WorldWideScience

Sample records for advanced micromachined microphone

  1. Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures

    OpenAIRE

    Hall, Neal A.; Okandan, Murat; Littrell, Robert; Bicen, Baris; Degertekin, F. Levent

    2008-01-01

    In many micromachined sensors the thin (2–10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low thermal noise levels. Finite-element based modeling procedures based on 2-D discretization of...

  2. Wideband micromachined microphones with radio frequency detection

    Science.gov (United States)

    Hansen, Sean Thomas

    There are many commercial, scientific, and military applications for miniature wideband acoustic sensors, including monitoring the condition or wear of equipment, collecting scientific data, and identifying and localizing military targets. The application of semiconductor micromachining techniques to sensor fabrication has the potential to transform acoustic sensing with small, reproducible, and inexpensive silicon-based microphones. However, such sensors usually suffer from limited bandwidth and from non-uniformities in their frequency response due to squeeze-film damping effects and narrow air gaps. Furthermore, they may be too fragile to be left unattended in a humid or dusty outdoor environment. Silicon microphones that incorporate capacitive micromachined ultrasonic transducer membranes overcome some of the drawbacks of conventional microphones. These micromachined membranes are small and robust enough to be vacuum-sealed, and can withstand atmospheric pressure and submersion in water. In addition, the membrane mechanical response is flat from dc up to ultrasonic frequencies, resulting in a wideband sensor for accurate spectral analysis of acoustic signals. However, a sensitive detection scheme is necessary to detect the small changes in membrane displacement that result from using smaller, stiffer membranes than do conventional microphones. We propose a radio frequency detection technique, in which the capacitive membranes are incorporated into a transmission line. Variations in membrane capacitance due to impinging sound pressure are sensed through the phase variations of a carrier signal that propagates along the line. This dissertation examines the design, fabrication, modeling, and experimental measurements of wideband micromachined microphones using sealed ultrasonic membranes and RF detection. Measurements of fabricated microphones demonstrate less than 0.5 dB variation in their output responses between 0.1 Hz to 100 kHz under electrostatic actuation of

  3. A surface-micromachined capacitive microphone with improved sensitivity

    International Nuclear Information System (INIS)

    We present a surface-micromachined capacitive microphone with a membrane center hole and back-plate supports. The proposed membrane center hole reduces air damping at the center of the membrane and increases the sensitivity and frequency response. The back-plate supports allow for a deep back-chamber and prevent deformation of the back-plate. The proposed microelectromechanical-system (MEMS) microphone is fabricated using fully CMOS-compatible processes. The fabricated MEMS microphone has a membrane 500 µm in diameter and a center hole 30 µm in diameter. A deep back-chamber with a depth of 100 µm is formed by the back-plate supporting structures. During fabrication, the residual stress of the membrane is minimized using PECVD silicon nitride inserted in the metal membrane. The measured residual stress of the sensing membrane is 14.8 MPa. Acoustic measurements show that the sensitivity of the microphone is −49.1 dBV Pa−1 @1 kHz at a 12 V dc bias voltage, which is in good agreement with the calculated value. (paper)

  4. Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback

    Science.gov (United States)

    Bicen, Baris

    Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure ports. Novel, micromachined biomimetic microphone diaphragms are shown to provide high sensitivity to pressure gradients on one side of the diaphragm with low thermal mechanical noise. These structures have a dominant mode shape with see-saw like motion in the audio band, responding to pressure gradients as well as spurious higher order modes sensitive to pressure. In this dissertation, integration of a diffraction based optical detection method with these novel diaphragm structures to implement a low noise optical pressure gradient microphone is described and experimental characterization results are presented, showing 36 dBA noise level with 1mm port spacing, nearly an order of magnitude better than the current gradient microphones. The optical detection scheme also provides electrostatic actuation capability from both sides of the diaphragm separately which can be used for active force feedback. A 4-port electromechanical equivalent circuit model of this microphone with optical readout is developed to predict the overall response of the device to different acoustic and electrostatic excitations. The model includes the damping due to complex motion of air around the microphone diaphragm, and it calculates the detected optical signal on each side of the diaphragm as a combination of two separate dominant vibration modes. This equivalent circuit model is verified by experiments and used to predict the microphone response with different force feedback schemes. Single sided force feedback is used for active damping to improve the linearity and the frequency response of the microphone. Furthermore, it is shown that using two sided force feedback one can significantly suppress

  5. Bulk micro-machined wide-band aero-acoustic microphone and its application to acoustic ranging

    International Nuclear Information System (INIS)

    A wide-band aero-acoustic microphone was realized using a bulk micro-machining process based on the deep reactive-ion etching of silicon. The sensing diaphragm is completely sealed, thus eliminating the loss of low-frequency response resulting from pressure equalization through the release etch-holes present on the diaphragm of a previously reported microphone implemented using a surface-micro-machining process. A dynamic sensitivity of ∼0.33 µV/V/Pa was estimated using an acoustic shockwave (‘N-wave’) generated using a custom-built high-voltage electrical spark-discharge system. This value is comparable to the effective static sensitivity of ∼0.28 µV/V/Pa measured using a commercial nano-indenter system. The response of the microphone is relatively flat from 6 to 500 kHz, with a resonance frequency of ∼715 kHz. An array of three microphones was also constructed and tested to demonstrate the application of these microphones to the localization of high frequency and short duration acoustic sources. (paper)

  6. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  7. Micromachining.

    Science.gov (United States)

    Park, Bob; Lamson, Bob; Lowell, Dave

    2002-03-01

    Components and features can be made in a number of ways. This article describes the different micromachining processes and what they can achieve in terms of precision, repeatability and cost savings. PMID:11984992

  8. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  9. Advanced micromachining of concave microwells for long term on-chip culture of multicellular tumor spheroids.

    Science.gov (United States)

    Liu, Tianqing; Chien, Chia-Chi; Parkinson, Luke; Thierry, Benjamin

    2014-06-11

    A novel approach based on advanced micromachining is demonstrated to fabricate concave microwell arrays for the formation of high quality multicellular tumor spheroids. Microfabricated molds were prepared using a state-of-the-art CNC machining center, containing arrays of 3D convex micropillars with size ranging from 150 μm to 600 μm. Microscopic imaging of the micropillars machined on the mold showed smooth, curved microfeatures of a dramatic 3D shape. Agarose microwells could be easily replicated from the metallic molds. EMT-6 tumor cells seeded in the primary macrowell sedimented efficiently to the bottom of the concave microwells and formed multicellular spheroids within 48 h. Dense and homogeneous multicellular spheroids were obtained after 10 days of culture, confirming the suitability of the proposed approach. To facilitate long term spheroid culture and reliable on-chip drug assay, polydimethylsiloxane microwells were also replicated from the metallic molds. A solvent swelling method was adapted and optimized to Pluronic F127 towards physically entrapping the block copolymer molecules within the polydimethylsiloxane network and in turn to improve long term cell-binding resistance. Homogeneous multicellular spheroids were efficiently formed in the concave microwells and on-chip drug assays could be reliably carried out using curcumin as a model anti-cancer drug. Advanced micromachining provides an excellent technological solution to the fabrication of high quality concave microwells. PMID:24773458

  10. Silicon Micromachining

    Science.gov (United States)

    Elwenspoek, Miko; Jansen, Henri V.

    2004-08-01

    This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

  11. Calibration of High Frequency MEMS Microphones

    Science.gov (United States)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  12. Micromachining of electret materials, advantages and possibilities

    OpenAIRE

    Voorthuyzen, J.A.; Bergveld, P.

    1988-01-01

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. ...

  13. Advances in Femtosecond Micromachining and Inscription of Micro and Nano Photonic Devices

    OpenAIRE

    Smith, Graham N; Kalli, Kyriacos; Sugden, Kate

    2010-01-01

    The use of focussed femtosecond laser pulses to fundamentally change materials through the interaction of the pulse and material offers new opportunities in device design. This is especially true for fabrication of intricate microstructures within the bulk volume of optically transparent glassy or polymeric materials. But it also can give significant advantages for the micromachining of surface structures in opaque materials in terms of feature size and aspect ratio. Although femtosecond lase...

  14. Wide-bandwidth silicon nitride membrane microphones

    Science.gov (United States)

    Cunningham, Brian T.; Bernstein, Jonathan J.

    1997-09-01

    Small, low cost microphones with high sensitivity at frequencies greater than 20 KHz are desired for applications such as ultrasonic imaging and communication links. To minimize stray capacitance between the microphone and its amplifier circuit, process compatibility between the microphone and on-chip circuitry is also desired to facilitate integration. In this work, we have demonstrated micromachined microphones packaged with hybrid JFET amplifier circuitry with frequency response extending to 100 KHz, and voltage sensitivity of approximately 2.0 mV/Pa from 100 Hz to 10 KHz, and 16.5 mV/Pa at 30 KHz with a bias voltage of 8.0 V. The microphones are fabricated with membranes and fixed backplates made of low temperature plasma-enhanced chemical vapor deposited (PECVD) silicon nitride. Because the maximum temperature of the fabrication process is 300 degrees Celsius, microphones may be built on silicon wafers from any commercial CMOS foundry without affecting transistor characteristics, allowing integration with sophisticated amplifier circuitry. Low stress silicon nitride deposition was used to produce membranes up to 2.0 mm diameter and 0.5 micrometer thickness with plus or minus 0.10 micrometer flatness. The excellent planarity of both the diaphragm and the backplate, combined with a narrow sense gap (approximately 2 micrometers) results in high output capacitance (up to 6.0 pF). The high output capacitance results in noise spectral density which is approximately 3x lower than silicon diaphragms microphones previously fabricated by the authors. Diaphragms with corrugations were fabricated to relive tensile stress, to increase deflection per unit pressure and to increase deflection linearity with pressure.

  15. Microphone array proccesing

    OpenAIRE

    Navarro Contreras, Héctor Ángel

    2010-01-01

    Microphone arrays consist of multiple microphones functioning as a single directional input device: essentially, an acoustic antenna. Using sound propagation principles, the principal sound sources in an environment can be spatially located. Distinguishing sounds based on the spatial location of their source is achieved by filtering and combining the individual microphone signals. The location of the principal sounds sources may be determined dynamically by analyzing peaks i...

  16. Dynamic Pressure Difference Microphones

    Science.gov (United States)

    Werner, E.

    A microphone with a diaphragm that is exposed to the sound field only on one side responds essentially to the sound pressure. This quantity is a scalar, and thus, pressure microphones are essentially omnidirectional (see Chapter 66). However, directional microphones are useful because they make it possible to focus on a source and suppress background noise from other directions. Most directional microphones respond to the gradient of the sound pressure, to combinations of the sound pressure and its gradient, or to combinations of higher order spatial derivatives of the sound pressure.

  17. Ultrasensitive directional microphone arrays for military operations in urban terrain.

    Energy Technology Data Exchange (ETDEWEB)

    Hall, Neal A.; Peterson, Kenneth Allen; Parker, Eric Paul; Resnick, Paul James; Okandan, Murat; Serkland, Darwin Keith

    2007-11-01

    Acoustic sensing systems are critical elements in detection of sniper events. The microphones developed in this project enable unique sensing systems that benefit significantly from the enhanced sensitivity and extremely compact foot-print. Surface and bulk micromachining technologies developed at Sandia have allowed the design, fabrication and characterization of these unique sensors. We have demonstrated sensitivity that is only available in 1/2 inch to 1 inch studio reference microphones--with our devices that have only 1 to 2mm diameter membranes in a volume less than 1cm{sup 3}.

  18. Multilayer graphene condenser microphone

    Science.gov (United States)

    Todorović, Dejan; Matković, Aleksandar; Milićević, Marijana; Jovanović, Djordje; Gajić, Radoš; Salom, Iva; Spasenović, Marko

    2015-12-01

    Vibrating membranes are the cornerstone of acoustic technology, forming the backbone of modern loudspeakers and microphones. Acoustic performance of a condenser microphone is derived mainly from the membrane’s size, surface mass and achievable static tension. The widely studied and available nickel has been a dominant membrane material for professional microphones for several decades. In this paper we introduce multilayer graphene as a membrane material for condenser microphones. The graphene device outperforms a high end commercial nickel-based microphone over a significant part of the audio spectrum, with a larger than 10 dB enhancement of sensitivity. Our experimental results are supported with numerical simulations, which also show that a 300 layer thick graphene membrane under maximum tension would offer excellent extension of the frequency range, up to 1 MHz.

  19. Microphone arrays fundamentals

    OpenAIRE

    Embrechts, Jean-Jacques

    2011-01-01

    Microphone arrays are essentially directional sensors. They are therefore mainly used for locating, identifying, isolating, measuring and recording individual sound sources. The main principles governing the directivity of microphone arrays are reviewed: phase differences between signals create constructive and destructive interferences, depending on the direction of the sound source. Moreover, signal processing is applied to provide “beamforming”, i.e. beam shaping and steering. Contrary to ...

  20. Advanced measurement and analysis of surface textures produced by micro-machining processes

    International Nuclear Information System (INIS)

    Surface texture of a part or a product has significant effects on its functionality, physical-mechanical properties and visual appearance. In particular for miniature products, the implication of surface quality becomes critical owing to the presence of geometrical features with micro/nano-scale dimensions. Qualitative and quantitative assessments of surface texture are carried out predominantly by profile parameters, which are often insufficient to address the contribution of constituent spatial components with varied amplitudes and wavelengths. In this context, this article presents a novel approach for advanced measurement and analysis of profile average roughness (Ra) and its spatial distribution at different wavelength intervals. The applicability of the proposed approach was verified for three different surface topographies prepared by grinding, laser micro-polishing and micro-milling processes. From the measurement and analysis results, Ra(λ) spatial distribution was found to be an effective measure of revealing the contributions of various spatial components within specific wavelength intervals towards formation of the entire surface profile. In addition, the approach was extended to the measurement and analysis of areal average roughness Sa(λ) spatial distribution within different wavelength intervals. Besides, the proposed method was demonstrated to be a useful technique in developing a functional correlation between a manufacturing process and its corresponding surface profile. (paper)

  1. Optical Micromachining

    Science.gov (United States)

    1998-01-01

    Under an SBIR (Small Business Innovative Research) with Marshall Space Flight Center, Potomac Photonics, Inc., constructed and demonstrated a unique tool that fills a need in the area of diffractive and refractive micro-optics. It is an integrated computer-aided design and computer-aided micro-machining workstation that will extend the benefits of diffractive and micro-optic technology to optical designers. Applications of diffractive optics include sensors and monitoring equipment, analytical instruments, and fiber optic distribution and communication. The company has been making diffractive elements with the system as a commercial service for the last year.

  2. Design and fabrication of a silicon miniature condenser microphone

    Institute of Scientific and Technical Information of China (English)

    CHEN Jing; LIU Litian; LI Zhijian; TAN Zhimin; MA Jun; LI Boquan

    2001-01-01

    Micromachining miniature microphone is one of the most challenging tasks in research and development today. For micromachining membrane, there is a significant internal (residual) stress, which strongly decreases the mechanical sensitivity of membrane. As predicted by theoretical analysis and numerical simulation, a corrugated diaphragm can greatly increase the mechanical sensitivity of the microphone diaphragms due to the reduction of the initial stress effect without changing the process conditions. A silicon condenser miniature microphone with corrugated diaphragm has been designed, fabricated and tested. The fabrication process is simple, efficient and fully compatible with standard IC process. Wafer level measurement has been carried out. An open circuit sensitivity of 40 my/Pa up to 7 kHz could be achieved under a low bias voltage of 10 V with only 1.5 × 1.5 mm2 chip area. The preamplifier and subsequent signal process circuits are expected to be integrated in the same chip to make a complete micro-acoustic system.

  3. Rocket Motor Microphone Investigation

    Science.gov (United States)

    Pilkey, Debbie; Herrera, Eric; Gee, Kent L.; Giraud, Jerom H.; Young, Devin J.

    2010-01-01

    At ATK's facility in Utah, large full-scale solid rocket motors are tested. The largest is a five-segment version of the reusable solid rocket motor, which is for use on the Ares I launch vehicle. As a continuous improvement project, ATK and BYU investigated the use of microphones on these static tests, the vibration and temperature to which the instruments are subjected, and in particular the use of vent tubes and the effects these vents have at low frequencies.

  4. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  5. Cochlear microphonic broad tuning curves

    Science.gov (United States)

    Ayat, Mohammad; Teal, Paul D.; Searchfield, Grant D.; Razali, Najwani

    2015-12-01

    It is known that the cochlear microphonic voltage exhibits much broader tuning than does the basilar membrane motion. The most commonly used explanation for this is that when an electrode is inserted at a particular point inside the scala media, the microphonic potentials of neighbouring hair cells have different phases, leading to cancelation at the electrodes location. In situ recording of functioning outer hair cells (OHCs) for investigating this hypothesis is exceptionally difficult. Therefore, to investigate the discrepancy between the tuning curves of the basilar membrane and those of the cochlear microphonic, and the effect of phase cancellation of adjacent hair cells on the broadness of the cochlear microphonic tuning curves, we use an electromechanical model of the cochlea to devise an experiment. We explore the effect of adjacent hair cells (i.e., longitudinal phase cancellation) on the broadness of the cochlear microphonic tuning curves in different locations. The results of the experiment indicate that active longitudinal coupling (i.e., coupling with active adjacent outer hair cells) only slightly changes the broadness of the CM tuning curves. The results also demonstrate that there is a π phase difference between the potentials produced by the hair bundle and the soma near the place associated with the characteristic frequency based on place-frequency maps (i.e., the best place). We suggest that the transversal phase cancellation (caused by the phase difference between the hair bundle and the soma) plays a far more important role than longitudinal phase cancellation in the broadness of the cochlear microphonic tuning curves. Moreover, by increasing the modelled longitudinal resistance resulting the cochlear microphonic curves exhibiting sharper tuning. The results of the simulations suggest that the passive network of the organ of Corti determines the phase difference between the hair bundle and soma, and hence determines the sharpness of the

  6. Silicon microphones - a Danish perspective

    DEFF Research Database (Denmark)

    Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick;

    1998-01-01

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations......, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising....

  7. Two clover-shaped piezoresistive silicon microphones for photo acoustic gas sensors

    Science.gov (United States)

    Grinde, C.; Sanginario, A.; Ohlckers, P. A.; Jensen, G. U.; Mielnik, M. M.

    2010-04-01

    Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and increase comfort and hence productivity in office buildings and schools. The photo aoustic principle offers very high sensitivity and selectivity when used for gas trace analysis. Current systems are too expensive and large for in-duct mounting. Here, the design, modeling, fabrication and characterization of two micromachined silicon microphones with piezoresistive readout designed for low cost photo acoustic gas sensors are presented. The microphones have been fabricated using a foundry MPW service. One of the microphones has been fabricated using an additional etching step that allows etching through membranes with large variations in thickness. To increase sensitivity and resolution, a design based on a released membrane suspended by four beams was chosen. The microphones have been characterized for frequencies up to 1 kHz and 100 Hz, respectively. Averaged sensitivities are measured to be 30 µV/(V × Pa) and 400 µV/(V × Pa). The presented microphones offer increased sensitivities compared to similar sensors.

  8. Two clover-shaped piezoresistive silicon microphones for photo acoustic gas sensors

    International Nuclear Information System (INIS)

    Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and increase comfort and hence productivity in office buildings and schools. The photo aoustic principle offers very high sensitivity and selectivity when used for gas trace analysis. Current systems are too expensive and large for in-duct mounting. Here, the design, modeling, fabrication and characterization of two micromachined silicon microphones with piezoresistive readout designed for low cost photo acoustic gas sensors are presented. The microphones have been fabricated using a foundry MPW service. One of the microphones has been fabricated using an additional etching step that allows etching through membranes with large variations in thickness. To increase sensitivity and resolution, a design based on a released membrane suspended by four beams was chosen. The microphones have been characterized for frequencies up to 1 kHz and 100 Hz, respectively. Averaged sensitivities are measured to be 30 µV/(V × Pa) and 400 µV/(V × Pa). The presented microphones offer increased sensitivities compared to similar sensors.

  9. Ultra Stable, Industrial Green Tailored Pulse Fiber Laser with Diffraction-limited Beam Quality for Advanced Micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Deladurantaye, P; Roy, V; Desbiens, L; Drolet, M; Taillon, Y; Galarneau, P, E-mail: pascal.deladurantaye@ino.ca [INO, 2740 rue Einstein, Quebec City, QC, G1P 4S4 (Canada)

    2011-02-01

    We report on a novel pulsed fiber laser platform providing pulse shaping agility at high repetition rates and at a wavelength of 532 nm. The oscillator is based on the direct modulation of a seed laser diode followed by a chain of fiber amplifiers. Advanced Large Mode Area (LMA) fiber designs as well as proprietary techniques to mitigate non-linear effects enable output energy per pulse up to 100 {mu}J at 1064 nm with diffraction-limited beam quality and narrow line widths suitable for efficient frequency conversion. Ultra stable pulses with tailored pulse shapes were demonstrated in the green region of the spectrum at repetition rates higher than 200 kHz. Pulse durations between 2.5 ns and 640 ns are available, as well as pulse to pulse dynamic shape selection at repetition rates up to 1 MHz. The pulse energy stability at 532 nm is better than {+-} 1.5%, 3{sigma}, over 10 000 pulses. Excellent beam characteristics were obtained. The M{sup 2} parameter is lower than 1.05, the beam waist astigmatism and beam waist asymmetry are below 10% and below 8% respectively, with high stability over time. We foresee that the small spot size, high repetition rate and pulse tailoring capability of this platform will provide advantages to practitioners who are developing novel, advanced processes in many industrially important applications.

  10. Resonant microphone based on laser beam deflection

    Science.gov (United States)

    Roark, Kevin; Diebold, Gerald J.

    2004-07-01

    A microphone consisting of a flexible membrane coupled to a Helmholtz resonator can be constructed to have a resonance at a specific frequency making it, unlike conventional broadband microphones, a frequency selective detector of sound. The present device uses a laser beam reflected from the membrane and directed onto a split photodiode to record the motion of the membrane. Since the microphone has a lightly damped resonance, both the thermal noise fluctuations in the displacement of the membrane from its equilibrium position and the response of the microphone to sound at the resonance frequency are large. The large amplitude of both the signal and the noise fluctuations means that effect of amplifier noise on the microphone's sensitivity is diminished relative to that in broadband microphones. Applications of the microphone include photoacoustic detection of gases employing low power lasers.

  11. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining. PMID:22802498

  12. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  13. Micromachining for Microelectromechanical Systems

    Directory of Open Access Journals (Sweden)

    K.N. Bhat

    1998-01-01

    Full Text Available The various micromachining processes required for micro engineering and for the successful realisation of micro eletro mechanical systems on Si are presented. The techniques presented include bulk and surface micro machining, Si fusion bonding, and the lithography, electroforming and micromoulding (LIGA process. The paper also includes discussion on the markets, applications and future trends for micro enginerated products.

  14. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  15. Higher order differential-integral microphone arrays.

    Science.gov (United States)

    Abhayapala, Thushara D; Gupta, Aastha

    2010-05-01

    This paper develops theory to design higher order directional microphone arrays. The proposed higher order designs have similar inter sensor spacings as traditional first and second order differential arrays. The Jacobi-Anger expansion is used to exploit the underlying structure of microphone signals from pairs of closely spaced sensors. Specifically, the difference and sum of these microphone signals are processed to design the novel directional array. PMID:21117719

  16. Micromachining using focused ion beams

    International Nuclear Information System (INIS)

    Focused ion beam (FIB) systems prove to be useful precision micromachining tools for a wide variety of applications. This micromachining technique includes scanning ion microscopy (SIM), micromachining by physical sputtering, and the ion-beam induced surface chemistry for etching and deposition. This technique is applied to image and modify IC's, to micromechanical applications, to modify the tip shape of tungsten emitters, and to prepare cross sections of selected regions for inspection in a transmission electron microscope (TEM). (orig.)

  17. Micromachining and its application

    International Nuclear Information System (INIS)

    Micromachining is a useful technique for manufacturing of micrometer-dimension structures. It also has a ready-made means of mass production in wafer fabrication lines. We studied the present micromachining techniques : photo fabrication, anisotropic etching, anodic bonding and so on. Furthermore, novel process techniques using high energy ion implantation technology were developed, i.e., (1) physical property modification of monocrystalline silicon and poly-silicon, (2) formation of a monocrystalline silicon thin film structure and (3) formation of a buried resistor. In addition, we fabricated two types of mechanical sensors by way of trial ; one is a micro liquid flow sensor and the other is a vacuum sensor which contains a monocrystalline silicon resonator. (author)

  18. Micromachined chemical jet dispenser

    Energy Technology Data Exchange (ETDEWEB)

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  19. The acoustic center of laboratory standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2006-01-01

    center from the inverse distance law is analyzed. Experimental values of the acoustic center of laboratory standard microphones are presented, and numerical results obtained using the boundary element method supplement the experimental data. Estimated uncertainties are also presented. The results......An experimental procedure is described for obtaining the effective acoustic distance between pairs of microphones coupled by a free field, leading to the determination of the position of the acoustic center of the microphones. The procedure, which is based on measuring the modulus of the electrical...

  20. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  1. Nonlinear Distortion of the Fiber Optic Microphone

    OpenAIRE

    Muhammad Taher Abuelma'atti

    2000-01-01

    Analytical expressions are obtained for predicting the harmonic and intermodulation performance of the fiber optic microphone. These expressions are in terms of the ordinary Bessel functions with arguments dependent on the amplitudes of the acoustical exciting signal.

  2. Study and Design of Differential Microphone Arrays

    CERN Document Server

    Benesty, Jacob

    2013-01-01

    Microphone arrays have attracted a lot of interest over the last few decades since they have the potential to solve many important problems such as noise reduction/speech enhancement, source separation, dereverberation, spatial sound recording, and source localization/tracking, to name a few. However, the design and implementation of microphone arrays with beamforming algorithms is not a trivial task when it comes to processing broadband signals such as speech. Indeed, in most sensor arrangements, the beamformer tends to have a frequency-dependent response. One exception, perhaps, is the family of differential microphone arrays (DMAs) that have the promise to form frequency-independent responses. Moreover, they have the potential to attain high directional gains with small and compact apertures. As a result, this type of microphone arrays has drawn much research and development attention recently. This book is intended to provide a systematic study of DMAs from a signal processing perspective. The primary obj...

  3. Spatiotemporal Gradient Analysis of Differential Microphone Arrays

    OpenAIRE

    Kolundzija, Mihailo; Faller, Christof; Vetterli, Martin

    2011-01-01

    The literature on gradient and differential microphone arrays makes a distinction between the two types, and nevertheless shows how both types can be used to obtain the same directional responses. A more theoretically sound rationale for using delays in differential microphone arrays has not yet been given. This paper presents a gradient analysis of the sound field viewed as a spatio-temporal phenomenon, and gives a theoretical interpretation of the working principles of gradient and differen...

  4. 3D proton beam micromachining

    International Nuclear Information System (INIS)

    Focused high energy ion beam micromachining is the newest of the micromachining techniques. There are about 50 scanning proton microprobe facilities worldwide, but so far only few of them showed activity in this promising field. High energy ion beam micromachining using a direct-write scanning MeV ion beam is capable of producing 3D microstructures and components with well defined lateral and depth geometry. The technique has high potential in the manufacture of 3D molds, stamps, and masks for X-ray lithography (LIGA), and also in the rapid prototyping of microcomponents either for research purposes or for components testing prior to batch production. (R.P.)

  5. Understanding fly-ear inspired directional microphones

    Science.gov (United States)

    Liu, Haijun; Zhang, Xuming; Yu, Miao

    2009-03-01

    In this article, the equivalent two-degree-of-freedom (2-DOF) model for the hypersensitive ear of fly Ormia ocharacea is revisited. It is found that in addition to the mechanical coupling between the ears, the key to the remarkable directional hearing ability of the fly is the proper contributions of the rocking mode and bending mode of the ear structure. This can serve as the basis for the development of fly-ear inspired directional microphones. New insights are also provided to establish the connection between the mechanics of the fly ear and the prior biological experiments, which reveals that the fly ear is a nature-designed optimal structure that might have evolved to best perform its localization task at 5 kHz. Based on this understanding, a new design of the fly-ear inspired directional microphone is presented and a corresponding normalized continuum mechanics model is derived. Parametric studies are carried out to study the influence of the identified non-dimensional parameters on the microphone performance. Directional microphones are developed to verify the understanding and concept. This study provides a theoretical guidance to develop miniature bio-inspired directional microphones, and can impact many fronts that require miniature directional microphones.

  6. Micromachined electrode array

    Energy Technology Data Exchange (ETDEWEB)

    Okandan, Murat (Edgewood, NM); Wessendorf, Kurt O. (Albuquerque, NM)

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  7. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  8. Extending a context model for microphone forensics

    Science.gov (United States)

    Kraetzer, Christian; Qian, Kun; Dittmann, Jana

    2012-03-01

    In this paper, we extend an existing context model for statistical pattern recognition based microphone forensics by: first, generating a generalized model for this process and second, using this general model to construct a complex new application scenario model for microphone forensic investigations on the detection of playback recordings (a.k.a. replays, re-recordings, double-recordings). Thereby, we build the theoretical basis for answering the question whether an audio recording was made to record a playback or natural sound. The results of our investigations on the research question of playback detection imply that it is possible with our approach on our evaluation set of six microphones. If the recorded sound is not modified prior to playback, we achieve in our tests 89.00% positive indications on the correct two microphones involved. If the sound is post-processed (here, by normalization) this figure decreases (in our normalization example to 36.00%, while another 50.67% of the tests still indicate two microphones, of which one has actually not been involved in the recording and playback recording process).

  9. Design of circular differential microphone arrays

    CERN Document Server

    Benesty, Jacob; Cohen, Israel

    2015-01-01

    Recently, we proposed a completely novel and efficient way to design differential beamforming algorithms for linear microphone arrays. Thanks to this very flexible approach, any order of differential arrays can be designed. Moreover, they can be made robust against white noise amplification, which is the main inconvenience in these types of arrays. The other well-known problem with linear arrays is that electronic steering is not really feasible.  In this book, we extend all these fundamental ideas to circular microphone arrays and show that we can design small and compact differential arrays of any order that can be electronically steered in many different directions and offer a good degree of control of the white noise amplification problem, high directional gain, and frequency-independent response. We also present a number of practical examples, demonstrating that differential beamforming with circular microphone arrays is likely one of the best candidates for applications involving speech enhancement (i....

  10. Micromachining with DUV lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Kappel, Heiner; Heekenjann, Peter B.

    1997-04-01

    In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

  11. Micromachined Silicon Cantilever Magnetometry.

    Science.gov (United States)

    Chaparala, M. V.

    1998-03-01

    Magnetic torque measurements give us a simple and attractive method for characterizing the anisotropic properties of magnetic materials. Silicon torque and force magnetometers have many advantages over traditional torsion fiber torque magnetometers. We have fabricated micromachined silicon torque and force magnetometers employing both capacitive(``Capacitance platform magnetometer for thin film and small crystal superconductor studies'', M. Chaparala et al.), AIP Conf. Proc. (USA), AIP Conference Proceedings, no.273, p. 407 1993. and strain dependent FET detection(``Strain Dependent Characterstics of Silicon MOSFETs and their Applications'', M. Chaparala et al.), ISDRS Conf. Proc. 1997. schemes which realize some of these gains. We will present the pros and cons of each of the different detection schemes and the associated design constraints. We have developed a feedback scheme which enables null detection thus preserving the integrity of the sample orientation. We will present a method of separating out the torque and force terms in the measured signals and will discuss the errors associated with each of the designs. Finally, we present the static magnetic torque measurements on various materials with these devices, including equilibrium properties on sub microgram specimens of superconductors, and dHvA measurements near H_c2. We will also discuss their usefulness in pulsed magnetic fields(``Cantilever magnetometry in pulsed magnetic fields", M. J. Naughton et al.), Rev. of Sci. Instrum., vol.68, p. 4061 1997..

  12. Microphone Array Speech Recognition : Experiments on Overlapping Speech in Meetings

    OpenAIRE

    Moore, Darren; McCowan, Iain A.

    2002-01-01

    This paper investigates the use of microphone arrays to acquire and recognise speech in meetings. Meetings pose several interesting problems for speech processing, as they consist of multiple competing speakers within a small space, typically around a table. Due to their ability to provide hands-free acquisition and directional discrimination, microphone arrays present a potential alternative to close-talking microphones in such an application. We first propose an appropriate microphone array...

  13. Geometry-based spatial sound acquisition using distributed microphone arrays

    OpenAIRE

    Thiergart, Oliver; Galdo, Giovanni del; Taseska, Maja; Habets, Emanuël A. P.

    2013-01-01

    Traditional spatial sound acquisition aims at capturing a sound field with multiple microphones such that at the reproduction side a listener can perceive the sound image as it was at the recording location. Standard techniques for spatial sound acquisition usually use spaced omnidirectional microphones or coincident directional microphones. Alternatively, microphone arrays and spatial filters can be used to capture the sound field. From a geometric point of view, the perspective of the sound...

  14. Alternative methods to generate a first-order directional microphone

    OpenAIRE

    Amengual Garí, Sebastià Vicenç

    2014-01-01

    [ANGLÈS] This thesis deals with the implementation and analysis of different methods to generate a first-order directional microphone for source location and noise measurement purposes. The methods analysed include a cardioid capsule, and virtual methods such the combination of the signals of two omnidirectional microphones, the combination of the signals of an omnidirectional and a figure of 8 microphones, as well as a Soundfield microphone which is based on the Ambisonics principle. The fre...

  15. Alternative methods to generate a first-order directional microphone

    OpenAIRE

    Amengual Gari, Sebastia Vicenc

    2014-01-01

    This thesis deals with the implementation and analysis of diferent methods to generate a first-order directional microphone for source location and noise measurement purposes. The methods analysed include a cardioid capsule, and virtual methods such the combination of the signals of two omnidirectional microphones, the combination of the signals of an omnidirectional and a figure of 8 microphones, as well as a Soundfield microphone which is based on the Ambisonics principle. The frequency res...

  16. Compressive sensing with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Xenaki, Angeliki

    2016-01-01

    A wave expansion method is proposed in this work, based on measurements with a spherical microphone array, and formulated in the framework provided by Compressive Sensing. The method promotes sparse solutions via ‘1-norm minimization, so that the measured data are represented by few basis functions...... localization, sound field reconstruction, and sound field analysis....

  17. Locating noise sources with a microphone array

    International Nuclear Information System (INIS)

    Noise pollution is one of the contributors to the public opposition of wind farms. Most of the noise produced by turbines is caused by the aerodynamic interactions between the turbine blades and the surrounding air. This poster presentation discussed a series of aeroacoustic tests conducted to account for the different in vortical structures caused by the rotation of the blades. Microphone arrays were used measure and locate the source of noise. A beam forming technique was used to measure the noise using an algorithm that identified a scanning grid on a plane where the source was thought to be located. It delayed each microphone's signal by the length of time required for the sound to travel from the scan position to each microphone, and accounted for the amplitudes according to the distance from the scan position to each microphone. Demonstration test cases were conducted using piezo buzzers attached to aluminum bars and mounted to the shaft of a DC motor that produced a rotational diameter of 0.95 meter. The buzzers were placed 1 meter from the array. Multiple sound sources at the same frequency were identified, and the moving sources were accurately measured and located. tabs., figs.

  18. Subjective assessments of spherical microphone arrays - Paired comparisons of two arrays designed using different microphone models

    OpenAIRE

    Koehl, Vincent; Paquier, Mathieu; Delikaris-Manias, Simeon

    2012-01-01

    International audience Microphone arrays are commonly used to capture sound fields. As the number of sensors forming the array increases, the spatial sampling accuracy at high frequencies improves. Numerous prototypes of spherical arrays were developed over the last years. However, much less attention has been paid to the intrinsic performances of the sensors than to their number and arrangement. This study aims at evaluating the relative performances of two rigid spherical microphone arra...

  19. Materials Issues for Micromachines Development - ASCI Program Plan

    Energy Technology Data Exchange (ETDEWEB)

    FANG,HUEI ELIOT; BATTAILE,CORBETT C.; BENAVIDES,GILBERT L.; ENSZ,MARK T.; BUCHHEIT,THOMAS E.; LAVAN,DAVID A.; CHEN,ER-PING; CHRISTENSON,TODD R.; DE BOER,MAARTEN P.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; PRASAD,SOMURI V.; REEDY JR.,EARL DAVID; THOMPSON,AIDAN P.; WONG,CHUNGNIN C.; YANG,PIN

    2000-05-01

    This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

  20. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314. ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  1. Laser micromachining of goldblack coatings.

    Science.gov (United States)

    Nelms, N; Dowson, J; Rizvi, N; Rohr, T

    2006-09-20

    Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors. PMID:16946774

  2. Performance Analysis of a Cost-Effective Electret Condenser Microphone Directional Array

    Science.gov (United States)

    Humphreys, William M., Jr.; Gerhold, Carl H.; Zuckerwar, Allan J.; Herring, Gregory C.; Bartram, Scott M.

    2003-01-01

    Microphone directional array technology continues to be a critical part of the overall instrumentation suite for experimental aeroacoustics. Unfortunately, high sensor cost remains one of the limiting factors in the construction of very high-density arrays (i.e., arrays containing several hundred channels or more) which could be used to implement advanced beamforming algorithms. In an effort to reduce the implementation cost of such arrays, the authors have undertaken a systematic performance analysis of a prototype 35-microphone array populated with commercial electret condenser microphones. An ensemble of microphones coupling commercially available electret cartridges with passive signal conditioning circuitry was fabricated for use with the Langley Large Aperture Directional Array (LADA). A performance analysis consisting of three phases was then performed: (1) characterize the acoustic response of the microphones via laboratory testing and calibration, (2) evaluate the beamforming capability of the electret-based LADA using a series of independently controlled point sources in an anechoic environment, and (3) demonstrate the utility of an electret-based directional array in a real-world application, in this case a cold flow jet operating at high subsonic velocities. The results of the investigation revealed a microphone frequency response suitable for directional array use over a range of 250 Hz - 40 kHz, a successful beamforming evaluation using the electret-populated LADA to measure simple point sources at frequencies up to 20 kHz, and a successful demonstration using the array to measure noise generated by the cold flow jet. This paper presents an overview of the tests conducted along with sample data obtained from those tests.

  3. Eargle's the microphone book from mono to stereo to surround : a guide to microphone design and application

    CERN Document Server

    Rayburn, Ray A

    2012-01-01

    Eargle's Microphone Book is the only guide you will ever need for the latest in microphone technology, application and technique. This new edition features more on microphone arrays and wireless microphones, new material on digital models; the latest developments in surround; expanded advice on studio set up, recording and mic selection. Ray A. Rayburn provides detailed analysis of the different types of microphones available and addresses their application through practical examples of actual recording sessions and studio operations. The book takes you into the stu

  4. Graphene electrostatic microphone and ultrasonic radio.

    Science.gov (United States)

    Zhou, Qin; Zheng, Jinglin; Onishi, Seita; Crommie, M F; Zettl, Alex K

    2015-07-21

    We present a graphene-based wideband microphone and a related ultrasonic radio that can be used for wireless communication. It is shown that graphene-based acoustic transmitters and receivers have a wide bandwidth, from the audible region (20∼20 kHz) to the ultrasonic region (20 kHz to at least 0.5 MHz). Using the graphene-based components, we demonstrate efficient high-fidelity information transmission using an ultrasonic band centered at 0.3 MHz. The graphene-based microphone is also shown to be capable of directly receiving ultrasound signals generated by bats in the field, and the ultrasonic radio, coupled to electromagnetic (EM) radio, is shown to function as a high-accuracy rangefinder. The ultrasonic radio could serve as a useful addition to wireless communication technology where the propagation of EM waves is difficult. PMID:26150483

  5. Spherical Microphone Array Signal Processing on FPGA

    OpenAIRE

    Johnsen, Kenneth Karlsen

    2010-01-01

    Spherical microphone arrays are finding an increasing number of applications, mainly because of their ability to describe the directionality of sound captured, and the ease with which this information can be used, e.g., to dampen sound from other directions than the one we are interested in.In a teleconference setting the benefits of having information about the direction from which sounds are coming are obvious. Imagine a setting where chatter from between participants at one location is pic...

  6. Hydrogel microphones for stealthy underwater listening.

    Science.gov (United States)

    Gao, Yang; Song, Jingfeng; Li, Shumin; Elowsky, Christian; Zhou, You; Ducharme, Stephen; Chen, Yong Mei; Zhou, Qin; Tan, Li

    2016-01-01

    Exploring the abundant resources in the ocean requires underwater acoustic detectors with a high-sensitivity reception of low-frequency sound from greater distances and zero reflections. Here we address both challenges by integrating an easily deformable network of metal nanoparticles in a hydrogel matrix for use as a cavity-free microphone. Since metal nanoparticles can be densely implanted as inclusions, and can even be arranged in coherent arrays, this microphone can detect static loads and air breezes from different angles, as well as underwater acoustic signals from 20 Hz to 3 kHz at amplitudes as low as 4 Pa. Unlike dielectric capacitors or cavity-based microphones that respond to stimuli by deforming the device in thickness directions, this hydrogel device responds with a transient modulation of electric double layers, resulting in an extraordinary sensitivity (217 nF kPa(-1) or 24 μC N(-1) at a bias of 1.0 V) without using any signal amplification tools. PMID:27554792

  7. Laser schlieren microphone for optoacoustic spectroscopy.

    Science.gov (United States)

    Choi, J G; Diebold, G J

    1982-11-15

    This paper describes a laser schlieren microphone, where a low-power He-Ne laser beam is deflected by a reflecting diaphragm mounted on an optoacoustic Helmholtz resonator. The sinusoidal pressure variations in the resonator distort the surface of the diaphragm so that the reflected laser beam is alternately focused and defocused. The deflection is converted into an amplitude modulation of the beam by an iris located at a distance from the resonator and detected with a photodiode. The light beam can be modulated at a high frequency and the signal from the photodiode processed with a lock-in amplifier so that noise with a power spectral density proportional to the inverse of the frequency is significantly reduced in the final optoacoustic signal. A mathematical description of the laser schlieren microphone is given that shows the system to respond linearly to small signals. An experiment was done to determine the range of linear response of the microphone to large amplitude optoacoustic signals. PMID:20401014

  8. Modeling of a corona discharge microphone

    International Nuclear Information System (INIS)

    The acoustic pressure sensor described in this paper uses a small volume of ionized gas (plasma) as sensing element to receive energy from surrounding gas (air) set into oscillations by an acoustic disturbance. The generation of the ionized gas is performed by negative point-to-plane corona discharges. The passage of a pressure disturbance through this gas disturbs the flow of the charged particles between the electrodes, and provokes a current variation of the electrical system. This current variation is directly related to the acoustic pressure. An electroacoustic model of this plasma microphone is proposed. From the current–voltage relation associated with corona discharges, this model is based on the variations of the threshold voltage and the mobility of ions with pressure and temperature of the surrounding gas. An experimental setup is developed, it simultaneously allows one to compare the acoustic pressure deduced from the corona discharge sensor with that resulting from the two-microphone method in a standing wave tube. This paper also proposes a parametric study to quantify the influence of the electrical and geometrical parameters of the discharge on the sensitivity of the plasma microphone. (paper)

  9. A Surface Micromachined CMOS MEMS Humidity Sensor

    OpenAIRE

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  10. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    L. Rihakova; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  11. Review of polymer MEMS micromachining

    International Nuclear Information System (INIS)

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed. (topical review)

  12. Quasimetallic silicon micromachined photonic crystals

    International Nuclear Information System (INIS)

    We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

  13. Resist materials for proton micromachining

    International Nuclear Information System (INIS)

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

  14. A New DOA Estimation Method Using a Circular Microphone Array

    OpenAIRE

    Karbasi, Amin; SUGIYAMA, AKIHIKO

    2007-01-01

    This paper proposes a new DOA (direction of arrival) estimation method based on circular microphone array. For an arbitrary number of microphones, it is analytically shown that DOA estimation reduces to an efficient non-linear optimization problem. Simulation results demonstrate that deviation of the estimation error for 20 and 10 dB SNR is smaller than 0.7 degree which is comparable to high resolution DOA estimation methods. A larger number of microphones provide a more ...

  15. Preamplifier with ultra low frequency cutoff for infrasonic condenser microphone

    OpenAIRE

    Kinnerup, Rasmus Trock; Marbjerg, Kresten; Rasmussen, Per; Knott, Arnold; Thomsen, Ole Cornelius

    2012-01-01

    Measuring infrasonic sound sets high requirements on the instruments used. Typically the measurement chain consists of a microphone and a preamplifier. As the input resistance of the preamplifier forms a high pass filter with the capacitance of the microphone in the picofarad range, measuring ultra low frequencies becomes a challenge. The electric preamplifier presented in this paper together with a prepolarized condenser microphone form a measurement system. The developed preamplifier connec...

  16. New probe microphone for investigating the acoustics of the ear

    DEFF Research Database (Denmark)

    Lauridsen, Ole; Günthersen, Carsten

    1981-01-01

    A new probe microphone employing a soft tube and a compensation network for the tube response is described. Because of the soft tube, this microphone is especially suited for investigating the acoustics of the outer ear and the ear canal, and some such measurements are given.......A new probe microphone employing a soft tube and a compensation network for the tube response is described. Because of the soft tube, this microphone is especially suited for investigating the acoustics of the outer ear and the ear canal, and some such measurements are given....

  17. Biomimetic optical directional microphone with structurally coupled diaphragms

    Science.gov (United States)

    Liu, H. J.; Yu, M.; Zhang, X. M.

    2008-12-01

    A biomimetic directional microphone based on structurally coupled diaphragms and a fiber-optic detection system is presented. The microphone design aims to mimic the fly Ormia Ochracea's ear structure and capture its performance. Experiments show that the designed microphone amplifies the interaural time difference (ITD) by 4.4 times and has a directional sensitivity of 6.5 μs/deg. An important finding is that one needs to utilize both the rocking and translational vibration modes to obtain the appropriate ITD amplification without sacrifice of directional sensitivity. This work can serve as a foundation for realizing fly-ear inspired miniature directional microphones.

  18. A silicon condenser microphone: Modelling and electronic circuitry

    Science.gov (United States)

    Vanderdonk, Armand Gijsbertus H.

    1992-01-01

    The operational mechanism of condenser microphones and some aspects concerning microphone terminology are described. A model of condenser microphones, concerning microphones with a highly tensioned diaphragm as well as microphones with a diaphragm without any initial stress, is presented. Expressions of the mechanical, the electrical, and the total sensitivity are derived. Some practical limitations concerning the influence of temperature changes during operation and the maximum allowable sound pressure are described. An optimization procedure with respect to the sensitivity, which takes into account the maximum allowable sound pressure, is presented. The noise contribution of the microphone preamplifier is considered. Amplifiers, consisting of a MOSFET and a bias resistor or bias diode, and amplifiers, consisting of a JFET and a bias resistor, are analyzed. The integration of a silicon condenser microphone with a PMOS source follower is addressed. Design criteria concerning the integration of the CMOS process and a specific microphone fabrication process are presented. The principle of electromechanical feedback is described. The electrical and mechanical problems and the limitations of feedback are discussed. The feedback was analyzed and tested for two types of actuator signals. The principle of operation of a DC voltage converter as a substitution of a low voltage electret is described. Experimental results of a converter realized in CMOS and the practical operation in combination with a silicon condenser microphone are presented.

  19. Two-microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    2006-01-01

    Matlab source code for underdetermined separation of instaneous speech mixtures. The algorithm is described in [1] Michael Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: ''Two-microphone Separation of Speech Mixtures,'' 2006, submitted for journal publoication. See also, [2] Michael...... Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: ''Overcomplete Blind Source Separation by Combining ICA and Binary Time-Frequency Masking,'' in proceedings of IEEE International workshop on Machine Learning for Signal Processing, pp. 15-20, 2005. All files should be in the same directory. The...

  20. Microphone detected ionacoustic signal from metals

    International Nuclear Information System (INIS)

    An experimental system for studying the radiation-induced acoustic signal generated by a modulated 2 MeV He+ ion beam in metals is described. For detection, a closed cell on the rear side of the copper or aluminium sample, a half-inch condenser microphone, and a lock-in amplifier were employed. The signal was found to be proportional to beam current and particle energy, and inversely proportional to cell length. A decrease of the signal magnitude and an increase of the phase delay with increasing modulation frequency and sample thickness were also observed. (author)

  1. Sound Source Localization by Using Two Microphones

    OpenAIRE

    Yilmaz, Gulay

    2014-01-01

    This thesis work presents the way of locating the sound source by using two microphone. The idea to approach the goal is based on the Time di fference of Arrival Estimation (TDOA). There are several ways to the TDOA such as the generalized cross-correlation (GCC) and Steered Response Power (SRP).The most common technique used in TDOA estimation is the generalized cross-correlation (GCC). But Steered Response Power PHAT (SRP-PHAT) together with the Windowed Discrete Fourier Transform(WDFT) are...

  2. Micromachining of Silicon Carbide using femtosecond lasers

    Energy Technology Data Exchange (ETDEWEB)

    Farsari, M [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Filippidis, G [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Zoppel, S [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Reider, G A [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Fotakis, C [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece)

    2007-04-15

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude.

  3. Micromachining of Silicon Carbide using femtosecond lasers

    International Nuclear Information System (INIS)

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude

  4. Micromachining applications for ICF target fabrication

    International Nuclear Information System (INIS)

    Micromachining techniques used in Inertial Confinement Fusion (ICF) target fabrication encompass laser drilling, single point diamond turning, and plasma as well as chemical etching. These techniques have been developed by several laboratories to produce target components with tolerances and surface finishes in the micron to submicron regime. Some of the spherical target components produced by micromachining techniques include free standing hemispherical shells (diameters 50--500 mm), micron-sized holes in thin glass shells, and plastic-coated glass microballons with surfaces which have been smoothly machined to remove a mounting stalk. Planar targets and components produced by these techniques include small disks and washers of thin brittle materials. Micromachining techniques are also used to fabricate diagnostic instruments such as x-ray mirrors and zone plates. This paper will examine micromachining techniques used to produce target components and diagnostic instruments. The relationship of each micromachining technique to presently used target configurations will also be discussed

  5. Shooter Localization in Wireless Microphone Networks

    Directory of Open Access Journals (Sweden)

    Wilsson Olof

    2010-01-01

    Full Text Available Shooter localization in a wireless network of microphones is studied. Both the acoustic muzzle blast (MB from the gunfire and the ballistic shock wave (SW from the bullet can be detected by the microphones and considered as measurements. The MB measurements give rise to a standard sensor network problem, similar to time difference of arrivals in cellular phone networks, and the localization accuracy is good, provided that the sensors are well synchronized compared to the MB detection accuracy. The detection times of the SW depend on both shooter position and aiming angle and may provide additional information beside the shooter location, but again this requires good synchronization. We analyze the approach to base the estimation on the time difference of MB and SW at each sensor, which becomes insensitive to synchronization inaccuracies. Cramér-Rao lower bound analysis indicates how a lower bound of the root mean square error depends on the synchronization error for the MB and the MB-SW difference, respectively. The estimation problem is formulated in a separable nonlinear least squares framework. Results from field trials with different types of ammunition show excellent accuracy using the MB-SW difference for both the position and the aiming angle of the shooter.

  6. Detection of cavitation with directional microphones placed outside piping

    International Nuclear Information System (INIS)

    Highlights: ► The frequency characteristics of cavitation noise were different for each cavitation state. ► RMS ratio of the cavitation noises downstream and upstream from an orifice increased according to development of the cavitation state, and these characteristics became clearer using the directional microphones. ► This method could judge the developed cavitation state which caused erosion. - Abstract: In this paper, to detect cavitation occurrence, we carried out cavitation noise measurements using directional microphones, and evaluated the flow-directional distribution of noises and frequency characteristics. Then we compared the RMS (root mean square) values of the directional microphone outputs obtained upstream and downstream from an orifice, and confirmed that the microphone output RMS ratio upstream and downstream from the orifice changed according to the cavitation states. Microphones had much lower sensitivity than accelerometers, but greater improvement of sensitivity was obtained by directional microphones rather with non-directional microphones. To use the microphone output RMS ratio upstream and downstream from the orifice, measurements are needed at plural locations, but a data base to judge cavitation stages is not required and the ratio could be applied to detect cavitation phenomena in an operating plant.

  7. A Microflown based sound pressure microphone suitable for harsh environments

    NARCIS (Netherlands)

    Yntema, Doekle R.; Bree, de Hans-Elias

    2005-01-01

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone won't last long under these conditions. Electret based pressure microphones stop working well above 70 degr

  8. A microflown based sound presure microphone suitable for harsh environments

    NARCIS (Netherlands)

    Yntema, Doekle R.; Bree, de Hans-Elias

    2005-01-01

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 d

  9. A new microphonics measurement method for superconducting RF cavities

    International Nuclear Information System (INIS)

    Mechanical vibrations of the superconducting cavity, also known as microphonics, cause shifts in the resonant frequency of the cavity. In addition to requiring additional RF power, these frequency shifts can contribute to errors in the closed loop phase and amplitude regulation. In order to better understand these effects, a new microphonics measurement method was developed, and the method was successfully used to measure microphonics on the half-wave superconducting cavity when it was operated in a production style cryostat. The test cryostat held a single β=0.1 half-wave cavity which was operated at 162.5 MHz Yue et al. (2013) and Wang et al. (2013) [1,2]. It is the first time that the National Instruments PXIe-5641R intermediate frequency transceiver has been used for microphonics measurements in superconducting cavities. The new microphonics measurement method and results will be shown and analyzed in this paper

  10. In situ tuning of a MEMS microphone using electrodeposited nanostructures

    Science.gov (United States)

    Je, Sang-Soo; Harrison, Jere C.; Kozicki, Michael N.; Bakkaloglu, Bertan; Kiaei, Sayfe; Chae, Junseok

    2009-03-01

    This paper presents a new method for in situ tuning of acoustic sensitivity in micro-electro-mechanical-system (MEMS) microphones using silver metallic nano-electrodeposits. The nano-electrodeposits are electrochemically formed using an external dc bias under low power and at room temperature on an Ag-doped Ge30Se70 solid electrolyte film integrated with the microphone diaphragm. The growth/retraction mechanism generates mass/stress redistribution on the diaphragm and this effect is used to manipulate microphone sensitivity to incoming acoustic waves. Acoustic measurements with a reference microspeaker demonstrate that the microphone can achieve a tuning range of 0.6 dB (7.2%). This technique is useful for a variety of microdevice applications, including sensitivity matching for directional microphones (e.g., in hearing aids), post-package trimming and resonant frequency tuning.

  11. Using coprime microphone arrays for direction-of-arrival estimation

    Science.gov (United States)

    Nichols, John Paul

    Direction-of-arrival estimation using microphone arrays requires many sensors to reduce beam width in order to achieve precise location estimation in a noisy environment. Coprime linear microphone arrays allow for narrow beams with fewer sensors. Coprime sensing is a type of sparse sensing, meaning that the microphone elements are fewer and more spaced out than in a traditional array without sacrificing resolution, but requiring more post-processing. A coprime microphone array is made up of two overlapping uniform linear arrays with M and N sensors, where M and N are coprime. By applying spatial filtering with both arrays and combining their outputs, M+N sensors can yield MN directional bands. In this work, the coprime array theory is implemented experimentally for the first time with a microphone array to estimate the location of multiple uncorrelated sources in a noisy environment. Both simulated and measured results will be discussed.

  12. Testing and characterization of second-order differential microphones

    Science.gov (United States)

    Merlis, Joshua Howard

    The focus of this thesis is the testing and characterizing of directional microphones, designed based on the ear of the fly Ormia ochracea. The response of these microphones is modeled as a linear combination of the gradients of the sound field. A least squares approach is employed in order to determine the transfer functions between the response and these gradients. Knowledge of these complex transfer functions is crucial in understanding the nature and quality of the response of these microphones. Once determined, these transfer functions are used to simulate the plane wave response of differential microphones. This process is invaluable to acoustic research groups that do not have access to an anechoic chamber because the plane wave response is a standard by which acoustic devices are measured. This process was validated by comparing the true plane wave response of an industry standard differential microphone with its simulated plane wave response.

  13. In situ tuning of a MEMS microphone using electrodeposited nanostructures

    International Nuclear Information System (INIS)

    This paper presents a new method for in situ tuning of acoustic sensitivity in micro-electro-mechanical-system (MEMS) microphones using silver metallic nano-electrodeposits. The nano-electrodeposits are electrochemically formed using an external dc bias under low power and at room temperature on an Ag-doped Ge30Se70 solid electrolyte film integrated with the microphone diaphragm. The growth/retraction mechanism generates mass/stress redistribution on the diaphragm and this effect is used to manipulate microphone sensitivity to incoming acoustic waves. Acoustic measurements with a reference microspeaker demonstrate that the microphone can achieve a tuning range of 0.6 dB (7.2%). This technique is useful for a variety of microdevice applications, including sensitivity matching for directional microphones (e.g., in hearing aids), post-package trimming and resonant frequency tuning

  14. DFT-Domain Based Single-Microphone Noise Reduction for Speech Enhancement

    DEFF Research Database (Denmark)

    C. Hendriks, Richard; Gerkmann, Timo; Jensen, Jesper

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades...... their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement. The field of single-microphone noise...... reduction for speech enhancement comprises a history of more than 30 years of research. In this survey, we wish to demonstrate the significant advances that have been made during the last decade in the field of discrete Fourier transform domain-based single-channel noise reduction for speech enhancement...

  15. Two-Microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    Pedersen, Michael Syskind; Wang, DeLiang; Larsen, Jan;

    2008-01-01

    Separation of speech mixtures, often referred to as the cocktail party problem, has been studied for decades. In many source separation tasks, the separation method is limited by the assumption of at least as many sensors as sources. Further, many methods require that the number of signals within...... been combined, independent component analysis (ICA) and binary time–frequency (T–F) masking. By estimating binary masks from the outputs of an ICA algorithm, it is possible in an iterative way to extract basis speech signals from a convolutive mixture. The basis signals are afterwards improved by...... grouping similar signals. Using two microphones, we can separate, in principle, an arbitrary number of mixed speech signals. We show separation results for mixtures with as many as seven speech signals under instantaneous conditions. We also show that the proposed method is applicable to segregate speech...

  16. Biologically inspired MEMS based directional microphone

    Science.gov (United States)

    Touse, Michael; Harrison, Stephen; Catterlin, Jeffrey; Karunasiri, Gamani

    2009-11-01

    A novel MEMS microphone is presented which mimics the aural system of the Ormia ochracea fly and its extraordinary directional sensitivity. To overcome the minimal separation between its ears, a flexible hinge mechanically couples the fly's two tympanic membranes. By comparing the frequency response of these two structures, the interaural differences are amplified and sound source information is processed with unparalleled speed and accuracy. The presented device is 2mm x 1mm x 10μm SOI, hinged at the middle and attached to the substrate using two narrow legs, allowing both rocking and bending modes. Along the edges of the membrane, two sets of interdigitated comb fingers are connected to an Irvine Sensors capacitive readout chip to allow electronic measurement of the displacement. Also presented are results of extensive finite element modeling performed using COMSOL Multiphysics, which are in close agreement with experimental data.

  17. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  18. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  19. Free-field calibration of measurement microphones at high frequencies

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Torras Rosell, Antoni;

    2011-01-01

    Measurement microphones are typically calibrated in a free field at frequencies up to 50 kHz. This is a sufficiently high frequency for the most of sound measurement applications related with noise assessment. However, other applications such as assessment of the noise emitted by ultrasound...... cleaning machines, and fail detection in aeronautic structures require that the sensitivity of the microphone is known at frequencies up to 150 kHz. Such a high frequency can only be reached using small measurement microphones with very low sensitivity. Thus, in order to extend the frequency range of free...

  20. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  1. Laser Micromachining Fabrication of THz Components

    Science.gov (United States)

    DrouetdAubigny, C.; Walker, C.; Jones, B.; Groppi, C.; Papapolymerou, J.; Tavenier, C.

    2001-01-01

    Laser micromachining techniques can be used to fabricate high-quality waveguide structures and quasi-optical components to micrometer accuracies. Successful GHz designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once tested and characterized our system will be used to construct prototype THz lx4 focal plane mixer arrays, magic tees, AR coated silicon lenses, local oscillator source phase gratings, filters and more. Our system can micro-machine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our micromachining system, and illustrates the type, range and performance of components this exciting new technology will make accessible to the THz community.

  2. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  3. Micromachining with SR and FEL

    International Nuclear Information System (INIS)

    This article describes the micromachining technologies to fabricate thick and three-dimensional microstructures. Deep X-ray lithography using an 0.6 GeV compact SR source have been realized to fabricate thick structures, developing a high transparency X-ray mask and a high sensitivity resist. Moreover, a sacrificial layer process and micro electro-discharge machining have been combined with deep X-ray lithography for the fabrication of more complicated structures such as cantilever and tapered shaped structures. Also, the prospective use of an FEL is considered towards the development of true three-dimensional microstructures. (Copyright (c) 1998 Elsevier Science B.V., Amsterdam. All rights reserved.)

  4. Electrochemical micromachining of passive electrodes

    International Nuclear Information System (INIS)

    The electronic model describing the electrochemical micromachining (ECMM) of passive electrodes utilizing the transpassive dissolution is discussed. Numerical simulations are performed on a machining model circuit using measured electrochemical properties of the model system which consisted of a tungsten tool electrode, a 1 M H2SO4 electrolyte and a stainless steel work piece electrode. The results of these simulations were verified by performing machining experiments applying the same model system. For a passive stainless steel electrode it is shown that it can be treated like an actively dissolving electrode with high reaction overpotential. The efficiency of the machining process can be enhanced by polarizing the steel work piece electrode close to the transpassive potential region. Three different ways of achieving this polarization are discussed: by polarizing the work piece electrode only, by polarizing both electrodes and by adding oxidizing species to the electrolyte solution

  5. Micromachining process – current situation and challenges

    OpenAIRE

    Lalakiya Meet Rajeshkumar

    2015-01-01

    The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance c...

  6. Realization of CMOS compatible micromachined chemical sensors

    OpenAIRE

    Demirci, Tuğba; Demirci, Tugba

    2002-01-01

    The chemical sensors are fabricated using IC manufacturing technologies, providing a smaller size and lower weight, lower power consumption, and lower cost due to the automated and batch production. During the last two decades, largely two-dimensional Integrated Circuit (IC) fabrication technology has been extended into the third dimension by micromachining technologies [1]. Micromachining has been used to produce a growing variety of micromechanical structures, including automotive pressure ...

  7. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  8. Preamplifier with ultra low frequency cutoff for infrasonic condenser microphone

    DEFF Research Database (Denmark)

    Kinnerup, Rasmus Trock; Marbjerg, Kresten; Rasmussen, Per;

    2012-01-01

    Measuring infrasonic sound sets high requirements on the instruments used. Typically the measurement chain consists of a microphone and a preamplifier. As the input resistance of the preamplifier forms a high pass filter with the capacitance of the microphone in the picofarad range, measuring ultra...... low frequencies becomes a challenge. The electric preamplifier presented in this paper together with a prepolarized condenser microphone form a measurement system. The developed preamplifier connects the microphone signal directly to the input of an operational amplifier with ultra high input......B. Being able to measure down to ultra low frequencies in the infrasonic frequency range will aid actors in the debate on wind turbine noise. Sonic booms from supersonic flights include frequencies down to 10 mHz and the preamplifier proposed in this paper will aid scientists trying to modify the N...

  9. Study on a flexoelectric microphone using barium strontium titanate

    Science.gov (United States)

    Kwon, S. R.; Huang, W. B.; Zhang, S. J.; Yuan, F. G.; Jiang, X. N.

    2016-04-01

    In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

  10. Spatio-Temporal Gradient Analysis of Differential Microphone Arrays

    OpenAIRE

    Kolundzija, Mihailo; Faller, Christof; Vetterli, Martin

    2009-01-01

    The literature on gradient and differential microphone arrays makes a distinction between the two types, and nevertheless shows how both types can be used to obtain the same directional responses. A more theoretically sound rationale for using delays in differential microphone arrays has not yet been given. This paper presents a gradient analysis of the sound field viewed as a spatio-temporal phenomenon, and gives a theoretical interpretation of the working principles of gradient ...

  11. The virtual microphone technique in active sound field control systems

    Science.gov (United States)

    Lampropoulos, Iraklis E.; Shimizu, Yasushi

    2003-04-01

    Active Sound Field Control (AFC) has been proven very useful in reverberation enhancement applications in large rooms. However, feedback control is required in order to eliminate peaks in the frequency response of the system. The present research closely follows the studies of Shimizu in AFC, in which smoothing of the rooms transfer function is achieved by averaging the impulse responses of multiple microphones. ``The virtual or rotating microphone technique'' reduces the number of microphones in the aforementioned AFC technology, while still achieving the same acoustical effects in the room. After the impulse responses at previously specified pairs of microphone positions are measured, the ratio of transfer functions for every pair is calculated, thus yielding a constant K. Next, microphones are removed and their impulse responses are reproduced by processing the incoming signal of each pair through a convolver, where the computed K constants have been previously stored. Band limiting, windowing and time variance effects are critical factors, in order to reduce incoherence effects and yield reliable approximations of inverse filters and consequently calculations of K. The project is implemented in a church lacking low frequency reverberation for music and makes use of 2 physical and 2 virtual microphones.

  12. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  13. Demonstration of superconducting micromachined cavities

    International Nuclear Information System (INIS)

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing

  14. Micromachining for laser fusion pellet

    International Nuclear Information System (INIS)

    In laser nuclear fusion, the fusion reaction is induced by irradiating powerful laser beam on the pellets filled with fuel, and compressing and heating the fuel by implosion. At this time, in order to compress it up to high density, it is very important to compress as the spherical symmetry is maintained. The uniformity of the sphericity and wall thickness is required to be more than 98 %. Besides, in order to heighten the efficiency, it is necessary to limit the temperature of main fuel low, to ignite with hot sparks at the center, and to burn remaining fuel with the alpha particles which are generated by the nuclear fusion reaction there. For this purpose, various target structures have been proposed. The cryogenic target for ablative compression, the double shell target and the cannonball target are shown. In order to produce these targets, the development of the fuel spheres which have high uniformity and good sphericity in the required size, the development of the coating process with good surface finish which can do uniform coating at the rate of about 10 μm/h, the development of micromachining technology, the development of cryogenic technology and so on are necessary. Also the levitation of pellets by magnetic suspension method is explained. (K.I.)

  15. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  16. Demonstration of superconducting micromachined cavities

    Science.gov (United States)

    Brecht, T.; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J.

    2015-11-01

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  17. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  18. Optical measurement of micromachine engine performance

    Energy Technology Data Exchange (ETDEWEB)

    Holswade, S.C.; Dickey, F.M.

    1997-08-01

    Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

  19. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  20. Photolithographic surface micromachining of polydimethylsiloxane (PDMS).

    Science.gov (United States)

    Chen, Weiqiang; Lam, Raymond H W; Fu, Jianping

    2012-01-21

    A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS. PMID:22089984

  1. Cryogenically assisted abrasive jet micromachining of polymers

    International Nuclear Information System (INIS)

    The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN2) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN2 also was found to reduce particle embedding

  2. Microphones' directivity for the localization of sound sources

    Science.gov (United States)

    Rizzo, Piervincenzo; Tajari, Mahdi; Spada, Antonino

    2011-06-01

    In a recent paper [P. Rizzo, G. Bordoni, A. Marzani, and J. Vipperman, "Localization of Sound Sources by Means of Unidirectional Microphones, Meas. Sci. Tech., 20, 055202 (12pp), 2009] the proof-of-concept of an approach for the localization of acoustic sources was presented. The method relies on the use of unidirectional microphones and amplitude-based signals' features to extract information about the direction of the incoming sound. By intersecting the directions identified by a pair of microphones, the position of the emitting source can be identified. In this paper we expand the work presented previously by assessing the effectiveness of the approach for the localization of an acoustic source in an indoor setting. As the method relies on the accurate knowledge of the microphones directivity, analytical expression of the acoustic sensors polar pattern were derived by testing them in an anechoic chamber. Then an experiment was conducted in an empty laboratory by using an array of three unidirectional microphones. The ability to locate the position of a commercial speaker placed at different positions in the room is discussed. The objective of this study is to propose a valid alternative to the common application of spaced arrays and therefore to introduce a new generation of reduced size sound detectors and localizers. The ability of the proposed methodology to locate the position of a commercial speaker placed at different positions in the room was evaluated and compared to the accuracy provided by a conventional time delay estimate algorithm.

  3. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  4. Design and Fabrication of Micromachined Resonators

    CERN Document Server

    Chaudhuri, Ritesh Ray; Bhattacharyya, Tarun Kanti

    2012-01-01

    Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.

  5. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  6. On the use of mobile phones and wearable microphones for noise exposure measurements: Calibration and measurement accuracy

    Science.gov (United States)

    Dumoulin, Romain

    Despite the fact that noise-induced hearing loss remains the number one occupational disease in developed countries, individual noise exposure levels are still rarely known and infrequently tracked. Indeed, efforts to standardize noise exposure levels present disadvantages such as costly instrumentation and difficulties associated with on site implementation. Given their advanced technical capabilities and widespread daily usage, mobile phones could be used to measure noise levels and make noise monitoring more accessible. However, the use of mobile phones for measuring noise exposure is currently limited due to the lack of formal procedures for their calibration and challenges regarding the measurement procedure. Our research investigated the calibration of mobile phone-based solutions for measuring noise exposure using a mobile phone's built-in microphones and wearable external microphones. The proposed calibration approach integrated corrections that took into account microphone placement error. The corrections were of two types: frequency-dependent, using a digital filter and noise level-dependent, based on the difference between the C-weighted noise level minus A-weighted noise level of the noise measured by the phone. The electro-acoustical limitations and measurement calibration procedure of the mobile phone were investigated. The study also sought to quantify the effect of noise exposure characteristics on the accuracy of calibrated mobile phone measurements. Measurements were carried out in reverberant and semi-anechoic chambers with several mobiles phone units of the same model, two types of external devices (an earpiece and a headset with an in-line microphone) and an acoustical test fixture (ATF). The proposed calibration approach significantly improved the accuracy of the noise level measurements in diffuse and free fields, with better results in the diffuse field and with ATF positions causing little or no acoustic shadowing. Several sources of errors

  7. Contact microphone using optical fibre Bragg grating technology

    International Nuclear Information System (INIS)

    A contact microphone using optical fibre Bragg grating has been developed. It enables one to listen and record a human voice and/or breathing by monitoring the vibration generated by the outer wall of the throat during speech. This system can have many applications such as detecting defects in vocal folds, measuring and monitoring the vibration and defection generated by intubations of a patient throat and other voice related problem, low level speaking recording and transmitting is also possible, the microphone can be also used to monitor breathing and the system can be used as a microphone in very harsh environments for example it would allow one to hear the patient during a cat scan

  8. Contact microphone using optical fibre Bragg grating technology

    Energy Technology Data Exchange (ETDEWEB)

    Bezombes, F A; Lalor, M J; Burton, D R [General Engineering Research Institute (GERI), Liverpool John Moores University, James Parsons Building, Byrom Street, Liverpool (United Kingdom)

    2007-07-15

    A contact microphone using optical fibre Bragg grating has been developed. It enables one to listen and record a human voice and/or breathing by monitoring the vibration generated by the outer wall of the throat during speech. This system can have many applications such as detecting defects in vocal folds, measuring and monitoring the vibration and defection generated by intubations of a patient throat and other voice related problem, low level speaking recording and transmitting is also possible, the microphone can be also used to monitor breathing and the system can be used as a microphone in very harsh environments for example it would allow one to hear the patient during a cat scan.

  9. Ultra-low-noise preamplifier for condenser microphones

    Science.gov (United States)

    Starecki, Tomasz

    2010-12-01

    The paper presents the design of a low-noise preamplifier dedicated for condenser measurement microphones used in high sensitivity applications, in which amplifier noise is the main factor limiting sensitivity of the measurements. In measurement microphone preamplifiers, the dominant source of noise at lower frequencies is the bias resistance of the input stage. In the presented solution, resistors were connected to the input stage by means of switches. The switches are opened during measurements, which disconnects the resistors from the input stage and results in noise reduction. Closing the switches allows for fast charging of the microphone capacitance. At low frequencies the noise of the designed preamplifier is a few times lower in comparison to similar, commercially available instruments.

  10. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  11. Optical wave microphone measurement during laser ablation of Si

    International Nuclear Information System (INIS)

    Pulsed laser irradiation is used for surface treatment of a solid and ablation for particle formation in gas, liquid or supercritical phase media. When a pulsed laser is used to irradiate a solid, spatial refractive index variations (including photothermal expansion, shockwaves and particles) occur, which vary depending on the energy density of the pulsed laser. We focused on this phenomenon and applied an unique method for detection of refractive index variation using an optical wave microphone based on Fraunhofer diffraction. In this research, we analyzed the waveforms and frequencies of refractive index variations caused by pulsed laser irradiation of silicon in air and measured with an optical wave microphone.

  12. Rotor noise measurement using a directional microphone array

    Science.gov (United States)

    Marcolini, Michael A.; Brooks, Thomas F.

    1987-01-01

    A directional array of microphones was used to measure the noise from a 40 percent scale model rotor in a large aeroacoustic wind tunnel. The development and design of this directional array is described. A design goal was that the array focus on a constant sensing area over a broad frequency range. The implementation of the array design is presented, followed by sample results for several different rotor test conditions. The directional array spectral results are compared with predictions of broadband self noise, and with total rotor noise measurements obtained from individual microphones of the array. The directional array is demonstrated to be a useful tool in examining noise source distributions.

  13. A low-noise/low-power preamplifier for capacitive microphones

    OpenAIRE

    Fürst, Claus Erdmann

    1996-01-01

    A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A-weighted). The amplifier is optimized for a capacitive microphone with a capacitance of 1.2 pF. The amplifier is fully integrated in a 0.7 μm n-well CMOS technology. Design details concerning noise performance a...

  14. A low-noise/low-power preamplifier for capacitive microphones

    DEFF Research Database (Denmark)

    Fürst, Claus Erdmann

    1996-01-01

    A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A-weighted). ......-weighted). The amplifier is optimized for a capacitive microphone with a capacitance of 1.2 pF. The amplifier is fully integrated in a 0.7 μm n-well CMOS technology. Design details concerning noise performance are analytically described...

  15. Small foamed polystyrene shield protects low-frequency microphones from wind noise

    Science.gov (United States)

    Tedrick, R. N.

    1964-01-01

    A foamed polystyrene noise shield for microphones has been designed in teardrop shape to minimize air turbulence. The shield slips on and off the microphone head easily and is very effective in low-frequency sound intensity measurements.

  16. 38 GHz Antennas on Micromachined Silicon Substrates.

    OpenAIRE

    Marcelli, Romolo; Dragoman, M.; Neculoiu, Dan; Giacomozzi, Flavio; Muller, Alexandru; Nitescu, N.

    2001-01-01

    A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 µm thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.

  17. Electrostatic actuators fabricated by surface micromachining techniques

    OpenAIRE

    Legtenberg, Rob

    1996-01-01

    This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.

  18. Non-Contact Surface Wave Scanning of Pavements Using a Rolling Microphone Array

    Science.gov (United States)

    Ryden, Nils; Lowe, Michael J. S.; Cawley, Peter

    2008-02-01

    We present experiments with a rolling multichannel microphone array where measurements can be taken continuously while moving. Leaky air-coupled surface waves are measured with ordinary non-directional audio microphones. Results show that microphones can be successfully used to produce a realistic phase velocity spectrum even while moving along the surface. The paper presents some theoretical background along with initial experimental results using the moving microphone array.

  19. New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones

    OpenAIRE

    Haas-Christensen, Jelena; Bruun, Erik; Andreani, Pietro; Stenberg, Lars J.; Rombach, Pirmin

    2009-01-01

    The topic of this thesis is the design of CMOS preamplifiers for condenser microphones. Increasingly popular type of condenser microphones are MEMS (micro-electro-mechanical) microphones which pose a stringent requirements to the design of interface electronics among other due to their increased noise. Besides that, as MEMS microphones are easy to integrate with CMOS circuitry, CMOS circuit design gains importance because it can contribute to the overall improved performance of the system by ...

  20. Using hearing aid directional microphones and noise reduction algorithms to enhance cochlear implant performance

    OpenAIRE

    Chung, K; Zeng, F G; Waltzman, S

    2004-01-01

    Hearing aids and cochlear implants are two major hearing enhancement technologies but yet share little in research and development. The purpose of this study was to determine whether hearing aid directional microphones and noise reduction technologies could enhance cochlear implant users' speech understanding and ease of listening. Digital hearing aids serving as preprocessors were programmed to omni-directional microphone, directional microphone, and directional microphone plus noise reducti...

  1. Laser micro-machining of three-dimensional microstructures in optical materials

    OpenAIRE

    Lai, PT; Choi, HW; Wang, XH

    2009-01-01

    We demostrate an advanced precision cutting tool using a 349 nm nanosecond pulsed UV laser micromachining setup. After expansion and collimation, the laser beam is directed vertically and focused with a high performance triplet lens. With an Al mirror inserted in the path of the convergent beam, the beam can be focused on a horizontal machining plane at any desired tilting angles. Microstructures of a wide range of geometries on hard materials can be formed using this custom machining method....

  2. A Multifunction Low-Power Preamplifier for MEMS Capacitive Microphones

    DEFF Research Database (Denmark)

    Jawed, Syed Arsalan; Nielsen, Jannik Hammel; Gottardi, Massimo;

    2009-01-01

    A multi-function two-stage chopper-stabilized preamplifier (PAMP) for MEMS capacitive microphones (MCM) is presented. The PAMP integrates digitally controllable gain, high-pass filtering and offset control, adding flexibility to the front-end readout of MCMs. The first stage of the PAMP consists of...

  3. High frequency microphone measurements for transition detection on airfoils

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given to...

  4. Measurement of Gravitational Acceleration Using a Computer Microphone Port

    Science.gov (United States)

    Khairurrijal; Eko Widiatmoko; Srigutomo, Wahyu; Kurniasih, Neny

    2012-01-01

    A method has been developed to measure the swing period of a simple pendulum automatically. The pendulum position is converted into a signal frequency by employing a simple electronic circuit that detects the intensity of infrared light reflected by the pendulum. The signal produced by the electronic circuit is sent to the microphone port and…

  5. The static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    The sensitivity of condenser measurement microphones depends on the environmental conditions due to the changes in the acoustic properties of the air enclosed between diaphragm and backelectrode and in the cavity behind the backelectrode. A theoretical investigation has been performed based on an...

  6. Guidelines for Selecting Microphones for Human Voice Production Research

    Science.gov (United States)

    Svec, Jan G.; Granqvist, Svante

    2010-01-01

    Purpose: This tutorial addresses fundamental characteristics of microphones (frequency response, frequency range, dynamic range, and directionality), which are important for accurate measurements of voice and speech. Method: Technical and voice literature was reviewed and analyzed. The following recommendations on desirable microphone…

  7. Design and Use of Microphone Directional Arrays for Aeroacoustic Measurements

    Science.gov (United States)

    Humphreys, William M., Jr.; Brooks, Thomas F.; Hunter, William W., Jr.; Meadows, Kristine R.

    1998-01-01

    An overview of the development of two microphone directional arrays for aeroacoustic testing is presented. These arrays were specifically developed to measure airframe noise in the NASA Langley Quiet Flow Facility. A large aperture directional array using 35 flush-mounted microphones was constructed to obtain high resolution noise localization maps around airframe models. This array possesses a maximum diagonal aperture size of 34 inches. A unique logarithmic spiral layout design was chosen for the targeted frequency range of 2-30 kHz. Complementing the large array is a small aperture directional array, constructed to obtain spectra and directivity information from regions on the model. This array, possessing 33 microphones with a maximum diagonal aperture size of 7.76 inches, is easily moved about the model in elevation and azimuth. Custom microphone shading algorithms have been developed to provide a frequency- and position-invariant sensing area from 10-40 kHz with an overall targeted frequency range for the array of 5-60 kHz. Both arrays are employed in acoustic measurements of a 6 percent of full scale airframe model consisting of a main element NACA 632-215 wing section with a 30 percent chord half-span flap. Representative data obtained from these measurements is presented, along with details of the array calibration and data post-processing procedures.

  8. Chip-size-packaged silicon microphones [for hearing instruments

    DEFF Research Database (Denmark)

    Müllenborn, Matthias; Rombach, Pirmin; Klein, Udo;

    2001-01-01

    The first results of silicon microphones that are completely batch-packaged and integrated with signal conditioning circuitry in a chip stack are discussed. The chip stack is designed to be directly mounted into a system, such as a hearing instrument, without further single-chip handling or wire...

  9. Static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1996-01-01

    extended lumped parameter representation of the mechanical and acoustical elements of the microphone, assuming the velocity distribution of the diaphragm to follow the zero-order Bessel function. The extension involves the frequency dependency of the dynamic diaphragm mass and stiffness as well as a first...

  10. Reconstruction of sound fields with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Walton, Tim

    2014-01-01

    Spherical microphone arrays are very well suited for sound field measurements in enclosures or interior spaces, and generally in acoustic environments where sound waves impinge on the array from multiple directions. Because of their directional properties, they make it possible to resolve sound w...

  11. Feasible pickup from intact ossicular chain with floating piezoelectric microphone

    Directory of Open Access Journals (Sweden)

    Kang Hou-Yong

    2012-02-01

    Full Text Available Abstract Objectives Many microphones have been developed to meet with the implantable requirement of totally implantable cochlear implant (TICI. However, a biocompatible one without destroying the intactness of the ossicular chain still remains under investigation. Such an implantable floating piezoelectric microphone (FPM has been manufactured and shows an efficient electroacoustic performance in vitro test at our lab. We examined whether it pick up sensitively from the intact ossicular chain and postulated whether it be an optimal implantable one. Methods Animal controlled experiment: five adult cats (eight ears were sacrificed as the model to test the electroacoustic performance of the FPM. Three groups were studied: (1 the experiment group (on malleus: the FPM glued onto the handle of the malleus of the intact ossicular chains; (2 negative control group (in vivo: the FPM only hung into the tympanic cavity; (3 positive control group (Hy-M30: a HiFi commercial microphone placed close to the site of the experiment ear. The testing speaker played pure tones orderly ranged from 0.25 to 8.0 kHz. The FPM inside the ear and the HiFi microphone simultaneously picked up acoustic vibration which recorded as .wav files to analyze. Results The FPM transformed acoustic vibration sensitively and flatly as did the in vitro test across the frequencies above 2.0 kHz, whereas inefficiently below 1.0 kHz for its overloading mass. Although the HiFi microphone presented more efficiently than the FPM did, there was no significant difference at 3.0 kHz and 8.0 kHz. Conclusions It is feasible to develop such an implantable FPM for future TICIs and TIHAs system on condition that the improvement of Micro Electromechanical System and piezoelectric ceramic material technology would be applied to reduce its weight and minimize its size.

  12. An investigation of methods for free-field comparison calibration of measurement microphones

    DEFF Research Database (Denmark)

    Barrera-Figueroa, Salvador; Moreno Pescador, Guillermo; Jacobsen, Finn; Rasmussen, Knud; Cutanda Henriquez, Vicente; Juhl, Peter Møller

    Free-field comparison calibration of measurement microphones requires that a calibrated reference microphone and a test microphone are exposed to the same sound pressure in a free field. The output voltages of the microphones can be measured either sequentially or simultaneously. The sequential...... method requires the sound field to have good temporal stability. The simultaneous method requires instead that the sound pressure is the same in the positions where the microphones are placed. In this paper the results of the application of the two methods are compared. A third combined method is...

  13. Focused high energy proton beam micromachining: A perspective view

    International Nuclear Information System (INIS)

    Micromachining techniques utilising optical, UV and X-ray photons, as well as electrons, low energy heavy ions and high energy light ions (protons), are briefly reviewed. The advantages and disadvantages of each process are discussed. High energy ion beam micromachining (proton micromachining) is a new process which exhibits a unique feature; direct-write 3-dimensional micromachining at submicron resolutions. Although this technique may not compete with conventional mask processes for producing high volume batch production of microcomponents, high energy ion beam micromachining may have a significant role in rapid prototyping, research into the characteristics of microstructures, and the manufacture of molds, stamps and thick masks. Several examples of high energy proton micromachining are presented to illustrate the potential of the technique

  14. Femtosecond laser waveguide micromachining of PMMA films with azoaromatic chromophores.

    Science.gov (United States)

    Mendonca, C R; Cerami, L R; Shih, T; Tilghman, R W; Baldacchini, T; Mazur, E

    2008-01-01

    We report on the femtosecond-laser micromachining of poly(methyl methacrylate) (PMMA) films doped with nonlinear azoaromatic chromophores: Disperse Red 1, Disperse Red 13 and Disperse Orange 3. We study the conditions for controlling chromophore degradation during the micromachining of PMMA doped with each chromophore. Furthermore, we successfully used fs-micromachining to fabricate optical waveguides within a bulk sample of PMMA doped with these azochromophores. PMID:18521148

  15. Micromachining – Review of Literature from 1980 to 2010

    Directory of Open Access Journals (Sweden)

    Zdenka Keran

    2014-01-01

    Full Text Available Trend of miniaturization of products and consequently its components nowadays can be evident in almost every production field. To accomplish requirements imposed by miniaturization micromachining proved to be a satisfied manufacturing technique. Herein the term micromachining refers to mechanical micro cutting techniques where material is removed by geometrically determined cutting edges. The aim of this review article is to summarize existing knowledge and highlight current challenges, restrictions and advantages in the field of micromachining.

  16. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  17. Micromachined Inclinometer Based on Fluid Convection

    CERN Document Server

    Crespy, N; Combette, P; Boyer, P Temple; Giani, A; Foucaran, A

    2008-01-01

    This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numeric...

  18. Micro benchtop optics by bulk silicon micromachining

    Science.gov (United States)

    Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

    2000-01-01

    Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

  19. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  20. Micromachined Horn Antenna Operating at 75 GHz

    OpenAIRE

    Grzegorczyk, Tomasz M.; Zurcher, Jean-François; Renaud, Philippe; Mosig, Juan R.

    2000-01-01

    We propose in this paper an integrated cavity-backed horn antenna, generalizing the well-known SSFIP (Strip-Slot-Foam-Inverted Patch) design, operating at 75 GHz. The antenna was optimized using a full-wave software and realized using micromachining technologies. The proposed structure can be used for high radiation ef-ficiency antennas and arrays in the millimeter-wave band, since surface waves are inherently suppressed by the use of a metallic horn and a cavity configuration.

  1. Surface micromachining of unfired ceramic sheets

    OpenAIRE

    Rheaume, Jonathan M.; Pisano, Albert P.

    2011-01-01

    Conventional surface micromachining techniques including photolithography and both wet and dry etching have been directly applied to an unfired sheet of yttria-stabilized zirconia ceramic material. Reversible bonding methods were investigated for affixing unfired ceramic samples to silicon handle wafers in order to perform photolithography. Three types of photoresist were investigated. Thin film photoresist allowed a line-width feature size of 8 μm to be obtained. Thick film photoresist exhib...

  2. A Surface Micromachined CMOS MEMS Humidity Sensor

    Directory of Open Access Journals (Sweden)

    Jian-Qiu Huang

    2015-10-01

    Full Text Available This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. According to the test results, the sensitivity of the sensor was 7 mV/%RH (relative humidity and the linearity of the sensor was 1.9% at 20 °C. Both the sensitivity and linearity were not sensitive to the temperature but the curve of the output voltage shifted with the temperature. The hysteresis of the humidity sensor decreased from 3.2% RH to 1.9% RH as the temperature increased from 10 to 40 °C. The recovery time of the sensor was 85 s at room temperature (25 °C.

  3. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  4. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  5. Tool calibration system for micromachining system

    Science.gov (United States)

    Miller, Donald M.

    1979-03-06

    A tool calibration system including a tool calibration fixture and a tool height and offset calibration insert for calibrating the position of a tool bit in a micromachining tool system. The tool calibration fixture comprises a yokelike structure having a triangular head, a cavity in the triangular head, and a port which communicates a side of the triangular head with the cavity. Yoke arms integral with the triangular head extend along each side of a tool bar and a tool head of the micromachining tool system. The yoke arms are secured to the tool bar to place the cavity around a tool bit which may be mounted to the end of the tool head. Three linear variable differential transformer's (LVDT) are adjustably mounted in the triangular head along an X axis, a Y axis, and a Z axis. The calibration insert comprises a main base which can be mounted in the tool head of the micromachining tool system in place of a tool holder and a reference projection extending from a front surface of the main base. Reference surfaces of the calibration insert and a reference surface on a tool bar standard length are used to set the three LVDT's of the calibration fixture to the tool reference position. These positions are transferred permanently to a mastering station. The tool calibration fixture is then used to transfer the tool reference position of the mastering station to the tool bit.

  6. Micro-machining of resists on silicon by proton beam writing

    International Nuclear Information System (INIS)

    We report micro-machining of resists on silicon by proton beam writing (PBW) at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, Japan. We studied the proton beam irradiation effects on typical positive and negative resists such as PMMA and SU-8, respectively, for application of the PBW technique to micro-machining. These resist materials were subjected to the scanning of a focused beam of protons accelerated using the microbeam facility of TIARA. Diameter of the proton beam was focused to about 1 μm. The fluence was varied to examine the irradiation effects on these resists as a function of the beam current and irradiation time. After exposure to proton beam, samples were developed and evaluated by a scanning electron microscope. Attempts to fabricate nickel stamps were also made by electroplating on the structures formed by PBW for application to imprint lithography

  7. Audio Sensing Aid based Wireless Microphone Emulation Attacks Detection

    Directory of Open Access Journals (Sweden)

    Wang Shan-shan

    2013-10-01

    Full Text Available The wireless microphone network is an important PU network for CRN, but there is no effective technology to solve the problem of microphone evaluation attacks. Therefore, this paper propose ASA algorithm, which utilizes three devices to detect MUs, and they are loudspeaker audio sensor (LAS, environment audio sensor (EAS, and radio frequency fingerprint detector (RFFD. LASs are installed near loudspeakers, which have two main effects: One is to sense loudspeakers’ output, and the other is to broadcast warning information to all SUs through the common control channel when detecting valid output. EASs are pocket voice captures provided to SU, and utilized to sense loudspeaker sound at SU’s location. Utilizing EASs and energy detections in SU can detect primary user emulation attack (PUEA fast. But to acquire the information of attacked channels, we need explore RFFDs to analyze the features of PU transmitters. The results show that the proposed algorithm can detect PUEA well.    

  8. Optical sensing in a directional hearing aid microphone

    Science.gov (United States)

    Zhou, Shuang

    This thesis describes the simulation and analysis of the use of optical sensing for a MEMS directional microphone. Diffraction gratings integrated with micro-electromechanical-systems (MEMS) offer an optical sensing scheme with high detection sensitivity, low noise level and compact device structure. An optical sensing method is applied in a hearing aid microphone to detect the movement of the diaphragm due to sound. Diffraction grating fingers are fabricated on both sides of the diaphragm with a gold mirror on top. Two photo detectors are placed on the substrate symmetrically to detect the positive and negative first order diffraction of 850 nm VCSEL light. A finite element analysis model is built in COMSOL to study the light distribution and energy loss. The signal output, predicted using an analytical model is shown to agree well with those obtained using the finite element model.

  9. Microphone arrays and sound field decomposition for dynamic binaural recording

    OpenAIRE

    Bernschütz, Benjamin

    2016-01-01

    This thesis discusses a field-related recording technique based on microphone arrays and orthogonal sound field decomposition that delivers a suitable description for dynamic binaural reproduction. Dynamic binaural reproduction refers to a mostly headphone-based reproduction method that allows for presenting localizable virtual sources and accounts for the head movements of the recipient in order to decouple them from the spatial orientation of the virtual auditory scene. Increased source loc...

  10. Factors affecting the performance of large-aperture microphone arrays.

    Science.gov (United States)

    Silverman, Harvey F; Patterson, William R; Sachar, Joshua

    2002-05-01

    Large arrays of microphones have been proposed and studied as a possible means of acquiring data in offices, conference rooms, and auditoria without requiring close-talking microphones. When such an array essentially surrounds all possible sources, it is said to have a large aperture. Large-aperture arrays have attractive properties of spatial resolution and signal-to-noise enhancement. This paper presents a careful comparison of theoretical and measured performance for an array of 256 microphones using simple delay-and-sum beamforming. This is the largest currently functional, all digital-signal-processing array that we know of. The array is wall-mounted in the moderately adverse environment of a general-purpose laboratory (8 m x 8 m x 3 m). The room has a T60 reverberation time of 550 ms. Reverberation effects in this room severely impact the array's performance. However, the width of the main lobe remains comparable to that of a simplified prediction. Broadband spatial resolution shows a single central peak with 10 dB gain about 0.4 m in diameter at the -3 dB level. Away from that peak, the response is approximately flat over most of the room. Optimal weighting for signal-to-noise enhancement degrades the spatial resolution minimally. Experimentally, we verify that signal-to-noise gain is less than proportional to the square root of the number of microphones probably due to the partial correlation of the noise between channels, to variation of signal intensity with polar angle about the source, and to imperfect correlation of the signal over the array caused by reverberations. We show measurements of the relative importance of each effect in our environment. PMID:12051434

  11. Modeling the performance of MEMS based directional microphones

    OpenAIRE

    Chatzopoulos, Dimitrios.

    2008-01-01

    A Micro Electro Mechanical System (MEMS) based directional microphone consisting of two plates hinged at the center is modeled using finite element software. A new method is developed in which the sensor is acoustically coupled to an incoming sound wave. The method successfully reproduces results of previous non-acoustic coupled simulations for solid plates. The resonance frequencies match within 0.8% for the rocking mode and 2% for the bending mode. The displacement amplitudes match with...

  12. Microphone array power ratio for quality assessment of reverberated speech

    Science.gov (United States)

    Berkun, Reuven; Cohen, Israel

    2015-12-01

    Speech signals in enclosed environments are often distorted by reverberation and noise. In speech communication systems with several randomly distributed microphones, involving a dynamic speaker and unknown source location, it is of great interest to monitor the perceived quality at each microphone and select the signal with the best quality. Most of existing approaches for quality estimation require prior information or a clean reference signal, which is unfortunately seldom available. In this paper, a practical non-intrusive method for quality assessment of reverberated speech signals is proposed. Using a statistical model of the reverberation process, we examine the energies as measured by unidirectional elements in a microphone array. By measuring the power ratio, we obtain a measure for the amount of reverberation in the received acoustic signals. This measure is then utilized to derive a blind estimation of the direct-to-reverberation energy ratio in the room. The proposed approach attains a simple, reliable, and robust quality measure, shown here through persuasive simulation results.

  13. Noise Reduction with Microphone Arrays for Speaker Identification

    Energy Technology Data Exchange (ETDEWEB)

    Cohen, Z

    2011-12-22

    Reducing acoustic noise in audio recordings is an ongoing problem that plagues many applications. This noise is hard to reduce because of interfering sources and non-stationary behavior of the overall background noise. Many single channel noise reduction algorithms exist but are limited in that the more the noise is reduced; the more the signal of interest is distorted due to the fact that the signal and noise overlap in frequency. Specifically acoustic background noise causes problems in the area of speaker identification. Recording a speaker in the presence of acoustic noise ultimately limits the performance and confidence of speaker identification algorithms. In situations where it is impossible to control the environment where the speech sample is taken, noise reduction filtering algorithms need to be developed to clean the recorded speech of background noise. Because single channel noise reduction algorithms would distort the speech signal, the overall challenge of this project was to see if spatial information provided by microphone arrays could be exploited to aid in speaker identification. The goals are: (1) Test the feasibility of using microphone arrays to reduce background noise in speech recordings; (2) Characterize and compare different multichannel noise reduction algorithms; (3) Provide recommendations for using these multichannel algorithms; and (4) Ultimately answer the question - Can the use of microphone arrays aid in speaker identification?

  14. Technology and applications of micromachined silicon adaptive mirrors

    NARCIS (Netherlands)

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  15. Ductile mode electrochemical oxidation assisted micromachining for glassy carbon

    International Nuclear Information System (INIS)

    Recently, a new mechanical machining process using electrochemical oxidation was reported. Electrochemical oxidation assisted micromachining was applied to the machining of glassy carbon. The material removal process of the electrochemical oxidation assisted micromachining consists of repeated cycles of oxidation followed by removal of the oxide layer. In this paper, we experimentally investigate and compare the critical chip thickness for ductile mode cutting in mechanical machining and electrochemical oxidation assisted micromachining of glassy carbon. The theoretical critical chip thickness is calculated for mechanical machining of glassy carbon and experimentally verified. The effect of electrochemical oxidation on the critical chip thickness for ductile mode micromachining is also studied for glassy carbon. It is found that the critical chip thickness is increased for the electrochemical oxidation assisted micromachining. (paper)

  16. Nonnegative signal factorization with learnt instrument models for sound source separation in close-microphone recordings

    OpenAIRE

    Carabias Orti, Julio J; Cobos, M??ximo; Vera Candeas, Pedro; Rodr??guez Serrano, Francisco J

    2013-01-01

    Close-microphone techniques are extensively employed in many live music recordings, allowing for interference rejection and reducing the amount of reverberation in the resulting instrument tracks. However, despite the use of directional microphones, the recorded tracks are not completely free from source interference, a problem which is commonly known as microphone leakage. While source separation methods are potentially a solution to this problem, few approaches take into account the huge am...

  17. Surface micromachined electrostatically actuated micro peristaltic pump

    OpenAIRE

    Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu-Chong

    2004-01-01

    An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and a...

  18. Active micromachines: Microfluidics powered by mesoscale turbulence.

    Science.gov (United States)

    Thampi, Sumesh P; Doostmohammadi, Amin; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-07-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  19. Use of chemical mechanical polishing in micromachining

    Science.gov (United States)

    Nasby, R.D.; Hetherington, D.L.; Sniegowski, J.J.; McWhorter, P.J.; Apblett, C.A.

    1998-09-08

    A process for removing topography effects during fabrication of micromachines. A sacrificial oxide layer is deposited over a level containing functional elements with etched valleys between the elements such that the sacrificial layer has sufficient thickness to fill the valleys and extend in thickness upwards to the extent that the lowest point on the upper surface of the oxide layer is at least as high as the top surface of the functional elements in the covered level. The sacrificial oxide layer is then polished down and planarized by chemical-mechanical polishing. Another layer of functional elements is then formed upon this new planarized surface. 4 figs.

  20. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  1. Active micromachines: Microfluidics powered by mesoscale turbulence

    Science.gov (United States)

    Thampi, Sumesh P.; Doostmohammadi, Amin; Shendruk, Tyler N.; Golestanian, Ramin; Yeomans, Julia M.

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  2. Methods for Room Acoustic Analysis and Synthesis using a Monopole-Dipole Microphone Array

    Science.gov (United States)

    Abel, J. S.; Begault, Durand R.; Null, Cynthia H. (Technical Monitor)

    1998-01-01

    In recent work, a microphone array consisting of an omnidirectional microphone and colocated dipole microphones having orthogonally aligned dipole axes was used to examine the directional nature of a room impulse response. The arrival of significant reflections was indicated by peaks in the power of the omnidirectional microphone response; reflection direction of arrival was revealed by comparing zero-lag crosscorrelations between the omnidirectional response and the dipole responses to the omnidirectional response power to estimate arrival direction cosines with respect to the dipole axes.

  3. On the interference between the two microphones in free-field reciprocity calibration

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn;

    2004-01-01

    One of the fundamental assumptions in free-field reciprocity calibration of microphones is that the microphones can be substituted by point sources at the positions where the acoustic centers are located. However, in practice the microphones have finite dimensions and, at the distance and in the...... frequency range where the measurements are made, the direct wave and the subsequent reflections from the microphones interfere with each other, creating a "standing wave." This interference effect gives rise to deviations from the inverse distance law, indicating that the free-field assumption is not...

  4. A new approach to tackle noise issue in miniature directional microphones: bio-inspired mechanical coupling

    Science.gov (United States)

    Liu, Haijun; Yu, Miao

    2010-04-01

    When using microphone array for sound source localization, the most fundamental step is to estimate the time difference of arrival (TDOA) between different microphones. Since TDOA is proportional to the microphone separation, the localization performance degrades with decreasing size relative to the sound wavelength. To address the size constraint of conventional directional microphones, a new approach is sought by utilizing the mechanical coupling mechanism found in the superacute ears of the parasitic fly Ormia ochracea. Previously, we have presented a novel bio-inspired directional microphone consisting of two circular clamped membranes structurally coupled by a center pivoted bridge, and demonstrated both theoretically and experimentally that the fly ear mechanism is replicable in a man-made structure. The emphasis of this article is on theoretical analysis of the thermal noise floor of the bio-inspired directional microphones. Using an equivalent two degrees-of-freedom model, the mechanical-thermal noise limit of the structurally coupled microphone is estimated and compared with those obtained for a single omni-directional microphone and a conventional microphone pair. Parametric studies are also conducted to investigate the effects of key normalized parameters on the noise floor and the signal-to-noise ratio (SNR).

  5. Robust micromachining of compliant mechanisms using silicides

    International Nuclear Information System (INIS)

    We introduce an innovative sacrificial surface micromachining process that enhances the mechanical robustness of freestanding microstructures and compliant mechanisms. This process facilitates the fabrication, and improves the assembly yield of the out-of-plane micro sensors and actuators. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at the structure step can easily exceed the yield strength of the material and lead to the structure failure. Our process overcomes this topographic issue by virtually eliminating the step between the structure and its anchor, and achieves planarization without using chemical mechanical polishing. The process is based on low temperature and post-CMOS compatible nickel silicide technology. We use a layer of amorphous silicon (a-Si) as a sacrificial layer, which is locally converted to nickel silicide to form the anchors. High etch selectivity between silicon and nickel silicide in the xenon difluoride gas (sacrificial layer etchant) enables us to use the silicide to anchor the structures to the substrate. The formed silicide has the same thickness as the sacrificial layer; therefore, the structure is virtually flat. The maximum measured step between the anchor and the sacrificial layer is about 10 nm on a 300 nm thick sacrificial layer. (paper)

  6. Micromachining using a focused ion beam miller

    International Nuclear Information System (INIS)

    Full text: The focused ion beam (FIB) miller is becoming well established as a machine for the structural analysis of materials and for the rapid preparation of transmission electron microscope specimens. It has also been used for some time in the semiconducting materials industry for the analysis, repair and redesign of device materials. However, one emerging technique is the use of the FIB for micromachining. The FIB software can also be used to manufacture and machine components. This process can occur through converting software, typically in the form of bitmaps or TIF files, to proprietary 'stream' files. These files allow, often complex, patterns to be generated and milled into the specimen and thus the generation of micro-electromechanical systems. Frequently, this involves largely two-dimensional patterns and structures, however, more complex patterns and file types can be generated which allow, for example, device prototyping or the preparation of three-dimensional structures such as atom probe field ion microscope (APFIM) specimens. In this presentation the protocols for creating and using these files will be described together with examples of the patterns and its application to micromachining, device prototyping and APFIM specimens. Copyright (2002) Australian Society for Electron Microscopy Inc

  7. Comparison of binaural microphones for externalization of sounds

    DEFF Research Database (Denmark)

    Cubick, Jens; Sánchez Rodríguez, C.; Song, Wookeun; MacDonald, Ewen

    2015-01-01

    Ubiquitous availability of media content through portable devices like media players and smartphones has resulted in an immensely increased popularity of headphones in recent years. However, while conventional stereo recordings usually create a good sense of space when listened to through...... loudspeakers, the sounds tend to be perceived inside the head (internalized) when headphones are used for listening. A more natural perception in headphone listening with sounds being perceived outside the head (externalized) can be achieved when recordings are made with dummy head microphones or with...

  8. X-ray microcalorimeter arrays fabricated by surface micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Hilton, G.C. E-mail: hilton@boulder.nist.gov; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D

    2004-03-11

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors.

  9. X-ray microcalorimeter arrays fabricated by surface micromachining

    International Nuclear Information System (INIS)

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

  10. Polyvinylidene fluoride (PVDF) vibration sensor for stethoscope and contact microphones

    Science.gov (United States)

    Toda, Minoru; Thompson, Mitchell

    2005-09-01

    This paper describes a new type of contact vibration sensor made by bonding piezoelectric PVDF film to a curved frame structure. The concave surface of the film is bonded to a rubber piece having a front contact face. Vibration is transmitted from this face through the rubber to the surface of the PVDF film. Pressure normal to the surface of the film is converted to circumferential strain, and an electric field is induced by the piezoelectric effect. The frequency response of the device was measured using an accelerometer mounted between the rubber face and a rigid vibration exciter plate. Sensitivity (voltage per unit displacement) was deduced from the device output and measured acceleration. The sensitivity was flat from 16 Hz to 3 kHz, peaking at 6 kHz due to a structural resonance. Calculations predicting performance against human tissue (stethoscope or contact microphone) show results similar to data measured against the metal vibrator. This implies that an accelerometer can be used for calibrating a stethoscope or contact microphone. The observed arterial pulse waveform showed more low-frequency content than a conventional electronic stethoscope.

  11. Multi-microphone adaptive array augmented with visual cueing.

    Science.gov (United States)

    Gibson, Paul L; Hedin, Dan S; Davies-Venn, Evelyn E; Nelson, Peggy; Kramer, Kevin

    2012-01-01

    We present the development of an audiovisual array that enables hearing aid users to converse with multiple speakers in reverberant environments with significant speech babble noise where their hearing aids do not function well. The system concept consists of a smartphone, a smartphone accessory, and a smartphone software application. The smartphone accessory concept is a multi-microphone audiovisual array in a form factor that allows attachment to the back of the smartphone. The accessory will also contain a lower power radio by which it can transmit audio signals to compatible hearing aids. The smartphone software application concept will use the smartphone's built in camera to acquire images and perform real-time face detection using the built-in face detection support of the smartphone. The audiovisual beamforming algorithm uses the location of talking targets to improve the signal to noise ratio and consequently improve the user's speech intelligibility. Since the proposed array system leverages a handheld consumer electronic device, it will be portable and low cost. A PC based experimental system was developed to demonstrate the feasibility of an audiovisual multi-microphone array and these results are presented. PMID:23366063

  12. On the ability of consumer electronics microphones for environmental noise monitoring.

    Science.gov (United States)

    Van Renterghem, Timothy; Thomas, Pieter; Dominguez, Frederico; Dauwe, Samuel; Touhafi, Abdellah; Dhoedt, Bart; Botteldooren, Dick

    2011-03-01

    The massive production of microphones for consumer electronics, and the shift from dedicated processing hardware to PC-based systems, opens the way to build affordable, extensive noise measurement networks. Applications include e.g. noise limit and urban soundscape monitoring, and validation of calculated noise maps. Microphones are the critical components of such a network. Therefore, in a first step, some basic characteristics of 8 microphones, distributed over a wide range of price classes, were measured in a standardized way in an anechoic chamber. In a next step, a thorough evaluation was made of the ability of these microphones to be used for environmental noise monitoring. This was done during a continuous, half-year lasting outdoor experiment, characterized by a wide variety of meteorological conditions. While some microphones failed during the course of this test, it was shown that it is possible to identify cheap microphones that highly correlate to the reference microphone during the full test period. When the deviations are expressed in total A-weighted (road traffic) noise levels, values of less than 1 dBA are obtained, in excess to the deviation amongst reference microphones themselves. PMID:21157618

  13. Beamforming with a circular microphone array for localization of environmental sources of noise

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2010-01-01

    It is often enough to localize environmental sources of noise from different directions in a plane. This can be accomplished with a circular microphone array, which can be designed to have practically the same resolution over 360. The microphones can be suspended in free space or they can be...

  14. Beamforming with a circular microphone array for localization of environmental noise sources

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2010-01-01

    It is often enough to localize environmental sources of noise from different directions in a plane. This can be accomplished with a circular microphone array, which can be designed to have practically the same resolution over 360. The microphones can be suspended in free space or they can be...

  15. Multi-microphone adaptive noise reduction strategies for coordinated stimulation in bilateral cochlear implant devices.

    Science.gov (United States)

    Kokkinakis, Kostas; Loizou, Philipos C

    2010-05-01

    Bilateral cochlear implant (BI-CI) recipients achieve high word recognition scores in quiet listening conditions. Still, there is a substantial drop in speech recognition performance when there is reverberation and more than one interferers. BI-CI users utilize information from just two directional microphones placed on opposite sides of the head in a so-called independent stimulation mode. To enhance the ability of BI-CI users to communicate in noise, the use of two computationally inexpensive multi-microphone adaptive noise reduction strategies exploiting information simultaneously collected by the microphones associated with two behind-the-ear (BTE) processors (one per ear) is proposed. To this end, as many as four microphones are employed (two omni-directional and two directional) in each of the two BTE processors (one per ear). In the proposed two-microphone binaural strategies, all four microphones (two behind each ear) are being used in a coordinated stimulation mode. The hypothesis is that such strategies combine spatial information from all microphones to form a better representation of the target than that made available with only a single input. Speech intelligibility is assessed in BI-CI listeners using IEEE sentences corrupted by up to three steady speech-shaped noise sources. Results indicate that multi-microphone strategies improve speech understanding in single- and multi-noise source scenarios. PMID:21117762

  16. Hybrid method for determining the parameters of condenser microphones from measured membrane velocities and numerical calculations

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2009-01-01

    Typically, numerical calculations of the pressure, free-field, and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  17. On determination of microphone response and other parameters by a hybrid experimental and numerical method

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn; Rasmussen, Knud

    2008-01-01

    Typically, numerical calculations of the pressure, free-field and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  18. Theory and design of compact hybrid microphone arrays on two-dimensional planes for three-dimensional soundfield analysis.

    Science.gov (United States)

    Chen, Hanchi; Abhayapala, Thushara D; Zhang, Wen

    2015-11-01

    Soundfield analysis based on spherical harmonic decomposition has been widely used in various applications; however, a drawback is the three-dimensional geometry of the microphone arrays. In this paper, a method to design two-dimensional planar microphone arrays that are capable of capturing three-dimensional (3D) spatial soundfields is proposed. Through the utilization of both omni-directional and first order microphones, the proposed microphone array is capable of measuring soundfield components that are undetectable to conventional planar omni-directional microphone arrays, thus providing the same functionality as 3D arrays designed for the same purpose. Simulations show that the accuracy of the planar microphone array is comparable to traditional spherical microphone arrays. Due to its compact shape, the proposed microphone array greatly increases the feasibility of 3D soundfield analysis techniques in real-world applications. PMID:26627782

  19. Silicon micromachining using a high-density plasma source

    Energy Technology Data Exchange (ETDEWEB)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G. [Surface Technology Systems, Imperial Park, Newport (United Kingdom)

    2001-09-21

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE{sup TM}) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of {approx}750 {mu}m. Where the profile is not critical, etch rates of greater than 8 {mu}m min{sup -1} have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  20. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASETM) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min-1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  1. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  2. Fabrication of silicon bolometers with bulk micromachining technology

    International Nuclear Information System (INIS)

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate β-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 μm3) and links (2150x22x15 μm3) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment

  3. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  4. Fabrication of silicon bolometers with bulk micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Faes, A. E-mail: alesfaes@itc.it; Giacomozzi, F.; Margesin, B.; Nucciotti, A

    2004-03-11

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate {beta}-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 {mu}m{sup 3}) and links (2150x22x15 {mu}m{sup 3}) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment.

  5. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  6. Modelling the pressure field in the vicinity of a microphone membrane using PIV

    CERN Document Server

    Richoux, Olivier; Gazengel, Bruno; Macdonald, Robert; Campbell, M

    2009-01-01

    A new approach for for estimating the acoustic pressure in the near field of a microphone based on non-intrusive direct measurement of acoustic particle velocity is proposed. This method enables the estimation of the acoustic pressure inside a domain located in front of the microphone membrane. The acoustic pressure is calculated using the acoustic particle velocity on the frontiers of this domain and a physical model based on the Green function of the system. Results are obtained using the acoustic velocity measured with Particle Image Velocimetry (PIV) in front of a microphone excited with a plane wave inside a rectangular waveguide. They show that the diffraction of the plane wave by the microphone leads to an increase of the acoustic pressure on the microphone edge in the order of magnitude of 0.1 dB.

  7. Testing and characterization of a biologically-inspired first-order directional MEMS microphone

    Science.gov (United States)

    Antonelli, Daniel

    First-order directional microphones have a response that is proportional to the spatial gradient of sound pressure. The overall response, however, will also be influenced by the average sound pressure acting on the microphone diaphragm. For directional microphones to exhibit the desired first-order figure-8 directivity pattern, the response must be dominated by the pressure gradient rather than the pressure. A testing process has been developed to characterize the acoustic response of a biologically-inspired first-order directional MEMS microphone by separating the total measured response into the response due to the spatial average of the pressure and the response due to pressure gradient. Understanding how the pressure and pressure gradient of a sound field separately influence the overall behavior of this class of microphone is critical to assessing their performance. An experimental test setup and data processing algorithms have been developed which are shown to successfully achieve these goals.

  8. Micromachined Tunneling Displacement Transducers for Physical Sensors

    Science.gov (United States)

    Kenny, T. W.; Kaiser, W. J.; Podosek, J. A.; Rockstad, H. K.; Reynolds, J. K.; Vote, E. C.

    1993-01-01

    We have designed and constructed a series of tunneling sensors which take advantage of the extreme position sensitivity of electron tunneling. In these sensors, a tunneling displacement transducer, based on scanning tunneling microscopy principles, is used to detect the signal-induced motion of a sensor element. Through the use of high-resonant frequency mechanical elements for the transducer, sensors may be constructed which offer wide bandwidth, and are robust and easily operated. Silicon micromachining may be used to fabricate the transducer elements, allowing integration of sensor and control electronics. Examples of tunneling accelerometers and infrared detectors will be discussed. In each case, the use of the tunneling transducer allows miniaturization of the sensor as well as enhancement of the sensor performance.

  9. Laser micromachining of sputtered DLC films

    Energy Technology Data Exchange (ETDEWEB)

    Fu, Y.Q. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)]. E-mail: yf229@cam.ac.uk; Luo, J.K. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Flewitt, A.J. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Ong, S.E. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Zhang, S. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Milne, W.I. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)

    2006-04-30

    DLC films with different thicknesses (from 100 nm to 1.9 {mu}m) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp{sup 2}/sp{sup 3} ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF{sub 6} plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details.

  10. Surface micromachining of UV transparent materials

    Energy Technology Data Exchange (ETDEWEB)

    Kopitkovas, G.; Lippert, T.; David, C.; Wokaun, A.; Gobrecht, J

    2004-04-01

    A method which utilizes XeCl excimer laser and an absorbing liquid in contact with the material for precise structuring of UV transparent materials is presented. This one step micromachining process enables the fabrication of micro-optical elements with continuous profiles such as Fresnel micro-lenses in CaF{sub 2} and quartz with fluences well below the damage threshold of these materials. The roughness of the etched features varies from 10 nm to 3 {mu}m depending on the laser fluence and material. The etch rates of different UV transparent materials (such as CaF{sub 2}, BaF{sub 2}, sapphire and quartz) at various laser fluences suggest that several different parameters influence the etching process.

  11. Laser micromachining of sputtered DLC films

    International Nuclear Information System (INIS)

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  12. Performance Evaluation of Laser Micro-Machining Installations

    OpenAIRE

    Daemi, Bita; Mattsson, Lars

    2013-01-01

    Laser micro-machining is a growing field for micro manufacturing in many different materials. To obtain a better understanding of the accuracy of laser micro-machining equipment, moreover machine’s specification, a precise verification test is needed to measure the absolute performance of the machine. Available capability information is usually based on specifications given for the machine installations by machine deliverers. But in practice the absolute performances of some of the micro lase...

  13. A practical implementation of microphone free-field comparison calibration according to the standard IEC 61094-8

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras Rosell, Antoni; Rasmussen, Knud;

    2012-01-01

    An international standard concerned with the calibration of microphones in a free field by comparison has recently been published. The standard contemplates two main calibration methodologies for determining the sensitivity of a microphone under test when compared against a reference microphone...

  14. Robustness of a Mixed-Order Ambisonics Microphone Array for Sound Field Reproduction

    DEFF Research Database (Denmark)

    Marschall, Marton; Favrot, Sylvain Emmanuel; Buchholz, Jörg

    2012-01-01

    Spherical microphone arrays can be used to capture and reproduce the spatial characteristics of acoustic scenes. A mixed-order Ambisonics (MOA) approach was recently proposed to improve the horizontal spatial resolution of microphone arrays with a given number of transducers. In this paper, the...... performance and robustness of an MOA array to variations in microphone characteristics as well as self-noise was investigated. Two array processing strategies were evaluated. Results showed that the expected performance benets of MOA are achieved at mid to high frequencies, and that robustness to various...

  15. A New Calibration Method for Microphone Array with Gain, Phase, and Position Errors

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    Microphone array can be used in sound source localization and separation. But gain, phase, and position errors can seriously influence the performance of localization algorithms such as multiple signal classification (MUSIC) algorithm. In this paper, a new calibration method for microphone array with gain, phase, and position errors is proposed. Unlike traditional calibration methods for antenna array, the proposed method can be used in the broadband and near-field signal model such as microphone array with arbitrary sensor geometries in one plane. Computer simulations are presented and simulation results show the new method having good performance.

  16. A Two-dimensional Position Estimate of Two Sound Sources Using Two Microphones with Reflectors

    Science.gov (United States)

    Nakashima, Hiromichi; Kawamoto, Mitsuru; Ito, Masanori; Mukai, Toshiharu

    Human beings and living things have the capability of identifying the directions of two or more sounds by a certain amount of correctness with only two ears. However it is difficult to give this capability to robots. Almost all the robots which have been proposed until now have three or more microphones in order to localize sound sources. In this paper, we propose a technique of estimating two kinds of directions, that is, vertical and horizontal directions, using a robot head consisted of two microphones, where the microphones of the robot head have reflectors working like the pinna.

  17. Acoustic Beam Forming Array Using Feedback-Controlled Microphones for Tuning and Self-Matching of Frequency Response

    Science.gov (United States)

    Radcliffe, Eliott (Inventor); Naguib, Ahmed (Inventor); Humphreys, Jr., William M. (Inventor)

    2014-01-01

    A feedback-controlled microphone includes a microphone body and a membrane operatively connected to the body. The membrane is configured to be initially deflected by acoustic pressure such that the initial deflection is characterized by a frequency response. The microphone also includes a sensor configured to detect the frequency response of the initial deflection and generate an output voltage indicative thereof. The microphone additionally includes a compensator in electric communication with the sensor and configured to establish a regulated voltage in response to the output voltage. Furthermore, the microphone includes an actuator in electric communication with the compensator, wherein the actuator is configured to secondarily deflect the membrane in opposition to the initial deflection such that the frequency response is adjusted. An acoustic beam forming microphone array including a plurality of the above feedback-controlled microphones is also disclosed.

  18. Experimental validation of a coprime linear microphone array for high-resolution direction-of-arrival measurements.

    Science.gov (United States)

    Xiang, Ning; Bush, Dane; Summers, Jason E

    2015-04-01

    Coprime linear microphone arrays allow for narrower beams with fewer sensors. A coprime microphone array consists of two staggered uniform linear subarrays with M and N microphones, where M and N are coprime with each other. By applying spatial filtering to both subarrays and combining their outputs, M+N-1 microphones yield M⋅N directional bands. In this work, the coprime sampling theory is implemented in the form of a linear microphone array of 16 elements with coprime numbers of 9 and 8. This coprime microphone array is experimentally tested to validate the coprime array theory. Both predicted and measured results are discussed. Experimental results confirm that narrow beampatterns as predicted by the coprime sampling theory can be obtained by the coprime microphone array. PMID:25920875

  19. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here. PMID:26233342

  20. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  1. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Energy Technology Data Exchange (ETDEWEB)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin [High Pressure Collaborative Access Team, Geophysical Laboratory, Carnegie Institution of Washington, Argonne, Illinois 60439 (United States)

    2015-07-15

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  2. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    International Nuclear Information System (INIS)

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

  3. High definition surface micromachining of LiNbO3 by ion implantation

    International Nuclear Information System (INIS)

    High Energy Ion Implantation (HEII) of both medium and light mass ions has been successfully applied for the surface micromachining of single crystal LiNbO3 (LN) substrates. It has been demonstrated that the ion implantation process generates high differential etch rates in the LN implanted areas, when suitable implantation parameters, such as ion species, fluence and energy, are chosen. In particular, when traditional LN etching solutions are applied to suitably ion implanted regions, etch rates values up to three orders of magnitude higher than the typical etching rates of the virgin material, are registered. Further, the enhancement in the etching rate has been observed on x, y and z-cut single crystalline material, and, due to the physical nature of the implantation process, it is expected that it can be equivalently applied also to substrates with different crystallographic orientations. This technique, associated with standard photolithographic technologies, allows to generate in a fast and accurate way very high aspect ratio relief micrometric structures on LN single crystal surface. In this work a description of the developed technology is reported together with some examples of produced micromachined structures: in particular very precisely defined self sustaining suspended structures, such as beams and membranes, generated on LN substrates, are presented. The developed technology opens the way to actual three dimensional micromachining of LN single crystals substrates and, due to the peculiar properties characterising this material, (pyroelectric, electro-optic, acousto-optic, etc.), it allows the design and the production of complex integrated elements, characterised by micrometric features and suitable for the generation of advanced Micro Electro Optical Systems (MEOS).

  4. High definition surface micromachining of LiNbO{sub 3} by ion implantation

    Energy Technology Data Exchange (ETDEWEB)

    Chiarini, M., E-mail: mchiarini@cgspace.i [Carlo Gavazzi Space SpA, Sede di Bologna and Laboratory MIST E.R., Via P. Gobetti 101, I-40129 Bologna (Italy); Bentini, G.G.; Bianconi, M.; De Nicola, P. [Consiglio Nazionale delle Ricerche - Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MIST E.R., Via P. Gobetti 101, I-40129 Bologna (Italy)

    2010-10-01

    High Energy Ion Implantation (HEII) of both medium and light mass ions has been successfully applied for the surface micromachining of single crystal LiNbO{sub 3} (LN) substrates. It has been demonstrated that the ion implantation process generates high differential etch rates in the LN implanted areas, when suitable implantation parameters, such as ion species, fluence and energy, are chosen. In particular, when traditional LN etching solutions are applied to suitably ion implanted regions, etch rates values up to three orders of magnitude higher than the typical etching rates of the virgin material, are registered. Further, the enhancement in the etching rate has been observed on x, y and z-cut single crystalline material, and, due to the physical nature of the implantation process, it is expected that it can be equivalently applied also to substrates with different crystallographic orientations. This technique, associated with standard photolithographic technologies, allows to generate in a fast and accurate way very high aspect ratio relief micrometric structures on LN single crystal surface. In this work a description of the developed technology is reported together with some examples of produced micromachined structures: in particular very precisely defined self sustaining suspended structures, such as beams and membranes, generated on LN substrates, are presented. The developed technology opens the way to actual three dimensional micromachining of LN single crystals substrates and, due to the peculiar properties characterising this material, (pyroelectric, electro-optic, acousto-optic, etc.), it allows the design and the production of complex integrated elements, characterised by micrometric features and suitable for the generation of advanced Micro Electro Optical Systems (MEOS).

  5. Silicon micromachined sensor for gas detection

    Energy Technology Data Exchange (ETDEWEB)

    Moldovan, Carmen; Hinescu, Lavinia; Hinescu, Mihail; Iosub, Rodica; Nisulescu, Mihai; Firtat, Bogdan; Modreanu, Mircea; Dascalu, Dan; Voicu, Victor; Tarabasanu, Cornel

    2003-08-15

    The paper presents the layout and the technological steps for an interdigitated integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by evaporation technique under high vacuum. The phthalocyanine derivatives are obtained by the same deposition technique. Considering the different sensitivities of phthalocyanines derivatives, we obtained different gas sensors. The copper phthalocyanine (CuPc), nickel phthalocyanine (NiPc) and iron phthalocyanine (FePc) have been investigated for NO{sub x} detection. The measurement of sensors for NO{sub x} and NO{sub 2} detection will be presented as gas concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyser. The measurements were made at room temperature but a medium temperature is applied (<200 deg. C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

  6. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  7. Acoustic lens for capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  8. An Investigation of Processes for Glass Micromachining

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-03-01

    Full Text Available This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE, and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax glass structure with an etching depth and sides of approximately 20 μm was observed via the wet etching process. The most important aspect of this work was to develop RIE and glass reflow techniques. The current challenges of these methods are addressed here. Deep Tempax glass pillars having a smooth surface, vertical shapes, and a high aspect ratio of 10 with 1-μm-diameter glass pillars, a 2-μm pitch, and a 10-μm etched depth were achieved via the RIE technique. Through-silicon wafer interconnects, embedded inside the Tempax glass, are successfully demonstrated via the glass reflow technique. Glass reflow into large cavities (larger than 100 μm, a micro-trench (0.8-μm wide trench, and a micro-capillary (1-μm diameter are investigated. An additional optimization of process flow was performed for glass penetration into micro-scale patterns.

  9. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  10. Method and apparatus for precision laser micromachining

    Science.gov (United States)

    Chang, Jim; Warner, Bruce E.; Dragon, Ernest P.

    2000-05-02

    A method and apparatus for micromachining and microdrilling which results in a machined part of superior surface quality is provided. The system uses a near diffraction limited, high repetition rate, short pulse length, visible wavelength laser. The laser is combined with a high speed precision tilting mirror and suitable beam shaping optics, thus allowing a large amount of energy to be accurately positioned and scanned on the workpiece. As a result of this system, complicated, high resolution machining patterns can be achieved. A cover plate may be temporarily attached to the workpiece. Then as the workpiece material is vaporized during the machining process, the vapors condense on the cover plate rather than the surface of the workpiece. In order to eliminate cutting rate variations as the cutting direction is varied, a randomly polarized laser beam is utilized. A rotating half-wave plate is used to achieve the random polarization. In order to correctly locate the focus at the desired location within the workpiece, the position of the focus is first determined by monitoring the speckle size while varying the distance between the workpiece and the focussing optics. When the speckle size reaches a maximum, the focus is located at the first surface of the workpiece. After the location of the focus has been determined, it is repositioned to the desired location within the workpiece, thus optimizing the quality of the machined area.

  11. On experimental determination of the random-incidence response of microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2007-01-01

    The random-incidence sensitivity of a microphone is defined as the ratio of the output voltage to the sound pressure that would exist at the position of the acoustic center of the microphone in the absence of the microphone in a sound field with incident plane waves coming from all directions. The...... random-incidence correction of a number of laboratory standard microphones has been determined experimentally. Although the measurement procedure seems to be straightforward, some practical and fundamental problems arise: i Reflections from the mounting rig contaminate the measured frequency response......, and whereas some of these reflections can be removed using a time-selective technique, others coincide with the direct impulse response and consequently cannot be removed in the time domain and thus affect the accuracy of the estimate; ii the accuracy of the estimate is relying on the rotational...

  12. A directional microphone array for acoustic studies of wind tunnel models

    Science.gov (United States)

    Soderman, P. T.; Noble, S. C.

    1974-01-01

    An end-fire microphone array that utilizes a digital time delay system has been designed and evaluated for measuring noise in wind tunnels. The directional response of both a four- and eight-element linear array of microphones has enabled substantial rejection of background noise and reverberations in the NASA Ames 40- by 80-foot wind tunnel. In addition, it is estimated that four- and eight-element arrays reject 6 and 9 dB, respectively, of microphone wind noise, as compared with a conventional omnidirectional microphone with nose cone. Array response to two types of jet engine models in the wind tunnel is presented. Comparisons of array response to loudspeakers in the wind tunnel and in free field are made.

  13. NEW FREQUENCY DOMAIN POST-FILTERS FOR NOISE CANCELLATION USING TWO CLOSELY SPACED MICROPHONES

    OpenAIRE

    Djendi, Mohamed; Gilloire, A.; Pascal, Scalart

    2009-01-01

    International audience This paper addresses the problem of speech enhancement in a moving car through a blind source separation (BSS) scheme involving two closely spaced microphones. We propose two frequency domain methods to reduce the distortion caused by the forward BSS structure, which is most important when microphones are closely spaced. Both methods aim at estimating post-filters to compensate for the distortion by equalization. The first method is based on an open-loop estimation. ...

  14. Wireless microphone communication system telephonics P/N 484D000-1

    Science.gov (United States)

    1980-01-01

    The wireless microphone is a lightweight, portable, wireless voice communications device for use by the crew of the space shuttle orbiter. The wireless microphone allows the crew to have normal hands-free voice communication while they are performing various mission activities. The unit is designed to transmit at 455 or 500 kilohertz and employs narrow band FM modulation. Two orthogonally placed antennas are used to insure good reception at the receiver.

  15. A Dual-Microphone Speech Enhancement Algorithm Based on the Coherence Function

    OpenAIRE

    Yousefian, Nima; Loizou, Philipos C.

    2011-01-01

    A novel dual-microphone speech enhancement technique is proposed in the present paper. The technique utilizes the coherence between the target and noise signals as a criterion for noise reduction and can be generally applied to arrays with closely-spaced microphones, where noise captured by the sensors is highly correlated. The proposed algorithm is simple to implement and requires no estimation of noise statistics. In addition, it offers the capability of coping with multiple interfering sou...

  16. Analysis of Transients for Brass Instruments Under Playing Conditions Using Multiple Microphones

    OpenAIRE

    Kemp, Jonathan; LOGIE, Shona; Chick, John; Smith, Richard; Campbell, Murray

    2010-01-01

    National audience This work investigates the development of a novel multiple microphone technique for analysis of the acoustical behaviour of brass instruments under playing conditions. In the current work, multiple microphones are deployed within a cylindrical section of the bore of a brass instrument. The technique allows for measurement of the instrument during playing, or while excited by a loudspeaker signal, and allows for a more robust analysis of the transfer of acoustic energy bet...

  17. A New Trans-Tympanic Microphone Approach for Fully Implantable Hearing Devices

    OpenAIRE

    Woo, Seong Tak; Shin, Dong Ho; Lim, Hyung-Gyu; Seong, Ki-Woong; Gottlieb, Peter; Puria, Sunil; Lee, Kyu-yup; Cho, Jin-Ho

    2015-01-01

    Fully implantable hearing devices (FIHDs) have been developed as a new technology to overcome the disadvantages of conventional acoustic hearing aids. The implantable microphones currently used in FIHDs, however, have difficulty achieving high sensitivity to environmental sounds, low sensitivity to body noise, and ease of implantation. In general, implantable microphones may be placed under the skin in the temporal bone region of the skull. In this situation, body noise picked up during masti...

  18. MEMS Microphone Array Sensor for Air-Coupled Impact-Echo

    OpenAIRE

    Robin Groschup; Grosse, Christian U.

    2015-01-01

    Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost effective, less sensitive to undesired effects like acoustic noise and has an optimized sensitivity fo...

  19. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G.; Sniegowski, Jeffry J.; Montague, Stephen

    2003-09-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  20. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G. (Albuquerque, NM); Fleming, legal representative, Carol (Burbank, CA); Sniegowski, Jeffry J. (Tijeras, NM); Montague, Stephen (Albuquerque, NM)

    2011-08-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  1. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  2. A batch process micromachined thermoelectric energy harvester: fabrication and characterization

    International Nuclear Information System (INIS)

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

  3. Acoustic micromachining of three-dimensional surfaces for biological applications.

    Science.gov (United States)

    Entcheva, Emilia; Bien, Harold

    2005-02-01

    We present the use of an accessible micromachining technique (acoustic micromachining) for manufacturing micron-feature surfaces with non-discretely varying depth. Acoustic micromachining allows for non-photolithographic production of metal templates with programmable spatial patterns and involves the use of standard acoustic, cutting and electroplating equipment for mass production of vinyl records. Simple 3D patterns were transferred from an acoustic signal into working nickel templates, from which elastic polymer molds were obtained, featuring deep surface grooves and non-discrete (smooth) variations in the z-dimension. Versatility and applicability of the method is demonstrated in obtaining microfluidics structures, manufacturing high-surface area wavy polymer fibers, assembly of cell networks on scaffolds with 3D topography, and microcontact printing of proteins and cells. PMID:15672132

  4. Indirect calibration of a large microphone array for in-duct acoustic measurements

    Science.gov (United States)

    Leclère, Q.; Pereira, A.; Finez, A.; Souchotte, P.

    2016-08-01

    This paper addresses the problem of in situ calibration of a pin hole-mounted microphone array for in-duct acoustic measurements. One approach is to individually measure the frequency response of each microphone, by submitting the probe to be calibrated and a reference microphone to the same pressure field. Although simple, this task may be very time consuming for large microphone arrays and eventually suffer from lack of access to microphones once they are installed on the test bench. An alternative global calibration procedure is thus proposed in this paper. The approach is based on the fact that the acoustic pressure can be expanded onto an analytically known spatial basis. A projection operator is defined allowing the projection of measurements onto the duct modal basis. The main assumption of the method is that the residual resulting from the difference between actual and projected measurements is mainly dominated by calibration errors. An iterative procedure to estimate the calibration factors of each microphone is proposed and validated through an experimental set-up. In addition, it is shown that the proposed scheme allows an optimization of physical parameters such as the sound speed and parameters associated to the test bench itself, such as the duct radius or the termination reflection coefficient.

  5. A high sensitivity wide-band infrasound condenser microphone

    International Nuclear Information System (INIS)

    The new type infrasonic condenser microphone has been made in Institute of Acoustics, CAS. It has many features, such as: the sensitivity is high, 0.1 μbar infrasound pressure can be received; frequency band is wide, cover all infrasonic frequency range, from 10 Hz to 0.001 Hz bellow; output volt is large, such as 400 mV/Pa, then can be directly converted by A/D; dynamic range is wide, the most high sound level ≥108 dB; frequency response is good flat in frequency band necessary; long-term stability of operation is good; the outside of back volume keeps vacuum and prevent with plastic (freedom from zero drift); consistent is good, the head capacitance Co, the first resonance frequency of stress of membrane and circuit can be adjusted, so can be used to in the infrasound array; volume is small, φ80 x 220 mm, weight is light, 1.6 kg, and easy to potable and installation; membrane mass is small, freedom from vibration, no sense to shock; forms a complete configuration, can be connected with PC and structured infrasound monitoring system. Adding triangle array, it can be got infrasonic arrival time, the most amplitude and period of it, wave direct, wave horizontal tracing velocity and real-time 3D dynamic spectrum and so on

  6. Acoustic source localization in mixed field using spherical microphone arrays

    Science.gov (United States)

    Huang, Qinghua; Wang, Tong

    2014-12-01

    Spherical microphone arrays have been used for source localization in three-dimensional space recently. In this paper, a two-stage algorithm is developed to localize mixed far-field and near-field acoustic sources in free-field environment. In the first stage, an array signal model is constructed in the spherical harmonics domain. The recurrent relation of spherical harmonics is independent of far-field and near-field mode strengths. Therefore, it is used to develop spherical estimating signal parameter via rotational invariance technique (ESPRIT)-like approach to estimate directions of arrival (DOAs) for both far-field and near-field sources. In the second stage, based on the estimated DOAs, simple one-dimensional MUSIC spectrum is exploited to distinguish far-field and near-field sources and estimate the ranges of near-field sources. The proposed algorithm can avoid multidimensional search and parameter pairing. Simulation results demonstrate the good performance for localizing far-field sources, or near-field ones, or mixed field sources.

  7. Deep ultraviolet laser micromachining of novel fibre optic devices

    International Nuclear Information System (INIS)

    A deep ultraviolet F2 laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F2-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components

  8. UV laser micromachining of ceramic materials: formation of columnar topographies

    International Nuclear Information System (INIS)

    Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

  9. System for programmable micromachining by means of submicron ion beam

    International Nuclear Information System (INIS)

    A system with submicron ion beam is described. Very bright ion beams are generated by electrohydrodynamic source and are focused in electrostatic ion-optical column. An octupole deflector is used for astigmatism correction and beam deviation. Stabilized power supply of all elements is ensured. Lines of 0.1 μm minimum width are obtained. The micromachining process is controlled by an automated system in CAMAC standard on line with Odrenok computer. Specific features of programmable micromachining and operation of the system in the mode of scanning ion microscope are considered

  10. Micro-machining using a focused ion beam

    International Nuclear Information System (INIS)

    This paper describes the micro-machining of micron and sub-micron scale structures by focused ion beams (FIB). The general requirements for micro-machining systems and the characteristics of FIB milling are considered. A range of applications of FIB milling are also discussed. These include failure analysis and device modification, which are now finding wide use in semiconductor research. Applications in other areas (such as optics and micro-mechanics) are increasing in number, FIB milling being a very flexible and precise method for producing prototype or specialized structures. (Author)

  11. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  12. A LabVIEWTM-based scanning and control system for proton beam micromachining

    International Nuclear Information System (INIS)

    LabVIEWTM is steadily gaining in popularity as the programming language of choice for scientific data acquisition and control. This is due to the vast array of measurement instruments and data acquisition cards supported by the LabVIEWTM environment, and the relative ease with which advanced software can be programmed. Furthermore, virtual instruments that are designed for a given system can be easily ported to other LabVIEWTM platforms and hardware. This paper describes the new LabVIEWTM based scanning and control system developed specifically for proton beam micromachining (PBM) applications. The new system is capable of scanning figures at 16-bit resolution with improved sub-microsecond scan rates. Support for electrostatic beam blanking and external dose normalization using a TTL signal have been implemented. The new software incorporates a semi-automated dose calibration system, and a number of novel dose normalization methods. Limitations of the current beam scanning hardware are discussed in light of new results obtained from micromachining experiments performed in SU-8 photoresist

  13. A LabVIEW{sup TM}-based scanning and control system for proton beam micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Bettiol, Andrew A. E-mail: phybaa@nus.edu.sg; Kan, J.A. van; Sum, T.C.; Watt, F

    2001-07-01

    LabVIEW{sup TM} is steadily gaining in popularity as the programming language of choice for scientific data acquisition and control. This is due to the vast array of measurement instruments and data acquisition cards supported by the LabVIEW{sup TM} environment, and the relative ease with which advanced software can be programmed. Furthermore, virtual instruments that are designed for a given system can be easily ported to other LabVIEW{sup TM} platforms and hardware. This paper describes the new LabVIEW{sup TM} based scanning and control system developed specifically for proton beam micromachining (PBM) applications. The new system is capable of scanning figures at 16-bit resolution with improved sub-microsecond scan rates. Support for electrostatic beam blanking and external dose normalization using a TTL signal have been implemented. The new software incorporates a semi-automated dose calibration system, and a number of novel dose normalization methods. Limitations of the current beam scanning hardware are discussed in light of new results obtained from micromachining experiments performed in SU-8 photoresist.

  14. A practical implementation of microphone free-field comparison calibration according to the standard IEC 61094-8

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras-Rosell, Antoni; Rasmussen, Knud; Jacobsen, Finn; Cutanda Henriquez, Vicente; Juhl, Peter Møller

    2012-01-01

    the reference and test microphones are measured, whereas the second requires a source with a symmetrical directivity that ensures that the microphones placed at opposite positions are subjected to the same sound pressure. The two methods have been investigated experimentally in an extended frequency......An international standard concerned with the calibration of microphones in a free field by comparison has recently been published. The standard contemplates two main calibration methodologies for determining the sensitivity of a microphone under test when compared against a reference microphone....... The two methodologies assume that the two microphones are exposed to the same sound pressure. This can be achieved by measuring the ratio of output voltages either sequentially or simultaneously. The first method requires a stable source to ensure that the sound pressure is approximately the same when...

  15. Evaluating the Acoustic Effect of Over-the-Rotor Foam-Metal Liner Installed on a Low Speed Fan Using Virtual Rotating Microphone Imaging

    Science.gov (United States)

    Sutliff, Daniel L.; Dougherty, Robert P.; Walker, Bruce E.

    2010-01-01

    An in-duct beamforming technique for imaging rotating broadband fan sources has been used to evaluate the acoustic characteristics of a Foam-Metal Liner installed over-the-rotor of a low-speed fan. The NASA Glenn Research Center s Advanced Noise Control Fan was used as a test bed. A duct wall-mounted phased array consisting of several rings of microphones was employed. The data are mathematically resampled in the fan rotating reference frame and subsequently used in a conventional beamforming technique. The steering vectors for the beamforming technique are derived from annular duct modes, so that effects of reflections from the duct walls are reduced.

  16. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    International Nuclear Information System (INIS)

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented

  17. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    Energy Technology Data Exchange (ETDEWEB)

    Rajta, I.; Gomez-Morilla, I.; Abraham, M.H.; Kiss, A.Z. E-mail: azkiss@atomki.hu

    2003-09-01

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented.

  18. Crystallographic effects during micromachining — A finite-element model

    Science.gov (United States)

    Song, Shin-Hyung; Choi, Woo Chun

    2015-07-01

    Mechanical micromachining is a powerful and effective way for manufacturing small sized machine parts. Even though the micromachining process is similar to the traditional machining, the material behavior during the process is much different. In particular, many researchers report that the basic mechanics of the work material is affected by microstructures and their crystallographic orientations. For example, crystallographic orientations of the work material have significant influence on force response, chip formation and surface finish. In order to thoroughly understand the effect of crystallographic orientations on the micromachining process, finite-element model (FEM) simulating orthogonal cutting process of single crystallographic material was presented. For modeling the work material, rate sensitive single crystal plasticity of face-centered cubic (FCC) crystal was implemented. For the chip formation during the simulation, element deletion technique was used. The simulation model is developed using ABAQUS/explicit with user material subroutine via user material subroutine (VUMAT). Simulations showed that variation of the specific cutting energy at different crystallographic orientations of work material shows significant anisotropy. The developed FEM model can be a useful prediction tool of micromachining of crystalline materials.

  19. Laser micromachining of glass, silicon and ceramics. A review

    Czech Academy of Sciences Publication Activity Database

    Řiháková, L.; Chmelíčková, Hana

    2015-01-01

    Roč. 4, č. 7 (2015), s. 41-49 Institutional support: RVO:68378271 Keywords : micromachining * laser * ablation * manufacturing Subject RIV: BH - Optics, Masers, Laser s http://www.eijst.org.uk/images/frontImages/gallery/Vol._4_No._7/6._41-49.pdf

  20. Femtosecond laser micromachining of a single-crystal superalloy

    Energy Technology Data Exchange (ETDEWEB)

    Feng, Q. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)]. E-mail: cqfeng@engin.umich.edu; Picard, Y.N. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Liu, H. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Yalisove, S.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Mourou, G. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Pollock, T.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)

    2005-09-15

    Femtosecond laser micromachining of a single crystal superalloy has been investigated. Laser-induced ablation and associated damage was examined by means of scanning electron microscopy and transmission electron microscopy. These studies indicate a complete absence of conventional processing defects in the vicinity of machining area. The residual roughness of the machined surface was in the sub-micron range.

  1. High-aspect-ratio bulk micromachining of titanium.

    Science.gov (United States)

    Aimi, Marco F; Rao, Masa P; MacDonald, Noel C; Zuruzi, Abu Samah; Bothman, David P

    2004-02-01

    Recent process developments have permitted the highly anisotropic bulk micromachining of titanium microelectromechanical systems (MEMS). By using the metal anisotropic reactive ion etching with oxidation (MARIO) process, arbitrarily high-aspect-ratio structures with straight sidewalls and micrometre-scale features have been bulk micromachined into titanium substrates of various thicknesses, ranging from 0.5-mm sheet down to 10-microm free-standing titanium foils. Bulk micromachined structures are generally free of residual stresses and are preferred when large, rigid, flat and/or high-force actuators are desired. However, so far there has been a limited ability to select materials on the basis of specific application in bulk micromachining, primarily because of the predominance of MEMS processes dedicated to single-crystal silicon, such as silicon deep reactive ion etching. The MARIO process permits the creation of bulk titanium MEMS, which offers potential for the use of a set of material properties beyond those provided by traditional semiconductor-based MEMS. Consequently, the MARIO process enables the fabrication of novel devices that capitalize on these assets to yield enhanced functionalities that would not be possible with traditional micromechanical material systems. PMID:14743212

  2. Tool wear studies in fabrication of microchannels in ultrasonic micromachining.

    Science.gov (United States)

    Cheema, Manjot S; Dvivedi, Akshay; Sharma, Apurbba K

    2015-03-01

    Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the machined component. Appropriate selection of tool material is essential to overcome this problem. The present study discusses the effect of tool material, abrasive size and step feed in fabrication of microchannels by ultrasonic machining on borosilicate glass. Development of microchannels using ultrasonic micromachining were rarely reported. It was observed that tungsten carbide tool provided a better form accuracy in comparison to the microchannel machined by stainless steel tool. The tool wear mechanism in both materials is proposed by considering scanning electron micrographs of the tool as evidence. A one factor at a time approach was used to study the effect of various process parameters. PMID:25465965

  3. Fabrication of Beam Homogenizers in Quartz by Laser Micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Kopitkovas, G.; Lippert, T.; David, C.; Gobrecht, J.; Wokaun, A.

    2004-03-01

    A one step micromachining process, which utilizes laser assisted chemical wet etching and projection of a diffractive gray tone phase masks is applied to fabricate 3 - dimensional microstructures (such as planoconvex or Fresnel microlenses) in UV transparent materials. Arrays of microlenses in quartz are tested as a beam homogenizers for quadrupled Nd:YAG laser. (author)

  4. Femtosecond laser micromachining of silicon with an external electric field

    International Nuclear Information System (INIS)

    Femtosecond (fs) lasers have been shown to be superior to long-pulse lasers in micromachining a wide range of materials. The ultrashort pulses and their extremely high peak power lead to minimum thermal energy diffusion into the material and ensure fast heating and vaporizing of materials with reduced melting. Therefore, fs laser micromachining results in a much reduced heat-affected zone of the machined surfaces. However, plasma generation is normally associated with fs laser processing due to the substrate material breakdown. The plasma cloud may fall back onto the substrate as debris on the surface. In the case of fs laser micromachining of silicon (Si), a large number of micro/nano-sized particles are observed on the Si surface. Some of the particles are loose particles that can be easily removed. The remaining particles are however bonded to the substrate that cannot be cleaned off. For microelectronics applications, such surface contaminants affect the reliability of the device and have to be avoided. In our study, we employed an external electric field during the fs laser micromachining. It was found that the external electric field strength had a significant effect on the cleanliness of the machined Si surface. (technical note)

  5. Refined acoustic modeling and analysis of shotgun microphones.

    Science.gov (United States)

    Bai, Mingsian R; Lo, Yi-Yang

    2013-04-01

    A shotgun microphone is a highly directional pickup device widely used in noisy environments. The key element that leads to its superior directivity is a tube with multiple slot openings along its length. One traditional way to model the directional response of a shotgun is to assume plane waves traveling in the tube as if it is in the free field. However, the frequency response and directivity predicted by this traveling wave model can differ drastically from practical measurements. In this paper, an in-depth electroacoustic analysis was conducted to examine the problem by considering the standing waves inside the tube with an analogous circuit containing phased pressure sources and T-networks of tube segments. A further refinement is to model the housing diffraction effect with the aid of the equivalent source method (ESM). The on-axis frequency response and directivity pattern predicted by the proposed model are in close agreement with the measurements. From the results, a peculiar bifurcation phenomenon of directivity pattern at the Helmholtz frequency was also noted. While the shotgun behaves like an endfire array above the Helmholtz frequency, it becomes a broadside array below the Helmholtz frequency. The standing wave effect can be mitigated by covering the slot openings with mesh screen, which was found to alter the shotgun response to be closer to that of the traveling wave model above a critical frequency predicted by the half-wavelength rule. A mode-switching model was developed to predict the directional responses of mesh-treated shotguns. PMID:23556574

  6. Identifying Microphone from Noisy Recordings by Using Representative Instance One Class-Classification Approach

    Directory of Open Access Journals (Sweden)

    Huy Quan Vu

    2012-06-01

    Full Text Available Rapid growth of technical developments has created huge challenges for microphone forensics - a sub-category of audio forensic science, because of the availability of numerous digital recording devices and massive amount of recording data. Demand for fast and efficient methods to assure integrity and authenticity of information is becoming more and more important in criminal investigation nowadays. Machine learning has emerged as an important technique to support audio analysis processes of microphone forensic practitioners. However, its application to real life situations using supervised learning is still facing great challenges due to expensiveness in collecting data and updating system. In this paper, we introduce a new machine learning approach which is called One-class Classification (OCC to be applied to microphone forensics; we demonstrate its capability on a corpus of audio samples collected from several microphones. In addition, we propose a representative instance classification framework (RICF that can effectively improve performance of OCC algorithms for recording signal with noise. Experiment results and analysis indicate that OCC has the potential to benefit microphone forensic practitioners in developing new tools and techniques for effective and efficient analysis.

  7. Characteristics of Relocated Quiet Zones Using Virtual Microphone Algorithm in an Active Headrest System

    Directory of Open Access Journals (Sweden)

    Seokhoon Ryu

    2016-01-01

    Full Text Available This study displays theoretical and experimental investigation on the characteristics of the relocated zone of quiet by a virtual microphone (VM based filtered-x LMS (FxLMS algorithm which can be embedded in a real-time digital controller for an active headrest system. The attenuation changes at the relocated zones of quiet by the variation of the distance between the ear and the error microphone are mainly examined. An active headrest system was implemented for the control experiment at a chair and consists of two (left and right secondary loudspeakers, two error microphones, two observer microphones at ear positions in a HATS, and other electronics including a dSPACE 1401 controller. The VM based FxLMS algorithm achieved an attenuation of about 22 dB in the control experiment against a narrowband primary noise by the variation of the distance between the ear and the error microphone. The important factors for the algorithm are discussed as well.

  8. Active structural acoustic control of a smart cylindrical shell using a virtual microphone

    Science.gov (United States)

    Loghmani, Ali; Danesh, Mohammad; Kwak, Moon K.; Keshmiri, Mehdi

    2016-04-01

    This paper investigates the active structural acoustic control of sound radiated from a smart cylindrical shell. The cylinder is equipped with piezoelectric sensors and actuators to estimate and control the sound pressure that radiates from the smart shell. This estimated pressure is referred to as a virtual microphone, and it can be used in control systems instead of actual microphones to attenuate noise due to structural vibrations. To this end, the dynamic model for the smart cylinder is derived using the extended Hamilton’s principle, the Sanders shell theory and the assumed mode method. The simplified Kirchhoff-Helmholtz integral estimates the far-field sound pressure radiating from the baffled cylindrical shell. A modified higher harmonic controller that can cope with a harmonic disturbance is designed and experimentally evaluated. The experimental tests were carried out on a baffled cylindrical aluminum shell in an anechoic chamber. The frequency response for the theoretical virtual microphone and the experimental actual microphone are in good agreement with each other, and the results show the effectiveness of the designed virtual microphone and controller in attenuating the radiated sound.

  9. Optical wave microphone measurements of laser ablation of copper in supercritical carbon dioxide

    International Nuclear Information System (INIS)

    Laser ablation plasma in a supercritical fluid has attracted much attention recently due to its usefulness in forming nanoparticles. Observation of the dynamic behavior of the supercritical fluid after laser irradiation of a solid is necessary for real-time monitoring and control of laser ablation. In this study, we utilized an optical wave microphone to monitor pulsed laser irradiation of a solid in a supercritical fluid. The optical wave microphone works based on Fraunhofer diffraction of phase modulation of light by changes in refractive index. We hereby report on our measurements for pulsed laser irradiation of a Cu target in supercritical carbon dioxide using an optical wave microphone. Photothermal acoustic waves which generated after single pulsed laser irradiation of a Cu target were detectable in supercritical carbon dioxide. The speed of sound around the critical point of supercritical carbon dioxide was clearly slower than that in gas. The optical wave microphone detected a signal during laser ablation of Cu in supercritical carbon dioxide that was caused by shockwave degeneration. - Highlights: • Photothermal acoustic wave in supercritical fluid was observed. • Sound speed around the critical point was slower than that in gas. • Optical wave microphone detected degeneration of a shockwave. • Ablation threshold of a solid in supercritical fluid can be estimated. • Generation of the second shockwave in supercritical phase was suggested

  10. Sound Source Localization with Front-Back Judgement by Two Microphones Asymmetrically Mounted on a Sphere

    Directory of Open Access Journals (Sweden)

    Nobutaka Ono

    2008-07-01

    Full Text Available In this paper, we propose a novel system to localize a sound source in any planar direction using only two microphones. In our system, the two microphones are asymmetrically placed on a sphere, thus, 1 the diffraction by the sphere and the asymmetrical arrangement of the microphones give the localization cue including the frontback judgment, and 2 unlike the dummy head system, no previous measurements are necessary due to the analytical representation of the sphere diffraction. To deal with reverberation or ambient noises, we consider the maximum likelihood estimation of the direction of arrival with a diffuse noise model on a sphere. We present a real system that we built through the investigation of the optimal microphone arrangement for speech. The experimental results show that our system, which consists of two microphones mounted at ±46◦ angles on a 30mm-radius sphere, estimates a sound source direction including a front-back judgment with less than 10% errors in real environment.

  11. Analysis and fabrication of minifeature lamp lens by excimer laser micromachining.

    Science.gov (United States)

    Hocheng, Hong; Wang, Kuan-Yu

    2007-10-10

    A variety of shapes of lamp lenses at the feature millimeter scale have been extensively used in lamp design. To further improve the light efficiency and to reduce the overall dimension of lamps, the lamp lens at the micrometer scale is fabricated by excimer laser cross scanning on a polycarbonate sheet. To verify the proposed method, the influence of an optical system with various shapes and sizes of lamp lenses on the light efficiency is explored in advance by ASAP optical software. The lens with a miniature feature can produce a smaller divergence angle than that with a large-size lens feature. The experiment is carried out at varying laser operating parameters, mask shape, and dimensions. The simulation shows that the desired lamp lens profile can be effectively produced by excimer laser micromachining. PMID:17932527

  12. Separating the Wheat from the Chaff: Sensing Wireless Microphones in TVWS

    CERN Document Server

    Sun, Huanhuan; Zhang, Wenyi

    2012-01-01

    This paper summarizes our attempts to establish a systematic approach that overcomes a key difficulty in sensing wireless microphone signals, namely, the inability for most existing detection methods to effectively distinguish between a wireless microphone signal and a sinusoidal continuous wave (CW). Such an inability has led to an excessively high false alarm rate and thus severely limited the utility of sensing-based cognitive transmission in the TV white space (TVWS) spectrum. Having recognized the root of the difficulty, we propose two potential solutions. The first solution focuses on the periodogram as an estimate of the power spectral density (PSD), utilizing the property that a CW has a line spectral component while a wireless microphone signal has a slightly dispersed PSD. In that approach, we formulate the resulting decision model as an one-sided test for Gaussian vectors, based on Kullback-Leibler distance type of decision statistics. The second solution goes beyond the PSD and looks into the spec...

  13. Standoff photoacoustic detection of explosives using quantum cascade laser and an ultrasensitive microphone.

    Science.gov (United States)

    Chen, Xing; Guo, Dingkai; Choa, Fow-Sen; Wang, Chen-Chia; Trivedi, Sudhir; Snyder, A Peter; Ru, Guoyun; Fan, Jenyu

    2013-04-20

    Standoff detections of explosives using quantum cascade lasers (QCLs) and the photoacoustic (PA) technique were studied. In our experiment, a mid-infrared QCL with emission wavelength near 7.35 μm was used as a laser source. Direct standoff PA detection of trinitrotoluene (TNT) was achieved using an ultrasensitive microphone. The QCL output light was focused on explosive samples in powder form. PA signals were generated and detected directly by an ultrasensitive low-noise microphone with 1 in. diameter. A detection distance up to 8 in. was obtained using the microphone alone. With increasing detection distance, the measured PA signal not only decayed in amplitude but also presented phase delays, which clearly verified the source location. To further increase the detection distance, a parabolic sound reflector was used for effective sound collection. With the help of the sound reflector, standoff PA detection of TNT with distance of 8 ft was demonstrated. PMID:23669670

  14. A time-selective technique for free-field reciprocity calibration of condenser microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2003-01-01

    are considered that improve the accuracy of the free-field calibration method. In particular, a fast Fourier transform (FFT)-based time-selective technique for removing undesired reflections from the walls of the measurement chamber has been developed and applied to the electric transfer impedance......In normal practice, microphones are calibrated in a closed coupler where the sound pressure is uniformly distributed over the diaphragm. Alternatively, microphones can be placed in a free field, although in that case the distribution of sound pressure over the diaphragm will change as a result of...... the diffraction of the body of the microphone, and thus, its sensitivity will change. In the two cases, a technique based on the reciprocity theorem can be applied for obtaining the absolute sensitivity either under uniform pressure or free-field conditions. In this paper, signal-processing techniques...

  15. Precision Measurements of Wind Turbine Noise using a Large Aperture Microphone Array

    DEFF Research Database (Denmark)

    Bradley, Stuart; Mikkelsen, Torben Krogh; Hünerbein, Sabine Von; Legg, Mathew

    2016-01-01

    Experiments are described with a large microphone array (40 m scale) recording wind turbine noise. The array comprised 42 purpose-designed low-noise microphones simultaneously sampled at 20 kHz. Very high quality, fast, meteorological profile data was available from nearby 80 m masts and from the...... turbine nacelle, giving wind speed, wind direction, and turbulence data. A speaker was mounted at the base of the turbine tower, for determining the spatial characteristics of coherence, and for compensating for local wind variations. This speaker emits a continuous dual tone (allowing continuous time......-of-flight at each microphone). An experiment was also run recording the sound from a continuous tone speaker mounted near the tip of a turbine blade, allowing testing of signal processing to correct for the very substantial Doppler shift. These various experiments are targeted at obtaining very high spatial...

  16. High-purity germanium detector ionization pulse shapes of nuclear recoils, gamma interactions and microphonism

    CERN Document Server

    Baudis, L; Klapdor-Kleingrothaus, H V; Ramachers, Y; Hammer, J W; Mayer, A

    1998-01-01

    Nuclear recoil measurements with high-purity Germanium detectors are very promising to directly detect dark matter candidates. The main background sources in such experiments are natural radioactivity and microphonic noise. Digital pulse shape analysis is an encouraging approach to reduce the background originating from the latter. To study the pulse shapes of nuclear recoil events we performed a neutron scattering experiment, which covered the ionization energy range from 20 to 80 keV. We have measured ionization efficiencies as well and found an excellent agreement with the theory of Lindhard. In a further experiment we measured pulse shapes of a radioactive gamma-source and found no difference to nuclear recoil pulse shapes. Pulse shapes originating from microphonics of a HPGe-detector are presented for the first time. A microphonic noise suppression method, crucial for dark matter direct detection experiments, can therefore be calibrated with pulse shapes from gamma-sources.

  17. Acoustic Feedback and Echo Cancellation Strategies for Multiple-Microphone and Single-Loudspeaker Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt; Jensen, Jesper

    Acoustic feedback/echo cancellation in a multiple-microphone and single-loudspeaker system is often carried out using a cancellation filter for each microphone channel, and the filters are adaptively estimated, independently of each other. In this work, we consider another strategy by estimating...... cancellation performance is achievable compared to the independent estimation strategy. Furthermore, we relate the joint estimation strategy to a stereophonic echo cancellation system and provide analytic expressions for its system behavior....... all the cancellation filters jointly and in this way exploit information from all microphone channels. We determine the statistical system behavior for the joint estimation strategy in terms of the convergence rate and steady-state behavior across time and frequency. We assess if an improved...

  18. Detection of cavitation behavior using accelerometer and microphone outside of piping at orifice

    International Nuclear Information System (INIS)

    Cavitation induced vibration and the consequent erosion of pipes are one aspect of the potential damaging factors in the piping system. In order to prevent such trouble, it is needed to develop a detection method of cavitation. Especially, in a plant system such as nuclear power plants, it is preferable to detect them by measuring outside of pipes during plant operation. In this paper, the detection methods of cavitation using an accelerometer and a microphone were experimentally examined and compared each other. As a result: (1) Output of the accelerometer varied with the cavitation number, and it output voltage increased with development of cavitation. When cavitation occurred, a pulse shaped signal, which might be a shockwave by collapse of cavitation bubbles, was clearly detected. (2) Output distribution of the accelerometer in the flow direction became large where cavitation bubbles collapsed, and output voltage of the accelerometer downstream of the orifice was larger than that of the accelerometer upstream of the orifice. (3) The measurement results with the microphone were similar to those of the accelerometer qualitatively, pulse-shape signals were detected, and difference of output voltages between microphones upstream and downstream of the orifice were measured. In the simultaneous measurements by the accelerometer and the microphone, both sensors detected the shockwave considered to be generated at the same time with a time delay of the microphone. The sound velocity evaluated from the time delay agreed well with the sound velocity in the air. Using the characteristics of the measurement results, cavitation using a microphone without contacting pipes could be performed like an accelerometer mounted on the pipe surface, and cavitation could be detected from the distribution of output voltages in the flow direction even in pipings of a plant without data base to compare. (author)

  19. Radiation impedance of condenser microphones and their diffuse-field responses

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2010-01-01

    The relation between the diffuse-field response and the radiation impedance of a microphone has been investigated. Such a relation can be derived from classical theory. The practical measurement of the radiation impedance requires (a) measuring the volume velocity of the membrane of the microphone...... this way, a hybrid estimate of the radiation impedance is obtained. The resulting estimate of the diffuse-field response is compared with experimental estimates of the diffuse-field response determined using reciprocity and the random-incidence method. The different estimates are in good agreement at...

  20. Metrics for performance assessment of mixed-order Ambisonics spherical microphone arrays

    DEFF Research Database (Denmark)

    Favrot, Sylvain Emmanuel; Marschall, Marton

    2012-01-01

    suitable layouts for a given MOA combination order is introduced consisting of rings of microphones at several elevation angles for any given MOA combination order. Robustness and directivity measures were evaluated for four MOA layouts. Results showed that MOA vertical directivity was similar to 3D HOA......Mixed-order Ambisonics (MOA) combines planar (2D) higher order Ambisonics (HOA) with lower order periphonic (3D) Ambisonics. MOA encoding from spherical microphone arrays has the potential to provide versatile recordings that can be played back using 2D, 3D or mixed systems. A procedure to generate...... and that MOA horizontal directivity was in between the planar and periphonic order....

  1. A biomimetic coupled circuit based microphone array for sound source localization.

    Science.gov (United States)

    Xu, Huping; Xu, Xiangyuan; Jia, Han; Guan, Luyang; Bao, Ming

    2015-09-01

    An equivalent analog circuit is designed to mimic the coupled ears of the fly Ormia ochracea for sound source localization. This coupled circuit receives two signals with tiny phase difference from a space closed two-microphone array, and produces two signals with obvious intensity difference. The response sensitivity can be adjusted through the coupled circuit parameters. The directional characteristics of the coupled circuit have been demonstrated in the experiment. The miniature microphone array can localize the sound source with low computational burden by using the intensity difference. This system has significant advantages in various applications where the array size is limited. PMID:26428825

  2. The Effect of Hearing Aid Microphone Mode on Performance in an Auditory Orienting Task

    OpenAIRE

    Brimijoin, W. Owen; Whitmer, William M.; McShefferty, David; Akeroyd, Michael A.

    2014-01-01

    Objectives: Although directional microphones on a hearing aid provide a signal-to-noise ratio benefit in a noisy background, the amount of benefit is dependent on how close the signal of interest is to the front of the user. It is assumed that when the signal of interest is off-axis, users can reorient themselves to the signal to make use of the directional microphones to improve signal-to-noise ratio. The present study tested this assumption by measuring the head-orienting behavior of bilate...

  3. 47 CFR 15.216 - Disclosure requirements for wireless microphones and other low power auxiliary stations capable...

    Science.gov (United States)

    2010-10-01

    ... Alert Consumer Alert Most users do not need a license to operate this wireless microphone system... also be aware that the FCC is currently evaluating use of wireless microphone systems, and these rules... 47 Telecommunication 1 2010-10-01 2010-10-01 false Disclosure requirements for...

  4. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  5. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Directory of Open Access Journals (Sweden)

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  6. Self-sacrificial surface micromachining using poly(methyl methacrylate)

    International Nuclear Information System (INIS)

    This paper explains the idea of self-sacrificial surface micromachining. In a self-sacrificial process, there is no distinction between structural and sacrificial layers. Instead, during patterning, an in situ chemical change converts a structural material into a sacrificial material, or vice versa. This greatly increases the design space of a self-sacrificial process when compared to a traditional process with the same number of layers, as all layers can be used simultaneously for both structural and sacrificial purposes. To show the possibility of self-sacrificial surface micromachining, a concrete implementation was developed using poly(methyl methacrylate) (PMMA) as the material. Unexposed PMMA, with a high average molecular weight, was used as the structural material. Exposed PMMA, with a lower average molecular weight, was used as the sacrificial material. The in situ chemical change was caused by deep-UV irradiation at 254 nm

  7. Cytotoxicity of implantable microelectrode arrays produced by laser micromachining.

    Science.gov (United States)

    Green, Rylie A; Ordonez, Juan S; Schuettler, Martin; Poole-Warren, Laura A; Lovell, Nigel H; Suaning, Gregg J

    2010-02-01

    Implantable high-density microelectrode arrays have been successfully fabricated using laser micromachining of conventional implant materials, polydimethylsiloxane (PDMS) and platinum (Pt) foil. This study investigates the impact of modifying PDMS and Pt with high power laser beams and the possible toxicity of by-products that may remain on the implantable device. Materials were characterised both chemically and biologically through x-ray photoelectron spectroscopy (XPS), cell growth inhibition assays and a direct contact cell proliferation assay. It was found that laser micromachining produces oxides of silicon and platinum on the PDMS and Pt respectively. While the chemical properties of materials were altered, there was negligible change in the biological response to either extracts or cell growth directly on the composite electrode array. PMID:19833388

  8. Femtosecond Laser Micromachining Photonic and Microfluidic Devices in Transparent Materials

    CERN Document Server

    Cerullo, Giulio; Ramponi, Roberta

    2012-01-01

    Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

  9. Proton beam micromachining on strippable aqueous base developable negative resist

    Energy Technology Data Exchange (ETDEWEB)

    Rajta, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary)]. E-mail: rajta@atomki.hu; Baradacs, E. [University of Debrecen, Department of Environmental Physics, H-4026 Debrecen, Poroszlay u. 6 (Hungary); Chatzichristidi, M. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece); Valamontes, E.S. [Department of Electronics Technological Educational Institute of Athens, 12210 Aegaleo (Greece); Uzonyi, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary); Raptis, I. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece)

    2005-04-01

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 {mu}m wide lines with aspect ratio 4-6 were resolved.

  10. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 μm wide lines with aspect ratio 4-6 were resolved

  11. Deep ultraviolet laser micromachining of novel fibre optic devices

    Energy Technology Data Exchange (ETDEWEB)

    Li, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Dou, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Herman, P R [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Fricke-Begemann, T [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Ihlemann, J [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Marowsky, G [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany)

    2007-04-15

    A deep ultraviolet F{sub 2} laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F{sub 2}-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  12. Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

    International Nuclear Information System (INIS)

    This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 ± 6 ppm °C−1 and Young's modulus to be 5.0 ± 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties

  13. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.

    Science.gov (United States)

    Giridhar, Malalahalli S; Seong, Kibyung; Schülzgen, Axel; Khulbe, Pramod; Peyghambarian, Nasser; Mansuripur, Masud

    2004-08-10

    We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed. PMID:15376436

  14. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  15. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    OpenAIRE

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as poly...

  16. Terahertz antennas with silicon micromachined front-end

    OpenAIRE

    Chattopadhyay, Goutam; Reck, Theodore; Jung Kubiak, Cecile; Lee, Choonsup; Siles, Jose Vicente; Chahat, Naser; Cooper, Ken; Schlecht, Erich T.; Alonso del Pino, María; Mehdi, Imran

    2014-01-01

    Increasingly, terahertz systems are being used for multi-pixel receivers for different applications from mapping the star-forming regions of galaxies to stand-off radar imaging. Since microstrip patch antennas are too lossy and corrugated horn antenna arrays are difficult to machine at terahertz frequencies, suitable antenna array designs have been one of the key area of research for this field. Moreover, silicon micromachined waveguide housing for front-end integration is becoming very popul...

  17. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    OpenAIRE

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally ...

  18. High-speed Laser Micromachining with Copper Bromide Laser

    CERN Document Server

    Balchev, I I; Minkovski, N I; Sabotinov, N V; Balchev, Ivaylo I.; Kostadinov, Ivan K.; Minkovski, Nikolai I.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  19. High speed in situ depth profiling of ultrafast micromachining.

    Science.gov (United States)

    Webster, Paul J L; Muller, Matthew S; Fraser, James M

    2007-11-12

    We demonstrate real-time depth profiling of ultrafast micromachining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 mum. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic. PMID:19550777

  20. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  1. Micromachined nanofiltration modules for lab-on-a-chip applications

    International Nuclear Information System (INIS)

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm−1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested. (paper)

  2. Micromachined nanofiltration modules for lab-on-a-chip applications

    Science.gov (United States)

    Shen, C.; Mokkapati, V. R. S. S.; Pham, H. T. M.; Sarro, P. M.

    2012-02-01

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm-1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested.

  3. Micromachining of polydimethylsiloxane induced by laser plasma EUV light

    Science.gov (United States)

    Torii, S.; Makimura, T.; Okazaki, K.; Nakamura, D.; Takahashi, A.; Okada, T.; Niino, H.; Murakami, K.

    2011-06-01

    Polydimethylsiloxane (PDMS) is fundamental materials in the field of biotechnology. Because of its biocompatibility, microfabricated PDMS sheets are applied to micro-reactors and microchips for cell culture. Conventionally, the microstructures were fabricated by means of cast or imprint using molds, however it is difficult to fabricate the structures at high aspect ratios such as through-holes/vertical channels. The fabrication of the high-aspect structures would enable us to stack sheets to realize 3D fluidic circuits. In order to achieve the micromachining, direct photo-ablation by short wavelength light is promising. In the previous works, we investigated ablation of transparent materials such as silica glass and poly(methyl methacrylate) induced by irradiation with laser plasma EUV light. We achieved smooth and fine nanomachining. In this work, we applied our technique to PDMS micromachining. We condensed the EUV light onto PDMS surfaces at high power density up to 108 W/cm2 using a Au coated ellipsoidal mirror. We found that PDMS sheet was ablated at a rate up to 440 nm/shot. It should be emphasized that through hole with a diameter of 1 μm was fabricated in a PDMS sheet with a thickness of 4 μm. Thus we demonstrated the micromachining of PDMS sheets using laser plasma EUV light.

  4. Micromachining of semiconductor materials by focused ion beams

    International Nuclear Information System (INIS)

    A Ga+ focused ion beam (FIB) has been used to micromachine semiconductor materials, including III-V compounds. The FIB was operated at 10 keV; (100) substrates of InP, GaAs and Si and epilayers of Ga0.46In0.54As and Ga0.2In0.8As0.4P0.6 grown by metal organic chemical vapour deposition (MOCVD) on (100) InP substrates were used for the micromachining experiments. Large area, rectangular wells with different depths were micromachined in the above, from which material removal rates have been derived using Talysurf profiling and SEM examination, and sputter yields deduced. The uniformity in removal rates with respect to depth has also been examined. In addition, results for clear end-point signals, using sample absorbed current have been established for Ga0.46In0.54As-InP and Ga0.2In0.8As0.4P0.6-InP interfaces. (author)

  5. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries. PMID:20308108

  6. Bulk micromachining of Si by metal-assisted chemical etching.

    Science.gov (United States)

    Kim, Sang-Mi; Khang, Dahl-Young

    2014-09-24

    Bulk micromachining of Si is demonstrated by the well-known metal-assisted chemical etching (MaCE). Si microstructures, having lateral dimension from 5 μm up to millimeters, are successfully sculpted deeply into Si substrate, as deep as >100 μm. The key ingredient of this success is found to be the optimizations of catalyst metal type and its morphology. Combining the respective advantages of Ag and Au in the MaCE as a Ag/Au bilayer configuration leads to quite stable etch reaction upon a prolonged etch duration up to >5 h. Further, the permeable nature of the optimized Ag/Au bilayer metal catalyst enables the etching of pattern features having very large lateral dimension. Problems such as the generation of micro/nanostructures and chemical attacks on the top of pattern surface are successfully overcome by process optimizations such as post-partum sonication treatment and etchant formulation control. The method can also be successful to vertical micromachining of Si substrate having other crystal orientations than Si(100), such as Si(110) and Si(111). The simple, easy, and low-cost nature of present approach may be a great help in bulk micromachining of Si for various applications such as microelectromechanical system (MEMS), micro total analysis system (μTAS), and so forth. PMID:24820931

  7. Proton micromachining of substrate scaffolds for cellular and tissue engineering

    International Nuclear Information System (INIS)

    Three dimensional patterns (grooves and ridges) were micromachined in PMMA using a 600 keV proton beam from the nuclear microscopy facility at the Research Centre for Nuclear Microscopy, National University of Singapore. Swiss 3T3 fibroblasts (ATCC CCL92, Rockville, MD) have been seeded onto these patterns, and the following observations have been made: (a) Cells were not found in the grooves (depth 9 μm, width 6.6 μm); (b) Cells were highly aligned and elongated on narrow ridges (4.2 μm wide), with the degree of alignment and elongation reduced for wider ridges. The underlying mechanism responsible of this cellular behaviour is assumed to be induced by the mechanical restrictions imposed by the topographic features on cellular migration, cell adhesion and concomitant changes in the cytoskeletal. The use of topographical stimuli to regulate cell function is an area of high potential, with implications in the engineering of tissue for spare-part surgery. Proton micromachining, which has the unique advantage of being the only technique capable of direct-write 3D micromachining at sub-cellular dimensions has unique advantages in this area of research

  8. Benefits of the Fiber Optic versus the Electret Microphone in Voice Amplification

    Science.gov (United States)

    Kyriakou, Kyriaki; Fisher, Helene R.

    2013-01-01

    Background: Voice disorders that result in reduced loudness may cause difficulty in communicating, socializing and participating in occupational activities. Amplification is often recommended in order to facilitate functional communication, reduce vocal load and avoid developing maladaptive compensatory behaviours. The most common microphone used…

  9. Motorcycle detection and counting using stereo camera, IR camera, and microphone array

    Science.gov (United States)

    Ling, Bo; Gibson, David R. P.; Middleton, Dan

    2013-03-01

    Detection, classification, and characterization are the key to enhancing motorcycle safety, motorcycle operations and motorcycle travel estimation. Average motorcycle fatalities per Vehicle Mile Traveled (VMT) are currently estimated at 30 times those of auto fatalities. Although it has been an active research area for many years, motorcycle detection still remains a challenging task. Working with FHWA, we have developed a hybrid motorcycle detection and counting system using a suite of sensors including stereo camera, thermal IR camera and unidirectional microphone array. The IR thermal camera can capture the unique thermal signatures associated with the motorcycle's exhaust pipes that often show bright elongated blobs in IR images. The stereo camera in the system is used to detect the motorcyclist who can be easily windowed out in the stereo disparity map. If the motorcyclist is detected through his or her 3D body recognition, motorcycle is detected. Microphones are used to detect motorcycles that often produce low frequency acoustic signals. All three microphones in the microphone array are placed in strategic locations on the sensor platform to minimize the interferences of background noises from sources such as rain and wind. Field test results show that this hybrid motorcycle detection and counting system has an excellent performance.

  10. Use of unidirectional microphones and signal processing for the localization of sound sources

    Science.gov (United States)

    Rizzo, Piervincenzo; Bordoni, Giacomo; Marzani, Alessandro

    2009-05-01

    Targeting people or objects by passive acoustic sensors is of relevant interest in several military and civil applications, spanning from surveillance and patrolling systems to teleconferencing and human-robot interaction. To date methods and patents focused solely on the use of beamforming algorithms to compute the time of arrival of sounds detected by using omnidirectional microphones (OM) sparsely deployed. This paper describes the preliminary results of a novel approach devoted to the localization of ground borne acoustic sources. It is demonstrated that an array made of at least three unidirectional microphones can be exploited to detect the position the source. Pulse features extracted either in the time domain or in the frequency domain are used to identify the direction of the incoming sound. This information is then fed into a semi-analytical algorithm devoted to the identification of the source location. The novelty of the method presented here consists on the use of unidirectional microphones rather than omnidirectional microphones and on the ability to extract the sound direction by considering features like the pulse amplitude rather than the pulse arrival time. It is believed that this method may pave the road toward a new generation of reduced size sound detectors and localizers.

  11. Sound-field reconstruction performance of a mixed-order Ambisonics microphone array

    DEFF Research Database (Denmark)

    Marschall, Marton; Chang, Jiho

    2013-01-01

    Recently, there has been increasing interest in using spherical microphone arrays for spatial audio recordings. Accurate recordings are important for a range of applications, from virtual sound environments for hearing research through to the evaluation of communication devices, such as hearing...

  12. Temperature compensated, humidity insensitive, high-Tg TOPAS FBGs for accelerometers and microphones

    DEFF Research Database (Denmark)

    Stefani, Alessio; Yuan, W.; Markos, C.; Rasmussen, Henrik K.; Andresen, S.; Guastavino, R.; Nielsen, F. K.; Rose, B.; Jespersen, O.; Herholdt-Rasmussen, N.; Bang, Ole

    2012-01-01

    In this paper we present our latest work on Fiber Bragg Gratings (FBGs) in microstructured polymer optical fibers (mPOFs) and their application as strain sensing transducers in devices, such as accelerometers and microphones. We demonstrate how the cross-sensitivity of the FBG to temperature is...

  13. New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones

    DEFF Research Database (Denmark)

    Haas-Christensen, Jelena

    a CMOS interface for a capacitive sensor. Finally, in the fourth part, a novel preamplifier designed demonstrating a concept of differential operation of two microphones biased with voltages of opposite polarities has been described. The amplifier shows how accompanying electronic circuitry can be...

  14. On the influence of microphone array geometry on HRTF-based Sound Source Localization

    DEFF Research Database (Denmark)

    Farmani, Mojtaba; Pedersen, Michael Syskind; Tan, Zheng-Hua;

    2015-01-01

    . Furthermore, to demonstrate the analysis results, we show the impact of HRTFs similarities and microphone array geometry on an exemplary HRTF-based SSL algorithm, called MLSSL. This algorithm is well-suited for this purpose as it allows to estimate the Direction-of-Arrival (DoA) of the target sound using any...

  15. Acoustic analysis of the interaction of choral arrangements, musical selection, and microphone location.

    Science.gov (United States)

    Morris, Richard J; Mustafa, Ashley J; McCrea, Christopher R; Fowler, Linda P; Aspaas, Christopher

    2007-09-01

    Acoustic differences were evaluated among three choral arrangements and two choral textures recorded at three microphone locations. A choir was recorded when singing two musical selections of different choral texture, one homophonic and one polyphonic. Both musical selections were sung in three choral arrangements: block sectional, sectional-in-columns, and mixed. Microphones were placed at the level of the choristers, the conductor, and the audience. The recordings at each location were analyzed using long-term average spectrum (LTAS). The LTAS from the mixed arrangement exhibited more signal amplitude than the other arrangements in the range of 1000-3500Hz. When considering the musical selections, the chorus produced more signal amplitude in the region of 1800-2200Hz for the homophonic selection. In addition, the LTAS produced by the choir for the homophonic selection varied across the microphone locations. As for the microphone location, the LTAS of the signal detected directly in front of the chorus had a greater slope than the other two locations. Thus, the acoustic signal near the choristers differed from the signals near the conductor and in the audience. Conductors may be using acoustic information from the region of the second and third formants when they decide how to arrange a choir for a particular musical selection. PMID:16806816

  16. Effects of air cavity on fly-ear inspired directional microphones: a numerical study

    Science.gov (United States)

    Liu, Haijun; Yu, Miao

    2011-04-01

    The superacute ear of the parasitoid fly Ormia ochracea has inspired the development of a variety of novel miniature directional microphones for sound source localization, in which the effects of air cavity backing the eardrums are often neglected without validation. In the original testing on the fly ear, the integrity of the air space is shown not to be the key to the intertympnal coupling. However, it does not necessarily mean that the tympanum can be treated as in vacuo, and the effects of the air cavity backing the eardrums have yet to be fully understood. In this article, a normalized version of our previous model of air-backed circular membranes is derived to study the conditions under which the air cavity can be indeed neglected. This model is then used to study a fly-ear inspired directional microphone design with two clamped circular membranes mechanically coupled by a bridge. The performance of the directional microphone with air cavity is evaluated in comparison to its counterpart in vacuo. This article not only provides more insights into the fly ear phenomena, but builds a theoretical foundation on whether and how to take the air cavity into account in the design of pressure sensors and directional microphones in general.

  17. Bragg Grating Based Sensors in Microstructured Polymer Optical Fibers: Accelerometers and Microphones

    DEFF Research Database (Denmark)

    Stefani, Alessio

    gluing of polymer to silica fibers are discussed. The realization of gratings in polymer fibers is shown with two different techniques: the UV phase mask technique and the direct writing technique reported here for the first time for polymer fibers. Realization of gratings in PMMA step index fibers and...... realization of an optical microphone based on polymer ber Bragg gratings is reported....

  18. Nonnegative signal factorization with learnt instrument models for sound source separation in close-microphone recordings

    Science.gov (United States)

    Carabias-Orti, Julio J.; Cobos, Máximo; Vera-Candeas, Pedro; Rodríguez-Serrano, Francisco J.

    2013-12-01

    Close-microphone techniques are extensively employed in many live music recordings, allowing for interference rejection and reducing the amount of reverberation in the resulting instrument tracks. However, despite the use of directional microphones, the recorded tracks are not completely free from source interference, a problem which is commonly known as microphone leakage. While source separation methods are potentially a solution to this problem, few approaches take into account the huge amount of prior information available in this scenario. In fact, besides the special properties of close-microphone tracks, the knowledge on the number and type of instruments making up the mixture can also be successfully exploited for improved separation performance. In this paper, a nonnegative matrix factorization (NMF) method making use of all the above information is proposed. To this end, a set of instrument models are learnt from a training database and incorporated into a multichannel extension of the NMF algorithm. Several options to initialize the algorithm are suggested, exploring their performance in multiple music tracks and comparing the results to other state-of-the-art approaches.

  19. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  20. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

    International Nuclear Information System (INIS)

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

  1. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy.

    Science.gov (United States)

    Tong, Tao; Li, Jinggao; Longtin, Jon P

    2004-03-20

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features. PMID:15065729

  2. Femtosecond laser micromachining of fused silica molds.

    Science.gov (United States)

    Madani-Grasset, Frédéric; Bellouard, Yves

    2010-10-11

    The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology--like other serial processes--suffers from a moderate production rate. Here, we show that femtosecond laser can also be employed to fabricate silica molds and other patterned surfaces, including surfaces with high aspect ratio features (> 10). Through appropriate tailoring of silica's surface property and subsequent creation of, for instance, simple elastomeric molding, new opportunities for the indirect 3D, multi-scale spatial characterization of deep laser-fabricated microstructures come along. We demonstrate that those moldings are characterized by a high fidelity (down to the nanometer scale) to the silica mold. These results further advance the applicability of femtosecond laser processing to glass. PMID:20941083

  3. Development of a Microphone Phased Array Capability for the Langley 14- by 22-Foot Subsonic Tunnel

    Science.gov (United States)

    Humphreys, William M.; Brooks, Thomas F.; Bahr, Christopher J.; Spalt, Taylor B.; Bartram, Scott M.; Culliton, William G.; Becker, Lawrence E.

    2014-01-01

    A new aeroacoustic measurement capability has been developed for use in open-jet testing in the NASA Langley 14- by 22-Foot Subsonic Tunnel (14x22 tunnel). A suite of instruments has been developed to characterize noise source strengths, locations, and directivity for both semi-span and full-span test articles in the facility. The primary instrument of the suite is a fully traversable microphone phased array for identification of noise source locations and strengths on models. The array can be mounted in the ceiling or on either side of the facility test section to accommodate various test article configurations. Complementing the phased array is an ensemble of streamwise traversing microphones that can be placed around the test section at defined locations to conduct noise source directivity studies along both flyover and sideline axes. A customized data acquisition system has been developed for the instrumentation suite that allows for command and control of all aspects of the array and microphone hardware, and is coupled with a comprehensive data reduction system to generate information in near real time. This information includes such items as time histories and spectral data for individual microphones and groups of microphones, contour presentations of noise source locations and strengths, and hemispherical directivity data. The data acquisition system integrates with the 14x22 tunnel data system to allow real time capture of facility parameters during acquisition of microphone data. The design of the phased array system has been vetted via a theoretical performance analysis based on conventional monopole beamforming and DAMAS deconvolution. The performance analysis provides the ability to compute figures of merit for the array as well as characterize factors such as beamwidths, sidelobe levels, and source discrimination for the types of noise sources anticipated in the 14x22 tunnel. The full paper will summarize in detail the design of the instrumentation

  4. Femtosecond micromachining in transparent bulk materials using an anamorphic lens.

    Science.gov (United States)

    Desautels, G Logan; Brewer, Chris D; Walker, Mark A; Juhl, Shane B; Finet, Marc A; Powers, Peter E

    2007-10-01

    A unique anamorphic lens design was applied to a circular 780nm femtosecond laser pulse to transform it into an elliptically shaped beam at focus. This lens was developed to give an alternative method of micromachining bulk transparent materials. The challenge for femtosecond laser processing is to control the nonlinear affect of self-focusing, which can occur when using a fast f-number lens. Once the focused spot is dominated by self-focusing the predicted focused beam becomes a filament inside the bulk, which is an undesirable effect. The anamorphic lens resolves this self-focusing by increasing the numerical aperture (NA) and employing an elliptical beam shape. The anamorphic lens was designed to furnish a 2.5mum by 190mum line at focus. Provided the pulse energy is high enough, transparent bulk material will be damaged with a single femtosecond laser pulse. Damage in this text refers to visual change in the index of refraction as observed under an optical microscope. Using this elliptical shape (or line), grating structures were micro-machined on the surface of SiC bulk transparent substrate. SiC was chosen because it is known for its micromachining difficulty and its crystalline structure. From the lack of self-focusing and using energy that is just above the damage threshold the focused line beam generated from the anamorphic lens grating structures produced a line shape nearly identical to the geometrical approximation. In this paper we discuss a new method of writing gratings (or other types of structures) in bulk transparent materials using a single femtosecond laser pulse. We will investigate the grating structures visually (inspected under an optical microscope) and also by use of an atomic force microscopy (AFM). In addition, we test the grating diffraction efficiency (DE) as a function of grating spacing, d. PMID:19550582

  5. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  6. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  7. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  8. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  9. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    International Nuclear Information System (INIS)

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  10. Micromachined silicon acoustic delay lines for ultrasound applications

    International Nuclear Information System (INIS)

    In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay-line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel and serial) have been successfully demonstrated to create controlled time delays in multiple channels of ultrasound signals. The time-delayed ultrasound signals are received with a single-element ultrasound transducer in a time-serial manner. This unique capability could be used to merge multiple signal channels, thereby enabling new ultrasound receiver designs with potentially less complexity and lower cost. (paper)

  11. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.

    Science.gov (United States)

    Lani, Shane W; Wasequr Rashid, M; Hasler, Jennifer; Sabra, Karim G; Levent Degertekin, F

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range. PMID:24753623

  12. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    International Nuclear Information System (INIS)

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  13. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  14. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale. PMID:24466665

  15. Synchrotron radiation direct photoetching of polymers and crystals for micromachining

    International Nuclear Information System (INIS)

    Synchrotron radiation etching of polymers and optical crystals which are transparent throughout the spectral range from visible to ultraviolet has been carried out without using any chemicals, successfully creating high-aspect-ratio microstructures for micromachining. A detailed study of the etching rates by varying the synchrotron beam current, sample temperature, beam size and aspect ratio showed that this synchrotron radiation process is essentially different from laser ablation, while an in situ mass spectrometric analysis of gaseous etching products showed that the dissociation mechanism involved with the synchrotron radiation processing, even with heating, is completely different from the thermal dissociation of the laser ablation

  16. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  17. DNA transport by a micromachined Brownian ratchet device

    CERN Document Server

    Bader, J S; Henck, S A; Deem, M W; McDermott, G A; Bustillo, J M; Simpson, J W; Mulhern, G T; Rothberg, J M; Bader, Joel S; Hammond, Richard W.; Henck, Steven A.; Deem, Michael W.; Dermott, Gregory A. Mc; Bustillo, James M.; Simpson, John W.; Mulhern, Gregory T.; Rothberg, Jonathan M.

    1999-01-01

    We have micromachined a silicon-chip device that transports DNA with aBrownian ratchet that rectifies the Brownian motion of microscopic particles.Transport properties for a DNA 50mer agree with theoretical predictions, andthe DNA diffusion constant agrees with previous experiments. This type ofmicromachine could provide a generic pump or separation component for DNA orother charged species as part of a microscale lab-on-a-chip. A device withreduced feature size could produce a size-based separation of DNA molecules,with applications including the detection of single nucleotide polymorphisms.

  18. Micromachining of an SU-8 flapping-wing flying micro-electro-mechanical system

    International Nuclear Information System (INIS)

    This paper presents a feasibility step in the development of an ultra-small biomimetic flying machine. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. To achieve this goal, a flapping-wing flying MEMS concept and design inspired from insects is first described. Actuators and an actuation way for the control over the wing kinematics are proposed. The initial concepts are subsequently analyzed and presented using multi-body and finite element models. An overview of SU-8 photoresist structures and their functions in the future micro-robot insect is then presented. Consequently, micromachining enables the implementation of a flying MEMS. It is also demonstrated that the structure can be made at insect sizes and actuated at low power inputs. Moreover, the flapping frequency obtained is within the flapping frequency range of wings of many common insects of millimetric dimensions. Such prototypes are of interest as tools to artificially recreate and study insect flight with characteristics, similar to those of insects, that are able to produce lift and hover. Finally, if a micro-battery, wireless receivers, microcontrollers, sensors and actuators can all be fitted onto chips only a few millimeters square, with a mass in the order of milligrams, then we believe that an insect-size flying MEMS can be realized. All these requirements can now be achieved due to advanced engineering methods

  19. A numerical study of the random-incidence and diffuse-field sensitivity of laboratory standard microphones using BEM

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Henriquez, Vicente Cutanda; Jacobsen, Finn;

    2006-01-01

    reverberation room. It is widely accepted that the two definitions are equivalent. The purpose of this paper is to examine this equivalence using numerical simulations. A laboratory standard microphone can be considered rotationally symmetrical around the axis; thus, an axi-symmetric formulation of the Boundary......The difference between the random-incidence sensitivity of a microphone and the diffusefield sensitivity is that according to the definition of the former, plane waves coming from different angles of incidence impinge successively onto the microphone under free-field conditions, whereas according...... to the definition of the latter, a number of plane waves coming from random directions and having random phases impinge simultaneously upon the microphone. The random-incidence sensitivity can be estimated using measurements made in an anechoic chamber, while the diffuse-field sensitivity requires a...

  20. The effect of microphone wind noise on the amplitude modulation of wind turbine noise and its mitigation.

    Science.gov (United States)

    Kendrick, Paul; von Hünerbein, Sabine; Cox, Trevor J

    2016-07-01

    Microphone wind noise can corrupt outdoor recordings even when wind shields are used. When monitoring wind turbine noise, microphone wind noise is almost inevitable because measurements cannot be made in still conditions. The effect of microphone wind noise on two amplitude modulation (AM) metrics is quantified in a simulation, showing that even at low wind speeds of 2.5 m/s errors of over 4 dBA can result. As microphone wind noise is intermittent, a wind noise detection algorithm is used to automatically find uncorrupted sections of the recording, and so recover the true AM metrics to within ±2/±0.5 dBA. PMID:27475217

  1. Free-field reciprocity calibration of laboratory standard (LS) microphones using a time selective technique

    DEFF Research Database (Denmark)

    Rasmussen, Knud; Barrera Figueroa, Salvador

    2006-01-01

    Although the basic principle of reciprocity calibration of microphones in a free field is simple, the practical problems are complicated due to the low signal-to-noise ratio and the influence of cross talk and reflections from the surroundings. The influence of uncorrelated noise can be reduced by...... FFT-based time-selective technique. The complex electrical transfer impedance is measured in linear frequency steps from a few kHz to about three times the resonance frequency of the microphones. The missing values at low frequencies are estimated from a detailed knowledge of the pressure...... sensitivities. Next an inverse FFT is applied and a time window around the main signal is used to eliminate cross talk and reflections. Finally, the signal is transformed back to the frequency domain and the free field sensitivities calculated. The standard procedure at DPLA involves measurements at four...

  2. Determining Sound Source Orientation from Source Directivity and Multi-microphone Recordings

    DEFF Research Database (Denmark)

    Guarato, Francesco; Hallam, John

    We present a method to estimate the orientation of a directional sound source and experimental results illustrating its performances. The method requires recordings captured by an array of microphones at known positions with respect to the source as well as the source directivity. Experiments have...... been performed in an ordinary environment by using a Polaroid transducer as the sound source emitting a broadband signal in the ultrasonic range. Such an acoustic signal has similar structure to those used by bats to echolocate. Results show that method is precise provided that the source directivity...... ensonifies the microphone array sufficiently. Further developments of the method, and its ultimate application to the reconstruction of emitted bat calls from remote recordings, are discussed....

  3. In situ tuning of omnidirectional microelectromechanical-systems microphones to improve performance fit in hearing aids

    Science.gov (United States)

    Je, Sang-Soo; Kim, Jeonghwan; Harrison, Jere C.; Kozicki, Michael N.; Chae, Junseok

    2008-09-01

    Hearing aids are not a one-size-fits-all solution to hearing problems; they must be uniquely tuned for each wearer. There are currently no low-cost and/or effective methods for in situ tuning. This paper describes a microelectromechanical-systems (MEMS)-based dual omnidirectional microphone that can be tuned by growing metallic nanostructures. The nanostructures are grown on integrated solid electrolyte layers on a suspended parylene diaphragm using an external bias and tune the MEMS microphones in situ thereby limiting mismatch. In our tests, this tuning improved the directivity index from 3.5 (fair directionality) to 4.6 dB (excellent directionality) in normal (room temperature) operating environments.

  4. Determining Sound Source Orientation from Analytical Source Directivity and Real Multi-Microphone Recordings

    DEFF Research Database (Denmark)

    Guarato, Francesco; Hallam, John; Vanderelst, Dieter

    2009-01-01

    We present a method to estimate the orientation of a directional sound source and experimental results illustrating its performances. The method requires recordings captured by an array of microphones at known positions with respect to the source as well as the source directivity. Experiments have...... been performed in an ordinary environment by using a Polaroid transducer as the sound source emitting a broadband signal in the ultrasonic range. Such an acoustic signal has similar structure to those used by bats to echolocate. Results show that method is precise provided that the source directivity...... ensonifies the microphone array sufficiently. Further developments of the method, and its ultimate application to the reconstruction of emitted bat calls from remote recordings, are discussed....

  5. Speech Enhancement Using a Square Microphone Array in the Presence of Directional and Diffuse Noise

    Science.gov (United States)

    Ogawa, Tetsuji; Takada, Shintaro; Akagiri, Kenzo; Kobayashi, Tetsunori

    We propose a new speech enhancement method suitable for mobile devices used in the presence of various types of noise. In order to achieve high-performance speech recognition and auditory perception in mobile devices, various types of noise have to be removed under the constraints of a space-saving microphone arrangement and few computational resources. The proposed method can reduce both the directional noise and the diffuse noise under the abovementioned constraints for mobile devices by employing a square microphone array and conducting low-computational-cost processing that consists of multiple null beamforming, minimum power channel selection, and Wiener filtering. The effectiveness of the proposed method is experimentally verified in terms of speech recognition accuracy and speech quality when both the directional noise and the diffuse noise are observed simultaneously; this method reduces the number of word errors and improves the log-spectral distances as compared to conventional methods.

  6. A Two-Microphone Noise Reduction System for Cochlear Implant Users with Nearby Microphones—Part II: Performance Evaluation

    Directory of Open Access Journals (Sweden)

    Rudolf Häusler

    2008-06-01

    Full Text Available Users of cochlear implants (auditory aids, which stimulate the auditory nerve electrically at the inner ear often suffer from poor speech understanding in noise. We evaluate a small (intermicrophone distance 7 mm and computationally inexpensive adaptive noise reduction system suitable for behind-the-ear cochlear implant speech processors. The system is evaluated in simulated and real, anechoic and reverberant environments. Results from simulations show improvements of 3.4 to 9.3 dB in signal to noise ratio for rooms with realistic reverberation and more than 18 dB under anechoic conditions. Speech understanding in noise is measured in 6 adult cochlear implant users in a reverberant room, showing average improvements of 7.9–9.6 dB, when compared to a single omnidirectional microphone or 1.3–5.6 dB, when compared to a simple directional two-microphone device. Subjective evaluation in a cafeteria at lunchtime shows a preference of the cochlear implant users for the evaluated device in terms of speech understanding and sound quality.

  7. Identifying Microphone from Noisy Recordings by Using Representative Instance One Class-Classification Approach

    OpenAIRE

    Huy Quan Vu; Shaowu Liu; Xinghua Yang; Zhi Li; Yongli Ren

    2012-01-01

    Rapid growth of technical developments has created huge challenges for microphone forensics - a sub-category of audio forensic science, because of the availability of numerous digital recording devices and massive amount of recording data. Demand for fast and efficient methods to assure integrity and authenticity of information is becoming more and more important in criminal investigation nowadays. Machine learning has emerged as an important technique to support audio analysis processes of m...

  8. Multi-microphone adaptive noise reduction strategies for coordinated stimulation in bilateral cochlear implant devices

    OpenAIRE

    Kokkinakis, Kostas; Loizou, Philipos C.

    2010-01-01

    Bilateral cochlear implant (BI-CI) recipients achieve high word recognition scores in quiet listening conditions. Still, there is a substantial drop in speech recognition performance when there is reverberation and more than one interferers. BI-CI users utilize information from just two directional microphones placed on opposite sides of the head in a so-called independent stimulation mode. To enhance the ability of BI-CI users to communicate in noise, the use of two computationally inexpensi...

  9. Microphonics detuning compensation in 3.9 GHZ superconducting RF cavities

    Energy Technology Data Exchange (ETDEWEB)

    Ruben Carcagno et al.

    2003-10-20

    Mechanical vibrations can detune superconducting radio frequency (SCRF) cavities unless a tuning mechanism counteracting the vibrations is present. Due to their narrow operating bandwidth and demanding mechanical structure, the 13-cell 3.9GHz SCRF cavities for the Charged Kaons at Main Injector (CKM) experiment at Fermilab are especially susceptible to this microphonic phenomena. We present early results correlating RF frequency detuning with cavity vibration measurements for CKM cavities; initial detuning compensation results with piezoelectric actuators are also presented.

  10. Microphone Handling Noise: Measurements of Perceptual Threshold and Effects on Audio Quality.

    Directory of Open Access Journals (Sweden)

    Paul Kendrick

    Full Text Available A psychoacoustic experiment was carried out to test the effects of microphone handling noise on perceived audio quality. Handling noise is a problem affecting both amateurs using their smartphones and cameras, as well as professionals using separate microphones and digital recorders. The noises used for the tests were measured from a variety of devices, including smartphones, laptops and handheld microphones. The signal features that characterise these noises are analysed and presented. The sounds include various types of transient, impact noises created by tapping or knocking devices, as well as more sustained sounds caused by rubbing. During the perceptual tests, listeners auditioned speech podcasts and were asked to rate the degradation of any unwanted sounds they heard. A representative design test methodology was developed that tried to encourage everyday rather than analytical listening. Signal-to-noise ratio (SNR of the handling noise events was shown to be the best predictor of quality degradation. Other factors such as noise type or background noise in the listening environment did not significantly affect quality ratings. Podcast, microphone type and reproduction equipment were found to be significant but only to a small extent. A model allowing the prediction of degradation from the SNR is presented. The SNR threshold at which 50% of subjects noticed handling noise was found to be 4.2 ± 0.6 dBA. The results from this work are important for the understanding of our perception of impact sound and resonant noises in recordings, and will inform the future development of an automated predictor of quality for handling noise.

  11. A Three-Microphone Adaptive Noise Canceller for Minimizing Reverberation and Signal Distortion

    OpenAIRE

    Zayed M. Ramadan

    2008-01-01

    This paper introduces an adaptive noise canceller (ANC) to improve the system performance in the presence of signal leakage components. The proposed ANC consists of two adaptive filters and three microphones. The first adaptive filter cancels the signal leakage and the second filter cancels the noise. For best results, a least mean squares adaptive algorithm was also introduced and used in the proposed ANC. In this algorithm the step size was based on both error vector and data normalization....

  12. High-purity germanium detector ionization pulse shapes of nuclear recoils, gamma interactions and microphonism

    OpenAIRE

    Baudis, L.; Hellmig, J.; Klapdor-Kleingrothaus, H. V.; Ramachers, Y.; Hammer, J. W.; Mayer, A.

    1999-01-01

    Nuclear recoil measurements with high-purity Germanium detectors are very promising to directly detect dark matter candidates. The main background sources in such experiments are natural radioactivity and microphonic noise. Digital pulse shape analysis is an encouraging approach to reduce the background originating from the latter. To study the pulse shapes of nuclear recoil events we performed a neutron scattering experiment, which covered the ionization energy range from 20 to 80 keV. We ha...

  13. Development and assessment of two fixed-array microphones for use with hearing aids

    OpenAIRE

    Bilsen, F.A.; Soede, W.; Berkhout, A.J.

    1993-01-01

    Hearing-impaired listeners often have great difficulty understanding speech in situations with background noise (e.g., meetings, parties) . Conventional hearing aids offer insufficient directivity to significantly reduce background noise relative to the desired speech signal . Based on array techniques, microphone prototypes have been developed with strongly directional characteristics to be incorporated into the frame and the "temples" of a pair of eyeglasses. Particular emphasis was on opti...

  14. A dynamic multi-channel speech enhancement system for distributed microphones in a car environment

    Science.gov (United States)

    Matheja, Timo; Buck, Markus; Fingscheidt, Tim

    2013-12-01

    Supporting multiple active speakers in automotive hands-free or speech dialog applications is an interesting issue not least due to comfort reasons. Therefore, a multi-channel system for enhancement of speech signals captured by distributed distant microphones in a car environment is presented. Each of the potential speakers in the car has a dedicated directional microphone close to his position that captures the corresponding speech signal. The aim of the resulting overall system is twofold: On the one hand, a combination of an arbitrary pre-defined subset of speakers' signals can be performed, e.g., to create an output signal in a hands-free telephone conference call for a far-end communication partner. On the other hand, annoying cross-talk components from interfering sound sources occurring in multiple different mixed output signals are to be eliminated, motivated by the possibility of other hands-free applications being active in parallel. The system includes several signal processing stages. A dedicated signal processing block for interfering speaker cancellation attenuates the cross-talk components of undesired speech. Further signal enhancement comprises the reduction of residual cross-talk and background noise. Subsequently, a dynamic signal combination stage merges the processed single-microphone signals to obtain appropriate mixed signals at the system output that may be passed to applications such as telephony or a speech dialog system. Based on signal power ratios between the particular microphone signals, an appropriate speaker activity detection and therewith a robust control mechanism of the whole system is presented. The proposed system may be dynamically configured and has been evaluated for a car setup with four speakers sitting in the car cabin disturbed in various noise conditions.

  15. Automatic Detection of Whole Night Snoring Events Using Non-Contact Microphone

    OpenAIRE

    Dafna, Eliran; Tarasiuk, Ariel; Zigel, Yaniv

    2013-01-01

    Objective Although awareness of sleep disorders is increasing, limited information is available on whole night detection of snoring. Our study aimed to develop and validate a robust, high performance, and sensitive whole-night snore detector based on non-contact technology. Design Sounds during polysomnography (PSG) were recorded using a directional condenser microphone placed 1 m above the bed. An AdaBoost classifier was trained and validated on manually labeled snoring and non-snoring acous...

  16. Joint Design of Spherical Microphone and Loudspeaker Arrays for Room Acoustic Analysis

    OpenAIRE

    Morgenstern, Hai; Rafaely, Boaz; Noisternig, Markus

    2015-01-01

    Spherical microphone arrays (SMAs) and spherical loudspeaker arrays (SLAs) have been studied separately for directional sound recording and radiation, respectively, and for room acoustic analysis. The use of configurations comprised of both a SLA and a SMA, referred to as acoustic multiple-input multiple-output (MIMO) systems, can potentially facilitate an additional spatial analysis of room acoustics due to the added spatial diversity they provide. When using spherical arrays, robustness to ...

  17. Measurement of 3D Room Impulse Responses with a Spherical Microphone Array

    OpenAIRE

    Embrechts, Jean-Jacques

    2015-01-01

    Directional room impulse responses (DRIRs) are composed of the sound contributions reaching a given location in the room from a well-defined direction in space. DRIRs can be useful in many applications, such as the evaluation of spatial room acoustics parameters, the detection of unwanted specular reflections or the 3D auralization of acoustic spaces. A spherical array containing 16 microphones has been realized to measure DRIRs. The logarithmic sinesweep technique is first applied to measure...

  18. Dual-microphone and binaural noise reduction techniques for improved speech intelligibility by hearing aid users

    Science.gov (United States)

    Yousefian Jazi, Nima

    Spatial filtering and directional discrimination has been shown to be an effective pre-processing approach for noise reduction in microphone array systems. In dual-microphone hearing aids, fixed and adaptive beamforming techniques are the most common solutions for enhancing the desired speech and rejecting unwanted signals captured by the microphones. In fact, beamformers are widely utilized in systems where spatial properties of target source (usually in front of the listener) is assumed to be known. In this dissertation, some dual-microphone coherence-based speech enhancement techniques applicable to hearing aids are proposed. All proposed algorithms operate in the frequency domain and (like traditional beamforming techniques) are purely based on the spatial properties of the desired speech source and does not require any knowledge of noise statistics for calculating the noise reduction filter. This benefit gives our algorithms the ability to address adverse noise conditions, such as situations where interfering talker(s) speaks simultaneously with the target speaker. In such cases, the (adaptive) beamformers lose their effectiveness in suppressing interference, since the noise channel (reference) cannot be built and updated accordingly. This difference is the main advantage of the proposed techniques in the dissertation over traditional adaptive beamformers. Furthermore, since the suggested algorithms are independent of noise estimation, they offer significant improvement in scenarios that the power level of interfering sources are much more than that of target speech. The dissertation also shows the premise behind the proposed algorithms can be extended and employed to binaural hearing aids. The main purpose of the investigated techniques is to enhance the intelligibility level of speech, measured through subjective listening tests with normal hearing and cochlear implant listeners. However, the improvement in quality of the output speech achieved by the

  19. Thermal-stress modeling of an optical microphone at high temperature.

    Energy Technology Data Exchange (ETDEWEB)

    Barnard, Casey Anderson

    2010-08-01

    To help determine the capability range of a MEMS optical microphone design in harsh conditions computer simulations were carried out. Thermal stress modeling was performed up to temperatures of 1000 C. Particular concern was over stress and strain profiles due to the coefficient of thermal expansion mismatch between the polysilicon device and alumina packaging. Preliminary results with simplified models indicate acceptable levels of deformation within the device.

  20. Effects of directional microphone and adaptive multichannel noise reduction algorithm on cochlear implant performance

    OpenAIRE

    Chung, K.; Zeng, F G; Acker, K N

    2006-01-01

    Although cochlear implant (CI) users have enjoyed good speech recognition in quiet, they still have difficulties understanding speech in noise. We conducted three experiments to determine whether a directional microphone and an adaptive multichannel noise reduction algorithm could enhance Cl performance in noise and whether Speech Transmission Index (STI) can be used to predict CI performance in various acoustic and signal processing conditions. In Experiment 1, CI users listened to speech in...

  1. Using Concha Electrodes to Measure Cochlear Microphonic Waveforms and Auditory Brainstem Responses

    OpenAIRE

    Zhang, Ming

    2010-01-01

    During electrocochleography, that is, ECochG or ECoG, a recording electrode can be placed in the ear canal lateral to the tympanic membrane. We designed a concha electrode to record both sinusoidal waveforms of cochlear microphonics (CMs) and auditory brainstem responses (ABRs). The amplitudes of CM waveforms and Wave I or compound action potentials (CAPs) recorded at the concha were greater than those recorded at the mastoid but slightly lower than those recorded at the ear canal. Wave V amp...

  2. Analytical modeling of squeeze air film damping of biomimetic MEMS directional microphone

    Science.gov (United States)

    Ishfaque, Asif; Kim, Byungki

    2016-08-01

    Squeeze air film damping is introduced in microelectromechanical systems due to the motion of the fluid between two closely spaced oscillating micro-structures. The literature is abundant with different analytical models to address the squeeze air film damping effects, however, there is a lack of work in modeling the practical sensors like directional microphones. Here, we derive an analytical model of squeeze air film damping of first two fundamental vibration modes, namely, rocking and bending modes, of a directional microphone inspired from the fly Ormia ochracea's ear anatomy. A modified Reynolds equation that includes compressibility and rarefaction effects is used in the analysis. Pressure distribution under the vibrating diaphragm is derived by using Green's function. From mathematical modeling of the fly's inspired mechanical model, we infer that bringing the damping ratios of both modes in the critical damping range enhance the directional sensitivity cues. The microphone parameters are varied in derived damping formulas to bring the damping ratios in the vicinity of critical damping, and to show the usefulness of the analytical model in tuning the damping ratios of both modes. The accuracy of analytical damping results are also verified by finite element method (FEM) using ANSYS. The FEM results are in full compliance with the analytical results.

  3. Multiresolution Source/Filter Model for Low Bitrate Coding of Spot Microphone Signals

    Directory of Open Access Journals (Sweden)

    Mouchtaris Athanasios

    2008-01-01

    Full Text Available A multiresolution source/filter model for coding of audio source signals (spot recordings is proposed. Spot recordings are a subset of the multimicrophone recordings of a music performance, before the mixing process is applied for producing the final multichannel audio mix. The technique enables low bitrate coding of spot signals with good audio quality (above 3.0 perceptual grade compared to the original. It is demonstrated that this particular model separates the various microphone recordings of a multimicrophone recording into a part that mainly characterizes a specific microphone signal and a part that is common to all signals of the same recording (and can thus be omitted during transmission. Our interest in low bitrate coding of spot recordings is related to applications such as remote mixing and real-time collaboration of musicians who are geographically distributed. Using the proposed approach, it is shown that it is possible to encode a multimicrophone audio recording using a single audio channel only, with additional information for each spot microphone signal in the order of 5 kbps, for good-quality resynthesis. This is verified by employing both objective and subjective measures of performance.

  4. Estimation of aircraft angular coordinates using a directional-microphone array--An experimental study.

    Science.gov (United States)

    Genescà, Meritxell; Svensson, U Peter; Taraldsen, Gunnar

    2015-04-01

    Ground reflections cause problems when estimating the direction of arrival of aircraft noise. In traditional methods, based on the time differences between the microphones of a compact array, they may cause a significant loss of accuracy in the vertical direction. This study evaluates the use of first-order directional microphones, instead of omnidirectional, with the aim of reducing the amplitude of the reflected sound. Such a modification allows the problem to be treated as in free field conditions. Although further tests are needed for a complete evaluation of the method, the experimental results presented here show that under the particular conditions tested the vertical angle error is reduced ∼10° for both jet and propeller aircraft by selecting an appropriate directivity pattern. It is also shown that the final level of error depends on the vertical angle of arrival of the sound, and that the estimates of the horizontal angle of arrival are not influenced by the directivity pattern of the microphones nor by the reflective properties of the ground. PMID:25920843

  5. Model based prediction of the existence of the spontaneous cochlear microphonic

    Science.gov (United States)

    Ayat, Mohammad; Teal, Paul D.

    2015-12-01

    In the mammalian cochlea, self-sustaining oscillation of the basilar membrane in the cochlea can cause vibration of the ear drum, and produce spontaneous narrow-band air pressure fluctuations in the ear canal. These spontaneous fluctuations are known as spontaneous otoacoustic emissions. Small perturbations in feedback gain of the cochlear amplifier have been proposed to be the generation source of self-sustaining oscillations of the basilar membrane. We hypothesise that the self-sustaining oscillation resulting from small perturbations in feedback gain produce spontaneous potentials in the cochlea. We demonstrate that according to the results of the model, a measurable spontaneous cochlear microphonic must exist in the human cochlea. The existence of this signal has not yet been reported. However, this spontaneous electrical signal could play an important role in auditory research. Successful or unsuccessful recording of this signal will indicate whether previous hypotheses about the generation source of spontaneous otoacoustic emissions are valid or should be amended. In addition according to the proposed model spontaneous cochlear microphonic is basically an electrical analogue of spontaneous otoacoustic emissions. In certain experiments, spontaneous cochlear microphonic may be more easily detected near its generation site with proper electrical instrumentation than is spontaneous otoacoustic emission.

  6. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  7. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  8. Direct writing of microtunnels using proton beam micromachining

    International Nuclear Information System (INIS)

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

  9. Direct writing of microtunnels using proton beam micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Marot, Laurent [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)]. E-mail: laurent.marot@he-arc.ch; Munnik, Frans [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland); Mikhailov, Serguei [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)

    2006-08-15

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized.

  10. Water-soluble sacrificial layers for surface micromachining.

    Science.gov (United States)

    Linder, Vincent; Gates, Byron D; Ryan, Declan; Parviz, Babak A; Whitesides, George M

    2005-07-01

    This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile materials, such as organic polymers, metal oxides and metals-materials that might be damaged during typical surface micromachining processes. The carboxylic acid groups of one polymer-poly(acrylic acid) (PAA)-can be transformed by reversible ion-exchange from water-soluble (Na+ counterion) to water-insoluble (Ca2+ counterion) forms. The use of PAA and dextran polymers as sacrificial materials is a useful technique for the fabrication of microstructures: Examples include metallic structures formed by the electrodeposition of nickel, and freestanding, polymeric structures formed by photolithography. PMID:17193516

  11. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  12. Microscopic View of Soil on a Micromachined Silicone Substrate

    Science.gov (United States)

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  13. Comparing flat top and Gaussian focal beam shapes when micromachining steel

    Science.gov (United States)

    Lizotte, Todd E.; Ohar, Orest

    2011-10-01

    Laser micromachining, drilling and marking is extensively used within the aerospace, automotive and firearms industries. The unique properties of lasers make them ideal tools for micromachining a wide diversity of materials, including steel alloys [1]. We describe the results of micromachining of low carbon steel and stainless steel alloys, using a high powered diode pumped solid state (DPSS) laser operating at a wavelength of 355nm. The laser was configured with beam conditioning optics to produce either a flat top beam or a Gaussian output which was then sent through a galvanometer scanner and telecentric lens beam delivery system. This paper outlines the interrelationship of process variables when micromachining fine features in steel and stainless steel alloys. Process variables measured included the optimum laser focus plane, energy density, galvanometer scan rate, and pulse overlap and focal spot diameter. Optimum process performance was evaluated based on a dimensional comparison of the micromachined features from each test coupon, including uniformity and surface roughness of the micromachined surface and the minimization of surface irregularities (stalagmite type slag / debris / corn row patterns) and taper angle of the micromachined feature side walls.

  14. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  15. Ultrafast disk technology enables next generation micromachining laser sources

    Science.gov (United States)

    Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

    2013-02-01

    Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

  16. Exploring the feasibility of smart phone microphone for measurement of acoustic voice parameters and voice pathology screening.

    Science.gov (United States)

    Uloza, Virgilijus; Padervinskis, Evaldas; Vegiene, Aurelija; Pribuisiene, Ruta; Saferis, Viktoras; Vaiciukynas, Evaldas; Gelzinis, Adas; Verikas, Antanas

    2015-11-01

    The objective of this study is to evaluate the reliability of acoustic voice parameters obtained using smart phone (SP) microphones and investigate the utility of use of SP voice recordings for voice screening. Voice samples of sustained vowel/a/obtained from 118 subjects (34 normal and 84 pathological voices) were recorded simultaneously through two microphones: oral AKG Perception 220 microphone and SP Samsung Galaxy Note3 microphone. Acoustic voice signal data were measured for fundamental frequency, jitter and shimmer, normalized noise energy (NNE), signal to noise ratio and harmonic to noise ratio using Dr. Speech software. Discriminant analysis-based Correct Classification Rate (CCR) and Random Forest Classifier (RFC) based Equal Error Rate (EER) were used to evaluate the feasibility of acoustic voice parameters classifying normal and pathological voice classes. Lithuanian version of Glottal Function Index (LT_GFI) questionnaire was utilized for self-assessment of the severity of voice disorder. The correlations of acoustic voice parameters obtained with two types of microphones were statistically significant and strong (r = 0.73-1.0) for the entire measurements. When classifying into normal/pathological voice classes, the Oral-NNE revealed the CCR of 73.7% and the pair of SP-NNE and SP-shimmer parameters revealed CCR of 79.5%. However, fusion of the results obtained from SP voice recordings and GFI data provided the CCR of 84.60% and RFC revealed the EER of 7.9%, respectively. In conclusion, measurements of acoustic voice parameters using SP microphone were shown to be reliable in clinical settings demonstrating high CCR and low EER when distinguishing normal and pathological voice classes, and validated the suitability of the SP microphone signal for the task of automatic voice analysis and screening. PMID:26162450

  17. Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

    International Nuclear Information System (INIS)

    In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61–81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

  18. Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining

    International Nuclear Information System (INIS)

    Complex three-dimensional structures for microelectromechanical systems (MEMS) are fabricated in Si{1 0 0} wafers using wet bulk micromachining. The structures are divided into two categories: fixed and freestanding. The fabrication processes for both types utilize single wafers with sequentially deposited nitride and oxide layers, local oxidation of silicon (LOCOS) and two steps of wet anisotropic etching. The fixed structures contain perfectly sharp edges. Thermally deposited oxide is used as the material for the freestanding structures. Wet etching is performed in tetramethyl ammonium hydroxide (TMAH) with and without Triton X-100 (C14H22O(C2H4O)n, n = 9–10). For the fixed structures, both etching steps are performed either in 25 wt% TMAH + Triton or pure TMAH or both, depending upon the type of the structures. In the case of freestanding systems, TMAH + Triton is utilized first, followed by pure TMAH. The fabrication methods enable densely arrayed structures, allowing the manufacture of corrugated diaphragms, compact size liquid (or gas) flow delivery systems, newly shaped mold for soft MEMS structures (e.g. PDMS (polydimethylsiloxane)) and other applications. The present research is an approach to fabricate advanced MEMS structures, extending the range of 3D structures fabricated by silicon anisotropic etching

  19. Microfabrication in free-standing gallium nitride using UV laser micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Gu, E. [Institute of Photonics, University of Strathclyde, Wolfson Centre, 106 Rottenrow, Glasgow G4 0NW (United Kingdom)]. E-mail: erdan.gu@strath.ac.uk; Howard, H. [National Centre for Laser Applications, National University of Ireland, Galway (Ireland); Conneely, A. [National Centre for Laser Applications, National University of Ireland, Galway (Ireland); O' Connor, G.M. [National Centre for Laser Applications, National University of Ireland, Galway (Ireland); Illy, E.K. [Oxford Lasers Ltd., Unit 8 Moorbrook Park, Didcot, Oxon OX11 7HP (United Kingdom); Knowles, M.R.H. [Oxford Lasers Ltd., Unit 8 Moorbrook Park, Didcot, Oxon OX11 7HP (United Kingdom); Edwards, P.R. [Department of Physics, University of Strathclyde, Glasgow G4 0NG (United Kingdom); Martin, R.W. [Department of Physics, University of Strathclyde, Glasgow G4 0NG (United Kingdom); Watson, I.M. [Institute of Photonics, University of Strathclyde, Wolfson Centre, 106 Rottenrow, Glasgow G4 0NW (United Kingdom); Dawson, M.D. [Institute of Photonics, University of Strathclyde, Wolfson Centre, 106 Rottenrow, Glasgow G4 0NW (United Kingdom)

    2006-04-30

    Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride.

  20. A beamline for micromachining and micro-characterization at the APS

    International Nuclear Information System (INIS)

    Beamline 2-BM at the Advanced Photon Source had been designed for developing micromachining techniques based on deep x-ray lithography and also for micro-characterization of optics and samples. With a critical energy of 19.5 keV and a highly collimated beam, the APS bending-magnet source is well suited for fabricating thick photoresist structures (>1 mm) with high precision. The 2-BM beamline was designed to exploit these source characteristics and to provide flexible spectral tuning in order to accommodate different mask/resist thicknesses and to study the effects of the x-ray energy on the lithography process. The beamline will also be used for developing micro-characterization techniques. This includes characterization of microfocusing optics such as zone plates and developing instrumentation for techniques such as x-ray microprobe and microtomography. For this purpose, two monochromators, one using crystals and one using multilayers, will be used to cover the 1-35 keV regime with different energy bandwidths. Beamline design, end-station layout, and recent results will be presented

  1. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  2. Design and fabrication of Electroplating Nickel Micromachined Probe with out-of-plane predeformation

    International Nuclear Information System (INIS)

    This paper present a new type of electroplating Nickel micromachined probes with out-of-plane predeformation for the next generation integrated circuit (IC) chip testing probe card application. It was fabricated using silicon bulk etching, Ti deposition and Ni electroplating process. We use the residual stress effect of thin films deposition to cause the flexible micromachined probe with a large out-of-plane predeformation and combine postelectroplating technique to further increase beam's thickness and therefore enhance its stiffness. The typical micromachined probe had a thickness 5∼10 μm, a width of 20 μm, and a length of 100 μm. The maximum deflection of the fabricated Nickel probe beam was 28 μm. This micromachined probe is capable of providing a very larger number of testing probe card, including the array pad format, and this designed also to satisfy the requirements for high frequency, high resolution and low cost wafer-level testing..

  3. Design and fabrication of an array type electron multiplier for radiation imaging by micromachining technique

    International Nuclear Information System (INIS)

    A new position sensitive array type electron multiplier using micromachining technique has been investigated. Here are described new miniature three dimensional structures for such a multichannel electron multiplies. Their design and preliminary processing are presented. (author)

  4. An integrated fluorescence activated cell sorter fabricated by femtosecond laser micromachining

    Directory of Open Access Journals (Sweden)

    Paié P.

    2013-11-01

    Full Text Available We present here a fully integrated fluorescence activated cell sorter (FACS, able to perform analysis at single cell level. This optofluidic device is obtained on a fused silica substrate with the use of femtosecond laser micromachining.

  5. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  6. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  7. Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics

    Science.gov (United States)

    Poletkin, K.; Lu, Z.; Wallrabe, U.; Badilita, V.

    2015-12-01

    This paper introduces a novel design for a hybrid micromachined contactless suspension, whose operation is based on combining electromagnetic inductive and electrostatic actuation. Wirebonded microcoils provide the electromagnetic inductive actuation, while electrodes patterned on a Si wafer provide electrostatic control. The coil structure and the electrode structure are independently designed and fabricated, and are finally assembled into one device by flip-chip bonding. We demonstrate vertical linear positioning of an aluminium disk-shaped proof mass in a range from 30 to 200 μm based on the coil structure. The electrode structure is employed to dynamically adjust the stiffness components during the operation of the suspension, to control the tilting in a range from ±1° to ±4°, as well as to control the oscillation about the vertical axis with a displacement of 37° at about 1.5 Hz frequency.

  8. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  9. Electrically tuneable micromachined fabry-perot interferometer in gas analysis

    Science.gov (United States)

    Blomberg, M.; Torkkeli, A.; Lehto, A.; Helenelund, Ch; Viitasalo, M.

    1997-01-01

    This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system.

  10. A micromachined carbon nanotube film cantilever-based energy cell.

    Science.gov (United States)

    Gong, Zhongcheng; He, Yuan; Tseng, Yi-Hsuan; O'Neal, Chad; Que, Long

    2012-08-24

    This paper reports a new type of energy cell based on micromachined carbon nanotube film (CNF)-lead zirconate titanate cantilevers that is fabricated on silicon substrates. Measurements found that this type of micro-energy cell generates both AC voltages due to the self-reciprocation of the microcantilevers and DC voltages due to the thermoelectric effect upon exposure to light and thermal radiation, resulting from the unique optical and thermal properties of the CNF. Typically the measured power density of the micro-energy cell can be from 4 to 300 μW cm(-2) when it is exposed to sunlight under different operational conditions. It is anticipated that hundreds of integrated micro-energy cells can generate power in the range of milliwatts, paving the way for the construction of self-powered micro- or nanosystems. PMID:22842491

  11. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 1012 ions/cm2, this technique is suitable for the fabrication of different shapes of LiNbO3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  12. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  13. Femtosecond laser embedded grating micromachining of flexible PDMS plates

    Science.gov (United States)

    Cho, Sung-Hak; Chang, Won-Seok; Kim, Kwang-Ryul; Hong, Jong Wook

    2009-04-01

    We report on the femtosecond laser micromachining of photo-induced embedded diffraction grating in flexible Poly (Dimethly Siloxane) (PDMS) plates using a high-intensity femtosecond (130 fs) Ti: sapphire laser ( λp = 800 nm). The refractive index modifications with diameters ranging from 2 μm to 5 μm were photo-induced after the irradiation with peak intensities of more than 1 × 10 11 W/cm 2. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which femtosecond laser was focused. The maximum refractive index change (Δ n) was estimated to be 2 × 10 -3. By the X- Y- Z scanning of sample, the embedded diffraction grating in PDMS plate was fabricated successfully using a femtosecond laser.

  14. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  15. Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

    Energy Technology Data Exchange (ETDEWEB)

    Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

    2005-11-15

    A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

  16. Deep etch of GaN by laser micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Mak, Giuseppe Y.; Lam, Edmund Y.; Choi, H.W. [Department of Electrical and Electronic Engineering, University of Hong Kong, Hong Kong (China)

    2010-07-15

    Trench formation for device isolation on GaN light-emitting diode (LED) wafers via nanosecond ultraviolet laser micromachining is demonstrated. Owing to the dissimilar ablation thresholds between GaN and sapphire, the etch process terminates automatically at the GaN/sapphire interface. It was found that optimal focus offset, optimal pulse energy and high repetition rate are essential for obtaining a trench with tapered sidewall and smooth bottom surface, which is suitable for the conformal deposition of interconnects across the trench. This technique has been successfully applied to the rapid prototyping of interconnected LED arrays on a single chip. (copyright 2010 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  17. Polymer/colloid surface micromachining: micropatterning of hybrid multilayers.

    Science.gov (United States)

    Mohammed, Javeed Shaikh; McShane, Mike

    2008-12-01

    Fabrication of multicomponent patterned films comprising polymer/nanoparticle multilayers using conventional lithography and bottom-up layer-by-layer nanofabrication techniques is described. The work is motivated by the potential to extend polymer surface micromachining capabilities toward construction of integrated systems by connecting discrete domains of active materials containing functional nanoparticles. Modified surfaces illustrate tunability of the physical (thickness, roughness, 3D structures) and chemical (inorganic/organic material combinations) properties of the nanocomposite micropatterns. Intriguing nanoscale phenomena were observed for the structures when the order of material deposition was changed; the final multilayer thickness and surface roughness and mechanical integrity of the patterns were found to be interdependent and related to the roughness of layers deposited earlier in the process. PMID:18989945

  18. Defect engineering and micromachining of Lithium Niobate by ion implantation

    International Nuclear Information System (INIS)

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  19. Activities on plasma ion source based micromachining system at VECC

    International Nuclear Information System (INIS)

    An RF inductively coupled plasma ion source with electrostatic focusing column is developed and optimized to generate high brightness, low energy spread ion beam which suits the needs of a focused ion beam system. Current density at the target plane is ∼ 500 mA/cm2 and thus the system is proved to be an appropriate one for high rate micromachining. Micro-patterning capabilities of the system are demonstrated by creating different kinds of patterns on silicon wafer, micro-drilling in metal foils etc. Measurements show that the currents in the range of 500 nA to 1 A can be focused to spots having diameters in the range of 8-10 m resulting in a current density of 450 mA/cm2 at the focused spot. (author)

  20. Defect engineering and micromachining of Lithium Niobate by ion implantation

    Energy Technology Data Exchange (ETDEWEB)

    Bianconi, M.; Bentini, G.G. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Chiarini, M. [Carlo Gavazzi Space S.p.A. - Sede di Bologna and Laboratory MISTER, Via Gobetti 101, 1-40129 Bologna (Italy); De Nicola, P. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)], E-mail: denicola@bo.imm.cnr.it; Montanari, G.B. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Universita di Bologna - Dipartimento DEIS, Viale del Risorgimento 2, 1-40136 Bologna (Italy); Nubile, A.; Sugliani, S. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)

    2009-09-01

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  1. Three-dimensional micromachining of silicon using a nuclear microprobe

    Energy Technology Data Exchange (ETDEWEB)

    Teo, E.J. E-mail: phytej@nus.edu.sg; Tavernier, E.P.; Breese, M.B.H.; Bettiol, A.A.; Watt, F.; Liu, M.H.; Blackwood, D.J

    2004-08-01

    We describe a novel technique for silicon microfabrication based on energetic mega-electron-volt (MeV) helium irradiation and subsequent electrochemical etching. The ion-induced damage in the irradiated regions slows down the porous silicon formation during electrochemical etching, producing a raised microstructure after cleaning in diluted potassium hydroxide solution. The thickness of the porous silicon layer formed depends on the accumulated fluence at each scan point. A relationship between the irradiated fluence and feature height is investigated on a p-type [1 0 0] silicon with a resistivity of 0.03 {omega} cm using focused 2 MeV helium beam. We use this relationship to micromachine multilevel structures with a single focused helium beam energy.

  2. Q-Switched Nd: YAG Laser Micro-Machining System

    International Nuclear Information System (INIS)

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  3. ELECTROCHEMICAL MICROMACHINING USING VIBRATILE TUNGSTEN WIRE FOR HIGH-ASPECT-RATIO MICROSTRUCTURES

    OpenAIRE

    Wang, K

    2010-01-01

    Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high-aspect-ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vibration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the...

  4. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    OpenAIRE

    Debkalpa Goswami; Shankar Chakraborty

    2014-01-01

    Electrochemical micromachining (EMM) appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applicatio...

  5. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    OpenAIRE

    Norihisa Miki; Koichi Hishida; Reiko Kuriyama; Yohei Sato; Yosuke Koga

    2013-01-01

    Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF) is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined ...

  6. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    OpenAIRE

    Zhengyi Niu; Xu Zhang; Peitao Dong; Zhihua Chen; Zhanqiang Hou; Dingbang Xiao; Xuezhong Wu

    2010-01-01

    It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with s...

  7. Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization

    OpenAIRE

    Liu, Chang; Tai, Yu-Chong

    1999-01-01

    This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods. We have designed and fabricated a large number and variety of surface-micromachined test structures with different etch-channel dimensions. Each cavity is then subjected to a number of sequential CVD deposition steps with incremental thickness until the cavity is successfully sealed. At etch deposition interval, the sealing status of ev...

  8. Large enhancement of femtosecond laser micromachining speed in dye-doped hydrogel polymers.

    Science.gov (United States)

    Ding, Li; Jani, Dharmendra; Linhardt, Jeffrey; Künzler, Jay F; Pawar, Siddhesh; Labenski, Glen; Smith, Thomas; Knox, Wayne H

    2008-12-22

    Ophthalmologic hydrogel polymers are doped with Fluorescein or Coumarin dyes prior to the femtosecond laser micromachining process. We find that the achievable micromachining writing speed can be greatly increased while maintaining large refractive index changes (up to +0.08). Compared with previous results in dye-doped polymers that do not contain water such as PMMA, we obtain much larger index changes and much faster writing speeds. PMID:19104623

  9. Development of plasma ion source based micromachining system

    International Nuclear Information System (INIS)

    A compact high performance Inductively Coupled Plasma based (ICP) RF ion source operating at 13.56 MHz frequency is developed for production of low energy beams with micron size dimensions for high speed micromachining applications. To produce fine beams with high current density, ion source must produce high current ion beams with low energy spread and low divergence. Systematic characterizations have been carried out on the ion source and the extracted ion beams. The plasma source has exhibited a reduced brightness of 1x105 A/m2-sr-eV and ion energy spread of less than 5 eV. The angular current intensity of this source is >10 mA/Sr which is about three order higher than the traditional Liquid Metal Ion Source (LMIS). Ions are extracted by two electrode extraction system with 1 mm aperture and accelerated up to 8 KeV. Initial tests with the two lens focusing column, about 20 nA beam could be focused in 1.5 μm spot at working distance of 1 mm. The ion source life time and the stability has been excellent. Several experiments have been carried out to estimate the capability of this system for high micromachining applications. Various types of micro patterns have been created on Si wafer with Ar ion beam. Milling rate of > 1 μm3 are easily possible with this system. It is expected that with few more modifications in ion source as well as focusing column, milling rates of one order more and focused spot size of submicron dimensions can easily be achieved. (author)

  10. Analysis of jet-airfoil interaction noise sources by using a microphone array technique

    Science.gov (United States)

    Fleury, Vincent; Davy, Renaud

    2016-03-01

    The paper is concerned with the characterization of jet noise sources and jet-airfoil interaction sources by using microphone array data. The measurements were carried-out in the anechoic open test section wind tunnel of Onera, Cepra19. The microphone array technique relies on the convected, Lighthill's and Ffowcs-Williams and Hawkings' acoustic analogy equation. The cross-spectrum of the source term of the analogy equation is sought. It is defined as the optimal solution to a minimal error equation using the measured microphone cross-spectra as reference. This inverse problem is ill-posed yet. A penalty term based on a localization operator is therefore added to improve the recovery of jet noise sources. The analysis of isolated jet noise data in subsonic regime shows the contribution of the conventional mixing noise source in the low frequency range, as expected, and of uniformly distributed, uncorrelated noise sources in the jet flow at higher frequencies. In underexpanded supersonic regime, a shock-associated noise source is clearly identified, too. An additional source is detected in the vicinity of the nozzle exit both in supersonic and subsonic regimes. In the presence of the airfoil, the distribution of the noise sources is deeply modified. In particular, a strong noise source is localized on the flap. For high Strouhal numbers, higher than about 2 (based on the jet mixing velocity and diameter), a significant contribution from the shear-layer near the flap is observed, too. Indications of acoustic reflections on the airfoil are also discerned.

  11. High-Resolution Time-Frequency Spectrum-Based Lung Function Test from a Smartphone Microphone.

    Science.gov (United States)

    Thap, Tharoeun; Chung, Heewon; Jeong, Changwon; Hwang, Ki-Eun; Kim, Hak-Ryul; Yoon, Kwon-Ha; Lee, Jinseok

    2016-01-01

    In this paper, a smartphone-based lung function test, developed to estimate lung function parameters using a high-resolution time-frequency spectrum from a smartphone built-in microphone is presented. A method of estimation of the forced expiratory volume in 1 s divided by forced vital capacity (FEV₁/FVC) based on the variable frequency complex demodulation method (VFCDM) is first proposed. We evaluated our proposed method on 26 subjects, including 13 healthy subjects and 13 chronic obstructive pulmonary disease (COPD) patients, by comparing with the parameters clinically obtained from pulmonary function tests (PFTs). For the healthy subjects, we found that an absolute error (AE) and a root mean squared error (RMSE) of the FEV₁/FVC ratio were 4.49% ± 3.38% and 5.54%, respectively. For the COPD patients, we found that AE and RMSE from COPD patients were 10.30% ± 10.59% and 14.48%, respectively. For both groups, we compared the results using the continuous wavelet transform (CWT) and short-time Fourier transform (STFT), and found that VFCDM was superior to CWT and STFT. Further, to estimate other parameters, including forced vital capacity (FVC), forced expiratory volume in 1 s (FEV₁), and peak expiratory flow (PEF), regression analysis was conducted to establish a linear transformation. However, the parameters FVC, FEV1, and PEF had correlation factor r values of 0.323, 0.275, and -0.257, respectively, while FEV₁/FVC had an r value of 0.814. The results obtained suggest that only the FEV1/FVC ratio can be accurately estimated from a smartphone built-in microphone. The other parameters, including FVC, FEV1, and PEF, were subjective and dependent on the subject's familiarization with the test and performance of forced exhalation toward the microphone. PMID:27548164

  12. Characterisation of the acoustic field radiated by a rail with a microphone array: The SWEAM method

    Science.gov (United States)

    Faure, Baldrik; Chiello, Olivier; Pallas, Marie-Agnès; Servière, Christine

    2015-06-01

    Beamforming methods are widely used for the identification of acoustic sources on rail-bound vehicles with microphone arrays, although they have limitations in case of spatially extended sources such as the rail. In this paper, an alternative method dedicated to the acoustic field radiated by the rail is presented. The method is called SWEAM for Structural Wavenumbers Estimation with an Array of Microphones. The main idea is to replace the elementary fields commonly used in beamforming (point sources or plane waves) by specific fields related to point forces applied on the rail. The vertical bending vibration of the rail is modelled using a simple beam assumption so that the rail vibration depends only on two parameters: the wavenumber and the decay rate of the propagative wave. Together with a radiation model based on a line of coherent monopoles, the acoustic field emitted by the rail is easily derived. The method itself consists in using the signals measured on a microphone array to estimate both the structural parameters and the global amplitude of this specific source. The estimation is achieved by minimising a least squares criterion based on the measured and modelled spectral matrices. Simulations are performed to evaluate the performance of the method considering one or several sources at fixed positions. The comparison of the simulated and reconstructed fields are convincing at most frequencies. The method is finally validated in the case of a single vertical excitation using an original set up composed of a 30 m long experimental track excited by an electrodynamic shaker. The results show a great improvement of the wavenumber estimation in the whole frequency range compared with the plane wave beamforming method and a fair estimation of the decay rate. The underestimation of some low decay rates due to the poor selectivity of the criterion occurring in these cases requires further study.

  13. Comparison of Multiple-Microphone and Single-Loudspeaker Adaptive Feedback/Echo Cancellation Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt;

    2011-01-01

    Recently, we introduced a frequency domain measure - the power transfer function - to predict the convergence rate, system stability bound and the steady-state behavior across time and frequency of a least mean square based feedback/echo cancellation algorithm in a general multiple-microphone and...... single-loudspeaker system. In this work, we extend the theoretical analysis to the normalized least mean square and recursive least squares algorithms. Furthermore, we compare and discuss the system behaviors in terms of the power transfer function for all three adaptive algorithms....

  14. A Three-Microphone Adaptive Noise Canceller for Minimizing Reverberation and Signal Distortion

    Directory of Open Access Journals (Sweden)

    Zayed M. Ramadan

    2008-01-01

    Full Text Available This paper introduces an adaptive noise canceller (ANC to improve the system performance in the presence of signal leakage components. The proposed ANC consists of two adaptive filters and three microphones. The first adaptive filter cancels the signal leakage and the second filter cancels the noise. For best results, a least mean squares adaptive algorithm was also introduced and used in the proposed ANC. In this algorithm the step size was based on both error vector and data normalization. Simulation results, carried out using a real speech, demonstrate significant improvements of the proposed ANC over the conventional one in minimizing signal distortion and reverberation.

  15. Acoustical source mapping based on deconvolution approaches for circular microphone arrays

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn

    2011-01-01

    Recently, the aeroacoustic community has examined various methods based on deconvolution to improve the visualization of acoustic fields scanned with planar arrays of microphones. These methods are based on the assumption that the beamforming map in an observation plane parallel to the array can be...... though these methods are originally designed for planar sparse arrays, they can be adapted to uniform circular arrays for mapping the sound over 360º. Such geometry has the advantage that the beamforming response has always the same shape around the focusing direction, or in other words, that the...

  16. Deconvolution for the localization of sound sources using a circular microphone array

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn

    2013-01-01

    During the last decade, the aeroacoustic community has examined various methods based on deconvolution to improve the visualization of acoustic fields scanned with planar sparse arrays of microphones. These methods assume that the beamforming map in an observation plane can be approximated by a....... Even though these methods were originally designed for planar sparse arrays, in the present study, they are adapted to uniform circular arrays for mapping the sound over 360°. This geometry has the advantage that the beamforming output is practically independent of the focusing direction, meaning that...

  17. Detection and Separation of Speech Events in Meeting Recordings Using a Microphone Array

    Directory of Open Access Journals (Sweden)

    Yamada Miichi

    2007-01-01

    Full Text Available When applying automatic speech recognition (ASR to meeting recordings including spontaneous speech, the performance of ASR is greatly reduced by the overlap of speech events. In this paper, a method of separating the overlapping speech events by using an adaptive beamforming (ABF framework is proposed. The main feature of this method is that all the information necessary for the adaptation of ABF, including microphone calibration, is obtained from meeting recordings based on the results of speech-event detection. The performance of the separation is evaluated via ASR using real meeting recordings.

  18. Detection and Separation of Speech Events in Meeting Recordings Using a Microphone Array

    Directory of Open Access Journals (Sweden)

    Futoshi Asano

    2007-07-01

    Full Text Available When applying automatic speech recognition (ASR to meeting recordings including spontaneous speech, the performance of ASR is greatly reduced by the overlap of speech events. In this paper, a method of separating the overlapping speech events by using an adaptive beamforming (ABF framework is proposed. The main feature of this method is that all the information necessary for the adaptation of ABF, including microphone calibration, is obtained from meeting recordings based on the results of speech-event detection. The performance of the separation is evaluated via ASR using real meeting recordings.

  19. Assessment of Microphone Phased Array for Measuring Launch Vehicle Lift-off Acoustics

    Science.gov (United States)

    Garcia, Roberto

    2012-01-01

    The specific purpose of the present work was to demonstrate the suitability of a microphone phased array for launch acoustics applications via participation in selected firings of the Ares I Scale Model Acoustics Test. The Ares I Scale Model Acoustics Test is a part of the discontinued Constellation Program Ares I Project, but the basic understanding gained from this test is expected to help development of the Space Launch System vehicles. Correct identification of sources not only improves the predictive ability, but provides guidance for a quieter design of the launch pad and optimization of the water suppression system. This document contains the results of the NASA Engineering and Safety Center assessment.

  20. Determination of energy density in ducts by a three-microphone phaseless method and estimation of measurement uncertainties

    Science.gov (United States)

    Pascal, Jean-Claude; Li, Jing-Fang; Thomas, Jean-Hugh

    2011-09-01

    A new method to measure the total energy density of waves traveling in opposite directions in ducts is suggested in order to completely eliminate phase errors that lead to bias errors and are difficult to control in industrial tests. Only the auto-power spectral densities are measured by the three microphones. The inversion of a linear system based on a propagation model, where the two opposite waves are partially coherent, makes it possible to obtain the energy density. The sensitivity of this method to errors in the speed of sound, errors of microphone calibration and errors of microphone positions in the duct is analyzed. To complete the study on the robustness of the method, an evaluation of the statistical errors is carried out. The total uncertainty is used to make recommendations on the choice of the experimental parameters. The selection of the frequency limits permits to maintain the measurement uncertainty within a given confidence interval.

  1. A 540-μW digital pre-amplifier with 88-dB dynamic range for electret microphones

    Science.gov (United States)

    Yan, Liu; Siliang, Hua; Donghui, Wang; Chaohuan, Hou

    2009-05-01

    We design a digital pre-amplifier which can be directly connected to an electret microphone. The amplifier can convert analog signals into digital signals, has a wide voltage swing and low power consumption, as is required in portable applications. Measurement results show that the dynamic range of the digital pre-amplifier reaches 88 dB, the equivalent input referred noise is 5 μVrms, the typical power consumption is 540 μW, and in standby mode the current does not exceed 10 μA. Compared with an analog microphone, an electret microphone with digital pre-amplifier offers a better SNR, higher integration, lower power consumption, and higher immunity to system noise.

  2. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  3. Characterization of condenser microphones under different environmental conditions for accurate speed of sound measurements with acoustic resonators

    International Nuclear Information System (INIS)

    Condenser microphones are more commonly used and have been extensively modeled and characterized in air at ambient temperature and static pressure. However, several applications of interest for metrology and physical acoustics require to use these transducers in significantly different environmental conditions. Particularly, the extremely accurate determination of the speed of sound in monoatomic gases, which is pursued for a determination of the Boltzmann constant k by an acoustic method, entails the use of condenser microphones mounted within a spherical cavity, over a wide range of static pressures, at the temperature of the triple point of water (273.16 K). To further increase the accuracy achievable in this application, the microphone frequency response and its acoustic input impedance need to be precisely determined over the same static pressure and temperature range. Few previous works examined the influence of static pressure, temperature, and gas composition on the microphone's sensitivity. In this work, the results of relative calibrations of 1/4 in. condenser microphones obtained using an electrostatic actuator technique are presented. The calibrations are performed in pure helium and argon gas at temperatures near 273 K and in the pressure range between 10 and 600 kPa. These experimental results are compared with the predictions of a realistic model available in the literature, finding a remarkable good agreement. The model provides an estimate of the acoustic impedance of 1/4 in. condenser microphones as a function of frequency and static pressure and is used to calculate the corresponding frequency perturbations induced on the normal modes of a spherical cavity when this is filled with helium or argon gas.

  4. Analysis and active compensation of microphonics in continuous wave narrow-bandwidth superconducting cavities

    Science.gov (United States)

    Neumann, A.; Anders, W.; Kugeler, O.; Knobloch, J.

    2010-08-01

    Many proposals for next generation light sources based on single pass free electron lasers or energy recovery linac facilities require a continuous wave (cw) driven superconducting linac. The effective beam loading in such machines is very small and in principle the cavities can be operated at a bandwidth of a few Hz and with less than a few kW of rf power. However, a power reserve is required to ensure field stability. A major error source is the mechanical microphonics detuning of the niobium cavities. To understand the influence of cavity detuning on longitudinal beam stability, a measurement program has been started at the horizontal cavity test facility HoBiCaT at HZB to study TESLA-type cavities. The microphonics detuning spectral content, peak detuning values, and the driving terms for these mechanical oscillations have been analyzed. In combination with the characterization of cw-adapted fast tuning systems based on the piezoelectric effect this information has been used to design a detuning compensation algorithm. It has been shown that a compensation factor between 2-7 is achievable, reducing the typical detuning of 2-3 Hz rms to below 0.5 Hz rms. These results were included in rf-control simulations of the cavities, and it was demonstrated that a phase stability below 0.02° can be achieved.

  5. Broadband implementation of coprime linear microphone arrays for direction of arrival estimation.

    Science.gov (United States)

    Bush, Dane; Xiang, Ning

    2015-07-01

    Coprime arrays represent a form of sparse sensing which can achieve narrow beams using relatively few elements, exceeding the spatial Nyquist sampling limit. The purpose of this paper is to expand on and experimentally validate coprime array theory in an acoustic implementation. Two nested sparse uniform linear subarrays with coprime number of elements ( M and N) each produce grating lobes that overlap with one another completely in just one direction. When the subarray outputs are combined it is possible to retain the shared beam while mostly canceling the other superfluous grating lobes. In this way a small number of microphones ( N+M-1) creates a narrow beam at higher frequencies, comparable to a densely populated uniform linear array of MN microphones. In this work beampatterns are simulated for a range of single frequencies, as well as bands of frequencies. Narrowband experimental beampatterns are shown to correspond with simulated results even at frequencies other than the arrays design frequency. Narrowband side lobe locations are shown to correspond to the theoretical values. Side lobes in the directional pattern are mitigated by increasing bandwidth of analyzed signals. Direction of arrival estimation is also implemented for two simultaneous noise sources in a free field condition. PMID:26233043

  6. Automatic estimation of position and orientation of an acoustic source by a microphone array network.

    Science.gov (United States)

    Nakano, Alberto Yoshihiro; Nakagawa, Seiichi; Yamamoto, Kazumasa

    2009-12-01

    A method which automatically provides the position and orientation of a directional acoustic source in an enclosed environment is proposed. In this method, different combinations of the estimated parameters from the received signals and the microphone positions of each array are used as inputs to the artificial neural network (ANN). The estimated parameters are composed of time delay estimates (TDEs), source position estimates, distance estimates, and energy features. The outputs of the ANN are the source orientation (one out of four possible orientations shifted by 90 degrees and either the best array which is defined as the nearest to the source) or the source position in two dimensional/three dimensional (2D/3D) space. This paper studies the position and orientation estimation performances of the ANN for different input/output combinations (and different numbers of hidden units). The best combination of parameters (TDEs and microphone positions) yields 21.8% reduction in the average position error compared to the following baselines and a correct orientation ratio greater than 99%. Position localization baselines consist of a time delay of arrival based method with an average position error of 34.1 cm and the steered response power with phase transform method with an average position error of 29.8 cm in 3D space. PMID:20000922

  7. Using hearing aid adaptive directional microphones to enhance cochlear implant performance.

    Science.gov (United States)

    Chung, King; Zeng, Fan-Gang

    2009-04-01

    The goal of this study was to investigate whether adaptive microphone directionality could enhance cochlear implant performance. Speech stimuli were created by fitting a digital hearing aid with programmable omnidirectional (OM), fixed directional (FDM), or adaptive directional (ADM) microphones to KEMAR, and recording the hearing aid output in three noise conditions. The first condition simulated a diffused field with noise sources from five stationary locations, whereas the second and third condition represented one or three non-stationary locations in the back hemifield of KEMAR. Speech was always presented to 0 degrees azimuth and the overall signal-to-noise ratio (SNR) was +5 dB in the sound field. Eighteen postlingually deafened cochlear implant users listened to the recorded test materials via the direct audio input of their speech processors. Their speech recognition ability and overall sound quality preferences were assessed and the correlation between the amount of noise reduction and the improvement in speech recognition were calculated. The results indicated that ADM yielded significantly better speech recognition scores and overall sound quality preference than FDM and OM in all three noise conditions and the improvement in speech recognition scores was highly correlated with the amount of noise reduction. Factors influencing the noise level are discussed. PMID:19450437

  8. Two-Microphone Noise Reduction Using Spatial Information-Based Spectral Amplitude Estimation

    Science.gov (United States)

    Li, Kai; Guo, Yanmeng; Fu, Qiang; Li, Junfeng; Yan, Yonghong

    Traditional two-microphone noise reduction algorithms to deal with highly nonstationary directional noises generally use the direction of arrival or phase difference information. The performance of these algorithms deteriorate when diffuse noises coexist with nonstationary directional noises in realistic adverse environments. In this paper, we present a two-channel noise reduction algorithm using a spatial information-based speech estimator and a spatial-information-controlled soft-decision noise estimator to improve the noise reduction performance in realistic non-stationary noisy environments. A target presence probability estimator based on Bayes rules using both phase difference and magnitude squared coherence is proposed for soft-decision of noise estimation, so that they can share complementary advantages when both directional noises and diffuse noises are present. Performances of the proposed two-microphone noise reduction algorithm are evaluated by noise reduction, log-spectral distance (LSD) and word recognition rate (WRR) of a distant-talking ASR system in a real room's noisy environment. Experimental results show that the proposed algorithm achieves better noises suppression without further distorting the desired signal components over the comparative dual-channel noise reduction algorithms.

  9. Acoustic analysis by spherical microphone array processing of room impulse responses.

    Science.gov (United States)

    Khaykin, Dima; Rafaely, Boaz

    2012-07-01

    Spherical microphone arrays have been recently used for room acoustics analysis, to detect the direction-of-arrival of early room reflections, and compute directional room impulse responses and other spatial room acoustics parameters. Previous works presented methods for room acoustics analysis using spherical arrays that are based on beamforming, e.g., delay-and-sum, regular beamforming, and Dolph-Chebyshev beamforming. Although beamforming methods provide useful directional selectivity, optimal array processing methods can provide enhanced performance. However, these algorithms require an array cross-spectrum matrix with a full rank, while array data based on room impulse responses may not satisfy this condition due to the single frame data. This paper presents a smoothing technique for the cross-spectrum matrix in the frequency domain, designed for spherical microphone arrays, that can solve the problem of low rank when using room impulse response data, therefore facilitating the use of optimal array processing methods. Frequency smoothing is shown to be performed effectively using spherical arrays, due to the decoupling of frequency and angular components in the spherical harmonics domain. Experimental study with data measured in a real auditorium illustrates the performance of optimal array processing methods such as MUSIC and MVDR compared to beamforming. PMID:22779475

  10. Noise Reduction in Dual-Microphone Mobile Phones Using a Bank of Pre-Measured Target-Cancellation Filters

    Czech Academy of Sciences Publication Activity Database

    Koldovský, Zbyněk; Tichavský, Petr; Botka, D.

    Vancouver: IEEE, 2013, s. 679-683. ISBN 978-1-4799-0355-9. [IEEE International Conference on Acoustics, Speech, and Signal Processing ICASSP 2013. Vancouver (CA), 27.05.2013-31.05.2013] R&D Projects: GA ČR(CZ) GAP103/12/1794 Institutional support: RVO:67985556 Keywords : speech enhancement * noise reduction * dual microphone Subject RIV: BI - Acoustics http://library.utia.cas.cz/separaty/2013/SI/tichavsky-noise reduction in dual-microphone mobile phones using a bank of pre-measured target-cancellation filter s.pdf

  11. DFT-domain based single-microphone noise reduction for speech enhancement a survey of the state of the art

    CERN Document Server

    Hendriks, Richard C; Jensen, Jesper

    2013-01-01

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement.The field of single-microphone noise reducti

  12. Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices

    International Nuclear Information System (INIS)

    The time-dependent evolution of an abrasive jet micro-machined surface is described by a partial differential equation which is difficult to solve using traditional analytical or numerical techniques. As a result, traditional surface advancement models can give incorrect predicted profile depths. In this work, level set methods were used to develop novel models of the abrasive jet machined surface evolution of unmasked and masked channels and holes in glass and polymethylmethacrylate. The level set-predicted eroded profiles were compared to those experimentally obtained, as well as to those predicted by existing analytical and computer models. For the majority of cases, the level set-predicted surface advancement was closer to the measured profiles than those predicted by existing analytical and computer models. The work demonstrates the potential of the level set methodology as a generally applicable tool for the prediction of abrasive jet machined surface profiles, and provides a foundation for future simulation of more complex abrasive jet micro-machining operations.

  13. Periodic surface pattern fabrication via biprism interference micro-machining

    Science.gov (United States)

    Saxena, Ishan; Liu, Jintao; Ehmann, Kornel; Cao, Jian

    2015-12-01

    A novel surface micro-texturing process is proposed that is capable of generating extremely scalable periodic patterns on a workpiece surface. The process, henceforth named as ‘biprism interference micro-machining’ utilizes a two-beam interference pattern generated by a Fresnel biprism placed coaxially in the path of a laser pulse to fabricate periodic micro-channels on aluminum surfaces. The channels were fabricated over an area of approximately 8 mm × 6 mm and with a periodicity of 9 and 21 μm, by using custom-built two-faceted biprisms with side angles of 4° and 1.5°, respectively. A beam propagation simulation was carried out to predict the intensity distribution and contrast of the intensity pattern of laser pulse at the workpiece surface. The entire process takes 1-8 laser pulses, thereby demonstrating ultra-fast speed and scalability. Also, the efficiency, precision and resolution of the process are higher than that of conventional mask-based and interference-based micro-machining.

  14. 1 THz Micromachined Waveguide Band-Pass Filter

    Science.gov (United States)

    Liu, Shuang; Hu, Jiang; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan

    2016-05-01

    This paper presents a waveguide band-pass filter operating at the 0.75 ˜ 1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE301/TE102 dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.

  15. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer.

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-12-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  16. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  17. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  18. Finite element analysis of underwater capacitor micromachined ultrasonic transducers.

    Science.gov (United States)

    Roh, Yongrae; Khuri-Yakub, Butrus T

    2002-03-01

    A simple electro-mechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). Most often, cMUTs are made in silicon and glass plates that are in the 0.5 mm to 1 mm range in thickness. The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict cross-talk between elements of an array of transducers. To overcome these deficiencies, a flnite element model of the cMUT is constructed using the commercial code ANSYS. Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Cross-talk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the cross-talk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements. PMID:12322877

  19. Micromachined force sensors using thin film nickel–chromium piezoresistors

    International Nuclear Information System (INIS)

    Micromachined force/tactile sensors using nickel–chromium piezoresistors have been investigated experimentally and through finite-element analysis. The force sensors were designed with a suspended aluminum oxide (Al2O3) membrane and optimally placed piezoresistors to measure the strain in the membrane when deflected with an applied force. Different devices, each with varying size and shape of both the membrane and the piezoresistors, were designed, fabricated and characterized. The piezoresistors were placed into a half-Wheatstone bridge configuration with two active and two passive nickel–chromium resistors to provide temperature drift compensation. The force sensors were characterized using a load cell and a nanopositioner to measure the sensor response with applied load. Piezoresistive gauge factors in the range of 1–5.2 have been calculated for the thin film nichrome (NiCr 80/20 wt%) from the measured results. The force sensors were calculated to have a noise equivalent force of 65–245 nN. (paper)

  20. Micromachined magnetometer-accelerometer for a navigation system

    Science.gov (United States)

    Cho, Ji-Man; Kim, Kyung S.; An, Seungdo; Park, HoJoon; Hahm, Ghun

    2002-11-01

    A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external magnetic field on a suspended conducting beam. To realize a new resonant micro sensor detecting both acceleration and the geomagnetic field simultaneously, a conducting line is formed on a spring part of a silicon accelerometer having two mass plates. And a new Samsung MEMS fabrication process is developed for this sensor. The process uses a silicon-on-glass (SOG) wafer, an inverted SOG wafer, and a gold-silicon eutectic bonding for the wafer-level hermetic packaging. To operate the sensor, an ac current of its mechanical resonant frequency is driven through the conducting line. Totally 1 mW is consumed in the current driving element. This newly developed sensor is enough for the 10 degree electronic display of the orientation angle and can be used in a portable navigator such as SmartPhones and PDAs that need a small, low cost and low power electronic compass.

  1. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    International Nuclear Information System (INIS)

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  2. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  3. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  4. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  5. Adaptable acylindrical microlenses fabricated by femtosecond laser micromachining

    Science.gov (United States)

    Paiè, Petra; Bragheri, Francesca; Claude, Theo; Osellame, Roberto

    2015-03-01

    Microfluidic lenses are a powerful tool for many lab on a chip applications ranging from sensing to detection and also to imaging purpose, with the great advantage to increase the degree of integration and compactness of these micro devices. In this work we present the realization of such a compact microfluidic lens with reconfigurable optical properties. The technique used to realize the device we present is femtosecond laser micromachining followed by chemical etching, which allows to easily fabricate 3D microfluidic devices with an arbitrary shape. Thanks to that it has been possible to easily fabricate different lens made up by cylindrical microchannel in fused silica glasses filled with liquids with a proper refractive index. The optical properties of these devices are tested and shown to be in a good agreement with the theoretical model previously implemented. Furthermore we have also optimized the design of these microlenses in order to reduce the effects of spherical aberrations in the focal region, thus allowing us to obtain a set of different acylindrical microfluidic lenses, whose validation is also reported. In this work the lens adaptability can be achieved by replacing the liquid inside the microchannel, so that we can easily tune the feature of the focused beam. Thus increasing the possible range of applications of these micro optical elements, as an example we report on the validation of the device as a fast integrated optofluidic shutter.

  6. Laser micromachining as a metallization tool for microfluidic polymer stacks

    International Nuclear Information System (INIS)

    A novel assembly approach for the integration of metal structures into polymeric microfluidic systems is described. The presented production process is completely based on a single solid-state laser source, which is used to incorporate metal foils into a polymeric multi-layer stack by laser bonding and ablation processes. Chemical reagents or glues are not required. The polymer stack contains a flexible membrane which can be used for realizing microfluidic valves and pumps. The metal-to-polymer bond was investigated for different metal foils and plasma treatments, yielding a maximum peel strength of Rps = 1.33 N mm−1. A minimum structure size of 10 µm was determined by 3D microscopy of the laser cut line. As an example application, two different metal foils were used in combination to micromachine a standardized type-T thermocouple on a polymer substrate. An additional laser process was developed which allows metal-to-metal welding in close vicinity to the polymer substrate. With this process step, the reliability of the electrical contact could be increased to survive at least 400 PCR temperature cycles at very low contact resistances. (paper)

  7. Micromachining of Soft Polymer Material applying Cryogenic Cooling

    Science.gov (United States)

    Kakinuma, Yasuhiro; Yasuda, Nobuhito; Aoyama, Tojiro

    Polydimethylsiloxane (PDMS) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, micromachining has not yet been applied to soft polymer materials. It is difficult to machine elastic materials such as PDMS because of their low toughness. In order to machine a micro grooves on soft polymer materials, the cutting process applying cryogenic cooling is proposed because the elastic properties of soft polymer materials remarkably change from rubbery state to glassy state below the glass transition temperature. In this study, the freezing milling method using liquid nitrogen is applied to the micro grooving of PDMS. The result of a cutting test shows that micro grooves can be shaped easily and machined accurately in PDMS by the proposed method.

  8. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  9. Micromachining on copper and nickel by electrochemical wet stamping

    International Nuclear Information System (INIS)

    The fabrication of microstructures on copper and nickel has been achieved by an approach named electrochemical wet stamping (E-WETS). The E-WETS process allows the direct imprinting of microscopic reliefs on an agarose stamp into nickel and copper through a selective anodic dissolution process. The pre-patterned agarose with a high gel strength that has been soaked in a desired etching solution is employed as a stamp. It can direct and supply the solution preferentially on the contact area owing to the constant supply of electrolyte from the agarose stamp to the interface and then the electrochemical reaction is limited only to the contact area. Simultaneously, the product can be removed from the gel/substrate interface. On the basis of the electrochemical behavior of the copper electrode in contact with the agarose full of 0.1 M HClO4, the potential for the electrochemical micromachining was chosen to be a relatively low value, 0.4 V versus SCE, to prevent the generation of cuprous oxide. A voltage pulse was applied to the electrochemical machining of nickel. The pulse amplitude was set to 8 V versus SCE to take the electrode into the transpassivation region rather than the passivation region in the pulse duration. Furthermore, the different electrochemical mechanisms involved in the etching process have been discussed in detail

  10. [Micromachining of Au film by femtosecond pulse laser].

    Science.gov (United States)

    Yuan, Dong-qing; Zhou, Ming; Cai, Lan; Shen, Jian

    2009-05-01

    Femtosecond laser micromachining of film is an emerging technology for fabrication of MEMS devices. A Ti: sapphire laser (130 fs, 1000 Hz)was used to irradiate the thin film with variations in process parameters such as pulse energy. The film thickness is about 4 microm which was measured by AFM. When we used single pulse to excite the film, the ablation diameter increased along with the energy ascending; when the energy of single pulse was invariable, the diameter had little change when altering the number of pulses. The single pulse threshold fluence of Au film was Fth = 0.7 J x cm(-2) at this ultrashort pulse-length in air. By changing the energy of excitation pulse it was found that when the energy was lower than the threshold, the line on the film was heaved; when the energy was higher than the threshold, the line was concave, which was detected by AFM. It was also found that the width of line decreased along with the increase in process speed when the pulse energy remained unchanged; the width of line increased along with the pulse energy ascending when the process speed was fixed. PMID:19650455

  11. Design and fabrication of nanofluidic devices by surface micromachining.

    Science.gov (United States)

    Han, Anpan; de Rooij, Nicolaas F; Staufer, Urs

    2006-05-28

    Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10 nm deep, 200 nm wide and up to 8 cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with variations of the fabrication procedure, could be used to make channels both on silicon and glass substrates. Critical channel design parameters were also examined. With the channels as the basis, we integrated equivalent elements which are found on micro total analysis (μTAS) chips for electrokinetic separations. On-chip platinum electrodes enabled electrokinetic liquid actuation. Micro-moulded polydimethylsiloxane (PDMS) structures bonded to the devices served as liquid reservoirs for buffers and sample. Ionic conductance measurements showed Ohmic behaviour at ion concentrations above 10 mM, and surface charge governed ion transport below 5 mM. Low device to device conductance variation (1%) indicated excellent channel uniformity on the wafer level. As proof of concept, we demonstrated electrokinetic injections using an injection cross with volume below 50 attolitres (10(-18) l). PMID:21727495

  12. Laser micromachining of oxygen reduced graphene-oxide films

    Science.gov (United States)

    Sinar, Dogan; Knopf, George K.; Nikumb, Suwas; Andrushchenko, Anatoly

    2014-03-01

    Non-conductive graphene-oxide (GO) inks can be synthesized from inexpensive graphite powders and deposited on functionalized flexible substrates using inkjet printing technology. Once deposited, the electrical conductivity of the GO film can be restored through laser assisted thermal reduction. Unfortunately, the inkjet nozzle diameter (~40μm) places a limit on the printed feature size. In contrast, a tightly focused femtosecond pulsed laser can create precise micro features with dimensions in the order of 2 to 3 μm. The smallest feature size produced by laser microfabrication is a function of the laser beam diameter, power level, feed rate, material characteristics and spatial resolution of the micropositioning system. Laser micromachining can also remove excess GO film material adjacent to the electrode traces and passive electronic components. Excess material removal is essential for creating stable oxygen-reduced graphene-oxide (rGO) printed circuits because electron buildup along the feature edges will alter the conductivity of the non-functional film. A study on the impact of laser ablation on the GO film and the substrate are performed using a 775nm, 120fs pulsed laser. The average laser power was 25mW at a spot size of ~ 5μm, and the feed rate was 1000-1500mm/min. Several simple microtraces were fabricated and characterized in terms of electrical resistance and surface topology.

  13. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    International Nuclear Information System (INIS)

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 μm in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution

  14. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Energy Technology Data Exchange (ETDEWEB)

    Alemohammad, H; Toyserkani, E [Department of Mechanical and Mechatronics Engineering, University of Waterloo, ON N2L 3G1 (Canada); Pinkerton, A J [School of Mechanical, Aerospace and Civil Engineering, University of Manchester, PO Box 88, Manchester, M60 1QD (United Kingdom)], E-mail: etoyserk@uwaterloo.ca, E-mail: shalemoh@uwaterloo.ca, E-mail: andrew.pinkerton@manchester.ac.uk

    2008-09-21

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 {mu}m in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  15. A micromachined silicon parallel acoustic delay line (PADL) array for real-time photoacoustic tomography (PAT)

    Science.gov (United States)

    Cho, Young Y.; Chang, Cheng-Chung; Wang, Lihong V.; Zou, Jun

    2015-03-01

    To achieve real-time photoacoustic tomography (PAT), massive transducer arrays and data acquisition (DAQ) electronics are needed to receive the PA signals simultaneously, which results in complex and high-cost ultrasound receiver systems. To address this issue, we have developed a new PA data acquisition approach using acoustic time delay. Optical fibers were used as parallel acoustic delay lines (PADLs) to create different time delays in multiple channels of PA signals. This makes the PA signals reach a single-element transducer at different times. As a result, they can be properly received by single-channel DAQ electronics. However, due to their small diameter and fragility, using optical fiber as acoustic delay lines poses a number of challenges in the design, construction and packaging of the PADLs, thereby limiting their performances and use in real imaging applications. In this paper, we report the development of new silicon PADLs, which are directly made from silicon wafers using advanced micromachining technologies. The silicon PADLs have very low acoustic attenuation and distortion. A linear array of 16 silicon PADLs were assembled into a handheld package with one common input port and one common output port. To demonstrate its real-time PAT capability, the silicon PADL array (with its output port interfaced with a single-element transducer) was used to receive 16 channels of PA signals simultaneously from a tissue-mimicking optical phantom sample. The reconstructed PA image matches well with the imaging target. Therefore, the silicon PADL array can provide a 16× reduction in the ultrasound DAQ channels for real-time PAT.

  16. Practically Efficient Blind Speech Separation Using Frequency Band Selection Based on Magnitude Squared Coherence and a Small Dodecahedral Microphone Array

    Directory of Open Access Journals (Sweden)

    Kazunobu Kondo

    2012-01-01

    Full Text Available Small agglomerative microphone array systems have been proposed for use with speech communication and recognition systems. Blind source separation methods based on frequency domain independent component analysis have shown significant separation performance, and the microphone arrays are small enough to make them portable. However, the level of computational complexity involved is very high because the conventional signal collection and processing method uses 60 microphones. In this paper, we propose a band selection method based on magnitude squared coherence. Frequency bands are selected based on the spatial and geometric characteristics of the microphone array device which is strongly related to the dodecahedral shape, and the selected bands are nonuniformly spaced. The estimated reduction in the computational complexity is 90% with a 68% reduction in the number of frequency bands. Separation performance achieved during our experimental evaluation was 7.45 (dB (signal-to-noise ratio and 2.30 (dB (cepstral distortion. These results show improvement in performance compared to the use of uniformly spaced frequency band.

  17. Effects of a near-field rigid sphere scatterer on the performance of linear microphone array beamformers.

    Science.gov (United States)

    Hu, Yuxiang; Zhou, Haoran; Lu, Jing; Qiu, Xiaojun

    2016-08-01

    Beamformers enable a microphone array to capture acoustic signals from a sound source with high signal to noise ratio in a noisy environment, and the linear microphone array is of particular importance, in practice, due to its simplicity and easy implementation. A linear microphone array sometimes is used near some scattering objects, which affect its beamforming performance. This paper develops a numerical model with a linear microphone array near a rigid sphere for both far-field plane wave and near-field sources. The effects of the scatterer on two typical beamformers, i.e., the delay-and-sum beamformer and the superdirective beamformer, are investigated by both simulations and experiments. It is found that the directivity factor of both beamformers improves due to the increased equivalent array aperture when the size of the array is no larger than that of the scatter. With the increase of the array size, the directivity factor tends to deteriorate at high frequencies because of the rising side-lobes. When the array size is significantly larger than that of the scatterer, the scattering has hardly any influence on the beamforming performance. PMID:27586725

  18. Leak detection in the primary reactor coolant piping of nuclear power plant by applying beam-microphone technology

    International Nuclear Information System (INIS)

    A microphone leak detection method was applied to the inlet piping of the ATR-prototype reactor, Fugen. Statistical analysis results showed that the cross-correlation method provided the effective results for detection of a small leakage. However, such a technique has limited application due to significant distortion of the signals on the reactor site. As one of the alternative methods, the beam-microphone provides necessary spatial selectivity and its performance is less affected by signal distortion. A prototype of the beam-microphone was developed and then tested at the O-arai Engineering Center of the Japan Nuclear Cycle Development Institute (JNC). On-site testing of the beam-microphone was carried out in the inlet piping room of an RBMK reactor of the Leningrad Nuclear Power Plant (LNPP) in Russia. A leak sound imitator was used to simulate the leakage sound under the leakage flow condition of 1-3 gpm (0.23-0.7 m3/h). Analysis showed that signal distortion does not seriously affect the performance of this method, and that sound reflection may result in the appearance of ghost sound sources. The test results showed that the influences of sound reflection and background noise were smaller at the high frequencies where the leakage location could be estimated with an angular accuracy of 5deg which is the range of localization accuracy required for the leak detection system. (author)

  19. Motherboards, Microphones and Metaphors: Re-Examining New Literacies and Black Feminist Thought through Technologies of Self

    Science.gov (United States)

    Ellison, Tisha Lewis; Kirkland, David E.

    2014-01-01

    This article examines how two African American females composed counter-selves using a computer motherboard and a stand-alone microphone as critical identity texts. Situated within sociocultural and critical traditions in new literacy studies and black feminist thought, the authors extend conceptions of language, literacy and black femininity via…

  20. A laboratory study on a capacitive displacement sensor as an implant microphone in totally implant cochlear hearing aid systems.

    Science.gov (United States)

    Huang, Ping; Guo, Jun; Megerian, Cliff A; Young, Darrin J; Ko, Wen H

    2007-01-01

    A totally implant cochlear hearing aids system, integrating an implant microphone, interface electronics, a speech processor, a stimulator, and cochlear electrodes, can overcome the uncomfortable, inconvenient, and stigma problems associated with the conventional and semi-implantable hearing aids. This paper presents a laboratory feasibility study on the use of an electret condenser microphone (ECM) displacement sensor, serving as an implant microphone, and combined with a spring coupler to directly sense the umbo acoustic vibration. The umbo vibration characteristics were extracted from literature to determine the coupler and sensor requirements. A laboratory model was built to simulate the vibration source and experimentally study the transmission coefficient. Experimental data demonstrate that by using a 5 N/m stiffness spring, the umbo vibration amplitude as high as 67% can be transmitted to the sensor. Measurement of the sensor system on the temporal bone was also made. The minimum detectable sound pressure level (SPL) at 1 kHz is 41 and 67 dB for laboratory and 38 and 64 dB for temporal bone measurement for 1 and 388 Hz bandwidth, respectively. Better performance was achieved in a higher frequency. Results and analysis of this study can be used as a guideline for the future design of displacement sensors as implant microphones. PMID:18003304

  1. Spatial Analysis and Synthesis of Car Audio System and Car Cabin Acoustics with a Compact Microphone Array

    DEFF Research Database (Denmark)

    Sakari, Tervo; Pätynen, Jukka; Kaplanis, Neofytos; Lydolf, Morten; Bech, Søren; Lokki, Tapio

    2015-01-01

    dummy head measurements. In combination with a compact microphone array, the approach is based on the recently introduced parametric spatial sound analysis method, called the Spatial Decomposition Method (SDM). An objective analysis of the sound field with respect to direction and energy enables the...

  2. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  3. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  4. Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film

    International Nuclear Information System (INIS)

    In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O3 (PZT). In a micromachined energy harvester, a 2 µm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g−2 mm−3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s−2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters. (paper)

  5. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

    Directory of Open Access Journals (Sweden)

    Simas Butkus

    2015-12-01

    Full Text Available Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.

  6. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  7. Nonlinear photoacoustic response of opaque media in gas microphone signal detection

    Science.gov (United States)

    Madvaliev, U.; Salikhov, T. Kh.; Sharifov, D. M.; Khan, N. A.

    2006-03-01

    We have theoretically studied the effect of thermal nonlinearity, due to the temperature dependence of the thermophysical and optical parameters for thermally thick opaque media, on the characteristics of the fundamental photoacoustic signal when the signal is detected by a gas microphone. We have shown that the dependence of the amplitude of the nonlinear component of the signal on the intensity of the incident radiation I0 is expressed by means of the dependence of the temperature rise for the irradiated sample surface Θ0 on I0, and the thermal nonlinearity does not affect the phase of the photoacoustic signal. We propose a theory for generation of the second harmonic of the photoacoustic signal. We have established that the phase shift of the photoacoustic signal is equal to 3π/4, while its amplitude depends on the frequency (˜ω-3/2) and the intensity (˜ I{0/2}).

  8. Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

    DEFF Research Database (Denmark)

    Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain;

    2011-01-01

    We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM......) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity......) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them...

  9. Compressive sensing based spinning mode detections by in-duct microphone arrays

    Science.gov (United States)

    Yu, Wenjun; Huang, Xun

    2016-05-01

    This paper presents a compressive sensing based experimental method for detecting spinning modes of sound waves propagating inside a cylindrical duct system. This method requires fewer dynamic pressure sensors than the number required by the Shannon–Nyquist sampling theorem so long as the incident waves are sparse in spinning modes. In this work, the proposed new method is firstly validated by preparing some of the numerical simulations with representative set-ups. Then, a duct acoustic testing rig with a spinning mode synthesiser and an in-duct microphone array is built to experimentally demonstrate the new approach. Both the numerical simulations and the experiment results are satisfactory, even when the practical issue of the background noise pollution is taken into account. The approach is beneficial for sensory array tests of silent aeroengines in particular and some other engineering systems with duct acoustics in general.

  10. Directional microphone arrays: Reducing wind noise without killing your signal or filling up your disk

    Science.gov (United States)

    Zumberge, M. A.; Walker, K. T.; Dewolf, S.; Hedlin, M. A.; Shearer, P. M.; Berger, J.

    2008-12-01

    The bane of infrasound signal detection is the noise generated by the wind. While the physics of the noise is still a subject of investigation, it is clear that sampling pressure at many points over a length scale larger than the spatial coherence length of wind turbulence attenuates the noise. A dense array of microphones can exploit this approach, but this presents different challenges. Two mechanical wind filters using this approach are commonly employed by the nuclear monitoring community (rosette pipe and porous-hoses networks) and attach to a central microphone. To get large wind noise reduction and a low signal detection threshold in the frequency band of interest, these filters require large apertures. However, these wind filters with such large apertures have a poor omnidirectional instrument response for typical infrasound signals because the pressure signal propagates at the speed of sound through the pipes/hoses to the central microphone. A simple, but improved averaging approach would be to instantaneously sample a long length of the infrasound signal wavefront. Optical fiber infrasound sensors (OFIS) are an implementation of this idea. These sensors are compliant sealed tubes wrapped with two optical fibers that integrate pressure change instantaneously along the length of the tube with laser interferometery. Infrasound arrays typically consist of several microbarometers with wind filters separated by distances that provide predictable signal time separations, forming the basis for processing techniques that estimate the phase velocity direction. An analogous approach is to form an array of OFIS arms. The OFIS instrument response is a predictable function of the orientation of the arm with respect to the signal wavefront. An array of many OFIS arms with different azimuths permits at least one OFIS to record any signal without the signal attenuation inherent in equivalently-sized onmi-directional mechanical filters. OFIS arms that are wavefront

  11. A Novel Vibration Mode Testing Method for Cylindrical Resonators Based on Microphones

    Directory of Open Access Journals (Sweden)

    Yongmeng Zhang

    2015-01-01

    Full Text Available Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes.

  12. Room acoustics investigations of beamforming performance using coprime linear microphone arrays

    Science.gov (United States)

    Bush, Dane

    Linear microphone arrays are powerful tools for determining the direction of a sound source. Traditionally, uniform linear arrays (ULA) have inter-element spacing of half of the wavelength in question. This produces the narrowest possible beam without introducing grating lobes -- a form of aliasing governed by the spatial Nyquist theorem. Grating lobes are often undesirable because they make direction of arrival indistinguishable among their passband angles. Exploiting coprime number theory however, an array can be arranged sparsely with fewer total elements, exceeding the aforementioned spatial sampling limit separation. Two sparse ULA sub-arrays with coprime number of elements, when nested properly, each produce narrow grating lobes that overlap with one another exactly in just one direction. By combining the sub-array outputs it is possible to retain the shared beam while mostly canceling the other superfluous grating lobes. In this work beam patterns are simulated for a range of single frequencies, as well as for arbitrary bands of frequencies. Three coprime microphone arrays are built with different lengths and sub-array spacings. Two different techniques are explored for sub-array data processing and combination. Experimental beam patterns are shown to correspond with simulated results even at frequencies other than the array's design frequency. Beam width and side lobe locations are shown to correspond to the derived values. Side lobes in the directional pattern are mitigated by increasing bandwidth of analyzed signals. Accurate single-source direction of arrival (DOA) estimation is shown to be possible in free field and reverberant conditions. DOA estimation is also implemented for two simultaneous noise sources in the free field condition. Room reflections can be resolved in the reverberant condition, provided adequate reduction of side lobes.

  13. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  14. Sample preparation by focused ion beam micromachining for transmission electron microscopy imaging in front-view.

    Science.gov (United States)

    Jublot, Michael; Texier, Michael

    2014-01-01

    This article deals with the development of an original sample preparation method for transmission electron microscopy (TEM) using focused ion beam (FIB) micromachining. The described method rests on the use of a removable protective shield to prevent the damaging of the sample surface during the FIB lamellae micromachining. It enables the production of thin TEM specimens that are suitable for plan view TEM imaging and analysis of the sample surface, without the deposition of a capping layer. This method is applied to an indented silicon carbide sample for which TEM analyses are presented to illustrate the potentiality of this sample preparation method. PMID:24200984

  15. Note: femtosecond laser micromachining of straight and linearly tapered capillary discharge waveguides.

    Science.gov (United States)

    Wiggins, S M; Reijnders, M P; Abuazoum, S; Hart, K; Welsh, G H; Issac, R C; Jones, D R; Jaroszynski, D A

    2011-09-01

    Gas-filled capillary discharge waveguides are important structures in laser-plasma interaction applications, such as the laser wakefield accelerator. We present the methodology for applying femtosecond laser micromachining in the production of capillary channels (typically 200-300 μm in diameter and 30-40 mm in length), including the formalism for capillaries with a linearly tapered diameter. The latter is demonstrated to possess a smooth variation in diameter along the length of the capillary (tunable with the micromachining trajectories). This would lead to a longitudinal plasma density gradient in the waveguide that may dramatically improve the laser-plasma interaction efficiency in applications. PMID:21974631

  16. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Complete text of publication follows. Proton Beam Micromachining (PBM, also known as P-beam writing), a novel direct- write process for the production of 3D microstructures, can be used to make multilevel structures in a single layer of resist by varying the ion energy. The interaction between the bombarding ions and the target material is mainly ionization, and very few ions suffer high angle nuclear collisions, therefore structures made with PBM have smooth near vertical side walls. The most commony applied resists in PBM are the positive, conventional, polymethyl methacrylate (PMMA); and the negative, chemically amplified, SU-8 (Micro Chem Corp). SU-8 is an epoxy based resist suitable also for LIGA and UV-LIGA processes, it offers good sensitivity, good process latitude, very high aspect ratio and therefore it dominates in the high aspect ratio micromachining applications. SU-8 requires 30 nC/mm2 fluence for PBM irradiations at 2 MeV protons. Its crosslinking chemistry is based on the eight epoxy rings in the polymer chain, which provide a very dense three dimensional network in the presence of suitably activated photo acid generators (PAGs) which is very difficult to be stripped away after development. Thus, stripping has to be assisted with plasma processes or with special liquid removers. Moreover, the SU-8 developer is organic, propylene glycol methyl ether acetate (PGMEA), and thus environmentally non-friendly. To overcome the SU-8 stripping limitations, design of a negative resist system where solubility change is not based solely on cross- linking but also on the differentiation of hydrophilicity between exposed and non-exposed areas is desirable. A new resist formulation, fulfilling the above specifications has been developed recently [1]. This formulation is based on a specific grade epoxy novolac (EP) polymer, a partially hydrogenated poly-4-hydroxy styrene (PHS) polymer, and an onium salt as photoacid generator (PAG), and has been successfully applied

  17. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  18. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  19. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.

  20. Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

    International Nuclear Information System (INIS)

    Piezoelectric polymers have been known to exist for more than 40 years, but in recent years they have been recognized as smart materials for the fabrication of microsensors, microactuators and other micro-electro-mechanical systems (MEMS). In this work, femtosecond laser micromachining of a polyvinylidene fluoride (PVDF) film, coated with NiCu on both sides, has been studied to understand selective patterning mechanisms of NiCu layers and ablation characteristics of PVDF films. A detailed characterization of morphological changes of the laser-irradiated areas has been investigated using scanning electron microscopy. Through morphological analysis, the multiple shot damage thresholds of a 28 µm thick PVDF film and 40 nm thick NiCu layer have been determined. Surface morphology examination indicates that NiCu layers are removed from the PVDF film through a sequence of cracking–peeling off-curling. In addition, the NiCu layer on the rear side was also removed by the partially transmitted laser energy. The PVDF film was removed in forms of bundles of filaments and solid fragments by a combination of pure ablation and explosive removal of material by bursting of bubbles; the role of the explosive removal becomes more dominant with the increase of laser fluence. Optimal process conditions for cutting of the PVDF film and patterning of the NiCu coating without damaging the PVDF polymer have been established and applied to fabricate a vibration microsensor prototype that shows significant potential in using PVDF-based functional microdevices for telecommunications, transportation and biomedical applications

  1. Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

    Science.gov (United States)

    Lee, Seongkuk; Bordatchev, Evgueni V.; Zeman, Marco J. F.

    2008-04-01

    Piezoelectric polymers have been known to exist for more than 40 years, but in recent years they have been recognized as smart materials for the fabrication of microsensors, microactuators and other micro-electro-mechanical systems (MEMS). In this work, femtosecond laser micromachining of a polyvinylidene fluoride (PVDF) film, coated with NiCu on both sides, has been studied to understand selective patterning mechanisms of NiCu layers and ablation characteristics of PVDF films. A detailed characterization of morphological changes of the laser-irradiated areas has been investigated using scanning electron microscopy. Through morphological analysis, the multiple shot damage thresholds of a 28 µm thick PVDF film and 40 nm thick NiCu layer have been determined. Surface morphology examination indicates that NiCu layers are removed from the PVDF film through a sequence of cracking-peeling off-curling. In addition, the NiCu layer on the rear side was also removed by the partially transmitted laser energy. The PVDF film was removed in forms of bundles of filaments and solid fragments by a combination of pure ablation and explosive removal of material by bursting of bubbles; the role of the explosive removal becomes more dominant with the increase of laser fluence. Optimal process conditions for cutting of the PVDF film and patterning of the NiCu coating without damaging the PVDF polymer have been established and applied to fabricate a vibration microsensor prototype that shows significant potential in using PVDF-based functional microdevices for telecommunications, transportation and biomedical applications.

  2. Proton beam micromachined resolution standards for nuclear microprobes

    International Nuclear Information System (INIS)

    The quest for smaller spot sizes has long been the goal of many nuclear microprobe groups worldwide, and consequently there is a need for good quality resolution standards. Such standards have to be consistent with the accurate measurement of state-of-the-art nuclear microbeam spot sizes, i.e. 400 nm for high current applications such as Rutherford backscattering spectrometry and proton-induced X-ray emission, and 100 nm for low current applications such as scanning transmission ion microscopy or ion beam-induced charge. The criteria for constructing a good quality nuclear microprobe resolution standard is therefore demanding: the standard has to be three dimensional with a smooth surface, have an edge definition better than the state-of-the-art beam spot resolutions, and exhibit vertical side walls. Proton beam micromachining (PBM) is a new technique of high potential for the manufacture of precise 3D microstructures. Recent developments have shown that metallic microstructures (nickel and copper) can be formed from these microshapes. Prototype nickel PBM resolution standards have been manufactured at the Research Centre for Nuclear Microscopy, NUS and these new standards are far superior to the 2000 mesh gold grids currently in use by many groups in terms of surface smoothness, vertical walls and edge definition. Results of beam resolution tests using the new PBM standards with the OM2000 microprobe end station/HVEE Singletron system have yielded spot sizes of 290 nmx450 nm for a 50 pA beam of 2 MeV protons

  3. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  4. Micromachining electrical grade steel using pulsed Nd-YAG lasers

    Directory of Open Access Journals (Sweden)

    M.J. Jackson

    2007-01-01

    Full Text Available Purpose: Multi-wavelength capability allows diode pumped, solid state (D.P.S.S. lasers to perform operationssuch as micro machining in a variety of materials such as ceramics, metals, and polymers. Results from thisstudy reveal how traditional plasma-controlling gases have a detrimental effect on the surface morphology ofmachined components. The paper explains how the machining of thin plates of silicon steel can benefit the rapidproduction of electrical components such as transformer cores and dynamo pole pieces.Design/methodology/approach: A series of experiments was performed to investigate how shielding gasenvironment and gas pressure affect the ability to cut and machine silicon steel. The experiments were designedto show the differences between the use of various assist gases that shield the machining zone.Findings: The results of the work indicate that oxygen shielding gases allow silicon steel to be machined at afaster rate than using helium, argon, and air. However, the surface roughness produced is highly dependent onassist gas used and the pressure at which it is delivered.Research limitations/implications: The results presented imply that assist gases perform a variety of functionsand further research is required to understand how the assist gases improve machinability when machiningdifferent workpiece materials.Practical implications: The practical implications of this research indicate that a significant amount of researcheffort is required to optimize the type of assist gas used in laser micromachining of engineering materials.Originality/value: The paper reveals how assist gases interact with both laser and the surface of workpiecematerials. It is of practical value to microengineers and micromachinists working in the field of micro andnanomanufacturing.

  5. Measurements of noise immission from wind turbines at receptor locations: Use of a vertical microphone board to improve the signal-to-noise ratio

    International Nuclear Information System (INIS)

    The growing interest in wind energy has increased the need of accuracy in wind turbine noise immission measurements and thus, the need of new measurement techniques. This paper shows that mounting the microphone on a vertical board improves the signal-to-noise ratio over the whole frequency range compared to the free microphone technique. Indeed, the wind turbine is perceived two times noisier by the microphone due to the signal reflection by the board while, in addition, the wind noise is reduced. Furthermore, the board shielding effect allows the measurements to be carried out in the presence of reflecting surfaces such as building facades

  6. Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Ozaki, Katsuya [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Matin, Abdul, E-mail: matin.md.a@gmail.com [Department of Glass and Ceramic Engineering, Bangladesh University of Engg and Tech (BUET), Dhaka 1000 (Bangladesh); Numata, Yasuyuki [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Akai, Daisuke [Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan); Sawada, Kazuaki; Ishida, Makoto [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan)

    2014-12-15

    Highlights: • Highly [1 1 1] orientated functional PZT(1 1 1) thin film was grown on n-Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1). • Device performance of pMUT was studied using both experiment and modeling. • Material anisotropy played a significant role in the shifting of resonant frequency • pMUT shows high sensitivity for the transmission of ultrasonic pulses. • Successful realization of a piezoelectric ultrasonic transducer (pMUT) array. - Abstract: A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al{sub 2}O{sub 3} film on Si substrate. Modal shape of pMUT was analyzed employing advanced 3D finite element modeling taking the crystallographic anisotropy of materials and the properties of immersed medium (air or water) into account. Eigenfrequency with mode shapes has shown to have significant influence on transmitting-receiving characteristics of pMUT. Modal shapes of pMUT were also quantitatively determined using Laser Doppler Vibratometry (LDV). An excellent correlation was obtained between computational and experimental results. A significantly high sensitivity of 3.9 μV/kPa was obtained in an under-water ultrasonic wave transmission experiment conducted using fabricated pMUT as wave transmitter and a commercial transducer as receiver at a fundamental frequency of 1.20 MHz. Advanced FE computation thus serves as a tool to a priori optimize device structure for the successful transmission of ultrasonic waves with sufficient power to generate high resolution 3D imaging.

  7. 传声器阵列校准技术研究%Calibration technology of microphone array

    Institute of Scientific and Technical Information of China (English)

    李元首; 陈宝; 张雪; 姜涛

    2014-01-01

    Aerodynamic noise is usually broadband noise. The designed array needs to satisfy the measurement require⁃ments of both high and low frequency signals. The corresponding array form is designed when the frequency range of array mea⁃surement is determined. The noise source localization technology based on microphone array is the core test technique in the wind tunnel aerodynamic noise test technology. The accuracy of noise source localization depends mainly on the microphone ar⁃ray calibration technique. After the microphone phase array is installed,different frequency response and sensitivity,preamplifier, cable laying,power supply,frequency response of signal conditioner and the installation of microphone array can cause the phase difference and amplitude difference among all measurement channels in the data acquisition system. Correction of phase difference and amplitude difference of microphones can make all the microphone frequency responses consistent and ensure the accuracy of test result.%气动噪声通常为宽频噪声,设计的阵列需要同时满足对高低频信号的测量需求,在确定了阵列测量频率范围的情况下,设计相应的阵列形式。在风洞气动噪声试验技术中,基于传声器阵列的噪声源定位技术是核心试验技术,噪声源定位的精准度主要取决于传声器阵列校准技术。传声器相位阵列安装之后,由于传声器频率响应和灵敏度不同,前置放大器、电缆的铺设、电源和信号调理器的频率响应以及传声器在阵列中的安装影响,会引起数据采集系统各测量通道间固有的相位差和幅值差。修正传声器的相位差和幅值差使得所有的传声器幅频响应一致,保证试验结果的准度。

  8. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T;

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  9. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    Energy Technology Data Exchange (ETDEWEB)

    Doraiswamy, A. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Patz, T. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Narayan, R.J. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Dinescu, M. [National Institute for Laser, Plasma and Radiation Physics, P.O. Box MG-16 Magurele, 077125 Bucharest (Romania); Modi, R. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Auyeung, R.C.Y. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Chrisey, D.B. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States)

    2006-04-30

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 {mu}m wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication.

  10. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    International Nuclear Information System (INIS)

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 μm wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication

  11. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  12. Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

    Directory of Open Access Journals (Sweden)

    K. M. Tanvir Ahmmed

    2014-11-01

    Full Text Available Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.

  13. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, H.; Vanapalli, S.; Holland, H.J.; Vermeer, C.H.; Brake, ter H.J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with di

  14. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  15. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  16. Development of a femtosecond micromachining workstation by use of spectral interferometry.

    Science.gov (United States)

    Bera, Sudipta; Sabbah, A J; Durfee, Charles G; Squier, Jeff A

    2005-02-15

    A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films. PMID:15762432

  17. Micromachining of AlN and Al2O3 Using Fiber Laser

    Directory of Open Access Journals (Sweden)

    Florian Preusch

    2014-11-01

    Full Text Available We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%. A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%. In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

  18. 3D Printed Microtransporters: Compound Micromachines for Spatiotemporally Controlled Delivery of Therapeutic Agents.

    Science.gov (United States)

    Huang, Tian-Yun; Sakar, Mahmut Selman; Mao, Angelo; Petruska, Andrew J; Qiu, Famin; Chen, Xue-Bo; Kennedy, Stephen; Mooney, David; Nelson, Bradley J

    2015-11-01

    Functional compound micromachines are fabricated by a design methodology using 3D direct laser writing and selective physical vapor deposition of magnetic materials. Microtransporters with a wirelessly controlled Archimedes screw pumping mechanism are engineered. Spatiotemporally controlled collection, transport, and delivery of micro particles, as well as magnetic nanohelices inside microfluidic channels are demonstrated. PMID:26415002

  19. Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems

    Science.gov (United States)

    Koch, Michael

    Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world. This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates. Two different pump types have been developed. These are membrane pumps with either cantilever valves or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps. Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever valves. CFX- Flow3D was also used to successfully model the behaviour of the diffuser/nozzle valve. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever valve was necessary to achieve better prediction of the pump rates for higher frequencies. As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump

  20. Compensating microphonics in SRF cavities to ensure beam stability for future free electron lasers

    Energy Technology Data Exchange (ETDEWEB)

    Neumann, Axel

    2008-07-21

    In seeded High-Gain-Harmonic-Generation free electron lasers or energy recovery linear accelerators the requirements for the bunch-to-bunch timing and energy jitter of the beam are in the femtosecond and per mill regime. This implies the ability to control the cavity radiofrequency (RF) field to an accuracy of 0.02 in phase and up to 1.10{sup -4} in amplitude. For the planned BESSY-FEL it is envisaged to operate 144 superconducting 1.3 GHz cavities of the 2.3 GeV driver linac in continuous wave mode and at a low beam current. The cavity resonance comprises a very narrow bandwidth of the order of tens of Hertz. Such cavities have been characterized under accelerator like conditions in the HoBiCaT test facility. It was possible to measure the error sources affecting the field stability in continuous wave (CW) operation. Microphonics, the main error source for a mechanical detuning of the cavities, lead to an average fluctuation of the cavity resonance of 1-5 Hz rms. Furthermore, the static and dynamic Lorentz force detuning and the helium pressure dependance of the cavity resonance have been measured. Single cavity RF control and linac bunch-to-bunch longitudinal phase space modeling containing the measured properties showed, that it is advisable to find means to minimize the microphonics detuning by mechanical tuning. Thus, several fast tuning systems have been tested for CW operation. These tuners consist of a motor driven lever for slow and coarse tuning and a piezo that is integrated into the tuner support for fast and fine tuning. Regarding the analysis of the detuning spectrum an adaptive feedforward method based on the least-mean-square filter algorithm has been developed for fast cavity tuning. A detuning compensation between a factor of two and up to a factor of seven has been achieved. Modeling the complete system including the fast tuning scheme, showed that the requirements of the BESSY-FEL are attainable. (orig.)