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Sample records for deposition cvd process

  1. Rare earth-doped alumina thin films deposited by liquid source CVD processes

    Energy Technology Data Exchange (ETDEWEB)

    Deschanvres, J.L.; Meffre, W.; Joubert, J.C.; Senateur, J.P. [Ecole Nat. Superieure de Phys. de Grenoble, St. Martin d`Heres (France). Lab. des Materiaux et du Genie Phys.; Robaut, F. [Consortium des Moyens Technologiques Communs, Institut National Polytechnique de Grenoble, BP 75, 38402 St Martin d`Heres (France); Broquin, J.E.; Rimet, R. [Laboratoire d`Electromagnetisme, Microondes et Optoelectronique, CNRS-Ecole Nationale Superieure d`Electronique et Radioelectricite de Grenoble, BP 257, 38016 Grenoble, Cedex (France)

    1998-07-24

    Two types of liquid-source CVD processes are proposed for the growth of rare earth-doped alumina thin films suitable as amplifying media for integrated optic applications. Amorphous, transparent, pure and erbium- or neodymium-doped alumina films were deposited between 573 and 833 K by atmospheric pressure aerosol CVD. The rare earth doping concentration increases by decreasing the deposition temperature. The refractive index of the alumina films increases as a function of the deposition temperature from 1.53 at 573 K to 1.61 at 813 K. Neodymium-doped films were also obtained at low pressure by liquid source injection CVD. (orig.) 7 refs.

  2. Effect of substrate bias on deposition behaviour of charged silicon nanoparticles in ICP-CVD process

    Science.gov (United States)

    Yoo, Seung-Wan; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Seo, Byong-Hoon; Hwang, Nong-Moon

    2017-01-01

    The effect of a substrate bias on the deposition behaviour of crystalline silicon films during inductively coupled plasma chemical vapour deposition (ICP-CVD) was analysed by consideration of non-classical crystallization, in which the building block is a nanoparticle rather than an individual atom or molecule. The coexistence of positively and negatively charged nanoparticles in the plasma and their role in Si film deposition are confirmed by applying bias voltages to the substrate, which is sufficiently small as not to affect the plasma potential. The sizes of positively and negatively charged nanoparticles captured on a carbon membrane and imaged using TEM are, respectively, 2.7-5.5 nm and 6-13 nm. The film deposited by positively charged nanoparticles has a typical columnar structure. In contrast, the film deposited by negatively charged nanoparticles has a structure like a powdery compact with the deposition rate about three times higher than that for positively charged nanoparticles. All the films exhibit crystallinity even though the substrate is at room temperature, which is attributed to the deposition of crystalline nanoparticles formed in the plasma. The film deposited by negatively charged nanoparticles has the highest crystalline fraction of 0.84.

  3. FTIR monitoring of industrial scale CVD processes

    Science.gov (United States)

    Hopfe, V.; Mosebach, H.; Meyer, M.; Sheel, D.; Grählert, W.; Throl, O.; Dresler, B.

    1998-06-01

    The goal is to improve chemical vapour deposition (CVD) and infiltration (CVI) process control by a multipurpose, knowledge based feedback system. For monitoring the CVD/CVI process in-situ FTIR spectroscopic data has been identified as input information. In the presentation, three commonly used, and distinctly different, types of industrial CVD/CVI processes are taken as test cases: (i) a thermal high capacity CVI batch process for manufacturing carbon fibre reinforced SiC composites for high temperature applications, (ii) a continuously driven CVD thermal process for coating float glass for energy protection, and (iii) a laser stimulated CVD process for continuously coating bundles of thin ceramic fibers. The feasibility of the concept with FTIR in-situ monitoring as a core technology has been demonstrated. FTIR monitoring sensibly reflects process conditions.

  4. Development Status of a CVD System to Deposit Tungsten onto UO2 Powder via the WCI6 Process

    Science.gov (United States)

    Mireles, O. R.; Kimberlin, A.; Broadway, J.; Hickman, R.

    2014-01-01

    Nuclear Thermal Propulsion (NTP) is under development for deep space exploration. NTP's high specific impulse (> 850 second) enables a large range of destinations, shorter trip durations, and improved reliability. W-60vol%UO2 CERMET fuel development efforts emphasize fabrication, performance testing and process optimization to meet service life requirements. Fuel elements must be able to survive operation in excess of 2850 K, exposure to flowing hydrogen (H2), vibration, acoustic, and radiation conditions. CTE mismatch between W and UO2 result in high thermal stresses and lead to mechanical failure as a result UO2 reduction by hot hydrogen (H2) [1]. Improved powder metallurgy fabrication process control and mitigated fuel loss can be attained by coating UO2 starting powders within a layer of high density tungsten [2]. This paper discusses the advances of a fluidized bed chemical vapor deposition (CVD) system that utilizes the H2-WCl6 reduction process.

  5. Deposition and Coating Properties on CVD Tungsten

    Institute of Scientific and Technical Information of China (English)

    DU Ji-hong; LI Zheng-xiang; LIU Gao-jian; ZHOU Hui-Huang; CHUN liang

    2004-01-01

    Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.

  6. High-rate diamond deposition by microwave plasma CVD

    Science.gov (United States)

    Li, Xianglin

    In this dissertation, the growth of CVD (Chemical Vapor Deposition) diamond thin films is studied both theoretically and experimentally. The goal of this research is to deposit high quality HOD (Highly Oriented Diamond) films with a growth rate greater than 1 mum/hr. For the (100)-oriented HOD films, the growth rate achieved by the traditional process is only 0.3 mum/hr while the theoretical limit is ˜0.45 mum/hr. This research increases the growth rate up to 5.3 mum/hr (with a theoretical limit of ˜7 mum/hr) while preserving the crystal quality. This work builds a connection between the theoretical study of the CVD process and the experimental research. The study is extended from the growth of regular polycrystalline diamond to highly oriented diamond (HOD) films. For the increase of the growth rate of regular polycrystalline diamond thin films, a scaling growth model developed by Goodwin is introduced in details to assist in the understanding of the MPCVD (Microwave Plasma CVD) process. Within the Goodwin's scaling model, there are only four important sub-processes for the growth of diamond: surface modification, adsorption, desorption, and incorporation. The factors determining the diamond growth rate and film quality are discussed following the description of the experimental setup and process parameters. Growth rate and crystal quality models are reviewed to predict and understand the experimental results. It is shown that the growth rate of diamond can be increased with methane input concentration and the amount of atomic hydrogen (by changing the total pressure). It is crucial to provide enough atomic hydrogen to conserve crystal quality of the deposited diamond film. The experimental results demonstrate that for a fixed methane concentration, there is a minimum pressure for growth of good diamond. Similarly, for a fixed total pressure, there is a maximum methane concentration for growth of good diamond, and this maximum methane concentration increases

  7. Purification of Single-walled Carbon Nanotubes Grown by a Chemical Vapour Deposition (CVD) Method

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    A procedure for purification of single-walled carbon nanotubes(SWNTs) grown by the chemical vapour deposition (CVD) of carbon monooxide has been developed. Based on the result from TGA/DTA of as-prepared sample, the oxidation temperature was determined. The process included sonication, oxidation and acid washing steps. The purity and yield after purification were determined and estimated by TEM. Moreover, for the first time, a loop structure for CVD SWNTs has been observed.

  8. A Study on Medium Temperature Chemical Vapor Deposition (MT-CVD) Technology and Super Coating Materials

    Institute of Scientific and Technical Information of China (English)

    GAO Jian; LI Jian-ping; ZENG Xiang-cai; MA Wen-cun

    2004-01-01

    In this paper, the dense and columnar crystalline TiCN coating layers with very good bonding strength between a layer and another layer was deposited using Medium Temperature Chemical Vapor Deposition (MT-CVD) where CH3CN organic composite with C/N atomic clusters etc. was utilized at 700 ~ 900 ℃. Effect of coating processing parameters, such as coating temperature, pressure and different gas flow quantity on structures and properties of TiCN coating layers were investigated. The super coating mechanis mand structures were analyzed. The new coating processing parameters and properties of carbide inserts with super coating layers were gained by using the improved high temperature chemical vapor deposition (HTCVD) equipment and HT-CVD, in combination with MT-CVD technology.

  9. Development of atmospheric pressure CVD processes for highquality transparent conductive oxides

    NARCIS (Netherlands)

    Graaf, A. de; Deelen, J. van; Poodt, P.W.G.; Mol, A.M.B. van; Spee, C.I.M.A.; Grob, F.; Kuypers, A.

    2010-01-01

    For the past decade TNO has been involved in the research and development of atmospheric pressure CVD (APCVD) and plasma enhanced CVD (PECVD) processes for deposition of transparent conductive oxides (TCO), such as tin oxide and zinc oxide. It is shown that by combining precursor development, fundam

  10. Numerical modeling of chemical vapor deposition (CVD) in a horizontal reactor

    Science.gov (United States)

    Sheikholeslami, M. Z.; Jasinski, T.; Fretz, K. W.

    1988-01-01

    In the present numerical prediction of the deposition rate of silicon from silane in a CVD process, the conservation equations for mass, momentum, energy, and chemical species are solved on a staggered grid using the SIMPLE algorithm, while the rate of chemical reactions in the gas phase and on the susceptor surface is obtained from an Arrhenius rate equation. Predicted deposition rates as a function of position along the susceptor with and without the gas phase chemical reaction are compared with the available experimental and numerical data; agreement is excellent except at the leading edge of the susceptor, where the deposition rate is overpredicted.

  11. Thin alumina and silica films by chemical vapor deposition (CVD)

    OpenAIRE

    Hofman, R.; Morssinkhof, R.W.J.; Fransen, T.; Westheim, J.G.F.; Gellings, P.J.

    1993-01-01

    Alumina and silica coatings have been deposited by MOCVD (Metal Organic Chemical Vapor Deposition) on alloys to protect them against high temperature corrosion. Aluminium Tri-lsopropoxide (ATI) and DiAcetoxyDitertiaryButoxySilane (DAOBS) have been used as metal organic precursors to prepare these ceramic coatings. The influence of several process steps on the deposition rate and surface morphology is discussed. The deposition of SiO2 at atmospheric pressure is kinetically limited below 833 K ...

  12. Abnormal Crystallization of Silicon Thin Films Deposited by ICP-CVD

    Institute of Scientific and Technical Information of China (English)

    LI Jun-Shuai; YIN Min; WANG Jin-Xiao; HE De-Yan

    2005-01-01

    @@ Silicon thin films are deposited by inductively coupled plasma chemical vapour deposition (ICP-CVD) at a low temperature of 350℃ using a mixture of SiH4 and H2. The structures of the films are characterized by x-ray diffraction and Raman spectra. Under the optimum experimental conditions, we observe that the crystallinity of Si films becomes more excellent and the preferred orientation changes from (111) to (220) with the decreasing dilution of SiH4 in H2. Such an abnormal crystallization is tentatively interpreted in term of the high density,low electron temperature and spatial confinement of the plasma in the process of ICP-CVD.

  13. Influence of process pressure on β-SiC growth by CVD

    Science.gov (United States)

    Andreev, A. A.; Sultanov, A. O.; Gusev, A. S.; Kargin, N. I.; Pavlova, E. P.

    2014-10-01

    3C-SiC films grown on Si (100) substrates by CVD method using silane-propane- hydrogen system were analyzed for crystallinity at various process pressures. The deposition experiments were carried out in a shower-head type cold-wall CVD reactor. The influence of growth conditions on a structural modification of experimental samples was studied by X-ray diffraction (XRD) measurements, Fourier transform infrared spectroscopy (FTIR) and spectroscopic ellipsometry (SE).

  14. Simultaneous synthesis of nanodiamonds and graphene via plasma enhanced chemical vapor deposition (MW PE-CVD) on copper.

    Science.gov (United States)

    Gottlieb, Steven; Wöhrl, Nicolas; Schulz, Stephan; Buck, Volker

    2016-01-01

    The simultaneous growth of both nanodiamonds and graphene on copper samples is described for the first time. A PE-CVD process is used to synthesize graphene layers and nanodiamond clusters from a hydrogen/methane gas mixture as it is typically done successfully in thermal CVD processes for graphene synthesis. However, the standard thermal CVD process is not without problems since the deposition of graphene is affected by the evaporation of a notable amount of copper caused by the slow temperature increase typical for thermal CVD resulting in a long process time. In sharp contrast, the synthesis of graphene by PE-CVD can circumvent this problem by substantially shortening the process time at holding out the prospect of a lower substrate temperature. The reduced thermal load and the possibility to industrially scale-up the PE-CVD process makes it a very attractive alternative to the thermal CVD process with respect to the graphene production in the future. Nanodiamonds are synthesized in PE-CVD reactors for a long time because these processes offer a high degree of control over the film's nanostructure and simultaneously providing a significant high deposition rate. To model the co-deposition process, the three relevant macroscopic parameters (pressure, gas mixture and microwave power) are correlated with three relevant process properties (plasma ball size, substrate temperature and C2/Hα-ratio) and the influence on the quality of the deposited carbon allotropes is investigated. For the evaluation of the graphene as well as the nanodiamond quality, Raman spectroscopy used whereas the plasma properties are measured by optical methods. It is found that the diamond nucleation can be influenced by the C2/Hα-ratio in the plasma, while the graphene quality remains mostly unchanged by this parameter. Moreover it is derived from the experimental data that the direct plasma contact with the copper surface is beneficial for the nucleation of the diamond while the growth and

  15. Simulation and experimental study of CVD process for low temperature nanocrystalline silicon carbide coating

    Energy Technology Data Exchange (ETDEWEB)

    Kaushal, Amit; Prakash, Jyoti, E-mail: jprakash@barc.gov.in; Dasgupta, Kinshuk; Chakravartty, Jayanta K.

    2016-07-15

    Highlights: • Parametric simulation was carried out for specially designed CVD reactor. • Effect of fluid velocity, heat flow and concentration were studied in CVD reactor. • Coating study carried out using low temperature and environmental safe CVD process. • Dense and uniform nanocrystalline SiC film was coated on zircaloy substrate. - Abstract: There is a huge requirement for development of a coating technique in nuclear industry, which is environmentally safe, economical and applicable to large scale components. In this view, simulation of gas-phase behavior in specially designed CVD reactor was carried out using computational tool, COMSOL. There were two important zones in CVD reactor first one is precursor vaporization zone and second one is coating zone. Optimized parameters for coating were derived from the simulation of gas phase dynamics in both zone of CVD reactor. The overall effect of fluid velocity, heat flow and concentration profile showed that Re = 54 is the optimum reaction condition for uniform coating in CVD system. In CVD coating experiments a synthesized halogen free, non-toxic and non-corrosive silicon carbide precursor was used. Uniform coating of SiC was obtained on zircaloy substrate at 900 °C using as synthesized organosilicon precursor. The X-ray diffraction and scanning electron microscopy analysis show that dense nano crystalline SiC film was deposited on zircaloy substrate.

  16. A novel Mo-W interlayer approach for CVD diamond deposition on steel

    Directory of Open Access Journals (Sweden)

    Vojtěch Kundrát

    2015-04-01

    Full Text Available Steel is the most widely used material in engineering for its cost/performance ratio and coatings are routinely applied on its surface to further improve its properties. Diamond coated steel parts are an option for many demanding industrial applications through prolonging the lifetime of steel parts, enhancement of tool performance as well as the reduction of wear rates. Direct deposition of diamond on steel using conventional chemical vapour deposition (CVD processes is known to give poor results due to the preferential formation of amorphous carbon on iron, nickel and other elements as well as stresses induced from the significant difference in the thermal expansion coefficients of those materials. This article reports a novel approach of deposition of nanocrystalline diamond coatings on high-speed steel (M42 substrates using a multi-structured molybdenum (Mo – tungsten (W interlayer to form steel/Mo/Mo-W/W/diamond sandwich structures which overcome the adhesion problem related to direct magnetron sputtering deposition of pure tungsten. Surface, interface and tribology properties were evaluated to understand the role of such an interlayer structure. The multi-structured Mo-W interlayer has been proven to improve the adhesion between diamond films and steel substrates by acting as an effective diffusion barrier during the CVD diamond deposition.

  17. A novel Mo-W interlayer approach for CVD diamond deposition on steel

    Energy Technology Data Exchange (ETDEWEB)

    Kundrát, Vojtěch; Sullivan, John; Ye, Haitao, E-mail: h.ye@aston.ac.uk [School of Engineering and Applied Science, Aston University, Birmingham, B4 7ET (United Kingdom); Zhang, Xiaoling; Cooke, Kevin; Sun, Hailin [Miba Coating Group: Teer Coatings Ltd, West-Stone-House, West-Stone, Berry-Hill-Industrial-Estate, WR9 9AS, Droitwich (United Kingdom)

    2015-04-15

    Steel is the most widely used material in engineering for its cost/performance ratio and coatings are routinely applied on its surface to further improve its properties. Diamond coated steel parts are an option for many demanding industrial applications through prolonging the lifetime of steel parts, enhancement of tool performance as well as the reduction of wear rates. Direct deposition of diamond on steel using conventional chemical vapour deposition (CVD) processes is known to give poor results due to the preferential formation of amorphous carbon on iron, nickel and other elements as well as stresses induced from the significant difference in the thermal expansion coefficients of those materials. This article reports a novel approach of deposition of nanocrystalline diamond coatings on high-speed steel (M42) substrates using a multi-structured molybdenum (Mo) – tungsten (W) interlayer to form steel/Mo/Mo-W/W/diamond sandwich structures which overcome the adhesion problem related to direct magnetron sputtering deposition of pure tungsten. Surface, interface and tribology properties were evaluated to understand the role of such an interlayer structure. The multi-structured Mo-W interlayer has been proven to improve the adhesion between diamond films and steel substrates by acting as an effective diffusion barrier during the CVD diamond deposition.

  18. EFFECTS OF OPERATING CONDITIONS ON THE DEPOSITION OF GaAs IN A VERTICAL CVD REACTOR

    OpenAIRE

    JAE-SANG BAEK; JIN-HYO BOO; YOUN-JEA KIM

    2008-01-01

    A numerical study is needed to gain insight into the growth mechanism and improve the reactor design or optimize the deposition condition in chemical vapor deposition (CVD). In this study, we have performed a numerical analysis of the deposition of gallium arsenide (GaAs) from trimethyl gallium (TMG) and arsine in a vertical CVD reactor. The effects of operating parameters, such as the rotation velocity of susceptor, inlet velocity, and inlet TMG fraction, are investigated and presented. The ...

  19. Non-classical crystallization of thin films and nanostructures in CVD and PVD processes

    CERN Document Server

    Hwang, Nong Moon

    2016-01-01

    This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occurs not by individual atoms but by charged nanoparticles. This newly-discovered growth mechanism turns out to be general to many CVD and some physical vapor deposition (PVD) processes. This non-classical crystallization is a new paradigm of crystal growth, with active research taking place on growth in solution, especially in biomineralization processes. Established understanding of the growth of thin films and nanostructures is based around processes involving individual atoms or molecules. According to the author’s research over the last two decades, however, the generation of charged gas phase nuclei is shown to be the rule rather than the exception in the CVD process, and charged gas phase nuclei are actively ...

  20. Metallic Tungsten Nanostructures and Highly Nanostructured Thin Films by Deposition of Tungsten Oxide and Subsequent Reduction in a Single Hot-Wire CVD Process

    NARCIS (Netherlands)

    Harks, P.P.R.M.L.; Houweling, Z.S.; de Jong, M.M.; Kuang, Y; Geus, J.W.; Schropp, R.E.I.

    2012-01-01

    The synthesis of metallic tungsten nanostructures and highly nanostructured thin films is presented. Crystalline tungsten oxide nanostructures are deposited on glassy carbon substrates kept at 700 100 8C by oxidizing resistively heated tungsten filaments in an air flow under subatmospheric pressures

  1. Initiated Chemical Vapor Deposition (iCVD) Polymer Thin Films: Structure-Property Effects on Thermal Degradation and Adhesion

    Science.gov (United States)

    Bharamaiah Jeevendrakumar, Vijay Jain

    Opportunities and challenges for chemical vapor deposition (CVD) of polymer thin films stems from their applications in electronics, sensors, and adhesives with demands for control over film composition, conformity and stability. Initiated chemical vapor deposition (iCVD) is a subset of the CVD technique that conjoins bulk free-radical polymerization chemistry with gas-phase processing. The novelty of iCVD technique stems from the use of an initiator that can be activated at low energies (150 -- 300 °C) to react with surface adsorbed monomer to form a polymer film. This reduces risk for potential unwarranted side-reactions. Until recently, majority of iCVD research was limited to understanding the deposition kinetics with monomer properties being the principal parameters. However, there is a lack of study on the properties of deposited films which is critical for utilizing the technique in any real-world applications. The work presented here aims to advance investigation in this direction by characterizing the thermal properties of iCVD polymer films with primary focus on the initiators. A detailed characterization of custom-built iCVD system served as ground work for following investigations. Poly(neopentyl methacrylate) (PnPMA) thin films were deposited with tert-butyl peroxide (TBPO) initiators and their Tg, CTE and thermal degradation properties were investigated. iCVD PnPMA films presented low-temperature degradation peaks attributed to weak linkages from H-abstraction and beta-scission reactions of TBPO. To test this hypothesis, PnPMA films were deposited with tert-butyl peroxybenzoate (TBPOB) which is selective towards vinyl addition. Contrary to expected results, TBPOB initiated films showed degradation at lower temperatures compared to TBPO initiated films. It is postulated that with TBPOB, the surface initiator concentration is higher and consequently small oligomeric molecules were formed that degraded easily. Following these investigations, poly

  2. Thin film zinc oxide deposited by CVD and PVD

    Science.gov (United States)

    Hamelmann, Frank U.

    2016-10-01

    Zinc oxide is known as a mineral since 1810, but it came to scientific interest after its optoelectronic properties found to be tuneable by p-type doping. Since the late 1980’s the number of publications increased exponentially. All thin film deposition technologies, including sol-gel and spray pyrolysis, are able to produce ZnO films. However, for outstanding properties and specific doping, only chemical vapor deposition and physical vapor deposition have shown so far satisfying results in terms of high conductivity and high transparency. In this paper the different possibilities for doping will be discussed, some important applications of doped ZnO thin films will be presented. The deposition technologies used for industrial applications are shown in this paper. Especially sputtering of aluminium doped Zinc Oxide (ZnO:Al or AZO) and LPCVD of boron doped Zinc Oxide (ZnO:B or BZO) are used for the commercial production of transparent conductive oxide films on glass used for thin film photovoltaic cells. For this special application the typical process development for large area deposition is presented, with the important trade-off between optical properties (transparency and ability for light scattering) and electrical properties (conductivity). Also, the long term stability of doped ZnO films is important for applications, humidity in the ambient is often the reason for degradation of the films. The differences between the mentioned materials are presented.

  3. Modelling and analysis of CVD processes in porous media for ceramic composite preparation

    NARCIS (Netherlands)

    Lin, Y.S.; Burggraaf, A.J.

    1991-01-01

    A continuum phenomenological model is presented to describe chemical vapour deposition (CVD) of solid product inside porous substrate media for the preparation of reinforced ceramic-matrix composites [by the chemical vapour infiltration (CVI) process] and ceramic membrane composites (by a modified C

  4. Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

    Indian Academy of Sciences (India)

    S B Singh; M Pandey; N Chand; A Biswas; D Bhattacharya; S Dash; A K Tyagi; R M Dey; S K Kulkarni; D S Patil

    2008-10-01

    Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. During deposition, a d.c. self-bias was applied to the substrates by application of 13.56 MHz rf power. DLC films deposited at three different bias voltages (–60 V, –100 V and –150 V) were characterized by FTIR, Raman spectroscopy and spectroscopic ellipsometry to study the variation in the bonding and optical properties of the deposited coatings with process parameters. The mechanical properties such as hardness and elastic modulus were measured by load depth sensing indentation technique. The DLC film deposited at –100 V bias exhibit high hardness (∼ 19 GPa), high elastic modulus (∼ 160 GPa) and high refractive index (∼ 2.16–2.26) as compared to films deposited at –60 V and –150 V substrate bias. This study clearly shows the significance of substrate bias in controlling the optical and mechanical properties of DLC films.

  5. Tantalum Coating of Steel, Copper, Aluminum, and Titanium by Thermal Chemical Vapor Deposition (CVD)

    DEFF Research Database (Denmark)

    Christensen, Erik; Bjerrum, Niels

    1998-01-01

    Tantalum coatings ranging from 0.5 to 120 mm has been deposited by CVD at 625-1000 C using tantalum pentachloride as precursor. Deposition rates range from 1 to 80mm/h and an activation energy of 103 kJ/mole is calculated. Well adhering deposits has been obtained on stainless steel, carbon steels...

  6. Correlation between optical emission spectra and the process parameters of a 915 MHz microwave plasma CVD reactor used for depositing polycrystalline diamond coatings

    Indian Academy of Sciences (India)

    Awadesh Kumar Mallik; Sandip Bysakh; Someswar Dutta; Debabrata Basu

    2014-08-01

    In this paper, the hydrogen and hydrogen-methane mixed plasma have been generated inside a 33 cm diameter quartz bell jar with a low power (9 KW) and lower frequency 915 MHz microwave plasma chemical vapor deposition system. The reactor is being used for growing polycrystalline diamond (PCD) over large area (100 mm). The generated plasma is diagnosed by in situ optical emission spectroscopy method with wave length ranging from 200 to 900 nm. The effects of microwave power, chamber pressure and gas concentration on plasma characteristics have been studied in this work. Within the optical range, Balmer H, H, C2swan band and CH lines have been detected at the wavelengths of 655.95, 485.7, 515.82 and 430.17 nm, respectively. It has been observed that for hydrogen plasma, the amount of transition from hydrogen atom inner shell 3 to 2 (H) is almost constant with increasing microwave (MW) power (from 2000 to 2800 W) and pressure (from 15 to 30 Torr) initially, after that it increases with further increase of MW power and pressure, whereas, the transition from 4 to 2 (H) is slowly increased with increasing MW power and pressure. For hydrogen-methane plasma, intensities of C2 swan band, i.e., the transitions from D$^3\\Pi_\\text{g}$ to A$^3\\Pi_{\\mu}$ energy levels, are also increased with the increasing microwave power and reactor pressure. It has been observed that the radicals present in the plasma are affected by variation of different reactor parameters like pressure, MW power, CH4 concentration, etc.

  7. Chemical vapor deposition (CVD) of uranium for alpha spectrometry; Deposicion quimica de vapor (CVD) de uranio para espectrometria alfa

    Energy Technology Data Exchange (ETDEWEB)

    Ramirez V, M. L.; Rios M, C.; Ramirez O, J.; Davila R, J. I.; Mireles G, F., E-mail: luisalawliet@gmail.com [Universidad Autonoma de Zacatecas, Unidad Academica de Estudios Nucleares, Cipres No. 10, Fracc. La Penuela, 98068 Zacatecas (Mexico)

    2015-09-15

    The uranium determination through radiometric techniques as alpha spectrometry requires for its proper analysis, preparation methods of the source to analyze and procedures for the deposit of this on a surface or substrate. Given the characteristics of alpha particles (small penetration distance and great loss of energy during their journey or its interaction with the matter), is important to ensure that the prepared sources are thin, to avoid problems of self-absorption. The routine methods used for this are the cathodic electro deposition and the direct evaporation, among others. In this paper the use of technique of chemical vapor deposition (CVD) for the preparation of uranium sources is investigated; because by this, is possible to obtain thin films (much thinner than those resulting from electro deposition or evaporation) on a substrate and comprises reacting a precursor with a gas, which in turn serves as a carrier of the reaction products to achieve deposition. Preliminary results of the chemical vapor deposition of uranium are presented, synthesizing and using as precursor molecule the uranyl acetylacetonate, using oxygen as carrier gas for the deposition reaction on a glass substrate. The uranium films obtained were found suitable for alpha spectrometry. The variables taken into account were the precursor sublimation temperatures and deposition temperature, the reaction time and the type and flow of carrier gas. Of the investigated conditions, two depositions with encouraging results that can serve as reference for further work to improve the technique presented here were selected. Alpha spectra obtained for these depositions and the characterization of the representative samples by scanning electron microscopy and X-ray diffraction are also presented. (Author)

  8. Improved CVD Techniques for Depositing Passivation Layers of ICs

    Science.gov (United States)

    1975-10-01

    went into compressive stress of 1.3 x 10 dynes/cm2. Results NX • thus show that room-temperature stress in CVD films can be reduced to nearly 35 -4 0...fluorescence working curves. X-ray fluorescence radiation measurements were carried out using a Siemens Crystalloflex 4 x-ray generator with a chromium target x...ray tube (2000 W) and a Siemens Vacuum X-Ray Spectrometer Model VRS. Sample area of measurement was usually 0.50 cm2 . 2= Experimental results will be

  9. FY1995 development of a clean CVD process by evaluation and control of gas phase nucleation phenomena; 1995 nendo kisokaku seisei gensho no hyoka to seigyo ni yoru clean CVD process no kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    The purpose of this study is to develop a high-rate and clean chemical vapor deposition (CVD) process as a breakthrough technique to overcome the problems that particles generated in the gas phase during CVD process for preparation of functional thin films cause reduced product yield and deterioration of the films. In the CVD process proposed here, reactant gas and generated particles are electrically charged to control the motion of them with an electric field. In this study, gas-phase nucleation phenomena are evaluated both theoretically and experimentally. A high-rate, ionized CVD method is first developed, in which reactant gas and generated particles are charged with negative ions generated from a radioisotope source and the UV/photoelectron method, and the motion of the charged gas and particles is controlled with an electric field. Charging and transport processes of fine particles are then investigated experimentally and theoretically to develop a clean CVD method in which generated particles are removed with the electric forces. As a result, quantitative evaluation of the charging and transport process was made possible. We also developed devices for measuring the size distribution and concentration of fine particles in low pressure gas such as those found in plasma CVD processes. In addition, numerical simulation and experiments in this study for a TEOS/O{sub 3} CVD process to prepare thin films could determine reaction rates which have not been known so far and give information on selecting good operation conditions for the process. (NEDO)

  10. Thin alumina and silica films by chemical vapor deposition (CVD)

    NARCIS (Netherlands)

    Hofman, R.; Morssinkhof, R.W.J.; Fransen, T.; Westheim, J.G.F.; Gellings, P.J.

    1993-01-01

    Alumina and silica coatings have been deposited by MOCVD (Metal Organic Chemical Vapor Deposition) on alloys to protect them against high temperature corrosion. Aluminium Tri-lsopropoxide (ATI) and DiAcetoxyDitertiaryButoxySilane (DAOBS) have been used as metal organic precursors to prepare these ce

  11. CVD growth and processing of graphene for electronic applications

    Energy Technology Data Exchange (ETDEWEB)

    Kumar, Shishir; Rezvani, Ehsan; Nolan, Hugo; Duesberg, Georg S. [School of Chemistry, Trinity College Dublin, Dublin 2 (Ireland); Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2 (Ireland); McEvoy, Niall; Kim, Hye-Young; Lee, Kangho; Peltekis, Nikos; Weidlich, Anne; Daly, Ronan [Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2 (Ireland)

    2011-11-15

    The remarkable properties of graphene have potential for numerous applications; however, their exploitation depends on its reliable production. The chemical vapour deposition (CVD) growth of graphene on metal surfaces has become one of the most promising strategies for the production of high quality graphene in a scaleable manner. Here, we discuss graphene growth on nickel (Ni) and copper (Cu) directly from both gaseous hydrocarbons and solid carbon precursors. Further, we discuss in detail the transfer of graphene films to insulating substrates, by direct and polymer supported transfer methods. (Copyright copyright 2011 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  12. Oxidation Resistance of CVD (Chemical Vapor Deposition) Coatings

    Science.gov (United States)

    1987-02-01

    carbonaceous residuoe were overcome, and dense, iadherent, coat-ings which :ýtop oxidat-ion Of the substrate art! reliably produced. The iridium deposition...flow, pressure and geometry within the reaction chamber, and substrate material. For the coating to have high integrity and adhesion to the substrate...entirely produced by Ultramet using chemical vapor deposition and a novel integrated fabrication technique. Coating the inside of a long chamber presents

  13. Synthesis of crystalline Ge nanoclusters in PE-CVD-deposited SiO2 films

    DEFF Research Database (Denmark)

    Leervad Pedersen, T.P.; Skov Jensen, J.; Chevallier, J.

    2005-01-01

    The synthesis of evenly distributed Ge nanoclusters in plasma-enhanced chemical-vapour-deposited (PE-CVD) SiO2 thin films containing 8 at. % Ge is reported. This is of importance for the application of nanoclusters in semiconductor technology. The average diameter of the Ge nanoclusters can...

  14. Advances in the chemical vapor deposition (CVD) of Tantalum

    DEFF Research Database (Denmark)

    Mugabi, James Atwoki; Eriksen, Søren; Christensen, Erik

    2014-01-01

    The chemical stability of tantalum in hot acidic media has made it a key material in the protection of industrial equipment from corrosion under such conditions. The Chemical Vapor Deposition of tantalum to achieve such thin corrosion resistant coatings is one of the most widely mentioned examples...

  15. Deposition of device quality silicon nitride with ultra high deposition rate (> 7 nm/s) using hot-wire CVD

    NARCIS (Netherlands)

    Verlaan, V.; Houweling, Z.S.; van der Werf, C.H.M.; Romijn, I.G.; Schropp, R.E.I.; Goldbach, H.D.

    2008-01-01

    The application of hot-wire (HW) CVD deposited silicon nitride (SiNx) as passivating anti-reflection coating on multicrystalline silicon (mc-Si) solar cells is investigated. The highest efficiency reached is 15.7% for SiNx layers with an N/Si ratio of 1.20 and a high mass density of 2.9 g/cm3. These

  16. Low temperature back-surface-field contacts deposited by hot-wire CVD for heterojunction solar cells

    Energy Technology Data Exchange (ETDEWEB)

    Munoz, D. [Universitat Politecnica de Catalunya, Grup de Recerca en Micro i Nanotecnologies, Jordi Girona 1-3, Barcelona 08034 (Spain)], E-mail: delfina@eel.upc.edu; Voz, C.; Martin, I.; Orpella, A.; Alcubilla, R. [Universitat Politecnica de Catalunya, Grup de Recerca en Micro i Nanotecnologies, Jordi Girona 1-3, Barcelona 08034 (Spain); Villar, F.; Bertomeu, J.; Andreu, J. [CeRMAE-Universitat de Barcelona, Departament de Fisica Aplicada i Optica, Diagonal 647, Barcelona 08028 (Spain); Roca-i-Cabarrocas, P. [LPICM-Ecole Polytechnique, CNRS 91128 Palaiseau (France)

    2008-08-30

    The growing interest in using thinner wafers (< 200 {mu}m) requires the development of low temperature passivation strategies for the back contact of heterojunction solar cells. In this work, we investigate low temperature deposited back contacts based on boron-doped amorphous silicon films obtained by Hot-Wire CVD. The influence of the deposition parameters and the use of an intrinsic buffer layer have been considered. The microstructure of the deposited thin films has been comprehensively studied by Spectroscopic Ellipsometry in the UV-visible range. The effective recombination velocity at the back surface has been measured by the Quasi-Steady-State Photoconductance technique. Complete double-side heterojunction solar cells (1 cm{sup 2}) have been fabricated and characterized by External Quantum Efficiency and current-voltage measurements. Total-area conversion efficiencies up to 14.5% were achieved in a fully low temperature process (< 200 deg. C)

  17. Stable dropwise condensation for enhancing heat transfer via the initiated chemical vapor deposition (iCVD) of grafted polymer films.

    Science.gov (United States)

    Paxson, Adam T; Yagüe, Jose L; Gleason, Karen K; Varanasi, Kripa K

    2014-01-22

    Ultra-thin copolymer films are deposited by initiated chemical deposition (iCVD) to investigate their performance under the condensation of water vapor. By forming a grafted interface between the coating and the substrate, the films exhibit stable dropwise condensation even when subjected to 100 °C steam. The applicability of the iCVD to complex substrate geometries is demonstrated on a copper condenser coil.

  18. Mechanics-driven patterning of CVD graphene for roll-based manufacturing process

    Science.gov (United States)

    Kim, Sang-Min; Jang, Bongkyun; Jo, Kyungmin; Kim, Donghyuk; Lee, Jihye; Kim, Kyung-Shik; Lee, Seung-Mo; Lee, Hak-Joo; Han, Seung Min; Kim, Jae-Hyun

    2017-06-01

    Graphene is considered as a promising material for flexible and transparent electrodes due to its outstanding electrical, optical, and mechanical properties. Efforts to mass-produce graphene electrodes led to the development of roll-to-roll chemical vapor deposition (CVD) graphene growth and transfer, and the only remaining obstacle to the mass-production of CVD graphene electrodes is a cost-effective patterning technique that is compatible with the roll-to-roll manufacturing. Herein, we propose a mechanics-driven technique for patterning graphene synthesized on copper foil (commonly used in roll-to-roll manufacturing). The copper foil is exposed to high temperature for a prolonged period during the CVD growth of graphene, and thus can result in recrystallization and grain growth of the copper foil and thereby reducing to the yield strength. This softening behavior of the copper was carefully controlled to allow simple stamp patterning of the graphene. The strength of the underlying substrate was controlled for the accuracy of the residual patterns. The proposed stamp patterning technique is mask-less and photoresist-free, and can be performed at room temperature without high-energy sources such as lasers or plasma. To demonstrate the capability of this process to produce a continuous electrode, a transparent in-plane supercapacitor was fabricated using the proposed patterning technique.

  19. Zirconium influence on microstructure of aluminide coatings deposited on nickel substrate by CVD method

    Indian Academy of Sciences (India)

    Jolanta Romanowska; Maryana Zagula-Yavorska; Jan Sieniawski

    2013-11-01

    Influence of Zr on the microstructure and phase characteristics of aluminide diffusion coatings deposited on the nickel substrate has been investigated in this study. The coatings with and without zirconium were deposited by CVD method. The cross-section chemical composition investigations revealed that during the coatings formation, there is an inward aluminum diffusion and outward nickel diffusion in both types of coatings (with and without zirconium), whereas zirconium is located far below the coating surface, at a depth of ∼17 m, between -NiAl phase and '-Ni3Al phase. XRD examinations showed that -NiAl, -NiAl and '-Ni3Al were the main components of the deposited coatings. -NiAl phase is on the surface of the coatings, whereas -NiAl and '-Ni3Al form deeper parts of the coatings. Zirconium is dissolved in NiAl on the border between -NiAl and '-Ni3Al.

  20. Evaluating electrically insulating films deposited on V-4% Cr-4% Ti by reactive CVD

    Energy Technology Data Exchange (ETDEWEB)

    Park, J.H.; Cho, W.D. [Argonne National Lab., IL (United States)

    1997-04-01

    Previous CaO coatings on V-4%Cr-4%Ti exhibited high-ohmic insulator behavior even though a small amount of vanadium from the alloy was incorporated in the coating. However, when the vanadium concentration in the coatings is > 15 wt%, the coating becomes conductive. When the vanadium concentration is high in localized areas, a calcium vanadate phase that exhibits semiconductor behavior can form. To explore this situation, CaO and Ca-V-O coatings were produced on vanadium alloys by chemical vapor deposition (CVD) and by a metallic-vapor process to investigate the electrical resistance of the coatings. Initially, the vanadium alloy specimens were either charged with oxygen in argon that contained trace levels of oxygen, or oxidized for 1.5-3 h in a 1% CO-CO{sub 2} gas mixture or in air to form vanadium oxide at 625-650{degrees}C. Most of the specimens were exposed to calcium vapor at 800-850{degrees}C. Initial and final weights were obtained to monitor each step, and surveillance samples were removed for examination by optical and scanning electron microscopy and electron-energy-dispersive and X-ray diffraction analysis; the electrical resistivity was also measured. The authors found that Ca-V-O films exhibited insulator behavior when the ratio of calcium concentration to vanadium concentration R in the film was > 0.9, and semiconductor or conductor behavior for R < 0.8. However, in some cases, semiconductor behavior was observed when CaO-coated samples with R > 0.98 were exposed in liquid lithium. Based on these studies, the authors conclude that semiconductor behavior occurs if a conductive calcium vanadate phase is present in localized regions in the CaO coating.

  1. Deposition of ZnO Films on Freestanding CVD Thick Diamond Films

    Institute of Scientific and Technical Information of China (English)

    SUN Jian; BAI Yi-Zhen; YANG Tian-Peng; XU Yi-Bin; WANG Xin-Sheng; DU Guo-Tong; WU Han-Hua

    2006-01-01

    @@ For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.

  2. An economic CVD technique for pure SnO2 thin films deposition: Temperature effects

    Indian Academy of Sciences (India)

    M Maleki; S M Rozati

    2013-04-01

    A modified new method of CVD for formation of pure layers of tin oxide films was developed. This method is very simple and inexpensive and produces films with good electrical properties. The effect of substrate temperature on the sheet resistance, resistivity, mobility, carrier concentration and transparency of the films has been studied. The best sheet resistance obtained at substrate temperature of 500 ◦C was about 27 /cm2. X-ray diffraction showed that the structure of deposited films was polycrystalline with a grain size between 150–300 Å. The preferred orientation was (211) for films deposited at substrate temperature of about 500 °C. FESEM micrographs revealed that substrate temperature is an important factor for increasing grain size and modifies electrical parameters. UV-visible measurement showed reduction of transparency and bandgap of the layers with increasing substrate temperature.

  3. Field emission from carbon films deposited by VHF CVD on difference substrates

    Energy Technology Data Exchange (ETDEWEB)

    Abramov, A A; Andronov, A N; Felter, T E; Ioffe, A F; Kosarev, A I; Shotov, M V; Vinogradov, A J

    1999-04-01

    As previously demonstrated, non-diamond carbon (NDC) films deposited at low temperatures 200-300 C on silicon tips reduced the threshold of field emission. In this paper we will present the results of the study of field emission from flat NDC films prepared by VHF CVD. Emission measurements were performed in a diode configuration at approximately 10{sup {minus}10} Torr. NDC films were deposited on ceramic and on c-Si substrates sputter coated with layers of Ti, Cu, Ni and Pt. The back contact material influences the emission characteristics but not as a direct correlation to work function. A model of field emission from metal-NDC film structures will be discussed.

  4. Effect of surface irradiation during the photo-CVD deposition of a-Si:H thin films. Hikari CVD ho ni yoru amorphous silicon sakuseiji no kiban hikari reiki koka

    Energy Technology Data Exchange (ETDEWEB)

    Tasaka, K.; Doering, H.; Hashimoto, K.; Fujishima, A. (The University of Tokyo, Tokyo (Japan))

    1990-12-06

    This paper shows the impact of the irradiation from an additional light source during the deposition of hydrogenated amorphous silicon by photo-CVD deposition. Using a mercury sensitized photo-CVD process from Disilan (Si {sub 2} H {sub 6}) and hydrogen, silicon was deposited. A 40W low pressure mercury lamp was applied as the light source. A portion of the substrate was in addition irradiated using an Xg-He lamp through a thermal filter. Irradiation of the substrate using only Xg-He lamp produced no deposition, since this light has a wavelength which is too long to produce the SiH {sub 3}-radicals needed for Si deposition. The additional Xg-He light source was discovered to cause an increased thickness of deposited a-Si:H film and a transmission of the band structure. The reasons of these are considered that the influence of irradiation is not limited to film thickness, but that irradiation also impacts the composition of the a-Si:H film so as to cause a reduction in the hydrogen content. 10 figs., 1 tab.

  5. Optimization of process parameters in a large-area hot-wire CVD reactor for the deposition of amorphous silicon (a-Si:H) for solar cell application with highly uniform material quality

    Energy Technology Data Exchange (ETDEWEB)

    Pflueger, A.; Mukherjee, C.; Schroeder, B. [Department of Physics, Center of Materials Science, University of Kaiserslautern, P.O. Box 3049, D-67653 Kaiserslautern (Germany)

    2002-07-01

    Scale-up of a-Si:H-based thin film applications such as solar cells, entirely or partly prepared by hot-wire chemical vapor deposition (HWCVD), requires research on the deposition process in a large-area HWCVD system. The influence of gas supply and filament geometry on thickness uniformity has already been reported, but their influence on material quality is systematically studied for the first time. The optimization of deposition parameters for obtaining best material quality in our large-area HWCVD system resulted in an optimum filament temperature, T{sub fil}{approx}1600C, pressure, p=8mTorr and silane flow, F(SiH{sub 4})=100sccm, keeping the substrate temperature at T{sub S}=200C. A special gas supply (gas shower with tiny holes of uniform size) and a filament grid, consisting of six filaments with an interfilament distance, d{sub fil}=4cm were used. The optimum filament-to-substrate distance was found to be d{sub fil-S}=8.4cm. While studying the influence of different d{sub fil} and gas supply configurations on the material quality, the above-mentioned setup and parameters yield best results for both uniformity and material quality. With the setup mentioned, we could achieve device quality a-Si:H films with a thickness uniformity of {+-}2.5% on a circular area of 20cm in diameter. The material, grown at a deposition rate of r{sub d}{approx}4A/s, was characterized on nine positions of the 30cmx30cm substrate area, and revealed reasonable uniformity of the opto-electronic properties, e.g photosensitivity, {sigma}{sub Ph}/{sigma}{sub D}=(2.46{+-}0.7)x10{sup 5}, microstructure factor, R=0.17{+-}0.05, defect densities, N{sub d(PDS)}=(2.06{+-}0.6)x10{sup 17}cm{sup -3} and N{sub d(CPM)}=(2.05{+-}0.5)x10{sup 16}cm{sup -3} (film properties are given as mean values and standard deviations). Finally, we fabricated pin solar cells, with the i-layer deposited on small-area p-substrates distributed over an area of 20cmx20cm in this large-area deposition system, and

  6. Influence of tungsten on the carbon nanotubes growth by CVD process

    Energy Technology Data Exchange (ETDEWEB)

    Escobar, Mariano [Instituto de Fisicoquimica de Materiales, Ambiente y Energia, CONICET-UBA, Pabellon II, Ciudad Universitaria (1428) Bs As (Argentina); LP and MC, Dep. De Fisica, FCEyN-UBA, Pabellon 1, Ciudad Universitaria (1428) Bs As (Argentina)], E-mail: mescobar@qi.fcen.uba.ar; Rubiolo, Gerardo H. [LP and MC, Dep. De Fisica, FCEyN-UBA, Pabellon 1, Ciudad Universitaria (1428) Bs As (Argentina); Unidad de Actividad Materiales, CNEA, Av. Gral. Paz 1499, San Martin (1650), Bs As (Argentina); Moreno, M. Sergio [Centro Atomico Bariloche, (8400) S.C. de Bariloche, Rio Negro (Argentina); Goyanes, Silvia [LP and MC, Dep. De Fisica, FCEyN-UBA, Pabellon 1, Ciudad Universitaria (1428) Bs As (Argentina); Candal, Roberto [Instituto de Fisicoquimica de Materiales, Ambiente y Energia, CONICET-UBA, Pabellon II, Ciudad Universitaria (1428) Bs As (Argentina)

    2009-06-24

    The effect of tungsten (W) on the growth of multi-walled carbon nanotubes (MWNTs) using the chemical vapour deposition (CVD) process over a metal Fe-W catalyst incorporated into a silica matrix is reported. A W molar content in Fe/SiO{sub 2} up to 10% was studied. The incorporation of only 2% of W substantially modifies the crystalline phases and the crystalline degree of the catalyst during the MWNTs synthesis. This fact seems to have a strong influence on the type and yield of the carbonaceous species obtained by the CVD of acetylene, at 600 deg. C and 180 Torr, over each catalyst. Tungsten interacts with iron within the matrix, diminishing the catalytic activity of the metal nanoparticles, and both, carbon nanotubes and carbon nanofibers, are obtained when tungsten is present. The results obtained support the hypothesis of a base growth model for carbon nanotubes indicating a strong interaction between silica matrix and Fe/W nanoparticles, independently of the content of W.

  7. Drastically Enhanced High-Rate Performance of Carbon-Coated LiFePO4 Nanorods Using a Green Chemical Vapor Deposition (CVD) Method for Lithium Ion Battery: A Selective Carbon Coating Process.

    Science.gov (United States)

    Tian, Ruiyuan; Liu, Haiqiang; Jiang, Yi; Chen, Jiankun; Tan, Xinghua; Liu, Guangyao; Zhang, Lina; Gu, Xiaohua; Guo, Yanjun; Wang, Hanfu; Sun, Lianfeng; Chu, Weiguo

    2015-06-03

    Application of LiFePO4 (LFP) to large current power supplies is greatly hindered by its poor electrical conductivity (10(-9) S cm(-1)) and sluggish Li+ transport. Carbon coating is considered to be necessary for improving its interparticle electronic conductivity and thus electrochemical performance. Here, we proposed a novel, green, low cost and controllable CVD approach using solid glucose as carbon source which can be extended to most cathode and anode materials in need of carbon coating. Hydrothermally synthesized LFP nanorods with optimized thickness of carbon coated by this recipe are shown to have superb high-rate performance, high energy, and power densities, as well as long high-rate cycle lifetime. For 200 C (18s) charge and discharge, the discharge capacity and voltage are 89.69 mAh g(-1) and 3.030 V, respectively, and the energy and power densities are 271.80 Wh kg(-1) and 54.36 kW kg(-1), respectively. The capacity retention of 93.0%, and the energy and power density retention of 93.6% after 500 cycles at 100 C were achieved. Compared to the conventional carbon coating through direct mixing with glucose (or other organic substances) followed by annealing (DMGA), the carbon phase coated using this CVD recipe is of higher quality and better uniformity. Undoubtedly, this approach enhances significantly the electrochemical performance of high power LFP and thus broadens greatly the prospect of its applications to large current power supplies such as electric and hybrid electric vehicles.

  8. High-speed deposition of titanium carbide coatings by laser-assisted metal–organic CVD

    Energy Technology Data Exchange (ETDEWEB)

    Gong, Yansheng [Faculty of Materials Science and Chemistry, China University of Geosciences, Wuhan 430074 (China); Tu, Rong, E-mail: turong@whut.edu.cn [State Key Laboratory of Advanced Technology for Material Synthesis and Processing, Wuhan University of Technology, Wuhan 430070 (China); Goto, Takashi [Institute for Materials Research, Tohoku University, Aoba-ku, 2-1-1 Katahira, Sendai 980-8577 (Japan)

    2013-08-01

    Graphical abstract: - Highlights: • A semiconductor laser was first used to prepare wide-area LCVD-TiC{sub x} coatings. • The effect of laser power for the deposition of TiC{sub x} coatings was discussed. • TiC{sub x} coatings showed a columnar cross section and a dense surface texture. • TiC{sub x} coatings had a 1–4 order lower laser density than those of previous reports. • This study gives the possibility of LCVD applying on the preparation of TiC{sub x} coating. - Abstract: A semiconductor laser-assisted chemical vapor deposition (LCVD) of titanium carbide (TiC{sub x}) coatings on Al{sub 2}O{sub 3} substrate using tetrakis (diethylamido) titanium (TDEAT) and C{sub 2}H{sub 2} as source materials were investigated. The influences of laser power (P{sub L}) and pre-heating temperature (T{sub pre}) on the microstructure and deposition rate of TiC{sub x} coatings were examined. Single phase of TiC{sub x} coatings were obtained at P{sub L} = 100–200 W. TiC{sub x} coatings had a cauliflower-like surface and columnar cross section. TiC{sub x} coatings in the present study had the highest R{sub dep} (54 μm/h) at a relative low T{sub dep} than those of conventional CVD-TiC{sub x} coatings. The highest volume deposition rate (V{sub dep}) of TiC{sub x} coatings was about 4.7 × 10{sup −12} m{sup 3} s{sup −1}, which had 3–10{sup 5} times larger deposition area and 1–4 order lower laser density than those of previous LCVD using CO{sub 2}, Nd:YAG and argon ion laser.

  9. Effect of PbI2 deposition rate on two-step PVD/CVD all-vacuum prepared perovskite

    Science.gov (United States)

    Ioakeimidis, Apostolos; Christodoulou, Christos; Lux-Steiner, Martha; Fostiropoulos, Konstantinos

    2016-12-01

    In this work we fabricate all-vacuum processed methyl ammonium lead halide perovskite by a sequence of physical vapour deposition of PbI2 and chemical vapour deposition (CVD) of CH3NH3I under a static atmosphere. We demonstrate that for higher deposition rate the (001) planes of PbI2 film show a higher degree of alignment parallel to the sample's surface. From X-ray diffraction data of the resulted perovskite film we derive that the intercalation rate of CH3NH3I is fostered for PbI2 films with higher degree of (001) planes alignment. The stoichiometry of the produced perovskite film is also studied by Hard X-ray photoelectron spectroscopy measurements. Complete all-vacuum perovskite solar cells were fabricated on glass/ITO substrates coated by an ultra-thin (5 nm) Zn-phthalocyanine film as hole selective layer. A dependence of residual PbI2 on the solar cells performance is displayed, while photovoltaic devices with efficiency up to η=11.6% were achieved.

  10. The optoelectronic properties of silicon films deposited by inductively coupled plasma CVD

    Energy Technology Data Exchange (ETDEWEB)

    Qin Yanli; Yan Hengqing; Li Fei; Qiao Li; Liu Qiming [Department of Physics, Lanzhou University, Lanzhou 730000 (China); He Deyan, E-mail: hedy@lzu.edu.cn [Department of Physics, Lanzhou University, Lanzhou 730000 (China)

    2010-11-15

    Hydrogenated amorphous and microcrystalline silicon films were deposited by inductively coupled plasma chemical vapor deposition (ICP-CVD) at low substrate temperatures using H{sub 2}-diluted SiH{sub 4} as a source gas. High-density plasma generated by inductively coupled excitation facilitates the crystallization of silicon films at low temperatures, and microcrystalline silicon films were obtained at the substrate temperature as low as 180 deg. C. The columnar structure of the films becomes more and more compact with an increase of their crystallinity. The reduction of hydrogen content in the films causes a narrowing of the optical bandgap and an enhancement of the absorption with increasing the substrate temperature. The microcrystalline silicon films show two electronic transport mechanisms: one is related to the density of state distribution in the temperature region near room temperature and the other is the variable range hopping between localized electronic states close to the Fermi level below 170 K. A reasonable explanation is presented for the dependence of the optoelectronic properties on the microstructure of the silicon films. The films prepared at a substrate temperature of 300 deg. C have highly crystalline and compact columnar structure, high optical absorption coefficient and electrical conductivity, and a low hydrogen content of 3.8%.

  11. Functional materials - Study of process for CVD SiC/C composite material

    Energy Technology Data Exchange (ETDEWEB)

    Choi, Doo Jin; Wang, Chae Chyun; Lee, Young Jin; Oh, Byung Jun [Yonsei University, Seoul (Korea)

    2000-04-01

    The CVD SiC coating techniques are the one of high functional material manufactures that improve the thermal, wear, oxidization and infiltration resistance of the surface of raw materials and extend the life of material. Silicon carbide films have been grown onto graphite substrates by low pressure chemical vapor deposition using MTS(CH{sub 3}SiCl{sub 3}) as a source precursor and H{sub 2} or N{sub 2} as a diluent gas. The experiments for temperature and diluent gas addition changes were performed. The effect of temperature from 900 deg. C to 1350 deg. C and the alteration of diluent gas species on the growth rate and structure of deposits have been studied. The experimental results showed that the deposition rate increased with increasing deposition temperature irrespective of diluent gases and reactant depletion effect increased especially at H{sub 2} diluent gas ambient. As the diluent gas added, the growth rate decreased parabolically. For N{sub 2} addition, surface morphology of leaf-like structure appeared, and for H{sub 2}, faceted structure at 1350 deg. C. The observed features were involved by crystalline phase of {beta}-SiC and surface composition with different gas ambient. We also compared the experimental results of the effect of partial pressure on the growth rate with the results of theoretical approach based on the Langmuir-Hinshelwood model. C/SiC composites were prepared by isothermal chemical vapor infiltration (ICVI). In order to fabricate the more dense C/SiC composites, a novel process of the in-situ whisker growing and filling during ICVI was devised, which was manipulated by alternating dilute gas species. The denser C/SiC composites were successfully prepared by the novel process comparing with the conventional ICVI process. 64 refs., 36 figs., 5 tabs. (Author)

  12. Filament poisoning at typical carbon nanotube deposition conditions by hot-filament CVD

    CSIR Research Space (South Africa)

    Oliphant, CJ

    2009-05-01

    Full Text Available This paper reports on the poisoning of tungsten filaments during the hot-filament chemical vapour deposition process at typical carbon nanotube (CNT) deposition conditions and filament temperatures ranging from 1400 to 2000 °C. The morphological...

  13. Hot wire CVD deposition of nanocrystalline silicon solar cells on rough substrates

    Energy Technology Data Exchange (ETDEWEB)

    Li, Hongbo B.T., E-mail: h.li@uu.n [Utrecht University, Faculty of Science, Debye Institute for Nanomaterials Science, P.O. Box 80000, 3508 TA Utrecht (Netherlands); Werf, Karine H.M. van der; Rath, Jatin K.; Schropp, Ruud E.I. [Utrecht University, Faculty of Science, Debye Institute for Nanomaterials Science, P.O. Box 80000, 3508 TA Utrecht (Netherlands)

    2009-04-30

    In silicon thin film solar cell technology, frequently rough or textured substrates are used to scatter the light and enhance its absorption. The important issue of the influence of substrate roughness on silicon nanocrystal growth has been investigated through a series of nc-Si:H single junction p-i-n solar cells containing i-layers deposited with Hot-wire CVD. It is shown that silicon grown on the surface of an unoptimized rough substrate contains structural defects, which deteriorate solar cell performance. By introducing parameter v, voids/substrate area ratio, we could define a criterion for the morphology of light trapping substrates for thin film silicon solar cells: a preferred substrate should have a v value of less than around 1 x 10{sup -6}, correlated to a substrate surface rms value of lower than around 50 nm. Our Ag/ZnO substrates with rms roughness less than this value typically do not contain microvalleys with opening angles smaller than {approx} 110{sup o}, resulting in solar cells with improved output performance. We suggest a void-formation model based on selective etching of strained Si-Si atoms due to the collision of growing silicon film surface near the valleys of the substrate.

  14. Properties of Boron-dopedμc-Ge:H Films Deposited by Hot-wire CVD

    Institute of Scientific and Technical Information of China (English)

    HUANG Haibin; SHEN Honglie; WU Tianru; LU Linfeng; TANG Zhengxia; SHEN Jiancang

    2015-01-01

    Boron-doped hydrogenated microcrystalline Germanium (μc-Ge:H)fi lms were deposited by hot-wire CVD. H2 diluted GeH4 and B2H6 were used as precursors and the substrate temperature was kept at 300ć. The properties of the samples were analyzed by XRD, Raman spectroscopy, Fourier transform infrared spectrometer and Hall Effect measurement with Van der Pauw method. It is found that thefi lms are partially crystallized, with crystalline fractions larger than 45% and grain sizes smaller than 50 nm. The B-doping can enhance the crystallization but reduce the grain sizes, and also enhance the preferential growth of Ge (220). The conductivity of thefi lms increases and tends to be saturated with increasingdiborane-to-germane ratio . All the Hall mobilities of the samples are larger than 3.8 cm2·V-1·s-1. A high conductivity of 41.3Ω-1ίcm-1 is gained at=6.7%.

  15. Process in manufacturing high efficiency AlGaAs/GaAs solar cells by MO-CVD

    Science.gov (United States)

    Yeh, Y. C. M.; Chang, K. I.; Tandon, J.

    1984-01-01

    Manufacturing technology for mass producing high efficiency GaAs solar cells is discussed. A progress using a high throughput MO-CVD reactor to produce high efficiency GaAs solar cells is discussed. Thickness and doping concentration uniformity of metal oxide chemical vapor deposition (MO-CVD) GaAs and AlGaAs layer growth are discussed. In addition, new tooling designs are given which increase the throughput of solar cell processing. To date, 2cm x 2cm AlGaAs/GaAs solar cells with efficiency up to 16.5% were produced. In order to meet throughput goals for mass producing GaAs solar cells, a large MO-CVD system (Cambridge Instrument Model MR-200) with a susceptor which was initially capable of processing 20 wafers (up to 75 mm diameter) during a single growth run was installed. In the MR-200, the sequencing of the gases and the heating power are controlled by a microprocessor-based programmable control console. Hence, operator errors can be reduced, leading to a more reproducible production sequence.

  16. Deposition of TiC film on titanium for abrasion resistant implant material by ion-enhanced triode plasma CVD

    Energy Technology Data Exchange (ETDEWEB)

    Zhu Yuhe, E-mail: zyh1120@hotmail.co.jp [School of Stomatology, China Medical University, Shen Yang (China); Wang Wei; Jia Xingya [School of Stomatology, China Medical University, Shen Yang (China); Akasaka, Tsukasa [Department of Health Science, School of Dental Medicine Hokkaido University, Sapporo (Japan); Liao, Susan [School of Materials Science and Engineering, Nanyang Technological University (Singapore); Watari, Fumio [Department of Health Science, School of Dental Medicine Hokkaido University, Sapporo (Japan)

    2012-12-01

    Highlights: Black-Right-Pointing-Pointer Deposition of Titanium Carbide (TiC) layer on titanium (Ti) surface has been demonstrated by an ion-enhanced triode plasma chemical vapor deposition (CVD) method. Black-Right-Pointing-Pointer The Vickers hardness of surface carbide was more than 2000, which confirmed its high abrasion resistance. Black-Right-Pointing-Pointer Physical and mechanical properties of the deposited TiC film on Ti were investigated to examine its potential application as an abrasion resistant implant material. - Abstract: Deposition of titanium carbide (TiC) layer on titanium (Ti) surface has been demonstrated by an ion-enhanced triode plasma chemical vapor deposition (CVD) method using a TiCl{sub 4} + CH{sub 4} + H{sub 2} gas mixture. Physical and mechanical properties of the deposited TiC film on Ti were investigated to examine its potential application as an abrasion resistant implant material. X-ray diffraction (XRD) showed that the specimen was consisted of TiC and Ti. Carbide layer of about 6 {mu}m thickness was observed on the cross section of the specimen by scanning electron microscopy (SEM). The Vickers hardness of surface carbide was more than 2000, which confirmed its high abrasion resistance.

  17. Photodegradation of benzene by TiO2 nanoparticles prepared by flame CVD process

    Institute of Scientific and Technical Information of China (English)

    Hongyong Xie; Luping Zhu; Lingling Wang; Shengwen Chen; Dandan Yang; Lijun Yang; Guilan Gao; Hao Yuan

    2011-01-01

    Photodegradation of benzene at ppb levels by mixed-phase TiO2 nanoparticles,synthesized by the oxidation of TiCl4 in propane/air turbulent flame chemical vapor deposition (CVD) process,is investigated experimentally by using a tubular photoreactor with thin TiO2 films coated on the reactor wall by sedimentation. Effects of inlet benzene concentration from 10 to 300 μg/m3,futile mass fraction from about 20 to 50% and photoluminescence (PL) intensity of TiO2 nanoparticles on degradation degree are examined under the conditions of 70% relative humidity,38 μg/cm2 catalyst loading,24 mW/cm2 UV irradiation of 254 nm and 5.7 s residence time in the reactor. Based on experimental results,separation of photoinduced electron (e-) and hole (h+) pairs by rutile phase is discussed as photo-induced electron (e-) in anatase phase will migrate to rutile surface due to that the potential of conductive band of rutile is lower than that of anatase,leading to more holes ready on anatase surface for oxidation reactions.

  18. The effects of flow multiplicity on GaN deposition in a rotating disk CVD reactor

    Science.gov (United States)

    Gkinis, P. A.; Aviziotis, I. G.; Koronaki, E. D.; Gakis, G. P.; Boudouvis, A. G.

    2017-01-01

    The effect of gas flow multiplicity, i.e. the possibility of two very different flow regimes prevailing at random in a rotating disk metalorganic chemical vapor deposition (MOCVD) reactor, on the deposited GaN film is investigated. A transport model coupled with a system of chemical reactions in the gas phase and on the wafer where the film is formed, is implemented in the parameter regions where multiple flows are possible. In the region of multiplicity where either plug flow, imposed by forced convection, or buoyancy-dominated flow is possible, the results in the latter case indicate high deposition rate and decreased uniformity. In the former case, increasing the pressure and the rotation rate has a favorable effect on the deposition rate without sacrificing uniformity. In the parameter window of multiplicity where either rotation or combined rotation/buoyancy may prevail, the effects of buoyancy lead to higher deposition rate at the center of the wafer and reduced uniformity. The Arrhenius plots in the regions of multiplicity for exactly the same operating conditions reveal that the system operates in a diffusion-limited regime in the plug flow and in the rotation-dominated flow, in the first and second region of multiplicity respectively. In contrast, in the buoyancy-dominated flow and the combined rotation/buoyancy flow (first and second region of multiplicity respectively) the process shifts into the kinetics-limited regime.

  19. Growth and Characterization of Silicon Carbide (SiC) Nanowires by Chemical Vapor Deposition (CVD) for Electronic Device Applications

    Science.gov (United States)

    Moore, Karina

    In recent years nanowires have gained a generous amount of interest because of the possible application of nanowires within electronic devices. A nanowire is a one dimensional semiconductor nanostructure with a diameter less than 100 nm. Nanowires have the potential to be a replacement for the present day complimentary metal oxide semiconductor (CMOS) technology; it is believed by 2020, a 5--6 nm gate length within field effect transistors (FET) would be realized and cease further miniaturization of electronic devices. SiC processes several unique chemical and physical properties that make it an attractive alternative to Si as a semiconductor material. Silicon carbide's properties make it a perfect candidate for applications such as high temperature sensors, x-ray emitters and high radiation sensors. The main objective of this thesis is to successfully grow silicon carbide nanowires on silicon substrates with the assistance of a metal catalyst, by the process of chemical vapor deposition (CVD). The contributions made by the work carried out in this thesis are broad. This is the first study that has carried out a comprehensive investigation into a wide range of metal catalyst for the growth of SiC nanowires by the process of chemical vapor deposition. The study proved that the surface tension interactions between the silicon substrate and the metal catalyst are the controlling factor in the determination of the diameter of the nanowires grown. This study also proved that the silicon substrate orientation has no impact on the growth of the nanowires, similar growth patterns occurred on both Si and Si substrates. The nanowires grown were characterized by a variety of different methods including scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS) and raman spectroscopy. The effect of temperature, growth temperature, growth time and the catalyst type used are investigated to determine the most suitable conditions necessary for SiC nanowire

  20. NUMERICAL SIMULATION OF THE GROWTH OF NANOPARTICLES IN A FLAME CVD PROCESS

    Institute of Scientific and Technical Information of China (English)

    Lixi Wang; Si Chen; Hongyong Xie

    2004-01-01

    The growth of titania nanoparticles in a flame CVD process has been simulated by computational fluid dynamics, based on the change rate of particle number density due to their collisions calculated from an integral collision kernel. The assumptions made on constant particle volume density nv (nd3), constant density of particle surface area ns (nd2), and constant entity nd2.5 in coagulation process have been examined. Comparisons have been made on particle size distribution between measurement results and predictions from present model of particle growth and Kruis model of particle dynamics for titania nanoparticles synthesized by the flame CVD process. Effects of operational parameters such as O2 mole fraction and particle number density on mean particle size and size distribution have been discussed.

  1. Synthesis of carbon nanotubes by plasma-enhanced CVD process: gas phase study of synthesis conditions

    OpenAIRE

    Guláš, Michal; Cojocaru, Costel Sorin; Fleaca, Claudiu; Farhat, Samir; Veis, Pavel; Le Normand, Francois

    2008-01-01

    International audience; To support experimental investigations, a model based on ChemkinTM software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase ...

  2. Synthesis of carbon nanbotubes by plasma-enhanced CVD process: gas phase study of synthesis conditions

    Science.gov (United States)

    Guláš, M.; Cojocaru, C. S.; Fleaca, C. T.; Farhat, S.; Veis, P.; Le Normand, F.

    2008-09-01

    To support experimental investigations, a model based on Chemkin^TM software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

  3. Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor

    Energy Technology Data Exchange (ETDEWEB)

    Yang, Mengdi, E-mail: M.Yang@utwente.nl; Aarnink, Antonius A. I.; Kovalgin, Alexey Y.; Gravesteijn, Dirk J.; Wolters, Rob A. M.; Schmitz, Jurriaan [MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede (Netherlands)

    2016-01-15

    In this work, the authors developed hot-wire assisted atomic layer deposition (HWALD) to deposit tungsten (W) with a tungsten filament heated up to 1700–2000 °C. Atomic hydrogen (at-H) was generated by dissociation of molecular hydrogen (H{sub 2}), which reacted with WF{sub 6} at the substrate to deposit W. The growth behavior was monitored in real time by an in situ spectroscopic ellipsometer. In this work, the authors compare samples with tungsten grown by either HWALD or chemical vapor deposition (CVD) in terms of growth kinetics and properties. For CVD, the samples were made in a mixture of WF{sub 6} and molecular or atomic hydrogen. Resistivity of the WF{sub 6}-H{sub 2} CVD layers was 20 μΩ·cm, whereas for the WF{sub 6}-at-H-CVD layers, it was 28 μΩ·cm. Interestingly, the resistivity was as high as 100 μΩ·cm for the HWALD films, although the tungsten films were 99% pure according to x-ray photoelectron spectroscopy. X-ray diffraction reveals that the HWALD W was crystallized as β-W, whereas both CVD films were in the α-W phase.

  4. Deposition rate and morphology of carbon nanotubes at different positions in a CVD reactor

    Institute of Scientific and Technical Information of China (English)

    2008-01-01

    Carbon nanotubes (CNTs) were synthesized through the catalytic decomposition of a ferroeene-xylene mixture in a horizontal chemical vapor deposition reactor.The deposition rate of CNTs along the axial direction was measured.The morphology of CNTs was observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).The results showed that the deposition rate of CNTs along the axial direction first increased and later decreased,the position achieving the maximum deposition rate was influenced by the operating conditions.The morphologies of CNTs also changed along the axial direction.

  5. Field emissions of graphene films deposited on different substrates by CVD system

    Institute of Scientific and Technical Information of China (English)

    Wang Xiao-Ping; Liu Xiao-Fei; Liu Xin-Xin; Wang Li-Jun; Yang Can; Jing Long-Wei; Li Song-Kun; Pan Xiu-Fang

    2012-01-01

    Graphene films are deposited on copper (Cu) and aluminum (A1) substrates,respectively,by using a microwave plasma chemical vapour deposition technique.Furthermore,these graphene films are characterized by a field emission type scanning electron microscope (FE-SEM),Raman spectra,and field emission (FE) I-V measurements.It is found that the surface morphologies of the films deposited on Cu and Al substrates are different:the field emission property of graphene film deposited on the Cu substrate is better than that on the Al substrate,and the lowest turn-on field of 2.4 V/μm is obtained for graphene film deposited on the Cu substrate.The macroscopic areas of the graphene samples are all above 400 mm2.

  6. Structural and optical characterization of thick and thin polycrystalline diamond films deposited by microwave plasma activated CVD

    Indian Academy of Sciences (India)

    S K Pradhan; B Satpati; B P Bag; T Sharda

    2012-02-01

    Preliminary results of growth of thin diamond film in a recently installed 3 kW capacity microwave plasma activated CVD (MW-PACVD) system are being reported. The films were deposited on Si (100) substrate at 850°C using methane and hydrogen mixture at 1.5 kW MW power. The grown polycrystalline films were characterized by micro-Raman, transmission electron microscope (TEM), spectrophotometer and atomic force microscope (AFM). The results were compared with that of a thicker diamond film grown elsewhere in a same make MWPACVD system at relatively higher power densities. The presence of a sharp Raman peak at 1332 cm-1 confirmed the growth of diamond, and transmission spectra showed typical diamond film characteristics in both the samples. Typical twin bands and also a quintuplet twinned crystal were observed in TEM, further it was found that the twinned region in thin sample composed of very fine platelet like structure.

  7. Silicon-Germanium Films Deposited by Low Frequency PE CVD: Effect of H2 and Ar Dilution

    Energy Technology Data Exchange (ETDEWEB)

    Kosarev, A; Torres, A; Hernandez, Y; Ambrosio, R; Zuniga, C; Felter, T E; Asomoza, R R; Kudriavtsev, Y; Silva-Gonzalez, R; Gomez-Barojas, E; Ilinski, A; Abramov, A S

    2005-09-22

    We have studied structure and electrical properties of Si{sub 1-Y}Ge{sub Y}:H films deposited by low frequency PE CVD over the entire composition range from Y=0 to Y=1. The deposition rate of the films and their structural and electrical properties were measured for various ratios of the germane/silane feed gases and with and without dilution by Ar and by H{sub 2}. Structure and composition was studied by Auger electron spectroscopy (AES), secondary ion mass spectroscopy (SIMS) and Fourier transform infrared (FTIR) spectroscopy. Surface morphology was characterized by atomic force microscopy (AFM). We found: (1) The deposition rate increased with Y maximizing at Y=1 without dilution. (2) The relative rate of Ge and Si incorporation is affected by dilution. (3) Hydrogen preferentially bonds to silicon. (4) Hydrogen content decreases for increasing Y. In addition, optical measurements showed that as Y goes for 0 to 1, the Fermi level moves from mid gap to the conduction band edge, i.e. the films become more n-type. No correlation was found between the pre-exponential and the activation energy of conductivity. The behavior of the conductivity {gamma}-factor suggests a local minimum in the density of states at E {approx} 0.33 eV for the films grown with or without H-dilution and E {approx} 0.25 eV for the films with Ar dilution.

  8. Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon

    Science.gov (United States)

    Chen, Wanghua; Cariou, Romain; Hamon, Gwenaëlle; Léal, Ronan; Maurice, Jean-Luc; Cabarrocas, Pere Roca i

    2017-01-01

    Solar cells based on epitaxial silicon layers as the absorber attract increasing attention because of the potential cost reduction. In this work, we studied the influence of the deposition rate on the structural properties of epitaxial silicon layers produced by plasma-enhanced chemical vapor deposition (epi-PECVD) using silane as a precursor and hydrogen as a carrier gas. We found that the crystalline quality of epi-PECVD layers depends on their thickness and deposition rate. Moreover, increasing the deposition rate may lead to epitaxy breakdown. In that case, we observe the formation of embedded amorphous silicon cones in the epi-PECVD layer. To explain this phenomenon, we develop a model based on the coupling of hydrogen and built-in strain. By optimizing the deposition conditions to avoid epitaxy breakdown, including substrate temperatures and plasma potential, we have been able to synthesize epi-PECVD layers up to a deposition rate of 8.3 Å/s. In such case, we found that the incorporation of hydrogen in the hydrogenated crystalline silicon can reach 4 at. % at a substrate temperature of 350 °C. PMID:28262840

  9. Initiated Chemical Vapor Deposition (iCVD) of Highly Cross-Linked Polymer Films for Advanced Lithium-Ion Battery Separators.

    Science.gov (United States)

    Yoo, Youngmin; Kim, Byung Gon; Pak, Kwanyong; Han, Sung Jae; Song, Heon-Sik; Choi, Jang Wook; Im, Sung Gap

    2015-08-26

    We report an initiated chemical vapor deposition (iCVD) process to coat polyethylene (PE) separators in Li-ion batteries with a highly cross-linked, mechanically strong polymer, namely, polyhexavinyldisiloxane (pHVDS). The highly cross-linked but ultrathin pHVDS films can only be obtained by a vapor-phase process, because the pHVDS is insoluble in most solvents and thus infeasible with conventional solution-based methods. Moreover, even after the pHVDS coating, the initial porous structure of the separator is well preserved owing to the conformal vapor-phase deposition. The coating thickness is delicately controlled by deposition time to the level that the pore size decreases to below 7% compared to the original dimension. The pHVDS-coated PE shows substantially improved thermal stability and electrolyte wettability. After incubation at 140 °C for 30 min, the pHVDS-coated PE causes only a 12% areal shrinkage (versus 90% of the pristine separator). The superior wettability results in increased electrolyte uptake and ionic conductivity, leading to significantly improved rate performance. The current approach is applicable to a wide range of porous polymeric separators that suffer from thermal shrinkage and poor electrolyte wetting.

  10. Heat transfer model of an iCVD reactor

    NARCIS (Netherlands)

    Bakker, R.; Verlaan, V.; Verkerk, A.D.; van der Werf, C.H.M.; van Dijk, L.; Rudolph, H.; Rath, J.K.; Schropp, R.E.I.

    2009-01-01

    Contrary to conventional HWCVD, the power consumption in the iCVD process is dominated by heat conduction rather than radiation. This is due to the fact that while the typical wire temperature for HWCVD is about 1750–2200 °C, for iCVD the temperature is only 250–500 °C. Typical deposition pressures

  11. TiAlN and TiAlCN deposition in an industrial PaCVD-plant

    Energy Technology Data Exchange (ETDEWEB)

    Heim, D.; Hochreiter, R. [Ruebig GmbH, Co., Wels (Austria)

    1998-01-01

    An industrial PaCVD-plant was equipped with an AlCl{sub 3}-generator. By using Ar, H{sub 2}, N{sub 2}, CH{sub 4}, TiCl{sub 4} and AlCl{sub 3}, TiAlN- and TiAlCN-films could be deposited on hard metal and steel substrates. The plasma was generated by a DC-pulse power supply with frequencies up to 50 kHz. The reactor size was 350 mm in diameter and 900 mm in height. During one batch 1200 indexable inserts could be coated. The growth rates were about 1-3 {mu}m h{sup -1}. The deposited films show a fine structure and Cl-concentrations below 3%. The measured critical loads were between 30 and 40 N. Wear test results show an increase in tool life up to several 100% compared with uncoated or TiN-coated tools. (orig.) 7 refs.

  12. Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

    Indian Academy of Sciences (India)

    R M Dey; M Pandey; D Bhattacharyya; D S Patil; S K Kulkarni

    2007-12-01

    Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from –100 V to –300 V. These films were characterized by X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry techniques for estimating 3/2 ratio. The 3/2 ratio obtained by XPS is found to have an opposite trend to that obtained by spectroscopic ellipsometry. These results are explained using sub-plantation picture of DLC growth. Our results clearly indicate that the film is composed of two different layers, having entirely different properties in terms of void percentage and 3/2 ratio. The upper layer is relatively thinner as compared to the bottom layer.

  13. The Formation of Nanocrystalline Diamond Coating on WC Deposited by Microwave Assisted Plasma CVD

    Science.gov (United States)

    Toff, M. R. M.; Hamzah, E.; Purniawan, A.

    2010-03-01

    Diamond is one form of carbon structure. The extreme hardness and high chemical resistant of diamond coatings determined that many works on this area relate to coated materials for tribological applications in biomedicine, as mechanical seals or cutting tools for hard machining operations. In the work, nanocrystalline diamond (NCD) coated tungsten carbide (WC) have been deposited by microwave assisted plasma chemical vapor deposition (MAPCVD) from CH4/H2 mixtures. Morphology of NCD was investigated by using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The quality of NCD is defined as ratio between diamond and non diamond and also full width at half maximum (FWHM) was determined using Raman spectra. The result found that the NCD structure can be deposited on WC surface using CH4/H2 gas mixture with grain size ˜20 nm to 100 nm. Increase %CH4 concentration due to increase the nucleation of NCD whereas decrease the quality of diamond. Based on Raman spectra, the quality of NCD is in the range ˜98.82-99.01% and 99.56-99.75% for NCD and microcrystalline (MCD), respectively. In addition, FWHM of NCD is high than MCD in the range of 8.664-62.24 cm-1 and 4.24-5.05 cm-1 for NCD and MCD respectively that indicate the crystallineity of NCD is smaller than MCD.

  14. Structural and optical properties of tellurium films obtained by chemical vapor deposition(CVD)

    Institute of Scientific and Technical Information of China (English)

    MA Yu-tian; GONG Zhu-Qing; XU Wei-Hong; HUANG Jian

    2006-01-01

    Tellurium thin films were prepared by the chemical vapor deposition method. The structure, surface morphology and optical properties of the Te thin films were analyzed by powder X-ray diffraction, scanning electron microscopy, FTIR transmission,UV/VIS/NIR transmission and reflectance. The results show that the films structural and optical properties are influenced by many factors such as film thickness, crystallite size and substrate temperature. The films as thick as 111-133 nm have high IR transmission across the full 8-13 μm band and highly blocking in the solar spectral region elsewhere, which indicates that Te films thickness in this region can be used as good solar radiation shields in radiative cooling devices.

  15. [The interaction between nerve cells and carbon nanotube networks made by CVD process investigation].

    Science.gov (United States)

    Bobrinetskiĭ, I I; Seleznev, A S; Gaĭduchenko, I A; Fedorov, G E; Domantovskiĭ, A G; Presniakov, M Iu; Podcherniaeva, R Ia; Mikhaĭlova, G R; Suetina, I A

    2013-01-01

    In this research we investigate neuroblastoma cells cultivated on single-walled carbon nanotubes networks made by CVD method on silicon substrates. The complex analysis of grown cells made by atomic force, electron microscopy and Raman spectroscopy was carried out and the effect of nanotube growth process on proliferation factor was investigated. It is shown that despite of a weak decrease in proliferation, cell morphology remains unchanged and no physical or chemical interaction between carbon nanotubes and cells is observed. The results of the research can be used to investigate the interaction between conductive nanomaterials and cells for the development of neural replacement implants. Also they can be useful in bio-electronic interface investigation of signal propagation in neurons.

  16. The effectiveness of Ti implants as barriers to carbon diffusion in Ti implanted steel under CVD diamond deposition conditions

    Energy Technology Data Exchange (ETDEWEB)

    Weiser, P.S.; Prawer, S. [Melbourne Univ., Parkville, VIC (Australia). School of Physics; Hoffman, A. [Technion-Israel Inst. of Tech., Haifa (Israel). Dept. of Chemistry; Evan, P.J. [Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia); Paterson, P.J.K. [Royal Melbourne Inst. of Tech., VIC (Australia)

    1993-12-31

    The growth of chemical vapour deposited (CVD) diamond onto iron based substrates complicated by preferential soot formation and carbon diffusion into the substrate [1], leading to poor quality films and poor adhesion. In the initial stages of exposure to a microwave plasma, a layer of graphite is rapidly formed on an untreated Fe based substrate. Once this graphite layer reaches a certain thickness, reasonable quality diamond nucleates and grows upon it. However, the diamond film easily delaminates from the substrate, the weak link being the graphitic layer. Following an initial success in using a TiN barrier layer to inhibit the formation of such a graphitic layer the authors report on attempts to use an implanted Ti layer for the same purpose. This work was prompted by observation that, although the TiN proved to be an extremely effective diffusion barrier, adhesion may be further enhanced by the formation of a TiC interface layer between the diamond film and the Fe substrate. 3 refs., 6 figs.

  17. Investigation of phonon modes in gallium nitride nanowires deposited by thermal CVD

    Energy Technology Data Exchange (ETDEWEB)

    Rizal, Umesh, E-mail: umeshrizal680@gmail.com; Swain, Bibhu P., E-mail: bibhu.s@smit.smu.edu.in [Nano Processing Laboratory, Centre for Material Science and Nanotechnology, Sikkim Manipal Institute of Technology, Majitar, Rangpo, East Sikkim, India-737136 (India); Swain, Bhabani S., E-mail: bsswain@kookmin.ac.kr [School of Advanced Materials Engineering, Kookmin University, Sungbuk-gu, Jeongnung-dong, Seoul (Korea, Republic of)

    2016-04-13

    Gallium nitride nanowires (GaN-NWs) of diameters ranging from 20 to 80 nm were grown on the p-type Si substrate by Thermal Chemical Vapor Deposition (TCVD) using Iron (Fe) catalyst via VLS mechanism. Raman and FTIR spectra reveal the presence of broad transverse optic (TO) and longitudinal optic (LO) phonon peak spreads over 500-600 cm{sup −1} and 720 cm{sup −1} respectively. The detail deconvolution of integrated transverse and longitudinal phonon analysis reveals phonon confinement brought out by incorporation of hydrogen atom. The red shifts of TO and LO phonon peak position indicates nanosized effect. I{sub A1(LO)}/I{sub A1(TO)} increases from 0.073 to 1.0 and their respective fwhm{sub A1(LO)}/fwhm{sub A1(TO)} also increases from 0.71 to 1.31 with increasing H{sub 2} flow rate. E{sub 1}(LO) - E{sub 1}(TO) and A{sub 1}(LO) - A{sub 1}(TO) increases from 173.83 to 190.73 and 184.89 to 193.22 respectively. Apart from this usual TO and LO phonon, we have found Surface Optic (SO) phonon at 671 cm{sup −1} in FTIR spectra. The intensity of PL peak increases with increasing H{sub 2} dilution reveals efficient passivation of defect centre at surface of GaN-NWs.

  18. The deposition characteristics of copper(I) compounds for CVD by FT-IR spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Hardcastle, F.D.; Peden, C.H.F.; Omstead, T.R.; Blewer, R.S. [Sandia National Labs., Albuquerque, NM (United States); Farkas, J.; Hampden-Smith, M.J.; Kodas, T.T. [New Mexico Univ., Albuquerque, NM (United States)

    1991-12-31

    Fourier transform-infrared spectroscopy (FT-IR) was used to investigate the adsorption and thermally-induced decomposition of copper (I) {beta}-diketonate precursors of the type (hfac)CuL, where hfac is the hexafluoroacetylacetonate bidentate ligand and L is trimethylphosphine or 1,5-cyclooctadiene. The (hfac)CuPMe{sub 3} precursor desorbs from the surface at very low temperatures whereas the (hfac)Cu(1,5-COD) dissociates on adsorption, liberating 1,5-COD and leaving a surface(hfac)Cu complex which can subsequently disproportionate. Evidence is provided for hydrogen-bonding between the hfac ligand and the surface silanols for (hfac)CuPMe{sub 3}, but not for (hfac)Cu(1,5-COD). These results are consistent with the selective behavior of these precursors for copper deposition and suggest that the selectivity of the (hfac)CuPMe{sub 3} and (hfac)Cu(1, 5-COD) precursors may be due to the ability of the hfac ligand to hydrogen bond to the surface silanol groups.

  19. The deposition characteristics of copper(I) compounds for CVD by FT-IR spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Hardcastle, F.D.; Peden, C.H.F.; Omstead, T.R.; Blewer, R.S. (Sandia National Labs., Albuquerque, NM (United States)); Farkas, J.; Hampden-Smith, M.J.; Kodas, T.T. (New Mexico Univ., Albuquerque, NM (United States))

    1991-01-01

    Fourier transform-infrared spectroscopy (FT-IR) was used to investigate the adsorption and thermally-induced decomposition of copper (I) {beta}-diketonate precursors of the type (hfac)CuL, where hfac is the hexafluoroacetylacetonate bidentate ligand and L is trimethylphosphine or 1,5-cyclooctadiene. The (hfac)CuPMe{sub 3} precursor desorbs from the surface at very low temperatures whereas the (hfac)Cu(1,5-COD) dissociates on adsorption, liberating 1,5-COD and leaving a surface(hfac)Cu complex which can subsequently disproportionate. Evidence is provided for hydrogen-bonding between the hfac ligand and the surface silanols for (hfac)CuPMe{sub 3}, but not for (hfac)Cu(1,5-COD). These results are consistent with the selective behavior of these precursors for copper deposition and suggest that the selectivity of the (hfac)CuPMe{sub 3} and (hfac)Cu(1, 5-COD) precursors may be due to the ability of the hfac ligand to hydrogen bond to the surface silanol groups.

  20. Interlayer utilization (including metal borides) for subsequent deposition of NSD films via microwave plasma CVD on 316 and 440C stainless steels

    Science.gov (United States)

    Ballinger, Jared

    . Surface boriding was implemented using the novel method of microwave plasma CVD with a mixture of hydrogen and diborane gases. On 440C bearings, dual phase boride layers of Fe2B and FeB were formed which supported adhered nanostructured diamond films. Continuity of the films was not seamless with limited regions remaining uncoated potentially corresponding to delamination of the film as evidenced by the presence of tubular structures presumably composed of sp2 bonded carbon. Surface boriding of 316 stainless steel discs was conducted at various powers and pressures to achieve temperatures ranging from 550-800 °C. The substrate boriding temperature was found to substantially influence the resultant interlayer by altering the metal boride(s) present. The lowest temperatures produced an interlayer where CrB was the single detected phase, higher temperatures yielded the presence of only Fe2B, and a combination of the two phases resulted from an intermediate boriding temperature. Compared with the more common, commercialized boriding methods, this a profound result given the problems posed by the FeB phase in addition to other advantages offered by CVD processes and microwave generated plasmas in general. Indentation testing of the boride layers revealed excellent adhesion strength for all borided interlayers, and above all, no evidence of cracking was observed for a sole Fe2B phase. As with boriding of 440C bearings, subsequent diamond deposition was achieved on these interlayers with substantially improved adhesion strength relative to diamond coated TiN interlayers. Both XRD and Raman spectroscopy confirmed a nanostructured diamond film with interfacial chromium carbides responsible for enhanced adhesion strength. Interlayers consisting solely of Fe2B have displayed an ability to support fully continuous nanostructured diamond films, yet additional study is required for consistent reproduction. This is in good agreement with initial work on pack borided high alloy steels

  1. Formation of High-quality Advanced High-k Oxide Layers at Low Temperature by Excimer UV Lamp-assisted Photo-CVD and Sol-gel Processing

    Institute of Scientific and Technical Information of China (English)

    YU J. J.

    2004-01-01

    We have successfully demonstrated that high quality and high dielectric constant layers can be fabricated by low temperature photo-induced or -assisted processing. Ta2O5 and ZrO2 have been deposited at t<400 ℃by means of a UV photo-CVD technique and HfO2 by photo-assisted sol-gel processing with the aid of excimer lamps. The UV annealing of as-grown layers was found to significantly improve their electrical properties.Low leakage current densities on the order of 10-8 A/cm2 at 1 MV/cm for deposited ultrathin Ta2O5 films and ca. 10-6 A/cm2 for the photo-CVD ZrO2 layers and photo-irradiated sol-gel HfO2 layers have been readily achieved. The improvement in the leakage properties of these layers is attributed to the UV-generated active oxygen species O(1D) which strongly oxidize any suboxides to form more stoichiometric oxides on removing certain defects, oxygen vacancies and impurities present in the as-prepared layers. The photo-CVD Ta2O5films deposited across 10. 16-cm Si wafers exhibit a high thickness uniformity with a variation of less than ±2.0% being obtained for ultrathin ca. 10 nm thick films. The lamp technology can in principle be extended to larger area wafers, providing a promising low temperature route to the fabrication of a range of high quality thin films for future ULSI technology.

  2. Study of the triton-burnup process in different JET scenarios using neutron monitor based on CVD diamond

    Science.gov (United States)

    Nemtsev, G.; Amosov, V.; Meshchaninov, S.; Popovichev, S.; Rodionov, R.

    2016-11-01

    We present the results of analysis of triton burn-up process using the data from diamond detector. Neutron monitor based on CVD diamond was installed in JET torus hall close to the plasma center. We measure the part of 14 MeV neutrons in scenarios where plasma current varies in a range of 1-3 MA. In this experiment diamond neutron monitor was also able to detect strong gamma bursts produced by runaway electrons arising during the disruptions. We can conclude that CVD diamond detector will contribute to the study of fast particles confinement and help predict the disruption events in future tokamaks.

  3. Epitaxial Growth of beta-Silicon Carbide (SiC) on a Compliant Substrate via Chemical Vapor Deposition (CVD)

    Science.gov (United States)

    Mitchell, Sharanda L.

    1996-01-01

    Many lattice defects have been attributed to the lattice mismatch and the difference in the thermal coefficient of expansion between SiC and silicon (Si). Stacking faults, twins and antiphase boundaries are some of the lattice defects found in these SiC films. These defects may be a partial cause of the disappointing performance reported for the prototype devices fabricated from beta-SiC films. The objective of this research is to relieve some of the thermal stress due to lattice mismatch when SiC is epitaxially grown on Si. The compliant substrate is a silicon membrane 2-4 microns thick. The CVD process includes the buffer layer which is grown at 1360 C followed by a very thin epitaxial growth of SiC. Then the temperature is raised to 1500 C for the subsequent growth of SiC. Since silicon melts at 1415 C, the SiC will be grown on molten Silicon which is absorbed by a porous graphite susceptor eliminating the SiC/Si interface. We suspect that this buffer layer will yield less stressed material to help in the epitaxial growth of SiC.

  4. Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) yields better Hydrolytical Stability of Biocompatible SiOx Thin Films on Implant Alumina Ceramics compared to Rapid Thermal Evaporation Physical Vapor Deposition (PVD).

    Science.gov (United States)

    Böke, Frederik; Giner, Ignacio; Keller, Adrian; Grundmeier, Guido; Fischer, Horst

    2016-07-20

    Densely sintered aluminum oxide (α-Al2O3) is chemically and biologically inert. To improve the interaction with biomolecules and cells, its surface has to be modified prior to use in biomedical applications. In this study, we compared two deposition techniques for adhesion promoting SiOx films to facilitate the coupling of stable organosilane monolayers on monolithic α-alumina; physical vapor deposition (PVD) by thermal evaporation and plasma enhanced chemical vapor deposition (PE-CVD). We also investigated the influence of etching on the formation of silanol surface groups using hydrogen peroxide and sulfuric acid solutions. The film characteristics, that is, surface morphology and surface chemistry, as well as the film stability and its adhesion properties under accelerated aging conditions were characterized by means of X-ray photoelectron spectroscopy (XPS), energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy (SEM), inductively coupled plasma-optical emission spectroscopy (ICP-OES), and tensile strength tests. Differences in surface functionalization were investigated via two model organosilanes as well as the cell-cytotoxicity and viability on murine fibroblasts and human mesenchymal stromal cells (hMSC). We found that both SiOx interfaces did not affect the cell viability of both cell types. No significant differences between both films with regard to their interfacial tensile strength were detected, although failure mode analyses revealed a higher interfacial stability of the PE-CVD films compared to the PVD films. Twenty-eight day exposure to simulated body fluid (SBF) at 37 °C revealed a partial delamination of the thermally deposited PVD films whereas the PE-CVD films stayed largely intact. SiOx layers deposited by both PVD and PE-CVD may thus serve as viable adhesion-promoters for subsequent organosilane coupling agent binding to α-alumina. However, PE-CVD appears to be favorable for long-term direct film exposure to aqueous

  5. Synthesis of Carbon Nanotube-Nanotubular Titania Composites by Catalyst-Free CVD Process: Insights into the Formation Mechanism and Photocatalytic Properties.

    Science.gov (United States)

    Alsawat, Mohammed; Altalhi, Tariq; Gulati, Karan; Santos, Abel; Losic, Dusan

    2015-12-30

    This work presents the synthesis of carbon nanotubes (CNTs) inside titania nanotube (TNTs) templates by a catalyst-free chemical vapor deposition (CVD) approach as composite platforms for photocatalytic applications. The nanotubular structure of TNTs prepared by electrochemical anodization provides a unique platform to grow CNTs with precisely controlled geometric features. The formation mechanism of carbon nanotubes inside nanotubular titania without using metal catalysts is explored and explained. The structural features, crystalline structures, and chemical composition of the resulting CNTs-TNTs composites were systematically characterized using scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The deposition time during CVD process was used to determine the formation mechanism of CNTs inside TNTs template. The photocatalytic properties of CNTs-TNTs composites were evaluated via the degradation of rhodamine B, an organic model molecule, in aqueous solution under mercury-xenon Hg (Xe) lamp irradiation monitored by UV-visible spectroscopy. The obtained results reveal that CNTs induces a synergestic effect on the photocatalytic activity of TNTs for rhodamine B degradation, opening new opportunities to develop advanced photocatalysts for environmental and energy applications.

  6. New deposition processes for the growth of oxide and nitride thin films

    Energy Technology Data Exchange (ETDEWEB)

    Apen, E.A.; Atagi, L.M.; Barbero, R.S.; Espinoza, B.F.; Hubbard, K.M.; Salazar, K.V.; Samuels, J.A.; Smith, D.C. [Los Alamos National Lab., NM (US); Hoffman, D.M. [Univ. of Houston, TX (US)

    1998-11-01

    This is the final report of a three-year, Laboratory Directed Research and Development (LDRD) project at Los Alamos National Laboratory (LANL). The goal of this effort is to study the use of homoleptic metal amido compounds as precursors for chemical vapor deposition (CVD). The amides offer potential for the deposition of a variety of important materials at low temperatures. The establishment of these precursor compounds will enhance the ability to exploit the properties of advanced materials in numerous coatings applications. Experiments were performed to study the reactivity of Sn[NMe{sub 2}]{sub 4} with oxygen. The data demonstrated that gas-phase insertion of oxygen into the Sn-N bond, leading to a reactive intermediate, plays an important role in tin oxide deposition. Several CVD processes for technologically important materials were developed using the amido precursor complexes. These included the plasma enhanced CVD of TiN and Zr{sub 3}N{sub 4}, and the thermal CVD of GaN and Al N. Quality films were obtained in each case, demonstrating the potential of the amido compounds as CVD precursors.

  7. CVD polymers fabrication of organic surfaces and devices

    CERN Document Server

    Gleason, Karen K

    2015-01-01

    The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insol

  8. Diagnosis of gas phase near the substrate surface in diamond film deposition by high-power DC arc plasma jet CVD

    Institute of Scientific and Technical Information of China (English)

    Zuyuan Zhou; Guangchao Chen; Bin Li; Weizhong Tang; Fanxiu Lv

    2007-01-01

    Optical emission spectroscopy (OES) was used to study the gas phase composition near the substrate surface during diamond deposition by high-power DC arc plasma jet chemical vapor deposition (CVD). C2 radical was determined as the main carbon radical in this plasma atmosphere. The deposition parameters, such as substrate temperature, anode-substrate distance, methane concentration, and gas flow rate, were inspected to find out the influence on the gas phase. A strong dependence of the concentrations and distribution of radicals on substrate temperature was confirmed by the design of experiments (DOE). An explanation for this dependence could be that radicals near the substrate surface may have additional ionization or dissociation and also have recombination,or are consumed on the substrate surface where chemical reactions occur.

  9. Synthesis of few-layer graphene on a Ni substrate by using DC plasma enhanced chemical vapor deposition (PE-CVD)

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Jeong Hyuk; Castro, Edward Joseph; Hwang, Yong Gyoo; Lee, Choong Hun [Wonkwang University, Iksan (Korea, Republic of)

    2011-01-15

    In this work, few-layer graphene (FLG) was successfully grown on polycrystalline Ni a large scale by using DC plasma enhanced chemical vapor deposition (DC PE-CVD), which may serve as an alternative route in large-scale graphene synthesis. The synthesis time had an effect on the quality of the graphene produced. The applied DC voltage, on the other hand, influenced the minimization of the defect densities in the graphene grown. We also present a method of producing a free-standing polymethyl methacrylate (PMMA)/graphene membrane on a FeCl{sub 3(aq)} solution, which could then be transferred to the desired substrate.

  10. Plasma Processes : Microwave plasma deposition of diamond like carbon coatings

    Indian Academy of Sciences (India)

    D S Patil; K Ramachandran; N Venkatramani; M Pandey; R D'Cunha

    2000-11-01

    The promising applications of the microwave plasmas have been appearing in the fields of chemical processes and semiconductor manufacturing. Applications include surface deposition of all types including diamond/diamond like carbon (DLC) coatings, etching of semiconductors, promotion of organic reactions, etching of polymers to improve bonding of the other materials etc. With a 2.45 GHz, 700 W, microwave induced plasma chemical vapor deposition (CVD) system set up in our laboratory we have deposited diamond like carbon coatings. The microwave plasma generation was effected using a wave guide single mode applicator. We have deposited DLC coatings on the substrates like stainless steel, Cu–Be, Cu and Si. The deposited coatings have been characterized by FTIR, Raman spectroscopy and ellipsometric techniques. The results show that we have achieved depositing ∼ 95% sp3 bonded carbon in the films. The films are uniform with golden yellow color. The films are found to be excellent insulators. The ellipsometric measurements of optical constant on silicon substrates indicate that the films are transparent above 900 nm.

  11. Reaction network analysis for thin film deposition processes

    Science.gov (United States)

    Ramakrishnasubramanian, Krishnaprasath

    Understanding the growth of thin films produced by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) has been one of the most important challenge for surface chemists over the last two to three decades. There has been a lack of complete understanding of the surface chemistry behind these systems due to the dearth of experimental reaction kinetics data available. The data that do exist are generally derived through quantum computations. Thus, it becomes ever so important to develop a deposition model which not only predicts the bulk film chemistry but also explains its self-limiting nature and growth surface stability without the use of reaction rate data. The reaction network analysis tools developed in this thesis are based on a reaction factorization approach that aims to decouple the reaction rates by accounting for the chemical species surface balance dynamic equations. This process eliminates the redundant dynamic modes and identifies conserved modes as reaction invariants. The analysis of these invariants is carried out using a Species-Reaction (S-R) graph approach which also serves to simplify the representation of the complex reaction network. The S-R graph is self explanatory and consistent for all systems. The invariants can be easily extracted from the S-R graph by following a set of straightforward rules and this is demonstrated for the CVD of gallium nitride and the ALD of gallium arsenide. We propose that understanding invariants through these S-R graphs not only provides us with the physical significance of conserved modes but also give us a better insight into the deposition mechanism.

  12. Effect of CVD Process Temperature on Activation Energy and Structural Growth of MWCNTs

    Science.gov (United States)

    Shukrullah, S.; Mohamed, N. M.; Shaharun, M. S.; Saheed, M. S. M.; Irshad, M. I.

    2016-03-01

    This study investigated the effect of process temperature and activation energy on chemical vapor deposition growth of multi-walled carbon nanotubes (MWCNTs). A vertically fluidized bed reactor was used to grow MWCNTs by catalytic decomposition of ethylene over Fe2O3/Al2O3 at the cost of very low activation energy of 19.516 kJ/mole. FESEM, TEM, and Raman spectroscopy were used to characterize the growth parameters of MWCNTs in the temperature range of 873.15 K to 1273.15 K (600 °C to 1000 °C). SAED patterns were taken to investigate the crystallinity of the grown structures. The experimental results revealed that MWCNTs grown at the optimum process temperature of 1073.15 K (800 °C) exhibited hexagonal crystal structures, narrow diameter distribution and shorter inter-layer spacing. However, the inner and outer walls of most of MWCNTs grown at the temperatures above and below the optimum were non-uniform and defective. The higher process temperatures promoted the agglomeration of the catalyst particles and decomposition of the carbon precursor, which in return increased the tube diameter, surface defects and amorphous carbon content in the product. The intensity ratio plots also predicted low crystallinity in MWCNTs grown at unoptimized process temperatures. The highest I G/ I D ratio of 1.43 was determined at 1073.15 K (800 °C), which reflects high pct yield, purity and crystalline growth of MWCNTs.

  13. AFM Morphology Study of Si1-Y GeY:H Films Deposited by LF PE CVD from Silane-Germane with Different

    Energy Technology Data Exchange (ETDEWEB)

    Sanchez, L; Kosarev, A

    2005-03-28

    The morphology of Si{sub 1-Y} Ge{sub Y}:H films in the range of Y=0.23 to 0.9 has been studied by AFM. The films were deposited by Low Frequency (LF) PE CVD at substrate temperature T{sub s}=300 C and discharge frequency f=110 kHz from silane+germane mixture with and without, Ar and H{sub 2} dilution. The films were deposited on silicon and glass substrates. AFM images were taken and analyzed for 2 x 2 mm{sup 2} area. All the images demonstrated ''grain'' like structure, which was characterized by the height distribution function F(H) average roughness , standard height deviation Rq, lateral correlation length L{sub c} area distribution function F(s), mean grain area , diameter distribution function F(d), and mean grain diameter . The roughness of the films monotonically increases with Y for all dilutions, but more significantly in the films deposited without dilution. L{sub c} continuously grows with Y in the films deposited without dilution, while more complex behavior L{sub c}(Y) is observed in the films deposited with H- or Ar dilution. The sharpness of F(H) characterized by curtosis {gamma} depends on dilution and the sharpest F(H) are for the films deposited with Ar ({gamma}=5.30,Y=0.23) and without dilution ({gamma}=4.3, Y=0.45). Isothermal annealing caused increase of , L{sub c} in the films deposited with H- and Ar dilutions, while in the films prepared without dilution the behavior was more complex, depending on the substrates. Significant narrowing of the height distribution was observed in the films deposited with H dilution or without dilution.

  14. Association between total, processed, red and white meat consumption and all-cause, CVD and IHD mortality: a meta-analysis of cohort studies.

    Science.gov (United States)

    Abete, Itziar; Romaguera, Dora; Vieira, Ana Rita; Lopez de Munain, Adolfo; Norat, Teresa

    2014-09-14

    An association between processed and red meat consumption and total mortality has been reported by epidemiological studies; however, there are many controversial reports regarding the association between meat consumption and CVD and IHD mortality. The present meta-analysis was carried out to summarise the evidence from prospective cohort studies on the association between consumption of meat (total, red, white and processed) and all-cause, CVD and IHD mortality. Cohort studies were identified by searching the PubMed and ISI Web of Knowledge databases. Risk estimates for the highest v. the lowest consumption category and dose-response meta-analysis were calculated using a random-effects model. Heterogeneity among the studies was also evaluated. A total of thirteen cohort studies were identified (1 674 272 individuals). Subjects in the highest category of processed meat consumption had 22 and 18 % higher risk of mortality from any cause and CVD, respectively. Red meat consumption was found to be associated with a 16 % higher risk of CVD mortality, while no association was found for total and white meat consumption. In the dose-response meta-analysis, an increase of 50 g/d in processed meat intake was found to be positively associated with all-cause and CVD mortality, while an increase of 100 g/d in red meat intake was found to be positively associated with CVD mortality. No significant associations were observed between consumption of any type of meat and IHD mortality. The results of the present meta-analysis indicate that processed meat consumption could increase the risk of mortality from any cause and CVD, while red meat consumption is positively but weakly associated with CVD mortality. These results should be interpreted with caution due to the high heterogeneity observed in most of the analyses as well as the possibility of residual confounding.

  15. Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers

    DEFF Research Database (Denmark)

    Thomsen, Erik Vilain; Christensen, Carsten; Andersen, C.R.;

    1997-01-01

    A novel cold-walled, lamp-heated, ultrahigh vacuum chemical vapor deposition (UHV/CVD) batch system for the growth of SiGe layers is presented. This system combines the batch capability of the standard UHV/CVD furnace with the temperature processing available in rapid thermal processing (Rm) equi...

  16. Atmospheric pressure CVD of SNO2 and ZNO:AL

    NARCIS (Netherlands)

    Deelen, J. van; Kniknie, B.J.; Steijvers, H.L.A.H.; Mannie, G.; Thune, P.; Illiberi, A.

    2012-01-01

    Atmospheric pressure CVD (APCVD) is a highly cost effective method of depositing transparent conductive oxides (TCOs). In this work, insights in alcohol addition in the widely applied SnO2 process are discussed, including high resolution TEM images. Furthermore, the APCVD process of ZnO:Al was demon

  17. Deposition of low stress, high transmittance SiC as an x-ray mask membrane using ECR plasma CVD

    CERN Document Server

    Lee, S Y; Lim, S T; Ahn, J H

    1998-01-01

    SiC for x-ray mask membrane is deposited by Electron Cyclotron Resonance plasma Chemical Vapor Deposition from SiH sub 4 /CH sub 4 Ar mixtures. Stoichiometric SiC is deposited at SiH sub 4 /CH sub 4 ratio of 0.4, deposition temperature of 600.deg.C and microwave power of 500 W with +- 5% thickness uniformity, As-deposited film has compressive residual stress, very smooth surface (31 A rms) and high optical transmittance of 90% at 633 nm wavelength. The microstructure of this film consists of the nanocrystalline particle (100 A approx 200A) embedded in amorphous matrix. Residual stress can be turned to tensile stress via Rapid Thermal Annealing in N sub 2 atmosphere, while suppressing structural change during annealing, As a result, smooth (37 A rms) SiC film with moderate tensile stress and high optical transmittance (85% at 633 nm wavelength) is obtained.

  18. Effect of Source, Surfactant, and Deposition Process on Electronic Properties of Nanotube Arrays

    Directory of Open Access Journals (Sweden)

    Dheeraj Jain

    2011-01-01

    Full Text Available The electronic properties of arrays of carbon nanotubes from several different sources differing in the manufacturing process used with a variety of average properties such as length, diameter, and chirality are studied. We used several common surfactants to disperse each of these nanotubes and then deposited them on Si wafers from their aqueous solutions using dielectrophoresis. Transport measurements were performed to compare and determine the effect of different surfactants, deposition processes, and synthesis processes on nanotubes synthesized using CVD, CoMoCAT, laser ablation, and HiPCO.

  19. Trimethyl(phenylsilane — a precursor for gas phase processes of SiCx:H film deposition: Synthesis and characterization

    Directory of Open Access Journals (Sweden)

    Evgeniya N. Ermakova

    2015-12-01

    Full Text Available The technique of synthesis and purification of trimethyl(phenylsilane PhSiMe3, allowing to obtain the product with high yield. Individuality of the product was confirmed by elemental analysis for C, H, Si was developed. IR, UV and 1H NMR-spectroscopic studies were used to define its spectral characteristics. Complex thermal analysis and thermogravimetry defined thermoanalytical behavior of PhSiMe3 in an inert atmosphere. Tensimetric studies have shown that the compound has sufficient volatility and thermal stability for use as a precursor in the process of chemical vapor deposition (CVD. The composition and temperature limits of the possible crystalline phase complexes in equilibrium with the gas phase of different composition has been determined by method of thermodynamic modeling. Calculated CVD diagrams allow us to select the optimal conditions of film deposition. The possibility of using trimethyl(phenylsilane in CVD processes for producing dielectric films of hydrogenated silicon carbide has been demonstrated.

  20. Chemical vapor deposition of mullite coatings

    Science.gov (United States)

    Sarin, Vinod; Mulpuri, Rao

    1998-01-01

    This invention is directed to the creation of crystalline mullite coatings having uniform microstructure by chemical vapor deposition (CVD). The process comprises the steps of establishing a flow of reactants which will yield mullite in a CVD reactor, and depositing a crystalline coating from the reactant flow. The process will yield crystalline coatings which are dense and of uniform thickness.

  1. Polymer Layers by Initiated CVD for Thin Film Gas Barrier Encapsulation

    NARCIS (Netherlands)

    Spee, D.A.; Rath, J.K.; Schropp, R.E.I.

    2013-01-01

    In this chapter a thorough description of the initiated chemical vapor deposition (iCVD) process will be given, concentrating on molecular weight and deposition rate of the deposited polymer, which are essential for largescale application in hybrid gas barriers. Practical applications of coatings by

  2. On the development of single and multijunction solar cells with hot-wire CVD deposited active layers

    NARCIS (Netherlands)

    Li, H. B. T.; Franken, R.H.; Stolk, R.L.; Schuttauf, J.A.; van der Werf, C.H.M.; Rath, J.K.; Schropp, R.E.I.

    2008-01-01

    We present an overview of the scientific challenges and achievements during the development of thin film silicon based single and multijunction solar cells with hot-wire chemical vapor deposition (HWCVD) of the active silicon layers. The highlights discussed include the development of Ag/ZnO coating

  3. A multifaceted quality improvement intervention for CVD risk management in Australian primary healthcare: a protocol for a process evaluation.

    Science.gov (United States)

    Patel, Bindu; Patel, Anushka; Jan, Stephen; Usherwood, Tim; Harris, Mark; Panaretto, Katie; Zwar, Nicholas; Redfern, Julie; Jansen, Jesse; Doust, Jenny; Peiris, David

    2014-12-17

    Cardiovascular disease (CVD) is the leading cause of death and disability worldwide. Despite the widespread availability of evidence-based clinical guidelines and validated risk predication equations for prevention and management of CVD, their translation into routine practice is limited. We developed a multifaceted quality improvement intervention for CVD risk management which incorporates electronic decision support, patient risk communication tools, computerised audit and feedback tools, and monthly, peer-ranked performance feedback via a web portal. The intervention was implemented in a cluster randomised controlled trial in 60 primary healthcare services in Australia. Overall, there were improvements in risk factor recording and in prescribing of recommended treatments among under-treated individuals, but it is unclear how this intervention was used in practice and what factors promoted or hindered its use. This information is necessary to optimise intervention impact and maximally implement it in a post-trial context. In this study protocol, we outline our methods to conduct a theory-based, process evaluation of the intervention. Our aims are to understand how, why, and for whom the intervention produced the observed outcomes and to develop effective strategies for translation and dissemination. We will conduct four discrete but inter-related studies taking a mixed methods approach. Our quantitative studies will examine (1) the longer term effectiveness of the intervention post-trial, (2) patient and health service level correlates with trial outcomes, and (3) the health economic impact of implementing the intervention at scale. The qualitative studies will (1) identify healthcare provider perspectives on implementation barriers and enablers and (2) use video ethnography and patient semi-structured interviews to understand how cardiovascular risk is communicated in the doctor/patient interaction both with and without the use of intervention. We will also

  4. Microcrystalline silicon from very high frequency plasma deposition and hot-wire CVD for ``micromorph`` tandem solar cells

    Energy Technology Data Exchange (ETDEWEB)

    Brummack, H.; Brueggemann, R.; Wanka, H.N.; Hierzenberger, A.; Schubert, M.B. [Univ. Stuttgart (Germany). Inst. fuer Physikalische Elektronik

    1997-12-31

    The authors have grown microcrystalline silicon from a glow discharge at very high frequencies of 55 MHz and 170 MHz with high hydrogen dilution, and also, at more than 10 times higher growth rates, similar films by hot-wire chemical vapor deposition. Both kinds of materials have extensively been characterized and compared in terms of structural, optical and electronic properties, which greatly improve by deposition in a multi- instead of a single-chamber system. Incorporation of these different materials into pin solar cells results in open circuit voltages of about 400 mV as long as the doped layers are microcrystalline and rise to more than 870 mV if amorphous p- and n-layers are used. Quantum efficiencies and fill factors are still poor but leave room for further improvement, as clearly demonstrated by a remarkable reverse bias quantum efficiency gain.

  5. Modeling for CVD of Solid Oxide Electrolyte

    Energy Technology Data Exchange (ETDEWEB)

    Starr, T.L.

    2002-09-18

    Because of its low thermal conductivity, high thermal expansion and high oxygen ion conductivity yttria-stabilized zirconia (YSZ) is the material of choice for high temperature electrolyte applications. Current coating fabrication methods have their drawbacks, however. Air plasma spray (APS) is a relatively low-cost process and is suitable for large and relatively complex shapes. it is difficult to produce uniform, relatively thin coatings with this process, however, and the coatings do not exhibit the columnar microstructure that is needed for reliable, long-term performance. The electron-beam physical vapor deposition (EB-PVD) process does produce the desirable microstructure, however, the capital cost of these systems is very high and the line-of-sight nature of the process limits coating uniformity and the ability to coat large and complex shapes. The chemical vapor deposition (CVD) process also produces the desirable columnar microstructure and--under proper conditions--can produce uniform coatings over complex shapes. CVD has been used for many materials but is relatively undeveloped for oxides, in general, and for zirconia, in particular. The overall goal of this project--a joint effort of the University of Louisville and Oak Ridge National Laboratory (ORNL)--is to develop the YSZ CVD process for high temperature electrolyte applications. This report describes the modeling effort at the University of Louisville, which supports the experimental work at ORNL. Early work on CVD of zirconia and yttria used metal chlorides, which react with water vapor to form solid oxide. Because of this rapid gas-phase reaction the water generally is formed in-situ using the reverse water-gas-shift reaction or a microwave plasma. Even with these arrangements gas-phase nucleation and powder formation are problems when using these precursors. Recent efforts on CVD of zirconia and YSZ have focused on use of metal-organic precursors (MOCVD). These are more stable in the gas

  6. Optical spectroscopic analyses of CVD plasmas used in the deposition of transparent and conductive ZnO thin films

    Energy Technology Data Exchange (ETDEWEB)

    Martin, A.; Espinos, J.P.; Yubero, F.; Barranco, A.; Gonzalez-Elipe, A.R. [Instituto de Ciencias de Materiales de Sevilla, CSIC-Universidad de Sevilla (Spain); Cotrino, J. [Universidad de Sevilla, Facultad de Fisica, Dept. de Fisica Atomica, Molecular y Nuclear, Sevilla (Spain)

    2001-07-01

    Transparent conducting ZnO:A1 thin films have been prepared by remote plasma enhanced chemical vapor deposition. Emission line profiles were recorded as a function of different plasma gas composition (oxygen and hydrogen mixtures) and different rates of precursors (Zn(C{sub 2}H{sub 5}){sub 2} and A1(CH{sub 3}){sub 3}) in the downstream zone of the plasma reactor. Optical emission spectroscopy were used to characterize the oxygen/hydrogen plasma as a function of hydrogen flow rate. The variation of plasma hydrogen content has an important influence in the resistivity of the films. (authors)

  7. Comparative evaluation of CVD diamond technologies

    Energy Technology Data Exchange (ETDEWEB)

    Anthony, T.R. [General Electric Corporate Research & Development Center, Schenectady, NY (United States)

    1993-01-01

    Chemical vapor deposition (CVD) of diamonds occurs from hydrogen-hydrocarbon gas mixtures in the presence of atomic hydrogen at subatmospheric pressures. Most CVD methods are based on different means of generating and transporting atomic hydrogen in a particular system. Evaluation of these different techniques involves their capital costs, material costs, energy costs, labor costs and the type and quality of diamond that they produce. Currently, there is no universal agreement on which is the best technique and technique selection has been largely driven by the professional background of the user as well as the particular application of interest. This article discusses the criteria for evaluating a process for low-pressure deposition of diamond. Next, a brief history of low-pressure diamond synthesis is reviewed. Several specific processes are addressed, including the hot filament process, hot filament electron-assisted chemical vapor deposition, and plasma generation of atomic hydrogen by glow discharge, microwave discharge, low pressure radio frequency discharge, high pressure DC discharge, high pressure microwave discharge jets, high pressure RF discharge, and high and low pressure flames. Other types of diamond deposition methods are also evaluated. 101 refs., 15 figs.

  8. Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD

    Directory of Open Access Journals (Sweden)

    Muller TFG

    2009-01-01

    Full Text Available Abstract We report on the thermally induced changes of the nano-structural and optical properties of hydrogenated nanocrystalline silicon in the temperature range 200–700 °C. The as-deposited sample has a high crystalline volume fraction of 53% with an average crystallite size of ~3.9 nm, where 66% of the total hydrogen is bonded as ≡Si–H monohydrides on the nano-crystallite surface. A growth in the native crystallite size and crystalline volume fraction occurs at annealing temperatures ≥400 °C, where hydrogen is initially removed from the crystallite grain boundaries followed by its removal from the amorphous network. The nucleation of smaller nano-crystallites at higher temperatures accounts for the enhanced porous structure and the increase in the optical band gap and average gap.

  9. Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD.

    Science.gov (United States)

    Arendse, C J; Malgas, G F; Muller, T F G; Knoesen, D; Oliphant, C J; Motaung, D E; Halindintwali, S; Mwakikunga, B W

    2009-01-21

    We report on the thermally induced changes of the nano-structural and optical properties of hydrogenated nanocrystalline silicon in the temperature range 200-700 degrees C. The as-deposited sample has a high crystalline volume fraction of 53% with an average crystallite size of ~3.9 nm, where 66% of the total hydrogen is bonded as identical withSi-H monohydrides on the nano-crystallite surface. A growth in the native crystallite size and crystalline volume fraction occurs at annealing temperatures >/=400 degrees C, where hydrogen is initially removed from the crystallite grain boundaries followed by its removal from the amorphous network. The nucleation of smaller nano-crystallites at higher temperatures accounts for the enhanced porous structure and the increase in the optical band gap and average gap.

  10. In situ study of key material and process reliability issues in the chemical vapor deposition of copper

    Science.gov (United States)

    Lou, Ishing

    With the limitations of current aluminum based metallization schemes used in microelectronics, the development of a manufacturable chemical vapor deposition (CVD) process for copper metallization schemes is crucial to meet the stringent requirements of sub-quarter micron device technology and beyond. The work presented herein focused on investigating key material and process reliability issues pertaining to Cu CVD processing. In particular, a unique combination of in-situ gas phase Fourier transform infrared (FTIR) and quadrupole mass spectrometry (QMS) was employed to study the role of hydrogen in thermal CVD of copper using (tmvs)Cusp{I}(hfac). These studies showed that hydrogen provides significant enhancement in the deposition rate of copper interconnects. Based on the QMS and FTIR data, this enhancement could be attributed to the role of hydrogen in assisting in the removal of tmvs from (tmvs)Cusp{I}(hfac), thus enhancing the conversion of Cusp{I}(hfac) intermediates to Cusp{o} and Cusp{II}(hfac)sb2 and providing a wider process window with higher conversion efficiency. In addition, in-situ real time QMS studies were performed of the gas phase evolution and decomposition pathways of (tmvs)Cusp{I}(hfac) during thermal CVD of copper. The QMS investigations focused on determining the ionization efficiency curves and appearance potentials of (tmvs)Cusp{I}(hfac) under real CVD processing conditions. The resulting curves and associated potentials were then employed to identify the most likely precursor decomposition pathways and examine relevant implications for thermal CVD of copper from (tmvs)Cusp{I}(hfac). Finally, a hydrogen-plasma assisted CVD (PACVD) process was developed for the growth of device quality gold for incorporation as dopant in emerging Cu CVD based metallization interconnects. In particular, it was demonstrated that the PACVD gold process window identified can maintain very low gold deposition rates (gold is a promising in-situ Cu doping technique

  11. Molecular fouling resistance of zwitterionic and amphiphilic initiated chemically vapor-deposited (iCVD) thin films

    Energy Technology Data Exchange (ETDEWEB)

    Yang, R; Goktekin, E; Wang, MH; Gleason, KK

    2014-08-08

    Biofouling is a universal problem in various applications ranging from water purification to implantable biomedical devices. Recent advances in surface modification have created a rich library of antifouling surface chemistries, many of which can be categorized into one of the two groups: hydrophilic surfaces or amphiphilic surfaces. We report the straightforward preparation of antifouling thin film coatings in both categories via initiated chemical vapor deposition. A molecular force spectroscopy-based method is demonstrated as a rapid and quantitative assessment tool for comparing the differences in antifouling characteristics. The fouling propensity of single molecules, as opposed to bulk protein solution or bacterial culture, is assessed. This method allows for the interrogation of molecular interaction without the complication resulted from protein conformational change or micro-organism group interactions. The molecular interaction follows the same trend as bacterial adhesion results obtained previously, demonstrating that molecular force probe is a valid method for the quantification and mechanistic examination of fouling. In addition, the molecular force spectroscopy-based method is able to distinguish differences in antifouling capability that is not resolvable by traditional static protein adsorption tests. To lend further insight into the intrinsic fouling resistance of zwitterionic and amphiphilic surface chemistries, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, advancing and receding water contact angles, and atomic force microscopy are used to elucidate the film properties that are relevant to their antifouling capabilities.

  12. Preparation of Li4Ti5O12 electrode thin films by a mist CVD process with aqueous precursor solution

    Directory of Open Access Journals (Sweden)

    Kiyoharu Tadanaga

    2015-03-01

    Full Text Available Spinel Li4Ti5O12 thin films were prepared by a mist CVD process, using an aqueous solution of lithium nitrate and a water-soluble titanium lactate complex as the source of Li and Ti, respectively. In this process, mist particles ultrasonically atomized from a source aqueous solution were transferred by nitrogen gas to a heating substrate to prepare thin films. Scanning electron microscopy observation showed that thin films obtained by this process were dense and smooth, and thin films with a thickness of about 500 nm were obtained. In the X-ray diffraction analysis, formation of Li4Ti5O12 spinel phase was confirmed in the obtained thin film sintered at 700 °C for 4 h. The cell with the thin films as an electrode exhibited a capacity of about 110 mAh g−1, and the cell showed good cycling performance during 10 cycles.

  13. Simple Chemical Vapor Deposition Experiment

    Science.gov (United States)

    Pedersen, Henrik

    2014-01-01

    Chemical vapor deposition (CVD) is a process commonly used for the synthesis of thin films for several important technological applications, for example, microelectronics, hard coatings, and smart windows. Unfortunately, the complexity and prohibitive cost of CVD equipment makes it seldom available for undergraduate chemistry students. Here, a…

  14. CVD of solid oxides in porous substrates for ceramic membrane modification

    NARCIS (Netherlands)

    Lin, Y.S.; Burggraaf, A.J.

    1992-01-01

    The deposition of yttria-doped zirconia has been experimented systematically in various types of porous ceramic substrates by a modified chemical vapor deposition (CVD) process operating in an opposing reactant geometry using water vapor and corresponding metal chloride vapors as reactants. The effe

  15. Laser CVD Process for the Preparation of Ultrafine SiC Powder

    Institute of Scientific and Technical Information of China (English)

    ZHANGQitu; XIAODifan

    2000-01-01

    The CW-CO2 laser driven gas reaction was applied to prepare nano-sized SiC powder,SiH4 and C2H4 of high purties,as starting materials,were mixed t a certain ration and introduced into the resaction cell.The gases flew across the laser beam orthogonally and thus were heated by laser beam.The nano-sized SiC ultrafine powderws were formed through thermic gas reation.The final productivity of this process was 97%,The obtained powders were characterized and analyzed.Chemical analysis revealed that the SiC content was 95.38 wt%,Oxygen ,the primary impurity,weighted 1.32% while trace impurities,such as calcium ,magnesium and other metals,were only 0.03%,XRD,XPS and TEM indicated that th powder particles were nearly spherical and not agglomerated.The particle size ranged from 10nm to 25nm with an average of 15 nm ,The particles tred to be noncrystalline.

  16. X-Ray structural and gas phase studies of silver(i) perfluorinated carboxylate complexes with 2,2'-bipyridyl as potential precursors for chemical vapour deposition (CVD).

    Science.gov (United States)

    Szłyk, Edward; Szczesny, Robert; Wojtczak, Andrzej

    2010-02-21

    [Ag(CF(3)COO)(bpy)] (), [Ag(2)(C(2)F(5)COO)(2)(bpy)] () and [Ag(2)(C(3)F(7)COO)(2)(bpy)] () were prepared and characterized by MS-EI, (1)H, (13)C NMR, variable-temperature IR (VT-IR) spectroscopy (solid sample and evolved volatile species) and thermal analysis. Single-crystal X-ray diffraction data revealed the polymeric structure for [Ag(2)(C(2)F(5)COO)(2)(bpy)] and [Ag(6)(C(3)F(7)COO)(6)(bpy)(4)], with bridging bpy ligand, whereas for [Ag(CF(3)COO)(bpy)] the dimeric system with monodentately linked carboxylate was noted. Mass spectra analysis of () over 30-300 degrees C indicates the presence of binuclear ions [(RCOO)Ag(2)](+) as a main volatile particles, which can be transported in CVD process. VT-IR studies of gases evolved during the thermal decomposition process, demonstrate the presence of fluorocarbon species and CO(2) as the most abundant molecules. Thermal analysis of () revealed a multi-stage decomposition mechanism resulting in Ag(0) formation below 290 degrees C. Compounds were tested for silver metal spray pyrolysis and obtained layers were characterized by scanning electron microscopy (SEM-EDX) and XRD.

  17. Facile preparation of carbon coated magnetic Fe{sub 3}O{sub 4} particles by a combined reduction/CVD process

    Energy Technology Data Exchange (ETDEWEB)

    Tristao, Juliana C.; Oliveira, Aline A.S. [Departamento de Quimica, Universidade Federal de Minas Gerais, Belo Horizonte-MG, 31270-901 (Brazil); Ardisson, Jose D. [Laboratorio de Fisica Aplicada, CDTN, Belo Horizonte, MG 30123-970 (Brazil); Dias, Anderson [Departamento de Quimica, Universidade Federal de Ouro Preto, Ouro Preto-MG, 35400-000 (Brazil); Lago, Rochel M., E-mail: rochel@ufmg.br [Departamento de Quimica, Universidade Federal de Minas Gerais, Belo Horizonte-MG, 31270-901 (Brazil)

    2011-05-15

    Graphical abstract: Magnetic carbon coated Fe{sub 3}O{sub 4} particles are prepared by a one step combined reduction of Fe{sub 2}O{sub 3} together with a CVD process of using methane. Analyses show that the Fe{sub 2}O{sub 3} is reduced by methane to produce mainly Fe{sub 3}O{sub 4} particles coated with amorphous carbon. These materials can be separated into two fractions by simple dispersion in water and can be used as adsorbents, catalyst supports and rapid coagulation systems. Research highlights: {yields} Magnetic Fe{sub 3}O{sub 4} particles coated with a very thin layer of amorphous carbon (4 wt%). {yields} Combined reduction of Fe{sub 2}O{sub 3} with a Chemical Vapor Deposition process using methane. {yields} Nanoparticles with an average size of 100-200 nm. {yields} Uses as adsorbent, catalyst support and rapid coagulation systems. -- Abstract: In this work, we report a simple method for the preparation of magnetic carbon coated Fe{sub 3}O{sub 4} particles by a single step combined reduction of Fe{sub 2}O{sub 3} together with a Chemical Vapor Deposition process using methane. The temperature programmed reaction monitored by Moessbauer, X-ray Diffraction and Raman analyses showed that Fe{sub 2}O{sub 3} is directly reduced by methane at temperatures between 600 and 900 {sup o}C to produce mainly Fe{sub 3}O{sub 4} particles coated with up to 4 wt% of amorphous carbon. These magnetic materials can be separated into two fractions by simple dispersion in water, i.e., a settled material composed of large magnetic particles and a suspended material composed of nanoparticles with an average size of 100-200 nm as revealed by Scanning Electron Microscopy and High-resolution Transmission Electron Microscopy. Different uses for these materials, e.g., adsorbents, catalyst supports, rapid coagulation systems, are proposed.

  18. Mo-C Multilayered CVD Coatings

    Directory of Open Access Journals (Sweden)

    A. Sagalovych

    2013-12-01

    Full Text Available Production processes of multi-layered Mo-C coatings by the method of chemical vapor deposition (CVD with the use of organometallic compounds were developed. Coatings are applied on technical purpose steel DIN 1.2379 (H12F1 and DIN 1.7709 (25H2MF (ÉI10 heat-treated ball with the high class of surface roughness (> 10. The average deposition rate was 50 μm / h. The optimal conditions of deposition coatings for different technological schemas were defined. Metallographic investigations of the obtained coatings were carried out. Tribological studies of the friction and wear characteristics of sliding friction in conditions of boundary lubrication of Ï-S multilayered CVD coatings shows, that coatings have low friction coefficients (0075-0095 at loads up to 2.0 kN, showed high resistance to wear and are effective in increasing the stability of the pair for precision friction pairs of hydraulical units.

  19. An automatic modeling system of the reaction mechanisms for chemical vapor deposition processes using real-coded genetic algorithms.

    Science.gov (United States)

    Takahashi, Takahiro; Nakai, Hiroyuki; Kinpara, Hiroki; Ema, Yoshinori

    2011-09-01

    The identification of appropriate reaction models is very helpful for developing chemical vapor deposition (CVD) processes. In this study, we have developed an automatic system to model reaction mechanisms in the CVD processes by analyzing the experimental results, which are cross-sectional shapes of the deposited films on substrates with micrometer- or nanometer-sized trenches. We designed the inference engine to model the reaction mechanism in the system by the use of real-coded genetic algorithms (RCGAs). We studied the dependence of the system performance on two methods using simple genetic algorithms (SGAs) and the RCGAs; the one involves the conventional GA operators and the other involves the blend crossover operator (BLX-alpha). Although we demonstrated that the systems using both the methods could successfully model the reaction mechanisms, the RCGAs showed the better performance with respect to the accuracy and the calculation cost for identifying the models.

  20. Designing polymer surfaces via vapor deposition

    Directory of Open Access Journals (Sweden)

    Ayse Asatekin

    2010-05-01

    Full Text Available Chemical Vapor Deposition (CVD methods significantly augment the capabilities of traditional surface modification techniques for designing polymeric surfaces. In CVD polymerization, the monomer(s are delivered to the surface through the vapor phase and then undergo simultaneous polymerization and thin film formation. By eliminating the need to dissolve macromolecules, CVD enables insoluble polymers to be coated and prevents solvent damage to the substrate. Since de-wetting and surface tension effects are absent, CVD coatings conform to the geometry of the underlying substrate. Hence, CVD polymers can be readily applied to virtually any substrate: organic, inorganic, rigid, flexible, planar, three-dimensional, dense, or porous. CVD methods integrate readily with other vacuum processes used to fabricate patterned surfaces and devices. CVD film growth proceeds from the substrate up, allowing for interfacial engineering, real-time monitoring, thickness control, and the synthesis of films with graded composition. This article focuses on two CVD polymerization methods that closely translate solution chemistry to vapor deposition; initiated CVD and oxidative CVD. The basic concepts underlying these methods and the resultant advantages over other thin film coating techniques are described, along with selected applications where CVD polymers are an enabling technology.

  1. Film Growth Rates and Activation Energies for Core-Shell Nanoparticles Derived from a CVD Based Aerosol Process

    Directory of Open Access Journals (Sweden)

    Frederik Weis

    2015-03-01

    Full Text Available Silica core-shell nanoparticles of about 60–120 nm with a closed outer layer of bismuth or molybdenum oxide of 1–10 nm were synthesized by an integrated chemical vapor synthesis/chemical vapor deposition process at atmospheric pressure. Film growth rates and activation energies were derived from transmission electron microscopy (TEM images for a deposition process based on molybdenum hexacarbonyl and triphenyl bismuth as respective coating precursors. Respective activation energies of 123 ± 10 and 155 ± 10 kJ/mol are in good agreement with the literature and support a deposition mechanism based on surface-induced removal of the precursor ligands. Clean substrate surfaces are thus prerequisite for conformal coatings. Integrated aerosol processes are solvent-free and intrinsically clean. In contrast, commercial silica substrate particles were found to suffer from organic residues which hinder shell formation, and require an additional calcination step to clean the surface prior to coating. Dual layer core-shell structures with molybdenum oxide on bismuth oxide were synthesized with two coating reactors in series and showed similar film growth rates.

  2. Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition

    NARCIS (Netherlands)

    Aresta, G.; Palmans, J.; M. C. M. van de Sanden,; Creatore, M.

    2012-01-01

    Organosilicon layers have been deposited from 1,3,5-trivinyl-1,3,5-trimethylcyclotrisiloxane (V3D3) by means of the initiated-chemical vapor deposition (i-CVD) technique in a deposition setup, ad hoc designed for the engineering of multilayer moisture permeation barriers. The application of Fourier

  3. A simple process for the fabrication of large-area CVD graphene based devices via selective in situ functionalization and patterning

    Science.gov (United States)

    Alexeev, Arseny M.; Barnes, Matthew D.; Karthik Nagareddy, V.; Craciun, Monica F.; Wright, C. David

    2017-03-01

    We report a novel approach for the fabrication of micro- and nano-scale graphene devices via the in situ plasma functionalization and in situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent, graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.

  4. A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias.

    Science.gov (United States)

    Lisker, Marco; Marschmeyer, Steffen; Kaynak, Mehmet; Tekin, Ibrahim

    2011-09-01

    The formation of a Through Silicon Via (TSV) includes a deep Si trench etching and the formation of an insulating layer along the high-aspect-ratio trench and the filling of a conductive material into the via hole. The isolation of the filling conductor from the silicon substrate becomes more important for higher frequencies due to the high coupling of the signal to the silicon. The importance of the oxide thickness on the via wall isolation can be verified using electromagnetic field simulators. To satisfy the needs on the Silicon dioxide deposition, a sub-atmospheric chemical vapor deposition (SA-CVD) process has been developed to deposit an isolation oxide to the walls of deep silicon trenches. The technique provides excellent step coverage of the 100 microm depth silicon trenches with the high aspect ratio of 20 and more. The developed technique allows covering the deep silicon trenches by oxide and makes the high isolation of TSVs from silicon substrate feasible which is the key factor for the performance of TSVs for mm-wave 3D packaging.

  5. CVD diamond - fundamental phenomena

    Energy Technology Data Exchange (ETDEWEB)

    Yarbrough, W.A. [Pennsylvania State Univ., University Park (United States)

    1993-01-01

    This compilation of figures and diagrams addresses the basic physical processes involved in the chemical vapor deposition of diamond. Different methods of deposition are illustrated. For each method, observations are made of the prominent advantages and disadvantages of the technique. Chemical mechanisms of nucleation are introduced.

  6. Electrochemically assisted deposition of hydroxyapatite on Ti6Al4V substrates covered by CVD diamond films — Coating characterization and first cell biological results

    Energy Technology Data Exchange (ETDEWEB)

    Strąkowska, Paulina [Gdańsk University of Technology, Mechanical Engineering Faculty (Poland); Gdańsk University of Technology, Faculty of Electronics, Telecommunications, and Informatics (Poland); Beutner, René [Max Bergmann Center, Technische Universität Dresden (Germany); Gnyba, Marcin [Gdańsk University of Technology, Faculty of Electronics, Telecommunications, and Informatics (Poland); Zielinski, Andrzej [Gdańsk University of Technology, Mechanical Engineering Faculty (Poland); Scharnweber, Dieter, E-mail: Dieter.Scharnweber@tu-dresden.de [Max Bergmann Center, Technische Universität Dresden (Germany)

    2016-02-01

    Although titanium and its alloys are widely used as implant material for orthopedic and dental applications they show only limited corrosion stability and osseointegration in different cases. The aim of the presented research was to develop and characterize a novel surface modification system from a thin diamond base layer and a hydroxyapatite (HAp) top coating deposited on the alloy Ti6Al4V widely used for implants in contact with bone. This coating system is expected to improve both the long-term corrosion behavior and the biocompatibility and bioactivity of respective surfaces. The diamond base films were obtained by Microwave Plasma Assisted Chemical Vapor Deposition (MW-PACVD); the HAp coatings were formed in aqueous solutions by electrochemically assisted deposition (ECAD) at varying polarization parameters. Scanning electron microscopy (SEM), Raman microscopy, and electrical conductivity measurements were applied to characterize the generated surface states; the calcium phosphate coatings were additionally chemically analyzed for their composition. The biological properties of the coating system were assessed using hMSC cells analyzing for cell adhesion, proliferation, and osteogenic differentiation. Varying MW-PACVD process conditions resulted in composite coatings containing microcrystalline diamond (MCD/Ti-C), nanocrystalline diamond (NCD), and boron-doped nanocrystalline diamond (B-NCD) with the NCD coatings being dense and homogeneous and the B-NCD coatings showing increased electrical conductivity. The ECAD process resulted in calcium phosphate coatings from stoichiometric and non-stoichiometric HAp. The deposition of HAp on the B-NCD films run at lower cathodic potentials and resulted both in the highest coating mass and the most homogenous appearance. Initial cell biological investigations showed an improved cell adhesion in the order B-NCD > HAp/B-NCD > uncoated substrate. Cell proliferation was improved for both investigated coatings whereas ALP

  7. Electronic stress tensor analysis of molecules in gas phase of CVD process for GeSbTe alloy

    CERN Document Server

    Nozaki, Hiroo; Ichikawa, Kazuhide; Tachibana, Akitomo

    2015-01-01

    We analyze the electronic structure of molecules which may exist in gas phase of chemical vapor deposition process for GeSbTe alloy using the electronic stress tensor, with special focus on the chemical bonds between Ge, Sb and Te atoms. We find that, from the viewpoint of the electronic stress tensor, they have intermediate properties between alkali metals and hydrocarbon molecules. We also study the correlation between the bond order which is defined based on the electronic stress tensor, and energy-related quantities. We find that the correlation with the bond dissociation energy is not so strong while one with the force constant is very strong. We interpret these results in terms of the energy density on the "Lagrange surface", which is considered to define the boundary surface of atoms in a molecule in the framework of the electronic stress tensor analysis.

  8. Electronic stress tensor analysis of molecules in gas phase of CVD process for GeSbTe alloy.

    Science.gov (United States)

    Nozaki, Hiroo; Ikeda, Yuji; Ichikawa, Kazuhide; Tachibana, Akitomo

    2015-06-15

    We analyze the electronic structure of molecules which may exist in gas phase of chemical vapor deposition process for GeSbTe alloy using the electronic stress tensor, with special focus on the chemical bonds between Ge, Sb, and Te atoms. We find that, from the viewpoint of the electronic stress tensor, they have intermediate properties between alkali metals and hydrocarbon molecules. We also study the correlation between the bond order which is defined based on the electronic stress tensor, and energy-related quantities. We find that the correlation with the bond dissociation energy is not so strong while one with the force constant is very strong. We interpret these results in terms of the energy density on the "Lagrange surface," which is considered to define the boundary surface of atoms in a molecule in the framework of the electronic stress tensor analysis.

  9. Investigation of the Millimeter-Wave Plasma Assisted CVD Reactor

    Energy Technology Data Exchange (ETDEWEB)

    Vikharev, A; Gorbachev, A; Kozlov, A; Litvak, A; Bykov, Y; Caplan, M

    2005-07-21

    A polycrystalline diamond grown by the chemical vapor deposition (CVD) technique is recognized as a unique material for high power electronic devices owing to unrivaled combination of properties such as ultra-low microwave absorption, high thermal conductivity, high mechanical strength and chemical stability. Microwave vacuum windows for modern high power sources and transmission lines operating at the megawatt power level require high quality diamond disks with a diameter of several centimeters and a thickness of a few millimeters. The microwave plasma-assisted CVD technique exploited today to produce such disks has low deposition rate, which limits the availability of large size diamond disk windows. High-electron-density plasma generated by the millimeter-wave power was suggested for enhanced-growth-rate CVD. In this paper a general description of the 30 GHz gyrotron-based facility is presented. The output radiation of the gyrotron is converted into four wave-beams. Free localized plasma in the shape of a disk with diameter much larger than the wavelength of the radiation is formed in the intersection area of the wave-beams. The results of investigation of the plasma parameters, as well as the first results of diamond film deposition are presented. The prospects for commercially producing vacuum window diamond disks for high power microwave devices at much lower costs and processing times than currently available are outlined.

  10. Advanced methods for processing ceramics

    Energy Technology Data Exchange (ETDEWEB)

    Carter, W.B. [Georgia Institute of Technology, Atlanta, GA (United States)

    1997-04-01

    Combustion chemical vapor deposition (combustion CVD) is being developed for the deposition of high temperature oxide coatings. The process is being evaluated as an alternative to more capital intensive conventional coating processes. The thrusts during this reporting period were the development of the combustion CVD process for depositing lanthanum monazite, the determination of the influence of aerosol size on coating morphology, the incorporation of combustion CVD coatings into thermal barrier coatings (TBCs) and related oxidation research, and continued work on the deposition of zirconia-yttria coatings.

  11. iCVD Cyclic Polysiloxane and Polysilazane as Nanoscale Thin-Film Electrolyte: Synthesis and Properties.

    Science.gov (United States)

    Chen, Nan; Reeja-Jayan, B; Liu, Andong; Lau, Jonathan; Dunn, Bruce; Gleason, Karen K

    2016-03-01

    A group of crosslinked cyclic siloxane (Si-O) and silazane (Si-N) polymers are synthesized via solvent-free initiated chemical vapor deposition (iCVD). Notably, this is the first report of cyclic polysilazanes synthesized via the gas-phase iCVD method. The deposited nanoscale thin films are thermally stable and chemically inert. By iCVD, they can uniformly and conformally cover nonplanar surfaces having complex geometry. Although polysiloxanes are traditionally utilized as dielectric materials and insulators, our research shows these cyclic organosilicon polymers can conduct lithium ions (Li(+) ) at room temperature. The conformal coating and the room temperature ionic conductivity make these cyclic organosilicon polymers attractive for use as thin-film electrolytes in solid-state batteries. Also, their synthesis process and properties have been systemically studied and discussed.

  12. Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor

    NARCIS (Netherlands)

    Yang, Mengdi; Aarnink, Antonius A.I.; Kovalgin, Alexeij Y.; Gravesteijn, Dirk J; Wolters, Robertus A.M.; Schmitz, Jurriaan

    In this work, the authors developed hot-wire assisted atomic layer deposition (HWALD) to deposit tungsten (W) with a tungsten filament heated up to 1700–2000 C. Atomic hydrogen (at-H) was generated by dissociation of molecular hydrogen (H2), which reacted with WF6 at the substrate to deposit W. The

  13. Preparation of LiMn{sub 2}O{sub 4} cathode thin films for thin film lithium secondary batteries by a mist CVD process

    Energy Technology Data Exchange (ETDEWEB)

    Tadanaga, Kiyoharu, E-mail: tadanaga@chem.osakafu-u.ac.jp [Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka, 599-8531 (Japan); Yamaguchi, Akihiro; Sakuda, Atsushi; Hayashi, Akitoshi; Tatsumisago, Masahiro [Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka, 599-8531 (Japan); Duran, Alicia; Aparacio, Mario [Instituto de Cerámica y Vidrio, Consejo Superior de Investigaciones Científicas, Kelsen 5 (Campus de Cantoblanco), Madrid, 28049 (Spain)

    2014-05-01

    Highlights: • LiMn{sub 2}O{sub 4} thin films were prepared by using the mist CVD process. • An aqueous solution of lithium and manganese acetates is used for the precursor solution. • The cell with the LiMn{sub 2}O{sub 4} thin films exhibited a capacity of about 80 mAh/g. • The cell showed good cycling performance during 10 cycles. - Abstract: LiMn{sub 2}O{sub 4} cathode thin films for thin film lithium secondary batteries were prepared by using so-called the “mist CVD process”, employing an aqueous solution of lithium acetate and manganese acetate, as the source of Li and Mn, respectively. The aqueous solution of starting materials was ultrasonically atomized to form mist particles, and mists were transferred by nitrogen gas to silica glass substrate to form thin films. FE-SEM observation revealed that thin films obtained by this process were dense and smooth, and thin films with a thickness of about 750 nm were obtained. The electrochemical cell with the thin films obtained by sintering at 700 °C exhibited a capacity of about 80 mAh/g, and the cell showed good cycling performance during 10 cycles.

  14. The Effect of Excess Carbon on the Crystallographic, Microstructural, and Mechanical Properties of CVD Silicon Carbide Fibers

    Energy Technology Data Exchange (ETDEWEB)

    Marzik, J V; Croft, W J; Staples, R J; MoberlyChan, W J

    2006-12-05

    Silicon carbide (SiC) fibers made by chemical vapor deposition (CVD) are of interest for organic, ceramic, and metal matrix composite materials due their high strength, high elastic modulus, and retention of mechanical properties at elevated processing and operating temperatures. The properties of SCS-6{trademark} silicon carbide fibers, which are made by a commercial process and consist largely of stoichiometric SiC, were compared with an experimental carbon-rich CVD SiC fiber, to which excess carbon was added during the CVD process. The concentration, homogeneity, and distribution of carbon were measured using energy dispersive x-ray spectroscopy (SEM/EDS). The effect of excess carbon on the tensile strength, elastic modulus, and the crystallographic and microstructural properties of CVD silicon carbide fibers was investigated using tensile testing, x-ray diffraction, scanning electron microscopy (SEM), and transmission electron microscopy (TEM).

  15. Chromized Layers Produced on Steel Surface by Means of CVD

    Institute of Scientific and Technical Information of China (English)

    KASPRZYCKA Ewa; BOGDA(N)SKI Bogdan; JEZIORSKI Leopold; JASI(N)SKI J(o)zef; TORBUS Roman

    2004-01-01

    Chemical vapour deposition of chromium on the surface of carbon steel has been investigated using a novel CVD method that combines the low cost of pack cementation method with advantages of vacuum technique. The processes have been performed in chromium chlorides atmosphere at a low pressure range from 1 to 800 hPa, the treatment temperature 800 to 950℃. Studies of the layers thickness, the phase composition, Cr, C and Fe depth profiles in diffusion zone have been conducted. The effect of the vacuum level during the process and the process parameters such as time and temperature on layer diffusion growth on the carbon steel surface has been investigated.

  16. Solution-processed n-type fullerene field-effect transistors prepared using CVD-grown graphene electrodes: improving performance with thermal annealing.

    Science.gov (United States)

    Jeong, Yong Jin; Yun, Dong-Jin; Jang, Jaeyoung; Park, Seonuk; An, Tae Kyu; Kim, Lae Ho; Kim, Se Hyun; Park, Chan Eon

    2015-03-07

    Solution-processed organic field effect transistors (OFETs), which are amenable to facile large-area processing methods, have generated significant interest as key elements for use in all-organic electronic applications aimed at realizing low-cost, lightweight, and flexible devices. The low performance levels of n-type solution-processed bottom-contact OFETs unfortunately continue to pose a barrier to their commercialization. In this study, we introduced a combination of CVD-grown graphene source/drain (S/D) electrodes and fullerene (C60) in a solution-processable n-type semiconductor toward the fabrication of n-type bottom-contact OFETs. The C60 coating in the channel region was achieved by modifying the surface of the oxide gate dielectric layer with a phenyl group-terminated self-assembled monolayer (SAM). The graphene and phenyl group in the SAMs induced π-π interactions with C60, which facilitated the formation of a C60 coating. We also investigated the effects of thermal annealing on the reorganization properties and field-effect performances of the overlaying solution-processed C60 semiconductors. We found that thermal annealing of the C60 layer on the graphene surface improved the crystallinity of the face-centered cubic (fcc) phase structure, which improved the OFET performance and yielded mobilities of 0.055 cm(2) V(-1) s(-1). This approach enables the realization of solution-processed C60-based FETs using CVD-grown graphene S/D electrodes via inexpensive and solution-process techniques.

  17. Preparation and characteristics of C/C composite brake disc by multi-cylindrical chemical vapor deposition processes

    Institute of Scientific and Technical Information of China (English)

    YUAN Yi-dong; ZHANG Fu-kuan; ZHOU Wan-cheng

    2005-01-01

    The C/C composite brake discs were prepared by tri-cylindrical chemical vapor deposition (CVD) process. The optimum processing parameters were as follows: deposition temperature was 830-930 ℃, the gas-flow rates of N2 and propylene were 4.8-5.2 m3/h and 5.8-6.2 m3/h, respectively, the furnace pressure was 4.5-5.5 kPa and the deposition time was 200 h.The effects of processing parameters on the densified rates, thermal-physical property and mechanical performance of C/C composite brake discs were studied. The results show that density, heat conductivity, bend strength and abrasion ratio of the multi-cylindrica brake discs are 1.02-1.78 g/cm3, 31 W/(m·K), 114 MPa and 7 μm/s, respectively, which are approximately similar to those of the single-cylindrical ones. The gas flow rate has no relation to the number of the cylinder and furnace loading. The utilization ratio of carbon can be improved by multi-cylinder CVD process without changing the characteristics of brake disc.

  18. Chemical Vapor Deposition of Aluminum Oxide Thin Films

    Science.gov (United States)

    Vohs, Jason K.; Bentz, Amy; Eleamos, Krystal; Poole, John; Fahlman, Bradley D.

    2010-01-01

    Chemical vapor deposition (CVD) is a process routinely used to produce thin films of materials via decomposition of volatile precursor molecules. Unfortunately, the equipment required for a conventional CVD experiment is not practical or affordable for many undergraduate chemistry laboratories, especially at smaller institutions. In an effort to…

  19. Nitrogen-doped graphene films from chemical vapor deposition of pyridine: influence of process parameters on the electrical and optical properties

    Directory of Open Access Journals (Sweden)

    Andrea Capasso

    2015-10-01

    Full Text Available Graphene films were produced by chemical vapor deposition (CVD of pyridine on copper substrates. Pyridine-CVD is expected to lead to doped graphene by the insertion of nitrogen atoms in the growing sp2 carbon lattice, possibly improving the properties of graphene as a transparent conductive film. We here report on the influence that the CVD parameters (i.e., temperature and gas flow have on the morphology, transmittance, and electrical conductivity of the graphene films grown with pyridine. A temperature range between 930 and 1070 °C was explored and the results were compared to those of pristine graphene grown by ethanol-CVD under the same process conditions. The films were characterized by atomic force microscopy, Raman and X-ray photoemission spectroscopy. The optical transmittance and electrical conductivity of the films were measured to evaluate their performance as transparent conductive electrodes. Graphene films grown by pyridine reached an electrical conductivity of 14.3 × 105 S/m. Such a high conductivity seems to be associated with the electronic doping induced by substitutional nitrogen atoms. In particular, at 930 °C the nitrogen/carbon ratio of pyridine-grown graphene reaches 3%, and its electrical conductivity is 40% higher than that of pristine graphene grown from ethanol-CVD.

  20. Development of CVD Mullite Coatings for SiC Fibers

    Energy Technology Data Exchange (ETDEWEB)

    Sarin, V.K.; Varadarajan, S.

    2000-03-15

    A process for depositing CVD mullite coatings on SiC fibers for enhanced oxidation and corrosion, and/or act as an interfacial protective barrier has been developed. Process optimization via systematic investigation of system parameters yielded uniform crystalline mullite coatings on SiC fibers. Structural characterization has allowed for tailoring of coating structure and therefore properties. High temperature oxidation/corrosion testing of the optimized coatings has shown that the coatings remain adherent and protective for extended periods. However, preliminary tests of coated fibers showed considerable degradation in tensile strength.

  1. Development of APCVD process for high quality TCO

    NARCIS (Netherlands)

    Deelen, J. van; Mol, A.M.B. van; Poodt, P.W.G.; Grob, F.; Spee, C.I.M.A.

    2009-01-01

    For the past decade TNO has been involved in the research and development of atmospheric pressure CVD (APCVD) and plasma enhanced CVD (PECVD) processes for deposition of transparent conductive oxides (TCO), such as tin oxide and zinc oxide. The use of atmospheric deposition processes allows for larg

  2. Antireflection coatings on plastics deposited by plasma polymerization process

    Indian Academy of Sciences (India)

    K M K Srivatsa; M Bera; A Basu; T K Bhattacharya

    2008-08-01

    Antireflection coatings (ARCs) are deposited on the surfaces of optical elements like spectacle lenses to increase light transmission and improve their performance. In the ophthalmic industry, plastic lenses are rapidly displacing glass lenses due to several advantageous features. However, the deposition of ARCs on plastic lenses is a challenging task, because the plastic surface needs treatment for adhesion improvement and surface hardening before depositing the ARC. This surface treatment is usually done in a multi-stage process—exposure to energetic radiations, followed by deposition of a carbonyl hard coating by spin or dip coating processes, UV curing, etc. However, this treatment can also be done by plasma processes. Moreover, the plasma polymerization process allows deposition of optical films at room temperature, essential for plastics. The energetic ions in plasma processes provide similar effects as in ion assisted physical deposition processes to produce hard coatings, without requiring sophisticated ion sources. The plasma polymerization process is more economical than ion-assisted physical vapour deposition processes as regards equipment and source materials and is more cost-effective, enabling the surface treatment and deposition of the ARC in the same deposition system in a single run by varying the system parameters at each step. Since published results of the plasma polymerization processes developed abroad are rather sketchy and the techniques are mostly veiled in commercial secrecy, innovative and indigenous plasma-based techniques have been developed in this work for depositing the complete ARCs on plastic substrates.

  3. Aligned carbon nanotubes catalytically grown on iron-based nanoparticles obtained by laser-induced CVD

    OpenAIRE

    Le Normand, Francois; Cojocaru, Costel Sorin; Ersen, Ovidiu; Legagneux, Pierre; Gangloff, Laurent; Fleaca, C.; Alexandrescu, Rodica; Dumitrache, Florin; Morjan, Ion

    2007-01-01

    International audience; Iron-based nanoparticles are prepared by a laser-induced chemical vapor deposition (CVD) process. They are characterized as body-centered Fe and Fe2O3 (maghemite/magnetite) particles with sizes ::;5 and 10 nm, respectively. The Fe particles are embedded in a protective carbon matrix. Both kind of particles are dispersed by spin-coating on SiO2/Si(1 0 0) flat substrates. They are used as catalyst to grow carbon nanotubes by a plasma- and filaments-assisted catalytic CVD...

  4. Deposition of silicon nitride thin films by hot-wire CVD at 100 {sup o}C and 250 {sup o}C

    Energy Technology Data Exchange (ETDEWEB)

    Alpuim, P., E-mail: palpuim@fisica.uminho.p [Departamento de Fisica, Universidade do Minho, 4800-058 Guimaraes (Portugal); Goncalves, L.M. [Departamento de Electronica Industrial, Universidade do Minho, 4800-058 Guimaraes (Portugal); Marins, E.S. [Departamento de Fisica, Universidade do Minho, 4800-058 Guimaraes (Portugal); Viseu, T.M.R. [Departamento de Fisica, Universidade do Minho, 4710-057 Braga (Portugal); Ferdov, S. [Departamento de Fisica, Universidade do Minho, 4800-058 Guimaraes (Portugal); Bouree, J.E. [Laboratoire de Physique des Interfaces et des Couches Minces, CNRS UMR 7647, Ecole Polytechnique, 91128 Palaiseau (France)

    2009-04-30

    Silicon nitride thin films for use as passivation layers in solar cells and organic electronics or as gate dielectrics in thin-film transistors were deposited by the Hot-wire chemical vapor deposition technique at a high deposition rate (1-3 A/s) and at low substrate temperature. Films were deposited using NH{sub 3}/SiH{sub 4} flow rate ratios between 1 and 70 and substrate temperatures of 100 {sup o}C and 250 {sup o}C. For NH{sub 3}/SiH{sub 4} ratios between 40 and 70, highly transparent (T {approx} 90%), dense films (2.56-2.74 g/cm{sup 3}) with good dielectric properties and refractive index between 1.93 and 2.08 were deposited on glass substrates. Etch rates in BHF of 2.7 A/s and < 0.5 A/s were obtained for films deposited at 100 {sup o}C and 250 {sup o}C, respectively. Films deposited at both substrate temperatures showed electrical conductivity {approx} 10{sup -14} {Omega}{sup -1} cm{sup -1} and breakdown fields > 10 MV cm{sup -1}.

  5. Photochemical CVD of Ru on functionalized self-assembled monolayers from organometallic precursors

    Science.gov (United States)

    Johnson, Kelsea R.; Arevalo Rodriguez, Paul; Brewer, Christopher R.; Brannaka, Joseph A.; Shi, Zhiwei; Yang, Jing; Salazar, Bryan; McElwee-White, Lisa; Walker, Amy V.

    2017-02-01

    Chemical vapor deposition (CVD) is an attractive technique for the metallization of organic thin films because it is selective and the thickness of the deposited film can easily be controlled. However, thermal CVD processes often require high temperatures which are generally incompatible with organic films. In this paper, we perform proof-of-concept studies of photochemical CVD to metallize organic thin films. In this method, a precursor undergoes photolytic decomposition to generate thermally labile intermediates prior to adsorption on the sample. Three readily available Ru precursors, CpRu(CO)2Me, (η3-allyl)Ru(CO)3Br, and (COT)Ru(CO)3, were employed to investigate the role of precursor quantum yield, ligand chemistry, and the Ru oxidation state on the deposition. To investigate the role of the substrate chemistry on deposition, carboxylic acid-, hydroxyl-, and methyl-terminated self-assembled monolayers were used. The data indicate that moderate quantum yields for ligand loss (φ ≥ 0.4) are required for ruthenium deposition, and the deposition is wavelength dependent. Second, anionic polyhapto ligands such as cyclopentadienyl and allyl are more difficult to remove than carbonyls, halides, and alkyls. Third, in contrast to the atomic layer deposition, acid-base reactions between the precursor and the substrate are more effective for deposition than nucleophilic reactions. Finally, the data suggest that selective deposition can be achieved on organic thin films by judicious choice of precursor and functional groups present on the substrate. These studies thus provide guidelines for the rational design of new precursors specifically for selective photochemical CVD on organic substrates.

  6. Self-Catalytic Growth of Tin Oxide Nanowires by Chemical Vapor Deposition Process

    Directory of Open Access Journals (Sweden)

    Bongani S. Thabethe

    2013-01-01

    Full Text Available We report on the synthesis of tin oxide (SnO2 nanowires by a chemical vapor deposition (CVD process. Commercially bought SnO nanopowders were vaporized at 1050°C for 30 minutes with argon gas continuously passing through the system. The as-synthesized products were characterized using UV-visible absorption spectroscopy, X-ray diffraction (XRD, scanning electron microscopy (SEM, and high-resolution transmission electron microscopy (HRTEM. The band gap of the nanowires determined from UV-visible absorption was around 3.7 eV. The SEM micrographs revealed “wool-like” structure which contains nanoribbons and nanowires with liquid droplets at the tips. Nanowires typically have diameter in the range of 50–200 nm and length 10–100 μm. These nanowires followed the vapor-liquid-solid (VLS growth mechanism.

  7. Atmospheric pressure plasma-initiated chemical vapor deposition (AP-PiCVD) of poly(diethylallylphosphate) coating: a char-forming protective coating for cellulosic textile.

    Science.gov (United States)

    Hilt, Florian; Boscher, Nicolas D; Duday, David; Desbenoit, Nicolas; Levalois-Grützmacher, Joëlle; Choquet, Patrick

    2014-01-01

    An innovative atmospheric pressure chemical vapor deposition method toward the deposition of polymeric layers has been developed. This latter involves the use of a nanopulsed plasma discharge to initiate the free-radical polymerization of an allyl monomer containing phosphorus (diethylallylphosphate, DEAP) at atmospheric pressure. The polymeric structure of the film is evidence by mass spectrometry. The method, highly suitable for the treatment of natural biopolymer substrate, has been carried out on cotton textile to perform the deposition of an efficient and conformal protective coating.

  8. Research on chemical vapor deposition processes for advanced ceramic coatings

    Science.gov (United States)

    Rosner, Daniel E.

    1993-01-01

    Our interdisciplinary background and fundamentally-oriented studies of the laws governing multi-component chemical vapor deposition (VD), particle deposition (PD), and their interactions, put the Yale University HTCRE Laboratory in a unique position to significantly advance the 'state-of-the-art' of chemical vapor deposition (CVD) R&D. With NASA-Lewis RC financial support, we initiated a program in March of 1988 that has led to the advances described in this report (Section 2) in predicting chemical vapor transport in high temperature systems relevant to the fabrication of refractory ceramic coatings for turbine engine components. This Final Report covers our principal results and activities for the total NASA grant of $190,000. over the 4.67 year period: 1 March 1988-1 November 1992. Since our methods and the technical details are contained in the publications listed (9 Abstracts are given as Appendices) our emphasis here is on broad conclusions/implications and administrative data, including personnel, talks, interactions with industry, and some known applications of our work.

  9. Hot Wire CVD for thin film triple junction cells and for ultrafast deposition of the SiN passivation layer on polycrystalline Si solar cells

    NARCIS (Netherlands)

    Schropp, R.E.I.; Franken, R.H.; Goldbach, H.D.; Houweling, Z.S.; Li, H. B. T.; Rath, J.K.; Schuttauf, J.A.; Stolk, R.L.; Verlaan, V.; van der Werf, C.H.M.

    2008-01-01

    We present recent progress on hot-wire deposited thin film solar cells and applications of silicon nitride. The cell efficiency reached for μc-Si:H n–i–p solar cells on textured Ag/ZnO presently is 8.5%, in line with the state-of-the-art level for μc-Si:H n–i–p's for any method of deposition. Such c

  10. Formation pathway, structural characterization and optimum processing parameters of synthetic topaz - Al2SiO4(OH,F)2 - by CVD

    Science.gov (United States)

    Trujillo-Vázquez, E.; Pech-Canul, M. I.

    2015-10-01

    A novel synthesis route for topaz (Al2SiO4(OH,F)2) by chemical vapor deposition (CVD) using Na2SiF6 as solid precursor was developed. Synthesis tests were conducted with and without a flow of nitrogen, positioning the Al(OH)3 substrate at 0° and 90° with respect to the gas flow direction, at 700 and 750 °C, for 60 and 90 min, respectively. It was found that topaz is synthesized through two pathways, directly and indirectly, involving a series of endothermic and exothermic, heterogeneous and homogeneous reactions between Al(OH)3 and SiF4(g). Analytical structural determination confirmed existence of orthorhombic polycrystals with lattice parameters of a =4.6558 Å, b=8.8451 Å and c=8.4069 Å. According to ANOVA, while temperature, time and interaction of substrate angular position with atmosphere (P×A) are the parameters that most significantly influence the variability in the amount of topaz formed - equivalent contributions of 31% - topaz lattice parameters are mostly impacted by the same factors (T, t, P, A), but without the interaction factor. The projected amount of topaz is in good agreement with that obtained in confirmation tests under optimal conditions: Al(OH)3 substrate compact placed at 0°, treated at 750 °C for 90 min in the absence of N2.

  11. Robofurnace: A semi-automated laboratory chemical vapor deposition system for high-throughput nanomaterial synthesis and process discovery

    Science.gov (United States)

    Oliver, C. Ryan; Westrick, William; Koehler, Jeremy; Brieland-Shoultz, Anna; Anagnostopoulos-Politis, Ilias; Cruz-Gonzalez, Tizoc; Hart, A. John

    2013-11-01

    Laboratory research and development on new materials, such as nanostructured thin films, often utilizes manual equipment such as tube furnaces due to its relatively low cost and ease of setup. However, these systems can be prone to inconsistent outcomes due to variations in standard operating procedures and limitations in performance such as heating and cooling rates restrict the parameter space that can be explored. Perhaps more importantly, maximization of research throughput and the successful and efficient translation of materials processing knowledge to production-scale systems, relies on the attainment of consistent outcomes. In response to this need, we present a semi-automated lab-scale chemical vapor deposition (CVD) furnace system, called "Robofurnace." Robofurnace is an automated CVD system built around a standard tube furnace, which automates sample insertion and removal and uses motion of the furnace to achieve rapid heating and cooling. The system has a 10-sample magazine and motorized transfer arm, which isolates the samples from the lab atmosphere and enables highly repeatable placement of the sample within the tube. The system is designed to enable continuous operation of the CVD reactor, with asynchronous loading/unloading of samples. To demonstrate its performance, Robofurnace is used to develop a rapid CVD recipe for carbon nanotube (CNT) forest growth, achieving a 10-fold improvement in CNT forest mass density compared to a benchmark recipe using a manual tube furnace. In the long run, multiple systems like Robofurnace may be linked to share data among laboratories by methods such as Twitter. Our hope is Robofurnace and like automation will enable machine learning to optimize and discover relationships in complex material synthesis processes.

  12. Robofurnace: A semi-automated laboratory chemical vapor deposition system for high-throughput nanomaterial synthesis and process discovery

    Energy Technology Data Exchange (ETDEWEB)

    Oliver, C. Ryan; Westrick, William; Koehler, Jeremy; Brieland-Shoultz, Anna; Anagnostopoulos-Politis, Ilias; Cruz-Gonzalez, Tizoc [Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Hart, A. John, E-mail: ajhart@mit.edu [Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)

    2013-11-15

    Laboratory research and development on new materials, such as nanostructured thin films, often utilizes manual equipment such as tube furnaces due to its relatively low cost and ease of setup. However, these systems can be prone to inconsistent outcomes due to variations in standard operating procedures and limitations in performance such as heating and cooling rates restrict the parameter space that can be explored. Perhaps more importantly, maximization of research throughput and the successful and efficient translation of materials processing knowledge to production-scale systems, relies on the attainment of consistent outcomes. In response to this need, we present a semi-automated lab-scale chemical vapor deposition (CVD) furnace system, called “Robofurnace.” Robofurnace is an automated CVD system built around a standard tube furnace, which automates sample insertion and removal and uses motion of the furnace to achieve rapid heating and cooling. The system has a 10-sample magazine and motorized transfer arm, which isolates the samples from the lab atmosphere and enables highly repeatable placement of the sample within the tube. The system is designed to enable continuous operation of the CVD reactor, with asynchronous loading/unloading of samples. To demonstrate its performance, Robofurnace is used to develop a rapid CVD recipe for carbon nanotube (CNT) forest growth, achieving a 10-fold improvement in CNT forest mass density compared to a benchmark recipe using a manual tube furnace. In the long run, multiple systems like Robofurnace may be linked to share data among laboratories by methods such as Twitter. Our hope is Robofurnace and like automation will enable machine learning to optimize and discover relationships in complex material synthesis processes.

  13. Handbook of chemical vapor deposition principles, technology and applications

    CERN Document Server

    Pierson, Hugh O

    1999-01-01

    Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest

  14. Ultratough CVD single crystal diamond and three dimensional growth thereof

    Science.gov (United States)

    Hemley, Russell J [Washington, DC; Mao, Ho-kwang [Washington, DC; Yan, Chih-shiue [Washington, DC

    2009-09-29

    The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m.sup.1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m.sup.1/2. The invention further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.

  15. CVD diamond resistor as heater and temperature sensor

    Energy Technology Data Exchange (ETDEWEB)

    Yang, G.S.; Aslam, M. [Michigan State Univ., East Lansing, MI (United States)

    1995-12-31

    Heat generation and temperature control, essential for most heater applications, require different components in a conventional system. We achieve the heat generation and temperature measurement simultaneously by using a single diamond resistor. Chemical vapor deposited (CVD) p-type diamond resistors with different dimensions were fabricated on polycrystalline diamond or oxidized Si substrates using diamond film technology compatible with integrated circuit (IC) processing. The temperature response of the resistors was characterized in the temperature range of 25 - 500{degrees}C. Power densities in access of 600 watt/in{sup 2} were achieved.

  16. PE-CVD fabrication of germanium nanoclusters for memory applications

    Energy Technology Data Exchange (ETDEWEB)

    Duerkop, T. [Institut fuer Materialien und Bauelemente der Elektronik, Leibniz Universitaet Hannover, Appelstrasse 11a, 30167 Hannover (Germany)], E-mail: duerkop@mbe.uni-hannover.de; Bugiel, E. [Institut fuer Materialien und Bauelemente der Elektronik, Leibniz Universitaet Hannover, Appelstrasse 11a, 30167 Hannover (Germany); Costina, I. [IHP GmbH, Im Technologiepark 25, 15236 Frankfurt (Oder) (Germany); Ott, A.; Peibst, R.; Hofmann, K.R. [Institut fuer Materialien und Bauelemente der Elektronik, Leibniz Universitaet Hannover, Appelstrasse 11a, 30167 Hannover (Germany)

    2008-02-15

    We have investigated Ge nanoclusters (Ge-NC) embedded in silicon dioxide, whose fundamental properties promise improved characteristics in NC flash memory devices as compared to Si nanoclusters. We present a simple new method, based on plasma-enhanced CVD (PE-CVD) deposition of amorphous Ge (a-Ge) onto SiO{sub 2}, to create gate stacks with embedded Ge-NC at vertically well-controlled positions suitable for use in flash memory devices. This process minimizes the exposure of Ge to environmental influences by depositing a-Ge as well as a SiO{sub 2} cap layer in situ within the same deposition chamber. Subsequent high-temperature anneals compatible with the temperature budget of CMOS processing are used for the actual cluster formation. Variation of annealing temperature and duration of this step as well as the thickness of the initial Ge layer controls the average cluster radius and density, as determined by transmission electron microscopy (TEM). Measurements of electrical properties show the capability of samples with NC to store charge.

  17. Influence of hydrogen dilution on structural, electrical and optical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films prepared by plasma enhanced chemical vapour deposition (PE-CVD)

    Energy Technology Data Exchange (ETDEWEB)

    Funde, A.M.; Bakr, Nabeel Ali; Kamble, D.K. [School of Energy Studies, University of Pune, Pune 411 007 (India); Hawaldar, R.R.; Amalnerkar, D.P. [Center for Materials for Electronics Technology (C-MET), Panchawati, Pune 411 008 (India); Jadkar, S.R. [Department of Physics, University of Pune, Ganeshkhind Road, Pune 411 007 (India)

    2008-10-15

    Hydrogenated nanocrystalline silicon (nc-Si:H) thin films were deposited from pure silane (SiH{sub 4}) and hydrogen (H{sub 2}) gas mixture by conventional plasma enhanced chemical vapour deposition (PE-CVD) method at low temperature (200 C) using high rf power. The structural, optical and electrical properties of these films are carefully and systematically investigated as a function of hydrogen dilution of silane (R). Characterization of these films with low angle X-ray diffraction and Raman spectroscopy revealed that the crystallite size in the films tends to decrease and at same time the volume fraction of crystallites increases with increase in R. The Fourier transform infrared (FTIR) spectroscopic analysis showed at low values of R, the hydrogen is predominantly incorporated in the nc-Si:H films in the mono-hydrogen (Si-H) bonding configuration. However, with increasing R the hydrogen bonding in nc-Si:H films shifts from mono-hydrogen (Si-H) to di-hydrogen (Si-H{sub 2}) and (Si-H{sub 2}){sub n} complexes. The hydrogen content in the nc-Si:H films decreases with increase in R and was found less than 10 at% over the entire studied range of R. On the other hand, the Tauc's optical band gap remains as high as 2 eV or much higher. The quantum size effect may responsible for higher band gap in nc-Si:H films. A correlation between electrical and structural properties has been found. For optimized deposition conditions, nc-Si:H films with crystallite size {proportional_to}7.67 nm having good degree of crystallinity ({proportional_to}84%) and high band gap (2.25 eV) were obtained with a low hydrogen content (6.5 at%). However, for these optimized conditions, the deposition rate was quite small (1.6 Aa/s). (author)

  18. Enhanced cold wall CVD reactor growth of horizontally aligned single-walled carbon nanotubes

    Science.gov (United States)

    Mu, Wei; Kwak, Eun-Hye; Chen, Bingan; Huang, Shirong; Edwards, Michael; Fu, Yifeng; Jeppson, Kjell; Teo, Kenneth; Jeong, Goo-Hwan; Liu, Johan

    2016-05-01

    HASynthesis of horizontally-aligned single-walled carbon nanotubes (HA-SWCNTs) by chemical vapor deposition (CVD) directly on quartz seems very promising for the fabrication of future nanoelectronic devices. In comparison to hot-wall CVD, synthesis of HA-SWCNTs in a cold-wall CVD chamber not only means shorter heating, cooling and growth periods, but also prevents contamination of the chamber. However, since most synthesis of HA-SWCNTs is performed in hot-wall reactors, adapting this well-established process to a cold-wall chamber becomes extremely crucial. Here, in order to transfer the CVD growth technology from a hot-wall to a cold-wall chamber, a systematic investigation has been conducted to determine the influence of process parameters on the HA-SWCNT's growth. For two reasons, the cold-wall CVD chamber was upgraded with a top heater to complement the bottom substrate heater; the first reason to maintain a more uniform temperature profile during HA-SWCNTs growth, and the second reason to preheat the precursor gas flow before projecting it onto the catalyst. Our results show that the addition of a top heater had a significant effect on the synthesis. Characterization of the CNTs shows that the average density of HA-SWCNTs is around 1 - 2 tubes/ μm with high growth quality as shown by Raman analysis. [Figure not available: see fulltext.

  19. Mass production of CNTs using CVD multi-quartz tubes

    Energy Technology Data Exchange (ETDEWEB)

    Yousef, Samy; Mohamed, Alaa [Dept. of Production Engineering and Printing Technology, Akhbar Elyom Academy, Giza (Egypt)

    2016-11-15

    Carbon nanotubes (CNTs) have become the backbone of modern industries, including lightweight and heavy-duty industrial applications. Chemical vapor deposition (CVD) is considered as the most common method used to synthesize high yield CNTs. This work aims to develop the traditional CVD for the mass production of more economical CNTs, meeting the growing CNT demands among consumers by increasing the number of three particular reactors. All reactors housing is connected by small channels to provide the heat exchange possibility between the chambers, thereby decreasing synthesis time and reducing heat losses inside the ceramic body of the furnace. The novel design is simple and cheap with a lower reacting time and heat loss compared with the traditional CVD design. Methane, hydrogen, argon, and catalyzed iron nanoparticles were used as a carbon source and catalyst during the synthesis process. In addition, CNTs were produced using only a single quartz tube for comparison. The produced samples were examined using XRD, TEM, SEM, FTIR, and TGA. The results showed that the yield of CNTs increases by 287 % compared with those synthesized with a single quartz tube. Moreover, the total synthesis time of CNTs decreases by 37 % because of decreased heat leakage.

  20. On the origin of self-organization of SiO2 nanodots deposited by CVD enhanced by atmospheric pressure remote microplasma

    Science.gov (United States)

    Arnoult, G.; Belmonte, T.; Kosior, F.; Dossot, M.; Henrion, G.

    2011-05-01

    The origin of organization of nanostructured silica coatings deposited on stainless steel substrates by remote microplasma at atmospheric pressure is investigated. We show by resorting to thermal camera measurements coupled with modelling that deposition, limited to a few seconds in time, occurs at low temperature (~below 420 K) although the gas temperature may reach 1400 K. Raman analyses of deposited films with thicknesses below 1 µm show the presence of oxidized silicon bonded to the metallic surface. The origin of nanodots is explained as follows. Close to the microplasma nozzle, the concentration of oxidizing species and/or the temperature being high enough, a silica thin film is obtained, leading to ceramic-metallic oxide interface that leads to a Volmer-Weber growth mode and to the synthesis of 3D structures over long treatment times. Far from the nozzle, the reactivity decreasing, thin films get a plasma-polymer like behaviour which leads to a Franck-Van der Merwe growth mode and films with a higher density. Other nanostructures, made of hexagonal cells, are observed but remain unexplained.

  1. On the origin of self-organization of SiO{sub 2} nanodots deposited by CVD enhanced by atmospheric pressure remote microplasma

    Energy Technology Data Exchange (ETDEWEB)

    Arnoult, G; Belmonte, T; Kosior, F; Henrion, G [Institut Jean Lamour, Department of Physics and Chemistry of Solids and Surfaces, UMR 7198 CNRS, Nancy-Universite, Parc de Saurupt, CS 14234, F-54042 Nancy Cedex (France); Dossot, M, E-mail: thierry.belmonte@mines.inpl-nancy.fr [Laboratoire de Chimie Physique et Microbiologie pour l' Environnement, UMR 7564 CNRS - Universite Henri Poincare, Nancy-Universite, 405, rue de Vandoeuvre, F-54600 Villers-les-Nancy (France)

    2011-05-04

    The origin of organization of nanostructured silica coatings deposited on stainless steel substrates by remote microplasma at atmospheric pressure is investigated. We show by resorting to thermal camera measurements coupled with modelling that deposition, limited to a few seconds in time, occurs at low temperature ({approx}below 420 K) although the gas temperature may reach 1400 K. Raman analyses of deposited films with thicknesses below 1 {mu}m show the presence of oxidized silicon bonded to the metallic surface. The origin of nanodots is explained as follows. Close to the microplasma nozzle, the concentration of oxidizing species and/or the temperature being high enough, a silica thin film is obtained, leading to ceramic-metallic oxide interface that leads to a Volmer-Weber growth mode and to the synthesis of 3D structures over long treatment times. Far from the nozzle, the reactivity decreasing, thin films get a plasma-polymer like behaviour which leads to a Franck-Van der Merwe growth mode and films with a higher density. Other nanostructures, made of hexagonal cells, are observed but remain unexplained.

  2. CVD carbon powders modified by ball milling

    Directory of Open Access Journals (Sweden)

    Kazmierczak Tomasz

    2015-09-01

    Full Text Available Carbon powders produced using a plasma assisted chemical vapor deposition (CVD methods are an interesting subject of research. One of the most interesting methods of synthesizing these powders is using radio frequency plasma. This method, originally used in deposition of carbon films containing different sp2/sp3 ratios, also makes possible to produce carbon structures in the form of powder. Results of research related to the mechanical modification of these powders have been presented. The powders were modified using a planetary ball mill with varying parameters, such as milling speed, time, ball/powder mass ratio and additional liquids. Changes in morphology and particle sizes were measured using scanning electron microscopy and dynamic light scattering. Phase composition was analyzed using Raman spectroscopy. The influence of individual parameters on the modification outcome was estimated using statistical method. The research proved that the size of obtained powders is mostly influenced by the milling speed and the amount of balls. Powders tend to form conglomerates sized up to hundreds of micrometers. Additionally, it is possible to obtain nanopowders with the size around 100 nm. Furthermore, application of additional liquid, i.e. water in the process reduces the graphitization of the powder, which takes place during dry milling.

  3. Growth process conditions of tungsten oxide thin films using hot-wire chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Houweling, Z. Silvester, E-mail: Z.S.Houweling@uu.nl [Nanophotonics - Physics of Devices, Debye Institute for Nanomaterials Science, Utrecht University, Princetonlaan 4, 3584 CB Utrecht (Netherlands); Geus, John W. [Electron Microscopy, Utrecht University, Padualaan 8, 3584 CH Utrecht (Netherlands); Jong, Michiel de; Harks, Peter-Paul R.M.L.; Werf, Karine H.M. van der; Schropp, Ruud E.I. [Nanophotonics - Physics of Devices, Debye Institute for Nanomaterials Science, Utrecht University, Princetonlaan 4, 3584 CB Utrecht (Netherlands)

    2011-12-15

    Highlights: Black-Right-Pointing-Pointer Process parameters to control hot-wire CVD of WO{sub 3-x} are categorized. Black-Right-Pointing-Pointer Growth time, oxygen partial pressure, filament and substrate temperature are varied. Black-Right-Pointing-Pointer Chemical and crystal structure, optical bandgap and morphology are determined. Black-Right-Pointing-Pointer Oxygen partial pressure determines the deposition rate up to as high as 36 {mu}m min{sup -1}. Black-Right-Pointing-Pointer Nanostructures, viz. wires, crystallites and closed crystallite films, are controllably deposited. - Abstract: We report the growth conditions of nanostructured tungsten oxide (WO{sub 3-x}) thin films using hot-wire chemical vapor deposition (HWCVD). Two tungsten filaments were resistively heated to various temperatures and exposed to an air flow at various subatmospheric pressures. The oxygen partial pressure was varied from 6.0 Multiplication-Sign 10{sup -6} to 1.0 mbar and the current through the filaments was varied from 4.0 to 9.0 A, which constitutes a filament temperature of 1390-2340 Degree-Sign C in vacuum. It is observed that the deposition rate of the films is predominantly determined by the oxygen partial pressure; it changes from about 1 to about 36,000 nm min{sup -1} in the investigated range. Regardless of the oxygen partial pressure and filament temperature used, thin films with a nanogranular morphology are obtained, provided that the depositions last for 30 min or shorter. The films consist either of amorphous or partially crystallized WO{sub 3-x} with high averaged transparencies of over 70% and an indirect optical band gap of 3.3 {+-} 0.1 eV. A prolonged deposition time entails an extended exposure of the films to thermal radiation from the filaments, which causes crystallization to monoclinic WO{sub 3} with diffraction maxima due to the (0 0 2), (2 0 0) and (0 2 0) crystallographic planes, furthermore the nanograins sinter and the films exhibit a cone

  4. Towards a general growth model for graphene CVD on transition metal catalysts

    Science.gov (United States)

    Cabrero-Vilatela, Andrea; Weatherup, Robert S.; Braeuninger-Weimer, Philipp; Caneva, Sabina; Hofmann, Stephan

    2016-01-01

    The chemical vapour deposition (CVD) of graphene on three polycrystalline transition metal catalysts, Co, Ni and Cu, is systematically compared and a first-order growth model is proposed which can serve as a reference to optimize graphene growth on any elemental or alloy catalyst system. Simple thermodynamic considerations of carbon solubility are insufficient to capture even basic growth behaviour on these most commonly used catalyst materials, and it is shown that kinetic aspects such as carbon permeation have to be taken into account. Key CVD process parameters are discussed in this context and the results are anticipated to be highly useful for the design of future strategies for integrated graphene manufacture.The chemical vapour deposition (CVD) of graphene on three polycrystalline transition metal catalysts, Co, Ni and Cu, is systematically compared and a first-order growth model is proposed which can serve as a reference to optimize graphene growth on any elemental or alloy catalyst system. Simple thermodynamic considerations of carbon solubility are insufficient to capture even basic growth behaviour on these most commonly used catalyst materials, and it is shown that kinetic aspects such as carbon permeation have to be taken into account. Key CVD process parameters are discussed in this context and the results are anticipated to be highly useful for the design of future strategies for integrated graphene manufacture. Electronic supplementary information (ESI) available: Fig. S1. See DOI: 10.1039/c5nr06873h

  5. Developing the Beijing CVD

    Institute of Scientific and Technical Information of China (English)

    LU JINGXIAN

    2006-01-01

    @@ Slowly but surely, the high-end villa property in Beijing is gaining new momentum. Limited amounts of new properties, rising prices and increasing demand will be the trend in the villa market in 2006, real estate experts predict. Among them, the exclusive Central Villa District(CVD), a top-tier villa area along the Wenyu River in northeast Beijing, has emerged as a hot spot of the market.

  6. Causal knowledge extraction by natural language processing in material science: a case study in chemical vapor deposition

    Directory of Open Access Journals (Sweden)

    Yuya Kajikawa

    2006-11-01

    Full Text Available Scientific publications written in natural language still play a central role as our knowledge source. However, due to the flood of publications, the literature survey process has become a highly time-consuming and tangled process, especially for novices of the discipline. Therefore, tools supporting the literature-survey process may help the individual scientist to explore new useful domains. Natural language processing (NLP is expected as one of the promising techniques to retrieve, abstract, and extract knowledge. In this contribution, NLP is firstly applied to the literature of chemical vapor deposition (CVD, which is a sub-discipline of materials science and is a complex and interdisciplinary field of research involving chemists, physicists, engineers, and materials scientists. Causal knowledge extraction from the literature is demonstrated using NLP.

  7. Substrate Strengthening of CVD Coated Steels

    Institute of Scientific and Technical Information of China (English)

    O.Kessler; M.Heidkamp; F.Hoffmann; P.Mayr

    2004-01-01

    Properties of components and tools can be improved by the combination of coating and heat treatment processes due to the addition of single process advantages and due to the utilization of process interactions. Several low and high alloyed, structural and tool steels (AISI 4140, 52100, H13, A2, D2, etc.) have been treated by CVD-TiN-coating plus laser beam hardening respectively carburizing plus CVD-TiN-coating. Homogeneous, dense TiN-coatings with high hardness,high compressive residual stresses and good adhesion were supported by high strength substrate surfaces. Especially CVD plus laser beam hardening offers the possibility to reduce distortion due to the small heated surface volume.

  8. Preparation of Si-modified aluminide coating by CVD process%硅改性铝化物涂层的CVD制备工艺

    Institute of Scientific and Technical Information of China (English)

    刘磊; 杨甫; 吴勇

    2016-01-01

    研究了CVD法制备硅改性铝化物涂层工艺。结果表明,采用先渗硅后渗铝的两步法工艺可在Inconel 718表面获得铝-硅涂层。铝-硅涂层分为明显的两层结构,内层富硅,外层富铝。硅的加入阻碍高温条件下Al原子的内扩散,并促进了试样表面Al2 O3膜的生成。铝-硅涂层具有比单一的铝化物涂层更为优秀的耐高温氧化性能。%CVD process was studied to form Silicon modified aluminide coatings. The results show that Al-Si coatings can be formed on the surface of Inconel 718 nickel-based super alloy by two steps method. The first step is siliconizing and second step is aluminizing. The Al-Si coatings is two layers structure in which the inner layer is Si-rich and outer layer is Al-rich. The addition of Si decreases the internal diffusion rate of Al atoms under high temperature, and promote the formation of Al2 O3 film on the surface. The high temperature oxidation resistance of Al-Si coatings is better than that of single aluminide coatings.

  9. Metal oxide growth, spin precession measurements and Raman spectroscopy of CVD graphene

    Science.gov (United States)

    Matsubayashi, Akitomo

    quality on each step through the device fabrication process. The direct interface formation between the ferromagnetic transition metal and graphene indicated the strong interaction at the interface which could lead spin scattering. Fabricating metal oxide layers prior to metal deposition on CVD graphene significantly reduces the interfacial interactions induced by the transition metals. This knowledge is beneficial for the fabrication of future graphene based spintronic devices as well as other types of graphene based devices.

  10. Synthesis and deposition of metal nanoparticles by gas condensation process

    Energy Technology Data Exchange (ETDEWEB)

    Maicu, Marina, E-mail: marina.maicu@fep.fraunhofer.de; Glöß, Daniel; Frach, Peter [Fraunhofer Institut für Elektronenstrahl und Plasmatechnik, FEP, Winterbergstraße 28, 01277 Dresden (Germany); Schmittgens, Ralph; Gerlach, Gerald [Institut für Festkörperelektronik, IFE, TU Dresden, Helmholtz Straße 18, 01069 Dresden (Germany); Hecker, Dominic [Fraunhofer Institut für Elektronenstrahl und Plasmatechnik, FEP, Winterbergstraße 28, 01277 Dresden, Germany and Institut für Festkörperelektronik, IFE, TU Dresden, Helmholtz Straße 18, 01069 Dresden (Germany)

    2014-03-15

    In this work, the synthesis of Pt and Ag nanoparticles by means of the inert gas phase condensation of sputtered atomic vapor is presented. The process parameters (power, sputtering time, and gas flow) were varied in order to study the relationship between deposition conditions and properties of the nanoparticles such as their quantity, size, and size distribution. Moreover, the gas phase condensation process can be combined with a plasma enhanced chemical vapor deposition procedure in order to deposit nanocomposite coatings consisting of metallic nanoparticles embedded in a thin film matrix material. Selected examples of application of the generated nanoparticles and nanocomposites are discussed.

  11. Tribological Testing of Some Potential PVD and CVD Coatings for Steel Wire Drawing Dies

    OpenAIRE

    Nilsson, Maria; Olsson, Mikael

    2010-01-01

    Cemented carbide is today the most frequently used drawing die material in steel wire drawing applications. This is mainly due to the possibility to obtain a broad combination of hardness and toughness thus meeting the requirements concerning strength, crack resistance and wear resistance set by the wire drawing process. However, the increasing cost of cemented carbide in combination with the possibility to increase the wear resistance of steel through the deposition of wear resistant CVD and...

  12. A 3D tomographic EBSD analysis of a CVD diamond thin film

    Directory of Open Access Journals (Sweden)

    Tao Liu, Dierk Raabe and Stefan Zaefferer

    2008-01-01

    Full Text Available We have studied the nucleation and growth processes in a chemical vapor deposition (CVD diamond film using a tomographic electron backscattering diffraction method (3D EBSD. The approach is based on the combination of a focused ion beam (FIB unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.

  13. Comparison of Straight and Helical Nanotube Production in a Swirled Fluid CVD Reactor

    OpenAIRE

    Bathgate, Graham; Iyuke, Sunny; Kavishe, Frank

    2012-01-01

    Research into Carbon Nanotubes and their applications is fast becoming an extremely popular topic, and any means to greatly improve the synthesis process has a huge marketability. While investigating the feasibility of continuous production of single-walled carbon nanotubes in a vertical Swirled Fluid Chemical Vapour Deposition (CVD) reactor, it was discovered that helical nanotubes were lifted from the reactor by the gas current while straight tubes remained behind. Investigation into the me...

  14. Corrosion protection of SiC-based ceramics with CVD mullite coatings

    Energy Technology Data Exchange (ETDEWEB)

    Sarin, V.; Mulpuri, R.; Auger, M. [Boston University, Boston, MA (United States) Manufacturing Engineering

    1996-04-20

    SiC based ceramics have been identified as the leading candidate materials for elevated temperature applications in harsh oxidation/corrosion environments. It has been established that a protective coating can be effectively used to avoid problems with excessive oxidation and hot corrosion. However, to date, no coating configuration has been developed that can withstand the rigorous requirements imposed by such applications. Chemical vapor deposited (CVD) mullite coatings due to their desirable properties of toughness, corrosion resistance, and good coefficient of thermal expansion match with SiC are being developed as a potential solution. Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Thermodynamic calculations performed on the AlCl{sub 3}- SiCl{sub 4}-CO{sub 2}-H{sub 2} system were used to construct equilibrium CVD phase diagrams. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed.

  15. Superhydrophobic aluminium-based surfaces: Wetting and wear properties of different CVD-generated coating types

    Science.gov (United States)

    Thieme, M.; Streller, F.; Simon, F.; Frenzel, R.; White, A. J.

    2013-10-01

    In view of generating superhydrophobic aluminium-based surfaces, this work presents further results for the combination of anodic oxidation as the primary pretreatment method and chemical vapour deposition (CVD) variants for chemical modification producing coatings of 250-1000 nm thickness. In detail, CVD involved the utilisation of i - hexafluoropropylene oxide as precursor within the hot filament CVD process for the deposition of poly(tetrafluoroethylene) coatings at alternative conditions (PTFE-AC) and ii - 1,3,5-trivinyltrimethylcyclotrisiloxane for the deposition of polysiloxane coatings (PSi) by initiated CVD. The substrate material was Al Mg1 subjected to usual or intensified sulphuric acid anodisation pretreatments (SAAu, SAAi, respectively) affording various degrees of surface micro-roughness (SAAu weathering and/or mild wear testing. Superhydrophobicity (SH) was observed with the system SAAi + PTFE-AC similarly to former findings with the standard hot filament CVD PTFE coating variant (SAAi + PTFE-SC). The results indicated that the specific coating morphology made an important contribution to the water-repellency, because even some of the SAAu-based samples tended to reveal SH. Subjecting samples to weathering treatment resulted in a general worsening of the wetting behaviour, primarily limited to the receding contact angles. These tendencies were correlated with the chemical composition of the sample surfaces as analysed by X-ray photoelectron spectroscopy. The wear tests showed, as evaluated by scanning electron microscopy and contact angle measurement, that the PTFE coatings were relatively sensitive to friction. This was connected with a dramatic deterioration of the water-repelling properties. PSi-coated surfaces generally showed rather poor water-repellency, but this coating type was surprisingly resistant towards the applied friction test. From these findings it may be concluded that the combination of hydrophobic fluorine containing structure

  16. Energy Deposition Processes in Titan's Upper Atmosphere

    Science.gov (United States)

    Sittler, Edward C., Jr.; Bertucci, Cesar; Coates, Andrew; Cravens, Tom; Dandouras, Iannis; Shemansky, Don

    2008-01-01

    Most of Titan's atmospheric organic and nitrogen chemistry, aerosol formation, and atmospheric loss are driven from external energy sources such as Solar UV, Saturn's magnetosphere, solar wind and galactic cosmic rays. The Solar UV tends to dominate the energy input at lower altitudes of approximately 1100 km but which can extend down to approximately 400 km, while the plasma interaction from Saturn's magnetosphere, Saturn's magnetosheath or solar wind are more important at higher altitudes of approximately 1400 km, but the heavy ion plasma [O(+)] of approximately 2 keV and energetic ions [H(+)] of approximately 30 keV or higher from Saturn's magnetosphere can penetrate below 950km. Cosmic rays with energies of greater than 1 GeV can penetrate much deeper into Titan's atmosphere with most of its energy deposited at approximately 100 km altitude. The haze layer tends to dominate between 100 km and 300 km. The induced magnetic field from Titan's interaction with the external plasma can be very complex and will tend to channel the flow of energy into Titan's upper atmosphere. Cassini observations combined with advanced hybrid simulations of the plasma interaction with Titan's upper atmosphere show significant changes in the character of the interaction with Saturn local time at Titan's orbit where the magnetosphere displays large and systematic changes with local time. The external solar wind can also drive sub-storms within the magnetosphere which can then modify the magnetospheric interaction with Titan. Another important parameter is solar zenith angle (SZA) with respect to the co-rotation direction of the magnetospheric flow. Titan's interaction can contribute to atmospheric loss via pickup ion loss, scavenging of Titan's ionospheric plasma, loss of ionospheric plasma down its induced magnetotail via an ionospheric wind, and non-thermal loss of the atmosphere via heating and sputtering induced by the bombardment of magnetospheric keV ions and electrons. This

  17. Energy Deposition Processes in Titan's Upper Atmosphere

    Science.gov (United States)

    Sittler, Edward C., Jr.; Bertucci, Cesar; Coates, Andrew; Cravens, Tom; Dandouras, Iannis; Shemansky, Don

    2008-01-01

    Most of Titan's atmospheric organic and nitrogen chemistry, aerosol formation, and atmospheric loss are driven from external energy sources such as Solar UV, Saturn's magnetosphere, solar wind and galactic cosmic rays. The Solar UV tends to dominate the energy input at lower altitudes of approximately 1100 km but which can extend down to approximately 400 km, while the plasma interaction from Saturn's magnetosphere, Saturn's magnetosheath or solar wind are more important at higher altitudes of approximately 1400 km, but the heavy ion plasma [O(+)] of approximately 2 keV and energetic ions [H(+)] of approximately 30 keV or higher from Saturn's magnetosphere can penetrate below 950km. Cosmic rays with energies of greater than 1 GeV can penetrate much deeper into Titan's atmosphere with most of its energy deposited at approximately 100 km altitude. The haze layer tends to dominate between 100 km and 300 km. The induced magnetic field from Titan's interaction with the external plasma can be very complex and will tend to channel the flow of energy into Titan's upper atmosphere. Cassini observations combined with advanced hybrid simulations of the plasma interaction with Titan's upper atmosphere show significant changes in the character of the interaction with Saturn local time at Titan's orbit where the magnetosphere displays large and systematic changes with local time. The external solar wind can also drive sub-storms within the magnetosphere which can then modify the magnetospheric interaction with Titan. Another important parameter is solar zenith angle (SZA) with respect to the co-rotation direction of the magnetospheric flow. Titan's interaction can contribute to atmospheric loss via pickup ion loss, scavenging of Titan's ionospheric plasma, loss of ionospheric plasma down its induced magnetotail via an ionospheric wind, and non-thermal loss of the atmosphere via heating and sputtering induced by the bombardment of magnetospheric keV ions and electrons. This

  18. CVD Lu(2)O(3):Eu coatings For Advanced Scintillators.

    Science.gov (United States)

    Topping, Stephen G; Sarin, V K

    2009-03-01

    Currently Lu(2)O(3):Eu(3+) scintillators can only be fabricated via hot-pressing and pixelization, which is commercially not viable, thus restricting their use. Chemical vapor deposition is being developed as an alternative manufacturing process. Columnar coatings of Lu(2)O(3):Eu(3+) have been achieved using the halide-CO(2)-H(2) system, clearly signifying feasibility of the CVD process. Characterization of the coatings using high resolution scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis have been used as an aid to optimize process parameters and attain highly oriented and engineered coating structures. These results have clearly demonstrated that this process can be successfully used to tailor sub-micron columnar growth of Lu(2)O(3):Eu(3+), with the potential of ultra high resolution x-ray imaging.

  19. Superhydrophobic Copper Surfaces with Anticorrosion Properties Fabricated by Solventless CVD Methods.

    Science.gov (United States)

    Vilaró, Ignasi; Yagüe, Jose L; Borrós, Salvador

    2017-01-11

    Due to continuous miniaturization and increasing number of electrical components in electronics, copper interconnections have become critical for the design of 3D integrated circuits. However, corrosion attack on the copper metal can affect the electronic performance of the material. Superhydrophobic coatings are a commonly used strategy to prevent this undesired effect. In this work, a solventless two-steps process was developed to fabricate superhydrophobic copper surfaces using chemical vapor deposition (CVD) methods. The superhydrophobic state was achieved through the design of a hierarchical structure, combining micro-/nanoscale domains. In the first step, O2- and Ar-plasma etchings were performed on the copper substrate to generate microroughness. Afterward, a conformal copolymer, 1H,1H,2H,2H-perfluorodecyl acrylate-ethylene glycol diacrylate [p(PFDA-co-EGDA)], was deposited on top of the metal via initiated CVD (iCVD) to lower the surface energy of the surface. The copolymer topography exhibited a very characteristic and unique nanoworm-like structure. The combination of the nanofeatures of the polymer with the microroughness of the copper led to achievement of the superhydrophobic state. AFM, SEM, and XPS were used to characterize the evolution in topography and chemical composition during the CVD processes. The modified copper showed water contact angles as high as 163° and hysteresis as low as 1°. The coating withstood exposure to aggressive media for extended periods of time. Tafel analysis was used to compare the corrosion rates between bare and modified copper. Results indicated that iCVD-coated copper corrodes 3 orders of magnitude slower than untreated copper. The surface modification process yielded repeatable and robust superhydrophobic coatings with remarkable anticorrosion properties.

  20. Nanostructured TaxC interlayer synthesized via double glow plasma surface alloying process for diamond deposition on cemented carbide

    Science.gov (United States)

    Rong, Wolong; Hei, Hongjun; Zhong, Qiang; Shen, Yanyan; Liu, Xiaoping; Wang, Xin; Zhou, Bing; He, Zhiyong; Yu, Shengwang

    2015-12-01

    The aim in this work was to improve the adhesion of diamond coating with pre-deposition of a TaxC interlayer on cemented carbide (WC-Co) substrate by double glow plasma surface alloying technique. The following deposition of diamond coating on the interlayer was performed in a microwave plasma chemical vapor deposition (MPCVD) reactor. TaxC interlayer with an inner diffusion layer and an outer deposition layer was composed of Ta2C and TaC nanocrystalline, and it exhibited a special compact surface morphology formed of flower-shaped pits. As the gradual element distributions existed in the diffusion layer, the interlayer displayed a superior adherence to the substrate with significantly enhanced surface microhardness to the original substrate. After CVD process, the preferred orientation of TaC changed from (2 2 2) to (2 0 0) plane, and a uniform and tense diamond coating with adhesion referred to class HF 2 at least (Verein Deutscher Ingenieure 3198 norm) was obtained on the interlayered substrate. It indicated that the diffusion of Co was effectively inhibited by the formation of TaxC diffusion-deposition interlayer. The TaxC interlayer is most likely to improve the performance of diamond coatings used in cutting tools.

  1. ZnS thin film deposited with chemical bath deposition process directed by different stirring speeds

    Science.gov (United States)

    Zhang, Y.; Dang, X. Y.; Jin, J.; Yu, T.; Li, B. Z.; He, Q.; Li, F. Y.; Sun, Y.

    2010-09-01

    In this combined film thickness, scanning electron microscopy (SEM), X-ray diffraction and optical properties study, we explore the effects of different stirring speeds on the growth and optical properties of ZnS film deposited by CBD method. From the disclosed changes of thickness of ZnS film, we conclude that film thickness is independent of the stirring speeds in the heterogeneous process (deposition time less than 40 min), but increases with the stirring speeds and/or deposition time increasing in the homogeneous process. Grazing incident X-ray diffraction (GIXRD) and the study of optical properties disclosed that the ZnS films grown with different stirring speeds show partially crystallized film and exhibit good transmittance (70-88% in the visible region), but the stirring speeds cannot give much effects on the structure and optical properties in the homogeneous process.

  2. Chemical Vapour Deposition of Large Area Graphene

    DEFF Research Database (Denmark)

    Larsen, Martin Benjamin Barbour Spanget

    be eliminated. Further opportunities arise when exchanging the copper foil for copper thin film on a wafer e.g. better integration with current cleanroom processing of devices and better control over the copper crystallinity. Typical strategies for controlling the temperature during CVD fabrication of graphene...... of thermocouples leads to large variations in the grown graphene. This was solved by controlling the temperature through applying a set power to the heat source, resulting in a more stable temperature from process to process. Micro Raman spectroscopy is used to characterize the structural quality of the grown......Chemical Vapor Deposition (CVD) is a viable technique for fabrication of large areas of graphene. CVD fabrication is the most prominent and common way of fabricating graphene in industry. In this thesis I have attempted to optimize a growth recipe and catalyst layer for CVD fabrication of uniform...

  3. Micromorphology of modern tills in southwestern Spitsbergen – insights into depositional and post-depositional processes

    Directory of Open Access Journals (Sweden)

    Skolasińska Katarzyna

    2016-12-01

    Full Text Available Textural properties and microstructures are commonly used properties in the analysis of Pleistocene and older glacial deposits. However, contemporary glacial deposits are seldom studied, particularly in the context of post-depositional changes. This paper presents the results of a micromorphological study of recently deposited tills in the marginal zones of Hansbreen and Torellbreen, glaciers in southwestern Spitsbergen. The main objectives of this study were to compare modern tills deposited in subglacial and supraglacial conditions, as well as tills that were freshly released from ice with those laid down several decades ago. The investigated tills are primarily composed of large clasts of metamorphic rocks and represent coarse-grained, matrix-supported diamictons. The tills reveal several characteristic features for ductile (e.g. turbate structures and brittle (e.g. lineations, microshears deformations, which have been considered to be indicative of subglacial conditions. In supraglacial tills, the same structures are common as in the subglacial deposits, which points to the preservation of the primary features, though the sediment was transferred up to the glacier surface due to basal ice layer deformation and redeposited as slumps, or to formation of similar structures due to short-distance sediment re-deposition by mass flows. This study revealed that it might not be possible to distinguish subglacial and supraglacial tills on the basis of micromorphology if the latter are derived from a subglacial position. The only noted difference was the presence of iron oxide cementation zones and carbonate dissolution features in supraglacial tills. These features were found in tills that were deposited at least a few years ago and are interpreted to be induced by early post-depositional processes involving porewater/sediment interactions.

  4. Fabrication of a multifunctional carbon nanotube "cotton" yarn by the direct chemical vapor deposition spinning process.

    Science.gov (United States)

    Zhong, Xiao-Hua; Li, Ya-Li; Feng, Jian-Min; Kang, Yan-Ru; Han, Shuai-Shuai

    2012-09-21

    A continuous cotton-like carbon nanotube fiber yarn, consisting of multiple threads of high purity double walled carbon nanotubes, was fabricated in a horizontal CVD gas flow reactor with water vapor densification by the direct chemical vapor deposition spinning process. The water vapor interaction leads to homogeneous shrinking of the CNT sock-like assembly in the gas flow. This allows well controlled continuous winding of the dense thread inside the reactor. The CNT yarn is quite thick (1-3 mm), has a highly porous structure (99%) while being mechanically strong and electrically conductive. The water vapor interaction leads to homogeneous oxidation of the CNTs, offering the yarn oxygen-functionalized surfaces. The unique structure and surface of the CNT yarn provide it multiple processing advantages and properties. It can be mechanically engineered into a dense yarn, infiltrated with polymers to form a composite and mixed with other yarns to form a blend, as demonstrated in this research. Therefore, this CNT yarn can be used as a "basic yarn" for various CNT based structural and functional applications.

  5. Thermal Modeling of Direct Digital Melt-Deposition Processes

    Science.gov (United States)

    Cooper, K. P.; Lambrakos, S. G.

    2011-02-01

    Additive manufacturing involves creating three-dimensional (3D) objects by depositing materials layer-by-layer. The freeform nature of the method permits the production of components with complex geometry. Deposition processes provide one more capability, which is the addition of multiple materials in a discrete manner to create "heterogeneous" objects with locally controlled composition and microstructure. The result is direct digital manufacturing (DDM) by which dissimilar materials are added voxel-by-voxel (a voxel is volumetric pixel) following a predetermined tool-path. A typical example is functionally gradient material such as a gear with a tough core and a wear-resistant surface. The inherent complexity of DDM processes is such that process modeling based on direct physics-based theory is difficult, especially due to a lack of temperature-dependent thermophysical properties and particularly when dealing with melt-deposition processes. In order to overcome this difficulty, an inverse problem approach is proposed for the development of thermal models that can represent multi-material, direct digital melt deposition. This approach is based on the construction of a numerical-algorithmic framework for modeling anisotropic diffusivity such as that which would occur during energy deposition within a heterogeneous workpiece. This framework consists of path-weighted integral formulations of heat diffusion according to spatial variations in material composition and requires consideration of parameter sensitivity issues.

  6. Analysis of Residual Thermal Stress in CVD-W Coating as Plasma Facing Material

    Institute of Scientific and Technical Information of China (English)

    朱大焕; 王坤; 王先平; 陈俊凌; 方前锋

    2012-01-01

    Chemical vapor deposition-tungsten (CVD-W) coating covering the surface of the plasma facing component (PFC) is an effective method to implement the tungsten material as plasma facing material (PFM) in fusion devices. Residual thermal stress in CVD-W coating due to thermal mismatch between coating and substrate was successfully simulated by using a finite element method (ANSYS 10.0 code). The deposition parametric effects, i.e., coating thickness and deposition temperature, and interlayer were investigated to get a description of the residual thermal stress in the CVD-W coating-substrate system. And the influence of the substrate materials on the generation of residual thermal stress in the CVD-W coating was analyzed with respect to the CVD-W coating application as PFM. This analysis is beneficial for the preparation and application of CVD-W coating.

  7. Analysis of Residual Thermal Stress in CVD-W Coating as Plasma Facing Material

    Science.gov (United States)

    Zhu, Dahuan; Wang, Kun; Wang, Xianping; Chen, Junling; Fang, Qianfeng

    2012-07-01

    Chemical vapor deposition-tungsten (CVD-W) coating covering the surface of the plasma facing component (PFC) is an effective method to implement the tungsten material as plasma facing material (PFM) in fusion devices. Residual thermal stress in CVD-W coating due to thermal mismatch between coating and substrate was successfully simulated by using a finite element method (ANSYS 10.0 code). The deposition parametric effects, i.e., coating thickness and deposition temperature, and interlayer were investigated to get a description of the residual thermal stress in the CVD-W coating-substrate system. And the influence of the substrate materials on the generation of residual thermal stress in the CVD-W coating was analyzed with respect to the CVD-W coating application as PFM. This analysis is beneficial for the preparation and application of CVD-W coating.

  8. CVD elaboration of nanostructured TiO2-Ag thin films with efficient antibacterial properties

    OpenAIRE

    Mungkalasiri, Jitti; Bedel, Laurent; Emieux, Fabrice; Dore, Jeanne; Renaud, François N. R.; Sarantopoulos, Christos; Maury, Francis

    2010-01-01

    Nanostructured TiO2-Ag composite coatings are deposited by direct liquid injection metal-organic (DLI-MO) CVD at 683K in a one-step process. Silver pivalate (AgPiv) and titanium tetra-iso-propoxide (TTIP) are used as Ag and Ti molecular precursors, respectively. Metallic silver nanoparticles are co-deposited with anatase TiO2 on stainless steel, glass, and silicon wafers. The silver particles are uniformly embedded in the oxide matrix through the entire film thickness. The influence of the gr...

  9. Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material

    Institute of Scientific and Technical Information of China (English)

    Ren Wan-Chun; Liu Bo; Song Zhi-Tang; Xiang Yang-Hui; Wang Zong-Tao; Zhang Bei-Chao; Feng Song-Lin

    2012-01-01

    Ge2Sb2Te5 gap filling is one of the key processes for phase-change random access memory manufacture.Physical vapor deposition is the mainstream method of Ge2Sb2Te5 film deposition due to its advantages of film quality,purity,and accurate composition control.However,the conventional physical vapor deposition process cannot meet the gapfilling requirement with the critical device dimension scaling down to 90 nm or below.In this study,we find that the deposit-etch-deposit process shows better gap-filling capability and scalability than the single-step deposition process,especially at the nano-scale critical dimension.The gap-filling mechanism of the deposit-etch-deposit process was briefly discussed.We also find that re-deposition of phase-change material from via the sidewall to via the bottom by argon ion bombardment during the etch step was a key ingredient for the final good gap filling.We achieve void-free gap filling of phase-change material on the 45-nm via the two-cycle deposit-etch-deposit process.We gain a rather comprehensive insight into the mechanism of deposit-etch-deposit process and propose a potential gap-filling solution for over 45-nm technology nodes for phase-change random access memory.

  10. Epitaxial nucleation of CVD bilayer graphene on copper.

    Science.gov (United States)

    Song, Yenan; Zhuang, Jianing; Song, Meng; Yin, Shaoqian; Cheng, Yu; Zhang, Xuewei; Wang, Miao; Xiang, Rong; Xia, Yang; Maruyama, Shigeo; Zhao, Pei; Ding, Feng; Wang, Hongtao

    2016-12-08

    Bilayer graphene (BLG) has emerged as a promising candidate for next-generation electronic applications, especially when it exists in the Bernal-stacked form, but its large-scale production remains a challenge. Here we present an experimental and first-principles calculation study of the epitaxial chemical vapor deposition (CVD) nucleation process for Bernal-stacked BLG growth on Cu using ethanol as a precursor. Results show that a carefully adjusted flow rate of ethanol can yield a uniform BLG film with a surface coverage of nearly 90% and a Bernal-stacking ratio of nearly 100% on ordinary flat Cu substrates, and its epitaxial nucleation of the second layer is mainly due to the active CH3 radicals with the presence of a monolayer-graphene-covered Cu surface. We believe that this nucleation mechanism will help clarify the formation of BLG by the epitaxial CVD process, and lead to many new strategies for scalable synthesis of graphene with more controllable structures and numbers of layers.

  11. Advanced methods for processing ceramics

    Energy Technology Data Exchange (ETDEWEB)

    Carter, W.B. [Georgia Institute of Technology, Atlanta, GA (United States)

    1995-05-01

    Combustion chemical vapor deposition (CCVD) is a flame assisted, open air chemical vapor deposition (CVD) process. The process is capable of producing textured, epitaxial coatings on single crystal substrates using low cost reagents. Combustion chemical vapor deposition is a relatively inexpensive, alternative thin film deposition process with potential to replace conventional coating technologies for certain applications. The goals of this project are to develop the CCVD process to the point that potential industrial applications can be identified and reliably assessed.

  12. Powder Flux Regulation in the Laser Material Deposition Process

    Science.gov (United States)

    Arrizubieta, Jon Iñaki; Wegener, Maximiliam; Arntz, Kristian; Lamikiz, Aitzol; Ruiz, Jose Exequiel

    In the present research work a powder flux regulation system has been designed, developed and validated with the aim of improving the Laser Material Deposition (LMD) process. In this process, the amount of deposited material per substrate surface unit area depends on the real feed rate of the nozzle. Therefore, a regulation system based on a solenoid valve has been installed at the nozzle entrance in order to control the powder flux. The powder flux control has been performed based on the machine real feed rate, which is compared with the programmed feed rate. An instantaneous velocity error is calculated and the powder flow is controlled as a function of this variation using Pulse Width Modulation (PWM) signals. Thereby, in zones where the Laser Material Deposition machine reduces the feed rate due to a trajectory change, powder accumulation can be avoided and the generated clads would present a homogeneous shape.

  13. Development of a polysilicon process based on chemical vapor deposition (Phase 1). First quarterly progress report, 6 October-31 December 1979

    Energy Technology Data Exchange (ETDEWEB)

    McCormick, J. R.; Arvidson, A.; Plahutnik, F.; Sawyer, D.; Sharp, K.

    1980-01-01

    The goal of this program is to demonstrate that a dichlorosilane based reductive chemical vapor deposition (CVD) process is capable of producing, at low cost, high quality polycrystalline silicon. Physical form and purity of this material will be consistent with LSA material requirements for use in the manufacture of high efficiency solar cells. Chemical processes involved in achieving the objective are reviewed with emphasis placed on advantages of this process when compared with existing polycrystalline silicon production technology. Installation of a CVD reactor with associated analytical instrumentation is described. Preliminary reactor data has been favorable demonstrating the anticipated increased deposition rate and conversion efficiency when dichlorosilane decomposition is compared with trichlorosilane decomposition. No serious problems have been encountered which might limit dichlorosilane use as a reactor feed material. Design considerations for a process development unit (PDU) for dichlorosilane synthesis are reviewed. A design which effectively suppresses monochlorosilane during the redistribution of trichlorosilane was decided upon and its implementation is described. The PDU will be used to collect data on optimization of the redistribution process as well as to determine product quality. Based on experimental data collected during the first quarter along with already available data on the redistribution and hydrogenation processes, a preliminary mass balance is established.

  14. An assessment of radiotherapy dosimeters based on CVD grown diamond

    CERN Document Server

    Ramkumar, S; Conway, J; Whitehead, A J; Sussman, R S; Hill, G; Walker, S

    2001-01-01

    Diamond is potentially a very suitable material for use as a dosimeter for radiotherapy. Its radiation hardness, the near tissue equivalence and chemical inertness are some of the characteristics of diamond, which make it well suited for its application as a dosimeter. Recent advances in the synthesis of diamond by chemical vapour deposition (CVD) technology have resulted in the improvement in the quality of material and increased its suitability for radiotherapy applications. We report in this paper, the response of prototype dosimeters based on two different types (CVD1 and CVD2) of CVD diamond to X-rays. The diamond devices were assessed for sensitivity, dependence of response on dose and dose rate, and compared with a Scanditronix silicon photon diode and a PTW natural diamond dosimeter. The diamond devices of CVD1 type showed an initial increase in response with dose, which saturates after approx 6 Gy. The diamond devices of CVD2 type had a response at low fields (1162.8 V/cm), the CVD2-type devices show...

  15. Application of laser assisted cold spraying process for metal deposition

    CSIR Research Space (South Africa)

    Tlotleng, Monnamme

    2014-02-01

    Full Text Available Laser assisted cold spraying (LACS) process is a hybrid technique that uses laser and cold spray to deposit solid powders on metal substrates. For bonding to occur, the particle velocities must be supersonic which are achieved by entraining...

  16. The conductivity of high-fluence noble gas ion irradiated CVD polycrystalline diamond

    Science.gov (United States)

    Borisov, A. M.; Kazakov, V. A.; Mashkova, E. S.; Ovchinnikov, M. A.; Shemukhin, A. A.; Sigalaev, S. K.

    2017-09-01

    The conductivity of surface layer of polycrystalline CVD (Chemical Vapor Deposition) diamond has been studied experimentally after high-fluence 30 keV Ne+, 20 and 30 keV Ar+ ion irradiation at target temperature range from 30 to 400 °C. The hot ion irradiation of CVD diamond may be described as ion-stimulated heat graphitization in which an exponential resistance decrease with increasing of the irradiation temperature is much faster than at the heat treatment. Under ion irradiation of CVD diamond the graphite-like materials resistivity is achieved at temperatures not exceeding 200 °C. The graphite phase in a heterogeneous structure of diamond irradiated layer is in dynamic equilibrium. In the temperature range from RT to 400 °C, the proportion of graphite phase increases so that at temperatures 200 < Tir < 400 °C it is dominant. The Raman spectra of ion-induced conductive layer created on CVD diamond reflect the processes of nanostructural ordering - disordering of sp2-bonded carbon.

  17. Aligned carbon nanotubes catalytically grown on iron-based nanoparticles obtained by laser-induced CVD

    Energy Technology Data Exchange (ETDEWEB)

    Le Normand, F. [Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, Bat 70, 23 rue du Loess, 67034 Strasbourg Cedex (France)], E-mail: Francois.Le-Normand@ipcms.u-strasbg.fr; Cojocaru, C.S.; Ersen, O. [Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, Bat 70, 23 rue du Loess, 67034 Strasbourg Cedex (France); Legagneux, P.; Gangloff, L. [THALES R and T, Departementale 128, 91747 Palaiseau Cedex (France); Fleaca, C. [Groupe Surfaces and Interfaces, IPCMS, UMR 7504 CNRS, Bat 70, 23 rue du Loess, 67034 Strasbourg Cedex (France); National Institute for Lasers, Plasma and Radiation Physics, Laser Department, P.O. Box MG-36, R-76900 Bucharest (Romania); Alexandrescu, R.; Dumitrache, F.; Morjan, I. [National Institute for Lasers, Plasma and Radiation Physics, Laser Department, P.O. Box MG-36, R-76900 Bucharest (Romania)

    2007-12-15

    Iron-based nanoparticles are prepared by a laser-induced chemical vapor deposition (CVD) process. They are characterized as body-centered Fe and Fe{sub 2}O{sub 3} (maghemite/magnetite) particles with sizes {<=}5 and 10 nm, respectively. The Fe particles are embedded in a protective carbon matrix. Both kind of particles are dispersed by spin-coating on SiO{sub 2}/Si(1 0 0) flat substrates. They are used as catalyst to grow carbon nanotubes by a plasma- and filaments-assisted catalytic CVD process (PE-HF-CCVD). Vertically oriented and thin carbon nanotubes (CNTs) were grown with few differences between the two samples, except the diameter in relation to the initial size of the iron particles, and the density. The electron field emission of these samples exhibit quite interesting behavior with a low turn-on voltage at around 1 V/{mu}m.

  18. Aligned carbon nanotubes catalytically grown on iron-based nanoparticles obtained by laser-induced CVD

    Science.gov (United States)

    Le Normand, F.; Cojocaru, C. S.; Ersen, O.; Legagneux, P.; Gangloff, L.; Fleaca, C.; Alexandrescu, R.; Dumitrache, F.; Morjan, I.

    2007-12-01

    Iron-based nanoparticles are prepared by a laser-induced chemical vapor deposition (CVD) process. They are characterized as body-centered Fe and Fe 2O 3 (maghemite/magnetite) particles with sizes ≤5 and 10 nm, respectively. The Fe particles are embedded in a protective carbon matrix. Both kind of particles are dispersed by spin-coating on SiO 2/Si(1 0 0) flat substrates. They are used as catalyst to grow carbon nanotubes by a plasma- and filaments-assisted catalytic CVD process (PE-HF-CCVD). Vertically oriented and thin carbon nanotubes (CNTs) were grown with few differences between the two samples, except the diameter in relation to the initial size of the iron particles, and the density. The electron field emission of these samples exhibit quite interesting behavior with a low turn-on voltage at around 1 V/μm.

  19. Morphology Simulation for Ion-Assisted Deposition Process

    Institute of Scientific and Technical Information of China (English)

    Jenn-SenLin; Shin-PonJu; Jian-MingLu

    2004-01-01

    The molecular dynamics simulation is applied to investigate the lnfluence of the incident 1on energy ana mclident angular distribution upon ion-assisted deposition process. The Cu-Cu and Ar-Cu interactions are modeled using the many body tight-binding potential and the Moliere potential, respectively, and the interface width is used to characterize the surface roughness properties at both transient and final state conditions. The results show that the surface roughness of the deposition film is lower when more Ar-to-Cu ratio is used at the same incident energy and angle. For the relative low or high incident energy, the film morphologies are not sensitive to the incident angle. However, if the incident energy of the argon ions is too high, the film morphology will be worse than that without using the ion-assisted deposition.

  20. Oxide Dispersion Strengthened Iron Aluminide by CVD Coated Powders

    Energy Technology Data Exchange (ETDEWEB)

    Asit Biswas Andrew J. Sherman

    2006-09-25

    This I &I Category2 program developed chemical vapor deposition (CVD) of iron, aluminum and aluminum oxide coated iron powders and the availability of high temperature oxidation, corrosion and erosion resistant coating for future power generation equipment and can be used for retrofitting existing fossil-fired power plant equipment. This coating will provide enhanced life and performance of Coal-Fired Boilers components such as fire side corrosion on the outer diameter (OD) of the water wall and superheater tubing as well as on the inner diameter (ID) and OD of larger diameter headers. The program also developed a manufacturing route for readily available thermal spray powders for iron aluminide coating and fabrication of net shape component by powder metallurgy route using this CVD coated powders. This coating can also be applid on jet engine compressor blade and housing, industrial heat treating furnace fixtures, magnetic electronic parts, heating element, piping and tubing for fossil energy application and automotive application, chemical processing equipment , heat exchanger, and structural member of aircraft. The program also resulted in developing a new fabrication route of thermal spray coating and oxide dispersion strengthened (ODS) iron aluminide composites enabling more precise control over material microstructures.

  1. CVD Rhenium Engines for Solar-Thermal Propulsion Systems

    Science.gov (United States)

    Williams, Brian E.; Fortini, Arthur J.; Tuffias, Robert H.; Duffy, Andrew J.; Tucker, Stephen P.

    1999-01-01

    Solar-thermal upper-stage propulsion systems have the potential to provide specific impulse approaching 900 seconds, with 760 seconds already demonstrated in ground testing. Such performance levels offer a 100% increase in payload capability compared to state-of-the-art chemical upper-stage systems, at lower cost. Although alternatives such as electric propulsion offer even greater performance, the 6- to 18- month orbital transfer time is a far greater deviation from the state of the art than the one to two months required for solar propulsion. Rhenium metal is the only material that is capable of withstanding the predicted thermal, mechanical, and chemical environment of a solar-thermal propulsion device. Chemical vapor deposition (CVD) is the most well-established and cost-effective process for the fabrication of complex rhenium structures. CVD rhenium engines have been successfully constructed for the Air Force ISUS program (bimodal thrust/electricity) and the NASA Shooting Star program (thrust only), as well as under an Air Force SBIR project (thrust only). The bimodal engine represents a more long-term and versatile approach to solar-thermal propulsion, while the thrust-only engines provide a potentially lower weight/lower cost and more near-term replacement for current upper-stage propulsion systems.

  2. CVD-graphene growth on different polycrystalline transition metals

    Directory of Open Access Journals (Sweden)

    M. P. Lavin-Lopez

    2017-01-01

    Full Text Available The chemical vapor deposition (CVD graphene growth on two polycrystalline transition metals (Ni and Cu was investigated in detail using Raman spectroscopy and optical microscopy as a way to synthesize graphene of the highest quality (i.e. uniform growth of monolayer graphene, which is considered a key issue for electronic devices. Key CVD process parameters (reaction temperature, CH4/H2flow rate ratio, total flow of gases (CH4+H2, reaction time were optimized for both metals in order to obtain the highest graphene uniformity and quality. The conclusions previously reported in literature about the performance of low and high carbon solubility metals in the synthesis of graphene and their associated reaction mechanisms, i.e. surface depositionand precipitation on cooling, respectively, was not corroborated by the results obtained in this work. Under the optimal reaction conditions, a large percentage of monolayer graphene was obtained over the Ni foil since the carbon saturation was not complete, allowing carbon atoms to be stored in the bulk metal, which could diffuse forming high quality monolayer graphene at the surface. However, under the optimal reaction conditions, the formation of a non-uniform mixture of few layers and multilayer graphene on the Cu foil was related to the presence of an excess of active carbon atoms on the Cu surface.

  3. Chemical vapor deposition of silicon carbide for large area mirrors

    Science.gov (United States)

    Gentilman, R. L.; Maguire, E. A.

    1982-05-01

    CVD-SiC has been identified as the leading mirror material for high energy synchrotron radiation because of its high K/alpha ratio and its ability to be super-polished to less than or equal to 10 A rms roughness. Technology already exists for depositing SiC over large areas (approximately 70 cm x 20 cm). The CVD process, substrate selection, and mirror design considerations are discussed.

  4. Fabricating Large-Area Sheets of Single-Layer Graphene by CVD

    Science.gov (United States)

    Bronikowski, Michael; Manohara, Harish

    2008-01-01

    This innovation consists of a set of methodologies for preparing large area (greater than 1 cm(exp 2)) domains of single-atomic-layer graphite, also called graphene, in single (two-dimensional) crystal form. To fabricate a single graphene layer using chemical vapor deposition (CVD), the process begins with an atomically flat surface of an appropriate substrate and an appropriate precursor molecule containing carbon atoms attached to substituent atoms or groups. These molecules will be brought into contact with the substrate surface by being flowed over, or sprayed onto, the substrate, under CVD conditions of low pressure and elevated temperature. Upon contact with the surface, the precursor molecules will decompose. The substituent groups detach from the carbon atoms and form gas-phase species, leaving the unfunctionalized carbon atoms attached to the substrate surface. These carbon atoms will diffuse upon this surface and encounter and bond to other carbon atoms. If conditions are chosen carefully, the surface carbon atoms will arrange to form the lowest energy single-layer structure available, which is the graphene lattice that is sought. Another method for creating the graphene lattice includes metal-catalyzed CVD, in which the decomposition of the precursor molecules is initiated by the catalytic action of a catalytic metal upon the substrate surface. Another type of metal-catalyzed CVD has the entire substrate composed of catalytic metal, or other material, either as a bulk crystal or as a think layer of catalyst deposited upon another surface. In this case, the precursor molecules decompose directly upon contact with the substrate, releasing their atoms and forming the graphene sheet. Atomic layer deposition (ALD) can also be used. In this method, a substrate surface at low temperature is covered with exactly one monolayer of precursor molecules (which may be of more than one type). This is heated up so that the precursor molecules decompose and form one

  5. A Modified Surface on Titanium Deposited by a Blasting Process

    Directory of Open Access Journals (Sweden)

    Caroline O’Sullivan

    2011-09-01

    Full Text Available Hydroxyapatite (HA coating of hard tissue implants is widely employed for its biocompatible and osteoconductive properties as well as its improved mechanical properties. Plasma technology is the principal deposition process for coating HA on bioactive metals for this application. However, thermal decomposition of HA can occur during the plasma deposition process, resulting in coating variability in terms of purity, uniformity and crystallinity, which can lead to implant failure caused by aseptic loosening. In this study, CoBlastTM, a novel blasting process has been used to successfully modify a titanium (V substrate with a HA treatment using a dopant/abrasive regime. The impact of a series of apatitic abrasives under the trade name MCD, was investigated to determine the effect of abrasive particle size on the surface properties of both microblast (abrasive only and CoBlast (HA/abrasive treatments. The resultant HA treated substrates were compared to substrates treated with abrasive only (microblasted and an untreated Ti. The HA powder, apatitic abrasives and the treated substrates were characterized for chemical composition, coating coverage, crystallinity and topography including surface roughness. The results show that the surface roughness of the HA blasted modification was affected by the particle size of the apatitic abrasives used. The CoBlast process did not alter the chemistry of the crystalline HA during deposition. Cell proliferation on the HA surface was also assessed, which demonstrated enhanced osteo-viability compared to the microblast and blank Ti. This study demonstrates the ability of the CoBlast process to deposit HA coatings with a range of surface properties onto Ti substrates. The ability of the CoBlast technology to offer diversity in modifying surface topography offers exciting new prospects in tailoring the properties of medical devices for applications ranging from dental to orthopedic settings.

  6. Numerical modeling of consolidation processes in hydraulically deposited soils

    Science.gov (United States)

    Brink, Nicholas Robert

    Hydraulically deposited soils are encountered in many common engineering applications including mine tailing and geotextile tube fills, though the consolidation process for such soils is highly nonlinear and requires the use of advanced numerical techniques to provide accurate predictions. Several commercially available finite element codes poses the ability to model soil consolidation, and it was the goal of this research to assess the ability of two of these codes, ABAQUS and PLAXIS, to model the large-strain, two-dimensional consolidation processes which occur in hydraulically deposited soils. A series of one- and two-dimensionally drained rectangular models were first created to assess the limitations of ABAQUS and PLAXIS when modeling consolidation of highly compressible soils. Then, geotextile tube and TSF models were created to represent actual scenarios which might be encountered in engineering practice. Several limitations were discovered, including the existence of a minimum preconsolidation stress below which numerical solutions become unstable.

  7. Clean diffusion coatings by chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Warnes, B.M.; Punola, D.C. [Howmet Thermatech Coatings, Whitehall, MI (United States)

    1997-10-01

    An experimental program was undertaken to identify diffusion coating impurities introduced by standard aluminizing processes and to evaluate the impact of those impurities on oxidation resistance of the resultant Pt aluminide coating. IN-738 tabs and foils were platinum-electroplated, and then aluminized using three different processes: high-activity pack cementation, high-activity CVD and low-activity CVD. The results suggest that aluminizing processes which involve aluminum bearing alloys in the coating retort with H{sub 2} or H{sub 2}/HCl gas at high temperature can contaminate the diffusion coating during deposition. CVD low-activity aluminizing (coating gas generated at low temperature outside the coating chamber from 99.999% Al) did not introduce any coating impurities. In addition, the data indicates that harmful impurities from the IN-738 substrate (sulfur, boron and tungsten) and the electroplating process (phosphorus) were removed from the coating during deposition. The CVD low-activity Pt aluminide coating was the `cleanest` in the study, and it exhibited the best high-temperature oxidation resistance of the coatings considered. It can be concluded that trace elements in diffusion coatings from the superalloy substrate and/or the aluminizing process can adversely effect the oxidation resistance of those coatings, and that CVD low-activity aluminizing yields cleaner coatings than other commercially available aluminizing techniques. (orig.) 10 refs.

  8. Enhancement of the Electrical Properties of CVD-Grown Graphene with Ascorbic Acid Treatment

    Science.gov (United States)

    Tang, Chunmiao; Chen, Zhiying; Zhang, Haoran; Zhang, Yaqian; Zhang, Yanhui; Sui, Yanping; Yu, Guanghui; Cao, Yijiang

    2016-02-01

    Ascorbic acid was used to modify to chemical vapor deposition (CVD)-grown graphene films transferred onto SiO2 substrate. Residual polymer (polymethyl methacrylate), Fe3+, Cl-, H2O, and O2 affected the electrical and thermal properties on graphene during the transfer or device fabrication processes. Exposure of transferred graphene to ascorbic acid resulted in significantly enhanced electrical properties with increased charge carrier mobility. All devices exhibited more than 30% improvement in room temperature carrier mobility in air. The carrier mobility of the treated graphene did not significantly decrease in 21 days. This result can be attributed to electron donation to graphene through the -OH functional group in ascorbic acid that is absorbed in graphene. This work provides a method to enhance the electrical properties of CVD-grown graphene.

  9. A Review of the Properties and CVD Synthesis of Coiled Carbon Nanotubes

    Directory of Open Access Journals (Sweden)

    Dóra Fejes

    2010-04-01

    Full Text Available The CVD route for carbon nanotube production has become a popular method to make large amounts of multiwall carbon nanotubes. The structure, morphology and size of carbon materials depend critically on the catalyst preparation and deposition conditions. According to current knowledge, CVD method is the only process which can produce carbon nanocoils. These nanocoils are perfect candidates for nanotechnology applications. One might indeed hope that these coils would have the extraordinary stiffness displayed by straight nanotubes. Based on theoretical studies, regular coiled nanotubes exhibit exceptional mechanical, electrical, and magnetic properties due to the combination of their peculiar helical morphology and the fascinating properties of nanotubes. In spite of its technological interest, relatively low attention has been paid to this special field. In this paper we attempt to summarize results obtained until now.

  10. Chemical Properties of Carbon Nanotubes Prepared Using Camphoric Carbon by Thermal-CVD

    Science.gov (United States)

    Azira, A. A.; Rusop, M.

    2010-03-01

    Chemical properties and surface study on the influence of starting carbon materials by using thermal chemical vapor deposition (Thermal-CVD) to produced carbon nanotubes (CNTs) is investigated. The CNTs derived from camphor were synthesized as the precursor material due to low sublimation temperature. The major parameters are also evaluated in order to obtain high-yield and high-quality CNTs. The prepared CNTs are examined using field emission scanning electron microscopy (FESEM) to determine the microstructure of nanocarbons. The FESEM investigation of the CNTs formed on the support catalysts provides evidence that camphor is suitable as a precursor material for nanotubes formation. The chemical properties of the CNTs were conducted using FTIR spectroscopy and PXRD analysis. The high-temperature graphitization process induced by the Thermal-CVD enables the hydrocarbons to act as carbon sources and changes the aromatic species into the layered graphite structure of CNTs.

  11. CVD Diamond Sensors In Detectors For High Energy Physics

    CERN Document Server

    AUTHOR|(INSPIRE)INSPIRE-00334150; Trischuk, William

    At the end of the next decade an upgrade of the Large Hadron Collider (LHC) to High Luminosity LHC (HL-LHC) is planned which requires the development of new radiation tolerant sensor technology. Diamond is an interesting material for use as a particle detector in high radiation environments. The large band gap ($5.47\\,\\text{eV}$) and the large displacement energy suggest that diamond is a radiation tolerant detector material. In this Thesis the capability of Chemical Vapor Deposition (CVD) diamond as such a sensor technology is investigated. The radiation damage constant for $800\\,\\text{MeV}$ protons is measured using single crystalline CVD (scCVD) and polycrystalline CVD (pCVD) diamonds irradiated to particle fluences up to $12 \\times 10^{15}\\,\\text{p/cm}^2$. In addition the signal response of a pCVD diamond detector after an irradiation to $12 \\times 10^{15}\\,\\text{p/cm}^2$ is investigated to determine if such a detector can be operated efficiently in the expected HL-LHC environment. By using electrodes em...

  12. Surface analysis of CVD diamond exposed to fusion plasma

    NARCIS (Netherlands)

    Porro, S.; De Temmerman, G.; MacLaren, D. A.; Lisgo, S.; Rudakov, D. L.; Westerhout, J.; Wiora, M.; John, P.; Villalpando, I.; Wilson, J. I. B.

    2010-01-01

    Microcrystalline undoped and heavily boron-doped polycrystalline diamond layers have been deposited on various substrates by hot filament CVD and exposed to hydrogen plasma in a linear plasma reactor (Pilot-PSI, The Netherlands) that simulates the high flux and high density plasma conditions of toka

  13. Process for electroless deposition of metals on zirconium materials

    Science.gov (United States)

    Donaghy, Robert E.

    1978-01-01

    A process for the electroless deposition of a metal layer on an article comprised of zirconium or a zirconium alloy is disclosed. The article is activated in an aged aqueous solution comprising from about 10 to about 20 grams per liter ammonium bifluoride and from about 0.75 to about 2 grams per liter of sulfuric acid. The solution is aged by immersion of pickled zirconium in the solution for at least about 10 minutes. The loosely adhering film formed on the article in the activating step is removed and the article is contacted with an electroless plating solution containing the metal to be deposited on the article upon sufficient contact with the article.

  14. Process for electrolytic deposition of metals on zirconium materials

    Science.gov (United States)

    Donaghy, Robert E.

    1979-01-30

    A process for the electrolytic deposition of a metal layer on an article comprised of zirconium or a zirconium alloy is disclosed. The article is activated in an aged aqueous solution comprising from about 10 to about 20 grams per liter ammonium bifluoride and from about 0.75 to about 2 grams per liter of sulfuric acid. The solution is aged by immersion of pickled zirconium in the solution for at least about 10 minutes. The loosely adhering film formed on the article in the activating step is removed and the article is contacted with an electrolytic plating solution containing the metal to be deposited on the article in the presence of an electrode receiving current.

  15. High collection efficiency CVD diamond alpha detectors

    Energy Technology Data Exchange (ETDEWEB)

    Bergonzo, P.; Foulon, F.; Marshall, R.D.; Jany, C.; Brambilla, A. [CEA/Saclay, Gif-sur-Yvette (France); McKeag, R.D.; Jackman, R.B. [University College London (United Kingdom). Electronic and Electrical Engineering Dept.

    1998-06-01

    Advances in Chemical Vapor Deposited (CVD) diamond have enabled the routine use of this material for sensor device fabrication, allowing exploitation of its unique combination of physical properties (low temperature susceptibility (> 500 C), high resistance to radiation damage (> 100 Mrad) and to corrosive media). A consequence of CVD diamond growth on silicon is the formation of polycrystalline films which has a profound influence on the physical and electronic properties with respect to those measured on monocrystalline diamond. The authors report the optimization of physical and geometrical device parameters for radiation detection in the counting mode. Sandwich and co-planar electrode geometries are tested and their performances evaluated with regard to the nature of the field profile and drift distances inherent in such devices. The carrier drift length before trapping was measured under alpha particles and values as high as 40% of the overall film thickness are reported. Further, by optimizing the device geometry, they show that a gain in collection efficiency, defined as the induced charge divided by the deposited charge within the material, can be achieved even though lower bias values are used.

  16. Recent Advances in Atmospheric Vapor-Phase Deposition of Transparent and Conductive Zinc Oxide

    NARCIS (Netherlands)

    Illiberi, A.; Poodt, P.; Roozeboom, F.

    2014-01-01

    The industrial need for high-throughput and low-cost ZnO deposition processes has triggered the development of atmospheric vapor-phase deposition techniques which can be easily applied to continuous, in-line manufacturing. While atmospheric CVD is a mature technology, new processes for the growth of

  17. Research on the processing experiments of laser metal deposition shaping

    Science.gov (United States)

    Zhang, Kai; Liu, Weijun; Shang, Xiaofeng

    2007-04-01

    Laser additive direct deposition of metals is a new rapid manufacturing technology, which combines with computer-aided design (CAD), laser cladding and rapid prototyping. The advanced technology can build fully dense metal components directly from CAD files with neither mould nor tool. Based on the theory of this technology, a promising rapid manufacturing system called "Laser Metal Deposition Shaping (LMDS)" has been constructed and developed successfully by Chinese Academy of Sciences, Shenyang Institute of Automation. Through the LMDS system, comprehensive experiments are carried out with nickel-based superalloy to systematically investigate the influences of the processing parameters on forming characteristics. By adjusting to the optimal processing parameters, fully dense and near-net-shaped metallic parts can be directly obtained through melting coaxially fed powder with a laser. Moreover, the microstructure and mechanical properties of as-formed samples are tested and analyzed synthetically. As a result, significant processing flexibility with the LMDS system over conventional processing capabilities is recognized, with potentially lower production cost, higher quality components, and shorter lead-time.

  18. A Comparative Study of Three Different Chemical Vapor Deposition Techniques of Carbon Nanotube Growth on Diamond Films

    Directory of Open Access Journals (Sweden)

    Betty T. Quinton

    2013-01-01

    Full Text Available This paper compares between the methods of growing carbon nanotubes (CNTs on diamond substrates and evaluates the quality of the CNTs and the interfacial strength. One potential application for these materials is a heat sink/spreader for high-power electronic devices. The CNTs and diamond substrates have a significantly higher specific thermal conductivity than traditional heat sink/spreader materials making them good replacement candidates. Only limited research has been performed on these CNT/diamond structures and their suitability of different growth methods. This study investigates three potential chemical vapor deposition (CVD techniques for growing CNTs on diamond: thermal CVD (T-CVD, microwave plasma-enhanced CVD (MPE-CVD, and floating catalyst thermal CVD (FCT-CVD. Scanning electron microscopy (SEM and high-resolution transmission electron microscopy (TEM were used to analyze the morphology and topology of the CNTs. Raman spectroscopy was used to assess the quality of the CNTs by determining the ID/IG peak intensity ratios. Additionally, the CNT/diamond samples were sonicated for qualitative comparisons of the durability of the CNT forests. T-CVD provided the largest diameter tubes, with catalysts residing mainly at the CNT/diamond interface. The MPE-CVD process yielded non uniform defective CNTs, and FCT-CVD resulted in the smallest diameter CNTs with catalyst particles imbedded throughout the length of the nanotubes.

  19. Effect of Ce and La additions in low temperature aluminization process by CVD-FBR on 12%Cr ferritic/martensitic steel and behaviour in steam oxidation

    Energy Technology Data Exchange (ETDEWEB)

    Sanchez, L. [Universidad Complutense de Madrid, Grupo de Investigacion de Ingenieria de Superficies y Materiales Nanoestructurados, Avenida Complutense s/n, Facultad de Ciencias Quimicas, 28040 Madrid (Spain)], E-mail: lsanche@quim.ucm.es; Bolivar, F.J. [Universidad de Antioquia, Facultad de Ingenierias, Medellin (Colombia); Hierro, M.P.; Perez, F.J. [Universidad Complutense de Madrid, Grupo de Investigacion de Ingenieria de Superficies y Materiales Nanoestructurados, Avenida Complutense s/n, Facultad de Ciencias Quimicas, 28040 Madrid (Spain)

    2008-08-15

    Two different coatings based of iron aluminide on 12% Cr ferritic-martensitic steel have been developed by CVD-FBR technique, which is modified by the introduction of Ce and La as powder in the fluidized bed. These elements change the gaseous environment, which composition is predicted by a thermodynamic approximation. Partial pressures of all gaseous precursors are drastically modified; in consequence AlCl has the highest partial pressure in the system leading to an increment of the coating thickness. Coatings are composed by (Fe, Cr){sub 2}Al{sub 5} or (Fe, Cr){sub 2}Al{sub 5} and (Fe, Cr)Al{sub 3} intermetallic phases. On the other hand, steam oxidation test at 650 deg. C was performed in order to observe improvements in the HCM12A oxidation resistant.

  20. Optical emission spectroscopy study on deposition process of microcrystalline silicon

    Institute of Scientific and Technical Information of China (English)

    Wu Zhi-Meng; Lei Qing-Song; Geng Xin-Hua; Zhao Ying; Sun Jian; Xi Jian-Ping

    2006-01-01

    This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced chemical vapour deposition system. The OES intensities (SiH*, H*α and H*β) are investigated by varying the deposition parameters. The result shows that the discharge power, silane concentrations and substrate temperature affect the OES intensities. When the discharge power at silane concentration of 4% increases, the OES intensities increase first and then are constant, the intensities increase with the discharge power monotonously at silane concentration of 6%. The SiH* intensity increases with silane concentration, while the intensities of H*α and H*β increase first and then decrease. When the substrate temperature increases, the SiH* intensity decreases and the intensities of H*α and H*β are constant. The correlation between the intensity ratio of IH*α/ISiH* and the crystalline volume fraction (Xc) of films is confirmed.

  1. Processing Parameters Optimization for Material Deposition Efficiency in Laser Metal Deposited Titanium Alloy

    Science.gov (United States)

    Mahamood, Rasheedat M.; Akinlabi, Esther T.

    2016-03-01

    Ti6Al4V is an important Titanium alloy that is mostly used in many applications such as: aerospace, petrochemical and medicine. The excellent corrosion resistance property, the high strength to weight ratio and the retention of properties at high temperature makes them to be favoured in most applications. The high cost of Titanium and its alloys makes their use to be prohibitive in some applications. Ti6Al4V can be cladded on a less expensive material such as steel, thereby reducing cost and providing excellent properties. Laser Metal Deposition (LMD) process, an additive manufacturing process is capable of producing complex part directly from the 3-D CAD model of the part and it also has the capability of handling multiple materials. Processing parameters play an important role in LMD process and in order to achieve desired results at a minimum cost, then the processing parameters need to be properly controlled. This paper investigates the role of processing parameters: laser power, scanning speed, powder flow rate and gas flow rate, on the material utilization efficiency in laser metal deposited Ti6Al4V. A two-level full factorial design of experiment was used in this investigation, to be able to understand the processing parameters that are most significant as well as the interactions among these processing parameters. Four process parameters were used, each with upper and lower settings which results in a combination of sixteen experiments. The laser power settings used was 1.8 and 3 kW, the scanning speed was 0.05 and 0.1 m/s, the powder flow rate was 2 and 4 g/min and the gas flow rate was 2 and 4 l/min. The experiments were designed and analyzed using Design Expert 8 software. The software was used to generate the optimized process parameters which were found to be laser power of 3.2 kW, scanning speed of 0.06 m/s, powder flow rate of 2 g/min and gas flow rate of 3 l/min.

  2. Smooth germanium nanowires prepared by a hydrothermal deposition process

    Energy Technology Data Exchange (ETDEWEB)

    Pei, L.Z., E-mail: lzpei1977@163.com [School of Materials Science and Engineering, Institute of Molecular Engineering and Applied Chemistry, Key Laboratory of Materials Science and Processing of Anhui Province, Anhui University of Technology, Ma' anshan, Anhui 243002 (China); Zhao, H.S. [School of Materials Science and Engineering, Institute of Molecular Engineering and Applied Chemistry, Key Laboratory of Materials Science and Processing of Anhui Province, Anhui University of Technology, Ma' anshan, Anhui 243002 (China); Tan, W. [Henkel Huawei Electronics Co. Ltd., Lian' yungang, Jiangsu 222006 (China); Yu, H.Y. [School of Materials Science and Engineering, Institute of Molecular Engineering and Applied Chemistry, Key Laboratory of Materials Science and Processing of Anhui Province, Anhui University of Technology, Ma' anshan, Anhui 243002 (China); Chen, Y.W. [Department of Materials Science, Fudan University, Shanghai 200433 (China); Fan, C.G. [School of Materials Science and Engineering, Institute of Molecular Engineering and Applied Chemistry, Key Laboratory of Materials Science and Processing of Anhui Province, Anhui University of Technology, Ma' anshan, Anhui 243002 (China); Zhang, Qian-Feng, E-mail: zhangqf@ahut.edu.cn [School of Materials Science and Engineering, Institute of Molecular Engineering and Applied Chemistry, Key Laboratory of Materials Science and Processing of Anhui Province, Anhui University of Technology, Ma' anshan, Anhui 243002 (China)

    2009-11-15

    Smooth germanium nanowires were prepared using Ge and GeO{sub 2} as the starting materials and Cu sheet as the substrate by a simple hydrothermal deposition process. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) characterizations show that the germanium nanowires are smooth and straight with uniform diameter of about 150 nm in average and tens of micrometers in length. X-ray diffraction (XRD) and Raman spectrum of the germanium nanowires display that the germanium nanowires are mainly composed of cubic diamond phase. PL spectrum shows a strong blue light emission at 441 nm. The growth mechanism is also discussed.

  3. Engineered CVD Diamond Coatings for Machining and Tribological Applications

    Science.gov (United States)

    Dumpala, Ravikumar; Chandran, Maneesh; Ramachandra Rao, M. S.

    2015-07-01

    Diamond is an allotropes of carbon and is unique because of its extreme hardness (~100 GPa), low friction coefficient (fracture toughness can be tuned by controlling the grain size of the coatings from a few microns to a few nanometers. In this review, characteristics and performance of the CVD diamond coatings deposited on cemented tungsten carbide (WC-Co) substrates were discussed with an emphasis on WC-Co grade selection, substrate pretreatment, nanocrystallinity and microcrystallinity of the coating, mechanical and tribological characteristics, coating architecture, and interfacial adhesion integrity. Engineered coating substrate architecture is essential for CVD diamond coatings to perform well under harsh and highly abrasive machining and tribological conditions.

  4. High Throughput Atomic Layer Deposition Processes: High Pressure Operations, New Reactor Designs, and Novel Metal Processing

    Science.gov (United States)

    Mousa, MoatazBellah Mahmoud

    Atomic Layer Deposition (ALD) is a vapor phase nano-coating process that deposits very uniform and conformal thin film materials with sub-angstrom level thickness control on various substrates. These unique properties made ALD a platform technology for numerous products and applications. However, most of these applications are limited to the lab scale due to the low process throughput relative to the other deposition techniques, which hinders its industrial adoption. In addition to the low throughput, the process development for certain applications usually faces other obstacles, such as: a required new processing mode (e.g., batch vs continuous) or process conditions (e.g., low temperature), absence of an appropriate reactor design for a specific substrate and sometimes the lack of a suitable chemistry. This dissertation studies different aspects of ALD process development for prospect applications in the semiconductor, textiles, and battery industries, as well as novel organic-inorganic hybrid materials. The investigation of a high pressure, low temperature ALD process for metal oxides deposition using multiple process chemistry revealed the vital importance of the gas velocity over the substrate to achieve fast depositions at these challenging processing conditions. Also in this work, two unique high throughput ALD reactor designs are reported. The first is a continuous roll-to-roll ALD reactor for ultra-fast coatings on porous, flexible substrates with very high surface area. While the second reactor is an ALD delivery head that allows for in loco ALD coatings that can be executed under ambient conditions (even outdoors) on large surfaces while still maintaining very high deposition rates. As a proof of concept, part of a parked automobile window was coated using the ALD delivery head. Another process development shown herein is the improvement achieved in the selective synthesis of organic-inorganic materials using an ALD based process called sequential vapor

  5. Direct CVD Graphene Growth on Semiconductors and Dielectrics for Transfer-Free Device Fabrication.

    Science.gov (United States)

    Wang, Huaping; Yu, Gui

    2016-07-01

    Graphene is the most broadly discussed and studied two-dimensional material because of its preeminent physical, mechanical, optical, and thermal properties. Until now, metal-catalyzed chemical vapor deposition (CVD) has been widely employed for the scalable production of high-quality graphene. However, in order to incorporate the graphene into electronic devices, a transfer process from metal substrates to targeted substrates is inevitable. This process usually results in contamination, wrinkling, and breakage of graphene samples - undesirable in graphene-based technology and not compatible with industrial production. Therefore, direct graphene growth on desired semiconductor and dielectric substrates is considered as an effective alternative. Over the past years, there have been intensive investigations to realize direct graphene growth using CVD methods without the catalytic role of metals. Owing to the low catalytic activity of non-metal substrates for carbon precursor decomposition and graphene growth, several strategies have been designed to facilitate and engineer graphene fabrication on semiconductors and insulators. Here, those developed strategies for direct CVD graphene growth on semiconductors and dielectrics for transfer-free fabrication of electronic devices are reviewed. By employing these methods, various graphene-related structures can be directly prepared on desired substrates and exhibit excellent performance, providing versatile routes for varied graphene-based materials fabrication.

  6. Laser Velocimetry of Chemical Vapor Deposition Flows

    Science.gov (United States)

    1993-01-01

    Laser velocimetry (LV) is being used to measure the gas flows in chemical vapor deposition (CVD) reactors. These gas flow measurements can be used to improve industrial processes in semiconductor and optical layer deposition and to validate numerical models. Visible in the center of the picture is the graphite susceptor glowing orange-hot at 600 degrees C. It is inductively heated via the copper cool surrounding the glass reactor.

  7. Fabrication and characteristics of self-assembly nano-polystyrene films by laser induced CVD

    Energy Technology Data Exchange (ETDEWEB)

    Xiao, Tingting [Department of Applied Physics, Chongqing University, Chongqing 401331 (China); Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, CAEP, Mianyang 621900 (China); Cai, Congzhong [Department of Applied Physics, Chongqing University, Chongqing 401331 (China); Peng, Liping [Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, CAEP, Mianyang 621900 (China); Wu, Weidong, E-mail: wuweidongding@163.com [Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, CAEP, Mianyang 621900 (China)

    2013-10-01

    The self-assembly nano-polystyrene (PS) films have been prepared by laser induced CVD at room temperature. The XPS, Raman and UV–vis absorption spectra all indicated that the films were PS. The optical properties, microstructure and controllable nanostructure of PS films have been investigated. Dewetting-like microstructure in PS films was investigated and uniform island structures with a diameter of about 200 nm were observed at the deposition pressure of 14 Pa. The films possess good toughness and precisely controlled thicknesses. The free-standing PS films with thickness of 10 nm could be obtained by this method though a series of process.

  8. Laser-Directed CVD 3D Printing of Refractory Metal Rocket Propulsion Hardware Project

    Data.gov (United States)

    National Aeronautics and Space Administration — In this project, Ultramet will develop a three-dimensional (3D) laser-directed chemical vapor deposition (CVD) additive manufacturing system to build free-form...

  9. Physical chemistry of evaporation and deposition of metals, alloys and their compounds

    Energy Technology Data Exchange (ETDEWEB)

    Kato, Eiichi

    1988-05-01

    The thermodynamics, reaction kynetics and chemical vapor deposition(CVD) process were explained on evaporation and deposition to indicate that the chemical metallurgy was effective for the process analysis of various materials, mainly for metals. Firstly, gaseous phase growth of diamond was explained, evaporated molecular species were studied, vapor species of metal compounds were illustrated and vapor pressure data were dealed with. Fundamentals on evaporation coefficient and condensation coefficient were explained concerning the reaction kinetics and the measurements of Langumuir evaporation coefficient were illustrated. Further, the acceleration and inhibition of evaporation were described with examples of molten alloys. Thermal CVD process in which process is comparatively simple, was taken up from various CVD processes and Si thinfoil formation was studied. The relationship between reaction rate and temperature was described along with reaction process. Finally, the analysis of B and TiN deposition was detailed. (19 figs, 4 tabs, 30 refs)

  10. Fast method for reactor and feature scale coupling in ALD and CVD

    Energy Technology Data Exchange (ETDEWEB)

    Yanguas-Gil, Angel; Elam, Jeffrey W.

    2017-08-08

    Transport and surface chemistry of certain deposition techniques is modeled. Methods provide a model of the transport inside nanostructures as a single-particle discrete Markov chain process. This approach decouples the complexity of the surface chemistry from the transport model, thus allowing its application under general surface chemistry conditions, including atomic layer deposition (ALD) and chemical vapor deposition (CVD). Methods provide for determination of determine statistical information of the trajectory of individual molecules, such as the average interaction time or the number of wall collisions for molecules entering the nanostructures as well as to track the relative contributions to thin-film growth of different independent reaction pathways at each point of the feature.

  11. Randschicht- und durchgreifendes Härten von 42CrMo4 nach CVD-Beschichtung

    DEFF Research Database (Denmark)

    Pantleon, Karen; Kessler, Olaf; Hoffmann, Franz

    1999-01-01

    the properties of steel substrates ready for operation. Bulk hardening and induction surface hardening as two different post-deposition heat treatments are applied on TiN-coated 42CrMo4 (AISI 4140) substrates. The results show great advantages of induction surface hardening because only low distortion appear......The properties of hard coatings deposited using CVD-processes are usually excellent. However, high deposition temperatures may negativelly influence the properties of the steel substrates, especially in the case of low alloyed steels. Therefore, a subsequent heat treatment is necessary to restore...... and the properties of the steel substrates are improved without loosing good coating properties. Thereby, the properties of the steel substrates can be influenced by the parameters of induction heating in a wide range....

  12. Aluminum and aluminum/silicon coatings on ferritic steels by CVD-FBR technology

    Energy Technology Data Exchange (ETDEWEB)

    Perez, F.J. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain)]. E-mail: fjperez@quim.ucm.es; Hierro, M.P. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain); Trilleros, J.A. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain); Carpintero, M.C. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain); Sanchez, L. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain); Bolivar, F.J. [Grupo de Investigacion de Ingenieria de Superficies, Departamento de Ciencia de los Materiales, Facultad de Ciencias Quimicas, Universidad Complutense de Madrid, 28040 Madrid (Spain)

    2006-05-10

    The use of chemical vapor deposition by fluidized bed reactors (CVD-FBR) offers some advantages in comparison to other coating techniques such as pack cementation, because it allows coating deposition at lower temperatures than pack cementation and at atmospheric pressure without affecting the mechanical properties of material due to heat treatments of the bulk during coating process. Aluminum and aluminum/silicon coatings have been obtained on two different ferritics steels (P-91 and P-92). The coatings were analyzed using several techniques like SEM/EDX and XRD. The results indicated that both coatings were form by Fe{sub 2}Al{sub 5} intermetallic compound, and in the co-deposition the Si was incorporated to the Fe{sub 2}Al{sub 5} structure in small amounts.

  13. Randschicht- und durchgreifendes Härten von 42CrMo4 nach CVD-Beschichtung

    DEFF Research Database (Denmark)

    Pantleon, Karen; Kessler, Olaf; Hoffmann, Franz;

    1999-01-01

    The properties of hard coatings deposited using CVD-processes are usually excellent. However, high deposition temperatures may negativelly influence the properties of the steel substrates, especially in the case of low alloyed steels. Therefore, a subsequent heat treatment is necessary to restore...... the properties of steel substrates ready for operation. Bulk hardening and induction surface hardening as two different post-deposition heat treatments are applied on TiN-coated 42CrMo4 (AISI 4140) substrates. The results show great advantages of induction surface hardening because only low distortion appear...... and the properties of the steel substrates are improved without loosing good coating properties. Thereby, the properties of the steel substrates can be influenced by the parameters of induction heating in a wide range....

  14. Hot-Wire Chemical Vapor Deposition of Few-Layer Graphene on Copper Substrates

    Science.gov (United States)

    Soler, Víctor-Manuel Freire; Badia-Canal, Jordi; Roca, Carles Corbella; Miralles, Esther Pascual; Serra, Enric Bertran; Bella, José-Luís Andújar

    2013-01-01

    Chemical vapor deposition (CVD) of graphene on copper is an efficient technology for producing high-quality graphene for large areas. The objective of this work is to deposit graphene/few-layer graphene (FLG) using different types of copper substrate by a new hot-wire CVD process. We carried out the processes at temperatures below 1000 °C with acetylene (C2H2) as a precursor gas. After a general characterization of the samples, the results mostly indicate the formation of FLG on copper samples by this method. Nevertheless, the presence of pure, crystalline, and sufficiently flat surfaces is needed for depositing high-quality graphene layers.

  15. Present limitations of CVD diamond detectors for IMRT applications

    Energy Technology Data Exchange (ETDEWEB)

    De Angelis, C. [Dipartimento di Tecnologie e Salute, Istituto Superiore di Sanita and INFN, Viale regina Elena 299, 00161 Rome (Italy)], E-mail: cinzia.deangelis@iss.it; Casati, M. [Dipartimento di Fisiopatologia dell' Universita and INFN, Florence (Italy); Bruzzi, M. [Dipartimento di Energetica dell' Universita and INFN, Florence (Italy); Onori, S. [Dipartimento di Tecnologie e Salute, Istituto Superiore di Sanita and INFN, Viale regina Elena 299, 00161 Rome (Italy); Bucciolini, M. [Dipartimento di Fisiopatologia dell' Universita and INFN, Florence (Italy)

    2007-12-11

    The aim of the work was to test the suitability of chemical vapor deposited (CVD) diamond detectors for dosimetry in IMRT fields. We used in-house CVD detectors prepared with state-of-the-art polycrystalline diamond films (Element Six Ltd., UK). The parameters considered were time stability, dynamic response, dose-rate dependence and energy dependence. Output factors and TPR were measured in conventional photon fields and dose measurements were performed in IMRT fields using the step-and-shoot technique. Results prove that CVD diamond detectors are suitable for dosimetry in conventional treatments, but they still do not fit the IMRT dosimetry requirements, mainly because of their slow dynamic response. In particular, the slow dynamics affects linearity at low Monitor Units and renders it impossible to follow the sharp transients of IMRT fields. Time stability and dose-rate dependence as well must be improved to reduce their influence on dose assessment.

  16. Superhydrophobic aluminium-based surfaces: Wetting and wear properties of different CVD-generated coating types

    Energy Technology Data Exchange (ETDEWEB)

    Thieme, M., E-mail: michael.thieme@tu-dresden.de [Technische Universität Dresden, Institute of Materials Science, 01062 Dresden (Germany); Streller, F., E-mail: streller@seas.upenn.edu [Technische Universität Dresden, Institute of Materials Science, 01062 Dresden (Germany); Simon, F., E-mail: frsimon@ipfdd.de [Leibniz-Institut für Polymerforschung Dresden, Postfach 120 411, 01005 Dresden (Germany); Frenzel, R., E-mail: frenzelr@ipfdd.de [Leibniz-Institut für Polymerforschung Dresden, Postfach 120 411, 01005 Dresden (Germany); White, A.J. [GVD Corporation, 45 Spinelli Place, Cambridge, MA 02138 (United States)

    2013-10-15

    In view of generating superhydrophobic aluminium-based surfaces, this work presents further results for the combination of anodic oxidation as the primary pretreatment method and chemical vapour deposition (CVD) variants for chemical modification producing coatings of 250–1000 nm thickness. In detail, CVD involved the utilisation of i – hexafluoropropylene oxide as precursor within the hot filament CVD process for the deposition of poly(tetrafluoroethylene) coatings at alternative conditions (PTFE-AC) and ii – 1,3,5-trivinyltrimethylcyclotrisiloxane for the deposition of polysiloxane coatings (PSi) by initiated CVD. The substrate material was Al Mg1 subjected to usual or intensified sulphuric acid anodisation pretreatments (SAAu, SAAi, respectively) affording various degrees of surface micro-roughness (SAAu < SAAi) to the oxidic layers. Performance characteristics were evaluated in the original as-coated states and after standardised artificial weathering and/or mild wear testing. Superhydrophobicity (SH) was observed with the system SAAi + PTFE-AC similarly to former findings with the standard hot filament CVD PTFE coating variant (SAAi + PTFE-SC). The results indicated that the specific coating morphology made an important contribution to the water-repellency, because even some of the SAAu-based samples tended to reveal SH. Subjecting samples to weathering treatment resulted in a general worsening of the wetting behaviour, primarily limited to the receding contact angles. These tendencies were correlated with the chemical composition of the sample surfaces as analysed by X-ray photoelectron spectroscopy. The wear tests showed, as evaluated by scanning electron microscopy and contact angle measurement, that the PTFE coatings were relatively sensitive to friction. This was connected with a dramatic deterioration of the water-repelling properties. PSi-coated surfaces generally showed rather poor water-repellency, but this coating type was surprisingly

  17. New process may aid solution mining. [Fracturing salt deposits

    Energy Technology Data Exchange (ETDEWEB)

    1970-12-01

    A novel approach is presented regarding fracturing salt deposits. It promises to make solution mining more eficient in recovering potash from a deep ore-body. In the process, wells to supply process water are drilled in the center of a proposed mining field. The well depth is determined by the location of a water-bearing stratum having a geothermic heat content at least equal to that in the mineral strata to be mined. If process water of lower heat content is used, it can be warmed artificially by steam injection or allowed to absorb heat in the geothermic environment prevailing in the mineral stratum during the process of curing the brine to maturity. Once a process water source is assured, injection wells are drilled to the deepest stratum of sylvinite. The water is then injected adjacent to a clay bed at a hydraulic pressure sufficient to permit breakdown of the formation. Starting at the lowest stratum permits advantage to be taken of an ascending fracture plane. After having achieved breakdown in each stratum, the operator continues injection of water to assure coverage of the necessary fractured plane. Then the brine field development wells are drilled in a convenient pattern to correspond with the direction of the fracture plane (these can be used at a later date either as brine-producing or injection wells). Well spacings are proposed (between injection wells of at least 400 ft.

  18. Low-temperature growth of nitrogen-doped carbon nanofibers by acetonitrile catalytic CVD using Ni-based catalysts

    Science.gov (United States)

    Iwasaki, Tomohiro; Makino, Yuri; Fukukawa, Makoto; Nakamura, Hideya; Watano, Satoru

    2016-11-01

    To synthesize nitrogen-doped carbon nanofibers (N-CNFs) at high growth rates and low temperatures less than 673 K, nickel species (metallic nickel and nickel oxide) supported on alumina particles were used as the catalysts for an acetonitrile catalytic chemical vapor deposition (CVD) process. The nickel:alumina mass ratio in the catalysts was fixed at 0.05:1. The catalyst precursors were prepared from various nickel salts (nitrate, chloride, sulfate, acetate, and lactate) and then calcined at 1073 K for 1 h in oxidative (air), reductive (hydrogen-containing argon), or inert (pure argon) atmospheres to activate the nickel-based catalysts. The effects of precursors and calcination atmosphere on the catalyst activity at low temperatures were studied. We found that the catalysts derived from nickel nitrate had relatively small crystallite sizes of nickel species and provided N-CNFs at high growth rates of 57 ± 4 g-CNF/g-Ni/h at 673 K in the CVD process using 10 vol% hydrogen-containing argon as the carrier gas of acetonitrile vapor, which were approximately 4 times larger than that of a conventional CVD process. The obtained results reveal that nitrate ions in the catalyst precursor and hydrogen in the carrier gas can contribute effectively to the activation of catalysts in low-temperature CVD. The fiber diameter and nitrogen content of N-CNFs synthesized at high growth rates were several tens of nanometers and 3.5 ± 0.3 at.%, respectively. Our catalysts and CVD process may lead to cost reductions in the production of N-CNFs.

  19. Low-temperature growth of nitrogen-doped carbon nanofibers by acetonitrile catalytic CVD using Ni-based catalysts

    Directory of Open Access Journals (Sweden)

    Tomohiro Iwasaki

    2016-06-01

    Full Text Available Abstract To synthesize nitrogen-doped carbon nanofibers (N-CNFs at high growth rates and low temperatures less than 673 K, nickel species (metallic nickel and nickel oxide supported on alumina particles were used as the catalysts for an acetonitrile catalytic chemical vapor deposition (CVD process. The nickel:alumina mass ratio in the catalysts was fixed at 0.05:1. The catalyst precursors were prepared from various nickel salts (nitrate, chloride, sulfate, acetate, and lactate and then calcined at 1073 K for 1 h in oxidative (air, reductive (hydrogen-containing argon, or inert (pure argon atmospheres to activate the nickel-based catalysts. The effects of precursors and calcination atmosphere on the catalyst activity at low temperatures were studied. We found that the catalysts derived from nickel nitrate had relatively small crystallite sizes of nickel species and provided N-CNFs at high growth rates of 57 ± 4 g-CNF/g-Ni/h at 673 K in the CVD process using 10 vol% hydrogen-containing argon as the carrier gas of acetonitrile vapor, which were approximately 4 times larger than that of a conventional CVD process. The obtained results reveal that nitrate ions in the catalyst precursor and hydrogen in the carrier gas can contribute effectively to the activation of catalysts in low-temperature CVD. The fiber diameter and nitrogen content of N-CNFs synthesized at high growth rates were several tens of nanometers and 3.5 ± 0.3 at.%, respectively. Our catalysts and CVD process may lead to cost reductions in the production of N-CNFs.

  20. Synthesis of CVD-graphene on rapidly heated copper foils.

    Science.gov (United States)

    Kim, Sang-Min; Kim, Jae-Hyun; Kim, Kwang-Seop; Hwangbo, Yun; Yoon, Jong-Hyuk; Lee, Eun-Kyu; Ryu, Jaechul; Lee, Hak-Joo; Cho, Seungmin; Lee, Seung-Mo

    2014-05-07

    Most chemical vapor deposition (CVD) systems used for graphene growth mainly employ convection and radiation heat transfer between the heating source and the metal catalyst in order to reach the activation temperature of the reaction, which in general leads to a long synthesis time and poor energy efficiency. Here, we report a highly time- and energy-efficient CVD setup, in which the metal catalyst (Cu) is designed to be physically contacted with a heating source to give quick heat transfer by conduction. The induced conduction heating enabled the usual effects of the pretreatment and annealing of Cu (i.e., annihilation of surface defects, impurities and contaminants) to be achieved in a significantly shorter time compared to conventional CVD. Notably, the rapid heating was observed to lead to larger grains of Cu with high uniformity as compared to the Cu annealed by conventional CVD, which are believed to be beneficial for the growth of high quality graphene. Through this CVD setup, bundles of high quality (∼252 Ω per square) and large area (over 16 inch) graphenes were able to be readily synthesized in 40 min in a significantly efficient way. When considering ease of scalability, high energy effectiveness and considerable productivity, our method is expected to be welcomed by industrialists.

  1. Giant enhancement in vertical conductivity of stacked CVD graphene sheets by self-assembled molecular layers

    Science.gov (United States)

    Liu, Yanpeng; Yuan, Li; Yang, Ming; Zheng, Yi; Li, Linjun; Gao, Libo; Nerngchamnong, Nisachol; Nai, Chang Tai; Sangeeth, C. S. Suchand; Feng, Yuan Ping; Nijhuis, Christian A.; Loh, Kian Ping

    2014-11-01

    Layer-by-layer-stacked chemical vapour deposition (CVD) graphene films find applications as transparent and conductive electrodes in solar cells, organic light-emitting diodes and touch panels. Common to lamellar-type systems with anisotropic electron delocalization, the plane-to-plane (vertical) conductivity in such systems is several orders lower than its in-plane conductivity. The poor electronic coupling between the planes is due to the presence of transfer process organic residues and trapped air pocket in wrinkles. Here we show the plane-to-plane tunnelling conductivity of stacked CVD graphene layers can be improved significantly by inserting 1-pyrenebutyric acid N-hydroxysuccinimide ester between the graphene layers. The six orders of magnitude increase in plane-to-plane conductivity is due to hole doping, orbital hybridization, planarization and the exclusion of polymer residues. Our results highlight the importance of interfacial modification for enhancing the performance of LBL-stacked CVD graphene films, which should be applicable to other types of stacked two-dimensional films.

  2. Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films

    Energy Technology Data Exchange (ETDEWEB)

    Dabirian, Ali [Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 17, 1015 Lausanne (Switzerland); Kuzminykh, Yury, E-mail: yury.kuzminykh@empa.ch [Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 17, 1015 Lausanne (Switzerland); Laboratory for Advanced Materials Processing, Empa, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun (Switzerland); Wagner, Estelle; Benvenuti, Giacomo [3D-Oxides, 70 Rue G. Eiffel Technoparc, 01630 St Genis Pouilly (France); ABCD Technology, 12 route de Champ-Colin, 1260 Nyon (Switzerland); Rushworth, Simon [Tyndall National Institute, Lee Maltings, Dyke Parade, Cork (Ireland); Hoffmann, Patrik, E-mail: patrik.hoffmann@empa.ch [Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 17, 1015 Lausanne (Switzerland); Laboratory for Advanced Materials Processing, Empa, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun (Switzerland)

    2014-11-28

    Chemical vapour deposition (CVD) processes depend on the availability of suitable precursors. Precursors that deliver a stable vapour pressure are favourable in classical CVD processes, as they ensure process reproducibility. In high vacuum CVD (HV-CVD) process vapour pressure stability of the precursor is of particular importance, since no carrier gas assisted transport can be used. The dimeric Nb{sub 2}(OEt){sub 10} does not fulfil this requirement since it partially dissociates upon heating. Dimethylamino functionalization of an ethoxy ligand of Nb(OEt){sub 5} acts as an octahedral field completing entity and leads to Nb(OEt){sub 4}(dmae). We show that Nb(OEt){sub 4}(dmae) evaporates as monomeric molecule and ensures a stable vapour pressure and, consequently, stable flow. A set of HV-CVD experiments were conducted using this precursor by projecting a graded molecular beam of the precursor onto the substrate at deposition temperatures from 320 °C to 650 °C. Film growth rates ranging from 8 nm·h{sup −1} to values larger than 400 nm·h{sup −1} can be obtained in this system illustrating the high level of control available over the film growth process. Classical CVD limiting conditions along with the recently reported adsorption–reaction limited conditions are observed and the chemical composition, and microstructural and optical properties of the films are related to the corresponding growth regime. Nb(OEt){sub 4}(dmae) provides a large process window of deposition temperatures and precursor fluxes over which carbon-free and polycrystalline niobium oxide films with growth rates proportional to precursor flux are obtained. This feature makes Nb(OEt){sub 4}(dmae) an attractive precursor for combinatorial CVD of niobium containing complex oxide films that are finding an increasing interest in photonics and photoelectrochemical water splitting applications. The adsorption–reaction limited conditions provide extremely small growth rates comparable to an

  3. Graphene growth from reduced graphene oxide by chemical vapour deposition: seeded growth accompanied by restoration

    OpenAIRE

    2016-01-01

    Understanding the underlying mechanisms involved in graphene growth via chemical vapour deposition (CVD) is critical for precise control of the characteristics of graphene. Despite much effort, the actual processes behind graphene synthesis still remain to be elucidated in a large number of aspects. Herein, we report the evolution of graphene properties during in-plane growth of graphene from reduced graphene oxide (RGO) on copper (Cu) via methane CVD. While graphene is laterally grown from R...

  4. Effect of layer thickness setting on deposition characteristics in direct energy deposition (DED) process

    Science.gov (United States)

    Shim, Do-Sik; Baek, Gyeong-Yun; Seo, Jin-Seon; Shin, Gwang-Yong; Kim, Kee-Poong; Lee, Ki-Yong

    2016-12-01

    Direct energy deposition is an additive manufacturing technique that involves the melting of metal powder with a high-powered laser beam and is used to build a variety of components. In laser-assisted metal deposition, the mechanical and metallurgical properties achieved are influenced by many factors. This paper addresses methods for selecting an appropriate layer thickness setting, which is an important parameter in layer-by-layer deposition manufacturing. A new procedure is proposed for determining the layer thickness setting for use in slicing of a part based on the single-layer height for a given depositing condition. This procedure was compared with a conventional method that uses an empirically determined layer thickness and with a feedback control method. The micro-hardness distribution, location of the melting pool, and microstructures of the deposited layers after deposition of a simple target shape were investigated for each procedure. The experimental results show that even though the feedback control method is the most effective method for obtaining the desired geometry, the deposited region was characterized by inhomogeneity of micro-hardness due to the time-variable depositing conditions involved. The largest dimensional error was associated with the conventional deposition procedure, which produced a rise in the melting zone due to over-deposition with respect to the slicing thickness, especially at the high laser power level considered. In contrast, the proposed procedure produced a stable melting zone position during deposition, which resulted in the deposited part having reasonable dimensional accuracy and uniform micro-hardness throughout the deposited region.

  5. A platform for large-scale graphene electronics--CVD growth of single-layer graphene on CVD-grown hexagonal boron nitride.

    Science.gov (United States)

    Wang, Min; Jang, Sung Kyu; Jang, Won-Jun; Kim, Minwoo; Park, Seong-Yong; Kim, Sang-Woo; Kahng, Se-Jong; Choi, Jae-Young; Ruoff, Rodney S; Song, Young Jae; Lee, Sungjoo

    2013-05-21

    Direct chemical vapor deposition (CVD) growth of single-layer graphene on CVD-grown hexagonal boron nitride (h-BN) film can suggest a large-scale and high-quality graphene/h-BN film hybrid structure with a defect-free interface. This sequentially grown graphene/h-BN film shows better electronic properties than that of graphene/SiO2 or graphene transferred on h-BN film, and suggests a new promising template for graphene device fabrication.

  6. Enhancement of surface integrity of titanium alloy with copper by means of laser metal deposition process

    CSIR Research Space (South Africa)

    Erinosho, MF

    2016-04-01

    Full Text Available The laser metal deposition process possesses the combination of metallic powder and laser beam respectively. However, these combinations create an adhesive bonding that permanently solidifies the laser-enhanced-deposited powders. Titanium alloys (Ti...

  7. Microfabrication of Tungsten, Molybdenum and Tungsten Carbide Rods by Laser-Assisted CVD

    OpenAIRE

    Björklund, Kajsa

    2001-01-01

    Thin films of refractory metals and carbides have been studied extensively over many years because of their wide range of application. The two major techniques used are Chemical Vapour Deposition (CVD) and Physical Vapour Deposition (PVD). These can result in the deposition of two-dimensional blanket or patterned thin films. Laser-assisted Chemical Vapour Deposition (LCVD) can provide a maskless alternative for localised deposition in two and three dimensions. This thesis describes LCVD of mi...

  8. CVD synthesis of polycrystalline magnetite thin films: structural, magnetic and magnetotransport properties

    Energy Technology Data Exchange (ETDEWEB)

    Mantovan, R; Lamperti, A; Georgieva, M; Tallarida, G; Fanciulli, M, E-mail: roberto.mantovan@mdm.infm.i [Laboratorio Nazionale MDM CNR-INFM, Via C. Olivetti 2, 20041 Agrate Brianza (Italy)

    2010-02-17

    Magnetite (Fe{sub 3}O{sub 4}) is predicted to be half metallic at room temperature (RT) and it shows the highest Curie temperature among oxides. The use of Fe{sub 3}O{sub 4} thin films is therefore promising for spintronic devices such as magnetic tunnel junctions (MTJs) and magnetoresistive sensors. The structural, magnetic and magnetotransport properties of magnetite are reported to be strongly dependent on the growth conditions. We have developed a very simple deposition chamber for growing thin magnetite films via a chemical vapour deposition (CVD) process based on the Fe{sub 3}(CO){sub 12} carbonyl precursor. The structural, morphological, and magnetic properties of the as deposited Fe{sub 3}O{sub 4} films have been investigated by means of time of flight secondary ion mass spectrometry, grazing incidence x-ray diffraction, x-ray reflectivity, atomic force microscopy, conversion electron Moessbauer spectroscopy and superconducting quantum interference device magnetometry. Magnetotransport measurements show magnetoresistance up to -2.4% at RT at the maximum applied field of 1.1 T. Resistivity measurements in the 100-300 K temperature range reveal that the magnetotransport properties of the Fe{sub 3}O{sub 4} films are governed by inter-granular tunnelling of the spin-polarized electrons. The spin polarization is estimated to be around -16%. A possible route for increasing the spin-polarized performances of our magnetite films is proposed. We have also deposited Fe{sub 3}O{sub 4}/MgO/Co stacks by using a combined CVD and atomic layer-deposition process. The trilayer's hysteresis curve evidences the presence of two distinct switching fields making it promising for magnetite-based MTJ applications.

  9. CVD synthesis of polycrystalline magnetite thin films: structural, magnetic and magnetotransport properties

    Science.gov (United States)

    Mantovan, R.; Lamperti, A.; Georgieva, M.; Tallarida, G.; Fanciulli, M.

    2010-02-01

    Magnetite (Fe3O4) is predicted to be half metallic at room temperature (RT) and it shows the highest Curie temperature among oxides. The use of Fe3O4 thin films is therefore promising for spintronic devices such as magnetic tunnel junctions (MTJs) and magnetoresistive sensors. The structural, magnetic and magnetotransport properties of magnetite are reported to be strongly dependent on the growth conditions. We have developed a very simple deposition chamber for growing thin magnetite films via a chemical vapour deposition (CVD) process based on the Fe3(CO)12 carbonyl precursor. The structural, morphological, and magnetic properties of the as deposited Fe3O4 films have been investigated by means of time of flight secondary ion mass spectrometry, grazing incidence x-ray diffraction, x-ray reflectivity, atomic force microscopy, conversion electron Mössbauer spectroscopy and superconducting quantum interference device magnetometry. Magnetotransport measurements show magnetoresistance up to -2.4% at RT at the maximum applied field of 1.1 T. Resistivity measurements in the 100-300 K temperature range reveal that the magnetotransport properties of the Fe3O4 films are governed by inter-granular tunnelling of the spin-polarized electrons. The spin polarization is estimated to be around -16%. A possible route for increasing the spin-polarized performances of our magnetite films is proposed. We have also deposited Fe3O4/MgO/Co stacks by using a combined CVD and atomic layer-deposition process. The trilayer's hysteresis curve evidences the presence of two distinct switching fields making it promising for magnetite-based MTJ applications.

  10. Electrocatalysts with platinum, cobalt and nickel preparations by mechanical alloyed and CVD for the reaction of oxygen reduction; Electrocatalizadores a base de platino, cobalto y niquel preparados por aleado mecanico y CVD para la reaccion de reduccion de oxigeno

    Energy Technology Data Exchange (ETDEWEB)

    Garcia C, M. A. [ININ, 52750 La Marquesa, Estado de Mexico (Mexico)

    2008-07-01

    In this research, the molecular oxygen reduction reaction (ORR) was investigated on electrocatalysts of Co, Ni, Pt and their alloys CoNi, PtCo, PtNi and PtCoNi by using H{sub 2}SO{sub 4} 0.5 and KOH 0.5 M solutions as electrolytes. The electrocatalysts were synthesized by Mechanical Alloying (MA) and Chemical Vapor Deposition (CVD) processes. For MA, metallic powders were processed during 20 h of milling in a high energy SPEX 8000 mill. For CVD, a hot-wall reactor was utilized and Co, Ni and Pt acetilactetonates were used as precursors. Films were deposited at a total pressure of 1 torr and temperatures of 400-450 C. Electrocatalysts were characterized by X-Ray Diffraction (XRD). Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Energy Dispersive X-Ray Spectroscopy (EDS). Electrocatalysts prepared by mechanical alloying showed a homogeneously dispersed agglomeration of particles with nano metric size. Electrocatalysts obtained by CVD showed, in some cases, non uniform films, with particles of nano metric size, as well. The electrocatalytic performance was evaluated by using the Rotating Disk Electrode technique (RDE). Electrocatalysts prepared by MA showed higher activity than those obtained by CVD. All electrocatalysts were evaluated in alkaline media. Only electrocatalysts containing Pt were evaluated in acid media, because those materials with Co, Ni and their alloys showed instability in acidic media. Most electrocatalysts followed a mechanism for the ORR producing a certain proportion of H{sub 2}O{sub 2}. All electrocatalysts, exhibited a fair or good electrocatalytic activity in comparison with other similar reported materials. It was found that MA and CVD are appropriate processes to prepare electrocatalysts for the ORR with particles of nano metric size and performing with an acceptable catalytic activity. PtCoNi 70-23-7% by MA and PtCoNi-CVD electrocatalysts showed the highest activity in alkaline media, while in acidic

  11. Catalytic CVD of SWCNTs at Low Temperatures and SWCNT Devices

    Science.gov (United States)

    Seidel, Robert; Liebau, Maik; Unger, Eugen; Graham, Andrew P.; Duesberg, Georg S.; Kreupl, Franz; Hoenlein, Wolfgang; Pompe, Wolfgang

    2004-09-01

    New results on the planar growth of single-walled carbon nanotubes (SWCNTs) by catalytic chemical vapor deposition (CVD) at low temperatures will be reported. Optimizing catalyst, catalyst support, and growth parameters yields SWCNTs at temperatures as low as 600 °C. Growth at such low temperatures largely affects the diameter distribution since coalescence of the catalyst is suppressed. A phenomenological growth model will be suggested for CVD growth at low temperatures. The model takes into account surface diffusion and is an alternative to the bulk diffusion based vapor-liquid-solid (VLS) model. Furthermore, carbon nanotubes field effect transistors based on substrate grown SWCNTs will be presented. In these devices good contact resistances could be achieved by electroless metal deposition or metal evaporation of the contacts.

  12. Formation pathway, structural characterization and optimum processing parameters of synthetic topaz – Al{sub 2}SiO{sub 4}(OH,F){sub 2} – by CVD

    Energy Technology Data Exchange (ETDEWEB)

    Trujillo-Vázquez, E., E-mail: evatrujillo87@gmail.com; Pech-Canul, M.I., E-mail: martin.pech@cinvestav.edu.mx

    2015-10-15

    A novel synthesis route for topaz (Al{sub 2}SiO{sub 4}(OH,F){sub 2}) by chemical vapor deposition (CVD) using Na{sub 2}SiF{sub 6} as solid precursor was developed. Synthesis tests were conducted with and without a flow of nitrogen, positioning the Al(OH){sub 3} substrate at 0° and 90° with respect to the gas flow direction, at 700 and 750 °C, for 60 and 90 min, respectively. It was found that topaz is synthesized through two pathways, directly and indirectly, involving a series of endothermic and exothermic, heterogeneous and homogeneous reactions between Al(OH){sub 3} and SiF{sub 4}(g). Analytical structural determination confirmed existence of orthorhombic polycrystals with lattice parameters of a =4.6558 Å, b=8.8451 Å and c=8.4069 Å. According to ANOVA, while temperature, time and interaction of substrate angular position with atmosphere (P×A) are the parameters that most significantly influence the variability in the amount of topaz formed – equivalent contributions of 31% – topaz lattice parameters are mostly impacted by the same factors (T, t, P, A), but without the interaction factor. The projected amount of topaz is in good agreement with that obtained in confirmation tests under optimal conditions: Al(OH){sub 3} substrate compact placed at 0°, treated at 750 °C for 90 min in the absence of N{sub 2}. - Highlights: • Topaz synthesis as a unique phase by CVD, using solid precursor Na{sub 2}SiF{sub 6} is feasible. • Two pathways, a series of endothermic/exothermic, heterogeneous/homogeneous reactions. • Crystal structure, orthorhombic polycrystals: a =4.6558 Å, b=8.8451 Å, c=8.4069 Å. • Anova: amount of topaz formed and lattice parameters are impacted by same factors. • Projection of topaz quantity in good agreement with those from confirmation tests.

  13. A design of experiments investigation of the effects of synthesis conditions on the quality of CVD graphene

    Science.gov (United States)

    Shanmugam, Ramakrishnan; Rangarajan, Murali; Devanathan, Sriram; Sathe, Vasant G.; Senthilkumar, R.; Kothurkar, Nikhil K.

    2016-12-01

    Control over quality of graphene and the number of layers is vital for various applications. This is the first methodical report which quantitatively relates the process conditions in the chemical vapor deposition (CVD) of graphene with crystallinity and number of graphene layers, using a design of experiments approach. This report investigates the effects of three vital synthesis parameters namely (i) carbon source (benzene, naphthalene and anthracene) (ii) synthesis temperature and (iii) mass flow rate of the carbon source, on the crystallinity and the number of layers of graphene, as inferred through micro-Raman analysis. These results give a preliminary indication of how the quality of graphene synthesized through CVD could be controlled. These results throw light on further experiments, simulations, and analysis needed to precisely determine how to control the synthesis of graphene.

  14. Understanding processes affecting mineral deposits in humid environments

    Science.gov (United States)

    Seal, Robert R., II; Ayuso, Robert A.

    2011-01-01

    Recent interdisciplinary studies by the U.S. Geological Survey have resulted in substantial progress toward understanding the influence that climate and hydrology have on the geochemical signatures of mineral deposits and the resulting mine wastes in the eastern United States. Specific areas of focus include the release, transport, and fate of acid, metals, and associated elements from inactive mines in temperate coastal areas and of metals from unmined mineral deposits in tropical to subtropical areas; the influence of climate, geology, and hydrology on remediation options for abandoned mines; and the application of radiogenic isotopes to uniquely apportion source contributions that distinguish natural from mining sources and extent of metal transport. The environmental effects of abandoned mines and unmined mineral deposits result from a complex interaction of a variety of chemical and physical factors. These include the geology of the mineral deposit, the hydrologic setting of the mineral deposit and associated mine wastes, the chemistry of waters interacting with the deposit and associated waste material, the engineering of a mine as it relates to the reactivity of mine wastes, and climate, which affects such factors as temperature and the amounts of precipitation and evapotranspiration; these factors, in turn, influence the environmental behavior of mineral deposits. The role of climate is becoming increasingly important in environmental investigations of mineral deposits because of the growing concerns about climate change.

  15. Chemical reactivity of CVC and CVD SiC with UO{sub 2} at high temperatures

    Energy Technology Data Exchange (ETDEWEB)

    Silva, Chinthaka M., E-mail: silvagw@ornl.gov [Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831 (United States); Katoh, Yutai [Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831 (United States); Voit, Stewart L. [Fusion and Materials for Nuclear Systems Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831 (United States); Snead, Lance L. [Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831 (United States)

    2015-05-15

    Two types of silicon carbide (SiC) synthesized using two different vapor deposition processes were embedded in UO{sub 2} pellets and evaluated for their potential chemical reaction with UO{sub 2}. While minor reactivity between chemical-vapor-composited (CVC) SiC and UO{sub 2} was observed at comparatively low temperatures of 1100 and 1300 °C, chemical-vapor-deposited (CVD) SiC did not show any such reactivity. However, both CVD and CVC SiCs showed some reaction with UO{sub 2} at a higher temperature (1500 °C). Elemental maps supported by phase maps obtained using electron backscatter diffraction indicated that CVC SiC was more reactive than CVD SiC at 1500 °C. Furthermore, this investigation indicated the formation of uranium carbides and uranium silicide chemical phases such as UC, USi{sub 2}, and U{sub 3}Si{sub 2} as a result of SiC reaction with UO{sub 2}.

  16. Leakage current measurements of a pixelated polycrystalline CVD diamond detector

    OpenAIRE

    Zain, R.M.; Maneuski, D.; O'Shea, V.; Bates, R.; Blue, A.; Cunnigham, L.; Stehl, C.; Berderman, E.; Rahim, R. A.

    2013-01-01

    Diamond has several desirable features when used as a material for radiation detection. With the invention of synthetic growth techniques, it has become feasible to look at developing diamond radiation detectors with reasonable surface areas. Polycrystalline diamond has been grown using a chemical vapour deposition (CVD) technique by the University of Augsburg and detector structures fabricated at the James Watt Nanofabrication Centre (JWNC) in the University of Glasgow in order to produce pi...

  17. THz-conductivity of CVD graphene on different substrates

    OpenAIRE

    Gabriel Cortés, Daniel; Sempere, Bernat; Colominas, Carles; Ferrer Anglada, Núria

    2015-01-01

    Optoelectronic properties of CVD graphene are charac-terized over a wide frequency range: THz, IR, visible and near-UV. We used Raman spectroscopy to characterize the synthesized graphene films. All graphene layers were deposited on various substrates, some ones transparent or flexible, such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), quartz and silicon. Transmission Terahertz time-domain spectroscopy (THz-TDS) method, in the range from 100 GHz to 3 THz, is used to an...

  18. The stratigraphy, depositional processes, and environment of the late Pleistocene Polallie-period deposits at Mount Hood Volcano, Oregon, USA

    Science.gov (United States)

    Thouret, Jean-Claude

    2005-08-01

    The Polallie eruptive period of Mt. Hood, Oregon, is the last major episode of eruption and dome growth, before the late Holocene activity which was centered at Crater Rock. A volume of 4-8 km 3 of Polallie deposits forms an apron of ca. 60 km 2 on the east, northeast and southeast flanks. The Polallie deposits can be divided, stratigraphically, into four groups: Group I rockslide avalanche and pyroclastic-flow deposits; Group II debris-flow and pyroclastic-flow deposits that suggest some explosive activity and remobilization of pyroclastic debris in a glacial environment; Group III block-and-ash flow deposits that attest to summit dome growth; Group IV alternating debris-flow deposits, glacial sediments, and reworked pyroclastic-flow deposits that indicate a decrease in dome activity and an increase in erosion and transport. Group III clearly indicates frequent episodes of dome growth and collapse, whereas Groups II and IV imply increasing erosion and, conversely, decreasing volcanic activity. The Polallie period occurred in the late Pleistocene during and just after the last Alpine glaciation, which is named Evans Creek in the Cascade Range. According to four K-Ar age dates on lava flows interbedded with Polallie deposits and to published minimum 14C ages on tephra and soils overlying these deposits, the Polallie period had lasted 15,000-22,000 years between 28-34 ka and 12-13 ka. From stratigraphic subdivisions, sedimentary lithofacies and features and from the grain-size and geochemical data, we infer that the Polallie depositional record is a result of the interplay of several processes acting during a long-lasting period of dome growth and destruction. The growth of several domes near the present summit was intermittent, because each group of sediments encompasses primary (pyroclastic) and secondary (volcaniclastic and epiclastic) deposition. Direct deposition of primary material has occurred within intervals of erosion that have probably included meltwater

  19. Competition of silene/silylene chemistry with free radical chain reactions using 1-methylsilacyclobutane in the hot-wire chemical vapor deposition process.

    Science.gov (United States)

    Badran, I; Forster, T D; Roesler, R; Shi, Y J

    2012-10-18

    The gas-phase reaction chemistry of using 1-methylsilacyclobutane (MSCB) in the hot-wire chemical vapor deposition (CVD) process has been investigated by studying the decomposition of MSCB on a heated tungsten filament and subsequent gas-phase reactions in a reactor. Three pathways exist to decompose MSCB on the filament to form ethene/methylsilene, propene/methylsilylene, and methyl radicals. The activation energies for forming propene and methyl radical, respectively, are determined to be 68.7 ± 1.3 and 46.7 ± 2.5 kJ·mol(-1), which demonstrates the catalytic nature of the decomposition. The secondary gas-phase reactions in the hot-wire CVD reactor are characterized by the competition between a free radical chain reaction and the cycloaddition of silene reactive species produced either from the primary decomposition of MSCB on the filament or the isomerization of silylene species. At lower filament temperatures of 1000-1100 °C and short reaction time (t ≤ 15 min), the free radical chain reaction is equally important as the silene chemistry. With increasing filament temperature and reaction time, silene chemistry predominates.

  20. Appropriate deposition parameters for formation of fcc Co-Ni alloy nanowires during electrochemical deposition process

    Science.gov (United States)

    Mukhtar, Aiman; Shahzad Khan, Babar; Mehmood, Tahir

    2016-12-01

    The effect of deposition potential on the crystal structure and composition of Co-Ni alloy nanowires is studied by XRD, FE-SEM and EDX. The alloy nanowires deposited at -3.2 V are metastable fcc phase Co-Ni. The alloy nanowires deposited at -1.8 V are hcp phase Co-Ni. The formation of the metastable fcc alloy nanowires can be attributed to smaller critical clusters formed at the high potential as the smaller critical clusters favor fcc structure because of the significant surface energy effect. The content of Co inside nanowires increases with increasing potential. This can be understood by the polarization curves of depositing Co and Ni nanowires, which show that the current density ratio of Ni to Co at low potential has larger value than that at high potential.

  1. Lahars in Java: Initiations, Dynamics, Hazard Assessment And Deposition Processes

    Directory of Open Access Journals (Sweden)

    Franck Lavigne

    2016-05-01

    Full Text Available Lahar has been applied as a general term for rapidly flowing, high-concentration, poorly sorted sediment-laden mixtures of rock debris and water (other than normal streamflow from a volcano. Lahars are one of the most destructive phenomena associated with composite volcanoes, which are dominant in Java Island. Resulting deposits of lahar are poorly sorted, massive, made up of clasts (chiefly of volcanic composition, that generally include a mud-poor matrix. The aim of this research is threefold: to discuss the initiation of lahars occurrences, their dynamics, to assess the hazard and to analyse the deposition. Lahars are either a direct result of eruptive activity or not temporally related to eruptions. Syn-eruptive lahars may result from the transformation on pyroclastic flows or debris avalanches which transform to aqueous flows (e.g. at Papandayan in November 2002; They may be also generated through lake outburst or breaching (e.g. at Kelut in 1909 or 1966, and through removal of pyroclastic debris by subsequent heavy rainstorms. Post-eruptive lahar occurs during several years after an eruption. At Merapi, lahars are commonly rain-triggered by rainfalls having an average intensity of about 40 mm in 2 hours. Most occur during the rainy season from November to April. Non-eruptive lahars are flows generated without eruptive activity, particularly in the case of a debris avalanche or a lake outburst (e.g., Kelut. A lahar may include one or more discrete flow processes and encompass a variety of rheological flow types and flow transformations. As such, lahars encompass a continuum between debris flows and hyperconcentrated flows, as observed at Merapi, Kelut and Semeru volcanoes. Debris flows, with water contents ranging from 10 to no more than about 25% weight, are non-newtonian fluids that move as fairly coherent masses in what is thought to be predominantly laminar fashion. However, the relative importance of laminar versus turbulent regime is

  2. Process simulation for advanced composites production

    Energy Technology Data Exchange (ETDEWEB)

    Allendorf, M.D.; Ferko, S.M.; Griffiths, S. [Sandia National Labs., Livermore, CA (United States)] [and others

    1997-04-01

    The objective of this project is to improve the efficiency and lower the cost of chemical vapor deposition (CVD) processes used to manufacture advanced ceramics by providing the physical and chemical understanding necessary to optimize and control these processes. Project deliverables include: numerical process models; databases of thermodynamic and kinetic information related to the deposition process; and process sensors and software algorithms that can be used for process control. Target manufacturing techniques include CVD fiber coating technologies (used to deposit interfacial coatings on continuous fiber ceramic preforms), chemical vapor infiltration, thin-film deposition processes used in the glass industry, and coating techniques used to deposit wear-, abrasion-, and corrosion-resistant coatings for use in the pulp and paper, metals processing, and aluminum industries.

  3. Numerical simulations of rarefied gas flows in thin film processes

    NARCIS (Netherlands)

    Dorsman, R.

    2007-01-01

    Many processes exist in which a thin film is deposited from the gas phase, e.g. Chemical Vapor Deposition (CVD). These processes are operated at ever decreasing reactor operating pressures and with ever decreasing wafer feature dimensions, reaching into the rarefied flow regime. As numerical

  4. Numerical simulations of rarefied gas flows in thin film processes

    NARCIS (Netherlands)

    Dorsman, R.

    2007-01-01

    Many processes exist in which a thin film is deposited from the gas phase, e.g. Chemical Vapor Deposition (CVD). These processes are operated at ever decreasing reactor operating pressures and with ever decreasing wafer feature dimensions, reaching into the rarefied flow regime. As numerical simulat

  5. Low temperature growth of diamond films on optical fibers using Linear Antenna CVD system

    Science.gov (United States)

    Ficek, M.; Drijkoningen, S.; Karczewski, J.; Bogdanowicz, R.; Haenen, K.

    2016-01-01

    It is not trivial to achieve a good quality diamond-coated fibre interface due to a large difference in the properties and composition of the diamond films (or use coating even) and the optical fibre material, i.e. fused silica. One of the biggest problems is the high temperature during the deposition which influences the optical fibre or optical fibre sensor structure (e.g. long-period gratings (LPG)). The greatest advantage of a linear antenna microwave plasma enhanced chemical vapor deposition system (LA MW CVD) is the fact that it allows to grow the diamond layers at low temperature (below 300°C) [1]. High quality nanocrystalline diamond (NCD) thin films with thicknesses ranging from 70 nm to 150 nm, were deposited on silicon, glass and optical fibre substrates [2]. Substrates pretreatment by dip-coating and spin coating process with a dispersion consisting of detonation nanodiamond (DND) in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) has been applied. During the deposition process the continuous mode of operation of the LA MW CVD system was used, which produces a continuous wave at a maximum power of 1.9 kW (in each antenna). Diamond films on optical fibres were obtained at temperatures below 350°C, providing a clear improvement of results compared to our earlier work [3]. The samples were characterized by scanning electron microscopy (SEM) imaging to investigate the morphology of the nanocrystalline diamond films. The film growth rate, film thickness, and optical properties in the VIS-NIR range, i.e. refractive index and extinction coefficient will be discussed based on measurements on reference quartz plates by using spectroscopic ellipsometry (SE).

  6. UV optical properties of thin film oxide layers deposited by different processes.

    Science.gov (United States)

    Pellicori, Samuel F; Martinez, Carol L

    2011-10-01

    UV optical properties of thin film layers of compound and mixed oxide materials deposited by different processes are presented. Japan Electron Optics Laboratory plasma ion assisted deposition (JEOL PIAD), electron beam with and without IAD, and pulsed DC magnetron sputtering were used. Comparisons are made with published deposition process data. Refractive indices and absorption values to as short as 145 nm were measured by spectroscopic ellipsometry (SE). Electronic interband defect states are detected that are deposition-process dependent. SE might be effective in identifying UV optical film quality, especially in defining processes and material composition beneficial for high-energy excimer laser applications and environments requiring stable optical properties.

  7. Analysis of Fiber deposition using Automatic Image Processing Method

    Science.gov (United States)

    Belka, M.; Lizal, F.; Jedelsky, J.; Jicha, M.

    2013-04-01

    Fibers are permanent threat for a human health. They have an ability to penetrate deeper in the human lung, deposit there and cause health hazards, e.glung cancer. An experiment was carried out to gain more data about deposition of fibers. Monodisperse glass fibers were delivered into a realistic model of human airways with an inspiratory flow rate of 30 l/min. Replica included human airways from oral cavity up to seventh generation of branching. Deposited fibers were rinsed from the model and placed on nitrocellulose filters after the delivery. A new novel method was established for deposition data acquisition. The method is based on a principle of image analysis. The images were captured by high definition camera attached to a phase contrast microscope. Results of new method were compared with standard PCM method, which follows methodology NIOSH 7400, and a good match was found. The new method was found applicable for evaluation of fibers and deposition fraction and deposition efficiency were calculated afterwards.

  8. Analysis of Fiber deposition using Automatic Image Processing Method

    Directory of Open Access Journals (Sweden)

    Jicha M.

    2013-04-01

    Full Text Available Fibers are permanent threat for a human health. They have an ability to penetrate deeper in the human lung, deposit there and cause health hazards, e.glung cancer. An experiment was carried out to gain more data about deposition of fibers. Monodisperse glass fibers were delivered into a realistic model of human airways with an inspiratory flow rate of 30 l/min. Replica included human airways from oral cavity up to seventh generation of branching. Deposited fibers were rinsed from the model and placed on nitrocellulose filters after the delivery. A new novel method was established for deposition data acquisition. The method is based on a principle of image analysis. The images were captured by high definition camera attached to a phase contrast microscope. Results of new method were compared with standard PCM method, which follows methodology NIOSH 7400, and a good match was found. The new method was found applicable for evaluation of fibers and deposition fraction and deposition efficiency were calculated afterwards.

  9. Dosimetric characterization of CVD diamonds irradiated with 62 MeV proton beams

    Energy Technology Data Exchange (ETDEWEB)

    Cirrone, G.A.P. [Laboratori Nazionali del Sud, INFN, Catania (Italy)]. E-mail: cirrone@lns.infn.it; Cuttone, G. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Lo Nigro, S. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Dipartimento di Fisica ed Astronomia, Universita di Catania (Italy); CSFNSM Centro Siciliano di Fisica Nucleare e Struttura della MAteria, Catania (Italy); Mongelli, V. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Scuola di Specializzazione in Fisica Sanitaria, Universita di Catania (Italy); CSFNSM Centro Siciliano di Fisica Nucleare e Struttura della MAteria, Catania (Italy); Raffaele, L. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Sabini, M.G. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Azienda Ospedaliera Cannizzaro, Catania (Italy); Valastro, L. [Laboratori Nazionali del Sud, INFN, Catania (Italy); Scuola di Specializzazione in Fisica Sanitaria, Universita di Catania (Italy); Bucciolini, M. [Dipartimento di Fisiopatologia Clinica, Universita di Florence (Italy); Onori, S. [Istituto Superiore di Sanita, Rome (Italy)

    2005-10-21

    Diamond is potentially a very suitable material for use as on-line radiation dosimeter. Recent advances in the synthesis of polycrystalline diamond by chemical vapor deposition (CVD) techniques have produced material with electronic properties suitable for dosimetry applications. In this work the possibility to use a segmented commercial CVD detector in the dosimetry of proton beams has been investigated. The response as function of dose, dose rate, the priming and the rise time have been investigated thoroughly. This study shows the suitability of CVD diamond for dosimetry of clinical 62 MeV proton beams.

  10. Radiation Hardness and Linearity Studies of CVD Diamonds

    CERN Document Server

    Behnke, T; Ghodbane, N; Imhof, A

    2003-01-01

    We report on the behavior of CVD diamonds under intense electromagnetic radiation and on the response of the detector to high density of deposited energy. Diamonds have been found to remain unaffected after doses of 10 MGy of MeV-range photons and the diamond response to energy depositions of up to 250 GeV/cm^3 has been found to be linear to better than 2 %. These observations make diamond an attractive detector material for a calorimeter in the very forward region of the detector proposed for TESLA.

  11. CVD of pure copper films from amidinate precursor

    OpenAIRE

    2009-01-01

    Copper(I) amidinate [Cu(i-Pr-Me-AMD)]2 was investigated to produce copper films in conventional low pressure chemical vapor deposition (CVD) using hydrogen as reducing gas-reagent. Copper films were deposited on steel, silicon, and SiO2/Si substrates in the temperature range 200–350°C at a total pressure of 1333 Pa. The growth rate on steel follows the surface reaction between atomic hydrogen and the entire precursor molecule up to 240°C. A significant increase of the growth rate at tempera...

  12. Chemical Vapor Deposited Zinc Sulfide. SPIE Press Monograph

    Energy Technology Data Exchange (ETDEWEB)

    McCloy, John S.; Tustison, Randal W.

    2013-04-22

    Zinc sulfide has shown unequaled utility for infrared windows that require a combination of long-wavelength infrared transparency, mechanical durability, and elevated-temperature performance. This book reviews the physical properties of chemical vapor deposited ZnS and their relationship to the CVD process that produced them. An in-depth look at the material microstructure is included, along with a discussion of the material's optical properties. Finally, because the CVD process itself is central to the development of this material, a brief history is presented.

  13. Contact resistance study of various metal electrodes with CVD graphene

    Science.gov (United States)

    Gahoi, Amit; Wagner, Stefan; Bablich, Andreas; Kataria, Satender; Passi, Vikram; Lemme, Max C.

    2016-11-01

    In this study, the contact resistance of various metals to chemical vapor deposited (CVD) monolayer graphene is investigated. Transfer length method (TLM) structures with varying channel widths and separation between contacts have been fabricated and electrically characterized in ambient air and vacuum condition. Electrical contacts are made with five metals: gold, nickel, nickel/gold, palladium and platinum/gold. The lowest value of 92 Ω μm is observed for the contact resistance between graphene and gold, extracted from back-gated devices at an applied back-gate bias of -40 V. Measurements carried out under vacuum show larger contact resistance values when compared with measurements carried out in ambient conditions. Post processing annealing at 450 °C for 1 h in argon-95%/hydrogen-5% atmosphere results in lowering the contact resistance value which is attributed to the enhancement of the adhesion between metal and graphene. The results presented in this work provide an overview for potential contact engineering for high performance graphene-based electronic devices.

  14. Thermoelectric properties of CVD grown large area graphene

    Science.gov (United States)

    Sherehiy, Andriy; Jayasinghe, Ruwantha; Stallard, Robert; Sumanasekera, Gamini; Sidorov, Anton; Benjamin, Daniel; Jiang, Zhigang; Yu, Qingkai; Wu, Wei; Bao, Jiming; Liu, Zhihong; Pei, Steven; Chen, Yong

    2010-03-01

    The thermoelectric power (TEP) of CVD (Chemical Vapor Deposition) grown large area graphene transferred onto a Si/SiO2 substrate was measured by simply attaching two miniature thermocouples and a resistive heater. Availability of such large area graphene facilitates straight forward TEP measurement without the use of any microfabrication processes. All investigated graphene samples showed a positive TEP ˜ + 30 μV/K in ambient conditions and saturated at a negative value as low as ˜ -75 μV/K after vacuum-annealing at 500 K in a vacuum of ˜10-7 Torr. The observed p-type behavior under ambient conditions is attributed to the oxygen doping, while the n-type behavior under degassed conditions is due to electron doping from SiO2 surface states. It was observed that the sign of the TEP switched from negative to positive for the degassed graphene when exposed to acceptor gases. Conversely, the TEP of vacuum-annealed graphene exposed to the donor gases became even more negative than the TEP of vacuum-annealed sample.

  15. Cold Vacuum Drying (CVD) Set Point Determination

    Energy Technology Data Exchange (ETDEWEB)

    PHILIPP, B.L.

    2000-01-12

    This document provides the calculations used to determine the error of safety class signals used for the CVD process These errors are used with the Parameter limits to arrive at the initial set point. The Safety Class Instrumentation and Control (SCIC) system provides active detection and response to process anomalies that, if unmitigated would result in a safety event. Specifically actuation of the SCIC system includes two portions. The portion which isolates the MCO and initiates the safety-class helium (SCHe) purge, and the portion which detects and stops excessive heat input to the MCO on high tempered water MCO inlet temperature. For the MCO isolation and purge the SCIC receives signals from MCO pressure (both positive pressure and vacuum) helium flow rate, bay high temperature switches, seismic trips and time under vacuum trips.

  16. The effect of alkaline doped catalysts on the CVD synthesis of carbon nanotubes

    DEFF Research Database (Denmark)

    Nemeth, Krisztian; Nemeth, Zoltan; Fejes, Dora;

    2011-01-01

    The aim of this work was to develop new doped catalysts for chemical vapour deposition (CVD) synthesis in order to increase the quantity and quality of carbon nanotubes (CNTs). Doping compounds such as CsBr, CsCl, KBr and KCl were used to reach higher carbon deposit and carbon yield. The amount o...

  17. Oxidative chemical vapor deposition of polyaniline thin films.

    Science.gov (United States)

    Smolin, Yuriy Y; Soroush, Masoud; Lau, Kenneth K S

    2017-01-01

    Polyaniline (PANI) is synthesized via oxidative chemical vapor deposition (oCVD) using aniline as monomer and antimony pentachloride as oxidant. Microscopy and spectroscopy indicate that oCVD processing conditions influence the PANI film chemistry, oxidation, and doping level. Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS) indicate that a substrate temperature of 90 °C is needed to minimize the formation of oligomers during polymerization. Lower substrate temperatures, such as 25 °C, lead to a film that mostly includes oligomers. Increasing the oxidant flowrate to nearly match the monomer flowrate favors the deposition of PANI in the emeraldine state, and varying the oxidant flowrate can directly influence the oxidation state of PANI. Changing the reactor pressure from 700 to 35 mTorr does not have a significant effect on the deposited film chemistry, indicating that the oCVD PANI process is not concentration dependent. This work shows that oCVD can be used for depositing PANI and for effectively controlling the chemical state of PANI.

  18. Nitrogen deposition to the United States: distribution, sources, and processes

    Directory of Open Access Journals (Sweden)

    L. Zhang

    2012-01-01

    Full Text Available We simulate nitrogen deposition over the US in 2006–2008 by using the GEOS-Chem global chemical transport model at 1/2° × 2/3° horizontal resolution over North America and adjacent oceans. US emissions of NOx and NH3 in the model are 6.7 and 2.9 Tg N a−1 respectively, including a 20% natural contribution for each. Ammonia emissions are a factor of 3 lower in winter than summer, providing a good match to US network observations of NHx (≡NH3 gas + ammonium aerosol and ammonium wet deposition fluxes. Model comparisons to observed deposition fluxes and surface air concentrations of oxidized nitrogen species (NOy show overall good agreement but excessive wintertime HNO3 production over the US Midwest and Northeast. This suggests a model overestimate N2O5 hydrolysis in aerosols, and a possible factor is inhibition by aerosol nitrate. Model results indicate a total nitrogen deposition flux of 6.5 Tg N a−1 over the contiguous US, including 4.2 as NOy and 2.3 as NHx. Domestic anthropogenic, foreign anthropogenic, and natural sources contribute respectively 78%, 6%, and 16% of total nitrogen deposition over the contiguous US in the model. The domestic anthropogenic contribution generally exceeds 70% in the east and in populated areas of the west, and is typically 50–70% in remote areas of the west. Total nitrogen deposition in the model exceeds 10 kg N ha−1 a−1 over 35% of the contiguous US.

  19. Nitrogen deposition to the United States: distribution, sources, and processes

    Directory of Open Access Journals (Sweden)

    L. Zhang

    2012-05-01

    Full Text Available We simulate nitrogen deposition over the US in 2006–2008 by using the GEOS-Chem global chemical transport model at 1/2°×2/3° horizontal resolution over North America and adjacent oceans. US emissions of NOx and NH3 in the model are 6.7 and 2.9 Tg N a−1 respectively, including a 20% natural contribution for each. Ammonia emissions are a factor of 3 lower in winter than summer, providing a good match to US network observations of NHx (≡NH3 gas + ammonium aerosol and ammonium wet deposition fluxes. Model comparisons to observed deposition fluxes and surface air concentrations of oxidized nitrogen species (NOy show overall good agreement but excessive wintertime HNO3 production over the US Midwest and Northeast. This suggests a model overestimate N2O5 hydrolysis in aerosols, and a possible factor is inhibition by aerosol nitrate. Model results indicate a total nitrogen deposition flux of 6.5 Tg N a−1 over the contiguous US, including 4.2 as NOy and 2.3 as NHx. Domestic anthropogenic, foreign anthropogenic, and natural sources contribute respectively 78%, 6%, and 16% of total nitrogen deposition over the contiguous US in the model. The domestic anthropogenic contribution generally exceeds 70% in the east and in populated areas of the west, and is typically 50–70% in remote areas of the west. Total nitrogen deposition in the model exceeds 10 kg N ha−1 a−1 over 35% of the contiguous US.

  20. Nanostructured Ta{sub x}C interlayer synthesized via double glow plasma surface alloying process for diamond deposition on cemented carbide

    Energy Technology Data Exchange (ETDEWEB)

    Rong, Wolong; Hei, Hongjun; Zhong, Qiang; Shen, Yanyan; Liu, Xiaoping; Wang, Xin; Zhou, Bing; He, Zhiyong, E-mail: hezhiyong@tyut.edu.cn; Yu, Shengwang, E-mail: yushengwang@tyut.edu.cn

    2015-12-30

    Graphical abstract: - Highlights: • Ta{sub x}C interlayer was creatively obtained on WC–Co by DG-PSA for diamond deposition. • The interlayer with a flower-shaped surface consisted of Ta{sub 2}C and TaC nanocrystal. • Ta{sub x}C interlayer had a superior adherence because of gradual element distributions. • The samples’ surface microhardness is increased caused by nanostructured interlayer. • Ta{sub x}C interlayer improved diamond adhesion on WC–Co by suppressing Co diffusion. - Abstract: The aim in this work was to improve the adhesion of diamond coating with pre-deposition of a Ta{sub x}C interlayer on cemented carbide (WC–Co) substrate by double glow plasma surface alloying technique. The following deposition of diamond coating on the interlayer was performed in a microwave plasma chemical vapor deposition (MPCVD) reactor. Ta{sub x}C interlayer with an inner diffusion layer and an outer deposition layer was composed of Ta{sub 2}C and TaC nanocrystalline, and it exhibited a special compact surface morphology formed of flower-shaped pits. As the gradual element distributions existed in the diffusion layer, the interlayer displayed a superior adherence to the substrate with significantly enhanced surface microhardness to the original substrate. After CVD process, the preferred orientation of TaC changed from (2 2 2) to (2 0 0) plane, and a uniform and tense diamond coating with adhesion referred to class HF 2 at least (Verein Deutscher Ingenieure 3198 norm) was obtained on the interlayered substrate. It indicated that the diffusion of Co was effectively inhibited by the formation of Ta{sub x}C diffusion–deposition interlayer. The Ta{sub x}C interlayer is most likely to improve the performance of diamond coatings used in cutting tools.

  1. The adsorptive-kinetic model of in-situ phosphorus doped film polysilicon deposition process

    Directory of Open Access Journals (Sweden)

    Nalivaiko O. Yu.

    2009-11-01

    Full Text Available The investigation of deposition kinetics of in-situ phosphorus doped polysilicon films has been performed. The adsorptive-kinetic model of in-situ phosphorus doped polysilicon deposition has been developed. The values of heterogeneous reaction constants and constants, which describe the desorption process for monosilane and phosphine, have been defined. The optimal process conditions, which provide the acceptable deposition rate, thickness uniformity, high doping level and conformal step coverage, have been founded.

  2. Processing Research on Chemically Vapor Deposited Silicon Nitride.

    Science.gov (United States)

    1979-12-01

    7 A-A79 328 GENERAL ELECTR IC Co PHILADELPH IA PA RE-ENTRY AND ENV--ETC F/S 3/ PROCESING RESEARCH ON CHEMICALLY VAPR DEPOSITED SILICON HITRI ETCIU) I...NH)2] x-- .Si3N 4 as well as NH 3 2) 3SiCI + 6H --- 3i + 6 HC - Si N 4 2 (V,l1) 3 4 pressure may play a part in shifting the deposition sequence from...hot-wall reactor should be further refined with em- phasis on the formation of figured geometries (hemispherical and ogive shells). As part of this

  3. VO{sub x} effectively doping CVD-graphene for transparent conductive films

    Energy Technology Data Exchange (ETDEWEB)

    Ji, Qinghua; Shi, Liangjing [State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050 (China); Zhang, Qinghong [State Key Laboratory of Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering, Donghua University, 2999 North Renmin Road, Shanghai 201620 (China); Wang, Weiqi; Zheng, Huifeng [State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050 (China); Zhang, Yuzhi [The Key Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences,1295 Dingxi Road, Shanghai 200050 (China); Liu, Yangqiao, E-mail: yqliu@mail.sic.ac.cn [State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050 (China); Sun, Jing, E-mail: jingsun@mail.sic.ac.cn [State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050 (China)

    2016-11-30

    Highlights: • Doping process operated easily. • Sheet resistance decreased efficiently after doping. • Sheet resistance of doped graphene is stable after exposed in the air. • Mechanism of doping process is studied. - Abstract: Chemical vapor deposition(CVD)-synthesized graphene is potentially an alternative for tin-doped indium oxide (ITO) transparent conductive films (TCFs), however its sheet resistance is still too high to meet many demands. Vanadium oxide has been widely applied as smart window materials, however, no study has been reported to use it as dopant to improve the conductivity of graphene TCFs. In this study, we firstly reported that VO{sub x} doping can effectively lower the sheet resistance of CVD-graphene films while keeping its good optical properties, whose transmittance is as high as 86–90%. The optimized VO{sub x}-doped graphene exhibits a sheet resistance as low as 176 Ω/□, which decreases by 56% compared to the undoped graphene films. The doping process is convenient, stable, economical and easy to operate. What is more, VO{sub x} can effectively increase the work function(WF) of the film, making it more appropriate for use in solar cells. The evolution of the VO{sub x} species annealed at different temperatures below 400 °C has been detailed studied for the first time, based on which the doping mechanism is proposed. The prepared VO{sub x} doped graphene is expected to be a promising candidate for transparent conductive film purposes.

  4. Chemical vapor deposition coating for micromachines

    Energy Technology Data Exchange (ETDEWEB)

    MANI,SEETHAMBAL S.; FLEMING,JAMES G.; SNIEGOWSKI,JEFFRY J.; DE BOER,MAARTEN P.; IRWIN,LAWRENCE W.; WALRAVEN,JEREMY A.; TANNER,DANELLE M.; DUGGER,MICHAEL T.

    2000-04-21

    Two major problems associated with Si-based MEMS devices are stiction and wear. Surface modifications are needed to reduce both adhesion and friction in micromechanical structures to solve these problems. In this paper, the authors will present a process used to selectively coat MEMS devices with tungsten using a CVD (Chemical Vapor Deposition) process. The selective W deposition process results in a very conformal coating and can potentially solve both stiction and wear problems confronting MEMS processing. The selective deposition of tungsten is accomplished through silicon reduction of WF{sub 6}, which results in a self-limiting reaction. The selective deposition of W only on polysilicon surfaces prevents electrical shorts. Further, the self-limiting nature of this selective W deposition process ensures the consistency necessary for process control. Selective tungsten is deposited after the removal of the sacrificial oxides to minimize process integration problems. This tungsten coating adheres well and is hard and conducting, requirements for device performance. Furthermore, since the deposited tungsten infiltrates under adhered silicon parts and the volume of W deposited is less than the amount of Si consumed, it appears to be possible to release stuck parts that are contacted over small areas such as dimples. Results from tungsten deposition on MEMS structures with dimples will be presented. The effect of wet and vapor phase cleanings prior to the deposition will be discussed along with other process details. The W coating improved wear by orders of magnitude compared to uncoated parts. Tungsten CVD is used in the integrated-circuit industry, which makes this approach manufacturable.

  5. CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes.

    Science.gov (United States)

    Ozaydin-Ince, Gozde; Coclite, Anna Maria; Gleason, Karen K

    2012-01-01

    Polymers with their tunable functionalities offer the ability to rationally design micro- and nano-engineered materials. Their synthesis as thin films have significant advantages due to the reduced amounts of materials used, faster processing times and the ability to modify the surface while preserving the structural properties of the bulk. Furthermore, their low cost, ease of fabrication and the ability to be easily integrated into processing lines, make them attractive alternatives to their inorganic thin film counterparts. Chemical vapor deposition (CVD) as a polymer thin-film deposition technique offers a versatile platform for fabrication of a wide range of polymer thin films preserving all the functionalities. Solventless, vapor-phase deposition enable the integration of polymer thin films or nanostructures into micro- and nanodevices for improved performance. In this review, CVD of functional polymer thin films and the polymerization mechanisms are introduced. The properties of the polymer thin films that determine their behavior are discussed and their technological advances and applications are reviewed.

  6. Flexible a-Si:H/nc-Si:H tandem thin film silicon solar cells on plastic substrates with i-layers made by hot-wire CVD

    Energy Technology Data Exchange (ETDEWEB)

    Li, Hongbo; Werf, C.H.M. van der; Rath, J.K. [Utrecht University, Faculty of Science, SID - Physics of Devices, Utrecht (Netherlands); Borreman, A. [Helianthos b.v., Arnhem (Netherlands); Schropp, Ruud E.I.

    2008-08-15

    In this letter we report the result of an a-Si:H/nc-Si:H tandem thin film silicon solar mini-module fabricated on plastic foil containing intrinsic silicon layers made by hot-wire CVD (efficiency 7.4%, monolithically series-connected, aperture area 25 cm{sup 2}). We used the Helianthos cell transfer process. The cells were first deposited on a temporary aluminum foil carrier, which allows the use of the optimal processing temperatures, and then transferred to a plastic foil. This letter reports the characteristics of the flexible solar cells obtained in this manner, and compares the results with those obtained on reference glass substrates. The research focus for implementation of the hot-wire CVD technique for the roll-to-roll process is also discussed. (copyright 2008 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  7. Hot wire chemical vapor deposition: recent progress, present state of the art and competitive opportunities

    NARCIS (Netherlands)

    Schropp, R.E.I.

    2009-01-01

    Hot Wire CVD (also called Catalytic CVD or initiated CVD) is an elegant low pressure deposition technique for the deposition of functional films, both inorganic and organic, based on the decomposition of precursor sources at a heated metallic surface. The conformal deposition of thin films on rigid

  8. X-ray sensitivity measurements on CVD diamond film detectors

    Energy Technology Data Exchange (ETDEWEB)

    Foulon, F.; Pochet, T. [CEA Centre d`Etudes de Saclay, 91 - Gif-sur-Yvette (France). Dept. d`Electronique et d`Instrumentation Nucleaire; Gheeraert, E. [Centre National de la Recherche Scientifique (CNRS), 38 - Grenoble (France)

    1993-12-31

    Microwave chemical vapor deposited (CVD) diamond films have been used to fabricate radiation detectors. The polycrystalline diamond films have a resistivity of 10{sup 12} ohm.cm and carrier mobility and lifetime of about 280 cm{sup 2}/V.s and 530 ps. The detector response to laser pulses (355, 532 and 1064 nm), X-ray flux (15-50 keV) and alpha particles ({sup 241}Am, 5.49 MeV) has been investigated. The response speed of the detector is in the 100 ps range. A sensitivity of about 3 x 10{sup -10} A/V.Gy.s was measured under 50 keV X-ray flux. The detector current response to X-ray flux is almost linear. It is also shown that CVD diamond detectors can be used for alpha particle counting. (authors). 9 figs., 25 refs.

  9. Development of CVD diamond detectors for clinical dosimetry

    Science.gov (United States)

    Piliero, M. A.; Hugtenburg, R. P.; Ryde, S. J. S.; Oliver, K.

    2014-11-01

    The use of chemical vapour deposition (CVD) methods for the manufacture of diamonds could lead to detectors for high-resolution radiotherapy dosimetry that are cheaper and more reproducible than detectors based on natural diamonds. In this work two prototype designs (Diamond Detectors Ltd, Poole) of CVD diamond detectors were considered. The detectors were encapsulated in a water-proof housing in a form-factor that would be suitable for dosimetry measurements in water, as well as solid material phantoms. Stability of the dosimeter over time, the dose-response, dose-rate response and angular-response were examined. The study demonstrated that the detector behaviour conformed with theory in terms of the dose-rate response and had acceptable properties for use in the clinic.

  10. An important atomic process in the CVD growth of graphene: Sinking and up-floating of carbon atom on copper surface

    Energy Technology Data Exchange (ETDEWEB)

    Li, Yingfeng [State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing, 102206 (China); Li, Meicheng, E-mail: mcli@ncepu.edu.cn [State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing, 102206 (China); Su Zhou Institute, North China Electric Power University, Suzhou, 215123 (China); Gu, TianSheng [State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing, 102206 (China); Bai, Fan [School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001 (China); Yu, Yue; Trevor, Mwenya [State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing, 102206 (China); Yu, Yangxin [Department of Chemical Engineering, Tsinghua University, Beijing, 100084 (China)

    2013-11-01

    By density functional theory (DFT) calculations, the early stages of the growth of graphene on copper (1 1 1) surface are investigated. At the very first time of graphene growth, the carbon atom sinks into subsurface. As more carbon atoms are adsorbed nearby the site, the sunken carbon atom will spontaneously form a dimer with one of the newly adsorbed carbon atoms, and the formed dimer will up-float on the top of the surface. We emphasize the role of the co-operative relaxation of the co-adsorbed carbon atoms in facilitating the sinking and up-floating of carbon atoms. In detail: when two carbon atoms are co-adsorbed, their co-operative relaxation will result in different carbon–copper interactions for the co-adsorbed carbon atoms. This difference facilitates the sinking of a single carbon atom into the subsurface. As a third carbon atom is co-adsorbed nearby, it draws the sunken carbon atom on top of the surface, forming a dimer. Co-operative relaxations of the surface involving all adsorbed carbon atoms and their copper neighbors facilitate these sinking and up-floating processes. This investigation is helpful for the deeper understanding of graphene synthesis and the choosing of optimal carbon sources or process.

  11. Particle dry deposition to water surfaces: Processes and consequences

    DEFF Research Database (Denmark)

    Pryor, S.C.; Barthelmie, R.J.

    2000-01-01

    's oceans and seas is most significantly impacted by human activities. More than half of the world's population lives within 100 km of a coast and hence the overwhelming majority of anthropogenic fluxes to aquatic systems occur in the coastal zone. We discuss the particular challenges that arise from...... measurement requirements represent significant barriers to application to measurement of particle dry deposition fluxes although, as discussed, innovative solutions are now becoming available. In the final section, we examine meteorological controls on deposition to the coastal zone. This region of the world...... flux to coastal waters, atmosphere-surface exchange represents a significant component of the total flux and may be particularly critical during the summertime when both the riverine input and ambient nutrient concentrations are often at a minimum. In this chapter, we present an overview...

  12. Laser diagnostics and modeling of plasma assisted CVD. Final technical report

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    Plasma assisted chemical vapor deposition (PACVD) represents a novel approach for utilizing the nonequilibrium effects of reactive plasmas for depositing a wide range of protective hardface coatings that have both wear and erosion application. The nonequilibrium plasma is the heart of this complex system and has the function of generating the reactive molecular fragments (radicals) and atomic species at concentration levels unattainable by other competing processes. It is now widely accepted that such advanced protective hardface coatings materials will play a vital role in the energy technologies of the coming decades, with major applications in diverse areas ranging from aerospace and commercial propulsion systems (jet engines) to automotive components and internal combustion engines, (ceramic heat engines), cutting and machining tools, electronic packaging, thermal management, and possibly room-temperature superconductors. Wear and associated erosion aspects are responsible for an enormous expenditure of energy and fiscal resources in almost all DOE applications. Many of the results from this investigation arc also applicable to other materials processing reactors such as electron beam, PVD, CVD, laser ablation, microwave, high energy cathodic arc, thermal plasma (rf or dc) and combustion spray. These also include the various hybrid systems such as the rf/dc arc as used in Japan for diamond deposition and e-beam PVD deposition of advanced titanium alloy coatings as used at the Paton Institute in Kiev, Ukraine.

  13. Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters

    Science.gov (United States)

    Arjmandi-Tash, Hadi; Allain, Adrien; (Vitto Han, Zheng; Bouchiat, Vincent

    2017-06-01

    We present a novel method for the fabrication of the arrays of suspended micron-sized membranes, based on monolayer pulsed-CVD graphene. Such devices are the source of an efficient integration of graphene nano-electro-mechanical resonators, compatible with production at the wafer scale using standard photolithography and processing tools. As the graphene surface is continuously protected by the same polymer layer during the whole process, suspended graphene membranes are clean and free of imperfections such as deposits, wrinkles and tears. Batch fabrication of 100 μm-long multi-connected suspended ribbons is presented. At room temperature, mechanical resonance of electrostatically-actuated devices show narrow distribution of their characteristic parameters with high quality factor and low effective mass and resonance frequencies, as expected for low stress and adsorbate-free membranes. Upon cooling, a sharp increase of both resonant frequency and quality factor is observed, enabling to extract the thermal expansion coefficient of CVD graphene. Comparison with state-of-the-art graphene NEMS is presented.

  14. Effect of a Balanced Concentration of Hydrogen on Graphene CVD Growth

    Directory of Open Access Journals (Sweden)

    S. Chaitoglou

    2016-01-01

    Full Text Available The extraordinary properties of graphene make it one of the most interesting materials for future applications. Chemical vapor deposition (CVD is the synthetic method that permits obtaining large areas of monolayer graphene. To achieve this, it is important to find the appropriate conditions for each experimental system. In our CVD reactor working at low pressure, important factors appear to be the pretreatment of the copper substrate, considering both its cleaning and its annealing before the growing process. The carbon precursor/hydrogen flow ratio and its modification during the growth are significant in order to obtain large area graphene crystals with few defects. In this work, we have focused on the study of the methane and the hydrogen flows to control the production of single layer graphene (SLG and its growth time. In particular, we observe that hydrogen concentration increases during a usual growing process (keeping stable the methane/hydrogen flow ratio resulting in etched domains. In order to balance this increase, a modification of the hydrogen flow results in the growth of smooth hexagonal SLG domains. This is a result of the etching effect that hydrogen performs on the growing graphene. It is essential, therefore, to study the moderated presence of hydrogen.

  15. Origin, state of the art and some prospects of the diamond CVD

    CERN Document Server

    Spitsyn, B V; Alexenko, A E

    2000-01-01

    A short review on the diamond CVD origin, together with its state of the art and some prospects was given. New hybrid methods of the diamond CVD permit to gain 1.2 to 6 times of growth rate in comparison with ordinary diamond CVD's. Recent results on n-type diamond film synthesis through phosphorus doping in the course of the CVD process are briefly discussed. In comparison with high-pressure diamond synthesis, the CVD processes open new facets of the diamond as ultimate crystal for science and technology evolution. It was stressed that, mainly on the basis of new CVDs of diamond, the properties of natural diamond are not only reproduced, but can be surpassed. As examples, mechanical (fracture resistance), physical (thermal conductivity), and chemical (oxidation stability) properties are mentioned. Some present issues in the field are considered.

  16. Simulation and experimental approach to CVD-FBR aluminide coatings on ferritic steels under steam oxidation

    Energy Technology Data Exchange (ETDEWEB)

    Leal, J. [Universidad Complutense de Madrid, Dep. CC. Materiales e Ingenieria Metalurgica, Avenida Complutense s/n, Facultad de Ciencias Quimicas, 28040 Madrid (Spain); Alcala, G. [Universidad Complutense de Madrid, Dep. CC. Materiales e Ingenieria Metalurgica, Avenida Complutense s/n, Facultad de Ciencias Quimicas, 28040 Madrid (Spain)], E-mail: galcades@yahoo.es; Bolivar, F.J.; Sanchez, L.; Hierro, M.P.; Perez, F.J. [Universidad Complutense de Madrid, Dep. CC. Materiales e Ingenieria Metalurgica, Avenida Complutense s/n, Facultad de Ciencias Quimicas, 28040 Madrid (Spain)

    2008-07-15

    The ferritic steels used to produce structural components for steam turbines are susceptible to strong corrosion and creep damage due to the extreme working conditions pushed to increase the process efficiency and to reduce pollutants release. The response of aluminide coatings on the P-92 ferritic steel, deposited by CVD-FBR, during oxidation in a simulated steam environment was studied. The analyses were performed at 650 deg. C in order to simulate the working conditions of a steam turbine, and 800 deg. C in order to produce a critical accelerated oxidation test. The Thermo-Calc software was used to predict the different solid phases that could be generated during the oxidation process, in both, coated and uncoated samples. In order to validate the thermodynamic results, the oxides scales produced during steam tests were characterized by different techniques such as XRD, SEM and EDS. The preliminary results obtained are discussed in the present work.

  17. Closed-Loop Process Control for Electron Beam Freeform Fabrication and Deposition Processes

    Science.gov (United States)

    Taminger, Karen M. (Inventor); Hafley, Robert A. (Inventor); Martin, Richard E. (Inventor); Hofmeister, William H. (Inventor)

    2013-01-01

    A closed-loop control method for an electron beam freeform fabrication (EBF(sup 3)) process includes detecting a feature of interest during the process using a sensor(s), continuously evaluating the feature of interest to determine, in real time, a change occurring therein, and automatically modifying control parameters to control the EBF(sup 3) process. An apparatus provides closed-loop control method of the process, and includes an electron gun for generating an electron beam, a wire feeder for feeding a wire toward a substrate, wherein the wire is melted and progressively deposited in layers onto the substrate, a sensor(s), and a host machine. The sensor(s) measure the feature of interest during the process, and the host machine continuously evaluates the feature of interest to determine, in real time, a change occurring therein. The host machine automatically modifies control parameters to the EBF(sup 3) apparatus to control the EBF(sup 3) process in a closed-loop manner.

  18. Electrochemically Deposited Nickel Membranes; Process-Microstructure-Property Relationships

    DEFF Research Database (Denmark)

    Jensen, Jens Dahl; Pantleon, Karen; Somers, Marcel A.J.

    2003-01-01

    -type) or without (0-type) the use of the sulphur-containing additive sodium saccharin. Both types of Ni-foils appeared perfectly smooth when investigated with scanning electron microscopy (SEM), while atomic force microscopy (AFM) and transmission electron microscopy (TEM), revealed differences in the surface......-type foils during thin film tensile testing, due to microstructural defects caused by sodium saccharin during deposition. Tensile strengths in the order of 700-1000 MPa were observed - highest for the more ductile 0-type foils. A hardness in the order of 6 GPa (590 HV) was found by nanoindentation. Keywords...

  19. Electrochemically Deposited Nickel Membranes; Process-Microstructure-Property Relationships

    DEFF Research Database (Denmark)

    Jensen, Jens Dahl; Pantleon, Karen; Somers, Marcel A.J.

    2003-01-01

    -type) or without (0-type) the use of the sulphur-containing additive sodium saccharin. Both types of Ni-foils appeared perfectly smooth when investigated with scanning electron microscopy (SEM), while atomic force microscopy (AFM) and transmission electron microscopy (TEM), revealed differences in the surface......-type foils during thin film tensile testing, due to microstructural defects caused by sodium saccharin during deposition. Tensile strengths in the order of 700-1000 MPa were observed - highest for the more ductile 0-type foils. A hardness in the order of 6 GPa (590 HV) was found by nanoindentation. Keywords...

  20. Characteristics of Single-Track and Multi-track Depositions of Stellite by Micro-plasma Transferred Arc Powder Deposition Process

    Science.gov (United States)

    Sawant, Mayur S.; Jain, N. K.

    2017-08-01

    This paper describes the characteristics study of single-track and multi-track deposition of Stellite 6 on AISI 4130 steel substrate by indigenously developed micro-plasma transferred arc powder deposition (μ-PTAPD) process. Deposition height and width, dilution and microstructure have been used to characterize the single-track depositions by studying effects of micro-plasma power, travel speed of worktable and powder mass flow rate on energy consumption per unit traverse length and power consumption per unit powder mass flow rate. Micro-plasma power was found to be the most influential parameter that affects energy and deposition material consumption. Consequently, its influence on micro-hardness and abrasion resistance of multi-track deposition was studied. Results showed that increase in micro-plasma power decreases micro-hardness and scratch hardness number and increases mean value of friction coefficient. Comparison of microstructure and chemical composition of single-track and multi-track depositions revealed that single-track has finer dendritic microstructure than the multi-track deposition. The black colored matrix and white colored dendrites present in the multi-track deposition have higher wt.% of cobalt and less wt.% of chromium than the single-track deposition. Comparison of µ-PTAPD process capabilities with the existing processes for Stellite deposition establishes that it is an energy-efficient, cost-effective and good quality deposition yielding process.

  1. Optical and structural properties of polycrystalline CVD diamond films grown on fused silica optical fibres pre-treated by high-power sonication seeding

    Science.gov (United States)

    Bogdanowicz, R.; Śmietana, M.; Gnyba, M.; Gołunski, Ł.; Ryl, J.; Gardas, M.

    2014-09-01

    In this paper, the growth of polycrystalline chemical vapour deposition (CVD) diamond thin films on fused silica optical fibres has been investigated. The research results show that the effective substrate seeding process can lower defect nucleation, and it simultaneously increases surface encapsulation. However, the growth process on glass requires high seeding density. The effects of suspension type and ultrasonic power were the specific objects of investigation. In order to increase the diamond density, glass substrates were seeded using a high-power sonication process. The highest applied power of sonotrode reached 72 W during the performed experiments. The two, most common diamond seeding suspensions were used, i.e. detonation nanodiamond dispersed in (a) dimethyl sulfoxide and (b) deionised water. The CVD diamond nucleation and growth processes were performed using microwave plasma assisted chemical vapour deposition system. Next, the seeding efficiency was determined and compared using the numerical analysis of scanning electron microscopy images. The molecular composition of nucleated diamond was examined with micro-Raman spectroscopy. The sp3/sp2 band ratio was calculated using Raman spectra deconvolution method. Thickness, roughness, and optical properties of the nanodiamond films in UV-vis wavelength range were investigated by means of spectroscopic ellipsometry. It has been demonstrated that the high-power sonication process can improve the seeding efficiency on glass substrates. However, it can also cause significant erosion defects at the fibre surface. We believe that the proposed growth method can be effectively applied to manufacture the novel optical fibre sensors. Due to high chemical and mechanical resistance of CVD diamond films, deposition of such films on the sensors is highly desirable. This method enables omitting the deposition of an additional adhesion interlayer at the glass-nanocrystalline interface, and thus potentially increases

  2. Study of the deposition process of vinpocetine on the surface of porous silicon

    Science.gov (United States)

    Lenshin, A. S.; Polkovnikova, Yu. A.; Seredin, P. V.

    Currently the most prospective way in pharmacotherapy is the obtaining of nanoparticles involving pharmaceutical substances. Application of porous inorganic materials on the basis of silicon is among the main features in solving of this problem. The present work is concerned with the problem of the deposition of pharmaceutical drug with nootropic activity - vinpocetine - into porous silicon. Silicon nanoparticles were obtained by electrochemical anodic etching of Si plates. The process of vinpocetine deposition was studied in dependence of the deposition time. As a result of the investigations it was found that infrared transmission spectra of porous silicon with the deposited vinpocetine revealed the absorption bands characteristic of vinpocetine substance.

  3. Performance characterization of Ni60-WC coating on steel processed with supersonic laser deposition

    Directory of Open Access Journals (Sweden)

    Fang Luo

    2015-03-01

    Full Text Available Ni60-WC particles are used to improve the wear resistance of hard-facing steel due to their high hardness. An emerging technology that combines laser with cold spraying to deposit the hard-facing coatings is known as supersonic laser deposition. In this study, Ni60-WC is deposited on low-carbon steel using SLD. The microstructure and performance of the coatings are investigated through SEM, optical microscopy, EDS, XRD, microhardness and pin-on-disc wear tests. The experimental results of the coating processed with the optimal parameters are compared to those of the coating deposited using laser cladding.

  4. Effect of process parameters on induction plasma reactive deposition of tungsten carbide from tungsten metal powder

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    Tungsten carbide deposit was made directly from tungsten metal powder through the reaction with methane in radio frequency induction plasma. Effect of major process parameters on the induction plasma reactive deposition of tungsten carbide was studied by optical microscopy, scanning electron microscopy, X-ray diffraction analysis, water displacement method, and microhardness test. The results show that methane flow rate, powder feed rate, particle size, reaction chamber pressure and deposition distance have significant influences on the phase composition, density, and microhardness of the deposit. Extra carbon is necessary to ensure the complete conversion of tungsten metal into the carbide.

  5. Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

    Science.gov (United States)

    Prokaryn, Piotr; Janus, Pawel; Zajac, Jerzy; Sierakowski, Andrzej; Domanski, Krzysztof; Grabiec, Piotr

    2016-11-01

    In this paper we describe the method for monitoring the progress of electrochemical deposition process. The procedure allows to control the deposition of metals as well as conductive polymers on metallic seed layer. The method is particularly useful to very thin layers (1-10 nm) of deposited medium which mechanical or optical methods are troublesome for. In this method deposit is grown on the target and on the test silicon micro-cantilever with a metal pad. Galvanic deposition on the cantilever causes the change of its mass and consequently the change of its resonance frequency. Changes of the frequency is measured with laser vibro-meter then the layer thicknesses can be estimated basing on the cantilever calibration curve. Applying this method for controlling of gold deposition on platinum seed layer, for improving the properties of the biochemical sensors, is described in this paper.

  6. Electroless deposition process for zirconium and zirconium alloys

    Science.gov (United States)

    Donaghy, Robert E.; Sherman, Anna H.

    1981-01-01

    A method is disclosed for preventing stress corrosion cracking or metal embrittlement of a zirconium or zirconium alloy container that is to be coated on the inside surface with a layer of a metal such as copper, a copper alloy, nickel, or iron and used for holding nuclear fuel material as a nuclear fuel element. The zirconium material is etched in an etchant solution, desmutted mechanically or ultrasonically, oxidized to form an oxide coating on the zirconium, cleaned in an aqueous alkaline cleaning solution, activated for electroless deposition of a metal layer and contacted with an electroless metal plating solution. This method provides a boundary layer of zirconium oxide between the zirconium container and the metal layer.

  7. Induktive Randschichthärtung CVD-beschichteter Stähle mit Abschreckung im Gasdüsenfeld

    DEFF Research Database (Denmark)

    Pantleon, Karen; Kessler, Olaf; Hoffmann, Franz

    2000-01-01

    the properties of steel substrates ready for operation. Induction surface hardening is applied to TiN-coated 100Cr6 (AISI 52100) and X155CrVMo12-1 (AISI D2) substrates. In comparison to TiN-42CrMo4(AISI 4140)-compounds it is found, that induction heating to higher temperatures is necessary to harden higher......The properties of hard coatings deposited using CVD-processes are usually excellent. However, high deposition temperatures may negatively influence the properties of steel substrates, especially in the case of low alloyed steels. Therefore, a subsequent heat treatment is necessary to restore...... alloyed steels but these high temperatures may cause modifications of TiN-coatings. Nevertheless, by optimising the parameters of the induction process there are great advantages of induction surface hardening compared to conventional bulk hardening....

  8. Induktive Randschichthärtung CVD-beschichteter Stähle mit Abschreckung im Gasdüsenfeld

    DEFF Research Database (Denmark)

    Pantleon, Karen; Kessler, Olaf; Hoffmann, Franz;

    2000-01-01

    The properties of hard coatings deposited using CVD-processes are usually excellent. However, high deposition temperatures may negatively influence the properties of steel substrates, especially in the case of low alloyed steels. Therefore, a subsequent heat treatment is necessary to restore...... the properties of steel substrates ready for operation. Induction surface hardening is applied to TiN-coated 100Cr6 (AISI 52100) and X155CrVMo12-1 (AISI D2) substrates. In comparison to TiN-42CrMo4(AISI 4140)-compounds it is found, that induction heating to higher temperatures is necessary to harden higher...... alloyed steels but these high temperatures may cause modifications of TiN-coatings. Nevertheless, by optimising the parameters of the induction process there are great advantages of induction surface hardening compared to conventional bulk hardening....

  9. High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor

    Science.gov (United States)

    Polsen, Erik S.; McNerny, Daniel Q.; Viswanath, B.; Pattinson, Sebastian W.; John Hart, A.

    2015-01-01

    We present the design of a concentric tube (CT) reactor for roll-to-roll chemical vapor deposition (CVD) on flexible substrates, and its application to continuous production of graphene on copper foil. In the CTCVD reactor, the thin foil substrate is helically wrapped around the inner tube, and translates through the gap between the concentric tubes. We use a bench-scale prototype machine to synthesize graphene on copper substrates at translation speeds varying from 25 mm/min to 500 mm/min, and investigate the influence of process parameters on the uniformity and coverage of graphene on a continuously moving foil. At lower speeds, high-quality monolayer graphene is formed; at higher speeds, rapid nucleation of small graphene domains is observed, yet coalescence is prevented by the limited residence time in the CTCVD system. We show that a smooth isothermal transition between the reducing and carbon-containing atmospheres, enabled by injection of the carbon feedstock via radial holes in the inner tube, is essential to high-quality roll-to-roll graphene CVD. We discuss how the foil quality and microstructure limit the uniformity of graphene over macroscopic dimensions. We conclude by discussing means of scaling and reconfiguring the CTCVD design based on general requirements for 2-D materials manufacturing. PMID:25997124

  10. Computation of flow and thermal fields in a model CVD reactor

    Indian Academy of Sciences (India)

    Vishwadeep Saxena; K Muralidhar; V Eswaran

    2002-12-01

    Mixing of coaxial jets within a tube in the presence of blockage has been numerically studied. This configuration is encountered during the modelling of flow and heat transfer in CVD (chemical vapour deposition) reactors. For the conditions prevailing in the reactor, the Reynolds numbers are low and flow can be taken to be laminar and incompressible. The unsteady forms of the governing equations have been solved by a finite volume method that can treat complex three-dimensional geometries. The algorithm is a two-step procedure, wherein the first step predicts the velocity field using an assumed pressure field. The second step corrects the fields using a Poisson equation to obtain the pressure corrections. Advection terms have been treated by a hybrid upwind-central difference technique. The computer code developed is fully three-dimensional, though most computations of the present study have been carried out for two-dimensional geometry. Results have been obtained in the form of velocity vector plots, wall shear stress variation on the block and the tube wall, isotherms and temperature profiles. The flow and heat transfer characteristics of jet mixing have been explored in terms of the Reynolds number, the jet velocity ratio, the axial position of the block, and the blockage ratio. The results obtained show that a proper combination of the process parameters can lead to an improved performance of the CVD reactor.

  11. Optimization of CVD parameters for long ZnO NWs grown on ITO/glass substrate

    Indian Academy of Sciences (India)

    ABDULQADER D FAISAL

    2016-12-01

    The optimization of chemical vapour deposition (CVD) parameters for long and vertically aligned (VA) ZnO nanowires (NWs) were investigated. Typical ZnO NWs as a single crystal grown on indium tin oxide (ITO)-coated glass substrate were successfully synthesized. First, the conducted side of ITO–glass substrate was coated with zinc acetate dihydrate to form seed layer of ZnO nanocrystals. Double zone tube furnace connected to vacuum pump was used for ZnO growth process. Zn metal powder was positioned at the first zone at temperature 900$^{\\circ}$C. The ITO–glass substrate with pre-coated seed layer was then located in the second zone of tube furnace at growth temperature of 550$^{\\circ}$C. The growth of ZnO NWs was controlled under constant concentration of seed layer, while other parameters such as argon and oxygen flow rates, substrate position, time and oxygen flow rate were varied.The VA ZnO NWs were finally characterized by scanning electron microscopy, X-ray diffractometer and high-resolution transmission electron microscope equipped with energy-dispersive X-ray spectroscopy. The results showthat long and VA ZnO NWs were single crystalline with hexagonal wurtzite structure. The ultimate length and average diameter of ZnO NWs were 10 $\\mu$m and 50–100 nm, respectively. These were achieved under optimized CVD growth parameters. The mechanism of vertical growth model of ZnO NWs is also discussed.

  12. Surface Study of Carbon Nanotubes Prepared by Thermal-CVD of Camphor Precursor

    Science.gov (United States)

    Azira, A. A.; Rusop, M.

    2010-03-01

    Surface morphology study on the influence of starting carbon materials by using thermal chemical vapor deposition (Thermal-CVD) to produced carbon nanotubes (CNTs) is investigated. The CNTs derived from camphor were synthesized as the precursor material due to low sublimation temperature, which indirectly maybe cost effective. The major parameters are also evaluated in order to obtain high-yield and high-quality CNTs. The prepared CNTs are examined using field emission scanning electron microscopy (FESEM) and high resolution transmission electron microscope (HR-TEM) to determine the microstructure of nanocarbons. The FESEM investigation of the CNTs formed on the support catalysts provides evidence that camphor is suitable as a precursor material for nanotubes formation. The high-temperature graphitization process induced by the Thermal-CVD enables the hydrocarbons to act as carbon sources and changes the aromatic species into the layered graphite structure of CNTs. The camphoric hydrocarbons not only found acts as the precursors but also enhances the production rate and the quality of CNTs.

  13. The Research and Development of the External Magnetic Field Acting on Electro-Deposition Process

    Directory of Open Access Journals (Sweden)

    Wu Menghua

    2016-01-01

    Full Text Available The research and development status of the electro-deposition technology under the action of external magnetic field are introduced. The basic characteristics and applied manners of external magnetic field in electro-deposition process are summarized. The acting principle of external magnetic field, the effects of magnetic hydrodynamics (MHD caused by the Lorentz force, and the acting of magnetic force on the metal ions and particles are described. The main actions of external magnetic field include MHD effect, magnetizing force, affecting the physical and chemical properties of the bath, affecting the disperse ability and coverage capacity of bath, affecting the mass transfer process of electro-deposition, affecting the chemical reaction process and current distribution of electrode surface. Some examples of electro-depositing single metal coatings, alloy coatings and composite coatings under action of magnetic field are explained. During the electro-depositing process, the external magnetic field has different degrees of impact on solution properties, mass transfer, charge transfer, content of composited nanoparticles, crystal growth and crystal orientation etc. The specific impact of magnetic field during the electro-depositing is also classified and summarized. The problems that existed in electro-deposition process while applying magnetic field and the next development trend were summarized.

  14. Advanced deposition model for thermal activated chemical vapor deposition

    Science.gov (United States)

    Cai, Dang

    Thermal Activated Chemical Vapor Deposition (TACVD) is defined as the formation of a stable solid product on a heated substrate surface from chemical reactions and/or dissociation of gaseous reactants in an activated environment. It has become an essential process for producing solid film, bulk material, coating, fibers, powders and monolithic components. Global market of CVD products has reached multi billions dollars for each year. In the recent years CVD process has been extensively used to manufacture semiconductors and other electronic components such as polysilicon, AlN and GaN. Extensive research effort has been directed to improve deposition quality and throughput. To obtain fast and high quality deposition, operational conditions such as temperature, pressure, fluid velocity and species concentration and geometry conditions such as source-substrate distance need to be well controlled in a CVD system. This thesis will focus on design of CVD processes through understanding the transport and reaction phenomena in the growth reactor. Since the in situ monitor is almost impossible for CVD reactor, many industrial resources have been expended to determine the optimum design by semi-empirical methods and trial-and-error procedures. This approach has allowed the achievement of improvements in the deposition sequence, but begins to show its limitations, as this method cannot always fulfill the more and more stringent specifications of the industry. To resolve this problem, numerical simulation is widely used in studying the growth techniques. The difficulty of numerical simulation of TACVD crystal growth process lies in the simulation of gas phase and surface reactions, especially the latter one, due to the fact that very limited kinetic information is available in the open literature. In this thesis, an advanced deposition model was developed to study the multi-component fluid flow, homogeneous gas phase reactions inside the reactor chamber, heterogeneous surface

  15. Chemical Vapor Deposition Growth. Final Report, December 29, 1975 -- August 31, 1977

    Energy Technology Data Exchange (ETDEWEB)

    Ruth, R. P.; Manasevit, H. M.; Campbell, A. G.; Johnson, R. E.; Kenty, J. L.; Moudy, L. A.; Shaw, G. L.; Simpson, W. I.; Yang, J. J.

    1978-10-01

    The objective of this study was to investigate and develop chemical vapor deposition (CVD) techniques for the growth of large areas of Si sheet on inexpensive substrate materials, with resulting sheet properties suitable for fabricating solar cells that would meet the technical goals of the Low Cost Silicon Solar Array (LSSA) Project. The results of 20 months of experimental work are summarized. The program involved six main technical tasks: (1) modification and test of an existing vertical-chamber CVD reactor system; (2) identification and/or development of suitable inexpensive substrate materials; (3) experimental investigation of CVD process parameters using various candidate substrate materials; (4) preparation of Si sheet samples for various special studies, including solar cell fabrication; (5) evaluation of the properties of the Si sheet material produced by the CVD process; and (6) fabrication and evaluation of experimental solar cell structures by OCLI, using impurity diffusion and other standard and near-standard processing techniques, supplemented late in the program by the in situ CVD growth of n exp + /p/p exp + sheet structures subsquently processed into experimental cells. The principal CVD process used was silane (SiH sub 4 ) pyrolysis, although a few experiments were done with the dichlorosilane (SiH sub 2 Cl sub 2 ) process for Si deposition. The evaluation of various possiblesubstrate materials, the CVD parameter investigations, and the experimental solar cell fabrication and characterization are described in considerable detail. Specific conclusions of the work are discussed, and recommendations for continued investigations in certain areas are given.

  16. Atomistic study of deposition process of Al thin film on Cu substrate

    Energy Technology Data Exchange (ETDEWEB)

    Cao Yongzhi, E-mail: yzcaohit@gmail.com [Center for Precision Engineering, Harbin Institute of Technology, Harbin (China); Zhang Junjie; Sun Tao; Yan Yongda; Yu Fuli [Center for Precision Engineering, Harbin Institute of Technology, Harbin (China)

    2010-08-01

    In this paper we report molecular dynamics based atomistic simulations of deposition process of Al atoms onto Cu substrate and following nanoindentation process on that nanostructured material. Effects of incident energy on the morphology of deposited thin film and mechanical property of this nanostructured material are emphasized. The results reveal that the morphology of growing film is layer-by-layer-like at incident energy of 0.1-10 eV. The epitaxy mode of film growth is observed at incident energy below 1 eV, but film-mixing mode commences when incident energy increase to 10 eV accompanying with increased disorder of film structure, which improves quality of deposited thin film. Following indentation studies indicate deposited thin films pose lower stiffness than single crystal Al due to considerable amount of defects existed in them, but Cu substrate is strengthened by the interface generated from lattice mismatch between deposited Al thin film and Cu substrate.

  17. High energy high rate pulsed power processing of materials by powder consolidation and by railgun deposition

    Science.gov (United States)

    Persad, C.; Marcus, H. L.; Weldon, W. F.

    1987-03-01

    This exploratory research program was initiated to investigate the potential of using pulse power sources for powder consolidation, deposition and other High Energy High Rate Processing. The characteristics of the High Energy High Rate (1MJ/s) powder consolidation using megampere current pulses from a Homopolar Generator, have been defined. Molybdenum Alloy TZM, A Nickel based metallic glass, Copper graphite composites, and P/M Aluminum Alloy X7091 have been investigated. The powder consolidation process produced high densification rates. Density values of 80% to 99% could be obtained with sub second high temperature exposure. Specific energy input and applied pressure were controlling process parameters. Time Temperature Transformation (TTT) concepts underpin a fundamental understanding of pulsed power processing. Deposition experiments were conducted using an exploding foil device (EFD) providing an armature feed to railgun mounted in a vacuum chamber. The material to be deposited - in plasma, gas, liquid or solid state - was accelerated electromagnetically in the railgun and deposited on a substrate.

  18. Crystallographic analysis of CVD films using x-ray polychromatic radiation

    Energy Technology Data Exchange (ETDEWEB)

    Lavelle, B. [CNRS, Toulouse (France). Centre d`Elaboration de Materiaux et d`Etudes Structurales; Brissonneau, L.; Baggot, E.; Vahlas, C. [INPT-CNRS, Toulouse (France). Lab. Materiaux et Interfaces

    1998-12-31

    The Energy Dispersive X-ray Diffractometry (EDXD) technique was tested for in-situ crystallographic characterization of nickel films processed by chemical vapor deposition (CVD). The diffracted beam at low Bragg angle was analyzed in energy by a solid state detector. A nickel reference sample was used to face the problems of EDXD background signal and uncertainty of sample location. The relative accuracy on lattice parameters measurements is 1.5.10{sup {minus}3}, to be compared to 0.5.10{sup {minus}3} for classical (monochromatic) X-ray diffraction. Texture measurements yields results in agreement with those obtained form recent texture goniometer. Finally, an estimation of the thickness was obtained from the intensity of nickel fluorescence peak. In view of the obtained results, EDXD appears to be a promising technique for in-situ studies. Although less powerful compared to the synchrotron facility, it is more flexible and can be applied at lower cost.

  19. CVD diamond sensor for UV-photon detection

    CERN Document Server

    Periale, L; Gervino, G; Lamarina, A M; Palmisano, C; Periale, R; Picchi, P

    2012-01-01

    A new generation of UV photosensors, based on single crystal Chemical Vapour Deposition (CVD) diamonds to work optically coupled with large volume two-phase liquid-Ar (LAr) or liquid-Xe (LXe) detectors nowadays under design for the next generation of WIMPs experiments, is under development. Preliminary tests and first calibrations show these devices can have better performance than the existing UV sensitive detectors (higher photosensitivity and better signal-to-noise ratio). I-V characteristics, dark current measurements, linearity response to X-ray irradiation, and alpha-particle energy resolution are reported and discussed. (C) 2011 Elsevier B.V. All rights reserved.

  20. Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process

    Energy Technology Data Exchange (ETDEWEB)

    Seguini, G.; Cianci, E.; Wiemer, C.; Perego, M. [Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza MB (Italy); Saynova, D.; Van Roosmalen, J.A.M. [ECN Solar Energy, Westerduinweg 3, NL-1755 ZG Petten (Netherlands)

    2013-04-05

    High-quality surface passivation of crystalline Si is achieved using 10 nm thick Al2O3 films fabricated by thermal atomic layer deposition at 100C. After a 5 min post deposition annealing at 200C, the effective carrier lifetime is 1 ms, indicating a functional level of surface passivation. The interplay between the chemical and the field effect passivation is investigated monitoring the density of interface traps and the amount of fixed charges with conductance-voltage and capacitance-voltage techniques. The physical mechanisms underlying the surface passivation are described. The combination of low processing temperatures, thin layers, and good passivation properties facilitate a technology for low-temperature solar cells.

  1. Crystal growth of CVD diamond and some of its peculiarities

    CERN Document Server

    Piekarczyk, W

    1999-01-01

    Experiments demonstrate that CVD diamond can form in gas environments that are carbon undersaturated with respect to diamond. This fact is, among others, the most serious violation of principles of chemical thermodynamics. In this $9 paper it is shown that none of the principles is broken when CVD diamond formation is considered not a physical process consisting in growth of crystals but a chemical process consisting in accretion of macro-molecules of polycyclic $9 saturated hydrocarbons belonging to the family of organic compounds the smallest representatives of which are adamantane, diamantane, triamantane and so forth. Since the polymantane macro-molecules are in every respect identical with $9 diamond single crystals with hydrogen-terminated surfaces, the accretion of polymantane macro- molecules is a process completely equivalent to the growth of diamond crystals. However, the accretion of macro-molecules must be $9 described in a way different from that used to describe the growth of crystals because so...

  2. Synthesis of mullite coatings by chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Mulpuri, R.P.; Auger, M.; Sarin, V.K. [Boston Univ., MA (United States)

    1996-08-01

    Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Mullite is a solid solution of Al{sub 2}O{sub 3} and SiO{sub 2} with a composition of 3Al{sub 2}O{sub 3}{circ}2SiO{sub 2}. Thermodynamic calculations performed on the AlCl{sub 3}-SiCl{sub 4}-CO{sub 2}-H{sub 2} system were used to construct equilibrium CVD phase diagrams. With the aid of these diagrams and consideration of kinetic rate limiting factors, initial process parameters were determined. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed.

  3. Influence of process parameters on the preparation of pharmaceutical films by electrostatic powder deposition.

    Science.gov (United States)

    Prasad, Leena Kumari; LaFountaine, Justin S; Keen, Justin M; Williams, Robert O; McGinity, James W

    2016-12-30

    Electrostatic powder deposition (ESPD) has been developed as a solvent-free method to prepare pharmaceutical films. The aim of this work was to investigate the influence of process parameters during (1) electrostatic powder deposition, (2) curing, and (3) removal of the film from the substrate on the properties of the film. Polyethylene oxide (PEO) was used as the model polymer and stainless steel 316 as the substrate. Deposition efficiency (i.e. deposited weight) was measured with varying charging voltage, gun tip to substrate distance, and environmental humidity. Scanning electron microscopy was utilized to assess film formation, and adhesive and mechanical strength of films were measured with varying cure temperature and time. Adhesive strength was measured for films prepared on substrates of varying surface roughness. When deposition was performed at low humidity conditions, 25%RH, process parameters did not significantly affect deposition behavior. At 40%RH, increasing deposition efficiency with decreasing gun tip to substrate distance and increasing voltage (up to 60kV) was observed. Complete film formation was seen by 30min at 80°C, compared to lower curing temperatures and times. All films were readily removed from the substrates. The results show the ESPD process can be modified to produce films with good mechanical properties (e.g. tensile strength>0.06MPa), suggesting it is a promising dry powder process for preparing pharmaceutical films.

  4. Mechanistic Details of Surface Reactions in Atomic Layer Deposition (ALD) Processes

    Institute of Scientific and Technical Information of China (English)

    Menno; Bouman; Christopher; Clark; Hugo; Tiznado; Francisco; Zaera

    2007-01-01

    1 Results The reaction mechanisms of the atomic layer deposition (ALD) processes used for thin-film growth have been characterized by a combination of surface sensitive techniques. Our early studies focused on the deposition of TiN films from TiCl4 and ammonia,starting with the independent characterization of each of the two half steps comprising the ALD process. It was found that exposure of the substrate to TiCl4 leads to the initial deposition of titanium in the +3 oxidation state; only at a later st...

  5. Effect of Energy Input on the Characteristic of AISI H13 and D2 Tool Steels Deposited by a Directed Energy Deposition Process

    Science.gov (United States)

    Park, Jun Seok; Park, Joo Hyun; Lee, Min-Gyu; Sung, Ji Hyun; Cha, Kyoung Je; Kim, Da Hye

    2016-05-01

    Among the many additive manufacturing technologies, the directed energy deposition (DED) process has attracted significant attention because of the application of metal products. Metal deposited by the DED process has different properties than wrought metal because of the rapid solidification rate, the high thermal gradient between the deposited metal and substrate, etc. Additionally, many operating parameters, such as laser power, beam diameter, traverse speed, and powder mass flow rate, must be considered since the characteristics of the deposited metal are affected by the operating parameters. In the present study, the effect of energy input on the characteristics of H13 and D2 steels deposited by a direct metal tooling process based on the DED process was investigated. In particular, we report that the hardness of the deposited H13 and D2 steels decreased with increasing energy input, which we discuss by considering microstructural observations and thermodynamics.

  6. Fracture Characteristics of Monolayer CVD-Graphene

    Science.gov (United States)

    Hwangbo, Yun; Lee, Choong-Kwang; Kim, Sang-Min; Kim, Jae-Hyun; Kim, Kwang-Seop; Jang, Bongkyun; Lee, Hak-Joo; Lee, Seoung-Ki; Kim, Seong-Su; Ahn, Jong-Hyun; Lee, Seung-Mo

    2014-03-01

    We have observed and analyzed the fracture characteristics of the monolayer CVD-graphene using pressure bulge testing setup. The monolayer CVD-graphene has appeared to undergo environmentally assisted subcritical crack growth in room condition, i.e. stress corrosion cracking arising from the adsorption of water vapor on the graphene and the subsequent chemical reactions. The crack propagation in graphene has appeared to be able to be reasonably tamed by adjusting applied humidity and stress. The fracture toughness, describing the ability of a material containing inherent flaws to resist catastrophic failure, of the CVD-graphene has turned out to be exceptionally high, as compared to other carbon based 3D materials. These results imply that the CVD-graphene could be an ideal candidate as a structural material notwithstanding environmental susceptibility. In addition, the measurements reported here suggest that specific non-continuum fracture behaviors occurring in 2D monoatomic structures can be macroscopically well visualized and characterized.

  7. Investigation of Tin (Sn) Film Using an Aerosol Jet Additive Manufacturing Deposition Process

    Science.gov (United States)

    Fortier, Aleksandra; Liu, Yue; Ghamarian, Iman; Collins, Peter C.; Chason, Eric

    2017-08-01

    The quality of a Sn film deposited by the aerosol process is compared against the quality of Sn films deposited with traditional electroplating. Using the aerosol additive deposition technique, a Sn film was deposited on a brass substrate and exposed to room (25°C) temperature environments for 30 days, followed by a laser photosintering process. The film characteristics and content, formation of intermetallic compounds, residual stress distribution, grain texture, and the tendency of the film to grow Sn whiskers were analyzed. The preliminary results show a successful deposition of Sn film with an aerosol jet process and tensile residual stresses, whereas it was compressive in nature for electroplated Sn film. X-ray diffraction results also show the absence of intermetallic compound (IMC) formation in the aerosol jet-deposited film, while electroplated Sn film has a significant presence of IMC. The aerosol jet-deposited Sn film has the potential to resist nucleation of Sn whiskers under the operating conditions used in this study.

  8. Fracture Characteristics of Monolayer CVD-Graphene

    OpenAIRE

    Hwangbo, Yun; Lee, Choong-Kwang; Kim, Sang-Min; Kim, Jae-Hyun; Kim, Kwang-Seop; Jang, Bongkyun; Lee, Hak-Joo; Lee, Seoung-Ki; Kim, Seong-Su; Ahn, Jong-Hyun; Lee, Seung-Mo

    2014-01-01

    We have observed and analyzed the fracture characteristics of the monolayer CVD-graphene using pressure bulge testing setup. The monolayer CVD-graphene has appeared to undergo environmentally assisted subcritical crack growth in room condition, i.e. stress corrosion cracking arising from the adsorption of water vapor on the graphene and the subsequent chemical reactions. The crack propagation in graphene has appeared to be able to be reasonably tamed by adjusting applied humidity and stress. ...

  9. The erosion performance of cold spray deposited metal matrix composite coatings with subsequent friction stir processing

    Science.gov (United States)

    Peat, Tom; Galloway, Alexander; Toumpis, Athanasios; McNutt, Philip; Iqbal, Naveed

    2017-02-01

    This study forms an initial investigation into the development of SprayStir, an innovative processing technique for generating erosion resistant surface layers on a chosen substrate material. Tungsten carbide - cobalt chromium, chromium carbide - nickel chromium and aluminium oxide coatings were successfully cold spray deposited on AA5083 grade aluminium. In order to improve the deposition efficiency of the cold spray process, coatings were co-deposited with powdered AA5083 using a twin powder feed system that resulted in thick (>300 μm) composite coatings. The deposited coatings were subsequently friction stir processed to embed the particles in the substrate in order to generate a metal matrix composite (MMC) surface layer. The primary aim of this investigation was to examine the erosion performance of the SprayStirred surfaces and demonstrate the benefits of this novel process as a surface engineering technique. Volumetric analysis of the SprayStirred surfaces highlighted a drop of approx. 40% in the level of material loss when compared with the cold spray deposited coating prior to friction stir processing. Micro-hardness testing revealed that in the case of WC-CoCr reinforced coating, the hardness of the SprayStirred material exhibits an increase of approx. 540% over the unaltered substrate and 120% over the as-deposited composite coating. Microstructural examination demonstrated that the increase in the hardness of the MMC aligns with the improved dispersion of reinforcing particles throughout the aluminium matrix.

  10. Recent Results from Beam Tests of 3D and Pad pCVD Diamond Detectors

    CERN Document Server

    Wallny, Rainer

    2017-01-01

    Results from prototypes of a detector using chemical vapor deposited (CVD) diamond with embedded resistive electrodes in the bulk forming a 3D diamond device are presented. A detector system consisting of 3D devices based on poly-crystalline CVD (pCVD) diamond was connected to a multi-channel readout and successfully tested in a 120 GeV/c proton beam at CERN proving for the first time the feasibility of the 3D detector concept in pCVD for particle tracking applications. We also present beam test results on the dependence of signal size on incident particle rate in charged particle detectors based on poly-crystalline CVD diamond. The detectors were tested in a 260 MeV/c pion beam over a range of particle fluxes from 2 kHz/cm2 to 10 MHz/cm2 . The pulse height of the sensors was measured with pad readout electronics at a peaking time of 7 ns. Our data from the 2015 beam tests at PSI indicate that the pulse height of poly-crystalline CVD diamond sensor irradiated to 5×1014 neq/cm2 is independent of particle flux...

  11. Enhanced graphitization of c-CVD grown multi-wall carbon nanotube arrays assisted by removal of encapsulated iron-based phases under thermal treatment in argon

    Energy Technology Data Exchange (ETDEWEB)

    Boncel, Slawomir, E-mail: slawomir.boncel@polsl.pl [Department of Organic Chemistry, Biochemistry and Biotechnology, Silesian University of Technology, Krzywoustego 4, 44-100 Gliwice (Poland); Koziol, Krzysztof K.K., E-mail: kk292@cam.ac.uk [Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, CB3 0FS Cambridge (United Kingdom)

    2014-05-01

    Graphical abstract: - Highlights: • Annealing of the c-CVD MWCNT arrays toward complete removal of iron nanoparticles. • The ICP-AES protocol established for quantitative analysis of Fe-content in MWCNTs. • The vertical alignment from the as-grown MWCNT arrays found intact after annealing. • A route to decrease number of defects/imperfections in the MWCNT graphene walls. • A foundation for commercial purification of c-CVD derived MWCNTs. - Abstract: The effect of annealing on multi-walled carbon nanotube (MWCNT) arrays grown via catalytic Chemical Vapour Deposition (c-CVD) was studied. The treatment enabled to decrease number of defects/imperfections in the graphene walls of MWCNTs’, which was reflected in Raman spectroscopy by reduction of the I{sub D}/I{sub G} ratio by 27%. Moreover, the vertical alignment from the as-synthesized nanotube arrays was found intact after annealing. Not only graphitization of the nanotube walls occurred under annealing, but the amount of metal iron-based catalyst residues (interfering with numerous physicochemical properties, and hence applications of MWCNTs) was reduced from 9.00 wt.% (for pristine MWCNTs) to 0.02 wt.% as detected by Inductively Coupled Plasma Atomic Emission Spectroscopy (ICP-AES). This value, established by a new analytical protocol, is the lowest recorded by now for purified c-CVD MWCNTs and, due to operating under atmospheric pressure, medium temperature regime (as for annealing processes), reasonable time-scale and metal residue non-specificity, it could lay the foundation for commercial purification of c-CVD derived MWCNTs.

  12. Deposition uniformity inspection in IC wafer surface

    Science.gov (United States)

    Li, W. C.; Lin, Y. T.; Jeng, J. J.; Chang, C. L.

    2014-03-01

    This paper focuses on the task of automatic visual inspection of color uniformity on the surface of integrated circuits (IC) wafers arising from the layering process. The oxide thickness uniformity within a given wafer with a desired target thickness is of great importance for modern semiconductor circuits with small oxide thickness. The non-uniform chemical vapor deposition (CVD) on a wafer surface will proceed to fail testing in Wafer Acceptance Test (WAT). Early detection of non-uniform deposition in a wafer surface can reduce material waste and improve production yields. The fastest and most low-priced inspection method is a machine vision-based inspection system. In this paper, the proposed visual inspection system is based on the color representations which were reflected from wafer surface. The regions of non-uniform deposition present different colors from the uniform background in a wafer surface. The proposed inspection technique first learns the color data via color space transformation from uniform deposition of normal wafer surfaces. The individual small region statistical comparison scheme then proceeds to the testing wafers. Experimental results show that the proposed method can effectively detect the non-uniform deposition regions on the wafer surface. The inspection time of the deposited wafers is quite compatible with the atmospheric pressure CVD time.

  13. Deposition and post-processing techniques for transparent conductive films

    Energy Technology Data Exchange (ETDEWEB)

    Christoforo, Mark Greyson; Mehra, Saahil; Salleo, Alberto; Peumans, Peter

    2017-07-04

    In one embodiment, a method is provided for fabrication of a semitransparent conductive mesh. A first solution having conductive nanowires suspended therein and a second solution having nanoparticles suspended therein are sprayed toward a substrate, the spraying forming a mist. The mist is processed, while on the substrate, to provide a semitransparent conductive material in the form of a mesh having the conductive nanowires and nanoparticles. The nanoparticles are configured and arranged to direct light passing through the mesh. Connections between the nanowires provide conductivity through the mesh.

  14. Controlling the resistivity gradient in chemical vapor deposition-deposited aluminum-doped zinc oxide

    NARCIS (Netherlands)

    Ponomarev, M. V.; Verheijen, M. A.; Keuning, W.; M. C. M. van de Sanden,; Creatore, M.

    2012-01-01

    Aluminum-doped ZnO (ZnO:Al) grown by chemical vapor deposition (CVD) generally exhibit a major drawback, i.e., a gradient in resistivity extending over a large range of film thickness. The present contribution addresses the plasma-enhanced CVD deposition of ZnO: Al layers by focusing on the control

  15. Effect of CVD-diamond coatings on the tribological performance of cemented tungsten carbide substrates

    Directory of Open Access Journals (Sweden)

    Kaleem Ahmad Najar

    2016-06-01

    Full Text Available A comparison has been documented between nanocrystalline diamond (NCD and microcrystalline diamond (MCD coatings deposited on cemented tungsten carbide (WC-Co substrates with architectures of WC-Co/NCD & WC-Co/MCD, using hot filament chemical vapor deposition (HFCVD technique. In the present work, the frictional characteristics were studied using ball-on-disc type linear reciprocating micro-tribometer, under the application of 1–10N normal loads, when sliding against smooth alumina (Al2O3 ceramic ball for the total duration of 15min, under dry sliding conditions. Nanoindentation tests were also conducted using Berkovich nanoindenter for the purpose of measurement of hardness and elastic modulus values. The average coefficients of friction of MCD and NCD coatings decrease from 0.37 – 0.32 and 0.3 – 0.27 respectively, when the load is increased from 1–10N. However, for conventional WC-Co substrate the average coefficient of friction increases from 0.60–0.75, under the same input operating conditions. The wear tracks formed on the surfaces of CVD-diamond coatings and WC-Co substrate, after friction measurement were characterised using Raman spectroscopy and scanning electron microscopy (SEM techniques. However, the compositional analysis for the formation of tribo-layer observed on the wear tracks of CVD-diamond coatings was confirmed using energy dispersive spectroscopy (EDS technique. Therefore, maintaining an appropriate level of normal load and using appropriate type of diamond coating, friction may be kept to some lower value to improve mechanical processes.

  16. CVD Diamond Detector Stability Issues for Operation at the National Ignition Facility

    Energy Technology Data Exchange (ETDEWEB)

    Schmid, G J; Koch, J A; Moran, M J; Lerche, R A; Izumi, N; Phillips, T W; Glebov, V Y; Sangster, T C; Stoeckl, C

    2003-08-22

    Synthetic diamond crystals produced by the Chemical Vapor Deposition (CVD) technique can serve as fast, radiation hard, neutron sensors for the National Ignition Facility (NIF). Here we explore the stability issues, such as charge trapping and high-flux saturation, that will be relevant to operation at the NIF.

  17. Control of Reaction Surface in Low Temperature CVD to Enhance Nucleation and Conformal Coverage

    Science.gov (United States)

    Kumar, Navneet

    2009-01-01

    The Holy Grail in CVD community is to find precursors that can afford the following: good nucleation on a desired substrate and conformal deposition in high AR features. Good nucleation is not only necessary for getting ultra-thin films at low thicknesses; it also offers films that are smooth at higher thickness values. On the other hand,…

  18. Hydrogen termination of CVD diamond films by high-temperature annealing at atmospheric pressure

    NARCIS (Netherlands)

    Seshan, V.; Ullien, D.; Castellanos-Gomez, A.; Sachdeva, S.; Murthy, D.H.K.; Savenije, T.J.; Ahmad, H.A.; Nunney, T.S.; Janssens, S.D.; Haenen, K.; Nesládek, M.; Van der Zant, H.S.J.; Sudhölter, E.J.R.; De Smet, L.C.P.M.

    2013-01-01

    A high-temperature procedure to hydrogenate diamond films using molecular hydrogen at atmospheric pressure was explored. Undoped and doped chemical vapour deposited (CVD) polycrystalline diamond films were treated according to our annealing method using a H2 gas flow down to ∼50 ml/min (STP) at ∼850

  19. Advancement in additive manufacturing & numerical modelling considerations of direct energy deposition process

    OpenAIRE

    Quanren Zeng; Zhenhai Xu; Yankang Tian; Yi Qin

    2016-01-01

    The development speed and application range of the additive manufacturing (AM) processes, such as selective laser melting (SLM), laser metal deposition (LMD) or laser-engineering net shaping (LENS), are ever-increasing in modern advanced manufacturing field for rapid manufacturing, tooling repair or surface enhancement of the critical metal components. LMD is based on a kind of directed energy deposition (DED) technology which ejects a strand of metal powders into a moving molten pool caused ...

  20. The Research and Development of the External Magnetic Field Acting on Electro-Deposition Process

    OpenAIRE

    Wu Menghua; Jia Weiping

    2016-01-01

    The research and development status of the electro-deposition technology under the action of external magnetic field are introduced. The basic characteristics and applied manners of external magnetic field in electro-deposition process are summarized. The acting principle of external magnetic field, the effects of magnetic hydrodynamics (MHD) caused by the Lorentz force, and the acting of magnetic force on the metal ions and particles are described. The main actions of external magnetic field...

  1. Surface properties of diamond-like carbon films prepared by CVD and PVD methods

    Institute of Scientific and Technical Information of China (English)

    Liu Dong-Ping; Liu Yan-Hong; Chen Bao-Xiang

    2006-01-01

    Diamond-like carbon (DLC) films have been deposited using three different techniques: (a) electron cyclotron resonance-plasma source ion implantation, (b) low-pressure dielectric barrier discharge, (c) filtered-pulsed cathodic arc discharge. The surface and mechanical properties of these films are compared using atomic force microscopebased tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp3 hybridized carbon while the soft surface layers of tetrahedral amorphous carbon (ta-C) films have graphite-like structure. The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp3 hybridized carbon enriched surface layers. The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma.

  2. Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system

    Institute of Scientific and Technical Information of China (English)

    He Bin; Chen Guang-Hua; Zhu Xiu-Hong; Zhang Wen-Li; Ding Yi; Ma Zhan-Jie; Gao Zhi-Hua; Song Xue-Mei; Deng Jin-Xiang

    2006-01-01

    Intrinsic hydrogenated microcrystalline silicon (μc-Si:H) films have been prepared by hot-wire-assisted microwave electron-cyclotron-resonance chemical vapour deposition (Hw-MwECR-CVD) under different deposition conditions.Fourier-transform infrared spectra and Raman spectra were measured.Optical band gap WaS determined by Tauc plots,and experiments of photo-induced degradation were performed.It was observed that hydrogen dilution plays a more essential role than substrate temperature in microcrystalline transformation at low temperatures. Crystalline volume fraction and mean grain size in the films increase with the dilution ratio (R=H2/(H2+SiH4)).With the rise of crystallinity in the films,the optical band gap tends to become narrower while the hydrogen content and photo-induced degradation decrease dramatically.The samples,were identified as μc-Si:H films,by calculating the optical band gap.It is considered that hydrogen dilution has an effect on reducing the crystallization activation energy of the material,which promotes the heterogeneous solid-state phase transition characterized by the Johnson-Mehl-Avrami (JMA) equation.The films with the needed structure can be prepared by balancing deposition and crystaUization through controlling process parameters.

  3. Comparison of deposited surface area of airborne ultrafine particles generated from two welding processes.

    Science.gov (United States)

    Gomes, J F; Albuquerque, P C; Miranda, Rosa M; Santos, Telmo G; Vieira, M T

    2012-09-01

    This article describes work performed on the assessment of the levels of airborne ultrafine particles emitted in two welding processes metal-active gas (MAG) of carbon steel and friction-stir welding (FSW) of aluminium in terms of deposited area in alveolar tract of the lung using a nanoparticle surface area monitor analyser. The obtained results showed the dependence from process parameters on emitted ultrafine particles and clearly demonstrated the presence of ultrafine particles, when compared with background levels. The obtained results showed that the process that results on the lower levels of alveolar-deposited surface area is FSW, unlike MAG. Nevertheless, all the tested processes resulted in important doses of ultrafine particles that are to be deposited in the human lung of exposed workers.

  4. Atomic layer deposition of copper and copper silver films using an electrochemical process

    Energy Technology Data Exchange (ETDEWEB)

    Fang, J.S., E-mail: jsfang@nfu.edu.tw [Department of Materials Science and Engineering, National Formosa University, Huwei 63201, Taiwan (China); Liu, Y.S. [Department of Materials Science and Engineering, National Formosa University, Huwei 63201, Taiwan (China); Chin, T.S. [Department of Materials Science and Engineering, Feng Chia University, Taichung 40724, Taiwan (China)

    2015-04-01

    This paper describes the formation and properties of Cu and Cu(Ag) films on a Ru/Si substrate using electrochemical atomic layer deposition. The process was performed layer-by-layer using underpotential deposition (UPD) and surface-limited redox reactions. The first Cu atomic layer was deposited on the Ru/Si substrate via UPD. Using UPD, atomic layered of Pb, which acts as a sacrificial layer, was applied on the Cu layer. Then, a Cu{sup 2+} solution was flushed into the cell at an open-circuit potential, and the Pb layer was exchanged for Cu via redox replacements. The above sequences were repeated 500 times to form a Cu film. The Cu(Ag) alloy films were formed using Cu–UPD and Ag–UPD in predetermined sequences. The lowest electrical resistivity achieved was 3.6 and 2.2 μΩ cm for the Cu film and Cu(Ag) film, respectively, after annealing at 400 °C. Due to the self-limiting reactions, the process has the ability to deposit atomic layers to meet the requirement of Cu interconnects. - Highlights: • Layer-by-layer growth of Cu and Cu(Ag) films are prepared using electrochemical atomic layer deposition. • Cu coverage is from 0.33 to 0.51 ML for each deposition cycle in different NaCl concentrations. • The process can be applied in Cu interconnections.

  5. Fabrication of Titanium Dioxide Thin Films by DBD-CVD Under Atmosphere

    Institute of Scientific and Technical Information of China (English)

    ZHANG Xi-wen; GUO Yu; HAN Gao-rong

    2007-01-01

    Titanium dioxide films were firstly deposited on glass substrate by DBD-CVD (dielectric barrier discharge enhanced chemical vapor deposition) technique.The structure of the films was investigated by X-ray diffraction (XRD),scanning electron microscopy (SEM).TiO2 films deposited under atmosphere pressure show preferred orientation,and exhibit columnar-like structure,while TiO2 films deposited under low gas pressure show no preferred orientation.The columnar-like structure with preferred orientation exhibits higher photocatalytic efficiency,since the columnar structure has larger surface area.However,it contributes little to the improvement of hydrophilicity. DBD-CVD is an alternative method to prepare photocatalytic TiO2 for its well-controllable property.

  6. Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings

    Directory of Open Access Journals (Sweden)

    Harald Hetzner

    2014-12-01

    Full Text Available Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, argon and ethine flow rate, were varied according to a central composite design comprising 25 different parameter combinations. For comparison, a tungsten carbide coating was deposited, as well. During coating deposition, the process variables, total pressure, sputtering voltage and bias current, were measured as process characteristics. The thickness of the deposited coatings was determined using the crater grinding method, and the deposition rate was calculated. Young’s modulus E and indentation hardness HIT were characterized by means of nanoindentation. With E = 80

  7. Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport

    NARCIS (Netherlands)

    Van Ommen, J.R.

    2010-01-01

    The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet openin

  8. Process sedimentology of submarine fan deposits - new perspectives

    Science.gov (United States)

    Postma, George

    2017-04-01

    To link submarine fan process sedimentology with sand distribution, sand body architecture, texture and fabric, the field geologist studies sedimentary facies, facies associations (fan elements) and stratigraphy. Facies analysis resides on factual knowledge of modern fan morphodynamics and physical modelling of en-masse sediment transport. Where do we stand after 55 years of submarine research, i.e. the date when the first submarine fan model was launched by Arnold Bouma in 1962? Since that date students of submarine fans have worked on a number of important, recurring questions concerned with facies analysis of submarine successions in outcrop and core: 1. What type of sediment transport produced the beds? 2. What facies can be related to initial flow conditions? 3. What is the significance of grain size jumps and bounding surface hierarchy in beds consisting of crude and spaced stratification (traction carpets)? Do these point to multi flow events or to flow pulsations by one and the same event? 4. What facies associations relate to the basic elements of submarine fans? 5. What are the autogenic and allogenic signatures in submarine fans? Particularly in the last decade, the enormous technical advancement helped to obtain high-quality data from observations of density flows in modern canyons, deep basins and deep-water delta slopes (refs 1,2,3). In combination with both physical (refs 4,5) and numerical modelling (ref 6) these studies broke new ground into our understanding of density flow processes in various submarine environments and have led to new concepts of submarine fan building by super- and subcritical high-density flow (ref 7). Do these new concepts provide better answers to our recurrent questions related to the morphodynamics of submarine fans and prediction of sand body architecture? In discussing this open question, I shall 1. apply the new concepts to a modern and ancient example of a channel-lobe-transition-zone (ref 8); 2. raise the problem of

  9. CVD 908, CVD 908-htrA, and CVD 909 live oral typhoid vaccines: a logical progression.

    Science.gov (United States)

    Tacket, Carol O; Levine, Myron M

    2007-07-15

    Typhoid fever remains an important public health problem in many parts of the world. Despite the availability of oral Ty21a (Vivotif; Berna Biotech) and parenteral Vi polysaccharide vaccine (Typhim Vi; Aventis Pasteur), improved typhoid fever vaccines have been sought. These include a series of vaccine candidates developed at the Center for Vaccine Development, University of Maryland, based on attenuation of Salmonella enterica serovar Typhi by deletions in the aroC, aroD, and htrA genes. These vaccine candidates, designated "CVD 908," "CVD 908-htrA," and "CVD 909," have been developed and tested in volunteers with variable success. This review summarizes the clinical data that directed the logical progression of this vaccine development strategy.

  10. Modelling and optimization of film thickness variation for plasma enhanced chemical vapour deposition processes

    Science.gov (United States)

    Waddell, Ewan; Gibson, Des; Lin, Li; Fu, Xiuhua

    2011-09-01

    This paper describes a method for modelling film thickness variation across the deposition area within plasma enhanced chemical vapour deposition (PECVD) processes. The model enables identification and optimization of film thickness uniformity sensitivities to electrode configuration, temperature, deposition system design and gas flow distribution. PECVD deposition utilizes a co-planar 300mm diameter electrodes with separate RF power matching to each electrode. The system has capability to adjust electrode separation and electrode temperature as parameters to optimize uniformity. Vacuum is achieved using dry pumping with real time control of butterfly valve position for active pressure control. Comparison between theory and experiment is provided for PECVD of diamond-like-carbon (DLC) deposition onto flat and curved substrate geometries. The process utilizes butane reactive feedstock with an argon carrier gas. Radiofrequency plasma is used. Deposited film thickness sensitivities to electrode geometry, plasma power density, pressure and gas flow distribution are demonstrated. Use of modelling to optimise film thickness uniformity is demonstrated. Results show DLC uniformity of 0.30% over a 200 mm flat zone diameter within overall electrode diameter of 300mm. Thickness uniformity of 0.75% is demonstrated over a 200mm diameter for a non-conformal substrate geometry. Use of the modelling method for PECVD using metal-organic chemical vapour deposition (MOCVD) feedstock is demonstrated, specifically for deposition of silica films using metal-organic tetraethoxy-silane. Excellent agreement between experimental and theory is demonstrated for conformal and non-conformal geometries. The model is used to explore scalability of PECVD processes and trade-off against film thickness uniformity. Application to MEMS, optical coatings and thin film photovoltaics is discussed.

  11. Prediction of the properties of PVD/CVD coatings with the use of FEM analysis

    Science.gov (United States)

    Śliwa, Agata; Mikuła, Jarosław; Gołombek, Klaudiusz; Tański, Tomasz; Kwaśny, Waldemar; Bonek, Mirosław; Brytan, Zbigniew

    2016-12-01

    The aim of this paper is to present the results of the prediction of the properties of PVD/CVD coatings with the use of finite element method (FEM) analysis. The possibility of employing the FEM in the evaluation of stress distribution in multilayer Ti/Ti(C,N)/CrN, Ti/Ti(C,N)/(Ti,Al)N, Ti/(Ti,Si)N/(Ti,Si)N, and Ti/DLC/DLC coatings by taking into account their deposition conditions on magnesium alloys has been discussed in the paper. The difference in internal stresses in the zone between the coating and the substrate is caused by, first of all, the difference between the mechanical and thermal properties of the substrate and the coating, and also by the structural changes that occur in these materials during the fabrication process, especially during the cooling process following PVD and CVD treatment. The experimental values of stresses were determined based on X-ray diffraction patterns that correspond to the modelled values, which in turn can be used to confirm the correctness of the accepted mathematical model for testing the problem. An FEM model was established for the purpose of building a computer simulation of the internal stresses in the coatings. The accuracy of the FEM model was verified by comparing the results of the computer simulation of the stresses with experimental results. A computer simulation of the stresses was carried out in the ANSYS environment using the FEM method. Structure observations, chemical composition measurements, and mechanical property characterisations of the investigated materials has been carried out to give a background for the discussion of the results that were recorded during the modelling process.

  12. High-temperature CVD for crystalline-silicon thin-film solar cells

    Energy Technology Data Exchange (ETDEWEB)

    Faller, F.R.; Hurrle, A.

    1999-10-01

    The fundamentals of thermal CVD for the deposition of silicon at high temperatures are briefly discussed and applied to the conditions in the CVD system that the authors have constructed and characterized. The system fulfills basic requirements to be met for solar cell application; solar cells made from epitaxial layers on various substrates were fabricated. The high-quality cells achieved 17.6% efficiency proving the excellent performance of the system, the cells on economically relevant substrates achieved 8% efficiency which still needs improvement.

  13. Electrical phase change of CVD-grown Ge-Sb-Te thin film device

    OpenAIRE

    Huang, C.C.; B. Gholipour; Ou, J.Y.; Knight, K.J.; Hewak, D. W.

    2011-01-01

    A prototype Ge-Sb-Te thin film phase-change memory device has been fabricated and reversible threshold and phase change switching demonstrated electrically, with a threshold voltage of 1.5 – 1.7 V. The Ge-Sb-Te thin film was fabricated by chemical vapour deposition (CVD) at atmospheric pressure using GeCl4, SbCl5, and Te precursors with reactive gas H2 at reaction temperature 780 °C and substrate temperature 250 °C. The surface morphology and composition of the CVD-grown Ge-Sb-Te thin film ha...

  14. Knowledge of risk factors for diabetes or cardiovascular disease (CVD) is poor among individuals with risk factors for CVD.

    Science.gov (United States)

    Kilkenny, Monique F; Dunstan, Libby; Busingye, Doreen; Purvis, Tara; Reyneke, Megan; Orgill, Mary; Cadilhac, Dominique A

    2017-01-01

    There is limited evidence on whether having pre-existing cardiovascular disease (CVD) or risk factors for CVD such as diabetes, ensures greater knowledge of risk factors important for motivating preventative behaviours. Our objective was to compare knowledge among the Australian public participating in a health check program and their risk status. Data from the Stroke Foundation 'Know your numbers' program were used. Staff in community pharmacies provided opportunistic health checks (measurement of blood pressure and diabetes risk assessment) among their customers. Participants were categorised: 1) CVD ± risk of CVD: history of stroke, heart disease or kidney disease, and may have risk factors; 2) risk of CVD only: reported having high blood pressure, high cholesterol, diabetes or atrial fibrillation; and 3) CVD risk free (no CVD or risk of CVD). Multivariable logistic regression analyses were performed including adjustment for age and sex. Among 4,647 participants, 12% had CVD (55% male, 85% aged 55+ years), 47% were at risk of CVD (40% male, 72% 55+ years) and 41% were CVD risk free (33% male, 27% 55+ years). Participants with CVD (OR: 0.66; 95% CI: 0.55, 0.80) or risk factors for CVD (OR: 0.65; 95% CI: 0.57, 0.73) had poorer knowledge of the risk factors for diabetes/CVD compared to those who were CVD risk free. After adjustment, only participants with risk factors for CVD (OR: 0.80; 95% CI: 0.69, 0.93) had poorer knowledge. Older participants (55+ years) and men had poorer knowledge of diabetes/CVD risk factors and complications of diabetes. Participants with poorer knowledge of risk factors were older, more often male or were at risk of developing CVD compared with those who were CVD risk free. Health education in these high risk groups should be a priority, as diabetes and CVD are increasing in prevalence throughout the world.

  15. A parametric simulation study for solvent co-injection process in bitumen deposits

    Energy Technology Data Exchange (ETDEWEB)

    Yazdani, A.; Alvestad, J.; Kjonsvik, D.; Gilje, E.; Kowalewski, E. [Statoil Canada (Canada)

    2011-07-01

    The extraction of very large Canadian extra heavy oil and bitumen deposits is facing major challenges, such as energy requirements and access to sustainable water resources. Steam assisted gravity drainage (SAGD) is the most common commercial in-situ recovery process used for the extraction but it has many associated economic and environmental challenges. Moreover, current knowledge of the fundamental physics and mechanics involved in the process is not satisfactory. This paper presents a parametric simulation study for a solvent co-injection (SCI) process in bitumen deposits. This process has the potential to improve the efficiency of steam processes as well as to reduce energy use and CO2 emissions. The study contributes to further understanding of the development process. Several operational and geological parameters were evaluated to assess their impact on SAGD operations. The results demonstrated that the basis for selecting the optimum solvent should not only be mobility improvement capability but should also include other operational and geological conditions.

  16. The Charge Collection Properties of CVD Diamond

    CERN Document Server

    Behnke, T; Oh, A; Steuerer, J; Wagner, A; Zeuner, W; Behnke, Ties; Hüntemeyer, Petra; Oh, Alexander; Steuerer, Johannes; Wagner, Albrecht; Zeuner, Wolfram

    1998-01-01

    The charge collection properties of CVD diamond have been investigated with ionising radiation. In this study two CVD diamond samples, prepared with electrical contacts have been used as solid state ionisation chambers. The diamonds have been studied with beta particles and 10 keV photons, providing a homogeneous ionisation density and with protons and alpha particles which are absorbed in a thin surface layer. For the latter case a strong decrease of the signal as function of time is observed, which is attributed to polarisation effects inside the diamond. Spatially resolved measurements with protons show a large variation of the charge collection efficiency, whereas for photons and minimum ionising particles the response is much more uniform and in the order of 18%. These results indicate that the applicability of CVD diamond as a position sensitive particle detector depends on the ionisation type and appears to be promising for homogeneous ionisation densities as provided by relativistic charged particles.

  17. Properties of Aluminum Deposited by a High-Velocity Oxygen-Fueled Process

    Energy Technology Data Exchange (ETDEWEB)

    Chow, R; Decker, T A; Gansert, R V; Gansert, D; Lee, D

    2001-06-12

    Aluminum coatings deposited by a HVOF process have been demonstrated and relevant coating properties evaluated according to two deposition parameters, the spray distance and the oxygen-to-fuel flow ratio. The coating porosity, surface roughness, and microhardness are measured. The coating properties are fairly insensitive to spray distance, the distance between the nozzle and the workpiece, and fuel ratios, the oxygen-to-fuel flow. Increasing the fuel content does appear to improve the process productivity in terms of surface roughness. Minimization of nozzle loading is discussed.

  18. The effect of process variables on microstructure in laser-deposited materials

    Science.gov (United States)

    Bontha, Srikanth

    Laser deposition of titanium alloys is under consideration for aerospace applications, which require the consistent control of microstructure and resulting mechanical properties. To date, only limited experimental data exists to link deposition process variables (e.g., laser power and velocity) to resulting microstructure (e.g., grain size and morphology) in laser-deposited materials, and suitable microstructures have typically been obtained only by trial and error. In addition, it is unclear whether knowledge based on small-scale laser deposition processes (e.g., LENS(TM)) can be applied to large-scale (higher power) processes currently under development for commercial applications. Therefore, simulation-based methods are needed to predict the effects of process variables and size-scale on microstructure in laser-deposited titanium and other aerospace materials. The ability to predict and control microstructure in laser deposition processes requires an understanding of the thermal conditions at the onset of solidification. The focus of this work is the development of thermal process maps relating solidification cooling rate and thermal gradient (the key parameters controlling microstructure) to laser deposition process variables (laser power and velocity). The approach employs the well-known Rosenthal solution for a moving point heat source traversing an infinite substrate. Cooling rates and thermal gradients at the onset of solidification are numerically extracted from the Rosenthal solution throughout the depth of the melt pool, and dimensionless process maps are presented for both 2-D thin-wall and bulky 3-D geometries. Results for both small-scale (LENS(TM)) and large-scale (higher power) processes are plotted on solidification maps for predicting trends in grain morphology in laser-deposited Ti-6Al-4V. Although the Rosenthal predictions neglect the nonlinear effects of temperature-dependent properties and latent heat of transformation, a comparison with 2-D

  19. Chemical vapor deposition coating of fibers using microwave application

    Science.gov (United States)

    Barmatz, Martin B. (Inventor); Hoover, Gordon (Inventor); Jackson, Henry W. (Inventor)

    2000-01-01

    Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.

  20. GCMS and FTIR studies of by-product inhibited growth and the rate-limiting step in TEOS-based SiO{sub 2} CVD

    Energy Technology Data Exchange (ETDEWEB)

    Bartram, M.E.; Moffat, H.K. [Sandia National Labs., Albuquerque, NM (United States). Chemical Processing Science Dept.

    1995-04-01

    To improve process reliability and deposition methods, it is essential to identify the rate-limiting step in TEOS-based SiO{sub 2} CVD and its dependence on process conditions. For this purpose, experiments designed to evaluate by-product inhibition effects and to identify the rate-limiting step in TEOS decomposition have been carried out in a research reactor using GCMS and FTIR. By repetitively sampling a series of reactions in which TEOS was first mixed with ethylene, ethanol, and water in the gas-phase, GCMS was used to show clearly that these reaction by-products do not inhibit the heterogeneous reaction step on SiO{sub 2} at 1,000K. FTIR was used to determine that ethoxy groups from TEOS dissociative chemisorption have a significant lifetime on the SiO{sub 2} surface at CVD temperatures and have an activation energy for decomposition of 16kcal/mol{+-}4kcal/mol. This is much higher than the activation energy of 6 kcal/mol reported for the initial chemisorption step and is near the 22 kcal/mol reported for the overall activation energy for SiO{sub 2} deposition in a cold-wall reactor. These results suggest that, whether or not surface ethoxy groups inhibit TEOS reactions, their decomposition may be directly related to the rate-limiting step in SiO{sub 2} deposition.

  1. Cutting characteristics of dental diamond burs made with CVD technology Características de corte de pontas odontológicas diamantadas obtidas pela tecnologia CVD

    Directory of Open Access Journals (Sweden)

    Luciana Monti Lima

    2006-04-01

    Full Text Available The aim of this study was to determine the cutting ability of chemical vapor deposition (CVD diamond burs coupled to an ultrasonic dental unit handpiece for minimally invasive cavity preparation. One standard cavity was prepared on the mesial and distal surfaces of 40 extracted human third molars either with cylindrical or with spherical CVD burs. The cutting ability was compared regarding type of substrate (enamel and dentin and direction of handpiece motion. The morphological characteristics, width and depth of the cavities were analyzed and measured using scanning electron micrographs. Statistical analysis using the Kruskal-Wallis test (p O objetivo deste estudo foi determinar a habilidade de corte das pontas de diamante obtidas pelo processo de deposição química a vapor (CVD associadas ao aparelho de ultra-som no preparo cavitário minimamente invasivo. Uma cavidade padronizada foi preparada nas faces mesial e distal de 40 terceiros molares, utilizando-se pontas de diamante CVD cilíndrica e esférica. A habilidade de corte foi comparada quanto ao tipo de substrato (esmalte e dentina e quanto à direção do movimento realizado com a ponta. As características morfológicas, a largura e profundidade das cavidades foram analisadas e medidas em microscopia eletrônica de varredura. A análise estatística pelo teste de Kruskal-Wallis (p < 0,05 revelou que a largura e profundidade das cavidades foram significativamente maiores em dentina. Cavidades mais largas foram obtidas quando se utilizou a ponta de diamante CVD cilíndrica, e mais profundas quando a ponta esférica foi empregada. A direção do movimento da ponta não influenciou o tamanho das cavidades, sendo os cortes produzidos pelas pontas de diamante CVD precisos e conservadores.

  2. Nucleation and growth of chemically vapor deposited tungsten on various substrate materials: A review

    Energy Technology Data Exchange (ETDEWEB)

    Broadbent, E.K.

    1987-11-01

    W films produced by chemical-vapor deposition (CVD), typically via reduction of WF/sub 6/, are being used for numerous applications in very large scale integrated circuit technology. Blanket and selectively deposited films require nucleation and growth on a specific underlayer material: Si, metal, or metal silicide. The compatibility of CVD W with various underlayers is reviewed for the device applications of contact/via fill, diffusion barrier, metal interconnect, and source/drain coating. Nucleation of W directly on single crystal Si can sometimes produce tunnel-defect structures at the edges or along the entire interface of the deposit. Sputtered Mo and W, and to some extent TiW and TiN, have been shown to be suitable nucleation layers for CVD W, yielding a fluorine-free interface with low-electrical contact resistance. A sputtered W/Ti adhesion bilayer is demonstrated for a blanket W deposition+etchback process. CoSi/sub 2/ appears an appropriate choice where CVD W and salicide technologies are combined.

  3. Deposition of wear-resistant steel surfaces by the plasma rotating electrode coating process

    Science.gov (United States)

    Kim, Michael Robert

    A high-deposition rate thermal spray method was investigated for the purpose of coating aluminum cylinder bores with a wear resistant surface. This method, the plasma rotating electrode coating system (PROTEC) utilized transferred-arc melting of a rapidly rotating consumable electrode to create a droplet stream via centrifugal atomization. A cylindrical substrate was placed around the rotating rod, in the flight path of the droplets, to deposit a coating onto the internal surface of the cylinder. Selected coatings of 1045 steel deposited by the PROTEC coating method exhibited lower wear loss in lubricated sliding than wire-arc sprayed carbon steel coatings and gray cast iron. Splat cohesion was shown to be a significant factor in the wear resistance of PROTEC coatings. The relationship between deposition enthalpy and cooling rate of the coating was found to have the greatest effect on coating microstructure, and the coating cohesion. The most rapidly solidified coatings showed inferior splat cohesion in comparison to coatings that cooled more slowly. The increase in splat cohesion with decreased cooling rate was accompanied by the formation of a directionally oriented coating microstructure, likely formed during cellular solidification of the coating. A model describing the thermal state of the deposition process was used to predict the deposition conditions that would result in a cellular structure, and the level of splat cohesion required to produce a wear resistant coating.

  4. A discrete element based simulation framework to investigate particulate spray deposition processes

    KAUST Repository

    Mukherjee, Debanjan

    2015-06-01

    © 2015 Elsevier Inc. This work presents a computer simulation framework based on discrete element method to analyze manufacturing processes that comprise a loosely flowing stream of particles in a carrier fluid being deposited on a target surface. The individual particulate dynamics under the combined action of particle collisions, fluid-particle interactions, particle-surface contact and adhesive interactions is simulated, and aggregated to obtain global system behavior. A model for deposition which incorporates the effect of surface energy, impact velocity and particle size, is developed. The fluid-particle interaction is modeled using appropriate spray nozzle gas velocity distributions and a one-way coupling between the phases. It is found that the particle response times and the release velocity distribution of particles have a combined effect on inter-particle collisions during the flow along the spray. It is also found that resolution of the particulate collisions close to the target surface plays an important role in characterizing the trends in the deposit pattern. Analysis of the deposit pattern using metrics defined from the particle distribution on the target surface is provided to characterize the deposition efficiency, deposit size, and scatter due to collisions.

  5. Solution processed deposition of electron transport layers on perovskite crystal surface-A modeling based study

    Science.gov (United States)

    Mortuza, S. M.; Taufique, M. F. N.; Banerjee, Soumik

    2017-02-01

    The power conversion efficiency (PCE) of planar perovskite solar cells (PSCs) has reached up to ∼20%. However, structural and chemicals defects that lead to hysteresis in the perovskite based thin film pose challenges. Recent work has shown that thin films of [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) deposited on the photo absorption layer, using solution processing techniques, minimize surface pin holes and defects thereby increasing the PCE. We developed and employed a multiscale model based on molecular dynamics (MD) and kinetic Monte Carlo (kMC) to establish a relationship between deposition rate and surface coverage on perovskite surface. The MD simulations of PCBMs dispersed in chlorobenzene, sandwiched between (110) perovskite substrates, indicate that PCBMs are deposited through anchoring of the oxygen atom of carbonyl group to the exposed lead (Pb) atom of (110) perovskite surface. Based on rates of distinct deposition events calculated from MD, kMC simulations were run to determine surface coverage at much larger time and length scales than accessible by MD alone. Based on the model, a generic relationship is established between deposition rate of PCBMs and surface coverage on perovskite crystal. The study also provides detailed insights into the morphology of the deposited film.

  6. Novel electroless copper deposition on carbon fibers with environmentally friendly processes.

    Science.gov (United States)

    Byeon, Jeong Hoon; Kim, Jang-Woo

    2010-08-15

    A novel electroless deposition (ELD) of copper (Cu) on carbon fibers (CFs) with environmentally friendly processes, silver (Ag) aerosol activation and subsequent nonformaldehyde Cu ELD, was developed. Spark-generated Ag aerosol nanoparticles (approximately 10 nm in mode diameter) were deposited (48.4 microg Ag/g CF in activation intensity) onto the surfaces of CFs. After annealing (at 220 degrees C in a nitrogen atmosphere), the catalytically activated CFs were placed into a solution for Cu ELD (at 82 degrees C). Homogeneous Cu coating (approximately 5.1 nm/min) on CFs was achieved with 90 min of deposition and the corresponding mass deposition rate and Cu grain size for 30-90 min of deposition had ranges of 0.25-1.14 mg Cu/g CF-min and 14.8-37.2 nm, respectively. The porosity of CFs decreased by depositing the Cu for 30-90 min, and the specific surface area and pore volume of CFs decreased from 1536 to 1399 m(2)/g and from 0.65 to 0.57 cm(3)/g, respectively.

  7. Fabrication of FeSe superconducting films with chemical transport deposition process

    Science.gov (United States)

    Feng, J. Q.; Zhang, S. N.; Liu, J. X.; Hao, Q. B.; Li, C. S.; Zhang, P. X.

    2017-07-01

    FeSe Superconducting films were fabricated with a chemical transport deposition process. During the fabrication process, Fe foils were adopted as substrates and Se powders were put at one end of the tube furnace. During the heating process, Se powders were vaporized, and vaporized atoms were carried by Ar flow and deposited on the Fe substrates. With a heat treatment process under proper temperature, superconducting tetragonal β-FeSe phase can be obtained. The effects of key parameters, including the sintering temperatures and the distances between Fe substrates and Se source on the phase composition and morphology of the obtained films were systematically investigated. The superconducting transition temperature of 7.8 K was obtained on the optimized film. By further optimization of the heat treatment process, it is promising to fabricate FeSe films with higher superconducting phase content and better superconducting properties.

  8. Strain Release Induced Novel Fluorescence Variation in CVD-Grown Monolayer WS2 Crystals.

    Science.gov (United States)

    Feng, Shanghuai; Yang, Ruilong; Jia, Zhiyan; Xiang, Jianyong; Wen, Fusheng; Mu, Congpu; Nie, Anmin; Zhao, Zhisheng; Xu, Bo; Tao, Chenggang; Tian, Yongjun; Liu, Zhongyuan

    2017-10-04

    Tensile strain is intrinsic to monolayer crystals of transition metal disulfides such as Mo(W)S2 grown on oxidized silicon substrates by chemical vapor deposition (CVD) owing to the much larger thermal expansion coefficient of Mo(W)S2 than that of silica. Here we report fascinating fluorescent variation in intensity with aging time in CVD-grown triangular monolayer WS2 crystals on SiO2 (300 nm)/Si substrates and formation of interesting concentric triangular fluorescence patterns in monolayer crystals of large size. The novel fluorescence aging behavior is recognized to be induced by the partial release of intrinsic tensile strain after CVD growth and the induced localized variations or gradients of strain in the monolayer crystals. The results demonstrate that strain has a dramatic impact on the fluorescence and photoluminescence of monolayer WS2 crystals and thus could potentially be utilized to tune electronic and optoelectronic properties of monolayer transition metal disulfides.

  9. Response of CVD Diamond Detectors to 14 MeV Neutrons

    CERN Document Server

    Weiss, C; Gagnon-Moisan, F; Kasper, A; Lucke, A; Schuhmacher, H; Weierganz, M; Zimba, A

    2012-01-01

    A series of measurements was taken at the Physikalisch-Technische Bundesanstalt (PTB) Braunschweig [1] using the 14 MeV neutron beam at the Van der Graaf accelerator with chemical vapor deposition (CVD) diamond detectors, in preparation of an upcoming (n, ) cross-section measurement [2] at the CERN-n TOF experiment [3, 4]. A single-crystal (sCVD) as well as a poly-crystalline (pCVD) diamond detector were used for the measurements. The response of both materials to the mono-energetic neutron beam was studied, also with the prospect for future applications in plasma diagnostics for fusion research. The results of the measurements are presented in this report.

  10. Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis

    Institute of Scientific and Technical Information of China (English)

    Weimin Mao; Hongxi Zhu; Leng Chen; Huiping Feng

    2008-01-01

    The relationship between texture and elastic properties of chemical vapor deposition (CVD) diamond films was analyzed based on the phenomenological theory, which reveals the influence of crystalline orientation and texture on the residual macro-strain and macro-stress. The phenomenological calculations indicated that the difference in Young's modulus could be 15% in single dia- mond crystals and 5% in diamond films with homogeneously distributed strong fiber texture. The experimentally measured residual strains of free-standing CVD diamond films were in good agreement with the correspondingly calculated Young's modulus in con- nection with the multi-fiber textures in the fills, though the difference in Young's modulus induced by texture was only around 1%. It is believed that texture should be one of the important factors influencing the residual stress and strain of CVD diamond films.

  11. Microstructural Evolution and Mechanical Properties of Inconel 625 Alloy during Pulsed Plasma Arc Deposition Process

    Institute of Scientific and Technical Information of China (English)

    Fujia Xu; Yaohui Lv; Yuxin Liu; Fengyuan Shu; Peng He; Binshi Xu

    2013-01-01

    Pulsed plasma arc deposition (PPAD),which combines pulsed plasma cladding with rapid prototyping,is a promising technology for manufacturing near net shape components due to its superiority in cost and convenience of processing.In the present research,PPAD was successfully used to fabricate the Ni-based superalloy Inconel 625 components.The microstructures and mechanical properties of deposits were investigated by scanning electron microscopy (SEM),optical microscopy (OM),transmission electron microscopy (TEM) with energy dispersive spectrometer (EDS),microhardness and tensile testers.It was found that the as-deposited structure exhibited homogenous columnar dendrite structure,which grew epitaxially along the deposition direction.Moreover,some intermetallic phases such as Laves phase,minor MC (NbC,TiC) carbides and needle-like δ-Ni3Nb were observed in γ-Ni matrix.Precipitation mechanism and distribution characteristics of these intermetallic phases in the as-deposited 625 alloy sample were analyzed.In order to evaluate the mechanical properties of the deposits,microhardness was measured at various location (including transverse plane and longitudinal plane).The results revealed hardness was in the range of 260-285 HVo.2.In particular,microhardness at the interface region between two adjacent deposited layers was slightly higher than that at other regions due to highly refined structure and the disperse distribution of Laves particles.Finally,the influence of precipitation phases and fabrication strategies on the tensile properties of the as-deposited samples was investigated.The failure modes of the tensile specimens were analyzed with fractography.

  12. Synthesize of N-doped Carbon nanotube according to gas flow rate by Chemical Vapor Deposition

    Science.gov (United States)

    Kim, J. B.; Kim, C. D.; Kong, S. J.; Kim, J. H.; Min, B. K.; Jung, W. S.; Lee, H. R.

    2011-12-01

    Nitrogen-doped (N-doped) Carbon nanotubes (CNTs) have been prepared by Thermal Chemical Vapor Deposition (CVD). As doping accompanies with the recombination of carbon atoms into CNTs in the CVD process, N atoms can be substitutionally doped into the CNTs lattice, which is hard to realize by other synthetic methods. The synthesis technique and the characteristic analysis of N-doped CNT will move up the industrialization and the basic study of CNT. We will elucidate the basic properties of CNT such as the structural characteristics of the N-doped CNT material and study for the industrial application of the N-doped CNTs to the electrode of fuel cell.

  13. Friction Properties of Polished Cvd Diamond Films Sliding against Different Metals

    Science.gov (United States)

    Lin, Zichao; Sun, Fanghong; Shen, Bin

    2016-11-01

    Owing to their excellent mechanical and tribological properties, like the well-known extreme hardness, low coefficient of friction and high chemical inertness, chemical vapor deposition (CVD) diamond films have found applications as a hard coating for drawing dies. The surface roughness of the diamond films is one of the most important attributes to the drawing dies. In this paper, the effects of different surface roughnesses on the friction properties of diamond films have been experimentally studied. Diamond films were fabricated using hot filament CVD. The WC-Co (Co 6wt.%) drawing dies were used as substrates. A gas mixture of acetone and hydrogen gas was used as the feedstock gas. The CVD diamond films were polished using mechanical polishing. Polished diamond films with three different surface roughnesses, as well as the unpolished diamond film, were fabricated in order to study the tribological performance between the CVD diamond films and different metals with oil lubrication. The unpolished and polished CVD diamond films are characterized with scanning electron microscope (SEM), atomic force microscope (AFM), surface profilometer, Raman spectrum and X-ray diffraction (XRD). The friction examinations were carried out by using a ball-on-plate type reciprocating friction tester. Low carbide steel, stainless steel, copper and aluminum materials were used as counterpart balls. Based on this study, the results presented the friction coefficients between the polished CVD films and different metals. The friction tests demonstrate that the smooth surface finish of CVD diamond films is beneficial for reducing their friction coefficients. The diamond films exhibit low friction coefficients when slid against the stainless steel balls and low carbide steel ball, lower than that slid against copper ball and aluminum ball, attributed to the higher ductility of copper and aluminum causing larger amount of wear debris adhering to the sliding interface and higher adhesive

  14. Evaluation of Mineral Deposits Along the Little Wind River, Riverton, WY, Processing Site

    Energy Technology Data Exchange (ETDEWEB)

    Campbell, Sam [Navarro Research and Engineering, Oak Ridge, TN (United States); Dam, Wiliam [US Department of Energy, Washington, DC (United States). Office of Legacy Management

    2014-12-01

    In 2012, the U.S.Department of Energy (DOE) began reassessing the former Riverton, Wyoming, Processing Site area for potential contaminant sources impacting groundwater. A flood in 2010 along the Little Wind River resulted in increases in groundwater contamination (DOE 2013).This investigation is a small part of continued efforts by DOE and other stakeholders to update human health and ecological risk assessments, to make a comprehensive examination of all exposure pathways to ensure that the site remains protective through established institutional controls. During field inspections at the Riverton Site in 2013, a white evaporitic mineral deposit was identified along the bank of the Little Wind River within the discharge zone of the groundwater contamination plume. In December 2013, Savannah River National Laboratory (SRNL) personnel collected a sample for analysis by X-ray fluorescence (Figure 1 shows the type of material sampled). The sample had a uranium concentration of approximately 64 to 73 parts per million. Although the uranium in this mineral deposit is within the expected range for evaporatic minerals in the western United States (SRNL 2014), DOE determined that additional assessment of the mineral deposit was warranted. In response to the initial collection and analysis of a sample of the mineral deposit, DOE developed a work plan (Work Plan to Sample Mineral Deposits Along the Little Wind River, Riverton, Wyoming, Processing Site [DOE 2014]) to further define the extent of these mineral deposits and the concentration of the associated contaminants (Appendix A). The work plan addressed field reconnaissance, mapping, sampling, and the assessment of risk associated with the mineral deposits adjacent to the Little Wind River.

  15. Development of carbon nanotubes based gas diffusion layers by in situ chemical vapor deposition process for proton exchange membrane fuel cells

    Science.gov (United States)

    Kannan, A. M.; Kanagala, P.; Veedu, V.

    A proprietary in situ chemical vapor deposition (CVD) process was developed for gas diffusion layer (GDL) by growing a micro-porous layer on the macro-porous, non-woven fibrous carbon paper. The characteristics of the GDL samples such as, surface morphology, wetting characteristics, and cross-section were characterized using electron microscopes, goniometer and focused ion beam, respectively. Fuel cell performance of the GDLs was evaluated using single cell with hydrogen/oxygen as well as hydrogen/air at ambient pressure, at elevated temperature and various RH conditions using Nafion-212 as an electrolyte. The GDLs with in situ growth of micro-porous layers containing carbon nanotubes (CNTs) without any hydrophobic agent showed significant improvement in mechanical robustness as well as fuel cell performance at elevated temperature at lower RH conditions. The micro-porous layer of the GDLs as seen under scanning electron microscope showed excellent surface morphology with surface homogeneity through reinforcement by the multi-walled CNTs.

  16. Active soft solder deposition by magnetron-sputter-ion-plating (MSIP)-PVD-process

    Energy Technology Data Exchange (ETDEWEB)

    Lugscheider, E.; Bobzin, K.; Erdle, A

    2004-01-30

    In different technical areas micro electro mechanical systems (M.E.M.S.), e.g. micro pumps, micro sensors, actuators and micro dosage systems are in use today. The components of these M.E.M.S. consist of various materials, which have to be joined. To join materials like ceramics, plastics or metals to a hybrid M.E.M.S., established joining technologies have to be adjusted. For the assembling and mounting of temperature sensible micro components, a low temperature joining process, e.g. transient liquid phase (TLP) bonding or an active soft soldering process can be performed. In this article the deposition of a low melting active soft solder by magnetron-sputter (MS)-PVD deposition with an active substrate cooling will be presented. The substrate temperatures were set and controlled by an additional cooling unit, which was integrated into the sputtering facility. In the performed experiments a substrate temperature range from -40 to +20 deg. C was investigated. The effects of these different substrate temperatures to the microstructure and the soldering suitability of the solder system were investigated by scanning electron microscopy (SEM), nanoindentation and soldering tests. The chemical composition of the deposited solder systems was examined by glow discharge optical spectroscopy (GDOS)-analysis. As a suitable substrate temperature range for deposition -10 to -20 deg. C was detected. Solder systems deposited in this temperature range showed good solder abilities.

  17. Magnetic properties related to hydrothermal alteration processes at the Escondida porphyry copper deposit, northern Chile

    Science.gov (United States)

    Riveros, K.; Veloso, E.; Campos, E.; Menzies, A.; Véliz, W.

    2014-08-01

    Fluid-rock interaction related to the circulation of hydrothermal fluids can strongly modify the physicochemical properties of wall rocks in porphyry Cu deposits. These processes can also produce compositional and textural changes in ferromagnetic minerals, which can be quantified using magnetic methods. In the Escondida porphyry Cu deposit of northern Chile, each hydrothermally altered lithology is characterized by a discrete assemblage of Fe-Ti oxide minerals. These minerals have distinctive bulk magnetic susceptibility ( K bulk), temperature-dependent magnetic susceptibility, and magnetic hysteresis parameters. Selectively altered rocks (i.e., potassic and chloritic alteration types) exhibit the highest K bulk values (>3.93 × 10-3 SI units), and their hysteresis parameters indicate multidomain magnetic mineral behavior. This suggests that these rocks are composed of the coarsest magnetic grain sizes within the deposit. Optical analyses and susceptibility-temperature curves confirm that the magnetic signals in selectively altered rocks are mainly carried by secondary magnetite. In contrast, pervasively altered rocks (i.e., quartz-sericite and argillic alteration types) exhibit low K bulk values (hydrothermal alteration processes, Fe-Ti oxide minerals, and magnetic properties of the wall rock in the Escondida deposit. These magnetic methods can be considered a sensitive and efficient petrophysical tool for the identification and semi-quantification of alteration assemblages, and facilitating the recognition and mapping of discrete hydrothermal zones during exploration and operation of porphyry Cu deposits.

  18. Basical characteristics of fluid geologic process of interlayer oxidation zone sandstone-typeuranium deposit

    Institute of Scientific and Technical Information of China (English)

    WU; BoLin; LIU; ChiYang; WANG; JianQiang

    2007-01-01

    This paper reveals the physicochemical properties such as component, formulation, genesis, tem- perature, pH, Eh, salinity and pressure of all main alteration fluid of interlayer oxidation zone sand- stone-type uranium deposits after studying the geologic process and geochemistry of internal typical sandstone-type uranium deposits such as Shihongtan deposit in the Turpan-Hami basin, 512 deposit in the Yili basin, Dongsheng deposit in the Ordos basin. The composition of fluid can be divided into two parts based on the analysis of inclusion: one can be affirmed as atmospheric water with ordinary temperature epigenesist according to the character of hydrogen and oxygen isotope of inclusion, the other is natural gas containing gaseous hydrocarbon like CH4, and CO2 as well as a little H2S, CO, H2, N2 and so on, it always contains a small quantity of hydrocarbon liquid in petroliferous basins. The fluid property of oxidation alteration zone is always oxidation alkaline, and neutrality or weak acid-weak alkaline and reducibility during the metallizing process, but at secondary reduction or deoxidization zone it becomes strong reduction alkaline. Oxygenic groundwater in the fluid is the activate and mig- ratory medium of uranium element, but the gaseous hydrocarbon like CH4 as well as H2, H2S, CO from natural gas is the important sedimentary reducer of uranium mineral; the transformation of pH,Eh in fluid environment is the main reason for the formation of uranium metallization.

  19. Thermodynamic study of CVD-ZrO{sub 2} phase diagrams

    Energy Technology Data Exchange (ETDEWEB)

    Torres-Huerta, A.M., E-mail: atorresh@ipn.m [Research Center for Applied Science and Advanced Technology, Altamira-IPN, Altamira C.P.89600 Tamaulipas (Mexico); Vargas-Garcia, J.R. [Dept of Metallurgical Eng., ESIQIE-IPN, Mexico 07300 D.F. (Mexico); Dominguez-Crespo, M.A. [Research Center for Applied Science and Advanced Technology, Altamira-IPN, Altamira C.P.89600 Tamaulipas (Mexico); Romero-Serrano, J.A. [Dept of Metallurgical Eng., ESIQIE-IPN, Mexico 07300 D.F. (Mexico)

    2009-08-26

    Chemical vapor deposition (CVD) of zirconium oxide (ZrO{sub 2}) from zirconium acetylacetonate Zr(acac){sub 4} has been thermodynamically investigated using the Gibbs' free energy minimization method and the FACTSAGE program. Thermodynamic data Cp{sup o}, DELTAH{sup o} and S{sup o} for Zr(acac){sub 4} have been estimated using the Meghreblian-Crawford-Parr and Benson methods because they are not available in the literature. The effect of deposition parameters, such as temperature and pressure, on the extension of the region where pure ZrO{sub 2} can be deposited was analyzed. The results are presented as calculated CVD stability diagrams. The phase diagrams showed two zones, one of them corresponds to pure monoclinic phase of ZrO{sub 2} and the other one corresponds to a mix of monoclinic phase of ZrO{sub 2} and graphite carbon.

  20. Optimization of Nano-Process Deposition Parameters Based on Gravitational Search Algorithm

    Directory of Open Access Journals (Sweden)

    Norlina Mohd Sabri

    2016-06-01

    Full Text Available This research is focusing on the radio frequency (RF magnetron sputtering process, a physical vapor deposition technique which is widely used in thin film production. This process requires the optimized combination of deposition parameters in order to obtain the desirable thin film. The conventional method in the optimization of the deposition parameters had been reported to be costly and time consuming due to its trial and error nature. Thus, gravitational search algorithm (GSA technique had been proposed to solve this nano-process parameters optimization problem. In this research, the optimized parameter combination was expected to produce the desirable electrical and optical properties of the thin film. The performance of GSA in this research was compared with that of Particle Swarm Optimization (PSO, Genetic Algorithm (GA, Artificial Immune System (AIS and Ant Colony Optimization (ACO. Based on the overall results, the GSA optimized parameter combination had generated the best electrical and an acceptable optical properties of thin film compared to the others. This computational experiment is expected to overcome the problem of having to conduct repetitive laboratory experiments in obtaining the most optimized parameter combination. Based on this initial experiment, the adaptation of GSA into this problem could offer a more efficient and productive way of depositing quality thin film in the fabrication process.

  1. Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition.

    Science.gov (United States)

    Elliott, Simon D; Dey, Gangotri; Maimaiti, Yasheng; Ablat, Hayrensa; Filatova, Ekaterina A; Fomengia, Glen N

    2016-07-01

    Recent progress in the simulation of the chemistry of atomic layer deposition (ALD) is presented for technologically important materials such as alumina, silica, and copper metal. Self-limiting chemisorption of precursors onto substrates is studied using density functional theory so as to determine reaction pathways and aid process development. The main challenges for the future of ALD modeling are outlined.

  2. Combustion chemical vapor deposited coatings for thermal barrier coating systems

    Energy Technology Data Exchange (ETDEWEB)

    Hampikian, J.M.; Carter, W.B. [Georgia Institute of Technology, Atlanta, GA (United States). School of Materials Science and Engineering

    1995-12-31

    The new deposition process, combustion chemical vapor deposition, shows a great deal of promise in the area of thermal barrier coating systems. This technique produces dense, adherent coatings, and does not require a reaction chamber. Coatings can therefore be applied in the open atmosphere. The process is potentially suitable for producing high quality CVD coatings for use as interlayers between the bond coat and thermal barrier coating, and/or as overlayers, on top of thermal barrier coatings. In this report, the evaluation of alumina and ceria coatings on a nickel-chromium alloy is described.

  3. Combustion chemical vapor deposited coatings for thermal barrier coating systems

    Energy Technology Data Exchange (ETDEWEB)

    Hampikian, J.M.; Carter, W.B. [Georgia Institute of Technology, Atlanta, GA (United States). School of Materials Science and Engineering

    1995-12-31

    The new deposition process, combustion chemical vapor deposition, shows a great deal of promise in the area of thermal barrier coating systems. This technique produces dense, adherent coatings, and does not require a reaction chamber. Coatings can therefore be applied in the open atmosphere. The process is potentially suitable for producing high quality CVD coatings for use as interlayers between the bond coat and thermal barrier coating, and/or as overlayers, on top of thermal barrier coatings. In this report, the evaluation of alumina and ceria coatings on a nickel-chromium alloy is described.

  4. Organic solar cells using CVD-grown graphene electrodes

    Science.gov (United States)

    Kim, Hobeom; Bae, Sang-Hoon; Han, Tae-Hee; Lim, Kyung-Geun; Ahn, Jong-Hyun; Lee, Tae-Woo

    2014-01-01

    We report on the development of flexible organic solar cells (OSCs) incorporating graphene sheets synthesized by chemical vapor deposition (CVD) as transparent conducting electrodes on polyethylene terephthalate (PET) substrates. A key barrier that must be overcome for the successful fabrication of OSCs with graphene electrodes is the poor-film properties of water-based poly(3,4-ethylenedioxythiphene):poly(styrenesulfonate) (PEDOT:PSS) when coated onto hydrophobic graphene surfaces. To form a uniform PEDOT:PSS film on a graphene surface, we added perfluorinated ionomers (PFI) to pristine PEDOT:PSS to create ‘GraHEL’, which we then successfully spin coated onto the graphene surface. We systematically investigated the effect of number of layers in layer-by-layer stacked graphene anode of an OSC on the performance parameters including the open-circuit voltage (Voc), short-circuit current (Jsc), and fill factor (FF). As the number of graphene layers increased, the FF tended to increase owing to lower sheet resistance, while Jsc tended to decrease owing to the lower light absorption. In light of this trade-off between sheet resistance and transmittance, we determined that three-layer graphene (3LG) represents the best configuration for obtaining the optimal power conversion efficiency (PCE) in OSC anodes, even at suboptimal sheet resistances. We finally developed efficient, flexible OSCs with a PCE of 4.33%, which is the highest efficiency attained so far by an OSC with CVD-grown graphene electrodes to the best of our knowledge.

  5. Can surface preparation with CVD diamond tip influence on bonding to dental tissues?

    Science.gov (United States)

    Aparecido Kawaguchi, Fernando; Brossi Botta, Sergio; Nilo Vieira, Samuel; Steagall Júnior, Washington; Bona Matos, Adriana

    2008-04-01

    This study evaluated the influence of chemical vapor deposition (CVD) tips surface treatments of enamel and dentin on bonding resistance of two adhesive systems. Thirty embedded samples were divided in 12 groups ( n = 10), according to factors: substrate (enamel and dentin), adhesive system [etch-and-rinse (SB) and self-etch]; and the surface treatments (paper discs, impact CVD tips and tangential CVD tip). When CVD tip was used in the impact mode the tip was applied perpendicular to dental surface, while at tangential mode, the tip worked parallel to dental surface. Specimens were tested in tension after 24 h at 0.5 mm/min of cross-head speed. ANOVA results, in MPa showed that in enamel, only adhesive system factor was statistically significant ( p = 0.015) under tested conditions, with higher bond strength observed for SB groups. However, in dentin the best bonding performance was obtained in SE groups ( p = 0.00). In both tested substrates, results did not show statistically significant difference for factors treatment and its interactions. ConclusionsIt may be concluded that CVD-tip surface treatment, in both tested modes, did not influence on adhesion to enamel and dentin. But, it is important to choose adhesive system according to the tissue available to bonding.

  6. CVD diamond pixel detectors for LHC experiments

    Energy Technology Data Exchange (ETDEWEB)

    Wedenig, R.; Adam, W.; Bauer, C.; Berdermann, E.; Bergonzo, P.; Bogani, F.; Borchi, E.; Brambilla, A.; Bruzzi, M.; Colledani, C.; Conway, J.; Dabrowski, W.; Delpierre, P.; Deneuville, A.; Dulinski, W.; Eijk, B. van; Fallou, A.; Fizzotti, F.; Foulon, F.; Friedl, M.; Gan, K.K.; Gheeraert, E.; Grigoriev, E.; Hallewell, G.; Hall-Wilton, R.; Han, S.; Hartjes, F.; Hrubec, J.; Husson, D.; Kagan, H.; Kania, D.; Kaplon, J.; Karl, C.; Kass, R.; Knoepfle, K.T.; Krammer, M.; Logiudice, A.; Lu, R.; Manfredi, P.F.; Manfredotti, C.; Marshall, R.D.; Meier, D.; Mishina, M.; Oh, A.; Pan, L.S.; Palmieri, V.G.; Pernicka, M.; Peitz, A.; Pirollo, S.; Polesello, P.; Pretzl, K.; Procario, M.; Re, V.; Riester, J.L.; Roe, S.; Roff, D.; Rudge, A.; Runolfsson, O.; Russ, J.; Schnetzer, S.; Sciortino, S.; Speziali, V.; Stelzer, H.; Stone, R.; Suter, B.; Tapper, R.J.; Tesarek, R.; Trawick, M.; Trischuk, W.; Vittone, E.; Wagner, A.; Walsh, A.M.; Weilhammer, P.; White, C.; Zeuner, W.; Ziock, H.; Zoeller, M.; Blanquart, L.; Breugnion, P.; Charles, E.; Ciocio, A.; Clemens, J.C.; Dao, K.; Einsweiler, K.; Fasching, D.; Fischer, P.; Joshi, A.; Keil, M.; Klasen, V.; Kleinfelder, S.; Laugier, D.; Meuser, S.; Milgrome, O.; Mouthuy, T.; Richardson, J.; Sinervo, P.; Treis, J.; Wermes, N

    1999-08-01

    This paper reviews the development of CVD diamond pixel detectors. The preparation of the diamond pixel sensors for bump-bonding to the pixel readout electronics for the LHC and the results from beam tests carried out at CERN are described.

  7. Self-assembling Process of Alkanethiol Monolayers on Gold Surface via Underpotential Deposition

    Institute of Scientific and Technical Information of China (English)

    2006-01-01

    It was demonstrated feasible that underpotential deposition(UPD) of copper on a monolayer-modified gold substrate can be used to determine the gold electrode area. The deposition and stripping of a Cu adlayer can take place reversibly and stably at a bared or a self-assembled monolayer modified gold electrode. The growth kinetics of decanethiol/Au was also investigated via Cu UPD. The difference between the assembling kinetics determined by UPD and that by quartz crystal microbalance measurements reveals the configuration transmutation of the assembled molecules from a disordered arrangement to an ordered arrangement during the self-assembling processes.

  8. STUDY OF DYNAMIC MECHANICAL PROPERTIES OF FUSED DEPOSITION MODELLING PROCESSED ULTEM MATERIAL

    OpenAIRE

    Adhiyamaan Arivazhagan; Ammar Saleem; S. H. Masood; Mostafa Nikzad; K. A. JAGADEESH

    2014-01-01

    Fused Deposition Modelling (FDM), a renowned Rapid Prototyping (RP) process, has been successfully implemented in several industries to fabricate concept models and prototypes for rapid manufacturing. This study furnishes terse notes about the material damping properties of FDM made ULTEM samples considering the effect of FDM process parameters. Dynamic Mechanical Analysis (DMA) is carried out using DMA 2980 equipment to study the dynamic response of the FDM material subjected to single canti...

  9. Modeling of atmospheric iron processing carried by mineral dust and its deposition to ocean

    Science.gov (United States)

    Nickovic, Slobodan; Vukovic, Ana; Vujadinovic, Mirjam

    2014-05-01

    Relatively insoluble iron in dust originating from desert soils increases its solubility after Fe carried by mineral dust is chemically processed by the atmosphere. After dust is deposited deposition to the ocean, soluble Fe as a nutrient could enhance the marine primary production. The atmospheric dust cycle is driven by the atmospheric processes often of smaller, meso-scales. The soil mineralogy of dust emitted from sources determines also how much Fe in the aerosol will be finding. Once Fe is exposed to the atmospheric processes, the atmospheric radiation, clouds and polluted air will chemically affect the iron in dust. Global dust-iron models, having typical horizontal resolutions of 100-300 km which are mostly used to numerically simulate the fate of iron in the atmosphere can provide rather global picture of the dust and iron transport, but not details. Such models often introduce simplistic approximation on the Fe content in dust-productive soils. To simulate the Fe processing we instead implemented a high resolution regional atmospheric dust-iron model with detailed 1km global map for the geographic distribution of Fe content in soil. We also introduced a parameterization of the Fe processing caused by dust mineralogy, cloud processes and solar radiation. We will present results from simulation experiments in order to explore the model capability to reproduce major observed patterns of deposited Fe into the Atlantic cruises.

  10. Structure and depositional processes of a gravelly tsunami deposit in a shallow marine setting: Lower Cretaceous Miyako Group, Japan

    Science.gov (United States)

    Fujino, S.; Masuda, F.; Tagomori, S.; Matsumoto, D.

    2006-06-01

    This study reports a newly discovered gravelly tsunami deposit from the Lower Cretaceous Miyako Group, Japan. The deposit was formed in an open shallow marine setting. The event deposit erosionally overlies shoreface deposits and shows marked lateral facies change. At the basin margin, the deposit is composed mainly of amalgamated HCS sandstones with liquefaction structures, overlain by finer sediments that contain many plant fragments or micas. Conglomerates accompanying the HCS sandstones contain molluscan fossils and many coral clasts. In the basin center, the event deposit is made up mainly of conglomerates and lenticular sandstone beds, and passes upwards into alternating sandstones and siltstones. A condensed organic debris layer is intercalated within the alternating section. Conglomerates contain abundant beach gravel, and also contain beachrock, coral blocks, and boulders. Bivalve fossils are well preserved despite their occurrence in grain-supported conglomerates. The event deposit is divided into sub-layers bounded by internal scours that are wavy and intersect. Each sub-layer consists of a conglomerate grading into a sandstone layer. Imbrications just above the scours in sub-layers show seawards paleocurrents; however, imbrications just beneath the sandstone horizons in the same sub-layers feature landward paleocurrents. Respective sub-layers in the tsunami deposit were formed by substrate erosion due to backwash flow, gravel deposition, reworking by flood flow, and sand deposition during the stagnant water period. The overall upward-fining trend reflects decline of the tsunami event. Development of the gravelly deposit in the central part of the basin and lateral facies change may be attributed to hydrodynamic response of the tsunami pulse to local bathymetry and geography.

  11. Numerical solution of moving boundary problem for deposition process in solid fuel gas generator

    Science.gov (United States)

    Volokhov, V. M.; Dorofeenko, S. O.; Sharov, M. S.; Toktaliev, P. D.

    2016-11-01

    Moving boundary problem in application to process of depositions formation in gas generator are considered. Gas generator, as a part of fuel preparation system of high-speed vehicle, convert solid fuel into multicomponent multiphase mixture, which further burned down in combustion chamber. Mathematical model of two-phase “gas-solid particles” flow, including Navier-Stokes equations for turbulent flow in gas generator and mass, impulse conservations laws for elementary depositions layer are proposed. Verification of proposed mathematical model for depositions mass in gas generator conditions is done. Further possible improvements of proposed model, based on more detail accounting of particle-wall interaction and wall's surface adhesion properties are analyzed.

  12. Effect of Processing Parameters on Performance of Spray-Deposited Organic Thin-Film Transistors

    Directory of Open Access Journals (Sweden)

    Jack W. Owen

    2011-01-01

    Full Text Available The performance of organic thin-film transistors (OTFTs is often strongly dependent on the fabrication procedure. In this study, we fabricate OTFTs of soluble small-molecule organic semiconductors by spray-deposition and explore the effect of processing parameters on film morphology and device mobility. In particular, we report on the effect of the nature of solvent, the pressure of the carrier gas used in deposition, and the spraying distance. We investigate the surface morphology using scanning force microscopy and show that the molecules pack along the π-stacking direction, which is the preferred charge transport direction. Our results demonstrate that we can tune the field-effect mobility of spray-deposited devices two orders of magnitude, from 10−3 cm2/Vs to 10−1 cm2/Vs, by controlling fabrication parameters.

  13. Surface chemistry of boron-doped SiO{sub 2} CVD: Enhanced uptake of tetraethyl orthosilicate by hydroxyl groups bonded to boron

    Energy Technology Data Exchange (ETDEWEB)

    Bartram, M.E.; Moffat, H.K.

    1993-12-31

    Insight into how dopants can enhance deposition rates has been obtained by comparing reactivities of tetraethyl orthosilicate (TEOS, Si(OCH{sub 2}CH{sub 3}){sub 4}) with silanol and boranol groups on SiO{sub 2}. This comparison is relevant for boron-doped SiO{sub 2} film growth from TEOS and trimethyl borate (TMB, B(OCH{sub 3}){sub 3}) sources since boranols and silanols are expected to be present on surface during the (CVD). A silica substrate having coadsorbed deuterated silanols (SIOD) and boranols (BOD) was reacted with TEOS in a cold-wall reactor in the mTorr pressure regime at 1000K. Reactions were followed with Fourier transform infrared spectroscopy. Use of deuterated hydroxyls allowed consumption of hydroxyls by TEOS chemisorption to be distinguished from concurrent formation of SIOH and BOH that results from TEOS decomposition. It was found that TEOS reacts with BOD at twice the rate observed for SIOD demonstrating that hydroxyl groups bonded to boron increase the rate of TEOS chemisorption. Surface ethoxy groups produced by chemisorption of TEOS decompose at a slower rate in the presence of TMB decomposition products. Possible dependencies on reactor geometries and other deposition conditions may determine which of these two competing effects will control deposition rates. This may explain (in part) why the rate enhancement effect is not always observed in boron-doped SiO{sub 2} CVD processes.

  14. Plasma polymers deposited in atmospheric pressure dielectric barrier discharges: Influence of process parameters on film properties

    Energy Technology Data Exchange (ETDEWEB)

    Fricke, Katja, E-mail: k.fricke@inp-greifswald.de [Leibniz Institute for Plasma Science and Technology e.V. (INP Greifswald), Felix-Hausdorff-Str. 2, 17489 Greifswald (Germany); Girard-Lauriault, Pierre-Luc [Plasma Processing Laboratory, Department of Chemical Engineering, McGill University, 3610 rue University, Montreal, QC H3A 0C5 (Canada); Weltmann, Klaus-Dieter [Leibniz Institute for Plasma Science and Technology e.V. (INP Greifswald), Felix-Hausdorff-Str. 2, 17489 Greifswald (Germany); Wertheimer, Michael R. [Department of Engineering Physics, École Polytechnique de Montréal, Box 6079, Station Centre-Ville, Montreal, QC H3C 3A7 (Canada)

    2016-03-31

    We present results on the deposition of plasma polymer (PP) films in a dielectric barrier discharge system fed with mixtures of argon or nitrogen carrier gas plus different hydrocarbon precursors, where the latter possess different carbon-to-hydrogen ratios: CH{sub 4} < C{sub 2}H{sub 6} < C{sub 2}H{sub 4} = C{sub 3}H{sub 6} < C{sub 2}H{sub 2}. The influence of precursor gas mixture and flow rate, excitation frequency, and absorbed power on PP film compositions and properties has been investigated. The discharge was characterized by electrical measurements, while the chemical compositions and structures of coatings were analysed by X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, total combustion, and elastic recoil detection analyses, the latter two for determining carbon-to-hydrogen ratios. Scanning electron microscopy was used to study the coatings' morphology, and profilometry for evaluating deposition rates. - Highlights: • Atmospheric pressure DBD is used to deposit organic hydrocarbon films. • High deposition rates can be achieved by varying the power and/or gas mixture ratio. • Process parameters affect the films' surface chemical composition and morphology. • Deposited films are not soluble in aqueous environment. • No delamination of coatings produced from argon plasma.

  15. Characteristics of CVD graphene nanoribbon formed by a ZnO nanowire hardmask

    Energy Technology Data Exchange (ETDEWEB)

    Kang, Chang Goo; Kang, Jang Won; Lee, Seung Yong; Hwang, Hyeon Jun; Lee, Young Gon; Park, Seong-Ju; Lee, Byoung Hun [School of Material Science and Engineering, Gwangju Institute of Science and Technology, Oryong-dong 1, Buk-gu, Gwangju, 500-712 (Korea, Republic of); Lee, Sang Kyung; Cho, Chun Hum [Department of Nanobio Materials and Electronics, Gwangju Institute of Science and Technology, Oryong-dong 1, Buk-gu, Gwangju, 500-712 (Korea, Republic of); Heo, Jinseong; Chung, Hyun-Jong; Yang, Heejun [Semiconductor Devices Lab, Samsung Advanced Institute of Technology, Yongin (Korea, Republic of); Seo, Sunae [Department of Physics, Sejong University, Gunja-Dong, Kwanggin-gu, Seoul (Korea, Republic of); Ko, Ki Young; Ahn, Jinho, E-mail: bhl@gist.ac.kr [Division of Materials Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791 (Korea, Republic of)

    2011-07-22

    A graphene nanoribbon (GNR) is an important basic structure to open a bandgap in graphene. The GNR processes reported in the literature are complex, time-consuming, and expensive; moreover, the device yield is relatively low. In this paper, a simple new process to fabricate a long and straight graphene nanoribbon with a high yield has been proposed. This process utilizes CVD graphene substrate and a ZnO nanowire as the hardmask for patterning. 8 {mu}m long and 50-100 nm wide GNRs were successfully demonstrated in high density without any trimming, and {approx} 10% device yield was realized with a top-down patterning process. After passivating the surfaces of the GNRs using a low temperature atomic layer deposition (ALD) of Al{sub 2}O{sub 3}, high performance GNR MOSFETs with symmetric drain-current-gate-voltage (I{sub d}-V{sub g}) curves were demonstrated and a field effect mobility up to {approx} 1200 cm{sup 2} V{sup -1} s{sup -1} was achieved at V{sub d} = 10 mV.

  16. CVD synthesis of carbon-based metallic photonic crystals

    CERN Document Server

    Zakhidov, A A; Baughman, R H; Iqbal, Z

    1999-01-01

    Three-dimensionally periodic nanostructures on the scale of hundreds of nanometers, known as photonic crystals, are attracting increasing interest because of a number of exciting predicted properties. In particular, interesting behavior should be obtainable for carbon- based structures having a dimensional scale larger than fullerenes and nanotubes, but smaller than graphitic microfibers. We show here how templating of porous opals by chemical vapor deposition (CVD) allows us to obtain novel types of graphitic nanostructures. We describe the synthesis of new cubic forms of carbon having extended covalent connectivity in three dimensions, which provide high electrical conductivity and unit cell dimensions comparable to optical wavelengths. Such materials are metallic photonic crystals that show intense Bragg diffraction. (14 refs).

  17. Oxidation Resistance of Turbine Blades Made of ŻS6K Superalloy after Aluminizing by Low-Activity CVD and VPA Methods

    Science.gov (United States)

    Zagula-Yavorska, M.; Kocurek, P.; Pytel, M.; Sieniawski, J.

    2016-05-01

    Two aluminide layers (additive and interdiffusion) were deposited on a turbine blade made of ŻS6K superalloy by means of VPA and CVD methods. The additive and interdiffusion layers obtained by the VPA method consist of the NiAl phase and some carbides, while the additive layer deposited by the CVD method consists of the NiAl phase only. The residual stresses in the aluminide coating at the lock, suction side, and pressure side of the blade were tensile. The aluminide coating deposited by the CVD method has an oxidation resistance about 7 times better than that deposited by the VPA method. Al2O3 + HfO2 + NiAl2O4 phases were revealed on the surface of the aluminide coating deposited by the VPA method after 240 h oxidation. Al2O3 + TiO2 oxides were found on the surface of the aluminide coating deposited by the CVD method after 240 h oxidation. Increasing the time of oxidation from 240 to 720 h led to the formation of the NiO oxide on the surface of the coating deposited by the VPA method. Al2O3 oxide is still visible on the surface of the coating deposited by the CVD method. The residual stresses in the aluminide coating after 30 cycles of oxidation at the lock, suction side and pressure side of the turbine blade are compressive.

  18. Processes and environmental significance of the subglacial chemical deposits in Tianshan Mountains

    Institute of Scientific and Technical Information of China (English)

    LIU; Gengnian; LUO; Risheng; CAO; Jun

    2005-01-01

    On the bedrock surface of Glacier No.1 in the headwater of Urumqi River, Tianshan Mts., well layered and crystallized subglacial calcite precipitations were discovered. Based on observations and analysis of the surface form, sedimentary texture and structure, and chemical composition of the deposits, clues about the subglacial processes and environment are deduced. The radial-growth crustation texture of the deposits, which builds up in the saturated CaCO3 solution, proves the existence of pressure melting water and water films under Glacier No.1; and their rhythmic beddings, dissolved planes and unconformable contacts show that the water films responsible for the formation of these structures were in a wide range of spatial as well as temporal variations. Though formed under continental glacier in non-limestone area, the deposits are quite similar to those formed under temperate glaciers in limestone areas, a fact that shows a similar process of chemical precipitation between the two. Hence the enrichment of calcium in the subglacial melting water and the process of precipitation have actually little to do with the bedrock lithology and the glacier types. The cemented detritus in the deposits are rich in Fe and Al while depleted in K, Na and Si; also the included clay mineral consists mainly of illite, which reveals some weak chemical weathering under the continental glacier. The subglacial CaCO3 precipitates when plenty of Ca++ melt into the subglacial melting water on a comparatively enclosed ice-bedrock interface under a high CO2 partial pressure, the forming of subglacial chemical deposits therefore offers unequivocal evidence for the ongoing of subglacial chemical reactions.

  19. CVD technologies used in preparation of low dielectric constant CVD technologies used in preparation of low dielectric constant%ULSI低介电常数材料制备中的CVD技术

    Institute of Scientific and Technical Information of China (English)

    王鹏飞; 丁士进; 张卫; 王季陶; 李伟

    2001-01-01

    Various CVD technologies for preparing low dielectric constantmaterials in ULSI circuits are summarized. The processes of deposition of fluorinated silicon oxide thin films, fluorinated amorphous carbon thin films and polyimide films are discussed in detail. The APCVD and RTCVD methods applied to prepare parylene films and fluorinated silicon oxide thin films are also briefly imroduced.%综述了制备ULSI低介电常数材料的各种CVD技术。详细介绍PCVD技术淀积含氟氧化硅薄膜、含氟无定型碳膜与聚酰亚胺类薄膜的工艺,简要介绍了APCVD技术淀积聚对二甲苯类有机薄膜及RTCVD技术淀积SiOF薄膜的工艺。

  20. Electronic properties of embedded graphene: doped amorphous silicon/CVD graphene heterostructures

    Science.gov (United States)

    Arezki, Hakim; Boutchich, Mohamed; Alamarguy, David; Madouri, Ali; Alvarez, José; Cabarrocas, Pere Roca i.; Kleider, Jean-Paul; Yao, Fei; Lee, Young Hee

    2016-10-01

    Large-area graphene film is of great interest for a wide spectrum of electronic applications, such as field effect devices, displays, and solar cells, among many others. Here, we fabricated heterostructures composed of graphene (Gr) grown by chemical vapor deposition (CVD) on copper substrate and transferred to SiO2/Si substrates, capped by n- or p-type doped amorphous silicon (a-Si:H) deposited by plasma-enhanced chemical vapor deposition. Using Raman scattering we show that despite the mechanical strain induced by the a-Si:H deposition, the structural integrity of the graphene is preserved. Moreover, Hall effect measurements directly on the embedded graphene show that the electronic properties of CVD graphene can be modulated according to the doping type of the a-Si:H as well as its phase i.e. amorphous or nanocrystalline. The sheet resistance varies from 360 Ω sq-1 to 1260 Ω sq-1 for the (p)-a-Si:H/Gr (n)-a-Si:H/Gr, respectively. We observed a temperature independent hole mobility of up to 1400 cm2 V-1 s-1 indicating that charge impurity is the principal mechanism limiting the transport in this heterostructure. We have demonstrated that embedding CVD graphene under a-Si:H is a viable route for large scale graphene based solar cells or display applications.

  1. Lipids, atherosclerosis and CVD risk: is CRP an innocent bystander?

    DEFF Research Database (Denmark)

    Nordestgaard, B G; Zacho, J

    2009-01-01

    exclude that genetically elevated CRP cause CVD. CONCLUSION: These data suggest that elevated CRP per se does not cause CVD; however, inflammation per se possibly contributes to CVD. Elevated CRP levels more likely is a marker for the extent of atherosclerosis or for the inflammatory activity...

  2. Properties of multilayer gallium and aluminum doped ZnO(GZO/AZO)transparent thin films deposited by pulsed laser deposition process

    Institute of Scientific and Technical Information of China (English)

    Jin-Hyum SHIN; Dong-Kyun SHIN; Hee-Young LEE; Jai-Yeoul LEE

    2011-01-01

    Multilayer gallium and aluminum doped ZnO (GZO/AZO) films were fabricated by alternative deposition of Ga-doped zinc oxide(GZO) and Al-doped zinc oxide(AZO) thin film by using pulsed laser deposition(PLD) process. The electrical and optical properties of these GZO/AZO thin films were investigated and compared with those of GZO and AZO thin films. The GZO/AZO GZO/AZO thin films linearly decreases with increasing the Al ratio.

  3. INFLUENCE OF PROCESS PARAMETERS ON DIMENSIONAL ACCURACY OF PARTS MANUFACTURED USING FUSED DEPOSITION MODELLING TECHNOLOGY

    Directory of Open Access Journals (Sweden)

    Filip Górski

    2013-09-01

    Full Text Available The paper presents the results of experimental study – part of research of additive technology using thermoplastics as a build material, namely Fused Deposition Modelling (FDM. Aim of the study was to identify the relation between basic parameter of the FDM process – model orientation during manufacturing – and a dimensional accuracy and repeatability of obtained products. A set of samples was prepared – they were manufactured with variable process parameters and they were measured using 3D scanner. Significant differences in accuracy of products of the same geometry, but manufactured with different set of process parameters were observed.

  4. A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation

    Science.gov (United States)

    Döhrmann, Ralph; Botta, Stephan; Buffet, Adeline; Santoro, Gonzalo; Schlage, Kai; Schwartzkopf, Matthias; Bommel, Sebastian; Risch, Johannes F. H.; Mannweiler, Roman; Brunner, Simon; Metwalli, Ezzeldin; Müller-Buschbaum, Peter; Roth, Stephan V.

    2013-04-01

    HASE (Highly Automated Sputter Equipment) is a new mobile setup developed to investigate deposition processes with synchrotron radiation. HASE is based on an ultra-high vacuum sputter deposition chamber equipped with an in-vacuum sample pick-and-place robot. This enables a fast and reliable sample change without breaking the vacuum conditions and helps to save valuable measurement time, which is required for experiments at synchrotron sources like PETRA III at DESY. An advantageous arrangement of several sputter guns, mounted on a rotative flange, gives the possibility to sputter under different deposition angles or to sputter different materials on the same substrate. The chamber is also equipped with a modular sample stage, which allows for the integration of different sample environments, such as a sample heating and cooling device. The design of HASE is unique in the flexibility. The combination of several different sputtering methods like standard deposition, glancing angle deposition, and high pressure sputter deposition combined with heating and cooling possibil-ities of the sample, the large exit windows, and the degree of automation facilitate many different grazing incidence X-ray scattering experiments, such as grazing incidence small and wide angle X-ray scattering, in one setup. In this paper we describe in detail the design and the performance of the new equipment and present the installation of the HASE apparatus at the Micro and Nano focus X-ray Scattering beamline (MiNaXS) at PETRA III. Furthermore, we describe the measurement options and present some selected results. The HASE setup has been successfully commissioned and is now available for users.

  5. A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation

    Energy Technology Data Exchange (ETDEWEB)

    Doehrmann, Ralph; Botta, Stephan; Buffet, Adeline; Santoro, Gonzalo; Schlage, Kai; Schwartzkopf, Matthias; Risch, Johannes F. H.; Mannweiler, Roman; Roth, Stephan V. [DESY, Deutsches Elektronen-Synchrotron, Notkestrasse 85, D-22607 Hamburg (Germany); Bommel, Sebastian [DESY, Deutsches Elektronen-Synchrotron, Notkestrasse 85, D-22607 Hamburg (Germany); Institut fuer Physik, Humboldt-Universitaet zu Berlin, Newtonstr. 15, D-12489 Berlin (Germany); Brunner, Simon; Metwalli, Ezzeldin; Mueller-Buschbaum, Peter [Lehrstuhl fuer Funktionelle Materialien, Physik-Department, Technische Universitaet Muenchen, James-Franck-Str. 1, D-85748 Garching (Germany)

    2013-04-15

    HASE (Highly Automated Sputter Equipment) is a new mobile setup developed to investigate deposition processes with synchrotron radiation. HASE is based on an ultra-high vacuum sputter deposition chamber equipped with an in-vacuum sample pick-and-place robot. This enables a fast and reliable sample change without breaking the vacuum conditions and helps to save valuable measurement time, which is required for experiments at synchrotron sources like PETRA III at DESY. An advantageous arrangement of several sputter guns, mounted on a rotative flange, gives the possibility to sputter under different deposition angles or to sputter different materials on the same substrate. The chamber is also equipped with a modular sample stage, which allows for the integration of different sample environments, such as a sample heating and cooling device. The design of HASE is unique in the flexibility. The combination of several different sputtering methods like standard deposition, glancing angle deposition, and high pressure sputter deposition combined with heating and cooling possibil-ities of the sample, the large exit windows, and the degree of automation facilitate many different grazing incidence X-ray scattering experiments, such as grazing incidence small and wide angle X-ray scattering, in one setup. In this paper we describe in detail the design and the performance of the new equipment and present the installation of the HASE apparatus at the Micro and Nano focus X-ray Scattering beamline (MiNaXS) at PETRA III. Furthermore, we describe the measurement options and present some selected results. The HASE setup has been successfully commissioned and is now available for users.

  6. Effects of Processing Variables on Tantalum Nitride by Reactive-Ion-Assisted Magnetron Sputtering Deposition

    Science.gov (United States)

    Wei, Chao‑Tsang; Shieh, Han‑Ping D.

    2006-08-01

    The binary compound tantalum nitride (TaN) and ternary compounds tantalum tungsten nitrides (Ta1-xWxNy) exhibit interesting properties such as high melting point, high hardness, and chemical inertness. Such nitrides were deposited on a tungsten carbide (WC) die and silicon wafers by ion-beam-sputter evaporation of the respective metal under nitrogen ion-assisted deposition (IAD). The effects of N2/Ar flux ratio, post annealing, ion-assisted deposition, deposition rate, and W doping in coating processing variables on hardness, load critical scratching, oxidation resistance, stress and surface roughness were investigated. The optimum N2/Ar flux ratios in view of the hardness and critical load of TaN and Ta1-xWxNy films were ranged from 0.9 to 1.0. Doping W into TaN to form Ta1-xWxNy films led significant increases in hardness, critical load, oxidation resistance, and reduced surface roughness. The optimum doping ratio was [W/(W+Ta)]=0.85. From the deposition rate and IAD experiments, the stress in the films is mainly contributed by sputtering atoms. The lower deposition rate at a high N2/Ar flux ratio resulted in a higher compressive stress. A high compressive residual stress accounts for a high hardness. The relatively high compressive stress was attributed primarily to peening by atoms, ions and electrons during film growth, the Ta1-xWxNy films showed excellent hardness and strength against a high temperature, and sticking phenomena can essentially be avoided through their use. Ta1-xWxNy films showed better performance than the TaN film in terms of mechanical properties and oxidation resistance.

  7. Ore Zoning and Dynamics of Ore—Forming Processes of Yinshan Polymetallic Deposit in Dexing,Jiangxi

    Institute of Scientific and Technical Information of China (English)

    张德会; 於崇文; 等

    1997-01-01

    The Yinshan deposit,one of the large-scale Cu-Pb-Zn-Au-Ag polymetallic deposits,may be named a middle-low temperature subvolcanic hydrothermal deposit and referred to as the "transitional deposit"linking mineralization of the epithermal and porphyry coppertypes.In this paper,the characteristics and structures of ore zoning are briefly described.On the basis of the dynamics of ore-forming processes and applying computer numerical simulation technique,the mechanism of ore zoning is discussed and a concealed igneous body controlling ore deposition at depth of the Yinshan mine is predicted.

  8. Influence of surface morphology and microstructure on performance of CVD tungsten coating under fusion transient thermal loads

    Science.gov (United States)

    Lian, Youyun; Liu, Xiang; Wang, Jianbao; Feng, Fan; Lv, Yanwei; Song, Jiupeng; Chen, Jiming

    2016-12-01

    Thick tungsten coatings have been deposited by chemical vapor deposition (CVD) at a rapid growth rate. A series of tungsten coatings with different thickness and surface morphology were prepared. The surface morphology, microstructure and preferred orientation of the CVD tungsten coatings were investigated. Thermal shock analyses were performed by using an electron beam facility to study the influence of the surface morphology and the microstructure on the thermal shock resistance of the CVD tungsten coatings. Repetitive (100 pulses) ELMs-like thermal shock loads were applied at various temperatures between room temperature and 600 °C with pulse duration of 1 ms and an absorbed power density of up to 1 GW/m2. The results of the tests demonstrated that the specific surface morphology and columnar crystal structure of the CVD tungsten have significant influence on the surface cracking threshold and crack propagation of the materials. The CVD tungsten coatings with a polished surface show superior thermal shock resistance as compared with that of the as-deposited coatings with a rough surface.

  9. Copper-vapor-assisted chemical vapor deposition for high-quality and metal-free single-layer graphene on amorphous SiO2 substrate.

    Science.gov (United States)

    Kim, Hyungki; Song, Intek; Park, Chibeom; Son, Minhyeok; Hong, Misun; Kim, Youngwook; Kim, Jun Sung; Shin, Hyun-Joon; Baik, Jaeyoon; Choi, Hee Cheul

    2013-08-27

    We report that high-quality single-layer graphene (SLG) has been successfully synthesized directly on various dielectric substrates including amorphous SiO2/Si by a Cu-vapor-assisted chemical vapor deposition (CVD) process. The Cu vapors produced by the sublimation of Cu foil that is suspended above target substrates without physical contact catalyze the pyrolysis of methane gas and assist nucleation of graphene on the substrates. Raman spectra and mapping images reveal that the graphene formed on a SiO2/Si substrate is almost defect-free and homogeneous single layer. The overall quality of graphene grown by Cu-vapor-assisted CVD is comparable to that of the graphene grown by regular metal-catalyzed CVD on a Cu foil. While Cu vapor induces the nucleation and growth of SLG on an amorphous substrate, the resulting SLG is confirmed to be Cu-free by synchrotron X-ray photoelectron spectroscopy. The SLG grown by Cu-vapor-assisted CVD is fabricated into field effect transistor devices without transfer steps that are generally required when SLG is grown by regular CVD process on metal catalyst substrates. This method has overcome two important hurdles previously present when the catalyst-free CVD process is used for the growth of SLG on fused quartz and hexagonal boron nitride substrates, that is, high degree of structural defects and limited size of resulting graphene, respectively.

  10. An Experimental Study on Slurry Erosion Resistance of Single and Multilayered Deposits of Ni-WC Produced by Laser-Based Powder Deposition Process

    Science.gov (United States)

    Balu, Prabu; Hamid, Syed; Kovacevic, Radovan

    2013-11-01

    Single and multilayered deposits containing different mass fractions of tungsten carbide (WC) in nickel (Ni)-matrix (NT-20, NT-60, NT-80) are deposited on a AISI 4140 steel substrate using a laser-based powder deposition process. The transverse cross section of the coupons reveals that the higher the mass fraction of WC in Ni-matrix leads to a more uniform distribution through Ni-matrix. The slurry erosion resistance of the fabricated coupons is tested at three different impingement angles using an abrasive water jet cutting machine, which is quantified based on the erosion rate. The top layer of a multilayered deposit (i.e., NT-60 in a two-layer NT-60 over NT-20 deposit) exhibits better erosion resistance at all three tested impingement angles when compared to a single-layer (NT-60) deposit. A definite increase in the erosion resistance is noted with an addition of nano-size WC particles. The relationship between the different mass fractions of reinforcement (WC) in the deposited composite material (Ni-WC) and their corresponding matrix (Ni) hardness on the erosion rate is studied. The eroded surface is analyzed in the light of a three-dimensional (3-D) profilometer and a scanning electron microscope (SEM). The results show that a volume fraction of approximately 62% of WC with a Ni-matrix hardness of 540 HV resulting in the gouging out of WC from the Ni-matrix by the action of slurry. It is concluded that the slurry erosion resistance of the AISI 4140 steel can be significantly enhanced by introducing single and multilayered deposits of Ni-WC composite material fabricated by the laser-based powder deposition process.

  11. OPTIMIZATION OF SURFACE ROUGHNESS AND TOOL FLANK WEAR IN TURNING OF AISI 304 AUSTENITIC STAINLESS STEEL WITH CVD COATED TOOL

    Directory of Open Access Journals (Sweden)

    M. KALADHAR

    2013-04-01

    Full Text Available AISI 304 austenitic stainless steel is a popularly used grade in the various fields of manufacturing because of its high ductility, high durability and excellent corrosion resistance. High work hardening, low heat conductivity and high built up edge (BUE formation made this as difficult-to- machine material. Poor surface quality and rapid tool wear are the common problems encountered while machining it. In the present work, an attempt has been made to explore the influence of machining parameters on the performance measures, surface roughness and flank wear in turning of AISI 304 austenitic stainless steel with a two layer Chemical vapour deposition(CVD coated tool. In order to achieve this, Taguchi approach has been employed. The results revealed that the cutting speed most significantly, influences both surface roughness and flank wear. In addition to this the optimal setting of process parameters and optimal ranges of performance measures are predicted.

  12. Ultrahigh-mobility graphene devices from chemical vapor deposition on reusable copper

    Science.gov (United States)

    Banszerus, Luca; Schmitz, Michael; Engels, Stephan; Dauber, Jan; Oellers, Martin; Haupt, Federica; Watanabe, Kenji; Taniguchi, Takashi; Beschoten, Bernd; Stampfer, Christoph

    2015-01-01

    Graphene research has prospered impressively in the past few years, and promising applications such as high-frequency transistors, magnetic field sensors, and flexible optoelectronics are just waiting for a scalable and cost-efficient fabrication technology to produce high-mobility graphene. Although significant progress has been made in chemical vapor deposition (CVD) and epitaxial growth of graphene, the carrier mobility obtained with these techniques is still significantly lower than what is achieved using exfoliated graphene. We show that the quality of CVD-grown graphene depends critically on the used transfer process, and we report on an advanced transfer technique that allows both reusing the copper substrate of the CVD growth and making devices with mobilities as high as 350,000 cm2 V–1 s–1, thus rivaling exfoliated graphene. PMID:26601221

  13. Stability of high temperature chemical vapor deposited silicon based structures on metals for solar conversion.

    Science.gov (United States)

    Gelard, Isabelle; Chichignoud, Guy; Blanquet, Elisabeth; Xuan, Hoan Nguyen; Cruz, Ruben; Jimenez, Carmen; Sarigiannidou, Eirini; Zaidat, Kader

    2011-09-01

    Highly crystallized silicon layers were grown on metal sheets at high temperature (950 degrees C) by thermal CVD from silane. An intermediate buffer layer was mandatory to prevent interdiffusion and silicide formation but also to compensate lattice parameters and thermal expansion coefficients mismatches between metal and silicon and ideally transfer some crystalline properties (grain size, texture) from the substrate to the silicon layer. After a thermodynamic study, aluminum nitride or titanium nitride diffusion barrier layers were selected and processed by CVD. The structure and the interfaces stabilities of these silicon/nitride/metal stacks were studied by field effect gun scanning and transmission electron microscopy, X-ray diffraction, Raman and energy dispersive X-ray spectroscopy. As a result, TiN deposited by CVD appears to be an efficient material as a buffer layer between steel and silicon.

  14. The Chemical Vapour Deposition of Tantalum - in long narrow channels

    DEFF Research Database (Denmark)

    Mugabi, James Atwoki

    use as a construction material for process equipment, with the cheaper alternative being the construction of equipment from steel and then protecting it with a thin but efficacious layer of tantalum. Chemical Vapour Deposition (CVD) is chosen as the most effective process to apply thin corrosion...... protective layers of tantalum because of the process’ ability to coat complex geometries and its relative ease to control. This work focuses on studying the CVD of tantalum in long narrow channels with the view that the knowledge gained during the project can be used to optimise the commercial coating...... process that Tantaline A/S and Alfa Laval (Sweden) use to manufacture tantalum coated plate heat exchangers. Experiments are done by coating the inner side of long, thin stainless steel tubes in the temperature range of 700 – 950 °C and pressure range of 25 – 990 mbar while using different reactant...

  15. THE ROLE OF CRYOGENIC PROCESSES IN THE FORMATION OF LOESS DEPOSITS

    Directory of Open Access Journals (Sweden)

    Vyacheslav N. Konishchev

    2015-01-01

    Full Text Available The paper describes a new approach to the analysis of the genetic nature of mineral substances in loess deposits. In permafrost under the influence of multiple alternate freezing and thawing in dispersed deposits, quartz particles accumulate the 0.05-0.01 mm fraction, while feldspars are crushed to a coarse fraction of 0.1-0.05 mm. In dispersed sediments formed in temperate and warm climatic zones, the granulometric spectrum of quartz and feldspar has the opposite pattern. The proposed methodology is based on a differential analysis of the distribution of these minerals by the granulometric spectrum. We have proposed two criteria - the coefficient of cryogenic contrast (CCC and the coefficient of distribution of heavy minerals, which allow determination of the degree of participation of cryogenic processes in the formation of loess sediments and processes of aeolian or water sedimentation.

  16. The role of NH3 and hydrocarbon mixtures in GaN pseudo-halide CVD: a quantum chemical study.

    Science.gov (United States)

    Gadzhiev, Oleg B; Sennikov, Peter G; Petrov, Alexander I; Kachel, Krzysztof; Golka, Sebastian; Gogova, Daniela; Siche, Dietmar

    2014-11-01

    The prospects of a control for a novel gallium nitride pseudo-halide vapor phase epitaxy (PHVPE) with HCN were thoroughly analyzed for hydrocarbons-NH3-Ga gas phase on the basis of quantum chemical investigation with DFT (B3LYP, B3LYP with D3 empirical correction on dispersion interaction) and ab-initio (CASSCF, coupled clusters, and multireference configuration interaction including MRCI+Q) methods. The computational screening of reactions for different hydrocarbons (CH4, C2H6, C3H8, C2H4, and C2H2) as readily available carbon precursors for HCN formation, potential chemical transport agents, and for controlled carbon doping of deposited GaN was carried out with the B3LYP method in conjunction with basis sets up to aug-cc-pVTZ. The gas phase intermediates for the reactions in the Ga-hydrocarbon systems were predicted at different theory levels. The located π-complexes Ga…C2H2 and Ga…C2H4 were studied to determine a probable catalytic activity in reactions with NH3. A limited influence of the carbon-containing atmosphere was exhibited for the carbon doping of GaN crystal in the conventional GaN chemical vapor deposition (CVD) process with hydrocarbons injected in the gas phase. Our results provide a basis for experimental studies of GaN crystal growth with C2H4 and C2H2 as auxiliary carbon reagents for the Ga-NH3 and Ga-C-NH3 CVD systems and prerequisites for reactor design to enhance and control the PHVPE process through the HCN synthesis.

  17. Ellipsometry study of process deposition of amorphous Indium Gallium Zinc Oxide sputtered thin films

    Energy Technology Data Exchange (ETDEWEB)

    Talagrand, C., E-mail: talagrand@emse.fr [Ecole des Mines de Saint-Etienne CMP-GC, Dept PS2, Gardanne, 880 route de Mimet (France); Boddaert, X. [Ecole des Mines de Saint-Etienne CMP-GC, Dept PS2, Gardanne, 880 route de Mimet (France); Selmeczi, D.G.; Defranoux, C. [Semilab Semiconductor Physics Laboratory Co. Ltd., Budapest, 1117 (Hungary); Collot, P. [Ecole Nationale Supérieure d' Arts et Métiers ParisTech, Aix-en-Provence, 2 cours des Arts et Métiers (France)

    2015-09-01

    This paper reports on an InGaZnO optical study by spectrometric ellipsometry. First of all, the fitting results of different models and different structures are analysed to choose the most appropriate model. The Tauc–Lorentz model is suitable for thickness measurements but a more complex model allows the refractive index and extinction coefficient to be extracted more accurately. Secondly, different InGaZnO process depositions are carried out in order to investigate stability, influence of deposition time and uniformity. Films present satisfactory optical stability over time. InGaZnO optical property evolution as a function of deposition time is related to an increase in temperature. To understand the behaviour of uniformity, mapping measurements are correlated to thin film resistivity. Results show that temperature and resputtering are the two phenomena that affect IGZO uniformity. - Highlights: • Model and structure are investigated to fit IGZO ellipsometric angles. • Maximum refractive index rises with substrate temperature and thus deposition time. • Resputtering leads to inhomogeneity in IGZO electrical and optical properties.

  18. Oxidation of ZnO thin films during pulsed laser deposition process

    Indian Academy of Sciences (India)

    E De Posada; L Moreira; J Pérez De La Cruz; M Arronte; L V Ponce; T Flores; J G Lunney

    2013-06-01

    Pulsed laser deposition of ZnO thin films, using KrF laser, is analysed. The films were deposited on (001) sapphire substrates at 400 °C, at two different oxygen pressures (0.3 and 0.4 mbar) and two different target–substrate distances (30 and 40 mm). It is observed that in order to obtain good quality in the photoluminescence of the films, associated with oxygen stoichiometry, it is needed to maximize the time during which the plasma remains in contact with the growing film (plasma residence time), which is achieved by selecting suitable combinations of oxygen pressures and target to substrate distances. It is also discussed that for the growth parameters used, the higher probability for ZnO films growth results from the oxidation of Zn deposited on the substrate and such process takes place during the time that the plasma is in contact with the substrate. Moreover, it is observed that maximizing the plasma residence time over the growing film reduces the rate of material deposition, favouring the surface diffusion of adatoms, which favours both Zn–O reaction and grain growth.

  19. Biomimetic formation of titania thin films: effect of amino acids on the deposition process.

    Science.gov (United States)

    Durupthy, Olivier; Jeurgens, Lars P H; Bill, Joachim

    2011-05-01

    Different types of amino acids have been used as additives to control the aqueous deposition of titanium dioxide thin films on single-crystal Si wafers. Thin titania films can be obtained through a chemical bath deposition (CBD) process using TiCl₄ as a precursor in an aqueous solution at temperatures below 100 °C. The addition of amino acids to the deposition solution was shown to reduce the thickness and roughness of the films and to increase their density. These protein building blocks were employed to modify the deposition rate as well as the size of aggregates that form the film. The thickness, crystallinity, morphology and composition of the grown films were characterized by a variety of techniques, including XRD, XPS, AFM and SEM. The consequences of the type of the amino acid additive (and its concentration in the solution) on the microstructural evolutions of the deposed films are thus revealed and discussed on the basis of the organic-inorganic interactions in solution and at the film surface.

  20. Molecular dynamics simulation of the deposition process of hydrogenated diamond-like carbon (DLC) films

    Institute of Scientific and Technical Information of China (English)

    ZHANG YuJun; DONG GuangNeng; MAO JunHong; XIE YouBai

    2008-01-01

    The deposition process of hydrogenated diamond-like carbon (DLC) film greatly affects its frictional properties. In this study, CH3 radicals are selected as source species to deposit hydrogenated DLC films for molecular dynamics simulation. The growth and structural properties of hydrogenated DLC films are investigated and elucidated in detail. By comparison and statistical analysis, the authors find that the ratio of carbon to hydrogen in the films generally shows a monotonously increasing trend with the increase of impact energy. Carbon atoms are more reactive during deposition and more liable to bond with substrate atoms than hydrogen atoms. In addition, there exists a peak value of the number of hydrogen atoms deposited in hydrogenated DLC films. The trends of the variation are opposite on the two sides of this peak point, and itbecomes stable when impact energy is greater than 80 eV. The average relative density also indicates a rising trend along with the increment of impact energy, while it does not reach the saturation value until impact energy comes to 50 eV. The hydrogen content in source species is a key factor to determine the hydrogen content in hydrogenated DLC films. When the hydrogen content in source species is high, the hydrogen content in hydrogenated DLC films is accordingly high.

  1. Efecto del argon en películas CNxHy depositadas mediante ECR-CVD

    Directory of Open Access Journals (Sweden)

    Albella, J. M.

    2004-04-01

    Full Text Available Carbon nitride films have been deposited by ECR-CVD, from Ar/CH4/N2 gas mixtures with different methane concentrations. Infrared Spectroscopy (IRS and Elastic Recoil Detection Analysis (ERDA have been used for films characterisation and Optical Emission Spectroscopy (OES for plasma analysis. Argon concentration in the gas mixture controls the growth rate as well as the composition of the film. In the proposed model, argon plays a key role in the activation of methane molecules. Also, during the growth of the film, two processes may be considered: i Film formation and ii Etching of the growing surface. Changing the gas mixture composition affects both processes, which results in films with different composition and structure as well as different deposition rates.Se ha estudiado el efecto del argon durante el proceso de CVD asistido por un plasma ECR para la síntesis de películas de nitruro de carbono (CNxHy a partir de mezclas gaseosas Ar/CH4/N2 con diferente contenido de metano. Las películas depositadas han sido analizadas mediante espectroscopía infrarroja (IRS y ERDA (Elastic Recoil Detection Analysis, y el análisis del plasma ha sido realizado utilizando la técnica de espectroscopía de emisión óptica (OES. La velocidad de deposición y la composición de las películas depositadas se encuentran determinadas por la concentración de argon en la mezcla gaseosa. Se propone un modelo, según el cual el argon juega un papel fundamental como activador de las moléculas de metano. El modelo propuesto incluye dos procesos simultáneos durante el crecimiento de las capas : i formación de la capa y ii ataque de la superficie de crecimiento. Según la composición de la mezcla gaseosa se favorece uno u otro proceso, lo que conduce a velocidades de deposición diferentes así como a depósitos con diferente composición y estructura atómica.

  2. Scalable ZnO nanotube arrays grown on CVD-graphene films

    Directory of Open Access Journals (Sweden)

    J. B. Park

    2016-10-01

    Full Text Available We report the growth of wafer-scale arrays of individually position-controlled and vertically aligned ZnO nanotube arrays on graphene deposited by chemical vapor deposition (CVD-graphene. Introducing two-dimensional layered materials such as graphene as a growth buffer has recently been suggested for growing nanomaterials on traditionally incompatible substrates. However, their growth has been restricted to small areas or had limited controllability. Here, we study the distinct growth behavior of ZnO on CVD-graphene that makes the selective area growth of individual nanostructures on its surface difficult, and propose a set of methods to overcome this. The resulting nanotube arrays, as examined by scanning electron microscopy and transmission electron microscopy, exhibited uniform morphologies and high structural quality over a large area and could be prepared on a broad variety of substrates, including amorphous, metallic, or flexible substrates.

  3. Pulse-height defect in single-crystal CVD diamond detectors

    Energy Technology Data Exchange (ETDEWEB)

    Beliuskina, O.; Imai, N. [The University of Tokyo, Center for Nuclear Study, Wako, Saitama (Japan); Strekalovsky, A.O.; Aleksandrov, A.A.; Aleksandrova, I.A.; Ilich, S.; Kamanin, D.V.; Knyazheva, G.N.; Kuznetsova, E.A.; Mishinsky, G.V.; Pyatkov, Yu.V.; Strekalovsky, O.V.; Zhuchko, V.E. [JINR, Flerov Laboratory of Nuclear Reactions, Dubna, Moscow Region (Russian Federation); Devaraja, H.M. [Manipal University, Manipal Centre for Natural Sciences, Manipal, Karnataka (India); Heinz, C. [II. Physikalisches Institut, Justus-Liebig-Universitaet Giessen, Giessen (Germany); Heinz, S. [II. Physikalisches Institut, Justus-Liebig-Universitaet Giessen, Giessen (Germany); GSI Helmholtzzentrum fuer Schwerionenforschung, Darmstadt (Germany); Hofmann, S.; Kis, M.; Kozhuharov, C.; Maurer, J.; Traeger, M. [GSI Helmholtzzentrum fuer Schwerionenforschung, Darmstadt (Germany); Pomorski, M. [CEA, LIST, Diamond Sensor Laboratory, CEA/Saclay, Gif-sur-Yvette (France)

    2017-02-15

    The pulse-height versus deposited energy response of a single-crystal chemical vapor deposition (scCVD) diamond detector was measured for ions of Ti, Cu, Nb, Ag, Xe, Au, and of fission fragments of {sup 252} Cf at different energies. For the fission fragments, data were also measured at different electric field strengths of the detector. Heavy ions have a significant pulse-height defect in CVD diamond material, which increases with increasing energy of the ions. It also depends on the electrical field strength applied at the detector. The measured pulse-height defects were explained in the framework of recombination models. Calibration methods known from silicon detectors were modified and applied. A comparison with data for the pulse-height defect in silicon detectors was performed. (orig.)

  4. Initiated chemical vapor deposition of antimicrobial polymer coatings.

    Science.gov (United States)

    Martin, T P; Kooi, S E; Chang, S H; Sedransk, K L; Gleason, K K

    2007-02-01

    The vapor phase deposition of polymeric antimicrobial coatings is reported. Initiated chemical vapor deposition (iCVD), a solventless low-temperature process, is used to form thin films of polymers on fragile substrates. For this work, finished nylon fabric is coated by iCVD with no affect on the color or feel of the fabric. Infrared characterization confirms the polymer structure. Coatings of poly(dimethylaminomethyl styrene) of up to 540 microg/cm2 were deposited on the fabric. The antimicrobial properties were tested using standard method ASTM E2149-01. A coating of 40 microg/cm2 of fabric was found to be very effective against gram-negative Escherichia coli, with over a 99.99%, or 4 log, kill in just 2 min continuing to over a 99.9999%, or 6 log, reduction in viable bacteria in 60 min. A coating of 120 microg/cm2 was most effective against the gram-positive Bacillus subtilis. Further tests confirmed that the iCVD polymer did not leach off the fabric.

  5. The interconnection of wet and dry deposition and the alteration of deposition budgets due to incorporation of new process understanding in regional models

    Science.gov (United States)

    Dennis, R. L.; Bash, J. O.; Foley, K. M.; Gilliam, R.; Pinder, R. W.

    2013-12-01

    Deposition is affected by the chemical and physical processes represented in the regional models as well as source strength. The overall production and loss budget (wet and dry deposition) is dynamically connected and adjusts internally to changes in process representation. In addition, the scrubbing of pollutants from the atmosphere by precipitation is one of several processes that remove pollutants, creating a coupling with the atmospheric aqueous and gas phase chemistry that can influence wet deposition rates in a nonlinear manner. We explore through model sensitivities with the regional Community Multiscale Air Quality (CMAQ) model the influence on wet and dry deposition, and the overall continental nitrogen budget, of changes in three process representations in the model: (1) incorporation of lightning generated NO, (2) improved representation of convective precipitation, and (3) replacement of the typical unidirectional dry deposition of NH3 with a state of the science representation of NH3 bi-directional air-surface exchange. Results of the sensitivity studies will be presented. (1) Incorporation of lightning generated NO significantly reduces a negative bias in summer wet nitrate deposition, but is sensitive to the choice of convective parameterization. (2) Use of a less active trigger of convective precipitation in the WRF meteorological model to reduce summertime precipitation over prediction bias reduces the generation of NO from lightning. It also reduces the wet deposition of nitrate and increases the dry deposition of oxidized nitrogen, as well as changing (reducing) the surface level exposure to ozone. Improvements in the convective precipitation processes also result in more non-precipitating clouds leading to an increase in SO4 production through the aqueous pathway resulting in improvements in summertime SO4 ambient aerosol estimates.(3) Incorporation of state of the science ammonia bi-directional air surface exchange affects both the dry

  6. Catalyst Design Using Nanoporous Iron for the Chemical Vapor Deposition Synthesis of Single-Walled Carbon Nanotubes

    Directory of Open Access Journals (Sweden)

    Tarek M. Abdel-Fattah

    2013-01-01

    Full Text Available Single-walled carbon nanotubes (SWNTs have been synthesized via a novel chemical vapor deposition (CVD approach utilizing nanoporous, iron-supported catalysts. Stable aqueous dispersions of the CVD-grown nanotubes using an anionic surfactant were also obtained. The properties of the as-produced SWNTs were characterized through atomic force microscopy and Raman spectroscopy and compared with purified SWNTs produced via the high-pressure CO (HiPCO method as a reference, and the nanotubes were observed with greater lengths than those of similarly processed HiPCO SWNTs.

  7. Significance of vapor phase chemical reactions on CVD rates predicted by chemically frozen and local thermochemical equilibrium boundary layer theories

    Science.gov (United States)

    Gokoglu, Suleyman A.

    1988-01-01

    This paper investigates the role played by vapor-phase chemical reactions on CVD rates by comparing the results of two extreme theories developed to predict CVD mass transport rates in the absence of interfacial kinetic barrier: one based on chemically frozen boundary layer and the other based on local thermochemical equilibrium. Both theories consider laminar convective-diffusion boundary layers at high Reynolds numbers and include thermal (Soret) diffusion and variable property effects. As an example, Na2SO4 deposition was studied. It was found that gas phase reactions have no important role on Na2SO4 deposition rates and on the predictions of the theories. The implications of the predictions of the two theories to other CVD systems are discussed.

  8. Simulation of polyatomic discharges for thin film deposition processes in low-pressure plasma reactors

    Science.gov (United States)

    Bera, Kallol

    conditions of experimental reactors. The discharge models were used to investigate the effects of operating and design parameters of the reactors on plasma process characteristics to obtain better process characteristics on the wafer. These parameters can be used to design new reactors for the deposition/etching process. The models can be modified for different feed gases for other applications like plasma etching or sputtering.

  9. REE concentration processes in ion adsorption deposits: Evidence from Madagascar and China.

    Science.gov (United States)

    Smith, Martin; Estrade, Guillaume; Marquis, Eva; Goodenough, Kathryn; Nasun, Peter; Cheng, Xu; Kynicky, Jindrich

    2017-04-01

    Lateritic clay deposits, where the rare earth elements (REE) occur adsorbed to clay mineral surfaces, are the world's dominant supply of heavy REE (Gd-Lu). These deposits are currently only mined in China where there is a reported heavy REE enrichment, but other deposits are currently under exploration in Brazil, the Philippines and Madagascar. Concentration of REE within IADs has been proposed to be a dominantly supergene process, where easily degradable REE-minerals (e.g. REE-fluorcarbonates) break down and release REE that are then adsorbed to clay minerals resulting in HREE enrichment. Here we present data from the Ambohimirahavavy Complex, Madagascar, and compare them to data from mineralised profiles in China, with the aim of further constraining the formation and REE enrichment processes in ion adsorption deposits. Bulk rock total REE contents from Madagascar vary from 400-5000ppm, with the HREE varying from 10 to 20% of the TREE. Ammonium Sulphate leaches (designed to remove clay-adsorbed REE) of laterite show leachable TREE from 130-500ppm, with no preferential HREE adsorption. Within the sequential extraction procedure the reducible fraction (hydroxylammonium chloride leach) showed the highest REE, but this is largely attributable to Ce4+ in oxide layers. Analysis of laterite profiles show that the REE distribution is heterogeneous, with control from both bedrock heterogeneity, and the hydrological variation between pedolith and saprolith. Similar patterns are seen in Chinese profiles from Jiangxi province. X-ray diffraction shows the clay fraction in all sites is dominated by kaolinite and halloysite. These data are consistent with experimental data which show that kaolinite is only HREE selective in high ionic strength solutions (Coppin et al., 2002), and suggest that HREE enrichment in lateritic deposits may be a function of exceptional bed rock conditions. Petrographic investigation of the Zhaibei granite, immediately underlying HREE enriched

  10. Processing and characterization of high temperature superconductor thin films deposited by electron beam co-evaporation

    Science.gov (United States)

    Huh, Jeong-Uk

    Ever since the high temperature superconductors (HTS) were discovered in the late 1980s, there have been enormous efforts to make this into applications such as power transmission cables, transformers, motors and generators. However, many obstacles in performance and high manufacturing cost made this difficult. The first generation HTS wires had low critical current density and were expensive to fabricate. The motivation of this research was to make high performance and low cost second generation HTS coated conductor. Electron beam co-evaporation technique was used to deposit YBCO(YBa2Cu3O7-x ) film at a high rate (10nm/s and higher) on single crystals and metal tapes. The oxygen pressure at the stage of depositing Y, Ba, Cu was 5x10 -5 Torr and the process temperature was 810-840°C. In-situ Fourier Transform Infrared spectroscopy (FTIR) was used to monitor the optical properties of the YBCO during and after deposition. The deposit transformed to a glassy amorphous mixture of Y, Ba and Cu at 3 mTorr of oxygen. YBCO crystallization occurred after extra oxygen was applied to several Torr. FTIR showed almost the same signature during the formation of YBCO and liquid Ba-Cu-O during deposition, which indicates the liquid played an important role in determining the properties of YBCO in terms of providing epitaxy and fast transport of atoms to nucleate on the film-metal interface. The transformation was very rapid---seconds to minutes, compared to minutes to hours for other post-reaction processes. The oxygen partial pressure and the rate of oxidation (supersaturation) in the liquid region defined in the YBCO phase stability diagram determined the electrical and microstructural properties. In-situ X-ray diffraction heating stage with ambient control was utilized to study this supersaturation effect and explore the temperature-pressure space during YBCO growth. With all the information gathered from FTIR and XRD in-situ experiments and also with nano-engineering during

  11. Epigenetic modifications and human pathologies: cancer and CVD.

    Science.gov (United States)

    Duthie, Susan J

    2011-02-01

    Epigenetic changes are inherited alterations in DNA that affect gene expression and function without altering the DNA sequence. DNA methylation is one epigenetic process implicated in human disease that is influenced by diet. DNA methylation involves addition of a 1-C moiety to cytosine groups in DNA. Methylated genes are not transcribed or are transcribed at a reduced rate. Global under-methylation (hypomethylation) and site-specific over-methylation (hypermethylation) are common features of human tumours. DNA hypomethylation, leading to increased expression of specific proto-oncogenes (e.g. genes involved in proliferation or metastasis) can increase the risk of cancer as can hypermethylation and reduced expression of tumour suppressor (TS) genes (e.g. DNA repair genes). DNA methyltransferases (DNMT), together with the methyl donor S-adenosylmethionine (SAM), facilitate DNA methylation. Abnormal DNA methylation is implicated not only in the development of human cancer but also in CVD. Polyphenols, a group of phytochemicals consumed in significant amounts in the human diet, effect risk of cancer. Flavonoids from tea, soft fruits and soya are potent inhibitors of DNMT in vitro, capable of reversing hypermethylation and reactivating TS genes. Folates, a group of water-soluble B vitamins found in high concentration in green leafy vegetables, regulate DNA methylation through their ability to generate SAM. People who habitually consume the lowest level of folate or with the lowest blood folate concentrations have a significantly increased risk of developing several cancers and CVD. This review describes how flavonoids and folates in the human diet alter DNA methylation and may modify the risk of human colon cancer and CVD.

  12. The fate of SOC during the processes of water erosion and subsequent deposition: a field study.

    Science.gov (United States)

    van Hemelryck, H.; Govers, G.; van Oost, K.; Merckx, R.

    2009-04-01

    Globally soils are the largest terrestrial pool of carbon (C). A relatively small increase or decrease in soil carbon content due to changes in land use or management practices could therefore result in a significant net exchange of C between the soil C reservoir and the atmosphere. As such, the geomorphic processes of water and tillage erosion have been identified to significantly impact on this large pool of soil organic carbon (SOC). Soil erosion, transport and deposition not only result in redistribution of sediments and associated carbon within a landscape, but also affect the exchange of C between the pedosphere and the atmosphere. The direction and magnitude of an erosion-induced change in the global C balance is however a topic of much debate as opposing processes interact: i) At eroding sites a net uptake of C could be the result of reduced respiration rates and continued inputs of newly produced carbon. ii) Colluvial deposition of eroded sediment and SOC leads to the burial of the original topsoil and this may constrain the decomposition of its containing SOC. iii) Eroded sediment could be transported to distal depositional environments or fluvial systems where it will either be conserved or become rapidly mineralized. iv) Increased emission of CO2 due to erosion may result from the disruptive energy of erosive forces causing the breakdown of aggregates and exposing previously protected SOC to microbial decomposition. The above-mentioned processes show a large spatial and temporal variability and assessing their impact requires an integrated modeling approach. However uncertainties about the basic processes that accompany SOC displacement are still large. This study focuses on one of these large information gaps: the fate of eroded and subsequently deposited SOC. A preceding experimental study (Van Hemelryck et al., 2008) was used to identify controlling factors (erosional intensity, changes in soil structure,…). However this experimental research

  13. A replacement of high-k process for CMOS transistor by atomic layer deposition

    Science.gov (United States)

    Han, Jin-Woo; Choi, Byung Joon; Yang, J. Joshua; Moon, Dong-Il; Choi, Yang-Kyu; Williams, R. Stanley; Meyyappan, M.

    2013-08-01

    A replacement of high-k process was implemented on an independent double gate FinFET, following the ordinary gate-first process with minor modifications. The present scheme involves neither exotic materials nor unprecedented processing. After the source/drain process, the sacrificial gate oxide was selectively substituted with amorphous Ta2O5 via conformal plasma enhanced atomic layer deposition. The present gate-first gate-dielectric-last scheme combines the advantages of the process and design simplicity of the gate-first approach and the control of the effective gate workfunction and the interfacial oxide of the gate-dielectric-last approach. Electrical characterization data and cross-sectional images are provided as evidence of the concept.

  14. Nanocrystalline sp 2 and sp 3 carbons: CVD synthesis and applications

    Science.gov (United States)

    Terranova, M. L.; Rossi, M.; Tamburri, E.

    2016-11-01

    The design and production of innovative materials based on nanocrystalline sp 2- and sp 3-coordinated carbons is presently a focus of the scientific community. We present a review of the nanostructures obtained in our labs using a series of synthetic routes, which make use of chemical vapor deposition (CVD) techniques for the selective production of non-planar graphitic nanostructures, nanocrystalline diamonds, and hybrid two-phase nanostructures.

  15. One-step electrodeposition process of CuInSe2: Deposition time effect

    Indian Academy of Sciences (India)

    O Meglali; N Attaf; A Bouraiou; M S Aida; S Lakehal

    2014-10-01

    CuInSe2 thin films were prepared by one-step electrodeposition process using a simplified twoelectrodes system. The films were deposited, during 5, 10, 15 and 20 min, from the deionized water solution consisting of CuCl2, InCl3 and SeO2 onto ITO-coated glass substrates. As-deposited films have been annealed under vacuum at 300 °C during 30 min. The structural, optical band gap and electrical resistivity of elaborated films were studied, respectively, using X-ray diffraction (XRD), Raman spectroscopy, UV spectrophotometer and four-point probe method. The micro structural parameters like lattice constants, crystallite size, dislocation density and strain have been evaluated. The XRD investigation proved that the film deposited at 20 min present CuInSe2 single phase in its chalcopyrite structure and with preferred orientation along (1 1 2) direction, whereas the films deposited at 5, 10 and 15 min show the CuInSe2 chalcopyrite structure with the In2Se3 as secondary phase. We have found that the formation mechanism of CuInSe2 depends on the In2Se3 phase. The optical band gap of the films is found to decrease from 1.17 to 1.04 eV with increase in deposition time. All films show Raman spectra with a dominant A1 mode at 174 cm-1, confirming the chalcopyrite crystalline quality of these films. The films exhibited a range of resistivity varying from 2.3 × 10-3 to 4.4 × 10-1 cm.

  16. Chemically deposited CdS by an ammonia-free process for solar cells window layers

    Energy Technology Data Exchange (ETDEWEB)

    Ochoa-Landin, R. [Centro de Investigacion y Estudios Avanzados del IPN, Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico); Departamento de Fisica, Universidad de Sonora, Apdo. Postal 88, 83190 Hermosillo, Son. (Mexico); Sastre-Hernandez, J.; Vigil-Galan, O. [Escuela Superior de Fisica y Matematicas, Instituto Politecnico Nacional UP Adolfo Lopez Mateos, Edif. 9, 07738 Mexico, DF (Mexico); Ramirez-Bon, R. [Centro de Investigacion y Estudios Avanzados del IPN, Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico)

    2010-02-15

    Chemically deposited CdS window layers were studied on two different transparent conductive substrates, namely indium tin oxide (ITO) and fluorine doped tin oxide (FTO), to determine the influence of their properties on CdS/CdTe solar cells performance. Three types of CdS films obtained from different chemical bath deposition (CBD) processes were studied. The three CBD processes employed sodium citrate as the complexing agent in partial or full substitution of ammonia. The CdS films were studied by X-ray diffraction, optical transmission spectroscopy and atomic force microscopy. CdS/CdTe devices were completed by depositing 3 {mu}m thick CdTe absorbent layers by means of the close-spaced vapor transport technique (CSVT). Evaporated Cu-Au was used as the back contact in all the solar cells. Dark and under illumination J-V characteristic and quantum efficiency measurements were done on the CdS/CdTe devices to determine their conversion efficiency and spectral response. The efficiency of the cells depended on the window layer and on the transparent contact with values between 5.7% and 8.7%. (author)

  17. Bio-mineralization and potential biogeochemical processes in bauxite deposits: genetic and ore quality significance

    Science.gov (United States)

    Laskou, Magdalini; Economou-Eliopoulos, Maria

    2013-08-01

    The Parnassos-Ghiona bauxite deposit in Greece of karst type is the 11th largest bauxite producer in the world. The mineralogical, major and trace-element contents and δ18O, δ12C, δ34S isotopic compositions of bauxite ores from this deposit and associated limestone provide valuable evidence for their origin and biogeochemical processes resulting in the beneficiation of low grade bauxite ores. The organic matter as thin coal layers, overlying the bauxite deposits, within limestone itself (negative δ12C isotopic values) and the negative δ34S values in sulfides within bauxite ores point to the existence of the appropriate circumstances for Fe bio-leaching and bio-mineralization. Furthermore, a consortium of microorganisms of varying morphological forms (filament-like and spherical to lenticular at an average size of 2 μm), either as fossils or presently living and producing enzymes, is a powerful factor to catalyze the redox reactions, expedite the rates of metal extraction and provide alternative pathways for metal leaching processes resulting in the beneficiation of bauxite ore.

  18. Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

    Directory of Open Access Journals (Sweden)

    Dychalska Anna

    2015-12-01

    Full Text Available Raman spectroscopy is a most often used standard technique for characterization of different carbon materials. In this work we present the Raman spectra of polycrystalline diamond layers of different quality, synthesized by Hot Filament Chemical Vapor Deposition method (HF CVD. We show how to use Raman spectroscopy for the analysis of the Raman bands to determine the structure of diamond films as well as the structure of amorphous carbon admixture. Raman spectroscopy has become an important technique for the analysis of CVD diamond films. The first-order diamond Raman peak at ca. 1332 cm−1 is an unambiguous evidence for the presence of diamond phase in the deposited layer. However, the existence of non-diamond carbon components in a CVD diamond layer produces several overlapping peaks in the same wavenumber region as the first order diamond peak. The intensities, wavenumber, full width at half maximum (FWHM of these bands are dependent on quality of diamond layer which is dependent on the deposition conditions. The aim of the present work is to relate the features of diamond Raman spectra to the features of Raman spectra of non-diamond phase admixture and occurrence of other carbon structures in the obtained diamond thin films.

  19. Depositional and welding processes in low aspect ratio ignimbrites: examples from the Sulcis Volcanic District(Sardinia, Italy)

    OpenAIRE

    Mulas, Maurizio

    2013-01-01

    The rheomorphic, high-grade, welded ignimbrites are a special type of pyroclastic density current (PDC) deposits usually associated with high intensity volcanic explosive activity (VEI >4). They are characterized by a high variability of physical features and sedimentological structures that may testify different emplacement mechanisms from a PDC and a different response to topography during and after the end of the depositional processes. When the temperatures of the deposits are higher than...

  20. Preparation of Chromium Oxide Coatings on Aluminum Borate Whiskers by a Hydrothermal Deposition Process

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    Aluminum borate whiskers (9Al2O32B2O3) can be used to reinforce aluminum alloys to produce light and strong composites. However, the adverse interfacial reactions between the whiskers and the aluminum alloys inhibit their practical uses; therefore, a protective coating is needed on whiskers. In this work, aluminum borate whiskers were coated with chromium-coating deposits in a hydrothermal solution containing CrCl3, Na2C4H4O6, NaPH2O2, and H3BO3. The presence of the impurity P in the hydrothermal deposits can be avoided by reducing the amount of NaPH2O2 in the coating solution. Thermodynamic analysis was used to discuss the behavior of ions in the coating process. The subsequent heating of the hydrothermal products in air at 800 ℃ yielded smooth Cr2O3 films with a thickness of 0.060.07 μm.

  1. Cold Vacuum Dryer (CVD) Facility Fire Protection System Design Description (SYS 24)

    Energy Technology Data Exchange (ETDEWEB)

    SINGH, G.

    2000-10-17

    This system design description (SDD) addresses the Cold Vacuum Drying (CVD) Facility fire protection system (FPS). The primary features of the FPS for the CVD are a fire alarm and detection system, automatic sprinklers, and fire hydrants. The FPS also includes fire extinguishers located throughout the facility and fire hydrants to assist in manual firefighting efforts. In addition, a fire barrier separates the operations support (administrative) area from the process bays and process bay support areas. Administrative controls to limit combustible materials have been established and are a part of the overall fire protection program. The FPS is augmented by assistance from the Hanford Fire Department (HED) and by interface systems including service water, electrical power, drains, instrumentation and controls. This SDD, when used in conjunction with the other elements of the definitive design package, provides a complete picture of the FPS for the CVD Facility.

  2. Synthesis of silicon carbide nanowires by solid phase source chemical vapor deposition

    Institute of Scientific and Technical Information of China (English)

    NI Jie; LI Zhengcao; ZHANG Zhengjun

    2007-01-01

    In this paper,we report a simple approach to synthesize silicon carbide(SiC)nanowires by solid phase source chemical vapor deposition(CVD) at relatively low temperatures.3C-SiC nanowires covered by an amorphous shell were obtained on a thin film which was first deposited on silicon substrates,and the nanowires are 20-80 am in diameter and several μm in length,with a growth direction of[200].The growth of the nanowires agrees well on vapor-liquid-solid (VLS)process and the film deposited on the substrates plays an important role in the formation of nanowires.

  3. A Study on Reactive Spray Deposition Technology Processing Parameters in the Context of Pt Nanoparticle Formation

    Science.gov (United States)

    Roller, Justin M.; Maric, Radenka

    2015-12-01

    Catalytic materials are complex systems in which achieving the desired properties (i.e., activity, selectivity and stability) depends on exploiting the many degrees of freedom in surface and bulk composition, geometry, and defects. Flame aerosol synthesis is a process for producing nanoparticles with ample processing parameter space to tune the desired properties. Flame dynamics inside the reactor are determined by the input process variables such as solubility of precursor in the fuel; solvent boiling point; reactant flow rate and concentration; flow rates of air, fuel and the carrier gas; and the burner geometry. In this study, the processing parameters for reactive spray deposition technology, a flame-based synthesis method, are systematically evaluated to understand the residence times, reactant mixing, and temperature profiles of flames used in the synthesis of Pt nanoparticles. This provides a framework for further study and modeling. The flame temperature and length are also studied as a function of O2 and fuel flow rates.

  4. Q-factors of CVD monolayer graphene and graphite inductors

    Science.gov (United States)

    Wang, Zidong; Zhang, Qingping; Peng, Pei; Tian, Zhongzheng; Ren, Liming; Zhang, Xing; Huang, Ru; Wen, Jincai; Fu, Yunyi

    2017-08-01

    A carbon-based inductor may serve as an important passive component in a carbon-based radio-frequency (RF) integrated circuit (IC). In this work, chemical vapor deposition (CVD) synthesized monolayer graphene and graphite inductors are fabricated and their Q-factors are investigated. We find that the large series resistance of signal path (including coil resistance and contact resistance) in monolayer graphene inductors causes negative Q-factors at the whole frequency range in measurement. Comparatively, some of the graphite inductors have all of their Q-factors above zero, due to their small signal path resistance. We also note that some other graphite inductors have negative Q-factor values at low frequency regions, but positive Q-factor values at high frequency regions. With an equivalent circuit model, we confirm that the negative Q-factors of some graphite inductors at low frequency regions are related to their relatively large contact resistances, and we are able to eliminate these negative Q-factors by improving the graphite-metal contact. Furthermore, the peak Q-factor (Q p) can be enhanced by lowering down the resistance of graphite coil. For an optimized 3/4-turn graphite inductor, the measured maximum Q-factor (Q m) can reach 2.36 and the peak Q-factor is theoretically predicted by the equivalent circuit to be as high as 6.46 at a high resonant frequency, which is beyond the testing frequency range. This research indicates that CVD synthesized graphite thin film is more suitable than graphene for fabricating inductors in carbon-based RF IC in the future.

  5. [Paste deposition and chip bonding process development]. IBM, Endicott tenth quarterly report

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-05-01

    The scope of Endicott activity during this quarter includes: paste deposition process development and chip bonding process development. It was discovered that small voids exist in the photobumps. These are typically at the base of the bump and are believed to have always been present. Although the reliability test results have been positive and no failure is attributed to voids, the process development work during the last quarter has focused on understanding how these form and how to reduce them. High feed pressure, slow nozzle speed and lower viscosity reduce void formation. Nozzle design changes have been identified. One change will increase the shearing of the paste during feed, thus reducing the viscosity, a second change will allow higher feed pressures. Chip bonding process development has focused on correlating bonding results between the IBM in-house chip bonder made by Research Devices, Inc. and the Universal development bond tool. Two variables have been identified that correlate with poor bond results. The report describes more detail of the activity during the tenth quarter for paste deposition and chip bonding in each of these areas.

  6. Lateral gas phase diffusion length of boron atoms over Si/B surfaces during CVD of pure boron layers

    NARCIS (Netherlands)

    Mohammadi, V.; Nihtianov, S.

    2016-01-01

    The lateral gas phase diffusion length of boron atoms, LB, along silicon and boron surfaces during chemical vapor deposition(CVD) using diborane (B2H6) is reported. The value of LB is critical for reliable and uniform boron layer coverage. The presented information was obtained experimentally and co

  7. Lateral gas phase diffusion length of boron atoms over Si/B surfaces during CVD of pure boron layers

    NARCIS (Netherlands)

    Mohammadi, V.; Nihtianov, S.

    2016-01-01

    The lateral gas phase diffusion length of boron atoms, LB, along silicon and boron surfaces during chemical vapor deposition(CVD) using diborane (B2H6) is reported. The value of LB is critical for reliable and uniform boron layer coverage. The presented information was obtained experimentally and co

  8. Effect of mixture ratios and nitrogen carrier gas flow rates on the morphology of carbon nanotube structures grown by CVD

    CSIR Research Space (South Africa)

    Malgas, GF

    2008-02-01

    Full Text Available This paper reports on the growth of carbon nanotubes (CNTs) by thermal Chemical Vapour Deposition (CVD) and investigates the effects of nitrogen carrier gas flow rates and mixture ratios on the morphology of CNTs on a silicon substrate by vaporizing...

  9. Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiNx multilayers

    Science.gov (United States)

    Majee, Subimal; Fátima Cerqueira, Maria; Tondelier, Denis; Geffroy, Bernard; Bonnassieux, Yvan; Alpuim, Pedro; Bourée, Jean Eric

    2014-01-01

    The reliability and stability are key issues for the commercial utilization of organic photovoltaic devices based on flexible polymer substrates. To increase the shelf-lifetime of these devices, transparent moisture barriers of silicon nitride (SiNx) films are deposited at low temperature by hot wire CVD (HW-CVD) process. Instead of the conventional route based on organic/inorganic hybrid structures, this work defines a new route consisting in depositing multilayer stacks of SiNx thin films, each single layer being treated by argon plasma. The plasma treatment allows creating smoother surface and surface atom rearrangement. We define a critical thickness of the single layer film and focus our attention on the effect of increasing the number of SiNx single-layers on the barrier properties. A water vapor transmission rate (WVTR) of 2 × 10-4 g/(m2·day) is reported for SiNx multilayer stack and a physical interpretation of the plasma treatment effect is given.

  10. Sedimentological characteristics and depositional processes of sediment gravity flows in rift basins: The Palaeogene Dongying and Shahejie formations, Bohai Bay Basin, China

    Science.gov (United States)

    Liu, Lei; Chen, Hongde; Zhong, Yijiang; Wang, Jun; Xu, Changgui; Chen, Anqing; Du, Xiaofeng

    2017-10-01

    Sediment gravity flow deposits are common, particularly in sandy formations, but their origin has been a matter of debate and there is no consensus about the classification of such deposits. However, sediment gravity flow sandstones are economically important and have the potential to meet a growing demand in oil and gas exploration, so there is a drive to better understand them. This study focuses on sediment gravity flow deposits identified from well cores in Palaeogene deposits from the Liaodong Bay Depression in Bohai Bay Basin, China. We classify the sediment gravity flow deposits into eight lithofacies using lithological characteristics, grain size, and sedimentary structures, and interpret the associated depositional processes. Based on the scale, spatial distribution, and contact relationships of sediment gravity flow deposits, we defined six types of lithofacies associations (LAs) that reflect transformation processes and depositional morphology: LA1 (unconfined proximal breccia deposits), LA2 (confined channel deposits), LA3 (braided-channel lobe deposits), LA4 (unconfined lobe deposits), LA5 (distal sheet deposits), and LA6 (non-channelized sheet deposits). Finally, we established three depositional models that reflect the sedimentological characteristics and depositional processes of sediment gravity flow deposits: (1) slope-apron gravel-rich depositional model, which involves cohesive debris flows deposited as LA1 and dilute turbidity currents deposited as LA5; (2) non-channelized surge-like turbidity current depositional model, which mainly comprises sandy slumping, suspended load dominated turbidity currents, and dilute turbidity currents deposited as LA5 and LA6; and (3) channelized subaqueous-fan depositional model, which consists of non-cohesive bedload dominated turbidity currents, suspended load dominated turbidity currents, and dilute turbidity currents deposited as LA2-LA5, originating from sustained extrabasinal turbidity currents

  11. Influence of flocculation on sediment deposition process at the Three Gorges Reservoir.

    Science.gov (United States)

    Wang, Dangwei; Liu, Xiaofang; Ji, Zuwen; Dong, Zhandi; Hu, Haihua

    2016-01-01

    By comparing the original particle gradation of sediment from the Three Gorges Reservoir with the single particle gradation, the differences in these two particle gradations showed that there is sediment flocculation in the Three Gorges Reservoir, which can accelerate the sediment deposition rate in the reservoir. In order to determine the influence of flocculation on the sediment settling velocity, sediment was collected at the Three Gorges Reservoir, and the indoor quiescent settling experiment was performed to study the mechanism of sediment flocculation. The experimental results showed that sediments aggregated from single particles into floccules in the settling processes. The single particles smaller than 0.022 mm will participate in the formation of floccules, which accounts for 83% of the total amount of sediment in the Three Gorges Reservoir. Moreover, the degree of sediment flocculation and the increase in sediment settling velocity were directly proportional to the sediment concentration. Taking the average particle size and the median particle size as the representative particle size, respectively, the maximum flocculation factors were calculated to be 3.4 and 5.0. Due to the sediment flocculation, the volume of sediment deposition will increase by 66% when the mass settling flux factor of total sediment had a maximum value of 1.66, suggesting that flocculation has a significant influence on the sediment deposition rate in the Three Gorges Reservoir.

  12. What processes at mid-ocean ridges tell us about volcanogenic massive sulfide deposits

    Science.gov (United States)

    Cathles, Lawrence M.

    2011-07-01

    Episodic seafloor spreading, ridge topography, and fault movement at ridges find (more extreme) analogs in the arc and back-arc setting where the volcanogenic massive sulfide (VMS) deposits that we mine today were formed. The factors affecting sulfide accumulation efficiency and the extent to which sulfides are concentrated spatially are the same in both settings, however. The processes occurring at mid-ocean ridges therefore provide a useful insight into those producing VMS deposits in arcs and back-arcs. The critical observation investigated here is that all the heat introduced by seafloor spreading at mid-ocean ridges is carried out of the crust within a few hundred meters of the ridge axis by ˜350°C hydrothermal fluids. The high-temperature ridge hydrothermal systems are tied to the presence of magma at the ridge axis and greatly reduce the size and control the shape of axial magma intrusions. The amount of heat introduced to each square kilometer of ocean crust during its formation can be calculated, and its removal by high-temperature convection allows calculation of the total base metal endowment of the ocean basins. Using reasonable metal deposition efficiencies, we conclude that the ocean floor is a giant VMS district with metal resources >600 times the total known VMS reserves on land and a copper resource which would last >6,000 years at current production rates.

  13. Tuning polymorphism and orientation in organic semiconductor thin films via post-deposition processing.

    Science.gov (United States)

    Hiszpanski, Anna M; Baur, Robin M; Kim, Bumjung; Tremblay, Noah J; Nuckolls, Colin; Woll, Arthur R; Loo, Yueh-Lin

    2014-11-05

    Though both the crystal structure and molecular orientation of organic semiconductors are known to impact charge transport in thin-film devices, separately accessing different polymorphs and varying the out-of-plane molecular orientation is challenging, typically requiring stringent control over film deposition conditions, film thickness, and substrate chemistry. Here we demonstrate independent tuning of the crystalline polymorph and molecular orientation in thin films of contorted hexabenzocoronene, c-HBC, during post-deposition processing without the need to adjust deposition conditions. Three polymorphs are observed, two of which have not been previously reported. Using our ability to independently tune the crystal structure and out-of-plane molecular orientation in thin films of c-HBC, we have decoupled and evaluated the effects that molecular packing and orientation have on device performance in thin-film transistors (TFTs). In the case of TFTs comprising c-HBC, polymorphism and molecular orientation are equally important; independently changing either one affects the field-effect mobility by an order of magnitude.

  14. Half-sandwich cobalt complexes in the metal-organic chemical vapor deposition process

    Energy Technology Data Exchange (ETDEWEB)

    Georgi, Colin [Technische Universität Chemnitz, Faculty of Natural Science, Institute of Chemistry, Inorganic Chemistry, Chemnitz 09107 (Germany); Hapke, Marko; Thiel, Indre [Leibniz-Institut für Katalyse e.V. an der Universität Rostock (LIKAT), Albert-Einstein-Straße 29a, Rostock 18059 (Germany); Hildebrandt, Alexander [Technische Universität Chemnitz, Faculty of Natural Science, Institute of Chemistry, Inorganic Chemistry, Chemnitz 09107 (Germany); Waechtler, Thomas; Schulz, Stefan E. [Fraunhofer Institute of Electronic Nano Systems (ENAS), Technologie-Campus 3, Chemnitz 09126 (Germany); Technische Universität Chemnitz, Center for Microtechnologies (ZfM), Chemnitz 09107 (Germany); Lang, Heinrich, E-mail: heinrich.lang@chemie.tu-chemnitz.de [Technische Universität Chemnitz, Faculty of Natural Science, Institute of Chemistry, Inorganic Chemistry, Chemnitz 09107 (Germany)

    2015-03-02

    A series of cobalt half-sandwich complexes of type [Co(η{sup 5}-C{sub 5}H{sub 5})(L)(L′)] (1: L, L′ = 1,5-hexadiene; 2: L = P(OEt){sub 3}, L′ = H{sub 2}C=CHSiMe{sub 3}; 3: L = L′ = P(OEt){sub 3}) has been studied regarding their physical properties such as the vapor pressure, decomposition temperature and applicability within the metal-organic chemical vapor deposition (MOCVD) process, with a focus of the influence of the phosphite ligands. It could be shown that an increasing number of P(OEt){sub 3} ligands increases the vapor pressure and thermal stability of the respective organometallic compound. Complex 3 appeared to be a promising MOCVD precursor with a high vapor pressure and hence was deposited onto Si/SiO{sub 2} (100 nm) substrates. The resulting reflective layer is closed, dense and homogeneous, with a slightly granulated surface morphology. X-ray photoelectron spectroscopy (XPS) studies demonstrated the formation of metallic cobalt, cobalt phosphate, cobalt oxide and cobalt carbide. - Highlights: • Thermal studies and vapor pressure measurements of cobalt half-sandwich complexes was carried out. • Chemical vapor deposition with cobalt half-sandwich complexes is reported. • The use of Co-phosphites results in significant phosphorous-doped metallic layers.

  15. RESEARCH ON LASER DIRECT DEPOSITION PROCESS OF Ti-6Al-4V ALLOY

    Institute of Scientific and Technical Information of China (English)

    S.Y. Gao; Y.Z. Zhang; L.K. Shi; B.L. Du; M.Z. Xi; H.Z. Ji

    2007-01-01

    Laser direct deposition (LDD) of metallic components is an advanced technology of combining CAD/CAM (computer aided design/computer aided manufacturing), high power laser, and rapid prototyping. This technology uses laser beam to melt the powders fed coaxially into the molten pool by the laser beam to fabricate fully dense metallic components. The present article mainly studies the LDD of Ti-6Al-4V alloy, which can be used to fabricate aircraft components. The mechanical properties of the Ti-6Al-4V alloy, fabricated by LDD, are obtained using the tension test, and the oxygen content of used powders and deposited specimens are measured. In the present article, it can be seen that the mechanical properties obtained using this method are higher than the ones obtained by casting, and equal to those got by wrought anneal. One aircraft pan has been made using the LDD process. Because of this aircraft part, with sophisticated shape, the effect of the laser scanning track on the internal soundness of the deposited part was discussed.

  16. Impact of hydrotalcite deposition on biogeochemical processes in a shallow tropical bay.

    Science.gov (United States)

    Alongi, Daniel M; McKinnon, A David

    2011-03-01

    The biogeochemistry of a tropical shoal bay (Melville Bay, Australia) impacted by the effluent release, precipitation, and deposition of hydrotalcite from an alumina refinery was studied in both wet and dry seasons. Within the deposition zone, sulfate reduction dominated benthic carbon cycling accounting for ≈100% of total microbial activity, with rates greater than those measured in most other marine sediments. These rapid rates of anoxic metabolism resulted in high rates of sulfide and ammonium production and low C:S ratios, implying significant preservation of S in stable sulfide minerals. Rates of total microbial activity were significantly less in control sediments of equivalent grain size, where sulfate reduction accounted for ≈50% of total benthic metabolism. Rates of planktonic carbon cycling overlying the deposition zone were also greater than those measured in the control areas of southern Melville Bay. At the sediment surface, productive algal and cyanobacterial mats helped stabilize the sediment surface and oxidize sulfide to sulfate to maintain a fully oxygenated water-column overlying the impacted zone. The mats utilized a significant fraction of dissolved inorganic N and P released from the sea bed; some nutrients escaped to the water-column such that benthic regeneration of NH₄+ and PO₄³⁻ accounted for 100% and 42% of phytoplankton requirements for N and P, respectively. These percentages are high compared to other tropical coastal environments and indicate that benthic nutrient recycling may be a significant factor driving water-column production overlying the deposition zone. With regard to remediation, it is recommended that the sea bed not be disturbed as attempts at removal may result in further environmental problems and would require specific assessment of the proposed removal process.

  17. Textural and depositional processes of surface sediments of Kalpakkam, Southeast Coast of India

    Institute of Scientific and Technical Information of China (English)

    Usha NATESAN; K.Deepthi; AL.MUTHULAKSHMI; Vincent A.FERRER; S.V.NARASIMHAN; V.P.VENUGOPALAN

    2012-01-01

    To understand the influence of human disturbance on the sediment processes along Kalpakkam coast,India,beach and seabed sediments at 200 m,500 m,and 1 km into the sea were collected monthly for one year and analyzed.Coarser material close to the tidal inlets (river) and manmade structures (sea wall) indicate the effect of these features in altering the grain size distribution from the general trend.The bivariant plots confirm the dominance of deposition under beach environment.The CM diagram (C-one percentile grain diameter,M-median) divulges that the deposition takes place by suspension and rolling of sediments with C < 1 mm.Linear discriminate function analysis for sediments at Kalpakkam indicates a shallow marine environment for all the samples collected.On the multigroup multivariant discriminant functions V1-V2 diagram,the bulk of the samples from Kalpakkam to Mahabalipuram fall in the field of beach deposition.These results show that reworked sediments,submerged during the Holocene marine transgression are being deposited on present-day beaches by waves,currents and rivers in the study area.Though a high wave energy environment is prevailing in the study area,dominant northward sediment transport along the Kalpakkam-Mahabalipuram coast is not altered due to human interventions.Beach building activity in front of the sea wall ensures the safety ofIndira Gandhi Centre for Atomic Research (IGCAR) from wave actions without causing any significant changes to the coastal environment.

  18. Deposition of calcium carbonate films by a polymer-induced liquid-precursor (PILP) process

    Science.gov (United States)

    Gower, Laurie B.; Odom, Damian J.

    2000-03-01

    A polypeptide additive has been used to transform the solution crystallization of calcium carbonate to a solidification process of a liquid-phase mineral precursor. In situ observations reveal that polyaspartate induces liquid-liquid phase separation of droplets of a mineral precursor. The droplets deposit on the substrate and coalesce to form a coating, which then solidifies into calcitic tablets and films. Transition bars form during the amorphous to crystalline transition, leading to sectorization of calcite tablets, and the defect textures and crystal morphologies are atypical of solution grown crystals. The formation of nonequilibrium crystal morphologies using an acidic polypeptide may have implications in the field of biomineralization, and the environmentally friendly aspects of this polymer-induced liquid-precursor (PILP) process may offer new techniques for aqueous-based processing of ceramic films, coatings, and particulates.

  19. Pulsed laser deposition of the lysozyme protein: an unexpected “Inverse MAPLE” process

    DEFF Research Database (Denmark)

    Schou, Jørgen; Matei, Andreea; Constantinescu, Catalin

    2012-01-01

    the ejection and deposition of lysozyme. This can be called an “inverse MAPLE” process, since the ratio of “matrix” to film material in the target is 10:90, which is inverse of the typical MAPLE process where the film material is dissolved in the matrix down to several wt.%. Lysozyme is a well-known protein...... which is used in food processing and is also an important constituent of human secretions such as sweat and saliva. It has a well-defined mass (14307 u) and can easily be detected by mass spectrometric methods such as MALDI (Matrix-assisted laser desorption ionization) in contrast to many other organic...

  20. Chemical characterisation of rainwater at Stromboli Island (Italy): The effect of post-depositional processes

    Science.gov (United States)

    Cangemi, Marianna; Madonia, Paolo; Favara, Rocco

    2017-04-01

    Volcanoes emit fluids and solid particles into the atmosphere that modify the chemical composition of natural precipitation. We have investigated the geochemistry of Stromboli's rainfall during the period from November 2014 to March 2016 using a network of a new type of sampler specifically designed for operations on volcanic islands. We found that most of the chemical modifications are due to processes occurring after the storage of rainwater in the sampling bottles. These processes include dissolution of volcanogenic soluble salts encrusting volcanic ash and a variable contribution of sea spray aerosol. Our data showed noticeably less scatter than has previously been achieved with a different sampling system that was more open to the atmosphere. This demonstrates the improved efficacy of the new sampler design. The data showed that post-depositional chemical alteration of rain samples dominates over processes occurring during droplet formation ad precipitation. This has important implications for the calculation of fluxes of chemicals from rainfall in volcanic regions.

  1. Chemical vapor deposition graphene transfer process to a polymeric substrate assisted by a spin coater

    Science.gov (United States)

    Kessler, Felipe; da Rocha, Caique O. C.; Medeiros, Gabriela S.; Fechine, Guilhermino J. M.

    2016-03-01

    A new method to transfer chemical vapor deposition graphene to polymeric substrates is demonstrated here, it is called direct dry transfer assisted by a spin coater (DDT-SC). Compared to the conventional method DDT, the improvement of the contact between graphene-polymer due to a very thin polymeric film deposited by spin coater before the transfer process prevented air bubbles and/or moisture and avoided molecular expansion on the graphene-polymer interface. An acrylonitrile-butadiene-styrene copolymer, a high impact polystyrene, polybutadiene adipate-co-terephthalate, polylactide acid, and a styrene-butadiene-styrene copolymer are the polymers used for the transfers since they did not work very well by using the DDT process. Raman spectroscopy and optical microscopy were used to identify, to quantify, and to qualify graphene transferred to the polymer substrates. The quantity of graphene transferred was substantially increased for all polymers by using the DDT-SC method when compared with the DDT standard method. After the transfer, the intensity of the D band remained low, indicating low defect density and good quality of the transfer. The DDT-SC transfer process expands the number of graphene applications since the polymer substrate candidates are increased.

  2. Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition

    Energy Technology Data Exchange (ETDEWEB)

    Deng, Zhang; He, Wenjie; Duan, Chenlong [State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei 430074 (China); Chen, Rong, E-mail: rongchen@mail.hust.edu.cn [State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074 (China); Shan, Bin [State Key Laboratory of Material Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei 430074 (China)

    2016-01-15

    Spatial atomic layer deposition (SALD) is a promising technology with the aim of combining the advantages of excellent uniformity and conformity of temporal atomic layer deposition (ALD), and an industrial scalable and continuous process. In this manuscript, an experimental and numerical combined model of atmospheric SALD system is presented. To establish the connection between the process parameters and the growth efficiency, a quantitative model on reactant isolation, throughput, and precursor utilization is performed based on the separation gas flow rate, carrier gas flow rate, and precursor mass fraction. The simulation results based on this model show an inverse relation between the precursor usage and the carrier gas flow rate. With the constant carrier gas flow, the relationship of precursor usage and precursor mass fraction follows monotonic function. The precursor concentration, regardless of gas velocity, is the determinant factor of the minimal residual time. The narrow gap between precursor injecting heads and the substrate surface in general SALD system leads to a low Péclet number. In this situation, the gas diffusion act as a leading role in the precursor transport in the small gap rather than the convection. Fluid kinetics from the numerical model is independent of the specific structure, which is instructive for the SALD geometry design as well as its process optimization.

  3. Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes

    Energy Technology Data Exchange (ETDEWEB)

    Mantovan, R., E-mail: roberto.mantovan@mdm.imm.cnr.it [Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza (Italy); Vangelista, S.; Kutrzeba-Kotowska, B.; Cocco, S.; Lamperti, A.; Tallarida, G. [Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza (MB) (Italy); Mameli, D. [Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza (Italy); Dipartimento di Scienze Chimiche, Universita di Cagliari, Cittadella Universitaria, 09042 Monserrato, Cagliari (Italy); Fanciulli, M. [Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza (Italy); Dipartimento di Scienza dei Materiali, Universita degli studi Milano-Bicocca, Via R Cozzi 53, 20125 Milano (Italy)

    2012-05-01

    Magnetic tunnel junctions, i.e. the combination of two ferromagnetic electrodes separated by an ultrathin tunnel oxide barrier, are core elements in a large variety of spin-based devices. We report on the use of combined chemical vapor and atomic layer deposition processes for the synthesis of magnetic tunnel junctions with no vacuum break. Structural, chemical and morphological characterizations of selected ferromagnetic and oxide layers are reported, together with the evidence of tunnel magnetoresistance effect in patterned Fe/MgO/Co junctions.

  4. Self-catalytic growth of tin oxide nanowires by chemical vapor deposition process

    CSIR Research Space (South Africa)

    Thabethe, BS

    2013-01-01

    Full Text Available Corporation Journal of Nanomaterials Volume 2013, Article ID 712361, 7 pages http://dx.doi.org/10.1155/2013/712361 Research Article Self-Catalytic Growth of Tin Oxide Nanowires by Chemical Vapor Deposition Process Bongani S. Thabethe,1,2 Gerald F. Malgas,1... Department of Physics, University of the Western Cape, Private Bag X17, Bellville 7535, South Africa Correspondence should be addressed to Gerald F. Malgas; gmalgas@csir.co.za and David E. Motaung; dmotaung@csir.co.za Received 20 February 2013; Accepted 10...

  5. Parametric study of an HVOF process for the deposition of nanostructured WC-Co coatings

    Science.gov (United States)

    Bartuli, Cecilia; Valente, Teodoro; Cipri, Fabio; Bemporad, Edoardo; Tului, Mario

    2005-06-01

    Nanocrystalline WC-Co coatings were deposited by high velocity oxyfuel from commercial nanostructured composite powders. Processing parameters were optimized for maximal retention of the nanocrystalline size and for minimal decarburation of the ceramic reinforcement. Thermochemical and gas-dynamical properties of gas and particle flows within the combustion flame were identified in various operating conditions by computational fluid-dynamics (CFD) simulation. Significant improvements of the mechanical properties of the coatings were obtained: a decrease of the friction coefficient was measured for the nanostructured coatings, together with an increase of microhardness and fracture toughness.

  6. Base surge deposits, eruption history, and depositional processes of a wet phreatomagmatic volcano in Central Anatolia (Cora Maar)

    Science.gov (United States)

    Gençalioğlu-Kuşcu, Gonca; Atilla, Cüneyt; Cas, Ray A. F.; Kuşcu, İlkay

    2007-01-01

    Cora Maar is a Quaternary volcano located to the 20 km northwest of Mount Erciyes, the largest of the 19 polygenetic volcanic complexes of the Cappadocian Volcanic Province in central Anatolia. Cora Maar is a typical example of a maar-diatreme volcano with a nearly circular crater with a mean diameter of c.1.2 km, and a well-bedded base surge-dominated maar rim tephra sequence up to 40 m in thickness. Having a diameter/depth ratio ( D/ d) of 12, Cora is a relatively "mature" maar compared to recent maar craters in the world. Cora crater is excavated within the andesitic lava flows of Quaternary age. The tephra sequence is not indurated, and consists of juvenile clasts up to 70 cm, non-juvenile clasts up to 130 cm, accretionary lapilli up to 1.2 cm in diameter, and ash to lapilli-sized tephra. Base surge layers display well-developed antidune structures indicating the direction of the transport. Both progressive and regressive dune structures are present within the tephra sequence. Wavelength values increase with increasing wave height, and with large wavelength and height values. Cora tephra display similarities to Taal and Laacher See base surge deposits. Impact sags and small channel structures are also common. Lateral and vertical facies changes are observed for the dune bedded and planar bedsets. According to granulometric analyses, Cora Maar tephra samples display a bimodal distribution with a wide range of Md φ values, characteristic for the surge deposits. Very poorly sorted, bimodal ash deposits generally vary from coarse tail to fine tail grading depending on the grain size distribution while very poorly sorted lapilli and block-rich deposits display a positive skewness due to fine tail grading.

  7. Parametric optimization during machining of AISI 304 Austenitic Stainless Steel using CVD coated DURATOMIC cutting insert

    Directory of Open Access Journals (Sweden)

    M. Kaladhar

    2012-08-01

    Full Text Available In this work, Taguchi method is applied to determine the optimum process parameters for turning of AISI 304 austenitic stainless steel on CNC lathe. A Chemical vapour deposition (CVD coated cemented carbide cutting insert is used which is produced by DuratomicTM technology of 0.4 and 0.8 mm nose radii. The tests are conducted at four levels of Cutting speed, feed and depth of cut. The influence of these parameters are investigated on the surface roughness and material removal rate (MRR. The Analysis Of Variance (ANOVA is also used to analyze the influence of cutting parameters during machining. The results revealed that cutting speed significantly (46.05% affected the machined surface roughness values followed by nose radius (23.7%. The influence of the depth of cut (61.31% in affecting material removal rate (MRR is significantly large. The cutting speed (20.40% is the next significant factor. Optimal range and optimal level of parameters are also predicted for responses.

  8. New CVD-based method for the growth of high-quality crystalline zinc oxide layers

    Science.gov (United States)

    Huber, Florian; Madel, Manfred; Reiser, Anton; Bauer, Sebastian; Thonke, Klaus

    2016-07-01

    High-quality zinc oxide (ZnO) layers were grown using a new chemical vapour deposition (CVD)-based low-cost growth method. The process is characterized by total simplicity, high growth rates, and cheap, less hazardous precursors. To produce elementary zinc vapour, methane (CH4) is used to reduce a ZnO powder. By re-oxidizing the zinc with pure oxygen, highly crystalline ZnO layers were grown on gallium nitride (GaN) layers and on sapphire substrates with an aluminum nitride (AlN) nucleation layer. Using simple CH4 as precursor has the big advantage of good controllability and the avoidance of highly toxic gases like nitrogen oxides. In photoluminescence (PL) measurements the samples show a strong near-band-edge emission and a sharp line width at 5 K. The good crystal quality has been confirmed in high resolution X-ray diffraction (HRXRD) measurements. This new growth method has great potential for industrial large-scale production of high-quality single crystal ZnO layers.

  9. TSC response of irradiated CVD diamond films

    CERN Document Server

    Borchi, E; Bucciolini, M; Guasti, A; Mazzocchi, S; Pirollo, S; Sciortino, S

    1999-01-01

    CVD diamond films have been irradiated with electrons, sup 6 sup 0 Co photons and protons in order to study the dose response to exposure to different particles and energies and to investigate linearity with dose. The Thermally Stimulated Current (TSC) has been studied as a function of the dose delivered to polymethilmetacrilate (PMMA) in the range from 1 to 12 Gy with 20 MeV electrons from a linear accelerator. The TSC spectrum has revealed the presence of two components with peak temperatures of about 470 and 520 K, corresponding to levels lying in the diamond band gap with activation energies of the order of 0.7 - 1 eV. After the subtraction of the exponential background the charge emitted during the heating scan has been evaluated and has been found to depend linearly on the dose. The thermally emitted charge of the CVD diamond films has also been studied using different particles. The samples have been irradiated with the same PMMA dose of about 2 Gy with 6 and 20 MeV electrons from a Linac, sup 6 sup 0 ...

  10. Sensor-based atomic layer deposition for rapid process learning and enhanced manufacturability

    Science.gov (United States)

    Lei, Wei

    In the search for sensor based atomic layer deposition (ALD) process to accelerate process learning and enhance manufacturability, we have explored new reactor designs and applied in-situ process sensing to W and HfO 2 ALD processes. A novel wafer scale ALD reactor, which features fast gas switching, good process sensing compatibility and significant similarity to the real manufacturing environment, is constructed. The reactor has a unique movable reactor cap design that allows two possible operation modes: (1) steady-state flow with alternating gas species; or (2) fill-and-pump-out cycling of each gas, accelerating the pump-out by lifting the cap to employ the large chamber volume as ballast. Downstream quadrupole mass spectrometry (QMS) sampling is applied for in-situ process sensing of tungsten ALD process. The QMS reveals essential surface reaction dynamics through real-time signals associated with byproduct generation as well as precursor introduction and depletion for each ALD half cycle, which are then used for process learning and optimization. More subtle interactions such as imperfect surface saturation and reactant dose interaction are also directly observed by QMS, indicating that ALD process is more complicated than the suggested layer-by-layer growth. By integrating in real-time the byproduct QMS signals over each exposure and plotting it against process cycle number, the deposition kinetics on the wafer is directly measured. For continuous ALD runs, the total integrated byproduct QMS signal in each ALD run is also linear to ALD film thickness, and therefore can be used for ALD film thickness metrology. The in-situ process sensing is also applied to HfO2 ALD process that is carried out in a furnace type ALD reactor. Precursor dose end-point control is applied to precisely control the precursor dose in each half cycle. Multiple process sensors, including quartz crystal microbalance (QCM) and QMS are used to provide real time process information. The

  11. Processes in Environmental Depositional Systems and Deformation in Sedimentary Basins: Goals for Exoloration in Mexico

    Science.gov (United States)

    Sandoval-Ochoa, J.

    2005-05-01

    Among the recent needs to establish new goals in the mexican energy industry to increase the petroleum reserves, has been necessary to recapitulate on some academic an operative concepts and definitions applied to the Petroliferous Basins Exploration; first of all, in order to understand the Petroleum System in given tectonophysical framework. The tectonophysical environment experienced by the petroliferous basin in the southwestern Gulf of Mexico, merely in the Campeche Sound and adjacent terrestrial regions (Figure 1); has been the result of interaction among the tectonic plates, the Coco's Plate with impingement and subduction beneath the Northamerican Plate and the Yucatán Microplate and even in very deep connection with the oceanic crust of southwesternmost portion of the Gulf of Mexico and the one of the Caribbean sea beneath the gulf of Belize-Honduras. The tectonosedimentary effects in the Campeche Bay starting with the skeleton formed for the Cenozoic Era, kept simultaneous conditions in depositions and deformations because of strain, stress and collapse fields, acted through this Era up to the present day, as observed in the surface Aguayo et al, 1999 and Sandoval, 2000. The involved portions of the crust and its boundaries have also been performing the relative sinking of the mere southwestern centre of the Gulf of Mexico, and the rising of the southeastern lands of Mexico. In the middle contiguity are found the productive Tertiary basins of: Comalcalco, Macuspana, Salina del Itsmo, Campeche-Champoton and other in deep waters; all of them, in an arrangement of basins among distensive faulted blocks in echelon, falling down to the deep centre of the Gulf Sandoval, op cit. With this scenario and that ones of other basins, a recapitulation on concepts and definitions, has been made on the regional natural processes of the environmental depositional systems and on the basins analysis in the tectonophysical framework, in order to reflect on the

  12. Equatorial Layered Deposits in Arabia Terra, Mars: Facies and Process Variability

    Science.gov (United States)

    Pondrelli, M.; Rossi, A.; van Gasselt, S.; Le Deit, L.; Glamoclija, M.; Cavalazzi, B.; Franchi, F.; Fueten, F.; Hauber, E.; Zegers, T.

    2012-12-01

    Genetic mechanisms proposed to explain Equatorial Layered Deposits (ELDs) formation include subglacial volcanism, aeolian/airfall, lacustrine, lacustrine/volcanic and spring-fed deposition. ELDs have been frequently shown to consist of sulfates (e.g. Gendrin et al., 2005) that might form as a response to evaporation in a playa environment (Hoefen et al., 2003) or during spring precipitation (e.g. Allen and Oehler, 2008; Rossi et al., 2008). The importance of groundwater-dominated hydrological systems was proposed to explain the formation of light-toned deposits in Meridiani Planum and Arabia Terra (e.g. Andrews-Hanna et al. 2007). Additionally, fluid expulsion processes have been invoked to explain the formation of mounds within the light-toned deposits in Arabia Terra (Allen and Oehler, 2008; Rossi et al., 2008; Pondrelli et al., 2011). Potential for habitable conditions of both playa and spring-related settings (Cavalazzi et al., 2007; Glamoclija et al., 2011) coupled with the high preservation potential within sulfates (Panieri et al., 2010), make these deposits a good candidate to understand the potential past habitability of the planet. In order to investigate ELDs genesis, an area in the vicinity of Firsoff crater, where ELDs are present within and outside the craters, was selected for geological mapping and analysis of the landforms and their association using the available dataset, including CRISM in order to infer ELDs composition. Within Firsoff crater, ELDs form a bulge that can be estimated to be at least a few hundred meters thick, while, outside the craters, ELDs form flat-lying deposits. Although heavily eroded by wind and carved by yardangs, several morphologies within the ELDs in the craters seem to be depositional, which would exclude that the entire Firsoff basin had been originally filled by ELDs. Within craters, ELDs consist of roughly meter thick layers draping and onlapping the substratum. They appear affected by polygonal patterns with no

  13. Thermoluminescent properties of CVD diamond: applications to ionising radiation dosimetry; Proprietes thermoluminescentes du diamant CVD: applications a la dosimetrie des rayonnements ionisants

    Energy Technology Data Exchange (ETDEWEB)

    Petitfils, A

    2007-09-15

    Remarkable properties of synthetic diamond (human soft tissue equivalence, chemical stability, non-toxicity) make this material suitable for medical application as thermoluminescent dosimeter (TLD). This work highlights the interest of this material as radiotherapy TLD. In the first stage of this work, we looked after thermoluminescent (TL) and dosimetric properties of polycrystalline diamond made by Chemically Vapor Deposited (CVD) synthesis. Dosimetric characteristics are satisfactory as TLD for medical application. Luminescence thermal quenching on diamond has been investigated. This phenomenon leads to a decrease of dosimetric TL peak sensitivity when the heating rate increases. The second part of this work analyses the use of synthetic diamond as TLD in radiotherapy. Dose profiles, depth dose distributions and the cartography of an electron beam obtained with our samples are in very good agreement with results from an ionisation chamber. It is clearly shown that CVD) diamond is of interest to check beams of treatment accelerators. The use of these samples in a control of treatment with Intensity Modulated Radiation Therapy underlines good response of synthetic diamond in high dose gradient areas. These results indicate that CVD diamond is a promising material for radiotherapy dosimetry. (author)

  14. 8% Efficient thin-film polycrystalline-silicon solar cells based on aluminium-induced crystallization and thermal CVD

    Energy Technology Data Exchange (ETDEWEB)

    Gordon, I.; Carnel, L.; Van Gestel, D.; Beaucarne, G.; Poortmans, J. [IMEC VZW, Leuven (Belgium)

    2006-07-01

    A considerable cost reduction could be achieved in photovoltaics if efficient solar cells could be made from polycrystalline-silicon (pc-Si) thin films on inexpensive substrates. We recently showed promising solar cells results using pc-Si layers obtained by aluminium-induced crystallization (AlC) of amorphous silicon in combination with thermal chemical vapor deposition (CVD). To obtain highly efficient pc-Si solar cells, however, the material quality has to be optimized and cell processes different from those applied for standard bulk-Si solar cells have to be developed. In this work, we present the different process steps that we recently developed to enhance the efficiency of pc-Si solar cells on alumina substrates made by AlC in combination with thermal CVD. Our present pc-Si solar cell process yields cells in substrate configuration with efficiencies so far of up to 8.0%. Spin-on oxides are used to smoothen the alumina substrate surface to enhance the electronic quality of the absorber layers. The cells have heterojunction emitters consisting of thin a-Si layers that yield much higher V{sub oc} values than classical diffused emitters. Base and emitter contacts are on top of the cell in interdigitated finger patterns, leading to fill factors above 70%. The front surface of the cells is plasma textured to increase the current density. Our present pc-Si solar cell efficiency of 8% together with the fast progression that we have made over the last few years indicate the large potential of pc-Si solar cells based on the AlC seed layer approach. (author)

  15. Fabrication of Ultrasensitive Field-Effect Transistor DNA Biosensors by a Directional Transfer Technique Based on CVD-Grown Graphene.

    Science.gov (United States)

    Zheng, Chao; Huang, Le; Zhang, Hong; Sun, Zhongyue; Zhang, Zhiyong; Zhang, Guo-Jun

    2015-08-12

    Most graphene field-effect transistor (G-FET) biosensors are fabricated through a routine process, in which graphene is transferred onto a Si/SiO2 substrate and then devices are subsequently produced by micromanufacture processes. However, such a fabrication approach can introduce contamination onto the graphene surface during the lithographic process, resulting in interference for the subsequent biosensing. In this work, we have developed a novel directional transfer technique to fabricate G-FET biosensors based on chemical-vapor-deposition- (CVD-) grown single-layer graphene (SLG) and applied this biosensor for the sensitive detection of DNA. A FET device with six individual array sensors was first fabricated, and SLG obtained by the CVD-growth method was transferred onto the sensor surface in a directional manner. Afterward, peptide nucleic acid (PNA) was covalently immobilized on the graphene surface, and DNA detection was realized by applying specific target DNA to the PNA-functionalized G-FET biosensor. The developed G-FET biosensor was able to detect target DNA at concentrations as low as 10 fM, which is 1 order of magnitude lower than those reported in a previous work. In addition, the biosensor was capable of distinguishing the complementary DNA from one-base-mismatched DNA and noncomplementary DNA. The directional transfer technique for the fabrication of G-FET biosensors is simple, and the as-constructed G-FET DNA biosensor shows ultrasensitivity and high specificity, indicating its potential application in disease diagnostics as a point-of-care tool.

  16. Electromagnetic sensors for monitoring of scour and deposition processes at bridges and offshore wind turbines

    Science.gov (United States)

    Michalis, Panagiotis; Tarantino, Alessandro; Judd, Martin

    2014-05-01

    Recent increases in precipitation have resulted in severe and frequent flooding incidents. This has put hydraulic structures at high risk of failure due to scour, with severe consequences to public safety and significant economic losses. Foundation scour is the leading cause of bridge failures and one of the main climate change impacts to highway and railway infrastructure. Scour action is also being considered as a major risk for offshore wind farm developments as it leads to excessive excavation of the surrounding seabed. Bed level conditions at underwater foundations are very difficult to evaluate, considering that scour holes are often re-filled by deposited loose material which is easily eroded during smaller scale events. An ability to gather information concerning the evolution of scouring will enable the validation of models derived from laboratory-based studies and the assessment of different engineering designs. Several efforts have focused on the development of instrumentation techniques to measure scour processes at foundations. However, they are not being used routinely due to numerous technical and cost issues; therefore, scour continues to be inspected visually. This research project presents a new sensing technique, designed to measure scour depth variation and sediment deposition around the foundations of bridges and offshore wind turbines, and to provide an early warning of an impending structural failure. The monitoring system consists of a probe with integrated electromagnetic sensors, designed to detect the change in the surrounding medium around the foundation structure. The probe is linked to a wireless network to enable remote data acquisition. A developed prototype and a commercial sensor were evaluated to quantify their capabilities to detect scour and sediment deposition processes. Finite element modelling was performed to define the optimum geometric characteristics of the prototype scour sensor based on models with various permittivity

  17. Room Temperature Growth of Hydrogenated Amorphous Silicon Films by Dielectric Barrier Discharge Enhanced CVD

    Institute of Scientific and Technical Information of China (English)

    GUO Yu; ZHANG Xiwen; HAN Gaorong

    2007-01-01

    Hydrogenated amorphous silicon (a-Si:H) films were deposited on Si (100) and glass substrates by dielectric barrier discharge enhanced chemical vapour deposition (DBD-CVD)in (SiH4+H2) atmosphere at room temperature.Results of the thickness measurement,SEM (scanning electron microscope),Raman,and FTIR (Fourier transform infrared spectroscopy) show that with the increase in the applied peak voltage,the deposition rate and network order of the films increase,and the hydrogen bonding configurations mainly in di-hydrogen (Si-H2) and poly hydrogen (SiH2)n are introduced into the films.The UV-visible transmission spectra show that with the decrease in Sill4/ (SiH4+H2) the thin films'band gap shifts from 1.92 eV to 2.17 eV.These experimental results are in agreement with the theoretic analysis of the DBD discharge.The deposition of a-Si:H films by the DBD-CVD method as reported here for the first time is attractive because it allows fast deposition of a-Si:H films on large-area low-melting-point substrates and requires only a low cost of production without additional heating or pumping equipment.

  18. Nanostructured bioactive glass-ceramic coatings deposited by the liquid precursor plasma spraying process

    Science.gov (United States)

    Xiao, Yanfeng; Song, Lei; Liu, Xiaoguang; Huang, Yi; Huang, Tao; Wu, Yao; Chen, Jiyong; Wu, Fang

    2011-01-01

    Bioactive glass-ceramic coatings have great potential in dental and orthopedic medical implant applications, due to its excellent bioactivity, biocompatibility and osteoinductivity. However, most of the coating preparation techniques either produce only thin thickness coatings or require tedious preparation steps. In this study, a new attempt was made to deposit bioactive glass-ceramic coatings on titanium substrates by the liquid precursor plasma spraying (LPPS) process. Tetraethyl orthosilicate, triethyl phosphate, calcium nitrate and sodium nitrate solutions were mixed together to form a suspension after hydrolysis, and the liquid suspension was used as the feedstock for plasma spraying of P 2O 5-Na 2O-CaO-SiO 2 bioactive glass-ceramic coatings. The in vitro bioactivities of the as-deposited coatings were evaluated by soaking the samples in simulated body fluid (SBF) for 4 h, 1, 2, 4, 7, 14, and 21 days, respectively. The as-deposited coating and its microstructure evolution behavior under SBF soaking were systematically analyzed by scanning electron microscopy (SEM), X-ray diffraction (XRD), inductively coupled plasma (ICP), and Fourier transform infrared (FTIR) spectroscopy. The results showed that P 2O 5-Na 2O-CaO-SiO 2 bioactive glass-ceramic coatings with nanostructure had been successfully synthesized by the LPPS technique and the synthesized coatings showed quick formation of a nanostructured HCA layer after being soaked in SBF. Overall, our results indicate that the LPPS process is an effective and simple method to synthesize nanostructured bioactive glass-ceramic coatings with good in vitro bioactivity.

  19. Deposits on heat exchanging surfaces, causes in the bleaching process and countermeasures; Belaeggningar paa vaermevaexlare, orsaker i blekprocessen och aatgaerder

    Energy Technology Data Exchange (ETDEWEB)

    Bjurstroem, Henrik [AaF-Energi och Miljoe AB, Stockholm (Sweden); Staahl, Charlotte; Widell, Lars [AaF-Celpap AB, Stockholm (Sweden)

    2003-06-01

    Energy conservation in process industry implies to a large extent recovery of heat (or cold) from a process stream and its utilization for another process stream. The savings of energy that can be achieved depend on the process streams, but also on the efficiency of the heat exchange. A small driving temperature difference is a condition for an extensive recovery and a satisfactory preservation of its quality, i.e. its temperature. As process streams contain compounds or components that can precipitate and form deposits on heat exchanging surfaces, the recovery of heat is degraded. In the pulp and paper industry, two trends combine to increase the extent of fouling: a larger degree of closure for the process and a change in pH-profile caused by a switch to elementary chlorine free bleaching. In this study, the occurrence of deposits has been investigated for the mills that produce mechanical pulp and for the fiber line in mills producing chemical pulp. Deposits on the evaporator surfaces are treated in a parallel study. Except for some plants, deposits are not an important problem today. That does not mean that there has not been any problem or that problems will not occur. The origin of deposits lies in the chemistry of the process, but deposits have consequences for the thermal energy management. A list of possible actions in order to avoid deposits or to mitigate their consequences has been dressed in this report. They should be considered with the following order of priority: avoiding that the compounds that may form deposits enter at all the process, section 6.1; avoiding that these compounds form a deposit once they have entered the process, section 6.2; cleaning if nothing else helps or costs too much, section 6.3. Some of these methods are well known or are conventional changes in the processes. Some of these methods are less well proven or less well documented. In a longer time perspective, the kidney technology that is being developed could contribute to

  20. Rhythmic bedding in prodeltaic deposits of the ancient Colorado River: Exploring genetic processes

    Science.gov (United States)

    Waresak, Sandra; Nalin, Ronald; Lucarelli, Andrea

    2016-04-01

    Prodeltaic deposits represent a valuable archive for the characterization of deltaic depositional systems, offering a distal, minimally reworked record of dominant processes active at the fluvial-marine interface. The Fish Creek Basin (CA, US) preserves a ~ 3-km thick, lower Pliocene, progradational deltaic succession formed when the ancestral Colorado River infiltrated a marine rift basin (the early Gulf of California). The unit in this succession interpreted as prodeltaic, corresponding to the upper Mud Hills Member of the Deguynos Formation, consists of ~ 300 m of muddy siltstones. A striking attribute of parts of this unit is the presence of rhythmic bedding, with consistently alternating silt- to fine sand-dominated and clay-dominated beds forming couplets with an average thickness of 12 cm. By performing a detailed sedimentological analysis of the rhythmites and investigating periodicities in bed thickness, our study aimed at reconstructing the mode of deposition of this enigmatic prodeltaic succession. We measured at high stratigraphic resolution 265 consecutive couplets, for a total thickness of 33 m. Individual beds have good lateral persistence of at least tens of meters and gradational to sharp, flat contacts. Observed sedimentary structures are concentrated on the coarser portion of the couplets and mostly consist of parallel and wavy lamination, with subordinate ripple cross-lamination and localized internal scours. Bioturbation appears low in intensity or absent. Most notably, grain size analysis performed with laser diffraction techniques on several couplets shows a consistent pattern of inverse grading transitioning to normal grading. The cumulative evidence of these sedimentological features indicates that deposition of the rhythmites was accomplished via hyperpycnal flows, each couplet most likely representing an individual event in a setting characterized by high overall depositional rates. We performed time series analysis on bed thickness of

  1. A generic strategy for co-presentation of heparin-binding growth factors based on CVD polymerization.

    Science.gov (United States)

    Deng, Xiaopei; Lahann, Joerg

    2012-09-14

    A multifunctional copolymer with both aldehyde and alkyne groups is synthesized by chemical vapor deposition (CVD) for orthogonal co-immobilization of biomolecules. Surface analytical methods including FTIR and XPS are used to confirm the surface modification. Heparin-binding growth factors [basic fibroblast growth factor (bFGF) in this study] can be immobilized through interaction with heparin, which was covalently attached to the CVD surface through an aldehyde-hydrazide reaction. In parallel, an alkyne-azide reaction is used to orthogonally co-immobilize an adhesion peptide as the second biomolecule.

  2. Sediments as tracers for transport and deposition processes in peri-alpine lakes: A case study

    Science.gov (United States)

    Righetti, Maurizio; Toffolon, Marco; Lucarelli, Corrado; Serafini, Michele

    2011-12-01

    SummaryThe benthic sediment fingerprint is analysed in the small peri-alpine lake Levico (Trentino, Italy) to identify the causes of recurrent phenomena of turbidity peaks, particularly evident in a littoral region of the water body. In order to study the sediment transport processes, we exploit the fact that the sediment supply from the major tributary has a specific chemical composition, which differs from that of the nearby lake basin. Three elements (Fe, Al, K) have been used as tracers to identify the source and the deposition patterns of tributary sediments, and another typical element, Si, has been critically analysed because of its dual (allochthonous and autochthonous) origin. Several samples of the benthic material have been analysed using SEM-EDS, and the results of the sedimentological characterisation have been compared with the patterns of sediment accumulation at the bed of the lake obtained using a three-dimensional numerical model, in response to the tributary supply under different external forcing and stratification conditions. The coupled use of field measurements and numerical results suggests that the turbidity phenomena are strongly related to the deposition of the sediments supplied by the tributary stream, and shows that it is possible to reconstruct the process of local transport when the tributary inflow is chemically specific.

  3. Energy distribution of secondary particles in ion beam deposition process of Ag: experiment, calculation and simulation

    Energy Technology Data Exchange (ETDEWEB)

    Bundesmann, C.; Feder, R.; Lautenschlaeger, T.; Neumann, H. [Leibniz-Institute of Surface Modification, Leipzig (Germany)

    2015-12-15

    Ion beam sputter deposition allows tailoring the properties of the film-forming, secondary particles (sputtered target particles and backscattered primary particles) and, hence, thin film properties by changing ion beam (ion energy, ion species) and geometrical parameters (ion incidence angle, polar emission angle). In particular, the energy distribution of secondary particles and their influence on the ion beam deposition process of Ag was studied in dependence on process parameters. Energy-selective mass spectrometry was used to measure the energy distribution of sputtered and backscattered ions. The energy distribution of the sputtered particles shows, in accordance with theory, a maximum at low energy and an E{sup -2} decay for energies above the maximum. If the sum of incidence angle and polar emission angle is larger than 90 , additional contributions due to direct sputtering events occur. The energy distribution of the backscattered primary particles can show contributions by scattering at target particles and at implanted primary particles. The occurrence of these contributions depends again strongly on the scattering geometry but also on the primary ion species. The energy of directly sputtered and backscattered particles was calculated using equations based on simple two-particle-interaction whereas the energy distribution was simulated using the well-known Monte Carlo code TRIM.SP. In principal, the calculation and simulation data agree well with the experimental findings. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  4. Role of Granitic Intrusions and Serpentinization Processes in The Forming of Iron Deposits: Yellice-Dumluca Iron Deposits, Divrigi, Sivas, Turkey

    Science.gov (United States)

    Ozturk, Ceyda; Ozcan Kilic, Cumhur; Unlu, Taner

    2016-04-01

    Divrigi iron ore deposit is one of the most important iron province in Turkey. Genesis of the Divrigi iron deposits is still highly controversial. In Divrigi-Yellice vicinity, no granitic intrusions takes place. Low grade (average 18-20% Fe3O4), 125 million tones magnetite formation in Yellice deposit is found within serpentinites. On the other hand, in Divrigi-Dumluca deposit, granitic intrusions cut the serpentinite units. In the contact between granitic and serpentinized rocks, high grade (%57 Fe), 8 million tones magnetite is substantive. Yellice deposit is consist of characteristic liquid magmatic phase minerals such as chromite, magnetite, pentlandite, pyrotine, chalcopyrite and also pyrite disseminations. Due to serpentinization process, secondary magnetites formed by the iron released from ferromagnesian minerals. Also pyrite and silicate minerals accompanies secondary magnetite occurences. In Dumluca deposit, ore minerals such as magnetite, hematite, pyrite, chalcopyrite, limonite, marcasite, millerite accompanied by characteristic skarn zone paragenesis, diopside, actinolite and quartz. Performed Confocal Raman Spectroscopy studies to determine the serpentine types show that, serpentine minerals of Yellice deposit is mainly antigorite with talc. But however, serpentine minerals of Dumluca deposit is mostly chrysotile. This difference suggests that, serpentinization in Yellice deposit occurred in high temperatures (450-550°C), otherwise in Dumluca deposit, serpentinization occurred in relatively low temperatures (350-400°C). Performed chemical analysis on ore samples shows the distinct differences in major oxides such as Fe2O3, MgO, SiO2, Al2O3, Na2O, Cr2O3 and in trace elements, Rb, Sr, Zr and Ni. Yellice samples have mean 48,79% Fe2O3, 28,24% MgO, 26,46% SiO2, 1,05% Al2O3, 0,02% Na2O, 0.712% Cr2O3 and 44,7 ppm Rb, 6,2 ppm Sr, 1,9 ppm Zr, 2592,9 ppm Ni values whereas Dumluca samples have mean 65,29% Fe2O3, 10,24% MgO, 37,66% SiO2, 4,38% Al2O3, 0,72% Na2

  5. Transformation of cadmium hydroxide to cadmium oxide thin films synthesized by SILAR deposition process: Role of varying deposition cycles

    OpenAIRE

    2016-01-01

    Successive Ionic Layer Adsorption and Reaction (SILAR) was used to deposit nanocrystalline cadmium oxide (CdO) thin films on microscopic glass substrates for various cycles (40–120). This is based on alternate dipping of the substrate in CdCl2 solution made alkaline (pH ∼12) with NaOH, rinsing with distilled water, followed by air treatment with air dryer and annealing at 300 °C for 1 h in air. The prepared films were characterized by X-ray diffraction (XRD), UV–Visible Spectrophotomer (UV–Vi...

  6. Field electron emission of diamond films on nanocrystalline diamond coating by CVD method

    Institute of Scientific and Technical Information of China (English)

    CAI Rangqi; CHEN Guanghua; SONG Xuemei; XING Guangjian; FENG Zhenjian; HE Deyan

    2003-01-01

    The preparation process, structure feature and field electron emission characteristic of diamond films on nanocyrstalline diamond coating by the CVD method were studied. The field electron emission measurements on the samples showed that the diamond films have lower turn-on voltage and higher field emission current density. A further detailed theory explanation to the results was given.

  7. Effects of particle density on depositing properties of WC-1 7 Co by HVOF process

    Institute of Scientific and Technical Information of China (English)

    丁坤英; 王立君

    2014-01-01

    The in-flight and deposition properties ofthree types ofWC-1 7 Co powder with different particle densities during a high-velocity oxygen fuel (HVOF)thermal spray process were investigated.Three types ofpowder exhibited similar velocity upon impact on the substrate surface.The powder with the lower particle density exhibited a higher temperature upon impingement process,resulting in the generation ofa higher flattening ratio.Thus,the coating derived from the powder with the lower particle density possessed superior micro-hardness,porosity and surface roughness.However,the coating with the lowest particle density showed the poorest fracture toughness because ofthe generation ofthe largest amount ofamorphous phase.

  8. Influence of as-deposited conductive type on sensitization process of PbSe films

    Science.gov (United States)

    Yang, Hao; Chen, Lei; Zheng, Jianbang; Qiao, Kai; Li, Xiaojiang

    2016-07-01

    The as-grown n- and p-type polycrystalline PbSe thin films are fabricated by vapor phase deposition using substrate temperature regulation. The surface polycrystalline structures and photoelectric properties of n- and p-type polycrystalline PbSe films are provided. Surface composition of n-type-sensitized PbSe film has been analyzed according to X-ray photoelectron spectroscopy results. The oxygen roles in n- and p-type PbSe polycrystalline films during the sensitization process are studied experimentally, respectively. The dependence of sensitized photoelectric performance on the initial conductive state has been firstly observed and discussed, as we know presently. It is revealed that oxygen can trigger photo-response in the sensitization process for n-type PbSe film, but not for p-type. These discussions may be useful for understanding the sensitization mechanism of lead salt materials.

  9. Electro-deposition painting process improvement of cab truck by Six Sigma concept

    Science.gov (United States)

    Kawitu, Kitiya; Chutima, Parames

    2017-06-01

    The case study company is a manufacturer of trucks and currently facing a high rework cost due to the thickness of the electro-deposited paint (EDP) of the truck cab is lower than standard. In addition, the process capability is very low. The Six Sigma concept consisting of 5 phases (DMAIC) is applied to determine new parameter settings for each significant controllable factor. After the improvement, EDP thickness of the truck cab increases from 17.88μ to 20μ (i.e. standard = 20 ± 3μ). Moreover, the process capability indexes (Cp and Cpk) are increased from 0.9 to 1.43, and from 0.27 to 1.43, respectively. This improvement could save the rework cost about 1.6M THB per year.

  10. Combustion of spent shales from the Rotem deposit. Pt. 1. Concurrent thermal processes: Pyrolysis and gasification

    Energy Technology Data Exchange (ETDEWEB)

    Zabicky, J. (Ben-Gurion Univ. of the Negev, Beersheba (Israel). Institutes for Applied Research Ben-Gurion Univ. of the Negev, Beersheba (Israel). M.R. Bloch Center for Coal Research); Wohlfarth, A. (Pama - Energy Resources Development Ltd., Arava (Israel))

    1991-06-01

    Spent shales prepared by the Fisher method from oil shales of the Rotem deposit/Israel were studied in a continuous fluidized bed reactor at 700-900deg C under atmospheric pressure, using mixtures of nitrogen and carbon dioxide as the fluidizing gas. A set of simultaneus processes takes place, including pyrolysis of the organic residue in the spent shales, decomposition of calcium carbonate, dehydration of clay phases, decomposition of pyrites, reduction of anhydrite to calcium sulfide and other minor reactions. An important secondary process is gasification of the organic residue by carbon dioxide produced by carbonate decomposition or combustion. The extent to which these reactions take place depends on temperature, composition of the fluidizing gas, particle size of the spent shales, and mean residence time of the particles in the reactor. (orig.).

  11. Chemical vapor deposition synthesis of tunable unsubstituted polythiophene.

    Science.gov (United States)

    Nejati, Siamak; Lau, Kenneth K S

    2011-12-20

    Despite having exceptional electroactive properties, applications of unsubstituted polythiophene (PTh) have been limited due to its insolubility. To overcome this challenge, we have employed oxidative chemical vapor deposition (oCVD) as a unique liquid-free technique to enable the oxidative polymerization of PTh using thiophene as the starting monomer and vanadium oxytrichloride as an effective vaporizable oxidant initiator. Vibrational and phototelectron spectroscopy indicated the formation of unsubstituted polythiophene. Cyclic voltammetry revealed its electrochromic behavior in solution. Significantly, polymer conjugation length and electrical conductivity can be tuned by controlling oCVD process variables. Polymerization is found to be adsorption-limited, so by providing sufficient monomer and limiting the amount of initiator at the growth surface, PTh is believed to be formed through α-α thiophene linkages.

  12. Development of slurry erosion resistant materials by laser-based direct metal deposition process

    Science.gov (United States)

    Yarrapareddy, Eswar

    The current research deals with the development of slurry erosion resistant materials by the laser-based direct metal deposition (LBDMD) process for different industrial applications. The work started with the development of functionally graded materials using nickel-tungsten carbide (Ni-Tung) powders and finally produced a better erosion resistant materials system by reinforcing nano-tungsten carbide particles with nickel-tungsten carbide powders. Functionally graded materials (FGMs) consisting of Ni-Tung) powders with different concentrations of tungsten carbide particles are successfully deposited by the LBDMD process on 4140 Steel substrates. The slurry erosion behavior of the Ni-Tung FGMs is studied at different impingement angles. The slurry erosion tests are performed at Southern Methodist University's Center for Laser Aided Manufacturing using a centrifugal force driven erosion testing machine. For the purpose of comparison, Ni-Tung 40 depositions and 4140 steel samples are also tested. The results indicate that the LBDMD process is able to deposit defect-free Ni-Tung FGMs with a uniform distribution of tungsten carbide particles in a nickel-based matrix. The slurry erosion resistance of Ni-Tung FGMs is observed to be much better than that of the Ni-Tung 40 and 4140 steels. The superior slurry erosion resistance of Ni-Tung FGMs is attributed to the presence of large amounts of very hard tungsten carbide particles. The material removal rate (MRR) from erosion decreases with a decrease in the impingement angle, except at a 45 degree impingement angle on 4140 steel. The relationship among the material removal rates, the craters depth of penetration, the areas of the craters formed, the average surface roughness values, and the impingement angles is established for Ni-Tung FGMs, Ni-Tung 40, and 4140 steels. The surface profiles of the eroded samples are analyzed by measuring the depth of penetration of the craters formed by the slurry jet using a needle

  13. Macro controlling of copper oxide deposition processes and spray mode by using home-made fully computerized spray pyrolysis system

    Science.gov (United States)

    Essa, Mohammed Sh.; Chiad, Bahaa T.; Shafeeq, Omer Sh.

    2017-09-01

    Thin Films of Copper Oxide (CuO) absorption layer have been deposited using home-made Fully Computerized Spray Pyrolysis Deposition system FCSPD on glass substrates, at the nozzle to substrate distance equal to 20,35 cm, and computerized spray mode (continues spray, macro-control spray). The substrate temperature has been kept at 450 °c with the optional user can enter temperature tolerance values ± 5 °C. Also that fixed molar concentration of 0.1 M, and 2D platform speed or deposition platform speed of 4mm/s. more than 1000 instruction program code, and specific design of graphical user interface GUI to fully control the deposition process and real-time monitoring and controlling the deposition temperature at every 200 ms. The changing in the temperature has been recorded during deposition processes, in addition to all deposition parameters. The films have been characterized to evaluate the thermal distribution over the X, Y movable hot plate, the structure and optical energy gap, thermal and temperature distribution exhibited a good and uniform distribution over 20 cm2 hot plate area, X-ray diffraction (XRD) measurement revealed that the films are polycrystalline in nature and can be assigned to monoclinic CuO structure. Optical band gap varies from 1.5-1.66 eV depending on deposition parameter.

  14. Mapping process and age of Quaternary deposits on Santa Rosa Island, Channel Islands National Park, California

    Science.gov (United States)

    Schmidt, K. M.; Minor, S. A.; Bedford, D.

    2016-12-01

    Employing a geomorphic process-age classification scheme, we mapped the Quaternary surficial geology of Santa Rosa (SRI) within the Channel Islands National Park. This detailed (1:12,000 scale) map represents upland erosional transport processes and alluvial, fluvial, eolian, beach, marine terrace, mass wasting, and mixed depositional processes. Mapping was motivated through an agreement with the National Park Service and is intended to aid natural resource assessments, including post-grazing disturbance recovery and identification of mass wasting and tectonic hazards. We obtained numerous detailed geologic field observations, fossils for faunal identification as age control, and materials for numeric dating. This GPS-located field information provides ground truth for delineating map units and faults using GIS-based datasets- high-resolution (sub-meter) aerial imagery, LiDAR-based DEMs and derivative raster products. Mapped geologic units denote surface processes and Quaternary faults constrain deformation kinematics and rates, which inform models of landscape change. Significant findings include: 1) Flights of older Pleistocene (>120 ka) and possibly Pliocene marine terraces were identified beneath younger alluvial and eolian deposits at elevations as much as 275 m above modern sea level. Such elevated terraces suggest that SRI was a smaller, more submerged island in the late Neogene and (or) early Pleistocene prior to tectonic uplift. 2) Structural and geomorphic observations made along the potentially seismogenic SRI fault indicate a protracted slip history during the late Neogene and Quaternary involving early normal slip, later strike slip, and recent reverse slip. These changes in slip mode explain a marked contrast in island physiography across the fault. 3) Many of the steeper slopes are dramatically stripped of regolith, with exposed bedrock and deeply incised gullies, presumably due effects related to past grazing practices. 4) Surface water presence is

  15. Transformation of cadmium hydroxide to cadmium oxide thin films synthesized by SILAR deposition process: Role of varying deposition cycles

    Directory of Open Access Journals (Sweden)

    A.C. Nwanya

    2016-06-01

    Full Text Available Successive Ionic Layer Adsorption and Reaction (SILAR was used to deposit nanocrystalline cadmium oxide (CdO thin films on microscopic glass substrates for various cycles (40–120. This is based on alternate dipping of the substrate in CdCl2 solution made alkaline (pH ∼12 with NaOH, rinsing with distilled water, followed by air treatment with air dryer and annealing at 300 °C for 1 h in air. The prepared films were characterized by X-ray diffraction (XRD, UV–Visible Spectrophotomer (UV–Vis and Scanning Electron Microscopy (SEM. The 80th cycle was observed to be the saturation stage for this reaction. The XRD results confirmed the films to be CdO with some Cd(OH2 phase at higher deposition cycles. The films were polycrystalline in nature having high orientation along (111 and (200 planes. As the number of cycles increases the calculated average crystallite sizes increase gradually up till the 80th cycle after which a gradual decrease in the crystallite size was observed with increasing number of cycles. The films’ transmittance in the visible and near infrared region decreased as the number of cycles increased and ranged between 25 and 80%. This work shows the feasibility of using simple SILAR method at room temperature to obtain Cd(OH2 films which are transformed to CdO thin films after annealing.

  16. Photoinitiated chemical vapor deposition of polymeric thin films using a volatile photoinitiator.

    Science.gov (United States)

    Chan, Kelvin; Gleason, Karen K

    2005-12-06

    Photoinitiated chemical vapor deposition (piCVD) is an evolutionary CVD technique for depositing polymeric thin films in one step without using any solvents. The technique requires no pre- or post-treatment and uses a volatile photoinitiator to initiate free-radical polymerization of gaseous monomers under UV irradiation. Glycidyl methacrylate (GMA) was used as a test monomer for its ability to undergo free-radical polymerization, and 2,2'-azobis(2-methylpropane) (ABMP) was used as the photoinitiator, as it is known to produce radicals when excited by photons. GMA and ABMP vapors were fed into a vacuum chamber in which film growth was observed on a substrate exposed to UV irradiation. The resulting poly(glycidyl methacrylate) (PGMA) thin films were comprised of linear chains and had high structural resemblance to conventionally polymerized PGMA, as shown by the high solubility in tetrahydrofuran and the infrared and X-ray photoelectron spectroscopy measurements. The introduction of ABMP into the vacuum chamber significantly increased growth rates. The maximum growth rate achieved was approximately 140 nm/min and represents a 7-fold enhancement over the case without ABMP. The molecular weight was found to increase with increasing monomer-to-initiator (M/I) feed ratio, and the polydispersity indexes (PDIs) of the samples were between 1.8 and 2.2, lower than the values obtained in conventional batch polymerization but in agreement with the theoretical expressions developed for low-conversion solution-phase polymerization, which are applicable to continuous processes such as piCVD. Molecular-weight distributions can be narrowed by filtering out wavelengths shorter than 300 nm, which induce branching and/or cross-linking. The strong dependence of the molecular weight on the M/I ratio, the rate enhancement due to the use of a radical photoinitiator, the good agreement between the experimental, and the theoretical PDIs provide evidence of a free-radical mechanism in piCVD

  17. Silicon doping techniques using chemical vapor dopant deposition

    Energy Technology Data Exchange (ETDEWEB)

    Popadic, M.

    2009-11-12

    Ultrashallow junctions are essential for the achievement of superior transistor performance, both in MOSFET and bipolar transistors. The stringent demands require state-of-the-art fabrication techniques. At the same time, in a different context, the accurate fabrication of various n type doping profiles by low-temperature Si epitaxy is a challenge due to autodoping. In this thesis, these two, apparently unrelated, problems are both addressed as the layer of CVD surface-deposited dopant atoms is used as a doping source. It is demonstrated that a layer of dopants deposited on the Si surface can be used as a doping source by either thermal or laser drive-in for the fabrication of both deep and ultrashallow defect-free junctions. In low-temperature CVD epitaxy, autodoping is a consequence of dopant surface segregation and doping from the surface layer. This process has been characterized, and consequently excellent controllability is achieved. In addition, new results related to the CVD of dopants itself are obtained, and two theoretical achievements are made: the analytical model of arbitrarily shallow junctions is derived, and a new C-V profiling technique suitable for the characterization of ultrashallow junctions is developed.

  18. Synthesis of Few-Layer Graphene Using DC PE-CVD

    Science.gov (United States)

    Kim, Jeong Hyuk; Castro, Edward Joseph D.; Hwang, Yong Gyoo; Lee, Choong Hun

    2011-12-01

    Few layer graphene (FLG) had been successfully grown on polycrystalline Ni films or foils on a large scale using DC Plasma Enhanced Chemical Vapor Deposition (DC PE-CVD) as a result of the Raman spectra drawn out of the sample. The size of graphene films is dependent on the area of the Ni film as well as the DC PE-CVD chamber size. Synthesis time has an effect on the quality of graphene produced. However, further analysis and experiments must be pursued to further identify the optimum settings and conditions of producing better quality graphene. Applied plasma voltage on the other hand, had an influence on the minimization of defects in the graphene grown. It has also presented a method of producing a free standing PMMA/graphene membrane on a FeCl3(aq) solution which could then be transferred to a desired substrate.

  19. Electronic properties and strain sensitivity of CVD-grown graphene with acetylene

    Science.gov (United States)

    Yang, Meng; Sasaki, Shinichirou; Ohnishi, Masato; Suzuki, Ken; Miura, Hideo

    2016-04-01

    Although many studies have shown that large-area monolayer graphene can be formed by chemical vapor deposition (CVD) using methane gas, the growth of monolayer graphene using highly reactive acetylene gas remains a big challenge. In this study, we synthesized a uniform monolayer graphene film by low-pressure CVD (LPCVD) with acetylene gas. On the base of Raman spectroscopy measurements, it was found that up to 95% of the as-grown graphene is monolayer. The electronic properties and strain sensitivity of the LPCVD-grown graphene with acetylene were also evaluated by testing the fabricated field-effect transistors (FETs) and strain sensors. The derived carrier mobility and gauge factor are 862-1150 cm2/(V·s) and 3.4, respectively, revealing the potential for high-speed FETs and strain sensor applications. We also investigated the relationship between the electronic properties and the graphene domain size.

  20. Microstructural Effects and Properties of Non-line-of-Sight Coating Processing via Plasma Spray-Physical Vapor Deposition

    Science.gov (United States)

    Harder, Bryan J.; Zhu, Dongming; Schmitt, Michael P.; Wolfe, Douglas E.

    2017-08-01

    Plasma spray-physical vapor deposition (PS-PVD) is a unique processing method that bridges the gap between conventional thermal spray and vapor phase methods, and enables highly tailorable coatings composed of a variety of materials in thin, dense layers or columnar microstructures with modification of the processing conditions. The strengths of this processing technique are material and microstructural flexibility, deposition speed, and potential for non-line-of-sight (NLOS) capability by vaporization of the feedstock material. The NLOS capability of PS-PVD is investigated here using yttria-stabilized zirconia and gadolinium zirconate, which are materials of interest for turbine engine applications. PS-PVD coatings were applied to static cylindrical substrates approximately 6-19 mm in diameter to study the coating morphology as a function of angle. In addition, coatings were deposited on flat substrates under various impingement configurations. Impingement angle had significant effects on the deposition mode, and microscopy of coatings indicated that there was a shift in the deposition mode at approximately 90° from incidence on the cylindrical samples, which may indicate the onset of more turbulent flow and PVD-like growth. Coatings deposited at non-perpendicular angles exhibited a higher density and nearly a 2× improvement in erosion performance when compared to coatings deposited with the torch normal to the surface.