WorldWideScience

Sample records for autoanalysis

  1. Productivity enhancement and reliability through AutoAnalysis

    Science.gov (United States)

    Garetto, Anthony; Rademacher, Thomas; Schulz, Kristian

    2015-09-01

    The decreasing size and increasing complexity of photomask features, driven by the push to ever smaller technology nodes, places more and more challenges on the mask house, particularly in terms of yield management and cost reduction. Particularly challenging for mask shops is the inspection, repair and review cycle which requires more time and skill from operators due to the higher number of masks required per technology node and larger nuisance defect counts. While the measurement throughput of the AIMS™ platform has been improved in order to keep pace with these trends, the analysis of aerial images has seen little advancement and remains largely a manual process. This manual analysis of aerial images is time consuming, dependent on the skill level of the operator and significantly contributes to the overall mask manufacturing process flow. AutoAnalysis, the first application available for the FAVOR® platform, offers a solution to these problems by providing fully automated analysis of AIMS™ aerial images. Direct communication with the AIMS™ system allows automated data transfer and analysis parallel to the measurements. User defined report templates allow the relevant data to be output in a manner that can be tailored to various internal needs and support the requests of your customers. Productivity is significantly improved due to the fast analysis, operator time is saved and made available for other tasks and reliability is no longer a concern as the most defective region is always and consistently captured. In this paper the concept and approach of AutoAnalysis will be presented as well as an update to the status of the project. The benefits arising from the use of AutoAnalysis will be discussed in more detail and a study will be performed in order to demonstrate.

  2. Research on data auto-analysis algorithms in the explosive detection system

    International Nuclear Information System (INIS)

    Wang Haidong; Li Yuanjing; Yang Yigang; Li Tiezhu; Chen Boxian; Cheng Jianping

    2006-01-01

    This paper mainly describe some auto-analysis algorithms in explosive detection system with TNA method. These include the auto-calibration algorithm when disturbed by other factors, MCA auto-calibration algorithm with calibrated spectrum, the auto-fitting and integral of hydrogen and nitrogen elements data. With these numerical algorithms, the authors can automatically and precisely analysis the gamma-spectra and ultimately achieve the explosive auto-detection. (authors)

  3. SEM AutoAnalysis: enhancing photomask and NIL defect disposition and review

    Science.gov (United States)

    Schulz, Kristian; Egodage, Kokila; Tabbone, Gilles; Ehrlich, Christian; Garetto, Anthony

    2017-06-01

    For defect disposition and repair verification regarding printability, AIMS™ is the state of the art measurement tool in industry. With its unique capability of capturing aerial images of photomasks it is the one method that comes closest to emulating the printing behaviour of a scanner. However for nanoimprint lithography (NIL) templates aerial images cannot be applied to evaluate the success of a repair process. Hence, for NIL defect dispositioning scanning, electron microscopy (SEM) imaging is the method of choice. In addition, it has been a standard imaging method for further root cause analysis of defects and defect review on optical photomasks which enables 2D or even 3D mask profiling at high resolutions. In recent years a trend observed in mask shops has been the automation of processes that traditionally were driven by operators. This of course has brought many advantages one of which is freeing cost intensive labour from conducting repetitive and tedious work. Furthermore, it reduces variability in processes due to different operator skill and experience levels which at the end contributes to eliminating the human factor. Taking these factors into consideration, one of the software based solutions available under the FAVOR® brand to support customer needs is the aerial image evaluation software, AIMS™ AutoAnalysis (AAA). It provides fully automated analysis of AIMS™ images and runs in parallel to measurements. This is enabled by its direct connection and communication with the AIMS™tools. As one of many positive outcomes, generating automated result reports is facilitated, standardizing the mask manufacturing workflow. Today, AAA has been successfully introduced into production at multiple customers and is supporting the workflow as described above. These trends indeed have triggered the demand for similar automation with respect to SEM measurements leading to the development of SEM AutoAnalysis (SAA). It aims towards a fully automated SEM image

  4. Auto-analysis system for graphite morphology of grey cast iron.

    Science.gov (United States)

    Jiang, Hong; Tan, Yiyong; Lei, Junfeng; Zeng, Libo; Zhang, Zelan; Hu, Jiming

    2003-01-01

    The current method to classify graphite morphology types of grey cast iron is based on traditional subjective observation, and it cannot be used for quantitative analysis. Since microstructures have a great effect on the mechanical properties of grey cast iron and different types have totally different characters, six types of grey cast iron are discussed and an image-processing software subsystem that performs the classification and quantitative analysis automatically based on a kind of composed feature vector and artificial neural network (ANN) is described. There are three kinds of texture features: fractal dimension, roughness and two-dimension autoregression, which are used as an extracted feature input vector of ANN classifier. Compared with using only one, the checkout correct precision increased greatly. On the other hand, to achieve the quantitative analysis and show the different types clearly, the region segmentation idea was applied to the system. The percentages of the regions with different type are reported correctly. Furthermore, this paper tentatively introduces a new empirical method to decide the number of ANN hidden nodes, which are usually considered as a difficulty in ANN structure decision. It was found that the optimum hidden node number of the experimental data was the same as that obtained using the new method.

  5. Integration of auto analysis program of gamma spectrum and software and determination of element content in sample by k-zero method

    International Nuclear Information System (INIS)

    Trinh Quang Vinh; Truong Thi Hong Loan; Mai Van Nhon; Huynh Truc Phuong

    2014-01-01

    Integrating the gamma spectrum auto-analysis program with elemental analysis software by k-zero method is the objective for many researchers. This work is the first stepin building an auto analysis program of gamma spectrum, which includes modules of reading spectrum, displaying spectrum, calibrating energy of peak, smoothing spectrum, calculating peak area and determining content of elements in sample. Then, the results from the measurements of standard samples by a low level spectrometer using HPGe detector are compared to those of other gamma spectrum auto-analysis programs. (author)

  6. Freud and history before 1905: from defending to questioning the theory of a glorious past.

    Science.gov (United States)

    Cotti, Patricia

    2008-01-01

    By sticking closely to Freud's use of the German term Geschichte (history, story) between 1894 and 1905, I will reveal two conceptions of history. The first one, the theory of the glorious past and its archaeological metaphor, which accompanied and sustained the seduction theory of cultural history. I will define how this change was determined by an evolution in Freud's conceptions of childhood prehistory and original history. I will also question how the history problem interfered with Freud's auto-analysis.

  7. RevospECT® field experience

    International Nuclear Information System (INIS)

    O'Dell, T.

    2012-01-01

    The RevospECT process of auto-analysis of steam generator eddy current data has been deployed in multiple roles from the production secondary analysis function all the way to full auto where it solely analyzes all of the data from multiple probe technologies. RevospECT is bridging processes in the analysis of eddy current data to provide a more comprehensive, efficient, and accurate viewpoint into the understanding of steam generator tubing degradation. This paper will discuss the various modes of deployment to fit industry needs, auto-process oriented functions such as historical data comparison, noise monitoring, and auto-resolution decision functions. (author)

  8. [Impact of problem-based learning on the cognitive processes of medical students].

    Science.gov (United States)

    Urrutia Aguilar, María Esther; Hamui-Sutton, Alicia; Castañeda Figueiras, Sandra; Fortoul van der Goes, Teresa Imelda; Guevara-Guzmán, Rosalinda

    2011-01-01

    The problem based learning (PBL) method was conceived as a teaching strategy to be applied in different areas or disciplines, thus several universities adopted it, among which was the Universidad Nacional Autónoma de México, best known as UNAM. The Faculty of Medicine of UNAM implemented this innovative teaching method of medicine for its learner-centered educational method tendency (patient-centered practice). This method develops also several abilities in the students, such as active and significant learning, seeking and data selection and autoanalysis and synthesis, knowledge integration of, mind's logic for the detection and solution of problems, among others. The aim was to evaluate the PBL impact on pedagogical and cognitive processes through the students' critical thinking and the significance of the experience on students and teachers which were working with PBL; in addition, study strategies and self-regulation in students were considered variables for the study. Our findings indicated that PBL was perceived differently among students and teachers, and it influenced in a positive and significant way the students' perception to solve problems and their motivation to achieve a good academic performance (p < 0.005). These results suggest that PBL is a useful strategy in the teaching and learning process and it is clear that the pedagogical process and other variables can potentially influence the results obtained.

  9. Sequential injection analysis for automation of the Winkler methodology, with real-time SIMPLEX optimization and shipboard application

    International Nuclear Information System (INIS)

    Horstkotte, Burkhard; Tovar Sanchez, Antonio; Duarte, Carlos M.; Cerda, Victor

    2010-01-01

    A multipurpose analyzer system based on sequential injection analysis (SIA) for the determination of dissolved oxygen (DO) in seawater is presented. Three operation modes were established and successfully applied onboard during a research cruise in the Southern ocean: 1st, in-line execution of the entire Winkler method including precipitation of manganese (II) hydroxide, fixation of DO, precipitate dissolution by confluent acidification, and spectrophotometric quantification of the generated iodine/tri-iodide (I 2 /I 3 - ), 2nd, spectrophotometric quantification of I 2 /I 3 - in samples prepared according the classical Winkler protocol, and 3rd, accurate batch-wise titration of I 2 /I 3 - with thiosulfate using one syringe pump of the analyzer as automatic burette. In the first mode, the zone stacking principle was applied to achieve high dispersion of the reagent solutions in the sample zone. Spectrophotometric detection was done at the isobestic wavelength 466 nm of I 2 /I 3 - . Highly reduced consumption of reagents and sample compared to the classical Winkler protocol, linear response up to 16 mg L -1 DO, and an injection frequency of 30 per hour were achieved. It is noteworthy that for the offline protocol, sample metering and quantification with a potentiometric titrator lasts in general over 5 min without counting sample fixation, incubation, and glassware cleaning. The modified SIMPLEX methodology was used for the simultaneous optimization of four volumetric and two chemical variables. Vertex calculation and consequent application including in-line preparation of one reagent was carried out in real-time using the software AutoAnalysis. The analytical system featured high signal stability, robustness, and a repeatability of 3% RSD (1st mode) and 0.8% (2nd mode) during shipboard application.

  10. Sequential injection analysis for automation of the Winkler methodology, with real-time SIMPLEX optimization and shipboard application.

    Science.gov (United States)

    Horstkotte, Burkhard; Tovar Sánchez, Antonio; Duarte, Carlos M; Cerdà, Víctor

    2010-01-25

    A multipurpose analyzer system based on sequential injection analysis (SIA) for the determination of dissolved oxygen (DO) in seawater is presented. Three operation modes were established and successfully applied onboard during a research cruise in the Southern ocean: 1st, in-line execution of the entire Winkler method including precipitation of manganese (II) hydroxide, fixation of DO, precipitate dissolution by confluent acidification, and spectrophotometric quantification of the generated iodine/tri-iodide (I(2)/I(3)(-)), 2nd, spectrophotometric quantification of I(2)/I(3)(-) in samples prepared according the classical Winkler protocol, and 3rd, accurate batch-wise titration of I(2)/I(3)(-) with thiosulfate using one syringe pump of the analyzer as automatic burette. In the first mode, the zone stacking principle was applied to achieve high dispersion of the reagent solutions in the sample zone. Spectrophotometric detection was done at the isobestic wavelength 466 nm of I(2)/I(3)(-). Highly reduced consumption of reagents and sample compared to the classical Winkler protocol, linear response up to 16 mg L(-1) DO, and an injection frequency of 30 per hour were achieved. It is noteworthy that for the offline protocol, sample metering and quantification with a potentiometric titrator lasts in general over 5 min without counting sample fixation, incubation, and glassware cleaning. The modified SIMPLEX methodology was used for the simultaneous optimization of four volumetric and two chemical variables. Vertex calculation and consequent application including in-line preparation of one reagent was carried out in real-time using the software AutoAnalysis. The analytical system featured high signal stability, robustness, and a repeatability of 3% RSD (1st mode) and 0.8% (2nd mode) during shipboard application. Copyright 2009 Elsevier B.V. All rights reserved.

  11. Sequential injection analysis for automation of the Winkler methodology, with real-time SIMPLEX optimization and shipboard application

    Energy Technology Data Exchange (ETDEWEB)

    Horstkotte, Burkhard; Tovar Sanchez, Antonio; Duarte, Carlos M. [Department of Global Change Research, IMEDEA (CSIC-UIB) Institut Mediterrani d' Estudis Avancats, Miquel Marques 21, 07190 Esporles (Spain); Cerda, Victor, E-mail: Victor.Cerda@uib.es [University of the Balearic Islands, Department of Chemistry Carreterra de Valldemossa km 7.5, 07011 Palma de Mallorca (Spain)

    2010-01-25

    A multipurpose analyzer system based on sequential injection analysis (SIA) for the determination of dissolved oxygen (DO) in seawater is presented. Three operation modes were established and successfully applied onboard during a research cruise in the Southern ocean: 1st, in-line execution of the entire Winkler method including precipitation of manganese (II) hydroxide, fixation of DO, precipitate dissolution by confluent acidification, and spectrophotometric quantification of the generated iodine/tri-iodide (I{sub 2}/I{sub 3}{sup -}), 2nd, spectrophotometric quantification of I{sub 2}/I{sub 3}{sup -} in samples prepared according the classical Winkler protocol, and 3rd, accurate batch-wise titration of I{sub 2}/I{sub 3}{sup -} with thiosulfate using one syringe pump of the analyzer as automatic burette. In the first mode, the zone stacking principle was applied to achieve high dispersion of the reagent solutions in the sample zone. Spectrophotometric detection was done at the isobestic wavelength 466 nm of I{sub 2}/I{sub 3}{sup -}. Highly reduced consumption of reagents and sample compared to the classical Winkler protocol, linear response up to 16 mg L{sup -1} DO, and an injection frequency of 30 per hour were achieved. It is noteworthy that for the offline protocol, sample metering and quantification with a potentiometric titrator lasts in general over 5 min without counting sample fixation, incubation, and glassware cleaning. The modified SIMPLEX methodology was used for the simultaneous optimization of four volumetric and two chemical variables. Vertex calculation and consequent application including in-line preparation of one reagent was carried out in real-time using the software AutoAnalysis. The analytical system featured high signal stability, robustness, and a repeatability of 3% RSD (1st mode) and 0.8% (2nd mode) during shipboard application.