Fabrication and characterization of aluminum airbridges for superconducting microwave circuits

International Nuclear Information System (INIS)

Chen, Zijun; Kelly, J.; Barends, R.; Bochmann, J.; Chen, Yu; Chiaro, B.; Dunsworth, A.; Jeffrey, E.; Mutus, J. Y.; O'Malley, P. J. J.; Neill, C.; Roushan, P.; Sank, D.; Vainsencher, A.; Wenner, J.; White, T. C.; Megrant, A.; Cleland, A. N.; Martinis, John M.

2014-01-01

Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers

Circularly Polarized Antenna Array Fed by Air-Bridge Free CPW-Slotline Network

Directory of Open Access Journals (Sweden)

Yilin Liu

2017-01-01

Full Text Available A novel design of 1×2 and 2×2 circularly polarized (CP microstrip patch antenna arrays is presented in this paper. The two CP antenna arrays are fed by sequentially rotated coplanar waveguide (CPW to slotline networks and are processed on 1 mm thick single-layer FR4 substrates. Both of the two arrays are low-profile and lightweight. An air-bridge free CPW-slotline power splitter is appropriately designed to form the feeding networks and realize the two CP antenna arrays. The mechanism of circular polarization in this design is explained. The simulated and measured impedance bandwidths as well as the 3 dB axial ratio bandwidths and the radiation patterns of the two proposed antenna arrays are presented. This proposed design can be easily extended to form a larger plane array with good performance owing to its simple structure.

Ray trace visualization of negative refraction of light in two-dimensional air-bridged silicon photonic crystal slabs at 1.55 microm.

Science.gov (United States)

Gan, Lin; Liu, Ya-Zhao; Li, Jiang-Yan; Zhang, Ze-Bo; Zhang, Dao-Zhong; Li, Zhi-Yuan

2009-06-08

We demonstrate design, fabrication, and ray trace observation of negative refraction of near-infrared light in a two-dimensional square lattice of air holes etched into an air-bridged silicon slab. Special surface morphologies are designed to reduce the impedance mismatch when light refracts from a homogeneous silicon slab into the photonic crystal slab. We clearly observed negative refraction of infrared light for TE-like modes in a broad wavelength range by using scanning near-field optical microscopy technology. The experimental results are in good agreement with finite-difference time-domain simulations. The results indicate the designed photonic crystal structure can serve as polarization beam splitter.

The development of differential inductors using double air-bridge structure based on integrated passive device technology

Science.gov (United States)

Li, Yang; Yao, Zhao; Fu, Xiao-Qian; Li, Zhi-Ming; Shan, Fu-Kai; Wang, Cong

2017-05-01

Recently, integrated passive devices have become increasingly popular; inductor realization, in particular, offers interesting high performance for RF modules and systems. In this paper, a development of differential inductor fabricated by integrated passive devices technology using a double air-bridge structure is presented. A study of the model development of the differential inductor is first demonstrated. In this model section, a segment box analysis method is applied to provide a clear presentation of the differential inductor. Compared with other work that only shows a brief description of the process, the integrated passive devices process used to fabricate the inductor in this study is elaborated on. Finally, a characterization of differential inductors with different physical layout parameters is illustrated based on inductance and quality factors, which provides a valuable reference for realizing high performance. The proposed work provides a good solution for the design, fabrication and practical application of RF modules and systems.

Dynamic Antenna Alignment Control in Microwave Air-Bridging for Sky-Net Mobile Communication Using Unmanned Flying Platform

Directory of Open Access Journals (Sweden)

Chin E. Lin

2015-01-01

Full Text Available This paper presents a preliminary study on establishing a mobile point-to-point (P2P microwave air-bridging (MAB between Unmanned Low Altitude Flying Platform (ULAFP and backhaul telecommunication network. The proposed Sky-Net system relays telecom signal for general mobile cellphone users via ULAFP when natural disaster sweeps off Base Transceiver Stations (BTSs. Unlike the conventional fix point microwave bridging application, the ULAFP is cruising on a predefined mission flight path to cover a wider range of service. The difficulty and challenge fall on how to maintain antenna alignment accurately in order to provide the signal strength for MAB. A dual-axis rotation mechanism with embedded controller is designed and implemented on airborne and ground units for stabilizing airborne antenna and tracking the moving ULAFP. The MAB link is established in flight tests using the proposed antenna stabilizing/tracking mechanism with correlated control method. The result supports backbone technique of the Sky-Net mobile communication and verifies the feasibility of airborne e-Cell BTS.

A method for building low loss multi-layer wiring for superconducting microwave devices

Science.gov (United States)

Dunsworth, A.; Barends, R.; Chen, Yu; Chen, Zijun; Chiaro, B.; Fowler, A.; Foxen, B.; Jeffrey, E.; Kelly, J.; Klimov, P. V.; Lucero, E.; Mutus, J. Y.; Neeley, M.; Neill, C.; Quintana, C.; Roushan, P.; Sank, D.; Vainsencher, A.; Wenner, J.; White, T. C.; Neven, H.; Martinis, John M.; Megrant, A.

2018-02-01

Complex integrated circuits require multiple wiring layers. In complementary metal-oxide-semiconductor processing, these layers are robustly separated by amorphous dielectrics. These dielectrics would dominate energy loss in superconducting integrated circuits. Here, we describe a procedure that capitalizes on the structural benefits of inter-layer dielectrics during fabrication and mitigates the added loss. We use a deposited inter-layer dielectric throughout fabrication and then etch it away post-fabrication. This technique is compatible with foundry level processing and can be generalized to make many different forms of low-loss wiring. We use this technique to create freestanding aluminum vacuum gap crossovers (airbridges). We characterize the added capacitive loss of these airbridges by connecting ground planes over microwave frequency λ/4 coplanar waveguide resonators and measuring resonator loss. We measure a low power resonator loss of ˜3.9 × 10-8 per bridge, which is 100 times lower than that of dielectric supported bridges. We further characterize these airbridges as crossovers, control line jumpers, and as part of a coupling network in gmon and fluxmon qubits. We measure qubit characteristic lifetimes (T1s) in excess of 30 μs in gmon devices.

High-Tc superconducting antenna-coupled microbolometer on silicon

Science.gov (United States)

Rice, Joseph P.; Grossman, Erich N.; Borcherdt, L. J.; Rudman, D. A.

1994-05-01

A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-Tc superconductor YBa2Cu3O7 (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 X 10-6 W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 microsecond(s) , a responsivity of the 1000 V/W range, and a noise-equivalent power in the 10-12 W/Hz1/2 range at 1000 Hz.

High-{Tc} superconducting antenna-coupled microbolometer on silicon

Energy Technology Data Exchange (ETDEWEB)

Rice, J.P.; Grossman, E.N.; Borcherdt, L.J.; Rudman, D.A. [National Inst. of Standards and Technology, Boulder, CO (United States). Cryoelectronic Metrology Group

1994-12-31

A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-{Tc} superconductor YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 {times} 10{sup {minus}6} W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 {micro}s, a responsivity in the 1,000 V/W range, and a noise-equivalent power (NEP) in the 10{sup {minus}12} W/Hz{sup 1/2} range at 1,000 Hz.

Electroplating of gold using a sulfite-based electrolyte

NARCIS (Netherlands)

Smalbrugge, E.; Jacobs, B.; Falcone, S.; Geluk, E.J.; Karouta, F.; Leijtens, X.J.M.; Besten, den J.H.

2000-01-01

Electroplating of gold is often used in optoelectronic and microelectronic devices for air-bridges, heat-sinks or gold-bumps for flip-chip techniques. The gold-cyanide electrolytes, which are commonly used in gold-electroplating, are toxic and attack resist patterns causing cracks during the plating

Ultraflexible nanostructures and implications for future nanorobots

Science.gov (United States)

Cohn, Robert W.; Panchapakesan, Balaji

2016-05-01

Several high aspect ratio nanostructures have been made by capillary force directed self-assembly including polymeric nanofiber air-bridges, trampoline-like membranes, microsphere-beaded nanofibers, and intermetallic nanoneedles. Arrays of polymer air-bridges form in seconds by simply hand brushing a bead of polymeric liquid over an array of micropillars. The domination of capillary force that is thinning unstable capillary bridges leads to uniform arrays of nanofiber air-bridges. Similarly, arrays of vertically oriented Ag2Ga nanoneedles have been formed by dipping silvercoated arrays of pyramidal silicon into melted gallium. Force-displacement measurements of these structures are presented. These nanostructures, especially when compressively or torsionally buckled, have extremely low stiffnesses, motion due to thermal fluctuations that is relatively easily detected, and the ability to move great distances for very small changes in applied force. Nanofibers with bead-on-a-string structure, where the beads are micron diameter and loaded with magnetic iron oxide (maghemite), are shown to be simply viewable under optical microscopes, have micronewton/ m stiffness, and have ultralow torsional stiffnesses enabling the bead to be rotated numerous revolutions without breaking. Combination of these high aspect ratio structures with stretched elastomers offer interesting possibilities for robotic actuation and locomotion. Polydimethylsiloxane loaded with nanomaterials, e.g. nanotubes, graphene or MoS2, can be efficiently heated with directed light. Heating produces considerable force through the thermoelastic effect, and this force can be used for continuous translation or to trigger reversible elastic buckling of the nanostructures. The remote stimulation of motion with light provides a possible mechanism for producing cooperative behavior between swarms of semiautonomous nanorobots.

Slow Light by Two-Dimensional Photonic Crystal Waveguides

International Nuclear Information System (INIS)

Chao, Zhang; Yan, Huang; Xiao-Yu, Mao; Kai-Yu, Cui; Yi-Dong, Huang; Wei, Zhang; Jiang-De, Peng

2009-01-01

A simple and effective way to measure the group velocity of photonic crystal waveguides (PCWGs) is developed by using a fiber Mach–Zehnder interferometer. A PCWG with perfect air-bridge structure is fabricated and slow light with group velocity slower than c/80 is demonstrated. (fundamental areas of phenomenology (including applications))

A Preliminary Survey of Department of Energy Microelectronics Capabilities Related to Department of Defense Needs

Science.gov (United States)

1997-09-01

mechanisms but also chemical, thermal, mechanical, and, today, quantum behavior as well. Basic research is performed using several different strategies...lithography and advanced dry etching) that have enabled quantum electronic devices using nanometer-scale features for gates and air-bridged point...control systems for magnetically levitated stages of lithography equipment, and modal and vibrational analysis of lithography equipment. SNL is

Simulation of OSCM Concepts for HQ SACT

Science.gov (United States)

2007-06-01

effective method for creating understanding, identifying problems and developing solutions. • Simulation of a goal driven organization is a cost...effective method to visualize some aspects of the problem space Toolbox • The team used Extend™, a COTS product from Imagine That!® (http...Nations flow Model OSCM ATARES flow Batching A/C & Pallets Model ISAF Airbridge flow Flying and unbatching A/C Fleet Create resources Calculate flight

Lumped elements for RF and microwave circuits

CERN Document Server

Bahl, Inder

2003-01-01

Due to the unprecedented growth in wireless applications over the past decade, development of low-cost solutions for RF and microwave communication systems has become of great importance. This practical new book is the first comprehensive treatment of lumped elements, which are playing a critical role in the development of the circuits that make these cost-effective systems possible. The books offers you an in-depth understanding of the different types of RF and microwave circuit elements, including inductors, capacitors, resistors, transformers, via holes, airbridges, and crossovers. Support

New type of thermal analyzer with a micro-air-bridge heater

Science.gov (United States)

Kimura, Mitsuteru; Hayasaka, Junichi

1997-11-01

Miniaturized sensor for thermal analysis is fabricated using micromachining technique and its fundament al characteristics are obtained. This device fabricated in a Si substrate consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid samples at room temperature due to the effect of evaporation heat is also observed. Loss of the sample due to the evaporation during heating was theoretically discussed.

Enhanced performance of VOx-based bolometer using patterned gold black absorber

Science.gov (United States)

Smith, Evan M.; Panjwani, Deep; Ginn, James; Warren, Andrew; Long, Christopher; Figuieredo, Pedro; Smith, Christian; Perlstein, Joshua; Walter, Nick; Hirschmugl, Carol; Peale, Robert E.; Shelton, David J.

2015-06-01

Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black's near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

Procedures Used in Narcotics Airbridge Denial Program in Peru, 1995-2001

Science.gov (United States)

2008-08-25

igned the March 1999 SOPs, visual signals had not been conducted for quite a while. According LaD as a rule, visual communication was not required...was a requirement for visual communication with target aircraft in the event that radio communication failed. C05500526 289.1 ~aid that there was a...radio and visual communication efforts with the 𔃻󈧅 failed!~ intercept would proceed to Phase IIt according to I Only the VI RAT Commander or his

Fabrication and characterization of 8.87 THz schottky barrier mixer diodes for mixer

Science.gov (United States)

Wang, Wenjie; Li, Qian; An, Ning; Tong, Xiaodong; Zeng, Jianping

2018-04-01

In this paper we report on the fabrication and characterization of GaAs-based THz schottky barrier mixer diodes. Considering the analyzed results as well as fabrication cost and complexity, a group of trade-off parameters was determined. Electron-beam lithography and air-bridge technique have been used to obtain schottky diodes with a cut off frequency of 8.87 THz. Equivalent values of series resistance, ideal factor and junction capacitance of 10.2 (1) Ω, 1.14 (0.03) and 1.76(0.03) respectively have been measured for 0.7um diameter anode devices by DC and RF measurements. The schottky barrier diodes fabrication process is fully planar and very suitable for integration in THz frequency multiplier and mixer circuits. THz Schottky barrier diodes based on such technology with 2 μm diameter anodes have been tested at 1.6 THz in a sub-harmonic mixer.

Characterization of micro-resonator based on enhanced metal insulator semiconductor capacitor for glucose recognition.

Science.gov (United States)

Dhakal, Rajendra; Kim, E S; Jo, Yong-Hwa; Kim, Sung-Soo; Kim, Nam-Young

2017-03-01

We present a concept for the characterization of micro-fabricated based resonator incorporating air-bridge metal-insulator-semiconductor (MIS) capacitor to continuously monitor an individual's state of glucose levels based on frequency variation. The investigation revealed that, the micro-resonator based on MIS capacitor holds considerable promise for implementation and recognition as a glucose sensor for human serum. The discrepancy in complex permittivity as a result of enhanced capacitor was achieved for the detection and determination of random glucose concentration levels using a unique variation of capacitor that indeed results in an adequate variation of the resonance frequency. Moreover, the design and development of micro-resonator with enhanced MIS capacitor generate a resolution of 112.38 × 10 -3 pF/mg/dl, minimum detectable glucose level of 7.45mg/dl, and a limit of quantification of 22.58mg/dl. Additionally, this unique approach offers long-term reliability for mediator-free glucose sensing with a relative standard deviation of less than 0.5%. Copyright © 2017 IPEM. Published by Elsevier Ltd. All rights reserved.

Gate length variation effect on performance of gate-first self-aligned In₀.₅₃Ga₀.₄₇As MOSFET.

Science.gov (United States)

Mohd Razip Wee, Mohd F; Dehzangi, Arash; Bollaert, Sylvain; Wichmann, Nicolas; Majlis, Burhanuddin Y

2013-01-01

A multi-gate n-type In₀.₅₃Ga₀.₄₇As MOSFET is fabricated using gate-first self-aligned method and air-bridge technology. The devices with different gate lengths were fabricated with the Al2O3 oxide layer with the thickness of 8 nm. In this letter, impact of gate length variation on device parameter such as threshold voltage, high and low voltage transconductance, subthreshold swing and off current are investigated at room temperature. Scaling the gate length revealed good enhancement in all investigated parameters but the negative shift in threshold voltage was observed for shorter gate lengths. The high drain current of 1.13 A/mm and maximum extrinsic transconductance of 678 mS/mm with the field effect mobility of 364 cm(2)/Vs are achieved for the gate length and width of 0.2 µm and 30 µm, respectively. The source/drain overlap length for the device is approximately extracted about 51 nm with the leakage current in order of 10(-8) A. The results of RF measurement for cut-off and maximum oscillation frequency for devices with different gate lengths are compared.