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Sample records for cantilever array actuator

  1. Study on electrothermally actuated cantilever array for nanolithography

    Institute of Scientific and Technical Information of China (English)

    2010-01-01

    Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.

  2. Polymeric Cantilever Arrays for Biosensing Applications

    DEFF Research Database (Denmark)

    Calleja, M.; Tamayo, J.; Johansson, Alicia

    2003-01-01

    We report the fabrication of arrays of polymeric cantilevers for biochemistry applications. The cantilevers are fabricated in the polymer SU-8. The use of a polymer as the component material for the cantilevers provides the sensors with very high sensitivity due to convenient mechanical material...... properties. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. The method allows obtaining well-controlled and uniform mechanical properties of the cantilevers. The elastic constant of the cantilevers was measured, and their dynamic response...

  3. Chemical Sensors Based on Piezoresistive Cantilever Array

    Institute of Scientific and Technical Information of China (English)

    于晓梅; 张大成; 王丛舜; 杜先锋; 王小宝; 阮勇

    2003-01-01

    U-shaped and rectangle piezoresistive cantilever arrays have been designed with the analysing results of stress,noise and sensitivity of the cantilevers. Based on silicon micromachining technology, the piezoresistive cantilevers were fabricated by using polysilicon as the piezoresistive materials. With the measurement results of noise and sensitivity, the Hooge factor is calculated to be 3 × 10-3, the gauge factor is 27, and the minimum detectable deflection of piezoresistive cantilevers are calculated to be 1.0nm for rectangle cantilever and 0.5 nm for the Ushaped cantilever at a 6 V bias voltage and a 1000 Hz measurement bandwidth. Using polymer-coated cantilevers as individual sensors, their responses to water vapour and ammonia were tested by measuring their output voltage signals. The measured results show that the sensor sensitivity to ammonia can reach a few ppm and the sensor responses are quick.

  4. Design & fabrication of cantilever array biosensors

    Directory of Open Access Journals (Sweden)

    Anja Boisen

    2009-09-01

    Full Text Available Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes of samples. Currently available fabrication technology will allow the integration of electronic readout and sample introduction into a single unit, decreasing the device size, detection time, and cost. Biosensing technologies based on microfabricated cantilever arrays involving multiple cantilevers, electronic processing, and even local telemetry on a single chip have the potential of satisfying the need for highly sensitive and selective multiple-target detection in very small samples. Here we will review the design and fabrication process of cantilever-based biosensors.

  5. Characterization of magnetically actuated resonant cantilevers in viscous fluids

    Science.gov (United States)

    Vančura, Cyril; Lichtenberg, Jan; Hierlemann, Andreas; Josse, Fabien

    2005-10-01

    The vibration behavior of magnetically actuated resonant microcantilevers immersed in viscous fluids has been studied. A dependence of the resonance frequency and the quality factor (Q factor) on the fluid properties, such as density and viscosity and on the cantilever geometry is described. Various cantilever geometries are analyzed in pure water and glycerol solutions, and the results are explained in terms of the added displaced fluid mass and the fluid damping force for both the resonance frequency and the quality factor. An in-depth knowledge and understanding of such systems is necessary when analyzing resonant cantilevers as biochemical sensors in liquid environments.

  6. Non-Linear Piezoelectric Actuator with a Preloaded Cantilever Beam

    OpenAIRE

    Yue Wu; Jingshi Dong; Xinbo Li; Zhigang Yang; Qingping Liu

    2015-01-01

    Piezoelectric actuation is widely used for the active vibration control of smart structural systems, and corresponding research has largely focused on linear electromechanical devices. This paper investigates the design and analysis of a novel piezoelectric actuator that uses a piezoelectric cantilever beam with a loading spring to produce displacement outputs. This device has a special nonlinear property relating to converting between kinetic energy and potential energy, and it can be used t...

  7. Design & fabrication of cantilever array biosensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Thundat, T

    2009-01-01

    Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes...

  8. Vibration analysis of magnetostrictive thin-film composite cantilever actuator

    Science.gov (United States)

    Xu, Yan; Shang, Xinchun

    2016-09-01

    The transverse vibration of a composed cantilever beam with magnetostrictive layer is analyzed, which is employed to simulate dynamic response of an actuator. The high-order shear deformation theory of beam and the coupling magnetoelastic constitutive relationship are introduced to construct the governing equations, all interface conditions between magnetostrictive film and elastic substrate as well as the free stress condition on the top and bottom surfaces of the beam can be satisfied. In order to demonstrate validity of the presented mathematical modeling, the verification examples are also given. Furthermore, the effect of geometry and material parameters on dynamic characteristics of magnetostrictive cantilever beam, such as the nature frequency and amplitude, is discussed. Moreover, through computing the magneto-mechanical coupling factor of the beam structure, the variation tendency curves of the factor along with different parameters and frequencies of magnetostrictive cantilever beam actuator have been presented. These numerical results should be useful for the design of beam-type with magnetostrictive thin-film actuators.

  9. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  10. Antibody-based protein detection using piezoresistive cantilever arrays

    Science.gov (United States)

    Dauksaite, Vita; Lorentzen, Martin; Besenbacher, Flemming; Kjems, Jørgen

    2007-03-01

    A piezoresistive cantilever array platform with electrical read-out was applied for protein detection using GST (glutathione-S-transferase) and GST antibodies as a model system. Sensing was performed in the static deflection mode under constant flow conditions. The GST antibodies were directly immobilized on the cantilever gold surface by means of free thiol groups. The setup allowed simultaneous deflection measurements with sensor and control-antibody-immobilized reference cantilevers and enabled detection of 1 ng µl-1 (40 nM) of GST protein, which is similar to the sensitivity reported for cantilever sensors using an optical read-out system.

  11. Non-Linear Piezoelectric Actuator with a Preloaded Cantilever Beam

    Directory of Open Access Journals (Sweden)

    Yue Wu

    2015-08-01

    Full Text Available Piezoelectric actuation is widely used for the active vibration control of smart structural systems, and corresponding research has largely focused on linear electromechanical devices. This paper investigates the design and analysis of a novel piezoelectric actuator that uses a piezoelectric cantilever beam with a loading spring to produce displacement outputs. This device has a special nonlinear property relating to converting between kinetic energy and potential energy, and it can be used to increase the output displacement at a lower voltage. The system is analytically modeled with Lagrangian functional and Euler–Lagrange equations, numerically simulated with MATLAB, and experimentally realized to demonstrate its enhanced capabilities. The model is validated using an experimental device with several pretensions of the loading spring, therein representing three interesting cases: a linear system, a low natural frequency system with a pre-buckled beam, and a system with a buckled beam. The motivating hypothesis for the current work is that nonlinear phenomena could be exploited to improve the effectiveness of the piezoelectric actuator’s displacement output. The most practical configuration seems to be the pre-buckled case, in which the proposed system has a low natural frequency, a high tip displacement, and a stable balanced position.

  12. High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

    CERN Document Server

    Lu, Jian; Zhang, Yi; Mihara, Takashi; Itoh, Toshihiro; Maeda, Ryutaro

    2008-01-01

    A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation.

  13. Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

    Institute of Scientific and Technical Information of China (English)

    DONG Feng-Liang; ZHANG Qing-Chuan; CHEN Da-Peng; MIAO Zheng-Yu; XIONG Zhi-Ming; GUO Zhe-Ying; LI Chao-Bo; JIAO Bin-Bin; WU Xiao-Ping

    2007-01-01

    We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device.Each cantilever element has an optimized deformation magnification structure.A 160×160 array with a 120μm×120μm pitch is fabricared and an optical readout is used to collectively measure deflections of all microcantilevers in the array.Tharmal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is giyen statistically and is measured to be about 270mK.

  14. A novel microgripper hybrid driven by a piezoelectric stack actuator and piezoelectric cantilever actuators

    Science.gov (United States)

    Chen, Weilin; Zhang, Xianmin; Fatikow, Sergej

    2016-11-01

    For the piezo-driven microgripper, one issue is to enlarge the grasping stroke and realize parallel grasping movement in the compact design. Piezoelectric stack actuator (PSA) and piezoelectric cantilever actuator (PCA) are two kinds of typical piezoelectric actuators. In this study, a novel microgripper hybrid driven by a PSA and two PCAs is proposed, which can be a better solution for the issue, compared with the previous microgripper using PSA-driven multi-stages displacement amplification mechanism (DAM) or using longer and narrower PCAs. A compact one-stage orthogonal DAM is proposed for the PSA in the microgripper, which can enlarge the grasping stroke and realize parallel grasping movement. The proposed orthogonal DAM is a triangulation amplification-based mechanism with undetermined structural parameters. Bidirectional symmetric input forces/displacements are not required in the proposed design. The number of the undetermined parameters and the solution principle are analyzed. Finite element analysis is used to verify the proposed DAM. The gripper arms are designed as two PCAs, for which the grasping and parasitic movements of the free end are modeled. Piezoelectric-static coupling finite element analysis is used to verify the models. The PCAs-driven grasping with considerable parasitic movement can be used in the coarse positioning. The integration of the hybrid-driven microgripper is presented, and its performances are presented and verified by experiments.

  15. Cantilever deflection measurement and actuation by an nterdigitated transducer

    NARCIS (Netherlands)

    Strambini, E.; Piazza, V.; Pingue, P.; Biasiol, G.; Sorba, L.; Beltram, F.

    2010-01-01

    A scheme that allows all-electrical high-bandwidth readout of a cantilever deflection by means of an integrated interdigitated transducer is presented. The present approach takes advantage of the piezoelectricity of the chosen cantilever substrate material to generate and detect surface-acoustic-wav

  16. Vibration Control of Cantilever Smart Beam by using Piezoelectric Actuators and Sensors

    Directory of Open Access Journals (Sweden)

    Dr. S. Mishra

    2010-08-01

    Full Text Available Vibration of a smart beam is being controlled. This smart beam setup is comprised of actuators and sensors placed at the root of a cantilever beam. Vibrations can be caused by various sources includinghuman activity and nearby motorized equipment. In this case, disturbance is produced using a white noise signal to the actuator. The piezoelectric sensors are used to detect the vibration. Simultaneously, feedback controller sends correction information to the actuator that minimizes the vibration. To optimize results, controllers were designed using Linear Quadratic Gaussian (LQGtheory. This theory generally results in high-order controllers. Additionally, optimal control theory is being used to directly optimize low-order controllers.

  17. Nanoporous-Gold-Based Hybrid Cantilevered Actuator Dealloyed and Driven by A Modified Rotary Triboelectric Nanogenerator

    Science.gov (United States)

    Li, Xuequan; Liu, Mengmeng; Huang, Baisheng; Liu, Hong; Hu, Weiguo; Shao, Li-Hua; Wang, Zhong Lin

    2016-04-01

    We firstly designed an electrochemical system for dealloying to synthesize nanoporous gold (NPG) and also driving the novel NPG based actuator by utilizing a modified rotary triboelectric nanogenerator (TENG). Compared to the previous reported TENG whose outputs decline due to temperature rising resulting from electrodes friction, the modified TENG with a cooling system has stable output current and voltage increased by 14% and 20%, respectively. The novel cantilevered hybrid actuator characterised by light-weight (ca. 3 mg) and small volume (ca. 30 mm × 2 mm × 10 μm) is driven by a microcontroller modulated TENG with the displacement of 2.2 mm, which is about 106 times larger than that of traditional cantilever using planar surfaces. The energy conversion efficiencies defined as the energy consumed during dealloying and actuation compared with the output of TENG are 47% and 56.7%, respectively.

  18. A longitudinal thermal actuation principle for mass detection using a resonant micro -cantilever in a fluid medium

    DEFF Research Database (Denmark)

    Grigorov, Alexander; Davis, Zachary James; Rasmussen, Peter

    2004-01-01

    We propose a new thermal actuation mechanical principle, which allows dynamic actuation in most media: air, water, etc. It is used to excite a cantilever, aiming to perform mass detection using resonance shifts, in place of the electrostatic or magnetic actuation that are normally used. It differ...

  19. Alternative Actuation and Detection Principles for Resonating Cantilevers

    DEFF Research Database (Denmark)

    Grigorov, Alexander

    2006-01-01

    Mikro-elektro mekaniske systemer (MEMS) er ny en teknologi med stort potentiale for kommerciel anvendelse indenfor såvel generel og biokemisk som biomolekylær detektion. Cantilever sensorer er et eksisterende MEMS koncept, der kan bruges til detektion af enten statisk overfladestress fremkaldt af...... strukturer og processer blev derefter brugt til integration på system niveau og mulig funktionalisering af enheder til statiske og dynamiske målinger, der bruger solide og afbrudte kanaler, ”spotting”, og kapilær handlinger til at få diverse væsker til at flyde....

  20. Cantilever RF-MEMS for monolithic integration with phased array antennas on a PCB

    Science.gov (United States)

    Aguilar-Armenta, C. J.; Porter, S. J.

    2015-12-01

    This article presents the development and operation of a novel electrostatic metal-to-metal contact cantilever radio-frequency microelectromechanical system (RF-MEMS) switch for monolithic integration with microstrip phased array antennas (PAAs) on a printed circuit board. The switch is fabricated using simple photolithography techniques on a Rogers 4003c substrate, with a footprint of 200 µm × 100 µm, based on a 1 µm-thick copper cantilever. An alternative wet-etching technique for effectively releasing the cantilever is described. Electrostatic and electromagnetic measurements show that the RF-MEMS presents an actuation voltage of 90 V for metal-to-metal contact, an isolation of -8.7 dB, insertion loss of -2.5 dB and a return loss of -15 dB on a 50 Ω microstrip line at 12.5 GHz. For proof-of-concept, a beam-steering 2 × 2 microstrip PAA, based on two 1-bit phase shifters suitable for the monolithic integration of the RF-MEMS, has been designed and measured at 12.5 GHz. Measurements show that the beam-steering system presents effective radiation characteristics with scanning capabilities from broadside towards 29° in the H-plane.

  1. Feedback Control of Vibrations in a Micromachined Cantilever Beam with Electrostatic Actuators

    Science.gov (United States)

    Wang, P. K. C.

    1998-06-01

    The problem of feedback control of vibrations in a micromachined cantilever beam with nonlinear electrostatic actuators is considered. Various forms of nonlinear feedback controls depending on localized spatial averages of the beam velocity and displacement near the beam tip are derived by considering the time rate-of-change of the total energy of the beam. The physical implementation of the derived feedback controls is discussed briefly. The dynamic behaviour of the beam with the derived feedback controls is determined by computer simulation.

  2. Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system

    Science.gov (United States)

    Hui, Mei; Xia, Zhengzheng; Liu, Ming; Dong, Liquan; Liu, Xiaohua; Zhao, Yuejin

    2016-05-01

    Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers. The transmission loss of an individual fiber in the bundles was 0.35dB/cm and the cross talk between neighboring fibers in the faceplate was about 15%. Micro-cantilever mirrors array (Focal-Plane Array (FPA)) which composed of two-level bi-material pixels, absorb incident infrared flux and result in a temperature increase. The temperature distribution of incident flux transformed to the deformation distribution in FPA which has a very big difference in coefficients of thermal expansion. FPA plays the roles of target sensing and has the characteristics of high detection sensitivity. Instead of general filter such as knife edge or pinhole, fiber faceplate modulate the beam reflected by the units of FPA. An optical readout signal brings a visible spectrum into pattern recognition system, yielding a visible image on monitor. Thermal images at room temperature have been obtained. The proposed method permits optical axis compact and image noise suppression.

  3. Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

    Science.gov (United States)

    Pandey, Vibhuti Bhushan; Parashar, Sandeep Kumar

    2016-04-01

    In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d15 has much higher value than coupling coefficients d31 and d33, hence in the present work the micro cantilever beam actuated by d15 effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.

  4. Multi-material bio-fabrication of hydrogel cantilevers and actuators with stereolithography.

    Science.gov (United States)

    Chan, Vincent; Jeong, Jae Hyun; Bajaj, Piyush; Collens, Mitchell; Saif, Taher; Kong, Hyunjoon; Bashir, Rashid

    2012-01-01

    Cell-based biohybrid actuators are integrated systems that use biological components including proteins and cells to power material components by converting chemical energy to mechanical energy. The latest progress in cell-based biohybrid actuators has been limited to rigid materials, such as silicon and PDMS, ranging in elastic moduli on the order of mega (10(6)) to giga (10(9)) Pascals. Recent reports in the literature have established a correlation between substrate rigidity and its influence on the contractile behavior of cardiomyocytes (A. J. Engler, C. Carag-Krieger, C. P. Johnson, M. Raab, H. Y. Tang and D. W. Speicher, et al., J. Cell Sci., 2008, 121(Pt 22), 3794-3802, P. Bajaj, X. Tang, T. A. Saif and R. Bashir, J. Biomed. Mater. Res., Part A, 2010, 95(4), 1261-1269). This study explores the fabrication of a more compliant cantilever, similar to that of the native myocardium, with elasticity on the order of kilo (10(3)) Pascals. 3D stereolithographic technology, a layer-by-layer UV polymerizable rapid prototyping system, was used to rapidly fabricate multi-material cantilevers composed of poly(ethylene glycol) diacrylate (PEGDA) and acrylic-PEG-collagen (PC) mixtures. The incorporation of acrylic-PEG-collagen into PEGDA-based materials enhanced cell adhesion, spreading, and organization without altering the ability to vary the elastic modulus through the molecular weight of PEGDA. Cardiomyocytes derived from neonatal rats were seeded on the cantilevers, and the resulting stresses and contractile forces were calculated using finite element simulations validated with classical beam equations. These cantilevers can be used as a mechanical sensor to measure the contractile forces of cardiomyocyte cell sheets, and as an early prototype for the design of optimal cell-based biohybrid actuators.

  5. Note: A high-performance, low-cost laser shutter using a piezoelectric cantilever actuator

    Science.gov (United States)

    Bowden, W.; Hill, I. R.; Baird, P. E. G.; Gill, P.

    2017-01-01

    We report the design and characterization of an optical shutter based on a piezoelectric cantilever. Compared to conventional electro-magnetic shutters, the device has intrinsically low power and is acoustically quiet. The cantilever position is controlled by a high-voltage op-amp circuit for easy tuning of the range of travel, and mechanical slew rate, which enables a factor of 30 reduction in mechanical noise compared to a rapidly switched device. We achieve shuttering rise and fall times of 11 μs, corresponding to mechanical slew rates of 1.3 ms-1, with a timing jitter of less than 1 μs. When used to create optical pulses, we achieve minimum pulse durations of 250 μs. The reliability of the shutter was investigated by operating continuously for one week at 10 Hz switching rate. After this period, neither the shutter delay or actuation speed had changed by a measurable amount.

  6. Vibration energy harvester with sustainable power based on a single-crystal piezoelectric cantilever array.

    Science.gov (United States)

    Kim, Moonkeun; Lee, Sang-Kyun; Ham, Yong-Hyun; Yang, Yil Suk; Kwon, Jong-Kee; Kwon, Kwang-Ho

    2012-08-01

    We designed and fabricated a bimorph cantilever array for sustainable power with an integrated Cu proof mass to obtain additional power and current. We fabricated a cantilever system using single-crystal piezoelectric material and compared the calculations for single and arrayed cantilevers to those obtained experimentally. The vibration energy harvester had resonant frequencies of 60.4 and 63.2 Hz for short and open circuits, respectively. The damping ratio and quality factor of the cantilever device were 0.012 and 41.66, respectively. The resonant frequency at maximum average power was 60.8 Hz. The current and highest average power of the harvester array were found to be 0.728 mA and 1.61 mW, respectively. The sustainable maximum power was obtained after slightly shifting the short-circuit frequency. In order to improve the current and power using an array of cantilevers, we also performed energy conversion experiments.

  7. Shape memory alloy actuation effect on subsonic static aeroelastic deformation of composite cantilever plate

    Science.gov (United States)

    Hussein, A. M. H.; Majid, D. L. Abdul; Abdullah, E. J.

    2016-10-01

    Shape memory alloy (SMA) is one of the smart materials that have unique properties and used recently in several aerospace applications. SMAs are metallic alloys that can recover permanent strains when they are heated above a certain temperature. In this study, the effects of SMA actuation on the composite plate under subsonic aeroelastic conditions are examined. The wind tunnel test is carried out for two configurations of a cantilever shape memory alloy composite plate with a single SMA wire fixed eccentrically. Strain gage data for both bending and torsional strain are recorded and demonstrated during the aeroelastic test for active and non-active SMA wire in two locations. The cyclic actuation of the SMA wire embedded inside the composite plate is also investigated during the aeroelastic test. The results show reduction in both bending and torsional strain of the composite plate after activation of the SMA wire during the wind tunnel test.

  8. 2D Electrostatic Actuation of Microshutter Arrays

    Science.gov (United States)

    Burns, Devin E.; Oh, Lance H.; Li, Mary J.; Jones, Justin S.; Kelly, Daniel P.; Zheng, Yun; Kutyrev, Alexander S.; Moseley, Samuel H.

    2015-01-01

    An electrostatically actuated microshutter array consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutter arrays demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.

  9. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Directory of Open Access Journals (Sweden)

    Yingxiang Liu

    Full Text Available BACKGROUND: Ultrasonic motors (USM are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS: A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. CONCLUSIONS: The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  10. A High-Performance, Low-Cost Laser Shutter using a Piezoelectric Cantilever Actuator

    CERN Document Server

    Bowden, W; Baird, P E G; Gill, P

    2016-01-01

    We report the design and characterization of an optical shutter based on a piezoelectric cantilever. Compared to conventional electro-magnetic shutters, the device is intrinsically low power and acoustically quiet. The cantilever position is controlled by a high-voltage op-amp circuit for easy tuning of the range of travel, and mechanical slew rate, which enables a factor of 30 reduction in mechanical noise compared to a rapidly switched device. We achieve shuttering rise and fall times of 11 $\\mu$s, corresponding to mechanical slew rates of 1.3 $\\textrm{ ms}^{-1}$, with an timing jitter of less than 1 $\\mu$s. When used to create optical pulses, we achieve minimum pulse durations of 250 $\\mu$s. The reliability of the shutter was investigated by operating continuously for one week at 10 Hz switching rate. After this period, neither the shutter delay or actuation speed had changed by a notable amount. We also show that the high-voltage electronics can be easily configured as a versatile low-noise, high-bandwidt...

  11. A Compact, Low-Power Cantilever-Based Sensor Array for Chemical Detection

    Energy Technology Data Exchange (ETDEWEB)

    Loui, A; Ratto, T; Wilson, T; Mukerjee, E; Hu, Z; Sulchek, T; Hart, B

    2007-02-22

    A compact and low-power cantilever-based sensor array has been developed and used to detect various vapor analytes. This device employs sorptive polymers that are deposited onto piezoresistive cantilevers. We have successfully detected several organic vapors, representing a breadth of chemical properties and over a range of concentrations. Comparisons of the polymer/vapor partition coefficient to the cantilever deflection responses show that a simple linear relationship does not exist, emphasizing the need to develop an appropriate functional model to describe the chemical-to-mechanical transduction that is unique to this sensing modality.

  12. Design and Fabrication of 2-DOF Micromirror Array Based on Electro-Thermal Actuators

    Institute of Scientific and Technical Information of China (English)

    JIANG Jian-liang; HILLERINGMANN Ulrich

    2006-01-01

    With surface- and bulk-micromachining, an 8 × 8 mirrors array is designed, fabricated and tested,which is based on electro-thermal actuators and can be addressed individually. The micromirror is squareshaped, 4-corner-actuated. Its dimension is 200 μm × 200 μm. The substrate below it is caved away to ensure a tilt at an angle as large as possible. To protect the etch-sensitive features on the front side of the wafer undamaged during wet deep silicon etch on the backside, the wax protective coating process is used. Mirror actuated by powering an alternative pair of heaters will tilt in 2-DOF. If its 4 cantilevers/heaters are powered synchronously, it will move in a piston mode. The effective arrays are more than 80 % out of the three finished wafers. When the ramp voltage frequency applied to a pair of neighboring cantilevers is 5 Hz at 10 V, the average tilting angle can be ± 8°.

  13. Fabrication and characterization of large arrays of mesoscopic gold rings on large-aspect-ratio cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Ngo, D. Q.; Petković, I., E-mail: ivana.petkovic@yale.edu; Lollo, A. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Castellanos-Beltran, M. A. [National Institute for Standards and Technology, Boulder, Colorado 80305 (United States); Harris, J. G. E. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Department of Applied Physics, Yale University, New Haven, Connecticut 06520 (United States)

    2014-10-15

    We have fabricated large arrays of mesoscopic metal rings on ultrasensitive cantilevers. The arrays are defined by electron beam lithography and contain up to 10{sup 5} rings. The rings have a circumference of 1 μm, and are made of ultrapure (6N) Au that is deposited onto a silicon-on-insulator wafer without an adhesion layer. Subsequent processing of the SOI wafer results in each array being supported at the end of a free-standing cantilever. To accommodate the large arrays while maintaining a low spring constant, the cantilevers are nearly 1 mm in both lateral dimensions and 100 nm thick. The extreme aspect ratio of the cantilevers, the large array size, and the absence of a sticking layer are intended to enable measurements of the rings' average persistent current in the presence of relatively small magnetic fields. We describe the motivation for these measurements, the fabrication of the devices, and the characterization of the cantilevers' mechanical properties. We also discuss the devices' expected performance in measurements of .

  14. Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

    Science.gov (United States)

    2015-11-01

    Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy ( SMA ) by Merric D Srour, Cory R Knick, and Christopher J Morris...Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy ( SMA ) by Merric D Srour, Cory R Knick, and Christopher J Morris Sensors and...Shape Memory Alloy ( SMA ) 5a. CONTRACT NUMBER 5b. GRANT NUMBER 5c. PROGRAM ELEMENT NUMBER 6. AUTHOR(S) Merric D Srour, Cory R Knick, and

  15. Innovative multi-cantilever array sensor system with MOEMS read-out

    Science.gov (United States)

    Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

    2016-11-01

    Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

  16. Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

    Science.gov (United States)

    Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

    2014-12-01

    Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.

  17. Compact Fluidic Actuator Arrays For Flow Control Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The overall objective of the proposed research is to design, develop and demonstrate fluidic actuator arrays for aerodynamic separation control and drag reduction....

  18. Compact Fluidic Actuator Arrays for Flow Control Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The overall objective of the proposed research is to design, develop and demonstrate fluidic actuator arrays for aerodynamic separation control and drag reduction....

  19. Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing

    Science.gov (United States)

    Ruppert, Michael G.; Yong, Yuen K.

    2017-08-01

    The quality (Q) factor is an important parameter of the resonance of the microcantilever as it determines both imaging bandwidth and force sensitivity. The ability to control the Q factor of multiple modes is believed to be of great benefit for atomic force microscopy techniques involving multiple eigenmodes. In this paper, we propose a novel cantilever design employing multiple piezoelectric transducers which are used for separated actuation and sensing, leading to guaranteed collocation of the first eight eigenmodes up to 3 MHz. The design minimizes the feedthrough usually observed with these systems by incorporating a guard trace on the cantilever chip. As a result, a multimode Q controller is demonstrated to be able to modify the quality factor of the first two eigenmodes over up to four orders of magnitude without sacrificing robust stability.

  20. Composite thermal micro-actuator array for tactile displays

    Science.gov (United States)

    Enikov, Eniko T.; Lazarov, Kalin V.

    2003-07-01

    Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 x 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

  1. Design and Simulation of Array of Rectangular Micro Cantilevers Piezoelectric Energy Harvester

    Directory of Open Access Journals (Sweden)

    Komal Kumari

    2016-09-01

    Full Text Available This paper presents the design, analysis and simulation of MEMS based array of bimorph rectangular microcantilever piezoelectric energy harvester structure with and without tip mass, to analyze their sensitivity. The microcantilever beams are made up of piezoelectric material and Aluminium as a substrate material. The analytical simulation of design is done by FEM (COMSOL Multiphysics. The simulation results of bimorph cantilever structure, applied force of 0.1 N and obtained end displacement and electric potential developed are given. The analytical model of the cantilever beam will be analyzed and the process of its construction will be discussed. The changes in the sensitivity of a cantilever beam with respect to change in its shape for the same applied force of 0.1N are denoted.

  2. Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-10-27

    The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.

  3. Actuating Mechanism and Design of a Cylindrical Traveling Wave Ultrasonic Motor Using Cantilever Type Composite Transducer

    OpenAIRE

    Yingxiang Liu; Weishan Chen; Junkao Liu; Shengjun Shi

    2010-01-01

    BACKGROUND: Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS: A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the ...

  4. Ink-Jet Printing: Perfect Tool for Cantilever Array Sensor Preparation for Microbial Growth Detection

    Directory of Open Access Journals (Sweden)

    G. Lukacs

    2012-01-01

    Full Text Available The use of microcantilever arrays for microbial growth detection provides a rapid and reliable technique for monitoring growth in industrial and clinical applications. Improving the reproducibility and sensitivity of this technique is of great importance. Ink-jet printing has been successfully used in microfabrication and biofabrication due to its high precision; however, only a few microbe-based applications have been reported. Here we demonstrate the advantages of its use for microcantilever based-growth sensing. Four microbial strains Escherichia coli, Staphylococcus aureus subsp. aureus, Pseudomonas aeruginosa, and Candida albicans were deposited and successfully grown on agarose-coated cantilevers by ink-jet printing. When compared to the capillary-coating method, ink-jet printing demonstrated more controlled cell deposition on cantilevers. The effect of various conditions on cell morphology was also investigated.

  5. Damping control of a CFRP cantilevered beam with electrorheological fluids actuator

    Science.gov (United States)

    Fukuda, Takehito; Oshima, Nobuo

    1996-04-01

    Effects of waveform and frequency of electric fields applied to electro-rheological (ER) fluids are investigated on structural damping of a CFRP composite beam containing ER fluids. As the experimental results, the rectangular waveform is more effective for control of ER effects than the sinusoidal one. In vibration analysis, a simplified mass-spring-damper system is adopted to feature the first flexural mode of the cantilevered composite beam, where the damping factor is changed in time as a function of waveform which is applied to electric fields.

  6. Electrohydroelastic Euler-Bernoulli-Morison model for underwater resonant actuation of macro-fiber composite piezoelectric cantilevers

    Science.gov (United States)

    Shahab, S.; Erturk, A.

    2016-10-01

    Bio-inspired hydrodynamic thrust generation using smart materials has received growing attention over the past few years to enable improved maneuverability and agility, small form factor, reduced power consumption, and ease of fabrication in next-generation aquatic swimmers. In order to develop a high-fidelity model to predict the electrohydroelastic dynamics of macro-fiber composite (MFC) piezoelectric structures, in this work, mixing rules-based (i.e. rule of mixtures) electroelastic mechanics formulation is coupled with the global electroelastic dynamics based on the Euler-Bernoulli kinematics and nonlinear fluid loading based on Morison’s semi-empirical model. The focus is placed on the dynamic actuation problem for the first two bending vibration modes under geometrically and materially linear, hydrodynamically nonlinear behavior. The electroelastic and dielectric properties of a representative volume element (piezoelectric fiber and epoxy matrix) between two subsequent interdigitated electrodes are correlated to homogenized parameters of MFC bimorphs and validated for a set of MFCs that have the same overhang length but different widths. Following this process of electroelastic model development and validation, underwater actuation experiments are conducted for different length-to-width aspect ratios (L/b) in quiescent water, and the empirical drag and inertia coefficients are extracted from Morison’s equation to establish the electrohydroelastic model. The repeatability of these empirical coefficients is demonstrated for experiments conducted using aluminum cantilevers of different aspect ratios with a focus on the first two bending modes. The convergence of the nonlinear electrohydroelastic Euler-Bernoulli-Morison model to its hydrodynamically linear counterpart for increased L/b values is also reported. The proposed model, its harmonic balance analysis, and experimental results can be used not only for underwater piezoelectric actuation, but also for

  7. Conformal grasping using feedback controlled bubble actuator array

    Science.gov (United States)

    Carrigan, Wei; Stein, Richard; Mittal, Manoj; Wijesundara, Muthu B. J.

    2014-06-01

    This paper presents an implementation of a bubble actuator array (BAA) based active robotic skin, a modular system, onto existing low cost robotic end-effectors or prosthetic hands for conformal grasping of objects. The active skin is comprised of pneumatically controlled polyurethane rubber bubbles with overlaid sensors for feedback control. Sensor feedback allows the BAA based robotic skin to conformally grasp an object with an explicit uniform force distribution. The bubble actuator array reported here is capable of applying up to 4N of force at each point of contact and tested for conformally grasping objects with a radius of curvature up to 57.15mm. Once integrated onto a two-finger gripper with one degree of freedom (DOF), the active skin was shown to reduce point of contact forces of up to 50% for grasped objects.

  8. VARIABLE GEARING IN A BIOLOGICALLY-INSPIRED PNEUMATIC ACTUATOR ARRAY

    Science.gov (United States)

    Azizi, Emanuel; Roberts, Thomas J.

    2013-01-01

    A fundamental feature of pennate muscles is that muscle fibers are oriented at an angle to the line of action and rotate as they shorten, becoming more oblique throughout a contraction. This change in fiber orientation (pennation angle) can amplify the shortening velocity of a fiber and increase output velocity of the muscle. The velocity advantage resulting from dynamic changes in pennation angle can be characterized as a gear ratio (muscle velocity/fiber velocity). A recent study has shown that a pennate muscle’s gear ratio varies automatically depending on the load such that a muscle operates with a high gear during rapid contractions and low gear during forceful contractions. We examined whether this variable gearing behavior can be replicated in a pennate array of artificial muscles. We used McKibben type pneumatic actuators, which shorten in tension when filled with compressed gas. Similar to muscle fibers, the actuators expand radially during shortening, a feature thought to be a critical part of the variable gearing mechanism in pennate muscles. We arranged McKibben actuators in an array oriented to mimic a pennate muscle, and quantified the system’s gear ratio during contraction against a range of loads. Video was used to measure the gear ratio during each contraction. We find that similar to pennate muscles, the gear ratio decreases significantly with increasing load and that variable gearing results from load-dependent variation in the amount of actuator rotation. These results support the idea that variable gearing in pennate muscles is mediated by difference is fiber rotation and the direction of muscle bulging. The behavior of our artificial muscle array also highlights the potential benefits of bio-inspired architectures in artificial muscle arrays, including the ability to vary force and speed automatically in response to variable loading conditions. PMID:23462288

  9. The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric Cantilevers.

    Science.gov (United States)

    Lee, Jeong Hoon; Hwang, Kyo Seon; Kim, Tae Song

    2011-12-01

    In this study, flat piezoelectric microcantilevers were fabricated under low-stress Pb(Zr0.52Ti0.48)O3 (PZT) film conditions. They were analyzed using the Raman spectrum and wafer curvature methods. Based on the residual stress analysis, we found that a thickness of 1 μm was critical, since stress relaxation starts to occur at greater thicknesses, due to surface roughening. The (111) preferred orientation started to decrease when the film thickness was greater than 1 μm. The d33 value was closely related to the stress relaxation associated with the preferred orientation changes. We examined the harmonic response at different PZT cantilever lengths and obtained a 9.4-μm tip displacement at 3 Vp-p at 1 kHz. These analyses can provide a platform for the reliable operation of piezoelectric microdevices, potentially nanodevice when one needs to have simultaneous control of the residual stress and the piezoelectric properties.

  10. Sensing of fluid viscoelasticity from piezoelectric actuation of cantilever flexural vibration

    Science.gov (United States)

    Park, Jeongwon; Jeong, Seongbin; Kim, Seung Joon; Park, Junhong

    2015-01-01

    An experimental method is proposed to measure the rheological properties of fluids. The effects of fluids on the vibration actuated by piezoelectric patches were analyzed and used in measuring viscoelastic properties. Fluid-structure interactions induced changes in the beam vibration properties and frequency-dependent variations of the complex wavenumber of the beam structure were used in monitoring these changes. To account for the effects of fluid-structure interaction, fluids were modelled as a simple viscoelastic support at one end of the beam. The measured properties were the fluid's dynamic shear modulus and loss tangent. Using the proposed method, the rheological properties of various non-Newtonian fluids were measured. The frequency range for which reliable viscoelasticity results could be obtained was 10-400 Hz. Viscosity standard fluids were tested to verify the accuracy of the proposed method, and the results agreed well with the manufacturer's reported values. The simple proposed laboratory setup for measurements was flexible so that the frequency ranges of data acquisition were adjustable by changing the beam's mechanical properties.

  11. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy.

    Science.gov (United States)

    Lai, Y W; Hamann, S; Ehmann, M; Ludwig, A

    2011-06-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent.

  12. Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation

    Science.gov (United States)

    Park, Byoungyoul; Afsharipour, Elnaz; Chrusch, Dwayne; Shafai, Cyrus; Andersen, David; Burley, Greg

    2017-08-01

    This paper presents a large displacement out-of-plane Lorentz actuator array for surface manipulation. Actuators are formed from single crystal silicon flexible serpentine springs on either side of a rigid crossbar containing a narrow contact pillar. A rigid mounting rail system was employed to enable a 5  ×  5 array, which offers scalability of the array size. Analytical and finite element models were used to optimize actuator design. Individual actuators were tested to show linear deflection response of  ±150 µm motion, using a  ±14.7 mA current in the presence of a 0.48 T magnetic field. This actuator array is suitable for various 2D surface modification applications due to its large deformation with low current and temperature of operation, and narrow contact area to a target surface.

  13. Piezoelectric cantilever sensors

    Science.gov (United States)

    Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

    2008-01-01

    A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

  14. A light writable microfluidic "flash memory": optically addressed actuator array with latched operation for microfluidic applications.

    Science.gov (United States)

    Hua, Zhishan; Pal, Rohit; Srivannavit, Onnop; Burns, Mark A; Gulari, Erdogan

    2008-03-01

    This paper presents a novel optically addressed microactuator array (microfluidic "flash memory") with latched operation. Analogous to the address-data bus mediated memory address protocol in electronics, the microactuator array consists of individual phase-change based actuators addressed by localized heating through focused light patterns (address bus), which can be provided by a modified projector or high power laser pointer. A common pressure manifold (data bus) for the entire array is used to generate large deflections of the phase change actuators in the molten phase. The use of phase change material as the working media enables latched operation of the actuator array. After the initial light "writing" during which the phase is temporarily changed to molten, the actuated status is self-maintained by the solid phase of the actuator without power and pressure inputs. The microfluidic flash memory can be re-configured by a new light illumination pattern and common pressure signal. The proposed approach can achieve actuation of arbitrary units in a large-scale array without the need for complex external equipment such as solenoid valves and electrical modules, which leads to significantly simplified system implementation and compact system size. The proposed work therefore provides a flexible, energy-efficient, and low cost multiplexing solution for microfluidic applications based on physical displacements. As an example, the use of the latched microactuator array as "normally closed" or "normally open" microvalves is demonstrated. The phase-change wax is fully encapsulated and thus immune from contamination issues in fluidic environments.

  15. 基于压电自感知执行器悬臂梁振动控制%Vibration control of cantilever beam using self-sensing actuator

    Institute of Scientific and Technical Information of China (English)

    董维杰; 孙宝元; 崔玉国; 杨志欣

    2001-01-01

    用一片压电陶瓷同时做传感器和执行器,基于应变速度电桥电路将应变速度信号从执行器控制电压中分离出来,制成了压电式自感知执行器;针对电桥不平衡情况,设计了由比例调节和相位滞后校正组成的简单控制器.悬臂梁振动控制实验证明:自感知执行器不仅能检测振动信息,而且能有效抑制悬臂梁的振动.%A single piezoelectric ceramic element simultaneously functionsas both a sensor and an actuator. A piezoelectric self-sensing actuator (SSA) is realized based on a strain rate bridge circuit that separates the strain rate signal from the control voltage. A simple controller consisting of a proportional and a phase lag compensation is designed in view of that the bridge is slightly unbalanced. Experimental results show that SSA can not only be a vibration detector but also has good performance in vibration control of a cantilever beam.

  16. Reconfigurable Array Antenna Using Microelectromechanical Systems (MEMS) Actuators

    Science.gov (United States)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2001-01-01

    The paper demonstrates a patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the operating frequency. Experimental results demonstrate that the center frequency can be reconfigured by as much as 1.6 percent of the nominal operating frequency at K-Band In addition, a novel on-wafer antenna pattern measurement technique is demonstrated.

  17. Dynamics of impurity attraction and repulsion of an intrinsic localized mode in a driven 1-D cantilever array

    CERN Document Server

    Sato, M; Shi, W; Shige, S; Ishikawa, T; Soga, Y; Hubbard, B E; Ilic, B; Sievers, A J

    2014-01-01

    Both low frequency and high frequency impurity modes have been produced in a SiN micromechanical cantilever array by illumination with either an infrared or visible laser. When such laser-induced impurities are placed near a driven intrinsic localized mode (ILM) it is either repelled or attracted. By measuring the linear response spectrum for these two cases it was found that vibrational hopping of the ILM takes place when the natural frequency of the ILM and an even symmetry linear local mode are symmetrically located about the driven ILM frequency so that parametric excitation of these two linear modes is enhanced, amplifying the lateral motion of the ILM. Numerical simulations are consistent with these signature findings. It is also demonstrated that the correct sign of the observed interaction can be found with a harmonic lattice-impurity model but the magnitude of the effect is enhanced in a nonlinear lattice.

  18. Image quality improvement by the structured light illumination method in an optical readout cantilever array infrared imaging system.

    Science.gov (United States)

    Feng, Yun; Zhao, Yuejin; Liu, Ming; Dong, Liquan; Yu, Xiaomei; Kong, Lingqin; Ma, Wei; Liu, Xiaohua

    2015-04-01

    The structured light illumination method is applied in an optical readout uncooled infrared imaging system to improve the IR image quality. The unavoidable nonuniform distribution of the initial bending angles of the bimaterial cantilever pixels in the focal plane array (FPA) can be well compensated by this method. An ordinary projector is used to generate structured lights of different intensity distribution. The projected light is divided into patches of rectangular regions, and the brightness of each region can be set automatically according to the deflection angles of the FPA and the light intensity focused on the imaging plane. By this method, the FPA image on the CCD plane can be much more uniform and the image quality of the IR target improved significantly. A comparative experiment is designed to verify the effectiveness. The theoretical analysis and experimental results show that the proposed structured light illumination method outperforms the conventional one, especially when it is difficult to perfect the FPA fabrication.

  19. Capture and release of traveling intrinsic localized mode in coupled cantilever array

    OpenAIRE

    Kimura, Masayuki; Hikihara, Takashi

    2009-01-01

    A method to manipulate intrinsic localized mode (ILM) is numerically discussed in a nonlinear coupled oscillator array, which is obtained by modeling a microcantilever array. Prior to the manipulation, coexistence and dynamical stability of standing ILMs are first investigated. The stability of coexisting ILMs is determined by a nonlinear coupling coefficient of the array. In addition, the global phase structure, which dominates traveling ILMs, is also changed with the stability. It makes pos...

  20. Parametric Studies Of Lightweight Reflectors Supported On Linear Actuator Arrays

    Science.gov (United States)

    Seibert, George E.

    1987-10-01

    This paper presents the results of numerous design studies carried out at Perkin-Elmer in support of the design of large diameter controllable mirrors for use in laser beam control, surveillance, and astronomy programs. The results include relationships between actuator location and spacing and the associated degree of correctability attainable for a variety of faceplate configurations subjected to typical disturbance environments. Normalizations and design curves obtained from closed-form equations based on thin shallow shell theory and computer based finite-element analyses are presented for use in preliminary design estimates of actuator count, faceplate structural properties, system performance prediction and weight assessments. The results of the analyses were obtained from a very wide range of mirror configurations, including both continuous and segmented mirror geometries. Typically, the designs consisted of a thin facesheet controlled by point force actuators which in turn were mounted on a structurally efficient base panel, or "reaction structure". The faceplate materials considered were fused silica, ULE fused silica, Zerodur, aluminum and beryllium. Thin solid faceplates as well as rib-reinforced cross-sections were treated, with a wide variation in thickness and/or rib patterns. The magnitude and spatial frequency distribution of the residual or uncorrected errors were related to the input error functions for mirrors of many different diameters and focal ratios. The error functions include simple sphere-to-sphere corrections, "parabolization" of spheres, and higher spatial frequency input error maps ranging from 0.5 to 7.5 cycles per diameter. The parameter which dominates all of the results obtained to date, is a structural descriptor of thin shell behavior called the characteristic length. This parameter is a function of the shell's radius of curvature, thickness, and Poisson's ratio of the material used. The value of this constant, in itself

  1. Capture and release of traveling intrinsic localized mode in coupled cantilever array.

    Science.gov (United States)

    Kimura, Masayuki; Hikihara, Takashi

    2009-03-01

    A method to manipulate intrinsic localized mode (ILM) is numerically discussed in a nonlinear coupled oscillator array, which is obtained by modeling a microcantilever array. Prior to the manipulation, coexistence and dynamical stability of standing ILMs are first investigated. The stability of coexisting ILMs is determined by a nonlinear coupling coefficient of the array. In addition, the global phase structure, which dominates traveling ILMs, is also changed with the stability. It makes possible to manipulate a traveling ILM by adjusting the nonlinear coupling coefficient. The capture and release manipulation of the traveling ILM is shown numerically.

  2. Design Methodology of a Dual-Halbach Array Linear Actuator with Thermal-Electromagnetic Coupling.

    Science.gov (United States)

    Eckert, Paulo Roberto; Flores Filho, Aly Ferreira; Perondi, Eduardo; Ferri, Jeferson; Goltz, Evandro

    2016-01-01

    This paper proposes a design methodology for linear actuators, considering thermal and electromagnetic coupling with geometrical and temperature constraints, that maximizes force density and minimizes force ripple. The method allows defining an actuator for given specifications in a step-by-step way so that requirements are met and the temperature within the device is maintained under or equal to its maximum allowed for continuous operation. According to the proposed method, the electromagnetic and thermal models are built with quasi-static parametric finite element models. The methodology was successfully applied to the design of a linear cylindrical actuator with a dual quasi-Halbach array of permanent magnets and a moving-coil. The actuator can produce an axial force of 120 N and a stroke of 80 mm. The paper also presents a comparative analysis between results obtained considering only an electromagnetic model and the thermal-electromagnetic coupled model. This comparison shows that the final designs for both cases differ significantly, especially regarding its active volume and its electrical and magnetic loading. Although in this paper the methodology was employed to design a specific actuator, its structure can be used to design a wide range of linear devices if the parametric models are adjusted for each particular actuator.

  3. Design and fabrication of the thin-film micromirror array-actuated for large projection displays

    CERN Document Server

    Hwang, K H; Kim, S G

    1998-01-01

    The Thin-film Micromirror Array-actuated (TMA) is a new reflective type light modulator that uses micromachined thin film piezoelectric actuators in conjunction with over 300,000 micromirrors. A working prototype of TMA display system with three TMA modules shows the world best light efficiency at the present time, which is more than 7 lumen per watt light efficiency. Projectors and projection TVs with TMAs will be the most promising device which will provide clear display of electronic image at normal room light condition.

  4. 基于光控压电混合驱动悬臂梁独立模态控制%Independent modal control on cantilever beam based on hybrid photovoltaic/piezoelectric actuation mechanism

    Institute of Scientific and Technical Information of China (English)

    姜晶; 邓宗全; 岳洪浩; 王雷; TZOU Horn-sen

    2015-01-01

    提出利用镧改性锆钛酸铅(PLZT)的光电效应,将PLZT作为电动势源来驱动压电作动器,从而实现光控板壳结构的振动控制。基于光控压电等效电学模型建立了光控压电混合驱动的数学模型,并进行了实验验证。为了实现光控悬臂梁的独立模态控制,针对悬臂梁结构,设计了正交模态传感器/作动器表面电极形状函数。提出PLZT与压电作动器正/反接控制的激励策略,并结合速度反馈定光强控制的控制算法,利用Newmark-β法对不同光照强度下悬臂梁的动态响应进行了数值仿真分析。分析结果证明了所设计的模态传感器/作动器及针对光控压电混合驱动提出的控制策略的正确性。%The photonic control on flexible shell using hybrid photovoltaic/piezoelectric actuation mechanism was proposed.Based on the photovoltaic effect of PLZT,it was used as photovoltaic generator to drive piezoelectric actuator. The constitutive model of this novel actuation mechanism was established based on its equivalent electrical model,and was verified by experiments.In order to realize the independent modal control on cantilever beam using hybrid photovoltaic/piezoelectric actuation mechanism,orthogonal sensors were designed,and the ON/OFF control of positive/negative connection between PLZT and piezoelectric actuator was proposed combining the use of constant light control algorithm based on velocity feedback.Dynamic modal control equations of the cantilever beam laminated with orthogonal actuators based on this novel photonic control method was numerically solved using Newmark -βmethod.The simulation results show that the orthogonal sensors/actuators designed and the control schemes proposed for this photonic method can effectively realize photonic independent modal control on cantilever beam.

  5. Cantilevered probe detector with piezoelectric element

    Science.gov (United States)

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2013-04-30

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  6. Nanomechanical humidity detection through porous alumina cantilevers

    Directory of Open Access Journals (Sweden)

    Olga Boytsova

    2015-06-01

    Full Text Available We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10–22%. The sensitivity of porous anodic aluminium oxide cantilevers (Δf/Δm and the humidity sensitivity equal about 56 Hz/pg and about 100 Hz/%, respectively. The approach presented here for the design of anodic alumina cantilever arrays by the combination of anodic oxidation and photolithography enables easy control over porosity, surface area, geometric and mechanical characteristics of the cantilever arrays for micromechanical sensing.

  7. Study on Flexible Cantilever Beam Vibration Control System Based on Piezoelectric Self-sensing Actuator%压电自感知柔性悬臂梁振动控制系统研究

    Institute of Scientific and Technical Information of China (English)

    缑新科; 李大鹏

    2011-01-01

    将压电悬臂梁系统离散化的状态空间方程作为预测模型,设计了预测函数控制器.采用电桥电路法分离出压电自感知执行器的感知信号,经过预测函数控制器处理后输出的控制信号作用于自感知执行器,产生相应的执行力来抑制悬臂梁的振动,从而达到振动控制的目的.仿真结果表明,所设计的振动控制系统对柔性悬臂梁振动抑制是非常有效的.%Regarding the discrete state-space equation as prediction model,the paper designs the predictive functional controller. The sense signal of piezoelectric self-sensing actuator is separated by the bridge circuit. After processing the sense signal with the predictive functional controller, the control signal is outputted to control piezoelectric self-sensing actuator. The stress is produced from the self-sensing actuator to control the flexible cantilever beam vibration. The simulation results show the designed system is very efficient for vibration suppression.

  8. 一种新型微梁阵列传感器设计及实现%Design and Realization of New Optical Sequential Readout for Micro-cantilever Array

    Institute of Scientific and Technical Information of China (English)

    薛长国; 张广平; 张青川; 伍小平

    2011-01-01

    As an emerging hotspot of MEMS technology and NEMS sensor over past decades, the research of instrument style of micro-cantilever sensor was developed from single cantilever to onedimensional or two-dimensional arrays. A new optical sequential readout for micro-cantilever array is presented in this paper, based on a commercialized micro-cantilever array with 250μm spacing. Using high precision two-dimensional optical displacement table to adjust the laser position and locate two laser beams on the adjacent micro-cantilever array tips as parallel beams on micro-distance, the bend of two micro-cantilevers was detected by PSD. Thus the system sensor function was realized. This optical path is easy put up in experiment verification and two signals from two micro-cantilevers can be better separated. When an antibody was immobilized on the surface of a micro-cantilever, the system can detect the antigen in solution. This method provided a simple way to design micro-cantilever array based on optical lever in the future.%微悬臂梁传感技术是微纳传感技术研究的热点,仪器装置的研究也从单悬臂梁向微梁阵列的方向发展.本文针对间距为250μm的商品化微梁阵列,提出了一种实现对其弯曲变形的读出系统光路.利用高精度位移平台调节激光器空间位置,使光束实现微距离上平行,并分别照射在阵列梁的相邻微梁上.用位置敏感探测器对两个微悬臂梁尖端反射的激光信号进行检测,实现系统传感功能.实验验证该光路设计简单易行,针对这一方案实现了两个微梁的信号分离.在微梁上修饰对应的抗体,系统就可以对其抗原行检测.该方案对微梁多阵列传感器研制开发提出了一个新的思路.

  9. Actuation-mechanisms of CNT-bucky papers and CNT-arrays

    Science.gov (United States)

    Geier, Sebastian; Mahrholz, Thorsten; Wierach, Peter; Sinapius, Michael

    2015-04-01

    In the fields of smart materials there is still a demand for a material featuring high modulus, low density and large strain. Carbon materials catch enormous scientific attention not only since carbon fibers were used for highperformance composite structures. But more and more the scientific attention moves from the macroscale to the nanoscale. This paper focuses with a adaptive point of view on one of the carbon allotropes: carbon nanotubes (CNTs). Beside excellent electromechanical properties another interesting feature was first mentioned 1999 - the active behavior of paper-like mats (bucky-papers) made of CNTs. CNT-papers are electrically activated using a double-layer interaction of ions provided by an electrolyte and the charged, high specific surface area of the paper formed by carbon nanotubes. Until now the detailed mechanism behind the strain/force generation of CNT-based architectures is unknown. A clarification of this principle reveals the potential of carbon tubes to be or not to be a resilient smart material in order to use their strong covalent carbon bonds instead of weak van der Waals force as tube-linking. This paper presents further investigations about the composition of CNT-papers and their performance in contrast to vertical aligned CNT-arrays using an actuated tensile test set-up. For better comparison the experiments of both specimen-types are carried out in dry, wet and wet/charged conditions. Especially in the case of CNT-arrays it is essential to preload the specimens because the curly CNT-structure superimposes the vertical orientation. While the CNT-paper is tested in an aqueous solution of one molar sodium chloride, the hydrophobic character of CNT-arrays requires an ionic liquid (IL) as electrolyte. It is found that the mechanical properties of CNT-papers drop significantly by wetting and can be controlled by charging what indicates an electrostatic dominated effect. In contrast the CNT-arrays show identical results regardless of the

  10. Piezoelectric Micromachined Ultrasound Transducer (PMUT Arrays for Integrated Sensing, Actuation and Imaging

    Directory of Open Access Journals (Sweden)

    Yongqiang Qiu

    2015-04-01

    Full Text Available Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs, diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

  11. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.

    Science.gov (United States)

    Qiu, Yongqiang; Gigliotti, James V; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E M; Cochran, Sandy; Trolier-McKinstry, Susan

    2015-04-03

    Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

  12. Directed Fluid Flow Produced by Arrays of Magnetically Actuated Core-Shell Biomimetic Cilia

    Science.gov (United States)

    Fiser, B. L.; Shields, A. R.; Evans, B. A.; Superfine, R.

    2010-03-01

    We have developed a novel core-shell microstructure that we use to fabricate arrays of flexible, magnetically actuated biomimetic cilia. Our biomimetic cilia mimic the size and beat shape of biological cilia in order to replicate the transport of fluid driven by cilia in many biological systems including the determination of left-right asymmetry in the vertebrate embryonic nodal plate and mucociliary clearance in the lung. Our core-shell structures consist of a flexible poly(dimethylsiloxane) (PDMS) core surrounded by a shell of nickel approximately forty nanometers thick; by using a core-shell structure, we can tune the mechanical and magnetic properties independently. We present the fabrication process and the long-range transport that occurs above the beating biomimetic cilia tips and will report on progress toward biomimetic cilia induced flow in viscoelastic fluids similar to mucus in the human airway. These flows may have applications in photonics and microfluidics, and our structures may be further useful as sensors or actuators in microelectromechanical systems.

  13. Actuator Development at IAAT for the Cherenkov Telescope Array Medium Size Telescopes

    CERN Document Server

    Diebold, S; Pühlhofer, G; Renner, S; Santangelo, A; Schanz, T; Tenzer, C

    2016-01-01

    The Cherenkov Telescope Array (CTA) will be the future observatory for TeV gamma-ray astronomy. In order to increase the sensitivity and to extend the energy coverage beyond the capabilities of current facilities, its design concept features telescopes of three different size classes. Based on the experience from H.E.S.S. phase II, the Institute for Astronomy and Astrophysics T\\"ubingen (IAAT) develops actuators for the mirror control system of the CTA Medium Size Telescopes (MSTs). The goals of this effort are durability, high precision, and mechanical stability under all environmental conditions. Up to now, several revisions were developed and the corresponding prototypes were extensively tested. In this contribution our latest design revision proposed for the CTA MSTs are presented.

  14. Effect of cantilever substrate on actuation characteristics of piezoelectric fiber composites%悬臂梁基板对压电纤维复合物驱动性能的影响

    Institute of Scientific and Technical Information of China (English)

    朱松; 陈子琪; 林秀娟; 周科朝; 张斗

    2015-01-01

    The piezoelectric fiber composites have important application in the field of actuation, sensing, structural health monitoring and etc. It is important to study the actuation characteristics of piezoelectric fiber composites for a range of applications. The influences of driving voltage conditions (peak-to-peak voltage, frequency, bias) on the actuation characteristics of piezoelectric fiber composites were studied. The relationship between cantilever beam actuation performance of DFCs was investigated through the tip displacement of the cantilever, which was also used to calculate the blocking force based on Euler-Bernoulli beam theory. The results show that the hysteresis of piezoelectric fiber composite exists obviously. The tip displacement of the cantilever has a linear relationship with the driving voltage amplitude, and also is influenced by the driving voltage bias and frequency. The actuation characteristics of the piezoelectric fiber composites differ with different substrates. The blocking force for aluminum-based substrate is 5.2 mN, while it is 0.2 mN for mylar-based substrate.%压电纤维复合物在驱动、传感、结构健康检测等领域具有广泛应用,研究压电纤维复合物的驱动性能对于压电纤维复合物实际应用具有重要意义。通过实验研究不同驱动电压条件(峰值、频率及偏置)对压电纤维复合物悬臂梁结构顶端位移的影响,探讨悬臂梁基板材料与压电纤维复合物驱动性能的关系,基于欧拉−伯努利梁理论利用悬臂梁顶端位移计算压电纤维复合物的驱动力。结果表明:压电纤维复合物的驱动性能具有明显的迟滞性。悬臂梁顶端位移的大小与驱动电压峰的峰值呈线性关系,且其不仅与驱动电压的峰值有关,还与驱动电压的偏置、频率有关。压电纤维复合物的驱动性能随基板不同而不同,其对刚性铝板的驱动力为5.2 mN,对柔性麦拉膜的驱动力为0.2 mN。

  15. Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

    Science.gov (United States)

    Wang, Xinghua; Xiao, Dingbang; Chen, Zhihua; Wu, Xuezhong

    2016-09-01

    This paper describes the design, fabrication and characterization of a batch-fabricated micro-thermal actuators array with inherent real-time self-feedback, which can be used to actively modify micro-electro-mechanical systems’ (MEMS’) substrate warpage. Arrayed polymer thermal actuators utilize SU-8 polymer (a thick negative photoresist) as a functional material with integrated Ti/Al film-heaters as a microscale heat source. The electro-thermo-mechanical response of a micro-fabricated actuator was measured. The resistance of the Al/Ti film resistor varies obviously with ambient temperature, which can be used as inherent feedback for observing real-time displacement of activated SU-8 bumps (0.43 μm Ω-1). Due to the high thermal expansion coefficient, SU-8 bumps tend to have relatively large deflection at low driving voltage and are very easily integrated with MEMS devices. Experimental results indicated that the proposed SU-8 polymer thermal actuators (array) are able to achieve accurate rectification of MEMS’ substrate warpage, which might find potential applications for solving stress-induced problems in MEMS.

  16. Opposition control with arrayed actuators in the near-wall region of a spatially developing turbulent boundary layer

    Energy Technology Data Exchange (ETDEWEB)

    Pamies, Mathieu [ONERA Applied Aerodynamic Department, 8, rue des Vertugadins, F-92200 Meudon (France); Garnier, Eric, E-mail: eric.garnier@onera.fr [ONERA Applied Aerodynamic Department, 8, rue des Vertugadins, F-92200 Meudon (France); Merlen, Alain [Institut d' electronique, microelectronique et nanotechnologie, CNRS, Universite Lille 1 (France); Sagaut, Pierre [IJLRA/UPMC, 4 place Jussieu, 75252 Paris cedex 5 (France)

    2011-06-15

    Opposition control is known as an efficient mean to reduce drag in numerical simulations. However, even if the actuation principle follows simple spatio-temporal scales of turbulent motion, practical implementation of this concept results in very heavy technological constraints. Before going further in technological developments, it seems reasonable to assess numerically the efficiency of possible control devices by improving significantly the realism of simulations. In this study, the performance of an array of wall deforming actuators is investigated. The realistic wall deformations are allowed for by means of an Arbitrary Lagrangian-Eulerian (ALE) technique. The Direct Numerical Simulation (DNS) has been performed at friction Reynolds number of 368 on a spatially developing boundary layer configuration. The result analysis including averaging conditioned to actuator location and position shows that even if the actuator functioning in opposition control is validated, the drag reduction is not significant. The gains associated with an ideal opposition control are completely annihilated when a realistic actuator description is included in the simulation.

  17. Development of micropump-actuated negative pressure pinched injection for parallel electrophoresis on array microfluidic chip.

    Science.gov (United States)

    Li, Bowei; Jiang, Lei; Xie, Hua; Gao, Yan; Qin, Jianhua; Lin, Bingcheng

    2009-09-01

    A micropump-actuated negative pressure pinched injection method is developed for parallel electrophoresis on a multi-channel LIF detection system. The system has a home-made device that could individually control 16-port solenoid valves and a high-voltage power supply. The laser beam is excitated and distributes to the array separation channels for detection. The hybrid Glass-PDMS microfluidic chip comprises two common reservoirs, four separation channels coupled to their respective pneumatic micropumps and two reference channels. Due to use of pressure as a driving force, the proposed method has no sample bias effect for separation. There is only one high-voltage supply needed for separation without relying on the number of channels, which is significant for high-throughput analysis, and the time for sample loading is shortened to 1 s. In addition, the integrated micropumps can provide the versatile interface for coupling with other function units to satisfy the complicated demands. The performance is verified by separation of DNA marker and Hepatitis B virus DNA samples. And this method is also expected to show the potential throughput for the DNA analysis in the field of disease diagnosis.

  18. Squeeze-film damping characteristics of cantilever microresonators ...

    African Journals Online (AJOL)

    user

    The effects of large DC bias voltages on quality factor and resonance frequency are .... perturbation approach does not apply to cantilever plates because of ... A schematic diagram of an electrostatically actuated microcantilever beam model.

  19. Novel resonant cantilever mass change detection and resonant frequency tuning

    DEFF Research Database (Denmark)

    Grigorov, Alexander; Boisen, Anja

    2005-01-01

    This paper reports a novel way to detect the resonant frequency of an electro-thermally actuated cantilever sensor that we have previously reported, in order to perform mass detection by resonant frequency shift detection. The device is based on monitoring the rupture of a clamped cantilever stru...

  20. An Orientation Measurement Method Based on Hall-effect Sensors for Permanent Magnet Spherical Actuators with 3D Magnet Array

    Science.gov (United States)

    Yan, Liang; Zhu, Bo; Jiao, Zongxia; Chen, Chin-Yin; Chen, I.-Ming

    2014-10-01

    An orientation measurement method based on Hall-effect sensors is proposed for permanent magnet (PM) spherical actuators with three-dimensional (3D) magnet array. As there is no contact between the measurement system and the rotor, this method could effectively avoid friction torque and additional inertial moment existing in conventional approaches. Curved surface fitting method based on exponential approximation is proposed to formulate the magnetic field distribution in 3D space. The comparison with conventional modeling method shows that it helps to improve the model accuracy. The Hall-effect sensors are distributed around the rotor with PM poles to detect the flux density at different points, and thus the rotor orientation can be computed from the measured results and analytical models. Experiments have been conducted on the developed research prototype of the spherical actuator to validate the accuracy of the analytical equations relating the rotor orientation and the value of magnetic flux density. The experimental results show that the proposed method can measure the rotor orientation precisely, and the measurement accuracy could be improved by the novel 3D magnet array. The study result could be used for real-time motion control of PM spherical actuators.

  1. Dynamic Characterization of Silicon Nitride Cantilevers

    NARCIS (Netherlands)

    Babaei Gavan, K.

    2009-01-01

    This thesis describes a series of experiments on dynamical characterization of silicon nitride cantilevers. These devices play an important role in micro-and nanoelectromechanical systems (MEMS and NEMS). They consist of a mechanical part, a sensor or actuator, and an electronic part for readout and

  2. Dynamic Characterization of Silicon Nitride Cantilevers

    NARCIS (Netherlands)

    Babaei Gavan, K.

    2009-01-01

    This thesis describes a series of experiments on dynamical characterization of silicon nitride cantilevers. These devices play an important role in micro-and nanoelectromechanical systems (MEMS and NEMS). They consist of a mechanical part, a sensor or actuator, and an electronic part for readout and

  3. Precision Pointing in Space Using Arrays of Shape Memory Based Linear Actuators

    Science.gov (United States)

    Sonawane, Nikhil

    Space systems such as communication satellites, earth observation satellites and telescope require accurate pointing to observe fixed targets over prolonged time. These systems typically use reaction wheels to slew the spacecraft and gimballing systems containing motors to achieve precise pointing. Motor based actuators have limited life as they contain moving parts that require lubrication in space. Alternate methods have utilized piezoelectric actuators. This paper presents Shape memory alloys (SMA) actuators for control of a deployable antenna placed on a satellite. The SMAs are operated as a series of distributed linear actuators. These distributed linear actuators are not prone to single point failures and although each individual actuator is imprecise due to hysteresis and temperature variation, the system as a whole achieves reliable results. The SMAs can be programmed to perform a series of periodic motion and operate as a mechanical guidance system that is not prone to damage from radiation or space weather. Efforts are focused on developing a system that can achieve 1 degree pointing accuracy at first, with an ultimate goal of achieving a few arc seconds accuracy. Bench top model of the actuator system has been developed and working towards testing the system under vacuum. A demonstration flight of the technology is planned aboard a CubeSat.

  4. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    Science.gov (United States)

    Ahmad, Mahmoud Al; Alshareef, H. N.

    2012-02-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates in the line it sets an alternating current in the actuator electrodes. This flowing current drives the piezoelectric cantilever to mechanical movement, especially when the frequency of the RF signal matches the mechanical resonant frequency of the cantilever. Output voltage signals versus frequency for both mechanical vibrational and RF signal excitations have been measured using different loads.

  5. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud

    2012-02-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates in the line it sets an alternating current in the actuator electrodes. This flowing current drives the piezoelectric cantilever to mechanical movement, especially when the frequency of the RF signal matches the mechanical resonant frequency of the cantilever. Output voltage signals versus frequency for both mechanical vibrational and RF signal excitations have been measured using different loads.© 2011 Elsevier Ltd. All rights reserved.

  6. Experimental Determination of Bending Resonances of Millimeter Size PVF2 Cantilevers

    Directory of Open Access Journals (Sweden)

    David F. Thompson

    2003-07-01

    Full Text Available The polymer piezoelectric polvinylidene fluoride has found widespread use in sensors and actuators. The bending mode of piezoelectricity offers very high sensitivities and low mechanical input impedance, but has not been studied in as much detail for sensor applications. We report the dynamic electromechanical properties of millimeter size cantilevers made from electroded films of PVF2. All devices tested had a single polymer layer. Several resonances are found below 1 kHz and the experimentally observed resonance frequency dependence on cantilever thickness and length are seen to agree well with published models which take the properties of the electrodes into account. It is found that bending resonances are also modulated by the width of the cantilever. Therefore, though the length and thickness control the resonance frequency most strongly, the actual realized value can be fine-tuned by changing cantilever width and the electrode material and its thickness. Further, all resonances display high piezoelectric coupling coefficients (keff, ranging between 0.2 - 0.35. The data presented here will be extremely useful in the design of sensors and actuators for a number of applications, since the combination of millimeter size scales and high piezoelectric sensitivities in the low audio range can be realized with this marriage of polymeric materials and cantilever geometries. Such an array of sensors can be used in cochlear implant applications, and when integrated with a resonance interrogation circuit can be used for the detection of low frequency vibrations of large structures. If appropriate mass/elasticity sensitive layers are coated on the electrodes, such a sensor can be used for the detection of a wide range of chemicals and biochemicals.

  7. Application of Advanced Electromagnetic Arrays to High Efficiency, High Bandwidth, Redundant Linear Actuators Project

    Data.gov (United States)

    National Aeronautics and Space Administration — There is a need to develop electromechanical actuators to improve performance beyond that of hydraulic devices currently being used in numerous aerospace and...

  8. Material Transport and Synthesis by Cantilever-free Scanning Probe Lithography

    Science.gov (United States)

    Liao, Xing

    Reliably synthesizing and transporting materials in nanoscale is the key question in many fields of nanotechnology. Cantilever-free scanning probe lithography, by replacing fragile and costly cantilevers with a robust and low cost elastomeric structure, fundamentally solved the low-throughput nature of scanning probe lithography, which has great potential to be a powerful and point-of-use tool for high throughput synthesis of various kinds of nanomaterials. Two nanolithographic methods, polymer pen lithography (PPL) and beam pen lithography (BPL), have been developed based on the cantilever-free architecture to directly deliver materials and transfer energy to substrates, respectively. The first portion of my thesis, including chapter two and chapter three, addresses major challenges remaining in the cantilever-free scanning probe lithographic techniques. Chapter two details the role of contact force in polymer pen lithography. A geometric model was developed to quantitatively explain the relationship between the z-piezo extension, the contact force and the resulted feature size. With such a model, force can be used as the in-situ feedback during the patterning and a new method for leveling the pen arrays was developed, which utilizes the total force between the pen arrays and the surface to achieve leveling with a tilt of less than 0.004°. In chapter three, massively multiplexed near-field photolithography has been demonstrated by combining BPL with a batch method to fabricate nanometer scale apertures in parallel fashion and a strategy to individually actuation of each pen in the pen array are discussed. This transformative combination enables one to writing arbitrary patterns composed of diffraction-unlimited features over square centimeter areas that are in registry with existing patterns and nanostructures, creating a unified tool for constructing and studying nanomaterials. The second portion of this thesis focuses on applications of cantilever-free scanning

  9. Numerical and Experimental Characterization of Fiber-Reinforced Thermoplastic Composite Structures with Embedded Piezoelectric Sensor-Actuator Arrays for Ultrasonic Applications

    Directory of Open Access Journals (Sweden)

    Klaudiusz Holeczek

    2016-02-01

    Full Text Available The paper presents preliminary numerical and experimental studies of active textile-reinforced thermoplastic composites with embedded sensor-actuator arrays. The goal of the investigations was the assessment of directional sound wave generation capability using embedded sensor-actuator arrays and developed a wave excitation procedure for ultrasound measurement tasks. The feasibility of the proposed approach was initially confirmed in numerical investigations assuming idealized mechanical and geometrical conditions. The findings were validated in real-life conditions on specimens of elementary geometry. Herein, the technological aspects of unique automated assembly of thermoplastic films containing adapted thermoplastic-compatible piezoceramic modules and conducting paths were described.

  10. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging

    National Research Council Canada - National Science Library

    Qiu, Yongqiang; Gigliotti, James V; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E M; Cochran, Sandy; Trolier-McKinstry, Susan

    2015-01-01

    .... Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays...

  11. A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array

    Science.gov (United States)

    Hu, Fangrong; Xu, Ningning; Wang, Weiming; Wang, Yue'e.; Zhang, Wentao; Han, Jiaguang; Zhang, Weili

    2016-02-01

    We experimentally demonstrate a dynamically tunable terahertz (THz) metamaterial absorber based on an electrostatic microelectromechanical systems (MEMS) actuator and electrical dipole resonator array. The absorption of the THz wave is mainly a result of the electrical dipole resonance, which shows a tunable performance on demand. By preforming the finite integral technique, we discovered that the central absorption frequency and the amplitude can be simultaneously tuned by the applied voltage U. Characterized by a white light interferometer and a THz time domain spectroscopy system, our THz absorber is measured to show a modulation of the central frequency and the amplitude to about 10% and 20%, respectively. The experimental results show good agreement with the simulation. This dynamically tunable absorber has potential applications on THz filters, modulators and controllers.

  12. Active Continuous-Flow Micromixer Using an External Braille Pin Actuator Array

    Directory of Open Access Journals (Sweden)

    Junichi Miwa

    2013-03-01

    Full Text Available We present a continuous-flow active micromixer based on channel-wall deflection in a polydimethylsiloxane (PDMS chip for volume flows in the range up to 2 μL s−1 which is intended as a novel unit operation for the microfluidic Braille pin actuated platform. The chip design comprises a main microchannel connected to a series of side channels with dead ends aligned on the Braille pins. Computer-controlled deflection of the side-channel walls induces chaotic advection in the main-channel, which substantially accelerates mixing in low-Reynolds number flow. Sufficient mixing (mixing index MI below 0.1 of volume flows up to 0.5 μL s−1 could be achieved within residence times ~500 ms in the micromixer. As an application, continuous dilution of a yeast cell sample by a ratio down to 1:10 was successfully demonstrated. The mixer is intended to serve as a component of bio-analytical devices or as a unit operation in the microfluidic Braille pin actuated platform.

  13. Cantilever Based Mass Sensing

    DEFF Research Database (Denmark)

    Dohn, Søren

    2007-01-01

    Cantilever based mass sensors utilize that a change in vibrating mass will cause a change in the resonant frequency. This can be used for very accurate sensing of adsorption and desorption processes on the cantilever surface. The change in resonant frequency caused by a single molecule depends...... on various parameters including the vibrating mass of the cantilever and the frequency at which it vibrates. The minimum amount of molecules detectable is highly dependent on the noise of the system as well as the method of readout. The aim of this Ph.D. thesis has been twofold: To develop a readout method...... suitable for a portable device and to investigate the possibility of enhancing the functionality and sensitivity of cantilever based mass sensors. A readout method based on the hard contact between the cantilever and a biased electrode placed in close proximity to the cantilever is proposed. The viability...

  14. Individually programmable cell stretching microwell arrays actuated by a Braille display.

    Science.gov (United States)

    Kamotani, Yoko; Bersano-Begey, Tommaso; Kato, Nobuhiro; Tung, Yi-Chung; Huh, Dongeun; Song, Jonathan W; Takayama, Shuichi

    2008-06-01

    Cell culture systems are often static and are therefore nonphysiological. In vivo, many cells are exposed to dynamic surroundings that stimulate cellular responses in a process known as mechanotransduction. To recreate this environment, stretchable cell culture substrate systems have been developed, however, these systems are limited by being macroscopic and low throughput. We have developed a device consisting of 24 miniature cell stretching chambers with flexible bottom membranes that are deformed using the computer-controlled, piezoelectrically actuated pins of a Braille display. We have also developed efficient image capture and analysis protocols to quantify morphological responses of the cells to applied strain. Human dermal microvascular endothelial cells (HDMECs) were found to show increasing degrees of alignment and elongation perpendicular to the radial strain in response to cyclic stretch at increasing frequencies of 0.2, 1, and 5 Hz, after 2, 4, and 12h. Mouse myogenic C2C12 cells were also found to align in response to the stretch, while A549 human lung adenocarcinoma epithelial cells did not respond to stretch.

  15. Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array

    Science.gov (United States)

    Adams, J. D.; Parrott, G.; Bauer, C.; Sant, T.; Manning, L.; Jones, M.; Rogers, B.; McCorkle, D.; Ferrell, T. L.

    2003-10-01

    The portability, compactness, price, and deployment of sensing systems are determined in large part by the power consumption and simplicity of the sensing platform used. We demonstrate a microcantilever chemical detection platform based on an array of piezoelectric microcantilevers. The sensor-element array power consumption, including actuation, is measured in nanowatts, with impedance of the order of megohms. This is four to five orders of magnitude lower power dissipation than current cantilever chemical detection platforms using optical or piezoresistive detection. The sensor is further characterized in the picowatt regime. The platform comprises three cantilevers wired in series, where variations in the resonant frequency and quality factor of selectively coated cantilevers, during successive impedance measurements, enable detection of ethanol vapor.

  16. Active Vibration Control of a Flexible Structure Using Piezoceramic Actuators

    Directory of Open Access Journals (Sweden)

    J. Fei

    2008-03-01

    Full Text Available Considerable attention has been devoted recently to active vibration control using intelligent materials as actuators. This paper presents results on active control schemes for vibration suppression of flexible steel cantilever beam with bonded piezoelectric actuators. The PZT patches are surface bonded near the fixed end of flexible steel cantilever beam. The dynamic model of the flexible steel cantilever beam is derived. Active vibration control methods, strain rate feedback control (SRF, positive position feedback control (PPF are investigated and implemented using xPC Target real-time system. Experimental results demonstrate that the SRF control and PPF control achieve effective vibration suppression results of steel cantilever beam.

  17. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio, E-mail: pablogarcia@us.es [Depto. de Electronica y Electromagnetismo, University of Sevilla (Spain)

    2011-06-23

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  18. An Intelligent Sensor Array Distributed System for Vibration Analysis and Acoustic Noise Characterization of a Linear Switched Reluctance Actuator

    Science.gov (United States)

    Salvado, José; Espírito-Santo, António; Calado, Maria

    2012-01-01

    This paper proposes a distributed system for analysis and monitoring (DSAM) of vibrations and acoustic noise, which consists of an array of intelligent modules, sensor modules, communication bus and a host PC acting as data center. The main advantages of the DSAM are its modularity, scalability, and flexibility for use of different type of sensors/transducers, with analog or digital outputs, and for signals of different nature. Its final cost is also significantly lower than other available commercial solutions. The system is reconfigurable, can operate either with synchronous or asynchronous modes, with programmable sampling frequencies, 8-bit or 12-bit resolution and a memory buffer of 15 kbyte. It allows real-time data-acquisition for signals of different nature, in applications that require a large number of sensors, thus it is suited for monitoring of vibrations in Linear Switched Reluctance Actuators (LSRAs). The acquired data allows the full characterization of the LSRA in terms of its response to vibrations of structural origins, and the vibrations and acoustic noise emitted under normal operation. The DSAM can also be used for electrical machine condition monitoring, machine fault diagnosis, structural characterization and monitoring, among other applications. PMID:22969364

  19. Thermal transport characteristics of human skin measured in vivo using ultrathin conformal arrays of thermal sensors and actuators.

    Directory of Open Access Journals (Sweden)

    R Chad Webb

    Full Text Available Measurements of the thermal transport properties of the skin can reveal changes in physical and chemical states of relevance to dermatological health, skin structure and activity, thermoregulation and other aspects of human physiology. Existing methods for in vivo evaluations demand complex systems for laser heating and infrared thermography, or they require rigid, invasive probes; neither can apply to arbitrary regions of the body, offers modes for rapid spatial mapping, or enables continuous monitoring outside of laboratory settings. Here we describe human clinical studies using mechanically soft arrays of thermal actuators and sensors that laminate onto the skin to provide rapid, quantitative in vivo determination of both the thermal conductivity and thermal diffusivity, in a completely non-invasive manner. Comprehensive analysis of measurements on six different body locations of each of twenty-five human subjects reveal systematic variations and directional anisotropies in the characteristics, with correlations to the thicknesses of the epidermis (EP and stratum corneum (SC determined by optical coherence tomography, and to the water content assessed by electrical impedance based measurements. Multivariate statistical analysis establishes four distinct locations across the body that exhibit different physical properties: heel, cheek, palm, and wrist/volar forearm/dorsal forearm. The data also demonstrate that thermal transport correlates negatively with SC and EP thickness and positively with water content, with a strength of correlation that varies from region to region, e.g., stronger in the palmar than in the follicular regions.

  20. An Intelligent Sensor Array Distributed System for Vibration Analysis and Acoustic Noise Characterization of a Linear Switched Reluctance Actuator

    Directory of Open Access Journals (Sweden)

    Maria Calado

    2012-06-01

    Full Text Available This paper proposes a distributed system for analysis and monitoring (DSAM of vibrations and acoustic noise, which consists of an array of intelligent modules, sensor modules, communication bus and a host PC acting as data center. The main advantages of the DSAM are its modularity, scalability, and flexibility for use of different type of sensors/transducers, with analog or digital outputs, and for signals of different nature. Its final cost is also significantly lower than other available commercial solutions. The system is reconfigurable, can operate either with synchronous or asynchronous modes, with programmable sampling frequencies, 8-bit or 12-bit resolution and a memory buffer of 15 kbyte. It allows real-time data-acquisition for signals of different nature, in applications that require a large number of sensors, thus it is suited for monitoring of vibrations in Linear Switched Reluctance Actuators (LSRAs. The acquired data allows the full characterization of the LSRA in terms of its response to vibrations of structural origins, and the vibrations and acoustic noise emitted under normal operation. The DSAM can also be used for electrical machine condition monitoring, machine fault diagnosis, structural characterization and monitoring, among other applications.

  1. An intelligent sensor array distributed system for vibration analysis and acoustic noise characterization of a linear switched reluctance actuator.

    Science.gov (United States)

    Salvado, José; Espírito-Santo, António; Calado, Maria

    2012-01-01

    This paper proposes a distributed system for analysis and monitoring (DSAM) of vibrations and acoustic noise, which consists of an array of intelligent modules, sensor modules, communication bus and a host PC acting as data center. The main advantages of the DSAM are its modularity, scalability, and flexibility for use of different type of sensors/transducers, with analog or digital outputs, and for signals of different nature. Its final cost is also significantly lower than other available commercial solutions. The system is reconfigurable, can operate either with synchronous or asynchronous modes, with programmable sampling frequencies, 8-bit or 12-bit resolution and a memory buffer of 15 kbyte. It allows real-time data-acquisition for signals of different nature, in applications that require a large number of sensors, thus it is suited for monitoring of vibrations in Linear Switched Reluctance Actuators (LSRAs). The acquired data allows the full characterization of the LSRA in terms of its response to vibrations of structural origins, and the vibrations and acoustic noise emitted under normal operation. The DSAM can also be used for electrical machine condition monitoring, machine fault diagnosis, structural characterization and monitoring, among other applications.

  2. Recent developments for the testing of Cherenkov Telescope Array mirrors and actuators in T\\"ubingen

    CERN Document Server

    ,

    2015-01-01

    The Cherenkov Telescope Array (CTA) is the next generation Cherenkov telescope facility. It will consist of a large number of segmented-mirror telescopes of three different diameters, placed in two locations, one in the northern and one in the southern hemisphere, thus covering the whole sky. The total number of mirror tiles will be on the order of 10,000, corresponding to a reflective area of ~10^4 m^2. The Institute for Astronomy and Astrophysics in T\\"ubingen (IAAT) is currently developing mirror control alignment mechanics, electronics, and software optimized for the medium sized telescopes. In addition, IAAT is participating in the CTA mirror prototype testing. In this paper we present the status of the current developments, the main results of recent tests, and plans for the production phase of the mirror control system. We also briefly present the T\\"ubingen facility for mirror testing.

  3. Flexure-based nanomagnetic actuators

    Science.gov (United States)

    Vasquez, Daniel James

    Nanometer-scale actuators powered through applied-magnetic fields have been designed, fabricated, and tested. These actuators consist of one or more ferromagnetic elements attached to a mechanical flexure. Two types of flexures were studied including a cantilever beam that is fixed on one end, and free on the other. The free end of the cantilever is attached to a, ferromagnetic element allowing a bending torque to be applied by a magnetic field. The second type of actuator design uses a set of torsion beams that are each anchored on one end, and attached to the magnetic element on the other end. The torsion beams are designed such that the application of a magnetic field will result in a twist along the long axis of the beam with little to no bending. The smallest fabricated and tested device is a cantilever-based ferromagnetic actuator that consists of a single 1.5-mum-long, 338-nm-wide, and 50-nm-thick nickel element, and a 2.2-mum-long, 110-nm-wide, and 30-nm-thick gold cantilever beam. A deflection of over 17° was measured for this actuator, while a similar one with a 10.1-mum long cantilever beam experienced measured deflections up to 57°. Torsion-based ferromagnetic actuators have been fabricated and tested with 110-nm-wide, and 50-rim-thick magnetic elements. Such magnetic elements contain only a single saturated magnetic domain. The ultimate scalability of ferromagnetic actuation is limited by the ability of thermal noise to affect the temporal stability of a nanometer-scale magnet. Theory to describe thermal noise and ultimate scalability of the ferromagnetic actuators has been developed. The size of the ferromagnetic actuators studied in this manuscript are smaller than most plant and animal cells. This enables the possibility of such actuators to manipulate a, living cell on an intracellular level. Other potential applications of such small actuators include MHz, to GHz frequency resonators, and tunable optical filters.

  4. ANALYSIS OF BEAMS WITH PIEZOELECTRIC ACTUATORS

    Institute of Scientific and Technical Information of China (English)

    林启荣; 刘正兴; 王宗利

    2001-01-01

    Based on the two-dimensional constitutive relationships of the piezoelectric material, an analytical solution for an intelligent beam excited by a pair of piezoelectric actuators is derived. With the solution the force and moment generated by two piezoelectric actuators and a pair of piezoelectric actuator/sensor are obtained. Examples of a cantilever piezoelectric laminated beam or a simply supported piezoelectric laminated beam, applied with voltages, are given.

  5. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

    Science.gov (United States)

    Acheli, A.; Serhane, R.

    2015-03-01

    This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.

  6. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

    Energy Technology Data Exchange (ETDEWEB)

    Acheli, A., E-mail: aacheli@cdta.dz; Serhane, R. [Centre de Développement des Technologies Avancées (CDTA). BP n°17 Baba Hassen, Alger (Algeria)

    2015-03-30

    This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.

  7. Actuation of polypyrrole nanowires

    Science.gov (United States)

    Lee, Alexander S.; Peteu, Serban F.; Ly, James V.; Requicha, Aristides A. G.; Thompson, Mark E.; Zhou, Chongwu

    2008-04-01

    Nanoscale actuators are essential components of the NEMS (nanoelectromechanical systems) and nanorobots of the future, and are expected to become a major area of development within nanotechnology. This paper demonstrates for the first time that individual polypyrrole (PPy) nanowires with diameters under 100 nm exhibit actuation behavior, and therefore can potentially be used for constructing nanoscale actuators. PPy is an electroactive polymer which can change volume on the basis of its oxidation state. PPy-based macroscale and microscale actuators have been demonstrated, but their nanoscale counterparts have not been realized until now. The research reported here answers positively the fundamental question of whether PPy wires still exhibit useful volume changes at the nanoscale. Nanowires with a 50 nm diameter and a length of approximately 6 µm, are fabricated by chemical polymerization using track-etched polycarbonate membranes as templates. Their actuation response as a function of oxidation state is investigated by electrochemical AFM (atomic force microscopy). An estimate of the minimum actuation force is made, based on the displacement of the AFM cantilever.

  8. Actuation of polypyrrole nanowires

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Alexander S; Peteu, Serban F; Ly, James V; Requicha, Aristides A G; Thompson, Mark E; Zhou Chongwu [Laboratory for Molecular Robotics, University of Southern California, Los Angeles, CA 90089 (United States)], E-mail: requicha@usc.edu

    2008-04-23

    Nanoscale actuators are essential components of the NEMS (nanoelectromechanical systems) and nanorobots of the future, and are expected to become a major area of development within nanotechnology. This paper demonstrates for the first time that individual polypyrrole (PPy) nanowires with diameters under 100 nm exhibit actuation behavior, and therefore can potentially be used for constructing nanoscale actuators. PPy is an electroactive polymer which can change volume on the basis of its oxidation state. PPy-based macroscale and microscale actuators have been demonstrated, but their nanoscale counterparts have not been realized until now. The research reported here answers positively the fundamental question of whether PPy wires still exhibit useful volume changes at the nanoscale. Nanowires with a 50 nm diameter and a length of approximately 6 {mu}m, are fabricated by chemical polymerization using track-etched polycarbonate membranes as templates. Their actuation response as a function of oxidation state is investigated by electrochemical AFM (atomic force microscopy). An estimate of the minimum actuation force is made, based on the displacement of the AFM cantilever.

  9. Actuation of polypyrrole nanowires.

    Science.gov (United States)

    Lee, Alexander S; Peteu, Serban F; Ly, James V; Requicha, Aristides A G; Thompson, Mark E; Zhou, Chongwu

    2008-04-23

    Nanoscale actuators are essential components of the NEMS (nanoelectromechanical systems) and nanorobots of the future, and are expected to become a major area of development within nanotechnology. This paper demonstrates for the first time that individual polypyrrole (PPy) nanowires with diameters under 100 nm exhibit actuation behavior, and therefore can potentially be used for constructing nanoscale actuators. PPy is an electroactive polymer which can change volume on the basis of its oxidation state. PPy-based macroscale and microscale actuators have been demonstrated, but their nanoscale counterparts have not been realized until now. The research reported here answers positively the fundamental question of whether PPy wires still exhibit useful volume changes at the nanoscale. Nanowires with a 50 nm diameter and a length of approximately 6 µm, are fabricated by chemical polymerization using track-etched polycarbonate membranes as templates. Their actuation response as a function of oxidation state is investigated by electrochemical AFM (atomic force microscopy). An estimate of the minimum actuation force is made, based on the displacement of the AFM cantilever.

  10. Design and optimization of cantilevered magnetostrictive film-substrate microactuator

    Institute of Scientific and Technical Information of China (English)

    B.; Narsu; YUN; GuoHong; RONG; JianHong

    2007-01-01

    The exact solution for the bending problem of a free-end point loaded films-ubstrate cantilever with arbitrary film-to-substrate thickness ratio is obtained by using the basic mechanical equilibrium equation. And then the problem of design and optimization for microactuator buildup of film-substrate cantilever is discussed by taking into account the effect of geometrical and physical parameters of the cantilever components. Furthermore, the optimal condition for actuator application is presented and some theoretical problems are clarified. The results show that, in general, the greater the film-to-substrate thickness ratio, the higher the ability of taking load, namely the larger the exerted force of the cantilever when the thickness of substrate is kept constant. When the total thickness of the cantilever is kept constant, however, the free-end exerted force will experience a maximum and this maximum value of the exerted force will decrease with the increasing film-to-sub- strate stiffness ratio. Meanwhile, the optimal thickness ratio corresponding to this maximum exerted force also decreases with the increasing stiffness ratio. Whether for the cases of fixed substrate or fixed total thickness, the influence of Poisson's ratio of two cantilever components on the exerted force is remarkable, and should not be neglected.

  11. MEMS fluidic actuator

    Science.gov (United States)

    Kholwadwala, Deepesh K.; Johnston, Gabriel A.; Rohrer, Brandon R.; Galambos, Paul C.; Okandan, Murat

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  12. Piezoresistive cantilever force-clamp system

    Energy Technology Data Exchange (ETDEWEB)

    Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L. [Department of Mechanical Engineering, Stanford University, Stanford, California 94305 (United States); Goodman, Miriam B. [Department of Molecular and Cellular Physiology, Stanford University, Stanford, California 94305 (United States)

    2011-04-15

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.

  13. Properties of Miniature Cantilever-Type Ultrasonic Motor Using Lead-Free Array-Type Multilayer Piezoelectric Ceramics of (Sr,Ca)2NaNb5O15 under High Input Power

    Science.gov (United States)

    Doshida, Yutaka; Shimizu, Hiroyuki; Mizuno, Youich; Tamura, Hideki

    2012-07-01

    The properties of miniature cantilever-type ultrasonic motors using lead-free array-type multilayer piezoelectric ceramics of (Sr,Ca)2NaNb5O15 (SCNN) developed using the design rule were investigated under high input power by comparison with the high-power properties of SCNN ceramics. The frequency dependence of the revolution speed reflected the nonlinear behavior of SCNN ceramics with the hard-spring effect and showed a mirror-reversed image relative to that of the motor of Pb(Zr,Ti)O3 (PZT) ceramics. The output power increased linearly with increasing input power up to 110 mW without heat generation, and the driving properties were almost the same as the expectations under low input power. The output power density characteristics of the motors were high in comparison with those of the commercialized motors of PZT ceramics. It appeared that the motors have a high potential as an environmental friendly piezoelectric device with excellent properties, reflecting the high-power properties of SCNN ceramics.

  14. Flexible Zinc-Tin Oxide Thin Film Transistors Operating at 1 kV for Integrated Switching of Dielectric Elastomer Actuators Arrays.

    Science.gov (United States)

    Marette, Alexis; Poulin, Alexandre; Besse, Nadine; Rosset, Samuel; Briand, Danick; Shea, Herbert

    2017-08-01

    Flexible high-voltage thin-film transistors (HVTFTs) operating at more than 1 kV are integrated with compliant dielectric elastomer actuators (DEA) to create a flexible array of 16 independent actuators. To allow for high-voltage operation, the HVTFT implements a zinc-tin oxide channel, a thick dielectric stack, and an offset gate. At a source-drain bias of 1 kV, the HVTFT has a 20 µA on-current at a gate voltage bias of 30 V. Their electrical characteristics enable the switching of DEAs which require drive voltages of over 1 kV, making control of an array simpler in comparison to the use of external high-voltage switching. These HVTFTs are integrated in a flexible haptic display consisting of a 4 × 4 matrix of DEAs and HVTFTs. Using a single 1.4 kV supply, each DEA is independently switched by its associated HVTFT, requiring only a 30 V gate voltage for full DEA deflection. The 4 × 4 display operates well even when bent to a 5 mm radius of curvature. By enabling DEA switching at low voltages, flexible metal-oxide HVTFTs enable complex flexible systems with dozens to hundreds of independent DEAs for applications in haptics, Braille displays, and soft robotics. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  15. 静电驱动的亚微米悬臂梁谐振器非线性特性%Nonlinear characteristics of sub-micron cantilever beam resonators actuated by statical electricity

    Institute of Scientific and Technical Information of China (English)

    岳东旭; 于虹; 袁卫民

    2011-01-01

    理论分析了亚微米尺寸的悬臂梁结构的非线性力学模型,研究了非线性产生的物理机制.采用外部静电激励机制,使悬臂梁谐振器产生谐振,借助Polytec激光多普勒测振系统检测了悬臂梁的频率响应曲线.测试结果表明,悬臂梁具有显著的非线性效应(即"弹簧变软"效应).实验证实了这种非线性效应几乎和交流电压无关,却随着直流电压的增大而显著增大,最大峰值偏移达到0.5 MHz.提取出3组-阶机械弹性系数分别为79.62,31.75和14.92 N/m,实验结果符合理论规律.对实验中的偏差做了进-步的分析和讨论,利用软件ANSYS对过腐蚀对结构刚度和频率响应的影响做了相应的模拟,结果和实验测量数据相吻合.%A nonlinear mechanical model for sub-micron cantilevers was analyzed in detail and its physical mechanism was researched to provide a theoretical basis for experiments. The electrostatical force was used to achieve the resonance state cantilever beams and a Polytec laser Doppler vibration measurement system was taken to observe the frequency response curve. Experimental results show that the beams have significant nonlinear effects (the spring softening effect) and the nonlinearity is relatively independent on the AC voltage, but it is markedly enhanced with increasing the DC voltage.The obtained maximum peak shift is 0. 5 MHz and extracted first-order mechanical elasticity coefficients are 79.62, 31.75, and 14.92 N/m, respectively. Furthermore,the deviation of the experiment was also disccussed and analyzed. The effects of overetching by wet chemical etching on the stiffness and frequency response were stimulated by ANSYS software. In conclusion, the corresponding simulation results are well coincident with the experimental data.

  16. Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever.

    Science.gov (United States)

    Abdulla, S M C; Kauppinen, L J; Dijkstra, M; de Boer, M J; Berenschot, E; Jansen, H V; de Ridder, R M; Krijnen, G J M

    2011-08-15

    The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately position them near the evanescent field of the resonator. Using electrostatic actuation, moving the cantilevers into this evanescent field, the propagation properties of the ring waveguide are modulated. We demonstrate 122 pm tuning of the resonance wavelength of the optical ring resonator (in the optical C-band) without change of the optical quality factor, on application of 9 V to a 40 µm long cantilever. This compact integrated device can be used for tuning/switching a specific wavelength, with very little energy for operation and negligible cross talk with surrounding devices.

  17. Polymeric Micro-channel-based Functionalisation System for Micro-Cantilevers

    DEFF Research Database (Denmark)

    Nordström, Maria; Gomez, Montserrat; Boisen, Anja

    2005-01-01

    A micro-channel system intended for functionalising micro-cantilevers used for biochemical detection has been designed, realised and characterised. The chip is fabricated in the resist SU-8, which is a photosensitive polymer offering a fast, cost-efficient and easy processing. Cantilevers present...... a new platform for biochemical detection with a high sensitivity. This micro-channel system is used for treating such a cantilever array with probe molecules prior to detection and it can also be used as the analysis set-up. The design of the micro-channel system provides a simple way of coating...... separate sections of a cantilever array with different probe molecules. The use of this channel system eliminates the time-consuming step of addressing each cantilever individually to obtain an array functionalised with different probe molecules. Using this micro-channel system in combination...

  18. Modeling and optimal design of multilayer thermal cantilever microactuators

    Institute of Scientific and Technical Information of China (English)

    2009-01-01

    A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived.The sim-plified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters.Experiment is performed,the modeled and experimental results demonstrate the validity of the model,and it also indicates that Young’s module makes great contribution to the deflection;therefore,thin layers cannot be ignored arbitrarily.

  19. Fast nanotopography imaging using a high speed cantilever with integrated heater-thermometer.

    Science.gov (United States)

    Lee, Byeonghee; Somnath, Suhas; King, William P

    2013-04-05

    This paper presents a high speed tapping cantilever with an integrated heater-thermometer for fast nanotopography imaging. The cantilever is much smaller and faster than previous heated cantilevers, with a length of 35 μm and a resonant frequency of 1.4 MHz. The mechanical response time is characterized by scanning over a backward-facing step of height 20 nm. The mechanical response time is 77 μs in air and 448 μs in water, which compares favorably to the fastest commercial cantilevers that do not have integrated heaters. The doped silicon cantilever is designed with an integrated heater that can heat and cool in about 10 μs and can operate in both air and water. We demonstrate standard laser-based topography imaging along with thermal topography imaging, when the cantilever is actuated via the piezoelectric shaker in an atomic force microscope system and when it is actuated by Lorentz forces. The cantilever can perform thermal topography imaging in tapping mode with an imaging resolution of 7 nm at a scan speed of 1.46 mm s(-1).

  20. Nonlinear resonances of a single-wall carbon nanotube cantilever

    Science.gov (United States)

    Kim, I. K.; Lee, S. I.

    2015-03-01

    The dynamics of an electrostatically actuated carbon nanotube (CNT) cantilever are discussed by theoretical and numerical approaches. Electrostatic and intermolecular forces between the single-walled CNT and a graphene electrode are considered. The CNT cantilever is analyzed by the Euler-Bernoulli beam theory, including its geometric and inertial nonlinearities, and a one-mode projection based on the Galerkin approximation and numerical integration. Static pull-in and pull-out behaviors are adequately represented by an asymmetric two-well potential with the total potential energy consisting of the CNT elastic energy, electrostatic energy, and the Lennard-Jones potential energy. Nonlinear dynamics of the cantilever are simulated under DC and AC voltage excitations and examined in the frequency and time domains. Under AC-only excitation, a superharmonic resonance of order 2 occurs near half of the primary frequency. Under both DC and AC loads, the cantilever exhibits linear and nonlinear primary and secondary resonances depending on the strength of the excitation voltages. In addition, the cantilever has dynamic instabilities such as periodic or chaotic tapping motions, with a variation of excitation frequency at the resonance branches. High electrostatic excitation leads to complex nonlinear responses such as softening, multiple stability changes at saddle nodes, or period-doubling bifurcation points in the primary and secondary resonance branches.

  1. Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

    Energy Technology Data Exchange (ETDEWEB)

    Bijster, R. J. F., E-mail: roy.bijster@tno.nl; Vreugd, J. de [Department of Optomechatronics, TNO, Stieltjesweg 1, 2628 CK Delft (Netherlands); Sadeghian, H. [Department of Optomechatronics, TNO, Stieltjesweg 1, 2628 CK Delft (Netherlands); Department of Precision and Microsystems Engineering, Delft University of Technology, 2628 CD Delft (Netherlands)

    2014-08-18

    In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted.

  2. Annular-force-based variable curvature mirror combined with multi-point actuation array to improve the surface figure accuracy: a prototype design

    Science.gov (United States)

    Zhao, Hui; Xie, Xiaopeng; Ren, Guorui; Du, Yunfei; Liu, Meiying; Wei, Jingxuan

    2016-10-01

    In recent years, a novel optical zooming technique has been paid much attention. With the help of optical leveraging effect, it is possible to alter the system focal length dramatically without moving elements involved in by only changing the curvature radius of VCM (variable curvature mirror) slightly. With no doubt, VCM is the key to realize non-moving element optical zooming and it has to provide large enough saggitus variation while still maintaining the high surface figure accuracy to ensure high quality imaging. In our previously published paper, an annular force based VCM has been designed, fabricated and tested. Experiments demonstrate that with the aperture of 100mm and thickness of 2mm, the VCM could generate a large saggitus variation exceeding 30λ (λ=632.8nm). However, the optical quality degrades very fast and this makes such a VCM unsuitable for optical imaging in visible band. Therefore in this manuscript, a multipoint actuation array, which is composed of totally 49 piezoelectric actuators, is embedded into the annular structure to aim to correct the surface figure distortion caused by large saggitus variation. The new structure model has been designed and numerical simulation indicates that the surface figure distortion could be well corrected as long as the degraded surface figure accuracy is better than 1.8λ (λ=632.8nm) (RMS). Based on this, a new prototype VCM is being fabricated and intermediate results are reported here.

  3. Design Optimization of Cantilever Based MEMS Micro-accelerometer for High-g Applications

    Directory of Open Access Journals (Sweden)

    B. D. PANT

    2009-11-01

    Full Text Available Design optimization study of micro-cantilever based MEMS accelerometer is presented in this paper. The cantilever structure is dc biased with an ac signal to extract output voltage generated due to the change in capacitance. This signal modifies the behavior of the sensing element. The cantilever performance under a combined inertial and electrostatic force has been considered for estimating the dimensional dependence of cantilever sensitivity, non-linearity, off-set and critical acceleration and operating voltages. The cantilever performance has been verified using ANSYSTM Multiphysics software. Finally, a micro-accelerometer based on an array of 15 cantilevers has been designed and fabricated with a high sensitivity of 3 - 4 mV/g with a non-linearity of < 1 % for high-g (50 g applications.

  4. Attitude and vibration control of a satellite containing flexible solar arrays by using reaction wheels, and piezoelectric transducers as sensors and actuators

    Science.gov (United States)

    da Fonseca, Ijar M.; Rade, Domingos A.; Goes, Luiz C. S.; de Paula Sales, Thiago

    2017-10-01

    The primary purpose of this paper is to provide insight into control-structure interaction for satellites comprising flexible appendages and internal moving components. The physical model considered herein aiming to attend such purpose is a rigid-flexible satellite consisting of a rigid platform containing two rotating flexible solar panels. The solar panels rotation is assumed to be in a sun-synchronous configuration mode. The panels contain surface-bonded piezoelectric patches that can be used either as sensors for the elastic displacements or as actuators to counteract the vibration motion. It is assumed that in the normal mode operation the satellite platform points towards the Earth while the solar arrays rotate so as to follow the Sun. The vehicle moves in a low Earth polar orbit. The technique used to obtain the mathematical model combines the Lagrangian formulation with the Finite Elements Method used to describe the dynamics of the solar panel. The gravity-gradient torque as well as the torque due to the interaction of the Earth magnetic field and the satellite internal residual magnetic moment is included as environmental perturbations. The actuators are three reaction wheels for attitude control and piezoelectric actuators to control the flexible motion of the solar arrays. Computer simulations are performed using the MATLAB® software package. The following on-orbit satellite operating configurations are object of analysis: i) Satellite pointing towards the Earth (Earth acquisition maneuver) by considering the initial conditions in the elastic displacement equal to zero, aiming the assessment of the flexible modes excitation by the referred maneuver; ii) the satellite pointing towards the Earth with the assumption of an initial condition different from zero for the flexible motion such that the attitude alterations are checked against the elastic motion disturbance; and iii) attitude acquisition accomplished by taking into account initial conditions

  5. Multifunctionalized cantilever systems for electronic nose applications.

    Science.gov (United States)

    Yoo, Yong Kyoung; Chae, Myung-Sic; Kang, Ji Yoon; Kim, Tae Song; Hwang, Kyo Seon; Lee, Jeong Hoon

    2012-10-02

    Multiple target detection using a cantilever is essential for biosensor, chemical sensor, and electronic nose systems. We report a novel microcantilever array chip that includes four microreaction chambers in a chip, which consequently contains four different functionalized surfaces for multitarget detection. For model tests, we designed microcantilever chips and demonstrated the ability of binding of 2,4-dinitrotoluene (DNT) targets onto four different surfaces. We used peptide receptors that are known to have highly selective binding. By simply using four microreaction chambers, we immobilized DNT specific peptide (HPNFSKYILHQRC; SP), DNT nonspecific peptide (TSMLLMSPKHQAC; NSP), and self-assembled monolayer (SAM) as well as a bare cantilever. After flowing DNT gases through the cantilever chip, we could monitor the four different binding signals simultaneously. The shifts in NSP provided information as a negative control because it contained information of temperature fluctuations and mechanical vibration from gas flow. By utilizing the differential signal of the SP and NSP, we acquired 7.5 Hz in resonant responses that corresponds with 160 part per billion (ppb) DNT concentration, showing the exact binding response by eliminating the inevitable thermal noise, vibration noise, as well as humidity effects on the peptide surface.

  6. Biosensors based on cantilevers.

    Science.gov (United States)

    Alvarez, Mar; Carrascosa, Laura G; Zinoviev, Kiril; Plaza, Jose A; Lechuga, Laura M

    2009-01-01

    Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in diverse fields, such as genomic or proteomic, because of the biosensor flexibility, the low sample consumption, and the non-pretreated samples required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an example. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.

  7. Design and optimization of voice coil actuator for six degree of freedom active vibration isolation system using Halbach magnet array.

    Science.gov (United States)

    Kim, MyeongHyeon; Kim, Hyunchang; Gweon, Dae-Gab

    2012-10-01

    This paper describes the design, modeling, optimization, and validation of an active vibration isolation system using a voice coil motor. The active vibration isolating method was constructed with a passive isolator and an active isolator. A spring was used for passive isolating; an actuator was used for active isolating. The proposed active vibration isolation system (AVIS) can isolate disturbances for many kinds of instruments. Until now, developed AVIS were able to isolate a six degree-of-freedom disturbance effectively. This paper proposes the realization of such a six degree-of-freedom active vibration isolation system that can work as a bench top device for precision measuring machines such as atomic force microscope, scanning probe microscope, etc.

  8. Optimization of sensitivity and noise in piezoresistive cantilevers

    DEFF Research Database (Denmark)

    Yu, Xiaomei; Thaysen, Jacob; Hansen, Ole;

    2002-01-01

    In this article, the sensitivity and the noise of piezoresistive cantilevers were systematically investigated with respect to the piezoresistor geometry, the piezoresistive materials, the doping dose, the annealing temperature, and the operating biased voltage. With the noise optimization results......, dimension optimized array cantilevers were designed and fabricated by using single-crystal silicon, low-pressure chemical-vapor deposition (LPCVD) amorphous silicon and microcrystalline silicon as piezoresistive layers. Measurement results have shown that the smallest Hooge factor (alpha) was 3.2x10...

  9. Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities

    Energy Technology Data Exchange (ETDEWEB)

    Torello, D.; Degertekin, F. Levent, E-mail: levent.degertekin@me.gatech.edu [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332 (United States)

    2013-11-15

    A new method of actuating atomic force microscopy (AFM) cantilevers is proposed in which a high frequency (>5 MHz) wave modulated by a lower frequency (∼300 kHz) wave passes through a contact acoustic nonlinearity at the contact interface between the actuator and the cantilever chip. The nonlinearity converts the high frequency, modulated signal to a low frequency drive signal suitable for actuation of tapping-mode AFM probes. The higher harmonic content of this signal is filtered out mechanically by the cantilever transfer function, providing for clean output. A custom probe holder was designed and constructed using rapid prototyping technologies and off-the-shelf components and was interfaced with an Asylum Research MFP-3D AFM, which was then used to evaluate the performance characteristics with respect to standard hardware and linear actuation techniques. Using a carrier frequency of 14.19 MHz, it was observed that the cantilever output was cleaner with this actuation technique and added no significant noise to the system. This setup, without any optimization, was determined to have an actuation bandwidth on the order of 10 MHz, suitable for high speed imaging applications. Using this method, an image was taken that demonstrates the viability of the technique and is compared favorably to images taken with a standard AFM setup.

  10. Active vibration control of flexible cantilever plates using piezoelectric materials and artificial neural networks

    Science.gov (United States)

    Abdeljaber, Osama; Avci, Onur; Inman, Daniel J.

    2016-02-01

    The study presented in this paper introduces a new intelligent methodology to mitigate the vibration response of flexible cantilever plates. The use of the piezoelectric sensor/actuator pairs for active control of plates is discussed. An intelligent neural network based controller is designed to control the optimal voltage applied on the piezoelectric patches. The control technique utilizes a neurocontroller along with a Kalman Filter to compute the appropriate actuator command. The neurocontroller is trained based on an algorithm that incorporates a set of emulator neural networks which are also trained to predict the future response of the cantilever plate. Then, the neurocontroller is evaluated by comparing the uncontrolled and controlled responses under several types of dynamic excitations. It is observed that the neurocontroller reduced the vibration response of the flexible cantilever plate significantly; the results demonstrated the success and robustness of the neurocontroller independent of the type and distribution of the excitation force.

  11. Nonlinearity in nanomechanical cantilevers

    DEFF Research Database (Denmark)

    Villanueva Torrijo, Luis Guillermo; Karabalin, R. B.; Matheny, M. H.

    2013-01-01

    Euler-Bernoulli beam theory is widely used to successfully predict the linear dynamics of micro-and nanocantilever beams. However, its capacity to characterize the nonlinear dynamics of these devices has not yet been rigorously assessed, despite its use in nanoelectromechanical systems development....... These findings underscore the delicate balance between inertial and geometric nonlinear effects in the fundamental mode, and strongly motivate further work to develop theories beyond the Euler-Bernoulli approximation. DOI: 10.1103/PhysRevB.87.024304....... In this article, we report the first highly controlled measurements of the nonlinear response of nanomechanical cantilevers using an ultralinear detection system. This is performed for an extensive range of devices to probe the validity of Euler-Bernoulli theory in the nonlinear regime. We find that its...

  12. Electrothermally driven high-frequency piezoresistive SiC cantilevers for dynamic atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Boubekri, R.; Cambril, E.; Couraud, L.; Bernardi, L.; Madouri, A. [LPN, CNRS-UPR20, route de Nozay, 91460 Marcoussis (France); Portail, M. [Centre de Recherche sur l' Hetero-Epitaxie et ses Applications CNRS, Rue Bernard Gregory, 06560 Valhonne (France); Chassagne, T.; Moisson, C.; Zielinski, M. [NOVASiC, Savoie Technolac, Arche bât 4, BP 267, 73375 Le Bourget du Lac Cedex (France); Jiao, S.; Michaud, J.-F.; Alquier, D. [Université François Rabelais, Tours, GREMAN, CNRS-UMR7347, 16 rue Pierre et Marie Curie, BP 7155, 37071 Tours Cedex 2 (France); Bouloc, J.; Nony, L.; Bocquet, F.; Loppacher, C. [IM2NP-CNRS/Aix-Marseille University, 38 rue Frédéric Joliot-Curie, 13451 Marseille (France); Martrou, D.; Gauthier, S., E-mail: gauthier@cemes.fr [CEMES, CNRS UPR 8011 et Université de Toulouse, 29 rue Jeanne Marvig, 31055 Toulouse (France)

    2014-08-07

    Cantilevers with resonance frequency ranging from 1 MHz to 100 MHz have been developed for dynamic atomic force microscopy. These sensors are fabricated from 3C-SiC epilayers grown on Si(100) substrates by low pressure chemical vapor deposition. They use an on-chip method both for driving and sensing the displacement of the cantilever. A first gold metallic loop deposited on top of the cantilever is used to drive its oscillation by electrothermal actuation. The sensing of this oscillation is performed by monitoring the resistance of a second Au loop. This metallic piezoresistive detection method has distinct advantages relative to more common semiconductor-based schemes. The optimization, design, fabrication, and characteristics of these cantilevers are discussed.

  13. Chemical sensor with oscillating cantilevered probe

    Science.gov (United States)

    Adams, Jesse D

    2013-02-05

    The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

  14. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

    Directory of Open Access Journals (Sweden)

    Zheng You

    2010-07-01

    Full Text Available Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF. A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF. A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.

  15. Cantilever sensors: Nanomechanical tools for diagnostics

    DEFF Research Database (Denmark)

    Datar, R.; Kim, S.; Jeon, S.

    2009-01-01

    Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science...... and microfabrication technology for the label-free detection of biological molecules, allowing miniaturization. Molecular adsorption, when restricted to a single side of a deformable cantilever beam, results in measurable bending of the cantilever. This nanoscale deflection is caused by a variation in the cantilever...

  16. Design, modeling, and fabrication of piezoelectric polymer actuators

    Science.gov (United States)

    Fu, Yao; Harvey, Erol C.; Ghantasala, Muralidhar K.; Spinks, Geoff

    2004-04-01

    Piezoelectric polymers are a class of materials with great potential and promise for many applications. Because of their ideally suitable characteristics, they make good candidates for actuators. However, the difficulty of forming structures and shapes has limited the range of mechanical design. In this work, the design and fabrication of a unimorph piezoelectric cantilever actuator using piezoelectric polymer PVDF with an electroplated layer of nickel alloy has been described. The modeling and simulation of the composite cantilever with planar and microstructured surfaces has been performed by CoventorWare to optimize the design parameters in order to achieve large tip deflections. These simulation results indicated that a microstructured cantilever could produce 25 percent higher deflection compared to a simple planar cantilever surface. The tip deflection of the composite cantilever with a length of 6mm and a width of 1mm can reach up to 100μm. A PVDF polymer with a specifically designed shape was punched out along the elongation direction on the embossing machine at room temperature. The nickel alloy layer was electroplated on one side of the PVDF to form a composite cantilever. The tip deflection of the cantilever was observed and measured under an optical microscope. The experimental result is in agreement with the theoretical analysis.

  17. Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response

    CERN Document Server

    Rollier, A -S; Legrand, B; Collard, D; Buchaillot, L

    2007-01-01

    This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in microfluidics requiring either binary state actuation (e.g. pumps, valves) or continuous displacements over the whole gap (e.g. microtweezers). In dynamic mode, actuators like micro-cantilevers present a great interest for Atomic Force Microscopy (AFM) in liquids. As this application requires a good understanding of the cantilever resonance frequency and Q-factor, an analytical modeling in liquid environment has been established. The theoretically derived curves are validated by experimental results using a nitride encapsulated cantilever with integrated electrostatic actuation. Electrode potential screening and undesirable ...

  18. ACTIVE VIBRATION SUPPRESSION VIA LINEARIZING HYSTERESIS OF PIEZOCERAMIC ACTUATORS

    Institute of Scientific and Technical Information of China (English)

    HU Hong; SHI Hongyan; BEN MRAD Ridha

    2007-01-01

    A novel active Vibration control technique on the basis of linearized piezoelectric actuators is presented. An experimental apparatus consisting of a cantilever beam to which are attached strain patches and piezoceramic actuators to be used for active Vibration suppression is described. A dynamical model of the cantilever beam using Lagrange's equation and two coordinate Systems are presented. Based on the Lyapunov's direct method, an active Vibration Controller with hysteresis compensation is designed. The Controller is designed so that it guarantees the global stability of the overall System. The Controller developed is assessed experimentally.

  19. Impact drive rotary precision actuator with piezoelectric bimorphs

    Institute of Scientific and Technical Information of China (English)

    Hongzhuang ZHANG; Ping ZENG; Shunming HUA; Guangming CHENG; Zhigang YANG

    2008-01-01

    An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorphs, a specific fixed-frequency and adjustable-amplitude is confirmed to control the actua-tor. The results show that an actuator excited by fixed-frequency and the adjustable-amplitude ramp voltage waveform works with a large travel range (180°), high resolution (1 μrad), speed (0.2 rad/min) and heavy-load ability (0.02 Nm). With advantages of high-precision positioning ability, simple structure and only one percent the cost of traditional impact drive mechanisms, the actuator is expected to be widely used in precision industries.

  20. Smart actuators for active vibration control

    Science.gov (United States)

    Pourboghrat, Farzad; Daneshdoost, Morteza

    1998-07-01

    In this paper, the design and implementation of smart actuators for active vibration control of mechanical systems are considered. A smart actuator is composed of one or several layers of piezo-electric materials which work both as sensors and actuators. Such a system also includes micro- electronic or power electronic amplifiers, depending on the power requirements and applications, as well as digital signal processing systems for digital control implementation. In addition, PWM type micro/power amplifiers are used for control implementation. Such amplifiers utilize electronic switching components that allow for miniaturization, thermal efficiency, cost reduction, and precision controls that are robust to disturbances and modeling errors. An adaptive control strategy is then developed for vibration damping and motion control of cantilever beams using the proposed smart self-sensing actuators.

  1. Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS

    Science.gov (United States)

    Brand, Uwe; Gao, Sai; Engl, Wolfgang; Sulzbach, Thomas; Stahl, Stefan W.; Milles, Lukas F.; Nesterov, Vladimir; Li, Zhi

    2017-03-01

    PTB has developed a new contact based method for the traceable calibration of the normal stiffness of AFM cantilevers in the range from 0.03 N m‑1 to 300 N m‑1 to the SI units based on micro-electro-mechanical system (MEMS) actuators. This method is evaluated by comparing the measured cantilever stiffness with that measured by PTB’s new primary nanonewton force facility and by PTB’s microforce measuring device. The MEMS system was used to calibrate the stiffness of cantilevers in two case studies. One set of cantilevers for applications in biophysics was calibrated using the well-known thermal vibration method and the second set of cantilevers was calibrated by a cantilever manufacturer who applied an improved thermal vibration method based on calibrated reference cantilevers for the cantilever stiffness calibration. The comparison revealed a stiffness deviation of  +7.7% for the cantilevers calibrated using the thermal vibration method and a deviation of  +6.9% for the stiffnesses of the cantilevers calibrated using the improved thermal vibration method.

  2. Probing Mechanical Resonances in Cantilevered Coiled Carbon Nanowires

    Science.gov (United States)

    Saini, Deepika; Dickel, Doyl; Behlow, Herbert; Pillai, Balu; Yang, Keqin; Skove, Malcolm; Serkiz, Steven; Rao, Apparao; Clemson University Team; Savannah River National Laboratory Team

    2013-03-01

    Helically coiled carbon nanowires (CCNW) and nanotubes are promising elements for use in MEMS/NEMS devices and nanorobotics, as nano-inductors and sensors, and for impact protection (e.g. Bell et al. 2007 IEEE International Conference, J. Appl. Phys. 100, 064309 (2006)). Understanding and characterizing their mechanical resonance behavior is essential for the reliability in applications. In this study, we have electrically actuated an individual CCNW in a diving-board cantilever configuration inside a scanning electron microscope, and electrically detected its mechanical resonance modes. By oscillation at low frequency we confirmed the induced-charge actuation mechanism. Among the modes we observed, some appeared to have both axial and lateral components. We also observed closely spaced resonance modes which we attribute to the splitting of degenerate modes, consistent with our COMSOL simulations. We suggest that the helical morphology facilitates inter-mode coupling that results in the observed complex resonance behavior.

  3. Nonlinear dynamics of nanoelectromechanical cantilevers based on nanowire piezoresistive detection

    Directory of Open Access Journals (Sweden)

    Baguet S.

    2012-07-01

    Full Text Available The nonlinear dynamics of in-plane nanoelectromechanical cantilevers based on silicon nanowire piezoresistive detection is investigated using a comprehensive analytical model that remains valid up to large displacements in the case of electrostatic actuation. This multiphysics model takes into account geometric, inertial and electrostatic nonlinearities as well as the fringing field effects which are significant for thin resonators. The bistability as well as multistability limits are considered in order to provide close-form expressions of the critical amplitudes. Third order nonlinearity cancellation is analytically inspected and set via an optimal DC drive voltage which permits the actuation of the NEMS beyond its critical amplitude. It may result on a large enhancement of the sensor performances by driving optimally the nanocantilever at very large amplitude, while suppressing the hysteresis.

  4. Cantilever-like micromechanical sensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest

    2011-01-01

    The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has...... increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus...... on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection....

  5. Cantilever sensors: Nanomechanical tools for diagnostics

    DEFF Research Database (Denmark)

    Datar, R.; Kim, S.; Jeon, S.;

    2009-01-01

    Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science and microfab...

  6. Highly Sensitive Polymer-based Cantilever-sensors for DNA Detection

    DEFF Research Database (Denmark)

    Gomez, Montserrat; Nordström, Maria; Alvarez, M.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel poly...

  7. Experimental study on strain distribution of ionic polymer-metal composite actuator using digital image correlation

    Science.gov (United States)

    Liu, Hongguang; Xiong, Ke; Wang, Man; Bian, Kan; Zhu, Kongjun

    2017-02-01

    Ionic polymer-metal composite (IPMC) cantilever actuators demonstrate significant bending deformation upon application of excitation voltage across the electrodes. In this paper a cantilever beam shaped IPMC actuator with platinum (Pt) electrodes is fabricated to investigate the micro-scale lateral deformation behavior under DC voltages using a digital microscope to measure the deformation. The digital image correlation (DIC) method is utilized to analyze the displacement and strain fields of the sample. The experimental results indicate that the longitudinal normal strain is linearly distributed along the thickness direction and the strain gradient is approximately exponential with excitation voltage. The amplitude of the transverse strain is bigger than the longitudinal strain, and the strains are also found to decrease along the length direction of the IPMC cantilever actuator. The longitudinal and transverse normal strains of the IPMC actuator under DC voltages are compressive strains due to water loss effect in the air.

  8. Modelling of a cantilever non-symmetric piezoelectric bimorph

    Science.gov (United States)

    Brissaud, Michel; Ledren, Sarah; Gonnard, P.

    2003-11-01

    The aim of this paper is the modelling of a non-symmetric bimorph constituted by a piezoelectric material deposited on an alumina substrate and used either as an actuator or a sensor. Theoretical modelling based on the flexural modes of the structure is carried out and the influence of the electrode characteristics (geometrical dimensions and elastic parameters) is introduced in the modelling for calculating the bimorph bending displacement. In actuator mode, the electrical admittance of the cantilever non-symmetric bimorph is stated and the intrinsic electromechanical coupling factor linked to the bimorph bending motion is deduced and compared with that defined in IEEE Standards. The analytical modelling was used for characterizing a cantilever bimorph constituted by a piezoelectric thick film deposited on an alumina substrate. A trial and error fitting method is described for determining the elastic, piezoelectric and dielectric constants of the piezoelectric material. The influence of the electrode parameters is calculated and the measurement uncertainty is deduced. In sensor mode the open voltage delivered by the bent piezoelectric layer and the electrical equivalent circuit of the bimorph are given. Theoretical results are compared with those obtained by the finite element method, and discussed.

  9. MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

  10. Cantilever-based electret energy harvesters

    CERN Document Server

    Boisseau, S; Ricart, T; Defay, E; Sylvestre, A; 10.1088/0964-1726/20/10/105013

    2011-01-01

    Integration of structures and functions allowed reducing electric consumptions of sensors, actuators and electronic devices. Therefore, it is now possible to imagine low-consumption devices able to harvest their energy in their surrounding environment. One way to proceed is to develop converters able to turn mechanical energy, such as vibrations, into electricity: this paper focuses on electrostatic converters using electrets. We develop an accurate analytical model of a simple but efficient cantilever-based electret energy harvester. Therefore, we prove that with vibrations of 0.1g (~1m/s^{2}), it is theoretically possible to harvest up to 30\\muW per gram of mobile mass. This power corresponds to the maximum output power of a resonant energy harvester according to the model of William and Yates. Simulations results are validated by experimental measurements but the issues of parasitic capacitances get a large impact. Therefore, we 'only' managed to harvest 10\\muW per gram of mobile mass, but according to our...

  11. Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

    NARCIS (Netherlands)

    Nguyen, M.D.; Nazeer, H.; Karakaya, K.; Pham, S.V.; Steenwelle, R.; Dekkers, M.; Abelmann, L.; Blank, D.H.A.; Rijnders, G.

    2010-01-01

    This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as buffer-layer/bottom-electrode/film/top-electrode: YSZ/SrRuO\\3/Pb(Zr, Ti)\\3/SrRu

  12. Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

    NARCIS (Netherlands)

    Nguyen, M.D.; Nazeer, H.; Karakaya, K.; Pham, S.V.; Steenwelle, R.; Dekkers, M.; Abelmann, L.; Blank, D.H.A.

    2010-01-01

    This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as buffer-layer/bottom-electrode/film/top-electrode: YSZ/SrRuO3/Pb(Zr,Ti)3/SrRuO3,

  13. Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

    NARCIS (Netherlands)

    Nguyen, M.D.; Nazeer, H.; Karakaya, K.; Pham, S.V.; Steenwelle, R.; Dekkers, M.; Abelmann, L.; Blank, D.H.A.; Rijnders, G.

    2010-01-01

    This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as buffer-layer/bottom-electrode/film/top-electrode: YSZ/SrRuO\\3/Pb(Zr,

  14. Digital Actuator Technology

    Energy Technology Data Exchange (ETDEWEB)

    Ken Thomas; Ted Quinn; Jerry Mauck; Richard Bockhorst

    2014-09-01

    There are significant developments underway in new types of actuators for power plant active components. Many of these make use of digital technology to provide a wide array of benefits in performance of the actuators and in reduced burden to maintain them. These new product offerings have gained considerable acceptance in use in process plants. In addition, they have been used in conventional power generation very successfully. This technology has been proven to deliver the benefits promised and substantiate the claims of improved performance. The nuclear industry has been reluctant to incorporate digital actuator technology into nuclear plant designs due to concerns due to a number of concerns. These could be summarized as cost, regulatory uncertainty, and a certain comfort factor with legacy analog technology. The replacement opportunity for these types of components represents a decision point for whether to invest in more modern technology that would provide superior operational and maintenance benefits. Yet, the application of digital technology has been problematic for the nuclear industry, due to qualification and regulatory issues. With some notable exceptions, the result has been a continuing reluctance to undertake the risks and uncertainties of implementing digital actuator technology when replacement opportunities present themselves. Rather, utilities would typically prefer to accept the performance limitations of the legacy analog actuator technologies to avoid impacts to project costs and schedules. The purpose of this report is to demonstrate that the benefits of digital actuator technology can be significant in terms of plant performance and that it is worthwhile to address the barriers currently holding back the widespread development and use of this technology. It addresses two important objectives in pursuit of the beneficial use of digital actuator technology for nuclear power plants: 1. To demonstrate the benefits of digital actuator

  15. Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

    CERN Document Server

    Hoof, Sebastian; Hoogenboom, Bart W

    2012-01-01

    Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here we show that a high-quality resonance (Q>20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity --- as expressed via the minimum detectable force gradient --- is hardly affected, because of the enhanced quality factor. Via the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up which includes magnetic actuation of the cantilevers and which can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

  16. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    Science.gov (United States)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-08-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

  17. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  18. SU-8 cantilever chip interconnection

    DEFF Research Database (Denmark)

    Johansson, Alicia Charlotte; Janting, Jakob; Schultz, Peter;

    2006-01-01

    the electrodes on the SU-8 chip to a printed circuit board. Here, we present two different methods of electrically connecting an SU-8 chip, which contains a microfluidic network and free-hanging mechanical parts. The tested electrical interconnection techniques are flip chip bonding using underfill or flip chip...... bonding using an anisotropic conductive film (ACF). These are both widely used in the Si industry and might also be used for the large scale interconnection of SU-8 chips. The SU-8 chip, to which the interconnections are made, has a microfluidic channel with integrated micrometer-sized cantilevers...... that can be used for label-free biochemical detection. All the bonding tests are compared with results obtained using similar Si chips. It is found that it is significantly more complicated to interconnect SU-8 than Si cantilever chips primarily due to the softness of SU-8....

  19. Integrated cantilever-based flow sensors with tunable sensitivity for in-line monitoring of flow fluctuations in microfluidic systems.

    Science.gov (United States)

    Noeth, Nadine; Keller, Stephan Sylvest; Boisen, Anja

    2013-12-23

    For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN) and with different thicknesses. The integration of arrays of holes with different hole size and number of holes allows the modification of device sensitivity, theoretical detection limit and measurement range. For an average flow in the microliter range, the cantilever deflection is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external pumps connected to the microfluidic system.

  20. Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems

    Directory of Open Access Journals (Sweden)

    Nadine Noeth

    2013-12-01

    Full Text Available For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN and with different thicknesses. The integration of arrays of holes with different hole size and number of holes allows the modification of device sensitivity, theoretical detection limit and measurement range. For an average flow in the microliter range, the cantilever deflection is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external pumps connected to the microfluidic system.

  1. Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium

    Science.gov (United States)

    Kathel, G.; Shajahan, M. S.; Bhadra, P.; Prabhakar, A.; Chadha, A.; Bhattacharya, E.

    2016-09-01

    Cantilevers immersed in liquid experience viscous damping and hydrodynamic loading. We report on the use of such cantilevers, operating in the dynamic mode with, (i) frequency sweeping and (ii) phase locked loop methods. The solution to reliability issues such as random drift in the resonant peak values, and interference of spurious modes in the resonance frequency spectrum, are explained based on the actuation signal provided and laser spot size. The laser beam spot size and its position on the cantilever were found to have an important role, on the output signal and resonance frequency. We describe a method to distinguish the normal modes from the spurious modes for a cantilever. Uncertainties in the measurements define the lower limit of mass detection (m min). The minimum detection limits of the two measurement methods are investigated by measuring salt adsorption from phosphate buffer solution, as an example, a mass of 14 pg was measured using the 14th transverse mode of a 500~μ m  ×  100 μm  ×  1 μm silicon cantilever. The optimized measurement was used to study the interaction between antibody and antigen.

  2. Dynamic Electromechanical Coupling of Piezoelectric Bending Actuators

    Directory of Open Access Journals (Sweden)

    Mostafa R. A. Nabawy

    2016-01-01

    Full Text Available Electromechanical coupling defines the ratio of electrical and mechanical energy exchanged during a flexure cycle of a piezoelectric actuator. This paper presents an analysis of the dynamic electromechanical coupling factor (dynamic EMCF for cantilever based piezoelectric actuators and provides for the first time explicit expressions for calculation of dynamic EMCF based on arrangement of passive and active layers, layer geometry, and active and passive materials selection. Three main cantilever layer configurations are considered: unimorph, dual layer bimorph and triple layer bimorph. The actuator is modeled using standard constitutive dynamic equations that relate deflection and charge to force and voltage. A mode shape formulation is used for the cantilever dynamics that allows the generalized mass to be the actual mass at the first resonant frequency, removing the need for numerical integration in the design process. Results are presented in the form of physical insight from the model structure and also numerical evaluations of the model to provide trends in dynamic EMCF with actuator design parameters. For given material properties of the active and passive layers and given system overall damping ratio, the triple layer bimorph topology is the best in terms of theoretically achievable dynamic EMCF, followed by the dual layer bimorph. For a damping ratio of 0.035, the dynamic EMCF for an example dual layer bimorph configuration is 9% better than for a unimorph configuration. For configurations with a passive layer, the ratio of thicknesses for the passive and active layers is the primary geometric design variable. Choice of passive layer stiffness (Young’s modulus relative to the stiffness of the material in the active layer is an important materials related design choice. For unimorph configurations, it is beneficial to use the highest stiffness possible passive material, whereas for triple layer bimorph configurations, the passive

  3. Optical fibre cantilever sensor for biological application

    Science.gov (United States)

    Li, J.; Zhou, Y. X.; Patterson, G.; Shu, W. M.; Maier, R. R. J.; Fowler, R.; Hand, D. P.; MacPherson, W. N.

    2014-05-01

    Micro-cantilever sensors have shown great promise in a wide range of application are as including chemical and biological sensing. However, many of these devices are based upon a sensor `chip' that requires careful alignment between the cantilever and the read-out system, which can be challenging. Furthermore, optical interrogation typically involves a bulky free-space system. Optical fibre addressed cantilevers have been reported previously in the literature and in this paper we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibres using laser machining. Low-cost optical sources and a fibre coupled spectrometer are employed to monitor the cantilever deflection and therefore observe biological binding between a species of interest and an activated cantilever. Proof-of-concept experiments show that the sensor is capable of detecting pathogen concentration with down to a level of 105cfu/ml.

  4. Determining cantilever stiffness from thermal noise

    Directory of Open Access Journals (Sweden)

    Jannis Lübbe

    2013-03-01

    Full Text Available We critically discuss the extraction of intrinsic cantilever properties, namely eigenfrequency fn, quality factor Qn and specifically the stiffness kn of the nth cantilever oscillation mode from thermal noise by an analysis of the power spectral density of displacement fluctuations of the cantilever in contact with a thermal bath. The practical applicability of this approach is demonstrated for several cantilevers with eigenfrequencies ranging from 50 kHz to 2 MHz. As such an analysis requires a sophisticated spectral analysis, we introduce a new method to determine kn from a spectral analysis of the demodulated oscillation signal of the excited cantilever that can be performed in the frequency range of 10 Hz to 1 kHz regardless of the eigenfrequency of the cantilever. We demonstrate that the latter method is in particular useful for noncontact atomic force microscopy (NC-AFM where the required simple instrumentation for spectral analysis is available in most experimental systems.

  5. Wavefront correction performed by a deformable mirror of arbitrary actuator pattern within a multireflection waveguide.

    Science.gov (United States)

    Ma, Xingkun; Huang, Lei; Bian, Qi; Gong, Mali

    2014-09-10

    The wavefront correction ability of a deformable mirror with a multireflection waveguide was investigated and compared via simulations. By dividing a conventional actuator array into a multireflection waveguide that consisted of single-actuator units, an arbitrary actuator pattern could be achieved. A stochastic parallel perturbation algorithm was proposed to find the optimal actuator pattern for a particular aberration. Compared with conventional an actuator array, the multireflection waveguide showed significant advantages in correction of higher order aberrations.

  6. Microelectromechanical systems integrating molecular spin crossover actuators

    Science.gov (United States)

    Manrique-Juarez, Maria D.; Rat, Sylvain; Mathieu, Fabrice; Saya, Daisuke; Séguy, Isabelle; Leïchlé, Thierry; Nicu, Liviu; Salmon, Lionel; Molnár, Gábor; Bousseksou, Azzedine

    2016-08-01

    Silicon MEMS cantilevers coated with a 200 nm thin layer of the molecular spin crossover complex [Fe(H2B(pz)2)2(phen)] (H2B(pz)2 = dihydrobis(pyrazolyl)borate and phen = 1,10-phenantroline) were actuated using an external magnetic field and their resonance frequency was tracked by means of integrated piezoresistive detection. The light-induced spin-state switching of the molecules from the ground low spin to the metastable high spin state at 10 K led to a well-reproducible shift of the cantilever's resonance frequency (Δfr = -0.52 Hz). Control experiments at different temperatures using coated as well as uncoated devices along with simple calculations support the assignment of this effect to the spin transition. This latter translates into changes in mechanical behavior of the cantilever due to the strong spin-state/lattice coupling. A guideline for the optimization of device parameters is proposed so as to efficiently harness molecular scale movements for large-scale mechanical work, thus paving the road for nanoelectromechanical systems (NEMS) actuators based on molecular materials.

  7. Piezoelectric Actuator Modeling Using MSC/NASTRAN and MATLAB

    Science.gov (United States)

    Reaves, Mercedes C.; Horta, Lucas G.

    2003-01-01

    This paper presents a procedure for modeling structures containing piezoelectric actuators using MSCMASTRAN and MATLAB. The paper describes the utility and functionality of one set of validated modeling tools. The tools described herein use MSCMASTRAN to model the structure with piezoelectric actuators and a thermally induced strain to model straining of the actuators due to an applied voltage field. MATLAB scripts are used to assemble the dynamic equations and to generate frequency response functions. The application of these tools is discussed using a cantilever aluminum beam with a surface mounted piezoelectric actuator as a sample problem. Software in the form of MSCINASTRAN DMAP input commands, MATLAB scripts, and a step-by-step procedure to solve the example problem are provided. Analysis results are generated in terms of frequency response functions from deflection and strain data as a function of input voltage to the actuator.

  8. Highly sensitive polymer-based cantilever-sensors for DNA detection

    Energy Technology Data Exchange (ETDEWEB)

    Calleja, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain) and Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)]. E-mail: mcalleja@imm.cnm.csic.es; Nordstroem, M. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark); Alvarez, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Tamayo, J. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Lechuga, L.M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Boisen, A. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)

    2005-11-15

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.

  9. Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

    Science.gov (United States)

    Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

    2015-12-01

    A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling.

  10. Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Johnson, Raegan Lynn [Iowa State Univ., Ames, IA (United States)

    2005-01-01

    In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the cantilever beam. This design not only improves the speed of imaging because the piezoelectric film replaces the piezo-tube as an actuator, but the film can also act as a sensor. In addition, the piezoelectric film can excite the cantilever beam near its resonance frequency. This project aims to fabricate piezoelectric microcantilevers for use in the AFM. Prior to fabricating the cantilevers and also part of this project, a systematic study was performed to examine the effects of deposition conditions on the quality of piezoelectric ZnO thin films deposited by RF sputtering. These results will be presented. The deposition parameters that produced the highest quality ZnO film were used in the fabrication of the piezoelectric cantilevers. Unfortunately, the fabricated cantilevers warped due to the intrinsic stress of the ZnO film and were therefore not usable in the AFM. The complete fabrication process will be detailed, the results will be discussed and reasons for the warping will be examined.

  11. Higher Order Modes Excitation of Micro Cantilever Beams

    KAUST Repository

    Jaber, Nizar

    2014-05-01

    In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.

  12. Development and characterization of electrochemical cantilever sensor for bio/chemical sensing applications

    DEFF Research Database (Denmark)

    Quan, Xueling; Fischer, Lee MacKenzie; Boisen, Anja

    2011-01-01

    We report the improvements made to our previously developed electrochemical cantilever (EC) sensor, where nanoporous gold material is employed as working electrodes in microcantilever arrays, while combined counter-reference electrodes are integrated on the chip. For a surface stress change of 1m...

  13. Cantilevers orthodontics forces measured by fiber sensors

    Science.gov (United States)

    Schneider, Neblyssa; Milczewski, Maura S.; de Oliveira, Valmir; Guariza Filho, Odilon; Lopes, Stephani C. P. S.; Kalinowski, Hypolito J.

    2015-09-01

    Fibers Bragg Gratings were used to evaluate the transmission of the forces generates by orthodontic mechanic based one and two cantilevers used to move molars to the upright position. The results showed levels forces of approximately 0,14N near to the root of the molar with one and two cantilevers.

  14. NOISE AND SENSITIVITY IN POLYSILICON PIEZORESISTIVE CANTILEVERS*

    Institute of Scientific and Technical Information of China (English)

    于晓梅; 江兴流; J.THAYSEN; O.HANSEN; A.BOISEN

    2001-01-01

    Piezoresistive cantilevers with dimensions of 200 × 50 × 1.8μm3 have been fabricated from polycrystalline silicon using reactive ion etching (RIE) and back etching processes. Full Wheatstone bridges have been designed symmetrically on-chip, with two resistors placed on the cantilevers and two resistors on the substrate. The differential measurements of the two cantilevers can reduce the thermal shift of the signal in the system and the external noise in the laboratory.The characteristics of the fabricated cantilevers have been analysed by measuring the noise and the sensitivity. The measured noise spectra show that the 1/f noise is the dominant noise source at low frequencies. With the linear relation between 1/f noise and bias voltages, the Hooge factor (c) was calculated to be 0.0067. The 1/f noise was explained in terms of a lattice scattering model, which occurs in the depletion region of the grains. The displacement sensitivity of the cantilevers was calculated to be 1× 10-6nm-1 by measuring the resistance change and the vertical deflection of the cantilever. The gauge factor of the piezoresistive cantilever was calculated to be 19. At a 3V bias voltage and 1000 Hz measurement bandwidth, 1 nm of minimum detectable deflection has been obtained.

  15. Three-way flexible cantilever probes for static contact

    DEFF Research Database (Denmark)

    Wang, Fei; Petersen, Dirch Hjorth; Jensen, Helle Vendelbo;

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze...

  16. Modelling of Spring Constant and Pull-down Voltage of Non-uniform RF MEMS Cantilever Incorporating Stress Gradient

    Directory of Open Access Journals (Sweden)

    Shimul Chandra SAHA

    2008-11-01

    Full Text Available We have presented a model for spring constant and pull-down voltage of a non-uniform radio frequency microelectromechanical systems (RF MEMS cantilever that works on electrostatic actuation. The residual stress gradient in the beam material that may arise during the fabrication process is also considered in the model. Using basic force deflection calculation of the suspended beam, a stand-alone model for the spring constant and pull-down voltage of the non-uniform cantilever is developed. To compare the model, simulation is performed using standard Finite Element Method (FEM analysis tolls from CoventorWare. The model matches very well with the FEM simulation results. The model will offer an efficient means of design, analysis, and optimization of RF MEMS cantilever switches.

  17. Improved cantilever profiles for sensor elements

    Energy Technology Data Exchange (ETDEWEB)

    Fernando, Sanchitha [School of Electrical and Computer Engineering, RMIT University, GPO Box 2476V, Melbourne, VIC 3001 (Australia); Austin, Michael [School of Electrical and Computer Engineering, RMIT University, GPO Box 2476V, Melbourne, VIC 3001 (Australia); Chaffey, Jason [Mems-ID, MiniFAB, 1 Dalmore Drive, Caribbean Park, Scoresby, VIC 3179 (Australia)

    2007-12-21

    The problem of simultaneously enhancing sensitivity and noise immunity of microcantilevers is investigated. The dependence of deflection and resonant frequency of a microcantilever on its dimensions is studied. A principle to increase deflection and resonant frequency simultaneously is established. Several cantilevers agreeing with this principle are investigated using analytical models and are compared with FEM simulations. Using these results, a cantilever profile that achieves a larger deflection and a larger resonant frequency compared with uniform cantilevers is proposed to be used in sensor elements.

  18. Improved cantilever profiles for sensor elements

    Science.gov (United States)

    Fernando, Sanchitha; Austin, Michael; Chaffey, Jason

    2007-12-01

    The problem of simultaneously enhancing sensitivity and noise immunity of microcantilevers is investigated. The dependence of deflection and resonant frequency of a microcantilever on its dimensions is studied. A principle to increase deflection and resonant frequency simultaneously is established. Several cantilevers agreeing with this principle are investigated using analytical models and are compared with FEM simulations. Using these results, a cantilever profile that achieves a larger deflection and a larger resonant frequency compared with uniform cantilevers is proposed to be used in sensor elements.

  19. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad

    2016-06-16

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.

  20. Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

    2017-06-01

    In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next

  1. Fabrication of piezodriven, free-standing, all-oxide heteroepitaxial cantilevers on silicon

    Directory of Open Access Journals (Sweden)

    N. Banerjee

    2014-09-01

    Full Text Available We report on the fabrication and mechanical properties of all-oxide, free-standing, heteroepitaxial, piezoelectric, microelectromechanical systems (MEMS on silicon, using PbZr0.52Ti0.48O3 as the key functional material. The fabrication was enabled by the development of an epitaxial lift-off strategy for the patterning of multilayer oxide heterostructures grown on Si(001, employing a high temperature stable, sacrificial oxide template mask to obtain freestanding cantilever MEMS devices after substrate etching. All cantilevers, with lengths in the range 25–325 μm, width 50 μm, and total thickness of 300 nm, can be actuated by an external AC-bias. For lengths 50–125 μm, the second order bending mode formed the dominant resonance, whereas for the other lengths different or multiple modes were present.

  2. Dynamical Model for an Interharmonic Property of a Piezoelectric Bimorph Cantilever Beam with Self-Sensing Function

    OpenAIRE

    Ting Zhang; Ying Pan; Lijie Cao

    2016-01-01

    A piezoelectric bimorph cantilevered beam is analyzed dynamically by a longitudinal and transverse coupling theory. When a sinusoidal voltage is applied on the actuating layer of the bimorph, the output voltage of the sensing layer appears as interharmonic component signal. The interharmonic frequency is noninteger harmonic frequency of the applied voltage. A dynamic model is proposed to describe the interharmonic property of the piezoelectric bimorph beam. Through some simulations and experi...

  3. Cantilever-Based Biosensors in CMOS Technology

    CERN Document Server

    Kirstein, K -U; Zimmermann, M; Vancura, C; Volden, T; Song, W H; Lichtenberg, J; Hierlemannn, A

    2011-01-01

    Single-chip CMOS-based biosensors that feature microcantilevers as transducer elements are presented. The cantilevers are functionalized for the capturing of specific analytes, e.g., proteins or DNA. The binding of the analyte changes the mechanical properties of the cantilevers such as surface stress and resonant frequency, which can be detected by an integrated Wheatstone bridge. The monolithic integrated readout allows for a high signal-to-noise ratio, lowers the sensitivity to external interference and enables autonomous device operation.

  4. Grating Loaded Cantilevers for Displacement Measurements

    Science.gov (United States)

    Karademir, Ertugrul; Olcum, Selim; Atalar, Abdullah; Aydinli, Atilla

    2010-03-01

    A cantilever with a grating coupler engraved on its tip is used for measuring displacement. The coupled light in the cantilever is guided to a single mode optical waveguide defined at the base of the cantilever. The grating period is 550 nm and is fabricated on a SOI wafer using nanoimprint lithography. The waveguide and the cantilever are defined by an RIE and cantilevers released by KOH and HF solutions. Light with 1550 nm wavelength, is directed onto the grating coupler and detected at the cleaved end of the SOI waveguide. The angle of incidence is controlled by a motorized rotary stage. Light couples into the waveguide at a characteristic angle with a full width at half maximum of approximately 6.9 mrads translating into a Q factor of 87.5. The displacement sensitivity is measured by driving the cantilever with a frequency controlled piezoelectric element. The modulation of the light at the waveguide output is lock-in detected by a biased infrared detector. The resulting 43%mrad-1 sensitivity can be increased with further optimization.

  5. Performance study of a hydrogen powered metal hydride actuator

    Science.gov (United States)

    Mainul Hossain Bhuiya, Md; Kim, Kwang J.

    2016-04-01

    A thermally driven hydrogen powered actuator integrating metal hydride hydrogen storage reactor, which is compact, noiseless, and able to generate smooth actuation, is presented in this article. To test the plausibility of a thermally driven actuator, a conventional piston type actuator was integrated with LaNi5 based hydrogen storage system. Copper encapsulation followed by compaction of particles into pellets, were adopted to improve overall thermal conductivity of the reactor. The operation of the actuator was thoroughly investigated for an array of operating temperature ranges. Temperature swing of the hydride reactor triggering smooth and noiseless actuation over several operating temperature ranges were monitored for quantification of actuator efficiency. Overall, the actuator generated smooth and consistent strokes during repeated cycles of operation. The efficiency of the actuator was found to be as high as 13.36% for operating a temperature range of 20 °C-50 °C. Stress-strain characteristics, actuation hysteresis etc were studied experimentally. Comparison of stress-strain characteristics of the proposed actuator with traditional actuators, artificial muscles and so on was made. The study suggests that design modification and use of high pressure hydride may enhance the performance and broaden the application horizon of the proposed actuator in future.

  6. Cardiac Muscle Cell-based Actuator and Self-stabilizing Biorobot - Part 2.

    Science.gov (United States)

    Nagarajan, Neerajha; Holley, Merrel T; Danielson, Christian; Park, Kidong; Zorlutuna, Pinar

    2017-05-09

    In recent years, hybrid devices that consist of a living cell or tissue component integrated with a synthetic mechanical backbone have been developed. These devices, called biorobots, are powered solely by the force generated from the contractile activity of the living component and, due to their many inherent advantages, could be an alternative to conventional fully artificial robots. Here, we describe the methods to seed and characterize a biological actuator and a biorobot that was designed, fabricated, and functionalized in the first part of this two-part article. Fabricated biological actuator and biorobot devices composed of a polydimethylsiloxane (PDMS) base and a thin film cantilever were functionalized for cell attachment with fibronectin. Following functionalization, neonatal rat cardiomyocytes were seeded onto the PDMS cantilever arm at a high density, resulting in a confluent cell sheet. The devices were imaged every day and the movement of the cantilever arms was analyzed. On the second day after seeding, we observed the bending of the cantilever arms due to the forces exerted by the cells during spontaneous contractions. Upon quantitative analysis of the cantilever bending, a gradual increase in the surface stress exerted by the cells as they matured over time was observed. Likewise, we observed movement of the biorobot due to the actuation of the PDMS cantilever arm, which acted as a fin. Upon quantification of the swimming profiles of the devices, various propulsion modes were observed, which were influenced by the resting angle of the fin. The direction of motion and the beating frequency were also determined by the resting angle of the fin, and a maximum swim velocity of 142 µm/s was observed. In this manuscript, we describe the procedure for populating the fabricated devices with cardiomyocytes, as well as for the assessment of the biological actuator and biorobot activity.

  7. Electro-mechanical behavior of a shape memory alloy actuator

    Science.gov (United States)

    Pausley, Matthew E.; Furst, Stephen J.; Talla, Vamsi; Seelecke, Stefan

    2009-03-01

    This paper presents experimental study and numerical simulation of the electro-thermo-mechanical behavior of a commercially available Flexinol shape memory alloy (SMA) wire [1]. Recently, a novel driver device has been presented [2], which simultaneously controls electric power and measures resistance of an SMA wire actuator. This application of a single wire as both actuator and sensor will fully exploit the multifunctional nature of SMA materials and minimize system complexity by avoiding extra sensors. Though the subject is not new [3-6], comprehensive resistance data under controlled conditions for time-resolved and hysteresis-based experiments is not readily available from the literature. A simple experimental setup consisting of a Flexinol wire mounted in series with the tip of a compliant cantilever beam is used to systematically study the SMA behavior. A Labview-based data acquisition system measures actuator displacement and SMA wire stress and resistance and controls the power passed through the SMA actuator wire. The experimental setup is carefully insulated from ambient conditions, as the thermal response of a 50-micron diameter Flexinol wire is extremely sensitive to temperature fluctuation due to convective heat transfer. Actuator performance is reported for a range of actuation frequencies and input power levels. The effect of varying actuator pre-stress is reported as well. All of the experimental data is compared with simulated behavior that is derived from a numerical model for SMA material [7-10].

  8. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch

    Directory of Open Access Journals (Sweden)

    Jian Sun

    2016-07-01

    Full Text Available The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements.

  9. Adaptive control of force microscope cantilever dynamics

    Science.gov (United States)

    Jensen, S. E.; Dougherty, W. M.; Garbini, J. L.; Sidles, J. A.

    2007-09-01

    Magnetic resonance force microscopy (MRFM) and other emerging scanning probe microscopies entail the detection of attonewton-scale forces. Requisite force sensitivities are achieved through the use of soft force microscope cantilevers as high resonant-Q micromechanical oscillators. In practice, the dynamics of these oscillators are greatly improved by the application of force feedback control computed in real time by a digital signal processor (DSP). Improvements include increased sensitive bandwidth, reduced oscillator ring up/down time, and reduced cantilever thermal vibration amplitude. However, when the cantilever tip and the sample are in close proximity, electrostatic and Casimir tip-sample force gradients can significantly alter the cantilever resonance frequency, foiling fixed-gain narrow-band control schemes. We report an improved, adaptive control algorithm that uses a Hilbert transform technique to continuously measure the vibration frequency of the thermally-excited cantilever and seamlessly adjust the DSP program coefficients. The closed-loop vibration amplitude is typically 0.05 nm. This adaptive algorithm enables narrow-band formally-optimal control over a wide range of resonance frequencies, and preserves the thermally-limited signal to noise ratio (SNR).

  10. Pull-in behavior analysis of vibrating functionally graded micro-cantilevers under suddenly DC voltage

    Directory of Open Access Journals (Sweden)

    Jamal Zare

    2015-01-01

    Full Text Available The present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step DC voltage while the fringing-field effect is taken into account in the vibrational equation of motion. By employing modern asymptotic approach namely Homotopy Perturbation Method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the influences of material properties and actuation voltage on dynamic pull-in behavior are investigated. It is demonstrated that the auxiliary term in the homotopy perturbation method is extremely effective for higher order approximation and two terms in series expansions are sufficient to produce an acceptable solution. The strength of this analytical procedure is verified through comparison with numerical results.

  11. Engineering of Carbon Nanotube Actuators and Tools for Their Characterization

    Science.gov (United States)

    Kozlov, Mikhail; Chang, Heping; Cui, Changxing; Liu, Lo-Min; Morris, Bob; Spinks, Geoff; Khayrullin, Ilyas; Zakhidov, Anvar; Iqbal, Zafar; Baughman, Ray

    2000-03-01

    We report comparative data on electromechanical response as a function of voltage for carbon actuators based on single-wall and multi-wall nanotubes, graphite and nanotube-polymer composites. The measurements were carried out in aqueous NaCl electrolyte, under variable load, in broad voltage and temperature ranges. A specially designed tensile tester provided isometric conditions for sample characterization. Data on stress-strain generation, elastic constants, and thermal expansion was obtained from our apparatus. Measurements show that isometric stress generation in an actuator based on low-surface- area graphite is less than 0.01 MPa, whereas for single-wall nanotubes this stress readily exceeds 0.7 MPa. Experimental data are compared with predictions for the dimensional changes in carbon nanotubes caused by charge injection and temperature variation. Tensile, cantilever and helical actuation mechanisms in single-wall nanotubes are discussed.

  12. Smart Tendon Actuated Flexible Actuator

    Directory of Open Access Journals (Sweden)

    Md. Masum Billah

    2015-01-01

    Full Text Available We investigate the kinematic feasibility of a tendon-based flexible parallel platform actuator. Much of the research on tendon-driven Stewart platforms is devoted either to the completely restrained positioning mechanism (CRPM or to one particular type of the incompletely restrained positioning mechanism (IRPM where the external force is provided by the gravitational pull on the platform such as in cable-suspended Stewart platforms. An IRPM-based platform is proposed which uses the external force provided by a compliant member. The compliant central column allows the configuration to achieve n DOFs with n tendons. In particular, this investigation focuses on the angular deflection of the upper platform with respect to the lower platform. The application here is aimed at developing a linkable module that can be connected to one another so as to form a “snake robot” of sorts. Since locomotion takes precedence over positioning in this application, a 3-DOF Stewart platform is adopted. For an arbitrary angular displace of the end-effector, the corresponding length of each tendon can be determined through inverse kinematics. Mathematical singularities are investigated using the traditional analytical method of defining the Jacobian.

  13. Functionally graded piezoelectric cantilever beam under load

    Energy Technology Data Exchange (ETDEWEB)

    Shi, Z.F.; Chen, Y. [Beijing Jiaotong University, School of Civil Engineering, Beijing (China)

    2004-12-01

    In the present paper, the problem of a functionally graded piezoelectric cantilever beam subjected to different loadings is studied. The piezoelectric beam is characterized by continuously graded properties for one elastic parameter and the material density. A pair of stress and induction functions in the form of polynomials is proposed and determined. Based on these functions, a set of analytical solutions for the beam subjected to different loadings is obtained. As particular cases, series of solutions for some canonical problems can be directly obtained from the solutions of the present paper, such as for the problems of a piezoelectric cantilever beam with constant body force or without body forces, etc. (orig.)

  14. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films. During the impact, the droplet kinetic energy is transferred into the form of mechanical stress forcing the piezoelectric structure to vibrate. Experimental results show energy of 0.3 μJ per droplet. The scenario of moderate falling drop intensity, i.e. 230 drops per second, yields a total energy of 400 μJ. © 2012 The Institution of Engineering and Technology.

  15. Polymeric cantilever-based biosensors with integrated readout

    DEFF Research Database (Denmark)

    Johansson, Alicia; Blagoi, Gabriela; Boisen, Anja

    2006-01-01

    The authors present an SU-8 cantilever chip with integrated piezoresistors for detection of surface stress changes due to adsorption of biomolecules on the cantilever surface. Mercaptohexanol is used as a model biomolecule to study molecular interactions with Au-coated SU-8 cantilevers and surfac...

  16. Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

    DEFF Research Database (Denmark)

    Jiang, Chenhui; Johansen, Tom Keinicke; Jónasson, Sævar Þór

    2011-01-01

    This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC...

  17. An Artificial Nose Based on Microcantilever Array Sensors

    Energy Technology Data Exchange (ETDEWEB)

    Lang, H P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Ramseyer, J P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Grange, W [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Braun, T [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Schmid, D [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Hunziker, P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Jung, C [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Hegner, M [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Gerber, C [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland)

    2007-03-15

    We used microfabricated cantilever array sensors for an artificial nose setup. Each cantilever is coated on its top surface with a polymer layer. Volatile gaseous analytes are detected by tracking the diffusion process of the molecules into the polymer layers, resulting in swelling of the polymer layers and therewith bending of the cantilevers. From the bending pattern of all cantilevers in the array, a characteristic 'fingerprint' of the analyte is obtained, which is evaluated using principal component analysis. In a flow of dry nitrogen gas, the bending of the cantilevers is reverted to its initial state before exposure to the analyte, which allows reversible and reproducible operation of the sensor. We show examples of detection of solvents, perfume essences and beverage flavors. In a medical application, the setup provides indication of presence of diseases in patient's breath samples.

  18. Environmental Effects on the Polypyrrole Tri-layer Actuator

    Directory of Open Access Journals (Sweden)

    Nirul Masurkar

    2017-04-01

    Full Text Available Electroactive polymer actuators such as polypyrrole (PPy are exciting candidates to drive autonomous devices that require low weight and low power. A simple PPy tri-layer bending type cantilever which operates in the air has been demonstrated previously, but the environmental effect on this actuator is still unknown. The major obstacle in the development of the PPy tri-layer actuator is to create proper packaging that reduces oxidation of the electrolyte and maintains constant displacement. Here, we report the variation in the displacement as well as the charge transfer at the different environmental condition. PPy trilayer actuators were fabricated by depositing polypyrrole on gold-coated porous poly(vinylidene fluoride (PVDF using the electro-synthesis method. It has been demonstrated that the charge transfer of tri-layer actuators is more in an inert environment than in open air. In addition, tri-layer actuators show constant deflection and enhancement of life due to the negligible oxidation rate of the electrolyte in an inert environment.

  19. Soft mobile robots driven by foldable dielectric elastomer actuators

    Science.gov (United States)

    Sun, Wenjie; Liu, Fan; Ma, Ziqi; Li, Chenghai; Zhou, Jinxiong

    2016-08-01

    A cantilever beam with elastic hinge pulled antagonistically by two dielectric elastomer (DE) membranes in tension forms a foldable actuator if one DE membrane is subject to a voltage and releases part of tension. Simply placing parallel rigid bars on the prestressed DE membranes results in enhanced actuators working in a pure shear state. We report design, analysis, fabrication, and experiment of soft mobile robots that are moved by such foldable DE actuators. We describe systematic measurement of the foldable actuators and perform theoretical analysis of such actuators based on minimization of total energy, and a good agreement is achieved between model prediction and measurement. We develop two versions of prototypes of soft mobile robots driven either by two sets of DE membranes or one DE membrane and elastic springs. We demonstrate locomotion of these soft mobile robots and highlight several key design parameters that influence locomotion of the robots. A 45 g soft robot driven by a cyclic triangle voltage with amplitude 7.4 kV demonstrates maximal stroke 160 mm or maximal rolling velocity 42 mm/s. The underlying mechanics and physics of foldable DE actuators can be leveraged to develop other soft machines for various applications.

  20. Soft mobile robots driven by foldable dielectric elastomer actuators

    Energy Technology Data Exchange (ETDEWEB)

    Sun, Wenjie; Liu, Fan; Ma, Ziqi; Li, Chenghai; Zhou, Jinxiong, E-mail: jxzhouxx@mail.xjtu.edu.cn [State Key Laboratory for Strength and Vibration of Mechanical Structures and School of Aerospace, Xi' an Jiaotong University, Xi' an 710049 (China)

    2016-08-28

    A cantilever beam with elastic hinge pulled antagonistically by two dielectric elastomer (DE) membranes in tension forms a foldable actuator if one DE membrane is subject to a voltage and releases part of tension. Simply placing parallel rigid bars on the prestressed DE membranes results in enhanced actuators working in a pure shear state. We report design, analysis, fabrication, and experiment of soft mobile robots that are moved by such foldable DE actuators. We describe systematic measurement of the foldable actuators and perform theoretical analysis of such actuators based on minimization of total energy, and a good agreement is achieved between model prediction and measurement. We develop two versions of prototypes of soft mobile robots driven either by two sets of DE membranes or one DE membrane and elastic springs. We demonstrate locomotion of these soft mobile robots and highlight several key design parameters that influence locomotion of the robots. A 45 g soft robot driven by a cyclic triangle voltage with amplitude 7.4 kV demonstrates maximal stroke 160 mm or maximal rolling velocity 42 mm/s. The underlying mechanics and physics of foldable DE actuators can be leveraged to develop other soft machines for various applications.

  1. 2D MEMS electrostatic cantilever waveguide scanner for potential image display application

    Directory of Open Access Journals (Sweden)

    Gu Kebin

    2015-01-01

    Full Text Available This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input. A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5μm beam diameter is observed at the focal plane. The transmission efficiency is low (~10% and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

  2. Four-plate piezoelectric actuator driving a large-diameter special optical fiber for nonlinear optical microendoscopy.

    Science.gov (United States)

    Wang, Ying; Li, Zhi; Liang, Xiaobao; Fu, Ling

    2016-08-22

    In nonlinear optical microendoscope (NOME), a fiber with excellent optical characteristics and a miniature scanning mechanism at the distal end are two key components. Double-clad fibers (DCFs) and double-clad photonic crystal fibers (DCPCFs) have shown great optical characteristics but limited vibration amplitude due to large diameter. Besides reducing the damping of fiber cantilever, optimizing the structural of the actuator for lower energy dissipation also contributes to better driving capability. This paper presented an optimized actuator for driving a particular fiber cantilever in the view point of energy. Firstly, deformation energy of a bending fiber cantilever operating in resonant mode is investigated. Secondly, strain and stress analyses revealed that the four-plate actuator achieved lower energy dissipation. Then, finite-element simulations showed that the large-diameter fiber yielded an adequate vibration amplitude driven by a four-plate actuator, which was confirmed by experiments of our home-made four-plate actuator prototypes. Additionally, a NOME based on a DCPCF with a diameter of 350 μm driven by four-plate piezoelectric actuator has been developed. The NOME can excite and collect intrinsic second-harmonic and two-photon fluorescence signals with the excitation power of 10-30 mW and an adequate field of view of 200 μm, which suggest great potential applications in neuroscience and clinical diagnoses.

  3. Electromagnetic rotational actuation.

    Energy Technology Data Exchange (ETDEWEB)

    Hogan, Alexander Lee

    2010-08-01

    There are many applications that need a meso-scale rotational actuator. These applications have been left by the wayside because of the lack of actuation at this scale. Sandia National Laboratories has many unique fabrication technologies that could be used to create an electromagnetic actuator at this scale. There are also many designs to be explored. In this internship exploration of the designs and fabrications technologies to find an inexpensive design that can be used for prototyping the electromagnetic rotational actuator.

  4. Model of magnetostrictive actuator

    Institute of Scientific and Technical Information of China (English)

    LI Lin; ZHANG Yuan-yuan

    2005-01-01

    The hysteresis of the magnetostrictive actuator was studied. A mathematical model of the hysteresis loop was obtained on the basis of experiment. This model depends on the frequency and the amplitude of the alternating current inputted to the magnetostrictive actuator. Based on the model, the effect of hysteresis on dynamic output of the magnetostrictive actuator was investigated. Then how to consider hysteresis and establish a dynamic model of a magnetostrictive actuator system is discussed when a practical system was designed and applied.

  5. Calibration of higher eigenmodes of cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger [Asylum Research, an Oxford Instruments Company, Santa Barbara, California 93117 (United States); Lysy, Martin [Department of Statistics and Actuarial Science, University of Waterloo, Waterloo, Ontario N2L 3G1 (Canada)

    2016-07-15

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  6. From MEMS to NEMS: Scaling Cantilever Sensors

    NARCIS (Netherlands)

    Yang, C.K.

    2012-01-01

    This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing application

  7. Forced Vibrations of a Cantilever Beam

    Science.gov (United States)

    Repetto, C. E.; Roatta, A.; Welti, R. J.

    2012-01-01

    The theoretical and experimental solutions for vibrations of a vertical-oriented, prismatic, thin cantilever beam are studied. The beam orientation is "downwards", i.e. the clamped end is above the free end, and it is subjected to a transverse movement at a selected frequency. Both the behaviour of the device driver and the beam's weak-damping…

  8. Microstructure cantilever beam for current measurement

    Directory of Open Access Journals (Sweden)

    M.T.E. Khan

    2010-01-01

    Full Text Available Most microelectromechanical systems (MEMS sensors are based on the microcantilever technology, which uses a broad range of design materials and structures. The benefit ofMEMStechnology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. A free-end cantilever beam with a magnetic material mass has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever beam to an externally-applied magnetic field. The cantilever was designed to form a capacitance transducer, which consisted of variable capacitance where electrical and mechanical energies were exchanged. The aim of this paper was to analyse the system design of the microcantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency, was applied, the cantilever beam exhibited a vibration motion along the vertical axis when placed closer to the line current. This motion created corresponding capacitance changes and generated a voltage output proportional to the capacitive change in the signal-processing circuitry attached to the microcantilever. The equivalent massspring system theory was used to describe and analyse the effect of the natural frequency of the system vibrations and motion due to the applied magnetic field, in a single-degree of freedom. The main application of this microcantilever is in current measurements to develop a non-contact current sensor mote.

  9. Extended DNA Tile Actuators

    DEFF Research Database (Denmark)

    Kristiansen, Martin; Kryger, Mille; Zhang, Zhao

    2012-01-01

    A dynamic linear DNA tile actuator is expanded to three new structures of higher complexity. The original DNA actuator was constructed from a central roller strand which hybridizes with two piston strands by forming two half-crossover junctions. A linear expansion of the actuator is obtained...

  10. Parametric resonance of intrinsic localized modes in coupled cantilever arrays

    Science.gov (United States)

    Kimura, Masayuki; Matsushita, Yasuo; Hikihara, Takashi

    2016-08-01

    In this study, the parametric resonances of pinned intrinsic localized modes (ILMs) were investigated by computing the unstable regions in parameter space consisting of parametric excitation amplitude and frequency. In the unstable regions, the pinned ILMs were observed to lose stability and begin to fluctuate. A nonlinear Klein-Gordon, Fermi-Pasta-Ulam-like, and mixed lattices were investigated. The pinned ILMs, particularly in the mixed lattice, were destabilized by parametric resonances, which were determined by comparing the shapes of the unstable regions with those in the Mathieu differential equation. In addition, traveling ILMs could be generated by parametric excitation.

  11. Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls

    Science.gov (United States)

    Kanda, Kensuke; Moriue, Shingo; Fujita, Takayuki; Maenaka, Kazusuke

    2017-04-01

    For the realization of piezoelectric microelectromechanical systems (MEMS) with multiple degrees-of-freedom, lead zirconate titanate thin films were deposited and micropatterned on the sidewalls of a pre-etched substrate with a feature depth of several hundred micrometers. The piezoelectric test structures, consisting of concave geometries and cantilevers with vertical and sloped sidewalls were successfully fabricated onto a 4 inch full sized wafer. Characterization of the fundamental properties of the lead zirconate titanate thin films indicated values comparable to those deposited on flat substrates. Actuation tests demonstrated that the triangular column cantilevers can be driven both in-plane and out-of-plane. The deposition of lead zironate titanate thin films onto a vertical sidewall created bimorph cantilevers composed of piezo/non-piezo/piezo structures in the horizontal direction. The use of microfabrication techniques to deposit lead zironate titanate thin films on pre-etched substrates gives MEMS actuators with multiple degrees-of-freedom and batch process compatibility.

  12. Effective Actuation: High Bandwidth Actuators and Actuator Scaling Laws

    Science.gov (United States)

    2007-11-02

    piezo elements mounted on structural members and devices that exhibited aeroacoustic resonance. The former type of actuator ( piezo ) was considered...Raman and Kibens (Raman et al. 2000). These experiments involved high-frequency forcing applied to low-speed flows using wedge piezo actuators and... Subharmonic Interaction and Wall Influence," AIAA- 86-1047, May, 1986. Davis, S. A., 2000, "The manipulation of large and small flow structures in single and

  13. Improved atomic force microscopy cantilever performance by partial reflective coating

    Directory of Open Access Journals (Sweden)

    Zeno Schumacher

    2015-07-01

    Full Text Available Optical beam deflection systems are widely used in cantilever based atomic force microscopy (AFM. Most commercial cantilevers have a reflective metal coating on the detector side to increase the reflectivity in order to achieve a high signal on the photodiode. Although the reflective coating is usually much thinner than the cantilever, it can still significantly contribute to the damping of the cantilever, leading to a lower mechanical quality factor (Q-factor. In dynamic mode operation in high vacuum, a cantilever with a high Q-factor is desired in order to achieve a lower minimal detectable force. The reflective coating can also increase the low-frequency force noise. In contact mode and force spectroscopy, a cantilever with minimal low-frequency force noise is desirable. We present a study on cantilevers with a partial reflective coating on the detector side. For this study, soft (≈0.01 N/m and stiff (≈28 N/m rectangular cantilevers were used with a custom partial coating at the tip end of the cantilever. The Q-factor, the detection and the force noise of fully coated, partially coated and uncoated cantilevers are compared and force distance curves are shown. Our results show an improvement in low-frequency force noise and increased Q-factor for the partially coated cantilevers compared to fully coated ones while maintaining the same reflectivity, therefore making it possible to combine the best of both worlds.

  14. Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

    Science.gov (United States)

    Sierakowski, Andrzej; Kopiec, Daniel; Majstrzyk, Wojciech; Kunicki, Piotr; Janus, Paweł; Dobrowolski, Rafał; Grabiec, Piotr; Rangelow, Ivo W.; Gotszalk, Teodor

    2017-03-01

    In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical source and detector are needed. When the microcantilever is deflected, the stress is transferred into a change of resistivity of piezoresistors. The integration of piezoresistive read-out provides a promising solution in realizing a compact non-contact AFM. Resolution of piezoresistive read-out is limited by three main noise sources: Johnson, 1/f and thermomechanical noise. In the dynamic shear force mode measurement the method used for cantilever actuation will also affect the recorded noise in the piezoresistive detection circuit. This is the result of a crosstalk between an aluminium path (current loop used for actuation) and piezoresistors located near the base of the beam. In this paper authors described an elaborated in ITE (Institute of Electron Technology) technology of fabrication cantilevers with piezoresistive detection of deflection and compared efficiency of two methods used for cantilever actuation.

  15. Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications

    Science.gov (United States)

    Kacem, N.; Arcamone, J.; Perez-Murano, F.; Hentz, S.

    2010-04-01

    This paper describes a comprehensive nonlinear multiphysics model based on the Euler-Bernoulli equation that remains valid up to large displacements in the case of electrostatically actuated nanocantilevers. This purely analytical model takes into account the fringing field effects which are significant for thin resonators. Analytical simulations show very good agreement with experimental electrical measurements of silicon nanodevices using wafer-scale nanostencil lithography (nSL), monolithically integrated with CMOS circuits. Close-form expressions of the critical amplitude are provided in order to compare the dynamic ranges of NEMS cantilevers and doubly clamped beams. This model allows designers to cancel out nonlinearities by tuning some design parameters and thus gives the possibility of driving the cantilever beyond its critical amplitude. Consequently, the sensor performance can be enhanced by being optimally driven at very large amplitude, while maintaining linear behavior.

  16. Device for filamentous fungi growth monitoring using the multimodal frequency response of cantilevers

    Science.gov (United States)

    Maloney, N.; Lukacs, G.; Ball, S. L.; Hegner, M.

    2014-01-01

    Filamentous fungi cause opportunistic infections in hospital patients. A fast assay to detect viable spores is of great interest. We present a device that is capable of monitoring fungi growth in real time via the dynamic operation of cantilevers in an array. The ability to detect minute frequency shifts for higher order flexural resonance modes is demonstrated using hydrogel functionalised cantilevers. The use of higher order resonance modes sees the sensor dependent mass responsivity enhanced by a factor of 13 in comparison to measurements utilizing the fundamental resonance mode only. As a proof of principle measurement, Aspergillus niger growth is monitored using the first two flexural resonance modes. The detection of single spore growth within 10 h is reported for the first time. The ability to detect and monitor the growth of single spores, within a small time frame, is advantageous in both clinical and industrial settings.

  17. Measuring the resonant vibration of a sessile droplet using MEMS based cantilevers

    Science.gov (United States)

    Nguyen, Thanh-Vinh; Matsumoto, Kiyoshi; Shimoyama, Isao

    2015-11-01

    We directly measure the normal force distribution on the contact area during the 1st mode resonant vibration of a droplet using an array of MEMS based cantilever. The measurement result shows that the normal force change is the largest at the periphery of the contact area. The ratio between the amplitude of the normal force change at the periphery of the contact area over that at the center of the contact area was approximately 20 times, in the case of 1.8 μL water droplet whose equilibrium contact angle is 140 degrees. We also demonstrate a method to estimate viscosity based on the measurement of the droplet vibration using MEMS cantilevers. The proposed method is able to estimate viscosity using less than 3 μL sample and has a simple operating principle. We believe that this method is suitable for point-of-care testing and characterization of chemical and biological solutions.

  18. Vortex Anemometer Using MEMS Cantilever Sensor

    CERN Document Server

    Zylka, P; Zylka, Pawel; Modrzynski, Pawel

    2010-01-01

    This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linearmeasurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.

  19. Inner Crack Detection Method for Cantilever Beams

    Science.gov (United States)

    Li, Zheng; Zhang, Wei; Li, Yixuan; Su, Xianyue

    2008-02-01

    In this paper, continuous wavelet transform has been performed to extract the inner crack information from the guided waves in cantilever beams, and the location and size of crack can be detected exactly. Considering its best time-frequency property, Gabor continuous wavelet transform is employed to analyze the complicated flexible wave signals in cantilever beam, which is inspirited by an impact on the free end. Otherwise, in order to enhance the sensitivity of detection for some small cracks, an improved method is discussed. Here, both computational and experimental methods are carried out for comparing the influence of different crack location in beam. Therefore, the method proposed can be expected to expand to a powerful damage detection method in a broad engineering application.

  20. Cantilever steel post damaged by wind

    Directory of Open Access Journals (Sweden)

    Wei Sha

    2014-10-01

    Full Text Available An analysis for the cause of fracture failure of a cantilever steel sign post damaged by wind has been carried out. An unusual cause of failure has been identified, which is the subject of this paper. Microscopy and microanalysis of the fracture surface showed that the failure was due to pre-existing cracks, from the fabrication of the post. This conclusion was reached after detecting and analysing a galvanised layer on the fracture surfaces.

  1. Placement optimization of actuators and sensors for gyroelastic body

    Directory of Open Access Journals (Sweden)

    Quan Hu

    2015-03-01

    Full Text Available Gyroelastic body refers to a flexible structure with a distribution of stored angular momentum provided by fly wheels or control moment gyroscopes. The angular momentum devices can exert active torques to the structure for vibration suppression or shape control. This article mainly focuses on the placement optimization issue of the actuators and sensors on the gyroelastic body. The control moment gyroscopes and angular rate sensors are adopted as actuators and sensors, respectively. The equations of motion of the gyroelastic body incorporating the detailed actuator dynamics are linearized to a loosely coupled state-space model. Two optimization approaches are developed for both constrained and unconstrained gyroelastic bodies. The first is based on the controllability and observability matrices of the system. It is only applicable to the collocated actuator and sensor pairs. The second criterion is formulated from the concept of controllable and observable subspaces. It is capable of handling the cases of both collocated and noncollocated actuator and sensor pairs. The illustrative examples of a cantilevered beam and an unconstrained plate demonstrate the clear physical meaning and rationality of the two proposed methods.

  2. Series elastic actuators

    Science.gov (United States)

    Williamson, Matthew M.

    1995-01-01

    This thesis presents the design, construction, control and evaluation of a novel for controlled actuator. Traditional force controlled actuators are designed from the premise that 'Stiffer is better'. This approach gives a high bandwidth system, prone to problems of contact instability, noise, and low power density. The actuator presented in this thesis is designed from the premise that 'Stiffness isn't everything'. The actuator, which incorporates a series elastic element, trades off achievable bandwidth for gains in stable, low noise force control, and protection against shock loads. This thesis reviews related work in robot force control, presents theoretical descriptions of the control and expected performance from a series elastic actuator, and describes the design of a test actuator constructed to gather performance data. Finally the performance of the system is evaluated by comparing the performance data to theoretical predictions.

  3. Magnetic actuators and sensors

    CERN Document Server

    Brauer, John R

    2014-01-01

    An accessible, comprehensive guide on magnetic actuators and sensors, this fully updated second edition of Magnetic Actuators and Sensors includes the latest advances, numerous worked calculations, illustrations, and real-life applications. Covering magnetics, actuators, sensors, and systems, with updates of new technologies and techniques, this exemplary learning tool emphasizes computer-aided design techniques, especially magnetic finite element analysis, commonly used by today's engineers. Detailed calculations, numerous illustrations, and discussions of discrepancies make this text an inva

  4. Remote switch actuator

    Science.gov (United States)

    Haas, Edwin Gerard; Beauman, Ronald; Palo, Jr., Stefan

    2013-01-29

    The invention provides a device and method for actuating electrical switches remotely. The device is removably attached to the switch and is actuated through the transfer of a user's force. The user is able to remain physically removed from the switch site obviating need for protective equipment. The device and method allow rapid, safe actuation of high-voltage or high-current carrying electrical switches or circuit breakers.

  5. Understanding interferometry for micro-cantilever displacement detection

    Directory of Open Access Journals (Sweden)

    Alexander von Schmidsfeld

    2016-06-01

    Full Text Available Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM operated in ultra-high vacuum is demonstrated for the Michelson and Fabry–Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end delivering and collecting light and a highly reflective micro-cantilever, both together forming the interferometric cavity. For a precise measurement of the cantilever displacement, the relative positioning of fiber and cantilever is of critical importance. We describe a systematic approach for accurate alignment as well as the implications of deficient fiber–cantilever configurations. In the Fabry–Pérot regime, the displacement noise spectral density strongly decreases with decreasing distance between the fiber-end and the cantilever, yielding a noise floor of 24 fm/Hz0.5 under optimum conditions.

  6. Bending characteristic of a cantilevered magnetostrictive film-substrate system

    Institute of Scientific and Technical Information of China (English)

    B.; Narsu

    2007-01-01

    The bending problem of a film-substrate cantilever with arbitrary film-to-substrate thickness ratio is solved exactly by employing the force equilibrium equation, and then the optimization and application of the bending characteristic of the magne-tostrictive cantilever is discussed. Furthermore, the influence of geometrical and physical parameters of the two cantilever components on the maximum free-end deflection of the cantilever is addressed. The results indicate that as the substrate thickness is kept constant, the greater film-to-substrate stiffness ratio will induce a larger deflection, while for the case of fixed total cantilever thickness, the optimal cantilever deflection is independent of the physical parameters of the materials such as Young’s modulus and Poisson’s ratio.

  7. Bending characteristic of a cantilevered magnetostrictive film-substrate system

    Institute of Scientific and Technical Information of China (English)

    B. Narsu; YUN GuoHong

    2007-01-01

    The bending problem of a film-substrate cantilever with arbitrary film-to-substrate thickness ratio is solved exactly by employing the force equilibrium equation, and then the optimization and application of the bending characteristic of the magnetostrictive cantilever is discussed. Furthermore, the influence of geometrical and physical parameters of the two cantilever components on the maximum free-end deflection of the cantilever is addressed. The results indicate that as the substrate thickness is kept constant, the greater film-to-substrate stiffness ratio will induce a larger deflection, while for the case of fixed total cantilever thickness, the optimal cantilever deflection is independent of the physical parameters of the materials such as Young's modulus and Poisson's ratio.

  8. Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry

    Directory of Open Access Journals (Sweden)

    Tosolini G.

    2014-09-01

    Full Text Available We present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.

  9. Actuator environmental stability

    Science.gov (United States)

    Yoshikawa, Shoko; Farrell, Michael

    2000-06-01

    Various configurations of piezoelectric high strain actuators are available in the market. The influence of humidity at high temperature is not well documented, even though it is an important consideration for actuator performance. This paper describes the testing and results of two different families of actuators; QuickPack products and multilayer actuators, tested under two environments; room temperature low humidity and elevated temperature and humidity (80°C/80%RH). A constant DC load was applied to the QP10N andand QP10Ni products in free condition, while positive only AC field was applied to multilayer actuators, under pre-stressed condition. High field IR was used as the main tool to determine the health of QuickPack products, whereas, in-situ displacement was measured to monitor the health of multilayer actuators. As expected, in both families of actuators, it was shown that the actuator life is significantly reduced when specimens are exposed to humidity at elevated temperature. Improvement of the humidity barrier, thus less moisture penetration, even when electrodes do not contain silver, is expected to prolong life of actuators.

  10. Electrostatically Driven Nanoballoon Actuator.

    Science.gov (United States)

    Barzegar, Hamid Reza; Yan, Aiming; Coh, Sinisa; Gracia-Espino, Eduardo; Dunn, Gabriel; Wågberg, Thomas; Louie, Steven G; Cohen, Marvin L; Zettl, Alex

    2016-11-09

    We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging the nanotube, thus realizing an electrostatically driven nanoballoon actuator. We find that the tube actuator can be reliably cycled with only modest control voltages (few volts) with no apparent wear or fatigue. A complementary theoretical analysis identifies critical parameters for nanotube nanoballoon actuation.

  11. Active Vibration Control of a Smart Cantilever Beam on General Purpose Operating System

    Directory of Open Access Journals (Sweden)

    A. P. Parameswaran

    2013-07-01

    Full Text Available All mechanical systems suffer from undesirable vibrations during their operations. Their occurrence is uncontrollable as it depends on various factors. However, for efficient operation of the system, these vibrations have to be controlled within the specified limits. Light weight, rapid and multi-mode control of the vibrating structure is possible by the use of piezoelectric sensors and actuators and feedback control algorithms. In this paper, direct output feedback based active vibration control has been implemented on a cantilever beam using Lead Zirconate-Titanate (PZT sensors and actuators. Three PZT patches were used, one as the sensor, one as the exciter providing the forced vibrations and the third acting as the actuator that provides an equal but opposite phase vibration/force signal to that of sensed so as to damp out the vibrations. The designed algorithm is implemented on Lab VIEW 2010 on Windows 7 Platform.Defence Science Journal, 2013, 63(4, pp.413-417, DOI:http://dx.doi.org/10.14429/dsj.63.4865

  12. Dynamical Model for an Interharmonic Property of a Piezoelectric Bimorph Cantilever Beam with Self-Sensing Function

    Directory of Open Access Journals (Sweden)

    Ting Zhang

    2016-01-01

    Full Text Available A piezoelectric bimorph cantilevered beam is analyzed dynamically by a longitudinal and transverse coupling theory. When a sinusoidal voltage is applied on the actuating layer of the bimorph, the output voltage of the sensing layer appears as interharmonic component signal. The interharmonic frequency is noninteger harmonic frequency of the applied voltage. A dynamic model is proposed to describe the interharmonic property of the piezoelectric bimorph beam. Through some simulations and experiments, the theoretical model is verified effectively to express the nonlinear characteristic. Furthermore, when the piezoelectric bimorph resonance happens, some interharmonic response at low frequency will modulate with the resonance response.

  13. Resonant Response of Rectangular AFM Cantilever in Liquid

    Institute of Scientific and Technical Information of China (English)

    CHEN Yu-Hang; HUANG Wen-Hao

    2007-01-01

    Dynamic characteristics of atomic force microscopy (AFM) cantilevers can be influenced by their working media.We perform an experimental study on the resonant responses of rectangular AFM cantilevers with different sizes immersed in various viscous fluids. The measured resonance frequencies in liquids are used to validate several theoretical models. Comparison shows the analytical model proposed by Sader [J. Appl. Phys. 84 (1998) 64] can give the best agreement with the experimental results with the maximum relative error nearly 16% for all the cantilevers in different liquids. The ratio between the resonant frequencies in air and water is almost independent of the cantilever length, which is consistent with the theoretical analyses.

  14. Reconstructing the distributed force on an atomic force microscope cantilever

    Science.gov (United States)

    Wagner, Ryan; Killgore, Jason

    2017-03-01

    A methodology is developed to reconstruct the force applied to an atomic force microscopy (AFM) cantilever given the shape in which it vibrates. This is accomplished by rewriting Bernoulli–Euler beam theory such that the force on the cantilever is approximated as a linear superposition of the theoretical cantilever eigenmodes. The weighting factors in this summation are calculated from the amplitude and phase measured along the length of the cantilever. The accuracy of the force reconstruction is shown to depend on the frequency at which the measurement is performed, the number of discrete points measured along the length of the cantilever, and the signal-to-noise ratio of the measured signal. In contrast to other AFM force reconstruction techniques, this method can reconstruct the distribution of force applied over the length of the AFM cantilever. However, this method performs poorly for localized forces applied to the cantilever, such as is typical of most tip–sample interaction forces. Proof of concept experiments are performed on an electrostatically excited cantilever and the expected force distribution is recovered. This force reconstruction technique offers previously unavailable insight into the distributed forces experienced by an AFM cantilever.

  15. Imaging using lateral bending modes of atomic force microscope cantilevers

    Science.gov (United States)

    Caron, A.; Rabe, U.; Reinstädtler, M.; Turner, J. A.; Arnold, W.

    2004-12-01

    Using scanning probe techniques, surface properties such as shear stiffness and friction can be measured with a resolution in the nanometer range. The torsional deflection or buckling of atomic force microscope cantilevers has previously been used in order to measure the lateral forces acting on the tip. This letter shows that the flexural vibration modes of cantilevers oscillating in their width direction parallel to the sample surface can also be used for imaging. These lateral cantilever modes exhibit vertical deflection amplitudes if the cantilever is asymmetric in thickness direction, e.g., by a trapezoidal cross section.

  16. An electrochemical-cantilever platform for hybrid sensing applications

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Dohn, Søren; Boisen, Anja

    2011-01-01

    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined me...... mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM....

  17. Pneumatically actuated hand tool

    NARCIS (Netherlands)

    Cool, J.C.; Rijnsaardt, K.A.

    1996-01-01

    Abstract of NL 9401195 (A) Pneumatically actuated hand tool for carrying out a mechanical operation, provided with an exchangeable gas cartridge in which the gas which is required for pneumatic actuation is stored. More particularly, the hand tool is provided with at least one pneumatic motor, at

  18. Sensors and actuators, Twente

    NARCIS (Netherlands)

    Bergveld, P.

    1989-01-01

    This paper describes the organization and the research programme of the Sensor and Actuator (S&A) Research Unit of the University of Twente, Enschede, the Netherlands. It includes short descriptions of all present projects concerning: micromachined mechanical sensors and actuators, optical sensors,

  19. Conjugated Polymers as Actuators: Modes of Actuation

    DEFF Research Database (Denmark)

    Skaarup, Steen

    The physical and chemical properties of conjugated polymers often depend very strongly on the degree of doping with anions or cations. The movement of ions in and out of the polymer matrix as it is redox cycled is also accompanied by mechanical changes. Both the volume and the stiffness can exhibit...... significant differences between the oxidized and reduced states. These effects form the basis of the use of conjugated polymers as actuators (or “artificial muscles”) controllable by a small (1-10 V) voltage. Three basic modes of actuation (bending, linear extension and stiffness change) have been proposed...

  20. Conjugated polymers as actuators: modes of actuation

    DEFF Research Database (Denmark)

    Skaarup, Steen

    2007-01-01

    The physical and chemical properties of conjugated polymers often depend very strongly on the degree of doping with anions or cations. The movement of ions in and out of the polymer matrix as it is redox cycled is also accompanied by mechanical changes. Both the volume and the stiffness can exhibit...... significant differences between the oxidized and reduced states. These effects form the basis of the use of conjugated polymers as actuators (or “artificial muscles”) controllable by a small (1-10 V) voltage. Three basic modes of actuation (bending, linear extension and stiffness change) have been proposed...

  1. Carbon nanotube based NEMS actuators and sensors

    Science.gov (United States)

    Forney, Michael; Poler, Jordan

    2011-03-01

    Single-walled carbon nanotubes (SWNTs) have been widely studied due to superior mechanical and electrical properties. We have grown vertically aligned SWNTs (VA-SWNTs) onto microcantilever (MC) arrays, which provides an architecture for novel actuators and sensors. Raman spectroscopy confirms that the CVD-grown nanotubes are SWNTs and SEM confirms aligned growth. As an actuator, this hybrid MC/VA-SWNT system can be electrostatically modulated. SWNTs are excellent electron acceptors, so we can charge up the VA-SWNT array by applying a voltage. The electrostatic repulsion among the charged SWNTs provides a surface stress that induces MC deflection. Simulation results show that a few electrons per SWNT are needed for measureable deflections, and experimental actuators are being characterized by SEM, Raman, and an AFM optical lever system. The applied voltage is sinusoidally modulated, and deflection is measured with a lock-in amplifier. These actuators could be used for nano-manipulation, release of drugs from a capsule, or nano-valves. As a sensor, this MC/VA-SWNT system offers an improved sensitivity for chemical and bio-sensing compared to surface functionalized MC-based sensors. Those sensors only have a 2D sensing surface, but a MC/VA-SWNT system has significantly more sensing surface because the VA-SWNTs extend microns off the MC surface.

  2. Analogies between a Meniscus and a Cantilever

    Institute of Scientific and Technical Information of China (English)

    LIU Jian-Lin

    2009-01-01

    Systematic and quantitative analyses of exact analogies between a meniscus and an elastica are performed. It is shown that the two governing equations take the same style after coordinate translation and scale transformation. The morphologies of the liquid bridge and the cantilever are calculated in terms of elliptic integrations, which can be reduced to the same shape,after converting the boundary conditions. The present analyses can make us grasp the nature of this physical phenomenon deeply and show some inspiration for designing the analogy experiments. Moreover, the calculated results are helpful to engineering applications, such as design and fabrication of MEMS, and micro-manipulations in micro/nano- technology.

  3. Nanoscale microwave microscopy using shielded cantilever probes

    KAUST Repository

    Lai, Keji

    2011-04-21

    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.

  4. Experimental and Numerical Study of Damaged Cantilever

    DEFF Research Database (Denmark)

    Rytter, A.; Krawczuk, M.; Kirkegaard, Poul Henning

    2000-01-01

    The introduction of a crack in a steel structure will cause a local change in the stiffness and damping capacity. The change in stiffness will lead to a change of some of the natural frequencies of the structure and a discontinuity in the associated mode shapes. This paper contains a presentation...... of the results from experimental and numerical tests with hollow section cantileves containing fatigue cracks. Two different finite-element (FE) models have been used to estimate the modal parameters numerically. The first FE model consists of beam elements. The second FE model consists of traditional...

  5. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.

    2016-09-15

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator\\'s nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli\\'s beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  6. Hysteresis of the resonance frequency of magnetostrictive bending cantilevers

    Science.gov (United States)

    Löffler, Michael; Kremer, Ramona; Sutor, Alexander; Lerch, Reinhard

    2015-05-01

    Magnetostrictive bending cantilevers are applicable for wirelessly measuring physical quantities such as pressure and strain. Exploiting the ΔE-effect, the resonance frequency of the cantilevers is shifted because of a change in the magnetic biasing field. The biasing field, in turn, depends on the applied pressure or strain, respectively. With a view to the application as a reliable sensor, maximum sensitivity but minimum hysteresis in the biasing field/resonance frequency dependence is preferred. In this contribution, monomorph bending cantilevers fabricated using magnetostrictive Fe49Co49V2 and Metglas 2605SA1 are investigated regarding their applicability for future sensors. For this purpose, the biasing field-dependent polarization of the magnetostrictive materials and bending of the cantilevers are determined. Furthermore, a setup to magnetically bias the cantilevers and determine the bending resonance frequency is presented. Here, the resonance frequency is identified by measuring the impulse response employing a laser Doppler vibrometer. The measurement results reveal that cantilevers made of Fe49Co49V2 possess a distinct hysteretic behaviour at low magnetic biasing field magnitudes. This is ascribed to the polarization and bending hysteresis. Cantilevers fabricated using Metglas 2605SA1 feature a lower resonance frequency shift compared to cantilevers with Fe49Co49V2, which would result in a lower sensitivity of the sensor. However, their resonance frequency hysteresis is almost negligible.

  7. Development of a microfabricated electrochemical-cantilever hybrid platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Pedersen, Christoffer; Elkjær, Karl;

    2011-01-01

    The design and fabrication of a combined electrochemical-cantilever microfluidic system is described. A chip integrating cantilevers with electrodes into a microchannel is presented with the accompanying polymer flow cell. Issues such as electrical and fluid connections are addressed, electromech...

  8. Development of Electrochemical Cantilever Sensors for DNA Applications

    DEFF Research Database (Denmark)

    Quan, Xueling; Heiskanen, Arto; Yi, Sun;

    2013-01-01

    In this work, we develop a generic DNA based sensing platform used for characterizing surface functionalization and detecting DNA hybridization. Silicon nitride cantilever sensors are fabricated with an integrated three-electrode system and integrated in a microfluidic chip. Cantilevers with gold...

  9. Interlaboratory round robin on cantilever calibration for AFM force spectroscopy.

    NARCIS (Netherlands)

    Riet, J. te; Katan, A.J.; Rankl, C.; Stahl, S.W.; Buul, A.M. van; Phang, I.Y.; Gomez-Casado, A.; Schon, P.; Gerritsen, J.W.; Cambi, A.; Rowan, A.E.; Vancso, G.J.; Jonkheijm, P.; Huskens, J.; Oosterkamp, T.H.; Gaub, H.; Hinterdorfer, P.; Figdor, C.G.; Speller, S.

    2011-01-01

    Single-molecule force spectroscopy studies performed by Atomic Force Microscopes (AFMs) strongly rely on accurately determined cantilever spring constants. Hence, to calibrate cantilevers, a reliable calibration protocol is essential. Although the thermal noise method and the direct Sader method are

  10. Cantilever surface stress sensors with single-crystalline silicon piezoresistors

    DEFF Research Database (Denmark)

    Rasmussen, Peter Andreas; Hansen, Ole; Boisen, Anja

    2005-01-01

    on cantilever sensors with integrated piezoresistive readout, that one finds between typical atomic force microscopy measurements and the surface stress sensors used in, e.g., biochemical measurements. We have simulated the response from piezoresistive cantilevers as a function of resistor type and placement...

  11. SU-8 Cantilever Sensor with Integrated Read-Out

    DEFF Research Database (Denmark)

    Johansson, Alicia Charlotte

    2007-01-01

    Cantilever baserede biosensorer kan bruges til så kaldet label-free detektion af små koncentrationer af molekyler i en opløsning. Når et specifikt molekyle binder til overfladen af en cantilever induceres et overfladestress som resulterer i en udbøjning af cantileveren. Cantileverens udbøjningen ...

  12. Interlaboratory round robin on cantilever calibration for AFM force spectroscopy.

    Science.gov (United States)

    te Riet, Joost; Katan, Allard J; Rankl, Christian; Stahl, Stefan W; van Buul, Arend M; Phang, In Yee; Gomez-Casado, Alberto; Schön, Peter; Gerritsen, Jan W; Cambi, Alessandra; Rowan, Alan E; Vancso, G Julius; Jonkheijm, Pascal; Huskens, Jurriaan; Oosterkamp, Tjerk H; Gaub, Hermann; Hinterdorfer, Peter; Figdor, Carl G; Speller, Sylvia

    2011-12-01

    Single-molecule force spectroscopy studies performed by Atomic Force Microscopes (AFMs) strongly rely on accurately determined cantilever spring constants. Hence, to calibrate cantilevers, a reliable calibration protocol is essential. Although the thermal noise method and the direct Sader method are frequently used for cantilever calibration, there is no consensus on the optimal calibration of soft and V-shaped cantilevers, especially those used in force spectroscopy. Therefore, in this study we aimed at establishing a commonly accepted approach to accurately calibrate compliant and V-shaped cantilevers. In a round robin experiment involving eight different laboratories we compared the thermal noise and the Sader method on ten commercial and custom-built AFMs. We found that spring constants of both rectangular and V-shaped cantilevers can accurately be determined with both methods, although the Sader method proved to be superior. Furthermore, we observed that simultaneous application of both methods on an AFM proved an accurate consistency check of the instrument and thus provides optimal and highly reproducible calibration. To illustrate the importance of optimal calibration, we show that for biological force spectroscopy studies, an erroneously calibrated cantilever can significantly affect the derived (bio)physical parameters. Taken together, our findings demonstrated that with the pre-established protocol described reliable spring constants can be obtained for different types of cantilevers.

  13. Micro‑cantilevers for optical sensing of biogenic amines

    DEFF Research Database (Denmark)

    Wang, Ying; Bravo Costa, Carlos André; Sobolewska, Elżbieta Karolina

    2017-01-01

    This paper discusses the functionalization of micro-cantilevers in order to bind and sense specific biogenic amines related to meat degradation (cadaverine). The micro-cantilevers were functionalized with the composite 1,4,8,11-tetraazacyclotetradecane (cyclam), which is binding to cadaverine mol...

  14. Influence of random roughness on cantilever resonance frequency

    NARCIS (Netherlands)

    Ergincan, O.; Palasantzas, G.

    2010-01-01

    In this paper we investigate the influence of random roughness on the oscillation frequency of cantilevers coated with thin film overlayers. First the theory expressions for the roughness-induced frequency shift are derived using the cantilever equation of motion. Subsequently it is shown that the r

  15. Tactile sensor integrated dielectric elastomer actuator for simultaneous actuation and sensing

    Science.gov (United States)

    Kadooka, Kevin; Imamura, Hiroya; Taya, Minoru

    2016-04-01

    Dielectric elastomers (DE) are a subgroup of electroactive polymers which may be used as soft transducers. Such soft transducers exhibit high energy density and silent operation, which makes them desirable for life-like robotic systems such as a robotic hand. A robotic hand must be able to sense the object being manipulated, in terms of normal and shear force being applied, and note when contact has been achieved or lost. To this end, a dielectric elastomer actuator (DEA) with integrated tactile sensing has been developed to provide simultaneous actuation and sensing. The tactile sensing dielectric elastomer actuator consists of a unimorph-type structure, where the active portion is a laminate of alternating DE and electrode material which expands under applied voltage, and the sensing portion is a stiffer sensing dielectric elastomer which has no electrical connection to the active portion. Under applied voltage, the deformation of the active portion expands but is constrained on one side by the sensing portion, resulting in bending actuation. The sensing portion is a DE with electrodes patterned to form 2x2 capacitive sensing arrays. Dome-shaped bumps positioned over the sensing arrays redistribute tactile forces onto the sensor segments, so that measurement of the capacitance change across the array allows for reconstruction of magnitude and direction of the incoming force.

  16. Cryogenic Piezoelectric Actuator

    Science.gov (United States)

    Jiang, Xiaoning; Cook, William B.; Hackenberger, Wesley S.

    2009-01-01

    In this paper, PMN-PT single crystal piezoelectric stack actuators and flextensional actuators were designed, prototyped and characterized for space optics applications. Single crystal stack actuators with footprint of 10 mm x10 mm and the height of 50 mm were assembled using 10 mm x10mm x0.15mm PMN-PT plates. These actuators showed stroke > 65 - 85 microns at 150 V at room temperature, and > 30 microns stroke at 77 K. Flextensional actuators with dimension of 10mm x 5 mm x 7.6 mm showed stroke of >50 microns at room temperature at driving voltage of 150 V. A flextensional stack actuator with dimension of 10 mm x 5 mm x 47 mm showed stroke of approx. 285 microns at 150 V at room temperature and > 100 microns at 77K under driving of 150 V should be expected. The large cryogenic stroke and high precision of these actuators are promising for cryogenic optics applications.

  17. Investigation on the magnetomechanical behavior of trilayered GM actuator

    Institute of Scientific and Technical Information of China (English)

    Heung-Shik Lee; Chongdu Cho

    2008-01-01

    In this article, it was suggested a TbFe/Co/Dy trilayered GM (Giant Magnetostrictive) film type actuator and investigated the magnetomechanical characteristics of the actuator for micro application. The trilayered films were fabricated at different thickness ratios to get an optimized structure. TbFe had positive GM properties, and cobalt, dysprosium layers made the magnetostriction property of composite film increase in low magnetic field. To fabricate the Si based microactuator with trilayered film, micromachining processes including RIE (Reactive Ion Etching) and selective DC magnetron sputtering techniques were combined. The deposited film thicknesses were measured by X-ray diffraction (XRD). As a result, the magnetization of the film on the fabricated actuator was observed to characterize the magnetic properties of the TbFe/Co/Dy film using VSM (Vibrating Sample Magnetometer). The magnetostriction of the actuator was determined by measuring the differences of curvature of the film coated silicon substrates using the optical cantilever method, and the deflections were also estimated under the external magnetic field lower than 0.5T for micro-system applications.

  18. Inkjet printing of electroactive polymer actuators on polymer substrates

    Science.gov (United States)

    Pabst, O.; Perelaer, J.; Beckert, E.; Schubert, U. S.; Eberhardt, R.; Tünnermann, A.

    2011-04-01

    Electroactive polymers (EAP) are promising materials for actuators in different application areas. This paper reports inkjet printing as a versatile tool for manufacturing EAP actuators. Drop-on-demand inkjet printing can be used for additive deposition of functional materials onto substrates. Cantilever bending actuators with lateral dimensions in the mm range are described here. A commercially available solution of electroactive polymers is dispensed onto metalized polycarbonate substrates using inkjet printing. These polymers exhibit piezoelectric behavior. Multiple layers are printed resulting in a film thickness of 5 to 10 μm. After printing, the polymer layers are annealed thermally at 130 °C. Top electrodes are deposited onto the EAP layer by inkjet printing a silver nanoparticle ink. The as-printed silver layers are sintered using an argon plasma - a recently developed sintering technique that is compatible with low TG polymer foils. After printing the EAP layers are poled. When applying an electric field across the polymer layer, piezoelectric strain in the EAP leads to a bending deflection of the structures. With driving voltages of 200 V the actuators generate displacements of 20 μm and blocking forces of approximately 3 mN. The first resonance frequency occurs at 230 Hz.

  19. Serial weighting of micro-objects with resonant microchanneled cantilevers

    Science.gov (United States)

    Ossola, Dario; Dörig, Pablo; Vörös, János; Zambelli, Tomaso; Vassalli, Massimo

    2016-10-01

    Atomic force microscopy (AFM) cantilevers have proven to be very effective mass sensors. The attachment of a small mass to a vibrating cantilever produces a resonance frequency shift that can be monitored, providing the ability to measure mass changes down to a few molecules resolution. Nevertheless, the lack of a practical method to handle the catch and release process required for dynamic weighting of microobjects strongly hindered the application of the technology beyond proof of concept measurements. Here, a method is proposed in which FluidFM hollow cantilevers are exploited to overcome the standard limitations of AFM-based mass sensors, providing high throughput single object weighting with picogram accuracy. The extension of the dynamic models of AFM cantilevers to hollow cantilevers was discussed and the effectiveness of mass weighting in air was validated on test samples.

  20. Optical racetrack resonator transduction of nanomechanical cantilevers.

    Science.gov (United States)

    Sauer, V T K; Diao, Z; Freeman, M R; Hiebert, W K

    2014-02-07

    Optomechanical transduction has demonstrated its supremacy in probing nanomechanical displacements. In order to apply nano-optomechanical systems (NOMS) as force and mass sensors, knowledge about the transduction responsivity (i.e. the change in measured optical transmission with nanomechanical displacement) and its tradeoffs with system design is paramount. We compare the measured responsivities of NOMS devices with varying length, optomechanical coupling strength gom, and optical cavity properties. Cantilever beams 1.5 to 5 μm long are fabricated 70 to 160 nm from a racetrack resonator optical cavity and their thermomechanical (TM) noise signals are measured. We derive a generic expression for the transduction responsivity of the NOMS in terms of optical and mechanical system parameters such as finesse, optomechanical coupling constant, and interaction length. The form of the expression holds direct insight as to how these parameters affect the responsivity. With this expression, we obtain the optomechanical coupling constants using only measurements of the TM noise power spectra and optical cavity transmission slopes. All optical pump/probe operation is also demonstrated in our side-coupled cantilever-racetrack NOMS. Finally, to assess potential operation in a gas sensing environment, the TM noise signal of a device is measured at atmospheric pressure.

  1. Numerical Simulation of Output Response of PVDF Sensor Attached on a Cantilever Beam Subjected to Impact Loading.

    Science.gov (United States)

    Dung, Cao Vu; Sasaki, Eiichi

    2016-04-27

    Polyvinylidene Flouride (PVDF) is a film-type polymer that has been used as sensors and actuators in various applications due to its mechanical toughness, flexibility, and low density. A PVDF sensor typically covers an area of the host structure over which mechanical stress/strain is averaged and converted to electrical energy. This study investigates the fundamental "stress-averaging" mechanism for dynamic strain sensing in the in-plane mode. A numerical simulation was conducted to simulate the "stress-averaging" mechanism of a PVDF sensor attached on a cantilever beam subjected to an impact loading, taking into account the contribution of piezoelectricity, the cantilever beam's modal properties, and electronic signal conditioning. Impact tests and FEM analysis were also carried out to verify the numerical simulation results. The results of impact tests indicate the excellent capability of the attached PVDF sensor in capturing the fundamental natural frequencies of the cantilever beam. There is a good agreement between the PVDF sensor's output voltage predicted by the numerical simulation and that obtained in the impact tests. Parametric studies were conducted to investigate the effects of sensor size and sensor position and it is shown that a larger sensor tends to generate higher output voltage than a smaller one at the same location. However, the effect of sensor location seems to be more significant for larger sensors due to the cancelling problem. Overall, PVDF sensors exhibit excellent sensing capability for in-plane dynamic strain induced by impact loading.

  2. Study of intrinsic localized vibrational modes in micromechanical oscillator arrays.

    Science.gov (United States)

    Sato, M; Hubbard, B E; English, L Q; Sievers, A J; Ilic, B; Czaplewski, D A; Craighead, H G

    2003-06-01

    Intrinsic localized modes (ILMs) have been observed in micromechanical cantilever arrays, and their creation, locking, interaction, and relaxation dynamics in the presence of a driver have been studied. The micromechanical array is fabricated in a 300 nm thick silicon-nitride film on a silicon substrate, and consists of up to 248 cantilevers of two alternating lengths. To observe the ILMs in this experimental system a line-shaped laser beam is focused on the 1D cantilever array, and the reflected beam is captured with a fast charge coupled device camera. The array is driven near its highest frequency mode with a piezoelectric transducer. Numerical simulations of the nonlinear Klein-Gordon lattice have been carried out to assist with the detailed interpretation of the experimental results. These include pinning and locking of the ILMs when the driver is on, collisions between ILMs, low frequency excitation modes of the locked ILMs and their relaxation behavior after the driver is turned off.

  3. Optimization of Actuating Origami Networks

    Science.gov (United States)

    Buskohl, Philip; Fuchi, Kazuko; Bazzan, Giorgio; Joo, James; Gregory, Reich; Vaia, Richard

    2015-03-01

    Origami structures morph between 2D and 3D conformations along predetermined fold lines that efficiently program the form, function and mobility of the structure. By leveraging design concepts from action origami, a subset of origami art focused on kinematic mechanisms, reversible folding patterns for applications such as solar array packaging, tunable antennae, and deployable sensing platforms may be designed. However, the enormity of the design space and the need to identify the requisite actuation forces within the structure places a severe limitation on design strategies based on intuition and geometry alone. The present work proposes a topology optimization method, using truss and frame element analysis, to distribute foldline mechanical properties within a reference crease pattern. Known actuating patterns are placed within a reference grid and the optimizer adjusts the fold stiffness of the network to optimally connect them. Design objectives may include a target motion, stress level, or mechanical energy distribution. Results include the validation of known action origami structures and their optimal connectivity within a larger network. This design suite offers an important step toward systematic incorporation of origami design concepts into new, novel and reconfigurable engineering devices. This research is supported under the Air Force Office of Scientific Research (AFOSR) funding, LRIR 13RQ02COR.

  4. Piezoresistive Probe Array for High Throughput Applications

    NARCIS (Netherlands)

    Gaitas, A.; French, P.

    2011-01-01

    Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5 nm gold ultrathin f

  5. MULTI-LAYER PIEZOELECTRIC ACTUATOR AND ITS APPLICATION IN CONTROLLABLE CONSTRAINED DAMPING TREATMENT

    Institute of Scientific and Technical Information of China (English)

    ZHANG Xinong; XIE Shilin; ZHANG Yahong

    2007-01-01

    A kind of novel multi-layer piezoelectric actuator is proposed and integrated with controllable constrained damping treatment to perform hybrid Vibration control. The governing equation of the System is derived based on the constitutive equations of elastic, viscoelastic and piezoelectric materials, which shows that the magnitude of control force exerted by multi-layer piezoelectric actuator is the quadratic function of the number of piezoelectric laminates used but in direct proportion to control voltage. This means that the multi-layer actuator can produce greater actuating force than that by piezoelectric laminate actuator with the same area under the identical control voltage. The optimal location placement of the multi-layer piezoelectric actuator is also discussed. As an example, the hybrid Vibration control of a cantilever rectangular thin-plate is numerically simulated and carried out experimentally. The simulated and experimental results validate the power of multi-layer piezoelectric actuator and indicate that the present hybrid damping technique can effectively suppress the low frequency modal Vibration of the experimental thin-plate structure.

  6. Magnetically Actuated Seal

    Science.gov (United States)

    Pinera, Alex

    2013-01-01

    This invention is a magnetically actuated seal in which either a single electromagnet, or multiple electromagnets, are used to control the seal's position. This system can either be an open/ close type of system or an actively controlled system.

  7. Magnetically Actuated Seal Project

    Data.gov (United States)

    National Aeronautics and Space Administration — FTT proposes development of a magnetically actuated dynamic seal. Dynamic seals are used throughout the turbopump in high-performance, pump-fed, liquid rocket...

  8. Muscle Motion Solenoid Actuator

    Science.gov (United States)

    Obata, Shuji

    It is one of our dreams to mechanically recover the lost body for damaged humans. Realistic humanoid robots composed of such machines require muscle motion actuators controlled by all pulling actions. Particularly, antagonistic pairs of bi-articular muscles are very important in animal's motions. A system of actuators is proposed using the electromagnetic force of the solenoids with the abilities of the stroke length over 10 cm and the strength about 20 N, which are needed to move the real human arm. The devised actuators are based on developments of recent modern electro-magnetic materials, where old time materials can not give such possibility. Composite actuators are controlled by a high ability computer and software making genuine motions.

  9. Tendon Driven Finger Actuation System

    Science.gov (United States)

    Ihrke, Chris A. (Inventor); Reich, David M. (Inventor); Bridgwater, Lyndon (Inventor); Linn, Douglas Martin (Inventor); Askew, Scott R. (Inventor); Diftler, Myron A. (Inventor); Platt, Robert (Inventor); Hargrave, Brian (Inventor); Valvo, Michael C. (Inventor); Abdallah, Muhammad E. (Inventor); hide

    2013-01-01

    A humanoid robot includes a robotic hand having at least one finger. An actuation system for the robotic finger includes an actuator assembly which is supported by the robot and is spaced apart from the finger. A tendon extends from the actuator assembly to the at least one finger and ends in a tendon terminator. The actuator assembly is operable to actuate the tendon to move the tendon terminator and, thus, the finger.

  10. Positioning magnetorheological actuator

    Energy Technology Data Exchange (ETDEWEB)

    Mikhailov, Valery; Bazinenkov, Alexey; Akimov, Igor [Bauman Moscow State Technical University, 2-nd Baumanskaia st. 5, MT-11, 105005, Moscow (Russian Federation); Borin, Dmitry [Technische Universitaet Dresden, Chair of Magnetofluiddynamics, 01062, Dresden (Germany)], E-mail: mikhailov@bmstu.ru

    2009-02-01

    In this work we consider a construction of a positioning magnetorheological actuator based on bellow units, as well as dynamical model, which include such elements as a magnetically hysteresis, pressure loses in hydraulic system, nonlinearity of rheological behaviour of working fluid. Two operating modes of positioning actuator are taken into account and transients are presented. Dynamical modelling shows possibility for the improvement of a real control system and ensure of submicron precision of positioning with millisecond time of response.

  11. Compact electrostatic comb actuator

    Science.gov (United States)

    Rodgers, M. Steven; Burg, Michael S.; Jensen, Brian D.; Miller, Samuel L.; Barnes, Stephen M.

    2000-01-01

    A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).

  12. In-situ piezoresponse force microscopy cantilever mode shape profiling

    Energy Technology Data Exchange (ETDEWEB)

    Proksch, R., E-mail: roger.proksch@oxinst.com [Asylum Research, an Oxford Instruments Company, Santa Barbara, California 93117 (United States)

    2015-08-21

    The frequency-dependent amplitude and phase in piezoresponse force microscopy (PFM) measurements are shown to be a consequence of the Euler-Bernoulli (EB) dynamics of atomic force microscope (AFM) cantilever beams used to make the measurements. Changes in the cantilever mode shape as a function of changes in the boundary conditions determine the sensitivity of cantilevers to forces between the tip and the sample. Conventional PFM and AFM measurements are made with the motion of the cantilever measured at one optical beam detector (OBD) spot location. A single OBD spot location provides a limited picture of the total cantilever motion, and in fact, experimentally observed cantilever amplitude and phase are shown to be strongly dependent on the OBD spot position for many measurements. In this work, the commonly observed frequency dependence of PFM response is explained through experimental measurements and analytic theoretical EB modeling of the PFM response as a function of both frequency and OBD spot location on a periodically poled lithium niobate sample. One notable conclusion is that a common choice of OBD spot location—at or near the tip of the cantilever—is particularly vulnerable to frequency dependent amplitude and phase variations stemming from dynamics of the cantilever sensor rather than from the piezoresponse of the sample.

  13. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    Science.gov (United States)

    Osmani, Bekim; Töpper, Tino; Deschenaux, Christian; Nohava, Jiri; Weiss, Florian M.; Leung, Vanessa; Müller, Bert

    2015-02-01

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

  14. Solid State Adaptive Rotor Using Postbuckled Precompressed, Bending-Twist Coupled Piezoelectric Actuator Elements

    Directory of Open Access Journals (Sweden)

    Ronald M. Barrett

    2012-01-01

    Full Text Available This paper is centered on a new actuation mechanism which is integrated on a solid state rotor. This paper outlines the application of such a system via a Post-Buckled Precompression (PBP technique at the end of a twist-active piezoelectric rotor blade actuator. The basic performance of the system is handily modeled by using laminated plate theory techniques. A dual cantilevered spring system was used to increasingly null the passive stiffness of the root actuator along the feathering axis of the rotor blade. As the precompression levels were increased, it was shown that corresponding blade pitch levels also increased. The PBP cantilever spring system was designed so as to provide a high level of stabilizing pitch-flap coupling and inherent resistance to rotor propeller moments. Experimental testing showed pitch deflections increasing from just 8° peak-to-peak deflections at 650 V/mm field strength to more than 26° at the same field strength with design precompression levels. Dynamic testing showed the corner frequency of the linear system coming down from 63 Hz (3.8/rev to 53 Hz (3.2/rev. Thrust coefficients manipulation levels were shown to increase from 0.01 to 0.028 with increasing precompression levels. The paper concludes with an overall assessment of the actuator design.

  15. Development and Application of Energetic Actuators for Shear and Vortex Dominated Flow Control

    Science.gov (United States)

    2014-03-06

    while the actuator operates in single shot and burst modes. Figure 2.4: Four orifice actuator; a) side -view, b) top-view. 2.2.1. Reduced Ambient...high temperature from the electrical discharge increases the pressure inside the cavity, and an orifice array located on the cavity allows the air...volume, energy deposition, number of orifices and orifice diameter, among others. Initial validation of actuator performance was experimentally carried

  16. Quantitative Boundary Support Characterization for Cantilever MEMS

    Directory of Open Access Journals (Sweden)

    Ion Stiharu

    2007-10-01

    Full Text Available Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the device through testing. However, MEMSare batch fabricated in large numbers where individual testing is neither possible nor costeffective. Hence, a suitable test algorithm needs to be developed where the test resultsobtained for a few devices can be applied to the whole fabrication batch, and also to thefoundry process in general. In this regard, this paper proposes a method to test MEMScantilevers under variant electro-thermal influences in order to quantify the effectiveboundary support condition obtained for a foundry process. A non-contact optical sensingapproach is employed for the dynamic testing. The Rayleigh-Ritz energy method usingboundary characteristic orthogonal polynomials is employed for the modeling andtheoretical analysis.

  17. Single microparticles mass measurement using an AFM cantilever resonator

    CERN Document Server

    Mauro, Marco; Ferrini, Gianluca; Puglisi, Roberto; Balduzzi, Donatella; Galli, Andrea

    2014-01-01

    In this work is presented a microbalance for single microparticle sensing based on resonating AFM cantilever. The variation of the resonator eigenfrequency is related to the particle mass positioned at the free apex of the cantilever. An all-digital phase locked loop (PLL) control system is developed to detect the variations in cantilever eigenfrequency. Two particle populations of different materials are used in the experimental test, demonstrating a mass sensitivity of 15 Hz/pg in ambient conditions. Thereby it is validated the possibility of developing an inexpensive, portable and sensitive microbalance for point-mass sensing.

  18. Voltage generation of piezoelectric cantilevers by laser heating.

    Science.gov (United States)

    Hsieh, Chun-Yi; Liu, Wei-Hung; Chen, Yang-Fang; Shih, Wan Y; Gao, Xiaotong; Shih, Wei-Heng

    2012-11-15

    Converting ambient thermal energy into electricity is of great interest in harvesting energy from the environment. Piezoelectric cantilevers have previously been shown to be an effective biosensor and a tool for elasticity mapping. Here we show that a single piezoelectric (lead-zirconate titanate (PZT)) layer cantilever can be used to convert heat to electricity through pyroelectric effect. Furthermore, piezoelectric-metal (PZT-Ti) bi-layer cantilever showed an enhanced induced voltage over the single PZT layer alone due to the additional piezoelectric effect. This type of device can be a way for converting heat energy into electricity.

  19. Polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes

    DEFF Research Database (Denmark)

    Johansson, Alicia; Calleja, M.; Dimaki, Maria;

    2004-01-01

    A polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes has been designed and realized. Multi-walled carbon nanotubes from aqueous solution have been assembled between two metal electrodes that are separated by 2 mu m and embedded in the polymer cantilever. The entire chip......, except for the metallic electrodes and wiring, was fabricated in the photoresist SU-8. SU-8 allows for an inexpensive, flexible and fast fabrication method, and the cantilever platform provides a hydrophobic surface that should be well suited for nanotube assembly. The device can be integrated in a micro...

  20. Scanned-cantilever atomic force microscope with large scanning range

    Institute of Scientific and Technical Information of China (English)

    Jintao Yang; Wendong Xu

    2006-01-01

    A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100 × 100 (μm) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

  1. Adaptive Model Predictive Vibration Control of a Cantilever Beam with Real-Time Parameter Estimation

    Directory of Open Access Journals (Sweden)

    Gergely Takács

    2014-01-01

    Full Text Available This paper presents an adaptive-predictive vibration control system using extended Kalman filtering for the joint estimation of system states and model parameters. A fixed-free cantilever beam equipped with piezoceramic actuators serves as a test platform to validate the proposed control strategy. Deflection readings taken at the end of the beam have been used to reconstruct the position and velocity information for a second-order state-space model. In addition to the states, the dynamic system has been augmented by the unknown model parameters: stiffness, damping constant, and a voltage/force conversion constant, characterizing the actuating effect of the piezoceramic transducers. The states and parameters of this augmented system have been estimated in real time, using the hybrid extended Kalman filter. The estimated model parameters have been applied to define the continuous state-space model of the vibrating system, which in turn is discretized for the predictive controller. The model predictive control algorithm generates state predictions and dual-mode quadratic cost prediction matrices based on the updated discrete state-space models. The resulting cost function is then minimized using quadratic programming to find the sequence of optimal but constrained control inputs. The proposed active vibration control system is implemented and evaluated experimentally to investigate the viability of the control method.

  2. Comparison of stress patterns and displacement in conventional cantilever fixed partial denture with resin bonded cantilever fixed partial denture: A finite element analysis

    Directory of Open Access Journals (Sweden)

    Prashanti E

    2010-01-01

    Full Text Available Aim: This study aims to analyze the stress patterns and displacement in the cantilever resin bonded fixed partial denture (RBFPD and compare it with the conventional cantilever fixed partial denture using 3-D finite element analysis. Also, the effect of cement on the displacement and stress patterns in conventional cantilever fixed partial denture was to be analyzed. Materials and Methods: Three-dimensional models were prepared layer wise to depict the conventional cantilever and the cantilever RBFPD. Once the models were made, the material properties were assigned and divided into three groups. (2-conventional cantilever with resin cement, 1- conventional cantilever with GIC cement and 3-resin bonded cantilever with resin cement. Load was applied in vertical as well as lateral directions and the stress patterns along with displacement were analyzed. Results: The results revealed that the von Mises stresses in all the three groups were found to be almost equal under vertical loading. Under lateral loading, the stress was more in cantilever RBFPD. Displacement in all the three axes was significantly less in the cantilever RBFPD. Conclusion: Stress concentration in the lateral direction in cantilever RBFPD was found to be higher than the cantilever conventional group. Displacement in X, Y and Z axes was less in cantilever RBFPD.

  3. Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

    KAUST Repository

    Conchouso Gonzalez, David

    2015-04-01

    This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.

  4. Wafer-level vacuum packaging for an optical readout bi-material cantilever infrared FPA

    Science.gov (United States)

    Li, Shuyu; Zhou, Xiaoxiong; Yu, Xiaomei

    2013-12-01

    In this paper, we report the design and fabrication of an uncooled infrared (IR) focal plane array (FPA) on quartz substrate and the wafer-level vacuum packaging for the IR FPA in view of an optical readout method. This FPA is composed of bi-material cantilever array which fabricated by the Micro-Electro Mechanical System (MEMS) technology, and the wafer-level packaging of the IR FPA is realized based on AuSn solder bonding technique. The interface of soldering is observed by scan electron microscope (SEM), which indicates that bonding interface is smooth and with no bubbles. The air leakage rate of packaged FPA is measured to be 1.3×10-9 atm·cc/s.

  5. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

    Directory of Open Access Journals (Sweden)

    Xinxin Li

    2009-01-01

    Full Text Available The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.

  6. Resonance frequency shift of strongly heated micro-cantilevers

    CERN Document Server

    Sandoval, Felipe Aguilar; Bertin, Éric; Bellon, Ludovic

    2015-01-01

    In optical detection setups to measure the deflection of micro-cantilevers, part of the sensing light is absorbed, heating the mechanical probe. We present experimental evidences of a frequency shift of the resonant modes of a cantilever when the light power of the optical measurement set-up is increased. This frequency shift is a signature of the temperature rise, and presents a dependence on the mode number. An analytical model is derived to take into account the temperature profile along the cantilever, it shows that the frequency shifts are given by an average of the profile weighted by the local curvature for each resonant mode. We apply this framework to measurements in vacuum and demonstrate that huge temperatures can be reached with moderate light intensities: a thousand {\\textdegree}C with little more than 10 mW. We finally present some insight into the physical phenomena when the cantilever is in air instead of vacuum.

  7. Integrated optical sensors using micromechanical bridges and cantilevers

    Science.gov (United States)

    Wu, Shaodong; Frankena, Hans J.

    1993-03-01

    Micromechanical bridges and cantilevers sensitive to external forces have been fabricated upon Si substrates. They are used as optical waveguides and part of sensor circuits. The waveguides consist of sandwiched layers of an SiO2 buffer, an Al2O3 waveguide and an SiO2 cover. The bridges and cantilevers with very small dimensions such as 100 micrometers in length, 5 micrometers in width and 2.5 micrometers in thickness have been successfully produced. Such bridge- or cantilever-shaped waveguide structures have been applied in acoustic signal detection and noise monitoring. In this paper, the bridge and cantilever structures will be analyzed and experimental results on sound measurement will be presented.

  8. Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

    DEFF Research Database (Denmark)

    Jiang, Chenhui; Johansen, Tom Keinicke; Jónasson, Sævar Þór;

    2011-01-01

    This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC...... resonators is at first theoretically analyzed. A LC resonator based biosensor with beams is designed and optimized by using 3D electromagnetic (EM) simulations, where the beam is a typical variation of cantilevers. The sensitivity of the lossless biosensor is predicted as 4.6MHz/nm. The 3-dB bandwidths...... of the resonances are narrowed for improving the resolution of distinguishing resonances by reducing conductive loss of electrodes. The lossy biosensor can achieve the highest sensitivity as 5.6 MHz/nm and narrowest 3-dB bandwidth as 5 GHz....

  9. Feedback Control of Flow Separation Using Plasma Actuator and FBG Sensor

    Directory of Open Access Journals (Sweden)

    Takehiko Segawa

    2016-01-01

    Full Text Available A feedback control system for mitigating flow separation was developed by using a string-type dielectric-barrier-discharge (DBD plasma actuator and a fiber Bragg grating (FBG sensor. Tangential jets were induced from the string-type DBD plasma actuator, which was located at 5% chord from the leading edge of an NACA0024 airfoil. The FBG sensor was attached to the interior surface near the root of the cantilever beam modeled on the pressure surface of the airfoil. The strain at the cantilever root was reflected in the form of Bragg wavelengths (λB detected by the FBG sensor when the cantilever tip was vibrated by the flow near the trailing edge of the airfoil. It was found that calculating running standard deviations in the Bragg wavelength (λB′ detected by the sensor was valuable for judging flow separation in real time. The feedback control of flow separation on the NACA0024 airfoil was successfully demonstrated by setting λB′=0.0028 with periodic flow separations generated in a wind tunnel by oscillating a side wall of the test section with frequency fw=0.42 Hz. It was confirmed that the appearance probability of flow separation tends to decrease with a decrease in the duration for calculating λB′ and with an increase in the duration of jet injection.

  10. Modeling of a flexible beam actuated by shape memory alloy wires

    Science.gov (United States)

    Shu, Steven G.; Lagoudas, Dimitris C.; Hughes, Declan; Wen, John T.

    1997-06-01

    A thermomechanical model is developed to predict the structural response of a flexible beam with shape memory alloy (SMA) wire actuators. A geometrically nonlinear static analysis is first carried out to investigate the deformed shape of a flexible cantilever beam caused by an externally-attached SMA wire actuated electrically. The actuation force applied by the SMA actuator to the beam is evaluated by solving a coupled problem that combines a thermodynamic constitutive model of SMAs with the heat conduction equation in the SMA and the structural model of the beam. To calculate the temperature history of the SMA actuator for given electrical current input, the heat transfer equation is solved with the electrical resistive heating being modeled as a distributed heat source along the SMA wire. The steps in the formulation are connected together through an iterative scheme that takes into account the static equilibrium of the beam and the constitutive relation of SMAs, thus translating an electrical current history input into beam strain output. The proposed model is used to simulate the experimental results, thus demonstrating the feasibility of using SMA actuators for shape control of active flexible structural systems.

  11. Magnetic Actuators and Sensors

    Science.gov (United States)

    Brauer, John R.

    2005-12-01

    Magnetic actuators and sensors are needed to enable computer and manual control of motion. Magnetic actuators allow a small electrical signal to move small or large objects. To sense the amount of motion, magnetic sensors are frequently used. This book provides the most up-to-date coverage of topics important to modern engineers, both electrical and mechanical. The author includes the latest findings and design techniques from computer models. The latest software tools are used.

  12. Hydraulic involute cam actuator

    Science.gov (United States)

    Love, Lonnie J.; Lind, Randall F.

    2011-11-01

    Mechanical joints are provided in which the angle between a first coupled member and a second coupled member may be varied by mechanical actuators. In some embodiments the angle may be varied around a pivot axis in one plane and in some embodiments the angle may be varied around two pivot axes in two orthogonal planes. The joints typically utilize a cam assembly having two lobes with an involute surface. Actuators are configured to push against the lobes to vary the rotation angle between the first and second coupled member.

  13. Actuator concepts and mechatronics

    Science.gov (United States)

    Gilbert, Michael G.; Horner, Garnett C.

    1998-06-01

    Mechatronic design implies the consideration of integrated mechanical, electrical, and local control characteristics in electromechanical device design. In this paper, mechatronic development of actuation device concepts for active aircraft aerodynamic flow control are presented and discussed. The devices are intended to be embedded in aircraft aerodynamic surfaces to provide zero-net-momentum jets or additional flow-vorticity to control boundary layers and flow- separation. Two synthetic jet device prototypes and one vorticity-on-demand prototype currently in development are described in the paper. The aspects of actuation materials, design approaches to generating jets and vorticity, and the integration of miniaturized electronics are stressed.

  14. Fault tolerant linear actuator

    Science.gov (United States)

    Tesar, Delbert

    2004-09-14

    In varying embodiments, the fault tolerant linear actuator of the present invention is a new and improved linear actuator with fault tolerance and positional control that may incorporate velocity summing, force summing, or a combination of the two. In one embodiment, the invention offers a velocity summing arrangement with a differential gear between two prime movers driving a cage, which then drives a linear spindle screw transmission. Other embodiments feature two prime movers driving separate linear spindle screw transmissions, one internal and one external, in a totally concentric and compact integrated module.

  15. Topology optimization of embedded piezoelectric actuators considering control spillover effects

    Science.gov (United States)

    Gonçalves, Juliano F.; De Leon, Daniel M.; Perondi, Eduardo A.

    2017-02-01

    This article addresses the problem of active structural vibration control by means of embedded piezoelectric actuators. The topology optimization method using the solid isotropic material with penalization (SIMP) approach is employed in this work to find the optimum design of actuators taken into account the control spillover effects. A coupled finite element model of the structure is derived assuming a two-phase material and this structural model is written into the state-space representation. The proposed optimization formulation aims to determine the distribution of piezoelectric material which maximizes the controllability for a given vibration mode. The undesirable effects of the feedback control on the residual modes are limited by including a spillover constraint term containing the residual controllability Gramian eigenvalues. The optimization of the shape and placement of the conventionally embedded piezoelectric actuators are performed using a Sequential Linear Programming (SLP) algorithm. Numerical examples are presented considering the control of the bending vibration modes for a cantilever and a fixed beam. A Linear-Quadratic Regulator (LQR) is synthesized for each case of controlled structure in order to compare the influence of the additional constraint.

  16. Nonmagnetic driver for piezoelectric actuators

    DEFF Research Database (Denmark)

    Ekhtiari, Marzieh

    2014-01-01

    Piezoelectric actuator drive aims to enable reliable motor performance in strong magnetic fields for magnetic res- onance imaging and computed tomography treatment tables. There are technical limitations in operation of these motors and drive systems related to magnetic interference. Piezoelectric...... actuators. Therefore, piezoelectric transformer-based power converters are used for driving piezoelectric actuator drive motor in the presence of high electromagnetic field....

  17. Overview on permanent magnetic actuator

    Institute of Scientific and Technical Information of China (English)

    2006-01-01

    Permanent magnetic actuator (PMA), as a new electronic actuator of vacuum circuit breakers, certainly will be used to replace the traditional mechanical actuator. It has such advantages as simple structure, high reliability, free maintenance, and so on. This paper summarizes the development, structure, magnetic analysis, character analysis, and control strategy of PMA, and also predicts the future trend of PMA development

  18. Rotary actuators for plastic valves

    Energy Technology Data Exchange (ETDEWEB)

    Rudin, M. [Georg Fischer Piping Systems Ltd, Schaffhausen (Switzerland)

    2004-07-01

    Flexibility and modularity plus a high level of quality are the defining characteristics of this new generation of actuators from Georg Fischer. In conjunction with the new 546 ball valve, the PA 11/PA 21 pneumatic actuators and the EA 11/EA 21 electric actuators form an optimally co-ordinated system. (orig.)

  19. Magnetically actuated patterns for bioinspired reversible adhesion (dry and wet).

    Science.gov (United States)

    Drotlef, Dirk-Michael; Blümler, Peter; del Campo, Aránzazu

    2014-02-01

    A facile strategy to obtain magnetically actuated arrays of micropillars able to undergo reversible, homogeneous, drastic, and tunable geometrical changes upon application of a magnetic field with variable strength is demonstrated. A magnetically tunable gecko-inspired adhesive that works under dry and wet conditions is realized using elastomeric micropatterns containing magnetic microparticles.

  20. Resonance Based Micromechanical Cantilever for Gas Sensing

    Directory of Open Access Journals (Sweden)

    Subhashini. S

    2013-04-01

    Full Text Available Our world is facing some drastic changes in the climatic conditions due to the heating effect caused by various greenhouse gases. The most harmful gas among them is Carbon dioxide and is increasing at anuncontrolled rate.This paper aims in finding out the quantity of the major polluting gas carbon dioxide. The gravimetric sensor works by adsorbing the CO2 molecules on ZnO sensing layer, which alters the overall mass of the sensor. The mechanical structure is a cantilever, having its own resonant frequency. To selectively adsorbCO2 molecules from the mixture of gaseous molecules, ZnO at a specific temperature is used. As the gas molecules are adsorbed the mass increases and hence there is a change in resonant frequency. This change in frequency gives the measure of the quantity of CO2 molecules present in that environment. The major expected advantage of this technique would be the repeatability of the sensor that is used. This Quantitative analysis of CO2 would be helpful for mankind by alerting them about the environment in which they work,by proper conditioning and networking

  1. Measurement of Mechanical Properties of Cantilever Shaped Materials

    Directory of Open Access Journals (Sweden)

    Thomas Thundat

    2008-05-01

    Full Text Available Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young’s modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature

  2. Electromechanical flight control actuator

    Science.gov (United States)

    1979-01-01

    The feasibility of using an electromechanical actuator (EMA) as the primary flight control equipment in aerospace flight is examined. The EMA motor design is presented utilizing improved permanent magnet materials. The necessary equipment to complete a single channel EMA using the single channel power electronics breadboard is reported. The design and development of an improved rotor position sensor/tachometer is investigated.

  3. Airplane Actuation Trade Study

    Science.gov (United States)

    1983-01-01

    the electrical subsystem it is anticipated that 270 HVDC will not always be the most efficient power source. Lighting, instrumentation, avionics...sizing considerations all motor loads such as surface control actuators, fuel pumps, ECS fans and pumps, etc., are regarded as powered by 270 HVDC . All

  4. Shape Memory Alloy Actuator

    Science.gov (United States)

    Baumbick, Robert J. (Inventor)

    2002-01-01

    The present invention discloses and teaches a unique, remote optically controlled micro actuator particularly suitable for aerospace vehicle applications wherein hot gas, or in the alternative optical energy, is employed as the medium by which shape memory alloy elements are activated. In gas turbine powered aircraft the source of the hot gas may be the turbine engine compressor or turbine sections.

  5. A Magnetic Bead Actuator

    NARCIS (Netherlands)

    Derks, R.; Prins, M.W.J.; Wimberger-Friedl, R.

    2006-01-01

    Actuation principles of superparamagnetic beads applicable on biosensing (at single beads and chain orderning) are studied in this report. This research can be used to develop new techniques that are able to accelerate bio-assays. An experimental setup containing a sub-microliter fluid volume

  6. Piezoelectric actuator renaissance

    Science.gov (United States)

    Uchino, Kenji

    2015-03-01

    This paper resumes the content of the invited talk of the author, read at the occasion of the International Workshop on Relaxor Ferroelectrics, IWRF 14, held on October 12-16, 2014 in Stirin, Czech Republic. It reviews the recent advances in materials, designing concepts, and new applications of piezoelectric actuators, as well as the future perspectives of this area.

  7. Thermally Actuated Hydraulic Pumps

    Science.gov (United States)

    Jones, Jack; Ross, Ronald; Chao, Yi

    2008-01-01

    Thermally actuated hydraulic pumps have been proposed for diverse applications in which direct electrical or mechanical actuation is undesirable and the relative slowness of thermal actuation can be tolerated. The proposed pumps would not contain any sliding (wearing) parts in their compressors and, hence, could have long operational lifetimes. The basic principle of a pump according to the proposal is to utilize the thermal expansion and contraction of a wax or other phase-change material in contact with a hydraulic fluid in a rigid chamber. Heating the chamber and its contents from below to above the melting temperature of the phase-change material would cause the material to expand significantly, thus causing a substantial increase in hydraulic pressure and/or a substantial displacement of hydraulic fluid out of the chamber. Similarly, cooling the chamber and its contents from above to below the melting temperature of the phase-change material would cause the material to contract significantly, thus causing a substantial decrease in hydraulic pressure and/or a substantial displacement of hydraulic fluid into the chamber. The displacement of the hydraulic fluid could be used to drive a piston. The figure illustrates a simple example of a hydraulic jack driven by a thermally actuated hydraulic pump. The pump chamber would be a cylinder containing encapsulated wax pellets and containing radial fins to facilitate transfer of heat to and from the wax. The plastic encapsulation would serve as an oil/wax barrier and the remaining interior space could be filled with hydraulic oil. A filter would retain the encapsulated wax particles in the pump chamber while allowing the hydraulic oil to flow into and out of the chamber. In one important class of potential applications, thermally actuated hydraulic pumps, exploiting vertical ocean temperature gradients for heating and cooling as needed, would be used to vary hydraulic pressures to control buoyancy in undersea research

  8. Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.

  9. A transparent and stretchable graphene-based actuator for tactile display.

    Science.gov (United States)

    Kim, Uikyum; Kang, Junmo; Lee, Choonghan; Kwon, Hyeok Yong; Hwang, Soonhwi; Moon, Hyungpil; Koo, Ja Choon; Nam, Jae-Do; Hong, Byung Hee; Choi, Jae-Boong; Choi, Hyouk Ryeol

    2013-04-12

    A tactile display is an important tool to help humans interact with machines by using touch. In this paper, we present a transparent and stretchable graphene-based actuator for advanced tactile displays. The proposed actuator is composed of transparent and compliant graphene electrodes and a dielectric elastomer substrate. Since the electrode is coated onto the appointed region of the substrate layer by layer, only the area of the dielectric elastomer substrate with electrodes bumps up in response to the input voltage, which consequently produces actuation. The actuator is proven to be operable while preserving its electrical and mechanical properties even under 25% stretching. Also, the simple fabrication of the proposed actuator is cost-effective and can easily be extended to multiple arrays. The actuator is expected to be applicable to various applications including tactile displays, vari-focal lenses etc.

  10. Advancements in Actuated Musical Instruments

    DEFF Research Database (Denmark)

    Overholt, Daniel; Berdahl, Edgar; Hamilton, Robert

    2011-01-01

    This article presents recent developments in actuated musical instruments created by the authors, who also describe an ecosystemic model of actuated performance activities that blur traditional boundaries between the physical and virtual elements of musical interfaces. Actuated musical instrument...... that these instruments enable. We look at some of the conceptual and perceptual issues introduced by actuated musical instruments, and finally we propose some directions in which such research may be headed in the future.......This article presents recent developments in actuated musical instruments created by the authors, who also describe an ecosystemic model of actuated performance activities that blur traditional boundaries between the physical and virtual elements of musical interfaces. Actuated musical instruments...... are physical instruments that have been endowed with virtual qualities controlled by a computer in real-time but which are nevertheless tangible. These instruments provide intuitive and engaging new forms of interaction. They are different from traditional (acoustic) and fully automated (robotic) instruments...

  11. Miniature Low-Mass Drill Actuated by Flextensional Piezo Stack

    Science.gov (United States)

    Sherrit, Stewart; Badescu, Mircea; Bar-Cohen, Yoseph

    2010-01-01

    Recent experiments with a flextensional piezoelectric actuator have led to the development of a sampler with a bit that is designed to produce and capture a full set of sample forms including volatiles, powdered cuttings, and core fragments. The flextensional piezoelectric actuator is a part of a series of devices used to amplify the generated strain from piezoelectric actuators. Other examples include stacks, bimorphs, benders, and cantilevers. These devices combine geometric and resonance amplifications to produce large stroke at high power density. The operation of this sampler/drill was demonstrated using a 3x2x1-cm actuator weighing 12 g using power of about 10-W and a preload of about 10 N. A limestone block was drilled to a depth of about 1 cm in five minutes to produce powdered cuttings. It is generally hard to collect volatiles from random surface profiles found in rocks and sediment, powdered cuttings, and core fragments. Toward the end of collecting volatiles, the actuator and the bit are covered with bellows-shaped shrouds to prevent fines and other debris from reaching the analyzer. A tube with a miniature bellows (to provide flexibility) is connected to the bit and directs the flow of the volatiles to the analyzer. Another modality was conceived where the hose is connected to the bellows wall directly to allow the capture of volatiles generated both inside and outside the bit. A wide variety of commercial bellows used in the vacuum and microwave industries can be used to design the volatiles capture mechanism. The piezoelectric drilling mechanism can potentially be operated in a broad temperature range from about-200 to less than 450 C. The actuators used here are similar to the actuators that are currently baselined to fly as part of the inlet funnel shaking mechanism design of MSL (Mars Science Laboratory). The space qualification of these parts gives this drill a higher potential for inclusion in a future mission, especially when considering its

  12. Experiments on Optimal Vibration Control of a Flexible Beam Containing Piezoelectric Sensors and Actuators

    Directory of Open Access Journals (Sweden)

    Gustavo L.C.M. Abreu

    2003-01-01

    Full Text Available In this paper, a digital regulator is designed and experimentally implemented for a flexible beam type structure containing piezoelectric sensors and actuators by using optimal control design techniques. The controller consists of a linear quadratic regulator with a state estimator, namely a Kalman observer. The structure is a cantilever beam containing a set of sensor/actuator PVDF/PZT ceramic piezoelectric patches bonded to the beam surface at the optimal location obtained for the first three vibration modes. The equations of motion of the beam are developed by using the assumed modes technique for flexible structures in infinite-dimensional models. This paper uses a method of minimizing the effect of the removed higher order modes on the low frequency dynamics of the truncated model by adding a zero frequency term to the low order model of the system. A measure of the controllability and observability of the system based on the modal cost function for flexible structures containing piezoelectric elements (intelligent structures is used. The observability and controllability measures are determined especially to guide the placement of sensors and actuators, respectively. The experimental and numerical transfer functions are adjusted by using an optimization procedure. Experimental results illustrate the optimal control design of a cantilever beam structure.

  13. Size effect on the static behavior of electrostatically actuated microbeams

    Institute of Scientific and Technical Information of China (English)

    Li Yin; Qin Qian; Lin Wang

    2011-01-01

    We present a new analytical model for electrostatically actuated microbeams to explore the size effect by using the modified couple stress theory and the minimum total potential energy principle. A material length scale parameter is introduced to represent the size-dependent characteristics of microbeams. This model also accounts for the nonlinearities associated with the mid-plane stretching force and the electrostatical force. Numerical analysis for microbeams with clamped-clamped and cantilevered conditions has been performed. It is found that the intensity of size effect is closely associated with the thickness of the microbeam, and smaller beam thickness displays stronger size effect and hence yields smaller deflection and larger pull-in voltage. When the beam thickness is comparable to the material length scale parameter, the size effect is significant and the present theoretical model including the material length scale parameter is adequate for predicting the static behavior of microbeam-based MEMS.

  14. SiC-Based Miniature High-Temperature Cantilever Anemometer

    Science.gov (United States)

    Okojie, Robert S.; Fralick, Gustave; Saad, George J.

    2004-01-01

    The figure depicts a miniature cantilever-type anemometer that has been developed as a prototype of compact, relatively nonintrusive anemometers that can function at temperatures up to 600 C and that can be expected to be commercially mass-producible at low cost. The design of this anemometer, and especially the packaging aspect of the design, is intended to enable measurement of turbulence in the high-temperature, high-vibration environment of a turbine engine or in any similar environment. The main structural components of the anemometer include a single-crystal SiC cantilever and two polycrystalline SiC clamping plates, all made from chemical-vapor-deposited silicon carbide. Fabrication of these components from the same basic material eliminates thermal-expansion mismatch, which has introduced spurious thermomechanical stresses in cantilever-type anemometers of prior design. The clamping plates are heavily oxidized to improve electrical insulation at high temperature. A cavity that serves as a receptacle for the clamped end of the cantilever is etched into one end of one clamping plate. Trenches that collectively constitute a socket for a multipin electrical plug (for connection to external electronic circuitry) are etched into the opposite end of this clamping plate. Metal strips for electrical contact are deposited on one face of the other clamping plate. Piezoresistive single-crystal SiC thin-film strain gauges are etched in the n-type SiC epilayer in a Wheatstone-bridge configuration. Metal contact pads on the cantilever that extend into the clamping-receptacle area, are obtained by deposition and patterning using standard semiconductor photolithography and etching methods. The cantilever and the two clamping plates are assembled into a sandwich structure that is then clamped in a stainless-steel housing. The Wheatstone- bridge carrying SiC cantilever with the metal contact pads on the piezoresistors is slid into the receptacle in the bottom clamping plate

  15. Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

    Science.gov (United States)

    Larsen, T.; Doll, J. C.; Loizeau, F.; Hosseini, N.; Peng, A. W.; Fantner, G. E.; Ricci, A. J.; Pruitt, B. L.

    2017-04-01

    Electrothermal actuators have many advantages compared to other actuators used in micro-electro-mechanical systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10-90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10-90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

  16. Efficiency Enhancement of a Cantilever-Based Vibration Energy Harvester

    Directory of Open Access Journals (Sweden)

    Ali E. Kubba

    2013-12-01

    Full Text Available Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA was used as an initial tool to compare the three geometries’ stiffness (K, output open-circuit voltage (Vave, and average normal strain in the piezoelectric transducer (εave that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3, has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle.

  17. High resolved velocity measurements using Laser Cantilever Anemometry

    Science.gov (United States)

    Puczylowski, Jaroslaw; Hölling, Michael; Peinke, Joachim

    2016-11-01

    We have developed a new anemometer, namely the 2d-LCA (2d-Laser-Cantilever-Anemometer), that is capable of performing high resolved velocity measurements in fluids. The anemometer uses a micostructured cantilever made of silicon as a sensing element. The specific shape and the small dimensions (about 150µm) of the cantilever allow for precise measurements of two velocity component at a temporal resolution of about 150kHz. The angular acceptance range is 180° in total. The 2d-LCA is a simple to use alternative to x-wires and can be used in many areas of operation including measurements in liquids or in particle-laden flows. Unlike hot-wires, the resolution power of the 2d-LCA does not decrease with increasing flow velocity, making it particularly suitable for measurements in high-speed flows. In the recent past new cantilever designs were implemented with the goal to further improve the angular resolution and increase the stability. In addition, we have designed more robust cantilevers for measurements in rough environments such as offshore areas. Successful comparative measurements with hot-wires have been carried out in order to assess the performance of the 2d-LCA.

  18. Improved Sensitivity MEMS Cantilever Sensor for Terahertz Photoacoustic Spectroscopy

    Directory of Open Access Journals (Sweden)

    Ronald A. Coutu

    2016-02-01

    Full Text Available In this paper, a microelectromechanical system (MEMS cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz radiation induced photoacoustic (PA response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam damping. In addition, fabrication yield was improved by approximately 50% by filleting the cantilever’s anchor and free end to help reduce high stress areas that occurred during device fabrication and processing. All of the cantilever sensors were fabricated using silicon-on-insulator (SOI wafers and tested in a custom built, low-volume, vacuum chamber. The resulting cantilever sensors exhibited improved signal to noise ratios, sensitivities and normalized noise equivalent absorption (NNEA coefficients of approximately 4.28 × 10−10 cm−1·WHz−1/2. This reported NNEA represents approximately a 70% improvement over previously fabricated and tested SOI cantilever sensors for THz PA spectroscopy.

  19. Critical caving erosion width for cantilever failures of river bank

    Institute of Scientific and Technical Information of China (English)

    Yangui Wang; Shangfu Kuang; Jialin Su

    2016-01-01

    The cantilever failure is one of the typical bank failures, in which the lateral caving erosion at the bottom of the bank plays an important role. When the caving erosion width is larger than a certain value, the cantilever failures such as shear, toppling and stress failures may occur. In order to understand the condition of the cantilever failure, the collapse mechanisms of the cantilever failures are studied based on the bank stability theory and flume experiment. According to the bank stability equation with the lateral erosion, the critical caving erosion width (CCEW) formulas for the shear and toppling failures of simple slope bank were derived in this paper. The formulas show that the CCEW increases as the overhanging soil thickness and soil cohesion increase, and decreases as the crack depth on the bank surface and the slope angle of the bank increase. And these formulas were tested with experimental data, which shows the predicted values are good agreement with experimental data. The paper reveals a quantitative expression on the process of the river cantilever failure.

  20. Scissor thrust valve actuator

    Science.gov (United States)

    DeWall, Kevin G.; Watkins, John C; Nitzel, Michael E.

    2006-08-29

    Apparatus for actuating a valve includes a support frame and at least one valve driving linkage arm, one end of which is rotatably connected to a valve stem of the valve and the other end of which is rotatably connected to a screw block. A motor connected to the frame is operatively connected to a motor driven shaft which is in threaded screw driving relationship with the screw block. The motor rotates the motor driven shaft which drives translational movement of the screw block which drives rotatable movement of the valve driving linkage arm which drives translational movement of the valve stem. The valve actuator may further include a sensory control element disposed in operative relationship with the valve stem, the sensory control element being adapted to provide control over the position of the valve stem by at least sensing the travel and/or position of the valve stem.

  1. Active Polymer Gel Actuators

    Directory of Open Access Journals (Sweden)

    Shuji Hashimoto

    2010-01-01

    Full Text Available Many kinds of stimuli-responsive polymer and gels have been developed and applied to biomimetic actuators or artificial muscles. Electroactive polymers that change shape when stimulated electrically seem to be particularly promising. In all cases, however, the mechanical motion is driven by external stimuli, for example, reversing the direction of electric field. On the other hand, many living organisms can generate an autonomous motion without external driving stimuli like self-beating of heart muscles. Here we show a novel biomimetic gel actuator that can walk spontaneously with a wormlike motion without switching of external stimuli. The self-oscillating motion is produced by dissipating chemical energy of oscillating reaction. Although the gel is completely composed of synthetic polymer, it shows autonomous motion as if it were alive.

  2. Numerical Simulation of Output Response of PVDF Sensor Attached on a Cantilever Beam Subjected to Impact Loading

    Directory of Open Access Journals (Sweden)

    Cao Vu Dung

    2016-04-01

    Full Text Available Polyvinylidene Flouride (PVDF is a film-type polymer that has been used as sensors and actuators in various applications due to its mechanical toughness, flexibility, and low density. A PVDF sensor typically covers an area of the host structure over which mechanical stress/strain is averaged and converted to electrical energy. This study investigates the fundamental “stress-averaging” mechanism for dynamic strain sensing in the in-plane mode. A numerical simulation was conducted to simulate the “stress-averaging” mechanism of a PVDF sensor attached on a cantilever beam subjected to an impact loading, taking into account the contribution of piezoelectricity, the cantilever beam’s modal properties, and electronic signal conditioning. Impact tests and FEM analysis were also carried out to verify the numerical simulation results. The results of impact tests indicate the excellent capability of the attached PVDF sensor in capturing the fundamental natural frequencies of the cantilever beam. There is a good agreement between the PVDF sensor’s output voltage predicted by the numerical simulation and that obtained in the impact tests. Parametric studies were conducted to investigate the effects of sensor size and sensor position and it is shown that a larger sensor tends to generate higher output voltage than a smaller one at the same location. However, the effect of sensor location seems to be more significant for larger sensors due to the cancelling problem. Overall, PVDF sensors exhibit excellent sensing capability for in-plane dynamic strain induced by impact loading.

  3. Dissolution actuated sample container

    Science.gov (United States)

    Nance, Thomas A.; McCoy, Frank T.

    2013-03-26

    A sample collection vial and process of using a vial is provided. The sample collection vial has an opening secured by a dissolvable plug. When dissolved, liquids may enter into the interior of the collection vial passing along one or more edges of a dissolvable blocking member. As the blocking member is dissolved, a spring actuated closure is directed towards the opening of the vial which, when engaged, secures the vial contents against loss or contamination.

  4. Active Polymer Gel Actuators

    OpenAIRE

    Shuji Hashimoto; Ryo Yoshida; Yusuke Hara; Shingo Maeda

    2010-01-01

    Many kinds of stimuli-responsive polymer and gels have been developed and applied to biomimetic actuators or artificial muscles. Electroactive polymers that change shape when stimulated electrically seem to be particularly promising. In all cases, however, the mechanical motion is driven by external stimuli, for example, reversing the direction of electric field. On the other hand, many living organisms can generate an autonomous motion without external driving stimuli like self-beating of he...

  5. Shape memory alloy actuator

    Science.gov (United States)

    Varma, Venugopal K.

    2001-01-01

    An actuator for cycling between first and second positions includes a first shaped memory alloy (SMA) leg, a second SMA leg. At least one heating/cooling device is thermally connected to at least one of the legs, each heating/cooling device capable of simultaneously heating one leg while cooling the other leg. The heating/cooling devices can include thermoelectric and/or thermoionic elements.

  6. Cylindrical Piezoelectric Fiber Composite Actuators

    Science.gov (United States)

    Allison, Sidney G.; Shams, Qamar A.; Fox, Robert L.

    2008-01-01

    The use of piezoelectric devices has become widespread since Pierre and Jacques Curie discovered the piezoelectric effect in 1880. Examples of current applications of piezoelectric devices include ultrasonic transducers, micro-positioning devices, buzzers, strain sensors, and clocks. The invention of such lightweight, relatively inexpensive piezoceramic-fiber-composite actuators as macro fiber composite (MFC) actuators has made it possible to obtain strains and displacements greater than those that could be generated by prior actuators based on monolithic piezoceramic sheet materials. MFC actuators are flat, flexible actuators designed for bonding to structures to apply or detect strains. Bonding multiple layers of MFC actuators together could increase force capability, but not strain or displacement capability. Cylindrical piezoelectric fiber composite (CPFC) actuators have been invented as alternatives to MFC actuators for applications in which greater forces and/or strains or displacements may be required. In essence, a CPFC actuator is an MFC or other piezoceramic fiber composite actuator fabricated in a cylindrical instead of its conventional flat shape. Cylindrical is used here in the general sense, encompassing shapes that can have circular, elliptical, rectangular or other cross-sectional shapes in the planes perpendicular to their longitudinal axes.

  7. Viscoelastic phenomenology based structure assignment for closed-loop vibration control of a beam with sensors and actuators

    Science.gov (United States)

    Vadiraja, G. K.; Mahapatra, D. Roy

    2009-03-01

    In this paper we incorporate a novel approach to synthesize a class of closed-loop feedback control, based on the variational structure assignment. Properties of a viscoelastic system are used to design an active feedback controller for an undamped structural system with distributed sensor, actuator and controller. Wave dispersion properties of onedimensional beam system have been studied. Efficiency of the chosen viscoelastic model in enhancing damping and stability properties of one-dimensional viscoelastic bar have been analyzed. The variational structure is projected on a solution space of a closed-loop system involving a weakly damped structure with distributed sensor and actuator with controller. These assign the phenomenology based internal strain rate damping parameter of a viscoelastic system to the usual elastic structure but with active control. In the formulation a model of cantilever beam with non-collocated actuator and sensor has been considered. The formulation leads to the matrix identification problem of two dynamic stiffness matrices. The method has been simplified to obtain control system gains for the free vibration control of a cantilever beam system with collocated actuator-sensor, using quadratic optimal control and pole-placement methods.

  8. Achieving Superior Two-Way Actuation by the Stress-Coupling of Nanoribbons and Nanocrystalline Shape Memory Alloy

    Energy Technology Data Exchange (ETDEWEB)

    Hao, Shijie; Liu, Yinong; Ren, Yang; Jiang, Daqiang; Yang, Feng; Cong, Daoyong; Wang, Yandong; Cui, Lishan

    2016-06-08

    Inspired by the driving principle of traditional bias-type two-way actuators, we developed a novel two-way actuation nanocomposite wire in which a massive number of Nb nanoribbons with ultra-large elastic strains are loaded inside a shape memory alloy (SMA) matrix to form a continuous array of nano bias actuation pairs for two-way actuation. The composite exhibits a two-way actuation strain of 3.2% during a thermal cycle and an actuation stress of 934 MPa upon heating, which is about twice higher than that (~500 MPa) found in reported two-way SMAs. Upon cooling, the composite shows an actuation stress of 134 MPa and a mechanical work output of 1.08*106 J/ m3, which are about three and five times higher than that of reported two-way SMAs, respectively. It is revealed that the massive number of Nb nanoribbons in compressive state provides the high actuation stress and high work output upon cooling and the SMA matrix with high yield strength offers the high actuation stress upon heating. Compared to traditional bias-type two-way actuators, the two-way actuation composite with small volume and simple construct is in favour of the miniaturization and simplification of actuators.

  9. Achieving Superior Two-Way Actuation by the Stress-Coupling of Nanoribbons and Nanocrystalline Shape Memory Alloy.

    Science.gov (United States)

    Hao, Shijie; Liu, Yinong; Ren, Yang; Jiang, Daqiang; Yang, Feng; Cong, Daoyong; Wang, Yandong; Cui, Lishan

    2016-06-29

    Inspired by the driving principle of traditional bias-type two-way actuators, we developed a novel two-way actuation nanocomposite wire in which a massive number of Nb nanoribbons with ultralarge elastic strains are loaded inside a shape memory alloy (SMA) matrix to form a continuous array of nanobias actuation pairs for two-way actuation. The composite exhibits a two-way actuation strain of 3.2% during a thermal cycle and an actuation stress of 934 MPa upon heating, which is about twice as high as that (∼500 MPa) found in reported two-way SMAs. Upon cooling, the composite shows an actuation stress of 134 MPa and a mechanical work output of 1.08 × 10(6) J/m(3), which are about three and five times higher than those of reported two-way SMAs, respectively. It was revealed that the massive number of Nb nanoribbons in the compressive state provides the high actuation stress and high work output upon cooling, and the SMA matrix with high yield strength offers the high actuation stress upon heating. Compared to traditional bias-type two-way actuators, the two-way actuation composite with a small volume and simple construct works well with the miniaturization and simplification of actuators.

  10. On the electromechanical modelling of a resonating nano-cantilever-based transducer

    DEFF Research Database (Denmark)

    Teva, J.; Abadal, G.; Davis, Zachary James;

    2004-01-01

    An electromechanical model for a transducer based on a lateral resonating cantilever is described. The on-plane vibrations of the cantilever are excited electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. The model predicts the stati....... Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope. (C) 2004 Elsevier B.V. All rights reserved....

  11. Telescoping cylindrical piezoelectric fiber composite actuator assemblies

    Science.gov (United States)

    Allison, Sidney G. (Inventor); Shams, Qamar A. (Inventor); Fox, Robert L. (Inventor); Fox, legal representative, Christopher L. (Inventor); Fox Chattin, legal representative, Melanie L. (Inventor)

    2010-01-01

    A telescoping actuator assembly includes a plurality of cylindrical actuators in a concentric arrangement. Each cylindrical actuator is at least one piezoelectric fiber composite actuator having a plurality of piezoelectric fibers extending parallel to one another and to the concentric arrangement's longitudinal axis. Each cylindrical actuator is coupled to concentrically-adjacent ones of the cylindrical actuators such that the plurality of cylindrical actuators can experience telescopic movement. An electrical energy source coupled to the cylindrical actuators applies actuation energy thereto to generate the telescopic movement.

  12. Self-mixing interferometry in VCSELs for nanomechanical cantilever sensing

    DEFF Research Database (Denmark)

    Larsson, David; Greve, Anders; Hvam, Jørn Märcher

    2009-01-01

    We have investigated optical read-out of uncoated polymer micrometer-sized cantilever sensors by self-mixing interference in VCSELs for single-molecule gas sensing. A resolution ~0.2 nm is measured, which is much better than current methods.......We have investigated optical read-out of uncoated polymer micrometer-sized cantilever sensors by self-mixing interference in VCSELs for single-molecule gas sensing. A resolution ~0.2 nm is measured, which is much better than current methods....

  13. Cantilever based mass sensor with hard contact readout

    DEFF Research Database (Denmark)

    Dohn, Søren; Hansen, Ole; Boisen, Anja

    2006-01-01

    We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency...... and amplitude are varied. The result is an almost "digital" detection of the resonant frequency. A relative frequency resolution Delta f/f of 1/80 000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency...

  14. Self-Latching Piezocomposite Actuator

    Science.gov (United States)

    Wilkie, William K. (Inventor); Bryant, Robert G. (Inventor); Lynch, Christopher S. (Inventor)

    2017-01-01

    A self-latching piezocomposite actuator includes a plurality of shape memory ceramic fibers. The actuator can be latched by applying an electrical field to the shape memory ceramic fibers. The actuator remains in a latched state/shape after the electrical field is no longer present. A reverse polarity electric field may be applied to reset the actuator to its unlatched state/shape. Applied electric fields may be utilized to provide a plurality of latch states between the latched and unlatched states of the actuator. The self-latching piezocomposite actuator can be used for active/adaptive airfoils having variable camber, trim tabs, active/deformable engine inlets, adaptive or adjustable vortex generators, active optical components such as mirrors that change shapes, and other morphing structures.

  15. Integrated optical readout for miniaturization of cantilever-based sensor system

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts...

  16. Measurement of the Resonant Frequency of Nano-Scale Cantilevers by Hard Contact Readout

    DEFF Research Database (Denmark)

    Dohn, Søren; Hansen, Ole; Bolsen, A.

    2008-01-01

    It is shown that detection of the resonant frequency of a nano-scale cantilever is possible by measuring the time average current flowing from an electrode to the cantilever during hard contact occurring twice every cycle of the cantilever vibration. The electronic detection method is insensitive....... The readout method is thereby ideally suited for portable sensor systems....

  17. Fault-tolerant rotary actuator

    Science.gov (United States)

    Tesar, Delbert

    2006-10-17

    A fault-tolerant actuator module, in a single containment shell, containing two actuator subsystems that are either asymmetrically or symmetrically laid out is provided. Fault tolerance in the actuators of the present invention is achieved by the employment of dual sets of equal resources. Dual resources are integrated into single modules, with each having the external appearance and functionality of a single set of resources.

  18. a New ER Fluid Based Haptic Actuator System for Virtual Reality

    Science.gov (United States)

    Böse, H.; Baumann, M.; Monkman, G. J.; Egersdörfer, S.; Tunayar, A.; Freimuth, H.; Ermert, H.; Khaled, W.

    The concept and some steps in the development of a new actuator system which enables the haptic perception of mechanically inhomogeneous virtual objects are introduced. The system consists of a two-dimensional planar array of actuator elements containing an electrorheological (ER) fluid. When a user presses his fingers onto the surface of the actuator array, he perceives locally variable resistance forces generated by vertical pistons which slide in the ER fluid through the gaps between electrode pairs. The voltage in each actuator element can be individually controlled by a novel sophisticated switching technology based on optoelectric gallium arsenide elements. The haptic information which is represented at the actuator array can be transferred from a corresponding sensor system based on ultrasonic elastography. The combined sensor-actuator system may serve as a technology platform for various applications in virtual reality, like telemedicine where the information on the consistency of tissue of a real patient is detected by the sensor part and recorded by the actuator part at a remote location.

  19. Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

    Science.gov (United States)

    SoltanRezaee, Masoud; Ghazavi, Mohammad-Reza

    2017-09-01

    Electrostatically actuated miniature wires/tubes have many operational applications in the high-tech industries. In this research, the nonlinear pull-in instability of piezoelectric thermal small-scale switches subjected to Coulomb and dissipative forces is analyzed using strain gradient and modified couple stress theories. The discretized governing equation is solved numerically by means of the step-by-step linearization method. The correctness of the formulated model and solution procedure is validated through comparison with experimental and several theoretical results. Herein, the length-scale, surface energy, van der Waals attraction and nonlinear curvature are considered in the present comprehensive model and the thermo-electro-mechanical behavior of cantilever piezo-beams are discussed in detail. It is found that the piezoelectric actuation can be used as a design parameter to control the pull-in phenomenon. The obtained results are applicable in stability analysis, practical design and control of actuated miniature intelligent devices.

  20. Droplets actuating chip based on electrowetting-on-dielectric

    Institute of Scientific and Technical Information of China (English)

    WU Jiangang; YUE Ruifeng; ZENG Xuefeng; LIU Litian

    2007-01-01

    A droplet-based actuating chip by using the method of electrowetting-on-dielectric (EWOD)was developed to manipulate the microfluidics.Here,the actuation mechanism of the sandwiched-configuration EWOD chips was carefully studied,and the movement of droplets was numerically analyzed by using the computational fluidic software,CFD-ACE+.The fabrication of the chip,including a heavily phosphorus-doped poly-silicon micro-electrode array and a thermally grown SiO2 dielectric layer,was exploited to improve the chip stability and decrease the actuation voltage.In experiments,the transportation of a deionized droplet of about 0.5 μL is successfully achieved in air by applying the low voltage of 45 V.

  1. Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses

    KAUST Repository

    Bouchaala, Adam M.

    2016-03-21

    We present analytical and numerical techniques to accurately calculate the shifts in the natural frequencies of electrically actuated micro and nano (carbon nanotubes (CNTs)) cantilever beams implemented as resonant sensors for mass detection of biological entities, particularly Escherichia coli (E. coli) and prostate specific antigen (PSA) cells. The beams are modeled as Euler-Bernoulli beams, including the nonlinear electrostatic forces and the added biological cells, which are modeled as discrete point masses. The frequency shifts due to the added masses of the cells are calculated for the fundamental and higher-order modes of vibrations. Analytical expressions of the natural frequency shifts under a direct current (DC) voltage and an added mass have been developed using perturbation techniques and the Galerkin approximation. Numerical techniques are also used to calculate the frequency shifts and compared with the analytical technique. We found that a hybrid approach that relies on the analytical perturbation expression and the Galerkin procedure for calculating accurately the static behavior presents the most computationally efficient approach. We found that using higher-order modes of vibration of micro-electro-mechanical-system (MEMS) beams or miniaturizing the sizes of the beams to nanoscale leads to significant improved frequency shifts, and thus increased sensitivities. © 2016 by ASME.

  2. Modeling and control of sound radiation by simply supported and cantilever beam coupled with smart material

    Directory of Open Access Journals (Sweden)

    Vitaly Makarenko

    2007-03-01

    Full Text Available  In this paper forced vibration of the beam due to bonded piezoelectric patch is considered. When an external excitation is applied to the beam, it starts to vibrate, and the resulting acoustic response is predicted from the analytical model, which is based on Bernoulli-Euler theory of beam vibration. Analytical research of the sound radiation by a finite elastic beam is done for criteria based on minimal total sound power level. Helmholtz equation and inhomogeneous differential equation for beam transverse motion defines the solution to this problem. Such solutions were found for boundary conditions of simply supported and cantilever beams. In order to solve the task two analytical methods were used for simply supported beam. The solutions received by Fourier transform and Green functions approach give the very similar results, thus, proving methods reliability. At the case studies the exerted voltage, phase, location and piezoelectric actuator length are varied in order to establish their influence on noise attenuation.

  3. Advanced electric-field scanning probe lithography on molecular resist using active cantilever

    Science.gov (United States)

    Kaestner, Marcus; Aydogan, Cemal; Lipowicz, Hubert-Seweryn; Ivanov, Tzvetan; Lenk, Steve; Ahmad, Ahmad; Angelov, Tihomir; Reum, Alexander; Ishchuk, Valentyn; Atanasov, Ivaylo; Krivoshapkina, Yana; Hofer, Manuel; Holz, Mathias; Rangelow, Ivo W.

    2015-03-01

    The routine "on demand" fabrication of features smaller than 10 nm opens up new possibilities for the realization of many novel nanoelectronic, NEMS, optical and bio-nanotechnology-based devices. Based on the thermally actuated, piezoresistive cantilever technology we have developed a first prototype of a scanning probe lithography (SPL) platform able to image, inspect, align and pattern features down to single digit nano regime. The direct, mask-less patterning of molecular resists using active scanning probes represents a promising path circumventing the problems in today's radiation-based lithography. Here, we present examples of practical applications of the previously published electric field based, current-controlled scanning probe lithography on molecular glass resist calixarene by using the developed tabletop SPL system. We demonstrate the application of a step-and-repeat scanning probe lithography scheme including optical as well as AFM based alignment and navigation. In addition, sequential read-write cycle patterning combining positive and negative tone lithography is shown. We are presenting patterning over larger areas (80 x 80 μm) and feature the practical applicability of the lithographic processes.

  4. Robotic Arm Actuated by Electroactie Polymers

    Science.gov (United States)

    Bar-Cohen, Y.; Xue, T.; Shaninpoor, M.; Simpson, J. O.; Smith, J.

    1998-01-01

    Actuators are used for many planetary and space applications. To meet the NASA goal to reduce the actuators size, mass, cost and power consumption, electroactie polymers (EAP) are being developed to induce large bending and longitudinal actuation strains.

  5. Piezoelectric actuated gimbal

    Science.gov (United States)

    Tschaggeny, Charles W.; Jones, Warren F.; Bamberg, Eberhard

    2011-09-13

    A gimbal is described and which includes a fixed base member defining an axis of rotation; a second member concentrically oriented relative to the axis of rotation; a linear actuator oriented in immediate, adjoining force transmitting relation relative to the base member or to the second member, and which applies force along a linear axis which is tangential to the axis of rotation so as to cause the second member to rotate coaxially relative to the fixed base member; and an object of interest mounted to the second member such that the object of interest is selectively moved relative to the base member about the axis of rotation.

  6. Pneumatically actuated micropipetting device

    Science.gov (United States)

    Szita, Nicolas; Buser, Rudolf A.

    1998-03-01

    We have realized a valveless micropipetting device with an integrated sensor which can aspirate and dispense liquid volumes without any valves, hence without any reflow or dead volume. With an external pneumatic actuation, we have demonstrated aspirating and dispensing from 190nl of 6 (mu) l of water. Measurements showed a standard deviation of down to 1 percent. An integrated capacitive sensor will allow monitoring of the pressure throughout the pipetting process and detect malfunctions, e.g. clotting of the pipetting tip. It is our intention to use this demonstrated precise aspiration mechanism in combination with a micromachined reaction chamber and a miniaturized optical analysis system.

  7. Fabrication of resonant micro cantilevers with integrated transparent fluidic channel

    DEFF Research Database (Denmark)

    Khan, Faheem; Schmid, Silvan; Davis, Zachary James

    2011-01-01

    be visually observed through the transparent fluidic channel. The resonant frequency of the cantilever is changed by the fluid inside the channel, due to the change in mass. The shift in the resonant frequency can be translated into a density of the fluid or into the presence of macro/micro molecules...

  8. Aluminum nano-cantilevers for high sensitivity mass sensors

    DEFF Research Database (Denmark)

    Davis, Zachary James; Boisen, Anja

    2005-01-01

    We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Further...

  9. Strategy Guideline: Quality Management in Existing Homes - Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Sikora, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wiehagen, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wood, A. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States)

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented.

  10. Development of an Electrochemical-Cantilever Hybrid Platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie

    I denne afhandling er udviklingen af en nyskabende elektrokemisk-cantilever hybrid sensor platform præsenteret. Mikro cantileverer er meget følsomme over for ændringer i overflade stress, mens elektrokemiske metoder tillader kontrol og udlæsning af overflade ladning og potentiale. Det kan bruges...

  11. Deconvolution of calcium fluorescent indicator signal from AFM cantilever reflection.

    Science.gov (United States)

    Lopez-Ayon, G Monserratt; Oliver, David J; Grutter, Peter H; Komarova, Svetlana V

    2012-08-01

    Atomic force microscopy (AFM) can be combined with fluorescence microscopy to measure the changes in intracellular calcium levels (indicated by fluorescence of Ca²⁺ sensitive dye fluo-4) in response to mechanical stimulation performed by AFM. Mechanical stimulation using AFM is associated with cantilever movement, which may interfere with the fluorescence signal. The motion of the AFM cantilever with respect to the sample resulted in changes of the reflection of light back to the sample and a subsequent variation in the fluorescence intensity, which was not related to changes in intracellular Ca²⁺ levels. When global Ca²⁺ responses to a single stimulation were assessed, the interference of reflected light with the fluorescent signal was minimal. However, in experiments where local repetitive stimulations were performed, reflection artifacts, correlated with cantilever motion, represented a significant component of the fluorescent signal. We developed a protocol to correct the fluorescence traces for reflection artifacts, as well as photobleaching. An added benefit of our method is that the cantilever reflection in the fluorescence recordings can be used for precise temporal correlation of the AFM and fluorescence measurements.

  12. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  13. Optimised cantilever biosensor with piezoresistive read-out

    DEFF Research Database (Denmark)

    Rasmussen, Peter; Thaysen, J.; Hansen, Ole

    2003-01-01

    We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well sui...

  14. A microfluidic AFM cantilever based dispensing and aspiration platform

    NARCIS (Netherlands)

    Van Oorschot, R.; Perez Garza, H.H.; Derks, R.J.S.; Staufer, U.; Ghatkesar, M.K.

    2015-01-01

    We present the development of a microfluidic AFM (atomic force microscope) cantilever-based platform to enable the local dispensing and aspiration of liquid with volumes in the pico-to-femtoliter range. The platform consists of a basic AFM measurement system, microfluidic AFM chip, fluidic interface

  15. Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography

    DEFF Research Database (Denmark)

    Greve, Anders; Dohn, Søren; Keller, Stephan Urs

    2010-01-01

    Microcantilevers can be fabricated in TOPAS by nanoimprint lithography, with the dimensions of 500 ¿m length 4.5 ¿m thickness and 100 ¿m width. By using a plasma polymerization technique it is possible to selectively functionalize individually cantilevers with a polymer coating, on wafer scale...

  16. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter; Geerlings, Joël; Tas, Niels; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the ap

  17. Microstructure actuation and gas sensing by the Knudsen thermal force

    Science.gov (United States)

    Strongrich, Andrew; Alexeenko, Alina

    2015-11-01

    The generation of forces and moments on structures immersed in rarefied non-isothermal gas flows has received limited practical implementation since first being discovered over a century ago. The formation of significant thermal stresses requires both large thermal gradients and characteristic dimensions which are comparable to the gas molecular mean free path. For macroscopic geometries, this necessitates impractically high temperatures and very low pressures. At the microscale, however, these conditions are easily achieved, allowing the effects to be exploited, namely, for gas-property sensing and microstructure actuation. In this letter, we introduce and experimentally evaluate performance of a microelectromechanical in-plane Knudsen radiometric actuator, a self-contained device having Knudsen thermal force generation, sensing, and tuning mechanisms integrated onto the same platform. Sensitivity to ambient pressure, temperature gradient, as well as gas composition is demonstrated. Results are presented in terms of a non-dimensional force coefficient, allowing measurements to be directly compared to the previous experimental and computational data on out-of-plane cantilevered configurations.

  18. Drift study of SU8 cantilevers in liquid and gaseous environments

    DEFF Research Database (Denmark)

    Tenje, Maria; Keller, Stephan Sylvest; Dohn, Søren

    2010-01-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1 mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe...... coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum....

  19. Serpentine Geometry Plasma Actuators for Flow Control

    Science.gov (United States)

    2013-08-23

    electrical power is supplied to them. As a method of introducing perturbations for low speed flow control, dielectric barrier discharge ( DBD ) actuators...SERPENTINE GEOMETRY DBD ACTUATORS DBD actuators are devices consisting of two asymmetri- cally placed actuators separated by a dielectric material and exposed...parameters can be found in Table I. The effects of plasma actuation are FIG. 1. (a) Schematic of DBD plasma actuator and the generated body force. (b

  20. Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers

    Science.gov (United States)

    Shih, Wan Y.; Li, Xiaoping; Gu, Huiming; Shih, Wei-Heng; Aksay, Ilhan A.

    2001-01-01

    We have examined both experimentally and theoretically a piezoelectric unimorph cantilever as a liquid viscosity-and-density sensor. The fabricated piezoelectric unimorph consisted of a PbOṡZrO2ṡTiO2 (PZT) layer on a thin stainless-steel plate. In addition to a driving electrode, a sensing electrode was placed on top of the PZT layer, permitting the direct measurement of the resonance frequency. The cantilever was tested using water-glycerol solutions of different compositions. In all three of the tested modes, the resonance frequency decreased while the width of the resonance peak increased with increasing glycerol content. To account for the liquid effect, we consider the cantilever as a sphere of radius R oscillating in a liquid. By including the high and low frequency terms in the induced mass and the damping coefficient of the liquid, we show that for a given liquid density and viscosity the oscillating-sphere model predicts a resonance frequency and peak width that closely agree with experiment. Furthermore, the viscosity and the density of a liquid have been determined simultaneously using the experimentally measured resonance frequency and peak width as inputs to the oscillating-sphere model. The calculated liquid viscosity and density closely agreed with the known values, indicating that our cantilever-based sensor is effective in determining viscosity and density, simultaneously. We also show that scaling analysis predicts an increase in the width of the resonance peak with decreasing cantilever size, an observation in agreement with the large peak widths observed for microcantilevers.

  1. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  2. Polypyrrole Actuators for Tremor Suppression

    DEFF Research Database (Denmark)

    Skaarup, Steen; Mogensen, Naja; Bay, Lasse

    2003-01-01

    exemplify 'soft actuator' technology that may be especially suitable for use in conjunction with human limbs. The electrochemical and mechanical properties of polypyrrole dodecyl benzene sulphonate actuator films have been studied with this application in mind. The results show that the time constants...

  3. Rotary actuator for space applications

    Science.gov (United States)

    Andión, J. A.; Burgui, C.; Migliorero, G.

    2005-07-01

    SENER is developing a rotary actuator for space applications. The activity, partially funded under ESA GSTP contract, aims at the design, development and performance testing of an innovative rotary actuator concept for space applications. An engineering model has been manufactured and has been tested to demonstrate the compliance with the requirements specification.

  4. Bi-stable optical actuator

    Science.gov (United States)

    Holdener, Fred R.; Boyd, Robert D.

    2000-01-01

    The present invention is a bi-stable optical actuator device that is depowered in both stable positions. A bearing is used to transfer motion and smoothly transition from one state to another. The optical actuator device may be maintained in a stable position either by gravity or a restraining device.

  5. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    Energy Technology Data Exchange (ETDEWEB)

    Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Leung, Vanessa, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Müller, Bert, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch [Biomaterials Science Center, University of Basel, c/o University Hospital, 4031 Basel (Switzerland); Deschenaux, Christian, E-mail: jiri.nohava@anton-paar.com; Nohava, Jiri, E-mail: jiri.nohava@anton-paar.com [Anton Paar TriTec SA, Rue de la Gare 4, Galileo Center, 2034 Peseux (Switzerland)

    2015-02-17

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

  6. Integrated optical read-out for polymeric cantilever-based sensors

    DEFF Research Database (Denmark)

    Tenje, Maria

    2007-01-01

    This thesis presents a novel read-out method developed for cantilever-based sensors. Cantilevers are thin beams clamped at one end and during the last 10 years they have emerged as an interesting new type of bio/chemical sensor. The specific recognition of a chemical manifests itself as a bending...... Young’s modulus instead of the conventional materials Si and Si3N4. Here, a novel read-out method is presented where optical waveguides are used to integrate the light into the cantilever. It is an all-polymer device where both the cantilever and the waveguides are fabricated in the negative resist SU-8....... Waveguides are structured on either side of the cantilever that is free-hanging in a microfluidic channel. Light is guided into the system and is either transmitted through the cantilever or reflected off the cantilever front-end, depending on the mode of operation. This work shows that waveguides, only...

  7. Digitally controlled droplet microfluidic system based on electrophoretic actuation

    Science.gov (United States)

    Im, Do Jin; Yoo, Byeong Sun; Ahn, Myung Mo; Moon, Dustin; Kang, In Seok

    2012-11-01

    Most researches on direct charging and the subsequent manipulation of a charged droplet were focused on an on-demand sorting in microchannel where carrier fluid transports droplets. Only recently, an individual actuation of a droplet without microchannel and carrier fluid was tried. However, in the previous work, the system size was too large and the actuation voltage was too high (1.5 kV), which limits the applicability of the technology to mobile use. Therefore, in the current research, we have developed a miniaturized digital microfluidic system based on the electrophoresis of a charged droplet (ECD). By using a pin header socket for an array of electrodes, much smaller microfluidic system can be made from simple fabrication process with low cost. A full two dimensional manipulation (0.4 cm/s) of a droplet (300 nL) suspended in silicone oil (6 cSt) and multiple droplet actuation have been performed with reasonable actuation voltage (300 V). By multiple droplet actuation and coalescence, a practical biochemical application also has been demonstrated. We hope the current droplet manipulation method (ECD) can be a good alternative or complimentary technology to the conventional ones and therefore contributes to the development of droplet microfluidics. This work has been supported by BK21 program of the Ministry of Education, Science and Technology (MEST) of Korea.

  8. Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

    Science.gov (United States)

    Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

    2012-06-01

    In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

  9. Simulation of SU-8 frequency-driven scratch drive actuators

    KAUST Repository

    Conchouso Gonzalez, David

    2013-04-01

    This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®\\'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

  10. Uncooled Micro-Cantilever Infrared Imager Optimization

    Energy Technology Data Exchange (ETDEWEB)

    Panagiotis, Datskos G. [ORNL

    2008-02-05

    We report on the development, fabrication and characterization of microcantilever based uncooled focal plane array (FPA) for infrared imaging. By combining a streamlined design of microcantilever thermal transducers with a highly efficient optical readout, we minimized the fabrication complexity while achieving a competitive level of imaging performance. The microcantilever FPAs were fabricated using a straightforward fabrication process that involved only three photolithographic steps (i.e. three masks). A designed and constructed prototype of an IR imager employed a simple optical readout based on a noncoherent low-power light source. The main figures of merit of the IR imager were found to be comparable to those of uncooled MEMS infrared detectors with substantially higher degree of fabrication complexity. In particular, the NETD and the response time of the implemented MEMS IR detector were measured to be as low as 0.5K and 6 ms, respectively. The potential of the implemented designs can also be concluded from the fact that the constructed prototype enabled IR imaging of close to room temperature objects without the use of any advanced data processing. The most unique and practically valuable feature of the implemented FPAs, however, is their scalability to high resolution formats, such as 2000 x 2000, without progressively growing device complexity and cost. The overall technical objective of the proposed work was to develop uncooled infrared arrays based on micromechanical sensors. Currently used miniature sensors use a number of different readout techniques to accomplish the sensing. The use of optical readout techniques sensing require the deposition of thin coatings on the surface of micromechanical thermal detectors. Oak Ridge National Laboratory (ORNL) is uniquely qualified to perform the required research and development (R&D) services that will assist our ongoing activities. Over the past decade ORNL has developed a number of unique methods and

  11. FLUTTER SUPPRESSION USING DISTRIBUTEDPIEZOELECTRIC ACTUATORS

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    A piezoelectric actuator has the benefits of flexibility of its position, without time lag and wide bandpass characteristics. The early results of the wind tunnel flutter suppression test using the piezoeletric actuator were presented in Ref.[1]. A rigid rectangular wing model is constrained by a plunge spring and a pitch spring, and a pair of piezoelectric actuators is bonded on both sides of the plunge spring so as to carry out the active control. Refs.[2,3] reported two flutter suppression wind tunnel tests where the distributed piezoelectric actuators were used. In Ref.[2] low speed wind tunnel tests were conducted with aluminum and composite plate-like rectangular models fully covered by piezoelectric actuators. Flutter speed is increased by 11%. In Ref.[3] a composite plate-like swept back model with piezoceramic actuators bonded on the inboard surface was tested in a transonic wind tunnel and a 12% increment of flutter dynamic pressure was achieved.  In the present investigation, an aluminum plate-like rectangular model with inboard bonded piezoceramic actuators is adopted. Active flutter suppression control law has been designed. A series of analyses and ground tests and, finally, low-speed wind tunnel tests with the active control system opened and closed are conducted. Reasonable results have been obtained.

  12. Gear-Driven Turnbuckle Actuator

    Science.gov (United States)

    Rivera, Ricky N.

    2010-01-01

    This actuator design allows the extension and contraction of turnbuckle assemblies. It can be operated manually or remotely, and is extremely compact. It is ideal for turnbuckles that are hard to reach by conventional tools. The tool assembly design solves the problem of making accurate adjustments to the variable geometry guide vanes without having to remove and reinstall the actuator system back on the engine. The actuator does this easily by adjusting the length of the turnbuckles while they are still attached to the engine.

  13. Fibre Optic Readout of Microcantilever Arrays for Fast Microorganism Growth Detection

    Directory of Open Access Journals (Sweden)

    N. Maloney

    2012-01-01

    Full Text Available We present a fibre-optic-based device for the automated readout of microcantilever arrays for fast microorganism growth detection. We determined the ability of our device to track shifts in resonance frequency due to an increase in mass on the cantilever surface or changes in mechanical stiffness. The resonance frequency response of 7 μm thick agarose-functionalised cantilevers was tracked as humidity levels were varied revealing a mass responsivity of ~51±1 pg/Hz. The resonance response of microcantilevers coated with Aspergillus niger (A. niger spores was monitored for >48 h revealing a growth detection time of >4 h. The growth of mycelium along the cantilevers surface is seen to result in an increase in resonance frequency due to the reinforcement of the cantilever structure. The use of our fibre optic detection technique allows data to be recorded continuously and faster than previously reported.

  14. A MEMS AlN transducer array with flexible interconnections for use as a cochlear implant

    Science.gov (United States)

    Knisely, Katherine; Zhao, Chuming; Grosh, Karl

    2015-12-01

    A completely implantable artificial organ of Corti (CIAO) was fabricated using batch MEMS processing techniques. A silicon backbone supports five piezoelectric cantilevers, each of which is designed to have an in vivo resonance corresponding to its tonotopic location in the guinea pig ST (20-40 kHz). An attachable polymer ribbon cable extends 4cm from the probe to an electrode bay, where electrical connections to each cantilever are accessed. The actuation responses of the fabricated devices were measured using laser vibrometry confirming the fluid-loaded resonance conforming to the straight section of the first turn of the guinea pig cochlea. First generation devices have been fabricated and the actuated resonances were measured to range from 80.3-134.2kHz in air and 24.3-41.0 kHz in water.

  15. Energy-Efficient Variable Stiffness Actuators

    NARCIS (Netherlands)

    Visser, Ludo C.; Carloni, Raffaella; Stramigioli, Stefano

    2011-01-01

    Variable stiffness actuators are a particular class of actuators that is characterized by the property that the apparent output stiffness can be changed independent of the output position. To achieve this, variable stiffness actuators consist of a number of elastic elements and a number of actuated

  16. Microfluidic sensors based on perforated cantilevers

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole

    Arbejdet presenteret i denne PhD afhandling omhandler udviklingen af en mikrofluide sensor basered på bjælke teknologi. Bjælkerne er fremstillet i den negative photo-resist SU-8 og i SiN. I bjælkerne er der inkorporeret et array af huller. To nye sensorer er udviklet på baggrund af de perforerede...... bjælker: en yderst sensitiv flow-meter og en partikel tæller med integreret filter funktion. En optisk udlæsningsteknik benyttes til at måle udbøjningen af bjælkerne. En laser stråle fokuseres på enden af bjælken og bjælke forskydningen måles ved at detekterer laser strålens forskydning ved hjælp af en...... strømningsmodstanden de inducerer i kanalen og af hastigheden på væsken i kanalen. Ved at kende geometrien og materiale parametrene kan strømningnshastigheden i kanalen bestemmes ud fra udbøjningen af bjælken. Sensitiviteten på flow-meteret kan varieres ved at ændre på geometrien og bjælke materialet. De perforerede...

  17. Electret-based cantilever energy harvester: design and optimization

    CERN Document Server

    Boisseau, S; Sylvestre, A

    2011-01-01

    We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations of such a device and its implementation using Finite Elements (FEM) and Matlab in order to get an accurate model. This model is then used in an optimization process. A macroscopic prototype (3.2cm^{2}) was built with a silicon cantilever and a Teflon\\textregistered electret. Thanks to this prototype, we manage to harvest 17\\muW with ambient-type vibrations of 0.2g on a load of 210M{\\Omega}. The experimental results are consistent with simulation results.

  18. Vibrations of cantilevered shallow cylindrical shells of rectangular planform

    Science.gov (United States)

    Leissa, A. W.; Lee, J. K.; Wang, A. J.

    1981-01-01

    A cantilevered, shallow shell of circular cylindrical curvature and rectangular planform exhibits free vibration behavior which differs considerably from that of a cantilevered beam or of a flat plate. Some numerical results can be found for the problem in the previously published literature, mainly obtained by using various finite element methods. The present paper is the first definitive study of the problem, presenting accurate non-dimensional frequency parameters for wide ranges of aspect ratio, shallowness ratio and thickness ratio. The analysis is based upon shallow shell theory. Numerical results are obtained by using the Ritz method, with algebraic polynomial trial functions for the displacements. Convergence is investigated, with attention being given both to the number of terms taken for each co-ordinate direction and for each of the three components of displacement. Accuracy of the results is also established by comparison with finite element results for shallow shells and with other accurate flat plate solutions.

  19. Vibrating cantilever beam in a flowing soap film

    Science.gov (United States)

    Sajjanapu, Veera; Ward, Thomas

    2016-11-01

    We present an experimental study of the interaction between a flexible cantilever beam and a flowing fluid medium using a soap film. The vertically falling soap film is capable of attaining speeds ranging from 1.5 - 3 m/s with an operating test section width of 7.5 cm. Experiments were conducted for flexible cantilever beams of length L wake with a high-speed camera. Assuming small vibrational amplitudes, we consider the Euler-Bernoulli beam theory to understand the dynamics. From the analysis we find that the normalized average displacement is linear with respect to the square of the free-stream velocity. The vibrational amplitude is also discussed using a similar scaling. Finally, visualization of the downstream vortex structure is related to a beams displacement and vibrational frequency using dimensional analysis.

  20. Vibrations of cantilevered shallow cylindrical shells of rectangular planform

    Science.gov (United States)

    Leissa, A. W.; Lee, J. K.; Wang, A. J.

    1981-10-01

    A cantilevered, shallow shell of circular cylindrical curvature and rectangular planform exhibits free vibration behavior which differs considerably from that of a cantilevered beam or of a flat plate. Some numerical results can be found for the problem in the previously published literature, mainly obtained by using various finite element methods. The present paper is the first definitive study of the problem, presenting accurate non-dimensional frequency parameters for wide ranges of aspect ratio, shallowness ratio and thickness ratio. The analysis is based upon shallow shell theory. Numerical results are obtained by using the Ritz method, with algebraic polynomial trial functions for the displacements. Convergence is investigated, with attention being given both to the number of terms taken for each co-ordinate direction and for each of the three components of displacement. Accuracy of the results is also established by comparison with finite element results for shallow shells and with other accurate flat plate solutions.

  1. Accurate Method for Determining Adhesion of Cantilever Beams

    Energy Technology Data Exchange (ETDEWEB)

    Michalske, T.A.; de Boer, M.P.

    1999-01-08

    Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying.

  2. Optical fiber accelerometer based on a silicon micromachined cantilever

    Science.gov (United States)

    Malki, Abdelrafik; Lecoy, Pierre; Marty, Jeanine; Renouf, Christine; Ferdinand, Pierre

    1995-12-01

    An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of +/-1.2% in the range of 0.1-22 m s-2, a frequency linearity of +/-1% in the

  3. Solution and Positive Solution to Nonlinear Cantilever Beam Equations

    Institute of Scientific and Technical Information of China (English)

    2008-01-01

    Using the decomposition technique of equation and the fixed point theorem, the existence of solution and positive solution is studied for a nonlinear cantilever beam equation. The equation describes the deformation of the elastic beam with a fixed end and a free end. The main results show that the equation has at least one solution or positive solution, provided that the "height" of nonlinear term is appropriate on a bounded set.

  4. Vibration of a Cantilever Beam in Ambient Fluid

    CERN Document Server

    Metzger, C; Zypman, F

    2016-01-01

    Here we obtain analytical expressions for the frequency response of a cantilever beam in the presence of ambient fluid. The advantage of our approach, besides its simplicity of use, is that it explicitly contains the viscosity and the density of the ambient fluid. Thus, if measuring the frequency spectrum, the expression can be used in the design of viscometers. Conversely, if the ambient fluid is known, the expression can be used in the design of force gauges such as in Atomic Force Microscopy.

  5. An Astigmatic Detection System for Polymeric Cantilever-based Sensors

    DEFF Research Database (Denmark)

    Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo;

    2012-01-01

    We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal...... submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS....

  6. Digital electrostatic acoustic transducer array

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-12-19

    In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.

  7. STATIC STUDY OF CANTILEVER BEAM STICTION UNDER ELECTROSTATIC FORCE INFLUENCE

    Institute of Scientific and Technical Information of China (English)

    ZhangYin; ZhaoYa-pu

    2004-01-01

    The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beam solutions of the loads with different distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation offers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length offers such information. But to compute the functional it is necessary to know the beam deformation, So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The effects of dielectric layer thickness and electrostatic voltage on the cantilever beam stiction are studied. The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.

  8. Fatigue Life Analysis of Cantilever Probe on Wafer Test

    Directory of Open Access Journals (Sweden)

    Hsiao Te-Ching

    2016-01-01

    Full Text Available This research utilizes the finite element analysis software (ANSYS to stimulate the different probe material quality (tungsten, SUS304 stainless steel, SUS316L stainless steel and SKD11 tool steel, respectively during wafer tests. Under a room temperature of (25°C, the stress and fatigue life (cycles of probing test of the cantilever probe were measured with an OverDriver (OD of 20µm, 40µm, 50µm, 60µm and 80µm, respectively. First, to obtain the magnitude of pinpoint shift of the probe under wafer test and the OverDriver is 50µm. And, calculate the fatigue life of the probe. Then, a probe model with the same characteristics as the experiment is created and the probe fatigue life analyzed with the ANSYS. After the reliability of the model is ascertained, the wafer tests of different probe materials are stimulated under different OverDriver circumstances to calculate its stress and fatigue life. The results indicate that the greatest stress measured during the wafer test of the tungsten, SUS304 stainless steel, SUS316L stainless steel and SKD11 tool steel cantilever probe are all smaller than the yield strength, and the fatigue life could reach over one hundred K cycles. When catalogued by the cantilever probe fatigue life during one hundred K cycles, the life span, in order, is tungsten < SUS316L stainless steel < SUS304 stainless steel < SKD11 tool steel.

  9. Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing

    Directory of Open Access Journals (Sweden)

    Christian Riesch

    2008-01-01

    Full Text Available Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers. Miniaturized cantilever-based devices are interesting alternatives for such applications, but here the interaction between the liquid and the oscillating beam is more involved. In our contribution, we describe a measurement setup, which allows the investigation of this interaction for different beam cross-sections. We present an analytical model based on an approximation of the immersed cantilever as an oscillating sphere comprising the effective mass and the intrinsic damping of the cantilever and additional mass and damping due to the liquid loading. The model parameters are obtained from measurements with well-known sample liquids by a curve fitting procedure. Finally, we present the measurement of viscosity and density of an unknown sample liquid, demonstrating the feasibility of the model.

  10. NEW PRECISION PIEZOELECTRIC STEP ACTUATOR

    Institute of Scientific and Technical Information of China (English)

    LIU Jianfang; YANG Zhigang; FAN Zunqiang; CHENG Guangming

    2006-01-01

    A new precision piezoelectric actuator is proposed to improve its drive capabilities. The actuator is based on the piezoelectric technology. It adopts the principle of bionics and works with a new method of stator initiative anchoring/loosen and a distortion structure of double-side thin flexible hinge. It solves the problem of anchoring/loosen, frequency, journey, resolution and velocity. The experiment shows that the new linear piezoelectric actuator works with high frequency (100 Hz), high speed (502 μm/s), large travel (>10 mm), high resolution (0.05 μm) and high load (100 N). This kind of new piezoelectric actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some micromanipulation field.

  11. Novel Cryogenic Actuator Development Project

    Data.gov (United States)

    National Aeronautics and Space Administration —  New thin film low friction coating technologies have recently been developed and matured to the point for use in this IRAD actuator work.The new novel...

  12. Piezoelectric actuator for pulsating jets

    Science.gov (United States)

    Brissaud, Michel; Gonnard, Paul; Bera, Jean-Christophe; Sunyach, Michel

    2000-08-01

    Recent researches in aeronautics showed that fluidic actuator systems could offer possibilities for drag reduction and lift improvement. To this end many actuator types were designed. This paper deals with the design, fabrication and test of piezoelectric actuator in order to generate pulsated jets normal to a surface and control air flow separation. It is based on the flexural displacement of a rectangular metal plate clamped on one of its large edge. Piezoelectric patches cemented on the plate were used for driving into vibration the actuator. Experimental measurements show that pulsed flow velocities are adjustable from 1.5m/s to 35m/s through a 100x1mm2 slit andwithin a 100 to 400 Hz frequency range. Prototype provides the jet performances classically required for active control flow.

  13. Modeling and control of precision actuators

    CERN Document Server

    Kiong, Tan Kok

    2013-01-01

    IntroductionGrowing Interest in Precise ActuatorsTypes of Precise ActuatorsApplications of Precise ActuatorsNonlinear Dynamics and ModelingHysteresisCreepFrictionForce RipplesIdentification and Compensation of Preisach Hysteresis in Piezoelectric ActuatorsSVD-Based Identification and Compensation of Preisach HysteresisHigh-Bandwidth Identification and Compensation of Hysteretic Dynamics in Piezoelectric ActuatorsConcluding RemarksIdentification and Compensation of Frict

  14. High torque miniature rotary actuator

    Science.gov (United States)

    Nalbandian, Ruben

    2005-07-01

    This paper summarizes the design and the development of a miniature rotary actuator (36 mm diameter by 100 mm length) used in spacecraft mechanisms requiring high torques and/or ultra-fine step resolution. This actuator lends itself to applications requiring high torque but with strict volume limitations which challenge the use of conventional rotary actuators. The design challenge was to develop a lightweight (less than 500 grams), very compact, high bandwidth, low power, thermally stable rotary actuator capable of producing torques in excess of 50 N.m and step resolutions as fine as 0.003 degrees. To achieve a relatively high torsional stiffness in excess of 1000 Nm/radian, the design utilizes a combination of harmonic drive and multistage planetary gearing. The unique design feature of this actuator that contributes to its light weight and extremely precise motion capability is a redundant stepper motor driving the output through a multistage reducing gearbox. The rotary actuator is powered by a high reliability space-rated stepper motor designed and constructed by Moog, Inc. The motor is a three-phase stepper motor of 15 degree step angle, producing twenty-four full steps per revolution. Since micro-stepping is not used in the design, and un-powered holding torque is exhibited at every commanded step, the rotary actuator is capable of reacting to torques as high as 35 Nm by holding position with the power off. The output is driven through a gear transmission having a total train ratio of 5120:1, resulting in a resolution of 0.003 degrees output rotation per motor step. The modular design of the multi-stage output transmission makes possible the addition of designs having different output parameters, such as lower torque and higher output speed capability. Some examples of an actuator family based on this growth capability will be presented in the paper.

  15. Soft Pneumatic Actuators for Rehabilitation

    OpenAIRE

    Guido Belforte; Gabriella Eula; Alexandre Ivanov; Silvia Sirolli

    2014-01-01

    Pneumatic artificial muscles are pneumatic devices with practical and various applications as common actuators. They, as human muscles, work in agonistic-antagonistic way, giving a traction force only when supplied by compressed air. The state of the art of soft pneumatic actuators is here analyzed: different models of pneumatic muscles are considered and evolution lines are presented. Then, the use of Pneumatic Muscles (PAM) in rehabilitation apparatus is described and the general characteri...

  16. Soft Pneumatic Actuators for Rehabilitation

    Directory of Open Access Journals (Sweden)

    Guido Belforte

    2014-05-01

    Full Text Available Pneumatic artificial muscles are pneumatic devices with practical and various applications as common actuators. They, as human muscles, work in agonistic-antagonistic way, giving a traction force only when supplied by compressed air. The state of the art of soft pneumatic actuators is here analyzed: different models of pneumatic muscles are considered and evolution lines are presented. Then, the use of Pneumatic Muscles (PAM in rehabilitation apparatus is described and the general characteristics required in different applications are considered, analyzing the use of proper soft actuators with various technical properties. Therefore, research activity carried out in the Department of Mechanical and Aerospace Engineering in the field of soft and textile actuators is presented here. In particular, pneumatic textile muscles useful for active suits design are described. These components are made of a tubular structure, with an inner layer of latex coated with a deformable outer fabric sewn along the edge. In order to increase pneumatic muscles forces and contractions Braided Pneumatic Muscles are studied. In this paper, new prototypes are presented, based on a fabric construction and various kinds of geometry. Pressure-force-deformation tests results are carried out and analyzed. These actuators are useful for rehabilitation applications. In order to reproduce the whole upper limb movements, new kind of soft actuators are studied, based on the same principle of planar membranes deformation. As an example, the bellows muscle model and worm muscle model are developed and described. In both cases, wide deformations are expected. Another issue for soft actuators is the pressure therapy. Some textile sleeve prototypes developed for massage therapy on patients suffering of lymph edema are analyzed. Different types of fabric and assembly techniques have been tested. In general, these Pressure Soft Actuators are useful for upper/lower limbs treatments

  17. Design of an innovative dielectric elastomer actuator for space applications

    Science.gov (United States)

    Branz, Francesco; Sansone, Francesco; Francesconi, Alessandro

    2014-03-01

    The capability of Dielectric Elastomers to show large deformations under high voltage loads has been deeply investigated to develop a number of actuators concepts. From a space systems point of view, the advantages introduced by this class of smart materials are considerable and include high conversion efficiency, distributed actuation, self-sensing capability, light weight and low cost. This paper focuses on the design of a solid-state actuator capable of high positioning resolution. The use of Electroactive Polymers makes this device interesting for space mechanisms applications, such as antenna and sensor pointing, solar array orientation, attitude control, adaptive structures and robotic manipulators. In particular, such actuation suffers neither wear, nor fatigue issues and shows highly damped vibrations, thus requiring no maintenance and transferring low disturbance to the surrounding structures. The main weakness of this actuator is the relatively low force/torque values available. The proposed geometry allows two rotational degrees of freedom, and simulations are performed to measure the expected instant angular deflection at zero load and the stall torque of the actuator under a given high voltage load. Several geometric parameters are varied and their influence on the device behaviour is studied. Simplified relations are extrapolated from the numerical results and represent useful predicting tools for design purposes. Beside the expected static performances, the dynamic behaviour of the device is also assessed and the input/output transfer function is estimated. Finally, a prototype design for laboratory tests is presented; the experimental activity aims to validate the preliminary results obtained by numerical analysis.

  18. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    DEFF Research Database (Denmark)

    Bache, Michael; Taboryski, Rafael Jozef; Schmid, Silvan;

    2011-01-01

    The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide) immobilized on a cantilever surface to anti......-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending...... and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system. © 2011 Bache et al....

  19. Structural Optimization of Steel Cantilever Used in Concrete Box Girder Bridge Widening

    Directory of Open Access Journals (Sweden)

    Qian Wang

    2015-01-01

    Full Text Available The structural optimization method of steel cantilever used in concrete box girder bridge widening is illustrated in this paper. The structural optimization method of steel cantilever incorporates the conceptual layout design of steel cantilever beam based on the topological theory and the determination of the optimal location of the transverse external prestressed tendons which connect the steel cantilever and the box girder. The optimal design theory and the analysis process are illustrated. The mechanical model for the prestressed steel cantilever is built and the analytical expression of the optimal position of the transverse external tendon is deduced. At last the effectiveness of this method is demonstrated by the design of steel cantilevers which are used to widen an existing bridge.

  20. Automated cantilever exchange and optical alignment for High-throughput, parallel atomic force microscopy

    CERN Document Server

    Bijnagte, Tom; Kramer, Lukas; Dekker, Bert; Herfst, Rodolf; Sadeghian, Hamed

    2016-01-01

    In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time-consuming and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability to automatically exchange and align the cantilever in a very short time with sufficient accuracy is required. In this paper, we present the development of an automated cantilever exchange and optical alignment instrument. We present an experimental proof of principle by exchanging various types of AFM cantilevers in 6 seconds with an accuracy better than 2 um. The exchange and alignment unit is miniaturized to allow for integration in a parallel AFM. The reliability of the demonstrator has also been evaluated. Ten thousand continuous exchange and alignment cycles were performed without failure. The automated exchange and alignment of the AFM cantilever overcome a large ...

  1. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    Directory of Open Access Journals (Sweden)

    Aamand Jens

    2011-01-01

    Full Text Available Abstract The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide immobilized on a cantilever surface to anti-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system.

  2. Large Scale Magnetostrictive Valve Actuator

    Science.gov (United States)

    Richard, James A.; Holleman, Elizabeth; Eddleman, David

    2008-01-01

    Marshall Space Flight Center's Valves, Actuators and Ducts Design and Development Branch developed a large scale magnetostrictive valve actuator. The potential advantages of this technology are faster, more efficient valve actuators that consume less power and provide precise position control and deliver higher flow rates than conventional solenoid valves. Magnetostrictive materials change dimensions when a magnetic field is applied; this property is referred to as magnetostriction. Magnetostriction is caused by the alignment of the magnetic domains in the material s crystalline structure and the applied magnetic field lines. Typically, the material changes shape by elongating in the axial direction and constricting in the radial direction, resulting in no net change in volume. All hardware and testing is complete. This paper will discuss: the potential applications of the technology; overview of the as built actuator design; discuss problems that were uncovered during the development testing; review test data and evaluate weaknesses of the design; and discuss areas for improvement for future work. This actuator holds promises of a low power, high load, proportionally controlled actuator for valves requiring 440 to 1500 newtons load.

  3. Control of Adjustable Compliant Actuators

    Directory of Open Access Journals (Sweden)

    Berno J.E. Misgeld

    2014-05-01

    Full Text Available Adjustable compliance or variable stiffness actuators comprise an additional element to elastically decouple the actuator from the load and are increasingly applied to human-centered robotic systems. The advantages of such actuators are of paramount importance in rehabilitation robotics, where requirements demand safe interaction between the therapy system and the patient. Compliant actuator systems enable the minimization of large contact forces arising, for example, from muscular spasticity and have the ability to periodically store and release energy in cyclic movements. In order to overcome the loss of bandwidth introduced by the elastic element and to guarantee a higher range in force/torque generation, new actuator designs consider variable or nonlinear stiffness elements, respectively. These components cannot only be adapted to the walking speed or the patient condition, but also entail additional challenges for feedback control. This paper introduces a novel design method for an impedance-based controller that fulfills the control objectives and compares the performance and robustness to a classical cascaded control approach. The new procedure is developed using a non-standard positive-real Η2 controller design and is applied to a loop-shaping approach. Robust norm optimal controllers are designed with regard to the passivity of the actuator load-impedance transfer function and the servo control problem. Classical cascaded and positive-real Η2 controller designs are validated and compared in simulations and in a test bench using a passive elastic element of varying stiffness.

  4. Positioning actuators in efficient locations for rendering the desired sound field using inverse approach

    Science.gov (United States)

    Cho, Wan-Ho; Ih, Jeong-Guon; Toi, Takeshi

    2015-12-01

    For rendering a desired characteristics of a sound field, a proper conditioning of acoustic actuators in an array are required, but the source condition depends strongly on its position. Actuators located at inefficient positions for control would consume the input power too much or become too much sensitive to disturbing noise. These actuators can be considered redundant, which should be sorted out as far as such elimination does not damage the whole control performance significantly. It is known that the inverse approach based on the acoustical holography concept, employing the transfer matrix between sources and field points as core element, is useful for rendering the desired sound field. By investigating the information indwelling in the transfer matrix between actuators and field points, the linear independency of an actuator from the others in the array can be evaluated. To this end, the square of the right singular vector, which means the radiation contribution from the source, can be used as an indicator. Inefficient position for fulfilling the desired sound field can be determined as one having smallest indicator value among all possible actuator positions. The elimination process continues one by one, or group by group, until the remaining number of actuators meets the preset number. Control examples of exterior and interior spaces are taken for the validation. The results reveal that the present method for choosing least dependent actuators, for a given number of actuators and field condition, is quite effective in realizing the desired sound field with a noisy input condition, and in minimizing the required input power.

  5. Measurement of contractile stress generated by cultured rat muscle on silicon cantilevers for toxin detection and muscle performance enhancement.

    Directory of Open Access Journals (Sweden)

    Kerry Wilson

    Full Text Available BACKGROUND: To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications. METHODOLOGY/PRINCIPAL FINDINGS: We have demonstrated a biological microelectromechanical system (BioMEMS based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT, the time to half relaxation ((1/2RT were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and (1/2RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine. CONCLUSIONS/SIGNIFICANCE: The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery

  6. Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

    DEFF Research Database (Denmark)

    Bosco, Filippo; Hwu, E. T.; Keller, Stephan Urs

    2010-01-01

    In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure...... the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment....

  7. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    Energy Technology Data Exchange (ETDEWEB)

    Xu, J.; Tang, J., E-mail: jtang@engr.uconn.edu [Department of Mechanical Engineering, The University of Connecticut, Storrs, Connecticut 06269 (United States)

    2015-11-23

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined.

  8. Micromirror Arrays for Adaptive Optics

    Energy Technology Data Exchange (ETDEWEB)

    Carr, E.J.

    2000-08-07

    The long-range goal of this project is to develop the optical and mechanical design of a micromirror array for adaptive optics that will meet the following criteria: flat mirror surface ({lambda}/20), high fill factor (> 95%), large stroke (5-10 {micro}m), and pixel size {approx}-200 {micro}m. This will be accomplished by optimizing the mirror surface and actuators independently and then combining them using bonding technologies that are currently being developed.

  9. Reversible Self-Actuated Thermo-Responsive Pore Membrane

    Science.gov (United States)

    Park, Younggeun; Gutierrez, Maria Paz; Lee, Luke P.

    2016-12-01

    Smart membranes, which can selectively control the transfer of light, air, humidity and temperature, are important to achieve indoor climate regulation. Even though reversible self-actuation of smart membranes is desirable in large-scale, reversible self-regulation remains challenging. Specifically, reversible 100% opening/closing of pore actuation showing accurate responsiveness, reproducibility and structural flexibility, including uniform structure assembly, is currently very difficult. Here, we report a reversible, thermo-responsive self-activated pore membrane that achieves opening and closing of pores. The reversible, self-actuated thermo-responsive pore membrane was fabricated with hybrid materials of poly (N-isopropylacrylamide), (PNIPAM) within polytetrafluoroethylene (PTFE) to form a multi-dimensional pore array. Using Multiphysics simulation of heat transfer and structural mechanics based on finite element analysis, we demonstrated that pore opening and closing dynamics can be self-activated at environmentally relevant temperatures. Temperature cycle characterizations of the pore structure revealed 100% opening ratio at T = 40 °C and 0% opening ratio at T = 20 °C. The flexibility of the membrane showed an accurate temperature-responsive function at a maximum bending angle of 45°. Addressing the importance of self-regulation, this reversible self-actuated thermo-responsive pore membrane will advance the development of future large-scale smart membranes needed for sustainable indoor climate control.

  10. Reversible Self-Actuated Thermo-Responsive Pore Membrane.

    Science.gov (United States)

    Park, Younggeun; Gutierrez, Maria Paz; Lee, Luke P

    2016-12-19

    Smart membranes, which can selectively control the transfer of light, air, humidity and temperature, are important to achieve indoor climate regulation. Even though reversible self-actuation of smart membranes is desirable in large-scale, reversible self-regulation remains challenging. Specifically, reversible 100% opening/closing of pore actuation showing accurate responsiveness, reproducibility and structural flexibility, including uniform structure assembly, is currently very difficult. Here, we report a reversible, thermo-responsive self-activated pore membrane that achieves opening and closing of pores. The reversible, self-actuated thermo-responsive pore membrane was fabricated with hybrid materials of poly (N-isopropylacrylamide), (PNIPAM) within polytetrafluoroethylene (PTFE) to form a multi-dimensional pore array. Using Multiphysics simulation of heat transfer and structural mechanics based on finite element analysis, we demonstrated that pore opening and closing dynamics can be self-activated at environmentally relevant temperatures. Temperature cycle characterizations of the pore structure revealed 100% opening ratio at T = 40 °C and 0% opening ratio at T = 20 °C. The flexibility of the membrane showed an accurate temperature-responsive function at a maximum bending angle of 45°. Addressing the importance of self-regulation, this reversible self-actuated thermo-responsive pore membrane will advance the development of future large-scale smart membranes needed for sustainable indoor climate control.

  11. Trans-permanent magnetic actuation

    Science.gov (United States)

    Farmer, Daniel Jay

    The demands for an actuator to deploy, position and shape large spaced-based structures form a unique set of design criteria. In many applications it is desirable to hold displacements or forces between two points to within specified requirements (the regulation problem) and to periodically to change position (the tracking problem). Furthermore, the interest generally lies in satisfying the dynamic performance requirements while expending minimal power, while meeting tight tolerances and while experiencing little wear and fatigue. The actuator must also be able to withstand a variety of operational conditions such as impacts and thermal changes over an extended period of time. Current trends in large-scale structures have addressed the demands by using conventional actuators and motors, along with elaborate linkages or mechanisms to shape, position, protect and deploy. The developed designs use unique characteristics of permanent magnets to create simple direct-acting actuators and motors very suitable for space based structures. The developed trans-permanent magnetic (T-PM) actuators and motors are systems consisting of one or more permanent magnets, some of whose magnetic strengths can be switched on-board by surrounding pulse-coils. The T-PM actuator and motors expend no power during regulation. The T-PM can periodically change or remove the strength of its own magnets thereby enabling both fine-tune adjustments (microsteps) and large-scale adjustments (rotation). The fine (microstep) adjustments are particularly helpful in thermally varying space environments. The large-scale adjustments (rotation) are particularly helpful in deployment where the structure or antenna must experience large-angle rotations and/or large displacements. T-PM concepts are illustrated in direct acting actuators and built into stepper motor and permanent magnet motor applications. Several examples of design, analysis and testing are developed to verify the technology and supporting

  12. Drag Reduction of Turbulence Air Channel Flow with Distributed Micro Sensors and Actuators

    Science.gov (United States)

    Yoshino, Takashi; Suzuki, Yuji; Kasagi, Nobuhide

    A prototype system for feedback control of wall turbulence is developed, and its performance is evaluated in a physical experiment. Arrayed micro hot-film sensors with a spanwise spacing of 1 mm are employed for the measurement of streamwise shear stress fluctuations, while arrayed magnetic actuators of 2.4 mm in spanwise width are used to introduce control input through wall deformation. A digital signal processor with a time delay of 0.1 ms is employed to drive the actuators based on the sensor signals. The driving voltage of each actuator is determined with a linear combination of the wall shear stress fluctuations at three sensors located upstream of the actuator, and a noise-tolerant genetic algorithm is employed to optimize the control parameters. Feedback control experiments are conducted in a fully-developed turbulent air channel flow at the Reynolds number of Reτ=300. It is found that about 6% drag reduction has been achieved in a physical experiment for the first time. Through turbulent statistics measurements with LDV, it is also found that the Reynolds shear stress close to the wall is decreased by the present control scheme. A conditional average of a DNS database is also made to extract coherent structures associated with the present control input. It is shown that the wall-deformation actuators induce a wall-normal velocity away from the wall when the high-speed region is located above the actuator.

  13. Pneumatic Variable Series Elastic Actuator.

    Science.gov (United States)

    Zheng, Hao; Wu, Molei; Shen, Xiangrong

    2016-08-01

    Inspired by human motor control theory, stiffness control is highly effective in manipulation and human-interactive tasks. The implementation of stiffness control in robotic systems, however, has largely been limited to closed-loop control, and suffers from multiple issues such as limited frequency range, potential instability, and lack of contribution to energy efficiency. Variable-stiffness actuator represents a better solution, but the current designs are complex, heavy, and bulky. The approach in this paper seeks to address these issues by using pneumatic actuator as a variable series elastic actuator (VSEA), leveraging the compressibility of the working fluid. In this work, a pneumatic actuator is modeled as an elastic element with controllable stiffness and equilibrium point, both of which are functions of air masses in the two chambers. As such, for the implementation of stiffness control in a robotic system, the desired stiffness/equilibrium point can be converted to the desired chamber air masses, and a predictive pressure control approach is developed to control the timing of valve switching to obtain the desired air mass while minimizing control action. Experimental results showed that the new approach in this paper requires less expensive hardware (on-off valve instead of proportional valve), causes less control action in implementation, and provides good control performance by leveraging the inherent dynamics of the actuator.

  14. Mechanics of Actuated Disc Cutting

    Science.gov (United States)

    Dehkhoda, Sevda; Detournay, Emmanuel

    2017-02-01

    This paper investigates the mechanics of an actuated disc cutter with the objective of determining the average forces acting on the disc as a function of the parameters characterizing its motion. The specific problem considered is that of a disc cutter revolving off-centrically at constant angular velocity around a secondary axis rigidly attached to a cartridge, which is moving at constant velocity and undercutting rock at a constant depth. This model represents an idealization of a technology that has been implemented in a number of hard rock mechanical excavators with the goal of reducing the average thrust force to be provided by the excavation equipment. By assuming perfect conformance of the rock with the actuated disc as well as a prescribed motion of the disc (perfectly rigid machine), the evolution of the contact surface between the disc and the rock during one actuation of the disc can be computed. Coupled with simple cutter/rock interaction models that embody either a ductile or a brittle mode of fragmentation, these kinematical considerations lead to an estimate of the average force on the cartridge and of the partitioning of the energy imparted by the disc to the rock between the actuation mechanism of the disc and the translation of the cartridge on which the actuated disc is attached.

  15. Nonlinear Dynamics of Cantilever-Sample Interactions in Atomic Force Microscopy

    Science.gov (United States)

    Cantrell, John H.; Cantrell, Sean A.

    2010-01-01

    The interaction of the cantilever tip of an atomic force microscope (AFM) with the sample surface is obtained by treating the cantilever and sample as independent systems coupled by a nonlinear force acting between the cantilever tip and a volume element of the sample surface. The volume element is subjected to a restoring force from the remainder of the sample that provides dynamical equilibrium for the combined systems. The model accounts for the positions on the cantilever of the cantilever tip, laser probe, and excitation force (if any) via a basis set of set of orthogonal functions that may be generalized to account for arbitrary cantilever shapes. The basis set is extended to include nonlinear cantilever modes. The model leads to a pair of coupled nonlinear differential equations that are solved analytically using a matrix iteration procedure. The effects of oscillatory excitation forces applied either to the cantilever or to the sample surface (or to both) are obtained from the solution set and applied to the to the assessment of phase and amplitude signals generated by various acoustic-atomic force microscope (A-AFM) modalities. The influence of bistable cantilever modes of on AFM signal generation is discussed. The effects on the cantilever-sample surface dynamics of subsurface features embedded in the sample that are perturbed by surface-generated oscillatory excitation forces and carried to the cantilever via wave propagation are accounted by the Bolef-Miller propagating wave model. Expressions pertaining to signal generation and image contrast in A-AFM are obtained and applied to amplitude modulation (intermittent contact) atomic force microscopy and resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM). The influence of phase accumulation in A-AFM on image contrast is discussed, as is the effect of hard contact and maximum nonlinearity regimes of A-AFM operation.

  16. Development of a non-explosive release actuator using shape memory alloy wire.

    Science.gov (United States)

    Yoo, Young Ik; Jeong, Ju Won; Lim, Jae Hyuk; Kim, Kyung-Won; Hwang, Do-Soon; Lee, Jung Ju

    2013-01-01

    We have developed a newly designed non-explosive release actuator that can replace currently used release devices. The release mechanism is based on a separation mechanism, which relies on segmented nuts and a shape memory alloy (SMA) wire trigger. A quite fast and simple trigger operation is made possible through the use of SMA wire. This actuator is designed to allow a high preload with low levels of shock for the solar arrays of medium-size satellites. After actuation, the proposed device can be easily and instantly reset. Neither replacement, nor refurbishment of any components is necessary. According to the results of a performance test, the release time, preload capacity, and maximum shock level are 50 ms, 15 kN, and 350 G, respectively. In order to increase the reliability of the actuator, more than ten sets of performance tests are conducted. In addition, the proposed release actuator is tested under thermal vacuum and extreme vibration environments. No degradation or damage was observed during the two environment tests, and the release actuator was able to operate successfully. Considering the test results as a whole, we conclude that the proposed non-explosive release actuator can be applied reliably to intermediate-size satellites to replace existing release systems.

  17. Micro-cantilever flow sensor for small aircraft

    KAUST Repository

    Ghommem, Mehdi

    2013-10-01

    We extend the use of cantilever beams as flow sensors for small aircraft. As such, we propose a novel method to measure the airspeed and the angle of attack at which the air travels across a small flying vehicle. We measure beam deflections and extract information about the surrounding flow. Thus, we couple a nonlinear beam model with a potential flow simulator through a fluid-structure interaction scheme. We use this numerical approach to generate calibration curves that exhibit the trend for the variations of the limit cycle oscillations amplitudes of flexural and torsional vibrations with the air speed and the angle of attack, respectively. © The Author(s) 2013.

  18. Bending analysis of a functionally graded piezoelectric cantilever beam

    Institute of Scientific and Technical Information of China (English)

    YU Tao; ZHONG Zheng

    2007-01-01

    A new analysis based on Airy stress function method is presented for a functionally graded piezoelectric material cantilever beam.Assuming that the mechanical and electric properties of the material have the same variations along the thickness direction,a two-dimensional plane elasticity solution is obtained for the coupling electroelastic fields of the beam under different loadings.This solution will be useful in analyzing FGPM beam with arbitrary variations of material properties.The influences of the functionally graded material properties on the structural response of the beam subjected to different loads are also studied through numerical examples.

  19. Bending analysis of a functionally graded piezoelectric cantilever beam

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    A new analysis based on Airy stress function method is presented for a functionally graded piezoelectric material cantilever beam. Assuming that the mechanical and electric properties of the material have the same variations along the thickness direction, a two-dimensional plane elasticity solution is obtained for the coupling electroelastic fields of the beam under different loadings. This solution will be useful in analyzing FGPM beam with arbitrary variations of material properties. The influences of the functionally graded material properties on the structural response of the beam subjected to different loads are also studied through numerical examples.

  20. Design of cantilever probes for Atomic Force Microscopy (AFM)

    DEFF Research Database (Denmark)

    Pedersen, Niels Leergaard

    2000-01-01

    A cantilever beam used in an Atomic Force Microscope is optimized with respect to two different objectives. The first goal is to maximize the first eigenfrequency while keeping the stiffness of the probe constant. The second goal is to maximize the tip angle of the first eigenmode while again...... keeping the stiffness constant. The resulting design of the beam from the latter optimization gives almost the same result as when maximizing the first eigenfrequency. Adding a restriction on the second eigenfrequency result in a significant change of the optimal design. The beam is modelled with 12 DOF...

  1. Temperature enhanced photothermal cooling of a micro-cantilever

    CERN Document Server

    Fu, Hao; Mao, Tian-hua; Cao, Gengyu

    2014-01-01

    We present a temperature enhanced photothermal cooling scheme in a micro-cantilever based FP cavity. Experiments at various temperatures show a temperature dependence of photothermal cooling efficiency. And approximate one order of improvement on the cooling efficiency is achieved experimentally when the temperature decreases from 298 K to 100 K. Numerical analysis reveals that the dramatic change of the cooling efficiency is attributed to the temperature dependent dynamics of the photothermal backaction. A high efficient cooling can be achieved by controlling the temperature for an optimized the dynamics of photothermal backaction.

  2. Automatic Optical Crack Tracking for Double Cantilever Beam Specimens

    Science.gov (United States)

    2015-01-01

    and Member, R.G., ‘‘Path Planning For Machine Vision Assisted , Teleoperated Pavement Crack Sealer,’’ Journal of Transportation Engineering 124:137...TECHN ICAL ART IC LE Automatic Optical Crack Tracking for Double Cantilever Beam Specimens B. Krull1,2, J. Patrick2,3, K. Hart2,4, S. White2,4, and N...Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 3 Department of Civil and Environmental Engineering, University of

  3. Piezoelectric Bimorph Cantilever for Vibration-Producing-Hydrogen

    Directory of Open Access Journals (Sweden)

    Guangming Cheng

    2012-12-01

    Full Text Available A device composed of a piezoelectric bimorph cantilever and a water electrolysis device was fabricated to realize piezoelectrochemical hydrogen production. The obvious output of the hydrogen and oxygen through application of a mechanical vibration of ~0.07 N and ~46.2 Hz was observed. This method provides a cost-effective, recyclable, environment-friendly and simple way to directly split water for hydrogen fuels by scavenging mechanical waste energy forms such as noise or traffic vibration in the environment.

  4. Analytical simulation of the cantilever-type energy harvester

    Directory of Open Access Journals (Sweden)

    Jie Mei

    2016-01-01

    Full Text Available This article describes an analytical model of the cantilever-type energy harvester based on Euler–Bernoulli’s beam theory. Starting from the Hamiltonian form of total energy equation, the bending mode shapes and electromechanical dynamic equations are derived. By solving the constitutive electromechanical dynamic equation, the frequency transfer function of output voltage and power can be obtained. Through a case study of a unimorph piezoelectric energy harvester, this analytical modeling method has been validated by the finite element method.

  5. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    Directory of Open Access Journals (Sweden)

    Valeria Toffoli

    2013-12-01

    Full Text Available The design and characteristics of a micro-system for thermogravimetric analysis (TGA in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

  6. Analyzing the Effect of Capillary Force on Vibrational Performance of the Cantilever of an Atomic Force Microscope in Tapping Mode with Double Piezoelectric Layers in an Air Environment.

    Science.gov (United States)

    Nahavandi, Amir; Korayem, Moharam Habibnejad

    2015-10-01

    The aim of this paper is to determine the effects of forces exerted on the cantilever probe tip of an atomic force microscope (AFM). These forces vary according to the separation distance between the probe tip and the surface of the sample being examined. Hence, at a distance away from the surface (farther than d(on)), these forces have an attractive nature and are of Van der Waals type, and when the probe tip is situated in the range of a₀≤ d(ts) ≤ d(on), the capillary force is added to the Van der Waals force. At a distance of d(ts) ≤ a₀, the Van der Waals and capillary forces remain constant at intermolecular distances, and the contact repulsive force repels the probe tip from the surface of sample. The capillary force emerges due to the contact of thin water films with a thickness of h(c) which have accumulated on the sample and probe. Under environmental conditions a layer of water or hydrocarbon often forms between the probe tip and sample. The capillary meniscus can grow until the rate of evaporation equals the rate of condensation. For each of the above forces, different models are presented. The smoothness or roughness of the surfaces and the geometry of the cantilever tip have a significant effect on the modeling of forces applied on the probe tip. Van der Waals and the repulsive forces are considered to be the same in all the simulations, and only the capillary force is altered in order to evaluate the role of this force in the AFM-based modeling. Therefore, in view of the remarkable advantages of the piezoelectric microcantilever and also the extensive applications of the tapping mode, we investigate vibrational motion of the piezoelectric microcantilever in the tapping mode. The cantilever mentioned is entirely covered by two piezoelectric layers that carry out both the actuation of the probe tip and the measuringof its position.

  7. High speed adaptive liquid microlens array

    NARCIS (Netherlands)

    Murade, C.U.; van den Ende, Henricus T.M.; Mugele, Friedrich Gunther

    2012-01-01

    Liquid microlenses are attractive for adaptive optics because they offer the potential for both high speed actuation and parallelization into large arrays. Yet, in conventional designs, resonances of the liquid and the complexity of driving mechanisms and/or the device architecture have hampered a

  8. Engineering Design Tools for Shape Memory Alloy Actuators: CASMART Collaborative Best Practices and Case Studies

    Science.gov (United States)

    Wheeler, Robert W.; Benafan, Othmane; Gao, Xiujie; Calkins, Frederick T; Ghanbari, Zahra; Hommer, Garrison; Lagoudas, Dimitris; Petersen, Andrew; Pless, Jennifer M.; Stebner, Aaron P.; Turner, Travis L.

    2016-01-01

    The primary goal of the Consortium for the Advancement of Shape Memory Alloy Research and Technology (CASMART) is to enable the design of revolutionary applications based on shape memory alloy (SMA) technology. In order to help realize this goal and reduce the development time and required experience for the fabrication of SMA actuation systems, several modeling tools have been developed for common actuator types and are discussed herein along with case studies, which highlight the capabilities and limitations of these tools. Due to their ability to sustain high stresses and recover large deformations, SMAs have many potential applications as reliable, lightweight, solid-state actuators. Their advantage over classical actuators can also be further improved when the actuator geometry is modified to fit the specific application. In this paper, three common actuator designs are studied: wires, which are lightweight, low-profile, and easily implemented; springs, which offer actuation strokes upwards of 200 at reduced mechanical loads; and torque tubes, which can provide large actuation forces in small volumes and develop a repeatable zero-load actuation response (known as the two-way shape memory effect). The modeling frameworks, which have been implemented in the design tools, are developed for each of these frequently used SMA actuator types. In order to demonstrate the versatility and flexibility of the presented design tools, as well as validate their modeling framework, several design challenges were completed. These case studies include the design and development of an active hinge for the deployment of a solar array or foldable space structure, an adaptive solar array deployment and positioning system, a passive air temperature controller for regulation flow temperatures inside of a jet engine, and a redesign of the Corvette active hatch, which allows for pressure equalization of the car interior. For each of the presented case studies, a prototype or proof

  9. Elastic actuation for legged locomotion

    Science.gov (United States)

    Cao, Chongjing; Conn, Andrew

    2017-04-01

    The inherent elasticity of dielectric elastomer actuators (DEAs) gives this technology great potential in energy efficient locomotion applications. In this work, a modular double cone DEA is developed with reduced manufacturing and maintenance time costs. This actuator can lift 45 g of mass (5 times its own weight) while producing a stroke of 10.4 mm (23.6% its height). The contribution of the elastic energy stored in antagonistic DEA membranes to the mechanical work output is experimentally investigated by adding delay into the DEA driving voltage. Increasing the delay time in actuation voltage and hence reducing the duty cycle is found to increase the amount of elastic energy being recovered but an upper limit is also noticed. The DEA is then applied to a three-segment leg that is able to move up and down by 17.9 mm (9% its initial height), which demonstrates the feasibility of utilizing this DEA design in legged locomotion.

  10. Modular Actuators for Space Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Rocketstar Robotics is proposing the development of a modern dual drive actuator. Rocketstar has put together numerous modern concepts for modular actuators that...

  11. Transputer Control of Hydraulic Actuators and Robots

    DEFF Research Database (Denmark)

    Conrad, Finn

    1996-01-01

    Results from a Danish mechatronics research program entitled IMCIA - Intelligent Control and Intelligent Actuators. The objective is development of intelligent actuators for intelligent motion control. A mechatronics test facility with a transputer controlled hydraulic robot suiteable for real...

  12. Electrodynamic actuators for rocket engine valves

    Science.gov (United States)

    Fiet, O.; Doshi, D.

    1972-01-01

    Actuators, employed in acoustic loudspeakers, operate liquid rocket engine valves by replacing light paper cones with flexible metal diaphragms. Comparative analysis indicates better response time than solenoid actuators, and improved service life and reliability.

  13. Transputer Control of Hydraulic Actuators and Robots

    DEFF Research Database (Denmark)

    Conrad, Finn

    1996-01-01

    Results from a Danish mechatronics research program entitled IMCIA - Intelligent Control and Intelligent Actuators. The objective is development of intelligent actuators for intelligent motion control. A mechatronics test facility with a transputer controlled hydraulic robot suiteable for real...

  14. Deformable mirror with thermal actuators.

    Science.gov (United States)

    Vdovin, Gleb; Loktev, Mikhail

    2002-05-01

    Low-cost adaptive optics is applied in lasers, scientific instrumentation, ultrafast sciences, and ophthalmology. These applications demand that the deformable mirrors used be simple, inexpensive, reliable, and efficient. We report a novel type of ultralow-cost deformable mirror with thermal actuators. The device has a response time of ~5 s , an actuator stroke of ~6mum , and temporal stability of ~lambda/10 rms in the visible range and can be used for correction of rather large aberrations with slow-changing amplitude.

  15. Fast-acting valve actuator

    Science.gov (United States)

    Cho, Nakwon

    1980-01-01

    A fast-acting valve actuator utilizes a spring driven pneumatically loaded piston to drive a valve gate. Rapid exhaust of pressurized gas from the pneumatically loaded side of the piston facilitates an extremely rapid piston stroke. A flexible selector diaphragm opens and closes an exhaust port in response to pressure differentials created by energizing and de-energizing a solenoid which controls the pneumatic input to the actuator as well as selectively providing a venting action to one side of the selector diaphragm.

  16. Encased cantilevers for low-noise force and mass sensing in liquids

    NARCIS (Netherlands)

    Ziegler, D.; Klaassen, A.; Bahri, D.; Chmielewski, D.; Nievergelt, A.; Mugele, F.; Sader, J.; Ashby, P.D.

    2014-01-01

    Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement an

  17. Cantilever-based bio-chemical sensor integrated in a microliquid handling system

    DEFF Research Database (Denmark)

    Thaysen, Jacob; Marie, Rodolphe; Boisen, Anja

    2001-01-01

    The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication b...

  18. Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

    NARCIS (Netherlands)

    Abdulla, S.M.C.; Kauppinen, L.J.; Dijkstra, M.; Boer, de M.J.; Berenschot, E.; Jansen, H.V.; Ridder, de R.M.; Krijnen, G.J.M.

    2011-01-01

    The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachinin

  19. Switching through intermediate states seen in a single nickel nanorod by cantilever magnetometry.

    Science.gov (United States)

    Lee, Sanggap; Moore, Eric W; Hickman, Steven A; Longenecker, Jonilyn G; Marohn, John A

    2012-04-15

    In-plane to out-of-plane magnetization switching in a single nickel nanorod affixed to an attonewton-sensitivity cantilever was studied at cryogenic temperatures. We observe multiple sharp, simultaneous transitions in cantilever frequency, dissipation, and frequency jitter associated with magnetic switching through distinct intermediate states. These findings suggest a new route for detecting magnetic fields at the nanoscale.

  20. Encased cantilevers for low-noise force and mass sensing in liquids

    NARCIS (Netherlands)

    Ziegler, D.; Klaassen, A.; Bahri, D.; Chmielewski, D.; Nievergelt, A.; Mugele, Friedrich Gunther; Sader, J.; Ashby, P.D.

    2014-01-01

    Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement an

  1. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    DEFF Research Database (Denmark)

    Nordström, M.; Calleja, M.; Hübner, Jörg;

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever wave...

  2. Cantilever-based sensor with integrated optical read-out using single mode waveguides

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat;

    2007-01-01

    This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its ...

  3. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    Science.gov (United States)

    von Schmidsfeld, A.; Reichling, M.

    2015-09-01

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavity via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.

  4. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    Energy Technology Data Exchange (ETDEWEB)

    Schmidsfeld, A. von, E-mail: avonschm@uos.de; Reichling, M., E-mail: reichling@uos.de [Fachbereich Physik, Universität Osnabrück, Barbarastraße 7, 49076 Osnabrück (Germany)

    2015-09-21

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavity via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.

  5. Effect of tip mass on frequency response and sensitivity of AFM cantilever in liquid.

    Science.gov (United States)

    Farokh Payam, Amir; Fathipour, Morteza

    2015-03-01

    The effect of tip mass on the frequency response and sensitivity of atomic force microscope (AFM) cantilever in the liquid environment is investigated. For this purpose, using Euler-Bernoulli beam theory and considering tip mass and hydrodynamic functions in a liquid environment, an expression for the resonance frequencies of AFM cantilever in liquid is derived. Then, based on this expression, the effect of the surface contact stiffness on the flexural mode of a rectangular AFM cantilever in fluid is investigated and compared with the case where the AFM cantilever operates in the air. The results show that in contrast with an air environment, the tip mass has no significant impact on the resonance frequency and sensitivity of the AFM cantilever in the liquid. Hence, analysis of AFM behaviour in liquid environment by neglecting the tip mass is logical.

  6. The importance of cantilever dynamics in the interpretation of Kelvin probe force microscopy.

    Science.gov (United States)

    Satzinger, Kevin J; Brown, Keith A; Westervelt, Robert M

    2012-09-15

    A realistic interpretation of the measured contact potential difference (CPD) in Kelvin probe force microscopy (KPFM) is crucial in order to extract meaningful information about the sample. Central to this interpretation is a method to include contributions from the macroscopic cantilever arm, as well as the cone and sharp tip of a KPFM probe. Here, three models of the electrostatic interaction between a KPFM probe and a sample are tested through an electrostatic simulation and compared with experiment. In contrast with previous studies that treat the KPFM cantilever as a rigid object, we allow the cantilever to bend and rotate; accounting for cantilever bending provides the closest agreement between theory and experiment. We demonstrate that cantilever dynamics play a major role in CPD measurements and provide a simulation technique to explore this phenomenon.

  7. APPROXIMATE SOLUTIONS FOR TRANSIENT RESPONSE OF CONSTRAINED DAMPING LAMINATED CANTILEVER PLATE

    Institute of Scientific and Technical Information of China (English)

    Liuwei Mao; Anwen Wang; Mingyong Hu

    2010-01-01

    The series composed by beam mode function is used to approximate the displacement function of constrained damping of laminated cantilever plates,and the transverse deformation of the plate on which a concentrated force is acted is calculated using the principle of virtual work.By solving Lagrange's equation,the frequencies and model loss factors of free vibration of the plate are obtained,then the transient response of constrained damping of laminated cantilever plate is obtained,when the concentrated force is withdrawn suddenly.The theoretical calculations are compared with the experimental data,the results show:both the frequencies and the response time of theoretical calculation and its variational law with the parameters of the damping layer are identical with experimental results.Also,the response time of steel cantilever plate,unconstrained damping cantilever plate and constrained damping cantilever plate are brought into comparison,which shows that the constrained damping structure can effectively suppress the vibration.

  8. Study of node and mass sensitivity of resonant mode based cantilevers with concentrated mass loading

    Science.gov (United States)

    Zhang, Kewei; Chai, Yuesheng; Fu, Jiahui

    2015-12-01

    Resonant-mode based cantilevers are an important type of acoustic wave based mass-sensing devices. In this work, the governing vibration equation of a bi-layer resonant-mode based cantilever attached with concentrated mass is established by using a modal analysis method. The effects of resonance modes and mass loading conditions on nodes and mass sensitivity of the cantilever were theoretically studied. The results suggested that the node did not shift when concentrated mass was loaded on a specific position. Mass sensitivity of the cantilever was linearly proportional to the square of the point displacement at the mass loading position for all the resonance modes. For the first resonance mode, when mass loading position xc satisfied 0 xc xc ≤ l. Mass sensitivity did not change when concentrated mass was loaded at the rigid end. This work can provide scientific guidance to optimize the mass sensitivity of a resonant-mode based cantilever.

  9. Note: A novel rotary actuator driven by only one piezoelectric actuator.

    Science.gov (United States)

    Huang, Hu; Fu, Lu; Zhao, Hongwei; Shi, Chengli; Ren, Luquan; Li, Jianping; Qu, Han

    2013-09-01

    This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20,097 μrad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 μrad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.

  10. Optimising Performance of a Cantilever-type Micro Accelerometer Sensor

    Directory of Open Access Journals (Sweden)

    B.P. Joshi

    2007-05-01

    Full Text Available A technique for optimising performance of cantilever-type micro acceleration sensor hasbeen developed. Performance of a sensor is judged mainly by its sensitivity and bandwidth.Maximising product of these two important parameters of inertial sensors helps to optimise thesensor performance. It is observed that placement of a lumped mass (add-mass on the sensor'sproof-mass helps to control both sensitivity and the first resonant frequency of the cantileverstructure to the designer's choice. Simulation and modelling of various dimensions of rectangularstructures for acceleration sensor with this novel add-mass technique are discussed. CoventorwareMEMSCAD has been used to model, simulate, and carry out FEM analysis. A simple analyticalmodel is discussed to elaborate the mechanics of cantilever-type micro accelerometer. Thecomparison of the results obtained from analytical model and the finite element simulations revealthese to be in good agreement. The advantages of this technique for choosing the two mostimportant sensor parameters (i.e., sensitivity and bandwidth of an inertial sensor are brought out.

  11. Stress topology within silicon single-crystal cantilever beam

    Directory of Open Access Journals (Sweden)

    Alexander P. Kuzmenko

    2015-06-01

    Full Text Available Flexural elastic deformations of single-crystal silicon have been studied using microspectral Raman scattering. Results are reported on nano-scaled sign-changing shifts of the main peak of the microspectral Raman scattering within the single-crystal silicon cantilever beam during exposure to flexural stress. The maximum value of Raman shift characteristic of the 518 cm−1 silicon peak at which elasticity still remains has been found to be 8 cm−1 which corresponds to an applied deformation of 4 GPa. We report three-dimensional maps of the distribution of internal stresses at different levels of deformation up to irreversible changes and brittle fracture of the samples that clearly show compression and tension areas and an undeformed area. A qualitative explanation of the increase in the strength of the cantilever beam due to its small thickness (2 μm has been provided that agrees with the predictions of real-world physical parameters obtained in SolidWorks software environment with the SimulationXpress module. We have defined the relative strain of the beam surface which was 2% and received a confirmation of changes in the silicon lattice parameter from 0.54307 nm to 0.53195 nm by the BFGS algorithm.

  12. Analytical solutions of the electrostatically actuated curled beam problem

    KAUST Repository

    Younis, Mohammad I.

    2014-07-24

    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximation. In such cases, multi-mode reduced order models are shown to yield accurate results. © 2014 Springer-Verlag Berlin Heidelberg.

  13. Methods For The Minimization Of Actuation Voltage In MEMS Switch

    Directory of Open Access Journals (Sweden)

    Jaspreet M. Hora,

    2014-03-01

    Full Text Available MEMS (Micro-Electro-Mechanical Systems is the Combination of mechanical functions such as sensing, moving, heating and electrical functions such as switching on the same chip using micro fabrication technology. The term MEMS refers to a collection of microsensors and actuators which can sense its environment and have the ability to react to changes in that environment with the use of a microcircuit control. These micros witches have two major design groups: capacitive (Metal-Insulator-Metal and resistive (Metal-To-Metal. In the capacitive design of a microswitch it refers the RF signal is shorted to ground by a variable capacitor. In the Resistive design switch operates by creating an open or short in the transmission line. This paper reviews the progress in MEMS applications from a device perspective. It includes the designing of cantilever switch and will tell about the important device parameters that are highlighted, as they have significant contributions to the performance of the final products in which the devices are used. The challenges and statuses of these MEMS devices are discussed

  14. Real Time Digital Control of a Magnetostrictive Actuator

    Science.gov (United States)

    Zrostlik, Rick L.; Hall, David L.; Flatau, Alison B.

    1996-01-01

    The use of the magnetostrictive material Terfenol-D as a motion source in active vibration control (AVC) systems are being studied. Currently it is of limited use due to the nonlinear nature of the strain versus magnetization curve and the magnetic hysteresis in the Terfenol-D. One manifestation of these nonlinearities is waveform distortion in the output velocity of the transducer. For Terfenol-D to be used in ever greater numbers of AVC systems, these nonlinearities must be addressed. In this study the nonlinearities are treated as disturbances to a linear system. The acceleration output is used in simple analog and digital feedback control schemes to improve linearity of the transducer. In addition, the use of a Terfenol-D actuator in an AVC system is verified. Both analog and digital controllers are implemented and results compared. A cantilever beam system is considered for AVC applications. The second thrust of this presentation is the reduction of harmonic distortions. Two conclusions can be reached from this work. One, the linearization of Terfenol-D transducers is possible with the use of feedback controllers, both digital and analog. Second, Terfenol-D is a viable motion source in active vibration control systems utilizing either analog or digital controllers.

  15. Real Time Digital Control of a Magnetostrictive Actuator

    Science.gov (United States)

    Zrostlik, Rick L.; Hall, David L.; Flatau, Alison B.

    1996-01-01

    The use of the magnetostrictive material Terfenol-D as a motion source in active vibration control (AVC) systems are being studied. Currently it is of limited use due to the nonlinear nature of the strain versus magnetization curve and the magnetic hysteresis in the Terfenol-D. One manifestation of these nonlinearities is waveform distortion in the output velocity of the transducer. For Terfenol-D to be used in ever greater numbers of AVC systems, these nonlinearities must be addressed. In this study the nonlinearities are treated as disturbances to a linear system. The acceleration output is used in simple analog and digital feedback control schemes to improve linearity of the transducer. In addition, the use of a Terfenol-D actuator in an AVC system is verified. Both analog and digital controllers are implemented and results compared. A cantilever beam system is considered for AVC applications. The second thrust of this presentation is the reduction of harmonic distortions. Two conclusions can be reached from this work. One, the linearization of Terfenol-D transducers is possible with the use of feedback controllers, both digital and analog. Second, Terfenol-D is a viable motion source in active vibration control systems utilizing either analog or digital controllers.

  16. Analysis of the sweeped actuator line method

    Directory of Open Access Journals (Sweden)

    Nathan Jörn

    2015-01-01

    Full Text Available The actuator line method made it possible to describe the near wake of a wind turbine more accurately than with the actuator disk method. Whereas the actuator line generates the helicoidal vortex system shed from the tip blades, the actuator disk method sheds a vortex sheet from the edge of the rotor plane. But with the actuator line come also temporal and spatial constraints, such as the need for a much smaller time step than with actuator disk. While the latter one only has to obey the Courant-Friedrichs-Lewy condition, the former one is also restricted by the grid resolution and the rotor tip-speed. Additionally the spatial resolution has to be finer for the actuator line than with the actuator disk, for well resolving the tip vortices. Therefore this work is dedicated to examining a method in between of actuator line and actuator disk, which is able to model the transient behaviour, such as the rotating blades, but which also relaxes the temporal constraint. Therefore a larger time-step is used and the blade forces are swept over a certain area. The main focus of this article is on the aspect of the blade tip vortex generation in comparison with the standard actuator line and actuator disk.

  17. Design of a piezoelectric rotation actuator

    NARCIS (Netherlands)

    Holterman, J.; de Vries, Theodorus J.A.; Babakhani, B.; Brouwer, Dannis Michel

    2012-01-01

    In order to facilitate active damping within a linear motion system, a self-sensing piezoelectric rotation actuator has been designed. The rotation actuator consists of two piezoelectric stacks that function as linear actuators, embedded in a mechanical interface with several elastic elements, thus

  18. Carbon nanotube-polymer composite actuators

    Science.gov (United States)

    Gennett, Thomas; Raffaelle, Ryne P.; Landi, Brian J.; Heben, Michael J.

    2008-04-22

    The present invention discloses a carbon nanotube (SWNT)-polymer composite actuator and method to make such actuator. A series of uniform composites was prepared by dispersing purified single wall nanotubes with varying weight percents into a polymer matrix, followed by solution casting. The resulting nanotube-polymer composite was then successfully used to form a nanotube polymer actuator.

  19. Experimental identification of piezo actuator characteristic

    Directory of Open Access Journals (Sweden)

    Ľ. Miková

    2015-01-01

    Full Text Available This paper deals with piezoelectric material, which can be used as actuator for conversion of electrical energy to mechanical work. Test equipment has been developed for experimental testing of the piezoactuators. Piezoactivity of this actuator has non-linear characteristic. This type of actuator is used for in-pipe mechanism design.

  20. Micromechanical PDGF recognition via lab-on-a-disc aptasensor arrays

    DEFF Research Database (Denmark)

    Bosco, F.G.; Bache, Michael; Yang, J.;

    2013-01-01

    A plug-and-play CD-like platform is used to perform a statistical detection of platelet derived growth factor (PDGF) proteins through aptamer-based surface functionalization of multiple microcantilever arrays. When PDGF proteins bind to aptamer coatings, the cantilevers deflect. The deflection...

  1. Multilayer Piezoelectric Stack Actuator Characterization

    Science.gov (United States)

    Sherrit, Stewart; Jones, Christopher M.; Aldrich, Jack B.; Blodget, Chad; Bao, Xioaqi; Badescu, Mircea; Bar-Cohen, Yoseph

    2008-01-01

    Future NASA missions are increasingly seeking to use actuators for precision positioning to accuracies of the order of fractions of a nanometer. For this purpose, multilayer piezoelectric stacks are being considered as actuators for driving these precision mechanisms. In this study, sets of commercial PZT stacks were tested in various AC and DC conditions at both nominal and extreme temperatures and voltages. AC signal testing included impedance, capacitance and dielectric loss factor of each actuator as a function of the small-signal driving sinusoidal frequency, and the ambient temperature. DC signal testing includes leakage current and displacement as a function of the applied DC voltage. The applied DC voltage was increased to over eight times the manufacturers' specifications to investigate the correlation between leakage current and breakdown voltage. Resonance characterization as a function of temperature was done over a temperature range of -180C to +200C which generally exceeded the manufacturers' specifications. In order to study the lifetime performance of these stacks, five actuators from one manufacturer were driven by a 60volt, 2 kHz sine-wave for ten billion cycles. The tests were performed using a Lab-View controlled automated data acquisition system that monitored the waveform of the stack electrical current and voltage. The measurements included the displacement, impedance, capacitance and leakage current and the analysis of the experimental results will be presented.

  2. SMA actuators for morphing wings

    Science.gov (United States)

    Brailovski, V.; Terriault, P.; Georges, T.; Coutu, D.

    An experimental morphing laminar wing was developed to prove the feasibility of aircraft fuel consumption reduction through enhancement of the laminar flow regime over the wing extrados. The morphing wing prototype designed for subsonic cruise flight conditions (Mach 0.2 … 0.3; angle of attack - 1 … +2∘), combines three principal subsystems: (1) flexible extrados, (2) rigid intrados and (3) an actuator group located inside the wing box. The morphing capability of the wing relies on controlled deformation of the wing extrados under the action of shape memory alloys (SMA) actuators. A coupled fluid-structure model of the morphing wing was used to evaluate its mechanical and aerodynamic performances in different flight conditions. A 0.5 m chord and 1 m span prototype of the morphing wing was tested in a subsonic wind tunnel. In this work, SMA actuators for morphing wings were modeled using a coupled thermo-mechanical finite element model and they were windtunnel validated. If the thermo-mechanical model of SMA actuators presented in this work is coupled with the previously developed structureaerodynamic model of the morphing wing, it could serve for the optimization of the entire morphing wing system.

  3. Explosive micro-bubble actuator

    NARCIS (Netherlands)

    Broek, van den Dennis Micha

    2008-01-01

    Microactuators are key components in numerous microsystems, and in many applications strong and fast microactuators are required. The principles used to generate forces in the current actuators are not capable of fulfilling both requirements at the same time, so new principles have to be investigate

  4. Compliant actuation of rehabilitation robots

    NARCIS (Netherlands)

    Vallery, Heike; Veneman, Jan; Asseldonk, van Edwin; Ekkelenkamp, Ralf; Buss, Martin; Kooij, van der Herman

    2008-01-01

    This article discusses the pros and cons of compliant actuation for rehabilitation robots on the example of LOPES, focusing on the cons. After illustrating the bandwidth limitations, a new result has been derived: if stability in terms of passivity of the haptic device is desired, the renderable sti

  5. Piezoelectric multilayer actuator life test.

    Science.gov (United States)

    Sherrit, Stewart; Bao, Xiaoqi; Jones, Christopher M; Aldrich, Jack B; Blodget, Chad J; Moore, James D; Carson, John W; Goullioud, Renaud

    2011-04-01

    Potential NASA optical missions such as the Space Interferometer Mission require actuators for precision positioning to accuracies of the order of nanometers. Commercially available multilayer piezoelectric stack actuators are being considered for driving these precision mirror positioning mechanisms. These mechanisms have potential mission operational requirements that exceed 5 years for one mission life. To test the feasibility of using these commercial actuators for these applications and to determine their reliability and the redundancy requirements, a life test study was undertaken. The nominal actuator requirements for the most critical actuators on the Space Interferometry Mission (SIM) in terms of number of cycles was estimated from the Modulation Optics Mechanism (MOM) and Pathlength control Optics Mechanism (POM) and these requirements were used to define the study. At a nominal drive frequency of 250 Hz, one mission life is calculated to be 40 billion cycles. In this study, a set of commercial PZT stacks configured in a potential flight actuator configuration (pre-stressed to 18 MPa and bonded in flexures) were tested for up to 100 billion cycles. Each test flexure allowed for two sets of primary and redundant stacks to be mechanically connected in series. The tests were controlled using an automated software control and data acquisition system that set up the test parameters and monitored the waveform of the stack electrical current and voltage. The samples were driven between 0 and 20 V at 2000 Hz to accelerate the life test and mimic the voltage amplitude that is expected to be applied to the stacks during operation. During the life test, 10 primary stacks were driven and 10 redundant stacks, mechanically in series with the driven stacks, were open-circuited. The stroke determined from a strain gauge, the temperature and humidity in the chamber, and the temperature of each individual stack were recorded. Other properties of the stacks, including the

  6. Fabrication of a self-sensing electroactive polymer bimorph actuator based on polyvinylidene fluoride and its electrostrictive terpolymer

    Science.gov (United States)

    Engel, Leeya; Van Volkinburg, Kyle R.; Ben-David, Moti; Washington, Gregory N.; Krylov, Slava; Shacham-Diamand, Yosi

    2016-04-01

    In this paper, we report on the fabrication of a self-sensing electroactive polymer cantilevered bimorph beam actuator and its frequency response. Tip deflections of the beam, induced by applying an AC signal across ferroelectric relaxor polyvinylidene fluoride-trifluoroethylene chlorotrifluoroethylene (P(VDF-TrFE-CTFE)), reached a magnitude of 350μm under a field of ~55MV/m and were recorded externally using a laser Doppler vibrometer (LDV). Deflections were determined simultaneously by applying a sensing model to the voltage measured across the bimorph's integrated layer of piezoelectric polymer polyvinylidene fluoride (PVDF). The sensing model treats the structure as a simple Euler- Bernoulli cantilevered beam with two distributed active elements represented through the use of generalized functions and offers a method through which real time tip deflection can be measured without the need for external visualization. When not being used as a sensing element, the PVDF layer can provide an additional means for actuation of the beam via the converse piezoelectric effect, resulting in bidirectional control of the beam's deflections. Integration of flexible sensing elements together with modeling of the electroactive polymer beam can benefit the developing field of polymer microactuators which have applications in soft robotics as "smart" prosthetics/implants, haptic displays, tools for less invasive surgery, and sensing.

  7. A Resistivity Gradient Piezoelectric FGM Actuator

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    A resistivity gradient actuator based on lead zirconate titanate ceramics was successfully developed and the bending deflections up to 140 μm were obtained. The actuator material was a matrix of PZT ceramic into which smooth gradient of piezoelectric activity was introduced. The application of an electric field then causes the actuator to bend due to differential strains induced by the piezoelectric effect. The resistivity gradient of the actuator was achieved by doping PZT with suitable donor and acceptor dopants. PZT powder was modified and synthesized by using two stage powder fabrication method. The actuator was fabricated by uniaxial pressing followed by isostatic pressing with two layers of different resistivities.

  8. Microprocessor controlled proof-mass actuator

    Science.gov (United States)

    Horner, Garnett C.

    1987-01-01

    The objective of the microprocessor controlled proof-mass actuator is to develop the capability to mount a small programmable device on laboratory models. This capability will allow research in the active control of flexible structures. The approach in developing the actuator will be to mount all components as a single unit. All sensors, electronic and control devices will be mounted with the actuator. The goal for the force output capability of the actuator will be one pound force. The programmable force actuator developed has approximately a one pound force capability over the usable frequency range, which is above 2 Hz.

  9. Online Structural Health Monitoring and Parameter Estimation for Vibrating Active Cantilever Beams Using Low-Priced Microcontrollers

    Directory of Open Access Journals (Sweden)

    Gergely Takács

    2015-01-01

    Full Text Available This paper presents a structural health monitoring and parameter estimation system for vibrating active cantilever beams using low-cost embedded computing hardware. The actuator input and the measured position are used in an augmented nonlinear model to observe the dynamic states and parameters of the beam by the continuous-discrete extended Kalman filter (EKF. The presence of undesirable structural change is detected by variations of the first resonance estimate computed from the observed equivalent mass, stiffness, damping, and voltage-force conversion coefficients. A fault signal is generated upon its departure from a predetermined nominal tolerance band. The algorithm is implemented using automatically generated and deployed machine code on an electronics prototyping platform, featuring an economically feasible 8-bit microcontroller unit (MCU. The validation experiments demonstrate the viability of the proposed system to detect sudden or gradual mechanical changes in real-time, while the functionality on low-cost miniaturized hardware suggests a strong potential for mass-production and structural integration. The modest computing power of the microcontroller and automated code generation designates the proposed system only for very flexible structures, with a first dominant resonant frequency under 4 Hz; however, a code-optimized version certainly allows much stiffer structures or more complicated models on the same hardware.

  10. Nanostructured Fiber Optic Cantilever Arrays and Hybrid MEMS Sensors for Chemical and Biological Detection Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Advancements in nano-/micro-scale sensor fabrication and molecular recognition surfaces offer promising opportunities to develop miniaturized hybrid fiber optic and...

  11. Dielectric elastomer actuators for facial expression

    Science.gov (United States)

    Wang, Yuzhe; Zhu, Jian

    2016-04-01

    Dielectric elastomer actuators have the advantage of mimicking the salient feature of life: movements in response to stimuli. In this paper we explore application of dielectric elastomer actuators to artificial muscles. These artificial muscles can mimic natural masseter to control jaw movements, which are key components in facial expressions especially during talking and singing activities. This paper investigates optimal design of the dielectric elastomer actuator. It is found that the actuator with embedded plastic fibers can avert electromechanical instability and can greatly improve its actuation. Two actuators are then installed in a robotic skull to drive jaw movements, mimicking the masseters in a human jaw. Experiments show that the maximum vertical displacement of the robotic jaw, driven by artificial muscles, is comparable to that of the natural human jaw during speech activities. Theoretical simulations are conducted to analyze the performance of the actuator, which is quantitatively consistent with the experimental observations.

  12. Actuation mechanisms of carbon nanotube-based architectures

    Science.gov (United States)

    Geier, Sebastian; Mahrholz, Thorsten; Wierach, Peter; Sinapius, Michael

    2016-04-01

    State of the art smart materials such as piezo ceramics or electroactive polymers cannot feature both, mechanical stiffness and high active strain. Moreover, properties like low density, high mechanical stiffness and high strain at the same time driven by low energy play an increasingly important role for their future application. Carbon nanotubes (CNT), show this behavior. Their active behavior was observed 1999 the first time using paper-like mats made of CNT. Therefore the CNT-papers are electrical charged within an electrolyte thus forming a double- layer. The measured deflection of CNT material is based on the interaction between the charged high surface area formed by carbon nanotubes and ions provided by the electrolyte. Although CNT-papers have been extensively analyzed as well at the macro-scale as nano-scale there is still no generally accepted theory for the actuation mechanism. This paper focuses on investigations of the actuation mechanisms of CNT-papers in comparison to vertically aligned CNT-arrays. One reason of divergent results found in literature might be attributed to different types of CNT samples. While CNT-papers represent architectures of short CNTs which need to bridge each other to form the dimensions of the sample, the continuous CNTs of the array feature a length of almost 3 mm, along which the experiments are carried out. Both sample types are tested within an actuated tensile test set-up under different conditions. While the CNT-papers are tested in water-based electrolytes with comparably small redox-windows the hydrophobic CNT-arrays are tested in ionic liquids with comparatively larger redox-ranges. Furthermore an in-situ micro tensile test within an SEM is carried out to prove the optimized orientation of the MWCNTs as result of external load. It was found that the performance of CNT-papers strongly depends on the test conditions. However, the CNT-arrays are almost unaffected by the conditions showing active response at negative

  13. A cartridge based sensor array platform for multiple coagulation measurements from plasma.

    Science.gov (United States)

    Cakmak, O; Ermek, E; Kilinc, N; Bulut, S; Baris, I; Kavakli, I H; Yaralioglu, G G; Urey, Hakan

    2015-01-07

    This paper proposes a MEMS-based sensor array enabling multiple clot-time tests for plasma in one disposable microfluidic cartridge. The versatile LoC (Lab-on-Chip) platform technology is demonstrated here for real-time coagulation tests (activated Partial Thromboplastin Time (aPTT) and Prothrombin Time (PT)). The system has a reader unit and a disposable cartridge. The reader has no electrical connections to the cartridge. This enables simple and low-cost cartridge designs and avoids reliability problems associated with electrical connections. The cartridge consists of microfluidic channels and MEMS microcantilevers placed in each channel. The microcantilevers are made of electroplated nickel. They are actuated remotely using an external electro-coil and the read-out is also conducted remotely using a laser. The phase difference between the cantilever oscillation and the coil drive is monitored in real time. During coagulation, the viscosity of the blood plasma increases resulting in a change in the phase read-out. The proposed assay was tested on human and control plasma samples for PT and aPTT measurements. PT and aPTT measurements from control plasma samples are comparable with the manufacturer's datasheet and the commercial reference device. The measurement system has an overall 7.28% and 6.33% CV for PT and aPTT, respectively. For further implementation, the microfluidic channels of the cartridge were functionalized for PT and aPTT tests by drying specific reagents in each channel. Since simultaneous PT and aPTT measurements are needed in order to properly evaluate the coagulation system, one of the most prominent features of the proposed assay is enabling parallel measurement of different coagulation parameters. Additionally, the design of the cartridge and the read-out system as well as the obtained reproducible results with 10 μl of the plasma samples suggest an opportunity for a possible point-of-care application.

  14. A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

    KAUST Repository

    Bouchaala, Adam M.

    2015-01-01

    We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

  15. Simple and Accurate Analytical Solutions of the Electrostatically Actuated Curled Beam Problem

    KAUST Repository

    Younis, Mohammad I.

    2014-08-17

    We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data in the literature and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximations they are based on. In such cases, multi-mode reduced order models need to be utilized.

  16. Imaging via complete cantilever dynamic detection: general dynamic mode imaging and spectroscopy in scanning probe microscopy

    Science.gov (United States)

    Somnath, Suhas; Collins, Liam; Matheson, Michael A.; Sukumar, Sreenivas R.; Kalinin, Sergei V.; Jesse, Stephen

    2016-10-01

    We develop and implement a multifrequency spectroscopy and spectroscopic imaging mode, referred to as general dynamic mode (GDM), that captures the complete spatially- and stimulus dependent information on nonlinear cantilever dynamics in scanning probe microscopy (SPM). GDM acquires the cantilever response including harmonics and mode mixing products across the entire broadband cantilever spectrum as a function of excitation frequency. GDM spectra substitute the classical measurements in SPM, e.g. amplitude and phase in lock-in detection. Here, GDM is used to investigate the response of a purely capacitively driven cantilever. We use information theory techniques to mine the data and verify the findings with governing equations and classical lock-in based approaches. We explore the dependence of the cantilever dynamics on the tip–sample distance, AC and DC driving bias. This approach can be applied to investigate the dynamic behavior of other systems within and beyond dynamic SPM. GDM is expected to be useful for separating the contribution of different physical phenomena in the cantilever response and understanding the role of cantilever dynamics in dynamic AFM techniques.

  17. Nondestructive testing and hardness measurement based on contact resonance of piezoelectric cantilevers (Conference Presentation)

    Science.gov (United States)

    Li, Faxin; Fu, Ji

    2016-04-01

    A suitable defect identification parameter is very important in the field of nondestructive testing (NDT). In this work, we proposed a NDT method which detects the sample's local contact stiffness (LCS) based on the contact resonance of a piezoelectric cantilever. Firstly, through finite element analysis we showed that LCS is quite sensitive to typical defects including debonding, voids, cracks and inclusions, making it a good identification parameter. Secondly, a homemade NDT system containing a piezoelectric unimorph cantilever was assembled to detect the sample's LCS by tracking the contact resonance frequency (CRF) of the cantilever-sample system based on strain signals. Testing results indicated that this NDT system could detect the above mentioned defects efficiently. The cantilever-stiffness dependent detection sensitivity was specially investigated and the stiffer cantilevers were found to be more sensitive to small defects. Then, a piezoelectric bimorph cantilever was fabricated and the electromechanical impedance, other than the strain signals, was measured to track the CRF of the cantilever-system. The LCS is then derived by using the equivalent-circuit model. The electromechanical impedance based NDT system is more compact and can be further developed to be a portable device. Finally, a Vicker indenter is fabricated onto the bimorph tip and the contact area is derived from the measured LCS. Thus the NDT system turns to be a hardness tester without any optical devices. It is very useful for in-situ testing or testing on inner surfaces where conventional hardness tester is not applicable.

  18. Observation of Locked Intrinsic Localized Vibrational Modes in a Micromechanical Oscillator Array

    OpenAIRE

    Sato, Masayuki; Hubbard, B. E.; Sievers, A.J.; Ilic, B.; Czaplewski, D. A.; Craighead, H. G.

    2003-01-01

    The nonlinear vibrational properties of a periodic micromechanical oscillator array have been measured. For sufficiently large amplitude of the driver, the optic mode of the di-element cantilever array becomes unstable and breaks up into excitations ranging over only a few cells. A driver-induced locking effect is observed to eternalize some of these intrinsic localized modes so that their amplitudes become fixed and the modes become spatially pinned.

  19. Observation of locked intrinsic localized vibrational modes in a micromechanical oscillator array.

    Science.gov (United States)

    Sato, M; Hubbard, B E; Sievers, A J; Ilic, B; Czaplewski, D A; Craighead, H G

    2003-01-31

    The nonlinear vibrational properties of a periodic micromechanical oscillator array have been measured. For sufficiently large amplitude of the driver, the optic mode of the di-element cantilever array becomes unstable and breaks up into excitations ranging over only a few cells. A driver-induced locking effect is observed to eternalize some of these intrinsic localized modes so that their amplitudes become fixed and the modes become spatially pinned.

  20. Investigation of Subcombination Internal Resonances in Cantilever Beams

    Directory of Open Access Journals (Sweden)

    Haider N. Arafat

    1998-01-01

    Full Text Available Activation of subcombination internal resonances in transversely excited cantilever beams is investigated. The effect of geometric and inertia nonlinearities, which are cubic in the governing equation of motion, is considered. The method of time-averaged Lagrangian and virtual work is used to determine six nonlinear ordinary-differential equations governing the amplitudes and phases of the three interacting modes. Frequency- and force-response curves are generated for the case ω ≈ ω4 ≈ 1/2(ω2 + ω5. There are two possible responses: single-mode and three-mode responses. The single-mode periodic response is found to undergo supercritical and subcritical pitchfork bifurcations, which result in three-mode interactions. In the case of three-mode responses, there are conditions where the low-frequency mode dominates the response, resulting in high-amplitude quasiperiodic oscillations.

  1. Strategy Guideline: Quality Management in Existing Homes; Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J.; Sikora, J.; Wiehagen, J.; Wood, A.

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented. The goal of existing home high performing remodeling quality management systems (HPR-QMS) is to establish practices and processes that can be used throughout any remodeling project. The research presented in this document provides a comparison of a selected retrofit activity as typically done versus that same retrofit activity approached from an integrated high performance remodeling and quality management perspective. It highlights some key quality management tools and approaches that can be adopted incrementally by a high performance remodeler for this or any high performance retrofit. This example is intended as a template and establishes a methodology that can be used to develop a portfolio of high performance remodeling strategies.

  2. Interdisciplinary cantilever physics: Elasticity of carrot, celery, and plasticware

    Science.gov (United States)

    Pestka, Kenneth A.

    2014-05-01

    This article presents several simple cantilever-based experiments using common household items (celery, carrot, and a plastic spoon) that are appropriate for introductory undergraduate laboratories or independent student projects. By applying Hooke's law and Euler beam theory, students are able to determine Young's modulus, fracture stress, yield stress, strain energy, and sound speed of these apparently disparate materials. In addition, a cellular foam elastic model is introduced—applicable to biologic materials as well as an essential component in the development of advanced engineering composites—that provides a mechanism to determine Young's modulus of the cell wall material found in celery and carrot. These experiments are designed to promote exploration of the similarities and differences between common inorganic and organic materials, fill a void in the typical undergraduate curriculum, and provide a foundation for more advanced material science pursuits within biology, botany, and food science as well as physics and engineering.

  3. Atomic resolution in noncontact AFM by probing cantilever frequency shifts

    Institute of Scientific and Technical Information of China (English)

    Hong Yong Xie

    2007-01-01

    Rutile TiO2(001) quantum dots (or nano-marks) in different shapes were used to imitate uncleaved material surfaces or materials with rough surfaces. By numerical integration of the equation of motion of cantilever for silicon tip scanning along the [110] direction over the rutile TiO2 (001) quantum dots in ultra high vacuum (UHV), scanning routes were explored to achieve atomic resolution from frequency shift image. The tip-surface interaction forces were calculated from Lennard-Jones (12-6) potential by the Hamaker summation method. The calculated results showed that atomic resolution could be achieved by frequency shift image for TiO2 (001) surfaces of rhombohedral quantum dot scanning in a vertical route, and spherical cap quantum dot scanning in a superposition route.

  4. Asymptotic analysis of a vibrating cantilever with a nonlinear boundary

    Institute of Scientific and Technical Information of China (English)

    C.; W.; LIM

    2009-01-01

    Nonlinear vibration of a cantilever in a contact atomic force microscope is analyzed via an asymptotic approach. The asymptotic solution is sought for a beam equation with a nonlinear boundary condition. The steady-state responses are determined in primary resonance and subharmonic resonance. The relations between the response amplitudes and the excitation frequencies and amplitudes are derived from the solvability condition. Multivaluedness occurs in the relations as a consequence of the nonlinearity. The stability of steady-state responses is analyzed by use of the Lyapunov linearized stability theory. The stability analysis predicts the jumping phenomenon for certain parameters. The curves of the response amplitudes changing with the excitation frequencies are numerically compared with those obtained via the method of multiple scales. The calculation results demonstrate that the two methods predict the same varying tendencies while there are small quantitative differences.

  5. Asymptotic analysis of a vibrating cantilever with a nonlinear boundary

    Institute of Scientific and Technical Information of China (English)

    CHEN LiQun; C.W.LIM; HU QingQuan; DING Hu

    2009-01-01

    Nonlinear vibration of a cantilever in a contact atomic force microscope is analyzed via an asymptotic approach.The asymptotic solution is sought for a beam equation with a nonlinear boundary condition.The steady-state responses are determined in primary resonance and subharmonic resonance.The relations between the response amplitudes and the excitation frequencies and amplitudes are derived from the solvability condition.Multivaluedness occurs in the relations as a consequence of the nonlinearity.The stability of steady-state responses is analyzed by use of the Lyapunov linearized sta-bility theory.The stability analysis predicts the jumping phenomenon for certain parameters.The curves of the response amplitudes changing with the excitation frequencies are numerically compared with those obtained via the method of multiple scales.The calculation results demonstrate that the two methods predict the same varying tendencies while there are small quantitative differences.

  6. Asymptotic analysis of a vibrating cantilever with a nonlinear boundary

    Science.gov (United States)

    Chen, Liqun; Lim, C. W.; Hu, Qingquan; Ding, Hu

    2009-09-01

    Nonlinear vibration of a cantilever in a contact atomic force microscope is analyzed via an asymptotic approach. The asymptotic solution is sought for a beam equation with a nonlinear boundary condition. The steady-state responses are determined in primary resonance and subharmonic resonance. The relations between the response amplitudes and the excitation frequencies and amplitudes are derived from the solvability condition. Multivaluedness occurs in the relations as a consequence of the nonlinearity. The stability of steady-state responses is analyzed by use of the Lyapunov linearized stability theory. The stability analysis predicts the jumping phenomenon for certain parameters. The curves of the response amplitudes changing with the excitation frequencies are numerically compared with those obtained via the method of multiple scales. The calculation results demonstrate that the two methods predict the same varying tendencies while there are small quantitative differences.

  7. High-performance micromachined gyroscope with a slanted suspension cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi, E-mail: Dingbangxiao@yahoo.com.c [Microsystem Laboratory, National University of Defense Technology, Changsha 410073 (China)

    2009-04-15

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of +-100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.

  8. High-performance micromachined gyroscope with a slanted suspension cantilever

    Institute of Scientific and Technical Information of China (English)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi

    2009-01-01

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h.

  9. Modeling and experimental vibration analysis of nanomechanical cantilever active probes

    Science.gov (United States)

    Salehi-Khojin, Amin; Bashash, Saeid; Jalili, Nader

    2008-08-01

    Nanomechanical cantilever (NMC) active probes have recently received increased attention in a variety of nanoscale sensing and measurement applications. Current modeling practices call for a uniform cantilever beam without considering the intentional jump discontinuities associated with the piezoelectric layer attachment and the NMC cross-sectional step. This paper presents a comprehensive modeling framework for modal characterization and dynamic response analysis of NMC active probes with geometrical discontinuities. The entire length of the NMC is divided into three segments of uniform beams followed by applying appropriate continuity conditions. The characteristics matrix equation is then used to solve for system natural frequencies and mode shapes. Using an equivalent electromechanical moment of a piezoelectric layer, forced motion analysis of the system is carried out. An experimental setup consisting of a commercial NMC active probe from Veeco and a state-of-the-art microsystem analyzer, the MSA-400 from Polytec, is developed to verify the theoretical developments proposed here. Using a parameter estimation technique based on minimizing the modeling error, optimal values of system parameters are identified. Mode shapes and the modal frequency response of the system for the first three modes determined from the proposed model are compared with those obtained from the experiment and commonly used theory for uniform beams. Results indicate that the uniform beam model fails to accurately predict the actual system response, especially in multiple-mode operation, while the proposed discontinuous beam model demonstrates good agreement with the experimental data. Such detailed and accurate modeling framework can lead to significant enhancement in the sensitivity of piezoelectric-based NMC sensors for use in variety of sensing and imaging applications.

  10. Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator

    Science.gov (United States)

    Dausch, David E.; Goodwin, Scott H.; Exarhos, Gregory J.

    2003-09-01

    An electrostatic MEMS actuator known as the "Artificial Eyelid" can be used as a micromechanical chopper for IR detectors. The actuator structure consists of a curled polymer/metal film stack which is microfabricated and released from an IR transparent substrate. The film stack is uncurled by applying an electric field between the curled film and the transparent fixed electrode on the substrate. These flexible film actuators can act as IR choppers, providing transmission of radiation to the sensor elements when open (curled) and reflection when closed (uncurled). Arrays of actuators were fabricated on ITO-coated glass substrates and ranged in size from 4 x 4 mm to 7.5 x 15 mm with individual elements ranging from 250 to 500 μm on a side. Actuation for devices with average radius of curvature of 120 μ was consistently achieved at 150-170 V operation with 98-100% of the elements functioning and long lifetimes. IR chopper characteristics were measured using a blackbody source and pyroelectric detector by applying sine and square wave voltage to the actuators at a frequency of 30 Hz. The capability of the artificial eyelid for chopping near- and mid-IR radiation, including future fabrication of devices using NiCo2O4 or NiRh2O4 films for IR transparent electrodes, will be discussed.

  11. Analysis of hybrid electric/thermofluidic inputs for wet shape memory alloy actuators

    Science.gov (United States)

    Flemming, Leslie; Mascaro, Stephen

    2013-01-01

    A wet shape memory alloy (SMA) actuator is characterized by an SMA wire embedded within a compliant fluid-filled tube. Heating and cooling of the SMA wire produces a linear contraction and extension of the wire. Thermal energy can be transferred to and from the wire using combinations of resistive heating and free/forced convection. This paper analyzes the speed and efficiency of a simulated wet SMA actuator using a variety of control strategies involving different combinations of electrical and thermofluidic inputs. A computational fluid dynamics (CFD) model is used in conjunction with a temperature-strain model of the SMA wire to simulate the thermal response of the wire and compute strains, contraction/extension times and efficiency. The simulations produce cycle rates of up to 5 Hz for electrical heating and fluidic cooling, and up to 2 Hz for fluidic heating and cooling. The simulated results demonstrate efficiencies up to 0.5% for electric heating and up to 0.2% for fluidic heating. Using both electric and fluidic inputs concurrently improves the speed and efficiency of the actuator and allows for the actuator to remain contracted without continually delivering energy to the actuator, because of the thermal capacitance of the hot fluid. The characterized speeds and efficiencies are key requirements for implementing broader research efforts involving the intelligent control of electric and thermofluidic networks to optimize the speed and efficiency of wet actuator arrays.

  12. Construction of a Piezoresistive Neural Sensor Array

    Science.gov (United States)

    Carlson, W. B.; Schulze, W. A.; Pilgrim, P. M.

    1996-01-01

    The construction of a piezoresistive - piezoelectric sensor (or actuator) array is proposed using 'neural' connectivity for signal recognition and possible actuation functions. A closer integration of the sensor and decision functions is necessary in order to achieve intrinsic identification within the sensor. A neural sensor is the next logical step in development of truly 'intelligent' arrays. This proposal will integrate 1-3 polymer piezoresistors and MLC electroceramic devices for applications involving acoustic identification. The 'intelligent' piezoresistor -piezoelectric system incorporates printed resistors, composite resistors, and a feedback for the resetting of resistances. A model of a design is proposed in order to simulate electromechanical resistor interactions. The goal of optimizing a sensor geometry for improving device reliability, training, & signal identification capabilities is the goal of this work. At present, studies predict performance of a 'smart' device with a significant control of 'effective' compliance over a narrow pressure range due to a piezoresistor percolation threshold. An interesting possibility may be to use an array of control elements to shift the threshold function in order to change the level of resistance in a neural sensor array for identification, or, actuation applications. The proposed design employs elements of: (1) conductor loaded polymers for a 'fast' RC time constant response; and (2) multilayer ceramics for actuation or sensing and shifting of resistance in the polymer. Other material possibilities also exist using magnetoresistive layered systems for shifting the resistance. It is proposed to use a neural net configuration to test and to help study the possible changes required in the materials design of these devices. Numerical design models utilize electromechanical elements, in conjunction with structural elements in order to simulate piezoresistively controlled actuators and changes in resistance of sensors

  13. Strong electromechanical coupling of an atomic force microscope cantilever to a quantum dot.

    Science.gov (United States)

    Bennett, Steven D; Cockins, Lynda; Miyahara, Yoichi; Grütter, Peter; Clerk, Aashish A

    2010-01-08

    We present theoretical and experimental results on the mechanical damping of an atomic force microscope cantilever strongly coupled to a self-assembled InAs quantum dot. When the cantilever oscillation amplitude is large, its motion dominates the charge dynamics of the dot which in turn leads to nonlinear, amplitude-dependent damping of the cantilever. We observe highly asymmetric line shapes of Coulomb blockade peaks in the damping that reflect the degeneracy of energy levels on the dot. Furthermore, we predict that excited state spectroscopy is possible by studying the damping versus oscillation amplitude, in analogy with varying the amplitude of an ac gate voltage.

  14. Static deflection analysis of non prismatic multilayer p-NEMS cantilevers under electrical load

    Energy Technology Data Exchange (ETDEWEB)

    Pavithra, M., E-mail: pavithramasi78@gmail.com [PhD Research Scholar, Department of Electronics and Instrumentation, Bharathiar University, Coimbatore-46 (India); Muruganand, S. [Assistant professor, Department of Electronics and Instrumentation, Bharathiar University, Coimbatore-46 (India)

    2016-04-13

    Deflection of Euler-Bernoulli non prismatic multilayer piezoelectric nano electromechanical (p-NEMS) cantilever beams have been studied theoretically for various profiles of p-NEMS cantilevers by applying the electrical load. This problem has been answered by applying the boundary conditions derived by simple polynomials. This method is applied for various profiles like rectangular and trapezoidal by varying the thickness of the piezoelectric layer as well as the material. The obtained results provide the better deflection for trapezoidal profile with ZnO piezo electric layer of suitable nano cantilevers for nano scale applications.

  15. Novel printing process for the fabrication of cantilever structures by the partially controlled sintering of ink

    Science.gov (United States)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

    2017-01-01

    We present a novel process for manufacturing cantilever structures by the additive stacking of ink layers. The three-dimensional transfer of printed mechanical parts was achieved by optimizing the ink-sintering conditions to guarantee the structural integrity of the printed parts and provide adequate differences in adhesion strengths between the receiver and donor interfaces. A metal–insulator–metal cantilever structure with a bottom electrode, air insulator, and cantilevered top electrode was fabricated on a flexible film, forming a successful capacitive bending sensor for use on human bodies. This process allows highly efficient device fabrication in the MEMS field.

  16. Super-resolution optical microscopy based on scannable cantilever-combined microsphere.

    Science.gov (United States)

    Wang, Shuying; Zhang, Dongxian; Zhang, Haijun; Han, Xu; Xu, Rui

    2015-12-01

    We report an ingenious method of super-resolution optical microscopy utilizing scannable cantilever-combined microsphere. By scanning the microsphere over the sample surface in a cantilever-combined microsphere-sample contact state, super-resolution images can be acquired at arbitrary sample regions through near-field information collection by the microsphere. In addition, such a state can effectively reduce the possibility of breaking the cantilever and damaging the microsphere or sample surface. This work has developed a new method and technique of sub-diffraction-limit optical microscopy, and can be practically applied in various fields of micro/nanoscopy.

  17. Spatial spectrograms of vibrating atomic force microscopy cantilevers coupled to sample surfaces

    Energy Technology Data Exchange (ETDEWEB)

    Wagner, Ryan; Raman, Arvind, E-mail: raman@purdue.edu [Birck Nanotechnology Center, 1205 W. State Street, Purdue University, West Lafayette, Indiana 47907 (United States); Proksch, Roger, E-mail: Roger.Proksch@oxinst.com [Asylum Research, 6310 Hollister Ave., Santa Barbara, California 93117 (United States)

    2013-12-23

    Many advanced dynamic Atomic Force Microscopy (AFM) techniques such as contact resonance, force modulation, piezoresponse force microscopy, electrochemical strain microscopy, and AFM infrared spectroscopy exploit the dynamic response of a cantilever in contact with a sample to extract local material properties. Achieving quantitative results in these techniques usually requires the assumption of a certain shape of cantilever vibration. We present a technique that allows in-situ measurements of the vibrational shape of AFM cantilevers coupled to surfaces. This technique opens up unique approaches to nanoscale material property mapping, which are not possible with single point measurements alone.

  18. Atomic force microscopy: Loading position dependence of cantilever spring constants and detector sensitivity

    Science.gov (United States)

    Vakarelski, Ivan U.; Edwards, Scott A.; Dagastine, Raymond R.; Chan, Derek Y. C.; Stevens, Geoffrey W.; Grieser, Franz

    2007-11-01

    A simple and accurate experimental method is described for determining the effective cantilever spring constant and the detector sensitivity of atomic force microscopy cantilevers on which a colloidal particle is attached. By attaching large (approximately 85μm diameter) latex particles at various positions along the V-shaped cantilevers, we demonstrate how the normal and lateral spring constants as well as the sensitivity vary with loading position. Comparison with an explicit point-load theoretical model has also been used to verify the accuracy of the method.

  19. Enhancing thermally induced effects on atomic force microscope cantilevers using optical microcavities

    Science.gov (United States)

    Duy Vy, Nguyen; Iida, Takuya

    2016-12-01

    A theory of enhancing thermally induced effects on atomic force microscope cantilevers with respect to the input power is proposed. An optical microcavity is used to increase the absorbed power and radiation pressure on thin films. We show that the response to the input power is enhanced up to an order of magnitude for cantilevers of ∼200 µm in length and ∼0.5 µm in thickness. A decrease in the absorbed power in the presence of cantilever deflection increases system endurability with respect to the input power. The study gives methods for amplifying and tuning vibration amplitudes in amplitude modulation modes with high sensitivity and low controlling input power.

  20. Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing

    DEFF Research Database (Denmark)

    Larsen, Tom; Keller, Stephan Sylvest; Schmid, Silvan

    2011-01-01

    Polymer coated ceramic cantilevers are highly sensitive to temperature changes, due to the large difference in coefficient of thermal expansion of the two materials. Silicon rich nitride (SRN) cantilevers coated with SU-8 for temperature sensing were fabricated and tested. The devices were coated......) shrinkage of SU-8 with increasing temperature, due to evaporation of absorbed moisture and (ii) thermal expansion of SRN and SU-8. Separately, these two effects generate bending in opposite direction. The observed overall bending was seen to be a combination of both. In nitrogen atmosphere, the cantilevers...