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Sample records for cantilever array actuator

  1. Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems

    DEFF Research Database (Denmark)

    Kim, H.; In, C.; Yoon, Gil Ho

    2005-01-01

    In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating......, dielectric constant, and dielectric loss. Tip deflections of 12 mu m at 5 V are measured, which agreed well with the predicted value. The 18 mu l/s leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed....

  2. Realization of cantilever arrays for parallel proximity imaging

    International Nuclear Information System (INIS)

    Sarov, Y; Ivanov, Tz; Frank, A; Zoellner, J-P; Nikolov, N; Rangelow, I W

    2010-01-01

    This paper reports on the fabrication and characterisation of self-actuating, and self-sensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.

  3. Polymeric Cantilever Arrays for Biosensing Applications

    DEFF Research Database (Denmark)

    Calleja, M.; Tamayo, J.; Johansson, Alicia

    2003-01-01

    We report the fabrication of arrays of polymeric cantilevers for biochemistry applications. The cantilevers are fabricated in the polymer SU-8. The use of a polymer as the component material for the cantilevers provides the sensors with very high sensitivity due to convenient mechanical material...... properties. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. The method allows obtaining well-controlled and uniform mechanical properties of the cantilevers. The elastic constant of the cantilevers was measured, and their dynamic response...

  4. Lorentz force actuation of a heated atomic force microscope cantilever.

    Science.gov (United States)

    Lee, Byeonghee; Prater, Craig B; King, William P

    2012-02-10

    We report Lorentz force-induced actuation of a silicon microcantilever having an integrated resistive heater. Oscillating current through the cantilever interacts with the magnetic field around a NdFeB permanent magnet and induces a Lorentz force that deflects the cantilever. The same current induces cantilever heating. With AC currents as low as 0.2 mA, the cantilever can be oscillated as much as 80 nm at resonance with a DC temperature rise of less than 5 °C. By comparison, the AC temperature variation leads to a thermomechanical oscillation that is about 1000 times smaller than the Lorentz deflection at the cantilever resonance. The cantilever position in the nonuniform magnetic field affects the Lorentz force-induced deflection, with the magnetic field parallel to the cantilever having the largest effect on cantilever actuation. We demonstrate how the cantilever actuation can be used for imaging, and for measuring the local material softening temperature by sensing the contact resonance shift.

  5. Design & fabrication of cantilever array biosensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Thundat, T

    2009-01-01

    Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes......, electronic processing, and even local telemetry on a single chip have the potential of satisfying the need for highly sensitive and selective multiple-target detection in very small samples. Here we will review the design and fabrication process of cantilever-based biosensors....

  6. Carbon nanotube array actuators

    International Nuclear Information System (INIS)

    Geier, S; Mahrholz, T; Wierach, P; Sinapius, M

    2013-01-01

    Experimental investigations of highly vertically aligned carbon nanotubes (CNTs), also known as CNT-arrays, are the main focus of this paper. The free strain as result of an active material behavior is analyzed via a novel experimental setup. Previous test experiences of papers made of randomly oriented CNTs, also called Bucky-papers, reveal comparably low free strain. The anisotropy of aligned CNTs promises better performance. Via synthesis techniques like chemical vapor deposition (CVD) or plasma enhanced CVD (PECVD), highly aligned arrays of multi-walled carbon nanotubes (MWCNTs) are synthesized. Two different types of CNT-arrays are analyzed, morphologically first, and optically tested for their active characteristics afterwards. One type of the analyzed arrays features tube lengths of 750–2000 μm with a large variety of diameters between 20 and 50 nm and a wave-like CNT-shape. The second type features a maximum, almost uniform, length of 12 μm and a constant diameter of 50 nm. Different CNT-lengths and array types are tested due to their active behavior. As result of the presented tests, it is reported that the quality of orientation is the most decisive property for excellent active behavior. Due to their alignment, CNT-arrays feature the opportunity to clarify the actuation mechanism of architectures made of CNTs. (paper)

  7. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  8. Cantilever arrays with self-aligned nanotips of uniform height

    International Nuclear Information System (INIS)

    Koelmans, W W; Peters, T; Berenschot, E; De Boer, M J; Siekman, M H; Abelmann, L

    2012-01-01

    Cantilever arrays are employed to increase the throughput of imaging and manipulation at the nanoscale. We present a fabrication process to construct cantilever arrays with nanotips that show a uniform tip–sample distance. Such uniformity is crucial, because in many applications the cantilevers do not feature individual tip–sample spacing control. Uniform cantilever arrays lead to very similar tip–sample interaction within an array, enable non-contact modes for arrays and give better control over the load force in contact modes. The developed process flow uses a single mask to define both tips and cantilevers. An additional mask is required for the back side etch. The tips are self-aligned in the convex corner at the free end of each cantilever. Although we use standard optical contact lithography, we show that the convex corner can be sharpened to a nanometre scale radius by an isotropic underetch step. The process is robust and wafer-scale. The resonance frequencies of the cantilevers within an array are shown to be highly uniform with a relative standard error of 0.26% or lower. The tip–sample distance within an array of up to ten cantilevers is measured to have a standard error around 10 nm. An imaging demonstration using the AFM shows that all cantilevers in the array have a sharp tip with a radius below 10 nm. The process flow for the cantilever arrays finds application in probe-based nanolithography, probe-based data storage, nanomanufacturing and parallel scanning probe microscopy. (paper)

  9. Three-electrode self-actuating self-sensing quartz cantilever: design, analysis, and experimental verification.

    Science.gov (United States)

    Chen, C Julian; Schwarz, Alex; Wiesendanger, Roland; Horn, Oliver; Müller, Jörg

    2010-05-01

    We present a novel quartz cantilever for frequency-modulation atomic force microscopy (FM-AFM) which has three electrodes: an actuating electrode, a sensing electrode, and a ground electrode. By applying an ac signal on the actuating electrode, the cantilever is set to vibrate. If the frequency of actuation voltage closely matches one of the characteristic frequencies of the cantilever, a sharp resonance should be observed. The vibration of the cantilever in turn generates a current on the sensing electrode. The arrangement of the electrodes is such that the cross-talk capacitance between the actuating electrode and the sensing electrode is less than 10(-16) F, thus the direct coupling is negligible. To verify the principle, a number of samples were made. Direct measurements with a Nanosurf easyPPL controller and detector showed that for each cantilever, one or more vibrational modes can be excited and detected. Using classical theory of elasticity, it is shown that such novel cantilevers with proper dimensions can provide optimized performance and sensitivity in FM-AFM with very simple electronics.

  10. Miniaturized 3 × 3 array film vibrotactile actuator made with cellulose acetate for virtual reality simulators

    International Nuclear Information System (INIS)

    Ko, Hyun-U; Chan Kim, Hyun; Kim, Jaehwan; Kim, Sang-Youn

    2015-01-01

    This paper reports an array vibrotactile actuator which is suitable for fitting into virtual reality simulators. A 3 × 3 array actuator, of size 15 × 15 × 1 mm 3 , consists of nine cantilever structured cells of which the pillars are supported and made with cellulose acetate by a molding technique. The fabrication process and performance test along with results for the suggested vibrotactile actuator are explained. To simulate the touch force, the top mass is added on the actuator and the actuator performance is measured under actuation. When 2000 V p–p voltage is applied to the actuator, the averaged maximum acceleration for all cells is 0.44 ± 0.19 g, which is above the vibrotactile threshold. The actuation mechanism is associated with the electrostatic force between top and bottom electrodes. (paper)

  11. Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

    International Nuclear Information System (INIS)

    Sathishkumar, P.; Punyabrahma, P.; Sri Muthu Mrinalini, R.; Jayanth, G. R.

    2015-01-01

    A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array

  12. Vibrotactile using micromachined electromagnetic actuators array

    International Nuclear Information System (INIS)

    Talbi, A; Ducloux, O; Tiercelin, N; Deblock, Y; Pernod, P; Preobrazhensky, V

    2006-01-01

    One motivating application of this technology is the development of a tactile display interface, where discrete mechanical actuators apply vibratory excitation at discrete locations on the skin. Specifically, this paper describes the development fabrication and characterization of a 4 x 4 micro-actuator array of vibrating pixels for fingertip tactile communication. The vibrting pixels are generated by using an electromagnetic microresonator. The fabrication sequence and the actuation performance of the array are also presented

  13. A longitudinal thermal actuation principle for mass detection using a resonant micro -cantilever in a fluid medium

    DEFF Research Database (Denmark)

    Grigorov, Alexander; Davis, Zachary James; Rasmussen, Peter

    2004-01-01

    We propose a new thermal actuation mechanical principle, which allows dynamic actuation in most media: air, water, etc. It is used to excite a cantilever, aiming to perform mass detection using resonance shifts, in place of the electrostatic or magnetic actuation that are normally used. It differs...... configuration, subject of investigation in the following paper. (C) 2004 Elsevier B.V. All rights reserved....

  14. Networked Rectenna Array for Smart Material Actuators

    Science.gov (United States)

    Choi, Sang H.; Golembiewski, Walter T.; Song, Kyo D.

    2000-01-01

    The concept of microwave-driven smart material actuators is envisioned as the best option to alleviate the complexity associated with hard-wired control circuitry. Networked rectenna patch array receives and converts microwave power into a DC power for an array of smart actuators. To use microwave power effectively, the concept of a power allocation and distribution (PAD) circuit is adopted for networking a rectenna/actuator patch array. The PAD circuit is imbedded into a single embodiment of rectenna and actuator array. The thin-film microcircuit embodiment of PAD circuit adds insignificant amount of rigidity to membrane flexibility. Preliminary design and fabrication of PAD circuitry that consists of a few nodal elements were made for laboratory testing. The networked actuators were tested to correlate the network coupling effect, power allocation and distribution, and response time. The features of preliminary design are 16-channel computer control of actuators by a PCI board and the compensator for a power failure or leakage of one or more rectennas.

  15. Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

    Energy Technology Data Exchange (ETDEWEB)

    Pandey, Vibhuti Bhushan; Parashar, Sandeep Kumar, E-mail: skparashar@rtu.ac.in [Department of Mechanical Engineering, Rajasthan Technical University, Kota (India)

    2016-04-13

    In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d{sub 15} has much higher value than coupling coefficients d{sub 31} and d{sub 33}, hence in the present work the micro cantilever beam actuated by d{sub 15} effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.

  16. Cantilever arrayed blood pressure sensor for arterial applanation tonometry.

    Science.gov (United States)

    Lee, Byeungleul; Jeong, Jinwoo; Kim, Jinseok; Kim, Bonghwan; Chun, Kukjin

    2014-03-01

    The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-microm-thick-arrayed perforated membrane and 20-microm-thick metal pads. The length and the width of the unit membrane are 210 and 310 microm, respectively. The width of the insensible zone between the adjacent units is only 10 microm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg (= 120 kPa) and less than 1 mmHg (= 133.3 Pa), respectively.

  17. High-speed tapping-mode atomic force microscopy using a Q-controlled regular cantilever acting as the actuator: Proof-of-principle experiments

    Energy Technology Data Exchange (ETDEWEB)

    Balantekin, M., E-mail: mujdatbalantekin@iyte.edu.tr [Electrical and Electronics Engineering, İzmir Institute of Technology, Urla, İzmir 35430 (Turkey); Satır, S.; Torello, D.; Değertekin, F. L. [Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0405 (United States)

    2014-12-15

    We present the proof-of-principle experiments of a high-speed actuation method to be used in tapping-mode atomic force microscopes (AFM). In this method, we do not employ a piezotube actuator to move the tip or the sample as in conventional AFM systems, but, we utilize a Q-controlled eigenmode of a cantilever to perform the fast actuation. We show that the actuation speed can be increased even with a regular cantilever.

  18. High-speed dynamic atomic force microscopy by using a Q-controlled cantilever eigenmode as an actuator

    Energy Technology Data Exchange (ETDEWEB)

    Balantekin, M., E-mail: mujdatbalantekin@iyte.edu.tr

    2015-02-15

    We present a high-speed operating method with feedback to be used in dynamic atomic force microscope (AFM) systems. In this method we do not use an actuator that has to be employed to move the tip or the sample as in conventional AFM setups. Instead, we utilize a Q-controlled eigenmode of an AFM cantilever to perform the function of the actuator. Simulations show that even with an ordinary tapping-mode cantilever, imaging speed can be increased by about 2 orders of magnitude compared to conventional dynamic AFM imaging. - Highlights: • A high-speed imaging method is developed for dynamic-AFM systems. • An eigenmode of an AFM cantilever is utilized to perform fast actuation. • Simulations show 2 orders of magnitude increase in scan speed. • The time spent for dynamic-AFM imaging experiments will be minimized.

  19. Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator

    International Nuclear Information System (INIS)

    Gao, Sai; Herrmann, Konrad; Zhang, Zhikai; Wu, Yong

    2010-01-01

    The calibration of the performance of an SFM (scanning force microscope) cantilever has gained more and more interest in the past years, particularly due to increasing applications of SFMs for the determination of the mechanical properties of materials, such as biological structures and organic molecules. In this paper, a MEMS-based nano-force actuator with a force resolution up to nN (10 −9 N) is presented to quantitatively determine the stiffness of an SFM cantilever. The principle, structure design and realization of the nano-force actuator are detailed. Preliminary experiments demonstrate that the long-term self-calibration stability of the actuator is better than 3.7 × 10 −3 N m −1 (1σ) over 1 h. With careful calibration of the stiffness of the actuator, the MEMS actuator has the capability to determine the stiffness of various types of cantilevers (from 100 N m −1 down to 0.1 N m −1 ) with high accuracy. In addition, thanks to the large displacement and force range (up to 8 µm and 1 mN, respectively) of the actuator, the calibration procedure with our MEMS nano-force actuator features simple and active operation, and therefore applicability for different types of quantitative SFMs

  20. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Directory of Open Access Journals (Sweden)

    Yingxiang Liu

    Full Text Available BACKGROUND: Ultrasonic motors (USM are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS: A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. CONCLUSIONS: The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  1. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Science.gov (United States)

    Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

    2010-04-02

    Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  2. 2D Electrostatic Actuation of Microshutter Arrays

    Science.gov (United States)

    Burns, Devin E.; Oh, Lance H.; Li, Mary J.; Jones, Justin S.; Kelly, Daniel P.; Zheng, Yun; Kutyrev, Alexander S.; Moseley, Samuel H.

    2015-01-01

    An electrostatically actuated microshutter array consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutter arrays demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.

  3. Fabrication and characterization of large arrays of mesoscopic gold rings on large-aspect-ratio cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Ngo, D. Q.; Petković, I., E-mail: ivana.petkovic@yale.edu; Lollo, A. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Castellanos-Beltran, M. A. [National Institute for Standards and Technology, Boulder, Colorado 80305 (United States); Harris, J. G. E. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Department of Applied Physics, Yale University, New Haven, Connecticut 06520 (United States)

    2014-10-15

    We have fabricated large arrays of mesoscopic metal rings on ultrasensitive cantilevers. The arrays are defined by electron beam lithography and contain up to 10{sup 5} rings. The rings have a circumference of 1 μm, and are made of ultrapure (6N) Au that is deposited onto a silicon-on-insulator wafer without an adhesion layer. Subsequent processing of the SOI wafer results in each array being supported at the end of a free-standing cantilever. To accommodate the large arrays while maintaining a low spring constant, the cantilevers are nearly 1 mm in both lateral dimensions and 100 nm thick. The extreme aspect ratio of the cantilevers, the large array size, and the absence of a sticking layer are intended to enable measurements of the rings' average persistent current in the presence of relatively small magnetic fields. We describe the motivation for these measurements, the fabrication of the devices, and the characterization of the cantilevers' mechanical properties. We also discuss the devices' expected performance in measurements of .

  4. Innovative multi-cantilever array sensor system with MOEMS read-out

    Science.gov (United States)

    Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

    2016-11-01

    Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

  5. Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

    International Nuclear Information System (INIS)

    Ghatnekar-Nilsson, S; Graham, J; Hull, R; Montelius, L

    2006-01-01

    We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Δf/f 0 for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection

  6. Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

    Directory of Open Access Journals (Sweden)

    Francesc Torres

    2016-10-01

    Full Text Available Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm.

  7. Finite Element Modelling and Analysis of Damage Detection Methodology in Piezo Electric Sensor and Actuator Integrated Sandwich Cantilever Beam

    Science.gov (United States)

    Pradeep, K. R.; Thomas, A. M.; Basker, V. T.

    2018-03-01

    Structural health monitoring (SHM) is an essential component of futuristic civil, mechanical and aerospace structures. It detects the damages in system or give warning about the degradation of structure by evaluating performance parameters. This is achieved by the integration of sensors and actuators into the structure. Study of damage detection process in piezoelectric sensor and actuator integrated sandwich cantilever beam is carried out in this paper. Possible skin-core debond at the root of the cantilever beam is simulated and compared with undamaged case. The beam is actuated using piezoelectric actuators and performance differences are evaluated using Polyvinylidene fluoride (PVDF) sensors. The methodology utilized is the voltage/strain response of the damaged versus undamaged beam against transient actuation. Finite element model of piezo-beam is simulated in ANSYSTM using 8 noded coupled field element, with nodal degrees of freedoms are translations in the x, y directions and voltage. An aluminium sandwich beam with a length of 800mm, thickness of core 22.86mm and thickness of skin 0.3mm is considered. Skin-core debond is simulated in the model as unmerged nodes. Reduction in the fundamental frequency of the damaged beam is found to be negligible. But the voltage response of the PVDF sensor under transient excitation shows significantly visible change indicating the debond. Piezo electric based damage detection system is an effective tool for the damage detection of aerospace and civil structural system having inaccessible/critical locations and enables online monitoring possibilities as the power requirement is minimal.

  8. Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-10-27

    The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.

  9. Multifrequency Piezoelectric Energy Harvester Based on Polygon-Shaped Cantilever Array

    Directory of Open Access Journals (Sweden)

    Dalius Mažeika

    2018-01-01

    Full Text Available This paper focuses on numerical and experimental investigations of a novel design piezoelectric energy harvester. Investigated harvester is based on polygon-shaped cantilever array and employs multifrequency operating principle. It consists of eight cantilevers with irregular design of cross-sectional area. Cantilevers are connected to each other by specific angle to form polygon-shaped structure. Moreover, seven seismic masses with additional lever arms are added in order to create additional rotation moment. Numerical investigation showed that piezoelectric polygon-shaped energy harvester has five natural frequencies in the frequency range from 10 Hz to 240 Hz, where the first and the second bending modes of the cantilevers are dominating. Maximum output voltage density and energy density equal to 50.03 mV/mm3 and 604 μJ/mm3, respectively, were obtained during numerical simulation. Prototype of piezoelectric harvester was made and experimental investigation was performed. Experimental measurements of the electrical characteristics showed that maximum output voltage density, energy density, and output power are 37.5 mV/mm3, 815.16 μJ/mm3, and 65.24 μW, respectively.

  10. The Electrostatic Actuated Next Generation Microshutter Arrays

    Data.gov (United States)

    National Aeronautics and Space Administration — The field of view required for future missions is much larger than James Webb Space Telescope (JWST). We need to use electrostatic actuation to replace magnetic...

  11. Strain Actuated Solar Arrays (SASA), Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — The team of CU Aerospace and the University of Illinois at Urbana-Champaign propose multifunctional solar arrays, which can be used for attitude control of a...

  12. Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems

    Directory of Open Access Journals (Sweden)

    Péter Udvardi

    2017-10-01

    Full Text Available Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully implantable in the middle/inner ear and includes the following components: frequency selective microphone or accelerometer, energy harvesting device, speech processor, and cochlear multielectrode. Here we demonstrate a low volume, piezoelectric micro-electromechanical system (MEMS cantilever array which is sensitive, even in the lower part of the voice frequency range (300–700 Hz. The test array consisting of 16 cantilevers has been fabricated by standard bulk micromachining using a Si-on-Insulator (SOI wafer and aluminum nitride (AlN as a complementary metal-oxide-semiconductor (CMOS and biocompatible piezoelectric material. The low frequency and low device footprint are ensured by Archimedean spiral geometry and Si seismic mass. Experimentally detected resonance frequencies were validated by an analytical model. The generated open circuit voltage (3–10 mV is sufficient for the direct analog conversion of the signals for cochlear multielectrode implants.

  13. Chemical gas sensors based on functionalized self-actuated piezo-resistive cantilevers

    OpenAIRE

    Filenko, Denys

    2008-01-01

    Der Schwerpunkt dieser Arbeit liegt in der Anwendung funktionalisierter Mikrocantilever mit integrierter bimorpher Aktuation und piezo-resistiver Detektion als chemische Gassensoren für den schnellen, tragbaren und preisgünstigen Nachweis verschiedener flüchtiger Substanzen. Besondere Beachtung erfährt die Verbesserung der Cantilever-Arbeitsleistung durch den Betrieb in speziellen Modi. Weiterer Schwerpunkt liegt in der Untersuchung von spezifischen Sorptionswechselwirkungen und Anwendung von...

  14. Variable gearing in a biologically inspired pneumatic actuator array

    International Nuclear Information System (INIS)

    Azizi, Emanuel; Roberts, Thomas J

    2013-01-01

    A fundamental feature of pennate muscles is that muscle fibers are oriented at an angle to the line of action and rotate as they shorten, becoming more oblique throughout a contraction. This change in fiber orientation (pennation angle) can amplify the shortening velocity of a fiber and increase output velocity of the muscle. The velocity advantage resulting from dynamic changes in pennation angle can be characterized as a gear ratio (muscle velocity/fiber velocity). A recent study has shown that a pennate muscle's gear ratio varies automatically depending on the load such that a muscle operates with a high gear during rapid contractions and low gear during forceful contractions. We examined whether this variable gearing behavior can be replicated in a pennate array of artificial muscles. We used McKibben type pneumatic actuators, which shorten in tension when filled with compressed gas. Similar to muscle fibers, the actuators expand radially during shortening, a feature thought to be a critical part of the variable gearing mechanism in pennate muscles. We arranged McKibben actuators in an array oriented to mimic a pennate muscle, and quantified the system's gear ratio during contraction against a range of loads. Video was used to measure the gear ratio during each contraction. We find that similar to pennate muscles, the gear ratio decreases significantly with increasing load and that variable gearing results from load-dependent variation in the amount of actuator rotation. These results support the idea that variable gearing in pennate muscles is mediated by difference is fiber rotation and the direction of muscle bulging. The behavior of our artificial muscle array also highlights the potential benefits of bio-inspired architectures in artificial muscle arrays, including the ability to vary force and speed automatically in response to variable loading conditions. (paper)

  15. Variable gearing in a biologically inspired pneumatic actuator array.

    Science.gov (United States)

    Azizi, Emanuel; Roberts, Thomas J

    2013-06-01

    A fundamental feature of pennate muscles is that muscle fibers are oriented at an angle to the line of action and rotate as they shorten, becoming more oblique throughout a contraction. This change in fiber orientation (pennation angle) can amplify the shortening velocity of a fiber and increase output velocity of the muscle. The velocity advantage resulting from dynamic changes in pennation angle can be characterized as a gear ratio (muscle velocity/fiber velocity). A recent study has shown that a pennate muscle's gear ratio varies automatically depending on the load such that a muscle operates with a high gear during rapid contractions and low gear during forceful contractions. We examined whether this variable gearing behavior can be replicated in a pennate array of artificial muscles. We used McKibben type pneumatic actuators, which shorten in tension when filled with compressed gas. Similar to muscle fibers, the actuators expand radially during shortening, a feature thought to be a critical part of the variable gearing mechanism in pennate muscles. We arranged McKibben actuators in an array oriented to mimic a pennate muscle, and quantified the system's gear ratio during contraction against a range of loads. Video was used to measure the gear ratio during each contraction. We find that similar to pennate muscles, the gear ratio decreases significantly with increasing load and that variable gearing results from load-dependent variation in the amount of actuator rotation. These results support the idea that variable gearing in pennate muscles is mediated by difference is fiber rotation and the direction of muscle bulging. The behavior of our artificial muscle array also highlights the potential benefits of bio-inspired architectures in artificial muscle arrays, including the ability to vary force and speed automatically in response to variable loading conditions.

  16. VARIABLE GEARING IN A BIOLOGICALLY-INSPIRED PNEUMATIC ACTUATOR ARRAY

    Science.gov (United States)

    Azizi, Emanuel; Roberts, Thomas J.

    2013-01-01

    A fundamental feature of pennate muscles is that muscle fibers are oriented at an angle to the line of action and rotate as they shorten, becoming more oblique throughout a contraction. This change in fiber orientation (pennation angle) can amplify the shortening velocity of a fiber and increase output velocity of the muscle. The velocity advantage resulting from dynamic changes in pennation angle can be characterized as a gear ratio (muscle velocity/fiber velocity). A recent study has shown that a pennate muscle’s gear ratio varies automatically depending on the load such that a muscle operates with a high gear during rapid contractions and low gear during forceful contractions. We examined whether this variable gearing behavior can be replicated in a pennate array of artificial muscles. We used McKibben type pneumatic actuators, which shorten in tension when filled with compressed gas. Similar to muscle fibers, the actuators expand radially during shortening, a feature thought to be a critical part of the variable gearing mechanism in pennate muscles. We arranged McKibben actuators in an array oriented to mimic a pennate muscle, and quantified the system’s gear ratio during contraction against a range of loads. Video was used to measure the gear ratio during each contraction. We find that similar to pennate muscles, the gear ratio decreases significantly with increasing load and that variable gearing results from load-dependent variation in the amount of actuator rotation. These results support the idea that variable gearing in pennate muscles is mediated by difference is fiber rotation and the direction of muscle bulging. The behavior of our artificial muscle array also highlights the potential benefits of bio-inspired architectures in artificial muscle arrays, including the ability to vary force and speed automatically in response to variable loading conditions. PMID:23462288

  17. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy.

    Science.gov (United States)

    Lai, Y W; Hamann, S; Ehmann, M; Ludwig, A

    2011-06-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent. © 2011 American Institute of Physics

  18. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy

    International Nuclear Information System (INIS)

    Lai, Y. W.; Ludwig, A.; Hamann, S.; Ehmann, M.

    2011-01-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent.

  19. Piezoelectric cantilever sensors

    Science.gov (United States)

    Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

    2008-01-01

    A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

  20. Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation

    International Nuclear Information System (INIS)

    Park, Byoungyoul; Afsharipour, Elnaz; Chrusch, Dwayne; Shafai, Cyrus; Andersen, David; Burley, Greg

    2017-01-01

    This paper presents a large displacement out-of-plane Lorentz actuator array for surface manipulation. Actuators are formed from single crystal silicon flexible serpentine springs on either side of a rigid crossbar containing a narrow contact pillar. A rigid mounting rail system was employed to enable a 5  ×  5 array, which offers scalability of the array size. Analytical and finite element models were used to optimize actuator design. Individual actuators were tested to show linear deflection response of  ±150 µ m motion, using a  ±14.7 mA current in the presence of a 0.48 T magnetic field. This actuator array is suitable for various 2D surface modification applications due to its large deformation with low current and temperature of operation, and narrow contact area to a target surface. (paper)

  1. Bandwidth Widening of Piezoelectric Cantilever Beam Arrays by Mass-Tip Tuning for Low-Frequency Vibration Energy Harvesting

    Directory of Open Access Journals (Sweden)

    Eduard Dechant

    2017-12-01

    Full Text Available Wireless sensor networks usually rely on internal permanent or rechargeable batteries as a power supply, causing high maintenance efforts. An alternative solution is to supply the entire system by harvesting the ambient energy, for example, by transducing ambient vibrations into electric energy by virtue of the piezoelectric effect. The purpose of this paper is to present a simple engineering approach for the bandwidth optimization of vibration energy harvesting systems comprising multiple piezoelectric cantilevers (PECs. The frequency tuning of a particular cantilever is achieved by changing the tip mass. It is shown that the bandwidth enhancement by mass tuning is limited and requires several PECs with close resonance frequencies. At a fixed frequency detuning between subsequent PECs, the achievable bandwidth shows a saturation behavior as a function of the number of cantilevers used. Since the resonance frequency of each PEC is different, the output voltages at a particular excitation frequency have different amplitudes and phases. A simple power-transfer circuit where several PECs with an individual full wave bridge rectifier are connected in parallel allows one to extract the electrical power close to the theoretical maximum excluding the diode losses. The experiments performed on two- and three-PEC arrays show reasonable agreement with simulations and demonstrate that this power-transfer circuit additionally influences the frequency dependence of the harvested electrical power.

  2. Optimizing an Actuator Array for the Control of Multi-Frequency Noise in Aircraft Interiors

    Science.gov (United States)

    Palumbo, D. L.; Padula, S. L.

    1997-01-01

    Techniques developed for selecting an optimized actuator array for interior noise reduction at a single frequency are extended to the multi-frequency case. Transfer functions for 64 actuators were obtained at 5 frequencies from ground testing the rear section of a fully trimmed DC-9 fuselage. A single loudspeaker facing the left side of the aircraft was the primary source. A combinatorial search procedure (tabu search) was employed to find optimum actuator subsets of from 2 to 16 actuators. Noise reduction predictions derived from the transfer functions were used as a basis for evaluating actuator subsets during optimization. Results indicate that it is necessary to constrain actuator forces during optimization. Unconstrained optimizations selected actuators which require unrealistically large forces. Two methods of constraint are evaluated. It is shown that a fast, but approximate, method yields results equivalent to an accurate, but computationally expensive, method.

  3. A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

    Science.gov (United States)

    Jang, Jongmoon; Lee, Jangwoo; Woo, Seongyong; Sly, David J.; Campbell, Luke J.; Cho, Jin-Ho; O'Leary, Stephen J.; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Hun Jang, Jeong; Choi, Hongsoo

    2015-07-01

    We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

  4. Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

    International Nuclear Information System (INIS)

    Wehrmeister, Jana; Fuss, Achim; Saurenbach, Frank; Berger, Ruediger; Helm, Mark

    2007-01-01

    The increasing use of micromechanical cantilevers in sensing applications causes a need for reliable readout techniques of micromechanical cantilever sensor (MCS) bending. Current optical beam deflection techniques suffer from drawbacks such as artifacts due to changes in the refraction index upon exchange of media. Here, an adaptation of the Fabry-Perot interferometer is presented that allows simultaneous determination of MCS bending and changes in the refraction index of media. Calibration of the instrument with liquids of known refraction index provides an avenue to direct measurement of bending with nanometer precision. Versatile construction of flow cells in combination with alignment features for substrate chips allows simultaneous measurement of two MCS situated either on the same, or on two different support chips. The performance of the instrument is demonstrate in several sensing applications, including adsorption experiments of alkanethioles on MCS gold surfaces, and measurement of humidity changes in air

  5. A light writable microfluidic "flash memory": optically addressed actuator array with latched operation for microfluidic applications.

    Science.gov (United States)

    Hua, Zhishan; Pal, Rohit; Srivannavit, Onnop; Burns, Mark A; Gulari, Erdogan

    2008-03-01

    This paper presents a novel optically addressed microactuator array (microfluidic "flash memory") with latched operation. Analogous to the address-data bus mediated memory address protocol in electronics, the microactuator array consists of individual phase-change based actuators addressed by localized heating through focused light patterns (address bus), which can be provided by a modified projector or high power laser pointer. A common pressure manifold (data bus) for the entire array is used to generate large deflections of the phase change actuators in the molten phase. The use of phase change material as the working media enables latched operation of the actuator array. After the initial light "writing" during which the phase is temporarily changed to molten, the actuated status is self-maintained by the solid phase of the actuator without power and pressure inputs. The microfluidic flash memory can be re-configured by a new light illumination pattern and common pressure signal. The proposed approach can achieve actuation of arbitrary units in a large-scale array without the need for complex external equipment such as solenoid valves and electrical modules, which leads to significantly simplified system implementation and compact system size. The proposed work therefore provides a flexible, energy-efficient, and low cost multiplexing solution for microfluidic applications based on physical displacements. As an example, the use of the latched microactuator array as "normally closed" or "normally open" microvalves is demonstrated. The phase-change wax is fully encapsulated and thus immune from contamination issues in fluidic environments.

  6. Optimization of actuator arrays for aircraft interior noise control

    Science.gov (United States)

    Cabell, R. H.; Lester, H. C.; Mathur, G. P.; Tran, B. N.

    1993-01-01

    A numerical procedure for grouping actuators in order to reduce the number of degrees of freedom in an active noise control system is evaluated using experimental data. Piezoceramic actuators for reducing aircraft interior noise are arranged into groups using a nonlinear optimization routine and clustering algorithm. An actuator group is created when two or more actuators are driven with the same control input. This procedure is suitable for active control applications where actuators are already mounted on a structure. The feasibility of this technique is demonstrated using measured data from the aft cabin of a Douglas DC-9 fuselage. The measured data include transfer functions between 34 piezoceramic actuators and 29 interior microphones and microphone responses due to the primary noise produced by external speakers. Control inputs for the grouped actuators were calculated so that a cost function, defined as a quadratic pressure term and a penalty term, was a minimum. The measured transfer functions and microphone responses are checked by comparing calculated noise reductions with measured noise reductions for four frequencies. The grouping procedure is then used to determine actuator groups that improve overall interior noise reductions by 5.3 to 15 dB, compared to the baseline experimental configuration.

  7. Fabrication of a bubble-driven arrayed actuator for a tactile display

    International Nuclear Information System (INIS)

    Shikida, Mitsuhiro; Imamura, Tsubasa; Ukai, Shinji; Miyaji, Takaaki; Sato, Kazuo

    2008-01-01

    A chip-sized arrayed actuator device has been developed for application to a tactile display. Each actuator uses a liquid–vapour phase change to drive a microneedle that stimulates receptors in a finger in contact with the array. The actuators have a flexible diaphragm structure and a bottom plate bonded together to create a cavity between them. A microneedle and a microheater are formed on the diaphragm and plate of each actuator, respectively. The sealed cavity is filled with an operating liquid. Activating the heater and generating bubbles, which is similar to the process of a thermal ink jet, increase the pressure in the cavity. As a result, the flexible membrane deforms and it drives the needle upwards to stimulate receptors. Microelectromechanical systems technologies are used to fabricate the three components of the actuators, which are manually assembled to form a 3 × 3 arrayed actuator device. The total size of the device is 15 × 15 × 1 mm. The device performance is experimentally evaluated and a large needle displacement (61 µm) is obtained with an input energy of 457 mJ

  8. Cantilever-type electrode array-based high-throughput microparticle sorting platform driven by gravitation and negative dielectrophoretic force

    International Nuclear Information System (INIS)

    Kim, Youngho; Kim, Byungkyu; Lee, Junghun; Kim, Younggeun; Shin, Sang-Mo

    2011-01-01

    In this paper, we describe a cantilever-type electrode (CE) array-based high-throughput sorting platform, which is a tool used to separate microparticles using gravitation and negative dielectrophoretic (n-DEP) force. This platform consists of meso-size channels and a CE array, which is designed to separate a large number of target particles by differences in their dielectric material properties (DMP) and the weight of the particles. We employ a two-step separation process, with sedimentation as the first step and n-DEP as the second step. In order to differentiate the weight and the DMP of each particle, we employ the sedimentation phenomena in a vertical channel and the CE-based n-DEP in an inclined channel. By using three kinds of polystyrene beads with diameters of 10, 25 and 50 µm, the optimal population (10 7 beads ml −1 ) of particles and the appropriate length (25 mm) of the vertical channel for high performance were determined experimentally. Conclusively, by combining sedimentation and n-DEP schemes, we achieve 74.5, 94.7 and 100% separation efficiency for sorting microparticles with a diameter of 10, 25 and 50 µm, respectively.

  9. Oxidative stress detection by MEMS cantilever sensor array based electronic nose

    Science.gov (United States)

    Gupta, Anurag; Singh, T. Sonamani; Singh, Priyanka; Yadava, R. D. S.

    2018-05-01

    This paper is concerned with analyzing the role of polymer swelling induced surface stress in MEMS chemical sensors. The objective is to determine the impact of surface stress on the chemical discrimination ability of MEMS resonator sensors. We considered a case study of hypoxia detection by MEMS sensor array and performed several types of simulation experiments for detection of oxidative stress volatile organic markers in human breath. Both types of sensor response models that account for the surface stress effect and that did not were considered for the analyses in comparison. It is found that the surface stress (hence the polymer swelling) provides better chemical discrimination ability to polymer coated MEMS sensors.

  10. Design Methodology of a Dual-Halbach Array Linear Actuator with Thermal-Electromagnetic Coupling.

    Science.gov (United States)

    Eckert, Paulo Roberto; Flores Filho, Aly Ferreira; Perondi, Eduardo; Ferri, Jeferson; Goltz, Evandro

    2016-03-11

    This paper proposes a design methodology for linear actuators, considering thermal and electromagnetic coupling with geometrical and temperature constraints, that maximizes force density and minimizes force ripple. The method allows defining an actuator for given specifications in a step-by-step way so that requirements are met and the temperature within the device is maintained under or equal to its maximum allowed for continuous operation. According to the proposed method, the electromagnetic and thermal models are built with quasi-static parametric finite element models. The methodology was successfully applied to the design of a linear cylindrical actuator with a dual quasi-Halbach array of permanent magnets and a moving-coil. The actuator can produce an axial force of 120 N and a stroke of 80 mm. The paper also presents a comparative analysis between results obtained considering only an electromagnetic model and the thermal-electromagnetic coupled model. This comparison shows that the final designs for both cases differ significantly, especially regarding its active volume and its electrical and magnetic loading. Although in this paper the methodology was employed to design a specific actuator, its structure can be used to design a wide range of linear devices if the parametric models are adjusted for each particular actuator.

  11. Cantilevered probe detector with piezoelectric element

    Science.gov (United States)

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2013-04-30

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  12. Automated tuning of an eight-channel cardiac transceive array at 7 tesla using piezoelectric actuators.

    Science.gov (United States)

    Keith, Graeme A; Rodgers, Christopher T; Hess, Aaron T; Snyder, Carl J; Vaughan, J Thomas; Robson, Matthew D

    2015-06-01

    Ultra-high field (UHF) MR scanning in the body requires novel coil designs due to B1 field inhomogeneities. In the transverse electromagnetic field (TEM) design, maximum B1 transmit power can only be achieved if each individual transmit element is tuned and matched for different coil loads, which requires a considerable amount of valuable scanner time. An integrated system for autotuning a multichannel parallel transmit (pTx) cardiac TEM array was devised, using piezoelectric actuators, power monitoring equipment and control software. The reproducibility and performance of the system were tested and the power responses of the coil elements were profiled. An automated optimization method was devised and evaluated. The time required to tune an eight-element pTx cardiac RF array was reduced from a mean of 30 min to less than 10 min with the use of this system. Piezoelectric actuators are an attractive means of tuning RF coil arrays to yield more efficient B1 transmission into the subject. An automated mechanism for tuning these elements provides a practical solution for cardiac imaging at UHF, bringing this technology closer to clinical use. © 2014 The Authors. Magnetic Resonance in Medicine published by Wiley Periodicals, Inc. on behalf of International Society for Magnetic Resonance in Medicine.

  13. Microstructuring of piezoresistive cantilevers for gas detection and analysis

    International Nuclear Information System (INIS)

    Sarov, Y.; Sarova, V.; Bitterlich, Ch.; Richter, O.; Guliyev, E.; Zoellner, J.-P.; Rangelow, I. W.; Andok, R.; Bencurova, A.

    2011-01-01

    In this work we report on a design and fabrication of cantilevers for gas detection and analysis. The cantilevers have expanded area of interaction with the gas, while the signal transduction is realized by an integrated piezoresistive deflection sensor, placed at the narrowed cantilever base with highest stress along the cantilever. Moreover, the cantilevers have integrated bimorph micro-actuator detection in a static and dynamic mode. The cantilevers are feasible as pressure, temperature and flow sensors and under chemical functionalization - for gas recognition, tracing and composition analysis. (authors)

  14. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad; Chappanda, Karumbaiah N.; Hafiz, Md Abdullah Al; Ramini, Abdallah; Younis, Mohammad I.

    2016-01-01

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever

  15. Cantilever surface stress sensors with single-crystalline silicon piezoresistors

    DEFF Research Database (Denmark)

    Rasmussen, Peter Andreas; Hansen, Ole; Boisen, Anja

    2005-01-01

    We present a cantilever with piezoresistive readout optimized for measuring the static deflection due to isotropic surface stress on the surface of the cantilever [Sens. Actuators B 79(2-3), 115 (2001)]. To our knowledge nobody has addressed the difference in physical regimes, and its influence o...

  16. Development of micropump-actuated negative pressure pinched injection for parallel electrophoresis on array microfluidic chip.

    Science.gov (United States)

    Li, Bowei; Jiang, Lei; Xie, Hua; Gao, Yan; Qin, Jianhua; Lin, Bingcheng

    2009-09-01

    A micropump-actuated negative pressure pinched injection method is developed for parallel electrophoresis on a multi-channel LIF detection system. The system has a home-made device that could individually control 16-port solenoid valves and a high-voltage power supply. The laser beam is excitated and distributes to the array separation channels for detection. The hybrid Glass-PDMS microfluidic chip comprises two common reservoirs, four separation channels coupled to their respective pneumatic micropumps and two reference channels. Due to use of pressure as a driving force, the proposed method has no sample bias effect for separation. There is only one high-voltage supply needed for separation without relying on the number of channels, which is significant for high-throughput analysis, and the time for sample loading is shortened to 1 s. In addition, the integrated micropumps can provide the versatile interface for coupling with other function units to satisfy the complicated demands. The performance is verified by separation of DNA marker and Hepatitis B virus DNA samples. And this method is also expected to show the potential throughput for the DNA analysis in the field of disease diagnosis.

  17. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud

    2012-02-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates in the line it sets an alternating current in the actuator electrodes. This flowing current drives the piezoelectric cantilever to mechanical movement, especially when the frequency of the RF signal matches the mechanical resonant frequency of the cantilever. Output voltage signals versus frequency for both mechanical vibrational and RF signal excitations have been measured using different loads.© 2011 Elsevier Ltd. All rights reserved.

  18. Experimental Determination of Bending Resonances of Millimeter Size PVF2 Cantilevers

    Directory of Open Access Journals (Sweden)

    David F. Thompson

    2003-07-01

    Full Text Available The polymer piezoelectric polvinylidene fluoride has found widespread use in sensors and actuators. The bending mode of piezoelectricity offers very high sensitivities and low mechanical input impedance, but has not been studied in as much detail for sensor applications. We report the dynamic electromechanical properties of millimeter size cantilevers made from electroded films of PVF2. All devices tested had a single polymer layer. Several resonances are found below 1 kHz and the experimentally observed resonance frequency dependence on cantilever thickness and length are seen to agree well with published models which take the properties of the electrodes into account. It is found that bending resonances are also modulated by the width of the cantilever. Therefore, though the length and thickness control the resonance frequency most strongly, the actual realized value can be fine-tuned by changing cantilever width and the electrode material and its thickness. Further, all resonances display high piezoelectric coupling coefficients (keff, ranging between 0.2 - 0.35. The data presented here will be extremely useful in the design of sensors and actuators for a number of applications, since the combination of millimeter size scales and high piezoelectric sensitivities in the low audio range can be realized with this marriage of polymeric materials and cantilever geometries. Such an array of sensors can be used in cochlear implant applications, and when integrated with a resonance interrogation circuit can be used for the detection of low frequency vibrations of large structures. If appropriate mass/elasticity sensitive layers are coated on the electrodes, such a sensor can be used for the detection of a wide range of chemicals and biochemicals.

  19. An orientation measurement method based on Hall-effect sensors for permanent magnet spherical actuators with 3D magnet array.

    Science.gov (United States)

    Yan, Liang; Zhu, Bo; Jiao, Zongxia; Chen, Chin-Yin; Chen, I-Ming

    2014-10-24

    An orientation measurement method based on Hall-effect sensors is proposed for permanent magnet (PM) spherical actuators with three-dimensional (3D) magnet array. As there is no contact between the measurement system and the rotor, this method could effectively avoid friction torque and additional inertial moment existing in conventional approaches. Curved surface fitting method based on exponential approximation is proposed to formulate the magnetic field distribution in 3D space. The comparison with conventional modeling method shows that it helps to improve the model accuracy. The Hall-effect sensors are distributed around the rotor with PM poles to detect the flux density at different points, and thus the rotor orientation can be computed from the measured results and analytical models. Experiments have been conducted on the developed research prototype of the spherical actuator to validate the accuracy of the analytical equations relating the rotor orientation and the value of magnetic flux density. The experimental results show that the proposed method can measure the rotor orientation precisely, and the measurement accuracy could be improved by the novel 3D magnet array. The study result could be used for real-time motion control of PM spherical actuators.

  20. Application of Advanced Electromagnetic Arrays to High Efficiency, High Bandwidth, Redundant Linear Actuators, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — There is a need to develop electromechanical actuators to improve performance beyond that of hydraulic devices currently being used in numerous aerospace and...

  1. Computational investigation of hydrokinetic turbine arrays in an open channel using an actuator disk-LES model

    Science.gov (United States)

    Kang, Seokkoo; Yang, Xiaolei; Sotiropoulos, Fotis

    2012-11-01

    While a considerable amount of work has focused on studying the effects and performance of wind farms, very little is known about the performance of hydrokinetic turbine arrays in open channels. Unlike large wind farms, where the vertical fluxes of momentum and energy from the atmospheric boundary layer comprise the main transport mechanisms, the presence of free surface in hydrokinetic turbine arrays inhibits vertical transport. To explore this fundamental difference between wind and hydrokinetic turbine arrays, we carry out LES with the actuator disk model to systematically investigate various layouts of hydrokinetic turbine arrays mounted on the bed of a straight open channel with fully-developed turbulent flow fed at the channel inlet. Mean flow quantities and turbulence statistics within and downstream of the arrays will be analyzed and the effect of the turbine arrays as means for increasing the effective roughness of the channel bed will be extensively discussed. This work was supported by Initiative for Renewable Energy & the Environment (IREE) (Grant No. RO-0004-12), and computational resources were provided by Minnesota Supercomputing Institute.

  2. Improving tapping mode atomic force microscopy with piezoelectric cantilevers

    International Nuclear Information System (INIS)

    Rogers, B.; Manning, L.; Sulchek, T.; Adams, J.D.

    2004-01-01

    This article summarizes improvements to the speed, simplicity and versatility of tapping mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric microcantilever with a sharp silicon tip and a thin, low-stress zinc oxide (ZnO) film to both actuate and sense deflection. First, we demonstrate self-sensing tapping mode without laser detection. Similar previous work has been limited by unoptimized probe tips, cantilever thicknesses, and stress in the piezoelectric films. Tests indicate self-sensing amplitude resolution is as good or better than optical detection, with double the sensitivity, using the same type of cantilever. Second, we demonstrate self-oscillating tapping mode AFM. The cantilever's integrated piezoelectric film serves as the frequency-determining component of an oscillator circuit. The circuit oscillates the cantilever near its resonant frequency by applying positive feedback to the film. We present images and force-distance curves using both self-sensing and self-oscillating techniques. Finally, high-speed tapping mode imaging in liquid, where electric components of the cantilever require insulation, is demonstrated. Three cantilever coating schemes are tested. The insulated microactuator is used to simultaneously vibrate and actuate the cantilever over topographical features. Preliminary images in water and saline are presented, including one taken at 75.5 μm/s - a threefold improvement in bandwidth versus conventional piezotube actuators

  3. Manipulating objects by discrete excitable media coupled with contact-less actuator array: Open-loop case

    International Nuclear Information System (INIS)

    Skachek, Sergey; Adamatzky, Andrew; Melhuish, Chris

    2005-01-01

    A two-dimensional cellular automaton (CA) model of an excitable medium is coupled with an array of micro-actuators in the form of abstract air-jets. Each cell of the CA is linked to a unique air-jet. A cell state determines the orientation and intensity of the airflow generated by the air-jet corresponding to the cell. We explore the phenomenology of an open-loop configuration in which CA cells do not sense the presence of the object being moved. Excitation waves generated in the initial stimulation of the medium, travel on the lattice and cause waves of actuation in the air-jets, resulting in changing airflow patterns. Thus, the waves of actuation move and rotate the manipulated object. We study the manipulation of three convex shapes by excitable CA, and provide the classification of various types of object motion from straight to sinuous and oscillatory trajectories. The relation between the excitation dynamic and resulting trajectories of the object will be used in future designs of hardware prototypes of massive-parallel manipulators controlled by non-linear media

  4. Force measurements of a magnetic micro actuator proposed for a microvalve array

    International Nuclear Information System (INIS)

    Chang, Pauline J; Chang, Frank W; Yuen, Michelle C; Horsley, David A; Otillar, Robert

    2014-01-01

    Low-cost, easily-fabricated and power-efficient microvalves are necessary for many microfluidic lab-on-a-chip applications. In this study, we present a simple, low-power, scalable, CMOS-compatible magnetic actuator for microvalve applications composed of a paramagnetic bead as the ball valve over a picoliter reaction well etched into a silicon substrate. The paramagnetic bead, composed of either pure FeSi or magnetite in a SiO 2  matrix, is actuated by the local magnetic field gradient generated by a microcoil in an aqueous environment, and the reaction well is situated at the microcoil center. A permanent magnet beneath the microvalve device provides an external magnetic biasing field that magnetizes the bead, enabling bidirectional actuation and reducing the current required to actuate the bead to a level below 10 mA. The vertical and radial magnetic forces exerted on the bead by the microcoil were measured for both pure FeSi and composite beads and agree well with the predictions of 2D axisymmetric finite element method models. Vertical forces were within a range of 13–80 nN, and radial forces were 11–60 nN depending on the bead type. The threshold current required to initiate bead actuation was measured as a function of bead diameter and is found to scale inversely with volume for small beads, as expected based on the magnetic force model. To provide an estimate of the stiction force acting between the bead and the passivation layer on the substrate, repeated actuation trials were used to study the bead throw distance for substrates coated with silicon dioxide, Parylene-C, and photoresist. The stiction observed was lowest for a photoresist-coated substrate, while silicon dioxide and Parylene-C coated substrates exhibited similar levels of stiction. (paper)

  5. Numerical and Experimental Characterization of Fiber-Reinforced Thermoplastic Composite Structures with Embedded Piezoelectric Sensor-Actuator Arrays for Ultrasonic Applications

    Directory of Open Access Journals (Sweden)

    Klaudiusz Holeczek

    2016-02-01

    Full Text Available The paper presents preliminary numerical and experimental studies of active textile-reinforced thermoplastic composites with embedded sensor-actuator arrays. The goal of the investigations was the assessment of directional sound wave generation capability using embedded sensor-actuator arrays and developed a wave excitation procedure for ultrasound measurement tasks. The feasibility of the proposed approach was initially confirmed in numerical investigations assuming idealized mechanical and geometrical conditions. The findings were validated in real-life conditions on specimens of elementary geometry. Herein, the technological aspects of unique automated assembly of thermoplastic films containing adapted thermoplastic-compatible piezoceramic modules and conducting paths were described.

  6. Electrostatic force microscopy with a self-sensing piezoresistive cantilever

    International Nuclear Information System (INIS)

    Pi, U. H.; Kye, J. I.; Shin, S.; Khim, Z. G.; Hong, J. W.; Yoon, S.

    2003-01-01

    We present a new method for electrostatic force microscopy (EFM) using a piezoresistive cantilever instead of the conventional cantilever with an optical detector. In EFM with a piezoresistive cantilever, the electrostatic force between the tip and the sample is monitored by sensing the change in the resistance of the piezoresistive cantilever at a frequency of several tens of kHz. A large stray capacitance effect can be rejected by using an appropriate phase tuning of the phase-sensitive detection. We observed the ferroelectric domain images of a triglycine sulfate single crystal. We could also write fine patterns on a lead-zirconate-titanate (PZT) thin film through domain reversal by applying various dc voltages between the tip and the sample. We suggest that the EFM technique using a self-sensing and self-actuating piezoresistive cantilever can be applied to a high-density data storage field

  7. Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

    Science.gov (United States)

    Sökmen, Ü.; Stranz, A.; Waag, A.; Ababneh, A.; Seidel, H.; Schmid, U.; Peiner, E.

    2010-06-01

    We report on a micro-machined resonator for mass sensing applications which is based on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin film actuator. An inductively coupled plasma (ICP) cryogenic dry etching process was applied for the micro-machining of the silicon substrate. A shift in resonance frequency was observed, which was proportional to a mass deposited in an e-beam evaporation process on top. We had a mass sensing limit of 5.2 ng. The measurements from the cantilevers of the two arrays revealed a quality factor of 155-298 and a mass sensitivity of 120.34 ng Hz-1 for the first array, and a quality factor of 130-137 and a mass sensitivity of 104.38 ng Hz-1 for the second array. Furthermore, we managed to fabricate silicon cantilevers, which can be improved for the detection in the picogram range due to a reduction of the geometrical dimensions.

  8. Individually programmable cell stretching microwell arrays actuated by a Braille display.

    Science.gov (United States)

    Kamotani, Yoko; Bersano-Begey, Tommaso; Kato, Nobuhiro; Tung, Yi-Chung; Huh, Dongeun; Song, Jonathan W; Takayama, Shuichi

    2008-06-01

    Cell culture systems are often static and are therefore nonphysiological. In vivo, many cells are exposed to dynamic surroundings that stimulate cellular responses in a process known as mechanotransduction. To recreate this environment, stretchable cell culture substrate systems have been developed, however, these systems are limited by being macroscopic and low throughput. We have developed a device consisting of 24 miniature cell stretching chambers with flexible bottom membranes that are deformed using the computer-controlled, piezoelectrically actuated pins of a Braille display. We have also developed efficient image capture and analysis protocols to quantify morphological responses of the cells to applied strain. Human dermal microvascular endothelial cells (HDMECs) were found to show increasing degrees of alignment and elongation perpendicular to the radial strain in response to cyclic stretch at increasing frequencies of 0.2, 1, and 5 Hz, after 2, 4, and 12h. Mouse myogenic C2C12 cells were also found to align in response to the stretch, while A549 human lung adenocarcinoma epithelial cells did not respond to stretch.

  9. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    International Nuclear Information System (INIS)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio

    2011-01-01

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  10. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio, E-mail: pablogarcia@us.es [Depto. de Electronica y Electromagnetismo, University of Sevilla (Spain)

    2011-06-23

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  11. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud; Alshareef, Husam N.

    2012-01-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates

  12. An intelligent sensor array distributed system for vibration analysis and acoustic noise characterization of a linear switched reluctance actuator.

    Science.gov (United States)

    Salvado, José; Espírito-Santo, António; Calado, Maria

    2012-01-01

    This paper proposes a distributed system for analysis and monitoring (DSAM) of vibrations and acoustic noise, which consists of an array of intelligent modules, sensor modules, communication bus and a host PC acting as data center. The main advantages of the DSAM are its modularity, scalability, and flexibility for use of different type of sensors/transducers, with analog or digital outputs, and for signals of different nature. Its final cost is also significantly lower than other available commercial solutions. The system is reconfigurable, can operate either with synchronous or asynchronous modes, with programmable sampling frequencies, 8-bit or 12-bit resolution and a memory buffer of 15 kbyte. It allows real-time data-acquisition for signals of different nature, in applications that require a large number of sensors, thus it is suited for monitoring of vibrations in Linear Switched Reluctance Actuators (LSRAs). The acquired data allows the full characterization of the LSRA in terms of its response to vibrations of structural origins, and the vibrations and acoustic noise emitted under normal operation. The DSAM can also be used for electrical machine condition monitoring, machine fault diagnosis, structural characterization and monitoring, among other applications.

  13. An Intelligent Sensor Array Distributed System for Vibration Analysis and Acoustic Noise Characterization of a Linear Switched Reluctance Actuator

    Directory of Open Access Journals (Sweden)

    Maria Calado

    2012-06-01

    Full Text Available This paper proposes a distributed system for analysis and monitoring (DSAM of vibrations and acoustic noise, which consists of an array of intelligent modules, sensor modules, communication bus and a host PC acting as data center. The main advantages of the DSAM are its modularity, scalability, and flexibility for use of different type of sensors/transducers, with analog or digital outputs, and for signals of different nature. Its final cost is also significantly lower than other available commercial solutions. The system is reconfigurable, can operate either with synchronous or asynchronous modes, with programmable sampling frequencies, 8-bit or 12-bit resolution and a memory buffer of 15 kbyte. It allows real-time data-acquisition for signals of different nature, in applications that require a large number of sensors, thus it is suited for monitoring of vibrations in Linear Switched Reluctance Actuators (LSRAs. The acquired data allows the full characterization of the LSRA in terms of its response to vibrations of structural origins, and the vibrations and acoustic noise emitted under normal operation. The DSAM can also be used for electrical machine condition monitoring, machine fault diagnosis, structural characterization and monitoring, among other applications.

  14. Materials selection and design of microelectrothermal bimaterial actuators

    OpenAIRE

    Prasanna, S.; Spearing, S.M.

    2007-01-01

    A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/vo...

  15. Monolithic micro-electro-thermal actuator integrated with a lateral displacement sensor

    International Nuclear Information System (INIS)

    Zhang, Yan; Choi, Young-Soo; Lee, Dong-Weon

    2010-01-01

    This paper presents monolithically fabricated horizontal thermal actuators integrated with piezoresistive sensors for in situ displacement sensing. The great advantage of a hybrid system is the use of closed feedback control for improving the transient response of a thermal actuator and positioning accuracy. It consists of two 'hot arms' made of doped silicon for Joule heating-induced thermal expansion when a current flow passes through them. The piezoresistor is embedded in the base of the 'cold arm' flexure for monitoring the tip deflection and for performance characterization. This 'cold arm' is not a part of the electrical circuit, which further improves the heat power efficiency and the measurement accuracy. Optimization is achieved mainly through modification of the geometry as well as the fabrication process. The fabricated micro-electro-thermal actuator with an integrated sensor is intended for use as a scanning cantilever in atomic force microscope or as a sample holder to drive the moving object through arrays configuration.

  16. Dynamic Actuation of Single-Crystal Diamond Nanobeams

    OpenAIRE

    Sohn, Young-Ik; Burek, Michael J.; Kara, Vural; Kearns, Ryan; Lončar, Marko

    2014-01-01

    We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices. Gradient radio-frequency electromagnetic forces are used to achieve actuation of both cantilever and doubly clamped beam structures, with operation frequencies ranging from a few MHz to ~50MHz. Frequency tuning and parametric actuation are also studied.

  17. Analytical solutions of the electrostatically actuated curled beam problem

    KAUST Repository

    Younis, Mohammad I.

    2014-01-01

    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We

  18. Piezoresistive cantilever force-clamp system

    Energy Technology Data Exchange (ETDEWEB)

    Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L. [Department of Mechanical Engineering, Stanford University, Stanford, California 94305 (United States); Goodman, Miriam B. [Department of Molecular and Cellular Physiology, Stanford University, Stanford, California 94305 (United States)

    2011-04-15

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.

  19. Cantilever-based micro-particle filter with simultaneous single particle detection

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2011-01-01

    Currently, separation of whole blood samples on lab-on-a-chip systems is achieved via filters followed by analysis of the filtered matter such as counting of blood cells. Here, a micro-chip based on cantilever technology is developed, which enables simultaneous filtration and counting of micro-particles...... from a liquid. A hole-array is integrated into a micro-cantilever, which is inserted into a microfluidic channel perpendicular to the flow. A metal pad at the apex of the cantilever enables an optical read-out of the deflection of the cantilever. When a micro-particle is too large to pass a hole...

  20. Graphene cantilever under Casimir force

    Science.gov (United States)

    Derras-Chouk, Amel; Chudnovsky, Eugene M.; Garanin, Dmitry A.; Jaafar, Reem

    2018-05-01

    The stability of graphene cantilever under Casimir attraction to an underlying conductor is investigated. The dependence of the instability threshold on temperature and flexural rigidity is obtained. Analytical work is supplemented by numerical computation of the critical temperature above which the graphene cantilever irreversibly bends down and attaches to the conductor. The geometry of the attachment and exfoliation of the graphene sheet is discussed. It is argued that graphene cantilever can be an excellent tool for precision measurements of the Casimir force.

  1. MEMS fluidic actuator

    Science.gov (United States)

    Kholwadwala, Deepesh K [Albuquerque, NM; Johnston, Gabriel A [Trophy Club, TX; Rohrer, Brandon R [Albuquerque, NM; Galambos, Paul C [Albuquerque, NM; Okandan, Murat [Albuquerque, NM

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  2. Biosensors based on cantilevers.

    Science.gov (United States)

    Alvarez, Mar; Carrascosa, Laura G; Zinoviev, Kiril; Plaza, Jose A; Lechuga, Laura M

    2009-01-01

    Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in diverse fields, such as genomic or proteomic, because of the biosensor flexibility, the low sample consumption, and the non-pretreated samples required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an example. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.

  3. Attitude and vibration control of a satellite containing flexible solar arrays by using reaction wheels, and piezoelectric transducers as sensors and actuators

    Science.gov (United States)

    da Fonseca, Ijar M.; Rade, Domingos A.; Goes, Luiz C. S.; de Paula Sales, Thiago

    2017-10-01

    The primary purpose of this paper is to provide insight into control-structure interaction for satellites comprising flexible appendages and internal moving components. The physical model considered herein aiming to attend such purpose is a rigid-flexible satellite consisting of a rigid platform containing two rotating flexible solar panels. The solar panels rotation is assumed to be in a sun-synchronous configuration mode. The panels contain surface-bonded piezoelectric patches that can be used either as sensors for the elastic displacements or as actuators to counteract the vibration motion. It is assumed that in the normal mode operation the satellite platform points towards the Earth while the solar arrays rotate so as to follow the Sun. The vehicle moves in a low Earth polar orbit. The technique used to obtain the mathematical model combines the Lagrangian formulation with the Finite Elements Method used to describe the dynamics of the solar panel. The gravity-gradient torque as well as the torque due to the interaction of the Earth magnetic field and the satellite internal residual magnetic moment is included as environmental perturbations. The actuators are three reaction wheels for attitude control and piezoelectric actuators to control the flexible motion of the solar arrays. Computer simulations are performed using the MATLAB® software package. The following on-orbit satellite operating configurations are object of analysis: i) Satellite pointing towards the Earth (Earth acquisition maneuver) by considering the initial conditions in the elastic displacement equal to zero, aiming the assessment of the flexible modes excitation by the referred maneuver; ii) the satellite pointing towards the Earth with the assumption of an initial condition different from zero for the flexible motion such that the attitude alterations are checked against the elastic motion disturbance; and iii) attitude acquisition accomplished by taking into account initial conditions

  4. Direct torsional actuation of microcantilevers using magnetic excitation

    Energy Technology Data Exchange (ETDEWEB)

    Gosvami, Nitya Nand; Nalam, Prathima C.; Tam, Qizhan; Carpick, Robert W., E-mail: carpick@seas.upenn.edu [Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States); Exarhos, Annemarie L.; Kikkawa, James M. [Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)

    2014-09-01

    Torsional mode dynamic force microscopy can be used for a wide range of studies including mapping lateral contact stiffness, torsional frequency or amplitude modulation imaging, and dynamic friction measurements of various materials. Piezo-actuation of the cantilever is commonly used, but it introduces spurious resonances, limiting the frequency range that can be sampled, and rendering the technique particularly difficult to apply in liquid medium where the cantilever oscillations are significantly damped. Here, we demonstrate a method that enables direct torsional actuation of cantilevers with high uniformity over wide frequency ranges by attaching a micrometer-scale magnetic bead on the back side of the cantilever. We show that when beads are magnetized along the width of the cantilever, efficient torsional actuation of the cantilevers can be achieved using a magnetic field produced from a solenoid placed underneath the sample. We demonstrate the capability of this technique by imaging atomic steps on graphite surfaces in tapping mode near the first torsional resonance of the cantilever in dodecane. The technique is also applied to map the variations in the lateral contact stiffness on the surface of graphite and polydiacetylene monolayers.

  5. Chemical sensor with oscillating cantilevered probe

    Science.gov (United States)

    Adams, Jesse D

    2013-02-05

    The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

  6. Energy Harvesting & Recapture from Human Subjects: Dual-Stage MEMS Cantilever Energy Harvester

    Science.gov (United States)

    2015-03-01

    beam must be anchored to a thermally insulating layer that separates the cantilever from the substrate. Thermal 52 isolation is paramount because the...34Squeeze film air damping in MEMS," Sensors and Actuators A: Physical, vol. 136, pp. 3-27, 2007. 86 [12] Y. Arakawa, "Micro Seismic Power Generator

  7. Thermal crosstalk in heated microcantilever arrays

    International Nuclear Information System (INIS)

    Kim, Hoe Joon; Dai, Zhenting; King, William P

    2013-01-01

    We report on a detailed characterization and analysis of thermal crosstalk in a heated microcantilever array. The fabricated heated cantilever array consists of five identical independently controlled heated cantilevers. The temperature of each cantilever can be controlled over a large temperature range, up to 900 °C, by means of an integrated solid-state resistive heater. We analyze thermal crosstalk in steady and transient operating conditions when the heated cantilever array is either in contact with a substrate or freely suspended in air. The thermal conductance between neighboring cantilevers is as high as 0.61 µW °C −1 , resulting in non-negligible temperature increases in neighboring cantilevers, depending upon the operating conditions. By understanding and accounting for thermal crosstalk, it is possible to improve temperature control and temperature measurements with heated microcantilever arrays. (paper)

  8. Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

    KAUST Repository

    Conchouso Gonzalez, David; Carreno, Armando Arpys Arevalo; Castro, D.; Foulds, Ian G.

    2015-01-01

    This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used

  9. Simple and Accurate Analytical Solutions of the Electrostatically Actuated Curled Beam Problem

    KAUST Repository

    Younis, Mohammad I.

    2014-01-01

    We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions

  10. A closed-loop system for frequency tracking of piezoresistive cantilever sensors

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Zhang, Qing; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    A closed loop circuit capable of tracking resonant frequencies for MEMS-based piezoresistive cantilever resonators is developed in this work. The proposed closed-loop system is mainly based on a phase locked loop (PLL) circuit. In order to lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator (VCO) is locked to the phase of the input reference signal of the cantilever sensor. In addition to the PLL component, an instrumentation amplifier and an active low pass filter (LPF) are connected to the system for gaining the amplitude and reducing the noise of the cantilever output signals. The LPF can transform a rectangular signal into a sinusoidal signal with voltage amplitudes ranging from 5 to 10 V which are sufficient for a piezoactuator input (i.e., maintaining a large output signal of the cantilever sensor). To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is utilized for actuating the cantilever into resonance. Implementation of this closed loop system is used to track the resonant frequency of a silicon cantilever-based sensor resonating at 9.4 kHz under a cross-sensitivity test of ambient temperature. The changes of the resonant frequency are interpreted using a frequency counter connected to the system. From the experimental results, the temperature sensitivity and coefficient of the employed sensor are 0.3 Hz/°C and 32.8 ppm/°C, respectively. The frequency stability of the system can reach up to 0.08 Hz. The development of this system will enable real-time nanoparticle monitoring systems and provide a miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors.

  11. Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

    NARCIS (Netherlands)

    Bijster, R.J.F.; Vreugd, J. de; Sadeghian Marnani, H.

    2014-01-01

    In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is

  12. Plasmonic non-concentric nanorings array as an unidirectional nano-optical conveyor belt actuated by polarization rotation.

    Science.gov (United States)

    Jiang, Min; Wang, Guanghui; Jiao, Wenxiang; Ying, Zhoufeng; Zou, Ningmu; Ho, Ho-Pui; Sun, Tianyu; Zhang, Xuping

    2017-01-15

    We report a nano-optical conveyor belt containing an array of gold plasmonic non-concentric nanorings (PNNRs) for the realization of trapping and unidirectional transportation of nanoparticles through rotating the polarization of an excitation beam. The location of hot spots within an asymmetric plasmonic nanostructure is polarization dependent, thus making it possible to manipulate a trapped target by rotating the incident polarization state. In the case of PNNR, the two poles have highly unbalanced trap potential. This greatly enhances the chance of transferring trapped particles between adjacent PNNRs in a given direction through rotating the polarization. As confirmed by three-dimensional finite-difference time-domain analysis, an array of PNNRs forms an unidirectional nano-optical conveyor belt, which delivers target nanoparticles or biomolecules over a long distance with nanometer accuracy. With the capacity to trap and to transfer, our design offers a versatile scheme for conducting mechanical sample manipulation in many on-chip optofluidic applications.

  13. Asymmetric actuating structure generates negligible influence on the supporting base for high performance scanning probe microscopies

    Science.gov (United States)

    Yi Yan, Gang; Bin Liu, Yong; Hua Feng, Zhi

    2014-02-01

    An asymmetric actuating structure generating negligible influence on the supporting base for high performance scanning probe microscopies is proposed in this paper. The actuator structure consists of two piezostacks, one is used for actuating while the other is for counterbalancing. In contrast with balanced structure, the two piezostacks are installed at the same side of the supporting base. The effectiveness of the structure is proved by some experiments with the actuators fixed to the free end of a cantilever. Experimental results show that almost all of the vibration modes of the cantilever are suppressed effectively at a wide frequency range of 90 Hz-10 kHz.

  14. Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities

    Energy Technology Data Exchange (ETDEWEB)

    Torello, D.; Degertekin, F. Levent, E-mail: levent.degertekin@me.gatech.edu [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332 (United States)

    2013-11-15

    A new method of actuating atomic force microscopy (AFM) cantilevers is proposed in which a high frequency (>5 MHz) wave modulated by a lower frequency (∼300 kHz) wave passes through a contact acoustic nonlinearity at the contact interface between the actuator and the cantilever chip. The nonlinearity converts the high frequency, modulated signal to a low frequency drive signal suitable for actuation of tapping-mode AFM probes. The higher harmonic content of this signal is filtered out mechanically by the cantilever transfer function, providing for clean output. A custom probe holder was designed and constructed using rapid prototyping technologies and off-the-shelf components and was interfaced with an Asylum Research MFP-3D AFM, which was then used to evaluate the performance characteristics with respect to standard hardware and linear actuation techniques. Using a carrier frequency of 14.19 MHz, it was observed that the cantilever output was cleaner with this actuation technique and added no significant noise to the system. This setup, without any optimization, was determined to have an actuation bandwidth on the order of 10 MHz, suitable for high speed imaging applications. Using this method, an image was taken that demonstrates the viability of the technique and is compared favorably to images taken with a standard AFM setup.

  15. Microwave Power for Smart Membrane Actuators

    Science.gov (United States)

    Choi, Sang H.; Song, Kyo D.; Golembiewski, Walter T.; Chu, Sang-Hyon; King, Glen C.

    2002-01-01

    The concept of microwave-driven smart membrane actuators is envisioned as the best option to alleviate the complexity associated with hard-wired control circuitry. A large, ultra-light space structure, such as solar sails and Gossamer spacecrafts, requires a distribution of power into individual membrane actuators to control them in an effective way. A patch rectenna array with a high voltage output was developed to drive smart membrane actuators. Networked patch rectenna array receives and converts microwave power into a DC power for an array of smart actuators. To use microwave power effectively, the concept of a power allocation and distribution (PAD) circuit is developed and tested for networking a rectenna/actuator patch array. For the future development, the PAD circuit could be imbedded into a single embodiment of rectenna and actuator array with the thin-film microcircuit embodiment. Preliminary design and fabrication of PAD circuitry that consists of a sixteen nodal elements were made for laboratory testing.

  16. Cantilever-like micromechanical sensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest

    2011-01-01

    The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has...... increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus...... on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection....

  17. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al; Jabbour, Ghassan E.

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films

  18. Piezoelectric Actuator with Frequency Characteristics for a Middle-Ear Implant.

    Science.gov (United States)

    Shin, Dong Ho; Cho, Jin-Ho

    2018-05-24

    The design and implementation of a novel piezoelectric-based actuator for an implantable middle-ear hearing aid is described in this paper. The proposed actuator has excellent low-frequency output characteristics, and can generate high output in a specific frequency band by adjusting the mechanical resonance. The actuator consists of a piezoelectric element, a miniature bellows, a cantilever membrane, a metal ring support, a ceramic tip, and titanium housing. The optimal structure of the cantilever-membrane design, which determines the frequency characteristics of the piezoelectric actuator, was derived through finite element analysis. Based on the results, the piezoelectric actuator was implemented, and its performance was verified through a cadaveric experiment. It was confirmed that the proposed actuator provides better performance than currently used actuators, in terms of frequency characteristics.

  19. Alternative Actuation and Detection Principles for Resonating Cantilevers

    DEFF Research Database (Denmark)

    Grigorov, Alexander

    2006-01-01

    punktstrukturering og omrids skrivning. Vi undersøgte metal fabrikationen af hængende strukturer og opfaldt en ny proces, der involverer top-lag-afskrælning af en vinklet deponering. Vi anvendte denne proces til fremstillingen af vippe strukturer, der har z-formede, u-formede og rektangulære tværsnit. De nye...

  20. MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

  1. Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

    Science.gov (United States)

    Wasisto, H. S.; Merzsch, S.; Stranz, A.; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.

    2011-06-01

    A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanoparticles mass detection is presented in this work. The cantilever is actuated using a piezoactuator at the bottom end of the cantilever supporting frame. The oscillation of the microcantilever is detected by a self-sensing method utilizing an integrated full Wheatstone bridge as a piezoresistive strain gauge for signal read out. Fabricated piezoresistive cantilevers of 1.5 mm long, 30 μm wide and 25 μm thick have been employed. This self-sensing cantilever is used due to its simplicity, portability, high-sensitivity and low-cost batch microfabrication. In order to investigate air pollution sampling, a nanoparticles collection test of the piezoresistive cantilever sensor is performed in a sealed glass chamber with a stable carbon aerosol inside. The function principle of cantilever sensor is based on detecting the resonance frequency shift that is directly induced by an additional carbon nanoparticles mass deposited on it. The deposition of particles is enhanced by an electrostatic field. The frequency measurement is performed off-line under normal atmospheric conditions, before and after carbon nanoparticles sampling. The calculated equivalent mass-induced resonance frequency shift of the experiment is measured to be 11.78 +/- 0.01 ng and a mass sensitivity of 8.33 Hz/ng is obtained. The proposed sensor exhibits an effective mass of 2.63 μg, a resonance frequency of 43.92 kHz, and a quality factor of 1230.68 +/- 78.67. These results and analysis indicate that the proposed self-sensing piezoresistive silicon cantilever can offer the necessary potential for a mobile nanoparticles monitor.

  2. Use of magnetic micro-cantilevers to study the dynamics of 3D engineered smooth muscle constructs

    Science.gov (United States)

    Liu, Alan; Zhao, Ruogang; Copeland, Craig; Chen, Christopher; Reich, Daniel

    2013-03-01

    The normal and pathological response of arterial tissue to mechanical stimulus sheds important light on such conditions as atherosclerosis and hypertension. While most previous methods of determining the biomechanical properties of arteries have relied on excised tissue, we have devised a system that enables the growth and in situ application of forces to arrays of stable suspended microtissues consisting of arterial smooth muscle cells (SMCs). Briefly, this magnetic microtissue tester system consists of arrays of pairs of elastomeric magnetically actuated micro-cantilevers between which SMC-infused 3D collagen gels self-assemble and remodel into aligned microtissue constructs. These devices allow us to simultaneously apply force and track stress-strain relationships of multiple microtissues per substrate. We have studied the dilatory capacity and subsequent response of the tissues and find that the resulting stress-strain curves show viscoelastic behavior as well as a linear dynamic recovery. These results provide a foundation for elucidating the mechanical behavior of this novel model system as well as further experiments that simulate pathological conditions. Supported in part by NIH grant HL090747.

  3. Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

    Science.gov (United States)

    Hoof, Sebastian; Nand Gosvami, Nitya; Hoogenboom, Bart W.

    2012-12-01

    Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here, we show that a high-quality resonance (Q >20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity—as expressed via the minimum detectable force gradient—is hardly affected, because of the enhanced quality factor. Through the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up that includes magnetic actuation of the cantilevers and that can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

  4. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    International Nuclear Information System (INIS)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-01-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials. (paper)

  5. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    Science.gov (United States)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-08-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

  6. Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles

    Science.gov (United States)

    Walton, John P.; Coutu, Ronald A.; Starman, LaVern

    2015-02-01

    There are numerous applications for micromirror arrays seen in our everyday lives. From flat screen televisions and computer monitors, found in nearly every home and office, to advanced military weapon systems and space vehicles, each application bringing with it a unique set of requirements. The microelectromechanical systems (MEMS) industry has researched many ways micromirror actuation can be accomplished and the different constraints on performance each design brings with it. This paper investigates a new "zipper" approach to electrostatically driven micromirrors with the intent of improving duel plane beam steering by coupling large deflection angles, over 30°, and a fast switching speed. To accomplish this, an extreme initial deflection is needed which can be reached using high stress bimorph beams. Currently this requires long beams and high voltage for the electrostatic pull in or slower electrothermal switching. The idea for this "zipper" approach is to stack multiple beams of a much shorter length and allow for the deflection of each beam to be added together in order to reach the required initial deflection height. This design requires much less pull-in voltage because the pull-in of one short beam will in turn reduce the height of the all subsequent beams, making it much easier to actuate. Using modeling and simulation software to characterize operations characteristics, different bimorph cantilever beam configurations are explored in order to optimize the design. These simulations show that this new "zipper" approach increases initial deflection as additional beams are added to the assembly without increasing the actuation voltage.

  7. Highly Sensitive Polymer-based Cantilever-sensors for DNA Detection

    DEFF Research Database (Denmark)

    Gomez, Montserrat; Nordström, Maria; Alvarez, M.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel...... polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized...

  8. Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems

    Directory of Open Access Journals (Sweden)

    Nadine Noeth

    2013-12-01

    Full Text Available For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN and with different thicknesses. The integration of arrays of holes with different hole size and number of holes allows the modification of device sensitivity, theoretical detection limit and measurement range. For an average flow in the microliter range, the cantilever deflection is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external pumps connected to the microfluidic system.

  9. Highly sensitive polymer-based cantilever-sensors for DNA detection

    International Nuclear Information System (INIS)

    Calleja, M.; Nordstroem, M.; Alvarez, M.; Tamayo, J.; Lechuga, L.M.; Boisen, A.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers

  10. Highly sensitive polymer-based cantilever-sensors for DNA detection

    Energy Technology Data Exchange (ETDEWEB)

    Calleja, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain) and Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)]. E-mail: mcalleja@imm.cnm.csic.es; Nordstroem, M. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark); Alvarez, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Tamayo, J. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Lechuga, L.M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Boisen, A. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)

    2005-11-15

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.

  11. Fabrication of resonant micro cantilevers with integrated transparent fluidic channel

    DEFF Research Database (Denmark)

    Khan, Faheem; Schmid, Silvan; Davis, Zachary James

    2011-01-01

    Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density...

  12. Smart film actuators using biomass plastic

    International Nuclear Information System (INIS)

    Yoneyama, Satoshi; Tanaka, Nobuo

    2011-01-01

    This paper presents a novel smart film actuator based on the use of a biomass plastic as a piezoelectric film. Conventional polymeric smart sensors and actuators have been based upon synthetic piezoelectric polymer films such as PVDF. Almost all synthetic polymers are made from nearly depleted oil resources. In addition combustion of their materials releases carbon dioxide, thereby contributing to global warming. Thus at least two important sustainability principles are violated when employing synthetic polymers: avoiding depletable resources and avoiding ecosystem destruction. To overcome such problems, industrial plastic products made from synthetic polymers were developed to replace oil-based plastics with biomass plastics. This paper applies a biomass plastic with piezoelectricity such as poly-L-lactic acid (PLLA). As a result, PLLA film becomes a distributed parameter actuator per se, hence an environmentally conscious smart film actuator is developed. Firstly, this paper overviews the fundamental properties of piezoelectric synthetic polymers and biopolymers. The concept of carbon neutrality using biopolymers is mentioned. Then a two-dimensional modal actuator for exciting a specific structural mode is proposed. Furthermore, a biomass plastic-based cantilever beam with the capability of modal actuation is developed, the validity of the proposed smart film actuator based upon a biomass plastic being analytically as well as experimentally verified

  13. Digital Actuator Technology

    Energy Technology Data Exchange (ETDEWEB)

    Ken Thomas; Ted Quinn; Jerry Mauck; Richard Bockhorst

    2014-09-01

    There are significant developments underway in new types of actuators for power plant active components. Many of these make use of digital technology to provide a wide array of benefits in performance of the actuators and in reduced burden to maintain them. These new product offerings have gained considerable acceptance in use in process plants. In addition, they have been used in conventional power generation very successfully. This technology has been proven to deliver the benefits promised and substantiate the claims of improved performance. The nuclear industry has been reluctant to incorporate digital actuator technology into nuclear plant designs due to concerns due to a number of concerns. These could be summarized as cost, regulatory uncertainty, and a certain comfort factor with legacy analog technology. The replacement opportunity for these types of components represents a decision point for whether to invest in more modern technology that would provide superior operational and maintenance benefits. Yet, the application of digital technology has been problematic for the nuclear industry, due to qualification and regulatory issues. With some notable exceptions, the result has been a continuing reluctance to undertake the risks and uncertainties of implementing digital actuator technology when replacement opportunities present themselves. Rather, utilities would typically prefer to accept the performance limitations of the legacy analog actuator technologies to avoid impacts to project costs and schedules. The purpose of this report is to demonstrate that the benefits of digital actuator technology can be significant in terms of plant performance and that it is worthwhile to address the barriers currently holding back the widespread development and use of this technology. It addresses two important objectives in pursuit of the beneficial use of digital actuator technology for nuclear power plants: 1. To demonstrate the benefits of digital actuator

  14. High performing actuation system for use with a louver array for satellite thermal control. [design and performance tests on prototype Bourdon spiral configuration

    Science.gov (United States)

    Reusser, P. U.; Coebergh, J. A. F.

    1973-01-01

    A high performing actuation system has been developed to drive one pair or a set of 9 pairs of louver blades. The system uses a Bourdon spiral as the driving member. The response time of the liquid expansion of the spiral system is in the order of three seconds. Besides performance tests, qualification tests have been carried out on a prototype system, demonstrating that the actuation system withstands normal launching conditions; projected operating life of 7 years with more than 7000 cycles can be expected.

  15. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  16. Cantilevers orthodontics forces measured by fiber sensors

    Science.gov (United States)

    Schneider, Neblyssa; Milczewski, Maura S.; de Oliveira, Valmir; Guariza Filho, Odilon; Lopes, Stephani C. P. S.; Kalinowski, Hypolito J.

    2015-09-01

    Fibers Bragg Gratings were used to evaluate the transmission of the forces generates by orthodontic mechanic based one and two cantilevers used to move molars to the upright position. The results showed levels forces of approximately 0,14N near to the root of the molar with one and two cantilevers.

  17. Cantilever sensors: Nanomechanical tools for diagnostics

    DEFF Research Database (Denmark)

    Datar, R.; Kim, S.; Jeon, S.

    2009-01-01

    Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science and microfab......Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science...... and microfabrication technology for the label-free detection of biological molecules, allowing miniaturization. Molecular adsorption, when restricted to a single side of a deformable cantilever beam, results in measurable bending of the cantilever. This nanoscale deflection is caused by a variation in the cantilever...... surface stress due to biomolecular interactions and can be measured by optical or electrical means, thereby reporting on the presence of biomolecules. Biological specificity in detection is typically achieved by immobilizing selective receptors or probe molecules on one side of the cantilever using...

  18. Development and characterization of electrochemical cantilever sensor for bio/chemical sensing applications

    DEFF Research Database (Denmark)

    Quan, Xueling; Fischer, Lee MacKenzie; Boisen, Anja

    2011-01-01

    We report the improvements made to our previously developed electrochemical cantilever (EC) sensor, where nanoporous gold material is employed as working electrodes in microcantilever arrays, while combined counter-reference electrodes are integrated on the chip. For a surface stress change of 1m...

  19. The Correlated Dynamics of Micron-Scale Cantilevers in a Viscous Fluid

    Science.gov (United States)

    Robbins, Brian A.

    A number of microcantilever systems of fundamental importance are explored using theoretical and numerical methods to quantify and provide physical insights into the dynamics of experimentally accessible systems that include a variety of configurations and viscous fluids. It is first shown that the correlated dynamics of both a laterally and vertically offset cantilever pair can be accurately predicted by numerical simulations. This is verified by comparing the correlated dynamics yielded by numerical simulations with experimental measurement. It is also demonstrated that in order to obtain these accurate predictions, geometric details of the cantilever must be included in the numerical simulation to directly reflect the experimental cantilever. A microrheology technique that utilizes the fluctuation-dissipation theorem is proposed. It is shown that by including the frequency dependence of the fluid damping, improvements in accuracy of the predictions of the rheological properties of the surrounding fluid are observed over current techniques. The amplitude spectrum of a 2-D cantilever in a power-law fluid is studied. The resulting amplitude spectrum yielded a curve similar to an overdamped system. It is observed that the amplitude and noise spectrum yield the same qualitative response for a 2-D cantilever in a shear-thinning, power-law fluid. The correlated dynamics of a tethered vertically offset cantilever pair is investigated. It is shown that for a range of stiffness ratios, which is the ratio of the spring constant of the tethering relative to the cantilever spring constant, the change in the correlated dynamics of a Hookean spring tethered cantilever pair can be seen in the presence of fluid coupling. The dynamics of a spring-mass tethered, vertically offset cantilever pair is qualitatively studied by simplifying the model to an array of springs and masses. The resulting study found that the correlated dynamics of the displacement of mass of the tethered

  20. Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Johnson, Raegan Lynn [Iowa State Univ., Ames, IA (United States)

    2005-01-01

    In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the cantilever beam. This design not only improves the speed of imaging because the piezoelectric film replaces the piezo-tube as an actuator, but the film can also act as a sensor. In addition, the piezoelectric film can excite the cantilever beam near its resonance frequency. This project aims to fabricate piezoelectric microcantilevers for use in the AFM. Prior to fabricating the cantilevers and also part of this project, a systematic study was performed to examine the effects of deposition conditions on the quality of piezoelectric ZnO thin films deposited by RF sputtering. These results will be presented. The deposition parameters that produced the highest quality ZnO film were used in the fabrication of the piezoelectric cantilevers. Unfortunately, the fabricated cantilevers warped due to the intrinsic stress of the ZnO film and were therefore not usable in the AFM. The complete fabrication process will be detailed, the results will be discussed and reasons for the warping will be examined.

  1. Oscillations of end loaded cantilever beams

    International Nuclear Information System (INIS)

    Macho-Stadler, E; Elejalde-García, M J; Llanos-Vázquez, R

    2015-01-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam. (paper)

  2. Oscillations of end loaded cantilever beams

    Science.gov (United States)

    Macho-Stadler, E.; Elejalde-García, M. J.; Llanos-Vázquez, R.

    2015-09-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam.

  3. Higher Order Modes Excitation of Micro Cantilever Beams

    KAUST Repository

    Jaber, Nizar

    2014-05-01

    In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.

  4. Dynamic Electromechanical Coupling of Piezoelectric Bending Actuators

    Directory of Open Access Journals (Sweden)

    Mostafa R. A. Nabawy

    2016-01-01

    Full Text Available Electromechanical coupling defines the ratio of electrical and mechanical energy exchanged during a flexure cycle of a piezoelectric actuator. This paper presents an analysis of the dynamic electromechanical coupling factor (dynamic EMCF for cantilever based piezoelectric actuators and provides for the first time explicit expressions for calculation of dynamic EMCF based on arrangement of passive and active layers, layer geometry, and active and passive materials selection. Three main cantilever layer configurations are considered: unimorph, dual layer bimorph and triple layer bimorph. The actuator is modeled using standard constitutive dynamic equations that relate deflection and charge to force and voltage. A mode shape formulation is used for the cantilever dynamics that allows the generalized mass to be the actual mass at the first resonant frequency, removing the need for numerical integration in the design process. Results are presented in the form of physical insight from the model structure and also numerical evaluations of the model to provide trends in dynamic EMCF with actuator design parameters. For given material properties of the active and passive layers and given system overall damping ratio, the triple layer bimorph topology is the best in terms of theoretically achievable dynamic EMCF, followed by the dual layer bimorph. For a damping ratio of 0.035, the dynamic EMCF for an example dual layer bimorph configuration is 9% better than for a unimorph configuration. For configurations with a passive layer, the ratio of thicknesses for the passive and active layers is the primary geometric design variable. Choice of passive layer stiffness (Young’s modulus relative to the stiffness of the material in the active layer is an important materials related design choice. For unimorph configurations, it is beneficial to use the highest stiffness possible passive material, whereas for triple layer bimorph configurations, the passive

  5. Bistable microelectromechanical actuator

    Science.gov (United States)

    Fleming, James G.

    1999-01-01

    A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

  6. Microelectromechanical systems integrating molecular spin crossover actuators

    Energy Technology Data Exchange (ETDEWEB)

    Manrique-Juarez, Maria D. [LCC, CNRS and Université de Toulouse, UPS, INP, F-31077 Toulouse (France); LAAS, CNRS and Université de Toulouse, INSA, UPS, F-31077 Toulouse (France); Rat, Sylvain; Salmon, Lionel; Molnár, Gábor; Bousseksou, Azzedine, E-mail: liviu.nicu@laas.fr, E-mail: azzedine.bousseksou@lcc-toulouse.fr [LCC, CNRS and Université de Toulouse, UPS, INP, F-31077 Toulouse (France); Mathieu, Fabrice; Saya, Daisuke; Séguy, Isabelle; Leïchlé, Thierry; Nicu, Liviu, E-mail: liviu.nicu@laas.fr, E-mail: azzedine.bousseksou@lcc-toulouse.fr [LAAS, CNRS and Université de Toulouse, INSA, UPS, F-31077 Toulouse (France)

    2016-08-08

    Silicon MEMS cantilevers coated with a 200 nm thin layer of the molecular spin crossover complex [Fe(H{sub 2}B(pz){sub 2}){sub 2}(phen)] (H{sub 2}B(pz){sub 2} = dihydrobis(pyrazolyl)borate and phen = 1,10-phenantroline) were actuated using an external magnetic field and their resonance frequency was tracked by means of integrated piezoresistive detection. The light-induced spin-state switching of the molecules from the ground low spin to the metastable high spin state at 10 K led to a well-reproducible shift of the cantilever's resonance frequency (Δf{sub r} = −0.52 Hz). Control experiments at different temperatures using coated as well as uncoated devices along with simple calculations support the assignment of this effect to the spin transition. This latter translates into changes in mechanical behavior of the cantilever due to the strong spin-state/lattice coupling. A guideline for the optimization of device parameters is proposed so as to efficiently harness molecular scale movements for large-scale mechanical work, thus paving the road for nanoelectromechanical systems (NEMS) actuators based on molecular materials.

  7. Wavefront correction performed by a deformable mirror of arbitrary actuator pattern within a multireflection waveguide.

    Science.gov (United States)

    Ma, Xingkun; Huang, Lei; Bian, Qi; Gong, Mali

    2014-09-10

    The wavefront correction ability of a deformable mirror with a multireflection waveguide was investigated and compared via simulations. By dividing a conventional actuator array into a multireflection waveguide that consisted of single-actuator units, an arbitrary actuator pattern could be achieved. A stochastic parallel perturbation algorithm was proposed to find the optimal actuator pattern for a particular aberration. Compared with conventional an actuator array, the multireflection waveguide showed significant advantages in correction of higher order aberrations.

  8. Piezoelectric Actuator Modeling Using MSC/NASTRAN and MATLAB

    Science.gov (United States)

    Reaves, Mercedes C.; Horta, Lucas G.

    2003-01-01

    This paper presents a procedure for modeling structures containing piezoelectric actuators using MSCMASTRAN and MATLAB. The paper describes the utility and functionality of one set of validated modeling tools. The tools described herein use MSCMASTRAN to model the structure with piezoelectric actuators and a thermally induced strain to model straining of the actuators due to an applied voltage field. MATLAB scripts are used to assemble the dynamic equations and to generate frequency response functions. The application of these tools is discussed using a cantilever aluminum beam with a surface mounted piezoelectric actuator as a sample problem. Software in the form of MSCINASTRAN DMAP input commands, MATLAB scripts, and a step-by-step procedure to solve the example problem are provided. Analysis results are generated in terms of frequency response functions from deflection and strain data as a function of input voltage to the actuator.

  9. Three-way flexible cantilever probes for static contact

    DEFF Research Database (Denmark)

    Wang, Fei; Petersen, Dirch Hjorth; Jensen, Helle Vendelbo

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze...

  10. Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

    Science.gov (United States)

    Ali, Shaikh M.; Phinney, Leslie M.

    2003-01-01

    °Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

  11. Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers.

    Science.gov (United States)

    An, Kun; Jin, Xuechen; Meng, Jiang; Li, Xiao; Ren, Yifeng

    2018-05-13

    Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb 0.97 La 0.02 )(Zr 0.95 Ti 0.05 )O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

  12. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    International Nuclear Information System (INIS)

    Keller, Stephan; Boisen, Anja; Haefliger, Daniel

    2010-01-01

    SU-8 cantilevers with a thickness of 2 µm were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T PEB = 50 °C followed by a hard bake at T HB = 90 °C proved to be optimal to ensure low cantilever bending and low rotational deformation due to excellent device release and low change of these properties with time. With the optimized process, the reproducible fabrication of arrays with 2 µm thick cantilevers with a length of 500 µm and an initial bending of less than 20 µm was possible. The theoretical spring constant of these cantilevers is k = 4.8 ± 2.5 mN m −1 , which is comparable to the value for Si cantilevers with identical dimensions and a thickness of 500 nm.

  13. Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

    Science.gov (United States)

    Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

    2015-12-01

    A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling.

  14. Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

    International Nuclear Information System (INIS)

    Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

    2015-01-01

    A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling. (paper)

  15. Modelling of Spring Constant and Pull-down Voltage of Non-uniform RF MEMS Cantilever Incorporating Stress Gradient

    Directory of Open Access Journals (Sweden)

    Shimul Chandra SAHA

    2008-11-01

    Full Text Available We have presented a model for spring constant and pull-down voltage of a non-uniform radio frequency microelectromechanical systems (RF MEMS cantilever that works on electrostatic actuation. The residual stress gradient in the beam material that may arise during the fabrication process is also considered in the model. Using basic force deflection calculation of the suspended beam, a stand-alone model for the spring constant and pull-down voltage of the non-uniform cantilever is developed. To compare the model, simulation is performed using standard Finite Element Method (FEM analysis tolls from CoventorWare. The model matches very well with the FEM simulation results. The model will offer an efficient means of design, analysis, and optimization of RF MEMS cantilever switches.

  16. A mechanical model of a non-uniform ionomeric polymer metal composite actuator

    International Nuclear Information System (INIS)

    Anton, Mart; Aabloo, Alvo; Punning, Andres; Kruusmaa, Maarja

    2008-01-01

    This paper describes a mechanical model of an IPMC (ionomeric polymer metal composite) actuator in a cantilever beam configuration. The main contribution of our model is that it gives the most detailed description reported so far of the quasistatic mechanical behaviour of the actuator with non-uniform bending at large deflections. We also investigate a case where part of an IPMC actuator is replaced with a rigid elongation and demonstrate that this configuration would make the actuator behave more linearly. The model is experimentally validated with MuscleSheet(TM) IPMCs, purchased from BioMimetics Inc

  17. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad

    2016-06-16

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.

  18. Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

    2017-06-01

    In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next

  19. Micromechanical testing of SU-8 cantilevers

    OpenAIRE

    Hopcroft, M; Kramer, T; Kim, G; Takashima, K; Higo, Y; Moore, D; Brugger, J

    2005-01-01

    SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

  20. Micro-mechanics of ionic electroactive polymer actuators

    Science.gov (United States)

    Punning, Andres; Põldsalu, Inga; Kaasik, Friedrich; Vunder, Veiko; Aabloo, Alvo

    2015-04-01

    Commonly, modeling of the bending behavior of the ionic electroactive polymer (IEAP) actuators is based on the classical mechanics of cantilever beam. It is acknowledged, that the actuation of the ionic electroactive polymer (IEAP) actuators is symmetric about the centroid - the convex side of the actuator is expanding and the concave side is contracting for exactly the same amount, while the thickness of the actuator remains invariant. Actuating the IEAP actuators and sensors under scanning electron microscope (SEM), in situ, reveals that for some types of them this approach is incorrect. Comparison of the SEM micrographs using the Digital Image Correction (DIC) method results with the precise strain distribution of the IEAP actuators in two directions: in the axial direction, and in the direction of thickness. This information, in turn, points to the physical processes taking place within the electrodes as well as membrane of the trilayer laminate of sub-millimeter thickness. Comparison of the EAP materials, engaged as an actuator as well as a sensor, reveals considerable differences between the micro-mechanics of the two modes.

  1. Nonlinear mathematical modeling of vibrating motion of nanomechanical cantilever active probe

    Directory of Open Access Journals (Sweden)

    Reza Ghaderi

    Full Text Available Nonlinear vibration response of nanomechanical cantilever (NMC active probes in atomic force microscope (AFM application has been studied in the amplitude mode. Piezoelectric layer is placed piecewise and as an actuator on NMC. Continuous beam model has been chosen for analysis with regard to the geometric discontinuities of piezoelectric layer attachment and NMC's cross section. The force between the tip and the sample surface is modeled using Leonard-Jones potential. Assuming that cantilever is inclined to the sample surface, the effect of nonlinear force on NMC is considered as a shearing force and the concentrated bending moment is regarded at the end. Nonlinear frequency response of NMC is obtained close to the sample surface using the dynamic modeling. It is then become clear that the distance and angle of NMC, the probe length, and the geometric dimensions of piezoelectric layer can affect frequency response bending of the curve.

  2. Application of a LIPCA for the structural vibration suppression of an aluminum cantilever beam with a tip mass

    International Nuclear Information System (INIS)

    Martua, Landong; Heo, Seok; Goo, Nam Seo

    2007-01-01

    Use of bare PZT as an actuator in the field of active vibration suppression may cause some drawbacks such as critical breaks in the installation process, short circuits in the host material and low fatigue performance. To alleviate these problems, we developed a new actuator called a lightweight piezocomposite actuator (LIPCA). The LIPCA has five layers: three glass-epoxy layers, a carbon-epoxy layer and a PZT layer. We implemented a LIPCA as an actuator to suppress the vibration of an aluminum cantilever beam with a tip mass. For the control algorithm in our test, we used positive position feedback. The filter frequency for this type of feedback should be tuned to the frequency of the target mode. The first three experimental natural frequencies of the aluminum cantilever beam agree well with the results of finite element methods. The effectiveness of using a LIPCA as an actuator in active vibration suppression was investigated with respect to the time and frequency domains, and the experimental results show that LIPCAs can significantly reduce the amplitude of forced vibrations as well as the settling time of free vibrations

  3. Ti Ni shape memory alloy film-actuated microstructures for a MEMS probe card

    Science.gov (United States)

    Namazu, Takahiro; Tashiro, Youichi; Inoue, Shozo

    2007-01-01

    This paper describes the development of a novel silicon (Si) cantilever beam device actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. A Ti-Ni SMA film can yield high work output per unit volume, so a Ti-Ni film-actuated Si cantilever beam device is a prospective tool for use as a microelectromechanical system (MEMS) probe card that provides a relatively large contact force between the probe and electrode pad in spite of its minute size. Before fabrication of the device, the thermomechanical deformation behavior of Ti-Ni SMA films with various compositions was investigated in order to determine a sufficient constituent film for a MEMS actuator. As a result, Ti-Ni films having a Ti content of 50.2 to 52.6 atomic% (at%) were found to be usable for operation as a room temperature actuator. We have developed a Ti-Ni film-actuated Si cantilever beam device, which can produce a contact force by the cantilever bending when in contact, and also by the shape memory effect (SME) of the Ti-Ni film arising from Joule heating. The SME of the Ti-Ni film can generate an additional average contact force of 200 µN with application of 500 mW to the film. In addition to physical contact, a dependable electric contact between the Au film-coated probe tip and the Al film electrode was achieved. However, the contact resistance exhibited an average value of 25 Ω, which would have to be reduced for practical use. Reliability tests confirmed the durability of the Ti-Ni film-actuated Si cantilever-beam, in that the contact resistance was constant throughout a large number of physical contacts (>104 times).

  4. Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

    Science.gov (United States)

    2015-08-01

    surface coating developed during the NiTi deposition or anneal that is relatively resistant to the wet etch. Fig. 2 SEMs after the NiTi wet -etch...SEMs of NiTi devices after the 600 °C anneal , wet -etch patterning of the NiTi. A 120-nm Au capping layer was also sputtered. Figure 3a shows a 200-nm...Ni50Ti50 Cantilever 2 3. Results and Discussion 3 3.1 Wet -Etch Patterning NiTi 3 3.2 Dry-Etch Release of NiTi Devices 5 3.3 Thermal Actuation of

  5. Improved process for forming a three-dimensional undersurface on a printed cantilever

    Science.gov (United States)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

    2018-05-01

    An improvement in the lift-on offset printing process is reported as a means of enabling the structural customization of hollow structures used as moving parts of sensors and actuators. The improved process can add structures to the underside of a hollow structure by modifying the preparation of the pre-structure. As a demonstration, the mechanical displacement of a cantilever in a gravitational acceleration sensor was enhanced by the addition of a proof mass. The improved process can be expected to further produce functionalized hollow structures by an efficient manufacturing process.

  6. Modelling and Simulation of Novel Three Arm MEMS Actuators and Its Application

    International Nuclear Information System (INIS)

    Pandiyan, Jagadeesh; Umapathy, M; Balachandar, S; Arumugam, M; Ramasamy, S; Gajjar, Nilesh C

    2006-01-01

    This paper presents the design and Finite Element Model (FEM) simulation of a novel electrothermal microactuators and arrays. It is a single material microactuator which deflects at its tips by differential thermal expansion of its constituent parts. The electrothermal actuator consists of three thin arms, three thin blades and two electrical connection pads. The goal of this coupled electrothermal actuator design was to multiply the force by adding the individual contributions of all the three actuators. The difference in magnitude of blade deflections depends on the geometrical characteristics of the actuators. The thermal deformation and thermal stability are easily controllable. The simulation employing ANSYS/Multiphysics software results include force, deflection, thermal stress, ideal electrothermal actuator and array geometries. The main advantage of this electrothermal actuator is large deflection of blades with very low actuation voltage in comparison with electrostatic actuators. A typical application in a micromirror is shown to illustrate the utility of these actuators and arrays

  7. Actuators for smart applications

    NARCIS (Netherlands)

    Paternoster, Alexandre; de Boer, Andries; Loendersloot, Richard; Akkerman, Remko; D. Brei,; M. Frecker,

    2010-01-01

    Actuator manufacturers are developing promising technologies which meet high requirements in performance, weight and power consumption. Conventionally, actuators are characterized by their displacement and load performance. This hides the dynamic aspects of those actuation solutions. Work per weight

  8. Cantilever piezoelectric energy harvester with multiple cavities

    International Nuclear Information System (INIS)

    S Srinivasulu Raju; M Umapathy; G Uma

    2015-01-01

    Energy harvesting employing piezoelectric materials in mechanical structures such as cantilever beams, plates, diaphragms, etc, has been an emerging area of research in recent years. The research in this area is also focused on structural tailoring to improve the harvested power from the energy harvesters. Towards this aim, this paper presents a method for improving the harvested power from a cantilever piezoelectric energy harvester by introducing multiple rectangular cavities. A generalized model for a piezoelectric energy harvester with multiple rectangular cavities at a single section and two sections is developed. A method is suggested to optimize the thickness of the cavities and the number of cavities required to generate a higher output voltage for a given cantilever beam structure. The performance of the optimized energy harvesters is evaluated analytically and through experimentation. The simulation and experimental results show that the performance of the energy harvester can be increased with multiple cavities compared to the harvester with a single cavity. (paper)

  9. Self-heating in piezoresistive cantilevers.

    Science.gov (United States)

    Doll, Joseph C; Corbin, Elise A; King, William P; Pruitt, Beth L

    2011-05-30

    We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

  10. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films. During the impact, the droplet kinetic energy is transferred into the form of mechanical stress forcing the piezoelectric structure to vibrate. Experimental results show energy of 0.3 μJ per droplet. The scenario of moderate falling drop intensity, i.e. 230 drops per second, yields a total energy of 400 μJ. © 2012 The Institution of Engineering and Technology.

  11. An Artificial Nose Based on Microcantilever Array Sensors

    International Nuclear Information System (INIS)

    Lang, H P; Ramseyer, J P; Grange, W; Braun, T; Schmid, D; Hunziker, P; Jung, C; Hegner, M; Gerber, C

    2007-01-01

    We used microfabricated cantilever array sensors for an artificial nose setup. Each cantilever is coated on its top surface with a polymer layer. Volatile gaseous analytes are detected by tracking the diffusion process of the molecules into the polymer layers, resulting in swelling of the polymer layers and therewith bending of the cantilevers. From the bending pattern of all cantilevers in the array, a characteristic 'fingerprint' of the analyte is obtained, which is evaluated using principal component analysis. In a flow of dry nitrogen gas, the bending of the cantilevers is reverted to its initial state before exposure to the analyte, which allows reversible and reproducible operation of the sensor. We show examples of detection of solvents, perfume essences and beverage flavors. In a medical application, the setup provides indication of presence of diseases in patient's breath samples

  12. An Artificial Nose Based on Microcantilever Array Sensors

    Energy Technology Data Exchange (ETDEWEB)

    Lang, H P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Ramseyer, J P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Grange, W [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Braun, T [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Schmid, D [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Hunziker, P [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Jung, C [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Hegner, M [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland); Gerber, C [National Center of Competence in Research for Nanoscale Science, Institute of Physics of Univesity of Basel, Klingelbergstrasse 82, CH-4056 Basel (Switzerland)

    2007-03-15

    We used microfabricated cantilever array sensors for an artificial nose setup. Each cantilever is coated on its top surface with a polymer layer. Volatile gaseous analytes are detected by tracking the diffusion process of the molecules into the polymer layers, resulting in swelling of the polymer layers and therewith bending of the cantilevers. From the bending pattern of all cantilevers in the array, a characteristic 'fingerprint' of the analyte is obtained, which is evaluated using principal component analysis. In a flow of dry nitrogen gas, the bending of the cantilevers is reverted to its initial state before exposure to the analyte, which allows reversible and reproducible operation of the sensor. We show examples of detection of solvents, perfume essences and beverage flavors. In a medical application, the setup provides indication of presence of diseases in patient's breath samples.

  13. Pull-in behavior analysis of vibrating functionally graded micro-cantilevers under suddenly DC voltage

    Directory of Open Access Journals (Sweden)

    Jamal Zare

    2015-01-01

    Full Text Available The present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step DC voltage while the fringing-field effect is taken into account in the vibrational equation of motion. By employing modern asymptotic approach namely Homotopy Perturbation Method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the influences of material properties and actuation voltage on dynamic pull-in behavior are investigated. It is demonstrated that the auxiliary term in the homotopy perturbation method is extremely effective for higher order approximation and two terms in series expansions are sufficient to produce an acceptable solution. The strength of this analytical procedure is verified through comparison with numerical results.

  14. Mechanical stretching effect on the actuator performance of cellulose electroactive paper

    International Nuclear Information System (INIS)

    Kim, Jung-Hwan; Yun, Ki-Ju; Kim, Joo-Hyung; Kim, Jaehwan

    2009-01-01

    The mechanical stretching effect on the actuating performance of electroactive cellulose paper (EAPap) was studied. A lattice elongation of cellulose fibrils due to in-plane tensile stress along the stretching direction was observed by the x-ray diffraction method. The shrinkage of the fibril diameter as a function of stretching ratio was confirmed by surface and cross-sectional images. While the actuator performance in terms of bending displacement decreased as the stretching ratio increased, the resonance frequency linearly increased as the stretching ratio increased, which was compared with the theoretical frequency data found from a cantilever beam model. The actuator efficiency was evaluated from the electrical input power consumption and the mechanical output power of an EAPap actuator. It was revealed that the stretching process increased the electro-mechanical efficiency of the EAPap actuator. The mechanism of the influence of the stretching effect on the performance of an EAPap actuator is discussed

  15. Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

    DEFF Research Database (Denmark)

    Jiang, Chenhui; Johansen, Tom Keinicke; Jónasson, Sævar Þór

    2011-01-01

    This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC...

  16. Polymeric cantilever-based biosensors with integrated readout

    DEFF Research Database (Denmark)

    Johansson, Alicia; Blagoi, Gabriela; Boisen, Anja

    2006-01-01

    The authors present an SU-8 cantilever chip with integrated piezoresistors for detection of surface stress changes due to adsorption of biomolecules on the cantilever surface. Mercaptohexanol is used as a model biomolecule to study molecular interactions with Au-coated SU-8 cantilevers and surfac...

  17. Performance study of a hydrogen powered metal hydride actuator

    International Nuclear Information System (INIS)

    Bhuiya, Md Mainul Hossain; Kim, Kwang J

    2016-01-01

    A thermally driven hydrogen powered actuator integrating metal hydride hydrogen storage reactor, which is compact, noiseless, and able to generate smooth actuation, is presented in this article. To test the plausibility of a thermally driven actuator, a conventional piston type actuator was integrated with LaNi 5 based hydrogen storage system. Copper encapsulation followed by compaction of particles into pellets, were adopted to improve overall thermal conductivity of the reactor. The operation of the actuator was thoroughly investigated for an array of operating temperature ranges. Temperature swing of the hydride reactor triggering smooth and noiseless actuation over several operating temperature ranges were monitored for quantification of actuator efficiency. Overall, the actuator generated smooth and consistent strokes during repeated cycles of operation. The efficiency of the actuator was found to be as high as 13.36% for operating a temperature range of 20 °C–50 °C. Stress–strain characteristics, actuation hysteresis etc were studied experimentally. Comparison of stress–strain characteristics of the proposed actuator with traditional actuators, artificial muscles and so on was made. The study suggests that design modification and use of high pressure hydride may enhance the performance and broaden the application horizon of the proposed actuator in future. (paper)

  18. Parametric resonance of intrinsic localized modes in coupled cantilever arrays

    Energy Technology Data Exchange (ETDEWEB)

    Kimura, Masayuki, E-mail: kimura.masayuki.8c@kyoto-u.ac.jp [Department of Electrical Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510 (Japan); Matsushita, Yasuo [Advanced Mathematical Institute, Osaka City University, 3-3-138 Sughimoto, Sumiyoshi-ku, Osaka 558-8585 (Japan); Hikihara, Takashi [Department of Electrical Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510 (Japan)

    2016-08-19

    In this study, the parametric resonances of pinned intrinsic localized modes (ILMs) were investigated by computing the unstable regions in parameter space consisting of parametric excitation amplitude and frequency. In the unstable regions, the pinned ILMs were observed to lose stability and begin to fluctuate. A nonlinear Klein–Gordon, Fermi–Pasta–Ulam-like, and mixed lattices were investigated. The pinned ILMs, particularly in the mixed lattice, were destabilized by parametric resonances, which were determined by comparing the shapes of the unstable regions with those in the Mathieu differential equation. In addition, traveling ILMs could be generated by parametric excitation. - Highlights: • Destabilization of intrinsic localized modes (ILMs) by parametric excitation is investigated for FPU, NKG, and mixed lattices. • Frequency and amplitude of parametric excitation is determined based on characteristic multipliers of ILMs. • Unstable regions for the mixed lattice case show very similar shape to those of the Mathieu equation. • ILMs become unstable by causing parametric resonance.

  19. Parametric resonance of intrinsic localized modes in coupled cantilever arrays

    International Nuclear Information System (INIS)

    Kimura, Masayuki; Matsushita, Yasuo; Hikihara, Takashi

    2016-01-01

    In this study, the parametric resonances of pinned intrinsic localized modes (ILMs) were investigated by computing the unstable regions in parameter space consisting of parametric excitation amplitude and frequency. In the unstable regions, the pinned ILMs were observed to lose stability and begin to fluctuate. A nonlinear Klein–Gordon, Fermi–Pasta–Ulam-like, and mixed lattices were investigated. The pinned ILMs, particularly in the mixed lattice, were destabilized by parametric resonances, which were determined by comparing the shapes of the unstable regions with those in the Mathieu differential equation. In addition, traveling ILMs could be generated by parametric excitation. - Highlights: • Destabilization of intrinsic localized modes (ILMs) by parametric excitation is investigated for FPU, NKG, and mixed lattices. • Frequency and amplitude of parametric excitation is determined based on characteristic multipliers of ILMs. • Unstable regions for the mixed lattice case show very similar shape to those of the Mathieu equation. • ILMs become unstable by causing parametric resonance.

  20. Calibration of higher eigenmodes of cantilevers

    International Nuclear Information System (INIS)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger; Lysy, Martin

    2016-01-01

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  1. Microstructure cantilever beam for current measurement

    Directory of Open Access Journals (Sweden)

    M.T.E. Khan

    2010-01-01

    Full Text Available Most microelectromechanical systems (MEMS sensors are based on the microcantilever technology, which uses a broad range of design materials and structures. The benefit ofMEMStechnology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. A free-end cantilever beam with a magnetic material mass has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever beam to an externally-applied magnetic field. The cantilever was designed to form a capacitance transducer, which consisted of variable capacitance where electrical and mechanical energies were exchanged. The aim of this paper was to analyse the system design of the microcantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency, was applied, the cantilever beam exhibited a vibration motion along the vertical axis when placed closer to the line current. This motion created corresponding capacitance changes and generated a voltage output proportional to the capacitive change in the signal-processing circuitry attached to the microcantilever. The equivalent massspring system theory was used to describe and analyse the effect of the natural frequency of the system vibrations and motion due to the applied magnetic field, in a single-degree of freedom. The main application of this microcantilever is in current measurements to develop a non-contact current sensor mote.

  2. Calibration of higher eigenmodes of cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger [Asylum Research, an Oxford Instruments Company, Santa Barbara, California 93117 (United States); Lysy, Martin [Department of Statistics and Actuarial Science, University of Waterloo, Waterloo, Ontario N2L 3G1 (Canada)

    2016-07-15

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  3. Plasma actuators for bluff body flow control

    Science.gov (United States)

    Kozlov, Alexey V.

    noise. A tandem cylinder configuration with the plasma actuation on the upstream cylinder is investigated using surface dynamic pressure sensors. As a result of the plasma actuation, the surface pressure fluctuations on the downstream cylinder are reduced by about two times at the free-stream velocity of 40 m/s (ReD = 164,000). In addition, this study presents the results of a parametric experimental investigation aimed at optimizing the body force produced by single dielectric barrier discharge (SDBD) plasma actuators used for aerodynamic flow control. A primary goal of the study is the improvement of actuator authority for flow control applications at higher Reynolds number than previously possible. The study examines the effects of dielectric material and thickness, applied voltage amplitude and frequency, voltage waveform, exposed electrode geometry, covered electrode width and multiple actuator arrays. The metric used to evaluate the performance of the actuator in each case is the measured actuator-induced thrust which is proportional to the total body force. It is demonstrated that actuators constructed with thick dielectric material of low dielectric constant and operated at low frequency AC voltage produce a body force that is an order of magnitude larger than that obtained by the Kapton-based actuators used in many previous plasma flow control studies. These actuators allow operation at much higher applied voltages without the formation of discrete streamers which lead to body force saturation.

  4. Development of a microfabricated electrochemical-cantilever hybrid platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Pedersen, Christoffer; Elkjær, Karl

    2011-01-01

    The design and fabrication of a combined electrochemical-cantilever microfluidic system is described. A chip integrating cantilevers with electrodes into a microchannel is presented with the accompanying polymer flow cell. Issues such as electrical and fluid connections are addressed......, electromechanical behavior in ionic solution is investigated, and two uses of the system are demonstrated. First, all cantilevers are functionalized with cysteine, to facilitate detection of Cu2+ ions, then one cantilever is electrochemically cleaned in situ to generate a reference cantilever for differential...

  5. 2D MEMS electrostatic cantilever waveguide scanner for potential image display application

    Directory of Open Access Journals (Sweden)

    Gu Kebin

    2015-01-01

    Full Text Available This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input. A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5μm beam diameter is observed at the focal plane. The transmission efficiency is low (~10% and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

  6. Flight control actuation system

    Science.gov (United States)

    Wingett, Paul T. (Inventor); Gaines, Louie T. (Inventor); Evans, Paul S. (Inventor); Kern, James I. (Inventor)

    2006-01-01

    A flight control actuation system comprises a controller, electromechanical actuator and a pneumatic actuator. During normal operation, only the electromechanical actuator is needed to operate a flight control surface. When the electromechanical actuator load level exceeds 40 amps positive, the controller activates the pneumatic actuator to offset electromechanical actuator loads to assist the manipulation of flight control surfaces. The assistance from the pneumatic load assist actuator enables the use of an electromechanical actuator that is smaller in size and mass, requires less power, needs less cooling processes, achieves high output forces and adapts to electrical current variations. The flight control actuation system is adapted for aircraft, spacecraft, missiles, and other flight vehicles, especially flight vehicles that are large in size and travel at high velocities.

  7. Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection

    International Nuclear Information System (INIS)

    Goessling, B A; Lucas, T M; Moiseeva, E V; Aebersold, J W; Harnett, C K

    2011-01-01

    In this paper, we explore microfabricated bistable actuators released as thin films from a silicon wafer. The actuators are based on a serpentine design where two cantilevers are coupled at the tips by a thin-film bar. These devices are parameterized by two lengths: cantilever length and the length of the coupling bar. These two dimensions are systematically varied to study the effect of design parameters on bistability. The three-dimensional devices have extremely large deflection (hundreds of microns rather than tens of microns for most planar microactuators of similar size) and are thermally actuated out of the plane of the wafer by applying a bias across either the left or right side of the serpentine. The bistability of these devices is evaluated using electron and optical microscopy. Potential applications include non-volatile mechanical memory, optical shutters, and reconfigurable antenna elements

  8. Swarm intelligence algorithms for integrated optimization of piezoelectric actuator and sensor placement and feedback gains

    International Nuclear Information System (INIS)

    Dutta, Rajdeep; Ganguli, Ranjan; Mani, V

    2011-01-01

    Swarm intelligence algorithms are applied for optimal control of flexible smart structures bonded with piezoelectric actuators and sensors. The optimal locations of actuators/sensors and feedback gain are obtained by maximizing the energy dissipated by the feedback control system. We provide a mathematical proof that this system is uncontrollable if the actuators and sensors are placed at the nodal points of the mode shapes. The optimal locations of actuators/sensors and feedback gain represent a constrained non-linear optimization problem. This problem is converted to an unconstrained optimization problem by using penalty functions. Two swarm intelligence algorithms, namely, Artificial bee colony (ABC) and glowworm swarm optimization (GSO) algorithms, are considered to obtain the optimal solution. In earlier published research, a cantilever beam with one and two collocated actuator(s)/sensor(s) was considered and the numerical results were obtained by using genetic algorithm and gradient based optimization methods. We consider the same problem and present the results obtained by using the swarm intelligence algorithms ABC and GSO. An extension of this cantilever beam problem with five collocated actuators/sensors is considered and the numerical results obtained by using the ABC and GSO algorithms are presented. The effect of increasing the number of design variables (locations of actuators and sensors and gain) on the optimization process is investigated. It is shown that the ABC and GSO algorithms are robust and are good choices for the optimization of smart structures

  9. Environmentally responsive optical microstructured hybrid actuator assemblies and applications thereof

    Science.gov (United States)

    Aizenberg, Joanna; Aizenberg, Michael; Kim, Philseok

    2016-01-05

    Microstructured hybrid actuator assemblies in which microactuators carrying designed surface properties to be revealed upon actuation are embedded in a layer of responsive materials. The microactuators in a microactuator array reversibly change their configuration in response to a change in the environment without requiring an external power source to switch their optical properties.

  10. Magnetic Actuation of Biological Systems

    Science.gov (United States)

    Lauback, Stephanie D.

    Central to the advancement of many biomedical and nanotechnology capabilities is the capacity to precisely control the motion of micro and nanostructures. These applications range from single molecule experiments to cell isolation and separation, to drug delivery and nanomachine manipulation. This dissertation focuses on actuation of biological micro- and nano-entities through the use of weak external magnetic fields, superparamagnetic beads, and ferromagnetic thin films. The magnetic platform presents an excellent method for actuation of biological systems due to its ability to directly control the motion of an array of micro and nanostructures in real-time with calibrated picoNewton forces. The energy landscape of two ferromagnetic thin film patterns (disks and zigzag wires) is experimentally explored and compared to corresponding theoretical models to quantify the applied forces and trajectories of superparamagnetic beads due to the magnetic traps. A magnetic method to directly actuate DNA nanomachines in real-time with nanometer resolution and sub-second response times using micromagnetic control was implemented through the use of stiff DNA micro-levers which bridged the large length scale mismatch between the micro-actuator and the nanomachine. Compared to current alternative methods which are limited in the actuation speeds and the number of reconfiguration states of DNA constructs, this magnetic approach enables fast actuation (˜ milliseconds) and reconfigurable conformations achieved through a continuous range of finely tuned steps. The system was initially tested through actuation of the stiff arm tethered to the surface, and two prototype DNA nanomachines (rotor and hinge) were successfully actuated using the stiff mechanical lever. These results open new possibilities in the development of functional robotic systems at the molecular scale. In exploiting the use of DNA stiff levers, a new technique was also developed to investigate the emergence of the

  11. Calibration of optical cantilever deflection readers

    International Nuclear Information System (INIS)

    Hu Zhiyu; Seeley, Tim; Kossek, Sebastian; Thundat, Thomas

    2004-01-01

    Because of its ultrahigh sensitivity, the optical lever detection method similar to that used in the atomic force microscope (AFM) has been widely employed as a standard technique for measuring microcantilever deflection. Along with the increasing interest in using the microcantilever as a sensing platform, there is also a requirement for a reliable calibration technique. Many researchers have used the concept of optical lever detection to construct microcantilever deflection readout instruments for chemical, physical, and biological detection. However, without an AFM piezo z scanner, it is very difficult to precisely calibrate these instruments. Here, we present a step-by-step method to conveniently calibrate an instrument using commercially available piezoresistive cantilevers. The experimental results closely match the theoretical calculation. Following this procedure, one can easily calibrate any optical cantilever deflection detection system with high reproducibility, precision, and reliability. A detailed discussion of the optical lever readout system design has been addressed in this article

  12. Four-plate piezoelectric actuator driving a large-diameter special optical fiber for nonlinear optical microendoscopy.

    Science.gov (United States)

    Wang, Ying; Li, Zhi; Liang, Xiaobao; Fu, Ling

    2016-08-22

    In nonlinear optical microendoscope (NOME), a fiber with excellent optical characteristics and a miniature scanning mechanism at the distal end are two key components. Double-clad fibers (DCFs) and double-clad photonic crystal fibers (DCPCFs) have shown great optical characteristics but limited vibration amplitude due to large diameter. Besides reducing the damping of fiber cantilever, optimizing the structural of the actuator for lower energy dissipation also contributes to better driving capability. This paper presented an optimized actuator for driving a particular fiber cantilever in the view point of energy. Firstly, deformation energy of a bending fiber cantilever operating in resonant mode is investigated. Secondly, strain and stress analyses revealed that the four-plate actuator achieved lower energy dissipation. Then, finite-element simulations showed that the large-diameter fiber yielded an adequate vibration amplitude driven by a four-plate actuator, which was confirmed by experiments of our home-made four-plate actuator prototypes. Additionally, a NOME based on a DCPCF with a diameter of 350 μm driven by four-plate piezoelectric actuator has been developed. The NOME can excite and collect intrinsic second-harmonic and two-photon fluorescence signals with the excitation power of 10-30 mW and an adequate field of view of 200 μm, which suggest great potential applications in neuroscience and clinical diagnoses.

  13. Smart Tendon Actuated Flexible Actuator

    Directory of Open Access Journals (Sweden)

    Md. Masum Billah

    2015-01-01

    Full Text Available We investigate the kinematic feasibility of a tendon-based flexible parallel platform actuator. Much of the research on tendon-driven Stewart platforms is devoted either to the completely restrained positioning mechanism (CRPM or to one particular type of the incompletely restrained positioning mechanism (IRPM where the external force is provided by the gravitational pull on the platform such as in cable-suspended Stewart platforms. An IRPM-based platform is proposed which uses the external force provided by a compliant member. The compliant central column allows the configuration to achieve n DOFs with n tendons. In particular, this investigation focuses on the angular deflection of the upper platform with respect to the lower platform. The application here is aimed at developing a linkable module that can be connected to one another so as to form a “snake robot” of sorts. Since locomotion takes precedence over positioning in this application, a 3-DOF Stewart platform is adopted. For an arbitrary angular displace of the end-effector, the corresponding length of each tendon can be determined through inverse kinematics. Mathematical singularities are investigated using the traditional analytical method of defining the Jacobian.

  14. Orthodontic Traction of Impacted Canine Using Cantilever

    OpenAIRE

    Nakandakari, Cláudia; Gonçalves, João Roberto; Cassano, Daniel Serra; Raveli, Taísa Boamorte; Bianchi, Jonas; Raveli, Dirceu Barnabé

    2016-01-01

    The impaction of the maxillary canines causes relevant aesthetic and functional problems. The multidisciplinary approach to the proper planning and execution of orthodontic traction of the element in question is essential. Many strategies are cited in the literature; among them is the good biomechanical control in order to avoid possible side effects. The aim of this paper is to present a case report in which a superior canine impacted by palatine was pulled out with the aid of the cantilever...

  15. Cantilever steel post damaged by wind

    Directory of Open Access Journals (Sweden)

    Wei Sha

    2014-10-01

    Full Text Available An analysis for the cause of fracture failure of a cantilever steel sign post damaged by wind has been carried out. An unusual cause of failure has been identified, which is the subject of this paper. Microscopy and microanalysis of the fracture surface showed that the failure was due to pre-existing cracks, from the fabrication of the post. This conclusion was reached after detecting and analysing a galvanised layer on the fracture surfaces.

  16. Dynamic state switching in nonlinear multiferroic cantilevers

    Science.gov (United States)

    Wang, Yi; Onuta, Tiberiu-Dan; Long, Christian J.; Lofland, Samuel E.; Takeuchi, Ichiro

    2013-03-01

    We demonstrate read-write-read-erase cyclical mechanical-memory properties of all-thin-film multiferroic heterostructured Pb(Zr0.52Ti0.48) O3 / Fe0.7Ga0.3 cantilevers when a high enough voltage around the resonant frequency of the device is applied on the Pb(Zr0.52Ti0.48) O3 piezo-film. The device state switching process occurs due to the presence of a hysteresis loop in the piezo-film frequency response, which comes from the nonlinear behavior of the cantilever. The reference frequency at which the strain-mediated Fe0.7Ga0.3 based multiferroic device switches can also be tuned by applying a DC magnetic field bias that contributes to the increase of the cantilever effective stiffness. The switching dynamics is mapped in the phase space of the device measured transfer function characteristic for such high piezo-film voltage excitation, providing additional information on the dynamical stability of the devices.

  17. Soft mobile robots driven by foldable dielectric elastomer actuators

    Energy Technology Data Exchange (ETDEWEB)

    Sun, Wenjie; Liu, Fan; Ma, Ziqi; Li, Chenghai; Zhou, Jinxiong, E-mail: jxzhouxx@mail.xjtu.edu.cn [State Key Laboratory for Strength and Vibration of Mechanical Structures and School of Aerospace, Xi' an Jiaotong University, Xi' an 710049 (China)

    2016-08-28

    A cantilever beam with elastic hinge pulled antagonistically by two dielectric elastomer (DE) membranes in tension forms a foldable actuator if one DE membrane is subject to a voltage and releases part of tension. Simply placing parallel rigid bars on the prestressed DE membranes results in enhanced actuators working in a pure shear state. We report design, analysis, fabrication, and experiment of soft mobile robots that are moved by such foldable DE actuators. We describe systematic measurement of the foldable actuators and perform theoretical analysis of such actuators based on minimization of total energy, and a good agreement is achieved between model prediction and measurement. We develop two versions of prototypes of soft mobile robots driven either by two sets of DE membranes or one DE membrane and elastic springs. We demonstrate locomotion of these soft mobile robots and highlight several key design parameters that influence locomotion of the robots. A 45 g soft robot driven by a cyclic triangle voltage with amplitude 7.4 kV demonstrates maximal stroke 160 mm or maximal rolling velocity 42 mm/s. The underlying mechanics and physics of foldable DE actuators can be leveraged to develop other soft machines for various applications.

  18. Environmental Effects on the Polypyrrole Tri-layer Actuator

    Directory of Open Access Journals (Sweden)

    Nirul Masurkar

    2017-04-01

    Full Text Available Electroactive polymer actuators such as polypyrrole (PPy are exciting candidates to drive autonomous devices that require low weight and low power. A simple PPy tri-layer bending type cantilever which operates in the air has been demonstrated previously, but the environmental effect on this actuator is still unknown. The major obstacle in the development of the PPy tri-layer actuator is to create proper packaging that reduces oxidation of the electrolyte and maintains constant displacement. Here, we report the variation in the displacement as well as the charge transfer at the different environmental condition. PPy trilayer actuators were fabricated by depositing polypyrrole on gold-coated porous poly(vinylidene fluoride (PVDF using the electro-synthesis method. It has been demonstrated that the charge transfer of tri-layer actuators is more in an inert environment than in open air. In addition, tri-layer actuators show constant deflection and enhancement of life due to the negligible oxidation rate of the electrolyte in an inert environment.

  19. Understanding interferometry for micro-cantilever displacement detection

    Directory of Open Access Journals (Sweden)

    Alexander von Schmidsfeld

    2016-06-01

    Full Text Available Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM operated in ultra-high vacuum is demonstrated for the Michelson and Fabry–Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end delivering and collecting light and a highly reflective micro-cantilever, both together forming the interferometric cavity. For a precise measurement of the cantilever displacement, the relative positioning of fiber and cantilever is of critical importance. We describe a systematic approach for accurate alignment as well as the implications of deficient fiber–cantilever configurations. In the Fabry–Pérot regime, the displacement noise spectral density strongly decreases with decreasing distance between the fiber-end and the cantilever, yielding a noise floor of 24 fm/Hz0.5 under optimum conditions.

  20. Soft, Rotating Pneumatic Actuator.

    Science.gov (United States)

    Ainla, Alar; Verma, Mohit S; Yang, Dian; Whitesides, George M

    2017-09-01

    This article describes a soft pneumatic actuator that generates cyclical motion. The actuator consists of several (three, four, or five) chambers (arranged around the circumference of a circle surrounding a central rod) that can be actuated independently using negative pressure (or partial vacuum). Sequential actuation of the four-chamber device using reduced pressure moves the central rod cyclically in an approximately square path. We characterize the trajectory of the actuator and the force exerted by it, as we vary the material used for fabrication, the number of chambers, and the size of the actuator. We demonstrate two applications of this actuator: to deliver fluid while stirring (by replacing the central rod with a needle) and for locomotion that mimics a reptilian gait (by combining four actuators together).

  1. Micro‑cantilevers for optical sensing of biogenic amines

    DEFF Research Database (Denmark)

    Wang, Ying; Bravo Costa, Carlos André; Sobolewska, Elżbieta Karolina

    2017-01-01

    molecules in the gas phase. Different functionalization conditions were investigated by immersing gold coated AFM cantilevers in cyclam solutions at different concentrations, for different functionalization times, and for different post-annealing treatments. The optimum morphology for high capture...... micro-cantilever based mass detection. We demonstrate that besides conventional AFM systems a MEMS cantilever in combination with an optical read out is a powerful analytic system which is highly attractive for widespread use in diagnostic applications, with optimized functionalization conditions...

  2. Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

    International Nuclear Information System (INIS)

    Sierakowski, Andrzej; Janus, Paweł; Dobrowolski, Rafał; Grabiec, Piotr; Kopiec, Daniel; Majstrzyk, Wojciech; Kunicki, Piotr; Gotszalk, Teodor; Rangelow, Ivo W

    2017-01-01

    In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical source and detector are needed. When the microcantilever is deflected, the stress is transferred into a change of resistivity of piezoresistors. The integration of piezoresistive read-out provides a promising solution in realizing a compact non-contact AFM. Resolution of piezoresistive read-out is limited by three main noise sources: Johnson, 1/ f and thermomechanical noise. In the dynamic shear force mode measurement the method used for cantilever actuation will also affect the recorded noise in the piezoresistive detection circuit. This is the result of a crosstalk between an aluminium path (current loop used for actuation) and piezoresistors located near the base of the beam. In this paper authors described an elaborated in ITE (Institute of Electron Technology) technology of fabrication cantilevers with piezoresistive detection of deflection and compared efficiency of two methods used for cantilever actuation. (paper)

  3. An electrochemical-cantilever platform for hybrid sensing applications

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Dohn, Søren; Boisen, Anja

    2011-01-01

    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined...... mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM....

  4. Extended DNA Tile Actuators

    DEFF Research Database (Denmark)

    Kristiansen, Martin; Kryger, Mille; Zhang, Zhao

    2012-01-01

    A dynamic linear DNA tile actuator is expanded to three new structures of higher complexity. The original DNA actuator was constructed from a central roller strand which hybridizes with two piston strands by forming two half-crossover junctions. A linear expansion of the actuator is obtained...

  5. Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

    Science.gov (United States)

    Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH)

    2005-01-01

    We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.

  6. Study of wire electrical discharge machined folded-up corner cube retroreflector with a tunable cantilever beam

    Science.gov (United States)

    Chen, Yu-Fan; Wang, Yen-Hung; Tsai, Jui-che

    2018-03-01

    This work has developed an approach to construct a corner cube retroreflector (CCR). A two-dimensional cutout pattern is first fabricated with wire electrical discharge machining process. It is then folded up into a three-dimensional CCR suspended on a cantilever beam. The folded-up CCR may be driven through external actuators for optical modulation; it can also mechanically respond to perturbation, acceleration, etc., to function as a sensor. Mechanical (static and dynamic modeling) and optical (ray tracing) analyses are also performed.

  7. Nanoscale microwave microscopy using shielded cantilever probes

    KAUST Repository

    Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael A.; Shen, Zhi-Xun

    2011-01-01

    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.

  8. Fabrication of biopolymer cantilevers using nanoimprint lithography

    DEFF Research Database (Denmark)

    Keller, Stephan Sylvest; Feidenhans'l, Nikolaj Agentoft; Fisker-Bødker, Nis

    2011-01-01

    The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major...... challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus...

  9. Cantilever torque magnetometry on coordination compounds

    DEFF Research Database (Denmark)

    Perfetti, Mauro

    2017-01-01

    compounds, such as quantum computation or information storage. This review enlightens that CTM offers a unique combination of accuracy and precision to disentangle noncollinear contributions inside Single Crystals as well as the sensitivity to detect molecular order of thin films. CTM can also detect......Cantilever Torque Magnetometry (CTM) is one of the leading techniques to deeply understand magnetic anisotropy of coordination compounds. The knowledge of magnetic anisotropy is a mandatory requirement before proceeding with any future application related to the magnetic properties of coordination...... quantum phenomena such as magnetization steps and molecular hysteresis curves. Moreover, it can also provide the energy levels splitting and avefunctions composition, especially if coupled with microwave radiation....

  10. Nanoscale microwave microscopy using shielded cantilever probes

    KAUST Repository

    Lai, Keji

    2011-04-21

    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.

  11. Three-way flexible cantilever probes for static contact

    International Nuclear Information System (INIS)

    Wang, Fei; Petersen, Dirch H; Hansen, Christian; Mortensen, Dennis; Friis, Lars; Hansen, Ole; Jensen, Helle V

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze the geometrical design space that must be fulfilled for the cantilevers to obtain static contact with the test sample. The design space relates the spring constant tensor of the cantilevers to the minimal value of the static tip-to-sample friction coefficient. Using an approximate model, we provide the analytical calculation of the compliance matrix of the L-shaped cantilever. Compared to results derived from finite element model simulations, the theoretical model provides a good qualitative analysis while deviations for the absolute values are seen. From a statistical analysis, the deviation is small for cantilevers with low effective spring constants, while the deviation is significant for large spring constants where the quasi one-dimensional approximation is no longer valid

  12. Development of an Electrochemical-Cantilever Hybrid Platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie

    . For at binde kobber (II) ioner blev rækker af cantilevere funktionaliseret med aminosyre L-cysteine(Cys) og tetrapeptid Cys-Gly-Gly-His (CGGH). Dette funktionelle lag blev fjernet fra en enkelt cantilever, ved selektivt at anvende et voltammetrisk signal til at generere en ren reference cantilever til brug...

  13. A more comprehensive modeling of atomic force microscope cantilever

    International Nuclear Information System (INIS)

    Mahdavi, M.H.; Farshidianfar, A.; Tahani, M.; Mahdavi, S.; Dalir, H.

    2008-01-01

    This paper focuses on the development of a complete model of an atomic force microscope (AFM) micro-cantilever beam, based on considering the effects of four major factors in modeling the cantilever. They are: rotary inertia and shear deformation of the beam and mass and rotary inertia of the tip. A method based on distributed-parameter modeling approach is proposed to solve the governing equations. The comparisons generally show a very good agreement between the present results and the results of other investigators. As expected, rotary inertia and shear deformation of the beam decrease resonance frequency especially at high ratio of cantilever thickness to its length, and it is relatively more pronounced for higher-order frequencies, than lower ones. Mass and rotary inertia of the tip have similar effects when the mass-ratio of the tip to the cantilever is high. Moreover, the influence of each of these four factors, thickness of the cantilever, density of the tip and inclination of the cantilever on the resonance frequencies has been investigated, separately. It is felt that this work might help the engineers in reducing AFM micro-cantilever design time, by providing insight into the effects of various parameters with the micro-cantilever.

  14. SU-8 Cantilever Sensor with Integrated Read-Out

    DEFF Research Database (Denmark)

    Johansson, Alicia Charlotte

    2007-01-01

    Cantilever baserede biosensorer kan bruges til så kaldet label-free detektion af små koncentrationer af molekyler i en opløsning. Når et specifikt molekyle binder til overfladen af en cantilever induceres et overfladestress som resulterer i en udbøjning af cantileveren. Cantileverens udbøjningen ...

  15. Vibration control for precision manufacturing using piezoelectric actuators

    Energy Technology Data Exchange (ETDEWEB)

    Martinez, D.R.; Hinnerichs, T.D.; Redmond, J.M.

    1995-12-31

    Piezoelectric actuators provide high frequency, force, and stiffness capabilities along with reasonable Stroke limits, all of which can be used to increase performance levels in precision manufacturing systems. This paper describes two examples of embedding piezoelectric actuators in structural components for vibration control. One example involves suppressing the self excited chatter phenomenon in the metal cutting process of a milling machine and the other involves damping vibrations induced by rigid body stepping of a photolithography platen. Finite element modeling and analyses are essential for locating and sizing the actuators and permit further simulation studies of the response of the dynamic system. Experimental results are given for embedding piezoelectric actuators in a cantilevered bar configuration, which was used as a surrogate machine tool structure. These results are incorporated into a previously developed milling process simulation and the effect of the control on the cutting process stability diagram is quantified. Experimental results are also given for embedding three piezoelectric actuators in a surrogate photolithography platen to suppress vibrations. These results demonstrate the potential benefit that can be realized by applying advances from the field of adaptive structures to problems in precision manufacturing.

  16. Droplet Translation Actuated by Photoelectrowetting.

    Science.gov (United States)

    Palma, Cesar; Deegan, Robert D

    2018-03-13

    In traditional electrowetting-on-dielectric (EWOD) devices, droplets are moved about a substrate using electric fields produced by an array of discrete electrodes. In this study, we show that a drop can be driven across a substrate with a localized light beam by exploiting the photoelectrowetting (PEW) effect, a light-activated variant of EWOD. Droplet transport actuated by PEW eliminates the need for electrode arrays and the complexities entailed in their fabrication and control, and offers a new approach for designing lab-on-a-chip applications. We report measurements of the maximum droplet speed as a function of frequency and magnitude of the applied bias, intensity of illumination, volume of the droplet, and viscosity and also introduce a model that reproduces these data.

  17. Orthodontic Traction of Impacted Canine Using Cantilever

    Directory of Open Access Journals (Sweden)

    Cláudia Nakandakari

    2016-01-01

    Full Text Available The impaction of the maxillary canines causes relevant aesthetic and functional problems. The multidisciplinary approach to the proper planning and execution of orthodontic traction of the element in question is essential. Many strategies are cited in the literature; among them is the good biomechanical control in order to avoid possible side effects. The aim of this paper is to present a case report in which a superior canine impacted by palatine was pulled out with the aid of the cantilever on the Segmented Arch Technique (SAT concept. A 14.7-year-old female patient appeared at clinic complaining about the absence of the upper right permanent canine. The proposed treatment prioritized the traction of the upper right canine without changing the occlusion and aesthetics. For this, it only installed the upper fixed appliance (Roth with slot 0.018, opting for SAT in order to minimize unwanted side effects. The use of cantilever to the traction of the upper right canine has enabled an efficient and predictable outcome, because it is of statically determined mechanics.

  18. Magnetic force driven magnetoelectric effect in bi-cantilever composites

    Science.gov (United States)

    Zhang, Ru; Wu, Gaojian; Zhang, Ning

    2017-12-01

    The magnetic force driven magnetoelectric (ME) effect in bi-cantilever Mn-Zn-Ferrite /PZT composites is presented. Compared with single cantilever, the ME voltage coefficient in bi-cantilever composite is a little lower and the resonance frequency is higher, but the bi-cantilever structure is advantageous for integration. When the magnetic gap is 3 mm, the ME voltage coefficient can achieve 6.2 Vcm-1Oe-1 at resonance under optimum bias field Hm=1030 Oe; when the magnetic gap is 1.5 mm, the ME voltage coefficient can get the value as high as 4.4 Vcm-1Oe-1 under much lower bias field H=340 Oe. The stable ME effect in bi-cantilever composites has important potential application in the design of new type ME device.

  19. Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

    Directory of Open Access Journals (Sweden)

    Li Jiao Gong

    2016-09-01

    Full Text Available Ferroelectric single crystals, such as PZN-PT, provide novel prospects in piezoelectric bending devices such as actuators, sensors or energy harvesters because of their extraordinarily large piezoelectric coefficients. However, large errors may occur in some analyses on electromechanical behaviors using the conventional models. We find the bending rigidity of piezoelectric composited bender is affected not only by thickness, width and the modulus of elasticity of the different layers but also electromechanical coupling coefficients (EMCCs of the piezoelectric material and the larger EMCCs mean more marked effect. This paper focuses on the derivation of the applied input excitation and output response characteristics in the circular frequency domain for piezoelectric cantilever triple-layer benders (PCTBs, taking into account the secondary piezoelectric effect. Analytic dynamic descriptions of such actuators and transducers are obtained. Based on the presented models dynamic features of PCTB composed of PZN-8%PT are calculated, and numerical results coincide with simulations using the finite element method (FEM.

  20. Vibration suppression of a rotating flexible cantilever pipe conveying fluid using piezoelectric layers

    Directory of Open Access Journals (Sweden)

    S. Khajehpour

    Full Text Available AbstractIn this study, the governing equations of a rotating cantilever pipe conveying fluid are derived and the longitudinal and lateral induced vibrations are controlled. The pipe considered as an Euler Bernoulli beam with tip mass which piezoelectric layers attached both side of it as sensors and actuators. The follower force due to the fluid discharge causes both conservative and non-conservative work. For mathematical modeling, the Lagrange-Rayleigh-Ritz technique is utilized. An adaptive-robust control scheme is applied to suppress the vibration of the pipe. The adaptive-robust control method is robust against parameter uncertainties and disturbances. Finally, the system is simulated and the effects of varying parameters are studied. The simulation results show the excellent performance of the controller.

  1. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    International Nuclear Information System (INIS)

    Joyce, Bryan S; Tarazaga, Pablo A

    2014-01-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity. (papers)

  2. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    Science.gov (United States)

    Joyce, Bryan S.; Tarazaga, Pablo A.

    2014-07-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity.

  3. The small length scale effect for a non-local cantilever beam: a paradox solved.

    Science.gov (United States)

    Challamel, N; Wang, C M

    2008-08-27

    Non-local continuum mechanics allows one to account for the small length scale effect that becomes significant when dealing with microstructures or nanostructures. This paper presents some simplified non-local elastic beam models, for the bending analyses of small scale rods. Integral-type or gradient non-local models abandon the classical assumption of locality, and admit that stress depends not only on the strain value at that point but also on the strain values of all points on the body. There is a paradox still unresolved at this stage: some bending solutions of integral-based non-local elastic beams have been found to be identical to the classical (local) solution, i.e. the small scale effect is not present at all. One example is the Euler-Bernoulli cantilever nanobeam model with a point load which has application in microelectromechanical systems and nanoelectromechanical systems as an actuator. In this paper, it will be shown that this paradox may be overcome with a gradient elastic model as well as an integral non-local elastic model that is based on combining the local and the non-local curvatures in the constitutive elastic relation. The latter model comprises the classical gradient model and Eringen's integral model, and its application produces small length scale terms in the non-local elastic cantilever beam solution.

  4. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.; Younis, Mohammad I.

    2016-01-01

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator's nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli's beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  5. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.

    2016-09-15

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator\\'s nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli\\'s beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  6. Development of the Aquarius Antenna Deployment Mechanisms and Spring/Damper Actuator

    Science.gov (United States)

    Johnson, Joel A.

    2008-01-01

    The Aquarius Instrument s large radar reflector dish needed to be stowed for launch, and then deployed on-orbit. The Deployment Subsystem consisted of a cantilevered boom structure and two single-axis hinge mechanisms to accurately deploy and position the reflector dish relative to the radar feed horns. The cantilevered design demanded high stiffness and accuracy from the deployment mechanism at the root of the boom. A preload-generating end-of-travel latch was also required. To largely eliminate the need for control systems, each deployment mechanism was actuated by a passive spring motor with viscous-fluid damping. Tough requirements and adaptation of a heritage actuator to the new application resulted in numerous challenges. Fabrication, assembly, and testing encountered additional problems, though ultimately the system was demonstrated very successfully. This paper revisits the development to highlight which design concepts worked and the many important lessons learned.

  7. Instability of nanocantilever arrays in electrostatic and van der Waals interactions

    Energy Technology Data Exchange (ETDEWEB)

    Ramezani, Asghar [Department of Automotive Engineering, Iran University of Science and Technology, Tehran (Iran, Islamic Republic of); Alasty, Aria, E-mail: aramezani@iust.ac.i, E-mail: aalasti@sharif.ed [Center of Excellence in Design, Robotics, and Automation (CEDRA), School of Mechanical Engineering, Sharif University of Technology, Tehran (Iran, Islamic Republic of)

    2009-11-21

    The structural instability of an array of cantilevers, each of which interacts with two neighbouring beams through electrostatic and van der Waals forces, is studied. Distributed and lumped parameter modelling of the array result in a set of coupled nonlinear boundary value problems and a set of coupled nonlinear equations, respectively. These coupled nonlinear systems are solved numerically for different numbers of beams in the array to obtain the pull-in parameters. The pull-in parameters converge to constant values with an increase in the number of beams in the array. These constants, which are important in the design of cantilever arrays, are compared for the distributed and lumped parameter models.

  8. Design and Implementation of Output Feedback Control for Piezo Actuated Structure Using Embedded System

    Directory of Open Access Journals (Sweden)

    R.Maheswari

    2008-06-01

    Full Text Available This paper presents the design of periodic output feedback control using state feedback gain to control the vibration of piezo actuated cantilever beam. The effectiveness of the controller is evaluated through simulation and experimentally by exciting the structure at resonance. Real time implementation of the controller is done using microcontroller. The closed loop eigen values of the system with periodic output feedback and state feedback are identical.

  9. Soft buckling actuators

    Energy Technology Data Exchange (ETDEWEB)

    Yang, Dian; Whitesides, George M.

    2017-12-26

    A soft actuator is described, including: a rotation center having a center of mass; a plurality of bucklable, elastic structural components each comprising a wall defining an axis along its longest dimension, the wall connected to the rotation center in a way that the axis is offset from the center of mass in a predetermined direction; and a plurality of cells each disposed between two adjacent bucklable, elastic structural components and configured for connection with a fluid inflation or deflation source; wherein upon the deflation of the cell, the bucklable, elastic structural components are configured to buckle in the predetermined direction. A soft actuating device including a plurality of the soft actuators and methods of actuation using the soft actuator or soft actuating device disclosed herein are also described.

  10. Optimization of piezoelectric bimorph actuators with active damping for static and dynamic loads

    DEFF Research Database (Denmark)

    Donoso, Alberto; Sigmund, Ole

    2009-01-01

    The paper considers optimal design problems in the context of active damping. More specifically, we are interested in controlling the tip-deflection of a cantilever beam subjected to static and time-harmonic loading on its free extreme. First, the thickness profile of a piezoelectric bimorph...... actuator is optimized and second, the width profile. In the thickness study, formulation and results depend on whether the electric field or the applied voltage is kept constant. For the latter case we propose a differentiable model that connects electric field and piezo-actuator thickness to include...

  11. Piezoceramic devices and PVDF films as sensors and actuators for intelligent structures

    Science.gov (United States)

    Hanagud, S.; Obal, M. W.; Calise, A. G.

    The use of bonded piezoceramic sensors and piezoceramic actuators to control vibrations in structural dynamic systems is discussed. Equations for developing optimum control strategies are derived. An example of a cantilever beam is considered to illustrate the development procedure for optimal vibration control of structures by the use of piezoceramic sensors, actuators, and rate feedbacks with appropriate gains. Research areas and future directions are outlined, including dynamic coupling and constitutive equations; load and energy transfer; composite structures; optimal dynamic compensation; estimation and identification; and distributed control.

  12. Magnetic actuators and sensors

    CERN Document Server

    Brauer, John R

    2014-01-01

    An accessible, comprehensive guide on magnetic actuators and sensors, this fully updated second edition of Magnetic Actuators and Sensors includes the latest advances, numerous worked calculations, illustrations, and real-life applications. Covering magnetics, actuators, sensors, and systems, with updates of new technologies and techniques, this exemplary learning tool emphasizes computer-aided design techniques, especially magnetic finite element analysis, commonly used by today's engineers. Detailed calculations, numerous illustrations, and discussions of discrepancies make this text an inva

  13. Soft Robotic Actuators

    Science.gov (United States)

    Godfrey, Juleon Taylor

    In this thesis a survey on soft robotic actuators is conducted. The actuators are classified into three main categories: Pneumatic Artificial Muscles (PAM), Electronic Electroactive Polymers (Electric EAP), and Ionic Electroactive Polymers (Ionic EAP). Soft robots can have many degrees and are more compliant than hard robots. This makes them suitable for applications that are difficult for hard robots. For each actuator background history, build materials, how they operate, and modeling are presented. Multiple actuators in each class are reviewed highlighting both their use and their mathematical formulation. In addition to the survey the McKibben actuator was chosen for fabrication and in-depth experimental analysis. Four McKibben actuators were fabricated using mesh sleeve, barbed hose fittings, and different elastic bladders. All were actuated using compressed air. Tensile tests were performed for each actuator to measure the tension force as air pressure increased from 20 to 100 psi in 10 psi increments. To account for material relaxation properties eleven trials for each actuator were run for 2-3 days. In conclusion, the smallest outer diameter elastic bladder was capable of producing the highest force due to the larger gap between the bladder and the sleeve.

  14. Electrostatically Driven Nanoballoon Actuator.

    Science.gov (United States)

    Barzegar, Hamid Reza; Yan, Aiming; Coh, Sinisa; Gracia-Espino, Eduardo; Dunn, Gabriel; Wågberg, Thomas; Louie, Steven G; Cohen, Marvin L; Zettl, Alex

    2016-11-09

    We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging the nanotube, thus realizing an electrostatically driven nanoballoon actuator. We find that the tube actuator can be reliably cycled with only modest control voltages (few volts) with no apparent wear or fatigue. A complementary theoretical analysis identifies critical parameters for nanotube nanoballoon actuation.

  15. Stress measurements of planar dielectric elastomer actuators

    International Nuclear Information System (INIS)

    Osmani, Bekim; Aeby, Elise A.; Müller, Bert

    2016-01-01

    Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a voltage to the DEA electrodes generates an electrostatic pressure in the sandwiched silicone elastomer layer, which causes the underlying PEN substrate to bend. Optical beam deflection enables the detection of the bending angle vs. applied voltage. Bending radii as large as 850 m were reproducibly detected. DEA tests with electric fields of up to 80 V/μm showed limitations in electrode’s conductivity and structure failures. The actuation measurement is essential for the quantitative characterization of nanometer-thin, low-voltage, single- and multi-layer DEAs, as foreseen for artificial sphincters to efficiently treat severe urinary and fecal incontinence.

  16. Stress measurements of planar dielectric elastomer actuators

    Energy Technology Data Exchange (ETDEWEB)

    Osmani, Bekim; Aeby, Elise A.; Müller, Bert [Biomaterials Science Center, University of Basel, Gewerbestrasse 14, 4123 Allschwil (Switzerland)

    2016-05-15

    Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a voltage to the DEA electrodes generates an electrostatic pressure in the sandwiched silicone elastomer layer, which causes the underlying PEN substrate to bend. Optical beam deflection enables the detection of the bending angle vs. applied voltage. Bending radii as large as 850 m were reproducibly detected. DEA tests with electric fields of up to 80 V/μm showed limitations in electrode’s conductivity and structure failures. The actuation measurement is essential for the quantitative characterization of nanometer-thin, low-voltage, single- and multi-layer DEAs, as foreseen for artificial sphincters to efficiently treat severe urinary and fecal incontinence.

  17. In-situ piezoresponse force microscopy cantilever mode shape profiling

    International Nuclear Information System (INIS)

    Proksch, R.

    2015-01-01

    The frequency-dependent amplitude and phase in piezoresponse force microscopy (PFM) measurements are shown to be a consequence of the Euler-Bernoulli (EB) dynamics of atomic force microscope (AFM) cantilever beams used to make the measurements. Changes in the cantilever mode shape as a function of changes in the boundary conditions determine the sensitivity of cantilevers to forces between the tip and the sample. Conventional PFM and AFM measurements are made with the motion of the cantilever measured at one optical beam detector (OBD) spot location. A single OBD spot location provides a limited picture of the total cantilever motion, and in fact, experimentally observed cantilever amplitude and phase are shown to be strongly dependent on the OBD spot position for many measurements. In this work, the commonly observed frequency dependence of PFM response is explained through experimental measurements and analytic theoretical EB modeling of the PFM response as a function of both frequency and OBD spot location on a periodically poled lithium niobate sample. One notable conclusion is that a common choice of OBD spot location—at or near the tip of the cantilever—is particularly vulnerable to frequency dependent amplitude and phase variations stemming from dynamics of the cantilever sensor rather than from the piezoresponse of the sample

  18. Forced vibrations of a cantilever beam

    International Nuclear Information System (INIS)

    Repetto, C E; Roatta, A; Welti, R J

    2012-01-01

    The theoretical and experimental solutions for vibrations of a vertical-oriented, prismatic, thin cantilever beam are studied. The beam orientation is ‘downwards’, i.e. the clamped end is above the free end, and it is subjected to a transverse movement at a selected frequency. Both the behaviour of the device driver and the beam's weak-damping resonance response are compared for the case of an elastic beam made from PVC plastic excited over a frequency range from 1 to 30 Hz. The current analysis predicts the presence of ‘pseudo-nodes’ in the normal modes of oscillation. It is important to note that our results were obtained using very simple equipment, present in the teaching laboratory. (paper)

  19. Resonance frequencies of AFM cantilevers in contact with a surface

    Energy Technology Data Exchange (ETDEWEB)

    Verbiest, G.J., E-mail: Verbiest@physik.rwth-aachen.de [JARA-FIT and II. Institute of Physics, RWTH Aachen University, 52074 Aachen (Germany); Rost, M.J., E-mail: Rost@physics.leidenuniv.nl [Huygens-Kamerlingh Onnes Laboratory, Leiden University, P.O. Box 9504, 2300 RA Leiden (Netherlands)

    2016-12-15

    To make the forces in an Atomic Force Microscope that operates in a dynamic mode with one or multiple vibrations applied to the cantilever, quantitative, one needs to relate a change in resonance frequency of the cantilever to a specific tip–sample interaction. Due to the time dependence of the force between the tip and sample caused by the vibrations, this task is not only difficult, but in fact only possible to solve for certain limiting cases, if one follows common theoretical approaches with a Taylor expansion around the deflection point. Here, we present an analytical method for calculating the resonance frequencies of the cantilever that is valid for any tip–sample interaction. Instead of linearizing the tip–sample interaction locally, we calculate an averaged, weighted linearization taking into account all positions of the tip while vibrating. Our method bridges, therefore, the difficult gap between a free oscillating cantilever and a cantilever that is pushed infinitely hard into contact with a surface, which describes a clamped-pinned boundary condition. For a correct description of the cantilever dynamics, we take into account both the tip mass and the tip moment of inertia. Applying our model, we show that it is possible to calculate the modal response of a cantilever as a function of the tip–sample interaction strength. Based on these modal vibration characteristics, we show that the higher resonance frequencies of a cantilever are completely insensitive to the strength of the tip–sample interaction. - Highlights: • A method to calculate the resonances of AFM cantilevers under any force is proposed. • The analytical model is based on Euler-beam theory. • The shift in resonance frequency due to forces decrease with increasing mode number. • The proposed method enables quantitative ultrasound AFM experiments. • Our results explain also the applicability of the higher modes in SubSurface-AFM.

  20. Optimization of sensitivity and noise in piezoresistive cantilevers

    DEFF Research Database (Denmark)

    Yu, Xiaomei; Thaysen, Jacob; Hansen, Ole

    2002-01-01

    In this article, the sensitivity and the noise of piezoresistive cantilevers were systematically investigated with respect to the piezoresistor geometry, the piezoresistive materials, the doping dose, the annealing temperature, and the operating biased voltage. With the noise optimization results......(-6), the biggest gauge factors was 95, and the minimum detectable deflection (MDD) at 6 V and 200 Hz-measurement bandwidth was 0.3 nm for a single-crystal silicon cantilever. Of the two LPCVD silicon piezoresistive cantilevers, amorphous silicon piezoresistors had relatively lower 1/f noise. The MDD for a LPCVD...

  1. Polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes

    DEFF Research Database (Denmark)

    Johansson, Alicia; Calleja, M.; Dimaki, Maria

    2004-01-01

    A polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes has been designed and realized. Multi-walled carbon nanotubes from aqueous solution have been assembled between two metal electrodes that are separated by 2 mu m and embedded in the polymer cantilever. The entire chip......, except for the metallic electrodes and wiring, was fabricated in the photoresist SU-8. SU-8 allows for an inexpensive, flexible and fast fabrication method, and the cantilever platform provides a hydrophobic surface that should be well suited for nanotube assembly. The device can be integrated in a micro...

  2. On the calibration of rectangular atomic force microscope cantilevers modified by particle attachment and lamination

    International Nuclear Information System (INIS)

    Bowen, James; Zhang, Zhibing; Adams, Michael J; Cheneler, David; Ward, Michael C L; Walliman, Dominic; Arkless, Stuart G

    2010-01-01

    A simple but effective method for estimating the spring constant of commercially available atomic force microscope (AFM) cantilevers is presented, based on estimating the cantilever thickness from knowledge of its length, width, resonant frequency and the presence or absence of an added mass, such as a colloid probe at the cantilever apex, or a thin film of deposited material. The spring constant of the cantilever can then be estimated using standard equations for cantilever beams. The results are compared to spring constant calibration measurements performed using reference cantilevers. Additionally, the effect of the deposition of Cr and Ti thin films onto rectangular Si cantilevers is investigated

  3. Conjugated Polymers as Actuators: Modes of Actuation

    DEFF Research Database (Denmark)

    Skaarup, Steen

    2004-01-01

    The physical and chemical properties of conjugated polymers often depend very strongly on the degree of doping with anions or cations. The movement of ions in and out of the polymer matrix as it is redox cycled is also accompanied by mechanical changes. Both the volume and the stiffness can exhibit...... significant differences between the oxidized and reduced states. These effects form the basis of the use of conjugated polymers as actuators (or “artificial muscles”) controllable by a small (1-10 V) voltage. Three basic modes of actuation (bending, linear extension and stiffness change) have been proposed...

  4. Conjugated polymers as actuators: modes of actuation

    DEFF Research Database (Denmark)

    Skaarup, Steen

    2007-01-01

    The physical and chemical properties of conjugated polymers often depend very strongly on the degree of doping with anions or cations. The movement of ions in and out of the polymer matrix as it is redox cycled is also accompanied by mechanical changes. Both the volume and the stiffness can exhibit...... significant differences between the oxidized and reduced states. These effects form the basis of the use of conjugated polymers as actuators (or “artificial muscles”) controllable by a small (1-10 V) voltage. Three basic modes of actuation (bending, linear extension and stiffness change) have been proposed...

  5. Fast electrochemical actuator

    International Nuclear Information System (INIS)

    Uvarov, I V; Postnikov, A V; Svetovoy, V B

    2016-01-01

    Lack of fast and strong microactuators is a well-recognized problem in MEMS community. Electrochemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination. Here we demonstrate an actuation regime, for which the gas pressure is relaxed just for 10 μs or so. The actuator consists of a microchamber filled with the electrolyte and covered with a flexible membrane. The membrane bends outward when the pressure in the chamber increases. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed so as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics. (paper)

  6. Adaptive Model Predictive Vibration Control of a Cantilever Beam with Real-Time Parameter Estimation

    Directory of Open Access Journals (Sweden)

    Gergely Takács

    2014-01-01

    Full Text Available This paper presents an adaptive-predictive vibration control system using extended Kalman filtering for the joint estimation of system states and model parameters. A fixed-free cantilever beam equipped with piezoceramic actuators serves as a test platform to validate the proposed control strategy. Deflection readings taken at the end of the beam have been used to reconstruct the position and velocity information for a second-order state-space model. In addition to the states, the dynamic system has been augmented by the unknown model parameters: stiffness, damping constant, and a voltage/force conversion constant, characterizing the actuating effect of the piezoceramic transducers. The states and parameters of this augmented system have been estimated in real time, using the hybrid extended Kalman filter. The estimated model parameters have been applied to define the continuous state-space model of the vibrating system, which in turn is discretized for the predictive controller. The model predictive control algorithm generates state predictions and dual-mode quadratic cost prediction matrices based on the updated discrete state-space models. The resulting cost function is then minimized using quadratic programming to find the sequence of optimal but constrained control inputs. The proposed active vibration control system is implemented and evaluated experimentally to investigate the viability of the control method.

  7. Complaint liquid metal electrodes for dielectric elastomer actuators

    Science.gov (United States)

    Finkenauer, Lauren R.; Majidi, Carmel

    2014-03-01

    This work presents a liquid-phase metal electrode to be used with poly(dimethylsiloxane) (PDMS) for a dielectric elastomer actuator (DEA). DEAs are favorable for soft-matter applications where high efficiency and response times are desirable. A consistent challenge faced during the fabrication of these devices is the selection and deposition of electrode material. While numerous designs have been demonstrated with a variety of conductive elastomers and greases, these materials have significant and often intrinsic shortcomings, e.g. low conductivity, hysteresis, incapability of large deformations, and complex fabrication requirements. The liquid metal alloy eutectic Gallium-Indium (EGaIn) is a promising alternative to existing compliant electrodes, having both high conductivity and complete soft-matter functionality. The liquid electrode shares almost the same electrical conductivity as conventional metal wiring and provides no mechanical resistance to bending or stretching of the DEA. This research establishes a straightforward and effective method for quickly depositing EGaIn electrodes, which can be adapted for batch fabrication, and demonstrates the successful actuation of sample curved cantilever elastomer actuators using these electrodes. As with the vast majority of electrostatically actuated elastomer devices, the voltage requirements for these curved DEAs are still quite significant, though modifications to the fabrication process show some improved electrical properties. The ease and speed with which this method can be implemented suggests that the development of a more electronically efficient device is realistic and worthwhile.

  8. Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants between 0.01 and 4 N/m

    International Nuclear Information System (INIS)

    Cumpson, Peter J.; Hedley, John; Clifford, Charles A.; Chen Xinyong; Allen, Stephanie

    2004-01-01

    Calibration of atomic force microscope (AFM) cantilevers is necessary for the measurement of nano-newton and pico-newton forces, which are critical to analytical application of AFM in the analysis of polymer surfaces, biological structures and organic molecules. Previously we have described microfabricated array of reference spring (MARS) devices for AFM cantilever spring-constant calibration. Hitherto, these have been limited to the calibration of AFM cantilevers above 0.03 N/m, although they can be used to calibrate cantilevers of lower stiffness with reduced accuracy. Below this limit MARS devices similar to the designs hitherto described would be fragile and difficult to manufacture with reasonable yield. In this work we describe a device we call torsional MARS. This is a large-area torsional mechanical resonator, manufactured by bulk micromachining of a 'silicon-on-insulator' wafer. By measuring its torsional oscillation accurately in vacuum we can deduce its torsional spring constant. The torsional reference spring spans the range of spring constant (from 4 down to 0.01 N/m) that is important in biological AFM, allowing even the most compliant AFM cantilever to be calibrated easily and rapidly

  9. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

    Directory of Open Access Journals (Sweden)

    Xinxin Li

    2009-01-01

    Full Text Available The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.

  10. Influence of cantilevered sheet pile deflection on adjacent roadways.

    Science.gov (United States)

    2009-06-01

    Cantilevered sheet pile walls are often used adjacent roadways as temporary support during construction. Excess movement of these walls has led to excessive roadway distress causing additional repairs to be necessary. This study assessed the effects ...

  11. Squeeze-film damping characteristics of cantilever microresonators ...

    African Journals Online (AJOL)

    user

    perturbation approach does not apply to cantilever plates because of ...... Direct coupling of electrostatic and structural domain has been achieved using ... forces are computed to obtain the modal squeeze stiffness and damping parameters.

  12. Solar photovoltaic water pumping system using a new linear actuator

    OpenAIRE

    Andrada Gascón, Pedro; Castro, Javier

    2007-01-01

    In this paper a photovoltaic solar pumping system using a new linear actuator is presented. This linear actuator is a double-sided flat two-phase variable-reluctance linear stepper motor that moves a piston-type water pump with the help of a rope, a pulley and a counterweight. The entire actuator pump ensemble is controlled by a simple electronic unit that manages the electric power generated by a photovoltaic array. The proposed system is suitable for rural communities in developing...

  13. Designed pneumatic valve actuators for controlled droplet breakup and generation.

    Science.gov (United States)

    Choi, Jae-Hoon; Lee, Seung-Kon; Lim, Jong-Min; Yang, Seung-Man; Yi, Gi-Ra

    2010-02-21

    The dynamic breakup of emulsion droplets was demonstrated in double-layered microfluidic devices equipped with designed pneumatic actuators. Uniform emulsion droplets, produced by shearing at a T-junction, were broken into smaller droplets when they passed downstream through constrictions formed by a pneumatically actuated valve in the upper control layer. The valve-assisted droplet breakup was significantly affected by the shape and layout of the control valves on the emulsion flow channel. Interestingly, by actuating the pneumatic valve immediately above the T-junction, the sizes of the emulsion droplets were controlled precisely in a programmatic manner that produced arrays of uniform emulsion droplets in various sizes and dynamic patterns.

  14. A Study on a Microwave-Driven Smart Material Actuator

    Science.gov (United States)

    Choi, Sang H.; Chu, Sang-Hyon; Kwak, M.; Cutler, A. D.

    2001-01-01

    NASA s Next Generation Space Telescope (NGST) has a large deployable, fragmented optical surface (greater than or = 2 8 m in diameter) that requires autonomous correction of deployment misalignments and thermal effects. Its high and stringent resolution requirement imposes a great deal of challenge for optical correction. The threshold value for optical correction is dictated by lambda/20 (30 nm for NGST optics). Control of an adaptive optics array consisting of a large number of optical elements and smart material actuators is so complex that power distribution for activation and control of actuators must be done by other than hard-wired circuitry. The concept of microwave-driven smart actuators is envisioned as the best option to alleviate the complexity associated with hard-wiring. A microwave-driven actuator was studied to realize such a concept for future applications. Piezoelectric material was used as an actuator that shows dimensional change with high electric field. The actuators were coupled with microwave rectenna and tested to correlate the coupling effect of electromagnetic wave. In experiments, a 3x3 rectenna patch array generated more than 50 volts which is a threshold voltage for 30-nm displacement of a single piezoelectric material. Overall, the test results indicate that the microwave-driven actuator concept can be adopted for NGST applications.

  15. Optimization of Actuating Origami Networks

    Science.gov (United States)

    Buskohl, Philip; Fuchi, Kazuko; Bazzan, Giorgio; Joo, James; Gregory, Reich; Vaia, Richard

    2015-03-01

    Origami structures morph between 2D and 3D conformations along predetermined fold lines that efficiently program the form, function and mobility of the structure. By leveraging design concepts from action origami, a subset of origami art focused on kinematic mechanisms, reversible folding patterns for applications such as solar array packaging, tunable antennae, and deployable sensing platforms may be designed. However, the enormity of the design space and the need to identify the requisite actuation forces within the structure places a severe limitation on design strategies based on intuition and geometry alone. The present work proposes a topology optimization method, using truss and frame element analysis, to distribute foldline mechanical properties within a reference crease pattern. Known actuating patterns are placed within a reference grid and the optimizer adjusts the fold stiffness of the network to optimally connect them. Design objectives may include a target motion, stress level, or mechanical energy distribution. Results include the validation of known action origami structures and their optimal connectivity within a larger network. This design suite offers an important step toward systematic incorporation of origami design concepts into new, novel and reconfigurable engineering devices. This research is supported under the Air Force Office of Scientific Research (AFOSR) funding, LRIR 13RQ02COR.

  16. Transitory Control of Unsteady Separation using Pulsed Actuation

    International Nuclear Information System (INIS)

    Woo, George T K; Glezer, Ari

    2011-01-01

    The dynamic mechanisms of transitory flow attachment effected by pulsed actuation of the separated flow over a stalled airfoil are investigated experimentally. Actuation is effected by momentary pulsed jets generated by a spanwise array of combustion-based actuators such that the characteristic time of jet duration is nominally an order of magnitude shorter than the flow's convective time scale. The transitory flow field in the cross stream plane above the airfoil and in its near wake is investigated using multiple high-resolution PIV images that are obtained phase-locked to the actuation for continuous tracking of vorticity concentrations. The brief actuation pulse leads to severing of the separated vorticity layer and the subsequent shedding of large-scale vortical structures owing to the collapse of the separated flow domain which is accompanied by strong changes in the circulation about the entire airfoil. By exploiting the disparity between the characteristic times of flow response to actuation and relaxation, it is shown that successive actuation pulses can extend the flow attachment and enhance the global aerodynamic performance. It is also shown that coupling of the actuation to the airfoil's motion during cyclical pitch enhances the effect of transitory flow control and leads to a significant suppression of dynamic stall.

  17. Measurement of Mechanical Properties of Cantilever Shaped Materials

    Directory of Open Access Journals (Sweden)

    Thomas Thundat

    2008-05-01

    Full Text Available Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young’s modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature

  18. Pneumatic Muscle Actuator Control

    National Research Council Canada - National Science Library

    Lilly, John

    2000-01-01

    This research is relevant to the Air Fore mission because pneumatic muscle actuation devices arc advantageous for certain types of robotics as well as for strength and/or mobility assistance for humans...

  19. Clean room actuators

    Energy Technology Data Exchange (ETDEWEB)

    Higuchi, Toshiro

    1987-06-01

    This report explains on the present status of the clean room actuators including the author's research results. In a clean room, there exists a possibility of dust generation, even when a direct human work is eliminated by the use of robots or automatic machines, from the machines themselves. For this, it is important to develop such clean robots and transfer/positioning mechanism that do not generate dusts, and to develop an actuator and its control technique. Topics described in the report are as follows: 1. Prevention of dust diffusion by means of sealing. 2. Elimination of mechanical contact (Linear induction motor and pneumatic float, linear motor and magnetic attraction float, linear motor and air bearing, and magnetic bearing). 3. Contactless actuator having a positioning mechanism (Use of linear step motor and rotary contactless actuator). (15 figs, 11 refs)

  20. Tetherless thermobiochemically actuated microgrippers.

    Science.gov (United States)

    Leong, Timothy G; Randall, Christina L; Benson, Bryan R; Bassik, Noy; Stern, George M; Gracias, David H

    2009-01-20

    We demonstrate mass-producible, tetherless microgrippers that can be remotely triggered by temperature and chemicals under biologically relevant conditions. The microgrippers use a self-contained actuation response, obviating the need for external tethers in operation. The grippers can be actuated en masse, even while spatially separated. We used the microgrippers to perform diverse functions, such as picking up a bead on a substrate and the removal of cells from tissue embedded at the end of a capillary (an in vitro biopsy).

  1. Soft actuators and soft actuating devices

    Energy Technology Data Exchange (ETDEWEB)

    Yang, Dian; Whitesides, George M.

    2017-10-17

    A soft buckling linear actuator is described, including: a plurality of substantially parallel bucklable, elastic structural components each having its longest dimension along a first axis; and a plurality of secondary structural components each disposed between and bridging two adjacent bucklable, elastic structural components; wherein every two adjacent bucklable, elastic structural components and the secondary structural components in-between define a layer comprising a plurality of cells each capable of being connected with a fluid inflation or deflation source; the secondary structural components from two adjacent layers are not aligned along a second axis perpendicular to the first axis; and the secondary structural components are configured not to buckle, the bucklable, elastic structural components are configured to buckle along the second axis to generate a linear force, upon the inflation or deflation of the cells. Methods of actuation using the same are also described.

  2. Compact electrostatic comb actuator

    Science.gov (United States)

    Rodgers, M. Steven; Burg, Michael S.; Jensen, Brian D.; Miller, Samuel L.; Barnes, Stephen M.

    2000-01-01

    A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).

  3. Electromechanical actuation of buckypaper actuator: Material properties and performance relationships

    International Nuclear Information System (INIS)

    Cottinet, P.-J.; Souders, C.; Tsai, S.-Y.; Liang, R.; Wang, B.; Zhang, C.

    2012-01-01

    Carbon nanotubes can be assembled into macroscopic thin film materials called buckypapers. To incorporate buckypaper actuators into engineering systems, it is of high importance to understand their material property-actuation performance relationships in order to model and predict the behavior of these actuators. The electromechanical actuation of macroscopic buckypaper structures and their actuators, including single and multi-walled carbon nanotube buckypapers and aligned single-walled nanotube buckypapers, were analyzed and compared. From the experimental evidence, this Letter discusses the effects of the fundamental material properties, including Young modulus and electrical double layer properties, on actuation performance of the resultant actuators. -- Highlights: ► In this study we identified the figure of merit of the electromechanical conversion. ► Different type of buckypaper was realized and characterized for actuation properties. ► The results demonstrated the potential of Buckypapers/Nafion for actuation

  4. Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

    KAUST Repository

    Conchouso Gonzalez, David

    2015-04-01

    This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.

  5. 3D Printing of Cantilever-Type Microstructures by Stereolithography of Ferromagnetic Photopolymers.

    Science.gov (United States)

    Credi, Caterina; Fiorese, Alessandro; Tironi, Marco; Bernasconi, Roberto; Magagnin, Luca; Levi, Marinella; Turri, Stefano

    2016-10-05

    In the present work, prototypes of polymeric cantilever-based magnetic microstructures were fabricated by means of stereolithography (SL). To this end, a UV-curable system suitable for high-resolution SL-processing was formulated by blending a bifunctional acrylic monomer with photoinitiator and visible dye whose content was tuned to tailor resin SL sensitivity. Subsequently, to confer ferromagnetic properties to the photopolymer, two different strategies were implemented. A two-step approach involved selective deposition of a metal layer on photopolymer SL-cured surfaces through an electroless plating process. On the other hand, SL-processable ferromagnetically responsive nanocomposites (FRCs) were obtained by directly loading magnetite nanoparticles within the photopolymer matrix. In order to achieve high-printing resolution, resin SL sensitivities were studied as a function of the various additives contents. Photocalorimetric analyses were also performed to investigate the photopolymer conversion efficiency upon light exposure. High-performing formulations were characterized by reduced penetration depth (printing of micrometric structures. Finally, the self-standing characteristics of the resin combined with the layered-fashion deposition typical of the 3D printing technologies were exploited for the fabrication of cantilever (CL)-based beams presented as possible magnetic sensors. As a demonstration of the feasibility of the two approaches, the magnetic beams were successfully actuated and their sensing performances in terms of static deflection vs applied magnetic field applied were qualitatively studied. Being not restricted to CL-based geometries, the combination of SL-printing with the formulation of novel smart photopolymers open the way toward the fabrication of high-customized complex 3D models integrating functional microstructures.

  6. Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

    OpenAIRE

    DEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; THOMAS, Olivier; DEÜ, Jean-François; NICU, Liviu

    2013-01-01

    In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale

  7. Efficiency Enhancement of a Cantilever-Based Vibration Energy Harvester

    Directory of Open Access Journals (Sweden)

    Ali E. Kubba

    2013-12-01

    Full Text Available Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA was used as an initial tool to compare the three geometries’ stiffness (K, output open-circuit voltage (Vave, and average normal strain in the piezoelectric transducer (εave that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3, has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle.

  8. SU-8 hollow cantilevers for AFM cell adhesion studies

    Science.gov (United States)

    Martinez, Vincent; Behr, Pascal; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva; Vörös, Janos; Zambelli, Tomaso

    2016-05-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m-1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification.

  9. SU-8 hollow cantilevers for AFM cell adhesion studies

    International Nuclear Information System (INIS)

    Martinez, Vincent; Behr, Pascal; Vörös, Janos; Zambelli, Tomaso; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva

    2016-01-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m −1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification. (paper)

  10. Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation

    NARCIS (Netherlands)

    Chen, J.-Z.; Darhuber, A.A.; Troian, S.M.; Wagner, S.

    2004-01-01

    The design and performance of a miniaturized coplanar capacitive sensor is presented whose electrode arrays can also function as resistive microheaters for thermocapillary actuation of liquid films and droplets. Optimal compromise between large capacitive signal and high spatial resolution is

  11. Wirelessly driven electro-active paper actuator made with cellulose–polypyrrole–ionic liquid and dipole rectenna

    International Nuclear Information System (INIS)

    Yang, Sang Yeol; Mahadeva, Suresha K; Kim, Jaehwan

    2010-01-01

    This paper reports a wirelessly driven electro-active paper actuator that consists of a dipole rectenna array, a power control circuit and two cellulose–polypyrrole–ionic liquid (CPIL) electro-active paper actuators. The CPIL nanocomposite actuator was fabricated by incorporating nanoscaled PPy onto cellulose by an in situ polymerization technique, which was followed by activation in a room temperature ionic liquid. The CPIL actuator shows its maximum bending displacement of 10 mm at an ambient humidity condition with 30 mW electrical power consumption. The CPIL actuator is very stable in its actuator performance. The dipole rectenna array receives microwaves and converts them to dc power so as to wirelessly supply power to the actuators. Three flexible dipole rectenna arrays are designed, manufactured and characterized. The rectenna array that has nine rectenna elements generates the maximum power of 75 mW. This power was used to successfully activate the two CPIL actuators and the control circuit. Detailed fabrication and characterization of the CPIL actuator and the dipole rectenna array as well as the control circuit are explained

  12. Conductive oxide cantilever for cryogenic nano-potentiometry

    International Nuclear Information System (INIS)

    Hiroya, Tsutomu; Inagaki, Katsuhiko; Tanda, Satoshi; Tsuneta, Taku; Yamaya, Kazuhiko

    2003-01-01

    Nanoscale electrical transport properties have attracted attentions because of new phenomena such as ballistic transport, quantized resistance, and Coulomb blockade. For measurement of nanoscale resistance, we have been developing a cryogenic atomic force microscope that can operate at 1.8 K. To use it as an electrode, we coated the cantilever with conductive oxides of TiO and indium tin oxide (ITO). We verified that TiO and ITO thin films remain conductive even at 4.2 K. Also we measured I-V characteristics of the tip-sample contact with a standard sample of NbSe 2 single crystal, and found that the conductive coats were not lost under large stresses due to the tip-sample contact. Moreover, we succeeded in obtaining a room temperature nano-potentiometry of a gold thin film with the ITO coated cantilever. In conclusion, the TiO and ITO coated cantilevers are applicable to cryogenic nano-potentiometry

  13. Improved Noninterferometric Test of Collapse Models Using Ultracold Cantilevers

    Science.gov (United States)

    Vinante, A.; Mezzena, R.; Falferi, P.; Carlesso, M.; Bassi, A.

    2017-09-01

    Spontaneous collapse models predict that a weak force noise acts on any mechanical system, as a consequence of the collapse of the wave function. Significant upper limits on the collapse rate have been recently inferred from precision mechanical experiments, such as ultracold cantilevers and the space mission LISA Pathfinder. Here, we report new results from an experiment based on a high-Q cantilever cooled to millikelvin temperatures, which is potentially able to improve the current bounds on the continuous spontaneous localization (CSL) model by 1 order of magnitude. High accuracy measurements of the cantilever thermal fluctuations reveal a nonthermal force noise of unknown origin. This excess noise is compatible with the CSL heating predicted by Adler. Several physical mechanisms able to explain the observed noise have been ruled out.

  14. A new approach for elasto-plastic finite strain analysis of cantilever ...

    Indian Academy of Sciences (India)

    A new approach for elasto-plastic finite strain analysis of cantilever beams subjected to uniform bending moment ... Curvature; deflection curve; cantilever beam; elasto-plastic analysis; tapered beam subjected to tipmoment; ... Sadhana | News.

  15. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Grutzik, Scott J.; Zehnder, Alan T. [Field of Theoretical and Applied Mechanics, Cornell University, Ithaca, New York 14853 (United States); Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F. [Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)

    2013-11-15

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included.

  16. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Grutzik, Scott J.; Zehnder, Alan T.; Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F.

    2013-01-01

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included

  17. Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications

    NARCIS (Netherlands)

    Iannuzzi, D.; Deladi, S.; Schreuders, H.; Slaman, M.; Rector, J.H.; Elwenspoek, Michael Curt

    2006-01-01

    Fiber-top cantilevers are new monolithic devices obtained by carving a cantilever out of the edge of a single-mode optical fiber. Here we report evidences of their potential impact as sensing devices for multipurpose applications.

  18. High-bandwidth piezoresistive force probes with integrated thermal actuation

    International Nuclear Information System (INIS)

    Doll, Joseph C; Pruitt, Beth L

    2012-01-01

    We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond timescale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN nm −1 ) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors, while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using the open-source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20-fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness. (paper)

  19. High bandwidth piezoresistive force probes with integrated thermal actuation

    Science.gov (United States)

    Doll, Joseph C.; Pruitt, Beth L.

    2012-01-01

    We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond time scale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN/nm) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using open source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20 fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness. PMID:23175616

  20. Chained Iron Microparticles for Directionally Controlled Actuation of Soft Robots.

    Science.gov (United States)

    Schmauch, Marissa M; Mishra, Sumeet R; Evans, Benjamin A; Velev, Orlin D; Tracy, Joseph B

    2017-04-05

    Magnetic field-directed self-assembly of magnetic particles in chains is useful for developing directionally responsive materials for applications in soft robotics. Using materials with greater complexity allows advanced functions, while still using simple device architectures. Elastomer films containing chained magnetic microparticles were prepared through solvent casting and formed into magnetically actuated lifters, accordions, valves, and pumps. Chaining both enhances actuation and imparts a directional response. Cantilevers used as lifters were able to lift up to 50 times the mass of the polymer film. We introduce the "specific torque", the torque per field per mass of magnetic particles, as a figure of merit for assessing and comparing the performance of lifters and related devices. Devices in this work generated specific torques of 68 Nm/kgT, which is significantly higher than in previously reported actuators. Applying magnetic fields to folded accordion structures caused extension and compression, depending on the accordion's orientation. In peristaltic pumps comprised of composite tubes containing embedded chains, magnetic fields caused a section of the tube to pinch closed where the field was applied. These results will facilitate both the further development of soft robots based on chained magnetic particles and efforts to engineer materials with higher specific torque.

  1. Self-actuated Polymeric Valve for Autonomous Sensing and Mixing

    DEFF Research Database (Denmark)

    Häfliger, Daniel; Marie, Rodolphe Charly Willy; Boisen, Anja

    2005-01-01

    We present an autonomously operated microvalve array for chemical sensing and mixing, which gains the actuation energy from a chemical reaction on the valve structure. An 8-μm-thick flapper valve made in SU-8 is coated with stress-loaded Al on one side and Ti on the other side. The metal films ke...... a reservoir. Calculations reveal that valve operation with stress originating from biochemical processes will require considerable enhancement of the actuation efficiency.......We present an autonomously operated microvalve array for chemical sensing and mixing, which gains the actuation energy from a chemical reaction on the valve structure. An 8-μm-thick flapper valve made in SU-8 is coated with stress-loaded Al on one side and Ti on the other side. The metal films keep...

  2. Numerical Simulation of Output Response of PVDF Sensor Attached on a Cantilever Beam Subjected to Impact Loading

    Directory of Open Access Journals (Sweden)

    Cao Vu Dung

    2016-04-01

    Full Text Available Polyvinylidene Flouride (PVDF is a film-type polymer that has been used as sensors and actuators in various applications due to its mechanical toughness, flexibility, and low density. A PVDF sensor typically covers an area of the host structure over which mechanical stress/strain is averaged and converted to electrical energy. This study investigates the fundamental “stress-averaging” mechanism for dynamic strain sensing in the in-plane mode. A numerical simulation was conducted to simulate the “stress-averaging” mechanism of a PVDF sensor attached on a cantilever beam subjected to an impact loading, taking into account the contribution of piezoelectricity, the cantilever beam’s modal properties, and electronic signal conditioning. Impact tests and FEM analysis were also carried out to verify the numerical simulation results. The results of impact tests indicate the excellent capability of the attached PVDF sensor in capturing the fundamental natural frequencies of the cantilever beam. There is a good agreement between the PVDF sensor’s output voltage predicted by the numerical simulation and that obtained in the impact tests. Parametric studies were conducted to investigate the effects of sensor size and sensor position and it is shown that a larger sensor tends to generate higher output voltage than a smaller one at the same location. However, the effect of sensor location seems to be more significant for larger sensors due to the cancelling problem. Overall, PVDF sensors exhibit excellent sensing capability for in-plane dynamic strain induced by impact loading.

  3. Pembuatan Cantilever Bridge Anterior Rahang Atas sebagai Koreksi Estetik

    Directory of Open Access Journals (Sweden)

    Yusrina Sumartati

    2012-12-01

    Full Text Available Latar belakang. Kehilangan gigi anterior rahang atas mengakibatkan gangguan fungsi fonetik dan estetik. Gangguan fungsi estetik menyebabkan pasie menjadi rendah diri. Kondisi ini dapat diatasi oleh dokter gigi, salah satunya dengan pembuatan cantilever bridge. Tujuan. Penulisan ini yaitu untuk memberi informasi bahwa pada kasus kehilangan gigi-gigi anterior rahang atas dengan space yang telah menyempit dan malposisi gigi dapat dibuatkan protesa berupa gigi tiruan cekat dengan desain cantilever bridge. Kasus dan perawatan. Laporan kasus ini membahas tentang pasien perempuan umur 39 tahun yang datang ke Rumah Sakit Gigi dan Mulut Prof. Soedomo, dengan keluhan merasa kurang percaya diri karena gigi depan rahang atas hilang sejak 5 tahun yang lalu akibat kecelakaan. Gigi-gigi anterior rahang atas yang masih ada mengalami malposisi akibat pemakaian gigi tiruan sebagian lepasan yang tidak baik. Perawatan yang dilakukan adalah dengan pembuatan cantilever bridge pada gigi 11, 12, 13 dan 21, 22, 23. Kesimpulan. Gangguan fungsi estetik pada gigi anterior rahang atas dapat diatasi dengan pembuatan cantilever bridge.   Background. Maxillary anteriortooth loss resulting in impaired function of phonetic and aesthetic. Impaired function of aesthetic cause patients to become self conscious. This condition can be treated by a dentist, one with a cantilever bridge. Purpose. To inform that in case of missing anterior teeth of the upper jaw with a space that has been narrowed, and malposition of teeth can be made prosthesis denture fixed bridge with a cantilever design. Case and treatment. This case report discusses the 39 years old female patient who came to he Dental Hospital Prof. Soedomo, with complaints of feeling less confident due to the maxillary front teeth missing since 5 years ago due to an accident. Anterior teeth of the upper jaw are still experiencing malposition due to the use of removable partial dentures are not good. The treatment is done is by

  4. Hydraulically actuated artificial muscles

    Science.gov (United States)

    Meller, M. A.; Tiwari, R.; Wajcs, K. B.; Moses, C.; Reveles, I.; Garcia, E.

    2012-04-01

    Hydraulic Artificial Muscles (HAMs) consisting of a polymer tube constrained by a nylon mesh are presented in this paper. Despite the actuation mechanism being similar to its popular counterpart, which are pneumatically actuated (PAM), HAMs have not been studied in depth. HAMs offer the advantage of compliance, large force to weight ratio, low maintenance, and low cost over traditional hydraulic cylinders. Muscle characterization for isometric and isobaric tests are discussed and compared to PAMs. A model incorporating the effect of mesh angle and friction have also been developed. In addition, differential swelling of the muscle on actuation has also been included in the model. An application of lab fabricated HAMs for a meso-scale robotic system is also presented.

  5. Actuator with Multi Degrees of Freedom(Actuator)

    OpenAIRE

    矢野, 智昭; Tomoaki, YANO; 産業技術総合研究所

    2006-01-01

    The advantages, problems and the recent developments of the actuator with multi degrees of freedom are presented. At first, the advantages of the actuator with multi degrees of freedom are described. Next, the problems needed to solve for practical use are presented. The recent applications of the actuator with multi degrees of freedom are also reviewed.

  6. Pressure sensor based on MEMS nano-cantilever beam structure as a heterodielectric gate electrode of dopingless TFET

    Science.gov (United States)

    Kumar, Gagan; Raman, Ashish

    2016-12-01

    Micro-electromechanical systems (MEMS) technology has enticed numerous scientists since recent decades particularly in the field of miniaturized-sensors and actuators. Pressure sensor is pivotal component in both of the forerunning fields. The pursuance of a pressure sensor is exigently relying upon its different physical properties i.e. Piezo-resistive, Piezoelectric, Capacitive, Magnetic and Electrostatic. This article presents an outline and scrutiny of the Doping-less Cantilever Based Pressure Sensor using tunnel field effect transistor technology. The propounded pressure sensor based on the principle of capacitive gate coupling, due to which the tunneling current is modified. Additionally, to enhance the affectability of pressure sensor, the work function of metal gate electrode is amended using gas molecule diffusion. Simulation uncovers a phenomenal relationship amongst hypothetical and practical accepts of configuration. The pressure sensor is composed at Silvaco Atlas tool utilizing 40 nm technologies. The performance results exhibit that the proposed model consumes ≤1 mW power and 250 μA tunneling current per nm bending of cantilever beam structure. The inclusive length of the proposed device is 100 nm.

  7. The Actuated Guitar

    DEFF Research Database (Denmark)

    Larsen, Jeppe Veirum; Overholt, Daniel; Moeslund, Thomas B.

    2013-01-01

    Playing a guitar is normally only for people with fully functional hands. In this work we investigate alternative interaction concepts to enable or re-enable people with non-functional right hands or arms to play a guitar via actuated strumming. The functionality and complexity of right hand...... interaction with the guitar is immense. We therefore divided the right hand techniques into three main areas: Strumming, string picking / skipping, and string muting. This paper explores the first stage, strum- ming. We have developed an exploratory platform called the Actuated Guitar that utilizes a normal...

  8. Fault tolerant linear actuator

    Science.gov (United States)

    Tesar, Delbert

    2004-09-14

    In varying embodiments, the fault tolerant linear actuator of the present invention is a new and improved linear actuator with fault tolerance and positional control that may incorporate velocity summing, force summing, or a combination of the two. In one embodiment, the invention offers a velocity summing arrangement with a differential gear between two prime movers driving a cage, which then drives a linear spindle screw transmission. Other embodiments feature two prime movers driving separate linear spindle screw transmissions, one internal and one external, in a totally concentric and compact integrated module.

  9. Actuator concepts and mechatronics

    Science.gov (United States)

    Gilbert, Michael G.; Horner, Garnett C.

    1998-06-01

    Mechatronic design implies the consideration of integrated mechanical, electrical, and local control characteristics in electromechanical device design. In this paper, mechatronic development of actuation device concepts for active aircraft aerodynamic flow control are presented and discussed. The devices are intended to be embedded in aircraft aerodynamic surfaces to provide zero-net-momentum jets or additional flow-vorticity to control boundary layers and flow- separation. Two synthetic jet device prototypes and one vorticity-on-demand prototype currently in development are described in the paper. The aspects of actuation materials, design approaches to generating jets and vorticity, and the integration of miniaturized electronics are stressed.

  10. Integrated optical readout for miniaturization of cantilever-based sensor system

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts...

  11. Microfluidic sensors based on perforated cantilevers

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole

    Arbejdet presenteret i denne PhD afhandling omhandler udviklingen af en mikrofluide sensor basered på bjælke teknologi. Bjælkerne er fremstillet i den negative photo-resist SU-8 og i SiN. I bjælkerne er der inkorporeret et array af huller. To nye sensorer er udviklet på baggrund af de perforerede...

  12. Control of a flexible beam actuated by macro-fiber composite patches: I. Modeling and feedforward trajectory control

    International Nuclear Information System (INIS)

    Schröck, Johannes; Meurer, Thomas; Kugi, Andreas

    2011-01-01

    This paper considers a systematic approach for motion planning and feedforward control design for a flexible cantilever actuated by piezoelectric macro-fiber composite (MFC) patches. For accurate feedforward tracking control, special attention has to be paid to the inherent nonlinear hysteresis and creep behavior of these actuators. In order to account for these effects an appropriate compensator is applied which allows us to perform the tracking controller design on the basis of a linear infinite-dimensional model. A detailed analysis of the nonlinear actuator behavior as well as the compensator design and the overall experimental validation is presented in the companion paper (Schröck et al 2011 Smart Mater. Struct. 20 015016). The governing equations of motion of the hysteresis and creep compensated cantilever are determined by means of the extended Hamilton's principle. This allows us to consider the influence of the bonded patch actuators on the mechanical properties of the underlying beam structure in a straightforward manner and results in a model with spatially varying system parameters. For the solution of the motion planning and feedforward control problem a flatness-based methodology is proposed. In a first step, the infinite-dimensional system of the MFC-actuated flexible cantilever is approximated by a finite-dimensional model, where all system variables, i.e. the states, input and output, can be parameterized in terms of a so-called flat output. In a second step, it is shown by numerical simulations that these parameterizations converge with increasing system order of the finite-dimensional model such that the feedforward control input can be directly calculated in order to realize prescribed output trajectories

  13. Actuating movement in refined wearables

    NARCIS (Netherlands)

    Toeters, M.J.; Feijs, L.M.G.

    2014-01-01

    Nowadays it is quite possible to deploy textiles as sensors and avoid traditional hard sensors. Actuation (movement) turns out more difficult. It is advantageous to combine sensing and actuation, similar to ecological perception theory. Although several actuators are known: SMA, voice coil, motors,

  14. Airplane Actuation Trade Study

    Science.gov (United States)

    1983-01-01

    Some of these advancements were high voltage power supplies, permanent magnet motors using rare earth magnets, electronic comnmutation and an...Essentially the inverter chops and pulse width modulates the 270 VDC power supplied by the electrical power system to cause the actuator’s permanent magnet motors to

  15. Piezoresistive Cantilever Performance-Part I: Analytical Model for Sensitivity.

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C; Pruitt, Beth L

    2010-02-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.

  16. Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C.; Pruitt, Beth L.

    2010-01-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors. PMID:20336183

  17. An Astigmatic Detection System for Polymeric Cantilever-based Sensors

    DEFF Research Database (Denmark)

    Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo

    2012-01-01

    fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially...

  18. A new detection system for extremely small vertically mounted cantilevers

    International Nuclear Information System (INIS)

    Antognozzi, M; Ulcinas, A; Picco, L; Simpson, S H; Miles, M J; Heard, P J; Szczelkun, M D; Brenner, B

    2008-01-01

    Detection techniques currently used in scanning force microscopy impose limitations on the geometrical dimensions of the probes and, as a consequence, on their force sensitivity and temporal response. A new technique, based on scattered evanescent electromagnetic waves (SEW), is presented here that can detect the displacement of the extreme end of a vertically mounted cantilever. The resolution of this method is tested using different cantilever sizes and a theoretical model is developed to maximize the detection sensitivity. The applications presented here clearly show that the SEW detection system enables the use of force sensors with sub-micron size, opening new possibilities in the investigation of biomolecular systems and high speed imaging. Two types of cantilevers were successfully tested: a high force sensitivity lever with a spring constant of 0.17 pN nm -1 and a resonant frequency of 32 kHz; and a high speed lever with a spring constant of 50 pN nm -1 and a resonant frequency of 1.8 MHz. Both these force sensors were fabricated by modifying commercial microcantilevers in a focused ion beam system. It is important to emphasize that these modified cantilevers could not be detected by the conventional optical detection system used in commercial atomic force microscopes

  19. Global consequences of a local Casimir force : Adhered cantilever

    NARCIS (Netherlands)

    Svetovoy, V. B.; Melenev, A. E.; Lokhanin, M. V.; Palasantzas, G.

    2017-01-01

    Although stiction is a cumbersome problem for microsystems, it stimulates investigations of surface adhesion. In fact, the shape of an adhered cantilever carries information of the adhesion energy that locks one end to the substrate. We demonstrate here that the system is also sensitive to the

  20. Strategy Guideline: Quality Management in Existing Homes - Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Sikora, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wiehagen, J. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States); Wood, A. [NAHB Research Center Industry Partnership, Upper Marlboro, MD (United States)

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented.

  1. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  2. Aluminum nano-cantilevers for high sensitivity mass sensors

    DEFF Research Database (Denmark)

    Davis, Zachary James; Boisen, Anja

    2005-01-01

    We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Further...

  3. Optimised cantilever biosensor with piezoresistive read-out

    DEFF Research Database (Denmark)

    Rasmussen, Peter; Thaysen, J.; Hansen, Ole

    2003-01-01

    We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well sui...

  4. Thermally Actuated Hydraulic Pumps

    Science.gov (United States)

    Jones, Jack; Ross, Ronald; Chao, Yi

    2008-01-01

    Thermally actuated hydraulic pumps have been proposed for diverse applications in which direct electrical or mechanical actuation is undesirable and the relative slowness of thermal actuation can be tolerated. The proposed pumps would not contain any sliding (wearing) parts in their compressors and, hence, could have long operational lifetimes. The basic principle of a pump according to the proposal is to utilize the thermal expansion and contraction of a wax or other phase-change material in contact with a hydraulic fluid in a rigid chamber. Heating the chamber and its contents from below to above the melting temperature of the phase-change material would cause the material to expand significantly, thus causing a substantial increase in hydraulic pressure and/or a substantial displacement of hydraulic fluid out of the chamber. Similarly, cooling the chamber and its contents from above to below the melting temperature of the phase-change material would cause the material to contract significantly, thus causing a substantial decrease in hydraulic pressure and/or a substantial displacement of hydraulic fluid into the chamber. The displacement of the hydraulic fluid could be used to drive a piston. The figure illustrates a simple example of a hydraulic jack driven by a thermally actuated hydraulic pump. The pump chamber would be a cylinder containing encapsulated wax pellets and containing radial fins to facilitate transfer of heat to and from the wax. The plastic encapsulation would serve as an oil/wax barrier and the remaining interior space could be filled with hydraulic oil. A filter would retain the encapsulated wax particles in the pump chamber while allowing the hydraulic oil to flow into and out of the chamber. In one important class of potential applications, thermally actuated hydraulic pumps, exploiting vertical ocean temperature gradients for heating and cooling as needed, would be used to vary hydraulic pressures to control buoyancy in undersea research

  5. Method for driving an actuator, actuator drive, and apparatus comprising an actuator

    OpenAIRE

    2010-01-01

    An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a drive signal source output to a driver circuit output, in order to selectively change the electrical damping of an actuator. For example, the electrical damping of a radial actuator or a focus actuat...

  6. Miniature Low-Mass Drill Actuated by Flextensional Piezo Stack

    Science.gov (United States)

    Sherrit, Stewart; Badescu, Mircea; Bar-Cohen, Yoseph

    2010-01-01

    Recent experiments with a flextensional piezoelectric actuator have led to the development of a sampler with a bit that is designed to produce and capture a full set of sample forms including volatiles, powdered cuttings, and core fragments. The flextensional piezoelectric actuator is a part of a series of devices used to amplify the generated strain from piezoelectric actuators. Other examples include stacks, bimorphs, benders, and cantilevers. These devices combine geometric and resonance amplifications to produce large stroke at high power density. The operation of this sampler/drill was demonstrated using a 3x2x1-cm actuator weighing 12 g using power of about 10-W and a preload of about 10 N. A limestone block was drilled to a depth of about 1 cm in five minutes to produce powdered cuttings. It is generally hard to collect volatiles from random surface profiles found in rocks and sediment, powdered cuttings, and core fragments. Toward the end of collecting volatiles, the actuator and the bit are covered with bellows-shaped shrouds to prevent fines and other debris from reaching the analyzer. A tube with a miniature bellows (to provide flexibility) is connected to the bit and directs the flow of the volatiles to the analyzer. Another modality was conceived where the hose is connected to the bellows wall directly to allow the capture of volatiles generated both inside and outside the bit. A wide variety of commercial bellows used in the vacuum and microwave industries can be used to design the volatiles capture mechanism. The piezoelectric drilling mechanism can potentially be operated in a broad temperature range from about-200 to less than 450 C. The actuators used here are similar to the actuators that are currently baselined to fly as part of the inlet funnel shaking mechanism design of MSL (Mars Science Laboratory). The space qualification of these parts gives this drill a higher potential for inclusion in a future mission, especially when considering its

  7. Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

    International Nuclear Information System (INIS)

    Larsen, T; Doll, J C; Loizeau, F; Pruitt, B L; Hosseini, N; Fantner, G E; Peng, A W; Ricci, A J

    2017-01-01

    Electrothermal actuators have many advantages compared to other actuators used in micro-electro-mechanical systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10–90% rise time of 85 μ s in air and 234 μ s in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10–90% rise time from 85 μ s to 3 μ s in air and from 234 μ s to 5 μ s in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate. (paper)

  8. Rise Time Reduction of Thermal Actuators Operated in Air and Water through Optimized Pre-Shaped Open-Loop Driving.

    Science.gov (United States)

    Larsen, T; Doll, J C; Loizeau, F; Hosseini, N; Peng, A W; Fantner, G; Ricci, A J; Pruitt, B L

    2017-01-01

    Electrothermal actuators have many advantages compared to other actuators used in Micro-Electro-Mechanical Systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10-90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10-90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

  9. Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.

  10. Modified cantilevers to probe unambiguously out-of-plane piezoresponse

    Science.gov (United States)

    Alyabyeva, Natalia; Ouvrard, Aimeric; Lindfors-Vrejoiu, Ionela; Kolomiytsev, Alexey; Solodovnik, Maxim; Ageev, Oleg; McGrouther, Damien

    2018-06-01

    We demonstrate and investigate the coupling of contributions from both in-plane (IP) polarization and out-of-plane (OP) components in BiFeO3 (BFO) thin-film polarization probed by piezoresponse force microscopy (PFM). Such coupling leads to image artifacts which prevent the correct determination of OP polarization vector directions and the corresponding piezoelectric coefficient d33. Using material strength theory with a one-dimensional modeling of the cantilever oscillation amplitude under electrostatic and elastic forces as a function of the tip length, we have evidenced the impact of IP piezoresponse to the OP signal for tip length longer than 4 μm. The IP polarization vector induces a significant longitudinal bending of the cantilever, due to the small spring constant of long tips, which provokes a normal deviation superimposed to the OP piezoresponse. These artifacts can be reduced by increasing the longitudinal spring constant of the cantilever by shortening the tip length. Standard cantilevers with 15-μm-long tips were modified to reach the desired tip length, using focused ion-beam techniques and tested using PFM on the same BFO thin film. Tip length shortening has strongly reduced IP artifacts as expected, while the impact of nonlocal electrostatic forces, becoming predominant for tips shorter than 1 μm, has led to a non-negligible deflection offset. For shorter tips, a strong electric field from a cantilever beam can induce polarization switching as observed for a 0.5-μm-long tip. Tip length ranging from 1 to 4 μm allowed minimizing both artifacts to probe unambiguously OP piezoresponse and quantify the d33 piezoelectric coefficient.

  11. Modeling and control of sound radiation by simply supported and cantilever beam coupled with smart material

    Directory of Open Access Journals (Sweden)

    Vitaly Makarenko

    2007-03-01

    Full Text Available  In this paper forced vibration of the beam due to bonded piezoelectric patch is considered. When an external excitation is applied to the beam, it starts to vibrate, and the resulting acoustic response is predicted from the analytical model, which is based on Bernoulli-Euler theory of beam vibration. Analytical research of the sound radiation by a finite elastic beam is done for criteria based on minimal total sound power level. Helmholtz equation and inhomogeneous differential equation for beam transverse motion defines the solution to this problem. Such solutions were found for boundary conditions of simply supported and cantilever beams. In order to solve the task two analytical methods were used for simply supported beam. The solutions received by Fourier transform and Green functions approach give the very similar results, thus, proving methods reliability. At the case studies the exerted voltage, phase, location and piezoelectric actuator length are varied in order to establish their influence on noise attenuation.

  12. Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses

    KAUST Repository

    Bouchaala, Adam M.

    2016-03-21

    We present analytical and numerical techniques to accurately calculate the shifts in the natural frequencies of electrically actuated micro and nano (carbon nanotubes (CNTs)) cantilever beams implemented as resonant sensors for mass detection of biological entities, particularly Escherichia coli (E. coli) and prostate specific antigen (PSA) cells. The beams are modeled as Euler-Bernoulli beams, including the nonlinear electrostatic forces and the added biological cells, which are modeled as discrete point masses. The frequency shifts due to the added masses of the cells are calculated for the fundamental and higher-order modes of vibrations. Analytical expressions of the natural frequency shifts under a direct current (DC) voltage and an added mass have been developed using perturbation techniques and the Galerkin approximation. Numerical techniques are also used to calculate the frequency shifts and compared with the analytical technique. We found that a hybrid approach that relies on the analytical perturbation expression and the Galerkin procedure for calculating accurately the static behavior presents the most computationally efficient approach. We found that using higher-order modes of vibration of micro-electro-mechanical-system (MEMS) beams or miniaturizing the sizes of the beams to nanoscale leads to significant improved frequency shifts, and thus increased sensitivities. © 2016 by ASME.

  13. Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles

    Science.gov (United States)

    Korayem, M. H.; Taheri, M.; Ghahnaviyeh, S. D.

    2015-08-01

    Due to the more delicate nature of biological micro/nanoparticles, it is necessary to compute the critical force of manipulation. The modeling and simulation of reactions and nanomanipulator dynamics in a precise manipulation process require an exact modeling of cantilevers stiffness, especially the stiffness of dagger cantilevers because the previous model is not useful for this investigation. The stiffness values for V-shaped cantilevers can be obtained through several methods. One of them is the PBA method. In another approach, the cantilever is divided into two sections: a triangular head section and two slanted rectangular beams. Then, deformations along different directions are computed and used to obtain the stiffness values in different directions. The stiffness formulations of dagger cantilever are needed for this sensitivity analyses so the formulations have been driven first and then sensitivity analyses has been started. In examining the stiffness of the dagger-shaped cantilever, the micro-beam has been divided into two triangular and rectangular sections and by computing the displacements along different directions and using the existing relations, the stiffness values for dagger cantilever have been obtained. In this paper, after investigating the stiffness of common types of cantilevers, Sobol sensitivity analyses of the effects of various geometric parameters on the stiffness of these types of cantilevers have been carried out. Also, the effects of different cantilevers on the dynamic behavior of nanoparticles have been studied and the dagger-shaped cantilever has been deemed more suitable for the manipulation of biological particles.

  14. Dielectric Actuation of Polymers

    Science.gov (United States)

    Niu, Xiaofan

    Dielectric polymers are widely used in a plurality of applications, such as electrical insulation, dielectric capacitors, and electromechanical actuators. Dielectric polymers with large strain deformations under an electric field are named dielectric elastomers (DE), because of their relative low modulus, high elongation at break, and outstanding resilience. Dielectric elastomer actuators (DEA) are superior to traditional transducers as a muscle-like technology: large strains, high energy densities, high coupling efficiency, quiet operation, and light weight. One focus of this dissertation is on the design of DE materials with high performance and easy processing. UV radiation curing of reactive species is studied as a generic synthesis methodology to provide a platform for material scientists to customize their own DE materials. Oligomers/monomers, crosslinkers, and other additives are mixed and cured at appropriate ratios to control the stress-strain response, suppress electromechanical instability of the resulting polymers, and provide stable actuation strains larger than 100% and energy densities higher than 1 J/g. The processing is largely simplified in the new material system by removal of the prestretching step. Multilayer stack actuators with 11% linear strain are demonstrated in a procedure fully compatible with industrial production. A multifunctional DE derivative material, bistable electroactive polymer (BSEP), is invented enabling repeatable rigid-to-rigid deformation without bulky external structures. Bistable actuation allows the polymer actuator to have two distinct states that can support external load without device failure. Plasticizers are used to lower the glass transition temperature to 45 °C. Interpenetrating polymer network structure is established inside the BSEP to suppress electromechanical instability, providing a breakdown field of 194 MV/m and a stable bistable strain as large as 228% with a 97% strain fixity. The application of BSEP

  15. Drift study of SU8 cantilevers in liquid and gaseous environments.

    Science.gov (United States)

    Tenje, Maria; Keller, Stephan; Dohn, Søren; Davis, Zachary J; Boisen, Anja

    2010-05-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

  16. Drift study of SU8 cantilevers in liquid and gaseous environments

    DEFF Research Database (Denmark)

    Tenje, Maria; Keller, Stephan Sylvest; Dohn, Søren

    2010-01-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1 mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe...... coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum....... this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we...

  17. Control of a flexible beam actuated by macro-fiber composite patches: II. Hysteresis and creep compensation, experimental results

    International Nuclear Information System (INIS)

    Schröck, Johannes; Meurer, Thomas; Kugi, Andreas

    2011-01-01

    This paper considers a flexible cantilever beam, which is actuated by piezoelectric macro-fiber composite (MFC) patch actuators. For accurate positioning tasks, special attention has to be paid to the inherent nonlinear hysteresis and creep behavior of these actuators. A detailed analysis of the MFC-actuated cantilever verifies that these nonlinearities can be efficiently captured by an operator-based model using Prandtl–Ishlinskii's theory. Based on a Hammerstein-like model with the nonlinearities at the input connected in series with a linear infinite-dimensional beam model it follows that hysteresis and creep effects can be compensated by application of the inverse operator. Experimental results prove the feasibility of this approach. With this result, the tracking accuracy of the combination of the compensator with the flatness-based feedforward control design as proposed in the companion paper (Schröck et al 2011 Smart Mater. Struct. 20 015015) can be verified. Measurements demonstrate the applicability of this approach for the realization of highly dynamic trajectories for the beam's tip deflection

  18. Homotopy Analysis Method for Nonlinear Dynamical System of an Electrostatically Actuated Microcantilever

    Directory of Open Access Journals (Sweden)

    Y. M. Chen

    2011-01-01

    Full Text Available The homotopy analysis method (HAM is employed to propose an approach for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. There are two relative merits of the presented HAM compared with some usual procedures of the HAM. First, a new auxiliary linear operator is constructed. This operator makes it unnecessary to eliminate any secular terms. Furthermore, all the deformation equations are purely linear. Numerical examples show the excellent agreement of the attained solutions with numerical ones. The respective effects of applied voltage, cubic nonlinear stiffness, gap distance, and squeeze film damping on vibration responses are analyzed detailedly.

  19. A mathematical model for smart functionally graded beam integrated with shape memory alloy actuators

    International Nuclear Information System (INIS)

    Sepiani, H.; Ebrahimi, F.; Karimipour, H.

    2009-01-01

    This paper presents a theoretical study of the thermally driven behavior of a shape memory alloy (SMA)/FGM actuator under arbitrary loading and boundary conditions by developing an integrated mathematical model. The model studied is established on the geometric parameters of the three-dimensional laminated composite box beam as an actuator that consists of a functionally graded core integrated with SMA actuator layers with a uniform rectangular cross section. The constitutive equation and linear phase transformation kinetics relations of SMA layers based on Tanaka and Nagaki model are coupled with the governing equation of the actuator to predict the stress history and to model the thermo-mechanical behavior of the smart shape memory alloy/FGM beam. Based on the classical laminated beam theory, the explicit solution to the structural response of the structure, including axial and lateral deflections of the structure, is investigated. As an example, a cantilever box beam subjected to a transverse concentrated load is solved numerically. It is found that the changes in the actuator's responses during the phase transformation due to the strain recovery are significant

  20. Implementation of heaters on thermally actuated spacecraft mechanisms

    Science.gov (United States)

    Busch, John D.; Bokaie, Michael D.

    1994-01-01

    This paper presents general insight into the design and implementation of heaters as used in actuating mechanisms for spacecraft. Problems and considerations that were encountered during development of the Deep Space Probe and Science Experiment (DSPSE) solar array release mechanism are discussed. Obstacles included large expected fluctuations in ambient temperature, variations in voltage supply levels outgassing concerns, heater circuit design, materials selection, and power control options. Successful resolution of these issues helped to establish a methodology which can be applied to many of the heater design challenges found in thermally actuated mechanisms.

  1. Electrical Actuation Technology Bridging

    Science.gov (United States)

    Hammond, Monica (Compiler); Sharkey, John (Compiler)

    1993-01-01

    This document contains the proceedings of the NASA Electrical Actuation Technology Bridging (ELA-TB) Workshop held in Huntsville, Alabama, September 29-October 1, 1992. The workshop was sponsored by the NASA Office of Space Systems Development and Marshall Space Flight Center (MSFC). The workshop addressed key technologies bridging the entire field of electrical actuation including systems methodology, control electronics, power source systems, reliability, maintainability, and vehicle health management with special emphasis on thrust vector control (TVC) applications on NASA launch vehicles. Speakers were drawn primarily from industry with participation from universities and government. In addition, prototype hardware demonstrations were held at the MSFC Propulsion Laboratory each afternoon. Splinter sessions held on the final day afforded the opportunity to discuss key issues and to provide overall recommendations. Presentations are included in this document.

  2. Thermally actuated linkage arrangement

    International Nuclear Information System (INIS)

    Anderson, P.M.

    1981-01-01

    A reusable thermally actuated linkage arrangement includes a first link member having a longitudinal bore therein adapted to receive at least a portion of a second link member therein, the first and second members being sized to effect an interference fit preventing relative movement there-between at a temperature below a predetermined temperature. The link members have different coefficients of thermal expansion so that when the linkage is selectively heated by heating element to a temperature above the predetermined temperature, relative longitudinal and/or rotational movement between the first and second link members is enabled. Two embodiments of a thermally activated linkage are disclosed which find particular application in actuators for a grapple head positioning arm in a nuclear reactor fuel handling mechanism to facilitate back-up safety retraction of the grapple head independently from the primary fuel handling mechanism drive system. (author)

  3. Scissor thrust valve actuator

    Science.gov (United States)

    DeWall, Kevin G.; Watkins, John C; Nitzel, Michael E.

    2006-08-29

    Apparatus for actuating a valve includes a support frame and at least one valve driving linkage arm, one end of which is rotatably connected to a valve stem of the valve and the other end of which is rotatably connected to a screw block. A motor connected to the frame is operatively connected to a motor driven shaft which is in threaded screw driving relationship with the screw block. The motor rotates the motor driven shaft which drives translational movement of the screw block which drives rotatable movement of the valve driving linkage arm which drives translational movement of the valve stem. The valve actuator may further include a sensory control element disposed in operative relationship with the valve stem, the sensory control element being adapted to provide control over the position of the valve stem by at least sensing the travel and/or position of the valve stem.

  4. Introduction to actuator

    International Nuclear Information System (INIS)

    Sung, Rak Jin

    1988-01-01

    This book introduces solenoid as actuator, magnetic attraction of current, a magnetic field generated by coil, calculation of inductance, thinking way of magnetic energy, principle and application of DC motor, basic expression of DC motor, sorts and characteristics of DC motor, electric control of DC motor, exchange operation by electric control, action of free wheeling diodes, principle and characteristic induction motor electric control of induction motor, stepping motor and hysteresis motor and linear motor.

  5. Shape memory alloy actuator

    Science.gov (United States)

    Varma, Venugopal K.

    2001-01-01

    An actuator for cycling between first and second positions includes a first shaped memory alloy (SMA) leg, a second SMA leg. At least one heating/cooling device is thermally connected to at least one of the legs, each heating/cooling device capable of simultaneously heating one leg while cooling the other leg. The heating/cooling devices can include thermoelectric and/or thermoionic elements.

  6. Linear pneumatic actuator

    Directory of Open Access Journals (Sweden)

    Avram Mihai

    2017-01-01

    Full Text Available The paper presents a linear pneumatic actuator with short working stroke. It consists of a pneumatic motor (a simple stroke cylinder or a membrane chamber, two 2/2 pneumatic distributors “all or nothing” electrically commanded for controlling the intake/outtake flow to/from the active chamber of the motor, a position transducer and a microcontroller. There is also presented the theoretical analysis (mathematical modelling and numerical simulation accomplished.

  7. Linear pneumatic actuator

    OpenAIRE

    Avram Mihai; Niţu Constantin; Bucşan Constantin; Grămescu Bogdan

    2017-01-01

    The paper presents a linear pneumatic actuator with short working stroke. It consists of a pneumatic motor (a simple stroke cylinder or a membrane chamber), two 2/2 pneumatic distributors “all or nothing” electrically commanded for controlling the intake/outtake flow to/from the active chamber of the motor, a position transducer and a microcontroller. There is also presented the theoretical analysis (mathematical modelling and numerical simulation) accomplished.

  8. Cylindrical Piezoelectric Fiber Composite Actuators

    Science.gov (United States)

    Allison, Sidney G.; Shams, Qamar A.; Fox, Robert L.

    2008-01-01

    The use of piezoelectric devices has become widespread since Pierre and Jacques Curie discovered the piezoelectric effect in 1880. Examples of current applications of piezoelectric devices include ultrasonic transducers, micro-positioning devices, buzzers, strain sensors, and clocks. The invention of such lightweight, relatively inexpensive piezoceramic-fiber-composite actuators as macro fiber composite (MFC) actuators has made it possible to obtain strains and displacements greater than those that could be generated by prior actuators based on monolithic piezoceramic sheet materials. MFC actuators are flat, flexible actuators designed for bonding to structures to apply or detect strains. Bonding multiple layers of MFC actuators together could increase force capability, but not strain or displacement capability. Cylindrical piezoelectric fiber composite (CPFC) actuators have been invented as alternatives to MFC actuators for applications in which greater forces and/or strains or displacements may be required. In essence, a CPFC actuator is an MFC or other piezoceramic fiber composite actuator fabricated in a cylindrical instead of its conventional flat shape. Cylindrical is used here in the general sense, encompassing shapes that can have circular, elliptical, rectangular or other cross-sectional shapes in the planes perpendicular to their longitudinal axes.

  9. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  10. a New ER Fluid Based Haptic Actuator System for Virtual Reality

    Science.gov (United States)

    Böse, H.; Baumann, M.; Monkman, G. J.; Egersdörfer, S.; Tunayar, A.; Freimuth, H.; Ermert, H.; Khaled, W.

    The concept and some steps in the development of a new actuator system which enables the haptic perception of mechanically inhomogeneous virtual objects are introduced. The system consists of a two-dimensional planar array of actuator elements containing an electrorheological (ER) fluid. When a user presses his fingers onto the surface of the actuator array, he perceives locally variable resistance forces generated by vertical pistons which slide in the ER fluid through the gaps between electrode pairs. The voltage in each actuator element can be individually controlled by a novel sophisticated switching technology based on optoelectric gallium arsenide elements. The haptic information which is represented at the actuator array can be transferred from a corresponding sensor system based on ultrasonic elastography. The combined sensor-actuator system may serve as a technology platform for various applications in virtual reality, like telemedicine where the information on the consistency of tissue of a real patient is detected by the sensor part and recorded by the actuator part at a remote location.

  11. Telescoping cylindrical piezoelectric fiber composite actuator assemblies

    Science.gov (United States)

    Allison, Sidney G. (Inventor); Shams, Qamar A. (Inventor); Fox, Robert L. (Inventor); Fox, legal representative, Christopher L. (Inventor); Fox Chattin, legal representative, Melanie L. (Inventor)

    2010-01-01

    A telescoping actuator assembly includes a plurality of cylindrical actuators in a concentric arrangement. Each cylindrical actuator is at least one piezoelectric fiber composite actuator having a plurality of piezoelectric fibers extending parallel to one another and to the concentric arrangement's longitudinal axis. Each cylindrical actuator is coupled to concentrically-adjacent ones of the cylindrical actuators such that the plurality of cylindrical actuators can experience telescopic movement. An electrical energy source coupled to the cylindrical actuators applies actuation energy thereto to generate the telescopic movement.

  12. Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Yeh, M.-K.; Tai, N.-Ha; Chen, B.-Y.

    2008-01-01

    Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 deg. and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1 μN landing force and decrease 18.60% for the V-shaped cantilever with 50 nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy

  13. Self-Latching Piezocomposite Actuator

    Science.gov (United States)

    Wilkie, William K. (Inventor); Bryant, Robert G. (Inventor); Lynch, Christopher S. (Inventor)

    2017-01-01

    A self-latching piezocomposite actuator includes a plurality of shape memory ceramic fibers. The actuator can be latched by applying an electrical field to the shape memory ceramic fibers. The actuator remains in a latched state/shape after the electrical field is no longer present. A reverse polarity electric field may be applied to reset the actuator to its unlatched state/shape. Applied electric fields may be utilized to provide a plurality of latch states between the latched and unlatched states of the actuator. The self-latching piezocomposite actuator can be used for active/adaptive airfoils having variable camber, trim tabs, active/deformable engine inlets, adaptive or adjustable vortex generators, active optical components such as mirrors that change shapes, and other morphing structures.

  14. Intrinsically aligned chemo-mechanical functionalization of twin cantilever structures

    International Nuclear Information System (INIS)

    Toffoli, V; Esch, F; Melli, M; Pozzato, A; Tormen, M; Lazzarino, M; Cataruzza, F; Carrato, S; Scoles, G

    2008-01-01

    Mechanical oscillators became a main focus of research in recent years for potential applications in biomolecule detectors. We recently demonstrated the feasibility of a scheme based on twin cantilevers with a sensitivity down to the single molecule. This approach is extremely promising under the condition that the two terminals of the device can be functionalized with high selectivity and nanometric accuracy by linker molecules. Here we demonstrate a chemo-mechanical method to achieve the intrinsically aligned functionalization of two silicon surfaces, which can be separated by a gap controllable with nanometric precision. The chemical binding of the target molecules in the selected position is obtained through a cycloaddition reaction which exploits the reactivity of the freshly cleaved surfaces that form when the cantilever gap is created. The general validity of this approach is shown by the use in different chemical environments of two compounds with different reactive functional groups.

  15. Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes

    Science.gov (United States)

    Hsu, Wei-Chun; Tong, Jonathan Kien-Kwok; Liao, Bolin; Chen, Gang

    2015-04-21

    A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.

  16. Fault-tolerant rotary actuator

    Science.gov (United States)

    Tesar, Delbert

    2006-10-17

    A fault-tolerant actuator module, in a single containment shell, containing two actuator subsystems that are either asymmetrically or symmetrically laid out is provided. Fault tolerance in the actuators of the present invention is achieved by the employment of dual sets of equal resources. Dual resources are integrated into single modules, with each having the external appearance and functionality of a single set of resources.

  17. First application of multilayer graphene cantilever for laser photoacoustic detection

    Czech Academy of Sciences Publication Activity Database

    Suchánek, Jan; Dostál, Michal; Vlasáková, T.; Janda, Pavel; Klusáčková, Monika; Kubát, Pavel; Nevrlý, V.; Bitala, P.; Civiš, Svatopluk; Zelinger, Zdeněk

    2017-01-01

    Roč. 101, APR 2017 (2017), s. 9-14 ISSN 0263-2241 R&D Projects: GA ČR(CZ) GA14-14696S; GA MŠk(CZ) LD14022 Grant - others:COST(XE) TD1105 Institutional support: RVO:61388955 Keywords : Cantilever * Multilayer graphene * Photoacoustic detection * Methanol detection Subject RIV: CF - Physical ; Theoretical Chemistry OBOR OECD: Physical chemistry Impact factor: 2.359, year: 2016

  18. Simulation Study on Material Property of Cantilever Piezoelectric Vibration Generator

    Directory of Open Access Journals (Sweden)

    Yan Zhen

    2014-06-01

    Full Text Available For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, relation between output voltage, inherent frequency and material parameter of unimorph, bimorph in series type and bimorph in parallel type piezoelectric vibration generator is analyzed respectively by mechanical model and finite element modeling. The results indicate PZT-4, PZT- 5A and PZT-5H piezoelectric materials and stainless steel, nickel alloy substrate material should be firstly chosen.

  19. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    OpenAIRE

    Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco

    2013-01-01

    The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using mill...

  20. Unstable oscillation of tubular cantilevered beams conveying a compressible fluid

    International Nuclear Information System (INIS)

    Johnson, R.O.; Stoneking, J.E.; Carley, T.G.

    1986-01-01

    This paper is concerned with establishing the conditions of stability of a cantilevered tube conveying a compressible fluid. Solutions to Niordson's eigenvalue problem associated with the equations of motion are computed using Muller's method. The effects on critical velocity of compressibility which are accommodated by specifying the tube aspect ratio and fluid sonic velocity are parametrically studied. Aspect ratio is found to have a more pronounced effect on critical velocity than sonic velocity over the parameter range that was considered. (orig.)

  1. Digital electrostatic acoustic transducer array

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-12-19

    In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.

  2. Digital electrostatic acoustic transducer array

    KAUST Repository

    Carreno, Armando Arpys Arevalo; Castro, David; Conchouso Gonzalez, David; Kosel, Jü rgen; Foulds, Ian G.

    2016-01-01

    In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.

  3. Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

    International Nuclear Information System (INIS)

    Yang, Yongliang; Ma, Eric Yue; Cui, Yong-Tao; Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael; Shen, Zhi-Xun; Haemmerli, Alexandre; Harjee, Nahid; Pruitt, Beth L

    2014-01-01

    This paper presents the design and fabrication of piezoresistive cantilever probes for microwave impedance microscopy (MIM) to enable simultaneous topographic and electrical imaging. Plasma enhanced chemical vapor deposited Si 3 N 4  cantilevers with a shielded center conductor line and nanoscale conductive tip apex are batch fabricated on silicon-on-insulator wafers. Doped silicon piezoresistors are integrated at the root of the cantilevers to sense their deformation. The piezoresistive sensitivity is 2 nm for a bandwidth of 10 kHz, enabling topographical imaging with reasonable speed. The aluminum center conductor has a low resistance (less than 5 Ω) and small capacitance (∼1.7 pF) to ground; these parameters are critical for high sensitivity MIM imaging. High quality piezoresistive topography and MIM images are simultaneously obtained with the fabricated probes at ambient and cryogenic temperatures. These new piezoresistive probes remarkably broaden the horizon of MIM for scientific applications by operating with an integrated feedback mechanism at low temperature and for photosensitive samples. (paper)

  4. Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing

    Directory of Open Access Journals (Sweden)

    Bernhard Jakoby

    2008-10-01

    Full Text Available Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers. Miniaturized cantilever-based devices are interesting alternatives for such applications, but here the interaction between the liquid and the oscillating beam is more involved. In our contribution, we describe a measurement setup, which allows the investigation of this interaction for different beam cross-sections. We present an analytical model based on an approximation of the immersed cantilever as an oscillating sphere comprising the effective mass and the intrinsic damping of the cantilever and additional mass and damping due to the liquid loading. The model parameters are obtained from measurements with well-known sample liquids by a curve fitting procedure. Finally, we present the measurement of viscosity and density of an unknown sample liquid, demonstrating the feasibility of the model.

  5. Scanning probe microscopy with vertically oriented cantilevers made easy

    International Nuclear Information System (INIS)

    Valdrè, G; Moro, D; Ulian, G

    2012-01-01

    Non-contact imaging in scanning probe microscopy (SPM) is becoming of great importance in particular for imaging biological matter and in general soft materials. Transverse dynamic force microscopy (TDFM) is an SPM-based methodology that exploiting a cantilever oriented in a vertical configuration with respect to the sample surface may work with very low tip to sample interaction forces. The probe is oscillated parallel to the sample surface, usually by a piezoelectric element. However, this methodology often requires complex microscope setups and detection systems, so it is usually developed in specific laboratories as a prototype microscope. Here, we present a very simple device that easily enables a commercial SPM head to be oriented in such a way to have the cantilever long axis perpendicular to the sample surface. No modifications of the SPM hardware and software are required and commercial available cantilevers can be used as probes. Performance tests using polystyrene spheres, muscovite crystallographic steps and DNA single molecules were successful and all resulted in agreement with other TDFM and SPM observations demonstrating the reliability of the device. (paper)

  6. Dynamic modelling and experimental study of cantilever beam with clearance

    International Nuclear Information System (INIS)

    Li, B; Jin, W; Han, L; He, Z

    2012-01-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  7. Dynamic modelling and experimental study of cantilever beam with clearance

    Science.gov (United States)

    Li, B.; Jin, W.; Han, L.; He, Z.

    2012-05-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  8. Electrical actuation of dielectric droplets

    International Nuclear Information System (INIS)

    Kumari, N; Bahadur, V; Garimella, S V

    2008-01-01

    Electrical actuation of liquid droplets at the microscale offers promising applications in the fields of microfluidics and lab-on-a-chip devices. Much prior research has targeted the electrical actuation of electrically conducting liquid droplets; however, the actuation of dielectric droplets has remained relatively unexplored, despite the advantages associated with the use of a dielectric droplet. This paper presents modeling and experimental results on the electrical actuation of dielectric droplets between two flat plates. A first-order analytical model, based on the energy-minimization principle, is developed to estimate the electrical actuation force on a dielectric droplet as it moves between two flat plates. Two versions of this analytical model are benchmarked for their suitability and accuracy against a detailed numerical model. The actuation force prediction is then combined with available semi-analytical expressions for predicting the forces opposing droplet motion to develop a model that predicts transient droplet motion under electrical actuation. Electrical actuation of dielectric droplets is experimentally demonstrated by moving transformer oil droplets between two flat plates under the influence of an actuation voltage. Droplet velocities and their dependence on the plate spacing and the applied voltage are experimentally measured and showed reasonable agreement with predictions from the models developed

  9. Active vibration reduction by optimally placed sensors and actuators with application to stiffened plates by beams

    International Nuclear Information System (INIS)

    Daraji, A H; Hale, J M

    2014-01-01

    This study concerns new investigation of active vibration reduction of a stiffened plate bonded with discrete sensor/actuator pairs located optimally using genetic algorithms based on a developed finite element modeling. An isotropic plate element stiffened by a number of beam elements on its edges and having a piezoelectric sensor and actuator pair bonded to its surfaces is modeled using the finite element method and Hamilton’s principle, taking into account the effects of piezoelectric mass, stiffness and electromechanical coupling. The modeling is based on the first order shear deformation theory taking into account the effects of bending, membrane and shear deformation for the plate, the stiffening beam and the piezoelectric patches. A Matlab finite element program has been built for the stiffened plate model and verified with ANSYS and also experimentally. Optimal placement of ten piezoelectric sensor/actuator pairs and optimal feedback gain for active vibration reduction are investigated for a plate stiffened by two beams arranged in the form of a cross. The genetic algorithm was set up for optimization of sensor/actuator placement and feedback gain based on the minimization of the optimal linear quadratic index as an objective function to suppress the first six modes of vibration. Comparison study is presented for active vibration reduction of a square cantilever plate stiffened by crossed beams with two sensor/actuator configurations: firstly, ten piezoelectric sensor/actuator pairs are located in optimal positions; secondly, a piezoelectric layer of single sensor/actuator pair covering the whole of the stiffened plate as a SISO system. (paper)

  10. Microstructure actuation and gas sensing by the Knudsen thermal force

    Energy Technology Data Exchange (ETDEWEB)

    Strongrich, Andrew; Alexeenko, Alina, E-mail: alexeenk@purdue.edu [School of Aeronautics and Astronautics and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907 (United States)

    2015-11-09

    The generation of forces and moments on structures immersed in rarefied non-isothermal gas flows has received limited practical implementation since first being discovered over a century ago. The formation of significant thermal stresses requires both large thermal gradients and characteristic dimensions which are comparable to the gas molecular mean free path. For macroscopic geometries, this necessitates impractically high temperatures and very low pressures. At the microscale, however, these conditions are easily achieved, allowing the effects to be exploited, namely, for gas-property sensing and microstructure actuation. In this letter, we introduce and experimentally evaluate performance of a microelectromechanical in-plane Knudsen radiometric actuator, a self-contained device having Knudsen thermal force generation, sensing, and tuning mechanisms integrated onto the same platform. Sensitivity to ambient pressure, temperature gradient, as well as gas composition is demonstrated. Results are presented in terms of a non-dimensional force coefficient, allowing measurements to be directly compared to the previous experimental and computational data on out-of-plane cantilevered configurations.

  11. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    Energy Technology Data Exchange (ETDEWEB)

    Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Leung, Vanessa, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Müller, Bert, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch [Biomaterials Science Center, University of Basel, c/o University Hospital, 4031 Basel (Switzerland); Deschenaux, Christian, E-mail: jiri.nohava@anton-paar.com; Nohava, Jiri, E-mail: jiri.nohava@anton-paar.com [Anton Paar TriTec SA, Rue de la Gare 4, Galileo Center, 2034 Peseux (Switzerland)

    2015-02-17

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

  12. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    International Nuclear Information System (INIS)

    Osmani, Bekim; Töpper, Tino; Weiss, Florian M.; Leung, Vanessa; Müller, Bert; Deschenaux, Christian; Nohava, Jiri

    2015-01-01

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market

  13. Actuator technology and market outlook: where does the actuator move

    Directory of Open Access Journals (Sweden)

    Aleksanin Sergei Andreevich

    2013-11-01

    There are made conclusions about the "migration" of demand from hydraulic and pneumatic solutions to electromechanical actuators in the aerospace and manufacturing industries. Identify advantages of electromechanics over more traditional actuators in terms of energy efficiency and reliability. Also identify the most promising areas of the drive technological development.

  14. Fabrication Effects on Polysilicon-based Micro cantilever Piezo resistivity for Biological Sensing Application

    International Nuclear Information System (INIS)

    Nina Korlina Madzhi; Balkish Natra; Mastura Sidek; Khuan, L.Y.; Anuar Ahmad

    2011-01-01

    In principle, adsorption of biological molecules on a functionalized surface of a micro fabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezo resistive micro cantilever sensors were designed to increase the sensitivity of the micro cantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezo resistors as a function of the cantilever vertical displacements. The resistivity of the piezo resistivity micro cantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezo resistor length. The results show that although the thickness of piezo resistor was the same at 0.5 μm the resistance value was varied. (author)

  15. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    Directory of Open Access Journals (Sweden)

    Aamand Jens

    2011-01-01

    Full Text Available Abstract The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide immobilized on a cantilever surface to anti-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system.

  16. Application Actuation Trade Study

    Science.gov (United States)

    1982-01-01

    32 RCA PRICE-L Podel Calculated 0 & S Values 138 33 RCA PRICE LCC Summery - Typical LRU 139 34 Airplane Actuation Trade Study LCC Summary 140 35...results achieved can be duplicated by a user. The RCA PRICE Podel calculates the RDTSE. Production cost, and creates the YiDF file for use in the PCA...PR ICE L). Some of the basic program ground rules for this study were as follows: RCA - PRICE Cost Podel RCA - PRICE L Model Prototype Hardware 10

  17. The Actuated Guitar

    DEFF Research Database (Denmark)

    Larsen, Jeppe Veirum; Overholt, Daniel; Moeslund, Thomas B.

    2014-01-01

    functioning hands. In this study we try to enable people with Hemiplegia to play a real electrical guitar, by modifying it in a way that allows people with Hemiplegia able to actually use the instrument. We developed a guitar platform utilizing sensors to capture the rhythmic motion of alternate fully....... The initial user studies showed that children with Hemiplegia were able to play the actuated guitar by producing rhythmical movement across the strings, enabling them to enter a world of music they so often see as closed....

  18. Strain actuated aeroelastic control

    Science.gov (United States)

    Lazarus, Kenneth B.

    1992-01-01

    Viewgraphs on strain actuated aeroelastic control are presented. Topics covered include: structural and aerodynamic modeling; control law design methodology; system block diagram; adaptive wing test article; bench-top experiments; bench-top disturbance rejection: open and closed loop response; bench-top disturbance rejection: state cost versus control cost; wind tunnel experiments; wind tunnel gust alleviation: open and closed loop response at 60 mph; wind tunnel gust alleviation: state cost versus control cost at 60 mph; wind tunnel command following: open and closed loop error at 60 mph; wind tunnel flutter suppression: open loop flutter speed; and wind tunnel flutter suppression: closed loop state cost curves.

  19. Stepper Motor Actuated Microvalve

    Energy Technology Data Exchange (ETDEWEB)

    Fazal, Imran; Louwerse, Marcus; Jansen, Henri; Elwenspoek, Miko [MESA Research Institute, University of Twente EWI/TST, P. off Box 217 Enschede (Netherlands)

    2006-04-01

    We present the design, fabrication and characterization of a novel microvalve realized by combining micro and fine machining techniques. The design is for high flow rates at high pressure difference between inlet and outlet, burst pressure of up to 15 bars, there is no power consumption required for the valve to maintain its position during operation in any intermediate state and the process gas does not interact with the actuation mechanism. The microvalve was experimentally characterized with airflows. It is shown that flow rates of 220 ml/min at a pressure difference of 4 bars could be achieved with the minimum accurate flow rate of 2-8 ml/min.

  20. Calibration of atomic force microscope cantilevers using standard and inverted static methods assisted by FIB-milled spatial markers

    International Nuclear Information System (INIS)

    Slattery, Ashley D; Blanch, Adam J; Quinton, Jamie S; Gibson, Christopher T

    2013-01-01

    Static methods to determine the spring constant of AFM cantilevers have been widely used in the scientific community since the importance of such calibration techniques was established nearly 20 years ago. The most commonly used static techniques involve loading a trial cantilever with a known force by pressing it against a pre-calibrated standard or reference cantilever. These reference cantilever methods have a number of sources of uncertainty, which include the uncertainty in the measured spring constant of the standard cantilever, the exact position of the loading point on the reference cantilever and how closely the spring constant of the trial and reference cantilever match. We present a technique that enables users to minimize these uncertainties by creating spatial markers on reference cantilevers using a focused ion beam (FIB). We demonstrate that by combining FIB spatial markers with an inverted reference cantilever method, AFM cantilevers can be accurately calibrated without the tip of the test cantilever contacting a surface. This work also demonstrates that for V-shaped cantilevers it is possible to determine the precise loading position by AFM imaging the section of the cantilever where the two arms join. Removing tip-to-surface contact in both the reference cantilever method and sensitivity calibration is a significant improvement, since this is an important consideration for AFM users that require the imaging tip to remain in pristine condition before commencing measurements. Uncertainties of between 5 and 10% are routinely achievable with these methods. (paper)

  1. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

    Science.gov (United States)

    Mathew, Ribu; Ravi Sankar, A.

    2018-06-01

    In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.[Figure not available: see fulltext.

  2. On the electromechanical modelling of a resonating nano-cantilever-based transducer

    DEFF Research Database (Denmark)

    Teva, J.; Abadal, G.; Davis, Zachary James

    2004-01-01

    deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real deflection shape of the cantilever and the contribution to the cantilever-driver capacitance of the fringing field....... Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope. (C) 2004 Elsevier B.V. All rights reserved....

  3. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    Energy Technology Data Exchange (ETDEWEB)

    Hoogenboom, B W [London Centre for Nanotechnology and Department of Physics and Astronomy, University College London, 17-19 Gordon Street, London WC1H 0AH (United Kingdom); Frederix, P L T M; Engel, A [M E Mueller Institute, Biozentrum, University of Basel, Klingelbergstrasse 70, 4056 Basel (Switzerland); Fotiadis, D [Institute of Biochemistry and Molecular Medicine, University of Berne, Buehlstrasse 28, 3012 Berne (Switzerland); Hug, H J [Swiss Federal Laboratories for Materials Testing and Research, EMPA, Ueberlandstrasse 129, 8600 Duebendorf (Switzerland)], E-mail: b.hoogenboom@ucl.ac.uk

    2008-09-24

    We have developed an optical cantilever deflection detector with a spot size <3 {mu}m and fm Hz{sup -1/2} sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes.

  4. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    International Nuclear Information System (INIS)

    Hoogenboom, B W; Frederix, P L T M; Engel, A; Fotiadis, D; Hug, H J

    2008-01-01

    We have developed an optical cantilever deflection detector with a spot size -1/2 sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes

  5. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    International Nuclear Information System (INIS)

    Xu, J.; Tang, J.

    2015-01-01

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined

  6. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Loganathan, Muthukumaran; Bristow, Douglas A., E-mail: dbristow@mst.edu [Department of Mechanical and Aerospace Engineering, Missouri University of Science and Technology, Rolla, Missouri 65401 (United States)

    2014-04-15

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  7. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy.

    Science.gov (United States)

    Loganathan, Muthukumaran; Bristow, Douglas A

    2014-04-01

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  8. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    Energy Technology Data Exchange (ETDEWEB)

    Xu, J.; Tang, J., E-mail: jtang@engr.uconn.edu [Department of Mechanical Engineering, The University of Connecticut, Storrs, Connecticut 06269 (United States)

    2015-11-23

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined.

  9. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  10. Bi-stable optical actuator

    Science.gov (United States)

    Holdener, Fred R.; Boyd, Robert D.

    2000-01-01

    The present invention is a bi-stable optical actuator device that is depowered in both stable positions. A bearing is used to transfer motion and smoothly transition from one state to another. The optical actuator device may be maintained in a stable position either by gravity or a restraining device.

  11. Nonmagnetic driver for piezoelectric actuators

    DEFF Research Database (Denmark)

    Ekhtiari, Marzieh

    2014-01-01

    actuator drive is the only form-fit continuous drive solution currently available for the development of high performance nonmagnetic motors. In this research focus will be on the non magnetic compact high efficiency driver for the piezo actuators and on employing energy recovery from the capacitive...

  12. Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

    Science.gov (United States)

    Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

    2012-06-01

    In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

  13. Simulation of SU-8 frequency-driven scratch drive actuators

    KAUST Repository

    Conchouso Gonzalez, David

    2013-04-01

    This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®\\'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

  14. Simulation of SU-8 frequency-driven scratch drive actuators

    KAUST Repository

    Conchouso Gonzalez, David; Carreno, Armando Arpys Arevalo; Castro, David; Al Rawashdeh, Ehab Jamal; Valencia Garcia, Manuel; Zaher, Amir Omar; Kosel, Jü rgen; Foulds, Ian G.

    2013-01-01

    This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

  15. Measurement of contractile stress generated by cultured rat muscle on silicon cantilevers for toxin detection and muscle performance enhancement.

    Directory of Open Access Journals (Sweden)

    Kerry Wilson

    2010-06-01

    Full Text Available To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications.We have demonstrated a biological microelectromechanical system (BioMEMS based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT, the time to half relaxation ((1/2RT were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and (1/2RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine.The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery applications.

  16. Strain-dependent characterization of electrode and polymer network of electrically activated polymer actuators

    Science.gov (United States)

    Töpper, Tino; Osmani, Bekim; Weiss, Florian M.; Winterhalter, Carla; Wohlfender, Fabian; Leung, Vanessa; Müller, Bert

    2015-04-01

    Fecal incontinence describes the involuntary loss of bowel content and affects about 45 % of retirement home residents and overall more than 12 % of the adult population. Artificial sphincter implants for treating incontinence are currently based on mechanical systems with failure rates resulting in revision after three to five years. To overcome this drawback, artificial muscle sphincters based on bio-mimetic electro-active polymer (EAP) actuators are under development. Such implants require polymer films that are nanometer-thin, allowing actuation below 24 V, and electrodes that are stretchable, remaining conductive at strains of about 10 %. Strain-dependent resistivity measurements reveal an enhanced conductivity of 10 nm compared to 30 nm sputtered Au on silicone for strains higher than 5 %. Thus, strain-dependent morphology characterization with optical microscopy and atomic force microscopy could demonstrate these phenomena. Cantilever bending measurements are utilized to determine elastic/viscoelastic properties of the EAP films as well as their long-term actuation behavior. Controlling these properties enables the adjustment of growth parameters of nanometer-thin EAP actuators.

  17. Effects of interfaces on nano-friction of vertically aligned multi-walled carbon nanotube arrays

    International Nuclear Information System (INIS)

    Lou, J.; Kim, K.-S.

    2008-01-01

    Sliding friction properties of vertically aligned multi-walled carbon nanotube (VAMWNT) arrays have been investigated in current study in a quantitative manner. The VAMWNT arrays have been fabricated on an anodic aluminum oxide template by chemical vapor deposition at 650 deg. C. Friction force was measured in air by a modified atomic force microscopy (AFM) cantilever-bead assembly with 15 μm diameter borosilicate sphere attached to the end of the regular AFM cantilever. Quantitative measurements were achieved by using a novel in situ calibration methods recently developed based on diamagnetic levitation [Q. Li, K.-S. Kim, A. Rydberg, Rev. Sci. Instrum. 77 (2006) 065105-1-13]. The effects of different interfaces were studied using both cantilever-bead assembly coated with and without Al thin layer coatings. A reverse stick-slip behavior was observed in the current system as compared to the normal stick-slip behavior found in the literature

  18. Nonlinear Dynamics of Cantilever-Sample Interactions in Atomic Force Microscopy

    Science.gov (United States)

    Cantrell, John H.; Cantrell, Sean A.

    2010-01-01

    The interaction of the cantilever tip of an atomic force microscope (AFM) with the sample surface is obtained by treating the cantilever and sample as independent systems coupled by a nonlinear force acting between the cantilever tip and a volume element of the sample surface. The volume element is subjected to a restoring force from the remainder of the sample that provides dynamical equilibrium for the combined systems. The model accounts for the positions on the cantilever of the cantilever tip, laser probe, and excitation force (if any) via a basis set of set of orthogonal functions that may be generalized to account for arbitrary cantilever shapes. The basis set is extended to include nonlinear cantilever modes. The model leads to a pair of coupled nonlinear differential equations that are solved analytically using a matrix iteration procedure. The effects of oscillatory excitation forces applied either to the cantilever or to the sample surface (or to both) are obtained from the solution set and applied to the to the assessment of phase and amplitude signals generated by various acoustic-atomic force microscope (A-AFM) modalities. The influence of bistable cantilever modes of on AFM signal generation is discussed. The effects on the cantilever-sample surface dynamics of subsurface features embedded in the sample that are perturbed by surface-generated oscillatory excitation forces and carried to the cantilever via wave propagation are accounted by the Bolef-Miller propagating wave model. Expressions pertaining to signal generation and image contrast in A-AFM are obtained and applied to amplitude modulation (intermittent contact) atomic force microscopy and resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM). The influence of phase accumulation in A-AFM on image contrast is discussed, as is the effect of hard contact and maximum nonlinearity regimes of A-AFM operation.

  19. The static actuation of dielectric elastomer actuators: how does pre-stretch improve actuation?

    International Nuclear Information System (INIS)

    Kofod, Guggi

    2008-01-01

    It has previously been shown that providing dielectric elastomer actuators with a level of pre-stretch can improve properties such as breakdown strength, actuation strain and efficiency. The actuation in such actuators depends on an interplay between the highly nonlinear hyperelastic stress-strain behaviour with the electrostatic Maxwell's stress; however, the direct effects of pre-stretch on the electromechanical coupling have still not been investigated in detail. We compare several experimental results found in the literature on the hyperelastic parameters of the Ogden model for the commonly used material VHB 4910, and introduce a more detailed and thus more accurate fit to a previous uniaxial stress-strain experiment. Electrostatic actuation models for a pure shear cuboid dielectric elastomer actuator with pre-stretch are introduced, for both intensive and extensive variables. For both intensive and extensive variables the constant strain (blocked stress or force) as well as the actuation strain is presented. It is shown how in the particular case of isotropic amorphous elastomers the pre-stretch does not affect the electromechanical coupling directly, and that the enhancement in actuation strain due to pre-stretch occurs through the alteration of the geometrical dimensions of the actuator. Also, the presence of the optimum load is explained as being due to the plateau region in the force-stretch curve, and it is shown that pre-stretch is not able to affect its position. Finally, it is shown how the simplified Ogden fit leads to entirely different conclusions for actuation strain in terms of extensive variables as does the detailed fit, emphasizing the importance of employing accurate hyperelastic models for the stress-stretch behaviour of the elastomer.

  20. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    Directory of Open Access Journals (Sweden)

    Valeria Toffoli

    2013-12-01

    Full Text Available The design and characteristics of a micro-system for thermogravimetric analysis (TGA in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

  1. Piezoelectric Bimorph Cantilever for Vibration-Producing-Hydrogen

    Directory of Open Access Journals (Sweden)

    Guangming Cheng

    2012-12-01

    Full Text Available A device composed of a piezoelectric bimorph cantilever and a water electrolysis device was fabricated to realize piezoelectrochemical hydrogen production. The obvious output of the hydrogen and oxygen through application of a mechanical vibration of ~0.07 N and ~46.2 Hz was observed. This method provides a cost-effective, recyclable, environment-friendly and simple way to directly split water for hydrogen fuels by scavenging mechanical waste energy forms such as noise or traffic vibration in the environment.

  2. Micro-cantilever flow sensor for small aircraft

    KAUST Repository

    Ghommem, Mehdi; Calo, Victor M.; Claudel, Christian G.

    2013-01-01

    We extend the use of cantilever beams as flow sensors for small aircraft. As such, we propose a novel method to measure the airspeed and the angle of attack at which the air travels across a small flying vehicle. We measure beam deflections and extract information about the surrounding flow. Thus, we couple a nonlinear beam model with a potential flow simulator through a fluid-structure interaction scheme. We use this numerical approach to generate calibration curves that exhibit the trend for the variations of the limit cycle oscillations amplitudes of flexural and torsional vibrations with the air speed and the angle of attack, respectively. © The Author(s) 2013.

  3. APPARATUS FOR NON-DESTRUCTIVE INSPECTION OF CANTILEVERED MEMBERS

    Science.gov (United States)

    Taylor, E.R.; Mahoney, C.H.; Lay, C.R.

    1961-10-24

    An apparatus for non-destructive inspection of cantilevered members, such as compressor blades, is described. The member under inspection is vibrated with a regulated source of air under pressure. The amplitude of vibration of the member is maintained at its natural frequency. The frequency of vibration of the member is measured. An indication of an excessive decay or erratic shifting in the measured frequency above an allowable hysteretic decay is provided as an indication of a fault in the member. The member is vibrated for a selected test period. (AEC)

  4. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

    Science.gov (United States)

    Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco

    2013-01-01

    The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

  5. Desain Cantilever Beam Piezoelectric Untuk Aplikasi Energi Harvesting

    Directory of Open Access Journals (Sweden)

    Roer Pawinanto

    2016-12-01

    Full Text Available Material piezoelektrik sudah mulai diaplkasikan dalam beberapa aplikasi seperti sebagai transduser untuk energi harvesting. Dalam studi ini kami menggunakan metode FEA untuk mengoptimasi beam piezoelektrik. Defleksi yang diperoleh pada studi ini yaitu sebesar 83 nm manakala frekuensi resonansi nya diperoleh di 13.4 Hz. Material piezoelektrik ini dapat menghasilkan defleksi yang besar ketika bergetar pada frekuensi resonansinya. Hasil optimisasi juga menunjukkan bahwa daya listrik yang dihasilkan mengindikasikan resistansi yang besar juga dan berkaitan dengan panjang material PZT serta dapat mempengaruhi defleksi dari cantilever beam.

  6. Analytical simulation of the cantilever-type energy harvester

    Directory of Open Access Journals (Sweden)

    Jie Mei

    2016-01-01

    Full Text Available This article describes an analytical model of the cantilever-type energy harvester based on Euler–Bernoulli’s beam theory. Starting from the Hamiltonian form of total energy equation, the bending mode shapes and electromechanical dynamic equations are derived. By solving the constitutive electromechanical dynamic equation, the frequency transfer function of output voltage and power can be obtained. Through a case study of a unimorph piezoelectric energy harvester, this analytical modeling method has been validated by the finite element method.

  7. Micro-cantilever flow sensor for small aircraft

    KAUST Repository

    Ghommem, Mehdi

    2013-10-01

    We extend the use of cantilever beams as flow sensors for small aircraft. As such, we propose a novel method to measure the airspeed and the angle of attack at which the air travels across a small flying vehicle. We measure beam deflections and extract information about the surrounding flow. Thus, we couple a nonlinear beam model with a potential flow simulator through a fluid-structure interaction scheme. We use this numerical approach to generate calibration curves that exhibit the trend for the variations of the limit cycle oscillations amplitudes of flexural and torsional vibrations with the air speed and the angle of attack, respectively. © The Author(s) 2013.

  8. V-stack piezoelectric actuator

    Science.gov (United States)

    Ardelean, Emil V.; Clark, Robert L.

    2001-07-01

    Aeroelastic control of wings by means of a distributed, trailing-edge control surface is of interest with regards to maneuvers, gust alleviation, and flutter suppression. The use of high energy density, piezoelectric materials as motors provides an appealing solution to this problem. A comparative analysis of the state of the art actuators is currently being conducted. A new piezoelectric actuator design is presented. This actuator meets the requirements for trailing edge flap actuation in both stroke and force. It is compact, simple, sturdy, and leverages stroke geometrically with minimum force penalties while displaying linearity over a wide range of stroke. The V-Stack Piezoelectric Actuator, consists of a base, a lever, two piezoelectric stacks, and a pre-tensioning element. The work is performed alternately by the two stacks, placed on both sides of the lever. Pre-tensioning can be readily applied using a torque wrench, obviating the need for elastic elements and this is for the benefit of the stiffness of the actuator. The characteristics of the actuator are easily modified by changing the base or the stacks. A prototype was constructed and tested experimentally to validate the theoretical model.

  9. Polypyrrole Actuators for Tremor Suppression

    DEFF Research Database (Denmark)

    Skaarup, Steen; Mogensen, Naja; Bay, Lasse

    2003-01-01

    Neurological tremor affecting limbs can be divided into at least 6 different types with frequencies ranging from 2 to about 20 Hz. In order to alleviate the symptoms by suppressing the tremor, sensing and actuation systems able to perform at these frequencies are needed. Electroactive polymers...... exemplify 'soft actuator' technology that may be especially suitable for use in conjunction with human limbs. The electrochemical and mechanical properties of polypyrrole dodecyl benzene sulphonate actuator films have been studied with this application in mind. The results show that the time constants...

  10. Size-dependent effective Young’s modulus of silicon nitride cantilevers

    NARCIS (Netherlands)

    Babaei Gavan, K.; Westra, H.J.R.; Van der Drift, E.W.J.M.; Venstra, W.J.; Van der Zant, H.S.J.

    2009-01-01

    The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations

  11. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2008-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  12. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2011-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  13. A new approach to integrate PLZT thin films with micro-cantilevers

    Indian Academy of Sciences (India)

    Home; Journals; Sadhana; Volume 34; Issue 4. A new approach to integrate PLZT thin films with micro-cantilevers ... Different types of cantilever beams incorporating PLZT films have been successfully fabricated using 'lift-off' process and bulk micromachining technology. The proposed process can be advantageously ...

  14. Determination of young's modulus of PZT-influence of cantilever orientation

    NARCIS (Netherlands)

    Nazeer, H.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

    Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This

  15. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    DEFF Research Database (Denmark)

    Bache, Michael; Taboryski, Rafael Jozef; Schmid, Silvan

    2011-01-01

    -BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending...

  16. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    DEFF Research Database (Denmark)

    Nordström, M.; Calleja, M.; Hübner, Jörg

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever...

  17. Monolithic Concrete vs Precast Concrete for the Construction of Bridge by Th Cantilever Method

    Directory of Open Access Journals (Sweden)

    Morlova Dumitru Daniel

    2015-07-01

    Full Text Available In the article "Monolithic Concrete vs Precast Concrete for the Construction of Bridges by the Cantilever Method", there are approached a number of issues that come out in the design and execution of prestressed concrete bridge structures using the cantilever method.

  18. Analyzing the Effect of Capillary Force on Vibrational Performance of the Cantilever of an Atomic Force Microscope in Tapping Mode with Double Piezoelectric Layers in an Air Environment.

    Science.gov (United States)

    Nahavandi, Amir; Korayem, Moharam Habibnejad

    2015-10-01

    The aim of this paper is to determine the effects of forces exerted on the cantilever probe tip of an atomic force microscope (AFM). These forces vary according to the separation distance between the probe tip and the surface of the sample being examined. Hence, at a distance away from the surface (farther than d(on)), these forces have an attractive nature and are of Van der Waals type, and when the probe tip is situated in the range of a₀≤ d(ts) ≤ d(on), the capillary force is added to the Van der Waals force. At a distance of d(ts) ≤ a₀, the Van der Waals and capillary forces remain constant at intermolecular distances, and the contact repulsive force repels the probe tip from the surface of sample. The capillary force emerges due to the contact of thin water films with a thickness of h(c) which have accumulated on the sample and probe. Under environmental conditions a layer of water or hydrocarbon often forms between the probe tip and sample. The capillary meniscus can grow until the rate of evaporation equals the rate of condensation. For each of the above forces, different models are presented. The smoothness or roughness of the surfaces and the geometry of the cantilever tip have a significant effect on the modeling of forces applied on the probe tip. Van der Waals and the repulsive forces are considered to be the same in all the simulations, and only the capillary force is altered in order to evaluate the role of this force in the AFM-based modeling. Therefore, in view of the remarkable advantages of the piezoelectric microcantilever and also the extensive applications of the tapping mode, we investigate vibrational motion of the piezoelectric microcantilever in the tapping mode. The cantilever mentioned is entirely covered by two piezoelectric layers that carry out both the actuation of the probe tip and the measuringof its position.

  19. Instability of a cantilevered flexible plate in viscous channel flow

    Science.gov (United States)

    Balint, T. S.; Lucey, A. D.

    2005-10-01

    The stability of a flexible cantilevered plate in viscous channel flow is studied as a representation of the dynamics of the human upper airway. The focus is on instability mechanisms of the soft palate (flexible plate) that cause airway blockage during sleep. We solve the Navier Stokes equations for flow with Reynolds numbers up to 1500 fully coupled with the dynamics of the plate motion solved using finite-differences. The study is 2-D and based upon linearized plate mechanics. When both upper and lower airways are open, the plate is found to lose its stability through a flutter mechanism and a critical Reynolds number exists. When one airway is closed, the plate principally loses its stability through a divergence mechanism and a critical flow speed exists. However, below the divergence-onset flow speed, flutter can exist for low levels of structural damping in the flexible plate. Our results serve to extend understanding of flow-induced instability of cantilevered flexible plates and will ultimately improve the diagnosis and treatment of upper-airway disorders.

  20. Fluid-structure interactions of photo-responsive polymer cantilevers

    Science.gov (United States)

    Bin, Jonghoon; Oates, William S.; Yousuff Hussaini, M.

    2013-02-01

    A new class of photomechanical liquid crystal networks (LCNs) has emerged, which generate large bending deformation and fast response times that scale with the resonance of the polymer films. Here, a numerical study is presented that describes the photomechanical structural dynamic behavior of an LCN in a fluid medium; however, the methodology is also applicable to fluid-structure interactions of a broader range of adaptive structures. Here, we simulate the oscillation of photomechanical cantilevers excited by light while simultaneously modeling the effect of the surrounding fluid at different ambient pressures. The photoactuated LCN is modeled as an elastic thin cantilever plate, and gradients in photostrain from the external light are computed from the assumptions of light absorption and photoisomerization through the film thickness. Numerical approximations of the equations governing the plate are based on cubic B-spline shape functions and a second order implicit Newmark central scheme for time integration. For the fluid, three dimensional unsteady incompressible Navier-Stokes equations are solved using the arbitrary Lagrangian-Eulerian (ALE) method, which employs a structured body-fitted curvilinear coordinate system where the solid-fluid interface is a mesh line of the system, and the complicated interface boundary conditions are accommodated in a conventional finite-volume formulation. Numerical examples are given which provide new insight into material behavior in a fluid medium as a function of ambient pressure.

  1. A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process

    International Nuclear Information System (INIS)

    Ji Xu; Li Zhihong; Li Juan; Wang Yangyuan; Xi Jianzhong

    2008-01-01

    This paper presents a post-CMOS process to monolithically integrate a piezoresistive cantilever for lateral force detection and signal processing circuitry. The fabrication process includes a standard CMOS process and one more lithography step to micromachine the cantilever structure in the post-CMOS process. The piezoresistors are doped in the CMOS process but defined in the post-CMOS micromachining process without any extra process required. A partially split cantilever configuration is developed for the lateral force detection. The piezoresistors are self-aligned to the split cantilever, and therefore the width of the beam is only limited by lithography. Consequently, this kind of cantilever potentially has a high resolution. The preliminary experimental results show expected performances of the fabricated piezoresistors and electronic circuits

  2. Nonlinear dynamic response of cantilever beam tip during atomic force microscopy (AFM) nanolithography of copper surface

    International Nuclear Information System (INIS)

    Yeh, Y-L; Jang, M-J; Wang, C-C; Lin, Y-P; Chen, K-S

    2008-01-01

    This paper investigates the nonlinear dynamic response of an atomic force microscope (AFM) cantilever beam tip during the nanolithography of a copper (Cu) surface using a high-depth feed. The dynamic motion of the tip is modeled using a combined approach based on Newton's law and empirical observations. The cutting force is determined from experimental observations of the piling height on the Cu surface and the rotation angle of the cantilever beam tip. It is found that the piling height increases linearly with the cantilever beam carrier velocity. Furthermore, the cantilever beam tip is found to execute a saw tooth motion. Both this motion and the shear cutting force are nonlinear. The elastic modulus in the y direction is variable. Finally, the velocity of the cantilever beam tip as it traverses the specimen surface has a discrete characteristic rather than a smooth, continuous profile

  3. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    Energy Technology Data Exchange (ETDEWEB)

    Schmidsfeld, A. von, E-mail: avonschm@uos.de; Reichling, M., E-mail: reichling@uos.de [Fachbereich Physik, Universität Osnabrück, Barbarastraße 7, 49076 Osnabrück (Germany)

    2015-09-21

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavity via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.

  4. The importance of cantilever dynamics in the interpretation of Kelvin probe force microscopy.

    Science.gov (United States)

    Satzinger, Kevin J; Brown, Keith A; Westervelt, Robert M

    2012-09-15

    A realistic interpretation of the measured contact potential difference (CPD) in Kelvin probe force microscopy (KPFM) is crucial in order to extract meaningful information about the sample. Central to this interpretation is a method to include contributions from the macroscopic cantilever arm, as well as the cone and sharp tip of a KPFM probe. Here, three models of the electrostatic interaction between a KPFM probe and a sample are tested through an electrostatic simulation and compared with experiment. In contrast with previous studies that treat the KPFM cantilever as a rigid object, we allow the cantilever to bend and rotate; accounting for cantilever bending provides the closest agreement between theory and experiment. We demonstrate that cantilever dynamics play a major role in CPD measurements and provide a simulation technique to explore this phenomenon.

  5. Molecular Weiss domain polarization in piezoceramics to diaphragm, cantilever and channel construction in low-temperature-cofired ceramics for micro-fluidic applications

    International Nuclear Information System (INIS)

    Khanna, P.K.; Ahmad, S.; Grimme, R.

    2005-01-01

    This paper presents the efforts made to study the process of comminution to Weiss domain polarization and phase transition in piezoceramics together with the versatility of low-temperature-cofired ceramics-based devices and components for their ready adoption for typical applications in the area of micro-fluidics. A conceptual micro-fluidic module has been presented and few unit entities necessary for its realization have been described. The purpose of these entities is to position the sensors and actuators by using piezoelectric materials. Investigations are performed to make useful constructions like diaphragms and cantilevers for laying the sensing elements, cavities for burying the electronic chip devices, and channels for fluid transportation. In order to realize these constructions, the basic step involves machining of circular, straight line, rectangular and square-shaped structure in the green ceramic tapes followed by lamination and firing with post-machining in some cases. The diaphragm and cavity includes one or more un-machined layer stacked together with several machined layers with rectangular or square slits. The cantilever is an extension of the diaphragm creation process with inclusion of a post-machining step. The channel essentially consists of a machined green ceramic layer sandwiched between an un-machined and a partially machined layer. The fabrication for all the above constructions has been exemplified and the details have been discussed

  6. Firewater system inadvertent actuation frequencies

    International Nuclear Information System (INIS)

    Schroeder, J.A.; Eide, S.A.

    1993-01-01

    This paper presents some recommended generic values for fire protection system inadvertent actuation frequencies. The frequencies are based on actual data from Department of Energy and commercial reactor plant facilities

  7. Magnetically Actuated Seal, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — FTT proposes development of a magnetically actuated dynamic seal. Dynamic seals are used throughout the turbopump in high-performance, pump-fed, liquid rocket...

  8. Magnetically Actuated Seal, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — FTT proposes development of a magnetically actuated dynamic seal. Dynamic seals are used throughout the turbopump in high-performance, pump-fed, liquid rocket...

  9. Modeling and control of precision actuators

    CERN Document Server

    Kiong, Tan Kok

    2013-01-01

    IntroductionGrowing Interest in Precise ActuatorsTypes of Precise ActuatorsApplications of Precise ActuatorsNonlinear Dynamics and ModelingHysteresisCreepFrictionForce RipplesIdentification and Compensation of Preisach Hysteresis in Piezoelectric ActuatorsSVD-Based Identification and Compensation of Preisach HysteresisHigh-Bandwidth Identification and Compensation of Hysteretic Dynamics in Piezoelectric ActuatorsConcluding RemarksIdentification and Compensation of Frict

  10. Shape memory alloy actuation for a variable area fan nozzle

    Science.gov (United States)

    Rey, Nancy; Tillman, Gregory; Miller, Robin M.; Wynosky, Thomas; Larkin, Michael J.; Flamm, Jeffrey D.; Bangert, Linda S.

    2001-06-01

    The ability to control fan nozzle exit area is an enabling technology for next generation high-bypass-ratio turbofan engines. Performance benefits for such designs are estimated at up to 9% in thrust specific fuel consumption (TSFC) relative to current fixed-geometry engines. Conventionally actuated variable area fan nozzle (VAN) concepts tend to be heavy and complicated, with significant aircraft integration, reliability and packaging issues. The goal of this effort was to eliminate these undesirable features and formulate a design that meets or exceeds leakage, durability, reliability, maintenance and manufacturing cost goals. A Shape Memory Alloy (SMA) bundled cable actuator acting to move an array of flaps around the fan nozzle annulus is a concept that meets these requirements. The SMA bundled cable actuator developed by the United Technologies Corporation (Patents Pending) provides significant work output (greater than 2200 in-lb per flap, through the range of motion) in a compact package and minimizes system complexity. Results of a detailed design study indicate substantial engine performance, weight, and range benefits. The SMA- based actuation system is roughly two times lighter than a conventional mechanical system, with significant aircraft direct operating cost savings (2-3%) and range improvements (5-6%) relative to a fixed-geometry nozzle geared turbofan. A full-scale sector model of this VAN system was built and then tested at the Jet Exit Test Facility at NASA Langley to demonstrate the system's ability to achieve 20% area variation of the nozzle under full scale aerodynamic loads. The actuator exceeded requirements, achieving repeated actuation against full-scale loads representative of typical cruise as well as greater than worst-case (ultimate) aerodynamic conditions. Based on these encouraging results, work is continuing with the goal of a flight test on a C-17 transport aircraft.

  11. Soft Pneumatic Actuators for Rehabilitation

    Directory of Open Access Journals (Sweden)

    Guido Belforte

    2014-05-01

    Full Text Available Pneumatic artificial muscles are pneumatic devices with practical and various applications as common actuators. They, as human muscles, work in agonistic-antagonistic way, giving a traction force only when supplied by compressed air. The state of the art of soft pneumatic actuators is here analyzed: different models of pneumatic muscles are considered and evolution lines are presented. Then, the use of Pneumatic Muscles (PAM in rehabilitation apparatus is described and the general characteristics required in different applications are considered, analyzing the use of proper soft actuators with various technical properties. Therefore, research activity carried out in the Department of Mechanical and Aerospace Engineering in the field of soft and textile actuators is presented here. In particular, pneumatic textile muscles useful for active suits design are described. These components are made of a tubular structure, with an inner layer of latex coated with a deformable outer fabric sewn along the edge. In order to increase pneumatic muscles forces and contractions Braided Pneumatic Muscles are studied. In this paper, new prototypes are presented, based on a fabric construction and various kinds of geometry. Pressure-force-deformation tests results are carried out and analyzed. These actuators are useful for rehabilitation applications. In order to reproduce the whole upper limb movements, new kind of soft actuators are studied, based on the same principle of planar membranes deformation. As an example, the bellows muscle model and worm muscle model are developed and described. In both cases, wide deformations are expected. Another issue for soft actuators is the pressure therapy. Some textile sleeve prototypes developed for massage therapy on patients suffering of lymph edema are analyzed. Different types of fabric and assembly techniques have been tested. In general, these Pressure Soft Actuators are useful for upper/lower limbs treatments

  12. Control of Adjustable Compliant Actuators

    Directory of Open Access Journals (Sweden)

    Berno J.E. Misgeld

    2014-05-01

    Full Text Available Adjustable compliance or variable stiffness actuators comprise an additional element to elastically decouple the actuator from the load and are increasingly applied to human-centered robotic systems. The advantages of such actuators are of paramount importance in rehabilitation robotics, where requirements demand safe interaction between the therapy system and the patient. Compliant actuator systems enable the minimization of large contact forces arising, for example, from muscular spasticity and have the ability to periodically store and release energy in cyclic movements. In order to overcome the loss of bandwidth introduced by the elastic element and to guarantee a higher range in force/torque generation, new actuator designs consider variable or nonlinear stiffness elements, respectively. These components cannot only be adapted to the walking speed or the patient condition, but also entail additional challenges for feedback control. This paper introduces a novel design method for an impedance-based controller that fulfills the control objectives and compares the performance and robustness to a classical cascaded control approach. The new procedure is developed using a non-standard positive-real Η2 controller design and is applied to a loop-shaping approach. Robust norm optimal controllers are designed with regard to the passivity of the actuator load-impedance transfer function and the servo control problem. Classical cascaded and positive-real Η2 controller designs are validated and compared in simulations and in a test bench using a passive elastic element of varying stiffness.

  13. Explosive actuated valve

    International Nuclear Information System (INIS)

    Byrne, K.G.

    1983-01-01

    1. A device of the character described comprising the combination of a housing having an elongate bore and including a shoulder extending inwardly into said bore, a single elongate movable plunger disposed in said bore including an outwardly extending flange adjacent one end thereof overlying said shoulder, normally open conduit means having an inlet and an outlet perpendicularly piercing said housing intermediate said shoulder and said flange and including an intermediate portion intersecting and normally openly communicating with said bore at said shoulder, normally closed conduit means piercing said housing and intersecting said bore at a location spaced from said normally open conduit means, said elongate plunger including a shearing edge adjacent the other end thereof normally disposed intermediate both of said conduit means and overlying a portion of said normally closed conduit means, a deformable member carried by said plunger intermediate said flange and said shoulder and normally spaced from and overlying the intermediate portion of said normally open conduit means, and means on the housing communicating with the bore to retain an explosive actuator for moving said plunger to force the deformable member against the shoulder and extrude a portion of the deformable member out of said bore into portions of the normally open conduit means for plugging the same and to effect the opening of said normally closed conduit means by the plunger shearing edge substantially concomitantly with the plugging of the normally open conduit means

  14. Nanostructured Fiber Optic Cantilever Arrays and Hybrid MEMS Sensors for Chemical and Biological Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Advancements in nano-/micro-scale sensor fabrication and molecular recognition surfaces offer promising opportunities to develop miniaturized hybrid fiber optic and...

  15. Topology optimization of Halbach magnet arrays using isoparametric projection

    International Nuclear Information System (INIS)

    Lee, Jaewook; Nomura, Tsuyoshi; Dede, Ercan M.

    2017-01-01

    Highlights: • Design method of Halbach magnet array is proposed using topology optimization. • Magnet strength and direction are simultaneously optimized by isoparametric projection. • For manufacturing feasibility of magnet, penalization and extrusion schemes are proposed. • Design results of circular shaped Halbach arrays are provided. • Halbach arrays in linear actuator are optimized to maximize magnetic force. - Abstract: Topology optimization using isoparametric projection for the design of permanent magnet patterns in Halbach arrays is proposed. Based on isoparametric shape functions used in the finite element analysis, the permanent magnet strength and magnetization directions in a Halbach array are simultaneously optimized for a given design goal. To achieve fabrication feasibility of a designed Halbach magnet array, two design schemes are combined with the isoparametric projection method. First, a penalization scheme is proposed for designing the permanent magnets to have discrete magnetization direction angles. Second, an extrusion scheme is proposed for the shape regularization of the permanent magnet segments. As a result, the method systematically finds the optimal permanent magnet patterns of a Halbach array considering manufacturing feasibility. In two numerical examples, a circular shaped permanent magnet Halbach array is designed to minimize the magnitude of the magnetic flux density and to maximize the upward direction magnetic flux density inside the magnet array. Logical extension of the method to the design of permanent magnet arrays in linear actuators is provided, where the design goal is to maximize the actuator magnetic force.

  16. Topology optimization of Halbach magnet arrays using isoparametric projection

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Jaewook, E-mail: jaewooklee@gist.ac.kr [School of Mechanical Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju, 61005 (Korea, Republic of); Nomura, Tsuyoshi [Toyota Central R& D Labs., Inc., 41-1 Yokomichi, Aichi 480-1192 (Japan); Toyota Research Institute of North America, 1555 Woodridge Avenue, Ann Arbor, MI 48105 (United States); Dede, Ercan M. [Toyota Research Institute of North America, 1555 Woodridge Avenue, Ann Arbor, MI 48105 (United States)

    2017-06-15

    Highlights: • Design method of Halbach magnet array is proposed using topology optimization. • Magnet strength and direction are simultaneously optimized by isoparametric projection. • For manufacturing feasibility of magnet, penalization and extrusion schemes are proposed. • Design results of circular shaped Halbach arrays are provided. • Halbach arrays in linear actuator are optimized to maximize magnetic force. - Abstract: Topology optimization using isoparametric projection for the design of permanent magnet patterns in Halbach arrays is proposed. Based on isoparametric shape functions used in the finite element analysis, the permanent magnet strength and magnetization directions in a Halbach array are simultaneously optimized for a given design goal. To achieve fabrication feasibility of a designed Halbach magnet array, two design schemes are combined with the isoparametric projection method. First, a penalization scheme is proposed for designing the permanent magnets to have discrete magnetization direction angles. Second, an extrusion scheme is proposed for the shape regularization of the permanent magnet segments. As a result, the method systematically finds the optimal permanent magnet patterns of a Halbach array considering manufacturing feasibility. In two numerical examples, a circular shaped permanent magnet Halbach array is designed to minimize the magnitude of the magnetic flux density and to maximize the upward direction magnetic flux density inside the magnet array. Logical extension of the method to the design of permanent magnet arrays in linear actuators is provided, where the design goal is to maximize the actuator magnetic force.

  17. Next-Generation Deformable Mirrors for Astronomical Coronagraphy by Utilizing PMN-PT Single Crystal Stack Actuators in integration with Driver ASIC, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project aims to develop a new manufacturing approach for deformable mirrors (DMs) by batch fabricating the stack actuator array. The innovation...

  18. Online Structural Health Monitoring and Parameter Estimation for Vibrating Active Cantilever Beams Using Low-Priced Microcontrollers

    Directory of Open Access Journals (Sweden)

    Gergely Takács

    2015-01-01

    Full Text Available This paper presents a structural health monitoring and parameter estimation system for vibrating active cantilever beams using low-cost embedded computing hardware. The actuator input and the measured position are used in an augmented nonlinear model to observe the dynamic states and parameters of the beam by the continuous-discrete extended Kalman filter (EKF. The presence of undesirable structural change is detected by variations of the first resonance estimate computed from the observed equivalent mass, stiffness, damping, and voltage-force conversion coefficients. A fault signal is generated upon its departure from a predetermined nominal tolerance band. The algorithm is implemented using automatically generated and deployed machine code on an electronics prototyping platform, featuring an economically feasible 8-bit microcontroller unit (MCU. The validation experiments demonstrate the viability of the proposed system to detect sudden or gradual mechanical changes in real-time, while the functionality on low-cost miniaturized hardware suggests a strong potential for mass-production and structural integration. The modest computing power of the microcontroller and automated code generation designates the proposed system only for very flexible structures, with a first dominant resonant frequency under 4 Hz; however, a code-optimized version certainly allows much stiffer structures or more complicated models on the same hardware.

  19. Accurate Calibration and Uncertainty Estimation of the Normal Spring Constant of Various AFM Cantilevers

    Directory of Open Access Journals (Sweden)

    Yunpeng Song

    2015-03-01

    Full Text Available Measurement of force on a micro- or nano-Newton scale is important when exploring the mechanical properties of materials in the biophysics and nanomechanical fields. The atomic force microscope (AFM is widely used in microforce measurement. The cantilever probe works as an AFM force sensor, and the spring constant of the cantilever is of great significance to the accuracy of the measurement results. This paper presents a normal spring constant calibration method with the combined use of an electromagnetic balance and a homemade AFM head. When the cantilever presses the balance, its deflection is detected through an optical lever integrated in the AFM head. Meanwhile, the corresponding bending force is recorded by the balance. Then the spring constant can be simply calculated using Hooke’s law. During the calibration, a feedback loop is applied to control the deflection of the cantilever. Errors that may affect the stability of the cantilever could be compensated rapidly. Five types of commercial cantilevers with different shapes, stiffness, and operating modes were chosen to evaluate the performance of our system. Based on the uncertainty analysis, the expanded relative standard uncertainties of the normal spring constant of most measured cantilevers are believed to be better than 2%.

  20. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    Energy Technology Data Exchange (ETDEWEB)

    Sader, John E. [Department of Mathematics and Statistics, University of Melbourne, Victoria 3010 (Australia); Kavli Nanoscience Institute and Department of Physics, California Institute of Technology, Pasadena, California 91125 (United States); Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J. [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Monty, Jason P.; Marusic, Ivan [Department of Mechanical Engineering, University of Melbourne, Victoria 3010 (Australia); Wei Xingzhan; Mulvaney, Paul [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Bio21 Institute, University of Melbourne, Victoria 3010 (Australia); Crawford, Simon A. [School of Botany, University of Melbourne, Victoria 3010 (Australia); Friend, James R. [Melbourne Centre for Nanofabrication, Clayton, Victoria 3800 (Australia); MicroNanophysics Research Laboratory, RMIT University, Melbourne, Victoria 3001 (Australia)

    2012-10-15

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  1. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    International Nuclear Information System (INIS)

    Sader, John E.; Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J.; Monty, Jason P.; Marusic, Ivan; Wei Xingzhan; Mulvaney, Paul; Crawford, Simon A.; Friend, James R.

    2012-01-01

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  2. Anterior Cantilever Resin-Bonded Fixed Dental Prostheses: A Review of the Literature.

    Science.gov (United States)

    Mourshed, Bilal; Samran, Abdulaziz; Alfagih, Amal; Samran, Ahalm; Abdulrab, Saleem; Kern, Matthias

    2018-03-01

    This review evaluated the survival rate of single retainer anterior resin-bonded fixed dental prostheses (RBFDPs) to determine whether the choice of material affects their clinical outcome. An electronic search of the English peer-reviewed dental literature in PubMed was conducted to identify all publications reporting on cantilever RBFDPs until May 2016. Study information extraction and methodological quality assessments were accomplished by two reviewers independently. The searched keywords were as follows: "resin-bonded, single retainer, all-ceramic resin-bonded fixed dental prostheses (RBFDPs), all-ceramic RBFDPs, cantilever resin, RBFDPs, cantilever resin-bonded bridge, two units cantilevered, two-unit cantilevered, metal-ceramic cantilever, and metal-ceramic." Furthermore, the ''Related Articles'' feature of PubMed was used to identify further references of interest within the primary search. The bibliographies of the obtained references were used to identify pertinent secondary references. Review articles were also used to identify relevant articles. After the application of exclusion criteria, the definitive list of articles was screened to extract the qualitative data, and the results were analyzed. Overall 2588 articles were dedicated at the first review phase; however, only 311 studies were left after the elimination of duplicates and unrelated studies. Seventeen studies passed the second review phase. Five studies were excluded because they were follow-up studies of the same study cohort. Twelve studies were finally selected. The use of cantilever RBFDPs showed promising results and high survival rates. © 2016 by the American College of Prosthodontists.

  3. Investigation of Subcombination Internal Resonances in Cantilever Beams

    Directory of Open Access Journals (Sweden)

    Haider N. Arafat

    1998-01-01

    Full Text Available Activation of subcombination internal resonances in transversely excited cantilever beams is investigated. The effect of geometric and inertia nonlinearities, which are cubic in the governing equation of motion, is considered. The method of time-averaged Lagrangian and virtual work is used to determine six nonlinear ordinary-differential equations governing the amplitudes and phases of the three interacting modes. Frequency- and force-response curves are generated for the case ω ≈ ω4 ≈ 1/2(ω2 + ω5. There are two possible responses: single-mode and three-mode responses. The single-mode periodic response is found to undergo supercritical and subcritical pitchfork bifurcations, which result in three-mode interactions. In the case of three-mode responses, there are conditions where the low-frequency mode dominates the response, resulting in high-amplitude quasiperiodic oscillations.

  4. Strategy Guideline: Quality Management in Existing Homes; Cantilever Floor Example

    Energy Technology Data Exchange (ETDEWEB)

    Taggart, J.; Sikora, J.; Wiehagen, J.; Wood, A.

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented. The goal of existing home high performing remodeling quality management systems (HPR-QMS) is to establish practices and processes that can be used throughout any remodeling project. The research presented in this document provides a comparison of a selected retrofit activity as typically done versus that same retrofit activity approached from an integrated high performance remodeling and quality management perspective. It highlights some key quality management tools and approaches that can be adopted incrementally by a high performance remodeler for this or any high performance retrofit. This example is intended as a template and establishes a methodology that can be used to develop a portfolio of high performance remodeling strategies.

  5. Photothermal cantilever deflection spectroscopy of a photosensitive polymer

    Energy Technology Data Exchange (ETDEWEB)

    Yun, Minhyuk; Lee, Dongkyu; Jung, Namchul; Jeon, Sangmin [Department of Chemical Engineering, Pohang University of Science and Technology, Pohang (Korea, Republic of); Kim, Seonghwan; Chae, Inseok; Thundat, Thomas [Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta T6G 2V4 (Canada)

    2012-05-14

    The mechanical and chemical information of a poly(methyl methacrylate) (PMMA) film on a microcantilever were simultaneously acquired by photothermal cantilever deflection spectroscopy as a function of ultraviolet (UV) irradiation time. Nanomechanical infrared (IR) spectra from the PMMA-coated microcantilever agreed well with the Fourier transform infrared spectroscopy (FTIR) spectra of PMMA on gold-coated silicon wafer. The decreasing intensities of nanomechanical IR peaks represent chemical as well as mechanical information of UV radiation-induced photodegradation processes in the PMMA which cannot be obtained by a conventional FTIR technique. The observed decrease in the resonance frequency of the microcantilever is related to the change in the Young's modulus of the PMMA under UV exposure.

  6. Analysis of the sweeped actuator line method

    OpenAIRE

    Nathan Jörn; Masson Christian; Dufresne Louis; Churchfield Matthew

    2015-01-01

    The actuator line method made it possible to describe the near wake of a wind turbine more accurately than with the actuator disk method. Whereas the actuator line generates the helicoidal vortex system shed from the tip blades, the actuator disk method sheds a vortex sheet from the edge of the rotor plane. But with the actuator line come also temporal and spatial constraints, such as the need for a much smaller time step than with actuator disk. While the latter one only has to obey the Cour...

  7. Pneumatic Variable Series Elastic Actuator.

    Science.gov (United States)

    Zheng, Hao; Wu, Molei; Shen, Xiangrong

    2016-08-01

    Inspired by human motor control theory, stiffness control is highly effective in manipulation and human-interactive tasks. The implementation of stiffness control in robotic systems, however, has largely been limited to closed-loop control, and suffers from multiple issues such as limited frequency range, potential instability, and lack of contribution to energy efficiency. Variable-stiffness actuator represents a better solution, but the current designs are complex, heavy, and bulky. The approach in this paper seeks to address these issues by using pneumatic actuator as a variable series elastic actuator (VSEA), leveraging the compressibility of the working fluid. In this work, a pneumatic actuator is modeled as an elastic element with controllable stiffness and equilibrium point, both of which are functions of air masses in the two chambers. As such, for the implementation of stiffness control in a robotic system, the desired stiffness/equilibrium point can be converted to the desired chamber air masses, and a predictive pressure control approach is developed to control the timing of valve switching to obtain the desired air mass while minimizing control action. Experimental results showed that the new approach in this paper requires less expensive hardware (on-off valve instead of proportional valve), causes less control action in implementation, and provides good control performance by leveraging the inherent dynamics of the actuator.

  8. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    Science.gov (United States)

    Larsson, David; Greve, Anders; Hvam, Jørn M.; Boisen, Anja; Yvind, Kresten

    2009-03-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was ˜60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.

  9. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    DEFF Research Database (Denmark)

    Larsson, David; Greve, Anders; Hvam, Jørn Märcher

    2009-01-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power...... and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was 60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed....

  10. Feedback cooling of cantilever motion using a quantum point contact transducer

    International Nuclear Information System (INIS)

    Montinaro, M.; Mehlin, A.; Solanki, H. S.; Peddibhotla, P.; Poggio, M.; Mack, S.; Awschalom, D. D.

    2012-01-01

    We use a quantum point contact (QPC) as a displacement transducer to measure and control the low-temperature thermal motion of a nearby micromechanical cantilever. The QPC is included in an active feedback loop designed to cool the cantilever's fundamental mechanical mode, achieving a squashing of the QPC noise at high gain. The minimum achieved effective mode temperature of 0.2 K and the displacement resolution of 10 -11 m/√(Hz) are limited by the performance of the QPC as a one-dimensional conductor and by the cantilever-QPC capacitive coupling.

  11. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    Directory of Open Access Journals (Sweden)

    Felix Ströer

    2018-02-01

    Full Text Available Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective description of the stylus cantilever dynamics with system-theoretical techniques and show a simple iterative approach to optimize closed-loop control parameters with boundary conditions.

  12. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    International Nuclear Information System (INIS)

    Nordström, Maria; Hübner, Jörg; Boisen, Anja; Calleja, Montserrat

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps

  13. Integrated MOSFET-Embedded-Cantilever-Based Biosensor Characteristic for Detection of Anthrax Simulant

    Energy Technology Data Exchange (ETDEWEB)

    Mostafa, Salwa [University of Tennessee, Knoxville (UTK); Lee, Ida [ORNL; Islam, Syed K [University of Tennessee, Knoxville (UTK); Eliza, Sazia A. [University of Tennessee, Knoxville (UTK); Shekhawat, Gajendra [Northwestern University, Evanston; Dravid, Vinayak [Northwestern University, Evanston; Tulip, Fahmida S [ORNL

    2011-01-01

    In this work, MOSFET-embedded cantilevers are configured as microbial sensors for detection of anthrax simulants, Bacillus thuringiensis. Anthrax simulants attached to the chemically treated gold-coated cantilever cause changes in the MOSFET drain current due to the bending of the cantilever which indicates the detection of anthrax simulant. Electrical properties of the anthrax simulant are also responsible for the change in the drain current. The test results suggest a detection range of 10 L of stimulant test solution (a suspension population of 1.3 107 colony-forming units/mL diluted in 40% ethanol and 60% deionized water) with a linear response of 31 A/ L.

  14. Development of a non-explosive release actuator using shape memory alloy wire.

    Science.gov (United States)

    Yoo, Young Ik; Jeong, Ju Won; Lim, Jae Hyuk; Kim, Kyung-Won; Hwang, Do-Soon; Lee, Jung Ju

    2013-01-01

    We have developed a newly designed non-explosive release actuator that can replace currently used release devices. The release mechanism is based on a separation mechanism, which relies on segmented nuts and a shape memory alloy (SMA) wire trigger. A quite fast and simple trigger operation is made possible through the use of SMA wire. This actuator is designed to allow a high preload with low levels of shock for the solar arrays of medium-size satellites. After actuation, the proposed device can be easily and instantly reset. Neither replacement, nor refurbishment of any components is necessary. According to the results of a performance test, the release time, preload capacity, and maximum shock level are 50 ms, 15 kN, and 350 G, respectively. In order to increase the reliability of the actuator, more than ten sets of performance tests are conducted. In addition, the proposed release actuator is tested under thermal vacuum and extreme vibration environments. No degradation or damage was observed during the two environment tests, and the release actuator was able to operate successfully. Considering the test results as a whole, we conclude that the proposed non-explosive release actuator can be applied reliably to intermediate-size satellites to replace existing release systems.

  15. Engineering Design Tools for Shape Memory Alloy Actuators: CASMART Collaborative Best Practices and Case Studies

    Science.gov (United States)

    Wheeler, Robert W.; Benafan, Othmane; Gao, Xiujie; Calkins, Frederick T; Ghanbari, Zahra; Hommer, Garrison; Lagoudas, Dimitris; Petersen, Andrew; Pless, Jennifer M.; Stebner, Aaron P.; hide

    2016-01-01

    The primary goal of the Consortium for the Advancement of Shape Memory Alloy Research and Technology (CASMART) is to enable the design of revolutionary applications based on shape memory alloy (SMA) technology. In order to help realize this goal and reduce the development time and required experience for the fabrication of SMA actuation systems, several modeling tools have been developed for common actuator types and are discussed herein along with case studies, which highlight the capabilities and limitations of these tools. Due to their ability to sustain high stresses and recover large deformations, SMAs have many potential applications as reliable, lightweight, solid-state actuators. Their advantage over classical actuators can also be further improved when the actuator geometry is modified to fit the specific application. In this paper, three common actuator designs are studied: wires, which are lightweight, low-profile, and easily implemented; springs, which offer actuation strokes upwards of 200 at reduced mechanical loads; and torque tubes, which can provide large actuation forces in small volumes and develop a repeatable zero-load actuation response (known as the two-way shape memory effect). The modeling frameworks, which have been implemented in the design tools, are developed for each of these frequently used SMA actuator types. In order to demonstrate the versatility and flexibility of the presented design tools, as well as validate their modeling framework, several design challenges were completed. These case studies include the design and development of an active hinge for the deployment of a solar array or foldable space structure, an adaptive solar array deployment and positioning system, a passive air temperature controller for regulation flow temperatures inside of a jet engine, and a redesign of the Corvette active hatch, which allows for pressure equalization of the car interior. For each of the presented case studies, a prototype or proof

  16. Construction of a Piezoresistive Neural Sensor Array

    Science.gov (United States)

    Carlson, W. B.; Schulze, W. A.; Pilgrim, P. M.

    1996-01-01

    The construction of a piezoresistive - piezoelectric sensor (or actuator) array is proposed using 'neural' connectivity for signal recognition and possible actuation functions. A closer integration of the sensor and decision functions is necessary in order to achieve intrinsic identification within the sensor. A neural sensor is the next logical step in development of truly 'intelligent' arrays. This proposal will integrate 1-3 polymer piezoresistors and MLC electroceramic devices for applications involving acoustic identification. The 'intelligent' piezoresistor -piezoelectric system incorporates printed resistors, composite resistors, and a feedback for the resetting of resistances. A model of a design is proposed in order to simulate electromechanical resistor interactions. The goal of optimizing a sensor geometry for improving device reliability, training, & signal identification capabilities is the goal of this work. At present, studies predict performance of a 'smart' device with a significant control of 'effective' compliance over a narrow pressure range due to a piezoresistor percolation threshold. An interesting possibility may be to use an array of control elements to shift the threshold function in order to change the level of resistance in a neural sensor array for identification, or, actuation applications. The proposed design employs elements of: (1) conductor loaded polymers for a 'fast' RC time constant response; and (2) multilayer ceramics for actuation or sensing and shifting of resistance in the polymer. Other material possibilities also exist using magnetoresistive layered systems for shifting the resistance. It is proposed to use a neural net configuration to test and to help study the possible changes required in the materials design of these devices. Numerical design models utilize electromechanical elements, in conjunction with structural elements in order to simulate piezoresistively controlled actuators and changes in resistance of sensors

  17. Analytical solutions of the electrostatically actuated curled beam problem

    KAUST Repository

    Younis, Mohammad I.

    2014-07-24

    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximation. In such cases, multi-mode reduced order models are shown to yield accurate results. © 2014 Springer-Verlag Berlin Heidelberg.

  18. Fast-acting valve actuator

    Science.gov (United States)

    Cho, Nakwon

    1980-01-01

    A fast-acting valve actuator utilizes a spring driven pneumatically loaded piston to drive a valve gate. Rapid exhaust of pressurized gas from the pneumatically loaded side of the piston facilitates an extremely rapid piston stroke. A flexible selector diaphragm opens and closes an exhaust port in response to pressure differentials created by energizing and de-energizing a solenoid which controls the pneumatic input to the actuator as well as selectively providing a venting action to one side of the selector diaphragm.

  19. Actuator System with Dual Chambers

    DEFF Research Database (Denmark)

    2015-01-01

    The present invention relates to an actuator system with a magnetic lead screw (50), comprises a magnetic rotor (5) and a translator cylinder (2), the translator cylinder (2) comprises a magnetic stator (16), the translator cylinder (2) has a closed first end (14) and a second end confined by a lid...... volume, wherein the first volume and the second volume changes as a function of the linear movement. The invention also relates to a method of operating an actuator system with a magnetic lead screw....

  20. Modular Actuators for Space Applications, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Rocketstar Robotics is proposing the development of a modern dual drive actuator. Rocketstar has put together numerous modern concepts for modular actuators that...

  1. Transputer Control of Hydraulic Actuators and Robots

    DEFF Research Database (Denmark)

    Conrad, Finn

    1996-01-01

    Results from a Danish mechatronics research program entitled IMCIA - Intelligent Control and Intelligent Actuators. The objective is development of intelligent actuators for intelligent motion control. A mechatronics test facility with a transputer controlled hydraulic robot suiteable for real...

  2. Electrostatically actuated torsional resonant sensors and switches

    KAUST Repository

    Younis, Mohammad I.

    2016-01-01

    Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular

  3. Nonlinear Phenomena in the Single-Mode Dynamics in an AFM Cantilever Beam

    KAUST Repository

    Ruzziconi, Laura; Lenci, Stefano; Younis, Mohammad I.

    2016-01-01

    This study deals with the nonlinear dynamics arising in an atomic force microscope cantilever beam. After analyzing the static behavior, a single degree of freedom Galerkin reduced order model is introduced, which describes the overall scenario

  4. Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

    Energy Technology Data Exchange (ETDEWEB)

    Siwak, N. P. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States); Fan, X. Z.; Ghodssi, R. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Kanakaraju, S.; Richardson, C. J. K. [Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States)

    2014-10-06

    An integrated photodiode displacement readout scheme for a microelectromechanical cantilever waveguide resonator sensing platform is presented. III-V semiconductors are used to enable the monolithic integration of passive waveguides with active optical components. This work builds upon previously demonstrated results by measuring the displacement of cantilever waveguide resonators with on-chip waveguide PIN photodiodes. The on-chip integration of the readout provides an additional 70% improvement in mass sensitivity compared to off-chip photodetector designs due to measurement stability and minimized coupling loss. In addition to increased measurement stability, reduced packaging complexity is achieved due to the simplicity of the readout design. We have fabricated cantilever waveguides with integrated photodetectors and experimentally characterized these cantilever sensors with monolithically integrated PIN photodiodes.

  5. Fracture strength of fiber-reinforced surface-retained anterior cantilever restorations

    NARCIS (Netherlands)

    Oezcan, Mutlu; Kumbuloglu, Ovul; User, Atilla

    2008-01-01

    Purpose: This study compared the fracture strength of direct anterior cantilever fiber-reinforced composite (FRC) fixed partial dentures (FPD) reinforced with 3 types of E-glass fibers preimpregnated with either urethane tetramethacrylate, bisphenol glycidylmethacrylate/polymethyl methacrylate, or

  6. The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever

    Science.gov (United States)

    Palosaari, Jaakko; Leinonen, Mikko; Juuti, Jari; Jantunen, Heli

    2018-06-01

    In this research four piezoelectric bimorph type cantilevers for energy harvesting were manufactured, measured and analyzed to study the effects of substrate layer thickness on energy harvesting efficiency and durability under different accelerations. The cantilevers had the same dimensions of the piezoelectric ceramic components, but had different thicknesses of the steel substrate (no steel, 30 μm, 50 μm and 75 μm). The cantilevers were tuned to the same resonance frequency with different sizes of tip mass (2.13 g, 3.84 g, 4.17 g and 5.08 g). The energy harvester voltage outputs were then measured across an electrical load near to the resonance frequency (∼40 Hz) with sinusoidal vibrations under different accelerations. The stress exhibited by the four cantilevers was compared and analyzed and their durability was tested with accelerations up to 2.5 g-forces.

  7. Computer aided design of Langasite resonant cantilevers: analytical models and simulations

    Science.gov (United States)

    Tellier, C. R.; Leblois, T. G.; Durand, S.

    2010-05-01

    Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.

  8. Sensing technology for damage assessment of sign supports and cantilever poles : final report, August 31, 2010.

    Science.gov (United States)

    2010-08-31

    This report presents the results of research activities conducted under Contract No. 519691-PIT 008 on Sensing Technology for : Damage Assessment of Sign Supports and Cantilever Poles between the University of Pittsburgh and the Pennsylvania De...

  9. Qualification of safety-related valve actuators

    International Nuclear Information System (INIS)

    Anon.

    1981-01-01

    This Standard describes the qualification of all types of power-driven valve actuators, including damper actuators, for safety-related functions in nuclear power generating stations. It may also be used to separately qualify actuator components. This Standard establishes the minimum requirements for, and guidance regarding, the methods and procedures for qualification of all safety-related functions of power-driven valve actuators

  10. Accurate measurement of Atomic Force Microscope cantilever deflection excluding tip-surface contact with application to force calibration

    Energy Technology Data Exchange (ETDEWEB)

    Slattery, Ashley D.; Blanch, Adam J.; Quinton, Jamie S.; Gibson, Christopher T., E-mail: christopher.gibson@flinders.edu.au

    2013-08-15

    Considerable attention has been given to the calibration of AFM cantilever spring constants in the last 20 years. Techniques that do not require tip-sample contact are considered advantageous since the imaging tip is not at risk of being damaged. Far less attention has been directed toward measuring the cantilever deflection or sensitivity, despite the fact that the primary means of determining this factor relies on the AFM tip being pressed against a hard surface, such as silicon or sapphire; which has the potential to significantly damage the tip. A recent method developed by Tourek et al. in 2010 involves deflecting the AFM cantilever a known distance from the imaging tip by pressing the cantilever against a sharpened tungsten wire. In this work a similar yet more precise method is described, whereby the deflection of the cantilever is achieved using an AFM probe with a spring constant much larger than the test cantilever, essentially a rigid cantilever. The exact position of loading on the test cantilever was determined by reverse AFM imaging small spatial markers that are milled into the test cantilever using a focussed ion beam. For V shaped cantilevers it is possible to reverse image the arm intersection in order to determine the exact loading point without necessarily requiring FIB milled spatial markers, albeit at the potential cost of additional uncertainty. The technique is applied to tip-less, beam shaped and V shaped cantilevers and compared to the hard surface contact technique with very good agreement (on average less than 5% difference). While the agreement with the hard surface contact technique was very good the error on the technique is dependent upon the assumptions inherent in the method, such as cantilever shape, loading point distance and ratio of test to rigid cantilever spring constants. The average error ranged between 2 to 5% for the majority of test cantilevers studied. The sensitivity derived with this technique can then be used to

  11. Note: A novel rotary actuator driven by only one piezoelectric actuator.

    Science.gov (United States)

    Huang, Hu; Fu, Lu; Zhao, Hongwei; Shi, Chengli; Ren, Luquan; Li, Jianping; Qu, Han

    2013-09-01

    This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20,097 μrad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 μrad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.

  12. Experimental identification of piezo actuator characteristic

    Directory of Open Access Journals (Sweden)

    Ľ. Miková

    2015-01-01

    Full Text Available This paper deals with piezoelectric material, which can be used as actuator for conversion of electrical energy to mechanical work. Test equipment has been developed for experimental testing of the piezoactuators. Piezoactivity of this actuator has non-linear characteristic. This type of actuator is used for in-pipe mechanism design.

  13. DESIGN of MICRO CANTILEVER BEAM for VAPOUR DETECTION USING COMSOL MULTI PHYSICS SOFTWARE

    OpenAIRE

    Sivacoumar R; Parvathy JM; Pratishtha Deep

    2015-01-01

    This paper gives an overview of micro cantilever beam of various shapes and materials for vapour detection. The design of micro cantilever beam, analysis and simulation is done for each shape. The simulation is done using COMSOL Multi physics software using structural mechanics and chemical module. The simulation results of applied force and resulting Eigen frequencies will be analyzed for different beam structures. The vapour analysis is done using flow cell that consists of chemical pill...

  14. Investigation of polymer derived ceramics cantilevers for application of high speed atomic force microscopy

    Science.gov (United States)

    Wu, Chia-Yun

    High speed Atomic Force Microscopy (AFM) has a wide variety of applications ranging from nanomanufacturing to biophysics. In order to have higher scanning speed of certain AFM modes, high resonant frequency cantilevers are needed; therefore, the goal of this research is to investigate using polymer derived ceramics for possible applications in making high resonant frequency AFM cantilevers using complex cross sections. The polymer derived ceramic that will be studied, is silicon carbide. Polymer derived ceramics offer a potentially more economic fabrication approach for MEMS due to their relatively low processing temperatures and ease of complex shape design. Photolithography was used to make the desired cantilever shapes with micron scale size followed by a wet etching process to release the cantilevers from the substrates. The whole manufacturing process we use borrow well-developed techniques from the semiconducting industry, and as such this project also could offer the opportunity to reduce the fabrication cost of AFM cantilevers and MEMS in general. The characteristics of silicon carbide made from the precursor polymer, SMP-10 (Starfire Systems), were studied. In order to produce high qualities of silicon carbide cantilevers, where the major concern is defects, proper process parameters needed to be determined. Films of polymer derived ceramics often have defects due to shrinkage during the conversion process. Thus control of defects was a central issue in this study. A second, related concern was preventing oxidation; the polymer derived ceramics we chose is easily oxidized during processing. Establishing an environment without oxygen in the whole process was a significant challenge in the project. The optimization of the parameters for using photolithography and wet etching process was the final and central goal of the project; well established techniques used in microfabrication were modified for use in making the cantilever in the project. The techniques

  15. A Novel Approach to the Sensing of Liquid Density Using a Plastic Optical Fibre Cantilever Beam

    Science.gov (United States)

    Kulkarni, Atul; Kim, Youngjin; Kim, Taesung

    2009-01-01

    This article reports for the first time the use of a plastic optical fibre (POF) cantilever beam to measure the density of a liquid. The sensor is based on the Archimedes buoyancy principle. The sensor consists of a POF bonded on the surface of a metal beam in the form of a cantilever configuration, and at the free end of the beam a displacer is…

  16. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    OpenAIRE

    Felix Ströer; Katharina Trinkaus; Indek Raid; Jörg Seewig

    2018-01-01

    Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective de...

  17. Fabrication of a cantilever-based microfluidic flow meter with nL min(-1) resolution

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2011-01-01

    A microfluidic flow meter based on cantilever deflection is developed, showing a resolution down to 3 nL min(-1) for flows in the microliter range. The cantilevers are fabricated in SU-8 and have integrated holes with dimensions from 5 x 5 to20x 20 mu m(2). The holes make it possible to measure i......, hole-to-hole distance, amount of holes, etc) the sensitivity of the sensor can be changed....

  18. A membrane actuator based on an ionic polymer network and carbon nanotubes: the synergy of ionic transport and mechanical properties

    International Nuclear Information System (INIS)

    Dai, Chi-An; Hsiao, Chih-Chun; Weng, Shih-Chun; Kao, An-Cheng; Liu, Chien-Pan; Tsai, Wei-Bor; Chen, Wen-Shiang; Liu, Wei-Ming; Shih, Wen-Pin; Ma, Chien-Ching

    2009-01-01

    There is a growing interest in the development of ionic polymer–metal composites (IPMC) as sensors and actuators for biomedical applications due to their large deformation under low driving voltage. In this study, we employed poly(vinyl alcohol)/poly(2-acrylamido-2-methyl-1-propanesulfonic acid) (PVA/PAMPS) blend membranes as semi-interpenetrating polymer networks for ion exchange in IPMC construction. To improve the mechanical and electrical properties of the IPMC, multi-walled carbon nanotubes (MWNT) were added into PVA/PAMPS membranes. The actuator performance of the membranes was measured as a function of their water uptake, ion exchange capacity, ionic conductivity and the amount of MWNT in the membrane. The dispersion quality of the modified MWNT in the PVA/PAMPS membrane was measured using transmission electron microscopy. The cantilever-type IPMC actuator bends under applied voltage and its bending angle and the generative tip force were measured. Under an applied voltage, IPMC with ∼1 wt% MWNT showed the largest deflection and generated the largest blocking tip force compared with those of IPMC with other various amounts of MWNT. These results show that a small addition of MWNT can optimize the actuation performance of IPMC. The result indicates that IPMC with MWNT shows potential for use as biomimetic artificial muscle

  19. Experimental investigations of the large deflection capabilities of a compliant parallel mechanism actuated by shape memory alloy wires

    International Nuclear Information System (INIS)

    Sreekumar, M; Nagarajan, T; Singaperumal, M

    2008-01-01

    This experimental study investigates the coupled effect of the force developed by the shape memory alloy (SMA) actuators and the force required for the large deflection of an elastica member in a compliant parallel mechanism. The compliant mechanism developed in house consists of a moving platform mounted on a superelastic pillar and three SMA wire actuators to manipulate the platform. A three-axis MEMS accelerometer has been mounted on the moving platform to measure its tilt angle. Three miniature force sensors have been designed and fabricated out of cantilever beams, each mounted with a pair of strain gauges, to measure the force developed by the respective actuators. The force sensors are highly sensitive and cost effective compared to commercially available miniature force sensors. Calibration of the force sensors has been accomplished with known weights, and for the three-axis MEMS accelerometer a rotary base has been considered which is usually used in optical applications. The calibration curves obtained, with R-squared values between 0.9997 and 1.0, show that both the tilt and force sensors considered are most appropriate for the respective applications. The mechanism fixed with the sensors and the drivers for the SMA actuators is integrated with a National Instrument's data acquisition system. The experimental results have been compared with the analytical results and it was found that the relative error is less than 2%. This is a preliminary study in the development of a mechanism for eye prosthesis and similar applications

  20. Input Shaping to Reduce Solar Array Structural Vibrations

    Science.gov (United States)

    Doherty, Michael J.; Tolson, Robert J.

    1998-01-01

    Structural vibrations induced by actuators can be minimized using input shaping. Input shaping is a feedforward method in which actuator commands are convolved with shaping functions to yield a shaped set of commands. These commands are designed to perform the maneuver while minimizing the residual structural vibration. In this report, input shaping is extended to stepper motor actuators. As a demonstration, an input-shaping technique based on pole-zero cancellation was used to modify the Solar Array Drive Assembly (SADA) actuator commands for the Lewis satellite. A series of impulses were calculated as the ideal SADA output for vibration control. These impulses were then discretized for use by the SADA stepper motor actuator and simulated actuator outputs were used to calculate the structural response. The effectiveness of input shaping is limited by the accuracy of the knowledge of the modal frequencies. Assuming perfect knowledge resulted in significant vibration reduction. Errors of 10% in the modal frequencies caused notably higher levels of vibration. Controller robustness was improved by incorporating additional zeros in the shaping function. The additional zeros did not require increased performance from the actuator. Despite the identification errors, the resulting feedforward controller reduced residual vibrations to the level of the exactly modeled input shaper and well below the baseline cases. These results could be easily applied to many other vibration-sensitive applications involving stepper motor actuators.

  1. Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Wu, Wenze; Uhde, Erik; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%.

  2. GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs

    International Nuclear Information System (INIS)

    Gregušová, Dagmar; Kúdela, Róbert; Eliáš, Peter; Šoltýs, Ján; Cambel, Vladimír; Kostič, Ivan

    2010-01-01

    We report on the design, fabrication and initial mechanical testing of cantilevers with tips based on a GaAs/In 0.485 Ga 0.515 P/AlAs heterostructure grown by metal organic chemical vapor deposition. They were produced using a dedicated technological process based on (1) the formation of integrated tips through an AlAs-assisted surface sacrificial wet-etching process and (2) the GaAs cantilever release fully protected between two InGaP etch-stop layers. 2 µm thick InGaP/GaAs/InGaP cantilevers had integrated pyramidal tips with the sides at ∼45° to (1 0 0). Metallic elements were processed close to the tip apexes using non-standard optical lithography. The cantilever release was accomplished using photolithography, Ar ion milling of InGaP and wet chemical etching of GaAs via resist layers deposited by a draping technique. A tip–cantilever prototype with length, width and thickness of 150, 35 and 2 µm, respectively, exhibited a resonance frequency of 66.2 kHz, which correlated well with a theoretical value of 57 kHz for a GaAs cantilever of identical dimensions. (technical note)

  3. Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

    International Nuclear Information System (INIS)

    Cheng, Chao-Lin; Fang, Weileun; Tsai, Ming-Han

    2015-01-01

    Many standard CMOS processes, provided by existing foundries, are available. These standard CMOS processes, with stacking of various metal and dielectric layers, have been extensively applied in integrated circuits as well as micro-electromechanical systems (MEMS). It is of importance to determine the material properties of the metal and dielectric films to predict the performance and reliability of micro devices. This study employs an existing approach to determine the coefficients of thermal expansion (CTEs) of metal and dielectric films for standard CMOS processes. Test cantilevers with different stacking of metal and dielectric layers for standard CMOS processes have been designed and implemented. The CTEs of standard CMOS films can be determined from measurements of the out-of-plane thermal deformations of the test cantilevers. To demonstrate the feasibility of the present approach, thin films prepared by the Taiwan Semiconductor Manufacture Company 0.35 μm 2P4M CMOS process are characterized. Eight test cantilevers with different stacking of CMOS layers and an auxiliary Si cantilever on a SOI wafer are fabricated. The equivalent elastic moduli and CTEs of the CMOS thin films including the metal and dielectric layers are determined, respectively, from the resonant frequency and static thermal deformation of the test cantilevers. Moreover, thermal deformations of cantilevers with stacked layers different to those of the test beams have been employed to verify the measured CTEs and elastic moduli. (paper)

  4. Design and Fabrication of Piezoresistive Based Encapsulated Poly-Si Cantilevers for Bio/chemical Sensing

    Science.gov (United States)

    Krishna, N. P. Vamsi; Murthy, T. R. Srinivasa; Reddy, K. Jayaprakash; Sangeeth, K.; Hegde, G. M.

    Cantilever-based sensing is a growing research field not only within micro regime but also in nano technology. The technology offers a method for rapid, on-line and in-situ monitoring of specific bio/chemical substances by detecting the nanomechanical responses of a cantilever sensor. Cantilever with piezoresistive based detection scheme is more attractive because of its electronics compatibility. Majority of commercially available micromachined piezoresistive sensors are bulk micromachined devices and are fabricated using single crystal silicon wafers. As substrate properties are not important in surface micromachining, the expensive silicon wafers can be replaced by cheaper substrates, such as poly-silicon, glass or plastic. Here we have designed SU-8 based bio/chemical compatible micro electro mechanical device that includes an encapsulated polysilicon piezoresistor for bio/chemical sensing. In this paper we report the design, fabrication and analysis of the encapsulated poly-Si cantilevers. Design and theoretical analysis are carried out using Finite Element Analysis software. For fabrication of poly-silicon piezoresistive cantilevers we followed the surface micromachining process steps. Preliminary characterization of the cantilevers is presented.

  5. Cancelation of thermally induced frequency shifts in bimaterial cantilevers by nonlinear optomechanical interactions

    Energy Technology Data Exchange (ETDEWEB)

    Vy, Nguyen Duy, E-mail: nguyenduyvy@tdt.edu.vn [Theoretical Physics Research Group, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Tri Dat, Le [Faculty of Physics and Engineering Physics, University of Science, Ho Chi Minh City 748355 (Viet Nam); Iida, Takuya [Department of Physical Science, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531 (Japan)

    2016-08-01

    Bimaterial cantilevers have recently been used in, for example, the calorimetric analysis with picowatt resolution in microscopic space based on state-of-the-art atomic force microscopes. However, thermally induced effects usually change physical properties of the cantilevers, such as the resonance frequency, which reduce the accuracy of the measurements. Here, we propose an approach to circumvent this problem that uses an optical microcavity formed between a metallic layer coated on the back of the cantilever and one coated at the end of an optical fiber irradiating the cantilever. In addition to increasing the sensitivity, the optical rigidity of this system diminishes the thermally induced frequency shift. For a coating thickness of several tens of nanometers, the input power is 5–10 μW. These values can be evaluated from parameters derived by directly irradiating the cantilever in the absence of the microcavity. The system has the potential of using the cantilever both as a thermometer without frequency shifting and as a sensor with nanometer-controlled accuracy.

  6. Multilayer Piezoelectric Stack Actuator Characterization

    Science.gov (United States)

    Sherrit, Stewart; Jones, Christopher M.; Aldrich, Jack B.; Blodget, Chad; Bao, Xioaqi; Badescu, Mircea; Bar-Cohen, Yoseph

    2008-01-01

    Future NASA missions are increasingly seeking to use actuators for precision positioning to accuracies of the order of fractions of a nanometer. For this purpose, multilayer piezoelectric stacks are being considered as actuators for driving these precision mechanisms. In this study, sets of commercial PZT stacks were tested in various AC and DC conditions at both nominal and extreme temperatures and voltages. AC signal testing included impedance, capacitance and dielectric loss factor of each actuator as a function of the small-signal driving sinusoidal frequency, and the ambient temperature. DC signal testing includes leakage current and displacement as a function of the applied DC voltage. The applied DC voltage was increased to over eight times the manufacturers' specifications to investigate the correlation between leakage current and breakdown voltage. Resonance characterization as a function of temperature was done over a temperature range of -180C to +200C which generally exceeded the manufacturers' specifications. In order to study the lifetime performance of these stacks, five actuators from one manufacturer were driven by a 60volt, 2 kHz sine-wave for ten billion cycles. The tests were performed using a Lab-View controlled automated data acquisition system that monitored the waveform of the stack electrical current and voltage. The measurements included the displacement, impedance, capacitance and leakage current and the analysis of the experimental results will be presented.

  7. Explosive micro-bubble actuator

    NARCIS (Netherlands)

    van den Broek, D.M.

    2008-01-01

    Microactuators are key components in numerous microsystems, and in many applications strong and fast microactuators are required. The principles used to generate forces in the current actuators are not capable of fulfilling both requirements at the same time, so new principles have to be

  8. Compliant actuation of rehabilitation robots

    NARCIS (Netherlands)

    Vallery, Heike; Veneman, J.F.; van Asseldonk, Edwin H.F.; Ekkelenkamp, R.; Buss, Martin; van der Kooij, Herman

    2008-01-01

    This article discusses the pros and cons of compliant actuation for rehabilitation robots on the example of LOPES, focusing on the cons. After illustrating the bandwidth limitations, a new result has been derived: if stability in terms of passivity of the haptic device is desired, the renderable

  9. Design of a new electrode array for cochlear implants

    International Nuclear Information System (INIS)

    Kha, H.; Chen, B.

    2010-01-01

    Full text: This study aims to design a new electrode array which can be precisely located beneath the basilar membrane within the cochlear scala tympani. This placement of the electrode array is beneficial for increasing the effectiveness of the electrical stimulation of the audi tory nerves and maximising the growth factors delivered into the cochlea for regenerating the progressively lost auditory neurons, thereby significantly improving performance of the cochlear implant systems. Methods The design process involved two steps. First, the biocom patible nitinol-based shape memory alloy, of which mechanical deformation can be controlled using electrical cUTents/fields act vated by body temperature, was selected. Second, five different designs of the electrode array with embedded nitinol actuators were studied (Table I). The finite element method was employed to predict final positions of these electrode arrays. Results The electrode array with three 6 mm actuators at 2-8, 8-J4 and 14-20 mm from the tip (Fig. I) was found to be located most closely to the basilar membrane, compared with those in the other four cases. Conclusions A new nitinol cochlear implant electrode array with three embedded nitinol actuators has been designed. This electrode array is expected to be located beneath the basilar membrane for maximising the delivery of growth factors. Future research will involve the manufacturing of a prototype of this electrode array for use in insertion experiments and neurotrophin release tests.

  10. Simple and Accurate Analytical Solutions of the Electrostatically Actuated Curled Beam Problem

    KAUST Repository

    Younis, Mohammad I.

    2014-08-17

    We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data in the literature and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximations they are based on. In such cases, multi-mode reduced order models need to be utilized.

  11. A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

    KAUST Repository

    Bouchaala, Adam M.

    2015-01-01

    We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

  12. Dynamic response of an electrostatically actuated microbeam to drop-table test

    International Nuclear Information System (INIS)

    Ouakad, Hassen M; Younis, Mohammad I; Alsaleem, Fadi

    2012-01-01

    In this paper, we present a theoretical and experimental investigation into the dynamic response of an electrostatically actuated microbeam when subjected to drop-table test. For the theoretical part, a reduced-order model based on an Euler–Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and the shock pulse of the drop-table test. Simulation results are presented showing the combined effect of electrostatic force and mechanical shock in triggering early pull-in instability of the cantilever microbeams. The analytical simulation results are validated by finite-element results for the static response. Dynamic pull-in threshold as a function of the mechanical shock amplitude is shown over a wide range of shock spanning hundreds of thousands of g up to zero g. For the experimental part, a micromachined cantilever beam made of gold of length 50 µm is subjected to drop-table tests while being biased by electrostatic loads. Several experimental data are shown demonstrating the phenomenon of collapse due to the combined shock and electrostatic forces. It is also demonstrated that by biasing short and too stiff microbeams with electrostatic voltages, their stiffness is weakened. This lowers their threshold of collapse considerably to the range of acceleration that enables testing them with in-house shock testing equipments, such as drop-table tests. (paper)

  13. Actuation mechanisms of carbon nanotube-based architectures

    Science.gov (United States)

    Geier, Sebastian; Mahrholz, Thorsten; Wierach, Peter; Sinapius, Michael

    2016-04-01

    State of the art smart materials such as piezo ceramics or electroactive polymers cannot feature both, mechanical stiffness and high active strain. Moreover, properties like low density, high mechanical stiffness and high strain at the same time driven by low energy play an increasingly important role for their future application. Carbon nanotubes (CNT), show this behavior. Their active behavior was observed 1999 the first time using paper-like mats made of CNT. Therefore the CNT-papers are electrical charged within an electrolyte thus forming a double- layer. The measured deflection of CNT material is based on the interaction between the charged high surface area formed by carbon nanotubes and ions provided by the electrolyte. Although CNT-papers have been extensively analyzed as well at the macro-scale as nano-scale there is still no generally accepted theory for the actuation mechanism. This paper focuses on investigations of the actuation mechanisms of CNT-papers in comparison to vertically aligned CNT-arrays. One reason of divergent results found in literature might be attributed to different types of CNT samples. While CNT-papers represent architectures of short CNTs which need to bridge each other to form the dimensions of the sample, the continuous CNTs of the array feature a length of almost 3 mm, along which the experiments are carried out. Both sample types are tested within an actuated tensile test set-up under different conditions. While the CNT-papers are tested in water-based electrolytes with comparably small redox-windows the hydrophobic CNT-arrays are tested in ionic liquids with comparatively larger redox-ranges. Furthermore an in-situ micro tensile test within an SEM is carried out to prove the optimized orientation of the MWCNTs as result of external load. It was found that the performance of CNT-papers strongly depends on the test conditions. However, the CNT-arrays are almost unaffected by the conditions showing active response at negative

  14. A bidirectional shape memory alloy folding actuator

    International Nuclear Information System (INIS)

    Paik, Jamie K; Wood, Robert J

    2012-01-01

    This paper presents a low-profile bidirectional folding actuator based on annealed shape memory alloy sheets applicable for meso- and microscale systems. Despite the advantages of shape memory alloys—high strain, silent operation, and mechanical simplicity—their application is often limited to unidirectional operation. We present a bidirectional folding actuator that produces two opposing 180° motions. A laser-patterned nickel alloy (Inconel 600) heater localizes actuation to the folding sections. The actuator has a thin ( < 1 mm) profile, making it appropriate for use in robotic origami. Various design parameters and fabrication variants are described and experimentally explored in the actuator prototype. (paper)

  15. Reliable actuators for twin rotor MIMO system

    Science.gov (United States)

    Rao, Vidya S.; V. I, George; Kamath, Surekha; Shreesha, C.

    2017-11-01

    Twin Rotor MIMO System (TRMS) is a bench mark system to test flight control algorithms. One of the perturbations on TRMS which is likely to affect the control system is actuator failure. Therefore, there is a need for a reliable control system, which includes H infinity controller along with redundant actuators. Reliable control refers to the design of a control system to tolerate failures of a certain set of actuators or sensors while retaining desired control system properties. Output of reliable controller has to be transferred to the redundant actuator effectively to make the TRMS reliable even under actual actuator failure.

  16. Array capabilities and future arrays

    International Nuclear Information System (INIS)

    Radford, D.

    1993-01-01

    Early results from the new third-generation instruments GAMMASPHERE and EUROGAM are confirming the expectation that such arrays will have a revolutionary effect on the field of high-spin nuclear structure. When completed, GAMMASHPERE will have a resolving power am order of magnitude greater that of the best second-generation arrays. When combined with other instruments such as particle-detector arrays and fragment mass analysers, the capabilites of the arrays for the study of more exotic nuclei will be further enhanced. In order to better understand the limitations of these instruments, and to design improved future detector systems, it is important to have some intelligible and reliable calculation for the relative resolving power of different instrument designs. The derivation of such a figure of merit will be briefly presented, and the relative sensitivities of arrays currently proposed or under construction presented. The design of TRIGAM, a new third-generation array proposed for Chalk River, will also be discussed. It is instructive to consider how far arrays of Compton-suppressed Ge detectors could be taken. For example, it will be shown that an idealised open-quote perfectclose quotes third-generation array of 1000 detectors has a sensitivity an order of magnitude higher again than that of GAMMASPHERE. Less conventional options for new arrays will also be explored

  17. A single nano cantilever as a reprogrammable universal logic gate

    KAUST Repository

    Chappanda, K. N.

    2017-02-24

    The current transistor-based computing circuits use multiple interconnected transistors to realize a single Boolean logic gate. This leads to higher power requirements and delayed computing. Transistors are not suitable for applications in harsh environments and require complicated thermal management systems due to excessive heat dissipation. Also, transistor circuits lack the ability to dynamically reconfigure their functionality in real time, which is desirable for enhanced computing capability. Further, the miniaturization of transistors to improve computational power is reaching its ultimate physical limits. As a step towards overcoming the limitations of transistor-based computing, here we demonstrate a reprogrammable universal Boolean logic gate based on a nanoelectromechanical cantilever (NC) oscillator. The fundamental XOR, AND, NOR, OR and NOT logic gates are condensed in a single NC, thereby reducing electrical interconnects between devices. The device is dynamically switchable between any logic gates at the same drive frequency without the need for any change in the circuit. It is demonstrated to operate at elevated temperatures minimizing the need for thermal management systems. It has a tunable bandwidth of 5 MHz enabling parallel and dynamically reconfigurable logic device for enhanced computing.

  18. Nonlinear Response of Cantilever Beams to Combination and Subcombination Resonances

    Directory of Open Access Journals (Sweden)

    Ali H. Nayfeh

    1998-01-01

    Full Text Available The nonlinear planar response of cantilever metallic beams to combination parametric and external subcombination resonances is investigated, taking into account the effects of cubic geometric and inertia nonlinearities. The beams considered here are assumed to have large length-to-width aspect ratios and thin rectangular cross sections. Hence, the effects of shear deformations and rotatory inertia are neglected. For the case of combination parametric resonance, a two-mode Galerkin discretization along with Hamilton’s extended principle is used to obtain two second-order nonlinear ordinary-differential equations of motion and associated boundary conditions. Then, the method of multiple scales is applied to obtain a set of four first-order nonlinear ordinary-differential equations governing the modulation of the amplitudes and phases of the two excited modes. For the case of subcombination resonance, the method of multiple scales is applied directly to the Lagrangian and virtual-work term. Then using Hamilton’s extended principle, we obtain a set of four first-order nonlinear ordinary-differential equations governing the amplitudes and phases of the two excited modes. In both cases, the modulation equations are used to generate frequency- and force-response curves. We found that the trivial solution exhibits a jump as it undergoes a subcritical pitchfork bifurcation. Similarly, the nontrivial solutions also exhibit jumps as they undergo saddle-node bifurcations.

  19. A single nano cantilever as a reprogrammable universal logic gate

    International Nuclear Information System (INIS)

    Chappanda, K N; Ilyas, S; Kazmi, S N R; Younis, M I; Holguin-Lerma, J; Batra, N M; Costa, P M F J

    2017-01-01

    The current transistor-based computing circuits use multiple interconnected transistors to realize a single Boolean logic gate. This leads to higher power requirements and delayed computing. Transistors are not suitable for applications in harsh environments and require complicated thermal management systems due to excessive heat dissipation. Also, transistor circuits lack the ability to dynamically reconfigure their functionality in real time, which is desirable for enhanced computing capability. Further, the miniaturization of transistors to improve computational power is reaching its ultimate physical limits. As a step towards overcoming the limitations of transistor-based computing, here we demonstrate a reprogrammable universal Boolean logic gate based on a nanoelectromechanical cantilever (NC) oscillator. The fundamental XOR, AND, NOR, OR and NOT logic gates are condensed in a single NC, thereby reducing electrical interconnects between devices. The device is dynamically switchable between any logic gates at the same drive frequency without the need for any change in the circuit. It is demonstrated to operate at elevated temperatures minimizing the need for thermal management systems. It has a tunable bandwidth of 5 MHz enabling parallel and dynamically reconfigurable logic device for enhanced computing. (paper)

  20. Deployment Methods for an Origami-Inspired Rigid-Foldable Array

    Science.gov (United States)

    Zirbel, Shannon A.; Trease, Brian P.; Magleby, Spencer P.; Howell, Larry L.

    2014-01-01

    The purpose of this work is to evaluate several deployment methods for an origami-inspired solar array at two size scales: 25-meter array and CubeSat array. The array enables rigid panel deployment and introduces new concepts for actuating CubeSat deployables. The design for the array was inspired by the origami flasher model (Lang, 1997; Shafer, 2001). Figure 1 shows the array prototyped from Garolite and Kapton film at the CubeSat scale. Prior work demonstrated that rigid panels like solar cells could successfully be folded into the final stowed configuration without requiring the panels to flex (Zirbel, Lang, Thomson, & al., 2013). The design of the array is novel and enables efficient use of space. The array can be wrapped around the central bus of the spacecraft in the case of the large array, or can accommodate storage of a small instrument payload in the case of the CubeSat array. The radial symmetry of this array around the spacecraft is ideally suited for spacecraft that need to spin. This work focuses on several actuation methods for a one-time deployment of the array. The array is launched in its stowed configuration and it will be deployed when it is in space. Concepts for both passive and active actuation were considered.

  1. Method for driving an actuator, actuator drive, and apparatus comprising an actuator

    NARCIS (Netherlands)

    2010-01-01

    An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a

  2. Analysis of hybrid electric/thermofluidic inputs for wet shape memory alloy actuators

    Science.gov (United States)

    Flemming, Leslie; Mascaro, Stephen

    2013-01-01

    A wet shape memory alloy (SMA) actuator is characterized by an SMA wire embedded within a compliant fluid-filled tube. Heating and cooling of the SMA wire produces a linear contraction and extension of the wire. Thermal energy can be transferred to and from the wire using combinations of resistive heating and free/forced convection. This paper analyzes the speed and efficiency of a simulated wet SMA actuator using a variety of control strategies involving different combinations of electrical and thermofluidic inputs. A computational fluid dynamics (CFD) model is used in conjunction with a temperature-strain model of the SMA wire to simulate the thermal response of the wire and compute strains, contraction/extension times and efficiency. The simulations produce cycle rates of up to 5 Hz for electrical heating and fluidic cooling, and up to 2 Hz for fluidic heating and cooling. The simulated results demonstrate efficiencies up to 0.5% for electric heating and up to 0.2% for fluidic heating. Using both electric and fluidic inputs concurrently improves the speed and efficiency of the actuator and allows for the actuator to remain contracted without continually delivering energy to the actuator, because of the thermal capacitance of the hot fluid. The characterized speeds and efficiencies are key requirements for implementing broader research efforts involving the intelligent control of electric and thermofluidic networks to optimize the speed and efficiency of wet actuator arrays.

  3. Experimental and spectroscopic study of flow actuation phenomena using DC discharge at a Mach 3 flow.

    Science.gov (United States)

    Shin, J.; Narayanaswamy, V.; Raja, L.; Clemens, N.

    2006-10-01

    A study of flow actuation phenomena of DC discharge will be presented. An array of pin-like electrodes is flush mounted on a co-planar ceramic actuator that is inserted in the test section. The different discharge structures -- diffuse, constricted, and mixed mode -- are observed in the presence of a flow. A discernable actuation, as visualized by schlieren imaging, is achieved by diffuse discharge, whereas the constricted discharge does not show detectable flow perturbation at the same current. The flow actuation in the form of an induced oblique shock occurs within one frame of laser schlieren imaging at 4.5 kHz. Rotational (gas) and vibrational temperatures are measured by fitting spectra of N2 and N2+ bands near 365-395 nm. Electronic temperatures are measured using Boltzmann plot of Fe (I) lines. Gas temperatures of diffuse discharges drop from ˜1500 K to ˜500 K in the presence of a flow while vibrational and electronic temperatures remain almost the same at ˜3000 K and ˜1.25 eV, respectively. Gas temperatures of constricted discharge are found to be similar with diffuse discharge whereas only diffuse discharge shows an actuation. An examination of spatial extent of the plasma reveals that the diffuse discharge occupies a larger region of the flow than the constricted discharge. This indicates that the flow actuation is dependent on flow dilatation which is governed by temperature rise as well as the spatial extent over which the temperature rise is observed.

  4. Piezoelectric multilayer actuator life test.

    Science.gov (United States)

    Sherrit, Stewart; Bao, Xiaoqi; Jones, Christopher M; Aldrich, Jack B; Blodget, Chad J; Moore, James D; Carson, John W; Goullioud, Renaud

    2011-04-01

    Potential NASA optical missions such as the Space Interferometer Mission require actuators for precision positioning to accuracies of the order of nanometers. Commercially available multilayer piezoelectric stack actuators are being considered for driving these precision mirror positioning mechanisms. These mechanisms have potential mission operational requirements that exceed 5 years for one mission life. To test the feasibility of using these commercial actuators for these applications and to determine their reliability and the redundancy requirements, a life test study was undertaken. The nominal actuator requirements for the most critical actuators on the Space Interferometry Mission (SIM) in terms of number of cycles was estimated from the Modulation Optics Mechanism (MOM) and Pathlength control Optics Mechanism (POM) and these requirements were used to define the study. At a nominal drive frequency of 250 Hz, one mission life is calculated to be 40 billion cycles. In this study, a set of commercial PZT stacks configured in a potential flight actuator configuration (pre-stressed to 18 MPa and bonded in flexures) were tested for up to 100 billion cycles. Each test flexure allowed for two sets of primary and redundant stacks to be mechanically connected in series. The tests were controlled using an automated software control and data acquisition system that set up the test parameters and monitored the waveform of the stack electrical current and voltage. The samples were driven between 0 and 20 V at 2000 Hz to accelerate the life test and mimic the voltage amplitude that is expected to be applied to the stacks during operation. During the life test, 10 primary stacks were driven and 10 redundant stacks, mechanically in series with the driven stacks, were open-circuited. The stroke determined from a strain gauge, the temperature and humidity in the chamber, and the temperature of each individual stack were recorded. Other properties of the stacks, including the

  5. SNP Arrays

    Directory of Open Access Journals (Sweden)

    Jari Louhelainen

    2016-10-01

    Full Text Available The papers published in this Special Issue “SNP arrays” (Single Nucleotide Polymorphism Arrays focus on several perspectives associated with arrays of this type. The range of papers vary from a case report to reviews, thereby targeting wider audiences working in this field. The research focus of SNP arrays is often human cancers but this Issue expands that focus to include areas such as rare conditions, animal breeding and bioinformatics tools. Given the limited scope, the spectrum of papers is nothing short of remarkable and even from a technical point of view these papers will contribute to the field at a general level. Three of the papers published in this Special Issue focus on the use of various SNP array approaches in the analysis of three different cancer types. Two of the papers concentrate on two very different rare conditions, applying the SNP arrays slightly differently. Finally, two other papers evaluate the use of the SNP arrays in the context of genetic analysis of livestock. The findings reported in these papers help to close gaps in the current literature and also to give guidelines for future applications of SNP arrays.

  6. Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

    Directory of Open Access Journals (Sweden)

    David Torres

    2017-04-01

    Full Text Available Given the multiple applications for micro-electro-mechanical system (MEMS mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools with experimental data and subsequently verifying with quasi-static and dynamic experiments.

  7. Simulation of actuated synthetic cilia expelling microorganisms from a surface

    Science.gov (United States)

    Shum, Henry; Tripathi, Anurag; Yeomans, Julia; Balazs, Anna

    2013-11-01

    The continual motion of cilia provides a defense against biofouling for a variety of marine organisms. Inspired by this natural solution, we perform numerical simulations to study the interactions between actuated, biomimetic cilia and model microswimmers that are hydrodynamically attracted to bare surfaces and therefore behave similarly to fouling organisms. The 3-dimensional fluid flow is coupled to the motion of the cilia and swimmers using an integrated lattice Boltzmann and immersed boundary method. We show that a sparse array of actuated cilia, through which the organisms are able to swim, is able to robustly expel swimmers. The average residence time of the swimmers in the ciliary layer is reduced if the motion of the cilia generates a net fluid flow, but for relatively fast swimmers, the steric interaction with the moving cilia alone is sufficient to ``knock'' the organisms away from the surface. As the demonstrated mechanisms for antifouling do not rely on specific chemical or physical properties of the surface or swimmer, actuated cilia can potentially protect microfluidic devices, filtration membranes or ship hulls from a wide range of fouling species.

  8. Integrated cantilever-based flow sensors with tunable sensitivity for in-line monitoring of flow fluctuations in microfluidic systems

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2014-01-01

    For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different...... is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external...

  9. Enhanced actuation performance of piezoelectric fiber composites induced by incorporated BaTiO3 nanoparticles in epoxy resin

    International Nuclear Information System (INIS)

    Wu, Mingliang; Yuan, Xi; Luo, Hang; Chen, Haiyan; Chen, Chao; Zhou, Kechao; Zhang, Dou

    2017-01-01

    Piezoelectric fiber composites (PFCs) have attracted much interest owing to their flexibility and toughness compared with conventional monolithic piezoceramic wafers. The free strain values and actuation property of PFCs strongly depend on the active electric field applied in Pb(Zr 1−x Ti x )O 3 (PZT) fibers. Reducing the dielectric constant mismatch between PZT fiber and the assembling epoxy resin would greatly increase the active electric field in PZT fiber. Therefore, BaTiO 3 (BT) nanoparticles were introduced into the epoxy resin to enhance the dielectric constant. Homogeneous dispersion of BT nanoparticles and tight adhesion with the epoxy resin were achieved through a surface modification by dopamine. The maximum dielectric constant of dopamine modified BT/epoxy (BT@Dop/epoxy) nanocomposites was 10.38 with 12 wt% BT@Dop content at 1 kHz. The maximum free strain of PFCs reached 1820 ppm with 6 wt% BT@Dop content, while PFCs assembled by pure epoxy showed 790 ppm at the same processing condition. The tip displacement of cantilever beam actuated by PFCs reached the peak of 19 mm at the resonance frequency with 6 wt% BT@Dop, which was improved by 90% comparing to PFCs with pure epoxy. - Highlights: • The effect of dielectric mismatch on effective electric field in piezoceramic fibers was explained by a model. • The dispersibility and adhesion of BaTiO 3 nanoparticles in epoxy was improved by the dopamine modification. • The actuation performance increased firstly and then decreased with adding BaTiO 3 nanoparticles. • The maximum free strain and displacement of cantilever beam were up to 1820 ppm and 19 mm, respectively.

  10. Enhanced actuation performance of piezoelectric fiber composites induced by incorporated BaTiO{sub 3} nanoparticles in epoxy resin

    Energy Technology Data Exchange (ETDEWEB)

    Wu, Mingliang; Yuan, Xi [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); Luo, Hang, E-mail: xtluohang@163.com [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); College of Chemistry and Chemical Engineering, Central South University, Changsha, Hunan 410083 (China); Chen, Haiyan; Chen, Chao; Zhou, Kechao [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); Zhang, Dou, E-mail: dzhang@csu.edu.cn [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China)

    2017-05-18

    Piezoelectric fiber composites (PFCs) have attracted much interest owing to their flexibility and toughness compared with conventional monolithic piezoceramic wafers. The free strain values and actuation property of PFCs strongly depend on the active electric field applied in Pb(Zr{sub 1−x}Ti{sub x})O{sub 3} (PZT) fibers. Reducing the dielectric constant mismatch between PZT fiber and the assembling epoxy resin would greatly increase the active electric field in PZT fiber. Therefore, BaTiO{sub 3} (BT) nanoparticles were introduced into the epoxy resin to enhance the dielectric constant. Homogeneous dispersion of BT nanoparticles and tight adhesion with the epoxy resin were achieved through a surface modification by dopamine. The maximum dielectric constant of dopamine modified BT/epoxy (BT@Dop/epoxy) nanocomposites was 10.38 with 12 wt% BT@Dop content at 1 kHz. The maximum free strain of PFCs reached 1820 ppm with 6 wt% BT@Dop content, while PFCs assembled by pure epoxy showed 790 ppm at the same processing condition. The tip displacement of cantilever beam actuated by PFCs reached the peak of 19 mm at the resonance frequency with 6 wt% BT@Dop, which was improved by 90% comparing to PFCs with pure epoxy. - Highlights: • The effect of dielectric mismatch on effective electric field in piezoceramic fibers was explained by a model. • The dispersibility and adhesion of BaTiO{sub 3} nanoparticles in epoxy was improved by the dopamine modification. • The actuation performance increased firstly and then decreased with adding BaTiO{sub 3} nanoparticles. • The maximum free strain and displacement of cantilever beam were up to 1820 ppm and 19 mm, respectively.

  11. Hydraulically amplified PZT mems actuator

    Science.gov (United States)

    Miles, Robin R.

    2004-11-02

    A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.

  12. Micromirror Arrays for Adaptive Optics; TOPICAL

    International Nuclear Information System (INIS)

    Carr, E.J.

    2000-01-01

    The long-range goal of this project is to develop the optical and mechanical design of a micromirror array for adaptive optics that will meet the following criteria: flat mirror surface ((lambda)/20), high fill factor ( and gt; 95%), large stroke (5-10(micro)m), and pixel size(approx)-200(micro)m. This will be accomplished by optimizing the mirror surface and actuators independently and then combining them using bonding technologies that are currently being developed

  13. Design of Autonomous Gel Actuators

    Directory of Open Access Journals (Sweden)

    Shuji Hashimoto

    2011-01-01

    Full Text Available In this paper, we introduce autonomous gel actuators driven by chemical energy. The polymer gels prepared here have cyclic chemical reaction networks. With a cyclic reaction, the polymer gels generate periodical motion. The periodic motion of the gel is produced by the chemical energy of the oscillatory Belouzov-Zhabotinsky (BZ reaction. We have succeeded in making synthetic polymer gel move autonomously like a living organism. This experimental fact represents the great possibility of the chemical robot.

  14. Electrical actuators applications and performance

    CERN Document Server

    De Fornel, Bernard

    2013-01-01

    This helpful resource covers a large range of information regarding electrical actuators. In particular, robustness, a very problematic issue, is fully explored in a dedicated chapter. The text also deals with he estimate of non-measurable mechanical variables by examining the estimate of load moment, then observation of the positioning of a command without mechanical sensor. Finally, it examines the conditions needed to measure variables and real implementation of numerical algorithms. This is a key working resource for electrical engineers.

  15. electrode array

    African Journals Online (AJOL)

    PROF EKWUEME

    A geoelectric investigation employing vertical electrical soundings (VES) using the Ajayi - Makinde Two-Electrode array and the ... arrangements used in electrical D.C. resistivity survey. These include ..... Refraction Tomography to Study the.

  16. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  17. Next-Generation Microshutter Arrays for Large-Format Imaging and Spectroscopy

    Science.gov (United States)

    Moseley, Samuel; Kutyrev, Alexander; Brown, Ari; Li, Mary

    2012-01-01

    A next-generation microshutter array, LArge Microshutter Array (LAMA), was developed as a multi-object field selector. LAMA consists of small-scaled microshutter arrays that can be combined to form large-scale microshutter array mosaics. Microshutter actuation is accomplished via electrostatic attraction between the shutter and a counter electrode, and 2D addressing can be accomplished by applying an electrostatic potential between a row of shutters and a column, orthogonal to the row, of counter electrodes. Microelectromechanical system (MEMS) technology is used to fabricate the microshutter arrays. The main feature of the microshutter device is to use a set of standard surface micromachining processes for device fabrication. Electrostatic actuation is used to eliminate the need for macromechanical magnet actuating components. A simplified electrostatic actuation with no macro components (e.g. moving magnets) required for actuation and latching of the shutters will make the microshutter arrays robust and less prone to mechanical failure. Smaller-size individual arrays will help to increase the yield and thus reduce the cost and improve robustness of the fabrication process. Reducing the size of the individual shutter array to about one square inch and building the large-scale mosaics by tiling these smaller-size arrays would further help to reduce the cost of the device due to the higher yield of smaller devices. The LAMA development is based on prior experience acquired while developing microshutter arrays for the James Webb Space Telescope (JWST), but it will have different features. The LAMA modular design permits large-format mosaicking to cover a field of view at least 50 times larger than JWST MSA. The LAMA electrostatic, instead of magnetic, actuation enables operation cycles at least 100 times faster and a mass significantly smaller compared to JWST MSA. Also, standard surface micromachining technology will simplify the fabrication process, increasing

  18. Experimental/analytical determination of optimal piezoelectric actuator locations on complex structures based on the actuator power factor

    OpenAIRE

    Bhargava, Adesh

    1995-01-01

    The actuator power factor is defined as the ratio of the total dissipative mechanical power of a PZT actuator to the total supplied electrical power to the PZT actuator. If measured experimentally, it can be used to optinlize the actuator location and configuration for complex structures. The concept of actuator power factor is based on the ability of an integrated induced strain actuator such as a PZT actuator to transfer supplied electrical energy into structural mechanical energy. For a gi...

  19. MicroCantilever (MC) based nanomechanical sensor for detection of molecular interactions

    Energy Technology Data Exchange (ETDEWEB)

    Kang, Kyung [Iowa State Univ., Ames, IA (United States)

    2011-01-01

    Specific aims of this study are to investigate the mechanism governing surface stress generation associated with chemical or molecular binding on functionalized microcantilevers. Formation of affinity complexes on cantilever surfaces leads to charge redistribution, configurational change and steric hindrance between neighboring molecules resulting in surface stress change and measureable cantilever deformation. A novel interferometry technique employing two adjacent micromachined cantilevers (a sensing/reference pair) was utilized to measure the cantilever deformation. The sensing principle is that binding/reaction of specific chemical or biological species on the sensing cantilever transduces to mechanical deformation. The differential bending of the sensing cantilever respect to the reference cantilever ensures that measured response is insensitive to environmental disturbances. As a proof of principle for the measurement technique, surface stress changes associated with: self-assembly of alkanethiol, hybridization of ssDNA, and the formation of cocaine-aptamer complexes were measured. Dissociation constant (Kd) for each molecular reaction was utilized to estimate the surface coverage of affinity complexes. In the cases of DNA hybridization and cocaine-aptamer binding, measured surface stress was found to be dependent on the surface coverage of the affinity complexes. In order to achieve a better sensitivity for DNA hybridization, immobilization of receptor molecules was modified to enhance the deformation of underlying surface. Single-stranded DNA (ssDNA) strands with thiol-modification on both 3-foot and 5-foot ends were immobilized on the gold surface such that both ends are attached to the gold surface. Immobilization condition was controlled to obtain similar receptor density as single-thiolated DNA strands. Hybridization of double-thiolated DNA strands leads to an almost two orders of magnitude increase in cantilever deformation. In both DNA

  20. An AlN cantilever for a wake-up switch triggered by air pressure change

    International Nuclear Information System (INIS)

    Kaiho, Y; Itoh, T; Maeda, R; Takahashi, H; Matsumoto, K; Shimoyama, I; Tomimatsu, Y; Kobayashi, T

    2013-01-01

    This research reports an AlN cantilever with an air chamber for a wake-up switch triggered by air pressure change. The proposed sensor is designed to fulfil both high sensitivity and low power consumption. By combining an air chamber to the one side of the AlN cantilever surface, the barometric pressure change generates a piezoelectric voltage. Thus, a wake-up switch triggered by air pressure change can be achieved using an AlN cantilever. The size of the fabricated AlN cantilever was 2000 μm × 1000 μm × 2 μm. The sensitivity to static differential pressure was 11.5 mV/Pa at the range of −20 Pa to 20 Pa. We evaluated the response of the sensor, which was composed of the AlN cantilever and the chamber of 60 ml in volume, when air pressure change was applied. The output voltage increased with increasing the applied air pressure change. It was observed that the maximum output voltage of 50 mV was generated when the air pressure change was 13 Pa

  1. Performance Analysis of Wind-Induced Piezoelectric Vibration Bimorph Cantilever for Rotating Machinery

    Directory of Open Access Journals (Sweden)

    Gongbo Zhou

    2015-01-01

    Full Text Available Harvesting the energy contained in the running environment of rotating machinery would be a good way to supplement energy to the wireless sensor. In this paper, we take piezoelectric bimorph cantilever beam with parallel connection mode as energy collector and analyze the factors which can influence the generation performance. First, a modal response theory model is built. Second, the static analysis, modal analysis, and piezoelectric harmonic response analysis of the wind-induced piezoelectric bimorph cantilever beam are given in detail. Finally, an experiment is also conducted. The results show that wind-induced piezoelectric bimorph cantilever beam has low resonant frequency and stable output under the first modal mode and can achieve the maximum output voltage under the resonant condition. The output voltage increases with the increase of the length and width of wind-induced piezoelectric bimorph cantilever beam, but the latter increasing amplitude is relatively smaller. In addition, the output voltage decreases with the increase of the thickness and the ratio of metal substrate to piezoelectric patches thickness. The experiment showed that the voltage amplitude generated by the piezoelectric bimorph cantilever beam can reach the value simulated in ANSYS, which is suitable for actual working conditions.

  2. Numerical investigation of band gaps in 3D printed cantilever-in-mass metamaterials

    Science.gov (United States)

    Qureshi, Awais; Li, Bing; Tan, K. T.

    2016-06-01

    In this research, the negative effective mass behavior of elastic/mechanical metamaterials is exhibited by a cantilever-in-mass structure as a proposed design for creating frequency stopping band gaps, based on local resonance of the internal structure. The mass-in-mass unit cell model is transformed into a cantilever-in-mass model using the Bernoulli-Euler beam theory. An analytical model of the cantilever-in-mass structure is derived and the effects of geometrical dimensions and material parameters to create frequency band gaps are examined. A two-dimensional finite element model is created to validate the analytical results, and excellent agreement is achieved. The analytical model establishes an easily tunable metamaterial design to realize wave attenuation based on locally resonant frequency. To demonstrate feasibility for 3D printing, the analytical model is employed to design and fabricate 3D printable mechanical metamaterial. A three-dimensional numerical experiment is performed using COMSOL Multiphysics to validate the wave attenuation performance. Results show that the cantilever-in-mass metamaterial is capable of mitigating stress waves at the desired resonance frequency. Our study successfully presents the use of one constituent material to create a 3D printed cantilever-in-mass metamaterial with negative effective mass density for stress wave mitigation purposes.

  3. Research on fiber-optic cantilever-enhanced photoacoustic spectroscopy for trace gas detection

    Science.gov (United States)

    Chen, Ke; Zhou, Xinlei; Gong, Zhenfeng; Yu, Shaochen; Qu, Chao; Guo, Min; Yu, Qingxu

    2018-01-01

    We demonstrate a new scheme of cantilever-enhanced photoacoustic spectroscopy, combining a sensitivity-improved fiber-optic cantilever acoustic sensor with a tunable high-power fiber laser, for trace gas detection. The Fabry-Perot interferometer based cantilever acoustic sensor has advantages such as high sensitivity, small size, easy to install and immune to electromagnetic. Tunable erbium-doped fiber ring laser with an erbium-doped fiber amplifier is used as the light source for acoustic excitation. In order to improve the sensitivity for photoacoustic signal detection, a first-order longitudinal resonant photoacoustic cell with the resonant frequency of 1624 Hz and a large size cantilever with the first resonant frequency of 1687 Hz are designed. The size of the cantilever is 2.1 mm×1 mm, and the thickness is 10 μm. With the wavelength modulation spectrum and second-harmonic detection methods, trace ammonia (NH3) has been measured. The gas detection limits (signal-to-noise ratio = 1) near the wavelength of 1522.5 nm is achieved to be 3 ppb.

  4. Cantilever contribution to the total electrostatic force measured with the atomic force microscope

    International Nuclear Information System (INIS)

    Guriyanova, Svetlana; Golovko, Dmytro S; Bonaccurso, Elmar

    2010-01-01

    The atomic force microscope (AFM) is a powerful tool for surface imaging at the nanometer scale and surface force measurements in the piconewton range. Among long-range surface forces, the electrostatic forces play a predominant role. They originate if the electric potentials of the substrate and of the tip of the AFM cantilever are different. A quantitative interpretation of the AFM signal is often difficult because it depends in a complicated fashion on the cantilever–tip–surface geometry. Since the electrostatic interaction is a long-range interaction, the cantilever, which is many microns from the surface, contributes to the total electrostatic force along with the tip. Here we present results of the electrostatic interaction between a conducting flat surface and horizontal or tilted cantilevers, with and without tips, at various distances from the surface. As addressed in a previous work, we show that the contribution of the cantilever to the overall force cannot be neglected. Based on a predictive model and on 3D confocal measurements, we discuss the influence of the tilting angle of the cantilever

  5. Slit Tubes for Semisoft Pneumatic Actuators.

    Science.gov (United States)

    Belding, Lee; Baytekin, Bilge; Baytekin, Hasan Tarik; Rothemund, Philipp; Verma, Mohit S; Nemiroski, Alex; Sameoto, Dan; Grzybowski, Bartosz A; Whitesides, George M

    2018-03-01

    This article describes a new principle for designing soft or 'semisoft' pneumatic actuators: SLiT (for SLit-in-Tube) actuators. Inflating an elastomeric balloon, when enclosed by an external shell (a material with higher Young's modulus) containing slits of different directions and lengths, produces a variety of motions, including bending, twisting, contraction, and elongation. The requisite pressure for actuation depends on the length of the slits, and this dependence allows sequential actuation by controlling the applied pressure. Different actuators can also be controlled using external "sliders" that act as reprogrammable "on-off" switches. A pneumatic arm and a walker constructed from SLiT actuators demonstrate their ease of fabrication and the range of motions they can achieve. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  6. Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers

    International Nuclear Information System (INIS)

    Yang, Chenye; Liu, Sanwei; Livermore, Carol; Xie, Xin

    2016-01-01

    The design, analytical modelling, finite element analysis (FEA), and experimental characterization of a microelectromechanical system (MEMS) out-of-plane (vertical) translational piezoelectric lead–zirconate–titanate (PZT) bimorph actuator supported on Archimedes’ spiral tethers are presented. Three types of bimorph actuators with different electrode patterns (with spiral tethers half actuated, fully actuated with uniform polarity, or fully actuated with reversed polarity) are designed and modelled. The two actuators with the highest predicted performance (half actuated and fully actuated with uniform polarity) are implemented and characterized. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. Analytical modelling and FEA are used to analyze and predict the actuators’ displacements and blocking forces. Experimental measurements of the deflections and blocking forces of actuators with full uniform actuation and half actuation validate the design. At an applied voltage of 110 V, the out-of-plane deflections of the actuators with half actuation and full uniform actuation are measured at about 17 µ m and 29 µ m respectively, in good agreement with analytical predictions of 17.3 µ m and 34.2 µ m and FEA predictions of 17.1 µ m and 25.8 µ m. The blocking force for devices with half-actuated tethers is predicted to be 12 mN (analytical) and 10 mN (FEA), close to the experimental value of 9 mN. The blocking force for devices with full uniform actuation is predicted to be 23 mN (analytical) and 17 mN (FEA), as compared with 15 mN in experiments. (paper)

  7. Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

    Science.gov (United States)

    Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

    2018-04-01

    This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

  8. Design optimization of piezoresistive cantilevers for force sensing in air and water

    Science.gov (United States)

    Doll, Joseph C.; Park, Sung-Jin; Pruitt, Beth L.

    2009-01-01

    Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrated noise over the bandwidth of interest. Existing analytical design methods are insufficient for modeling complex dopant profiles, design constraints, and nonlinear phenomena such as damping in fluid. Here we present an optimization method based on an analytical piezoresistive cantilever model. We use an existing iterative optimizer to minimimize a performance goal, such as minimum detectable force. The design tool is available as open source software. Optimal cantilever design and performance are found to strongly depend on the measurement bandwidth and the constraints applied. We discuss results for silicon piezoresistors fabricated by epitaxy and diffusion, but the method can be applied to any dopant profile or material which can be modeled in a similar fashion or extended to other microelectromechanical systems. PMID:19865512

  9. Cantilever-based bio-chemical sensor integrated in a microliquid handling system

    DEFF Research Database (Denmark)

    Thaysen, Jacob; Marie, Rodolphe; Boisen, Anja

    2001-01-01

    The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication...... based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been...... monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system....

  10. High-speed imaging upgrade for a standard sample scanning atomic force microscope using small cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Adams, Jonathan D.; Nievergelt, Adrian; Erickson, Blake W.; Yang, Chen; Dukic, Maja; Fantner, Georg E., E-mail: georg.fantner@epfl.ch [Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)

    2014-09-15

    We present an atomic force microscope (AFM) head for optical beam deflection on small cantilevers. Our AFM head is designed to be small in size, easily integrated into a commercial AFM system, and has a modular architecture facilitating exchange of the optical and electronic assemblies. We present two different designs for both the optical beam deflection and the electronic readout systems, and evaluate their performance. Using small cantilevers with our AFM head on an otherwise unmodified commercial AFM system, we are able to take tapping mode images approximately 5–10 times faster compared to the same AFM system using large cantilevers. By using additional scanner turnaround resonance compensation and a controller designed for high-speed AFM imaging, we show tapping mode imaging of lipid bilayers at line scan rates of 100–500 Hz for scan areas of several micrometers in size.

  11. Influence of tip mass on dynamic behavior of cracked cantilever pipe conveying fluid with moving mass

    International Nuclear Information System (INIS)

    Yoon, Han Ik; Son, In Soo

    2005-01-01

    In this paper, we studied about the effect of the open crack and a tip mass on the dynamic behavior of a cantilever pipe conveying fluid with a moving mass. The equation of motion is derived by using Lagrange's equation and analyzed by numerical method. The cantilever pipe is modelled by the Euler-Bernoulli beam theory. The crack section is represented by a local flexibility matrix connecting two undamaged pipe segments. The influences of the crack, the moving mass, the tip mass and its moment of inertia, the velocity of fluid, and the coupling of these factors on the vibration mode, the frequency, and the tip-displacement of the cantilever pipe are analytically clarified

  12. Vibrational fatigue failures in short cantilevered piping with socket-welding fittings

    International Nuclear Information System (INIS)

    Smith, J.K.

    1996-01-01

    Approximately 80% of the vibrational fatigue failures in nuclear power plants have been caused by high cycle vibrational fatigue. Many of these failures have occurred in short, small bore (2 in. nominal diameter and smaller), unbraced, cantilevered piping with socket-welding fittings. The fatigue failures initiated in the socket welds. These failures have been unexpected, and have caused costly, unscheduled outages in some cases. In order to reduce the number of vibrational fatigue failures in these short cantilevered pipes, an acceleration based vibrational fatigue screening criteria was developed under Electric Power Research Institute (EPRI) sponsorship. In this paper, the acceleration based criteria will be compared to the results obtained from detailed dynamic modeling of a short, cantilevered pipe

  13. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

    Directory of Open Access Journals (Sweden)

    Jian Yang

    2018-02-01

    Full Text Available A novel design of piezoelectric aluminum nitride (AlN-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.

  14. Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers

    International Nuclear Information System (INIS)

    Fu, Y Q; Milne, S B; Luo, J K; Flewitt, A J; Wang, L; Miao, J M; Milne, W I

    2006-01-01

    A variable RF capacitor with a-Si:H (doped with phosphine) cantilevers as the top electrode were designed and fabricated. Because the top multi-cantilever electrodes have different lengths, increasing the applied voltage pulled down the cantilever beams sequentially, thus realizing a gradual increase of the capacitance with the applied voltage. A high-k material, H f O 2 , was used as an insulating layer to increase the tuning range of the capacitance. The measured capacitance from the fabricated capacitor was much lower and the pull-in voltage was much higher than those from theoretical analysis because of incomplete contact of the two electrodes, existence of film differential stresses and charge injection effect. Increase of sweeping voltage rate could significantly shift the pull-in voltage to higher values due to the charge injection mechanisms

  15. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    DEFF Research Database (Denmark)

    Keller, Stephan Urs; Haefliger, D.; Boisen, Anja

    2010-01-01

    SU-8 cantilevers with a thickness of 2 mu m were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel......, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after...... development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T-PEB = 50 degrees C followed by a hard...

  16. A DVD-ROM based high-throughput cantilever sensing platform

    DEFF Research Database (Denmark)

    Bosco, Filippo

    and October 2011. The project was part of the Xsense research network, funded by the Strategic Danish Research Council, and supervised by Prof. Anja Boisen. The goal of the Xsense project is to design and fabricate a compact and cheap device for explosive sensing in air and liquid. Four different technologies...... of a high-throughput label-free sensor platform utilizing cantilever based sensors. These sensors have often been acclaimed to facilitate highly parallelized operation. Unfortunately, so far no concept has been presented which offers large data sets as well as easy liquid sample handling. We use optics...... and mechanics from a DVD player to handle liquid samples and to read-out cantilever deflection and resonant frequency. In a few minutes, several liquid samples can be analyzed in parallel, measuring over several hundreds of individual cantilevers. Three generations of systems have been developed and tested...

  17. Engineered Muscle Actuators: Cells and Tissues

    National Research Council Canada - National Science Library

    Dennis, Robert G; Herr, Hugh; Parker, Kevin K; Larkin, Lisa; Arruda, Ellen; Baar, Keith

    2007-01-01

    .... Our primary objectives were to engineer living skeletal muscle actuators in culture using integrated bioreactors to guide tissue development and to maintain tissue contractility, to achieve 50...

  18. Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

    Directory of Open Access Journals (Sweden)

    Hing Wah LEE

    2009-03-01

    Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

  19. Supinator Extender (SUE): a pneumatically actuated robot for forearm/wrist rehabilitation after stroke.

    Science.gov (United States)

    Allington, James; Spencer, Steven J; Klein, Julius; Buell, Meghan; Reinkensmeyer, David J; Bobrow, James

    2011-01-01

    The robot described in this paper, SUE (Supinator Extender), adds forearm/wrist rehabilitation functionality to the UCI BONES exoskeleton robot and to the ArmeoSpring rehabilitation device. SUE is a 2-DOF serial chain that can measure and assist forearm supination-pronation and wrist flexion-extension. The large power to weight ratio of pneumatic actuators allows SUE to achieve the forces needed for rehabilitation therapy while remaining lightweight enough to be carried by BONES and ArmeoSpring. Each degree of freedom has a range of 90 degrees, and a nominal torque of 2 ft-lbs. The cylinders are mounted away from the patient's body on the lateral aspect of the arm. This is to prevent the danger of a collision and maximize the workspace of the arm robot. The rotation axis used for supination-pronation is a small bearing just below the subject's wrist. The flexion-extension motion is actuated by a cantilevered pneumatic cylinder, which allows the palm of the hand to remain open. Data are presented that demonstrate the ability of SUE to measure and cancel forearm/wrist passive tone, thereby extending the active range of motion for people with stroke.

  20. Improving the Performance of Electrically Activated NiTi Shape Memory Actuators by Pre-Aging

    Science.gov (United States)

    Rathmann1, Christian; Fleczok1, Benjamin; Otibar1, Dennis; Kuhlenkötter, Bernd

    2017-06-01

    Shape memory alloys possess an array of unique functional properties which are influenced by a complex interaction of different factors. Due to thermal sensitivity, slight changes in temperature may cause the properties to change significantly. This poses a huge challenge especially for the use of shape memory alloys as actuators. The displacement is the key performance indicator, which has to be of equal or better quality compared to conventional actuators. One problem of shape memory alloys is the change in functional fatigue in the first cycles, which makes it rather difficult to design the actuator. Therefore, the reduction of this shakedown effect is crucial. For this reason, this paper investigates the effect of electrical heat treatment as a method for pre-aging. This topic has so far been little investigated so that the investigations focus on identifying important factors and effects by using the design of experiments.