WorldWideScience

Sample records for airbridges

  1. Fabrication and characterization of aluminum airbridges for superconducting microwave circuits

    International Nuclear Information System (INIS)

    Chen, Zijun; Kelly, J.; Barends, R.; Bochmann, J.; Chen, Yu; Chiaro, B.; Dunsworth, A.; Jeffrey, E.; Mutus, J. Y.; O'Malley, P. J. J.; Neill, C.; Roushan, P.; Sank, D.; Vainsencher, A.; Wenner, J.; White, T. C.; Megrant, A.; Cleland, A. N.; Martinis, John M.

    2014-01-01

    Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers

  2. Circularly Polarized Antenna Array Fed by Air-Bridge Free CPW-Slotline Network

    Directory of Open Access Journals (Sweden)

    Yilin Liu

    2017-01-01

    Full Text Available A novel design of 1×2 and 2×2 circularly polarized (CP microstrip patch antenna arrays is presented in this paper. The two CP antenna arrays are fed by sequentially rotated coplanar waveguide (CPW to slotline networks and are processed on 1 mm thick single-layer FR4 substrates. Both of the two arrays are low-profile and lightweight. An air-bridge free CPW-slotline power splitter is appropriately designed to form the feeding networks and realize the two CP antenna arrays. The mechanism of circular polarization in this design is explained. The simulated and measured impedance bandwidths as well as the 3 dB axial ratio bandwidths and the radiation patterns of the two proposed antenna arrays are presented. This proposed design can be easily extended to form a larger plane array with good performance owing to its simple structure.

  3. The development of differential inductors using double air-bridge structure based on integrated passive device technology

    Science.gov (United States)

    Li, Yang; Yao, Zhao; Fu, Xiao-Qian; Li, Zhi-Ming; Shan, Fu-Kai; Wang, Cong

    2017-05-01

    Recently, integrated passive devices have become increasingly popular; inductor realization, in particular, offers interesting high performance for RF modules and systems. In this paper, a development of differential inductor fabricated by integrated passive devices technology using a double air-bridge structure is presented. A study of the model development of the differential inductor is first demonstrated. In this model section, a segment box analysis method is applied to provide a clear presentation of the differential inductor. Compared with other work that only shows a brief description of the process, the integrated passive devices process used to fabricate the inductor in this study is elaborated on. Finally, a characterization of differential inductors with different physical layout parameters is illustrated based on inductance and quality factors, which provides a valuable reference for realizing high performance. The proposed work provides a good solution for the design, fabrication and practical application of RF modules and systems.

  4. Dynamic Antenna Alignment Control in Microwave Air-Bridging for Sky-Net Mobile Communication Using Unmanned Flying Platform

    Directory of Open Access Journals (Sweden)

    Chin E. Lin

    2015-01-01

    Full Text Available This paper presents a preliminary study on establishing a mobile point-to-point (P2P microwave air-bridging (MAB between Unmanned Low Altitude Flying Platform (ULAFP and backhaul telecommunication network. The proposed Sky-Net system relays telecom signal for general mobile cellphone users via ULAFP when natural disaster sweeps off Base Transceiver Stations (BTSs. Unlike the conventional fix point microwave bridging application, the ULAFP is cruising on a predefined mission flight path to cover a wider range of service. The difficulty and challenge fall on how to maintain antenna alignment accurately in order to provide the signal strength for MAB. A dual-axis rotation mechanism with embedded controller is designed and implemented on airborne and ground units for stabilizing airborne antenna and tracking the moving ULAFP. The MAB link is established in flight tests using the proposed antenna stabilizing/tracking mechanism with correlated control method. The result supports backbone technique of the Sky-Net mobile communication and verifies the feasibility of airborne e-Cell BTS.

  5. Ray trace visualization of negative refraction of light in two-dimensional air-bridged silicon photonic crystal slabs at 1.55 microm.

    Science.gov (United States)

    Gan, Lin; Liu, Ya-Zhao; Li, Jiang-Yan; Zhang, Ze-Bo; Zhang, Dao-Zhong; Li, Zhi-Yuan

    2009-06-08

    We demonstrate design, fabrication, and ray trace observation of negative refraction of near-infrared light in a two-dimensional square lattice of air holes etched into an air-bridged silicon slab. Special surface morphologies are designed to reduce the impedance mismatch when light refracts from a homogeneous silicon slab into the photonic crystal slab. We clearly observed negative refraction of infrared light for TE-like modes in a broad wavelength range by using scanning near-field optical microscopy technology. The experimental results are in good agreement with finite-difference time-domain simulations. The results indicate the designed photonic crystal structure can serve as polarization beam splitter.

  6. Procedures Used in Narcotics Airbridge Denial Program in Peru, 1995-2001

    Science.gov (United States)

    2008-08-25

    igned the March 1999 SOPs, visual signals had not been conducted for quite a while. According LaD as a rule, visual communication was not required...was a requirement for visual communication with target aircraft in the event that radio communication failed. C05500526 289.1 ~aid that there was a...radio and visual communication efforts with the 𔃻󈧅 failed!~ intercept would proceed to Phase IIt according to I Only the VI RAT Commander or his

  7. Slow Light by Two-Dimensional Photonic Crystal Waveguides

    International Nuclear Information System (INIS)

    Chao, Zhang; Yan, Huang; Xiao-Yu, Mao; Kai-Yu, Cui; Yi-Dong, Huang; Wei, Zhang; Jiang-De, Peng

    2009-01-01

    A simple and effective way to measure the group velocity of photonic crystal waveguides (PCWGs) is developed by using a fiber Mach–Zehnder interferometer. A PCWG with perfect air-bridge structure is fabricated and slow light with group velocity slower than c/80 is demonstrated. (fundamental areas of phenomenology (including applications))

  8. A Preliminary Survey of Department of Energy Microelectronics Capabilities Related to Department of Defense Needs

    Science.gov (United States)

    1997-09-01

    mechanisms but also chemical, thermal, mechanical, and, today, quantum behavior as well. Basic research is performed using several different strategies...lithography and advanced dry etching) that have enabled quantum electronic devices using nanometer-scale features for gates and air-bridged point...control systems for magnetically levitated stages of lithography equipment, and modal and vibrational analysis of lithography equipment. SNL is

  9. Electroplating of gold using a sulfite-based electrolyte

    NARCIS (Netherlands)

    Smalbrugge, E.; Jacobs, B.; Falcone, S.; Geluk, E.J.; Karouta, F.; Leijtens, X.J.M.; Besten, den J.H.

    2000-01-01

    Electroplating of gold is often used in optoelectronic and microelectronic devices for air-bridges, heat-sinks or gold-bumps for flip-chip techniques. The gold-cyanide electrolytes, which are commonly used in gold-electroplating, are toxic and attack resist patterns causing cracks during the plating

  10. High-Tc superconducting antenna-coupled microbolometer on silicon

    Science.gov (United States)

    Rice, Joseph P.; Grossman, Erich N.; Borcherdt, L. J.; Rudman, D. A.

    1994-05-01

    A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-Tc superconductor YBa2Cu3O7 (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 X 10-6 W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 microsecond(s) , a responsivity of the 1000 V/W range, and a noise-equivalent power in the 10-12 W/Hz1/2 range at 1000 Hz.

  11. High-{Tc} superconducting antenna-coupled microbolometer on silicon

    Energy Technology Data Exchange (ETDEWEB)

    Rice, J.P.; Grossman, E.N.; Borcherdt, L.J.; Rudman, D.A. [National Inst. of Standards and Technology, Boulder, CO (United States). Cryoelectronic Metrology Group

    1994-12-31

    A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-{Tc} superconductor YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 {times} 10{sup {minus}6} W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 {micro}s, a responsivity in the 1,000 V/W range, and a noise-equivalent power (NEP) in the 10{sup {minus}12} W/Hz{sup 1/2} range at 1,000 Hz.

  12. Simulation of OSCM Concepts for HQ SACT

    Science.gov (United States)

    2007-06-01

    effective method for creating understanding, identifying problems and developing solutions. • Simulation of a goal driven organization is a cost...effective method to visualize some aspects of the problem space Toolbox • The team used Extend™, a COTS product from Imagine That!® (http...Nations flow Model OSCM ATARES flow Batching A/C & Pallets Model ISAF Airbridge flow Flying and unbatching A/C Fleet Create resources Calculate flight

  13. A method for building low loss multi-layer wiring for superconducting microwave devices

    Science.gov (United States)

    Dunsworth, A.; Barends, R.; Chen, Yu; Chen, Zijun; Chiaro, B.; Fowler, A.; Foxen, B.; Jeffrey, E.; Kelly, J.; Klimov, P. V.; Lucero, E.; Mutus, J. Y.; Neeley, M.; Neill, C.; Quintana, C.; Roushan, P.; Sank, D.; Vainsencher, A.; Wenner, J.; White, T. C.; Neven, H.; Martinis, John M.; Megrant, A.

    2018-02-01

    Complex integrated circuits require multiple wiring layers. In complementary metal-oxide-semiconductor processing, these layers are robustly separated by amorphous dielectrics. These dielectrics would dominate energy loss in superconducting integrated circuits. Here, we describe a procedure that capitalizes on the structural benefits of inter-layer dielectrics during fabrication and mitigates the added loss. We use a deposited inter-layer dielectric throughout fabrication and then etch it away post-fabrication. This technique is compatible with foundry level processing and can be generalized to make many different forms of low-loss wiring. We use this technique to create freestanding aluminum vacuum gap crossovers (airbridges). We characterize the added capacitive loss of these airbridges by connecting ground planes over microwave frequency λ/4 coplanar waveguide resonators and measuring resonator loss. We measure a low power resonator loss of ˜3.9 × 10-8 per bridge, which is 100 times lower than that of dielectric supported bridges. We further characterize these airbridges as crossovers, control line jumpers, and as part of a coupling network in gmon and fluxmon qubits. We measure qubit characteristic lifetimes (T1s) in excess of 30 μs in gmon devices.

  14. Ultraflexible nanostructures and implications for future nanorobots

    Science.gov (United States)

    Cohn, Robert W.; Panchapakesan, Balaji

    2016-05-01

    Several high aspect ratio nanostructures have been made by capillary force directed self-assembly including polymeric nanofiber air-bridges, trampoline-like membranes, microsphere-beaded nanofibers, and intermetallic nanoneedles. Arrays of polymer air-bridges form in seconds by simply hand brushing a bead of polymeric liquid over an array of micropillars. The domination of capillary force that is thinning unstable capillary bridges leads to uniform arrays of nanofiber air-bridges. Similarly, arrays of vertically oriented Ag2Ga nanoneedles have been formed by dipping silvercoated arrays of pyramidal silicon into melted gallium. Force-displacement measurements of these structures are presented. These nanostructures, especially when compressively or torsionally buckled, have extremely low stiffnesses, motion due to thermal fluctuations that is relatively easily detected, and the ability to move great distances for very small changes in applied force. Nanofibers with bead-on-a-string structure, where the beads are micron diameter and loaded with magnetic iron oxide (maghemite), are shown to be simply viewable under optical microscopes, have micronewton/ m stiffness, and have ultralow torsional stiffnesses enabling the bead to be rotated numerous revolutions without breaking. Combination of these high aspect ratio structures with stretched elastomers offer interesting possibilities for robotic actuation and locomotion. Polydimethylsiloxane loaded with nanomaterials, e.g. nanotubes, graphene or MoS2, can be efficiently heated with directed light. Heating produces considerable force through the thermoelastic effect, and this force can be used for continuous translation or to trigger reversible elastic buckling of the nanostructures. The remote stimulation of motion with light provides a possible mechanism for producing cooperative behavior between swarms of semiautonomous nanorobots.

  15. New type of thermal analyzer with a micro-air-bridge heater

    Science.gov (United States)

    Kimura, Mitsuteru; Hayasaka, Junichi

    1997-11-01

    Miniaturized sensor for thermal analysis is fabricated using micromachining technique and its fundament al characteristics are obtained. This device fabricated in a Si substrate consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid samples at room temperature due to the effect of evaporation heat is also observed. Loss of the sample due to the evaporation during heating was theoretically discussed.

  16. Lumped elements for RF and microwave circuits

    CERN Document Server

    Bahl, Inder

    2003-01-01

    Due to the unprecedented growth in wireless applications over the past decade, development of low-cost solutions for RF and microwave communication systems has become of great importance. This practical new book is the first comprehensive treatment of lumped elements, which are playing a critical role in the development of the circuits that make these cost-effective systems possible. The books offers you an in-depth understanding of the different types of RF and microwave circuit elements, including inductors, capacitors, resistors, transformers, via holes, airbridges, and crossovers. Support

  17. Enhanced performance of VOx-based bolometer using patterned gold black absorber

    Science.gov (United States)

    Smith, Evan M.; Panjwani, Deep; Ginn, James; Warren, Andrew; Long, Christopher; Figuieredo, Pedro; Smith, Christian; Perlstein, Joshua; Walter, Nick; Hirschmugl, Carol; Peale, Robert E.; Shelton, David J.

    2015-06-01

    Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black's near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

  18. Fabrication and characterization of 8.87 THz schottky barrier mixer diodes for mixer

    Science.gov (United States)

    Wang, Wenjie; Li, Qian; An, Ning; Tong, Xiaodong; Zeng, Jianping

    2018-04-01

    In this paper we report on the fabrication and characterization of GaAs-based THz schottky barrier mixer diodes. Considering the analyzed results as well as fabrication cost and complexity, a group of trade-off parameters was determined. Electron-beam lithography and air-bridge technique have been used to obtain schottky diodes with a cut off frequency of 8.87 THz. Equivalent values of series resistance, ideal factor and junction capacitance of 10.2 (1) Ω, 1.14 (0.03) and 1.76(0.03) respectively have been measured for 0.7um diameter anode devices by DC and RF measurements. The schottky barrier diodes fabrication process is fully planar and very suitable for integration in THz frequency multiplier and mixer circuits. THz Schottky barrier diodes based on such technology with 2 μm diameter anodes have been tested at 1.6 THz in a sub-harmonic mixer.

  19. Characterization of micro-resonator based on enhanced metal insulator semiconductor capacitor for glucose recognition.

    Science.gov (United States)

    Dhakal, Rajendra; Kim, E S; Jo, Yong-Hwa; Kim, Sung-Soo; Kim, Nam-Young

    2017-03-01

    We present a concept for the characterization of micro-fabricated based resonator incorporating air-bridge metal-insulator-semiconductor (MIS) capacitor to continuously monitor an individual's state of glucose levels based on frequency variation. The investigation revealed that, the micro-resonator based on MIS capacitor holds considerable promise for implementation and recognition as a glucose sensor for human serum. The discrepancy in complex permittivity as a result of enhanced capacitor was achieved for the detection and determination of random glucose concentration levels using a unique variation of capacitor that indeed results in an adequate variation of the resonance frequency. Moreover, the design and development of micro-resonator with enhanced MIS capacitor generate a resolution of 112.38 × 10 -3 pF/mg/dl, minimum detectable glucose level of 7.45mg/dl, and a limit of quantification of 22.58mg/dl. Additionally, this unique approach offers long-term reliability for mediator-free glucose sensing with a relative standard deviation of less than 0.5%. Copyright © 2017 IPEM. Published by Elsevier Ltd. All rights reserved.

  20. Gate length variation effect on performance of gate-first self-aligned In₀.₅₃Ga₀.₄₇As MOSFET.

    Science.gov (United States)

    Mohd Razip Wee, Mohd F; Dehzangi, Arash; Bollaert, Sylvain; Wichmann, Nicolas; Majlis, Burhanuddin Y

    2013-01-01

    A multi-gate n-type In₀.₅₃Ga₀.₄₇As MOSFET is fabricated using gate-first self-aligned method and air-bridge technology. The devices with different gate lengths were fabricated with the Al2O3 oxide layer with the thickness of 8 nm. In this letter, impact of gate length variation on device parameter such as threshold voltage, high and low voltage transconductance, subthreshold swing and off current are investigated at room temperature. Scaling the gate length revealed good enhancement in all investigated parameters but the negative shift in threshold voltage was observed for shorter gate lengths. The high drain current of 1.13 A/mm and maximum extrinsic transconductance of 678 mS/mm with the field effect mobility of 364 cm(2)/Vs are achieved for the gate length and width of 0.2 µm and 30 µm, respectively. The source/drain overlap length for the device is approximately extracted about 51 nm with the leakage current in order of 10(-8) A. The results of RF measurement for cut-off and maximum oscillation frequency for devices with different gate lengths are compared.

  1. Gate Length Variation Effect on Performance of Gate-First Self-Aligned In0.53Ga0.47As MOSFET

    Science.gov (United States)

    Mohd Razip Wee, Mohd F.; Dehzangi, Arash; Bollaert, Sylvain; Wichmann, Nicolas; Majlis, Burhanuddin Y.

    2013-01-01

    A multi-gate n-type In0.53Ga0.47As MOSFET is fabricated using gate-first self-aligned method and air-bridge technology. The devices with different gate lengths were fabricated with the Al2O3 oxide layer with the thickness of 8 nm. In this letter, impact of gate length variation on device parameter such as threshold voltage, high and low voltage transconductance, subthreshold swing and off current are investigated at room temperature. Scaling the gate length revealed good enhancement in all investigated parameters but the negative shift in threshold voltage was observed for shorter gate lengths. The high drain current of 1.13 A/mm and maximum extrinsic transconductance of 678 mS/mm with the field effect mobility of 364 cm2/Vs are achieved for the gate length and width of 0.2 µm and 30µm, respectively. The source/drain overlap length for the device is approximately extracted about 51 nm with the leakage current in order of 10−8 A. The results of RF measurement for cut-off and maximum oscillation frequency for devices with different gate lengths are compared. PMID:24367548

  2. Optimization and Flight Schedules of Pioneer Routes in Papua Province

    Science.gov (United States)

    Ronting, Y.; Adisasmita, S. A.; Hamid, S.; Hustim, M.

    2018-04-01

    The province of Papua has a very varied topography, ranging from swampy lowlands, hills, and plateaus up steep hills. The total area of land is 410,660 km2, which consists of 28 counties and one city, 389 districts and 5.420 villages. The population of Papua Province in 2017 was 3.265.202 people with an average growth of 4.21% per year. The transportation services is still low, especially in the mountainous region, which is isolated and could only be reached by an air transportation mode, causing a considerable price disparity between coastal and mountainous areas. The purpose of this paper is to develop the route optimization and pioneer flight schedules models as an airbridge. This research is conducted by collecting primary data and secondary data. Data is based on field surveys; interviews; discussions with airport authority, official government, etc; and also from various agencies. The analytical tools used to optimization flight schedule and route are analyzed by add-in solver in Microsoft Excel. The results of the analysis we can get a more optimal route so that it can save transportation costs by 7.26%.

  3. A Study of Mach-Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer

    Science.gov (United States)

    Suzuki, Masato; Takahashi, Tomokazu; Aoyagi, Seiji; Amemiya, Yoshiteru; Fukuyama, Masataka; Yokoyama, Shin

    2011-04-01

    A novel Mach-Zehnder interferometer (MZI)-type optical modulator based on micro electro mechanical systems (MEMS) technology is developed in this study. In this optical modulator, one of two branched waveguides in the MZI has a floating beam structure (air-bridge type). Additionally, a cantilever supporting a proof mass intersects with the floating optical waveguide. When an inertial force due to acceleration is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. Therefore, this optical modulator will be applicable to an accelerometer in the future. To decrease optical loss at the intersectional point between the floating waveguide and the cantilever in the MZI, the multi-mode interference (MMI) waveguide is serially connected with the floating waveguide and the cantilever crosses to the MMI waveguide. An optimization of the MMI waveguide and an estimation of deflection of the floating waveguide due to applying force are carried out by using optical and mechanical simulation, respectively. The proposed optical modulator is fabricated by inductively coupled plasma (ICP) etching of the top layer of a silicon-on-insulator (SOI) wafer, which is made of crystal Si. The floating waveguide in the modulator is formed by removal of its underlying buried oxide (BOX) layer of SOI. As a result of evaluation, we have succeeded in changing the output of the MZI by applying a force to the cantilever. However, the modulation is smaller than the expected value. Improvement of the modulation and detection of the inertial force due to the applied acceleration are future tasks.

  4. Inductively coupled plasma etching of GaAs low loss waveguides for a traveling waveguide polarization converter, using chlorine chemistry

    Science.gov (United States)

    Lu, J.; Meng, X.; Springthorpe, A. J.; Shepherd, F. R.; Poirier, M.

    2004-05-01

    A traveling waveguide polarization converter [M. Poirier et al.] has been developed, which involves long, low loss, weakly confined waveguides etched in GaAs (epitaxially grown by molecular beam epitaxy), with electroplated ``T electrodes'' distributed along the etched floor adjacent to the ridge walls, and airbridge interconnect metallization. This article describes the development of the waveguide fabrication, based on inductively coupled plasma (ICP) etching of GaAs using Cl2 chemistry; the special processes required to fabricate the electrodes and metallization [X. Meng et al.], and the device characteristics [M. Poirier et al.], are described elsewhere. The required waveguide has dimensions nominally 4 μm wide and 2.1 μm deep, with dimensional tolerances ~0.1 μm across the wafer and wafer to wafer. A vertical etch profile with very smooth sidewalls and floors is required to enable the plated metal electrodes to be fabricated within 0.1 μm of the ridge. The ridges were fabricated using Cl2 ICP etching and a photoresist mask patterned with an I-line stepper; He backside cooling, combined with an electrostatic chuck, was employed to ensure good heat transfer to prevent resist reticulation. The experimental results showed that the ridge profile is very sensitive to ICP power and platen rf power. High ICP power and low platen power tend to result in more isotropic etching, whereas increasing platen power increases the photoresist etch rate, which causes rougher ridge sidewalls. No strong dependence of GaAs etch rate and ridge profile were observed with small changes in process temperature (chuck temperature). However, when the chuck temperature was decreased from 25 to 0 °C, etch uniformity across a 3 in. wafer improved from 6% to 3%. Photoresist and polymer residues present after the ICP etch were removed using a combination of wet and dry processes. .

  5. Inductively coupled plasma etching of GaAs low loss waveguides for a traveling waveguide polarization converter, using chlorine chemistry

    International Nuclear Information System (INIS)

    Lu, J.; Meng, X.; SpringThorpe, A.J.; Shepherd, F.R.; Poirier, M.

    2004-01-01

    A traveling waveguide polarization converter [M. Poirier et al.] has been developed, which involves long, low loss, weakly confined waveguides etched in GaAs (epitaxially grown by molecular beam epitaxy), with electroplated 'T electrodes' distributed along the etched floor adjacent to the ridge walls, and airbridge interconnect metallization. This article describes the development of the waveguide fabrication, based on inductively coupled plasma (ICP) etching of GaAs using Cl 2 chemistry; the special processes required to fabricate the electrodes and metallization [X. Meng et al.], and the device characteristics [M. Poirier et al.], are described elsewhere. The required waveguide has dimensions nominally 4 μm wide and 2.1 μm deep, with dimensional tolerances ∼0.1 μm across the wafer and wafer to wafer. A vertical etch profile with very smooth sidewalls and floors is required to enable the plated metal electrodes to be fabricated within 0.1 μm of the ridge. The ridges were fabricated using Cl 2 ICP etching and a photoresist mask patterned with an I-line stepper; He backside cooling, combined with an electrostatic chuck, was employed to ensure good heat transfer to prevent resist reticulation. The experimental results showed that the ridge profile is very sensitive to ICP power and platen rf power. High ICP power and low platen power tend to result in more isotropic etching, whereas increasing platen power increases the photoresist etch rate, which causes rougher ridge sidewalls. No strong dependence of GaAs etch rate and ridge profile were observed with small changes in process temperature (chuck temperature). However, when the chuck temperature was decreased from 25 to 0 deg. C, etch uniformity across a 3 in. wafer improved from 6% to 3%. Photoresist and polymer residues present after the ICP etch were removed using a combination of wet and dry processes

  6. Nanolithography on mercury telluride

    International Nuclear Information System (INIS)

    Muehlbauer, Mathias Josef

    2015-01-01

    Topological insulators belong to a new quantum state of matter that is currently one of the most recognized research fields in condensed matter physics. Strained bulk HgTe and HgTe/HgCdTe quantum well structures are currently one of few topological insulator material systems suitable to be studied in transport experiments. In addition HgTe quantum wells provide excellent requirements for the conduction of spintronic experiments. A fundamental requirement for most experiments, however, is to reliably pattern these heterostructures into advanced nano-devices. Nano-lithography on this material system proves to be challenging because of inherent temperature limitations, its high reactivity with various metals and due to its properties as a topological insulator. The current work gives an insight into why many established semiconductor lithography processes cannot be easily transferred to HgTe while providing alternative solutions. The presented developments include novel ohmic contacts, the prevention of metal sidewalls and redeposition fences in combination with low temperature (80 C) lithography and an adapted hardmask lithography process utilizing a sacrificial layer. In addition we demonstrate high resolution low energy (2.5 kV) electron beam lithography and present an alternative airbridge gating technique. The feasibility of nano-structures on HgTe quantum wells is exemplarily verified in two separate transport experiments. We are first to realize physically etched quantum point contacts in HgTe/HgCdTe high mobility 2DEGs and to prove their controllability via external top-gate electrodes. So far quantum point contacts have not been reported in TI materials. However, these constrictions are part of many proposals to probe the nature of the helical quantum spin Hall edge channels and are suggested as injector and detector devices for spin polarized currents. To confirm their functionality we performed four-terminal measurements of the point contact conductance as