WorldWideScience

Sample records for advanced micromachined microphone

  1. Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback

    Science.gov (United States)

    Bicen, Baris

    Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure ports. Novel, micromachined biomimetic microphone diaphragms are shown to provide high sensitivity to pressure gradients on one side of the diaphragm with low thermal mechanical noise. These structures have a dominant mode shape with see-saw like motion in the audio band, responding to pressure gradients as well as spurious higher order modes sensitive to pressure. In this dissertation, integration of a diffraction based optical detection method with these novel diaphragm structures to implement a low noise optical pressure gradient microphone is described and experimental characterization results are presented, showing 36 dBA noise level with 1mm port spacing, nearly an order of magnitude better than the current gradient microphones. The optical detection scheme also provides electrostatic actuation capability from both sides of the diaphragm separately which can be used for active force feedback. A 4-port electromechanical equivalent circuit model of this microphone with optical readout is developed to predict the overall response of the device to different acoustic and electrostatic excitations. The model includes the damping due to complex motion of air around the microphone diaphragm, and it calculates the detected optical signal on each side of the diaphragm as a combination of two separate dominant vibration modes. This equivalent circuit model is verified by experiments and used to predict the microphone response with different force feedback schemes. Single sided force feedback is used for active damping to improve the linearity and the frequency response of the microphone. Furthermore, it is shown that using two sided force feedback one can significantly suppress

  2. Micromachined microphone array on a chip for turbulent boundary layer measurements

    Science.gov (United States)

    Krause, Joshua Steven

    A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8x8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon surface micromachining process) along with facilities at Tufts Micro and Nano Fabrication Facility (TMNF) where a Parylene-C passivation layer deposition and release of the microstructures were performed. The devices are packaged with low profile interconnects, presenting a maximum of 100 mum of surface topology. The design of an individual microphone was completed through the use of a lumped element model (LEM) to determine the theoretical performance of the microphone. Off-chip electronics were created to allow the microphone array outputs to be redirected to one of two channels, allowing dynamic reconfiguration of the effective transducer shape in software and provide 80 dB off isolation. The characterization was completed through the use of laser Doppler vibrometry (LDV), acoustic plane wave tube and free-field calibration, and electrical noise floor testing in a Faraday cage. Measured microphone sensitivity is 0.15 mV/Pa for an individual microphone and 8.7 mV/Pa for the entire array, in close agreement with model predictions. The microphones and electronics operate over the 200--40 000 Hz band. The dynamic range extends from 60 dB SPL in a 1 Hz band to greater than 150 dB SPL. Element variability was +/-0.05 mV/Pa in sensitivity with an array yield of 95%. Wind tunnel testing at flow rates of up to 205.8 m/s indicates that the devices continue to operate in flow without damage, and can be successfully reconfigured on the fly. Care has been taken to systematically remove contaminating signals (acoustic, vibration, and noise floor) from the wind tunnel data to determine actual

  3. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  4. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  5. Trend of advanced technology of micromachines in the USA; Beikoku ni okeru micro machine sentan gijutsu doko chosa hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-03-01

    In this research, the data of advanced technology of micromachines in the USA have been searched, collected, and arranged from the US patent information, technical journal information, and newspaper and general journal information. According to demand, the main undertaking information was interviewed from well-informed persons. The data were compiled as advanced technology trend of micromachines in the USA. Sensors are remarkably predominant in the elemental technology. There are also important topics in the fields of actuators, motors, lenses, devices, and structures. On the other hand, materials, etchings, packages, motive powers, and softwares are also important elemental technology in spite of their less information. From the viewpoint of usage, detection systems are remarkably predominant. Then, robots, processing systems, optics, analysis systems, motive power systems, medical systems, and acoustic systems are also important. From the viewpoint of industrial sector, the environmental items are predominant. Automobiles, medical treatments, and information communications follow the above. When new relationships to the secondary usage and tertiary usage are not found, it would be rather hard to express such a technology development trend more clearly.

  6. MICROMECHANICAL MICROPHONE

    DEFF Research Database (Denmark)

    1997-01-01

    and dirt, which partly or totally will be able to destroy its characteristics, a sealing acoustic membrane (6, 7) is placed on each side of the transducer element. The transducer element can for example be a capacitive transducer with external bias or an electret based transducer. The microphone, which can...

  7. Calibration of High Frequency MEMS Microphones

    Science.gov (United States)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  8. Optical microphone

    Energy Technology Data Exchange (ETDEWEB)

    Veligdan, J.T.

    2000-01-11

    An optical microphone includes a laser and beam splitter cooperating therewith for splitting a laser beam into a reference beam and a signal beam. A reflecting sensor receives the signal beam and reflects it in a plurality of reflections through sound pressure waves. A photodetector receives both the reference beam and reflected signal beam for heterodyning thereof to produce an acoustic signal for the sound waves. The sound waves vary the local refractive index in the path of the signal beam which experiences a Doppler frequency shift directly analogous with the sound waves.

  9. Electromagnetic Investigation of a CMOS MEMS Inductive Microphone

    Directory of Open Access Journals (Sweden)

    Farès TOUNSI

    2009-09-01

    Full Text Available This paper presents a detailed electromagnetic modeling for a new structure of a monolithic CMOS micromachined inductive microphone. We have shown, that the use of an alternative current (AC in the primary fixed inductor results in a substantially higher induced voltage in the secondary inductor comparing to the case when a direct current (DC is used. The expected increase of the induced voltage can be expressed by a voltage ratio of AC and DC solutions that is in the range of 3 to 6. A prototype fabrication of this microphone has been realized using a combination of standard CMOS 0.6 µm process with a CMOS-compatible post-process consisting in a bulk micromachining technology. The output voltage of the electrodynamic microphone that achieves the µV range can be increased by the use of the symmetric dual-layer spiral inductor structure.

  10. Fiber Optic Microphone

    Science.gov (United States)

    Cho, Y. C.; George, Thomas; Norvig, Peter (Technical Monitor)

    1999-01-01

    Research into advanced pressure sensors using fiber-optic technology is aimed at developing compact size microphones. Fiber optic sensors are inherently immune to electromagnetic noise, and are very sensitive, light weight, and highly flexible. In FY 98, NASA researchers successfully designed and assembled a prototype fiber-optic microphone. The sensing technique employed was fiber optic Fabry-Perot interferometry. The sensing head is composed of an optical fiber terminated in a miniature ferrule with a thin, silicon-microfabricated diaphragm mounted on it. The optical fiber is a single mode fiber with a core diameter of 8 micron, with the cleaved end positioned 50 micron from the diaphragm surface. The diaphragm is made up of a 0.2 micron thick silicon nitride membrane whose inner surface is metallized with layers of 30 nm titanium, 30 nm platinum, and 0.2 micron gold for efficient reflection. The active sensing area is approximately 1.5 mm in diameter. The measured differential pressure tolerance of this diaphragm is more than 1 bar, yielding a dynamic range of more than 100 dB.

  11. Advanced measurement and analysis of surface textures produced by micro-machining processes

    International Nuclear Information System (INIS)

    Bordatchev, Evgueni V; Hafiz, Abdullah M K

    2014-01-01

    Surface texture of a part or a product has significant effects on its functionality, physical-mechanical properties and visual appearance. In particular for miniature products, the implication of surface quality becomes critical owing to the presence of geometrical features with micro/nano-scale dimensions. Qualitative and quantitative assessments of surface texture are carried out predominantly by profile parameters, which are often insufficient to address the contribution of constituent spatial components with varied amplitudes and wavelengths. In this context, this article presents a novel approach for advanced measurement and analysis of profile average roughness (R a ) and its spatial distribution at different wavelength intervals. The applicability of the proposed approach was verified for three different surface topographies prepared by grinding, laser micro-polishing and micro-milling processes. From the measurement and analysis results, R a (λ) spatial distribution was found to be an effective measure of revealing the contributions of various spatial components within specific wavelength intervals towards formation of the entire surface profile. In addition, the approach was extended to the measurement and analysis of areal average roughness S a (λ) spatial distribution within different wavelength intervals. Besides, the proposed method was demonstrated to be a useful technique in developing a functional correlation between a manufacturing process and its corresponding surface profile. (paper)

  12. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  13. Micromachined Precision Inertial Instruments

    National Research Council Canada - National Science Library

    Najafi, Khalil

    2003-01-01

    This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

  14. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  15. A chain of microphones

    International Nuclear Information System (INIS)

    1994-07-01

    In order to discover a more accurate and selective measuring method for the identification of individual flow-noise pollution sources on wind turbines blades, measuring equipment based on a chain of microphones was developed. The principle underlying the design of this equipment is that signals from a number of microphones can be interpreted. Thus the microphones can register noise from sections of the rotary blade and unwished-for noise is eliminated. The gating technique ensures that noises from individual blades can be separated and that clarity is improved. In addition to this, noise can be determined close to the source. The chain consists of 8 microphones placed in a row at adjustable distances. Measurements are registered on tapes as are the trigger signals for the blade passage. The computer processes the measurement results and unnecessary noise is depressed. The listening angles can also be changed electronically so that the doppler effect can be corrected. Results confirmed that the equipment operated satisfactorily and could also be used in relation to noise pollution in power plants as it is especially effective in depressing excess, and cutting out outside, noise and registers accurately individual sources of noise helped by its ability to ''listen '' at varying angles to the source. (AB)

  16. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of advanced-function maintenance technology for power generation facilities; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    Technologies for integrating functions are studied for a self-propelled surroundings recognition system that travels in a small-diameter tube at power generation facilities. Parameters are analyzed, and piezoelectric locomotion devices are reduced in size. A disk shape microantenna is experimentally built and evaluated, which is for realizing energy supply and communication by means of microwaves. Studies are conducted to improve the performance of optical energy transmission devices and to realize their systematization. Basic specifications are established for the embodiment of CCD (charge coupled device) microcameras to be installed. A high-efficiency, high-reliability micromachine system is constructed, in which multiple machines coordinate with each other for the exterior inspection of groups of small-diameter tubes. Devices which are capable of driving, deceleration, and propulsion prove to be feasible. Basic specifications are established for microconnectors to connect, separate, and combine multiple machines as occasion calls. Also discussed is the development of a micromachine for tube interior check and repair which operates making use of the inspection hole enabling tube interior check and repair without the need of disassembling the equipment to be repaired.

  17. Dynamic Pressure Microphones

    Science.gov (United States)

    Werner, E.

    In 1876, Alexander Graham Bell described his first telephone with a microphone using magnetic induction to convert the voice input into an electric output signal. The basic principle led to a variety of designs optimized for different needs, from hearing impaired users to singers or broadcast announcers. From the various sound pressure versions, only the moving coil design is still in mass production for speech and music application.

  18. Ultra Stable, Industrial Green Tailored Pulse Fiber Laser with Diffraction-limited Beam Quality for Advanced Micromachining

    International Nuclear Information System (INIS)

    Deladurantaye, P; Roy, V; Desbiens, L; Drolet, M; Taillon, Y; Galarneau, P

    2011-01-01

    We report on a novel pulsed fiber laser platform providing pulse shaping agility at high repetition rates and at a wavelength of 532 nm. The oscillator is based on the direct modulation of a seed laser diode followed by a chain of fiber amplifiers. Advanced Large Mode Area (LMA) fiber designs as well as proprietary techniques to mitigate non-linear effects enable output energy per pulse up to 100 μJ at 1064 nm with diffraction-limited beam quality and narrow line widths suitable for efficient frequency conversion. Ultra stable pulses with tailored pulse shapes were demonstrated in the green region of the spectrum at repetition rates higher than 200 kHz. Pulse durations between 2.5 ns and 640 ns are available, as well as pulse to pulse dynamic shape selection at repetition rates up to 1 MHz. The pulse energy stability at 532 nm is better than ± 1.5%, 3σ, over 10 000 pulses. Excellent beam characteristics were obtained. The M 2 parameter is lower than 1.05, the beam waist astigmatism and beam waist asymmetry are below 10% and below 8% respectively, with high stability over time. We foresee that the small spot size, high repetition rate and pulse tailoring capability of this platform will provide advantages to practitioners who are developing novel, advanced processes in many industrially important applications.

  19. Silicon micromachined vibrating gyroscopes

    Science.gov (United States)

    Voss, Ralf

    1997-09-01

    This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

  20. Stiction in surface micromachining

    NARCIS (Netherlands)

    Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1996-01-01

    Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

  1. Superconducting microphone for photoacoustic spectroscopy

    International Nuclear Information System (INIS)

    Ribeiro, P.C.; Labrunie, M.; Weid, J.P. von der; Symko, O.G.

    1982-07-01

    A superconducting microphone has been developed for photoacoustic spectroscopy at low temperatures. The microphone consists of a thin mylar membrane coated with a film of lead whose motion is detected by a SQUID magnetometer. For the simple set-up presented here, the limiting pressure sensitivity is 7.5x10 -14 atmospheres/√Hz. (Author) [pt

  2. Micromachining with copper lasers

    Science.gov (United States)

    Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

    1997-04-01

    In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

  3. Silicon microphones - a Danish perspective

    DEFF Research Database (Denmark)

    Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick

    1998-01-01

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations......, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising....

  4. Discretely tunable micromachined injection-locked lasers

    International Nuclear Information System (INIS)

    Cai, H; Yu, M B; Lo, G Q; Kwong, D L; Zhang, X M; Liu, A Q; Liu, B

    2010-01-01

    This paper reports a micromachined injection-locked laser (ILL) to provide tunable discrete wavelengths. It utilizes a non-continuously tunable laser as the master to lock a Fabry–Pérot semiconductor laser chip. Both lasers are integrated into a deep-etched silicon chip with dimensions of 3 mm × 3 mm × 0.8 mm. Based on the experimental results, significant improvements in the optical power and spectral purity have been achieved in the fully locked state, and optical hysteresis and bistability have also been observed in response to the changes of the output wavelength and optical power of the master laser. As a whole system, the micromachined ILL is able to provide single mode, discrete wavelength tuning, high power and direct modulation with small size and single-chip solution, making it promising for advanced optical communications such as wavelength division multiplexing optical access networks.

  5. Speech Intelligibility in Noise Using Throat and Acoustic Microphones

    National Research Council Canada - National Science Library

    Acker-Mills, Barbara

    2004-01-01

    ... speech intelligibility. Speech intelligibility for signals generated by an acoustic microphone, a throat microphone, and the two microphones together was assessed using the Modified Rhyme Test (MRT...

  6. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  7. Two-wire Interface for Digital Microphones

    NARCIS (Netherlands)

    Groothedde, Wouter; Klumperink, Eric A.M.; Nauta, Bram; Eschauzier, Rudolphe Gustave Hubertus; van Rijn, Nico

    2003-01-01

    A two-wire interface for a digital microphone circuit includes a power line and a ground line. The interface utilizes the ground line as a "voltage active line" to transmit both clock and data signals between the digital microphone circuit and a receiving circuit. The digital microphone circuit

  8. Two-Wire interface for digital microphones

    NARCIS (Netherlands)

    Groothedde, Wouter; Klumperink, Eric A.M.; Nauta, Bram; Eschauzier, Rudolphe Gustave Hubertus; van Rijn, Nico

    2005-01-01

    A two-wire interface for a digital microphone circuit includes a power line and a ground line. The interface utilizes the ground line as a "voltage active line" to transmit both clock and data signals between the digital microphone circuit and a receiving circuit. The digital microphone circuit

  9. Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

    Directory of Open Access Journals (Sweden)

    Jere Harrison

    2012-07-01

    Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  10. Optical wireless communications for micromachines

    Science.gov (United States)

    O'Brien, Dominic C.; Yuan, Wei Wen; Liu, Jing Jing; Faulkner, Grahame E.; Elston, Steve J.; Collins, Steve; Parry-Jones, Lesley A.

    2006-08-01

    A key challenge for wireless sensor networks is minimizing the energy required for network nodes to communicate with each other, and this becomes acute for self-powered devices such as 'smart dust'. Optical communications is a potentially attractive solution for such devices. The University of Oxford is currently involved in a project to build optical wireless links to smart dust. Retro-reflectors combined with liquid crystal modulators can be integrated with the micro-machine to create a low power transceiver. When illuminated from a base station a modulated beam is returned, transmitting data. Data from the base station can be transmitted using modulation of the illuminating beam and a receiver at the micro-machine. In this paper we outline the energy consumption and link budget considerations in the design of such micro-machines, and report preliminary experimental results.

  11. Micromachined tunable metamaterials: a review

    International Nuclear Information System (INIS)

    Liu, A Q; Zhu, W M; Tsai, D P; Zheludev, N I

    2012-01-01

    This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies. (review article)

  12. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314 ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  13. Wake Vortex Detection: Phased Microphone vs. Linear Infrasonic Array

    Science.gov (United States)

    Shams, Qamar A.; Zuckerwar, Allan J.; Sullivan, Nicholas T.; Knight, Howard K.

    2014-01-01

    Sensor technologies can make a significant impact on the detection of aircraft-generated vortices in an air space of interest, typically in the approach or departure corridor. Current state-of-the art sensor technologies do not provide three-dimensional measurements needed for an operational system or even for wake vortex modeling to advance the understanding of vortex behavior. Most wake vortex sensor systems used today have been developed only for research applications and lack the reliability needed for continuous operation. The main challenges for the development of an operational sensor system are reliability, all-weather operation, and spatial coverage. Such a sensor has been sought for a period of last forty years. Acoustic sensors were first proposed and tested by National Oceanic and Atmospheric Administration (NOAA) early in 1970s for tracking wake vortices but these acoustic sensors suffered from high levels of ambient noise. Over a period of the last fifteen years, there has been renewed interest in studying noise generated by aircraft wake vortices, both numerically and experimentally. The German Aerospace Center (DLR) was the first to propose the application of a phased microphone array for the investigation of the noise sources of wake vortices. The concept was first demonstrated at Berlins Airport Schoenefeld in 2000. A second test was conducted in Tarbes, France, in 2002, where phased microphone arrays were applied to study the wake vortex noise of an Airbus 340. Similarly, microphone phased arrays and other opto-acoustic microphones were evaluated in a field test at the Denver International Airport in 2003. For the Tarbes and Denver tests, the wake trajectories of phased microphone arrays and lidar were compared as these were installed side by side. Due to a built-in pressure equalization vent these microphones were not suitable for capturing acoustic noise below 20 Hz. Our group at NASA Langley Research Center developed and installed an

  14. Microphonic measurements on superconducting linac structures

    International Nuclear Information System (INIS)

    Marzali, A.; Schwettman, H.A.

    1992-01-01

    Microphonics in multi-cell linac structures lead to energy and pointing modulation of the electron beam despite RF stabilization. Evaluation of the microphonic behaviour of a 500 MHz two cell structure is planned in collaboration with Lawrence Berkeley Laboratory and Brookhaven National Laboratory. In this paper we describe a method of evaluation based on accelerometer measurements. (Author) fig., 2 tabs., 5 refs

  15. General considerations of noise in microphone preamplifiers

    NARCIS (Netherlands)

    van der Donk, A.G.H.; van der Donk, A.G.H.; Voorthuyzen, J.A.; Voorthuyzen, J.A.; Bergveld, Piet

    1991-01-01

    In this paper a study of the noise performance of electret microphone systems as a part of hearing aids is presented. The signal-to-noise ratio of the microphone-preamplifier combination, containing a field-effect transistor (FET) and a high value resistive bias element in a hybrid configuration, is

  16. The acoustic center of laboratory standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2006-01-01

    An experimental procedure is described for obtaining the effective acoustic distance between pairs of microphones coupled by a free field, leading to the determination of the position of the acoustic center of the microphones. The procedure, which is based on measuring the modulus of the electrical...... transfer impedance, has been applied to a large number of microphones. In all cases effects due to reflections from the walls of the anechoic chamber and the interference between the microphones have been removed using a time-selective technique. The procedure of determining the position of the acoustic...... center from the inverse distance law is analyzed. Experimental values of the acoustic center of laboratory standard microphones are presented, and numerical results obtained using the boundary element method supplement the experimental data. Estimated uncertainties are also presented. The results...

  17. A manufacturing method for multi-layer polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.

    1998-01-01

    An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

  18. Development of leak detection system using high temperature-resistant microphones

    International Nuclear Information System (INIS)

    Morishita, Yoshitsugu; Mochizuki, Hiroyasu; Watanabe, Kenshiu; Nakamura, Takahisa; Nakazima, Yoshiaki; Yamauchi, Tatsuya

    1995-01-01

    This report describes the development and testing of a coolant leak detection system for an inlet feeder pipe of an advanced thermal reactor (ATR) using high temperature-resistant microphones. Such microphones must be resistant to both high temperatures and high radiation doses. Leakage sound characteristics, attenuation of the sound level in a heat insulating box for the inlet feeder pipes, and background noise were investigated using the experimental facility and the prototype ATR 'FUGEN'. The optimum frequency ranges for the microphone were then determined based on the observed leakage sound and background noise. The ability of the microphone to discriminate between leaks and other burst-type noises was also investigated by statistical analyses. Finally, it was confirmed that the present method could detect a leak within a couple of seconds. (author)

  19. Quasimetallic silicon micromachined photonic crystals

    International Nuclear Information System (INIS)

    Temelkuran, B.; Bayindir, Mehmet; Ozbay, E.; Kavanaugh, J. P.; Sigalas, M. M.; Tuttle, G.

    2001-01-01

    We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

  20. Theory and applications of spherical microphone array processing

    CERN Document Server

    Jarrett, Daniel P; Naylor, Patrick A

    2017-01-01

    This book presents the signal processing algorithms that have been developed to process the signals acquired by a spherical microphone array. Spherical microphone arrays can be used to capture the sound field in three dimensions and have received significant interest from researchers and audio engineers. Algorithms for spherical array processing are different to corresponding algorithms already known in the literature of linear and planar arrays because the spherical geometry can be exploited to great beneficial effect. The authors aim to advance the field of spherical array processing by helping those new to the field to study it efficiently and from a single source, as well as by offering a way for more experienced researchers and engineers to consolidate their understanding, adding either or both of breadth and depth. The level of the presentation corresponds to graduate studies at MSc and PhD level. This book begins with a presentation of some of the essential mathematical and physical theory relevant to ...

  1. Micromachined silicon seismic accelerometer development

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S. [and others

    1996-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  2. Omega-X micromachining system

    International Nuclear Information System (INIS)

    Miller, D.M.

    1978-01-01

    A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

  3. Resist materials for proton micromachining

    International Nuclear Information System (INIS)

    Kan, J.A. van; Sanchez, J.L.; Xu, B.; Osipowicz, T.; Watt, F.

    1999-01-01

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

  4. Sodium immersible high temperature microphone design description

    International Nuclear Information System (INIS)

    Gavin, A.P.; Anderson, T.T.; Janicek, J.J.

    1975-02-01

    Argonne National Laboratory has developed a rugged high-temperature (HT) microphone for use as a sodium-immersed acoustic monitor in Liquid Metal Fast Breeder Reactors (LMFBRs). Microphones of this design have been extensively tested in room temperature water, in air up to 1200 0 F, and in sodium up to 1200 0 F. They have been successfully installed and employed as acoustic monitors in several operating liquid metal systems. The design, construction sequence, calibration, and testing of these microphones are described. 6 references. (U.S.)

  5. Mapping Speech Spectra from Throat Microphone to Close-Speaking Microphone: A Neural Network Approach

    Directory of Open Access Journals (Sweden)

    B. Yegnanarayana

    2007-01-01

    Full Text Available Speech recorded from a throat microphone is robust to the surrounding noise, but sounds unnatural unlike the speech recorded from a close-speaking microphone. This paper addresses the issue of improving the perceptual quality of the throat microphone speech by mapping the speech spectra from the throat microphone to the close-speaking microphone. A neural network model is used to capture the speaker-dependent functional relationship between the feature vectors (cepstral coefficients of the two speech signals. A method is proposed to ensure the stability of the all-pole synthesis filter. Objective evaluations indicate the effectiveness of the proposed mapping scheme. The advantage of this method is that the model gives a smooth estimate of the spectra of the close-speaking microphone speech. No distortions are perceived in the reconstructed speech. This mapping technique is also used for bandwidth extension of telephone speech.

  6. Excimer laser micromachining for 3D microstructure

    NARCIS (Netherlands)

    Choi, Kyung Hyun; Meijer, J.; Masuzawa, Takahisa; Kim, Dae-Hyun

    2004-01-01

    A new 3D micromachining method, called Hole Area Modulation (HAM), has been introduced to enhance the current micromachining technology. In this method, information on the machining depth is converted to the sizes of holes on the mask. The machining is carried out with a simple 2D movement of the

  7. Mic it! microphones, microphone techniques, and their impact on the final mix

    CERN Document Server

    Corbett, Ian

    2014-01-01

    Capture great sound in the first place, and spend less time ""fixing it in the mix"" with Ian Corbett's Mic It! Microphones, Microphone Techniques, and Their Impact on the Final Mix. With his expert guidance, you'll quickly understand essential audio concepts as they relate to microphones and mic techniques, and learn how to apply them to your recording situation. Whether you only ever buy one microphone, are equipping a studio on a budget, or have a vast selection of great mics to use, you'll learn to better use whatever tools you have. Mic It! gives you the background to design and discover

  8. Study and Design of Differential Microphone Arrays

    CERN Document Server

    Benesty, Jacob

    2013-01-01

    Microphone arrays have attracted a lot of interest over the last few decades since they have the potential to solve many important problems such as noise reduction/speech enhancement, source separation, dereverberation, spatial sound recording, and source localization/tracking, to name a few. However, the design and implementation of microphone arrays with beamforming algorithms is not a trivial task when it comes to processing broadband signals such as speech. Indeed, in most sensor arrangements, the beamformer tends to have a frequency-dependent response. One exception, perhaps, is the family of differential microphone arrays (DMAs) that have the promise to form frequency-independent responses. Moreover, they have the potential to attain high directional gains with small and compact apertures. As a result, this type of microphone arrays has drawn much research and development attention recently. This book is intended to provide a systematic study of DMAs from a signal processing perspective. The primary obj...

  9. Active microphonic noise cancellation in radiation detectors

    International Nuclear Information System (INIS)

    Zimmermann, Sergio

    2013-01-01

    A new adaptive filtering technique to reduce microphonic noise in radiation detectors is presented. The technique is based on system identification that actively cancels the microphonic noise. A sensor is used to measures mechanical disturbances that cause vibration on the detector assembly, and the digital adaptive filtering estimates the impact of these disturbances on the microphonic noise. The noise then can be subtracted from the actual detector measurement. In this paper the technique is presented and simulations are used to support this approach. -- Highlights: •A sensor is used to measures mechanical disturbances that cause vibration on the detector assembly. •Digital adaptive filtering estimates the impact of these disturbances on the microphonic noise. •The noise is then subtracted from the actual detector measurement. •We use simulations to demonstrate the performance of this approach. •After cancellation, we recover most of the original energy resolution

  10. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  11. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  12. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  13. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  14. Design of circular differential microphone arrays

    CERN Document Server

    Benesty, Jacob; Cohen, Israel

    2015-01-01

    Recently, we proposed a completely novel and efficient way to design differential beamforming algorithms for linear microphone arrays. Thanks to this very flexible approach, any order of differential arrays can be designed. Moreover, they can be made robust against white noise amplification, which is the main inconvenience in these types of arrays. The other well-known problem with linear arrays is that electronic steering is not really feasible.  In this book, we extend all these fundamental ideas to circular microphone arrays and show that we can design small and compact differential arrays of any order that can be electronically steered in many different directions and offer a good degree of control of the white noise amplification problem, high directional gain, and frequency-independent response. We also present a number of practical examples, demonstrating that differential beamforming with circular microphone arrays is likely one of the best candidates for applications involving speech enhancement (i....

  15. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.

    2006-01-01

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  16. Improved Design of Microphone-Array Hearing Aids

    National Research Council Canada - National Science Library

    Greenberg, Julie

    1994-01-01

    ...). Research on microphone array hearing aids is motivated by the lack of success of single-microphone systems, as well as the documented advantages of binaural hearing and multiple-element sensing systems...

  17. MEMS capacitive accelerometer-based middle ear microphone.

    Science.gov (United States)

    Young, Darrin J; Zurcher, Mark A; Semaan, Maroun; Megerian, Cliff A; Ko, Wen H

    2012-12-01

    The design, implementation, and characterization of a microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone are presented in this paper. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. Human temporal bones acoustic response characterization results are used to derive the accelerometer design requirements. The prototype accelerometer is fabricated in a commercial silicon-on-insulator (SOI) MEMS process. The sensor occupies a sensing area of 1 mm × 1 mm with a chip area of 2 mm × 2.4 mm and is interfaced with a custom-designed low-noise electronic IC chip over a flexible substrate. The packaged sensor unit occupies an area of 2.5 mm × 6.2 mm with a weight of 25 mg. The sensor unit attached to umbo can detect a sound pressure level (SPL) of 60 dB at 500 Hz, 35 dB at 2 kHz, and 57 dB at 8 kHz. An improved sound detection limit of 34-dB SPL at 150 Hz and 24-dB SPL at 500 Hz can be expected by employing start-of-the-art MEMS fabrication technology, which results in an articulation index of approximately 0.76. Further micro/nanofabrication technology advancement is needed to enhance the microphone sensitivity for improved understanding of normal conversational speech.

  18. Locating noise sources with a microphone array

    International Nuclear Information System (INIS)

    Bale, A.; Johnson, D.

    2010-01-01

    Noise pollution is one of the contributors to the public opposition of wind farms. Most of the noise produced by turbines is caused by the aerodynamic interactions between the turbine blades and the surrounding air. This poster presentation discussed a series of aeroacoustic tests conducted to account for the different in vortical structures caused by the rotation of the blades. Microphone arrays were used measure and locate the source of noise. A beam forming technique was used to measure the noise using an algorithm that identified a scanning grid on a plane where the source was thought to be located. It delayed each microphone's signal by the length of time required for the sound to travel from the scan position to each microphone, and accounted for the amplitudes according to the distance from the scan position to each microphone. Demonstration test cases were conducted using piezo buzzers attached to aluminum bars and mounted to the shaft of a DC motor that produced a rotational diameter of 0.95 meter. The buzzers were placed 1 meter from the array. Multiple sound sources at the same frequency were identified, and the moving sources were accurately measured and located. tabs., figs.

  19. Filtering microphonics in dark matter germanium experiments

    International Nuclear Information System (INIS)

    Morales, J.; Garcia, E.; Ortiz de Solorzano, A.; Morales, A.; Nunz-Lagos, R.; Puimedon, J.; Saenz, C.; Villar, J.A.

    1992-01-01

    A technique for reducing the microphonic noise in a germanium spectrometer used in dark matter particles searches is described. Filtered energy spectra, corresponding to 48.5 kg day of data in a running experiment in the Canfranc tunnel are presented. Improvements of this filtering procedure with respect to the method of rejecting those events not distributed evenly in time are also discussed. (orig.)

  20. 77 FR 64446 - Wireless Microphones Proceeding

    Science.gov (United States)

    2012-10-22

    ... to balance the needs of potential new classes of wireless microphone licensees with those of other... undercut that balance by significantly reducing the amount of spectrum available for other uses, such as by..., a space capacity-rated for 3,000 people; for sports venues, a minimum of 10,000 seats for indoors...

  1. Silicon-micromachined microchannel plates

    International Nuclear Information System (INIS)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

  2. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  3. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  4. Investigation of noise radiation from a swirl stabilized diffusion flame with an array of microphones

    International Nuclear Information System (INIS)

    Singh, A.V.; Yu, M.; Gupta, A.K.; Bryden, K.M.

    2013-01-01

    Highlights: • Acoustic spectral characteristics independent of equivalence ratio and flow velocity. • Combustion noise dependent on global equivalence ratio and flow velocity. • Increased global equivalence ratio decreased the frequency of peak. • Decay and growth coefficients largely independent of different flow conditions. • Acoustic radiation coherent up to 1.5 kHz for spatially separated microphones. - Abstract: Next generation of combustors are expected to provide significant improvement on efficiency and reduced pollutants emission. In such combustors, the challenges of local flow, pressure, chemical composition and thermal signatures as well as their interactions will require detailed investigation for seeking optimum performance. Sensor networks with a large number of sensors will be employed in future smart combustors, which will allow one to obtain fast and comprehensive information on the various ongoing processes within the system. In this paper sensor networks with specific focus on an array of homogeneous microphones are used examine the spectral characteristics of combustion noise from a non-premixed combustor. A non-premixed double concentric swirl-flame burner was used. Noise spectra were determined experimentally for the non-premixed swirl flame at various fuel–air ratios using an array of homogeneous condenser microphones. Multiple microphones positioned at discrete locations around the turbulent diffusion flame, provided an understanding of the total sound power and their spectral characteristics. The growth and decay coefficients of total sound power were investigated at different test conditions. The signal coherence between different microphone pairs was also carried out to determine the acoustic behavior of a swirl stabilized turbulent diffusion flame. The localization of acoustic sources from the multiple microphones was examined using the noise spectra. The results revealed that integration of multiple sensors in combustors

  5. Cryogenically assisted abrasive jet micromachining of polymers

    International Nuclear Information System (INIS)

    Getu, H; Papini, M; Spelt, J K

    2008-01-01

    The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN 2 ) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN 2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN 2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN 2 also was found to reduce particle embedding

  6. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  7. The static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    , for a given type of microphone, can be described by a single function when the coefficients are normalized by their low-frequency value and the frequency is normalized with respect to the individual resonance frequency of the microphone. The theoretical results are supported by experimentally determined...... on an extended lumped parameter representation of the mechanical and acoustic elements of the microphone. The extension involves the frequency dependency of the dynamic diaphragm mass and stiffness as well as a first-order approximation of resonances in the back cavity. It was found that each coefficient...... coefficients for about twenty samples of microphone types B&K 4160 and B&K 4180....

  8. Microphone detected ionacoustic signal from metals

    International Nuclear Information System (INIS)

    Dioszeghy, T.; Szoekefalvi-Nagy, Z.; Biro, T.

    1986-12-01

    An experimental system for studying the radiation-induced acoustic signal generated by a modulated 2 MeV He + ion beam in metals is described. For detection, a closed cell on the rear side of the copper or aluminium sample, a half-inch condenser microphone, and a lock-in amplifier were employed. The signal was found to be proportional to beam current and particle energy, and inversely proportional to cell length. A decrease of the signal magnitude and an increase of the phase delay with increasing modulation frequency and sample thickness were also observed. (author)

  9. FY 1998 report on the R and D of micromachine technology. R and D of micromachine technology; 1998 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2000-03-01

    In the comprehensive investigational study of micromachine technology, the paper aims at clarifying the improvement of functional devices and the future development of micromachine technology for establishment of the technology needed to realize a micromachine system composing of small-functional elements for conducting diagnosis/cure/repair, movement and independent work in small portions in living organism, disaster site, etc. and a medical-use micromachine system to analyze/react on a trace of liquid. In this fiscal year, the following were carried out: 1) study of micromachine systems, 2) study of a medical-use micromachine system to analyze/react on a trace liquid, and 3) comprehensive investigational study. In 1), studies were made toward the minuteness and improvement of micro laser catheter and micro tactile sensor catheter as functional devices which become the main components of micro catheter for cerebrovascular diagnosis/therapy use and toward the minuteness and improvement of disaster relief use micromachine system. In 2), study was made of element technology of a micro-machine system having functions of sampling/analysis/reaction of a trace of liquid. (NEDO)

  10. Shooter Localization in Wireless Microphone Networks

    Directory of Open Access Journals (Sweden)

    David Lindgren

    2010-01-01

    Full Text Available Shooter localization in a wireless network of microphones is studied. Both the acoustic muzzle blast (MB from the gunfire and the ballistic shock wave (SW from the bullet can be detected by the microphones and considered as measurements. The MB measurements give rise to a standard sensor network problem, similar to time difference of arrivals in cellular phone networks, and the localization accuracy is good, provided that the sensors are well synchronized compared to the MB detection accuracy. The detection times of the SW depend on both shooter position and aiming angle and may provide additional information beside the shooter location, but again this requires good synchronization. We analyze the approach to base the estimation on the time difference of MB and SW at each sensor, which becomes insensitive to synchronization inaccuracies. Cramér-Rao lower bound analysis indicates how a lower bound of the root mean square error depends on the synchronization error for the MB and the MB-SW difference, respectively. The estimation problem is formulated in a separable nonlinear least squares framework. Results from field trials with different types of ammunition show excellent accuracy using the MB-SW difference for both the position and the aiming angle of the shooter.

  11. Parametric Investigation of Laser Doppler Microphones

    Science.gov (United States)

    Daoud, M.; Naguib, A.

    2002-11-01

    The concept of a Laser Doppler Microphone (LDM) is based on utilizing the Doppler frequency shift of a focused laser beam to measure the unsteady velocity of the center point of a flexible polymer diaphragm that is mounted on top of a hole and subjected to the unsteady pressure. Time integration of the velocity signal yields a time series of the diaphragm displacement, which can be converted to pressure from knowledge of the sensor's deflection sensitivity. In our APS/DFD presentation last year, the stringent frequency resolution requirement of these new sensors and methods to meet this requirement were discussed. Here, the dependence of the sensor characteristics (sensitivity, bandwidth, and noise floor) on various significant parameters is investigated in detail by calibrating the sensor in a plane wave tube in the frequency range of 50 - 5000 Hz. Parameters investigated include sensor diaphragm material and thickness, sensor size, damping of the diaphragm motion and laser beam spot size. The results shed light on the operating limits of the new sensor and demonstrate its ability to conduct high-spatial-resolution measurements in typical high-Reynolds-number test facilities. Moreover, calibrated LDM sensors were used to conduct measurements in a separating/reattaching flow and the results are compared to classical electret-type microphones with a similar sensing diameter.

  12. Influence of a remote microphone on localization with hearing aids

    DEFF Research Database (Denmark)

    Selby, Johan G.; Weisser, Adam; MacDonald, Ewen

    2017-01-01

    When used with hearing aids (HA), the addition of a remote microphone (RM) may alter the spatial perception of the listener. First, the RM signal is presented diotically from the HAs. Second, the processing in the HA often delays the RM signal relative to the HA microphone signals. Finally...

  13. Fabrication of silicon condenser microphones using single wafer technology

    NARCIS (Netherlands)

    Scheeper, P.R.; van der Donk, A.G.H.; Olthuis, Wouter; Bergveld, Piet

    1992-01-01

    A condenser microphone design that can be fabricated using the sacrificial layer technique is proposed and tested. The microphone backplate is a 1-¿m plasma-enhanced chemical-vapor-deposited (PECVD) silicon nitride film with a high density of acoustic holes (120-525 holes/mm2), covered with a thin

  14. Comparison of binaural microphones for externalization of sounds

    DEFF Research Database (Denmark)

    Cubick, Jens; Sánchez Rodríguez, C.; Song, Wookeun

    2015-01-01

    or with microphones placed inside the ear canals of a person. In this study, binaural room impulse responses (BRIRs) were measured with several commercially available binaural microphones, both placed inside the listeners’ ears (individual BRIR) and on a head and torso simulator (generic BRIR). The degree...

  15. Preamplifier with ultra low frequency cutoff for infrasonic condenser microphone

    DEFF Research Database (Denmark)

    Kinnerup, Rasmus Trock; Marbjerg, Kresten; Rasmussen, Per

    2012-01-01

    low frequencies becomes a challenge. The electric preamplifier presented in this paper together with a prepolarized condenser microphone form a measurement system. The developed preamplifier connects the microphone signal directly to the input of an operational amplifier with ultra high input...

  16. Advantages of directional hearing aid microphones related to room acoustics

    NARCIS (Netherlands)

    Leeuw, A. R.; Dreschler, W. A.

    1991-01-01

    In this study, two types of hearing aids were used. Both aids had the same frequency characteristics for frontal sound, but one employed an omnidirectional microphone and the other a directional microphone. The frequency characteristics of both hearing aids were measured for five azimuths on KEMAR

  17. 49 CFR 325.73 - Microphone distance correction factors. 1

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 5 2010-10-01 2010-10-01 false Microphone distance correction factors. 1 325.73 Section 325.73 Transportation Other Regulations Relating to Transportation (Continued) FEDERAL MOTOR... MOTOR CARRIER NOISE EMISSION STANDARDS Correction Factors § 325.73 Microphone distance correction...

  18. A silicon micromachined resonant pressure sensor

    International Nuclear Information System (INIS)

    Tang Zhangyang; Fan Shangchun; Cai Chenguang

    2009-01-01

    This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.

  19. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  20. Micro benchtop optics by bulk silicon micromachining

    Science.gov (United States)

    Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

    2000-01-01

    Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

  1. Silicon Micromachines for Science and Technology

    International Nuclear Information System (INIS)

    Bishop, David J.

    2002-01-01

    The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science, the ability to build microscopic machines from silicon is having a revolutionary impact. In my talk, I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology.

  2. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  3. Modeling and identification of induction micromachines in microelectromechanical systems applications

    Energy Technology Data Exchange (ETDEWEB)

    Lyshevski, S.E. [Purdue University at Indianapolis (United States). Dept. of Electrical and Computer Engineering

    2002-11-01

    Microelectromechanical systems (MEMS), which integrate motion microstructures, radiating energy microdevices, controlling and signal processing integrated circuits (ICs), are widely used. Rotational and translational electromagnetic based micromachines are used in MEMS as actuators and sensors. Brushless high performance micromachines are the preferable choice in different MEMS applications, and therefore, synchronous and induction micromachines are the best candidates. Affordability, good performance characteristics (efficiency, controllability, robustness, reliability, power and torque densities etc.) and expanded operating envelopes result in a strong interest in the application of induction micromachines. In addition, induction micromachines can be easily fabricated using surface micromachining and high aspect ratio fabrication technologies. Thus, it is anticipated that induction micromachines, controlled using different control algorithms implemented using ICs, will be widely used in MEMS. Controllers can be implemented using specifically designed ICs to attain superior performance, maximize efficiency and controllability, minimize losses and electromagnetic interference, reduce noise and vibration, etc. In order to design controllers, the induction micromachine must be modeled, and its mathematical model parameters must be identified. Using microelectromechanics, nonlinear mathematical models are derived. This paper illustrates the application of nonlinear identification methods as applied to identify the unknown parameters of three phase induction micromachines. Two identification methods are studied. In particular, nonlinear error mapping technique and least squares identification are researched. Analytical and numerical results, as well as practical capabilities and effectiveness, are illustrated, identifying the unknown parameters of a three phase brushless induction micromotor. Experimental results fully support the identification methods. (author)

  4. Demonstration of Robust Micromachined Jet Technology and its Application to Realistic Flow Control Problems

    National Research Council Canada - National Science Library

    Allen, Mark

    2000-01-01

    .... Our approaches include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow...

  5. Micromachined capacitive ultrasonic immersion transducer array

    Science.gov (United States)

    Jin, Xuecheng

    Capacitive micromachined ultrasonic transducers (cMUTs) have emerged as an attractive alternative to conventional piezoelectric ultrasonic transducers. They offer performance advantages of wide bandwidth and sensitivity that have heretofore been attainable. In addition, micromachining technology, which has benefited from the fast-growing microelectronics industry, enables cMUT array fabrication and electronics integration. This thesis describes the design and fabrication of micromachined capacitive ultrasonic immersion transducer arrays. The basic transducer electrical equivalent circuit is derived from Mason's theory. The effects of Lamb waves and Stoneley waves on cross coupling and acoustic losses are discussed. Electrical parasitics such as series resistance and shunt capacitance are also included in the model of the transducer. Transducer fabrication technology is systematically studied. Device dimension control in both vertical and horizontal directions, process alternatives and variations in membrane formation, via etch and cavity sealing, and metalization as well as their impact on transducer performance are summarized. Both 64 and 128 element 1-D array transducers are fabricated. Transducers are characterized in terms of electrical input impedance, bandwidth, sensitivity, dynamic range, impulse response and angular response, and their performance is compared with theoretical simulation. Various schemes for cross coupling reduction is analyzed, implemented, and verified with both experiments and theory. Preliminary results of immersion imaging are presented using 64 elements 1-D array transducers for active source imaging.

  6. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  7. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  8. The ribbon microphone - an educational aid: use of a ribbon microphone to teach multi-discipline computer simulation skills

    CSIR Research Space (South Africa)

    Van Wyk, Marius

    2016-07-01

    Full Text Available The ribbon microphone serves as an excellent aid to learn computer simulation and computational skills. Simulation of this seemingly simple device is all but trivial. The ribbon microphone is an all-in-one example for simulations in acoustics...

  9. Development of a leak detection system using high temperature-resistant microphones

    International Nuclear Information System (INIS)

    Morishita, Yoshitsugu; Mochizuki, Hiroyasu; Watanabe, Kenshiu; Nakamura, Takahisa; Nakajima, Yoshiaki; Yamauchi, Tatsuya

    1991-01-01

    This report describes the development of a detection system of coolant leak from an inlet feeder pipe of an Advanced Thermal Reactor (ATR) with high temperature-resistant microphones. A microphone having resistance to both high temperature and high radiation dose has been developed at first. The characteristics with regard to leakage sound, attenuation of sound level in a heat insulating box for the inlet feeder pipes and background noise were clarified by laboratory experiments and measurements in the prototype ATR 'Fugen'. On the basis of these experimental findings, appropriate frequency ranges were surveyed to detect the leakage sound with a high S/N ratio under the background noise. Reliability of the system to a malfunction caused by burst-type noises observed in the plant was also investigated by statistical analyses. Finally, it was confirmed that the present method could detect a leak within a couple of seconds. (author)

  10. Virtual Microphones for Multichannel Audio Resynthesis

    Directory of Open Access Journals (Sweden)

    Athanasios Mouchtaris

    2003-09-01

    Full Text Available Multichannel audio offers significant advantages for music reproduction, including the ability to provide better localization and envelopment, as well as reduced imaging distortion. On the other hand, multichannel audio is a demanding media type in terms of transmission requirements. Often, bandwidth limitations prohibit transmission of multiple audio channels. In such cases, an alternative is to transmit only one or two reference channels and recreate the rest of the channels at the receiving end. Here, we propose a system capable of synthesizing the required signals from a smaller set of signals recorded in a particular venue. These synthesized “virtual” microphone signals can be used to produce multichannel recordings that accurately capture the acoustics of that venue. Applications of the proposed system include transmission of multichannel audio over the current Internet infrastructure and, as an extension of the methods proposed here, remastering existing monophonic and stereophonic recordings for multichannel rendering.

  11. Femtosecond laser micro-machined polyimide films for cell scaffold applications

    DEFF Research Database (Denmark)

    Antanavičiute, Ieva; Šimatonis, Linas; Ulčinas, Orestas

    2018-01-01

    of commercially available 12.7 and 25.4μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental...... micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens......Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining...

  12. Static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1996-01-01

    of the microphone. The static pressure and temperature coefficients were determined experimentally for about twenty samples of type BK 4160 and BK 4180 microphones. The results agree almost perfectly with the predictions for BK 4160, while some modifications of the lumped parameter values are called for to make......-order approximation of resonances in the back cavity. It was found that each of the coefficients, for a given type of microphone, can be expressed by a single function when the coefficients are normalized by their low-frequency value and the frequency axis normalized by the individual resonance frequency...

  13. Calibration of a micromachined particle velocity microphone in a standing wave tube using a LDA photon-correlation technique

    NARCIS (Netherlands)

    Raangs, R.; Schlicke, Ted; Barham, Richard

    2005-01-01

    In this paper, a new method of calibrating an acoustic particle velocity sensor using laser Doppler anemometry (LDA) is discussed. The results were compared and were in good agreement with the results obtained by conventional methods, where the sensitivity of the microflown is obtained with the use

  14. Optofluidic Microlasers based on Femtosecond Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Simoni F.

    2017-08-01

    Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

  15. Acceleration sensitivity of micromachined pressure sensors

    Science.gov (United States)

    August, Richard; Maudie, Theresa; Miller, Todd F.; Thompson, Erik

    1999-08-01

    Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sensitivity to acceleration especially if thick encapsulation layers are used to isolate the device from the hostile environment in which they reside. This paper describes a modeling approach to determine their sensitivity to acceleration that is very general and is applicable to different device designs and configurations. It also describes the results of device testing of a capacitive surface micromachined pressure sensor at constant acceleration levels from 500 to 2000 g's.

  16. High channel count microphone array accurately and precisely localizes ultrasonic signals from freely-moving mice.

    Science.gov (United States)

    Warren, Megan R; Sangiamo, Daniel T; Neunuebel, Joshua P

    2018-03-01

    An integral component in the assessment of vocal behavior in groups of freely interacting animals is the ability to determine which animal is producing each vocal signal. This process is facilitated by using microphone arrays with multiple channels. Here, we made important refinements to a state-of-the-art microphone array based system used to localize vocal signals produced by freely interacting laboratory mice. Key changes to the system included increasing the number of microphones as well as refining the methodology for localizing and assigning vocal signals to individual mice. We systematically demonstrate that the improvements in the methodology for localizing mouse vocal signals led to an increase in the number of signals detected as well as the number of signals accurately assigned to an animal. These changes facilitated the acquisition of larger and more comprehensive data sets that better represent the vocal activity within an experiment. Furthermore, this system will allow more thorough analyses of the role that vocal signals play in social communication. We expect that such advances will broaden our understanding of social communication deficits in mouse models of neurological disorders. Copyright © 2018 Elsevier B.V. All rights reserved.

  17. Source Coding for Wireless Distributed Microphones in Reverberant Environments

    DEFF Research Database (Denmark)

    Zahedi, Adel

    2016-01-01

    . However, it comes with the price of several challenges, including the limited power and bandwidth resources for wireless transmission of audio recordings. In such a setup, we study the problem of source coding for the compression of the audio recordings before the transmission in order to reduce the power...... consumption and/or transmission bandwidth by reduction in the transmission rates. Source coding for wireless microphones in reverberant environments has several special characteristics which make it more challenging in comparison with regular audio coding. The signals which are acquired by the microphones......Modern multimedia systems are more and more shifting toward distributed and networked structures. This includes audio systems, where networks of wireless distributed microphones are replacing the traditional microphone arrays. This allows for flexibility of placement and high spatial diversity...

  18. Modelling measurement microphones using BEM with visco-thermal losses

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller

    2012-01-01

    For many decades, models that can explain the behaviour of measurement condenser microphones have been proposed in the literature. These devices have an apparently simple working principle, a charged capacitor whose charge varies when one of its electrodes, the diaphragm, moves as a result of sound...... waves. However, measurement microphones must be manufactured very carefully due to their sensitivity to small changes of their physical parameters. There are different elements in a microphone, the diaphragm, the gap behind it, a back cavity, a vent for pressure equalization and an external medium. All...... visco-thermal losses is used to model measurement condenser microphones. The models presented are fully coupled and include a FEM model of the diaphragm. The behaviour of the acoustic variables in the gap and the effect of the pressure equalization vent are discussed, as well as the practical difficulty...

  19. Analyzing acoustic phenomena with a smartphone microphone

    Science.gov (United States)

    Kuhn, Jochen; Vogt, Patrik

    2013-02-01

    This paper describes how different sound types can be explored using the microphone of a smartphone and a suitable app. Vibrating bodies, such as strings, membranes, or bars, generate air pressure fluctuations in their immediate vicinity, which propagate through the room in the form of sound waves. Depending on the triggering mechanism, it is possible to differentiate between four types of sound waves: tone, sound, noise, and bang. In everyday language, non-experts use the terms "tone" and "sound" synonymously; however, from a physics perspective there are very clear differences between the two terms. This paper presents experiments that enable learners to explore and understand these differences. Tuning forks and musical instruments (e.g., recorders and guitars) can be used as equipment for the experiments. The data are captured using a smartphone equipped with the appropriate app (in this paper we describe the app Audio Kit for iOS systems ). The values captured by the smartphone are displayed in a screen shot and then viewed directly on the smartphone or exported to a computer graphics program for printing.

  20. Factors influencing individual variation in perceptual directional microphone benefit.

    Science.gov (United States)

    Keidser, Gitte; Dillon, Harvey; Convery, Elizabeth; Mejia, Jorge

    2013-01-01

    Large variations in perceptual directional microphone benefit, which far exceed the variation expected from physical performance measures of directional microphones, have been reported in the literature. The cause for the individual variation has not been systematically investigated. To determine the factors that are responsible for the individual variation in reported perceptual directional benefit. A correlational study. Physical performance measures of the directional microphones obtained after they had been fitted to individuals, cognitive abilities of individuals, and measurement errors were related to perceptual directional benefit scores. Fifty-nine hearing-impaired adults with varied degrees of hearing loss participated in the study. All participants were bilaterally fitted with a Motion behind-the-ear device (500 M, 501 SX, or 501 P) from Siemens according to the National Acoustic Laboratories' non-linear prescription, version two (NAL-NL2). Using the Bamford-Kowal-Bench (BKB) sentences, the perceptual directional benefit was obtained as the difference in speech reception threshold measured in babble noise (SRTn) with the devices in directional (fixed hypercardioid) and in omnidirectional mode. The SRTn measurements were repeated three times with each microphone mode. Physical performance measures of the directional microphone included the angle of the microphone ports to loudspeaker axis, the frequency range dominated by amplified sound, the in situ signal-to-noise ratio (SNR), and the in situ three-dimensional, articulation-index weighted directivity index (3D AI-DI). The cognitive tests included auditory selective attention, speed of processing, and working memory. Intraparticipant variation on the repeated SRTn's and the interparticipant variation on the average SRTn were used to determine the effect of measurement error. A multiple regression analysis was used to determine the effect of other factors. Measurement errors explained 52% of the variation

  1. X-ray microcalorimeter arrays fabricated by surface micromachining

    International Nuclear Information System (INIS)

    Hilton, G.C.; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D.

    2004-01-01

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

  2. A Novel Silicon Micromachined Integrated MCM Thermal Management System

    Science.gov (United States)

    Kazmierczak, M. J.; Henderson, H. T.; Gerner, F. M.

    1997-01-01

    heat flux applications, respectively. The high heat load application of particular interest in mind is the motor controller developed by Martin Marietta for Nasa to control the thruster's directional actuators on space vechicles. Work is also proposed to develop highly advanced and improved porous wick structures for use in advanced heat loops. The porous wick will be micromachined from silicon using MEMS technology, thus permitting far superior control of pore size and pore distribution (over wicks made from sintered n-ietals), which in turn is expected to led to significantly improved heat loop performance.

  3. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... treatment of CMUTs is presented, including investigations of the anisotropic plate behaviour and modal radiation patterns of such devices. Several new CMUT fabrication approaches are developed and investigated in terms of oxide quality and surface protrusions, culminating in a simple four-mask process...

  4. Laser micromachining of sputtered DLC films

    International Nuclear Information System (INIS)

    Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Ong, S.E.; Zhang, S.; Milne, W.I.

    2006-01-01

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp 2 /sp 3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF 6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  5. Fabrication of a novel quartz micromachined gyroscope

    Science.gov (United States)

    Xie, Liqiang; Xing, Jianchun; Wang, Haoxu; Wu, Xuezhong

    2015-04-01

    A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure's mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z-axis quartz gyroscope is fabricated successfully.

  6. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  7. Micromachined two dimensional resistor arrays for determination of gas parameters

    NARCIS (Netherlands)

    van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

  8. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius; Kodzius, Rimantas; Vanagas, Galius

    2013-01-01

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here

  9. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  10. Biasing of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

    2017-02-01

    Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

  11. Irradiation of microphones in the EBR-II core

    International Nuclear Information System (INIS)

    Gavin, A.P.; Anderson, T.T.; Bobis, J.P.

    1976-06-01

    Six ANL developed high temperature microphone (acoustic detectors) have been exposed in flowing sodium in the In-Core Instrument Test Facility (INCOT) in the Experimental Breeder Reactor-II (EBR-II) for seven months without any indications of serious degradation of signal output due to the exposure. The YY05 experiment (EBR-II INCOT experiment designation) was performed to obtain data which would be useful in evaluating the ability of the microphones whose active elements are lithium niobate to serve as sensors for acoustic surveillance of fast breeder reactors. The reactor was at full power for 136 days of the experiment exposure period. The microphone temperatures varied from 371 0 C (700 0 F) to 621 0 C (1150 0 F). Neutron exposure varied from 2.64 x 10 22 nvt for the microphone at the elevation of the bottom of the EBR-II core to 0.24 x 10 22 nvt for the microphone at the elevation of the top of an EBR-II fuel assembly. The maximum gamma dose was 5 x 10 12 rads

  12. On the interference between the two microphones in free-field reciprocity calibration

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2004-01-01

    One of the fundamental assumptions in free-field reciprocity calibration of microphones is that the microphones can be substituted by point sources at the positions where the acoustic centers are located. However, in practice the microphones have finite dimensions and, at the distance and in the ......One of the fundamental assumptions in free-field reciprocity calibration of microphones is that the microphones can be substituted by point sources at the positions where the acoustic centers are located. However, in practice the microphones have finite dimensions and, at the distance...

  13. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  14. Advances in 3D neuronal cell culture

    NARCIS (Netherlands)

    Frimat, Jean Philippe; Xie, Sijia; Bastiaens, Alex; Schurink, Bart; Wolbers, Floor; Den Toonder, Jaap; Luttge, Regina

    2015-01-01

    In this contribution, the authors present our advances in three-dimensional (3D) neuronal cell culture platform technology contributing to controlled environments for microtissue engineering and analysis of cellular physiological and pathological responses. First, a micromachined silicon sieving

  15. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

    2001-01-01

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  16. On the use of mobile phones and wearable microphones for noise exposure measurements: Calibration and measurement accuracy

    Science.gov (United States)

    Dumoulin, Romain

    Despite the fact that noise-induced hearing loss remains the number one occupational disease in developed countries, individual noise exposure levels are still rarely known and infrequently tracked. Indeed, efforts to standardize noise exposure levels present disadvantages such as costly instrumentation and difficulties associated with on site implementation. Given their advanced technical capabilities and widespread daily usage, mobile phones could be used to measure noise levels and make noise monitoring more accessible. However, the use of mobile phones for measuring noise exposure is currently limited due to the lack of formal procedures for their calibration and challenges regarding the measurement procedure. Our research investigated the calibration of mobile phone-based solutions for measuring noise exposure using a mobile phone's built-in microphones and wearable external microphones. The proposed calibration approach integrated corrections that took into account microphone placement error. The corrections were of two types: frequency-dependent, using a digital filter and noise level-dependent, based on the difference between the C-weighted noise level minus A-weighted noise level of the noise measured by the phone. The electro-acoustical limitations and measurement calibration procedure of the mobile phone were investigated. The study also sought to quantify the effect of noise exposure characteristics on the accuracy of calibrated mobile phone measurements. Measurements were carried out in reverberant and semi-anechoic chambers with several mobiles phone units of the same model, two types of external devices (an earpiece and a headset with an in-line microphone) and an acoustical test fixture (ATF). The proposed calibration approach significantly improved the accuracy of the noise level measurements in diffuse and free fields, with better results in the diffuse field and with ATF positions causing little or no acoustic shadowing. Several sources of errors

  17. Static pressure and temperature coefficients of working standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Cutanda Henriquez, Vicente; Torras Rosell, Antoni

    2016-01-01

    be a significant contribution to the uncertainty of the measurement. Determining the environmental coefficients of individual specimens of measurement microphones can be a straightforward though time-consuming procedure provided the appropriate facilities are available. An alternative is to determine them using...... coefficients. For this purpose, the environmental coefficients of some commercially available microphones have been determined experimentally, and whenever possible, compared with the coefficients determined numerically using the Boundary Element Method....... for these coefficients which are used for calibration purposes. Working standard microphones are not exempt of these influences. However, manufacturers usually provide a low frequency value of the environmental coefficient. While in some applications the influence of this coefficient may be negligible, in others it may...

  18. Lumped-parameters equivalent circuit for condenser microphones modeling.

    Science.gov (United States)

    Esteves, Josué; Rufer, Libor; Ekeom, Didace; Basrour, Skandar

    2017-10-01

    This work presents a lumped parameters equivalent model of condenser microphone based on analogies between acoustic, mechanical, fluidic, and electrical domains. Parameters of the model were determined mainly through analytical relations and/or finite element method (FEM) simulations. Special attention was paid to the air gap modeling and to the use of proper boundary condition. Corresponding lumped-parameters were obtained as results of FEM simulations. Because of its simplicity, the model allows a fast simulation and is readily usable for microphone design. This work shows the validation of the equivalent circuit on three real cases of capacitive microphones, including both traditional and Micro-Electro-Mechanical Systems structures. In all cases, it has been demonstrated that the sensitivity and other related data obtained from the equivalent circuit are in very good agreement with available measurement data.

  19. Contact microphone using optical fibre Bragg grating technology

    International Nuclear Information System (INIS)

    Bezombes, F A; Lalor, M J; Burton, D R

    2007-01-01

    A contact microphone using optical fibre Bragg grating has been developed. It enables one to listen and record a human voice and/or breathing by monitoring the vibration generated by the outer wall of the throat during speech. This system can have many applications such as detecting defects in vocal folds, measuring and monitoring the vibration and defection generated by intubations of a patient throat and other voice related problem, low level speaking recording and transmitting is also possible, the microphone can be also used to monitor breathing and the system can be used as a microphone in very harsh environments for example it would allow one to hear the patient during a cat scan

  20. Acoustic Source Localization in Aircraft Interiors Using Microphone Array Technologies

    Science.gov (United States)

    Sklanka, Bernard J.; Tuss, Joel R.; Buehrle, Ralph D.; Klos, Jacob; Williams, Earl G.; Valdivia, Nicolas

    2006-01-01

    Using three microphone array configurations at two aircraft body stations on a Boeing 777-300ER flight test, the acoustic radiation characteristics of the sidewall and outboard floor system are investigated by experimental measurement. Analysis of the experimental data is performed using sound intensity calculations for closely spaced microphones, PATCH Inverse Boundary Element Nearfield Acoustic Holography, and Spherical Nearfield Acoustic Holography. Each method is compared assessing strengths and weaknesses, evaluating source identification capability for both broadband and narrowband sources, evaluating sources during transient and steady-state conditions, and quantifying field reconstruction continuity using multiple array positions.

  1. Optical wave microphone measurement during laser ablation of Si

    Energy Technology Data Exchange (ETDEWEB)

    Mitsugi, Fumiaki, E-mail: mitsugi@cs.kumamoto-u.ac.jp [Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto, 860-8555 (Japan); Ide, Ryota; Ikegami, Tomoaki [Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto, 860-8555 (Japan); Nakamiya, Toshiyuki; Sonoda, Yoshito [Graduate School of Industrial Engineering, Tokai University, 9-1-1 Toroku, Kumamoto, 862-8652 (Japan)

    2012-10-30

    Pulsed laser irradiation is used for surface treatment of a solid and ablation for particle formation in gas, liquid or supercritical phase media. When a pulsed laser is used to irradiate a solid, spatial refractive index variations (including photothermal expansion, shockwaves and particles) occur, which vary depending on the energy density of the pulsed laser. We focused on this phenomenon and applied an unique method for detection of refractive index variation using an optical wave microphone based on Fraunhofer diffraction. In this research, we analyzed the waveforms and frequencies of refractive index variations caused by pulsed laser irradiation of silicon in air and measured with an optical wave microphone.

  2. A Piezoelectric MEMS Microphone Based on Lead Zirconate Titanate (PZT) Thim Films

    National Research Council Canada - National Science Library

    Polcawich, Ronald

    2004-01-01

    .... A piezoelectric-based microphone can provide a solution to these requirements, since it offers the ability to passively sense without the power requirements of condenser or piezoresistive microphone counterparts...

  3. Use of a Microphone Phased Array to Determine Noise Sources in a Rocket Plume

    Science.gov (United States)

    Panda, J.; Mosher, R.

    2010-01-01

    A 70-element microphone phased array was used to identify noise sources in the plume of a solid rocket motor. An environment chamber was built and other precautions were taken to protect the sensitive condenser microphones from rain, thunderstorms and other environmental elements during prolonged stay in the outdoor test stand. A camera mounted at the center of the array was used to photograph the plume. In the first phase of the study the array was placed in an anechoic chamber for calibration, and validation of the indigenous Matlab(R) based beamform software. It was found that the "advanced" beamform methods, such as CLEAN-SC was partially successful in identifying speaker sources placed closer than the Rayleigh criteria. To participate in the field test all equipments were shipped to NASA Marshal Space Flight Center, where the elements of the array hardware were rebuilt around the test stand. The sensitive amplifiers and the data acquisition hardware were placed in a safe basement, and 100m long cables were used to connect the microphones, Kulites and the camera. The array chamber and the microphones were found to withstand the environmental elements as well as the shaking from the rocket plume generated noise. The beamform map was superimposed on a photo of the rocket plume to readily identify the source distribution. It was found that the plume made an exceptionally long, >30 diameter, noise source over a large frequency range. The shock pattern created spatial modulation of the noise source. Interestingly, the concrete pad of the horizontal test stand was found to be a good acoustic reflector: the beamform map showed two distinct source distributions- the plume and its reflection on the pad. The array was found to be most effective in the frequency range of 2kHz to 10kHz. As expected, the classical beamform method excessively smeared the noise sources at lower frequencies and produced excessive side-lobes at higher frequencies. The "advanced" beamform

  4. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  5. Outlier Detection for Sensor Systems (ODSS): A MATLAB Macro for Evaluating Microphone Sensor Data Quality.

    Science.gov (United States)

    Vasta, Robert; Crandell, Ian; Millican, Anthony; House, Leanna; Smith, Eric

    2017-10-13

    Microphone sensor systems provide information that may be used for a variety of applications. Such systems generate large amounts of data. One concern is with microphone failure and unusual values that may be generated as part of the information collection process. This paper describes methods and a MATLAB graphical interface that provides rapid evaluation of microphone performance and identifies irregularities. The approach and interface are described. An application to a microphone array used in a wind tunnel is used to illustrate the methodology.

  6. The effects of asymmetric directional microphone fittings on acceptance of background noise.

    Science.gov (United States)

    Kim, Jong S; Bryan, Melinda Freyaldenhoven

    2011-05-01

    The effects of asymmetric directional microphone fittings (i.e., an omnidirectional microphone on one ear and a directional microphone on the other) on speech understanding in noise and acceptance of background noise were investigated in 15 full-time hearing aid users. Subjects were fitted binaurally with four directional microphone conditions (i.e., binaural omnidirectional, right asymmetric directional, left asymmetric directional and binaural directional microphones) using Siemens Intuis Directional behind-the-ear hearing aids. Speech understanding in noise was assessed using the Hearing in Noise Test, and acceptance of background noise was assessed using the Acceptable Noise Level procedure. Speech was presented from 0° while noise was presented from 180° azimuth. The results revealed that speech understanding in noise improved when using asymmetric directional microphones compared to binaural omnidirectional microphone fittings and was not significantly hindered compared to binaural directional microphone fittings. The results also revealed that listeners accepted more background noise when fitted with asymmetric directional microphones as compared to binaural omnidirectional microphones. Lastly, the results revealed that the acceptance of noise was further increased for the binaural directional microphones when compared to the asymmetric directional microphones, maximizing listeners' willingness to accept background noise in the presence of noise. Clinical implications will be discussed.

  7. On experimental determination of the random-incidence response of microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2007-01-01

    The random-incidence sensitivity of a microphone is defined as the ratio of the output voltage to the sound pressure that would exist at the position of the acoustic center of the microphone in the absence of the microphone in a sound field with incident plane waves coming from all directions. Th...

  8. A low-noise/low-power preamplifier for capacitive microphones

    DEFF Research Database (Denmark)

    Fürst, Claus Erdmann

    1996-01-01

    A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A...

  9. Chip-size-packaged silicon microphones [for hearing instruments

    DEFF Research Database (Denmark)

    Müllenborn, Matthias; Rombach, Pirmin; Klein, Udo

    2001-01-01

    bonding. The devices are fully encapsulated and provided with a well-determined interface to the environment. The integrated microphones operate at a bias of 1.5 V and are expected to reach a sensitivity of 5 mV/Pa, an A-weighted equivalent input noise of 24 dB sound pressure level, and a power...

  10. The Microphone Feedback Analogy for Chatter in Machining

    Directory of Open Access Journals (Sweden)

    Tony Schmitz

    2015-01-01

    Full Text Available This paper provides experimental evidence for the analogy between the time-delay feedback in public address systems and chatter in machining. Machining stability theory derived using the Nyquist criterion is applied to predict the squeal frequency in a microphone/speaker setup. Comparisons between predictions and measurements are presented.

  11. Multichannel signal enhancement using a remote wireless microphone

    NARCIS (Netherlands)

    Bloemendal, Brian; Van De Laar, Jakob; Sommen, Piet

    2012-01-01

    A novel approach to multichannel signal enhancement is presented that exploits data from a remote wireless microphone (RWM). This RWM is placed near an interfering source and transmits only autocorrelation data of its observations to a host, i.e., not the entire signal. The host has access to the

  12. Remote Microphone System Use at Home: Impact on Caregiver Talk

    Science.gov (United States)

    Benítez-Barrera, Carlos R.; Angley, Gina P.; Tharpe, Anne Marie

    2018-01-01

    Purpose: The purpose of this study was to investigate the effects of home use of a remote microphone system (RMS) on the spoken language production of caregivers with young children who have hearing loss. Method: Language Environment Analysis recorders were used with 10 families during 2 consecutive weekends (RMS weekend and No-RMS weekend). The…

  13. Reproducibility of Dual-Microphone Voice Range Profile Equipment

    DEFF Research Database (Denmark)

    Printz, Trine; Pedersen, Ellen Raben; Juhl, Peter

    2017-01-01

    in an anechoic chamber and an office: (a) comparing sound pressure levels (SPLs) from a dual-microphone VRP device, the Voice Profiler, when given the same input repeatedly (test-retest reliability); (b) comparing SPLs from 3 devices when given the same input repeatedly (intervariation); and (c) assessing...

  14. Improved multi-microphone noise reduction preserving binaural cues

    NARCIS (Netherlands)

    Koutrouvelis, A.; Hendriks, R.C.; Jensen, J; Heusdens, R.; Dong, Min; Zheng, Thomas Fang

    2016-01-01

    We propose a new multi-microphone noise reduction technique for binaural cue preservation of the desired source and the interferers. This method is based on the linearly constrained minimum variance (LCMV) framework, where the constraints are used for the binaural cue preservation of the desired

  15. Fast calculation of microphone array steering vectors with shear flow

    NARCIS (Netherlands)

    Sijtsma, P.

    2018-01-01

    This paper proposes a fast method for calculating the acoustic time delay between an observer and a receiver in a shear flow. This method is applied to an outdoor microphone array measurement on a large-scale wind turbine. In such a set-up, a shear flow represents the actual wind field better than a

  16. Improving beamforming by optimization of acoustic array microphone positions

    NARCIS (Netherlands)

    Malgoezar, A.M.N.; Snellen, M.; Sijtsma, P.; Simons, D.G.

    2016-01-01

    Assigning proper positions to microphones within arrays is essential in order to reduce or eliminate side- and grating lobes in 2D beamform images. In this paper an objective function is derived providing a measure for the presence of artificial sources. Using the global optimization method

  17. Design and analysis of diaphragms in dynamic microphones

    Directory of Open Access Journals (Sweden)

    Zi-Gui Huang

    2015-07-01

    Full Text Available Most contemporary high-end microphones are dynamic microphones, adopting the most basic electromagnetic transduction principles. This study investigated the diaphragm structures of dynamic microphones. The diaphragms were composed of polyimide material, and the boundary settings required for actual operation were provided using finite element model analysis software. The characteristic frequencies caused by grooving variations on the three-dimensional diaphragm were analyzed for the various groove shapes and number. The groove angles and width variations were examined based on the optimal groove shape selected in the aforementioned analysis, and the effects of these shapes were determined based on the analytical results. Acoustic waves cause thin films to vibrate, forming the working principle behind dynamic microphones. The thin film drives a coil to vibrate in a magnetic field and cuts the line of magnetic force, subsequently producing a voltage on both ends of the coil. This audio-frequency-inducted voltage represents an acoustic wave message. The finite element model analysis software was used to conduct electromagnetic induction simulations; the sound source was fed to the diaphragm to drive the coil. The coil vibrations caused the line of magnetic force to be cut, and the final voltages produced were examined and compared.

  18. Near field acoustic holography with microphones on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Moreno-Pescador, Guillermo; Fernandez Grande, Efren

    2011-01-01

    Spherical near field acoustic holography (spherical NAH) is a technique that makes it possible to reconstruct the sound field inside and just outside a spherical surface on which the sound pressure is measured with an array of microphones. This is potentially very useful for source identification...

  19. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  20. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  1. A mathematical model for source separation of MMG signals recorded with a coupled microphone-accelerometer sensor pair.

    Science.gov (United States)

    Silva, Jorge; Chau, Tom

    2005-09-01

    Recent advances in sensor technology for muscle activity monitoring have resulted in the development of a coupled microphone-accelerometer sensor pair for physiological acousti signal recording. This sensor can be used to eliminate interfering sources in practical settings where the contamination of an acoustic signal by ambient noise confounds detection but cannot be easily removed [e.g., mechanomyography (MMG), swallowing sounds, respiration, and heart sounds]. This paper presents a mathematical model for the coupled microphone-accelerometer vibration sensor pair, specifically applied to muscle activity monitoring (i.e., MMG) and noise discrimination in externally powered prostheses for below-elbow amputees. While the model provides a simple and reliable source separation technique for MMG signals, it can also be easily adapted to other aplications where the recording of low-frequency (< 1 kHz) physiological vibration signals is required.

  2. Feasible pickup from intact ossicular chain with floating piezoelectric microphone.

    Science.gov (United States)

    Kang, Hou-Yong; Na, Gao; Chi, Fang-Lu; Jin, Kai; Pan, Tie-Zheng; Gao, Zhen

    2012-02-22

    Many microphones have been developed to meet with the implantable requirement of totally implantable cochlear implant (TICI). However, a biocompatible one without destroying the intactness of the ossicular chain still remains under investigation. Such an implantable floating piezoelectric microphone (FPM) has been manufactured and shows an efficient electroacoustic performance in vitro test at our lab. We examined whether it pick up sensitively from the intact ossicular chain and postulated whether it be an optimal implantable one. Animal controlled experiment: five adult cats (eight ears) were sacrificed as the model to test the electroacoustic performance of the FPM. Three groups were studied: (1) the experiment group (on malleus): the FPM glued onto the handle of the malleus of the intact ossicular chains; (2) negative control group (in vivo): the FPM only hung into the tympanic cavity; (3) positive control group (Hy-M30): a HiFi commercial microphone placed close to the site of the experiment ear. The testing speaker played pure tones orderly ranged from 0.25 to 8.0 kHz. The FPM inside the ear and the HiFi microphone simultaneously picked up acoustic vibration which recorded as .wav files to analyze. The FPM transformed acoustic vibration sensitively and flatly as did the in vitro test across the frequencies above 2.0 kHz, whereas inefficiently below 1.0 kHz for its overloading mass. Although the HiFi microphone presented more efficiently than the FPM did, there was no significant difference at 3.0 kHz and 8.0 kHz. It is feasible to develop such an implantable FPM for future TICIs and TIHAs system on condition that the improvement of Micro Electromechanical System and piezoelectric ceramic material technology would be applied to reduce its weight and minimize its size.

  3. Feasible pickup from intact ossicular chain with floating piezoelectric microphone

    Directory of Open Access Journals (Sweden)

    Kang Hou-Yong

    2012-02-01

    Full Text Available Abstract Objectives Many microphones have been developed to meet with the implantable requirement of totally implantable cochlear implant (TICI. However, a biocompatible one without destroying the intactness of the ossicular chain still remains under investigation. Such an implantable floating piezoelectric microphone (FPM has been manufactured and shows an efficient electroacoustic performance in vitro test at our lab. We examined whether it pick up sensitively from the intact ossicular chain and postulated whether it be an optimal implantable one. Methods Animal controlled experiment: five adult cats (eight ears were sacrificed as the model to test the electroacoustic performance of the FPM. Three groups were studied: (1 the experiment group (on malleus: the FPM glued onto the handle of the malleus of the intact ossicular chains; (2 negative control group (in vivo: the FPM only hung into the tympanic cavity; (3 positive control group (Hy-M30: a HiFi commercial microphone placed close to the site of the experiment ear. The testing speaker played pure tones orderly ranged from 0.25 to 8.0 kHz. The FPM inside the ear and the HiFi microphone simultaneously picked up acoustic vibration which recorded as .wav files to analyze. Results The FPM transformed acoustic vibration sensitively and flatly as did the in vitro test across the frequencies above 2.0 kHz, whereas inefficiently below 1.0 kHz for its overloading mass. Although the HiFi microphone presented more efficiently than the FPM did, there was no significant difference at 3.0 kHz and 8.0 kHz. Conclusions It is feasible to develop such an implantable FPM for future TICIs and TIHAs system on condition that the improvement of Micro Electromechanical System and piezoelectric ceramic material technology would be applied to reduce its weight and minimize its size.

  4. An investigation of methods for free-field comparison calibration of measurement microphones

    DEFF Research Database (Denmark)

    Barrera-Figueroa, Salvador; Moreno Pescador, Guillermo; Jacobsen, Finn

    2010-01-01

    Free-field comparison calibration of measurement microphones requires that a calibrated reference microphone and a test microphone are exposed to the same sound pressure in a free field. The output voltages of the microphones can be measured either sequentially or simultaneously. The sequential...... method requires the sound field to have good temporal stability. The simultaneous method requires instead that the sound pressure is the same in the positions where the microphones are placed. In this paper the results of the application of the two methods are compared. A third combined method...

  5. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  6. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    International Nuclear Information System (INIS)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-01-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

  7. High definition surface micromachining of LiNbO 3 by ion implantation

    Science.gov (United States)

    Chiarini, M.; Bentini, G. G.; Bianconi, M.; De Nicola, P.

    2010-10-01

    High Energy Ion Implantation (HEII) of both medium and light mass ions has been successfully applied for the surface micromachining of single crystal LiNbO 3 (LN) substrates. It has been demonstrated that the ion implantation process generates high differential etch rates in the LN implanted areas, when suitable implantation parameters, such as ion species, fluence and energy, are chosen. In particular, when traditional LN etching solutions are applied to suitably ion implanted regions, etch rates values up to three orders of magnitude higher than the typical etching rates of the virgin material, are registered. Further, the enhancement in the etching rate has been observed on x, y and z-cut single crystalline material, and, due to the physical nature of the implantation process, it is expected that it can be equivalently applied also to substrates with different crystallographic orientations. This technique, associated with standard photolithographic technologies, allows to generate in a fast and accurate way very high aspect ratio relief micrometric structures on LN single crystal surface. In this work a description of the developed technology is reported together with some examples of produced micromachined structures: in particular very precisely defined self sustaining suspended structures, such as beams and membranes, generated on LN substrates, are presented. The developed technology opens the way to actual three dimensional micromachining of LN single crystals substrates and, due to the peculiar properties characterising this material, (pyroelectric, electro-optic, acousto-optic, etc.), it allows the design and the production of complex integrated elements, characterised by micrometric features and suitable for the generation of advanced Micro Electro Optical Systems (MEOS).

  8. A batch process micromachined thermoelectric energy harvester: fabrication and characterization

    International Nuclear Information System (INIS)

    Su, J; Goedbloed, M; Van Andel, Y; De Nooijer, M C; Elfrink, R; Wang, Z; Vullers, R J M; Leonov, V

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

  9. A sub-cm micromachined electron microscope

    Science.gov (United States)

    Feinerman, A. D.; Crewe, D. A.; Perng, D. C.; Shoaf, S. E.; Crewe, A. V.

    1993-01-01

    A new approach for fabricating macroscopic (approximately 10x10x10 mm(exp 3)) structures with micron accuracy has been developed. This approach combines the precision of semiconductor processing and fiber optic technologies. A (100) silicon wafer is anisotropically etched to create four orthogonal v-grooves and an aperture on each 10x12 mm die. Precision 308 micron optical fibers are sandwiched between the die to align the v-grooves. The fiber is then anodically bonded to the die above and below it. This procedure is repeated to create thick structures and a stack of 5 or 6 die will be used to create a miniature scanning electron microscope (MSEM). Two die in the structure will have a segmented electrode to deflect the beam and correct for astigmatism. The entire structure is UHV compatible. The performance of an SEM improves as its length is reduced and a sub-cm 2 keV MSEM with a field emission source should have approximately 1 nm resolution. A low voltage high resolution MSEM would be useful for the examination of biological specimens and semiconductors with a minimum of damage. The first MSEM will be tested with existing 6 micron thermionic sources. In the future a micromachined field emission source will be used. The stacking technology presented in this paper can produce an array of MSEMs 1 to 30 mm in length with a 1 mm or larger period. A key question being addressed by this research is the optimum size for a low voltage MSEM which will be determined by the required spatial resolution, field of view, and working distance.

  10. Multi-layer enhancement to polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-10-01

    A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

  11. UV laser micromachining of ceramic materials: formation of columnar topographies

    International Nuclear Information System (INIS)

    Oliveira, V.; Vilar, R.; Conde, O.

    2001-01-01

    Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

  12. Design optimization of condenser microphone: a design of experiment perspective.

    Science.gov (United States)

    Tan, Chee Wee; Miao, Jianmin

    2009-06-01

    A well-designed condenser microphone backplate is very important in the attainment of good frequency response characteristics--high sensitivity and wide bandwidth with flat response--and low mechanical-thermal noise. To study the design optimization of the backplate, a 2(6) factorial design with a single replicate, which consists of six backplate parameters and four responses, has been undertaken on a comprehensive condenser microphone model developed by Zuckerwar. Through the elimination of insignificant parameters via normal probability plots of the effect estimates, the projection of an unreplicated factorial design into a replicated one can be performed to carry out an analysis of variance on the factorial design. The air gap and slot have significant effects on the sensitivity, mechanical-thermal noise, and bandwidth while the slot/hole location interaction has major influence over the latter two responses. An organized and systematic approach of designing the backplate is summarized.

  13. Factors affecting the performance of large-aperture microphone arrays

    Science.gov (United States)

    Silverman, Harvey F.; Patterson, William R.; Sachar, Joshua

    2002-05-01

    Large arrays of microphones have been proposed and studied as a possible means of acquiring data in offices, conference rooms, and auditoria without requiring close-talking microphones. When such an array essentially surrounds all possible sources, it is said to have a large aperture. Large-aperture arrays have attractive properties of spatial resolution and signal-to-noise enhancement. This paper presents a careful comparison of theoretical and measured performance for an array of 256 microphones using simple delay-and-sum beamforming. This is the largest currently functional, all digital-signal-processing array that we know of. The array is wall-mounted in the moderately adverse environment of a general-purpose laboratory (8 m×8 m×3 m). The room has a T60 reverberation time of 550 ms. Reverberation effects in this room severely impact the array's performance. However, the width of the main lobe remains comparable to that of a simplified prediction. Broadband spatial resolution shows a single central peak with 10 dB gain about 0.4 m in diameter at the -3 dB level. Away from that peak, the response is approximately flat over most of the room. Optimal weighting for signal-to-noise enhancement degrades the spatial resolution minimally. Experimentally, we verify that signal-to-noise gain is less than proportional to the square root of the number of microphones probably due to the partial correlation of the noise between channels, to variation of signal intensity with polar angle about the source, and to imperfect correlation of the signal over the array caused by reverberations. We show measurements of the relative importance of each effect in our environment.

  14. MP.EXE Microphone pressure sensitivity calibration calculation program

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    MP.EXE is a program which calculates the pressure sensitivity of LS1 microphones as defined in IEC 61094-1, based on measurement results performed as laid down in IEC 61094-2.A very early program was developed and written by K. Rasmussen. The code of the present heavily extended version is writte...... by E.S. Olsen.The present manual is written by K.Rasmussen and E.S. Olsen....

  15. A LabVIEWTM-based scanning and control system for proton beam micromachining

    International Nuclear Information System (INIS)

    Bettiol, Andrew A.; Kan, J.A. van; Sum, T.C.; Watt, F.

    2001-01-01

    LabVIEW TM is steadily gaining in popularity as the programming language of choice for scientific data acquisition and control. This is due to the vast array of measurement instruments and data acquisition cards supported by the LabVIEW TM environment, and the relative ease with which advanced software can be programmed. Furthermore, virtual instruments that are designed for a given system can be easily ported to other LabVIEW TM platforms and hardware. This paper describes the new LabVIEW TM based scanning and control system developed specifically for proton beam micromachining (PBM) applications. The new system is capable of scanning figures at 16-bit resolution with improved sub-microsecond scan rates. Support for electrostatic beam blanking and external dose normalization using a TTL signal have been implemented. The new software incorporates a semi-automated dose calibration system, and a number of novel dose normalization methods. Limitations of the current beam scanning hardware are discussed in light of new results obtained from micromachining experiments performed in SU-8 photoresist

  16. Noise Reduction with Microphone Arrays for Speaker Identification

    Energy Technology Data Exchange (ETDEWEB)

    Cohen, Z

    2011-12-22

    Reducing acoustic noise in audio recordings is an ongoing problem that plagues many applications. This noise is hard to reduce because of interfering sources and non-stationary behavior of the overall background noise. Many single channel noise reduction algorithms exist but are limited in that the more the noise is reduced; the more the signal of interest is distorted due to the fact that the signal and noise overlap in frequency. Specifically acoustic background noise causes problems in the area of speaker identification. Recording a speaker in the presence of acoustic noise ultimately limits the performance and confidence of speaker identification algorithms. In situations where it is impossible to control the environment where the speech sample is taken, noise reduction filtering algorithms need to be developed to clean the recorded speech of background noise. Because single channel noise reduction algorithms would distort the speech signal, the overall challenge of this project was to see if spatial information provided by microphone arrays could be exploited to aid in speaker identification. The goals are: (1) Test the feasibility of using microphone arrays to reduce background noise in speech recordings; (2) Characterize and compare different multichannel noise reduction algorithms; (3) Provide recommendations for using these multichannel algorithms; and (4) Ultimately answer the question - Can the use of microphone arrays aid in speaker identification?

  17. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  18. A micromachined surface stress sensor with electronic readout

    NARCIS (Netherlands)

    Carlen, Edwin; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

    2008-01-01

    A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and

  19. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  20. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  1. Microphone variability and degradation: implications for monitoring programs employing autonomous recording units

    Directory of Open Access Journals (Sweden)

    Patrick J. Turgeon

    2017-06-01

    Full Text Available Autonomous recording units (ARUs are emerging as an effective tool for avian population monitoring and research. Although ARU technology is being rapidly adopted, there is a need to establish whether variation in ARU components and their degradation with use might introduce detection biases that would affect long-term monitoring and research projects. We assessed whether microphone sensitivity impacted the probability of detecting bird vocalizations by broadcasting a sequence of 12 calls toward an array of commercially available ARUs equipped with microphones of varying sensitivities under three levels (32 dBA, 42 dBA, and 50 dBA of experimentally induced noise conditions selected to reflect the range of noise levels commonly encountered during avian surveys. We used binomial regression to examine factors influencing probability of detection for each species and used these to examine the impact of microphone sensitivity on the effective detection area (ha for each species. Microphone sensitivity loss reduced detection probability for all species examined, but the magnitude of the effect varied between species and often interacted with distance. Microphone sensitivity loss reduced the effective detection area by an average of 25% for microphones just beyond manufacturer specifications (-5 dBV and by an average of 66% for severely compromised microphones (-20 dBV. Microphone sensitivity loss appeared to be more problematic for low frequency calls where reduction in the effective detection area occurred most rapidly. Microphone degradation poses a source of variation in avian surveys made with ARUs that will require regular measurement of microphone sensitivity and criteria for microphone replacement to ensure scientifically reproducible results. We recommend that research and monitoring projects employing ARUs test their microphones regularly, replace microphones with declining sensitivity, and record sensitivity as a potential covariate in

  2. Locating and Quantifying Broadband Fan Sources Using In-Duct Microphones

    Science.gov (United States)

    Dougherty, Robert P.; Walker, Bruce E.; Sutliff, Daniel L.

    2010-01-01

    In-duct beamforming techniques have been developed for locating broadband noise sources on a low-speed fan and quantifying the acoustic power in the inlet and aft fan ducts. The NASA Glenn Research Center's Advanced Noise Control Fan was used as a test bed. Several of the blades were modified to provide a broadband source to evaluate the efficacy of the in-duct beamforming technique. Phased arrays consisting of rings and line arrays of microphones were employed. For the imaging, the data were mathematically resampled in the frame of reference of the rotating fan. For both the imaging and power measurement steps, array steering vectors were computed using annular duct modal expansions, selected subsets of the cross spectral matrix elements were used, and the DAMAS and CLEAN-SC deconvolution algorithms were applied.

  3. Feedback characteristics between implantable microphone and transducer in middle ear cavity.

    Science.gov (United States)

    Arman Woo, S H; Woo, Seong Tak; Song, Byung Seop; Cho, Jin-Ho

    2013-10-01

    With the advent of implantable hearing aids, implementation and acoustic sensing strategy of the implantable microphone becomes an important issue; among the many types of implantable microphone, placing the microphone in middle ear cavity (MEC) has advantages including simple operation and insensitive to skin touching or chewing motion. In this paper, an implantable microphone was implemented and researched feedback characteristic when both the implantable microphone and the transducer were placed in the MEC. Analytical and finite element analysis were conducted to design the microphone to have a natural frequency of 7 kHz and showed good characteristics of SNR and sensitivity. For the feedback test, simple analytical and finite element analysis were calculated and compared with in vitro experiments (n = 4). From the experiments, the open-loop gain and feedback factor were measured and the minimum gain margin measured as 14.3 dB.

  4. New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones

    DEFF Research Database (Denmark)

    Haas-Christensen, Jelena

    The topic of this thesis is the design of CMOS preamplifiers for condenser microphones. Increasingly popular type of condenser microphones are MEMS (micro-electro-mechanical) microphones which pose a stringent requirements to the design of interface electronics among other due to their increased...... noise. Besides that, as MEMS microphones are easy to integrate with CMOS circuitry, CMOS circuit design gains importance because it can contribute to the overall improved performance of the system by introducing extra functionalities. Possible methods of sensing a signal from the microphone...... of a CMOS interface for a capacitive sensor. Finally, in the fourth part, a novel preamplifier designed demonstrating a concept of differential operation of two microphones biased with voltages of opposite polarities has been described. The amplifier shows how accompanying electronic circuitry can be used...

  5. High Channel Count, High Density Microphone Arrays for Wind Tunnel Environments, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — The Interdisciplinary Consulting Corporation (IC2) proposes the development of high channel count, high density, reduced cost per channel, directional microphone...

  6. MEMS microphone innovations towards high signal to noise ratios (Conference Presentation) (Plenary Presentation)

    Science.gov (United States)

    Dehé, Alfons

    2017-06-01

    After decades of research and more than ten years of successful production in very high volumes Silicon MEMS microphones are mature and unbeatable in form factor and robustness. Audio applications such as video, noise cancellation and speech recognition are key differentiators in smart phones. Microphones with low self-noise enable those functions. Backplate-free microphones enter the signal to noise ratios above 70dB(A). This talk will describe state of the art MEMS technology of Infineon Technologies. An outlook on future technologies such as the comb sensor microphone will be given.

  7. Methods for Room Acoustic Analysis and Synthesis using a Monopole-Dipole Microphone Array

    Science.gov (United States)

    Abel, J. S.; Begault, Durand R.; Null, Cynthia H. (Technical Monitor)

    1998-01-01

    In recent work, a microphone array consisting of an omnidirectional microphone and colocated dipole microphones having orthogonally aligned dipole axes was used to examine the directional nature of a room impulse response. The arrival of significant reflections was indicated by peaks in the power of the omnidirectional microphone response; reflection direction of arrival was revealed by comparing zero-lag crosscorrelations between the omnidirectional response and the dipole responses to the omnidirectional response power to estimate arrival direction cosines with respect to the dipole axes.

  8. Reconstruction of sound fields with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Walton, Tim

    2014-01-01

    waves traveling in any direction. In particular, rigid sphere microphone arrays are robust, and have the favorable property that the scattering introduced by the array can be compensated for - making the array virtually transparent. This study examines a recently proposed sound field reconstruction...... method based on a point source expansion, i.e. equivalent source method, using a rigid spherical array. The study examines the capability of the method to distinguish between sound waves arriving from different directions (i.e., as a sound field separation method). This is representative of the potential...

  9. Patch holography using a double layer microphone array

    DEFF Research Database (Denmark)

    Gomes, Jesper Skovhus

    a closed local element mesh that surrounds the microphone array, and with a part of the mesh coinciding with a patch, the entire source is not needed in the model. Since the array has two layers, sources/reflections behind the array are also allowed. The Equivalent Source Method (ESM) is another technique...... in which the sound field is represented by a set of monopoles placed inside the source. In this paper these monopoles are distributed so that they surround the array, and the reconstruction is compared with the IBEM-based approach. The comparisons are based on computer simulations with a planar double...... layer array and sources with different shapes....

  10. A Multifunction Low-Power Preamplifier for MEMS Capacitive Microphones

    DEFF Research Database (Denmark)

    Jawed, Syed Arsalan; Nielsen, Jannik Hammel; Gottardi, Massimo

    2009-01-01

    A multi-function two-stage chopper-stabilized preamplifier (PAMP) for MEMS capacitive microphones (MCM) is presented. The PAMP integrates digitally controllable gain, high-pass filtering and offset control, adding flexibility to the front-end readout of MCMs. The first stage of the PAMP consists...... of a source-follower (SF) while the second-stage is a capacitive gain stage. The second-stage employs chopper-stabilization (CHS), while SF buffer shields the MCM sensor from the switching spurs. The PAMP uses M poly bias resistors for the second-stage, exploiting Miller effect to achieve flat audio...

  11. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  12. Micromachined ultrasonic droplet generator based on a liquid horn structure

    Science.gov (United States)

    Meacham, J. M.; Ejimofor, C.; Kumar, S.; Degertekin, F. L.; Fedorov, A. G.

    2004-05-01

    A micromachined ultrasonic droplet generator is developed and demonstrated for drop-on-demand fluid atomization. The droplet generator comprises a bulk ceramic piezoelectric transducer for ultrasound generation, a reservoir for the ejection fluid, and a silicon micromachined liquid horn structure as the nozzle. The nozzles are formed using a simple batch microfabrication process that involves wet etching of (100) silicon in potassium hydroxide solution. Device operation is demonstrated by droplet ejection of water through 30 μm orifices at 1.49 and 2.30 MHz. The finite-element simulations of the acoustic fields in the cavity and electrical impedance of the device are in agreement with the measurements and indicate that the device utilizes cavity resonances in the 1-5 MHz range in conjunction with acoustic wave focusing by the pyramidally shaped nozzles to achieve low power operation.

  13. Condensation of sodium on a micromachined surface for AMTEC

    International Nuclear Information System (INIS)

    Crowley, C.J.; Izenson, M.G.

    1993-01-01

    A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

  14. Micromachined Polycrystalline Si Thermopiles in a T-shirt

    Directory of Open Access Journals (Sweden)

    Vladimir Leonov

    2011-04-01

    Full Text Available The technology for in-plane poly-Si thermopiles has been developed. The bulk-micromachined thermopiles are located between two Si bars and connected thermally with those bars through thin-film thermal shunts. The patterned strips of thermocouple material together with thermal shunts form bridges between Si bars. Two versions of a thermoelectric generator (TEG with micromachined thermopiles have been assembled and tested on a person’s wrist, and when integrated in a T-shirt. The TEG still produces less than 1 μW in the office, but at ambient temperatures below 11-13 °C it produces more than 1 μW at a voltage of more than 2 V on the matched load. The new way of integration of wearable TEG in clothing is shown. The TEG is located under the textile, and the fabric is used as a flexible radiator.

  15. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  16. Micromachined millimeter-wave photonic band-gap crystals

    International Nuclear Information System (INIS)

    Oezbay, E.; Michel, E.; Tuttle, G.; Biswas, R.; Sigalas, M.; Ho, K.

    1994-01-01

    We have developed a new technique for fabricating three-dimensional photonic band-gap crystals. Our method utilizes an orderly stacking of micromachined (110) silicon wafers to build the periodic structure. A structure with a full three-dimensional photonic band gap centered near 100 GHz was measured, with experimental results in good agreement with theoretical predictions. This basic approach described should be extendable to build structures with photonic band-gap frequencies ranging from 30 GHz to 3 THz

  17. Manufacture of Radio Frequency Micromachined Switches with Annealing

    OpenAIRE

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-01

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspe...

  18. Method of drying passivated micromachines by dewetting from a liquid-based process

    Science.gov (United States)

    Houston, Michael R.; Howe, Roger T.; Maboudian, Roya; Srinivasan, Uthara

    2000-01-01

    A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

  19. High speed micromachining with high power UV laser

    Science.gov (United States)

    Patel, Rajesh S.; Bovatsek, James M.

    2013-03-01

    Increasing demand for creating fine features with high accuracy in manufacturing of electronic mobile devices has fueled growth for lasers in manufacturing. High power, high repetition rate ultraviolet (UV) lasers provide an opportunity to implement a cost effective high quality, high throughput micromachining process in a 24/7 manufacturing environment. The energy available per pulse and the pulse repetition frequency (PRF) of diode pumped solid state (DPSS) nanosecond UV lasers have increased steadily over the years. Efficient use of the available energy from a laser is important to generate accurate fine features at a high speed with high quality. To achieve maximum material removal and minimal thermal damage for any laser micromachining application, use of the optimal process parameters including energy density or fluence (J/cm2), pulse width, and repetition rate is important. In this study we present a new high power, high PRF QuasarR 355-40 laser from Spectra-Physics with TimeShiftTM technology for unique software adjustable pulse width, pulse splitting, and pulse shaping capabilities. The benefits of these features for micromachining include improved throughput and quality. Specific example and results of silicon scribing are described to demonstrate the processing benefits of the Quasar's available power, PRF, and TimeShift technology.

  20. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

  1. High lane density slab-gel electrophoresis using micromachined instrumentation.

    Science.gov (United States)

    Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

    2001-10-01

    In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

  2. Method for discriminating microphonic noise in proportional counters

    International Nuclear Information System (INIS)

    Gold, R.

    1991-01-01

    This patent describes a detector system responsive to nuclear events for installation in a downhole logging tool including measuring well drilling equipment which subjects the detection system to microphonic shock. It comprises a closed chamber subject to impinging nuclear events and having two separate anode wires therein spaced apart from each other and spanning the chamber, providing a pair of separated spaced output terminals to thereby form an output signal; circuit means connecting from at least one of the chamber output terminals to a different amplifier means having two input terminals; the circuit means connected from the output terminal of the chamber to one of the input terminals of the differential amplifier means to cause formation of an output signal from the differential amplifier means; and vibration shock responsive means mounted in the detector system and having an output terminal which forms an output signal for connection to a second input at the differential circuit means so that microphonic signals from the chamber and the shock responsive means are provided thereto and tend to cancel when applied to the input terminals thereof, and wherein the shock responsive means does not cancel at the differential circuit means signals relating to nuclear events from the detector system

  3. Studying Room Acoustics using a Monopole-Dipole Microphone Array

    Science.gov (United States)

    Begault, Durand R.; Abel, Jonathan S.; Gills, Stephen R. (Technical Monitor)

    1997-01-01

    The use of a soundfield microphone for examining the directional nature of a room impulse response was reported recently. By cross-correlating monopole and co-located dipole microphone signals aligned with left-right, up-down, and front-back axes, a sense of signal direction of arrival is revealed. The current study is concerned with the array's ability to detect individual reflections and directions of arrival, as a function of the cross-correlation window duration. If is window is too long, weak reflections are overlooked; if too short, spurious detections result. Guidelines are presented for setting the window width according to perceptual criteria. Formulas are presented describing the accuracy with which direction of arrival can be estimated as a function of room specifics and measurement noise. The direction of arrival of early reflections is more accurately determined than that of later reflections which are quieter and more numerous. The transition from a fairly directional sound field at the beginning of the room impulse response to a uni-directional diffuse field is examined. Finally, it is shown that measurements from additional dipole orientations can significantly improve the ability to detect reflections and estimate their directions of arrival.

  4. Beamforming with a circular microphone array for localization of environmental noise sources

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2010-01-01

    It is often enough to localize environmental sources of noise from different directions in a plane. This can be accomplished with a circular microphone array, which can be designed to have practically the same resolution over 360. The microphones can be suspended in free space or they can...

  5. [Value of the study of cochlear microphonic recordings in deep and severe deafness].

    Science.gov (United States)

    Moatti, L; Busquet, D; Cotin, G

    1983-01-01

    A study was conducted to assess the contribution of cochlear microphonic potential recordings during electrophysiologic audiometry examinations. Amplitude of microphonic recordings were correlated with the degree of deafness, its etiology, and the prosthetic prognosis in 38 electrocochleographic examinations. Preliminary results are analyzed.

  6. Effects of directional microphone and adaptive multichannel noise reduction algorithm on cochlear implant performance.

    Science.gov (United States)

    Chung, King; Zeng, Fan-Gang; Acker, Kyle N

    2006-10-01

    Although cochlear implant (CI) users have enjoyed good speech recognition in quiet, they still have difficulties understanding speech in noise. We conducted three experiments to determine whether a directional microphone and an adaptive multichannel noise reduction algorithm could enhance CI performance in noise and whether Speech Transmission Index (STI) can be used to predict CI performance in various acoustic and signal processing conditions. In Experiment I, CI users listened to speech in noise processed by 4 hearing aid settings: omni-directional microphone, omni-directional microphone plus noise reduction, directional microphone, and directional microphone plus noise reduction. The directional microphone significantly improved speech recognition in noise. Both directional microphone and noise reduction algorithm improved overall preference. In Experiment II, normal hearing individuals listened to the recorded speech produced by 4- or 8-channel CI simulations. The 8-channel simulation yielded similar speech recognition results as in Experiment I, whereas the 4-channel simulation produced no significant difference among the 4 settings. In Experiment III, we examined the relationship between STIs and speech recognition. The results suggested that STI could predict actual and simulated CI speech intelligibility with acoustic degradation and the directional microphone, but not the noise reduction algorithm. Implications for intelligibility enhancement are discussed.

  7. Fabrication of a dual-planar-coil dynamic microphone by MEMS techniques

    International Nuclear Information System (INIS)

    Horng, Ray-Hua; Chen, Kuo-Feng; Tsai, Yao-Cheng; Suen, Cheng-You; Chang, Chao-Chih

    2010-01-01

    A dual-planar-coil miniature dynamic microphone, one of the electro-acoustic transducers working with the principle of the electromagnetic induction, has been realized by semiconductor micro-processing and micro-electro-mechanical system (MEMS) techniques. This MEMS microphone mainly consists of a 1 µm thick diaphragm sandwiched by two spiral coils and vibrating in the region with the highest magnetic flux density generated by a double magnetic system. In comparison with the traditional dynamic microphone, besides the miniaturized dimension, the MEMS microphone also provides 325 times the vibration velocity of the diaphragm faster than the traditional microphone. Measured by an audio analyzer, the frequency response of the MEMS microphone is only 4.5 dBV Pa −1 lower than that of the traditional microphone in the range between 50 Hz and 20 kHz. The responsivity of −54.8 dB Pa −1 (at 1 kHz) of the MEMS device is competitive to that of a traditional commercial dynamic microphone which typically ranges from −50 to −60 dBV Pa −1 (at 1 kHz).

  8. Robustness of a Mixed-Order Ambisonics Microphone Array for Sound Field Reproduction

    DEFF Research Database (Denmark)

    Marschall, Marton; Favrot, Sylvain Emmanuel; Buchholz, Jörg

    2012-01-01

    Spherical microphone arrays can be used to capture and reproduce the spatial characteristics of acoustic scenes. A mixed-order Ambisonics (MOA) approach was recently proposed to improve the horizontal spatial resolution of microphone arrays with a given number of transducers. In this paper...

  9. The ribbon microphone: A teaching aid for low frequency electromagnetic education

    CSIR Research Space (South Africa)

    Van Wyk, Marius S

    2017-09-01

    Full Text Available The ribbon microphone lends itself as a good example to use for education of multi-physics computer modeling and simulation. The value of the ribbon microphone as teaching aid can be extended by adding a transformer and electronic amplifier...

  10. A time-selective technique for free-field reciprocity calibration of condenser microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2003-01-01

    In normal practice, microphones are calibrated in a closed coupler where the sound pressure is uniformly distributed over the diaphragm. Alternatively, microphones can be placed in a free field, although in that case the distribution of sound pressure over the diaphragm will change as a result of...

  11. Practical considerations for a second-order directional hearing aid microphone system

    Science.gov (United States)

    Thompson, Stephen C.

    2003-04-01

    First-order directional microphone systems for hearing aids have been available for several years. Such a system uses two microphones and has a theoretical maximum free-field directivity index (DI) of 6.0 dB. A second-order microphone system using three microphones could provide a theoretical increase in free-field DI to 9.5 dB. These theoretical maximum DI values assume that the microphones have exactly matched sensitivities at all frequencies of interest. In practice, the individual microphones in the hearing aid always have slightly different sensitivities. For the small microphone separation necessary to fit in a hearing aid, these sensitivity matching errors degrade the directivity from the theoretical values, especially at low frequencies. This paper shows that, for first-order systems the directivity degradation due to sensitivity errors is relatively small. However, for second-order systems with practical microphone sensitivity matching specifications, the directivity degradation below 1 kHz is not tolerable. A hybrid order directive system is proposed that uses first-order processing at low frequencies and second-order directive processing at higher frequencies. This hybrid system is suggested as an alternative that could provide improved directivity index in the frequency regions that are important to speech intelligibility.

  12. Precision Measurements of Wind Turbine Noise using a Large Aperture Microphone Array

    DEFF Research Database (Denmark)

    Bradley, Stuart; Mikkelsen, Torben Krogh; Hünerbein, Sabine Von

    2016-01-01

    Experiments are described with a large microphone array (40 m scale) recording wind turbine noise. The array comprised 42 purpose-designed low-noise microphones simultaneously sampled at 20 kHz. Very high quality, fast, meteorological profile data was available from nearby 80 m masts and from the...

  13. Theory and design of compact hybrid microphone arrays on two-dimensional planes for three-dimensional soundfield analysis.

    Science.gov (United States)

    Chen, Hanchi; Abhayapala, Thushara D; Zhang, Wen

    2015-11-01

    Soundfield analysis based on spherical harmonic decomposition has been widely used in various applications; however, a drawback is the three-dimensional geometry of the microphone arrays. In this paper, a method to design two-dimensional planar microphone arrays that are capable of capturing three-dimensional (3D) spatial soundfields is proposed. Through the utilization of both omni-directional and first order microphones, the proposed microphone array is capable of measuring soundfield components that are undetectable to conventional planar omni-directional microphone arrays, thus providing the same functionality as 3D arrays designed for the same purpose. Simulations show that the accuracy of the planar microphone array is comparable to traditional spherical microphone arrays. Due to its compact shape, the proposed microphone array greatly increases the feasibility of 3D soundfield analysis techniques in real-world applications.

  14. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  15. On determination of microphone response and other parameters by a hybrid experimental and numerical method

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn; Rasmussen, Knud

    2008-01-01

    to this problem is to measure the velocity distribution of the membrane by means of a non-contact method, such as laser vibrometry. The measured velocity distributions can be used together with a numerical formulation such as the Boundary Element Method for estimating the microphone response and other parameters...... such as the acoustic centres. In this work, a hybrid method is presented. The velocity distributions of condenser Laboratory Standard microphones were measured using a laser vibrometer. This measured velocity distribution was used for estimating the microphone responses and parameters. The agreement with experimental......Typically, numerical calculations of the pressure, free-field and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  16. Hybrid method for determining the parameters of condenser microphones from measured membrane velocities and numerical calculations

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2009-01-01

    to this problem is to measure the velocity distribution of the membrane by means of a non-contact method, such as laser vibrometry. The measured velocity distribution can be used together with a numerical formulation such as the boundary element method for estimating the microphone response and other parameters......, e.g., the acoustic center. In this work, such a hybrid method is presented and examined. The velocity distributions of a number of condenser microphones have been determined using a laser vibrometer, and these measured velocity distributions have been used for estimating microphone responses......Typically, numerical calculations of the pressure, free-field, and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  17. A Framework for Speech Enhancement with Ad Hoc Microphone Arrays

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Christensen, Mads Græsbøll

    2016-01-01

    Speech enhancement is vital for improved listening practices. Ad hoc microphone arrays are promising assets for this purpose. Most well-established enhancement techniques with conventional arrays can be adapted into ad hoc scenarios. Despite recent efforts to introduce various ad hoc speech...... enhancement apparatus, a common framework for integration of conventional methods into this new scheme is still missing. This paper establishes such an abstraction based on inter and intra sub-array speech coherencies. Along with measures for signal quality at the input of sub-arrays, a measure of coherency...... is proposed both for sub-array selection in local enhancement approaches, and also for selecting a proper global reference when more than one sub-array are used. Proposed methods within this framework are evaluated with regard to quantitative and qualitative measures, including array gains, the speech...

  18. Estimation of surface impedance using different types of microphone arrays

    DEFF Research Database (Denmark)

    Richard, Antoine Philippe André; Fernandez Grande, Efren; Brunskog, Jonas

    2017-01-01

    This study investigates microphone array methods to measure the angle dependent surface impedance of acoustic materials. The methods are based on the reconstruction of the sound field on the surface of the material, using a wave expansion formulation. The reconstruction of both the pressure...... and the particle velocity leads to an estimation of the surface impedance for a given angle of incidence. A porous type absorber sample is tested experimentally in anechoic conditions for different array geometries, sample sizes, incidence angles, and distances between the array and sample. In particular......, the performances of a rigid spherical array and a double layer planar array are examined. The use of sparse array processing methods and conventional regulariation approaches are studied. In addition, the influence of the size of the sample on the surface impedance estimation is investigated using both...

  19. Transversely Excited Multipass Photoacoustic Cell Using Electromechanical Film as Microphone

    Directory of Open Access Journals (Sweden)

    Jaakko Saarela

    2010-05-01

    Full Text Available A novel multipass photoacoustic cell with five stacked electromechanical films as a microphone has been constructed, tested and characterized. The photoacoustic cell is an open rectangular structure with two steel plates facing each other. The longitudinal acoustic resonances are excited transversely in an optical multipass configuration. A detection limit of 22 ppb (10−9 was achieved for flowing NO2 in N2 at normal pressure by using the maximum of 70 laser beams between the resonator plates. The corresponding minimum detectable absorption and the normalized noise-equivalent absorption coefficients were 2:2 × 10−7 cm−1 and 3:2 × 10−9 cm−1WHz−1/2, respectively.

  20. Plane-wave decomposition by spherical-convolution microphone array

    Science.gov (United States)

    Rafaely, Boaz; Park, Munhum

    2004-05-01

    Reverberant sound fields are widely studied, as they have a significant influence on the acoustic performance of enclosures in a variety of applications. For example, the intelligibility of speech in lecture rooms, the quality of music in auditoria, the noise level in offices, and the production of 3D sound in living rooms are all affected by the enclosed sound field. These sound fields are typically studied through frequency response measurements or statistical measures such as reverberation time, which do not provide detailed spatial information. The aim of the work presented in this seminar is the detailed analysis of reverberant sound fields. A measurement and analysis system based on acoustic theory and signal processing, designed around a spherical microphone array, is presented. Detailed analysis is achieved by decomposition of the sound field into waves, using spherical Fourier transform and spherical convolution. The presentation will include theoretical review, simulation studies, and initial experimental results.

  1. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

    International Nuclear Information System (INIS)

    Tong Tao; Li Jinggao; Longtin, Jon P.

    2004-01-01

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

  2. Response identification in the extremely low frequency region of an electret condenser microphone.

    Science.gov (United States)

    Jeng, Yih-Nen; Yang, Tzung-Ming; Lee, Shang-Yin

    2011-01-01

    This study shows that a small electret condenser microphone connected to a notebook or a personal computer (PC) has a prominent response in the extremely low frequency region in a specific environment. It confines most acoustic waves within a tiny air cell as follows. The air cell is constructed by drilling a small hole in a digital versatile disk (DVD) plate. A small speaker and an electret condenser microphone are attached to the two sides of the hole. Thus, the acoustic energy emitted by the speaker and reaching the microphone is strong enough to actuate the diaphragm of the latter. The experiments showed that, once small air leakages are allowed on the margin of the speaker, the microphone captured the signal in the range of 0.5 to 20 Hz. Moreover, by removing the plastic cover of the microphone and attaching the microphone head to the vibration surface, the low frequency signal can be effectively captured too. Two examples are included to show the convenience of applying the microphone to pick up the low frequency vibration information of practical systems.

  3. Response Identification in the Extremely Low Frequency Region of an Electret Condenser Microphone

    Directory of Open Access Journals (Sweden)

    Shang-Yin Lee

    2011-01-01

    Full Text Available This study shows that a small electret condenser microphone connected to a notebook or a personal computer (PC has a prominent response in the extremely low frequency region in a specific environment. It confines most acoustic waves within a tiny air cell as follows. The air cell is constructed by drilling a small hole in a digital versatile disk (DVD plate. A small speaker and an electret condenser microphone are attached to the two sides of the hole. Thus, the acoustic energy emitted by the speaker and reaching the microphone is strong enough to actuate the diaphragm of the latter. The experiments showed that, once small air leakages are allowed on the margin of the speaker, the microphone captured the signal in the range of 0.5 to 20 Hz. Moreover, by removing the plastic cover of the microphone and attaching the microphone head to the vibration surface, the low frequency signal can be effectively captured too. Two examples are included to show the convenience of applying the microphone to pick up the low frequency vibration information of practical systems.

  4. The impact of the microphone position on the frequency analysis of snoring sounds.

    Science.gov (United States)

    Herzog, Michael; Kühnel, Thomas; Bremert, Thomas; Herzog, Beatrice; Hosemann, Werner; Kaftan, Holger

    2009-08-01

    Frequency analysis of snoring sounds has been reported as a diagnostic tool to differentiate between different sources of snoring. Several studies have been published presenting diverging results of the frequency analyses of snoring sounds. Depending on the position of the used microphones, the results of the frequency analysis of snoring sounds vary. The present study investigated the influence of different microphone positions on the outcome of the frequency analysis of snoring sounds. Nocturnal snoring was recorded simultaneously at six positions (air-coupled: 30 cm middle, 100 cm middle, 30 cm lateral to both sides of the patients' head; body contact: neck and parasternal) in five patients. The used microphones had a flat frequency response and a similar frequency range (10/40 Hz-18 kHz). Frequency analysis was performed by fast Fourier transformation and frequency bands as well as peak intensities (Peaks 1-5) were detected. Air-coupled microphones presented a wider frequency range (60 Hz-10 kHz) compared to contact microphones. The contact microphone at cervical position presented a cut off at frequencies above 300 Hz, whereas the contact microphone at parasternal position revealed a cut off above 100 Hz. On an exemplary base, the study demonstrates that frequencies above 1,000 Hz do appear in complex snoring patterns, and it is emphasised that high frequencies are imported for the interpretation of snoring sounds with respect to the identification of the source of snoring. Contact microphones might be used in screening devices, but for a natural analysis of snoring sounds the use of air-coupled microphones is indispensable.

  5. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  6. Micromachined integrated quantum circuit containing a superconducting qubit

    Science.gov (United States)

    Brecht, Teresa; Chu, Yiwen; Axline, Christopher; Pfaff, Wolfgang; Blumoff, Jacob; Chou, Kevin; Krayzman, Lev; Frunzio, Luigi; Schoelkopf, Robert

    We demonstrate a functional multilayer microwave integrated quantum circuit (MMIQC). This novel hardware architecture combines the high coherence and isolation of three-dimensional structures with the advantages of integrated circuits made with lithographic techniques. We present fabrication and measurement of a two-cavity/one-qubit prototype, including a transmon coupled to a three-dimensional microwave cavity micromachined in a silicon wafer. It comprises a simple MMIQC with competitive lifetimes and the ability to perform circuit QED operations in the strong dispersive regime. Furthermore, the design and fabrication techniques that we have developed are extensible to more complex quantum information processing devices.

  7. High-power ultrashort fiber laser for solar cells micromachining

    Science.gov (United States)

    Lecourt, J.-B.; Duterte, C.; Liegeois, F.; Lekime, D.; Hernandez, Y.; Giannone, D.

    2012-02-01

    We report on a high-power ultra-short fiber laser for thin film solar cells micromachining. The laser is based on Chirped Pulse Amplification (CPA) scheme. The pulses are stretched to hundreds of picoseconds prior to amplification and can be compressed down to picosecond at high energy. The repetition rate is adjustable from 100 kHz to 1 MHz and the optical average output power is close to 13 W (before compression). The whole setup is fully fibred, except the compressor achieved with bulk gratings, resulting on a compact and reliable solution for cold ablation.

  8. High-frequency micro-machined power inductors

    International Nuclear Information System (INIS)

    Wang, N.; O'Donnell, T.; Roy, S.; Brunet, M.; McCloskey, P.; O'Mathuna, S.C.

    2005-01-01

    Power inductors have been fabricated on silicon substrates using low-temperature IC compatible processes. The electrical properties of these micro-inductors have been measured and discussed. A maximum quality factor of 6 at 4 MHz has been achieved with an inductance value of about 160 nH. The DC saturation currents of the non-gapped and gapped inductors are ∼500 and 700 mA, respectively. The relatively high Q factor and the load current characteristics allow these micro-machined inductors to be used in integrated power converters

  9. Simulation Study of Electronic Damping of Microphonic Vibrations in Superconducting Cavities

    International Nuclear Information System (INIS)

    Alicia Hofler; Jean Delayen

    2005-01-01

    Electronic damping of microphonic vibrations in superconducting rf cavities involves an active modulation of the cavity field amplitude in order to induce ponderomotive forces that counteract the effect of ambient vibrations on the cavity frequency. In lightly beam loaded cavities, a reduction of the microphonics-induced frequency excursions leads directly to a reduction of the rf power required for phase and amplitude stabilization. Jefferson Lab is investigating such an electronic damping scheme that could be applied to the JLab 12 GeV upgrade, the RIA driver, and possibly to energy-recovering superconducting linacs. This paper discusses a model and presents simulation results for electronic damping of microphonic vibrations

  10. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

    2010-01-01

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  11. Influence of micromachined targets on laser accelerated proton beam profiles

    Science.gov (United States)

    Dalui, Malay; Permogorov, Alexander; Pahl, Hannes; Persson, Anders; Wahlström, Claes-Göran

    2018-03-01

    High intensity laser-driven proton acceleration from micromachined targets is studied experimentally in the target-normal-sheath-acceleration regime. Conical pits are created on the front surface of flat aluminium foils of initial thickness 12.5 and 3 μm using series of low energy pulses (0.5-2.5 μJ). Proton acceleration from such micromachined targets is compared with flat foils of equivalent thickness at a laser intensity of 7 × 1019 W cm-2. The maximum proton energy obtained from targets machined from 12.5 μm thick foils is found to be slightly lower than that of flat foils of equivalent remaining thickness, and the angular divergence of the proton beam is observed to increase as the depth of the pit approaches the foil thickness. Targets machined from 3 μm thick foils, on the other hand, show evidence of increasing the maximum proton energy when the depths of the structures are small. Furthermore, shallow pits on 3 μm thick foils are found to be efficient in reducing the proton beam divergence by a factor of up to three compared to that obtained from flat foils, while maintaining the maximum proton energy.

  12. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  13. Direct writing of microtunnels using proton beam micromachining

    International Nuclear Information System (INIS)

    Marot, Laurent; Munnik, Frans; Mikhailov, Serguei

    2006-01-01

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

  14. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    Energy Technology Data Exchange (ETDEWEB)

    Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

    2006-04-15

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

  15. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    Chang, Sung Pil

    2006-01-01

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  16. In vivo evaluation of mastication noise reduction for dual channel implantable microphone.

    Science.gov (United States)

    Woo, SeongTak; Jung, EuiSung; Lim, HyungGyu; Lee, Jang Woo; Seong, Ki Woong; Won, Chul Ho; Kim, Myoung Nam; Cho, Jin Ho; Lee, Jyung Hyun

    2014-01-01

    Input for fully implantable hearing devices (FIHDs) is provided by an implantable microphone under the skin of the temporal bone. However, the implanted microphone can be affected when the FIHDs user chews. In this paper, a dual implantable microphone was designed that can filter out the noise from mastication. For the in vivo experiment, a fabricated microphone was implanted in a rabbit. Pure-tone sounds of 1 kHz through a standard speaker were applied to the rabbit, which was given food simultaneously. To evaluate noise reduction, the measured signals were processed using a MATLAB program based adaptive filter. To verify the proposed method, the correlation coefficients and signal to-noise ratio before and after signal processing were calculated. By comparing the results, signal-to-noise ratio and correlation coefficients are enhanced by 6.07dB and 0.529 respectively.

  17. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments

    Directory of Open Access Journals (Sweden)

    Kotaro Hoshiba

    2017-11-01

    Full Text Available In search and rescue activities, unmanned aerial vehicles (UAV should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators.

  18. Recognition of In-Ear Microphone Speech Data Using Multi-Layer Neural Networks

    National Research Council Canada - National Science Library

    Bulbuller, Gokhan

    2006-01-01

    .... In this study, a speech recognition system is presented, specifically an isolated word recognizer which uses speech collected from the external auditory canals of the subjects via an in-ear microphone...

  19. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments †

    Science.gov (United States)

    Hoshiba, Kotaro; Washizaki, Kai; Wakabayashi, Mizuho; Ishiki, Takahiro; Bando, Yoshiaki; Gabriel, Daniel; Nakadai, Kazuhiro; Okuno, Hiroshi G.

    2017-01-01

    In search and rescue activities, unmanned aerial vehicles (UAV) should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS) consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators. PMID:29099790

  20. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments.

    Science.gov (United States)

    Hoshiba, Kotaro; Washizaki, Kai; Wakabayashi, Mizuho; Ishiki, Takahiro; Kumon, Makoto; Bando, Yoshiaki; Gabriel, Daniel; Nakadai, Kazuhiro; Okuno, Hiroshi G

    2017-11-03

    In search and rescue activities, unmanned aerial vehicles (UAV) should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS) consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators.

  1. Investigation of excimer laser ablation threshold of polymers using a microphone

    Energy Technology Data Exchange (ETDEWEB)

    Krueger, Joerg; Niino, Hiroyuki; Yabe, Akira

    2002-09-30

    KrF excimer laser ablation of polyethylene terephthalate (PET), polyimide (PI) and polycarbonate (PC) in air was studied by an in situ monitoring technique using a microphone. The microphone signal generated by a short acoustic pulse represented the etch rate of laser ablation depending on the laser fluence, i.e., the ablation 'strength'. From a linear relationship between the microphone output voltage and the laser fluence, the single-pulse ablation thresholds were found to be 30 mJ cm{sup -2} for PET, 37 mJ cm{sup -2} for PI and 51 mJ cm{sup -2} for PC (20-pulses threshold). The ablation thresholds of PET and PI were not influenced by the number of pulses per spot, while PC showed an incubation phenomenon. A microphone technique provides a simple method to determine the excimer laser ablation threshold of polymer films.

  2. Radiation impedance of condenser microphones and their diffuse-field responses

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2010-01-01

    and (b) measuring the pressure on the membrane of the microphone. The first measurement is carried out by means of laser vibrometry. The second measurement cannot be implemented in practice. However, the pressure on the membrane can be calculated numerically by means of the boundary element method......The relation between the diffuse-field response and the radiation impedance of a microphone has been investigated. Such a relation can be derived from classical theory. The practical measurement of the radiation impedance requires (a) measuring the volume velocity of the membrane of the microphone...... at frequencies below the resonance frequency of the microphone. Although the method may not be of great practical utility, it provides a useful validation of the estimates obtained by other means....

  3. Use of a Parabolic Microphone to Detect Hidden Subjects in Search and Rescue.

    Science.gov (United States)

    Bowditch, Nathaniel L; Searing, Stanley K; Thomas, Jeffrey A; Thompson, Peggy K; Tubis, Jacqueline N; Bowditch, Sylvia P

    2018-03-01

    This study compares a parabolic microphone to unaided hearing in detecting and comprehending hidden callers at ranges of 322 to 2510 m. Eight subjects were placed 322 to 2510 m away from a central listening point. The subjects were concealed, and their calling volume was calibrated. In random order, subjects were asked to call the name of a state for 5 minutes. Listeners with parabolic microphones and others with unaided hearing recorded the direction of the call (detection) and name of the state (comprehension). The parabolic microphone was superior to unaided hearing in both detecting subjects and comprehending their calls, with an effect size (Cohen's d) of 1.58 for detection and 1.55 for comprehension. For each of the 8 hidden subjects, there were 24 detection attempts with the parabolic microphone and 54 to 60 attempts by unaided listeners. At the longer distances (1529-2510 m), the parabolic microphone was better at detecting callers (83% vs 51%; P<0.00001 by χ 2 ) and comprehension (57% vs 12%; P<0.00001). At the shorter distances (322-1190 m), the parabolic microphone offered advantages in detection (100% vs 83%; P=0.000023) and comprehension (86% vs 51%; P<0.00001), although not as pronounced as at the longer distances. Use of a 66-cm (26-inch) parabolic microphone significantly improved detection and comprehension of hidden calling subjects at distances between 322 and 2510 m when compared with unaided hearing. This study supports the use of a parabolic microphone in search and rescue to locate responsive subjects in favorable weather and terrain. Copyright © 2017 The Authors. Published by Elsevier Inc. All rights reserved.

  4. A Comparison of Acoustic Field Measurement by a Microphone and by an Optical Interferometric Probe

    Directory of Open Access Journals (Sweden)

    R. Bálek

    2002-01-01

    Full Text Available The objective of this work is to show that our optical method for measuring acoustic pressure is in some way superior to measurement using a microphone. Measurement of the integral acoustic pressure in the air by a laser interferometric probe is compared with measurement using a microphone. We determined the particular harmonic components in the acoustic field in the case of relatively high acoustic power in the ultrasonic frequency range.

  5. A three-microphone acoustic reflection technique using transmitted acoustic waves in the airway.

    Science.gov (United States)

    Fujimoto, Yuki; Huang, Jyongsu; Fukunaga, Toshiharu; Kato, Ryo; Higashino, Mari; Shinomiya, Shohei; Kitadate, Shoko; Takahara, Yutaka; Yamaya, Atsuyo; Saito, Masatoshi; Kobayashi, Makoto; Kojima, Koji; Oikawa, Taku; Nakagawa, Ken; Tsuchihara, Katsuma; Iguchi, Masaharu; Takahashi, Masakatsu; Mizuno, Shiro; Osanai, Kazuhiro; Toga, Hirohisa

    2013-10-15

    The acoustic reflection technique noninvasively measures airway cross-sectional area vs. distance functions and uses a wave tube with a constant cross-sectional area to separate incidental and reflected waves introduced into the mouth or nostril. The accuracy of estimated cross-sectional areas gets worse in the deeper distances due to the nature of marching algorithms, i.e., errors of the estimated areas in the closer distances accumulate to those in the further distances. Here we present a new technique of acoustic reflection from measuring transmitted acoustic waves in the airway with three microphones and without employing a wave tube. Using miniaturized microphones mounted on a catheter, we estimated reflection coefficients among the microphones and separated incidental and reflected waves. A model study showed that the estimated cross-sectional area vs. distance function was coincident with the conventional two-microphone method, and it did not change with altered cross-sectional areas at the microphone position, although the estimated cross-sectional areas are relative values to that at the microphone position. The pharyngeal cross-sectional areas including retropalatal and retroglossal regions and the closing site during sleep was visualized in patients with obstructive sleep apnea. The method can be applicable to larger or smaller bronchi to evaluate the airspace and function in these localized airways.

  6. Optical microphone with fiber Bragg grating and signal processing techniques

    Science.gov (United States)

    Tosi, Daniele; Olivero, Massimo; Perrone, Guido

    2008-06-01

    In this paper, we discuss the realization of an optical microphone array using fiber Bragg gratings as sensing elements. The wavelength shift induced by acoustic waves perturbing the sensing Bragg grating is transduced into an intensity modulation. The interrogation unit is based on a fixed-wavelength laser source and - as receiver - a photodetector with proper amplification; the system has been implemented using devices for standard optical communications, achieving a low-cost interrogator. One of the advantages of the proposed approach is that no voltage-to-strain calibration is required for tracking dynamic shifts. The optical sensor is complemented by signal processing tools, including a data-dependent frequency estimator and adaptive filters, in order to improve the frequency-domain analysis and mitigate the effects of disturbances. Feasibility and performances of the optical system have been tested measuring the output of a loudspeaker. With this configuration, the sensor is capable of correctly detecting sounds up to 3 kHz, with a frequency response that exhibits a top sensitivity within the range 200-500 Hz; single-frequency input sounds inducing an axial strain higher than ~10nɛ are correctly detected. The repeatability range is ~0.1%. The sensor has also been applied for the detection of pulsed stimuli generated from a metronome.

  7. Phase Calibration of Microphones by Measurement in the Free-field

    Science.gov (United States)

    Shams, Qamar A.; Bartram, Scott M.; Humphreys, William M.; Zuckewar, Allan J.

    2006-01-01

    Over the past several years, significant effort has been expended at NASA Langley developing new Micro-Electro-Mechanical System (MEMS)-based microphone directional array instrumentation for high-frequency aeroacoustic measurements in wind tunnels. This new type of array construction solves two challenges which have limited the widespread use of large channel-count arrays, namely by providing a lower cost-per-channel and a simpler method for mounting microphones in wind tunnels and in field-deployable arrays. The current generation of array instrumentation is capable of extracting accurate noise source location and directivity on a variety of airframe components using sophisticated data reduction algorithms [1-2]. Commercially-available MEMS microphones are condenser-type devices and have some desirable characteristics when compared with conventional condenser-type microphones. The most important advantages of MEMS microphones are their size, price, and power consumption. However, the commercially-available units suffer from certain important shortcomings. Based on experiments with array prototypes, it was found that both the bandwidth and the sound pressure limit of the microphones should be increased significantly to improve the performance and flexibility of the microphone array [3]. It was also desired to modify the packaging to eliminate unwanted Helmholtz resonance s exhibited by the commercial devices. Thus, new requirements were defined as follows: Frequency response: 100 Hz to 100 KHz (+/-3dB) Upper sound pressure limit: Design 1: 130 dB SPL (THD less than 5%) Design 2: 150-160 dB SPL (THD less than 5%) Packaging: 3.73 x 6.13 x 1.3 mm can with laser-etched lid. In collaboration with Novusonic Acoustic Innovation, NASA modified a Knowles SiSonic MEMS design to meet these new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of

  8. Ultrafast disk technology enables next generation micromachining laser sources

    Science.gov (United States)

    Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

    2013-02-01

    Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

  9. Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

    Energy Technology Data Exchange (ETDEWEB)

    Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

    2005-11-15

    A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

  10. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-01-01

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation. PMID:27529254

  11. Surface micromachined counter-meshing gears discrimination device

    Science.gov (United States)

    Polosky, Marc A.; Garcia, Ernest J.; Allen, James J.

    2000-12-12

    A surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. Each of two CMG has a first portion of its perimeter devoted to continuous driving teeth that mesh with respective pinion gears. Each EMG also has a second portion of its perimeter devoted to regularly spaced discrimination gear teeth that extend outwardly on at least one of three levels of the CMG. The discrimination gear teeth are designed so as to pass each other without interference only if the correct sequence of partial rotations of the CMG occurs in response to a coded series of rotations from the pinion gears. A 24 bit code is normally input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect.

  12. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    Nesprias, F.; Venturino, M.; Debray, M.E.; Davidson, J.; Davidson, M.; Kreiner, A.J.; Minsky, D.; Fischer, M.; Lamagna, A.

    2009-01-01

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35 Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 10 12 ions/cm 2 , this technique is suitable for the fabrication of different shapes of LiNbO 3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  13. Structural design considerations for micromachined solid-oxide fuel cells

    Science.gov (United States)

    Srikar, V. T.; Turner, Kevin T.; Andrew Ie, Tze Yung; Spearing, S. Mark

    Micromachined solid-oxide fuel cells (μSOFCs) are among a class of devices being investigated for portable power generation. Optimization of the performance and reliability of such devices requires robust, scale-dependent, design methodologies. In this first analysis, we consider the structural design of planar, electrolyte-supported, μSOFCs from the viewpoints of electrochemical performance, mechanical stability and reliability, and thermal behavior. The effect of electrolyte thickness on fuel cell performance is evaluated using a simple analytical model. Design diagrams that account explicitly for thermal and intrinsic residual stresses are presented to identify geometries that are resistant to fracture and buckling. Analysis of energy loss due to in-plane heat conduction highlights the importance of efficient thermal isolation in microscale fuel cell design.

  14. Micromachined high-performance RF passives in CMOS substrate

    International Nuclear Information System (INIS)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-01-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

  15. A fully packaged micromachined single crystalline resonant force sensor

    Energy Technology Data Exchange (ETDEWEB)

    Cavalloni, C.; Gnielka, M.; Berg, J. von [Kistler Instrumente AG, Winterthur (Switzerland); Haueis, M.; Dual, J. [ETH Zuerich, Inst. of Mechanical Systems, Zuerich (Switzerland); Buser, R. [Interstate Univ. of Applied Science Buchs, Buchs (Switzerland)

    2001-07-01

    In this work a fully packaged resonant force sensor for static load measurements is presented. The working principle is based on the shift of the resonance frequency in response to the applied load. The heart of the sensor, the resonant structure, is fabricated by micromachining using single crystalline silicon. To avoid creep and hysteresis and to minimize temperature induced stress the resonant structure is encapsulated using an all-in-silicon solution. This means that the load coupling, the excitation of the microresonator and the detection of the oscillation signal are integrated in only one single crystalline silicon chip. The chip is packaged into a specially designed housing made of steel which has been designed with respect to application in harsh environments. The unloaded sensor has an initial frequency of about 22,5 kHz. The sensitivity amounts to 26 Hz/N with a linearity error significantly less than 0,5%FSO. (orig.)

  16. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    Polosky, M.A.; Garcia, E.J.; Allen, J.J.

    1998-01-01

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  17. Characterization of bulk-micromachined direct-bonded silicon nanofilters

    Science.gov (United States)

    Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

    1998-03-01

    The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

  18. Performance Enhancement of the Patch Antennas Applying Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Mohamed N. Azermanesh

    2007-09-01

    Full Text Available This paper reports on the application of micromachining technology for performance enhancement of two types of compact antennas which are becoming a common practice in microsystems. Shorted patch antennas (SPA and folded shorted patch antennas operating in the 5-6 GHz ISM band, with intended application in short-range wireless communications, are considered. The electrical length of antennas are modified by etching the substrate of the antennas, thus providing a new degree of freedom to control the antenna operating properties, which is the main novelty of our work. The gain and bandwidth of the antennas are increased by increasing the etching depth. However, etching the substrate affects the operating frequency as well. To keep the operating frequency at a pre-specified value, the dimension of the antennas must be increased by deepening the etching depth. Therefore, a trade off between the performance enhancement of the antennas and the dimensional enlargement is required.

  19. 3D capacitive tactile sensor using DRIE micromachining

    Science.gov (United States)

    Chuang, Chiehtang; Chen, Rongshun

    2005-07-01

    This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

  20. The Influence of Coating Structure on Micromachine Stiction

    Energy Technology Data Exchange (ETDEWEB)

    Kushmerick, J.G.; Hankins, M.G.; De Boer, M.P.; Clews, P.J.; Carpick, R.W.; Bunker, B.C.

    2000-10-03

    We have clearly shown that the film morphology dictates the anti-stiction properties of FDTS coatings. Release stiction is not observed when ideal monolayer films are present but can be extensive when thicker aggregate structures are present. This finding is significant because it indicates that agglomerate formation during processing is a major source of irreproducible behavior when FDTS coatings are used to release micromachined parts. The results could also help explain why coatings that are aged at high. humidity start to stick to each other. (AFM results show that humid environments promote the formation of aggregates from monolayer films.) The reason why aggregate structures promote stiction is currently unknown. However, it appears that aggregates interfere with the ability of FDTS to form dense, well-ordered coatings under microstructures, leading to surfaces that are sufficiently hydrophilic to allow for release stiction via an attractive Laplace force during drying.

  1. Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide

    Science.gov (United States)

    Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Lipilin, Alexandr; Vasiliev, Alexey; Sokolov, Andrey

    We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO2/Y2O3 (YSZ) are applied in these devices. The methods of ceramic MEMS devices fabrication with laser micromachining are considered. It is shown that the application of YSZ membranes permits a decrease in MEMS power consumption at 4500C down to ∼75 mW at continuous heating and down to ∼ 1 mW at pulse heating mode. The application of the platforms is not restricted by gas sensors: they can be used for fast thermometers, bolometric matrices, flowmeteres and other MEMS devices working under harsh environmental conditions.

  2. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    International Nuclear Information System (INIS)

    Khuri-Yakub, Butrus T; Oralkan, Ömer

    2011-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

  3. Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

    International Nuclear Information System (INIS)

    Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

    2014-01-01

    Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

  4. Capacitive micromachined ultrasonic transducers for medical imaging and therapy.

    Science.gov (United States)

    Khuri-Yakub, Butrus T; Oralkan, Omer

    2011-05-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure, and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated frontend electronic circuits we developed and their use for 2-D and 3-D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications.

  5. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  6. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  7. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.; Rodgers, M.S.

    1998-05-01

    An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

  8. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  9. Microfabrication in free-standing gallium nitride using UV laser micromachining

    International Nuclear Information System (INIS)

    Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Illy, E.K.; Knowles, M.R.H.; Edwards, P.R.; Martin, R.W.; Watson, I.M.; Dawson, M.D.

    2006-01-01

    Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride

  10. Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

    Science.gov (United States)

    Tang, B.; Shikida, M.; Sato, K.; Pal, P.; Amakawa, H.; Hida, H.; Fukuzawa, K.

    2010-06-01

    In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61-81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

  11. Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining

    International Nuclear Information System (INIS)

    Pal, Prem; Sato, Kazuo

    2009-01-01

    Complex three-dimensional structures for microelectromechanical systems (MEMS) are fabricated in Si{1 0 0} wafers using wet bulk micromachining. The structures are divided into two categories: fixed and freestanding. The fabrication processes for both types utilize single wafers with sequentially deposited nitride and oxide layers, local oxidation of silicon (LOCOS) and two steps of wet anisotropic etching. The fixed structures contain perfectly sharp edges. Thermally deposited oxide is used as the material for the freestanding structures. Wet etching is performed in tetramethyl ammonium hydroxide (TMAH) with and without Triton X-100 (C 14 H 22 O(C 2 H 4 O) n , n = 9–10). For the fixed structures, both etching steps are performed either in 25 wt% TMAH + Triton or pure TMAH or both, depending upon the type of the structures. In the case of freestanding systems, TMAH + Triton is utilized first, followed by pure TMAH. The fabrication methods enable densely arrayed structures, allowing the manufacture of corrugated diaphragms, compact size liquid (or gas) flow delivery systems, newly shaped mold for soft MEMS structures (e.g. PDMS (polydimethylsiloxane)) and other applications. The present research is an approach to fabricate advanced MEMS structures, extending the range of 3D structures fabricated by silicon anisotropic etching

  12. Numerical design and testing of a sound source for secondary calibration of microphones using the Boundary Element Method

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller; Barrera Figueroa, Salvador

    2009-01-01

    Secondary calibration of microphones in free field is performed by placing the microphone under calibration in an anechoic chamber with a sound source, and exposing it to a controlled sound field. A calibrated microphone is also measured as a reference. While the two measurements are usually made...... apart to avoid acoustic interaction. As a part of the project Euromet-792, aiming to investigate and improve methods for secondary free-field calibration of microphones, a sound source suitable for simultaneous secondary free-field calibration has been designed using the Boundary Element Method...... of the Danish Fundamental Metrology Institute (DFM). The design and verification of the source are presented in this communication....

  13. Characteristics of Relocated Quiet Zones Using Virtual Microphone Algorithm in an Active Headrest System

    Directory of Open Access Journals (Sweden)

    Seokhoon Ryu

    2016-01-01

    Full Text Available This study displays theoretical and experimental investigation on the characteristics of the relocated zone of quiet by a virtual microphone (VM based filtered-x LMS (FxLMS algorithm which can be embedded in a real-time digital controller for an active headrest system. The attenuation changes at the relocated zones of quiet by the variation of the distance between the ear and the error microphone are mainly examined. An active headrest system was implemented for the control experiment at a chair and consists of two (left and right secondary loudspeakers, two error microphones, two observer microphones at ear positions in a HATS, and other electronics including a dSPACE 1401 controller. The VM based FxLMS algorithm achieved an attenuation of about 22 dB in the control experiment against a narrowband primary noise by the variation of the distance between the ear and the error microphone. The important factors for the algorithm are discussed as well.

  14. A Background Noise Reduction Technique Using Adaptive Noise Cancellation for Microphone Arrays

    Science.gov (United States)

    Spalt, Taylor B.; Fuller, Christopher R.; Brooks, Thomas F.; Humphreys, William M., Jr.; Brooks, Thomas F.

    2011-01-01

    Background noise in wind tunnel environments poses a challenge to acoustic measurements due to possible low or negative Signal to Noise Ratios (SNRs) present in the testing environment. This paper overviews the application of time domain Adaptive Noise Cancellation (ANC) to microphone array signals with an intended application of background noise reduction in wind tunnels. An experiment was conducted to simulate background noise from a wind tunnel circuit measured by an out-of-flow microphone array in the tunnel test section. A reference microphone was used to acquire a background noise signal which interfered with the desired primary noise source signal at the array. The technique s efficacy was investigated using frequency spectra from the array microphones, array beamforming of the point source region, and subsequent deconvolution using the Deconvolution Approach for the Mapping of Acoustic Sources (DAMAS) algorithm. Comparisons were made with the conventional techniques for improving SNR of spectral and Cross-Spectral Matrix subtraction. The method was seen to recover the primary signal level in SNRs as low as -29 dB and outperform the conventional methods. A second processing approach using the center array microphone as the noise reference was investigated for more general applicability of the ANC technique. It outperformed the conventional methods at the -29 dB SNR but yielded less accurate results when coherence over the array dropped. This approach could possibly improve conventional testing methodology but must be investigated further under more realistic testing conditions.

  15. An Accurate Study on Capacitive Microphone with Circular Diaphragm Using a Higher Order Elasticity Theory

    Directory of Open Access Journals (Sweden)

    Shakiba Dowlati

    Full Text Available Abstract This study has been undertaken to investigate the mechanical behavior of the capacitive microphone with clamped circular diaphragm using modified couple stress theory in comparison to the classical one. Presence of the length scale parameter in modified couple stress theory provides the means to evaluate the size effect on the microphone mechanical behavior. Investigating Pull-in phenomenon and dynamic behavior of the microphone are the matters provided due to the application of a step DC voltage. Also the effects of different air damping coefficients on dynamic pull-in voltage and pull-in time have been studied. The output level or sensitivity of the microphone has been studied by investigating the frequency response in term of magnitude for different length scale parameters to figure out how the length scale parameter affects on the sensitivity of the capacitive microphone. To achieve these ends, the nonlinear differential equation of the circular diaphragm has been extracted using Kirchhoff thin plate theory. Then, a Step-by-Step Linearization Method (SSLM has been used to escape from the nonlinearity of the differential equation. Afterwards, Galerkin-based reduced-order model has been applied to solve the obtained equation.

  16. Optical wave microphone measurements of laser ablation of copper in supercritical carbon dioxide

    Energy Technology Data Exchange (ETDEWEB)

    Mitsugi, Fumiaki, E-mail: mitsugi@cs.kumamoto-u.ac.jp [Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555 (Japan); Ikegami, Tomoaki [Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555 (Japan); Nakamiya, Toshiyuki; Sonoda, Yoshito [Graduate School of Industrial Engineering, Tokai University, 9-1-1 Toroku, Kumamoto 862-8652 (Japan)

    2013-11-29

    Laser ablation plasma in a supercritical fluid has attracted much attention recently due to its usefulness in forming nanoparticles. Observation of the dynamic behavior of the supercritical fluid after laser irradiation of a solid is necessary for real-time monitoring and control of laser ablation. In this study, we utilized an optical wave microphone to monitor pulsed laser irradiation of a solid in a supercritical fluid. The optical wave microphone works based on Fraunhofer diffraction of phase modulation of light by changes in refractive index. We hereby report on our measurements for pulsed laser irradiation of a Cu target in supercritical carbon dioxide using an optical wave microphone. Photothermal acoustic waves which generated after single pulsed laser irradiation of a Cu target were detectable in supercritical carbon dioxide. The speed of sound around the critical point of supercritical carbon dioxide was clearly slower than that in gas. The optical wave microphone detected a signal during laser ablation of Cu in supercritical carbon dioxide that was caused by shockwave degeneration. - Highlights: • Photothermal acoustic wave in supercritical fluid was observed. • Sound speed around the critical point was slower than that in gas. • Optical wave microphone detected degeneration of a shockwave. • Ablation threshold of a solid in supercritical fluid can be estimated. • Generation of the second shockwave in supercritical phase was suggested.

  17. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  18. Environmental coefficients of the free-field sensitivity of measurement microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Cutanda Henriquez, Vicente; Torras-Rosell, Antoni

    2017-01-01

    The sensitivity of measurement microphones, both pressure and free field, is affected by changes in the environmental conditions, mainly temperature and static pressure. Static pressure and temperature coefficients for the pressure sensitivity have been the object of previous studies focused...... on Laboratory Standard microphones and few working standard microphones. The literature describes frequency dependent values for these coefficients which are used for calibration purposes. However, there is no description of the environmental coefficients of the free-field sensitivity though there have been...... some implementations that attempt to take care of the differences between the coefficients for the two types of sensitivities. Measuring the coefficients in a free field poses some challeng; it is not so easy to change neither the static pressure nor the temperature inside anechoic room within...

  19. Microphone directionality, pre-emphasis filter, and wind noise in cochlear implants.

    Science.gov (United States)

    Chung, King; McKibben, Nicholas

    2011-10-01

    Wind noise can be a nuisance or a debilitating masker for cochlear implant users in outdoor environments. Previous studies indicated that wind noise at the microphone/hearing aid output had high levels of low-frequency energy and the amount of noise generated is related to the microphone directionality. Currently, cochlear implants only offer either directional microphones or omnidirectional microphones for users at-large. As all cochlear implants utilize pre-emphasis filters to reduce low-frequency energy before the signal is encoded, effective wind noise reduction algorithms for hearing aids might not be applicable for cochlear implants. The purposes of this study were to investigate the effect of microphone directionality on speech recognition and perceived sound quality of cochlear implant users in wind noise and to derive effective wind noise reduction strategies for cochlear implants. A repeated-measure design was used to examine the effects of spectral and temporal masking created by wind noise recorded through directional and omnidirectional microphones and the effects of pre-emphasis filters on cochlear implant performance. A digital hearing aid was programmed to have linear amplification and relatively flat in-situ frequency responses for the directional and omnidirectional modes. The hearing aid output was then recorded from 0 to 360° at flow velocities of 4.5 and 13.5 m/sec in a quiet wind tunnel. Sixteen postlingually deafened adult cochlear implant listeners who reported to be able to communicate on the phone with friends and family without text messages participated in the study. Cochlear implant users listened to speech in wind noise recorded at locations that the directional and omnidirectional microphones yielded the lowest noise levels. Cochlear implant listeners repeated the sentences and rated the sound quality of the testing materials. Spectral and temporal characteristics of flow noise, as well as speech and/or noise characteristics before

  20. Acoustic isolation vessel for measurement of the background noise in microphones

    Science.gov (United States)

    Ngo, Kim C. T.; Zuckerwar, Allan J.

    1993-01-01

    An acoustic isolation vessel has been developed to measure the background noise in microphones. The test microphone is installed in an inner vessel, which is suspended within an outer vessel, and the intervening air space is evacuated to a high vacuum. An analytical expression for the transmission coefficient is derived, based on a five-media model, and compared to experiment. At an isolation vacuum of 5 x 10 exp -6 Torr the experimental transmission coefficient was found to be lower than -155 dB at frequencies ranging from 40 to 1200 Hz. Measurements of the A-weighted noise levels of commercial condenser microphones of four different sizes show good agreement with published values.

  1. Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

  2. Beamforming with a circular array of microphones mounted on a rigid sphere (L)

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2011-01-01

    Beamforming with uniform circular microphone arrays can be used for localizing sound sources over 360. Typically, the array microphones are suspended in free space or they are mounted on a solid cylinder. However, the cylinder is often considered to be infinitely long because the scattering problem...... has no exact solution for a finite cylinder. Alternatively one can use a solid sphere. This investigation compares the performance of a circular array mounded on a rigid sphere with that of such an array in free space and mounted on an infinite cylinder, using computer simulations. The examined...

  3. Spherical near field acoustic holography with microphones on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Hald, Jørgen; Fernandez Grande, Efren

    2008-01-01

    Spherical near field acoustic holography (SNAH) is a recently developed technique that makes it possible to reconstruct the sound field inside and just outside an acoustically transparent spherical surface on which the sound pressure is measured with an array of microphones with negligible...... with an array of microphones flush-mounted on a rigid sphere. However, this approach is only valid if it can be assumed that the sphere has a negligible influence on the incident sound field, in other words if multiple scattering can be ignored, and this is not necessarily a good assumption when the sphere...

  4. DFT-Domain Based Single-Microphone Noise Reduction for Speech Enhancement

    DEFF Research Database (Denmark)

    C. Hendriks, Richard; Gerkmann, Timo; Jensen, Jesper

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades...... their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement. The field of single-microphone noise reduction...

  5. Speech understanding in noise with an eyeglass hearing aid: asymmetric fitting and the head shadow benefit of anterior microphones.

    NARCIS (Netherlands)

    Mens, L.H.M.

    2011-01-01

    OBJECTIVE: To test speech understanding in noise using array microphones integrated in an eyeglass device and to test if microphones placed anteriorly at the temple provide better directivity than above the pinna. DESIGN: Sentences were presented from the front and uncorrelated noise from 45, 135,

  6. Review of piezoelectric micromachined ultrasonic transducers and their applications

    International Nuclear Information System (INIS)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

    2017-01-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

  7. Micromachined force sensors using thin film nickel–chromium piezoresistors

    International Nuclear Information System (INIS)

    Nadvi, Gaviraj S; Butler, Donald P; Çelik-Butler, Zeynep; Gönenli, İsmail Erkin

    2012-01-01

    Micromachined force/tactile sensors using nickel–chromium piezoresistors have been investigated experimentally and through finite-element analysis. The force sensors were designed with a suspended aluminum oxide (Al 2 O 3 ) membrane and optimally placed piezoresistors to measure the strain in the membrane when deflected with an applied force. Different devices, each with varying size and shape of both the membrane and the piezoresistors, were designed, fabricated and characterized. The piezoresistors were placed into a half-Wheatstone bridge configuration with two active and two passive nickel–chromium resistors to provide temperature drift compensation. The force sensors were characterized using a load cell and a nanopositioner to measure the sensor response with applied load. Piezoresistive gauge factors in the range of 1–5.2 have been calculated for the thin film nichrome (NiCr 80/20 wt%) from the measured results. The force sensors were calculated to have a noise equivalent force of 65–245 nN. (paper)

  8. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    Da-Chen Pang

    2017-06-01

    Full Text Available This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  9. Generation of programmable temporal pulse shape and applications in micromachining

    Science.gov (United States)

    Peng, X.; Jordens, B.; Hooper, A.; Baird, B. W.; Ren, W.; Xu, L.; Sun, L.

    2009-02-01

    In this paper we presented a pulse shaping technique on regular solid-state lasers and the application in semiconductor micromachining. With a conventional Q-switched laser, all of the parameters can be adjusted over only limited ranges, especially the pulse width and pulse shape. However, some laser link processes using traditional laser pulses with pulse widths of a few nanoseconds to a few tens of nanoseconds tend to over-crater in thicker overlying passivation layers and thereby cause IC reliability problems. Use of a laser pulse with a special shape and a fast leading edge, such as tailored pulse, is one technique for controlling link processing. The pulse shaping technique is based on light-loop controlled optical modulation to shape conventional Q-switched solid-state lasers. One advantage of the pulse shaping technique is to provide a tailored pulse shape that can be programmed to have more than one amplitude value. Moreover, it has the capability of providing programmable tailored pulse shapes with discrete amplitude and time duration components. In addition, it provides fast rising and fall time of each pulse at fairly high repetition rate at 355nm with good beam quality. The regular-to-shaped efficiency is up to 50%. We conclude with a discussion of current results for laser processing of semiconductor memory link structures using programmable temporal pulse shapes. The processing experiments showed promising results with shaped pulse.

  10. Manufacture of Radio Frequency Micromachined Switches with Annealing

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2014-01-01

    Full Text Available The fabrication and characterization of a radio frequency (RF micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  11. Manufacture of radio frequency micromachined switches with annealing.

    Science.gov (United States)

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-17

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM) software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  12. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  13. Receive-Noise Analysis of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Bozkurt, Ayhan; Yaralioglu, G Goksenin

    2016-11-01

    This paper presents an analysis of thermal (Johnson) noise received from the radiation medium by otherwise noiseless capacitive micromachined ultrasonic transducer (CMUT) membranes operating in their fundamental resonance mode. Determination of thermal noise received by multiple numbers of transducers or a transducer array requires the assessment of cross-coupling through the radiation medium, as well as the self-radiation impedance of the individual transducer. We show that the total thermal noise received by the cells of a CMUT has insignificant correlation, and is independent of the radiation impedance, but is only determined by the mass of each membrane and the electromechanical transformer ratio. The proof is based on the analytical derivations for a simple transducer with two cells, and extended to transducers with numerous cells using circuit simulators. We used a first-order model, which incorporates the fundamental resonance of the CMUT. Noise power is calculated by integrating over the entire spectrum; hence, the presented figures are an upper bound for the noise. The presented analyses are valid for a transimpedance amplifier in the receive path. We use the analysis results to calculate the minimum detectable pressure of a CMUT. We also provide an analysis based on the experimental data to show that output noise power is limited by and comparable to the theoretical upper limit.

  14. A Micromachined Infrared Senor for an Infrared Focal Plane Array

    Directory of Open Access Journals (Sweden)

    Seong M. Cho

    2008-04-01

    Full Text Available A micromachined infrared sensor for an infrared focal plane array has been designed and fabricated. Amorphous silicon was used as a sensing material, and silicon nitride was used as a membrane material. To get a good absorption in infrared range, the sensor structure was designed as a l/4 cavity structure. A Ni-Cr film was selected as an electrode material and mixed etching scheme was applied in the patterning process of the Ni-Cr electrode. All the processes were made in 0.5 μm iMEMS fabricated in the Electronics and Telecommunication Research Institute (ETRI. The processed MEMS sensor had a small membrane deflection less than 0.15 μm. This small deflection can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range of 8 ~ 14 μm. The processed infrared sensor showed high responsivity of ~230 kV/W at 1.0V bias and 2 Hz operation condition. The time constant of the sensor was 8.6 msec, which means that the sensor is suitable to be operated in 30 Hz frame rate.

  15. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  16. Review of piezoelectric micromachined ultrasonic transducers and their applications

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

    2017-11-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

  17. Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-05-01

    The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

  18. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    International Nuclear Information System (INIS)

    Xiang, H.; Komvopoulos, K.

    2013-01-01

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  19. The merit of using silicon for the development of hearing aid microphones and intraocular pressure sensors

    NARCIS (Netherlands)

    Bergveld, Piet

    1994-01-01

    An important design rule for a hearing aid is the requirement of a large signal to noise ratio, which is mainly determined by that of the microphone and its preamplifier. It will be shown that in order to increase the signal to noise ratio it is favourable to integrate the preamplifier with the

  20. Motorcycle detection and counting using stereo camera, IR camera, and microphone array

    Science.gov (United States)

    Ling, Bo; Gibson, David R. P.; Middleton, Dan

    2013-03-01

    Detection, classification, and characterization are the key to enhancing motorcycle safety, motorcycle operations and motorcycle travel estimation. Average motorcycle fatalities per Vehicle Mile Traveled (VMT) are currently estimated at 30 times those of auto fatalities. Although it has been an active research area for many years, motorcycle detection still remains a challenging task. Working with FHWA, we have developed a hybrid motorcycle detection and counting system using a suite of sensors including stereo camera, thermal IR camera and unidirectional microphone array. The IR thermal camera can capture the unique thermal signatures associated with the motorcycle's exhaust pipes that often show bright elongated blobs in IR images. The stereo camera in the system is used to detect the motorcyclist who can be easily windowed out in the stereo disparity map. If the motorcyclist is detected through his or her 3D body recognition, motorcycle is detected. Microphones are used to detect motorcycles that often produce low frequency acoustic signals. All three microphones in the microphone array are placed in strategic locations on the sensor platform to minimize the interferences of background noises from sources such as rain and wind. Field test results show that this hybrid motorcycle detection and counting system has an excellent performance.

  1. Temperature compensated, humidity insensitive, high-Tg TOPAS FBGs for accelerometers and microphones

    DEFF Research Database (Denmark)

    Stefani, Alessio; Yuan, W.; Markos, C.

    2012-01-01

    In this paper we present our latest work on Fiber Bragg Gratings (FBGs) in microstructured polymer optical fibers (mPOFs) and their application as strain sensing transducers in devices, such as accelerometers and microphones. We demonstrate how the cross-sensitivity of the FBG to temperature...

  2. Prediction of Quadcopter State through Multi-Microphone Side-Channel Fusion

    NARCIS (Netherlands)

    Koops, Hendrik Vincent; Garg, Kashish; Kim, Munsung; Li, Jonathan; Volk, Anja; Franchetti, Franz

    Improving trust in the state of Cyber-Physical Systems becomes increasingly important as more tasks become autonomous. We present a multi-microphone machine learning fusion approach to accurately predict complex states of a quadcopter drone in flight from the sound it makes using audio content

  3. Bit-rate reduction strategies for noise suppression with a remote wireless microphone

    NARCIS (Netherlands)

    Cvijanovic, N.; Sadiq, O.; Srinivasan, S.

    2012-01-01

    In single channel non-stationary noise reduction it is paramount that a good noise reference is available in a timely manner to maintaina high quality speech signal. Using a remote wireless microphone placed close to a noise source, a good estimate of the noise power spectral density (PSD) can be

  4. Benefits of the Fiber Optic versus the Electret Microphone in Voice Amplification

    Science.gov (United States)

    Kyriakou, Kyriaki; Fisher, Helene R.

    2013-01-01

    Background: Voice disorders that result in reduced loudness may cause difficulty in communicating, socializing and participating in occupational activities. Amplification is often recommended in order to facilitate functional communication, reduce vocal load and avoid developing maladaptive compensatory behaviours. The most common microphone used…

  5. Metrics for performance assessment of mixed-order Ambisonics spherical microphone arrays

    DEFF Research Database (Denmark)

    Favrot, Sylvain Emmanuel; Marschall, Marton

    2012-01-01

    Mixed-order Ambisonics (MOA) combines planar (2D) higher order Ambisonics (HOA) with lower order periphonic (3D) Ambisonics. MOA encoding from spherical microphone arrays has the potential to provide versatile recordings that can be played back using 2D, 3D or mixed systems. A procedure to generate...

  6. Bit rate reduction strategies for noise suppression using a remote wireless microphone

    NARCIS (Netherlands)

    Cvijanovic, N.; Sadiq, O.; Srinivasan, S.

    2012-01-01

    In single-channel non-stationary noise reduction it is paramount that a good noise reference is available in a timely manner to maintain a high quality speech signal. Using a remote wireless microphone placed close to a noise source, a good estimate of the noise power spectral density (PSD) can be

  7. Direct Measurement of the Speed of Sound Using a Microphone and a Speaker

    Science.gov (United States)

    Gómez-Tejedor, José A.; Castro-Palacio, Juan C.; Monsoriu, Juan A.

    2014-01-01

    We present a simple and accurate experiment to obtain the speed of sound in air using a conventional speaker and a microphone connected to a computer. A free open source digital audio editor and recording computer software application allows determination of the time-of-flight of the wave for different distances, from which the speed of sound is…

  8. Evaluation of Methods for In-Situ Calibration of Field-Deployable Microphone Phased Arrays

    Science.gov (United States)

    Humphreys, William M.; Lockard, David P.; Khorrami, Mehdi R.; Culliton, William G.; McSwain, Robert G.

    2017-01-01

    Current field-deployable microphone phased arrays for aeroacoustic flight testing require the placement of hundreds of individual sensors over a large area. Depending on the duration of the test campaign, the microphones may be required to stay deployed at the testing site for weeks or even months. This presents a challenge in regards to tracking the response (i.e., sensitivity) of the individual sensors as a function of time in order to evaluate the health of the array. To address this challenge, two different methods for in-situ tracking of microphone responses are described. The first relies on the use of an aerial sound source attached as a payload on a hovering small Unmanned Aerial System (sUAS) vehicle. The second relies on the use of individually excited ground-based sound sources strategically placed throughout the array pattern. Testing of the two methods was performed in microphone array deployments conducted at Fort A.P. Hill in 2015 and at Edwards Air Force Base in 2016. The results indicate that the drift in individual sensor responses can be tracked reasonably well using both methods. Thus, in-situ response tracking methods are useful as a diagnostic tool for monitoring the health of a phased array during long duration deployments.

  9. Sound-field reconstruction performance of a mixed-order Ambisonics microphone array

    DEFF Research Database (Denmark)

    Marschall, Marton; Chang, Jiho

    2013-01-01

    instruments and mobile phones. Previously, a mixed-order Ambisonics (MOA) approach was proposed to improve the horizontal spatial resolution of spherical arrays. This was achieved by increasing the number of microphones near the horizontal plane while keeping the total number of transducers fixed...

  10. MP.EXE, a Calculation Program for Pressure Reciprocity Calibration of Microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1998-01-01

    A computer program is described which calculates the pressure sensitivity of microphones based on measurements of the electrical transfer impedance in a reciprocity calibration set-up. The calculations are performed according to the International Standard IEC 6194-2. In addition a number of options...

  11. Free-field reciprocity calibration of laboratory standard (LS) microphones using a time selective technique

    DEFF Research Database (Denmark)

    Rasmussen, Knud; Barrera Figueroa, Salvador

    2006-01-01

    Although the basic principle of reciprocity calibration of microphones in a free field is simple, the practical problems are complicated due to the low signal-to-noise ratio and the influence of cross talk and reflections from the surroundings. The influence of uncorrelated noise can be reduced...

  12. A note on determination of the diffuse-field sensitivity of microphones using the reciprocity technique

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn

    2008-01-01

    angles of incidence but also on the accuracy of the frequency response at normal incidence. By contrast, this paper is concerned with determining the absolute diffuse-field response of a microphone using the reciprocity technique. To examine this possibility, a reciprocity calibration setup is used...

  13. High frequency microphone measurements for transition detection on airfoils. NACA-0015 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given to tran...

  14. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  15. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Rajta, I.; Uzonyi, I.; Baradacs, E.; Chatzichristidi, M.; Raptis, I.; Valamontes, E.S.

    2004-01-01

    Complete text of publication follows. Proton Beam Micromachining (PBM, also known as P-beam writing), a novel direct- write process for the production of 3D microstructures, can be used to make multilevel structures in a single layer of resist by varying the ion energy. The interaction between the bombarding ions and the target material is mainly ionization, and very few ions suffer high angle nuclear collisions, therefore structures made with PBM have smooth near vertical side walls. The most commony applied resists in PBM are the positive, conventional, polymethyl methacrylate (PMMA); and the negative, chemically amplified, SU-8 (Micro Chem Corp). SU-8 is an epoxy based resist suitable also for LIGA and UV-LIGA processes, it offers good sensitivity, good process latitude, very high aspect ratio and therefore it dominates in the high aspect ratio micromachining applications. SU-8 requires 30 nC/mm 2 fluence for PBM irradiations at 2 MeV protons. Its crosslinking chemistry is based on the eight epoxy rings in the polymer chain, which provide a very dense three dimensional network in the presence of suitably activated photo acid generators (PAGs) which is very difficult to be stripped away after development. Thus, stripping has to be assisted with plasma processes or with special liquid removers. Moreover, the SU-8 developer is organic, propylene glycol methyl ether acetate (PGMEA), and thus environmentally non-friendly. To overcome the SU-8 stripping limitations, design of a negative resist system where solubility change is not based solely on cross- linking but also on the differentiation of hydrophilicity between exposed and non-exposed areas is desirable. A new resist formulation, fulfilling the above specifications has been developed recently [1]. This formulation is based on a specific grade epoxy novolac (EP) polymer, a partially hydrogenated poly-4-hydroxy styrene (PHS) polymer, and an onium salt as photoacid generator (PAG), and has been successfully

  16. Intracardiac ultrasound scanner using a micromachine (MEMS) actuator.

    Science.gov (United States)

    Zara, J M; Bobbio, S M; Goodwin-Johansson, S; Smith, S W

    2000-01-01

    Catheter-based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this research is the development of catheter-based mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The authors' current transducer assembly consists of a single 1.75 mm by 1.75 mm, 20 MHz, PZT element mounted on a 2 mm by 2 mm square, 75 mum thick polyimide table that pivots on 3-mum thick gold plated polyimide hinges. The hinges also serve as the electrical connections to the transducer. This table-mounted transducer is tilted using a miniature linear actuator to produce a sector scan. This linear actuator is an integrated force array (IFA), which is an example of a micromachine, i.e., a microelectromechanical system (MEMS). The IFA is a thin (2.2 mum) polyimide membrane, which consists of a network of hundreds of thousands of micron scale deformable capacitors made from pairs of metallized polyimide plates. IFAs contract with an applied voltage of 30-120 V and have been shown to produce strains as large as 20% and forces of up to 8 dynes. The prototype transducer and actuator assembly was fabricated and interfaced with a GagePCI analog to digital conversion board digitizing 12 bit samples at a rate of 100 MSamples/second housed in a personal computer to create a single channel ultrasound scanner. The deflection of the table transducer in a low viscosity insulating fluid (HFE 7100, 3M) is up to +/-10 degrees at scan rates of 10-60 Hz. Software has been developed to produce real-time sector scans on the PC monitor.

  17. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  18. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  19. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the de......A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  20. Development of a Microphone Phased Array Capability for the Langley 14- by 22-Foot Subsonic Tunnel

    Science.gov (United States)

    Humphreys, William M.; Brooks, Thomas F.; Bahr, Christopher J.; Spalt, Taylor B.; Bartram, Scott M.; Culliton, William G.; Becker, Lawrence E.

    2014-01-01

    A new aeroacoustic measurement capability has been developed for use in open-jet testing in the NASA Langley 14- by 22-Foot Subsonic Tunnel (14x22 tunnel). A suite of instruments has been developed to characterize noise source strengths, locations, and directivity for both semi-span and full-span test articles in the facility. The primary instrument of the suite is a fully traversable microphone phased array for identification of noise source locations and strengths on models. The array can be mounted in the ceiling or on either side of the facility test section to accommodate various test article configurations. Complementing the phased array is an ensemble of streamwise traversing microphones that can be placed around the test section at defined locations to conduct noise source directivity studies along both flyover and sideline axes. A customized data acquisition system has been developed for the instrumentation suite that allows for command and control of all aspects of the array and microphone hardware, and is coupled with a comprehensive data reduction system to generate information in near real time. This information includes such items as time histories and spectral data for individual microphones and groups of microphones, contour presentations of noise source locations and strengths, and hemispherical directivity data. The data acquisition system integrates with the 14x22 tunnel data system to allow real time capture of facility parameters during acquisition of microphone data. The design of the phased array system has been vetted via a theoretical performance analysis based on conventional monopole beamforming and DAMAS deconvolution. The performance analysis provides the ability to compute figures of merit for the array as well as characterize factors such as beamwidths, sidelobe levels, and source discrimination for the types of noise sources anticipated in the 14x22 tunnel. The full paper will summarize in detail the design of the instrumentation

  1. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong; Yao, Yingbang; Wang, Xianbin; Yue, Weisheng; Chen, Longqing; Zhang, Xixiang

    2013-01-01

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC

  2. Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

    Science.gov (United States)

    Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

    2018-05-01

    There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

  3. Femtosecond laser micromachining of compound parabolic concentrator fiber tipped glucose sensors

    DEFF Research Database (Denmark)

    Hassan, Hafeez Ul; Lacraz, Amédée; Kalli, Kyriacos

    2017-01-01

    We report on highly accurate femtosecond (fs) laser micromachining of a compound parabolic concentrator (CPC) fiber tip on a polymer optical fiber (POF). The accuracy is reflected in an unprecedented correspondence between the numerically predicted and experimentally found improvement in fluoresc...

  4. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

  5. Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2005-01-01

    We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

  6. Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

  7. Micromachined Microwave Cavity Resonator Filters for 5G: a Feasibility Study

    NARCIS (Netherlands)

    Kemenade, van R.; Smolders, A.B.; Hon, de B.P.

    2015-01-01

    Micromachined microwave cavity filters offer a light-weight, high-Q and highly integrated alternative in the frequency range of 20 GHz–100 GHz as compared to conventional filter types. The filter technology shows potential for use in 5G portable devices and as such, the design of a duplexer

  8. Design challenges for stepper motor actuated microvalve based on fine and micro-machining

    NARCIS (Netherlands)

    Fazal, I.; Elwenspoek, Michael Curt

    2007-01-01

    We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the

  9. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  10. Characteristics and measurement of supersonic projectile shock waves by a 32-microphone ring array

    Science.gov (United States)

    Chang, Ho; Wu, Yan-Chyuan; Tsung, Tsing-Tshih

    2011-08-01

    This paper discusses about the characteristics of supersonic projectile shock wave in muzzle region during firing of high explosive anti-tank (HEAT) and high explosive (HE) projectiles. HEAT projectiles are fired horizontally at a muzzle velocity of Mach 3.5 from a medium caliber tank gun equipped with a newly designed multi-perforated muzzle brake, whereas HE projectiles are fired at elevation angles at a muzzle velocity of Mach 2 from a large caliber howitzer equipped with a newly designed double-baffle muzzle brake. In the near field, pressure signatures of the N-wave generated from projectiles are measured by 32-microphone ring array wrapped by cotton sheath. Records measured by the microphone array are used to demonstrate several key characteristics of the shock wave of supersonic projectile. All measurements made in this study can be a significant reference for developing guns, tanks, or the chassis of fighting vehicles.

  11. Virtual microphone sensing through vibro-acoustic modelling and Kalman filtering

    Science.gov (United States)

    van de Walle, A.; Naets, F.; Desmet, W.

    2018-05-01

    This work proposes a virtual microphone methodology which enables full field acoustic measurements for vibro-acoustic systems. The methodology employs a Kalman filtering framework in order to combine a reduced high-fidelity vibro-acoustic model with a structural excitation measurement and small set of real microphone measurements on the system under investigation. By employing model order reduction techniques, a high order finite element model can be converted in a much smaller model which preserves the desired accuracy and maintains the main physical properties of the original model. Due to the low order of the reduced-order model, it can be effectively employed in a Kalman filter. The proposed methodology is validated experimentally on a strongly coupled vibro-acoustic system. The virtual sensor vastly improves the accuracy with respect to regular forward simulation. The virtual sensor also allows to recreate the full sound field of the system, which is very difficult/impossible to do through classical measurements.

  12. On the influence of microphone array geometry on HRTF-based Sound Source Localization

    DEFF Research Database (Denmark)

    Farmani, Mojtaba; Pedersen, Michael Syskind; Tan, Zheng-Hua

    2015-01-01

    The direction dependence of Head Related Transfer Functions (HRTFs) forms the basis for HRTF-based Sound Source Localization (SSL) algorithms. In this paper, we show how spectral similarities of the HRTFs of different directions in the horizontal plane influence performance of HRTF-based SSL...... algorithms; the more similar the HRTFs of different angles to the HRTF of the target angle, the worse the performance. However, we also show how the microphone array geometry can assist in differentiating between the HRTFs of the different angles, thereby improving performance of HRTF-based SSL algorithms....... Furthermore, to demonstrate the analysis results, we show the impact of HRTFs similarities and microphone array geometry on an exemplary HRTF-based SSL algorithm, called MLSSL. This algorithm is well-suited for this purpose as it allows to estimate the Direction-of-Arrival (DoA) of the target sound using any...

  13. A Two-Microphone Noise Reduction System for Cochlear Implant Users with Nearby Microphones—Part II: Performance Evaluation

    Directory of Open Access Journals (Sweden)

    Rudolf Häusler

    2008-06-01

    Full Text Available Users of cochlear implants (auditory aids, which stimulate the auditory nerve electrically at the inner ear often suffer from poor speech understanding in noise. We evaluate a small (intermicrophone distance 7 mm and computationally inexpensive adaptive noise reduction system suitable for behind-the-ear cochlear implant speech processors. The system is evaluated in simulated and real, anechoic and reverberant environments. Results from simulations show improvements of 3.4 to 9.3 dB in signal to noise ratio for rooms with realistic reverberation and more than 18 dB under anechoic conditions. Speech understanding in noise is measured in 6 adult cochlear implant users in a reverberant room, showing average improvements of 7.9–9.6 dB, when compared to a single omnidirectional microphone or 1.3–5.6 dB, when compared to a simple directional two-microphone device. Subjective evaluation in a cafeteria at lunchtime shows a preference of the cochlear implant users for the evaluated device in terms of speech understanding and sound quality.

  14. Damping control of micromachined lowpass mechanical vibration isolation filters using electrostatic actuation with electronic signal processing

    Science.gov (United States)

    Dean, Robert; Flowers, George; Sanders, Nicole; MacAllister, Ken; Horvath, Roland; Hodel, A. S.; Johnson, Wayne; Kranz, Michael; Whitley, Michael

    2005-05-01

    Some harsh environments, such as those encountered by aerospace vehicles and various types of industrial machinery, contain high frequency/amplitude mechanical vibrations. Unfortunately, some very useful components are sensitive to these high frequency mechanical vibrations. Examples include MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure of these components to high frequency mechanical vibrations present in the operating environment can result in problems ranging from an increased noise floor to component failure. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication. Active filter topologies, such as piezoelectric, electrostrictive-polymer-film and SMA have also been investigated in recent years. Electrostatic actuators, however, are utilized in many micromachined silicon devices to generate mechanical motion. They offer a number of advantages, including low power, fast response time, compatibility with silicon micromachining, capacitive position measurement and relative simplicity of fabrication. This paper presents an approach for realizing active micromachined mechanical lowpass vibration isolation filters by integrating an electrostatic actuator with the micromachined passive filter structure to realize an active mechanical lowpass filter. Although the electrostatic actuator can be used to adjust the filter resonant frequency, the primary application is for increasing the damping to an acceptable level. The physical size of these active filters is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyroscope chips.

  15. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

    Science.gov (United States)

    Zawawi, S. A.; Hamzah, A. A.; Mohd-Yasin, F.; Majlis, B. Y.

    2017-08-01

    In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

  16. Microphonics detuning compensation in 3.9 GHZ superconducting RF cavities

    International Nuclear Information System (INIS)

    Ruben Carcagno

    2003-01-01

    Mechanical vibrations can detune superconducting radio frequency (SCRF) cavities unless a tuning mechanism counteracting the vibrations is present. Due to their narrow operating bandwidth and demanding mechanical structure, the 13-cell 3.9GHz SCRF cavities for the Charged Kaons at Main Injector (CKM) experiment at Fermilab are especially susceptible to this microphonic phenomena. We present early results correlating RF frequency detuning with cavity vibration measurements for CKM cavities; initial detuning compensation results with piezoelectric actuators are also presented

  17. Microphone Handling Noise: Measurements of Perceptual Threshold and Effects on Audio Quality.

    Directory of Open Access Journals (Sweden)

    Paul Kendrick

    Full Text Available A psychoacoustic experiment was carried out to test the effects of microphone handling noise on perceived audio quality. Handling noise is a problem affecting both amateurs using their smartphones and cameras, as well as professionals using separate microphones and digital recorders. The noises used for the tests were measured from a variety of devices, including smartphones, laptops and handheld microphones. The signal features that characterise these noises are analysed and presented. The sounds include various types of transient, impact noises created by tapping or knocking devices, as well as more sustained sounds caused by rubbing. During the perceptual tests, listeners auditioned speech podcasts and were asked to rate the degradation of any unwanted sounds they heard. A representative design test methodology was developed that tried to encourage everyday rather than analytical listening. Signal-to-noise ratio (SNR of the handling noise events was shown to be the best predictor of quality degradation. Other factors such as noise type or background noise in the listening environment did not significantly affect quality ratings. Podcast, microphone type and reproduction equipment were found to be significant but only to a small extent. A model allowing the prediction of degradation from the SNR is presented. The SNR threshold at which 50% of subjects noticed handling noise was found to be 4.2 ± 0.6 dBA. The results from this work are important for the understanding of our perception of impact sound and resonant noises in recordings, and will inform the future development of an automated predictor of quality for handling noise.

  18. Ad Hoc Microphone Array Beamforming Using the Primal-Dual Method of Multipliers

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Heusdens, Richard

    2016-01-01

    In the recent years, there have been increasing amount of researches aiming at optimal beamforming with ad hoc microphone arrays, mostly with fusion-based schemes. However, huge amount of computational complexity and communication overhead impede many of these algorithms from being useful in prac...... the distributed linearly-constrained minimum variance beamformer using the the state of the art primal-dual method of multipliers. We study the proposed algorithm with an experiment....

  19. Microphonics detuning compensation in 3.9 GHZ superconducting RF cavities

    Energy Technology Data Exchange (ETDEWEB)

    Ruben Carcagno et al.

    2003-10-20

    Mechanical vibrations can detune superconducting radio frequency (SCRF) cavities unless a tuning mechanism counteracting the vibrations is present. Due to their narrow operating bandwidth and demanding mechanical structure, the 13-cell 3.9GHz SCRF cavities for the Charged Kaons at Main Injector (CKM) experiment at Fermilab are especially susceptible to this microphonic phenomena. We present early results correlating RF frequency detuning with cavity vibration measurements for CKM cavities; initial detuning compensation results with piezoelectric actuators are also presented.

  20. Application of the remote microphone method to active noise control in a mobile phone.

    Science.gov (United States)

    Cheer, Jordan; Elliott, Stephen J; Oh, Eunmi; Jeong, Jonghoon

    2018-04-01

    Mobile phones are used in a variety of situations where environmental noise may interfere with the ability of the near-end user to communicate with the far-end user. To overcome this problem, it might be possible to use active noise control technology to reduce the noise experienced by the near-end user. This paper initially demonstrates that when an active noise control system is used in a practical mobile phone configuration to minimise the noise measured by an error microphone mounted on the mobile phone, the attenuation achieved at the user's ear depends strongly on the position of the source generating the acoustic interference. To help overcome this problem, a remote microphone processing strategy is investigated that estimates the pressure at the user's ear from the pressure measured by the microphone on the mobile phone. Through an experimental implementation, it is demonstrated that this arrangement achieves a significant improvement in the attenuation measured at the ear of the user, compared to the standard active control strategy. The robustness of the active control system to changes in both the interfering sound field and the position of the mobile device relative to the ear of the user is also investigated experimentally.

  1. Comparisons of spectral characteristics of wind noise between omnidirectional and directional microphones.

    Science.gov (United States)

    Chung, King

    2012-06-01

    Wind noise reduction is a topic of ongoing research and development for hearing aids and cochlear implants. The purposes of this study were to examine spectral characteristics of wind noise generated by directional (DIR) and omnidirectional (OMNI) microphones on different styles of hearing aids and to derive wind noise reduction strategies. Three digital hearing aids (BTE, ITE, and ITC) were fitted to Knowles Electronic Manikin for Acoustic Research. They were programmed to have linear amplification and matching frequency responses between the DIR and OMNI modes. Flow noise recordings were made from 0° to 360° azimuths at flow velocities of 4.5, 9.0, and 13.5 m/s in a quiet wind tunnel. Noise levels were analyzed in one-third octave bands from 100 to 8000 Hz. Comparison of wind noise revealed that DIR generally produced higher noise levels than OMNI for all hearing aids, but it could result in lower levels than OMNI at some frequencies and head angles. Wind noise reduction algorithms can be designed to detect noise levels of DIR and OMNI outputs in each frequency channel, remove the constraint to switch to OMNI in low-frequency channel(s) only, and adopt the microphone mode with lower noise levels to take advantage of the microphone differences.

  2. Mitigating Wind Induced Noise in Outdoor Microphone Signals Using a Singular Spectral Subspace Method

    Directory of Open Access Journals (Sweden)

    Omar Eldwaik

    2018-01-01

    Full Text Available Wind induced noise is one of the major concerns of outdoor acoustic signal acquisition. It affects many field measurement and audio recording scenarios. Filtering such noise is known to be difficult due to its broadband and time varying nature. In this paper, a new method to mitigate wind induced noise in microphone signals is developed. Instead of applying filtering techniques, wind induced noise is statistically separated from wanted signals in a singular spectral subspace. The paper is presented in the context of handling microphone signals acquired outdoor for acoustic sensing and environmental noise monitoring or soundscapes sampling. The method includes two complementary stages, namely decomposition and reconstruction. The first stage decomposes mixed signals in eigen-subspaces, selects and groups the principal components according to their contributions to wind noise and wanted signals in the singular spectrum domain. The second stage reconstructs the signals in the time domain, resulting in the separation of wind noise and wanted signals. Results show that microphone wind noise is separable in the singular spectrum domain evidenced by the weighted correlation. The new method might be generalized to other outdoor sound acquisition applications.

  3. Identification of impact force acting on composite laminated plates using the radiated sound measured with microphones

    Science.gov (United States)

    Atobe, Satoshi; Nonami, Shunsuke; Hu, Ning; Fukunaga, Hisao

    2017-09-01

    Foreign object impact events are serious threats to composite laminates because impact damage leads to significant degradation of the mechanical properties of the structure. Identification of the location and force history of the impact that was applied to the structure can provide useful information for assessing the structural integrity. This study proposes a method for identifying impact forces acting on CFRP (carbon fiber reinforced plastic) laminated plates on the basis of the sound radiated from the impacted structure. Identification of the impact location and force history is performed using the sound pressure measured with microphones. To devise a method for identifying the impact location from the difference in the arrival times of the sound wave detected with the microphones, the propagation path of the sound wave from the impacted point to the sensor is examined. For the identification of the force history, an experimentally constructed transfer matrix is employed to relate the force history to the corresponding sound pressure. To verify the validity of the proposed method, impact tests are conducted by using a CFRP cross-ply laminate as the specimen, and an impulse hammer as the impactor. The experimental results confirm the validity of the present method for identifying the impact location from the arrival time of the sound wave detected with the microphones. Moreover, the results of force history identification show the feasibility of identifying the force history accurately from the measured sound pressure using the experimental transfer matrix.

  4. Comparison of Computational and Experimental Microphone Array Results for an 18%-Scale Aircraft Model

    Science.gov (United States)

    Lockard, David P.; Humphreys, William M.; Khorrami, Mehdi R.; Fares, Ehab; Casalino, Damiano; Ravetta, Patricio A.

    2015-01-01

    An 18%-scale, semi-span model is used as a platform for examining the efficacy of microphone array processing using synthetic data from numerical simulations. Two hybrid RANS/LES codes coupled with Ffowcs Williams-Hawkings solvers are used to calculate 97 microphone signals at the locations of an array employed in the NASA LaRC 14x22 tunnel. Conventional, DAMAS, and CLEAN-SC array processing is applied in an identical fashion to the experimental and computational results for three different configurations involving deploying and retracting the main landing gear and a part span flap. Despite the short time records of the numerical signals, the beamform maps are able to isolate the noise sources, and the appearance of the DAMAS synthetic array maps is generally better than those from the experimental data. The experimental CLEAN-SC maps are similar in quality to those from the simulations indicating that CLEAN-SC may have less sensitivity to background noise. The spectrum obtained from DAMAS processing of synthetic array data is nearly identical to the spectrum of the center microphone of the array, indicating that for this problem array processing of synthetic data does not improve spectral comparisons with experiment. However, the beamform maps do provide an additional means of comparison that can reveal differences that cannot be ascertained from spectra alone.

  5. Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling

    Science.gov (United States)

    Kuenzig, Thomas; Dehé, Alfons; Krumbein, Ulrich; Schrag, Gabriele

    2018-05-01

    Maxing out the technological limits in order to satisfy the customers’ demands and obtain the best performance of micro-devices and-systems is a challenge of today’s manufacturers. Dedicated system simulation is key to investigate the potential of device and system concepts in order to identify the best design w.r.t. the given requirements. We present a tailored, physics-based system-level modeling approach combining lumped with distributed models that provides detailed insight into the device and system operation at low computational expense. The resulting transparent, scalable (i.e. reusable) and modularly composed models explicitly contain the physical dependency on all relevant parameters, thus being well suited for dedicated investigation and optimization of MEMS devices and systems. This is demonstrated for an industrial capacitive silicon microphone. The performance of such microphones is determined by distributed effects like viscous damping and inhomogeneous capacitance variation across the membrane as well as by system-level phenomena like package-induced acoustic effects and the impact of the electronic circuitry for biasing and read-out. The here presented model covers all relevant figures of merit and, thus, enables to evaluate the optimization potential of silicon microphones towards high fidelity applications. This work was carried out at the Technical University of Munich, Chair for Physics of Electrotechnology. Thomas Kuenzig is now with Infineon Technologies AG, Neubiberg.

  6. Speech understanding in noise with an eyeglass hearing aid: asymmetric fitting and the head shadow benefit of anterior microphones.

    Science.gov (United States)

    Mens, Lucas H M

    2011-01-01

    To test speech understanding in noise using array microphones integrated in an eyeglass device and to test if microphones placed anteriorly at the temple provide better directivity than above the pinna. Sentences were presented from the front and uncorrelated noise from 45, 135, 225 and 315°. Fifteen hearing impaired participants with a significant speech discrimination loss were included, as well as 5 normal hearing listeners. The device (Varibel) improved speech understanding in noise compared to most conventional directional devices with a directional benefit of 5.3 dB in the asymmetric fit mode, which was not significantly different from the bilateral fully directional mode (6.3 dB). Anterior microphones outperformed microphones at a conventional position above the pinna by 2.6 dB. By integrating microphones in an eyeglass frame, a long array can be used resulting in a higher directionality index and improved speech understanding in noise. An asymmetric fit did not significantly reduce performance and can be considered to increase acceptance and environmental awareness. Directional microphones at the temple seemed to profit more from the head shadow than above the pinna, better suppressing noise from behind the listener.

  7. Evaluation of Speech Recognition of Cochlear Implant Recipients Using Adaptive, Digital Remote Microphone Technology and a Speech Enhancement Sound Processing Algorithm.

    Science.gov (United States)

    Wolfe, Jace; Morais, Mila; Schafer, Erin; Agrawal, Smita; Koch, Dawn

    2015-05-01

    Cochlear implant recipients often experience difficulty with understanding speech in the presence of noise. Cochlear implant manufacturers have developed sound processing algorithms designed to improve speech recognition in noise, and research has shown these technologies to be effective. Remote microphone technology utilizing adaptive, digital wireless radio transmission has also been shown to provide significant improvement in speech recognition in noise. There are no studies examining the potential improvement in speech recognition in noise when these two technologies are used simultaneously. The goal of this study was to evaluate the potential benefits and limitations associated with the simultaneous use of a sound processing algorithm designed to improve performance in noise (Advanced Bionics ClearVoice) and a remote microphone system that incorporates adaptive, digital wireless radio transmission (Phonak Roger). A two-by-two way repeated measures design was used to examine performance differences obtained without these technologies compared to the use of each technology separately as well as the simultaneous use of both technologies. Eleven Advanced Bionics (AB) cochlear implant recipients, ages 11 to 68 yr. AzBio sentence recognition was measured in quiet and in the presence of classroom noise ranging in level from 50 to 80 dBA in 5-dB steps. Performance was evaluated in four conditions: (1) No ClearVoice and no Roger, (2) ClearVoice enabled without the use of Roger, (3) ClearVoice disabled with Roger enabled, and (4) simultaneous use of ClearVoice and Roger. Speech recognition in quiet was better than speech recognition in noise for all conditions. Use of ClearVoice and Roger each provided significant improvement in speech recognition in noise. The best performance in noise was obtained with the simultaneous use of ClearVoice and Roger. ClearVoice and Roger technology each improves speech recognition in noise, particularly when used at the same time

  8. Implementation of Hybrid Speech Dereverberation Systems and Proposing Dual Microphone Farsi Database in Order to Evaluating Enhancement Systems

    Directory of Open Access Journals (Sweden)

    Farhad Faghani

    2013-01-01

    Full Text Available In various applications, such as speech recognition and automatic teleconferencing, the recorded speech signals may be corrupted by both noise and reverberation. Reverberation causes a noticeable change in speech intelligibility and quality. In this research, firstly reverberation is described. There are some de-reverberation enhancement algorithms that use only one microphone. They mostly use inverse filtering and spectral subtraction as their sub-systems. On the other hand, there are many multi-microphone speech enhancement systems; Delay-and-sum beam former is the most famous amongst them. Moreover, several efficient approaches have been also reported that use linear prediction (LP residual signal, inverse filtering, and phase error. Despite the improvements and benefits gained by the use of several input microphones, considering the tradeoff between these gains and the complexity and computational cost forced by the use of more microphones, many researchers have focused on dual-microphones systems. So, a review on Microphone array signal processing is explained and then an arrangement for two microphones systems is proposed. As we want to evaluate these algorithms for Farsi speech signals, the problem of speech intelligibility assessment has been explained and a Farsi word list for Diagnostic Rhyme Test (DRT is presented.The structure of presented word list is similar to that of English DRT words. In this research, after a brief study of above-mentioned methods, we propose and implement some hybrid techniques to benefit from the advantages of several methods and achieve significant improvement in output signals. It will be shown that the proposed method performs superior to the state-of-the-art dereverberation algorithms.

  9. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    International Nuclear Information System (INIS)

    Belwanshi, Vinod; Topkar, Anita

    2016-01-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  10. Surface-micromachined rotatable member having a low-contact-area hub

    Science.gov (United States)

    Rodgers, M. Steven; Sniegowski, Jeffry J.; Krygowski, Thomas W.

    2003-11-18

    A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

  11. Surface--micromachined rotatable member having a low-contact-area hub

    Science.gov (United States)

    Rodgers, M. Steven; Sniegowski, Jeffry J.

    2002-01-01

    A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

  12. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    Directory of Open Access Journals (Sweden)

    Yu Zhou

    2016-07-01

    Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

  13. Design and Performance of a Focus-Detection System for Use in Laser Micromachining

    Directory of Open Access Journals (Sweden)

    Binh Xuan Cao

    2016-01-01

    Full Text Available We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

  14. Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

    Science.gov (United States)

    Laconte, Jean; Flandre, D.; Raskin, Jean-Pierre

    Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution.

  15. A novel micromachined shadow mask system with self-alignment and gap control capability

    International Nuclear Information System (INIS)

    Hong, Jung Moo; Zou Jun

    2008-01-01

    We present a novel micromachined shadow mask system, which is capable of accurate self-alignment and mask-substrate gap control. The shadow mask system consists of a silicon shadow mask and a silicon carrier wafer with pyramidal cavities fabricated with bulk micromachining. Self-alignment and gap control of the shadow mask and the fabrication substrate can readily be achieved by using matching pairs of pyramidal cavities and steel spheres placed between. The layer-to-layer alignment accuracy of the new shadow mask system has been experimentally characterized and verified using both optical and atomic force microscopic measurements. As an application of this new shadow mask system, an organic thin-film transistor (OTFT) using pentacene as the semiconductor layer has been successfully fabricated and tested

  16. Modelling of micromachining of human tooth enamel by erbium laser radiation

    Energy Technology Data Exchange (ETDEWEB)

    Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

    2014-08-31

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  17. Modelling of micromachining of human tooth enamel by erbium laser radiation

    International Nuclear Information System (INIS)

    Belikov, A V; Skrypnik, A V; Shatilova, K V

    2014-01-01

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  18. Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Directory of Open Access Journals (Sweden)

    M. I. KILANI

    2009-08-01

    Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

  19. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    Science.gov (United States)

    Belwanshi, Vinod; Topkar, Anita

    2016-05-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  20. Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits

    International Nuclear Information System (INIS)

    Kan, J.A. van; Sum, T.C.; Osipowicz, T.; Watt, F.

    2000-01-01

    Proton beam micromachining is a novel direct-write process for the production of three-dimensional (3D) microstructures. A focused beam of MeV protons is scanned in a pre-determined pattern over a suitable resist material (e.g. PMMA or SU-8) and the latent image formed is subsequently developed chemically. In this paper calculations on theoretical resolution limits of proton beam micromachined three-dimensional microstructures are presented. Neglecting the finite beam size, a Monte Carlo ion transport code was used in combination with a theoretical model describing the delta-ray (δ-ray) energy deposition to determine the lateral energy deposition distribution in PMMA resist material. The energy deposition distribution of ion induced secondary electrons (δ-rays) has been parameterized using analytical models. It is assumed that the attainable resolution is limited by a convolution of the spread of the ion beam and energy deposition of the δ-rays

  1. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    OpenAIRE

    Zhou, Yu; Shafai, Cyrus

    2016-01-01

    This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

  2. Sensors and Micromachined Devices for the Automotive and New Markets: The Delphi Delco Electronics MEMS Story.

    Science.gov (United States)

    Logsdon, James

    2002-03-01

    This presentation will provide a brief history of the development of MEMS products and technology, beginning with the manifold absolute pressure sensor in the late seventies through the current variety of Delphi Delco Electronics sensors available today. The technology development of micromachining from uncompensated P plus etch stops to deep reactive ion etching and the technology development of wafer level packaging from electrostatic bonding to glass frit sealing and silicon to silicon direct bonding will be reviewed.

  3. 3D Printed Microtransporters: Compound Micromachines for Spatiotemporally Controlled Delivery of Therapeutic Agents.

    Science.gov (United States)

    Huang, Tian-Yun; Sakar, Mahmut Selman; Mao, Angelo; Petruska, Andrew J; Qiu, Famin; Chen, Xue-Bo; Kennedy, Stephen; Mooney, David; Nelson, Bradley J

    2015-11-01

    Functional compound micromachines are fabricated by a design methodology using 3D direct laser writing and selective physical vapor deposition of magnetic materials. Microtransporters with a wirelessly controlled Archimedes screw pumping mechanism are engineered. Spatiotemporally controlled collection, transport, and delivery of micro particles, as well as magnetic nanohelices inside microfluidic channels are demonstrated. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  4. Advanced characterization of carrier profiles in germanium using micro-machined contact probes

    DEFF Research Database (Denmark)

    Clarysse, T.; Konttinen, M.; Parmentier, B.

    2012-01-01

    of new concepts based on micro machined, closely spaced contact probes (10 μm pitch). When using four probes to perform sheet resistance measurements, a quantitative carrier profile extraction based on the evolution of the sheet resistance versus depth along a beveled surface is obtained. Considering...... the properties of both approaches on Al+ implants in germanium with different anneal treatments....

  5. Effect of Free Stream Turbulence on the Flow-Induced Background Noise of In-Flow Microphones

    Science.gov (United States)

    Allen, Christopher S.; Olson, Lawrence E. (Technical Monitor)

    1998-01-01

    When making noise measurements of sound sources in flow using microphones immersed in an air stream or wind tunnel, the factor limiting the dynamic range of the measurement is, in many cases, the noise caused by the flow over the microphone. To lower this self-noise, and to protect the microphone diaphragm, an aerodynamic microphone forebody is usually mounted on the tip of the omnidirectional microphone. The microphone probe is then pointed into the wind stream. Even with a microphone forebody, however, the self-noise persists, prompting further research in the area of microphone forebody design for flow-induced self-noise reduction. The magnitude and frequency characteristics of in-flow microphone probe self-noise is dependent upon the exterior shape of the probe and on the level of turbulence in the onset flow, among other things. Several recent studies present new designs for microphone forebodies, some showing the forbodies' self-noise characteristics when used in a given facility. However, these self-noise characteristics may change when the probes are used in different facilities. The present paper will present results of an experimental investigation to determine an empirical relationship between flow turbulence and self-noise levels for several microphone forebody shapes as a function of frequency. As a result, the microphone probe self-noise for these probes will be known as a function of freestream turbulence, and knowing the freestream turbulence spectra for a given facility, the probe self-noise can be predicted. Flow-induced microphone self-noise is believed to be related to the freestream. turbulence by three separate mechanisms. The first mechanism is produced by large scale, as compared to the probe size, turbulence which appears to the probe as a variation in the angle of attack of the freestream. flow. This apparent angle of attack variation causes the pressure along the probe surface to fluctuate, and at the location of the sensor orifice this

  6. Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

    Directory of Open Access Journals (Sweden)

    Hing Wah LEE

    2009-03-01

    Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

  7. A wafer mapping technique for residual stress in surface micromachined films

    International Nuclear Information System (INIS)

    Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

    2016-01-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

  8. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  9. Experimental and Modeling Study of Liquid-Assisted—Laser Beam Micromachining of Smart Ceramic Materials

    Directory of Open Access Journals (Sweden)

    Mayur Parmar

    2018-05-01

    Full Text Available Smart ceramic materials are next generation materials with the inherent intelligence to adapt to change in the external environment. These materials are destined to play an essential role in several critical engineering applications. Machining these materials using traditional machining processes is a challenge. The laser beam micromachining (LBMM process has the potential to machine such smart materials. However, laser machining when performed in air induces high thermal stress on the surface, often leading to crack formation, recast and re-deposition of ablated material, and large heat-affected zones (HAZ. Performing laser beam machining in the presence of a liquid medium could potentially resolve these issues. This research investigates the possibility of using a Liquid Assisted—Laser Beam Micromachining (LA-LBMM process for micromachining smart ceramic materials. Experimental studies are performed to compare the machining quality of laser beam machining process in air and in a liquid medium. The study reveals that the presence of liquid medium helps in controlling the heat-affected zone and the taper angle of the cavity drilled, thereby enhancing the machining quality. Analytical modeling is developed for the prediction of HAZ and cavity diameter both in air and underwater conditions, and the model is capable of predicting the experimental results to within 10% error.

  10. An in-pipe mobile micromachine using fluid power. A mechanism adaptable to pipe diameters

    International Nuclear Information System (INIS)

    Yoshida, Kazuhiro; Yokota, Shinichi; Takahashi, Ken

    2000-01-01

    To realize micro maintenance robots for small diameter pipes of nuclear reactors and so on, high power in-pipe mobile micromachines have been required. The authors have proposed the bellows microactuator using fluid power and have tried to apply the actuators to in-pipe mobile micromachines. In the previous papers, some inchworm mobile machine prototypes with 25 mm in diameter are fabricated and the traveling performances are experimentally investigated. In this paper, to miniaturize the in-pipe mobile machine and to make it adaptable to pipe diameters, firstly, a simple rubber-tube actuator constrained with a coil-spring is proposed and the static characteristics are investigated. Secondly, a supporting mechanism which utilizes a toggle mechanism and is adaptable to pipe diameters is proposed and the supporting forces are investigated. Finally, an in-pipe mobile micromachine for pipe with 4 - 5 mm in diameter is fabricated and the maximum traveling velocity of 7 mm/s in both ahead and astern movements is experimentally verified. (author)

  11. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2015-11-01

    Full Text Available The study investigates the design and fabrication of a micromachined radio frequency (RF capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW lines. In order to reduce the actuation voltage of the switch, the springs are designed as low stiffness. The finite element method (FEM software CoventorWare is used to simulate the actuation voltage and displacement of the switch. The micromachined switch needs a post-CMOS process to release the springs and membrane. A wet etching is employed to etch the sacrificial silicon dioxide layer, and to release the membrane and springs of the switch. Experiments show that the pull-in voltage of the switch is 12 V. The switch has an insertion loss of 0.8 dB at 36 GHz and an isolation of 19 dB at 36 GHz.

  12. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  13. Analysis of jet-airfoil interaction noise sources by using a microphone array technique

    Science.gov (United States)

    Fleury, Vincent; Davy, Renaud

    2016-03-01

    The paper is concerned with the characterization of jet noise sources and jet-airfoil interaction sources by using microphone array data. The measurements were carried-out in the anechoic open test section wind tunnel of Onera, Cepra19. The microphone array technique relies on the convected, Lighthill's and Ffowcs-Williams and Hawkings' acoustic analogy equation. The cross-spectrum of the source term of the analogy equation is sought. It is defined as the optimal solution to a minimal error equation using the measured microphone cross-spectra as reference. This inverse problem is ill-posed yet. A penalty term based on a localization operator is therefore added to improve the recovery of jet noise sources. The analysis of isolated jet noise data in subsonic regime shows the contribution of the conventional mixing noise source in the low frequency range, as expected, and of uniformly distributed, uncorrelated noise sources in the jet flow at higher frequencies. In underexpanded supersonic regime, a shock-associated noise source is clearly identified, too. An additional source is detected in the vicinity of the nozzle exit both in supersonic and subsonic regimes. In the presence of the airfoil, the distribution of the noise sources is deeply modified. In particular, a strong noise source is localized on the flap. For high Strouhal numbers, higher than about 2 (based on the jet mixing velocity and diameter), a significant contribution from the shear-layer near the flap is observed, too. Indications of acoustic reflections on the airfoil are also discerned.

  14. Imaging of heart acoustic based on the sub-space methods using a microphone array.

    Science.gov (United States)

    Moghaddasi, Hanie; Almasganj, Farshad; Zoroufian, Arezoo

    2017-07-01

    Heart disease is one of the leading causes of death around the world. Phonocardiogram (PCG) is an important bio-signal which represents the acoustic activity of heart, typically without any spatiotemporal information of the involved acoustic sources. The aim of this study is to analyze the PCG by employing a microphone array by which the heart internal sound sources could be localized, too. In this paper, it is intended to propose a modality by which the locations of the active sources in the heart could also be investigated, during a cardiac cycle. In this way, a microphone array with six microphones is employed as the recording set up to be put on the human chest. In the following, the Group Delay MUSIC algorithm which is a sub-space based localization method is used to estimate the location of the heart sources in different phases of the PCG. We achieved to 0.14cm mean error for the sources of first heart sound (S 1 ) simulator and 0.21cm mean error for the sources of second heart sound (S 2 ) simulator with Group Delay MUSIC algorithm. The acoustical diagrams created for human subjects show distinct patterns in various phases of the cardiac cycles such as the first and second heart sounds. Moreover, the evaluated source locations for the heart valves are matched with the ones that are obtained via the 4-dimensional (4D) echocardiography applied, to a real human case. Imaging of heart acoustic map presents a new outlook to indicate the acoustic properties of cardiovascular system and disorders of valves and thereby, in the future, could be used as a new diagnostic tool. Copyright © 2017. Published by Elsevier B.V.

  15. High-Resolution Time-Frequency Spectrum-Based Lung Function Test from a Smartphone Microphone

    Directory of Open Access Journals (Sweden)

    Tharoeun Thap

    2016-08-01

    Full Text Available In this paper, a smartphone-based lung function test, developed to estimate lung function parameters using a high-resolution time-frequency spectrum from a smartphone built-in microphone is presented. A method of estimation of the forced expiratory volume in 1 s divided by forced vital capacity (FEV1/FVC based on the variable frequency complex demodulation method (VFCDM is first proposed. We evaluated our proposed method on 26 subjects, including 13 healthy subjects and 13 chronic obstructive pulmonary disease (COPD patients, by comparing with the parameters clinically obtained from pulmonary function tests (PFTs. For the healthy subjects, we found that an absolute error (AE and a root mean squared error (RMSE of the FEV1/FVC ratio were 4.49% ± 3.38% and 5.54%, respectively. For the COPD patients, we found that AE and RMSE from COPD patients were 10.30% ± 10.59% and 14.48%, respectively. For both groups, we compared the results using the continuous wavelet transform (CWT and short-time Fourier transform (STFT, and found that VFCDM was superior to CWT and STFT. Further, to estimate other parameters, including forced vital capacity (FVC, forced expiratory volume in 1 s (FEV1, and peak expiratory flow (PEF, regression analysis was conducted to establish a linear transformation. However, the parameters FVC, FEV1, and PEF had correlation factor r values of 0.323, 0.275, and −0.257, respectively, while FEV1/FVC had an r value of 0.814. The results obtained suggest that only the FEV1/FVC ratio can be accurately estimated from a smartphone built-in microphone. The other parameters, including FVC, FEV1, and PEF, were subjective and dependent on the subject’s familiarization with the test and performance of forced exhalation toward the microphone.

  16. Fiscal 1997 report on technological results. R and D on micromachine technology; 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are 1. research on micromachine systems and 2. comprehensive investigation and research. In 1, (1) a micro catheter and (2) a micro tactile sensor catheter were studied while, in 2, basic technology and technological problems, particularly those problems concerning sophistication in the medical field were examined and studied. Further, in (1), with the purpose of developing a micro laser catheter for diagnosis/treatment, researches were implemented on the technology of integrating micro laser and an optical fiber which were components of the catheter and on the fabrication of the fine diameter of a micro catheter as well as on the characteristical improvement of the base body on which minute elements were mounted. In (2), characteristical improvement and sophistication were carried out for a high sensitivity contact pressure sensor and a diagnostic tactile sensor, which are mounted on a catheter having a positive bulge control mechanism for insertion into body cavity, with a sensor probe manufactured experimentally. (NEDO)

  17. Pseudo-Coherence-Based MVDR Beamformer for Speech Enhancement with Ad Hoc Microphone Arrays

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Christensen, Mads Græsbøll

    2015-01-01

    Speech enhancement with distributed arrays has been met with various methods. On the one hand, data independent methods require information about the position of sensors, so they are not suitable for dynamic geometries. On the other hand, Wiener-based methods cannot assure a distortionless output....... This paper proposes minimum variance distortionless response filtering based on multichannel pseudo-coherence for speech enhancement with ad hoc microphone arrays. This method requires neither position information nor control of the trade-off used in the distortion weighted methods. Furthermore, certain...

  18. Localisation d'une source sonore par un réseau de microphones

    OpenAIRE

    Thaljaoui , Adel; Brulin , Damien; Val , Thierry; Nasri , Nejah

    2014-01-01

    National audience; L'assistance à domicile d'une personne âgée, notamment la connaissance de sa position géographique en tout instant, est devenue actuellement l'une des problématiques les plus urgentes. L'exploitation de l'information audio captée par un réseau de capteurs munis de microphones constitue un axe de recherche prometteur qui pourrait contribuer à une meilleure localisation dans le cadre des maisons intelligentes. Nous introduisons, dans cet article, nos premiers travaux sur la l...

  19. Comparison of Multiple-Microphone and Single-Loudspeaker Adaptive Feedback/Echo Cancellation Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt

    2011-01-01

    Recently, we introduced a frequency domain measure - the power transfer function - to predict the convergence rate, system stability bound and the steady-state behavior across time and frequency of a least mean square based feedback/echo cancellation algorithm in a general multiple-microphone and......Recently, we introduced a frequency domain measure - the power transfer function - to predict the convergence rate, system stability bound and the steady-state behavior across time and frequency of a least mean square based feedback/echo cancellation algorithm in a general multiple...

  20. On Acoustic Feedback Cancellation Using Probe Noise in Multiple-Microphone and Single-Loudspeaker Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt

    2012-01-01

    of the adaptive estimation is significantly decreased when keeping the steady-state error unchanged. The goal of this work is to derive analytic expressions for the system behavior such as convergence rate and steady-state error for a multiple-microphone and single-loudspeaker audio system, where the acoustic...... feedback cancellation is carried out using a probe noise signal. The derived results show how different system parameters and signal properties affect the cancellation performance, and the results explain theoretically the decreased convergence rate. Understanding this is important for making further...

  1. Low-Level RF Control of Microphonics in Superconducting Spoke-Loaded Cavities

    International Nuclear Information System (INIS)

    Conway, Z.A.; Kelly, M.P.; Sharamentov, S.I.; Shepard, K.W.; Davis, G.; Delayen, Jean; Doolittle, Lawrence

    2007-01-01

    This paper presents the results of cw RF frequency control and RF phase-stabilization experiments performed with a piezoelectric fast tuner mechanically coupled to a superconducting, 345 MHz, < = 0.5 triple-spoke-loaded cavity operating at 4.2K. The piezoelectric fast tuner damped low-frequency microphonic-noise by an order of magnitude. Two methods of RF phase-stabilization were characterized: overcoupling with negative phase feedback, and also fast mechanical tuner feedback. The = 0.5 triple-spoke-loaded cavity RF field amplitude and phase errors were controlled to ±0.5% and ±30 respectively.

  2. Efficient voice activity detection in reverberant enclosures using far field microphones

    DEFF Research Database (Denmark)

    Petsatodis, Theodore; Boukis, Christos

    2009-01-01

    An algorithm suitable for voice activity detection under reverberant conditions is proposed in this paper. Due to the use of far-filed microphones the proposed solution processes speech signals of highly-varying intensity and signal to noise ratio, that are contaminated with several echoes....... The core of the system is a pair of Hidden Markov Models, that effectively model the speech presence and speech absence situations. To minimise mis-detections an adaptive threshold is used, while a hang-over scheme caters for the intra-frame correlation of speech signals. Experimental results conducted...

  3. A Partitioned Approach to Signal Separation with Microphone Ad Hoc Arrays

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Benesty, Jacob

    2016-01-01

    In this paper, a blind algorithm is proposed for speech enhancement in multi-speaker scenarios, in which interference rejection is the main objective. Here, the ad hoc array is broken into microphone duples which are used to partition the array into local sub-arrays. The core algorithm takes...... advantage of differences in signal structure in each duple. A geometric mean filter is then used to merge the output signals obtained with different duples, and to form a global broadband maximum signal-to-interference ratio (SIR) enhancement apparatus. The resulting filter outputs are enhanced acoustic...

  4. Near field acoustic holography with microphones mounted on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Moreno, Guillermo; Fernandez Grande, Efren

    2008-01-01

    Spherical near field acoustic holography (spherical NAH) is a technique that makes it pos-sible to reconstruct the sound field inside and just outside an acoustically transparent spherical surface on which the sound pressure is measured with an array of microphones with negligible scattering...... is only valid if it can be assumed that the sphere has a negligible in-fluence on the incident sound field, and this is not necessarily a good assumption when the sphere is very close to a radiating surface. This paper describes the modified spherical NAH theory and examines the matter through simulations...

  5. A low-voltage silicon condenser microphone for hearing instrument applications

    DEFF Research Database (Denmark)

    Rombach, Pirmin; Müllenborn, Matthias; Klein, Udo

    1999-01-01

    the input-related noise of the following preamplifier stage becomes dominant and results in a high equivalent input-related noise. Here a silicon condenser microphone with the potential for hearing instrument applications will be presented. To get the best properties for the different mechanical parts, e...... related A-weighted noise is 23 dB SPL, including the preamplifier. Due to a conservative layout, the parasitic capacitance is about 50%. An increase of 2–3 mV/Pa sensitivity and hence 3 dB SPL less noise can therefore be achieved by design optimization....

  6. Assessment of Microphone Phased Array for Measuring Launch Vehicle Lift-off Acoustics

    Science.gov (United States)

    Garcia, Roberto

    2012-01-01

    The specific purpose of the present work was to demonstrate the suitability of a microphone phased array for launch acoustics applications via participation in selected firings of the Ares I Scale Model Acoustics Test. The Ares I Scale Model Acoustics Test is a part of the discontinued Constellation Program Ares I Project, but the basic understanding gained from this test is expected to help development of the Space Launch System vehicles. Correct identification of sources not only improves the predictive ability, but provides guidance for a quieter design of the launch pad and optimization of the water suppression system. This document contains the results of the NASA Engineering and Safety Center assessment.

  7. Periphony-Lattice Mixed-Order Ambisonic Scheme for Spherical Microphone Arrays

    DEFF Research Database (Denmark)

    Chang, Jiho; Marschall, Marton

    2018-01-01

    to performance that is independent of the incident direction of the sound waves. On the other hand, mixed-order ambisonic (MOA) schemes that select an appropriate subset of spherical harmonics can improve the performance for horizontal directions at the expense of other directions. This paper proposes an MOA......Most methods for sound field reconstruction and spherical beamforming with spherical microphone arrays are mathematically based on the spherical harmonics expansion. In many cases, this expansion is truncated at a certain order as in higher order ambisonics (HOA). This truncation leads...

  8. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  9. Characterization of condenser microphones under different environmental conditions for accurate speed of sound measurements with acoustic resonators

    Energy Technology Data Exchange (ETDEWEB)

    Guianvarc' h, Cecile; Pitre, Laurent [Laboratoire Commun de Metrologie LNE/Cnam, 61 rue du Landy, 93210 La Plaine Saint Denis (France); Gavioso, Roberto M.; Benedetto, Giuliana [Istituto Nazionale di Ricerca Metrologica, Strada delle Cacce 91, 10135 Turin (Italy); Bruneau, Michel [Laboratoire d' Acoustique de l' Universite du Maine UMR CNRS 6613, av. Olivier Messiaen, 72085 Le Mans Cedex 9 (France)

    2009-07-15

    Condenser microphones are more commonly used and have been extensively modeled and characterized in air at ambient temperature and static pressure. However, several applications of interest for metrology and physical acoustics require to use these transducers in significantly different environmental conditions. Particularly, the extremely accurate determination of the speed of sound in monoatomic gases, which is pursued for a determination of the Boltzmann constant k by an acoustic method, entails the use of condenser microphones mounted within a spherical cavity, over a wide range of static pressures, at the temperature of the triple point of water (273.16 K). To further increase the accuracy achievable in this application, the microphone frequency response and its acoustic input impedance need to be precisely determined over the same static pressure and temperature range. Few previous works examined the influence of static pressure, temperature, and gas composition on the microphone's sensitivity. In this work, the results of relative calibrations of 1/4 in. condenser microphones obtained using an electrostatic actuator technique are presented. The calibrations are performed in pure helium and argon gas at temperatures near 273 K and in the pressure range between 10 and 600 kPa. These experimental results are compared with the predictions of a realistic model available in the literature, finding a remarkable good agreement. The model provides an estimate of the acoustic impedance of 1/4 in. condenser microphones as a function of frequency and static pressure and is used to calculate the corresponding frequency perturbations induced on the normal modes of a spherical cavity when this is filled with helium or argon gas.

  10. Estimation of Temporal Gait Parameters Using a Wearable Microphone-Sensor-Based System

    Directory of Open Access Journals (Sweden)

    Cheng Wang

    2016-12-01

    Full Text Available Most existing wearable gait analysis methods focus on the analysis of data obtained from inertial sensors. This paper proposes a novel, low-cost, wireless and wearable gait analysis system which uses microphone sensors to collect footstep sound signals during walking. This is the first time a microphone sensor is used as a wearable gait analysis device as far as we know. Based on this system, a gait analysis algorithm for estimating the temporal parameters of gait is presented. The algorithm fully uses the fusion of two feet footstep sound signals and includes three stages: footstep detection, heel-strike event and toe-on event detection, and calculation of gait temporal parameters. Experimental results show that with a total of 240 data sequences and 1732 steps collected using three different gait data collection strategies from 15 healthy subjects, the proposed system achieves an average 0.955 F1-measure for footstep detection, an average 94.52% accuracy rate for heel-strike detection and 94.25% accuracy rate for toe-on detection. Using these detection results, nine temporal related gait parameters are calculated and these parameters are consistent with their corresponding normal gait temporal parameters and labeled data calculation results. The results verify the effectiveness of our proposed system and algorithm for temporal gait parameter estimation.

  11. Broadband implementation of coprime linear microphone arrays for direction of arrival estimation.

    Science.gov (United States)

    Bush, Dane; Xiang, Ning

    2015-07-01

    Coprime arrays represent a form of sparse sensing which can achieve narrow beams using relatively few elements, exceeding the spatial Nyquist sampling limit. The purpose of this paper is to expand on and experimentally validate coprime array theory in an acoustic implementation. Two nested sparse uniform linear subarrays with coprime number of elements ( M and N) each produce grating lobes that overlap with one another completely in just one direction. When the subarray outputs are combined it is possible to retain the shared beam while mostly canceling the other superfluous grating lobes. In this way a small number of microphones ( N+M-1) creates a narrow beam at higher frequencies, comparable to a densely populated uniform linear array of MN microphones. In this work beampatterns are simulated for a range of single frequencies, as well as bands of frequencies. Narrowband experimental beampatterns are shown to correspond with simulated results even at frequencies other than the arrays design frequency. Narrowband side lobe locations are shown to correspond to the theoretical values. Side lobes in the directional pattern are mitigated by increasing bandwidth of analyzed signals. Direction of arrival estimation is also implemented for two simultaneous noise sources in a free field condition.

  12. Microphone triggering circuit for elimination of mechanically induced frequency-jitter in diode laser spectrometers: implications for quantitative analysis.

    Science.gov (United States)

    Sams, R L; Fried, A

    1987-09-01

    An electronic timing circuit using a microphone triggering device has been developed for elimination of mechanically induced frequency-jitter in diode laser spectrometers employing closed-cycle refrigerators. Mechanical compressor piston shocks are detected by the microphone and actuate an electronic circuit which ultimately interrupts data acquisition until the mechanical vibrations are completely quenched. In this way, laser sweeps contaminated by compressor frequency-jitter are not co-averaged. Employing this circuit, measured linewidths were in better agreement with that calculated. The importance of eliminating this mechanically induced frequency-jitter when carrying out quantitative diode laser measurements is further discussed.

  13. Light Dependent Resistance as a Sensor in Spectroscopy Setups Using Pulsed Light and Compared with Electret Microphones

    Directory of Open Access Journals (Sweden)

    Daniel Acosta-Avalos

    2006-05-01

    Full Text Available Light-dependent resistances (LDR are cheap light sensors. A less known lightdetector is the electret microphone, whose electret membrane functions as a perfectabsorber, but only detects pulsed light. The aim of this study was to analyze the use of aLDR and an electret microphone as a light sensor in an optical spectroscopy system usingpulsed light. A photoacoustic spectroscopy setup was used, substituting the photoacousticchamber by the light sensor proposed. The absorption spectra of two different liquids wereanalyzed. The results obtained allow the recommendation of the LDR as the first choice inthe construction of cheap homemade pulsed light spectroscopy systems.

  14. FY1995 development of micromachine technology based on insects; 1995 nendo konchu wo kihan to suru micromachine gijutsu no kakuritsu to jitsuyoka

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    If we develop micromachines by reducing simply the size of conventional mechanical systems, we cannot get sufficient performances of them because of scale-effect. Small natural creatures, insects, have very good structures and functions reasonable for their small size. In this research, basic characteristics of sensors, actuators, information processing functions, etc. of insects are studied and artificial systems similar to them are developed for industrial application. (1) Compound eyes: Insect compound eyes is the visual sensor which is composed of microlenses which are distributed three-dimensionally, receptors which vibrate with small amplitude around an optical axis and neural networks. In this research, the large scale model (several centimeters sized) of insect compound eyes has been developed. (2) Pheromone sensor: Pheromone gas sensor has been made of real male silkworm moth antenae. This sensor has been proved to work well as the female pheromone detector. This sensor was installed at the nose part of a wheeled mobile robot and this robot was observed to act like a real silkworm moth subjected to female pheromone stream. (3) Electrostatic microactuator: Generally speaking, high voltage(higher than 100V) electric power is necessary to actuate the electrostatic actuator. It was considered to be impossible to actuate them directly from CMOS. In this research, a new electrostatic actuator which can be actuated with less than 10V voltage can cause a fairly large displacement. (4) Hydraulic actuator: For micromachines, hydraulic pressure will be applicable for actuation. Structures may be simple and scale effect may give an advantageous characteristics for microsize. A butterfly-type flying robot was developed and it flied up along a vertical bar. (NEDO)

  15. The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

    Science.gov (United States)

    Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

    2007-02-01

    The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

  16. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    International Nuclear Information System (INIS)

    Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B

    2015-01-01

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

  17. Practically Efficient Blind Speech Separation Using Frequency Band Selection Based on Magnitude Squared Coherence and a Small Dodecahedral Microphone Array

    Directory of Open Access Journals (Sweden)

    Kazunobu Kondo

    2012-01-01

    Full Text Available Small agglomerative microphone array systems have been proposed for use with speech communication and recognition systems. Blind source separation methods based on frequency domain independent component analysis have shown significant separation performance, and the microphone arrays are small enough to make them portable. However, the level of computational complexity involved is very high because the conventional signal collection and processing method uses 60 microphones. In this paper, we propose a band selection method based on magnitude squared coherence. Frequency bands are selected based on the spatial and geometric characteristics of the microphone array device which is strongly related to the dodecahedral shape, and the selected bands are nonuniformly spaced. The estimated reduction in the computational complexity is 90% with a 68% reduction in the number of frequency bands. Separation performance achieved during our experimental evaluation was 7.45 (dB (signal-to-noise ratio and 2.30 (dB (cepstral distortion. These results show improvement in performance compared to the use of uniformly spaced frequency band.

  18. FILTWAM - A Framework for Online Game-based Communication Skills Training - Using Webcams and Microphones for Enhancing Learner Support

    NARCIS (Netherlands)

    Bahreini, Kiavash; Nadolski, Rob; Qi, Wen; Westera, Wim

    2012-01-01

    Bahreini, K., Nadolski, R., Qi, W., & Westera, W. (2012). FILTWAM - A Framework for Online Game-based Communication Skills Training - Using Webcams and Microphones for Enhancing Learner Support. In P. Felicia (Ed.), The 6th European Conference on Games Based Learning - ECGBL 2012 (pp. 39-48). Cork,

  19. Leak detection in the primary reactor coolant piping of nuclear power plant by applying beam-microphone technology

    International Nuclear Information System (INIS)

    Kasai, Yoshimitsu; Shimanskiy, Sergey; Naoi, Yosuke; Kanazawa, Junichi

    2004-01-01

    A microphone leak detection method was applied to the inlet piping of the ATR-prototype reactor, Fugen. Statistical analysis results showed that the cross-correlation method provided the effective results for detection of a small leakage. However, such a technique has limited application due to significant distortion of the signals on the reactor site. As one of the alternative methods, the beam-microphone provides necessary spatial selectivity and its performance is less affected by signal distortion. A prototype of the beam-microphone was developed and then tested at the O-arai Engineering Center of the Japan Nuclear Cycle Development Institute (JNC). On-site testing of the beam-microphone was carried out in the inlet piping room of an RBMK reactor of the Leningrad Nuclear Power Plant (LNPP) in Russia. A leak sound imitator was used to simulate the leakage sound under the leakage flow condition of 1-3 gpm (0.23-0.7 m 3 /h). Analysis showed that signal distortion does not seriously affect the performance of this method, and that sound reflection may result in the appearance of ghost sound sources. The test results showed that the influences of sound reflection and background noise were smaller at the high frequencies where the leakage location could be estimated with an angular accuracy of 5deg which is the range of localization accuracy required for the leak detection system. (author)

  20. Calibration of the pressure sensitivity of microphones by a free-field method at frequencies up to 80 khz.

    Science.gov (United States)

    Zuckerwar, Allan J; Herring, G C; Elbing, Brian R

    2006-01-01

    A free-field (FF) substitution method for calibrating the pressure sensitivity of microphones at frequencies up to 80 kHz is demonstrated with both grazing and normal-incidence geometries. The substitution-based method, as opposed to a simultaneous method, avoids problems associated with the nonuniformity of the sound field and, as applied here, uses a 1/4-in. air-condenser pressure microphone as a known reference. Best results were obtained with a centrifugal fan, which is used as a random, broadband sound source. A broadband source minimizes reflection-related interferences that can plague FF measurements. Calibrations were performed on 1/4-in. FF air-condenser, electret, and microelectromechanical systems (MEMS) microphones in an anechoic chamber. The uncertainty of this FF method is estimated by comparing the pressure sensitivity of an air-condenser FF microphone, as derived from the FF measurement, with that of an electrostatic actuator calibration. The root-mean-square difference is found to be +/- 0.3 dB over the range 1-80 kHz, and the combined standard uncertainty of the FF method, including other significant contributions, is +/- 0.41 dB.

  1. High frequency microphone measurements for transition detection on airfoils. Risø C2-18 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given to tran...

  2. High frequency microphone measurements for transition detection on airfoils. Risø B1-18 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given to tran...

  3. Project: Micromachined High-Frequency Circuits For Sub-mm-wave Sensors

    Science.gov (United States)

    Papapolymerou, Ioannis John

    2004-01-01

    A novel micromachined resonator at 45 GHz based on a defect in a periodic electromagnetic bandgap structure (EBG) and a two-pole Tchebysbev filter with 1.4% 0.15 dB equiripple bandwidth and 2.3 dB loss employing this resonator are presented in this letter. The periodic bandgap structure is realized on a 400 micron thick high-resistivity silicon wafer using deep reactive ion etching techniques. The resonator and filter can be accessed via coplanar waveguide feeds.

  4. A novel hybrid surface micromachined segmented mirror for large aperture laser applications

    Science.gov (United States)

    Li, Jie; Chen, Haiqing; Yu, Hongbin

    2006-07-01

    A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

  5. Channeling-based collimators for generation of microbeams produced by silicon micromachining technology

    International Nuclear Information System (INIS)

    Guidi, V.; Antonini, A.; Milan, E.; Ronzoni, A.; Martinelli, G.; Biryukov, V.M.; Chesnokov, Yu.A.

    2006-01-01

    The growing interest on micro-beams in recent years and the combined development of channeling technology in high-energy physics have opened the way to new concepts for micro-beams devices. Silicon micromachining technology is here applied to manufacture micro-collimators in inexpensive and feasible ways. Both dry and wet etchings can be employed for the purpose, though the latter technique appears to be cheaper and easier. Two designs for micro-collimator devices have been considered and preliminary samples have been produced accordingly

  6. The effect of different cochlear implant microphones on acoustic hearing individuals’ binaural benefits for speech perception in noise

    Science.gov (United States)

    Aronoff, Justin M.; Freed, Daniel J.; Fisher, Laurel M.; Pal, Ivan; Soli, Sigfrid D.

    2011-01-01

    Objectives Cochlear implant microphones differ in placement, frequency response, and other characteristics such as whether they are directional. Although normal hearing individuals are often used as controls in studies examining cochlear implant users’ binaural benefits, the considerable differences across cochlear implant microphones make such comparisons potentially misleading. The goal of this study was to examine binaural benefits for speech perception in noise for normal hearing individuals using stimuli processed by head-related transfer functions (HRTFs) based on the different cochlear implant microphones. Design HRTFs were created for different cochlear implant microphones and used to test participants on the Hearing in Noise Test. Experiment 1 tested cochlear implant users and normal hearing individuals with HRTF-processed stimuli and with sound field testing to determine whether the HRTFs adequately simulated sound field testing. Experiment 2 determined the measurement error and performance-intensity function for the Hearing in Noise Test with normal hearing individuals listening to stimuli processed with the various HRTFs. Experiment 3 compared normal hearing listeners’ performance across HRTFs to determine how the HRTFs affected performance. Experiment 4 evaluated binaural benefits for normal hearing listeners using the various HRTFs, including ones that were modified to investigate the contributions of interaural time and level cues. Results The results indicated that the HRTFs adequately simulated sound field testing for the Hearing in Noise Test. They also demonstrated that the test-retest reliability and performance-intensity function were consistent across HRTFs, and that the measurement error for the test was 1.3 dB, with a change in signal-to-noise ratio of 1 dB reflecting a 10% change in intelligibility. There were significant differences in performance when using the various HRTFs, with particularly good thresholds for the HRTF based on the

  7. Nickel silicide thin films as masking and structural layers for silicon bulk micro-machining by potassium hydroxide wet etching

    International Nuclear Information System (INIS)

    Bhaskaran, M; Sriram, S; Sim, L W

    2008-01-01

    This paper studies the feasibility of using titanium and nickel silicide thin films as mask materials for silicon bulk micro-machining. Thin films of nickel silicide were found to be more resistant to wet etching in potassium hydroxide. The use of nickel silicide as a structural material, by fabricating micro-beams of varying dimensions, is demonstrated. The micro-structures were realized using these thin films with wet etching using potassium hydroxide solution on (1 0 0) and (1 1 0) silicon substrates. These results show that nickel silicide is a suitable alternative to silicon nitride for silicon bulk micro-machining

  8. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  9. A Novel Vibration Mode Testing Method for Cylindrical Resonators Based on Microphones

    Directory of Open Access Journals (Sweden)

    Yongmeng Zhang

    2015-01-01

    Full Text Available Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes.

  10. Estimation of Road Vehicle Speed Using Two Omnidirectional Microphones: A Maximum Likelihood Approach

    Directory of Open Access Journals (Sweden)

    López-Valcarce Roberto

    2004-01-01

    Full Text Available We address the problem of estimating the speed of a road vehicle from its acoustic signature, recorded by a pair of omnidirectional microphones located next to the road. This choice of sensors is motivated by their nonintrusive nature as well as low installation and maintenance costs. A novel estimation technique is proposed, which is based on the maximum likelihood principle. It directly estimates car speed without any assumptions on the acoustic signal emitted by the vehicle. This has the advantages of bypassing troublesome intermediate delay estimation steps as well as eliminating the need for an accurate yet general enough acoustic traffic model. An analysis of the estimate for narrowband and broadband sources is provided and verified with computer simulations. The estimation algorithm uses a bank of modified crosscorrelators and therefore it is well suited to DSP implementation, performing well with preliminary field data.

  11. Deconvolution for the localization of sound sources using a circular microphone array

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn

    2013-01-01

    During the last decade, the aeroacoustic community has examined various methods based on deconvolution to improve the visualization of acoustic fields scanned with planar sparse arrays of microphones. These methods assume that the beamforming map in an observation plane can be approximated by a c......-negative least squares, and the Richardson-Lucy. This investigation examines the matter with computer simulations and measurements....... that the beamformer's point-spread function is shift-invariant. This makes it possible to apply computationally efficient deconvolution algorithms that consist of spectral procedures in the entire region of interest, such as the deconvolution approach for the mapping of the acoustic sources 2, the Fourier-based non...

  12. Infrastructure-Less Indoor Localization Using the Microphone, Magnetometer and Light Sensor of a Smartphone.

    Science.gov (United States)

    Galván-Tejada, Carlos E; García-Vázquez, Juan Pablo; Galván-Tejada, Jorge I; Delgado-Contreras, J Rubén; Brena, Ramon F

    2015-08-18

    In this paper, we present the development of an infrastructure-less indoor location system (ILS), which relies on the use of a microphone, a magnetometer and a light sensor of a smartphone, all three of which are essentially passive sensors, relying on signals available practically in any building in the world, no matter how developed the region is. In our work, we merge the information from those sensors to estimate the user's location in an indoor environment. A multivariate model is applied to find the user's location, and we evaluate the quality of the resulting model in terms of sensitivity and specificity. Our experiments were carried out in an office environment during summer and winter, to take into account changes in light patterns, as well as changes in the Earth's magnetic field irregularities. The experimental results clearly show the benefits of using the information fusion of multiple sensors when contrasted with the use of a single source of information.

  13. Design of an Acoustic Target Intrusion Detection System Based on Small-Aperture Microphone Array

    Science.gov (United States)

    Zu, Xingshui; Guo, Feng; Huang, Jingchang; Zhao, Qin; Liu, Huawei; Li, Baoqing; Yuan, Xiaobing

    2017-01-01

    Automated surveillance of remote locations in a wireless sensor network is dominated by the detection algorithm because actual intrusions in such locations are a rare event. Therefore, a detection method with low power consumption is crucial for persistent surveillance to ensure longevity of the sensor networks. A simple and effective two-stage algorithm composed of energy detector (ED) and delay detector (DD) with all its operations in time-domain using small-aperture microphone array (SAMA) is proposed. The algorithm analyzes the quite different velocities between wind noise and sound waves to improve the detection capability of ED in the surveillance area. Experiments in four different fields with three types of vehicles show that the algorithm is robust to wind noise and the probability of detection and false alarm are 96.67% and 2.857%, respectively. PMID:28273838

  14. In situ Probe Microphone Measurement for Testing the Direct Acoustical Cochlear Stimulator

    Directory of Open Access Journals (Sweden)

    Christof Stieger

    2017-08-01

    Full Text Available Hypothesis: Acoustical measurements can be used for functional control of a direct acoustic cochlear stimulator (DACS.Background: The DACS is a recently released active hearing implant that works on the principle of a conventional piston prosthesis driven by the rod of an electromagnetic actuator. An inherent part of the DACS actuator is a thin titanium diaphragm that allows for movement of the stimulation rod while hermetically sealing the housing. In addition to mechanical stimulation, the actuator emits sound into the mastoid cavity because of the motion of the diaphragm.Methods: We investigated the use of the sound emission of a DACS for intra-operative testing. We measured sound emission in the external auditory canal (PEAC and velocity of the actuators stimulation rod (Vact in five implanted ears of whole-head specimens. We tested the influence various positions of the loudspeaker and a probe microphone on PEAC and simulated implant malfunction in one example.Results: Sound emission of the DACS with a signal-to-noise ratio >10 dB was observed between 0.5 and 5 kHz. Simulated implant misplacement or malfunction could be detected by the absence or shift in the characteristic resonance frequency of the actuator. PEAC changed by <6 dB for variations of the microphone and loudspeaker position.Conclusion: Our data support the feasibility of acoustical measurements for in situ testing of the DACS implant in the mastoid cavity as well as for post-operative monitoring of actuator function.

  15. Fibroblast adhesion and activation onto micro-machined titanium surfaces.

    Science.gov (United States)

    Guillem-Marti, J; Delgado, L; Godoy-Gallardo, M; Pegueroles, M; Herrero, M; Gil, F J

    2013-07-01

    Surface modifications performed at the neck of dental implants, in the manner of micro-grooved surfaces, can reduce fibrous tissue encapsulation and prevent bacterial colonization, thereby improving fibrointegration and the formation of a biological seal. However, the applied procedures are technically complex and/or time consuming methods. The aim of this study was to analyse the fibroblast behaviour on modified titanium surfaces obtained, applying a simple and low-cost method. An array of titanium surfaces was obtained using a commercial computerized numerical control lathe, modifying the feed rate and the cutting depth. To elucidate the potential ability of the generated surfaces to activate connective tissue cells, a thorough gene (by real time - qPCR) and protein (by western blot or zymography) expression and cellular response characterization (cell morphology, cell adhesion and cell activation by secreting extracellular matrix (ECM) components and their enzyme regulators) was performed. Micro-grooved surfaces have statistically significant differences in the groove's width (approximately 10, 50 and 100 μm) depending on the applied advancing fixed speed. Field emission scanning electron microscopy images showed that fibroblasts oriented along the generated grooves, but they were only entirely accommodated on the wider grooves (≥50 μm). Micro-grooved surfaces exhibited an earlier cell attachment and activation, as seen by collagen Iα1 and fibronectin deposition and activation of ECM remodelling enzymes, compared with the other surfaces. However, fibroblasts could remain in an activated state on narrower surfaces (fibrotic response. © 2012 John Wiley & Sons A/S.

  16. Synthesis and structure of large single crystalline silver hexagonal microplates suitable for micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Lyutov, Dimitar L.; Genkov, Kaloyan V.; Zyapkov, Anton D.; Tsutsumanova, Gichka G.; Tzonev, Atanas N. [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria); Lyutov, Lyudmil G. [Department of General and Inorganic Chemistry, Faculty of Chemistry, University of Sofia, 1, J. Bouchier Blvd, Sofia (Bulgaria); Russev, Stoyan C., E-mail: scr@phys.uni-sofia.bg [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria)

    2014-01-15

    We report a simple one-step synthesis method of large single crystalline Ag (111) hexagonal microplates with sharp edges and a size of up to tens of microns. Single silver crystals were produced by reduction silver nitrate aqueous solution with 4-(methylamino)phenol sulfate. Scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, selected area electron diffraction and optical microscopy techniques were combined to characterize the crystals. It is shown that the microplates can be easily dispersed and transferred as single objects onto different substrates and subsequently used as a high quality plasmonic starting material for micromachining of future nanocomponents, using modern top-down techniques like focused-ion beam milling and gas injection deposition. - Highlights: • Synthesis of large Ag hexagonal microplates with high crystallinity. • It is shown and discussed the role of twinning for the anisotropic 2D growth. • The Ag plates are stable in water and can be dispersed onto different substrates. • Their positioning and subsequent micromachining with FIB/GIS is demonstrated. • Suitable starting material for future plasmonic nanocomponents.

  17. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    International Nuclear Information System (INIS)

    Nesprías, F.; Debray, M.E.; Davidson, J.; Kreiner, A.J.

    2013-01-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35 Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO 3 , a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well

  18. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  19. A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

    Directory of Open Access Journals (Sweden)

    Leila Ladani

    2010-12-01

    Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

  20. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  1. Measurements of noise immission from wind turbines at receptor locations: Use of a vertical microphone board to improve the signal-to-noise ratio

    International Nuclear Information System (INIS)

    Fegeant, Olivier

    1999-01-01

    The growing interest in wind energy has increased the need of accuracy in wind turbine noise immission measurements and thus, the need of new measurement techniques. This paper shows that mounting the microphone on a vertical board improves the signal-to-noise ratio over the whole frequency range compared to the free microphone technique. Indeed, the wind turbine is perceived two times noisier by the microphone due to the signal reflection by the board while, in addition, the wind noise is reduced. Furthermore, the board shielding effect allows the measurements to be carried out in the presence of reflecting surfaces such as building facades

  2. A critical review of hearing-aid single-microphone noise-reduction studies in adults and children.

    Science.gov (United States)

    Chong, Foong Yen; Jenstad, Lorienne M

    2017-10-26

    Single-microphone noise reduction (SMNR) is implemented in hearing aids to suppress background noise. The purpose of this article was to provide a critical review of peer-reviewed studies in adults and children with sensorineural hearing loss who were fitted with hearing aids incorporating SMNR. Articles published between 2000 and 2016 were searched in PUBMED and EBSCO databases. Thirty-two articles were included in the final review. Most studies with adult participants showed that SMNR has no effect on speech intelligibility. Positive results were reported for acceptance of background noise, preference, and listening effort. Studies of school-aged children were consistent with the findings of adult studies. No study with infants or young children of under 5 years old was found. Recent studies on noise-reduction systems not yet available in wearable hearing aids have documented benefits of noise reduction on memory for speech processing for older adults. This evidence supports the use of SMNR for adults and school-aged children when the aim is to improve listening comfort or reduce listening effort. Future research should test SMNR with infants and children who are younger than 5 years of age. Further development, testing, and clinical trials should be carried out on algorithms not yet available in wearable hearing aids. Testing higher cognitive level for speech processing and learning of novel sounds or words could show benefits of advanced signal processing features. These approaches should be expanded to other populations such as children and younger adults. Implications for rehabilitation The review provides a quick reference for students and clinicians regarding the efficacy and effectiveness of SMNR in wearable hearing aids. This information is useful during counseling session to build a realistic expectation among hearing aid users. Most studies in the adult population suggest that SMNR may provide some benefits to adult listeners in terms of listening

  3. Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

    NARCIS (Netherlands)

    Nazeer, H.; Abelmann, Leon; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt

    2009-01-01

    This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the

  4. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat; Roy, Anish; El Sayed, Tamer S.; Silberschmidt, Vadim V.

    2014-01-01

    of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal

  5. RF Performance of a 600-720 GHz Sideband Separating Mixer with All-Copper Micromachined Waveguide Mixer Block

    NARCIS (Netherlands)

    Mena, F. P.; Kooi, J.; Baryshev, A. M.; Lodewijk, C. F. J.; Klapwijk, T. M.; Wild, W.; Desmaris, V.; Meledin, D.; Pavolotsky, A.; Belitsky, V.; Wild, Wolfgang

    2008-01-01

    Here we report on the RF performance of a 2SB mixer (600-720 GHz) fabricated in a new method that combines traditional micromachining with waveguide components fabricated by photolithography and electroplating. The latter allows reaching, in a reproducible way, the stringent accuracies necessary for

  6. A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2006-01-01

    A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

  7. Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

    International Nuclear Information System (INIS)

    Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

    2008-01-01

    Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

  8. Development of early core anomaly detection system by using in-sodium microphone in JOYO. Fundamental characteristics test of in-sodium microphone in water and examination of improvement of detection accuracy

    International Nuclear Information System (INIS)

    Komai, Masafumi

    2001-07-01

    Fast reactor core anomalies can be detected in near real-time with acoustic sensors. An acoustic detection system senses an in-core anomaly immediately from the fast acoustic signals that propagate through the sodium coolant. One example of a detectable anomaly is sodium boiling due to local blockage in a sub-assembly; the slight change in background acoustic signals can be detected. A key advantage of the acoustic detector is that it can be located outside the core. The location of the anomaly in the core can be determined by correlating multiple acoustic signals. This report describes the testing and fundamental characteristics of a microphone suitable for use in the sodium coolant and examines methods to improve the system's S/N ratio. Testing in water confirmed that the in-sodium microphone has good impulse and wide band frequency responses. These tests used impulse and white noise signals that imitate acoustic signals from boiling sodium. Correlation processing of multiple microphone signals to improve S/N ratio is also described. (author)

  9. Compensating microphonics in SRF cavities to ensure beam stability for future free electron lasers

    Energy Technology Data Exchange (ETDEWEB)

    Neumann, Axel

    2008-07-21

    In seeded High-Gain-Harmonic-Generation free electron lasers or energy recovery linear accelerators the requirements for the bunch-to-bunch timing and energy jitter of the beam are in the femtosecond and per mill regime. This implies the ability to control the cavity radiofrequency (RF) field to an accuracy of 0.02 in phase and up to 1.10{sup -4} in amplitude. For the planned BESSY-FEL it is envisaged to operate 144 superconducting 1.3 GHz cavities of the 2.3 GeV driver linac in continuous wave mode and at a low beam current. The cavity resonance comprises a very narrow bandwidth of the order of tens of Hertz. Such cavities have been characterized under accelerator like conditions in the HoBiCaT test facility. It was possible to measure the error sources affecting the field stability in continuous wave (CW) operation. Microphonics, the main error source for a mechanical detuning of the cavities, lead to an average fluctuation of the cavity resonance of 1-5 Hz rms. Furthermore, the static and dynamic Lorentz force detuning and the helium pressure dependance of the cavity resonance have been measured. Single cavity RF control and linac bunch-to-bunch longitudinal phase space modeling containing the measured properties showed, that it is advisable to find means to minimize the microphonics detuning by mechanical tuning. Thus, several fast tuning systems have been tested for CW operation. These tuners consist of a motor driven lever for slow and coarse tuning and a piezo that is integrated into the tuner support for fast and fine tuning. Regarding the analysis of the detuning spectrum an adaptive feedforward method based on the least-mean-square filter algorithm has been developed for fast cavity tuning. A detuning compensation between a factor of two and up to a factor of seven has been achieved. Modeling the complete system including the fast tuning scheme, showed that the requirements of the BESSY-FEL are attainable. (orig.)

  10. Compensating microphonics in SRF cavities to ensure beam stability for future free electron lasers

    International Nuclear Information System (INIS)

    Neumann, Axel

    2008-01-01

    In seeded High-Gain-Harmonic-Generation free electron lasers or energy recovery linear accelerators the requirements for the bunch-to-bunch timing and energy jitter of the beam are in the femtosecond and per mill regime. This implies the ability to control the cavity radiofrequency (RF) field to an accuracy of 0.02 in phase and up to 1.10 -4 in amplitude. For the planned BESSY-FEL it is envisaged to operate 144 superconducting 1.3 GHz cavities of the 2.3 GeV driver linac in continuous wave mode and at a low beam current. The cavity resonance comprises a very narrow bandwidth of the order of tens of Hertz. Such cavities have been characterized under accelerator like conditions in the HoBiCaT test facility. It was possible to measure the error sources affecting the field stability in continuous wave (CW) operation. Microphonics, the main error source for a mechanical detuning of the cavities, lead to an average fluctuation of the cavity resonance of 1-5 Hz rms. Furthermore, the static and dynamic Lorentz force detuning and the helium pressure dependance of the cavity resonance have been measured. Single cavity RF control and linac bunch-to-bunch longitudinal phase space modeling containing the measured properties showed, that it is advisable to find means to minimize the microphonics detuning by mechanical tuning. Thus, several fast tuning systems have been tested for CW operation. These tuners consist of a motor driven lever for slow and coarse tuning and a piezo that is integrated into the tuner support for fast and fine tuning. Regarding the analysis of the detuning spectrum an adaptive feedforward method based on the least-mean-square filter algorithm has been developed for fast cavity tuning. A detuning compensation between a factor of two and up to a factor of seven has been achieved. Modeling the complete system including the fast tuning scheme, showed that the requirements of the BESSY-FEL are attainable. (orig.)

  11. Development of a Novel Bone Conduction Verification Tool Using a Surface Microphone: Validation With Percutaneous Bone Conduction Users.

    Science.gov (United States)

    Hodgetts, William; Scott, Dylan; Maas, Patrick; Westover, Lindsey

    2018-03-23

    To determine if a newly-designed, forehead-mounted surface microphone would yield equivalent estimates of audibility when compared to audibility measured with a skull simulator for adult bone conduction users. Data was analyzed using a within subjects, repeated measures design. There were two different sensors (skull simulator and surface microphone) measuring the same hearing aid programmed to the same settings for all subjects. We were looking for equivalent results. Twenty-one adult percutaneous bone conduction users (12 females and 9 males) were recruited for this study. Mean age was 54.32 years with a standard deviation of 14.51 years. Nineteen of the subjects had conductive/mixed hearing loss and two had single-sided deafness. To define audibility, we needed to establish two things: (1) in situ-level thresholds at each audiometric frequency in force (skull simulator) and in sound pressure level (SPL; surface microphone). Next, we measured the responses of the preprogrammed test device in force on the skull simulator and in SPL on the surface mic in response to pink noise at three input levels: 55, 65, and 75 dB SPL. The skull simulator responses were converted to real head force responses by means of an individual real head to coupler difference transform. Subtracting the real head force level thresholds from the real head force output of the test aid yielded the audibility for each audiometric frequency for the skull simulator. Subtracting the SPL thresholds from the surface microphone from the SPL output of the test aid yielded the audibility for each audiometric frequency for the surface microphone. The surface microphone was removed and retested to establish the test-retest reliability of the tool. We ran a 2 (sensor) × 3 (input level) × 10 (frequency) mixed analysis of variance to determine if there were any significant main effects and interactions. There was a significant three-way interaction, so we proceeded to explore our planned comparisons

  12. Doppler distortion correction based on microphone array and matching pursuit algorithm for a wayside train bearing monitoring system

    International Nuclear Information System (INIS)

    Liu, Xingchen; Hu, Zhiyong; He, Qingbo; Zhang, Shangbin; Zhu, Jun

    2017-01-01

    Doppler distortion and background noise can reduce the effectiveness of wayside acoustic train bearing monitoring and fault diagnosis. This paper proposes a method of combining a microphone array and matching pursuit algorithm to overcome these difficulties. First, a dictionary is constructed based on the characteristics and mechanism of a far-field assumption. Then, the angle of arrival of the train bearing is acquired when applying matching pursuit to analyze the acoustic array signals. Finally, after obtaining the resampling time series, the Doppler distortion can be corrected, which is convenient for further diagnostic work. Compared with traditional single-microphone Doppler correction methods, the advantages of the presented array method are its robustness to background noise and its barely requiring pre-measuring parameters. Simulation and experimental study show that the proposed method is effective in performing wayside acoustic bearing fault diagnosis. (paper)

  13. Doppler distortion correction based on microphone array and matching pursuit algorithm for a wayside train bearing monitoring system

    Science.gov (United States)

    Liu, Xingchen; Hu, Zhiyong; He, Qingbo; Zhang, Shangbin; Zhu, Jun

    2017-10-01

    Doppler distortion and background noise can reduce the effectiveness of wayside acoustic train bearing monitoring and fault diagnosis. This paper proposes a method of combining a microphone array and matching pursuit algorithm to overcome these difficulties. First, a dictionary is constructed based on the characteristics and mechanism of a far-field assumption. Then, the angle of arrival of the train bearing is acquired when applying matching pursuit to analyze the acoustic array signals. Finally, after obtaining the resampling time series, the Doppler distortion can be corrected, which is convenient for further diagnostic work. Compared with traditional single-microphone Doppler correction methods, the advantages of the presented array method are its robustness to background noise and its barely requiring pre-measuring parameters. Simulation and experimental study show that the proposed method is effective in performing wayside acoustic bearing fault diagnosis.

  14. Interface for Barge-in Free Spoken Dialogue System Based on Sound Field Reproduction and Microphone Array

    Directory of Open Access Journals (Sweden)

    Hinamoto Yoichi

    2007-01-01

    Full Text Available A barge-in free spoken dialogue interface using sound field control and microphone array is proposed. In the conventional spoken dialogue system using an acoustic echo canceller, it is indispensable to estimate a room transfer function, especially when the transfer function is changed by various interferences. However, the estimation is difficult when the user and the system speak simultaneously. To resolve the problem, we propose a sound field control technique to prevent the response sound from being observed. Combined with a microphone array, the proposed method can achieve high elimination performance with no adaptive process. The efficacy of the proposed interface is ascertained in the experiments on the basis of sound elimination and speech recognition.

  15. Speech Enhancement of Mobile Devices Based on the Integration of a Dual Microphone Array and a Background Noise Elimination Algorithm.

    Science.gov (United States)

    Chen, Yung-Yue

    2018-05-08

    Mobile devices are often used in our daily lives for the purposes of speech and communication. The speech quality of mobile devices is always degraded due to the environmental noises surrounding mobile device users. Regretfully, an effective background noise reduction solution cannot easily be developed for this speech enhancement problem. Due to these depicted reasons, a methodology is systematically proposed to eliminate the effects of background noises for the speech communication of mobile devices. This methodology integrates a dual microphone array with a background noise elimination algorithm. The proposed background noise elimination algorithm includes a whitening process, a speech modelling method and an H ₂ estimator. Due to the adoption of the dual microphone array, a low-cost design can be obtained for the speech enhancement of mobile devices. Practical tests have proven that this proposed method is immune to random background noises, and noiseless speech can be obtained after executing this denoise process.

  16. Speech Enhancement of Mobile Devices Based on the Integration of a Dual Microphone Array and a Background Noise Elimination Algorithm

    Directory of Open Access Journals (Sweden)

    Yung-Yue Chen

    2018-05-01

    Full Text Available Mobile devices are often used in our daily lives for the purposes of speech and communication. The speech quality of mobile devices is always degraded due to the environmental noises surrounding mobile device users. Regretfully, an effective background noise reduction solution cannot easily be developed for this speech enhancement problem. Due to these depicted reasons, a methodology is systematically proposed to eliminate the effects of background noises for the speech communication of mobile devices. This methodology integrates a dual microphone array with a background noise elimination algorithm. The proposed background noise elimination algorithm includes a whitening process, a speech modelling method and an H2 estimator. Due to the adoption of the dual microphone array, a low-cost design can be obtained for the speech enhancement of mobile devices. Practical tests have proven that this proposed method is immune to random background noises, and noiseless speech can be obtained after executing this denoise process.

  17. Nanogenerator-based dual-functional and self-powered thin patch loudspeaker or microphone for flexible electronics

    Science.gov (United States)

    Li, Wei; Torres, David; Díaz, Ramón; Wang, Zhengjun; Wu, Changsheng; Wang, Chuan; Lin Wang, Zhong; Sepúlveda, Nelson

    2017-05-01

    Ferroelectret nanogenerators were recently introduced as a promising alternative technology for harvesting kinetic energy. Here we report the device's intrinsic properties that allow for the bidirectional conversion of energy between electrical and mechanical domains; thus extending its potential use in wearable electronics beyond the power generation realm. This electromechanical coupling, combined with their flexibility and thin film-like form, bestows dual-functional transducing capabilities to the device that are used in this work to demonstrate its use as a thin, wearable and self-powered loudspeaker or microphone patch. To determine the device's performance and applicability, sound pressure level is characterized in both space and frequency domains for three different configurations. The confirmed device's high performance is further validated through its integration in three different systems: a music-playing flag, a sound recording film and a flexible microphone for security applications.

  18. Response Pattern Based on the Amplitude of Ear Canal Recorded Cochlear Microphonic Waveforms across Acoustic Frequencies in Normal Hearing Subjects

    OpenAIRE

    Zhang, Ming

    2012-01-01

    Low-frequency otoacoustic emissions (OAEs) are often concealed by acoustic background noise such as those from a patient’s breathing and from the environment during recording in clinics. When using electrocochleaography (ECochG or ECoG), such as cochlear microphonics (CMs), acoustic background noise do not contaminate the recordings. Our objective is to study the response pattern of CM waveforms (CMWs) to explore an alternative approach in assessing cochlear functions. In response to a 14-mse...

  19. Speech understanding in background noise with the two-microphone adaptive beamformer BEAM in the Nucleus Freedom Cochlear Implant System.

    Science.gov (United States)

    Spriet, Ann; Van Deun, Lieselot; Eftaxiadis, Kyriaky; Laneau, Johan; Moonen, Marc; van Dijk, Bas; van Wieringen, Astrid; Wouters, Jan

    2007-02-01

    This paper evaluates the benefit of the two-microphone adaptive beamformer BEAM in the Nucleus Freedom cochlear implant (CI) system for speech understanding in background noise by CI users. A double-blind evaluation of the two-microphone adaptive beamformer BEAM and a hardware directional microphone was carried out with five adult Nucleus CI users. The test procedure consisted of a pre- and post-test in the lab and a 2-wk trial period at home. In the pre- and post-test, the speech reception threshold (SRT) with sentences and the percentage correct phoneme scores for CVC words were measured in quiet and background noise at different signal-to-noise ratios. Performance was assessed for two different noise configurations (with a single noise source and with three noise sources) and two different noise materials (stationary speech-weighted noise and multitalker babble). During the 2-wk trial period at home, the CI users evaluated the noise reduction performance in different listening conditions by means of the SSQ questionnaire. In addition to the perceptual evaluation, the noise reduction performance of the beamformer was measured physically as a function of the direction of the noise source. Significant improvements of both the SRT in noise (average improvement of 5-16 dB) and the percentage correct phoneme scores (average improvement of 10-41%) were observed with BEAM compared to the standard hardware directional microphone. In addition, the SSQ questionnaire and subjective evaluation in controlled and real-life scenarios suggested a possible preference for the beamformer in noisy environments. The evaluation demonstrates that the adaptive noise reduction algorithm BEAM in the Nucleus Freedom CI-system may significantly increase the speech perception by cochlear implantees in noisy listening conditions. This is the first monolateral (adaptive) noise reduction strategy actually implemented in a mainstream commercial CI.

  20. The Effect of Microphone Placement on Interaural Level Differences and Sound Localization Across the Horizontal Plane in Bilateral Cochlear Implant Users.

    Science.gov (United States)

    Jones, Heath G; Kan, Alan; Litovsky, Ruth Y

    2016-01-01

    This study examined the effect of microphone placement on the interaural level differences (ILDs) available to bilateral cochlear implant (BiCI) users, and the subsequent effects on horizontal-plane sound localization. Virtual acoustic stimuli for sound localization testing were created individually for eight BiCI users by making acoustic transfer function measurements for microphones placed in the ear (ITE), behind the ear (BTE), and on the shoulders (SHD). The ILDs across source locations were calculated for each placement to analyze their effect on sound localization performance. Sound localization was tested using a repeated-measures, within-participant design for the three microphone placements. The ITE microphone placement provided significantly larger ILDs compared to BTE and SHD placements, which correlated with overall localization errors. However, differences in localization errors across the microphone conditions were small. The BTE microphones worn by many BiCI users in everyday life do not capture the full range of acoustic ILDs available, and also reduce the change in cue magnitudes for sound sources across the horizontal plane. Acute testing with an ITE placement reduced sound localization errors along the horizontal plane compared to the other placements in some patients. Larger improvements may be observed if patients had more experience with the new ILD cues provided by an ITE placement.

  1. Fiber-optical microphones and accelerometers based on polymer optical fiber Bragg gratings

    DEFF Research Database (Denmark)

    Yuan, Scott Wu; Stefani, Alessio; Bang, Ole

    2010-01-01

    Polymer optical fibers (POFs) are ideal for applications as the sensing element in fiber-optical microphones and accelerometers based on fiber Bragg gratings (FBGs) due to their reduced Young’s Modulus of 3.2GPa, compared to 72GPa of Silica. To maximize the sensitivity and the dynamic range...... of the device the outer diameter and the length of the sensing fiber segment should be as small as possible. To this end we have fabricated 3mm FBGs in single-mode step-index POFs of diameter 115 micron, using 325nm UV writing and a phase-mask technique. 6mm POF sections with FBGs in the center have been glued...... to standard Silica SMF28 fibers. These POF FBGs have been characterized in terms of temperature and strain to find operating regimes with no hysteresis. Commercial fast wavelength interrogators (KHz) are shown to be able to track the thin POF FBGs and they are finally applied in a prototype accelerometer...

  2. Micro-phonics analysis and compensation with a feedback loop at low cavity gradient

    International Nuclear Information System (INIS)

    Luong, M.; Devanz, G.; Jacques, E.; Novo, J.; Neumann, A.; Kugeler, O.

    2007-10-01

    For FEL projects based on a superconducting linac operating in continuous wave (CW) mode, the RF power optimization finally comes up against the micro-phonics disturbances, which result in an unpredictable detuning of the cavities. A new piezoelectric tuner was developed and mounted on a TTF 9-cells cavity with an appropriate instrumentation. This system enables a full characterization of the disturbances and the tuner behavior. The experimental results pointed out 3 distinct regimes of perturbation: a strong but quickly damped very low frequency oscillation due to cryogenic control, a quasi-stationary oscillation around 50 and 100 Hz due to the operation of vacuum pumps motor and some lower amplitudes oscillations related to the excitation of the mechanical structure Eigenmodes by environmental noise. Modeling, simulations and experimental validations were carried out to demonstrate the feasibility of a feedback compensation for a multi-cell cavity. The results also bring to some recommendations that may overcome the limitations pointed out in the present experimentation

  3. Infrastructure-Less Indoor Localization Using the Microphone, Magnetometer and Light Sensor of a Smartphone

    Directory of Open Access Journals (Sweden)

    Carlos E. Galván-Tejada

    2015-08-01

    Full Text Available In this paper, we present the development of an infrastructure-less indoor location system (ILS, which relies on the use of a microphone, a magnetometer and a light sensor of a smartphone, all three of which are essentially passive sensors, relying on signals available practically in any building in the world, no matter how developed the region is. In our work, we merge the information from those sensors to estimate the user’s location in an indoor environment. A multivariate model is applied to find the user’s location, and we evaluate the quality of the resulting model in terms of sensitivity and specificity. Our experiments were carried out in an office environment during summer and winter, to take into account changes in light patterns, as well as changes in the Earth’s magnetic field irregularities. The experimental results clearly show the benefits of using the information fusion of multiple sensors when contrasted with the use of a single source of information.

  4. Localization and separation of acoustic sources by using a 2.5-dimensional circular microphone array.

    Science.gov (United States)

    Bai, Mingsian R; Lai, Chang-Sheng; Wu, Po-Chen

    2017-07-01

    Circular microphone arrays (CMAs) are sufficient in many immersive audio applications because azimuthal angles of sources are considered more important than the elevation angles in those occasions. However, the fact that CMAs do not resolve the elevation angle well can be a limitation for some applications which involves three-dimensional sound images. This paper proposes a 2.5-dimensional (2.5-D) CMA comprised of a CMA and a vertical logarithmic-spacing linear array (LLA) on the top. In the localization stage, two delay-and-sum beamformers are applied to the CMA and the LLA, respectively. The direction of arrival (DOA) is estimated from the product of two array output signals. In the separation stage, Tikhonov regularization and convex optimization are employed to extract the source amplitudes on the basis of the estimated DOA. The extracted signals from two arrays are further processed by the normalized least-mean-square algorithm with the internal iteration to yield the source signal with improved quality. To validate the 2.5-D CMA experimentally, a three-dimensionally printed circular array comprised of a 24-element CMA and an eight-element LLA is constructed. Objective perceptual evaluation of speech quality test and a subjective listening test are also undertaken.

  5. Compressing Sensing Based Source Localization for Controlled Acoustic Signals Using Distributed Microphone Arrays

    Directory of Open Access Journals (Sweden)

    Wei Ke

    2017-01-01

    Full Text Available In order to enhance the accuracy of sound source localization in noisy and reverberant environments, this paper proposes an adaptive sound source localization method based on distributed microphone arrays. Since sound sources lie at a few points in the discrete spatial domain, our method can exploit this inherent sparsity to convert the localization problem into a sparse recovery problem based on the compressive sensing (CS theory. In this method, a two-step discrete cosine transform- (DCT- based feature extraction approach is utilized to cover both short-time and long-time properties of acoustic signals and reduce the dimensions of the sparse model. In addition, an online dictionary learning (DL method is used to adjust the dictionary for matching the changes of audio signals, and then the sparse solution could better represent location estimations. Moreover, we propose an improved block-sparse reconstruction algorithm using approximate l0 norm minimization to enhance reconstruction performance for sparse signals in low signal-noise ratio (SNR conditions. The effectiveness of the proposed scheme is demonstrated by simulation results and experimental results where substantial improvement for localization performance can be obtained in the noisy and reverberant conditions.

  6. Detection System of Sound Noise Level (SNL) Based on Condenser Microphone Sensor

    Science.gov (United States)

    Rajagukguk, Juniastel; Eka Sari, Nurdieni

    2018-03-01

    The research aims to know the noise level by using the Arduino Uno as data processing input from sensors and called as Sound Noise Level (SNL). The working principle of the instrument is as noise detector with the show notifications the noise level on the LCD indicator and in the audiovisual form. Noise detection using the sensor is a condenser microphone and LM 567 as IC op-amps, which are assembled so that it can detect the noise, which sounds are captured by the sensor will turn the tide of sinusoida voice became sine wave energy electricity (altering sinusoida electric current) that is able to responded to complaints by the Arduino Uno. The tool is equipped with a detector consists of a set indicator LED and sound well as the notification from the text on LCD 16*2. Work setting indicators on the condition that, if the measured noise > 75 dB then sound will beep, the red LED will light up indicating the status of the danger. If the measured value on the LCD is higher than 56 dB, sound indicator will be beep and yellow LED will be on indicating noisy. If the noise measured value <55 dB, sound indicator will be quiet indicating peaceful from noisy. From the result of the research can be explained that the SNL is capable to detecting and displaying noise level with a measuring range 50-100 dB and capable to delivering the notification noise in audiovisual.

  7. Numerical Analysis of CNC Milling Chatter Using Embedded Miniature MEMS Microphone Array System

    Directory of Open Access Journals (Sweden)

    Pang-Li Wang

    2018-01-01

    Full Text Available With the increasingly common use of industrial automation for mass production, there are many computer numerical control (CNC machine tools that require the collection of data from intelligent sensors in order to analyze their processing quality. In general, for high speed rotating machines, an accelerometer can be attached on the spindle to collect the data from the detected vibration of the CNC. However, due to their cost, accelerometers have not been widely adopted for use with typical CNC machine tools. This study sought to develop an embedded miniature MEMS microphone array system (Radius 5.25 cm, 8 channels to discover the vibration source of the CNC from spatial phase array processing. The proposed method utilizes voice activity detection (VAD to distinguish between the presence and absence of abnormal noise in the pre-stage, and utilizes the traditional direction of arrival method (DOA via multiple signal classification (MUSIC to isolate the spatial orientation of the noise source in post-processing. In the numerical simulation, the non-interfering noise source location is calibrated in the anechoic chamber, and is tested with real milling processing in the milling machine. As this results in a high background noise level, the vibration sound source is more accurate in the presented energy gradation graphs as compared to the traditional MUSIC method.

  8. Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

    Directory of Open Access Journals (Sweden)

    Lan Zhang

    2014-01-01

    Full Text Available Using a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09–0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V and currents (<1 mA with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device.

  9. Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, Lan; Lu, Jian, E-mail: jian-lu@aist.go.jp; Takagi, Hideki; Maeda, Ryutaro [Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, 305-8564 (Japan)

    2014-01-15

    Using a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09–0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V) and currents (<1 mA) with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device.

  10. A 16-bit sigma-delta modulator applied in micro-machined inertial sensors

    Science.gov (United States)

    Honglin, Xu; Qiang, Fu; Hongna, Liu; Liang, Yin; Pengfei, Wang; Xiaowei, Liu

    2014-04-01

    A fourth-order low-distortion low-pass sigma-delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of -3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply.

  11. A 16-bit sigma–delta modulator applied in micro-machined inertial sensors

    International Nuclear Information System (INIS)

    Xu Honglin; Fu Qiang; Liu Hongna; Yin Liang; Wang Pengfei; Liu Xiaowei

    2014-01-01

    A fourth-order low-distortion low-pass sigma–delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm 2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of −3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply. (semiconductor integrated circuits)

  12. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; De Raedt, Walter; Sedky, Sherif; Vandenbosch, Guy A. E.; Soliman, Ezzeldin A.

    2015-01-01

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  13. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    Science.gov (United States)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-09-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated.

  14. Comparison of residual stress measurement in thin films using surface micromachining method

    International Nuclear Information System (INIS)

    He, Q.; Luo, Z.X.; Chen, X.Y.

    2008-01-01

    Conductive, dielectric, semiconducting, piezoelectric and ferroelectric thin films are extensively used for MEMS/NEMS applications. One of the important parameters of thin films is residual stress. The residual stress can seriously affect the properties, performance and long-term stability of the films. Excessive compressive or tensile stress results in buckling, cracking, splintering and sticking problems. Stress measurement techniques are therefore essential for both process development and process monitoring. Many suggestions for stress measurement in thin films have been made over the past several decades. This paper is concentrated on the in situ stress measurement using surface micromachining techniques to determine the residual stress. The authors review and compare several types of stress measurement methods including buckling technique, rotating technique, micro strain gauge and long-short beam strain sensor

  15. Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results

    International Nuclear Information System (INIS)

    Poletkin, K; Lu, Z; Wallrabe, U; Badilita, V; Den Hartogh, B

    2014-01-01

    We present a linear analytical model coupled with experimental analysis to discuss stability of a levitated proof mass (PM) in a micromachined inductive suspension (MIS), which has been previously introduced and characterized. The model is a function of the MIS geometry, describes the dynamics of a levitated disk-shaped PM near the equilibrium point, and predicts conditions for stable levitation. The experimental setup directly measures the lateral component of the Lorentz force, which has a stabilization role in the MIS structure, as well as the vertical levitation force. The experimental setup is further used to derive mechanical parameters such as stiffness values relative to lateral, vertical and angular displacements, proven to be in excellent agreement with the values predicted by the analytical model

  16. Micro-machinable polymer-derived ceramic sensors for high-temperature applications

    Science.gov (United States)

    Liu, Jian; Xu, Chengying; An, Linan

    2010-04-01

    Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.

  17. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.

    2015-10-26

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  18. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    Directory of Open Access Journals (Sweden)

    Yan Deng

    2014-10-01

    Full Text Available A novel multifrequency excitation (MFE method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

  19. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  20. A flexible ultrasound transducer array with micro-machined bulk PZT.

    Science.gov (United States)

    Wang, Zhe; Xue, Qing-Tang; Chen, Yuan-Quan; Shu, Yi; Tian, He; Yang, Yi; Xie, Dan; Luo, Jian-Wen; Ren, Tian-Ling

    2015-01-23

    This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  1. Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.

    Science.gov (United States)

    Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K

    2010-10-01

    This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.

  2. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    International Nuclear Information System (INIS)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-01-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated. (paper)

  3. Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection

    Science.gov (United States)

    Malyutenko, V. K.; Malyutenko, O. Yu.; Leonov, V.; Van Hoof, C.

    2009-05-01

    The technology for self-supported membraneless polycrystalline SiGe thermal microemitters, their design, and performance are presented. The 128-element arrays with a fill factor of 88% and a 2.5-μm-thick resonant cavity have been grown by low-pressure chemical vapor deposition and fabricated using surface micromachining technology. The 200-nm-thick 60×60 μm2 emitting pixels enforced with a U-shape profile pattern demonstrate a thermal time constant of 2-7 ms and an apparent temperature of 700 K in the 3-5 and 8-12 μm atmospheric transparency windows. The application of the devices to the infrared dynamic scene simulation and their benefit over conventional planar membrane-supported emitters are discussed.

  4. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong

    2013-11-04

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

  5. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    International Nuclear Information System (INIS)

    Chang, M W; Gwo, T J; Deng, T M; Chang, H C

    2006-01-01

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  6. Corporate array of micromachined dipoles on silicon wafer for 60 GHz communication systems

    KAUST Repository

    Sallam, M. O.

    2013-03-01

    In this paper, an antenna array operating at 60 GHz and realized on 0.675 mm thick silicon substrate is presented. The array is constructed using four micromachined half-wavelength dipoles fed by a corporate feeding network. Isolation between the antenna array and its feeding network is achieved via a ground plane. This arrangement leads to maximizing the broadside radiation with relatively high front-to-back ratio. Simulations have been carried out using both HFSS and CST, which showed very good agreement. Results reveal that the proposed antenna array has good radiation characteristics, where the directivity, gain, and radiation efficiency are around 10.5 dBi, 9.5 dBi, and 79%, respectively. © 2013 IEEE.

  7. Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies

    International Nuclear Information System (INIS)

    Yu Xiaomei; Tang Yaquan; Zhang Haitao

    2008-01-01

    This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process. (note)

  8. Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis

    Directory of Open Access Journals (Sweden)

    A Martowicz

    2016-09-01

    Full Text Available The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken into account in elaborated finite element model of one cell of described transducer in order to include significant physical phenomena present in modelled microdevice. The set of twelve input uncertain and design parameters consists of geometric, material and control properties. The amplitude of dynamic membrane deformation of the transducer has been chosen as studied parameter. The objective of performed study has been defined as the task of finding robust design configurations of the transducer, i.e. characterizing maximal value of deformation amplitude with its minimal variation.

  9. Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

    KAUST Repository

    Sallam, Mai

    2015-06-01

    This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

  10. Micromachining. CERN Courier, Jul-Aug 1995, v. 35(5)

    International Nuclear Information System (INIS)

    Wilson, Martin

    1995-01-01

    Full text: As well as making microcircuit components, X-ray lithography can also be used to make very small mechanical parts, either by using directly the exposed and developed photoresist, or as a mould to produce the component in another material such as ceramic or metal. In this revolutionary technology, metal components are made via the LIGA (Lithographic Galvanoformung und Abformung) technique in which the exposed and developed photoresist is coated with a conducting material and then electroplated, after which the resist is stripped away. In addition to fine size and precision resolution, X-rays offer the advantage of deep penetration and small scattering through the resist, so that patterns may be up to a millimetre deep, with very accurate straightness in directions parallel to the beam. Micromachining via LIGA was developed at KfK Karlsruhe; commercialization and further development is being vigorously pursued by the Institut fur Mikrotechnik in Mainz and by Microparts GmbH in Karlsruhe. Significant developments have been made at the Synchrotron Radiation Centre in Madison, Wisconsin, with new programmes start-ing at SRRC (Taiwan), CAMD (Baton Rouge, Louisiana), and LURE (Paris). There is now an active European Special Interest Group for LIGA. Commercially manufactured micromachines are starting to be used in sensors and connectors. The ability to integrate microdevices with microelectronics raises many interesting possibilities for the future, notably in medicine and for intelligent sensors. In all cases, however, widespread adoption will be governed by the ability to mass-produce cheaply, requiring high volume production. The high intensities of synchrotron radiation will assist in achieving these large throughputs

  11. High-intensity fibre laser design for micro-machining applications

    Science.gov (United States)

    Ortiz-Neria, D. I.; Martinez-Piñón, F.; Hernandez-Escamilla, H.; Alvarez-Chavez, J. A.

    2010-11-01

    This work is focused on the design of a 250W high-intensity continuous-wave fibre optic laser with a 15μm spot size beam and a beam parameter product (BPP) of 1.8 for its use on Laser-assisted Cold Spray process (LCS) in the micro-machining areas. The metal-powder deposition process LCS, is a novel method based on Cold Spray technique (CS) assisted by laser technology. The LCS accelerates metal powders by the use of a high-pressure gas in order to achieve flash welding of particles over substrate. In LCS, the critical velocity of impact is lower with respect with CS while the powder particle is heated before the deposition by a laser beam. Furthermore, LCS does not heat the powder to achieve high temperatures as it happens in plasma processes. This property puts aside cooling problems which normally happen in sintered processes with high oxygen/nitrogen concentration levels. LCS will be used not only in deposition of thin layers. After careful design, proof of concept, experimental data, and prototype development, it should be feasible to perform micro-machining precise work with the use of the highintensity fibre laser presented in this work, and selective deposition of particles, in a similar way to the well-known Direct Metal Laser Sintering process (DMLS). The fibre laser consists on a large-mode area, Yb3+-doped, semi-diffraction limited, 25-m fibre laser cavity, operating in continuous wave regime. The fibre shows an arguably high slope-efficiency with no signs of roll-over. The measured M2 value is 1.8 and doping concentration of 15000ppm. It was made with a slight modification of the traditional MCVD technique. A full optical characterization will be presented.

  12. Minimizing stress in large-area surface micromachined perforated membranes with slits

    International Nuclear Information System (INIS)

    Ghaderi, M; Ayerden, N P; De Graaf, G; Wolffenbuttel, R F

    2015-01-01

    This paper presents the effectiveness of both design and fabrication techniques for avoiding the rupturing or excessive bending of perforated membranes after release in surface micromachining. Special lateral designs of arrays of slits in the membrane were investigated for a maximum yield at a given level of residual stress. Process parameters were investigated and optimized for minimum residual stress in multilayer thin-film membranes. A 2 µm thick sacrificial TEOS layer and a structural membrane that is composed of silicon nitride and polysilicon layers in the stack is the basis of this study. The effect of sharp corners on the local stress in membranes was investigated, and structures are proposed that reduce these effects, maximizing the yield at a given level of residual stress. The effects of perforation and slits were studied both theoretically and using finite element analysis. While the overall effect of perforation is negligible in typical MEMS structures, an optimum design for the slits reduces the von Mises stress considerably as compared to sharp corners. The fabrication process was also investigated and optimized for the minimum residual stress of both the layers within the stack and the complete layer stack. The main emphasis of this work is on placing a stress-compensating layer on the wafer backside and simultaneously removing it during the surface micromachining, as this has been found to be the most effective method to reduce the overall stress in a stack of layers after sacrificial etching. Implementation of a stress compensating layer reduced the total residual stress from 200 MPa compressive into almost 60 MPa, tensile. Even though a particular structure was studied here, the employed methods are expected to be applicable to similar MEMS design problems. (paper)

  13. Benzocyclobutene-based electric micromachines supported on microball bearings: Design, fabrication, and characterization

    Science.gov (United States)

    Modafe, Alireza

    This dissertation summarizes the research activities that led to the development of the first microball-bearing-supported linear electrostatic micromotor with benzocyclobutene (BCB) low-k polymer insulating layers. The primary application of this device is long-range, high-speed linear micropositioning. The future generations of this device include rotary electrostatic micromotors and microgenerators. The development of the first generation of microball-bearing-supported micromachines, including device theory, design, and modeling, material characterization, process development, device fabrication, and device test and characterization is presented. The first generation of these devices is based on a 6-phase, bottom-drive, linear, variable-capacitance micromotor (B-LVCM). The design of the electrical and mechanical components of the micromotor, lumped-circuit modeling of the device and electromechanical characteristics, including variable capacitance, force, power, and speed are presented. Electrical characterization of BCB polymers, characterization of BCB chemical mechanical planarization (CMP), development of embedded BCB in silicon (EBiS) process, and integration of device components using microfabrication techniques are also presented. The micromotor consists of a silicon stator, a silicon slider, and four stainless-steel microballs. The aligning force profile of the micromotor was extracted from simulated and measured capacitances of all phases. An average total aligning force of 0.27 mN with a maximum of 0.41 mN, assuming a 100 V peak-to-peak square-wave voltage, was measured. The operation of the micromotor was verified by applying square-wave voltages and characterizing the slider motion. An average slider speed of 7.32 mm/s when excited by a 40 Hz, 120 V square-wave voltage was reached without losing the synchronization. This research has a pivotal impact in the field of power microelectromechanical systems (MEMS). It establishes the foundation for the

  14. Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications

    International Nuclear Information System (INIS)

    Kakati, A; Maji, D; Das, S

    2017-01-01

    Micromachining of a polydimethylsiloxane (PDMS) microstructure by wet chemical etching is explored for microelectromechanical systems (MEMS) and microfluidic applications. A 100 µ m thick PDMS film was patterned with different microstructure designs by wet chemical etching using a N-methyl-2-pyrrolidone (C 16 H 36 FN) and tetra-n-butylammonium fluoride (C 5 H 9 NO) mixture solution with 3:1 volume ratio after lithography for studying etching characteristics. The patterning parameters, such as etch rate, surface roughness, pH of etchant solution with time, were thoroughly investigated. A detailed study of surface morphology with etching time revealed nonlinear behaviour of the PDMS surface roughness and etch rate. A maximum rate of 1.45 µ m min −1 for 10 min etching with surface roughness of 360 nm was achieved. A new approach of wet chemical etching with pH controlled doped etchant was introduced for lower surface roughness of etched microstructures, and a constant etch rate during etching. Variation of the etching rate and surface roughness by pH controlled etching was performed by doping 5–15 gm l −1 of silicic acid (SiO 2xH2 O) into the traditional etchant solution. PDMS etching by silicic acid doped etchant solution showed a reduction in surface roughness from 400 nm to 220 nm for the same 15 µ m etching. This study is beneficial for micromachining of various MEMS and microfluidic structures such as micropillars, microchannels, and other PDMS microstructures. (paper)

  15. Achievement report on commissioned research of R and D in fiscal 1999 on micro-machine technologies. R and D of micro-machine technologies; 1999 nendo kenkyu seika hokokusho. Maikuro mashin gijutsu no kenkyu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2001-03-01

    With an objective to perform diagnoses and medical treatment in space limited portions in living organisms, research on micro-machine systems, research on a scanning type photographing unit in the medical micro-machine, and comprehensive surveys and researches have been conducted. This paper summarizes the achievements in fiscal 1999. In the research of a micro laser catheter, a prototype laser head having an outer diameter of 1 mm was fabricated, whereas composition was realized with a micro catheter having an outer diameter of 1.5 mm. With regard to the micro pressure sensor for catheterization, good active curving action was realized by a catheter in which a pressure sensor is mounted in the SMA curved catheter head. Research on the scanning type photographing unit has been carried out, for reducing further the diameter and size of an endoscope, on a photographing unit using laser beam whose cross section area of the tip optical section is about half of the conventional units. As a result, a high resolution scanning type photographing unit was realized based on the fiber optic system using a scanning mirror. In the comprehensive surveys and researches, items of information were collected in relation with the basic technologies for micro-machines. (NEDO)

  16. FY 1994 Report on the technical results. Research and development of micromachine technologies (Development of highly functional maintenance technologies for power plants); 1994 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1995-09-01

    This research and development project is aimed at development of the technologies for the micromachines provided with maintenance functions, e.g., for examination and maintenance of abnormal conditions in heat exchangers, piping systems or the like. The initial target is set at establishment of basic technologies for the micromachines, in consideration of the available technologies. The R and D activities are directed to (1) microcapsules for, e.g., micro power generators, (2) mother machines having controlling and instructing functions, (3) non-cabled examination modules, (4) cabled examination modules, and (5) total systems. The item (1) involves the micro power generators, and mechanisms of signal transmission, flaw finding and driving/suspension; the item (2) mechanisms of micro-optics and connection, group controlling, microbatteries, action type controlling, and artificial muscles; the item (3) expansion/contraction type transfer mechanisms, light energy supply, micro visual sensation, function connection, and concerted controlling; the item (4) tubular manipulators, and mechanisms of light-aided power generation and voltage elevation; and the item (5) maintenance and micromachine systems. (NEDO)

  17. A micromachined calorimetric gas sensor: an application of electrodeposited nanostructured palladium for the detection of combustible gases.

    Science.gov (United States)

    Bartlett, Philip N; Guerin, Samuel

    2003-01-01

    Palladium films with regular nanoarchitectures were electrochemically deposited from the hexagonal (H1) lyotropic liquid crystalline phase of the nonionic surfactant octaethyleneglycol monohexadecyl ether (C16EO8) onto micromachined silicon hotplate structures. The H1-e Pd films were shown to have high surface areas (approximately 28 m2 g(-1)) and to act as effective and stable catalysts for the detection of methane in air on heating to 500 degrees C. The response of the H1-e Pd-coated planar pellistors was found to be linearly proportional to the concentration of methane between 0 and 2.5% in air with a detection limit below 0.125%. Our results show that the electrochemical deposition of nanostructured metal films offers a promising approach to the fabrication of micromachined calorimetric gas sensors for combustible gases.

  18. Simulation of the Mitra 15 micro-machine on IBM 360/91. Microprogramming of the fast Fourier transform

    International Nuclear Information System (INIS)

    Augustides, Jean

    1973-01-01

    As computing time did not allow working in real time, and as different methods had been proposed to reduce the computing time (the Cooley-Tuckey method, the use of specific FFT processors), this thesis proposes an intermediate solution, between the entirely programmed solution and the entirely cabled solution. After some generalities on micro-programming (definition, history, benefits and drawbacks, perspectives), the author reports the micro-programming of the Mitra 15 micro-machine: description of the machine, memory, command memory and associated circuits, interruptions and suspensions, descriptions of micro-statements, execution of a micro-statement. Programs and subroutines developed for the modelling of Mitra 15 micro-machine on IBM 360/91 are presented. Then, the author reports the micro-programming of the fast Fourier transform: theory, program description, and test

  19. The group delay and suppression pattern of the cochlear microphonic potential recorded at the round window.

    Directory of Open Access Journals (Sweden)

    Wenxuan He

    Full Text Available BACKGROUND: It is commonly assumed that the cochlear microphonic potential (CM recorded from the round window (RW is generated at the cochlear base. Based on this assumption, the low-frequency RW CM has been measured for evaluating the integrity of mechanoelectrical transduction of outer hair cells at the cochlear base and for studying sound propagation inside the cochlea. However, the group delay and the origin of the low-frequency RW CM have not been demonstrated experimentally. METHODOLOGY/PRINCIPAL FINDINGS: This study quantified the intra-cochlear group delay of the RW CM by measuring RW CM and vibrations at the stapes and basilar membrane in gerbils. At low sound levels, the RW CM showed a significant group delay and a nonlinear growth at frequencies below 2 kHz. However, at high sound levels or at frequencies above 2 kHz, the RW CM magnitude increased proportionally with sound pressure, and the CM phase in respect to the stapes showed no significant group delay. After the local application of tetrodotoxin the RW CM below 2 kHz became linear and showed a negligible group delay. In contrast to RW CM phase, the BM vibration measured at location ∼2.5 mm from the base showed high sensitivity, sharp tuning, and nonlinearity with a frequency-dependent group delay. At low or intermediate sound levels, low-frequency RW CMs were suppressed by an additional tone near the probe-tone frequency while, at high sound levels, they were partially suppressed only at high frequencies. CONCLUSIONS/SIGNIFICANCE: We conclude that the group delay of the RW CM provides no temporal information on the wave propagation inside the cochlea, and that significant group delay of low-frequency CMs results from the auditory nerve neurophonic potential. Suppression data demonstrate that the generation site of the low-frequency RW CM shifts from apex to base as the probe-tone level increases.

  20. Assistive technology evaluations: Remote-microphone technology for children with Autism Spectrum Disorder.

    Science.gov (United States)

    Schafer, Erin C; Wright, Suzanne; Anderson, Christine; Jones, Jessalyn; Pitts, Katie; Bryant, Danielle; Watson, Melissa; Box, Jerrica; Neve, Melissa; Mathews, Lauren; Reed, Mary Pat

    The goal of this study was to conduct assistive technology evaluations on 12 children diagnosed with Autism Spectrum Disorder (ASD) to evaluate the potential benefits of remote-microphone (RM) technology. A single group, within-subjects design was utilized to explore individual and group data from functional questionnaires and behavioral test measures administered, designed to assess school- and home-based listening abilities, once with and once without RM technology. Because some of the children were unable to complete the behavioral test measures, particular focus was given to the functional questionnaires completed by primary teachers, participants, and parents. Behavioral test measures with and without the RM technology included speech recognition in noise, auditory comprehension, and acceptable noise levels. The individual and group teacher (n=8-9), parent (n=8-9), and participant (n=9) questionnaire ratings revealed substantially less listening difficulty when RM technology was used compared to the no-device ratings. On the behavioral measures, individual data revealed varied findings, which will be discussed in detail in the results section. However, on average, the use of the RM technology resulted in improvements in speech recognition in noise (4.6dB improvement) in eight children, higher auditory working memory and comprehension scores (12-13 point improvement) in seven children, and acceptance of poorer signal-to-noise ratios (8.6dB improvement) in five children. The individual and group data from this study suggest that RM technology may improve auditory function in children with ASD in the classroom, at home, and in social situations. However, variability in the data and the inability of some children to complete the behavioral measures indicates that individualized assistive technology evaluations including functional questionnaires will be necessary to determine if the RM technology will be of benefit to a particular child who has ASD. Copyright

  1. Automatic detection of whole night snoring events using non-contact microphone.

    Directory of Open Access Journals (Sweden)

    Eliran Dafna

    Full Text Available OBJECTIVE: Although awareness of sleep disorders is increasing, limited information is available on whole night detection of snoring. Our study aimed to develop and validate a robust, high performance, and sensitive whole-night snore detector based on non-contact technology. DESIGN: Sounds during polysomnography (PSG were recorded using a directional condenser microphone placed 1 m above the bed. An AdaBoost classifier was trained and validated on manually labeled snoring and non-snoring acoustic events. PATIENTS: Sixty-seven subjects (age 52.5 ± 13.5 years, BMI 30.8 ± 4.7 kg/m(2, m/f 40/27 referred for PSG for obstructive sleep apnea diagnoses were prospectively and consecutively recruited. Twenty-five subjects were used for the design study; the validation study was blindly performed on the remaining forty-two subjects. MEASUREMENTS AND RESULTS: To train the proposed sound detector, >76,600 acoustic episodes collected in the design study were manually classified by three scorers into snore and non-snore episodes (e.g., bedding noise, coughing, environmental. A feature selection process was applied to select the most discriminative features extracted from time and spectral domains. The average snore/non-snore detection rate (accuracy for the design group was 98.4% based on a ten-fold cross-validation technique. When tested on the validation group, the average detection rate was 98.2% with sensitivity of 98.0% (snore as a snore and specificity of 98.3% (noise as noise. CONCLUSIONS: Audio-based features extracted from time and spectral domains can accurately discriminate between snore and non-snore acoustic events. This audio analysis approach enables detection and analysis of snoring sounds from a full night in order to produce quantified measures for objective follow-up of patients.

  2. Design and preliminary testing of a MEMS microphone phased array for aeroacoustic testing of a small-scale wind turbine airfoil

    Energy Technology Data Exchange (ETDEWEB)

    Bale, A.; Orlando, S.; Johnson, D. [Waterloo Univ., ON (Canada). Wind Energy Group

    2010-07-01

    One of the barriers preventing the widespread utilization of wind turbines is the audible sound that they produce. Developing quieter wind turbines will increase the amount of available land onto which wind farms can be built. Noise emissions from wind turbines can be attributed to the aerodynamic effects between the turbine blades and the air surrounding them. A dominant source of these aeroacoustic emissions from wind turbines is known to originate at the trailing edges of the airfoils. This study investigated the flow physics of noise generation in an effort to reduce noise from small-scale wind turbine airfoils. The trailing edge noise was studied on scale-models in wind tunnels and applied to full scale conditions. Microphone phased arrays are popular research tools in wind tunnel aeroacoustic studies because they can measure and locate noise sources. However, large arrays of microphones can be prohibitively expensive. This paper presented preliminary testing of micro-electrical mechanical system (MEMS) microphones in phased arrays for aeroacoustic testing on a small wind turbine airfoil. Preliminary results showed that MEMS microphones are an acceptable low-cost alternative to costly condenser microphones. 19 refs., 1 tab., 11 figs.

  3. A practical implementation of microphone free-field comparison calibration according to the standard IEC 61094-8

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras Rosell, Antoni; Rasmussen, Knud

    2012-01-01

    . The two methodologies assume that the two microphones are exposed to the same sound pressure. This can be achieved by measuring the ratio of output voltages either sequentially or simultaneously. The first method requires a stable source to ensure that the sound pressure is approximately the same when....... A third method, consisting of a combination of the sequential and simultaneous methodologies, has also been investigated. Though the application of time selective techniques is not discussed, the experimental results indicate the immunity to unwanted reflections in the sequential and combined approaches...... while it may be necessary to apply these techniques in the simultaneous approach....

  4. Application of a circular 2D hard-sphere microphone array for higher-order Ambisonics auralization

    DEFF Research Database (Denmark)

    Weller, Tobias; Favrot, Sylvain Emmanuel; Buchholz, Jörg

    2011-01-01

    . The simulation results showed very good agreement with corresponding plane wave recordings in an anechoic chamber and thus, confirming the general applicability of the simulation framework. An overall preference listening test was performed to estimate the optimal array radius and amount of regularization, two...... (dependent) parameters that mainly determine the balance between low frequency directionality, signal coloration and microphone noise amplification. The different stimuli were created with the framework using different values for both the array radius and the regularization coefficient lambda. It was shown...

  5. The Effects of Hearing Aid Directional Microphone and Noise Reduction Processing on Listening Effort in Older Adults with Hearing Loss.

    Science.gov (United States)

    Desjardins, Jamie L

    2016-01-01

    Older listeners with hearing loss may exert more cognitive resources to maintain a level of listening performance similar to that of younger listeners with normal hearing. Unfortunately, this increase in cognitive load, which is often conceptualized as increased listening effort, may come at the cost of cognitive processing resources that might otherwise be available for other tasks. The purpose of this study was to evaluate the independent and combined effects of a hearing aid directional microphone and a noise reduction (NR) algorithm on reducing the listening effort older listeners with hearing loss expend on a speech-in-noise task. Participants were fitted with study worn commercially available behind-the-ear hearing aids. Listening effort on a sentence recognition in noise task was measured using an objective auditory-visual dual-task paradigm. The primary task required participants to repeat sentences presented in quiet and in a four-talker babble. The secondary task was a digital visual pursuit rotor-tracking test, for which participants were instructed to use a computer mouse to track a moving target around an ellipse that was displayed on a computer screen. Each of the two tasks was presented separately and concurrently at a fixed overall speech recognition performance level of 50% correct with and without the directional microphone and/or the NR algorithm activated in the hearing aids. In addition, participants reported how effortful it was to listen to the sentences in quiet and in background noise in the different hearing aid listening conditions. Fifteen older listeners with mild sloping to severe sensorineural hearing loss participated in this study. Listening effort in background noise was significantly reduced with the directional microphones activated in the hearing aids. However, there was no significant change in listening effort with the hearing aid NR algorithm compared to no noise processing. Correlation analysis between objective and self

  6. Sound Source Localization through 8 MEMS Microphones Array Using a Sand-Scorpion-Inspired Spiking Neural Network.

    Science.gov (United States)

    Beck, Christoph; Garreau, Guillaume; Georgiou, Julius

    2016-01-01

    Sand-scorpions and many other arachnids perceive their environment by using their feet to sense ground waves. They are able to determine amplitudes the size of an atom and locate the acoustic stimuli with an accuracy of within 13° based on their neuronal anatomy. We present here a prototype sound source localization system, inspired from this impressive performance. The system presented utilizes custom-built hardware with eight MEMS microphones, one for each foot, to acquire the acoustic scene, and a spiking neural model to localize the sound source. The current implementation shows smaller localization error than those observed in nature.

  7. Sound Source Localization Through 8 MEMS Microphones Array Using a Sand-Scorpion-Inspired Spiking Neural Network

    Directory of Open Access Journals (Sweden)

    Christoph Beck

    2016-10-01

    Full Text Available Sand-scorpions and many other arachnids perceive their environment by using their feet to sense ground waves. They are able to determine amplitudes the size of an atom and locate the acoustic stimuli with an accuracy of within 13° based on their neuronal anatomy. We present here a prototype sound source localization system, inspired from this impressive performance. The system presented utilizes custom-built hardware with eight MEMS microphones, one for each foot, to acquire the acoustic scene, and a spiking neural model to localize the sound source. The current implementation shows smaller localization error than those observed in nature.

  8. Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

    Science.gov (United States)

    Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

    2002-06-01

    The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

  9. Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

    International Nuclear Information System (INIS)

    Gu, E.; Jeon, C.W.; Choi, H.W.; Rice, G.; Dawson, M.D.; Illy, E.K.; Knowles, M.R.H.

    2004-01-01

    Gallium nitride (GaN) and sapphire are important materials for fabricating photonic devices such as high brightness light emitting diodes (LEDs). These materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high resolution processing and machining techniques for these materials is important in fabricating novel photonic devices. In this work, a repetitively pulsed UV copper vapour laser (255 nm) has been used to machine and dice sapphire, GaN and micro LED devices. Machining parameters were optimised so as to achieve controllable machining and high resolution. For sapphire, well-defined grooves 30 μm wide and 430 μm deep were machined. For GaN, precision features such as holes on a tens of micron length scale have been fabricated. By using this technique, compact micro LED chips with a die spacing 100 and a 430 μm thick sapphire substrate have been successfully diced. Measurements show that the performances of LED devices are not influenced by the UV laser machining. Our results demonstrate that the pulsed UV copper vapour laser is a powerful tool for micromachining and dicing of photonic materials and devices

  10. The Fantastic Voyage of the Trypanosome: A Protean Micromachine Perfected during 500 Million Years of Engineering

    Directory of Open Access Journals (Sweden)

    Timothy Krüger

    2018-02-01

    Full Text Available The human body is constantly attacked by pathogens. Various lines of defence have evolved, among which the immune system is principal. In contrast to most pathogens, the African trypanosomes thrive freely in the blood circulation, where they escape immune destruction by antigenic variation and incessant motility. These unicellular parasites are flagellate microswimmers that also withstand the harsh mechanical forces prevailing in the bloodstream. They undergo complex developmental cycles in the bloodstream and organs of the mammalian host, as well as the disease-transmitting tsetse fly. Each life cycle stage has been shaped by evolution for manoeuvring in distinct microenvironments. Here, we introduce trypanosomes as blueprints for nature-inspired design of trypanobots, micromachines that, in the future, could explore the human body without affecting its physiology. We review cell biological and biophysical aspects of trypanosome motion. While this could provide a basis for the engineering of microbots, their actuation and control still appear more like fiction than science. Here, we discuss potentials and challenges of trypanosome-inspired microswimmer robots.

  11. Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass

    Directory of Open Access Journals (Sweden)

    Rongguo Hou

    2018-01-01

    Full Text Available The ultrasonic vibration is used to enhance the capability of the abrasive water micromachining glass. And, the ultrasonic vibration is activated on the abrasive waterjet nozzle. The quality of the flow is improved, and the velocity of the abrasive is increased because of the addition of the ultrasonic energy. The relevant experimental results indicate that the erosion depth and the material volume removal of the glass are obviously increased when ultrasonic vibration is working. As for the influence of process parameters on the material removal of the glass such as vibration amplitude, system pressure, distance of the standoff, and abrasive size, the experimental results indicate that the system pressure and vibration contribute greatly to the glass material removal. Also, the erosion depth and the volume of material removal are increased with the increase in the vibration amplitude and system pressure. There are some uplifts found at the edge of erosion pit. Then, it can be inferred that the plastic method is an important material removal method during the machining process of ultrasonic vibration-assisted abrasive waterjet.

  12. Hypersonic force measurements using internal balance based on optical micromachined Fabry-Perot interferometry

    Science.gov (United States)

    Qiu, Huacheng; Min, Fu; Zhong, Shaolong; Song, Xin; Yang, Yanguang

    2018-03-01

    Force measurements using wind tunnel balance are necessary for determining a variety of aerodynamic performance parameters, while the harsh environment in hypersonic flows requires that the measurement instrument should be reliable and robust, in against strong electromagnetic interference, high vacuum, or metal (oxide) dusts. In this paper, we demonstrated a three-component internal balance for hypersonic aerodynamic force measurements, using novel optical micromachined Fabry-Perot interferometric (FPI) strain gauges as sensing elements. The FPI gauges were fabricated using Micro-Opto-Electro-Mechanical Systems (MOEMS) surface and bulk fabrication techniques. High-reflectivity coatings are used to form a high-finesse Fabry-Perot cavity, which benefits a high resolution. Antireflective and passivation coatings are used to reduce unwanted interferences. The FPI strain gauge based balance has been calibrated and evaluated in a Mach 5 hypersonic flow. The results are compared with the traditional technique using the foil resistive strain gauge balance, indicating that the proposed balance based on the MOEMS FPI strain gauge is reliable and robust and is potentially suitable for the hypersonic wind tunnel harsh environment.

  13. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement.

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-06-02

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes.

  14. A micromachined membrane-based active probe for biomolecular mechanics measurement

    Science.gov (United States)

    Torun, H.; Sutanto, J.; Sarangapani, K. K.; Joseph, P.; Degertekin, F. L.; Zhu, C.

    2007-04-01

    A novel micromachined, membrane-based probe has been developed and fabricated as assays to enable parallel measurements. Each probe in the array can be individually actuated, and the membrane displacement can be measured with high resolution using an integrated diffraction-based optical interferometer. To illustrate its application in single-molecule mechanics experiments, this membrane probe was used to measure unbinding forces between L-selectin reconstituted in a polymer-cushioned lipid bilayer on the probe membrane and an antibody adsorbed on an atomic force microscope cantilever. Piconewton range forces between single pairs of interacting molecules were measured from the cantilever bending while using the membrane probe as an actuator. The integrated diffraction-based optical interferometer of the probe was demonstrated to have floor for frequencies as low as 3 Hz with a differential readout scheme. With soft probe membranes, this low noise level would be suitable for direct force measurements without the need for a cantilever. Furthermore, the probe membranes were shown to have 0.5 µm actuation range with a flat response up to 100 kHz, enabling measurements at fast speeds.

  15. To study the effect of different electrolytes and their concentrations on electrochemical micromachining

    Science.gov (United States)

    Singh, Ramandeep

    2018-04-01

    The machining of materials on micro-meter and sub-micrometre is considered the technology of future. Due to challenging applications of biomedical and aerospace industries, the traditional manufacturing techniques lacks in dimensional accuracy. Thus for such industries, the technique that can control micron tolerances is Electrochemical Micromachining (EMM). Hard metals and alloys can also be machined by this technique. Thus to develop a novel EMM system setup and to investigate the effect of three different electrolytes i.e NaCl, NaNO3 and HCl with their different concentrations, the current study was conducted. Stainless Steel-304 and copper were chosen as the work piece material in the present study. Taguchi L18 orthogonal array was used for the best combination of experiment. According to the present investigation most prominent factor affecting the material removal (MR) comes out was electrolyte. HCl provides the better MR among other electrolytes i.e. NaNO3 and NaCl. The amount of MR increased with the increase in the concentration of electrolyte.

  16. Two Novel Measurements for the Drive-Mode Resonant Frequency of a Micromachined Vibratory Gyroscope

    Directory of Open Access Journals (Sweden)

    Ancheng Wang

    2013-11-01

    Full Text Available To investigate the drive-mode resonance frequency of a micromachined vibratory gyroscope (MVG, one needs to measure it accurately and efficiently. The conventional approach to measure the resonant frequency is by performing a sweep frequency test and spectrum analysis. The method is time-consuming and inconvenient because of the requirements of many test points, a lot of data storage and off-line analyses. In this paper, we propose two novel measurement methods, the search method and track method, respectively. The former is based on the magnitude-frequency characteristics of the drive mode, utilizing a one-dimensional search technique. The latter is based on the phase-frequency characteristics, applying a feedback control loop. Their performances in precision, noise resistivity and efficiency are analyzed through detailed simulations. A test system is implemented based on a field programmable gate array (FPGA and experiments are carried out. By comparing with the common approach, feasibility and superiorities of the proposed methods are validated. In particular, significant efficiency improvements are achieved whereby the conventional frequency method consumes nearly 5,000 s to finish a measurement, while only 5 s is needed for the track method and 1 s for the search method.

  17. Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

    Directory of Open Access Journals (Sweden)

    Lamia EL Fissi

    2014-12-01

    Full Text Available Ten picoseconds (200 kHz ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing several laser parameters on the resulting microstructural shapes and morphology. The micromachining rate has been observed to be strongly dependent on the operating parameters, such as the pulse fluence, the scan speed and the scan number. The results specifically indicate that ablation at low fluence and low speed scan tends to form a U-shaped cross-section, while a V-shaped profile can be obtained by using a high fluence and a high scan speed. The evolution of surface morphology revealed that laser pulses overlap in a range around 93% for both Lithium Niobate (LiNbO3 and Lithium Tantalate (LiTaO3 and 98% for AT-cut quartz can help to achieve optimal residual surface roughness.

  18. On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

    KAUST Repository

    Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; Sedky, Sherif; Soliman, Ezzeldin A.

    2016-01-01

    In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

  19. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  20. UV laser micromachining of piezoelectric ceramic using a pulsed Nd:YAG laser

    International Nuclear Information System (INIS)

    Zeng, D.W.; Xie, C.S.; Li, K.; Chan, H.L.W.; Choy, C.L.; Yung, K.C.

    2004-01-01

    UV laser (λ=355 nm) ablation of piezoelectric lead zirconate titanate (PZT) ceramics in air has been investigated under different laser parameters. It has been found that there is a critical pulse number (N=750). When the pulse number is smaller than the critical value, the ablation rate decreases with increasing pulse number. Beyond the critical value, the ablation rate becomes constant. The ablation rate and concentrations of O, Zr and Ti on the ablated surface increase with the laser fluence, while the Pb concentration decreases due to the selective evaporation of PbO. The loss of the Pb results in the formation of a metastable pyrochlore phase. ZrO 2 was detected by XPS in the ablated zone. Also, the concentrations of the pyrochlore phase and ZrO 2 increase with increasing laser fluence. These results clearly indicate that the chemical composition and phase structure in the ablated zone strongly depend on the laser fluence. The piezoelectric properties of the cut PZT ceramic samples completely disappear due to the loss of the Pb and the existence of the pyrochlore phase. After these samples were annealed at 1150 C for 1 h in a PbO-controlled atmosphere, their phase structure and piezoelectric properties were recovered again. Finally, 1-3 and concentric-ring 2-2 PZT/epoxy composites were fabricated by UV laser micromachining and their thickness modes were measured by impedance spectrum analysis and a d 33 meter. Both composites show high piezoelectric properties. (orig.)

  1. Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integration

    Science.gov (United States)

    Walewyns, Thomas; Reckinger, Nicolas; Ryelandt, Sophie; Pardoen, Thomas; Raskin, Jean-Pierre; Francis, Laurent A.

    2013-09-01

    The interest of using polyimide as a sacrificial and anchoring layer is demonstrated for post-processing surface micromachining and for the incorporation of metallic nanowires into microsystems. In addition to properties like a high planarization factor, a good resistance to most non-oxidizing acids and bases, and CMOS compatibility, polyimide can also be used as a mold for nanostructures after ion track-etching. Moreover, specific polyimide grades, such as PI-2611 from HD Microsystems™, involve a thermal expansion coefficient similar to silicon and low internal stress. The process developed in this study permits higher gaps compared to the state-of-the-art, limits stiction problems with the substrate and is adapted to various top-layer materials. Most metals, semiconductors or ceramics will not be affected by the oxygen plasma required for polyimide etching. Released structures with vertical gaps from one to several tens of μm have been obtained, possibly using multiple layers of polyimide. Furthermore, patterned freestanding nanowires have been synthesized with diameters from 20 to 60 nm and up to 3 μm in length. These results have been applied to the fabrication of two specific devices: a generic nanomechanical testing lab-on-chip platform and a miniaturized ionization sensor.

  2. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    International Nuclear Information System (INIS)

    Schwinkendorf, Jan-Patrick

    2012-05-01

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  3. An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

    International Nuclear Information System (INIS)

    Hung, Shao Hsuan; Hsieh, Hsin-Ta; John Su, Guo-Dung

    2008-01-01

    The design, fabrication and test results of an electromagnetic-actuated micromachined variable optical attenuator (VOA) are reported in this paper. Optical attenuation is achieved by moving a shutter into the light path between a pair of single mode fiber collimators. The shutter, consisting of a 500 µm × 1200 µm vertical micromirror, is monolithically integrated with an actuation flap. The micromirror was made by tetra-methyl ammonium hydroxide (TMAH) anisotropic wet etching with a sharp edge and a smooth reflecting surface. By arranging fiber collimators in different configurations, the reported VOA can be used as either normally-on or normally-off modes due to its relatively large shutter surface. The insertion loss of the VOA is 0.2 dB and 0.4 dB for normally-on and normally-off modes, respectively. Both optical and mechanical simulation models of the device were discussed, and the theoretical calculations based on these models offered an efficient way to predict the performance of the shutter-type VOA. The controllable attenuation range is approximately 40 dB with a driving voltage less than 0.5 V, and the driving power is less than 2 mW. A response time of 5 ms is achieved by applying proper driving waveform

  4. Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer

    Directory of Open Access Journals (Sweden)

    Xiaoping He

    2013-01-01

    Full Text Available Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence the buckling value is important in designing MEMS devices. In this study, the curvature in the proof mass of an accelerometer is modeled as a multilayered solid model. Modeling is performed according to the characteristics of the solid diffusion mechanism in the bulk-dissolved wafer process (BDWP based on the self-stopped etch technique. Moreover, the proposed multilayered solid model is established as an equivalent composite structure formed by a group of thin layers that are glued together. Each layer has a different Young’s modulus value and each undergoes different volume shrinkage strain owing to boron doping in silicon. Observations of five groups of proof mass blocks of accelerometers suggest that the theoretical model is effective in determining the buckling value of a fabricated structure.

  5. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

    Directory of Open Access Journals (Sweden)

    M. Cihan Çakır

    2016-09-01

    Full Text Available Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption–dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  6. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors.

    Science.gov (United States)

    Çakır, M Cihan; Çalışkan, Deniz; Bütün, Bayram; Özbay, Ekmel

    2016-09-29

    Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO) heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption-dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  7. On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

    KAUST Repository

    Sallam, Mai O.

    2016-12-19

    In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

  8. Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

    Directory of Open Access Journals (Sweden)

    Mohamed Sultan Mohamed Ali

    2014-07-01

    Full Text Available This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit’s resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/µm or more for a full out-of-plane travel range of 466 µm and an average actuation velocity of up to 155 µm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.

  9. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    Energy Technology Data Exchange (ETDEWEB)

    Schwinkendorf, Jan-Patrick

    2012-08-15

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  10. Development and Technical Validation of the Mobile Based Assistive Listening System: A Smartphone-Based Remote Microphone.

    Science.gov (United States)

    Lopez, Esteban Alejandro; Costa, Orozimbo Alves; Ferrari, Deborah Viviane

    2016-10-01

    The purpose of this research note is to describe the development and technical validation of the Mobile Based Assistive Listening System (MoBALS), a free-of-charge smartphone-based remote microphone application. MoBALS Version 1.0 was developed for Android (Version 2.1 or higher) and was coded with Java using Eclipse Indigo with the Android Software Development Kit. A Wi-Fi router with background traffic and 2 affordable smartphones were used for debugging and technical validation comprising, among other things, multicasting capability, data packet loss, and battery consumption. MoBALS requires at least 2 smartphones connected to the same Wi-Fi router for signal transmission and reception. Subscriber identity module cards or Internet connections are not needed. MoBALS can be used alone or connected to a hearing aid or cochlear implant via direct audio input. Maximum data packet loss was 99.28%, and minimum battery life was 5 hr. Other relevant design specifications and their implementation are described. MoBALS performed as a remote microphone with enhanced accessibility features and avoids overhead expenses by using already-available and affordable technology. The further development and technical revalidation of MoBALS will be followed by clinical evaluation with persons with hearing impairment.

  11. Identification of Noise Sources During Rocket Engine Test Firings and a Rocket Launch Using a Microphone Phased-Array

    Science.gov (United States)

    Panda, Jayanta; Mosher, Robert N.; Porter, Barry J.

    2013-01-01

    A 70 microphone, 10-foot by 10-foot, microphone phased array was built for use in the harsh environment of rocket launches. The array was setup at NASA Wallops launch pad 0A during a static test firing of Orbital Sciences' Antares engines, and again during the first launch of the Antares vehicle. It was placed 400 feet away from the pad, and was hoisted on a scissor lift 40 feet above ground. The data sets provided unprecedented insight into rocket noise sources. The duct exit was found to be the primary source during the static test firing; the large amount of water injected beneath the nozzle exit and inside the plume duct quenched all other sources. The maps of the noise sources during launch were found to be time-dependent. As the engines came to full power and became louder, the primary source switched from the duct inlet to the duct exit. Further elevation of the vehicle caused spilling of the hot plume, resulting in a distributed noise map covering most of the pad. As the entire plume emerged from the duct, and the ondeck water system came to full power, the plume itself became the loudest noise source. These maps of the noise sources provide vital insight for optimization of sound suppression systems for future Antares launches.

  12. Si Micro-turbine by Proton BeamWriting and Porous Silicon Micromachining

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.; Fekete, Z.

    2008-01-01

    Complete text of publication follows. A 3D Si micro-turbine characterized by high aspect ratio vertical walls was formed by the combination of proton beam writing (PBW) and subsequent selective porous Si (PS) etching. Crystal damages generated by the implanted protons result in increased resistivity, thereby limit or even prevent the current to flow through the implanted area during electrochemical etching. Characteristic feature of the proposed process is that the shape of the micro electromechanical (MEMS) components is defined by two implantation energies. A higher energy is applied for defining the housing of the device while the lower energy is used to write the moving components. The implantation energies were selected such as to result appropriate difference between the two projected ranges, thereby providing structures with different height after development. The thickness of the walls of the moving component and the isotropic etching profile of the electrochemical PS formation was also taken into consideration. The electrochemical etching is driven until the sacrificial PS layer completely under etches the moving components, but the etch-front does not reach the bottom of the housing. Therefore, the dissolution of PS results in a ready-to-operate device with a released moving component embedded in the cavity of the housing. The operation of the encapsulated device fabricated by the two-energy implantation is successfully demonstrated (Fig. 1). Rotation speed of the device is estimated in the range of thousands rpm, however, further analysis of the novel structure optimized for performance and MEMS compatible assembly will be done and precise characteristics will be determined by adequate optical read-out method. The feasibility of Proton Beam Writing combined with Porous Si Micromachining and conventional Si processing steps was successfully demonstrated by fabricating Si microturbine chip. The aligned, two-energy proton beam implantation can provide high

  13. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout

    International Nuclear Information System (INIS)

    Dalola, Simone; Ferrari, Vittorio; Marioli, Daniele

    2012-01-01

    In this paper a dual-chip system for inclination measurement is presented. It consists of a MEMS (microelectromechanical system) piezoresistive accelerometer manufactured in silicon bulk micromachining and a CMOS (complementary metal oxide semiconductor) ASIC (application specific integrated circuit) interface designed for resistive-bridge sensors. The sensor is composed of a seismic mass symmetrically suspended by means of four flexure beams that integrate two piezoresistors each to detect the applied static acceleration, which is related to inclination with respect to the gravity vector. The ASIC interface is based on a relaxation oscillator where the frequency and the duty cycle of a rectangular-wave output signal are related to the fractional bridge imbalance and the overall bridge resistance of the sensor, respectively. The latter is a function of temperature; therefore the sensing element itself can be advantageously used to derive information for its own thermal compensation. DC current excitation of the sensor makes the configuration unaffected by wire resistances and parasitic capacitances. Therefore, a modular system results where the sensor can be placed remotely from the electronics without suffering accuracy degradation. The inclination measurement system has been characterized as a function of the applied inclination angle at different temperatures. At room temperature, the experimental sensitivity of the system results in about 148 Hz/g, which corresponds to an angular sensitivity around zero inclination angle of about 2.58 Hz deg −1 . This is in agreement with finite element method simulations. The measured output fluctuations at constant temperature determine an equivalent resolution of about 0.1° at midrange. In the temperature range of 25–65 °C the system sensitivity decreases by about 10%, which is less than the variation due to the microsensor alone thanks to thermal compensation provided by the current excitation of the bridge and the

  14. Novel in situ mechanical testers to enable integrated metal surface micro-machines.

    Energy Technology Data Exchange (ETDEWEB)

    Follstaedt, David Martin; de Boer, Maarten Pieter; Kotula, Paul Gabriel; Hearne, Sean Joseph; Foiles, Stephen Martin; Buchheit, Thomas Edward; Dyck, Christopher William

    2005-10-01

    The ability to integrate metal and semiconductor micro-systems to perform highly complex functions, such as RF-MEMS, will depend on developing freestanding metal structures that offer improved conductivity, reflectivity, and mechanical properties. Three issues have prevented the proliferation of these systems: (1) warpage of active components due to through-thickness stress gradients, (2) limited component lifetimes due to fatigue, and (3) low yield strength. To address these issues, we focus on developing and implementing techniques to enable the direct study of the stress and microstructural evolution during electrodeposition and mechanical loading. The study of stress during electrodeposition of metal thin films is being accomplished by integrating a multi-beam optical stress sensor into an electrodeposition chamber. By coupling the in-situ stress information with ex-situ microstructural analysis, a scientific understanding of the sources of stress during electrodeposition will be obtained. These results are providing a foundation upon which to develop a stress-gradient-free thin film directly applicable to the production of freestanding metal structures. The issues of fatigue and yield strength are being addressed by developing novel surface micromachined tensile and bend testers, by interferometry, and by TEM analysis. The MEMS tensile tester has a ''Bosch'' etched hole to allow for direct viewing of the microstructure in a TEM before, during, and after loading. This approach allows for the quantitative measurements of stress-strain relations while imaging dislocation motion, and determination of fracture nucleation in samples with well-known fatigue/strain histories. This technique facilitates the determination of the limits for classical deformation mechanisms and helps to formulate a new understanding of the mechanical response as the grain sizes are refined to a nanometer scale. Together, these studies will result in a science

  15. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications.

    Science.gov (United States)

    Tommasi, Alessio; Cocuzza, Matteo; Perrone, Denis; Pirri, Candido Fabrizio; Mosca, Roberto; Villani, Marco; Delmonte, Nicola; Zappettini, Andrea; Calestani, Davide; Marasso, Simone Luigi

    2016-12-30

    In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  16. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  17. Theoretical modeling and equivalent electric circuit of a bimorph piezoelectric micromachined ultrasonic transducer.

    Science.gov (United States)

    Sammoura, Firas; Kim, Sang-Gook

    2012-05-01

    An electric circuit model for a circular bimorph piezoelectric micromachined ultrasonic transducer (PMUT) was developed for the first time. The model was made up of an electric mesh, which was coupled to a mechanical mesh via a transformer element. The bimorph PMUT consisted of two piezoelectric layers of the same material, having equal thicknesses, and sandwiched between three thin electrodes. The piezoelectric layers, having the same poling axis, were biased with electric potentials of the same magnitude but opposite polarity. The strain mismatches between the two layers created by the converse piezoelectric effect caused the membrane to vibrate and, hence, transmit a pressure wave. Upon receiving the echo of the acoustic wave, the membrane deformation led to the generation of electric charges as a result of the direct piezoelectric phenomenon. The membrane angular velocity and electric current were related to the applied electric field, the impinging acoustic pressure, and the moment at the edge of the membrane using two canonical equations. The transduction coefficients from the electrical to the mechanical domain and vice-versa were shown to be bilateral and the system was shown to be reversible. The circuit parameters of the derived model were extracted, including the transformer ratio, the clamped electric impedance, the spring-softening impedance, and the open-circuit mechanical impedance. The theoretical model was fully examined by generating the electrical input impedance and average plate displacement curves versus frequency under both air and water loading conditions. A PMUT composed of piezoelectric material with a lossy dielectric was also investigated and the maximum possible electroacoustical conversion efficiency was calculated.

  18. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alessio Tommasi

    2016-12-01

    Full Text Available In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  19. Micromachined Si channel width and tortuosity on human osteoblast cell attachment and proliferation

    International Nuclear Information System (INIS)

    Leber, Christopher; Choi, Hongsoo; Bose, Susmita; Bandyopadhyay, Amit

    2010-01-01

    In this study, influence of coating chemistry, channel width and tortuosity of various two-dimensional micro-channels were explored on micromachined Si using osteoblast precursor cells line 1 (OPC1). The rationale for our study is to delineate the influence of different porosity parameters on bone cell attachment and proliferation in vitro. Channel widths of 100, 200, 300, 400, and 600 μm; channel bends of 0, 1, and 2 right angles; and gold and silicon dioxide coatings on single-crystal Si were studied. Experiments were conducted with channel tops under glass covered and uncovered conditions keeping the channel depth at 220 μm. Independent samples were evaluated using SEM imaging and MTT assay to measure bone cell morphology and quantity. Images were taken of micro-channels and exterior chambers at 50x, 500x, 1000x, and 5000x magnifications. Channel and chamber cell densities were scored as follows: bare (score = 0), scattered (1), limited (2), abundant (3), and overflowing (4). Samples were then scored and statistically analyzed for major differences. In general, OPC1 cells proliferated at least 5% or better based on cell numbers under uncovered conditions than glass covered. Channel widths of 100 μm largely prohibited cell proliferation and diffusion by narrow path inhibition with the lowest average score of 1.17. Among channel bends of 0, 1, and 2 right angles, an increase in micro-channel tortuosity from 0-2 bends amplified OPC1 cell growth upwards of ∼ 6.6%. A one-way ANOVA showed significant differences in cell quantity for alternating channel tortuosity at a significance level of p < 0.05. No preference was found for gold or silicon dioxide coatings on Si for bone cell proliferation.

  20. Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

    International Nuclear Information System (INIS)

    Sakai, T.; Yasuda, R.; Iikura, H.; Nojima, T.; Matsubayashi, M.; Kada, W.; Kohka, M.; Satoh, T.; Ohkubo, T.; Ishii, Y.; Takano, K.

    2013-01-01

    Proton beam writing is a direct-write technique and a promising method for the micromachining of commodity plastics such as acrylic resins. Herein, we describe the fabrication of microscopic devices made from a relatively thick (∼75 μm) acrylic sheet using proton beam writing. In addition, a software package that converts image pixels into coordinates data was developed, and the successful fabrication of a very fine jigsaw puzzle was achieved. The size of the jigsaw puzzle pieces was 50 × 50 μm. For practical use, a prototype of a line and space test-chart was also successfully fabricated for the determination of spatial resolution in neutron radiography