WorldWideScience

Sample records for advanced micromachined microphone

  1. Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures

    OpenAIRE

    Hall, Neal A.; Okandan, Murat; Littrell, Robert; Bicen, Baris; Degertekin, F. Levent

    2008-01-01

    In many micromachined sensors the thin (2–10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low thermal noise levels. Finite-element based modeling procedures based on 2-D discretization of...

  2. Wideband micromachined microphones with radio frequency detection

    Science.gov (United States)

    Hansen, Sean Thomas

    There are many commercial, scientific, and military applications for miniature wideband acoustic sensors, including monitoring the condition or wear of equipment, collecting scientific data, and identifying and localizing military targets. The application of semiconductor micromachining techniques to sensor fabrication has the potential to transform acoustic sensing with small, reproducible, and inexpensive silicon-based microphones. However, such sensors usually suffer from limited bandwidth and from non-uniformities in their frequency response due to squeeze-film damping effects and narrow air gaps. Furthermore, they may be too fragile to be left unattended in a humid or dusty outdoor environment. Silicon microphones that incorporate capacitive micromachined ultrasonic transducer membranes overcome some of the drawbacks of conventional microphones. These micromachined membranes are small and robust enough to be vacuum-sealed, and can withstand atmospheric pressure and submersion in water. In addition, the membrane mechanical response is flat from dc up to ultrasonic frequencies, resulting in a wideband sensor for accurate spectral analysis of acoustic signals. However, a sensitive detection scheme is necessary to detect the small changes in membrane displacement that result from using smaller, stiffer membranes than do conventional microphones. We propose a radio frequency detection technique, in which the capacitive membranes are incorporated into a transmission line. Variations in membrane capacitance due to impinging sound pressure are sensed through the phase variations of a carrier signal that propagates along the line. This dissertation examines the design, fabrication, modeling, and experimental measurements of wideband micromachined microphones using sealed ultrasonic membranes and RF detection. Measurements of fabricated microphones demonstrate less than 0.5 dB variation in their output responses between 0.1 Hz to 100 kHz under electrostatic actuation of

  3. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

    OpenAIRE

    Kumjae Shin; Junsik Jeon; James Edward West; Wonkyu Moon

    2015-01-01

    Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance comp...

  4. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

    Directory of Open Access Journals (Sweden)

    Kumjae Shin

    2015-08-01

    Full Text Available Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET transduction based on an electret and FET (field-effect-transistor as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance components in the transduction structure. Hence, ElGoFET transduction has high sensitivity even with a smaller air gap capacitance, due to a miniaturization of the transducer. A FET with a floating-gate electrode embedded on a membrane was designed and fabricated and an electret was fabricated by ion implantation with Ga+ ions. During the assembly process between the FET and the electret, the operating point of the FET was characterized using the static response of the FET induced by the electric field due to the trapped positive charge at the electret. Additionally, we evaluated the microphone performance of the ElGoFET by measuring the acoustic response in air using a semi-anechoic room. The results confirmed that the proposed transduction mechanism has potential for microphone applications.

  5. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  6. Calibration of High Frequency MEMS Microphones

    Science.gov (United States)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  7. Micromachining of electret materials, advantages and possibilities

    OpenAIRE

    Voorthuyzen, J.A.; Bergveld, P.

    1988-01-01

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. ...

  8. Advances in Femtosecond Micromachining and Inscription of Micro and Nano Photonic Devices

    OpenAIRE

    Smith, Graham N; Kalli, Kyriacos; Sugden, Kate

    2010-01-01

    The use of focussed femtosecond laser pulses to fundamentally change materials through the interaction of the pulse and material offers new opportunities in device design. This is especially true for fabrication of intricate microstructures within the bulk volume of optically transparent glassy or polymeric materials. But it also can give significant advantages for the micromachining of surface structures in opaque materials in terms of feature size and aspect ratio. Although femtosecond lase...

  9. Multilayer graphene condenser microphone

    Science.gov (United States)

    Todorović, Dejan; Matković, Aleksandar; Milićević, Marijana; Jovanović, Djordje; Gajić, Radoš; Salom, Iva; Spasenović, Marko

    2015-12-01

    Vibrating membranes are the cornerstone of acoustic technology, forming the backbone of modern loudspeakers and microphones. Acoustic performance of a condenser microphone is derived mainly from the membrane’s size, surface mass and achievable static tension. The widely studied and available nickel has been a dominant membrane material for professional microphones for several decades. In this paper we introduce multilayer graphene as a membrane material for condenser microphones. The graphene device outperforms a high end commercial nickel-based microphone over a significant part of the audio spectrum, with a larger than 10 dB enhancement of sensitivity. Our experimental results are supported with numerical simulations, which also show that a 300 layer thick graphene membrane under maximum tension would offer excellent extension of the frequency range, up to 1 MHz.

  10. Advanced measurement and analysis of surface textures produced by micro-machining processes

    International Nuclear Information System (INIS)

    Surface texture of a part or a product has significant effects on its functionality, physical-mechanical properties and visual appearance. In particular for miniature products, the implication of surface quality becomes critical owing to the presence of geometrical features with micro/nano-scale dimensions. Qualitative and quantitative assessments of surface texture are carried out predominantly by profile parameters, which are often insufficient to address the contribution of constituent spatial components with varied amplitudes and wavelengths. In this context, this article presents a novel approach for advanced measurement and analysis of profile average roughness (Ra) and its spatial distribution at different wavelength intervals. The applicability of the proposed approach was verified for three different surface topographies prepared by grinding, laser micro-polishing and micro-milling processes. From the measurement and analysis results, Ra(λ) spatial distribution was found to be an effective measure of revealing the contributions of various spatial components within specific wavelength intervals towards formation of the entire surface profile. In addition, the approach was extended to the measurement and analysis of areal average roughness Sa(λ) spatial distribution within different wavelength intervals. Besides, the proposed method was demonstrated to be a useful technique in developing a functional correlation between a manufacturing process and its corresponding surface profile. (paper)

  11. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  12. Design and fabrication of a silicon miniature condenser microphone

    Institute of Scientific and Technical Information of China (English)

    CHEN Jing; LIU Litian; LI Zhijian; TAN Zhimin; MA Jun; LI Boquan

    2001-01-01

    Micromachining miniature microphone is one of the most challenging tasks in research and development today. For micromachining membrane, there is a significant internal (residual) stress, which strongly decreases the mechanical sensitivity of membrane. As predicted by theoretical analysis and numerical simulation, a corrugated diaphragm can greatly increase the mechanical sensitivity of the microphone diaphragms due to the reduction of the initial stress effect without changing the process conditions. A silicon condenser miniature microphone with corrugated diaphragm has been designed, fabricated and tested. The fabrication process is simple, efficient and fully compatible with standard IC process. Wafer level measurement has been carried out. An open circuit sensitivity of 40 my/Pa up to 7 kHz could be achieved under a low bias voltage of 10 V with only 1.5 × 1.5 mm2 chip area. The preamplifier and subsequent signal process circuits are expected to be integrated in the same chip to make a complete micro-acoustic system.

  13. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  14. Silicon microphones - a Danish perspective

    DEFF Research Database (Denmark)

    Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick;

    1998-01-01

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations......, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising....

  15. Cochlear microphonic broad tuning curves

    Science.gov (United States)

    Ayat, Mohammad; Teal, Paul D.; Searchfield, Grant D.; Razali, Najwani

    2015-12-01

    It is known that the cochlear microphonic voltage exhibits much broader tuning than does the basilar membrane motion. The most commonly used explanation for this is that when an electrode is inserted at a particular point inside the scala media, the microphonic potentials of neighbouring hair cells have different phases, leading to cancelation at the electrodes location. In situ recording of functioning outer hair cells (OHCs) for investigating this hypothesis is exceptionally difficult. Therefore, to investigate the discrepancy between the tuning curves of the basilar membrane and those of the cochlear microphonic, and the effect of phase cancellation of adjacent hair cells on the broadness of the cochlear microphonic tuning curves, we use an electromechanical model of the cochlea to devise an experiment. We explore the effect of adjacent hair cells (i.e., longitudinal phase cancellation) on the broadness of the cochlear microphonic tuning curves in different locations. The results of the experiment indicate that active longitudinal coupling (i.e., coupling with active adjacent outer hair cells) only slightly changes the broadness of the CM tuning curves. The results also demonstrate that there is a π phase difference between the potentials produced by the hair bundle and the soma near the place associated with the characteristic frequency based on place-frequency maps (i.e., the best place). We suggest that the transversal phase cancellation (caused by the phase difference between the hair bundle and the soma) plays a far more important role than longitudinal phase cancellation in the broadness of the cochlear microphonic tuning curves. Moreover, by increasing the modelled longitudinal resistance resulting the cochlear microphonic curves exhibiting sharper tuning. The results of the simulations suggest that the passive network of the organ of Corti determines the phase difference between the hair bundle and soma, and hence determines the sharpness of the

  16. Virtual microphones in the operating theatre

    NARCIS (Netherlands)

    Dekker, M.L.; Graaff, M.P. de; Mast, A.; Stassen, L.; Elst, M. van der

    2005-01-01

    With a linear array of microphones, 'virtual microphones' can be created with good results on isolating, tracking and separating sources of sound. This technique could be used for command control and speech recognition purposes in an operating theatre.

  17. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  18. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  19. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  20. Micromachined chemical jet dispenser

    Energy Technology Data Exchange (ETDEWEB)

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  1. General considerations of noise in microphone preamplifiers

    NARCIS (Netherlands)

    Donk, van der A.G.H.; Voorthuyzen, J.A.; Bergveld, P.

    1991-01-01

    In this paper a study of the noise performance of electret microphone systems as a part of hearing aids is presented. The signal-to-noise ratio of the microphone-preamplifier combination, containing a field-effect transistor (FET) and a high value resistive bias element in a hybrid configuration, is

  2. Standoff photoacoustic detections with high-sensitivity microphones and acoustic arrays

    Science.gov (United States)

    Choa, Fow-Sen; Wang, Chen-Chia; Khurgin, Jacob; Samuels, Alan; Trivedi, Sudhir; Gupta, Deepa

    2016-05-01

    Standoff detection of dangerous chemicals like explosives, nerve gases, and harmful aerosols has continuously been an important subject due to the serious concern about terrorist threats to both overseas and homeland lives and facility. Compared with other currently available standoff optical detection techniques, like Raman, photo-thermal, laser induced breakdown spectroscopy,...etc., photoacoustic (PA) sensing has the advantages of background free and very high detection sensitivity, no need of back reflection surfaces, and 1/R instead of 1/R2 signal decay distance dependence. Furthermore, there is still a great room for PA sensitivity improvement by using different PA techniques, including lockin amplifier, employing new microphones, and microphone array techniques. Recently, we have demonstrated standoff PA detection of isopropanol vapor, solid phase TNT and RDX at a standoff distance. To further calibrate the detection sensitivity, we use nerve gas simulants that were generated and calibrated by a commercial vapor generator. For field operations, array of microphones and microphone-reflector pairs can be utilized to achieve noise rejection and signal enhancement. We have experimentally demonstrated signal enhancement and noise reduction using an array of 4 microphone/4 reflector system as well as an array of 16-microphone/1 reflector. In this work we will review and compare different standoff techniques and discuss the advantages of using different photoacoustic techniques. We will also discuss new advancement of using new types of microphone and the performance comparison of using different structure of microphone arrays and combining lock-in amplifier with acoustic arrays. Demonstration of out-door real-time operations with high power mid-IR laser and microphone array will be presented.

  3. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  4. Micromachined electrode array

    Energy Technology Data Exchange (ETDEWEB)

    Okandan, Murat (Edgewood, NM); Wessendorf, Kurt O. (Albuquerque, NM)

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  5. Mapping Speech Spectra from Throat Microphone to Close-Speaking Microphone: A Neural Network Approach

    Directory of Open Access Journals (Sweden)

    B. Yegnanarayana

    2007-01-01

    Full Text Available Speech recorded from a throat microphone is robust to the surrounding noise, but sounds unnatural unlike the speech recorded from a close-speaking microphone. This paper addresses the issue of improving the perceptual quality of the throat microphone speech by mapping the speech spectra from the throat microphone to the close-speaking microphone. A neural network model is used to capture the speaker-dependent functional relationship between the feature vectors (cepstral coefficients of the two speech signals. A method is proposed to ensure the stability of the all-pole synthesis filter. Objective evaluations indicate the effectiveness of the proposed mapping scheme. The advantage of this method is that the model gives a smooth estimate of the spectra of the close-speaking microphone speech. No distortions are perceived in the reconstructed speech. This mapping technique is also used for bandwidth extension of telephone speech.

  6. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate.

    Science.gov (United States)

    Huang, Chien-Hsin; Lee, Chien-Hsing; Hsieh, Tsung-Min; Tsao, Li-Chi; Wu, Shaoyi; Liou, Jhyy-Cheng; Wang, Ming-Yi; Chen, Li-Che; Yip, Ming-Chuen; Fang, Weileun

    2011-01-01

    This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is -42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB) under 6 V pumping voltage, the frequency response is 100 Hz-10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 μA, and low distortion of less than 1% (referred to 100 dB). PMID:22163953

  7. Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

    Directory of Open Access Journals (Sweden)

    Ming-Chuen Yip

    2011-06-01

    Full Text Available This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is −42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB under 6 V pumping voltage, the frequency response is 100 Hz–10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 μA, and low distortion of less than 1% (referred to 100 dB.

  8. Nonlinear Distortion of the Fiber Optic Microphone

    OpenAIRE

    Muhammad Taher Abuelma'atti

    2000-01-01

    Analytical expressions are obtained for predicting the harmonic and intermodulation performance of the fiber optic microphone. These expressions are in terms of the ordinary Bessel functions with arguments dependent on the amplitudes of the acoustical exciting signal.

  9. Micromachined Silicon Cantilever Magnetometry.

    Science.gov (United States)

    Chaparala, M. V.

    1998-03-01

    Magnetic torque measurements give us a simple and attractive method for characterizing the anisotropic properties of magnetic materials. Silicon torque and force magnetometers have many advantages over traditional torsion fiber torque magnetometers. We have fabricated micromachined silicon torque and force magnetometers employing both capacitive(``Capacitance platform magnetometer for thin film and small crystal superconductor studies'', M. Chaparala et al.), AIP Conf. Proc. (USA), AIP Conference Proceedings, no.273, p. 407 1993. and strain dependent FET detection(``Strain Dependent Characterstics of Silicon MOSFETs and their Applications'', M. Chaparala et al.), ISDRS Conf. Proc. 1997. schemes which realize some of these gains. We will present the pros and cons of each of the different detection schemes and the associated design constraints. We have developed a feedback scheme which enables null detection thus preserving the integrity of the sample orientation. We will present a method of separating out the torque and force terms in the measured signals and will discuss the errors associated with each of the designs. Finally, we present the static magnetic torque measurements on various materials with these devices, including equilibrium properties on sub microgram specimens of superconductors, and dHvA measurements near H_c2. We will also discuss their usefulness in pulsed magnetic fields(``Cantilever magnetometry in pulsed magnetic fields", M. J. Naughton et al.), Rev. of Sci. Instrum., vol.68, p. 4061 1997..

  10. Micromachining with DUV lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Kappel, Heiner; Heekenjann, Peter B.

    1997-04-01

    In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

  11. Static pressure and temperature coefficients of working standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Cutanda Henriquez, Vicente; Torras Rosell, Antoni

    2016-01-01

    The sensitivity of measurement microphones is affected by changes in the environmental conditions, mainly temperature and static pressure. This rate of change has been the object of previous studies focused on Laboratory Standard microphones. The literature describes frequency dependent values...

  12. Microphone Detects Boiler-Tube Leaks

    Science.gov (United States)

    Parthasarathy, S. P.

    1985-01-01

    Unit simple, sensitive, rugged, and reliable. Diaphragmless microphone detects leaks from small boiler tubes. Porous plug retains carbon granules in tube while allowing pressure changes to penetrate to granules. Has greater life expectancy than previous controllers and used in variety of hot corrosive atmospheres.

  13. Compressive sensing with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Xenaki, Angeliki

    2016-01-01

    A wave expansion method is proposed in this work, based on measurements with a spherical microphone array, and formulated in the framework provided by Compressive Sensing. The method promotes sparse solutions via ‘1-norm minimization, so that the measured data are represented by few basis functions...

  14. PECVD silicon nitride diaphragms for condenser microphones

    NARCIS (Netherlands)

    Scheeper, P.R.; Voorthuyzen, J.A.; Bergveld, P.

    1991-01-01

    The application of plasma-enhanced chemical vapour deposited (PECVD) silicon nitride as a diaphragm material for condenser microphones has been investigated. By means of adjusting the SiH4/NH3 gas-flow composition, silicon-rich silicon nitride films have been obtained with a relatively low tensile s

  15. The acoustic center of laboratory standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2006-01-01

    center from the inverse distance law is analyzed. Experimental values of the acoustic center of laboratory standard microphones are presented, and numerical results obtained using the boundary element method supplement the experimental data. Estimated uncertainties are also presented. The results...... reported confirm values previously defined in an international standard and extend the frequency range....

  16. Hearing aid comprising an array of microphones

    NARCIS (Netherlands)

    Boone, M.M.; Berkhout, A.J.; Merks, I.L.D.M.

    1999-01-01

    Hearing aid for improving the hearing ability of the hard of hearing, comprising an array of microphones, the electrical output signals of which are fed to at least one transmission path belonging to an ear. Means are provided for deriving two array output signals from the output signals of the micr

  17. Subjective assessments of spherical microphone arrays - Paired comparisons of two arrays designed using different microphone models

    OpenAIRE

    Koehl, Vincent; Paquier, Mathieu; Delikaris-Manias, Simeon

    2012-01-01

    International audience Microphone arrays are commonly used to capture sound fields. As the number of sensors forming the array increases, the spatial sampling accuracy at high frequencies improves. Numerous prototypes of spherical arrays were developed over the last years. However, much less attention has been paid to the intrinsic performances of the sensors than to their number and arrangement. This study aims at evaluating the relative performances of two rigid spherical microphone arra...

  18. APPLICATION OF MICROPHONE ARRAYS FOR DISTANT SPEECH CAPTURE

    Directory of Open Access Journals (Sweden)

    M. B. Stolbov

    2015-07-01

    Full Text Available Application of microphone arrays and beamforming techniques for speech information collection has significant advantages compared to systems operating with a single microphone. This paper presents a brief overview of microphone array systems for collecting distant speech information. The paper is based on an analysis of publications on the use of microphone arrays for speech information collection tasks, as well as on the author’s experience in the development and practical application of planar microphone arrays. The paper describes the main stages of the development of systems for remote capture of audio information. It provides a review of the main applications of microphone arrays, the basic types of microphone arrays and their features. The bulk of the paper deals with planar microphone arrays. We analyze the work of microphone arrays in different acoustic environments. The paper contains the basic equations for calculating the parameters of equidistant planar microphone arrays. Some methods of designing non-equidistant arrays are also mentioned (a list of references is included. We also provide a list of basic digital signal processing algorithms for planar microphone arrays, as well as a list of references on processing algorithms in the frequency domain. The paper includes a list of foreign companies offering systems based on microphone arrays for a wide range of tasks associated with the processing of speech and audio signals. We describe some state-of-the-art speech information collection systems based on microphone arrays. Some promising directions for the development of speech information collection systems using microphone arrays are described in conclusion. The material of the review is usable in designing of microphone arrays for specific practical applications.

  19. Review of polymer MEMS micromachining

    Science.gov (United States)

    Kim, Brian J.; Meng, Ellis

    2016-01-01

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

  20. Distance effects in electrochemical micromachining

    Science.gov (United States)

    Xu, Lizhong; Pan, Yue; Zhao, Chuanjun

    2016-09-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separations. Small separations exert substantial effects on the real voltages. Accordingly, a DC-voltage small-separation electrochemical micromachining technique was proposed. The double-layer voltage drops sharply as the small separation increases. Thus, the electrochemical reactions are confined to electrode regions in very close proximity even under DC voltage. The machining precision can be significantly enhanced by reducing the voltage and separation between electrodes. With this technique, the machining of conducting materials with submicrometre precision was achieved.

  1. Micromachined magnetohydrodynamic actuators and sensors

    Science.gov (United States)

    Lee, Abraham P.; Lemoff, Asuncion V.

    2000-01-01

    A magnetohydrodynamic (MHD) micropump and microsensor which utilizes micromachining to integrate the electrodes with microchannels and includes a magnet for producing magnetic fields perpendicular to both the electrical current direction and the fluid flow direction. The magnet can also be micromachined and integrated with the micropump using existing technology. The MHD micropump, for example, can generate continuous, reversible flow, with readily controllable flow rates. The flow can be reversed by either reversing the electrical current flow or reversing the magnetic field. By mismatching the electrodes, a swirling vortex flow can be generated for potential mixing applications. No moving parts are necessary and the dead volume is minimal. The micropumps can be placed at any position in a fluidic circuit and a combination of micropumps can generate fluidic plugs and valves.

  2. Review of polymer MEMS micromachining

    International Nuclear Information System (INIS)

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed. (topical review)

  3. A Surface Micromachined CMOS MEMS Humidity Sensor

    OpenAIRE

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  4. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    L. Rihakova; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  5. Eargle's the microphone book from mono to stereo to surround : a guide to microphone design and application

    CERN Document Server

    Rayburn, Ray A

    2012-01-01

    Eargle's Microphone Book is the only guide you will ever need for the latest in microphone technology, application and technique. This new edition features more on microphone arrays and wireless microphones, new material on digital models; the latest developments in surround; expanded advice on studio set up, recording and mic selection. Ray A. Rayburn provides detailed analysis of the different types of microphones available and addresses their application through practical examples of actual recording sessions and studio operations. The book takes you into the stu

  6. Microphonics in biopotential measurements with capacitive electrodes.

    Science.gov (United States)

    Luna-Lozano, Pablo S; Pallas-Areny, Ramon

    2010-01-01

    Biopotential measurements with capacitive electrodes do not need any direct contact between electrode and skin, which saves the time devoted to expose and prepare the contact area when measuring with conductive electrodes. However, mechanical vibrations resulting from physiological functions such as respiration and cardiac contraction can change the capacitance of the electrode and affect the recordings. This transformation of mechanical vibrations into undesired electric signals is termed microphonics. We have evaluated microphonics in capacitive ECG recordings obtained from a dressed subject seated on a common chair with electrodes placed on the front side of the backrest of the chair. Depending on the softness of the backrest, the recordings may be clearly affected by the displacement of the thorax back wall due to the respiration and to the heart's mechanical activity.

  7. Passive wireless MEMS microphones for biomedical applications.

    Science.gov (United States)

    Sezen, A S; Sivaramakrishnan, S; Hur, S; Rajamani, R; Robbins, W; Nelson, B J

    2005-11-01

    This paper introduces passive wireless telemetry based operation for high frequency acoustic sensors. The focus is on the development, fabrication, and evaluation of wireless, battery-less SAW-IDT MEMS microphones for biomedical applications. Due to the absence of batteries, the developed sensors are small and as a result of the batch manufacturing strategy are inexpensive which enables their utilization as disposable sensors. A pulse modulated surface acoustic wave interdigital transducer (SAW-IDT) based sensing strategy has been formulated. The sensing strategy relies on detecting the ac component of the acoustic pressure signal only and does not require calibration. The proposed sensing strategy has been successfully implemented on an in-house fabricated SAW-IDT sensor and a variable capacitor which mimics the impedance change of a capacitive microphone. Wireless telemetry distances of up to 5 centimeters have been achieved. A silicon MEMS microphone which will be used with the SAW-IDT device is being microfabricated and tested. The complete passive wireless sensor package will include the MEMS microphone wire-bonded on the SAW substrate and interrogated through an on-board antenna. This work on acoustic sensors breaks new ground by introducing high frequency (i.e., audio frequencies) sensor measurement utilizing SAW-IDT sensors. The developed sensors can be used for wireless monitoring of body sounds in a number of different applications, including monitoring breathing sounds in apnea patients, monitoring chest sounds after cardiac surgery, and for feedback sensing in compression (HFCC) vests used for respiratory ventilation. Another promising application is monitoring chest sounds in neonatal care units where the miniature sensors will minimize discomfort for the newborns.

  8. Microphone Clustering and BP Network based Acoustic Source Localization in Distributed Microphone Arrays

    Directory of Open Access Journals (Sweden)

    CHEN, Z.

    2013-11-01

    Full Text Available A microphone clustering and back propagation (BP neural network based acoustic source localization method using distributed microphone arrays in an intelligent meeting room is proposed. In the proposed method, a novel clustering algorithm is first used to divide all microphones into several clusters where each one corresponds to a specified BP network. Afterwards, the energy-based cluster selecting scheme is applied to select clusters which are small and close to the source. In each chosen cluster, the time difference of arrival of each microphone pair is estimated, and then all estimated time delays act as input of the corresponding BP network for position estimation. Finally, all estimated positions from the chosen clusters are fused for global position estimation. Only subsets rather than all the microphones are responsible for acoustic source localization, which leads to less computational cost; moreover, the local estimation in each selected cluster can be processed in parallel, which expects to improve the localization speed potentially. Simulation results from comparison with other related localization approaches confirm the validity of the proposed method.

  9. Modeling of a corona discharge microphone

    International Nuclear Information System (INIS)

    The acoustic pressure sensor described in this paper uses a small volume of ionized gas (plasma) as sensing element to receive energy from surrounding gas (air) set into oscillations by an acoustic disturbance. The generation of the ionized gas is performed by negative point-to-plane corona discharges. The passage of a pressure disturbance through this gas disturbs the flow of the charged particles between the electrodes, and provokes a current variation of the electrical system. This current variation is directly related to the acoustic pressure. An electroacoustic model of this plasma microphone is proposed. From the current–voltage relation associated with corona discharges, this model is based on the variations of the threshold voltage and the mobility of ions with pressure and temperature of the surrounding gas. An experimental setup is developed, it simultaneously allows one to compare the acoustic pressure deduced from the corona discharge sensor with that resulting from the two-microphone method in a standing wave tube. This paper also proposes a parametric study to quantify the influence of the electrical and geometrical parameters of the discharge on the sensitivity of the plasma microphone. (paper)

  10. Hydrogel microphones for stealthy underwater listening.

    Science.gov (United States)

    Gao, Yang; Song, Jingfeng; Li, Shumin; Elowsky, Christian; Zhou, You; Ducharme, Stephen; Chen, Yong Mei; Zhou, Qin; Tan, Li

    2016-01-01

    Exploring the abundant resources in the ocean requires underwater acoustic detectors with a high-sensitivity reception of low-frequency sound from greater distances and zero reflections. Here we address both challenges by integrating an easily deformable network of metal nanoparticles in a hydrogel matrix for use as a cavity-free microphone. Since metal nanoparticles can be densely implanted as inclusions, and can even be arranged in coherent arrays, this microphone can detect static loads and air breezes from different angles, as well as underwater acoustic signals from 20 Hz to 3 kHz at amplitudes as low as 4 Pa. Unlike dielectric capacitors or cavity-based microphones that respond to stimuli by deforming the device in thickness directions, this hydrogel device responds with a transient modulation of electric double layers, resulting in an extraordinary sensitivity (217 nF kPa(-1) or 24 μC N(-1) at a bias of 1.0 V) without using any signal amplification tools. PMID:27554792

  11. Hydrogel microphones for stealthy underwater listening

    Science.gov (United States)

    Gao, Yang; Song, Jingfeng; Li, Shumin; Elowsky, Christian; Zhou, You; Ducharme, Stephen; Chen, Yong Mei; Zhou, Qin; Tan, Li

    2016-08-01

    Exploring the abundant resources in the ocean requires underwater acoustic detectors with a high-sensitivity reception of low-frequency sound from greater distances and zero reflections. Here we address both challenges by integrating an easily deformable network of metal nanoparticles in a hydrogel matrix for use as a cavity-free microphone. Since metal nanoparticles can be densely implanted as inclusions, and can even be arranged in coherent arrays, this microphone can detect static loads and air breezes from different angles, as well as underwater acoustic signals from 20 Hz to 3 kHz at amplitudes as low as 4 Pa. Unlike dielectric capacitors or cavity-based microphones that respond to stimuli by deforming the device in thickness directions, this hydrogel device responds with a transient modulation of electric double layers, resulting in an extraordinary sensitivity (217 nF kPa-1 or 24 μC N-1 at a bias of 1.0 V) without using any signal amplification tools.

  12. Effect of microphone location in ITE versus BTE hearing aids.

    Science.gov (United States)

    Gartrell, E L; Church, G T

    1990-07-01

    Sound pressure measurements were made at the hearing aid microphones of 20 subjects with their in-the-ear (ITE) hearing aids and a behind-the-ear (BTE) hearing aid to determine the influence of microphone location on hearing aid input. A probe tube microphone was used to measure the difference in dB SPL between the ITE and BTE microphone locations. ITE microphone location resulted in a maximum high frequency advantage of 9.2 dB in the 2500 to 5000 Hz range. However, the frequency location of this maximal advantage varied a great deal between individuals, precluding the use of a standard ITE microphone correction factor for 2cc coupler to functional gain conversions.

  13. Micromachined optical fiber current sensor

    OpenAIRE

    Heredero, R. L.; Fernández de Caleya, Ramón; Guerrero, Héctor; Losantos Viñolas, Pedro; Acero, M.C.; Esteve, J.

    1999-01-01

    We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 μm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometr...

  14. New probe microphone for investigating the acoustics of the ear

    DEFF Research Database (Denmark)

    Lauridsen, Ole; Günthersen, Carsten

    1981-01-01

    A new probe microphone employing a soft tube and a compensation network for the tube response is described. Because of the soft tube, this microphone is especially suited for investigating the acoustics of the outer ear and the ear canal, and some such measurements are given.......A new probe microphone employing a soft tube and a compensation network for the tube response is described. Because of the soft tube, this microphone is especially suited for investigating the acoustics of the outer ear and the ear canal, and some such measurements are given....

  15. Sound Source Localization by Using Two Microphones

    OpenAIRE

    Yilmaz, Gulay

    2014-01-01

    This thesis work presents the way of locating the sound source by using two microphone. The idea to approach the goal is based on the Time di fference of Arrival Estimation (TDOA). There are several ways to the TDOA such as the generalized cross-correlation (GCC) and Steered Response Power (SRP).The most common technique used in TDOA estimation is the generalized cross-correlation (GCC). But Steered Response Power PHAT (SRP-PHAT) together with the Windowed Discrete Fourier Transform(WDFT) are...

  16. Compressive sensing with a spherical microphone array.

    Science.gov (United States)

    Fernandez-Grande, Efren; Xenaki, Angeliki

    2016-02-01

    A wave expansion method is proposed in this work, based on measurements with a spherical microphone array, and formulated in the framework provided by Compressive Sensing. The method promotes sparse solutions via ℓ1-norm minimization, so that the measured data are represented by few basis functions. This results in fine spatial resolution and accuracy. This publication covers the theoretical background of the method, including experimental results that illustrate some of the fundamental differences with the "conventional" least-squares approach. The proposed methodology is relevant for source localization, sound field reconstruction, and sound field analysis.

  17. Two-microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    2006-01-01

    Matlab source code for underdetermined separation of instaneous speech mixtures. The algorithm is described in [1] Michael Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: ''Two-microphone Separation of Speech Mixtures,'' 2006, submitted for journal publoication. See also, [2] Michael...... Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: ''Overcomplete Blind Source Separation by Combining ICA and Binary Time-Frequency Masking,'' in proceedings of IEEE International workshop on Machine Learning for Signal Processing, pp. 15-20, 2005. All files should be in the same directory...

  18. 76 FR 78042 - Certain Silicon Microphone Packages and Products Containing Same Receipt of Complaint...

    Science.gov (United States)

    2011-12-15

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same Receipt of Complaint... complaint entitled In Re Certain Silicon Microphone Packages and Products Containing Same, DN 2864; the... importation of certain silicon microphone packages and products containing same. The complaint names...

  19. 77 FR 2087 - Certain Silicon Microphone Packages and Products Containing Same; Institution of Investigation

    Science.gov (United States)

    2012-01-13

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same; Institution of Investigation... importation, and the sale within the United States after importation of certain silicon microphone packages... after importation of certain silicon microphone packages and products containing same that infringe...

  20. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  1. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  2. A Microflown based sound pressure microphone suitable for harsh environments

    NARCIS (Netherlands)

    Yntema, Doekle R.; Bree, de Hans-Elias

    2005-01-01

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone won't last long under these conditions. Electret based pressure microphones stop working well above 70 degr

  3. A microflown based sound presure microphone suitable for harsh environments

    NARCIS (Netherlands)

    Yntema, Doekle R.; Bree, de Hans-Elias

    2005-01-01

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 d

  4. Preamplifier with ultra low frequency cutoff for infrasonic condenser microphone

    DEFF Research Database (Denmark)

    Kinnerup, Rasmus Trock; Marbjerg, Kresten; Rasmussen, Per;

    2012-01-01

    Measuring infrasonic sound sets high requirements on the instruments used. Typically the measurement chain consists of a microphone and a preamplifier. As the input resistance of the preamplifier forms a high pass filter with the capacitance of the microphone in the picofarad range, measuring ult......-shaped shock wave at high level which prohibits flights in land zones....

  5. Comparison of binaural microphones for externalization of sounds

    DEFF Research Database (Denmark)

    Cubick, Jens; Sánchez Rodríguez, C.; Song, Wookeun;

    2015-01-01

    or with microphones placed inside the ear canals of a person. In this study, binaural room impulse responses (BRIRs) were measured with several commercially available binaural microphones, both placed inside the listeners’ ears (individual BRIR) and on a head and torso simulator (generic BRIR). The degree...

  6. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  7. Soft micromachines with programmable motility and morphology

    Science.gov (United States)

    Huang, Hen-Wei; Sakar, Mahmut Selman; Petruska, Andrew J.; Pané, Salvador; Nelson, Bradley J.

    2016-07-01

    Nature provides a wide range of inspiration for building mobile micromachines that can navigate through confined heterogenous environments and perform minimally invasive environmental and biomedical operations. For example, microstructures fabricated in the form of bacterial or eukaryotic flagella can act as artificial microswimmers. Due to limitations in their design and material properties, these simple micromachines lack multifunctionality, effective addressability and manoeuvrability in complex environments. Here we develop an origami-inspired rapid prototyping process for building self-folding, magnetically powered micromachines with complex body plans, reconfigurable shape and controllable motility. Selective reprogramming of the mechanical design and magnetic anisotropy of body parts dynamically modulates the swimming characteristics of the micromachines. We find that tail and body morphologies together determine swimming efficiency and, unlike for rigid swimmers, the choice of magnetic field can subtly change the motility of soft microswimmers.

  8. Realization of CMOS compatible micromachined chemical sensors

    OpenAIRE

    Demirci, Tuğba; Demirci, Tugba

    2002-01-01

    The chemical sensors are fabricated using IC manufacturing technologies, providing a smaller size and lower weight, lower power consumption, and lower cost due to the automated and batch production. During the last two decades, largely two-dimensional Integrated Circuit (IC) fabrication technology has been extended into the third dimension by micromachining technologies [1]. Micromachining has been used to produce a growing variety of micromechanical structures, including automotive pressure ...

  9. DFT-Domain Based Single-Microphone Noise Reduction for Speech Enhancement

    DEFF Research Database (Denmark)

    C. Hendriks, Richard; Gerkmann, Timo; Jensen, Jesper

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades...... their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement. The field of single-microphone noise...... reduction for speech enhancement comprises a history of more than 30 years of research. In this survey, we wish to demonstrate the significant advances that have been made during the last decade in the field of discrete Fourier transform domain-based single-channel noise reduction for speech enhancement...

  10. Virtual Microphones for Multichannel Audio Resynthesis

    Science.gov (United States)

    Mouchtaris, Athanasios; Narayanan, Shrikanth S.; Kyriakakis, Chris

    2003-12-01

    Multichannel audio offers significant advantages for music reproduction, including the ability to provide better localization and envelopment, as well as reduced imaging distortion. On the other hand, multichannel audio is a demanding media type in terms of transmission requirements. Often, bandwidth limitations prohibit transmission of multiple audio channels. In such cases, an alternative is to transmit only one or two reference channels and recreate the rest of the channels at the receiving end. Here, we propose a system capable of synthesizing the required signals from a smaller set of signals recorded in a particular venue. These synthesized "virtual" microphone signals can be used to produce multichannel recordings that accurately capture the acoustics of that venue. Applications of the proposed system include transmission of multichannel audio over the current Internet infrastructure and, as an extension of the methods proposed here, remastering existing monophonic and stereophonic recordings for multichannel rendering.

  11. Virtual Microphones for Multichannel Audio Resynthesis

    Directory of Open Access Journals (Sweden)

    Athanasios Mouchtaris

    2003-09-01

    Full Text Available Multichannel audio offers significant advantages for music reproduction, including the ability to provide better localization and envelopment, as well as reduced imaging distortion. On the other hand, multichannel audio is a demanding media type in terms of transmission requirements. Often, bandwidth limitations prohibit transmission of multiple audio channels. In such cases, an alternative is to transmit only one or two reference channels and recreate the rest of the channels at the receiving end. Here, we propose a system capable of synthesizing the required signals from a smaller set of signals recorded in a particular venue. These synthesized “virtual” microphone signals can be used to produce multichannel recordings that accurately capture the acoustics of that venue. Applications of the proposed system include transmission of multichannel audio over the current Internet infrastructure and, as an extension of the methods proposed here, remastering existing monophonic and stereophonic recordings for multichannel rendering.

  12. Demonstration of superconducting micromachined cavities

    Science.gov (United States)

    Brecht, T.; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J.

    2015-11-01

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  13. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  14. Micromachining for laser fusion pellet

    International Nuclear Information System (INIS)

    In laser nuclear fusion, the fusion reaction is induced by irradiating powerful laser beam on the pellets filled with fuel, and compressing and heating the fuel by implosion. At this time, in order to compress it up to high density, it is very important to compress as the spherical symmetry is maintained. The uniformity of the sphericity and wall thickness is required to be more than 98 %. Besides, in order to heighten the efficiency, it is necessary to limit the temperature of main fuel low, to ignite with hot sparks at the center, and to burn remaining fuel with the alpha particles which are generated by the nuclear fusion reaction there. For this purpose, various target structures have been proposed. The cryogenic target for ablative compression, the double shell target and the cannonball target are shown. In order to produce these targets, the development of the fuel spheres which have high uniformity and good sphericity in the required size, the development of the coating process with good surface finish which can do uniform coating at the rate of about 10 μm/h, the development of micromachining technology, the development of cryogenic technology and so on are necessary. Also the levitation of pellets by magnetic suspension method is explained. (K.I.)

  15. New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones

    DEFF Research Database (Denmark)

    Haas-Christensen, Jelena

    noise. Besides that, as MEMS microphones are easy to integrate with CMOS circuitry, CMOS circuit design gains importance because it can contribute to the overall improved performance of the system by introducing extra functionalities. Possible methods of sensing a signal from the microphone...... to enhance performance of MEMS microphones. A new enhanced performance microphone chip-scale package (CSP) with two microphone dies and the CMOS amplifier has been assembled being the microphone with several dB higher signal-to-noise-ratio comparing to existing microphone products on the market. Due...... to the compact packaging it occupies a small area as well....

  16. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  17. Modelling measurement microphones using BEM with visco-thermal losses

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller

    2012-01-01

    For many decades, models that can explain the behaviour of measurement condenser microphones have been proposed in the literature. These devices have an apparently simple working principle, a charged capacitor whose charge varies when one of its electrodes, the diaphragm, moves as a result of sound...... waves. However, measurement microphones must be manufactured very carefully due to their sensitivity to small changes of their physical parameters. There are different elements in a microphone, the diaphragm, the gap behind it, a back cavity, a vent for pressure equalization and an external medium. All...... these subsystems form a strongly coupled device that cannot be modelled properly as a superposition of submodels, but rather as a whole. For this reason, the challenge of microphone modelling is still an ongoing area of research. In this work, a newly developed Boundary Element Method implementation that includes...

  18. Study on a flexoelectric microphone using barium strontium titanate

    Science.gov (United States)

    Kwon, S. R.; Huang, W. B.; Zhang, S. J.; Yuan, F. G.; Jiang, X. N.

    2016-04-01

    In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

  19. Integrated micromachined transmission lines and endfire slotline antennas

    Science.gov (United States)

    Gearhart, Steven S.; Willke, Theodore L.; Onggosanusi, Eko N.

    1997-09-01

    An entirely new class of micromachined 3D microwave and millimeter-wave integrated circuits and antennas are being developed at the University of Wisconsin-Madison using a subset o the LIGA micromachining process. The deep x-ray lithography and metal plating portions of the LIGA process are used to precisely form tall metal structures on semiconductor and dielectric substrates. This micromachining process allows metal height to be included as a parameter in the design of integrated circuits, which will permit several important advancements in high frequency waveguiding circuits and integrated antennas. With appropriate thick- metal cross-sectional geometry, transmission line losses and dispersion may both be reduced on a given substrate. Vertical-walled metal structures allow increased control over element-to-element coupling for integrated coupled-line filters and couplers and result in very significant reductions in ohmic loss. It will be demonstrated that the first single-level coupled-line 3dB coupler can be fabricated using the LIGA process. In addition, the mechanical properties of the thick metal structures will be utilized in the fabrication of integrated antennas and transmission lines that are unsupported by a dielectric substrate. The elimination of the substrate beneath antennas reduces losses to substrate modes, and the elimination o the substrate beneath transmission line filters is necessary for extremely high Q integrated filters. This paper will present simulated loss results that demonstrate the advantages of thick metal transmission lines, measured results of a coupled-line bandpass filter, and a recently fabricated thick-metal tapered slotline antenna which extends nearly a centimeter off of the edge of a GaAs wafer.

  20. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  1. Optical measurement of micromachine engine performance

    Energy Technology Data Exchange (ETDEWEB)

    Holswade, S.C.; Dickey, F.M.

    1997-08-01

    Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

  2. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  3. The virtual microphone technique in active sound field control systems

    Science.gov (United States)

    Lampropoulos, Iraklis E.; Shimizu, Yasushi

    2003-04-01

    Active Sound Field Control (AFC) has been proven very useful in reverberation enhancement applications in large rooms. However, feedback control is required in order to eliminate peaks in the frequency response of the system. The present research closely follows the studies of Shimizu in AFC, in which smoothing of the rooms transfer function is achieved by averaging the impulse responses of multiple microphones. ``The virtual or rotating microphone technique'' reduces the number of microphones in the aforementioned AFC technology, while still achieving the same acoustical effects in the room. After the impulse responses at previously specified pairs of microphone positions are measured, the ratio of transfer functions for every pair is calculated, thus yielding a constant K. Next, microphones are removed and their impulse responses are reproduced by processing the incoming signal of each pair through a convolver, where the computed K constants have been previously stored. Band limiting, windowing and time variance effects are critical factors, in order to reduce incoherence effects and yield reliable approximations of inverse filters and consequently calculations of K. The project is implemented in a church lacking low frequency reverberation for music and makes use of 2 physical and 2 virtual microphones.

  4. Analyzing acoustic phenomena with a smartphone microphone

    Science.gov (United States)

    Kuhn, Jochen; Vogt, Patrik

    2013-02-01

    This paper describes how different sound types can be explored using the microphone of a smartphone and a suitable app. Vibrating bodies, such as strings, membranes, or bars, generate air pressure fluctuations in their immediate vicinity, which propagate through the room in the form of sound waves. Depending on the triggering mechanism, it is possible to differentiate between four types of sound waves: tone, sound, noise, and bang. In everyday language, non-experts use the terms "tone" and "sound" synonymously; however, from a physics perspective there are very clear differences between the two terms. This paper presents experiments that enable learners to explore and understand these differences. Tuning forks and musical instruments (e.g., recorders and guitars) can be used as equipment for the experiments. The data are captured using a smartphone equipped with the appropriate app (in this paper we describe the app Audio Kit for iOS systems ). The values captured by the smartphone are displayed in a screen shot and then viewed directly on the smartphone or exported to a computer graphics program for printing.

  5. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  6. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  7. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  8. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. PMID:24424468

  9. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  10. Electrostatic actuators fabricated by surface micromachining techniques

    OpenAIRE

    Legtenberg, Rob

    1996-01-01

    This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.

  11. Improved Open-Microphone Speech Recognition

    Science.gov (United States)

    Abrash, Victor

    2002-01-01

    Many current and future NASA missions make extreme demands on mission personnel both in terms of work load and in performing under difficult environmental conditions. In situations where hands are impeded or needed for other tasks, eyes are busy attending to the environment, or tasks are sufficiently complex that ease of use of the interface becomes critical, spoken natural language dialog systems offer unique input and output modalities that can improve efficiency and safety. They also offer new capabilities that would not otherwise be available. For example, many NASA applications require astronauts to use computers in micro-gravity or while wearing space suits. Under these circumstances, command and control systems that allow users to issue commands or enter data in hands-and eyes-busy situations become critical. Speech recognition technology designed for current commercial applications limits the performance of the open-ended state-of-the-art dialog systems being developed at NASA. For example, today's recognition systems typically listen to user input only during short segments of the dialog, and user input outside of these short time windows is lost. Mistakes detecting the start and end times of user utterances can lead to mistakes in the recognition output, and the dialog system as a whole has no way to recover from this, or any other, recognition error. Systems also often require the user to signal when that user is going to speak, which is impractical in a hands-free environment, or only allow a system-initiated dialog requiring the user to speak immediately following a system prompt. In this project, SRI has developed software to enable speech recognition in a hands-free, open-microphone environment, eliminating the need for a push-to-talk button or other signaling mechanism. The software continuously captures a user's speech and makes it available to one or more recognizers. By constantly monitoring and storing the audio stream, it provides the spoken

  12. On the use of mobile phones and wearable microphones for noise exposure measurements: Calibration and measurement accuracy

    Science.gov (United States)

    Dumoulin, Romain

    Despite the fact that noise-induced hearing loss remains the number one occupational disease in developed countries, individual noise exposure levels are still rarely known and infrequently tracked. Indeed, efforts to standardize noise exposure levels present disadvantages such as costly instrumentation and difficulties associated with on site implementation. Given their advanced technical capabilities and widespread daily usage, mobile phones could be used to measure noise levels and make noise monitoring more accessible. However, the use of mobile phones for measuring noise exposure is currently limited due to the lack of formal procedures for their calibration and challenges regarding the measurement procedure. Our research investigated the calibration of mobile phone-based solutions for measuring noise exposure using a mobile phone's built-in microphones and wearable external microphones. The proposed calibration approach integrated corrections that took into account microphone placement error. The corrections were of two types: frequency-dependent, using a digital filter and noise level-dependent, based on the difference between the C-weighted noise level minus A-weighted noise level of the noise measured by the phone. The electro-acoustical limitations and measurement calibration procedure of the mobile phone were investigated. The study also sought to quantify the effect of noise exposure characteristics on the accuracy of calibrated mobile phone measurements. Measurements were carried out in reverberant and semi-anechoic chambers with several mobiles phone units of the same model, two types of external devices (an earpiece and a headset with an in-line microphone) and an acoustical test fixture (ATF). The proposed calibration approach significantly improved the accuracy of the noise level measurements in diffuse and free fields, with better results in the diffuse field and with ATF positions causing little or no acoustic shadowing. Several sources of errors

  13. A low-noise/low-power preamplifier for capacitive microphones

    DEFF Research Database (Denmark)

    Fürst, Claus Erdmann

    1996-01-01

    A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A-weighted). ......-weighted). The amplifier is optimized for a capacitive microphone with a capacitance of 1.2 pF. The amplifier is fully integrated in a 0.7 μm n-well CMOS technology. Design details concerning noise performance are analytically described...

  14. Space discriminative function for microphone array robust speech recognition

    Institute of Scientific and Technical Information of China (English)

    Zhao Xianyu; Ou Zhijian; Wang Zuoying

    2005-01-01

    Based on W-disjoint orthogonality of speech mixtures, a space discriminative function was proposed to enumerate and localize competing speakers in the surrounding environments. Then, a Wiener-like post-filterer was developed to adaptively suppress interferences. Experimental results with a hands-free speech recognizer under various SNR and competing speakers settings show that nearly 69% error reduction can be obtained with a two-channel small aperture microphone array against the conventional single microphone baseline system. Comparisons were made against traditional delay-and-sum and Griffiths-Jim adaptive beamforming techniques to further assess the effectiveness of this method.

  15. Posture Adjustment of Microphone Based on Image Recognition in Automatic Welding System

    Institute of Scientific and Technical Information of China (English)

    Wang Jin'e; Gao Ping; Huang Haibo; Li Xiangpeng; Zheng Liang; Xu Wenkui; Chen Liguo

    2015-01-01

    As the requirements of production process is getting higher and higher with the reduction of volume ,mi-crophone production automation become an urgent need to improve the production efficiency .The most important part is studied and a precise algorithm of calculating the deviation angle of four types microphones is proposed , based on the feature extraction and visual detection .Pretreatment is performed to achieve the real-time microphone image .Canny edge detection and typical feature extraction are used to distinguish the four types of microphones , categorizing them as type M 1 and type M2 .And Hough transformation is used to extract the image features of mi-crophone .Therefore ,the deviation angle between the posture of microphone and the ideal posture in 2D plane can be achieved .Depending on the angle ,the system drives the motor to adjust posture of the microphone .The final purpose is to realize the high efficiency welding of four different types of microphones .

  16. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  17. Using hearing aid directional microphones and noise reduction algorithms to enhance cochlear implant performance

    OpenAIRE

    Chung, K; Zeng, F G; Waltzman, S

    2004-01-01

    Hearing aids and cochlear implants are two major hearing enhancement technologies but yet share little in research and development. The purpose of this study was to determine whether hearing aid directional microphones and noise reduction technologies could enhance cochlear implant users' speech understanding and ease of listening. Digital hearing aids serving as preprocessors were programmed to omni-directional microphone, directional microphone, and directional microphone plus noise reducti...

  18. Micromachined Horn Antenna Operating at 75 GHz

    OpenAIRE

    Grzegorczyk, Tomasz M.; Zurcher, Jean-François; Renaud, Philippe; Mosig, Juan R.

    2000-01-01

    We propose in this paper an integrated cavity-backed horn antenna, generalizing the well-known SSFIP (Strip-Slot-Foam-Inverted Patch) design, operating at 75 GHz. The antenna was optimized using a full-wave software and realized using micromachining technologies. The proposed structure can be used for high radiation ef-ficiency antennas and arrays in the millimeter-wave band, since surface waves are inherently suppressed by the use of a metallic horn and a cavity configuration.

  19. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  20. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  1. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  2. 78 FR 38734 - Certain Silicon Microphone Packages and Products Containing Same; Notice of Receipt of Complaint...

    Science.gov (United States)

    2013-06-27

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same; Notice of Receipt of Complaint... complaint entitled Certain Silicon Microphone Packages and Products Containing Same, DN 2962; the Commission... importation of certain silicon microphone packages and products containing same. The complaint names...

  3. 78 FR 45272 - Certain Silicon Microphone Packages and Products Containing Same Institution of Investigation...

    Science.gov (United States)

    2013-07-26

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same Institution of Investigation... importation, and the sale within the United States after importation of certain silicon microphone packages... importation, or the sale within the United States after importation of certain silicon microphone packages...

  4. On experimental determination of the random-incidence response of microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2007-01-01

    The random-incidence sensitivity of a microphone is defined as the ratio of the output voltage to the sound pressure that would exist at the position of the acoustic center of the microphone in the absence of the microphone in a sound field with incident plane waves coming from all directions. Th...

  5. On the interference between the two microphones in free-field reciprocity calibration

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn;

    2004-01-01

    One of the fundamental assumptions in free-field reciprocity calibration of microphones is that the microphones can be substituted by point sources at the positions where the acoustic centers are located. However, in practice the microphones have finite dimensions and, at the distance and in the ...

  6. Measurement of Gravitational Acceleration Using a Computer Microphone Port

    Science.gov (United States)

    Khairurrijal; Eko Widiatmoko; Srigutomo, Wahyu; Kurniasih, Neny

    2012-01-01

    A method has been developed to measure the swing period of a simple pendulum automatically. The pendulum position is converted into a signal frequency by employing a simple electronic circuit that detects the intensity of infrared light reflected by the pendulum. The signal produced by the electronic circuit is sent to the microphone port and…

  7. Chip-size-packaged silicon microphones [for hearing instruments

    DEFF Research Database (Denmark)

    Müllenborn, Matthias; Rombach, Pirmin; Klein, Udo;

    2001-01-01

    bonding. The devices are fully encapsulated and provided with a well-determined interface to the environment. The integrated microphones operate at a bias of 1.5 V and are expected to reach a sensitivity of 5 mV/Pa, an A-weighted equivalent input noise of 24 dB sound pressure level, and a power...

  8. Free-field calibration of measurement microphones at high frequencies

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Torras Rosell, Antoni;

    2011-01-01

    Measurement microphones are typically calibrated in a free field at frequencies up to 50 kHz. This is a sufficiently high frequency for the most of sound measurement applications related with noise assessment. However, other applications such as assessment of the noise emitted by ultrasound clean...

  9. Static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1996-01-01

    The sensitivity of condenser measurement microphones depends on the environmental conditions due to the changes in the acoustic properties of the enclosed air between diaphragm and back-electrode and in the cavity behind the backelectrode. A theoretical investigation has been performed based on a...

  10. The static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    The sensitivity of condenser measurement microphones depends on the environmental conditions due to the changes in the acoustic properties of the air enclosed between diaphragm and backelectrode and in the cavity behind the backelectrode. A theoretical investigation has been performed based on an...

  11. Reconstruction of sound fields with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Walton, Tim

    2014-01-01

    waves traveling in any direction. In particular, rigid sphere microphone arrays are robust, and have the favorable property that the scattering introduced by the array can be compensated for - making the array virtually transparent. This study examines a recently proposed sound field reconstruction...

  12. Design and analysis of diaphragms in dynamic microphones

    Directory of Open Access Journals (Sweden)

    Zi-Gui Huang

    2015-07-01

    Full Text Available Most contemporary high-end microphones are dynamic microphones, adopting the most basic electromagnetic transduction principles. This study investigated the diaphragm structures of dynamic microphones. The diaphragms were composed of polyimide material, and the boundary settings required for actual operation were provided using finite element model analysis software. The characteristic frequencies caused by grooving variations on the three-dimensional diaphragm were analyzed for the various groove shapes and number. The groove angles and width variations were examined based on the optimal groove shape selected in the aforementioned analysis, and the effects of these shapes were determined based on the analytical results. Acoustic waves cause thin films to vibrate, forming the working principle behind dynamic microphones. The thin film drives a coil to vibrate in a magnetic field and cuts the line of magnetic force, subsequently producing a voltage on both ends of the coil. This audio-frequency-inducted voltage represents an acoustic wave message. The finite element model analysis software was used to conduct electromagnetic induction simulations; the sound source was fed to the diaphragm to drive the coil. The coil vibrations caused the line of magnetic force to be cut, and the final voltages produced were examined and compared.

  13. Feasible pickup from intact ossicular chain with floating piezoelectric microphone

    Directory of Open Access Journals (Sweden)

    Kang Hou-Yong

    2012-02-01

    Full Text Available Abstract Objectives Many microphones have been developed to meet with the implantable requirement of totally implantable cochlear implant (TICI. However, a biocompatible one without destroying the intactness of the ossicular chain still remains under investigation. Such an implantable floating piezoelectric microphone (FPM has been manufactured and shows an efficient electroacoustic performance in vitro test at our lab. We examined whether it pick up sensitively from the intact ossicular chain and postulated whether it be an optimal implantable one. Methods Animal controlled experiment: five adult cats (eight ears were sacrificed as the model to test the electroacoustic performance of the FPM. Three groups were studied: (1 the experiment group (on malleus: the FPM glued onto the handle of the malleus of the intact ossicular chains; (2 negative control group (in vivo: the FPM only hung into the tympanic cavity; (3 positive control group (Hy-M30: a HiFi commercial microphone placed close to the site of the experiment ear. The testing speaker played pure tones orderly ranged from 0.25 to 8.0 kHz. The FPM inside the ear and the HiFi microphone simultaneously picked up acoustic vibration which recorded as .wav files to analyze. Results The FPM transformed acoustic vibration sensitively and flatly as did the in vitro test across the frequencies above 2.0 kHz, whereas inefficiently below 1.0 kHz for its overloading mass. Although the HiFi microphone presented more efficiently than the FPM did, there was no significant difference at 3.0 kHz and 8.0 kHz. Conclusions It is feasible to develop such an implantable FPM for future TICIs and TIHAs system on condition that the improvement of Micro Electromechanical System and piezoelectric ceramic material technology would be applied to reduce its weight and minimize its size.

  14. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki; Hino; Takeru; Amano; Wiganes; Janto; Fumio; Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.

  15. Technology and applications of micromachined silicon adaptive mirrors

    NARCIS (Netherlands)

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  16. Ductile mode electrochemical oxidation assisted micromachining for glassy carbon

    International Nuclear Information System (INIS)

    Recently, a new mechanical machining process using electrochemical oxidation was reported. Electrochemical oxidation assisted micromachining was applied to the machining of glassy carbon. The material removal process of the electrochemical oxidation assisted micromachining consists of repeated cycles of oxidation followed by removal of the oxide layer. In this paper, we experimentally investigate and compare the critical chip thickness for ductile mode cutting in mechanical machining and electrochemical oxidation assisted micromachining of glassy carbon. The theoretical critical chip thickness is calculated for mechanical machining of glassy carbon and experimentally verified. The effect of electrochemical oxidation on the critical chip thickness for ductile mode micromachining is also studied for glassy carbon. It is found that the critical chip thickness is increased for the electrochemical oxidation assisted micromachining. (paper)

  17. Surface micromachined electrostatically actuated micro peristaltic pump

    OpenAIRE

    Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu-Chong

    2004-01-01

    An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and a...

  18. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  19. Active micromachines: Microfluidics powered by mesoscale turbulence

    Science.gov (United States)

    Thampi, Sumesh P.; Doostmohammadi, Amin; Shendruk, Tyler N.; Golestanian, Ramin; Yeomans, Julia M.

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  20. Active micromachines: Microfluidics powered by mesoscale turbulence.

    Science.gov (United States)

    Thampi, Sumesh P; Doostmohammadi, Amin; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-07-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  1. A self-steering close-talking microphone array

    Institute of Scientific and Technical Information of China (English)

    PENG Ke; YANG Xinfeng; XU Boling

    2005-01-01

    For communication in extremely noisy environments, close-talking microphone arrays are useful. Differential microphone array systems possessing excellent nearfield directivity and strong farfield-noise reduction capability are very suitable for close-talking situations. In order to improve the focusing effect at the desired bearing in the nearfield, we propose a novel self-steering system of closetalking arrays with the first-order differential sub-arrays in this paper. Calculations of directivity patterns and directivity factors show that when a kind of optimized beamforming technique is adopted even small arrays with a focusing configuration will exhibit a satisfactory nearfield directivity which is electronically steerable within a specific range. The superiority of the proposed array system is verified by experiments with real acoustic data.

  2. Factors affecting the performance of large-aperture microphone arrays

    Science.gov (United States)

    Silverman, Harvey F.; Patterson, William R.; Sachar, Joshua

    2002-05-01

    Large arrays of microphones have been proposed and studied as a possible means of acquiring data in offices, conference rooms, and auditoria without requiring close-talking microphones. When such an array essentially surrounds all possible sources, it is said to have a large aperture. Large-aperture arrays have attractive properties of spatial resolution and signal-to-noise enhancement. This paper presents a careful comparison of theoretical and measured performance for an array of 256 microphones using simple delay-and-sum beamforming. This is the largest currently functional, all digital-signal-processing array that we know of. The array is wall-mounted in the moderately adverse environment of a general-purpose laboratory (8 m×8 m×3 m). The room has a T60 reverberation time of 550 ms. Reverberation effects in this room severely impact the array's performance. However, the width of the main lobe remains comparable to that of a simplified prediction. Broadband spatial resolution shows a single central peak with 10 dB gain about 0.4 m in diameter at the -3 dB level. Away from that peak, the response is approximately flat over most of the room. Optimal weighting for signal-to-noise enhancement degrades the spatial resolution minimally. Experimentally, we verify that signal-to-noise gain is less than proportional to the square root of the number of microphones probably due to the partial correlation of the noise between channels, to variation of signal intensity with polar angle about the source, and to imperfect correlation of the signal over the array caused by reverberations. We show measurements of the relative importance of each effect in our environment.

  3. Factors affecting the performance of large-aperture microphone arrays.

    Science.gov (United States)

    Silverman, Harvey F; Patterson, William R; Sachar, Joshua

    2002-05-01

    Large arrays of microphones have been proposed and studied as a possible means of acquiring data in offices, conference rooms, and auditoria without requiring close-talking microphones. When such an array essentially surrounds all possible sources, it is said to have a large aperture. Large-aperture arrays have attractive properties of spatial resolution and signal-to-noise enhancement. This paper presents a careful comparison of theoretical and measured performance for an array of 256 microphones using simple delay-and-sum beamforming. This is the largest currently functional, all digital-signal-processing array that we know of. The array is wall-mounted in the moderately adverse environment of a general-purpose laboratory (8 m x 8 m x 3 m). The room has a T60 reverberation time of 550 ms. Reverberation effects in this room severely impact the array's performance. However, the width of the main lobe remains comparable to that of a simplified prediction. Broadband spatial resolution shows a single central peak with 10 dB gain about 0.4 m in diameter at the -3 dB level. Away from that peak, the response is approximately flat over most of the room. Optimal weighting for signal-to-noise enhancement degrades the spatial resolution minimally. Experimentally, we verify that signal-to-noise gain is less than proportional to the square root of the number of microphones probably due to the partial correlation of the noise between channels, to variation of signal intensity with polar angle about the source, and to imperfect correlation of the signal over the array caused by reverberations. We show measurements of the relative importance of each effect in our environment. PMID:12051434

  4. Noise Reduction with Microphone Arrays for Speaker Identification

    Energy Technology Data Exchange (ETDEWEB)

    Cohen, Z

    2011-12-22

    Reducing acoustic noise in audio recordings is an ongoing problem that plagues many applications. This noise is hard to reduce because of interfering sources and non-stationary behavior of the overall background noise. Many single channel noise reduction algorithms exist but are limited in that the more the noise is reduced; the more the signal of interest is distorted due to the fact that the signal and noise overlap in frequency. Specifically acoustic background noise causes problems in the area of speaker identification. Recording a speaker in the presence of acoustic noise ultimately limits the performance and confidence of speaker identification algorithms. In situations where it is impossible to control the environment where the speech sample is taken, noise reduction filtering algorithms need to be developed to clean the recorded speech of background noise. Because single channel noise reduction algorithms would distort the speech signal, the overall challenge of this project was to see if spatial information provided by microphone arrays could be exploited to aid in speaker identification. The goals are: (1) Test the feasibility of using microphone arrays to reduce background noise in speech recordings; (2) Characterize and compare different multichannel noise reduction algorithms; (3) Provide recommendations for using these multichannel algorithms; and (4) Ultimately answer the question - Can the use of microphone arrays aid in speaker identification?

  5. Microphone Array Speaker Localizers Using Spatial-Temporal Information

    Directory of Open Access Journals (Sweden)

    Dvorkind Tsvi Gregory

    2006-01-01

    Full Text Available A dual-step approach for speaker localization based on a microphone array is addressed in this paper. In the first stage, which is not the main concern of this paper, the time difference between arrivals of the speech signal at each pair of microphones is estimated. These readings are combined in the second stage to obtain the source location. In this paper, we focus on the second stage of the localization task. In this contribution, we propose to exploit the speaker's smooth trajectory for improving the current position estimate. Three localization schemes, which use the temporal information, are presented. The first is a recursive form of the Gauss method. The other two are extensions of the Kalman filter to the nonlinear problem at hand, namely, the extended Kalman filter and the unscented Kalman filter. These methods are compared with other algorithms, which do not make use of the temporal information. An extensive experimental study demonstrates the advantage of using the spatial-temporal methods. To gain some insight on the obtainable performance of the localization algorithm, an approximate analytical evaluation, verified by an experimental study, is conducted. This study shows that in common TDOA-based localization scenarios—where the microphone array has small interelement spread relative to the source position—the elevation and azimuth angles can be accurately estimated, whereas the Cartesian coordinates as well as the range are poorly estimated.

  6. Condenser microphone with small size and high sensitivity Using a circular diaphragm with fixed center

    Directory of Open Access Journals (Sweden)

    Nastaran Nademi

    2016-01-01

    Full Text Available In this paper, a new single-chip MEMS capacitor microphone on a silicon wafer by minimizing the size and the reduction of mechanical strength using a circular diaphragm with a fixed center is proposed. In the proposed microphone, the diaphragm includes a number of holes to pass the air through the gap between the back plate and diaphragm, and thus reduces the damping of the sound from the microphone. Novelty of this method, creating a circular microphone with fixed center, which the diameter of diaphragm is less than the conventional condenser microphone. At first, the mechanical analysis was conducted on microphone diaphragm in order to achieve the pull-in voltage. The pull-in voltage of the proposed circular microphone is 14 volts. According to the obtained pull-in voltage, the bias voltage were applied to the microphone, and various parameters such as capacitance and sensitivity were measured. Based on the simulation results of COMSOL, the proposed microphone with diaphragm diameter of 400 μm and a thickness of 1.5 μm, the sensitivity of -23 dB is shown. In comparison with previous works, the proposed microphone with lower supply voltage is provided the better frequency performance, and higher sensitivity, in order to sense the sound.

  7. Microscope Cells Containing Multiple Micromachined Wells

    Science.gov (United States)

    Turner, Walter; Skupinski, Robert

    2003-01-01

    Tech Briefs, May 2003 19 Manufacturing Microscope Cells Containing Multiple Micromachined Wells The cost per cell has been reduced substantially. John H. Glenn Research Center, Cleveland, Ohio An improved design for multiple-well microscope cells and an associated improved method of fabricating them have been devised. [As used here, "well" denotes a cavity that has a volume of about 1 or 2 L and that is used to hold a sample for examination under a microscope. As used here, "cell" denotes a laminate, based on a standard 1- by 3-in. (2.54- by 7.62-cm) microscope slide, that comprises (1) the slide as the lower layer, (2) an intermediate layer that contains holes that serve as the wells, and (3) a top layer that either consists of, or is similar to, a standard microscope-slide cover slip.] The improved design and method of fabrication make it possible to increase (relative to a prior design and method of fabrication) the number of wells per cell while reducing the fabrication loss and reducing the cost per cell to about one-tenth of the prior value. In the prior design and method, the slide, well, and cover-slip layers were made from silicate glass. The fabrication of each cell was a labor-intensive process that included precise cutting and grinding of the glass components, fusing of the glass components, and then more grinding and polishing to obtain desired dimensions. Cells of the prior design were expensive and fragile, the rate of loss in fabrication was high, and the nature of the glass made it difficult to increase the number of cells per well. Efforts to execute alternative prior designs in plastic have not yielded satisfactory results because, for typical applications, plastics are not sufficiently thermally or chemically stable, not sufficiently optically clear, and/or not hard enough to resist scratching. The figure depicts a cell of the present improved type. The slide and cover-slip layers are made of a low-thermal-expansion glass (Pyrex(TradeMark) or

  8. Methods for Room Acoustic Analysis and Synthesis using a Monopole-Dipole Microphone Array

    Science.gov (United States)

    Abel, J. S.; Begault, Durand R.; Null, Cynthia H. (Technical Monitor)

    1998-01-01

    In recent work, a microphone array consisting of an omnidirectional microphone and colocated dipole microphones having orthogonally aligned dipole axes was used to examine the directional nature of a room impulse response. The arrival of significant reflections was indicated by peaks in the power of the omnidirectional microphone response; reflection direction of arrival was revealed by comparing zero-lag crosscorrelations between the omnidirectional response and the dipole responses to the omnidirectional response power to estimate arrival direction cosines with respect to the dipole axes.

  9. Micromachined dual input axis rate gyroscope

    Science.gov (United States)

    Juneau, Thor Nelson

    The need for inexpensive yet reliable angular rate sensors in fields ranging from automotive to consumer electronics has motivated prolific micromachined rate gyroscope research. The vast majority of research has focused on single input axis rate gyroscopes based upon either translational resonance, such as tuning forks, or structural mode resonance, such as vibrating rings. However, this work presents a novel, contrasting approach based on angular resonance of a rotating rigid rotor suspended by torsional springs. The inherent symmetry of the circular design allows angular rate measurement about two axes simultaneously, hence the name micromachined dual-axis rate gyroscope. The underlying theory of operation, mechanical structure design optimization, electrical interface circuitry, and signal processing are described in detail. Several operational versions were fabricated using two different fully integrated surface micromachining processes as proof of concept. The heart of the dual-axis rate gyroscope is a ˜2 mum thick polysilicon disk or rotor suspended above the substrate by a four beam suspension. When this rotor in driven into angular oscillation about the axis perpendicular to the substrate, a rotation rate about the two axes parallel to the substrate invokes an out of plane rotor tilting motion due to Coriolis acceleration. This tilting motion is capacitively measured and on board integrated signal processing provides two output voltages proportional to angular rate input about the two axes parallel to the substrate. The design process begins with the derivation of gyroscopic dynamics. The equations suggest that tuning sense mode frequencies to the drive oscillation frequency can vastly increase mechanical sensitivity. Hence the supporting four beam suspension is designed such that electrostatic tuning can match modes despite process variations. The electrostatic tuning range is limited only by rotor collapse to the substrate when tuning-voltage induced

  10. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...... resolution it is however necessary to develop new fabrication methods that allows fabrication of transducer elements with smaller dimensions. By using microfabrication technology it is possible to push the dimensions down and provide higher design flexibility. This project is part of a large ultrasound...... project and collaboration with a lot of partners to improve medical ultrasound imaging. The focus in this part of the project is to design, fabricate and characterize 1D CMUT arrays. Two versions of 1D transducers are made, one at Stanford University and one at DTU. Electrical and acoustical...

  11. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  12. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  13. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  14. Multi-microphone adaptive array augmented with visual cueing.

    Science.gov (United States)

    Gibson, Paul L; Hedin, Dan S; Davies-Venn, Evelyn E; Nelson, Peggy; Kramer, Kevin

    2012-01-01

    We present the development of an audiovisual array that enables hearing aid users to converse with multiple speakers in reverberant environments with significant speech babble noise where their hearing aids do not function well. The system concept consists of a smartphone, a smartphone accessory, and a smartphone software application. The smartphone accessory concept is a multi-microphone audiovisual array in a form factor that allows attachment to the back of the smartphone. The accessory will also contain a lower power radio by which it can transmit audio signals to compatible hearing aids. The smartphone software application concept will use the smartphone's built in camera to acquire images and perform real-time face detection using the built-in face detection support of the smartphone. The audiovisual beamforming algorithm uses the location of talking targets to improve the signal to noise ratio and consequently improve the user's speech intelligibility. Since the proposed array system leverages a handheld consumer electronic device, it will be portable and low cost. A PC based experimental system was developed to demonstrate the feasibility of an audiovisual multi-microphone array and these results are presented. PMID:23366063

  15. MEMS Microphone Array Sensor for Air-Coupled Impact-Echo.

    Science.gov (United States)

    Groschup, Robin; Grosse, Christian U

    2015-01-01

    Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost effective, less sensitive to undesired effects like acoustic noise and has an optimized sensitivity for signals that need to be extracted for IE data interpretation. The proposed sensing strategy is justified with findings from numerical simulations, showing that the IE resonance in plate like structures causes coherent surface displacements on the specimen under test in an area around the impact location. Therefore, by placing several MEMS microphones on a sensor array board, the IE resonance is easier to be identified in the recorded spectra than with single point microphones or contact type transducers. A comparative measurement between the array sensor, a conventional accelerometer and a measurement microphone clearly shows the suitability of MEMS type microphones and the advantages of using these microphones in an array arrangement for IE. The MEMS microphone array will make air-coupled IE measurements faster and more reliable.

  16. On determination of microphone response and other parameters by a hybrid experimental and numerical method

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn; Rasmussen, Knud

    2008-01-01

    Typically, numerical calculations of the pressure, free-field and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel func...

  17. A time-selective technique for free-field reciprocity calibration of condenser microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2003-01-01

    In normal practice, microphones are calibrated in a closed coupler where the sound pressure is uniformly distributed over the diaphragm. Alternatively, microphones can be placed in a free field, although in that case the distribution of sound pressure over the diaphragm will change as a result of...

  18. A note on determination of the diffuse-field sensitivity of microphones using the reciprocity technique

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn

    2008-01-01

    The diffuse-field response of a microphone is usually obtained by adding a random-incidence correction to the pressure response of the microphone. However, the random-incidence correction is determined from a relative measurement, and its accuracy depends not only on the relative response at all ...

  19. Hybrid method for determining the parameters of condenser microphones from measured membrane velocities and numerical calculations

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2009-01-01

    Typically, numerical calculations of the pressure, free-field, and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel fun...

  20. Robustness of a Mixed-Order Ambisonics Microphone Array for Sound Field Reproduction

    DEFF Research Database (Denmark)

    Marschall, Marton; Favrot, Sylvain Emmanuel; Buchholz, Jörg

    2012-01-01

    Spherical microphone arrays can be used to capture and reproduce the spatial characteristics of acoustic scenes. A mixed-order Ambisonics (MOA) approach was recently proposed to improve the horizontal spatial resolution of microphone arrays with a given number of transducers. In this paper, the p...

  1. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  2. Numerical design and testing of a sound source for secondary calibration of microphones using the Boundary Element Method

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller; Barrera Figueroa, Salvador

    2009-01-01

    Secondary calibration of microphones in free field is performed by placing the microphone under calibration in an anechoic chamber with a sound source, and exposing it to a controlled sound field. A calibrated microphone is also measured as a reference. While the two measurements are usually made...

  3. A practical implementation of microphone free-field comparison calibration according to the standard IEC 61094-8

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras Rosell, Antoni; Rasmussen, Knud;

    2012-01-01

    An international standard concerned with the calibration of microphones in a free field by comparison has recently been published. The standard contemplates two main calibration methodologies for determining the sensitivity of a microphone under test when compared against a reference microphone...

  4. Plane-wave decomposition by spherical-convolution microphone array

    Science.gov (United States)

    Rafaely, Boaz; Park, Munhum

    2001-05-01

    Reverberant sound fields are widely studied, as they have a significant influence on the acoustic performance of enclosures in a variety of applications. For example, the intelligibility of speech in lecture rooms, the quality of music in auditoria, the noise level in offices, and the production of 3D sound in living rooms are all affected by the enclosed sound field. These sound fields are typically studied through frequency response measurements or statistical measures such as reverberation time, which do not provide detailed spatial information. The aim of the work presented in this seminar is the detailed analysis of reverberant sound fields. A measurement and analysis system based on acoustic theory and signal processing, designed around a spherical microphone array, is presented. Detailed analysis is achieved by decomposition of the sound field into waves, using spherical Fourier transform and spherical convolution. The presentation will include theoretical review, simulation studies, and initial experimental results.

  5. High frequency microphone measurements for transition detection on airfoils

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given...... to transition detection. It is argued that the transition point can be detected by observing the increase in the mean of the Fourier spectre and that thismethod is very stable froma numerical point of view. Other important issues are also discussed, e.g. the variation of pressure standard deviations (sound...... pressure) and Tollmien-Schlichting frequencies. The tests were made at Reynolds and Mach numbers corresponding to the operating conditions of a typical horizontal axis wind turbine (HAWT). The Risø B1-18, Risø C2-18 and NACA0015 profiles were tested and the measured transition points are reported....

  6. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  7. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    International Nuclear Information System (INIS)

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

  8. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  9. High-performance micromachined gyroscope with a slanted suspension cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi, E-mail: Dingbangxiao@yahoo.com.c [Microsystem Laboratory, National University of Defense Technology, Changsha 410073 (China)

    2009-04-15

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of +-100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.

  10. High-performance micromachined gyroscope with a slanted suspension cantilever

    Institute of Scientific and Technical Information of China (English)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi

    2009-01-01

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h.

  11. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G.; Sniegowski, Jeffry J.; Montague, Stephen

    2003-09-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  12. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G. (Albuquerque, NM); Fleming, legal representative, Carol (Burbank, CA); Sniegowski, Jeffry J. (Tijeras, NM); Montague, Stephen (Albuquerque, NM)

    2011-08-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  13. Creation of a metallic micromachined chain mail fabric

    Science.gov (United States)

    Engel, Jonathan; Liu, Chang

    2007-03-01

    The fabrication and testing of a metallic micromachined fabric is presented. The fabric, similar in construction to chain mail, consists of small rings and links built upon a planar substrate and then released to yield a sheet that can bend along two axes and drape over curved surfaces. This micromachined fabric exhibits unique mechanical and electrical properties owing to the geometry and materials employed. Tests of electrical conduction under stress and mechanical failure strength are presented. Resistance of the chain mail is found to vary over nearly seven orders of magnitude under mechanical deformation. Combined with existing techniques, the new fabric holds promise to allow fully engineered smart textiles.

  14. Sound-field reconstruction performance of a mixed-order Ambisonics microphone array

    DEFF Research Database (Denmark)

    Marschall, Marton; Chang, Jiho

    2013-01-01

    instruments and mobile phones. Previously, a mixed-order Ambisonics (MOA) approach was proposed to improve the horizontal spatial resolution of spherical arrays. This was achieved by increasing the number of microphones near the horizontal plane while keeping the total number of transducers fixed...... microphone were used to simulate self-noise, sensitivity, and phase response variations between the microphones. To quantify the reconstruction error and the "sweet area" as a function of source elevation, the reconstructed sound field based on a simulated array measurement was compared to the reference...

  15. A New Calibration Method for Microphone Array with Gain, Phase, and Position Errors

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    Microphone array can be used in sound source localization and separation. But gain, phase, and position errors can seriously influence the performance of localization algorithms such as multiple signal classification (MUSIC) algorithm. In this paper, a new calibration method for microphone array with gain, phase, and position errors is proposed. Unlike traditional calibration methods for antenna array, the proposed method can be used in the broadband and near-field signal model such as microphone array with arbitrary sensor geometries in one plane. Computer simulations are presented and simulation results show the new method having good performance.

  16. Robust Speaker Recognition with Combined Use of Acoustic and Throat Microphone Speech

    DEFF Research Database (Denmark)

    Sahidullah, Md; Gonzalez Hautamäki, Rosa; Thomsen, Dennis Alexander Lehmann;

    2016-01-01

    Accuracy of automatic speaker recognition (ASV) systems degrades severely in the presence of background noise. In this paper, we study the use of additional side information provided by a body-conducted sensor, throat microphone. Throat microphone signal is much less affected by background noise...... of this additional information for both speech activity detection, feature extraction and fusion of the acoustic and throat microphone signals. We collect a pilot database consisting of 38 subjects including both clean and noisy sessions. We carry out speaker verification experiments using Gaussian mixture model...

  17. Acoustic Beam Forming Array Using Feedback-Controlled Microphones for Tuning and Self-Matching of Frequency Response

    Science.gov (United States)

    Radcliffe, Eliott (Inventor); Naguib, Ahmed (Inventor); Humphreys, Jr., William M. (Inventor)

    2014-01-01

    A feedback-controlled microphone includes a microphone body and a membrane operatively connected to the body. The membrane is configured to be initially deflected by acoustic pressure such that the initial deflection is characterized by a frequency response. The microphone also includes a sensor configured to detect the frequency response of the initial deflection and generate an output voltage indicative thereof. The microphone additionally includes a compensator in electric communication with the sensor and configured to establish a regulated voltage in response to the output voltage. Furthermore, the microphone includes an actuator in electric communication with the compensator, wherein the actuator is configured to secondarily deflect the membrane in opposition to the initial deflection such that the frequency response is adjusted. An acoustic beam forming microphone array including a plurality of the above feedback-controlled microphones is also disclosed.

  18. 78 FR 21977 - Certain Silicon Microphone Packages and Products Containing the Same; Commission Determination...

    Science.gov (United States)

    2013-04-12

    ...,049, 77 FR 2087 (Jan. 13, 2012). The respondents are Analog Devices Inc. of Norwood, Massachusetts... From the Federal Register Online via the Government Publishing Office INTERNATIONAL TRADE COMMISSION Certain Silicon Microphone Packages and Products Containing the Same; Commission Determination...

  19. On the influence of microphone array geometry on HRTF-based Sound Source Localization

    DEFF Research Database (Denmark)

    Farmani, Mojtaba; Pedersen, Michael Syskind; Tan, Zheng-Hua;

    2015-01-01

    algorithms; the more similar the HRTFs of different angles to the HRTF of the target angle, the worse the performance. However, we also show how the microphone array geometry can assist in differentiating between the HRTFs of the different angles, thereby improving performance of HRTF-based SSL algorithms....... Furthermore, to demonstrate the analysis results, we show the impact of HRTFs similarities and microphone array geometry on an exemplary HRTF-based SSL algorithm, called MLSSL. This algorithm is well-suited for this purpose as it allows to estimate the Direction-of-Arrival (DoA) of the target sound using any...... number of microphones and any geometries of the microphone array around the head....

  20. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a microma

  1. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  2. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, J.G.E.; Bomer, J.G.; Berg, van den A.; Li, X.; Ottens, M.; Wielen, van der L.A.M.; Dedem, van G.W.K.; Leeuwen, M.; Gulik, van W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  3. Dynamics of micromachined vibrating gimbal and wheel gyroscope

    Institute of Scientific and Technical Information of China (English)

    TijingCAI

    2000-01-01

    We deduce dynamic equations of micromachined vibrating gimbal and wheel gyroscope and give an approximate solution of enough accuracy. The comparison between the approximate solution and the solution used often in the literature is given. According to property of the approximate solution a decoupled two-axes gyroscope will be composed of two single-axes gyroscopes.

  4. NEW FREQUENCY DOMAIN POST-FILTERS FOR NOISE CANCELLATION USING TWO CLOSELY SPACED MICROPHONES

    OpenAIRE

    Djendi, Mohamed; Gilloire, A.; Pascal, Scalart

    2009-01-01

    International audience This paper addresses the problem of speech enhancement in a moving car through a blind source separation (BSS) scheme involving two closely spaced microphones. We propose two frequency domain methods to reduce the distortion caused by the forward BSS structure, which is most important when microphones are closely spaced. Both methods aim at estimating post-filters to compensate for the distortion by equalization. The first method is based on an open-loop estimation. ...

  5. MEMS Microphone Array Sensor for Air-Coupled Impact-Echo

    OpenAIRE

    Robin Groschup; Grosse, Christian U.

    2015-01-01

    Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost effective, less sensitive to undesired effects like acoustic noise and has an optimized sensitivity fo...

  6. Wireless microphone communication system telephonics P/N 484D000-1

    Science.gov (United States)

    1980-01-01

    The wireless microphone is a lightweight, portable, wireless voice communications device for use by the crew of the space shuttle orbiter. The wireless microphone allows the crew to have normal hands-free voice communication while they are performing various mission activities. The unit is designed to transmit at 455 or 500 kilohertz and employs narrow band FM modulation. Two orthogonally placed antennas are used to insure good reception at the receiver.

  7. A Dual-Microphone Speech Enhancement Algorithm Based on the Coherence Function

    OpenAIRE

    Yousefian, Nima; Loizou, Philipos C.

    2011-01-01

    A novel dual-microphone speech enhancement technique is proposed in the present paper. The technique utilizes the coherence between the target and noise signals as a criterion for noise reduction and can be generally applied to arrays with closely-spaced microphones, where noise captured by the sensors is highly correlated. The proposed algorithm is simple to implement and requires no estimation of noise statistics. In addition, it offers the capability of coping with multiple interfering sou...

  8. Analysis of Transients for Brass Instruments Under Playing Conditions Using Multiple Microphones

    OpenAIRE

    Kemp, Jonathan; LOGIE, Shona; Chick, John; Smith, Richard; Campbell, Murray

    2010-01-01

    National audience This work investigates the development of a novel multiple microphone technique for analysis of the acoustical behaviour of brass instruments under playing conditions. In the current work, multiple microphones are deployed within a cylindrical section of the bore of a brass instrument. The technique allows for measurement of the instrument during playing, or while excited by a loudspeaker signal, and allows for a more robust analysis of the transfer of acoustic energy bet...

  9. Indirect calibration of a large microphone array for in-duct acoustic measurements

    Science.gov (United States)

    Leclère, Q.; Pereira, A.; Finez, A.; Souchotte, P.

    2016-08-01

    This paper addresses the problem of in situ calibration of a pin hole-mounted microphone array for in-duct acoustic measurements. One approach is to individually measure the frequency response of each microphone, by submitting the probe to be calibrated and a reference microphone to the same pressure field. Although simple, this task may be very time consuming for large microphone arrays and eventually suffer from lack of access to microphones once they are installed on the test bench. An alternative global calibration procedure is thus proposed in this paper. The approach is based on the fact that the acoustic pressure can be expanded onto an analytically known spatial basis. A projection operator is defined allowing the projection of measurements onto the duct modal basis. The main assumption of the method is that the residual resulting from the difference between actual and projected measurements is mainly dominated by calibration errors. An iterative procedure to estimate the calibration factors of each microphone is proposed and validated through an experimental set-up. In addition, it is shown that the proposed scheme allows an optimization of physical parameters such as the sound speed and parameters associated to the test bench itself, such as the duct radius or the termination reflection coefficient.

  10. A New Trans-Tympanic Microphone Approach for Fully Implantable Hearing Devices

    Directory of Open Access Journals (Sweden)

    Seong Tak Woo

    2015-09-01

    Full Text Available Fully implantable hearing devices (FIHDs have been developed as a new technology to overcome the disadvantages of conventional acoustic hearing aids. The implantable microphones currently used in FIHDs, however, have difficulty achieving high sensitivity to environmental sounds, low sensitivity to body noise, and ease of implantation. In general, implantable microphones may be placed under the skin in the temporal bone region of the skull. In this situation, body noise picked up during mastication and touching can be significant, and the layer of skin and hair can both attenuate and distort sounds. The new approach presently proposed is a microphone implanted at the tympanic membrane. This method increases the microphone’s sensitivity by utilizing the pinna’s directionally dependent sound collection capabilities and the natural resonances of the ear canal. The sensitivity and insertion loss of this microphone were measured in human cadaveric specimens in the 0.1 to 16 kHz frequency range. In addition, the maximum stable gain due to feedback between the trans-tympanic microphone and a round-window-drive transducer, was measured. The results confirmed in situ high-performance capabilities of the proposed trans-tympanic microphone.

  11. Acoustic source localization in mixed field using spherical microphone arrays

    Science.gov (United States)

    Huang, Qinghua; Wang, Tong

    2014-12-01

    Spherical microphone arrays have been used for source localization in three-dimensional space recently. In this paper, a two-stage algorithm is developed to localize mixed far-field and near-field acoustic sources in free-field environment. In the first stage, an array signal model is constructed in the spherical harmonics domain. The recurrent relation of spherical harmonics is independent of far-field and near-field mode strengths. Therefore, it is used to develop spherical estimating signal parameter via rotational invariance technique (ESPRIT)-like approach to estimate directions of arrival (DOAs) for both far-field and near-field sources. In the second stage, based on the estimated DOAs, simple one-dimensional MUSIC spectrum is exploited to distinguish far-field and near-field sources and estimate the ranges of near-field sources. The proposed algorithm can avoid multidimensional search and parameter pairing. Simulation results demonstrate the good performance for localizing far-field sources, or near-field ones, or mixed field sources.

  12. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  13. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  14. Characteristics of Relocated Quiet Zones Using Virtual Microphone Algorithm in an Active Headrest System

    Directory of Open Access Journals (Sweden)

    Seokhoon Ryu

    2016-01-01

    Full Text Available This study displays theoretical and experimental investigation on the characteristics of the relocated zone of quiet by a virtual microphone (VM based filtered-x LMS (FxLMS algorithm which can be embedded in a real-time digital controller for an active headrest system. The attenuation changes at the relocated zones of quiet by the variation of the distance between the ear and the error microphone are mainly examined. An active headrest system was implemented for the control experiment at a chair and consists of two (left and right secondary loudspeakers, two error microphones, two observer microphones at ear positions in a HATS, and other electronics including a dSPACE 1401 controller. The VM based FxLMS algorithm achieved an attenuation of about 22 dB in the control experiment against a narrowband primary noise by the variation of the distance between the ear and the error microphone. The important factors for the algorithm are discussed as well.

  15. Identifying Microphone from Noisy Recordings by Using Representative Instance One Class-Classification Approach

    Directory of Open Access Journals (Sweden)

    Huy Quan Vu

    2012-06-01

    Full Text Available Rapid growth of technical developments has created huge challenges for microphone forensics - a sub-category of audio forensic science, because of the availability of numerous digital recording devices and massive amount of recording data. Demand for fast and efficient methods to assure integrity and authenticity of information is becoming more and more important in criminal investigation nowadays. Machine learning has emerged as an important technique to support audio analysis processes of microphone forensic practitioners. However, its application to real life situations using supervised learning is still facing great challenges due to expensiveness in collecting data and updating system. In this paper, we introduce a new machine learning approach which is called One-class Classification (OCC to be applied to microphone forensics; we demonstrate its capability on a corpus of audio samples collected from several microphones. In addition, we propose a representative instance classification framework (RICF that can effectively improve performance of OCC algorithms for recording signal with noise. Experiment results and analysis indicate that OCC has the potential to benefit microphone forensic practitioners in developing new tools and techniques for effective and efficient analysis.

  16. Active structural acoustic control of a smart cylindrical shell using a virtual microphone

    Science.gov (United States)

    Loghmani, Ali; Danesh, Mohammad; Kwak, Moon K.; Keshmiri, Mehdi

    2016-04-01

    This paper investigates the active structural acoustic control of sound radiated from a smart cylindrical shell. The cylinder is equipped with piezoelectric sensors and actuators to estimate and control the sound pressure that radiates from the smart shell. This estimated pressure is referred to as a virtual microphone, and it can be used in control systems instead of actual microphones to attenuate noise due to structural vibrations. To this end, the dynamic model for the smart cylinder is derived using the extended Hamilton’s principle, the Sanders shell theory and the assumed mode method. The simplified Kirchhoff-Helmholtz integral estimates the far-field sound pressure radiating from the baffled cylindrical shell. A modified higher harmonic controller that can cope with a harmonic disturbance is designed and experimentally evaluated. The experimental tests were carried out on a baffled cylindrical aluminum shell in an anechoic chamber. The frequency response for the theoretical virtual microphone and the experimental actual microphone are in good agreement with each other, and the results show the effectiveness of the designed virtual microphone and controller in attenuating the radiated sound.

  17. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    OpenAIRE

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as poly...

  18. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  19. High-speed Laser Micromachining with Copper Bromide Laser

    CERN Document Server

    Balchev, I I; Minkovski, N I; Sabotinov, N V; Balchev, Ivaylo I.; Kostadinov, Ivan K.; Minkovski, Nikolai I.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  20. Micromachined nanofiltration modules for lab-on-a-chip applications

    International Nuclear Information System (INIS)

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm−1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested. (paper)

  1. Micromachined nanofiltration modules for lab-on-a-chip applications

    Science.gov (United States)

    Shen, C.; Mokkapati, V. R. S. S.; Pham, H. T. M.; Sarro, P. M.

    2012-02-01

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm-1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested.

  2. Micromachining of polydimethylsiloxane induced by laser plasma EUV light

    Science.gov (United States)

    Torii, S.; Makimura, T.; Okazaki, K.; Nakamura, D.; Takahashi, A.; Okada, T.; Niino, H.; Murakami, K.

    2011-06-01

    Polydimethylsiloxane (PDMS) is fundamental materials in the field of biotechnology. Because of its biocompatibility, microfabricated PDMS sheets are applied to micro-reactors and microchips for cell culture. Conventionally, the microstructures were fabricated by means of cast or imprint using molds, however it is difficult to fabricate the structures at high aspect ratios such as through-holes/vertical channels. The fabrication of the high-aspect structures would enable us to stack sheets to realize 3D fluidic circuits. In order to achieve the micromachining, direct photo-ablation by short wavelength light is promising. In the previous works, we investigated ablation of transparent materials such as silica glass and poly(methyl methacrylate) induced by irradiation with laser plasma EUV light. We achieved smooth and fine nanomachining. In this work, we applied our technique to PDMS micromachining. We condensed the EUV light onto PDMS surfaces at high power density up to 108 W/cm2 using a Au coated ellipsoidal mirror. We found that PDMS sheet was ablated at a rate up to 440 nm/shot. It should be emphasized that through hole with a diameter of 1 μm was fabricated in a PDMS sheet with a thickness of 4 μm. Thus we demonstrated the micromachining of PDMS sheets using laser plasma EUV light.

  3. Acoustic Feedback and Echo Cancellation Strategies for Multiple-Microphone and Single-Loudspeaker Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt;

    2011-01-01

    Acoustic feedback/echo cancellation in a multiple-microphone and single-loudspeaker system is often carried out using a cancellation filter for each microphone channel, and the filters are adaptively estimated, independently of each other. In this work, we consider another strategy by estimating...... cancellation performance is achievable compared to the independent estimation strategy. Furthermore, we relate the joint estimation strategy to a stereophonic echo cancellation system and provide analytic expressions for its system behavior....... all the cancellation filters jointly and in this way exploit information from all microphone channels. We determine the statistical system behavior for the joint estimation strategy in terms of the convergence rate and steady-state behavior across time and frequency. We assess if an improved...

  4. Separating the Wheat from the Chaff: Sensing Wireless Microphones in TVWS

    CERN Document Server

    Sun, Huanhuan; Zhang, Wenyi

    2012-01-01

    This paper summarizes our attempts to establish a systematic approach that overcomes a key difficulty in sensing wireless microphone signals, namely, the inability for most existing detection methods to effectively distinguish between a wireless microphone signal and a sinusoidal continuous wave (CW). Such an inability has led to an excessively high false alarm rate and thus severely limited the utility of sensing-based cognitive transmission in the TV white space (TVWS) spectrum. Having recognized the root of the difficulty, we propose two potential solutions. The first solution focuses on the periodogram as an estimate of the power spectral density (PSD), utilizing the property that a CW has a line spectral component while a wireless microphone signal has a slightly dispersed PSD. In that approach, we formulate the resulting decision model as an one-sided test for Gaussian vectors, based on Kullback-Leibler distance type of decision statistics. The second solution goes beyond the PSD and looks into the spec...

  5. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  6. Radiation impedance of condenser microphones and their diffuse-field responses

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2010-01-01

    The relation between the diffuse-field response and the radiation impedance of a microphone has been investigated. Such a relation can be derived from classical theory. The practical measurement of the radiation impedance requires (a) measuring the volume velocity of the membrane of the microphone....... In this way, a hybrid estimate of the radiation impedance is obtained. The resulting estimate of the diffuse-field response is compared with experimental estimates of the diffuse-field response determined using reciprocity and the random-incidence method. The different estimates are in good agreement...

  7. DFT-Domain Based Single-Microphone Noise Reduction for Speech Enhancement

    DEFF Research Database (Denmark)

    C. Hendriks, Richard; Gerkmann, Timo; Jensen, Jesper

    their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement. The field of single-microphone noise reduction.......Furthermore, our goal is to provide a concise description of a state-of-the-art speech enhancement system, and demonstrate the relative importance of the various building blocks of such a system. This allows the non-expert DSP practitioner to judge the relevance of each building block and to implement a close...

  8. Characterization of a bulk-micromachined membraneless in-plane thermopile

    NARCIS (Netherlands)

    Wang, Z.; Andel, Y. van; Jambunathan, M.; Leonov, V.; Elfrink, R.; Vullers, R.J.M.

    2011-01-01

    This paper describes the characterization method and results for bulk- micromachined in-plane thermopiles. Made of poly-Si or poly-SiGe, the thermocouple legs bridge the hot and cold side of a Si frame, which is formed by bulk micromachining. The characterization of the fabricated devices is carried

  9. Motorcycle detection and counting using stereo camera, IR camera, and microphone array

    Science.gov (United States)

    Ling, Bo; Gibson, David R. P.; Middleton, Dan

    2013-03-01

    Detection, classification, and characterization are the key to enhancing motorcycle safety, motorcycle operations and motorcycle travel estimation. Average motorcycle fatalities per Vehicle Mile Traveled (VMT) are currently estimated at 30 times those of auto fatalities. Although it has been an active research area for many years, motorcycle detection still remains a challenging task. Working with FHWA, we have developed a hybrid motorcycle detection and counting system using a suite of sensors including stereo camera, thermal IR camera and unidirectional microphone array. The IR thermal camera can capture the unique thermal signatures associated with the motorcycle's exhaust pipes that often show bright elongated blobs in IR images. The stereo camera in the system is used to detect the motorcyclist who can be easily windowed out in the stereo disparity map. If the motorcyclist is detected through his or her 3D body recognition, motorcycle is detected. Microphones are used to detect motorcycles that often produce low frequency acoustic signals. All three microphones in the microphone array are placed in strategic locations on the sensor platform to minimize the interferences of background noises from sources such as rain and wind. Field test results show that this hybrid motorcycle detection and counting system has an excellent performance.

  10. On Acoustic Feedback Cancellation Using Probe Noise in Multiple-Microphone and Single-Loudspeaker Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt;

    2012-01-01

    of the adaptive estimation is significantly decreased when keeping the steady-state error unchanged. The goal of this work is to derive analytic expressions for the system behavior such as convergence rate and steady-state error for a multiple-microphone and single-loudspeaker audio system, where the acoustic...

  11. Benefits of the Fiber Optic versus the Electret Microphone in Voice Amplification

    Science.gov (United States)

    Kyriakou, Kyriaki; Fisher, Helene R.

    2013-01-01

    Background: Voice disorders that result in reduced loudness may cause difficulty in communicating, socializing and participating in occupational activities. Amplification is often recommended in order to facilitate functional communication, reduce vocal load and avoid developing maladaptive compensatory behaviours. The most common microphone used…

  12. Nonnegative signal factorization with learnt instrument models for sound source separation in close-microphone recordings

    Science.gov (United States)

    Carabias-Orti, Julio J.; Cobos, Máximo; Vera-Candeas, Pedro; Rodríguez-Serrano, Francisco J.

    2013-12-01

    Close-microphone techniques are extensively employed in many live music recordings, allowing for interference rejection and reducing the amount of reverberation in the resulting instrument tracks. However, despite the use of directional microphones, the recorded tracks are not completely free from source interference, a problem which is commonly known as microphone leakage. While source separation methods are potentially a solution to this problem, few approaches take into account the huge amount of prior information available in this scenario. In fact, besides the special properties of close-microphone tracks, the knowledge on the number and type of instruments making up the mixture can also be successfully exploited for improved separation performance. In this paper, a nonnegative matrix factorization (NMF) method making use of all the above information is proposed. To this end, a set of instrument models are learnt from a training database and incorporated into a multichannel extension of the NMF algorithm. Several options to initialize the algorithm are suggested, exploring their performance in multiple music tracks and comparing the results to other state-of-the-art approaches.

  13. Acoustic analysis of the interaction of choral arrangements, musical selection, and microphone location.

    Science.gov (United States)

    Morris, Richard J; Mustafa, Ashley J; McCrea, Christopher R; Fowler, Linda P; Aspaas, Christopher

    2007-09-01

    Acoustic differences were evaluated among three choral arrangements and two choral textures recorded at three microphone locations. A choir was recorded when singing two musical selections of different choral texture, one homophonic and one polyphonic. Both musical selections were sung in three choral arrangements: block sectional, sectional-in-columns, and mixed. Microphones were placed at the level of the choristers, the conductor, and the audience. The recordings at each location were analyzed using long-term average spectrum (LTAS). The LTAS from the mixed arrangement exhibited more signal amplitude than the other arrangements in the range of 1000-3500Hz. When considering the musical selections, the chorus produced more signal amplitude in the region of 1800-2200Hz for the homophonic selection. In addition, the LTAS produced by the choir for the homophonic selection varied across the microphone locations. As for the microphone location, the LTAS of the signal detected directly in front of the chorus had a greater slope than the other two locations. Thus, the acoustic signal near the choristers differed from the signals near the conductor and in the audience. Conductors may be using acoustic information from the region of the second and third formants when they decide how to arrange a choir for a particular musical selection. PMID:16806816

  14. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  15. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale.

  16. DNA transport by a micromachined Brownian ratchet device

    CERN Document Server

    Bader, J S; Henck, S A; Deem, M W; McDermott, G A; Bustillo, J M; Simpson, J W; Mulhern, G T; Rothberg, J M; Bader, Joel S; Hammond, Richard W.; Henck, Steven A.; Deem, Michael W.; Dermott, Gregory A. Mc; Bustillo, James M.; Simpson, John W.; Mulhern, Gregory T.; Rothberg, Jonathan M.

    1999-01-01

    We have micromachined a silicon-chip device that transports DNA with aBrownian ratchet that rectifies the Brownian motion of microscopic particles.Transport properties for a DNA 50mer agree with theoretical predictions, andthe DNA diffusion constant agrees with previous experiments. This type ofmicromachine could provide a generic pump or separation component for DNA orother charged species as part of a microscale lab-on-a-chip. A device withreduced feature size could produce a size-based separation of DNA molecules,with applications including the detection of single nucleotide polymorphisms.

  17. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  18. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  19. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  20. A beam-membrane structure micromachined differential pressure flow sensor.

    Science.gov (United States)

    Chen, P; Zhao, Y L; Tian, B; Li, C; Li, Y Y

    2015-04-01

    A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

  1. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  2. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  3. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  4. Microscopic View of Soil on a Micromachined Silicone Substrate

    Science.gov (United States)

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  5. Micromachined array-type Mirau interferometer for MEMS metrology

    Science.gov (United States)

    Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U. D.

    We present the development of an array-type micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS. The system is a combination of free-space microoptical technologies and silicon micromachining, based on the vertical assembly of two glass wafers. The probing wafer is carrying an array of refractive microlenses, diffractive gratings to correct chromatic and spherical aberrations and reference micro-mirrors. The semitransparent beam splitter plate is based on the deposition of a dielectric multilayer, sandwiched between two glass wafers. The interferometer matrix is the key element of a novel inspection system aimed to perform parallel inspection of MEMS. The fabricated demonstrator, including 5x5 channels, allows consequently decreasing the measurement time by a factor of 25. In the following, the details of fabrication processes of the micro-optical components and their assembly are described. The feasibility of the LCI is demonstrated for the measurement of a wafer of MEMS sensors.

  6. Comparing flat top and Gaussian focal beam shapes when micromachining steel

    Science.gov (United States)

    Lizotte, Todd E.; Ohar, Orest

    2011-10-01

    Laser micromachining, drilling and marking is extensively used within the aerospace, automotive and firearms industries. The unique properties of lasers make them ideal tools for micromachining a wide diversity of materials, including steel alloys [1]. We describe the results of micromachining of low carbon steel and stainless steel alloys, using a high powered diode pumped solid state (DPSS) laser operating at a wavelength of 355nm. The laser was configured with beam conditioning optics to produce either a flat top beam or a Gaussian output which was then sent through a galvanometer scanner and telecentric lens beam delivery system. This paper outlines the interrelationship of process variables when micromachining fine features in steel and stainless steel alloys. Process variables measured included the optimum laser focus plane, energy density, galvanometer scan rate, and pulse overlap and focal spot diameter. Optimum process performance was evaluated based on a dimensional comparison of the micromachined features from each test coupon, including uniformity and surface roughness of the micromachined surface and the minimization of surface irregularities (stalagmite type slag / debris / corn row patterns) and taper angle of the micromachined feature side walls.

  7. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  8. The effect of microphone wind noise on the amplitude modulation of wind turbine noise and its mitigation.

    Science.gov (United States)

    Kendrick, Paul; von Hünerbein, Sabine; Cox, Trevor J

    2016-07-01

    Microphone wind noise can corrupt outdoor recordings even when wind shields are used. When monitoring wind turbine noise, microphone wind noise is almost inevitable because measurements cannot be made in still conditions. The effect of microphone wind noise on two amplitude modulation (AM) metrics is quantified in a simulation, showing that even at low wind speeds of 2.5 m/s errors of over 4 dBA can result. As microphone wind noise is intermittent, a wind noise detection algorithm is used to automatically find uncorrupted sections of the recording, and so recover the true AM metrics to within ±2/±0.5 dBA. PMID:27475217

  9. Acoustic sensor engineering evaluation test report. [microphones for monitoring inside the space shuttle orbiter

    Science.gov (United States)

    Phillips, E. L., Jr.; Bronson, R. D.

    1976-01-01

    Two types of one-inch diameter sound pressure level sensors, which are candidates for monitoring ambient noise in the shuttle orbiter crew compartment during rest periods, were exposed to temperature, passive humidity, and vibration. One unexposed sensor of each type served as a reference unit. Except for the humidity exposures, each of the three capacitive microphones was individually tested in sequence with the essential voltage power supply and preamplifier. One unit exibited anomalous characteristics after the humidity exposure but returned to normal after being dried in an oven at 115 deg for two hours. Except for the humidity exposures, each of the three piezoelectric microphones was individually tested with a laboratory type amplifier. Two apparent failures occurred during these tests. The diaphragm on one was found ruptured after the fourth cycle of the humidity test. A second sensor showed an anomaly after the random vibration tests at which time its sensitivity was consistent at about one-half its former value.

  10. A Two-Microphone Noise Reduction System for Cochlear Implant Users with Nearby Microphones—Part II: Performance Evaluation

    Directory of Open Access Journals (Sweden)

    Rudolf Häusler

    2008-06-01

    Full Text Available Users of cochlear implants (auditory aids, which stimulate the auditory nerve electrically at the inner ear often suffer from poor speech understanding in noise. We evaluate a small (intermicrophone distance 7 mm and computationally inexpensive adaptive noise reduction system suitable for behind-the-ear cochlear implant speech processors. The system is evaluated in simulated and real, anechoic and reverberant environments. Results from simulations show improvements of 3.4 to 9.3 dB in signal to noise ratio for rooms with realistic reverberation and more than 18 dB under anechoic conditions. Speech understanding in noise is measured in 6 adult cochlear implant users in a reverberant room, showing average improvements of 7.9–9.6 dB, when compared to a single omnidirectional microphone or 1.3–5.6 dB, when compared to a simple directional two-microphone device. Subjective evaluation in a cafeteria at lunchtime shows a preference of the cochlear implant users for the evaluated device in terms of speech understanding and sound quality.

  11. Dual-microphone and binaural noise reduction techniques for improved speech intelligibility by hearing aid users

    Science.gov (United States)

    Yousefian Jazi, Nima

    Spatial filtering and directional discrimination has been shown to be an effective pre-processing approach for noise reduction in microphone array systems. In dual-microphone hearing aids, fixed and adaptive beamforming techniques are the most common solutions for enhancing the desired speech and rejecting unwanted signals captured by the microphones. In fact, beamformers are widely utilized in systems where spatial properties of target source (usually in front of the listener) is assumed to be known. In this dissertation, some dual-microphone coherence-based speech enhancement techniques applicable to hearing aids are proposed. All proposed algorithms operate in the frequency domain and (like traditional beamforming techniques) are purely based on the spatial properties of the desired speech source and does not require any knowledge of noise statistics for calculating the noise reduction filter. This benefit gives our algorithms the ability to address adverse noise conditions, such as situations where interfering talker(s) speaks simultaneously with the target speaker. In such cases, the (adaptive) beamformers lose their effectiveness in suppressing interference, since the noise channel (reference) cannot be built and updated accordingly. This difference is the main advantage of the proposed techniques in the dissertation over traditional adaptive beamformers. Furthermore, since the suggested algorithms are independent of noise estimation, they offer significant improvement in scenarios that the power level of interfering sources are much more than that of target speech. The dissertation also shows the premise behind the proposed algorithms can be extended and employed to binaural hearing aids. The main purpose of the investigated techniques is to enhance the intelligibility level of speech, measured through subjective listening tests with normal hearing and cochlear implant listeners. However, the improvement in quality of the output speech achieved by the

  12. Precision Measurements of Wind Turbine Noise using a Large Aperture Microphone Array

    DEFF Research Database (Denmark)

    Bradley, Stuart; Mikkelsen, Torben Krogh; Hünerbein, Sabine Von;

    2016-01-01

    -of-flight at each microphone). An experiment was also run recording the sound from a continuous tone speaker mounted near the tip of a turbine blade, allowing testing of signal processing to correct for the very substantial Doppler shift. These various experiments are targeted at obtaining very high spatial...... and temporal resolution acoustic images of the sound emitted from turbine blades. An overview of some of the first results from this work will be given....

  13. Microphonics detuning compensation in 3.9 GHZ superconducting RF cavities

    Energy Technology Data Exchange (ETDEWEB)

    Ruben Carcagno et al.

    2003-10-20

    Mechanical vibrations can detune superconducting radio frequency (SCRF) cavities unless a tuning mechanism counteracting the vibrations is present. Due to their narrow operating bandwidth and demanding mechanical structure, the 13-cell 3.9GHz SCRF cavities for the Charged Kaons at Main Injector (CKM) experiment at Fermilab are especially susceptible to this microphonic phenomena. We present early results correlating RF frequency detuning with cavity vibration measurements for CKM cavities; initial detuning compensation results with piezoelectric actuators are also presented.

  14. A dynamic multi-channel speech enhancement system for distributed microphones in a car environment

    Science.gov (United States)

    Matheja, Timo; Buck, Markus; Fingscheidt, Tim

    2013-12-01

    Supporting multiple active speakers in automotive hands-free or speech dialog applications is an interesting issue not least due to comfort reasons. Therefore, a multi-channel system for enhancement of speech signals captured by distributed distant microphones in a car environment is presented. Each of the potential speakers in the car has a dedicated directional microphone close to his position that captures the corresponding speech signal. The aim of the resulting overall system is twofold: On the one hand, a combination of an arbitrary pre-defined subset of speakers' signals can be performed, e.g., to create an output signal in a hands-free telephone conference call for a far-end communication partner. On the other hand, annoying cross-talk components from interfering sound sources occurring in multiple different mixed output signals are to be eliminated, motivated by the possibility of other hands-free applications being active in parallel. The system includes several signal processing stages. A dedicated signal processing block for interfering speaker cancellation attenuates the cross-talk components of undesired speech. Further signal enhancement comprises the reduction of residual cross-talk and background noise. Subsequently, a dynamic signal combination stage merges the processed single-microphone signals to obtain appropriate mixed signals at the system output that may be passed to applications such as telephony or a speech dialog system. Based on signal power ratios between the particular microphone signals, an appropriate speaker activity detection and therewith a robust control mechanism of the whole system is presented. The proposed system may be dynamically configured and has been evaluated for a car setup with four speakers sitting in the car cabin disturbed in various noise conditions.

  15. A Three-Microphone Adaptive Noise Canceller for Minimizing Reverberation and Signal Distortion

    OpenAIRE

    Zayed M. Ramadan

    2008-01-01

    This paper introduces an adaptive noise canceller (ANC) to improve the system performance in the presence of signal leakage components. The proposed ANC consists of two adaptive filters and three microphones. The first adaptive filter cancels the signal leakage and the second filter cancels the noise. For best results, a least mean squares adaptive algorithm was also introduced and used in the proposed ANC. In this algorithm the step size was based on both error vector and data normalization....

  16. STS-39 MS McMonagle adjusts CCA microphones prior to simulation in JSC's WETF

    Science.gov (United States)

    1990-01-01

    STS-39 Mission Specialist (MS) Donald R. McMonagle, wearing extravehicular mobility unit (EMU), adjusts the microphones on his communications carrier assembly (CCA) prior to underwater simulation in JSC's Weightless Environment Training Facility (WETF) Bldg 29. McMonagle will be lowered into the WETF's 25 ft deep pool for an underwater simulation of contingency extravehicular activity (EVA) procedures. He is scheduled as a crewmember aboard Discovery, Orbiter Vehicle (OV) 103 in the spring of 1991.

  17. Multi-microphone adaptive noise reduction strategies for coordinated stimulation in bilateral cochlear implant devices

    OpenAIRE

    Kokkinakis, Kostas; Loizou, Philipos C.

    2010-01-01

    Bilateral cochlear implant (BI-CI) recipients achieve high word recognition scores in quiet listening conditions. Still, there is a substantial drop in speech recognition performance when there is reverberation and more than one interferers. BI-CI users utilize information from just two directional microphones placed on opposite sides of the head in a so-called independent stimulation mode. To enhance the ability of BI-CI users to communicate in noise, the use of two computationally inexpensi...

  18. High-purity germanium detector ionization pulse shapes of nuclear recoils, gamma interactions and microphonism

    OpenAIRE

    Baudis, L.; Hellmig, J.; Klapdor-Kleingrothaus, H. V.; Ramachers, Y.; Hammer, J. W.; Mayer, A.

    1999-01-01

    Nuclear recoil measurements with high-purity Germanium detectors are very promising to directly detect dark matter candidates. The main background sources in such experiments are natural radioactivity and microphonic noise. Digital pulse shape analysis is an encouraging approach to reduce the background originating from the latter. To study the pulse shapes of nuclear recoil events we performed a neutron scattering experiment, which covered the ionization energy range from 20 to 80 keV. We ha...

  19. Microphone Handling Noise: Measurements of Perceptual Threshold and Effects on Audio Quality.

    Directory of Open Access Journals (Sweden)

    Paul Kendrick

    Full Text Available A psychoacoustic experiment was carried out to test the effects of microphone handling noise on perceived audio quality. Handling noise is a problem affecting both amateurs using their smartphones and cameras, as well as professionals using separate microphones and digital recorders. The noises used for the tests were measured from a variety of devices, including smartphones, laptops and handheld microphones. The signal features that characterise these noises are analysed and presented. The sounds include various types of transient, impact noises created by tapping or knocking devices, as well as more sustained sounds caused by rubbing. During the perceptual tests, listeners auditioned speech podcasts and were asked to rate the degradation of any unwanted sounds they heard. A representative design test methodology was developed that tried to encourage everyday rather than analytical listening. Signal-to-noise ratio (SNR of the handling noise events was shown to be the best predictor of quality degradation. Other factors such as noise type or background noise in the listening environment did not significantly affect quality ratings. Podcast, microphone type and reproduction equipment were found to be significant but only to a small extent. A model allowing the prediction of degradation from the SNR is presented. The SNR threshold at which 50% of subjects noticed handling noise was found to be 4.2 ± 0.6 dBA. The results from this work are important for the understanding of our perception of impact sound and resonant noises in recordings, and will inform the future development of an automated predictor of quality for handling noise.

  20. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Directory of Open Access Journals (Sweden)

    Gang Cao

    2016-08-01

    Full Text Available This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  1. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-01-01

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation. PMID:27529254

  2. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    Micromachined capacitive pressure sensors for harsh environment together with interfacing electronic circuits have been studied in this project. Micro-electromechanical systems (MEMS) have been proposed as substitutes for macro scale sensor’s systems in many different fields and are the only...... possible solution in many cases where, for example, the dimensions of the sensing element is the limiting factor. Furthermore, MEMS can significantly reduce costs and power consumption being the best candidate for consumer electronics such as mobile phones and cameras, or for the automotive industry where...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump...

  3. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 1012 ions/cm2, this technique is suitable for the fabrication of different shapes of LiNbO3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  4. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer.

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-08-13

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  5. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  6. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  7. Femtosecond laser embedded grating micromachining of flexible PDMS plates

    Science.gov (United States)

    Cho, Sung-Hak; Chang, Won-Seok; Kim, Kwang-Ryul; Hong, Jong Wook

    2009-04-01

    We report on the femtosecond laser micromachining of photo-induced embedded diffraction grating in flexible Poly (Dimethly Siloxane) (PDMS) plates using a high-intensity femtosecond (130 fs) Ti: sapphire laser ( λp = 800 nm). The refractive index modifications with diameters ranging from 2 μm to 5 μm were photo-induced after the irradiation with peak intensities of more than 1 × 10 11 W/cm 2. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which femtosecond laser was focused. The maximum refractive index change (Δ n) was estimated to be 2 × 10 -3. By the X- Y- Z scanning of sample, the embedded diffraction grating in PDMS plate was fabricated successfully using a femtosecond laser.

  8. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  9. Analytical modeling of squeeze air film damping of biomimetic MEMS directional microphone

    Science.gov (United States)

    Ishfaque, Asif; Kim, Byungki

    2016-08-01

    Squeeze air film damping is introduced in microelectromechanical systems due to the motion of the fluid between two closely spaced oscillating micro-structures. The literature is abundant with different analytical models to address the squeeze air film damping effects, however, there is a lack of work in modeling the practical sensors like directional microphones. Here, we derive an analytical model of squeeze air film damping of first two fundamental vibration modes, namely, rocking and bending modes, of a directional microphone inspired from the fly Ormia ochracea's ear anatomy. A modified Reynolds equation that includes compressibility and rarefaction effects is used in the analysis. Pressure distribution under the vibrating diaphragm is derived by using Green's function. From mathematical modeling of the fly's inspired mechanical model, we infer that bringing the damping ratios of both modes in the critical damping range enhance the directional sensitivity cues. The microphone parameters are varied in derived damping formulas to bring the damping ratios in the vicinity of critical damping, and to show the usefulness of the analytical model in tuning the damping ratios of both modes. The accuracy of analytical damping results are also verified by finite element method (FEM) using ANSYS. The FEM results are in full compliance with the analytical results.

  10. Characterization of a new class of surface micromachined pumps.

    Energy Technology Data Exchange (ETDEWEB)

    Galambos, Paul C.

    2004-12-01

    This is the latest in a series of LDRD's that we have been conducting with Florida State University/Florida A&M University (FSU/FAMU) under the campus executive program. This research builds on the earlier projects; ''Development of Highly Integrated Magnetically and Electrostatically Actuated Micropumps'' (SAND2003-4674) and ''Development of Magnetically and Electrostatically Driven Surface Micromachined Pumps'' (SAND2002-0704P). In this year's LDRD we designed 2nd generation of surface micromachined (SMM) gear and viscous pumps. Two SUMMiT{trademark} modules full of design variations of these pumps were fabricated and one SwIFT{trademark} module is still in fabrication. The SwIFT{trademark} fabrication process results in a transparent pump housing cover that will enable visualization inside the pumps. Since the SwIFT{trademark} pumps have not been tested as they are still in fabrication, this report will focus on the 2nd generation SUMMiT{trademark} designs. Pump testing (pressure vs. flow) was conducted on several of the SUMMiT{trademark} designs resulting in the first pump curve for this class of SMM pumps. A pump curve was generated for the higher torque 2nd generation gear pump designed by Jason Hendrix of FSU. The pump maximum flow rate at zero head was 6.5 nl/s for a 30V, 30 Hz square wave signal. This level of flow rate would be more than adequate for our typical SMM SUMMiT{trademark} or SwIFT{trademark} channels which have typical volumes on the order of 50 pl.

  11. Development of an Audio Microphone for the Mars Surveyor 98 Lander

    Science.gov (United States)

    Delory, G. T.; Luhmann, J. G.; Curtis, D. W.; Friedman, L. D.; Primbsch, J. H.; Mozer, F. S.

    1998-01-01

    In December 1999, the next Mars Surveyor Lander will bring the first microphone to the surface of Mars. The Mars Microphone represents a joint effort between the Planetary Society and the University of California at Berkeley Space Sciences Laboratory and is riding on the lander as part of the LIDAR instrument package provided by the Russian Academy of Sciences in Moscow. The inclusion of a microphone on the Mars Surveyor Lander represents a unique opportunity to sample for the first time the acoustic environment on the surface, including both natural and lander-generated sounds. Sounds produced by martian meteorology are among the signals to be recorded, including wind and impacts of sand particles on the instrument. Photographs from the Viking orbiters as well as Pathfinder images show evidence of small tornado-like vortices that may be acoustically detected, along with noise generated by static discharges possible during sandstorms. Lander-generated sounds that will be measured include the motion and digging of the lander arm as it gathers soil samples for analysis. Along with these scientific objectives, the Mars Microphone represents a powerful tool for public outreach by providing sound samples on the Internet recorded during the mission. The addition of audio capability to the lander brings us one step closer to a true virtual presence on the Mars surface by complementing the visual capabilities of the Mars Surveyor cameras. The Mars Microphone is contained in a 5 x 5 x 1 cm box, weighs less than 50 g, and uses 0.1 W of power during its most active times. The microphone used is a standard hearing-aid electret. The sound sampling and processing system relies on an RSC-164 speech processor chip, which performs 8-bit A/ D sampling and sound compression. An onboard flight program enables several modes for the instrument, including varying sample ranges of 5 kHz and 20 kHz, and a selectable gain setting with 64x dynamic range. The device automatically triggers on

  12. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  13. Exploring the feasibility of smart phone microphone for measurement of acoustic voice parameters and voice pathology screening.

    Science.gov (United States)

    Uloza, Virgilijus; Padervinskis, Evaldas; Vegiene, Aurelija; Pribuisiene, Ruta; Saferis, Viktoras; Vaiciukynas, Evaldas; Gelzinis, Adas; Verikas, Antanas

    2015-11-01

    The objective of this study is to evaluate the reliability of acoustic voice parameters obtained using smart phone (SP) microphones and investigate the utility of use of SP voice recordings for voice screening. Voice samples of sustained vowel/a/obtained from 118 subjects (34 normal and 84 pathological voices) were recorded simultaneously through two microphones: oral AKG Perception 220 microphone and SP Samsung Galaxy Note3 microphone. Acoustic voice signal data were measured for fundamental frequency, jitter and shimmer, normalized noise energy (NNE), signal to noise ratio and harmonic to noise ratio using Dr. Speech software. Discriminant analysis-based Correct Classification Rate (CCR) and Random Forest Classifier (RFC) based Equal Error Rate (EER) were used to evaluate the feasibility of acoustic voice parameters classifying normal and pathological voice classes. Lithuanian version of Glottal Function Index (LT_GFI) questionnaire was utilized for self-assessment of the severity of voice disorder. The correlations of acoustic voice parameters obtained with two types of microphones were statistically significant and strong (r = 0.73-1.0) for the entire measurements. When classifying into normal/pathological voice classes, the Oral-NNE revealed the CCR of 73.7% and the pair of SP-NNE and SP-shimmer parameters revealed CCR of 79.5%. However, fusion of the results obtained from SP voice recordings and GFI data provided the CCR of 84.60% and RFC revealed the EER of 7.9%, respectively. In conclusion, measurements of acoustic voice parameters using SP microphone were shown to be reliable in clinical settings demonstrating high CCR and low EER when distinguishing normal and pathological voice classes, and validated the suitability of the SP microphone signal for the task of automatic voice analysis and screening. PMID:26162450

  14. High-Resolution Time-Frequency Spectrum-Based Lung Function Test from a Smartphone Microphone.

    Science.gov (United States)

    Thap, Tharoeun; Chung, Heewon; Jeong, Changwon; Hwang, Ki-Eun; Kim, Hak-Ryul; Yoon, Kwon-Ha; Lee, Jinseok

    2016-01-01

    In this paper, a smartphone-based lung function test, developed to estimate lung function parameters using a high-resolution time-frequency spectrum from a smartphone built-in microphone is presented. A method of estimation of the forced expiratory volume in 1 s divided by forced vital capacity (FEV₁/FVC) based on the variable frequency complex demodulation method (VFCDM) is first proposed. We evaluated our proposed method on 26 subjects, including 13 healthy subjects and 13 chronic obstructive pulmonary disease (COPD) patients, by comparing with the parameters clinically obtained from pulmonary function tests (PFTs). For the healthy subjects, we found that an absolute error (AE) and a root mean squared error (RMSE) of the FEV₁/FVC ratio were 4.49% ± 3.38% and 5.54%, respectively. For the COPD patients, we found that AE and RMSE from COPD patients were 10.30% ± 10.59% and 14.48%, respectively. For both groups, we compared the results using the continuous wavelet transform (CWT) and short-time Fourier transform (STFT), and found that VFCDM was superior to CWT and STFT. Further, to estimate other parameters, including forced vital capacity (FVC), forced expiratory volume in 1 s (FEV₁), and peak expiratory flow (PEF), regression analysis was conducted to establish a linear transformation. However, the parameters FVC, FEV1, and PEF had correlation factor r values of 0.323, 0.275, and -0.257, respectively, while FEV₁/FVC had an r value of 0.814. The results obtained suggest that only the FEV1/FVC ratio can be accurately estimated from a smartphone built-in microphone. The other parameters, including FVC, FEV1, and PEF, were subjective and dependent on the subject's familiarization with the test and performance of forced exhalation toward the microphone. PMID:27548164

  15. Recognition of Devoiced Vowels Using Optical Microphone Made of Multipled POF-Type Moisture Sensors

    Science.gov (United States)

    Morisawa, Masayuki; Natori, Yoichi; Taki, Tomohito; Muto, Shinzo

    A novel optical fiber microphone system for recognizing devoiced vowels has been studied. This system consists of the optical detection of moisture pattern formed by devoiced breath and its recognization process using a modified DP-matching. To detect moisture pattern of devoiced vowels, five plastic optical fiber moisture sensors with fast response were developed and used. Using this system, high discernment rate over 93% was obtained for the devoiced vowels. This system will be used for verbally handicapped people to create sounds with a small effort in the near future.

  16. Temperature compensated, humidity insensitive, high-Tg TOPAS FBGs for accelerometers and microphones

    DEFF Research Database (Denmark)

    Stefani, Alessio; Yuan, W.; Markos, C.;

    2012-01-01

    In this paper we present our latest work on Fiber Bragg Gratings (FBGs) in microstructured polymer optical fibers (mPOFs) and their application as strain sensing transducers in devices, such as accelerometers and microphones. We demonstrate how the cross-sensitivity of the FBG to temperature...... is eliminated by using dual-FBG technology and how mPOFs fabricated from different grades of TOPAS with glass transition temperatures around 135 degrees C potentially allow high-temperature humidity insensitive operation. The results bring the mPOF FBG closer to being a viable technology for commercial...

  17. A Three-Microphone Adaptive Noise Canceller for Minimizing Reverberation and Signal Distortion

    Directory of Open Access Journals (Sweden)

    Zayed M. Ramadan

    2008-01-01

    Full Text Available This paper introduces an adaptive noise canceller (ANC to improve the system performance in the presence of signal leakage components. The proposed ANC consists of two adaptive filters and three microphones. The first adaptive filter cancels the signal leakage and the second filter cancels the noise. For best results, a least mean squares adaptive algorithm was also introduced and used in the proposed ANC. In this algorithm the step size was based on both error vector and data normalization. Simulation results, carried out using a real speech, demonstrate significant improvements of the proposed ANC over the conventional one in minimizing signal distortion and reverberation.

  18. Efficient voice activity detection in reverberant enclosures using far field microphones

    DEFF Research Database (Denmark)

    Petsatodis, Theodore; Boukis, Christos

    2009-01-01

    An algorithm suitable for voice activity detection under reverberant conditions is proposed in this paper. Due to the use of far-filed microphones the proposed solution processes speech signals of highly-varying intensity and signal to noise ratio, that are contaminated with several echoes....... The core of the system is a pair of Hidden Markov Models, that effectively model the speech presence and speech absence situations. To minimise mis-detections an adaptive threshold is used, while a hang-over scheme caters for the intra-frame correlation of speech signals. Experimental results conducted...

  19. Comparison of Multiple-Microphone and Single-Loudspeaker Adaptive Feedback/Echo Cancellation Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt;

    2011-01-01

    Recently, we introduced a frequency domain measure - the power transfer function - to predict the convergence rate, system stability bound and the steady-state behavior across time and frequency of a least mean square based feedback/echo cancellation algorithm in a general multiple......-microphone and single-loudspeaker system. In this work, we extend the theoretical analysis to the normalized least mean square and recursive least squares algorithms. Furthermore, we compare and discuss the system behaviors in terms of the power transfer function for all three adaptive algorithms....

  20. Detection and Separation of Speech Events in Meeting Recordings Using a Microphone Array

    Directory of Open Access Journals (Sweden)

    Yamada Miichi

    2007-01-01

    Full Text Available When applying automatic speech recognition (ASR to meeting recordings including spontaneous speech, the performance of ASR is greatly reduced by the overlap of speech events. In this paper, a method of separating the overlapping speech events by using an adaptive beamforming (ABF framework is proposed. The main feature of this method is that all the information necessary for the adaptation of ABF, including microphone calibration, is obtained from meeting recordings based on the results of speech-event detection. The performance of the separation is evaluated via ASR using real meeting recordings.

  1. Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide

    Science.gov (United States)

    Burcham, Kevin E.; De Brabander, Gregory N.; Boyd, Joseph T.

    1993-01-01

    A micromachined cantilever beam accelerometer is described in which beam deflection is determined optically. A diving board structure is anisotropically etched into a silicon wafer. This diving board structure is patterned from the wafer backside so as to leave a small gap between the tip of the diving board and the opposite fixed edge on the front side of the wafer. In order to sense a realistic range of accelerations, a foot mass incorporated onto the end of the beam is found to provide design flexibility. A silicon nitride optical waveguide is then deposited by low pressure chemical vapor deposition (LPCVD) onto the sample. Beam deflection is measured by the decrease of light coupled across the gap between the waveguide sections. In order to investigate sensor response and simulate deflection of the beam, we utilized a separate beam and waveguide section which could be displaced from one another in a precisely controlled manner. Measurements were performed on samples with gaps of 4.0, 6.0, and 8.0 micron and the variation of the fraction of light coupled across the gap as a function of displacement and gap spacing was found to agree with overlap integral calculations.

  2. Thermal dependence of electrical characteristics of micromachined silica microchannel plates

    Science.gov (United States)

    Tremsin, Anton S.; Vallerga, John V.; Siegmund, Oswald H. W.; Beetz, Charles P.; Boerstler, Robert W.

    2004-04-01

    Micromachined silica microchannel plates (MCPs) under development have a number of advantages over standard glass MCPs and open completely new possibilities in detector technologies. In this article we present the results of our studies on the thermal properties of silica microchannel plates (sMCPs). Similar to standard glass microchanel plates the resistance of silica MCPs was measured to change exponentially with temperature with a negative thermal coefficient of -0.036 per °C, somewhat larger than that of standard glass MCPs. The resistance also decreases linearly with the applied voltage, with the voltage coefficient of -3.1×10-4 V-1. With the knowledge of these two coefficients, our thermal model allows the calculation of the maximum voltage, which can be applied to a given MCP without inducing a thermal runaway. A typical 25 mm diam, 240 μm thick sMCP with 6 μm pores has to have the resistance larger than ˜30 MΩ to operate safely at voltages up to 800 V. With this model we can also calculate the time required for a given silica MCP to reach the point of thermal equilibrium after a voltage increase. We hope that the ongoing efforts on a proper modification of the sMCP semiconducting layer will lead to the production of new MCPs with a small negative or even a positive thermal coefficient, reducing the possibility of thermal runaways of low-resistance MCPs required for high count rate applications.

  3. Finite element analysis of underwater capacitor micromachined ultrasonic transducers.

    Science.gov (United States)

    Roh, Yongrae; Khuri-Yakub, Butrus T

    2002-03-01

    A simple electro-mechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). Most often, cMUTs are made in silicon and glass plates that are in the 0.5 mm to 1 mm range in thickness. The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict cross-talk between elements of an array of transducers. To overcome these deficiencies, a flnite element model of the cMUT is constructed using the commercial code ANSYS. Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Cross-talk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the cross-talk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements. PMID:12322877

  4. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer.

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-12-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  5. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  6. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  7. 1 THz Micromachined Waveguide Band-Pass Filter

    Science.gov (United States)

    Liu, Shuang; Hu, Jiang; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan

    2016-05-01

    This paper presents a waveguide band-pass filter operating at the 0.75 ˜ 1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE301/TE102 dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.

  8. Micromachining of Soft Polymer Material applying Cryogenic Cooling

    Science.gov (United States)

    Kakinuma, Yasuhiro; Yasuda, Nobuhito; Aoyama, Tojiro

    Polydimethylsiloxane (PDMS) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, micromachining has not yet been applied to soft polymer materials. It is difficult to machine elastic materials such as PDMS because of their low toughness. In order to machine a micro grooves on soft polymer materials, the cutting process applying cryogenic cooling is proposed because the elastic properties of soft polymer materials remarkably change from rubbery state to glassy state below the glass transition temperature. In this study, the freezing milling method using liquid nitrogen is applied to the micro grooving of PDMS. The result of a cutting test shows that micro grooves can be shaped easily and machined accurately in PDMS by the proposed method.

  9. Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing

    Science.gov (United States)

    DeBrabander, Gregory N.; Boyd, Joseph T.

    1996-01-01

    Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented.

  10. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  11. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  12. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  13. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  14. Characterization of condenser microphones under different environmental conditions for accurate speed of sound measurements with acoustic resonators

    International Nuclear Information System (INIS)

    Condenser microphones are more commonly used and have been extensively modeled and characterized in air at ambient temperature and static pressure. However, several applications of interest for metrology and physical acoustics require to use these transducers in significantly different environmental conditions. Particularly, the extremely accurate determination of the speed of sound in monoatomic gases, which is pursued for a determination of the Boltzmann constant k by an acoustic method, entails the use of condenser microphones mounted within a spherical cavity, over a wide range of static pressures, at the temperature of the triple point of water (273.16 K). To further increase the accuracy achievable in this application, the microphone frequency response and its acoustic input impedance need to be precisely determined over the same static pressure and temperature range. Few previous works examined the influence of static pressure, temperature, and gas composition on the microphone's sensitivity. In this work, the results of relative calibrations of 1/4 in. condenser microphones obtained using an electrostatic actuator technique are presented. The calibrations are performed in pure helium and argon gas at temperatures near 273 K and in the pressure range between 10 and 600 kPa. These experimental results are compared with the predictions of a realistic model available in the literature, finding a remarkable good agreement. The model provides an estimate of the acoustic impedance of 1/4 in. condenser microphones as a function of frequency and static pressure and is used to calculate the corresponding frequency perturbations induced on the normal modes of a spherical cavity when this is filled with helium or argon gas.

  15. Characterization of condenser microphones under different environmental conditions for accurate speed of sound measurements with acoustic resonators.

    Science.gov (United States)

    Guianvarc'h, Cécile; Gavioso, Roberto M; Benedetto, Giuliana; Pitre, Laurent; Bruneau, Michel

    2009-07-01

    Condenser microphones are more commonly used and have been extensively modeled and characterized in air at ambient temperature and static pressure. However, several applications of interest for metrology and physical acoustics require to use these transducers in significantly different environmental conditions. Particularly, the extremely accurate determination of the speed of sound in monoatomic gases, which is pursued for a determination of the Boltzmann constant k by an acoustic method, entails the use of condenser microphones mounted within a spherical cavity, over a wide range of static pressures, at the temperature of the triple point of water (273.16 K). To further increase the accuracy achievable in this application, the microphone frequency response and its acoustic input impedance need to be precisely determined over the same static pressure and temperature range. Few previous works examined the influence of static pressure, temperature, and gas composition on the microphone's sensitivity. In this work, the results of relative calibrations of 1/4 in. condenser microphones obtained using an electrostatic actuator technique are presented. The calibrations are performed in pure helium and argon gas at temperatures near 273 K and in the pressure range between 10 and 600 kPa. These experimental results are compared with the predictions of a realistic model available in the literature, finding a remarkable good agreement. The model provides an estimate of the acoustic impedance of 1/4 in. condenser microphones as a function of frequency and static pressure and is used to calculate the corresponding frequency perturbations induced on the normal modes of a spherical cavity when this is filled with helium or argon gas. PMID:19655971

  16. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    Energy Technology Data Exchange (ETDEWEB)

    Xiang, H.; Komvopoulos, K. [Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)

    2013-06-14

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  17. A Fully On-Chip Gm-Opamp-RC Based Preamplifier for Electret Condenser Microphones

    Science.gov (United States)

    Le, Huy-Binh; Ryu, Seung-Tak; Lee, Sang-Gug

    An on-chip CMOS preamplifier for direct signal readout from an electret capacitor microphone has been designed with high immunity to common-mode and supply noise. The Gm-Opamp-RC based high impedance preamplifier helps to remove all disadvantages of the conventional JFET based amplifier and can drive a following switched-capacitor sigma-delta modulator in order to realize a compact digital electret microphone. The proposed chip is designed based on 0.18µm CMOS technology, and the simulation results show 86dB of dynamic range with 4.5µVrms of input-referred noise for an audio bandwidth of 20kHz and a total harmonic distortion (THD) of 1% at 90mVrms input. Power supply rejection ratio (PSRR) and common-mode rejection ration (CMRR) are more than 95dB at 1kHz. The proposed design dissipates 125µA and can operate over a wide supply voltage range of 1.6V to 3.3V.

  18. Light Dependent Resistance as a Sensor in Spectroscopy Setups Using Pulsed Light and Compared with Electret Microphones

    Directory of Open Access Journals (Sweden)

    Daniel Acosta-Avalos

    2006-05-01

    Full Text Available Light-dependent resistances (LDR are cheap light sensors. A less known lightdetector is the electret microphone, whose electret membrane functions as a perfectabsorber, but only detects pulsed light. The aim of this study was to analyze the use of aLDR and an electret microphone as a light sensor in an optical spectroscopy system usingpulsed light. A photoacoustic spectroscopy setup was used, substituting the photoacousticchamber by the light sensor proposed. The absorption spectra of two different liquids wereanalyzed. The results obtained allow the recommendation of the LDR as the first choice inthe construction of cheap homemade pulsed light spectroscopy systems.

  19. DFT-domain based single-microphone noise reduction for speech enhancement a survey of the state of the art

    CERN Document Server

    Hendriks, Richard C; Jensen, Jesper

    2013-01-01

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement.The field of single-microphone noise reducti

  20. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

    Directory of Open Access Journals (Sweden)

    Simas Butkus

    2015-12-01

    Full Text Available Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.

  1. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  2. Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films

    Institute of Scientific and Technical Information of China (English)

    丁建宁; 孟永钢; 温诗铸

    2002-01-01

    The elastic modulus is a very important mechanical property in micromachined structures. Several design issues such as resonant frequencies and stiffness in the micromachined structures are related to the elastic modulus. In addition, the accuracy of results from finite element models is highly dependent upon the elastic modulus. In this study, the Young modulus of micromachined thin polysilicon films has been investigated with a new tensile test machine using a magnetic-solenoid force actuator with linear response, low hysteresis, no friction and direct electrical control. The tensile test results show that the measured average value of Young modulus for a typical sample, (164±1.2) GPa, falls within the theoretical bounds of the texture model. These results will provide more reliable design of polysilicon microelectromechanical systems (MEMS).

  3. Electromechanical coupling factor of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Caronti, Alessandro; Carotenuto, Riccardo; Pappalardo, Massimo

    2003-01-01

    Recently, a linear, analytical distributed model for capacitive micromachined ultrasonic transducers (CMUTs) was presented, and an electromechanical equivalent circuit based on the theory reported was used to describe the behavior of the transducer [IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 159-168 (2002)]. The distributed model is applied here to calculate the dynamic coupling factor kw of a lossless CMUT, based on a definition that involves the energies stored in a dynamic vibration cycle, and the results are compared with those obtained with a lumped model. A strong discrepancy is found between the two models as the bias voltage increases. The lumped model predicts an increasing dynamic k factor up to unity, whereas the distributed model predicts a more realistic saturation of this parameter to values substantially lower. It is demonstrated that the maximum value of kw, corresponding to an operating point close to the diaphragm collapse, is 0.4 for a CMUT single cell with a circular membrane diaphragm and no parasitic capacitance (0.36 for a cell with a circular plate diaphragm). This means that the dynamic coupling factor of a CMUT is comparable to that of a piezoceramic plate oscillating in the thickness mode. Parasitic capacitance decreases the value of kw, because it does not contribute to the energy conversion. The effective coupling factor keff is also investigated, showing that this parameter coincides with kw within the lumped model approximation, but a quite different result is obtained if a computation is made with the more accurate distributed model. As a consequence, keff, which can be measured from the transducer electrical impedance, does not give a reliable value of the actual dynamic coupling factor.

  4. Micromachining electrical grade steel using pulsed Nd-YAG lasers

    Directory of Open Access Journals (Sweden)

    M.J. Jackson

    2007-01-01

    Full Text Available Purpose: Multi-wavelength capability allows diode pumped, solid state (D.P.S.S. lasers to perform operationssuch as micro machining in a variety of materials such as ceramics, metals, and polymers. Results from thisstudy reveal how traditional plasma-controlling gases have a detrimental effect on the surface morphology ofmachined components. The paper explains how the machining of thin plates of silicon steel can benefit the rapidproduction of electrical components such as transformer cores and dynamo pole pieces.Design/methodology/approach: A series of experiments was performed to investigate how shielding gasenvironment and gas pressure affect the ability to cut and machine silicon steel. The experiments were designedto show the differences between the use of various assist gases that shield the machining zone.Findings: The results of the work indicate that oxygen shielding gases allow silicon steel to be machined at afaster rate than using helium, argon, and air. However, the surface roughness produced is highly dependent onassist gas used and the pressure at which it is delivered.Research limitations/implications: The results presented imply that assist gases perform a variety of functionsand further research is required to understand how the assist gases improve machinability when machiningdifferent workpiece materials.Practical implications: The practical implications of this research indicate that a significant amount of researcheffort is required to optimize the type of assist gas used in laser micromachining of engineering materials.Originality/value: The paper reveals how assist gases interact with both laser and the surface of workpiecematerials. It is of practical value to microengineers and micromachinists working in the field of micro andnanomanufacturing.

  5. Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

    International Nuclear Information System (INIS)

    Piezoelectric polymers have been known to exist for more than 40 years, but in recent years they have been recognized as smart materials for the fabrication of microsensors, microactuators and other micro-electro-mechanical systems (MEMS). In this work, femtosecond laser micromachining of a polyvinylidene fluoride (PVDF) film, coated with NiCu on both sides, has been studied to understand selective patterning mechanisms of NiCu layers and ablation characteristics of PVDF films. A detailed characterization of morphological changes of the laser-irradiated areas has been investigated using scanning electron microscopy. Through morphological analysis, the multiple shot damage thresholds of a 28 µm thick PVDF film and 40 nm thick NiCu layer have been determined. Surface morphology examination indicates that NiCu layers are removed from the PVDF film through a sequence of cracking–peeling off-curling. In addition, the NiCu layer on the rear side was also removed by the partially transmitted laser energy. The PVDF film was removed in forms of bundles of filaments and solid fragments by a combination of pure ablation and explosive removal of material by bursting of bubbles; the role of the explosive removal becomes more dominant with the increase of laser fluence. Optimal process conditions for cutting of the PVDF film and patterning of the NiCu coating without damaging the PVDF polymer have been established and applied to fabricate a vibration microsensor prototype that shows significant potential in using PVDF-based functional microdevices for telecommunications, transportation and biomedical applications

  6. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.

  7. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  8. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  9. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  10. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  11. Practically Efficient Blind Speech Separation Using Frequency Band Selection Based on Magnitude Squared Coherence and a Small Dodecahedral Microphone Array

    Directory of Open Access Journals (Sweden)

    Kazunobu Kondo

    2012-01-01

    Full Text Available Small agglomerative microphone array systems have been proposed for use with speech communication and recognition systems. Blind source separation methods based on frequency domain independent component analysis have shown significant separation performance, and the microphone arrays are small enough to make them portable. However, the level of computational complexity involved is very high because the conventional signal collection and processing method uses 60 microphones. In this paper, we propose a band selection method based on magnitude squared coherence. Frequency bands are selected based on the spatial and geometric characteristics of the microphone array device which is strongly related to the dodecahedral shape, and the selected bands are nonuniformly spaced. The estimated reduction in the computational complexity is 90% with a 68% reduction in the number of frequency bands. Separation performance achieved during our experimental evaluation was 7.45 (dB (signal-to-noise ratio and 2.30 (dB (cepstral distortion. These results show improvement in performance compared to the use of uniformly spaced frequency band.

  12. Effects of a near-field rigid sphere scatterer on the performance of linear microphone array beamformers.

    Science.gov (United States)

    Hu, Yuxiang; Zhou, Haoran; Lu, Jing; Qiu, Xiaojun

    2016-08-01

    Beamformers enable a microphone array to capture acoustic signals from a sound source with high signal to noise ratio in a noisy environment, and the linear microphone array is of particular importance, in practice, due to its simplicity and easy implementation. A linear microphone array sometimes is used near some scattering objects, which affect its beamforming performance. This paper develops a numerical model with a linear microphone array near a rigid sphere for both far-field plane wave and near-field sources. The effects of the scatterer on two typical beamformers, i.e., the delay-and-sum beamformer and the superdirective beamformer, are investigated by both simulations and experiments. It is found that the directivity factor of both beamformers improves due to the increased equivalent array aperture when the size of the array is no larger than that of the scatter. With the increase of the array size, the directivity factor tends to deteriorate at high frequencies because of the rising side-lobes. When the array size is significantly larger than that of the scatterer, the scattering has hardly any influence on the beamforming performance. PMID:27586725

  13. A numerical study of the random-incidence and diffuse-field sensitivity of laboratory standard microphones using BEM

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Henriquez, Vicente Cutanda; Jacobsen, Finn;

    2006-01-01

    room. It is widely accepted that the two definitions are equivalent. The purpose of this paper is to examine this equivalence using numerical simulations. A laboratory standard microphone can be considered rotationally symmetrical around the axis; thus, an axi-symmetric formulation of the Boundary...

  14. Motherboards, Microphones and Metaphors: Re-Examining New Literacies and Black Feminist Thought through Technologies of Self

    Science.gov (United States)

    Ellison, Tisha Lewis; Kirkland, David E.

    2014-01-01

    This article examines how two African American females composed counter-selves using a computer motherboard and a stand-alone microphone as critical identity texts. Situated within sociocultural and critical traditions in new literacy studies and black feminist thought, the authors extend conceptions of language, literacy and black femininity via…

  15. A laboratory study on a capacitive displacement sensor as an implant microphone in totally implant cochlear hearing aid systems.

    Science.gov (United States)

    Huang, Ping; Guo, Jun; Megerian, Cliff A; Young, Darrin J; Ko, Wen H

    2007-01-01

    A totally implant cochlear hearing aids system, integrating an implant microphone, interface electronics, a speech processor, a stimulator, and cochlear electrodes, can overcome the uncomfortable, inconvenient, and stigma problems associated with the conventional and semi-implantable hearing aids. This paper presents a laboratory feasibility study on the use of an electret condenser microphone (ECM) displacement sensor, serving as an implant microphone, and combined with a spring coupler to directly sense the umbo acoustic vibration. The umbo vibration characteristics were extracted from literature to determine the coupler and sensor requirements. A laboratory model was built to simulate the vibration source and experimentally study the transmission coefficient. Experimental data demonstrate that by using a 5 N/m stiffness spring, the umbo vibration amplitude as high as 67% can be transmitted to the sensor. Measurement of the sensor system on the temporal bone was also made. The minimum detectable sound pressure level (SPL) at 1 kHz is 41 and 67 dB for laboratory and 38 and 64 dB for temporal bone measurement for 1 and 388 Hz bandwidth, respectively. Better performance was achieved in a higher frequency. Results and analysis of this study can be used as a guideline for the future design of displacement sensors as implant microphones. PMID:18003304

  16. Nonlinear photoacoustic response of opaque media in gas microphone signal detection

    Science.gov (United States)

    Madvaliev, U.; Salikhov, T. Kh.; Sharifov, D. M.; Khan, N. A.

    2006-03-01

    We have theoretically studied the effect of thermal nonlinearity, due to the temperature dependence of the thermophysical and optical parameters for thermally thick opaque media, on the characteristics of the fundamental photoacoustic signal when the signal is detected by a gas microphone. We have shown that the dependence of the amplitude of the nonlinear component of the signal on the intensity of the incident radiation I0 is expressed by means of the dependence of the temperature rise for the irradiated sample surface Θ0 on I0, and the thermal nonlinearity does not affect the phase of the photoacoustic signal. We propose a theory for generation of the second harmonic of the photoacoustic signal. We have established that the phase shift of the photoacoustic signal is equal to 3π/4, while its amplitude depends on the frequency (˜ω-3/2) and the intensity (˜ I{0/2}).

  17. Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

    DEFF Research Database (Denmark)

    Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain;

    2011-01-01

    We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM......) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity......) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them...

  18. A Novel Vibration Mode Testing Method for Cylindrical Resonators Based on Microphones

    Directory of Open Access Journals (Sweden)

    Yongmeng Zhang

    2015-01-01

    Full Text Available Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes.

  19. Compressive sensing based spinning mode detections by in-duct microphone arrays

    Science.gov (United States)

    Yu, Wenjun; Huang, Xun

    2016-05-01

    This paper presents a compressive sensing based experimental method for detecting spinning modes of sound waves propagating inside a cylindrical duct system. This method requires fewer dynamic pressure sensors than the number required by the Shannon-Nyquist sampling theorem so long as the incident waves are sparse in spinning modes. In this work, the proposed new method is firstly validated by preparing some of the numerical simulations with representative set-ups. Then, a duct acoustic testing rig with a spinning mode synthesiser and an in-duct microphone array is built to experimentally demonstrate the new approach. Both the numerical simulations and the experiment results are satisfactory, even when the practical issue of the background noise pollution is taken into account. The approach is beneficial for sensory array tests of silent aeroengines in particular and some other engineering systems with duct acoustics in general.

  20. Design and Development of a High Impedance Amplifier For Use With Piezoelectric Infrasound Microphones

    Science.gov (United States)

    Kleinert, D. E.; Talmadge, C. L.

    2011-12-01

    The National Center for Physical Acoustics (NCPA) has developed a new class of high fidelity low cost piezoelectric infrasound sensors. One of the key electronic issues has been the design and development of the appropriate high impedance amplifiers including material specification as well as circuit layout and fabrication. The high impedance amplifier is required to allow the piezoelectronic sensor to operate over its entire bandwidth as the sensor itself has high impedance at the low frequency end of its operation. The specifications include a flat frequency response from at least .01 Hz to 500 Hz, a dynamic range suitable to feed a 24 bit ADC and reasonably low power (mW levels). There has been extensive field testing of the resulting amplifier in conjunction with the piezoelectric microphone, also developed at NCPA, in a variety of locations and climates using various sources, including hurricanes, tornados and high explosive detonations.

  1. High frequency microphone measurements for transition detection on airfoils. NACA-0015 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given...... to transition detection. It is argued that the transition point can be detected by observing the increase in the mean of the Fourier spectre and that thismethod is very stable froma numerical point of view. Other important issues are also discussed, e.g. the variation of pressure standard deviations (sound...... pressure) and Tollmien-Schlichting frequencies. The tests were made at Reynolds and Mach numbers corresponding to the operating conditions of a typical horizontal axis wind turbine (HAWT). The Risø B1-18, Risø C2-18 and NACA0015 profiles were tested and the measured transition points are reported....

  2. Compressive sensing based spinning mode detections by in-duct microphone arrays

    Science.gov (United States)

    Yu, Wenjun; Huang, Xun

    2016-05-01

    This paper presents a compressive sensing based experimental method for detecting spinning modes of sound waves propagating inside a cylindrical duct system. This method requires fewer dynamic pressure sensors than the number required by the Shannon–Nyquist sampling theorem so long as the incident waves are sparse in spinning modes. In this work, the proposed new method is firstly validated by preparing some of the numerical simulations with representative set-ups. Then, a duct acoustic testing rig with a spinning mode synthesiser and an in-duct microphone array is built to experimentally demonstrate the new approach. Both the numerical simulations and the experiment results are satisfactory, even when the practical issue of the background noise pollution is taken into account. The approach is beneficial for sensory array tests of silent aeroengines in particular and some other engineering systems with duct acoustics in general.

  3. Deconvolution for the localization of sound sources using a circular microphone array

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn

    2013-01-01

    During the last decade, the aeroacoustic community has examined various methods based on deconvolution to improve the visualization of acoustic fields scanned with planar sparse arrays of microphones. These methods assume that the beamforming map in an observation plane can be approximated...... by a convolution of the distribution of the actual sources and the beamformer's point-spread function, defined as the beamformer's response to a point source. By deconvolving the resulting map, the resolution is improved, and the side-lobes effect is reduced or even eliminated compared to conventional beamforming....... Even though these methods were originally designed for planar sparse arrays, in the present study, they are adapted to uniform circular arrays for mapping the sound over 360°. This geometry has the advantage that the beamforming output is practically independent of the focusing direction, meaning...

  4. Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Ozaki, Katsuya [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Matin, Abdul, E-mail: matin.md.a@gmail.com [Department of Glass and Ceramic Engineering, Bangladesh University of Engg and Tech (BUET), Dhaka 1000 (Bangladesh); Numata, Yasuyuki [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Akai, Daisuke [Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan); Sawada, Kazuaki; Ishida, Makoto [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan)

    2014-12-15

    Highlights: • Highly [1 1 1] orientated functional PZT(1 1 1) thin film was grown on n-Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1). • Device performance of pMUT was studied using both experiment and modeling. • Material anisotropy played a significant role in the shifting of resonant frequency • pMUT shows high sensitivity for the transmission of ultrasonic pulses. • Successful realization of a piezoelectric ultrasonic transducer (pMUT) array. - Abstract: A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al{sub 2}O{sub 3} film on Si substrate. Modal shape of pMUT was analyzed employing advanced 3D finite element modeling taking the crystallographic anisotropy of materials and the properties of immersed medium (air or water) into account. Eigenfrequency with mode shapes has shown to have significant influence on transmitting-receiving characteristics of pMUT. Modal shapes of pMUT were also quantitatively determined using Laser Doppler Vibratometry (LDV). An excellent correlation was obtained between computational and experimental results. A significantly high sensitivity of 3.9 μV/kPa was obtained in an under-water ultrasonic wave transmission experiment conducted using fabricated pMUT as wave transmitter and a commercial transducer as receiver at a fundamental frequency of 1.20 MHz. Advanced FE computation thus serves as a tool to a priori optimize device structure for the successful transmission of ultrasonic waves with sufficient power to generate high resolution 3D imaging.

  5. Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems

    Science.gov (United States)

    Koch, Michael

    Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world. This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates. Two different pump types have been developed. These are membrane pumps with either cantilever valves or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps. Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever valves. CFX- Flow3D was also used to successfully model the behaviour of the diffuser/nozzle valve. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever valve was necessary to achieve better prediction of the pump rates for higher frequencies. As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump

  6. High aspect ratio transmission line circuits micromachined in silicon

    Science.gov (United States)

    Todd, Shane Truman

    The performance of complimentary metal-oxide-semiconductor (CMOS) monolithic microwave integrated circuits (MMICs) fabricated on silicon has improved dramatically. The scaling down of silicon transistors has increased the maximum frequency of transistors to the point where silicon MMICs have become a viable alternative to compound semiconductor MMICs in certain applications. A fundamental problem still exists in silicon MMICs however in that transmission lines fabricated on silicon can suffer from high loss due to the finite conductivity of the silicon substrate. A novel approach for creating low-loss transmission lines on silicon is presented in this work. Low-loss transmission lines are created on low resistivity silicon by using a micromachining method that combines silicon deep reactive ion etching (DRIE), thermal oxidation, electroplating, and planarization. Two types of high aspect ratio transmission lines are created with this method including high aspect ratio coplanar waveguide (hicoplanar) and semi-rectangular coaxial (semicoaxial). Transmission lines with impedances ranging from 20--80 O have been fabricated with minimum measured loss lower than 1 dB/cm at 67 GHz. Low-loss dielectrics are created for the high aspect ratio transmission lines using the mesa merging method. The mesa merging method works by creating silicon mesa arrays using DRIE and then converting and merging the mesa arrays into a solid oxide dielectric using thermal oxidation. The transmission lines are designed so that the fields penetrate the low-loss oxide dielectric and are isolated from the lossy silicon substrate. The mesa merging method has successfully created large volume oxide with depth up to 65 microm and width up to 240 microm in short oxidation times. Other advantages of the high aspect ratio transmission lines are demonstrated including low-loss over a wide impedance range, high isolation, and high coupling for coupled-line circuits. Transmission line models have been

  7. Acoustic investigation of wall jet over a backward-facing step using a microphone phased array

    Science.gov (United States)

    Perschke, Raimund F.; Ramachandran, Rakesh C.; Raman, Ganesh

    2015-02-01

    The acoustic properties of a wall jet over a hard-walled backward-facing step of aspect ratios 6, 3, 2, and 1.5 are studied using a 24-channel microphone phased array at Mach numbers up to M=0.6. The Reynolds number based on inflow velocity and step height assumes values from Reh = 3.0 ×104 to 7.2 ×105. Flow without and with side walls is considered. The experimental setup is open in the wall-normal direction and the expansion ratio is effectively 1. In case of flow through a duct, symmetry of the flow in the spanwise direction is lost downstream of separation at all but the largest aspect ratio as revealed by oil paint flow visualization. Hydrodynamic scattering of turbulence from the trailing edge of the step contributes significantly to the radiated sound. Reflection of acoustic waves from the bottom plate results in a modulation of power spectral densities. Acoustic source localization has been conducted using a 24-channel microphone phased array. Convective mean-flow effects on the apparent source origin have been assessed by placing a loudspeaker underneath a perforated flat plate and evaluating the displacement of the beamforming peak with inflow Mach number. Two source mechanisms are found near the step. One is due to interaction of the turbulent wall jet with the convex edge of the step. Free-stream turbulence sound is found to be peaked downstream of the step. Presence of the side walls increases free-stream sound. Results of the flow visualization are correlated with acoustic source maps. Trailing-edge sound and free-stream turbulence sound can be discriminated using source localization.

  8. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  9. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T;

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  10. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

    NARCIS (Netherlands)

    Dumitrescu, Marius; Cobianu, Cornel; Lungu, Dan; Pascu, Adrian; Kolev, Spas; Berg, van den Albert

    1999-01-01

    A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an optimiz

  11. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    NARCIS (Netherlands)

    Kleijhorst, R.A.; Offerhaus, H.L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given

  12. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, H.; Vermeer, C.H.; Vanapalli, S.; Holland, H.J.; Brake, ter H.J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has t

  13. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  14. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  15. First micromachined silicon load cell for loads up to 1000 kg

    NARCIS (Netherlands)

    Wensink, H.; Boer, de M.J.; Wiegerink, R.J.; Zwijze, R.A.F.; Elwenspoek, M.C.; French, Patrick J.; Chau, Kevin H.

    1998-01-01

    In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct

  16. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    Energy Technology Data Exchange (ETDEWEB)

    Doraiswamy, A. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Patz, T. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Narayan, R.J. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Dinescu, M. [National Institute for Laser, Plasma and Radiation Physics, P.O. Box MG-16 Magurele, 077125 Bucharest (Romania); Modi, R. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Auyeung, R.C.Y. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Chrisey, D.B. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States)

    2006-04-30

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 {mu}m wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication.

  17. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    International Nuclear Information System (INIS)

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 μm wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication

  18. Micromachined vertical Hall magnetic field sensor in standard complementary metal oxide semiconductor technology

    Science.gov (United States)

    Paranjape, M.; Ristic, Lj.

    1992-06-01

    A novel 2D micromachined vertical Hall magnetic field sensor structure has been designed and fabricated using a commercially available 3 micron CMOS process. The device can detect two magnetic field components in the plane of the chip surface. The sensor exhibits a linear response and shows no cross-sensitivity between channels.

  19. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, H.; Vanapalli, S.; Holland, H.J.; Vermeer, C.H.; Brake, ter H.J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with di

  20. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    Directory of Open Access Journals (Sweden)

    Zhengyi Niu

    2010-12-01

    Full Text Available It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with slanted beams were proposed to evaluate the effect of the axial force. One type was suspended with a clamped-free (C-F beam and the other one was suspended with a clamped-clamped (C-C beam. Their drive modes are the bending of the slanted beam, and their sense modes are the torsion of the slanted beam. The relationships between the resonant frequencies of the two types were developed. The prototypes were packaged by vacuum under 0.1 mbar and an analytical solution for the axial force effect on the resonant frequency was obtained. The temperature dependent performances of the operated mode responses of the micromachined gyroscopes were measured. The experimental values of the temperature coefficients of resonant frequencies (TCF due to axial force were 101.5 ppm/°C for the drive mode and 21.6 ppm/°C for the sense mode. The axial force has a great influence on the modal frequency of the micromachined gyroscopes suspended with a C-C beam, especially for the flexure mode. The quality factors of the operated modes decreased with increasing temperature, and changed drastically when the micromachined gyroscopes worked at higher temperatures.

  1. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  2. 传声器阵列校准技术研究%Calibration technology of microphone array

    Institute of Scientific and Technical Information of China (English)

    李元首; 陈宝; 张雪; 姜涛

    2014-01-01

    Aerodynamic noise is usually broadband noise. The designed array needs to satisfy the measurement require⁃ments of both high and low frequency signals. The corresponding array form is designed when the frequency range of array mea⁃surement is determined. The noise source localization technology based on microphone array is the core test technique in the wind tunnel aerodynamic noise test technology. The accuracy of noise source localization depends mainly on the microphone ar⁃ray calibration technique. After the microphone phase array is installed,different frequency response and sensitivity,preamplifier, cable laying,power supply,frequency response of signal conditioner and the installation of microphone array can cause the phase difference and amplitude difference among all measurement channels in the data acquisition system. Correction of phase difference and amplitude difference of microphones can make all the microphone frequency responses consistent and ensure the accuracy of test result.%气动噪声通常为宽频噪声,设计的阵列需要同时满足对高低频信号的测量需求,在确定了阵列测量频率范围的情况下,设计相应的阵列形式。在风洞气动噪声试验技术中,基于传声器阵列的噪声源定位技术是核心试验技术,噪声源定位的精准度主要取决于传声器阵列校准技术。传声器相位阵列安装之后,由于传声器频率响应和灵敏度不同,前置放大器、电缆的铺设、电源和信号调理器的频率响应以及传声器在阵列中的安装影响,会引起数据采集系统各测量通道间固有的相位差和幅值差。修正传声器的相位差和幅值差使得所有的传声器幅频响应一致,保证试验结果的准度。

  3. Advanced characterization of carrier profiles in germanium using micro-machined contact probes

    DEFF Research Database (Denmark)

    Clarysse, T.; Konttinen, M.; Parmentier, B.;

    2012-01-01

    The accurate determination of the sheet resistance and carrier depth profile, i.e. active dopant profile, of shallow junction isolated structures involving new high mobility materials, such as germanium, is a crucial topic for future CMOS development. In this work, we discuss the capabilities of...... use of only two probes, a spreading resistance like setup is obtained with small spacing and drastically reduced electrical contact radii (~10 nm) leading to a substantial reduction of the correction factors which are normally required for converting spreading resistance profiles. We demonstrate the...

  4. An Advanced Micromachined Package for the Quartz Disk Resonant Gyroscope Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The objective of this proposal is to demonstrate the feasibility of a fully packaged microelectromechanical (MEMS) gyroscope with a 7 milliarcsecond pointing...

  5. Compensating microphonics in SRF cavities to ensure beam stability for future free electron lasers

    Energy Technology Data Exchange (ETDEWEB)

    Neumann, Axel

    2008-07-21

    In seeded High-Gain-Harmonic-Generation free electron lasers or energy recovery linear accelerators the requirements for the bunch-to-bunch timing and energy jitter of the beam are in the femtosecond and per mill regime. This implies the ability to control the cavity radiofrequency (RF) field to an accuracy of 0.02 in phase and up to 1.10{sup -4} in amplitude. For the planned BESSY-FEL it is envisaged to operate 144 superconducting 1.3 GHz cavities of the 2.3 GeV driver linac in continuous wave mode and at a low beam current. The cavity resonance comprises a very narrow bandwidth of the order of tens of Hertz. Such cavities have been characterized under accelerator like conditions in the HoBiCaT test facility. It was possible to measure the error sources affecting the field stability in continuous wave (CW) operation. Microphonics, the main error source for a mechanical detuning of the cavities, lead to an average fluctuation of the cavity resonance of 1-5 Hz rms. Furthermore, the static and dynamic Lorentz force detuning and the helium pressure dependance of the cavity resonance have been measured. Single cavity RF control and linac bunch-to-bunch longitudinal phase space modeling containing the measured properties showed, that it is advisable to find means to minimize the microphonics detuning by mechanical tuning. Thus, several fast tuning systems have been tested for CW operation. These tuners consist of a motor driven lever for slow and coarse tuning and a piezo that is integrated into the tuner support for fast and fine tuning. Regarding the analysis of the detuning spectrum an adaptive feedforward method based on the least-mean-square filter algorithm has been developed for fast cavity tuning. A detuning compensation between a factor of two and up to a factor of seven has been achieved. Modeling the complete system including the fast tuning scheme, showed that the requirements of the BESSY-FEL are attainable. (orig.)

  6. Interface for Barge-in Free Spoken Dialogue System Based on Sound Field Reproduction and Microphone Array

    Directory of Open Access Journals (Sweden)

    Hinamoto Yoichi

    2007-01-01

    Full Text Available A barge-in free spoken dialogue interface using sound field control and microphone array is proposed. In the conventional spoken dialogue system using an acoustic echo canceller, it is indispensable to estimate a room transfer function, especially when the transfer function is changed by various interferences. However, the estimation is difficult when the user and the system speak simultaneously. To resolve the problem, we propose a sound field control technique to prevent the response sound from being observed. Combined with a microphone array, the proposed method can achieve high elimination performance with no adaptive process. The efficacy of the proposed interface is ascertained in the experiments on the basis of sound elimination and speech recognition.

  7. Background Noise Reduction in Wind Tunnels using Adaptive Noise Cancellation and Cepstral Echo Removal Techniques for Microphone Array Applications

    OpenAIRE

    Spalt, Taylor B

    2010-01-01

    Two experiments were conducted to investigate Adaptive Noise Cancelling and Cepstrum echo removal post-processing techniques on acoustic data from a linear microphone array in an anechoic chamber. A point source speaker driven with white noise was used as the primary signal. The first experiment included a background speaker to provide interference noise at three different Signal-to-Noise Ratios to simulate noise propagating down a wind tunnel circuit. The second experiment contained only the...

  8. A study of blast waveforms detected simultaneously by a microphone and a laser probe during laser ablation

    Science.gov (United States)

    Diaci, J.; Možina, J.

    1992-10-01

    We examine blast waves generated in air during irradiation of absorbing samples with Nd: YAG laser pulses of fluences exceeding the ablation threshold. Blast waves were detected simultaneously by a wideband microphone and a laser beam deflection probe. By a comparative analysis of both signals in the time and frequency domain we investigate characteristic features of their nonlinear waveform evolution. To explain the observed phenomena we employ the weak shock solution of the point explosion model.

  9. Three-dimensional acoustic imaging with planar microphone arrays and compressive sensing

    Science.gov (United States)

    Ning, Fangli; Wei, Jingang; Qiu, Lianfang; Shi, Hongbing; Li, Xiaofan

    2016-10-01

    For obtaining super-resolution source maps, we extend compressive sensing (CS) to three-dimensional acoustic imaging. Source maps are simulated with a planar microphone array and a CS algorithm. Comparing the source maps of the CS algorithm with those of the conventional beamformer (CBF) and Tikhonov Regularization (TIKR), we find that the CS algorithm is computationally more effective and can obtain much higher resolution source maps than the CBF and TIKR. The effectiveness of the CS algorithm is analyzed. The CS algorithm can locate the sound sources exactly when the frequency is above 4000 Hz and the signal-to-noise ratio (SNR) is above 12 dB. The location error of the CS algorithm increases as the frequency drops below the threshold, and the errors in location and power increase as SNR decreases. The further from the array the source is, the larger the location error is. The lateral resolution of the CS algorithm is much better than the range resolution. Finally, experimental measurements are conducted in a semi-anechoic room. Two mobile phones are served as sound sources. The results show that the CS algorithm can reconstruct two sound sources near the bottom of the two mobile phones where the speakers are located. The feasibility of the CS algorithm is also validated with the experiment.

  10. Separating Turbofan Engine Noise Sources Using Auto and Cross Spectra from Four Microphones

    Science.gov (United States)

    Miles, Jeffrey Hilton

    2008-01-01

    The study of core noise from turbofan engines has become more important as noise from other sources such as the fan and jet were reduced. A multiple-microphone and acoustic-source modeling method to separate correlated and uncorrelated sources is discussed. The auto- and cross spectra in the frequency range below 1000 Hz are fitted with a noise propagation model based on a source couplet consisting of a single incoherent monopole source with a single coherent monopole source or a source triplet consisting of a single incoherent monopole source with two coherent monopole point sources. Examples are presented using data from a Pratt& Whitney PW4098 turbofan engine. The method separates the low-frequency jet noise from the core noise at the nozzle exit. It is shown that at low power settings, the core noise is a major contributor to the noise. Even at higher power settings, it can be more important than jet noise. However, at low frequencies, uncorrelated broadband noise and jet noise become the important factors as the engine power setting is increased.

  11. A Sub-Space Method to Detect Multiple Wireless Microphone Signals in TV Band White Space

    CERN Document Server

    Dhillon, Harpreet S; Datla, Dinesh; Benonis, Michael; Buehrer, R Michael; Reed, Jeffrey H

    2011-01-01

    The main hurdle in the realization of dynamic spectrum access (DSA) systems from physical layer perspective is the reliable sensing of low power licensed users. One such scenario shows up in the unlicensed use of TV bands where the TV Band Devices (TVBDs) are required to sense extremely low power wireless microphones (WMs). The lack of technical standard among various wireless manufacturers and the resemblance of certain WM signals to narrow-band interference signals, such as spurious emissions, further aggravate the problem. Due to these uncertainties, it is extremely difficult to abstract the features of WM signals and hence develop robust sensing algorithms. To partly counter these challenges, we develop a two-stage sub-space algorithm that detects multiple narrow-band analog frequency-modulated signals generated by WMs. The performance of the algorithm is verified by using experimentally captured low power WM signals with received power ranging from -100 to -105 dBm. The problem of differentiating between...

  12. Infrastructure-Less Indoor Localization Using the Microphone, Magnetometer and Light Sensor of a Smartphone

    Science.gov (United States)

    Galván-Tejada, Carlos E.; García-Vázquez, Juan Pablo; Galván-Tejada, Jorge I.; Delgado-Contreras, J. Rubén; Brena, Ramon F.

    2015-01-01

    In this paper, we present the development of an infrastructure-less indoor location system (ILS), which relies on the use of a microphone, a magnetometer and a light sensor of a smartphone, all three of which are essentially passive sensors, relying on signals available practically in any building in the world, no matter how developed the region is. In our work, we merge the information from those sensors to estimate the user’s location in an indoor environment. A multivariate model is applied to find the user’s location, and we evaluate the quality of the resulting model in terms of sensitivity and specificity. Our experiments were carried out in an office environment during summer and winter, to take into account changes in light patterns, as well as changes in the Earth’s magnetic field irregularities. The experimental results clearly show the benefits of using the information fusion of multiple sensors when contrasted with the use of a single source of information. PMID:26295237

  13. Microphone array signal processing with application in three-dimensional spatial hearing.

    Science.gov (United States)

    Bai, Mingsian R; Lin, Chenpang

    2005-04-01

    Microphone arrays are known to enhance the directionality and signal-to-noise ratio (SNR) over single-channel sensors. This is considered beneficial in many applications such as video-conferencing systems and hearing aids. However, this advantage comes at the price of the sensation of spatial hearing. The spatial cues due to diffractions of the head and torso are lost if the array is not fitted in the ears. In this paper we present a system that incorporates binaural hearing synthesis into array signal processing, in an attempt to recover the three-dimensional sound image that a human listener would naturally perceive. In the system, the superdirective beamformer is exploited to estimate the direction of arrival (DOA) of the incoming sound. The spatial sound image is restored by steering the beam to the direction found in the DOA session and filtering the array output with the corresponding Head Related Transfer Functions (HRTF). The algorithms have been implemented in real-time fashion using a digital signal processor. Objective and subjective experiments were performed to validate the proposed system. The experimental results showed that the accurate localization of the sound source is achievable using the array system. PMID:15898652

  14. Fiber-optical microphones and accelerometers based on polymer optical fiber Bragg gratings

    DEFF Research Database (Denmark)

    Yuan, Scott Wu; Stefani, Alessio; Bang, Ole;

    2010-01-01

    Polymer optical fibers (POFs) are ideal for applications as the sensing element in fiber-optical microphones and accelerometers based on fiber Bragg gratings (FBGs) due to their reduced Young’s Modulus of 3.2GPa, compared to 72GPa of Silica. To maximize the sensitivity and the dynamic range...... of the device the outer diameter and the length of the sensing fiber segment should be as small as possible. To this end we have fabricated 3mm FBGs in single-mode step-index POFs of diameter 115 micron, using 325nm UV writing and a phase-mask technique. 6mm POF sections with FBGs in the center have been glued...... to standard Silica SMF28 fibers. These POF FBGs have been characterized in terms of temperature and strain to find operating regimes with no hysteresis. Commercial fast wavelength interrogators (KHz) are shown to be able to track the thin POF FBGs and they are finally applied in a prototype accelerometer...

  15. SVD-Based Optimal Filtering Technique for Noise Reduction in Hearing Aids Using Two Microphones

    Directory of Open Access Journals (Sweden)

    Jean-Baptiste Maj

    2002-04-01

    Full Text Available We introduce a new SVD-based (Singular value decomposition strategy for noise reduction in hearing aids. This technique is evaluated for noise reduction in a behind-the-ear (BTE hearing aid where two omnidirectional microphones are mounted in an endfire configuration. The behaviour of the SVD-based technique is compared to a two-stage adaptive beamformer for hearing aids developed by Vanden Berghe and Wouters (1998. The evaluation and comparison is done with a performance metric based on the speech intelligibility index (SII. The speech and noise signals are recorded in reverberant conditions with a signal-to-noise ratio of 0 dB and the spectrum of the noise signals is similar to the spectrum of the speech signal. The SVD-based technique works without initialization nor assumptions about a look direction, unlike the two-stage adaptive beamformer. Still, for different noise scenarios, the SVD-based technique performs as well as the two-stage adaptive beamformer, for a similar filter length and adaptation time for the filter coefficients. In a diffuse noise scenario, the SVD-based technique performs better than the two-stage adaptive beamformer and hence provides a more flexible and robust solution under speaker position variations and reverberant conditions.

  16. Simultaneous Blind Separation and Recognition of Speech Mixtures Using Two Microphones to Control a Robot Cleaner

    Directory of Open Access Journals (Sweden)

    Heungkyu Lee

    2013-02-01

    Full Text Available This paper proposes a method for the simultaneous separation and recognition of speech mixtures in noisy environments using two‐channel based independent vector analysis (IVA on a home‐robot cleaner. The issues to be considered in our target application are speech recognition at a distance and noise removal to cope with a variety of noises, including TV sounds, air conditioners, babble, and so on, that can occur in a house, where people can utter a voice command to control a robot cleaner at any time and at any location, even while a robot cleaner is moving. Thus, the system should always be in a recognition‐ready state to promptly recognize a spoken word at any time, and the false acceptance rate should be lower. To cope with these issues, the keyword spotting technique is applied. In addition, a microphone alignment method and a model‐based real‐time IVA approach are proposed to effectively and simultaneously process the speech and noise sources, as well as to cover 360‐degree directions irrespective of distance. From the experimental evaluations, we show that the proposed method is robust in terms of speech recognition accuracy, even when the speaker location is unfixed and changes all the time. In addition, the proposed method shows good performance in severely noisy environments.

  17. SoundCompass: A Distributed MEMS Microphone Array-Based Sensor for Sound Source Localization

    Science.gov (United States)

    Tiete, Jelmer; Domínguez, Federico; da Silva, Bruno; Segers, Laurent; Steenhaut, Kris; Touhafi, Abdellah

    2014-01-01

    Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of a limited number of scattered sound sensors. Aiming to produce accurate noise pollution maps, we developed the SoundCompass, a low-cost sound sensor capable of measuring local noise levels and sound field directionality. Our first prototype is composed of a sensor array of 52 Microelectromechanical systems (MEMS) microphones, an inertial measuring unit and a low-power field-programmable gate array (FPGA). This article presents the SoundCompass’s hardware and firmware design together with a data fusion technique that exploits the sensing capabilities of the SoundCompass in a wireless sensor network to localize noise pollution sources. Live tests produced a sound source localization accuracy of a few centimeters in a 25-m2 anechoic chamber, while simulation results accurately located up to five broadband sound sources in a 10,000-m2 open field. PMID:24463431

  18. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    Science.gov (United States)

    Belwanshi, Vinod; Topkar, Anita

    2016-05-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  19. Modelling of micromachining of human tooth enamel by erbium laser radiation

    Energy Technology Data Exchange (ETDEWEB)

    Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

    2014-08-31

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  20. Integration of active materials with silicon micromachining: applications to optical MEMS

    Science.gov (United States)

    Gouy, Jean-Philippe; Arakawa, Yasuhiko; Fujita, Hiroyuki

    2001-11-01

    Most of the MOEMS including optical switches and micro optical benches are developed on silicon. As for the MEMS, the main reason is that silicon has consistently been the material of choice for the microelectronics industry, due to a mature processing technology which offers the possibility to integrate MEMS devices with Integrated Circuits in a low cost batch fabrication process. However, since the beginning of Optoelectronic, silicon has been suffering from its poor efficiency to emit light because of its indirect band gap. Optical active devices can be integrated on silicon by combining specific active materials in order to keep the main advantage of silicon micromachining for MOEMS applications. This paper illustrates this purpose through one project developed in the frame of the LIMMS, joint laboratory between France and Japan. This project deals with optical active devices for which silicon micromachining technology has been employed to fabricate an organic semiconductors based light emitted diode on silicon substrate.

  1. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    Institute of Scientific and Technical Information of China (English)

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  2. Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

    Institute of Scientific and Technical Information of China (English)

    ZHOU Bin; GAO Zhong-yu; CHEN Huai; ZHANG Rong; CHEN Zhi-yong

    2006-01-01

    A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adiustment,improve the control performance of gyroscope,and make error compensation.By digitalizing the output of the gyroscope,this system uses a floatingtype digital signal processor(DSP)to process the signal demodulation and achieve the feedback conffol of the gyroscope.Therefore.the small change of capacitance in the micromachined gyroscope Can be detected.A new demodulation algorithm of least mean square demodulation(LMSD)has been developed inside DSP Simulation and measurement results show that LMSD Can improve 29%of the noise performance compared with the typical multiplication method.In air pressure.a kind ofvibration-wheel micmmachined over the 100-Hz bandwidth by using this digital readout technology.

  3. Superhydrophobic Surface by Replication of Laser Micromachined Pattern in Epoxy/Alumina Nanoparticle Composite

    Directory of Open Access Journals (Sweden)

    Maciej Psarski

    2014-01-01

    Full Text Available Superhydrophobic surfaces were obtained by superposition of microstructure—defined by replication of laser micromachined masters, with nanostructure—created by durable epoxy/γ-Al2O3 nanoparticle composite, used for replication. Hierarchical surface topography thus obtained consisted of hexagonally spaced microcavities and nanoparticle agglomerates, exposed on the replica surface by radio frequency (RF air plasma etching. Surface topography was further enhanced by rims around the microcavity edges, resulting from nanosecond laser micromachining defects in aluminum masters. Subsequent wet chemical hydrophobization with 1H,1H,2H,2H-perfluorotetradecyltriethoxysilane (PFTDTES provided superhydrophobic behavior in replicas with a microcavity spacing of 30 μm, as indicated by a water contact angle of 160° and a sliding angle of 8°. The preparation method is relatively simple, inexpensive, and potentially scalable.

  4. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    CERN Document Server

    Lin, Jintian; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-01-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  5. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    OpenAIRE

    Zhikang Li; Libo Zhao; Zhuangde Jiang; Sina Akhbari; Jianjun Ding; Yihe Zhao; Yulong Zhao; Liwei Lin

    2015-01-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency ...

  6. Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

    OpenAIRE

    Yonggang Yin; Boqian Sun; Fengtian Han

    2016-01-01

    A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degr...

  7. A resonant miniature electric field sensor using bulk-micromachining process

    Institute of Scientific and Technical Information of China (English)

    DENG Kai; XIA Shanhong; GONG Chao; PENG Chunrong; TAO Hu; BAI Qiang; CHEN Shaofeng

    2005-01-01

    A novel design of a resonant miniature electric field sensor based on microfabrication technology is proposed. The operating principles and specifications, the design structure, and the silicon-based bulk-micromachining fabrication process are presented. The finite element simulation shows that our design can obtain good results in device parameters setting, and its simplicity and low-cost features make it an attractive product for future applications.

  8. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    Science.gov (United States)

    Kleijhorst, R. A.; Offerhaus, H. L.; Bant, P.

    1998-05-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

  9. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    OpenAIRE

    Yan Deng; Bin Zhou; Chao Xing; Rong Zhang

    2014-01-01

    A novel multifrequency excitation (MFE) method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE) method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test rep...

  10. Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials

    OpenAIRE

    Belloy, E.; Sayah, A.; Gijs, M. A. M.

    2001-01-01

    We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identi...

  11. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

    OpenAIRE

    Weiping Zhang; Xiaosheng Wu; Wenyuan Chen; Wu Liu; Feng Cui

    2011-01-01

    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micro...

  12. A Laser Fabrication of Magnetic Micromachines by Using Optimized Photosensitive Ferrofluids

    Directory of Open Access Journals (Sweden)

    Ye Tian

    2016-01-01

    Full Text Available We report here a laser fabrication of magnetic micromachines by using optimized photosensitive ferrofluids. Fe3O4 nanoparticles were prepared by thermal decomposition and subsequent ligand exchange. And then, they were dispersed into photoresist. As a representative illustration, a magnetic microturbine with high surface flatness was fabricated, and its rotation speed could reach as high as 400 rpm under revolving magnetic field.

  13. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    OpenAIRE

    Kleijhorst, R.A.; Offerhaus, H. L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

  14. Micromachining of Ti-3Al-2.5V tubes by nanosecond Nd:YAG laser

    Science.gov (United States)

    Lin, Yaomin; Gupta, Mool C.

    2013-03-01

    Laser micromachining is one of many laser material processing technologies employed in scientific research and engineering applications. It involves the deposition of photon energy and the material interaction. The intense photothermal energy is transported into the target material causing melting and evaporation. The material is removed layer by layer by melting and flowing away or by direct vaporization / ablation. It is due to the focused small spot size that the laser micromachining can remove material in small quantity at a time, thus precise control of geometrical dimension is possible. In this work, a nanosecond pulsed Nd:Yttrium-Aluminum-Garnet (Nd:YAG) laser was employed to generate relatively long notch of different dimensions (25.4 mm-length × 0.1 mm-width × 0.051/0.102/0.152 mmdepth) on Ti-3Al-2.5V seamless tubes for fatigue life study. Cyclic hydraulic impulse pressure test was conducted to find out the fatigue limits of the titanium tube containing the laser micromachined notch. The results of fatigue lives, crack profile and pattern of crack propagation are presented and discussed in this paper. Scanning electron microscopy was employed to characterize the fatigue crack profile and the laser micronotch. The capability of generating sharper notch root and consistent pre-crack on the surface of materials makes nanosecond pulsed Nd:YAG laser a great choice in preparing for fatigue test samples for crack growth life study.

  15. Abrasive jet micro-machining of planar areas and transitional slopes

    International Nuclear Information System (INIS)

    Analytical and computer models are presented to predict the evolution of planar areas and transitional slopes micromachined in glass using abrasive jet micro-machining. The energy distributions across a rectangular and a round nozzle were found to be non-uniform and therefore unsuitable to machine flat surfaces in a single pass. Consequently, a simple model was developed to guide the computer-controlled machining of an approximately flat surface, by the use of multiple passes arranged in such a manner that the summation of their energy distributions gave a uniform energy flux to the surface. Planar areas were machined in glass, and there was good agreement between the model predictions and experimentally measured surface profiles. Masked planar areas were also machined, and it was found that particle scattering by the mask edge (Ghobeity, Krajac, Burzynski, Papini and Spelt 2008 Wear 264 185–98) caused the sidewalls of the planar area to be very shallow, on the order of only a few degrees. A novel method is presented to increase the slope at the edges of such masked planar areas. Although the methods are demonstrated through the micro-machining of flat, planar areas, they are equally applicable to the production of inclined planar areas and arbitrarily curved surfaces

  16. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  17. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  18. A wafer mapping technique for residual stress in surface micromachined films

    Science.gov (United States)

    Schiavone, G.; Murray, J.; Smith, S.; Desmulliez, M. P. Y.; Mount, A. R.; Walton, A. J.

    2016-09-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements.

  19. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    DEFF Research Database (Denmark)

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated...

  20. 石英微机械陀螺的研究进展%Reaearch Development of Quartz Micromachined Gyroscopes

    Institute of Scientific and Technical Information of China (English)

    关冉; 张卫平; 陈文元; 张弓; 成宇翔

    2012-01-01

    首先介绍了石英微机械陀螺基于压电效应和科氏加速度的工作原理,回顾了石英微机械陀螺的发展历程,并且介绍了石英微机械陀螺的国内外发展现状.然后,针对石英微机械陀螺不同的结构进行了分类,并且对于不同结构的石英微机械陀螺的具体加工工艺、性能参数、应用领域等进行了综述.最后,对不同结构类型的石英微机械陀螺的尺寸、加工工艺,检测轴向,精度等参数进行了总结和对比,在此基础上分析了石英微机械陀螺的发展趋势,并指出了石英微机械陀螺研究中存在的问题,例如石英加工过程中产生的侧壁晶棱的不平整、石英侧壁电极的制作困难以及石英微机械陀螺多轴化应用的限制等.%Firstly, the working principle of the quartz micromachined gyroscope is introduced, which is based on the piezoelectric effect and the Coriolis acceleration, the development history of the quartz micromachined gyroscope is reviewed, and the development present situation of the quartz micromachined gyroscope is introduced both domestically and abroad. Then, the quartz micromachined gyroscope is classified into several types according to its different structures, and the specific fabrication process, performance parameter and application fields of the quartz micromachined gyroscope for the different structures are reviewed. Finally, the parameters of the quartz micromachined gyroscope for the different kinds of structures are summarized and compared, including the size, fabrication process, detection axis and accuracy, and on that basis, the development trends of the quartz micromachined gyroscope are analyzed, and the problems that limit the development of quartz micromachined gyroscope are pointed out, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the difficulties of electrode fabrication on the quartz sidewall and the limitation of the multi

  1. Micromachined Hardened Waveguides for High-Harmonic Generation

    Energy Technology Data Exchange (ETDEWEB)

    Backus, Sterling [KMLabs Inc., Boulder, CO (United States)

    2016-07-18

    The technique of High Harmonic Generation (HHG) is delivering rapid advances to the fields of EUV science, and is on the threshold of revolutionizing semiconductor imaging. Several major hurdles remain: (1) the power handling capability of the HHG process must be increased, in order to satisfy the EUV flux requirements, (2) the waveguiding structure for HHG must be made to have low loss for a mid-infrared drive laser, to satisfy the requirement to generate X-rays, (3) the waveguiding structure must be fabricated from a stable material with outstanding thermal properties such as sapphire, and (4) the cost and complexity of HHG systems must be lowered, in order to spawn widespread adoption in multiple industries for non-experts.

  2. Evaluation of the hearing protector in a real work situation using the field-microphone-in-real-ear method.

    Science.gov (United States)

    Rocha, Clayton Henrique; Longo, Isadora Altero; Moreira, Renata Rodrigues; Samelli, Alessandra Giannella

    2016-04-01

    Purpose To evaluate the effectiveness of the attenuation of a hearing protector (HP) in a real work situation using the field-microphone-in-real-ear method (f-MIRE). Methods Eighteen individuals of both genders (mean age of 47.17±8 years) participated in this study. In the workplace, the personal attenuation level of the HP was assessed using the f-MIRE method, followed by orientation about the importance of using the HP, cleaning and storing the device, and training for effective placement. Results The analyses showed a significant statistic attenuation for all of the collected data (total noise, by frequency band and dose) when the noise levels in the lapel microphone and the probe microphone were compared. In the comparison of the attenuation values provided by the manufacturer and those found in this study, we observed higher values for the manufacturer in all frequency bands. No difference was observed for the noise levels in the different activities and times evaluated. Conclusion The findings of this study enabled us to know the personal level of attenuation of the HP during a real work situation, which was within the limits of tolerance. It was also possible to collect information about the environmental noise to which these workers are exposed. We noticed situations where this level exceeded the safety values, and therefore it is recommended the use of the HP. It is important that more studies are conducted using the f-MIRE method, because it may be an ally to assess the effectiveness of the HP attenuation in the workplace. PMID:27191871

  3. WALL PRESSURE FLUCTUATIONS OF TURBULENT FLOW OVER BACKWARD-FACING STEP WITH AND WITHOUT ENTRAINMENT: MICROPHONE ARRAY MEASUREMENT

    Institute of Scientific and Technical Information of China (English)

    KE Feng; LIU Ying-zheng; WANG Wei-zhe; CHEN Han-ping

    2006-01-01

    Wall pressure fluctuations in turbulent boundary layer flow over backward-facing step with and without entrainment were investigated. Digital array pressure sensors and multi-arrayed microphones were employed to acquire the time-averaged static pressure and fluctuating pressure, respectively. The differences of two flows were scrutinized in terms of static pressure characteristics, pressure fluctuations, cross-correlation and coherence of wall pressure. Introduction of the entrainment increased scale of large-scale vortical structure and reduced its convection velocity. However, shedding frequency of large-scale vortical structures was found to be the same for both flows.

  4. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  5. Picosecond and nanosecond pulse delivery through a hollow-core Negative Curvature Fiber for micro-machining applications.

    Science.gov (United States)

    Jaworski, Piotr; Yu, Fei; Maier, Robert R J; Wadsworth, William J; Knight, Jonathan C; Shephard, Jonathan D; Hand, Duncan P

    2013-09-23

    We present high average power picosecond and nanosecond pulse delivery at 1030 nm and 1064 nm wavelengths respectively through a novel hollow-core Negative Curvature Fiber (NCF) for high-precision micro-machining applications. Picosecond pulses with an average power above 36 W and energies of 92 µJ, corresponding to a peak power density of 1.5 TWcm⁻² have been transmitted through the fiber without introducing any damage to the input and output fiber end-faces. High-energy nanosecond pulses (>1 mJ), which are ideal for micro-machining have been successfully delivered through the NCF with a coupling efficiency of 92%. Picosecond and nanosecond pulse delivery have been demonstrated in fiber-based laser micro-machining of fused silica, aluminum and titanium.

  6. The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

    Science.gov (United States)

    Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

    2007-02-01

    The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

  7. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    International Nuclear Information System (INIS)

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

  8. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    Science.gov (United States)

    Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B.

    2015-11-01

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography.

  9. Mask synthesis and verification based on geometric model for surface micro-machined MEMS

    Institute of Scientific and Technical Information of China (English)

    LI Jian-hua; LIU Yu-sheng; GAO Shu-ming

    2005-01-01

    Traditional MEMS (microelectromechanical system) design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps: the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test results are given.

  10. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

    CERN Document Server

    Seguineau, C; Malhaire, C; Brida, S; Lafontan, X; Desmarres, J -M; Josserond, C; Debove, L

    2008-01-01

    This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.

  11. Micromachined PIN-PMN-PT Crystal Composite Transducer for High-Frequency Intravascular Ultrasound (IVUS) Imaging

    OpenAIRE

    Li, Xiang; Ma, Teng; Tian, Jian; Han, Pengdi; Zhou, Qifa; Shung, K. Kirk

    2014-01-01

    In this paper, we report the use of micromachined PbIn1/2Nb1/2O3–PbMg1/3Nb2/3O3–PbTiO3 (PIN-PMN-PT) single crystal 1–3 composite material for intravascular ultrasound (IVUS) imaging application. The effective electromechanical coupling coefficient kt(eff) of the composite was measured to be 0.75 to 0.78. Acoustic impedance was estimated to be 20 MRayl. Based on the composite, needle-type and flexible-type IVUS transducers were fabricated. The composite transducer achieved an 86% bandwidth at ...

  12. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  13. STUDY ON FLAP SIDE-EDGE NOISE BASED ON THE FLY-OVER MEASUREMENTS WITH A PLANAR MICROPHONE ARRAY

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    A large planar microphone array, which consists of 111 microphones, was successfully applied to measure a two-dimensional mapping of the sound sources on landing aircraft. The focus was on the flap side-edge noise source in this paper. The spectra, directivity and sound pressure level of flap side-edge noise of 10 aircraft were presented in this paper. It is found that the spectrum of flap side-edge noise is a broadband noise with some tones in some cases. Two different types of tone sources are found. It is proposed that one type of these tone sources is trailing edge semi-baffled dipole source, and another is produced from the shedding of vortex from the wing cusp. The total sound pressure level of flap side-edge broadband noise has no obvious directionality. However, the directivity of the tone noise in the flap side-edge noise spectrum is obvious. It is demonstrated that the local flow field is the key to controlling the flap side-edge noise.

  14. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  15. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    Directory of Open Access Journals (Sweden)

    Debkalpa Goswami

    2014-01-01

    Full Text Available Electrochemical micromachining (EMM appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applications. Therefore, the optimal use of an EMM process for achieving enhanced machining rate and improved profile accuracy demands selection of its various machining parameters. Various optimization tools, primarily Derringer’s desirability function approach have been employed by the past researchers for deriving the best parametric settings of EMM processes, which inherently lead to sub-optimal or near optimal solutions. In this paper, an attempt is made to apply an almost new optimization tool, i.e. differential search algorithm (DSA for parametric optimization of three EMM processes. A comparative study of optimization performance between DSA, genetic algorithm and desirability function approach proves the wide acceptability of DSA as a global optimization tool.

  16. Development of an electrochemical micromachining instrument for the confined etching techniques

    Science.gov (United States)

    Zhou, Hang; Lai, Lei-Jie; Zhao, Xiang-Hui; Zhu, Li-Min

    2014-04-01

    This study proposes an electrochemical micromachining instrument for two confined etching techniques, namely, confined etchant layer technique (CELT) and electrochemical wet stamping (E-WETS). The proposed instrument consists of a granite bridge base, a Z-axis coarse/fine dual stage, and a force sensor. The Z-axis coarse/fine dual stage controls the vertical movement of the substrate with nanometer accuracy. The force sensor measures the contact force between the mold and the substrate. A contact detection method based on a digital lock-in amplifier is developed to make the mold-substrate contact within a five-nanometer range in CELT, and a force feedback controller is implemented to keep the contact force in E-WETS at a constant value with a noise of less than 0.2 mN. With the use of the confined etching techniques, a microlens array and a curvilinear ridge microstructure are successfully fabricated with high accuracy, thus demonstrating the promising performance of the proposed micromachining instrument.

  17. Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

    Science.gov (United States)

    Yoon, Sung-Soo; Lee, Yeong Bahl; Khang, Dahl-Young

    2016-05-01

    Wet bulk micromachining of Si by metal-assisted chemical etching (MaCE) has successfully been demonstrated. Based on the mechanism of defective etching results from Ag and Au metal catalyst experiments, the wettability of etchant solution, in addition to metal type, has been found to have profound effect on the etching process. Addition of low surface tension co-solvent, ethanol in this work, into conventional etchant formulation has enabled complete wetting of etchant on surface, which prevents hydrogen bubble attachment on sample surface during the etching. The complete elimination of bubble attachment guarantees very uniform etch rate on all over the sample surface, and thus prevents premature fragmentation/rupture of catalyst metal layer. Under the optimized etching conditions, the MaCE could be done for up to 12 h without any noticeable film rupture and thus etching defects. Thanks to very smooth surface of the etched patterns, conformal contact and direct bonding of elastomer on such surface has been easily accomplished. The method demonstrated here can pave the way for application of simple, low-cost MaCE process in the bulk micromachining of Si for various applications.

  18. A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

    Directory of Open Access Journals (Sweden)

    Leila Ladani

    2010-12-01

    Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

  19. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    International Nuclear Information System (INIS)

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO3, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well

  20. Development of an electrochemical micromachining instrument for the confined etching techniques.

    Science.gov (United States)

    Zhou, Hang; Lai, Lei-Jie; Zhao, Xiang-Hui; Zhu, Li-Min

    2014-04-01

    This study proposes an electrochemical micromachining instrument for two confined etching techniques, namely, confined etchant layer technique (CELT) and electrochemical wet stamping (E-WETS). The proposed instrument consists of a granite bridge base, a Z-axis coarse/fine dual stage, and a force sensor. The Z-axis coarse/fine dual stage controls the vertical movement of the substrate with nanometer accuracy. The force sensor measures the contact force between the mold and the substrate. A contact detection method based on a digital lock-in amplifier is developed to make the mold-substrate contact within a five-nanometer range in CELT, and a force feedback controller is implemented to keep the contact force in E-WETS at a constant value with a noise of less than 0.2 mN. With the use of the confined etching techniques, a microlens array and a curvilinear ridge microstructure are successfully fabricated with high accuracy, thus demonstrating the promising performance of the proposed micromachining instrument.

  1. Graphene-enhanced environmentally-benign cutting fluids for high-performance micro-machining applications.

    Science.gov (United States)

    Chu, Bryan; Singh, Eklavya; Koratkar, Nikhil; Samuel, Johnson

    2013-08-01

    A canola-based cutting oil enhanced with graphene platelet (GPL) additives has been developed to fulfill the need for environmentally benign cutting oils for high performance micro-machining applications. Carboxyl-functionalized graphene platelets are used to enable stable GPL dispersion in the polar oil. Three oil formulations consisting of 0.05%, 0.10% and 0.15% GPL by weight are tested. The GPL-laden canola oil is first characterized based on its kinematic viscosity, thermal conductivity and coefficient of friction. Micro-turning tests are then performed to study the effect of GPL loading on the cutting temperature, cutting force, and the surface finish of the part. All tested loadings improve the cooling and lubricating properties of the canola oil. For cooling, this improvement is seen to increase with GPL loading. In the case of lubrication, there appears to be an optimal loading of around 0.10%. The presence of GPL also leads to a decrease in the surface roughness of the micro-machined surface but this improvement drops with increased GPL loading.

  2. Repetitive Operation of A Dense Plasma Soft X-ray Source for Micromachining

    Science.gov (United States)

    Wong, D.; Tan, T. L.; Patran, A.; Hassan, S. M.; Zhang, T.; Springham, S. V.; Lee, S.; Rawat, R. S.; Lee, P.

    2006-01-01

    The NX2 device, a low energy plasma focus, at the Nanyang Technological University in Singapore, was used as a soft X-ray (SXR) source for micromachining. The gas used was neon which produced SXRs in a narrow spectral range of 0.9 - 1.6 keV. The SXR yield from repetitive operation of the NX2 device was monitored and measured using a cost effective multi-channel SXR spectrometric system. The system consists of filtered BPX65 PIN diodes, with the associated electronics — an integrator, sample and peak holder, analogue switch, an A/D converter and a microcontroller. The system enables easy shot-to-shot statistical analysis under repetitive operation at adjustable preset trigger frequencies. A total of 4000 shots were fired at 0.5 Hz, using the same gas filling. The SXR production was at an average yield of 60 J/shot and a maximum single-shot yield of more than 100 J. The SXRs emitted by the NX2 device was used for contact micromachining, producing structures with an excellent aspect ratio of up to 20:1 on 25 μm SU-8 resist.

  3. An Air-Coupled Multiple Moving Membrane Micromachined Ultrasonic Transducer With Inverse Biasing Functionality.

    Science.gov (United States)

    Emadi, Arezoo; Buchanan, Douglas A

    2016-08-01

    A novel air-coupled multiple moving membrane-capacitive micromachined ultrasonic transducer ( [Formula: see text]-CMUT) with individually biased deflectable plates has been developed. Unlike the conventional capacitive micromachined ultrasonic transducer, this device cell structure includes an additional deflectable plate that is suspended underneath the transducer top plate. This added flexible plate contributes to the device signal transmission and reception. It is demonstrated that due to the presence of this added moving plate, the transducer is capable of operating under inverse bias condition, where the driving voltage is sandwiched between two grounded electrodes. COMSOL electromechanical simulations were conducted to investigate the influence of the transducer additional moving plate. A set of three individuals and an array of [Formula: see text]-CMUT transducers were fabricated using a sacrificial technique and with resonant frequencies ranging from 0.8 to 2.1 MHz. Electrical, optical, and pitch-catch acoustic measurements were performed to characterize the transducers properties under inverse bias condition. The experimental results are shown to be in good agreement with the simulation results for all of the fabricated transducers. It is shown that these transducers are fully functional under both normal and inverse bias conditions without any degradation in the transducer performance. PMID:27254861

  4. Novel Micromachined Coplanar Waveguide Transmission Lines for Application in Millimeter-Wave Circuits

    Science.gov (United States)

    Park, Jae-Hyoung; Baek, Chang-Wook; Jung, Sanghwa; Kim, Hong-Teuk; Kwon, Youngwoo; Kim, Yong-Kweon

    2000-12-01

    In this paper, novel micromachined coplanar waveguide(CPW) transmission lines for application in millimeter-wave circuits are proposed. Two types of transmission lines with the length of 1 cm are fabricated and the measured characteristics are compared with those of the conventional CPW transmission line. One is the elevated CPW(ECPW) transmission line and the other is the overlay CPW(OCPW) line. These transmission lines are composed of 3-μm-thick electroplated gold lines with overhanging parts. By elevating the metal lines from the substrate using micromachining technology, the conductor and substrate dielectric loss can be reduced and easily integrated with conventional monolithic microwave integrated circuits. Compared with the conventional CPW line showing 2.65 dB/cm insertion loss at 50 GHz, the loss can be reduced to 1.9 dB/cm and 1.25 dB/cm at 50 GHz in the case of the ECPW and OCPW transmission lines, respectively. Also, the OCPW transmission line shows that the insertion loss does not vary with the change of the characteristic impedance. As shown in the measured and simulated results, the insertion loss is maintained below 1.4 dB/cm over wide impedance ranges.

  5. Picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications

    Energy Technology Data Exchange (ETDEWEB)

    Muhammad, N.; Whitehead, D.; Li, L. [University of Manchester, Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering, Manchester (United Kingdom); Boor, A.; Oppenlander, W. [Swiss Tec AG, Schaan, Principality of Liechtenstein (Liechtenstein); Liu, Z. [University of Manchester, Corrosion and Protection Centre, School of Materials, Manchester (United Kingdom)

    2012-03-15

    The demand for micromachining of coronary stents by means of industrial lasers rises quickly for treating coronary artery diseases, which cause more than one million deaths each year. The most widely used types of laser for stent manufacturing are Nd:YAG laser systems with a wavelength of 1064 nm with pulse lengths of 10{sup -3}-10{sup -2} seconds. Considerable post-processing is required to remove heat-affected zones (HAZ), and to improve surface finishes and geometry. Using a third harmonic laser radiation of picosecond laser (6 x 10{sup -12} s pulse duration) in UV range, the capability of the picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications are presented. In this study dross-free cut of nitinol and platinum-iridium alloy tubes are demonstrated and topography analysis of the cut surface is carried out. The HAZ characteristics have been investigated by means of microscopic examinations and measurement of micro-hardness distribution near the cut zones. (orig.)

  6. Micromachining of microchannel on the polycarbonate substrate with CO 2 laser direct-writing ablation

    Science.gov (United States)

    Qi, Heng; Chen, Tao; Yao, Liying; Zuo, Tiechuan

    2009-05-01

    Low-power CO 2 laser direct-writing ablation was used to micromachine a microchannel on the polycarbonate substrate in this work. The influence of the process parameters (the laser power, the moving velocity of the laser beam and the scanning times) on the micromachining quality (the depth, the width and their aspect ratio) of the microchannel was experimentally studied. The depth and width of microchannel both increase with the increase of the laser power and the decrease of the moving velocity of the laser beam. When higher laser power and slower moving velocity were used, the polycarbonate surface bore more heat irradiated from the CO 2 laser for longer time which results in the formation of deeper and wider molten pool, hence the ability to fabricate bigger microchannel. Because of the effect of the laser power on the depth and width of microchannels, higher aspect (depth/width) ratio could be achieved using slower moving velocity and higher laser power, and it would reach a steady state when the laser power increases to 9.0 W possibly caused by the effect of laser power on the different directions of microchannel. The polycarbonate-polycarbonate chip was bonded with hot-press bonding technique.

  7. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  8. Micromachined low-mass RF front-end for beam steering radar

    Science.gov (United States)

    Vahidpour, M.; Moallem, M.; East, J.; Sarabandi, K.

    2012-06-01

    Sensors for autonomous small robotic platforms must be low mass, compact size and low power due to the limited space. For such applications, as the dimensions of the structures shrink, standard machining methods are not suitable because of low fabrication tolerances and high cost in assembly. Commonly, the structures show a high degree of fabrication complexity due to error in alignment, air gaps between conductive parts, poor metal contact, inaccuracy in patterning because of non-contact lithography, complex assemblies of various parts, and high number of steps needed for construction. However, micromachining offers high fabrication precision, provides easy fabrication and integration with active devices and hence is suitable for manufacturing high MMW and submillimeter-wave frequency structures. A radar design compatible with micromachining process is developed to fabricate a Y-band high resolution radar structure with a slot-fed patch array antenna. A multi-step silicon DRIE process is developed for the fabrication of the waveguide structure while the slots are suspended on a thin oxide/nitride/oxide membrane to form the top cover of the waveguide trenches and the patch elements are suspended on a thin Parylene membrane. Gold thermocompression bonding and Parylene bonding are used to assemble different parts of the antenna. These processes result in a compact (4.5 cm × 3.5 cm × 1.5 mm) and light-weight (5 g) radar.

  9. Micromachined strain gauges for the determination of liquid flow friction coefficients in microchannels

    Science.gov (United States)

    Baviere, R.; Ayela, F.

    2004-02-01

    In this research program, we have performed and tested cupro-nickel (Cu-Ni) strain gauges micromachined on different sorts of silicon nitride (Si3N4) membranes. The design of the gauges obeys an electrical Wheatstone bridge configuration. We have found a good agreement between the expected electromechanical response of the bridge and the experimental signals. The results have displayed sensitivity to static pressure ranging from 50 to 100 µV V-1 bar-1 as a function of the thickness and of the diameter of the membranes. This is part of a study devoted to determining liquid flow friction coefficients in silicon-Pyrex microchannels. Preliminary attempts (Reynolds number up to 300) made using global pressure measurements and with very simple local pressure probes are discussed. Further experiments using Cu-Ni strain gauges are described. Their micromachining, characterization and integration along silicon microchannels are presented. These sensors permitted us to perform the first local and reliable pressure drop measurements in a 7.5 µm deep microchannel. The results are in good agreement with the classical laminar theory for a Reynolds number ranging from 0.2 to 3.

  10. Construction and Operation of a 165K Microcooler with a Sorption Compressor and a Micromachined Cold Stage

    NARCIS (Netherlands)

    Burger, J.F.; Holland, H.J.; Brake, ter H.J.M.; Elwenspoek, M.C.; Rogalla, H.; Ross, R.G. jr

    2003-01-01

    This paper presents the integration and testing of a 165 K microcooler that operates with a sorption compressor and a micromachined cold stage. Attractive features of this combination are the lack of vibration and a long lifetime for a potentially very small cryocooler. The developed cold stage work

  11. Analysis of Adaptive Feedback and Echo Cancelation Algorithms in A General Multiple-Microphone and Single-Loudspeaker System

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt;

    2011-01-01

    In this paper, we analyze a general multiple-microphone and single-loudspeaker system, where an adaptive algorithm is used to cancel acoustic feedback/echo and a beamformer processes the feedback/echo canceled signals. This system can be viewed as part of a typical hearing aid system and....../or a traditional acoustic echo cancelation system. We introduce and derive an approximation of a useful frequency domain measure - the power transfer function - and show how to predict the system stability bound, convergence rate and the steady-state behavior across time and frequency. Furthermore, we show how...... the derived expressions can be used to determine e.g. the step size parameter in the adaptive algorithms to achieve a desired system property e.g. convergence rate at a specific frequency....

  12. High frequency microphone measurements for transition detection on airfoils. Risø B1-18 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given...... to transition detection. It is argued that the transition point can be detected by observing the increase in the mean of the Fourier spectre and that thismethod is very stable froma numerical point of view. Other important issues are also discussed, e.g. the variation of pressure standard deviations (sound...... pressure) and Tollmien-Schlichting frequencies. The tests were made at Reynolds and Mach numbers corresponding to the operating conditions of a typical horizontal axis wind turbine (HAWT). The Risø B1-18, Risø C2-18 and NACA0015 profiles were tested and the measured transition points are reported....

  13. High frequency microphone measurements for transition detection on airfoils. Risø C2-18 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given...... to transition detection. It is argued that the transition point can be detected by observing the increase in the mean of the Fourier spectre and that thismethod is very stable froma numerical point of view. Other important issues are also discussed, e.g. the variation of pressure standard deviations (sound...... pressure) and Tollmien-Schlichting frequencies. The tests were made at Reynolds and Mach numbers corresponding to the operating conditions of a typical horizontal axis wind turbine (HAWT). The Risø B1-18, Risø C2-18 and NACA0015 profiles were tested and the measured transition points are reported....

  14. Development and Calibration of a Field-Deployable Microphone Phased Array for Propulsion and Airframe Noise Flyover Measurements

    Science.gov (United States)

    Humphreys, William M., Jr.; Lockard, David P.; Khorrami, Mehdi R.; Culliton, William G.; McSwain, Robert G.; Ravetta, Patricio A.; Johns, Zachary

    2016-01-01

    A new aeroacoustic measurement capability has been developed consisting of a large channelcount, field-deployable microphone phased array suitable for airframe noise flyover measurements for a range of aircraft types and scales. The array incorporates up to 185 hardened, weather-resistant sensors suitable for outdoor use. A custom 4-mA current loop receiver circuit with temperature compensation was developed to power the sensors over extended cable lengths with minimal degradation of the signal to noise ratio and frequency response. Extensive laboratory calibrations and environmental testing of the sensors were conducted to verify the design's performance specifications. A compact data system combining sensor power, signal conditioning, and digitization was assembled for use with the array. Complementing the data system is a robust analysis system capable of near real-time presentation of beamformed and deconvolved contour plots and integrated spectra obtained from array data acquired during flyover passes. Additional instrumentation systems needed to process the array data were also assembled. These include a commercial weather station and a video monitoring / recording system. A detailed mock-up of the instrumentation suite (phased array, weather station, and data processor) was performed in the NASA Langley Acoustic Development Laboratory to vet the system performance. The first deployment of the system occurred at Finnegan Airfield at Fort A.P. Hill where the array was utilized to measure the vehicle noise from a number of sUAS (small Unmanned Aerial System) aircraft. A unique in-situ calibration method for the array microphones using a hovering aerial sound source was attempted for the first time during the deployment.

  15. Multifrequency excitation method for rapid and accurate dynamic test of micromachined gyroscope chips.

    Science.gov (United States)

    Deng, Yan; Zhou, Bin; Xing, Chao; Zhang, Rong

    2014-10-17

    A novel multifrequency excitation (MFE) method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE) method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

  16. IBIC characterization of an ion-beam-micromachined multi-electrode diamond detector

    CERN Document Server

    Forneris, J; Jaksic, M; Giudice, A Lo; Olivero, P; Picollo, F; Skukan, N; Verona, C; Verona-Rinati, G; Vittone, E

    2016-01-01

    Deep Ion Beam Lithography (DIBL) has been used for the direct writing of buried graphitic regions in monocrystalline diamond with micrometric resolution. Aiming at the development and the characterization of a fully ion-beam-micromachined solid state ionization chamber, a device with interdigitated electrodes was fabricated by using a 1.8 MeV He+ ion microbeam scanning on a homoepitaxial, grown by chemical vapour deposition (CVD). In order to evaluate the ionizing-radiation-detection performance of the device, charge collection efficiency (CCE) maps were extracted from Ion Beam Induced Charge (IBIC) measurements carried out by probing different arrangements of buried microelectrodes. The analysis of the CCE maps allowed for an exhaustive evaluation of the detector features, in particular the individuation of the different role played by electrons and holes in the formation of the induced charge pulses. Finally, a comparison of the performances of the detector with buried graphitic electrodes with those releva...

  17. Aviation-oriented Micromachining Technology-Micro-ECM in Pure Water

    Institute of Scientific and Technical Information of China (English)

    Bao Huaiqian; Xu Jiawen; Li Ying

    2008-01-01

    This article proposes a precise and ecofriendly micromachining technology for aerospace application called electrochemical machining in pure water (PW-ECM). On the basis of the principles of water dissociation, a series of test setups and tests are devised and performed under different conditions. These tests explain the need for technological conditions realizing PW-ECM, and further explore the technological principles. The results from the tests demonstrate a successful removal of electrolytic slime by means of ultrasonic vibration of the workpiece. To ensure the stability and reliability of PW-ECM process, a new combined rnachining method of PW-ECM assisted with ultrasonic vibration (PW-ECM/USV) is devised. Trilateral and square cavities and holes as well as a group of English alphabets are worked out on a stainless steel plate. It is eonfirmed that PW-ECM will be probably an efficient new aviation precision machining method.

  18. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Institute of Scientific and Technical Information of China (English)

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  19. Ferrofluid-based optofluidic switch using femtosecond laser-micromachined waveguides.

    Science.gov (United States)

    Gu, Yu; Bragheri, Francesca; Valentino, Gianna; Morris, Karl; Bellini, Nicola; Osellame, Roberto

    2015-02-20

    We present a portable optofluidic switch using a ferrofluid plug in a commercially produced microfluidic chip with waveguides added via femtosecond laser micromachining (FLM). FLM enabled the one-step fabrication of highly reproducible, perfectly aligned integrated waveguides orthogonally crossing an existing microfluidic channel. In the "ON" state for each output, the ferrofluid plug is outside the intersection and input light arrives at the output with relatively small loss. In the "OFF" state, the plug is inside the intersection and the input light is absorbed. The same plug is used to turn ON and OFF several parallel waveguides with contrast ratios of 22 dB or better. In addition, the plug is driven periodically using an electromagnet combined with a permanent magnet for frequency-dependent characterization. Photodiode data show high contrast up to 50 Hz and linear frequency response up to 1 KHz. PMID:25968208

  20. Micro-Machined High-Frequency (80 MHz) PZT Thick Film Linear Arrays

    Science.gov (United States)

    Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K. Kirk

    2010-01-01

    This paper presents the development of a micro-machined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT solgel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (−6 dB) of 60%. An insertion loss of −41 dB and adjacent element crosstalk of −21 dB were found at the center frequency. PMID:20889407

  1. A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications.

    Science.gov (United States)

    Joseph, Jose; Singh, Shiv Govind; Vanjari, Siva Rama Krishna

    2014-01-01

    In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs. We also propose a simple state-of-the-art fabrication methodology for the same. As compared to the standard Silicon Nitride CMUTs, the proposed structure gives the same electromechanical coupling coefficient with lower membrane dimensions and low pull-in voltage which in turn results in reduced area and power consumption. Moreover the proposed fabrication methodology is a low temperature process which makes it CMOS compatible. PMID:25570229

  2. Multianalyte Biosensor for Simultaneous Determination of Glucose and Galactose Based on Micromachined Chamber-type Electrodes

    Institute of Scientific and Technical Information of China (English)

    JlA Neng-Qin贾能勤; ZHANG Zong-Rang章宗穰; ZHU Jiang-Zhong朱建中; ZHANG Guo-Xiong张国雄

    2004-01-01

    An amperometric multianalyte biosensor for the simultaneous determination of glucose and galactose was developed based on chamber-type electrodes, which were fabricated by micromachining technology. The dual chamber-type enzyme electrode with glucose and galactose sensor elements was integrated onto one microchip. The experimental parameters of this biosensor were optimized. The biosensor exhibited a linearity of up to 4.0 mol/L for glucose and 4.5 mol/L for galactose, and the response time was about 30 s for glucose and 40 s for galactose. No cross-talking behavior was investigated in the course of simultaneous measurement of the two analytes. Interference from electroactive species, such as ascorbic acid and uric acid, was minimized due to the permselectivity of Nation film. In addition, the biosensor displayed a storage stability of longer than one month.

  3. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition.

    Science.gov (United States)

    Li, Xiaomeng; Wu, Xiaoqing; Shi, Peng; Ye, Zuo-Guang

    2016-01-12

    In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

  4. Design and simulation of a tuning fork micromachined gyroscope with slide film damping

    Institute of Scientific and Technical Information of China (English)

    CHE Lu-feng; XIONG Bin; JIAO Ji-wei; WANG Yue-lin

    2005-01-01

    A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

  5. Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

    Science.gov (United States)

    Barauskas, Dovydas; Pelenis, Donatas; Virzonis, Darius; Baltrus, John P; Baltrusaitis, Jonas

    2016-07-01

    We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas. PMID:27321769

  6. Laser micromachining of CNT/Fe/Al2O3 nanocomposites

    Institute of Scientific and Technical Information of China (English)

    Kwang-Ryul KIM; Byoung-Deog CHOI; Jun-Sin YI; Sung-Hak CHO; Yong-Ho CHOA; Dong-Soo SHIN; Dong-Ho BAE; Myung-Chang KANG; Young-Keun JEONG

    2009-01-01

    CNT/Fe/Al2O3 mixed powders were synthesized from Fe/Al2O3 nanopowders using thermal CVD for the homogeneous dispersion of carbon nanotubes CNTs. CNTs consisted of MWNT, and the diameter was approximately 20-30 nm. After sintering, CNTs were homogenously located throughout Al2O3 grain boundary and were buckled. A femto-second laser installed with special optical systems was used for micromachining of the nanocomposites. The relationship between material ablation rate and energy fluence was theoretically investigated and compared with experimental results from cross-sectional SEM analysis. The nanocomposites which have higher content of CNT show a fairly good machining result due to its higher thermal conductivity and smaller grain size as well as lower light transmittance.

  7. High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures

    International Nuclear Information System (INIS)

    On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application

  8. Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers

    Institute of Scientific and Technical Information of China (English)

    GE; LiFeng

    2007-01-01

    A theoretical model and mathematical description for silicon micromachined electrostatic or capacitive ultrasonic imaging transducers have been developed. According to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the geometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, corresponding to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respectively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal design.

  9. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Institute of Scientific and Technical Information of China (English)

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  10. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  11. Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

    KAUST Repository

    Sallam, Mai

    2015-06-01

    This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

  12. Spatial Qualification Tests for Highly Selective Compact Micromachined Band Pass Planar Filters

    Directory of Open Access Journals (Sweden)

    Raghida Hajj

    2012-01-01

    Full Text Available A highly selective planar band pass filter is proposed for satellite receivers to suppress intermodulation components. The 4-pole filter has a center frequency of 19.825 GHz with a bandwidth of 240 MHz. The measured quality factor is over 600 and the insertion losses are 4.1 dB. The micromachining technological process is used to fabricate this filter. A BCB (benzocyclobutene thin layer is used as an electrical and mechanical support for the filter. The compatibility of the BCB with the spatial constraints was tested. Various tests were accomplished for this purpose and the results of all these tests are presented in the paper. The tests showed a very small influence of the temperature variation and high temperature storage test and practically no influence of the radiation test on the circuit.

  13. Numerical Analysis of Silicon Micromachined Gas Pendulum Tilt Sense Organ Temperature Field

    Institute of Scientific and Technical Information of China (English)

    Linhua Piao; Bin Zhang; Yaojie Lv; Fuxue Zhang

    2006-01-01

    An analysis of the sensitive mechanism of silicon micromachined gas pendulum tilt sense organ is made. Adopting the method of FEA (finite element analysis), the temperature field at two points heat source, when the two-dimensional enclosure was inclined, was obtained by application of the program ANSYS-FLOTRAN CFD and a series of procedures, such as modeling, meshing, loading and equation solving. The numerical results show that in the level state, the temperatures at two points heat source are two points in the same isotherm; however, the temperatures are not the same when the enclosure is inclined. The difference of the temperatures will increase with the augment of the tilt angle, and contrarily it will decrease. That is the characteristic used to sense the transformation of obliquity.

  14. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    Directory of Open Access Journals (Sweden)

    Yan Deng

    2014-10-01

    Full Text Available A novel multifrequency excitation (MFE method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

  15. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong

    2013-11-04

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

  16. Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining

    Institute of Scientific and Technical Information of China (English)

    Yi Liang; Ou Yi; Shi Sha-Li; Ma Jin; Chen Da-Peng; Ye Tian-Chun

    2008-01-01

    This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μmx100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass (Corning 7740). This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.

  17. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  18. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  19. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    International Nuclear Information System (INIS)

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  20. Corporate array of micromachined dipoles on silicon wafer for 60 GHz communication systems

    KAUST Repository

    Sallam, M. O.

    2013-03-01

    In this paper, an antenna array operating at 60 GHz and realized on 0.675 mm thick silicon substrate is presented. The array is constructed using four micromachined half-wavelength dipoles fed by a corporate feeding network. Isolation between the antenna array and its feeding network is achieved via a ground plane. This arrangement leads to maximizing the broadside radiation with relatively high front-to-back ratio. Simulations have been carried out using both HFSS and CST, which showed very good agreement. Results reveal that the proposed antenna array has good radiation characteristics, where the directivity, gain, and radiation efficiency are around 10.5 dBi, 9.5 dBi, and 79%, respectively. © 2013 IEEE.

  1. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    International Nuclear Information System (INIS)

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s−1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa−1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  2. Micromachined lab-on-a-tube sensors for simultaneous brain temperature and cerebral blood flow measurements.

    Science.gov (United States)

    Li, Chunyan; Wu, Pei-Ming; Hartings, Jed A; Wu, Zhizhen; Cheyuo, Cletus; Wang, Ping; LeDoux, David; Shutter, Lori A; Ramaswamy, Bharat Ram; Ahn, Chong H; Narayan, Raj K

    2012-08-01

    This work describes the development of a micromachined lab-on-a-tube device for simultaneous measurement of brain temperature and regional cerebral blood flow. The device consists of two micromachined gold resistance temperature detectors with a 4-wire configuration. One is used as a temperature sensor and the other as a flow sensor. The temperature sensor operates with AC excitation current of 500 μA and updates its outputs at a rate of 5 Hz. The flow sensor employs a periodic heating and cooling technique under constant-temperature mode and updates its outputs at a rate of 0.1 Hz. The temperature sensor is also used to compensate for temperature changes during the heating period of the flow sensor to improve the accuracy of flow measurements. To prevent thermal and electronic crosstalk between the sensors, the temperature sensor is located outside the "thermal influence" region of the flow sensor and the sensors are separated into two different layers with a thin-film Copper shield. We evaluated the sensors for accuracy, crosstalk and long-term drift in human blood-stained cerebrospinal fluid. These in vitro experiments showed that simultaneous temperature and flow measurements with a single lab-on-a-tube device are accurate and reliable over the course of 5 days. It has a resolution of 0.013 °C and 0.18 ml/100 g/min; and achieves an accuracy of 0.1 °C and 5 ml/100 g/min for temperature and flow sensors respectively. The prototype device and techniques developed here establish a foundation for a multi-sensor lab-on-a-tube, enabling versatile multimodality monitoring applications.

  3. Industrial grade fiber-coupled laser systems delivering ultrashort high-power pulses for micromachining

    Science.gov (United States)

    Pricking, Sebastian; Welp, Petra; Overbuschmann, Johannes; Nutsch, Sebastian; Gebs, Raphael; Fleischhaker, Robert; Kleinbauer, Jochen; Wolf, Martin; Budnicki, Aleksander; Sutter, Dirk H.; Killi, Alexander; Mielke, Michael

    2016-03-01

    We report on an industrial fiber-delivered laser system producing ultra-short pulses in the range of a few picoseconds down to a few hundred femtoseconds with high average power suitable for high-precision micromachining. The delivery fiber is a hollow-core photonic crystal fiber with a Kagomé shaped lattice and a hypocycloid core wall enabling the guiding of laser radiation over several meters with exceptionally low losses and preservation of high beam quality (M2laser head providing a compact footprint without the need for external boxes. The laser head is carefully designed regarding its thermo-mechanical properties to allow a highly reliable coupling stability. The exchangeable delivery fiber is packaged using Trumpf's well established LLK-D connectors which offer a very high mechanical precision, the possibility to add water cooling, as well as full featured safety functions. The fiber is hermetically sealed and protected by a robust but flexible shield providing bend protection and break detection. We show the linear and nonlinear optical properties of the transported laser radiation and discuss its feasibility for pulse compression. Measurements are supported by simulation of pulse propagation by solving the nonlinear Schrödinger equation implementing the split-step Fourier method. In addition, mode properties are measured and confirmed by finite element method simulations. The presented industrial laser system offers the known advantages of ultra-short pulses combined with the flexibility of fiber delivery yielding a versatile tool perfectly suitable for all kinds of industrial micromachining applications.

  4. System integration design in MEMS – A case study of micromachined load cell

    Indian Academy of Sciences (India)

    Shishir Kumar; K P Venkatesh; S Sam Baskar; S P Madhavi

    2009-08-01

    One of the critical issues in large scale commercial exploitation of MEMS technology is its system integration. In MEMS, a system design approach requires integration of varied and disparate subsystems with one of a kind interface. The physical scales as well as the magnitude of signals of various subsystems vary widely. Known and proven integration techniques often lead to considerable loss in advantages the tiny MEMS sensors have to offer. Therefore, it becomes imperative to think of the entire system at the outset, at least in terms of the concept design. Such design entails various aspects of the system ranging from selection of material, transduction mechanism, structural configuration, interface electronics, and packaging. One way of handling this problem is the system-in-package approach that uses optimized technology for each function using the concurrent hybrid engineering approach. The main strength of this design approach is the fast time to prototype development. In the present work, we pursue this approach for a MEMS load cell to complete the process of system integration for high capacity load sensing. The system includes; a micromachined sensing gauge, interface electronics and a packaging module representing a system-in-package ready for end characterization. The various subsystems are presented in a modular stacked form using hybrid technologies. The micromachined sensing subsystem works on principles of piezo-resistive sensing and is fabricated using CMOS compatible processes. The structural configuration of the sensing layer is designed to reduce the offset, temperature drift, and residual stress effects of the piezo-resistive sensor. ANSYS simulations are carried out to study the effect of substrate coupling on sensor structure and its sensitivity. The load cell system has built-in electronics for signal conditioning, processing, and communication, taking into consideration the issues associated with resolution of minimum detectable signal

  5. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  6. Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

    International Nuclear Information System (INIS)

    This is part I of a series of two papers dedicated to the presentation of a novel, large throughput, experimental procedure to determine the three-dimensional distribution of the etch rate of silicon in a wide range of anisotropic etchants, including a total of 30 different etching conditions in KOH, KOH+IPA, TMAH and TMAH+Triton solutions at various concentrations and temperatures. The method is based on the use of previously reported, vertically micromachined wagon wheels (WWs) (Wind and Hines 2000 Surf. Sci. 460 21–38; Nguyen and Elwenspoek 2007 J. Electrochem. Soc. 154 D684–91), focusing on speeding up the etch rate extraction process for each WW by combining macrophotography and image processing procedures. The proposed procedure positions the WWs as a realistic alternative to the traditional hemispherical specimen. The obtained, extensive etch rate database is used to perform wet etching simulations of advanced systems, showing good agreement with the experimental counterparts. In part II of this series (Gosálvez et al J. Micromech. Microeng. 21 125008), we provide a theoretical analysis of the etched spoke shapes, a detailed comparison to the etch rates from previous studies and a self-consistency study of the measured etch rates against maximum theoretical values derived from the spoke shape analysis.

  7. A micro-machined sensor for in situ characterization of plasma sheath potentials and ion energy distributions

    International Nuclear Information System (INIS)

    A micromachined array of ion lenses was fabricated and used to characterize several plasma chemistries. Although present measurement tools, such as Langmuir Probes, can provide insight into potentials present in laboratory plasmas, as well as useful density measurements, they also significantly change the characteristics of plasma around the probe. This unfortunate quality renders them unsuitable as a production diagnostics tool, and hinders their effectiveness as a laboratory instrument. The micromachined array of 2.5 million ion lenses provides a non-intrusive view of ion energy, current, and potential on plasma boundaries. Preliminary tests in argon and CF4 plasmas using the GEC Reference Cell are discussed. Comparisons are made to a simple computer model and future changes to the measurement tool are suggested

  8. Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining

    Indian Academy of Sciences (India)

    Vivekanand Bhatt; Sudhir Chandra; Chatar Singh

    2009-08-01

    In this paper, we explore RF magnetron sputtered Phosphor–silicate–glass (PSG) film as a sacrificial layer in surface micromachining technology. For this purpose, a 76 mm diameter target of phosphorus-doped silicon dioxide was prepared by conventional solid-state reaction route using P25 and SiO2 powders. The PSG films were prepared in a RF (13·56 MHz) magnetron sputtering system at 300 watt RF power, 20 mTorr pressure and 45 mm target-to-substrate spacing without external substrate heating. Microstructures of sputtered silicon dioxide film were fabricated using sputtered PSG film as sacrificial layer in surface micromachining process.

  9. Micromachining of liquid crystal polymer film with frequency converted diode-pumped Nd:YVO4 laser

    Science.gov (United States)

    Li, Mingwei; Hix, Ken; Dosser, Larry R.; Hartke, Kevin; Blackshire, Jim

    2003-07-01

    Liquid crystal polymer (LCP) is a new and innovative material being used as an alternative to polyimide in the flexible circuit industry. LCP has many intrinsic benefits over polyimide including lower moisture absorption and improved dimensional stability. However, LCP is very resistant to chemical milling or etching. As a result, other methods for processing the material are being investigated including laser micromachining. In this paper, three frequency converted diode-pumped solid-state (DPSS) Nd:YVO4 lasers at 355 nm were used to micromachine a LCP film and a copper/LCP laminate. Of them, two are Q-switched lasers operating in the nanosecond regime and the other a mode-locked laser in the picosecond regime. The Q-switched lasers can be operated at pulse repetition rates of 1 to 300 kHz while the mode-locked system is operated at 80 MHz. The micromachining experiments consisted of cutting the 50 μm thick LCP film, cutting the 18 μm thick copper on the film, and drilling micro-vias through both the copper coating and the film substrate. The laser/material interactions and processing speeds were studied and compared. The results show that, compared to polyimide film of the same thickness, LCP film can be more efficiently processed by laser micromachining. In addition, each laser has a unique advantage in processing LCP based flexible circuit materials. The Q-switched lasers are more capable of processing the copper coating while the mode-locked laser can cut LCP film faster with the smallest kerf width.

  10. Microfeature edge quality enhancement in excimer laser micromachining of metal films by coating with a sacrificial polymer layer

    International Nuclear Information System (INIS)

    A novel technique for enhanced excimer laser micromachining of metallic thin films by first coating the metal film with a thin polymer film is presented. The sacrificial polymer film acts as a protective and a clamping layer, preventing the metal film from undergoing cracking and damage during the laser ablation. The machined patterns are characterized regarding their quality in terms of edge roughness, lateral overcut and boundary integrity in proximity machining. Significant improvement in these aspects is observed when the machining is carried out on metal films coated with thin polymer films. Details of the effects of the fluence and spot overlap on the micromachined patterns are investigated. The technique allows sharp machining of micropatterns on thin metal films, over length scales ranging from hundreds of micrometers down to a single micrometer, thereby proving to be the only technique that can be used to laser micromachine thin films at the length scale of a single micrometer. This technique is expected to be useful for large scale patterning of metallic films, particularly for plasmonic applications and infrared/terahertz metamaterials. (paper)

  11. Demonstration of a micromachined planar distribution network in gap waveguide technology for a linear slot array antenna at 100 GHz

    Science.gov (United States)

    Rahiminejad, S.; Zaman, A. U.; Haasl, S.; Kildal, P.-S.; Enoksson, P.

    2016-07-01

    The need for high frequency antennas is rapidly increasing with the development of new wireless rate communication technology. Planar antennas have an attractive form factor, but they require a distribution network. Microstrip technology is most commonly used at low frequency but suffers from large dielectric and ohmic losses at higher frequencies and particularly above 100 GHz. Substrate-integrated waveguides also suffer from dielectric losses. In addition, standard rectangular waveguide interfaces are inconvenient due to the four flange screws that must be tightly fastened to the antenna to avoid leakage. The current paper presents a planar slot array antenna that does not suffer from any of these problems. The distribution network is realized by micromachining using low-loss gap waveguide technology, and it can be connected to a standard rectangular waveguide flange without using any screws or additional packaging. To realize the antenna at these frequencies, it was fabricated with micromachining, which offers the required high precision, and a low-cost fabrication method. The antenna was micromachined with DRIE in two parts, one silicon-on-insulator plate and one Si plate, which were both covered with Au to achieve conductivity. The input reflection coefficient was measured to be below 10 dB over a 15.5% bandwidth, and the antenna gain was measured to be 10.4 dBi, both of which are in agreement with simulations.

  12. Extending the frequency range of free-field reciprocity calibration of measurement microphones to frequencies up to 150 kHz

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras Rosell, Antoni; Jacobsen, Finn

    2013-01-01

    Measurement microphones are typically calibrated in a free field at frequencies up to 50 kHz. This is a sufficiently high frequency for the most sound measurement applications related with noise assessment. However, other applications such as the measurement of noise emitted by ultrasound cleaning...... machines and failure detection in aeronautic structures require that the sensitivity of the microphone is known at frequencies up to 150 kHz. Another area of particular interest is the investigation of the perception mechanisms of ultrasound. In any of these applications, it is of fundamental importance...... to establish a well-defined traceability chain to support the measurement results. In order to extend the frequency range of free-field calibration the measurement system and measurement methods must undergo a series of changes and adaptations including the type of excitation signal, techniques for eliminating...

  13. High-accuracy fiber optical microphone in a DBR fiber laser based on a nanothick silver diaphragm by self-mixing technique.

    Science.gov (United States)

    Du, Zhengting; Lu, Liang; Zhang, Wenhua; Yang, Bo; Wu, Shuang; Zhao, Yunhe; Xu, Feng; Wang, Zhiping; Gui, Huaqiao; Liu, Jianguo; Yu, Benli

    2013-12-16

    A high-accuracy fiber optical microphone (FOM) is first applied by self-mixing technique in a DBR fiber laser based on a nanothick silver diaphragm. The nanothick silver diaphragm fabricated by the convenient and low cost electroless plating method is functioned as sensing diaphragm due to critically susceptible to the air vibration. Simultaneously, micro-vibration theory model of self-mixing interference fiber optical microphone is deduced based on quasi-analytical method. The dynamic property to frequencies and amplitudes are experimentally carried out to characterize the fabricated FOM and also the reproduced sound of news and music can clearly meet the ear of the people which shows the technique proposed in this paper guarantee steady, high signal-noise ratio operation and outstanding accuracy in the DBR fiber laser which is potential to medical and security applications such as real-time voice reproduction for throat and voiceprint verification. PMID:24514635

  14. Determining Sound Source Orientation from Source Directivity and Real Multi-Microphone Recordings: Experimental Comparisons using both Analytical and Measured Directivity Models

    DEFF Research Database (Denmark)

    Guarato, Francesco; Hallam, John; Vanderelst, Dieter

    2009-01-01

    This paper presents a method for estimating the orientation of a directional sound source emitting a broadband acoustic signal being recorded by a microphone array, given source directivity, microphone positions with respect to the source and recordings of the call. Such a method has been tested...... an analytical directivity model and when directivity is provided by measurements. Results show that method estimates orientations very close to the true ones, and that analytical directivity is a good approximation of the measured one. We also point out the limits we must respect to make the method precise....... The signal emitted by the source is broadband, like the signals many bats use while echolocating. Indeed, our intended final application of the method is to estimate the orientations a bat assumes while hunting over water....

  15. Advanced sensing technology in environmental field.

    Science.gov (United States)

    Wakida, Shin-ichi

    2009-01-01

    Before the introduction of advanced sensing technology in environmental fields, environmental issues were discussed as several categories, such as local environmental issues in the 1970s, global environmental issues in the 1980s, living environmental issues in the 2000s and environmental stress issues in near future, which are of increasing interest in Japan. Using advanced sensing technologies, such as electrochemical sensors, chemically-sensitive field-effect transistors (ChemFETs) based on micro-electro mechanical system (MEMS) micromachining technology and subsequently electrophoretic separation and microfluidic Lab-on-a-Chip using MEMS technology, we have steered several kinds of environmental monitoring projects timely in response to the environmental issues for over the last 25 years. Among the local environmental issues, the global environmental issues and the living environmental issues, some fruits of R&D project will be introduced. Finally, our latest concern of the environmental stress monitoring was discussed and preliminary results were also introduced.

  16. Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).

    Energy Technology Data Exchange (ETDEWEB)

    Cox, James V.; Candelaria, Sam A.; Dugger, Michael Thomas; Duesterhaus, Michelle Ann; Tanner, Danelle Mary; Timpe, Shannon J.; Ohlhausen, James Anthony; Skousen, Troy J.; Jenkins, Mark W.; Jokiel, Bernhard, Jr.; Walraven, Jeremy Allen; Parson, Ted Blair

    2006-06-01

    Qualification of microsystems for weapon applications is critically dependent on our ability to build confidence in their performance, by predicting the evolution of their behavior over time in the stockpile. The objective of this work was to accelerate aging mechanisms operative in surface micromachined silicon microelectromechanical systems (MEMS) with contacting surfaces that are stored for many years prior to use, to determine the effects of aging on reliability, and relate those effects to changes in the behavior of interfaces. Hence the main focus was on 'dormant' storage effects on the reliability of devices having mechanical contacts, the first time they must move. A large number ({approx}1000) of modules containing prototype devices and diagnostic structures were packaged using the best available processes for simple electromechanical devices. The packaging processes evolved during the project to better protect surfaces from exposure to contaminants and water vapor. Packages were subjected to accelerated aging and stress tests to explore dormancy and operational environment effects on reliability and performance. Functional tests and quantitative measurements of adhesion and friction demonstrated that the main failure mechanism during dormant storage is change in adhesion and friction, precipitated by loss of the fluorinated monolayer applied after fabrication. The data indicate that damage to the monolayer can occur at water vapor concentrations as low as 500 ppm inside the package. The most common type of failure was attributed to surfaces that were in direct contact during aging. The application of quantitative methods for monolayer lubricant analysis showed that even though the coverage of vapor-deposited monolayers is generally very uniform, even on hidden surfaces, locations of intimate contact can be significantly depleted in initial concentration of lubricating molecules. These areas represent defects in the film prone to adsorption of

  17. Design and implementation of a space domain spherical microphone array with application to source localization and separation.

    Science.gov (United States)

    Bai, Mingsian R; Yao, Yueh Hua; Lai, Chang-Sheng; Lo, Yi-Yang

    2016-03-01

    In this paper, four delay-and-sum (DAS) beamformers formulated in the modal domain and the space domain for open and solid spherical apertures are examined through numerical simulations. The resulting beampatterns reveal that the mainlobe of the solid spherical DAS array is only slightly narrower than that of the open array, whereas the sidelobes of the modal domain array are more significant than those of the space domain array due to the discrete approximation of continuous spherical Fourier transformation. To verify the theory experimentally, a three-dimensionally printed spherical array on which 32 micro-electro-mechanical system microphones are mounted is utilized for localization and separation of sound sources. To overcome the basis mismatch problem in signal separation, source localization is first carried out using minimum variance distortionless response beamformer. Next, Tikhonov regularization (TIKR) and compressive sensing (CS) are employed to extract the source signal amplitudes. Simulations and experiments are conducted to validate the proposed spherical array system. Objective perceptual evaluation of speech quality test and a subjective listening test are undertaken in performance evaluation. The experimental results demonstrate better separation quality achieved by the CS approach than by the TIKR approach at the cost of computational complexity.

  18. A Bayesian direction-of-arrival model for an undetermined number of sources using a two-microphone array.

    Science.gov (United States)

    Escolano, Jose; Xiang, Ning; Perez-Lorenzo, Jose M; Cobos, Maximo; Lopez, Jose J

    2014-02-01

    Sound source localization using a two-microphone array is an active area of research, with considerable potential for use with video conferencing, mobile devices, and robotics. Based on the observed time-differences of arrival between sound signals, a probability distribution of the location of the sources is considered to estimate the actual source positions. However, these algorithms assume a given number of sound sources. This paper describes an updated research account on the solution presented in Escolano et al. [J. Acoust. Am. Soc. 132(3), 1257-1260 (2012)], where nested sampling is used to explore a probability distribution of the source position using a Laplacian mixture model, which allows both the number and position of speech sources to be inferred. This paper presents different experimental setups and scenarios to demonstrate the viability of the proposed method, which is compared with some of the most popular sampling methods, demonstrating that nested sampling is an accurate tool for speech localization. PMID:25234883

  19. 3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect

    Science.gov (United States)

    Xu, Qing; Zhao, Xiangyong; Li, Xiaobing; Deng, Hao; Yan, Hong; Yang, Linrong; Di, Wenning; Luo, Haosu; Neumann, Norbert

    2016-05-01

    A sensitive chip with ultralow dielectric loss based on Mn doped PMNT (71/29) has been proposed for high-end pyroelectric devices. The dielectric loss at 1 kHz is 0.005%, one order lower than the minimum value reported so far. The detective figure of merit (Fd) is up to 92.6 × 10-5 Pa-1/2 at 1 kHz and 53.5 × 10-5 Pa-1/2 at 10 Hz, respectively. In addition, an inverted pyramid suspending architecture for supporting the sensitive chip has been designed and manufactured by 3D printing technology. The combination of this sensitive chip and the proposed suspending architecture largely enhances the performance of the pyroelectric detectors. The responsivity and specific detectivity are 669,811 V/W and 3.32 × 109 cm Hz1/2/W at 10 Hz, respectively, 1.9 times and 1.5 times higher than those of the highest values in literature. Furthermore, the microphonic effect can be largely inhibited according to the theoretical and experimental analysis. This architecture will have promising applications in high-end and stable pyroelectric infrared detectors.

  20. Design and implementation of a space domain spherical microphone array with application to source localization and separation.

    Science.gov (United States)

    Bai, Mingsian R; Yao, Yueh Hua; Lai, Chang-Sheng; Lo, Yi-Yang

    2016-03-01

    In this paper, four delay-and-sum (DAS) beamformers formulated in the modal domain and the space domain for open and solid spherical apertures are examined through numerical simulations. The resulting beampatterns reveal that the mainlobe of the solid spherical DAS array is only slightly narrower than that of the open array, whereas the sidelobes of the modal domain array are more significant than those of the space domain array due to the discrete approximation of continuous spherical Fourier transformation. To verify the theory experimentally, a three-dimensionally printed spherical array on which 32 micro-electro-mechanical system microphones are mounted is utilized for localization and separation of sound sources. To overcome the basis mismatch problem in signal separation, source localization is first carried out using minimum variance distortionless response beamformer. Next, Tikhonov regularization (TIKR) and compressive sensing (CS) are employed to extract the source signal amplitudes. Simulations and experiments are conducted to validate the proposed spherical array system. Objective perceptual evaluation of speech quality test and a subjective listening test are undertaken in performance evaluation. The experimental results demonstrate better separation quality achieved by the CS approach than by the TIKR approach at the cost of computational complexity. PMID:27036243

  1. Acoustic imaging of a duct spinning mode by the use of an in-duct circular microphone array.

    Science.gov (United States)

    Wei, Qingkai; Huang, Xun; Peers, Edward

    2013-06-01

    An imaging method of acoustic spinning modes propagating within a circular duct simply with surface pressure information is introduced in this paper. The proposed method is developed in a theoretical way and is demonstrated by a numerical simulation case. Nowadays, the measurements within a duct have to be conducted using in-duct microphone array, which is unable to provide information of complete acoustic solutions across the test section. The proposed method can estimate immeasurable information by forming a so-called observer. The fundamental idea behind the testing method was originally developed in control theory for ordinary differential equations. Spinning mode propagation, however, is formulated in partial differential equations. A finite difference technique is used to reduce the associated partial differential equations to a classical form in control. The observer method can thereafter be applied straightforwardly. The algorithm is recursive and, thus, could be operated in real-time. A numerical simulation for a straight circular duct is conducted. The acoustic solutions on the test section can be reconstructed with good agreement to analytical solutions. The results suggest the potential and applications of the proposed method. PMID:23742352

  2. Convergence of reference frequencies by multiple CF-FM bats (Rhinolophus ferrumequinum nippon) during paired flights evaluated with onboard microphones.

    Science.gov (United States)

    Furusawa, Yuto; Hiryu, Shizuko; Kobayasi, Kohta I; Riquimaroux, Hiroshi

    2012-09-01

    The constant frequency component of the second harmonic (CF(2)) of echolocation sounds in Rhinolophus ferrumequinum nippon were measured using onboard telemetry microphones while the bats exhibited Doppler-shift compensation during flights with conspecifics. (1) The CF(2) frequency of pulses emitted by individual bats at rest (F (rest)) showed a long-term gradual decline by 0.22 kHz on average over a period of 3 months. The mean neighboring F (rest) (interindividual differences in F (rest) between neighboring bats when the bats were arranged in ascending order according to F (rest)) ranged from 0.08 to 0.11 kHz among 18 bats in a laboratory colony. (2) The standard deviation of observed echo CF(2) (reference frequency) for bats during paired flights ranged from 50 to 90 Hz, which was not significantly different from that during single flights. This finding suggests that during paired flights, bats exhibit Doppler-shift compensation with the same accuracy as when they fly alone. (3) In 60% (n = 29) of the cases, the difference in the reference frequency between two bats during paired flights significantly decreased compared to when the bats flew alone. However, only 15% of the cases (n = 7) showed a significant increase during paired flights. The difference in frequency between two bats did not increase even when the reference frequencies of the individuals were not statistically different during single flights.

  3. Passive Acoustic Source Localization at a Low Sampling Rate Based on a Five-Element Cross Microphone Array

    Directory of Open Access Journals (Sweden)

    Yue Kan

    2015-06-01

    Full Text Available Accurate acoustic source localization at a low sampling rate (less than 10 kHz is still a challenging problem for small portable systems, especially for a multitasking micro-embedded system. A modification of the generalized cross-correlation (GCC method with the up-sampling (US theory is proposed and defined as the US-GCC method, which can improve the accuracy of the time delay of arrival (TDOA and source location at a low sampling rate. In this work, through the US operation, an input signal with a certain sampling rate can be converted into another signal with a higher frequency. Furthermore, the optimal interpolation factor for the US operation is derived according to localization computation time and the standard deviation (SD of target location estimations. On the one hand, simulation results show that absolute errors of the source locations based on the US-GCC method with an interpolation factor of 15 are approximately from 1/15- to 1/12-times those based on the GCC method, when the initial same sampling rates of both methods are 8 kHz. On the other hand, a simple and small portable passive acoustic source localization platform composed of a five-element cross microphone array has been designed and set up in this paper. The experiments on the established platform, which accurately locates a three-dimensional (3D near-field target at a low sampling rate demonstrate that the proposed method is workable.

  4. 2015 AMCLC Open-Microphone Session: Improving the IQ (Information Quality) of What We Do.

    Science.gov (United States)

    Stern, Eric; Metter, Darlene; Everett, Catherine; Flug, Jonathan; Herrington, William; Applegate, Kimberly E

    2016-03-01

    Each year an open-microphone session is hosted by the Council Steering Committee. The committee invited an expert panel to discuss the use of effective communication in appropriate procedure selection and methods and resources to communicate the results of procedures performed in an actionable and clear manner to referring clinicians and patients, as well as downstream data systems. The ACR is actively encouraging radiologists to leverage existing and new technologies to increase their visibility in the health care system. Key features in Imaging 3.0 are results reporting through actionable reports, decision support for results reporting, guidelines for recommendations, tools for actionable reports, and tracking a radiologist's recommendations. The final radiology report is an essential product of our service, but it is increasingly clear that the noninterpretive components of our profession will add the most value to patient care. The radiology report is not the only evidence of our work. Nonetheless, the information quality and content of the radiology report can and must be improved so that it can add value and clinical usefulness toward excellent patient care. We must use appropriate tools and "best knowledge" to deliver actionable and value-added high-quality reports. PMID:26768547

  5. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    Energy Technology Data Exchange (ETDEWEB)

    Schwinkendorf, Jan-Patrick

    2012-08-15

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  6. Improved micromachined column design and fluidic interconnects for programmed high-temperature gas chromatography separations.

    Science.gov (United States)

    Gaddes, David; Westland, Jessica; Dorman, Frank L; Tadigadapa, Srinivas

    2014-07-01

    This work focuses on the development and experimental evaluation of micromachined chromatographic columns for use in a commercial gas chromatography (GC) system. A vespel/graphite ferrule based compression sealing technique is presented using which leak-proof fluidic interconnection between the inlet tubing and the microchannel was achieved. This sealing technique enabled separation at temperatures up to 350°C on a μGC column. This paper reports the first high-temperature separations in microfabricated chromatographic columns at these temperatures. A 2m microfabricated column using a double Archimedean spiral design with a square cross-section of 100μm×100μm has been developed using silicon microfabrication techniques. The microfabricated column was benchmarked against a 2m 100μm diameter commercial column and the performance between the two columns was evaluated in tests performed under identical conditions. High temperature separations of simulated distillation (ASTM2887) and polycyclic aromatic hydrocarbons (EPA8310) were performed using the μGC column in temperature programmed mode. The demonstrated μGC column along with the high temperature fixture offers one more solution toward potentially realizing a portable μGC device for the detection of semi-volatile environmental pollutants and explosives without the thermal limitations reported to date with μGC columns using epoxy based interconnect technology.

  7. Droplet formation and ejection from a micromachined ultrasonic droplet generator: Visualization and scaling

    Science.gov (United States)

    Meacham, J. M.; Varady, M. J.; Degertekin, F. L.; Fedorov, A. G.

    2005-10-01

    Visualization and scaling of drop-on-demand and continuous-jet fluid atomization of water are presented to elucidate the fluid physics of the ejection process and characterize the modes of operation of a novel micromachined ultrasonic droplet generator. The device comprises a fluid reservoir that is formed between a bulk ceramic piezoelectric transducer and an array of liquid horn structures wet etched into (100) silicon. At resonance, the transducer generates a standing ultrasonic pressure wave within the cavity and the wave is focused at the tip of the nozzle by the horn structure. Device operation has been demonstrated by water droplet ejection from 5to10μm orifices at multiple resonant frequencies between 1 and 5MHz. The intimate interactions between focused ultrasonic pressure waves and capillary waves formed at the liquid-air interface located at the nozzle tip are found to govern the ejection dynamics, leading to different ejection modalities ranging from individual droplets to continuous jet. Specifically, we report the results of high-resolution stroboscopic optical imaging of the liquid-air interface evolution during acoustic pumping to elucidate the role of capillary waves in the droplet formation and ejection process. A basic understanding of the governing physics gained through careful visualization and scaling forms the basis for development of improved theoretical models for the droplet formation and ejection processes by accounting for key fluid mechanical features of the phenomena.

  8. Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

    Science.gov (United States)

    Hall, Neal A; Lee, Wook; Degertekin, F Levent

    2003-11-01

    Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz. PMID:14682641

  9. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Science.gov (United States)

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  10. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    International Nuclear Information System (INIS)

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has to be maintained at a pressure of 0.01 Pa or lower. In this paper, the challenge of maintaining a vacuum chamber with a volume of 3.6 × 10−5 m3 and an inner wall area of 8.1 × 10−3 m2 at a pressure no higher than 0.01 Pa for five years is theoretically analyzed. The possible sources of gas, the mechanisms by which these gases enter the vacuum space and their effects on the pressure in the vacuum chamber are discussed. In a long-duration experiment with four stainless steel chambers of the above dimensions and equipped with a chemical getter, the vacuum pressures were monitored for a period of two years. In that period, the measured pressure increase stayed within 0.01 Pa. This study can be used to guide the design of long-lifetime micro vacuum chambers that operate without continuous mechanical pumping

  11. A single-layer micromachined tunable capacitor with an electrically floating plate

    Science.gov (United States)

    Khan, Fahimullah; Zhu, Yong; Lu, Junwei; Pal, Jitendra; Viet Dao, Dzung

    2016-04-01

    This paper reports a novel micromachined tunable capacitor with an electrically floating movable plate. The device has been fabricated from a single metal layer based on a low-cost standard process. Tunable capacitors with electrically floating and non-floating plates have been characterized and compared with each other by using the same fabricated device with different configurations. The floating tunable capacitor exhibits a higher quality factor (Q-factor) compared to a non-floating capacitor by eliminating the spring’s resistance loss in radio frequency signal path. The device is actuated by an electro-thermal actuator to achieve high capacitance tuning range without the pull-in effect issue of parallel-plate electrostatic actuators. Experimental results show that the tunable capacitor has a wide capacitance tuning range of 631% with a low actuation voltage of 0.72 V. The floating tunable capacitor has a Q-factor at 1 GHz of 24.4, which is 5.5 times higher than that of a non-floating traditional tunable capacitor fabricated on the same chip.

  12. A simple three-dimensional computer simulation tool for predicting femtosecond laser micromachined structures

    International Nuclear Information System (INIS)

    Laser micromachining is a powerful technique that is commonly used in microfabrication. Typically such laser systems are computer controlled, and the required microstructure is fabricated by multiple machining iterations, where the control program is modified until the required structure is achieved. Here a simple method of simulating an approximation of the surface topography that will result from a computer numerically controlled (CNC) laser machining program is presented for glass and silicon. The simulation allows rapid prediction of the etch depths, workpiece contours, resulting structuring and machining artifacts. It was found that the simulated surface topology closely matched that of the structures machined in each material (4% of the maximum etch depth for borosilicate, 7% for sodalime and 9% for silicon). A non-planar microfluidic channel system with through-substrate ports was produced in both types of glass and silicon. The design took 12 min to simulate and 74 min to machine, and the simulation was accurate to within 4 µm of the machined glass substrate.

  13. Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers

    Science.gov (United States)

    Alekel, Theodore; Foster, David H.; Crist, Jordan

    2009-02-01

    Nanosecond class lasers have been the mainstay of optical machining for decades, delivering pulses with high fluences (>1 J/cm2) that cause many material sets to undergo thermally-induced phase changes to cause removal of matter. While in many cases their delivery of sheer laser power has proved useful, nanosecond lasers have fallen short of addressing current micromachining requirements with respect to decreased feature sizes and more complex substrates. One main issue is the laser pulse width endures throughout the ablation process, depositing energy is deposited into plasma formation and local material heating. Plasma shielding takes place when the laser pulse energy contributes to plasma formation to a greater extent than direct material ablation processes. The result is a crude "plasma cutter" of the substrate, leaving a telltale trail of localized dross and droplet deposition. Nanosecond lasers of sufficient process speeds are typically Q-switched with repetition rates less than 200 kHz. As a result, the scribed lines are made of a sequence of "blast events" that result in a variety of undesired consequences and a limited process speed.

  14. The Effect of Humidity on the Reliability of a Surface Micromachined Microengine

    Energy Technology Data Exchange (ETDEWEB)

    Dugger, M.T.; Eaton, W.P.; Irwin, L.W.; Miller, S.L.; Miller, W.M.; Smith, N.F.; Tanner, D.M.; Walraven, J.A.

    1999-02-02

    Humidity is shown to be a strong factor in the wear of rubbing surfaces in polysilicon micromachines. We demonstrate that very low humidity can lead to very high wear without a significant change in reliability. We show that the volume of wear debris generated is a function of the humidity in an air environment. As the humidity decreases, the wear debris generated increases. For the higher humidity levels, the formation of surface hydroxides may act as a lubricant. The dominant failure mechanism has been identified as wear. The wear debris has been identified as amorphous oxidized silicon. Large slivers (approximately 1 micron in length) of debris observed at the low humidity level were also amorphous oxidized silicon. Using transmission electron microscopy, we observed that the wear debris forms spherical and rod-like shapes. We compared two surface treatment processes: a fluorinated si- lane chain, (FITl) and supercritical C02 dried (SCC02). The microengines using the SCC02 process were found to be less reliable than those released with the FIX process under two humidity levels.

  15. Linkage design effect on the reliability of surface micromachined microengines driving a load

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Peterson, K.A.; Irwin, L.W.; Tangyunyong, P.; Miller, W.M.; Eaton, W.P.; Smith, N.F.; Rodgers, M.S.

    1998-08-01

    The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. The authors have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, the authors used microengines that had pin mechanisms with guides connecting the drive arms to the electrostatic actuators. Comparing this data to previous results using flexure linkages revealed that the pin linkage design was less reliable. The devices were stressed to failure at eight frequencies, both above and below the measured resonance frequency of the microengine. Significant amounts of wear debris were observed both around the hub and pin joint of the drive gear. Additionally, wear tracks were observed in the area where the moving shuttle rubbed against the guides of the pin linkage. At each frequency, they analyzed the statistical data yielding a lifetime (t{sub 50}) for median cycles to failure and {sigma}, the shape parameter of the distribution. A model was developed to describe the failure data based on fundamental wear mechanisms and forces exhibited in mechanical resonant systems. The comparison to the model will be discussed.

  16. Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer

    Directory of Open Access Journals (Sweden)

    Xiaoping He

    2013-01-01

    Full Text Available Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence the buckling value is important in designing MEMS devices. In this study, the curvature in the proof mass of an accelerometer is modeled as a multilayered solid model. Modeling is performed according to the characteristics of the solid diffusion mechanism in the bulk-dissolved wafer process (BDWP based on the self-stopped etch technique. Moreover, the proposed multilayered solid model is established as an equivalent composite structure formed by a group of thin layers that are glued together. Each layer has a different Young’s modulus value and each undergoes different volume shrinkage strain owing to boron doping in silicon. Observations of five groups of proof mass blocks of accelerometers suggest that the theoretical model is effective in determining the buckling value of a fabricated structure.

  17. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Science.gov (United States)

    Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Akhbari, Sina; Ding, Jianjun; Zhao, Yihe; Zhao, Yulong; Lin, Liwei

    2015-12-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  18. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  19. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  20. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Science.gov (United States)

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  1. Piezoelectric Micromachined Ultrasound Transducer (PMUT Arrays for Integrated Sensing, Actuation and Imaging

    Directory of Open Access Journals (Sweden)

    Yongqiang Qiu

    2015-04-01

    Full Text Available Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs, diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

  2. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.

    Science.gov (United States)

    Qiu, Yongqiang; Gigliotti, James V; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E M; Cochran, Sandy; Trolier-McKinstry, Susan

    2015-04-03

    Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

  3. Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope

    Institute of Scientific and Technical Information of China (English)

    XIAO Qi-jun; CHEN Wen-yuan; CUI feng; LI Sheng-yong; LIU Chao-ying; ZHANG Wei-ping

    2010-01-01

    A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using moderncontrol technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.

  4. Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

    Directory of Open Access Journals (Sweden)

    Lamia EL Fissi

    2014-12-01

    Full Text Available Ten picoseconds (200 kHz ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing several laser parameters on the resulting microstructural shapes and morphology. The micromachining rate has been observed to be strongly dependent on the operating parameters, such as the pulse fluence, the scan speed and the scan number. The results specifically indicate that ablation at low fluence and low speed scan tends to form a U-shaped cross-section, while a V-shaped profile can be obtained by using a high fluence and a high scan speed. The evolution of surface morphology revealed that laser pulses overlap in a range around 93% for both Lithium Niobate (LiNbO3 and Lithium Tantalate (LiTaO3 and 98% for AT-cut quartz can help to achieve optimal residual surface roughness.

  5. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    Energy Technology Data Exchange (ETDEWEB)

    Cao, Haishan, E-mail: H.Cao@utwente.nl, E-mail: HaishanCao@gmail.com; Vermeer, Cristian H.; Vanapalli, Srinivas; Holland, Harry J.; Brake, H. J. Marcel ter [Energy, Materials and Systems, Faculty of Science and Technology, University of Twente, 7500 AE Enschede (Netherlands)

    2015-11-15

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has to be maintained at a pressure of 0.01 Pa or lower. In this paper, the challenge of maintaining a vacuum chamber with a volume of 3.6 × 10{sup −5} m{sup 3} and an inner wall area of 8.1 × 10{sup −3} m{sup 2} at a pressure no higher than 0.01 Pa for five years is theoretically analyzed. The possible sources of gas, the mechanisms by which these gases enter the vacuum space and their effects on the pressure in the vacuum chamber are discussed. In a long-duration experiment with four stainless steel chambers of the above dimensions and equipped with a chemical getter, the vacuum pressures were monitored for a period of two years. In that period, the measured pressure increase stayed within 0.01 Pa. This study can be used to guide the design of long-lifetime micro vacuum chambers that operate without continuous mechanical pumping.

  6. Micromachined PIN-PMN-PT crystal composite transducer for high-frequency intravascular ultrasound (IVUS) imaging.

    Science.gov (United States)

    Li, Xiang; Ma, Teng; Tian, Jian; Han, Pengdi; Zhou, Qifa; Shung, K Kirk

    2014-07-01

    In this paper, we report the use of micromachined PbIn1/2Nb1/2O3-PbMg1/3Nb2/3O3-PbTiO 3 (PIN-PMNPT) single crystal 1-3 composite material for intravascular ultrasound (IVUS) imaging application. The effective electromechanical coupling coefficient kt(eff) of the composite was measured to be 0.75 to 0.78. Acoustic impedance was estimated to be 20 MRayl. Based on the composite, needle-type and flexible-type IVUS transducers were fabricated. The composite transducer achieved an 86% bandwidth at the center frequency of 41 MHz, which resulted in a 43 μm axial resolution. Ex vivo IVUS imaging was conducted to demonstrate the improvement of axial resolution. The composite transducer was capable of identifying the three layers of a cadaver coronary artery specimen with high resolution. The PIN-PMN-PT-based composite has superior piezoelectric properties comparable to PMN-PT-based composite and its thermal stability is higher than PMN-PT. PIN-PMN-PT crystal can be an alternative approach for fabricating high-frequency composite, instead of using PMN-PT. PMID:24960706

  7. Excimer laser micromachining of oblique microchannels on thin metal films using square laser spot

    Indian Academy of Sciences (India)

    SYED NADEEM AKHTAR; SHASHANK SHARMA; S ANANTHA RAMAKRISHNA; J RAMKUMAR

    2016-06-01

    Excimer laser micromachining of thin metal films with a sacrificial polymer coating is a novel technique that produces features with smooth edges. Using this technique, oblique microchannels are fabricated by workpiece dragging and using a square laser spot, where the axis of traverse of the workpiece is not parallel to the edges of the square laser spot. The microchannels have serrated edges that are particular to the shape of the mask producing the spot. The edge roughness of the channels, machined with a square laser spot of side 100lm, is found to be most affected by the fluence–spot overlap interaction, and the channel width by spot-overlap and the angle of tilt of the traversed path. Polymer coated metal films underwent close to ideal machining, aided by the clamping action of the polymer layer. Through this technique of machining post polymer coating, the edge roughnesses of the microchannels have been curtailed to less than 10 lm, and channel widths to 150 lm. This technique may be used in fabrication of oblique and circular patterns using excimer laser micromachiningwith rectangular and square laser spots

  8. Two Novel Measurements for the Drive-Mode Resonant Frequency of a Micromachined Vibratory Gyroscope

    Directory of Open Access Journals (Sweden)

    Ancheng Wang

    2013-11-01

    Full Text Available To investigate the drive-mode resonance frequency of a micromachined vibratory gyroscope (MVG, one needs to measure it accurately and efficiently. The conventional approach to measure the resonant frequency is by performing a sweep frequency test and spectrum analysis. The method is time-consuming and inconvenient because of the requirements of many test points, a lot of data storage and off-line analyses. In this paper, we propose two novel measurement methods, the search method and track method, respectively. The former is based on the magnitude-frequency characteristics of the drive mode, utilizing a one-dimensional search technique. The latter is based on the phase-frequency characteristics, applying a feedback control loop. Their performances in precision, noise resistivity and efficiency are analyzed through detailed simulations. A test system is implemented based on a field programmable gate array (FPGA and experiments are carried out. By comparing with the common approach, feasibility and superiorities of the proposed methods are validated. In particular, significant efficiency improvements are achieved whereby the conventional frequency method consumes nearly 5,000 s to finish a measurement, while only 5 s is needed for the track method and 1 s for the search method.

  9. Online self-compensation for enhanced the scale factor stability of a micromachined gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Zhou Bin; Zhang Rong; Chen Zhiyong [Department of Precision Instrument, Tsinghua University, Beijing, 100084 (China)], E-mail: zhoubin98@tsinghua.org.cn

    2009-09-01

    In this paper, an online self-compensation control scheme for micromachined gyroscope has been presented to eliminate the scale factor drift due to temperature influence. Firstly, the error sources of scale factor have been analyzed. According the analysis results, a novel control scheme which contains three loops has been proposed: a phase-locked loop of driving mode is to drive the proof mass oscillation in its' resonant frequency, an AGC loop of driving mode is to keep a constant value of the drive amplitude, an additional scale factor error online detection and cancellation loop is to keep the scale factor stable. A digital hardware prototype has been implemented to perform the precision loop control and self-compensation loop. Scale factor of the gyroscope has been measured in a temperature-controlled turntable. Experiment results show that the scale factor drift is -3.5% to 5.2% over the temperature range of -45 deg. C to +80 deg. C without the self-compensation loop, while the scale factor drift decrease to -0.009% to 0.15% after the self-compensation loop is applied.

  10. NEW CLOSED-LOOP DRIVING CIRCUIT OF SILICON MICROMACHINED VIBRATORY GYROSCOPE

    Institute of Scientific and Technical Information of China (English)

    YANGBo; SUYah; ZHOUBai-ling

    2005-01-01

    A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrodes placed in both sides of the active combs, respectively. Driving performance analyses show that the frequency spectrum between driving moments and noise signals is separated. Therefore, the model of the closed-loop control is set up with the phase lock loop (PLL). The requirements for phases and gains of the sinusoidal selfdrive-oscillation are met by PLL, thus the closed-loop circuit reaches the self-drive-oscillation. Phase conditions of the sinusoidal self-drive-oscillation and the characteristic of phase discrimination of the PLL are used to eliminate the coupling between driving and sense signals, and noise signals. Finally, experimental results show that the variations of both the driving frequency and the amplitude are all under 0.02%. The precision and the reliability of the gyroscope are greatly improved.

  11. Two novel measurements for the drive-mode resonant frequency of a micromachined vibratory gyroscope.

    Science.gov (United States)

    Wang, Ancheng; Hu, Xiaoping; Luo, Bing; Jiang, Mingming; He, Xiaofeng; Tang, Kanghua

    2013-01-01

    To investigate the drive-mode resonance frequency of a micromachined vibratory gyroscope (MVG), one needs to measure it accurately and efficiently. The conventional approach to measure the resonant frequency is by performing a sweep frequency test and spectrum analysis. The method is time-consuming and inconvenient because of the requirements of many test points, a lot of data storage and off-line analyses. In this paper, we propose two novel measurement methods, the search method and track method, respectively. The former is based on the magnitude-frequency characteristics of the drive mode, utilizing a one-dimensional search technique. The latter is based on the phase-frequency characteristics, applying a feedback control loop. Their performances in precision, noise resistivity and efficiency are analyzed through detailed simulations. A test system is implemented based on a field programmable gate array (FPGA) and experiments are carried out. By comparing with the common approach, feasibility and superiorities of the proposed methods are validated. In particular, significant efficiency improvements are achieved whereby the conventional frequency method consumes nearly 5,000 s to finish a measurement, while only 5 s is needed for the track method and 1 s for the search method.

  12. Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

    Directory of Open Access Journals (Sweden)

    Mohamed Sultan Mohamed Ali

    2014-07-01

    Full Text Available This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit’s resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/µm or more for a full out-of-plane travel range of 466 µm and an average actuation velocity of up to 155 µm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.

  13. A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals

    Institute of Scientific and Technical Information of China (English)

    Jing-jing WANG; Wei-hui LIU; Da CHEN; Yan XU; Lu-yin ZHANG

    2014-01-01

    Increasing awareness concerning food safety problems has been driving the search for simple and efficient bio-chemical analytical methods. In this paper, we develop a portable electro-acoustic biosensor based on a film bulk acoustic reso-nator for the detection of pesticide residues in agricultural products. A shear mode ZnO film bulk acoustic resonator with a mi-cro-machining structure was fabricated as a mass-sensitive transducer for the real-time detection of antibody-antigen reactions in liquids. In order to obtain an ultra-low detection level, the artificial antigens were immobilized on the sensing surface of the resonator to employ a competitive format for the immunoassays. The competitive immunoreactions can be observed clearly through monitoring the frequency changes. The presence of pesticides was detected through the diminution of the frequency shift compared with the level without pesticides. The limit of detection for carbaryl (a widely used pesticide for vegetables and crops) is 2´10-10 M. The proposed device represents a potential alternative to the complex optical systems and electrochemical methods that are currently being used, and represents a significant opportunity in terms of simplicity of use and portability for on-site food safety testing.

  14. An investigation of vibration-induced protein desorption mechanism using a micromachined membrane and PZT plate.

    Science.gov (United States)

    Yeh, Po Ying; Le, Yevgeniya; Kizhakkedathu, Jayachandran N; Chiao, Mu

    2008-10-01

    A micromachined vibrating membrane is used to remove adsorbed proteins on a surface. A lead zirconate titanate (PZT) composite (3 x 1 x 0.5 mm) is attached to a silicon membrane (2,000 x 500 x 3 microm) and vibrates in a flexural plate wave (FPW) mode with wavelength of 4,000/3 microm at a resonant frequency of 308 kHz. The surface charge on the membrane and fluid shear stress contribute in minimizing the protein adsorption on the SiO(2) surface. In vitro characterization shows that 57 +/- 10% of the adsorbed bovine serum albumin (BSA), 47 +/- 13% of the immunoglobulin G (IgG), and 55.3~59.2 +/- 8% of the proteins from blood plasma are effectively removed from the vibrating surface. A simulation study of the vibration-frequency spectrum and vibrating amplitude distribution matches well with the experimental data. Potentially, a microelectromechanical system (MEMS)-based vibrating membrane could be the tool to minimize biofouling of in vivo MEMS devices. PMID:18427993

  15. Laser micro-machined semi-slinky like MEMS structures: Novel interface coolers

    Science.gov (United States)

    Çelen, Serap

    2012-10-01

    Laser micro-machining has recently been considered a precision and reproducible manufacturing technique in MEMS fabrication because of the superior characteristics of a focused laser beam. It is not only a unique tool but also an invisible optical drill. The aim of the present paper is two-fold: to manufacture novel miniaturized titanium 3D MEMS surface structures in order to increase the cooling performance. Second is to find the behaviors of the operational parameters which controlling the laser-material interaction mechanisms and also suggest the best adjustments in order to achieve this novel semi-slinky like spiral MEMS surface structures with using a 20 W ytterbium fiber laser. Pure titanium micro-MEMS product which has novel interface coolers was manufactured using a ytterbium fiber laser (λ=1060 nm) with 40 ns pulse duration. Best adjustments were, respectively, the pulse duration: 40 ns, the pulse energy: 0.4 mJ, the laser scanning speed: 336.1 mm/s, the peak power density: 17.46 * 108 W/cm2.

  16. Micro-machining of silicon wafer in air and under water

    Science.gov (United States)

    Wee, L. M.; Ng, E. Y. K.; Prathama, A. H.; Zheng, H.

    2011-02-01

    Laser ablation micro-machining tests are conducted on silicon wafer, both in air and under flowing water stream, with the use of 355 nm-X AVIA laser. Effects of laser pulse frequency, power level, scan velocity and focal plane position on the associated laser spatter deposition (in air), irradiated areas (under flowing water film) and taper are investigated. It shows that low frequency, i.e. 30-40 kHz, and high peak power result in smaller spatter and irradiated areas, and the hole taper decreases with increase in pulse frequency. Increase in the laser fluence broadens both the areas and increases the hole taper. Both areas enlarge with the increase of scanning velocity of more than 3 mm s -1. The scan velocity has no effect on hole taper in air environment but inconsistent hole taper is obtained under flowing water stream. Furthermore, moving the focal plane position below the workpiece surface contributes relatively smaller areas of spatter deposition, irradiation and taper in comparison to zero focal plane position. Finally, the differences between laser ablation in air and under water are identified. The reduction in the spatter deposition and irradiated areas around the perimeter of the ablated hole and a smaller taper with the use of laser trepan drilling method in air and under water machining are investigated in this paper.

  17. Sub-Millimeter-Wave 10 dB Directional Coupler Based on Micromachining Technique

    Directory of Open Access Journals (Sweden)

    Shuang Liu

    2015-01-01

    Full Text Available A waveguide 10 dB directional coupler operating from 325 GHz to 400 GHz is designed based on the short-slot Riblet-type coupling configuration and fabricated using the deep reactive ion etching (DRIE silicon micromachining technique. The skin depth and the conductivity of the gold film with the roughness of 0.2 μm are investigated at 300~1000 GHz frequency band for the higher accuracy. In order to measure the small-size four-port coupler using the two-port VNA with big-size flanges, three testing topologies are designed, in which the terahertz (THz wedged-type absorbing material terminals are adopted as the waveguide matching loads. The measured average insertion loss is 0.5 dB after deducting the intrinsic loss and the measured average isolation is better than 25 dB, which are in good agreement with simulations. The analysis and the design are verified to be accurate and valuable for the high-performance sub-millimeter-wave waveguide components.

  18. Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining

    Science.gov (United States)

    Oh, Sharon Roslyn; Yao, Kui; Eng Hock Tay, Francis

    2013-09-01

    A wafer-level microfabrication process using standard cleanroom facilities was established and implemented to batch produce free-standing poly(vinylidine fluoride-trifluoroethylene) (P(VDF-TrFE)) piezoelectric microelectromechanical systems cantilevers via surface micromachining. Furthermore, the fabrication of a prototype of double-level cantilevers was demonstrated. The fabrication of working piezoelectric polymer cantilever structures required the deposition and patterning of multiple polymer and metal layers including the pattering and removal of the sacrificial layer, which posed many challenging limitations on the chemicals and processing conditions. Dedicatedly selected chemicals and materials were used in our fabrication, including water soluble PVA with an appropriate molecular weight and degree of hydrolysis as the sacrificial layer for releasing the cantilever structure. The temperature in the whole process was kept low with controlled durations, due to the sensitivity of the polymers to thermal impacts. The P(VDF-TrFE) active layers, after going through the fabrication, exhibited ferroelectric and piezoelectric properties comparable to the intact films. Furthermore, the free-standing P(VDF-TrFE) cantilevers exhibited piezoelectric vibrations under electrical excitation. This low temperature fabrication method, which only involves mild chemicals, also has the potential to be integrated with CMOS processes.

  19. Dynamic Analysis of Micro-machined Diamagnetic Stable Permanent Magnet Levitation System

    Institute of Scientific and Technical Information of China (English)

    2007-01-01

    A novel micro-machined diamagnetic stable-levitation system (MDSLS) which is composed of a free permanent magnetic rotor, a ring lifting permanent magnet and two diamagnetic stabilizers was presented. The static and dynamic stable characters of MDSLS were analyzed. The coupled non-linear differential equations were used to describe six-degree-of-freedom motion of the levitated rotor, and the equivalent surface current and combined diamagnetic image current method were utilized to model the interaction forces and torques between the lifting permanent magnet and rotor permanent magnet and also between the rotor permanent magnet and diamagnetic substrates. Because of difficulty to get analytical solution, the numerical calculation based on Runge-Kutta method was used to solve the dynamic model. The vibration frequencies were identified by fast Fourier transform (FFT) analysis. According to their resonance characteristics and parameters, the translational and angular dynamic stiffness were also calculated. The results show that the levitation of the rotor in MDSLS is stable, and the MDSLS is potential for the application in levitation inertial sensor.

  20. Nonlinearity analysis of piezoelectric micromachined ultrasonic transducers based on couple stress theory

    Institute of Scientific and Technical Information of China (English)

    Xin Kang; Fu-Jun Yang; Xiao-Yuan He

    2012-01-01

    This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer (PMUT) actuated by a strong external electric field.The transducer membrane consists of a piezoelectric layer,a passive layer and two electrode layers.The nonlinearities of the piezoelectric layer caused by electrostriction under a strong electric field are analyzed. Because the thickness of the transducer membrane is on the microscale,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the optimal ratio of the top electrode diameter and the membrane diameter is around 0.674.It is also found that this optimal value does not depend on any other parameters if the thicknesses of the two electrodes are negligible compared with those of the piezoelectric and passive layers.In addition,the nonlinearities of the piezoelectric layer will become stronger along with the increase of the electric field,which means that softening of the membrane stiffness occurs when a strong external electric field is applied.Meanwhile,the optimal thickness ratio for the passive layer and the piezoelectric layer is not equal to 1.0 which is usually adopted by previous researchers.Because there exists size dependence of membrane deformation,the optimal value of this thickness ratio needs to be greater than 1.0 on the microscale.

  1. Single crystal piezoelectric composites for advanced NDT ultrasound

    Science.gov (United States)

    Jiang, Xiaoning; Snook, Kevin; Hackenberger, Wesley S.; Geng, Xuecang

    2007-04-01

    In this paper, the design, fabrication and characterization of PMN-PT single crystal/epoxy composites are reported for NDT ultrasound transducers. Specifically, 1-3 PMN-PT/epoxy composites with center frequencies of 5 MHz - 40 MHz were designed and fabricated using either the dice-and-fill method or a photolithography based micromachining process. The measured electromechanical coefficients for composites with frequency of 5 MHz - 15 MHz were about 0.78-0.83, and the coupling coefficients for composites with frequencies of 25 MHz- 40 MHz were about 0.71-0.72. The dielectric loss remains low (advanced NDT ultrasound applications.

  2. Annual meeting of the Advanced Light Source Users` Association

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1995-02-01

    This report contains papers on the following topics: ALS Director`s Report; ALS Operations Update; Recent Results in Machine Physics; Progress in Beamline Commissioning and Overview of New Projects; The ALS Scientific Program; First Results from the SpectroMicroscopy Beamline; Soft X-ray Fluorescence Spectroscopy of Solids; Soft X-Ray Fluorescence Spectroscopy of Molecules; Microstructures and Micromachining at the ALS; High-Resolution Photoemission from Simple Atoms and Molecules; X-Ray Diffraction at the ALS; Utilizing Synchrotron Radiation in Advanced Materials Industries; Polymer Microscopy: About Balls, Rocks and Other ``Stuff``; Infrared Research and Applications; and ALS User Program.

  3. Annual meeting of the Advanced Light Source Users' Association

    International Nuclear Information System (INIS)

    This report contains papers on the following topics: ALS Director's Report; ALS Operations Update; Recent Results in Machine Physics; Progress in Beamline Commissioning and Overview of New Projects; The ALS Scientific Program; First Results from the SpectroMicroscopy Beamline; Soft X-ray Fluorescence Spectroscopy of Solids; Soft X-Ray Fluorescence Spectroscopy of Molecules; Microstructures and Micromachining at the ALS; High-Resolution Photoemission from Simple Atoms and Molecules; X-Ray Diffraction at the ALS; Utilizing Synchrotron Radiation in Advanced Materials Industries; Polymer Microscopy: About Balls, Rocks and Other ''Stuff''; Infrared Research and Applications; and ALS User Program

  4. Micromachined nanocalorimetric sensor for ultra-low-volume cell-based assays.

    Science.gov (United States)

    Johannessen, Erik A; Weaver, John M R; Bourova, Lenka; Svoboda, Petr; Cobbold, Peter H; Cooper, Jonathan M

    2002-05-01

    Current strategies for cell-based screening generally focus on the development of highly specific assays, which require an understanding of the nature of the signaling molecules and cellular pathways involved. In contrast, changes in temperature of cells provides a measure of altered cellular metabolism that is not stimulus specific and hence could have widespread applications in cell-based screening of receptor agonists and antagonists, as well as in the assessment of toxicity of new lead compounds. Consequently, we have developed a micromachined nanocalorimetric biological sensor using a small number of isolated living cells integrated within a subnanoliter format, which is capable of detecting 13 nW of generated power from the cells, upon exposure to a chemical or pharmaceutical stimulus. The sensor comprises a 10-junction gold and nickel thermopile, integrated on a silicon chip which was back-etched to span a 800-nm-thick membrane of silicon nitride. The thin-film membrane, which supported the sensing junctions of the thermoelectric transducer, gave the system a temperature resolution of 0.125 mK, a low heat capacity of 1.2 nJ mK(-1), and a rapid (unfiltered) response time of 12 ms. The application of the system in ultra-low-volume cell-based assays could provide a rapid endogenous screen. It offers important additional advantages over existing methods in that it is generic in nature, it does not require the use of recombinant cell lines or of detailed assay development, and finally, it can enable the use of primary cell lines or tissue biopsies. PMID:12033326

  5. Novel in situ mechanical testers to enable integrated metal surface micro-machines.

    Energy Technology Data Exchange (ETDEWEB)

    Follstaedt, David Martin; de Boer, Maarten Pieter; Kotula, Paul Gabriel; Hearne, Sean Joseph; Foiles, Stephen Martin; Buchheit, Thomas Edward; Dyck, Christopher William

    2005-10-01

    The ability to integrate metal and semiconductor micro-systems to perform highly complex functions, such as RF-MEMS, will depend on developing freestanding metal structures that offer improved conductivity, reflectivity, and mechanical properties. Three issues have prevented the proliferation of these systems: (1) warpage of active components due to through-thickness stress gradients, (2) limited component lifetimes due to fatigue, and (3) low yield strength. To address these issues, we focus on developing and implementing techniques to enable the direct study of the stress and microstructural evolution during electrodeposition and mechanical loading. The study of stress during electrodeposition of metal thin films is being accomplished by integrating a multi-beam optical stress sensor into an electrodeposition chamber. By coupling the in-situ stress information with ex-situ microstructural analysis, a scientific understanding of the sources of stress during electrodeposition will be obtained. These results are providing a foundation upon which to develop a stress-gradient-free thin film directly applicable to the production of freestanding metal structures. The issues of fatigue and yield strength are being addressed by developing novel surface micromachined tensile and bend testers, by interferometry, and by TEM analysis. The MEMS tensile tester has a ''Bosch'' etched hole to allow for direct viewing of the microstructure in a TEM before, during, and after loading. This approach allows for the quantitative measurements of stress-strain relations while imaging dislocation motion, and determination of fracture nucleation in samples with well-known fatigue/strain histories. This technique facilitates the determination of the limits for classical deformation mechanisms and helps to formulate a new understanding of the mechanical response as the grain sizes are refined to a nanometer scale. Together, these studies will result in a science

  6. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Directory of Open Access Journals (Sweden)

    Zhikang Li

    2015-12-01

    Full Text Available Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  7. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  8. Solder self-assembled, surface micromachined MEMS for micromirror applications and atom trapping

    Science.gov (United States)

    McCarthy, Brian

    Solder self-assembly can be used to expand the versatility of a commercial foundry, like MEMSCAP's PolyMUMPs process. These foundries are attractive for prototyping MEMS as they can offer consistent, low cost fabrication runs by sticking to a single process and integrating multiple customers on each wafer. However, this standardization limits the utility of the process for a given application. Solder self-assembly gives back some of this versatility and expands the envelope of surface micromachining capability in the form of a simple post-process step. Here it is used to create novel micromirrors and micromirror arrays as well as to delve into the field of ultracold atom optics where the utility of MEMS as an enabling technology for atom control is explored. Two types of torsional, electrostatic micromirrors are demonstrated, both of which can achieve +/-10° of rotation. The first is a novel out-of-plane micromirror that can be rotated to a desired angle from the substrate. This integrated, on-chip assembly allows much simpler packaging technology to be used for devices that require a laser beam to be steered off-chip. Planar micromirror arrays that use solder self-assembly to tailor the electrode gap height are also demonstrated. With these designs, no special fabrication techniques are required to achieve large gap heights, and micromirrors with a variety of gap heights can even be fabricated on the same chip. Finally, solder self-assembly is used to explore how complex micro-scale structures can be used to control ultracold atoms. For this study, a MEMS version of a magneto-optical trap, the basis for most ultracold atomic systems, is used to control Rb atoms. In doing so, it provides a path for the successful integration of a number of MEMS devices in these types of systems.

  9. Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers.

    Science.gov (United States)

    Liu, Changgeng; Djuth, Frank T; Zhou, Qifa; Shung, K Kirk

    2013-12-01

    Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and assembling an electronic interconnection board for transmission and reception from the array. To establish the feasibility of the process flow, a hybrid test ultrasound array transducer consisting of a 2-D array having an 8 × 8 element pattern and a 5-element annular array was designed, fabricated, and assessed. The arrays are designed for a center frequency of ~60 MHz. The 2-D array elements are 105 × 105 μm in size with 5-μm kerfs between elements. The annular array surrounds the square 2-D array and provides the option of transmitting from the annular array and receiving with the 2-D array. Each annular array element has an area of 0.71 mm(2) with a 16-μm kerf between elements. The active piezoelectric material is (1 - x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT)/epoxy 1-3 composite with a PMN-PT pillar lateral dimension of 8 μm and an average gap width of ~4 μm, which was produced by deep reactive ion etching (DRIE) dry etching techniques. A novel electric interconnection strategy for high-density, small-size array elements was proposed. After assembly, the array transducer was tested and characterized. The capacitance, pulse-echo responses, and crosstalk were measured for each array element. The desired center frequency of ~60 MHz was achieved and the -6-dB bandwidth of the received signal was ~50%. At the center frequency, the crosstalk between adjacent 2-D array elements was about -33 dB. The techniques described herein can be used to build larger arrays containing smaller elements. PMID:24297027

  10. Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils

    Directory of Open Access Journals (Sweden)

    Zhiqiu Lu

    2014-12-01

    Full Text Available We present a comprehensive experimental investigation of a micromachined inductive suspension (MIS based on 3D wire-bonded microcoils. A theoretical model has been developed to predict the levitation height of the disc-shaped proof mass (PM, which has good agreement with the experimental results. The 3D MIS consists of two coaxial wire-bonded coils, the inner coil being used for levitation, while the outer coil for the stabilization of the PM. The levitation behavior is mapped with respect to the input parameters of the excitation currents applied to the levitation and stabilization coil, respectively: amplitude and frequency. At the same time, the levitation is investigated with respect to various thickness values (12.5 to 50 μm and two materials (Al and Cu of the proof mass. An important characteristic of an MIS, which determines its suitability for various applications, such as, e.g., micro-motors, is the dynamics in the lateral direction. We experimentally study the lateral stabilization force acting on the PM as a function of the linear displacement. The analysis of this dependency allows us to define a transition between stable and unstable levitation behavior. From an energetic point of view, this transition corresponds to the local maximum of the MIS potential energy. 2D simulations of the potential energy help us predict the location of this maximum, which is proven to be in good agreement with the experiment. Additionally, we map the temperature distribution for the coils, as well as for the PM levitated at 120 μm, which confirms the significant reduction of the heat dissipation in the MIS based on 3D microcoils compared to the planar topology.

  11. Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

    Directory of Open Access Journals (Sweden)

    Yonggang Yin

    2016-05-01

    Full Text Available A micromachined electrostatically-suspended accelerometer (MESA is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM. It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degrees of freedom (DoFs. By analyzing the coupling electrostatic forces and torques between three lateral axes, it is found there exists a self-locking zone due to the cross-axis coupling effect. To minimize the cross-axis coupling and solve the initial levitation problem, this paper proposes an effective control scheme by delaying the operation of one lateral actuator. The experimental result demonstrates that the PM can be levitated up with six-DoF suspension operation at any initial position. We also propose a feed-forward compensation approach to minimize the negative stiffness effect inherent in electrostatic suspension. The experiment results demonstrate that a more broadband linear amplitude-frequency response and higher suspension stiffness can be achieved, which is crucial to maintain high vector fidelity for potential use as a three-component MEMS geophone. The preliminary performance tests of the three-axis linear accelerometer were conducted under normal atmospheric pressure and room temperature. The main results and noise analysis are presented. It is shown that vacuum packaging of the MEMS sensor is essential to extend the bandwidth and lower the noise floor, especially for low-noise seismic data acquisition.

  12. Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer.

    Science.gov (United States)

    Yin, Yonggang; Sun, Boqian; Han, Fengtian

    2016-01-01

    A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degrees of freedom (DoFs). By analyzing the coupling electrostatic forces and torques between three lateral axes, it is found there exists a self-locking zone due to the cross-axis coupling effect. To minimize the cross-axis coupling and solve the initial levitation problem, this paper proposes an effective control scheme by delaying the operation of one lateral actuator. The experimental result demonstrates that the PM can be levitated up with six-DoF suspension operation at any initial position. We also propose a feed-forward compensation approach to minimize the negative stiffness effect inherent in electrostatic suspension. The experiment results demonstrate that a more broadband linear amplitude-frequency response and higher suspension stiffness can be achieved, which is crucial to maintain high vector fidelity for potential use as a three-component MEMS geophone. The preliminary performance tests of the three-axis linear accelerometer were conducted under normal atmospheric pressure and room temperature. The main results and noise analysis are presented. It is shown that vacuum packaging of the MEMS sensor is essential to extend the bandwidth and lower the noise floor, especially for low-noise seismic data acquisition. PMID:27213376

  13. A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays for cell isolation

    Science.gov (United States)

    Dong, Tao; Su, Qianhua; Yang, Zhaochu; Zhang, Yulong; Egeland, Eirik B.; Gu, Dan D.; Calabrese, Paolo; Kapiris, Matteo J.; Karlsen, Frank; Minh, Nhut T.; Wang, K.; Jakobsen, Henrik

    2010-11-01

    A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays has been developed and demonstrated, which can merely employ one independent lab-on-chip to realize cell isolation. The simulation, design, microfabrication and test for the new electromagnetic micro separator were executed. The simulation results of the electromagnetic field in the separator show that special soft magnetic micro-pillar arrays can amplify and redistribute the electromagnetic field generated by the micro-coils. The separator can be equipped with a strong magnetic field to isolate the target cells with a considerably low input current. The micro separator was fabricated by micro-processing technology. An electroplating bath was hired to deposit NiCo/NiFe to fabricate the micro-pillar arrays. An experimental system was set up to verify the function of the micro separator by isolating the lymphocytes, in which the human whole blood mixed with Dynabeads® FlowComp Flexi and monoclonal antibody MHCD2704 was used as the sample. The results show that the electromagnetic micro separator with an extremely low input current can recognize and capture the target lymphocytes with a high efficiency, the separation ratio reaching more than 90% at a lower flow rate. For the electromagnetic micro separator, there is no external magnetizing field required, and there is no extra cooling system because there is less Joule heat generated due to the lower current. The magnetic separator is totally reusable, and it can be used to separate cells or proteins with common antigens.

  14. Micromachined Si channel width and tortuosity on human osteoblast cell attachment and proliferation

    International Nuclear Information System (INIS)

    In this study, influence of coating chemistry, channel width and tortuosity of various two-dimensional micro-channels were explored on micromachined Si using osteoblast precursor cells line 1 (OPC1). The rationale for our study is to delineate the influence of different porosity parameters on bone cell attachment and proliferation in vitro. Channel widths of 100, 200, 300, 400, and 600 μm; channel bends of 0, 1, and 2 right angles; and gold and silicon dioxide coatings on single-crystal Si were studied. Experiments were conducted with channel tops under glass covered and uncovered conditions keeping the channel depth at 220 μm. Independent samples were evaluated using SEM imaging and MTT assay to measure bone cell morphology and quantity. Images were taken of micro-channels and exterior chambers at 50x, 500x, 1000x, and 5000x magnifications. Channel and chamber cell densities were scored as follows: bare (score = 0), scattered (1), limited (2), abundant (3), and overflowing (4). Samples were then scored and statistically analyzed for major differences. In general, OPC1 cells proliferated at least 5% or better based on cell numbers under uncovered conditions than glass covered. Channel widths of 100 μm largely prohibited cell proliferation and diffusion by narrow path inhibition with the lowest average score of 1.17. Among channel bends of 0, 1, and 2 right angles, an increase in micro-channel tortuosity from 0-2 bends amplified OPC1 cell growth upwards of ∼ 6.6%. A one-way ANOVA showed significant differences in cell quantity for alternating channel tortuosity at a significance level of p < 0.05. No preference was found for gold or silicon dioxide coatings on Si for bone cell proliferation.

  15. Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

    International Nuclear Information System (INIS)

    Proton beam writing is a direct-write technique and a promising method for the micromachining of commodity plastics such as acrylic resins. Herein, we describe the fabrication of microscopic devices made from a relatively thick (∼75 μm) acrylic sheet using proton beam writing. In addition, a software package that converts image pixels into coordinates data was developed, and the successful fabrication of a very fine jigsaw puzzle was achieved. The size of the jigsaw puzzle pieces was 50 × 50 μm. For practical use, a prototype of a line and space test-chart was also successfully fabricated for the determination of spatial resolution in neutron radiography

  16. Integration of an optical fiber taper with an optical microresonator fabricated in glass by femtosecond laser 3D micromachining

    CERN Document Server

    Song, Jiangxin; Tang, Jialei; Qiao, Lingling; Cheng, Ya

    2014-01-01

    We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber taper to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in air.

  17. Precision large field scanning system for high numerical aperture lenses and application to femtosecond micromachining of ophthalmic materials

    Science.gov (United States)

    Brooks, D. R.; Brown, N. S.; Savage, D. E.; Wang, C.; Knox, W. H.; Ellis, J. D.

    2014-06-01

    A precision, large stroke (nearly 1 cm) scanning system was designed, built, and calibrated for micromachining of ophthalmic materials including hydrogels and cornea (excised and in vivo). This system comprises a flexure stage with an attached objective on stacked vertical and horizontal translation stages. This paper outlines the design process leading to our most current version including the specifications that were used in the design and the drawbacks of other methods that were previously used. Initial measurements of the current version are also given. The current flexure was measured to have a 27 Hz natural frequency with no load.

  18. Relating hearing loss and executive functions to hearing aid users’ preference for, and speech recognition with, different combinations of binaural noise reduction and microphone directionality

    Directory of Open Access Journals (Sweden)

    Tobias eNeher

    2014-12-01

    Full Text Available Knowledge of how executive functions relate to preferred hearing aid (HA processing is sparse and seemingly inconsistent with related knowledge for speech recognition outcomes. This study thus aimed to find out if (1 performance on a measure of reading span (RS is related to preferred binaural noise reduction (NR strength, (2 similar relations exist for two different, nonverbal measures of executive function, (3 pure-tone average hearing loss (PTA, signal-to-noise ratio (SNR, and microphone directionality (DIR also influence preferred NR strength, and (4 preference and speech recognition outcomes are similar. Sixty elderly HA users took part. Six HA conditions consisting of omnidirectional or cardioid microphones followed by inactive, moderate, or strong binaural NR as well as linear amplification were tested. Outcome was assessed at fixed SNRs using headphone simulations of a frontal target talker in a busy cafeteria. Analyses showed positive effects of active NR and DIR on preference, and negative and positive effects of, respectively, strong NR and DIR on speech recognition. Also, while moderate NR was the most preferred NR setting overall, preference for strong NR increased with SNR. No relation between RS and preference was found. However, larger PTA was related to weaker preference for inactive NR and stronger preference for strong NR for both microphone modes. Equivalent (but weaker relations between worse performance on one nonverbal measure of executive function and the HA conditions without DIR were found. For speech recognition, there were relations between HA condition, PTA, and RS, but their pattern differed from that for preference. Altogether, these results indicate that, while moderate NR works well in general, a notable proportion of HA users prefer stronger NR. Furthermore, PTA and executive functions can account for some of the variability in preference for, and speech recognition with, different binaural NR and DIR settings.

  19. 浅谈人声录制中传声器的运用技巧%Application Skills of the Human Voice Recording Microphone

    Institute of Scientific and Technical Information of China (English)

    蒋将

    2012-01-01

    With the development of recording technology disciplines into the lives of ordinary people.The recording is a very complex task,but also an art.Want to become an outstanding sound engineer,not only to use electronic equipment is more important is to have the basis of a certain theory of technology and the ability to distinguish sounds to do technical support.The recording of the human voice is a very important part in the recording work,talk about vocal recording in this article from the microphone select the debugging of the microphone,microphone positioning techniques,with a view to the reader a more thorough,deeper understanding and grasp of the human voice recording skills.%随着时代的发展,录音技术学科也逐渐走进了老百姓的生活。录音是一项非常复杂的工作,同时也是一门艺术。想要成为一名优秀的录音师,不仅要会使用一些相关的电子设备,更重要的是要有一定的理论技术基础和对声音的辨别能力来做技术支撑。人声录制是录音工作中非常重要的一部分,本文将从传声器选择、传声器的调试、传声器的摆位等方面谈谈人声录制的技巧,以期读者更透彻,更深刻地理解和把握人声录制的技巧。

  20. 二维DOA估计中麦克风阵列优化设计%Microphone array optimization design for two-dimensional DOA estimation

    Institute of Scientific and Technical Information of China (English)

    王冬霞; 齐畅; 周城旭; 牛芳琳

    2015-01-01

    在DOA估计中,往往事先假设麦克风阵列的结构,然后通过改进DOA估计方法来提高定位精度,忽视了麦克风的摆放位置对 DOA 估计性能的影响。基于此,针对二维 DOA 估计,提出改进遗传优化算法,将空时滤波器系数和麦克风阵列结构分开,构造由二维 MUSIC空间谱函数欧式距离和优化后阵元个数共为变量的适应度函数,以 DOA 估计精度为停止条件,对均匀矩形阵、均匀圆形阵和均匀同心圆阵开展优化设计。仿真结果表明,采用所提方法优化后的阵列取得了较好的DOA估计性能。%The studies usually focus on how to give an effective method to improve position accuracy with the known-microphone array configurations for the DOA estimation.However,the position of the microphone influences the overall performance of DOA estimation. An improved genetic optimization algorithm is thus proposed for two-dimensional DOA estimation.Its fitness function consists of the Euclidean distance of the 2-D MUSIC spatial spectrum function and microphone numbers after optimization,which separates the space-time filter coefficients from microphone array configuration.And DOA estimation precision is adopted as stop condition of genetic algorithm. Uniform rectangular array,uniform circular array and uniform concentric circular array are used to carry out optimization design. The simulation results show that effective DOA estimation performances are obtained after optimization with the proposed method.

  1. A bulk micromachined lead zinconate titanate cantilever energy harvester with inter-digital IrO(x) electrodes.

    Science.gov (United States)

    Park, Jongcheol; Park, Jae Yeong

    2013-10-01

    A piezoelectric vibration energy harvester with inter-digital IrO(x) electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800 x 1000 x 20 microm3, which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr52, Ti48)O3 thin film, and sputtered inter-digitally shaped IrO(x) electrodes, and silicon inertial mass with 1000 x 1000 x 500 microm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 microW of electrical power to 470 komega of load resistance and 1.4 V(peak-to-peak) from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW x cm(-3) x g(-2). As expected, its electrical failure was significantly improved.

  2. The influence of ArF excimer laser micromachining on physicochemical properties of bioresorbable poly(L-lactide)

    Science.gov (United States)

    Stepak, Bogusz D.; Antończak, Arkadiusz J.; Szustakiewicz, Konrad; Pezowicz, Celina; Abramski, Krzysztof M.

    2016-03-01

    The main advantage of laser processing is a non-contact character of material removal and high precision attainable thanks to low laser beam dimensions. This technique enables forming a complex, submillimeter geometrical shapes such as vascular stents which cannot be manufactured using traditional techniques e.g. injection moulding or mechanical treatment. In the domain of nanosecond laser sources, an ArF excimer laser appears as a good candidate for laser micromachining of bioresorbable polymers such as poly(L-lactide). Due to long pulse duration, however, there is a risk of heat diffusion and accumulation in the material. In addition, due to short wavelength (193 nm) photochemical process can modify the chemical composition of ablated surfaces. The motivation for this research was to evaluate the influence of laser micromachining on physicochemical properties of poly(L-lactide). We performed calorimetric analysis of laser machined samples by using differential scanning calorimetry (DSC). It allowed us to find the optimal process parameters for heat affected zone (HAZ) reduction. The chemical composition of the ablated surface was investigated by FTIR in attenuated total reflectance (ATR) mode.

  3. Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect.

    Science.gov (United States)

    Guan, Yanwei; Gao, Shiqiao; Liu, Haipeng; Jin, Lei; Zhang, Yaping

    2016-01-01

    In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor. PMID:27455272

  4. Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

    Science.gov (United States)

    Guan, Yanwei; Gao, Shiqiao; Liu, Haipeng; Jin, Lei; Zhang, Yaping

    2016-01-01

    In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor. PMID:27455272

  5. Surface Damage Growth Mitigation on KDP/DKDP Optics Using Single-Crystal Diamond Micro-Machining

    International Nuclear Information System (INIS)

    A process whereby laser-initiated surface damage on KDP/DKDP optics is removed by spot micro-machining using a high-speed drill and a single-crystal diamond bit, is shown to mitigate damage growth for subsequent laser shots. Our tests show that machined dimples on both surfaces of an AR coated doubler (KDP) crystal are stable, for 526nm, ∼ 3.2ns pulses at ∼ 12J/cm2 fluences. Other tests also confirmed that the machined dimples on both surfaces of an AR coated tripler (DKDP) crystal are stable, for 351nm, ∼ 3ns pulses at ∼ 8J/cm2. We have demonstrated successful mitigation of laser-initiated surface damage sites as large as 0.14mm diameter on DKDP, for up to 1000 shots at 351nm, 13J/cm2, ∼ 11ns pulse length, and up to 10 shots at 351nm, 8J/cm2, 3ns. Details of the method are presented, including estimates for the heat generated during micro-machining and a plan to implement this method to treat pre-initiated or retrieved-from-service, large-scale optics for use in high-peak-power laser applications

  6. Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining.

    Science.gov (United States)

    Song, Jiangxin; Lin, Jintian; Tang, Jialei; Liao, Yang; He, Fei; Wang, Zhaohui; Qiao, Lingling; Sugioka, Koji; Cheng, Ya

    2014-06-16

    We report on fabrication of a microtoroid resonator of a high-quality factor (i.e., Q-factor of ~3.24 × 10(6) measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21 × 10(5) as measured in air, which should still be sufficient for many sensing applications. We test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. It is shown that a detection limit of ~1.2 × 10(-4) refractive index unit can be achieved. Our result showcases the capability of integration of high-Q microresonators with complex microfluidic systems using femtosecond laser 3D micromachining. PMID:24977574

  7. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    International Nuclear Information System (INIS)

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter ∼10 μm in a relatively stiff material of insect's exocuticle (E = ∼109 Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating-hole-features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, through-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membrane in-recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor

  8. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    Science.gov (United States)

    Wicaksono, D. H. B.; Zhang, L.-J.; Pandraud, G.; French, P. J.; Vincent, J. F. V.

    2006-04-01

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter ~10 µm in a relatively stiff material of insect's exocuticle (E = ~109 Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating- hole- features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, thorugh-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membranein- recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

  9. A bulk micromachined lead zinconate titanate cantilever energy harvester with inter-digital IrO(x) electrodes.

    Science.gov (United States)

    Park, Jongcheol; Park, Jae Yeong

    2013-10-01

    A piezoelectric vibration energy harvester with inter-digital IrO(x) electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800 x 1000 x 20 microm3, which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr52, Ti48)O3 thin film, and sputtered inter-digitally shaped IrO(x) electrodes, and silicon inertial mass with 1000 x 1000 x 500 microm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 microW of electrical power to 470 komega of load resistance and 1.4 V(peak-to-peak) from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW x cm(-3) x g(-2). As expected, its electrical failure was significantly improved. PMID:24245226

  10. Final report of supplementary comparison AFRIMETS.AUV.A-S1: primary pressure calibration of LS2aP microphones according to IEC 61094-2, over the frequency range 1 Hz to 31.5 kHz.

    Science.gov (United States)

    Nel, R.; Barrera-Figueroa, S.; Dobrowolska, D.; Defilippo Soares, Z. M.; Maina, A. K.; Hof, C.

    2016-01-01

    This is the final report of the AFRIMETS.AUV-S1 comparison of the pressure sensitivity, modulus and phase, of LS2aP microphones in the frequency range 1 Hz to 31.5 kHz in accordance with IEC 61094-2. Six national metrology institutes from three different regional metrology organisations participated in the comparison for which two LS2aP microphones were circulated simultaneously to all the participants in a hybrid-star configuration. The comparison reference values were calculated as the weighted mean for modulus and phase for each individual microphone. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCAUV, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

  11. Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: capability and limitations.

    Science.gov (United States)

    Liu, Jessica; Oakley, Clyde; Shandas, Robin

    2009-12-01

    The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design

  12. Report on key comparison COOMET.AUV.A-K5: pressure calibration of laboratory standard microphones in the frequency range 2 Hz to 10 kHz

    Science.gov (United States)

    Dobrowolska, D.; Kosterov, A.

    2016-01-01

    This is the final report for regional key comparison COOMET.AUV.A-K5 on the pressure calibration of laboratory standard microphones in the frequency range from 2 Hz to 10 kHz. Two laboratories—Central Office of Measures (GUM)—the national metrology institute for Poland and the State Enterprise Scientific-Research Institute for Metrology of Measurement and Control Systems (DP NDI Systema)— the designated institute for acoustics in Ukraine took part in this comparison with the GUM as a pilot. One travelling type LS1P microphone was circulated to the participants and results in the form of regular calibration certificates were collected. The results of the DP NDI Systema obtained in this comparison were linked to the CCAUV.A-K5 key comparison through the joint participation of the GUM. The degrees of equivalence were computed for DP NDI Systema with respect to the CCAUV.A-K5 key comparison reference value. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCAUV, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

  13. 基于麦克风阵列和虚拟仪器的声源定位%Speech source localization based on microphone arrays and labview

    Institute of Scientific and Technical Information of China (English)

    冯道宁; 王浩

    2012-01-01

    对基于麦克风阵列的声源定位技术进行了研究,分析了时延估计算法的构成方法,在此基础上提出了用于二维DOA估计的双曲线算法.利用传声器MPA416和数据采集卡PXI4472结合Labview虚拟仪器实现了对声源的二维DOA估计.实验证明,该系统定位实时性好、准确度高.%The speech source localization technology based on microphone array has been researched. The constructive method of the time delay estimation algorithm has been studied. On this basis, the hyperbola algorithm for the 2-d DOA estimation is proposed, realizing 2-d DOA estimation of the speech source localization using microphones MPA416 and data acquisition card PXI4472 combining virtual instrument of NI company. Experimental results show that this system has low complexity and high accuracy.

  14. CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems

    DEFF Research Database (Denmark)

    Klank, Henning; Kutter, Jörg Peter; Geschke, Oliver

    2002-01-01

    for microstructured PMMA [poly( methyl methacrylate)] parts were investigated, such as solvent-assisted glueing, melting, laminating and surface activation using a plasma asher. A solvent-assisted thermal bonding method proved to be the most time-efficient one. Using laser micromachining together with bonding......In this article, we focus on the enormous potential of a CO2-laser system for rapidly producing polymer microfluidic structures. The dependence was assessed of the depth and width of laser-cut channels on the laser beam power and on the number of passes of the beam along the same channel....... In the experiments the laser beam power was varied between 0 and 40 W and the passes were varied in the range of 1 to 7 times. Typical channel depths were between 100 and 300 m m, while the channels were typically 250 m m wide. The narrowest produced channel was 85 m m wide. Several bonding methods...

  15. High energy green nanosecond and picosecond pulse delivery through a negative curvature fiber for precision micro-machining.

    Science.gov (United States)

    Jaworski, Piotr; Yu, Fei; Carter, Richard M; Knight, Jonathan C; Shephard, Jonathan D; Hand, Duncan P

    2015-04-01

    In this paper we present an anti-resonant guiding, low-loss Negative Curvature Fiber (NCF) for the efficient delivery of high energy short (ns) and ultrashort (ps) pulsed laser light in the green spectral region. The fabricated NCF has an attenuation of 0.15 dB/m and 0.18 dB/m at 532 nm and 515 nm respectively, and provided robust transmission of nanosecond and picosecond pulses with energies of 0.57 mJ (10.4 kW peak power) and 30 µJ (5 MW peak power) respectively. It provides single-mode, stable (low bend-sensitivity) output and maintains spectral and temporal properties of the source laser beam. The practical application of fiber-delivered pulses has been demonstrated in precision micro-machining and marking of metals and glass.

  16. Electrochemical micromachining of micro-dimple arrays on cylindrical inner surfaces using a dry-film photoresist

    Institute of Scientific and Technical Information of China (English)

    Qu Ningsong; Chen Xiaolei; Li Hansong; Zeng Yongbin

    2014-01-01

    The application of surface textures has been employed to improve the tribological per-formance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its poten-tial low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.

  17. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Peng, J.; Lau, S.T.; Chao, C.; Dai, J.Y.; Chan, H.L.W. [The Hong Kong Polytechnic University, Department of Applied Physics and Materials Research Center, Hong Kong (China); Luo, H.S. [Chinese Academy of Sciences, The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Shanghai (China); Zhu, B.P.; Zhou, Q.F.; Shung, K.K. [University of Southern California, Department of Biomedical Engineering and NIH Transducer Resource Center, Los Angeles, CA (United States)

    2010-01-15

    In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k{sub t}) and high piezoelectric constant (d{sub 33}) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency. (orig.)

  18. New Effective Material Couple--Oxide Ceramic and Carbon Nanotube-- Developed for Aerospace Microsystem and Micromachine Technologies

    Science.gov (United States)

    Miyoshi, Kazuhisa; VanderWal, Randall L.; Tomasek, Aaron J.; Sayir, Ali; Farmer, Serene C.

    2004-01-01

    The prime driving force for using microsystem and micromachine technologies in transport vehicles, such as spacecraft, aircraft, and automobiles, is to reduce the weight, power consumption, and volume of components and systems to lower costs and increase affordability and reliability. However, a number of specific issues need to be addressed with respect to using microsystems and micromachines in aerospace applications--such as the lack of understanding of material characteristics; methods for producing and testing the materials in small batches; the limited proven durability and lifetime of current microcomponents, packaging, and interconnections; a cultural change with respect to system designs; and the use of embedded software, which will require new product assurance guidelines. In regards to material characteristics, there are significant adhesion, friction, and wear issues in using microdevices. Because these issues are directly related to surface phenomena, they cannot be scaled down linearly and they become increasingly important as the devices become smaller. When microsystems have contacting surfaces in relative motion, the adhesion and friction affect performance, energy consumption, wear damage, maintenance, lifetime and catastrophic failure, and reliability. Ceramics, for the most part, do not have inherently good friction and wear properties. For example, coefficients of friction in excess of 0.7 have been reported for ceramics and ceramic composite materials. Under Alternate Fuels Foundation Technologies funding, two-phase oxide ceramics developed for superior high-temperature wear resistance in NASA's High Operating Temperature Propulsion Components (HOTPC) project and new two-layered carbon nanotube (CNT) coatings (CNT topcoat/iron bondcoat/quartz substrate) developed in NASA's Revolutionary Aeropropulsion Concepts (RAC) project have been chosen as a materials couple for aerospace applications, including micromachines, in the nanotechnology

  19. Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

    Directory of Open Access Journals (Sweden)

    Johann Courteaud

    2011-05-01

    Full Text Available In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at −3 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.

  20. Simulation and fabrication of micro-scaled flow channels for metallic bipolar plates by the electrochemical micro-machining process

    Science.gov (United States)

    Lee, Shuo-Jen; Lee, Chi-Yuan; Yang, Kung-Ting; Kuan, Feng-Hui; Lai, Ping-Hung

    In order to take better advantage of metallic bipolar plates for producing metallic fuel cells and make it a feasible technology, it is essential that we have an efficient and cost effective fabrication process for creating micro-scaled flow channels. In this study, an electrochemical micro-machining (EMM) process is developed. In order to have better process control a finite element analysis is employed to ensure machine tool platform rigidity; an electric field analysis is applied for the electrode design; and an electrolytic flow analysis is carried out for the fixture design and the selection of the operational parameter. Finally, flow channels measuring 200 μm in depth and 500 μm in width are fabricated on SS316 stainless steel sheets measuring 50 mm × 0.6 mm thick.