WorldWideScience

Sample records for carbon films deposited

  1. Source Molecular Effect on Amorphous Carbon Film Deposition

    OpenAIRE

    Kawazoe, Hiroki; Inayoshi, Takanori; Shinohara, Masanori; Matsuda, Yoshinobu; Fujiyama, Hiroshi; Nitta, Yuki; Nakatani, Tatsuyuki

    2009-01-01

    We investigated deposition process of amorphous carbon films using acetylene and methane as a source molecule, by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). We found that deposited film structures were different due to source molecules.

  2. Coaxial carbon plasma gun deposition of amorphous carbon films

    International Nuclear Information System (INIS)

    A unique plasma gun employing coaxial carbon electrodes was used in an attempt to deposit thin films of amorphous diamond-like carbon. A number of different structural, compositional, and electrical characterization techniques were used to characterize these films. These included scanning electron microscopy, scanning transmission electron microscopy, X ray diffraction and absorption, spectrographic analysis, energy dispersive spectroscopy, and selected area electron diffraction. Optical absorption and electrical resistivity measurements were also performed. The films were determined to be primarily amorphous, with poor adhesion to fused silica substrates. Many inclusions of particulates were found to be present as well. Analysis of these particulates revealed the presence of trace impurities, such as Fe and Cu, which were also found in the graphite electrode material. The electrodes were the source of these impurities. No evidence of diamond-like crystallite structure was found in any of the film samples. Details of the apparatus, experimental procedure, and film characteristics are presented

  3. Coaxial carbon plasma gun deposition of amorphous carbon films

    Science.gov (United States)

    Sater, D. M.; Gulino, D. A.; Rutledge, S. K.

    1984-01-01

    A unique plasma gun employing coaxial carbon electrodes was used in an attempt to deposit thin films of amorphous diamond-like carbon. A number of different structural, compositional, and electrical characterization techniques were used to characterize these films. These included scanning electron microscopy, scanning transmission electron microscopy, X ray diffraction and absorption, spectrographic analysis, energy dispersive spectroscopy, and selected area electron diffraction. Optical absorption and electrical resistivity measurements were also performed. The films were determined to be primarily amorphous, with poor adhesion to fused silica substrates. Many inclusions of particulates were found to be present as well. Analysis of these particulates revealed the presence of trace impurities, such as Fe and Cu, which were also found in the graphite electrode material. The electrodes were the source of these impurities. No evidence of diamond-like crystallite structure was found in any of the film samples. Details of the apparatus, experimental procedure, and film characteristics are presented.

  4. Properties of electrophoretically deposited single wall carbon nanotube films

    Energy Technology Data Exchange (ETDEWEB)

    Lim, Junyoung; Jalali, Maryam; Campbell, Stephen A., E-mail: campb001@umn.edu

    2015-08-31

    This paper describes techniques for rapidly producing a carbon nanotube thin film by electrophoretic deposition at room temperature and determines the film mass density and electrical/mechanical properties of such films. The mechanism of electrophoretic deposition of thin layers is explained with experimental data. Also, film thickness is measured as a function of time, electrical field and suspension concentration. We use Rutherford backscattering spectroscopy to determine the film mass density. Films created in this manner have a resistivity of 2.14 × 10{sup −3} Ω·cm, a mass density that varies with thickness from 0.12 to 0.54 g/cm{sup 3}, and a Young's modulus between 4.72 and 5.67 GPa. The latter was found to be independent of thickness from 77 to 134 nm. We also report on fabricating free-standing films by removing the metal seed layer under the CNT film, and selectively etching a sacrificial layer. This method could be extended to flexible photovoltaic devices or high frequency RF MEMS devices. - Highlights: • We explain the electrophoretic deposition process and mechanism of thin SWCNT film deposition. • Characterization of the SWCNT film properties including density, resistivity, transmittance, and Young's modulus. • The film density and resistivity are found to be a function of the film thickness. • Techniques developed to create free standing layers of SW-CNTs for flexible electronics and mechanical actuators.

  5. Pulsed laser deposition of nano-glassy carbon films

    Energy Technology Data Exchange (ETDEWEB)

    Ossi, P.M. [Dip. Ingegneria Nucleare and Centre of Excellence, NanoEngineered Materials and Surfaces (NEMAS), Politecnico di Milano, via Ponzio, 34-3, 20133 Milan (Italy)]. E-mail: paolo.ossi@polimi.it; Bottani, C.E. [Dip. Ingegneria Nucleare and Centre of Excellence, NanoEngineered Materials and Surfaces (NEMAS), Politecnico di Milano, via Ponzio, 34-3, 20133 Milan (Italy); Miotello, A. [Dip. Fisica, Universita di Trento, 38050 Povo (TN) (Italy)

    2005-07-30

    Carbon films have been deposited at room temperature on (1 0 0) Si substrates by pulsed laser ablation (PLA) from a highly oriented pyrolitic graphite source. Changing the laser power density from 8.5 to 19 MW mm{sup -2} and using various ambient atmospheres (helium, argon from 0.6 Pa to 2 kPa), nano-sized cluster-assembled films were obtained. Scanning electron microscopy shows that the film morphology, changes with increasing ambient gas pressure. We observed in the sequence: dense columns, node-like morphology, platelets (only in argon) and an open dendritic structure. By atomic force microscopy, on representative films, we evaluated the size distribution and relative abundancy of aggregates of carbon clusters, as well as film roughness. Raman spectroscopy shows that all the films are sp{sup 2} coordinated, structurally disordered and belong to the family of carbon nano-glasses. The estimated film coherence length gives an average size of about 5 nm for the agglomerated carbon clusters in the films. The average number of carbon atoms per cluster depends on ambient gas pressure, but is nearly independent of laser intensity.

  6. Hardness and stress of amorphous carbon film deposited by glow discharge and ion beam assisting deposition

    CERN Document Server

    Marques, F C

    2000-01-01

    The hardness and stress of amorphous carbon films prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon films were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposition, hard films were also obtained with a stress of the same order of those found in tetrahedral amorphous carbon films. A structural analysis indicates that all films are composed of a sp sup 2 -rich network. These results contradict the currently accepted concept that both stress and hardness are only related to the concentration of sp sup 3 sites. Furthermore, the same results also indicate that the sp sup 2 sites may also contribute to the hardness of the films.

  7. Plasma-enhanced Deposition of Nano-Structured Carbon Films

    Institute of Scientific and Technical Information of China (English)

    Yang Qiaoqin (杨巧勤); Xiao Chijin (肖持进); A. Hirose

    2005-01-01

    By pre-treating substrate with different methods and patterning the catalyst, selective and patterned growth of diamond and graphitic nano-structured carbon films have been realized through DC Plasma-Enhanced Hot Filament Chemical Vapor Deposition (PE-HFCVD).Through two-step processing in an HFCVD reactor, novel nano-structured composite diamond films containing a nanocrystalline diamond layer on the top of a nanocone diamond layer have been synthesized. Well-aligned carbon nanotubes, diamond and graphitic carbon nanocones with controllable alignment orientations have been synthesized by using PE-HFCVD. The orientation of the nanostructures can be controlled by adjusting the working pressure. In a Microwave Plasma Enhanced Chemical Vapor Deposition (MW-PECVD) reactor, high-quality diamond films have been synthesized at low temperatures (310 ℃~550 ℃) without adding oxygen or halogen gas in a newly developed processing technique. In this process, carbon source originates from graphite etching, instead of hydrocarbon. The lowest growth temperature for the growth of nanocrystalline diamond films with a reasonable growth rate without addition of oxygen or halogen is 260 ℃.

  8. Methods of Boron-carbon Deposited Film Removal

    Science.gov (United States)

    Airapetov, A.; Terentiev, V.; Voituk, A.; Zakharov, A.

    Boron carbide was proposed as a material for in-situ renewable protecting coating for tungsten tiles of the ITER divertor. It is necessary to develop a method of gasification of boron-carbon film which deposits during B4C sputtering. In this paper the results of the first stage investigation of gasification methods of boron-carbon films are presented. Two gasification methods of films are investigated: interaction with the ozone-oxygen mixture and irradiation in plasma with the working gas composed of oxygen, ethanol, and, in some cases, helium. The gasification rate in the ozone-oxygen mixture at 250 °C for B/C films with different B/C ratio and carbon fiber composite (CFC), was measured. For B/C films the gasification rate decreased with increasing B/C ratio (from 45 nm/h at B/C=0.7 to 4 nm/h at B/C=2.1; for CFC - 15 μm/h). Films gasification rates were measured under ion irradiation from ethanol-oxygen-helium plasma at different temperatures, with different ion energies and different gas mixtures. The maximum obtained removal rate was near 230 nm/h in case of ethanol-oxygen plasma and at 150°C of the sample temperature.

  9. Deposition of carbon nitride films for space application

    Institute of Scientific and Technical Information of China (English)

    Feng Yu-Dong; Xu Chao; Wang Yi; Zhang Fu-Jia

    2006-01-01

    Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.

  10. Ion beam deposition of amorphous carbon films with diamond like properties

    Science.gov (United States)

    Angus, John C.; Mirtich, Michael J.; Wintucky, Edwin G.

    1982-01-01

    Carbon films were deposited on silicon, quartz, and potassium bromide substrates from an ion beam. Growth rates were approximately 0.3 micron/hour. The films were featureless and amorphous and contained only carbon and hydrogen in significant amounts. The density and carbon/hydrogen ratio indicate the film is a hydrogen deficient polymer. One possible structure, consistent with the data, is a random network of methylene linkages and tetrahedrally coordinated carbon atoms.

  11. Opto-electrical properties of amorphous carbon thin film deposited from natural precursor camphor

    Energy Technology Data Exchange (ETDEWEB)

    Pradhan, Debabrata [Department of Chemistry, Indian Institute of Technology Bombay, Mumbai 400 076 (India)]. E-mail: dpradhan@sciborg.uwaterloo.ca; Sharon, Maheshwar [Department of Chemistry, Indian Institute of Technology Bombay, Mumbai 400 076 (India)

    2007-06-30

    A simple thermal chemical vapor deposition technique is employed for the pyrolysis of a natural precursor 'camphor' and deposition of carbon films on alumina substrate at higher temperatures (600-900 deg. C). X-ray diffraction measurement reveals the amorphous structure of these films. The carbon films properties are found to significantly vary with the deposition temperatures. At higher deposition temperature, films have shown predominately sp{sup 2}-bonded carbon and therefore, higher conductivity and lower optical band gap (Tauc gap). These amorphous carbon (a-C) films are also characterized with Raman and X-ray photoelectron spectroscopy. In addition, electrical and optical properties are measured. The thermoelectric measurement shows these as-grown a-C films are p-type in nature.

  12. Field Emission from Amorphous carbon Nitride Films Deposited on silicon Tip Arrays

    Institute of Scientific and Technical Information of China (English)

    李俊杰; 郑伟涛; 孙龙; 卞海蛟; 金曾孙; 赵海峰; 宋航; 孟松鹤; 赫晓东; 韩杰才

    2003-01-01

    Amorphous carbon nitride films (a-CNx) were deposited on silicon tip arrays by rf magnetron sputtering in pure nitrogen atmosphere. The field emission property of carbon nitride films on Si tips was compared with that of carbon nitride on silicon wafer. The results show that field emission property of carbon nitride films deposited on silicon tips can be improved significantly in contrast with that on wafer. It can be explained that field emission is sensitive to the local curvature and geometry, thus silicon tips can effectively promote field emission property of a-CNx films. In addition, the films deposited on silicon tips have a smaller effective work function ( F = 0.024 eV)of electron field emission than that on silicon wafer ( F = 0.060 e V), which indicates a significant enhancement of the ability of electron field emission from a-CNx films.

  13. Influence of bias on properties of carbon films deposited by MCECR plasma sputtering method

    Institute of Scientific and Technical Information of China (English)

    CAI Chang-long; DIAO Dong-feng; S.Miyake; T.Matsumoto

    2004-01-01

    The mirror-confinement-type electron cyclotron resonance(MCECR) plasma source has high plasma density and high electron temperature. It is quite useful in many plasma processing, and has been used for etching and thin-film deposition. The carbon films with 40 nm thickness were deposited by MCECR plasma sputtering method on Si, and the influence of substrate bias on the properties of carbon films was studied. The bonding structure of the film was analyzed by the X-ray photoelectron spectroscopy(XPS), the tribological properties were measured by the pin-on-disk(POD) tribometer, the nanohardness of the films was measured by the nanoindenter, and the deposition speed and the refractive index were measured by the ellipse meter. The better substrate bias was obtained, and the better properties of carbon films were obtained.

  14. Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs

    Energy Technology Data Exchange (ETDEWEB)

    Anders, Andre; Fong, Walton; Kulkarni, Ashok; Ryan, Francis W.; Bhatia, C. Singh

    2001-07-13

    Ultrathin (< 5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gbit/in{sup 2}. These films are used as overcoats to protect the magnetic layers on disk media and the active elements of the read-write slider. Tetrahedral amorphous carbon films can be produced by filtered cathodic arc deposition, but the films will only be accepted by the storage industry only if the ''macroparticle'' issue has been solved. Better plasma filters have been developed over recent years. Emphasis is put on the promising twist filter system - a compact, open structure that operates with pulsed arcs and high magnetic field. Based on corrosion tests it is shown that the macroparticle reduction by the twist filter is satisfactory for this demanding application, while plasma throughput is very high. Ultrathin hard carbon films have been synthesized using S-filter and twist filter systems. Film properties such as hardness, elastic modulus, wear, and corrosion resistance have been tested.

  15. Hydorgen sputtering of carbon thin films deposited on platinum

    International Nuclear Information System (INIS)

    Carbon has been suggested as a suitable low Z element for the lining of the first walls of controlled thermonuclear reactors in order to reduce radiative plasma losses due to sputtering. In this paper the measurement of sputtering of carbon thin films by protons in the energy range 0.6-10.0 keV, is described. H2+ or H3+ ions were used as bombarding ions to obtain equivalent H+ sputtering yields at energies below that at which the ion source provides sufficient proton current. The sputter yield was found to range from 7x10-3-1.5x10-2 atoms/proton with a broad maximum in the 2.0 keV region with the carbon film kept near ambient temperature. (B.D.)

  16. Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition

    Directory of Open Access Journals (Sweden)

    Seong Shan Yap

    2015-01-01

    Full Text Available Nanostructured diamond-like carbon (DLC films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arriving at low effective angle for the formation of nanostructured DLC. Nanostructures with maximum size of 50 nm were deposited as compared to the ultrasmooth DLC films obtained in a conventional deposition. The Raman spectra of the films confirmed that the films were diamond-like/amorphous in nature. Although grown at an angle, ion energy of >35 eV was obtained at the off-axis position. This was proposed to be responsible for subplantation growth of sp3 hybridized carbon. The condensation of energetic clusters and oblique angle deposition correspondingly gave rise to the formation of nanostructured DLC in this study.

  17. Composition and Microstructure of Magnetron Sputtering Deposited Ti-containing Amorphous Carbon Films

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and transmission electron microscopy (TEM). It is found that carbon films contain Ti 18 at pct; after Ti incorporation, the films consist of titanium carbide; C1s peak appears at 283.4 eV and it could be divided into 283.29 and 284.55 eV, representing sp2 and sp3, respectively, and sp2 is superior to sp3. This Ti-containing film with dominating sp2 bonds is nanocomposites with nanocrystalline TiC clusters embedded in an amorphous carbon matrix, which could be proved by XRD and TEM.

  18. Interposition fixing structure of TiO2 film deposited on activated carbon fibers

    Institute of Scientific and Technical Information of China (English)

    FU Ping-feng; LUAN Yong; DAI Xue-gang

    2006-01-01

    The immobilized photocatalyst, TiO2 film supported on activated carbon fibers (TiO2/ACFs) prepared with molecular adsorption-deposition (MAD), exhibits high stability in cyclic photodegradation runs. The interposition fixing structure between TiO2 film and carbon fiber was investigated by means of SEM-EDX, XRD, XPS and FTIR, and a model was proposed to explain this structure. With SEM examination of carbon fiber surface after removing the deposited TiO2 film, a residual TiO2 super-thin film was found to exist still. By determining surface groups on ACFs, titanium sulfate (Ti2(SO4)3) in burnt remainders of the TiO2/ACFs was thought to be formed with an interfacial reaction between TiO2 film and carbon fibers. These provide some evidence of firm attachment of TiO2 film to carbon fiber surface. In the consideration of characteristics of the MAD, the deposition mechanism of TiO2 film on ACFs was proposed, and the interposition fixing structure was inferred to intercrossedly form between TiO2 film and ACFs' surface. This structure leaded to firm attachment and high stability of the TiO2 film.

  19. Hydrogenated diamond-like carbon film deposited on UHMWPE by RF-PECVD

    International Nuclear Information System (INIS)

    In this work, investigations were conducted to analyze the properties of diamond-like carbon (DLC) film deposited on ultra-high molecular weight polyethylene (UHMWPE) by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) at a low temperature of 50 deg. C. Composition and structure of the films were characterized by scanning electron microscopy (SEM) and Raman spectroscopy. Hardness and wettability of the film were tested. Tribological characterizations were carried out on a universal micro-tribometer, and reciprocating friction against ZrO2 ball was adopted with 25% bovine serum as lubrication. Results show that DLC film was successfully deposited on UHMWPE surface by RF-PECVD and the sp3 content was about 20% in the film. The film increased the macrohardness of the substrate by about 42% and the wettability was improved too. Tribology test showed a higher friction coefficient but a much smaller wear volume after the deposition due to the surface roughening and strengthening.

  20. Metal-doped diamond-like carbon films synthesized by filter-arc deposition

    International Nuclear Information System (INIS)

    Diamond-like carbon (DLC) thin films are extensively utilized in the semiconductor, electric and cutting machine industries owing to their high hardness, high elastic modulus, low friction coefficients and high chemical stability. DLC films are prepared by ion beam-assisted deposition (BAD), sputter deposition, plasma-enhanced chemical vapor deposition (PECVD), cathodic arc evaporation (CAE), and filter arc deposition (FAD). The major drawbacks of these methods are the degraded hardness associated with the low sp3/sp2 bonding ratio, the rough surface and poor adhesion caused by the presence of particles. In this study, a self-developed filter arc deposition (FAD) system was employed to prepare metal-containing DLC films with a low particle density. The relationships between the DLC film properties, such as film structure, surface morphology and mechanical behavior, with variation of substrate bias and target current, are examined. Experimental results demonstrate that FAD-DLC films have a lower ratio, suggesting that FAD-DLC films have a greater sp3 bonding than the CAE-DLC films. FAD-DLC films also exhibit a low friction coefficient of 0.14 and half of the number of surface particles as in the CAE-DLC films. Introducing a CrN interfacial layer between the substrate and the DLC films enables the magnetic field strength of the filter to be controlled to improve the adhesion and effectively eliminate the contaminating particles. Accordingly, the FAD system improves the tribological properties of the DLC films

  1. Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

    CERN Document Server

    Pothiraja, Ramasamy; Awakowicz, Peter

    2011-01-01

    Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.

  2. Synthesis and tribological properties of diamond-like carbon films by electrochemical anode deposition

    Science.gov (United States)

    Li, Yang; Zhang, GuiFeng; Hou, XiaoDuo; Deng, DeWei

    2012-06-01

    Diamond-like carbon films (DLC) are deposited on Ti substrate by electrochemical anodic deposition at room temperature in pure methanol solution using a pulsed DC voltage at a range from 200 V to 2000 V. Raman spectroscopy analysis of the films reveals two broaden characteristic absorption peaks centred at ˜1350 cm-1 and 1580 cm-1, relating to D- and G-band of typical DLC films, respectively. A broad peak centred at 1325-1330 cm-1 is observed when an applied potential is 1200 V, which can confirm that the deposited films contained diamond structure phase. Tribological properties of the coated Ti substrates have been measured by means of a ball-on-plate wear test machine. A related growth mechanism of DLC films by the anodic deposition mode has also been discussed.

  3. Synthesis and characterization of thin films of nitrided amorphous carbon deposited by laser ablation

    International Nuclear Information System (INIS)

    The objective of this work is the synthesis and characterization of thin films of amorphous carbon (a-C) and thin films of nitrided amorphous carbon (a-C-N) using the laser ablation technique for their deposit. For this purpose, the physical properties of the obtained films were studied as function of diverse parameters of deposit such as: nitrogen pressure, power density, substrate temperature and substrate-target distance. For the characterization of the properties of the deposited thin films the following techniques were used: a) Raman spectroscopy which has demonstrated being a sensitive technique to the sp2 and sp3 bonds content, b) Energy Dispersive Spectroscopy which allows to know semi-quantitatively way the presence of the elements which make up the deposited films, c) Spectrophotometry, for obtaining the absorption spectra and subsequently the optical energy gap of the deposited material, d) Ellipsometry for determining the refraction index, e) Scanning Electron Microscopy for studying the surface morphology of thin films and, f) Profilemetry, which allows the determination the thickness of the deposited thin films. (Author)

  4. Deposition of diamond like carbon films by using a single ion gun with varying beam source

    Institute of Scientific and Technical Information of China (English)

    JIANG Jin-qiu; Chen Zhu-ping

    2001-01-01

    Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample holder and could be avoided. The thickness of the films ranges from tens up to 200 nanometers, and the hardness is in the range 20 to 30 GPa. Raman analytical results reveal the films are in amorphous structure. The effects of different beam source on the films structure are further discussed.

  5. Molecular dynamics simulation of the deposition process of hydrogenated diamond-like carbon (DLC) films

    Institute of Scientific and Technical Information of China (English)

    ZHANG YuJun; DONG GuangNeng; MAO JunHong; XIE YouBai

    2008-01-01

    The deposition process of hydrogenated diamond-like carbon (DLC) film greatly affects its frictional properties. In this study, CH3 radicals are selected as source species to deposit hydrogenated DLC films for molecular dynamics simulation. The growth and structural properties of hydrogenated DLC films are investigated and elucidated in detail. By comparison and statistical analysis, the authors find that the ratio of carbon to hydrogen in the films generally shows a monotonously increasing trend with the increase of impact energy. Carbon atoms are more reactive during deposition and more liable to bond with substrate atoms than hydrogen atoms. In addition, there exists a peak value of the number of hydrogen atoms deposited in hydrogenated DLC films. The trends of the variation are opposite on the two sides of this peak point, and itbecomes stable when impact energy is greater than 80 eV. The average relative density also indicates a rising trend along with the increment of impact energy, while it does not reach the saturation value until impact energy comes to 50 eV. The hydrogen content in source species is a key factor to determine the hydrogen content in hydrogenated DLC films. When the hydrogen content in source species is high, the hydrogen content in hydrogenated DLC films is accordingly high.

  6. Tribological properties of ion beam deposited diamond-like carbon film on silicon nitride

    International Nuclear Information System (INIS)

    The present article reports on the physical characterization and tribological properties of diamond-like carbon (DLC) films deposited on structural Si3N4 substrates. The films were deposited by the direct ion beam deposition technique. The ion beam was produced by plasma discharge of pre-mixed methane and hydrogen gas in a Kaufman-type ion source. The deposited films were found to be amorphous and contained about 70% carbon and 30% hydrogen. The friction coefficient of an uncoated Si3N4 ball on a DLC coated Si3N4 disc starts at about 0.2, then decreases rapidly to 0.1-0.15 with increasing sliding distance. Increasing humidity results in a slight increase in friction coefficient, but a significant decrease in wear factor. The wear factor for the tests at ≅60% rh (relative humidity) are about an order of magnitude smaller than the tests at 3% rh. (orig.)

  7. Tilting of carbon encapsulated metallic nanocolumns in carbon-nickel nanocomposite films by ion beam assisted deposition

    Energy Technology Data Exchange (ETDEWEB)

    Krause, Matthias [Helmholtz-Zentrum Dresden-Rossendorf, PF-510119, 01314 Dresden (Germany); Technische Universitaet Dresden, D-01062 Dresden (Germany); Muecklich, Arndt; Zschornak, Matthias; Wintz, Sebastian; Gemming, Sibylle; Abrasonis, Gintautas [Helmholtz-Zentrum Dresden-Rossendorf, PF-510119, 01314 Dresden (Germany); Oates, Thomas W. H. [Leibniz-Institut fuer Analytische Wissenschaft, ISAS e.V., Albert-Einstein-Str. 9, 12489 Berlin (Germany); Luis Endrino, Jose [Surfaces and Coatings Department, Instituto de Ciencia de Materiales de Madrid, c/Sor Juana Ines de la Cruz 3, Cantoblanco, 28049 Madrid (Spain); Baehtz, Carsten; Shalimov, Artem [Helmholtz-Zentrum Dresden-Rossendorf, PF-510119, 01314 Dresden (Germany); Rossendorf Beamline, European Synchrotron Radiation Facility, F-38043 Grenoble (France)

    2012-07-30

    The influence of assisting low-energy ({approx}50-100 eV) ion irradiation effects on the morphology of C:Ni ({approx}15 at. %) nanocomposite films during ion beam assisted deposition (IBAD) is investigated. It is shown that IBAD promotes the columnar growth of carbon encapsulated metallic nanoparticles. The momentum transfer from assisting ions results in tilting of the columns in relation to the growing film surface. Complex secondary structures are obtained, in which a significant part of the columns grows under local epitaxy via the junction of sequentially deposited thin film fractions. The influence of such anisotropic film morphology on the optical properties is highlighted.

  8. Pyrolyzed thin film carbon

    Science.gov (United States)

    Tai, Yu-Chong (Inventor); Liger, Matthieu (Inventor); Harder, Theodore (Inventor); Konishi, Satoshi (Inventor); Miserendino, Scott (Inventor)

    2010-01-01

    A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.

  9. Chemical vapor deposition of high quality graphene films from carbon dioxide atmospheres.

    Science.gov (United States)

    Strudwick, Andrew James; Weber, Nils Eike; Schwab, Matthias Georg; Kettner, Michel; Weitz, R Thomas; Wünsch, Josef R; Müllen, Klaus; Sachdev, Hermann

    2015-01-27

    The realization of graphene-based, next-generation electronic applications essentially depends on a reproducible, large-scale production of graphene films via chemical vapor deposition (CVD). We demonstrate how key challenges such as uniformity and homogeneity of the copper metal substrate as well as the growth chemistry can be improved by the use of carbon dioxide and carbon dioxide enriched gas atmospheres. Our approach enables graphene film production protocols free of elemental hydrogen and provides graphene layers of superior quality compared to samples produced by conventional hydrogen/methane based CVD processes. The substrates and resulting graphene films were characterized by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and Raman microscopy, sheet resistance and transport measurements. The superior quality of the as-grown graphene films on copper is indicated by Raman maps revealing average G band widths as low as 18 ± 8 cm(-1) at 514.5 nm excitation. In addition, high charge carrier mobilities of up to 1975 cm(2)/(V s) were observed for electrons in transferred films obtained from a carbon dioxide based growth protocol. The enhanced graphene film quality can be explained by the mild oxidation properties of carbon dioxide, which at high temperatures enables an uniform conditioning of the substrates by an efficient removal of pre-existing and emerging carbon impurities and a continuous suppression and in situ etching of carbon of lesser quality being co-deposited during the CVD growth. PMID:25398132

  10. Deposit of thin films of nitrided amorphous carbon using the laser ablation technique

    International Nuclear Information System (INIS)

    It is reported the synthesis and characterization of thin films of amorphous carbon (a-C) nitrided, deposited by laser ablation in a nitrogen atmosphere at pressures which are from 4.5 x 10 -4 Torr until 7.5 x 10 -2 Torr. The structural properties of the films are studied by Raman spectroscopy obtaining similar spectra at the reported for carbon films type diamond. The study of behavior of the energy gap and the ratio nitrogen/carbon (N/C) in the films, shows that the energy gap is reduced when the nitrogen incorporation is increased. It is showed that the refraction index of the thin films diminish as nitrogen pressure is increased, indicating the formation of graphitic material. (Author)

  11. Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

    Indian Academy of Sciences (India)

    S B Singh; M Pandey; N Chand; A Biswas; D Bhattacharya; S Dash; A K Tyagi; R M Dey; S K Kulkarni; D S Patil

    2008-10-01

    Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. During deposition, a d.c. self-bias was applied to the substrates by application of 13.56 MHz rf power. DLC films deposited at three different bias voltages (–60 V, –100 V and –150 V) were characterized by FTIR, Raman spectroscopy and spectroscopic ellipsometry to study the variation in the bonding and optical properties of the deposited coatings with process parameters. The mechanical properties such as hardness and elastic modulus were measured by load depth sensing indentation technique. The DLC film deposited at –100 V bias exhibit high hardness (∼ 19 GPa), high elastic modulus (∼ 160 GPa) and high refractive index (∼ 2.16–2.26) as compared to films deposited at –60 V and –150 V substrate bias. This study clearly shows the significance of substrate bias in controlling the optical and mechanical properties of DLC films.

  12. Electron field emission characteristics of nano-catkin carbon films deposited by electron cyclotron resonance microwave plasma chemical vapour deposition

    Institute of Scientific and Technical Information of China (English)

    Gu Guang-Rui; Wu Bao-Jia; Jin Zhe; Ito Toshimichi

    2008-01-01

    This paper reported that the nano-catkin carbon films were prepared on Si substrates by means of electron cyclotron resonance microwave plasma chemical vapour deposition in a hydrogen and methane mixture.The surface morphology and the structure of the fabricated films were characterized by using scanning electron microscopes and Raman spectroscopy,respectively.The stable field emission properties with a low threshold field of 5V/μm corresponding to a current density of about 1μA/cm2 and a current density of 3.2mA/cm2 at an electric field of 10V/μm were obtained from the carbon film deposited at CH4 concentration of 8%.The mechanism that the threshold field decreased with the increase of the CH4 concentration and the high emission current appeared at the high CH4 concentration was explained by using the Fowler-Nordheim theory.

  13. Electron field emission characteristics of nano-catkin carbon films deposited by electron cyclotron resonance microwave plasma chemical vapour deposition

    Science.gov (United States)

    Gu, Guang-Rui; Wu, Bao-Jia; Jin, Zhe; Ito, Toshimichi

    2008-02-01

    This paper reported that the nano-catkin carbon films were prepared on Si substrates by means of electron cyclotron resonance microwave plasma chemical vapour deposition in a hydrogen and methane mixture. The surface morphology and the structure of the fabricated films were characterized by using scanning electron microscopes and Raman spectroscopy, respectively. The stable field emission properties with a low threshold field of 5V/μm corresponding to a current density of about 1μA/cm2 and a current density of 3.2mA/cm2 at an electric field of 10V/μm were obtained from the carbon film deposited at CH4 concentration of 8%. The mechanism that the threshold field decreased with the increase of the CH4 concentration and the high emission current appeared at the high CH4 concentration was explained by using the Fowler-Nordheim theory.

  14. Incorporation of Nitrogen into Amorphous Carbon Films Produced by Surface-Wave Plasma Chemical Vapor Deposition

    Institute of Scientific and Technical Information of China (English)

    Wu Yuxiang(吴玉祥); Zhu Xiaodong(朱晓东); Zhan Rujuan(詹如娟)

    2003-01-01

    In order to study the influence of nitrogen incorporated into amorphous carbon films,nitrogenated amorphous carbon films have been deposited by using surface wave plasma chemical vapor deposition under various ratios of N2/CH4 gas flow. Optical emission spectroscopy has been used to monitor plasma features near the deposition zone. After deposition, the samples are checked by Raman spectroscopy and x-ray photo spectroscopy (XPS). Optical emission intensities of CH and N atom in the plasma are found to be enhanced with the increase in the N2/CH4 gas flow ratio, and then reach their maximums when the N2/CH4 gas flow ratio is 5%. A contrary variation is found in Raman spectra of deposited films. The intensity ratio of the D band to the G band (ID/IG) and the peak positions of the G and D bands all reach their minimums when the N2/CH4 gas flow ratio is 5%. These show that the structure of amorphous carbon films has been significantly modified by introduction of nitrogen.

  15. Electronic state modification in laser deposited amorphous carbon films by the inclusion of nitrogen

    OpenAIRE

    Y. Miyajima; Adamopoulos, G; Henley, SJ; V.Stolojan; Tison, Y; Garcia-Caurel, E; Drevillon, B.; Shannon, JM; Silva, SRP

    2008-01-01

    In this study, we investigate the effect of the inclusion of nitrogen in amorphous carbon thin films deposited by pulsed laser deposition, which results in stress induced modifications to the band structure and the concomitant changes to the electronic transport properties. The microstructural changes due to nitrogen incorporation were examined using electron energy-loss spectroscopy and Raman scattering. The band structure was investigated using spectroscopic ellipsometry data in the range o...

  16. Deposition, characterization, and tribological applications of near-frictionless carbon films on glass and ceramic substrates

    International Nuclear Information System (INIS)

    As an element, carbon is rather unique and offers a range of rare opportunities for the design and fabrication of zero-, one-, two-, and three-dimensional nanostructured novel materials and coatings such as fullerenes, nanotubes, thin films, and free-standing nano-to-macroscale structures. Among these, carbon-based two-dimensional thin films (such as diamond and diamond-like carbon (DLC)) have attracted an overwhelming interest in recent years, mainly because of their exceptional physical, chemical, mechanical, electrical, and tribological properties. In particular, certain DLC films were found to provide extremely low friction and wear coefficients to sliding metallic and ceramic surfaces. Since the early 1990s, carbon has been used at Argonne National Laboratory to synthesize a class of novel DLC films that now provide friction and wear coefficients as low as 0.001 and 10-11-10-10 mm3 N-1 m-1, respectively, when tested in inert or vacuum test environments. Over the years, we have optimized these films and applied them successfully to all kinds of metallic and ceramic substrates and evaluated their friction and wear properties under a wide range of sliding conditions. In this paper, we will provide details of our recent work on the deposition, characterization, and tribological applications of near-frictionless carbon films on glass and ceramic substrates. We will also provide chemical and structural information about these films and describe the fundamental tribological mechanisms that control their unusual friction and wear behaviour

  17. Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates

    Energy Technology Data Exchange (ETDEWEB)

    Bieder, A. [Institute of Process Engineering, ETH Zurich, CH-8092 Zurich (Switzerland); Gondoin, V. [Institute of Process Engineering, ETH Zurich, CH-8092 Zurich (Switzerland); Leterrier, Y. [Laboratoire de Technologie des Composites et Polymeres (LTC), Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland); Tornare, G. [Laboratoire de Technologie des Composites et Polymeres (LTC), Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland); Rohr, Ph. Rudolf von [Institute of Process Engineering, ETH Zurich, CH-8092 Zurich (Switzerland)]. E-mail: vonrohr@ipe.mavt.ethz.ch; Manson, J.-A. E. [Laboratoire de Technologie des Composites et Polymeres (LTC), Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland)

    2007-05-07

    Cohesive and adhesive properties of silicon oxide barrier coatings deposited from an oxygen/hexamethyldisiloxane gas mixture by plasma enhanced chemical vapor deposition, with controlled incorporation of carbon on 12 {mu}m thick polyethylene terephtalate films were investigated. The reactor was equipped with a 2.45 GHz slot antenna plasma source and a 13.56 MHz-biased substrate holder. The two plasma sources were operated separately or in a dual mode. It was found that no or negligible internal stresses were introduced in the silicon oxide coatings as long as the increase of energy experienced by the film was compensated by the densification of the oxide. For a range of process parameters and carbon content on the changes of the crack onset strain, adhesion, and cohesion were found to be similar. Generally a high crack onset strain or good adhesion and cohesion were measured for films with an increased carbon content, although this was obtained at the expense of the gas barrier performance. Promising approaches towards high-barrier thin films with good mechanical integrity are proposed, based on coatings with a gradient in the carbon content and in the mechanical properties, on nano-composite laminates, and on organo-silane treatments.

  18. Multi-Directional Growth of Aligned Carbon Nanotubes Over Catalyst Film Prepared by Atomic Layer Deposition

    Directory of Open Access Journals (Sweden)

    Zhou Kai

    2010-01-01

    Full Text Available Abstract The structure of vertically aligned carbon nanotubes (CNTs severely depends on the properties of pre-prepared catalyst films. Aiming for the preparation of precisely controlled catalyst film, atomic layer deposition (ALD was employed to deposit uniform Fe2O3 film for the growth of CNT arrays on planar substrate surfaces as well as the curved ones. Iron acetylacetonate and ozone were introduced into the reactor alternately as precursors to realize the formation of catalyst films. By varying the deposition cycles, uniform and smooth Fe2O3 catalyst films with different thicknesses were obtained on Si/SiO2 substrate, which supported the growth of highly oriented few-walled CNT arrays. Utilizing the advantage of ALD process in coating non-planar surfaces, uniform catalyst films can also be successfully deposited onto quartz fibers. Aligned few-walled CNTs can be grafted on the quartz fibers, and they self-organized into a leaf-shaped structure due to the curved surface morphology. The growth of aligned CNTs on non-planar surfaces holds promise in constructing hierarchical CNT architectures in future.

  19. Physical properties of nitrogen-doped diamond-like amorphous carbon films deposited by supermagnetron plasma chemical vapor deposition

    International Nuclear Information System (INIS)

    Diamond-like amorphous carbon films doped with nitrogen (DAC:N) were deposited on Si and glass wafers intermittently using i-C4H10/N2 repetitive supermagnetron plasma chemical vapor deposition. Deposition duration, which is equal to a plasma heating time of wafer, was selected to be 40 or 60 s, and several layers were deposited repetitively to form one thick film. DAC:N films were deposited at a lower-electrode temperature of 100 deg. C as a function of upper- and lower-electrode rf powers (200 W/200 W-1 kW/1 kW) and N2 concentration (0%-80%). With an increase in N2 concentration and rf power, the resistivity and the optical band gap decreased monotonously. With increase of the deposition duration from 40 to 60 s, resistivity decreased to 0.03Ω cm and optical band gap decreased to 0.02 eV (substantially equal to 0 eV within the range of experimental error), at an N2 concentration of 80% and rf power of 1 kW(/1 kW)

  20. Pulsed laser deposition of thin carbon films in a neutral gas background

    International Nuclear Information System (INIS)

    We studied carbon film deposition using a laser-produced plasma, in argon and helium background gas, at pressures between 0.5 and 700 mTorr. A Nd : YAG, 370 mJ, 3.5 ns, at 1.06 µm, operating at 10 Hz, with a fluence of 6.7 J cm−2 was used. The laser plasma was characterized using space resolved OES and a fast response Faraday cup. The resulting carbon films were analysed using AFM, Raman spectroscopy, XPS and SIMS. The structural properties of the carbon films were found to be strongly correlated with the laser carbon plasma composition. Films with a relatively high content of sp3, characteristic of DLC, were obtained at pressures below 200 mTorr. For these conditions the characteristic carbon ion energies in the expanding laser plasma were of the order of 100 eV. At higher pressures sp2 bonds, associated with amorphous carbon, were dominant, which coincides with a high content of C2 molecules in the laser plasma, and a characteristic carbon ion energy around 20 eV. (paper)

  1. Diamondlike carbon deposition on plastic films by plasma source ion implantation

    International Nuclear Information System (INIS)

    Application of pulsed high negative voltage (∼10 μs pulse width, 300-900 pulses per second) to a substrate is found to induce discharge, thereby increasing ion current with an inductively coupled plasma source. This plasma source ion beam implantation (PSII) technique is investigated for the pretreatment and deposition of diamond-like carbon (DLC) thin layer on polyethylene terepthalate (PET) film. Pretreatment of PET with N2 and Ar plasma is expected to provide added barrier effects when coupled with DLC deposition, with possible application to fabrication of PET beverage bottles. PSII treatment using N2 and Ar in separate stages is found to change the color of the PET film, effectively increasing near-ultraviolet absorption. The effects of this pretreatment on the chemical bonding of C, H, and O are examined by x-ray photoelectron spectroscopy (XPS). DLC thin film was successfully deposited on the PET film. The surface of the DLC thin layer is observed to be smooth by scanning electron microscopy, and its structure characteristics are examined by XPS and laser Raman spectroscopy. Subsequent processing using acetylene or acetylene and Ar (20%) produced thin carbon layers that are confirmed to be graphite-dominated DLC. Also, this PSII method is employed in order to deposit the DLC layer on the inside surface of the PET bottle and to reduce oxygen permeation rate by 40%

  2. Diamondlike carbon deposition on plastic films by plasma source ion implantation

    Science.gov (United States)

    Tanaka, T.; Yoshida, M.; Shinohara, M.; Takagi, T.

    2002-05-01

    Application of pulsed high negative voltage (~10 μs pulse width, 300-900 pulses per second) to a substrate is found to induce discharge, thereby increasing ion current with an inductively coupled plasma source. This plasma source ion beam implantation (PSII) technique is investigated for the pretreatment and deposition of diamond-like carbon (DLC) thin layer on polyethylene terepthalate (PET) film. Pretreatment of PET with N2 and Ar plasma is expected to provide added barrier effects when coupled with DLC deposition, with possible application to fabrication of PET beverage bottles. PSII treatment using N2 and Ar in separate stages is found to change the color of the PET film, effectively increasing near-ultraviolet absorption. The effects of this pretreatment on the chemical bonding of C, H, and O are examined by x-ray photoelectron spectroscopy (XPS). DLC thin film was successfully deposited on the PET film. The surface of the DLC thin layer is observed to be smooth by scanning electron microscopy, and its structure characteristics are examined by XPS and laser Raman spectroscopy. Subsequent processing using acetylene or acetylene and Ar (20%) produced thin carbon layers that are confirmed to be graphite-dominated DLC. Also, this PSII method is employed in order to deposit the DLC layer on the inside surface of the PET bottle and to reduce oxygen permeation rate by 40%.

  3. Nitrogen doping and structural properties of amorphous carbon films deposited by pulsed laser ablation

    Science.gov (United States)

    Rusop, M.; Mominuzzaman, S. M.; Tian, X. M.; Soga, T.; Jimbo, T.; Umeno, M.

    2002-09-01

    Nitrogen (N) was successfully introduced into amorphous carbon (a-C) films by ablating carbon (C) from a camphoric carbon (CC) target with varying ambient N partial pressure (NPP) using pulsed laser ablation (PLA). We found that the N content in the film changed on varying the NPP. The room temperature conductivity ( σRT) decreases initially at 0.1 mTorr and then increases at higher NPP up to 30 mTorr and decreases thereafter. We can relate this variation to doping of N in the films for low N content as the optical gap ( Eg) remains unchanged till the film is deposited at 1 mTorr. Scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy and Raman spectroscopy studies also suggest that no graphitization whatsoever occurs in the film after N addition up to 1 mTorr. Although no structural change in the films was found with N addition up to 1 mTorr, the σRT depends on the N content. With higher NPP up to 30 mTorr, since Eg decreases with increasing σRT, we related this phenomenon to the graphitization. However, above 30 mTorr, since Eg increases with the decrease of σRT, we related this phenomenon to the structural change in the film.

  4. Electrospray deposition of carbon nanotube thin films for flexible transparent electrodes.

    Science.gov (United States)

    Meng, Yinan; Xin, Guoqing; Nam, Jaewook; Cho, Sung Min; Chae, Heeyeop

    2013-09-01

    Flexible transparent carbon nanotube (CNT) electrodes were fabricated by electrospray deposition, a large-area scalable and cost-effective process. The carbon nanotubes were dispersed in N,N-dimethylformamide (DMF) and deposited on polyethylene terephthalate (PET) substrates by electrospray deposition process at room temperature and atmospheric pressure. Major process variables were characterized and optimized for the electrospray process development such as electric field between nozzle and substrates, CNT solution flowrate, gap between nozzle and substrates, solution concentration, solvent properties and surface temperature. The sheet resistance of the electrospray deposited CNT films were reduced by HNO3 doping process. 169 Omega/sq sheet resistance and 86% optical transmittance was achieved with low surface roughness of 1.2 nm. The films showed high flexibility and transparency, making them potential replacements of ITO or ZnO in such as solid state lighting, touch panels, and solar cells. Electrospray process is a scalable process and we believe that this process can be applied for large area carbon nanotube film formation. PMID:24205613

  5. Structure and phase composition of deposited tantalum-carbon films

    Science.gov (United States)

    Tuleushev, Yu. Zh.; Volodin, V. N.; Zhakanbaev, E. A.; Alimzhan, B.

    2016-08-01

    Ion plasma sputtering and the subsequent codeposition of ultrafine tantalum and carbon particles were used to prepare coatings with 4.6-71.5 at % C. Structural studies of the coatings showed the existence of carbon solid solutions in β Ta at carbon contents to 4.6 at %, carbon solid solutions in α Ta at carbon contents of 4.6-10.3 at %, and direct synthesis of TaC at carbon contents of 44.7-71.5 at %. During heat treatments to 700°C, the substantial concentration widening of regions of the existence of Ta2C and TaC was found. The lattice parameters of hexagonal Ta2C and fcc TaC carbides were determined for composition ranges of the existence of phases during heating to 700°C. Upon heating above 600°C, the progressive transition of quasiamorphous Ta2C carbide into the crystalline Ta2C carbide was found to take place. The possibility of applying the direct synthesis of TaC carbide in engineering was noted.

  6. Synthesis and Characteristics of Diamond-like Carbon Films Deposited on Quartz Substrate

    Institute of Scientific and Technical Information of China (English)

    黄卫东; 丁鼎; 詹如娟

    2004-01-01

    Diamond-like carbon (DLC) films are deposited on quartz substrate using pure CH4 in the surface wave plasma equipment. A direct current negative bias up to -90 V is applied to the substrate to investigate the bias effect on the film characteristics. Deposited films are characterized by Raman spectroscopy, infrared (IR) and ultraviolet-visible absorption techniques.There are two broad Raman peaks around 1340 cm-1 and 1600 cm-1 and the first one has a greater sp3 component with an increased bias. Infrared spectroscopy has three sp3 C-H modes at 2852 cm-1, 2926 cm- 1 and 2962 cm-1, respectively and also shows an intensity increase with the negative bias. Optical band gap is calculated from the ultraviolet-visible absorption spectroscopy and the increased values with negative bias and deposition time are obtained. After a thermal anneal at about 500 ℃ for an hour to the film deposited under the bias of-90 V, we get an almost unchanged Raman spectrum and a peak intensity-reduced IR signal, which indicates a reduced H-content in the film. Meanwhile the optical band gap changed from 0.85 eV to 1.5 eV.

  7. CRYSTALLINE CARBON NITRIDE THIN FILMS DEPOSITED BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION

    Institute of Scientific and Technical Information of China (English)

    Zhang Yong-ping; Gu You-song; Chang Xiang-rong; Tian Zhong-zhuo; Shi Dong-xia; Zhang Xiu-fang; Yuan lei

    2000-01-01

    The crystalline carbon nitride thin films have beenprepared on Si (100) substrates using microwave plasma chemical vapordeposition technique. The experimental X-ray diffractionpattern of the films prepared contain all the strongpeaks of -C3N4 and -C3N4, but most of thepeaks are overlapped.The films are composed of -C3N4 and -C3N4.The N/C atomic ratio isclose to the stoichiometric value 1.33. X-ray photoelectronspectroscopic analysis indicated that thebinding energies of C 1s and N 1s are 286.43eV and 399.08 eV respectively.The shifts are attributed to the polarization of C-N bond. Bothobserved Raman and Fourier transform infrared spectra werecompared with the theoretical calculations. The results support theexistence of C-N covalent bond in - and -C3N4 mixture.

  8. Field Emission Properties of Ball-Like Nano-Carbon Thin Films Deposited on Mo Films with Accidented Topography

    International Nuclear Information System (INIS)

    Ball-like nano-carhon thin films (BNCTs) are grown on Mo layers by microwave plasma chemical vapour deposition (MPCVD) system. The Mo layers are deposited on ceramic substrates by electron beam deposition method and are pretreated by ultrasonically scratching. The optimization effects of ultrasonically scratching pretreat-ment on the surface micro-structures of carbon films are studied. It is found from field-emission scanning electron microscope (FE-SEM) images and Raman spectra that the surface structures of the carbon films deposited on Mo pretreated are improved, which are composed of highly uniform nano-structured carbon balls with considerable disorder structures. Field emission (FE) measurements are carried out using a diode structure. The experimental results indicate that the BNCTs exhibit good FE properties, which have the turn on field of 1.56 V/μm, and the current density of 1.0mA/cm2 at electric field of 4.0 V/μm, the uniformly distributed emission site density from a broad well-proportioned emission area of 4 cm2 are also obtained. Linearity is observed in Fowler–Nordheim (F–N) plots in higher Geld region, and the possible emission mechanism of BNCTs is discussed. (condensed matter: electronic structure, electrical, magnetic, and optical properties)

  9. Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode

    Directory of Open Access Journals (Sweden)

    E. F. Shevchenko

    2014-01-01

    Full Text Available Carbon diamond-like thin films on a silicon substrate were deposited by direct reactive ion beam method with an ion source based on Penning direct-current discharge system with cold hollow cathode. Deposition was performed under various conditions. The pressure (12–200 mPa and the plasma-forming gas composition consisting of different organic compounds and hydrogen (C3H8, CH4, Si(CH32Cl2, H2, the voltage of accelerating gap in the range 0.5–5 kV, and the substrate temperature in the range 20–850°C were varied. Synthesized films were researched using nanoindentation, Raman, and FTIR spectroscopy methods. Analysis of the experimental results was made in accordance with a developed model describing processes of growth of the amorphous and crystalline carbon materials.

  10. Raman spectroscopic studies of thin film carbon nanostructures deposited using electro deposition technique

    Science.gov (United States)

    Dayal, Saurabh; Sasi, Arshali; Jhariya, Sapna; Sasikumar, C.

    2016-05-01

    In the present work our focus is to synthesize carbon nanostructures (CNS) by electro deposition technique without using any surface pretreatment or catalyst preparation before CNS formation. The process were carried out at significantly low voltage and at low temperature as reported elsewhere. Further the samples were characterized using different characterization tools such as SEM and Raman spectroscopy. The SEM results showed the fibres or tubular like morphology. Raman spectra shows strong finger print at 1600 cm-1 (G peak), 1350 cm-1 (D peak) along with the radial breathing mode (RBM) between 150cm-1 to 300 cm-1. This confirms the formation of tubular carbon nanostructures.

  11. Characterization of hydrogenated and deuterated thin carbon films deposited by magnetron sputtering

    Energy Technology Data Exchange (ETDEWEB)

    Pantelica, D., E-mail: pantel@nipne.ro [Horia Hulubei National Institute for Physics and Nuclear Engineering (IFIN-HH), P.O.B. MG-6, 30 Reactorului St., RO 077125 Magurele (Romania); Ionescu, P.; Petrascu, H. [Horia Hulubei National Institute for Physics and Nuclear Engineering (IFIN-HH), P.O.B. MG-6, 30 Reactorului St., RO 077125 Magurele (Romania); Nita, C.R. [Horia Hulubei National Institute for Physics and Nuclear Engineering (IFIN-HH), P.O.B. MG-6, 30 Reactorului St., RO 077125 Magurele (Romania); University Politehnica of Bucharest, RO 060042 Bucharest (Romania); Matei, E.; Rasoga, O. [National Institute for Materials Physics, 105 Atomistilor Str., RO 077125 Magurele-Bucharest (Romania); Acsente, T.; Dinescu, G. [National Institute for Laser, Plasma and Radiation Physics, 409 Atomistilor Str., RO 077125 Magurele-Bucharest (Romania)

    2014-07-15

    Thin films of C layers were deposited by radiofrequency magnetron sputtering on silicon substrates using three gaseous atmospheres: pure Ar, Ar + H{sub 2} and Ar + D{sub 2} mixtures. Scanning Electron Microscopy investigations showed that addition of D{sub 2} or H{sub 2} to main sputtering gas (Ar) leads to the enhancement of the deposition rate while the layer morphology remained columnar. Fourier Transform Infrared Spectroscopy measurements revealed the presence of D–C or H–C chemical bonds in the samples. Ion beam analysis measurements performed by simultaneous recording of the recoiled H and D ions, and of backscattered {sup 4}He confirmed the incorporation of hydrogen and deuterium in the deposited carbon thin films.

  12. Microstructure and tribological performance of diamond-like carbon films deposited on hydrogenated rubber

    International Nuclear Information System (INIS)

    In this paper, the microstructure and tribological performance of diamond-like carbon (DLC) films prepared by plasma chemical vapor deposition on hydrogenated nitrile butadiene rubbers (HNBR) are studied. Different negative variations of temperature during film growth were selected by proper changes of the bias voltage. Raman measurements show a similar bonding regardless of the voltages used. A columnar growth and a tile-like microstructure of the DLC films were identified by scanning electron microscopy. Patch sizes can be correlated with the deposition conditions. The coefficient of friction (CoF) of DLC film coated HNBR was found to be much lower than that of the unprotected rubber, and more reduced for the DLC films with smaller patch sizes, which is explained by a better flexibility and conformity of the film during testing. In one of the samples, unexpected low CoF was observed, which was attributed to a modification of the mechanical properties of the rubber during the plasma treatment at high voltage. This issue was confirmed by X-ray photoelectron spectroscopy, which indicated a modification of the cross linking in the rubber. - Highlights: ► Bias voltage does not vary the chemical bonding and surface morphology of films. ► Film structure is patched, whose size depends on the etching and deposition voltages. ► The frictional behavior can be correlated with the patch size of the films. ► Surface analysis showed that rubber x-linking is modified by etching at high voltage. ► Modification of rubber x-linking leads to a different frictional behavior.

  13. Adhesion improvement of hydrogenated diamond-like carbon thin films by pre-deposition plasma treatment of rubber substrate

    NARCIS (Netherlands)

    Bui, X.L.; Pei, Y.T.; Mulder, E.D.G.; Hosson, J.Th.M. De

    2009-01-01

    For reduction of friction and enhancement of wear resistance of dynamic rubber seals, thin films of hydrogenated diamond-like carbon (DLC) have been deposited on hydrogenated nitrile butadiene rubber (HNBR) via magnetron-enhanced plasma chemical vapor deposition (ME-PCVD). Pre-deposition plasma trea

  14. Deodorisation effect of diamond-like carbon/titanium dioxide multilayer thin films deposited onto polypropylene

    Energy Technology Data Exchange (ETDEWEB)

    Ozeki, K., E-mail: ozeki@mx.ibaraki.ac.jp [Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511 (Japan); Frontier Research Center for Applied Atomic Sciences, 162-1 Shirakata, Toukai, Ibaraki 319-1106 (Japan); Hirakuri, K.K. [Applied Systems Engineering, Graduate School of Science and Engineering, Tokyo Denki University, Ishizaka, Hatoyama, Hiki, Saitama 350-0394 (Japan); Masuzawa, T. [Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511 (Japan)

    2011-04-15

    Many types of plastic containers have been used for the storage of food. In the present study, diamond-like carbon (DLC)/titanium oxide (TiO{sub 2}) multilayer thin films were deposited on polypropylene (PP) to prevent flavour retention and to remove flavour in plastic containers. For the flavour removal test, two types of multilayer films were prepared, DLC/TiO{sub 2} films and DLC/TiO{sub 2}/DLC films. The residual gas concentration of acetaldehyde, ethylene, and turmeric compounds in bottle including the DLC/TiO{sub 2}-coated and the DLC/TiO{sub 2}/DLC-coated PP plates were measured after UV radiation, and the amount of adsorbed compounds to the plates was determined. The percentages of residual gas for acetaldehyde, ethylene, and turmeric with the DLC/TiO{sub 2} coated plates were 0.8%, 65.2% and 75.0% after 40 h of UV radiation, respectively. For the DLC/TiO{sub 2}/DLC film, the percentages of residual gas for acetaldehyde, ethylene and turmeric decreased to 34.9%, 76.0% and 85.3% after 40 h of UV radiation, respectively. The DLC/TiO{sub 2}/DLC film had a photocatalytic effect even though the TiO{sub 2} film was covered with the DLC film.

  15. ERDA characterization of carbon nitride films deposited by hollow cathode discharge process

    International Nuclear Information System (INIS)

    The interest in carbon nitride (CN) thin films stems from the theoretical work of Liu and Cohen predicting the extreme hardness of this material, comparable to or greater than that of diamond. The growth of CN thin films employing various deposition techniques such as plasma chemical vapor deposition, sputtering, laser ablation, ion assisted dynamic mixing and low energy ion implantation has been reported. This contribution presents some results about the characterization of CNx films using elastic recoil detection analysis (ERDA) technique. CN films were deposited on silicon substrates by electron beam evaporation of pure graphite in a nitrogen environment. A hollow cathode discharge in arc regime was used both for evaporating a graphite target and for generating a high density plasma in the vicinity of the substrate. The main deposition parameters were as follows: gas (N2) pressure, 10-2 - 5.10-2 mbar; hollow cathode discharge power, 2.5 - 5 kW; substrate negative bias voltage, 0-150 V; graphite evaporation rate, 0.08 - 0.2 g/min; deposition duration, 15-60 min. The ERDA measurements were carried out at the Tandem accelerator of IFIN-HH using a 63Cu10+ beam at 80 MeV. The samples were mounted in a scattering target chamber with a vacuum higher than 5 x 10-5 Torr. The detector consisted in a compact ΔE(gas)-E(solid) telescope, placed at 30 angle with respect to the beam. The elements of the main interests were C and N. The measured Δ E -E spectra for two samples prepared in different conditions are presented. A quantitative analysis of the C and N energy spectra using our program SURFAN have been carried out for the these samples. It shows that the nitrogen to carbon atomic concentration ratio is close to 0.3. The nitrogen content is lower than that expected for the ideal β - C3N4 solid. (authors)

  16. Friction properties of amorphous carbon ultrathin films deposited by filtered cathodic vacuum arc and radio-frequency sputtering

    International Nuclear Information System (INIS)

    The friction properties of ultrathin films of amorphous carbon (a-C) deposited on Si(100) substrates by filtered cathodic vacuum arc and radio-frequency sputtering were investigated by surface force microscopy. Deposition parameters yielding a-C films with high sp3 content were used to deposit films of thickness between 5 and 35 nm. The coefficient of friction of both types of a-C films was measured with a 1-μm-radius conical diamond tip and normal loads in the range of 20–640 μN. The results show a strong dependence of the friction properties on the surface roughness, thickness, and structure of the a-C films, which are influenced by the intricacies of the deposition method. The dependence of the coefficient of friction on normal load and the dominance of adhesion and plowing friction mechanisms are interpreted in terms of the through-thickness variation of carbon atom hybridization of the a-C films. - Highlights: • Comparison of nanoscale friction properties of ultrathin amorphous carbon films. • Friction dependence on film roughness, thickness, and structure (hybridization). • Effect of through-thickness changes in carbon atom hybridization on film friction. • Explanation of film friction trends in terms of competing friction mechanisms

  17. Friction properties of amorphous carbon ultrathin films deposited by filtered cathodic vacuum arc and radio-frequency sputtering

    Energy Technology Data Exchange (ETDEWEB)

    Matlak, J.; Komvopoulos, K., E-mail: kyriakos@me.berkeley.edu

    2015-03-31

    The friction properties of ultrathin films of amorphous carbon (a-C) deposited on Si(100) substrates by filtered cathodic vacuum arc and radio-frequency sputtering were investigated by surface force microscopy. Deposition parameters yielding a-C films with high sp{sup 3} content were used to deposit films of thickness between 5 and 35 nm. The coefficient of friction of both types of a-C films was measured with a 1-μm-radius conical diamond tip and normal loads in the range of 20–640 μN. The results show a strong dependence of the friction properties on the surface roughness, thickness, and structure of the a-C films, which are influenced by the intricacies of the deposition method. The dependence of the coefficient of friction on normal load and the dominance of adhesion and plowing friction mechanisms are interpreted in terms of the through-thickness variation of carbon atom hybridization of the a-C films. - Highlights: • Comparison of nanoscale friction properties of ultrathin amorphous carbon films. • Friction dependence on film roughness, thickness, and structure (hybridization). • Effect of through-thickness changes in carbon atom hybridization on film friction. • Explanation of film friction trends in terms of competing friction mechanisms.

  18. Controlled fluoridation of amorphous carbon films deposited at reactive plasma conditions

    Directory of Open Access Journals (Sweden)

    Yoffe Alexander

    2015-09-01

    Full Text Available A study of the correlations between plasma parameters, gas ratios, and deposited amorphous carbon film properties is presented. The injection of a C4F8/Ar/N2 mixture of gases was successfully used in an inductively coupled plasma system for the preparation of amorphous carbon films with different fluoride doping at room-temperature, using silicon as a substrate. This coating was formed at low-pressure and low-energy using an inductively coupled plasma process. A strong dependence between the ratios of gases during deposition and the composition of the substrate compounds was shown. The values of ratios between Ar (or Ar+N2 and C4F8 - 1:1 and between N2 and Ar - 1:2 in the N2/Ar/C4F8 mixture were found as the best for low fluoridated coatings. In addition, an example of improving the etch-passivation in the Bosch procedure was described. Scanning electron microscopy with energy dispersive spectroscopy options, X-ray diffraction, and X-ray reflectivity were used for quantitative analysis of the deposited films.

  19. Diamondlike carbon deposition on plastic films by plasma source ion implantation

    CERN Document Server

    Tanaka, T; Shinohara, M; Takagi, T

    2002-01-01

    Application of pulsed high negative voltage (approx 10 mu s pulse width, 300-900 pulses per second) to a substrate is found to induce discharge, thereby increasing ion current with an inductively coupled plasma source. This plasma source ion beam implantation (PSII) technique is investigated for the pretreatment and deposition of diamond-like carbon (DLC) thin layer on polyethylene terepthalate (PET) film. Pretreatment of PET with N sub 2 and Ar plasma is expected to provide added barrier effects when coupled with DLC deposition, with possible application to fabrication of PET beverage bottles. PSII treatment using N sub 2 and Ar in separate stages is found to change the color of the PET film, effectively increasing near-ultraviolet absorption. The effects of this pretreatment on the chemical bonding of C, H, and O are examined by x-ray photoelectron spectroscopy (XPS). DLC thin film was successfully deposited on the PET film. The surface of the DLC thin layer is observed to be smooth by scanning electron mic...

  20. The multilayered structure of ultrathin amorphous carbon films synthesized by filtered cathodic vacuum arc deposition

    KAUST Repository

    Wang, Na

    2013-08-01

    The structure of ultrathin amorphous carbon (a-C) films synthesized by filtered cathodic vacuum arc (FCVA) deposition was investigated by high-resolution transmission electron microscopy, electron energy loss spectroscopy, and x-ray photoelectron spectroscopy. Results of the plasmon excitation energy shift and through-thickness elemental concentration show a multilayered a-C film structure comprising an interface layer consisting of C, Si, and, possibly, SiC, a buffer layer with continuously increasing sp 3 fraction, a relatively thicker layer (bulk film) of constant sp 3 content, and an ultrathin surface layer rich in sp 2 hybridization. A detailed study of the C K-edge spectrum indicates that the buffer layer between the interface layer and the bulk film is due to the partial backscattering of C+ ions interacting with the heavy atoms of the silicon substrate. The results of this study provide insight into the minimum thickness of a-C films deposited by FCVA under optimum substrate bias conditions. Copyright © 2013 Materials Research Society.

  1. Protolytic carbon film technology

    Energy Technology Data Exchange (ETDEWEB)

    Renschler, C.L.; White, C.A.

    1996-04-01

    This paper presents a technique for the deposition of polyacrylonitrile (PAN) on virtually any surface allowing carbon film formation with only the caveat that the substrate must withstand carbonization temperatures of at least 600 degrees centigrade. The influence of processing conditions upon the structure and properties of the carbonized film is discussed. Electrical conductivity, microstructure, and morphology control are also described.

  2. Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc

    KAUST Repository

    Wang, N.

    2012-07-01

    The effect of the incidence angle of energetic carbon ions on the thickness, topography, and structure of ultrathin amorphous carbon (a-C) films synthesized by filtered cathodic vacuum arc (FCVA) was examined in the context of numerical and experimental results. The thickness of a-C films deposited at different incidence angles was investigated in the light of Monte Carlo simulations, and the calculated depth profiles were compared with those obtained from high-resolution transmission electron microscopy (TEM). The topography and structure of the a-C films were studied by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), respectively. The film thickness decreased with the increase of the incidence angle, while the surface roughness increased and the content of tetrahedral carbon hybridization (sp 3) decreased significantly with the increase of the incidence angle above 45° , measured from the surface normal. TEM, AFM, and XPS results indicate that the smoothest and thinnest a-C films with the highest content of sp 3 carbon bonding were produced for an incidence angle of 45°. The findings of this study have direct implications in ultrahigh-density magnetic recording, where ultrathin and smooth a-C films with high sp 3 contents are of critical importance. © 2012 IEEE.

  3. Co-sputter deposited nickel-copper bimetallic nanoalloy embedded carbon films for electrocatalytic biomarker detection

    Science.gov (United States)

    Shiba, Shunsuke; Kato, Dai; Kamata, Tomoyuki; Niwa, Osamu

    2016-06-01

    -mannitol, which should be detected with a low detection limit in urine samples for the diagnosis of severe intestinal diseases. With a Ni/Cu ratio of around 64/36, the electrocatalytic current per metal area was 3.4 times larger than that of an alloy film electrode with a similar composition (~70/30). This improved electrocatalytic activity realized higher stability (n = 60, relative standard deviation (RSD): 4.6%) than the alloy film (RSD: 32.2%) as demonstrated by continuous measurements of d-mannitol. Electronic supplementary information (ESI) available: The concept of UBM co-sputtering for fabricating nanoalloy embedded carbon films. HRTEM images of the NiNP and Ni32Cu68 nanoalloy embedded carbon films. The experimental conditions for sputter deposition, HRTEM, HAADF-STEM, STEM-EDS measurements and continuous flow injection analysis. XPS analysis of the nanoalloy embedded carbon film. Repeated CVs of both the nanoalloy embedded carbon film and the alloy film. Amperometric detection of d-mannitol in the presence of chloride ions. See DOI: 10.1039/c6nr02287a

  4. Synthesis of Ag-doped hydrogenated carbon thin films by a hybrid PVD–PECVD deposition process

    Indian Academy of Sciences (India)

    Majji Venkatesh; Sukru Taktak; Efstathios I Meletis

    2014-12-01

    Silver-doped hydrogenated amorphous carbon (Ag-DLC) films were deposited on Si substrates using a hybrid plasma vapour deposition–plasma enhanced chemical vapour deposition (PVD–PECVD) process combining Ag target magnetron sputtering and PECVD in an Ar–CH4 plasma. Processing parameters (working pressure, CH4/Ar ratio and magnetron current) were varied to obtain good deposition rate and a wide variety of Ag films. Structure and bonding environment of the films were obtained from transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS) and Fourier transform infrared (FTIR) spectroscopy studies. Variation of processing parameters was found to produce Ag-doped amorphous carbon or diamond-like carbon (DLC) films with a range of characteristics with CH4/Ar ratio exercising a dominant effect. It was pointed out that Ag concentration and deposition rate of the film increased with the increase in d.c. magnetron current. At higher Ar concentration in plasma, Ag content increased whereas deposition rate of the film decreased. FTIR study showed that the films contained a significant amount of hydrogen and, as a result of an increase in the Ag content in the hydrogenated DLC film, $sp^{2}$ bond content also increased. The TEM cross sectional studies revealed that crystalline Ag particles were formed with a size in the range of 2–4 nm throughout an amorphous DLC matrix.

  5. Deposition and characterization of carbon nanotubes (CNTS) based films for sensing applications

    Science.gov (United States)

    Dissanayake, Amila C.

    The advent of carbon nanotubes (CNTs) has opened up lot of novel applications because of their unique electrical and mechanical properties. CNTs are well known material for its exceptional electrical, mechanical, optical, thermal and chemical properties. A single-wall nanotube (SWNT) can be either semiconducting, metallic or semi-metallic, based on its chirality and diameter. SWNTs can be used in transistor device as active channels due to high electron mobility (~10000 cm2/(V s), electrical interconnects, nano-scale circuits, field-emission displays, light-emitting devices and thermal heat sinks due to low resistivity, high current density (~109A cm-2 ) and high thermal conductivity (~3500 W m-1). Further, their high Young's modulus and fracture stress is suitable for various sensing applications such as strain/pressure and use in chemical/biological sensors. This work mainly involves the deposition of CNT-based films following two different methods via a conventional microwave chemical vapor deposition (MWCVD) and spinning CNT-composites, and explored the possibility of using CNT-based films in strain gauge applications. Deposited films are characterized and analyzed for their structure, microstructure, composition and electrical properties. Rutherford Backscattering Spectrometry (RBS), X-ray Reflectivity (XRR), Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Atomic Force Microscopy (AFM) and electrical impedance measurement techniques are used to characterize the films prepared by both the above mentioned methods. The synthesis/deposition process is improved based on the observed films properties. A carbon nanotube forest grown on the Si (100) substrate with Ni as a catalyst using CVD system shows an amorphous nature due to loss of catalytic activity of Ni nano-islands. XPS and RBS data show Ni nano-particles diffused into the Si substrate and surface layer of Ni particles turns out to nickel silicide. The

  6. Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition

    International Nuclear Information System (INIS)

    Amorphous hydrogenated carbon (a-C:H) films have been deposited on polyethylene terephthalate by plasma immersion ion implantation and deposition. The influence of deposition parameters such as gas pressure, bias voltage, and nitrogen incorporation on the mechanical properties of the a-C:H films are investigated. X-ray photoelectron spectroscopy reveals that the ratio of sp3 to sp2 is 0.24 indicating that the film is mainly composed of graphitelike carbon. Nanoindentation tests disclose enhanced surface hardness of ∼6 GPa. The friction coefficient of the film deposited at higher gas pressure, for instance, 2.0 Pa, is lower than that of the film deposited at a lower pressure such as 0.5 Pa. The films deposited using a low bias voltage tend to fail easily in the friction tests and nitrogen incorporation into the a-C:H films decreases the friction coefficient. Mechanical folding tests show that deformation failure is worse on a thinner a-C:H film

  7. Fabrication of ZnO nanoparticles-embedded hydrogenated diamond-like carbon films by electrochemical deposition technique

    Institute of Scientific and Technical Information of China (English)

    Zhang Pei-Zeng; Li Rui-Shan; Pan Xiao-Jun; Xie Er-Qing

    2013-01-01

    ZnO nanoparticles-embedded hydrogenated diamond-like carbon (ZnO-DLC) films have been prepared by electrochemical deposition in ambient conditions.The morphology,composition,and microstructure of the films have been investigated.The results show that the resultant films are hydrogenated diamond-like carbon films embedded with ZnO nanoparticles in wurtzite structure,and the content and size of the ZnO nanoparticles increase with increasing deposition voltage,which are confirmed by X-ray photoelectron spectroscopy (XPS),Raman,and transmission electron microscope (TEM).Furthermore,a possible mechanism used to describe the growth process of ZnO-DLC films by electrochemical deposition is also discussed.

  8. Characterization of amorphous hydrogenated carbon films deposited by MFPUMST at different ratios of mixed gases

    Indian Academy of Sciences (India)

    Haiyang Dai; Changyong Zhan; Hui Jiang; Ningkang Huang

    2012-12-01

    Amorphous hydrogenated carbon films (-C:H) on -type (100) silicon wafers were prepared with a middle frequency pulsed unbalanced magnetron sputtering technique (MFPUMST) at different ratios of methane–argon gases. The band characteristics, mechanical properties as well as refractive index were measured by Raman spectra, X-ray photoelectron spectroscopy (XPS), nano-indentation tests and spectroscopic ellipsometry. It is found that the 3 fraction increases with increasing Ar concentration in the range of 17–50%, and then decreases when Ar concentration exceeds 50%. The nano-indentation tests reveal that nano-hardness and elastic modulus of the films increase with increasing Ar concentration in the range of 17–50%, while decreases with increasing Ar concentration from 50% to 86%. The variations in the nano-hardness and the elastic modulus could be interpreted due to different 3 fractions in the prepared -C:H films. The variation of refractive index with wavelength have the same tendency for the -C:H films prepared at different Ar concentrations, they decrease with increasing wavelength from 600 to 1700 nm. For certain wavelengths within 600–1700 nm, refractive index has the highest value at the Ar concentration of 50%, and it is smaller at the Ar concentration of 86% than at 17%. The results given above indicate that ratio of mixed gases has a strong influence on bonding configuration and properties of -C:H films during deposition. The related mechanism is discussed in this paper.

  9. Deposition of calcium carbonate films by a polymer-induced liquid-precursor (PILP) process

    Science.gov (United States)

    Gower, Laurie B.; Odom, Damian J.

    2000-03-01

    A polypeptide additive has been used to transform the solution crystallization of calcium carbonate to a solidification process of a liquid-phase mineral precursor. In situ observations reveal that polyaspartate induces liquid-liquid phase separation of droplets of a mineral precursor. The droplets deposit on the substrate and coalesce to form a coating, which then solidifies into calcitic tablets and films. Transition bars form during the amorphous to crystalline transition, leading to sectorization of calcite tablets, and the defect textures and crystal morphologies are atypical of solution grown crystals. The formation of nonequilibrium crystal morphologies using an acidic polypeptide may have implications in the field of biomineralization, and the environmentally friendly aspects of this polymer-induced liquid-precursor (PILP) process may offer new techniques for aqueous-based processing of ceramic films, coatings, and particulates.

  10. Hard coating of ultrananocrystalline diamond/nonhydrogenated amorphous carbon composite films on cemented tungsten carbide by coaxial arc plasma deposition

    Science.gov (United States)

    Naragino, Hiroshi; Egiza, Mohamed; Tominaga, Aki; Murasawa, Koki; Gonda, Hidenobu; Sakurai, Masatoshi; Yoshitake, Tsuyoshi

    2016-08-01

    Ultrananocrystalline diamond (UNCD)/nonhydrogenated amorphous carbon (a-C) composite (UNCD/a-C) films were deposited on cemented carbide containing Co by coaxial arc plasma deposition. With decreasing substrate temperature, the hardness was enhanced accompanied by an enhancement in the sp3/(sp2 + sp3). Energy-dispersive X-ray and secondary ion mass spectrometry spectroscopic measurements exhibited that the diffusion of Co atoms from the substrates into the films hardly occurs. The film deposited at room temperature exhibited the maximum hardness of 51.3 GPa and Young's modulus of 520.2 GPa, which evidently indicates that graphitization induced by Co in the WC substrates, and thermal deformation from sp3 to sp2 bonding are suppressed. The hard UNCD/a-C films can be deposited at a thickness of approximately 3 μm, which is an order larger than that of comparably hard a-C films. The internal compressive stress of the 51.3-GPa film is 4.5 GPa, which is evidently smaller than that of comparably hard a-C films. This is a reason for the thick deposition. The presence of a large number of grain boundaries in the film, which is a structural specific to UNCD/a-C films, might play a role in releasing the internal stress of the films.

  11. Control of carbon content in amorphous GeTe films deposited by plasma enhanced chemical vapor deposition (PE-MOCVD) for phase-change random access memory applications

    International Nuclear Information System (INIS)

    Amorphous and smooth GeTe thin films are deposited on 200 mm silicon substrates by plasma enhanced—metal organic chemical vapor deposition (PE–MOCVD) using the commercial organometallic precursors TDMAGe and DIPTe as Ge and Te precursors, respectively. X-ray photoelectron spectroscopy (XPS) measurements show a stoichiometric composition of the deposited GeTe films but with high carbon contamination. Using information collected by Optical Emission Spectroscopy (OES) and XPS, the origin of carbon contamination is determined and the dissociation mechanisms of Ge and Te precursors in H2 + Ar plasma are proposed. As a result, carbon level is properly controlled by varying operating parameters such as plasma radio frequency power, pressure and H2 rate. Finally, GeTe films with carbon level as low as 5 at. % are obtained. (paper)

  12. Deposition of Diamond-Like carbon Films by High-Intensity Pulsed Ion Beam Ablation at Various Substrate Temperatures

    Institute of Scientific and Technical Information of China (English)

    梅显秀; 刘振民; 马腾才; 董闯

    2003-01-01

    Diamond-like carbon (DLC) films have been deposited on to Si substrates at substrate temperatures from 25℃to 400 ℃ by a high-intensity pulsed-ion-beam (HIPIB) ablation deposition technique. The formation of DLC is confirmed by Raman spectroscopy. According to an x-ray photoelectron spectroscopy analysis, the concentration of spa carbon in the films is about 40% when the substrate temperature is below 300 ℃. With increasing substrate temperature from 25 ℃ to 400 ℃, the concentration of sp3 carbon decreases from 43% to 8%. In other words,sp3 carbon is graphitized into sp2 carbon when the substrate temperature is above 300 ℃. The results of xray diffraction and atomic force microscopy show that, with increasing the substrate temperature, the surface roughness and the friction coefficient increase, and the microhardness and the residual stress of the films decrease.

  13. Spray deposition of steam treated and functionalized single-walled and multi-walled carbon nanotube films for supercapacitors

    International Nuclear Information System (INIS)

    Steam purified, carboxylic and ester functionalized single-walled carbon nanotube (SWNT) and multi-walled carbon nanotube (MWNT) films with homogeneous distribution and flexible control of thickness and area were fabricated on polymeric and metallic substrates using a modified spray deposition technique. By employing a pre-sprayed polyelectrolyte, the adhesion of the carbon nanotube (CNT) films to the substrates was significantly enhanced by electrostatic interaction. Carboxylic and ester functionalization improved electrochemical performance when immersed in 0.1 M H2SO4 and the specific capacitance reached 155 and 77 F g-1 for carboxylic functionalized SWNT and MWNT films respectively. Compared with existing techniques such as hot pressing, vacuum filtration and dip coating, the ambient pressure spray deposition technique is suggested as particularly well suited for preparing CNT films at large scale for applications including providing electrodes for electrochemical supercapacitors and paper batteries.

  14. Defect effect on tribological behavior of diamond-like carbon films deposited with hydrogen diluted benzene gas in aqueous environment

    Science.gov (United States)

    Yi, Jin Woo; Park, Se Jun; Moon, Myoung-Woon; Lee, Kwang-Ryeol; Kim, Seock-Sam

    2009-05-01

    This study examined the friction and wear behavior of diamond-like carbon (DLC) films deposited from a radio frequency glow discharge using a hydrogen diluted benzene gas mixture. The DLC films were deposited on Si (1 0 0) and polished stainless steel substrates by radio frequency plasma-assisted chemical vapor deposition (r.f.-PACVD) at hydrogen to benzene ratios, or the hydrogen dilution ratio, ranging from 0 to 2.0. The wear test was carried out in both ambient and aqueous environments using a homemade ball-on-disk type wear rig. The stability of the DLC coating in an aqueous environment was improved by diluting the benzene precursor gas with hydrogen, suggesting that hydrogen dilution during the deposition of DLC films suppressed the initiation of defects in the film and improved the adhesion of the coating to the interface.

  15. Diamond-like carbon films synthesized on bearing steel surface by plasma immersion ion implantation and deposition

    Institute of Scientific and Technical Information of China (English)

    LIU Hong-xi; TANG Bao-yin; WANG Lang-ping; WANG Xiao-feng; YU Yong-hao; SUN Tao; HU Li-guo

    2004-01-01

    Diamond-like carbon (DLC) films were synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel surface. Influences of working gas pressure and pulse width of the bias voltage on properties of the thin film were investigated. The chemical compositions of the as-deposited films were characterized by Raman spectroscopy. The micro-hardness, friction and wear behavior, corrosion resistance of the samples were evaluated, respectively. Compared with uncoated substrates, micro-hardness results reveal that the maximum is increased by 88.7%. In addition, the friction coefficient decreases to about 0.1, and the corrosion resistance of treated coupons surface are improved significantly.

  16. Effect of nitrogen pressure on optical properties and microstructure of diamond-like carbon films grown by pulsed laser deposition

    Institute of Scientific and Technical Information of China (English)

    DING Xu-Li; LI Qing-Shan; KONG Xiang-he

    2009-01-01

    The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there are some globose particles on the films surface with the rise of nitrogen pressures. The microstructure of the films is characterized using Raman spectroscopy.

  17. Influence of thin film nickel pretreatment on catalytic thermal chemical vapor deposition of carbon nanofibers

    NARCIS (Netherlands)

    Tiggelaar, R.M.; Thakur, D.B.; Nair, H.; Lefferts, L.; Seshan, K.; Gardeniers, J.G.E.

    2013-01-01

    Nickel and other metal nanoparticles are known to be active as catalysts in the synthesis of carbon nanofibers. In this paper we investigate how dewetting and break-up of nickel thin films depends on film thickness, film–substrate interaction and pretreatment conditions. This is evaluated for films

  18. Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Yang, Meng [Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan); Ogawa, Shuichi, E-mail: ogasyu@tagen.tohoku.ac.jp [Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan); Takabayashi, Susumu; Otsuji, Taiichi [Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan); Core Research for Evolutionary Science and Technology, Japan Science and Technology Agency, K' s Gobancho Bldg., 7 Gobancho, Chiyoda-ku, Tokyo 102-0076 (Japan); Takakuwa, Yuji [Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan)

    2012-11-15

    Diamond-like carbon (DLC) films grown by photoemission-assisted plasma-enhanced chemical vapor deposition (PA-PECVD) have attracted attention as a gate insulator for graphene-channel field effect transistors (GFETs). In this study, the possibility of using PA-PECVD to grow insulating DLC films for GFETs is explored by focusing on the growth rate and uniformity of DLC films on Si substrates. Initially, the DLC films were formed at a constant rate but the growth rate decreased rapidly when the thickness reached approximately 400 nm. This is because of a decrease in photoelectron emissions from the Si substrates as they are covered by DLC films which absorb UV photons. However, the DLC films formed uniformly at thicknesses less than 16%. This result indicates that PA-PECVD is a promising method for growing DLC films as the gate dielectric layer of GFETs.

  19. Structural and mechanical properties of amorphous carbon films deposited by the dual plasma technique

    Institute of Scientific and Technical Information of China (English)

    Yaohui Wang; Xu Zhang; Xianying Wu; Huixing Zhang; Xiaoji Zhang

    2008-01-01

    Direct current metal filtered cathodic vacuum are (FCVA) and acetylene gas (C2H2) were wielded to synthesize Ti-containing amorphous carbon films on Si (100). The influence of substrate bias voltage and acetylene gas on the microstructure and mechanical properties of the films were investigated. The results show that the phase of TiC in the (111) preferential crystallo-graphic orientation exists in the film, and rite main existing pattern of carbon is sp2. With increasing the acetylene flow rate, the con-tents of Ti and TiC phase of the film gradually reduce; however, the thickness of the film increases. When the substrate bias voltage reaches -600 V, the internal stress of the film reaches 1.6 GPa. The micro-hardness and elastic modulus of the film can reach 33.9 and 237.6 GPa, respectively, and the friction coefficient of the film is 0.25.

  20. Investigation on single walled carbon nanotube thin films deposited by Langmuir Blodgett method

    Energy Technology Data Exchange (ETDEWEB)

    Vishalli,, E-mail: vishalli-2008@yahoo.com; Dharamvir, Keya [Department of Physics, Panjab University, Chandigarh (India); Kaur, Ramneek; Raina, K. K. [Materials Research Laboratory, School of Physics and Materials Science, Thapar University, Patiala (India)

    2015-05-15

    Langmuir Blodgett is a technique to deposit a homogeneous film with a fine control over thickness and molecular organization. Thin films of functionalized SWCNTs have been prepared by Langmuir Blodgett method. The good surface spreading properties of SWCNTs at air/water interface are indicated by surface pressure-area isotherm and the monolayer formed on water surface is transferred onto the quartz substrate by vertical dipping. A multilayer film is thus obtained in a layer by layer manner. The film is characterized by Atomic Force Microscope (AFM), UV-Vis-NIR spectroscopy and FTIR.AFM shows the surface morphology of the deposited film. UV-Vis-NIR spectroscopy shows the characteristic peaks of semiconducting SWCNTs. The uniformity of LB film can be used further in understanding the optical and electrical behavior of these materials.

  1. The effect of substrate bias on titanium carbide/amorphous carbon nanocomposite films deposited by filtered cathodic vacuum arc

    International Nuclear Information System (INIS)

    The titanium carbide/amorphous carbon nanocomposite films have been deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology, the effects of substrate bias on composition, structures and mechanical properties of the films are studied by scanning electron spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy and nano-indentation. The results show that the Ti content, deposition rate and hardness at first increase and then decrease with increasing the substrate bias. Maximum hardness of the titanium carbide/amorphous carbon nanocomposite film is 51 Gpa prepared at −400 V. The hardness enhancement may be attributed to the compressive stress and the fraction of crystalline TiC phase due to ion bombardment

  2. Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

    Institute of Scientific and Technical Information of China (English)

    CAO Zhangyi; SUN Zhuo; GUO Pingsheng; CHEN Yiwei

    2007-01-01

    Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM),a transmission electron microscope (TEM) and a Raman spectrometer,respectively.The effect of acetylene flow rate on the morphology and structure of CNT films was investigated.By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter perminute),the yield and the diameter of CNTs increase.Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate.

  3. Physical properties of ultrafast deposited micro- and nanothickness amorphous hydrogenated carbon films for medical devices and prostheses.

    Science.gov (United States)

    Zaharia, T; Sullivan, I L; Saied, S O; Bosch, R C; Bijker, M D

    2007-02-01

    Hydrogenated amorphous carbon films with diamond-like structures have been formed on different substrates at very low energies and temperatures by a plasma-enhanced chemical vapour deposition (PECVD) process employing acetylene as the precursor gas. The plasma source was of a cascaded arc type with argon as the carrier gas. The films grown at very high deposition rates were found to have a practical thickness limit of approximately 1.5 microm, above which delamination from the substrate occurred. Deposition on silicon (100), glass, and plastic substrates has been studied and the films characterized in terms of sp3 content, roughness, hardness, adhesion, and optical properties. Deposition rates of up to 20 nm/s have been achieved at substrate temperatures below 100 degrees C. A typical sp3 content of 60-75 per cent in the films was determined by X-ray-generated Auger electron spectroscopy (XAES). The hardness, reduced modulus, and adhesion of the films were measured using a MicroMaterials NanoTest indenter/scratch tester. Hardness was found to vary from 4 to 13 GPa depending on the admixed acetylene flow and substrate temperature. The adhesion of the film to the substrate was significantly influenced by the substrate temperature and whether an in situ d.c. cleaning was employed prior to the deposition process. The hydrogen content in the film was measured by a combination of the Fourier transformation infrared (FTIR) spectroscopy and Rutherford backscattering (RBS) techniques. From the results it is concluded that the films formed by the process described here are ideal for the coating of long-term implantable medical devices, such as prostheses, stents, invasive probes, catheters, biosensors, etc. The properties reported in this publication are comparable with good-quality films deposited by other PECVD methods. The advantages of these films are the low ion energy and temperature of deposition, ensuring that no damage is done to sensitive substrates, very high

  4. Thermal effects on structure and photoluminescence properties of diamond-like carbon films prepared by pulsed laser deposition

    Institute of Scientific and Technical Information of China (English)

    CHEN Da; LI Qing-shan; WANG Jing-jing; ZHENG Xue-gang

    2006-01-01

    Un-hydrogenated Diamond-like Carbon (DLC) films were prepared by pulsed laser deposition technique at different substrate temperature.The Raman spectra,the absorption and the photoluminescence spectra were measured.The dependence of structure and photoluminescence properties on deposition temperature were studied in detail.The experimental results indicate that the sp2 sites form small clusters that consist of both olefinic chains and aromatic ring groups within the sp3 matrix.With raising deposition temperature,the optical band gaps increase from 1.87 to 2.85 eV.The main band of photoluminescence centered at around 700nm shifts to short wavelength,and the intensity of this band increases.The photoluminescence can be attributed to carrier localization within an increasing sp2 clusters.It was clarified that the DLC films are ordered with increasing deposition temperature.

  5. Uniform deposition of ternary chalcogenide nanoparticles onto mesoporous TiO2 film using liquid carbon dioxide-based coating

    International Nuclear Information System (INIS)

    We report the simultaneous deposition of two different metal precursors dissolved in liquid carbon dioxide (l-CO2), aiming to the synthesis of ternary chalcopyrite (e.g. CuInS2) nanoparticles on a mesoporous TiO2 film. The l-CO2-based deposition of Cu and In precursors and subsequent reaction with a dilute H2S gas resulted in CuxInySz nanoparticles uniformly deposited across the entire thickness of a mesoporous TiO2 film. Further heat treatment (air annealing and sulfurization) led to the formation of more stoichiometric CuInS2 nanoparticles. The formation of CuInS2 on TiO2 was confirmed by scanning electron microscopy, high resolution transmission electron microscopy, X-ray diffraction, and Raman spectroscopy. The crystal growth of CuInS2 was also found to be controllable by adjusting the number of coating cycles of the l-CO2-based deposition. - Highlights: • Simultaneous deposition of two different metal precursors dissolved in l-CO2. • Uniform deposition of CuInS2 nanoparticles across mesoporous TiO2 film. • Highly crystalline CuInS2 formed on mesoporous TiO2 film. • Nearly stoichiometric ratio of Cu:In:S was obtained

  6. Hydrogenated amorphous carbon-nitride films deposited on Si(100) by direct-current saddle-field plasma-enhanced chemical-vapor deposition

    CERN Document Server

    Jang, H K; Lee, Y S; Whangbo, S W; Whang, C N; Yoo, Y Z; Kim, H G

    1999-01-01

    Hydrogenated amorphous carbon nitride [a-C:H(N)] films were deposited using dc saddle-field plasma-enhanced chemical-vapor deposition. The structural and the compositional changes induced in the films by the different flow-rate ratios of N sub 2 to CH sub 4 (n sub N sub 2 /n sub C sub H sub sub 4) were investigated using Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The deposition rate of the films abruptly decreased upon increasing the n sub N sub 2 /n sub C sub H sub sub 4 ratio. However, for n sub N sub 2 /n sub C sub H sub sub 4 >0.5, the deposition rate slightly decreased with increasing n sub N sub 2 /n sub C sub H sub sub 4. The ratio of N to C (N/C) of the films saturated to 0.25 with increasing n sub N sub 2 /n sub C sub H sub sub 4. The numbers of N-H and C ident to N bonds in the films increased with increasing n sub N sub 2 /n sub C sub H sub sub 4 , but the number of C-H bonds decreased. The optical band-gap energy of the films decreased from 2.53 eV to 2.3 eV as t...

  7. Effect of substrate bias in nitrogen incorporated amorphous carbon films with embedded nanoparticles deposited by filtered cathodic jet carbon arc technique

    Energy Technology Data Exchange (ETDEWEB)

    Panwar, O.S., E-mail: ospanwar@mail.nplindia.ernet.in [Amorphous and Microcrystalline Silicon Solar Cell Group, Physics of Energy Harvesting Division, National Physical Laboratory (C.S.I.R.), Dr. K.S. Krishnan Road, New Delhi-110012 (India); Kumar, Sushil; Ishpal,; Srivastava, A.K.; Chouksey, Abhilasha; Tripathi, R.K.; Basu, A. [Amorphous and Microcrystalline Silicon Solar Cell Group, Physics of Energy Harvesting Division, National Physical Laboratory (C.S.I.R.), Dr. K.S. Krishnan Road, New Delhi-110012 (India)

    2012-02-15

    Highlights: Black-Right-Pointing-Pointer a-C: N films having nanoparticles were deposited by filtered cathodic jet carbon arc (FCJCA) technique. Black-Right-Pointing-Pointer The effect of negative substrate bias on the properties of a-C: N films embedded with nanoparticles have been studied. Black-Right-Pointing-Pointer The properties of a-C: N films deposited by FCJCA technique have been compared with ta-C: N films deposited by FCVA process. - Abstract: The properties of nitrogen incorporated amorphous carbon (a-C: N) films with embedded nanoparticles, deposited using a filtered cathodic jet carbon arc technique, are reported. X-ray diffraction, high resolution transmission electron microscope and Raman spectroscopy measurements reveal an amorphous structure, but on closer examination the presence of clusters of nanocarbon single crystals with d-spacing close to diamond cubic-phase have also been identified. The effect of substrate bias on the microstructure, conductivity, activation energy, optical band gap, optical constants, residual stress, hardness, elastic modulus, plastic index parameter, percentage elastic recovery and density of states of a-C: N films have been studied and the properties obtained are found to depend on the substrate bias.

  8. Amorphous silicon carbon films prepared by hybrid plasma enhanced chemical vapor/sputtering deposition system: Effects of r.f. power

    Energy Technology Data Exchange (ETDEWEB)

    Rashid, Nur Maisarah Abdul, E-mail: nurmaisarahrashid@gmail.com [Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur (Malaysia); Ritikos, Richard; Othman, Maisara; Khanis, Noor Hamizah; Gani, Siti Meriam Ab. [Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur (Malaysia); Muhamad, Muhamad Rasat [Chancellery Office, Multimedia University, Jalan Multimedia, 63100 Cyberjaya, Selangor (Malaysia); Rahman, Saadah Abdul, E-mail: saadah@um.edu.my [Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur (Malaysia); Chancellery Office, Multimedia University, Jalan Multimedia, 63100 Cyberjaya, Selangor (Malaysia)

    2013-02-01

    Silicon carbon films were deposited using a hybrid radio frequency (r.f.) plasma enhanced chemical vapor deposition (PECVD)/sputtering deposition system at different r.f. powers. This deposition system combines the advantages of r.f. PECVD and sputtering techniques for the deposition of silicon carbon films with the added advantage of eliminating the use of highly toxic silane gas in the deposition process. Silicon (Si) atoms were sputtered from a pure amorphous silicon (a-Si) target by argon (Ar) ions and carbon (C) atoms were incorporated into the film from C based growth radicals generated through the discharge of methane (CH{sub 4}) gas. The effects of r.f. powers of 60, 80, 100, 120 and 150 W applied during the deposition process on the structural and optical properties of the films were investigated. Raman spectroscopic studies showed that the silicon carbon films contain amorphous silicon carbide (SiC) and amorphous carbon (a-C) phases. The r.f. power showed significant influence on the C incorporation in the film structure. The a-C phases became more ordered in films with high C incorporation in the film structure. These films also produced high photoluminescence emission intensity at around 600 nm wavelength as a result of quantum confinement effects from the presence of sp{sup 2} C clusters embedded in the a-SiC and a-C phases in the films. - Highlights: ► Effects of radio frequency (r.f.) power on silicon carbon (SiC) films were studied. ► Hybrid plasma enhanced chemical vapor deposition/sputtering technique was used. ► r.f. power influences C incorporation in the film structure. ► High C incorporation results in higher ordering of the amorphous C phase. ► These films produced high photoluminescence emission intensity.

  9. Preparation of diamond-like carbon and boron nitirde films by high-intensity pulsed ion beam deposition

    Energy Technology Data Exchange (ETDEWEB)

    Rej, D.J.; Davis, H.A. [Los Alamos National Lab., NM (United States); Remnev, G.E. [Tomsk Polytechnic Univ., Tomsk (Russian Federation). Nuclear Physics Institute.] [and others

    1995-05-01

    Intense ion beams (300-keV C{sup +}, O{sup +}, and H{sup +}, 20--30 kA, 50 to 400-ns pulsewidth, up to 0.3-Hz repetition rate) were used to prepare diamond-like carbon (DLC) and boron nitride (BN) films. Deposition rates of up to 25{plus_minus}5 nm/pulse were obtained with instantaneous rates exceeding 1 mm/s. Most films were uniform, light brown, translucent, and nonporous with some micron-size particulates. Raman and parallel electron energy loss spectroscopy indicated the presence of DLC. The films possessed favorable electron field-emission characteristics desirable for cold-cathode displays. Transmission electron microscopy (TEM) and transmission electron diffraction (TED) revealed that the C films contained diamond crystals with 25 to 125-nm grain size. BN films were composed of hexagonal, cubic and wurtzite phases.

  10. Studies of diamond-like carbon (DLC) films deposited on stainless steel substrate with Si/SiC intermediate layers

    Institute of Scientific and Technical Information of China (English)

    Wang Jing; Liu Gui-Chang; Wang Li-Da; Deng Xin-Lü; Xu Jun

    2008-01-01

    In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition (MW-ECRPECVD) techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy (AFM). With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio ID/IG increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and thesp3-bond carbon density reducing, resulted in the peak values of hardness (H) and elastic modulus (E). Silicon addition promoted the formation of sp3 bonding and reduced the hardness. The incorporated Si atoms substituted sp2- bond carbon atoms in ring structures, which promoted the formation of sp3-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.

  11. Very high temperature chemical vapor deposition of new carbon thin films using organic semiconductor molecular beam sources

    Energy Technology Data Exchange (ETDEWEB)

    Noguchi, Takuya [Department of Chemistry, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033 (Japan); Shimada, Toshihiro, E-mail: shimada@chem.s.u-tokyo.ac.j [Department of Chemistry, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033 (Japan); Hanzawa, Akinori; Hasegawa, Tetsuya [Department of Chemistry, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033 (Japan)

    2009-11-30

    We carried out the preparation and characterization of new carbon films deposited using an organic molecular beam deposition apparatus with very high substrate temperature (from room temperature to 2670 K), which we newly developed. When we irradiated molecular beam of organic semiconductor perylene tetracarboxylic acid dianhydride (PTCDA) on Y{sub 0.07}Zr{sub 0.93}O{sub 2} (111) at 2170 K, a new carbon material was formed via decomposition and fusing of the molecules. The films were characterized with an atomic force microscope (AFM), Raman spectroscopy, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Zirconium carbide (ZrC) films were identified beneath the topmost carbon layer by XRD and XPS analyses, which results from chemical reactions of the substrate and the molecules. Partially graphitized aromatic rings of PTCDA were observed from Raman spectroscopy. The present technique - very high temperature chemical vapor deposition using organic semiconductor sources - will be useful to study a vast unexplored field of covalent carbon solids.

  12. Deposition and field-emission characterization of electrically conductive nitrogen-doped diamond-like amorphous carbon films

    International Nuclear Information System (INIS)

    For the fabrication of high performance field emitters, diamond-like amorphous carbon films doped with nitrogen (DAC:N) were formed using an intermittent supermagnetron plasma chemical vapor deposition technique. DAC:N films were deposited using isobutane plasma to investigate the influence of discharge-off time and electrode spacing on the physical properties of the films at upper- and lower-electrode radio frequency (rf) powers (LORF) of 800 W/50-800 W. At LORF of 100 W, a discharge-on time of 1 min, and a discharge-off time (cooling time) of 30 s-10 min, resistivity was decreased with a decrease of the cooling time. By reducing the electrode spacing from 60 to 20 mm at a LORF of 50 and 800 W, the optical band gap of DAC:N film was decreased from 0.85 and 0.23 eV to 0.6 and 0 eV, respectively. A flat DAC:N film of 700 A thickness was deposited on a n-Si wafer at rf powers of 800 W/800 W. Using this flat DAC:N film, a threshold electric field of 18 V/μm was observed and maximum field-emission current density of 2.2 mA/cm2 was observed at the electric field of 32 V/μm

  13. Immobilization of carbon nanotubes on functionalized graphene film grown by chemical vapor deposition and characterization of the hybrid material

    International Nuclear Information System (INIS)

    We report the surface functionalization of graphene films grown by chemical vapor deposition and fabrication of a hybrid material combining multi-walled carbon nanotubes and graphene (CNT–G). Amine-terminated self-assembled monolayers were prepared on graphene by the UV-modification of oxidized groups introduced onto the film surface. Amine-termination led to effective interaction with functionalized CNTs to assemble a CNT–G hybrid through covalent bonding. Characterization clearly showed no defects of the graphene film after the immobilization reaction with CNT. In addition, the hybrid graphene material revealed a distinctive CNT–G structure and p–n type electrical properties. The introduction of functional groups on the graphene film surface and fabrication of CNT–G hybrids with the present technique could provide an efficient, novel route to device fabrication. (paper)

  14. Gas barrier properties of hydrogenated amorphous carbon films coated on polymers by surface-wave plasma chemical vapor deposition

    International Nuclear Information System (INIS)

    Gas barrier characteristics of hydrogenated amorphous carbon (a-C:H) thin films coated on polymer sheets using the large-area surface-wave plasma (SWP) were studied. With SWP in He and CH4 gas mixture, a-C:H films were deposited over about 100 mm in diameter on high density polyethylene or polyethylene terephthalate (PET) sheets at temperature less than 70 deg. C. Experimental results show that gas permeation in the case of a-C:H film coating on PET sheet was reduced by a factor of more than 150 (0.27 cm3/m2 day atm), compared with that before coating. Plasma characteristics of SWP, such as electron density and electron energy distribution functions, and other film characteristics measured with Fourier-transform infrared spectroscopy, X-ray photoelectron spectroscopy and atomic force microscope are presented and discussed

  15. Enhanced field emission characteristics of nitrogen-doped carbon nanotube films grown by microwave plasma enhanced chemical vapor deposition process

    International Nuclear Information System (INIS)

    Nitrogen-doped carbon nanotube (CNT) films have been synthesized by simple microwave plasma enhanced chemical vapor deposition technique. The morphology and structures were investigated by scanning electron microscopy and high resolution transmission electron microscopy. Morphology of the films was found to be greatly affected by the nature of the substrates. Vertically aligned CNTs were observed on mirror polished Si substrates. On the other hand, randomly oriented flower like morphology of CNTs was found on mechanically polished ones. All the CNTs were found to have bamboo structure with very sharp tips. These films showed very good field emission characteristics with threshold field in the range of 2.65-3.55 V/μm. CNT film with flower like morphology showed lower threshold field as compared to vertically aligned structures. Open graphite edges on the side surface of the bamboo-shaped CNT are suggested to enhance the field emission characteristics which may act as additional emission sites

  16. Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing

    CERN Document Server

    He, X M; Peters, A M; Taylor, B; Nastasi, M

    2002-01-01

    Fluorine (F) and boron (B) co-doped diamond-like carbon (FB-DLC) films were prepared on different substrates by the plasma immersion ion processing (PIIP) technique. A pulse glow discharge plasma was used for the PIIP deposition and was produced at a pressure of 1.33 Pa from acetylene (C sub 2 H sub 2), diborane (B sub 2 H sub 6), and hexafluoroethane (C sub 2 F sub 6) gas. Films of FB-DLC were deposited with different chemical compositions by varying the flow ratios of the C sub 2 H sub 2 , B sub 2 H sub 6 , and C sub 2 F sub 6 source gases. The incorporation of B sub 2 H sub 6 and C sub 2 F sub 6 into PIIP deposited DLC resulted in the formation of F-C and B-C hybridized bonding structures. The levels of the F and B concentrations effected the chemical bonding and the physical properties as was evident from the changes observed in density, hardness, stress, friction coefficient, and contact angle of water on films. Compared to B-doped or F-doped DLC films, the F and B co-doping of DLC during PIIP deposition...

  17. CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES: Field Emission Properties of Ball-Like Nano-Carbon Thin Films Deposited on Mo Films with Accidented Topography

    Science.gov (United States)

    Wang, Long-Yang; Wang, Xiao-Ping; Wang, Li-Jun; Zhang, Lei

    2008-11-01

    Ball-like nano-carhon thin films (BNCTs) are grown on Mo layers by microwave plasma chemical vapour deposition (MPCVD) system. The Mo layers are deposited on ceramic substrates by electron beam deposition method and are pretreated by ultrasonically scratching. The optimization effects of ultrasonically scratching pretreat-ment on the surface micro-structures of carbon films are studied. It is found from field-emission scanning electron microscope (FE-SEM) images and Raman spectra that the surface structures of the carbon films deposited on Mo pretreated are improved, which are composed of highly uniform nano-structured carbon balls with considerable disorder structures. Field emission (FE) measurements are carried out using a diode structure. The experimental results indicate that the BNCTs exhibit good FE properties, which have the turn on field of 1.56 V/μm, and the current density of 1.0mA/cm2 at electric field of 4.0 V/μm, the uniformly distributed emission site density from a broad well-proportioned emission area of 4 cm2 are also obtained. Linearity is observed in Fowler-Nordheim (F-N) plots in higher Geld region, and the possible emission mechanism of BNCTs is discussed.

  18. Study on pulsed excimer laser deposited films

    CERN Document Server

    Liu Jing Ru; Li Tie Jun; Yao Dong Sheng; Wang Li Ge; Yuan Xiao; Wang Sheng; Ye Xi Sheng

    2002-01-01

    Pulsed lasers of two different durations (30 ns, 500 fs) are used to deposit Hydrogen-free Diamond Like Carbon (DLC) films over large areas. Analysis of DLC films shows remarkable mechanical, optical, electrical, and chemical properties that are close to those of diamond. By optical emission spectroscopy and ion probe, the effects of plasma characteristic on DLC film are on experimentally studied. Amorphous silicon films deposited by PLD are also experimentally studied

  19. Effect of acetic acid on electrochemical deposition of carbon-nitride thin film

    Institute of Scientific and Technical Information of China (English)

    2009-01-01

    Electrochemical deposition method was employed to prepare CNx thin film from methanol-urea solution,and it was shown that adding a little acetic acid in the solution significantly affected the deposition process.After optimizing the experiment conditions,we obtained polycrystalline grains with sizes of about 3―7μm on the faces of single crystal silicon.X-ray diffraction spectrua indicate that the grains are mainly composed of cubic phase mixed with a small amount of β and α phases.

  20. Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition

    Science.gov (United States)

    Wang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan

    2008-12-01

    Hydrogenated amorphous carbon films were prepared on Si (1 0 0) substrates by dc-pulse plasma chemical vapor deposition. The nature of the deposited films was characterized by Raman spectra and the stress relief patterns were observed by scanning electron microscope. Besides the well-known sinusoidal type and flower type patterns, etc., two different stress relief patterns, ring type and peg-top shape with exiguous tine on the top, were observed. The ring type in this paper was a clear ridge-cracked buckle and unusual. Two competing buckle delamination morphologies ring and sinusoidal buckling coexist. The ridge-cracked buckle in ring type was narrower than the sinusoidal buckling. Meanwhile peg-top shape with exiguous tine on the top in this paper was unusual. These different patterns supported the approach in which the stress relief forms have been analyzed using the theory of plate buckling.

  1. Biomimetic thin film deposition

    Energy Technology Data Exchange (ETDEWEB)

    Rieke, P.R.; Graff, G.E.; Campbell, A.A.; Bunker, B.C.; Baskaran, S.; Song, L.; Tarasevich, B.J.; Fryxell, G.E.

    1995-09-01

    Biological mineral deposition for the formation of bone, mollusk shell and other hard tissues provides materials scientists with illustrative materials processing strategies. This presentation will review the key features of biomineralization and how these features can be of technical importance. We have adapted existing knowledge of biomineralization to develop a unique method of depositing inorganic thin films and coating. Our approach to thin film deposition is to modify substrate surfaces to imitate the proteins found in nature that are responsible for controlling mineral deposition. These biomimetic surfaces control the nucleation and growth of the mineral from a supersaturated aqueous solution. This has many processing advantages including simple processing equipment, environmentally benign reagents, uniform coating of highly complex shapes, and enhanced adherence of coating. Many different types of metal oxide, hydroxide, sulfide and phosphate materials with useful mechanical, optical, electronic and biomedical properties can be deposited.

  2. Influence of Increasing Deposition Temperature on Electrical Properties of Amorphous Carbon Thin Film Prepared by Aerosol-Assisted Thermal CVD

    International Nuclear Information System (INIS)

    This paper reports on the successful deposition of p-type semiconducting amorphous carbon (paC) films fabricated onto the glass substrate by Aerosol-Assisted Thermal Chemical Vapor Deposition (CVD) using natural source of camphor oil as the precursor material. The analyze reveal that conductivity and resistivity shows some changes at different deposition temperature, that is the conductivity increase as temperature increase from 350 to 550 degree Celsius, but drop slightly at 550 degree Celsius. Other than that, optical and structural properties were also characterized by using UV-VIS-NIR system and Atomic Force Microscopy. The same trend of optical and electrical can be seen when the measurement from the Taucs plot expose a decreasing value of optical band gap as temperature increase, but slightly increase when temperature increase to 550 degree Celsius. (author)

  3. Friction and Wear Properties of Selected Solid Lubricating Films. Part 3; Magnetron-Sputtered and Plasma-Assisted, Chemical-Vapor-Deposited Diamondlike Carbon Films

    Science.gov (United States)

    Miyoshi, Kazuhisa; Iwaki, Masanori; Gotoh, Kenichi; Obara, Shingo; Imagawa, Kichiro

    2000-01-01

    To evaluate commercially developed dry solid film lubricants for aerospace bearing applications, an investigation was conducted to examine the friction and wear behavior of magnetron-sputtered diamondlike carbon (MS DLC) and plasma-assisted, chemical-vapor-deposited diamondlike carbon (PACVD DLC) films in sliding contact with 6-mm-diameter American Iron and Steel Institute (AISI) 440C stainless steel balls. Unidirectional sliding friction experiments were conducted with a load of 5.9 N (600 g), a mean Hertzian contact pressure of 0.79 GPa (maximum Hertzian contact pressure of L-2 GPa), and a sliding velocity of 0.2 m/s. The experiments were conducted at room temperature in three environments: ultrahigh vacuum (vacuum pressure, 7x10(exp -7) Pa), humid air (relative humidity, approx.20 percent), and dry nitrogen (relative humidity, films were characterized by scanning electron microscopy, energy-dispersive x-ray spectroscopy, and surface profilometry. Marked differences in the friction and wear of the DLC films investigated herein resulted from the environmental conditions. The main criteria for judging the performance of the DLC films were coefficient of friction and wear rate, which had to be less than 0.3 and on the order of 10(exp -6) cu mm/N-m or less, respectively. MS DLC films and PACVD DLC films met the criteria in humid air and dry nitrogen but failed in ultrahigh vacuum, where the coefficients of friction were greater than the criterion, 0.3. In sliding contact with 440C stainless steel balls in all three environments the PACVD DLC films exhibited better tribological performance (i.e., lower friction and wear) than the MS DLC films. All sliding involved adhesive transfer of wear materials: transfer of DLC wear debris to the counterpart 440C stainless steel and transfer of 440C stainless steel wear debris to the counterpart DLC film.

  4. Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition

    CERN Document Server

    Tsui, Y Y; Vick, D; Fedosejevs, R

    2002-01-01

    The effectiveness of debris reduction using magnetically guided pulsed laser deposition (MGPLD) is reported here. KrF laser pulses (248 nm) of 100 mJ energy were focused to intensities of 6x10 sup 9 W/cm sup 2 onto the surface of a copper or a carbon source target and a magnetic field of 0.3 T as used to steer the plasma around a curved arc of 0.5 m length to the deposition substrate. Debris counts were compared for films produced by the MGPLD and conventional PLD (nonguided) techniques. A significant reduction in particulates of size greater than 0.1 mu m was achieved using MGPLD. For the copper films, particulate count was reduced from 150 000 particles/cm sup 2 /nm to 50 particulates/cm sup 2 /nm and for diamond-like carbon thin films particulate count was reduced from 25 000 particles/cm sup 2 /nm to 1200 particles/cm sup 2 /nm.

  5. Electrochemical Behaviour of Sputtering Deposited DLC Films

    Institute of Scientific and Technical Information of China (English)

    LIU Erjia; ZENG A,LIU L X

    2003-01-01

    Diamondlike carbon (DLC) films were deposited via magnetron sputtering process. The energetic ion bombardment on the surface of growing film is one of the major parameters that control the atom mobility on the film surface and further the physical and chemical characteristics of the films. In this study, the energy of carbon ions was monitored by changing sputtering power density, and its effect on the electrochemical performance of the films was investigated. For the deposition at a higher sputtering power density, a higher sp3 content in the DLC films was achieved with denser structure and increased film-substrate adhesion. The impedance at the interface of Si substrate/sulfuric acid solution was significantly enhanced, and at the same time higher film resistance, lower capacitance, higher breakdown potential and longer breakdown time were observed, which were related to the significant sp3 content of the DLC films.

  6. Ion-implanted Mechanism of the Deposition Process for Diamond-Like Carbon Films

    Institute of Scientific and Technical Information of China (English)

    WANG Xue-Min; WU Wei-Dong; WANG Yu-Ying; WANG Hai-Ping; GE Fang-Fang; TANG Yong-Jian; JU Xin

    2011-01-01

    Due to the local densification, high-energy C and doped ions can greatly affect the bonding configurations of diamond-like carbon films. We investigate the corresponding affection of different incident ions with energy from WeV to 600eV by Monte Carlo methods. The ion-implanted mechanism called the subplantation (for C, N, O, W, Y, etc.) is confirmed. Obvious thermal effect could be induced by the subplantation of the incident ions. Further, the subplantation of C ions is proved by in situ reflection high energy electron diffraction (RHEED). The observation from an atomic force microscope (AFM) indicates that the initial implantation of C ions might result in the final primitive-cell-like morphology of the smooth film (in an area of 1.2 mm × 0.9 mm, rms roughness smaller than 20 nm by Wyko).

  7. Electrochemical Behaviour of Sputtering Deposited DLC Films

    Institute of Scientific and Technical Information of China (English)

    LIUErjia; ZENGA; LIULX

    2003-01-01

    Diamondlike carbon (DLC) films were deposited via magnetron sputtering process. The energetic ion hombardment on the surface of growing film is one of the major parameters that control the atom mobility on the flirt1 surface and further the physical and chemical characteristics of the films. In this study, the energy of carbon ions was monitored by changing sputtering powerdensity, and its effect on the electrochemical performance of the films was investigated. For the deposition at a higher sputtering power density, a higher sp3 content in the DLC films was achieved with denser structure and increased film-substrate adhesion. The impedance at the interface of Si substrate/sulfufic acid solution was significantly enhanced, and at the same time higher film resistance, lower capacitance, higher breakdown potential and longer breakdown time were observed, which were related to the significant sp3 content of the DLC films.

  8. Synthesis and characterization of thin films of nitrided amorphous carbon deposited by laser ablation; Sintesis y caracterizacion de peliculas delgadas de carbono amorfo nitrurado, depositadas por ablacion laser

    Energy Technology Data Exchange (ETDEWEB)

    Rebollo P, B

    2001-07-01

    The objective of this work is the synthesis and characterization of thin films of amorphous carbon (a-C) and thin films of nitrided amorphous carbon (a-C-N) using the laser ablation technique for their deposit. For this purpose, the physical properties of the obtained films were studied as function of diverse parameters of deposit such as: nitrogen pressure, power density, substrate temperature and substrate-target distance. For the characterization of the properties of the deposited thin films the following techniques were used: a) Raman spectroscopy which has demonstrated being a sensitive technique to the sp{sup 2} and sp{sup 3} bonds content, b) Energy Dispersive Spectroscopy which allows to know semi-quantitatively way the presence of the elements which make up the deposited films, c) Spectrophotometry, for obtaining the absorption spectra and subsequently the optical energy gap of the deposited material, d) Ellipsometry for determining the refraction index, e) Scanning Electron Microscopy for studying the surface morphology of thin films and, f) Profilemetry, which allows the determination the thickness of the deposited thin films. (Author)

  9. Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition

    Directory of Open Access Journals (Sweden)

    Kenji Hanada

    2009-01-01

    Full Text Available Optical emission spectroscopy was used to study pulsed laser ablation of graphite in a hydrogen atmosphere wherein ultrananocrystalline diamond (UNCD/hydrogenated amorphous carbon (a-C:H composite films were grown on heated substrates. Time-resolved photographs of a plume that expanded from a laser-irradiation spot toward a substrate were taken using a high-speed ICCD camera equipped with narrow-bandpass filters. While the emissions from C atoms and C2 dimers lasted above the laser-irradiation spot on the target, the emission from C+ ions lasted above the substrate surface for approximately 7 microseconds, although the emission lifetime of species is generally approximately 10 nanoseconds. This implies that C+ ions actively collided with each other above the substrate surface for such a long time. We believe that the keys to UNCD growth in PLD are the supply of highly energetic carbon species at a high density to the substrate and existence of atomic hydrogen during the growth.

  10. Thin Film Deposition of Conducting Polymers and Carbon Allotropes via Interfacial Solution Processing and Evaporative Vapor Phase Polymerization

    OpenAIRE

    D'Arcy, Julio Marcelo

    2012-01-01

    A new solution processing technique is developed for depositing continuously conductive transparent thin films comprised of conducting polymer nanostructures. The deposition mechanism is driven by interfacial surface tension gradients leading to rapid directional fluid flow known as the Marangoni effect. This technique is a universal solution to thin film deposition for coating any type of substrate at ambient conditions within seconds. The versatility of this method of deposition is further ...

  11. Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

    Science.gov (United States)

    Li, Jing; Gong, Chunzhi; Tian, Xiubo; Yang, Shiqin; Fu, Ricky K. Y.; Chu, Paul K.

    2009-01-01

    The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp 3/sp 2 value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a-C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating.

  12. Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

    International Nuclear Information System (INIS)

    The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp3/sp2 value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a-C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating.

  13. A low-temperature synthesis of electrochemical active Pt nanoparticles and thin films by atomic layer deposition on Si(111) and glassy carbon surfaces

    Energy Technology Data Exchange (ETDEWEB)

    Liu, Rui [Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, CA 91125 (United States); Han, Lihao [Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, CA 91125 (United States); Photovoltaic Materials and Devices (PVMD) Laboratory, Delft University of Technology, P.O. Box 5031, GA Delft 2600 (Netherlands); Huang, Zhuangqun; Ferrer, Ivonne M. [Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, CA 91125 (United States); Division of Chemistry and Chemical Engineering, California Institute of Technology, 210 Noyes Laboratory 127-72, Pasadena, CA 91125 (United States); Smets, Arno H.M.; Zeman, Miro [Photovoltaic Materials and Devices (PVMD) Laboratory, Delft University of Technology, P.O. Box 5031, GA Delft 2600 (Netherlands); Brunschwig, Bruce S., E-mail: bsb@caltech.edu [Beckman Institute, California Institute of Technology, Pasadena, CA 91125 (United States); Lewis, Nathan S., E-mail: nslewis@caltech.edu [Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, CA 91125 (United States); Beckman Institute, California Institute of Technology, Pasadena, CA 91125 (United States); Division of Chemistry and Chemical Engineering, California Institute of Technology, 210 Noyes Laboratory 127-72, Pasadena, CA 91125 (United States); Kavli Nanoscience Institute, California Institute of Technology, Pasadena, CA 91125 (United States)

    2015-07-01

    Atomic layer deposition (ALD) was used to deposit nanoparticles and thin films of Pt onto etched p-type Si(111) wafers and glassy carbon discs. Using precursors of MeCpPtMe{sub 3} and ozone and a temperature window of 200–300 °C, the growth rate was 80–110 pm/cycle. X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to analyze the composition, structure, morphology, and thickness of the ALD-grown Pt nanoparticle films. The catalytic activity of the ALD-grown Pt for the hydrogen evolution reaction was shown to be equivalent to that of e-beam evaporated Pt on glassy carbon electrode. - Highlights: • Pure Pt films were grown by atomic layer deposition (ALD) using MeCpPtMe3 and ozone. • ALD-grown Pt thin films had high growth rates of 110 pm/cycle. • ALD-grown Pt films were electrocatalytic for hydrogen evolution from water. • Electrocatalytic activity of the ALD Pt films was equivalent to e-beam deposited Pt. • No carbon species were detected in the ALD-grown Pt films.

  14. Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

    International Nuclear Information System (INIS)

    We have investigated the effects of the frequency of pulsed substrate bias on the structure and properties of Si-doped diamond-like carbon (Si-DLC) films deposited by radio-frequency plasma-enhanced chemical vapor deposition using CH4, Ar, and monomethylsilane (CH3SiH3) as the Si source. The Si/(Si + C) ratios in the Si-DLC films deposited using pulsed bias were higher than that of the dc-biased Si-DLC film, and the Si fraction increased with decreasing frequency. Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy analyses revealed that Si–C, Si–Hn, and C–Hn bonds in the Si-DLC films increased with decreasing frequency. The internal stress decreased as the frequency decreased, which is probably due to the increase in Si–C, Si–Hn, and C–Hn bonds in the films. It was found that the wear rate of the pulse-biased Si-DLC film deposited at the highest frequency in this study is comparable to that of the dc-biased, undoped DLC film. Furthermore, the friction coefficient of the former is about one third of that of the latter. - Highlights: • The tribological properties of Si-doped films were improved at higher frequencies. • The internal stress of Si-doped films was lowered at lower frequencies. • The adhesion of pulse-biased films was improved at lower frequencies

  15. A Novel Reactive Gas Source and Its Application to Carbon Nanotube Film Deposition

    Institute of Scientific and Technical Information of China (English)

    JIANG Nan; CHEN Han-Yuan; QIAN Sheng-Fa

    2005-01-01

    @@ Generally, gaseous discharge at pressure higher than 10 kPa will collapse to filamentary form or streamer, which will produce a non-uniform treatment on the sample surface. Thus, atmospheric pressure glow discharge (APGD) is developed. However the realization of the APGD is not obvious, it needs special conditions. We propose a new concept to solve the non-uniformity problem. By using a grid electrode and putting the sample downstream of the discharge plasma, the streamers, instead of striking on sample surface, will strike on the grid, and the neutral active species produced in the discharge diffuse out to reach the sample surface uniformly. Finally, a carbon nanotube (CNT) film was produced to test this new concept.

  16. Intermittent chemical vapor deposition of thick electrically conductive diamond-like amorphous carbon films using i-C4H10/N2 supermagnetron plasma

    International Nuclear Information System (INIS)

    Electrically conductive diamond-like amorphous carbon (DAC) films with nitrogen (DAC:N) were deposited on Si and SiO2 wafers using the i-C4H10/N2 supermagnetron plasma chemical vapor deposition (CVD) method. Resistivity and hardness decreased with increase of upper electrode rf power (UPRF) under constant lower electrode rf power (LORF). Film thickness increased linearly to over 0.3 μm with deposition time via intermittent deposition. The film exhibited good adhesion to the substrate. Low-resistance thick films were deposited using alternating multilayer CVD at UPRF/LORFs of 1 kW/1 kW and 300 W/300 W. In the deposited alternating multiple layers, resistivity significantly decreased with the increase of H layer (1 kW/1 kW) thickness, and film thickness significantly increased with the increase of L layer (300 W/300 W) thickness. By the deposition of H/L multiple layers, a film of 2.1 μm thickness and 0.14 Ω cm resistivity was obtained

  17. Deposit of thin films of nitrided amorphous carbon using the laser ablation technique; Deposito de peliculas delgadas de carbono amorfo nitrurado utilizando la tecnica de ablacion laser

    Energy Technology Data Exchange (ETDEWEB)

    Rebollo, P.B.; Escobar A, L.; Camps C, E. [Departamento de Fisica, Instituto Nacional de Investigaciones Nucleares, C.P. 52045 Salazar, Estado de Mexico (Mexico); Haro P, E.; Camacho L, M.A. [Departamento de Fisica, Universidad Autonoma Metropolitana Iztapalapa (Mexico); Muhl S, S. [Instituto de Investigacion en Materiales, UNAM (Mexico)

    2000-07-01

    It is reported the synthesis and characterization of thin films of amorphous carbon (a-C) nitrided, deposited by laser ablation in a nitrogen atmosphere at pressures which are from 4.5 x 10 {sup -4} Torr until 7.5 x 10 {sup -2} Torr. The structural properties of the films are studied by Raman spectroscopy obtaining similar spectra at the reported for carbon films type diamond. The study of behavior of the energy gap and the ratio nitrogen/carbon (N/C) in the films, shows that the energy gap is reduced when the nitrogen incorporation is increased. It is showed that the refraction index of the thin films diminish as nitrogen pressure is increased, indicating the formation of graphitic material. (Author)

  18. The effect of deposition energy of energetic atoms on the growth and structure of ultrathin amorphous carbon films studied by molecular dynamics simulations

    KAUST Repository

    Wang, N

    2014-05-16

    The growth and structure of ultrathin amorphous carbon films was investigated by molecular dynamics simulations. The second-generation reactive-empirical-bond-order potential was used to model atomic interactions. Films with different structures were simulated by varying the deposition energy of carbon atoms in the range of 1-120 eV. Intrinsic film characteristics (e.g. density and internal stress) were determined after the system reached equilibrium. Short- and intermediate-range carbon atom ordering is examined in the context of atomic hybridization and ring connectivity simulation results. It is shown that relatively high deposition energy (i.e., 80 eV) yields a multilayer film structure consisting of an intermixing layer, bulk film and surface layer, consistent with the classical subplantation model. The highest film density (3.3 g cm-3), sp3 fraction (∼43%), and intermediate-range carbon atom ordering correspond to a deposition energy of ∼80 eV, which is in good agreement with experimental findings. © 2014 IOP Publishing Ltd.

  19. Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

    International Nuclear Information System (INIS)

    We have investigated the influence of the duty ratio of pulsed substrate bias on the structure and properties of Si-doped diamond-like carbon (Si-DLC) films deposited by radio frequency plasma-enhanced chemical vapor deposition using CH4, Ar, and monomethylsilane (CH3SiH3) as the Si source. The Si/(Si + C) ratios in the Si-DLC films deposited using pulsed bias were higher than that of the dc-biased Si-DLC film, and the Si fraction increased with decreasing pulse duty ratio. Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy analyses revealed that Si-C, Si-Hn, and C-Hn bonds in the Si-DLC films increased with decreasing duty ratio. The internal stress decreased as the duty ratio decreased, which is probably due to the increase in Si-C, Si-Hn, and C-Hn bonds in the films. The Si-DLC films deposited using pulsed bias had higher adhesion strength than the dc-biased Si-DLC film because of the further reduction of internal stress. At higher duty ratios, although the Si fractions of the pulse-biased Si-DLC films were higher than that of the dc-biased Si-DLC film, the wear rates of the former were less than that of the latter. - Highlights: • The internal stress of Si-doped films was lowered at lower duty ratios. • The adhesion of pulse-biased films was improved compared with that of dc films. • The tribological properties of Si-doped films were improved by the use of pulse bias

  20. Influence of Fe-doped on structural, electronic structural and optical properties of hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition

    International Nuclear Information System (INIS)

    Fe-doped hydrogenated amorphous carbon (a-C:H:Fe) films were deposited from an isobutene/ferrocene/H2 gas mixture by plasma enhanced chemical metal organic vapor deposition. Raman spectra were used to characterize the bonding structure of the a-C:H:Fe films and hydrogenated amorphous carbon (a-C:H) films. Optical properties were investigated by the UV-vis spectroscopy and the photoluminescence spectra. The number of six-numbered rings of the a-C:H films increases and sp2 clustering of the films decreases after Fe-doping. The Tauc optical gap of the a-C:H:Fe films becomes narrower by 0.15-0.23 eV relative to the value of the a-C:H films. The narrowing of the optical gap after doping is attributed primarily to the extended state around the Fe deep level in the band gap and the narrowing of the π and π* band edge states because of the increase of the number of six-numbered rings in the a-C:H films. Fe deep level defects of the a-C:H:Fe films contribute chiefly to non-radiative recombination.

  1. The Role of Ambient Gas and Pressure on the Structuring of Hard Diamond-Like Carbon Films Synthesized by Pulsed Laser Deposition

    Directory of Open Access Journals (Sweden)

    Andrei C. Popescu

    2015-06-01

    Full Text Available Hard carbon thin films were synthesized on Si (100 and quartz substrates by the Pulsed Laser Deposition (PLD technique in vacuum or methane ambient to study their suitability for applications requiring high mechanical resistance. The deposited films’ surface morphology was investigated by scanning electron microscopy, crystalline status by X-ray diffraction, packing and density by X-ray reflectivity, chemical bonding by Raman and X-ray photoelectron spectroscopy, adherence by “pull-out” measurements and mechanical properties by nanoindentation tests. Films synthesized in vacuum were a-C DLC type, while films synthesized in methane were categorized as a-C:H. The majority of PLD films consisted of two layers: one low density layer towards the surface and a higher density layer in contact with the substrate. The deposition gas pressure played a crucial role on films thickness, component layers thickness ratio, structure and mechanical properties. The films were smooth, amorphous and composed of a mixture of sp3-sp2 carbon, with sp3 content ranging between 50% and 90%. The thickness and density of the two constituent layers of a film directly determined its mechanical properties.

  2. Improved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films

    NARCIS (Netherlands)

    Zaharia, T.; Kudlacek, P.; Creatore, M.; Groenen, R.; Persoone, P.; M. C. M. van de Sanden,

    2011-01-01

    Graphite-like hard hydrogenated amorphous carbon (a-C:H) was deposited using an Ar-C(2)H(2) expanding thermal plasma chemical vapour deposition (ETP-CVD) process. The relatively high hardness of the fast deposited a-C:H material leads to high compressive stress resulting in poor adhesion between the

  3. Pyrolyzed carbon film diodes.

    Science.gov (United States)

    Morton, Kirstin C; Tokuhisa, Hideo; Baker, Lane A

    2013-11-13

    We have previously reported pyrolyzed parylene C (PPC) as a conductive carbon electrode material for use with micropipets, atomic force microscopy probes, and planar electrodes. Advantages of carbon electrode fabrication from PPC include conformal coating of high-aspect ratio micro/nanoscale features and the benefits afforded by chemical vapor deposition of carbon polymers. In this work, we demonstrate chemical surface doping of PPC through the use of previously reported methods. Chemically treated PPC films are characterized by multiple spectroscopic and electronic measurements. Pyrolyzed parylene C and doped PPC are used to construct diodes that are examined as both p-n heterojunction and Schottky barrier diodes. Half-wave rectification is achieved with PPC diodes and demonstrates the applicability of PPC as a conductive and semiconductive material in device fabrication. PMID:24090451

  4. Uniform deposition of ternary chalcogenide nanoparticles onto mesoporous TiO{sub 2} film using liquid carbon dioxide-based coating

    Energy Technology Data Exchange (ETDEWEB)

    Nursanto, Eduardus Budi [Clean Energy Research Center, Korea Institute of Science and Technology, Hwarangno 14-gil 5, Seongbuk-gu, Seoul 136–791 (Korea, Republic of); Department of Clean Energy and Chemical Engineering, Korea University of Science and Technology,217, Gajeong-ro, Yuseong-gu, Daejeon 305–333 (Korea, Republic of); Park, Se Jin [Clean Energy Research Center, Korea Institute of Science and Technology, Hwarangno 14-gil 5, Seongbuk-gu, Seoul 136–791 (Korea, Republic of); Jeon, Hyo Sang; Hwang, Yun Jeong [Clean Energy Research Center, Korea Institute of Science and Technology, Hwarangno 14-gil 5, Seongbuk-gu, Seoul 136–791 (Korea, Republic of); Department of Clean Energy and Chemical Engineering, Korea University of Science and Technology,217, Gajeong-ro, Yuseong-gu, Daejeon 305–333 (Korea, Republic of); Kim, Jaehoon, E-mail: jaehoonkim@skku.edu [School of Mechanical Engineering, Sungkyunkwan University, 2066, Seobu-Ro, Jangan-Gu, Suwon, GyeongGi-Do 440–746 (Korea, Republic of); SKKU Advanced Institute of Nano Technology (SAINT), 2066, Seobu-Ro, Jangan-Gu, Suwon, GyeongGi-Do 440–746 (Korea, Republic of); Min, Byoung Koun, E-mail: bkmin@kist.re.kr [Clean Energy Research Center, Korea Institute of Science and Technology, Hwarangno 14-gil 5, Seongbuk-gu, Seoul 136–791 (Korea, Republic of); Department of Clean Energy and Chemical Engineering, Korea University of Science and Technology,217, Gajeong-ro, Yuseong-gu, Daejeon 305–333 (Korea, Republic of); Green School, Korea University, 145,Anam-ro, Seongbuk-gu, Seoul 136–713 (Korea, Republic of)

    2014-08-28

    We report the simultaneous deposition of two different metal precursors dissolved in liquid carbon dioxide (l-CO{sub 2}), aiming to the synthesis of ternary chalcopyrite (e.g. CuInS{sub 2}) nanoparticles on a mesoporous TiO{sub 2} film. The l-CO{sub 2}-based deposition of Cu and In precursors and subsequent reaction with a dilute H{sub 2}S gas resulted in Cu{sub x}In{sub y}S{sub z} nanoparticles uniformly deposited across the entire thickness of a mesoporous TiO{sub 2} film. Further heat treatment (air annealing and sulfurization) led to the formation of more stoichiometric CuInS{sub 2} nanoparticles. The formation of CuInS{sub 2} on TiO{sub 2} was confirmed by scanning electron microscopy, high resolution transmission electron microscopy, X-ray diffraction, and Raman spectroscopy. The crystal growth of CuInS{sub 2} was also found to be controllable by adjusting the number of coating cycles of the l-CO{sub 2}-based deposition. - Highlights: • Simultaneous deposition of two different metal precursors dissolved in l-CO{sub 2}. • Uniform deposition of CuInS{sub 2} nanoparticles across mesoporous TiO{sub 2} film. • Highly crystalline CuInS{sub 2} formed on mesoporous TiO{sub 2} film. • Nearly stoichiometric ratio of Cu:In:S was obtained.

  5. The effect of electrochemical phenomena on the deposition of carbon containing inorganic thin films from supersonic expansion of aqueous supercritical solutions

    Science.gov (United States)

    Sezer, Ali Osman

    The supersonic expansion of dilute aqueous solutions for the synthesis of new materials is a complex flow system. Flow prediction and modeling are, therefore, quite challenging. Electrokinetic streaming potentials generated during the supersonic nozzle expansion further complicate the nature of these flow processes. Flow-generated potentials are believed to significantly affect the electrochemical environment of the flow, and therefore, may influence the properties of the product. This dissertation research was an attempt to experimentally and theoretically investigate the significance of flow-generated electrochemical phenomena and their possible effect on the deposited thin carbon films. Brand's computer model was used to predict the physical properties of the expanding jet at the nozzle. The sensitivity of the predicted flow parameters to operating conditions was then analyzed. The results of this parametric flow modeling were used to identify deposition regions of flow space that have less sensitivity to fluctuations in process temperatures and pressures. Streaming currents were predicted from measured nozzle currents. The first high-temperature-pressure Pourbaix diagrams were constructed for the carbon-water system. Equilibrium Pourbaix diagrams together with predicted streaming currents suggested a possible CVD-like mechanism for the deposition of thin carbon films. Deposited carbon films were analyzed for morphology, composition and structure by vibrational spectroscopy and electron microscopy. IR and Raman analysis of carbon samples were not conclusive in revealing any measurable differences in samples. Although Raman spectra showed considerable shifts in peak positions, the lack of internal standard in the spectra made it difficult to draw any reliable conclusions. Significant variations in surface morphology were found for samples grown under different substrate bias. Electron diffraction analysis conclusively showed the presence of a cubic diamond and

  6. Study of Fluorine Addition Influence in the Dielectric Constant of Diamond-Like Carbon Thin Film Deposited by Reactive Sputtering

    Science.gov (United States)

    Trippe, S. C.; Mansano, R. D.

    The hydrogenated amorphous carbon films (a-C:H) or DLC (Diamond-Like Carbon) films are well known for exhibiting high electrical resistivity, low dielectric constant, high mechanical hardness, low friction coefficient, low superficial roughness and also for being inert. In this paper, we produced fluorinated DLC films (a-C:F), and studied the effect of adding CF4 on the above-mentioned properties of DLC films. These films were produced by a reactive RF magnetron sputtering system using a target of pure carbon in stable graphite allotrope. We performed measurements of electrical characteristic curves of capacitance as a function of applied tension (C-V) and current as a function of the applied tension (I-V). We showed the dielectric constant (k) and the resistivity (ρ) as functions of the CF4 concentration. On films with 65% CF4, we found that k = 2.7, and on films with 70% CF4, ρ = 12.3 × 1011 Ω cm. The value of the electrical breakdown field to films with 70% CF4 is 5.3 × 106 V/cm.

  7. Variable temperature semiconductor film deposition

    Science.gov (United States)

    Li, Xiaonan; Sheldon, Peter

    1998-01-01

    A method of depositing a semiconductor material on a substrate. The method sequentially comprises (a) providing the semiconductor material in a depositable state such as a vapor for deposition on the substrate; (b) depositing the semiconductor material on the substrate while heating the substrate to a first temperature sufficient to cause the semiconductor material to form a first film layer having a first grain size; (c) continually depositing the semiconductor material on the substrate while cooling the substrate to a second temperature sufficient to cause the semiconductor material to form a second film layer deposited on the first film layer and having a second grain size smaller than the first grain size; and (d) raising the substrate temperature, while either continuing or not continuing to deposit semiconductor material to form a third film layer, to thereby anneal the film layers into a single layer having favorable efficiency characteristics in photovoltaic applications. A preferred semiconductor material is cadmium telluride deposited on a glass/tin oxide substrate already having thereon a film layer of cadmium sulfide.

  8. Carbon thin films deposited by the magnetron sputtering technique using cobalt, copper and nickel as buffer-layers; Filmes finos de carbono depositados por meio da tecnica de magnetron sputtering usando cobalto, cobre e niquel como buffer-layers

    Energy Technology Data Exchange (ETDEWEB)

    Costa e Silva, Danilo Lopes

    2015-11-01

    In this work, carbon thin films were produced by the magnetron sputtering technique using single crystal substrates of alumina c-plane (0001) and Si (111) and Si (100) substrates, employing Co, Ni and Cu as intermediate films (buffer-layers). The depositions were conducted in three stages, first with cobalt buffer-layers where only after the production of a large number of samples, the depositions using cooper buffer-layers were carried out on Si substrates. Then, depositions were performed with nickel buffer layers using single-crystal alumina substrates. The crystallinity of the carbon films was evaluated by using the technique of Raman spectroscopy and, then, by X-ray diffraction (XRD). The morphological characterization of the films was performed by scanning electron microscopy (SEM and FEG-SEM) and high-resolution transmission electron microscopy (HRTEM). The XRD peaks related to the carbon films were observed only in the results of the samples with cobalt and nickel buffer-layers. The Raman spectroscopy showed that the carbon films with the best degree of crystallinity were the ones produced with Si (111) substrates, for the Cu buffers, and sapphire substrates for the Ni and Co buffers, where the latter resulted in a sample with the best crystallinity of all the ones produced in this work. It was observed that the cobalt has low recovering over the alumina substrates when compared to the nickel. Sorption tests of Ce ions by the carbon films were conducted in two samples and it was observed that the sorption did not occur probably because of the low crystallinity of the carbon films in both samples. (author)

  9. Study on glow discharge effects on catalyst films for growing aligned carbon nanofibers in negative bias-enhanced hot filament chemical vapor deposition system

    International Nuclear Information System (INIS)

    Aligned carbon nanofibers (ACNFs) were grown on silicon substrates coated with NiFe catalyst films by negative bias-enhanced hot filament chemical vapor deposition (CVD). The growth and structure of the aligned carbon nanofibers were investigated by scanning electron microscopy (SEM). The results indicate that the aligned carbon nanofibers could be synthesized after the glow discharge appears when the negative bias is higher than a certain value, while they are bent if the glow discharge does not appear. Furthermore, the diameters of the aligned carbon nanofibers are reduced and their lengths are increased with increasing the negative bias. It is shown that the glow discharge resulting from the negative bias plays an important role in the growth of aligned carbon nanofibers. Here, the effects of the glow discharge on the growth and structure of the aligned carbon nanofibers are discussed

  10. Spray deposition of LiMn{sub 2}O{sub 4} nanoparticle-decorated multiwalled carbon nanotube films as cathode material for lithium-ion batteries

    Energy Technology Data Exchange (ETDEWEB)

    Hong, H.P. [Department of Control and Instrumentation Engineering, Korea University, Jochiwon, 339-700 (Korea, Republic of); Kim, M.S. [Department of Advanced Materials Chemistry, BK21 Research Team, Korea University, Jochiwon, 339-700 (Korea, Republic of); Lee, Y.H. [Department of Biomicrosystem Technology, Korea University, Seoul, 136-701 (Korea, Republic of); Yu, J.S. [Department of Advanced Materials Chemistry, BK21 Research Team, Korea University, Jochiwon, 339-700 (Korea, Republic of); Lee, C.J. [School of Electrical Engineering, Korea University, Seoul, 136-710 (Korea, Republic of); Min, N.K., E-mail: nkmin@korea.ac.kr [Department of Control and Instrumentation Engineering, Korea University, Jochiwon, 339-700 (Korea, Republic of)

    2013-11-29

    We prepared LiMn{sub 2}O{sub 4} nanoparticle-decorated multiwalled carbon nanotube (MWCNT) films as a cathode electrode for lithium-ion batteries using a spray-deposition method. The surface morphologies and structures of the films were characterized using scanning electron microscopy and X-ray diffraction analysis. The results revealed that fairly homogeneous spinel LiMn{sub 2}O{sub 4} nanopowder-based films with the grain size of 20–50 nm were successfully formed on the surface of the MWCNTs. Cyclic voltammetry confirmed the presence of typical spinel LiMn{sub 2}O{sub 4} structure on the MWCNTs with showing stronger oxidative peaks of better reversibility as compared to a pure LiMn{sub 2}O{sub 4} electrode. The spray-deposited LiMn{sub 2}O{sub 4}-decorated MWCNT film was also found to have a higher discharge capacity (97.2 mAh/g) than the as-deposited LiMn{sub 2}O{sub 4} film (75.2 mAh/g) as well as excellent cycling stability. These characteristics are due to the fact that MWCNTs provide the cathode with multiple electron tunneling pathways and a mechanically strong framework. - Highlights: • This study discusses LiMn{sub 2}O{sub 4}(LM)-coated multiwalled carbon nanotube film (MWCNT) • LM-coated MWCNT electrodes are deposited using spray-coating methods. • LM-coated MWCNT electrodes show high discharge capacity. • LM-coated MWCNT electrodes show cycle stability. • MWCNT framework maintains the structure of LM during the electrochemical reaction.

  11. Carbon Nitride Thin Films Deposited by Plasma Assisted Nd∶YAG Laser Ablation of Graphite in N2+H2 Atmosphere

    Institute of Scientific and Technical Information of China (English)

    YU Wei; WANG Shufang; ZHANG Lianshui; LI Xiaowei; FU Guangsheng

    2001-01-01

    Carbon nitride thin films are deposited on silicon wafers by 532 nm Nd∶YAG laser ablation of graphite in the N2+H2 atmosphere assisted by a dc glow discharge plasma at a higher gas pressure of about 4.0 kPa. The properties of the thin films are investigated by scanning electron microscopy (SEM), energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The results show that the deposited films are composed of α-C3N4, β-C3N4 phase and have the N/C atomic ratio of 2.01. The optical emission spectroscopy (OES) studies indicate that the introduction of a dc glow discharge and the adoption of a higher gas pressure during the film deposition are favorable to the net generation of the atomic N, CN radicals and N+2 in B2Σ+u excited state in the plasma, which are considered to play a major role in the synthesis of carbon nitride.

  12. Improvement in the degradation resistance of silicon nanostructures by the deposition of diamond-like carbon films

    Energy Technology Data Exchange (ETDEWEB)

    Klyui, N. I., E-mail: klyui@isp.kiev.ua; Semenenko, M. A.; Khatsevich, I. M.; Makarov, A. V.; Kabaldin, A. N. [National Academy of Sciences of Ukraine, Lashkarev Institute of Semiconductor Physics (Ukraine); Fomovskii, F. V. [Kremenchug National University (Ukraine); Han, Wei [Jilin University, College of Physics (China)

    2015-08-15

    It is established that the deposition of a diamond-like film onto a structure with silicon nanoclusters in a silicon dioxide matrix yields an increase in the long-wavelength photoluminescence intensity of silicon nanoclusters due to the passivation of active-recombination centers with hydrogen and a shift of the photoluminescence peak to the region of higher photosensitivity of silicon-based solar cells. It is also shown that, due to the deposited diamond-like film, the resistance of such a structure to degradation upon exposure to γ radiation is improved, which is also defined by the effect of the passivation of radiation-induced activerecombination centers by hydrogen that is released from the films during treatment.

  13. Plasma-deposited a-C(N) H films

    CERN Document Server

    Franceschini, D E

    2000-01-01

    The growth behaviour, film structure and mechanical properties of plasma-deposited amorphous hydrogenated carbon-nitrogen films are shortly reviewed. The effect of nitrogen-containing gas addition to the deposition to the hydrocarbon atmospheres used is discussed, considering the modifications observed in the chemical composition growth kinetics, carbon atom hybridisation and chemical bonding arrangements of a-C(N):H films. The overall structure behaviour is correlated to the variation of the mechanical properties.

  14. Hydrogenation effects on carrier transport in boron-doped ultrananocrystalline diamond/amorphous carbon films prepared by coaxial arc plasma deposition

    Energy Technology Data Exchange (ETDEWEB)

    Katamune, Yūki, E-mail: yuki-katamune@kyudai.jp; Takeichi, Satoshi [Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580 (Japan); Ohmagari, Shinya [Diamond Research Group, Research Institute for Ubiquitous Energy Devices (UBIQEN), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577 (Japan); Yoshitake, Tsuyoshi, E-mail: tsuyoshi-yoshitake@kyudai.jp [Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580 (Japan); Research Center for Synchrotron Light Applications, Kyushu University, 6-1 Kasuga 816-8580 (Japan); Research and Education Center for Advanced Energy, Materials, Devices, and Systems, Kyushu University, 6-1 Kasuga 816-8580 (Japan)

    2015-11-15

    Boron-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films were deposited by coaxial arc plasma deposition with a boron-blended graphite target at a base pressure of <10{sup −3} Pa and at hydrogen pressures of ≤53.3 Pa. The hydrogenation effects on the electrical properties of the films were investigated in terms of chemical bonding. Hydrogen-scattering spectrometry showed that the maximum hydrogen content was 35 at. % for the film produced at 53.3-Pa hydrogen pressure. The Fourier-transform infrared spectra showed strong absorptions by sp{sup 3} C–H bonds, which were specific to the UNCD/a-C:H, and can be attributed to hydrogen atoms terminating the dangling bonds at ultrananocrystalline diamond grain boundaries. Temperature-dependence of the electrical conductivity showed that the films changed from semimetallic to semiconducting with increasing hydrogen pressure, i.e., with enhanced hydrogenation, probably due to hydrogenation suppressing the formation of graphitic bonds, which are a source of carriers. Carrier transport in semiconducting hydrogenated films can be explained by a variable-range hopping model. The rectifying action of heterojunctions comprising the hydrogenated films and n-type Si substrates implies carrier transport in tunneling.

  15. Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD

    Institute of Scientific and Technical Information of China (English)

    HOU Hui-jun; ZhU Xia-gao; LIN Song-sheng; YUAN Zhen-hai; DAI Da-huang

    2004-01-01

    In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radiofrequency plasma chemical vapor deposition (RF-PCVD). In this paper, the configuration and computation of external magnetic field B are introduced. The restriction effect of magnetic field B on the charged particles and the effect of magnetic field B on the primary parameters-nonindependent power Pf and self-bias Uz were also studied. The mechanism of how magnetic field B affects self-bias Uz was analyzed.

  16. Nanofriction properties of molecular deposition films

    Institute of Scientific and Technical Information of China (English)

    王强斌; 高芒来; 张嗣伟

    2000-01-01

    The nanofriction properties of Au substrate and monolayer molecular deposition film and multilayer molecular deposition films on Au substrate and the molecular deposition films modified with alkyl-terminal molecule have been investigated by using an atomic force microscope. It is concluded that ( i ) the deposition of molecular deposition films on Au substrate and the modification of alkyl-terminal molecule to the molecular deposition films can reduce the frictional force; (ii) the molecular deposition films with the same terminal exhibit similar nanofriction properties, which has nothing to do with the molecular chain-length and the layer number; (iii) the unstable nanofriction properties of molecular deposition films are contributed to the active terminal of the molecular deposition film, which can be eliminated by decorating the active molecular deposition film with alkyl-terminal molecule, moreover, the decoration of alkyl-terminal molecule can lower the frictional force conspicuously; (iv) the relat

  17. Structure, mechanical, and frictional properties of hydrogenated fullerene-like amorphous carbon film prepared by direct current plasma enhanced chemical vapor deposition

    Science.gov (United States)

    Wang, Yongfu; Gao, Kaixiong; Zhang, Junyan

    2016-07-01

    In this study, fullerene like carbon (FL-C) is introduced in hydrogenated amorphous carbon (a-C:H) film by employing a direct current plasma enhanced chemical vapor deposition. The film has a low friction and wear, such as 0.011 and 2.3 × 10-9mm3/N m in the N2, and 0.014 and 8.4 × 10-8mm3/N m in the humid air, and high hardness and elasticity (25.8 GPa and 83.1%), to make further engineering applications in practice. It has several nanometers ordered domains consisting of less frequently cross-linked graphitic sheet stacks. We provide new evidences for understanding the reported Raman fit model involving four vibrational frequencies from five, six, and seven C-atom rings of FL-C structures, and discuss the structure evolution before or after friction according to the change in the 1200 cm-1 Raman band intensity caused by five- and seven-carbon rings. Friction inevitably facilitates the transformation of carbon into FL-C nanostructures, namely, the ultra low friction comes from both such structures within the carbon film and the sliding induced at friction interface.

  18. Structural and Physical Characteristics of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Deposited Using a Coaxial Arc Plasma Gun

    Science.gov (United States)

    Yoshitake, Tsuyoshi; Nakagawa, You; Nagano, Akira; Ohtani, Ryota; Setoyama, Hiroyuki; Kobayashi, Eiichi; Sumitani, Kazushi; Agawa, Yoshiaki; Nagayama, Kunihito

    2010-01-01

    Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films were formed without initial nucleation using a coaxial arc plasma gun. The UNCD crystallite diameters estimated from the X-ray diffraction peaks were approximately 2 nm. The Fourier transform infrared absorption spectrum exhibited an intense sp3-CH peak that might originate from the grain boundaries between UNCD crystallites whose dangling bonds are terminated with hydrogen atoms. A narrow sp3 peak in the photoemission spectrum implied that the film comprises a large number of UNCD crystallites. Large optical absorption coefficients at photon energies larger than 3 eV that might be due to the grain boundaries are specific to the UNCD/a-C:H films.

  19. Immobilization and stretching of 5'-pyrene-terminated DNA on carbon film deposited on electron microscope grid.

    Science.gov (United States)

    Loukanov, Alexandre; Filipov, Chavdar; Lecheva, Marta; Emin, Saim

    2015-11-01

    The immobilization and stretching of randomly coiled DNA molecules on hydrophobic carbon film is a challenging microscopic technique, which possess various applications, especially for genome sequencing. In this report the pyrenyl nucleus is used as an anchor moiety to acquire higher affinity of double stranded DNA to the graphite surface. DNA and pyrene are joined through a linker composed of four aliphatic methylene groups. For the preparation of pyrene-terminated DNA a multifunctional phosphoramidite monomer compound was designed. It contains pyrenylbutoxy group as an anchor moiety for π-stacking attachment to the carbon film, 2-cyanoethyloxy, and diisopropylamino as coupling groups for conjugation to activated oligonucleotide chain or DNA molecule. This monomer derivative was suitable for incorporation into automated solid-phase DNA synthesis and was attached to the 5' terminus of the DNA chain through a phosphodiester linkage. The successful immobilization and stretching of pyrene-terminated DNA was demonstrated by conventional 100 kV transmission electron microscope. The microscopic analysis confirmed the stretched shape of the negatively charged nucleic acid pieces on the hydrophobic carbon film. PMID:26303786

  20. Intrinsic stress analysis of sputtered carbon film

    Institute of Scientific and Technical Information of China (English)

    Liqin Liu; Zhanshan Wang; Jingtao Zhu; Zhong Zhang; Moyan Tan; Qiushi Huang; Rui Chen; Jing Xu; Lingyan Chen

    2008-01-01

    Intrinsic stresses of carbon films deposited by direct current (DC) magnetron sputtering were investigated.The bombardments of energetic particles during the growth of films were considered to be the main reason for compressive intrinsic stresses.The values of intrinsic stresses were determined by measuring the radius of curvature of substrates before and after film deposition.By varying argon pressure and target-substrate distance,energies of neutral carbon atoms impinging on the growing films were optimized to control the intrinsic stresses level.The stress evolution in carbon films as a function of film thickness was investigated and a void-related stress relief mechanism was proposed to interpret this evolution.

  1. Growth of carbon nanofiber coatings on nickel thin films on fused silica by catalytic thermal chemical vapor deposition: On the use of titanium, titanium–tungsten and tantalum as adhesion layers

    NARCIS (Netherlands)

    Thakur, D.B.; Tiggelaar, R.M.; Gardeniers, J.G.E.; Lefferts, L.; Seshan, K.

    2009-01-01

    Coatings of carbon nanofiber (CNF) layers were synthesized on fused silica substrates using a catalytic thermal chemical vapor deposition process (C-TCVD). The effects of various adhesion layers–titanium, titanium–tungsten and tantalum–under the nickel thin film on the attachment of carbon nanofiber

  2. Synthesis of Vertically-Aligned Carbon Nanotubes from Langmuir-Blodgett Films Deposited Fe Nanoparticles on Al2O3/Al/SiO2/Si Substrate.

    Science.gov (United States)

    Takagiwa, Shota; Kanasugi, Osamu; Nakamura, Kentaro; Kushida, Masahito

    2016-04-01

    In order to apply vertically-aligned carbon nanotubes (VA-CNTs) to a new Pt supporting material of polymer electrolyte fuel cell (PEFC), number density and outer diameter of CNTs must be controlled independently. So, we employed Langmuir-Blodgett (LB) technique for depositing CNT growth catalysts. A Fe nanoparticle (NP) was used as a CNT growth catalyst. In this study, we tried to thicken VA-CNT carpet height and inhibit thermal aggregation of Fe NPs by using Al2O3/Al/SiO2/Si substrate. Fe NP LB films were deposited on three typed of substrates, SiO2/Si, as-deposited Al2O3/Al/SiO2/Si and annealed Al2O3/Al/SiO2/Si at 923 K in Ar atmosphere of 16 Pa. It is known that Al2O3/Al catalyzes hydrocarbon reforming, inhibits thermal aggregation of CNT growth catalysts and reduces CNT growth catalysts. It was found that annealed Al2O3/Al/SiO2/Si exerted three effects more strongly than as-deposited Al2O3/Al/SiO2/Si. VA-CNTs were synthesized from Fe NPs-C16 LB films by thermal chemical vapor deposition (CVD) method. As a result, at the distance between two nearest CNTs 28 nm or less, VA-CNT carpet height on annealed Al2O3/Al/SiO2/Si was about twice and ten times thicker than that on SiO2/Si and that on as-deposited Al2O3/Al/SiO2/Si, respectively. Moreover, distribution of CNT outer diameter on annealed Al2O3/Al/SiO2/Si was inhibited compared to that on SiO2/Si. These results suggest that since thermal aggregation of Fe NPs is inhibited, catalyst activity increases and distribution of Fe NP size is inhibited.

  3. Time-Resolved Spectroscopic Observation of Deposition Processes of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films by Using a Coaxial Arc Plasma Gun

    Science.gov (United States)

    Hanada, Kenji; Yoshitake, Tsuyoshi; Nishiyama, Takashi; Nagayama, Kunihito

    2010-08-01

    The deposition of ultrananocrystalline diamond (UNCD)/amorphous carbon composite films using a coaxial arc plasma gun in vacuum and, for comparison, in a 53.3 Pa hydrogen atmosphere was spectroscopically observed using a high-speed camera equipped with narrow-band-pass filters. UNCD crystallites with diameters of approximately 1.6 nm were formed even in vacuum. These extremely small crystallites imply that the formation is predominantly due to nucleation without the subsequent growth. Even in vacuum, emissions from C+ ions, C atoms, and C2 dimers lasted for approximately 100 µs, although the emission lifetimes of these species are generally 10 ns. We consider that the nucleation is due to the supersaturated environment containing excited carbon species with large number densities.

  4. Piezoresistive effect in carbon nanotube films

    Institute of Scientific and Technical Information of China (English)

    2003-01-01

    The piezoresistive effect of the pristine carbon nanotube (CNT) films has been studied. Carbon nanotubes were synthesized by hot filament chemical vapor deposition. The piezoresistive effect in the pristine CNT films was studied by a three-point bending test. The gauge factor for the pristine CNT films under 500 microstrains was found to be at least 65 at room temperature, and increased with temperature, exceeding that of polycrystalline silicon (30) at 35℃. The origin of the piezoresistivity in CNT films may be ascribed to a pressure-induced change in the band gap and the defects.

  5. Minerals deposited as thin films

    International Nuclear Information System (INIS)

    Free matrix effects are due to thin film deposits. Thus, it was decided to investigate this technique as a possibility to use pure oxide of the desired element, extrapolating its concentration from analytical curves made with avoiding, at the same time, mathematical corrections. The proposed method was employed to determine iron and titanium concentrations in geological samples. The range studied was 0.1-5%m/m for titanium and 5-20%m/m for iron. For both elements the reproducibility was about 7% and differences between this method and other chemical determinations were 15% for titanium and 7% for iron. (Author)

  6. Nanofriction properties of molecular deposition films

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    The nanofriction properties of Au substrate and monolayer molecular deposition film and multilayer molecular deposition films on Au substrate and the molecular deposition films modified with alkyl-terminal molecule have been investigated by using an atomic force microscope. It is concluded that (ⅰ) the deposition of molecular deposition films on Au substrate and the modification of alkyl-terminal molecule to the molecular deposition films can reduce the frictional force; (ⅱ) the molecular deposition films with the same terminal exhibit similar nanofriction properties, which has nothing to do with the molecular chain-length and the layer number; (ⅲ) the unstable nanofriction properties of molecular deposition films are contributed to the active terminal of the molecular deposition film, which can be eliminated by decorating the active molecular deposition film with alkyl-terminal molecule, moreover, the decoration of alkyl-terminal molecule can lower the frictional force conspicuously; (ⅳ) the relative humidity affects the frictional force; the higher the RH, the lower the frictional force.

  7. Buckling instability in amorphous carbon films

    Science.gov (United States)

    Zhu, X. D.; Narumi, K.; Naramoto, H.

    2007-06-01

    In this paper, we report the buckling instability in amorphous carbon films on mirror-polished sapphire (0001) wafers deposited by ion beam assisted deposition at various growth temperatures. For the films deposited at 150 °C, many interesting stress relief patterns are found, which include networks, blisters, sinusoidal patterns with π-shape, and highly ordered sinusoidal waves on a large scale. Starting at irregular buckling in the centre, the latter propagate towards the outer buckling region. The maximum length of these ordered patterns reaches 396 µm with a height of ~500 nm and a wavelength of ~8.2 µm. However, the length decreases dramatically to 70 µm as the deposition temperature is increased to 550 °C. The delamination of the film appears instead of sinusoidal waves with a further increase of the deposition temperature. This experimental observation is correlated with the theoretic work of Crosby (1999 Phys. Rev. E 59 R2542).

  8. Piezoresistive Sensors Based on Carbon Nanotube Films

    Institute of Scientific and Technical Information of China (English)

    L(U) Jian-wei; WANG Wan-lu; LIAO Ke-jun; WANG Yong-tian; LIU CHang-lin; Zeng Qing-gao

    2005-01-01

    Piezoresistive effect of carbon nanotube films was investigated by a three-point bending test.Carbon nanotubes were synthesized by hot filament chemical vapor deposition.The experimental results showed that the carbon nanotubes have a striking piezoresistive effect.The relative resistance was changed from 0 to 10.5×10-2 and 3.25×10-2 for doped and undoped films respectively at room temperature when the microstrain under stress from 0 to 500. The gauge factors for doped and undoped carbon nanotube films under 500 microstrain were about 220 and 67 at room temperature, respectively, exceeding that of polycrystalline silicon (30) at 35℃.The origin of the resistance changes in the films may be attributed to a strain-induced change in the band gap for the doped tubes and the defects for the undoped tubes.

  9. A Comparative Study of Three Different Chemical Vapor Deposition Techniques of Carbon Nanotube Growth on Diamond Films

    Directory of Open Access Journals (Sweden)

    Betty T. Quinton

    2013-01-01

    Full Text Available This paper compares between the methods of growing carbon nanotubes (CNTs on diamond substrates and evaluates the quality of the CNTs and the interfacial strength. One potential application for these materials is a heat sink/spreader for high-power electronic devices. The CNTs and diamond substrates have a significantly higher specific thermal conductivity than traditional heat sink/spreader materials making them good replacement candidates. Only limited research has been performed on these CNT/diamond structures and their suitability of different growth methods. This study investigates three potential chemical vapor deposition (CVD techniques for growing CNTs on diamond: thermal CVD (T-CVD, microwave plasma-enhanced CVD (MPE-CVD, and floating catalyst thermal CVD (FCT-CVD. Scanning electron microscopy (SEM and high-resolution transmission electron microscopy (TEM were used to analyze the morphology and topology of the CNTs. Raman spectroscopy was used to assess the quality of the CNTs by determining the ID/IG peak intensity ratios. Additionally, the CNT/diamond samples were sonicated for qualitative comparisons of the durability of the CNT forests. T-CVD provided the largest diameter tubes, with catalysts residing mainly at the CNT/diamond interface. The MPE-CVD process yielded non uniform defective CNTs, and FCT-CVD resulted in the smallest diameter CNTs with catalyst particles imbedded throughout the length of the nanotubes.

  10. Pulsed laser deposition: Prospects for commercial deposition of epitaxial films

    Energy Technology Data Exchange (ETDEWEB)

    Muenchausen, R.E.

    1999-03-01

    Pulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique for the deposition of thin films. The vapor source is induced by the flash evaporation that occurs when a laser pulse of sufficient intensity (about 100 MW/cm{sup 2}) is absorbed by a target. In this paper the author briefly defines pulsed laser deposition, current applications, research directed at gaining a better understanding of the pulsed laser deposition process, and suggests some future directions to enable commercial applications.

  11. Deposition of silicon oxide like films from HMDSO by means of atmospheric pressure microplasma jets: Study of deposition mechanisms

    CERN Document Server

    Reuter, R; Ellerweg, D; Arcos, T de los; von Keudell, A; Benedikt, J

    2011-01-01

    The deposition of thin SiOxCyH or SiOxHy films by means of atmospheric pressure microplasma jets with Helium / Hexamethyldisiloxane (HMDSO / O2) mixtures and the role of surface reactions for the film growth have been investigated. The growth rate and the carbon-content in the film are measured as a function of the O2 and HMDSO mixture in the gas flow. Two types of microplasma jets, one with a planar and one with a coaxial geometry, are used to study the deposition process. The very localised deposition on and treatment of the surface gives the opportunity to separate deposition and treatment processes by applying two jets on a rotating substrate. The etching of carbon at the surface and the increasing HMDSO depletion leading to an increasing deposition rate are both induced by admixing oxygen. Carbon free films can be deposited, even without addition of oxygen, and the main loss channels for carbon are surface reactions.

  12. Energetic deposition of thin metal films

    CERN Document Server

    Al-Busaidy, M S K

    2001-01-01

    deposited films. The primary aim of this thesis was to study the physical effect of energetic deposition metal thin films. The secondary aim is to enhance the quality of the films produced to a desired quality. Grazing incidence X-ray reflectivity (GIXR) measurements from a high-energy synchrotron radiation source were carried out to study and characterise the samples. Optical Profilers Interferometery, Atomic Force Microscope (AFM), Auger electron spectroscopy (AES), Medium energy ion spectroscopy (MEIS), and the Electron microscope studies were the other main structural characterisation tools used. AI/Fe trilayers, as well as multilayers were deposited using a Nordico planar D.C. magnetron deposition system at different voltage biases and pressures. The films were calibrated and investigated. The relation between energetic deposition variation and structural properties was intensely researched. Energetic deposition refers to the method in which the deposited species possess higher kinetic energy and impact ...

  13. Pulsed laser deposition of anatase thin films on textile substrates

    Science.gov (United States)

    Krämer, André; Kunz, Clemens; Gräf, Stephan; Müller, Frank A.

    2015-10-01

    Pulsed laser deposition (PLD) is a highly versatile tool to prepare functional thin film coatings. In our study we utilised a Q-switched CO2 laser with a pulse duration τ ≈ 300 ns, a laser wavelength λ = 10.59 μm, a repetition frequency frep = 800 Hz and a peak power Ppeak = 15 kW to deposit crystalline anatase thin films on carbon fibre fabrics. For this purpose, preparatory experiments were performed on silicon substrates to optimise the anatase deposition conditions including the influence of different substrate temperatures and oxygen partial pressures. Processing parameters were then transferred to deposit anatase on carbon fibres. Scanning electron microscopy, X-ray diffraction analyses, Raman spectroscopy and tactile profilometry were used to characterise the samples and to reveal the formation of phase pure anatase without the occurrence of a secondary rutile phase. Methanol conversion test were used to prove the photocatalytic activity of the coated carbon fibres.

  14. Deposition and characterization of Ru thin films prepared by metallorganic chemical vapor deposition

    CERN Document Server

    Kang, S Y; Lee, S K; Hwang, C S; Kim, H J

    2000-01-01

    Ru thin films were deposited at 300 approx 400 .deg. C by using Ru(C sub 5 H sub 4 C sub 2 H sub 5) sub 2 (Ru(EtCp) sub 2) as a precursor and low-pressure metalorganic chemical vapor deposition. The addition of O sub 2 gas was essential to form Ru thin films. The deposition rates of the films were about 200 A/min. For low oxygen addition and high substrate temperature, RuO sub 2 phases were formed. Also, thermodynamic calculations showed that all the supplied oxygen was consumed to oxidize carbon and hydrogen, cracked from the precursor ligand, rather than Ru. Thus, metal films could be obtained There was an optimum oxygen to precursor ratio at which the pure Ru phase could be obtained with minimum generation of carbon and RuO sub 2

  15. Properties of nitrogen containing diamond-like carbon films

    International Nuclear Information System (INIS)

    Optical and mechanical properties of nitrogen containing diamond- like carbon (NC-DLC) films deposited by RF plasma decomposition of CH4:H2:N2 gas mixture were investigated. Nitrogen was incorporated into DLC films both during film growth and after deposition of film by implantation of nitrogen ions. It was shown that both optical and mechanical properties of the films strongly depend on nitrogen content in the films. In some cases the mechanical properties of nitrogen implanted films were improved in comparison with unimplanted samples. (author). 7 refs., 2 figs

  16. Regression Analysis of the Effect of Bias Voltage on Nano- and Macrotribological Properties of Diamond-Like Carbon Films Deposited by a Filtered Cathodic Vacuum Arc Ion-Plating Method

    Directory of Open Access Journals (Sweden)

    Shojiro Miyake

    2014-01-01

    Full Text Available Diamond-like carbon (DLC films are deposited by bend filtered cathodic vacuum arc (FCVA technique with DC and pulsed bias voltage. The effects of varying bias voltage on nanoindentation and nanowear properties were evaluated by atomic force microscopy. DLC films deposited with DC bias voltage of −50 V exhibited the greatest hardness at approximately 50 GPa, a low modulus of dissipation, low elastic modulus to nanoindentation hardness ratio, and high nanowear resistance. Nanoindentation hardness was positively correlated with the Raman peak ratio Id/Ig, whereas wear depth was negatively correlated with this ratio. These nanotribological properties highly depend on the films’ nanostructures. The tribological properties of the FCVA-DLC films were also investigated using a ball-on-disk test. The average friction coefficient of DLC films deposited with DC bias voltage was lower than that of DLC films deposited with pulse bias voltage. The friction coefficient calculated from the ball-on-disk test was correlated with the nanoindentation hardness in dry conditions. However, under boundary lubrication conditions, the friction coefficient and specific wear rate had little correlation with nanoindentation hardness, and wear behavior seemed to be influenced by other factors such as adhesion strength between the film and substrate.

  17. Preparation and Thermal Characterization of Diamond-Like Carbon Films

    Institute of Scientific and Technical Information of China (English)

    BAI Su-Yuan; TANG Zhen-An; HUANG Zheng-Xing; Yu Jun; WANG Jing; LIU Gui-Chang

    2009-01-01

    Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.

  18. Polymer-assisted deposition of films

    Science.gov (United States)

    McCleskey,Thomas M.; Burrell,Anthony K.; Jia,Quanxi; Lin,Yuan

    2012-02-28

    A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

  19. Superconductive niobium films coating carbon nanotube fibers

    Science.gov (United States)

    Salvato, M.; Lucci, M.; Ottaviani, I.; Cirillo, M.; Behabtu, N.; Young, C. C.; Pasquali, M.; Vecchione, A.; Fittipaldi, R.; Corato, V.

    2014-11-01

    Superconducting niobium (Nb) has been successfully obtained by sputter deposition on carbon nanotube fibers. The transport properties of the niobium coating the fibers are compared to those of niobium thin films deposited on oxidized Si substrates during the same deposition run. For niobium films with thicknesses above 300 nm, the niobium coating the fibers and the thin films show similar normal state and superconducting properties with critical current density, measured at T = 4.2 K, of the order of 105 A cm-2. Thinner niobium layers coating the fibers also show the onset of the superconducting transition in the resistivity versus temperature dependence, but zero resistance is not observed down to T = 1 K. We evidence by scanning electron microscopy (SEM) and current-voltage measurements that the granular structure of the samples is the main reason for the lack of true global superconductivity for thicknesses below 300 nm.

  20. Superconductive niobium films coating carbon nanotube fibers

    International Nuclear Information System (INIS)

    Superconducting niobium (Nb) has been successfully obtained by sputter deposition on carbon nanotube fibers. The transport properties of the niobium coating the fibers are compared to those of niobium thin films deposited on oxidized Si substrates during the same deposition run. For niobium films with thicknesses above 300 nm, the niobium coating the fibers and the thin films show similar normal state and superconducting properties with critical current density, measured at T = 4.2 K, of the order of 105 A cm−2. Thinner niobium layers coating the fibers also show the onset of the superconducting transition in the resistivity versus temperature dependence, but zero resistance is not observed down to T = 1 K. We evidence by scanning electron microscopy (SEM) and current-voltage measurements that the granular structure of the samples is the main reason for the lack of true global superconductivity for thicknesses below 300 nm. (paper)

  1. Significant improvements of the high-field properties of carbon-doped MgB2 films by hot-filament-assisted hybrid physical-chemical vapor deposition using methane as the doping source

    International Nuclear Information System (INIS)

    We report a significant enhancement in upper critical field Hc2 and irreversibility field Hirr in carbon-doped MgB2 films fabricated by hot-filament-assisted hybrid physical-chemical vapor deposition (HFA-HPCVD) using methane as the doping source. For the parallel field, a very large temperature derivative -dHc2parallelab/dT value of 3 T K-1 near Tc was achieved in a heavily doped film with Tc near 28 K. Carbon doping also enhanced flux pinning, resulting in a much higher critical current density in a magnetic field Jc(H) than in undoped samples. The result suggests a more effective doping of carbon into the MgB2 structure and a better connectivity between the carbon-doped MgB2 grains than in previous reports. A clear correlation between the decrease in grain size and the enhancement of Hc2 was observed. (rapid communication)

  2. Cathodoluminescence in Quaternary carbonate deposits

    Science.gov (United States)

    Braithwaite, Colin J. R.

    2016-05-01

    The cathodoluminescent oscillatory and sectoral growth zones common in crystals formed in ancient limestone successions in a variety of putative environments appear to be rare or absent from Recent and Pleistocene marine carbonate sequences. The factors controlling cathodoluminescence and reasons for this disparity are examined. The cathodoluminescent zones in the cements of ancient rocks have been interpreted as responses to variations in the redox potential of formative pore waters during crystal growth; although similar cathodoluminescent behaviour is recorded from some deposits, including travertines and Quaternary speleothems, formed in what are thought to have been strongly oxidizing environments. The apparent absence of cathodoluminescence in the most Recent and Pleistocene marine deposits, that presumably reflect deposition and diagenesis in environments that are also characteristically oxidized, therefore seems anomalous. The controlling influences on cathodoluminescence are reviewed, together with evidence relating to observations of Pleistocene marine deposits and likely conditions of formation but, where it is present, the mechanism(s) for its development remain elusive.

  3. DEPOSITION CARBON NANOSTRUCTURES BY SURFATRON GENERATED DISCHARGE

    Directory of Open Access Journals (Sweden)

    Marina Davydova

    2014-12-01

    Full Text Available Carbon nanostructures were deposited by surface wave discharge using various Ar/CH4/ CO2 gas mixture ratios. The morphology was controlled by adjusting of gas concentration and was investigated by scanning electron microscopy (SEM. Also, the influence of the low temperature plasma treatment and process time on the wettability of the diamond films has been studied. The results indicate that for hydrogen termination of diamond surface indicate that the temperature as low as 400°C and treatment time of 15 min is sufficient to attain the p-type surface conductivity of diamond.

  4. Perovskite thin films via atomic layer deposition.

    Science.gov (United States)

    Sutherland, Brandon R; Hoogland, Sjoerd; Adachi, Michael M; Kanjanaboos, Pongsakorn; Wong, Chris T O; McDowell, Jeffrey J; Xu, Jixian; Voznyy, Oleksandr; Ning, Zhijun; Houtepen, Arjan J; Sargent, Edward H

    2015-01-01

    A new method to deposit perovskite thin films that benefit from the thickness control and conformality of atomic layer deposition (ALD) is detailed. A seed layer of ALD PbS is place-exchanged with PbI2 and subsequently CH3 NH3 PbI3 perovskite. These films show promising optical properties, with gain coefficients of 3200 ± 830 cm(-1) .

  5. Perovskite Thin Films via Atomic Layer Deposition

    KAUST Repository

    Sutherland, Brandon R.

    2014-10-30

    © 2014 Wiley-VCH Verlag GmbH & Co. KGaA. (Graph Presented) A new method to deposit perovskite thin films that benefit from the thickness control and conformality of atomic layer deposition (ALD) is detailed. A seed layer of ALD PbS is place-exchanged with PbI2 and subsequently CH3NH3PbI3 perovskite. These films show promising optical properties, with gain coefficients of 3200 ± 830 cm-1.

  6. Electrophoretic deposition of tannic acid-polypyrrolidone films and composites.

    Science.gov (United States)

    Luo, Dan; Zhang, Tianshi; Zhitomirsky, Igor

    2016-05-01

    Thin films of polyvinylpyrrolidone (PVP)-tannic acid (TA) complexes were prepared by a conceptually new strategy, based on electrophoretic deposition (EPD). Proof of concept investigations involved the analysis of the deposition yield, FTIR and UV-vis spectroscopy of the deposited material, and electron microscopy studies. The analysis of the deposition mechanism indicated that the limitations of the EPD in the deposition of small phenolic molecules, such as TA, and electrically neutral polymers, similar to PVP, containing hydrogen-accepting carbonyl groups, can be avoided. The remarkable adsorption properties of TA and film forming properties of the PVP-TA complexes allowed for the EPD of materials of different types, such as huntite mineral platelets and hydrotalcite clay particles, TiO2 and MnO2 oxide nanoparticles, multiwalled carbon nanotubes, TiN and Pd nanoparticles. Moreover, PVP-TA complexes were used for the co-deposition of different materials and formation of composite films. In another approach, TA was used as a capping agent for the hydrothermal synthesis of ZnO nanorods, which were then deposited by EPD using PVP-TA complexes. The fundamental adsorption and interaction mechanisms of TA involved chelation of metal atoms on particle surfaces with galloyl groups, π-π interactions and hydrogen bonding. The films prepared by EPD can be used for various applications, utilizing functional properties of TA, PVP, inorganic and organic materials of different types and their composites. PMID:26878711

  7. Characterization of Thin Films Deposited with Precursor Ferrocene by Plasma Enhanced Chemical Vapour Deposition

    Institute of Scientific and Technical Information of China (English)

    YAO Kailun; ZHENG Jianwan; LIU Zuli; JIA Lihui

    2007-01-01

    In this paper,the characterization of thin films,deposited with the precursor ferrocene(FcH)by the plasma enhanced chemical vapour deposition(PECVD)technique,was investigated.The films were measured by Scanning Electronic Microscopy(SEM),Atomic Force Microscopy(AFM),Electron Spectroscopy for Chemical Analysis(ESCA),and superconducting Quantum Interference Device(SQUID).It was observed that the film's layer is homogeneous in thickness and has a dense morphology without cracks.The surface roughness is about 36 nm.From the results of ESCA,it can be inferred that the film mainly contains the compound FeOOH,and carbon is combined with oxygen in different forms under different supply-powers.The hysteresis loops indicate that the film is of soft magnetism.

  8. Antimicrobial Properties of Diamond-Like Carbon/Silver Nanocomposite Thin Films Deposited on Textiles: Towards Smart Bandages

    OpenAIRE

    Tadas Juknius; Modestas Ružauskas; Tomas Tamulevičius; Rita Šiugždinienė; Indrė Juknienė; Andrius Vasiliauskas; Aušrinė Jurkevičiūtė; Sigitas Tamulevičius

    2016-01-01

    In the current work, a new antibacterial bandage was proposed where diamond-like carbon with silver nanoparticle (DLC:Ag)-coated synthetic silk tissue was used as a building block. The DLC:Ag structure, the dimensions of nanoparticles, the silver concentration and the silver ion release were studied systematically employing scanning electron microscopy, energy dispersive X-ray spectroscopy and atomic absorption spectroscopy, respectively. Antimicrobial properties were investigated using micro...

  9. Thin films of hydrogenated amorphous carbon (a-C:H) obtained through chemical vapor deposition assisted by plasma; Peliculas delgadas de carbono amorfo hidrogenado (a-C:H) obtenidas mediante deposito quimico de vapores asistido por plasma

    Energy Technology Data Exchange (ETDEWEB)

    Mejia H, J.A.; Camps C, E.E.; Escobar A, L.; Romero H, S.; Chirino O, S. [ININ, 52045 Ocoyoacac, Estado de Mexico (Mexico); Muhl S, S. [IIM-UNAM, 04510 Mexico D.F. (Mexico)

    2004-07-01

    Films of hydrogenated amorphous carbon (a-C:H) were deposited using one source of microwave plasma with magnetic field (type ECR), using mixtures of H{sub 2}/CH{sub 4} in relationship of 80/20 and 95/05 as precursory gases, with work pressures of 4X10{sup -4} to 6x10{sup -4} Torr and an incident power of the discharge of microwaves with a constant value of 400 W. It was analyzed the influence among the properties of the films, as the deposit rate, the composition and the bonding types, and the deposit conditions, such as the flow rates of the precursory gases and the polarization voltage of the sample holders. (Author)

  10. Post deposition purification of PTCDA thin films

    International Nuclear Information System (INIS)

    The decomposition of perylene-3,4,9,10-tetracarboxylic dianhydride (PTCDA) molecules during evaporation of unpurified raw material in ultra high vacuum was studied. The fragments were identified by mass spectrometry and the influence of these fragments and further contaminations of the raw material on the electronic structure of PTCDA thin films was measured by photoemission spectroscopy. Annealing of contaminated PTCDA films was tested as cheap and easy to perform method for (partial) post deposition purification of the contaminated films

  11. A comparison study between atomic and ionic nitrogen doped carbon films prepared by ion beam assisted cathode arc deposition at various pulse frequencies

    International Nuclear Information System (INIS)

    A comparison study of microstructure and bonds composition of carbon nitride (CNx) films fabricated at atomic and ionic nitrogen source by pulse cathode arc method was presented. The relative fractions of CN/CC bonds, N-sp3C/N-sp2C and graphite-like/pyridine-like N bonding configurations in the CN films were evaluated by combining C1s and N1s X-ray photoelectron spectroscopy with the hardness and optical band gap measurement. The dependence of microstructure (quantity, size and disordering degree of Csp2 clusters) of CNx films on the nitrogen source and pulse frequency was determined by Raman spectroscopy. Films with high atomic ratio of nitrogen/carbon (0.17) and high hardness were produced at ionic nitrogen source and low pulse frequency. The results showed that ionic nitrogen source facilitated the formation of CN bonds and N-sp2C bonding configurations (mainly in graphite-like N form). Moreover presenting an optimum pulse frequency (∼10 Hz) leaded to the most nitrogen coordinated with sp3-C and the highest ratio of CN/CC bonds in the CNx films. An equilibrium action mechanism might exist between the quantity and energy of carbon and nitrogen ions/atoms, giving more nitrogen-incorporated carbon materials. These allow us to obtain the high content of N-Csp3 bonding and expected bonding structure by optimizing pulse frequency and nitrogen source.

  12. Ultraviolet laser deposition of graphene thin films without catalytic layers

    KAUST Repository

    Sarath Kumar, S. R.

    2013-01-09

    In this letter, the formation of nanostructured graphene by ultraviolet laser ablation of a highly ordered pyrolytic graphite target under optimized conditions is demonstrated, without a catalytic layer, and a model for the growth process is proposed. Previously, graphene film deposition by low-energy laser (2.3 eV) was explained by photo-thermal models, which implied that graphene films cannot be deposited by laser energies higher than the C-C bond energy in highly ordered pyrolytic graphite (3.7 eV). Here, we show that nanostructured graphene films can in fact be deposited using ultraviolet laser (5 eV) directly over different substrates, without a catalytic layer. The formation of graphene is explained by bond-breaking assisted by photoelectronic excitation leading to formation of carbon clusters at the target and annealing out of defects at the substrate.

  13. Structural morphology of amorphous conducting carbon film

    Indian Academy of Sciences (India)

    P N Vishwakarma; V Prasad; S V Subramanyam; V Ganesan

    2005-10-01

    Amorphous conducting carbon films deposited over quartz substrates were analysed using X-ray diffraction and AFM technique. X-ray diffraction data reveal disorder and roughness in the plane of graphene sheet as compared to that of graphite. This roughness increases with decrease in preparation temperature. The AFM data shows surface roughness of carbon films depending on preparation temperatures. The surface roughness increases with decrease in preparation temperature. Also some nucleating islands were seen on the samples prepared at 900°C, which are not present on the films prepared at 700°C. Detailed analysis of these islands reveals distorted graphitic lattice arrangement. So we believe these islands to be nucleating graphitic. Power spectrum density (PSD) analysis of the carbon surface indicates a transition from the nonlinear growth mode to linear surface-diffusion dominated growth mode resulting in a relatively smoother surface as one moves from low preparation temperature to high preparation temperature. The amorphous carbon films deposited over a rough quartz substrate reveal nucleating diamond like structures. The density of these nucleating diamond like structures was found to be independent of substrate temperature (700–900°C).

  14. CVD growth and field emission properties of nanostructured carbon films

    International Nuclear Information System (INIS)

    An investigation of the growth mechanisms, electronical and structural properties, and field emissions of carbon films obtained by chemical vapour deposition showed that field emissions from films composed of spatially oriented carbon nanotubes and plate-like graphite nanocrystals exhibit non-metallic behaviour. The experimental evidence of work function local reduction for carbon film materials is reported here. A model of the emission site is proposed and the mechanism of field emission from nanostructured carbon materials is described. In agreement with the model proposed here, the electron emission in different carbon materials results from sp3-like defects in an sp2 network of their graphite-like component. (author)

  15. Characterization of titanium oxynitride films deposited by low pressure chemical vapor deposition using amide Ti precursor

    Energy Technology Data Exchange (ETDEWEB)

    Song Xuemei; Gopireddy, Deepthi [Department of Chemical Engineering, University of Illinois at Chicago, Chicago, Illinois 60607 (United States); Takoudis, Christos G. [Department of Chemical Engineering, University of Illinois at Chicago, Chicago, Illinois 60607 (United States); Department of Bioengineering, University of Illinois at Chicago, Chicago, Illinois 60607 (United States)], E-mail: takoudis@uic.edu

    2008-07-31

    In this study, we investigate the use of an amide-based Ti-containing precursor, namely tetrakis(diethylamido)titanium (TDEAT), for TiN{sub x}O{sub y} film deposition at low temperature. Traditionally, alkoxide-based Ti-containing precursor, such as titanium tetra-isopropoxide (TTIP), along with NH{sub 3} is used for titanium oxynitride (TiN{sub x}O{sub y}) film deposition. When TTIP is used, at low temperatures it is difficult to form TiN{sub x}O{sub y} films with high N/O ratios. In this study, by using TDEAT, TiN{sub x}O{sub y} films are deposited on H-passivated Si (100) substrates in a cold wall reactor at 300 {sup o}C and 106 Pa. Rutherford backscattering spectroscopy analysis shows nitrogen incorporation in the TiN{sub x}O{sub y} films to be as high as 28 at.%. X-ray photoelectron spectroscopy analysis of as-deposited films confirms the formation of{sub .} TiN{sub x}O{sub y}, while Fourier transform infrared and Raman spectra indicate that the films have amorphous structure. Moreover, there is no detectable bulk carbon impurity and no SiO{sub 2} formation at the TiN{sub x}O{sub y}/Si interface. Upon annealing the as-deposited films in air at 750 deg. C for 30 min, they oxidize to TiO{sub 2} and crystallize to form a rutile structure with a small amount of anatase phase. Based on these results, TDEAT appears to be a promising precursor for both TiN{sub x}O{sub y} and TiO{sub 2} film deposition.

  16. Large-Scale Graphene Film Deposition for Monolithic Device Fabrication

    Science.gov (United States)

    Al-shurman, Khaled

    and on the silicon-based substrate. Large- area bilayer graphene film was formed on silicon based platform. COMSOL Multiphysics was used to investigate the CVD graphene growth on Ni films. Factors affecting CVD graphene synthesis include carbon solubility in Ni, growth time, growth temperature, as well as Ni film thickness. COMSOL model uses transport of diluted species, heat transfer in Ni thin film as well as deformed geometry module. In this particular research, the number of simulated graphene layers on Ni film was compared with experimental data. Also, the effect of many CVD parameters on graphene film fabrication is stated. In conclusion, a novel method for direct large-scale graphene film fabrication on silicon based platform at low temperature was achieved using hot-filament chemical vapor deposition.

  17. Antimicrobial Properties of Diamond-Like Carbon/Silver Nanocomposite Thin Films Deposited on Textiles: Towards Smart Bandages

    Directory of Open Access Journals (Sweden)

    Tadas Juknius

    2016-05-01

    Full Text Available In the current work, a new antibacterial bandage was proposed where diamond-like carbon with silver nanoparticle (DLC:Ag-coated synthetic silk tissue was used as a building block. The DLC:Ag structure, the dimensions of nanoparticles, the silver concentration and the silver ion release were studied systematically employing scanning electron microscopy, energy dispersive X-ray spectroscopy and atomic absorption spectroscopy, respectively. Antimicrobial properties were investigated using microbiological tests (disk diffusion method and spread-plate technique. The DLC:Ag layer was stabilized on the surface of the bandage using a thin layer of medical grade gelatin and cellulose. Four different strains of Staphylococcus aureus extracted from humans’ and animals’ infected wounds were used. It is demonstrated that the efficiency of the Ag+ ion release to the aqueous media can be increased by further RF oxygen plasma etching of the nanocomposite. It was obtained that the best antibacterial properties were demonstrated by the plasma-processed DLC:Ag layer having a 3.12 at % Ag surface concentration with the dominating linear dimensions of nanoparticles being 23.7 nm. An extra protective layer made from cellulose and gelatin with agar contributed to the accumulation and efficient release of silver ions to the aqueous media, increasing bandage antimicrobial efficiency up to 50% as compared to the single DLC:Ag layer on textile.

  18. Growth of graphene films from non-gaseous carbon sources

    Science.gov (United States)

    Tour, James; Sun, Zhengzong; Yan, Zheng; Ruan, Gedeng; Peng, Zhiwei

    2015-08-04

    In various embodiments, the present disclosure provides methods of forming graphene films by: (1) depositing a non-gaseous carbon source onto a catalyst surface; (2) exposing the non-gaseous carbon source to at least one gas with a flow rate; and (3) initiating the conversion of the non-gaseous carbon source to the graphene film, where the thickness of the graphene film is controllable by the gas flow rate. Additional embodiments of the present disclosure pertain to graphene films made in accordance with the methods of the present disclosure.

  19. Preparation and analysis of amorphous carbon films deposited from (C{sub 6}H{sub 12})/Ar/He chemistry for application as the dry etch hard mask in the semiconductor manufacturing process

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Seungmoo [Department of Materials Science and Engineering, Korea University, Seoul, 136-701 (Korea, Republic of); TC Technology Team, Samsung Electronics Co. Ltd., Gyeounggi-Do, 446-711 (Korea, Republic of); Won, Jaihyung; Choi, Jongsik [TC Technology Team, Samsung Electronics Co. Ltd., Gyeounggi-Do, 446-711 (Korea, Republic of); Jang, Samseok [Department of Materials Science and Engineering, Korea University, Seoul, 136-701 (Korea, Republic of); Jee, Yeonhong; Lee, Hyeondeok [TC Technology Team, Samsung Electronics Co. Ltd., Gyeounggi-Do, 446-711 (Korea, Republic of); Byun, Dongjin, E-mail: dbyun@korea.ac.kr [Department of Materials Science and Engineering, Korea University, Seoul, 136-701 (Korea, Republic of)

    2011-08-01

    Amorphous carbon layers (ACL) were deposited on Si (100) wafers by plasma enhanced chemical vapor deposition (PECVD) by using 1-hexene (C{sub 6}H{sub 12}) as a carbon source for dry etch hard mask of semiconductor devices manufacturing process. The deposition characteristics and film properties were investigated by means of ellipsometry, Raman spectroscopy, X-ray photo electron spectroscopy (XPS) and stress analysis. Hardness, Young's modulus, and surface roughness of ACL deposited at 550 deg. C were investigated by using nano-indentation and AFM. The deposition rate was decreased from 5050 A/min to 2160 A/min, and dry etch rate was decreased from 2090 A/min to 1770 A/min, and extinction coefficient was increased from 0.1 to 0.5. Raman analysis revealed a higher shift of the G-peak and a lower shift of the D-peak and the increase of I(D)/I(G) ratio as the deposition temperature was increased from 350 deg. C to 550 deg. C. XPS results of ACL deposited at 550 deg. C revealed a carbon 1s binding energy of 284.4 eV. The compressive film stress was decreased from 2.95 GPa to 1.28 GPa with increasing deposition temperature. The hardness and Young's modulus of ACL deposited at 550 deg. C were 5.8 GPa and 48.7 GPa respectively. The surface roughness RMS of ACL deposited at 550 deg. C was 2.24 A, and that after cleaning in diluted HF solution (H{sub 2}O:HF = 200:1), SC1 (NH{sub 4}OH:H{sub 2}O{sub 2}:H{sub 2}O = 1:4:20) solution, and sulfuric acid solution (H{sub 2}SO{sub 4}:H{sub 2}O{sub 2} = 6:1) was 2.28 A, 2.30 A and 7.34 A, respectively. The removal amount of ACL deposited at 550 deg. C in diluted HF solution, SC1 solution and sulfuric acid solution was 6 A, 36 A and 110 A, respectively. These results demonstrated the viability of ACL deposited by PECVD from C{sub 6}H{sub 12} at 550 deg. C for application as the dry etch hard mask in fabrication of semiconductor devices.

  20. Deposition of SiC thin films by PECVD

    CERN Document Server

    Cho, N I; Kim, C K

    1999-01-01

    The SiC films were deposited on Si substrate by the decomposition of CH sub 3 SiCl sub 3 (methylthrichlorosilane) molecules in a high frequency discharge field. From the Raman spectra, it is conjectured that the deposited film are formed into the polycrystalline structure. The photon absorption measurement reveal that the band gap of the electron energy state are to be 2.4 eV for SiC, and 2.6 eV for Si sub 0 sub . sub 4 C sub 0 sub . sub 6 , respectively. In the high power density regime, methyl-radicals decompose easily and increases the carbon concentration in plasma and result in the growing films.

  1. DLC Films Deposited by the DC PACVD Method

    Directory of Open Access Journals (Sweden)

    D. Palamarchuk

    2003-01-01

    Full Text Available DLC (Diamond-Like Carbon coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assisted Chemical Vapour Deposition method on steel substrates. One of these is the DC PACVD method for preparing DLC films.

  2. DLC Films Deposited by the DC PACVD Method

    OpenAIRE

    D. Palamarchuk; M. Zoriy; J. Gurovič; F. Černý; S. Konvičková; I. Hüttel

    2003-01-01

    DLC (Diamond-Like Carbon) coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assisted Chemical Vapour Deposition) method on steel substrates. One of these is the DC PACVD method for preparing DLC films.

  3. Field Emission Properties of Nitrogen-doped Amorphous Carbon Films

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    Nitrogen-doped amorphous carbon thin films are deposited on the ceramic substrates coated with Ti film by using direct current magnetron sputtering technique at N2 and Ar gas mixture atmosphere during deposition. The field emission properties of the deposited films have been investigated. The threshold field as low as 5.93V/μm is obtained and the maximum current density increases from 4μA/cm2 to 20.67μA/cm2 at 10.67V/μm comparing with undoped amorphous film. The results show that nitrogen doping plays an important role in field emission of amorphous carbon thin films.

  4. Deposition of biopolymer films on micromechanical sensors

    DEFF Research Database (Denmark)

    Keller, Stephan Sylvest; Gammelgaard, Lene; Jensen, Marie P.;

    2011-01-01

    The influence of various parameters on the spray-coating of thin films of poly(l-lactide) (PLLA) was investigated. The optimized processing conditions were used for deposition of the biodegradable polymer on arrays of SU-8 microcantilevers. The resonance frequency of the cantilevers before and af...

  5. Growth processes and surface properties of diamondlike carbon films

    International Nuclear Information System (INIS)

    In this study, we compare the deposition processes and surface properties of tetrahedral amorphous carbon (ta-C) films from filtered pulsed cathodic arc discharge (PCAD) and hydrogenated amorphous carbon (a-C:H) films from electron cyclotron resonance (ECR)-plasma source ion implantation. The ion energy distributions (IEDs) of filtered-PCAD at various filter inductances and Ar gas pressures were measured using an ion energy analyzer. The IEDs of the carbon species in the absence of background gas and at low gas pressures are well fitted by shifted Maxwellian distributions. Film hardness and surface properties show a clear dependence on the IEDs. ta-C films with surface roughness at an atomic level and thin (0.3-0.9 nm) graphitelike layers at the film surfaces were deposited at various filter inductances in the highly ionized plasmas with the full width at half maximum ion energy distributions of 9-16 eV. The a-C:H films deposited at higher H/C ratios of reactive gases were covered with hydrogen and sp3 bonded carbon-enriched layers due to the simultaneous interaction of hydrocarbon species and atomic hydrogen. The effects of deposited species and ion energies on film surface properties were analyzed. Some carbon species have insufficient energies to break the delocalized π(nC) bonds at the graphitelike film surface, and they can govern film formation via surface diffusion and coalescence of nuclei. Dangling bonds created by atomic hydrogen lead to uniform chemisorption of hydrocarbon species from the ECR plasmas. The deposition processes of ta-C and a-C:H films are discussed on the basis of the experimental results

  6. The effect of humidity on the tribological behavior of diamond-like carbon (DLC) film coated on WC-Co by physical vapor deposition method

    Energy Technology Data Exchange (ETDEWEB)

    Oezmen, Y.; Tanaka, A. [AIST, Tsukuba (Japan). Mech. Eng. Lab.; Sumiya, T. [Nanotec Co., Kasinoha, 277-0882, Kashiwa (Japan)

    2000-11-01

    DLC films have been coated by PVD on WC-Co substrate with and without Si interface. They have been tested under low ({proportional_to}20%) and high ({proportional_to}80%) humidity conditions by reciprocating friction and wear apparatus. For ascertaining the wear mechanism from the topographies of DLC films, optical and SEM images of wear tracks have been taken. Wear debris particles behave as an abrasive agent, depositing into the film and causing the start of failure. There are multiple wear mechanisms, such as fatigue, abrasion, etc., existing simultaneously in the wear of DLC film in both cases. Wear rate decreases as the total wear way increases. For the case of DLC coating without Si interface there is a good correlation between wear rate and friction coefficient. However, this harmony disappears for DLC/Si coating. A chemically activated process may be assumed as the controlling step in the micro crack propagation during the generation of a wear debris particle. The different tribological behaviors of the DLC coatings under different environmental conditions are explained. (orig.)

  7. Studies to Enhance Superconductivity in Thin Film Carbon

    Science.gov (United States)

    Pierce, Benjamin; Brunke, Lyle; Burke, Jack; Vier, David; Steckl, Andrew; Haugan, Timothy

    2012-02-01

    With research in the area of superconductivity growing, it is no surprise that new efforts are being made to induce superconductivity or increase transition temperatures (Tc) in carbon given its many allotropic forms. Promising results have been published for boron doping in diamond films, and phosphorus doping in highly oriented pyrolytic graphite (HOPG) films show hints of superconductivity.. Following these examples in the literature, we have begun studies to explore superconductivity in thin film carbon samples doped with different elements. Carbon thin films are prepared by pulsed laser deposition (PLD) on amorphous SiO2/Si and single-crystal substrates. Doping is achieved by depositing from (C1-xMx) single-targets with M = B4C and BN, and also by ion implantation into pure-carbon films. Previous research had indicated that Boron in HOPG did not elicit superconducting properties, but we aim to explore that also in thin film carbon and see if there needs to be a higher doping in the sample if trends were able to be seen in diamond films. Higher onset temperatures, Tc , and current densities, Jc, are hoped to be achieved with doping of the thin film carbon with different elements.

  8. Effect of the pulsed laser deposition conditions on the tribological properties of thin-film nanostructured coatings based on molybdenum diselenide and carbon

    Science.gov (United States)

    Fominskii, V. Yu.; Grigor'ev, S. N.; Romanov, R. I.; Nevolin, V. N.

    2012-04-01

    The structural state and tribological properties of gradient and composite antifriction coatings produced by pulsed laser codeposition from MoSe2(Ni) and graphite targets are studied. The coatings are deposited onto steel substrates in vacuum and an inert gas, and an antidrop shield is used to prevent the deposition of micron-size particles from a laser jet onto the coating. The deposition of a laser jet from the graphite target and the application of a negative potential to the substrate ensure additional high-energy atom bombardment of growing coatings. Comparative tribological tests performed at a relative air humidity of ˜50% demonstrate that the "drop-free" deposition of a laser-induced atomic flux in the shield shadow significantly improves the antifriction properties of MoSe x coatings, decreasing the friction coefficient from 0.07 to 0.04. The best tribological properties, which combine a low friction coefficient and high wear resistance, are detected in drop-free MoSe x coatings additionally alloyed with carbon (up to ˜55 at %) and subjected to effective bombardment by high-energy atoms during growth. Under these conditions, a dense nanocomposite structure containing the self-lubricating MoSe2 phase and an amorphous carbon phase with a rather high concentration of diamond bonds forms.

  9. Photoluminescence and Raman Spectroscopy Studies of Carbon Nitride Films

    OpenAIRE

    Hernández-Torres, J.; Gutierrez-Franco, A.; P. G. González; L. García-González; Hernandez-Quiroz, T.; Zamora-Peredo, L.; V.H. Méndez-García; A. Cisneros-de la Rosa

    2016-01-01

    Amorphous carbon nitride films with N/C ratios ranging from 2.24 to 3.26 were deposited by reactive sputtering at room temperature on corning glass, silicon, and quartz as substrates. The average chemical composition of the films was obtained from the semiquantitative energy dispersive spectroscopy analysis. Photoluminescence measurements were performed to determine the optical band gap of the films. The photoluminescence spectra displayed two peaks: one associated with the substrate and the ...

  10. Coadsorption of nitric oxide and carbon monoxide on the nickel clusters deposited onto MgO(111) film formed on Mo(110)

    Science.gov (United States)

    Magkoev, Tamerlan T.

    2004-10-01

    Coadsorption of NO and CO molecules on the Ni clusters deposited on MgO(111) film formed on a Mo(110) crystal has been studied by reflection-absorption infrared spectroscopy (RAIRS) and temperature programmed desorption (TPD). It is found that adsorption of NO molecules strongly affects the state of CO molecules, which were initially adsorbed on the Ni clusters. The observed features in RAIRS and TPD spectra are attributed to the change of the CO adsorption site and geometry, which is induced by NO adsorption.

  11. Magnetic properties of LCMO deposited films

    Science.gov (United States)

    Park, Seung-Iel; Jeong, Kwang Ho; Cho, Young Suk; Kim, Chul Sung

    2002-04-01

    La-Ca-Mn-O films were deposited with various thickness (500, 1000 and 1500°C) by RF-magnetron sputtering at 700°C and by the spin coating of sol-gel method at 400°C on LaAlO 3(1 0 0) and Si(1 0 0) single-crystal substrates. The crystal structure and chemical composition of the film grown by RF sputtering method were orthorhombic and La 0.89Ca 0.11MnO 3, respectively, while the film prepared by sol-gel spin coating was cubic with La 0.7Ca 0.3MnO 3. The temperature dependence of the resistance for the film grown by RF sputtering method with the thickness of 1000°C shows that a semiconductor-metal transition occurs at 242 K. The relative maximum magnetoresistance is about 273% at 226 K.

  12. Intrinsic graphene field effect transistor on amorphous carbon films

    OpenAIRE

    Tinchev, Savcho

    2013-01-01

    Fabrication of graphene field effect transistor is described which uses an intrinsic graphene on the surface of as deposited hydrogenated amorphous carbon films. Ambipolar characteristic has been demonstrated typical for graphene devices, which changes to unipolar characteristic if the surface graphene was etched in oxygen plasma. Because amorphous carbon films can be growth easily, with unlimited dimensions and no transfer of graphene is necessary, this can open new perspective for graphene ...

  13. Influence of the diameter of single-walled carbon nanotube bundles on the optoelectronic performance of dry-deposited thin films.

    Science.gov (United States)

    Mustonen, Kimmo; Susi, Toma; Kaskela, Antti; Laiho, Patrik; Tian, Ying; Nasibulin, Albert G; Kauppinen, Esko I

    2012-01-01

    The optoelectronic performance of thin films of single-walled carbon nanotubes (SWCNTs) was studied with respect to the properties of both individual nanotubes and their bundles. The SWCNTs were synthesized in a hot wire generator aerosol reactor, collected by gas filtration and dry-transferred onto various substrates. By thus completely avoiding liquid dispersion steps, we were able to avoid any artifacts from residual surfactants or sonication. We found that bundle lengths determined the thin-film performance, as would be expected for highly resistive bundle-bundle junctions. However, we found no evidence that contact resistances were affected by the bundle diameters, although they did play a secondary role by simply affecting the absorption. The individual SWCNT diameters and their graphitization level as gauged by the Raman D band intensity did not show any clear correlation with the overall performance.

  14. Influence of the diameter of single-walled carbon nanotube bundles on the optoelectronic performance of dry-deposited thin films

    Directory of Open Access Journals (Sweden)

    Kimmo Mustonen

    2012-10-01

    Full Text Available The optoelectronic performance of thin films of single-walled carbon nanotubes (SWCNTs was studied with respect to the properties of both individual nanotubes and their bundles. The SWCNTs were synthesized in a hot wire generator aerosol reactor, collected by gas filtration and dry-transferred onto various substrates. By thus completely avoiding liquid dispersion steps, we were able to avoid any artifacts from residual surfactants or sonication. We found that bundle lengths determined the thin-film performance, as would be expected for highly resistive bundle–bundle junctions. However, we found no evidence that contact resistances were affected by the bundle diameters, although they did play a secondary role by simply affecting the absorption. The individual SWCNT diameters and their graphitization level as gauged by the Raman D band intensity did not show any clear correlation with the overall performance.

  15. Measurement of 5-eV atomic oxygen using carbon-based films: preliminary results

    OpenAIRE

    White, C de B; Roberts, G. T.; Chambers, A.R.

    2005-01-01

    Carbon-based sensors have been developed to measure the atmospheric neutral atomic oxygen (AO) flux experienced by spacecraft in low Earth orbit. Thin- and thick-film carbon sensor elements were deposited onto an alumina substrate between thick-film gold tracks and silver palladium solder pads. AO flux is deduced by measuring resistance changes as the carbon film erodes and applying a simple theory. A wide range of responses were observed that are dependent on the deposition process and post ...

  16. Pulsed laser deposition of pepsin thin films

    Energy Technology Data Exchange (ETDEWEB)

    Kecskemeti, G. [Department of Optics and Quantum Electronics, University of Szeged, H-6720 Szeged, Dom ter 9 (Hungary)]. E-mail: kega@physx.u-szeged.hu; Kresz, N. [Department of Optics and Quantum Electronics, University of Szeged, H-6720 Szeged, Dom ter 9 (Hungary); Smausz, T. [Hungarian Academy of Sciences and University of Szeged, Research Group on Laser Physics, H-6720 Szeged, Dom ter 9 (Hungary); Hopp, B. [Hungarian Academy of Sciences and University of Szeged, Research Group on Laser Physics, H-6720 Szeged, Dom ter 9 (Hungary); Nogradi, A. [Department of Ophthalmology, University of Szeged, H-6720, Szeged, Koranyi fasor 10-11 (Hungary)

    2005-07-15

    Pulsed laser deposition (PLD) of organic and biological thin films has been extensively studied due to its importance in medical applications among others. Our investigations and results on PLD of a digestion catalyzing enzyme, pepsin, are presented. Targets pressed from pepsin powder were ablated with pulses of an ArF excimer laser ({lambda} = 193 nm, FWHM = 30 ns), the applied fluence was varied between 0.24 and 5.1 J/cm{sup 2}. The pressure in the PLD chamber was 2.7 x 10{sup -3} Pa. The thin layers were deposited onto glass and KBr substrates. Our IR spectroscopic measurements proved that the chemical composition of deposited thin films is similar to that of the target material deposited at 0.5 and 1.3 J/cm{sup 2}. The protein digesting capacity of the transferred pepsin was tested by adapting a modified 'protein cube' method. Dissolution of the ovalbumin sections proved that the deposited layers consisted of catalytically active pepsin.

  17. Deposit of thin films for Tokamaks conditioning

    International Nuclear Information System (INIS)

    discharge plasma, created in a calibrated mixture of methane-hydrogen during the hydrogenated amorphous carbon film deposit on the vessel wall of Novillo tokamak, were determined by mass spectrometry. By way of measuring the emission lines of the carbon and oxygen impurities in intense discharges, the time required by the plasma to interact with the wall was estimated. In addition to it, the temporal conduct of the emission line intensity of these impurities was observed by means of an intensified CCD detector. Once an ∼ 10 % of helium was introduced in the operating gas of the tokamak discharges, a 25-42 eV time variation of the electron temperature was measured using the intensity ratio technique. (Author)

  18. Laser-assisted deposition of thin C60 films

    DEFF Research Database (Denmark)

    Schou, Jørgen; Canulescu, Stela; Fæster, Søren

    Metal and metal oxide films with controlled thickness from a fraction of a monolayer up more than 1000 nm and known stoichiometry can be produced by pulsed laser deposition (PLD) relatively easily, and (PLD) is now a standard technique in all major research laboratories within materials science....... However, organic materials are usually not well suited for direct laser irradiation, since the organic molecules may suffer from fragmentation by the laser light. We have, therefore, explored the possible fragmentation of organic molecules by attempting to produce thin films of C60 which is a strongly...... bound carbon molecule with a well-defined mass (M = 720 amu) and therefore a good, organic test molecule. C60 fullerene thin films of average thickness of more than 100 nm was produced in vacuum by matrix-assisted pulsed laser evaporation (MAPLE). A 355 nm Nd:YAG laser was directed onto a frozen target...

  19. Field Emission from Nanostructured Carbon Films on Si Tips

    Institute of Scientific and Technical Information of China (English)

    王万录; 廖克俊; 胡成果; 方亮

    2001-01-01

    Nanostructured carbon thin films on Si tips were prepared by hot filament chemical vapour deposition at different substrate temperatures. The Si tips and films were obtained under various deposition conditions in the same reaction chamber. It was found that the field emission properties from graphite-like nanostructured carbon on Si tips were greatly improved, compared with those of nanodiamond films on Si tips. A turn-on field of 1.2 V. cm-1was observed for high sp2 content thin films on Si tips. The analysis showed that the field emission enhancement effect was caused by the tip geometry, tunnel effect and sp2 content in the films. However, the geometrical enhancement was greater than that of the tunnel and sp2 content effects.

  20. Nitrogen doping in camphoric carbon films and its application to photovoltaic cell

    Energy Technology Data Exchange (ETDEWEB)

    Mominuzzaman, Sharif M. [Department of Electrical and Electronic Engineering, Bangladesh University of Engineering and Technology, Dhaka 1000 (Bangladesh); Rusop, Mohamad; Soga, Tetsuo; Jimbo, Takashi [Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555 (Japan); Umeno, Masayoshi [Department of Electronic Engineering, Chubu University, Kasugai 487-8501 (Japan)

    2006-11-23

    Carbon films have been deposited on quartz and single-crystal silicon substrates by pulsed laser deposition technique. The soot for the target was obtained from burning camphor, a natural source. The effect of nitrogen (N) incorporation in camphoric carbon film is investigated. Optical gap for the undoped film is about 0.95eV. The optical gap remains unchanged for low N content and decreases to about 0.7eV. With higher N content the optical gap increases. The resistivity of the carbon film is increased with N content initially and decreases with higher N content till the film is deposited at 30mTorr. The results indicate successful doping for the film deposited at low nitrogen content. The J-V characteristics of N-incorporated carbon/silicon photovoltaic cell under illumination are observed to improve upon N-incorporation in carbon layer. (author)

  1. Optical properties and morphology of PECVD deposited titanium dioxide films

    Directory of Open Access Journals (Sweden)

    J. Kowalski

    2009-12-01

    Full Text Available Purpose: The purpose of the present work is to compare the structure and optical properties, with respect to their potential optical applications, of titanium dioxide films synthesized with the PECVD method from two different precursor materials, namely titanium tetrachloride and titanium tetraethoxide (TEOT.Design/methodology/approach: Optical properties as well as thickness of the films were analyzed by means of Variable Angle Spectroscopic Ellipsometry (VASE. Morphology studies were carried out by Scanning Electron Microscopy (SEM and chemical composition characterisation was performed with the help of Energy Dispersive Spectroscopy (EDS unit coupled with the electron microscope.Findings: Optical parameters approaching those of titanium dioxide were achieved for both precursors. Studies of morphology show that the films produced from TEOT have favourable, smooth surface in contradiction to broccoli-like structure obtained for the chloride precursor. The type of substance used for titanium oxides synthesis determined chemical composition of the films resulting in their enrichment with either chlorine or carbon, depending on the precursor composition.Practical implications: The optical quality of the films is good enough to suggest their applications in stack multilayer interference filters. The refractive index values of these films advocate their use as high refractive index materials while their low extinction coefficients assure the devices transparency.Originality/value: The work presents deposition rates as well as the films optical properties, chemical composition and morphology in relation to operational parameters of their synthesis. It also provides a comparison of these characteristics for two competitive precursor compounds. Finally, it presents the capability of PECVD method for the deposition of optical coatings onto polymer substrates.

  2. Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

    Directory of Open Access Journals (Sweden)

    Nutthanun Moolsradoo

    2010-01-01

    Full Text Available Sulfur-doped diamond-like carbon films (S-DLC fabricated from C2H2 and SF6 mixtures were used to study the effects of sulfur content and negative pulse bias voltage on the deposition and tribological properties of films prepared by plasma-based ion implantation (PBII. The structure and relative concentration of the films were analyzed by Raman spectroscopy and Auger electron spectroscopy. Hardness and elastic modulus of films were measured by nanoindentation hardness testing. Tribological characteristics of films were performed using a ball-on-disk friction tester. The results indicate that with the increasing sulfur content, the hardness and elastic modulus decrease. Additionally, by changing the negative pulse bias voltage from 0 kV to −5 kV, the hardness and elastic modulus increase, while the friction coefficient and specific wear rate tends to decrease. Moreover, at a negative pulse bias voltage of −5 kV and flow-rate ratio of 1 : 2, there is considerable improvement in friction coefficient of 0.05 under ambient air is due to the formation of a transfer films on the interface. The decrease in the friction coefficient of films doped with 4.9 at.% sulfur is greater under high vacuum (0.03 than under ambient air (>0.1.

  3. Morphology of CdSe films prepared by chemical bath deposition: The role of substrate

    Energy Technology Data Exchange (ETDEWEB)

    Simurda, M. [Charles University in Prague, Faculty of Mathematics and Physics, Ke Karlovu 3, 121 16 Prague 2 (Czech Republic); Nemec, P. [Charles University in Prague, Faculty of Mathematics and Physics, Ke Karlovu 3, 121 16 Prague 2 (Czech Republic)]. E-mail: nemec@karlov.mff.cuni.cz; Formanek, P. [Institut fuer Strukturphysik, Technische Universitaet Dresden, Zellescher Weg 16, D-01062 Dresden (Germany); Nemec, I. [Charles University in Prague, Faculty of Science, Albertov 6, 128 43 Prague 2 (Czech Republic); Nemcova, Y. [Charles University in Prague, Faculty of Science, Albertov 6, 128 43 Prague 2 (Czech Republic); Maly, P. [Charles University in Prague, Faculty of Mathematics and Physics, Ke Karlovu 3, 121 16 Prague 2 (Czech Republic)

    2006-07-26

    We combine optical spectroscopy and transmission electron microscopy to study the growth and the structural morphology of CdSe films prepared by chemical bath deposition (CBD) on two considerably different substrates. The films grown on glass are compact and strongly adherent to the substrate. On the contrary, the films deposited on carbon-coated glass (with approx. 20 nm thick amorphous carbon layer) are only loosely adherent to the substrate. Using transmission electron microscopy we revealed that even though the films grown on both substrates are assembled from closely spaced nanocrystals with diameter of about 5 nm, the films morphology on the sub-micrometer scale is considerably different in the two cases. While the films deposited on glass are rather compact, the films prepared on carbon layer have high porosity and are formed by interconnected spheres which size is dependent on the duration of deposition (e.g. 155 nm for 6 h and 350 nm for 24 h). This shows that the choice of the substrate for CBD has a stronger influence on the sub-micrometer film morphology than on the properties of individual nanocrystals forming the film.

  4. Morphology of CdSe films prepared by chemical bath deposition: The role of substrate

    International Nuclear Information System (INIS)

    We combine optical spectroscopy and transmission electron microscopy to study the growth and the structural morphology of CdSe films prepared by chemical bath deposition (CBD) on two considerably different substrates. The films grown on glass are compact and strongly adherent to the substrate. On the contrary, the films deposited on carbon-coated glass (with approx. 20 nm thick amorphous carbon layer) are only loosely adherent to the substrate. Using transmission electron microscopy we revealed that even though the films grown on both substrates are assembled from closely spaced nanocrystals with diameter of about 5 nm, the films morphology on the sub-micrometer scale is considerably different in the two cases. While the films deposited on glass are rather compact, the films prepared on carbon layer have high porosity and are formed by interconnected spheres which size is dependent on the duration of deposition (e.g. 155 nm for 6 h and 350 nm for 24 h). This shows that the choice of the substrate for CBD has a stronger influence on the sub-micrometer film morphology than on the properties of individual nanocrystals forming the film

  5. Beam-Induced Deposition of Thin Metallic Films.

    Science.gov (United States)

    Funsten, Herbert Oliver, III

    1990-01-01

    Ion and electron beam induced deposition (BID) of thin (1 μm), conductive films is accomplished by dissociating and removing the nonmetallic components of an adsorbed, metal-based, molecular gas. Current research has focused primarily on room temperature (monolayer adsorption) BID using electrons and slow, heavy ions. This study investigates low temperature (50 to 200 K) BID in which the condensation of the precursor gases (SnCl _4 and (CH_3) _4Sn) maximizes the efficiency of the incident radiation which can create and remove nonmetallic fragments located several monolayers below the film surface. The desired properties of the residual metallic films are produced by using as incident radiation either nuclear (35 keV Ar ^+) or electronic (2 keV electrons, 25 keV H^+, or 50 keV H ^+) energy loss mechanisms. Residual films are analyzed ex situ by Scanning Electron Microscopy (SEM), thickness measurements, resistivity measurements, Rutherford Backscattering Spectroscopy (RBS), and infrared spectroscopy. Low temperature BID film growth models, which are derived from both a computer simulation and a mathematical analysis, closely agree. Both the fragmentation and sputtering cross sections for a particular ion and energy are derived for films created from (CH_3) _4Sn. The fragmentation cross section, which corresponds to film growth, is roughly related to the electronic stopping power by the 1.9 power. The loss of carbon in films which were created from (CH_3) _4Sn is strongly dependent on the nuclear stopping power. Film growth rates for low temperature BID have been found to be 10 times those of room temperature BID.

  6. Substrate heating measurements in pulsed ion beam film deposition

    Energy Technology Data Exchange (ETDEWEB)

    Olson, J.C.; Davis, H.A.; Rej, D.J.; Waganaar, W.J. [Los Alamos National Lab., NM (United States); Tallant, D.R. [Cornell Univ., Ithaca, NY (United States). Materials Science and Engineering Dept.; Thompson, M.O. [Sandia National Labs., Albuquerque, NM (United States)

    1995-05-01

    Diamond-like Carbon (DLC) films have been deposited at Los Alamos National Laboratory by pulsed ion beam ablation of graphite targets. The targets were illuminated by an intense beam of hydrogen, carbon, and oxygen ions at a fluence of 15-45 J/cm{sup 2}. Ion energies were on the order of 350 keV, with beam current rising to 35 kA over a 400 ns ion current pulse. Raman spectra of the deposited films indicate an increasing ratio of sp{sup 3} to sp{sup 2} bonding as the substrate is moved further away from the target and further off the target normal. Using a thin film platinum resistor at varying positions, we have measured the heating of the substrate surface due to the kinetic energy and heat of condensation of the ablated material. This information is used to determine if substrate heating is responsible for the lack of DLC in positions close to the target and near the target normal. Latest data and analysis will be presented.

  7. ENHANCING ADHESION OF TETRAHEDRAL AMORPHOUS CARBON FILMS

    Institute of Scientific and Technical Information of China (English)

    Zhao Yuqing; Lin Yi; Wang Xiaoyan; Wang Yanwu; Wei Xinyu

    2005-01-01

    Objective The high energy ion bombardment technique is applied to enhancing the adhesion of the tetrahedral amorphous carbon (TAC) films deposited by the filtered cathode vacuum arc (FCVA). Methods The abrasion method, scratch method, heating and shaking method as well as boiling salt solution method is used to test the adhesion of the TAC films on various material substrates. Results The test results show that the adhesion is increased as the ion bombardment energy increases. However, if the bombardment energy were over the corresponding optimum value, the adhesion would be enhanced very slowly for the harder material substrates and drops quickly, for the softer ones. Conclusion The optimum values of the ion bombardment energy are larger for the harder materials than that for the softer ones.

  8. Angular magnetoresistance in semiconducting undoped amorphous carbon thin films

    Energy Technology Data Exchange (ETDEWEB)

    Sagar, Rizwan Ur Rehman; Saleemi, Awais Siddique; Zhang, Xiaozhong, E-mail: xzzhang@tsinghua.edu.cn [Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, People' s Republic of China and Beijing National Center for Electron Microscopy, Beijing 100084 (China)

    2015-05-07

    Thin films of undoped amorphous carbon thin film were fabricated by using Chemical Vapor Deposition and their structure was investigated by using High Resolution Transmission Electron Microscopy and Raman Spectroscopy. Angular magnetoresistance (MR) has been observed for the first time in these undoped amorphous carbon thin films in temperature range of 2 ∼ 40 K. The maximum magnitude of angular MR was in the range of 9.5% ∼ 1.5% in 2 ∼ 40 K. The origin of this angular MR was also discussed.

  9. Cobalt cluster-assembled thin films deposited by low energy cluster beam deposition: Structural and magnetic investigations of deposited layers

    International Nuclear Information System (INIS)

    Cobalt cluster-assembled thin films were deposited on amorphous-carbon-coated copper grids and on silicon substrates at room temperature by low energy cluster beam deposition. Characterizations using high-resolution transmission electronic microscopy and atomic force microscopy reveal randomly stacked agglomerates of 9-11 nm diameter, which are themselves composed of small 3.6 nm diameter fcc cobalt clusters. The films are ferromagnetic up to room temperature and above, which implies that the clusters are exchange coupled. The approach to saturation is analyzed within the random anisotropy model. The values of the exchange coefficient A and the anisotropy constant K then derived are discussed. The temperature dependence of the coercivity below 100 K is discussed in terms of thermal activation effects. All results indicate that the fundamental entity governing the magnetic behaviors is constituted by the 9-11 nm diameter agglomerates rather than by the clusters themselves

  10. AFM Study on Reliability of Nanoscale DLC Films Deposited by ECR-MPCVD

    Institute of Scientific and Technical Information of China (English)

    ZHU Shou-xing; ZHU Shi-gen; DING Jian-ning

    2004-01-01

    Nanoindentation, scratch and wear tests based on an atomic force microscope (AFM) were carried out to study the reliability of diamond-like carbon (DLC) films, deposited by electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-MPCVD). The predictors for film reliability were given to investigate the resistance of DLC films to indent, scratch, and wear. Experimental results showed that the films at 64.9nm and 12.07nm exhibited better reliability than thin one at 2.78nm, 4.48nm. In addition, the reliability strength of films above 12.07nm went stable, and the films showed good performance of anti-indentation, anti-scratch and anti-wear. Finally, size effect of nanoscale monolayer film was introduced to explain the reliability of nanoscale DLC films.

  11. Friction and Wear of Ion-Beam-Deposited Diamondlike Carbon on Chemical-Vapor-Deposited, Fine-Grain Diamond

    Science.gov (United States)

    Miyoshi, Kazuhisa; Wu, Richard L. C.; Lanter, William C.

    1996-01-01

    Friction and wear behavior of ion-beam-deposited diamondlike carbon (DLC) films coated on chemical-vapor-deposited (CVD), fine-grain diamond coatings were examined in ultrahigh vacuum, dry nitrogen, and humid air environments. The DLC films were produced by the direct impact of an ion beam (composed of a 3:17 mixture of Ar and CH4) at ion energies of 1500 and 700 eV and an RF power of 99 W. Sliding friction experiments were conducted with hemispherical CVD diamond pins sliding on four different carbon-base coating systems: DLC films on CVD diamond; DLC films on silicon; as-deposited, fine-grain CVD diamond; and carbon-ion-implanted, fine-grain CVD diamond on silicon. Results indicate that in ultrahigh vacuum the ion-beam-deposited DLC films on fine-grain CVD diamond (similar to the ion-implanted CVD diamond) greatly decrease both the friction and wear of fine-grain CVD diamond films and provide solid lubrication. In dry nitrogen and in humid air, ion-beam-deposited DLC films on fine-grain CVD diamond films also had a low steady-state coefficient of friction and a low wear rate. These tribological performance benefits, coupled with a wider range of coating thicknesses, led to longer endurance life and improved wear resistance for the DLC deposited on fine-grain CVD diamond in comparison to the ion-implanted diamond films. Thus, DLC deposited on fine-grain CVD diamond films can be an effective wear-resistant, lubricating coating regardless of environment.

  12. TFA-MOD (Metal Organic Deposition Using Trifluoroacetates) Films with Thickness Greater Than 1 Micron by a Single Deposition

    Science.gov (United States)

    Araki, Takeshi; Hayashi, Mariko; Fuke, Hiroyuki

    The key to obtaining films with thickness greater than 1 micron by a single TFA-MOD deposition is a crack-preventing material. The ratio of fluorine atoms to total fluorine and hydrogen atoms (RF) of the chemical is important for forming excellent superconducting films. Although hydrogen atoms lead to carbon residue, which fatally deteriorates superconducting properties of the resulting film, hydrogen atoms form strong hydrogen bonds with trifluoroacetates and have an excellent crack-prevention effect. The RF range from 0.75 to 0.96 is effective for obtaining single-coated, thick, high-critical-current-density superconducting films.

  13. Piezoresistive Effect of Doped carbon Nanotube/Cellulose Films

    Institute of Scientific and Technical Information of China (English)

    王万录; 廖克俊; 李勇; 王永田

    2003-01-01

    The strain-induced resistance changes in iodine-doped and undoped carbon nanotube films were investigated by a three-point bending test. Carbon nanotubes were fabricated by hot filament chemical vapour deposition. The experimental results showed that there has a striking piezoresistive effect in carbon nanotube films. The gauge factor for I-doped and undoped carbon nanotube films under 500 microstrain was about 125 and 65 respectively at room temperature, exceeding that of polycrystalline silicon (30) at 35℃. The origin of the piezoresistivity in the films may be ascribed to a strain-induced change in the band gap for the doped tubes and to the intertube contact resistance for the undoped tubes.

  14. Synthesis of Aligned Carbon Nanotubes by Thermal Chemical Vapor Deposition

    Institute of Scientific and Technical Information of China (English)

    LI Gang; ZHOU Ming; MA Weiwei; CAI Lan

    2009-01-01

    Single crystal silicon was found to be very beneficial to the growth of aligned carbon nanotubes by chemical vapor deposition with C2H2 as carbon source. A thin film of Ni served as catalyst was deposited on the Si substrate by the K575X Peltier Cooled High Resolution Sputter Coater before growth. The growth properties of carbon nanotubes were studied as a function of the Ni catalyst layer thickness. The diameter, growth rate and areal density of the carbon nanotubes were controlled by the initial thickness of the catalyst layer. Steric hindrance between nanotubes forces them to grow in well-aligned manner at an initial stage of growth. Transmission electron microscope analysis revealed that nanotubes grew by a tip growth mechanism.

  15. Tribological behavior and film formation mechanisms of carbon nanopearls

    Science.gov (United States)

    Hunter, Chad Nicholas

    Carbon nanopearls (CNPs) are amorphous carbon spheres that contain concentrically-oriented nanometer-sized graphitic flakes. Because of their spherical shape, size (˜150 nm), and structure consisting of concentrically oriented nano-sized sp2 flakes, CNPs are of interest for tribological applications, in particular for use in solid lubricant coatings. These studies were focused on investigating mechanisms of CNP lubrication, development of methods to deposit CNP onto substrates, synthesizing CNP-gold hybrid films using Matrix Assisted Pulsed Laser Evaporation (MAPLE) and magnetron sputtering, and studying plasmas and other species present during film deposition using an Electrostatic Quadrupole Plasma (EQP) analyzer. CNPs deposited onto silicon using drop casting with methanol showed good lubricating properties in sliding contacts under dry conditions, where a transfer film was created in which morphology changed from nano-sized spheres to micron-sized agglomerates consisting of many highly deformed CNPs in which the nano-sized graphene flakes are sheared from the wrapped layer structure of the CNPs. The morphology of carbon nanopearl films deposited using a MAPLE system equipped with a 248 nm KrF excimer laser source was found to be influenced by multiple factors, including composition of the matrix solvent, laser energy and repetition rate, background pressure, and substrate temperature. The best parameters for depositing CNP films that are disperse, droplet-free and have the maximum amount of material deposited are as follows: toluene matrix, 700 mJ, 1 Hz, 100°C substrate temperature, and unregulated vacuum pressure. During depositions using MAPLE and sputtering in argon, electron ionization of toluene vapor generated from the MAPLE target and charge exchange reactions between toluene vapor and the argon plasma generated by the magnetron caused carbon to be deposited onto the gold sputter target. Thin films deposited under these conditions contained high

  16. Electromagnetic interference shielding effectiveness of nanoreinforced polymer composites deposited with conductive metallic thin films

    International Nuclear Information System (INIS)

    The effect of using conductive metallic thin films deposited on high density polyethylene (HDPE) and styrene butadiene copolymer (SBC) in conjunction with carbon nanofiber (CNF) reinforcement of HDPE and SBC was investigated in order to improve the electromagnetic interference shielding effectiveness (EMI SE) of the structures. Thin films of copper, silver and aluminum were deposited by thermal evaporation onto the polymeric matrices and its composites (0–20 wt.% of CNFs). Results show a synergistic effect of the two approaches (metallic coating and CNF reinforcement) toward improving the EMI SE. The chemical composition, surface morphology, carbon nanofiber distribution, thickness and microstructure of metallic coated polymers are examined using X-Ray Diffraction and Scanning Electron Microscopy. - Highlights: ► Metallic thin films were evaporated on carbon nanofiber reinforced polymers. ► The electromagnetic shielding effectiveness of the structures was evaluated. ► Thin films and carbon nanofibers synergistically improved the shielding effectiveness.

  17. Resonant infrared pulsed laser deposition of thin biodegradable polymer films

    DEFF Research Database (Denmark)

    Bubb, D.M.; Toftmann, B.; Haglund Jr., R.F.;

    2002-01-01

    Thin films of the biodegradable polymer poly(DL-lactide-co-glycolide) (PLGA) were deposited using resonant infrared pulsed laser deposition (RIR-PLD). The output of a free-electron laser was focused onto a solid target of the polymer, and the films were deposited using 2.90 (resonant with O...

  18. Pulsed electron beam deposition of highly oriented thin films of polytetrafluoroethylene

    Science.gov (United States)

    Chandra, Vimlesh; Manoharan, Solomon S.

    2008-04-01

    Thin films of polytetrafluoroethylene (PTFE) were deposited by pulsed electron deposition (PED) technique. The transmission electron microscopy (TEM) image of the RT fabricated (20 Å thick) film on carbon coated copper grid shows crystalline nature. Infrared spectra show one to one correspondence between PED ablated film and the PTFE bulk target. The asymmetrical and symmetrical -CF 2- stretching modes were observed at 1220 and 1156 cm -1, respectively. The -CF 2- wagging and bending modes occur at 644 and 512 cm -1, respectively. X-ray diffraction patterns of the film deposited at room temperature (RT) show oriented film along (1 0 0) plane of hexagonal structure and the crystalline nature is retained up to 300 °C on vacuum annealing. The room temperature fabricated film shows smooth and pin hole free surface whereas post-annealing brings discontinuity, roughness and pin holes.

  19. Electrochemical sensor for nitric oxide using layered films composed of a polycationic dendrimer and nickel(II) phthalocyaninetetrasulfonate deposited on a carbon fiber electrode

    International Nuclear Information System (INIS)

    We have developed an electrochemical sensor for nitric oxide that is based on multi-layers of nickel(II) phthalocyaninetetrasulfonate and a polyamidoamine dendrimer assembled on the surface of a carbon-fiber microelectrode. This sensor responds to nitric oxide at a working potential of 800 mV with a sensitivity of 5.54 pA∙μM-1 which, however, depends on the dendrimer layer position deposited on the microelectrode. The limit of detection is as low as 5.5 μM at a signal-to-noise ratio of 3. The electrode exhibits good selectivity for nitric oxide over common interferents including dopamine, nitrite, hydrogen peroxide, norepinephrine, epinephrine and ascorbic acid. (author)

  20. CdTe Films Deposited by Closed-space Sublimation

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    CdTe films are prepared by closed-space sublimation technology. Dependence of film crystalline on substrate materials and substrate temperature is investigated. It is found that films exhibit higher crystallinity at substrate temperature higher than 400℃. And the CdTe films deposited on CdS films with higher crystallinity have bigger crystallite and higher uniformity. Treatment with CdCl2 methanol solution promotes the crystallite growth of CdTe films during annealing.

  1. Electrophoretically-deposited solid film lubricants

    Energy Technology Data Exchange (ETDEWEB)

    Dugger, M.T.; Panitz, J.K.J.; Vanecek, C.W.

    1995-04-01

    An aqueous-based process that uses electrophoresis to attract powdered lubricant in suspension to a charged target was developed. The deposition process yields coatings with low friction, complies with environmental safety regulations, requires minimal equipment, and has several advantages over processes involving organic binders or vacuum techniques. This work focuses on development of the deposition process, includes an analysis of the friction coefficient of the material in sliding contact with stainless steel under a range of conditions, and a functional evaluation of coating performance in a precision mechanical device application. Results show that solid lubricant films with friction coefficients as low as 0.03 can be produced. A 0.03 friction coefficient is superior to solid lubricants with binder systems and is comparable to friction coefficients generated with more costly vacuum techniques.

  2. Influence of dc bias on amorphous carbon deposited by pulse laser ablation

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    Amorphous carbon films were deposited on single-crystalline silicon and K9 glass by pulse laser ablation using different negative substrate bias. Scanning electron microscope (SEM) was used to observe morphology of the surface. Thickness and refractive index of the film deposited on K9 glass were measured by ellipsometry. Micro-hardness of films was measured relatively to single crystal silicon. All films deposited on silicon were analyzed by Raman spectra. All spectra were deconvoluted to three peaks. Line-width ratios varied similarly with bias voltage when the laser energy was kept invariant.

  3. Low temperature temporal and spatial atomic layer deposition of TiO{sub 2} films

    Energy Technology Data Exchange (ETDEWEB)

    Aghaee, Morteza, E-mail: m.aghaee@tue.nl; Maydannik, Philipp S. [ASTRaL Group, Laboratory of Green Chemistry, Lappeenranta University of Technology, Sammonkatu 12, 50130 Mikkeli (Finland); Johansson, Petri; Kuusipalo, Jurkka [Paper Converting and Packaging Technology, Tampere University of Technology, P.O. Box 541, FI-33101 Tampere (Finland); Creatore, Mariadriana [Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven (Netherlands); Homola, Tomáš; Cameron, David C. [R& D Center for Low-Cost Plasma and Nanotechnology Surface Modification, Masaryk University, Kotlářská 2, 611 37 Brno (Czech Republic)

    2015-07-15

    Titanium dioxide films were grown by atomic layer deposition (ALD) using titanium tetraisopropoxide as a titanium precursor and water, ozone, or oxygen plasma as coreactants. Low temperatures (80–120 °C) were used to grow moisture barrier TiO{sub 2} films on polyethylene naphthalate. The maximum growth per cycle for water, ozone, and oxygen plasma processes were 0.33, 0.12, and 0.56 Å/cycle, respectively. X-ray photoelectron spectrometry was used to evaluate the chemical composition of the layers and the origin of the carbon contamination was studied by deconvoluting carbon C1s peaks. In plasma-assisted ALD, the film properties were dependent on the energy dose supplied by the plasma. TiO{sub 2} films were also successfully deposited by using a spatial ALD (SALD) system based on the results from the temporal ALD. Similar properties were measured compared to the temporal ALD deposited TiO{sub 2}, but the deposition time could be reduced using SALD. The TiO{sub 2} films deposited by plasma-assisted ALD showed better moisture barrier properties than the layers deposited by thermal processes. Water vapor transmission rate values lower than 5 × 10{sup −4} g day{sup −1} m{sup −2} (38 °C and 90% RH) was measured for 20 nm of TiO{sub 2} film deposited by plasma-assisted ALD.

  4. Liquid-phase-deposited barium titanate thin films on silicon

    International Nuclear Information System (INIS)

    Using a mixture of hexafluorotitanic acid, barium nitrate and boric acid, high refractive index (1.54) barium titanate films can be deposited on silicon substrates. The deposited barium titanate films have featureless surfaces. The deposition temperature is near room temperature (800C). However, there are many fluorine and silicon incorporations in the films. The refractive index of the as-deposited film is 1.54. By current-voltage measurement, the leakage current of the as-deposited film with a thickness of 1000 A is about 9.48x10-7 A cm-2 at the electrical field intensity of 0.3 MV cm-1. By capacitance-voltage measurement, the effective oxide charge of the liquid-phase-deposited barium titanate film is 3.06x1011 cm-2 and the static dielectric constant is about 22. (author)

  5. Carbon Nanotubes for Thin Film Transistor: Fabrication, Properties, and Applications

    Directory of Open Access Journals (Sweden)

    Yucui Wu

    2013-01-01

    Full Text Available We review the present status of single-walled carbon nanotubes (SWCNTs for their production and purification technologies, as well as the fabrication and properties of single-walled carbon nanotube thin film transistors (SWCNT-TFTs. The most popular SWCNT growth method is chemical vapor deposition (CVD, including plasma-enhanced chemical vapor deposition (PECVD, floating catalyst chemical vapor deposition (FCCVD, and thermal CVD. Carbon nanotubes (CNTs used to fabricate thin film transistors are sorted by electrical breakdown, density gradient ultracentrifugation, or gel-based separation. The technologies of applying CNT random networks to work as the channels of SWCNT-TFTs are also reviewed. Excellent work from global researchers has been benchmarked and analyzed. The unique properties of SWCNT-TFTs have been reviewed. Besides, the promising applications of SWCNT-TFTs have been explored. Finally, the key issues to be solved in future have been summarized.

  6. MgB{sub 2} thin films by hybrid physical-chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Xi, X.X. [Department of Physics, Pennsylvania State University, University Park, PA 16802 (United States)]|[Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 (United States)]. E-mail: xxx4@psu.edu; Pogrebnyakov, A.V. [Department of Physics, Pennsylvania State University, University Park, PA 16802 (United States)]|[Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 (United States); Xu, S.Y.; Chen, K.; Cui, Y.; Maertz, E.C. [Department of Physics, Pennsylvania State University, University Park, PA 16802 (United States); Zhuang, C.G. [Department of Physics, Pennsylvania State University, University Park, PA 16802 (United States)]|[Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 (United States)]|[Department of Physics, Peking University, Beijing 100871 (China); Li, Qi [Department of Physics, Pennsylvania State University, University Park, PA 16802 (United States); Lamborn, D.R. [Department of Chemical Engineering, Pennsylvania State University, University Park, PA 16802 (United States); Redwing, J.M. [Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 (United States)]|[Department of Chemical Engineering, Pennsylvania State University, University Park, PA 16802 (United States); Liu, Z.K.; Soukiassian, A.; Schlom, D.G.; Weng, X.J.; Dickey, E.C. [Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 (United States); Chen, Y.B.; Tian, W.; Pan, X.Q. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Cybart, S.A. [Department of Physics, University of California, Berkeley, CA 94720 (United States); Dynes, R.C. [Department of Physics, University of California, Berkeley, CA 94720 (United States)

    2007-06-01

    Hybrid physical-chemical vapor deposition (HPCVD) has been the most effective technique for depositing MgB{sub 2} thin films. It generates high magnesium vapor pressures and provides a clean environment for the growth of high purity MgB{sub 2} films. The epitaxial pure MgB{sub 2} films grown by HPCVD show higher-than-bulk T {sub c} due to tensile strain in the films. The HPCVD films are the cleanest MgB{sub 2} materials reported, allowing basic research, such as on magnetoresistance, that reveals the two-band nature of MgB{sub 2}. The carbon-alloyed HPCVD films demonstrate record-high H {sub c2} values promising for high magnetic field applications. The HPCVD films and multilayers have enabled the fabrication of high quality MgB{sub 2} Josephson junctions.

  7. Chemical Liquid Phase Deposition of Thin Aluminum Oxide Films

    OpenAIRE

    Sun, Jie; Sun, Yingchun

    2007-01-01

    Thin aluminum oxide films were deposited by a new and simple physicochemical method called chemical liquid phase deposition (CLD) on semiconductor materials. Aluminum sulfate with crystallized water and sodium bicarbonate were used as precursors for film growth, and the control of the system pH value played an important role in this experiment. The growth rate is 12 nm/h at room temperature. Post-growth annealing not only densifies and purifies the films, but results in film crystallization a...

  8. Energetic Deposition of Niobium Thin Film in Vacuum

    OpenAIRE

    Wu, Genfa

    2002-01-01

    Niobium thin films are expected to be free of solid inclusions commonly seen in solid niobium. For particle accelerators, niobium thin film has the potential to replace the solid niobium in the making of the accelerating structures. In order to understand and improve the superconducting performance of niobium thin films at cryogenic temperature, an energetic vacuum deposition system has been developed to study deposition energy effects on the properties of niobium thin films on various substr...

  9. Study of relationship between structure and transmittance of diamond-like carbon (DLC) films

    Institute of Scientific and Technical Information of China (English)

    LIN; Song-sheng; HOU; Hui-jun; ZHU; Xia-gao; YUAN; Zhen-hai; DAI; Da-huang; LI; Hong-wu

    2005-01-01

    In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.

  10. Pulsed laser deposition and characterization of Alnico5 magnetic films

    International Nuclear Information System (INIS)

    Alnico5 films were deposited by pulsed laser deposition on glass substrate at room temperature under a vacuum ∼10−3 Torr in the absence and in the presence of 500 Oe external transverse magnetic field applied on the plasma plume during film deposition. For this purpose, Nd:YAG laser was employed to ablate the Alnico5 target. The ablated material was deposited on glass substrate placed at a distance of 2 cm from the target. The structural and magnetic properties of the film were analyzed by X-ray diffraction, atomic force microscope, and vibrating sample magnetometer. X-ray diffraction patterns showed that the Alnico5 films were amorphous in nature. Atomic force microscopy revealed that the Alnico5 film deposited in absence of external magnetic field has larger root-mean-square roughness value (60.2 nm) than the magnetically deposited film (42.9 nm). Vibrating sample magnetometer measurements showed that the in-plane saturation magnetization of Alnico5 film deposited in the presence of external magnetic field increases by 32% as compared to that for the film deposited in the absence of external magnetic field. However, the out-of-plane saturation magnetization was almost independent of the external magnetic field. In magnetically deposited film, there is in-plane anisotropy parallel to the applied external magnetic field.

  11. Real-Time Deposition Monitor for Ultrathin Conductive Films

    Science.gov (United States)

    Hines, Jacqueline

    2011-01-01

    A device has been developed that can be used for the real-time monitoring of ultrathin (2 or more) conductive films. The device responds in less than two microseconds, and can be used to monitor film depositions up to about 60 thick. Actual thickness monitoring capability will vary based on properties of the film being deposited. This is a single-use device, which, due to the very low device cost, can be disposable. Conventional quartz/crystal microbalance devices have proven inadequate to monitor the thickness of Pd films during deposition of ultrathin films for hydrogen sensor devices. When the deposited film is less than 100 , the QCM measurements are inadequate to allow monitoring of the ultrathin films being developed. Thus, an improved, high-sensitivity, real-time deposition monitor was needed to continue Pd film deposition development. The new deposition monitor utilizes a surface acoustic wave (SAW) device in a differential delay-line configuration to produce both a reference response and a response for the portion of the device on which the film is being deposited. Both responses are monitored simultaneously during deposition. The reference response remains unchanged, while the attenuation of the sensing path (where the film is being deposited) varies as the film thickness increases. This device utilizes the fact that on high-coupling piezoelectric substrates, the attenuation of an SAW undergoes a transition from low to very high, and back to low as the conductivity of a film on the device surface goes from nonconductive to highly conductive. Thus, the sensing path response starts with a low insertion loss, and as a conductive film is deposited, the film conductivity increases, causing the device insertion loss to increase dramatically (by up to 80 dB or more), and then with continued film thickness increases (and the corresponding conductivity increases), the device insertion loss goes back down to the low level at which it started. This provides a

  12. Atmospheric Plasma Deposition of Diamond-like Carbon Coatings

    Energy Technology Data Exchange (ETDEWEB)

    Ladwig, Angela

    2008-01-23

    material that may be treated. The deposition of DLC at atmospheric pressure has been demonstrated by several researchers. Izake, et al [53] and Novikov and Dymont [54] have demonstrated an electrochemical process that is carried out with organic compounds such as methanol and acetylene dissolved in ammonia. This process requires that the substrates be immersed in the liquid [53-54]. The atmospheric pressure deposition of DLC was also demonstrated by Kulik, et al. utilizing a plasma torch. However, this process requires operating temperatures in excess of 800 oC [55]. In this report, we investigate the deposition of diamond-like carbon films using a low temperature, atmospheric pressure plasma-enhanced chemical vapor deposition (PECVD) process. The films were characterized by solid-state carbon-13 nuclear magnetic resonance (13C NMR) and found to have a ratio of sp2 to sp3 carbon of 43 to 57%. The films were also tested for adhesion, coefficient of friction, and dielectric strength.

  13. Deposition of Aluminium Oxide Films by Pulsed Reactive Sputtering

    Institute of Scientific and Technical Information of China (English)

    Xinhui MAO; Bingchu CAI; Maosong WU; Guoping CHEN

    2003-01-01

    Pulsed reactive sputtering is a novel process used to deposit some compound films, which are not deposited by traditional D.C. reactive sputtering easily. In this paper some experimental results about the deposition of Al oxide films by pulsed reactive sputtering are presented. The hysteresis phenomenon of the sputtering voltage and deposition rate with the change of oxygen flow during sputtering process are discussed.

  14. Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering

    International Nuclear Information System (INIS)

    Carbon nitride thin films were deposited by direct current magnetron sputtering in an industrial-scale equipment at different deposition temperatures and substrate bias voltages. The films had N/(N + C) atomic fractions between 0.2 and 0.3 as determined by X-ray photoelectron spectroscopy (XPS). Raman spectroscopy provided insight into the ordering and extension of the graphite-like clusters, whereas nanoindentation revealed information on the mechanical properties of the films. The internal compressive film stress was evaluated from the substrate bending method. At low deposition temperatures the films were amorphous, whereas the film deposited at approximately 380 °C had a turbostratic-like structure as confirmed by high-resolution transmission electron microscopy images. The turbostratic-like film had a highly elastic response when subjected to nanoindentation. When a CrN interlayer was deposited between the film and the substrate, XPS and Raman spectroscopy indicated that the turbostratic-like structure was maintained. However, it was inconclusive whether the film still exhibited an extraordinary elastic recovery. An increased substrate bias voltage, without additional heating and without deposition of an interlayer, resulted in a structural ordering, although not to the extent of a turbostratic-like structure. - Highlights: • Carbon nitride films were deposited by industrial-scale magnetron sputtering. • The deposition temperature and the substrate bias voltage were varied. • A turbostratic-like structure was obtained at an elevated deposition temperature. • The turbostratic-like film exhibited a very high elastic recovery. • The influence of a CrN interlayer on the film properties was investigated

  15. The mechanical properties of thin alumina film deposited by metal-organic chemical vapour deposition

    NARCIS (Netherlands)

    Haanappel, V.A.C.; Gellings, P.J.; Vendel, van de D.; Metselaar, H.S.C.; Corbach, van H.D.; Fransen, T.

    1995-01-01

    Amorphous alumina films were deposited by metal-organic chemical vapour deposition (MOCVD) on stainless steel, type AISI 304. The MOCVD experiments were performed in nitrogen at low and atmospheric pressures. The effects of deposition temperature, growth rate and film thickness on the mechanical pro

  16. Optical Properties of a-SiC:H Films Deposited by Glowdischarge Methods

    Directory of Open Access Journals (Sweden)

    Lusitra Munisa

    2003-12-01

    Full Text Available he optical properties of amorphous silicon carbon films deposited by glowdischarge method have been studied using ultra violet-visible (uv-vis spectroscopy. The refractive index was calculated by Swanepoel’s formula using transmission data then followed by numerical simulation. The films density tends to decrease with increasing carbon content. The widening of the optical gap by increasing carbon content indicates the enhancement of film’s transparence. Both real and imaginary parts of the dielectric constant show variation in magnitude as the carbon content increase.

  17. Kinetics of ion beam deposition of carbon at room temperature

    International Nuclear Information System (INIS)

    Growth rates of carbon films grown by ion beam deposition using methane gas were measured in situ as a function of deposition conditions. The methane pressure dependence of the growth rate was used to measure the cross-section for charge exchange. Variations in deposition rate per incident energetic particle found for each ion energy were related to ion current density. It was found that rates of growth per incident energetic specie were (i) largest for the smallest current densities, (ii) decreased monotonically with increasing current density, and (iii) were consistently larger than can be explained by deposition directly from the energetic flux alone. These observations were interpreted in terms of irradiation-induced surface interactions which promote chemisorption of methane physisorbed from the ambient atmosphere. (orig.)

  18. Conductive porous carbon film as a lithium metal storage medium

    International Nuclear Information System (INIS)

    Highlights: • Conductive porous carbon films were prepared by distributing amorphous carbon nanoparticles. • The porous film provides enough conductive surfaces and reduces the effective current density. • By using the film, dendritic Li growth can be effectively prevented. • The use of the porous framework can be extended for use in other 3D structured materials for efficient Li metal storage. - Abstract: The Li metal anode boasts attractive electrochemical characteristics for use in rechargeable Li batteries, such as a high theoretical capacity and a low redox potential. However, poor cycle efficiency and safety problems relating to dendritic Li growth during cycling should be addressed. Here we propose a strategy to increase the coulombic efficiency of the Li metal electrode. Conductive porous carbon films (CPCFs) were prepared by distributing amorphous carbon nanoparticles within a polymer binder. This porous structure is able to provide enough conductive surfaces for Li deposition and dissolution, which reduce the effective current density. Moreover, the pores in these films enable the electrolyte to easily penetrate into the empty space, and Li can be densely deposited between the carbon particles. As a result, dendritic Li growth can be effectively prevented. Electrochemical tests demonstrate that the coulombic efficiency of the porous electrode can be greatly improved compared to that of the pure Cu electrode. By allowing for the development of robust Li metal electrodes, this approach provides key insight into the design of high-capacity anodes for Li metal batteries, such as Li-air and Li-S systems

  19. Self-organized formation of metal-carbon nanostructures by hyperthermal ion deposition

    Energy Technology Data Exchange (ETDEWEB)

    Hannstein, I.K.

    2006-04-26

    The quasi-simultaneous deposition of mass-selected hyperthermal carbon and metal ions results in a variety of interesting film morphologies, depending on the metal used and the deposition conditions. The observed features are of the order of a few nanometres and are therefore interesting for future potential applications in the various fields of nanotechnology. The present study focuses on the structural analysis of amorphous carbon films containing either copper, silver, gold, or iron using amongst others Rutherford Backscattering Spectroscopy, High Resolution Transmission Electron Microscopy, and Energy Dispersive X-Ray Spectroscopy. The film morphologies found are as follows: copper-containing films consist of copper nanoclusters with sizes ranging from about 3 to 9 nm uniformly distributed throughout the amorphous carbon matrix. The cluster size hereby rises with the copper content of the films. The silver containing films decompose into a pure amorphous carbon film with silver agglomerates at the surface. Both, the gold- and the iron-containing films show a multilayer structure of metal-rich layers with higher cluster density separated by metal-depleted amorphous carbon layers. The layer distances are of the order of up to 15 nm in the case of gold-carbon films and 7 nm in the case of iron-carbon films. The formation of theses different structures cannot be treated in the context of conventional self-organization mechanisms basing upon thermal diffusion and equilibrium thermodynamics. Instead, an ion-induced atomic transport, sputtering effects, and the stability of small metal clusters were taken into account in order to model the structure formation processes. A similar multilayer morphology was recently also reported in the literature for metal-carbon films grown by magnetron sputtering techniques. In order to investigate, whether the mechanisms are the same as in the case of the ion beam deposited films described above, first experiments were conducted

  20. Deposition of electrochromic tungsten oxide thin films by plasma-enhanced chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Henley, W.B.; Sacks, G.J. [Univ. of South Florida, Tampa, FL (United States). Center of Microelectronics

    1997-03-01

    Use of plasma-enhanced chemical vapor deposition (PECVD) for electrochromic WO{sub 3} film deposition is investigated. Oxygen, hydrogen, and tungsten hexafluoride were used as source gases. Reactant gas flow was investigated to determine the effect on film characteristics. High quality optical films were obtained at deposition rates on the order of 100 {angstrom}/s. Higher deposition rates were attainable but film quality and optical coherence degraded. Atomic emission spectroscopy (AES), was used to provide an in situ assessment of the plasma deposition chemistry. Through AES, it is shown that the hydrogen gas flow is essential to the deposition of the WO{sub 3} film. Oxygen gas flow and tungsten hexafluoride gas flow must be approximately equal for high quality films.

  1. Microstructural and optical properties of nanocrystalline ZnO deposited onto vertically aligned carbon nanotubes by physical vapor deposition

    International Nuclear Information System (INIS)

    Nanocrystalline ZnO films with thicknesses of 5 nm, 10 nm, 20 nm, and 50 nm were deposited via magnetron sputtering onto the surface of vertically aligned multi-walled carbon nanotubes (MWCNTs). The ZnO/CNTs heterostructures were characterized by scanning electron microscopy, high resolution transmission electron microscopy, and X-ray diffraction studies. No structural degradation of the CNTs was observed and photoluminescence (PL) measurements of the nanostructured ZnO layers show that the optical properties of these films are typical of ZnO deposited at low temperatures. The results indicate that magnetron sputtering is a viable technique for growing heterostructures and depositing functional layers onto CNTs.

  2. Friction and wear of plasma-deposited amorphous hydrogenated films on silicon nitride

    Science.gov (United States)

    Miyoshi, Kazuhisa

    1991-01-01

    An investigation was conducted to examine the friction and wear behavior of amorphous hydrogenated carbon (a-C:H) films in sliding contact with silicon nitride pins in both dry nitrogen and humid air environments. Amorphous hydrogenated carbon films approximately 0.06 micron thick were deposited on silicon nitride flat substrates by using the 30 kHz ac glow discharge of a planar plasma reactor. The results indicate that an increase in plasma deposition power gives an increase in film density and hardness. The high-density a-C:H films deposited behaved tribologically much like bulk diamond. In the dry nitrogen environment, a tribochemical reaction produced a substance, probably a hydrocarbon-rich layer, that decreased the coefficient of friction. In the humid air environment, tribochemical interactions drastically reduced the wear life of a-C:H films and water vapor greatly increased the friction. Even in humid air, effective lubrication is possible with vacuum-annealed a-C:H films. The vacuum-annealed high-density a-C:H film formed an outermost superficial graphitic layer, which behaved like graphite, on the bulk a-C:H film. Like graphite, the annealed a-C:H film with the superficial graphitic layer showed low friction when adsorbed water vapor was present.

  3. Synthesis and characterization of boron incorporated diamond-like carbon thin films

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, L.L. [Department of Mechanical Engineering, University of Saskatchewan, 57 Campus Drive, Saskatoon, SK S7N 5A9 (Canada); Yang, Q., E-mail: qiaoqin.yang@usask.ca [Department of Mechanical Engineering, University of Saskatchewan, 57 Campus Drive, Saskatoon, SK S7N 5A9 (Canada); Tang, Y.; Yang, L.; Zhang, C. [Department of Mechanical Engineering, University of Saskatchewan, 57 Campus Drive, Saskatoon, SK S7N 5A9 (Canada); Hu, Y.; Cui, X. [Canadian Light Source Inc., 101 Perimeter Road, Saskatoon, SK S7N 0X4 (Canada)

    2015-08-31

    Boron incorporated diamond-like carbon (B-DLC) (up to 8 wt.% boron) thin films were synthesized on silicon wafers using biased target ion beam deposition technique, where diamond-like carbon (DLC) was deposited by ion beam deposition and boron (B) was simultaneously incorporated by biased target sputtering of a boron carbide (B{sub 4}C) target under different conditions. Pure DLC films and B–C films were also synthesized by ion beam deposition and biased target sputtering of B{sub 4}C under similar conditions, respectively, as reference samples. The microstructure and mechanical properties of the synthesized films have been characterized by various technologies. It has been found that B exists in different states in B-DLC, including carbon-rich and B-rich boron carbides, boron suboxide and boron oxide, and the oxidation of B probably occurs during the film deposition. The incorporation of B into DLC leads to the increase of sp{sup 3} bonded carbon in the films, the increase of both film hardness and elastic modulus, and the decrease of both surface roughness and friction coefficient. Furthermore, the content of sp{sup 3} bonded carbon, film hardness and elastic modulus increase, and the film surface roughness and friction coefficient decrease with the increase of B-rich carbide in the B-DLC films. - Highlights: • Biased target ion beam deposition technique is promising to produce high quality DLC based thin films; • Boron exists in different states in B-DLC thin films; • The incorporation of B to DLC with different levels leads to improved film properties; • The fraction of sp{sup 3} bonded C in B-DLC thin films increase with the increase of B-rich carbide content in the films.

  4. Functional porphyrin thin films deposited by matrix assisted pulsed laser evaporation

    Energy Technology Data Exchange (ETDEWEB)

    Cristescu, R., E-mail: rodica.cristescu@inflpr.ro [National Institute for Lasers, Plasma and Radiation Physics, Lasers Department, P.O. Box MG-36, Atomistilor 409, Bucharest-Magurele (Romania); Popescu, C.; Popescu, A.C.; Mihailescu, I.N. [National Institute for Lasers, Plasma and Radiation Physics, Lasers Department, P.O. Box MG-36, Atomistilor 409, Bucharest-Magurele (Romania); Ciucu, A.A. [Univeristy of Bucharest, Chemistry Department, Bucharest (Romania); Andronie, A.; Iordache, S.; Stamatin, I. [University of Bucharest, 3 Nano-SAE Research Center, P.O. Box MG-38, Bucharest-Magurele (Romania); Fagadar-Cosma, E. [Institute of Chemistry Timisoara of Romanian Academy, Department of Organic Chemistry, 300223 Timisoara (Romania); Chrisey, D.B. [Rensselaer Polytechnic Institute, School of Engineering, Department of Materials Science and Engineering, Troy 12180-3590, NY (United States)

    2010-05-25

    We report the first successful deposition of functionalized and nanostructured Zn(II)- and Co(II)-metalloporphyrin thin films by matrix assisted pulsed laser evaporation onto silicon wafers, quartz plates and screen-printed electrodes. The deposited nanostructures have been characterized by Raman spectrometry and cyclic voltammetry. The novelty of our contribution consists of the evaluation of the sensitivity of the MAPLE-deposited Zn(II)- and Co(II)-metalloporphyrin thin films on screen-printed carbon nanotube electrodes when challenged with dopamine.

  5. Optical characterization of sputtered carbon films

    Energy Technology Data Exchange (ETDEWEB)

    Ager, J.W. III.

    1992-05-01

    Spattered carbon films are widely used as protective overcoats for thin film disk media. Raman spectroscopy is nondestructive and relatively rapid and is well suited for the characterization of carbon films. Specific features in the Raman spectra are empirically correlated with the rates of specific types of mechanical wear for both hydrogenated and unhydrogenated films. This observation is interpreted in terms of a random covalent network, in which the mechanical performance of the film is determined by the nature of the bonding that links sp{sup 2}-bonded domains.

  6. ZnO thin films prepared by pulsed laser deposition

    Energy Technology Data Exchange (ETDEWEB)

    Tsoutsouva, M.G. [Laboratory of Physical Metallurgy, National Technical University of Athens, Zografos, 15780 Athens (Greece); Panagopoulos, C.N., E-mail: chpanag@metal.ntua.gr [Laboratory of Physical Metallurgy, National Technical University of Athens, Zografos, 15780 Athens (Greece); Papadimitriou, D. [National Technical University of Athens, Department of Physics, GR-15780 Athens (Greece); Fasaki, I.; Kompitsas, M. [Theor. and Phys./Chem. Institute, National Hellenic Research Foundation, 48 Vas. Konstantinou Ave., 11635 Athens (Greece)

    2011-04-15

    Zinc oxide (ZnO) thin films were deposited on soda lime glass substrates by pulsed laser deposition (PLD) in an oxygen-reactive atmosphere. The structural, optical, and electrical properties of the as-prepared thin films were studied in dependence of substrate temperature and oxygen pressure. High quality polycrystalline ZnO films with hexagonal wurtzite structure were deposited at substrate temperatures of 100 and 300 deg. C. The RMS roughness of the deposited oxide films was found to be in the range 2-9 nm and was only slightly dependent on substrate temperature and oxygen pressure. Electrical measurements indicated a decrease of film resistivity with the increase of substrate temperature and the decrease of oxygen pressure. The ZnO films exhibited high transmittance of 90% and their energy band gap and thickness were in the range 3.26-3.30 eV and 256-627 nm, respectively.

  7. Impact of laser power density on tribological properties of Pulsed Laser Deposited DLC films

    International Nuclear Information System (INIS)

    Fabrication of wear resistant and low friction carbon films on the engineered substrates is considered as a challenging task for expanding the applications of diamond-like carbon (DLC) films. In this paper, pulsed laser deposition (PLD) technique is used to deposit DLC films on two different types of technologically important class of substrates such as silicon and AISI 304 stainless steel. Laser power density is one of the important parameter used to tailor the fraction of sp2 bonded amorphous carbon (a-C) and tetrahedral amorphous carbon (ta-C) made by sp3 domain in the DLC film. The I(D)/I(G) ratio decreases with the increasing laser power density which is associated with decrease in fraction of a-C/ta-C ratio. The fraction of these chemical components is quantitatively analyzed by EELS which is well supported to the data obtained from the Raman spectroscopy. Tribological properties of the DLC are associated with chemical structure of the film. However, the super low value of friction coefficient 0.003 is obtained when the film is predominantly constituted by a-C and sp2 fraction which is embedded within the clusters of ta-C. Such a particular film with super low friction coefficient is measured while it was deposited on steel at low laser power density of 2 GW/cm2. The super low friction mechanism is explained by low sliding resistance of a-C/sp2 and ta-C clusters. Combination of excellent physical and mechanical properties of wear resistance and super low friction coefficient of DLC films is desirable for engineering applications. Moreover, the high friction coefficient of DLC films deposited at 9GW/cm2 is related to widening of the intergrain distance caused by transformation from sp2 to sp3 hybridized structure

  8. Impact of laser power density on tribological properties of Pulsed Laser Deposited DLC films

    Directory of Open Access Journals (Sweden)

    S. Gayathri

    2013-12-01

    Full Text Available Fabrication of wear resistant and low friction carbon films on the engineered substrates is considered as a challenging task for expanding the applications of diamond-like carbon (DLC films. In this paper, pulsed laser deposition (PLD technique is used to deposit DLC films on two different types of technologically important class of substrates such as silicon and AISI 304 stainless steel. Laser power density is one of the important parameter used to tailor the fraction of sp2 bonded amorphous carbon (a-C and tetrahedral amorphous carbon (ta-C made by sp3 domain in the DLC film. The I(D/I(G ratio decreases with the increasing laser power density which is associated with decrease in fraction of a-C/ta-C ratio. The fraction of these chemical components is quantitatively analyzed by EELS which is well supported to the data obtained from the Raman spectroscopy. Tribological properties of the DLC are associated with chemical structure of the film. However, the super low value of friction coefficient 0.003 is obtained when the film is predominantly constituted by a-C and sp2 fraction which is embedded within the clusters of ta-C. Such a particular film with super low friction coefficient is measured while it was deposited on steel at low laser power density of 2 GW/cm2. The super low friction mechanism is explained by low sliding resistance of a-C/sp2 and ta-C clusters. Combination of excellent physical and mechanical properties of wear resistance and super low friction coefficient of DLC films is desirable for engineering applications. Moreover, the high friction coefficient of DLC films deposited at 9GW/cm2 is related to widening of the intergrain distance caused by transformation from sp2 to sp3 hybridized structure.

  9. Precursors for the polymer-assisted deposition of films

    Science.gov (United States)

    McCleskey, Thomas M.; Burrell, Anthony K.; Jia, Quanxi; Lin, Yuan

    2013-09-10

    A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

  10. Catalytic carbon deposition on 3-dimensional carbon fibre supports

    OpenAIRE

    Thornton, Matthew James

    2005-01-01

    Catalytic carbon deposition reactions, using methane, ethane or synthetic natural gas (1.8 vol. % propane, 6.7 vol. % ethane and balance methane) as the carbon-containing gas feedstock with or without the addition of hydrogen, have been investigated over nickel, cobalt and iron catalysts supported on 3-dimensional carbon fibre supports, using both a horizontal tube furnace and an isothermal, isobaric induction furnace. The transition metal catalysts were prepared by impregnating 3-dimens...

  11. Influence of deposition time on the properties of chemical bath deposited manganese sulfide thin films

    Directory of Open Access Journals (Sweden)

    Anuar Kassim

    2010-12-01

    Full Text Available Manganese sulfide thin films were chemically deposited from an aqueous solution containing manganese sulfate, sodium thiosulfate and sodium tartrate. The influence of deposition time (2, 3, 6 and 8 days on the properties of thin films was investigated. The structure and surface morphology of the thin films were studied by X-ray diffraction and atomic force microscopy, respectively. In addition, in order to investigate the optical properties of the thin films, the UV-visible spectrophotometry was used. The XRD results indicated that the deposited MnS2 thin films exhibited a polycrystalline cubic structure. The number of MnS2 peaks on the XRD patterns initially increased from three to six peaks and then decreased to five peaks, as the deposition time was increased from 2 to 8 days. From the AFM measurements, the film thickness and surface roughness were found to be dependent on the deposition time.

  12. In situ electron spectroscopic identification of carbon species deposited by laser ablation

    Energy Technology Data Exchange (ETDEWEB)

    Samano, E.C.; Gamietea, A.; Cota, L. [IFUNAM, Ensenada (Mexico). Lab. de Ensenada; Soto, G. [IFUNAM, Ensenada (Mexico). Lab. de Ensenada]|[Centro de Investigacion Cientifica y de Educacion Superior de Ensenada (Mexico). Programa de Posgrado en Fisica de Materiales

    1997-05-01

    Thin carbon films were grown on Si (111) substrates by ablating a graphite target utilizing an excimer pulsed laser in a UHV Riber {copyright} LDM-32 system. Two kinds of films were produced, a highly oriented pyrolytic graphite (HOPG) type and a diamond-like carbon (DLC) type. A relationship of the films microstructure with laser power density and substrate conditions was observed. The HOPG films were homogeneous but the DLC films were heterogeneous, as shown by micrographs. The thin films are monitored and analyzed in situ during the first stages of the deposition process. The monitoring was done by RHEED and the characterization by several surface spectroscopic techniques, AES, XPS and EELS. The formation of a SiC interface was observed for both films due to the reaction of the first carbon species with the substrate surface.

  13. Preparation and optical properties of sol-gel-deposited electrochromic iron oxide films

    Science.gov (United States)

    Ozer, Nilgun; Tepehan, Fatma; Tepehan, Galip

    1997-10-01

    The preparation and optical properties of sol-gel deposited iron oxide films are investigated in this study. The films are deposited on glass by spin-coating from polymeric sol-gel solutions. The coating solutions were prepared from Fe(OCH3H7)3 and isopropanol. Fe2O3 films were obtained at a firing temperature 180 degrees Celsius. The films were characterized by x-ray diffractometry (XRD), scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), cyclic voltammetry (CV) and UV-Vis spectroscopy. The electrochemical properties of the films were studied in 0.5 M LiClO4/propylene carbonate (PC) solution. The CV results showed reversibility of the Li+/e- insertion/extraction process in the Fe2O3 films up to 200 cycles. Reduction and oxidation of the amorphous films in 0.5 M LiClO4-PC solution caused noticeable changes in optical absorption. XRD of the films showed that they had an amorphous structure. Fourier transform infrared spectroscopy (FTIR) measurements showed that the composition of the film is Fe2O3. In-situ spectrophotometric measurements indicated that these films show weak electrochromism in the spectral range of 350 - 800 nm. The optical band gap is estimated to be 1.92 eV for the amorphous film. The spectroelectrochemical properties clearly indicated that cyclic stability of the iron oxide films deteriorated above 200 cycles.

  14. Controlled Deposition and Alignment of Carbon Nanotubes

    Science.gov (United States)

    Smits, Jan M. (Inventor); Wincheski, Russell A. (Inventor); Patry, JoAnne L. (Inventor); Watkins, Anthony Neal (Inventor); Jordan, Jeffrey D. (Inventor)

    2012-01-01

    A carbon nanotube (CNT) attraction material is deposited on a substrate in the gap region between two electrodes on the substrate. An electric potential is applied to the two electrodes. The CNT attraction material is wetted with a solution defined by a carrier liquid having carbon nanotubes (CNTs) suspended therein. A portion of the CNTs align with the electric field and adhere to the CNT attraction material. The carrier liquid and any CNTs not adhered to the CNT attraction material are then removed.

  15. Improvement of orthodontic friction by coating archwire with carbon nitride film

    International Nuclear Information System (INIS)

    In order to reduce frictional resistance between archwire and bracket during orthodontic tooth movement, carbon nitride (CNx) thin films were deposited on the surface of archwires with ion beam assisted deposition (IBAD). The energy-dispersive X-ray spectrometer (EDS) analysis showed that the CNx film was successfully deposited on the surface of the orthodontic wires. X-ray photoelectron spectroscopy (XPS) analysis suggested that the deposited CNx film was sp2 carbon dominated structures, and diversiform bonds (N-C, N≡C, et al.) coexisted in the film. The friction tests indicated that the CNx film significantly reduced the wire-bracket friction both in ambient air and in artificial saliva. The sp2C rich structure of the CNx film as well as its protection function for the archwire was responsible for the low friction of the wire-bracket sliding system.

  16. Improvement of orthodontic friction by coating archwire with carbon nitride film

    Energy Technology Data Exchange (ETDEWEB)

    Wei Songbo [State Key Laboratory of Tribology, Tsinghua University, Beijing 100084 (China); Shao Tianmin, E-mail: shaotm@mail.tsinghua.edu.cn [State Key Laboratory of Tribology, Tsinghua University, Beijing 100084 (China); Ding Peng [Department of Orthodontics, Peking University School and Hospital of Stomatology, Beijing 100081 (China)

    2011-10-01

    In order to reduce frictional resistance between archwire and bracket during orthodontic tooth movement, carbon nitride (CNx) thin films were deposited on the surface of archwires with ion beam assisted deposition (IBAD). The energy-dispersive X-ray spectrometer (EDS) analysis showed that the CNx film was successfully deposited on the surface of the orthodontic wires. X-ray photoelectron spectroscopy (XPS) analysis suggested that the deposited CNx film was sp{sup 2} carbon dominated structures, and diversiform bonds (N-C, N{identical_to}C, et al.) coexisted in the film. The friction tests indicated that the CNx film significantly reduced the wire-bracket friction both in ambient air and in artificial saliva. The sp{sup 2}C rich structure of the CNx film as well as its protection function for the archwire was responsible for the low friction of the wire-bracket sliding system.

  17. Synthesis and characterization of well-aligned carbon nitrogen nanotubes by microwave plasma chemical vapor deposition

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    Well-aligned carbon nitrogen nanotube films have been synthesized successfully on mesoporous silica substrates by microwave plasma chemical vapor deposition (MWPCVD) method. Studies on their morphology, structure, and composition by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and energy dispersive X-ray spectroscopy (EDX), respectively, indicate that these nanotubes consist of linearly polymerized carbon nitrogen nanobells, and the nitrogen atoms have been doped into carbon netweork to form a new structure C1-xNx (x=0.16±0.01). X-ray photoelectron spectroscopy (XPS) results of the samples further demonstrate that carbon bonds covalently with nitrogen in all the carbon nitrogen nanotube films.

  18. Electrochemical impedance spectroscopy on nanostructured carbon electrodes grown by supersonic cluster beam deposition

    Energy Technology Data Exchange (ETDEWEB)

    Bettini, Luca Giacomo; Bardizza, Giorgio; Podesta, Alessandro; Milani, Paolo; Piseri, Paolo, E-mail: piseri@mi.infn.it [Universita degli Studi di Milano, Dipartimento di Fisica and CIMaINa (Italy)

    2013-02-15

    Nanostructured porous films of carbon with density of about 0.5 g/cm{sup 3} and 200 nm thickness were deposited at room temperature by supersonic cluster beam deposition (SCBD) from carbon clusters formed in the gas phase. Carbon film surface topography, determined by atomic force microscopy, reveals a surface roughness of 16 nm and a granular morphology arising from the low kinetic energy ballistic deposition regime. The material is characterized by a highly disordered carbon structure with predominant sp2 hybridization as evidenced by Raman spectroscopy. The interface properties of nanostructured carbon electrodes were investigated by cyclic voltammetry and electrochemical impedance spectroscopy employing KOH 1 M solution as aqueous electrolyte. An increase of the double layer capacitance is observed when the electrodes are heat treated in air or when a nanostructured nickel layer deposited by SCBD on top of a sputter deposited film of the same metal is employed as a current collector instead of a plain metallic film. This enhancement is consistent with an improved charge injection in the active material and is ascribed to the modification of the electrical contact at the interface between the carbon and the metal current collector. Specific capacitance values up to 120 F/g have been measured for the electrodes with nanostructured metal/carbon interface.

  19. Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

    International Nuclear Information System (INIS)

    Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density and substrate bias were the varied parameters. Experimental results show that the deposited TiNxOy films exhibited an amorphous or a columnar structure with fine crystalline dependent on power density. The deposition rate increases significantly in conjunction as the power density increases from 2 W/cm2 to 7 W/cm2. The maximum deposition rate occurs, as the substrate bias is -40 V at a certain power densities chosen in this study. The film's roughness slightly decreases with increasing substrate bias. The TiNxOy films deposited at power densities above 4 W/cm2 show a steady Ti:N:O ratio of about 1:1:0.8. The water vapor and oxygen transmission rates of the TiNxOy films reach values as low as 0.98 g/m2-day-atm and 0.60 cm3/m2-day-atm which are about 6 and 47 times lower than those of the uncoated PET substrate, respectively. These transmission rates are comparable to those of DLC, carbon-based and Al2O3 barrier films. Therefore, TiNxOy films are potential candidates to be used as a gas permeation barrier for PET substrate

  20. Characterization of transparent silica films deposited on polymeric materials

    International Nuclear Information System (INIS)

    Silica films were synthesized by capacitively coupled RF PECVD using mixtures of organo-silane and oxygen as a source. The chemical bonding states and compositions of the films deposited were evaluated with FTIR and XPS. Film surfaces and cross-sections were observed by SEM. Oxygen transmission rates (OTR) of the films coated on polyethylene terephthalate (PET) substrates were measured by an isopiestic method. (Authors)

  1. Infrared analysis of thin films amorphous, hydrogenated carbon on silicon

    CERN Document Server

    Jacob, W; Schwarz-Selinger, T

    2000-01-01

    The infrared analysis of thin films on a thick substrate is discussed using the example of plasma-deposited, amorphous, hydrogenated carbon layers (a-C:H) on silicon substrates. The framework for the optical analysis of thin films is presented. The main characteristic of thin film optics is the occurrence of interference effects due to the coherent superposition of light multiply reflected at the various internal and external interfaces of the optical system. These interference effects lead to a sinusoidal variation of the transmitted and reflected intensity. As a consequence, the Lambert-Beer law is not applicable for the determination of the absorption coefficient of thin films. Furthermore, observable changes of the transmission and reflection spectra occur in the vicinity of strong absorption bands due to the Kramers-Kronig relation. For a sound data evaluation these effects have to be included in the analysis. To be able to extract the full information contained in a measured optical thin film spectrum, ...

  2. Facile fabrication of boron nitride nanosheets-amorphous carbon hybrid film for optoelectronic applications

    KAUST Repository

    Wan, Shanhong

    2015-01-01

    A novel boron nitride nanosheets (BNNSs)-amorphous carbon (a-C) hybrid film has been deposited successfully on silicon substrates by simultaneous electrochemical deposition, and showed a good integrity of this B-C-N composite film by the interfacial bonding. This synthesis can potentially provide the facile control of the B-C-N composite film for the potential optoelectronic devices. This journal is

  3. Synthesis of tungsten oxide thin film by liquid phase deposition

    International Nuclear Information System (INIS)

    High purity and well crystallized tungsten acid hydrates (H2WO4.H2O) thin films were prepared from H2WO4-HF(aq.) and H3BO3 as precursors by the liquid phase deposition method. The crystal structure was indexed as monoclinic with unit cell lattice constants a = 7.517 A, b = 6.907 A, c = 3.694 A and β = 89.58 deg. The monoclinic phase was transformed into orthorhombic WO3.H2O after heating at 100 deg. C. Further heating from 300 to 500 deg. C resulted in an anhydrous monoclinic WO3 films. The effects of the composition and the reaction time on the deposition and the microstructures of the deposited films were studied by the means of scanning electron microscope (SEM), transmission electron microscope (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The film formation showed strong dependence upon the composition, whereas the amount of deposition, the shape and the films thickness could be controlled by the reaction time. Cross-sectional TEM image of WO3 film deposited on Au wire indicated that the epitaxial growth of the film was maintained after calcination at 500 deg. C. XPS analysis also revealed the existence of W6+ ions in both the deposited and calcined films.

  4. Low temperature CVD growth of ultrathin carbon films

    Directory of Open Access Journals (Sweden)

    Chao Yang

    2016-05-01

    Full Text Available We demonstrate the low temperature, large area growth of ultrathin carbon films by chemical vapor deposition under atmospheric pressure on various substrates. In particularly, uniform and continuous carbon films with the thickness of 2-5 nm were successfully grown at a temperature as low as 500 oC on copper foils, as well as glass substrates coated with a 100 nm thick copper layer. The characterizations revealed that the low-temperature-grown carbon films consist on few short, curved graphene layers and thin amorphous carbon films. Particularly, the low-temperature grown samples exhibited over 90% transmittance at a wavelength range of 400-750 nm and comparable sheet resistance in contrast with the 1000oC-grown one. This low-temperature growth method may offer a facile way to directly prepare visible ultrathin carbon films on various substrate surfaces that are compatible with temperatures (500-600oC used in several device processing technologies.

  5. Crystalline Indium Sulphide thin film by photo accelerated deposition technique

    Science.gov (United States)

    Dhanya, A. C.; Preetha, K. C.; Deepa, K.; Remadevi, T. L.

    2015-02-01

    Indium sulfide thin films deserve special attention because of its potential application as buffer layers in CIGS based solar cells. Highly transparent indium sulfide (InS) thin films were prepared using a novel method called photo accelerated chemical deposition (PCD). Ultraviolet source of 150 W was used to irradiate the solution. Compared to all other chemical methods, PCD scores its advantage for its low cost, flexible substrate and capable of large area of deposition. Reports on deposition of high quality InS thin films at room temperature are very rare in literature. The precursor solution was initially heated to 90°C for ten minutes and then deposition was carried out at room temperature for two hours. The appearance of the film changed from lemon yellow to bright yellow as the deposition time increased. The sample was characterized for its structural and optical properties. XRD profile showed the polycrystalline behavior of the film with mixed phases having crystallite size of 17 nm. The surface morphology of the films exhibited uniformly distributed honey comb like structures. The film appeared to be smooth and the value of extinction coefficient was negligible. Optical measurements showed that the film has more than 80% transmission in the visible region. The direct band gap energy was 2.47eV. This method is highly suitable for the synthesis of crystalline and transparent indium sulfide thin films and can be used for various photo voltaic applications.

  6. Study on the preparation of high barrier hydrogenated carbon film and its properties

    International Nuclear Information System (INIS)

    Hydrogenated carbon thin films were fabricated on the surface of polyethylene terephthalate (PET) by radio frequency plasma enhanced chemical vapor deposition (r.f. PECVD). The film structure properties were studied by means of atomic force microscope (AFM), x-ray photo-electron (XPS), laser Raman spectroscopy, Fourier-transform infrared spectra (FTIR), etc. The barrier property of the film was conducted on the water vapor permeation instrument. The results show that nano-hydrogenated carbon films have been deposited on PET surface and they are mainly composed of sp2 and sp3 hybridized hydrogenated carbon compounds. Plasma parameters influence the films' growth rate and structure characteristics. The film reduces the water vapor permeation ratio of the PET by 7 times at a film thickness of only 900 nm. (authors)

  7. N-type thermoelectric recycled carbon fibre sheet with electrochemically deposited Bi2Te3

    Science.gov (United States)

    Pang, E. J. X.; Pickering, S. J.; Chan, A.; Wong, K. H.; Lau, P. L.

    2012-09-01

    An N-type thermoelectric recycled carbon fibre sheet with bismuth telluride coating has been successfully synthesised through an electro-deposition technique. The Seebeck coefficient and electrical properties of the combined recycled carbon fibre sheet and bismuth telluride films are reported. Classification of the crystal structure, surface morphology and the elemental composition of the resulting deposits are methodically characterised by XRD, SEM and EDX. Cyclic voltammetry is also carried out in nitric acid solutions to investigate the right range of deposition potential. The synthesis N-type thermoelectric sheet has a highest attainable Seebeck coefficient of -54 μV K-1 and an electrical resistivity of 8.9×10-5 Ω m. The results show slight differences in morphologies and thermoelectric properties for the films deposited at varying deposition potential. The increase in thermoelectrical properties of the recycled carbon fibre is in line with the development of using coated recycled fibre for thermoelectrical applications.

  8. Effect of deposition pressure and post deposition annealing on SmCo thin film properties

    International Nuclear Information System (INIS)

    In this article we report on the effect of the deposition pressure and the post deposition annealing conditions on the structural and magnetic properties of SmCo thin films deposited on Si(100) wafers employing Ta buffer and capping layers. The films were deposited by DC magnetron sputtering and annealed in vacuum at various temperatures. The films under investigation were isotropic with high remanence magnetization, maximum coercive field of 8 kOe and a squareness ratio of coercivity higher than 0.9. It was found that the Ar pressure during the deposition is a key factor in controlling the stoichiometry and the structural and magnetic properties of the SmCo films, while the effect of the annealing temperature is crucial in optimizing the magnetic properties of the films. (copyright 2008 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  9. Iridium thin films deposited via pulsed laser deposition for future applications as transition-edge sensors

    Energy Technology Data Exchange (ETDEWEB)

    Galeazzi, M. E-mail: galeazzi@physics.miami.edu; Chen, C.; Cohn, J.L.; Gundersen, J.O

    2004-03-11

    The University of Miami has recently started developing and studying high-resolution microcalorimeters operating near 100 mK for X-ray and particle physics and astrophysics. These detectors will be based on Transition Edge Sensors technology fabricated using iridium thin films deposited via the Pulsed Laser Deposition technique. We report here the preliminary result of the room temperature characterization of the Ir thin films, and an overview of future plans to use the films as transition edge sensors.

  10. Deposition of metal oxide films and nanostructures by methods derived from photochemical metal organic deposition

    OpenAIRE

    Xin ZHANG

    2009-01-01

    In this research, methods for the deposition of patterned films and nanostructures were developed from photochemical metal organic deposition (PMOD). Positive lithographic PMOD was demonstrated with films of titanium (IV) di-n-butoxide bis(2-ethylhexanoate) (Ti(OBun)2(eh)2), titanium (IV) diisopropoxide bis(2,4-pentanedionate), and zirconium (IV) di-n-butoxide bis(2,4-pentanedionate). The photochemistry of these complexes in films was studied by FTIR, AES, and XRD. Photo-induced reactivity an...

  11. As-grown magnesium diboride superconducting thin films deposited by pulsed laser deposition

    Energy Technology Data Exchange (ETDEWEB)

    Grassano, G.; Ramadan, W.; Ferrando, V.; Bellingeri, E.; Marre, D.; Ferdeghini, C.; Grasso, G.; Putti, M.; Chincarini, A. [INFM, Dipartimento di Fisica, Genoa (Italy); Manfrinetti, P.; Palenzona, A. [INFM, Dipartimento di Chimica e Chimica Industriale, Genoa (Italy)

    2001-09-01

    As-grown superconducting MgB{sub 2} thin films were deposited by pulsed laser deposition on magnesium oxide and sapphire substrates. Starting from a non-stoichiometric, Mg and B mixed-powder target, we were able to grow the superconducting phase during the film deposition, without any further annealing process. So far, samples grown in the temperature range of 400-450 deg. C, and at an argon buffer pressure of the order of 10{sup -2} mbar turned out to be superconducting with an onset temperature of the resistive transition at about 25 K. Even if the deposition process still needs to be fully optimized, we have demonstrated that this method allows us to achieve in situ deposition of as-grown superconducting thin films. This procedure could therefore be promising for the deposition of high-quality epitaxial MgB{sub 2} thin films. (author)

  12. The irradiation studies on diamond-like carbon films

    CERN Document Server

    LiuGuIang; Xie Er Qin

    2002-01-01

    Diamond-like carbon (DLC) films have been deposited on glass substrates using radio-frequency (r.f.) plasma deposition method. gamma-ray, ultraviolet (UV) ray and neutron beam were used to irradiate the DLC films. Raman spectroscopy and infrared (IR) spectroscopy were used to characterize the changing characteristics of SP sup 3 C-H bond and hydrogen content in the films due to the irradiations. It showed that, the damage degrees of the gamma-ray, UV ray and neutron beam on the SP sup 3 C-H bonds are different. Among them, the damage of gamma-ray on the SP sup 3 C-H bond is the weakest. When the irradiation dose of gamma-ray reaches 10x10 sup 4 Gy, the SP sup 3 C-H bond reduces about 50% in number. The square resistance of the films is reduced due to the irradiation of UV ray and this is caused by severe oxidation of the films. Compared with that of the as-deposited one, the IR transmittance of the films irradiated by both gamma-ray and neutron beam is increased to some extent. By using the results on optical...

  13. Coloration efficiency of chemically deposited electrochromic thin films

    International Nuclear Information System (INIS)

    Transparent nickel oxide and copper oxide thin films were produced by very simple and economic method of chemical deposition. Those films were deposited onto fluorine doped tin oxide (FTO) coated glass substrates. Electrochromic test device (ECTD) was constructed by using these films as working electrodes, together with the FTO as a counter electrode in alkaline environment (0,1 M NaOH aqueous solution). All the obtained films exhibited electrochromic behavior. Nichel oxide films were transparent for visible light in the reduced state, and displayed a dark brown color in the oxidised state and displayed a very dark brown color in the reduced state. The coloration efficiency (CE) at wavelength λ=670 nm was estimated from the slope of the graphical presentation of the optical density as a function of the charge density, during the charge extraction (nickel oxide films) and charge insertion (copper oxide films). (Author)

  14. Graphene diamond-like carbon films heterostructure

    Science.gov (United States)

    Zhao, Fang; Afandi, Abdulkareem; Jackman, Richard B.

    2015-03-01

    A limitation to the potential use of graphene as an electronic material is the lack of control over the 2D materials properties once it is deposited on a supporting substrate. Here, the use of Diamond-like Carbon (DLC) interlayers between the substrate and the graphene is shown to offer the prospect of overcoming this problem. The DLC films used here, more properly known as a-C:H with ˜25% hydrogen content, have been terminated with N or F moieties prior to graphene deposition. It is found that nitrogen terminations lead to an optical band gap shrinkage in the DLC, whilst fluorine groups reduce the DLC's surface energy. CVD monolayer graphene subsequently transferred to DLC, N terminated DLC, and F terminated DLC has then been studied with AFM, Raman and XPS analysis, and correlated with Hall effect measurements that give an insight into the heterostructures electrical properties. The results show that different terminations strongly affect the electronic properties of the graphene heterostructures. G-F-DLC samples were p-type and displayed considerably higher mobility than the other heterostructures, whilst G-N-DLC samples supported higher carrier densities, being almost metallic in character. Since it would be possible to locally pattern the distribution of these differing surface terminations, this work offers the prospect for 2D lateral control of the electronic properties of graphene layers for device applications.

  15. Graphene diamond-like carbon films heterostructure

    Energy Technology Data Exchange (ETDEWEB)

    Zhao, Fang; Afandi, Abdulkareem; Jackman, Richard B., E-mail: r.jackman@ucl.ac.uk [London Centre for Nanotechnology, Electronic and Electrical Engineering Department, University College London, 17-19 Gordon Street, London WC1H 0AH (United Kingdom)

    2015-03-09

    A limitation to the potential use of graphene as an electronic material is the lack of control over the 2D materials properties once it is deposited on a supporting substrate. Here, the use of Diamond-like Carbon (DLC) interlayers between the substrate and the graphene is shown to offer the prospect of overcoming this problem. The DLC films used here, more properly known as a-C:H with ∼25% hydrogen content, have been terminated with N or F moieties prior to graphene deposition. It is found that nitrogen terminations lead to an optical band gap shrinkage in the DLC, whilst fluorine groups reduce the DLC's surface energy. CVD monolayer graphene subsequently transferred to DLC, N terminated DLC, and F terminated DLC has then been studied with AFM, Raman and XPS analysis, and correlated with Hall effect measurements that give an insight into the heterostructures electrical properties. The results show that different terminations strongly affect the electronic properties of the graphene heterostructures. G-F-DLC samples were p-type and displayed considerably higher mobility than the other heterostructures, whilst G-N-DLC samples supported higher carrier densities, being almost metallic in character. Since it would be possible to locally pattern the distribution of these differing surface terminations, this work offers the prospect for 2D lateral control of the electronic properties of graphene layers for device applications.

  16. Graphene diamond-like carbon films heterostructure

    International Nuclear Information System (INIS)

    A limitation to the potential use of graphene as an electronic material is the lack of control over the 2D materials properties once it is deposited on a supporting substrate. Here, the use of Diamond-like Carbon (DLC) interlayers between the substrate and the graphene is shown to offer the prospect of overcoming this problem. The DLC films used here, more properly known as a-C:H with ∼25% hydrogen content, have been terminated with N or F moieties prior to graphene deposition. It is found that nitrogen terminations lead to an optical band gap shrinkage in the DLC, whilst fluorine groups reduce the DLC's surface energy. CVD monolayer graphene subsequently transferred to DLC, N terminated DLC, and F terminated DLC has then been studied with AFM, Raman and XPS analysis, and correlated with Hall effect measurements that give an insight into the heterostructures electrical properties. The results show that different terminations strongly affect the electronic properties of the graphene heterostructures. G-F-DLC samples were p-type and displayed considerably higher mobility than the other heterostructures, whilst G-N-DLC samples supported higher carrier densities, being almost metallic in character. Since it would be possible to locally pattern the distribution of these differing surface terminations, this work offers the prospect for 2D lateral control of the electronic properties of graphene layers for device applications

  17. Plasma sputtering system for deposition of thin film combinatorial libraries

    Science.gov (United States)

    Cooper, James S.; Zhang, Guanghai; McGinn, Paul J.

    2005-06-01

    The design of a plasma sputtering system for the deposition of combinatorial libraries is described. A rotating carousel is used to position shadow masks between the targets and the substrate. Multilayer films are built up by depositing sequentially through various masks. Postdeposition annealing is used to promote interdiffusion of the layered structures. Either discrete or compositional gradient libraries can be deposited in this system. Samples appropriate for characterization with a scanning electrochemical microscope or a multichannel microelectrode array system can be produced. The properties of some deposited Pt-Ru films for fuel cell applications are described.

  18. [FTIR spectroscopic studies of inner stress on boron carbon nitride thin films].

    Science.gov (United States)

    Wang, Yu-Xin; Zheng, Ya-Ru; Song, Zhe; Feng, Ke-Cheng; Zhao, Yong-Nian

    2008-07-01

    Boron carbon nitride thin films were deposited by radio frequency (RF) magnetron sputtering technique using a 50 mm-diameter composite target consisting of h-BN and graphite in an Ar-N2 gas mixture. The composite target was composed of two semi disks: one of h-BN and the other one of graphite. The distance between the target and the substrate was kept at 50 mm. The chamber base pressure was below 5 x 10(-4) Pa. During the deposition, the mixture of Ar (80%) and N2 (20%) was injected into the vacuum chamber and the total pressure was 1.3 Pa. The films were grown on silicon substrates at different deposition parameters, including sputtering power of 80-130 W, deposition temperature of 300-500 degrees C and deposition time of 1-4 h. The chemical bonding state of the samples was characterized by Fourier transform infrared absorption spectroscopy (FTIR). The results suggested that all of the films deposited at these deposition parameters are atomic-level hybrids composed of B, C and N atoms. Besides BN and carbons bonds, the boron carbide and carbon nitride bonds were formed in the BCN thin films. And the deposition parameters have important influences on the growth and inner stress of BCN thin films. That is the higher the sputtering power, the larger the inner stress; the higher or lower the deposition temperature, the larger the inner stress; the longer the deposition time, the larger the inner stress. So changing deposition parameters properly is a feasible method to relax the inner stress between the films and substrate. In the conditions of changing one parameter each time, the optimum deposition parameters to prepare BCN thin films with lower inner stress were obtained: sputtering power of 80 W, deposition temperature of 400 degrees C and deposition time of 2 h.

  19. Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films

    Indian Academy of Sciences (India)

    A Pauschitz; J Schalko; T Koch; C Eisenmenger-Sittner; S Kvasnica; Manish Roy

    2003-10-01

    Amorphous carbon film, also known as DLC film, is a promising material for tribological application. It is noted that properties relevant to tribological application change significantly depending on the method of preparation of these films. These properties are also altered by the composition of the films. In view of this, the objective of the present work is to compare the nanoindentation and atomic force microscopy (AFM) study of diamond like carbon (DLC) film obtained by plasma enhanced chemical vapour deposition (PECVD) with the Ti containing amorphous carbon (Ti/-C : H) film obtained by unbalanced magnetron sputter deposition (UMSD). Towards that purpose, DLC and Ti/-C : H films are deposited on silicon substrate by PECVD and UMSD processes, respectively. The microstructural features and the mechanical properties of these films are evaluated by scanning electron microscopy (SEM), transmission electron microscopy (TEM), nanoindentation and by AFM. The results show that the PECVD DLC film has a higher elastic modulus, hardness and roughness than the UMSD Ti/-C : H film. It also has a lower pull off force than Ti containing amorphous carbon film.

  20. Study on re-sputtering during CN{sub x} film deposition through spectroscopic diagnostics of plasma

    Energy Technology Data Exchange (ETDEWEB)

    Liang, Peipei; Yang, Xu; Li, Hui; Cai, Hua [Department of Optical Science and Engineering, Fudan University, Shanghai 200433 (China); Sun, Jian; Xu, Ning [Department of Optical Science and Engineering, Fudan University, Shanghai 200433 (China); Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200433 (China); Wu, Jiada, E-mail: jdwu@fudan.edu.cn [Department of Optical Science and Engineering, Fudan University, Shanghai 200433 (China); Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200433 (China); Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Fudan University, Shanghai 200433 (China)

    2015-10-15

    A nitrogen-carbon plasma was generated during the deposition of carbon nitride (CN{sub x}) thin films by pulsed laser ablation of a graphite target in a discharge nitrogen plasma, and the optical emission of the generated nitrogen-carbon plasma was measured for the diagnostics of the plasma and the characterization of the process of CN{sub x} film deposition. The nitrogen-carbon plasma was recognized to contain various species including nitrogen molecules and molecular ions excited in the ambient N{sub 2} gas, carbon atoms and atomic ions ablated from the graphite target and CN radicals. The temporal evolution and spatial distribution of the CN emission and their dependence on the substrate bias voltage show two groups of CN radicals flying in opposite directions. One represents the CN radicals formed as the products of the reactions occurring in the nitrogen-carbon plasma, revealing the reactive deposition of CN{sub x} film due to the reactive expansion of the ablation carbon plasma in the discharge nitrogen plasma and the effective formation of gaseous CN radicals as precursors for CN{sub x} film growth. The other one represents the CN radicals re-sputtered from the growing CN{sub x} film by energetic plasma species, evidencing the re-sputtering of the growing film accompanying film growth. And, the re-sputtering presents ion-induced sputtering features.

  1. Mechanism and prediction of failure of diamond films deposited on various substrates by HFCVD

    Institute of Scientific and Technical Information of China (English)

    ZHOU Ling-ping; SUN Xin-yuan; LI Shao-lu; LI De-yi; CHEN Xiao-hua

    2004-01-01

    Diamond films were deposited on the WC-Co cemented carbide and Si3N4 ceramic cutting tool substrates by hot-filament-assisted chemical vapour deposition. The adherence property of diamond films was estimated using the critical load (Pcr) in the indentation test. The adhesive strength of diamond films is related to the intermediate layer between the film and the substrate. Poor adhesion of diamond films to polished cemented carbide substrate is owing to the formation of graphite phase in the interface. The adhesion of diamond films deposited on acid etched cemented carbide substrate is improved, and the peeling-off of the films often happens in the loosen layer of WC particles where the cobalt element is nearly removed. The diamond films' adhesion to cemented carbide substrate whose surface layer is decarbonizated is strengthened dramatically because WC phase forms by reaction between the deposited carbon and tungsten in the surface layer of substrates during the deposition of diamond, which results in chemical combination in the film-substrate interface. The adhesion of diamond films to silicon nitride substrate is the firmest due to the formation of chemical combination of the SiC intermediate layer in the interfaces. In the piston-turning application, the diamond-coated Si3N4 ceramic and the cemented carbide cutting tools usually fail in the form of collapsing of edge and cracking or flaking respectively. They have no built-up edge(BUE) as long as coating is intact.As it wears through, BUE develops and the cutting force on it increases 1 - 3 times than that prior to failure. This can predict the failure of diamond-coated cutting tools.

  2. Sputter deposition of BSCCO films from a hollow cathode

    International Nuclear Information System (INIS)

    High-Tc superconducting thin films were deposited onto MgO single crystal substrates from a hollow cathode onto ceramic targets with the nominal composition of Bi2Sr2CaCu2Ox. Films similar in composition to those used for the targets were deposited on MgO substrates by rf sputtering. The effects of sputtering time, rf power, and post-annealing on film microstructure and properties were studied in detail. Substrate temperature was found to have a significant influence on the film characteristics. Initial results show that deposition rates from a hollow cathode are an order of magnitude higher than those of a planar magnetron source at equivalent power levels. Large deposition rates allow for the coating of long lengths of wire

  3. Atomic layer deposition of cobalt carbide films and their magnetic properties using propanol as a reducing agent

    Science.gov (United States)

    Sarr, Mouhamadou; Bahlawane, Naoufal; Arl, Didier; Dossot, Manuel; McRae, Edward; Lenoble, Damien

    2016-08-01

    The investigation of highly conformal thin films using Atomic Layer Deposition (ALD) is driven by a variety of applications in modern technologies. In particular, the emergence of 3D memory device architectures requires conformal materials with tuneable magnetic properties. Here, nanocomposites of carbon, cobalt and cobalt carbide are deposited by ALD using cobalt acetylacetonate with propanol as a reducing agent. Films were grown by varying the ALD deposition parameters including deposition temperature and propanol exposure time. The morphology, the chemical composition and the crystalline structure of the cobalt carbide film were investigated. Vibrating Sample Magnetometer (VSM) measurements revealed magnetic hysteresis loops with a coercivity reaching 500 Oe and a maximal saturation magnetization of 0.9 T with a grain size less than 15 nm. Magnetic properties are shown to be tuneable by adjusting the deposition parameters that significantly affect the microstructure and the composition of the deposited films.

  4. Magnetron deposition of TCO films using ion beam

    Science.gov (United States)

    Asainov, O.; Umnov, S.; Chinin, A.

    2015-11-01

    Thin films of tin oxide (TO) were deposited on the glass substrates at room temperature using reactive magnetron sputtering at various oxygen partial pressures. After the deposition the films were irradiated with argon ions beam. The change of the optical and electrical properties of the films depending on the irradiation time was studied. Films optical properties in the range of 300-1100 nm were investigated by photometry as well as their structural properties were studied using X-ray diffraction. Diffractometric research showed that the films, deposited on a substrate, have a crystal structure, and after argon ions irradiation they become quasi-crystalline (amorphous). It was found that the transmission increases proportionally with the irradiation time, but the surface resistance -disproportionally.

  5. Chemical Liquid Phase Deposition of Thin Aluminum Oxide Films

    Institute of Scientific and Technical Information of China (English)

    SUN,Jie(孙捷); SUN,Ying-Chun(孙迎春)

    2004-01-01

    Thin aluminum oxide films were deposited by a new and simple physicochemical method called chemical liquid phase deposition (CLD) on semiconductor materials. Aluminum sulfate with crystallized water and sodium bicarbonate were used as precursors for film growth, and the control of the system's pH value played an important role in this experiment. The growth rate is 12 nm/h with the deposition at [Al2(SO4)3]=0.0837 mol·L-1, [NaHCO3]=0.214 mol·L-1, 15 ℃. Post-growth annealing not only densifies and purifies the films, but results in film crystallization as well, Excellent quality of A12O3 films in this work is supported by electron dispersion spectroscopy,Fourier transform infrared spectrum, X-ray diffraction spectrum and scanning electron microscopy photograph.

  6. Nanocomposite oxide thin films grown by pulsed energy beam deposition

    Energy Technology Data Exchange (ETDEWEB)

    Nistor, M., E-mail: mnistor@infim.ro [National Institute for Lasers, Plasma and Radiation Physics, L22, P.O. Box MG-36, 77125 Bucharest-Magurele (Romania); Petitmangin, A.; Hebert, C. [INSP, Universite Pierre et Marie Curie - Paris 6, Campus Boucicaut, 140 rue de Lourmel, 75015 Paris (France); Seiler, W. [LIM, ENSAM, 151 boulevard de l' Hopital, 75013 Paris (France)

    2011-04-01

    Highly non-stoichiometric indium tin oxide (ITO) thin films were grown by pulsed energy beam deposition (pulsed laser deposition-PLD and pulsed electron beam deposition-PED) under low oxygen pressure. The analysis of the structure and electrical transport properties showed that ITO films with a large oxygen deficiency (more than 20%) are nanocomposite films with metallic (In, Sn) clusters embedded in a stoichiometric and crystalline oxide matrix. The presence of the metallic clusters induces specific transport properties, i.e. a metallic conductivity via percolation with a superconducting transition at low temperature (about 6 K) and the melting and freezing of the In-Sn clusters in the room temperature to 450 K range evidenced by large changes in resistivity and a hysteresis cycle. By controlling the oxygen deficiency and temperature during the growth, the transport and optical properties of the nanocomposite oxide films could be tuned from metallic-like to insulating and from transparent to absorbing films.

  7. Preparation of composite electroheat carbon film

    Institute of Scientific and Technical Information of China (English)

    XIA Jin-tong; TU Chuan-jun; LI Yan; HU Li-min; DENG Jiu-hua

    2005-01-01

    A kind of conductive and heating unit, which can reach a high surface electroheat temperature at a low voltage, was developed in view of the traditional electroheat coating which has a low surface electroheat temperature and an insufficient heat resistance of its binder. The coating molded electroheat carbon film(CMECF) was prepared by carbonizing the coating which was prepared by adding modified resin into flake graphite and carbon fiber, coating molded onto the surface of the heat resisting matrix after dried, while the hot pressing molded electroheat thick carbon film(HPMETCF) was prepared by carbonizing the bodies whose powders were hot pressing molded directly.The surface and inner microstructure of the carbon film was characterized and analyzed by SEM and DSC/TG, while electroheat property was tested by voltage-current volume resistivity tester and electrical parameter tester. The results show that, close-packed carbon network configuration is formed within the composite electroheat carbon film film after anti-oxidizable treatment reaches a higher surface electroheat temperature than that of the existing electroheat coatings at a low voltage, and has excellent electroheat property, high thermal efficiency as well as stable physicochemical property. It is found that, at room temperature(19± 2 ℃) and 22 V for 5 min, the surface electroheat temperature of the self-produced CMECF (mfiller/mresin = 1. 8/1) reaches 112 ℃ while HPMETCF (mfiller/mresin = 3. 6/1) reaches 265 ℃.

  8. Synthesis and characterization of carbon nanotube reinforced copper thin films

    OpenAIRE

    Otto, Cornelia

    2006-01-01

    Two model composites of copper and carbon nanotubes were fabricated by very different deposition methods. Copper electrodeposition in a plating bath containing nanotubes created a 3D matrix of randomly oriented CNTs within a thick, 20 micron Cu film. In contrast, sandwiching a layer of well-separated nanotubes between two sub-micron sputtered Cu layers produced a 2D-composite with nanotubes lying parallel to the substrate surface. These composites, which were mechanically tested using var...

  9. Nitrogen incorporation in sputter deposited molybdenum nitride thin films

    Energy Technology Data Exchange (ETDEWEB)

    Stöber, Laura, E-mail: laura.stoeber@tuwien.ac.at; Patocka, Florian, E-mail: florian.patocka@tuwien.ac.at; Schneider, Michael, E-mail: michael.schneider@tuwien.ac.at; Schmid, Ulrich, E-mail: ulrich.e366.schmid@tuwien.ac.at [Institute of Sensor and Actuator Systems, TU Wien, Gußhausstraße 27-29, A-1040 Vienna (Austria); Konrath, Jens Peter, E-mail: jenspeter.konrath@infineon.com; Haberl, Verena, E-mail: verena.haberl@infineon.com [Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach (Austria)

    2016-03-15

    In this paper, the authors report on the high temperature performance of sputter deposited molybdenum (Mo) and molybdenum nitride (Mo{sub 2}N) thin films. Various argon and nitrogen gas compositions are applied for thin film synthetization, and the amount of nitrogen incorporation is determined by Auger measurements. Furthermore, effusion measurements identifying the binding conditions of the nitrogen in the thin film are performed up to 1000 °C. These results are in excellent agreement with film stress and scanning electron microscope analyses, both indicating stable film properties up to annealing temperatures of 500 °C.

  10. A glucose biosensor using methyl viologen redox mediator on carbon film electrodes

    OpenAIRE

    Ghica, Mariana Emilia; Christopher M. A. Brett

    2005-01-01

    A new methyl viologen-mediated amperometric enzyme electrode sensitive to glucose has been developed using carbon film electrode substrates. Carbon film electrodes from resistors fabricated by pyrolytic deposition of carbon were modified by immobilization of glucose oxidase through cross-linking with glutaraldehyde in the presence of bovine serum albumin. The mediator, methyl viologen, was directly immobilised with the enzyme together with Nafion cation-exchange polymer. The electrochemistry ...

  11. Removal of Ozone by Carbon Nanotubes/Quartz Fiber Film.

    Science.gov (United States)

    Yang, Shen; Nie, Jingqi; Wei, Fei; Yang, Xudong

    2016-09-01

    Ozone is recognized as a harmful gaseous pollutant, which can lead to severe human health problems. In this study, carbon nanotubes (CNTs) were tested as a new approach for ozone removal. The CNTs/quartz fiber film was fabricated through growth of CNTs upon pure quartz fiber using chemical vapor deposition method. Ozone conversion efficiency of the CNTs/quartz fiber film was tested for 10 h and compared with that of quartz film, activated carbon (AC), and a potassium iodide (KI) solution under the same conditions. The pressure resistance of these materials under different airflow rates was also measured. The results showed that the CNTs/quartz fiber film had better ozone conversion efficiency but also higher pressure resistance than AC and the KI solution of the same weight. The ozone removal performance of the CNTs/quartz fiber film was comparable with AC at 20 times more weight. The CNTs played a dominant role in ozone removal by the CNTs/quartz fiber film. Its high ozone conversion efficiency, lightweight and free-standing properties make the CNTs/quartz fiber film applicable to ozone removal. Further investigation should be focused on reducing pressure resistance and studying the CNT mechanism for removing ozone.

  12. Plasma deposition of polymer composite films incorporating nanocellulose whiskers

    OpenAIRE

    Samyn, P; Airoudj, A.; Laborie, M.-P.; Mathew, A. P.; Roucoules, V.

    2011-01-01

    Abstract In a trend for sustainable engineering and functionalization of surfaces, we explore the possibilities of gas phase processes to deposit nanocomposite films. From an analysis of pulsed plasma polymerization of maleic anhydride in the presence of nanocellulose whiskers, it seems that thin nanocomposite films can be deposited with various patterns. By specifically modifying plasma parameters such as total power, duty cycle, and monomer gas pressure, the nanocellulose whisker...

  13. ZnS thin film deposited with chemical bath deposition process directed by different stirring speeds

    International Nuclear Information System (INIS)

    In this combined film thickness, scanning electron microscopy (SEM), X-ray diffraction and optical properties study, we explore the effects of different stirring speeds on the growth and optical properties of ZnS film deposited by CBD method. From the disclosed changes of thickness of ZnS film, we conclude that film thickness is independent of the stirring speeds in the heterogeneous process (deposition time less than 40 min), but increases with the stirring speeds and/or deposition time increasing in the homogeneous process. Grazing incident X-ray diffraction (GIXRD) and the study of optical properties disclosed that the ZnS films grown with different stirring speeds show partially crystallized film and exhibit good transmittance (70-88% in the visible region), but the stirring speeds cannot give much effects on the structure and optical properties in the homogeneous process.

  14. Method and apparatus for making diamond-like carbon films

    Science.gov (United States)

    Pern, Fu-Jann; Touryan, Kenell J.; Panosyan, Zhozef Retevos; Gippius, Aleksey Alekseyevich

    2008-12-02

    Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.

  15. Electrochromism of the electroless deposited cuprous oxide films

    International Nuclear Information System (INIS)

    Thin cuprous oxide films were prepared by a low cost, chemical deposition (electroless) method onto glass substrates pre-coated with fluorine doped tin oxide. The X-ray diffraction pattern confirmed the Cu2O composition of the films. Visible transmittance spectra of the cuprous oxide films were studied for the as-prepared, colored and bleached films. The cyclic voltammetry study showed that those films exhibited cathode coloring electrochromism, i.e. the films showed change of color from yellowish to black upon application of an electric field. The transmittance across the films for laser light of 670 nm was found to change due to the voltage change for about 50%. The coloration memory of those films was also studied during 6 h, ex-situ. The coloration efficiency at 670 nm was calculated to be 37 cm2/C

  16. Electrochromism of the electroless deposited cuprous oxide films

    Energy Technology Data Exchange (ETDEWEB)

    Neskovska, R. [Faculty of Technical Sciences, University ' St. Clement Ohridski' , Bitola (Macedonia, The Former Yugoslav Republic of); Ristova, M. [Faculty of Natural Sciences and Mathematics, Institute of Physics, P.O. Box 162, Skopje (Macedonia, The Former Yugoslav Republic of)]. E-mail: mristova@iunona.pmf.ukim.edu.mk; Velevska, J. [Faculty of Natural Sciences and Mathematics, Institute of Physics, P.O. Box 162, Skopje (Macedonia, The Former Yugoslav Republic of); Ristov, M. [Macedonian Academy of Sciences and Arts, Skopje, Bul. Krste Misirkov bb, Skopje (Macedonia, The Former Yugoslav Republic of)

    2007-04-09

    Thin cuprous oxide films were prepared by a low cost, chemical deposition (electroless) method onto glass substrates pre-coated with fluorine doped tin oxide. The X-ray diffraction pattern confirmed the Cu{sub 2}O composition of the films. Visible transmittance spectra of the cuprous oxide films were studied for the as-prepared, colored and bleached films. The cyclic voltammetry study showed that those films exhibited cathode coloring electrochromism, i.e. the films showed change of color from yellowish to black upon application of an electric field. The transmittance across the films for laser light of 670 nm was found to change due to the voltage change for about 50%. The coloration memory of those films was also studied during 6 h, ex-situ. The coloration efficiency at 670 nm was calculated to be 37 cm{sup 2}/C.

  17. Characterization of polymer thin films obtained by pulsed laser deposition

    International Nuclear Information System (INIS)

    The development of laser techniques for the deposition of polymer and biomaterial thin films on solid surfaces in a controlled manner has attracted great attention during the last few years. Here we report the deposition of thin polymer films, namely Polyepichlorhydrin by pulsed laser deposition. Polyepichlorhydrin polymer was deposited on flat substrate (i.e. silicon) using an NdYAG laser (266 nm, 5 ns pulse duration and 10 Hz repetition rate). The obtained thin films have been characterized by atomic force microscopy, scanning electron microscopy, Fourier transform infrared spectroscopy and spectroscopic ellipsometry. It was found that for laser fluences up to 1.5 J/cm2 the chemical structure of the deposited polyepichlorhydrin polymer thin layers resembles to the native polymer, whilst by increasing the laser fluence above 1.5 J/cm2 the polyepichlorohydrin films present deviations from the bulk polymer. Morphological investigations (atomic force microscopy and scanning electron microscopy) reveal continuous polyepichlorhydrin thin films for a relatively narrow range of fluences (1-1.5 J/cm2). The wavelength dependence of the refractive index and extinction coefficient was determined by ellipsometry studies which lead to new insights about the material. The obtained results indicate that pulsed laser deposition method is potentially useful for the fabrication of polymer thin films to be used in applications including electronics, microsensor or bioengineering industries.

  18. Photoluminescence properties of poly (p-phenylene vinylene) films deposited by chemical vapor deposition

    International Nuclear Information System (INIS)

    Photoluminescence spectra of PPV at varying thicknesses and temperatures have been studied. A study of the quenching of the polymer film using a modified version of fluorescence spectroscopy reveals interface effects dominating at thicknesses below about 600 Å, while bulk effects dominate at higher thicknesses. The application of the Stern–Volmer equation to solid film is discussed. Stern–Volmer plots were nonlinear with downward deviations at higher thickness of the film which was explained due to self-quenching in films and larger conformational change and increased restriction from change in electron density due to electron transition during excitation in bulk polymer films over 60 nm thick. PPV deposited into porous (∼4 nm in diameter) nanostructured substrate shows a larger 0–0 than 0–1 transition peak intensity and decreased disorder in the films due to structure imposed by substrate matrix. Temperature dependent effects are measured for a film at 500 Å, right on the border between the two areas. PPV films deposited on porous methyl silsesquioxane (MSQ) were also examined in order to compare the flat film to a substrate that allows for the domination of interface effects. The enthalpies of the first two peaks are very similar, but the third peak demonstrates a lower enthalpy and a larger wavelength shift with temperature. Films deposited inside pores show a smaller amount of disorder than flat films. Calculation of the Huang–Rhys factor at varying temperatures for the flat film and film in porous MSQ shows large temperature dependence for the flat film but a smaller amount of disorder in the nanostructured film. -- Highlights: • Poly (p-phenylene vinylene) films deposited by chemical vapor deposition exhibited photoluminescence properties. • Fluorescence spectra of the polymer films revealed interface effects dominating at thicknesses below about 600 Å, while bulk effects dominate at higher thicknesses. • Stern–Volmer plots were

  19. Pulsed laser deposition and characterisation of thin superconducting films

    Energy Technology Data Exchange (ETDEWEB)

    Morone, A. [CNR, zona industriale di Tito Scalo, Potenza (Italy). Istituto per i Materiali Speciali

    1996-09-01

    Same concepts on pulsed laser deposition of thin films will be discussed and same examples of high transition temperature (HTc) BiSrCaCuO (BISCO) and low transition temperature NbN/MgO/NbN multilayers will be presented. X-ray and others characterizations of these films will be reported and discussed. Electrical properties of superconducting thin films will be realized as a function of structural and morphological aspect.

  20. Plasma deposition of fluorocarbon thin films from c-C4F8 using pulsed and continuous rf excitation

    International Nuclear Information System (INIS)

    Fluorocarbon films of varying composition have been deposited from pulsed and continuous plasmas of octafluorocyclobutane (c-C4F8) and c-C4F8/Ar. Continuous plasma deposition rates are a very weak function of applied rf power (may be within experimental error). Pulsed plasma deposition rates are significantly lower than continuous plasma rates at the same average power. The pulsed plasma deposition rates can be attributed almost entirely to the plasma on time during the pulse, but there is a slight dependence on pulse off time. Ar addition affects the deposition rates through a residence time effect, but also affects the deposition chemistry by reducing the degree of C4F8 dissociation, resulting in more fluorinated films. Refractive indices for all films increase approximately linearly with applied rf power, with the pulsed plasma-deposited films falling on the same curve. Carbon 1s x-ray photoelectron spectroscopy shows that the continuous plasma-deposited films become increasingly fluorinated as the rf power is decreased. Pulsed plasma films are more fluorinated than similar average power continuous plasma films: 44% CF2 for 10/50 (400 W on time, 67 W average power) versus 37% for 50 W continuous. Literature and preliminary gas-phase measurements suggest that the C4F8 is not fully dissociated in either plasma system and that larger species in the gas phase may play a significant role in the deposition mechanisms

  1. Structure and photoluminescence of films composed of carbon nanoflakes

    Energy Technology Data Exchange (ETDEWEB)

    Wang, Yi, E-mail: wangyi@cqut.edu.cn [College of Mechanical Engineering, Chongqing University of Technology, 69 Hongguang Rd, Lijiatuo, Banan District, Chongqing 400054, P R China (China); Li, Lin [College of Chemistry, Chongqing Normal University, Chongqing 401331, P R China (China); Cheng, Qijin [School of Energy Research, Xiamen University, Xiamen 361005, P R China (China); He, Chunlin [Liaoning Provincial Key Laboratory of Advanced Materials, Shenyang University, Shenyang 110044, P R China (China)

    2015-05-15

    Carbon nanoflake films (CNFFs) were directly synthesized by plasma-enhanced hot filament chemical vapor deposition. The results of field emission scanning electron microscope, transmission electron microscope, micro-Raman spectroscope, X-ray photoelectron spectroscope and Fourier transform infrared spectroscope indicate that the CNFFs are composed of bending carbon nanoflakes with the hydrocarbon and hydroxyl functional groups, and the carbon nanoflakes become thin in a long deposition time. The structural change of carbon nanoflakes is related to the formation of structural units and the aggregation of hydrocarbon radicals near the carbon nanoflakes. Moreover, the photoluminescence (PL) properties of CNFFs were studied in a Ramalog system and a PL spectroscope. The PL results indicate that the PL intensity of CNFFs is lowered with the increase of thickness of CNFFs. The lowering of PL intensity for the thick CNFFs originates from the effect of more dangling bonds in the CNFFs. In addition, we studied the structural difference of carbon nanoflakes grown by different CVD systems and the PL difference of carbon nanoflakes in different measurement systems. The results achieved here are important to control the growth and structure of graphene-based materials and fabricate the optoelectronic devices related to carbon-based materials. - Highlights: • Carbon nanoflake films (CNFFs) were synthesized by PEHFCVD. • The structure of CNFFs is related to the aggregation of carbon hydrocarbon radicals. • The PL intensity of CNFFs is lowered with the thickness increase of CNFFs. • The change of PL intensity of CNFFs is due to the dangling bonds in CNFFs. • The widening of PL bands of CNFFs results from the diversity of carbon nanofalkes.

  2. Characterization of CdTe Films Deposited at Various Bath Temperatures and Concentrations Using Electrophoretic Deposition

    Directory of Open Access Journals (Sweden)

    Zulkarnain Zainal

    2012-05-01

    Full Text Available CdTe film was deposited using the electrophoretic deposition technique onto an ITO glass at various bath temperatures. Four batch film compositions were used by mixing 1 to 4 wt% concentration of CdTe powder with 10 mL of a solution of methanol and toluene. X-ray Diffraction analysis showed that the films exhibited polycrystalline nature of zinc-blende structure with the (111 orientation as the most prominent peak. From the Atomic Force Microscopy, the thickness and surface roughness of the CdTe film increased with the increase of CdTe concentration. The optical energy band gap of film decreased with the increase of CdTe concentration, and with the increase of isothermal bath temperature. The film thickness increased with respect to the increase of CdTe concentration and bath temperature, and following, the numerical expression for the film thickness with respect to these two variables has been established.

  3. Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

    International Nuclear Information System (INIS)

    Silver (Ag) layers were deposited by remote plasma enhanced atomic layer deposition (PALD) using Ag(fod)(PEt3) (fod = 2,2-dimethyl-6,6,7,7,8,8,8-heptafluorooctane-3,5-dionato) as precursor and hydrogen plasma on silicon substrate covered with thin films of SiO2, TiN, Ti/TiN, Co, Ni, and W at different deposition temperatures from 70  to 200 °C. The deposited silver films were analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) with energy dispersive x-ray spectroscopy, four point probe measurement, ellipsometric measurement, x-ray fluorescence (XRF), and x-ray diffraction (XRD). XPS revealed pure Ag with carbon and oxygen contamination close to the detection limit after 30 s argon sputtering for depositions made at 120 and 200 °C substrate temperatures. However, an oxygen contamination was detected in the Ag film deposited at 70 °C after 12 s argon sputtering. A resistivity of 5.7 × 10−6 Ω cm was obtained for approximately 97 nm Ag film on SiO2/Si substrate. The thickness was determined from the SEM cross section on the SiO2/Si substrate and also compared with XRF measurements. Polycrystalline cubic Ag reflections were identified from XRD for PALD Ag films deposited at 120 and 200 °C. Compared to W surface, where poor adhesion of the films was found, Co, Ni, TiN, Ti/TiN and SiO2 surfaces had better adhesion for silver films as revealed by SEM, TEM, and AFM images

  4. Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

    Energy Technology Data Exchange (ETDEWEB)

    Amusan, Akinwumi A., E-mail: akinwumi.amusan@ovgu.de; Kalkofen, Bodo; Burte, Edmund P. [Institute of Micro and Sensor Systems, Otto-von-Guericke University, Universitätsplatz 2, 39106 Magdeburg (Germany); Gargouri, Hassan; Wandel, Klaus; Pinnow, Cay [SENTECH Instruments GmbH, Schwarzschildstraße 2, 12489 Berlin (Germany); Lisker, Marco [IHP, Im Technologiepark 25, 15236 Frankfurt (Oder) (Germany)

    2016-01-15

    Silver (Ag) layers were deposited by remote plasma enhanced atomic layer deposition (PALD) using Ag(fod)(PEt{sub 3}) (fod = 2,2-dimethyl-6,6,7,7,8,8,8-heptafluorooctane-3,5-dionato) as precursor and hydrogen plasma on silicon substrate covered with thin films of SiO{sub 2}, TiN, Ti/TiN, Co, Ni, and W at different deposition temperatures from 70  to 200 °C. The deposited silver films were analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) with energy dispersive x-ray spectroscopy, four point probe measurement, ellipsometric measurement, x-ray fluorescence (XRF), and x-ray diffraction (XRD). XPS revealed pure Ag with carbon and oxygen contamination close to the detection limit after 30 s argon sputtering for depositions made at 120 and 200 °C substrate temperatures. However, an oxygen contamination was detected in the Ag film deposited at 70 °C after 12 s argon sputtering. A resistivity of 5.7 × 10{sup −6} Ω cm was obtained for approximately 97 nm Ag film on SiO{sub 2}/Si substrate. The thickness was determined from the SEM cross section on the SiO{sub 2}/Si substrate and also compared with XRF measurements. Polycrystalline cubic Ag reflections were identified from XRD for PALD Ag films deposited at 120 and 200 °C. Compared to W surface, where poor adhesion of the films was found, Co, Ni, TiN, Ti/TiN and SiO{sub 2} surfaces had better adhesion for silver films as revealed by SEM, TEM, and AFM images.

  5. Atomic oxygen resistant behaviors of Mo/diamond-like carbon nanocomposite lubricating films

    International Nuclear Information System (INIS)

    Mo doped diamond-like carbon (Mo/DLC) films were deposited on Si substrates via unbalanced magnetron sputtering of molybdenum combined with plasma chemical vapor deposition of CH4/Ar. The microstructure of the films, characterized by transmission electron microscopy and selected area electron diffraction, was considered as a nanocomposite with nano-sized MoC particles uniformly embedded in the amorphous carbon matrix. The structure, morphology, surface composition and tribological properties of the Mo/DLC films before and after the atomic oxygen (AO) irradiation were investigated and a comparison made with the DLC films. The Mo/DLC films exhibited more excellent degradation resistant behaviors in AO environment than the DLC films, and the MoC nanoparticles were proved to play a critical role of preventing the incursion of AO and maintaining the intrinsic structure and excellent tribological properties of DLC films.

  6. Resonant infrared pulsed laser deposition of cyclic olefin copolymer films

    Science.gov (United States)

    Singaravelu, S.; Klopf, J. M.; Schriver, K. E.; Park, H. K.; Kelley, M. J.; Haglund, R. F.

    2014-03-01

    Barrier materials on thin-film organic optoelectronic devices inhibit the uptake of water, oxygen, or environmental contaminants, and fabricating them is a major challenge. By definition, these barrier layers must be insoluble, so the usual routes to polymer- or organic-film deposition by spin coating are not problematic. In this paper, we report comparative studies of pulsed laser deposition of cyclic olefin copolymer (COC), an excellent moisture barrier and a model system for a larger class of protective materials that are potentially useful in organic electronic devices, such as organic light-emitting diodes (OLEDs). Thin films of COC were deposited by resonant and nonresonant infrared pulsed laser ablation of solid COC targets, using a free-electron laser tuned to the 3.43 μm C-H stretch of the COC, and a high-intensity nanosecond Q-switched laser operated at 1064 nm. The ablation craters and deposited films were characterized by scanning-electron microscopy, Fourier-transform infrared spectrometry, atomic-force microscopy, high-resolution optical microscopy, and surface profilometry. Thermal-diffusion calculations were performed to determine the temperature rise induced in the film at the C-H resonant wavelength. The results show that resonant infrared pulsed laser deposition (RIR-PLD) is an effective, low-temperature thin-film deposition technique that leads to evaporation and deposition of intact molecules in homogeneous, smooth films. Nonresonant PLD, on the other hand, leads to photothermal damage, degradation of the COC polymers, and to the deposition only of particulates.

  7. Strontium-Doped Lanthanum Manganite Films Prepared by Magnetic Deposition

    DEFF Research Database (Denmark)

    Menon, Mohan; Larsen, Casper; Andersen, Kjeld Bøhm

    2009-01-01

    with the concentration of the suspension. Deposition phenomena were explained by modeling the magnetic flux in the deposition cell. Particles aligned with the flux lines, forming chains of LSM particles that, upon sintering, resulted in the formation of porous films with long chains of LSM grains....

  8. Ubiquitous pentacene monolayer on metals deposited onto pentacene films.

    Science.gov (United States)

    Jaeckel, B; Sambur, J B; Parkinson, B A

    2007-11-01

    Photoelectron spectroscopy (XPS and UPS) was used to study the deposition of metal layers (Ag, Cu, and Au) onto pentacene films. Very low work functions were measured (PhiAg = 3.91 eV, PhiCu = 3.93 eV, and PhiAu = 4.3 eV) for all of the metals, in agreement with results from the literature. The intensities of the C 1s core-level signals from pentacene that were monitored during stepwise metal deposition leveled off at a value of about 30% of a thick pentacene film. This C 1s intensity is comparable to that of one monolayer of pentacene deposited onto the respective metal. The valence band spectra of metals deposited onto pentacene and spectra collected for pentacene deposited onto bare metal surfaces are very similar. These findings lead to the conclusion that approximately one monolayer of pentacene is always present on top of the freshly deposited metal film, which explains the very low work function of the metals when they are deposited onto organic films. We expect similar behavior with other nonreactive metals deposited onto stable organic layers.

  9. Deposition of SiOx barrier films by O2/TMDSO RF-PECVD

    Institute of Scientific and Technical Information of China (English)

    Zhou Mei-Li; Fu Ya-Bo; Chen Qiang; Ge Yuan-Jing

    2007-01-01

    This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition (PECVD) for the application of transparent barrier packaging. The variations of O2/Tetramethyldisiloxane (TMDSO) ratio and input power in radio frequency (RF) plasma are carried out to optimize barrier properties of the SiOx coated film. The properties of the coatings are characterized by Fourier transform infrared,water wpour transmission rate (WVTR), oxygen transmission rate (OTR), and atomic force microscopy analysers. It is found that the O2/TMDSO ratio exceeding 2:1 and the input power over 200 W yield SiOx films with low carbon contents which can be good to the barrier (WVTR and OTR) properties of the SiOx coatings. Also, the film properties not only depend on oxygen concentration of the inlet gas mixtures and input power, but also relate to the surface morphology of the coating.

  10. Properties of a-C:H:O plasma polymer films deposited from acetone vapors

    Energy Technology Data Exchange (ETDEWEB)

    Drabik, M., E-mail: martin.drabik@gmail.com [Empa, Swiss Federal Laboratories for Materials Science and Technology, Lerchenfeldstrasse 5, 9014 St. Gallen (Switzerland); Celma, C. [Empa, Swiss Federal Laboratories for Materials Science and Technology, Lerchenfeldstrasse 5, 9014 St. Gallen (Switzerland); Kousal, J.; Biederman, H. [Charles University in Prague, Faculty of Mathematics and Physics, Department of Macromolecular Physics, V Holešovičkách 2, 180 00 Prague 8 (Czech Republic); Hegemann, D. [Empa, Swiss Federal Laboratories for Materials Science and Technology, Lerchenfeldstrasse 5, 9014 St. Gallen (Switzerland)

    2014-12-31

    To gain insight into the deposition and stability of oxygen-containing plasma polymer films, the properties of amorphous oxygenated hydrocarbon (a-C:H:O) plasma polymer coatings deposited from acetone vapors under various experimental conditions are investigated. Apart from the discharge power, the influence of the reactive carbon dioxide (CO{sub 2}) gas on the structure of the resulting films is studied. It is found by characterization using X-ray Photoelectron Spectroscopy and Fourier-Transform Infrared Spectroscopy that the experimental conditions particularly influence the amount of oxygen in the deposited a-C:H:O plasma polymer films. The O/C elemental ratio increases with increasing amount of CO{sub 2} in the working gas mixture (up to 0.2 for 24 sccm of CO{sub 2} at 30 W) and decreases with increasing RF discharge power (down to 0.17 for 50 W). Furthermore, the nature of bonds between the oxygen and carbon atoms has been examined. Only low amounts of double and triple bonded carbon are observed. This has a particular influence on the aging of the plasma polymer films which is studied both in ambient air and in distilled water for up to 4 months. Overall, stable a-C:H:O plasma polymer films are deposited comprising low amounts (up to about 5%) of ester/carboxyl groups. - Highlights: • Hydrocarbon plasma polymer films with variable oxygen content can be prepared. • Stable oxygenated hydrocarbon plasma polymers contain max 5% of ester/carboxyl groups. • Acetone-derived plasma polymer films can be used as permanent hydrophilic surfaces.

  11. Surface treatment effect on Si (111) substrate for carbon deposition using DC unbalanced magnetron sputtering

    Energy Technology Data Exchange (ETDEWEB)

    Aji, A. S., E-mail: aji.ravazes70@gmail.com; Sahdan, M. F.; Hendra, I. B.; Dinari, P.; Darma, Y. [Quantum Semiconductor and Devices Lab., Physics of Material Electronics Research Division, Department of Physics, Institut Teknologi Bandung (Indonesia)

    2015-04-16

    In this work, we studied the effect of HF treatment in silicon (111) substrate surface for depositing thin layer carbon. We performed the deposition of carbon by using DC Unbalanced Magnetron Sputtering with carbon pallet (5% Fe) as target. From SEM characterization results it can be concluded that the carbon layer on HF treated substrate is more uniform than on substrate without treated. Carbon deposition rate is higher as confirmed by AFM results if the silicon substrate is treated by HF solution. EDAX characterization results tell that silicon (111) substrate with HF treatment have more carbon fraction than substrate without treatment. These results confirmed that HF treatment on silicon Si (111) substrates could enhance the carbon deposition by using DC sputtering. Afterward, the carbon atomic arrangement on silicon (111) surface is studied by performing thermal annealing process to 900 °C. From Raman spectroscopy results, thin film carbon is not changing until 600 °C thermal budged. But, when temperature increase to 900 °C, thin film carbon is starting to diffuse to silicon (111) substrates.

  12. The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure

    OpenAIRE

    Reuter, R; Rügner, K.; Ellerweg, D.; Arcos, T. de los; von Keudell, A.; Benedikt, J

    2011-01-01

    The deposition of thin SiO$_x$C$_y$H$_z$ or SiO$_x$H$_y$ films by means of atmospheric pressure microplasma jets with admixture of Hexamethyldisiloxane (HMDSO) and oxygen and the role of surface reactions in film growth are investigated. Two types of microplasma jets, one with a planar electrodes and operated in helium gas and the other one with a coaxial geometry operated in argon, are used to study the deposition process. The growth rate of the film and the carbon-content in the film are me...

  13. Vacuum deposition of stoichiometric crystalline PbS films: The effect of sulfurizing environment during deposition

    Science.gov (United States)

    Singh, B. P.; Kumar, R.; Kumar, A.; Tyagi, R. C.

    2015-10-01

    Thin film of lead sulfide (PbS) was deposited onto highly cleaned glass and quartz substrates using a vacuum thermal evaporation technique. The effect of the sulfurizing environment on the growth and properties of vacuum-deposited PbS thin film was studied. The ambient sulfurizing environment was created by thermal decomposition of thiourea inside the vacuum chamber during deposition to maintain the stoichiometry and quality of the PbS film. The sulfurizing gas H2S, produced in the thermal decomposition of the solid sulfur containing thiourea readily combines with the cations (Pb2+) without leaving any anions (S2-) at the substrates and also has not produced any excess of sulfur at the substrates. The deposited film was characterized by optical spectroscopy, x-ray diffraction patterns, scanning electron micrographs with energy dispersive analysis of x-rays, and atomic force micrographs. The physical characterization of the deposited PbS film revealed that the surface of film grown in the sulfurizing environment improved and contained more stoichiometric sulfur in comparison to film deposited without the sulfurizing environment.

  14. Thin-film organic photonics molecular layer deposition and applications

    CERN Document Server

    Yoshimura, Tetsuzo

    2011-01-01

    Among the many atomic/molecular assembling techniques used to develop artificial materials, molecular layer deposition (MLD) continues to receive special attention as the next-generation growth technique for organic thin-film materials used in photonics and electronics. Thin-Film Organic Photonics: Molecular Layer Deposition and Applications describes how photonic/electronic properties of thin films can be improved through MLD, which enables precise control of atomic and molecular arrangements to construct a wire network that achieves ""three-dimensional growth"". MLD facilitates dot-by-dot--o

  15. Anomalous hysteresis properties of iron films deposited on liquid surfaces

    Science.gov (United States)

    Ye, Quan-Lin; Feng, Chun-Mu; Xu, Xiao-Jun; Jin, Jin-Sheng; Xia, A.-Gen; Ye, Gao-Xiang

    2005-07-01

    A nearly free sustained iron film system, deposited on silicone oil surfaces by vapor-phase deposition method, has been fabricated and its crystal structure as well as magnetic properties has been studied. Both the temperature-dependent coercivity Hc(T) and exchange anisotropy field HE(T) of the iron films possess a maximum peak around the critical temperature Tcrit=10-15 and 4K, respectively. Our experimental results show that the anomalous hysteresis properties mainly result from the oxide surfaces of the films with spin-glass-like phase below freezing temperature Tf=30-50K.

  16. Friction of diamond-like carbon films in different atmospheres

    International Nuclear Information System (INIS)

    Diamond-like carbon (DLC) films constitute a class of new materials with a wide range of compositions, properties, and performance. In particular, the tribological properties of these films are rather intriguing and can be strongly influenced by the test conditions and environment. In this paper, we performed a series of model experiments in high vacuum and with various added gases to elucidate the influence of different test environments on the tribological behavior of three DLC films. Specifically, we studied the behavior of a hydrogen-free film produced by a cathodic arc process and two highly hydrogenated films produced by plasma-enhanced chemical-vapor deposition. Flats and balls used in our experiments were coated with DLC and tested in a pin-on-disc machine under a load of 1 N and at constant rotational frequency. With a low background pressure, in the 10(sup -6) Pa range, the highly hydrogenated films exhibited a friction coefficient of less than 0.01, whereas the hydrogen-free film gave a friction coefficient of approximately 0.6. Adding oxygen or hydrogen to the experimental environment changed the friction to some extent. However, admission of water vapor into the test chamber caused large changes: the friction coefficient decreased drastically for the hydrogen-free DLC film whereas it increased a bit for one of the highly hydrogenated films. These results indicate that water molecules play a prominent role in the frictional behavior of DLC films-most notably for hydrogen-free films but also for highly hydrogenated films

  17. Deposition technology and properties of diamond-like carbon thin film on tappet%发动机挺柱沉积类金刚石薄膜的工艺及性能

    Institute of Scientific and Technical Information of China (English)

    黄平; 张营营; 张斌; 范梅梅; 李兴杰; 强力

    2013-01-01

    采用磁控溅射法,以Cr、Ti和石墨为靶材,Ar、N2和CH4为溅射气体,在材料为20CrMo的发动机挺柱上利用多层梯度复合技术沉积了低摩擦类金刚石(DLC)薄膜复合层CrTi/CrTiN/CrTiC/DLC.该薄膜复合层的纳米压痕硬度高达13 GPa,结合力为50 N,表面粗糙度为0.398 nm.在SRV-IV微动摩擦磨损试验机上进行耐磨损试验后,DLC复合薄膜挺柱的磨损率为渗碳挺柱的1/6.该研究技术具有自主知识产权,实现了挺柱批量化覆膜加工,并有望在发动机主要摩擦副上推广应用.%A low-friction multilayered diamond-like carbon (DLC) film with gradient structure of CrTi/CrTiN/CrTiC/DLC was deposited on tappet made of 20CrMo by magnetron sputtering of Cr,Ti,and graphite targets in Ar/N2/CH4 atmosphere.The composite thin film features hardness up to 13 GPa,bonding strength 50 N,and surface roughness 0.398 nm.The wear rate of the sputtered tappet is 1/6 of that of a carburized one after testing by SRV-IV fretting tribometer.The bulk thin film processing of tappets by using the technology with independent intellectual property rights has been realized,showing a promising use in manufacturing main friction couples of engines.

  18. Preparation of thin carbon films (1963)

    International Nuclear Information System (INIS)

    Carbon deposits have been prepared on silica glass supports in order to determine more accurately than by weighing the losses liable to occur during oxidation, for example under irradiation in the presence of CO2. Several processes have been studied with a view to obtaining deposits for which the variation in optical density as a function of carbon departure shall be reproducible for each sample. Among the methods used, the most satisfactory is that in which the pyrolytic carbon deposited on a carbon filament is evaporated; however only the samples prepared simultaneously exhibit the required identical behaviour. The carbonaceous deposits have been studied by micro-electronic diffraction. An examination of the photographs shows the presence of graphite monocrystals of about (30 μ)2. (author)

  19. Characterization of Si:O:C:H films fabricated using electron emission enhanced chemical vapour deposition

    Energy Technology Data Exchange (ETDEWEB)

    Durrant, Steven F. [Laboratorio de Plasmas Tecnologicos, Campus Experimental de Sorocaba, Universidade Estadual Paulista-UNESP, Avenida Tres de Marco, 511, Alto da Boa Vista, 18087-180, Soracaba, SP (Brazil)], E-mail: steve@sorocaba.unesp.br; Rouxinol, Francisco P.M.; Gelamo, Rogerio V. [Instituto de Fisica Gleb Wataghin, Universidade Estadual de Campinas, 13083-970, Campinas, SP (Brazil); Trasferetti, B. Claudio [Present address: Superintendencia Regional da Policia Federal em Sao Paulo, Setor Tecnico-Cientifico, Rua Hugo d' Antola 95/10o Andar, Lapa de Baixo, 05038-090 Sao Paulo, SP (Brazil); Davanzo, C.U. [Instituto de Quimica, Universidade Estadual de Campinas, 13083-970, Campinas, SP (Brazil); Bica de Moraes, Mario A. [Instituto de Fisica Gleb Wataghin, Universidade Estadual de Campinas, 13083-970, Campinas, SP (Brazil)

    2008-01-15

    Silicon-based polymers and oxides may be formed when vapours of oxygen-containing organosilicone compounds are exposed to energetic electrons drawn from a hot filament by a bias potential applied to a second electrode in a controlled atmosphere in a vacuum chamber. As little deposition occurs in the absence of the bias potential, electron impact fragmentation is the key mechanism in film fabrication using electron-emission enhanced chemical vapour deposition (EEECVD). The feasibility of depositing amorphous hydrogenated carbon films also containing silicon from plasmas of tetramethylsilane or hexamethyldisiloxane has already been shown. In this work, we report the deposition of diverse films from plasmas of tetraethoxysilane (TEOS)-argon mixtures and the characterization of the materials obtained. The effects of changes in the substrate holder bias (V{sub S}) and of the proportion of TEOS in the mixture (X{sub T}) on the chemical structure of the films are examined by infrared-reflection absorption spectroscopy (IRRAS) at near-normal and oblique incidence using unpolarised and p-polarised, light, respectively. The latter is particularly useful in detecting vibrational modes not observed when using conventional near-normal incidence. Elemental analyses of the film were carried out by X-ray photoelectron spectroscopy (XPS), which was also useful in complementary structural investigations. In addition, the dependencies of the deposition rate on V{sub S} and X{sub T} are presented.

  20. Properties of a-C:H:Si thin films deposited by middle-frequency magnetron sputtering

    Science.gov (United States)

    Jiang, Jinlong; Wang, Yubao; Du, Jinfang; Yang, Hua; Hao, Junying

    2016-08-01

    The silicon doped hydrogenated amorphous carbon (a-C:H:Si) films were prepared on silicon substrates by middle-frequency magnetron sputtering silicon target in an argon and methane gas mixture atmosphere. The deposition rate, chemical composition, structure, surface properties, stress, hardness and tribological properties in the ambient air of the films were systemically investigated using X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), atomic force microscopy (AFM), nanoindentation and tribological tester. The results show that doped silicon content in the films is controlled in the wide range from 39.7 at.% to 0.2 at.% by various methane gas flow rate, and methane flow rate affects not only the silicon content but also its chemical bonding structure in the films due to the transformation of sputtering modes. Meanwhile, the sp3 carbon component in the films linearly increases with increasing of methane flow rate. The film deposited at moderate methane flow rate of 40-60 sccm exhibits the very smooth surface (RMS roughness 0.4 nm), low stress (0.42 GPa), high hardness (21.1 GPa), as well as low friction coefficient (0.038) and wear rate (1.6 × 10-7 mm3/Nm). The superior tribological performance of the films could be attributed to the formation and integral covering of the transfer materials on the sliding surface and their high hardness.

  1. Chemical vapor deposition reactor. [providing uniform film thickness

    Science.gov (United States)

    Chern, S. S.; Maserjian, J. (Inventor)

    1977-01-01

    An improved chemical vapor deposition reactor is characterized by a vapor deposition chamber configured to substantially eliminate non-uniformities in films deposited on substrates by control of gas flow and removing gas phase reaction materials from the chamber. Uniformity in the thickness of films is produced by having reactive gases injected through multiple jets which are placed at uniformally distributed locations. Gas phase reaction materials are removed through an exhaust chimney which is positioned above the centrally located, heated pad or platform on which substrates are placed. A baffle is situated above the heated platform below the mouth of the chimney to prevent downdraft dispersion and scattering of gas phase reactant materials.

  2. Tungsten trioxide thin films prepared by electrostatic spray deposition technique

    International Nuclear Information System (INIS)

    Tungsten trioxide (WO3) thin films deposited on a Pt-coated alumina substrate using the electrostatic spray deposition (ESD) technique is reported in this paper. As precursor solution, tungsten (VI) ethoxide in ethanol was used. The morphology and the microstructure of the films were studied using scanning electron microscopy coupled with energy dispersive X-ray analysis, transmission electron microscopy, X-ray diffraction, and Raman spectroscopy. Dense to porous morphologies were obtained by tuning the deposition temperature. Impedance spectroscopy and current-voltage measurements were used to study the electrical behaviour of the films in air, in temperature range 300-500 deg. C. The activation energy was estimated from Arrhenius plots. Considering the obtained results, the ESD technique proved to be an effective technique for the fabrication of porous tungsten trioxide thin films

  3. Plasma deposition of polymer composite films incorporating nanocellulose whiskers

    Science.gov (United States)

    Samyn, P.; Airoudj, A.; Laborie, M.-P.; Mathew, A. P.; Roucoules, V.

    2011-11-01

    In a trend for sustainable engineering and functionalization of surfaces, we explore the possibilities of gas phase processes to deposit nanocomposite films. From an analysis of pulsed plasma polymerization of maleic anhydride in the presence of nanocellulose whiskers, it seems that thin nanocomposite films can be deposited with various patterns. By specifically modifying plasma parameters such as total power, duty cycle, and monomer gas pressure, the nanocellulose whiskers are either incorporated into a buckled polymer film or single nanocellulose whiskers are deposited on top of a polymeric film. The density of the latter can be controlled by modifying the exact positioning of the substrate in the reactor. The resulting morphologies are evaluated by optical microscopy, AFM, contact angle measurements and ellipsometry.

  4. Aerosol deposition of (Cu,Ti) substituted bismuth vanadate films

    International Nuclear Information System (INIS)

    Bismuth vanadate, Bi4V2O11, and related compounds with various metal (Me) substitutions, Bi4(MexV1−x)2O11−δ, show some of the highest ionic conductivities among the known solid oxide electrolytes. Films of Cu and Ti substituted bismuth vanadate were prepared by an aerosol deposition method, a spray coating process also described as room temperature impact consolidation. Resultant films, several microns in thickness, were dense with good adhesion to the substrate. Scanning electron microscopy and high temperature X-ray diffraction were used to monitor the effects of temperature on the structure and microstructure of the film. The particle size remained nano-scale while microstrain decreased rapidly up to 500 °C, above which coarsening and texturing increased rapidly. Impedance measurements of films deposited on inter-digital electrodes revealed an annealing effect on the ionic conductivity, with the conductivity exceeding that of a screen printed film, and approaching that of bulk ceramic. - Highlights: • Cu and Ti doped bismuth vanadate films were prepared by aerosol deposition (AD). • Dense 3–5 μm thick films were deposited on alumina, silicon and gold electrodes. • Annealing of the AD-layer increases the conductivity by 1.5 orders of magnitude. • Effect of temperature on structure and microstructure was investigated

  5. Aerosol deposition of (Cu,Ti) substituted bismuth vanadate films

    Energy Technology Data Exchange (ETDEWEB)

    Exner, Jörg, E-mail: Functional.Materials@Uni-Bayreuth.de [University of Bayreuth, Department of Functional Materials, Universitätsstraße 30, 95440 Bayreuth (Germany); Fuierer, Paul [Materials and Metallurgical Engineering Department, New Mexico Institute of Mining and Technology, Socorro, NM 87801 (United States); Moos, Ralf [University of Bayreuth, Department of Functional Materials, Universitätsstraße 30, 95440 Bayreuth (Germany)

    2014-12-31

    Bismuth vanadate, Bi{sub 4}V{sub 2}O{sub 11}, and related compounds with various metal (Me) substitutions, Bi{sub 4}(Me{sub x}V{sub 1−x}){sub 2}O{sub 11−δ}, show some of the highest ionic conductivities among the known solid oxide electrolytes. Films of Cu and Ti substituted bismuth vanadate were prepared by an aerosol deposition method, a spray coating process also described as room temperature impact consolidation. Resultant films, several microns in thickness, were dense with good adhesion to the substrate. Scanning electron microscopy and high temperature X-ray diffraction were used to monitor the effects of temperature on the structure and microstructure of the film. The particle size remained nano-scale while microstrain decreased rapidly up to 500 °C, above which coarsening and texturing increased rapidly. Impedance measurements of films deposited on inter-digital electrodes revealed an annealing effect on the ionic conductivity, with the conductivity exceeding that of a screen printed film, and approaching that of bulk ceramic. - Highlights: • Cu and Ti doped bismuth vanadate films were prepared by aerosol deposition (AD). • Dense 3–5 μm thick films were deposited on alumina, silicon and gold electrodes. • Annealing of the AD-layer increases the conductivity by 1.5 orders of magnitude. • Effect of temperature on structure and microstructure was investigated.

  6. Deposition of antimony telluride thin film by ECALE

    Institute of Scientific and Technical Information of China (English)

    GAO; Xianhui; YANG; Junyou; ZHU; Wen; HOU; Jie; BAO; Siqian; FAN; Xi'an; DUAN; Xingkai

    2006-01-01

    The process of Sb2Te3 thin film growth on the Pt substrate by electrochemical atomic layer epitaxy (ECALE) was studied. Cyclic voltammetric scanning was performed to analyze the electrochemical behavior of Te and Sb on the Pt substrate. Sb2Te3 film was formed using an automated flow deposition system by alternately depositing Te and Sb atomic layers for 400 circles. The deposited Sb2Te3 films were characterized by XRD, EDX, FTIR and FESEM observation. Sb2Te3 compound structure was confirmed by XRD pattern and agreed well with the results of EDX quantitative analysis and coulometric analysis. FESEM micrographs showed that the deposit was composed of fine nano particles with size of about 20 nm. FESEM image of the cross section showed that the deposited films were very smooth and dense with thickness of about 190 nm. The optical band gap of the deposited Sb2Te3 film was determined as 0.42 eV by FTIR spectroscopy, and it was blue shifted in comparison with that of the bulk Sb2Te3 single crystal due to its nanocrystalline microstructure.

  7. UV laser deposition of metal films by photogenerated free radicals

    Science.gov (United States)

    Montgomery, R. K.; Mantei, T. D.

    1986-01-01

    A novel photochemical method for liquid-phase deposition of metal films is described. In the liquid phase deposition scheme, a metal containing compound and a metal-metal bonded carbonyl complex are dissolved together in a polar solvent and the mixture is irradiated using a UV laser. The optical arrangement consists of a HeCd laser which provides 7 mW of power at a wavelength of 325 nm in the TEM(OO) mode. The beam is attenuated and may be expanded to a diameter of 5-20 mm. Experiments with photochemical deposition of silver films onto glass and quartz substrates are described in detail. Mass spectrometric analysis of deposited silver films indicated a deposition rate of about 1 A/s at incident power levels of 0.01 W/sq cm. UV laser-induced copper and palladium films have also been obtained. A black and white photograph showing the silver Van Der Pauw pattern of a solution-deposited film is provided.

  8. Microreactor-Assisted Solution Deposition for Compound Semiconductor Thin Films

    Directory of Open Access Journals (Sweden)

    Chang-Ho Choi

    2014-05-01

    Full Text Available State-of-the-art techniques for the fabrication of compound semiconductors are mostly vacuum-based physical vapor or chemical vapor deposition processes. These vacuum-based techniques typically operate at high temperatures and normally require higher capital costs. Solution-based techniques offer opportunities to fabricate compound semiconductors at lower temperatures and lower capital costs. Among many solution-based deposition processes, chemical bath deposition is an attractive technique for depositing semiconductor films, owing to its low temperature, low cost and large area deposition capability. Chemical bath deposition processes are mainly performed using batch reactors, where all reactants are fed into the reactor simultaneously and products are removed after the processing is finished. Consequently, reaction selectivity is difficult, which can lead to unwanted secondary reactions. Microreactor-assisted solution deposition processes can overcome this limitation by producing short-life molecular intermediates used for heterogeneous thin film synthesis and quenching the reaction prior to homogeneous reactions. In this paper, we present progress in the synthesis and deposition of semiconductor thin films with a focus on CdS using microreactor-assisted solution deposition and provide an overview of its prospect for scale-up.

  9. Sheet Resistance and Gas-Sensing Properties of Tin Oxide Thin Films by Plasma Enhanced Chemical Vapor Deposition

    Institute of Scientific and Technical Information of China (English)

    刘彭义; 陈俊芳; 孙汪典

    2004-01-01

    Tin oxide (SnO2) thin films are prepared at different temperatures by plasmaenhanced chemical vapor deposition (PECVD). The structural characterizations of the films are investigated by various analysis techniques. X-ray diffraction patterns (XRD) show that the phase of SnO2 films are different at different deposition temperatures. The sheet resistance of the films decreases with increase of deposition temperature. X-ray photoelectron spectroscopy (XPS) shows that the SnO2 thin film is non-stoichiometric. The sheet resistance increases with increase in oxygen flow. Sb-doped SnO2 thin films are more sensitive to alcohol than carbon monoxide, and its maximum sensitivity is about 220%.

  10. Sputter deposited Terfenol-D thin films for multiferroic applications

    Science.gov (United States)

    Mohanchandra, K. P.; Prikhodko, S. V.; Wetzlar, K. P.; Sun, W. Y.; Nordeen, P.; Carman, G. P.

    2015-09-01

    In this paper, we study the sputter deposition and crystallization process to produce high quality Terfenol-D thin film (100 nm) with surface roughness below 1.5 nm. The Terfenol-D thin film was produced using DC magnetron sputtering technique with various sputtering parameters and two different crystallization methods, i.e. substrate heating and post-annealing. Several characterization techniques including WDS, XRD, TEM, AFM, SQUID and MOKE were used to determine the physical and magnetic properties of the Terfenol-D films. TEM studies reveal that the film deposited on the heated substrate has large grains grown along the film thickness producing undesirable surface roughness while the film crystallized by post-annealing method shows uniformly distributed small grains producing a smooth surface. The Terfenol-D film was also deposited onto (011) cut PMN-PT single crystal substrate. With the application of an electric field the film exhibited a 1553 Oe change in coercivity with an estimated saturation magnetostriction of λs = 910 x 10-6.

  11. Sputter deposited Terfenol-D thin films for multiferroic applications

    Directory of Open Access Journals (Sweden)

    K. P. Mohanchandra

    2015-09-01

    Full Text Available In this paper, we study the sputter deposition and crystallization process to produce high quality Terfenol-D thin film (100 nm with surface roughness below 1.5 nm. The Terfenol-D thin film was produced using DC magnetron sputtering technique with various sputtering parameters and two different crystallization methods, i.e. substrate heating and post-annealing. Several characterization techniques including WDS, XRD, TEM, AFM, SQUID and MOKE were used to determine the physical and magnetic properties of the Terfenol-D films. TEM studies reveal that the film deposited on the heated substrate has large grains grown along the film thickness producing undesirable surface roughness while the film crystallized by post-annealing method shows uniformly distributed small grains producing a smooth surface. The Terfenol-D film was also deposited onto (011 cut PMN-PT single crystal substrate. With the application of an electric field the film exhibited a 1553 Oe change in coercivity with an estimated saturation magnetostriction of λs = 910 x 10−6.

  12. Electrostatic spray deposited zinc oxide films for gas sensor applications

    International Nuclear Information System (INIS)

    In this work, thin films of zinc oxide (ZnO) for gas-sensor applications were deposited on platinum coated alumina substrate, using electrostatic spray deposition (ESD) technique. As precursor solution zinc acetate in ethanol was used. Scanning electron microscopy (SEM) evaluation showed a porous and homogeneous film morphology and the energy dispersive X-ray analysis (EDX) confirmed the composition of the films with no presence of other impurities. The microstructure studied with X-ray diffraction (XRD) and Raman spectroscopy indicated that the ZnO oxide films are crystallized in a hexagonal wurtzite phase. The films showed good sensitivity to 1 ppm nitrogen dioxide (NO2) at 300 oC while a much lower sensitivity to 12 ppm hydrogen sulphide (H2S)

  13. Nanodiamond films deposited at moderate temperature on pure titanium substrate pretreated by ultrasonic scratching in diamond powder suspension

    Institute of Scientific and Technical Information of China (English)

    Syed Jawid Askari; Fanxiu Lv; Akhtar Farid; Fengying Wang; Qi He; Zuyuan Zhou

    2006-01-01

    Nanocrystalline diamond (NCD) film deposition on pure titanium and Ti alloys is extraordinarily difficult because of the high diffusion coefficient of carbon in Ti, the large mismatch in their thermal expansion coefficients, the complex nature of the interlayer formed during diamond deposition, and the difficulty to achieve very high nucleation density. In this investigation, NCD films were successfully deposited on pure Ti substrate by using a novel substrate pretreatment of ultrasonic scratching in a diamond powder-ethanol suspension and by a two-step process at moderate temperature. It was shown that by scratching with a 30-μm diamond suspension for 1 h, followed by a 10-h diamond deposition, a continuous NCD film was obtained with an average grain size of about 200 nm. Detailed experimental results on the preparation, characterization, and successful deposition of the NCD films on Ti were discussed.

  14. High-quality AlN films grown on chemical vapor-deposited graphene films

    Directory of Open Access Journals (Sweden)

    Chen Bin-Hao

    2016-01-01

    Full Text Available We report the growth of high-quality AlN films on graphene. The graphene films were synthesized by CVD and then transferred onto silicon substrates. Epitaxial aluminum nitride films were deposited by DC magnetron sputtering on both graphene as an intermediate layer and silicon as a substrate. The structural characteristics of the AlN films and graphene were investigated. Highly c-axis-oriented AlN crystal structures are investigated based on the XRDpatterns observations.

  15. High-quality AlN films grown on chemical vapor-deposited graphene films

    OpenAIRE

    Chen Bin-Hao; Hsu Hsiu-Hao; Lin David T.W.

    2016-01-01

    We report the growth of high-quality AlN films on graphene. The graphene films were synthesized by CVD and then transferred onto silicon substrates. Epitaxial aluminum nitride films were deposited by DC magnetron sputtering on both graphene as an intermediate layer and silicon as a substrate. The structural characteristics of the AlN films and graphene were investigated. Highly c-axis-oriented AlN crystal structures are investigated based on the XRDpatterns observations.

  16. Chemical Structure of Carbon Nitride Films Prepared by MW-ECR Plasma Enhanced Magnetron Sputtering

    Institute of Scientific and Technical Information of China (English)

    XU Jun; GAO Peng; DING Wan-yu; LI Xin; DENG Xin-lu; DONG Chuang

    2004-01-01

    Amorphous carbon nitride thin films were prepared by plasma-enhanced DC magnetron sputtering using twinned microwave electron cyclotron resonance plasma sources. Chemical structure of deposited films was investigated using X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy. The results indicate that the deposition rate is strongly affected by direct current bias, and the films are mainly composed of a single amorphous carbon nitride phase with N/C ratio close to C3N4, and the bonding is predominantly of C-N type.

  17. Chemical Structure of Carbon Nitride Films Prepared by MW-ECR Plasma Enhanced Magnetron Sputtering

    Institute of Scientific and Technical Information of China (English)

    XUJun,GAOPeng; DINGWan-yu; LIXin; DENGXin-lu; DONGChuang

    2004-01-01

    Amorphous carbon nitride thin films were prepared by plasma-enhanced DC magnetron sputtering using twinned microwave electron cyclotron resonance plasma sources. Chemical structure of deposited films was investigated using X-ray photoelectron spectroscopy and Fourier transtorm infrared spectroscopy. The results indicate that the deposition rate is strongly affected by direct current bias, and the films are mainly composed of a single amorphous carbon nitride phase with N/C ratio close to C3N4, and the bonding is predominantly of C-N type.

  18. Structural and optical properties of tellurite thin film glasses deposited by pulsed laser deposition

    International Nuclear Information System (INIS)

    Tellurite (TeO2-TiO2-Nb2O5) thin film glasses have been produced by pulsed laser deposition at room temperature at laser energy densities in the range of 0.8-1.5 J/cm2 and oxygen pressures in the range of 3-11 Pa. The oxygen concentration in the films increases with laser energy density to reach values very close to that of the bulk glass at 1.5 J/cm2, while films prepared at 1.5 J/cm2 and pressures above 5 Pa show oxygen concentration in excess of 10% comparing to the glass. X-ray photoelectron spectroscopy shows the presence of elementary Te in films deposited at O2 pressures ≤ 5 Pa that is not detected at higher pressures, while analysis of Raman spectra of the samples suggests a progressive substitution of TeO3 trigonal pyramids by TeO4 trigonal bipyramids in the films when increasing their oxygen content. Spectroscopic ellipsometry analysis combined with Cauchy and effective medium modeling demonstrates the influence of these compositional and structural modifications on the optical response of the films. Since the oxygen content determines their optical response through the structural modifications induced in the films, those can be effectively controlled by tuning the deposition conditions, and films having large n (2.08) and reduced k (-4) at 1.5 μm have been produced using the optimum deposition conditions.

  19. Methane Flow Rate Effects On The Optical Properties of Amorphous Silicon Carbon (a-SiC:H Films Deposited By DC Sputtering Methods

    Directory of Open Access Journals (Sweden)

    Rosari Saleh

    2002-04-01

    Full Text Available We have investigated the refractive index (n and the optical absorption coeffi cient (α from refl ection and transmission measurements on hydrogenated amorphous silicon carbon (a-SiC:H fi lms. The a-SiC:H fi lms were prepared by dc sputtering method using silicon target in argon and methane gas mixtures. The refractive index (n decreases as the methane fl ow rate increase. The optical absorption coeffi cient (α shifts to higher energy with increasing methane fl ow rate. At higher methane fl ow rate, the fi lms tend to be more disorder and have wider optical gap. The relation of the optical properties and the disorder amorphous network with the compositional properties will be discussed.

  20. Carbon films produced from ionic liquid carbon precursors

    Science.gov (United States)

    Dai, Sheng; Luo, Huimin; Lee, Je Seung

    2013-11-05

    The invention is directed to a method for producing a film of porous carbon, the method comprising carbonizing a film of an ionic liquid, wherein the ionic liquid has the general formula (X.sup.+a).sub.x(Y.sup.-b).sub.y, wherein the variables a and b are, independently, non-zero integers, and the subscript variables x and y are, independently, non-zero integers, such that ax=by, and at least one of X.sup.+ and Y.sup.- possesses at least one carbon-nitrogen unsaturated bond. The invention is also directed to a composition comprising a porous carbon film possessing a nitrogen content of at least 10 atom %.

  1. Deuterium retention in the carbon co-deposition layers deposited by magnetron sputtering in D2/He atmosphere

    International Nuclear Information System (INIS)

    Carbon was deposited on Si and W substrates using a D2/He plasma in a radio frequency magnetron sputtering system. The deposited layers were examined with ion beam analysis (IBA), Raman spectra analysis (RS) and scanning electron microscopy (SEM). The growth rate of the layers deposited at 2.5 Pa total pressure and 300 K decreased with increasing He fraction in the D2/He gas mixture. The deuterium concentration in the layers deposited on the Si substrate increased from 14% to 28% when the flow rate of the He gas relative to the D2 gas was varied from 0.125 to 0.5, but the deuterium concentration in the layers on a W substrate decreased from 24% to 14%. Deuterium or helium retention and the layer thickness all significantly decreased when the substrate temperature was increased from 423 K to 773 K. Raman analysis showed that the deposited layers were amorphous deuterated-carbon layers (named a-C: D layer) and the extent of bond disorder increased dramatically with the increasing helium content in the film. Blisters and bubbles occurred in the films for high helium content in the films, and surface cracking and exfoliation were also observed

  2. Electrochemical and Antimicrobial Properties of Diamondlike Carbon-Metal Composite Films

    Energy Technology Data Exchange (ETDEWEB)

    MORRISON, M. L.; BUCHANAN, R. A.; LIAW, P. K.; BERRY, C. J.; BRIGMON, R.; RIESTER, L.; JIN, C.; NARAYAN, R. J.

    2005-05-11

    Implants containing antimicrobial metals may reduce morbidity, mortality, and healthcare costs associated with medical device-related infections. We have deposited diamondlike carbon-silver (DLC-Ag), diamondlike carbon-platinum (DLC-Pt), and diamondlike carbon-silver-platinum (DLC-AgPt) thin films using a multicomponent target pulsed laser deposition process. Transmission electron microscopy of the DLC-silver and DLC-platinum composite films revealed that the silver and platinum self-assemble into nanoparticle arrays within the diamondlike carbon matrix. The diamondlike carbon-silver film possesses hardness and Young's modulus values of 37 GPa and 331 GPa, respectively. The diamondlike carbon-metal composite films exhibited passive behavior at open-circuit potentials. Low corrosion rates were observed during testing in a phosphate-buffered saline (PBS) electrolyte. In addition, the diamondlike carbon-metal composite films were found to be immune to localized corrosion below 1000 mV (SCE). DLC-silver-platinum films demonstrated exceptional antimicrobial properties against Staphylococcus bacteria. It is believed that a galvanic couple forms between platinum and silver, which accelerates silver ion release and provides more robust antimicrobial activity. Diamondlike carbon-silver-platinum films may provide unique biological functionalities and improved lifetimes for cardiovascular, orthopaedic, biosensor, and implantable microelectromechanical systems.

  3. Electron bombardment of certain thin films during deposition

    International Nuclear Information System (INIS)

    The performance of multilayer thin film optical filters was studied. In 1947, R.M. Rice established the technique of bombarding the substrate with electrons of several kilovolts as the films were being deposited. This process improved the durability of zinc sulfide films dramatically. An electron source filament was installed inside the coating chamber and electrically isolated the substrate holder, which was connected to a positive high voltage supply. An accelerating loop placed just above the filament enchanced its efficiency. The source was calibrated by measuring the current through the substrate holder. Single layer films of five different materials were deposited, each at its own set of electron bombardment parameters. The microstructure was analyzed. Antimony trioxide films showed a shift in lattice orientation, but this did not affect columnar structure or macroscopic quantities. Potassium hexafluorozirconate films showed elimination of both crystal structure and columnar growth, resulting in slightly reduced durability and some absorption. Silicon monoxide films suffered no change in structure or properties. Zinc sulfide films demonstrated the change in crystal structure, which was quantified and shown to improve moisture resistance. Optical properties were unaffected. Magnesium fluoride films showed a slight increase in crystallinity with only subtle changes in durability and optical properties. Generally, electron bombardment reduced or rearranged crystal structure

  4. Reactive DC Magnetron Sputtering Deposition of Copper Nitride Thin Film

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    Copper nitride thin film was deposited on glass substrates by reactive DC (direct current) magnetron sputtering at a 0.5 Pa N2 partial pressure and different substrate temperatures. The as-prepared film, characterized with X-Ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy measurements, showed a composed structure of Cu3N crystallites with anti-ReO3 structure and a slight oxidation of the resulted film.The crystal structure and growth rate of Cu3N films were affected strongly by substrate temperature. The preferred crystalline orientation of Cu3N films were (111) and (200) at RT, 100℃. These peaks decayed at 200℃ and 300℃ only Cu (111) peak was noticed. Growth of Cu3N films at 100℃ is the optimum substrate temperature for producing high-quality (111) Cu3N films. The deposition rate of Cu3N films estimated to be in range of 18-30 nm/min increased while the resistivity and the microhardness of Cu3N films decreased when the temperature of glass substrate increased.

  5. Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

    International Nuclear Information System (INIS)

    Yttrium oxide thin films are deposited using indigenously developed metal organic precursor (2,2,6,6-tetra methyl-3,5-hepitane dionate) yttrium, commonly known as Y(thd)3 (synthesized by ultrasound method). Microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition process was used for these depositions. Depositions were carried out at a substrate temperature of 350 oC with argon to oxygen gas flow rates fixed to 1 sccm and 10 sccm respectively throughout the experiments. The precursor evaporation temperature (precursor temperature) was varied over a range of 170-275 oC keeping all other parameters constant. The deposited coatings are characterized by X-ray photoelectron spectroscopy, glancing angle X-ray diffraction and infrared spectroscopy. Thickness and refractive index of the coatings are measured by the spectroscopic ellipsometry. Hardness and elastic modulus of the films are measured by load depth sensing nanoindentation technique. C-Y2O3 phase is deposited at lower precursor temperature (170 oC). At higher temperature (220 oC) cubic yttrium oxide is deposited with yttrium hydroxide carbonate as a minor phase. When the temperature of the precursor increased (275 oC) further, hexagonal Y2O3 with some multiphase structure including body centered cubic yttria and yttrium silicate is observed in the deposited film. The properties of the films drastically change with these structural transitions. These changes in the film properties are correlated here with the precursor evaporation characteristics obtained at low pressures.

  6. Modification of rubber surface with hydrogenated diamond-like carbon thin films

    NARCIS (Netherlands)

    Pei, Y. T.; Bui, X. L.; De Hosson, J. Th. M.; Laudon, M; Romanowicz, B

    2009-01-01

    Thin films of hydrogenated diamond-like carbon (DLC) have been deposited on hydrogenated nitrile butadiene rubber (HNBR) for reduction of friction and enhancement of wear resistance of dynamic rubber seals, by sputtering graphite targets in C(2)H(2)/Ar plasma. The wax removal and pre-deposition plas

  7. Investigation of thin film deposition on stainless steel 304 substrates under different operating conditions

    Science.gov (United States)

    Chowdhury, M. A.; Nuruzzaman, D. M.

    2016-02-01

    In recent times, friction and wear in relation to the deposited carbon films on the steel substrates are important issues for industrial applications. In this research study, solid thin films were deposited on the stainless steel 304 (SS 304) substrates under different operating conditions. In the experiments, natural gas (97.14% methane) was used as a precursor gas in a hot filament thermal chemical vapor deposition (CVD) reactor. Deposition rates on SS 304 substrates were investigated under gas flow rates 0.5 - 3.0 l/min, pressure 20 - 50 torr, gap between activation heater and substrate 3.0 - 6.0 mm and deposition duration 30 - 120 minutes. The obtained results show that there are significant effects of these parameters on the deposition rates on SS 304 within the observed range. Friction coefficient of SS 304 sliding against SS 314 was also investigated under normal loads 5 - 10 N and sliding velocities 0.5 - m/s before and after deposition. The experimental results reveal that in general, frictional values are lower after deposition than that of before deposition.

  8. Photoluminescence of amorphous carbon films fabricated by layer-by-layer hydrogen plasma chemical annealing method

    Institute of Scientific and Technical Information of China (English)

    徐骏; 黄晓辉; 李伟; 王立; 陈坤基

    2002-01-01

    A method in which nanometre-thick film deposition was alternated with hydrogen plasma annealing (layer-by-layermethod) was applied to fabricate hydrogenated amorphous carbon films in a conventional plasma-enhanced chemicalvapour deposition system. It was found that the hydrogen plasma treatment could decrease the hydrogen concentrationin the films and change the sp2/sp3 ratio to some extent by chemical etching. Blue photoluminescence was observed atroom temperature, as a result of the reduction of sp2 clusters in the films.

  9. Structural Characterization of Carbon Nanomaterial Film In Situ Synthesized on Various Bulk Metals

    Directory of Open Access Journals (Sweden)

    J. Y. Xu

    2014-01-01

    Full Text Available Carbon nanofiber films were prepared via a simple chemical vapor deposition (CVD method on various bulk metal substrates including bulk 316 L stainless steel, pure cobalt, and pure nickel treated by surface mechanical attrition treatment (SMAT. The microstructures of the carbon nanomaterial film were studied by SEM, TEM, XRD, and Raman spectroscopy. In this paper, bulk metallic materials treated by SMAT served as substrates as well as catalysts for carbon nanomaterial film formation. The results indicate that the carbon nanofiber films are formed concerning the catalytic effects of the refined metallic particles during CVD on the surface of SMAT-treated bulk metal substrates. However, distinguished morphologies of carbon nanomaterial film are displayed in the case of the diverse bulk metal substrates.

  10. Pulsed laser deposition of niobium nitride thin films

    International Nuclear Information System (INIS)

    Niobium nitride (NbNx) films were grown on Nb and Si(100) substrates using pulsed laser deposition. NbNx films were deposited on Nb substrates using PLD with a Q-switched Nd:YAG laser (λ = 1064 nm, ∼40 ns pulse width, and 10 Hz repetition rate) at different laser fluences, nitrogen background pressures and deposition substrate temperatures. When all the fabrication parameters are fixed, except for the laser fluence, the surface roughness, nitrogen content, and grain size increase with increasing laser fluence. Increasing nitrogen background pressure leads to a change in the phase structure of the NbNx films from mixed β-Nb2N and cubic δ-NbN phases to single hexagonal β-Nb2N. The substrate temperature affects the preferred orientation of the crystal structure. The structural and electronic, properties of NbNx deposited on Si(100) were also investigated. The NbNx films exhibited a cubic δ-NbN with a strong (111) orientation. A correlation between surface morphology, electronic, and superconducting properties was found. The observations establish guidelines for adjusting the deposition parameters to achieve the desired NbNx film morphology and phase

  11. Pulsed laser deposition of niobium nitride thin films

    Energy Technology Data Exchange (ETDEWEB)

    Farha, Ashraf Hassan, E-mail: ahass006@odu.edu; Elsayed-Ali, Hani E., E-mail: helsayed@odu.edu [Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, VA 23529 (United States); Applied Research Center, Jefferson National Accelerator Facility, Newport News, VA 23606 (United States); Department of Physics, Faculty of Science, Ain Shams University, Cairo 11566 (Egypt); Ufuktepe, Yüksel, E-mail: ufuk@cu.edu.tr [Department of Physics, University of Cukurova, 01330 Adana (Turkey); Myneni, Ganapati, E-mail: rao@jlab.org [Thomas Jefferson National Accelerator Facility, Newport News, Virginia 23606 (United States)

    2015-12-04

    Niobium nitride (NbN{sub x}) films were grown on Nb and Si(100) substrates using pulsed laser deposition. NbN{sub x} films were deposited on Nb substrates using PLD with a Q-switched Nd:YAG laser (λ = 1064 nm, ∼40 ns pulse width, and 10 Hz repetition rate) at different laser fluences, nitrogen background pressures and deposition substrate temperatures. When all the fabrication parameters are fixed, except for the laser fluence, the surface roughness, nitrogen content, and grain size increase with increasing laser fluence. Increasing nitrogen background pressure leads to a change in the phase structure of the NbN{sub x} films from mixed β-Nb{sub 2}N and cubic δ-NbN phases to single hexagonal β-Nb{sub 2}N. The substrate temperature affects the preferred orientation of the crystal structure. The structural and electronic, properties of NbN{sub x} deposited on Si(100) were also investigated. The NbN{sub x} films exhibited a cubic δ-NbN with a strong (111) orientation. A correlation between surface morphology, electronic, and superconducting properties was found. The observations establish guidelines for adjusting the deposition parameters to achieve the desired NbN{sub x} film morphology and phase.

  12. Nanotribological performance of fullerene-like carbon nitride films

    Energy Technology Data Exchange (ETDEWEB)

    Flores-Ruiz, Francisco Javier; Enriquez-Flores, Christian Ivan [Centro de Investigación y Estudios Avanzados (CINVESTAV) IPN, Unidad Querétaro, Lib. Norponiente 2000, Real de Juriquilla, C.P. 76230, Querétaro, Qro., México (Mexico); Chiñas-Castillo, Fernando, E-mail: fernandochinas@gmail.com [Department of Mechanical Engineering, Instituto Tecnológico de Oaxaca, Oaxaca, Oax. Calz. Tecnológico No. 125, CP. 68030, Oaxaca, Oax. (Mexico); Espinoza-Beltrán, Francisco Javier [Centro de Investigación y Estudios Avanzados (CINVESTAV) IPN, Unidad Querétaro, Lib. Norponiente 2000, Real de Juriquilla, C.P. 76230, Querétaro, Qro., México (Mexico)

    2014-09-30

    Highlights: • Fullerene-like CNx samples show an elastic recovery of 92.5% and 94.5% while amorphous CNx samples had only 75% elastic recovery. • Fullerene-like CNx films show an increment of 34.86% and 50.57% in fractions of C 1s and N 1s. • Fullerene-like CNx samples show a lower friction coefficient compared to amorphous CNx samples. • Friction reduction characteristics of fullerene-like CNx films are strongly related to the increase of sp{sup 3} CN bonds. - Abstract: Fullerene-like carbon nitride films exhibit high elastic modulus and low friction coefficient. In this study, thin CNx films were deposited on silicon substrate by DC magnetron sputtering and the tribological behavior at nanoscale was evaluated using an atomic force microscope. Results show that CNx films with fullerene-like structure have a friction coefficient (CoF ∼ 0.009–0.022) that is lower than amorphous CNx films (CoF ∼ 0.028–0.032). Analysis of specimens characterized by X-ray photoelectron spectroscopy shows that films with fullerene-like structure have a higher number of sp{sup 3} CN bonds and exhibit the best mechanical properties with high values of elastic modulus (E > 180 GPa) and hardness (H > 20 GPa). The elastic recovery determined on specimens with a fullerene-like CNx structure was of 95% while specimens of amorphous CNx structure had only 75% elastic recovery.

  13. Effect of film thickness on electrochromic activity of spray deposited iridium oxide thin films

    International Nuclear Information System (INIS)

    Electrochromic iridium oxide thin films were deposited onto fluorine doped tin oxide (FTO) coated glass substrates from an aqueous iridium chloride solution using a spray pyrolysis process. The deposition temperature was 250 deg. C. The solution quantity was varied from 25 to 55 ml to obtain films with different thickness. The as-deposited samples were X-ray amorphous. The electrochromic properties were studied in proton containing electrolyte (0.5N, H2SO4) using cyclic voltammetry, chronoamperometry and spectrophotometry techniques. The films exhibit anodic electrochromism. The colouration efficiency at 630 nm was maximum for thicker sample, owing to its large charge storage capacity and hydration

  14. Effect of film thickness on electrochromic activity of spray deposited iridium oxide thin films

    Energy Technology Data Exchange (ETDEWEB)

    Patil, P.S. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416004 (India)]. E-mail: psp_phy@unishivaji.ac.in; Mujawar, S.H. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416004 (India); Sadale, S.B. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416004 (India); Deshmukh, H.P. [Department of Physics, Bharati Vidyapeeth, Deemed University, Y.M. College, Pune (India); Inamdar, A.I. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416004 (India)

    2006-10-10

    Electrochromic iridium oxide thin films were deposited onto fluorine doped tin oxide (FTO) coated glass substrates from an aqueous iridium chloride solution using a spray pyrolysis process. The deposition temperature was 250 deg. C. The solution quantity was varied from 25 to 55 ml to obtain films with different thickness. The as-deposited samples were X-ray amorphous. The electrochromic properties were studied in proton containing electrolyte (0.5N, H{sub 2}SO{sub 4}) using cyclic voltammetry, chronoamperometry and spectrophotometry techniques. The films exhibit anodic electrochromism. The colouration efficiency at 630 nm was maximum for thicker sample, owing to its large charge storage capacity and hydration.

  15. Chemical vapor deposition and characterization of titanium dioxide thin films

    Science.gov (United States)

    Gilmer, David Christopher

    1998-12-01

    The continued drive to decrease the size and increase the speed of micro-electronic Metal-Oxide-Semiconductor (MOS) devices is hampered by some of the properties of the SiOsb2 gate dielectric. This research has focused on the CVD of TiOsb2 thin films to replace SiOsb2 as the gate dielectric in MOS capacitors and transistors. The relationship of CVD parameters and post-deposition anneal treatments to the physical and electrical properties of thin films of TiOsb2 has been studied. Structural and electrical characterization of TiOsb2 films grown from the CVD precursors tetraisopropoxotitanium (IV) (TTIP) and TTIP plus Hsb2O is described in Chapter 3. Both types of deposition produced stoichiometric TiOsb2 films comprised of polycrystalline anatase, but the interface properties were dramatically degraded when water vapor was added. Films grown with TTIP in the presence of Hsb2O contained greater than 50% more hydrogen than films grown using only TTIP and the hydrogen content of films deposited in both wet and dry TTIP environments decreased sharply with a post deposition Osb2 anneal. A significant thickness variation of the dielectric constant was observed which could be explained by an interfacial oxide and the finite accumulation thickness. Fabricated TiOsb2 capacitors exhibited electrically equivalent SiOsb2 gate dielectric thicknesses and leakage current densities as low as 38, and 1×10sp{-8} Amp/cmsp2 respectively. Chapter 4 discusses the low temperature CVD of crystalline TiOsb2 thin films deposited using the precursor tetranitratotitanium (IV), TNT, which produces crystalline TiOsb2 films of the anatase phase in UHV-CVD at temperatures as low as 184sp°C. Fabricated TiOsb2 capacitors exhibited electrically equivalent SiOsb2 gate dielectric thicknesses and leakage current densities as low as 17, and 1×10sp{-8} Amp/cmsp2 respectively. Chapter 5 describes the results of a comparison of physical and electrical properties between TiOsb2 films grown via LPCVD using

  16. Deposition of Thin Film Electrolyte by Pulsed Laser Deposition (PLD) for micro-SOFC Development

    OpenAIRE

    Krogstad, Hedda Nordby

    2012-01-01

    Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.

  17. CdS films deposited by chemical bath under rotation

    Energy Technology Data Exchange (ETDEWEB)

    Oliva-Aviles, A.I., E-mail: aoliva@mda.cinvestav.mx [Centro de Investigacion y de Estudios Avanzados Unidad Merida, Departamento de Fisica Aplicada. A.P. 73-Cordemex, 97310 Merida, Yucatan (Mexico); Patino, R.; Oliva, A.I. [Centro de Investigacion y de Estudios Avanzados Unidad Merida, Departamento de Fisica Aplicada. A.P. 73-Cordemex, 97310 Merida, Yucatan (Mexico)

    2010-08-01

    Cadmium sulfide (CdS) films were deposited on rotating substrates by the chemical bath technique. The effects of the rotation speed on the morphological, optical, and structural properties of the films were discussed. A rotating substrate-holder was fabricated such that substrates can be taken out from the bath during the deposition. CdS films were deposited at different deposition times (10, 20, 30, 40 and 50 min) onto Corning glass substrates at different rotation velocities (150, 300, 450, and 600 rpm) during chemical deposition. The chemical bath was composed by CdCl{sub 2}, KOH, NH{sub 4}NO{sub 3} and CS(NH{sub 2}){sub 2} as chemical reagents and heated at 75 deg. C. The results show no critical effects on the band gap energy and the surface roughness of the CdS films when the rotation speed changes. However, a linear increase on the deposition rate with the rotation energy was observed, meanwhile the stoichiometry was strongly affected by the rotation speed, resulting a better 1:1 Cd/S ratio as speed increases. Rotation effects may be of interest in industrial production of CdTe/CdS solar cells.

  18. Characterization of CdTe Films Deposited at Various Bath Temperatures and Concentrations Using Electrophoretic Deposition

    OpenAIRE

    Zulkarnain Zainal; Mohd Norizam Md Daud; Azmi Zakaria; Mohd Sabri Mohd Ghazali; Atefeh Jafari; Wan Rafizah Wan Abdullah

    2012-01-01

    CdTe film was deposited using the electrophoretic deposition technique onto an ITO glass at various bath temperatures. Four batch film compositions were used by mixing 1 to 4 wt% concentration of CdTe powder with 10 mL of a solution of methanol and toluene. X-ray Diffraction analysis showed that the films exhibited polycrystalline nature of zinc-blende structure with the (111) orientation as the most prominent peak. From the Atomic Force Microscopy, the thickness and surface roughness of the ...

  19. Effect of Different Catalyst Deposition Technique on Aligned Multiwalled Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition

    Directory of Open Access Journals (Sweden)

    Mohamed Shuaib Mohamed Saheed

    2014-01-01

    Full Text Available The paper reported the investigation of the substrate preparation technique involving deposition of iron catalyst by electron beam evaporation and ferrocene vaporization in order to produce vertically aligned multiwalled carbon nanotubes array needed for fabrication of tailored devices. Prior to the growth at 700°C in ethylene, silicon dioxide coated silicon substrate was prepared by depositing alumina followed by iron using two different methods as described earlier. Characterization analysis revealed that aligned multiwalled carbon nanotubes array of 107.9 µm thickness grown by thermal chemical vapor deposition technique can only be achieved for the sample with iron deposited using ferrocene vaporization. The thick layer of partially oxidized iron film can prevent the deactivation of catalyst and thus is able to sustain the growth. It also increases the rate of permeation of the hydrocarbon gas into the catalyst particles and prevents agglomeration at the growth temperature. Combination of alumina-iron layer provides an efficient growth of high density multiwalled carbon nanotubes array with the steady growth rate of 3.6 µm per minute for the first 12 minutes and dropped by half after 40 minutes. Thicker and uniform iron catalyst film obtained from ferrocene vaporization is attributed to the multidirectional deposition of particles in the gaseous form.

  20. Conversion behavior comparison of TFA-MOD and non-fluorine solution-deposited YBCO films

    International Nuclear Information System (INIS)

    The densification behavior during conversion of YBa2Cu3O7-x (YBCO) films formed by the trifluoroacetate (TFA)-based metal-organic deposition (MOD) technique was compared to a non-fluorine oxycarbonate-based MOD process and nitrate-based polymer-assisted deposition (PAD). The critical current densities obtained in all processes exceeded 106 A/cm2 in films at least 300 nm thick. Rapid densification of films was observed in all processes, beginning at 700 deg. C in the TFA and PAD processes and 650 deg. C in the oxycarbonate process. YBCO nucleation occurred shortly after densification began in all processes. Residual carbon measurements were performed using wavelength dispersive spectroscopy (WDS). Carbon persisted in films from all processes until after densification began, but it was reduced to background levels soon after YBCO nucleation. Film density and second phase morphology were controlled through adjustments to the ambient oxygen partial pressure. Morphological evidence of extensive transient liquid phase formation was observed in PAD films and is consistent with the densification and nucleation behavior. The common behavior between the PAD, oxycarbonate-MOD, and TFA-MOD processes suggests that a melt forms in all systems, but the extent of this melt varies.

  1. Nano- and Macrotribological Properties of Nanoperiod Multilayer Films Deposited by Bias Sputtering

    Directory of Open Access Journals (Sweden)

    Shojiro Miyake

    2012-01-01

    Full Text Available Carbon and boron nitride nanoperiod (C/BNn, boron nitride and carbon (BN/Cn, carbon nitride and boron nitride nanoperiod (CN/BNn, and boron nitride and carbon nitride (BN/CNn ]multilayer films with a 4-nm-period multilayer structure were deposited by bias radio frequency (RF sputtering. The substrate used for deposition was repeatedly positioned opposite graphite and boron nitride targets. Both the nanoindentation hardness and microwear resistance of the multilayer (CN/BNn and (BN/CNn films changed with the layer period. The multilayer films with a 4 nm period had the highest hardness and microwear resistance. The processing characteristics of the (C/BNn and (BN/Cn films with a 4-nm-period multilayer structure were investigated using a conductive atomic force microscope (AFM with force modulation, which permits the quantitative recording of current and frictional force as functions of applied force. The results of processing indicated that friction and surface-current measurements are effective methods of investigating multilayer nanostructural surfaces and that the method proposed in this study for micro-electro-mechanical processing systems has high precision.

  2. Fractal structure of films deposited in a tokamak

    Science.gov (United States)

    Budaev, V. P.; Khimchenko, L. N.

    2007-04-01

    The surface of amorphous films deposited in the T-10 tokamak was studied in a scanning tunnel microscope. The surface relief on a scale from 10 nm to 100 μm showed a stochastic surface topography and revealed a hierarchy of grains. The observed variety of irregular structures of the films was studied within the framework of the concept of scale invariance using the methods of fractal geometry and statistical physics. The experimental probability density distribution functions of the surface height variations are close in shape to the Cauchy distribution. The stochastic surface topography of the films is characterized by a Hurst parameter of H = 0.68-0.85, which is evidence of a nontrivial self-similarity of the film structure. The fractal character and porous structure of deposited irregular films must be considered as an important issue related to the accumulation of tritium in the ITER project. The process of film growth on the surface of tokamak components exposed to plasma has been treated within the framework of the general concept of inhomogeneous surface growth. A strong turbulence of the edge plasma in tokamaks can give rise to fluctuations in the incident flux of particles, which leads to the growth of fractal films with grain dimensions ranging from nano-to micrometer scale. The shape of the surface of some films found in the T-10 tokamak has been interpreted using a model of diffusion-limited aggregation (DLA). The growth of films according to the discrete DLA model was simulated using statistics of fluctuations observed in a turbulent edge plasma of the T-10 tokamak. The modified DLA model reproduces well the main features of the surface of some films deposited in tokamaks.

  3. Optical Properties of Pyrolytic Carbon Films Versus Graphite and Graphene.

    Science.gov (United States)

    Dovbeshko, Galyna I; Romanyuk, Volodymyr R; Pidgirnyi, Denys V; Cherepanov, Vsevolod V; Andreev, Eugene O; Levin, Vadim M; Kuzhir, Polina P; Kaplas, Tommi; Svirko, Yuri P

    2015-12-01

    We report a comparative study of optical properties of 5-20 nm thick pyrolytic carbon (PyC) films, graphite, and graphene. The complex dielectric permittivity of PyC is obtained by measuring polarization-sensitive reflectance and transmittance spectra of the PyC films deposited on silica substrate. The Lorentz-Drude model describes well the general features of the optical properties of PyC from 360 to 1100 nm. By comparing the obtained results with literature data for graphene and highly ordered pyrolytic graphite, we found that in the visible spectral range, the effective dielectric permittivity of the ultrathin PyC films are comparable with those of graphite and graphene.

  4. Electromagnetic characteristics of carbon nanotube film materials

    Directory of Open Access Journals (Sweden)

    Zhang Wei

    2015-08-01

    Full Text Available Carbon nanotube (CNT possesses remarkable electrical conductivity, which shows great potential for the application as electromagnetic shielding material. This paper aims to characterize the electromagnetic parameters of a high CNT loading film by using waveguide method. The effects of layer number of CNT laminate, CNT alignment and resin impregnation on the electromagnetic characteristics were analyzed. It is shown that CNT film exhibits anisotropic electromagnetic characteristic. Pristine CNT film shows higher real part of complex permittivity, conductivity and shielding effectiveness when the polarized direction of incident wave is perpendicular to the winding direction of CNT film. For the CNT film laminates, complex permittivity increases with increasing layer number, and correspondingly, shielding effectiveness decreases. The five-layer CNT film shows extraordinary shielding performance with shielding effectiveness ranging from 67 dB to 78 dB in X-band. Stretching process induces the alignment of CNTs. When aligned direction of CNTs is parallel to the electric field, CNT film shows negative permittivity and higher conductivity. Moreover, resin impregnation into CNT film leads to the decrease of conductivity and shielding effectiveness. This research will contribute to the structural design for the application of CNT film as electromagnetic shielding materials.

  5. Polycrystalline thin films of antimony selenide via chemical bath deposition and post deposition treatments

    Energy Technology Data Exchange (ETDEWEB)

    Rodriguez-Lazcano, Y. [Department of Solar Energy Materials, Centro de Investigacion en Energia, Universidad Nacional Autonoma de Mexico, Temixco, Morelos-62580 (Mexico); Pena, Yolanda [Department of Solar Energy Materials, Centro de Investigacion en Energia, Universidad Nacional Autonoma de Mexico, Temixco, Morelos-62580 (Mexico); Nair, M.T.S. [Department of Solar Energy Materials, Centro de Investigacion en Energia, Universidad Nacional Autonoma de Mexico, Temixco, Morelos-62580 (Mexico)]. E-mail: mtsn@cie.unam.mx; Nair, P.K. [Department of Solar Energy Materials, Centro de Investigacion en Energia, Universidad Nacional Autonoma de Mexico, Temixco, Morelos-62580 (Mexico)

    2005-12-22

    We report a method for obtaining thin films of polycrystalline antimony selenide via chemical bath deposition followed by heating the thin films at 573 K in selenium vapor. The thin films deposited from chemical baths containing one or more soluble complexes of antimony, and selenosulfate initially did not show X-ray diffraction (XRD) patterns corresponding to crystalline antimony selenide. Composition of the films, studied by energy dispersive X-ray analyses indicated selenium deficiency. Heating these films in presence of selenium vapor at 573 K under nitrogen (2000 mTorr) resulted in an enrichment of Se in the films. XRD peaks of such films matched Sb{sub 2}Se{sub 3}. Evaluation of band gap from optical spectra of such films shows absorption due to indirect transition occurring in the range of 1-1.2 eV. The films are photosensitive, with dark conductivity of about 2 x 10{sup -8} ({omega} cm){sup -1} and photoconductivity, about 10{sup -6} ({omega} cm){sup -1} under tungsten halogen lamp illumination with intensity of 700 W m{sup -2}. An estimate for the mobility life time product for the film is 4 x 10{sup -9} cm{sup 2} V{sup -1}.

  6. Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors

    Directory of Open Access Journals (Sweden)

    Sung Pil Lee

    2008-03-01

    Full Text Available Nano-structured carbon nitride (CNx films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the deposited films showed a C=N stretching bandin the range of 1600~1700 ㎝-1, depending on the amount of nitrogen incorporation. Thecarbon nitride films deposited on the Si substrate had a nano-structured surfacemorphology with a grain size of about 20 nm, and their deposition rate was 1.5 μm/hr. Thesynthesized films had a high electrical resistivity in the range of 108 to 109 ω·cm,depending on the deposition conditions. The micro humidity sensors showed a goodlinearity and low hysteresis between 5 ~ 95 %RH.

  7. Deposition of Cu seed layer film by supercritical fluid deposition for advanced interconnects

    Institute of Scientific and Technical Information of China (English)

    Zhao Bin; Zhao Ming-Tao; Zhang Yan-Fei; Yang Jun-He

    2013-01-01

    The deposition of a Cu seed layer film is investigated by supercritical fluid deposition (SCFD) using H2 as a reducing agent for Bis(2,2,6,6-tetramethyl-3,5-heptanedionato) copper in supercritical CO2 (scCO2).The effects of deposition temperature,precursor,and H2 concentration are investigated to optimize Cu deposition.Continuous metallic Cu films are deposited on Ru substrates at 190 ℃ when a 0.002 mol/L Cu precursor is introduced with 0.75 mol/L H2.A Cu precursor concentration higher than 0.002 mol/L is found to have negative effects on the surface qualities of Cu films.For a H2concentration above 0.56 mol/L,the root-mean-square (RMS) roughness of a Cu film decreases as the H2 concentration increases.Finally,a 20-nm thick Cu film with a smooth surface,which is required as a seed layer in advanced interconnects,is successfully deposited at a high H2 concentration (0.75 mol/L).

  8. Cobalt Xanthate Thin Film with Chemical Bath Deposition

    Directory of Open Access Journals (Sweden)

    İ. A. Kariper

    2013-01-01

    Full Text Available Cobalt xanthate thin films (CXTFs were successfully deposited by chemical bath deposition, onto amorphous glass substrates, as well as on p- and n-silicon, indium tin oxide, and poly(methyl methacrylate. The structure of the films was analyzed by far-infrared spectrum (FIR, mid-infrared (MIR spectrum, nuclear magnetic resonance (NMR, and scanning electron microscopy (SEM. These films were investigated from their structural, optical, and electrical properties point of view. Electrical properties were measured using four-point method, whereas optical properties were investigated via UV-VIS spectroscopic technique. Uniform distribution of grains was clearly observed from the photographs taken by scanning electron microscope (SEM. The transmittance was about 70–80% (4 hours, 50°C. The optical band gap of the CXTF was graphically estimated to be 3.99–4.02 eV. The resistivity of the films was calculated as 22.47–75.91 Ω·cm on commercial glass depending on film thickness and 44.90–73.10 Ω ·cm on the other substrates. It has been observed that the relative resistivity changed with film thickness. The MIR and FIR spectra of the films were in agreement with the literature analogues. The expected peaks of cobalt xanthate were observed in NMR analysis on glass. The films were dipped in chloroform as organic solvent and were analyzed by NMR.

  9. The features of electrochemically deposited CdS thin films

    International Nuclear Information System (INIS)

    The stoichiometric CdS films were successfully deposited on ITO glass substrate using electrodeposition technique from non-aqueous solution of 0.055M CdCl2 and 0.19M elemental sulfur, dissolved in 50 ml. dimethyl sulfoxide at 110-120 degrees Celsius. The films were characterized for optical properties and EDX composition. The SEM images show uniform thin film CdS. EDX analyze shows that the composition of Cd and S may considered to be stoichiometric. The optical band gap of as grown CdS is measured to be 2.42 eV. In this work it is reported the synthesis of CdS thin films electrochemically deposited over conducting ITO-glass substrates and its characterization by various techniques like XRD, SEM and optical transmission spectroscopy

  10. Spray deposited titanium oxide thin films as passive counter electrodes

    Energy Technology Data Exchange (ETDEWEB)

    Shinde, P.S.; Mujawar, S.H.; Inamdar, A.I.; Patil, P.S. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur-416004 (India); Deshmukh, H.P. [Bharati Vidyapeeth Deemed University, Yashwantrao Mohite College, Pune-411038 (India)

    2007-02-15

    Titanium dioxide (TiO{sub 2}) thin films were deposited from methanolic solution onto fluorine doped tin oxide coated conducting glass substrates by spray pyrolysis technique. The electrochemical properties of TiO{sub 2} thin films were investigated using cyclic voltammetry, chronoamperometry, chronocoulometry and iono-optical studies, in 0.1N H{sub 2}SO{sub 4} electrolyte. Performance of the films deposited at three different substrate temperatures, viz. 350, 400 and 450 C is discussed in view of their utilization in electrochromic devices, as counter electrode. The magnitude of charge storage capacity, Q/t (4.75-6.13 x 10{sup -3} mC/(cm{sup 2} nm)) and colouration efficiency (3.2-4.3 cm{sup 2}/mC) of TiO{sub 2} rank these films among the promising counter electrodes in electrochromic devices. (author)

  11. Nanocrystalline Pd alloy films coated by electroless deposition.

    Science.gov (United States)

    Strukov, G V; Strukova, G K; Batov, I E; Sakharov, M K; Kudrenko, E A; Mazilkin, A A

    2011-10-01

    The structures of palladium and palladium alloys thin films deposited from organic electrolytes onto metallic substrates by electroless plating method have been investigated. The coatings are dense, pore-free 0.005-1 microm thick films with high adhesive strength to the substrate surface. EDX, XRD, SEM and TEM methods were used to determine the composition and structure of alloy coatings of the following binary systems: Pd-Au, Pd-Ag, Pd-Ni, Pd-Pb, and ternary system Pd-Au-Ni. The coatings of Pd-Au, Pd-Ag and Pd-Ni have a solid solution structure, whereas Pd-Pb is intermetallic compound. It has been found that the deposited films consist of nanocrystalline grains with sizes in the range of 11-35 nm. Scanning and transmission electron microscopy investigations reveal the existence of clusters formed by nanocrystalline grains. The origin for the formation of nanocrystalline structures of coating films is discussed. PMID:22400291

  12. Deposition of the platinum crystals on the carbon nanotubes

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    A new technique and the affecting factors for depositing platinum on the carbon nanotubes were investigated. The results show that the deposited platinum crystals in the atmosphere of hydrogen or nitrogen have a small size and a homogeneous distribution on the surface of the carbon nanotubes. The pretreatment would decrease the platinum particles on the carbon nanotubes significantly.

  13. Interfacial electrical properties of ion-beam sputter deposited amorphous carbon on silicon

    Science.gov (United States)

    Khan, A. A.; Woollam, J. A.; Chung, Y.; Banks, B.

    1983-01-01

    Amorphous, 'diamond-like' carbon films have been deposited on Si substrates, using ion-beam sputtering. The interfacial properties are studied using capacitance and conductance measurements. Data are analyzed using existing theories for interfacial electrical properties. The density of electronic states at the interface, along with corresponding time constants are determined.

  14. An investigation into the effects of high laser fluence on hydroxyapatite/calcium phosphate films deposited by pulsed laser deposition

    International Nuclear Information System (INIS)

    Pulsed laser deposited mixed hydroxyapatite (HA)/calcium phosphate thin films were prepared at room temperature using KrF laser source with different laser fluence varying between 2.4 J/cm2 and 29.2 J/cm2. Samples deposited at 2.4 J/cm2 were partially amorphous and had rough surfaces with a lot of droplets while higher laser fluences showed higher level of crytallinity and lower roughness of surfaces of obtained samples. Higher laser fluences also decreased ratio Ca/P of as-deposited samples. X-ray photoelectron spectroscopy (XPS) revealed traces of carbonate groups in obtained samples, which were removed after thermal annealing. The decomposition of HA into TCP was observed to start at about 400 deg. C. The formation of new crystalline phase of HA was found after annealing as well. The cracks observed on surface of sample deposited at 29.2 J/cm2 after annealing indicated that the HA/ calcium phosphate films deposited at higher laser energy densities were probably more densed.

  15. Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

    Science.gov (United States)

    Lin, M.-C.; Chang, L.-S.; Lin, H. C.

    2008-03-01

    Titanium oxynitride (TiN xO y) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density and substrate bias were the varied parameters. Experimental results show that the deposited TiN xO y films exhibited an amorphous or a columnar structure with fine crystalline dependent on power density. The deposition rate increases significantly in conjunction as the power density increases from 2 W/cm 2 to 7 W/cm 2. The maximum deposition rate occurs, as the substrate bias is -40 V at a certain power densities chosen in this study. The film's roughness slightly decreases with increasing substrate bias. The TiN xO y films deposited at power densities above 4 W/cm 2 show a steady Ti:N:O ratio of about 1:1:0.8. The water vapor and oxygen transmission rates of the TiN xO y films reach values as low as 0.98 g/m 2-day-atm and 0.60 cm 3/m 2-day-atm which are about 6 and 47 times lower than those of the uncoated PET substrate, respectively. These transmission rates are comparable to those of DLC, carbon-based and Al 2O 3 barrier films. Therefore, TiN xO y films are potential candidates to be used as a gas permeation barrier for PET substrate.

  16. Plasma modification of medical implants by carbon coatings depositions

    Directory of Open Access Journals (Sweden)

    J. Grabarczyk

    2009-12-01

    Full Text Available Purpose: The main goal was to work out the technology of deposition of carbon layers onto surface of medical implants made of the AISI316L medical steel. So far the results of carried investigations have proved that layers synthesized in RF PACVD process noticeably improve the biotolerance of the medical steel. Positive experimental results concerning the implementation of carbon layers conducted in the Institute of Materials Science and Engineering of the Technical University of Lodz were the basis for attempt of industrial application of the worked out technology.Design/methodology/approach: Carbon layers were manufactured using radio frequency plasma RF PACVD method. The technology was worked out for the surfaces of the intramedullary nails. The investigations were carried out in order to compare obtained synthesis results with the layers deposited under the laboratory conditions. In this work the following are presented: the surface topography investigation, results of nanohardness and adhesion measurements as well as the raman spectra. Medical examination results were presented in our earlier publications. In the description of obtained investigation results are also presented the preliminary results of the medical treatment effects with the use of intramedullary nails covered with the carbon layer.Findings: Carbon layers manufactured onto intramedullary nails presented good mechanical properties. Applied synthesis parameters made it possible to manufacture uniform film onto whole implant surface. Thickness of the layer was varied in the range of 200 – 400 nm, however total modification area contained 3.5 micrometers. Nails covered with the carbon layer positively passed the tests and were admitted into medical trade turnover. Positive medical treatment results were observed especially in case of patients with affirmed allergies onto alloying components contained in medical steels like chromium and nickel.Research limitations

  17. Microwave annealing effects on ZnO films deposited by atomic layer deposition

    Institute of Scientific and Technical Information of China (English)

    Zhao Shirui; Dong Yabin; Yu Mingyan; Guo Xiaolong; Xu Xinwei; Jing Yupeng; Xia Yang

    2014-01-01

    Zinc oxide thin films deposited on glass substrate at 150 ℃ by atomic layer deposition were annealed by the microwave method at temperatures below 500 ℃.The microwave annealing effects on the structural and luminescent properties of ZnO films have been investigated by X-ray diffraction and photoluminescence.The results show that the MWA process can increase the crystal quality of ZnO thin films with a lower annealing temperature than RTA and relatively decrease the green luminescence of ZnO films.The observed changes have demonstrated that MWA is a viable technique for improving the crystalline quality of ZnO thin film on glass.

  18. Potentiality of the composite fulleren based carbon films as the stripper foils for tandem accelerators

    CERN Document Server

    Vasin, A V; Rusavsky, A V; Totsky, Y I; Vishnevski, I N

    2001-01-01

    The problem of the radiation resistance of the carbon stripper foils is considered. The short review of the experimental data available in literature and original experimental results of the are presented. In the paper discussed is the possibility of composite fulleren based carbon films to be used for preparation of the stripper foils. Some technological methods for preparation of composite fulleren based carbon films are proposed. Raman scattering and atom force microscopy were used for investigation of the fulleren and composite films deposited by evaporation of the C sub 6 sub 0 fulleren powder.

  19. Remarkable enhancement of the electrical conductivity of carbon nanostructured thin films after compression.

    Science.gov (United States)

    Georgakilas, Vasilios; Koutsioukis, Apostolos; Petr, Martin; Tucek, Jiri; Zboril, Radek

    2016-06-01

    In this work, we demonstrate a significant improvement in the electrical conductivity of carbon nanostructured thin films, composed of graphene nanosheets and multiwalled carbon nanotubes, by compression/polishing. It is shown that the sheet resistance of compressed thin films of carbon nanostructures and hybrids is remarkably decreased in comparison with that of as-deposited films. The number of the interconnections, the distance between the nanostructures as well as their orientation are highly altered by the compression favoring the electrical conductivity of the compressed samples.

  20. The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

    International Nuclear Information System (INIS)

    Very thin TiN and ZrN films (4 or N2. Auger electron spectroscopy investigations found that films contained a relatively low oxygen concentration, usually below 3.0 at%. Films deposited under residual vacuum or very low N2 pressures (−3 Pa) contained 3–6 at% C atoms in the bulk. This fraction grew to 8–10 at% when the deposition was performed under an atmosphere of 2 × 10−3 Pa CH4. To avoid C atoms incorporation into the bulk a deposition pressure of 10 Pa N2 was required. X-ray photoelectron spectroscopy investigations found that oxygen was mostly bonded in an oxynitride type of compound, while carbon was bonded into a metallic carbide. The presence of C atoms in the chemical composition of the TiN or ZrN improved the measured hardness of the films.

  1. Structural and nanomechanical properties of nanocrystalline carbon thin films for photodetection

    Energy Technology Data Exchange (ETDEWEB)

    Rawal, Ishpal [Department of Physics, Kirorimal College, University of Delhi, Delhi 110007 (India); Panwar, Omvir Singh, E-mail: ospanwar@mail.nplindia.ernet.in; Tripathi, Ravi Kant; Chockalingam, Sreekumar [Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting Division, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi 110012 (India); Srivastava, Avanish Kumar [Electron and Ion Microscopy, Sophisticated and Analytical Instruments, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi 110012 (India); Kumar, Mahesh [Ultrafast Optoelectronics and Tetrahertz Photonics Group, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi 110012 (India)

    2015-05-15

    This paper reports the effect of helium gas pressure upon the structural, nanomechanical, and photoconductive properties of nanocrystalline carbon thin (NCT) films deposited by the filtered cathodic jet carbon arc technique. High-resolution transmission electron microscopy images confirm the nanocrystalline nature of the deposited films with different crystallite sizes (3–7 nm). The chemical structure of the deposited films is further analyzed by x-ray photoelectron spectroscopy and Raman spectroscopy, which suggest that the deposited films change from graphitelike to diamondlike, increasing in sp{sup 3} content, with a minor change in the dilution of the inert gas (helium). The graphitic character is regained upon higher dilution of the helium gas, whereupon the films exhibit an increase in sp{sup 2} content. The nanomechanical measurements show that the film deposited at a helium partial pressure of 2.2 × 10{sup −4} has the highest value of hardness (37.39 GPa) and elastic modulus (320.50 GPa). At a light intensity of 100 mW/cm{sup 2}, the NCT films deposited at 2.2 × 10{sup −4} and 0.1 mbar partial pressures of helium gas exhibit good photoresponses of 2.2% and 3.6%, respectively.

  2. Nanostructuring and texturing of pulsed laser deposited hydroxyapatite thin films

    Science.gov (United States)

    Kim, Hyunbin; Catledge, Shane; Vohra, Yogesh; Camata, Renato; Lacefield, William

    2003-03-01

    Hydroxyapatite (HA) [Ca_10(PO_4)_6(OH)_2] is commonly deposited onto orthopedic and dental metallic implants to speed up bone formation around devices, allowing earlier stabilization in a patient. Pulsed laser deposition (PLD) is a suitable means of placing thin HA films on these implants because of its control over stoichiometry, crystallinity, and nanostructure. These characteristics determine the mechanical properties of the films that must be optimized to improve the performance of load-bearing implants and other devices that undergo bone insertion. We have used PLD to produce nanostructured and preferentially oriented HA films and evaluated their mechanical properties. Pure, highly crystalline HA films on Ti-6Al-4V substrates were obtained using a KrF excimer laser (248nm) with energy density of 4-8 J/cm^2 and deposition temperature of 500-700^rcC. Scanning electron and atomic force microscopies reveal that our careful manipulation of energy density and substrate temperature has led to films made up of HA grains in the nanometer scale. Broadening of x-ray diffraction peaks as a function of deposition temperature suggests it may be possible to control the film nanostructure to a great extent. X-ray diffraction also shows that as the laser energy density is increased in the 4-8 J/cm^2 range, the hexagonal HA films become preferentially oriented along the c-axis perpendicular to the substrate. Texture, nanostructure, and phase make-up all significantly influence the mechanical properties. We will discuss how each of these factors affects hardness and Young's modulus of the HA films as measured by nanoindentation.

  3. Effect of source gas chemistry on tribological performance of diamond-like carbon films.

    Energy Technology Data Exchange (ETDEWEB)

    Erdemir, A.; Eryilmaz, O. L.; Fenske, G. R.; Nilufer, I. B.

    1999-08-23

    In this study, we investigated the effects of various source gases (i. e., methane, ethane, ethylene, acetylene and methane + hydrogen) on friction and wear performance of diamond-like carbon (DLC) films. Specifically, we described the anomalous nature and fundamental friction and wear mechanisms of DLC films derived from gas discharge plasmas with very low to very high hydrogen content. The films were deposited on steel substrates by a plasma enhanced chemical vapor deposition process at room temperature and the tribological tests were performed in dry nitrogen. The results of tribological tests revealed a close correlation between the friction and wear coefficients of the DLC films and the source gas chemistry. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios had much lower friction coefficients and wear rates than the films derived from source gases with lower hydrogen-to-carbon ratios. The lowest friction coefficient (0.002) was achieved with a film derived from 25% methane--75% hydrogen while the films derived from acetylene had a coefficient of 0.15. Similar correlations were observed on wear rates. Specifically, the films derived from hydrogen rich plasmas had the least wear while the films derived from pure acetylene suffered the highest wear. We used a combination of scanning and transmission electron microscopy and Raman spectroscopy to characterize the structural chemistry of the resultant DLC films.

  4. New ion-assisted filtered cathodic arc deposition (IFCAD) technology for producing advanced thin films on temperature-sensitive substrates

    Science.gov (United States)

    Fulton, Michael L.

    1999-10-01

    An innovative Ion-Assisted Filtered Cathodic Arc Deposition (IFCAD) system has been developed for low temperature production of thin-film coatings. The IFCAD system employs electro-magnetic and mechanical filtering techniques to remove unwanted macroparticles and neutral atoms from the plasma stream. Therefore, only ions within a defined energy range arrive at the substrate surface, depositing thin-films with excellent mechanical and optical properties. Ion- Assisted-Deposition is coupled with Filtered Cathodic Arc technology to enhance and modify the arc deposited thin- films. Using an advanced computer controlled plasma beam scanning system, high quality, large area, uniform IFCAD multi-layer film structures are attained. Amorphous Diamond- Like-Carbon films (up to 85% sp3 bonded carbon; and micro- hardness greater than 50 GPa) have been deposited in multi- layer thin-film combinations with other IFCAD source materials (such as: Al2O3) for optical and tribological applications. Rutile TiO2 (refractive index of 2.8 at 500 nm) has been deposited with this technology for advanced optical filter applications. The new IFCAD technology has been included in development programs, such as: plastic and glass lens coatings for optical systems; wear resistant coatings on various metal substrates, ultra smooth, durable, surface hydrophobic coatings for aircraft windows; EUV coatings for space instrumentation; transparent conductive coatings; and UV protective coatings for solar cell concentrator plastic Fresnel lens elements for space power.

  5. Glancing angle deposition of thin films engineering the nanoscale

    CERN Document Server

    Hawkeye, Matthew M; Brett, Michael J

    2014-01-01

    This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: History and development of GLAD techniquesProperties and Characterization of GLAD fabricated filmsDesign and engineering of optical GLAD films including fabrication and testingPost-deposition processing and integrationDeposition systems for GLAD fabrication Also includes a patent survey of relevant literature and a survey of GLAD's wide range of material properties and diverse applications.

  6. Spray pyrolysis deposition of indium sulphide thin films

    International Nuclear Information System (INIS)

    In2S3 thin films were grown by the chemical spray pyrolysis (CSP) method using the pneumatic spray set-up and compressed air as a carrier gas. Aqueous solutions containing InCl3 and SC(NH2)2 at a molar ratio of In/S = 1/3 and 1/6 were deposited onto preheated glass sheets at substrate temperatures Ts = 205-410 oC. The obtained films were characterised by X-ray diffraction (XRD), scanning electron microscopy (SEM,) optical transmission spectra, X-ray photoelectron spectroscopy (XPS) and energy dispersive spectroscopy (EDS). According to XRD, thin films deposited at Ts = 205-365 oC were composed of the (0 0 12) orientated tetragonal β-In2S3 phase independent of the In/S ratio in the spray solution. Depositions performed at Ts = 410 oC led to the formation of the In2O3 phase, preferably when the 1/3 solution was sprayed. Post-deposition annealing in air indicated that oxidation of the sulphide phase has a minor role in the formation of In2O3 at temperatures up to 450 oC. In2S3 films grown at Ts below 365 oC exhibited transparency over 70% in the visible spectral region and Eg of 2.90-2.96 eV for direct and 2.15-2.30 eV for indirect transitions, respectively. Film thickness and chlorine content decreased with increasing deposition temperatures. The XPS study revealed that the In/S ratio in the spray solution had a significant influence on the content of oxygen (Me-O, BE = 530.0 eV) in the In2S3 films deposited in the temperature range of 205-365 oC. Both XPS and EDS studies confirmed that oxygen content in the films deposited using the solution with the In/S ratio of 1/6 was substantially lower than in the films deposited with the In/S ratio of 1/3.

  7. Fabrication and characterization of vacuum deposited fluorescein thin films

    Energy Technology Data Exchange (ETDEWEB)

    Jalkanen, Pasi, E-mail: pasi.jalkanen@gmail.co [University of Jyvaeskylae, Department of Physics, Nanoscience center (NSC), P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Kulju, Sampo, E-mail: sampo.j.kulju@jyu.f [University of Jyvaeskylae, Department of Physics, Nanoscience center (NSC), P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Arutyunov, Konstantin, E-mail: konstantin.arutyunov@jyu.f [University of Jyvaeskylae, Department of Physics, Nanoscience center (NSC), P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Antila, Liisa, E-mail: liisa.j.antila@jyu.f [University of Jyvaeskylae, Department of Chemistry, Nanoscience center (NSC) P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Myllyperkioe, Pasi, E-mail: pasi.myllyperkio@jyu.f [University of Jyvaeskylae, Department of Chemistry, Nanoscience center (NSC) P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Ihalainen, Teemu, E-mail: teemu.o.ihalainen@jyu.f [University of Jyvaeskylae, Department of Biology, Nanoscience center (NSC), P.O. Box 35, FI-40014 Jyvaeskylae (Finland); Kaeaeriaeinen, Tommi, E-mail: tommi.kaariainen@lut.f [Lappeenranta University of Technology, ASTRal, P.O. Box 181, FI-50101 Mikkeli (Finland); Kaeaeriaeinen, Marja-Leena, E-mail: marja-leena.kaariainen@lut.f [Lappeenranta University of Technology, ASTRal, P.O. Box 181, FI-50101 Mikkeli (Finland); Korppi-Tommola, Jouko, E-mail: jouko.korppi-tommola@jyu.f [University of Jyvaeskylae, Department of Biology, Nanoscience center (NSC), P.O. Box 35, FI-40014 Jyvaeskylae (Finland)

    2011-03-31

    Simple vacuum evaporation technique for deposition of dyes on various solid surfaces has been developed. The method is compatible with conventional solvent-free nanofabrication processing enabling fabrication of nanoscale optoelectronic devices. Thin films of fluorescein were deposited on glass, fluorine-tin-oxide (FTO) coated glass with and without atomically layer deposited (ALD) nanocrystalline 20 nm thick anatase TiO{sub 2} coating. Surface topology, absorption and emission spectra of the films depend on their thickness and the material of supporting substrate. On a smooth glass surface the dye initially forms islands before merging into a uniform layer after 5 to 10 monolayers. On FTO covered glass the absorption spectra are similar to fluorescein solution in ethanol. Absorption spectra on ALD-TiO{sub 2} is red shifted compared to the film deposited on bare FTO. The corresponding emission spectra at {lambda} = 458 nm excitation show various thickness and substrate dependent features, while the emission of films deposited on TiO{sub 2} is quenched due to the effective electron transfer to the semiconductor conduction band.

  8. Spray pyrolysis deposited tin selenide thin films for thermoelectric applications

    Energy Technology Data Exchange (ETDEWEB)

    Anwar, Sharmistha; Gowthamaraju, S.; Mishra, B.K.; Singh, S.K.; Shahid, Anwar, E-mail: shahidanwr@gmail.com

    2015-03-01

    Tin selenide thin films were prepared by spray pyrolysis technique using tin (II) chloride and selenourea as a precursor compounds using Se:Sn atomic ratio of 1:1 in the starting solution onto glass substrates. Deposition process was carried out in the substrate temperature range of 250 °C–400 °C using 1 ml/min flow rate. The films were investigated using X-ray diffraction, field emission scanning electron microscopy, Raman spectroscopy, optical absorption and thermoelectric studies. The X-ray diffraction patterns suggest that the major phase is hexagonal-SnSe{sub 2} was present when the deposition was carried out in 275–375 °C temperature range, while for the films deposited in the below and above to this range, Sn and Se precipitates into some impure and mixed phase. Raman scattering analysis allowed the assignment of peaks at ∼180 cm{sup −1} to the hexagonal-SnSe{sub 2} phase. The optical absorption study shows that the direct band gap of the film decreases with increase in substrate temperature and increasing crystallite size. The thermo-electrical measurements have shown n-type conductivity in as deposited films and the magnitude of thermo EMF for films has been found to be increasing with increasing deposition temperature, except for 350 °C sample. 350 °C deposited samples shows enhance thermoelectric value as compared to other samples. Thermoelectric study reveal that although sample deposited between 275 °C and 375 °C are structurally same but 350 °C sample is thermoelectrically best. - Highlights: • Influence of substrate temperature on the deposition of SnSe has been shown. • Seebeck measurements at 275°C–375 °C confirms n-type conductivity. • Higher seebeck coefficient has been observed at 350 °C deposited film. • Decrease in band gap was observed on increasing Tsub and size of the crystallites.

  9. Photocatalytic Functional Coating of TiO2 Thin Film Deposited by Cyclic Plasma Chemical Vapor Deposition at Atmospheric Pressure

    Science.gov (United States)

    Kwon, Jung-Dae; Rha, Jong-Joo; Nam, Kee-Seok; Park, Jin-Seong

    2011-08-01

    Photocatalytic TiO2 thin films were prepared with titanium tetraisopropoxide (TTIP) using cyclic plasma chemical vapor deposition (CPCVD) at atmospheric pressure. The CPCVD TiO2 films contain carbon-free impurities up to 100 °C and polycrystalline anatase phases up to 200 °C, due to the radicals and ion-bombardments. The CPCVD TiO2 films have high transparency in the visible wavelength region and absorb wavelengths below 400 nm (>3.2 eV). The photocatalytic effects of the CPCVD TiO2 and commercial sprayed TiO2 films were measured by decomposing methylene blue (MB) solution under UV irradiation. The smooth CPCVD TiO2 films showed a relatively lower photocatalytic efficiency, but superior catalyst-recycling efficiency, due to their high adhesion strength on the substrates. This CPCVD technique may provide the means to produce photocatalytic thin films with low cost and high efficiency, which would be a reasonable candidate for practical photocatalytic applications, because of the reliability and stability of their photocatalytic efficiency in a practical environment.

  10. Multiwalled Carbon Nanotube Deposition on Model Environmental Surfaces

    Science.gov (United States)

    Deposition of multiwalled carbon nanotubes (MWNTs) on model environmental surfaces was investigated using a quartz crystal microbalance with dissipation monitoring (QCM-D). Deposition behaviors of MWNTs on positively and negatively charged surfaces were in good agreement with Der...

  11. Experiment and equipment of depositing diamond films with CVD system

    International Nuclear Information System (INIS)

    CVD (chemical vapor deposition) emerged in recent years is a new technique for thin film deposition, which play a key role in development of modern physics. It is important to predominate the principle and technology of CVD for studying modern physics. In this paper, a suit of CVD experimental equipment for teaching in college physics is presented, which has simple design and low cost. The good result was gained in past teaching practices

  12. Platinum containing amorphous hydrogenated carbon (a-C:H/Pt) thin films as selective solar absorbers

    Energy Technology Data Exchange (ETDEWEB)

    Lan, Yung-Hsiang; Brahma, Sanjaya [Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan (China); Tzeng, Y.H. [Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan (China); Ting, Jyh-Ming, E-mail: jting@mail.ncku.edu.tw [Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan (China); Research Center for Energy Technology and Strategy, National Cheng Kung University, Tainan 701, Taiwan (China)

    2014-10-15

    We have investigated a double-cermet structured thin film in which an a-C:H thin film was used as an anti-reflective (AR) layer and two platinum-containing amorphous hydrogenated carbon (a-C:H/Pt) thin films were used as the double cermet layers. A reactive co-sputter deposition method was used to prepare both the anti-reflective and cermet layers. Effects of the target power and heat treatment were studied. The obtained films were characterized using X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy. The optical absorptance and emittance of the as deposited and annealed films were determined using UV–vis-NIR spectroscopy. We show that the optical absorptance of the resulting double-cermet structured thin film is as high as 96% and remains to be 91% after heat treatment at 400 °C, indicating the thermal stability of the film.

  13. Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering

    Institute of Scientific and Technical Information of China (English)

    LIU Cui; LI Guo-Qing; GOU Wei; MU Zong-Xin; ZHANG Cheng-Wu

    2004-01-01

    @@ Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron sputtering and the DLC characteristics of the films are confirmed by Raman spectra. It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5μm/h is obtained by using the sputtering current of 30 A. The friction coefficient of the films is 0.2-0.225 measured by using a pin-on-disc microtribometer. The structure of the films tends to have a growth of sp3 bonds content at high sputtering current. The compressive residual stress in the films increases with the increasing sputtering current of the target.

  14. Deposition of a-C:H films on UHMWPE substrate and its wear-resistance

    Science.gov (United States)

    Xie, Dong; Liu, Hengjun; Deng, Xingrui; Leng, Y. X.; Huang, Nan

    2009-10-01

    In prosthetic hip replacements, ultrahigh molecular weight polyethylene (UHMWPE) wear debris is identified as the main factor limiting the lifetime of the artificial joints. Especially UHMWPE debris from the joint can induce tissue reactions and bone resorption that may lead to the joint loosening. The diamond like carbon (DLC) film has attracted a great deal of interest in recent years mainly because of its excellent tribological property, biocompatibility and chemically inert property. In order to improve the wear-resistance of UHMWPE, a-C:H films were deposited on UHMWPE substrate by electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-PECVD) technology. During deposition, the working gases were argon and acetylene, the microwave power was set to 800 W, the biased pulsed voltage was set to -200 V (frequency 15 kHz, duty ratio 20%), the pressure in vacuum chamber was set to 0.5 Pa, and the process time was 60 min. The films were analysed by X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, nano-indentation, anti-scratch and wear test. The results showed that a typical amorphous hydrogenated carbon (a-C:H) film was successfully deposited on UHMWPE with thickness up to 2 μm. The nano-hardness of the UHMWPE coated with a-C:H films, measured at an applied load of 200 μN, was increased from 10 MPa (untreated UHMWPE) to 139 MPa. The wear test was carried out using a ball (Ø 6 mm, SiC) on disk tribometer with an applied load of 1 N for 10000 cycles, and the results showed a reduction of worn cross-sectional area from 193 μm 2 of untreated UHMWPE to 26 μm 2 of DLC coated sample. In addition the influence of argon/acetylene gas flow ratio on the growth of a-C:H films was studied.

  15. Alternating deposition films of a polymer and dendrimers bearing diphenylanthracene

    Institute of Scientific and Technical Information of China (English)

    SUN Jing; WANG Liyan; GAO Jian; YU Xi; WANG Zhiqiang

    2005-01-01

    Two generations of carboxyl-terminated poly (aryl ether) dendrimers bearing 9,10-diphenylanthracene cores are designed and synthesized. Alternating deposition of two dendrimers and poly(4-vinylpyridine) is studied with UV-Vis spectroscopy, FT-IR spectroscopy and atomic force microscopy. Experimental results indicate that this method to introduce chromophore into multilayer film can effectively prevent desorption of dye molecule. Moreover, it is found that dendrimer can inhibit the aggregation of fluorophore in film using fluorescence spectroscopy. Increase of dendrimer's generation can enhance fluorescence intensity of each fluorophore. This provides a new approach to design luminescent thin film.

  16. Impact toughness of tungsten films deposited on martensite stainless steel

    Institute of Scientific and Technical Information of China (English)

    HUANG Ning-kang; YANG Bin; WANG De-zhi

    2005-01-01

    Tungsten films were deposited on stainless steel Charpy specimens by magnetron sputtering followed by electron beam heat treatment. Charpy impact tests and scanning electron microscopy were used to investigate the ductile-brittle transition behavior of the specimens. With decreasing test temperature the fracture mode was transformed from ductile to brittle for both kinds of specimens with and without W films. The data of the crack initiation energy, crack propagation energy, impact absorbing energy, fracture time and deflection as well as the fracture morphologies at test temperature of -70 ℃ show that W films can improve the impact toughness of stainless steel.

  17. Morphological Study Of Palladium Thin Films Deposited By Sputtering

    Energy Technology Data Exchange (ETDEWEB)

    Salcedo, K L; Rodriguez, C A [Grupo Plasma Laser y Aplicaciones, Ingenieria Fisica, Universidad Tecnologica de Pereira (Colombia); Perez, F A [WNANO, West Virginia University (United States); Riascos, H [Grupo Plasma Laser y Aplicaciones, Departamento de Fisica, Universidad Tecnologica de Pereira (Colombia)

    2011-01-01

    This paper presents a morphological analysis of thin films of palladium (Pd) deposited on a substrate of sapphire (Al{sub 2}O{sub 3}) at a constant pressure of 3.5 mbar at different substrate temperatures (473 K, 523 K and 573 K). The films were morphologically characterized by means of an Atomic Force Microscopy (AFM); finding a relation between the roughness and the temperature. A morphological analysis of the samples through AFM was carried out and the roughness was measured by simulating the X-ray reflectivity curve using GenX software. A direct relation between the experimental and simulation data of the Palladium thin films was found.

  18. The Effect of Deposition Time on Textured Magnesium Diboride Thick Films Fabricated by Electrophoretic Deposition

    Directory of Open Access Journals (Sweden)

    W. G. Mutia

    2004-12-01

    Full Text Available MgB2 powders suspended in ethanol were electrophoretically deposited on high-purity molybdenum substrates having dimensions of 1 x 0.3 x 0.01 cm. The said substrate was set as the cathode and was placed 0.5 cm away from a graphite rod anode. A current density of ~0.02 mA/cm2 and a voltage of 600 V were applied. The effect of deposition time was studied by varying it as follows: 15 s, 30 s, 1 min, and 2 min. Heat treatment at 950 oC for 3 h was done after deposition. MgB2 thick films were successfully fabricated for the deposition carried out for 2 min. Deposition times less than 2 min resulted in insufficient deposited powder; hence formation of MgB2 was not facilitated. Films deposited at 15 and 30 s have good surface characteristics, wherein no microcracks were present. X-ray diffraction and surface image analysis reveal that the deposited films have a preferred orientation along the (10l direction.

  19. Structure and Properties of Cr-containing Hydrogenated Diamond-like Carbon Films Deposited by DC Filtered Cathodic Vacuum Arc Technology%磁过滤直流真空阴极弧制备含铬类金刚石膜的结构及其性能研究

    Institute of Scientific and Technical Information of China (English)

    祝土富; 沈丽如; 徐桂东; 金凡亚

    2009-01-01

    采用磁过滤直流真空阴极弧沉积技术在单晶硅片、载玻片、不锈钢片基体上制备了含铬类金刚石(Cr-DLC)膜.用光学显微镜、椭偏仪、分光光度计、X射线光电子能谱(XPS)、X射线衍射能谱(XRD)、Raman光谱、纳米硬度计、摩擦磨损仪、洛氏硬度计检测了薄膜的组分结构、光学、力学等相关特性.结果表明,硅片上的薄膜厚度为47.6nm,碳含量为89%,s p~3键占碳含量的55.15%.不锈钢片上的薄膜具有典型的DLC膜Raman光谱特征,在空气中的摩擦系数约为0.1,耐磨性能优良,膜与基体的结合性能良好.%Cr-containing hydrogenated diamond-like carbon (Cr-DLC) films were deposited on stainless steel plate, monocrystalline silicon wafer and microscope slide glass by DC filtered cathodic vacuum arc technology. The composition, structure and properties of Cr-DLC films were investigated by spec-troscopic ellipsometer, X-ray photoelectron spectroscopy(XPS), powder X-ray diffraction(XRD), spectrophotometer, Raman spectroscopy, nanoindenter, ball-on-disk tribometer, Rockwell apparatus and optical microscope. It was shown that the content of C is 89% in the film deposited on silicon wa-fer and the content of sp~3 bonding carbon atoms in the C element is 55.15%. The Raman spectra of the film deposited on stainless steel plate has the typical characteristics of DLC. The hardness and elastic modulus of the film deposited on stainless steel plate are 16.01 GPa and 142.72 GPa. The fric-tion coefficient of the film deposited on stainless steel plate is about 0.1, the film also exhibits excel-lent wear resistance and the adhesion to substrate is very well.

  20. Deposition and characterisation of epitaxial oxide thin films for SOFCs

    KAUST Repository

    Santiso, José

    2010-10-24

    This paper reviews the recent advances in the use of thin films, mostly epitaxial, for fundamental studies of materials for solid oxide fuel cell (SOFC) applications. These studies include the influence of film microstructure, crystal orientation and strain in oxide ionic conducting materials used as electrolytes, such as fluorites, and in mixed ionic and electronic conducting materials used as electrodes, typically oxides with perovskite or perovskite-related layered structures. The recent effort towards the enhancement of the electrochemical performance of SOFC materials through the deposition of artificial film heterostructures is also presented. These thin films have been engineered at a nanoscale level, such as the case of epitaxial multilayers or nanocomposite cermet materials. The recent progress in the implementation of thin films in SOFC devices is also reported. © 2010 Springer-Verlag.

  1. CHEMICALLY DEPOSITED SILVER FILM USED AS A SERS-ACTIVE OVER COATING LAYER FOR POLYMER FILM

    Institute of Scientific and Technical Information of China (English)

    Xiao-ning Liu; Gi Xue; Yun Lu; Jun Zhang; Fen-ting Li; Chen-chen Xue; Stephen Z.D. Cheng

    2001-01-01

    When colloidal silver particles were chemically deposited onto polymer film as an over-coating layer, surfaceenhanced Raman scattering (SERS) spectra could be collected for the surface analysis. SERS measurements of liquid crystal film were successfully performed without disturbing the surface morphology.

  2. Composite TiO2-Carbon nano films with enhanced photocatalytic activity

    Science.gov (United States)

    Chakarov, Dinko; Sellappan, Raja

    2011-03-01

    Composite TiO2-carbon thin films prepared by physical vapor deposition techniques on fused silica substrates show enhanced photocatalytic activity, as compared to pure TiO2 films of similar thickness, towards decomposition of methanol to CO2 and water. Raman and XRD measurements confirm that annealed TiO2 films exhibit anatase structure while the carbon layer becomes graphitic. Characteristic for the composite films is an enhanced optical absorption in the visible range. The presence of the carbon film causes a shift of the TiO2 absorption edge and modifies its grain size to be smaller. The observed enhancement is attributed to synergy effects at the carbon-TiO2 interface, resulting in smaller crystallite size and anisotropic charge carrier transport, which in turn reduces their recombination probability. Supported by N-INNER through the Solar Hydrogen project (P30938-1 Solväte).

  3. Deposition of polymer films in low pressure reactive plasmas

    Energy Technology Data Exchange (ETDEWEB)

    Biederman, H.

    1981-12-11

    Sputtering and plasma polymerization have found wide application as deposition techniques and have been extensively studied. R.f. sputtering of plastics, in particular of polytetrafluoroethylene, are discussed in the first part of this paper. In the second part, the general concept of plasma polymerization is considered and some examples of applications of plasma-polymerized films are presented. Special attention is paid to fluorocarbon and fluorochlorocarbon films. It has been suggested that these films could be used in thin film capacitors or as passivating layers for integrated circuits. In the optical field some of these films have been used as convenient moisture-resistant, protective and antireflecting coatings. Their mechanical properties have also been examined with the intention of using them for reducing surface friction. More recently some metals have been incorporated into fluorocarbon films to obtain layers with novel properties. Experiments in which films were prepared by the plasma polymerization of certain Freons are described. Some electrical and optical properties of these films are presented. High dielectric losses were obtained in a metal/film/metal sandwich configuration and the possible influence of ambient atmospheric effects on these measurements is discussed.

  4. Carbon Nanotube Thin-Film Antennas.

    Science.gov (United States)

    Puchades, Ivan; Rossi, Jamie E; Cress, Cory D; Naglich, Eric; Landi, Brian J

    2016-08-17

    Multiwalled carbon nanotube (MWCNT) and single-walled carbon nanotube (SWCNT) dipole antennas have been successfully designed, fabricated, and tested. Antennas of varying lengths were fabricated using flexible bulk MWCNT sheet material and evaluated to confirm the validity of a full-wave antenna design equation. The ∼20× improvement in electrical conductivity provided by chemically doped SWCNT thin films over MWCNT sheets presents an opportunity for the fabrication of thin-film antennas, leading to potentially simplified system integration and optical transparency. The resonance characteristics of a fabricated chlorosulfonic acid-doped SWCNT thin-film antenna demonstrate the feasibility of the technology and indicate that when the sheet resistance of the thin film is >40 ohm/sq no power is absorbed by the antenna and that a sheet resistance of antenna. The dependence of the return loss performance on the SWCNT sheet resistance is consistent with unbalanced metal, metal oxide, and other CNT-based thin-film antennas, and it provides a framework for which other thin-film antennas can be designed.

  5. Structural, electrical and optical properties of copper selenide thin films deposited by chemical bath deposition technique

    International Nuclear Information System (INIS)

    A low cost chemical bath deposition (CBD) technique has been used for the preparation of Cu2-xSe thin films on glass substrates. Structural, electrical and optical properties of these films were investigated. X-ray diffraction (XRD) study of the Cu2-xSe films annealed at 523K suggests a cubic structure with a lattice constant of 5.697A. Chemical composition was investigated by X-ray photoelectron spectroscopy (XPS). It reveals that absorbed oxygen in the film decreases remarkably on annealing above 423K. The Cu/Se ratio was observed to be the same in as-deposited and annealed films. Both as- deposited and annealed films show very low resistivity in the range of (0.04- 0.15) x 10-5 Ω-m. Transmittance and Reflectance were found in the range of 5-50% and 2-20% respectively. Optical absorption of the films results from free carrier absorption in the near infrared region with absorption coefficient of ∼108 m-1. The band gap for direct transition, Eg.dir varies in the range of 2.0-2.3eV and that for indirect transition Eg.indir is in the range of 1.25-1.5eV.1. (author)

  6. Controllable preparation of fluorine-containing fullerene-like carbon film

    Science.gov (United States)

    Wang, Jia; Liang, Aimin; Wang, Fuguo; Xu, Longhua; Zhang, Junyan

    2016-05-01

    Fluorine-containing fullerene-like carbon (F-FLC) films were prepared by high frequency unipolar pulse plasma-enhanced chemical vapor deposition. The microstructures, mechanical properties as well as the tribological properties of the films were investigated. The results indicate that fullerene-like microstructures appear in amorphous carbon matrix and increase greatly with the increase of bias voltage from -600 to -1600 V. And the fluorine contents in F-FLC films also show a minor rise. In addition, the hardness enhances with the bias voltage and the outstanding elastic recovery maintains because of the formation of fullerene-like microstructures in the F-FLC films. Undoubtedly, the F-FLC film deposited under high bias voltage owns a superiorly low friction, which combines the merits of fluorinated carbon film and fullerene-like carbon film. Moreover, the film also shows a remarkable wear resistance, which is mainly attributed to the excellent mechanical properties. This study provides new insights for us to prepare fluorine-containing FLC films with good mechanical and tribological properties.

  7. Hybrid Graphene and Single-Walled Carbon Nanotube Films for Enhanced Phase-Change Heat Transfer.

    Science.gov (United States)

    Seo, Han; Yun, Hyung Duk; Kwon, Soon-Yong; Bang, In Cheol

    2016-02-10

    Nucleate boiling is an effective heat transfer method in power generation systems and cooling devices. In this letter, hybrid graphene/single-walled carbon nanotube (SWCNT), graphene, and SWCNT films deposited on indium tin oxide (ITO) surfaces were fabricated to investigate the enhancement of nucleate boiling phenomena described by the critical heat flux and heat transfer coefficient. The graphene films were grown on Cu foils and transferred to ITO surfaces. Furthermore, SWCNTs were deposited on the graphene layer to fabricate hybrid graphene/SWCNT films. We determined that the hybrid graphene/SWCNT film deposited on an ITO surface is the most effective heat transfer surface in pool boiling because of the interconnected network of carbon structures.

  8. Surface-Wave Plasma Deposition of a-C:H Films for Field Emission

    Science.gov (United States)

    Sano, Toru; Nagatsu, Masaaki; Takada, Noriharu; Toyoda, Hirotaka; Sugai, Hideo; Guang, W. X.; Hirao, Takashi; Toyoda, Naoki

    2000-10-01

    Recently crystalline diamond or diamondlike carbon (DLC) thin films prepared by the plasma enhanced CVD techniques have been widely studied as a new material of electron emitter for the next generation large-area field emission display. Among them, DLC films grown at low temperature are more attractive from an aspect of industrial manufacturing. In this study, we have carried out the deposition of hydrogenated amorphous carbon(a-C:H) films using a high density, low pressure surface-wave plasma (SWP). The SWP was produced in a 40cm-diameter vacuum chamber by introducing 2.45 GHz microwave through a quartz window via slot antennas. The a-C:H films were deposited on a silicon substrate immersed in He/CH4 plasma, under discharge conditions of 700 W microwave power and 200 mTorr total pressure. Excellent field emission characteristics were obtained: the threshold electric field defined at an emission current density of 1 μA/cm^2 was obtained to be 4 V/μm. Other film characteristics measured with the XPS and FT-IR are also presented. This work was supported by a Grant-in-Aid for Science Research from the Ministry of Education, Science, Sports and Culture in Japan.

  9. Radiation detectors based on Multiwall Carbon Nanotubes deposited by a spray technique

    Energy Technology Data Exchange (ETDEWEB)

    Melisi, D., E-mail: domenico.melisi@ba.infn.it [INFN – Sezione di Bari, Via Orabona 4, 70126 (Italy); Nitti, M.A. [Department of Physics, University of Bari “A. Moro”, Via Orabona 4, 70126 (Italy); Valentini, M. [INFN – Sezione di Bari, Via Orabona 4, 70126 (Italy); Valentini, A. [INFN – Sezione di Bari, Via Orabona 4, 70126 (Italy); Department of Physics, University of Bari “A. Moro”, Via Orabona 4, 70126 (Italy); Ditaranto, N.; Cioffi, N. [Department of Chemistry, University of Bari “A. Moro”, Via Orabona 4, 70126 (Italy); Di Franco, C. [CNR-IFN Bari, Via Amendola 173, 70126 (Italy)

    2013-09-30

    In this paper a study of Multi Wall Carbon Nanotube films deposited at low temperature by means of a spray technique on different substrates is presented. Nanodispersion of nanotube powder in a non-polar 1,2-dichloroethane solvent was used as starting solution. Electron Microscopy in Scanning and Transmission modes were used in order to verify the morphological properties of the deposited films. Visible light detectors were prepared spraying Multi Wall Carbon Nanotubes on silicon substrates with different layouts. In some detectors the nanotubes were covered by an Indium Tin Oxide (ITO) layer. Electrical measurements, both in dark and under light irradiation, were performed and Current-Voltage characteristics are reported. The Indium Tin Oxide coating effect on the photoconductivity yield is presented and discussed along with device ageing test, resulting in a very good photoconduction and stability over four months. - Highlights: • Carbon nanotubes were deposited at low temperature using a spray technique. • Visible photodetectors based on carbon nanotubes films were produced. • Contribution of carbon nanotubes to the quantum efficiency is shown. • Charge collection from the devices increases with an indium tin oxide contact. • Time stability of photodetectors based on carbon nanotubes is demonstrated.

  10. Fundamental Mechanisms of Roughening and Smoothing During Thin Film Deposition

    Energy Technology Data Exchange (ETDEWEB)

    Headrick, Randall [Univ. of Vermont, Burlington, VT (United States)

    2016-03-18

    In this research program, we have explored the fundamental limits for thin film deposition in both crystalline and amorphous (i.e. non-crystalline) materials systems. For vacuum-based physical deposition processes such as sputter deposition, the background gas pressure of the inert gas (usually argon) used as the process gas has been found to be a key variable. Both a roughness transition and stress transition as a function of pressure have been linked to a common mechanism involving collisions of energetic particles from the deposition source with the process inert gas. As energetic particles collide with gas molecules in the deposition process they lose their energy rapidly if the pressure (and background gas density) is above a critical value. Both roughness and stress limit important properties of thin films for applications. In the area of epitaxial growth we have also discovered a related effect; there is a critical pressure below which highly crystalline layers grow in a layer-by-layer mode. This effect is also though to be due to energetic particle thermalization and scattering. Several other important effects such as the observation of coalescence dominated growth has been observed. This mode can be likened to the behavior of two-dimensional water droplets on the hood of a car during a rain storm; as the droplets grow and touch each other they tend to coalesce rapidly into new larger circular puddles, and this process proceeds exponentially as larger puddles overtake smaller ones and also merge with other large puddles. This discovery will enable more accurate simulations and modeling of epitaxial growth processes. We have also observed that epitaxial films undergo a roughening transition as a function of thickness, which is attributed to strain induced by the crystalline lattice mismatch with the substrate crystal. In addition, we have studied another physical deposition process called pulsed laser deposition. It differs from sputter deposition due to the

  11. Electronic Power System Application of Diamond-Like Carbon Films

    Science.gov (United States)

    Wu, Richard L. C.; Kosai, H.; Fries-Carr, S.; Weimer, J.; Freeman, M.; Schwarze, G. E.

    2003-01-01

    A prototype manufacturing technology for producing high volume efficiency and high energy density diamond-like carbon (DLC) capacitors has been developed. Unique dual ion-beam deposition and web-handling systems have been designed and constructed to deposit high quality DLC films simultaneously on both sides of capacitor grade aluminum foil and aluminum-coated polymer films. An optimized process, using inductively coupled RF ion sources, has been used to synthesize electrically robust DLC films. DLC films are amorphous and highly flexible, making them suitable for the production of wound capacitors. DLC capacitors are reliable and stable over a wide range of AC frequencies from 20 Hz to 1 MHz, and over a temperature range from .500 C to 3000 C. The compact DLC capacitors offer at least a 50% decrease in weight and volume and a greater than 50% increase in temperature handling capability over equal value capacitors built with existing technologies. The DLC capacitors will be suitable for high temperature, high voltage, pulsed power and filter applications.

  12. Gas desorption during friction of amorphous carbon films

    Science.gov (United States)

    Rusanov, A.; Fontaine, J.; Martin, J.-M.; Mogne, T. L.; Nevshupa, R.

    2008-03-01

    Gas desorption induced by friction of solids, i.e. tribodesorption, is one of the numerous physical and chemical phenomena, which arise during friction as result of thermal and structural activation of material in a friction zone. Tribodesorption of carbon oxides, hydrocarbons, and water vapours may lead to significant deterioration of ultra high vacuum conditions in modern technological equipment in electronic, optoelectronic industries. Therefore, knowledge of tribodesorption is crucial for the performance and lifetime of vacuum tribosystems. Diamond-like carbon (DLC) coatings are interesting materials for vacuum tribological systems due to their high wear resistance and low friction. Highly hydrogenated amorphous carbon (a-C:H) films are known to exhibit extremely low friction coefficient under high vacuum or inert environment, known as 'superlubricity' or 'superlow friction'. However, the superlow friction period is not always stable and then tends to spontaneous transition to high friction. It is supposed that hydrogen supply from the bulk to the surface is crucial for establishing and maintaining superlow friction. Thus, tribodesorption can serve also as a new technique to determine the role of gases in superlow friction mechanisms. Desorption of various a-C:H films, deposited by PECVD, ion-beam deposition and deposition using diode system, has been studied by means of ultra-high vacuum tribometer equipped with a mass spectrometer. It was found that in superlow friction period desorption rate was below the detection limit in the 0-85 mass range. However, transition from superlow friction to high friction was accompanied by desorption of various gases, mainly of H2 and CH4. During friction transition, surfaces were heavily damaged. In experiments with DLC films with low hydrogen content tribodesorption was significant during the whole experiment, while low friction was not observed. From estimation of maximum surface temperature during sliding contact it was

  13. Effects of Implant Copper Layer on Diamond Film Deposition on Cemented Carbides

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    The deposition of high-quality diamond films and their adhesion on cemented carbides are strongly influenced by the catalytic effect of cobalt under typical deposition conditions.Decreasing Co content on the surface of the cemented carbide is often used for the diamond filmdeposition. But the leaching of Co from the WC-Co substrate leading to a mechanical weak surface often causes a poor adhesion. In this paper we adopted an implant copper layer preparedby vaporization to improve the mechanical properties of the Co-leached substrate. The diamondfilms were grown by microwave plasma chemical vapor deposition from CH4 :H2 gas mixture. Thecross section and the morphology of the diamond film were characterized by scanning electronmicroscopy (SEM). The non-diamond content in the film was analyzed by Raman spectroscopy.The effects of pretreatment on the concentrations of Co and Cu near the interfacial region wereexamined by energy dispersive spectrum (EDS) equipped with SEM. The adhesion of the diamondon the substrate was evaluated with a Rockwell-type hardness tester. The results indicate that thediamond films prepared with implant copper layer have a good adhesion to the cemented carbidesubstrate due to the recovery of the mechanical properties of the Co-depleted substrate after thecopper implantation and the formation of less amorphous carbon between the substrate and thediamond film.

  14. Flame spray pyrolysis synthesis and aerosol deposition of nanoparticle films

    DEFF Research Database (Denmark)

    Tricoli, Antonio; Elmøe, Tobias Dokkedal

    2012-01-01

    The assembly of nanoparticle films by flame spray pyrolysis (FSP) synthesis and deposition on temperature‐controlled substrates (323–723 K) was investigated for several application‐relevant conditions. An exemplary SnO2 nanoparticle aerosol was generated by FSP and its properties (e.g., particle...

  15. Chemical Vapor Deposition of Aluminum Oxide Thin Films

    Science.gov (United States)

    Vohs, Jason K.; Bentz, Amy; Eleamos, Krystal; Poole, John; Fahlman, Bradley D.

    2010-01-01

    Chemical vapor deposition (CVD) is a process routinely used to produce thin films of materials via decomposition of volatile precursor molecules. Unfortunately, the equipment required for a conventional CVD experiment is not practical or affordable for many undergraduate chemistry laboratories, especially at smaller institutions. In an effort to…

  16. Hardening of smooth pulsed laser deposited PMMA films by heating

    Science.gov (United States)

    Fuchs, Britta; Schlenkrich, Felix; Seyffarth, Susanne; Meschede, Andreas; Rotzoll, Robert; Vana, Philipp; Großmann, Peter; Mann, Klaus; Krebs, Hans-Ulrich

    2010-03-01

    Smooth poly(methyl methacrylate) (PMMA) films without any droplets were pulsed laser deposited at a wavelength of 248 nm and a laser fluence of 125 mJ/cm2. After deposition at room temperature, the films possess low universal hardness of only 3 N/mm2. Thermal treatments up to 200°C, either during deposition or afterwards, lead to film hardening up to values of 200 N/mm2. Using a combination of complementary methods, two main mechanisms could be made responsible for this temperature induced hardening effect well above the glass transition temperature of 102°C. The first process is induced by the evaporation of chain fragments and low molecular mass material, which are present in the film due to the ablation process, leading to an increase of the average molecular mass and thus to hardening. The second mechanism can be seen in partial cross-linking of the polymer film as soon as chain scission occurs at higher temperatures and the mobility and reactivity of the polymer material is high enough.

  17. Preparation of self-supporting carbon thin films

    CERN Document Server

    Lommel, B; Kindler, B; Klemm, J; Steiner, J

    2002-01-01

    For heavy-ion beam experiments, self-supporting carbon thin films are needed as targets, stripper foils and as backings (Nucl. Instr. and Meth. A 334 (1993) 69) for materials which cannot be produced self-supporting. Using resistance evaporation under high vacuum, self-supporting carbon foils with a thickness of 5 mu g/cm sup 2 and a diameter of 10 mm, a thickness of 10 mu g/cm sup 2 and a diameter of 50 mm up to a thickness of 50 mu g/cm sup 2 and a diameter of 300 mm can be obtained. Due to the energy impact of the heavy-ion beam, the amorphous carbon is restructured into textured graphite, as was found already by Dollinger et al. (Nucl. Instr. and Meth. A 303 (1991) 79). The discuss the production process as well as the change of the layer structure caused by the energy deposit.

  18. Deposition and characterization of vacuum deposited aluminum films on Kapton laminates

    Energy Technology Data Exchange (ETDEWEB)

    Sherman, D.M.

    1978-07-01

    A process has been developed for the vacuum deposition by electron beam evaporation of high quality aluminum films 10 ..mu..m thick on domed three-layer laminated substrates consisting of Kapton/Pyralux/Kapton/Pyralux/Aluminum (Du Pont Corporation). Thermogravimetric analysis and mass spectrometry of the substrate materials and in-process residual gas analysis were used to determine the outgassing characteristics of the substrate laminate and to aid in the development of suitable thermal processing. The laminated substrates required bakeouts both at atmosphere and in high vacuum prior to deposition to permit evaporation at a pressure of 0.1 mPa (1 x 10/sup -6/ torr). Film properties that were obtained were a thickness uniformity across a 200 mm diameter part in the 1 percent range, a resistivity near that of bulk pure aluminum, a smooth and shiny film surface, and adequate film adhesion.

  19. Low resistance polycrystalline diamond thin films deposited by hot filament chemical vapour deposition

    Indian Academy of Sciences (India)

    Mahtab Ullah; Ejaz Ahmed; Abdelbary Elhissi; Waqar Ahmed

    2014-05-01

    Polycrystalline diamond thin films with outgrowing diamond (OGD) grains were deposited onto silicon wafers using a hydrocarbon gas (CH4) highly diluted with H2 at low pressure in a hot filament chemical vapour deposition (HFCVD) reactor with a range of gas flow rates. X-ray diffraction (XRD) and SEM showed polycrystalline diamond structure with a random orientation. Polycrystalline diamond films with various textures were grown and (111) facets were dominant with sharp grain boundaries. Outgrowth was observed in flowerish character at high gas flow rates. Isolated single crystals with little openings appeared at various stages at low gas flow rates. Thus, changing gas flow rates had a beneficial influence on the grain size, growth rate and electrical resistivity. CVD diamond films gave an excellent performance for medium film thickness with relatively low electrical resistivity and making them potentially useful in many industrial applications.

  20. Deposition and characterization of titanium dioxide and hafnium dioxide thin films for high dielectric applications

    Science.gov (United States)

    Yoon, Meeyoung

    The industry's demand for higher integrated circuit density and performance has forced the gate dielectric layer thickness to decrease rapidly. The use of conventional SiO2 films as gate oxide is reaching its limit due to the rapid increase in tunneling current. Therefore, a need for a high dielectric material to produce large oxide capacitance and low leakage current has emerged. Metal-oxides such as titanium dioxide (TiO2) and hafnium dioxide (HfO2) are attractive candidates for gate dielectrics due to their electrical and physical properties suitable for high dielectric applications. MOCVD of TiO2 using titanium isopropoxide (TTIP) precursor on p-type Si(100) has been studied. Insertion of a TiO x buffer layer, formed by depositing metallic Ti followed by oxidation, at the TiO2/Si interface has reduced the carbon contamination in the TiO2 film. Elemental Ti films, analyzed by in-situ AES, were found to grow according to Stranski-Krastanov mode on Si(100). Carbon-free, stoichiometric TiO2 films were successfully produced on Si(100) without any parasitic SiO2 layers at the TiO 2/Si interface. Electron-beam deposition of HfO2 films on Si(100) has also been investigated in this work. HfO2 films are formed by depositing elemental Hf on Si(100) and then oxidizing it either in O2 or O 3. XPS results reveal that with oxidation Hf(4f) peak shifts +3.45eV with 02 and +3.65eV with O3 oxidation. LEED and AFM studies show that the initially ordered crystalline Hf becomes disordered after oxidation. The thermodynamic stability of HfO2 films on Si has been studied using a unique test-bed structure of Hf/O3/Si. Post-Oxidation of Layer Deposition (POLD) has been employed to produce HfO2 films with a desired thickness. XPS results indicate that stoichiometric HfO 2 films were successfully produced using the POLD process. The investigation of the growth and thin film properties of TiO 2 and HfO2 using oxygen and ozone has laid a foundation for the application of these metal

  1. Light-assisted deposition of CdS thin films

    Science.gov (United States)

    Bacaksiz, E.; Novruzov, V.; Karal, H.; Yanmaz, E.; Altunbas, M.; Kopya, A. I.

    2001-11-01

    The effects of white light illumination during the deposition of CdS thin films in a quasi-closed volume on the structural, photoelectrical and optical properties are investigated. The films were highly c-axis oriented with an increasing intensity of (002) reflection as the illumination increases. The room temperature resistivity values of the CdS films decreased in the range of 107-104 Ω cm. The photosensitivity in the fundamental absorption region and the transparency in the transmission region considerably increased as the illumination increased. Under 100 mW cm-2 insolation, the efficiencies of the CdS/CdTe solar cells based on CdS window materials which were deposited: (1) in the dark; and (2) under an illumination of 150 mW cm-2 were found to be 1.8% and 7.3%, respectively.

  2. Bath parameter dependence of chemically deposited Copper Selenide thin film

    International Nuclear Information System (INIS)

    In this article, a low cost chemical bath deposition (CBD) technique has been used for the preparation Of Cu2-xSe thin films on to glass substrate. Different thin fms (0.2-0.6/μm) were prepared by adjusting the bath parameter like concentration of ammonia, deposition time, temperature of the solution, and the ratios of the mixing composition between copper and selenium in the reaction bath. From these studies, it reveals that at low concentration of ammonia or TEA, the terminal thicknesses of the films are less, which gradually increases with the increase of concentrations and then drop down at still higher concentrations. It has been found that completing the Cu2+ ions with EA first, and then addition of ammonia yields better results than the reverse process. The film thickness increases with the decrease of value x of Cu2-xSe. (author)

  3. Comparison of lanthanum substituted bismuth titanate (BLT) thin films deposited by sputtering and pulsed laser deposition

    Energy Technology Data Exchange (ETDEWEB)

    Besland, M.P. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France)]. E-mail: Marie-Paule.Besland@cnrs-imn.fr; Djani-ait Aissa, H. [Division milieux Ionises et lasers, Centre de Developpement des Technologies Avancees CDTA, Baba Hassen Alger, Algerie (Algeria); Barroy, P.R.J. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France); Lafane, S. [Division milieux Ionises et lasers, Centre de Developpement des Technologies Avancees CDTA, Baba Hassen Alger, Algerie (Algeria); Tessier, P.Y. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France); Angleraud, B. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France); Richard-Plouet, M. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France); Brohan, L. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France); Djouadi, M.A. [Institut des Materiaux Jean Rouxel, Universite de Nantes, UMR CNRS 6502, 2 rue de la Houssiniere, B.P. 32229, 44322, Nantes cedex 3 (France)

    2006-01-20

    Bi{sub 4-x}La {sub x}Ti{sub 3}O{sub 12} (BLT {sub x}) (x = 0 to 1) thin films were grown on silicon (100) and platinized substrates Pt/TiO{sub 2}/SiO{sub 2}/Si using RF diode sputtering, magnetron sputtering and pulsed laser deposition (PLD). Stoichiometric home-synthesized targets were used. Reactive sputtering was investigated in argon/oxygen gas mixture, with a pressure ranging from 0.33 to 10 Pa without heating the substrate. PLD was investigated in pure oxygen, at a chamber pressure of 20 Pa for a substrate temperature of 400-440 deg. C. Comparative structural, chemical, optical and morphological characterizations of BLT thin films have been performed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS), X-Ray Photoelectron Spectroscopy (XPS), Spectro-ellipsometric measurements (SE) and Atomic Force Microscopy (AFM). Both sputtering techniques allow to obtain uniform films with thickness ranging from 200 to 1000 nm and chemical composition varying from (Bi,La){sub 2} Ti{sub 3} O{sub 12} to (Bi,La){sub 4.5}Ti{sub 3}O{sub 12}, depending on deposition pressure and RF power. In addition, BLT films deposited by magnetron sputtering, at a pressure deposition ranging from 1.1 to 5 Pa, were well-crystallized after a post-deposition annealing at 650 deg. C in oxygen. They exhibit a refractive index and optical band gap of 2.7 and 3.15 eV, respectively. Regarding PLD, single phase and well-crystallized, 100-200 nm thick BLT films with a stoichiometric (Bi,La){sub 4}Ti{sub 3}O{sub 12} chemical composition were obtained, exhibiting in addition a preferential orientation along (200). It is worth noting that BLT films deposited by magnetron sputtering are as well-crystallized than PLD ones.

  4. Comparison of lanthanum substituted bismuth titanate (BLT) thin films deposited by sputtering and pulsed laser deposition

    International Nuclear Information System (INIS)

    Bi4-xLa xTi3O12 (BLT x) (x = 0 to 1) thin films were grown on silicon (100) and platinized substrates Pt/TiO2/SiO2/Si using RF diode sputtering, magnetron sputtering and pulsed laser deposition (PLD). Stoichiometric home-synthesized targets were used. Reactive sputtering was investigated in argon/oxygen gas mixture, with a pressure ranging from 0.33 to 10 Pa without heating the substrate. PLD was investigated in pure oxygen, at a chamber pressure of 20 Pa for a substrate temperature of 400-440 deg. C. Comparative structural, chemical, optical and morphological characterizations of BLT thin films have been performed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS), X-Ray Photoelectron Spectroscopy (XPS), Spectro-ellipsometric measurements (SE) and Atomic Force Microscopy (AFM). Both sputtering techniques allow to obtain uniform films with thickness ranging from 200 to 1000 nm and chemical composition varying from (Bi,La)2 Ti3 O12 to (Bi,La)4.5Ti3O12, depending on deposition pressure and RF power. In addition, BLT films deposited by magnetron sputtering, at a pressure deposition ranging from 1.1 to 5 Pa, were well-crystallized after a post-deposition annealing at 650 deg. C in oxygen. They exhibit a refractive index and optical band gap of 2.7 and 3.15 eV, respectively. Regarding PLD, single phase and well-crystallized, 100-200 nm thick BLT films with a stoichiometric (Bi,La)4Ti3O12 chemical composition were obtained, exhibiting in addition a preferential orientation along (200). It is worth noting that BLT films deposited by magnetron sputtering are as well-crystallized than PLD ones

  5. Surface properties of diamond-like carbon films prepared by CVD and PVD methods

    Institute of Scientific and Technical Information of China (English)

    Liu Dong-Ping; Liu Yan-Hong; Chen Bao-Xiang

    2006-01-01

    Diamond-like carbon (DLC) films have been deposited using three different techniques: (a) electron cyclotron resonance-plasma source ion implantation, (b) low-pressure dielectric barrier discharge, (c) filtered-pulsed cathodic arc discharge. The surface and mechanical properties of these films are compared using atomic force microscopebased tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp3 hybridized carbon while the soft surface layers of tetrahedral amorphous carbon (ta-C) films have graphite-like structure. The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp3 hybridized carbon enriched surface layers. The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma.

  6. Characteristics of atomic layer deposition grown HfO{sub 2} films after exposure to plasma treatments

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Y.W. [Kookje Electric Korea Co. LTD, 4-2 Chaam-Dong, Chonan-Si, Chungcheongnam-Do (Korea, Republic of)]. E-mail: ywkim@kekorea.co.kr; Roh, Y. [School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of); Yoo, Ji-Beom [School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of)]. E-mail: jibyoo@skku.ac.kr; Kim, Hyoungsub [School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of)

    2007-01-22

    Ultra thin HfO{sub 2} films were grown by the atomic layer deposition (ALD) technique using tetrakismethylethylaminohafnium (Hf[N(CH){sub 3}(C{sub 2}H{sub 5})]{sub 4}) and ozone (O{sub 3}) as the precursors and subsequently exposed to various plasma conditions, i.e., CCP (capacitively coupled plasma) and MMT (modified magnetron typed plasma) in N{sub 2} or N{sub 2}/O{sub 2} ambient. The conventional CCP treatment was not effective in removing the carbon impurities, which were incorporated during the ALD process, from the HfO{sub 2} films. However, according to the X-ray photoelectron spectroscopy measurements, the MMT treated films exhibited a significant reduction in their carbon contents and the efficient incorporation of nitrogen atoms. Although the incorporated nitrogen was easily released during the post-thermal annealing of the MMT treated samples, it was more effective than the CCP treatment in removing the film impurities. Consequently, the MMT treated samples exhibited excellent electrical properties as compared to the as-deposited HfO{sub 2} films, including negligible hysteresis (flatband voltage shift), a low leakage current, and the reduced equivalent oxide thickness of the gate stack. In conclusion, MMT post treatment is more effective than conventional CCP treatment in improving the electrical properties of high-k films by reducing the carbon contamination and densifying the as-deposited defective films.

  7. The microstructure, mechanical and friction properties of protective diamond like carbon films on magnesium alloy

    Energy Technology Data Exchange (ETDEWEB)

    Zou, Y.S., E-mail: yshzou75@gmail.com [School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, 210094 (China); Wu, Y.F.; Yang, H.; Cang, K. [School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, 210094 (China); Song, G.H. [School of Materials Science and Engineering, Shenyang University of Technology, Shenyang, Liaoning, 110178 (China); Li, Z.X.; Zhou, K. [School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, 210094 (China)

    2011-12-01

    Protective hard coatings deposited on magnesium alloys are believed to be effective for overcoming their poor wear properties. In this work, diamond-like carbon (DLC) films as hard protective films were deposited on AZ91 magnesium alloy by arc ion plating under negative pulse bias voltages ranging from 0 to -200 V. The microstructure, composition and mechanical properties of the DLC films were analyzed by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and nanoindentation. The tribological behavior of uncoated and coated AZ91 magnesium alloy was investigated using a ball-on-disk tribotester. The results show that the negative pulse bias voltage used for film deposition has a significant effect on the sp{sup 3} carbon content and mechanical properties of the deposited DLC films. A maximum sp{sup 3} content of 33.3% was obtained at -100 V, resulting in a high hardness of 28.6 GPa and elastic modulus of 300.0 GPa. The DLC films showed very good adhesion to the AZ91 magnesium alloy with no observable cracks and delamination even during friction testing. Compared with the uncoated AZ91 magnesium alloy, the magnesium alloy coated with DLC films exhibits a low friction coefficient and a narrow, shallow wear track. The wear resistance and surface hardness of AZ91 magnesium alloy can be significantly improved by coating a layer of DLC protective film due to its high hardness and low friction coefficient.

  8. The microstructure, mechanical and friction properties of protective diamond like carbon films on magnesium alloy

    International Nuclear Information System (INIS)

    Protective hard coatings deposited on magnesium alloys are believed to be effective for overcoming their poor wear properties. In this work, diamond-like carbon (DLC) films as hard protective films were deposited on AZ91 magnesium alloy by arc ion plating under negative pulse bias voltages ranging from 0 to -200 V. The microstructure, composition and mechanical properties of the DLC films were analyzed by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and nanoindentation. The tribological behavior of uncoated and coated AZ91 magnesium alloy was investigated using a ball-on-disk tribotester. The results show that the negative pulse bias voltage used for film deposition has a significant effect on the sp3 carbon content and mechanical properties of the deposited DLC films. A maximum sp3 content of 33.3% was obtained at -100 V, resulting in a high hardness of 28.6 GPa and elastic modulus of 300.0 GPa. The DLC films showed very good adhesion to the AZ91 magnesium alloy with no observable cracks and delamination even during friction testing. Compared with the uncoated AZ91 magnesium alloy, the magnesium alloy coated with DLC films exhibits a low friction coefficient and a narrow, shallow wear track. The wear resistance and surface hardness of AZ91 magnesium alloy can be significantly improved by coating a layer of DLC protective film due to its high hardness and low friction coefficient.

  9. The microstructure, mechanical and friction properties of protective diamond like carbon films on magnesium alloy

    Science.gov (United States)

    Zou, Y. S.; Wu, Y. F.; Yang, H.; Cang, K.; Song, G. H.; Li, Z. X.; Zhou, K.

    2011-12-01

    Protective hard coatings deposited on magnesium alloys are believed to be effective for overcoming their poor wear properties. In this work, diamond-like carbon (DLC) films as hard protective films were deposited on AZ91 magnesium alloy by arc ion plating under negative pulse bias voltages ranging from 0 to -200 V. The microstructure, composition and mechanical properties of the DLC films were analyzed by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and nanoindentation. The tribological behavior of uncoated and coated AZ91 magnesium alloy was investigated using a ball-on-disk tribotester. The results show that the negative pulse bias voltage used for film deposition has a significant effect on the sp3 carbon content and mechanical properties of the deposited DLC films. A maximum sp3 content of 33.3% was obtained at -100 V, resulting in a high hardness of 28.6 GPa and elastic modulus of 300.0 GPa. The DLC films showed very good adhesion to the AZ91 magnesium alloy with no observable cracks and delamination even during friction testing. Compared with the uncoated AZ91 magnesium alloy, the magnesium alloy coated with DLC films exhibits a low friction coefficient and a narrow, shallow wear track. The wear resistance and surface hardness of AZ91 magnesium alloy can be significantly improved by coating a layer of DLC protective film due to its high hardness and low friction coefficient.

  10. Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films

    Directory of Open Access Journals (Sweden)

    Jörg Haeberle

    2013-11-01

    Full Text Available We report on results on the preparation of thin (2O3 films on silicon substrates using thermal atomic layer deposition (T-ALD and plasma enhanced atomic layer deposition (PE-ALD in the SENTECH SI ALD LL system. The T-ALD Al2O3 layers were deposited at 200 °C, for the PE-ALD films we varied the substrate temperature range between room temperature (rt and 200 °C. We show data from spectroscopic ellipsometry (thickness, refractive index, growth rate over 4” wafers and correlate them to X-ray photoelectron spectroscopy (XPS results. The 200 °C T-ALD and PE-ALD processes yield films with similar refractive indices and with oxygen to aluminum elemental ratios very close to the stoichiometric value of 1.5. However, in both also fragments of the precursor are integrated into the film. The PE-ALD films show an increased growth rate and lower carbon contaminations. Reducing the deposition temperature down to rt leads to a higher content of carbon and CH-species. We also find a decrease of the refractive index and of the oxygen to aluminum elemental ratio as well as an increase of the growth rate whereas the homogeneity of the film growth is not influenced significantly. Initial state energy shifts in all PE-ALD samples are observed which we attribute to a net negative charge within the films.

  11. Photoluminescence and Raman Spectroscopy Studies of Carbon Nitride Films

    Directory of Open Access Journals (Sweden)

    J. Hernández-Torres

    2016-01-01

    Full Text Available Amorphous carbon nitride films with N/C ratios ranging from 2.24 to 3.26 were deposited by reactive sputtering at room temperature on corning glass, silicon, and quartz as substrates. The average chemical composition of the films was obtained from the semiquantitative energy dispersive spectroscopy analysis. Photoluminescence measurements were performed to determine the optical band gap of the films. The photoluminescence spectra displayed two peaks: one associated with the substrate and the other associated with CNx films located at ≈2.13±0.02 eV. Results show an increase in the optical band gap from 2.11 to 2.15 eV associated with the increase in the N/C ratio. Raman spectroscopy measurements showed a dominant D band. ID/IG ratio reaches a maximum value for N/C ≈ 3.03 when the optical band gap is 2.12 eV. Features observed by the photoluminescence and Raman studies have been associated with the increase in the carbon sp2/sp3 ratio due to presence of high nitrogen content.

  12. In situ measurement of conductivity during nanocomposite film deposition

    Science.gov (United States)

    Blattmann, Christoph O.; Pratsinis, Sotiris E.

    2016-05-01

    Flexible and electrically conductive nanocomposite films are essential for small, portable and even implantable electronic devices. Typically, such film synthesis and conductivity measurement are carried out sequentially. As a result, optimization of filler loading and size/morphology characteristics with respect to film conductivity is rather tedious and costly. Here, freshly-made Ag nanoparticles (nanosilver) are made by scalable flame aerosol technology and directly deposited onto polymeric (polystyrene and poly(methyl methacrylate)) films during which the resistance of the resulting nanocomposite is measured in situ. The formation and gas-phase growth of such flame-made nanosilver, just before incorporation onto the polymer film, is measured by thermophoretic sampling and microscopy. Monitoring the nanocomposite resistance in situ reveals the onset of conductive network formation by the deposited nanosilver growth and sinternecking. The in situ measurement is much faster and more accurate than conventional ex situ four-point resistance measurements since an electrically percolating network is detected upon its formation by the in situ technique. Nevertheless, general resistance trends with respect to filler loading and host polymer composition are consistent for both in situ and ex situ measurements. The time lag for the onset of a conductive network (i.e., percolation) depends linearly on the glass transition temperature (Tg) of the host polymer. This is attributed to the increased nanoparticle-polymer interaction with decreasing Tg. Proper selection of the host polymer in combination with in situ resistance monitoring therefore enable the optimal preparation of conductive nanocomposite films.

  13. Structural and optical properties of tellurite thin film glasses deposited by pulsed laser deposition

    Energy Technology Data Exchange (ETDEWEB)

    Munoz-Martin, D.; Fernandez-Navarro, J.M. [Laser Processing Group, Instituto de Optica (CSIC), Serrano 121, 28006 Madrid (Spain); Gonzalo, J., E-mail: j.gonzalo@io.cfmac.csic.es [Laser Processing Group, Instituto de Optica (CSIC), Serrano 121, 28006 Madrid (Spain); Jose, G.; Jha, A. [Institute for Materials Research, University of Leeds, Clarendon Road, Leeds LS2 9JT (United Kingdom); Fierro, J.L.G. [Instituto de Catalisis y Petroleoquimica (CSIC), Marie Curie s/n, 28049 Cantoblanco (Spain); Domingo, C. [Instituto de Estructura de la Materia (CSIC), Serrano 121, 28006 Madrid (Spain); Garcia-Lopez, J. [Centro Nacional de Aceleradores, P. Tecnologico ' Cartuja 93' , 41092 Sevilla (Spain)

    2011-10-31

    Tellurite (TeO{sub 2}-TiO{sub 2}-Nb{sub 2}O{sub 5}) thin film glasses have been produced by pulsed laser deposition at room temperature at laser energy densities in the range of 0.8-1.5 J/cm{sup 2} and oxygen pressures in the range of 3-11 Pa. The oxygen concentration in the films increases with laser energy density to reach values very close to that of the bulk glass at 1.5 J/cm{sup 2}, while films prepared at 1.5 J/cm{sup 2} and pressures above 5 Pa show oxygen concentration in excess of 10% comparing to the glass. X-ray photoelectron spectroscopy shows the presence of elementary Te in films deposited at O{sub 2} pressures {<=} 5 Pa that is not detected at higher pressures, while analysis of Raman spectra of the samples suggests a progressive substitution of TeO{sub 3} trigonal pyramids by TeO{sub 4} trigonal bipyramids in the films when increasing their oxygen content. Spectroscopic ellipsometry analysis combined with Cauchy and effective medium modeling demonstrates the influence of these compositional and structural modifications on the optical response of the films. Since the oxygen content determines their optical response through the structural modifications induced in the films, those can be effectively controlled by tuning the deposition conditions, and films having large n (2.08) and reduced k (< 10{sup -4}) at 1.5 {mu}m have been produced using the optimum deposition conditions.

  14. Growth of titanium silicate thin films by photo-induced chemical vapor deposition

    Energy Technology Data Exchange (ETDEWEB)

    Wang, Z.M.; Fang, Q.; Zhang, J.-Y.; Wu, J.X.; Di, Y.; Chen, W.; Chen, M.L.; Boyd, Ian W

    2004-04-01

    Titanium silicate thin films have been grown on Si substrates by photo-induced chemical vapor deposition using 222-nm ultraviolet excimer lamps. Titanium tetraisopropoxide (TTIP) and tetraethoxysilane (TEOS) were used as precursors. TTIP and TEOS were dissolved together in cyclohexane and introduced into the photochemical reaction chamber through a droplet injector vaporizer. The composition of the film was controlled by changing the ratio of TTIP to TEOS in the precursor solution. High quality titanium silicate films with various Ti/Si ratios and low carbon content have been achieved as revealed by X-ray photoelectron spectroscopy measurements. The atomic percentage of Ti content in the grown silicate films is significantly larger than that in the precursor solution. The films were measured to be 30-80 nm in thickness and 1.91-2.31 in refractive index by ellipsometry. Both the growth rate and refractive index increase with increasing Ti percentage in the silicate films. The evolution of Fourier transform infrared spectra of the silicate films with solution composition shows that the Ti-O-Si absorption at approximately 920 cm{sup -1} becomes stronger, while the Ti-O absorption at approximately 430 cm{sup -1} becomes weaker with decreasing Ti percentage in the solution. A small feature at {approx}1035 cm{sup -1} related to Si-O-Si bonds is also observed in the SiO{sub 2}-rich Ti silicate film.

  15. Plasma deposition of boron films with high growth rate and efficiency using carborane

    International Nuclear Information System (INIS)

    The injection of carborane (C2B10H12) on the PISCES-B linear plasma device has been used to produce boron containing films on various target species. Film growth rates achieved are extremely high (up to 30 nm/s) compared to those typically found for glow discharges (∼0.01 nm/s). For low-Z target materials (C and Al) the film production is highly efficient, with the boron film growth rate comparable to the incident ion flux and the injection rate of boron atoms. The boron to carbon ratio is 3.0-3.6 for these films. Similarly high growth rates (∼10 nm/s) are obtained with high-Z target (W), but with lower deposition efficiency and higher B/C film ratio. The high film growth rate/efficiency are apparently linked to the high degree of carborane ionization and dissociation caused by the ∼40 eV PISCES-B plasma, compared with T<1 eV plasmas of glow discharges. This technique opens the possibility of continuously producing protective B films in thermonuclear devices where net erosion rates approach 10 nm/s

  16. Thermal stability of multilayer graphene films synthesized by chemical vapor deposition and stained by metallic impurities

    International Nuclear Information System (INIS)

    Thermal stability is an important property of graphene that requires thorough investigation. This study reports the thermal stability of graphene films synthesized by chemical vapor deposition (CVD) on catalytic nickel substrates in a reducing atmosphere. Electron microscopies, atomic force microscopy, and Raman spectroscopy, as well as electronic measurements, were used to determine that CVD-grown graphene films are stable up to 700 °C. At 800 °C, however, graphene films were etched by catalytic metal nanoparticles, and at 1000 °C many tortuous tubular structures were formed in the film and carbon nanotubes were formed at the film edges and at catalytic metal-contaminated sites. Furthermore, we applied our pristine and thermally treated graphene films as active channels in field-effect transistors and characterized their electrical properties. Our research shows that remnant catalytic metal impurities play a critical role in damaging graphene films at high temperatures in a reducing atmosphere: this damage should be considered in the quality control of large-area graphene films for high temperature applications. (paper)

  17. Structural, chemical and nanomechanical investigations of SiC/polymeric a-C:H films deposited by reactive RF unbalanced magnetron sputtering

    Science.gov (United States)

    Tomastik, C.; Lackner, J. M.; Pauschitz, A.; Roy, M.

    2016-03-01

    Amorphous carbon (or diamond-like carbon, DLC) films have shown a number of important properties usable for a wide range of applications for very thin coatings with low friction and good wear resistance. DLC films alloyed with (semi-)metals show some improved properties and can be deposited by various methods. Among those, the widely used magnetron sputtering of carbon targets is known to increase the number of defects in the films. Therefore, in this paper an alternative approach of depositing silicon-carbide-containing polymeric hydrogenated DLC films using unbalanced magnetron sputtering was investigated. The influence of the C2H2 precursor concentration in the deposition chamber on the chemical and structural properties of the deposited films was investigated by Raman spectroscopy, X-ray photoelectron spectroscopy and elastic recoil detection analysis. Roughness, mechanical properties and scratch response of the films were evaluated with the help of atomic force microscopy and nanoindentation. The Raman spectra revealed a strong correlation of the film structure with the C2H2 concentration during deposition. A higher C2H2 flow rate results in an increase in SiC content and decrease in hydrogen content in the film. This in turn increases hardness and elastic modulus and decreases the ratio H/E and H3/E2. The highest scratch resistance is exhibited by the film with the highest hardness, and the film having the highest overall sp3 bond content shows the highest elastic recovery during scratching.

  18. Vacuum deposition onto webs, films and foils

    CERN Document Server

    Bishop, Charles A

    2011-01-01

    Roll-to-roll vacuum deposition is the technology that applies an even coating to a flexible material that can be held on a roll and provides a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces, such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging (e.g. snack packets). Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology: solar energy products are moving from rigid panels onto flexible substrates, which are cheaper and more versatile; in a similar way, electronic circuit 'boards' can be produced on a flexible polymer, creating a new range of 'flexible electronics' products; and, flexible displays are another area of new technology in vacuum coating, with flexible display panels and light sources emerging. Charles Bishop has written this book to meet the need he identified, as a t...

  19. Interfacial properties of a carbyne-rich nanostructured carbon thin film in ionic liquid

    Science.gov (United States)

    Giacomo Bettini, Luca; Della Foglia, Flavio; Piseri, Paolo; Milani, Paolo

    2016-03-01

    Nanostructured carbon sp2 (ns-C) thin films with up to 30% of sp-coordinated atoms (carbynes) were produced in a high vacuum by the low kinetic energy deposition of carbon clusters produced in the gas phase and accelerated by a supersonic expansion. Immediately after deposition the ns-C films were immersed in situ in an ionic liquid electrolyte. The interfacial properties of ns-C films in the ionic liquid electrolyte were characterized by electrochemical impedance spectroscopy and cyclic voltammetry (CV). The so-prepared carbyne-rich electrodes showed superior electric double layer (EDL) capacitance and electric conductivity compared to ns-C electrodes containing only sp2 carbon, showing the substantial influence of carbynes on the electrochemical properties of nanostructured carbon electrodes.

  20. Visible photoluminescence from ZnO/diamond-like carbon thin films

    Institute of Scientific and Technical Information of China (English)

    ZHANG Li-chun; LI Qing-shan; DONG Yan-feng; MA Zi-xia

    2012-01-01

    ZnO/diamond-like carbon (DLC) thin films are deposited by pulsed laser deposition (PLD) on Si (111) wafer.Visible room-temperature photoluminescence (PL) is observed from ZnO/DLC thin films by fluorescence spectrophotometer.The Gaussian curve fitting of PL spectra reveals that the broadband visible emission contains three components with λ=508 nm,554 nm and 698 nm.The origin and possible mechanism of the visible PL are discussed,and they can be attributed to the PL recombination of ZnO and DLC thin films.

  1. Electrochemical preparation and electrochemical behavior of polypyrrole/carbon nanotube composite films

    Institute of Scientific and Technical Information of China (English)

    Xue-tong ZHANG; Wen-hui SONG

    2009-01-01

    Polypyirole/multiwalled carbon nanotube (MWNT) composite fihns were electrochemically depos-ited in the presence of an ionic surfactant, sodium dodecyl sulfate (SDS), acting as both supporting electrolyte and dispersant. The effects of the surfactant and the MWNT concentrations on the structure at the resulting composite films were investigated. The electrochemical behavior of the resulting polypyrrole/MWNT composite film was investigated aS well bv cyclic voltammogram. The effect of the additional alternating electric field applied during the constant direct potential electrochemical deposition on the morphology and electrochemical behavior of the resulting composite film was also investigated in this study.

  2. Synthesis and characterization of well-aligned carbon nitrogen nanotubes by microwave plasma chemical vapor deposition

    Institute of Scientific and Technical Information of China (English)

    马旭村; 徐贵昌; 王恩哥

    2000-01-01

    Well-aligned carbon nitrogen nanotube films have been synthesized successfully on meso-porous silica substrates by microwave plasma chemical vapor deposition (MWPCVD) method. Studies on their morphology, structure, and composition by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and energy dispersive X-ray spectroscopy (EDX), respectively, indicate that these nanotubes consist of linearly polymerized carbon nitrogen nanobells, and the nitrogen atoms have been doped into carbon netweork to form a new structure C1-xNx( x = 0.16±0.01). X-ray photoelectron spectroscopy (XPS) results of the samples further demonstrate that carbon bonds cova-lently with nitrogen in all the carbon nitrogen nanotube films.

  3. Sputter deposition of transition-metal carbide films — A critical review from a chemical perspective

    Energy Technology Data Exchange (ETDEWEB)

    Jansson, Ulf, E-mail: ulf.jansson@kemi.uu.se [Department of Chemistry, Ångström, Uppsala Universitet (Sweden); Lewin, Erik [Laboratory for Nanoscale Materials Science, Empa (Switzerland); Department of Chemistry, Ångström, Uppsala Universitet (Sweden)

    2013-06-01

    Thin films based on transition-metal carbides exhibit many interesting physical and chemical properties making them attractive for a variety of applications. The most widely used method to produce metal carbide films with specific properties at reduced deposition temperatures is sputter deposition. A large number of papers in this field have been published during the last decades, showing that large variations in structure and properties can be obtained. This review will summarise the literature on sputter-deposited carbide films based on chemical aspects of the various elements in the films. By considering the chemical affinities (primarily towards carbon) and structural preferences of different elements, it is possible to understand trends in structure of binary transition-metal carbides and the ternary materials based on these carbides. These trends in chemical affinity and structure will also directly affect the growth process during sputter deposition. A fundamental chemical perspective of the transition-metal carbides and their alloying elements is essential to obtain control of the material structure (from the atomic level), and thereby its properties and performance. This review covers a wide range of materials: binary transition-metal carbides and their nanocomposites with amorphous carbon; the effect of alloying carbide-based materials with a third element (mainly elements from groups 3 through 14); as well as the amorphous binary and ternary materials from these elements deposited under specific conditions or at certain compositional ranges. Furthermore, the review will also emphasise important aspects regarding materials characterisation which may affect the interpretation of data such as beam-induced crystallisation and sputter-damage during surface analysis.

  4. Chemical vapor deposition of ruthenium–phosphorus alloy thin films: Using phosphine as the phosphorus source

    Energy Technology Data Exchange (ETDEWEB)

    Bost, Daniel E.; Ekerdt, John G., E-mail: ekerdt@che.utexas.edu

    2014-05-02

    The use of PH{sub 3} as the P source in the growth of amorphous ruthenium–phosphorus (Ru(P)) alloy films by dual-source chemical vapor deposition (CVD) with Ru{sub 3}(CO){sub 12} to produce thin (∼ 3 nm) Cu diffusion barriers is examined. Comparisons are made to films grown using P(CH{sub 3}){sub 3}. Carbon contamination of 10 at.% carbon or less was observed in PH{sub 3}-produced Ru(P) films, compared to greater than 30 atomic % carbon in films using P(CH{sub 3}){sub 3}, and lower resistivity was also observed. PH{sub 3} was found to be much more reactive than previously-used P precursors, requiring the use of very low PH{sub 3} partial pressures (∼ 0.13 mPa) and a sequenced addition process that allowed accumulated P to diffuse into the Ru(P) film during growth. X-ray reflectivity and atomic force microscopy indicate that films of good continuity and smoothness can be grown by CVD in the 3 nm thickness range. X-ray diffraction shows the amorphous phase to be stable for annealing at 400 °C for 3 h. Electric field stress tests to failure for Cu/Ru(P)/SiO{sub 2}/Si stacks indicate that low-carbon Ru(P) barrier films function at least as well as their higher-carbon counterparts as Cu barriers and better than Ta/TaN stacks of similar thickness grown for comparison purposes. - Highlights: • Reports the CVD growth of 3 to 5 nm amorphous Ru(P) thin films PH{sub 3} as the P source • PH{sub 3}-grown Ru(P) films have ∼ 10% C content the same as films with zero % P. • Fast PH{sub 3} decomposition at 250 °C can lead to P accumulation on the growth surface. • Amorphous, continuous 3 nm Ru(P) films realized for P content > 20 atom % • Electrical field stress tests indicate 3 nm Ru(P) function as a Cu diffusion barrier.

  5. Interplay between the deposition mode and microstructure in electrochemically deposited Cu thin films

    Energy Technology Data Exchange (ETDEWEB)

    Kremmer, K. [Institute of Materials Science, TU Bergakademie Freiberg, Gustav-Zeuner-Str. 5, D-09599 Freiberg (Germany); Yezerska, O. [Fraunhofer Institute for Manufacturing Technology and Applied Materials Research, Wiener Str. 12, D-28359 Bremen (Germany); Schreiber, G. [Institute of Materials Science, TU Bergakademie Freiberg, Gustav-Zeuner-Str. 5, D-09599 Freiberg (Germany); Masimov, M. [Institute of Materials Science, TU Bergakademie Freiberg, Gustav-Zeuner-Str. 5, D-09599 Freiberg (Germany); Klemm, V. [Institute of Materials Science, TU Bergakademie Freiberg, Gustav-Zeuner-Str. 5, D-09599 Freiberg (Germany); Schneider, M. [Fraunhofer Institute for Manufacturing Technology and Applied Materials Research, Wiener Str. 12, D-28359 Bremen (Germany); Rafaja, D. [Institute of Materials Science, TU Bergakademie Freiberg, Gustav-Zeuner-Str. 5, D-09599 Freiberg (Germany)]. E-mail: rafaja@ww.tu-freiberg.de

    2007-06-13

    The influence of the electrochemical potential and the deposition mode on the preferred orientation and morphology of crystallites and on the microstrain in electrochemically deposited copper thin films was investigated using a combination of cyclic voltammetry, chronoamperometry, X-ray diffraction, SEM and the diffraction of backscattered electrons. With increasing negative electrochemical potential, the deposition mode changed from the charge transfer controlled one to the diffusion controlled one. At the highest electrochemical potentials, copper deposition was accompanied by hydrogen reduction. In potentiostatically deposited thin films, the preferred orientation of crystallites changed from {l_brace}111{r_brace} in the charge transfer controlled deposition mode to {l_brace}110{r_brace} in the diffusion controlled one. The increase of the electrochemical potential in the charge transport controlled deposition mode caused an increase of the dislocation density. The increasing electrochemical potential in the diffusion controlled mode led to a decrease of the dislocation density. The copper deposition, which was accompanied by the hydrogen reduction, produced needle-like crystallites with the {l_brace}100{r_brace} texture and with the lowest dislocation density.

  6. Electrophoretic deposition of manganese dioxide-multiwalled carbon nanotube composites for electrochemical supercapacitors.

    Science.gov (United States)

    Wang, Yaohui; Zhitomirsky, Igor

    2009-09-01

    The cathodic electrophoretic deposition (EPD) method has been developed for the deposition of composite manganese dioxide-multiwalled carbon nanotube (MWCNT) films. Dopamine (DA) was shown to be an effective charging additive, which provides stabilization of manganese dioxide nanoparticles and MWCNTs in the suspensions. The influence of DA concentration on the deposition efficiency has been studied. EPD has been utilized for the fabrication of porous nanostructured films for application in electrochemical supercapacitors (ES). Obtained films were studied using Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), thermogravimetric analysis (TGA), differential thermal analysis (DTA), cyclic voltammetry (CV), and impedance spectroscopy. CV data for the films tested in the 0.5 M Na(2)SO(4) solutions showed capacitive behavior in the voltage window of 0-0.9 V. The highest specific capacitance (SC) of approximately 650 F g(-1) was obtained at a scan rate of 2 mV s(-1). The SC decreased with an increasing scan rate in the range of 2-100 mV s(-1). The deposition mechanism, kinetics of deposition, and charge storage properties of the films are discussed. PMID:19449813

  7. Reactive sputtering deposition of SiO2 thin films

    Directory of Open Access Journals (Sweden)

    IVAN RADOVIC

    2008-01-01

    Full Text Available SiO2 layers were deposited in a UHV chamber by 1 keV Ar+ ion sputtering from a high purity silicon target, using different values of the oxygen partial pressure (5×10-6–2×10-4 mbar and of the ion beam current on the target (1.67–6.85 mA. The argon partial pressure during operation of the ion gun was 1×10-3 mbar. The substrate temperature was held at 550 °C and the films were deposited to a thickness of 12.5–150 nm, at a rate from 0.0018–0.035 nm s-1. Structural characterization of the deposited thin films was performed by Rutherford backscattering spectrometry (RBS analysis. Reactive sputtering was proved to be efficient for the deposition of silica at 550 °C, an oxygen partial pressure of 2×10-4 mbar (ion beam current on the target of 5 mA or, at a lower deposition rate, ion beam current of 1.67 mA and an oxygen partial pressure of 6×10-5 mbar. One aspect of these investigations was to study the consumption of oxygen from the gas cylinder, which was found to be lower for higher deposition rates.

  8. Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel

    Science.gov (United States)

    Hirata, Yuki; Choi, Junho

    2016-08-01

    Hydrogenated amorphous carbon (a-C:H) films were prepared on inner surface of 100-μm-width microchannel by using a bipolar-type plasma based ion implantation and deposition. The microchannel was fabricated using a silicon plate, and two kinds of microchannels were prepared, namely, with a bottom layer (open at one end) and without a bottom layer (open at both ends). The distribution of thickness and hardness of films was evaluated by SEM and nanoindentation measurements, respectively, and the microstructures of films were evaluated by Raman spectroscopy. Furthermore, the behavior of ions and radicals was analyzed simultaneously by combining the calculation methods of Particle-In-Cell/Monte Carlo Collision and Direct Simulation Monte Carlo to investigate the coating mechanism for the microchannel. It was found that the film thickness decreased as the depth of the coating position increased in the microchannels where it is open at one end. The uniformity of the film thickness improved by increasing the negative pulse voltage because ions can arrive at the deeper part of the microchannel. In addition, the hardness increased as the depth of the coating position increased. This is because the radicals do not arrive at the deeper part of the microchannel, and the incident proportion of ions relative to that of radicals increases, resulting in a high hardness due to the amorphization of the film. The opening area of the microchannel where the aspect ratio is very small, radicals dominate the incident flux, whereas ions prevail over radicals above an aspect ratio of about 7.5. On the other hand, in the microchannels that are open at both ends, there were great improvements in uniformity of the film thickness, hardness, and the film structure. The a-C:H films were successfully deposited on the entire inner surface of a microchannel with an aspect ratio of 20.

  9. Low temperature synthesis of silicon nitride thin films deposited by VHF/RF PECVD for gas barrier application

    Science.gov (United States)

    Lee, Jun S.; Shin, Kyung S.; Sahu, B. B.; Han, Jeon G.

    2015-09-01

    In this work, silicon nitride (SiNx) thin films were deposited on polyethylene terephthalate (PET) substrates as barrier layers by plasma enhanced chemical vapor deposition (PECVD) system. Utilizing a combination of very high-frequency (VHF 40.68 MHz) and radio-frequency (RF 13.56 MHz) plasmas it was possible to adopt PECVD deposition at low-temperature using the precursors: Hexamethyldisilazane (HMDSN) and nitrogen. To investigate relationship between film properties and plasma properties, plasma diagnostic using optical emission spectroscopy (OES) was performed along with the film analysis using Fourier transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS). OES measurements show that there is dominance of the excited N2 and N2+ emissions with increase in N2 dilution, which has a significant impact on the film properties. It was seen that all the deposited films contains mainly silicon nitride with a small content of carbon and no signature of oxygen. Interestingly, upon air exposure, films have shown the formation of Si-O bonds in addition to the Si-N bonds. Measurements and analysis reveals that SiNx films deposited with high content of nitrogen with HMDSN plasma can have lower gas barrier properties as low as 7 . 3 ×10-3 g/m2/day. Also at Chiang Mai University.

  10. Electrolytically deposited Cadmium Selenide Films for Photovoltaic Applications

    Directory of Open Access Journals (Sweden)

    Palaiologopoulou M. D.

    2012-10-01

    Full Text Available CdSe films were electrodeposited on pure nickel substrates. The nickel substrate was polished to a mirror finish by Al2O3 paste, etched in 10% HCl solution for 40 s and rinsed thoroughly by de-ionized water. The deposition bath contained solutions with excessive Cd2+ (0.2M from CdSO4 and small amounts of SeO2 (1x10-3 M. The pH of the bath was adjusted to a value of 2.2 at RT by adding 10% H2SO4. The bath was first thermostated at the required temperature, which varied from 55°C to 65°C. Plating was accomplished at deposition potential 1000 mV (vs. Hg/Hg2SO4. The films formed had a uniform thickness and it was found to be approximately 2.0 μm thick (for 20 min electrodeposition process. The produced CdSe films were characterized by X-Ray diffraction and SEM. The induced semiconductor doping effect by thermal annealing in pure dry nitrogen gas was also investigated. Gold contacts were placed on top of the CdSe films, either by evaporation, or mechanically. Depending on the deposition parameters the electrical characteristics of the Ni/CdSe/Au structures may exhibit rectification properties. The optical excitation of the structure was investigated for various CdSe thicknesses.

  11. Production of selective membranes using plasma deposited nanochanneled thin films

    Directory of Open Access Journals (Sweden)

    Rodrigo Amorim Motta Carvalho

    2006-12-01

    Full Text Available The hydrolization of thin films obtained by tetraethoxysilane plasma polymerization results in the formation of a nanochanneled silicone like structure that could be useful for the production of selective membranes. Therefore, the aim of this work is to test the permeation properties of hydrolyzed thin films. The films were tested for: 1 permeation of polar organic compounds and/or water in gaseous phase and 2 permeation of salt in liquid phase. The efficiency of permeation was tested using a quartz crystal microbalance (QCM technique in gas phase and conductimetric analysis (CA in liquid phase. The substrates used were: silicon for characterization of the deposited films, piezoelectric quartz crystals for tests of selective membranes and cellophane paper for tests of permeation. QCM analysis showed that the nanochannels allow the adsorption and/or permeation of polar organic compounds, such as acetone and 2-propanol, and water. CA showed that the films allow salt permeation after an inhibition time needed for hydrolysis of the organic radicals within the film. Due to their characteristics, the films can be used for grains protection against microorganism proliferation during storage without preventing germination.

  12. Sol-gel deposited nickel oxide films for electrochromic applications

    Energy Technology Data Exchange (ETDEWEB)

    Ozkan Zayim, E.; Turhan, I.; Tepehan, F.Z. [Istanbul Technical University, Faculty of Science and Literature, Maslak 34469, Istanbul (Turkey); Ozer, N. [San Francisco State University, School of Engineering, San Francisco, CA 94132 (United States)

    2008-02-15

    The electrochromic (EC) behavior, the microstructure, and the morphology of sol-gel deposited nickel oxide (NiO{sub x}) coatings were investigated. The films were produced by spin and dip-coating techniques on indium tin oxide (ITO)/glass and Corning glass (2947) substrates. The coating solutions were prepared by reacting nickel(II) 2-ethylhexanoate as the precursor, and isopropanol as the solvent. NiO{sub x} was heat treated at 350 C for 1 h. The surface morphology, crystal structure, and EC characteristics of the coatings were investigated by scanning electron microscopy (SEM), electron dispersive spectroscopy (EDS), atomic force spectroscopy (AFM), X-ray diffractometry (XRD), and cyclic voltammetry (CV). SEM and AFM images revealed that the surface morphology and surface characteristics of the spin- and dip-coated films on both types of substrate were different. XRD spectra revealed that both films were amorphous, either on ITO or Corning glass substrates. CV showed a reversible electrochemical insertion or extraction of the K{sup +} ions, cycled in 1 M KOH electrolyte, in both type of film. The crystal structure of the cycled films was found to be XRD amorphous. Spectroelectrochemistry demonstrated that dip-coated films were more stable up to 1000 coloration-bleaching cycles, whereas spin-coated films gradually degraded after 500 cycles. (author)

  13. Modeling and simulation of NiO dissolution and Ni deposition in molten carbonate fuel cells

    Energy Technology Data Exchange (ETDEWEB)

    Nam, Suk Woo; Choi, Hyung-Joon; Lim, Tae Hoon [Korea Institute of Science & Technology, Seoul (Korea, Republic of)] [and others

    1996-12-31

    Dissolution of NiO cathode into the electrolyte matrix is an important phenomena limiting the lifetime of molten carbonate fuel cell (MCFC). The dissolved nickel diffuses into the matrix and is reduced by dissolved hydrogen leading to the formation of metallic nickel films in the pores of the matrix. The growth of Ni films in the electrolyte matrix during the continuous cell operation results eventually in shorting between cathode and anode. Various mathematical and empirical models have been developed to describe the NiO dissolution and Ni deposition processes, and these models have some success in estimating the lifetime of MCFC by correlating the amount of Ni deposited in the matrix with shorting time. Since the exact mechanism of Ni deposition was not well understood, deposition reaction was assumed to be very fast in most of the models and the Ni deposition region was limited around a point in the matrix. In fact, formation of Ni films takes place in a rather broad region in the matrix, the location and thickness of the film depending on operating conditions as well as matrix properties. In this study, we assumed simple reaction kinetics for Ni deposition and developed a mathematical model to get the distribution of nickel in the matrix.

  14. Stress in sputter-deposited Cr films: Influence of Ar pressure

    NARCIS (Netherlands)

    Grachev, S.Y.; Tichelaar, F.D.; Janssen, G.C.A.M.

    2005-01-01

    We studied the tensile stress and grain-width evolution in sputter-deposited Cr films with thickness from 20 nm to 2.7 μm. Films were deposited in an industrial Hauzer 750 physical vapor deposition machine at 50–80 °C. The films exhibited a columnar microstructure. A power law behavior of the tensil

  15. Influence of humidity on the growth characteristics and properties of chemical bath-deposited ZnS thin films

    Energy Technology Data Exchange (ETDEWEB)

    Lin, Yi-Cheng; Chao, Yen-Tai [Department of Mechatronics Engineering, National Changhua University of Education, Changhua 50007, Taiwan (China); Yao, Pin-Chuan, E-mail: pcyao@mail.dyu.edu.tw [Department of Materials Science and Engineering, Da-Yeh University, Dacun, Changhua 51591, Taiwan (China)

    2014-07-01

    In this study, the effect of humidity on the growth characteristics and properties of chemical bath-deposited ZnS thin films was systematically investigated. All deposition was conducted by an open CBD system under various relative humidity levels (RH) or by a hermetic CBD system as a comparison. It shows, for films deposited by an open system, the ambient humidity plays an important role in the quality of the resultant films. Damp environments lead to powdery films. Generally, all films prepared in this study using NH{sub 3} and hydrazine hydrate as the complexing agents were amorphous or poorly crystalline. For an open system, the [H{sup +}] from the dissolved carbon dioxide in the air competes with the ammonium ions in the bath solution. According to Le Châtelier's principle, more ammonia was consumed, which favors the free [Zn{sup +2}] in the solution, facilitating the homogeneous precipitation of Zn(OH){sub 2} and giving rise to a powdery film. The x-ray photoelectron spectrum shows, for an open system, the content of Zn–O compounds in the form of Zn(OH){sub 2} and ZnO, etc., is increased by the relative humidity of the environment. The visible transmittance is reduced by RH. The higher optical band gap of the as-deposited films could be attributed to the quantum confinement effects due to the small grain size of the polycrystalline ZnS films over the substrates.

  16. Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes.

    Science.gov (United States)

    Murakami, Yasuo; Horiguchi, Seishi; Hamaguchi, Satoshi

    2010-04-01

    The formation process of sp3 hybridized carbon networks (i.e., diamondlike structures) in hydrogenated diamondlike carbon (DLC) films has been studied with the use of molecular-dynamics simulations. The processes simulated in this study are injections of hydrocarbon (CH3 and CH) beams into amorphous carbon (a-C) substrates. It has been shown that diamondlike sp3 structures are formed predominantly at a subsurface level when the beam energy is relatively high, as in the "subplantation" process for hydrogen-free DLC deposition. However, for hydrogenated DLC deposition, the presence of abundant hydrogen at subsurface levels, together with thermal spikes caused by energetic ion injections, substantially enhances the formation of carbon-to-carbon sp3 bonds. Therefore, the sp3 bond formation process for hydrogenated DLC films essentially differs from that for hydrogen-free DLC films.

  17. Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition

    Science.gov (United States)

    Liza, Shahira; Ohtake, Naoto; Akasaka, Hiroki; Munoz-Guijosa, Juan M.

    2015-06-01

    In this work, the thermal stability and the oxidation and tribological behavior of nanoporous a-BC:H films are studied and compared with those in conventional diamond-like carbon (DLC) films. a-BC:H films were deposited by pulsed plasma chemical vapor deposition using B(CH3)3 gas as the boron source. A DLC interlayer was used to prevent the a-BC:H film delamination produced by oxidation. Thermal stability of a-BC:H films, with no delamination signs after annealing at 500 °C for 1 h, is better than that of the DLC films, which completely disappeared under the same conditions. Tribological test results indicate that the a-BC:H films, even with lower nanoindentation hardness than the DLC films, show an excellent boundary oil lubricated behavior, with lower friction coefficient and reduce the wear rate of counter materials than those on the DLC film. The good materials properties such as low modulus of elasticity and the formation of micropores from the original nanopores during boundary regimes explain this better performance. Results show that porous a-BC:H films may be an alternative for segmented DLC films in applications where severe tribological conditions and complex shapes exist, so surface patterning is unfeasible.

  18. Wettability and biocompatibility of nitrogen-doped hydrogenated amorphous carbon films: Effect of nitrogen

    International Nuclear Information System (INIS)

    Amorphous carbon films have been applied in biomedical fields as potential biocompatible materials with wettability that can be adjusted by doping with other elements, including F, Si, Ti, O and N. In this study, nitrogen-doped hydrogenated amorphous carbon (a-C:H:N) films were deposited by PIII-D using C2H2 + N2 gas mixtures. The biocompatibility and anti-thrombotic properties of the films were assessed in vitro. The surface morphology and surface wettability of the films were characterized using atomic force microscopy (AFM) and a contact angle method. The results show no cytotoxicity for all films, and films with appropriate nitrogen doping possess much better endothelial cell growth and anti-thrombotic properties

  19. Electrochemical investigations on spray deposited tin oxide thin films

    Energy Technology Data Exchange (ETDEWEB)

    Patil, P.S.; Chigare, P.S.; Sadale, S.B.; Mujawar, S.H.; Shinde, P.S. [Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur 416 004, Maharashtra (India)

    2007-06-15

    Tin oxide (SnO{sub 2}) thin films were prepared by a simple and inexpensive spray pyrolysis technique from an aqueous solution at various substrate temperatures viz. 300, 400 and 500 C, and their electrochemical studies have been carried out. The thin films have been optically and electrochemically characterized by means of transmittance, cyclic voltammetry and chronoamperometry. The mechanism of reduction and oxidation reactions that took place during the potential cycling is presented. The samples deposited at 500 C exhibit better performance in terms of coloration efficiency, reversibility, contrast ratio and response time. (author)

  20. Direct Deposition of Metal Film Patterns Using Nitrogen Laser

    OpenAIRE

    Reznikova, E.; Chesnokov, V.; Zharkova, G.; Igumenov, I.

    1995-01-01

    Rhenium, gold and platinum film micropatterns were obtained by the LCVD method on the surface of silicon and glass substrates from vapors of Re2(CO)10, (CH3)2Au(dpm), Pt(hfa)2, respectively. The heated reaction chamber at atmospheric pressure with a flow of an inert gas-carrier was used. The high marginal sharpness and the thickness uniformity of deposited films was provided by the use of a powerful nanosecond pulse nitrogen laser (λ = 337 nm), a projective system for delineation of the irrad...

  1. Ultraviolet optical properties of aluminum fluoride thin films deposited by atomic layer deposition

    Energy Technology Data Exchange (ETDEWEB)

    Hennessy, John, E-mail: john.j.hennessy@jpl.nasa.gov; Jewell, April D.; Balasubramanian, Kunjithapatham; Nikzad, Shouleh [Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive, Pasadena, California 91109 (United States)

    2016-01-15

    Aluminum fluoride (AlF{sub 3}) is a low refractive index material with promising optical applications for ultraviolet (UV) wavelengths. An atomic layer deposition process using trimethylaluminum and anhydrous hydrogen fluoride has been developed for the deposition of AlF{sub 3} at substrate temperatures between 100 and 200 °C. This low temperature process has resulted in thin films with UV-optical properties that have been characterized by ellipsometric and reflection/transmission measurements at wavelengths down to 200 nm. The optical loss for 93 nm thick films deposited at 100 °C was measured to be less than 0.2% from visible wavelengths down to 200 nm, and additional microstructural characterization demonstrates that the films are amorphous with moderate tensile stress of 42–105 MPa as deposited on silicon substrates. X-ray photoelectron spectroscopy analysis shows no signature of residual aluminum oxide components making these films good candidates for a variety of applications at even shorter UV wavelengths.

  2. Photoelectrical properties of ZnS thin films deposited from aqueous solution using pulsed electrochemical deposition

    Energy Technology Data Exchange (ETDEWEB)

    Fathy, Naglaa; Ichimura, Masaya [Nagoya Inst. of Technology, Aichi (Japan). Dept. of Engineering, Physics, Electronics and Mechanics

    2005-05-01

    ZnS is an n-type semiconductor with a wide direct band gap (3.7 eV at room temperature), and it is very suitable as a window layer in heterojunction photovoltaic solar cells. We deposited ZnS thin films on Sn-doped In{sub 2}O{sub 3}-coated glass substrate using pulsed electrochemical deposition (ECD) from aqueous solutions containing Na{sub 2}S{sub 2}O{sub 3} and ZnSO{sub 4} with two different compositions, the first group grown from ZnSO{sub 4}-rich solution, and the second grown from Na{sub 2}S{sub 2}O{sub 3}-rich solution. We investigated electrical properties of the ZnS thin films and properties of contacts with different metals evaporated on the surfaces. We found that Au and In contacts have Ohmic-like characteristics to ZnS. Furthermore, we observed photoconductivity of the ZnS thin films by means of photoelectrochemical (PEC) measurements. We found that for both the groups of ZnS thin films, the as-deposited film shows weak photosensitivity and after annealing at 300 {sup o}C the photosensitivity improved. (Author)

  3. Low temperature, fast deposition of metallic titanium nitride films using plasma activated reactive evaporation

    International Nuclear Information System (INIS)

    Titanium and titanium nitride thin films were deposited on silica glass and W substrates at a high coating growth rate by plasma-activated reactive evaporation (ARE). The crystal structure, preferred orientation and grain size of the coatings were determined by x-ray diffraction (XRD) technique using Cu-Kα x rays. The analysis of the coating morphology was performed by field-emission scanning electron microscopy (FE-SEM). The composition of the films was analyzed by Auger electron spectroscopy (AES) and electron-probe microanalysis (EPMA). The titanium and titanium nitride condensates were collected on a carbon-coated collodion film then characterized by transmission electron microscopy (TEM) in order to study the structures of the deposits at very short deposition times. The resistivity of the films was measured by using the four-point-probe method. The titanium coatings were found to consist of very fine particles (40 nm in grain size) and to exhibit a strong (002) texture. The titanium nitride coatings were substoichiometric (TiNx,xx coatings obtained at low temperature and a high growth rate in this work exhibited a rather high electrical conductivity

  4. Optical properties and electrochromic characterization of sol-gel deposited ceria films

    Energy Technology Data Exchange (ETDEWEB)

    Oezer, N. [Department of Materials Science and Mineral Engineering, University of California, 94720-1760 Berkeley, CA (United States)

    2001-06-01

    Ceria (CeO{sub 2}) films were deposited by the sol-gel spin coating process and optical and electrochromic properties have been investigated. Ceria coating solutions were prepared using cerium ammonium nitrate and ethanol. The films were characterized by X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), UV-visible (UV-Vis) spectroscopy and cyclic voltammetry. XRD analysis of the films showed that they had a cerianite structure for heat treatment temperatures at or above 450C. XPS examinations show that the film stoichiometry was CeO{sub 2}. The SEM examinations showed that the surface texture was very uniform and homogeneous. Optical constants of the films were calculated from transmittance (T) spectra using optical spectrometer in the wavelength range of 300-900nm. The refractive index (n), and extinction coefficient (k) values were n=1.82{+-}0.01 and k=0.02{+-}0.002 at 550nm, respectively. The optical bandgap (E{sub g}) of crystalline cerium oxide film was 3.1{+-}0.003eV. The electrochemical behavior investigated in 0.5M LiClO{sub 4} propylene carbonate (PC) electrolyte. Cyclic voltammetry showed a reversible electrochemical insertion or extraction of the Li{sup +} ions maintaining a high optical transmissivity. Spectroelectrochemistry showed that these films could be used as optically passive counter-electrode in transmissive electrochromic devices.

  5. Thin films of barium fluoride scintillator deposited by chemical vapor deposition

    International Nuclear Information System (INIS)

    We have used metal-organic chemical vapor deposition (MOCVD) technology to coat optical substrates with thin (≅ 1-10 μm thick) films of inorganic BaF2 scintillator. Scanning electron microscope (SEM) photographs indicate that high-quality epitaxial crystalline film growth was achieved, with surface defects typically smaller than optical wavelengths. The scintillation light created by the deposition of ionizing radiation in the scintillating films was measured with a photomultiplier and shown to be similar to bulk melt-grown crystals. The results demonstrate the potential of these composite optical materials for planar and fiber scintillation radiation detectors in high energy and nuclear physics, synchrotron radiation research, and in radiation and X-ray imaging and monitoring. (orig.)

  6. Structural and Optical Properties of Chemical Bath Deposited Silver Oxide Thin Films: Role of Deposition Time

    Directory of Open Access Journals (Sweden)

    A. C. Nwanya

    2013-01-01

    Full Text Available Silver oxide thin films were deposited on glass substrates at a temperature of 50°C by chemical bath deposition technique under different deposition times using pure AgNO3 precursor and triethanolamine as the complexing agent. The chemical analysis based on EDX technique shows the presence of Ag and O at the appropriate energy levels. The morphological features obtained from SEM showed that the AgxO structures varied as the deposition time changes. The X-ray diffraction showed the peaks of Ag2O and AgO in the structure. The direct band gap and the refractive index increased as the deposition time increased and was in the range of 1.64–1.95 eV and 1.02–2.07, respectively. The values of the band gap and refractive index obtained indicate possible applications in photovoltaic and photothermal systems.

  7. Thin film deposition of arsenic free pnictide superconductors

    Energy Technology Data Exchange (ETDEWEB)

    Buckow, Alexander U.

    2015-05-13

    The aim of this work is the thin film deposition of arsenic free pnictide superconductor by reactive molecular beam epitaxy (r-MBE). Starting from the so-called '1111'-phase, it is attempted to deposit LaNiBiO{sub 1-x} on MgO substrates. The deposited polycrystalline films are characterized by X-ray diffraction and four-point resistivity measurement, phase pure, single crystal layers are, however, not realized due to the required oxidation conditions. Therefore, the focus is placed on oxygen-free layers and it is a so-called '122'-phase, La{sub 1-x}Ni{sub 2}Bi{sub 2} deposited. During the process parameters optimization of this phase, the so-called '112'-phase, LaNi{sub 1} XBi{sub 2}, is discovered. The procedure of the process parameters optimization for the deposition of the new phase is described in detail. The single-crystal, epitaxial layers are analyzed using X-ray diffractometer, four-point resistivity measurement and SQUID magnetometer. The layers are superconducting below 4 K. The influence of the Ni and the Bi content is examined. In addition the La is substituted by Ce, which results in an increase of superconducting transition temperature. Here, too, the influence of the Ni and Bi content is examined.

  8. The effect of RF power on tribological properties of the diamond-like carbon films

    International Nuclear Information System (INIS)

    DLC thin films were prepared by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method on silicon substrates using methane (CH4), hydrogen (H2) and gas mixture. We have checked the influence of varying RF power on DLC film. The Raman spectroscopy shows the diamond-like carbon (DLC) amorphous structure of the films. AFM images show the surface roughness of the DLC film decrease with increasing RF power. Also, the friction coefficients were investigated by atomic force microscope (AFM) in friction force microscope (FFM) mode

  9. Wetting behaviour of carbon nitride nanostructures grown by plasma enhanced chemical vapour deposition technique

    International Nuclear Information System (INIS)

    Highlights: • Carbon nitride films were prepared by using radio frequency plasma enhanced chemical vapour deposition system by altering the electrode distance. • The effect of electrode distance on surface morphology, surface roughness, chemical bonding and hydrophobic behaviour has been studied. • Hydrophobic behaviour were studied by measuring contact angle and calculating surface energy. • CNx nanostructures show super-hydrophobic behaviour. • We report a tunable transition of hydrophilic to super-hydrophobic behaviour of film as electrode distance is reduced. - Abstract: Tuning the wettability of various coating materials by simply controlling the deposition parameters is essential for various specific applications. In this work, carbon nitride (CNx) films were deposited on silicon (1 1 1) substrates using radio-frequency plasma enhanced chemical vapour deposition employing parallel plate electrode configuration. Effects of varying the electrode distance (DE) on the films’ structure and bonding properties were investigated using Field emission scanning electron microscopy, Atomic force microscopy, Fourier transform infrared and X-ray photoemission spectroscopy. The wettability of the films was analyzed using water contact angle measurements. At high DE, the CNx films’ surface was smooth and uniform. This changed into fibrous nanostructures when DE was decreased. Surface roughness of the films increased with this morphological transformation. Nitrogen incorporation increased with decrease in DE which manifested the increase in both relative intensities of C=N to C=C and N−H to O−H bonds. sp2-C to sp3-C ratio increased as DE decreased due to greater deformation of sp2 bonded carbon at lower DE. The films’ characteristics changed from hydrophilic to super-hydrophobic with the decrease in DE. Roughness ratio, surface porosity and surface energy calculated from contact angle measurements were strongly dependent on the morphology, surface

  10. Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition

    International Nuclear Information System (INIS)

    Ruthenium thin films were deposited on argon plasma-treated SiO2 and untreated SiO2 substrates by remote plasma atomic layer deposition using bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)2] as a Ru precursor and ammonia plasma as a reactant. The results of in situ Auger electron spectroscopy (AES) analysis indicate that the initial transient region of Ru deposition was decreased by Ar plasma treatment at 400 deg. C, but did not change significantly at 300 deg. C The deposition rate exhibited linearity after continuous film formation and the deposition rates were about 1.7 A/cycle and 0.4 A/cycle at 400 deg. C and 300 deg. C, respectively. Changes of surface energy and polar and dispersive components were measured by the sessile drop test. The quantity of surface amine groups was measured from the surface nitrogen concentration with AES. Furthermore, the Ar plasma-treated SiO2 contained more amine groups and less hydroxyl groups on the surface than on untreated SiO2. Auger spectra exhibited chemical shifts by Ru-O bonding, and larger shifts were observed on untreated substrates due to the strong adhesion of Ru films.

  11. Rapid Deposition of Titanium Oxide and Zinc Oxide Films by Solution Precursor Plasma Spray

    Science.gov (United States)

    Ando, Yasutaka

    In order to develop a high rate atmospheric film deposition process for functional films, as a basic study, deposition of titanium oxide film and zinc oxide film by solution precursor plasma spray (SPPS) was conducted in open air. Consequently, in the case of titanium oxide film deposition, anantase film and amorphous film as well as rutile film could be deposited by varying the deposition distance. In the case of anatase dominant film, photo-catalytic properties of the films could be confirmed by wettability test. In addition, the dye sensitized sollar cell (DSC) using the TiO2 film deposited by this SPPS technique as photo voltaic device generates 49mV in OCV. On the other hand, in the case of zinc oxide film deposition, it was proved that well crystallized ZnO films with photo catalytic properties could be deposited. From these results, this process was found to have high potential for high rate functional film deposition process conducted in the air.

  12. Growth Model for Pulsed-Laser Deposited Perovskite Oxide Films

    Institute of Scientific and Technical Information of China (English)

    WANG Xu; FEI Yi-Yan; ZHU Xiang-Dong; Lu Hui-Bin; YANG Guo-Zhen

    2008-01-01

    We present a multi-level growth model that yields some of the key features of perovskite oxide film growth as observed in the reflection high energy electron diffraction(RHEED)and ellipsometry studies.The model describes the effect of deposition,temperature,intra-layer transport,interlayer transport and Ostwald ripening on the morphology of a growth surface in terms of the distribution of terraces and step edges during and after deposition.The numerical results of the model coincide well with the experimental observation.

  13. Carbon nanotube thin film transistors based on aerosol methods

    International Nuclear Information System (INIS)

    We demonstrate a fabrication method for high-performance field-effect transistors (FETs) based on dry-processed random single-walled carbon nanotube networks (CNTNs) deposited at room temperature. This method is an advantageous alternative to solution-processed and direct CVD grown CNTN FETs, which allows using various substrate materials, including heat-intolerant plastic substrates, and enables an efficient, density-controlled, scalable deposition of as-produced single-walled CNTNs on the substrate directly from the aerosol (floating catalyst) synthesis reactor. Two types of thin film transistor (TFT) structures were fabricated to evaluate the FET performance of dry-processed CNTNs: bottom-gate transistors on Si/SiO2 substrates and top-gate transistors on polymer substrates. Devices exhibited on/off ratios up to 105 and field-effect mobilities up to 4 cm2 V-1 s-1. The suppression of hysteresis in the bottom-gate device transfer characteristics by means of thermal treatment in vacuum and passivation by an atomic layer deposited Al2O3 film was investigated. A 32 nm thick Al2O3 layer was found to be able to eliminate the hysteresis.

  14. Characterization of superconducting magnesium-diboride films on glassy carbon and sapphire substrates

    Energy Technology Data Exchange (ETDEWEB)

    Andrade, E.; Zavala, E. P. [Instituto de Fisica, UNAM, Apartado Postal 20-364, 01000 Mexico D. F. (Mexico); Rocha, M. F. [Escuela Superior de Ingenieria Mecanica y Electrica, IPN, Mexico D. F. (Mexico); Jergel, M.; Falcony, C. [Departamento de Fisica, CINVESTAV-IPN, Apartado postal 14-740, 07000 Mexico D. F. (Mexico)

    2008-02-15

    IBA methods were applied to measure elemental depth profiles of precursors and superconducting MgB{sub 2} thin films deposited on glassy carbon (Good Fellows) and sapphire (Al{sub 2}O{sub 3}) substrates. For each type of substrates we obtained a pair of samples i.e. one amorphous precursor and one superconducting film which were then characterized. A 3{sup H}e{sup +} beam was used to bombard both, precursors and superconducting films in order to obtain the samples elemental composition profiles. The zero resistance T{sub co} and the middle of transition T{sub cm} values were 26.0 K and 29.7 K for the MgB{sub 2} film deposited on glassy carbon substrate. In the case of sapphire substrate the T{sub co} and T{sub cm} values were 25.0 K and 27.9 K, respectively. (Author)

  15. Texture development of CeO2 thin films deposited by ion beam assisted deposition

    International Nuclear Information System (INIS)

    CeO2 thin films were prepared on amorphous quartz glass substrates by the ion beam assisted deposition (IBAD) technique at room temperature. In order to control both the in-plane and out-of-plane texture of the films, a special geometrical arrangement of the ion sources, the target, and the substrate was used. A new concept, considering the role of reflected particles from the target, which we call self-IBAD, was introduced. The structural properties of the CeO2 films were investigated by x-ray diffraction. Good biaxially textured films were obtained with out-of-plane mosaic spreads of 3.0 deg. and in-plane alignment of 10.8 deg. C

  16. Electrochemical deposition of conductive and adhesive polypyrrole-dopamine films

    Science.gov (United States)

    Kim, Semin; Jang, Lindy K.; Park, Hyun S.; Lee, Jae Young

    2016-07-01

    Electrode surfaces have been widely modified with electrically conductive polymers, including polypyrrole (PPY), to improve the performance of electrodes. To utilize conductive polymers for electrode modification, strong adhesion between the polymer films and electrode substrates should be ensured with high electrical/electrochemical activities. In this study, PPY films were electrochemically polymerized on electrodes (e.g., indium tin oxide (ITO)) with dopamine as a bio-inspired adhesive molecule. Efficient and fast PPY electrodeposition with dopamine (PDA/PPY) was found; the resultant PDA/PPY films exhibited greatly increased adhesion strengths of up to 3.7 ± 0.8 MPa and the modified electrodes had electrochemical impedances two to three orders of magnitude lower than that of an unmodified electrode. This electrochemical deposition of adhesive and conductive PDA/PPY offers a facile and versatile electrode modification for various applications, such as biosensors and batteries.

  17. Chemical vapor deposition of amorphous ruthenium-phosphorus alloy films

    Energy Technology Data Exchange (ETDEWEB)

    Shin Jinhong [Texas Materials Institute, University of Texas at Austin, Austin, TX 78750 (United States); Waheed, Abdul [Department of Chemistry and Biochemistry, University of Texas at Austin, Austin, TX 78712 (United States); Winkenwerder, Wyatt A. [Department of Chemical Engineering, University of Texas at Austin, Austin, TX 78712 (United States); Kim, Hyun-Woo [Department of Chemical Engineering, University of Texas at Austin, Austin, TX 78712 (United States); Agapiou, Kyriacos [Department of Chemistry and Biochemistry, University of Texas at Austin, Austin, TX 78712 (United States); Jones, Richard A. [Department of Chemistry and Biochemistry, University of Texas at Austin, Austin, TX 78712 (United States); Hwang, Gyeong S. [Department of Chemical Engineering, University of Texas at Austin, Austin, TX 78712 (United States); Ekerdt, John G. [Department of Chemical Engineering, University of Texas at Austin, Austin, TX 78712 (United States)]. E-mail: ekerdt@che.utexas.edu

    2007-05-07

    Chemical vapor deposition growth of amorphous ruthenium-phosphorus films on SiO{sub 2} containing {approx} 15% phosphorus is reported. cis-Ruthenium(II)dihydridotetrakis-(trimethylphosphine), cis-RuH{sub 2}(PMe{sub 3}){sub 4} (Me = CH{sub 3}) was used at growth temperatures ranging from 525 to 575 K. Both Ru and P are zero-valent. The films are metastable, becoming increasingly more polycrystalline upon annealing to 775 and 975 K. Surface studies illustrate that demethylation is quite efficient near 560 K. Precursor adsorption at 135 K or 210 K and heating reveal the precursor undergoes a complex decomposition process in which the hydride and trimethylphosphine ligands are lost at temperatures as low at 280 K. Phosphorus and its manner of incorporation appear responsible for the amorphous-like character. Molecular dynamics simulations are presented to suggest the local structure in the films and the causes for phosphorus stabilizing the amorphous phase.

  18. Electrochemical deposition of conductive and adhesive polypyrrole-dopamine films.

    Science.gov (United States)

    Kim, Semin; Jang, Lindy K; Park, Hyun S; Lee, Jae Young

    2016-01-01

    Electrode surfaces have been widely modified with electrically conductive polymers, including polypyrrole (PPY), to improve the performance of electrodes. To utilize conductive polymers for electrode modification, strong adhesion between the polymer films and electrode substrates should be ensured with high electrical/electrochemical activities. In this study, PPY films were electrochemically polymerized on electrodes (e.g., indium tin oxide (ITO)) with dopamine as a bio-inspired adhesive molecule. Efficient and fast PPY electrodeposition with dopamine (PDA/PPY) was found; the resultant PDA/PPY films exhibited greatly increased adhesion strengths of up to 3.7 ± 0.8 MPa and the modified electrodes had electrochemical impedances two to three orders of magnitude lower than that of an unmodified electrode. This electrochemical deposition of adhesive and conductive PDA/PPY offers a facile and versatile electrode modification for various applications, such as biosensors and batteries. PMID:27459901

  19. Strontium niobate high-k dielectrics: Film deposition and material properties

    Energy Technology Data Exchange (ETDEWEB)

    Hardy, A., E-mail: an.hardy@uhasselt.be [Hasselt University, Inorganic and Physical Chemistry-IMO, Institute for Materials Research, Agoralaan Building D, Diepenbeek 3590 (Belgium)] [IMEC vzw, Division IMOMEC, Diepenbeek (Belgium); Van Elshocht, S.; Adelmann, C.; Kittl, J.A. [IMEC vzw, Heverlee (Belgium); De Gendt, S.; Heyns, M. [IMEC vzw, Heverlee (Belgium)] [KULeuven, Heverlee (Belgium); D' Haen, J. [IMEC vzw, Division IMOMEC, Diepenbeek (Belgium)] [Hasselt University, Institute for Materials Research, Diepenbeek (Belgium); D' Olieslaeger, M. [IMEC vzw, Division IMOMEC, Diepenbeek (Belgium); Van Bael, M.K.; Van den Rul, H. [Hasselt University, Inorganic and Physical Chemistry-IMO, Institute for Materials Research, Agoralaan Building D, Diepenbeek 3590 (Belgium)] [IMEC vzw, Division IMOMEC, Diepenbeek (Belgium); Mullens, J. [Hasselt University, Inorganic and Physical Chemistry-IMO, Institute for Materials Research, Agoralaan Building D, Diepenbeek 3590 (Belgium)

    2010-01-15

    Strontium niobate ultrathin films were processed by water-based chemical solution deposition, an approach that offers environmental benefits. SrNb{sub 2}O{sub 6} and Sr{sub 2}Nb{sub 2}O{sub 7} show high-k values, which is important for applications such as alternative gate dielectrics. The study of ultrathin films (thickness <30 nm) is crucial, as this is the thickness range for the application envisaged, and as film properties depend strongly on the film thickness. SrNb{sub 2}O{sub 6} had a lower crystallization temperature, less interfacial silicate, lower carbonate content, and higher roughness compared to Sr{sub 2}Nb{sub 2}O{sub 7}. The k values of amorphous films were limited for both compositions (k = 12-14). Crystallization and complete removal of organics or carbonates were accomplished by high-temperature annealing, but increased the roughness and leakage current. For Sr{sub 2}Nb{sub 2}O{sub 7}, interfacial silicates were formed as well. Intermediate calcination steps improved the surface smoothness and increased the k value of SrNb{sub 2}O{sub 6} up to 30.

  20. Epitaxial copper oxide thin films deposited on cubic oxide substrates

    International Nuclear Information System (INIS)

    We study the growth conditions of Cu2O thin films deposited on MgO (0 0 1) and SrTiO3 (0 0 1) substrates by pulsed laser ablation, in order to explore the compatibility between semiconducting p-type Cu2O and other perovskite oxides in view of the fabrication of oxide electronics heterostructures. We find that in both cases perfect epitaxy, high crystalline quality and good out-of-plane orientation are achieved. In this context, epitaxy plays a major role in driving the phase formation. On the other hand, in films deposited at temperatures higher than 700 deg. C transport is inhibited by poor grain connectivity, which is an inevitable consequence of the necessity for the crystal to release the lattice strain. Instead, better connectivity and bulk-like values of resistivity, as well as good crystallinity and orientation, are obtained for films deposited at 650 deg. C. This should be kept in mind for the fabrication of stacked layer oxide heterostructures, where deep grooves between adjacent grains would be a serious drawback both for vertical and planar transport

  1. Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

    Energy Technology Data Exchange (ETDEWEB)

    Olaya, J.J. [Departamento de Ingenieria Mecanica y Mecatronica, Universidad Nacional de Colombia, Ciudad Universitaria, Carrera 30 Numero 45-03, Bogota (Colombia); Huerta, L. [Instituto de Investigaciones en Materiales, Universidad Nacional Autonoma de Mexico, Circuito exterior s/n, CU Coyoacan, Mexico D.F. 04510 (Mexico); Rodil, S.E. [Instituto de Investigaciones en Materiales, Universidad Nacional Autonoma de Mexico, Circuito exterior s/n, CU Coyoacan, Mexico D.F. 04510 (Mexico)], E-mail: ser42@iim.unam.mx; Escamilla, R. [Instituto de Investigaciones en Materiales, Universidad Nacional Autonoma de Mexico, Circuito exterior s/n, CU Coyoacan, Mexico D.F. 04510 (Mexico)

    2008-10-01

    Niobium nitride (NbN) thin films were deposited under different configurations of the magnetic field using a magnetron sputtering system. The magnetic field configuration varied from balanced to unbalanced leading to different growth conditions and film properties. The aim of the paper was to identify correlations between deposition conditions, film properties and the electrical properties, specially the superconductive critical temperature (T{sub C}). The results suggested that there is a critical deposition condition, having an optimum ion-atom arrival ratio that promotes a well ordered and textured nanocrystalline structure (cubic phase) with the minimum residual stress and only under this condition a high critical temperature (16K) was obtained. Lower T{sub C} values around 12K were obtained for the NbN samples having a lower degree of structural perfection and texture, and a larger fraction of intergranular voids. On the other hand, analysis of valence-band spectra showed that the contribution of the Nb 4d states remained essentially constant while the higher T{sub C} was correlated to a higher contribution of the N 2p states.

  2. Selected area chemical vapor deposition of thin films for conductometric microelectronic chemical sensors

    Science.gov (United States)

    Majoo, Sanjeev

    Recent advances in microelectronics and silicon processing have been exploited to fabricate miniaturized chemical sensors. Although the capability of chemical sensing technology has grown steadily, it has been outpaced by the increasing demands for more reliable, inexpensive, and selective sensors. The diversity of applications requires the deployment of different sensing materials that have rich interfacial chemistry. However, several promising sensor materials are often incompatible with silicon micromachining and their deposition requires complicated masking steps. The new approach described here is to first micromachine a generic, instrumented, conductometric, microelectronic sensor platform that is fully functional except for the front-end sensing element. This generic platform contains a thin dielectric membrane, an integrated boron-doped silicon heater, and conductance electrodes. The membrane has low thermal mass and excellent thermal isolation. A proprietary selected-area chemical vapor deposition (SACVD) process in a cold-wall reactor at low pressures was then used to achieve maskless, self-lithographic deposition of thin films. The temperature-programmable integrated microheater initiates localized thermal decomposition/reaction of suitable CVD precursors confined to a small heated area (500 mum in diameter), and this creates the active sensing element. Platinum and titania (TiOsb2) films were deposited from pyrolysis of organometallic precursors, tetrakistrifluorophosphine platinum Pt(PFsb3)sb4 and titanium tetraisopropoxide Ti(OCH(CHsb3)sb2rbrack sb4, respectively. Deposition of gold metal films from chlorotriethylphosphine gold (Csb2Hsb5)sb3PAuCl precursor was also attempted but without success. The conductance electrodes permit in situ monitoring of film growth. The as-deposited films were characterized in situ by conductance measurements and optical microscopy and ex situ by electron microscopy and spectroscopy methods. Devices equipped with

  3. Atomic layer deposition of superparamagnetic and ferrimagnetic magnetite thin films

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, Yijun; Liu, Ming, E-mail: mingliu@mail.xjtu.edu.cn, E-mail: wren@mail.xjtu.edu.cn, E-mail: zye@sfu.ca; Ren, Wei, E-mail: mingliu@mail.xjtu.edu.cn, E-mail: wren@mail.xjtu.edu.cn, E-mail: zye@sfu.ca [Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi' an Jiaotong University, Xi' an 710049 (China); Zhang, Yuepeng; Chen, Xing [Energy Systems Division, Argonne National Laboratory, Lemont, Illinois 60439 (United States); Ye, Zuo-Guang, E-mail: mingliu@mail.xjtu.edu.cn, E-mail: wren@mail.xjtu.edu.cn, E-mail: zye@sfu.ca [Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, Xi' an Jiaotong University, Xi' an 710049 (China); Department of Chemistry and 4D LABS, Simon Fraser University, Burnaby, British Columbia V5A 1S6 (Canada)

    2015-05-07

    One of the key challenges in realizing superparamagnetism in magnetic thin films lies in finding a low-energy growth way to create sufficiently small grains and magnetic domains which allow the magnetization to randomly and rapidly reverse. In this work, well-defined superparamagnetic and ferrimagnetic Fe{sub 3}O{sub 4} thin films are successfully prepared using atomic layer deposition technique by finely controlling the growth condition and post-annealing process. As-grown Fe{sub 3}O{sub 4} thin films exhibit a conformal surface and poly-crystalline nature with an average grain size of 7 nm, resulting in a superparamagnetic behavior with a blocking temperature of 210 K. After post-annealing in H{sub 2}/Ar at 400 °C, the as-grown α−Fe{sub 2}O{sub 3} sample is reduced to Fe{sub 3}O{sub 4} phase, exhibiting a ferrimagnetic ordering and distinct magnetic shape anisotropy. Atomic layer deposition of magnetite thin films with well-controlled morphology and magnetic properties provides great opportunities for integrating with other order parameters to realize magnetic nano-devices with potential applications in spintronics, electronics, and bio-applications.

  4. Structural and electrical properties of electric field assisted spray deposited pea structured ZnO film

    Science.gov (United States)

    Chaturvedi, Neha; Swami, Sanjay Kumar; Dutta, Viresh

    2016-05-01

    Spray deposition of ZnO film was carried out. The uneven growth of ZnO nanostructures is resulted for spray deposited ZnO film. Application of DC voltage (1000V) during spray deposition provides formation of pea like structures with uniform coverage over the substrate. Electric field assisted spray deposition provides increased crystallinity with reduced resistivity and improved mobility of the ZnO film as compared to spray deposited ZnO film without electric field. This with large area deposition makes the process more efficient than other techniques.

  5. Structural, Optical and Electrical Properties of Fluorine Doped Tin Oxide Thin Films Deposited Using Ink jet Printing Technique

    International Nuclear Information System (INIS)

    This paper reports on structural, optical transmittance and electrical properties of fluorine-doped tin oxide (FTO) thin films deposited using an ink jet printer. The FTO ink was synthesized from a mixture of tin chloride pentahydrate (SnCl4.5H2O) and ammonium fluoride (NH4F) solutions. The thin films were deposited on glass substrates at ambient temperature or heated at 40 and 60 degree Celsius. The surface electronic state and the elemental composition of the thin films were analyzed using XPS spectroscopy. The spectra of the FTO thin films revealed that tin, oxygen, fluoride and carbon were present in the samples. The signals corresponding to Sn 3d5/2, O1s, and F1s were found at 486.6 eV, 530.5 eV and 684.5 eV, respectively. XRD analysis showed that the FTO films were in the form of crystalline with cassiterite shape. The optical and electrical properties of the films were affected by the deposition temperatures. It was observed the film deposited at 40 degree Celsius has the optimum optical transmittance and sheet resistivity which were 91 % T and 16 Ω/ □, respectively. (author)

  6. Retention of heavy metals on layered double hydroxides thin films deposited by pulsed laser deposition

    Energy Technology Data Exchange (ETDEWEB)

    Vlad, A., E-mail: angela.vlad@gmail.com [National Institute for Lasers, Plasma and Radiation Physics, 409 Atomistilor Str., 76900 Bucharest-Magurele (Romania); Birjega, R.; Matei, A.; Luculescu, C.; Mitu, B.; Dinescu, M. [National Institute for Lasers, Plasma and Radiation Physics, 409 Atomistilor Str., 76900 Bucharest-Magurele (Romania); Zavoianu, R.; Pavel, O.D. [University of Bucharest, Faculty of Chemistry, Department of Chemical Technology and Catalysis, 4-12 Regina Elisabeta Bd., Bucharest (Romania)

    2014-05-01

    Heavy metals are toxic and hazardous pollutants in the environment due to their nonbiodegradability and persistence, which can pose serious threats to living organisms. The ability of Mg–Al based layered double hydroxides (LDHs) thin films to retain heavy metals from aqueous solutions at different concentrations is a novel topic with prospects of attractive applications, such as detection of heavy metals. We report on the ability of a series of Mg–Al based layered double hydroxides thin films to detect Ni and Co cations in aqueous solutions. Uptake of heavy metals ions such as Ni{sup 2+}, Co{sup 2+} from aqueous solutions was studied as function of contact time at a standard metal ion concentration. The LDHs thin films were deposited using pulsed laser deposition (PLD). The different adsorption mechanisms were studied in connection with different heavy metals used as probe cations. X-ray diffraction, atomic force microscopy, scanning electron microscopy coupled with energy dispersive X-ray spectroscopy, Fourier transform infra-red spectroscopy were the techniques used for the investigation of as deposited and after heavy metals retention thin films.

  7. Transport Properties of LCMO Granular Films Deposited by the Pulsed Electron Deposition Technique

    Institute of Scientific and Technical Information of China (English)

    CHEN Leiming; XU Bin; ZHANG Yan; CHEN Zhenping

    2011-01-01

    By finely controlling the deposition parameters in the pulsed electron deposition process,granular La2/3Ca1/3MnO3 (LCMO) film was grown on silicon substrates.The substrate temperature,ambient pressure in the deposition chamber and acceleration potential for the electron beam were all found to affect the grain size of the film,resulting in different morphologies of the samples.Transport properties of the obtained granular films,especially the magnetoresistance (MR),were studied.Prominent low-field MR was observed in all samples,indicating the forming of grain boundaries in the sample.The low-field MR show great sensitive to the morphology evolution,which reaches the highest value of about 40% for the sample with the grain size of about 250 nm.More interestingly,positive-MR (p-MR) was also detected above 300 K when low magnetic field applying,whereas it disappeared with higher magnetic field applied up to 1.5 and 2 Tesla.Instead of the spinpolarized tunneling process being commonly regarded as a responsible reason,lattice mismatch between LCMO film and silicon substrate appears to be the origin of the p-MR

  8. Effect of deposition temperature and thermal annealing on the dry etch rate of a-C: H films for the dry etch hard process of semiconductor devices

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Seung Moo [Department of Materials Science and Engineering, Korea University, Anam-Dong, Sungbook-Ku, Seoul, 136-701 (Korea, Republic of); TC Technology Team, Samsung Electronics Co. Ltd., Nongseo-Dong, Kiheung-Ku, Yongin-Si, Gyeounggi-Do, 446-711 (Korea, Republic of); Won, Jaihyung [TC Technology Team, Samsung Electronics Co. Ltd., Nongseo-Dong, Kiheung-Ku, Yongin-Si, Gyeounggi-Do, 446-711 (Korea, Republic of); Yim, Soyoung [Department of Materials Science and Engineering, Korea University, Anam-Dong, Sungbook-Ku, Seoul, 136-701 (Korea, Republic of); Park, Se Jun; Choi, Jongsik; Kim, Jeongtae; Lee, Hyeondeok [TC Technology Team, Samsung Electronics Co. Ltd., Nongseo-Dong, Kiheung-Ku, Yongin-Si, Gyeounggi-Do, 446-711 (Korea, Republic of); Byun, Dongjin, E-mail: dbyun@korea.ac.kr [Department of Materials Science and Engineering, Korea University, Anam-Dong, Sungbook-Ku, Seoul, 136-701 (Korea, Republic of)

    2012-06-01

    a-C:H films was not. These results indicated that the dry etch rate of a-C:H films for dry etch hard masks can be further decreased by thermal annealing of the high density, as-deposited a-C:H films. Furthermore, not only the density itself but also the variation of density with thermal annealing need to be elucidated in order to understand the dry etch properties of annealed a-C:H films. - Highlights: Black-Right-Pointing-Pointer A-C:H(amorphous carbon) films are grown for using hard mask in dry etch process by plasma-enhanced chemical vapor deposition and annealed. Black-Right-Pointing-Pointer Physical, chemical and mechanical properties of grown amorphous carbon films are changed by hydrogen and hydrocarbon contents, be determined by deposition and annealing temperature. Black-Right-Pointing-Pointer Dry etch rate of a-C:H films is decreased and the film density increased through thermal annealing with high density, low hydrogen content, as-deposited film.

  9. Continuous Preparation of Copper/Carbon Nanotube Composite Films and Application in Solar Cells.

    Science.gov (United States)

    Luo, Xiao Gang; Le Wu, Min; Wang, Xiao Xia; Zhong, Xin Hua; Zhao, Ke; Wang, Jian Nong

    2016-02-01

    Realizing the continuous and large scale preparation of particle/carbon nanotube (CNT) composites with enhanced functionalities, and broad applications in energy conversion, harvesting, and storage systems, remains as a big challenge. Here, we report a scalable strategy to continuously prepare particle/CNT composite films in which particles are confined by CNT films. This is achieved by the continuous condensation and deposition of a cylindrical assembly of CNTs on a paper strip and the in situ incorporation of particles during the layer-by-layer deposition process. A Cu/CNT composite film is prepared as an example; such a film exhibits very high power conversion efficiency when it is used as a counter electrode in a solar cell, compared with previous materials under otherwise identical conditions. The proposed method can be extended to other CNT-based composite films with excellent functionalities for wide applications. PMID:26784865

  10. P-type thin films transistors with solution-deposited lead sulfide films as semiconductor

    Energy Technology Data Exchange (ETDEWEB)

    Carrillo-Castillo, A.; Salas-Villasenor, A.; Mejia, I. [Department of Materials Science and Engineering, The University of Texas at Dallas. 800 West Campbell Rd, Richardson, TX 75083 (United States); Aguirre-Tostado, S. [Centro de Investigacion en Materiales Avanzados, S. C. Alianza Norte 202, Parque de Investigacion e Innovacion Tecnologica, Apodaca, Nuevo Leon, C.P. 666000 (Mexico); Gnade, B.E. [Department of Materials Science and Engineering, University of Texas at Dallas. 800 West Campbell Rd, Richardson, TX 75083 (United States); Quevedo-Lopez, M.A., E-mail: mxq071000@utdallas.edu [Department of Materials Science and Engineering, University of Texas at Dallas. 800 West Campbell Rd, Richardson, TX 75083 (United States)

    2012-01-31

    In this paper we demonstrate p-type thin film transistors fabricated with lead sulfide (PbS) as semiconductor deposited by chemical bath deposition methods. Crystallinity and morphology of the resulting PbS films were characterized using X-ray diffraction, atomic force microscopy and scanning electron microscopy. Devices were fabricated using photolithographic processes in a bottom gate configuration with Au as source and drain top contacts. Field effect mobility for as-fabricated devices was {approx} 0.09 cm{sup 2} V{sup -1} s{sup -1} whereas the mobility for devices annealed at 150 Degree-Sign C/h in forming gas increased up to {approx} 0.14 cm{sup 2} V{sup -1} s{sup -1}. Besides the thermal annealing, the entire fabrications process was maintained below 100 Degree-Sign C. The electrical performance of the PbS-thin film transistors was studied before and after the 150 Degree-Sign C anneal as well as a function of the PbS active layer thicknesses. - Highlights: Black-Right-Pointing-Pointer Thin film transistors with PbS as semiconductor deposited by chemical bath deposition. Black-Right-Pointing-Pointer Photolithography-based thin film transistors with PbS films at low temperatures. Black-Right-Pointing-Pointer Electron mobility for anneal-PbS devices of {approx} 0.14 cm{sup 2} V{sup -1} s{sup -1}. Black-Right-Pointing-Pointer Highest mobility reported in thin film transistors with PbS as the semiconductor.

  11. Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

    Indian Academy of Sciences (India)

    R M Dey; M Pandey; D Bhattacharyya; D S Patil; S K Kulkarni

    2007-12-01

    Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from –100 V to –300 V. These films were characterized by X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry techniques for estimating 3/2 ratio. The 3/2 ratio obtained by XPS is found to have an opposite trend to that obtained by spectroscopic ellipsometry. These results are explained using sub-plantation picture of DLC growth. Our results clearly indicate that the film is composed of two different layers, having entirely different properties in terms of void percentage and 3/2 ratio. The upper layer is relatively thinner as compared to the bottom layer.

  12. Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films

    International Nuclear Information System (INIS)

    Molybdenum thin films have been deposited on Ti/(100) Si substrates by dc sputtering. For process optimization, a design of experiments method was used with three input factors (target power, substrate temperature, and process gas flow). Deposition rate, resistivity, roughness, diffraction angle, and rocking curve width were analyzed as output responses using statistical analysis method. Subsequently, a process allowing the deposition of highly crystalline, smooth, and low resistivity Mo film was selected and tested against film thickness. The as-optimized sputtered molybdenum thin film was used as seeding electrode for the growth of highly c-axis textured AlN film by dc pulsed reactive sputtering

  13. Carbon nanostructures and networks produced by chemical vapor deposition

    OpenAIRE

    Kowlgi, N.K.K.; Koper, G.J.M.; Raalten, R.A.D.

    2012-01-01

    The invention pertains to a method for manufacturing crystalline carbon nanostructures and/or a network of crystalline carbon nanostructures, comprising: (i) providing a bicontinuous micro-emulsion containing metal nanoparticles having an average particle size between 1and 100nm; (ii) bringing said bicontinuous micro-emulsion into contact with a substrate; and (iii) subjecting said metal nanoparticles and a gaseous carbon source to chemical vapor deposition, thus forming carbon nanostructures...

  14. Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

    Institute of Scientific and Technical Information of China (English)

    Jiaqi ZHU; Jiecai HAN; Songhe MENG; Qiang LI; Manlin TAN

    2003-01-01

    The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s

  15. Fabrication, characterisation, and optical applications of electrochemically deposited nanostructured IrOx films

    OpenAIRE

    Hu, Jin

    2008-01-01

    In this work, nanostructured iridium oxide films were fabricated by electrochemical deposition within a template made with polystyrene spheres on gold substrates. SEM pictures show that the nanostructured IrOx films have a very ordered hexagonal structure. To our knowledge, this is the first report of templated deposition of nanostructured IrOx films and only the 2nd of fabrication of templated deposition of nanostructured electrochromic metal oxides. The deposition solution was carried o...

  16. Substrate and material transfer effects on the surface chemistry and texture of diamond-like carbon deposited by plasma-enhanced chemical vapour deposition

    OpenAIRE

    Jones, Benjamin; Ojeda, J. J.

    2012-01-01

    Diamond-like carbon (DLC), a thin amorphous carbon film, has many uses in tribological systems. Exploiting alternative substrates and interlayers can enable the control of the hardness and modulus of the multilayer system and improve wear or friction properties. We used XPS and atomic force microscopy to examine DLC that had been concurrently coated on an epoxy interlayer and a steel substrate by plasma-enhanced chemical vapour deposition. sp2/sp3 ratios were calculated both by the deconvolut...

  17. Low contact resistance carbon thin film modified current collectors for lithium Ion batteries

    Energy Technology Data Exchange (ETDEWEB)

    Chen, Shi-Kun; Chiu, Kuo-Feng, E-mail: kfchiu@fcu.edu.tw; Su, Shih-Hsuan; Liu, Shih-Hsien; Hou, Kai Hsiang; Leu, Hoang-Jyh; Hsiao, Chung-Chun

    2014-12-01

    Carbon films have been synthesized by chemical vapor deposition (CVD) on AISI 304 stainless steel (304SS) sheets with various C{sub 2}H{sub 2}/H{sub 2} flow ratios at 810 °C. The films exhibit three different morphologies and structures: filament, sphere and transition types at different C{sub 2}H{sub 2}/H{sub 2} flow ratios, as characterized by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. It was found that the degree of graphitization increased with decreasing C{sub 2}H{sub 2}/H{sub 2} flow ratios. The carbon film modified 304SS sheets were used as cathode current collectors and coated with an active layer containing LiMn{sub 2}O{sub 4} active materials, conducting additives and binders for lithium ion batteries. The electrochemical properties of these LiMn{sub 2}O{sub 4} cells with bare and carbon film modified current collectors were investigated. Under high current operation, such as 3000 mA/g, the capacity of the LiMn{sub 2}O{sub 4} cell with transition type carbon film modified current collector is 55% higher than the cell with bare current collector. The enhanced performances of high current density charge–discharge cycles can be attributed to the reduced contact resistance and improved charge transfer efficiency provided by the transition type carbon film modified current collectors. - Highlights: • Carbon films were synthesized by CVD on 304SS sheets. • The carbon film modified 304SS sheets were used as cathode current collectors. • The carbon film modified current collectors improved charge transfer efficiency.

  18. Detection of Carbon Monoxide Using Polymer-Carbon Composite Films

    Science.gov (United States)

    Homer, Margie L.; Ryan, Margaret A.; Lara, Liana M.

    2011-01-01

    A carbon monoxide (CO) sensor was developed that can be incorporated into an existing sensing array architecture. The CO sensor is a low-power chemiresistor that operates at room temperature, and the sensor fabrication techniques are compatible with ceramic substrates. Sensors made from four different polymers were tested: poly (4-vinylpryridine), ethylene-propylene-diene-terpolymer, polyepichlorohydrin, and polyethylene oxide (PEO). The carbon black used for the composite films was Black Pearls 2000, a furnace black made by the Cabot Corporation. Polymers and carbon black were used as received. In fact, only two of these sensors showed a good response to CO. The poly (4-vinylpryridine) sensor is noisy, but it does respond to the CO above 200 ppm. The polyepichlorohydrin sensor is less noisy and shows good response down to 100 ppm.

  19. A statistical mechanics model of carbon nanotube macro-films

    Institute of Scientific and Technical Information of China (English)

    2011-01-01

    Carbon nanotube macro-films are two-dimensional films with micrometer thickness and centimeter by centimeter in-plane dimension.These carbon nanotube macroscopic assemblies have attracted significant attention from the material and mechanics communities recently because they can be easily handled and tailored to meet specific engineering needs.This paper reports the experimental methods on the preparation and characterization of single-walled carbon nanotube macro-films,and a statistical mechanics model on ...

  20. Synthesis of multi-layer graphene films on copper tape by atmospheric pressure chemical vapor deposition method

    International Nuclear Information System (INIS)

    Graphene films were successfully synthesized by atmospheric pressure chemical vapor deposition (APCVD) method. Methane (CH4) gas and copper (Cu) tapes were used as a carbon source and a catalyst, respectively. The CVD temperature and time were in the range of 800–1000 °C and 10 s to 45 min, respectively. The role of the CVD temperature and time on the growth of graphene films was investigated in detail via scanning electron microscopy (SEM) and Raman spectroscopy techniques. The results of SEM images and Raman spectra show that the quality of the graphene films was improved with increasing of CVD temperature due to the increase of catalytic activity. (paper)