Proton beam micromachining on strippable aqueous base developable negative resist

International Nuclear Information System (INIS)

Rajta, I.; Uzonyi, I.; Baradacs, E.; Chatzichristidi, M.; Raptis, I.; Valamontes, E.S.

2004-01-01

Complete text of publication follows. Proton Beam Micromachining (PBM, also known as P-beam writing), a novel direct- write process for the production of 3D microstructures, can be used to make multilevel structures in a single layer of resist by varying the ion energy. The interaction between the bombarding ions and the target material is mainly ionization, and very few ions suffer high angle nuclear collisions, therefore structures made with PBM have smooth near vertical side walls. The most commony applied resists in PBM are the positive, conventional, polymethyl methacrylate (PMMA); and the negative, chemically amplified, SU-8 (Micro Chem Corp). SU-8 is an epoxy based resist suitable also for LIGA and UV-LIGA processes, it offers good sensitivity, good process latitude, very high aspect ratio and therefore it dominates in the high aspect ratio micromachining applications. SU-8 requires 30 nC/mm 2 fluence for PBM irradiations at 2 MeV protons. Its crosslinking chemistry is based on the eight epoxy rings in the polymer chain, which provide a very dense three dimensional network in the presence of suitably activated photo acid generators (PAGs) which is very difficult to be stripped away after development. Thus, stripping has to be assisted with plasma processes or with special liquid removers. Moreover, the SU-8 developer is organic, propylene glycol methyl ether acetate (PGMEA), and thus environmentally non-friendly. To overcome the SU-8 stripping limitations, design of a negative resist system where solubility change is not based solely on cross- linking but also on the differentiation of hydrophilicity between exposed and non-exposed areas is desirable. A new resist formulation, fulfilling the above specifications has been developed recently [1]. This formulation is based on a specific grade epoxy novolac (EP) polymer, a partially hydrogenated poly-4-hydroxy styrene (PHS) polymer, and an onium salt as photoacid generator (PAG), and has been successfully

Micromachining with copper lasers

Science.gov (United States)

Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

1997-04-01

In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

Resist materials for proton micromachining

International Nuclear Information System (INIS)

Kan, J.A. van; Sanchez, J.L.; Xu, B.; Osipowicz, T.; Watt, F.

1999-01-01

The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

Mechanical characterization of biocompatible thin film materials by scanning along micro-machined cantilevers for micro-/nano-system

International Nuclear Information System (INIS)

He, J.H.; Luo, J.K.; Le, H.R.; Moore, D.F.

2006-01-01

Mechanical characterization is vital for the design of micro-/nano-electro-mechanical system (MEMS/NEMS). This paper describes a new characterization method to extract the mechanical properties of the thin film materials, which is simple, inexpensive and applicable to a wide range of materials including biocompatible ones described in this paper. The beams of the material under tests, are patterned by laser micro-machining and released by alkaline etch. A surface profilometer is used to scan along micro-machined cantilevers and produce a bending profile, from which the Young's modulus can be extracted. Biocompatible SiN x , SiC and nanocrystal diamond cantilevers have been fabricated and their Young's modulus has been evaluated as 154 ± 12, 360 ± 50 and 504 ± 50 GPa, respectively, which is consistent with those measured by nano-indentation. Residual stress gradient has also been extracted by surface profilometer, which is comparable with the results inferred from ZYGO interferometer measurements. This method can be extended to atomic force microscopy stylus or nanometer-stylus profilometer for Bio-NEMS mechanical characterization

Direct writing of microtunnels using proton beam micromachining

International Nuclear Information System (INIS)

Marot, Laurent; Munnik, Frans; Mikhailov, Serguei

2006-01-01

The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

Apparatus for precision micromachining with lasers

Science.gov (United States)

Chang, J.J.; Dragon, E.P.; Warner, B.E.

1998-04-28

A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

A novel micromachined shadow mask system with self-alignment and gap control capability

International Nuclear Information System (INIS)

Hong, Jung Moo; Zou Jun

2008-01-01

We present a novel micromachined shadow mask system, which is capable of accurate self-alignment and mask-substrate gap control. The shadow mask system consists of a silicon shadow mask and a silicon carrier wafer with pyramidal cavities fabricated with bulk micromachining. Self-alignment and gap control of the shadow mask and the fabrication substrate can readily be achieved by using matching pairs of pyramidal cavities and steel spheres placed between. The layer-to-layer alignment accuracy of the new shadow mask system has been experimentally characterized and verified using both optical and atomic force microscopic measurements. As an application of this new shadow mask system, an organic thin-film transistor (OTFT) using pentacene as the semiconductor layer has been successfully fabricated and tested

Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

Silicon Micromachining in RF and Photonic Applications

Science.gov (United States)

Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

1995-01-01

Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

Achievement report on commissioned research of R and D in fiscal 1999 on micro-machine technologies. R and D of micro-machine technologies; 1999 nendo kenkyu seika hokokusho. Maikuro mashin gijutsu no kenkyu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

2001-03-01

With an objective to perform diagnoses and medical treatment in space limited portions in living organisms, research on micro-machine systems, research on a scanning type photographing unit in the medical micro-machine, and comprehensive surveys and researches have been conducted. This paper summarizes the achievements in fiscal 1999. In the research of a micro laser catheter, a prototype laser head having an outer diameter of 1 mm was fabricated, whereas composition was realized with a micro catheter having an outer diameter of 1.5 mm. With regard to the micro pressure sensor for catheterization, good active curving action was realized by a catheter in which a pressure sensor is mounted in the SMA curved catheter head. Research on the scanning type photographing unit has been carried out, for reducing further the diameter and size of an endoscope, on a photographing unit using laser beam whose cross section area of the tip optical section is about half of the conventional units. As a result, a high resolution scanning type photographing unit was realized based on the fiber optic system using a scanning mirror. In the comprehensive surveys and researches, items of information were collected in relation with the basic technologies for micro-machines. (NEDO)

Development of an intermediate energy heavy-ion micro-beam irradiation system

International Nuclear Information System (INIS)

Song Mingtao; Wang Zhiguang; He Yuan; Gao Daqing; Yang Xiaotian; Liu Jie; Su Hong; Man Kaidi; Sheng Li'na

2008-01-01

The micro-beam irradiation system, which focuses the beam down the micron order and precisely delivers a predefined number of ions to a predefined spot of micron order, is a powerful tool for radio-biology, radio-biomedicine and micromachining. The Institute of Modern Physics of Chinese Academy of Sciences is developing a heavy-ion micro-beam irradiation system up to intermediate energy. Based on the intermediate and low energy beam provided by Heavy Ion Research Facility of Lanzhou, the micro-beam system takes the form of the magnetic focusing. The heavy-ion beam is conducted to the basement by a symmetrical achromatic system consisting of two vertical bending magnets and a quadrupole in between. Then a beam spot of micron order is formed by magnetic triplet quadrupole of very high gradient. The sample can be irradiated either in vacuum or in the air. This system will be the first opening platform capable of providing heavy ion micro-beam, ranging from low (10 MeV/u) to intermediate energy (100 MeV/u), for irradiation experiment with positioning and counting accuracy. Target material may be biology cell, tissue or other non-biological materials. It will be a help for unveiling the essence of heavy-ion interaction with matter and also a new means for exploring the application of heavy-ion irradiation. (authors)

Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

International Nuclear Information System (INIS)

Tong Tao; Li Jinggao; Longtin, Jon P.

2004-01-01

Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

Laser micromachining of sputtered DLC films

International Nuclear Information System (INIS)

Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Ong, S.E.; Zhang, S.; Milne, W.I.

2006-01-01

DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp 2 /sp 3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF 6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.; Rodgers, M.S.

1998-05-01

An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

Directory of Open Access Journals (Sweden)

Hing Wah LEE

2009-03-01

Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

Science.gov (United States)

Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

2015-07-01

We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

International Nuclear Information System (INIS)

Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

2015-01-01

We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

Science.gov (United States)

Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

2007-02-01

The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Modelling of micromachining of human tooth enamel by erbium laser radiation

Energy Technology Data Exchange (ETDEWEB)

Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

2014-08-31

We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

Modelling of micromachining of human tooth enamel by erbium laser radiation

International Nuclear Information System (INIS)

Belikov, A V; Skrypnik, A V; Shatilova, K V

2014-01-01

We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

Structure optimization and simulation analysis of the quartz micromachined gyroscope

Directory of Open Access Journals (Sweden)

Xuezhong Wu

2014-02-01

Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

Channeling-based collimators for generation of microbeams produced by silicon micromachining technology

International Nuclear Information System (INIS)

Guidi, V.; Antonini, A.; Milan, E.; Ronzoni, A.; Martinelli, G.; Biryukov, V.M.; Chesnokov, Yu.A.

2006-01-01

The growing interest on micro-beams in recent years and the combined development of channeling technology in high-energy physics have opened the way to new concepts for micro-beams devices. Silicon micromachining technology is here applied to manufacture micro-collimators in inexpensive and feasible ways. Both dry and wet etchings can be employed for the purpose, though the latter technique appears to be cheaper and easier. Two designs for micro-collimator devices have been considered and preliminary samples have been produced accordingly

Demonstration of robust micromachined jet technology and its application to realistic flow control problems

International Nuclear Information System (INIS)

Chang, Sung Pil

2006-01-01

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

Demonstration of robust micromachined jet technology and its application to realistic flow control problems

Energy Technology Data Exchange (ETDEWEB)

Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

2006-04-15

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

Silicon microfabricated beam expander

Science.gov (United States)

Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.

2015-03-01

The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Directory of Open Access Journals (Sweden)

Dunzhu Xia

2014-01-01

Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

Energy Technology Data Exchange (ETDEWEB)

Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

2005-11-15

A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

Energy Technology Data Exchange (ETDEWEB)

NONE

1996-02-01

In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

High lane density slab-gel electrophoresis using micromachined instrumentation.

Science.gov (United States)

Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

2001-10-01

In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

High definition surface micromachining of LiNbO 3 by ion implantation

Science.gov (United States)

Chiarini, M.; Bentini, G. G.; Bianconi, M.; De Nicola, P.

2010-10-01

High Energy Ion Implantation (HEII) of both medium and light mass ions has been successfully applied for the surface micromachining of single crystal LiNbO 3 (LN) substrates. It has been demonstrated that the ion implantation process generates high differential etch rates in the LN implanted areas, when suitable implantation parameters, such as ion species, fluence and energy, are chosen. In particular, when traditional LN etching solutions are applied to suitably ion implanted regions, etch rates values up to three orders of magnitude higher than the typical etching rates of the virgin material, are registered. Further, the enhancement in the etching rate has been observed on x, y and z-cut single crystalline material, and, due to the physical nature of the implantation process, it is expected that it can be equivalently applied also to substrates with different crystallographic orientations. This technique, associated with standard photolithographic technologies, allows to generate in a fast and accurate way very high aspect ratio relief micrometric structures on LN single crystal surface. In this work a description of the developed technology is reported together with some examples of produced micromachined structures: in particular very precisely defined self sustaining suspended structures, such as beams and membranes, generated on LN substrates, are presented. The developed technology opens the way to actual three dimensional micromachining of LN single crystals substrates and, due to the peculiar properties characterising this material, (pyroelectric, electro-optic, acousto-optic, etc.), it allows the design and the production of complex integrated elements, characterised by micrometric features and suitable for the generation of advanced Micro Electro Optical Systems (MEOS).

Silicon microfabricated beam expander

International Nuclear Information System (INIS)

Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.

2015-01-01

The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed

Silicon microfabricated beam expander

Energy Technology Data Exchange (ETDEWEB)

Othman, A., E-mail: aliman@ppinang.uitm.edu.my; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A. [Faculty of Electrical Engineering, Universiti Teknologi MARA Malaysia, 40450, Shah Alam, Selangor (Malaysia); Ain, M. F. [School of Electrical and Electronic Engineering, Engineering Campus, Universiti Sains Malaysia, Seri Ampangan, 14300,Nibong Tebal, Pulau Pinang (Malaysia)

2015-03-30

The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.

High-intensity fibre laser design for micro-machining applications

Science.gov (United States)

Ortiz-Neria, D. I.; Martinez-Piñón, F.; Hernandez-Escamilla, H.; Alvarez-Chavez, J. A.

2010-11-01

This work is focused on the design of a 250W high-intensity continuous-wave fibre optic laser with a 15μm spot size beam and a beam parameter product (BPP) of 1.8 for its use on Laser-assisted Cold Spray process (LCS) in the micro-machining areas. The metal-powder deposition process LCS, is a novel method based on Cold Spray technique (CS) assisted by laser technology. The LCS accelerates metal powders by the use of a high-pressure gas in order to achieve flash welding of particles over substrate. In LCS, the critical velocity of impact is lower with respect with CS while the powder particle is heated before the deposition by a laser beam. Furthermore, LCS does not heat the powder to achieve high temperatures as it happens in plasma processes. This property puts aside cooling problems which normally happen in sintered processes with high oxygen/nitrogen concentration levels. LCS will be used not only in deposition of thin layers. After careful design, proof of concept, experimental data, and prototype development, it should be feasible to perform micro-machining precise work with the use of the highintensity fibre laser presented in this work, and selective deposition of particles, in a similar way to the well-known Direct Metal Laser Sintering process (DMLS). The fibre laser consists on a large-mode area, Yb3+-doped, semi-diffraction limited, 25-m fibre laser cavity, operating in continuous wave regime. The fibre shows an arguably high slope-efficiency with no signs of roll-over. The measured M2 value is 1.8 and doping concentration of 15000ppm. It was made with a slight modification of the traditional MCVD technique. A full optical characterization will be presented.

Design of Surface micromachined Compliant MEMS

Energy Technology Data Exchange (ETDEWEB)

Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

2001-01-01

The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

Design of Surface Micromachined Compliant MEMS

Energy Technology Data Exchange (ETDEWEB)

Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

2002-12-31

The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

Micromachined tunable metamaterials: a review

International Nuclear Information System (INIS)

Liu, A Q; Zhu, W M; Tsai, D P; Zheludev, N I

2012-01-01

This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies. (review article)

Physics-based signal processing algorithms for micromachined cantilever arrays

Science.gov (United States)

Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

2013-11-19

A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

Silicon micromachined vibrating gyroscopes

Science.gov (United States)

Voss, Ralf

1997-09-01

This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

Proton Beam Writing

International Nuclear Information System (INIS)

Rajta, I.; Szilasi, S.Z.; Csige, I.; Baradacs, E.

2005-01-01

Complete text of publication follows. Refractive index depth profile in PMMA due to proton irradiation Proton Beam Writing has been successfully used to create buried channel waveguides in PMMA, which suggested that proton irradiation increases the refractive index. To investigate this effect, PMMA samples were irradiated by 1.7-2.1 MeV proton beam. Spectroscopic Ellipsometry has been used to investigate the depth profile of the refractive index. An increase of the refractive index was observed in the order of 0.01, which is approximately one order of magnitude higher than the detection limit. The highest increase of the refractive index occurs at the end of range, i.e. we found a good correlation with the Bragg curve of the energy loss. Hardness changes in PMMA due to proton beam micromachining As protons penetrate a target material and lose their energy according to the Bragg curve, the energy loss is different at different depths. This causes depth-dependent changes of some physical properties in the target material (e.g. refractive index, hardness). In order to characterize the changes of hardness and other mechanical properties as a function of beam penetration depth, systematic investigations have been performed on PMMA, the most common resist material used in proton beam micromachining. Silicon check valve made by proton beam micromachining The possible application of Proton Beam Micromachining (PBM) has been demonstrated by a few authors for creating 3D Si microstructures. In this work we present alternative methods for the formation of a simple a non-return valve for microfluidic applications. Two different approaches have been applied, in both cases we exploited characteristic features of the PBM technique and the selective formation and dissolution of porous Si over the implantation damaged areas. In the first case we implanted 10 μm thick cantilever-type membrane of the valve normally to the crystal surface and at 30-60 degrees to the sidewalls of the

Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC.

Science.gov (United States)

DesAutels, G Logan; Powers, Peter; Brewer, Chris; Walker, Mark; Burky, Mark; Anderson, Gregg

2008-07-20

An optical temperature sensor was created using a femtosecond micromachined diffraction grating inside transparent bulk 6H-SiC, and to the best of our knowledge, this is a novel technique of measuring temperature. Other methods of measuring temperature using fiber Bragg gratings have been devised by other groups such as Zhang and Kahrizi [in MEMS, NANO, and Smart Systems (IEEE, 2005)]. This temperature sensor was, to the best of our knowledge, also used for a novel method of measuring the linear and nonlinear coefficients of the thermal expansion of transparent and nontransparent materials by means of the grating first-order diffracted beam. Furthermore the coefficient of thermal expansion of 6H-SiC was measured using this new technique. A He-Ne laser beam was used with the SiC grating to produce a first-order diffracted beam where the change in deflection height was measured as a function of temperature. The grating was micromachined with a 20 microm spacing and has dimensions of approximately 500 microm x 500 microm (l x w) and is roughly 0.5 microm deep into the 6H-SiC bulk. A minimum temperature of 26.7 degrees C and a maximum temperature of 399 degrees C were measured, which gives a DeltaT of 372.3 degrees C. The sensitivity of the technique is DeltaT=5 degrees C. A maximum deflection angle of 1.81 degrees was measured in the first-order diffracted beam. The trend of the deflection with increasing temperature is a nonlinear polynomial of the second-order. This optical SiC thermal sensor has many high-temperature electronic applications such as aircraft turbine and gas tank monitoring for commercial and military applications.

Discretely tunable micromachined injection-locked lasers

International Nuclear Information System (INIS)

Cai, H; Yu, M B; Lo, G Q; Kwong, D L; Zhang, X M; Liu, A Q; Liu, B

2010-01-01

This paper reports a micromachined injection-locked laser (ILL) to provide tunable discrete wavelengths. It utilizes a non-continuously tunable laser as the master to lock a Fabry–Pérot semiconductor laser chip. Both lasers are integrated into a deep-etched silicon chip with dimensions of 3 mm × 3 mm × 0.8 mm. Based on the experimental results, significant improvements in the optical power and spectral purity have been achieved in the fully locked state, and optical hysteresis and bistability have also been observed in response to the changes of the output wavelength and optical power of the master laser. As a whole system, the micromachined ILL is able to provide single mode, discrete wavelength tuning, high power and direct modulation with small size and single-chip solution, making it promising for advanced optical communications such as wavelength division multiplexing optical access networks.

Studying the mechanism of micromachining by short pulsed laser

Science.gov (United States)

Gadag, Shiva

economical, because the micromachining rates are much higher than in the case of the ultra-short pulsed lasers. Hence, studying the mechanisms of micromachining by nanosecond pulsed laser of semiconductor silicon, transparent dielectric glass and quartz is undertaken for this research work. Laser drilling of an array of miniaturized micro holes is termed as laser micro via. A study of the effect of laser wavelengths, frequency, and energy of the pulses on the depth and diameter of craters and micro via are carried out using high resolution optical microscopy and a nano via 3D profiler. Analytical equations correlating depth and volume of the crater in terms of the optical absorption coefficient and ratio of peak applied to the threshold fluence for ablation of the silicon are derived. The depth of crater is scaled in terms of optical penetration depth times the ratio of crater diameter to the beam diameter. The shorter UV wavelengths are found to be more suitable for ablation of Si and SiO2 than longer IR wavelengths from the study of the absorption coefficient of Si varying with wavelength. Hence, the UV lasers (266 nm or 355 nm) are used for micromachining of Si and SiO2 involving cutting, cleaning, drilling and dicing, micro-milling and texturing of submicron size vertically oriented silicon wires for photovoltaic applications. The high density vertical wires are useful to grab a greater density of solar energy to generate more environmentally-friendly green power. The laser drilling of micro via can be typically of two types: (1) percussion drilling using a stationary laser beam with single or multiple pulses of the laser or (2) trepanned drilling of micro via by the circular motion of laser. Numerical simulation of dynamic drilling of laser micro via of silicon is performed, using control volume (FV) Fluent code in a Cartesian co-ordinate system. Total enthalpy formulation is used to simulate the phase change taking place during the laser ablation process from melting

Nickel silicide thin films as masking and structural layers for silicon bulk micro-machining by potassium hydroxide wet etching

International Nuclear Information System (INIS)

Bhaskaran, M; Sriram, S; Sim, L W

2008-01-01

This paper studies the feasibility of using titanium and nickel silicide thin films as mask materials for silicon bulk micro-machining. Thin films of nickel silicide were found to be more resistant to wet etching in potassium hydroxide. The use of nickel silicide as a structural material, by fabricating micro-beams of varying dimensions, is demonstrated. The micro-structures were realized using these thin films with wet etching using potassium hydroxide solution on (1 0 0) and (1 1 0) silicon substrates. These results show that nickel silicide is a suitable alternative to silicon nitride for silicon bulk micro-machining

First reliability test of a surface micromachined microengine using SHiMMeR

Energy Technology Data Exchange (ETDEWEB)

Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

1997-08-01

The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

Method of drying passivated micromachines by dewetting from a liquid-based process

Science.gov (United States)

Houston, Michael R.; Howe, Roger T.; Maboudian, Roya; Srinivasan, Uthara

2000-01-01

A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

Micromachining process – current situation and challenges

Directory of Open Access Journals (Sweden)

Lalakiya Meet Rajeshkumar

2015-01-01

Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

Excimer laser micromachining for 3D microstructure

NARCIS (Netherlands)

Choi, Kyung Hyun; Meijer, J.; Masuzawa, Takahisa; Kim, Dae-Hyun

2004-01-01

A new 3D micromachining method, called Hole Area Modulation (HAM), has been introduced to enhance the current micromachining technology. In this method, information on the machining depth is converted to the sizes of holes on the mask. The machining is carried out with a simple 2D movement of the

A Novel Silicon Micromachined Integrated MCM Thermal Management System

Science.gov (United States)

Kazmierczak, M. J.; Henderson, H. T.; Gerner, F. M.

1997-01-01

"Micromachining" is a chemical means of etching three-dimensional structures, typically in single- crystalline silicon. These techniques are leading toward what is coming to be referred to as MEMS (Micro Electro Mechanical Systems), where in addition to the ordinary two-dimensional (planar) microelectronics, it is possible to build three-dimensional n-ticromotors, electrically- actuated raicrovalves, hydraulic systems and much more on the same microchip. These techniques become possible because of differential etching rates of various crystallographic planes and materials used for semiconductor n-ticrofabfication. The University of Cincinnati group in collaboration with Karl Baker at NASA Lewis were the first to form micro heat pipes in silicon by the above techniques. Current work now in progress using MEMS technology is now directed towards the development of the next generation in MCM (Multi Chip Module) packaging. Here we propose to develop a complete electronic thermal management system which will allow densifica6on in chip stacking by perhaps two orders of magnitude. Furthermore the proposed technique will allow ordinary conu-nercial integrated chips to be utilized. Basically, the new technique involves etching square holes into a silicon substrate and then inserting and bonding commercially available integrated chips into these holes. For example, over a 100 1/4 in. by 1 /4 in. integrated chips can be placed on a 4 in. by 4 in. silicon substrate to form a Multi-Chip Module (MCM). Placing these MCM's in-line within an integrated rack then allows for three-diniensional stacking. Increased miniaturization of microelectronic circuits will lead to very high local heat fluxes. A high performance thermal management system will be specifically designed to remove the generated energy. More specifically, a compact heat exchanger with milli / microchannels will be developed and tested to remove the heat through the back side of this MCM assembly for moderate and high

X-ray microcalorimeter arrays fabricated by surface micromachining

International Nuclear Information System (INIS)

Hilton, G.C.; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D.

2004-01-01

We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

Low current beam techniques

Energy Technology Data Exchange (ETDEWEB)

Saint, A.; Laird, J.S.; Bardos, R.A.; Legge, G.J.F. [Melbourne Univ., Parkville, VIC (Australia). School of Physics; Nishijima, T.; Sekiguchi, H. [Electrotechnical Laboratory, Tsukuba (Japan).

1993-12-31

Since the development of Scanning Transmission Microscopy (STIM) imaging in 1983 many low current beam techniques have been developed for the scanning (ion) microprobe. These include STIM tomography, Ion Beam Induced Current, Ion Beam Micromachining and Microlithography and Ionoluminense. Most of these techniques utilise beam currents of 10{sup -15} A down to single ions controlled by beam switching techniques This paper will discuss some of the low beam current techniques mentioned above, and indicate, some of their recent applications at MARC. A new STIM technique will be introduced that can be used to obtain Z-contrast with STIM resolution. 4 refs., 3 figs.

Low current beam techniques

Energy Technology Data Exchange (ETDEWEB)

Saint, A; Laird, J S; Bardos, R A; Legge, G J.F. [Melbourne Univ., Parkville, VIC (Australia). School of Physics; Nishijima, T; Sekiguchi, H [Electrotechnical Laboratory, Tsukuba (Japan).

1994-12-31

Since the development of Scanning Transmission Microscopy (STIM) imaging in 1983 many low current beam techniques have been developed for the scanning (ion) microprobe. These include STIM tomography, Ion Beam Induced Current, Ion Beam Micromachining and Microlithography and Ionoluminense. Most of these techniques utilise beam currents of 10{sup -15} A down to single ions controlled by beam switching techniques This paper will discuss some of the low beam current techniques mentioned above, and indicate, some of their recent applications at MARC. A new STIM technique will be introduced that can be used to obtain Z-contrast with STIM resolution. 4 refs., 3 figs.

Micromachined Precision Inertial Instruments

National Research Council Canada - National Science Library

Najafi, Khalil

2003-01-01

This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

Accelerated ion beam research at ATOMKI

International Nuclear Information System (INIS)

Kiss, A.Z.

2009-01-01

The paper summarizes the studies on accelerated ion beams at ATOMKI and their technical background, their use from chemical analysis to biological, medical, geological, archaeological applications, their advance from material science to micromachining. (TRA)

Micromachined silicon seismic accelerometer development

Energy Technology Data Exchange (ETDEWEB)

Barron, C.C.; Fleming, J.G.; Montague, S. [and others

1996-08-01

Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

Laser micromachining of biofactory-on-a-chip devices

Science.gov (United States)

Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

2002-06-01

Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

Non-traditional micromachining processes fundamentals and applications

CERN Document Server

Bhattacharyya, B; Davim, J

2017-01-01

This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Directory of Open Access Journals (Sweden)

Cheng-Yang Lin

2015-11-01

Full Text Available The study investigates the design and fabrication of a micromachined radio frequency (RF capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW lines. In order to reduce the actuation voltage of the switch, the springs are designed as low stiffness. The finite element method (FEM software CoventorWare is used to simulate the actuation voltage and displacement of the switch. The micromachined switch needs a post-CMOS process to release the springs and membrane. A wet etching is employed to etch the sacrificial silicon dioxide layer, and to release the membrane and springs of the switch. Experiments show that the pull-in voltage of the switch is 12 V. The switch has an insertion loss of 0.8 dB at 36 GHz and an isolation of 19 dB at 36 GHz.

A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time

Energy Technology Data Exchange (ETDEWEB)

Xu, Qiu [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Yang, Zhuoqing, E-mail: yzhuoqing@sjtu.edu.cn [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Fu, Bo; Li, Jianhua; Wu, Hao [Huaihai Industrial Group Co., Ltd., Changzhi, Shanxi Province, 046012 (China); Zhang, Qihuan; Sun, Yunna; Ding, Guifu; Zhao, Xiaolin [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China)

2016-11-30

Highlights: • The designed cantilever beam attached to the proof mass can endure a larger shock acceleration (∼1000 g order of magnitude) compared to those traditional designs (∼100 g order of magnitude). • Effect of the pulse width on the threshold acceleration, the response time and the contact time is investigated. • A constraint sleeve structure is introduced to lower the off-axis sensitivity. - Abstract: A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the movable electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a{sub ths}) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the

Synthesis and structure of large single crystalline silver hexagonal microplates suitable for micromachining

Energy Technology Data Exchange (ETDEWEB)

Lyutov, Dimitar L.; Genkov, Kaloyan V.; Zyapkov, Anton D.; Tsutsumanova, Gichka G.; Tzonev, Atanas N. [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria); Lyutov, Lyudmil G. [Department of General and Inorganic Chemistry, Faculty of Chemistry, University of Sofia, 1, J. Bouchier Blvd, Sofia (Bulgaria); Russev, Stoyan C., E-mail: scr@phys.uni-sofia.bg [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria)

2014-01-15

We report a simple one-step synthesis method of large single crystalline Ag (111) hexagonal microplates with sharp edges and a size of up to tens of microns. Single silver crystals were produced by reduction silver nitrate aqueous solution with 4-(methylamino)phenol sulfate. Scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, selected area electron diffraction and optical microscopy techniques were combined to characterize the crystals. It is shown that the microplates can be easily dispersed and transferred as single objects onto different substrates and subsequently used as a high quality plasmonic starting material for micromachining of future nanocomponents, using modern top-down techniques like focused-ion beam milling and gas injection deposition. - Highlights: • Synthesis of large Ag hexagonal microplates with high crystallinity. • It is shown and discussed the role of twinning for the anisotropic 2D growth. • The Ag plates are stable in water and can be dispersed onto different substrates. • Their positioning and subsequent micromachining with FIB/GIS is demonstrated. • Suitable starting material for future plasmonic nanocomponents.

Stiction in surface micromachining

NARCIS (Netherlands)

Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

1996-01-01

Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

Cryogenically assisted abrasive jet micromachining of polymers

International Nuclear Information System (INIS)

Getu, H; Papini, M; Spelt, J K

2008-01-01

The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN 2 ) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN 2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN 2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN 2 also was found to reduce particle embedding

A novel hybrid surface micromachined segmented mirror for large aperture laser applications

Science.gov (United States)

Li, Jie; Chen, Haiqing; Yu, Hongbin

2006-07-01

A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

Applications of focused ion beams in microelectronics

International Nuclear Information System (INIS)

Broughton, C.; Beale, M.I.J.; Deshmukh, V.G.I.

1986-04-01

We present the conclusions of the RSRE programme on the application of focused ion beams in microelectronics and review the literature published in this field. We discuss the design and performance of focused beam implanters and the viability of their application to semiconductor device fabrication. Applications in the areas of lithography, direct implantation and micromachining are discussed in detail. Comparisons are made between the use of focused ion beams and existing techniques for these fabrication processes with a strong emphasis placed on the relative throughputs. We present results on a novel spot size measurement technique and the effect of beam heating on resist. We also present the results of studies into implantation passivation of resist to oxygen plasma attack as basis for a dry development lithography scheme. A novel lithography system employing flood electron exposure from a photocathode which is patterned by a focused ion beam which can also be used to repair mask defects is considered. (author)

In vivo endoscopic multi-beam optical coherence tomography

Energy Technology Data Exchange (ETDEWEB)

Standish, Beau A; Mariampillai, Adrian; Munce, Nigel R; Leung, Michael K K; Vitkin, I Alex [Deptartment of Medical Biophysics, University of Toronto, Toronto (Canada); Lee, Kenneth K C; Yang, Victor X D [Ontario Cancer Institute/University Health Network, Toronto (Canada)], E-mail: standish@ee.ryerson.ca

2010-02-07

A multichannel optical coherence tomography (multi-beam OCT) system and an in vivo endoscopic imaging probe were developed using a swept-source OCT system. The distal optics were micro-machined to produce a high numerical aperture, multi-focus fibre optic array. This combination resulted in a transverse design resolution of <10 {mu}m full width half maximum (FWHM) throughout the entire imaging range, while also increasing the signal intensity within the focus of the individual channels. The system was used in a pre-clinical rabbit study to acquire in vivo structural images of the colon and ex vivo images of the oesophagus and trachea. A good correlation between the structural multi-beam OCT images and H and E histology was achieved, demonstrating the feasibility of this high-resolution system and its potential for in vivo human endoscopic imaging.

In vivo endoscopic multi-beam optical coherence tomography

International Nuclear Information System (INIS)

Standish, Beau A; Mariampillai, Adrian; Munce, Nigel R; Leung, Michael K K; Vitkin, I Alex; Lee, Kenneth K C; Yang, Victor X D

2010-01-01

A multichannel optical coherence tomography (multi-beam OCT) system and an in vivo endoscopic imaging probe were developed using a swept-source OCT system. The distal optics were micro-machined to produce a high numerical aperture, multi-focus fibre optic array. This combination resulted in a transverse design resolution of <10 μm full width half maximum (FWHM) throughout the entire imaging range, while also increasing the signal intensity within the focus of the individual channels. The system was used in a pre-clinical rabbit study to acquire in vivo structural images of the colon and ex vivo images of the oesophagus and trachea. A good correlation between the structural multi-beam OCT images and H and E histology was achieved, demonstrating the feasibility of this high-resolution system and its potential for in vivo human endoscopic imaging.

Materials processing with superposed Bessel beams

Science.gov (United States)

Yu, Xiaoming; Trallero-Herrero, Carlos A.; Lei, Shuting

2016-01-01

We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(⿿1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film.

Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

Energy Technology Data Exchange (ETDEWEB)

Smith, J.H.

1996-11-01

An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

Micromachined thin-film sensors for SOI-CMOS co-integration

CERN Document Server

Laconte, Jean; Raskin, Jean-Pierre

2006-01-01

Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

A manufacturing method for multi-layer polysilicon surface-micromachining technology

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.J.; Rodgers, M.S.

1998-01-01

An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Directory of Open Access Journals (Sweden)

Yan Su

2010-09-01

Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

1997-05-01

The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

FY 1994 Report on the technical results. Research and development of micromachine technologies (Development of highly functional maintenance technologies for power plants); 1994 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1995-09-01

This research and development project is aimed at development of the technologies for the micromachines provided with maintenance functions, e.g., for examination and maintenance of abnormal conditions in heat exchangers, piping systems or the like. The initial target is set at establishment of basic technologies for the micromachines, in consideration of the available technologies. The R and D activities are directed to (1) microcapsules for, e.g., micro power generators, (2) mother machines having controlling and instructing functions, (3) non-cabled examination modules, (4) cabled examination modules, and (5) total systems. The item (1) involves the micro power generators, and mechanisms of signal transmission, flaw finding and driving/suspension; the item (2) mechanisms of micro-optics and connection, group controlling, microbatteries, action type controlling, and artificial muscles; the item (3) expansion/contraction type transfer mechanisms, light energy supply, micro visual sensation, function connection, and concerted controlling; the item (4) tubular manipulators, and mechanisms of light-aided power generation and voltage elevation; and the item (5) maintenance and micromachine systems. (NEDO)

Micromachining. CERN Courier, Jul-Aug 1995, v. 35(5)

International Nuclear Information System (INIS)

Wilson, Martin

1995-01-01

Full text: As well as making microcircuit components, X-ray lithography can also be used to make very small mechanical parts, either by using directly the exposed and developed photoresist, or as a mould to produce the component in another material such as ceramic or metal. In this revolutionary technology, metal components are made via the LIGA (Lithographic Galvanoformung und Abformung) technique in which the exposed and developed photoresist is coated with a conducting material and then electroplated, after which the resist is stripped away. In addition to fine size and precision resolution, X-rays offer the advantage of deep penetration and small scattering through the resist, so that patterns may be up to a millimetre deep, with very accurate straightness in directions parallel to the beam. Micromachining via LIGA was developed at KfK Karlsruhe; commercialization and further development is being vigorously pursued by the Institut fur Mikrotechnik in Mainz and by Microparts GmbH in Karlsruhe. Significant developments have been made at the Synchrotron Radiation Centre in Madison, Wisconsin, with new programmes start-ing at SRRC (Taiwan), CAMD (Baton Rouge, Louisiana), and LURE (Paris). There is now an active European Special Interest Group for LIGA. Commercially manufactured micromachines are starting to be used in sensors and connectors. The ability to integrate microdevices with microelectronics raises many interesting possibilities for the future, notably in medicine and for intelligent sensors. In all cases, however, widespread adoption will be governed by the ability to mass-produce cheaply, requiring high volume production. The high intensities of synchrotron radiation will assist in achieving these large throughputs

Micro-machined resonator oscillator

Science.gov (United States)

Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

1994-01-01

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

Multi-layer enhancement to polysilicon surface-micromachining technology

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

1997-10-01

A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

Micromachined capacitive ultrasonic immersion transducer array

Science.gov (United States)

Jin, Xuecheng

Capacitive micromachined ultrasonic transducers (cMUTs) have emerged as an attractive alternative to conventional piezoelectric ultrasonic transducers. They offer performance advantages of wide bandwidth and sensitivity that have heretofore been attainable. In addition, micromachining technology, which has benefited from the fast-growing microelectronics industry, enables cMUT array fabrication and electronics integration. This thesis describes the design and fabrication of micromachined capacitive ultrasonic immersion transducer arrays. The basic transducer electrical equivalent circuit is derived from Mason's theory. The effects of Lamb waves and Stoneley waves on cross coupling and acoustic losses are discussed. Electrical parasitics such as series resistance and shunt capacitance are also included in the model of the transducer. Transducer fabrication technology is systematically studied. Device dimension control in both vertical and horizontal directions, process alternatives and variations in membrane formation, via etch and cavity sealing, and metalization as well as their impact on transducer performance are summarized. Both 64 and 128 element 1-D array transducers are fabricated. Transducers are characterized in terms of electrical input impedance, bandwidth, sensitivity, dynamic range, impulse response and angular response, and their performance is compared with theoretical simulation. Various schemes for cross coupling reduction is analyzed, implemented, and verified with both experiments and theory. Preliminary results of immersion imaging are presented using 64 elements 1-D array transducers for active source imaging.

Vascular tissue engineering by computer-aided laser micromachining.

Science.gov (United States)

Doraiswamy, Anand; Narayan, Roger J

2010-04-28

Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

A batch process micromachined thermoelectric energy harvester: fabrication and characterization

International Nuclear Information System (INIS)

Su, J; Goedbloed, M; Van Andel, Y; De Nooijer, M C; Elfrink, R; Wang, Z; Vullers, R J M; Leonov, V

2010-01-01

Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

Micromachined Integrated Transducers for Ultrasound Imaging

DEFF Research Database (Denmark)

la Cour, Mette Funding

The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

Interferometric optical fiber microcantilever beam biosensor

Science.gov (United States)

Wavering, Thomas A.; Meller, Scott A.; Evans, Mishell K.; Pennington, Charles; Jones, Mark E.; VanTassell, Roger; Murphy, Kent A.; Velander, William H.; Valdes, E.

2000-12-01

With the proliferation of biological weapons, the outbreak of food poisoning occurrences, and the spread of antibiotic resistant strains of pathogenic bacteria, the demand has arisen for portable systems capable of rapid, specific, and quantitative target detection. The ability to detect minute quantities of targets will provide the means to quickly assess a health hazardous situation so that the appropriate response can be orchestrated. Conventional test results generally require hours or even several days to be reported, and there is no change for real-time feedback. An interferometric optical fiber microcantilever beam biosensor has successfully demonstrated real time detection of target molecules. The microcantilever biosensor effectively combines advanced technology from silicon micromachining, optical fiber sensor, and biochemistry to create a novel detection device. This approach utilizes affinity coatings on micromachiend cantilever beams to attract target molecules. The presence of the target molecule causes bending in the cantilever beam, which is monitored using an optical displacement system. Dose-response trials have shown measured responses at nanogram/ml concentrations of target molecules. Sensitivity is expected to extend from the nanogram to the picogram range of total captured mass as the microcantilever sensors are optimized.

Fiscal 1997 report on technological results. R and D on micromachine technology; 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are 1. research on micromachine systems and 2. comprehensive investigation and research. In 1, (1) a micro catheter and (2) a micro tactile sensor catheter were studied while, in 2, basic technology and technological problems, particularly those problems concerning sophistication in the medical field were examined and studied. Further, in (1), with the purpose of developing a micro laser catheter for diagnosis/treatment, researches were implemented on the technology of integrating micro laser and an optical fiber which were components of the catheter and on the fabrication of the fine diameter of a micro catheter as well as on the characteristical improvement of the base body on which minute elements were mounted. In (2), characteristical improvement and sophistication were carried out for a high sensitivity contact pressure sensor and a diagnostic tactile sensor, which are mounted on a catheter having a positive bulge control mechanism for insertion into body cavity, with a sensor probe manufactured experimentally. (NEDO)

Demonstration of Robust Micromachined Jet Technology and its Application to Realistic Flow Control Problems

National Research Council Canada - National Science Library

Allen, Mark

2000-01-01

.... Our approaches include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow...

Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

International Nuclear Information System (INIS)

Nesprías, F.; Debray, M.E.; Davidson, J.; Kreiner, A.J.

2013-01-01

In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35 Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO 3 , a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well

Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

Energy Technology Data Exchange (ETDEWEB)

Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

2013-04-01

In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

Trends in laser micromachining

Science.gov (United States)

Gaebler, Frank; van Nunen, Joris; Held, Andrew

2016-03-01

Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

Ultrafast disk technology enables next generation micromachining laser sources

Science.gov (United States)

Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

2013-02-01

Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

International Nuclear Information System (INIS)

Xiang, H.; Komvopoulos, K.

2013-01-01

A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

Micro rapid prototyping system for micro components

International Nuclear Information System (INIS)

Li Xiaochun; Choi Hongseok; Yang Yong

2002-01-01

Similarities between silicon-based micro-electro-mechanical systems (MEMS) and Shape Deposition Manufacturing (SDM) processes are obvious: both integrate additive and subtractive processes and use part and sacrificial materials to obtain functional structures. These MEMS techniques are two-dimensional (2-D) processes for a limited number of materials while SDM enables the building of parts that have traditionally been impossible to fabricate because of their complex shapes or of their variety in materials. This work presents initial results on the development of a micro rapid prototyping system that adapts SDM methodology to micro-fabrication. This system is designed to incorporate microdeposition and laser micromachining. In the hope of obtaining a precise microdeposition, an ultrasonic-based micro powder-feeding mechanism was developed in order to form thin patterns of dry powders that can be cladded or sintered onto a substrate by a micro-sized laser beam. Furthermore, experimental results on laser micromachining using a laser beam with a wavelength of 355 nm are also presented. After further improvement, the developed micro manufacturing system could take computer-aided design (CAD) output to reproduce 3-D heterogeneous micro-components from a wide selection of materials

Comparison of residual stress measurement in thin films using surface micromachining method

International Nuclear Information System (INIS)

He, Q.; Luo, Z.X.; Chen, X.Y.

2008-01-01

Conductive, dielectric, semiconducting, piezoelectric and ferroelectric thin films are extensively used for MEMS/NEMS applications. One of the important parameters of thin films is residual stress. The residual stress can seriously affect the properties, performance and long-term stability of the films. Excessive compressive or tensile stress results in buckling, cracking, splintering and sticking problems. Stress measurement techniques are therefore essential for both process development and process monitoring. Many suggestions for stress measurement in thin films have been made over the past several decades. This paper is concentrated on the in situ stress measurement using surface micromachining techniques to determine the residual stress. The authors review and compare several types of stress measurement methods including buckling technique, rotating technique, micro strain gauge and long-short beam strain sensor

High speed micromachining with high power UV laser

Science.gov (United States)

Patel, Rajesh S.; Bovatsek, James M.

2013-03-01

Increasing demand for creating fine features with high accuracy in manufacturing of electronic mobile devices has fueled growth for lasers in manufacturing. High power, high repetition rate ultraviolet (UV) lasers provide an opportunity to implement a cost effective high quality, high throughput micromachining process in a 24/7 manufacturing environment. The energy available per pulse and the pulse repetition frequency (PRF) of diode pumped solid state (DPSS) nanosecond UV lasers have increased steadily over the years. Efficient use of the available energy from a laser is important to generate accurate fine features at a high speed with high quality. To achieve maximum material removal and minimal thermal damage for any laser micromachining application, use of the optimal process parameters including energy density or fluence (J/cm2), pulse width, and repetition rate is important. In this study we present a new high power, high PRF QuasarR 355-40 laser from Spectra-Physics with TimeShiftTM technology for unique software adjustable pulse width, pulse splitting, and pulse shaping capabilities. The benefits of these features for micromachining include improved throughput and quality. Specific example and results of silicon scribing are described to demonstrate the processing benefits of the Quasar's available power, PRF, and TimeShift technology.

UV laser micromachining of ceramic materials: formation of columnar topographies

International Nuclear Information System (INIS)

Oliveira, V.; Vilar, R.; Conde, O.

2001-01-01

Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

Materials processing with superposed Bessel beams

Energy Technology Data Exchange (ETDEWEB)

Yu, Xiaoming [Department of Industrial and Manufacturing Systems Engineering, Kansas State University, Manhattan, KS 66506 (United States); Trallero-Herrero, Carlos A. [J. R. Macdonald Laboratory, Department of Physics, Kansas State University, Manhattan, KS 66506 (United States); Lei, Shuting, E-mail: lei@ksu.edu [Department of Industrial and Manufacturing Systems Engineering, Kansas State University, Manhattan, KS 66506 (United States)

2016-01-01

Graphical abstract: - Highlights: • Superpositions of Bessel beams can be generated with >50% efficiency using an SLM and an axicon. • These beams have orders-of-magnitude increase in depth-of-focus compared to Gaussian beams. • Multiple craters can be fabricated on glass with single-shot exposure. • The 1+(−1) superposition can reduce collateral damage caused by the rings in the zero-order Bessel beams. - Abstract: We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film.

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Science.gov (United States)

Laconte, Jean; Flandre, D.; Raskin, Jean-Pierre

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution.

Fabrication of micro-prominences on PTFE surface using proton beam writing

Energy Technology Data Exchange (ETDEWEB)

Kitamura, Akane, E-mail: ogawa.akane@jaea.go.jp [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Satoh, Takahiro; Koka, Masashi [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Kobayashi, Tomohiro [Advanced Science Institute, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 350-0198 (Japan); Kamiya, Tomihiro [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan)

2013-07-01

Polytetrafluoroethylene (PTFE) is a typical fluoropolymer and it has several desirable technological properties such as electrical insulation, solid lubrication etc. However, the conventional microstructuring methods have not been well applied to PTFE due to its chemical inertness. Some effective micromachining using synchrotron radiation or ion beam irradiation has been reported. In this study, we create micro-prominences by raising the original surface using proton beam writing (PBW) without chemical etching. A conical prominence was formed by spiral drawing from the center with a 3 MeV proton beam. The body was porous, and the bulk PTFE below the prominence changed to fragmented structures. With decreasing writing speed, the prominence became taller but the height peaked. The prominence gradually reduced in size after the speed reached the optimum value. We expect that these porous projections with high aspect ratio will be versatile in medical fields and microelectromechanical systems (MEMS) technology.

Model Design of Piezoelectric Micromachined Modal Gyroscope

Directory of Open Access Journals (Sweden)

Xiaojun Hu

2011-01-01

Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

Directory of Open Access Journals (Sweden)

Brabazon D.

2010-06-01

Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

Data.gov (United States)

National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

Hybrid micromachining using a nanosecond pulsed laser and micro EDM

International Nuclear Information System (INIS)

Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

2010-01-01

Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

Surface micromachined counter-meshing gears discrimination device

International Nuclear Information System (INIS)

Polosky, M.A.; Garcia, E.J.; Allen, J.J.

1998-01-01

This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

Micromachined high-performance RF passives in CMOS substrate

International Nuclear Information System (INIS)

Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

2016-01-01

This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

GaAs micromachining in the 1 H2SO4:1 H2O2:8 H2O system. From anisotropy to simulation

Science.gov (United States)

Tellier, C. R.

2011-02-01

The bulk micromachining on (010), (110) and (111)A GaAs substrates in the 1 H2SO4:1 H2O2:8 H2O system is investigated. Focus is placed on anisotropy of 3D etching shapes with a special emphasis on convex and concave undercuts which are of prime importance in the wet micromachining of mechanical structures. Etched structures exhibit curved contours and more and less rounded sidewalls showing that the anisotropy is of type 2. This anisotropy can be conveniently described by a kinematic and tensorial model. Hence, a database composed of dissolution constants is further determined from experiments. A self-elaborated simulator which works with the proposed database is used to derive theoretical 3D shapes. Simulated shapes agree well with observed shapes of microstructures. The successful simulations open up two important applications for MEMS: CAD of mask patterns and meshing of simulated shapes for FEM simulation tools.

High-Energy Beam Transport system

International Nuclear Information System (INIS)

Melson, K.E.; Farrell, J.A.; Liska, D.J.

1979-01-01

The High-Energy Beam Transport (HEBT) system for the Fusion Materials Irradiation Test (FMIT) Facility is to be installed at the Hanford Engineering Development Laboratory (HEDL) at Richland, Washington. The linear accelerator must transport a large emittance, high-current, high-power, continuous-duty deuteron beam with a large energy spread either to a lithium target or a beam stop. A periodic quadrupole and bending-magnet system provides the beam transport and focusing on target with small beam aberrations. A special rf cavity distributes the energy in the beam so that the Bragg Peak is distributed within the lithium target. Operation of the rf control system, the Energy Dispersion Cavity (EDC), and the beam transport magnets is tested on the beam stop during accelerator turn-on. Characterizing the beam will require extensions of beam diagnostic techniques and noninterceptive sensors. Provisions are being made in the facility for suspending the transport system from overhead supports using a cluster system to simplify maintenance and alignment techniques

Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

Science.gov (United States)

Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

2012-07-01

A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

International Nuclear Information System (INIS)

Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B

2015-01-01

This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

DEFF Research Database (Denmark)

Pedersen, T; Thomsen, Erik Vilain; Zawada, T

2008-01-01

A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the de......A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

Reliability Analysis of the new Link between the Beam Interlock System and the LHC Beam Dumping System Zuverlässigkeitsanalyse der neuen Verbindung zwischen dem Beam Interlock System und dem LHC Beam Dumping System

CERN Document Server

Vatansever, Volkan

The nominal stored energy in each LHC beam is 360 MJ, surpassing the beam energy of other accelerators by orders of magnitude. This energy threatens to damage accelerator components in case of uncontrolled beam losses To avoid damage of accelerator equipment due to impacting beam, the controlled removal of the LHC beams from the collider rings towards the dump block must be guaranteed at all times. Therefore, the LHC Beam Dumping System was built according to high reliability standards. To further reduce the risk of incapability to dump the beams in case of correlated failures in the redundant system, a new direct link from the LHC Beam Interlock System to the Re-triggering Lines of the LHC Beam Dumping System will be implemented for the startup with beam in 2015. This link represents a diverse redundancy to the current implementation, which should neither significantly increase the risk for so-called Asynchronous Beam Dumps nor compromise machine availability. Therefore, a reliability analysis down to the co...

Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

Science.gov (United States)

Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

2002-06-01

The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

A micromachined surface stress sensor with electronic readout

NARCIS (Netherlands)

Carlen, Edwin; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

2008-01-01

A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and

Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

KAUST Repository

Viržonis, Darius; Kodzius, Rimantas; Vanagas, Galius

2013-01-01

The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here

Silicon Micromachines for Science and Technology

International Nuclear Information System (INIS)

Bishop, David J.

2002-01-01

The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science, the ability to build microscopic machines from silicon is having a revolutionary impact. In my talk, I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology.

Micro-machined calorimetric biosensors

Science.gov (United States)

Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

2002-01-01

A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

Micromachining structured optical fibers using focused ion beam milling

NARCIS (Netherlands)

Martelli, C.; Olivero, P.; Canning, J.; Groothoff, N.; Gibson, B.; Huntington, S.

2007-01-01

A focused ion beam is used to mill side holes in air-silica structured fibers. By way of example, side holes are introduced in two types of air-structured fiber, (1) a photonic crystal four-ring fiber and (2) a six-hole single-ring step-index structured fiber. © 2007 Optical Society of America.

Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

KAUST Repository

Viržonis, Darius

2013-10-22

The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

Quasimetallic silicon micromachined photonic crystals

International Nuclear Information System (INIS)

Temelkuran, B.; Bayindir, Mehmet; Ozbay, E.; Kavanaugh, J. P.; Sigalas, M. M.; Tuttle, G.

2001-01-01

We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

Micromachined Polycrystalline Si Thermopiles in a T-shirt

Directory of Open Access Journals (Sweden)

Vladimir Leonov

2011-04-01

Full Text Available The technology for in-plane poly-Si thermopiles has been developed. The bulk-micromachined thermopiles are located between two Si bars and connected thermally with those bars through thin-film thermal shunts. The patterned strips of thermocouple material together with thermal shunts form bridges between Si bars. Two versions of a thermoelectric generator (TEG with micromachined thermopiles have been assembled and tested on a person’s wrist, and when integrated in a T-shirt. The TEG still produces less than 1 μW in the office, but at ambient temperatures below 11-13 °C it produces more than 1 μW at a voltage of more than 2 V on the matched load. The new way of integration of wearable TEG in clothing is shown. The TEG is located under the textile, and the fabric is used as a flexible radiator.

Micromachined Ultrasonic Transducers for 3-D Imaging

DEFF Research Database (Denmark)

Christiansen, Thomas Lehrmann

of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... treatment of CMUTs is presented, including investigations of the anisotropic plate behaviour and modal radiation patterns of such devices. Several new CMUT fabrication approaches are developed and investigated in terms of oxide quality and surface protrusions, culminating in a simple four-mask process...

FY1995 development of micromachine technology based on insects; 1995 nendo konchu wo kihan to suru micromachine gijutsu no kakuritsu to jitsuyoka

Energy Technology Data Exchange (ETDEWEB)

NONE

1997-03-01

If we develop micromachines by reducing simply the size of conventional mechanical systems, we cannot get sufficient performances of them because of scale-effect. Small natural creatures, insects, have very good structures and functions reasonable for their small size. In this research, basic characteristics of sensors, actuators, information processing functions, etc. of insects are studied and artificial systems similar to them are developed for industrial application. (1) Compound eyes: Insect compound eyes is the visual sensor which is composed of microlenses which are distributed three-dimensionally, receptors which vibrate with small amplitude around an optical axis and neural networks. In this research, the large scale model (several centimeters sized) of insect compound eyes has been developed. (2) Pheromone sensor: Pheromone gas sensor has been made of real male silkworm moth antenae. This sensor has been proved to work well as the female pheromone detector. This sensor was installed at the nose part of a wheeled mobile robot and this robot was observed to act like a real silkworm moth subjected to female pheromone stream. (3) Electrostatic microactuator: Generally speaking, high voltage(higher than 100V) electric power is necessary to actuate the electrostatic actuator. It was considered to be impossible to actuate them directly from CMOS. In this research, a new electrostatic actuator which can be actuated with less than 10V voltage can cause a fairly large displacement. (4) Hydraulic actuator: For micromachines, hydraulic pressure will be applicable for actuation. Structures may be simple and scale effect may give an advantageous characteristics for microsize. A butterfly-type flying robot was developed and it flied up along a vertical bar. (NEDO)

Development of a Surface Micromachined On-Chip Flat Disk Micropump

Directory of Open Access Journals (Sweden)

M. I. KILANI

2009-08-01

Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout

International Nuclear Information System (INIS)

Dalola, Simone; Ferrari, Vittorio; Marioli, Daniele

2012-01-01

In this paper a dual-chip system for inclination measurement is presented. It consists of a MEMS (microelectromechanical system) piezoresistive accelerometer manufactured in silicon bulk micromachining and a CMOS (complementary metal oxide semiconductor) ASIC (application specific integrated circuit) interface designed for resistive-bridge sensors. The sensor is composed of a seismic mass symmetrically suspended by means of four flexure beams that integrate two piezoresistors each to detect the applied static acceleration, which is related to inclination with respect to the gravity vector. The ASIC interface is based on a relaxation oscillator where the frequency and the duty cycle of a rectangular-wave output signal are related to the fractional bridge imbalance and the overall bridge resistance of the sensor, respectively. The latter is a function of temperature; therefore the sensing element itself can be advantageously used to derive information for its own thermal compensation. DC current excitation of the sensor makes the configuration unaffected by wire resistances and parasitic capacitances. Therefore, a modular system results where the sensor can be placed remotely from the electronics without suffering accuracy degradation. The inclination measurement system has been characterized as a function of the applied inclination angle at different temperatures. At room temperature, the experimental sensitivity of the system results in about 148 Hz/g, which corresponds to an angular sensitivity around zero inclination angle of about 2.58 Hz deg −1 . This is in agreement with finite element method simulations. The measured output fluctuations at constant temperature determine an equivalent resolution of about 0.1° at midrange. In the temperature range of 25–65 °C the system sensitivity decreases by about 10%, which is less than the variation due to the microsensor alone thanks to thermal compensation provided by the current excitation of the bridge and the

Sub-band-gap laser micromachining of lithium niobate

DEFF Research Database (Denmark)

Christensen, F. K.; Müllenborn, Matthias

1995-01-01

method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

Trend of advanced technology of micromachines in the USA; Beikoku ni okeru micro machine sentan gijutsu doko chosa hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1996-03-01

In this research, the data of advanced technology of micromachines in the USA have been searched, collected, and arranged from the US patent information, technical journal information, and newspaper and general journal information. According to demand, the main undertaking information was interviewed from well-informed persons. The data were compiled as advanced technology trend of micromachines in the USA. Sensors are remarkably predominant in the elemental technology. There are also important topics in the fields of actuators, motors, lenses, devices, and structures. On the other hand, materials, etchings, packages, motive powers, and softwares are also important elemental technology in spite of their less information. From the viewpoint of usage, detection systems are remarkably predominant. Then, robots, processing systems, optics, analysis systems, motive power systems, medical systems, and acoustic systems are also important. From the viewpoint of industrial sector, the environmental items are predominant. Automobiles, medical treatments, and information communications follow the above. When new relationships to the secondary usage and tertiary usage are not found, it would be rather hard to express such a technology development trend more clearly.

Beam-scanning system for determination of beam profiles and form factors in merged-beam experiments

International Nuclear Information System (INIS)

Keyser, C.J.; Froelich, H.R.; Mitchell, J.B.A.; McGowan, J.W.

1979-01-01

A beam-scanning system for a merged electron-ion beam experiment is described. This system is used to determine the horizontal and vertical beam profiles and the form factors at three different locations along the axis of the beams. Design details of the wedge-shaped scanners and the electronic circuit for obtaining beam profiles and form factors are described. The form factor derivation for merged beams is given and an expression in terms of measured quantities is derived. (author)

Micromachined Parts Advance Medicine, Astrophysics, and More

Science.gov (United States)

2015-01-01

In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

Silicon Micromachined Microlens Array for THz Antennas

Science.gov (United States)

Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

2013-01-01

5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

Continuous single pulse resolved measurement of beam diameters at 200 kHz using optical transmission filters

Science.gov (United States)

Fruechtenicht, Johannes; Letsch, Andreas; Voss, Andreas; Abdou Ahmed, Marwan; Graf, Thomas

2012-02-01

We present a novel laser beam measurement setup which allows the determination of the beam diameter for each single pulse of a pulsed laser beam at repetition rates of up to 200 kHz. This is useful for online process-parameter control e.g. in micromachining or for laser source characterization. Basically, the developed instrument combines spatial transmission filters specially designed for instantaneous optical determination of the second order moments of the lateral intensity distribution of the light beam and photodiodes coupled to customized electronics. The acquisition is computer-based, enabling real-time operation for online monitoring or control. It also allows data storage for a later analysis and visualization of the measurement results. The single-pulse resolved beam diameter can be measured and recorded without any interruption for an unlimited number of pulses. It is only limited by the capacity of the data storage means. In our setup a standard PC and hard-disk provided 2 hours uninterrupted operation and recording of varying beam diameters at 200 kHz. This is about three orders of magnitude faster than other systems. To calibrate our device we performed experiments in cw and pulsed regimes and the obtained results were compared to those obtained with a commercial camera based system. Only minor deviations of the beam diameter values between the two instruments were observed, proving the reliability of our approach.

Condensation of sodium on a micromachined surface for AMTEC

International Nuclear Information System (INIS)

Crowley, C.J.; Izenson, M.G.

1993-01-01

A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

Micromachined two dimensional resistor arrays for determination of gas parameters

NARCIS (Netherlands)

van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

Corporate array of micromachined dipoles on silicon wafer for 60 GHz communication systems

KAUST Repository

Sallam, M. O.

2013-03-01

In this paper, an antenna array operating at 60 GHz and realized on 0.675 mm thick silicon substrate is presented. The array is constructed using four micromachined half-wavelength dipoles fed by a corporate feeding network. Isolation between the antenna array and its feeding network is achieved via a ground plane. This arrangement leads to maximizing the broadside radiation with relatively high front-to-back ratio. Simulations have been carried out using both HFSS and CST, which showed very good agreement. Results reveal that the proposed antenna array has good radiation characteristics, where the directivity, gain, and radiation efficiency are around 10.5 dBi, 9.5 dBi, and 79%, respectively. © 2013 IEEE.

Manufacturing of Three-dimensional Micro Structure Using Proton Beam

Energy Technology Data Exchange (ETDEWEB)

Lee, Suonggyu; Kwon, Wontae [Seoul University, Seoul (Korea, Republic of)

2015-04-15

The diameter of a proton beam emanating from the MC-50 cyclotron is about 2?3 mm with Gaussian distribution. This widely irradiated proton beam is not suitable for semiconductor etching, precise positioning, and micromachining, which require a small spot. In this study, a beam cutting method using a microhole is proposed as an economical alternative. We produced a microhole with aspect ratio, average diameter, and thickness of 428, 21 μm, and 9 mm, respectively, for cutting the proton beam. By using this high-aspect-ratio microhole, we conducted machinability tests on microstructures with sizes of tens of μm. Additionally, the results of simulation using GEANT4 and those of the actual experiment were compared and analyzed. The outcome confirmed the possibility of implementing a micro process technology for the fabrication of three-dimensional microstructures of 20 micron units using the MC-50 cyclotron with the microhole.

Surface-micromachined rotatable member having a low-contact-area hub

Science.gov (United States)

Rodgers, M. Steven; Sniegowski, Jeffry J.; Krygowski, Thomas W.

2003-11-18

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

Surface--micromachined rotatable member having a low-contact-area hub

Science.gov (United States)

Rodgers, M. Steven; Sniegowski, Jeffry J.

2002-01-01

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

Micromachined ultrasonic droplet generator based on a liquid horn structure

Science.gov (United States)

Meacham, J. M.; Ejimofor, C.; Kumar, S.; Degertekin, F. L.; Fedorov, A. G.

2004-05-01

A micromachined ultrasonic droplet generator is developed and demonstrated for drop-on-demand fluid atomization. The droplet generator comprises a bulk ceramic piezoelectric transducer for ultrasound generation, a reservoir for the ejection fluid, and a silicon micromachined liquid horn structure as the nozzle. The nozzles are formed using a simple batch microfabrication process that involves wet etching of (100) silicon in potassium hydroxide solution. Device operation is demonstrated by droplet ejection of water through 30 μm orifices at 1.49 and 2.30 MHz. The finite-element simulations of the acoustic fields in the cavity and electrical impedance of the device are in agreement with the measurements and indicate that the device utilizes cavity resonances in the 1-5 MHz range in conjunction with acoustic wave focusing by the pyramidally shaped nozzles to achieve low power operation.

Femtosecond laser micro-machined polyimide films for cell scaffold applications

DEFF Research Database (Denmark)

Antanavičiute, Ieva; Šimatonis, Linas; Ulčinas, Orestas

2018-01-01

of commercially available 12.7 and 25.4μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental...... micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens......Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining...

An in-pipe mobile micromachine using fluid power. A mechanism adaptable to pipe diameters

International Nuclear Information System (INIS)

Yoshida, Kazuhiro; Yokota, Shinichi; Takahashi, Ken

2000-01-01

To realize micro maintenance robots for small diameter pipes of nuclear reactors and so on, high power in-pipe mobile micromachines have been required. The authors have proposed the bellows microactuator using fluid power and have tried to apply the actuators to in-pipe mobile micromachines. In the previous papers, some inchworm mobile machine prototypes with 25 mm in diameter are fabricated and the traveling performances are experimentally investigated. In this paper, to miniaturize the in-pipe mobile machine and to make it adaptable to pipe diameters, firstly, a simple rubber-tube actuator constrained with a coil-spring is proposed and the static characteristics are investigated. Secondly, a supporting mechanism which utilizes a toggle mechanism and is adaptable to pipe diameters is proposed and the supporting forces are investigated. Finally, an in-pipe mobile micromachine for pipe with 4 - 5 mm in diameter is fabricated and the maximum traveling velocity of 7 mm/s in both ahead and astern movements is experimentally verified. (author)

Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of advanced-function maintenance technology for power generation facilities; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1997-03-01

Technologies for integrating functions are studied for a self-propelled surroundings recognition system that travels in a small-diameter tube at power generation facilities. Parameters are analyzed, and piezoelectric locomotion devices are reduced in size. A disk shape microantenna is experimentally built and evaluated, which is for realizing energy supply and communication by means of microwaves. Studies are conducted to improve the performance of optical energy transmission devices and to realize their systematization. Basic specifications are established for the embodiment of CCD (charge coupled device) microcameras to be installed. A high-efficiency, high-reliability micromachine system is constructed, in which multiple machines coordinate with each other for the exterior inspection of groups of small-diameter tubes. Devices which are capable of driving, deceleration, and propulsion prove to be feasible. Basic specifications are established for microconnectors to connect, separate, and combine multiple machines as occasion calls. Also discussed is the development of a micromachine for tube interior check and repair which operates making use of the inspection hole enabling tube interior check and repair without the need of disassembling the equipment to be repaired.

Damping control of micromachined lowpass mechanical vibration isolation filters using electrostatic actuation with electronic signal processing

Science.gov (United States)

Dean, Robert; Flowers, George; Sanders, Nicole; MacAllister, Ken; Horvath, Roland; Hodel, A. S.; Johnson, Wayne; Kranz, Michael; Whitley, Michael

2005-05-01

Some harsh environments, such as those encountered by aerospace vehicles and various types of industrial machinery, contain high frequency/amplitude mechanical vibrations. Unfortunately, some very useful components are sensitive to these high frequency mechanical vibrations. Examples include MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure of these components to high frequency mechanical vibrations present in the operating environment can result in problems ranging from an increased noise floor to component failure. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication. Active filter topologies, such as piezoelectric, electrostrictive-polymer-film and SMA have also been investigated in recent years. Electrostatic actuators, however, are utilized in many micromachined silicon devices to generate mechanical motion. They offer a number of advantages, including low power, fast response time, compatibility with silicon micromachining, capacitive position measurement and relative simplicity of fabrication. This paper presents an approach for realizing active micromachined mechanical lowpass vibration isolation filters by integrating an electrostatic actuator with the micromachined passive filter structure to realize an active mechanical lowpass filter. Although the electrostatic actuator can be used to adjust the filter resonant frequency, the primary application is for increasing the damping to an acceptable level. The physical size of these active filters is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyroscope chips.

3D capacitive tactile sensor using DRIE micromachining

Science.gov (United States)

Chuang, Chiehtang; Chen, Rongshun

2005-07-01

This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

A wafer mapping technique for residual stress in surface micromachined films

International Nuclear Information System (INIS)

Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

2016-01-01

The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

Improvement of Galilean refractive beam shaping system for accurately generating near-diffraction-limited flattop beam with arbitrary beam size.

Science.gov (United States)

Ma, Haotong; Liu, Zejin; Jiang, Pengzhi; Xu, Xiaojun; Du, Shaojun

2011-07-04

We propose and demonstrate the improvement of conventional Galilean refractive beam shaping system for accurately generating near-diffraction-limited flattop beam with arbitrary beam size. Based on the detailed study of the refractive beam shaping system, we found that the conventional Galilean beam shaper can only work well for the magnifying beam shaping. Taking the transformation of input beam with Gaussian irradiance distribution into target beam with high order Fermi-Dirac flattop profile as an example, the shaper can only work well at the condition that the size of input and target beam meets R(0) ≥ 1.3 w(0). For the improvement, the shaper is regarded as the combination of magnifying and demagnifying beam shaping system. The surface and phase distributions of the improved Galilean beam shaping system are derived based on Geometric and Fourier Optics. By using the improved Galilean beam shaper, the accurate transformation of input beam with Gaussian irradiance distribution into target beam with flattop irradiance distribution is realized. The irradiance distribution of the output beam is coincident with that of the target beam and the corresponding phase distribution is maintained. The propagation performance of the output beam is greatly improved. Studies of the influences of beam size and beam order on the improved Galilean beam shaping system show that restriction of beam size has been greatly reduced. This improvement can also be used to redistribute the input beam with complicated irradiance distribution into output beam with complicated irradiance distribution.

Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

International Nuclear Information System (INIS)

Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

2008-01-01

Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

High-frequency micro-machined power inductors

International Nuclear Information System (INIS)

Wang, N.; O'Donnell, T.; Roy, S.; Brunet, M.; McCloskey, P.; O'Mathuna, S.C.

2005-01-01

Power inductors have been fabricated on silicon substrates using low-temperature IC compatible processes. The electrical properties of these micro-inductors have been measured and discussed. A maximum quality factor of 6 at 4 MHz has been achieved with an inductance value of about 160 nH. The DC saturation currents of the non-gapped and gapped inductors are ∼500 and 700 mA, respectively. The relatively high Q factor and the load current characteristics allow these micro-machined inductors to be used in integrated power converters

Monitoring of yeast cell concentration using a micromachined impedance sensor

NARCIS (Netherlands)

Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

2005-01-01

The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

A sub-cm micromachined electron microscope

Science.gov (United States)

Feinerman, A. D.; Crewe, D. A.; Perng, D. C.; Shoaf, S. E.; Crewe, A. V.

1993-01-01

A new approach for fabricating macroscopic (approximately 10x10x10 mm(exp 3)) structures with micron accuracy has been developed. This approach combines the precision of semiconductor processing and fiber optic technologies. A (100) silicon wafer is anisotropically etched to create four orthogonal v-grooves and an aperture on each 10x12 mm die. Precision 308 micron optical fibers are sandwiched between the die to align the v-grooves. The fiber is then anodically bonded to the die above and below it. This procedure is repeated to create thick structures and a stack of 5 or 6 die will be used to create a miniature scanning electron microscope (MSEM). Two die in the structure will have a segmented electrode to deflect the beam and correct for astigmatism. The entire structure is UHV compatible. The performance of an SEM improves as its length is reduced and a sub-cm 2 keV MSEM with a field emission source should have approximately 1 nm resolution. A low voltage high resolution MSEM would be useful for the examination of biological specimens and semiconductors with a minimum of damage. The first MSEM will be tested with existing 6 micron thermionic sources. In the future a micromachined field emission source will be used. The stacking technology presented in this paper can produce an array of MSEMs 1 to 30 mm in length with a 1 mm or larger period. A key question being addressed by this research is the optimum size for a low voltage MSEM which will be determined by the required spatial resolution, field of view, and working distance.

Implementation of a Direct Link between the LHC Beam Interlock System and the LHC Beam Dumping System Re-Triggering Lines

CERN Document Server

Gabourin, S; Denz, R; Magnin, N; Uythoven, J; Wollmann, D; Zerlauth, M; Vatansever, V; Bartholdt, M; Bertsche, B; Zeiler, P

2014-01-01

To avoid damage of accelerator equipment due to impacting beam, the controlled removal of the LHC beams from the collider rings towards the dump blocks must be guaranteed at all times. When a beam dump is demanded, the Beam Interlock System communicates this request to the Trigger Synchronisation and Distribution System of the LHC Beam Dumping System. Both systems were built according to high reliability standards. To further reduce the risk of incapability to dump the beams in case of correlated failures in the Trigger Synchronisation and Distribution System, a new direct link from the Beam Interlock System to the re-triggering lines of the LHC Beam Dumping System will be implemented for the start-up with beam in 2015. The link represents a diverse redundancy to the current implementation, which should neither significantly increase the risk for so-called asynchronous beam dumps nor compromise machine availability. This paper describes the implementation choices of this link. Furthermore the results of a rel...

Micromachined millimeter-wave photonic band-gap crystals

International Nuclear Information System (INIS)

Oezbay, E.; Michel, E.; Tuttle, G.; Biswas, R.; Sigalas, M.; Ho, K.

1994-01-01

We have developed a new technique for fabricating three-dimensional photonic band-gap crystals. Our method utilizes an orderly stacking of micromachined (110) silicon wafers to build the periodic structure. A structure with a full three-dimensional photonic band gap centered near 100 GHz was measured, with experimental results in good agreement with theoretical predictions. This basic approach described should be extendable to build structures with photonic band-gap frequencies ranging from 30 GHz to 3 THz

Beam based systems and controls

CERN Document Server

Jacquet, D

2012-01-01

This presentation will give a review from the operations team of the performance and issues of the beam based systems, namely RF, ADT, beam instrumentation, controls and injection systems. For each of these systems, statistics on performance and availability will be presented with the main issues encountered in 2012. The possible improvements for operational efficiency and safety will be discussed, with an attempt to answer the question "Are we ready for the new challenges brought by the 25ns beam and increased energy after LSI? ".

Initial results from beam commissioning of the LHC beam dump system

CERN Document Server

Goddard, B; Carlier, E; Ducimetière, L; Gallet, E; Gyr, M; Jensen, L; Jones, R; Kain, V; Kramer, T; Lamont, M; Meddahi, M; Mertens, V; Risselada, Thys; Uythoven, J; Wenninger, J; Weterings, W

2010-01-01

Initial commissioning of the LHC beam dump system with beam took place in August and September 2008. The preparation, setting-up and the tests performed are described together with results of the extractions of beam into the dump lines. Analysis of the first detailed aperture measurements of the extraction channels and kicker performance derived from dilution sweep shapes are presented. The performance of the other equipment subsystems is summarised, in particular that of the dedicated dump system beam instrumentation.

Contrastive Analysis and Research on Negative Pressure Beam Tube System and Positive Pressure Beam Tube System for Mine Use

Science.gov (United States)

Wang, Xinyi; Shen, Jialong; Liu, Xinbo

2018-01-01

Against the technical defects of universally applicable beam tube monitoring system at present, such as air suction in the beam tube, line clogging, long sampling time, etc., the paper analyzes the current situation of the spontaneous combustion fire disaster forecast of mine in our country and these defects one by one. On this basis, the paper proposes a research thought that improving the positive pressure beam tube so as to substitute the negative pressure beam tube. Then, the paper introduces the beam tube monitoring system based on positive pressure technology through theoretical analysis and experiment. In the comparison with negative pressure beam tube, the paper concludes the advantage of the new system and draws the conclusion that the positive pressure beam tube is superior to the negative pressure beam tube system both in test result and test time. At last, the paper proposes prospect of the beam tube monitoring system based on positive pressure technology.

ITER Neutral Beam Injection System

International Nuclear Information System (INIS)

Ohara, Yoshihiro; Tanaka, Shigeru; Akiba, Masato

1991-03-01

A Japanese design proposal of the ITER Neutral Beam Injection System (NBS) which is consistent with the ITER common design requirements is described. The injection system is required to deliver a neutral deuterium beam of 75MW at 1.3MeV to the reactor plasma and utilized not only for plasma heating but also for current drive and current profile control. The injection system is composed of 9 modules, each of which is designed so as to inject a 1.3MeV, 10MW neutral beam. The most important point in the design is that the injection system is based on the utilization of a cesium-seeded volume negative ion source which can produce an intense negative ion beam with high current density at a low source operating pressure. The design value of the source is based on the experimental values achieved at JAERI. The utilization of the cesium-seeded volume source is essential to the design of an efficient and compact neutral beam injection system which satisfies the ITER common design requirements. The critical components to realize this design are the 1.3MeV, 17A electrostatic accelerator and the high voltage DC acceleration power supply, whose performances must be demonstrated prior to the construction of ITER NBI system. (author)

High intensity beam dump for the Tevatron beam abort system

International Nuclear Information System (INIS)

Kidd, J.; Mokhov, N.; Murphy, T.; Palmer, M.; Toohig, T.; Turkot, F.; VanGinneken, A.

1981-01-01

The beam abort system proposed for the Fermilab Tevatron Accelerator will extract the proton beam from the ring in a single turn (approximately 20/mu/s) and direct it to an external beam dump. It is the function of the beam dump to absorb the unwanted beam and limit the escaping radiation to levels that are acceptable to the surrounding populace and apparatus. A beam dump that is expected to meet these requirements has been designed and constructed. Detailed design of the dump, including considerations leading to the choice of materials, are given. 6 refs

Fabrication of a novel quartz micromachined gyroscope

Science.gov (United States)

Xie, Liqiang; Xing, Jianchun; Wang, Haoxu; Wu, Xuezhong

2015-04-01

A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure's mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z-axis quartz gyroscope is fabricated successfully.

Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

KAUST Repository

Sallam, Mai

2015-06-01

This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

X-ray beam-position feedback system with easy-to-use beam-position monitor.

Science.gov (United States)

Park, Jae Yeon; Kim, Yesul; Lee, Sangsul; Lim, Jun

2018-05-01

X-ray beam-position stability is indispensable in cutting-edge experiments using synchrotron radiation. Here, for the first time, a beam-position feedback system is presented that utilizes an easy-to-use X-ray beam-position monitor incorporating a diamond-fluorescence screen. The acceptable range of the monitor is above 500 µm and the feedback system maintains the beam position within 3 µm. In addition to being inexpensive, the system has two key advantages: it works without a scale factor for position calibration, and it has no dependence on X-ray energy, X-ray intensity, beam size or beam shape.

Optofluidic Microlasers based on Femtosecond Micromachining Technology

Directory of Open Access Journals (Sweden)

Simoni F.

2017-08-01

Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

A beam position feedback system for beam lines at the photon factory

International Nuclear Information System (INIS)

Katsura, T.; Kamiya, Y.; Haga, K.; Mitsuhashi, T.

1987-01-01

The beam position of the synchrotron radiation produced from the Storage Ring was stabilized by a twofold position feedback system. A digital feedback system was developed to suppress the diurnal beam movement (one cycle of sin-like drifting motion per day) which became a serious problem in low-emittance operation. The feedback was applied to the closed-orbit-distortion (COD) correction system in order to cancel the position variation at all the beam lines proportionately to the variation monitored at one beam line. An analog feedback system is also used to suppress frequency components faster than the slow diurnal movement

Mechanical nonlinearity elimination with a micromechanical clamped-free semicircular beams resonator

Science.gov (United States)

Chen, Dongyang; Chen, Xuying; Wang, Yong; Liu, Xinxin; Guan, Yangyang; Xie, Jin

2018-04-01

This paper reports a micro-machined clamped-free semicircular beam resonator aiming to eliminate the nonlinearity that widely exists in traditional mechanical resonators. Cubic coefficients over vibration displacement due to axial extension of the beams are analyzed through theoretical modelling, and the corresponding frequency effect is demonstrated. With the device working in the elastic vibration mode, the cubic coefficients are eliminated by using a free end to release the nonlinear extension of beams and thus the inside axial stress. The amplitude-frequency (A-f) effect is overcome in a large region of source power, and the coefficient of frequency softening is linearized in a large region of polarization voltage. As a result, the resonator can be driven at larger vibration amplitude to achieve a high signal to noise ratio and power handling performance.

Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

Science.gov (United States)

Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

2018-05-01

There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

Femtosecond laser micromachining of compound parabolic concentrator fiber tipped glucose sensors

DEFF Research Database (Denmark)

Hassan, Hafeez Ul; Lacraz, Amédée; Kalli, Kyriacos

2017-01-01

We report on highly accurate femtosecond (fs) laser micromachining of a compound parabolic concentrator (CPC) fiber tip on a polymer optical fiber (POF). The accuracy is reflected in an unprecedented correspondence between the numerically predicted and experimentally found improvement in fluoresc...

Optical micro-metrology of structured surfaces micro-machined by jet-ECM

DEFF Research Database (Denmark)

Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

2015-01-01

A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

KAUST Repository

Diaz, Edwin Hernandez

2015-06-01

Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

Directory of Open Access Journals (Sweden)

Jere Harrison

2012-07-01

Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

Capacitive micromachined ultrasonic transducers for medical imaging and therapy

International Nuclear Information System (INIS)

Khuri-Yakub, Butrus T; Oralkan, Ömer

2011-01-01

Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

Beam Cleaning and Collimation Systems

CERN Document Server

Redaelli, S

2016-01-01

Collimation systems in particle accelerators are designed to dispose of unavoidable losses safely and efficiently during beam operation. Different roles are required for different types of accelerator. The present state of the art in beam collimation is exemplified in high-intensity, high-energy superconducting hadron colliders, like the CERN Large Hadron Collider (LHC), where stored beam energies reach levels up to several orders of magnitude higher than the tiny energies required to quench cold magnets. Collimation systems are essential systems for the daily operation of these modern machines. In this document, the design of a multistage collimation system is reviewed, taking the LHC as an example case study. In this case, unprecedented cleaning performance has been achieved, together with a system complexity comparable to no other accelerator. Aspects related to collimator design and operational challenges of large collimation systems are also addressed.

Advanced Light Source beam diagnostics systems

International Nuclear Information System (INIS)

Hinkson, J.

1993-10-01

The Advanced Light Source (ALS), a third-generation synchrotron light source, has been recently commissioned. Beam diagnostics were very important to the success of the operation. Each diagnostic system is described in this paper along with detailed discussion of its performance. Some of the systems have been in operation for two years. Others, in the storage ring, have not yet been fully commissioned. These systems were, however, working well enough to provide the essential information needed to store beam. The devices described in this paper include wall current monitors, a beam charge monitor, a 50 ohm Faraday cup, DC current transformers, broad-hand striplines, fluorescence screens, beam collimators and scrapers, and beam position monitors. Also, the means by which waveforms are digitized and displayed in the control room is discussed

Deflection system for charged-particle beam

Energy Technology Data Exchange (ETDEWEB)

Bates, T

1982-01-13

A system is described for achromatically deflecting a beam of charged particles without producing net divergence of the beam comprising three successive magnetic deflection means which deflect the beam alternately in opposite directions; the first and second deflect by angles of less than 50/sup 0/ and the third by an angle of at least 90/sup 0/. Particles with different respective energies are transversely spaced as they enter the third deflection means, but emerge completely superimposed in both position and direction and may be brought to a focus in each of two mutually perpendicular planes, a short distance thereafter. Such a system may be particularly compact, especially in the direction in which the beam leaves the system. It is suitable for deflecting a beam of electrons from a linear accelerator so producing a vertical beam of electron (or with an X-ray target, of X-rays) which can be rotated about a horizontal patient for radiation therapy.

Achievement report on commissioned research of R and D in fiscal 2000 on micromachine technologies. Development of microfactory technology; 2000 nendo kenkyu seika hokokusho. Maikuro fakutori gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

2001-04-01

In order to achieve energy saving by miniaturizing the manufacturing process of small industrial products, R and D has been carried out on a micromachine system that puts together and assemble such devices as for processing, assembling, transportation and inspection used in the manufacturing process. This paper summarizes the achievements in fiscal 2000. In the research of a prototype micro-processing and assembling system, the secondary prototype system was fabricated, and verification was performed on its operation in processing and assembling works of a very small gear train. In the research of a micro liquid manipulating technology, high function liquid delivering device and holding device were developed, whereas the achievement of the targeted specifications was identified. In the research of a micro assembling technology, processing accuracy was improved on micro encoder disks. Furthermore, two second prototype micro arms were assembled into a microfactory to have performed verification on continuous operation to assemble trains of gears with a diameter of 10 mm. Other researches included the micro beam driving technology, micro electric power driving technology, micro transporting technology, and micro inspection technology. (NEDO)

Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide

Science.gov (United States)

Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Lipilin, Alexandr; Vasiliev, Alexey; Sokolov, Andrey

We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO2/Y2O3 (YSZ) are applied in these devices. The methods of ceramic MEMS devices fabrication with laser micromachining are considered. It is shown that the application of YSZ membranes permits a decrease in MEMS power consumption at 4500C down to ∼75 mW at continuous heating and down to ∼ 1 mW at pulse heating mode. The application of the platforms is not restricted by gas sensors: they can be used for fast thermometers, bolometric matrices, flowmeteres and other MEMS devices working under harsh environmental conditions.

Antares beam-alignment-system performance

International Nuclear Information System (INIS)

Appert, Q.D.; Bender, S.C.

1983-01-01

The beam alignment system for the 24-beam-sector Antares CO 2 fusion laser automatically aligns more than 200 optical elements. A visible-wavelength alignment technique is employed which uses a telescope/TV system to view point-light sources appropriately located down the beamline. The centroids of the light spots are determined by a video tracker, which generates error signals used by the computer control system to move appropriate mirrors in a closed-loop system. Final touch-up alignment is accomplished by projecting a CO 2 alignment laser beam through the system and sensing its position at the target location. The techniques and control algorithms employed have resulted in alignment accuracies exceeding design requirements. By employing video processing to determine the centroids of diffraction images and by averaging over multiple TV frames, we achieve alignment accuracies better than 0.1 times system diffraction limits in the presence of air turbulence

H- beam neutralization measurements in a solenoidal beam transport system

International Nuclear Information System (INIS)

Sherman, J.; Pitcher, E.; Stevens, R.; Allison, P.

1992-01-01

H minus beam space-charge neutralization is measured for 65-mA, 35-keV beams extracted from a circular-aperture Penning surface-plasma source, the small-angle source. The H minus beam is transported to a RFQ matchpoint by a two-solenoid magnet system. Beam noise is typically ±4%. A four-grid analyzer is located in a magnetic-field-free region between the two solenoid magnets. H minus potentials are deduced from kinetic energy measurements of particles (electrons and positive ions) ejected radially from the beam channel by using a griddled energy analyzer. Background neutral gas density is increased by the introduction of additional Xe and Ar gases, enabling the H minus beam to become overneutralized

Silicon-micromachined microchannel plates

CERN Document Server

Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

2000-01-01

Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

High precision electron beam diagnostic system for high current long pulse beams

International Nuclear Information System (INIS)

Chen, Y J; Fessenden, T; Holmes, C; Nelson, S D; Selchow, N.

1999-01-01

As part of the effort to develop a multi-axis electron beam transport system using stripline kicker technology for DARHT II applications, it is necessary to precisely determine the position and extent of long high energy beams (6-40 MeV, 1-4 kA, 2 microseconds) for accurate position control. The kicker positioning system utilizes shot-to-shot adjustments for reduction of relatively slow (<20 MHz) motion of the beam centroid. The electron beams passing through the diagnostic systems have the potential for large halo effects that tend to corrupt measurements performed using capacitive pick-off probes. Likewise, transmission line traveling wave probes have problems with multi-bounce effects due to these longer pulse widths. Finally, the high energy densities experienced in these applications distort typical foil beam position measurements

Acceleration sensitivity of micromachined pressure sensors

Science.gov (United States)

August, Richard; Maudie, Theresa; Miller, Todd F.; Thompson, Erik

1999-08-01

Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sensitivity to acceleration especially if thick encapsulation layers are used to isolate the device from the hostile environment in which they reside. This paper describes a modeling approach to determine their sensitivity to acceleration that is very general and is applicable to different device designs and configurations. It also describes the results of device testing of a capacitive surface micromachined pressure sensor at constant acceleration levels from 500 to 2000 g's.

Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

KAUST Repository

Demiral, Murat

2014-11-01

A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

Manufacture of Radio Frequency Micromachined Switches with Annealing

OpenAIRE

Lin, Cheng-Yang; Dai, Ching-Liang

2014-01-01

The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspe...

Non-Linear Beam Transport System for the LENS 7 MeV Proton Beam

CERN Document Server

Jones, William P; Derenchuk, Vladimir Peter; Rinckel, Thomas; Solberg, Keith

2005-01-01

A beam transport system has been designed to carry a high-intensity low-emittance proton beam from the exit of the RFQ-DTL acceleration system of the Indiana University Low Energy Neutron System (LENS)* to the neutron production target. The goal of the design was to provide a beam of uniform density over a 3cm by 3cm area at the target. Two octupole magnets** are employed in the beam line to provide the necessary beam phase space manipulations to achieve this goal. First order calculations were done using TRANSPORT and second order calculations have been performed using TURTLE. Second order simulations have been done using both a Gaussian beam distribution and a particle set generated by calculations of beam transport through the RFQ-DTL using PARMILA. Comparison of the design characteristics with initial measurements from the LENS commissioning process will be made.

Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

Directory of Open Access Journals (Sweden)

Yu Zhou

2016-07-01

Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

Integrated control system for electron beam processes

Science.gov (United States)

Koleva, L.; Koleva, E.; Batchkova, I.; Mladenov, G.

2018-03-01

The ISO/IEC 62264 standard is widely used for integration of the business systems of a manufacturer with the corresponding manufacturing control systems based on hierarchical equipment models, functional data and manufacturing operations activity models. In order to achieve the integration of control systems, formal object communication models must be developed, together with manufacturing operations activity models, which coordinate the integration between different levels of control. In this article, the development of integrated control system for electron beam welding process is presented as part of a fully integrated control system of an electron beam plant, including also other additional processes: surface modification, electron beam evaporation, selective melting and electron beam diagnostics.

The SSRL injector beam position monitoring systems

International Nuclear Information System (INIS)

Lavender, W.; Baird, S.; Brennan, S.; Borland, M.; Hettel, R.; Nuhn, H.D.; Ortiz, R.; Safranek, J.; Sebek, J.; Wermelskirchen, C.; Yang, J.

1991-01-01

The beam position monitoring system of the SSRL injector forms a vital component of its operation. Several different types of instrumentation are used to measure the position or intensity of the electron beam in the injector. These include current toroids, fluorescent screens, Faraday cups, the 'Q' meter, a synchrotron light monitor, and electron beam position monitors. This paper focuses on the use of the electron beam position monitors to measure electron trajectories in the injector transport lines and the booster ring. The design of the beam position monitors is described in another paper to be presented at this conference. There are three different beam position monitor systems in the injector. One system consists of a set of five BPMs located on the injection transport line from the linac to the booster (known as the LTB line). There is a second system of six BPMs located on the ejection transport line (known as the BTS line). Finally, there is an array of 40 BPMs installed on the main booster ring itself. This article describes the software and processing electronics of the systems used to measure electron beam trajectories for the new SSRL injector for SPEAR

Extracted-beam-detection system around synchrotron saturne

International Nuclear Information System (INIS)

Anne, Remy; Milleret, Gerard; Giuliani, Arlette; Lefol, Andre; Perret, Robert; Poupard, Joseph; Trogno, Andre; Van den Bossche, Maurice; N'Guyen Sieu Viet.

1977-07-01

The extracted-beam-detection system working around the synchrotron Saturne is presented. The whole system is composed of about forty multiwire chambers used for beam tuning and providing beams profiles. Optic beam parameters such as position, divergence, dimension, emittance can be easily measured, or calculated with a program running on a computer. They are working in large range intensity beams (10 2 to 5.10 11 p/cm 2 /s of protons, alpha particles, deutons, pions, tritons and electrons [fr

Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

International Nuclear Information System (INIS)

Belwanshi, Vinod; Topkar, Anita

2016-01-01

Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

Science.gov (United States)

Belwanshi, Vinod; Topkar, Anita

2016-05-01

Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

KAUST Repository

Wang, Zhihong; Yao, Yingbang; Wang, Xianbin; Yue, Weisheng; Chen, Longqing; Zhang, Xixiang

2013-01-01

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC

Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

NARCIS (Netherlands)

Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

2015-01-01

A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

Micromachined Microwave Cavity Resonator Filters for 5G: a Feasibility Study

NARCIS (Netherlands)

Kemenade, van R.; Smolders, A.B.; Hon, de B.P.

2015-01-01

Micromachined microwave cavity filters offer a light-weight, high-Q and highly integrated alternative in the frequency range of 20 GHz–100 GHz as compared to conventional filter types. The filter technology shows potential for use in 5G portable devices and as such, the design of a duplexer

A gamma beam profile imager for ELI-NP Gamma Beam System

Science.gov (United States)

Cardarelli, P.; Paternò, G.; Di Domenico, G.; Consoli, E.; Marziani, M.; Andreotti, M.; Evangelisti, F.; Squerzanti, S.; Gambaccini, M.; Albergo, S.; Cappello, G.; Tricomi, A.; Veltri, M.; Adriani, O.; Borgheresi, R.; Graziani, G.; Passaleva, G.; Serban, A.; Starodubtsev, O.; Variola, A.; Palumbo, L.

2018-06-01

The Gamma Beam System of ELI-Nuclear Physics is a high brilliance monochromatic gamma source based on the inverse Compton interaction between an intense high power laser and a bright electron beam with tunable energy. The source, currently being assembled in Magurele (Romania), is designed to provide a beam with tunable average energy ranging from 0.2 to 19.5 MeV, rms energy bandwidth down to 0.5% and flux of about 108 photons/s. The system includes a set of detectors for the diagnostic and complete characterization of the gamma beam. To evaluate the spatial distribution of the beam a gamma beam profile imager is required. For this purpose, a detector based on a scintillator target coupled to a CCD camera was designed and a prototype was tested at INFN-Ferrara laboratories. A set of analytical calculations and Monte Carlo simulations were carried out to optimize the imager design and evaluate the performance expected with ELI-NP gamma beam. In this work the design of the imager is described in detail, as well as the simulation tools used and the results obtained. The simulation parameters were tuned and cross-checked with the experimental measurements carried out on the assembled prototype using the beam from an x-ray tube.

A simple electron-beam lithography system

DEFF Research Database (Denmark)

Mølhave, Kristian; Madsen, Dorte Nørgaard; Bøggild, Peter

2005-01-01

A large number of applications of electron-beam lithography (EBL) systems in nanotechnology have been demonstrated in recent years. In this paper we present a simple and general-purpose EBL system constructed by insertion of an electrostatic deflector plate system at the electron-beam exit...... of the column of a scanning electron microscope (SEM). The system can easily be mounted on most standard SEM systems. The tested setup allows an area of up to about 50 x 50 pm to be scanned, if the upper limit for acceptable reduction of the SEM resolution is set to 10 run. We demonstrate how the EBL system can...... be used to write three-dimensional nanostructures by electron-beam deposition. (C) 2004 Elsevier B.V. All rights reserved....

Silicon-micromachined microchannel plates

International Nuclear Information System (INIS)

Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

2000-01-01

Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

Biasing of Capacitive Micromachined Ultrasonic Transducers.

Science.gov (United States)

Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

2017-02-01

Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

Fiscal 1993 report on technological results. R and D on micromachine technology; 1993 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1994-12-01

Researches on basic element technology of micromachines are conducted with the view of establishing a mechanical system constituted of minute functional elements that perform autonomous operations in a narrow small part of complicated equipment in a power station for example or in a living body. The areas of activity are 1. research on micro actuators and 2. research on basic technology of micromachine; 1 is classified into researches of (1) shape-memory actuator, (2) bending and stretching type actuator, and (3) integrated micro actuator, while 2 is classified into researches of (1) total system for medical diagnosis, (2) micro tactile sensing technology and laser applied diagnosis/treatment technology, and (3) blood pressure/blood circulation sensing technology. In 1-(1), a chemo-mechanical actuator was studied using a shape memory alloy (SMA) and a high polymer gel, and in 1-(2), an SMA and bimetal were employed as a source of the driving force. Further, examination was also made on a fluid driving type actuator. (NEDO)

Beam monitoring system for intense neutron source

International Nuclear Information System (INIS)

Tron, A.M.

2001-01-01

Monitoring system realizing novel principle of operation and allowing to register a two-dimensional beam current distribution within entire aperture (100...200 mm) of ion pipe for a time in nanosecond range has been designed and accomplished for beam control of the INR intense neutron source, for preventing thermo-mechanical damage of its first wall. Key unit of the system is monitor of two-dimensional beam current distribution, elements of which are high resistant to heating by the beam and to radiation off the source. The description of the system and monitor are presented. Implementation of the system for the future sources with more high intensities are discussed. (author)

Antiproton source beam position system

International Nuclear Information System (INIS)

Bagwell, T.; Holmes, S.; McCarthy, J.; Webber, R.

1984-05-01

The TeV I Beam Position Monitor (BPM) system is designed to provide a useful diagnostic tool during the commissioning and operational phases of the antiproton source. Simply stated the design goal is to provide single turn position information for intensities of > 1x10 9 particles, and multi-turn (clocked orbit) information for beam intensities of > 1x10 7 particles, both with sub-millimeter resolution. It is anticipated that the system will be used during commissioning for establishing the first turn through the Debuncher and Accumulator, for aligning injection orbits, for providing information necessary to correct closed orbits, and for measuring various machine parameters (e.g. tunes, dispersion, aperture, chromaticity). During normal antiproton operation the system will be used to monitor the beam position throughout the accumulation process

Implementation of EPICS based Control System for Radioisotope Beam line

Energy Technology Data Exchange (ETDEWEB)

Kim, Jae-Ha; Ahn, Tae-Sung; Song, Young-Gi; Kwon, Hyeok-Jung; Cho, Yong-Sub [Korea Atomic Energy Research Institute, Gyeongju (Korea, Republic of)

2015-10-15

Korea Mult-purpose Accelerator Complex (KOMAC) has been operating 100 MeV proton linear accelerator . For operating 100 MeV linac, various control system has been implemented such as vacuum, power supply, RCCS and etc. KOMAC is operating two beam lines so that clients can use 100 MeV proton beam for their experiment. KOMAC sends beam to beam line and target room using two dipole magnets and several quadrupole magnets. As demand for experiments and Radius Isotope using beam is increased, another beam line is under construction and RI beam line control system is need. To synchronize with KOMAC control system, RI beam line control system is based on Experimental Physics and Industrial control System (EPICS) software. The beam is transported to RI beam line to control magnet power supply and vacuum. Implementation of RI beam line control system is presented and some preliminary results are reported. The base RI beam line control system is implemented. It can control beam direction and vacuum. Comparing archived data and current data, RI beam line and control system will be improved. In the future, scroll pump and gate control system will be implemented using programmable logic controller PLC. RI beam interlock sequence will be added to KOMAC interlock system to protect linac.

Fast pulse beam generation systems for electron accelerators

International Nuclear Information System (INIS)

Koontz, R.F.

1977-01-01

The fast pulse beam generation system to supply the SLAC storage ring, SPEAR, by the two one nanosecond bunch electron beam pulses is described. Generation of these pulses is accomplished with a combination of a fast pulsed grided gun and a synchronized transverse beam chopper. Fast gun based on spherical cathode-grid assembly has output current up to 2As. Fast pulse amplifier system can handle trains of short pulses with repetition rates up to 40 MHz during the 1.6 μs normal accelerating time. Chopping deflector system consists of a resonant coaxial line with the deflecting plates. The resonator frequency is 39.667 MHz. A schematic diagram of the resonant system is shown. The fast beam pickup system has a one hundred picosecond rise time overrall. Fast beam generation and chopper systems permit to generate almost any short or single bunch beam profile needed for experiments

Lithium beam diagnostic system on the COMPASS tokamak

Energy Technology Data Exchange (ETDEWEB)

Anda, G.; Bencze, A. [Wigner – RCP, HAS, Budapest (Hungary); Berta, M., E-mail: bertam@sze.hu [Institute of Plasma Physics AS CR, Prague (Czech Republic); Széchenyi István University, Győr (Hungary); Dunai, D. [Wigner – RCP, HAS, Budapest (Hungary); Hacek, P. [Institute of Plasma Physics AS CR, Prague (Czech Republic); Faculty of Mathematics and Physics, Charles University in Prague, Prague (Czech Republic); Krbec, J. [Institute of Plasma Physics AS CR, Prague (Czech Republic); Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Prague (Czech Republic); Réfy, D.; Krizsanóczi, T.; Bató, S.; Ilkei, T.; Kiss, I.G.; Veres, G.; Zoletnik, S. [Wigner – RCP, HAS, Budapest (Hungary)

2016-10-15

Highlights: • Li-beam diagnostic system on the COMPASS tokamak is an improved and compact system to allow testing of Atomic Beam Probe. • The possibility to measure background corrected density profiles on the few microseconds time scale. • First Li-beam diagnostic system with recirculating neutralizer. • The system includes the redesigned ion source with longer lifetime. - Abstract: An improved lithium beam based beam emission spectroscopy system – installed on COMPASS tokamak – is described. The beam energy enhanced up to 120 keV for Atomic Beam Probe measurement. The size of the ion source is doubled, using a newly developed thermionic heater instead of the conventionally used heating (tungsten or molybdenum) filament. The neutralizer is also improved. It produces the same sodium vapor in a cell but minimize the loss condensing the vapor on a cold surface which is led back (in fluid state) into the sodium oven. This way we call it recirculating neutralizer. The observation system consists of a CCD camera and an avalanche photodiode array.

Ga+ implantation in a PZT film during focused ion beam micro-machining

International Nuclear Information System (INIS)

Wollschlaeger, Nicole; Oesterle, Werner; Haeusler, Ines; Stewart, Mark

2015-01-01

The objective of the present work was to study the impact of Focused Ion Beam (FIB) machining parameters on the thickness of the damaged layer within a thin film PZT. Therefore, different Ga + - ion doses and ion energies were applied to a standard PZT film (80/20 lead zirconium titanate) under two beam incidence angles (90 and 1 ). The thicknesses of the corresponding Ga + -implanted layers were then determined by cross-sectional TEM in combination with energy dispersive spectroscopic (EDS) line-scans and correlated with polarisation hysteresis loops. The results show a decrease of Ga + -implanted layer thickness with decreasing inclination angle, whereas ion energy and ion dose could be correlated with gallium concentration in the implanted layers. Under the most unfavorable conditions the depth of the affected zone was 26 nm, it was only 2 nm for the most favorable conditions. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

The beam diagnosis system for ELSA

International Nuclear Information System (INIS)

Schillo, M.

1991-10-01

A beam diagnostic system, which is based on capacitive beam-position monitors combined with fast electronics, has been developed for the Bonn Electron Stretcher Accelerator ELSA. The position signal of each monitor is digitized at an adjustable sampling rate and the most recent 8192 position and intensity values are buffered. This allows a wide range of different beam diagnostic measurements. The main purpose is the closed-orbit correction, which can be carried out on various time scales. To optimize the duty factor of the extracted beam, the system can also be used as a fast relative intensity monitor resolving the intensity distribution of the bunches or of the injected beam. It is designed to support betatron tune and phase measurements with very high accuracy, offering the choice to select any of the beam position monitors. This enables the measuring of many optical parameters. Furthermore any pair of suitable monitors can be used for experimental particle tracking or phase space measurements. (orig.) [de

A beam diagnostic system for ELSA

International Nuclear Information System (INIS)

Schillo, M.; Althoff, K.H.; Drachenfels, W.; Goetz, T.; Husmann, D.; Neckenig, M.; Picard, M.; Schittko, F.J.; Schauerte, W.; Wenzel, J.

1991-01-01

A beam diagnostic system, which is based on capacitive beam-position monitors combined with fast electronics, has been developed for the Bonn ELectron Stretcher Accelerator ELSA. The position signal of each monitor is digitized at an adjustable sampling rate (max.: 10 MHz) and the most recent 8192 position and intensity values are buffered. This allows a wide range of different beam diagnostic measurements. The main purpose is the closed-orbit correction, which can be carried out on various time scales. To optimize the duty factor of the extracted beam, the system can also be used as a fast relative intensity monitor resolving the intensity distribution of the bunches or of the injected beam. It is designed to support betatron tune and phase measurements with very high accuracy, offering the choice to select any of the beam position monitors. This enables the measuring of many optical parameters. Furthermore any pair of suitable monitors can be used for experimental particle tracking or phase space measurements

A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

Directory of Open Access Journals (Sweden)

Yogesh B. Gianchandani

2008-04-01

Full Text Available This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane roomtemperature- vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μmdiameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated.

Novel in situ mechanical testers to enable integrated metal surface micro-machines.

Energy Technology Data Exchange (ETDEWEB)

Follstaedt, David Martin; de Boer, Maarten Pieter; Kotula, Paul Gabriel; Hearne, Sean Joseph; Foiles, Stephen Martin; Buchheit, Thomas Edward; Dyck, Christopher William

2005-10-01

The ability to integrate metal and semiconductor micro-systems to perform highly complex functions, such as RF-MEMS, will depend on developing freestanding metal structures that offer improved conductivity, reflectivity, and mechanical properties. Three issues have prevented the proliferation of these systems: (1) warpage of active components due to through-thickness stress gradients, (2) limited component lifetimes due to fatigue, and (3) low yield strength. To address these issues, we focus on developing and implementing techniques to enable the direct study of the stress and microstructural evolution during electrodeposition and mechanical loading. The study of stress during electrodeposition of metal thin films is being accomplished by integrating a multi-beam optical stress sensor into an electrodeposition chamber. By coupling the in-situ stress information with ex-situ microstructural analysis, a scientific understanding of the sources of stress during electrodeposition will be obtained. These results are providing a foundation upon which to develop a stress-gradient-free thin film directly applicable to the production of freestanding metal structures. The issues of fatigue and yield strength are being addressed by developing novel surface micromachined tensile and bend testers, by interferometry, and by TEM analysis. The MEMS tensile tester has a ''Bosch'' etched hole to allow for direct viewing of the microstructure in a TEM before, during, and after loading. This approach allows for the quantitative measurements of stress-strain relations while imaging dislocation motion, and determination of fracture nucleation in samples with well-known fatigue/strain histories. This technique facilitates the determination of the limits for classical deformation mechanisms and helps to formulate a new understanding of the mechanical response as the grain sizes are refined to a nanometer scale. Together, these studies will result in a science

Beam-Forming Concentrating Solar Thermal Array Power Systems

Science.gov (United States)

Cwik, Thomas A. (Inventor); Dimotakis, Paul E. (Inventor); Hoppe, Daniel J. (Inventor)

2016-01-01

The present invention relates to concentrating solar-power systems and, more particularly, beam-forming concentrating solar thermal array power systems. A solar thermal array power system is provided, including a plurality of solar concentrators arranged in pods. Each solar concentrator includes a solar collector, one or more beam-forming elements, and one or more beam-steering elements. The solar collector is dimensioned to collect and divert incoming rays of sunlight. The beam-forming elements intercept the diverted rays of sunlight, and are shaped to concentrate the rays of sunlight into a beam. The steering elements are shaped, dimensioned, positioned, and/or oriented to deflect the beam toward a beam output path. The beams from the concentrators are converted to heat at a receiver, and the heat may be temporarily stored or directly used to generate electricity.

PLS beam position measurement and feedback system

International Nuclear Information System (INIS)

Huang, J.Y.; Lee, J.; Park, M.K.; Kim, J.H.; Won, S.C.

1992-01-01

A real-time orbit correction system is proposed for the stabilization of beam orbit and photon beam positions in Pohang Light Source. PLS beam position monitoring system is designed to be VMEbus compatible to fit the real-time digital orbit feedback system. A VMEbus based subsystem control computer, Mil-1553B communication network and 12 BPM/PS machine interface units constitute digital part of the feedback system. With the super-stable PLS correction magnet power supply, power line frequency noise is almost filtered out and the dominant spectra of beam obtit fluctuations are expected to appear below 15 Hz. Using DSP board in SCC for the computation and using an appropriate compensation circuit for the phase delay by the vacuum chamber, PLS real-time orbit correction system is realizable without changing the basic structure of PLS computer control system. (author)

LHC beam dumping system Extraction channel layout and acceptance

CERN Document Server

Goddard, B; Uythoven, J; Veness, R; Weterings, W

2003-01-01

The LHC beam dumping system must safely abort the LHC beams under all conditions, including those resulting from abnormal behaviour of machine elements or subsystems of the beam dumping system itself. The extraction channels must provide sufficient aperture both for the circulating and extracted beams, over the whole energy range and under various beam parameters. These requirements impose tight constraints on the tolerances of various extraction channel components, and also on the allowed range of beam positions in the region of these components. Operation of the beam dumping system under various fault states has been considered, and the resulting apertures calculated. After describing briefly the beam dumping system and the extraction channel geometry, the various assumptions made in the analysis are presented, before deriving tolerance limits for the relevant equipment and beam parameters.

Measurement of cell motility on proton beam micromachined 3D scaffolds

International Nuclear Information System (INIS)

Zhang, F.; Sun, F.; Kan, J.A. van; Shao, P.G.; Zheng, Z.; Ge, R.W.; Watt, F.

2005-01-01

Tissue engineering is a rapidly developing and highly interdisciplinary field that applies the principles of cell biology, engineering and material science. In natural tissues, the cells are arranged in a three-dimensional (3D) matrix which provides the appropriate functional, nutritional and spatial conditions. In scaffold guided tissue engineering 3D scaffolds provide the critical function of acting as extracellular matrices onto which cells can attach, grow, and form new tissue. The main focus of this paper is to understand cell behavior on micro-grooved and ridged substrates and to study the effects of geometrical constraints on cell motility and cell function. In this study, we found that BAE (Bovine Aortic Endothelial) cells naturally align with and are guided along 3D ridges and grooves machined into polymethylmethacrylate (PMMA) substrates. Average cell speed on micro-grooves and ridges ranged from 0.015 μm/s (for 12 μm wide and 10 μm deep ridges) to 0.025 μm/s (for 20 μm wide and 10 μm deep ridges). This compares with the cell motility rate on a flat PMMA surface where the average cell speed is around 0.012 μm/s. In this work we used scaffolds which were directly written with a focused proton beam, typically 1 MeV protons with a beam spot size of 1 x 1 μm 2

The beam transport system

International Nuclear Information System (INIS)

1986-01-01

The first proton beams have been transported along the transfer beamline and the diagnostic components have thus been used and tested under real operating conditions. The various electronic systems have been linked to the control system and the equipment can now be operated from the control console. The performance of the diagnostic system for the transfer beamline is satisfactory. The beam diagnostic components for the high-energy beamlines up to the isotope production and neutron therapy vaults and the first experimental target rooms have been installed. The high-energy slits have been delivered. The scanner and harp electronics have been installed and linked to their respective components in the beamlines. The pneumatic acuator control electronics has been manufactured, installed and is operational; provision has been made for special control features of the equipment in the therapy beamline. The high-voltage bias supply for the Faraday cups has been implemented. The installation of the beam current measurement system is nearing completion although part of it is already operational. A coaxial relay multiplexer for the capacitive phase probe signals has been manufactured and installed. The diagnostic equipment for the beamlines to isotope production and neutron therapy is thus ready for operation. 4 figs

Nonlinear wave-beam kinetic equilibrium in decelerating systems

International Nuclear Information System (INIS)

Grishin, V.K.; Shaposhnikova, E.N.

1981-01-01

The equilibrium state of the wave-beam system arising during the interaction of a particle beam and excited electromagnetic wave has been investigated on the basis of the analysis of the exact polution of a non-linear self-consistent linear equation using the complete system of conservation laws. A waveguide with a dielectric filler, into which a monoenergetic particle beam magnetized in a transverse plane is continuously injected, is used as a model of an decelerating system. A dispersion equation describing the system state and expression for the evaluation of efficiency of the beam energy conversion to the field energy have been obtained. It is concluded that larae fields and high efficiency of energy conversion are achieved during the marked beam reconstruction. States with different values of current and beam velocity but similar amplitudes of a longitudinal field are possible in the system considered [ru

Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies

International Nuclear Information System (INIS)

Yu Xiaomei; Tang Yaquan; Zhang Haitao

2008-01-01

This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process. (note)

1 nA beam position monitoring system

International Nuclear Information System (INIS)

Ursic, R.; Flood, R.; Piller, C.

1997-01-01

A system has been developed at Jefferson Lab for measuring transverse position of very low current beams delivered to the Experimental Hall B of the Continuous Electron Beam Accelerator Facility (CEBAF). At the heart of the system is a position sensitive cavity operating at 1497 MHz. The cavity utilizes a unique design which achieves a high sensitivity to beam position at a relatively low cavity Q. The cavity output RF signal is processed using a down-converter and a commercial lock-in amplifier operating at 100 kHz. The system interfaces with a VME based EPICS control system using the IEEE, 488 bus. The main features of the system are simple and robust design, and wide dynamic range capable of handling beam currents from 1 nA to 1000 nA with an expected resolution better than 100 μm. This paper outlines the design of the system

TFTR neutral beam power system

International Nuclear Information System (INIS)

Deitz, A.; Murray, H.; Winje, R.

1977-01-01

The TFTR NB System will be composed of four beam lines, each containing three ion sources presently being developed for TFTR by the Lawrence Berkeley Laboratories (LBL). The Neutral Beam Power System (NBPS) will provide the necessary power required to operate these Ion Sources in both an experimental or operational mode as well as test mode. This paper describes the technical as well as the administrative/management aspects involved in the development and building of this system. The NBPS will combine the aspects of HV pulse (120 kV) and long pulse width (0.5 sec) together to produce a high power system that is unique in the Electrical Engineering field

The elettra beam line control system

International Nuclear Information System (INIS)

Mignacco, M.; Abrami, A.; Dequal, Z.

1994-01-01

Elettra is a third generation Synchrotron Light Source located in Trieste (Italy). It consists of a full energy linac injector and a storage ring with beam energies between 1.5 and 2 GeV. The facility is scheduled to be operational by end 1993. For the whole project 22 beam lines from insertion devices are foreseen, each of them is composed of a large number of measurement and controls instruments, most of them embedded in intelligent devices; in addition each beam line can be considered unique compared to the others, having been designed to provide a different kind of synchrotron radiation. This results in a large not homogenous environment where more than 200,000 physical points have to be controlled. A joint team composed of Softeco Sismat and Digital Equipment has developed a fully automated beam line control system able to give full remote controls, with different kind of access rights, to beam line users and beam line specialists as well as a full integration with experiment control systems. ((orig.))

Walking beam pumping unit system efficiency measurements

International Nuclear Information System (INIS)

Kilgore, J.J.; Tripp, H.A.; Hunt, C.L. Jr.

1991-01-01

The cost of electricity used by walking beam pumping units is a major expense in producing crude oil. However, only very limited information is available on the efficiency of beam pumping systems and less is known about the efficiency of the various components of the pumping units. This paper presents and discusses measurements that have been made on wells at several Shell locations and on a specially designed walking beam pump test stand at Lufkin Industries. These measurements were made in order to determine the overall system efficiency and efficiency of individual components. The results of this work show that the overall beam pumping system efficiency is normally between 48 and 58 percent. This is primarily dependent on the motor size, motor type, gearbox size, system's age, production, pump size, tubing size, and rod sizes

Dependence of electron beam instability growth rates on the beam-plasma system parameters

International Nuclear Information System (INIS)

Strangeway, R.J.

1982-01-01

Electron beam instabilites are studied by using a simple model for an electron beam streaming through a cold plasma, the beam being of finite width perpendicular to the ambient magnetic field. Through considerations of finite geometry and the coldness of the beam and background plasma, an instability similar to the two stream instability is assumed to be the means for wave growth in the system. Having found the maximum growth rate for one set of beam-plasma system parameters, this maximum growth rate is traced as these parameters are varied. The parameters that describe the system are the beam velocity (v/sub b/), electron gyrofrequency to ambient electron plasma frequency ratio (Ω/sub e//ω/sub p/e), the beam to background number density ratio (n/sub b//n/sub a/), and the beam width (a). When Ω/sub e//ω/sub p/e>1, a mode with Ω/sub e/<ω<ω/sub u/hr is found to be unstable, where Ω is the wave frequency and ω/sub u/hr is the upper hybrid resonance frequency. For low values of n/sub b//n/sub a/ and Ω/sub e/<ω/sub p/e, this mode is still present with ω/sub p/e<ω<ω/sub u/hr. If the beam density is large, n/sub b//n/sub a/approx. =1, the instability occures for frequencies just above the electron gyrofrequency. This mode may well be that observed in laboratory plasma before the system undergoes the beam-plasma discharge. There is another instability present, which occurs for ωapprox. =ω/sub p/e. The growth rates for this mode, which are generally larger than those found for the ωapprox. =ωuhr mode, are only weakly dependent on Ω/sub d//ω/sub p/e. That this mode is not always observed in the laboratory implies that some factors not considered in the present theory suppress this mode, specifically, finite beam length

Development of BPM/BLM DAQ System for KOMAC Beam Line

Energy Technology Data Exchange (ETDEWEB)

Song, Young-Gi; Kim, Jae-Ha; Yun, Sang-Pil; Kim, Han-Sung; Kwon, Hyeok-Jung; Cho, Yong-Sub [Korea Atomic Energy Research Institute, Gyeongju (Korea, Republic of)

2016-10-15

The proton beam is accelerated from 3 MeV to 100 MeV through 11 DTL tanks. The KOMAC installed 10 beam lines, 5 for 20-MeV beams and 5 for 100-MeV beams. The proton beam is transmitted to two target room. The KOMAC has been operating two beam lines, one for 20 MeV and one for 100 MeV. New beam line, RI beam line is under commissioning. A Data Acquisition (DAQ) system is essential to monitor beam signals in an analog front-end circuitry from BPM and BLM at beam lines. A data acquisition (DAQ) system is essential to monitor beam signals in an analog front-end circuitry from BPM and BLM at beam lines. The DAQ digitizes beam signal and the sampling is synchronized with a reference signal which is an external trigger for beam operation. The digitized data is accessible by the Experimental Physics and Industrial Control System (EPICS)-based control system, which manages the whole accelerator control. The beam monitoring system integrates BLM and BPM signals into the control system and offers realtime data to operators. The IOC, which is implemented with Linux and a PCI driver, supports data acquisition as a very flexible solution.

Neutral beam data systems at ORNL

International Nuclear Information System (INIS)

Stewart, C.R.

1982-01-01

A control system for neutral injection beam lines has been designed, implemented, and used with much success. Despite the problems with very high power levels this system is very successful in relieving the operators burdens of slow conditioning, data recording, and mode switching. The use of computer control with multiple beam lines now appears very promising

Beam dynamics in the SLC final focus system

International Nuclear Information System (INIS)

Bambade, P.S.

1987-06-01

The SLC luminosity is reached by colliding beams focused to about 2 μm transverse sizes. The Final Focus System (FFS) must enable, beyond its basic optical design, the detection and correction of errors accumulated in the system. In this paper, after summarizing the design, we review the sensitivity to such errors and the ability to correct them. The overall tuning strategy involves three phases: single beam spot minimization, steering the beams in collision and luminosity optimization with beam-beam effects

Generation of programmable temporal pulse shape and applications in micromachining

Science.gov (United States)

Peng, X.; Jordens, B.; Hooper, A.; Baird, B. W.; Ren, W.; Xu, L.; Sun, L.

2009-02-01

In this paper we presented a pulse shaping technique on regular solid-state lasers and the application in semiconductor micromachining. With a conventional Q-switched laser, all of the parameters can be adjusted over only limited ranges, especially the pulse width and pulse shape. However, some laser link processes using traditional laser pulses with pulse widths of a few nanoseconds to a few tens of nanoseconds tend to over-crater in thicker overlying passivation layers and thereby cause IC reliability problems. Use of a laser pulse with a special shape and a fast leading edge, such as tailored pulse, is one technique for controlling link processing. The pulse shaping technique is based on light-loop controlled optical modulation to shape conventional Q-switched solid-state lasers. One advantage of the pulse shaping technique is to provide a tailored pulse shape that can be programmed to have more than one amplitude value. Moreover, it has the capability of providing programmable tailored pulse shapes with discrete amplitude and time duration components. In addition, it provides fast rising and fall time of each pulse at fairly high repetition rate at 355nm with good beam quality. The regular-to-shaped efficiency is up to 50%. We conclude with a discussion of current results for laser processing of semiconductor memory link structures using programmable temporal pulse shapes. The processing experiments showed promising results with shaped pulse.

LHC Beam Dump System: Analysis of beam commissioning, performance and the consequences of abnormal operation

CERN Document Server

Kramer, Thomas

2011-01-01

The LHC accelerates proton beams to a momentum of up to 7 TeV/c. At this energy level and with nominal beam intensity the stored energy of 360 MJ per beam is sufficient to melt 500 kg of copper. In addition up to 10 GJ are stored within the LHC magnet system at top energy. It is obvious that such a machine needs well designed safety and protection systems. The LHC Beam Dump System (LBDS) is such a system and one of the most critical once concerning machine protection and safe operation. It is used to dispose of high intensity beams between 450 GeV and 7 TeV and is thus designed to fast extract beam in a loss free way and to transfer it to an external absorber. For each ring systems of 15 horizontal fast kicker magnets (MKD), 15 vertically deflecting magnetic septa (MSD) and 10 diluter kicker magnets (MKB) are installed. This thesis is concerned with the analysis of the LBDS performance under normal operating parameters as well as under abnormal conditions like in the event of asynchronous beam abort or missin...

Electron beam producing system for very high acceleration voltages and beam powers

International Nuclear Information System (INIS)

Andelfinger, C.; Dommaschk, W.; Ott, W.; Ulrich, M.; Weber, G.

1975-01-01

An electron beam producing system for acceleration voltages on the order of megavolts and beam powers on the order of gigawatts is described. A tubular housing of insulating material is used, and adjacent to its one closed end, a field emission cathode with a large surface area is arranged, while at its other end, from which the electron beam emerges, an annular anode is arranged. The device for collimating the electron beam consists of annular electrodes. (auth)

Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon

Science.gov (United States)

Amako, J.; Fujii, E.

2016-02-01

We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency>95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy ofbeam array and the throughput was substantially improved (10,000 points on a silicon wafer drilled in ~1 min). This beam-delivery scheme works for a variety of laser applications that require parallel processing.

Beam position monitor system for storage rings

International Nuclear Information System (INIS)

Nakamura, M.; Hinkson, J.A.

1985-05-01

Beam position monitors (BPM) for synchrotron light storage rings usually consist of beam pickup electrodes, coaxial relays and a narrowband receiver. While accurate, these systems are slow and of limited use in the commissioning of an accelerator. A beam position monitor is described which is intended to be a principal diagnostic during debug and routine running of a storage ring. It is capable of measuring the position of a single bunch on the first or nth orbit to an accuracy of a few percent. Stored beam position is more accurately measured with averaging techniques. Beam position changes can be studied in a bandwidth from DC to a few MHz. The beam monitor electronics consist of a separate amplification, detection, and sampling channel for each beam pickup electrode. Fast switches in each channel permit selection of the nth turn for measurement (single bunch mode). A calibration pulse is injected into each channel after beam measurement to permit gain offsets to be measured and removed from the final data. While initially more costly than the usual beam position monitor system, this sytem will pay for itself in reduced storage ring debug and trouble shooting time. 5 refs., 5 figs

Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of microfactory technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1997-03-01

The goal is to save energy and minimize the working space by constructing a manufacturing system comprising various micromachines with their dimensions fit for parts and products they handle. Development continues relative to microprocessing (electrolysis, and optical processing) and microscopic liquid operation (micropump, and part holding device). Under research in relation to the assembly process are a micro-arm to handle tiny parts and precision techniques for interfitting within a very small microfactory, a piezoelectric actuator for microscopic position adjusting, and ultraprecise microprocessing techniques indispensable for their manufacture. Also under research are the incorporation of optically driven microdevices developed before the preceding fiscal year into a microfactory and the study of microservo actuators capable of sophisticated positioning and velocity control. Concerning the microscopic transport system to deal with microscopic parts and products, studies are under way so as to embody systems driven by actuators of the electromagnetic type and electrostatic type. In this paper, reference is made to inspection techniques and comprehensive investigations. (NEDO)

Vibrations and stability of complex beam systems

CERN Document Server

Stojanović, Vladimir

2015-01-01

 This book reports on solved problems concerning vibrations and stability of complex beam systems. The complexity of a system is considered from two points of view: the complexity originating from the nature of the structure, in the case of two or more elastically connected beams; and the complexity derived from the dynamic behavior of the system, in the case of a damaged single beam, resulting from the harm done to its simple structure. Furthermore, the book describes the analytical derivation of equations of two or more elastically connected beams, using four different theories (Euler, Rayleigh, Timoshenko and Reddy-Bickford). It also reports on a new, improved p-version of the finite element method for geometrically nonlinear vibrations. The new method provides more accurate approximations of solutions, while also allowing us to analyze geometrically nonlinear vibrations. The book describes the appearance of longitudinal vibrations of damaged clamped-clamped beams as a result of discontinuity (damage). It...

Environmentally clean micromilling of electron beam melted Ti6Al4V

DEFF Research Database (Denmark)

Bruschi, S.; Tristo, G.; Rysava, Z.

2016-01-01

The paper is aimed at evaluating the performances of Minimum Quantity Lubrication (MQL), dry cutting and cryogenic cooling when applied to the micro-milling of Ti6Al4V titanium alloy samples obtained by Additive Manufacturing (AM) using the Electron Beam Melting (EBM) technology. The micro...... alterations, in order to prove the impact of clean cutting conditions when applied to micro-machining of a AM titanium alloy of biomedical interest. It is shown that dry cutting assures the same performances of MQL, representing then the most suitable option to decrease the environmental impact...

Beam Position and Phase Monitor - Wire Mapping System

International Nuclear Information System (INIS)

Watkins, Heath A.; Shurter, Robert B.; Gilpatrick, John D.; Kutac, Vincent G.; Martinez, Derwin

2012-01-01

The Los Alamos Neutron Science Center (LANSCE) deploys many cylindrical beam position and phase monitors (BPPM) throughout the linac to measure the beam central position, phase and bunched-beam current. Each monitor is calibrated and qualified prior to installation to insure it meets LANSCE requirements. The BPPM wire mapping system is used to map the BPPM electrode offset, sensitivity and higher order coefficients. This system uses a three-axis motion table to position the wire antenna structure within the cavity, simulating the beam excitation of a BPPM at a fundamental frequency of 201.25 MHz. RF signal strength is measured and recorded for the four electrodes as the antenna position is updated. An effort is underway to extend the systems service to the LANSCE facility by replacing obsolete electronic hardware and taking advantage of software enhancements. This paper describes the upgraded wire positioning system's new hardware and software capabilities including its revised antenna structure, motion control interface, RF measurement equipment and Labview software upgrades. The main purpose of the wire mapping system at LANSCE is to characterize the amplitude response versus beam central position of BPPMs before they are installed in the beam line. The wire mapping system is able to simulate a beam using a thin wire and measure the signal response as the wire position is varied within the BPPM aperture.

Optics of ion beams for the neutral beam injection system on HL-2A Tokamak

Energy Technology Data Exchange (ETDEWEB)

Zou, G. Q.; Lei, G. J.; Cao, J. Y.; Duan, X. R. [Southwestern Institute of Physics, Chengdu, 610041 (China)

2012-07-15

The ion beam optics for the neutral beam injection system on HL-2A Tokomak is studied by two- dimensional numerical simulation program firstly, where the emitting surface is taken at 100 Debye lengths from the plasma electrode. The mathematical formulation, computation techniques are described. Typical ion orbits, equipotential contours, and emittance diagram are shown. For a fixed geometry electrode, the effect of plasma density, plasma potential and plasma electron temperature on ion beam optics is examined, and the calculation reliability is confirmed by experimental results. In order to improve ion beam optics, the application of a small pre-acceleration voltage ({approx}100 V) between the plasma electrode and the arc discharge anode is reasonable, and a lower plasma electron temperature is desired. The results allow optimization of the ion beam optics in the neutral beam injection system on HL-2A Tokomak and provide guidelines for designing future neutral beam injection system on HL-2M Tokomak.

Optics of ion beams for the neutral beam injection system on HL-2A Tokamak.

Science.gov (United States)

Zou, G Q; Lei, G J; Cao, J Y; Duan, X R

2012-07-01

The ion beam optics for the neutral beam injection system on HL-2A Tokomak is studied by two- dimensional numerical simulation program firstly, where the emitting surface is taken at 100 Debye lengths from the plasma electrode. The mathematical formulation, computation techniques are described. Typical ion orbits, equipotential contours, and emittance diagram are shown. For a fixed geometry electrode, the effect of plasma density, plasma potential and plasma electron temperature on ion beam optics is examined, and the calculation reliability is confirmed by experimental results. In order to improve ion beam optics, the application of a small pre-acceleration voltage (∼100 V) between the plasma electrode and the arc discharge anode is reasonable, and a lower plasma electron temperature is desired. The results allow optimization of the ion beam optics in the neutral beam injection system on HL-2A Tokomak and provide guidelines for designing future neutral beam injection system on HL-2M Tokomak.

Beam systems without failures - What can be done?

International Nuclear Information System (INIS)

Solfaroli Camillocci, M.; Uythoven, J.

2012-01-01

The beam dumps at 3.5 TeV triggered by interlocks not related to the magnet powering are discussed. This concerns the systems like the RF, the transverse feedbacks, beam instrumentation, beam dumping system, collimators and control systems. An analysis of the reasons of these dumps is presented together with a possible strategy to mitigate the effect of these failures. It is very important to notice that no system has been identified to have any structural problem

Modematic: a fast laser beam analyzing system for high power CO2-laser beams

Science.gov (United States)

Olsen, Flemming O.; Ulrich, Dan

2003-03-01

The performance of an industrial laser is very much depending upon the characteristics of the laser beam. The ISO standards 11146 and 11154 describing test methods for laser beam parameters have been approved. To implement these methods in industry is difficult and especially for the infrared laser sources, such as the CO2-laser, the availabl analyzing systems are slow, difficult to apply and having limited reliability due to the nature of the detection methods. In an EUREKA-project the goal was defined to develop a laser beam analyzing system dedicated to high power CO2-lasers, which could fulfill the demands for an entire analyzing system, automating the time consuming pre-alignment and beam conditioning work required before a beam mode analyses, automating the analyzing sequences and data analysis required to determine the laser beam caustics and last but not least to deliver reliable close to real time data to the operator. The results of this project work will be described in this paper. The research project has led to the development of the Modematic laser beam analyzer, which is ready for the market.

THE RHIC BEAM ABORT KICKER SYSTEM

International Nuclear Information System (INIS)

Hahn, H.

1999-01-01

THE ENERGY STORED IN THE RHIC BEAM IS ABOUT 200 KJ PER RING AT DESIGN ENERGY AND INTENSITY. TO PREVENT QUENCHING OF THE SUPERCONDUCTING MAGNETS OR MATERIAL DAMAGE, THE BEAM WILL BE SAFELY DISPOSED OF BY AN INTERNAL BEAM ABORT SYSTEM, WHICH INCLUDES THE KICKER MAGNETS, THE PULSED POWER SUPPLIES, AND THE DUMP ABSORBER. DISPOSAL OF HEAVY IONS, SUCH AS GOLD, IMPOSES DESIGN CONSTRAINTS MORE SEVERE THAN THOSE FOR PROTON BEAMS OF EQUAL INTENSITY. IN ORDER TO MINIMIZE THE THERMAL SHOCK IN THE CARBON-FIBER DUMP BLOCK, THE BUNCHES MUST BE LATERALLY DISPERSED

Beam Tracking in Switched-Beam Antenna System for V2V Communication

Directory of Open Access Journals (Sweden)

Settawit Poochaya

2016-01-01

Full Text Available This paper presents the proposed switched beam antenna system for V2V communication including optimum antenna half power beamwidth determination in urban road environments. SQP optimization method is selected for the computation of optimum antenna half power beamwidth. In addition, beam tracking algorithm is applied to guarantee the best beam selection with maximum RSSI. The results present the success of the proposed system with the increasing of V2V performance metrics. Also, V2V data dissemination via the proposed system introduces the enhancement of V2V link in terms of RSSI, PER, BER, Tsafe, and Rsafe. The results indicate the improvement of V2V link reliability. Consequently, the road safety is improved.

Micromachined integrated quantum circuit containing a superconducting qubit

Science.gov (United States)

Brecht, Teresa; Chu, Yiwen; Axline, Christopher; Pfaff, Wolfgang; Blumoff, Jacob; Chou, Kevin; Krayzman, Lev; Frunzio, Luigi; Schoelkopf, Robert

We demonstrate a functional multilayer microwave integrated quantum circuit (MMIQC). This novel hardware architecture combines the high coherence and isolation of three-dimensional structures with the advantages of integrated circuits made with lithographic techniques. We present fabrication and measurement of a two-cavity/one-qubit prototype, including a transmon coupled to a three-dimensional microwave cavity micromachined in a silicon wafer. It comprises a simple MMIQC with competitive lifetimes and the ability to perform circuit QED operations in the strong dispersive regime. Furthermore, the design and fabrication techniques that we have developed are extensible to more complex quantum information processing devices.

Neutral-beam systems for magnetic-fusion reactors

International Nuclear Information System (INIS)

Fink, J.H.

1981-01-01

Neutral beams for magnetic fusion reactors are at an early stage of development, and require considerable effort to make them into the large, reliable, and efficient systems needed for future power plants. To optimize their performance to establish specific goals for component development, systematic analysis of the beamlines is essential. Three ion source characteristics are discussed: arc-cathode life, gas efficiency, and beam divergence, and their significance in a high-energy neutral-beam system is evaluated

Spiral kicker for the beam abort system

Energy Technology Data Exchange (ETDEWEB)

Martin, R.L.

1983-01-01

A brief study was carried out to determine the feasibility of a special kicker to produce a damped spiral beam at the beam dump for the beam abort system. There appears to be no problem with realizing this concept at a reasonably low cost.

Spiral kicker for the beam abort system

International Nuclear Information System (INIS)

Martin, R.L.

1983-01-01

A brief study was carried out to determine the feasibility of a special kicker to produce a damped spiral beam at the beam dump for the beam abort system. There appears to be no problem with realizing this concept at a reasonably low cost

Design challenges for stepper motor actuated microvalve based on fine and micro-machining

NARCIS (Netherlands)

Fazal, I.; Elwenspoek, Michael Curt

2007-01-01

We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the

Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

Real-time beam profile imaging system for actinotherapy accelerator

International Nuclear Information System (INIS)

Lin Yong; Wang Jingjin; Song Zheng; Zheng Putang; Wang Jianguo

2003-01-01

This paper describes a real-time beam profile imaging system for actinotheraphy accelerator. With the flash X-ray imager and the technique of digital image processing, a real-time 3-dimension dosage image is created from the intensity profile of the accelerator beam in real time. This system helps to obtain all the physical characters of the beam in any section plane, such as FWHM, penumbra, peak value, symmetry and homogeneity. This system has been used to acquire a 3-dimension dosage distribution of dynamic wedge modulator and the transient process of beam dosage. The system configure and the tested beam profile images are also presented

On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

KAUST Repository

Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; Sedky, Sherif; Soliman, Ezzeldin A.

2016-01-01

In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

KAUST Repository

Sallam, Mai O.

2016-12-19

In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

Resistive-wall Wake Effect in the Beam Delivery System

International Nuclear Information System (INIS)

Delayen, J.R.; Jefferson Lab; Wu, Juhao; Raubenheimer, T.O.; SLAC; Wang, Jiunn-Ming; BNL, NSLS

2005-01-01

General formulae for resistive-wall induced beam dilution are presented and then applied to the final beam delivery system of linear colliders. Criteria for the design of final beam delivery systems are discussed

Demonstration of superconducting micromachined cavities

Energy Technology Data Exchange (ETDEWEB)

Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

2015-11-09

Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

The ATLAS beam pick-up based timing system

International Nuclear Information System (INIS)

Ohm, C.; Pauly, T.

2010-01-01

The ATLAS BPTX stations are composed of electrostatic button pick-up detectors, located 175 m away along the beam pipe on both sides of ATLAS. The pick-ups are installed as a part of the LHC beam instrumentation and used by ATLAS for timing purposes. The usage of the BPTX signals in ATLAS is twofold: they are used both in the trigger system and for LHC beam monitoring. The BPTX signals are discriminated with a constant-fraction discriminator to provide a Level-1 trigger when a bunch passes through ATLAS. Furthermore, the BPTX detectors are used by a stand-alone monitoring system for the LHC bunches and timing signals. The BPTX monitoring system measures the phase between collisions and clock with a precision better than 100 ps in order to guarantee a stable phase relationship for optimal signal sampling in the sub-detector front-end electronics. In addition to monitoring this phase, the properties of the individual bunches are measured and the structure of the beams is determined. On September 10, 2008, the first LHC beams reached the ATLAS experiment. During this period with beam, the ATLAS BPTX system was used extensively to time in the read-out of the sub-detectors. In this paper, we present the performance of the BPTX system and its measurements of the first LHC beams.

Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

International Nuclear Information System (INIS)

Kim, Yong-Sik; Dagalakis, Nicholas G; Gupta, Satyandra K

2013-01-01

Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage are presented based on bulk micromachining technologies. This stage is electrothermally actuated for out-of-plane motion by incorporating beams with step features. The fabricated motion stage has demonstrated displacements of 85 µm with 0.4 µm (mA) −1 rates and generated up to 11.8 mN forces with stiffness of 138.8 N m −1 . These properties obtained from the presented stage are comparable to those for in-plane motion stages, therefore making this out-of-plane stage useful when used in combination with in-plane motion stages. (paper)

Ga{sup +} implantation in a PZT film during focused ion beam micro-machining

Energy Technology Data Exchange (ETDEWEB)

Wollschlaeger, Nicole; Oesterle, Werner; Haeusler, Ines [Federal Institute for Materials Research and Testing, Unter den Eichen 87, 12205 Berlin (Germany); Stewart, Mark [National Physical Laboratory, Hampton Road, Teddington Middlesex TW 11 0LW (United Kingdom)

2015-03-01

The objective of the present work was to study the impact of Focused Ion Beam (FIB) machining parameters on the thickness of the damaged layer within a thin film PZT. Therefore, different Ga{sup +}- ion doses and ion energies were applied to a standard PZT film (80/20 lead zirconium titanate) under two beam incidence angles (90 and 1 ). The thicknesses of the corresponding Ga{sup +}-implanted layers were then determined by cross-sectional TEM in combination with energy dispersive spectroscopic (EDS) line-scans and correlated with polarisation hysteresis loops. The results show a decrease of Ga{sup +}-implanted layer thickness with decreasing inclination angle, whereas ion energy and ion dose could be correlated with gallium concentration in the implanted layers. Under the most unfavorable conditions the depth of the affected zone was 26 nm, it was only 2 nm for the most favorable conditions. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications

International Nuclear Information System (INIS)

Kakati, A; Maji, D; Das, S

2017-01-01

Micromachining of a polydimethylsiloxane (PDMS) microstructure by wet chemical etching is explored for microelectromechanical systems (MEMS) and microfluidic applications. A 100 µ m thick PDMS film was patterned with different microstructure designs by wet chemical etching using a N-methyl-2-pyrrolidone (C 16 H 36 FN) and tetra-n-butylammonium fluoride (C 5 H 9 NO) mixture solution with 3:1 volume ratio after lithography for studying etching characteristics. The patterning parameters, such as etch rate, surface roughness, pH of etchant solution with time, were thoroughly investigated. A detailed study of surface morphology with etching time revealed nonlinear behaviour of the PDMS surface roughness and etch rate. A maximum rate of 1.45 µ m min −1 for 10 min etching with surface roughness of 360 nm was achieved. A new approach of wet chemical etching with pH controlled doped etchant was introduced for lower surface roughness of etched microstructures, and a constant etch rate during etching. Variation of the etching rate and surface roughness by pH controlled etching was performed by doping 5–15 gm l −1 of silicic acid (SiO 2xH2 O) into the traditional etchant solution. PDMS etching by silicic acid doped etchant solution showed a reduction in surface roughness from 400 nm to 220 nm for the same 15 µ m etching. This study is beneficial for micromachining of various MEMS and microfluidic structures such as micropillars, microchannels, and other PDMS microstructures. (paper)

Molecular-beam epitaxial growth and ion-beam analysis systems for functional materials research

International Nuclear Information System (INIS)

Takeshita, H.; Aoki, Y.; Yamamoto, S.; Naramoto, H.

1992-01-01

Experimental systems for molecular beam epitaxial growth and ion beam analysis have been designed and constructed for the research of inorganic functional materials such as thin films and superlattices. (author)

Project: Micromachined High-Frequency Circuits For Sub-mm-wave Sensors

Science.gov (United States)

Papapolymerou, Ioannis John

2004-01-01

A novel micromachined resonator at 45 GHz based on a defect in a periodic electromagnetic bandgap structure (EBG) and a two-pole Tchebysbev filter with 1.4% 0.15 dB equiripple bandwidth and 2.3 dB loss employing this resonator are presented in this letter. The periodic bandgap structure is realized on a 400 micron thick high-resistivity silicon wafer using deep reactive ion etching techniques. The resonator and filter can be accessed via coplanar waveguide feeds.

Detection systems for radioactive ion beams

International Nuclear Information System (INIS)

Savajols, H.

2002-01-01

Two main methods are used to produce radioactive ion beams: -) the ISOL method (isotope separation on-line) in which the stable beam interacts with a thick target, the reaction products diffuse outside the target and are transferred to a source where they are ionized, a mass separator and a post-accelerator drive the selected radioactive ions to the right energy; -) the in-flight fragmentation method in which the stable beam interacts with a thin target, the reaction products are emitted from the target with a restricted angular distribution and a velocity close to that of the incident beam, the experimenter has to take advantage from the reaction kinetics to get the right particle beam. Characteristic time is far longer with the ISOL method but the beam intensity is much better because of the use of a post-accelerator. In both cases, the beam intensity is lower by several orders of magnitude than in the case of a stable beam. This article presents all the constraints imposed by radioactive beams to the detection systems of the reaction products and gives new technical solutions according to the type of nuclear reaction studied. (A.C.)

High-power ultrashort fiber laser for solar cells micromachining

Science.gov (United States)

Lecourt, J.-B.; Duterte, C.; Liegeois, F.; Lekime, D.; Hernandez, Y.; Giannone, D.

2012-02-01

We report on a high-power ultra-short fiber laser for thin film solar cells micromachining. The laser is based on Chirped Pulse Amplification (CPA) scheme. The pulses are stretched to hundreds of picoseconds prior to amplification and can be compressed down to picosecond at high energy. The repetition rate is adjustable from 100 kHz to 1 MHz and the optical average output power is close to 13 W (before compression). The whole setup is fully fibred, except the compressor achieved with bulk gratings, resulting on a compact and reliable solution for cold ablation.

An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold

International Nuclear Information System (INIS)

Lee, Jin Seung; Lee, Seung S

2008-01-01

In this paper, a novel approach is developed to design an isotropic suspension system using thick metal freestanding micro-structures combining bulk micro-machining with electroplating based on a HAR SU-8 mold. An omega-shape isotropic suspension system composed of circular curved beams that have free switching of imaginary boundary conditions is proposed. This novel isotropic suspension design is not affected by geometric dimensional parameters and always achieves matching stiffness along the principle axes of elasticity. Using the finite element method, the isotropic suspension system was compared with an S-shaped meandering suspension system. In order to realize the suggested isotropic suspension system, a cost-effective fabrication process using electroplating with the SU-8 mold was developed to avoid expensive equipment and materials such as deep reactive-ion etching (DRIE) or a silicon-on-insulator (SOI) wafer. The fabricated isotropic suspension system was verified by electromagnetic actuation experiments. Finally, a biaxial accelerometer with isotropic suspension system was realized and tested using a vibration generator system. The proposed isotropic suspension system and the modified surface micro-machining technique based on electroplating with an SU-8 mold can contribute towards minimizing the system size, simplifying the system configuration, reducing the system price of and facilitating mass production of various types of low-cost sensors and actuators

Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

KAUST Repository

Demiral, Murat; Roy, Anish; El Sayed, Tamer S.; Silberschmidt, Vadim V.

2014-01-01

of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal

Double deflection system for an electron beam device

International Nuclear Information System (INIS)

Parker, N.W.; Crewe, A.V.

1978-01-01

A double deflection scanning system for electron beam instruments is provided embodying a means of correcting isotropic coma, and anisotropic coma aberrations induced by the magnetic lens of such an instrument. The scanning system deflects the beam prior to entry into the magnetic lens from the normal on-axis intersection of the beam with the lens according to predetermined formulas and thereby reduces the aberrations

LHC beam dump system Consequences of abnormal operation

CERN Document Server

Kramer, T; Uythoven, J

2010-01-01

The LHC beam dump system is one of the most critical systems concerning machine protection and safe operation. It is used to dispose of high intensity beams between 450 GeV and 7 TeV. Studies into the consequences of abnormal beam dump actions have been performed. Different error scenarios have been evaluated using particle tracking in MAD-X, including an asynchronous dump action, and the impact of different orbit and collimator settings. Losses at locations in the ring and the beam dump transfer lines have been quantified as a function of different settings of the dump system protection elements. The implications for the setting up and operation of these protection elements are discussed.

The Saturne beam measurement system for orbit corrections and high and low intensity beam acceleration

International Nuclear Information System (INIS)

Degueurce, L.; Nakach, A.; Sole, J.

1980-07-01

This paper summarizes the dipolar and multipolar correction system and the main beam diagnostics of Saturne II: wide-band RF electrostatic pick-up electrode for observation of bunches, beam position and tune measurement systems, special electrodes for observation of emittance blow-up when particles cross a resonance line. For low intensity beams, special electrodes and electronics have been developed. All this instrumentation is computer controlled

Development of KSTAR Neutral Beam Heating System

Energy Technology Data Exchange (ETDEWEB)

Oh, B. H.; Song, W. S.; Yoon, B. J. (and others)

2007-10-15

The prototype components of a neutral beam injection (NBI) system have been developed for the KSTAR, and a capability of the manufactured components has been tested. High power ion source, acceleration power supply, other ion source power supplies, neutralizer, bending magnet for ion beam separation, calorimeter, and cryo-sorption pump have been developed by using the domestic technologies and tested for a neutral beam injection of 8 MW per beamline with a pulse duration of 300 seconds. The developed components have been continuously upgraded to achieve the design requirements. The development technology of high power and long pulse neutral beam injection system has been proved with the achievement of 5.2 MW output for a short pulse length and 1.6 MW output for a pulse length of 300 seconds. Using these development technologies, the domestic NB technology has been stabilized under the development of high power ion source, NB beamline components, high voltage and current power supplies, NB diagnostics, NB system operation and control.

Multi-slit triode ion optical system with ballistic beam focusing

Energy Technology Data Exchange (ETDEWEB)

Davydenko, V., E-mail: V.I.Davydenko@inp.nsk.su; Amirov, V.; Gorbovsky, A.; Deichuli, P.; Ivanov, A.; Kolmogorov, A.; Kapitonov, V.; Mishagin, V.; Shikhovtsev, I.; Sorokin, A.; Stupishin, N. [Budker Institute of Nuclear Physics, Novosibirsk 630090 (Russian Federation); Karpushov, A. N. [Ecole Polytechnique Fédérale de Lausanne, Centre de Recherches en Physique des Plasmas (CRPP), CH-1015 Lausanne (Switzerland); Smirnov, A. [Tri Alpha Energy, Inc., Rancho Santa Margarita, California 92688 (United States); Uhlemann, R. [Institute of Energy and Climate Research-Plasma Physics, Research Center Juelich, 52425 Juelich (Germany)

2016-02-15

Multi-slit triode ion-optical systems with spherical electrodes are of interest for formation of intense focused neutral beams for plasma heating. At present, two versions of focusing multi-slit triode ion optical system are developed. The first ion optical system forms the proton beam with 15 keV energy, 140 A current, and 30 ms duration. The second ion optical system is intended for heating neutral beam injector of Tokamak Configuration Variable (TCV). The injector produces focused deuterium neutral beam with 35 keV energy, 1 MW power, and 2 s duration. In the later case, the angular beam divergence of the neutral beam is 20-22 mrad in the direction across the slits of the ion optical system and 12 mrad in the direction along the slits.

Review of piezoelectric micromachined ultrasonic transducers and their applications

International Nuclear Information System (INIS)

Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

2017-01-01

In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

Review of piezoelectric micromachined ultrasonic transducers and their applications

Science.gov (United States)

Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

2017-11-01

In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

Directory of Open Access Journals (Sweden)

Yan Deng

2014-10-01

Full Text Available A novel multifrequency excitation (MFE method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

Neutral beam systems for the magnetic fusion program

International Nuclear Information System (INIS)

Beal, J.W.; Staten, H.S.

1977-01-01

The attainment of economic, safe fusion power has been described as the most sophisticated scientific problem ever attacked by mankind. The presently established goal of the magnetic fusion program is to develop and demonstrate pure fusion central electric power stations for commercial applications. Neutral beam heating systems are a basic component of the tokamak and mirror experimental fusion plasma confinement devices. The requirements placed upon neutral beam heating systems are reviewed. The neutral beam systems in use or being developed are presented. Finally, the needs of the future are discussed

Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

2005-01-01

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

Development of an energy analyzer as diagnostic of beam-generated plasma in negative ion beam systems

Science.gov (United States)

Sartori, E.; Carozzi, G.; Veltri, P.; Spolaore, M.; Cavazzana, R.; Antoni, V.; Serianni, G.

2017-08-01

The measurement of the plasma potential and the energy spectrum of secondary particles in the drift region of a negative ion beam offers an insight into beam-induced plasma formation and beam transport in low pressure gasses. Plasma formation in negative-ion beam systems, and the characteristics of such a plasma are of interest especially for space charge compensation, plasma formation in neutralizers, and the development of improved schemes of beam-induced plasma neutralisers for future fusion devices. All these aspects have direct implications in the ITER Heating Neutral Beam and the operation of the prototypes, SPIDER and MITICA, and also have important role in the conceptual studies for NBI systems of DEMO, while at present experimental data are lacking. In this paper we present the design and development of an ion energy analyzer to measure the beam plasma formation and space charge compensation in negative ion beams. The diagnostic is a retarding field energy analyzer (RFEA), and will measure the transverse energy spectra of plasma molecular ions. The calculations that supported the design are reported, and a method to interpret the measurements in negative ion beam systems is also proposed. Finally, the experimental results of the first test in a magnetron plasma are presented.

Transformation instability of oscillations in inhomogeneous beam-plasma system

International Nuclear Information System (INIS)

Kitsenko, A.B.

1985-01-01

Wave transformation is studied in a plasma system which was weak-inhomogeneous along beam velocity, in absence of external magnetic field. For the case of small density beam formulae are obtained which have set a coupling between the charge density beam wave amplitudes and the Langmuir wave on both sides of transformation point. It is shown that in collisionless plasma the wave production is a cause of the absorption of the charge density beam waves. Transformation mechanism of the absolute instability in the weak-inhomogeneous beam-plasma system is revealed

System for combining laser beams of diverse frequencies

International Nuclear Information System (INIS)

1980-01-01

A system is described for combining laser beams of different frequencies into a number of beams each comprising laser radiation having components of each of the different frequencies. The system can be used in laser isotope separation facilities. (U.K.)

Neutral beam injection system design for KSTAR tokamak

Energy Technology Data Exchange (ETDEWEB)

Choi, B.H.; Lee, K.W.; Chung, K.S.; Oh, B.H.; Cho, Y.S.; Bae, Y.D.; Han, J.M. [Korea Atomic Energy Research Institute, Taejon (Korea)

1998-06-01

The NBI system for KSTAR (Korean Superconducting Tokamak Advanced Research) has been designed based on conventional positive ion beam technology. One beam line consists of three ion sources, three neutralizers, one bending magnet, and one drift tube. This system will deliver 8 MW deuterium beam to KSTAR plasma in normal operation to support the advanced experiments on heating, current drive and profile control. The key technical issues in this design were high power ion source(120 kV, 65 A), long pulse operation (300 seconds; world record is 30 sec), and beam rotation from vertical to horizontal direction. The suggested important R and D points on ion source and beam line components are also included. (author). 7 refs., 27 figs., 1 tab.

A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

Directory of Open Access Journals (Sweden)

Leila Ladani

2010-12-01

Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

A beam position monitor system for electron cooler in HIRFL-CSR

International Nuclear Information System (INIS)

Li Guohong; Li Jie; Yang Xiaodong; Yan Tailai; Ma Xiaoming

2010-01-01

The efficient electron cooling requires that the ion beam and electron beam are parallel and overlapped. In order to measure the positions of ion beam and electron beam simultaneously, a beam position monitor system is developed for the HIRFL-CSR electron cooler device, which probe consists of four capacitive cylinder linear-cut poles. One can get the both beam positions from the picking up signals of four poles by using Fourier transform (FFT) method. The measurement results show that the beam position monitor system is accurate. This system is suitable for investigating the relation between electron cooling processing and the angle of ion beam and electron beam. (authors)

Three-dimensional patterning in polymer optical waveguides using focused ion beam milling

Science.gov (United States)

Kruse, Kevin; Burrell, Derek; Middlebrook, Christopher

2016-07-01

Waveguide (WG) photonic-bridge taper modules are designed for symmetric planar coupling between silicon WGs and single-mode fibers (SMFs) to minimize photonic chip and packaging footprint requirements with improving broadband functionality. Micromachined fabrication and evaluation of polymer WG tapers utilizing high-resolution focused ion beam (FIB) milling is performed and presented. Polymer etch rates utilizing the FIB and optimal methods for milling polymer tapers are identified for three-dimensional patterning. Polymer WG tapers with low sidewall roughness are manufactured utilizing FIB milling and optically tested for fabrication loss. FIB platforms utilize a focused beam of ions (Ga+) to etch submicron patterns into substrates. Fabricating low-loss polymer WG taper prototypes with the FIB before moving on to mass-production techniques provides theoretical understanding of the polymer taper and its feasibility for connectorization devices between silicon WGs and SMFs.

RHIC beam loss monitor system design

International Nuclear Information System (INIS)

Witkover, R.; Zitvogel, E.; Michnoff, R.

1997-01-01

The Beam Loss Monitor (BLM) System is designed to prevent the quenching of RHIC magnets due to beam loss, provide quantitative loss data, and the loss history in the event of a beam abort. The system uses 400 ion chambers of a modified Tevatron design. To satisfy fast (single turn) and slow (100 msec) loss beam criteria and provide sensitivity for studies measurements, a range of over 8 decades is needed. An RC pre-integrator reduces the dynamic range for a low current amplifier. This is digitized for data logging. The output is also applied to an analog multiplier which compensates the energy dependence, extending the range of the abort comparators. High and low pass filters separate the signal to dual comparators with independent programmable trip levels. Up to 64 channels, on 8 VME boards, are controlled by a micro-controller based VME module, decoupling it from the front-end computer (FEC) for real-time operation. Results with the detectors in the RHIC Sextant Test and the electronics in the AGS-to-RHIC (AtR) transfer line will be presented

Electron gun design study for the IUCF beam cooling system

International Nuclear Information System (INIS)

Friesel, D.L.; Ellison, T.; Jones, W.P.

1985-01-01

The design of a low temperature electron beam cooling system for the Indiana University electron-cooled storage ring is in progress. The storage ring, which will accept the light ion beams from the existing k=200, multi-stage cyclotron facility, requires an electron beam variable in energy from about 7 to 275 keV. The electron beam system consists of a high perveance electron gun with Pierce geometry and a flat cathode. The gun and a 28 element accelerating column are immersed in a uniform longitudinal magnetic guide field. A computer modeling study of the system was conducted to determine electron beam density and transverse temperature variations as a function of anode region and accelerator column design parameters. Transverse electron beam temperatures (E /SUB t/ = mc 2 β 2 γ(/theta/ /SUB H/ +/theta/ /SUB v/ )) of less than a few tenths of an electron volt at a maximum current density of 0.4 A/cm 2 are desired over the full energy range. This was achieved in the calculations without the use of resonant focusing for a 2 Amp, 275 keV electron beam. Some systematics of the electron beam temperature variations with system design parameters are presented. A short discussion of the mechanical design of the proposed electron beam system is also given

Realization of a diamond based high density multi electrode array by means of Deep Ion Beam Lithography

International Nuclear Information System (INIS)

Picollo, F.; Battiato, A.; Bernardi, E.; Boarino, L.; Enrico, E.; Forneris, J.; Gatto Monticone, D.; Olivero, P.

2015-01-01

In the present work we report about a parallel-processing ion beam fabrication technique whereby high-density sub-superficial graphitic microstructures can be created in diamond. Ion beam implantation is an effective tool for the structural modification of diamond: in particular ion-damaged diamond can be converted into graphite, therefore obtaining an electrically conductive phase embedded in an optically transparent and highly insulating matrix. The proposed fabrication process consists in the combination of Deep Ion Beam Lithography (DIBL) and Focused Ion Beam (FIB) milling. FIB micromachining is employed to define micro-apertures in the contact masks consisting of thin (<10 μm) deposited metal layers through which ions are implanted in the sample. A prototypical single-cell biosensor was realized with the above described technique. The biosensor has 16 independent electrodes converging inside a circular area of 20 μm diameter (typical neuroendocrine cells size) for the simultaneous recording of amperometric signals

Diffraction measurements using the LHC Beam Loss Monitoring System

Science.gov (United States)

Kalliokoski, Matti

2017-03-01

The Beam Loss Monitoring (BLM) system of the Large Hadron Collider protects the machine from beam induced damage by measuring the absorbed dose rates of beam losses, and by triggering beam dump if the rates increase above the allowed threshold limits. Although the detection time scales are optimized for multi-turn losses, information on fast losses can be recovered from the loss data. In this paper, methods in using the BLM system in diffraction studies are discussed.

LHC beam dump system : analysis of beam commissioning, performance and the consequences of abnormal operation

International Nuclear Information System (INIS)

Kramer, T.

2011-01-01

The LHC accelerates proton beams to a momentum of up to 7 TeV/c. At this energy level and with nominal beam intensity the stored energy of 360 MJ per beam is sufficient to melt 500 kg of copper. In addition up to 10 GJ are stored within the LHC magnet system at top energy. lt is obvious that such a machine needs well designed safety and protection systems. The LHC Beam Dump System (LBDS) is such a system and one of the most critical once concerning machine protection and safe operation. lt is used to dispose of high intensity beams between 450 GeV and 7 TeV and is thus designed to fast extract beam in a loss free way and to transfer it to an external absorber. For each ring systems of 15 horizontal fast kicker magnets (MKD), 15 vertically deflecting magnetic septa (MSD) and 10 diluter kicker magnets (MKB) are installed. This thesis is concerned with the analysis of the LBDS performance under normal operating parameters as well as under abnormal conditions like in the event of asynchronous beam abort or missing MKD elements. Therefore a sophisticated simulation environment was developed based on the use of the MAD-X tracking code. A system of tracking jobs was set up to study failure cases and losses for various dump events. Those jobs can be distributed to available CPU power and be calculated in parallel. Studies into the consequences of abnormal beam dump actions have been performed. Different error scenarios have been evaluated including an asynchronous dump action, prefire cases, and the impact of different orbit and collimator settings. Losses at locations in the ring and the beam dump transfer lines have been quantified as a function of different settings of the dump system protection elements. The implications for the setup and operation of these protection elements are discussed. Particle distributions can be created according to the used orbit. Simulations with different orbit parameters (including magnet field errors, beam position read out errors

Electron cyclotron beam measurement system in the Large Helical Device

Energy Technology Data Exchange (ETDEWEB)

Kamio, S., E-mail: kamio@nifs.ac.jp; Takahashi, H.; Kubo, S.; Shimozuma, T.; Yoshimura, Y.; Igami, H.; Ito, S.; Kobayashi, S.; Mizuno, Y.; Okada, K.; Osakabe, M.; Mutoh, T. [National Institute for Fusion Science, Toki 509-5292 (Japan)

2014-11-15

In order to evaluate the electron cyclotron (EC) heating power inside the Large Helical Device vacuum vessel and to investigate the physics of the interaction between the EC beam and the plasma, a direct measurement system for the EC beam transmitted through the plasma column was developed. The system consists of an EC beam target plate, which is made of isotropic graphite and faces against the EC beam through the plasma, and an IR camera for measuring the target plate temperature increase by the transmitted EC beam. This system is applicable to the high magnetic field (up to 2.75 T) and plasma density (up to 0.8 × 10{sup 19} m{sup −3}). This system successfully evaluated the transmitted EC beam profile and the refraction.

Low energy beam transport system developments

Energy Technology Data Exchange (ETDEWEB)

Dudnikov, V., E-mail: vadim@muonsinc.com [Muons, Inc., Batavia, IL 60510 (United States); Han, B.; Stockli, M.; Welton, R. [ORNL, Oak Ridge, TN 37831 (United States); Dudnikova, G. [University of Maryland, College Park, MD 3261 (United States); Institute of Computational Technologies SBRAS, Novosibirsk (Russian Federation)

2015-04-08

For high brightness beam production it is important to preserve the brightness in the low energy beam transport system (LEBT) used to transport and match the ion beams to the next stage of acceleration, usually an RFQ. While electrostatic focusing can be problematic for high current beam transport, reliable electrostatic LEBT operation has been demonstrated with H{sup −} beams up to 60 mA. Now, however, it is commonly accepted that an optimal LEBT for high current accelerator applications consists of focusing solenoids with space charge compensation. Two-solenoid LEBTs are successfully used for high current (>100 mA) proton beam transport. Preservation of low emittances (~0.15 π mm-mrad) requires the addition of a heavy gas (Xe, Kr), which causes ~5% of proton loss in a 1 m long LEBT. Similar Xe densities would be required to preserve low emittances of H{sup −} beams, but such gas densities cause unacceptably high H{sup −} beam losses. A short LEBT with only one short solenoid, movable for RFQ matching, can be used for reduced negative ion stripping. A strong electrostatic-focusing LEBT has been successfully adopted for transport of high current H{sup −} beams in the SNS Front End. Some modifications of such electrostatic LEBTs are expected to improve the reliable transport of intense positive and negative ion beams without greatly degrading their low emittances. We concentrate on processes that determine the beam brightness degradation and on their prevention. Proposed improvements to the SNS electrostatic LEBT are discussed.

An automatic beam steering system for the NSLS X-17T beam line using closed orbit feedback

International Nuclear Information System (INIS)

Nawrocky, R.J.; Ma, Li; Rarback, H.M.; Singh, O.V.; Yu, L.H.

1987-01-01

Initial observations of motion of the undulator radiation in the NSLS X-17T beam line clearly indicated that the beam had to be stabilized in both directions to be usable for the planned soft x-ray imaging experiments. The low frequency spectra of beam motion contained peaks in the range from dc to 60 Hz and at higher frequencies. A beam steering system employing closed orbit feedback has been designed and installed to stabilize the beam in both planes. In each plane of motion, beam position is measured with a beam position detector and a correction signal is fed back to a local four magnet orbit bump to dynamically control the angle of the radiation at the source. This paper describes the design and performance of the beam steering system

Imagescope to photodiode beam-profile imaging system

International Nuclear Information System (INIS)

Chamberlin, D.D.; Hollabaugh, J.S.; Stump, C.J. Jr.

1983-01-01

Transverse beam-distribution measurements of high-current cw accelerators must be obtained from noninterceptive sensors. For the 100-mA H 2 or D beam of the Fusion Materials Irradiation Tst (FMIT) accelerator, these transverse properties may be obtained by detecting the visible radiation resulting from beam interactions with residual gas. A system of mirrors, intensified TV cameras, digitizers, and topographic reconstruction codes has been reported previously. This report describes a new technique for sensing and digitizing the light projected transversely from the beam of the FMIT accelerator at Los Alamos National Laboratory

Excimer laser beam delivery systems for medical applications

Science.gov (United States)

Kubo, Uichi; Hashishin, Yuichi; Okada, Kazuyuki; Tanaka, Hiroyuki

1993-05-01

We have been doing the basic experiments of UV laser beams and biotissue interaction with both KrF and XeCl lasers. However, the conventional optical fiber can not be available for power UV beams. So we have been investigating about UV power beam delivery systems. These experiments carry on with the same elements doped quartz fibers and the hollow tube. The doped elements are OH ion, chlorine and fluorine. In our latest work, we have tried ArF excimer laser and biotissue interactions, and the beam delivery experiments. From our experimental results, we found that the ArF laser beam has high incision ability for hard biotissue. For example, in the case of the cow's bone incision, the incision depth by ArF laser was ca.15 times of KrF laser. Therefore, ArF laser would be expected to harden biotissue therapy as non-thermal method. However, its beam delivery is difficult to work in this time. We will develop ArF laser beam delivery systems.

Development of the TFTR neutral beam injection system

International Nuclear Information System (INIS)

Prichard, B.A. Jr.

1977-01-01

The TFTR Neutral Beam Lines are designed to inject 20 MW of 120 keV neutral deuterium atoms into the plasma. This is accomplished using 12 sources, 65 amperes each, mounted in 4 beam lines. The 120 kV sources and a prototype beam line are being developed. The implementation of these beam lines has required the development of several associated pieces of hardware. 200 kV switch tubes for the power supplies are being developed for modulation and regulation of the accelerating supplies. A 90 cm metallic seal gate valve capable of sealing against atmosphere in either direction is being developed for separating the torus and beam line vacuum systems. A 70 x 80 cm fast shutter valve is also being developed to limit tritium migration from the torus into the beam line. Internal to the beam line a calorimeter, ion dump and deflection magnet have been designed to handle three beams, and optical diagnostics utilizing the doppler broadening and doppler shift of light emitted from the accelerated beam are being developed. The control and monitoring of the 12 sources will be done via the TFTR computer control system (CICADA) as will other parts of the machine, and software is being developed to condition and operate the sources automatically. The prototype beam line is scheduled to begin operation in the fall of 1978 and all four production beam lines on TFTR in 1982

Fast feedback system for energy and beam stabilization

International Nuclear Information System (INIS)

R. Dickson; V. Lebedev

1999-01-01

The electron beams being delivered to targets of the Continuous Electron Beam Accelerator Facility (CEBAF) at Thomas Jefferson National Accelerator Facility (Jefferson Lab) are plagued with undesirable positional and energy fluctuations. These fluctuations primarily occur at harmonics of the power line frequency (60, 120, 180, etc. hertz), and their cause is rooted in electromagnetic fields generated by accelerator electronic equipment. It is possible to largely nullify these deviations by applying real time corrections to electromagnets and RF verniers along the beam line. This concept has been successfully applied at Jefferson Lab by extensively modifying the existing Beam Position Monitor (BPM) system with the integration of an algorithm that computes correction signals targeted at the power line harmonics. Many of the modifications required were due to the existing CEBAF BPM system not having the data acquisition bandwidth needed for this type of feedback system. This paper will describe the techniques required to transform the CEBAF standard BPM system into a high speed practical fast feedback system that coexists with the large scale control system--the Experimental Physics and Industrial Control System (EPICS)--that runs the CEBAF accelerator in daily operation

A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

Science.gov (United States)

Yi, Zhenxiang; Liao, Xiaoping

2013-03-01

In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

Reliability of Beam Loss Monitor Systems for the Large Hadron Collider

CERN Document Server

Guaglio, Gianluca; Santoni, C

2005-01-01

The increase of beam energy and beam intensity, together with the use of super conducting magnets, opens new failure scenarios and brings new criticalities for the whole accelerator protection system. For the LHC beam loss protection system, the failure rate and the availability requirements have been evaluated using the Safety Integrity Level (SIL) approach. A downtime cost evaluation is used as input for the SIL approach. The most critical systems, which contribute to the final SIL value, are the dump system, the interlock system, the beam loss monitors system, and the energy monitor system. The Beam Loss Monitors System (BLMS) is critical for short and intense particles losses at 7 TeV and assisted by the Fast Beam Current Decay Monitors at 450 GeV. At medium and higher loss time it is assisted by other systems, such as the quench protection system and the cryogenic system. For BLMS, hardware and software have been evaluated in detail. The reliability input figures have been collected using historical data...

Focused ion beam patterning to dielectrophoretically assemble single nanowire based devices

International Nuclear Information System (INIS)

La Ferrara, V; Massera, E; Francia, G Di; Alfano, B

2010-01-01

Direct-write processing is increasingly taking place in nanodevice fabrication. In this work, Focused Ion Beam (FIB), a powerful tool in maskless micromachining, is used for electrode patterning onto a silicon/silicon nitride substrate. Then a single palladium nanowire is assembled between electrodes by means of dielectrophoresis (DEP). The nanowire morphology depends on the electrode pattern when DEP conditions are fixed. FIB/DEP combination overcomes the problem of nanowire electrical contamination due to gallium ion bombardment and the as-grown nanowire retains its basic electrical properties. Single nanowire based devices have been fabricated with this novel approach and have been tested as hydrogen sensors, confirming the reliability of this technology.

Laser beam micro-milling of micro-channels in aerospace alloys

CERN Document Server

Ahmed, Naveed; Al-Ahmari, Abdulrahman

2017-01-01

This volume is greatly helpful to micro-machining and laser engineers as it offers obliging guidelines about the micro-channel fabrications through Nd:YAG laser beam micro-milling. The book also demonstrates how the laser beam micro-milling behaves when operating under wet conditions (under water), and explores what are the pros and cons of this hybrid technique. From the predictive mathematical models, the readers can easily estimate the resulting micro-channel size against the desired laser parametric combinations. The book considers micro-channels in three highly important research materials commonly used in aerospace industry: titanium alloy Ti-6Al-4V, nickel alloy Inconel 718 and aluminum alloy AA 2024. Therefore, the book is highly practicable in the fields of micro-channel heat exchangers, micro-channel aerospace turbine blades, micro-channel heat pipes, micro-coolers and micro-channel pulsating heat plates. These are frequently used in various industries such as aerospace, automotive, biomedical and m...

Development of KOMAC Beam Monitoring System Using EPICS

Energy Technology Data Exchange (ETDEWEB)

Song, Young-Gi; Yun, Sang-Pil; Kim, Han-Sung; Kwon, Hyeok-Jung; Cho, Yong-Sub [Korea Atomic Energy Research Institute, Daejeon (Korea, Republic of)

2014-10-15

The beam loss signals must be digitized and the sampling has to be synchronized to a reference signal which is an external trigger for beam operation. The digitized data must be accessible by the Experimental Physics and Industrial Control System (EPICS)-based control system, which manages the whole accelerator control. In order to satisfy the requirement, an Input /Output Controller (IOC), which runs Linux on a CPU module with PCI express based Analog to Digital Converter (ADC) modules, has been adopted. An associated linux driver and EPICS device support module also have been developed. The IOC meets the requirements and the development and maintenance of the software for the IOC is considerably efficient. The data acquisition system running EPICS will be used in increasing phase of KOrea Multi-purpose Accelerator Complex (KOMAC) beam power. The beam monitoring system integrates BLM and BPM signals into control system and offers real-time data to operators. The IOC, which is implemented with Linux and PCI driver, has supported data acquisition as a very flexible solution.

Development of KOMAC Beam Monitoring System Using EPICS

International Nuclear Information System (INIS)

Song, Young-Gi; Yun, Sang-Pil; Kim, Han-Sung; Kwon, Hyeok-Jung; Cho, Yong-Sub

2014-01-01

The beam loss signals must be digitized and the sampling has to be synchronized to a reference signal which is an external trigger for beam operation. The digitized data must be accessible by the Experimental Physics and Industrial Control System (EPICS)-based control system, which manages the whole accelerator control. In order to satisfy the requirement, an Input /Output Controller (IOC), which runs Linux on a CPU module with PCI express based Analog to Digital Converter (ADC) modules, has been adopted. An associated linux driver and EPICS device support module also have been developed. The IOC meets the requirements and the development and maintenance of the software for the IOC is considerably efficient. The data acquisition system running EPICS will be used in increasing phase of KOrea Multi-purpose Accelerator Complex (KOMAC) beam power. The beam monitoring system integrates BLM and BPM signals into control system and offers real-time data to operators. The IOC, which is implemented with Linux and PCI driver, has supported data acquisition as a very flexible solution

Electron beam diagnostic system using computed tomography and an annular sensor

Science.gov (United States)

Elmer, John W.; Teruya, Alan T.

2014-07-29

A system for analyzing an electron beam including a circular electron beam diagnostic sensor adapted to receive the electron beam, the circular electron beam diagnostic sensor having a central axis; an annular sensor structure operatively connected to the circular electron beam diagnostic sensor, wherein the sensor structure receives the electron beam; a system for sweeping the electron beam radially outward from the central axis of the circular electron beam diagnostic sensor to the annular sensor structure wherein the electron beam is intercepted by the annular sensor structure; and a device for measuring the electron beam that is intercepted by the annular sensor structure.

Beam transport optics for high-power laser systems

International Nuclear Information System (INIS)

Taylor, J.R.

1995-01-01

Beam transport optics receive output energy from the laser cavity and deliver it to the work site. Depending on the application, this may require a few simple elements or large complex systems. Collection of the laser energy depends on the spatial and temporal energy distribution as well as the wavelength and polarization of the laser cavity and output coupler. Transport optics can perform a variety of functions, including beam formatting, frequency doubling, and distribution to one or more work sites while maintaining or even improving the beam quality. The beam may be delivered to work sites as focused spots or images, projected to distant targets, or propagated through various media for sensing or photochemical processing. Design may involve optical modeling of the system, including diffraction effects and thermal management. A Gaussian beam profile is often used for convenience in modeling. When deviations from this ideal profile need to be considered, it is necessary to characterize the laser beam in detail. Design of the transport system requires understanding of the interaction of the laser energy with optical materials and components. Practical considerations include mounting the optics without stress and with the stability suitable for the intended application. Requirements for beam direction, stability, size, shape, and quality dictate the design approach for each specific situation. Attention also must be given to reliability, environmental, and commercial requirements. Damage to optics in high-power laser systems is a common concern. Environmental problems such as atmospheric turbulence, contamination by dust or vapor from the work site or other sources, or absorption of water vapor can directly degrade beam quality. Other potentially significant optical performance effects may result from instability and aging of the optics, temperature, humidity, pressure, transmitted vibration, and contamination from the work site or other sources

Beam studies with a LNB detector system

Energy Technology Data Exchange (ETDEWEB)

Schwarzkopf, Joachim; Judin, Vitali; Mueller, Anke-Susanne [Karlsruher Institut fuer Technologie (KIT), Karlsruhe (Germany)

2013-07-01

At ANKA, the synchrotron of the KIT (Karlsruhe Institue of Technology), beam studies with a detector system better known for its use in the entertainment industry have been carried out. The system basically consists of a LNB (Low Noise Block), usually part of a satellite TV receiver. One possible application in accelerator physics is the monitoring of the bunch length. This presentation reports on beam experiments with this inexpensive detector.

PLT neutral beam injection systems

International Nuclear Information System (INIS)

Menon, M.M.; Barber, G.C.; Blue, C.W.

1979-01-01

A brief description of the Princeton Large Torus (PLT) neutral beam injection system is given and its performance characteristics are outlined. A detailed operational procedure is included, as are some tips on troubleshooting. Proper operation of the source is shown to be a crucial factor in system performance

Development of focused ion beam systems with various ion species

International Nuclear Information System (INIS)

Ji Qing; Leung, K.-N.; King, Tsu-Jae; Jiang Ximan; Appleton, Bill R.

2005-01-01

Conventional focused ion beam systems employ a liquid-metal ion source (LMIS) to generate high-brightness beams, such as Ga + beams. Recently there has been an increased need for focused ion beams in areas like biological studies, advanced magnetic-film manufacturing and secondary-ion mass spectroscopy (SIMS). In this article, status of development on focused ion beam systems with ion species such as O 2 + , P + , and B + will be reviewed. Compact columns for forming focused ion beams from low energy (∼3keV), to intermediate energy (∼35keV) are discussed. By using focused ion beams, a SOI MOSFET is fabricated entirely without any masks or resist

ADVANCEMENT OF THE RHIC BEAM ABORT KICKER SYSTEM

International Nuclear Information System (INIS)

ZHANG, W.; AHRENS, L.; MI, J.; OERTER, B.; SANDBERG, J.; WARBURTON, D.

2003-01-01

As one of the most critical system for RHIC operation, the beam abort kicker system has to be highly available, reliable, and stable for the entire operating range. Along with the RHIC commission and operation, consistent efforts have been spend to cope with immediate issues as well as inherited design issues. Major design changes have been implemented to achieve the higher operating voltage, longer high voltage hold-off time, fast retriggering and redundant triggering, and improved system protection, etc. Recent system test has demonstrated for the first time that both blue ring and yellow ring beam abort systems have achieved more than 24 hours hold off time at desired operating voltage. In this paper, we report break down, thyratron reverse arcing, and to build a fast re-trigger system to reduce beam spreading in event of premature discharge

Ultra Stable, Industrial Green Tailored Pulse Fiber Laser with Diffraction-limited Beam Quality for Advanced Micromachining

International Nuclear Information System (INIS)

Deladurantaye, P; Roy, V; Desbiens, L; Drolet, M; Taillon, Y; Galarneau, P

2011-01-01

We report on a novel pulsed fiber laser platform providing pulse shaping agility at high repetition rates and at a wavelength of 532 nm. The oscillator is based on the direct modulation of a seed laser diode followed by a chain of fiber amplifiers. Advanced Large Mode Area (LMA) fiber designs as well as proprietary techniques to mitigate non-linear effects enable output energy per pulse up to 100 μJ at 1064 nm with diffraction-limited beam quality and narrow line widths suitable for efficient frequency conversion. Ultra stable pulses with tailored pulse shapes were demonstrated in the green region of the spectrum at repetition rates higher than 200 kHz. Pulse durations between 2.5 ns and 640 ns are available, as well as pulse to pulse dynamic shape selection at repetition rates up to 1 MHz. The pulse energy stability at 532 nm is better than ± 1.5%, 3σ, over 10 000 pulses. Excellent beam characteristics were obtained. The M 2 parameter is lower than 1.05, the beam waist astigmatism and beam waist asymmetry are below 10% and below 8% respectively, with high stability over time. We foresee that the small spot size, high repetition rate and pulse tailoring capability of this platform will provide advantages to practitioners who are developing novel, advanced processes in many industrially important applications.

Observation of bifurcation phenomena in an electron beam plasma system

International Nuclear Information System (INIS)

Hayashi, N.; Tanaka, M.; Shinohara, S.; Kawai, Y.

1995-01-01

When an electron beam is injected into a plasma, unstable waves are excited spontaneously near the electron plasma frequency f pe by the electron beam plasma instability. The experiment on subharmonics in an electron beam plasma system was performed with a glow discharge tube. The bifurcation of unstable waves with the electron plasma frequency f pe and 1/2 f pe was observed using a double-plasma device. Furthermore, the period doubling route to chaos around the ion plasma frequency in an electron beam plasma system was reported. However, the physical mechanism of bifurcation phenomena in an electron beam plasma system has not been clarified so far. We have studied nonlinear behaviors of the electron beam plasma instability. It was found that there are some cases: the fundamental unstable waves and subharmonics of 2 period are excited by the electron beam plasma instability, the fundamental unstable waves and subharmonics of 3 period are excited. In this paper, we measured the energy distribution functions of electrons and the dispersion relation of test waves in order to examine the physical mechanism of bifurcation phenomena in an electron beam plasma system

A machine protection beam position monitor system

International Nuclear Information System (INIS)

Medvedko, E.; Smith, S.; Fisher, A.

1998-01-01

Loss of the stored beam in an uncontrolled manner can cause damage to the PEP-II B Factory. We describe here a device which detects large beam position excursions or unexpected beam loss and triggers the beam abort system to extract the stored beam safely. The bad-orbit abort trigger beam position monitor (BOAT BPM) generates a trigger when the beam orbit is far off the center (>20 mm), or rapid beam current loss (dI/dT) is detected. The BOAT BPM averages the input signal over one turn (136 kHz). AM demodulation is used to convert input signals at 476 MHz to baseband voltages. The detected signal goes to a filter section for suppression of the revolution frequency, then on to amplifiers, dividers, and comparators for position and current measurements and triggering. The derived current signal goes to a special filter, designed to perform dI/dT monitoring at fast, medium, and slow current loss rates. The BOAT BPM prototype test results confirm the design concepts. copyright 1998 American Institute of Physics

External post-operational checks for the LHC beam dumping system

International Nuclear Information System (INIS)

Magnin, N.; Baggiolini, V.; Carlier, E.; Goddard, B.; Gorbonosov, R.; Khasbulatov, D.; Uythoven, J.; Zerlauth, M.

2012-01-01

The LHC Beam Dumping System (LBDS) is a critical part of the LHC machine protection system. After every LHC beam dump action the various signals and transient data recordings of the beam dumping control systems and beam instrumentation measurements are automatically analysed by the external Post-Operational Checks (XPOC) system to verify the correct execution of the dump action and the integrity of the related equipment. This software system complements the LHC machine protection hardware, and has to ascertain that the beam dumping system is 'as good as new' before the start of the next operational cycle. This is the only way by which the stringent reliability requirements can be met. The XPOC system has been developed within the framework of the LHC 'Post-Mortem' system, allowing highly dependable data acquisition, data archiving, live analysis of acquired data and replay of previously recorded events. It is composed of various analysis modules, each one dedicated to the analysis of measurements coming from specific equipment. This paper describes the global architecture of the XPOC system and gives examples of the analyses performed by some of the most important analysis modules. It explains the integration of the XPOC into the LHC control infrastructure along with its integration into the decision chain to allow proceeding with beam operation. Finally, it discusses the operational experience with the XPOC system acquired during the first years of LHC operation, and illustrates examples of internal system faults or abnormal beam dump executions which it has detected. (authors)

Data acquisition system for PLT Neutral Beam Test Stand

International Nuclear Information System (INIS)

Francis, J.E. Jr.; Hammons, C.E.

1977-01-01

The PLT Neutral Beam Test Stand at Oak Ridge National Laboratory was constructed to test and condition powerful neutral beam sources for the Princeton Large Torus experiment at Princeton Plasma Physics Laboratory. The data acquisition system for the test stand monitors the beam characteristics and power output to determine if the beam is operating at its design specifications. The high speed of the computer system is utilized to provide near-real-time analysis of experimental data. The analysis of the data is presented as numerical tabulation and graphic display

TRANSIENT BEAM LOADING EFFECTS IN RF SYSTEMS IN JLEIC

Energy Technology Data Exchange (ETDEWEB)

Wang, Haipeng [Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States); Guo, Jiquan [Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States); Rimmer, Robert A. [Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States); Wang, Shaoheng [Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)

2016-05-01

The pulsed electron bunch trains generated from the Continuous Electron Beam Accelerator Facility (CEBAF) linac to inject into the proposed Jefferson Lab Electron Ion Collider (JLEIC) e-ring will produce transient beam loading effects in the Superconducting Radio Frequency (SRF) systems that, if not mitigated, could cause unacceptably large beam energy deviation in the injection capture, or exceed the energy acceptance of CEBAF’s recirculating arcs. In the electron storage ring, the beam abort or ion clearing gaps or uneven bucket filling can cause large beam phase transients in the (S)RF cavity control systems and even beam loss due to Robinson instability. We have first analysed the beam stability criteria in steady state and estimated the transient effect in Feedforward and Feedback RF controls. Initial analytical models for these effects are shown for the design of the JLEIC e-ring from 3GeV to 12GeV.

Performance with lead ions of the LHC beam dump system

CERN Document Server

Bruce, R; Jensen, L; Lefèvre, T; Weterings, W

2007-01-01

The LHC beam dump system must function safely with 208Pb82+ions. The differences with respect to the LHC proton beams are briefly recalled, and the possible areas for performance concerns discussed, in particular the various beam intercepting devices and the beam instrumentation. Energy deposition simulation results for the most critical elements are presented, and the conclusions drawn for the lead ion operation. The expected performance of the beam instrumentation systems are reviewed in the context of the damage potential of the ion beam and the required functionality of the various safety and post-operational analysis requirements.

New Fast Beam Conditions Monitoring (BCM1F) system for CMS

Science.gov (United States)

Zagozdzinska, A. A.; Bell, A. J.; Dabrowski, A. E.; Hempel, M.; Henschel, H. M.; Karacheban, O.; Przyborowski, D.; Leonard, J. L.; Penno, M.; Pozniak, K. T.; Miraglia, M.; Lange, W.; Lohmann, W.; Ryjov, V.; Lokhovitskiy, A.; Stickland, D.; Walsh, R.

2016-01-01

The CMS Beam Radiation Instrumentation and Luminosity (BRIL) project is composed of several systems providing the experiment protection from adverse beam conditions while also measuring the online luminosity and beam background. Although the readout bandwidth of the Fast Beam Conditions Monitoring system (BCM1F—one of the faster monitoring systems of the CMS BRIL), was sufficient for the initial LHC conditions, the foreseen enhancement of the beams parameters after the LHC Long Shutdown-1 (LS1) imposed the upgrade of the system. This paper presents the new BCM1F, which is designed to provide real-time fast diagnosis of beam conditions and instantaneous luminosity with readout able to resolve the 25 ns bunch structure.

Silicon micromachining using a high-density plasma source

International Nuclear Information System (INIS)

McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

2001-01-01

Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

Simulation of the Mitra 15 micro-machine on IBM 360/91. Microprogramming of the fast Fourier transform

International Nuclear Information System (INIS)

Augustides, Jean

1973-01-01

As computing time did not allow working in real time, and as different methods had been proposed to reduce the computing time (the Cooley-Tuckey method, the use of specific FFT processors), this thesis proposes an intermediate solution, between the entirely programmed solution and the entirely cabled solution. After some generalities on micro-programming (definition, history, benefits and drawbacks, perspectives), the author reports the micro-programming of the Mitra 15 micro-machine: description of the machine, memory, command memory and associated circuits, interruptions and suspensions, descriptions of micro-statements, execution of a micro-statement. Programs and subroutines developed for the modelling of Mitra 15 micro-machine on IBM 360/91 are presented. Then, the author reports the micro-programming of the fast Fourier transform: theory, program description, and test

A micromachined calorimetric gas sensor: an application of electrodeposited nanostructured palladium for the detection of combustible gases.

Science.gov (United States)

Bartlett, Philip N; Guerin, Samuel

2003-01-01

Palladium films with regular nanoarchitectures were electrochemically deposited from the hexagonal (H1) lyotropic liquid crystalline phase of the nonionic surfactant octaethyleneglycol monohexadecyl ether (C16EO8) onto micromachined silicon hotplate structures. The H1-e Pd films were shown to have high surface areas (approximately 28 m2 g(-1)) and to act as effective and stable catalysts for the detection of methane in air on heating to 500 degrees C. The response of the H1-e Pd-coated planar pellistors was found to be linearly proportional to the concentration of methane between 0 and 2.5% in air with a detection limit below 0.125%. Our results show that the electrochemical deposition of nanostructured metal films offers a promising approach to the fabrication of micromachined calorimetric gas sensors for combustible gases.

Beam stability in synchrotrons with digital transverse feedback systems in dependence on beam tunes

International Nuclear Information System (INIS)

Zhabitskij, V.M.

2011-01-01

The beam stability problem in synchrotrons with a digital transverse feedback system (TFS) is studied. The TFS damper kicker (DK) corrects the transverse momentum of a bunch in proportion to its displacement from the closed orbit measured at the location of the beam position monitor (BPM). It is shown that the area and configuration of the beam stability separatrix depend on the beam tune, the feedback gain, the phase balance between the phase advance from BPM to DK and the phase response of the feedback chain at the betatron frequency

Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass

Directory of Open Access Journals (Sweden)

Rongguo Hou

2018-01-01

Full Text Available The ultrasonic vibration is used to enhance the capability of the abrasive water micromachining glass. And, the ultrasonic vibration is activated on the abrasive waterjet nozzle. The quality of the flow is improved, and the velocity of the abrasive is increased because of the addition of the ultrasonic energy. The relevant experimental results indicate that the erosion depth and the material volume removal of the glass are obviously increased when ultrasonic vibration is working. As for the influence of process parameters on the material removal of the glass such as vibration amplitude, system pressure, distance of the standoff, and abrasive size, the experimental results indicate that the system pressure and vibration contribute greatly to the glass material removal. Also, the erosion depth and the volume of material removal are increased with the increase in the vibration amplitude and system pressure. There are some uplifts found at the edge of erosion pit. Then, it can be inferred that the plastic method is an important material removal method during the machining process of ultrasonic vibration-assisted abrasive waterjet.

A metrology system for a high resolution cavity beam position monitor system

Science.gov (United States)

Walston, Sean; Boogert, Stewart; Chung, Carl; Fitsos, Pete; Frisch, Joe; Gronberg, Jeff; Hayano, Hitoshi; Hinton, Shantell; Honda, Yosuke; Khainovski, Oleg; Kolomensky, Yury; Loscutoff, Peter; Lyapin, Alexey; Malton, Stephen; May, Justin; McCormick, Douglas; Meller, Robert; Miller, David; Orimoto, Toyoko; Ross, Marc; Slater, Mark; Smith, Steve; Smith, Tonee; Terunuma, Nobuhiro; Thomson, Mark; Urakawa, Junji; Vogel, Vladimir; Ward, David; White, Glen

2013-11-01

International Linear Collider (ILC) interaction region beam sizes and component position stability requirements will likely be as small as a few nanometers. It is important to the ILC design effort to demonstrate that these tolerances can be achieved-ideally using a beam-based stability measurement. We developed a high resolution RF cavity Beam Position Monitor (BPM) system. A triplet of these BPMs, installed in the extraction line of the KEK Accelerator Test Facility (ATF) and tested with its ultra-low emittance beam, achieved a position measurement resolution of 15 nm. A metrology system for the three BPMs was subsequently installed. This system employed optical encoders to measure each BPM's position and orientation relative to a zero-coefficient of thermal expansion carbon fiber frame. We have demonstrated that the three BPMs behave as a rigid-body at the level of less than 5 nm.

Beam-guiding system for Rutherford-scattering diagnostic at TEXTOR

International Nuclear Information System (INIS)

Cosler, A; Bertschinger, G.; Kemmereit, E.; Ven, H.W. van der; Barbian, E.P.; Blokland, A.A.E. van

1988-01-01

A beam-guiding system for a neutral beam probe diagnostic has been developed for implementation at TEXTOR. Energetic helium atoms scattered on the plasma ions provide information about the local ion temperature. Time resolution is attained by sampling scattered particles measured individually by a time-of-flight analyser. The mechanical supports have been designed for lateral and angular movement of the beam-guiding system to be used for radial scanning of the torus and for optimization of the scattering angle. The parameters of the probing beam itself can be controlled jby a small beam profile diagnsotic. Provisions are made to observe separately the radial or axial component of the ion velocity distribution. (author). 10 refs.; 7 figs

Preservation of beam loss induced quenches, beam lifetime and beam loss measurements with the HERA-p beam-loss-monitor system

International Nuclear Information System (INIS)

Wittenburg, K.

1994-01-01

The beam-loss-monitors (BLMs) in the HERA-Proton-ring (HERAp) must fulfil the following requirements: They have to measure losses sensitive and fast enough to prevent the superconducting magnets from beam loss induced quenching; the dynamic range of the monitors must exceed several decades in order to measure losses during beam lifetimes of hundreds of hours as well as the much stronger losses that may quench superconducting magnets; they have to be insensitive to the synchrotron radiation of the adjacent electron-ring (HERAe); and their radiation hardness must allow a monitor-lifetime of a few years of HERA operation. These requirements are well satisfied by the HERAp-BLM-System. (orig.)

Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

Directory of Open Access Journals (Sweden)

Norihisa Miki

2013-03-01

Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

Energy Technology Data Exchange (ETDEWEB)

Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

2014-02-03

Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

The New Digital-Receiver-Based System for Antiproton Beam Diagnostics

CERN Document Server

Angoletta, Maria Elena; Ludwig, M; Marqversen, O; Pedersen, F

2001-01-01

An innovative system to measure antiproton beam intensity, momentum spread and mean momentum in CERN's Antiproton Decelerator (AD) is described. This system is based on a state-of-the-art Digital Receiver (DRX) board, consisting of 8 Digital Down-Converter (DDC) chips and one Digital Signal Processor (DSP). An ultra-low-noise, wide-band AC beam transformer (0.2 MHz - 30 MHz) is used to measure AC beam current modulation. For bunched beams, the intensity is obtained by measuring the amplitude of the fundamental and second RF Fourier components. On the magnetic plateaus the beam is debunched for stochastic or electron cooling and longitudinal beam properties (intensity, momentum spread and mean momentum) are measured by FFT-based spectral analysis of Schottky signals. The system thus provides real time information characterising the machine performance; it has been used for troubleshooting and to fine-tune the AD, thus achieving further improved performances. This system has been operating since May 2000 and ty...

Multiple-beam LDV system for buried landmine detection

Science.gov (United States)

Lal, Amit K.; Zhang, Hansheng; Aranchuk, Vyacheslav; Hurtado, Ernesto; Hess, Cecil F.; Burgett, Richard D.; Sabatier, James M.

2003-09-01

This paper discusses the performance and experimental results of a multiple beam laser Doppler vibrometer designed to locate buried landmines with the laser-acoustic technique. The device increases the speed of landmine detection by simultaneously probing 16 positions on the ground over a span of 1 meter, and measuring the ground velocity at each of these positions. Experimental results are presented from controlled laboratory experiments as well as from landmine test lanes at the University of Mississippi. In the mine lanes, the multiple beam system is raised to a height of 2.5 meters with a forklift, with the 16 beams spread over a 1 meter line along the mine lane. A motor system then allows the 16 beams to be translated across the mine lane, enabling the system to scan a 1 x 1 meter area in a much shorter time than with previous scanning techniques. The effects of experimental parameters such as platform motion, angle of incidence, speckle dropout, and system depth-of-field will be presented and discussed.

Longitudinal beam instabilities in a double RF system

CERN Document Server

AUTHOR|(INSPIRE)INSPIRE-00229208; Gazis, Evangelos

Operation with a double RF system is essential for many accelerators in order to increase beam stability, to change the bunch shape or to perform various RF manipulations. This is also the case for the operation of the CERN SPS as the LHC proton injector, where in addition to the main RF system, a fourth harmonic RF system is used in bunch shortening mode in order to increase the synchrotron frequency spread inside the bunch and thus to enhance Landau damping of the collective instabilities. In fact the double RF system operation in the SPS is one of the essential means, together with the controlled longitudinal emittance blow-up to significantly increase the longitudinal instability thresholds (single and multi-bunch) and deliver a good quality beam for the LHC. However, for the HiLumi-LHC (HL-LHC) and LHC injector upgrade (LIU) projects higher beam intensities are required. After all upgrades are in place, the main performance limitations of the LHC injector complex are beam instabilities and high intensity...

RHIC BEAM ABORT KICKER POWER SUPPLY SYSTEM COMMISSIONING EXPERIENCE AND REMAINING ISSUES

International Nuclear Information System (INIS)

ZHANG, W.; AHRENS, L.A.; MI, J.; OERTER, B.; SANDERS, R.; SANDBERG, J.

2001-01-01

The RHIC Beam Abort Kicker Power Supply Systems commissioning experience and the remaining issues will be reported in this paper. The RHIC Blue Ring Beam Abort Kicker Power Supply System initial commissioning took place in June 1999. Its identical system in Yellow Ring was brought on line during Spring 2000. Each of the RHIC Beam Abort Kicker Power Supply Systems consists of five high voltage modulators and subsystems. These systems are critical devices for RHIC machine protection and environmental protection. They are required to be effective, reliable and operating with sufficient redundancy to safely abort the beam to its beam dump at the end of accumulation or at any time when they are commanded. To deflect 66 GeV ion beam to the beam absorbers, the RHIC Beam Abort Kicker Power Supply Systems were operated at 22 kV level. The RHIC 2000 commissioning run was very successful

Characterization of bulk-micromachined direct-bonded silicon nanofilters

Science.gov (United States)

Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

1998-03-01

The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

Possibilities of using pulsed lasers and copper-vapour laser system (CVL and CVLS) in modern technological equipment

Science.gov (United States)

Labin, N. A.; Bulychev, N. A.; Kazaryan, M. A.; Grigoryants, A. G.; Shiganov, I. N.; Krasovskii, V. I.; Sachkov, V. I.; Plyaka, P. S.; Feofanov, I. N.

2015-12-01

Research on CVL installations with an average power of 20-25 W of cutting and drilling has shown wide range of applications of these lasers for micromachining of metals and a wide range of non-metallic materials up to 1-2 mm. From the analysis indicated that peak power density in the focused light spot of 10-30 μm diameter must be 109 -1012 W/cm2 the productivity and quality micromachining, when the treatment material is preferably in the evaporative mode micro explosions, followed by the expansion of the superheated vapor and the liquid. To achieve such levels of power density, a minimum heat affected zone (5- 10 μm) and a minimum surface roughness of the cut (1-2 μm), the quality of the output beam of radiation should be as high. Ideally, to ensure the quality of the radiation, the structure of CVL output beam must be single-beam, diffraction divergence and have at duration pulses τi = 20-40 ns. The pulse energy should have low values of 0.1-1 mJ at pulse repetition rates of 10-20 kHz. Axis of the radiation beam instability of the pattern to be three orders of magnitude smaller than the diffraction limit of the divergence. The spot of the focused radiation beam must have a circular shape with clear boundary, and a Gaussian intensity distribution.

Fiscal 1997 report on technological results. R and D on micromachine technology (Development of micro-factory technology); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Activities are conducted in search of a micromachine system in which devices and equipment relating to machining, assembly, transportation, inspection, etc., in use for a manufacturing process are integrated in a narrow space, for the purpose of conserving energy through the miniaturization of the process of manufacturing small industrial products. With the activities in the two fields of (1) R and D of systematization technology (experimental system for micro fabrication/assembly) and (2) comprehensive investigation and research, examination on detailed specification for the experimental system was carried out, as were the examination of element technologies, element device operating experiments, technological investigation, etc.. In (1), sophistication of the element technologies was contrived that were required for realizing each experimental system, while the detailed specification of each experimental system was decided. Further, a part of the element devices was experimentally manufactured, with the basic functions verified. In (2), research studies were compiled on radio interference for example in the case where various devices were integrated and highly densified through the formation of a micro-factory; also compiled was a joint research with Agency of Industrial Science and Technology, a research conducted for the purpose of building the conception of the micro-factory. (NEDO)

RHIC Beam Loss Monitor System Initial Operation

International Nuclear Information System (INIS)

Witkover, R. L.; Michnoff, R. J.; Geller, J. M.

1999-01-01

The RHIC Beam Loss Monitor (BLM) System is designed to prevent beam loss quenching of the superconducting magnets, and acquire loss data. Four hundred ion chambers are located around the rings to detect losses. The required 8-decade range in signal current is compressed using an RC pre-integrator ahead of a low current amplifier. A beam abort may be triggered if fast or slow losses exceed programmable threshold levels. A micro-controller based VME module sets references and gains and reads trip status for up to 64 channels. Results obtained with the detectors in the RHIC Sextant Test and the prototype electronics in the AGS-to-RHIC (AtR) transfer line are presented along with the present status of the system

Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

OpenAIRE

Zhou, Yu; Shafai, Cyrus

2016-01-01

This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

Ion beam induced fluorescence imaging in biological systems

International Nuclear Information System (INIS)

Bettiol, Andrew A.; Mi, Zhaohong; Vanga, Sudheer Kumar; Chen, Ce-belle; Tao, Ye; Watt, Frank

2015-01-01

Imaging fluorescence generated by MeV ions in biological systems such as cells and tissue sections requires a high resolution beam (<100 nm), a sensitive detection system and a fluorescent probe that has a high quantum efficiency and low bleaching rate. For cutting edge applications in bioimaging, the fluorescence imaging technique needs to break the optical diffraction limit allowing for sub-cellular structure to be visualized, leading to a better understanding of cellular function. In a nuclear microprobe this resolution requirement can be readily achieved utilizing low beam current techniques such as Scanning Transmission Ion Microscopy (STIM). In recent times, we have been able to extend this capability to fluorescence imaging through the development of a new high efficiency fluorescence detection system, and through the use of new novel fluorescent probes that are resistant to ion beam damage (bleaching). In this paper we demonstrate ion beam induced fluorescence imaging in several biological samples, highlighting the advantages and challenges associated with using this technique

Measurement system with high accuracy for laser beam quality.

Science.gov (United States)

Ke, Yi; Zeng, Ciling; Xie, Peiyuan; Jiang, Qingshan; Liang, Ke; Yang, Zhenyu; Zhao, Ming

2015-05-20

Presently, most of the laser beam quality measurement system collimates the optical path manually with low efficiency and low repeatability. To solve these problems, this paper proposed a new collimated method to improve the reliability and accuracy of the measurement results. The system accuracy controlled the position of the mirror to change laser beam propagation direction, which can realize the beam perpendicularly incident to the photosurface of camera. The experiment results show that the proposed system has good repeatability and the measuring deviation of M2 factor is less than 0.6%.

Beam-optics study of the gantry beam delivery system for light-ion cancer therapy

International Nuclear Information System (INIS)

Pavlovic, M.

1995-12-01

Ion optics considerations on the granty-like beam delivery system for light-ion cancer therapy are presented. A low-angle active beam scanning in two directions is included in the preliminary gantry design. The optical properties of several gantry modifications are discussed. (orig.)

The Booster to AGS beam transfer fast kicker systems

International Nuclear Information System (INIS)

Zhang, W.; Bunicci, J.; Soukas, A.V.; Zhang, S.Y.

1992-01-01

The Brookhaven AGS Booster has a very successful commissioning period in June 1991. The third phase of that commissioning was a beam extraction test. The Booster extraction fast kicker (F3) deflected a 1.2 GeV proton beam from the Booster circulating orbit into the extraction septum aperture, partially down the extraction line to a temporary beam stop. Now, the Booster is committed to the AGS operations program for both heavy ion and proton beams. Thus, the Booster extraction and the corresponding AGS injection systems must operate routinely up to a pulse repetition frequency of 7.5 Hertz, and up to a beam energy of 1.5 Gev. The injection fast kicker is located in the A5 section of the AGS ring and is used to deflect the proton or heavy ion beam into its final AGS closed orbit. A distinctive feature of the AGS injection fast kicker modulators is the tail-bitting function required for proton beam injection. This enables the system to produce a fast current fall time to go along with the high current pulse amplitude with a fast rise time. The AGS injection fast kicker system has three pulse modulators, and each modulator consists of two thyratrons. The main PFN thyratrons switch on the current, and the tail bitting thyratrons are used to force the magnet current to decrease rapidly. Two digital pulse delay generators are used to align the main thyratrons and the tail bitting thyratrons respectively. The system has been tested and installed. The final commissioning of the Booster to AGS beam transfer line and injection is currently being undertaken. In this article, the system design, realization techniques and performance data will be presented

Beam-plasma instability in ion beam systems used in neutral beam generation

International Nuclear Information System (INIS)

Hooper, E.B. Jr.

1977-02-01

The beam-plasma instability is analyzed for the ion beams used for neutral beam generation. Both positive and negative ion beams are considered. Stability is predicted when the beam velocity is less than the electron thermal velocity; the only exception occurs when the electron density accompanying a negative ion beam is less than the ion density by nearly the ratio of electron to ion masses. For cases in which the beam velocity is greater than the electron thermal velocity, instability is predicted near the electron plasma frequency

3D Printed Microtransporters: Compound Micromachines for Spatiotemporally Controlled Delivery of Therapeutic Agents.

Science.gov (United States)

Huang, Tian-Yun; Sakar, Mahmut Selman; Mao, Angelo; Petruska, Andrew J; Qiu, Famin; Chen, Xue-Bo; Kennedy, Stephen; Mooney, David; Nelson, Bradley J

2015-11-01

Functional compound micromachines are fabricated by a design methodology using 3D direct laser writing and selective physical vapor deposition of magnetic materials. Microtransporters with a wirelessly controlled Archimedes screw pumping mechanism are engineered. Spatiotemporally controlled collection, transport, and delivery of micro particles, as well as magnetic nanohelices inside microfluidic channels are demonstrated. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

A metrology system for a high resolution cavity beam position monitor system

Energy Technology Data Exchange (ETDEWEB)

Walston, Sean, E-mail: walston2@llnl.gov [Lawrence Livermore National Laboratory, 7000 East Ave., L-181, Livermore, CA 94550 (United States); Boogert, Stewart [Royal Holloway, University of London, Egham (United Kingdom); Chung, Carl; Fitsos, Pete [Lawrence Livermore National Laboratory, 7000 East Ave., L-181, Livermore, CA 94550 (United States); Frisch, Joe [Stanford Linear Accelerator Center, Menlo Park, CA (United States); Gronberg, Jeff [Lawrence Livermore National Laboratory, 7000 East Ave., L-181, Livermore, CA 94550 (United States); Hayano, Hitoshi [High Energy Accelerator Research Organization (KEK), Tsukuba-shi, Ibaraki-ken (Japan); Hinton, Shantell [Stanford Linear Accelerator Center, Menlo Park, CA (United States); Honda, Yosuke [High Energy Accelerator Research Organization (KEK), Tsukuba-shi, Ibaraki-ken (Japan); Khainovski, Oleg; Kolomensky, Yury; Loscutoff, Peter [University of California and Lawrence Berkeley National Laboratory, Berkeley, CA (United States); Lyapin, Alexey; Malton, Stephen [University College London, London (United Kingdom); May, Justin; McCormick, Douglas [Stanford Linear Accelerator Center, Menlo Park, CA (United States); Meller, Robert [Cornell University, Ithaca, NY (United States); Miller, David [University College London, London (United Kingdom); Orimoto, Toyoko [University of California and Lawrence Berkeley National Laboratory, Berkeley, CA (United States); California Institute of Technology, Pasadena, CA (United States); Ross, Marc [Stanford Linear Accelerator Center, Menlo Park, CA (United States); Fermi National Accelerator Laboratory, Batavia, IL (United States); and others

2013-11-11

International Linear Collider (ILC) interaction region beam sizes and component position stability requirements will likely be as small as a few nanometers. It is important to the ILC design effort to demonstrate that these tolerances can be achieved–ideally using a beam-based stability measurement. We developed a high resolution RF cavity Beam Position Monitor (BPM) system. A triplet of these BPMs, installed in the extraction line of the KEK Accelerator Test Facility (ATF) and tested with its ultra-low emittance beam, achieved a position measurement resolution of 15 nm. A metrology system for the three BPMs was subsequently installed. This system employed optical encoders to measure each BPM's position and orientation relative to a zero-coefficient of thermal expansion carbon fiber frame. We have demonstrated that the three BPMs behave as a rigid-body at the level of less than 5 nm.

RHIC beam permit and quench detection communications system

International Nuclear Information System (INIS)

Conkling, C.R. Jr.

1997-01-01

A beam permit module has been developed to concentrate RHIC, subsystem sensor outputs, permit beam, and initiate emergency shutdowns. The modules accept inputs from the vacuum, cryogenic, power supply, beam loss, and superconducting magnet quench detection systems. Modules are located at equipment locations around the RHIC ring. The modules are connected by three fiberoptic communications links; a beam permit link, and two magnet power supply interlock links. During operation, carrier presence allows beam. If a RHIC subsystem detects a fault, the beam permit carrier terminates - initiating a beam dump. If the fault was a superconducting magnet quench, a power supply interlock carrier terminates - initiating an emergency magnet power dump. In addition, the master module triggers an event to cause remote sensors to log and hold data at the time-of-failure

The Beam Loss Detection System of the LHC Ring

CERN Document Server

Gschwendtner, E; Ferioli, G; Friesenbichler, W; Kain, V

2002-01-01

At the Large Hadron Collider (LHC) a beam loss system will be installed in the arc, dispersion suppressor and the straight regions for a continuous surveillance of particle losses. These beam particles deposit their energy partially in the super-conducting coils leading to temperature increase, possible magnet quenches and damages. The primary and secondary halo of the beam is absorbed by the collimation system. The tertiary halo will be lost at aperture limits in the ring. Its loss distribution along the magnets has been studies. At the positions, where most of the beam losses are expected, simulations of the particle fluences outside the cryostat and induced by lost protons at the aperture have been performed with the Monte Carlo Code Geant 3.2.1. This allows determining the most suitable positions of the detectors, the needed number of monitors and the impact on the dynamic range of the detectors. The design of the beam loss monitor system is presented that meet the required sensitivity, dynamic range and ...

Operation of the NuMI Beam Monitoring System

International Nuclear Information System (INIS)

Zwaska, Robert M.; Indurthy, Dharma; Keisler, Ryan; Kopp, Sacha; Mendoza, Steven; Pavlovich, Zarko; Proga, Marek; Bishai, Mary; Diwan, Milind; Viren, Brett; Harris, Debbie; Marchionni, Alberto; Morfin, Jorge; McDonald, Jeffrey; Naples, Donna; Northacker, David; Erwin, Albert; Ping, Huican; Velissaris, Cristos

2006-01-01

The NuMI (Neutrinos at the Main Injector) facility produces an intense neutrino beam for experiments. The NuMI Beam Monitoring system consists of four arrays of ion chambers that measure the intensity and distribution of the remnant hadron and tertiary muon beams produced in association with the neutrinos. The ion chambers operate in an environment of high particle fluxes and high radiation

DATA ACQUISITION FOR SNS BEAM LOSS MONITOR SYSTEM

International Nuclear Information System (INIS)

YENG, Y.; GASSNER, D.; HOFF, L.; WITKOVER, R.

2003-01-01

The Spallation Neutron Source (SNS) beam loss monitor system uses VME based electronics to measure the radiation produced by lost beam. Beam loss signals from cylindrical argon-filled ion chambers and neutron detectors will be conditioned in analog front-end (AFE) circuitry. These signals will be digitized and further processed in a dedicated VME crate. Fast beam inhibit and low-level, long-term loss warnings will be generated to provide machine protection. The fast loss data will have a bandwidth of 35kHz. While the low level, long-term loss data will have much higher sensitivity. This is further complicated by the 3 decade range of intensity as the Ring accumulates beam. Therefore a bandwidth of 100kHz and dynamic range larger than 21 bits data acquisition system will be required for this purpose. Based on the evaluation of several commercial ADC modules in preliminary design phase, a 24 bits Sigma-Delta data acquisition VME bus card was chosen as the SNS BLM digitizer. An associated vxworks driver and EPICS device support module also have been developed at BNL. Simulating test results showed this system is fully qualified for both fast loss and low-level, long-term loss application. The first prototype including data acquisition hardware setup and EPICS software (running database and OPI clients) will be used in SNS Drift Tube Linac (DTL) system commissioning

Spatial resolution test of a beam diagnostic system for DESIREE

Science.gov (United States)

Das, Susanta; Kallberg, A.

2010-11-01

A diagnostic system based on the observation of low energy ( ˜ 10 eV) secondary electrons (SE) produced by a beam, striking a metallic foil has been built to monitor and to cover the wide range of beam intensities and energies for Double ElectroStatic Ion Ring ExpEriment [1,2].The system consists of a Faraday cup to measure the beam current, a collimator with circular apertures of different diameters to measure the spatial resolution of the system, a beam profile monitoring system (BPMS), and a control unit. The BPMS, in turn, consists of an aluminim (Al) foil, a grid placed in front of the Al foil to accelerate the SE, position sensitive MCP, fluorescent screen, and a CCD camera to capture the images. The collimator contains a set of circular holes of different diameters and separations (d) between them. The collimator cuts out from the beam areas equal to the holes with separation d mm between the beams centers and creates well separated (distinguishable) narrow beams of approximately same intensity close to each other. A 10 keV proton beam was used. The spatial resolution of the system was tested for different Al plate and MCP voltages and resolution of better than 2 mm was achieved. Ref.: 1. K. Kruglov {et al}., NIM A 441 (2000) 595; 701 (2002) 193c, 2. MSL and Atomic Physics, Stockholm Univ.(www.msl.se, http://www.atom.physto.se/Cederquist/desiree/web/hc.html).

Beam diagnostics and data acquisition system for ion beam transport line used in applied research

International Nuclear Information System (INIS)

Skuratov, V.A.; Didyk, A.Yu.; Arkhipov, A.V.; Illes, A.; Bodnar, K.; Illes, Z.; Havancsak, K.

1999-01-01

Ion beam transport line for applied research on U-400 cyclotron, beam diagnostics and data acquisition system for condensed matter studies are described. The main features of Windows-based real time program are considered

Very-high-level neutral-beam control system

International Nuclear Information System (INIS)

Elischer, V.; Jacobson, V.; Theil, E.

1981-10-01

As increasing numbers of neutral beams are added to fusion machines, their operation can consume a significant fraction of a facility's total resources. LBL has developed a very high level control system that allows a neutral beam injector to be treated as a black box with just 2 controls: one to set the beam power and one to set the pulse duration. This 2 knob view allows simple operation and provides a natural base for implementing even higher level controls such as automatic source conditioning

Tutorial on beam-based feedback systems for linacs

International Nuclear Information System (INIS)

Hendrickson, L.; Allison, S.; Gromme, T.; Grossberg, P.; Himel, T.; Krauter, K.; MacKenzie, R.; Ross, M.; Sass, R.; Shoaee, H.

1994-08-01

A generalized fast feedback system stabilizes beams in the SLC. It performs measurements and modifies actuator settings to control beam states such as position, angle, energy and intensity on a pulse to pulse basis. An adaptive cascade feature allows communication between a series of linac loops, avoiding overcorrection problems. The system is based on the state space formalism of digital control theory. Due to the database-driven design, new loops are added without requiring software modifications. Recent enhancements support the monitoring and control of nonlinear states such as beam phase using excitation techniques. In over three years of operation, the feedback system has grown from its original eight loops to more than fifty loops, and it has been invaluable in stabilizing the machine

Numerical simulation research of 300 kV, 5 electrodes negative ion beam system

International Nuclear Information System (INIS)

Wang Huisan; Jian Guangde

2001-01-01

According to the characteristic of high current negative ion beam extraction and acceleration system for negative ion-based neutral beam injector, a numerical simulation model and a calculation code of the negative ion beam system are established in order to assist the design of the system. The movement behavior of the negative ion beam and accompanying electron beam in joint effect of the electric and magnetic field of the system is calculated. The effect of relative parameters on the negative ion beam optics characteristic is investigated, such as beam density, negative ion initial temperature and stripping losses, final electrode aperture displacement. The electromagnetic configuration in the system is optimized. The initial optimized results for the 300 kV, 5 electrodes negative ion beam system show that the magnetic field of this system can deflect the electron beam to the extraction electrode as electron acceptor at lower energy and that assuming 20% stripping losses of the H - ion in extraction region and 21 mA ·cm -2 extracted H - beam density, the r.m.s. divergence angle of all output beam lets and divergence angle of 85% output beam lets are 0.327 deg. and 0.460 deg., respectively

AIP Diffraction measurements using the LHC Beam Loss Monitoring System

CERN Document Server

Kalliokoski, Matti

2017-01-01

The Beam Loss Monitoring (BLM) system of the Large Hadron Collider protects the machine from beam induced damage by measuring the absorbed dose rates of beam losses, and by triggering beam dump if the rates increase above the allowed threshold limits. Although the detection time scales are optimized for multi-turn losses, information on fast losses can be recovered from the loss data. In this paper, methods in using the BLM system in di ff raction studies are discussed.

Beam loss monitor system for machine protection

CERN Document Server

Dehning, B

2005-01-01

Most beam loss monitoring systems are based on the detection of secondary shower particles which depose their energy in the accelerator equipment and finally also in the monitoring detector. To allow an efficient protection of the equipment, the likely loss locations have to be identified by tracking simulations or by using low intensity beams. If superconducting magnets are used for the beam guiding system, not only a damage protection is required but also quench preventions. The quench levels for high field magnets are several orders of magnitude below the damage levels. To keep the operational efficiency high under such circumstances, the calibration factor between the energy deposition in the coils and the energy deposition in the detectors has to be accurately known. To allow a reliable damage protection and quench prevention, the mean time between failures should be high. If in such failsafe system the number of monitors is numerous, the false dump probability has to be kept low to keep a high operation...

OPERATIONAL EXPERIENCE WITH BEAM ABORT SYSTEM FOR SUPERCONDUCTING UNDULATOR QUENCH MITIGATION*

Energy Technology Data Exchange (ETDEWEB)

Harkay, Katherine C.; Dooling, Jeffrey C.; Sajaev, Vadim; Wang, Ju

2017-06-25

A beam abort system has been implemented in the Advanced Photon Source storage ring. The abort system works in tandem with the existing machine protection system (MPS), and its purpose is to control the beam loss location and, thereby, minimize beam loss-induced quenches at the two superconducting undulators (SCUs). The abort system consists of a dedicated horizontal kicker designed to kick out all the bunches in a few turns after being triggered by MPS. The abort system concept was developed on the basis of single- and multi-particle tracking simulations using elegant and bench measurements of the kicker pulse. Performance of the abort system—kick amplitudes and loss distributions of all bunches—was analyzed using beam position monitor (BPM) turn histories, and agrees reasonably well with the model. Beam loss locations indicated by the BPMs are consistent with the fast fiber-optic beam loss monitor (BLM) diagnostics described elsewhere [1,2]. Operational experience with the abort system, various issues that were encountered, limitations of the system, and quench statistics are described.

Reliability of Beam Loss Monitor Systems for the Large Hadron Collider

International Nuclear Information System (INIS)

Guaglio, G.; Dehning, B.; Santoni, C.

2005-01-01

The increase of beam energy and beam intensity, together with the use of super conducting magnets, opens new failure scenarios and brings new criticalities for the whole accelerator protection system. For the LHC beam loss protection system, the failure rate and the availability requirements have been evaluated using the Safety Integrity Level (SIL) approach. A downtime cost evaluation is used as input for the SIL approach. The most critical systems, which contribute to the final SIL value, are the dump system, the interlock system, the beam loss monitors system, and the energy monitor system. The Beam Loss Monitors System (BLMS) is critical for short and intense particles losses at 7 TeV and assisted by the Fast Beam Current Decay Monitors at 450 GeV. At medium and higher loss time it is assisted by other systems, such as the quench protection system and the cryogenic system. For BLMS, hardware and software have been evaluated in detail. The reliability input figures have been collected using historical data from the SPS, using temperature and radiation damage experimental data as well as using standard databases. All the data has been processed by reliability software (Isograph). The analysis spaces from the components data to the system configuration

Reliability of Beam Loss Monitor Systems for the Large Hadron Collider

Science.gov (United States)

Guaglio, G.; Dehning, B.; Santoni, C.

2005-06-01

The increase of beam energy and beam intensity, together with the use of super conducting magnets, opens new failure scenarios and brings new criticalities for the whole accelerator protection system. For the LHC beam loss protection system, the failure rate and the availability requirements have been evaluated using the Safety Integrity Level (SIL) approach. A downtime cost evaluation is used as input for the SIL approach. The most critical systems, which contribute to the final SIL value, are the dump system, the interlock system, the beam loss monitors system, and the energy monitor system. The Beam Loss Monitors System (BLMS) is critical for short and intense particles losses at 7 TeV and assisted by the Fast Beam Current Decay Monitors at 450 GeV. At medium and higher loss time it is assisted by other systems, such as the quench protection system and the cryogenic system. For BLMS, hardware and software have been evaluated in detail. The reliability input figures have been collected using historical data from the SPS, using temperature and radiation damage experimental data as well as using standard databases. All the data has been processed by reliability software (Isograph). The analysis spaces from the components data to the system configuration.

A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

International Nuclear Information System (INIS)

Yi, Zhenxiang; Liao, Xiaoping

2013-01-01

In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW −1 at 8, 10 and 12 GHz, respectively. (paper)

Beam Diagnostics Systems for the National Ignition Facility

International Nuclear Information System (INIS)

Demaret, R D; Boyd, R D; Bliss, E S; Gates, A J; Severyn, J R

2001-01-01

The National Ignition Facility (NIF) laser focuses 1.8 megajoules of ultraviolet light (wavelength 351 nanometers) from 192 beams into a 600-micrometer-diameter volume. Effective use of this output in target experiments requires that the power output from all of the beams match within 8% over their entire 20-nanosecond waveform. The scope of NIF beam diagnostics systems necessary to accomplish this task is unprecedented for laser facilities. Each beamline contains 110 major optical components distributed over a 510-meter path, and diagnostic tolerances for beam measurement are demanding. Total laser pulse energy is measured with 2.8% precision, and the interbeam temporal variation of pulse power is measured with 4% precision. These measurement goals are achieved through use of approximately 160 sensor packages that measure the energy at five locations and power at three locations along each beamline using 335 photodiodes, 215 calorimeters, and 36 digitizers. Successful operation of such a system requires a high level of automation of the widely distributed sensors. Computer control systems provide the basis for operating the shot diagnostics with repeatable accuracy, assisted by operators who oversee system activities and setup, respond to performance exceptions, and complete calibration and maintenance tasks

Dependability analysis of a safety critical system the LHC beam dumping system at CERN

CERN Document Server

Filippini, R

2006-01-01

This thesis presents the dependability study of the Beam Dumping System of the Large Hadron Collider (LHC), the high energy particle accelerator to be commissioned at CERN in summer 2007. There are two identical, independent LHC Beam Dumping Systems (LBDS), one per LHC beam, each consisting of a series of magnets that extract the particle beam from the LHC ring into the extraction line leading to the absorbing block. The consequences of a failure within the LBDS can be very severe. This risk is reduced by applying redundancy to the design of the most critical components and on-line surveillance that, in case of a detected failure, issues a safe operation abort, called false beam dump. The system has been studied applying Failure Modes Effects and Criticality Analysis (FMECA) and reliability prediction. The system failure processes have been represented with a state transition diagram, governed by a Markov regenerative stochastic process, and analysed for different operational scenarios for one year of operati...

Beam test with the HIMAC RF control system

International Nuclear Information System (INIS)

Kanazawa, M.; Sato, K.; Itano, A.

1992-01-01

RF system of the HIMAC synchrotron has been developed and tested in the factory. With the high power system, we could sweep the acceleration frequency from 1MHz to 8MHz with the acceleration voltage of 6KV. The performance of the RF control system has been confirmed with a developed simulator of the synchrotron oscillation. Following these two tests in the factory, we had a beam test of the RF control system at TARN-II in INS (Institute for Nuclear Study, University of Tokyo). This paper describes the beam test and its results. (author)

NSRL 200 MeV linac beam energy stabilization system

International Nuclear Information System (INIS)

Huang Guirong; Pei Yuanji; Dong Sai

2001-01-01

By using the computer image processing technology and RF phase auto-shifting system, the ESS (Energy Stabilization System) was applied to 200 MeV Linac. the ESS adjusts beam energy automatically in a range of +-4 MeV. After adjustment beam energy stability is improved to +-6%

A set of dosimetry systems for electron beam irradiation

International Nuclear Information System (INIS)

Lin Min; Lin Jingwen; Chen Yundong; Li Huazhi; Xiao Zhenhong; Gao Juncheng

1999-01-01

To follow the rapid development of radiation processing with electron beams, it is urgent to set up a set of dosimetric standards to provide Quality Assurance (QA) of electron beam irradiation and unify the values of the quality of the absorbed dose measurements for electron beams. This report introduces a set of dosimetry systems established in Radiometrology Center of China Institute of Atomic Energy (RCCIAE), which have been or will be used as dosimetric standards in the Nuclear Industry System (NIS) in China. For instance, the potassium (silver) dichromate and ceric-cerous sulfate dosimetry systems will be used as standard dosimeters, while alanine-ESR dosimetry system as a transfer dosimeter, and FJL-01 CTA as a routine dosimeter. (author)

CAVITY BEAM POSITION MONITOR SYSTEM FOR ATF2

CERN Document Server

Boogert, S T; Cullinan, F; Joshi, N; Lyapin, A; Aryshev, A; Honda, Y; Naito, T; Terunuma, N; Urakara, J; Heo, A; Kim, E-S; Kim, Y I; McCormick, D; Frisch, J; Nelson, J; Smith, T; White, G R

2011-01-01

The Accelerator Test Facility 2 (ATF2) in KEK, Japan, is a prototype scaled demonstrator system for the final focus required for a future high energy lepton linear collider. The ATF2 beam-line is instrumented with a total of 41 high resolution C and S band resonant cavity beam position monitors (BPM) with associated mixer electronics and digitisers. In addition 4 high resolution BPMs have been recently installed at the interaction point, we briefly describe the first operational experience of these cavities in the ATF2 beam-line. The current status of the overall BPM system is also described, with a focus on operational techniques and performance.

Geometrical E-beam proximity correction for raster scan systems

Science.gov (United States)

Belic, Nikola; Eisenmann, Hans; Hartmann, Hans; Waas, Thomas

1999-04-01

High pattern fidelity is a basic requirement for the generation of masks containing sub micro structures and for direct writing. Increasing needs mainly emerging from OPC at mask level and x-ray lithography require a correction of the e-beam proximity effect. The most part of e-beam writers are raster scan system. This paper describes a new method for geometrical pattern correction in order to provide a correction solution for e-beam system that are not able to apply variable doses.

A beam sweeping system for the Fermilab antiproton production target

International Nuclear Information System (INIS)

Bieniosek, F.M.

1993-08-01

In the Main Injector era beam intensities high enough to damage the antiproton production target will be available. In order to continue to operate with a tightly-focused primary beam spot on the target, and thus maintain yield, it will be necessary to spread the hot spot on the target by use of a beam sweeping system. This report summarizes the requirements for such a system, and addresses the issues involved in the design of a sweeping system

The AGS Booster Beam Position Monitor system

International Nuclear Information System (INIS)

Ciardullo, D.J.; Abola, A.; Beadle, E.R.; Smith, G.A.; Thomas, R.; Van Zwienen, W.; Warkentien, R.; Witkover, R.L.

1991-01-01

To accelerate both protons and heavy ions, the AGS Booster requires a broadband (multi-octave) beam position monitoring system with a dynamic range spanning several orders of magnitude (2 x 10 10 to 1.5 x 10 13 particles per pulse). System requirements include the ability to acquire single turn trajectory and average orbit information with ± 0.1 mm resolution. The design goal of ± 0.5 mm corrected accuracy requires that the detectors have repeatable linear performance after periodic bakeout at 300 degree C. The system design and capabilities of the Booster Beam Position Monitor will be described, and initial results presented. 7 refs., 5 figs

Fiscal 1997 technological survey report. R and D on micromachine technology (Development of high functional maintenance technology for power station equipment); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Activities were conducted in search of micromachine technology for a high functional maintenance system that inspects and repairs abnormal conditions such as cracks in a heat exchanger or a piping system without disassembling it in a power generating station such as a thermal or nuclear power plant. The activities were proceeded in four areas of (1) experimental manufacturing of the system (an inline self-running environment recognizing system, an external inspection system for fine tube group, and a system capable of light internal operation such as welding), (2) R and D on sophistication technology for functional devices, (3) R and D on common basic technologies, and (4) comprehensive investigation and research. In (1), examination of detailed basic specifications was carried out, as were examination of element technologies, experimental manufacturing and operation test of element devices, and performance evaluation. Further, a part of element devices was made on an experimental basis, with the basic functions demonstrated. In the comprehensive investigation and research, a trend in the future maintenance technology in power generating equipment was obtained and pigeonholed. (NEDO)

Benzocyclobutene-based electric micromachines supported on microball bearings: Design, fabrication, and characterization

Science.gov (United States)

Modafe, Alireza

This dissertation summarizes the research activities that led to the development of the first microball-bearing-supported linear electrostatic micromotor with benzocyclobutene (BCB) low-k polymer insulating layers. The primary application of this device is long-range, high-speed linear micropositioning. The future generations of this device include rotary electrostatic micromotors and microgenerators. The development of the first generation of microball-bearing-supported micromachines, including device theory, design, and modeling, material characterization, process development, device fabrication, and device test and characterization is presented. The first generation of these devices is based on a 6-phase, bottom-drive, linear, variable-capacitance micromotor (B-LVCM). The design of the electrical and mechanical components of the micromotor, lumped-circuit modeling of the device and electromechanical characteristics, including variable capacitance, force, power, and speed are presented. Electrical characterization of BCB polymers, characterization of BCB chemical mechanical planarization (CMP), development of embedded BCB in silicon (EBiS) process, and integration of device components using microfabrication techniques are also presented. The micromotor consists of a silicon stator, a silicon slider, and four stainless-steel microballs. The aligning force profile of the micromotor was extracted from simulated and measured capacitances of all phases. An average total aligning force of 0.27 mN with a maximum of 0.41 mN, assuming a 100 V peak-to-peak square-wave voltage, was measured. The operation of the micromotor was verified by applying square-wave voltages and characterizing the slider motion. An average slider speed of 7.32 mm/s when excited by a 40 Hz, 120 V square-wave voltage was reached without losing the synchronization. This research has a pivotal impact in the field of power microelectromechanical systems (MEMS). It establishes the foundation for the

MATLAB based beam orbit correction system of HLS storage ring

International Nuclear Information System (INIS)

Ding Shichuan; Liu Gongfa; Xuan Ke; Li Weimin; Wang Lin; Wang Jigang; Li Chuan; Bao Xun; Guo Weiqun

2006-01-01

The distortion of closed orbit usually causes much side effect which is harmful to synchrotron radiation source such as HLS, so it is necessary to correct the distortion of closed orbit. In this paper, the correction principle, development procedure and test of MATLAB based on beam orbit correction system of HLS storage ring are described. The correction system is consisted of the beam orbit measure system, corrector magnet system and the control system, and the beam orbit correction code based on MATLAB is working on the operation interface. The data of the beam orbit are analyzed and calculated firstly, and then the orbit is corrected by changing corrector strength via control system. The test shows that the distortion of closed orbit is from max 4.468 mm before correction to max 0.299 mm after correction as well as SDEV is from 2.986 mm to 0.087 mm. So the correction system reaches the design goal. (authors)

Beam-plasma interaction in case of injection of the electron beam to the symmetrically open plasma system

International Nuclear Information System (INIS)

Opanasenko, A.V.; Romanyuk, L.I.

1992-01-01

A beam-plasma interaction at the entrance of the symmetrically open plasma system with an electron beam injected through it is investigated. An ignition of the plasma-beam discharge on waves of upper hybrid dispersion branch of a magnetoactive plasma is found in the plasma penetrating into the vacuum contrary to the beam. It is shown that the beam-plasma discharge is localized in the inhomogeneous penetrating plasma in the zone where only these waves exist. Regularities of the beam-plasma discharge ignition and manifestation are described. It is determined that the electron beam crossing the discharge zone leads to the strong energy relaxation of the beam. It is shown possible to control the beam-plasma discharge ignition by changing the potential of the electron beam collector. (author)

Electron beam processing system

International Nuclear Information System (INIS)

Kashiwagi, Masayuki

2004-01-01

Electron beam Processing Systems (EPS) are used as useful and powerful tools in many industrial application fields such as the production of cross-linked wire, rubber tire, heat shrinkable film and tubing, curing, degradation of polymers, sterilization and environmental application. In this paper, the feature and application fields, the selection of machine ratings and safety measures of EPS will be described. (author)

Beam-based calibration system of BPM offset on BEPC

International Nuclear Information System (INIS)

Hu Chunliang

2004-01-01

The ever-increasing demand for better performance from circular accelerators requires improved methods to calibrate beam position monitors (BPM). A beam based calibration system has been established to locate the centers of the BPM with respect to the magnetic center of quadrupole magnets. Additional windings are applied to the quadrupole magnets to make the quadrupole magnetic strength individually adjustable and the number of the power supply of all 32 additional windings is only one. Software system has been finished to automatically measure the offsets of BPMs. The effect of the beam-based calibration system shows that the calibration of BPM has been more quickly and accurately

Electron beam irradiation of porous silicon for application in micromachining and sensing

International Nuclear Information System (INIS)

Borini, S.; Rocchia, M.; Rossi, A.M.; Boarino, L.; Amato, G.

2005-01-01

We have studied the effect of the electron beam (EB) irradiation on porous silicon (PS), in order to find new possibilities for the local modification of the material at the submicrometer scale. The interaction between the accelerated electrons and PS has been investigated by means of two main techniques: infrared spectroscopy and profilometric measurements. All the results show that a strong increase of reactivity is induced on PS surface under exposure to the EB, due to the hydrogen desorption provoked by the incident electrons. We demonstrate that this phenomenon can be exploited for both the lateral structuring and the local functionalization of PS, at the submicrometer scale, depending on the different treatments applied to the samples after the EB bombardment. (copyright 2005 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

Data acquisition system for medium power neutral beam test facility

International Nuclear Information System (INIS)

Stewart, C.R. Jr.; Francis, J.E. Jr.; Hammons, C.E.; Dagenhart, W.K.

1978-06-01

The Medium Power Neutral Beam Test Facility at Oak Ridge National Laboratory was constructed in order to develop, test, and condition powerful neutral beam lines for the Princeton Large Torus experiment at Princeton Plasma Physics Laboratory. The data acquisition system for the test stand monitors source performance, beam characteristics, and power deposition profiles to determine if the beam line is operating up to its design specifications. The speed of the computer system is utilized to provide near-real-time analysis of experimental data. Analysis of the data is presented as numerical tabulation and graphic display

Beam shaping to provide round and square-shaped beams in optical systems of high-power lasers

Science.gov (United States)

Laskin, Alexander; Laskin, Vadim

2016-05-01

Optical systems of modern high-power lasers require control of irradiance distribution: round or square-shaped flat-top or super-Gaussian irradiance profiles are optimum for amplification in MOPA lasers and for thermal load management while pumping of crystals of solid-state ultra-short pulse lasers to control heat and minimize its impact on the laser power and beam quality while maximizing overall laser efficiency, variable profiles are also important in irradiating of photocathode of Free Electron lasers (FEL). It is suggested to solve the task of irradiance re-distribution using field mapping refractive beam shapers like piShaper. The operational principle of these devices presumes transformation of laser beam intensity from Gaussian to flat-top one with high flatness of output wavefront, saving of beam consistency, providing collimated output beam of low divergence, high transmittance, extended depth of field, negligible residual wave aberration, and achromatic design provides capability to work with ultra-short pulse lasers having broad spectrum. Using the same piShaper device it is possible to realize beams with flat-top, inverse Gauss or super Gauss irradiance distribution by simple variation of input beam diameter, and the beam shape can be round or square with soft edges. This paper will describe some design basics of refractive beam shapers of the field mapping type and optical layouts of their applying in optical systems of high-power lasers. Examples of real implementations and experimental results will be presented as well.

Construction of ion beam pulse radiolysis system

Energy Technology Data Exchange (ETDEWEB)

Chitose, Norihisa; Katsumura, Yosuke; Domae, Masafumi; Ishigure, Kenkichi; Murakami, Takeshi [Tokyo Univ. (Japan)

1996-10-01

An ion beam pulse radiolysis system has been constructed at HIMAC facility. Ion beam of 24 MeV He{sup 2+} with the duration longer than 1 {mu}s is available for irradiation. Three kinds of aqueous solutions, (C{sub 6}H{sub 5}){sub 2}CO, NaHCO{sub 3} and KSCN, were irradiated and the absorption signals were observed. (author)

Plasma waves in hot relativistic beam-plasma systems: Pt. 1

International Nuclear Information System (INIS)

Magneville, A.

1990-01-01

Dispersion relations of plasma waves in a beam-plasma system are computed in the general case where the plasma and beam temperatures, and the velocity of the beam, may be relativistic. The two asymptotic temperature cases, and different contributions of plasma or beam particles to wave dispersion are considered. (author)

A new beam diagnostic system for the MASHA setup

International Nuclear Information System (INIS)

Motycak, S.; Kamas, D.; Rodin, A.M.; Novoselov, A.S.; Podshibyakin, A.V.; Belozerov, A.V.; Vedeneyev, V.Yu.; Gulyaev, A.V.; Gulyaeva, A.V.; Salamatin, V.S.; Stepantsov, S.V.; Chernysheva, E.V.; Yukhimchuk, S.A.; Komarov, A.B.; Krupa, L.; Kliman, J.

2016-01-01

A new beam diagnostic system based on the PXI standard was developed, tested, and used in the MASHA setup experiment. The beam energy and beam current measurements were carried out using several methods. The online time-of-flight energy measurements were carried out using three pick-up detectors. We used two electronic systems to measure the time between the pick-ups. The first system was based on fast Agilent digitizers (2-channel, 4-GHz sampling rate), and the second one was based on a constant fraction discriminator (CFD) connected to a time-to-digital converter (TDC, 5-ps resolution). A new graphical interface to monitor the electronic devices and to perform the online calculations of energy was developed using MFC C ++. The second system based on microchannel plate (time-of-flight) and silicon detectors for the determination of beam energy and the type of accelerated particles was also used. The beam current measurements were carried out with two different sensors. The first sensor is a rotating Faraday cup placed in front of the target, and the second one is an emission detector installed at the rear of the target. This system is now used in experiments for the synthesis of superheavy elements at the U400M cyclotron of the Flerov Laboratory of Nuclear Reactions (FLNR).

A new beam diagnostic system for the MASHA setup

Science.gov (United States)

Motycak, S.; Rodin, A. M.; Novoselov, A. S.; Podshibyakin, A. V.; Krupa, L.; Belozerov, A. V.; Vedeneyev, V. Yu.; Gulyaev, A. V.; Gulyaeva, A. V.; Kliman, J.; Salamatin, V. S.; Stepantsov, S. V.; Chernysheva, E. V.; Yuchimchuk, S. A.; Komarov, A. B.; Kamas, D.

2016-09-01

A new beam diagnostic system based on the PXI standard was developed, tested, and used in the MASHA setup experiment. The beam energy and beam current measurements were carried out using several methods. The online time-of-flight energy measurements were carried out using three pick-up detectors. We used two electronic systems to measure the time between the pick-ups. The first system was based on fast Agilent digitizers (2-channel, 4-GHz sampling rate), and the second one was based on a constant fraction discriminator (CFD) connected to a time-to-digital converter (TDC, 5-ps resolution). A new graphical interface to monitor the electronic devices and to perform the online calculations of energy was developed using MFC C++. The second system based on microchannel plate (time-of-flight) and silicon detectors for the determination of beam energy and the type of accelerated particles was also used. The beam current measurements were carried out with two different sensors. The first sensor is a rotating Faraday cup placed in front of the target, and the second one is an emission detector installed at the rear of the target. This system is now used in experiments for the synthesis of superheavy elements at the U400M cyclotron of the Flerov Laboratory of Nuclear Reactions (FLNR).

Doublet III neutral beam multi-stream command language system

International Nuclear Information System (INIS)

Campbell, L.; Garcia, J.R.

1983-01-01

A multi-stream command language system was developed to provide control of the dual source neutral beam injectors on the Doublet III experiment at GA Technologies Inc. The Neutral Beam command language system consists of three parts: compiler, sequencer, and interactive task. The command language, which was derived from the Doublet III tokamak command language, POPS, is compiled, using a recursive descent compiler, into reverse polish notation instructions which then can be executed by the sequencer task. The interactive task accepts operator commands via a keyboard. The interactive task directs the operation of three input streams, creating commands which are then executed by the sequencer. The streams correspond to the two sources within a Doublet III neutral beam, plus an interactive stream. The sequencer multiplexes the execution of instructions from these three streams. The instructions include reads and writes to an operator terminal, arithmetic computations, intrinsic functions such as CAMAC input and output, and logical instructions. The neutral beam command language system was implemented using Modular Computer Systems (ModComp) Pascal and consists of two tasks running on a ModComp Classic IV computer. The two tasks, the interactive and the sequencer, run independently and communicate using shared memory regions. The compiler runs as an overlay to the interactive task when so directed by operator commands. The system is succesfully being used to operate the three neutral beams on Doublet III

A beam-synchronous gated peak-detector for the LHC beam observation system

CERN Document Server

Levens, T E; Wehrle, U

2013-01-01

Measurements of the bunch peak amplitude using the longitudinal wideband wall-current monitor are a vital tool used in the Large Hadron Collider (LHC) beam observation system. These peak-detected measurements can be used to diagnose bunch shape oscillations, for example coherent quadrupole oscillations, that occur at injection and during beam manipulations. Peak-detected Schottky diagnostics can also be used to obtain the synchrotron frequency distribution and other parameters from a bunched beam under stable conditions. For the LHC a beam-synchronous gated peak detector has been developed to allow individual bunches to be monitored without the influence of other bunches circulating in the machine. The requirement for the observation of both low intensity pilot bunches and high intensity bunches for physics requires a detector front-end with a high bandwidth and a large dynamic range while the usage for Schottky measurements requires low noise electronics. This paper will present the design of this detector s...

PLT and Doublet III neutral beam injection systems

International Nuclear Information System (INIS)

Haselton, H.H.; Dagenhart, W.K.; Schechter, D.E.; Stewart, L.D.; Stirling, W.L.

1976-01-01

The design program is being supported by experimental work with all beam line components: gas cells, bending magnets, beam stops, magnetic shielding, and high speed-high throughput cryopumping systems. Stray toroidal fields and fields produced by external transmission or mirror magnets are under study to determine the optimum means of removing the unneutralized component from the beam. Concepts utilizing materials with high permeability are adequate to provide the source with the necessary magnetic shielding. Beam stops capable of dissipating a power density of 10 to 40 kW/cm 2 are required for ion dumps, diagnostics, and on line ion source conditioning

Particle beam digital phase control system for COSY

International Nuclear Information System (INIS)

Schnase, A.

1994-02-01

Particle accelerators require that the orbit of the charged particles in the vacuum chamber is controlled to fulfil narrow limits. This is done by magnetic deflection systems and exactly adjusted rf-acceleration. Up to now the necessary control-functions were realised with analogue parts. This work describes a digital phase control system that works in real time and is used with the proton accelerator COSY. The physical design of the accelerator sets the accuracy-specifications of the revolution frequency (<1 Hz in the whole range from 400 kHz to 1.6 MHz), the phase-difference (<0.01 ), the signal-to-noise-ratio (<-60 dBc) and the update rate (<1 μs) of the parameters. In a typical operation the beam is first bunched and synchronised to the reference oscillator. After that the beam influences the rf-system with the help of charge detectors and now the rf-systems will be synchronised with the bunched beam. This control-loop is modelled and simulated with PSPICE. (orig.)

Calibration Measurements of the LHC Beam Dumping System Extraction Kicker Magnets

CERN Document Server

Uythoven, J; Ducimetière, L; Goddard, B; Gräwer, G; Olivieri, F; Pereira, L; Vossenberg, Eugène B

2006-01-01

The LHC beam dumping system must protect the LHC machine from damage by reliably and safely extracting and absorbing the circulating beams when requested. Two sets of 15 extraction kicker magnets form the main active part of this system. They have been produced, tested and calibrated by measuring the integrated magnetic field and the magnet current at different beam energies. The calibration data have been analysed, and the critical parameters are compared with the specifications. Implications for the configuration, control and operation of the beam dumping system are discussed.

Fast automatic system for measurements of beam parameters of the MMF linac

International Nuclear Information System (INIS)

Reinhardt-Nickulin, P.; Bragin, S.; Ilinsky, N.; Senichev, Yu.

1992-01-01

Fast transverse beam profile and current monitoring systems have been tested at the Linear Accelerator of Moscow Meson Factory. The signals for each system are derived from multiwire secondary emission chamber and beam current transformer. Each beam pulse is digitized by fast ADC's. There are two modes for systems. First one is for detailed beam adjustment and second one is for normal 100 Hz rate of the MMF Linac. Essential features of the hardware, software, data acquisition, measurement accuracy and beam results are presented. (author)

Silicon Micromachined Sensor for Broadband Vibration Analysis

Science.gov (United States)

Gutierrez, Adolfo; Edmans, Daniel; Cormeau, Chris; Seidler, Gernot; Deangelis, Dave; Maby, Edward

1995-01-01

The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

CAVITY BEAM POSITION MONITOR SYSTEM FOR ATF2

CERN Document Server

Boogert, S T; Boorman, G; Molloy, S; Ross, M; Aryshev, A; Honda, Y; Terunuma, N; Urakawa, J; Kim, E S; Kim, Y I; Heo, A E; Lyapin, A; Swinson, C J; Frisch, J; McCormick, D M; Nelson, J; Smith, T; White, G R

2010-01-01

The Accelerator Test Facility 2 (ATF2) in KEK, Japan, is a prototype scaled demonstrator system for the final focus required for a future high energy lepton linear collider. The ATF2 beam-line is instrumented with a total of 38 C and S band resonant cavity beam position monitors (CBPM) with associated mixer electronics and digitizers. The current status of the BPM system is described, with a focus on operational techniques and performance.

The LEP RF Trip and Beam Loss Diagnostics System

CERN Document Server

Arnaudon, L; Beetham, G; Ciapala, Edmond; Juillard, J C; Olsen, R

2002-01-01

During the last years of operation the number of operationally independent RF stations distributed around LEP reached a total of 40. A serious difficulty when running at high energy and high beam intensities was to establish cause and effect in beam loss situations, where the trip of any single RF station would result in beam loss, rapidly producing further multiple RF station trips. For the last year of operation a fast post-mortem diagnostics system was developed to allow precise time-stamping of RF unit trips and beam intensity changes. The system was based on eight local DSP controlled fast acquisition and event recording units, one in each RF sector, connected to critical RF control signals and fast beam intensity monitors and synchronised by GPS. The acquisition units were armed and synchronised at the start of each fill. At the end of the fill the local time-stamped RF trip and beam intensity change history tables were recovered, events ordered and the results stored in a database for subsequent analys...

Proton beam therapy control system

Science.gov (United States)

Baumann, Michael A [Riverside, CA; Beloussov, Alexandre V [Bernardino, CA; Bakir, Julide [Alta Loma, CA; Armon, Deganit [Redlands, CA; Olsen, Howard B [Colton, CA; Salem, Dana [Riverside, CA

2008-07-08

A tiered communications architecture for managing network traffic in a distributed system. Communication between client or control computers and a plurality of hardware devices is administered by agent and monitor devices whose activities are coordinated to reduce the number of open channels or sockets. The communications architecture also improves the transparency and scalability of the distributed system by reducing network mapping dependence. The architecture is desirably implemented in a proton beam therapy system to provide flexible security policies which improve patent safety and facilitate system maintenance and development.

High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

KAUST Repository

Sallam, Mai O.

2015-10-26

In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

KAUST Repository

Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; De Raedt, Walter; Sedky, Sherif; Vandenbosch, Guy A. E.; Soliman, Ezzeldin A.

2015-01-01

In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

ITER neutral beam system

International Nuclear Information System (INIS)

Mondino, P.L.; Di Pietro, E.; Bayetti, P.

1999-01-01

The Neutral Beam (NB) system for the International Thermonuclear Experimental Reactor (ITER) has reached a high degree of integration with the tokamak and with the rest of the plant. Operational requirements and maintainability have been considered in the design. The paper considers the integration with the tokamak, discusses design improvements which appear necessary and finally notes R and D progress in key areas. (author)

RF Performance of a 600-720 GHz Sideband Separating Mixer with All-Copper Micromachined Waveguide Mixer Block

NARCIS (Netherlands)

Mena, F. P.; Kooi, J.; Baryshev, A. M.; Lodewijk, C. F. J.; Klapwijk, T. M.; Wild, W.; Desmaris, V.; Meledin, D.; Pavolotsky, A.; Belitsky, V.; Wild, Wolfgang

2008-01-01

Here we report on the RF performance of a 2SB mixer (600-720 GHz) fabricated in a new method that combines traditional micromachining with waveguide components fabricated by photolithography and electroplating. The latter allows reaching, in a reproducible way, the stringent accuracies necessary for

Surface micromachined counter-meshing gears discrimination device

Science.gov (United States)

Polosky, Marc A.; Garcia, Ernest J.; Allen, James J.

2000-12-12

A surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. Each of two CMG has a first portion of its perimeter devoted to continuous driving teeth that mesh with respective pinion gears. Each EMG also has a second portion of its perimeter devoted to regularly spaced discrimination gear teeth that extend outwardly on at least one of three levels of the CMG. The discrimination gear teeth are designed so as to pass each other without interference only if the correct sequence of partial rotations of the CMG occurs in response to a coded series of rotations from the pinion gears. A 24 bit code is normally input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect.

Studies on the beam system for the calibration of the OPAL jet chamber with laser beams

International Nuclear Information System (INIS)

Maringer, G.

1988-07-01

UV laser beams are an important tool for the calibration of the OPAL jet chamber. A beam transport system containing about 350 mirrors in total guides the beams from the laser outside the detector into the chamber. Four of the mirrors are moveable under remote control allowing to guide the beams into each of the 24 sectors and to correct the beam path in case of deviations. A program to control these moveable mirrors has been developed. Drift velocity measurements will be performed by means of double beams which are generated by appropriate beamsplitters. Accurate knowledge of the double beam distances is essential to obtain the desired accuracy of better than 0.1% or 10 μm. Using a CCD device with a pixel size of 23x23 μm 2 the beam distance could be measured with errors below the required limit. (orig.)

Wave Propagation in an Ion Beam-Plasma System

DEFF Research Database (Denmark)

Jensen, T. D.; Michelsen, Poul; Juul Rasmussen, Jens

1979-01-01

The spatial evolution of a velocity- or density-modulated ion beam is calculated for stable and unstable ion beam plasma systems, using the linearized Vlasov-Poisson equations. The propagation properties are found to be strongly dependent on the form of modulation. In the case of velocity...

TFTR neutral beam injection system conceptual design

International Nuclear Information System (INIS)

1975-01-01

Three subsystems are described in the following chapters: (1) Neutral Beam Injection Line; (2) Power Supplies; and (3) Controls. Each chapter contains two sections: (1) Functions and Design Requirements; this is a brief listing of the requirements of components of the subsystem. (2) Design Description; this section describes the design and cost estimates. The overall performance requirements of the neutral beam injection system are summarized. (MOW)

The AGS Booster beam loss monitor system

International Nuclear Information System (INIS)

Beadle, E.R.; Bennett, G.W.; Witkover, R.L.

1991-01-01

A beam loss monitor system has been developed for the Brookhaven National Laboratory Booster accelerator, and is designed for use with intensities of up to 1.5 x 10 13 protons and carbon to gold ions at 50-3 x 10 9 ions per pulse. This system is a significant advance over the present AGS system by improving the sensitivity, dynamic range, and data acquisition. In addition to the large dynamic range achievable, it is adaptively shifted when high losses are detected. The system uses up to 80 argon filled ion chambers as detectors, as well as newly designed electronics for processing and digitizing detector outputs. The hardware simultaneously integrates each detector output, interfaces to the beam interrupt systems, and digitizes all 80 channels to 21 bits at 170 KHz. This paper discuses the design, construction, and operation of the system. 4 refs., 2 figs

Accelerator System Development at High Voltage Engineering

International Nuclear Information System (INIS)

Klein, M. G.; Gottdang, A.; Haitsma, R. G.; Mous, D. J. W.

2009-01-01

Throughout the years, HVE has continuously extended the capabilities of its accelerator systems to meet the rising demands from a diverse field of applications, among which are deep level ion implantation, micro-machining, neutron production for biomedical research, isotope production or accelerator mass spectrometry. Characteristic for HVE accelerators is the coaxial construction of the all solid state power supply around the acceleration tubes. With the use of solid state technology, the accelerators feature high stability and very low ripple. Terminal voltages range from 1 to 6 MV for HVE Singletrons and Tandetrons. The high-current versions of these accelerators can provide ion beams with powers of several kW. In the last years, several systems have been built with terminal voltages of 1.25 MV, 2 MV and 5 MV. Recently, the first system based on a 6 MV Tandetron has passed the factory tests. In this paper we describe the characteristics of the HVE accelerator systems and present as example recent systems.

Design of cryo-vacuum system for MW neutral beam injector

International Nuclear Information System (INIS)

Hu Chundong; Xie Yuanlai

2010-01-01

Neutral beam injector is an equipment that is used to produce and then to neutralize high energetic particle beam. A neutral beam injector (EAST-NBI) with MW magnitude neutral beam power is considered to be developed to support the EAST physical research. The requirements for vacuum system were analyzed after introducing the principle of EAST-NBI. A differential vacuum system structure was chosen after analyzing the performance of different vacuum pumping system structure. The gas sources and their characteristics were analyzed, and two inserted type cryocondensation pumps were chosen as main vacuum pump. The schematic structure of the two cryocondensation pump with pumping area 8 m 2 and 6 m 2 were given and their cooling method and temperature control mode were determined. (authors)

Development of the TFTR neutral beam injection system

International Nuclear Information System (INIS)

Prichard, B.A. Jr.

1978-01-01

The TFTR Neutral Beam Lines are designed to inject 20 MW of 120 keV neutral deuterium atoms into the plasma. This is accomplished using 12 sources, 65 amperes each, mounted in 4 beam lines. The 120 kV sources are being developed by LBL and a prototype beam line which will be tested at Berkeley is being developed as a cooperative effort by LLL and LBL. The implementation of these beam lines has required the development of several associated pieces of hardware. The control and monitoring of the 12 sources will be done via the TFTR computer control system (CICADA) as will other parts of the machine, and software is being developed to condition and operate the sources automatically. The prototype beam line is scheduled to begin operation in the fall of 1978 and all four production beam lines on TFTR in 1982

Feedback control and beam diagnostic algorithms for a multiprocessor DSP system

International Nuclear Information System (INIS)

Teytelman, D.; Claus, R.; Fox, J.; Hindi, H.; Linscott, I.; Prabhakar, S.

1996-09-01

The multibunch longitudinal feedback system developed for use by PEP-II, ALS and DAΦNE uses a parallel array of digital signal processors to calculate the feedback signals from measurements of beam motion. The system is designed with general-purpose programmable elements which allow many feedback operating modes as well as system diagnostics, calibrations and accelerator measurements. The overall signal processing architecture of the system is illustrated. The real-time DSP algorithms and off-line postprocessing tools are presented. The problems in managing 320 K samples of data collected in one beam transient measurement are discussed and the solutions are presented. Example software structures are presented showing the beam feedback process, techniques for modal analysis of beam motion(used to quantify growth and damping rates of instabilities) and diagnostic functions (such as timing adjustment of beam pick-up and kicker components). These operating techniques are illustrated with example results obtained from the system installed at the Advanced Light Source at LBL

New lens system using toroidal magnetic field for intense ion beam

International Nuclear Information System (INIS)

Mohri, Akihiro; Ikuta, Kazunari; Fujita, Junji.

1976-11-01

The use of toroidal magnetic field as a lens system is proposed for producing intense ion beam. The characteristics of the lens system are obtained both analytically and numerically. Some examples of ray-trajectories are presented for different focal lengths. The system is applicable to neutral beam injection heating and micro-pellet implosion for nuclear fusion, and to the other fields such as ion beam X-ray lasers. (auth.)

Structural design considerations for micromachined solid-oxide fuel cells

Science.gov (United States)

Srikar, V. T.; Turner, Kevin T.; Andrew Ie, Tze Yung; Spearing, S. Mark

Micromachined solid-oxide fuel cells (μSOFCs) are among a class of devices being investigated for portable power generation. Optimization of the performance and reliability of such devices requires robust, scale-dependent, design methodologies. In this first analysis, we consider the structural design of planar, electrolyte-supported, μSOFCs from the viewpoints of electrochemical performance, mechanical stability and reliability, and thermal behavior. The effect of electrolyte thickness on fuel cell performance is evaluated using a simple analytical model. Design diagrams that account explicitly for thermal and intrinsic residual stresses are presented to identify geometries that are resistant to fracture and buckling. Analysis of energy loss due to in-plane heat conduction highlights the importance of efficient thermal isolation in microscale fuel cell design.

A beam energy measurement system at NIRS-930 cyclotron

International Nuclear Information System (INIS)

Hojo, S.; Honma, T.; Sakamoto, Y.; Miyahara, N.; Okada, T.; Komatsu, K.; Tsuji, N.; Yamada, S.

2005-01-01

A beam energy measurement system employing a set of capacitive probes has been developed at NIRS-930 cyclotron. Principle of the measurement is applying a modified-TOF method, so that the two proves are installed at one of the straight section in the beam transport line. Usually they are separated about 5.8 m, which is equivalent to the almost final path length of the beam extracted in the cyclotron. In the measurement, two beam signals are superimposed by adjusting a position of the downstream-probe along the beam direction with watching an oscilloscope screen roughly. In order to determine the beam energy accurately the signals are processed by MCA with suitable electric module. (author)

Instrumentation system for long-pulse MFTF neutral beams

International Nuclear Information System (INIS)

Risch, D.M.

1981-01-01

The instrumentation system for long pulse neutral beams for MFTFS consists of monitoring and protective circuitry. Global synchronization of high speed monitoring data across twenty-four neutral beams is achieved via an experiment wide fiber optic timing system. Fiber optics are also used as a means of isolating signals at elevated voltages. An excess current monitor, interrupt monitor, sparkdown detector, spot detector and gradient grid ratio detector form the primary protection for the neutral beam source. A unique hierarchical interlocking scheme allows other protective devices to be factored into the shutdown circuitry of the power supply so that the initiating cause of a shutdown can be isolated and even allows some non-critical devices to be safely ignored for a period of time

A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

2006-01-01

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

Prototype system for phase advance measurements of LHC small beam oscillations

CERN Document Server

Olexa, J; Brezovic, Z; Gasior, M

2013-01-01

Magnet lattice parameters of the Large Hadron Collider (LHC) are measured by exciting beam transverse oscillations that allow measuring their phase advance using the beam position measurement (BPM) system. However, the BPM system requires millimetre oscillation amplitudes, with which nominal high intensity beams would cause large particle loss, dangerous for the LHC superconducting magnets. Therefore, such measurements cannot be done often, as they require special low intensity beams with important set-up time. After its first long shut-down the LHC will be equipped with new collimators with embedded BPMs, for which a new front-end electronics has been developed. Its main processing channels based on compensated diode detectors are designed for beam orbit measurement with sub-micrometre resolution. It is planned to extend this system by adding dedicated channels optimised for phase advance measurement, allowing continuous LHC optics measurement with much smaller beam excitation. This subsystem will be based o...

Beam propagation considerations in the Aurora laser system

International Nuclear Information System (INIS)

Rosoche, L.A.; Mc Leod, J.; Hanlon, J.A.

1987-01-01

Aurora is a high-power KrF laser system now being constructed for inertial confinement fusion (ICF) studies. It will use optical angular multiplexing and serial amplification by electron-beam-driven KrF amplifiers to deliver a stacked, multikilojoule 5-ns-duration laser pulse to ICF targets. The requirements of angular multiplexing KrF lasers at the multikilojoule level dictate path lengths on the order of 1 km. The inherent complicated path crossings produced by angular multiplexing and pulse stacking do not allow isolation of individual beam lines, so the optical quality of the long beam paths must be controlled. Propagation of the 248-nm light beams over long paths in air is affected by scattering, absorption thermal gradients and turbulence, beam alignment, and control and optical component figure errors

Electron beam extraction system with a ring radiation field

International Nuclear Information System (INIS)

Auslender, V.L.; Kuksanov, N.K.; Polyakov, V.A.; Salimov, R.A.; Chertok, I.L.

1979-01-01

Description and results of testings of two electron beam extraction systems for shaping of a circular irradiation field are given. One of the systems contains three 20 cm long outlet windows arranged at 120 deg angle with respect to each other. Tests at the ILU-6 accelerator have shown that the given system provides 150 mm zone irradiation from three sides. Beam utilization factor when irradiating three 40 mm dia tubes amounted to 35% which provides capacity of 2.5 txMrad/h at 20 kW beam power. The other extraction system includes two C-form magnets producing nonuniform and opposing magnetic fields. This system tests at the EhLV-2 accelerator have shown that at 0.8-1.5 MeV electron energy it is possible to irradiate of 60 and 100 mm dia objects, accordingly. The system may be used together with both constant-action and pulse-action accelerators having extraction with linear scanning [ru

Detection systems for radioactive ion beams; Systeme de detection en ions radioactifs

Energy Technology Data Exchange (ETDEWEB)

Savajols, H

2002-07-01

Two main methods are used to produce radioactive ion beams: -) the ISOL method (isotope separation on-line) in which the stable beam interacts with a thick target, the reaction products diffuse outside the target and are transferred to a source where they are ionized, a mass separator and a post-accelerator drive the selected radioactive ions to the right energy; -) the in-flight fragmentation method in which the stable beam interacts with a thin target, the reaction products are emitted from the target with a restricted angular distribution and a velocity close to that of the incident beam, the experimenter has to take advantage from the reaction kinetics to get the right particle beam. Characteristic time is far longer with the ISOL method but the beam intensity is much better because of the use of a post-accelerator. In both cases, the beam intensity is lower by several orders of magnitude than in the case of a stable beam. This article presents all the constraints imposed by radioactive beams to the detection systems of the reaction products and gives new technical solutions according to the type of nuclear reaction studied. (A.C.)

A system for measuring the energy spread of an accelerated beam

International Nuclear Information System (INIS)

Wilkerson, J.F.; Ludwig, E.J.; Clegg, T.B.; Anderson, R.E.

1987-01-01

A system has been implemented to monitor directly the energy spread of analyzed beams from a tandem electrostatic accelerator. The dispersion of a deflection magnet in the beam handling system is used to transform the energy distribution into a spatial distribution, which then is measured by electrostatically sweeping the spatially extended beam across a narrow slit. (orig.)

Amplification through chaotic synchronization in spatially extended beam-plasma systems

Science.gov (United States)

Moskalenko, Olga I.; Frolov, Nikita S.; Koronovskii, Alexey A.; Hramov, Alexander E.

2017-12-01

In this paper, we have studied the relationship between chaotic synchronization and microwave signal amplification in coupled beam-plasma systems. We have considered a 1D particle-in-cell numerical model of unidirectionally coupled beam-plasma oscillatory media being in the regime of electron pattern formation. We have shown the significant gain of microwave oscillation power in coupled beam-plasma media being in the different regimes of generation. The discovered effect has a close connection with the chaotic synchronization phenomenon, so we have observed that amplification appears after the onset of the complete time scale synchronization regime in the analyzed coupled spatially extended systems. We have also provided the numerical study of physical processes in the chain of beam-plasma systems leading to the chaotic synchronization and the amplification of microwave oscillations power, respectively.

Rigid-flexible coupling dynamics of three-dimensional hub-beams system

International Nuclear Information System (INIS)

Liu Jinyang; Lu Hao

2007-01-01

In the previous research of the coupling dynamics of a hub-beam system, coupling between the rotational motion of hub and the torsion deformation of beam is not taken into account since the system undergoes planar motion. Due to the small longitudinal deformation, coupling between the rotational motion of hub and the longitudinal deformation of beam is also neglected. In this paper, rigid-flexible coupling dynamics is extended to a hub-beams system with three-dimensional large overall motion. Not only coupling between the large overall motion and the bending deformation, but also coupling between the large overall motion and the torsional deformation are taken into account. In case of temperature increase, the longitudinal deformation caused by the thermal expansion is significant, such that coupling between the large overall motion and the longitudinal deformation is also investigated. Combining the characteristics of the hybrid coordinate formulation and the absolute nodal coordinate formulation, the system generalized coordinates include the relative nodal displacement and the slope of each beam element with respect to the body-fixed frame of the hub, and the variables related to the spatial large overall motion of the hub and beams. Based on precise strain-displacement relation, the geometric stiffening effect is taken into account, and the rigid-flexible coupling dynamic equations are derived using velocity variational principle. Finite element method is employed for discretization. Simulation of a hub-beams system is used to show the coupling effect between the large overall motion and the torsional deformation as well as the longitudinal deformation. Furthermore, conservation of energy in case of free motion is shown to verify the formulation

A Versatile Beam Loss Monitoring System for CLIC

CERN Document Server

Kastriotou, Maria; Farabolini, Wilfrid; Holzer, Eva Barbara; Nebot Del Busto, Eduardo; Tecker, Frank; Welsch, Carsten

2016-01-01

The design of a potential CLIC beam loss monitoring (BLM) system presents multiple challenges. To successfully cover the 48 km of beamline, ionisation chambers and optical fibre BLMs are under investigation. The former fulfils all CLIC requirements but would need more than 40000 monitors to protect the whole facility. For the latter, the capability of reconstructing the original loss position with a multi-bunch beam pulse and multiple loss locations still needs to be quantified. Two main sources of background for beam loss measurements are identified for CLIC. The two-beam accelerator scheme introduces so-called crosstalk, i.e. detection of losses originating in one beam line by the monitors protecting the other. Moreover, electrons emitted from the inner surface of RF cavities and boosted by the high RF gradients may produce signals in neighbouring BLMs, limiting their ability to detect real beam losses. This contribution presents the results of dedicated experiments performed in the CLIC Test Facility to qu...

The CMS Beam Halo Monitor Detector System

CERN Document Server

CMS Collaboration

2015-01-01

A new Beam Halo Monitor (BHM) detector system has been installed in the CMS cavern to measure the machine-induced background (MIB) from the LHC. This background originates from interactions of the LHC beam halo with the final set of collimators before the CMS experiment and from beam gas interactions. The BHM detector uses the directional nature of Cherenkov radiation and event timing to select particles coming from the direction of the beam and to suppress those originating from the interaction point. It consists of 40 quartz rods, placed on each side of the CMS detector, coupled to UV sensitive PMTs. For each bunch crossing the PMT signal is digitized by a charge integrating ASIC and the arrival time of the signal is recorded. The data are processed in real time to yield a precise measurement of per-bunch-crossing background rate. This measurement is made available to CMS and the LHC, to provide real-time feedback on the beam quality and to improve the efficiency of data taking. In this talk we will describ...

The beam loss monitoring system for HLS storage ring

CERN Document Server

Li Yu Xiong; Li Wei; Li Jue Xin; Liu Zu Ping; Shao Bei Bei

2001-01-01

A beam loss monitoring system has been established at HLS. This paper gives its principle and scientific grounds. Study on the ring's TBA structure and utilization of Monte-Carlo calculation to the shower electrons is important in its design. The system composition and performance are also introduced. The detector BLMs, data acquisition devices and host PC are linked via CAN bus. This system is helpful to analyze beam loss distribution and regulate the machine operation parameters.

Neutral beam system for an ignition tokamak

International Nuclear Information System (INIS)

Fasolo, J.; Fuja, R.; Jung, J.; Moenich, J.; Norem, J.; Praeg, W.; Stevens, H.

1978-01-01

We have attempted to make detailed designs of several neutral beam systems which would be applicable to a large machine, e.g. an ITR (Ignition Test Reactor), EPR (Experimental Power Reactor), or reactor. Detailed studies of beam transport to the reactor and neutron transport from the reactor have been made. We have also considered constraints imposed by the neutron radiation environment in the injectors, and the resulting shielding, radiation-damage, and maintenance problems. The effects of neutron heat loads on cryopanels and ZrAl getter panels have been considered. Design studies of power supplies, vacuum systems, bending magnets, and injector layouts are in progress and will be discussed

Initial operation and performance of the PDX neutral-beam injection system

International Nuclear Information System (INIS)

Kugel, H.W.; Eubank, H.P.; Kozub, T.A.; Rossmassler, J.E.; Schilling, G.; van Halle, A.; Williams, M.D.

1982-01-01

In 1981, the joint ORNL/PPPL PDX neutral beam heating project succeeded in reliably injecting 7.2 MW of D 0 into the PDX plasma, at nearly perpendicular angles, and achieved ion temperatures up to 6.5 keV. The expeditious achievement of this result was due to the thorough conditioning and qualification of the PDX neutral beam ion sources at ORNL prior to delivery coupled with several field design changes and improvements in the injection system made at PPPL as a result of neutral beam operating experience with the PLT tokamak. It has been found that the operation of high power neutral beam injection systems in a tokamak-neutral beam environment requires procedures and performance different from those required for development operation on test stands. In this paper, we review the installatin of the PDX neutral beam injection system, and its operation and performance during the initial high power plasma heating experiments with the PDX tokamak

Doublet III neutral beam multi-stream command language system

International Nuclear Information System (INIS)

Campbell, L.; Garcia, J.R.

1983-12-01

A multi-stream command language system was developed to provide control of the dual source neutral beam injectors on the Doublet III experiment at GA Technologies Inc. The Neutral Beam command language system consists of three parts: compiler, sequencer, and interactive task. The command language, which was derived from the Doublet III tokamak command language, POPS, is compiled, using a recursive descent compiler, into reverse polish notation instructions which then can be executed by the sequencer task. The interactive task accepts operator commands via a keyboard. The interactive task directs the operation of three input streams, creating commands which are then executed by the sequencer. The streams correspond to the two sources within a Doublet III neutral beam, plus an interactive stream. The sequencer multiplexes the execution of instructions from these three streams. The instructions include reads and writes to an operator terminal, arithmetic computations, intrinsic functions such as CAMAC input and output, and logical instructions. The neutral beam command language system was implemented using Modular Computer Systems (ModComp) Pascal and consists of two tasks running on a ModComp Classic IV computer

Development of an energy selector system for laser-driven proton beam applications

Energy Technology Data Exchange (ETDEWEB)

Scuderi, V., E-mail: scuderiv@lns.infn.it [Department of Experimental Program at ELI-Beamlines, Institute of Physics of the ASCR, ELI-Beamlines project, Na Slovance 2, Prague (Czech Republic); Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Bijan Jia, S. [Ferdowsi University of Mashhad, Azadi Square, Mashhad (Iran, Islamic Republic of); Carpinelli, M. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Cirrone, G.A.P. [Department of Experimental Program at ELI-Beamlines, Institute of Physics of the ASCR, ELI-Beamlines project, Na Slovance 2, Prague (Czech Republic); Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Cuttone, G. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Korn, G. [Department of Experimental Program at ELI-Beamlines, Institute of Physics of the ASCR, ELI-Beamlines project, Na Slovance 2, Prague (Czech Republic); Licciardello, T. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Maggiore, M. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali di Legnaro, Viale dell' Universit 2, Legnaro (Pd) (Italy); Margarone, D. [Department of Experimental Program at ELI-Beamlines, Institute of Physics of the ASCR, ELI-Beamlines project, Na Slovance 2, Prague (Czech Republic); Pisciotta, P.; Romano, F. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Schillaci, F. [Department of Experimental Program at ELI-Beamlines, Institute of Physics of the ASCR, ELI-Beamlines project, Na Slovance 2, Prague (Czech Republic); Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); Stancampiano, C. [Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, Via Santa Sofia 62, Catania (Italy); and others

2014-03-11

Nowadays, laser-driven proton beams generated by the interaction of high power lasers with solid targets represent a fascinating attraction in the field of the new acceleration techniques. These beams can be potentially accelerated up to hundreds of MeV and, therefore, they can represent a promising opportunity for medical applications. Laser-accelerated proton beams typically show high flux (up to 10{sup 11} particles per bunch), very short temporal profile (ps), broad energy spectra and poor reproducibility. In order to overcome these limitations, these beams have be controlled and transported by means of a proper beam handling system. Furthermore, suitable dosimetric diagnostic systems must be developed and tested. In the framework of the ELIMED project, we started to design a dedicated beam transport line and we have developed a first prototype of a beam line key-element: an Energy Selector System (ESS). It is based on permanent dipoles, capable to control and select in energy laser-accelerated proton beams. Monte Carlo simulations and some preliminary experimental tests have been already performed to characterize the device. A calibration of the ESS system with a conventional proton beam will be performed in September at the LNS in Catania. Moreover, an experimental campaign with laser-driven proton beam at the Centre for Plasma Physics, Queens University in Belfast is already scheduled and will be completed within 2014.

The beam diagnosis system for ELSA. Das Strahldiagnosesystem fuer ELSA

Energy Technology Data Exchange (ETDEWEB)

Schillo, M.

1991-10-01

A beam diagnostic system, which is based on capacitive beam-position monitors combined with fast electronics, has been developed for the Bonn Electron Stretcher Accelerator ELSA. The position signal of each monitor is digitized at an adjustable sampling rate and the most recent 8192 position and intensity values are buffered. This allows a wide range of different beam diagnostic measurements. The main purpose is the closed-orbit correction, which can be carried out on various time scales. To optimize the duty factor of the extracted beam, the system can also be used as a fast relative intensity monitor resolving the intensity distribution of the bunches or of the injected beam. It is designed to support betatron tune and phase measurements with very high accuracy, offering the choice to select any of the beam position monitors. This enables the measuring of many optical parameters. Furthermore any pair of suitable monitors can be used for experimental particle tracking or phase space measurements. (orig.).

Conceptual design of a neutral-beam injection system for the TFTR

International Nuclear Information System (INIS)

Ehlers, K.W.; Berkner, K.H.; Cooper, W.S.; Hooper, E.B.; Pyle, R.V.; Stearns, J.W.

1975-11-01

The neutral-beam injection requirements for heating and fueling the next generation of fusion reactor experiments far exceed those of present devices; the neutral-beam systems needed to meet these requirements will be large and complex. A conceptual design of a TFTR tokamak injection system to produce 120 keV deuterium-ion beams with a total power of about 80 MW is given

The beam energy measurement system for the Beijing electron-positron collider

International Nuclear Information System (INIS)

Abakumova, E.V.; Achasov, M.N.; Blinov, V.E.; Cai, X.; Dong, H.Y.; Fu, C.D.; Harris, F.A.; Kaminsky, V.V.; Krasnov, A.A.; Liu, Q.; Mo, X.H.; Muchnoi, N.Yu.; Nikolaev, I.B.; Qin, Q.; Qu, H.M.; Olsen, S.L.; Pyata, E.E.; Shamov, A.G.; Shen, C.P.; Todyshev, K.Yu.

2011-01-01

The beam energy measurement system (BEMS) for the upgraded Beijing electron-positron collider BEPC-II is described. The system is based on measuring the energies of Compton back-scattered photons. The relative systematic uncertainty of the electron and positron beam energy determination is estimated as 2×10 -5 . The relative uncertainty of the beam's energy spread is about 6%.

Scattered radiation in fan beam imaging systems

International Nuclear Information System (INIS)

Johns, P.C.; Yaffe, M.

1982-01-01

Scatter-to-primary energy fluence ratios (S/P) have been studied for fan x-ray beams as used in CT scanners and slit projection radiography systems. The dependence of S/P on phantom diameter, distance from phantom to image receptor, and kilovoltage is presented. An empirical equation is given that predicts S/P over a wide range of fan beam imaging configurations. For CT body scans on a 4th-generation machine, S/P is approximately 5%. Scattered radiation can produce a significant cupping artefact in CT images which is similar to that due to beam hardening. When multiple slices are used in scanned slit radiography, they can be arranged such that the increase in S/P is negligible. Calculations of scatter-to-primary ratios for first order scattering showed that for fan beams the contribution of coherent scatter is comparable to or greater than that of incoherent first scatter

Beam developments for the Harwell microprobe system

International Nuclear Information System (INIS)

Read, P.M.; Cookson, J.A.; Alton, G.D.

1986-01-01

A consequence of the rapid development of micron and submicron size electronic devices is the diminished applicability of high energy ion microprobes with their present resolution limitations to the study of such components. Although submicron beams have been reported the available beam current is barely sufficiently for PIXE and is not adequate for RBS. This lack of lateral resolution is due to low beam brightness at the microprobe object and aberrations in the focusing elements. As part of a program to address these problems the Harwell microprobe lens has been relocated on a new 5 MV Laddertron accelerator. The increased brightness and improved stability of this facility has so far led to a reduction in beam size from 3 x 3 μm 2 to about 2 x 2 μm 2 . The feasibility of using a liquid metal ion source has been examined with a view to achieving more substantial increases in brightness. While such sources have brightness approximately 10 5 times greater than conventional gaseous sources the highly divergent nature of the beam presents problems for the beam transport system. The use of a liquid metal source on the accelerator has been successfully demonstrated but it indicates the need for a special low aberration injection lens if brightness is to be maintained

MSU 1.6 GeV/c beam analysis system

International Nuclear Information System (INIS)

Nolen, J.A. Jr.

1981-01-01

This report describes the design of the beam analysis system which is to prepare the beam for the large high-resolution spectrograph to be used with the superconducting heavy ion cyclotrons at MSU. The system has a momentum resolving power of over 20,000 with a 1 mm object slit and is of a very flexible, modular design which is readily adaptable to other applications

The Beam Profile Monitoring System for the CERN IRRAD Proton Facility

CERN Document Server

Ravotti, F; Glaser, M; Matli, E; Pezzullo, G; Gan, K K; Kagan, H; Smith, S; Warner, J D

2017-01-01

GeV/c proton beam is used. During beam steering and irradiation, the intensity and the transverse profile of the proton beam are monitored online with custom-made Beam Profile Monitor (BPM) devices. In this work, we present the design and the architecture of the IRRAD BPM system, some results on its performance with the proton beam, as well as its planned grades.

An Expert System For Tuning Particle-Beam Accelerators

Science.gov (United States)

Lager, Darrel L.; Brand, Hal R.; Maurer, William J.; Searfus, Robert M.; Hernandez, Jose E.

1989-03-01

We have developed a proof-of-concept prototype of an expert system for tuning particle beam accelerators. It is designed to function as an intelligent assistant for an operator. In its present form it implements the strategies and reasoning followed by the operator for steering through the beam transport section of the Advanced Test Accelerator at Lawrence Livermore Laboratory's Site 300. The system is implemented in the language LISP using the Artificial Intelligence concepts of frames, daemons, and a representation we developed called a Monitored Decision Script.

Design of fast kickers for the ISABELLE beam abort system

International Nuclear Information System (INIS)

Nawrocky, R.J.; Montemurro, P.A.; Baron, J.

1981-01-01

The ISA beam abort (extraction) system must be highly efficient, in the sense of producing minimum beam loss, and reliable to prevent serious damage to accelerator components by the circulating high-energy beams. Since the stored beams will be debunched, the low-loss requirement can be met only with ultra-thin extraction septa and/or fast-acting kickers. This paper examines the design of the ISA extraction kickers subject to a set of extraction channel constraints and a given maximum working voltage. Expressions are derived for determining system parameters for both a lumped parameter magnet and a delay-line magnet. Using these relationships, design parameters are worked out for several possible system configurations. The paper also describes the construction of a full-scale prototype module of the kicker and summarizes the preliminary test results obtained with the module

Resolution of a High Performance Cavity Beam Position Monitor System

International Nuclear Information System (INIS)

Walston, S.; Chung, C.; Fitsos, P.; Gronberg, J.; Ross, M.; Khainovski, O.; Kolomensky, Y.; Loscutoff, P.; Slater, M.; Thomson, M.; Ward, D.; Boogert, S.; Vogel, V.; Meller, R.; Lyapin, A.; Malton, S.; Miller, D.; Frisch, J.; Hinton, S.; May, J.; McCormick, D.; Smith, S.; Smith, T.; White, G.; Orimoto, T.; Hayano, H.; Honda, Y.; Terunuma, N.; Urakawa, J.

2005-01-01

International Linear Collider (ILC) interaction region beam sizes and component position stability requirements will be as small as a few nanometers. It is important to the ILC design effort to demonstrate that these tolerances can be achieved - ideally using beam-based stability measurements. It has been estimated that RF cavity beam position monitors (BPMs) could provide position measurement resolutions of less than one nanometer and could form the basis of the desired beam-based stability measurement. We have developed a high resolution RF cavity BPM system. A triplet of these BPMs has been installed in the extraction line of the KEK Accelerator Test Facility (ATF) for testing with its ultra-low emittance beam. A metrology system for the three BPMs was recently installed. This system employed optical encoders to measure each BPM's position and orientation relative to a zero-coefficient of thermal expansion carbon fiber frame and has demonstrated that the three BPMs behave as a rigid-body to less than 5 nm. To date, we have demonstrated a BPM resolution of less than 20 nm over a dynamic range of +/- 20 microns