and atmospheric conditions of Europa and Jupiter within the 7-100 micron spectral range. One key requirement for the payload is that the mass cannot exceed 3.7 kg. Consequently, a new generation of light-weight miniaturized spectrometers needs to be developed. On the path toward developing these spectrometers is development of ancillary miniaturized spectroscopic components. In this paper, we present a strategy for making radiation hard and low mass FIR band pass metal mesh filters. Our strategy involves using MEMS-based fabrication techniques, which will permit the quasi-optical filter structures to be made with micron-scale precision. This will enable us to achieve tight control over both the pass band of the filter and the micromachined silicon support structure architecture, which will facilitate integration of the filters for a variety of applications.

  5. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...... structures, or simple etching of grooves for precision positioning of optical fibers. ©1995 American Institute of Physics....

  6. Q-Switched Nd: YAG Laser Micro-Machining System

    International Nuclear Information System (INIS)

    Messaoud, S.; Allam, A.; Siserir, F.; Bouceta, Y.; Kerdja, T.; Ouadjaout, D.

    2008-01-01

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  7. Micromachined hot-wire thermal conductivity probe for biomedical applications.

    Science.gov (United States)

    Yi, Ming; Panchawagh, Hrishikesh V; Podhajsky, Ronald J; Mahajan, Roop L

    2009-10-01

    This paper presents the design, fabrication, numerical simulation, and experimental validation of a micromachined probe that measures thermal conductivity of biological tissues. The probe consists of a pair of resistive line heating elements and resistance temperature detector sensors, which were fabricated by using planar photolithography on a glass substrate. The numerical analysis revealed that the thermal conductivity and diffusivity can be determined by the temperature response induced by the uniform heat flux in the heating elements. After calibrating the probe using a material (agar gel) of known thermal conductivity, the probe was deployed to calculate the thermal conductivity of Crisco. The measured value is in agreement with that determined by the macro-hot-wire probe method to within 3%. Finally, the micro thermal probe was used to investigate the change of thermal conductivity of pig liver before and after RF ablation treatment. The results show an increase in thermal conductivity of liver after the RF ablation.

  8. Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor

    National Research Council Canada - National Science Library

    Sheplak, Mark; Chandrasekaran, Venkataraman; Cain, Anthony; Nishida, Toshikazu; Cattafesta, Louis N

    2002-01-01

    A detailed characterization is presented of a silicon-micromachined thermal shear-stress sensor employing a thin-film platinum-sensing element on top of a silicon-nitride membrane that is stretched over a vacuum cavity...

  9. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  10. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.; Rodgers, M.S.

    1998-05-01

    An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

  11. A power efficient 2Gb/s transceiver in 90nm CMOS for 10mm On-Chip interconnect

    NARCIS (Netherlands)

    Mensink, E.; Schinkel, Daniel; Klumperink, Eric A.M.; van Tuijl, Adrianus Johannes Maria; Nauta, Bram

    2007-01-01

    Abstract—Global on-chip data communication is becoming a concern as the gap between transistor speed and interconnect bandwidth increases with CMOS process scaling. In this paper a low-swing transceiver for 10mm long 0.54μm wide on-chip interconnect is presented, which achieves a similar data rate

  12. Organs-on-Chips in Drug Development: The Importance of Involving Stakeholders in Early Health Technology Assessment

    NARCIS (Netherlands)

    Middelkamp, Heleen H.T.; van der Meer, Andries Dirk; Hummel, J. Marjan; Stamatialis, Dimitrios; Mummery, Christine Lindsay; Passier, Petrus Christianus Johannes Josephus; IJzerman, Maarten Joost

    2016-01-01

    Organs-on-chips are three-dimensional, microfluidic cell culture systems that simulate the function of tissues and organ subunits. Organ-on-chip systems are expected to contribute to drug candidate screening and the reduction of animal tests in preclinical drug development and may increase

  13. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  14. An integrated CMOS quantitative-polymerase-chain-reaction lab-on-chip for point-of-care diagnostics.

    Science.gov (United States)

    Norian, Haig; Field, Ryan M; Kymissis, Ioannis; Shepard, Kenneth L

    2014-10-21

    Considerable effort has recently been directed toward the miniaturization of quantitative-polymerase-chain-reaction (qPCR) instrumentation in an effort to reduce both cost and form factor for point-of-care applications. Considerable gains have been made in shrinking the required volumes of PCR reagents, but resultant prototypes retain their bench-top form factor either due to heavy heating plates or cumbersome optical sensing instrumentation. In this paper, we describe the use of complementary-metal-oxide semiconductor (CMOS) integrated circuit (IC) technology to produce a fully integrated qPCR lab-on-chip. Exploiting a 0.35 μm high-voltage CMOS process, the IC contains all of the key components for performing qPCR. Integrated resistive heaters and temperature sensors regulate the surface temperature of the chip to an accuracy of 0.45 °C. Electrowetting-on-dielectric microfluidics are actively driven from the chip surface, allowing for droplet generation and transport down to volumes less than 1.2 nanoliter. Integrated single-photon avalanche diodes (SPADs) are used for fluorescent monitoring of the reaction, allowing for the quantification of target DNA with more than four-orders-of-magnitude of dynamic range and sensitivities down to a single copy per droplet. Using this device, reliable and sensitive real-time proof-of-concept detection of Staphylococcus aureus (S. aureus) is demonstrated.

  15. On-chip beamsplitter operation on single photons from quasi-resonantly excited quantum dots embedded in GaAs rib waveguides

    Energy Technology Data Exchange (ETDEWEB)

    Rengstl, U.; Schwartz, M.; Herzog, T.; Hargart, F.; Paul, M.; Portalupi, S. L.; Jetter, M.; Michler, P., E-mail: p.michler@ihfg.uni-stuttgart.de [Institut für Halbleiteroptik und Funktionelle Grenzflächen and Research Center SCoPE, University of Stuttgart, Allmandring 3, 70569 Stuttgart (Germany)

    2015-07-13

    We present an on-chip beamsplitter operating on a single-photon level by means of a quasi-resonantly driven InGaAs/GaAs quantum dot. The single photons are guided by rib waveguides and split into two arms by an evanescent field coupler. Although the waveguides themselves support the fundamental TE and TM modes, the measured degree of polarization (∼90%) reveals the main excitation and propagation of the TE mode. We observe the preserved single-photon nature of a quasi-resonantly excited quantum dot by performing a cross-correlation measurement on the two output arms of the beamsplitter. Additionally, the same quantum dot is investigated under resonant excitation, where the same splitting ratio is observed. An autocorrelation measurement with an off-chip beamsplitter on a single output arm reveal the single-photon nature after evanescent coupling inside the on-chip splitter. Due to their robustness, adjustable splitting ratio, and their easy implementation, rib waveguide beamsplitters with embedded quantum dots provide a promising step towards fully integrated quantum circuits.

  16. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of microfactory technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    The goal is to save energy and minimize the working space by constructing a manufacturing system comprising various micromachines with their dimensions fit for parts and products they handle. Development continues relative to microprocessing (electrolysis, and optical processing) and microscopic liquid operation (micropump, and part holding device). Under research in relation to the assembly process are a micro-arm to handle tiny parts and precision techniques for interfitting within a very small microfactory, a piezoelectric actuator for microscopic position adjusting, and ultraprecise microprocessing techniques indispensable for their manufacture. Also under research are the incorporation of optically driven microdevices developed before the preceding fiscal year into a microfactory and the study of microservo actuators capable of sophisticated positioning and velocity control. Concerning the microscopic transport system to deal with microscopic parts and products, studies are under way so as to embody systems driven by actuators of the electromagnetic type and electrostatic type. In this paper, reference is made to inspection techniques and comprehensive investigations. (NEDO)

  17. Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

    Science.gov (United States)

    Feng, Guo-Hua; Liu, Kim-Min

    2014-05-12

    This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

  18. Preservation of Cell Structure, Metabolism, and Biotransformation Activity of Liver-On-Chip Organ Models by Hypothermic Storage.

    Science.gov (United States)

    Gröger, Marko; Dinger, Julia; Kiehntopf, Michael; Peters, Frank T; Rauen, Ursula; Mosig, Alexander S

    2018-01-01

    The liver is a central organ in the metabolization of nutrition, endogenous and exogenous substances, and xenobiotic drugs. The emerging organ-on-chip technology has paved the way to model essential liver functions as well as certain aspects of liver disease in vitro in liver-on-chip models. However, a broader use of this technology in biomedical research is limited by a lack of protocols that enable the short-term preservation of preassembled liver-on-chip models for stocking or delivery to researchers outside the bioengineering community. For the first time, this study tested the ability of hypothermic storage of liver-on-chip models to preserve cell viability, tissue morphology, metabolism and biotransformation activity. In a systematic study with different preservation solutions, liver-on-chip function can be preserved for up to 2 d using a derivative of the tissue preservation solution TiProtec, containing high chloride ion concentrations and the iron chelators LK614 and deferoxamine, supplemented with polyethylene glycol (PEG). Hypothermic storage in this solution represents a promising method to preserve liver-on-chip function for at least 2 d and allows an easier access to liver-on-chip technology and its versatile and flexible use in biomedical research. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  19. On-chip microlasers for biomolecular detection via highly localized deposition of a multifunctional phospholipid ink.

    Science.gov (United States)

    Bog, Uwe; Laue, Thomas; Grossmann, Tobias; Beck, Torsten; Wienhold, Tobias; Richter, Benjamin; Hirtz, Michael; Fuchs, Harald; Kalt, Heinz; Mappes, Timo

    2013-07-21

    We report on a novel approach to realize on-chip microlasers, by applying highly localized and material-saving surface functionalization of passive photonic whispering gallery mode microresonators. We apply dip-pen nanolithography on a true three-dimensional structure. We coat solely the light-guiding circumference of pre-fabricated poly(methyl methacrylate) resonators with a multifunctional molecular ink. The functionalization is performed in one single fabrication step and simultaneously provides optical gain as well as molecular binding selectivity. This allows for a direct and flexible realization of on-chip microlasers, which can be utilized as biosensors in optofluidic lab-on-a-chip applications. In a proof-of-concept we show how this highly localized molecule deposition suffices for low-threshold lasing in air and water, and demonstrate the capability of the ink-lasers as biosensors in a biotin-streptavidin binding experiment.

  20. High frequency acoustic on-chip integration for particle characterization and manipulation in microfluidics

    Science.gov (United States)

    Li, Sizhe; Carlier, Julien; Toubal, Malika; Liu, Huiqin; Campistron, Pierre; Callens, Dorothée; Nassar, Georges; Nongaillard, Bertrand; Guo, Shishang

    2017-10-01

    This letter presents a microfluidic device that integrates high frequency (650 MHz) bulk acoustic waves for the realization of particle handling on-chip. The core structure of the microfluidic chip is made up of a confocal lens, a vertical reflection wall, and a ZnO film transducer coupled with a silicon substrate for exciting acoustic beams. The excited acoustic waves propagate in bulk silicon and are then guided by a 45° silicon mirror into the suspensions in the microchannel; afterwards, the acoustic energy is focused on particles by the confocal lens and reflected by a reflection wall. Parts of the reflected acoustic energy backtrack into the transducer, and acoustic attenuation measurements are characterized for particle detection. Meanwhile, a strong acoustic streaming phenomenon can be seen around the reflection wall, which is used to implement particle manipulation. This platform opens a frontier for on-chip integration of high sensitivity acoustic characterization and localized acoustic manipulation in microfluidics.

  1. Widely Tunable On-Chip Microwave Circulator for Superconducting Quantum Circuits

    Directory of Open Access Journals (Sweden)

    Benjamin J. Chapman

    2017-11-01

    Full Text Available We report on the design and performance of an on-chip microwave circulator with a widely (GHz tunable operation frequency. Nonreciprocity is created with a combination of frequency conversion and delay, and requires neither permanent magnets nor microwave bias tones, allowing on-chip integration with other superconducting circuits without the need for high-bandwidth control lines. Isolation in the device exceeds 20 dB over a bandwidth of tens of MHz, and its insertion loss is small, reaching as low as 0.9 dB at select operation frequencies. Furthermore, the device is linear with respect to input power for signal powers up to hundreds of fW (≈10^{3} circulating photons, and the direction of circulation can be dynamically reconfigured. We demonstrate its operation at a selection of frequencies between 4 and 6 GHz.

  2. Core-shell magnetic nanoparticles for on-chip RF inductors

    KAUST Repository

    Koh, Kisik

    2013-01-01

    FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.

  3. Soft error evaluation and vulnerability analysis in Xilinx Zynq-7010 system-on chip

    Energy Technology Data Exchange (ETDEWEB)

    Du, Xuecheng; He, Chaohui; Liu, Shuhuan, E-mail: liushuhuan@mail.xjtu.edu.cn; Zhang, Yao; Li, Yonghong; Xiong, Ceng; Tan, Pengkang

    2016-09-21

    Radiation-induced soft errors are an increasingly important threat to the reliability of modern electronic systems. In order to evaluate system-on chip's reliability and soft error, the fault tree analysis method was used in this work. The system fault tree was constructed based on Xilinx Zynq-7010 All Programmable SoC. Moreover, the soft error rates of different components in Zynq-7010 SoC were tested by americium-241 alpha radiation source. Furthermore, some parameters that used to evaluate the system's reliability and safety were calculated using Isograph Reliability Workbench 11.0, such as failure rate, unavailability and mean time to failure (MTTF). According to fault tree analysis for system-on chip, the critical blocks and system reliability were evaluated through the qualitative and quantitative analysis.

  4. Debugging systems-on-chip communication-centric and abstraction-based techniques

    CERN Document Server

    Vermeulen, Bart

    2014-01-01

    This book describes an approach and supporting infrastructure to facilitate debugging the silicon implementation of a System-on-Chip (SOC), allowing its associated product to be introduced into the market more quickly.  Readers learn step-by-step the key requirements for debugging a modern, silicon SOC implementation, nine factors that complicate this debugging task, and a new debug approach that addresses these requirements and complicating factors.  The authors’ novel communication-centric, scan-based, abstraction-based, run/stop-based (CSAR) debug approach is discussed in detail, showing how it helps to meet debug requirements and address the nine, previously identified factors that complicate debugging silicon implementations of SOCs. The authors also derive the debug infrastructure requirements to support debugging of a silicon implementation of an SOC with their CSAR debug approach. This debug infrastructure consists of a generic on-chip debug architecture, a configurable automated design-for-debug ...

  5. Modeling, analysis and optimization of network-on-chip communication architectures

    CERN Document Server

    Ogras, Umit Y

    2013-01-01

    Traditionally, design space exploration for Systems-on-Chip (SoCs) has focused on the computational aspects of the problem at hand. However, as the number of components on a single chip and their performance continue to increase, the communication architecture plays a major role in the area, performance and energy consumption of the overall system. As a result, a shift from computation-based to communication-based design becomes mandatory. Towards this end, network-on-chip (NoC) communication architectures have emerged recently as a promising alternative to classical bus and point-to-point communication architectures. This book explores outstanding research problems related to modeling, analysis and optimization of NoC communication architectures. More precisely, we present novel design methodologies, software tools and FPGA prototypes to aid the design of application-specific NoCs.

  6. On-chip high-voltage generator design design methodology for charge pumps

    CERN Document Server

    Tanzawa, Toru

    2016-01-01

    This book provides various design techniques for switched-capacitor on-chip high-voltage generators, including charge pump circuits, regulators, level shifters, references, and oscillators.  Readers will see these techniques applied to system design in order to address the challenge of how the on-chip high-voltage generator is designed for Flash memories, LCD drivers, and other semiconductor devices to optimize the entire circuit area and power efficiency with a low voltage supply, while minimizing the cost.  This new edition includes a variety of useful updates, including coverage of power efficiency and comprehensive optimization methodologies for DC-DC voltage multipliers, modeling of extremely low voltage Dickson charge pumps, and modeling and optimum design of AC-DC switched-capacitor multipliers for energy harvesting and power transfer for RFID.

  7. System-Level Design Methodologies for Networked Multiprocessor Systems-on-Chip

    DEFF Research Database (Denmark)

    Virk, Kashif Munir

    2008-01-01

    is the first such attempt in the published literature. The second part of the thesis deals with the issues related to the development of system-level design methodologies for networked multiprocessor systems-on-chip at various levels of design abstraction with special focus on the modeling and design...... at the system-level. The multiprocessor modeling framework is then extended to include models of networked multiprocessor systems-on-chip which is then employed to model wireless sensor networks both at the sensor node level as well as the wireless network level. In the third and the final part, the thesis...... to the transaction-level model. The thesis, as a whole makes contributions by describing a design methodology for networked multiprocessor embedded systems at three layers of abstraction from system-level through transaction-level to the cycle accurate level as well as demonstrating it practically by implementing...

  8. On-chip electrochromic micro display for a disposable bio-sensor chip

    Science.gov (United States)

    Zhu, Yanjun; Tsukamoto, Takashiro; Tanaka, Shuji

    2017-12-01

    This paper reports an on-chip electrochromic micro display made of polyaniline (PANi) which can be easily made on a CMOS chip. Micro-patterned PANi thin films were selectively deposited on pre-patterned microelectrodes by using electrodeposition. The optimum conditions for deposition and electrochromism were investigated. An 8-pixel on-chip micro display was made on a Si chip. The color of each PANi film could be independently but simultaneously controlled, which means any 1-byte digital data could be displayed on the display. The PANi display had a response time as fast as about 100 ms, which means the transfer data rate was as fast as 80 bits per second.

  9. A survey of research and practices of network-on-chip

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Mahadevan, Shankar

    2006-01-01

    . This survey presents a perspective on existing NoC research. We define the following abstractions: system, network adapter, network, and link to explain and structure the fundamental concepts. First, research relating to the actual network design is reviewed. Then system level design and modeling......The scaling of microchip technologies has enabled large scale systems-on-chip (SoC). Network-on-chip (NoC) research addresses global communication in SoC, involving (i) a move from computation-centric to communication-centric design and (ii) the implementation of scalable communication structures...... are discussed. We also evaluate performance analysis techniques. The research shows that NoC constitutes a unification of current trends of intrachip communication rather than an explicit new alternative....

  10. ASIC design of a digital fuzzy system on chip for medical diagnostic applications.

    Science.gov (United States)

    Roy Chowdhury, Shubhajit; Roy, Aniruddha; Saha, Hiranmay

    2011-04-01

    The paper presents the ASIC design of a digital fuzzy logic circuit for medical diagnostic applications. The system on chip under consideration uses fuzzifier, memory and defuzzifier for fuzzifying the patient data, storing the membership function values and defuzzifying the membership function values to get the output decision. The proposed circuit uses triangular trapezoidal membership functions for fuzzification patients' data. For minimizing the transistor count, the proposed circuit uses 3T XOR gates and 8T adders for its design. The entire work has been carried out using TSMC 0.35 µm CMOS process. Post layout TSPICE simulation of the whole circuit indicates a delay of 31.27 ns and the average power dissipation of the system on chip is 123.49 mW which indicates a less delay and less power dissipation than the comparable embedded systems reported earlier.

  11. On-chip signal amplification of magnetic bead-based immunoassay by aviating magnetic bead chains.

    Science.gov (United States)

    Jalal, Uddin M; Jin, Gyeong Jun; Eom, Kyu Shik; Kim, Min Ho; Shim, Joon S

    2017-11-06

    In this work, a Lab-on-a-Chip (LOC) platform is used to electromagnetically actuate magnetic bead chains for an enhanced immunoassay. Custom-made electromagnets generate a magnetic field to form, rotate, lift and lower the magnetic bead chains (MBCs). The cost-effective, disposable LOC platform was made with a polymer substrate and an on-chip electrochemical sensor patterned via the screen-printing process. The movement of the MBCs is controlled to improve the electrochemical signal up to 230% when detecting beta-type human chorionic gonadotropin (β-hCG). Thus, the proposed on-chip MBC-based immunoassay is applicable for rapid, qualitative electrochemical point-of-care (POC) analysis. Copyright © 2017 Elsevier B.V. All rights reserved.

  12. Lab-on-chip for liquid biopsy (LoC-LB) based on dielectrophoresis.

    Science.gov (United States)

    Mathew, Bobby; Alazzam, Anas; Khashan, Saud; Abutayeh, Mohammad

    2017-03-01

    This short communication presents the proof-of-concept of a novel dielectrophoretic lab-on-chip for identifying/separating circulating tumor cells for purposes of liquid biopsy. The device consists of a polydimethylsiloxane layer, containing a microchannel, bonded on a glass substrate that holds two sets of planar interdigitated transducer electrodes. The lab-on-chip is operated at a frequency that enables dielectrophoretic force to sort cells, based on type, along the lateral direction. The operating frequency ensures attraction force toward the electrodes on cancer cells and repulsion force toward the center of the microchannel on other cells. Initial tests for demonstrating proof-of-concept have successfully identified/separated green fluorescent protein-labelled MDA-MB-231 breast cancer cells from a mixture of the same and regular blood cells suspended in low conductivity sucrose/dextrose medium. Copyright © 2016 Elsevier B.V. All rights reserved.

  13. On-chip nanofluidic integration of acoustic sensors towards high Q in liquid

    Science.gov (United States)

    Liang, Ji; Liu, Zifeng; Zhang, Hongxiang; Liu, Bohua; Zhang, Menglun; Zhang, Hao; Pang, Wei

    2017-11-01

    This paper reports an on-chip acoustic sensor comprising a piston-mode film bulk acoustic resonator and a monolithically integrated nanochannel. The resonator with the channel exhibits a resonance frequency (f) of 2.5 GHz and a quality (Q) factor of 436 in deionized water. The f × Q product is as high as 1.1 × 1012, which is the highest among all the acoustic wave sensors in the liquid phase. The sensor consumes 2 pl liquid volume and thus greatly saves the precious assays in biomedical testing. The Q factor is investigated, and real-time viscosity tests of glucose solution are demonstrated. The highly miniaturized and integrated sensor is capable to be arrayed with readout-circuitry, which opens an avenue for portable applications and lab-on-chip systems.

  14. Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

  15. Silicon photonics: Design, fabrication, and characterization of on-chip optical interconnects

    Science.gov (United States)

    Hsieh, I.-Wei

    In recent years, the research field of silicon photonics has been developing rapidly from a concept to a demonstrated technology, and has gathered much attention from both academia and industry communities. Its many potential applications in long-haul telecommunication, mid-range data-communication, on-chip optical interconnection networks, and nano-scale sensing as well as its compatibility with electronic integrated circuits have driven much effort in realizing silicon photonics both as a disruptive technology for existing markets and as an enabling technology for new ones. Despite the promising future of silicon photonics, many fundamental issues still remain to be understood---both in the linear- and nonlinear-optical regimes. There are also many engineering challenges to make silicon photonics the gold standard in photonic integrated circuits. In this thesis, we focus on the design, fabrication, and characterization of active and passive silicon-on-insulator (SOI) photonic devices. The SOI material system differs from most conventional optical material platforms because of its high-refractive-index-contrast, which enables engineers to design very compact integrated photonic networks with sub-micron transverse waveguide dimensions and sharp bends. On the other hand, because most analytical formulas for designing waveguide devices are valid only in low-index-contrast cases, SOI photonic devices need to be analyzed numerically for accurate results. The second chapter of this thesis describes some common numerical methods such as Beam Propagation Method (BPM) and Finite Element Method (FEM) for waveguide-design simulations, and presents two design studies based on these methods. The compatibility of silicon photonic integrated circuits with conventional CMOS fabrication technology is another important aspect that distinguishes silicon photonics from others such as III-V materials and lithium niobate. However, the requirements for fabricating silicon photonic

  16. Integrated Magneto-Optical Devices for On-Chip Photonic Systems

    Science.gov (United States)

    2017-09-01

    AFRL-RY-WP-TR-2017-0164 INTEGRATED MAGNETO-OPTICAL DEVICES FOR ON-CHIP PHOTONIC SYSTEMS Caroline Ross and Juejun Hu Massachusetts Institute of...Technology SEPTEMBER 2017 Final Report Approved for public release; distribution is unlimited. See additional restrictions described on inside pages STINFO...any patented invention that may relate to them. This report is the result of contracted fundamental research deemed exempt from public affairs

  17. On-Chip Manipulation of Protein-Coated Magnetic Beads via Domain-Wall Conduits

    DEFF Research Database (Denmark)

    Donolato, Marco; Vavassori, Paolo; Gobbi, Marco

    2010-01-01

    Geometrically constrained magnetic domain walls (DWs) in magnetic nanowires can be manipulated at the nanometer scale. The inhomogeneous magnetic stray field generated by a DW can capture a magnetic nanoparticle in solution. On-chip nanomanipulation of individual magnetic beads coated with proteins...... is demonstrated through the motion of geometrically constrained DWs in specially designed magnetic nanoconduits fully integrated in a lab-on-a-chip platform....

  18. Slow-light enhanced sensing with an on-chip Fano system (Conference Presentation)

    Science.gov (United States)

    Bera, Arijit; Kuittinen, Markku; Honkanen, Seppo; Roussey, Matthieu

    2017-02-01

    Integrated silicon photonics promises efficient on-chip solutions for chemical and bio-molecule sensing for faster and reliable disease diagnostics. By integrating a sensor with a light source and a detector, a compact lab-on-chip sensing device is possible to realize. To increase the sensing efficiency, slot waveguide geometry is preferable due to the high confinement of the mode within the cover material. When two different light-paths in a structure interfere with each other, causing the superposition of a Lorenzian response with the background radiation continuum, a Fano lineshape occurs. This sharp resonance leads to a superior refractive index sensing capability. To develop a compact on-chip Fano-resonant platform for chemical sensing, we used a merged photonic crystal - slot waveguide (MPCSW) structure as the basic building block. It contains slot waveguides merged with Bragg gratings, formed by periodic patterning of the rails. A defect between the two Bragg grating sections forms a resonant cavity. In addition to the enhancement due to the confinement of light in the slot waveguide, the highly dispersive nature of the Bragg grating leads to slow light effect at the resonance. Three MPCSW structures are parallel-coupled to form an on-chip Fano system. By changing the refractive index of the cover material, we found a sensitivity as high as 775 nm/RIU. Moreover, the group index at the resonance of our Fano system is as high as ng = 500, due to the effect of slow light. We obtain vast increase in the refractive index sensitivity of the device.

  19. An integrated lab-on-chip for rapid identification and simultaneous differentiation of tropical pathogens.

    Directory of Open Access Journals (Sweden)

    Jeslin J L Tan

    Full Text Available Tropical pathogens often cause febrile illnesses in humans and are responsible for considerable morbidity and mortality. The similarities in clinical symptoms provoked by these pathogens make diagnosis difficult. Thus, early, rapid and accurate diagnosis will be crucial in patient management and in the control of these diseases. In this study, a microfluidic lab-on-chip integrating multiplex molecular amplification and DNA microarray hybridization was developed for simultaneous detection and species differentiation of 26 globally important tropical pathogens. The analytical performance of the lab-on-chip for each pathogen ranged from 102 to 103 DNA or RNA copies. Assay performance was further verified with human whole blood spiked with Plasmodium falciparum and Chikungunya virus that yielded a range of detection from 200 to 4×105 parasites, and from 250 to 4×107 PFU respectively. This lab-on-chip was subsequently assessed and evaluated using 170 retrospective patient specimens in Singapore and Thailand. The lab-on-chip had a detection sensitivity of 83.1% and a specificity of 100% for P. falciparum; a sensitivity of 91.3% and a specificity of 99.3% for P. vivax; a positive 90.0% agreement and a specificity of 100% for Chikungunya virus; and a positive 85.0% agreement and a specificity of 100% for Dengue virus serotype 3 with reference methods conducted on the samples. Results suggested the practicality of an amplification microarray-based approach in a field setting for high-throughput detection and identification of tropical pathogens.

  20. Active 2D materials for on-chip nanophotonics and quantum optics

    Energy Technology Data Exchange (ETDEWEB)

    Shiue, Ren-Jye; Efetov, Dmitri K.; Grosso, Gabriele; Peng, Cheng; Fong, Kin Chung; Englund, Dirk

    2017-01-01

    Abstract

    Two-dimensional materials have emerged as promising candidates to augment existing optical networks for metrology, sensing, and telecommunication, both in the classical and quantum mechanical regimes. Here, we review the development of several on-chip photonic components ranging from electro-optic modulators, photodetectors, bolometers, and light sources that are essential building blocks for a fully integrated nanophotonic and quantum photonic circuit.

  1. Automated fabrication of photopatterned gelatin hydrogels for organ-on-chips applications.

    Science.gov (United States)

    Nawroth, Janna C; Scudder, Lisa L; Halvorson, Ryan T; Tresback, Jason; Ferrier, John P; Sheehy, Sean P; Cho, Alex; Kannan, Suraj; Sunyovszki, Ilona; Goss, Josue A; Campbell, Patrick H; Parker, Kevin Kit

    2018-01-16

    Organ-on-chip platforms aim to improve preclinical models for organ-level responses to novel drug compounds. Heart-on-a-chip assays in particular require tissue engineering techniques that rely on labor-intensive photolithographic fabrication or resolution-limited 3D printing of micropatterned substrates, which limits turnover and flexibility of prototyping. We present a rapid and automated method for large scale on-demand micropatterning of gelatin hydrogels for organ-on-chip applications using a novel biocompatible laser-etching approach. Fast and automated micropatterning is achieved via photosensitization of gelatin using riboflavin-5'phosphate followed by UV laser-mediated photoablation of the gel surface in user-defined patterns only limited by the resolution of the 15 μm wide laser focal point. Using this photopatterning approach, we generated microscale surface groove and pillar structures with feature dimensions on the order of 10-30 μm. The standard deviation of feature height was 0.3 μm, demonstrating robustness and reproducibility. Importantly, the UV-patterning process is non-destructive and does not alter gelatin micromechanical properties. Furthermore, as a quality control step, UV-patterned heart chip substrates were seeded with rat or human cardiac myocytes, and we verified that the resulting cardiac tissues achieved structural organization, contractile function, and long-term viability comparable to manually patterned gelatin substrates. Start-to-finish, UV-patterning shortened the time required to design and manufacture micropatterned gelatin substrates for heart-on-chip applications by up to 60% compared to traditional lithography-based approaches, providing an important technological advance enroute to automated and continuous manufacturing of organ-on-chips.

  2. Multifunctional System-on-Glass for Lab-on-Chip applications.

    Science.gov (United States)

    Petrucci, G; Caputo, D; Lovecchio, N; Costantini, F; Legnini, I; Bozzoni, I; Nascetti, A; de Cesare, G

    2017-07-15

    Lab-on-Chip are miniaturized systems able to perform biomolecular analysis in shorter time and with lower reagent consumption than a standard laboratory. Their miniaturization interferes with the multiple functions that the biochemical procedures require. In order to address this issue, our paper presents, for the first time, the integration on a single glass substrate of different thin film technologies in order to develop a multifunctional platform suitable for on-chip thermal treatments and on-chip detection of biomolecules. The proposed System on-Glass hosts thin metal films acting as heating sources; hydrogenated amorphous silicon diodes acting both as temperature sensors to monitor the temperature distribution and photosensors for the on-chip detection and a ground plane ensuring that the heater operation does not affect the photodiode currents. The sequence of the technological steps, the deposition temperatures of the thin films and the parameters of the photolithographic processes have been optimized in order to overcome all the issues of the technological integration. The device has been designed, fabricated and tested for the implementation of DNA amplification through the Polymerase Chain Reaction (PCR) with thermal cycling among three different temperatures on a single site. The glass has been connected to an electronic system that drives the heaters and controls the temperature and light sensors. It has been optically and thermally coupled with another glass hosting a microfluidic network made in polydimethylsiloxane that includes thermally actuated microvalves and a PCR process chamber. The successful DNA amplification has been verified off-chip by using a standard fluorometer. Copyright © 2016 Elsevier B.V. All rights reserved.

  3. Methods for Trustworthy Design of On-Chip Bus Interconnect for General-Purpose Processors

    Science.gov (United States)

    2012-03-01

    Clock CTL Control CPU Central Processing Unit DCR Device Control Register DDR Double Data Rate DES Data Encryption Standard DIFT Dynamic...Encryption and Integrity Checking Engine PLB Processor Local Bus RAM Random Access Memory RMW Read-Modify-Write ROM Read Only Memory RSA Rivest...Figure 11 depicts the standard AMBA version 3.0 topology [11]. Figure 11. AMBA architecture (From [11]). Timer High-bandwidth on-chip RAM B R I

  4. Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

    OpenAIRE

    Fu, Yong Qing; Luo, Jack; Nguyen, Nam-Trung; Walton, Anthony; Flewitt, Andrew; Zu, Xiao-Tao; Li, Yifan; McHale, Glen; Matthews, Allan; Iborra, Enrique; Du, Hejun; Milne, William

    2017-01-01

    Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils a...

  5. Nature-Inspired Interconnects for Self-Assembled Large-Scale Network-on-Chip Designs

    OpenAIRE

    Teuscher, Christof

    2007-01-01

    Future nano-scale electronics built up from an Avogadro number of components needs efficient, highly scalable, and robust means of communication in order to be competitive with traditional silicon approaches. In recent years, the Networks-on-Chip (NoC) paradigm emerged as a promising solution to interconnect challenges in silicon-based electronics. Current NoC architectures are either highly regular or fully customized, both of which represent implausible assumptions for emerging bottom-up se...

  6. Legal Protection on IP Cores for System-on-Chip Designs

    Science.gov (United States)

    Kinoshita, Takahiko

    The current semiconductor industry has shifted from vertical integrated model to horizontal specialization model in term of integrated circuit manufacturing. In this circumstance, IP cores as solutions for System-on-Chip (SoC) have become increasingly important for semiconductor business. This paper examines to what extent IP cores of SoC effectively can be protected by current intellectual property system including integrated circuit layout design law, patent law, design law, copyright law and unfair competition prevention act.

  7. On-chip photonic memory elements employing phase-change materials.

    Science.gov (United States)

    Rios, Carlos; Hosseini, Peiman; Wright, C David; Bhaskaran, Harish; Pernice, Wolfram H P

    2014-03-05

    Phase-change materials integrated into nanophotonic circuits provide a flexible way to realize tunable optical components. Relying on the enormous refractive-index contrast between the amorphous and crystalline states, such materials are promising candidates for on-chip photonic memories. Nonvolatile memory operation employing arrays of microring resonators is demonstrated as a route toward all-photonic chipscale information processing. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  8. Blood cleaner on-chip design for artificial human kidney manipulation

    Directory of Open Access Journals (Sweden)

    Suwanpayak N

    2011-05-01

    Full Text Available N Suwanpayak1, MA Jalil2, MS Aziz3, FD Ismail3, J Ali3, PP Yupapin11Nanoscale Science and Engineering Research Alliance (N'SERA, Advanced Research Center for Photonics, Faculty of Science, King Mongkut's Institute of Technology, Ladkrabang, Bangkok, Thailand; 2Ibnu Sina Institute of Fundamental Science Studies (IIS, 3Institute of Advanced Photonics Science, Nanotechnology Research Alliance, Universiti Teknologi Malaysia, Johor Bahru, MalaysiaAbstract: A novel design of a blood cleaner on-chip using an optical waveguide known as a PANDA ring resonator is proposed. By controlling some suitable parameters, the optical vortices (gradient optical fields/wells can be generated and used to form the trapping tools in the same way as optical tweezers. In operation, the trapping force is formed by the combination between the gradient field and scattering photons by using the intense optical vortices generated within the PANDA ring resonator. This can be used for blood waste trapping and moves dynamically within the blood cleaner on-chip system (artificial kidney, and is performed within the wavelength routers. Finally, the blood quality test is exploited by the external probe before sending to the destination. The advantage of the proposed kidney on-chip system is that the unwanted substances can be trapped and filtered from the artificial kidney, which can be available for blood cleaning applications.Keywords: optical trapping, blood dialysis, blood cleaner, human kidney manipulation

  9. On-chip photonic microsystem for optical signal processing based on silicon and silicon nitride platforms

    Science.gov (United States)

    Li, Yu; Li, Jiachen; Yu, Hongchen; Yu, Hai; Chen, Hongwei; Yang, Sigang; Chen, Minghua

    2018-04-01

    The explosive growth of data centers, cloud computing and various smart devices is limited by the current state of microelectronics, both in terms of speed and heat generation. Benefiting from the large bandwidth, promising low power consumption and passive calculation capability, experts believe that the integrated photonics-based signal processing and transmission technologies can break the bottleneck of microelectronics technology. In recent years, integrated photonics has become increasingly reliable and access to the advanced fabrication process has been offered by various foundries. In this paper, we review our recent works on the integrated optical signal processing system. We study three different kinds of on-chip signal processors and use these devices to build microsystems for the fields of microwave photonics, optical communications and spectrum sensing. The microwave photonics front receiver was demonstrated with a signal processing range of a full-band (L-band to W-band). A fully integrated microwave photonics transceiver without the on-chip laser was realized on silicon photonics covering the signal frequency of up 10 GHz. An all-optical orthogonal frequency division multiplexing (OFDM) de-multiplier was also demonstrated and used for an OFDM communication system with the rate of 64 Gbps. Finally, we show our work on the monolithic integrated spectrometer with a high resolution of about 20 pm at the central wavelength of 1550 nm. These proposed on-chip signal processing systems potential applications in the fields of radar, 5G wireless communication, wearable devices and optical access networks.

  10. On-chip cell analysis platform: Implementation of contact fluorescence microscopy in microfluidic chips

    Directory of Open Access Journals (Sweden)

    Hiroaki Takehara

    2017-09-01

    Full Text Available Although fluorescence microscopy is the gold standard tool for biomedical research and clinical applications, their use beyond well-established laboratory infrastructures remains limited. The present study investigated a novel on-chip cell analysis platform based on contact fluorescence microscopy and microfluidics. Combined use of a contact fluorescence imager based on complementary metal-oxide semiconductor technology and an ultra-thin glass bottom microfluidic chip enabled both to observe living cells with minimal image distortion and to ease controlling and handling of biological samples (e.g. cells and biological molecules in the imaged area. A proof-of-concept experiment of on-chip detection of cellular response to endothelial growth factor demonstrated promising use for the recently developed on-chip cell analysis platform. Contact fluorescence microscopy has numerous desirable features including compatibility with plastic microfluidic chips and compatibility with the electrical control system, and thus will fulfill the requirements of a fully automated cell analysis system.

  11. Micro-opto-electro-mechanical devices and on-chip optical processing

    Science.gov (United States)

    Motamedi, M. Edward; Wu, Ming C.; Pister, Kristofer S.

    1997-05-01

    Micro-optical components, such as diffractive and refractive microlenses, micromirrors, beamsplitters, and beam combiners, have recently received considerable attention in the optics R&D centers and finally in the manufacturing community. This achievement is due to micro-electro- mechanical (MEM) technology that has demonstrated major improvements in overall performance and cost of optical systems while offering the possibility of relatively rapid transition to products for military, industrial, and consumer markets. Because of these technology advances, an industrial infrastructure is rapidly becoming established to combine micro-optical components and MEM-based microactuators for on-chip optical processing. Optical systems that once were considered to be impractical due to the limitations of bulk optics can now easily be designed and fabricated with all required optical paths, signal conditioning, and electronic controls integrated on a single chip. On-chip optical processing will enhance the performance of devices such as focal-plane optical concentrators, smart actuators, color separators, beam shapers, fiber data distribution interface (FDDI) switches, digital micromirror devices (DMDs), and miniature optical scanners. We review advances in micro-optical components developed at the Rockwell Science Center. We also review the potential of on-chip optical processing and the recent achievement of free-space integrated optics and micro- optical bench components developed at UCLA, and DMDs developed at Texas Instruments.

  12. An on-chip, multichannel droplet sorter using standing surface acoustic waves (SSAW)

    Science.gov (United States)

    Li, Sixing; Ding, Xiaoyun; Guo, Feng; Chen, Yuchao; Lapsley, Michael Ian; Lin, Sz-Chin Steven; Wang, Lin; McCoy, J. Philip; Cameron, Craig E.; Huang, Tony Jun

    2014-01-01

    The emerging field of droplet microfluidics requires effective on-chip handling and sorting of droplets. In this work, we demonstrate a microfluidic device that is capable of sorting picoliter water-in-oil droplets into multiple outputs using standing surface acoustic waves (SSAW). This device integrates a single-layer microfluidic channel with interdigital transducers (IDTs) to achieve on-chip droplet generation and sorting. Within the SSAW field, water-in-oil droplets experience an acoustic radiation force and are pushed towards the acoustic pressure node. As a result, by tuning the frequency of the SSAW excitation, the position of the pressure nodes can be changed and droplets can be sorted to different outlets at rates up to 222 droplets s−1. With its advantages in simplicity, controllability, versatility, non-invasiveness, and capability to be integrated with other on-chip components such as droplet manipulation and optical detection units, the technique presented here could be valuable for the development of droplet-based micro total analysis systems (μTAS). PMID:23647057

  13. An on-chip, multichannel droplet sorter using standing surface acoustic waves.

    Science.gov (United States)

    Li, Sixing; Ding, Xiaoyun; Guo, Feng; Chen, Yuchao; Lapsley, Michael Ian; Lin, Sz-Chin Steven; Wang, Lin; McCoy, J Philip; Cameron, Craig E; Huang, Tony Jun

    2013-06-04

    The emerging field of droplet microfluidics requires effective on-chip handling and sorting of droplets. In this work, we demonstrate a microfluidic device that is capable of sorting picoliter water-in-oil droplets into multiple outputs using standing surface acoustic waves (SSAW). This device integrates a single-layer microfluidic channel with interdigital transducers (IDTs) to achieve on-chip droplet generation and sorting. Within the SSAW field, water-in-oil droplets experience an acoustic radiation force and are pushed toward the acoustic pressure node. As a result, by tuning the frequency of the SSAW excitation, the position of the pressure nodes can be changed and droplets can be sorted to different outlets at rates up to 222 droplets s(-1). With its advantages in simplicity, controllability, versatility, noninvasiveness, and capability to be integrated with other on-chip components such as droplet manipulation and optical detection units, the technique presented here could be valuable for the development of droplet-based micro total analysis systems (μTAS).

  14. On-chip sample preparation for complete blood count from raw blood.

    Science.gov (United States)

    Nguyen, John; Wei, Yuan; Zheng, Yi; Wang, Chen; Sun, Yu

    2015-03-21

    This paper describes a monolithic microfluidic device capable of on-chip sample preparation for both RBC and WBC measurements from whole blood. For the first time, on-chip sample processing (e.g. dilution, lysis, and filtration) and downstream single cell measurement were fully integrated to enable sample preparation and single cell analysis from whole blood on a single device. The device consists of two parallel sub-systems that perform sample processing and electrical measurements for measuring RBC and WBC parameters. The system provides a modular environment capable of handling solutions of various viscosities by adjusting the length of channels and precisely controlling mixing ratios, and features a new 'offset' filter configuration for increased duration of device operation. RBC concentration, mean corpuscular volume (MCV), cell distribution width, WBC concentration and differential are determined by electrical impedance measurement. Experimental characterization of over 100,000 cells from 10 patient blood samples validated the system's capability for performing on-chip raw blood processing and measurement.

  15. On-chip steering of entangled photons in nonlinear photonic crystals.

    Science.gov (United States)

    Leng, H Y; Yu, X Q; Gong, Y X; Xu, P; Xie, Z D; Jin, H; Zhang, C; Zhu, S N

    2011-08-16

    One promising technique for working toward practical photonic quantum technologies is to implement multiple operations on a monolithic chip, thereby improving stability, scalability and miniaturization. The on-chip spatial control of entangled photons will certainly benefit numerous applications, including quantum imaging, quantum lithography, quantum metrology and quantum computation. However, external optical elements are usually required to spatially control the entangled photons. Here we present the first experimental demonstration of on-chip spatial control of entangled photons, based on a domain-engineered nonlinear photonic crystal. We manipulate the entangled photons using the inherent properties of the crystal during the parametric downconversion, demonstrating two-photon focusing and beam-splitting from a periodically poled lithium tantalate crystal with a parabolic phase profile. These experimental results indicate that versatile and precise spatial control of entangled photons is achievable. Because they may be operated independent of any bulk optical elements, domain-engineered nonlinear photonic crystals may prove to be a valuable ingredient in on-chip integrated quantum optics.

  16. Applying Partial Power-Gating to Direction-Sliced Network-on-Chip

    Directory of Open Access Journals (Sweden)

    Feng Wang

    2015-01-01

    Full Text Available Network-on-Chip (NoC is one of critical communication architectures for future many-core systems. As technology is continually scaling down, on-chip network meets the increasing leakage power crisis. As a leakage power mitigation technique, power-gating can be utilized in on-chip network to solve the crisis. However, the network performance is severely affected by the disconnection in the conventional power-gated NoC. In this paper, we propose a novel partial power-gating approach to improve the performance in the power-gated NoC. The approach mainly involves a direction-slicing scheme, an improved routing algorithm, and a deadlock recovery mechanism. In the synthetic traffic simulation, the proposed design shows favorable power-efficiency at low-load range and achieves better performance than the conventional power-gated one. For the application trace simulation, the design in the mesh/torus network consumes 15.2%/18.9% more power on average, whereas it can averagely obtain 45.0%/28.7% performance improvement compared with the conventional power-gated design. On balance, the proposed design with partial power-gating has a better tradeoff between performance and power-efficiency.

  17. Manually operatable on-chip bistable pneumatic microstructures for microfluidic manipulations.

    Science.gov (United States)

    Chen, Arnold; Pan, Tingrui

    2014-09-07

    Bistable microvalves are of particular interest because of their distinct nature of requiring energy consumption only during the transition between the open and closed states. This characteristic can be highly advantageous in reducing the number of external inputs and the complexity of control circuitries since microfluidic devices as contemporary lab-on-a-chip platforms are transferring from research settings to low-resource environments with high integrability and a small form factor. In this paper, we first present manually operatable, on-chip bistable pneumatic microstructures (BPMs) for microfluidic manipulation. The structural design and operation of the BPM devices can be readily integrated into any pneumatically powered microfluidic network consisting of pneumatic and fluidic channels. It is mainly composed of a vacuum activation chamber (VAC) and a pressure release chamber (PRC), of which users have direct control through finger pressing to switch either to the bistable vacuum state (VS) or the atmospheric state (AS). We have integrated multiple BPM devices into a 4-to-1 microfluidic multiplexor to demonstrate on-chip digital flow switching from different sources. Furthermore, we have shown its clinical relevance in a point-of-care diagnostic chip that processes blood samples to identify the distinct blood types (A/B/O) on-chip.

  18. On-Chip Waveguide Coupling of a Layered Semiconductor Single-Photon Source.

    Science.gov (United States)

    Tonndorf, Philipp; Del Pozo-Zamudio, Osvaldo; Gruhler, Nico; Kern, Johannes; Schmidt, Robert; Dmitriev, Alexander I; Bakhtinov, Anatoly P; Tartakovskii, Alexander I; Pernice, Wolfram; Michaelis de Vasconcellos, Steffen; Bratschitsch, Rudolf

    2017-09-13

    Fully integrated quantum technology based on photons is in the focus of current research, because of its immense potential concerning performance and scalability. Ideally, the single-photon sources, the processing units, and the photon detectors are all combined on a single chip. Impressive progress has been made for on-chip quantum circuits and on-chip single-photon detection. In contrast, nonclassical light is commonly coupled onto the photonic chip from the outside, because presently only few integrated single-photon sources exist. Here, we present waveguide-coupled single-photon emitters in the layered semiconductor gallium selenide as promising on-chip sources. GaSe crystals with a thickness below 100 nm are placed on Si 3 N 4 rib or slot waveguides, resulting in a modified mode structure efficient for light coupling. Using optical excitation from within the Si 3 N 4 waveguide, we find nonclassicality of generated photons routed on the photonic chip. Thus, our work provides an easy-to-implement and robust light source for integrated quantum technology.

  19. On-chip growth of semiconductor metal oxide nanowires for gas sensors: A review

    Directory of Open Access Journals (Sweden)

    Chu Manh Hung

    2017-09-01

    Full Text Available Semiconductor metal oxide nanowires (SMO-NWs show great potential for novel gas sensor applications because of their distinct properties, such as a high surface area to volume aspect ratio, high crystallinity and perfect pathway for electron transfer (length of NW. SMO-NW sensors can be configured as resistors or field-effect transistors for gas detection and different configurations, such as a single NW, multiple NWs, and networked NW films, have been established. Surface-functionalizing NWs with catalyst elements and self-heating NWs provide additional advantages for highly selective and low-power consumption gas sensors. However, an appropriate design of SMO-NWs is of practical importance in enhancing the gas-sensing performance of SMO-NW sensors. The on-chip growth of SMO-NWs possesses many advantages which can thus be effectively used for the large-scale fabrication of SMO-NW sensors with improved gas response and stability. This review aims to provide up-to-date information on the on-chip fabrication of SnO2, ZnO, WO3, CuO, and other SMO-NW sensors. It also discusses a variety of promising approaches that help advance the on-chip fabrication of SMO-NW-based gas sensors and other NW-based devices.

  20. Electromagnetic design methods in systems-on-chip: integrated filters for wireless CMOS RFICs

    International Nuclear Information System (INIS)

    Contopanagos, Harry

    2005-01-01

    We present general methods for designing on-chip CMOS passives and utilizing these integrated elements to design on-chip CMOS filters for wireless communications. These methods rely on full-wave electromagnetic numerical calculations that capture all the physics of the underlying foundry technologies. This is especially crucial for deep sub-micron CMOS technologies as it is important to capture the physical effects of finite (and mediocre) Q-factors limited by material losses and constraints on expensive die area, low self-resonance frequencies and dual parasitics that are particularly prevalent in deep sub-micron CMOS processes (65 nm-0.18 μm. We use these integrated elements in an ideal synthesis of a Bluetooth/WLAN pass-band filter in single-ended or differential architectures, and show the significant deviations of the on-chip filter response from the ideal one. We identify which elements in the filter circuit need to maximize their Q-factors and which Q-factors do not affect the filter performance. This saves die area, and predicts the FET parameters (especially transconductances) and negative-resistance FET topologies that have to be integrated in the filter to restore its performance. (invited paper)

  1. Integration of microcoils for on-chip immunosensors based on magnetic nanoparticles capture

    Directory of Open Access Journals (Sweden)

    Olivier Lefebvre

    2017-04-01

    Full Text Available Immunoassays using magnetic nanoparticles (MNP are generally performed under the control of permanent magnet close to the micro-tube of reaction. Using a magnet gives a powerful method for driving MNP but remains unreliable or insufficient for a fully integrated immunoassay on lab-on-chip. The aim of this study is to develop a novel lab-on-chip concept for high efficient immunoassays to detect ovalbumin (Biodefense model molecule with microcoils employed for trapping MNP during the biofunctionalization steps. The objectives are essentially to optimize their efficiency for biological recognition by assuring a better bioactivity (antibodies-ovalbumin, and detect small concentrations of the targeted protein (~10 pg/mL. In this work, we studied the response of immunoassays complex function of ovalbumin concentration. The impact of MNP diameter in the biografting protocol was studied and permitted to choose a convenient MNP size for efficient biorecognition. We realized different immunoassays by controlling MNP in test tube and in microfluidic device using a permanent magnet. The comparison between these two experiments allows us to highlight an improvement of the limit of detection in microfluidic conditions by controlling MNP trapping with a magnet. Keywords: Bacteria, Lab-on-chip, ELISA, Magnetic nanoparticles, Ovalbumin, Microcoils, Fluorescent microscopy

  2. Integrated lab-on-chip biosensing systems based on magnetic particle actuation--a comprehensive review.

    Science.gov (United States)

    van Reenen, Alexander; de Jong, Arthur M; den Toonder, Jaap M J; Prins, Menno W J

    2014-06-21

    The demand for easy to use and cost effective medical technologies inspires scientists to develop innovative lab-on-chip technologies for point-of-care in vitro diagnostic testing. To fulfill medical needs, the tests should be rapid, sensitive, quantitative, and miniaturizable, and need to integrate all steps from sample-in to result-out. Here, we review the use of magnetic particles actuated by magnetic fields to perform the different process steps that are required for integrated lab-on-chip diagnostic assays. We discuss the use of magnetic particles to mix fluids, to capture specific analytes, to concentrate analytes, to transfer analytes from one solution to another, to label analytes, to perform stringency and washing steps, and to probe biophysical properties of the analytes, distinguishing methodologies with fluid flow and without fluid flow (stationary microfluidics). Our review focuses on efforts to combine and integrate different magnetically actuated assay steps, with the vision that it will become possible in the future to realize integrated lab-on-chip biosensing assays in which all assay process steps are controlled and optimized by magnetic forces.

  3. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  4. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

    2001-01-01

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  5. Review of piezoelectric micromachined ultrasonic transducers and their applications

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

    2017-11-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

  6. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Center for Environment and Safrty Measurement, KRISS, Daejeon (Korea, Republic of)

    2004-11-15

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  7. Exploitation of capacitive micromachined transducers for nonlinear ultrasound imaging.

    Science.gov (United States)

    Novell, Anthony; Legros, Mathieu; Felix, Nicolas; Bouakaz, Ayache

    2009-12-01

    Capacitive micromachined ultrasonic transducers (CMUTs) present advantages such as wide frequency bandwidth, which could be further developed for nonlinear imaging. However, the driving electrostatic force induces a nonlinear behavior of the CMUT, thus generating undesirable harmonic components in the generated acoustic signal. Consequently, the use of CMUT for harmonic imaging (with or without contrast agents) becomes challenging. This paper suggests 2 compensation approaches, linear and nonlinear methods, to cancel unwanted nonlinear components. Furthermore, nonlinear responses from contrast agent were evaluated using CMUT in transmit before and after compensation. The results were compared with those obtained using a PZT transducer in transmit. Results showed that CMUT nonlinear behavior is highly influenced by the excitation to bias voltage ratio. Measurements of output pressure very close to the CMUT surface allow the estimation of optimal parameters for each compensation approach. Both methods showed a harmonic reduction higher than 20 dB when one element or several elements are excited. In addition, the study demonstrates that nonlinear approach seems to be more efficient because it is shown to be less sensitive to interelement variability and further avoids fundamental component deterioration. The results from contrast agent measurements showed that the responses obtained using CMUT elements in transmit with compensation were similar to those from PZT transducer excitation. This experimental study demonstrates the opportunity to use CMUT with traditional harmonic contrast imaging techniques.

  8. Capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic imaging

    Science.gov (United States)

    Vaithilingam, Srikant; Wygant, Ira O.; Kuo, Paulina S.; Zhuang, Xuefeng; Oralkan, Ömer; Olcott, Peter D.; Khuri-Yakub, Butrus T.

    2006-02-01

    In photoacoustic (optoacoustic) medical imaging, short laser pulses irradiate absorbing structures found in tissue, such as blood vessels, causing brief thermal expansions that in turn generate ultrasound waves. These ultrasound waves which correspond to the optical absorption distribution were imaged using a two dimensional array of capacitive micromachined ultrasonic transducers (CMUTs). Advantages of CMUT technology for photoacoustic imaging include the ease of integration with electronics, ability to fabricate large two dimensional arrays, arrays with arbitrary geometries, wide-bandwidth arrays and high-frequency arrays. In this study, a phantom consisting of three 0.86-mm inner diameter polyethylene tubes inside a tissue mimicking material was imaged using a 16 x 16 element CMUT array. The center tube was filled with India-ink to provide optical contrast. Traditional pulse-echo data as well as photoacoustic image data were taken. 2D cross-sectional slices and 3D volume rendered images are shown. Simple array tiling was attempted, whereby a 48 x 48 element array was simulated, to illustrate the advantages of larger arrays. Finally, the sensitivity of the photoacoustics setup to the concentration of ink in the tube was also explored. For the sensitivity experiment a different phantom consisting of only one 1.14-mm inner diameter polyethylene tube inside a tissue mimicking material was used. The concentration of the ink inside the tube was varied and images were taken.

  9. Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design.

    Science.gov (United States)

    Ramanaviciene, Almira; Virzonis, Darius; Vanagas, Gailius; Ramanavicius, Arūnas

    2010-07-01

    An affinity sensor based on a capacitive micromachined ultrasound transducer (cMUT) is reported by this Communication. The cMUT micromembrane arrays modified with adsorbed bovine leukemia virus protein gp51 were applied as a biological recognition part. The cMUT-based sensor is shown to be sensitive to the antibodies against bovine leukemia virus protein gp51 (anti-gp51). Two different concentrations of anti-gp51-containing samples and one blank sample without anti-gp51 were tested. The sensitivity of cMUT-based immunosensor is comparable with the sensitivity of a quartz microbalance-based immunosensor. The cMUT array provides a multi-channel system for the measurement of analytical signal. Moreover, two different characteristics--the resonance frequency shift (Deltaf) and the shift of the real part of the electromechanical impedance (DeltaRe)--could have been evaluated simultaneously. Both analytical signals are informative and can be applied for the estimation of immune complex formation. We found the performance of such a system being potentially superior over some other immunosensing techniques. It is more rapid than electrochemical techniques and provides two different informative parameters.

  10. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer.

    Science.gov (United States)

    Pang, Da-Chen; Chang, Cheng-Min

    2017-06-20

    This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET) substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  11. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    International Nuclear Information System (INIS)

    Virzonis, Darius; Gailius Vanagas; Dovydas Barauskas; Ramanaviciene, Almira; Makaraviciute, Asta; Ramanavicius, Arunas; Wen, Weijia; Kodzius, Rimantas

    2014-01-01

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  12. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T

    2014-01-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  13. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    Da-Chen Pang

    2017-06-01

    Full Text Available This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  14. Radiation impedance of collapsed capacitive micromachined ultrasonic transducers.

    Science.gov (United States)

    Ozgurluk, Alper; Atalar, Abdullah; Köymen, Hayrettin; Olçum, Selim

    2012-06-01

    The radiation impedance of a capacitive micromachined ultrasonic transducer (CMUT) array is a critical parameter to achieve high performance. In this paper, we present a calculation of the radiation impedance of collapsed, clamped, circular CMUTs both analytically and using finite element method (FEM) simulations. First, we model the radiation impedance of a single collapsed CMUT cell analytically by expressing its velocity profile as a linear combination of special functions for which the generated pressures are known. For an array of collapsed CMUT cells, the mutual impedance between the cells is also taken into account. The radiation impedances for arrays of 7, 19, 37, and 61 circular collapsed CMUT cells for different contact radii are calculated both analytically and by FEM simulations. The radiation resistance of an array reaches a plateau and maintains this level for a wide frequency range. The variation of radiation reactance with respect to frequency indicates an inductance-like behavior in the same frequency range. We find that the peak radiation resistance value is reached at higher kd values in the collapsed case as compared with the uncollapsed case, where k is the wavenumber and d is the center-to-center distance between two neighboring CMUT cells.

  15. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  16. Diamond-based capacitive micromachined ultrasonic transducers in immersion.

    Science.gov (United States)

    Cetin, Ahmet M; Bayram, Baris

    2013-02-01

    Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 V(p-p) sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 V(p-p) sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.

  17. Receive-Noise Analysis of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Bozkurt, Ayhan; Yaralioglu, G Goksenin

    2016-11-01

    This paper presents an analysis of thermal (Johnson) noise received from the radiation medium by otherwise noiseless capacitive micromachined ultrasonic transducer (CMUT) membranes operating in their fundamental resonance mode. Determination of thermal noise received by multiple numbers of transducers or a transducer array requires the assessment of cross-coupling through the radiation medium, as well as the self-radiation impedance of the individual transducer. We show that the total thermal noise received by the cells of a CMUT has insignificant correlation, and is independent of the radiation impedance, but is only determined by the mass of each membrane and the electromechanical transformer ratio. The proof is based on the analytical derivations for a simple transducer with two cells, and extended to transducers with numerous cells using circuit simulators. We used a first-order model, which incorporates the fundamental resonance of the CMUT. Noise power is calculated by integrating over the entire spectrum; hence, the presented figures are an upper bound for the noise. The presented analyses are valid for a transimpedance amplifier in the receive path. We use the analysis results to calculate the minimum detectable pressure of a CMUT. We also provide an analysis based on the experimental data to show that output noise power is limited by and comparable to the theoretical upper limit.

  18. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  19. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T.

    2014-10-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE.

  20. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  1. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  2. A Micromachined Infrared Senor for an Infrared Focal Plane Array

    Directory of Open Access Journals (Sweden)

    Seong M. Cho

    2008-04-01

    Full Text Available A micromachined infrared sensor for an infrared focal plane array has been designed and fabricated. Amorphous silicon was used as a sensing material, and silicon nitride was used as a membrane material. To get a good absorption in infrared range, the sensor structure was designed as a l/4 cavity structure. A Ni-Cr film was selected as an electrode material and mixed etching scheme was applied in the patterning process of the Ni-Cr electrode. All the processes were made in 0.5 μm iMEMS fabricated in the Electronics and Telecommunication Research Institute (ETRI. The processed MEMS sensor had a small membrane deflection less than 0.15 μm. This small deflection can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range of 8 ~ 14 μm. The processed infrared sensor showed high responsivity of ~230 kV/W at 1.0V bias and 2 Hz operation condition. The time constant of the sensor was 8.6 msec, which means that the sensor is suitable to be operated in 30 Hz frame rate.

  3. Review of piezoelectric micromachined ultrasonic transducers and their applications

    International Nuclear Information System (INIS)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

    2017-01-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

  4. 3DX: a micromachined silicon crystallographic x-ray detector

    Science.gov (United States)

    Morse, John; Kenney, Christopher J.; Westbrook, Edwin M.; Naday, Istvan; Parker, Sherwood I.

    2003-01-01

    We are developing pixel detectors for macromolecular crystallography, in which diffracted X-rays are directly absorbed by high-resistivity, crystalline silicon that has been micro-machined by inductively-coupled plasma etching. Arrays of 64 × 64 holes at 150 μm pitch are first formed by etching through the entire silicon bulk, then backfilled with polysilicon that is doped to create conducting p and n type columnar electrodes. When reverse biased, these electrodes generate electric fields that define the individual pixels. By forming conducting polysilicon on the sides of the sensors, which are cut-out of the silicon wafer by plasma etching, the entire surface of the detector may be made active. CMOS readout integrated circuits are conductively bump bonded behind each 3D detector, providing a direct connection to every pixel. A large array will be assembled with no insensitive bands along the edges by overlapping these sensors, each of area 0.96cm2. This detector will measure X-ray signal intensities of up to 105 events/pixel/sec without any pile-up loss, by using an integration method that retains the benefits of discrete photon counting. The detector sensitivity will be highly uniform, it will not exhibit any dark signal or spurious noise, and no geometric distortion will occur within each sensor.

  5. Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-05-01

    The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

  6. Adaptive Code Division Multiple Access Protocol for Wireless Network-on-Chip Architectures

    Science.gov (United States)

    Vijayakumaran, Vineeth

    Massive levels of integration following Moore's Law ushered in a paradigm shift in the way on-chip interconnections were designed. With higher and higher number of cores on the same die traditional bus based interconnections are no longer a scalable communication infrastructure. On-chip networks were proposed enabled a scalable plug-and-play mechanism for interconnecting hundreds of cores on the same chip. Wired interconnects between the cores in a traditional Network-on-Chip (NoC) system, becomes a bottleneck with increase in the number of cores thereby increasing the latency and energy to transmit signals over them. Hence, there has been many alternative emerging interconnect technologies proposed, namely, 3D, photonic and multi-band RF interconnects. Although they provide better connectivity, higher speed and higher bandwidth compared to wired interconnects; they also face challenges with heat dissipation and manufacturing difficulties. On-chip wireless interconnects is one other alternative proposed which doesn't need physical interconnection layout as data travels over the wireless medium. They are integrated into a hybrid NOC architecture consisting of both wired and wireless links, which provides higher bandwidth, lower latency, lesser area overhead and reduced energy dissipation in communication. However, as the bandwidth of the wireless channels is limited, an efficient media access control (MAC) scheme is required to enhance the utilization of the available bandwidth. This thesis proposes using a multiple access mechanism such as Code Division Multiple Access (CDMA) to enable multiple transmitter-receiver pairs to send data over the wireless channel simultaneously. It will be shown that such a hybrid wireless NoC with an efficient CDMA based MAC protocol can significantly increase the performance of the system while lowering the energy dissipation in data transfer. In this work it is shown that the wireless NoC with the proposed CDMA based MAC protocol

  7. Highly-integrated lab-on-chip system for point-of-care multiparameter analysis.

    Science.gov (United States)

    Schumacher, Soeren; Nestler, Jörg; Otto, Thomas; Wegener, Michael; Ehrentreich-Förster, Eva; Michel, Dirk; Wunderlich, Kai; Palzer, Silke; Sohn, Kai; Weber, Achim; Burgard, Matthias; Grzesiak, Andrzej; Teichert, Andreas; Brandenburg, Albrecht; Koger, Birgit; Albers, Jörg; Nebling, Eric; Bier, Frank F

    2012-02-07

    A novel innovative approach towards a marketable lab-on-chip system for point-of-care in vitro diagnostics is reported. In a consortium of seven Fraunhofer Institutes a lab-on-chip system called "Fraunhofer ivD-platform" has been established which opens up the possibility for an on-site analysis at low costs. The system features a high degree of modularity and integration. Modularity allows the adaption of common and established assay types of various formats. Integration lets the system move from the laboratory to the point-of-need. By making use of the microarray format the lab-on-chip system also addresses new trends in biomedicine. Research topics such as personalized medicine or companion diagnostics show that multiparameter analyses are an added value for diagnostics, therapy as well as therapy control. These goals are addressed with a low-cost and self-contained cartridge, since reagents, microfluidic actuators and various sensors are integrated within the cartridge. In combination with a fully automated instrumentation (read-out and processing unit) a diagnostic assay can be performed in about 15 min. Via a user-friendly interface the read-out unit itself performs the assay protocol, data acquisition and data analysis. So far, example assays for nucleic acids (detection of different pathogens) and protein markers (such as CRP and PSA) have been established using an electrochemical read-out based on redoxcycling or an optical read-out based on total internal reflectance fluorescence (TIRF). It could be shown that the assay performance within the cartridge is similar to that found for the same assay in a microtiter plate. Furthermore, recent developments are the integration of sample preparation and polymerase chain reaction (PCR) on-chip. Hence, the instrument is capable of providing heating-and-cooling cycles necessary for DNA-amplification. In addition to scientific aspects also the production of such a lab-on-chip system was part of the development since

  8. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    International Nuclear Information System (INIS)

    Xiang, H.; Komvopoulos, K.

    2013-01-01

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  9. Dynamic On-Chip micro Temperature and Flow Sensor for miniaturized lab-on-a-chip instruments

    Data.gov (United States)

    National Aeronautics and Space Administration — The purpose of this project is to design, fabricate, and characterize a Dynamic On-Chip Flow and Temperature Sensor (DOCFlaTS) to mature and enable miniaturized...

  10. Si Micro-turbine by Proton BeamWriting and Porous Silicon Micromachining

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.; Fekete, Z.

    2008-01-01

    Complete text of publication follows. A 3D Si micro-turbine characterized by high aspect ratio vertical walls was formed by the combination of proton beam writing (PBW) and subsequent selective porous Si (PS) etching. Crystal damages generated by the implanted protons result in increased resistivity, thereby limit or even prevent the current to flow through the implanted area during electrochemical etching. Characteristic feature of the proposed process is that the shape of the micro electromechanical (MEMS) components is defined by two implantation energies. A higher energy is applied for defining the housing of the device while the lower energy is used to write the moving components. The implantation energies were selected such as to result appropriate difference between the two projected ranges, thereby providing structures with different height after development. The thickness of the walls of the moving component and the isotropic etching profile of the electrochemical PS formation was also taken into consideration. The electrochemical etching is driven until the sacrificial PS layer completely under etches the moving components, but the etch-front does not reach the bottom of the housing. Therefore, the dissolution of PS results in a ready-to-operate device with a released moving component embedded in the cavity of the housing. The operation of the encapsulated device fabricated by the two-energy implantation is successfully demonstrated (Fig. 1). Rotation speed of the device is estimated in the range of thousands rpm, however, further analysis of the novel structure optimized for performance and MEMS compatible assembly will be done and precise characteristics will be determined by adequate optical read-out method. The feasibility of Proton Beam Writing combined with Porous Si Micromachining and conventional Si processing steps was successfully demonstrated by fabricating Si microturbine chip. The aligned, two-energy proton beam implantation can provide high

  11. A system-on-chip digital pH meter for use in a wireless diagnostic capsule

    OpenAIRE

    Hammond, P.A.; Ali, D.; Cumming, D.R.S.

    2005-01-01

    This paper describes the design and implementation of a system-on-chip digital pH meter, for use in a wireless capsule application. The system is organized around an 8-bit microcontroller, designed to be functionally identical to the Motorola 6805. The analog subsystem contains a floating-electrode ISFET, which is fully compatible with a commercial CMOS process. On-chip programmable voltage references and multiplexors permit flexibility with the minimum of external connections. The chip is de...

  12. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  13. Micromachined Millimeter- and Submillimeter-Wave SIS Heterodyne Receivers for Remote Sensing

    Science.gov (United States)

    Hu, Qing

    1998-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor -insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30+/-3 K without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  14. A Low-noise Micromachined Millimeter-Wave Heterodyne Mixer using Nb Superconducting Tunnel Junctions

    Science.gov (United States)

    DeLange, Gert; Jacobson, Brian R.; Hu, Qing

    1996-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor-insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30 +/- 3 K (without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  15. Capacitive micromachined ultrasonic transducers with through-wafer interconnects

    Science.gov (United States)

    Zhuang, Xuefeng

    Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for making ultrasound transducer arrays for applications such as 3D medical ultrasound, non-destructive evaluation and chemical sensing. Advantages of CMUTs over traditional piezoelectric transducers include low-cost batch fabrication, wide bandwidth, and ability to fabricate arrays with broad operation frequency range and different geometric configurations on a single wafer. When incorporated with through-wafer interconnects, a CMUT array can be directly integrated with a front-end integrated circuit (IC) to achieve compact packaging and to mitigate the effects of the parasitic capacitance from the connection cables. Through-wafer via is the existing interconnect scheme for CMUT arrays, and many other types of micro-electro-mechanical system (MEMS) devices. However, to date, no successful through-wafer via fabrication technique compatible with the wafer-bonding method of making CMUT arrays has been demonstrated. The through-wafer via fabrication steps degrade the surface conditions of the wafer, reduce the radius of curvature, thus making it difficult to bond. This work focuses on new through-wafer interconnect techniques that are compatible with common MEMS fabrication techniques, including both surface-micromachining and direct wafer-to-wafer fusion bonding. In this dissertation, first, a through-wafer via interconnect technique with improved characteristics is presented. Then, two implementations of through-wafer trench isolation are demonstrated. The through-wafer trench methods differ from the through-wafer vias in that the electrical conduction is through the bulk silicon instead of the conductor in the vias. In the first implementation, a carrier wafer is used to provide mechanical support; in the second, mechanical support is provided by a silicon frame structure embedded inside the isolation trenches. Both implementations reduce fabrication complexity compared to the through

  16. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-06-24

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs.

  17. Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications

    Science.gov (United States)

    Wong, Serena H.; Kupnik, Mario; Watkins, Ronald D.; Butts-Pauly, Kim; Khuri-Yakub, Butrus T.

    2014-01-01

    Therapeutic ultrasound guided by magnetic resonance imaging (MRI) is a noninvasive treatment that potentially reduces mortality, lowers medical costs, and widens accessibility of treatments for patients. Recent developments in the design and fabrication of capacitive micromachined ultrasonic transducers (CMUTs) have made them competitive with piezoelectric transducers for use in therapeutic ultrasound applications. In this paper, we present the first designs and prototypes of an 8-element, concentric-ring, CMUT array to treat upper abdominal cancers. This array was simulated and designed to focus 30–50 mm into tissue and ablate a 2–3 cm diameter tumor within 1 hour. Assuming a surface acoustic output pressure of 1 MPa peak to peak (8.5 W/cm2) at 2.5 MHz, we simulated an array that produced a focal intensity of 680 W/cm2 when focusing to 35 mm. CMUT cells were then designed to meet these frequency and surface acoustic intensity specifications. These cell designs were fabricated as 2.5 mm by 2.5 mm test transducers and used to verify our models. The test transducers were shown to operate at 2.5 MHz with an output pressure of 1.4 MPa peak to peak (16.3 W/cm2). With this CMUT cell design, we fabricated a full 8-element array. Due to yield issues, we only developed electronics to focus the four center elements of the array. The beam profile of the measured array deviated from the simulated because of crosstalk effects; the beamwidth matched within 10% and sidelobes increased by 2 times, which caused the measured gain to be 16.6 compared to 27.4. PMID:19628448

  18. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  19. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  20. A Lab-on-Chip Design for Miniature Autonomous Bio-Chemoprospecting Planetary Rovers

    Science.gov (United States)

    Santoli, S.

    The performance of the so-called ` Lab-on-Chip ' devices, featuring micrometre size components and employed at present for carrying out in a very fast and economic way the extremely high number of sequence determinations required in genomic analyses, can be largely improved as to further size reduction, decrease of power consumption and reaction efficiency through development of nanofluidics and of nano-to-micro inte- grated systems. As is shown, such new technologies would lead to robotic, fully autonomous, microwatt consumption and complete ` laboratory on a chip ' units for accurate, fast and cost-effective astrobiological and planetary exploration missions. The theory and the manufacturing technologies for the ` active chip ' of a miniature bio/chemoprospecting planetary rover working on micro- and nanofluidics are investigated. The chip would include micro- and nanoreactors, integrated MEMS (MicroElectroMechanical System) components, nanoelectronics and an intracavity nanolaser for highly accurate and fast chemical analysis as an application of such recently introduced solid state devices. Nano-reactors would be able to strongly speed up reaction kinetics as a result of increased frequency of reactive collisions. The reaction dynamics may also be altered with respect to standard macroscopic reactors. A built-in miniature telemetering unit would connect a network of other similar rovers and a central, ground-based or orbiting control unit for data collection and transmission to an Earth-based unit through a powerful antenna. The development of the ` Lab-on-Chip ' concept for space applications would affect the economy of space exploration missions, as the rover's ` Lab-on-Chip ' development would link space missions with the ever growing terrestrial market and business concerning such devices, largely employed in modern genomics and bioinformatics, so that it would allow the recoupment of space mission costs.

  1. A Bio-Inspired Hybrid Thermal Management Approach for 3-D Network-on-Chip Systems.

    Science.gov (United States)

    Dash, Ranjita; Risco-Martin, Jose L; Turuk, Ashok Kumar; Ayala, Jose L; Pangracious, Vinod; Majumdar, Amartya

    2017-12-01

    3-D network-on-chip (NoC) systems are getting popular among the integrated circuit (IC) manufacturer because of reduced latency, heterogeneous integration of technologies on a single chip, high yield, and consumption of less interconnecting power. However, the addition of functional units in the -direction has resulted in higher on-chip temperature and appearance of local hotspots on the die. The increase in temperature degrades the performance, lifetime, and reliability, and increases the maintenance cost of 3-D ICs. To keep the heat within an acceptable limit, floorplanning is the widely accepted solution. Proper arrangement of functional units across different layers can lead to uniform thermal distribution in the chip. For systems with high density of elements, few hotspots cannot be eliminated in the floorplanning approach. To overcome, liquid microchannel cooling technology has emerged as an efficient and scalable solution for 3-D NoC. In this paper, we propose a novel hybrid algorithm combining both floorplanning, and liquid microchannel placement to alleviate the hotspots in high-density systems. A mathematical model is proposed to deal with heat transfer due to diffusion and convention. The proposed approach is independent of topology. Three different topologies: 3-D stacked homogeneous mesh architecture, 3-D stacked heterogeneous mesh architecture, and 3-D stacked ciliated mesh architecture are considered to check the effectiveness of the proposed algorithm in hotspot reduction. A thermal comparison is made with and without the proposed thermal management approach for the above architectures considered. It is observed that there is a significant reduction in on-chip temperature when the proposed thermal management approach is applied.

  2. Wide-field computational imaging of pathology slides using lens-free on-chip microscopy.

    Science.gov (United States)

    Greenbaum, Alon; Zhang, Yibo; Feizi, Alborz; Chung, Ping-Luen; Luo, Wei; Kandukuri, Shivani R; Ozcan, Aydogan

    2014-12-17

    Optical examination of microscale features in pathology slides is one of the gold standards to diagnose disease. However, the use of conventional light microscopes is partially limited owing to their relatively high cost, bulkiness of lens-based optics, small field of view (FOV), and requirements for lateral scanning and three-dimensional (3D) focus adjustment. We illustrate the performance of a computational lens-free, holographic on-chip microscope that uses the transport-of-intensity equation, multi-height iterative phase retrieval, and rotational field transformations to perform wide-FOV imaging of pathology samples with comparable image quality to a traditional transmission lens-based microscope. The holographically reconstructed image can be digitally focused at any depth within the object FOV (after image capture) without the need for mechanical focus adjustment and is also digitally corrected for artifacts arising from uncontrolled tilting and height variations between the sample and sensor planes. Using this lens-free on-chip microscope, we successfully imaged invasive carcinoma cells within human breast sections, Papanicolaou smears revealing a high-grade squamous intraepithelial lesion, and sickle cell anemia blood smears over a FOV of 20.5 mm(2). The resulting wide-field lens-free images had sufficient image resolution and contrast for clinical evaluation, as demonstrated by a pathologist's blinded diagnosis of breast cancer tissue samples, achieving an overall accuracy of ~99%. By providing high-resolution images of large-area pathology samples with 3D digital focus adjustment, lens-free on-chip microscopy can be useful in resource-limited and point-of-care settings. Copyright © 2014, American Association for the Advancement of Science.

  3. On-Chip integration of sample pretreatment and Multiplex polymerase chain reaction (PCR) for DNA analysis

    DEFF Research Database (Denmark)

    Brivio, Monica; Snakenborg, Detlef; Søgaard, E.

    2008-01-01

    In this paper we present a modular lab-on-a-chip system for integrated sample pre-treatment (PT) by magnetophoresis and DNA amplification by polymerase chain reaction (PCR). It consists of a polymer-based microfluidic chip mounted on a custom-made thermocycler (Figure 1) and includes a simple...... and efficient method for switching the liquid flow between the PT and PCR chamber. Purification of human genomic DNA from EDTA-treated blood and multiplex PCR were successfully carried out on-chip using the developed lab-on-a-chip system....

  4. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

    Energy Technology Data Exchange (ETDEWEB)

    Han, Seunghoon; Horie, Yu; Faraon, Andrei; Arbabi, Amir

    2018-04-10

    An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.

  5. Synthesis and Layout of an Asynchronous Network-on-Chip using Standard EDA Tools

    DEFF Research Database (Denmark)

    Müller, Christoph; Kasapaki, Evangelia; Sørensen, Rasmus Bo

    2014-01-01

    Asynchronous circuit design is well understood but design tools supporting asynchronous design are largely lacking, and designers are limited to using conventional EDA-tools. These tools have a built-in synchronous mind-set and this complicates their use for asynchronous implementation. One example...... is the key role that clock signals play in specifying time-constraints for the synthesis. In this paper explain how we handled the synthesis and layout of an asynchronous network-on-chip for a multi-core platform. Focus is on the design process while the actual NOC-design and its performance are presented...

  6. On-chip detection of radiation guided by dielectric-loaded plasmonic waveguides

    DEFF Research Database (Denmark)

    Han, Z.; Radko, I. P.; Mazurski, N.

    2015-01-01

    ) substrate supplied with aluminum pads facilitating electrical connections, with the gold pad being perforated in a specific location below the DLSPPWs in order to allow a portion of the DLSPPW-guided radiation to leak into the Si-substrate, where it is absorbed and electrically detected. We present two......We report a novel approach for on-chip electrical detection of the radiation guided by dielectric-loaded surface plasmon polariton waveguides (DLSPPW) and DLSPPW-based components. The detection is realized by fabricating DLSPPW components on the surface of a gold (Au) pad supported by a silicon (Si...

  7. Identification of microfluidic two-phase flow patterns in lab-on-chip devices.

    Science.gov (United States)

    Yang, Zhaochu; Dong, Tao; Halvorsen, Einar

    2014-01-01

    This work describes a capacitive sensor for identification of microfluidic two-phase flow in lab-on-chip devices. With interdigital electrodes and thin insulation layer utilized, this sensor is capable of being integrated with the microsystems easily. Transducing principle and design considerations are presented with respect to the microfluidic gas/liquid flow patterns. Numerical simulation results verify the operational principle. And the factors affecting the performance of the sensor are discussed. Besides, a feasible process flow for the fabrication is also proposed.

  8. A Statically Scheduled Time-Division-Multiplexed Network-on-Chip for Real-Time Systems

    DEFF Research Database (Denmark)

    Schoeberl, Martin; Brandner, Florian; Sparsø, Jens

    2012-01-01

    This paper explores the design of a circuit-switched network-on-chip (NoC) based on time-division-multiplexing (TDM) for use in hard real-time systems. Previous work has primarily considered application-specific systems. The work presented here targets general-purpose hardware platforms. We...... presents an FPGA-friendly hardware design, which is simple, fast, and consumes minimal resources. Furthermore, an algorithm to find minimum-period schedules for all-to-all virtual circuits on top of typical physical NoC topologies like 2D-mesh, torus, bidirectional torus, tree, and fat-tree is presented...

  9. On-chip measurements of Brownian relaxation vs. concentration of 40nm magnetic beads

    DEFF Research Database (Denmark)

    Østerberg, Frederik Westergaard; Rizzi, Giovanni; Hansen, Mikkel Fougt

    2012-01-01

    We present on-chip Brownian relaxation measurements on a logarithmic dilution series of 40 nm beads dispersed in water with bead concentrations between 16 mu g/ml and 4000 mu g/ml. The measurements are performed using a planar Hall effect bridge sensor at frequencies up to 1 MHz. No external fields...... are needed as the beads are magnetized by the field generated by the applied sensor bias current. We show that the Brownian relaxation frequency can be extracted from fitting the Cole-Cole model to measurements for bead concentrations of 64 mu g/ml or higher and that the measured dynamic magnetic response...

  10. On-Chip Microplasmas for the Detection of Radioactive Cesium Contamination in Seawater

    Directory of Open Access Journals (Sweden)

    Joshua B. Joffrion

    2017-08-01

    Full Text Available On-chip microplasmas have previously been used in designing a compact and portable device for identifying pollutants in a water sample. By exciting a liquid sample with a high energy microdischarge and recording the spectral wavelengths emitted, the individual elements in the liquid are distinguishable. In particular, this study focuses on cesium, a contaminant from nuclear incidents such as the collapse of the nuclear power plant in Fukushima, Japan. This article shows that not only can the presence of cesium be clearly determined at concentrations as low as 10 ppb, but the relative concentration contained in the sample can be determined through the discharges’ relative spectral intensity.

  11. Composable Flexible Real-time Packet Scheduling for Networks on-Chip

    Science.gov (United States)

    2012-05-16

    the packets at the flow’s source. 2) Preemptive EDF Scheduling: As wormhole flow control allows sending packets sent flit-by-flit, we could employ a...analysis of wormhole based heterogeneous noc. In Proceedings of the 2011 Fifth ACM/IEEE International Symposium on Networks-on-Chip, NOCS ’11, pages 161–168...Computer Architecture, ISCA ’08, pages 89–100, Washington, DC, USA, 2008. IEEE Computer Society. [14] Sunggu Lee. Real-time wormhole channels. Journal of

  12. Amplification of biological targets via on-chip culture for biosensing

    Energy Technology Data Exchange (ETDEWEB)

    Harper, Jason C.; Edwards, Thayne L.; Carson, Bryan; Finley, Melissa; Arndt, William

    2018-01-02

    The present invention, in part, relates to methods and apparatuses for on-chip amplification and/or detection of various targets, including biological targets and any amplifiable targets. In some examples, the microculture apparatus includes a single-use, normally-closed fluidic valve that is initially maintained in the closed position by a valve element bonded to an adhesive coating. The valve is opened using a magnetic force. The valve element includes a magnetic material or metal. Such apparatuses and methods are useful for in-field or real-time detection of targets, especially in limited resource settings.

  13. CLOSED FORM MODELING OF CROSSTALK FOR DISTRIBUTED RLCG ON-CHIP INTERCONNECTS USING DIFFERENCE MODEL APPROACH

    Directory of Open Access Journals (Sweden)

    Rajib Kar

    2010-03-01

    Full Text Available On chip interconnect plays a dominant role on the circuit performance in both analog and digital domains. Interconnects can no longer be treated as mere delays or lumped RC networks. Crosstalk, ringing and reflections are just some of the issues that need to be addressed for the efficient design of high speed VLSI circuits. In order to accurately model these high frequency effects, inductance had been taken into consideration. Within this frequency range, the most accurate simulation model for on-chip VLSI interconnects was the distributed RLC model. Unfortunately, this model has many limitations at much higher of operating frequency used in today’s VLSI design. This can lead to inaccurate simulations if not modeled properly. At even higher frequency the conductance metrics has become a dominant factor and has to be taken into consideration for accurate modeling of the different on-chip performance parameters. The traditional analysis of crosstalk in a transmission line begins with a lossless LC representation, yielding a wave equation governing the system response. With the increase in frequency and interconnection length due to the increase in the number of on-chip devices, the lossy components are prevailing than the lossless components. With the reduction of pitch between the adjacent wires in deep sub-micron technologies, coupling capacitances are becoming significant. This increase in capacitances results the introduction of noise which is capable of propagating a logical fault. An inaccurate estimation of the crosstalk could be the origin of the malfunction of the circuit. Cross talk can be analyzed by computing the signal linkage between aggressor and victim nets. The aggressor net carries a signal that couples to the victim net through the parasitic capacitances [13]. To determine the effects that this cross talk will have on circuit operation, the resulting delays and logic levels for the victim nets must be computed. This paper

  14. Magnetic Tunnel Junction-Based On-Chip Microwave Phase and Spectrum Analyzer

    Science.gov (United States)

    Fan, Xin; Chen, Yunpeng; Xie, Yunsong; Kolodzey, James; Wilson, Jeffrey D.; Simons, Rainee N.; Xiao, John Q.

    2014-01-01

    A magnetic tunnel junction (MTJ)-based microwave detector is proposed and investigated. When the MTJ is excited by microwave magnetic fields, the relative angle between the free layer and pinned layer alternates, giving rise to an average resistance change. By measuring the average resistance change, the MTJ can be utilized as a microwave power sensor. Due to the nature of ferromagnetic resonance, the frequency of an incident microwave is directly determined. In addition, by integrating a mixer circuit, the MTJ-based microwave detector can also determine the relative phase between two microwave signals. Thus, the MTJbased microwave detector can be used as an on-chip microwave phase and spectrum analyzer.

  15. A Metaheuristic Scheduler for Time Division Multiplexed Network-on-Chip

    DEFF Research Database (Denmark)

    Sørensen, Rasmus Bo; Sparsø, Jens; Pedersen, Mark Ruvald

    This report presents a metaheuristic scheduler for inter-processor communication in multi-core platforms using time division multiplexed (TDM) networks on chip (NOC). Input to the scheduler is a specification of the target multi-core platform and a specification of the application. Compared...... that this is possible with only negligible impact on the schedule period. We evaluate the scheduler with seven different applications from the MCSL NOC benchmark suite. We observe that the metaheuristics perform better than the greedy solution. In the special case of all-to-all communication with equal bandwidths...

  16. Mach-Zehnder-based optical router design for photonic networks on chip

    Science.gov (United States)

    Yaghoubi, Elham; Reshadi, Midia; Hosseinzadeh, Mehdi

    2015-03-01

    We design and simulate six- and seven-port optical routers based on Mach-Zehnder interferometer switches that are suitable for photonic networks-on-chip. The routers are composed of 12 and 22 switching elements as the possible 30 input/output and 42 input/output routing paths are verified at a data transmission rate of 20 Gbps for six- and seven-port optical routers, respectively. We use an OptiSystem simulator to evaluate the proposed optical routers from the aspects of insertion loss, Q-factor and minimum bit error ratio.

  17. A Scalable, Timing-Safe, Network-on-Chip Architecture with an Integrated Clock Distribution Method

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Stensgaard, Mikkel Bystrup; Sparsø, Jens

    2007-01-01

    regions concerns the possibility of data corruption caused by metastability. This paper presents an integrated communication and mesochronous clocking strategy, which avoids timing related errors while maintaining a globally synchronous system perspective. The architecture is scalable as timing integrity......Growing system sizes together with increasing performance variability are making globally synchronous operation hard to realize. Mesochronous clocking constitutes a possible solution to the problems faced. The most fundamental of problems faced when communicating between mesochronously clocked...... is based purely on local observations. It is demonstrated with a 90 nm CMOS standard cell network-on-chip design which implements completely timing-safe, global communication in a modular system...

  18. A Scheduling Discipline for Latency and Bandwidth Guarantees in Asynchronous Network-on-Chip

    DEFF Research Database (Denmark)

    Bjerregaard, Tobias; Sparsø, Jens

    2005-01-01

    Guaranteed services (GS) are important in that they provide predictability in the complex dynamics of shared communication structures. This paper discusses the implementation of GS in asynchronous Network-on-Chip. We present a novel scheduling discipline called Asynchronous Latency Guarantee (ALG......) scheduling, which provides latency and bandwidth guarantees in accessing a shared media, e.g. a physical link shared between a number of virtual channels. ALG overcomes the drawbacks of existing scheduling disciplines, in particular the coupling between latency and bandwidth guarantees. A 0.12 &956;m CMOS...

  19. Webcam camera as a detector for a simple lab-on-chip time based approach.

    Science.gov (United States)

    Wongwilai, Wasin; Lapanantnoppakhun, Somchai; Grudpan, Supara; Grudpan, Kate

    2010-05-15

    A modification of a webcam camera for use as a small and low cost detector was demonstrated with a simple lab-on-chip reactor. Real time continuous monitoring of the reaction zone could be done. Acid-base neutralization with phenolphthalein indicator was used as a model reaction. The fading of pink color of the indicator when the acidic solution diffused into the basic solution zone was recorded as the change of red, blue and green colors (%RBG.) The change was related to acid concentration. A low cost portable semi-automation analysis system was achieved.

  20. Random number generator based on an integrated laser with on-chip optical feedback

    Science.gov (United States)

    Verschaffelt, Guy; Khoder, Mulham; Van der Sande, Guy

    2017-11-01

    We discuss the design and testing of a laser integrated with a long on-chip optical feedback section. The device and feedback section have been fabricated on a generic photonic integration platform using only standard building blocks. We have been able to integrate a 10 cm feedback length on a footprint of 5.5 mm2. By controlling the amount of feedback, we achieve chaotic dynamics in the long-cavity regime and show that the resulting dynamics is sufficiently complex in order to generate random bits based on the chaotic intensity fluctuation at a rate of 500 Mbits/s.

  1. A simple clockless Network-on-Chip for a commercial audio DSP chip

    DEFF Research Database (Denmark)

    Stensgaard, Mikkel Bystrup; Bjerregaard, Tobias; Sparsø, Jens

    2006-01-01

    to the existing crossbar, it allows all blocks to communicate. The total wire length is decreased by 22% which eases the layout process and makes the design less prone to routing congestion. Not least, the communicating blocks are decoupled by means of the NoC, providing a Globally-Asynchronous, Locally-Synchronous......We design a very small, packet-switched, clockless Network-on-Chip (NoC) as a replacement for the existing crossbar-based communication infrastructure in a commercial audio DSP chip. Both solutions are laid out in a 0.18 um process, and compared in terms of area, power consumption and routing...

  2. An acoustic on-chip goniometer for room temperature macromolecular crystallography.

    Science.gov (United States)

    Burton, C G; Axford, D; Edwards, A M J; Gildea, R J; Morris, R H; Newton, M I; Orville, A M; Prince, M; Topham, P D; Docker, P T

    2017-12-05

    This paper describes the design, development and successful use of an on-chip goniometer for room-temperature macromolecular crystallography via acoustically induced rotations. We present for the first time a low cost, rate-tunable, acoustic actuator for gradual in-fluid sample reorientation about varying axes and its utilisation for protein structure determination on a synchrotron beamline. The device enables the efficient collection of diffraction data via a rotation method from a sample within a surface confined droplet. This method facilitates efficient macromolecular structural data acquisition in fluid environments for dynamical studies.

  3. Improved color metrics in solid-state lighting via utilization of on-chip quantum dots

    Science.gov (United States)

    Mangum, Benjamin D.; Landes, Tiemo S.; Theobald, Brian R.; Kurtin, Juanita N.

    2017-02-01

    While Quantum Dots (QDs) have found commercial success in display applications, there are currently no widely available solid state lighting products making use of QD nanotechnology. In order to have real-world success in today's lighting market, QDs must be capable of being placed in on-chip configurations, as remote phosphor configurations are typically much more expensive. Here we demonstrate solid-state lighting devices made with on-chip QDs. These devices show robust reliability under both dry and wet high stress conditions. High color quality lighting metrics can easily be achieved using these narrow, tunable QD downconverters: CRI values of Ra > 90 as well as R9 values > 80 are readily available when combining QDs with green phosphors. Furthermore, we show that QDs afford a 15% increase in overall efficiency compared to traditional phosphor downconverted SSL devices. The fundamental limit of QD linewidth is examined through single particle QD emission studies. Using standard Cd-based QD synthesis, it is found that single particle linewidths of 20 nm FWHM represent a lower limit to the narrowness of QD emission in the near term.

  4. On-chip bioassay using immobilized sensing bacteria in three-dimensional microfluidic network.

    Science.gov (United States)

    Tani, Hirofumi; Maehana, Koji; Kamidate, Tamio

    2007-01-01

    An on-chip whole-cell bioassay has been carried out using Escherichia coli tester strains for genotoxicity. In this assay format, the mutagen-responsive bioluminescence (BL) strains are immobilized in a chip assembly in which a silicon chip is placed between two poly(dimethylsiloxane) (PDMS) chips. In the chip assembly, microchannels fabricated on the two separate PDMS layers are connected via perforated microwells on the Si chip, and thus a three-dimensional microfluidic network is constructed. The strains mixed with agarose are loaded from the channels on one of the two PDMS layers into the wells on Si chip, followed by gelation. Induction of the expression of firefly luciferase in the tester strains and BL reaction are successively carried out by filling the channels on another PDMS layer with samples containing inducer (genotoxic substance) and then adenosine triphosphate/luciferin mixture, respectively. BL emission from each of the wells can be monitored by using a charge-coupled device camera to obtain an overall picture of the chip. The on-chip format based on a three-dimensional microfluidic network provides a combinatorial bioassay for multiple samples with multiple tester strains in a simple chip assembly. Thus, the presented method could be applied not only to various microbial sensing applications but also to other (bio)chemical analyses.

  5. GaN directional couplers for on-chip optical interconnect

    Science.gov (United States)

    Yuan, Jialei; Gao, Xumin; Yang, Yongchao; Zhu, Guixia; Yuan, Wei; Choi, Hoi Wai; Zhang, Zhiyu; Wang, Yongjin

    2017-04-01

    Here, we propose, fabricate and characterize GaN directional couplers for on-chip optical interconnect on a GaN-on-silicon platform. Suspended InGaN/GaN multiple-quantum-well diodes are adopted for both the transmitter and the receiver, and GaN directional couplers are used to achieve the light coupling between suspended waveguides that are directly connected to the transmitter and the receiver. The proposed on-chip optical interconnects are experimentally demonstrated by light propagation and in-plane data transmission using visible light. The light propagation images directly show that the emitted light can be laterally coupled into the suspended waveguide, and the guided light from the input waveguide then couples to the coupled waveguide due to the overlapped slab. The receiver detects the transmitted light from the coupled waveguide to complete the in-plane visible light communication process, as confirmed by pseudo-random binary sequence data and eye diagrams at the transmission rate of 30 Mbps.

  6. Designing 2D and 3D network-on-chip architectures

    CERN Document Server

    Tatas, Konstantinos; Soudris, Dimitrios; Jantsch, Axel

    2014-01-01

    This book covers key concepts in the design of 2D and 3D Network-on-Chip interconnect.  It highlights design challenges and discusses fundamentals of NoC technology, including architectures, algorithms and tools.  Coverage focuses on topology exploration for both 2D and 3D NoCs, routing algorithms, NoC router design, NoC-based system integration, verification and testing, and NoC reliabilty.  Case studies are used to illuminate new design methodologies.  ·         Describes essential theory, practice and state-of-the-art applications of 2D and 3D Network-on-Chip interconnect; ·         Enables readers to exploit parallelism in processor architecture, with interconnect design that is efficient in terms of energy and performance; ·         Covers topics not available in other books, such as NoC and distributed memory organization, dynamic memory management and abstract data type support in many-core platforms, and distributed hierarchical power management.

  7. Laser doppler blood flow imaging using a CMOS imaging sensor with on-chip signal processing.

    Science.gov (United States)

    He, Diwei; Nguyen, Hoang C; Hayes-Gill, Barrie R; Zhu, Yiqun; Crowe, John A; Gill, Cally; Clough, Geraldine F; Morgan, Stephen P

    2013-09-18

    The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF) imaging has been designed and tested. To obtain a space efficient design over 64 × 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue.

  8. Laser Doppler Blood Flow Imaging Using a CMOS Imaging Sensor with On-Chip Signal Processing

    Directory of Open Access Journals (Sweden)

    Cally Gill

    2013-09-01

    Full Text Available The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF imaging has been designed and tested. To obtain a space efficient design over 64 × 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue.

  9. A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

    Directory of Open Access Journals (Sweden)

    Chih-Ting Lin

    2012-08-01

    Full Text Available A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.

  10. A HETEROGENEOUS MULTIPROCESSOR SYSTEM-ON-CHIP ARCHITECTURE INCORPORATING MEMORY ALLOCATION

    Directory of Open Access Journals (Sweden)

    T.Thillaikkarasi

    2010-06-01

    Full Text Available This paper describes the development of a Multiprocessor System-on-Chip (MPSoC with a novel interconnect architecture incorporating memory allocation. It addresses the problem of mapping a process network with data dependent behavior and soft real time constraints onto the heterogeneous multiprocessor System on Chip (SoC architectures and focuses on a memory allocation step which is based on an integer linear programming model. An application is modeled as Kahn Process Network (KPN which makes the parallelism present in the application explicit. The main contribution of our work is an MILP based approach which can be used to map the KPN of streaming applications with data dependent behavior and interleaved computation and communication. Our solution minimizes hardware cost while taking into account the performance constraints. One of the salient features of our work is that it takes into account the additional overheads because of data communication conflicts. It permits to obtain an optimal distributed shared memory architecture minimizing the global cost to access the shared data in the application, and the memory cost. Our approach allows automatic generation of an architecture-level specification of the application.

  11. Computational On-Chip Imaging of Nanoparticles and Biomolecules using Ultraviolet Light

    Science.gov (United States)

    Daloglu, Mustafa Ugur; Ray, Aniruddha; Gorocs, Zoltan; Xiong, Matthew; Malik, Ravinder; Bitan, Gal; McLeod, Euan; Ozcan, Aydogan

    2017-03-01

    Significant progress in characterization of nanoparticles and biomolecules was enabled by the development of advanced imaging equipment with extreme spatial-resolution and sensitivity. To perform some of these analyses outside of well-resourced laboratories, it is necessary to create robust and cost-effective alternatives to existing high-end laboratory-bound imaging and sensing equipment. Towards this aim, we have designed a holographic on-chip microscope operating at an ultraviolet illumination wavelength (UV) of 266 nm. The increased forward scattering from nanoscale objects at this short wavelength has enabled us to detect individual sub-30 nm nanoparticles over a large field-of-view of >16 mm2 using an on-chip imaging platform, where the sample is placed at ≤0.5 mm away from the active area of an opto-electronic sensor-array, without any lenses in between. The strong absorption of this UV wavelength by biomolecules including nucleic acids and proteins has further enabled high-contrast imaging of nanoscopic aggregates of biomolecules, e.g., of enzyme Cu/Zn-superoxide dismutase, abnormal aggregation of which is linked to amyotrophic lateral sclerosis (ALS) - a fatal neurodegenerative disease. This UV-based wide-field computational imaging platform could be valuable for numerous applications in biomedical sciences and environmental monitoring, including disease diagnostics, viral load measurements as well as air- and water-quality assessment.

  12. Marker Pen Lithography for Flexible and Curvilinear On-Chip Energy Storage

    KAUST Repository

    Jiang, Qiu

    2015-07-14

    On-chip energy storage using microsupercapacitors can serve the dual role of supplementing batteries for pulse power delivery, and replacement of bulky electrolytic capacitors in ac-line filtering applications. Despite complexity and processing costs, microfabrication techniques are being employed in fabricating a great variety of microsupercapacitor devices. Here, a simple, cost-effective, and versatile strategy is proposed to fabricate flexible and curvilinear microsupercapacitors (MSCs). The protocol involves writing sacrificial ink patterns using commercial marker pens on rigid, flexible, and curvilinear substrates. It is shown that this process can be used in both lift-off and etching modes, and the possibility of multistack design of active materials using simple pen lithography is demonstrated. As a prototype, this method is used to produce conducting polymer MSCs involving both poly(3,4-ethylenedioxythiophene), polyaniline, and metal oxide (MnO2) electrode materials. Typical values of energy density in the range of 5-11 mWh cm-3 at power densities of 1-6 W cm-3 are achieved, which is comparable to thin film batteries and superior to the carbon and metal oxide based microsupercapacitors reported in the literature. The simplicity and broad scope of this innovative strategy can open up new avenues for easy and scalable fabrication of a wide variety of on-chip energy storage devices. © 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim.

  13. Diatomite Photonic Crystals for Facile On-Chip Chromatography and Sensing of Harmful Ingredients from Food.

    Science.gov (United States)

    Kong, Xianming; Yu, Qian; Li, Erwen; Wang, Rui; Liu, Qing; Wang, Alan X

    2018-03-31

    Diatomaceous earth-otherwise called diatomite-is essentially composed of hydrated biosilica with periodic nanopores. Diatomite is derived from fossilized remains of diatom frustules and possesses photonic-crystal features. In this paper, diatomite simultaneously functions as the matrix of the chromatography plate and the substrate for surface-enhanced Raman scattering (SERS), by which the photonic crystal-features could enhance the optical field intensity. The on-chip separation performance of the device was confirmed by separating and detecting industrial dye (Sudan I) in an artificial aqueous mixture containing 4-mercaptobenzoic acid (MBA), where concentrated plasmonic Au colloid was casted onto the analyte spot for SERS measurement. The plasmonic-photonic hybrid mode between the Au nanoparticles (NP) and the diatomite layer could supply nearly 10 times the increment of SERS signal (MBA) intensity compared to the common silica gel chromatography plate. Furthermore, this lab-on-a-chip photonic crystal device was employed for food safety sensing in real samples and successfully monitored histamine in salmon and tuna. This on-chip food sensor can be used as a cheap, robust, and portable sensing platform for monitoring for histamine or other harmful ingredients at trace levels in food products.

  14. Embedded memory design for multi-core and systems on chip

    CERN Document Server

    Mohammad, Baker

    2014-01-01

    This book describes the various tradeoffs systems designers face when designing embedded memory.  Readers designing multi-core systems and systems on chip will benefit from the discussion of different topics from memory architecture, array organization, circuit design techniques and design for test.  The presentation enables a multi-disciplinary approach to chip design, which bridges the gap between the architecture level and circuit level, in order to address yield, reliability and power-related issues for embedded memory.  ·         Provides a comprehensive overview of embedded memory design and associated challenges and choices; ·         Explains tradeoffs and dependencies across different disciplines involved with multi-core and system on chip memory design; ·         Includes detailed discussion of memory hierarchy and its impact on energy and performance; ·         Uses real product examples to demonstrate embedded memory design flow from architecture, to circuit ...

  15. Network Partitioning Domain Knowledge Multiobjective Application Mapping for Large-Scale Network-on-Chip

    Directory of Open Access Journals (Sweden)

    Yin Zhen Tei

    2014-01-01

    Full Text Available This paper proposes a multiobjective application mapping technique targeted for large-scale network-on-chip (NoC. As the number of intellectual property (IP cores in multiprocessor system-on-chip (MPSoC increases, NoC application mapping to find optimum core-to-topology mapping becomes more challenging. Besides, the conflicting cost and performance trade-off makes multiobjective application mapping techniques even more complex. This paper proposes an application mapping technique that incorporates domain knowledge into genetic algorithm (GA. The initial population of GA is initialized with network partitioning (NP while the crossover operator is guided with knowledge on communication demands. NP reduces the large-scale application mapping complexity and provides GA with a potential mapping search space. The proposed genetic operator is compared with state-of-the-art genetic operators in terms of solution quality. In this work, multiobjective optimization of energy and thermal-balance is considered. Through simulation, knowledge-based initial mapping shows significant improvement in Pareto front compared to random initial mapping that is widely used. The proposed knowledge-based crossover also shows better Pareto front compared to state-of-the-art knowledge-based crossover.

  16. Computational On-Chip Imaging of Nanoparticles and Biomolecules using Ultraviolet Light

    KAUST Repository

    Daloglu, Mustafa Ugur

    2017-03-09

    Significant progress in characterization of nanoparticles and biomolecules was enabled by the development of advanced imaging equipment with extreme spatial-resolution and sensitivity. To perform some of these analyses outside of well-resourced laboratories, it is necessary to create robust and cost-effective alternatives to existing high-end laboratory-bound imaging and sensing equipment. Towards this aim, we have designed a holographic on-chip microscope operating at an ultraviolet illumination wavelength (UV) of 266 nm. The increased forward scattering from nanoscale objects at this short wavelength has enabled us to detect individual sub-30 nm nanoparticles over a large field-of-view of >16 mm2 using an on-chip imaging platform, where the sample is placed at ≤0.5 mm away from the active area of an opto-electronic sensor-array, without any lenses in between. The strong absorption of this UV wavelength by biomolecules including nucleic acids and proteins has further enabled high-contrast imaging of nanoscopic aggregates of biomolecules, e.g., of enzyme Cu/Zn-superoxide dismutase, abnormal aggregation of which is linked to amyotrophic lateral sclerosis (ALS) - a fatal neurodegenerative disease. This UV-based wide-field computational imaging platform could be valuable for numerous applications in biomedical sciences and environmental monitoring, including disease diagnostics, viral load measurements as well as air- and water-quality assessment.

  17. On-chip multicomponent system made with an InGaN directional coupler.

    Science.gov (United States)

    Zhang, Fenghua; Shi, Zheng; Gao, Xumin; Qin, Chuan; Zhang, Shuai; Jiang, Yan; Wu, Fan; Wang, Yongjin

    2018-04-15

    An on-chip multicomponent system is implemented on a III-nitride-on-silicon platform by integrating a transmitter, InGaN waveguide, InGaN directional coupler, and receivers onto a single chip. The transmitter and the receiver share an identical InGaN/GaN multiple-quantum-well (MQW) diode structure and are produced by using the same wafer-level process flow. The receiver sensitively responds to the short-wavelength half of the emission spectrum of the transmitter, thus realizing the multicomponent system with the capability for inplane light communication. A SiO 2 isolation layer is employed to decrease the p-n junction capacitance, thus improving the modulation rate without modifying the MQW structure. The wire-bonded monolithic multicomponent system experimentally demonstrates inplane data transmission at 80 Mbps and spatial light communication at 100 Mbps, paving the way for diverse applications from on-chip power monitoring to inplane light communication in the visible light spectrum.

  18. A compact HTS bandpass microstrip filter with novel coupling structure for on-chip integration

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, Ting, E-mail: ting.zhang@csiro.au [CSIRO ICT Centre, Epping, NSW 1710 (Australia); Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050 (China); Du, Jia [CSIRO Materials Science and Engineering, PO Box 218, Lindfield, NSW 2070 (Australia); Guo, Yingjie Jay [CSIRO ICT Centre, Epping, NSW 1710 (Australia); Sun, Xiaowei [Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050 (China)

    2013-12-15

    Highlights: •A novel coupling scheme is used to introduce two transmission zeros using only three resonators. •The filter has a low insertion loss at 40 K, and a wide stopband with good rejection. •The filter has compactness and high-selectivity. •The filter is a suitable candidate for on-chip integration of HTS receiver front-ends. -- Abstract: A compact low-complexity high-selectivity high-temperature superconducting (HTS) microstrip bandpass filter is presented in this paper, which consists of only three half-wavelength resonators. A novel coupling scheme is used to provide a pair of transmission zeros outside the passband, so that the selectivity of the filter is improved. The filter is fabricated on an MgO substrate with YBa{sub 2}Cu{sub 3}O{sub 7−x} (YBCO) coating. Measurement result shows an in-band insertion loss at 0.5 dB, a sharp slope, and a stopband rejection better than 20 dB. The compactness and high-selectivity features make the filter suitable for on-chip integration of HTS receiver front-ends.

  19. On-chip real-time single-copy polymerase chain reaction in picoliter droplets

    Energy Technology Data Exchange (ETDEWEB)

    Beer, N R; Hindson, B; Wheeler, E; Hall, S B; Rose, K A; Kennedy, I; Colston, B

    2007-04-20

    The first lab-on-chip system for picoliter droplet generation and PCR amplification with real-time fluorescence detection has performed PCR in isolated droplets at volumes 10{sup 6} smaller than commercial real-time PCR systems. The system utilized a shearing T-junction in a silicon device to generate a stream of monodisperse picoliter droplets that were isolated from the microfluidic channel walls and each other by the oil phase carrier. An off-chip valving system stopped the droplets on-chip, allowing them to be thermal cycled through the PCR protocol without droplet motion. With this system a 10-pL droplet, encapsulating less than one copy of viral genomic DNA through Poisson statistics, showed real-time PCR amplification curves with a cycle threshold of {approx}18, twenty cycles earlier than commercial instruments. This combination of the established real-time PCR assay with digital microfluidics is ideal for isolating single-copy nucleic acids in a complex environment.

  20. HARDWARE IMPLEMENTATION OF PIPELINE BASED ROUTER DESIGN FOR ON-CHIP NETWORK

    Directory of Open Access Journals (Sweden)

    U. Saravanakumar

    2012-12-01

    Full Text Available As the feature size is continuously decreasing and integration density is increasing, interconnections have become a dominating factor in determining the overall quality of a chip. Due to the limited scalability of system bus, it cannot meet the requirement of current System-on-Chip (SoC implementations where only a limited number of functional units can be supported. Long global wires also cause many design problems, such as routing congestion, noise coupling, and difficult timing closure. Network-on-Chip (NoC architectures have been proposed to be an alternative to solve the above problems by using a packet-based communication network. In this paper, the Circuit-Switched (CS Router was designed and analysed the various parameters such as power, timing and area. The CS router has taken more number of cycles to transfer the data from source to destination. So the pipelining concept was implemented by adding registers in the CS router architecture. The proposed architecture increases the speed of operation and reduces the critical path of the circuit. The router has been implemented using Verilog HDL. The parameters area, power and timing were calculated in 130 nm CMOS technology using Synopsys tool with nominal operating voltage of 1V and packet size is 39 bits. Finally power, area and time of these two routers have been analysed and compared.

  1. Intelligent On/Off Dynamic Link Management for On-Chip Networks

    Directory of Open Access Journals (Sweden)

    Andreas G. Savva

    2012-01-01

    Full Text Available Networks-on-chips (NoCs provide scalable on-chip communication and are expected to be the dominant interconnection architectures in multicore and manycore systems. Power consumption, however, is a major limitation in NoCs today, and researchers have been constantly working on reducing both dynamic and static power. Among the NoC components, links that connect the NoC routers are the most power-hungry components. Several attempts have been made to reduce the link power consumption at both the circuit level and the system level. Most past research efforts have proposed selective on/off link state switching based on system-level information based on link utilization levels. Most of these proposed algorithms focus on a pessimistic and simple static threshold mechanism which determines whether or not a link should be turned on/off. This paper presents an intelligent dynamic power management policy for NoCs with improved predictive abilities based on supervised online learning of the system status (i.e., expected future utilization link levels, where links are turned off and on via the use of a small and scalable neural network. Simulation results with various synthetic traffic models over various network topologies show that the proposed work can reach up to 13% power savings when compared to a trivial threshold computation, at very low (<4% hardware overheads.

  2. Source-synchronous networks-on-chip circuit and architectural interconnect modeling

    CERN Document Server

    Mandal, Ayan; Mahapatra, Rabi

    2014-01-01

    This book describes novel methods for network-on-chip (NoC) design, using source-synchronous high-speed resonant clocks.  The authors discuss NoCs from the bottom up, providing circuit level details, before providing architectural simulations. As a result, readers will get a complete picture of how a NoC can be designed and optimized.  Using the methods described in this book, readers are enabled to design NoCs that are 5X better than existing approaches in terms of latency and throughput and can also sustain a significantly greater amount of traffic.   • Describes novel methods for high-speed network-on-chip (NoC) design; • Enables readers to understand NoC design from both circuit and architectural levels; • Provides circuit-level details of the NoC (including clocking, router design), along with a high-speed, resonant clocking style which is used in the NoC; • Includes architectural simulations of the NoC, demonstrating significantly superior performance over the state-of-the-art.

  3. Nature-inspired interconnects for self-assembled large-scale network-on-chip designs

    Science.gov (United States)

    Teuscher, Christof

    2007-06-01

    Future nanoscale electronics built up from an Avogadro number of components need efficient, highly scalable, and robust means of communication in order to be competitive with traditional silicon approaches. In recent years, the networks-on-chip (NoC) paradigm emerged as a promising solution to interconnect challenges in silicon-based electronics. Current NoC architectures are either highly regular or fully customized, both of which represent implausible assumptions for emerging bottom-up self-assembled molecular electronics that are generally assumed to have a high degree of irregularity and imperfection. Here, we pragmatically and experimentally investigate important design tradeoffs and properties of an irregular, abstract, yet physically plausible three-dimensional (3D) small-world interconnect fabric that is inspired by modern network-on-chip paradigms. We vary the framework's key parameters, such as the connectivity, number of switch nodes, and distribution of long- versus short-range connections, and measure the network's relevant communication characteristics. We further explore the robustness against link failures and the ability and efficiency to solve a simple toy problem, the synchronization task. The results confirm that (1) computation in irregular assemblies is a promising and disruptive computing paradigm for self-assembled nanoscale electronics and (2) that 3D small-world interconnect fabrics with a power-law decaying distribution of shortcut lengths are physically plausible and have major advantages over local two-dimensional and 3D regular topologies.

  4. Fast Detection Anti-Collision Algorithm for RFID System Implemented On-Chip

    Science.gov (United States)

    Sampe, Jahariah; Othman, Masuri

    This study presents a proposed Fast Detection Anti-Collision Algorithm (FDACA) for Radio Frequency Identification (RFID) system. Our proposed FDACA is implemented on-chip using Application Specific Integrated Circuit (ASIC) technology and the algorithm is based on the deterministic anti-collision technique. The FDACA is novel in terms of a faster identification by reducing the number of iterations during the identification process. The primary FDACA also reads the identification (ID) bits at once regardless of its length. It also does not require the tags to remember the instructions from the reader during the communication process in which the tags are treated as address carrying devices only. As a result simple, small, low cost and memoryless tags can be produced. The proposed system is designed using Verilog HDL. The system is simulated using Modelsim XE II and synthesized using Xilinx Synthesis Technology (XST). The system is implemented in hardware using Field Programmable Grid Array (FPGA) board for real time verification. From the verification results it can be shown that the FDACA system enables to identify the tags without error until the operating frequency of 180 MHZ. Finally the FDACA system is implemented on chip using 0.18 μm Library, Synopsys Compiler and tools. From the resynthesis results it shows that the identification rate of the proposed FDACA system is 333 Mega tags per second with the power requirement of 3.451 mW.

  5. Advances in liquid biopsy on-chip for cancer management: Technologies, biomarkers, and clinical analysis.

    Science.gov (United States)

    Tadimety, Amogha; Closson, Andrew; Li, Cathy; Yi, Song; Shen, Ting; Zhang, John X J

    2018-02-01

    Liquid biopsy, as a minimally invasive method of gleaning insight into the dynamics of diseases through a patient fluid sample, has been growing in popularity for cancer diagnosis, prognosis, and monitoring. While many technologies have been developed and validated in research laboratories, there has also been a push to expand these technologies into other clinical settings and as point of care devices. In this article, we discuss and evaluate microchip-based technologies for circulating tumor cell (CTC), exosome, and circulating tumor nucleic acid (ctNA) capture, detection, and analysis. Such integrated systems streamline otherwise multiple-step, manual operations to get a sample-to-answer quantitation. In addition, analysis of disease biomarkers is suited to point of care settings because of ease of use, low consumption of sample and reagents, and high throughput. We also cover the basics of biomarkers and their detection in biological fluid samples suitable for liquid biopsy on-chip. We focus on emerging technologies that process a small patient sample with high spatial-temporal resolution and derive clinically meaningful results through on-chip biomarker sensing and downstream molecular analysis in a simple workflow. This critical review is meant as a resource for those interested in developing technologies for capture, detection, and analysis platforms for liquid biopsy in a variety of settings.

  6. An Implantable Cardiovascular Pressure Monitoring System with On-Chip Antenna and RF Energy Harvesting

    Directory of Open Access Journals (Sweden)

    Yu-Chun Liu

    2015-08-01

    Full Text Available An implantable wireless system with on-chip antenna for cardiovascular pressure monitor is studied. The implantable device is operated in a batteryless manner, powered by an external radio frequency (RF power source. The received RF power level can be sensed and wirelessly transmitted along with blood pressure signal for feedback control of the external RF power. The integrated electronic system, consisting of a capacitance-to-voltage converter, an adaptive RF powering system, an RF transmitter and digital control circuitry, is simulated using a TSMC 0.18 μm CMOS technology. The implanted RF transmitter circuit is combined with a low power voltage-controlled oscillator resonating at 5.8 GHz and a power amplifier. For the design, the simulation model is setup using ADS and HFSS software. The dimension of the antenna is 1 × 0.6 × 4.8 mm3 with a 1 × 0.6 mm2 on-chip circuit which is small enough to place in human carotid artery.

  7. Priming nanoparticle-guided diagnostics and therapeutics towards human organs-on-chips microphysiological system

    Science.gov (United States)

    Choi, Jin-Ha; Lee, Jaewon; Shin, Woojung; Choi, Jeong-Woo; Kim, Hyun Jung

    2016-10-01

    Nanotechnology and bioengineering have converged over the past decades, by which the application of multi-functional nanoparticles (NPs) has been emerged in clinical and biomedical fields. The NPs primed to detect disease-specific biomarkers or to deliver biopharmaceutical compounds have beena validated in conventional in vitro culture models including two dimensional (2D) cell cultures or 3D organoid models. However, a lack of experimental models that have strong human physiological relevance has hampered accurate validation of the safety and functionality of NPs. Alternatively, biomimetic human "Organs-on-Chips" microphysiological systems have recapitulated the mechanically dynamic 3D tissue interface of human organ microenvironment, in which the transport, cytotoxicity, biocompatibility, and therapeutic efficacy of NPs and their conjugates may be more accurately validated. Finally, integration of NP-guided diagnostic detection and targeted nanotherapeutics in conjunction with human organs-on-chips can provide a novel avenue to accelerate the NP-based drug development process as well as the rapid detection of cellular secretomes associated with pathophysiological processes.

  8. Genotyping of KRAS Mutational Status by the In-Check Lab-on-Chip Platform.

    Science.gov (United States)

    Guarnaccia, Maria; Iemmolo, Rosario; San Biagio, Floriana; Alessi, Enrico; Cavallaro, Sebastiano

    2018-01-05

    The KRAS oncogene is involved in the pathogenesis of several types of cancer, particularly colorectal cancer (CRC). The most frequent mutations in this gene are associated with poor survival, increased tumor aggressiveness and resistance to therapy with anti-epidermal growth factor receptor (EGFR) antibodies. For this reason, KRAS mutation testing has become increasingly common in clinical practice for personalized cancer treatments of CRC patients. Detection methods for KRAS mutations are currently expensive, laborious, time-consuming and often lack of diagnostic sensitivity and specificity. In this study, we describe the development of a Lab-on-Chip assay for genotyping of KRAS mutational status. This assay, based on the In-Check platform, integrates microfluidic handling, a multiplex polymerase chain reaction (PCR) and a low-density microarray. This integrated sample-to-result system enables the detection of KRAS point mutations, including those occurring in codons 12 and 13 of exon 2, 59 and 61 of exon 3, 117 and 146 of exon 4. Thanks to its miniaturization, automation, rapid analysis, minimal risk of sample contamination, increased accuracy and reproducibility of results, this Lab-on-Chip platform may offer immediate opportunities to simplify KRAS genotyping into clinical routine.

  9. Genotyping of KRAS Mutational Status by the In-Check Lab-on-Chip Platform

    Directory of Open Access Journals (Sweden)

    Maria Guarnaccia

    2018-01-01

    Full Text Available The KRAS oncogene is involved in the pathogenesis of several types of cancer, particularly colorectal cancer (CRC. The most frequent mutations in this gene are associated with poor survival, increased tumor aggressiveness and resistance to therapy with anti-epidermal growth factor receptor (EGFR antibodies. For this reason, KRAS mutation testing has become increasingly common in clinical practice for personalized cancer treatments of CRC patients. Detection methods for KRAS mutations are currently expensive, laborious, time-consuming and often lack of diagnostic sensitivity and specificity. In this study, we describe the development of a Lab-on-Chip assay for genotyping of KRAS mutational status. This assay, based on the In-Check platform, integrates microfluidic handling, a multiplex polymerase chain reaction (PCR and a low-density microarray. This integrated sample-to-result system enables the detection of KRAS point mutations, including those occurring in codons 12 and 13 of exon 2, 59 and 61 of exon 3, 117 and 146 of exon 4. Thanks to its miniaturization, automation, rapid analysis, minimal risk of sample contamination, increased accuracy and reproducibility of results, this Lab-on-Chip platform may offer immediate opportunities to simplify KRAS genotyping into clinical routine.

  10. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, Haishan; Vermeer, Cristian Hendrik; Vanapalli, Srinivas; Holland, Herman J.; ter Brake, Hermanus J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has

  11. Micromachining of AlN and Al2O3 Using Fiber Laser

    Directory of Open Access Journals (Sweden)

    Florian Preusch

    2014-11-01

    Full Text Available We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%. A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%. In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

  12. Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope

    Science.gov (United States)

    2016-10-19

    TECHNICAL DOCUMENT 3308 September 2016 Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope Andrew B. Sabater Paul...angular random walk (ARW), bias instability, and scale factor instability. While there are methods to address issues with bias and scale factor...8 4. ANGULAR RANDOM WALK CHARACTERIZATION

  13. Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2005-01-01

    We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

  14. Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

  15. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

  16. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  17. Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

    Science.gov (United States)

    Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

    2018-05-01

    There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

  18. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  19. A manufacturing method for multi-layer polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.

    1998-01-01

    An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

  20. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

    NARCIS (Netherlands)

    Dumitrescu, Marius; Cobianu, Cornel; Lungu, Dan; Pascu, Adrian; Kolev, Spas; van den Berg, Albert

    1999-01-01

    A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an

  1. Unique Femtosecond Micromachining Methods in Semi-Insulating and Conducting Silicon Carbide (Preprint)

    National Research Council Canada - National Science Library

    Brewer, Chris; Dorsey, Don; Campbell, Angela; Juhl, Shane; DesAutels, G. L; Finet, Marc; Ristich, Scott; Whitaker, Matt; Powers, Peter E; Zhan, Qiwen

    2007-01-01

    ...); a wide bandgap semiconductor material provided by Wright-Patterson AFB AFRL/MLPS. Gratings were micro-machined into these materials using a novel anamorphic lens design and an automated x, y, z linear stage to control the sample position...

  2. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  3. Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

    NARCIS (Netherlands)

    Sarajlic, Edin; Vermeer, Rolf; Delalande, M.Y.; Siekman, Martin Herman; Huijink, R.; Fujita, H.; Abelmann, Leon

    2010-01-01

    We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon

  4. Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures

    NARCIS (Netherlands)

    Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2004-01-01

    We report a novel micromachining process to fabricate AlN (Aluminum Nitride) piezoelectric microstructures for actuator applications. Piezoelectric AlN thin films can be grown with (002) preferential orientation by means of RF reactive sputtering on various substrates. For this study, AlN was

  5. Gain-Enhanced On-Chip Antenna Utilizing Artificial Magnetic Conductor Reflecting Surface at 94 GHz

    KAUST Repository

    Nafe, Mahmoud

    2015-08-04

    Nowadays, there is a growing demand for high frequency-bandwidth mm-wave (30-300 GHz) electronic wireless transceiver systems to support applications such as high data-rate wireless communication and high resolution imaging. Such mm-wave systems are becoming more feasible due to the extreme transistor downscaling in silicon-based integrated circuits, which enabled densely-integrated high-speed elec- tronics operating up to more than 100 GHz with low fabrication cost. To further enhance system integrability, it is required to implement all wireless system compo- nents on the chip. Presently, the last major barrier to true System-on-Chip (SoC) realization is the antenna implementation on the silicon chip. Although at mm-wave frequencies the antenna size becomes small enough to fit on chip, the antenna performance is greatly deteriorated due the high conductivity and high relative permittivity of the silicon substrate. The negative e↵ects of the silicon substrate could be avoided by using a metallic reflecting surface on top of silicon, which e↵ectively isolates the antenna from the silicon. However, this approach has the shortcoming of having to implement the antenna on the usually very thin silicon oxide layer of a typical CMOS fabrication process (10’s of μm). This forces the antenna to be in a very close proximity (less than one hundredth of a wavelength) to the reflecting surface. In this regime, the use of conventional metallic reflecting surface for silicon shielding has severe e↵ects on the antenna performance as it tends to reduce the antenna radiation resistance resulting in most of the energy being absorbed rather than radiated. In this work, the use of specially patterned reflecting surfaces for improving on- chip antenna performance is investigated. By using a periodic metallic surface on top of a grounded substrate, the structure can mimic the behavior of a perfect mag- netic conductor, hence called Artificial Magnetic Conductor (AMC) surface

  6. Novel silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, J.G.; Barron, C.C.

    1995-08-01

    Bulk micromachining generally refers to processes involving wet chemical etching of structures formed out of the silicon substrate and so is limited to fairly large, crude structures. Surface micromachining allows intricate patterning of thin films of polysilicon and other materials to form essentially two-dimensional layered parts (since the thickness of the parts is limited by the thickness of the deposited films). There is a third type of micromachining in which the part is formed by filling a mold which was defined by photolithographic means. Historically micromachining molds have been formed in some sort of photopolymer, be it with x-ray lithography (``LIGA``) or more conventional UV lithography, with the aim of producing piece parts. Recently, however, several groups including ours at Sandia have independently come up with the idea of forming the mold for mechanical parts by etching into the silicon substrate itself. In Sandia`s mold process, the mold is recessed into the substrate using a deep silicon trench etch, lined with a sacrificial or etch-stop layer, and then filled with any of a number of mechanical materials. The completed structures are not ejected from the mold to be used as piece parts rather, the mold is dissolved from around selected movable segments of the parts, leaving the parts anchored to the substrate. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {mu}m) rather than the thickness of deposited polysilicon (typically 2 {mu}m). The capability of fabricating thicker (and therefore much stiffer and more massive) parts is critical for motion-sensing structures involving large gimballed platforms, proof masses, etc.

  7. A CMOS Gm-C complex filter with on-chip automatic tuning for wireless sensor network application

    International Nuclear Information System (INIS)

    Wan Chuanchuan; Li Zhiqun; Hou Ningbing

    2011-01-01

    A G m -C complex filter with on-chip automatic tuning for wireless sensor networks is designed and implemented using 0.18 μm CMOS process. This filter is synthesized from a low-pass 5th-order Chebyshev RLC ladder filter prototype by means of capacitors and fully balanced transconductors. A conventional phase-locked loop is used to realize the on-chip automatic tuning for both center frequency and bandwidth control. The filter is centered at 2 MHz with a bandwidth of 2.4 MHz. The measured results show that the filter provides more than 45 dB image rejection while the ripple in the pass-band is less than 1.2 dB. The complete filter including on-chip tuning circuit consumes 4.9 mA with 1.8 V single supply voltage. (semiconductor integrated circuits)

  8. Ultra-Low Threshold Power On-Chip Optical Parametric Oscillation in AlGaAs-On-Insulator Microresonator

    DEFF Research Database (Denmark)

    Pu, Minhao; Ottaviano, Luisa; Semenova, Elizaveta

    2015-01-01

    We present a record-low threshold power of 7 mW at ~1.55 µm for on-chip optical parametric oscillation using a high quality factor micro-ring-resonator in a new nonlinear photonics platform: AlGaAs-on-insulator......We present a record-low threshold power of 7 mW at ~1.55 µm for on-chip optical parametric oscillation using a high quality factor micro-ring-resonator in a new nonlinear photonics platform: AlGaAs-on-insulator...

  9. Analysis of Protein-DNA Interaction by Chromatin Immunoprecipitation and DNA Tiling Microarray (ChIP-on-chip).

    Science.gov (United States)

    Gao, Hui; Zhao, Chunyan

    2018-01-01

    Chromatin immunoprecipitation (ChIP) has become the most effective and widely used tool to study the interactions between specific proteins or modified forms of proteins and a genomic DNA region. Combined with genome-wide profiling technologies, such as microarray hybridization (ChIP-on-chip) or massively parallel sequencing (ChIP-seq), ChIP could provide a genome-wide mapping of in vivo protein-DNA interactions in various organisms. Here, we describe a protocol of ChIP-on-chip that uses tiling microarray to obtain a genome-wide profiling of ChIPed DNA.

  10. A power efficient 2Gb/s transceiver in 90nm CMOS for 10mm On-Chip interconnect

    OpenAIRE

    Mensink, E.; Schinkel, Daniel; Klumperink, Eric A.M.; van Tuijl, Adrianus Johannes Maria; Nauta, Bram

    2007-01-01

    Abstract—Global on-chip data communication is becoming a concern as the gap between transistor speed and interconnect bandwidth increases with CMOS process scaling. In this paper a low-swing transceiver for 10mm long 0.54μm wide on-chip interconnect is presented, which achieves a similar data rate as previous designs (a few Gb/s), but at much lower power than recently published work. Both low static power and low dynamic power (low energy per bit) is aimed for. A capacitive pre-emphasis trans...

  11. A Smart Mobile Lab-on-Chip-Based Medical Diagnostics System Architecture Designed For Evolvability

    DEFF Research Database (Denmark)

    Patou, François; Dimaki, Maria; Svendsen, Winnie Edith

    2015-01-01

    Unprecedented knowledge levels in life sciences along with technological advances in micro- and nanotechnologies and microfluidics have recently conditioned the advent of Lab-on-Chip (LoC) devices for In-Vitro Medical Testing (IVMT). Combined with smart-mobile technologies, LoCs are pervasively...... giving rise to opportunities to better diagnose disease, predict and monitor personalised treatment efficacy, or provide healthcare decision-making support at the Point-of-Care (PoC). Although made increasingly available to the consumer market, the adoption of LoC-based PoC In-Vitro Medical Testing (IVMT...... for this work. We introduce a smart-mobile and LoC-based system architecture designed for evolvability. By propagating LoC programmability, instrumentation, and control tools to the highlevel abstraction smart-mobile software layer, our architecture facilitates the realisation of new use...

  12. Chalcogenide based rib waveguide for compact on-chip supercontinuum sources in mid-infrared domain

    Science.gov (United States)

    Saini, Than Singh; Tiwari, Umesh Kumar; Sinha, Ravindra Kumar

    2017-08-01

    We have designed and analysed a rib waveguide structure in recently reported Ga-Sb-S based highly nonlinear chalcogenide glass for nonlinear applications. The proposed waveguide structure possesses a very high nonlinear coefficient and can be used to generate broadband supercontinuum in mid-infrared domain. The reported design of the chalcogenide waveguide offers two zero dispersion values at 1800 nm and 2900 nm. Such rib waveguide structure is suitable to generate efficient supercontinuum generation ranging from 500 - 7400 μm. The reported waveguide can be used for the realization of the compact on-chip supercontinuum sources which are highly applicable in optical imaging, optical coherence tomography, food quality control, security and sensing.

  13. On-chip magnetically actuated robot with ultrasonic vibration for single cell manipulations.

    Science.gov (United States)

    Hagiwara, Masaya; Kawahara, Tomohiro; Yamanishi, Yoko; Masuda, Taisuke; Feng, Lin; Arai, Fumihito

    2011-06-21

    This paper presents an innovative driving method for an on-chip robot actuated by permanent magnets in a microfluidic chip. A piezoelectric ceramic is applied to induce ultrasonic vibration to the microfluidic chip and the high-frequency vibration reduces the effective friction on the MMT significantly. As a result, we achieved 1.1 micrometre positioning accuracy of the microrobot, which is 100 times higher accuracy than without vibration. The response speed is also improved and the microrobot can be actuated with a speed of 5.5 mm s(-1) in 3 degrees of freedom. The novelty of the ultrasonic vibration appears in the output force as well. Contrary to the reduction of friction on the microrobot, the output force increased twice as much by the ultrasonic vibration. Using this high accuracy, high speed, and high power microrobot, swine oocyte manipulations are presented in a microfluidic chip.

  14. Variable-Width Datapath for On-Chip Network Static Power Reduction

    Energy Technology Data Exchange (ETDEWEB)

    Michelogiannakis, George; Shalf, John

    2013-11-13

    With the tight power budgets in modern large-scale chips and the unpredictability of application traffic, on-chip network designers are faced with the dilemma of designing for worst- case bandwidth demands and incurring high static power overheads, or designing for an average traffic pattern and risk degrading performance. This paper proposes adaptive bandwidth networks (ABNs) which divide channels and switches into lanes such that the network provides just the bandwidth necessary in each hop. ABNs also activate input virtual channels (VCs) individually and take advantage of drowsy SRAM cells to eliminate false VC activations. In addition, ABNs readily apply to silicon defect tolerance with just the extra cost for detecting faults. For application traffic, ABNs reduce total power consumption by an average of 45percent with comparable performance compared to single-lane power-gated networks, and 33percent compared to multi-network designs.

  15. An Asynchronous Time-Division-Multiplexed Network-on-Chip for Real-Time Systems

    DEFF Research Database (Denmark)

    Kasapaki, Evangelia

    applied at its endpoints, the NIs. Overall this thesis presents the design and implementation of Argo, and the analysis of its elastic behavior. It shows that Argo provides hard real-time guarantees in a straightforward way, it has an efficient implementation and it is time-elastic....... the elasticity and its limits. A quantitative analysis models the Argo behavior using timed-graph models and worstcase timing separation of events analysis to evaluate the elasticity of Argo. The results show that the skew absorbed by the network of routers can be two or more cycles, depending on the frequency......Multi-processor architectures using networks-on-chip (NOCs) for communication are becoming the standard approach in the development of embedded systems and general purpose platforms. Typically, multi-processor platforms follow a globally asynchronous locally synchronous (GALS) timing organization...

  16. A novel single-step, multipoint calibration method for instrumented Lab-on-Chip systems

    DEFF Research Database (Denmark)

    Pfreundt, Andrea; Patou, François; Zulfiqar, Azeem

    2014-01-01

    Despite recent and substantial advances in biosensing, information and communication, and Lab-on-Chip (LoC) technologies, the success of Point-of-Care (PoC) diagnostics and monitoring systems is still challenged by stringent requirements for robustness, cost-effectiveness, and system integration....... The pitfalls of PoC system adoption can be addressed early in the system design phase. They require a multidisciplinary design approach supported by systems engineering tools and methods. Considering this, we here present both a model and an implementation of a simple and rapid calibration scheme...... for instrument-based PoC blood biomarker analysis systems. Motivated by the complexity of associating high-accuracy biosensing using silicon nanowire field effect transistors with ease of use for the PoC system user, we propose a novel one-step, multipoint calibration method for LoC-based systems. Our approach...

  17. A multi-chip data acquisition system based on a heterogeneous system-on-chip platform

    CERN Document Server

    Fiergolski, Adrian

    2017-01-01

    The Control and Readout Inner tracking BOard (CaRIBOu) is a versatile readout system targeting a multitude of detector prototypes. It profits from the heterogeneous platform of the Zynq System-on-Chip (SoC) and integrates in a monolithic device front-end FPGA resources with a back-end software running on a hard-core ARM-based processor. The user-friendly Linux terminal with the pre-installed DAQ software is combined with the efficiency and throughput of a system fully implemented in the FPGA fabric. The paper presents the design of the SoC-based DAQ system and its building blocks. It also shows examples of the achieved functionality for the CLICpix2 readout ASIC.

  18. Perforated hollow-core optical waveguides for on-chip atomic spectroscopy and gas sensing.

    Science.gov (United States)

    Giraud-Carrier, M; Hill, C; Decker, T; Black, J A; Schmidt, H; Hawkins, A

    2016-03-28

    A hollow-core waveguide structure for on-chip atomic spectroscopy is presented. The devices are based on Anti-Resonant Reflecting Optical Waveguides and may be used for a wide variety of applications which rely on the interaction of light with gases and vapors. The designs presented here feature short delivery paths of the atomic vapor into the hollow waveguide. They also have excellent environmental stability by incorporating buried solid-core waveguides to deliver light to the hollow cores. Completed chips were packaged with an Rb source and the F = 3 ≥ F' = 2, 3, 4 transitions of the D2 line in 85 Rb were monitored for optical absorption. Maximum absorption peak depths of 9% were measured.

  19. Lab-On-Chip Clinorotation System for Live-Cell Microscopy Under Simulated Microgravity

    Science.gov (United States)

    Yew, Alvin G.; Atencia, Javier; Chinn, Ben; Hsieh, Adam H.

    2013-01-01

    Cells in microgravity are subject to mechanical unloading and changes to the surrounding chemical environment. How these factors jointly influence cellular function is not well understood. We can investigate their role using ground-based analogues to spaceflight, where mechanical unloading is simulated through the time-averaged nullification of gravity. The prevailing method for cellular microgravity simulation is to use fluid-filled containers called clinostats. However, conventional clinostats are not designed for temporally tracking cell response, nor are they able to establish dynamic fluid environments. To address these needs, we developed a Clinorotation Time-lapse Microscopy (CTM) system that accommodates lab-on- chip cell culture devices for visualizing time-dependent alterations to cellular behavior. For the purpose of demonstrating CTM, we present preliminary results showing time-dependent differences in cell area between human mesenchymal stem cells (hMSCs) under modeled microgravity and normal gravity.

  20. On-Chip Power-Combining for High-Power Schottky Diode-Based Frequency Multipliers

    Science.gov (United States)

    Chattopadhyay, Goutam; Mehdi, Imran; Schlecht, Erich T.; Lee, Choonsup; Siles, Jose V.; Maestrini, Alain E.; Thomas, Bertrand; Jung, Cecile D.

    2013-01-01

    A 1.6-THz power-combined Schottky frequency tripler was designed to handle approximately 30 mW input power. The design of Schottky-based triplers at this frequency range is mainly constrained by the shrinkage of the waveguide dimensions with frequency and the minimum diode mesa sizes, which limits the maximum number of diodes that can be placed on the chip to no more than two. Hence, multiple-chip power-combined schemes become necessary to increase the power-handling capabilities of high-frequency multipliers. The design presented here overcomes difficulties by performing the power-combining directly on-chip. Four E-probes are located at a single input waveguide in order to equally pump four multiplying structures (featuring two diodes each). The produced output power is then recombined at the output using the same concept.

  1. An on-chip silicon compact triplexer based on cascaded tilted multimode interference couplers

    Science.gov (United States)

    Chen, Jingye; Liu, Penghao; Shi, Yaocheng

    2018-03-01

    An on-chip triplexer based on cascaded tilted multimode interference (MMI) couplers has been demonstrated to separate the 1310 nm wavelength band into one port and 1490 nm and 1550 nm wavelength bands into the other two ports respectively. By utilizing the dispersive self-imaging and pseudo self-imaging, the device length is not critically determined by the common multiple of beat lengths for different wavelengths. The total device size can be reduced to ∼450 μm, which is half of the butterfly structure reported. The whole device, fabricated with only one fully-etching step, is characterized with <-15 dB low crosstalk (CT) and ∼1 dB insertion loss (IL).

  2. On-Chip Power-Combining for High-Power Schottky Diode Based Frequency Multipliers

    Science.gov (United States)

    Siles Perez, Jose Vicente (Inventor); Chattopadhyay, Goutam (Inventor); Lee, Choonsup (Inventor); Schlecht, Erich T. (Inventor); Jung-Kubiak, Cecile D. (Inventor); Mehdi, Imran (Inventor)

    2015-01-01

    A novel MMIC on-chip power-combined frequency multiplier device and a method of fabricating the same, comprising two or more multiplying structures integrated on a single chip, wherein each of the integrated multiplying structures are electrically identical and each of the multiplying structures include one input antenna (E-probe) for receiving an input signal in the millimeter-wave, submillimeter-wave or terahertz frequency range inputted on the chip, a stripline based input matching network electrically connecting the input antennas to two or more Schottky diodes in a balanced configuration, two or more Schottky diodes that are used as nonlinear semiconductor devices to generate harmonics out of the input signal and produce the multiplied output signal, stripline based output matching networks for transmitting the output signal from the Schottky diodes to an output antenna, and an output antenna (E-probe) for transmitting the output signal off the chip into the output waveguide transmission line.

  3. On-chip detection of gel transition temperature using a novel micro-thermomechanical method.

    Directory of Open Access Journals (Sweden)

    Tsenguun Byambadorj

    Full Text Available We present a new thermomechanical method and a platform to measure the phase transition temperature at microscale. A thin film metal sensor on a membrane simultaneously measures both temperature and mechanical strain of the sample during heating and cooling cycles. This thermomechanical principle of operation is described in detail. Physical hydrogel samples are prepared as a disc-shaped gels (200 μm thick and 1 mm diameter and placed between an on-chip heater and sensor devices. The sol-gel transition temperature of gelatin solution at various concentrations, used as a model physical hydrogel, shows less than 3% deviation from in-depth rheological results. The developed thermomechanical methodology is promising for precise characterization of phase transition temperature of thermogels at microscale.

  4. A Novel Analytical Model for Network-on-Chip using Semi-Markov Process

    Directory of Open Access Journals (Sweden)

    WANG, J.

    2011-02-01

    Full Text Available Network-on-Chip (NoC communication architecture is proposed to resolve the bottleneck of Multi-processor communication in a single chip. In this paper, a performance analytical model using Semi-Markov Process (SMP is presented to obtain the NoC performance. More precisely, given the related parameters, SMP is used to describe the behavior of each channel and the header flit routing time on each channel can be calculated by analyzing the SMP. Then, the average packet latency in NoC can be calculated. The accuracy of our model is illustrated through simulation. Indeed, the experimental results show that the proposed model can be used to obtain NoC performance and it performs better than the state-of-art models. Therefore, our model can be used as a useful tool to guide the NoC design process.

  5. On-Chip High-Finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

    Directory of Open Access Journals (Sweden)

    Mohammad H. Bitarafan

    2017-07-01

    Full Text Available For applications in sensing and cavity-based quantum computing and metrology, open-access Fabry-Perot cavities—with an air or vacuum gap between a pair of high reflectance mirrors—offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics.

  6. Gain Enhanced On-Chip Folded Dipole Antenna Utilizing Artificial Magnetic Conductor at 94 GHz

    KAUST Repository

    Nafe, Mahmoud

    2017-09-05

    On-chip antennas suffer from low gain values and distorted radiation patterns due to lossy and high permittivity Si substrate. An ideal solution would be to isolate the lossy Si substrate from the antenna through a Perfect Electric Conductor (PEC) ground plane, however the typical CMOS stack up which has multiple metal layers embedded in a thin oxide layer does not permit this. In this work, an Artificial Magnetic Conductor (AMC) reflecting surface has been utilized to isolate the Si substrate from the antenna. Contrary to the previous reports, the AMC structure is completely embedded in the thin oxide layer with the ground plane above the Si substrate. In this approach, the AMC surface acts for the first time as both a reflector and a silicon shield. As a result the antenna radiation pattern is not distorted and its gain is improved by 8 dB. The fabricated prototype demonstrates good impedance and radiation characteristics.

  7. Advances in Sensors-Centric Microprocessors and System-on-Chip

    Directory of Open Access Journals (Sweden)

    Juan A. Gómez-Pulido

    2012-04-01

    Full Text Available Sensors-based systems are nowadays an extended technology for many markets due to their great potential in the collection of data from the environment and the processing of such data for different purposes. A typical example is the wireless sensor devices, where the outer temperature, humidity, luminosity and many other parameters can be acquired, measured and processed in order to build useful and fascinating applications that contribute to human welfare. In this scenario, the processing architectures of the sensors-based systems play a very important role. The requirements that are necessary for many such applications (real-time processing, low-power consumption, reduced size, reliability, security and many others means that research on advanced architectures of Microprocessors and System-on-Chips (SoC is needed to design and implement a successful product. In this sense, there are many challenges and open questions in this area that need to be addressed. [...

  8. A Middleware Approach to Achieving Fault Tolerance of Kahn Process Networks on Networks on Chips

    Directory of Open Access Journals (Sweden)

    Onur Derin

    2011-01-01

    propose a task-aware middleware concept that allows adaptivity in KPN implemented over a Network on Chip (NoC. We also list our ideas on the development of a simulation platform as an initial step towards creating fault tolerance strategies for KPNs applications running on NoCs. In doing that, we extend our SACRE (Self-Adaptive Component Run Time Environment framework by integrating it with an open source NoC simulator, Noxim. We evaluate the overhead that the middleware brings to the the total execution time and to the total amount of data transferred in the NoC. With this work, we also provide a methodology that can help in identifying the requirements and implementing fault tolerance and adaptivity support on real platforms.

  9. High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors

    Energy Technology Data Exchange (ETDEWEB)

    Deligianni, Hariklia; Gallagher, William J.; Mason, Maurice; O' Sullivan, Eugene J.; Romankiw, Lubomyr T.; Wang, Naigang

    2017-10-17

    An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.

  10. Structural characteristics of carbon nanofibers for on-chip interconnect applications

    International Nuclear Information System (INIS)

    Ominami, Yusuke; Ngo, Quoc; Austin, Alexander J.; Yoong, Hans; Yang, Cary Y.; Cassell, Alan M.; Cruden, Brett A.; Li Jun; Meyyappan, M.

    2005-01-01

    In this letter, we compare the structures of plasma-enhanced chemical vapor deposition of Ni-catalyzed and Pd-catalyzed carbon nanofibers (CNFs) synthesized for on-chip interconnect applications with scanning transmission electron microscopy (STEM). The Ni-catalyzed CNF has a conventional fiberlike structure and many graphitic layers that are almost parallel to the substrate at the CNF base. In contrast, the Pd-catalyzed CNF has a multiwall nanotubelike structure on the sidewall spanning the entire CNF. The microstructure observed in the Pd-catalyzed fibers at the CNF-metal interface has the potential to lower contact resistance significantly, as our electrical measurements using current-sensing atomic force microscopy indicate. A structural model is presented based on STEM image analysis

  11. A System on Chip approach to enhanced learning in interdisciplinary robotics

    DEFF Research Database (Denmark)

    Sørensen, Anders Stengaard; Falsig, Simon

    2011-01-01

    the framework in an embedded systems course and various student projects, and have found that it greatly enhance the students abilities to control hardware from software, and dramatically reduce the time spent on software $\\leftrightarrow$ hardware interfacing. As the framework is also scalable, it can support......p, li { white-space: pre-wrap; } To sustain interdisciplinary teaching and learning in the rapidly growing and diversifying field of robotics, we have successfully employed FPGA based System on Chip (SoC) technology to provide abstraction between high level software and low level IO/ and control...... hardware. Our approach is to provides students with a simple FPGA based framework for hardware access, and hardware I/O development, which is independent of computer platform and programming language, and enable the students to add to, or change I/O hardware in accordance with their skills. We have tested...

  12. Interfacing Hardware Accelerators to a Time-Division Multiplexing Network-on-Chip

    DEFF Research Database (Denmark)

    Pezzarossa, Luca; Sørensen, Rasmus Bo; Schoeberl, Martin

    2015-01-01

    for receiving results. This allows a stateless and possibly pipelined hardware accelerator to be shared in an interleaved fashion without any form of reservation, and this opens for interesting area-performance trade-offs. The design is developed with a focus on time-predictability, areaefficiency, and FPGA...... in the platform. Our design takes a different approach and connects the hardware accelerators to the network-on-chip in the same way as processor cores. Each processor that uses a hardware accelerator is assigned a virtual channel for sending instructions to the hardware accelerator and a virtual channel...... implementation. The design evaluation is carried out using the open source T-CREST multi-core platform implemented on an Altera Cyclone IV FPGA. The size of the proposed design, including a floating-point accelerator, is about two-thirds of a processor....

  13. Router Designs for an Asynchronous Time-Division-Multiplexed Network-on-Chip

    DEFF Research Database (Denmark)

    Kasapaki, Evangelia; Sparsø, Jens; Sørensen, Rasmus Bo

    2013-01-01

    In this paper we explore the design of an asynchronous router for a time-division-multiplexed (TDM) network-on-chip (NOC) that is being developed for a multi-processor platform for hard real-time systems. TDM inherently requires a common time reference, and existing TDM-based NOC designs are either....... This adds hardware complexity and increases area and power consumption. We propose to use asynchronous routers in order to achieve a simpler, more robust and globally-asynchronous NOC, and this represents an unexplored point in the design space. The paper presents a range of alternative router designs. All...... routers have been synthesized for a 65nm CMOS technology, and the paper reports post-layout figures for area, speed and energy and compares the asynchronous designs with an existing mesochronous clocked router. The results show that an asynchronous router is 2 times smaller, marginally slower...

  14. Integration of on-chip peristaltic pumps and injection valves with microchip electrophoresis and electrochemical detection.

    Science.gov (United States)

    Bowen, Amanda L; Martin, R Scott

    2010-08-01

    A microfluidic approach that integrates peristaltic pumping from an on-chip reservoir with injection valves, microchip electrophoresis and electrochemical detection is described. Fabrication and operation of both the peristaltic pumps and injection valves were optimized to ensure efficient pumping and discrete injections. The final device uses the peristaltic pumps to continuously direct sample from a reservoir containing a mixture of analytes to injection valves that are coupled with microchip electrophoresis and amperometric detection. The separation and direct detection of dopamine and norepinephrine were possible with this approach and the utility of the device was demonstrated by monitoring the stimulated release of these neurotransmitters from a layer of cells introduced into the microchip. It is also shown that this pumping/reservoir approach can be expanded to multiple reservoirs and pumps, where one reservoir can be addressed individually or multiple reservoirs sampled simultaneously.

  15. A Monolithic Multisensor Microchip with Complete On-Chip RF Front-End.

    Science.gov (United States)

    Merenda, Massimo; Felini, Corrado; Della Corte, Francesco G

    2018-01-02

    In this paper, a new wireless sensor, designed for a 0.35 µm CMOS technology, is presented. The microchip was designed to be placed on an object for the continuous remote monitoring of its temperature and illumination state. The temperature sensor is based on the temperature dependence of the I-V characteristics of bipolar transistors available in CMOS technology, while the illumination sensor is an integrated p-n junction photodiode. An on-chip 2.5 GHz transmitter, coupled to a mm-sized dipole radiating element fabricated on the same microchip and made in the top metal layer of the same die, sends the collected data wirelessly to a radio receiver using an On-Off Keying (OOK) modulation pattern.

  16. Biologically-inspired On-chip Learning in Pulsed Neural Networks

    DEFF Research Database (Denmark)

    Lehmann, Torsten; Woodburn, Robin

    1999-01-01

    Self-learning chips to implement many popular ANN (artificial neural network) algorithms are very difficult to design. We explain why this is so and say what lessons previous work teaches us in the design of self-learning systems. We offer a contribution to the "biologically-inspired" approach......, explaining what we mean by this term and providing an example of a robust, self-learning design that can solve simple classical-conditioning tasks, We give details of the design of individual circuits to perform component functions, which can then be combined into a network to solve the task. We argue...... that useful conclusions as to the future of on-chip learning can be drawn from this work....

  17. Optimization of applied voltages for on-chip concentration of DNA using nanoslit

    Science.gov (United States)

    Azuma, Naoki; Itoh, Shintaro; Fukuzawa, Kenji; Zhang, Hedong

    2017-12-01

    On-chip sample concentration is an effective pretreatment to improve the detection sensitivity of lab-on-a-chip devices for biochemical analysis. In a previous study, we successfully achieved DNA sample concentration using a nanoslit fabricated in the microchannel of a device designed for DNA size separation. The nanoslit was a channel with a depth smaller than the diameter of a random coil-shaped DNA molecule. The concentration was achieved using the entropy trap at the boundary between the microchannel and the nanoslit. DNA molecules migrating toward the nanoslit owing to electrophoresis were trapped in front of the nanoslit and the concentration was enhanced over time. In this study, we successfully maximize the molecular concentration by optimizing the applied voltage for electrophoresis and verifying the effect of temperature. In addition, we propose a model formula that predicts the molecular concentration, the validity of which is confirmed through comparison with experimental results.

  18. CMOS Image Sensor with On-Chip Image Compression: A Review and Performance Analysis

    Directory of Open Access Journals (Sweden)

    Milin Zhang

    2010-01-01

    Full Text Available Demand for high-resolution, low-power sensing devices with integrated image processing capabilities, especially compression capability, is increasing. CMOS technology enables the integration of image sensing and image processing, making it possible to improve the overall system performance. This paper reviews the current state of the art in CMOS image sensors featuring on-chip image compression. Firstly, typical sensing systems consisting of separate image-capturing unit and image-compression processing unit are reviewed, followed by systems that integrate focal-plane compression. The paper also provides a thorough review of a new design paradigm, in which image compression is performed during the image-capture phase prior to storage, referred to as compressive acquisition. High-performance sensor systems reported in recent years are also introduced. Performance analysis and comparison of the reported designs using different design paradigm are presented at the end.

  19. On-chip switch for reconfigurable mode-multiplexing optical network.

    Science.gov (United States)

    Sun, Chunlei; Yu, Yu; Chen, Guanyu; Zhang, Xinliang

    2016-09-19

    The switching and routing is essential for an advanced and reconfigurable optical network, and great efforts have been done for traditional single-mode system. We propose and demonstrate an on-chip switch compatible with mode-division multiplexing system. By controlling the induced phase difference, the functionalities of dynamically routing data channels can be achieved. The proposed switch is experimentally demonstrated with low insertion loss of ~1 dB and high extinction ratio of ~20 dB over the C-band for OFF-ON switchover. For further demonstration, the non-return-to-zero on-off keying signals at 10 Gb/s carried on the two spatial modes are successfully processed. Open and clear eye diagrams can be observed and the bit error rate measurements indicate a good data routing performance.

  20. Quantitative design space exploration of routing-switches for Network-on-Chip

    Directory of Open Access Journals (Sweden)

    M. C. Neuenhahn

    2008-05-01

    Full Text Available Future Systems-on-Chip (SoC will consist of many embedded functional units like e.g. embedded processor cores, memories or FPGA like structures. These SoCs will have huge communication demands, which can not be fulfilled by bus-based communication systems. Possible solutions to this problem are so called Networks-on-Chip (NoC.

    These NoCs basically consist of network-interfaces which integrate functional units into the NoC and routing-switches which connect the network-interfaces. Here, VLSI-based routing-switch implementations are presented. The characteristics of these NoCs like performance and costs (e.g. silicon area respectively logic elements, power dissipation depend on a variety of parameters. As a routing-switch is a key component of a NoC, the costs and performance of routing-switches are compared for different parameter combinations. Evaluated parameters are for example data word length, architecture of the routing-switch (parallel vs. centralized implementation and routing-algorithm.

    The performance and costs of routing-switches were evaluated using an FPGA-based NoC-emulator. In addition different routing-switches were implemented using a 90 nm standard-cell library to determine the maximum clock frequency, power-dissipation and area of a VLSI-implementation. The power consumption was determined by simulating the extracted layout of the routing-switches. Finally, these results are benchmarked to other routing-switch implementations like Aetheral and xpipes.

  1. Graphene nanoribbon field effect transistor for nanometer-size on-chip temperature sensor

    Science.gov (United States)

    Banadaki, Yaser M.; Srivastava, Ashok; Sharifi, Safura

    2016-04-01

    Graphene has been extensively investigated as a promising material for various types of high performance sensors due to its large surface-to-volume ratio, remarkably high carrier mobility, high carrier density, high thermal conductivity, extremely high mechanical strength and high signal-to-noise ratio. The power density and the corresponding die temperature can be tremendously high in scaled emerging technology designs, urging the on-chip sensing and controlling of the generated heat in nanometer dimensions. In this paper, we have explored the feasibility of a thin oxide graphene nanoribbon (GNR) as nanometer-size temperature sensor for detecting local on-chip temperature at scaled bias voltages of emerging technology. We have introduced an analytical model for GNR FET for 22nm technology node, which incorporates both thermionic emission of high-energy carriers and band-to-band-tunneling (BTBT) of carriers from drain to channel regions together with different scattering mechanisms due to intrinsic acoustic phonons and optical phonons and line-edge roughness in narrow GNRs. The temperature coefficient of resistivity (TCR) of GNR FET-based temperature sensor shows approximately an order of magnitude higher TCR than large-area graphene FET temperature sensor by accurately choosing of GNR width and bias condition for a temperature set point. At gate bias VGS = 0.55 V, TCR maximizes at room temperature to 2.1×10-2 /K, which is also independent of GNR width, allowing the design of width-free GNR FET for room temperature sensing applications.

  2. Advanced Nanofabrication Process Development for Self-Powered System-on-Chip

    KAUST Repository

    Rojas, Jhonathan Prieto

    2010-11-01

    In this work the development of a Self-Powered System-On-Chip is explored by examining two components of process development in different perspectives. On one side, an energy component is approached from a biochemical standpoint where a Microbial Fuel Cell (MFC) is built with standard microfabrication techniques, displaying a novel electrode based on Carbon Nanotubes (CNTs). The fabrication process involves the formation of a micrometric chamber that hosts an enhanced CNT-based anode. Preliminary results are promising, showing a high current density (113.6mA/m2) compared with other similar cells. Nevertheless many improvements can be done to the main design and further characterization of the anode will give a more complete understanding and bring the device closer to a practical implementation. On a second point of view, nano-patterning through silicon nitride spacer width control is developed, aimed at producing alternative sub-100nm device fabrication with the potential of further scaling thanks to nanowire based structures. These nanostructures are formed from a nano-pattern template, by using a bottom-up fabrication scheme. Uniformity and scalability of the process are demonstrated and its potential described. An estimated area of 0.120μm2 for a 6T-SRAM (Static Random Access Memory) bitcell (6 devices) can be achieved. In summary, by using a novel sustainable energy component and scalable nano-patterning for logic and computing module, this work has successfully collected the essential base knowledge and joined two different elements that synergistically will contribute for the future implementation of a Self-Powered System-on-Chip.

  3. Realize multiple hermetic chamber pressures for system-on-chip process by using the capping wafer with diverse cavity depths

    Science.gov (United States)

    Cheng, Shyh-Wei; Weng, Jui-Chun; Liang, Kai-Chih; Sun, Yi-Chiang; Fang, Weileun

    2018-04-01

    Many mechanical and thermal characteristics, for example the air damping, of suspended micromachined structures are sensitive to the ambient pressure. Thus, micromachined devices such as the gyroscope and accelerometer have different ambient pressure requirements. Commercially available process platforms could be used to fabricate and integrate devices of various functions to reduce the chip size. However, it remains a challenge to offer different ambient pressures for micromachined devices after sealing them by wafer level capping (WLC). This study exploits the outgassing characteristics of the CMOS chip to fabricate chambers of various pressures after the WLC of the Si-above-CMOS (TSMC 0.18 µm 1P5M CMOS process) MEMS process platform. The pressure of the sealed chamber can be modulated by the chamber volume after the outgassing. In other words, the pressure of hermetic sealed chambers can be easily and properly defined by the etching depth of the cavity on an Si capping wafer. In applications, devices sealed with different cavity depths are implemented using the Si-above-CMOS (TSMC 0.18 µm 1P5M CMOS process) MEMS process platform to demonstrate the present approach. Measurements show the feasibility of this simple chamber pressure modulation approach on eight-inch wafers.

  4. On-chip microreactor system for the production of nano-emulsion loaded liposomes: towards targeted delivery of lipophilic drugs

    NARCIS (Netherlands)

    Langelaan, M.L.P.; Emmelkamp, J.; Segers, M.J.A.; Lenting, H.B.M.

    2011-01-01

    An on-chip microreactor system for the production of novel nano-biodevices is presented. This nano-biodevice consists of a nano-emulsion loaded with lipophilic drugs, entrapped in liposomes. These nano-biodevices can be equipped with targeting molecules for higher drug efficiency. The microreactor

  5. A facile method for urinary phenylalanine measurement on paper-based lab-on-chip for PKU therapy monitoring.

    Science.gov (United States)

    Messina, M A; Meli, C; Conoci, S; Petralia, S

    2017-12-04

    A miniaturized paper-based lab-on-chip (LoC) was developed for the facile measurement of urinary Phe (phenylalanine) level on PKU (Phenylketonuria) treated patient. This system permits the monitoring of Phe in a dynamic range concentration of 20-3000 μM.

  6. Rapid, Semiautomated Quantification of Bacterial Cells in Freshwater by Using a Microfluidic Device for On-Chip Staining and Counting▿

    OpenAIRE

    Yamaguchi, Nobuyasu; Torii, Masashi; Uebayashi, Yuko; Nasu, Masao

    2010-01-01

    A microfluidic device-based system for the rapid and semiautomated counting of bacteria in freshwater was fabricated and examined. Bacteria in groundwater and in potable water, as well as starved Escherichia coli O157:H7 spiked in pond water, were able to be on-chip stained and enumerated within 1 h using this system.

  7. On-chip low-profile nano-horn metal-clad optical cavity with much improved performance

    OpenAIRE

    Li, Zheng; Choo, Hyuck

    2014-01-01

    We propose an on-chip nano-horm-shaped metal-clad cavity. The proposed device is 0.8 µm in height-half the size of the previously reported devices— and achieves the quality factor of 1000 and effective volume of 0.31(λ/n)^3.

  8. Fiber free plug and play on-chip scattering cytometer module – for implementation in microfluidic point of care devices

    DEFF Research Database (Denmark)

    Jensen, Thomas Glasdam; Kutter, Jörg Peter

    2010-01-01

    In this paper, we report on recent progress toward the development of a plug and play on-chip cytometer based on light scattering. By developing a device that does not depend on the critical alignment and cumbersome handling of fragile optical fibers, we approach a device that is suitable for non...

  9. On-chip Detection of Rolling Circle Amplified DNA Molecules from Bacillus Globigii spores and Vibrio Cholerae

    DEFF Research Database (Denmark)

    Østerberg, Frederik Westergaard; Rizzi, Giovanni; Donolato, Marco

    2014-01-01

    For the first time DNA coils formed by rolling circle amplification are quantified on-chip by Brownian relaxation measurements on magnetic nanobeads using a magnetoresistive sensor. No external magnetic fields are required besides the magnetic field arising from the current through the sensor...

  10. On-chip patch antenna on InP substrate for short-range wireless communication at 140 GHz

    DEFF Research Database (Denmark)

    Dong, Yunfeng; Johansen, Tom Keinicke; Zhurbenko, Vitaliy

    2017-01-01

    This paper presents the design of an on-chip patch antenna on indium phosphide (InP) substrate for short-range wireless communication at 140 GHz. The antenna shows a simulated gain of 5.3 dBi with 23% bandwidth at 140 GHz and it can be used for either direct chip-to-chip communication or chip...

  11. Flexure-beam micromirror devices and potential expansion for smart micromachining

    Science.gov (United States)

    Lin, Tseng-Hwang

    1996-05-01

    Texas Instruments has been developing both digital and analog micromirror devices since the late 1970s. The analog flexure-beam micromirror devices are primarily targeted for imaging identification. Digital multiplexing mechanisms are used in column and row selection to address discretized analog signals into the array. Amplifiers and sample-and-hold circuits provide the appropriate signal range to control the micromirrors. Analog-to-digital and digital- to-analog conversions are currently built into the interface electronics, and will potentially be built into the chip. The micromirror devices are built on the top of the addressing circuits using sacrificial layers and two different metal layers. This concept of surface micromachining and mixed-signal circuit integration enables us to investigate the possibility of smart micromachining. Micromirror device applications can expand beyond optical applications into microsensor and other microactuator areas. The addressing circuits can be used in the interface of analog real-world and smart control circuits.

  12. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    Directory of Open Access Journals (Sweden)

    Yu Zhou

    2016-07-01

    Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

  13. Laser direct micro-machining with top-hat-converted single mode lasers

    Science.gov (United States)

    Homburg, O.; Toennissen, F.; Mitra, T.; Lissotschenko, V.

    2008-02-01

    Laser direct micro-machining processes are used in a variety of industries like inkjet printing, semiconductor processing, solar technology, flat-panel display production and medicine. Various kinds of materials, e.g. ceramics, metals, isolators, oxides, organics and semiconductors are being structured. In most cases pulsed single mode solid state lasers with an inhomogeneous Gaussian beam profile are employed, like YAG lasers and their harmonics. However, the quality and functionality of the generated structures and micro-systems as well as the speed of the process can be improved by the utilization of homogeneous top hat profiles. The beam shaping principle of refractive Gaussian-to-top-hat converters is shown. Compact beam shaper modules based on this principle have been developed - supporting most direct laser micro-machining applications. The resulting process advantages are demonstrated by selected application results, namely the drilling of holes and patterning of trenches for different kinds of materials.

  14. On-Chip Scan-Based Test Strategy for a Dependable Many-Core Processor Using a NoC as a Test Access Mechanism

    NARCIS (Netherlands)

    Zhang, X.; Kerkhoff, Hans G.; Vermeulen, Bart

    2010-01-01

    Periodic on-chip scan-based tests have to be applied to a many-core processor SoC to improve its dependability. An infrastructural IP module has been designed and incorporated into the SoC to function as an ATE. This paper introduces the reuse of a Network-on-Chip as a test access mechanism. Since

  15. Femtosecond laser micro-machined polyimide films for cell scaffold applications.

    Science.gov (United States)

    Antanavičiūtė, Ieva; Šimatonis, Linas; Ulčinas, Orestas; Gadeikytė, Aušra; Abakevičienė, Brigita; Tamulevičius, Sigitas; Mikalayeva, Valeryia; Skeberdis, Vytenis Arvydas; Stankevičius, Edgaras; Tamulevičius, Tomas

    2018-02-01

    Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining of commercially available 12.7 and 25.4 μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6 μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens. That was attributed to material modification around the micro-machined holes in the vicinity of the position of the focused laser beam track during trepanning drilling. We demonstrate that virgin PI films provide a suitable environment for the mobility, proliferation and intercellular communication of human bone marrow mesenchymal stem cells, and discuss how cell behaviour varies on the micro-machined PI films with holes of different diameters (3.1, 8.4 and 16.7 μm) and hole spacing (30, 35, 40 and 45 μm). We conclude that the holes of 3.1 μm diameter were sufficient for metabolic and genetic communication through membranous tunneling tubes between cells residing on the opposite sides of PI film, but prevented the trans-migration of cells through the holes. Copyright © 2016 John Wiley & Sons, Ltd. Copyright © 2016 John Wiley & Sons, Ltd.

  16. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    OpenAIRE

    Zhou, Yu; Shafai, Cyrus

    2016-01-01

    This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

  17. TOPICAL REVIEW: Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

    Science.gov (United States)

    Chen, Jingkuang

    2010-02-01

    This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer (CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate today's medical ultrasound market, the capacitive micromachined ultrasonic transducer has recently emerged as a promising alternative which delivers a comparable device performance to its piezoelectric counterparts, is compatible with front-end circuit integration, allows high-density imager integration and is relative easy in miniaturization. Utilizing MEMS technology, the substrate of CMUT arrays can be micromachined into miniature platforms with various geometrical shapes, which include needles, three-dimensional prisms, as well as other flexible-substrate configurations. These arrays are useful for reaching deep inside the tissue or an organ with a minimally invasive approach. Due to the close proximity of the transducers to the target organ/tissue, a higher resolution/accuracy of diagnostic information can be achieved. In addition to pulse-echo and photoacoustic imaging, high-power CMUT devices capable of delivering ultrasounds with a pressure greater than 1.0 MPa have been monolithically integrated with imager CMUTs for image-guided therapy (IGT). Such miniature devices would facilitate diagnostic and therapy interventions not possible with conventional piezoelectric transducers.

  18. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  19. A wafer mapping technique for residual stress in surface micromachined films

    International Nuclear Information System (INIS)

    Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

    2016-01-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

  20. Fiber laser micromachining of magnesium alloy tubes for biocompatible and biodegradable cardiovascular stents

    Science.gov (United States)

    Demir, Ali Gökhan; Previtali, Barbara; Colombo, Daniele; Ge, Qiang; Vedani, Maurizio; Petrini, Lorenza; Wu, Wei; Biffi, Carlo Alberto

    2012-02-01

    Magnesium alloys constitute an attractive solution for cardiovascular stent applications due to their intrinsic properties of biocompatibility and relatively low corrosion resistance in human-body fluids, which results in as a less intrusive treatment. Laser micromachining is the conventional process used to cut the stent mesh, which plays the key role for the accurate reproduction of the mesh design and the surface quality of the produced stent that are important factors in ensuring the mechanical and corrosion resistance properties of such a kind of devices. Traditionally continuous or pulsed laser systems working in microsecond pulse regime are employed for stent manufacturing. Pulsed fiber lasers on the other hand, are a relatively new solution which could balance productivity and quality aspects with shorter ns pulse durations and pulse energies in the order of mJ. This work reports the study of laser micromachining and of AZ31 magnesium alloy for the manufacturing of cardiovascular stents with a novel mesh design. A pulsed active fiber laser system operating in nanosecond pulse regime was employed for the micromachining. Laser parameters were studied for tubular cutting on a common stent material, AISI 316L tubes with 2 mm in diameter and 0.2 mm in thickness and on AZ31 tubes with 2.5 mm in diameter and 0.2 in thickness. In both cases process parameters conditions were examined for reactive and inert gas cutting solutions and the final stent quality is compared.