Validation of the Earth atmosphere models using the EUV solar occultation data from the CORONAS and PROBA 2 instruments

Science.gov (United States)

Slemzin, Vladimir; Kuzin, Sergey; Berghmans, David; Pertsov, Andrey; Dominique, Marie; Ulyanov, Artyom; Gaikovich, Konstantin

Absorption in the atmosphere below 500 km results in attenuation of the solar EUV flux, variation of its spectra and distortion of solar images acquired by solar EUV instruments operating on LEO satellites even on solar synchronous orbits. Occultation measurements are important for planning of solar observations from these satellites, and can be used for monitoring the upper atmosphere as well as for studying its response to the solar activity. We present the results of the occultation measurements of the solar EUV radiation obtained by the CORONAS-F/SPIRIT telescope at high solar activity (2002), by the CORONAS-Photon/TESIS telescope at low activity (2009), and by the SWAP telescope and LYRA radiometer onboard the PROBA 2 satellite at moderate activity (2010). The measured attenuation profiles and the retrieved linear extinction coefficients at the heights 200-500 km are compared with simulations by the NRLMSIS-00 and DTM2013 atmospheric models. It was shown that the results of simulations by the DTM2013 model are well agreed with the data of measurements at all stages of solar activity and in presence of the geomagnetic storm, whereas the results of the NRLMSISE-00 model significantly diverge from the measurements, in particular, at high and low activity. The research leading to these results has received funding from the European Union’s Seventh Programme for Research, Technological Development and Demonstration under Grant Agreement “eHeroes” (project No.284461, www.eheroes.eu).

EUV high resolution imager on-board solar orbiter: optical design and detector performances

Science.gov (United States)

Halain, J. P.; Mazzoli, A.; Rochus, P.; Renotte, E.; Stockman, Y.; Berghmans, D.; BenMoussa, A.; Auchère, F.

2017-11-01

The EUV high resolution imager (HRI) channel of the Extreme Ultraviolet Imager (EUI) on-board Solar Orbiter will observe the solar atmospheric layers at 17.4 nm wavelength with a 200 km resolution. The HRI channel is based on a compact two mirrors off-axis design. The spectral selection is obtained by a multilayer coating deposited on the mirrors and by redundant Aluminum filters rejecting the visible and infrared light. The detector is a 2k x 2k array back-thinned silicon CMOS-APS with 10 μm pixel pitch, sensitive in the EUV wavelength range. Due to the instrument compactness and the constraints on the optical design, the channel performance is very sensitive to the manufacturing, alignments and settling errors. A trade-off between two optical layouts was therefore performed to select the final optical design and to improve the mirror mounts. The effect of diffraction by the filter mesh support and by the mirror diffusion has been included in the overall error budget. Manufacturing of mirror and mounts has started and will result in thermo-mechanical validation on the EUI instrument structural and thermal model (STM). Because of the limited channel entrance aperture and consequently the low input flux, the channel performance also relies on the detector EUV sensitivity, readout noise and dynamic range. Based on the characterization of a CMOS-APS back-side detector prototype, showing promising results, the EUI detector has been specified and is under development. These detectors will undergo a qualification program before being tested and integrated on the EUI instrument.

Simulated solar wind plasma interaction with the Martian exosphere: influence of the solar EUV flux on the bow shock and the magnetic pile-up boundary

Directory of Open Access Journals (Sweden)

R. Modolo

2006-12-01

Full Text Available The solar wind plasma interaction with the Martian exosphere is investigated by means of 3-D multi-species hybrid simulations. The influence of the solar EUV flux on the bow shock and the magnetic pile-up boundary is examined by comparing two simulations describing the two extreme states of the solar cycle. The hybrid formalism allows a kinetic description of each ions species and a fluid description of electrons. The ionization processes (photoionization, electron impact and charge exchange are included self-consistently in the model where the production rate is computed locally, separately for each ionization act and for each neutral species. The results of simulations are in a reasonable agreement with the observations made by Phobos 2 and Mars Global Surveyor spacecraft. The position of the bow shock and the magnetic pile-up boundary is weakly dependent of the solar EUV flux. The motional electric field creates strong asymmetries for the two plasma boundaries.

Absolute calibration of a SPRED [Spectrometer Recording Extended Domain] EUV [extreme ultraviolet] spectrograph for use on the DIII-D tokamak

International Nuclear Information System (INIS)

Wood, R.D.; Allen, S.L.

1988-01-01

We have performed an absolute intensity calibration of a SPRED multichannel EUV spectrograph using synchrotron radiation from the NBS SURF-II electron storage ring. The calibration procedure and results for both a survey grating (450 g/mm) and a high-resolution (2100 g/mm) grating are presented. The spectrograph is currently in use on the DIII-D tokamak with a tangential line-of-sight at the plasma midplane. Data is first acquired and processed by a microcomputer; the absolute line intensities are then sent to the DIII-D database for comparison with data from other diagnostics. Representative data from DIII-D plasma operations will be presented. 6 refs., 3 figs., 1 tab

TESIS experiment on EUV imaging spectroscopy of the Sun

Science.gov (United States)

Kuzin, S. V.; Bogachev, S. A.; Zhitnik, I. A.; Pertsov, A. A.; Ignatiev, A. P.; Mitrofanov, A. M.; Slemzin, V. A.; Shestov, S. V.; Sukhodrev, N. K.; Bugaenko, O. I.

2009-03-01

TESIS is a set of solar imaging instruments in development by the Lebedev Physical Institute of the Russian Academy of Science, to be launched aboard the Russian spacecraft CORONAS-PHOTON in December 2008. The main goal of TESIS is to provide complex observations of solar active phenomena from the transition region to the inner and outer solar corona with high spatial, spectral and temporal resolution in the EUV and Soft X-ray spectral bands. TESIS includes five unique space instruments: the MgXII Imaging Spectroheliometer (MISH) with spherical bent crystal mirror, for observations of the Sun in the monochromatic MgXII 8.42 Å line; the EUV Spectoheliometer (EUSH) with grazing incidence difraction grating, for the registration of the full solar disc in monochromatic lines of the spectral band 280-330 Å; two Full-disk EUV Telescopes (FET) with multilayer mirrors covering the band 130-136 and 290-320 Å; and the Solar EUV Coronagraph (SEC), based on the Ritchey-Chretien scheme, to observe the inner and outer solar corona from 0.2 to 4 solar radii in spectral band 290-320 Å. TESIS experiment will start at the rising phase of the 24th cycle of solar activity. With the advanced capabilities of its instruments, TESIS will help better understand the physics of solar flares and high-energy phenomena and provide new data on parameters of solar plasma in the temperature range 10-10K. This paper gives a brief description of the experiment, its equipment, and its scientific objectives.

PERSISTENCE MAPPING USING EUV SOLAR IMAGER DATA

Energy Technology Data Exchange (ETDEWEB)

Thompson, B. J. [NASA Goddard Space Flight Center, Code 671, Greenbelt, MD 20771 (United States); Young, C. A., E-mail: barbara.j.thompson@nasa.gov [NASA Goddard Space Flight Center, Code 670, Greenbelt, MD 20771 (United States)

2016-07-01

We describe a simple image processing technique that is useful for the visualization and depiction of gradually evolving or intermittent structures in solar physics extreme-ultraviolet imagery. The technique is an application of image segmentation, which we call “Persistence Mapping,” to isolate extreme values in a data set, and is particularly useful for the problem of capturing phenomena that are evolving in both space and time. While integration or “time-lapse” imaging uses the full sample (of size N ), Persistence Mapping rejects ( N − 1)/ N of the data set and identifies the most relevant 1/ N values using the following rule: if a pixel reaches an extreme value, it retains that value until that value is exceeded. The simplest examples isolate minima and maxima, but any quantile or statistic can be used. This paper demonstrates how the technique has been used to extract the dynamics in long-term evolution of comet tails, erupting material, and EUV dimming regions.

Off-limb EUV observations of the solar corona and transients with the CORONAS-F/SPIRIT telescope-coronagraph

Directory of Open Access Journals (Sweden)

V. Slemzin

2008-10-01

Full Text Available The SPIRIT telescope aboard the CORONAS-F satellite (in orbit from 26 July 2001 to 5 December 2005, observed the off-limb solar corona in the 175 Å (Fe IX, X and XI lines and 304 Å (He II and Si XI lines bands. In the coronagraphic mode the mirror was tilted to image the corona at the distance of 1.1...5 R_sun from the solar center, the outer occulter blocked the disk radiation and the detector sensitivity was enhanced. This intermediate region between the fields of view of ordinary extreme-ultraviolet (EUV telescopes and most of the white-light (WL coronagraphs is responsible for forming the streamer belt, acceleration of ejected matter and emergence of slow and fast solar wind. We present here the results of continuous coronagraphic EUV observations of the solar corona carried out during two weeks in June and December 2002. The images showed a "diffuse" (unresolved component of the corona seen in both bands, and non-radial, ray-like structures seen only in the 175 Å band, which can be associated with a streamer base. The correlations between latitudinal distributions of the EUV brightness in the corona and at the limb were found to be high in 304 Å at all distances and in 175 Å only below 1.5 R_sun. The temporal correlation of the coronal brightness along the west radial line, with the brightness at the underlying limb region was significant in both bands, independent of the distance. On 2 February 2003 SPIRIT observed an expansion of a transient associated with a prominence eruption seen only in the 304 Å band. The SPIRIT data have been compared with the corresponding data of the SOHO LASCO, EIT and UVCS instruments.

Resolving Differences in Absolute Irradiance Measurements Between the SOHO/CELIAS/SEM and the SDO/EVE.

Science.gov (United States)

Wieman, S R; Didkovsky, L V; Judge, D L

The Solar EUV Monitor (SEM) onboard SOHO has measured absolute extreme ultraviolet (EUV) and soft X-ray solar irradiance nearly continuously since January 1996. The EUV Variability Experiment (EVE) on SDO, in operation since April of 2010, measures solar irradiance in a wide spectral range that encompasses the band passes (26 - 34 nm and 0.1 - 50 nm) measured by SOHO/SEM. However, throughout the mission overlap, irradiance values from these two instruments have differed by more than the combined stated uncertainties of the measurements. In an effort to identify the sources of these differences and eliminate them, we investigate in this work the effect of reprocessing the SEM data using a more accurate SEM response function (obtained from synchrotron measurements with a SEM sounding-rocket clone instrument taken after SOHO was already in orbit) and time-dependent, measured solar spectral distributions - i.e ., solar reference spectra that were unavailable prior to the launch of the SDO. We find that recalculating the SEM data with these improved parameters reduces mean differences with the EVE measurements from about 20 % to less than 5 % in the 26 - 34 nm band, and from about 35 % to about 15 % for irradiances in the 0.1 - 7 nm band extracted from the SEM 0.1 - 50 nm channel.

EUV FLICKERING OF SOLAR CORONAL LOOPS: A NEW DIAGNOSTIC OF CORONAL HEATING

Energy Technology Data Exchange (ETDEWEB)

Tajfirouze, E.; Reale, F.; Peres, G. [Dipartimento di Fisica e Chimica, Università di Palermo, Piazza del Parlamento 1, I-90134 (Italy); Testa, P., E-mail: reale@astropa.unipa.it [Harvard-Smithsonian Center for Astrophysics, 60 Garden Street, Cambridge, MA 02138 (United States)

2016-02-01

A previous work of ours found the best agreement between EUV light curves observed in an active region core (with evidence of super-hot plasma) and those predicted from a model with a random combination of many pulse-heated strands with a power-law energy distribution. We extend that work by including spatially resolved strand modeling and by studying the evolution of emission along the loops in the EUV 94 Å and 335 Å channels of the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory. Using the best parameters of the previous work as the input of the present one, we find that the amplitude of the random fluctuations driven by the random heat pulses increases from the bottom to the top of the loop in the 94 Å channel and from the top to the bottom in the 335 Å channel. This prediction is confirmed by the observation of a set of aligned neighboring pixels along a bright arc of an active region core. Maps of pixel fluctuations may therefore provide easy diagnostics of nanoflaring regions.

TIMED solar EUV experiment: preflight calibration results for the XUV photometer system

Science.gov (United States)

Woods, Thomas N.; Rodgers, Erica M.; Bailey, Scott M.; Eparvier, Francis G.; Ucker, Gregory J.

1999-10-01

The Solar EUV Experiment (SEE) on the NASA Thermosphere, Ionosphere, and Mesosphere Energetics and Dynamics (TIMED) mission will measure the solar vacuum ultraviolet (VUV) spectral irradiance from 0.1 to 200 nm. To cover this wide spectral range two different types of instruments are used: a grating spectrograph for spectra between 25 and 200 nm with a spectral resolution of 0.4 nm and a set of silicon soft x-ray (XUV) photodiodes with thin film filters as broadband photometers between 0.1 and 35 nm with individual bandpasses of about 5 nm. The grating spectrograph is called the EUV Grating Spectrograph (EGS), and it consists of a normal- incidence, concave diffraction grating used in a Rowland spectrograph configuration with a 64 X 1024 array CODACON detector. The primary calibrations for the EGS are done using the National Institute for Standards and Technology (NIST) Synchrotron Ultraviolet Radiation Facility (SURF-III) in Gaithersburg, Maryland. In addition, detector sensitivity and image quality, the grating scattered light, the grating higher order contributions, and the sun sensor field of view are characterized in the LASP calibration laboratory. The XUV photodiodes are called the XUV Photometer System (XPS), and the XPS includes 12 photodiodes with thin film filters deposited directly on the silicon photodiodes' top surface. The sensitivities of the XUV photodiodes are calibrated at both the NIST SURF-III and the Physikalisch-Technische Bundesanstalt (PTB) electron storage ring called BESSY. The other XPS calibrations, namely the electronics linearity and field of view maps, are performed in the LASP calibration laboratory. The XPS and solar sensor pre-flight calibration results are primarily discussed as the EGS calibrations at SURF-III have not yet been performed.

UNDERCOVER EUV SOLAR JETS OBSERVED BY THE INTERFACE REGION IMAGING SPECTROGRAPH

Energy Technology Data Exchange (ETDEWEB)

Chen, N.-H. [Korea Astronomy and Space Science Institute, Daejeon (Korea, Republic of); Innes, D. E. [Max-Planck-Institut für Sonnensystemforschung, D-37077 Göttingen (Germany)

2016-12-10

It is well-known that extreme ultraviolet (EUV) emission emitted at the solar surface is absorbed by overlying cool plasma. Especially in active regions, dark lanes in EUV images suggest that much of the surface activity is obscured. Simultaneous observations from the Interface Region Imaging Spectrograph, consisting of UV spectra and slit-jaw images (SJI), give vital information with sub-arcsecond spatial resolution on the dynamics of jets not seen in EUV images. We studied a series of small jets from recently formed bipole pairs beside the trailing spot of active region 11991, which occurred on 2014 March 5 from 15:02:21 UT to 17:04:07 UT. Collimated outflows with bright roots were present in SJI 1400 Å (transition region) and 2796 Å (upper chromosphere) that were mostly not seen in Atmospheric Imaging Assembly (AIA) 304 Å (transition region) and AIA 171 Å (lower corona) images. The Si iv spectra show a strong blue wing enhancement, but no red wing, in the line profiles of the ejecta for all recurrent jets, indicating outward flows without twists. We see two types of Mg ii line profiles produced by the jets spires: reversed and non-reversed. Mg ii lines remain optically thick, but turn optically thin in the highly Doppler shifted wings. The energy flux contained in each recurrent jet is estimated using a velocity differential emission measure technique that measures the emitting power of the plasma as a function of the line-of-sight velocity. We found that all the recurrent jets release similar energy (10{sup 8} erg cm{sup −2} s{sup −1}) toward the corona and the downward component is less than 3%.

A proposed new method for the determination of the solar irradiance at EUV wavelength range

Science.gov (United States)

Feldman, Uri; Doschek, G. A.; Seely, J. F.; Landi, E.; Dammasch, I.

The solar irradiance in the far ultraviolet (FUV) and extreme ultraviolet (EUV) and its time variability are important inputs to geospace models. It provides the primary mechanism for heating the earth's upper atmosphere and creating the ionosphere. Understanding various space weather phenomena requires reliable detailed knowledge of the solar EUV irradiance. Ideally one would like to have a single well-calibrated, high-resolution spectrometer that can continuously monitor the solar irradiance over the relevant wavelengths range. Since this is much too difficult to accomplish, a number of monitoring instruments were constructed in the past, each covering a fraction of the required wavelength range. Assembling solar irradiance from measurements by a number of instruments is extremely difficult and is usually plagued by large uncertainties. To overcome some of the difficulties resulting from such procedures, empirical models have been developed that rely in large part on solar activity levels as proxies. In recent years a different approach has been established for the determination of the solar irradiance, an approach independent of irradiance observations. The new approach is based on the line intensities calculated from emission measure (EM) distributions across the solar surface. The EM distributions are derived from spatially and spectrally resolved measurements of line intensities and describe the temperature and density structure of the basic large scale features of the solar atmosphere, specifically coronal holes, quiet Sun, and active regions. Recently, as a result of detailed analysis of solar upper atmosphere (SUA) spectra recorded by SUMER/SoHO it was discovered that, in contrast to earlier beliefs, the solar EM in 3x105 -4x106 K plasmas does not appear to vary continuously with temperature as previously assumed. Instead it appears to be composed of isothermal structures where each can attain but one of the following four main temperatures: 5x105 , 9x105

Development of a EUV Test Facility at the Marshall Space Flight Center

Science.gov (United States)

West, Edward; Pavelitz, Steve; Kobayashi, Ken; Robinson, Brian; Cirtain, Johnathan; Gaskin, Jessica; Winebarger, Amy

2011-01-01

This paper will describe a new EUV test facility that is being developed at the Marshall Space Flight Center (MSFC) to test EUV telescopes. Two flight programs, HiC - high resolution coronal imager (sounding rocket) and SUVI - Solar Ultraviolet Imager (GOES-R), set the requirements for this new facility. This paper will discuss those requirements, the EUV source characteristics, the wavelength resolution that is expected and the vacuum chambers (Stray Light Facility, Xray Calibration Facility and the EUV test chamber) where this facility will be used.

Center-to-Limb Variability of Hot Coronal EUV Emissions During Solar Flares

Science.gov (United States)

Thiemann, E. M. B.; Chamberlin, P. C.; Eparvier, F. G.; Epp, L.

2018-02-01

It is generally accepted that densities of quiet-Sun and active region plasma are sufficiently low to justify the optically thin approximation, and this is commonly used in the analysis of line emissions from plasma in the solar corona. However, the densities of solar flare loops are substantially higher, compromising the optically thin approximation. This study begins with a radiative transfer model that uses typical solar flare densities and geometries to show that hot coronal emission lines are not generally optically thin. Furthermore, the model demonstrates that the observed line intensity should exhibit center-to-limb variability (CTLV), with flares observed near the limb being dimmer than those occurring near disk center. The model predictions are validated with an analysis of over 200 flares observed by the EUV Variability Experiment (EVE) on the Solar Dynamics Observatory (SDO), which uses six lines, with peak formation temperatures between 8.9 and 15.8 MK, to show that limb flares are systematically dimmer than disk-center flares. The data are then used to show that the electron column density along the line of sight typically increases by 1.76 × 10^{19} cm^{-2} for limb flares over the disk-center flare value. It is shown that the CTLV of hot coronal emissions reduces the amount of ionizing radiation propagating into the solar system, and it changes the relative intensities of lines and bands commonly used for spectral analysis.

FIRST SIMULTANEOUS OBSERVATION OF AN H{alpha} MORETON WAVE, EUV WAVE, AND FILAMENT/PROMINENCE OSCILLATIONS

Energy Technology Data Exchange (ETDEWEB)

Asai, Ayumi; Isobe, Hiroaki [Unit of Synergetic Studies for Space, Kyoto University, Yamashina, Kyoto 607-8471 (Japan); Ishii, Takako T.; Kitai, Reizaburo; Ichimoto, Kiyoshi; UeNo, Satoru; Nagata, Shin' ichi; Morita, Satoshi; Nishida, Keisuke; Shibata, Kazunari [Kwasan and Hida Observatories, Kyoto University, Yamashina, Kyoto 607-8471 (Japan); Shiota, Daikou [Advanced Science Institute, RIKEN, Wako, Saitama 351-0198 (Japan); Oi, Akihito [College of Science, Ibaraki University, Mito, Ibaraki 310-8512 (Japan); Akioka, Maki, E-mail: asai@kwasan.kyoto-u.ac.jp [Hiraiso Solar Observatory, National Institute of Information and Communications Technology, Hitachinaka, Ibaraki 311-1202 (Japan)

2012-02-15

We report on the first simultaneous observation of an H{alpha} Moreton wave, the corresponding EUV fast coronal waves, and a slow and bright EUV wave (typical EIT wave). We observed a Moreton wave, associated with an X6.9 flare that occurred on 2011 August 9 at the active region NOAA 11263, in the H{alpha} images taken by the Solar Magnetic Activity Research Telescope at Hida Observatory of Kyoto University. In the EUV images obtained by the Atmospheric Imaging Assembly on board the Solar Dynamic Observatory we found not only the corresponding EUV fast 'bright' coronal wave, but also the EUV fast 'faint' wave that is not associated with the H{alpha} Moreton wave. We also found a slow EUV wave, which corresponds to a typical EIT wave. Furthermore, we observed, for the first time, the oscillations of a prominence and a filament, simultaneously, both in the H{alpha} and EUV images. To trigger the oscillations by the flare-associated coronal disturbance, we expect a coronal wave as fast as the fast-mode MHD wave with the velocity of about 570-800 km s{sup -1}. These velocities are consistent with those of the observed Moreton wave and the EUV fast coronal wave.

A New Relationship Between Soft X-Rays and EUV Flare Light Curves

Science.gov (United States)

Thiemann, Edward

2016-05-01

Solar flares are the result of magnetic reconnection in the solar corona which converts magnetic energy into kinetic energy resulting in the rapid heating of solar plasma. As this plasma cools, it emits radiation at different EUV wavelengths when the dropping temperature passes a line’s temperature of formation. This results in a delay in the emissions from cooler EUV lines relative to hotter EUV lines. Therefore, characterizing how this hot plasma cools is important for understanding how the corresponding geo-effective extreme ultraviolet (EUV) irradiance evolves in time. I present a simple new framework in which to study flare cooling by using a Lumped Element Thermal Model (LETM). LETM is frequently used in science and engineering to simplify a complex multi-dimensional thermal system by reducing it to a 0-D thermal circuit. For example, a structure that conducts heat out of a system is simplified with a resistive element and a structure that allows a system to store heat is simplified with a capacitive element. A major advantage of LETM is that the specific geometry of a system can be ignored, allowing for an intuitive analysis of the major thermal processes. I show that LETM is able to accurately reproduce the temporal evolution of cooler flare emission lines based on hotter emission line evolution. In particular, it can be used to predict the evolution of EUV flare light curves using the NOAA X-Ray Sensor (XRS).

Well-defined EUV wave associated with a CME-driven shock

Science.gov (United States)

Cunha-Silva, R. D.; Selhorst, C. L.; Fernandes, F. C. R.; Oliveira e Silva, A. J.

2018-05-01

Aims: We report on a well-defined EUV wave observed by the Extreme Ultraviolet Imager (EUVI) on board the Solar Terrestrial Relations Observatory (STEREO) and the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamics Observatory (SDO). The event was accompanied by a shock wave driven by a halo CME observed by the Large Angle and Spectrometric Coronagraph (LASCO-C2/C3) on board the Solar and Heliospheric Observatory (SOHO), as evidenced by the occurrence of type II bursts in the metric and dekameter-hectometric wavelength ranges. We investigated the kinematics of the EUV wave front and the radio source with the purpose of verifying the association between the EUV wave and the shock wave. Methods: The EUV wave fronts were determined from the SDO/AIA images by means of two appropriate directions (slices). The heights (radial propagation) of the EUV wave observed by STEREO/EUVI and of the radio source associated with the shock wave were compared considering the whole bandwidth of the harmonic lane of the radio emission, whereas the speed of the shock was estimated using the lowest frequencies of the harmonic lane associated with the undisturbed corona, using an appropriate multiple of the Newkirk (1961, ApJ, 133, 983) density model and taking into account the H/F frequency ratio fH/fF = 2. The speed of the radio source associated with the interplanetary shock was determined using the Mann et al. (1999, A&A, 348, 614) density model. Results: The EUV wave fronts determined from the SDO/AIA images revealed the coexistence of two types of EUV waves, a fast one with a speed of 560 km s-1, and a slower one with a speed of 250 km s-1, which corresponds approximately to one-third of the average speed of the radio source ( 680 km s-1). The radio signature of the interplanetary shock revealed an almost constant speed of 930 km s-1, consistent with the linear speed of the halo CME (950 km s-1) and with the values found for the accelerating coronal shock ( 535-823 km s-1

Responses of Solar Irradiance and the Ionosphere to an Intense Activity Region

Science.gov (United States)

Chen, Yiding; Liu, Libo; Le, Huijun; Wan, Weixing

2018-03-01

Solar rotation (SR) variation dominates solar extremely ultraviolet (EUV) changes on the timescale of days. The F10.7 index is usually used as an indicator for solar EUV. The SR variation of F10.7 significantly enhanced during the 2008th-2009th Carrington rotations (CRs) owing to an intense active region; F10.7 increased about 180 units during that SR period. That was the most prominent SR variation of F10.7 during solar cycle 23. In this paper, global electron content (GEC) is used to investigate ionospheric response to that strong variation of solar irradiance indicated by F10.7. The variation of GEC with F10.7 was anomalous (GEC-F10.7 slope significantly decreased) during the 2008th-2009th CRs; however, GEC versus EUV variation during that period was consistent with that during adjacent time intervals when using Solar Heliospheric Observatory/Solar EUV Monitor 26-34 nm EUV measurements. The reason is that F10.7 response to that intense active region was much stronger than EUV response; thus, the EUV-F10.7 slope decreased. We confirmed decreased EUV-F10.7 slope during the 2008th-2009th CRs for different wavelengths within 27-120 nm using Thermosphere, Ionosphere, Mesosphere Energetics and Dynamics/Solar EUV Experiment high spectral resolution EUV measurements. And on the basis of Solar Heliospheric Observatory/Solar EUV Monitor EUV measurements during solar cycle 23, we further presented that EUV-F10.7 slope statistically tends to decrease when the SR variation of F10.7 significantly enhances. Moreover, we found that ionospheric time lag effect to EUV is exaggerated when using F10.7, owing to the time lag effect of EUV to F10.7.

The EUV Helium Spectrum in the Quiet Sun: A By-Product of Coronal Emission?

Science.gov (United States)

Andretta, Vincenzo; DelZanna, Giulio; Jordan, Stuart D.; Oegerle, William (Technical Monitor)

2002-01-01

In this paper we test one of the mechanisms proposed to explain the intensities and other observed properties of the solar helium spectrum, and in particular of its Extreme-Ultraviolet (EUV) resonance lines. The so-called Photoionisation-Recombination (P-R) mechanism involves photoionisation of helium atoms and ions by EUV coronal radiation, followed by recombination cascades. We present calibrated measurements of EUV flux obtained with the two CDS spectrometers on board SOHO, in quiescent solar regions. We were able to obtain an essentially complete estimate of the total photoionizing flux in the wavelength range below 504 A (the photoionisation threshold for He(I)), as well as simultaneous measurements with the same instruments of the intensities of the strongest EUV helium lines: He(II) lambda304, He(I) lambda584, and He(I) lambda537. We find that there are not enough EUV photons to account for the observed helium line intensities. More specifically, we conclude that He(II) intensities cannot be explained by the P-R mechanism. Our results, however, leave open the possibility that the He(I) spectrum could be formed by the P-R mechanism, with the He(II) lambda304 line as a significant photoionizating source.

Absorption and Emission of EUV Radiation by the Local ISM

Science.gov (United States)

Paresce, F.

1984-01-01

The Berkeley extreme ultraviolet radiation (EUV) telescope flown on the Apollo Soyuz mission in July, 1975 established the existence of a measurable flux of EUV (100 lambda or = or = 1000 A) originating from sources outside the solar system. White dwarfs, flare stars and cataclysmic variables were dicovered to be relatively intense compact sources of EUV photons. Moreover, this and other subsequent experiments have strongly suggested the presence of a truly diffuse component of the FUV radiation field possibly due to thermal emission from hot interstellar gas located in the general vicinity of the Sun. Closer to the H1, 912 A edge, the effect of a few hot O and B stars has been shown to be very important in establishing the interstellar flux density. All these results imply that the local interstellar medium (ISM) is immersed in a non-negligible EUV radiation field which, because of the strong coupling between EUV photons and matter, will play a crucial role in determining its physical structure. The available information on the local ISM derived from the limited EUV observations carried out so far is assembled and analyzed. These include measurements of the spectra of bright EUV sources that reveal clear evidence of H photo absorption at lambda 400 A and of the He ionization edge at 228 A.

Radiometry for the EUV lithography; Radiometrie fuer die EUV-Lithographie

Energy Technology Data Exchange (ETDEWEB)

Scholze, Frank [Physikalisch-Technische Bundesanstalt (PTB), Berlin (Germany). Arbeitsgruppe ' EUV-Radiometrie' ; Laubis, Christian; Barboutis, Annett; Buchholz, Christian; Fischer, Andreas; Puls, Jana; Stadelhoff, Christian

2014-12-15

The EUV reflectrometry at the PTB storage BESSY I and BESSY II is described. Results on the reflectivities of some EUV mirrors are presented. Finally the spectral sensitivities of different photodiodes used as EUV detectors are presented. (HSI)

The solar energetic particle event on 2013 April 11: an investigation of its solar origin and longitudinal spread

Energy Technology Data Exchange (ETDEWEB)

Lario, D.; Raouafi, N. E. [The Johns Hopkins University, Applied Physics Laboratory, Laurel, MD 20723 (United States); Kwon, R.-Y.; Zhang, J. [School of Physics, Astronomy and Computational Sciences, George Mason University, 4400 University Drive, MSN 6A2, Fairfax, VA 22030 (United States); Gómez-Herrero, R. [Space Research Group, Physics and Mathematics Department, University of Alcalá, Alcalá de Henares, E-28871 Spain (Spain); Dresing, N. [Institute of Experimental and Applied Physics, Christian-Albrechts University of Kiel, Kiel D-24118 (Germany); Riley, P. [Predictive Science, 9990 Mesa Rim Road, Suite 170, San Diego, CA 92121 (United States)

2014-12-10

We investigate the solar phenomena associated with the origin of the solar energetic particle (SEP) event observed on 2013 April 11 by a number of spacecraft distributed in the inner heliosphere over a broad range of heliolongitudes. We use extreme ultraviolet (EUV) and white-light coronagraph observations from the Solar Dynamics Observatory (SDO), the SOlar and Heliospheric Observatory, and the twin Solar TErrestrial RElations Observatory spacecraft (STEREO-A and STEREO-B) to determine the angular extent of the EUV wave and coronal mass ejection (CME) associated with the origin of the SEP event. We compare the estimated release time of SEPs observed at each spacecraft with the arrival time of the structures associated with the CME at the footpoints of the field lines connecting each spacecraft with the Sun. Whereas the arrival of the EUV wave and CME-driven shock at the footpoint of STEREO-B is consistent, within uncertainties, with the release time of the particles observed by this spacecraft, the EUV wave never reached the footpoint of the field lines connecting near-Earth observers with the Sun, even though an intense SEP event was observed there. We show that the west flank of the CME-driven shock propagating at high altitudes above the solar surface was most likely the source of the particles observed near Earth, but it did not leave any EUV trace on the solar disk. We conclude that the angular extent of the EUV wave on the solar surface did not agree with the longitudinal extent of the SEP event in the heliosphere. Hence EUV waves cannot be used reliably as a proxy for the solar phenomenon that accelerates and injects energetic particles over broad ranges of longitudes.

The EUV-observatory TESIS on board Coronas-Photon: scientific goals and initial plan of observations

Science.gov (United States)

Bogachev, Sergey

The TESIS a EUV-observatory for solar research from space will be launched in 2008 September on board the satellite Coronas-Photon from cosmodrome Plesetsk. TESIS is a project of Lebedev Physical Institute of Russian Academy of Science with contribution from Space Research Center of Polish Academy of Science (the spectrometer SphinX). The experiment will focus on quasi-monochromatic imaging of the Sun and XUV spectroscopy of solar plasma. The scientific payload of TESIS contains five instruments: (1) Bragg crystal spectroheliometer for Sun monochromatic imaging in the line MgXII 8.42 A, (2) the normal-incidence Herschelian EUV telescopes with a resolution of 1.7 arc sec operated in lines FeXXII 133 A, FeIX 171 A and HeII 304 A, (3) the EUV imaging spectrometer, (4) the wide-field Ritchey-Chretien coronograph and (5) the X-ray spectrometer SphinX. The TESIS will focus on coordinated study of solar activity from the transition region to the outer corona up to 4 solar radii in wide temperature range from 5*104 to 2*107 K. We describe the scientific goals of the TESIS and its initial plan of observations.

MULTI-VIEWPOINT OBSERVATIONS OF A WIDELY DISTRIBUTED SOLAR ENERGETIC PARTICLE EVENT: THE ROLE OF EUV WAVES AND WHITE-LIGHT SHOCK SIGNATURES

Energy Technology Data Exchange (ETDEWEB)

Kouloumvakos, A.; Patsourakos, S.; Nindos, A. [Section of Astrogeophysics, Department of Physics, University of Ioannina, 45110 Ioannina (Greece); Vourlidas, A. [The Johns Hopkins University Applied Physics Laboratory, Laurel, MD 20723 (United States); Anastasiadis, A.; Sandberg, I. [Institute for Astronomy, Astrophysics, Space Applications and Remote Sensing, National Observatory of Athens, 15236 Penteli (Greece); Hillaris, A. [Section of Astrophysics, Astronomy and Mechanics, Department of Physics, National and Kapodistrian University of Athens, 15783 Athens (Greece)

2016-04-10

On 2012 March 7, two large eruptive events occurred in the same active region within 1 hr from each other. Each consisted of an X-class flare, a coronal mass ejection (CME), an extreme-ultraviolet (EUV) wave, and a shock wave. The eruptions gave rise to a major solar energetic particle (SEP) event observed at widely separated (∼120°) points in the heliosphere. From multi-viewpoint energetic proton recordings we determine the proton release times at STEREO B and A (STB, STA) and the first Lagrange point (L1) of the Sun–Earth system. Using EUV and white-light data, we determine the evolution of the EUV waves in the low corona and reconstruct the global structure and kinematics of the first CME’s shock, respectively. We compare the energetic proton release time at each spacecraft with the EUV waves’ arrival times at the magnetically connected regions and the timing and location of the CME shock. We find that the first flare/CME is responsible for the SEP event at all three locations. The proton release at STB is consistent with arrival of the EUV wave and CME shock at the STB footpoint. The proton release time at L1 was significantly delayed compared to STB. Three-dimensional modeling of the CME shock shows that the particle release at L1 is consistent with the timing and location of the shock’s western flank. This indicates that at L1 the proton release did not occur in low corona but farther away from the Sun. However, the extent of the CME shock fails to explain the SEP event observed at STA. A transport process or a significantly distorted interplanetary magnetic field may be responsible.

Objective for EUV microscopy, EUV lithography, and x-ray imaging

Science.gov (United States)

Bitter, Manfred; Hill, Kenneth W.; Efthimion, Philip

2016-05-03

Disclosed is an imaging apparatus for EUV spectroscopy, EUV microscopy, EUV lithography, and x-ray imaging. This new imaging apparatus could, in particular, make significant contributions to EUV lithography at wavelengths in the range from 10 to 15 nm, which is presently being developed for the manufacturing of the next-generation integrated circuits. The disclosure provides a novel adjustable imaging apparatus that allows for the production of stigmatic images in x-ray imaging, EUV imaging, and EUVL. The imaging apparatus of the present invention incorporates additional properties compared to previously described objectives. The use of a pair of spherical reflectors containing a concave and convex arrangement has been applied to a EUV imaging system to allow for the image and optics to all be placed on the same side of a vacuum chamber. Additionally, the two spherical reflector segments previously described have been replaced by two full spheres or, more precisely, two spherical annuli, so that the total photon throughput is largely increased. Finally, the range of permissible Bragg angles and possible magnifications of the objective has been largely increased.

Set of instruments for solar EUV and soft X-ray monitoring onboard satellite Coronas-Photon

Science.gov (United States)

Kotov, Yury; Kochemasov, Alexey; Kuzin, Sergey; Kuznetsov, Vladimir; Sylwester, Janusz; Yurov, Vitaly

Coronas-Photon mission is the third satellite of the Russian Coronas program on solar activity observation. The main goal of the "Coronas-Photon" is the study of solar hard electromagnetic radiation in the wide energy range from UV up to high energy gamma-radiation (2000MeV). Scientific payload for solar radiation observation consists of three types of instruments: Monitors (Natalya-2M, Konus-RF, RT-2, Penguin-M, BRM, PHOKA, Sphin-X, SOKOL spectral and timing measurements of full solar disk radiation have timing in flare/burst mode up to one msec. Instruments Natalya-2M, Konus-RF, RT-2 will cover the wide energy range of hard X-rays and soft gamma-rays (15keV to 2000MeV) and will together constitute the largest area detectors ever used for solar observations. Detectors of gamma-ray monitors are based on structured inorganic scintillators. For X-ray and EUV monitors the scintillation phoswich detectors, gas proportional counter, CdZnTe assembly and filter-covered Si-diodes are used. Telescope-spectrometer TESIS for imaging solar spectroscopy in X-rays has angular resolution up to 1arcsec in three spectral lines. Satellite platform and scientific payload is under construction to be launched in autumn 2008. Satellite orbit is circular with initial height 550km and inclination 82.5degrees. Accuracy of the spacecraft orientation to the Sun is better 3arcmin. In the report the capability of PHOKA, SphinX, SOKOL and TESIS as well as the observation program are described and discussed.

The EUV spectrophotometer on Atmosphere Explorer.

Science.gov (United States)

Hinteregger, H. E.; Bedo, D. E.; Manson, J. E.

1973-01-01

An extreme ultraviolet (EUV) spectrophotometer for measurements of solar radiation at wavelengths ranging from 140 to 1850 A will be included in the payload of each of the three Atmosphere-Explorer (AE) missions, AE-C, -D, and -E. The instrument consists of 24 grating monochromators, 12 of which can be telecommanded either to execute 128-step scans each covering a relatively small section of the total spectrophotometer wavelength range or to maintain fixed (command-selected) wavelength positions. The remaining 12 nonscan monochromators operate at permanently fixed wavelengths and view only a small fraction of the solar disk except for one viewing the whole sun in H Lyman alpha. Ten of the 12 scan-capable monochromators also view the entire solar disk since their primary function is to measure the total fluxes independent of the distribution of sources across the solar disk.

Validation of Earth atmosphere models using solar EUV observations from the CORONAS and PROBA2 satellites in occultation mode

Science.gov (United States)

Slemzin, Vladimir; Ulyanov, Artyom; Gaikovich, Konstantin; Kuzin, Sergey; Pertsov, Andrey; Berghmans, David; Dominique, Marie

2016-02-01

Aims: Knowledge of properties of the Earth's upper atmosphere is important for predicting the lifetime of low-orbit spacecraft as well as for planning operation of space instruments whose data may be distorted by atmospheric effects. The accuracy of the models commonly used for simulating the structure of the atmosphere is limited by the scarcity of the observations they are based on, so improvement of these models requires validation under different atmospheric conditions. Measurements of the absorption of the solar extreme ultraviolet (EUV) radiation in the upper atmosphere below 500 km by instruments operating on low-Earth orbits (LEO) satellites provide efficient means for such validation as well as for continuous monitoring of the upper atmosphere and for studying its response to the solar and geomagnetic activity. Method: This paper presents results of measurements of the solar EUV radiation in the 17 nm wavelength band made with the SPIRIT and TESIS telescopes on board the CORONAS satellites and the SWAP telescope on board the PROBA2 satellite in the occulted parts of the satellite orbits. The transmittance profiles of the atmosphere at altitudes between 150 and 500 km were derived from different phases of solar activity during solar cycles 23 and 24 in the quiet state of the magnetosphere and during the development of a geomagnetic storm. We developed a mathematical procedure based on the Tikhonov regularization method for solution of ill-posed problems in order to retrieve extinction coefficients from the transmittance profiles. The transmittance profiles derived from the data and the retrieved extinction coefficients are compared with simulations carried out with the NRLMSISE-00 atmosphere model maintained by Naval Research Laboratory (USA) and the DTM-2013 model developed at CNES in the framework of the FP7 project ATMOP. Results: Under quiet and slightly disturbed magnetospheric conditions during high and low solar activity the extinction coefficients

Coronal magnetic fields inferred from IR wavelength and comparison with EUV observations

Directory of Open Access Journals (Sweden)

Y. Liu

2009-07-01

Full Text Available Spectropolarimetry using IR wavelength of 1075 nm has been proved to be a powerful tool for directly mapping solar coronal magnetic fields including transverse component directions and line-of-sight component intensities. Solar tomography, or stereoscopy based on EUV observations, can supply 3-D information for some magnetic field lines in bright EUV loops. In a previous paper \\citep{liu08} the locations of the IR emission sources in the 3-D coordinate system were inferred from the comparison between the polarization data and the potential-field-source-surface (PFSS model, for one of five west limb regions in the corona (Lin et al., 2004. The paper shows that the region with the loop system in the active region over the photospheric area with strong magnetic field intensity is the region with a dominant contribution to the observed Stokes signals. So, the inversion of the measured Stokes parameters could be done assuming that most of the signals come from a relatively thin layer over the area with a large photospheric magnetic field strength. Here, the five limb coronal regions are studied together in order to study the spatial correlation between the bright EUV loop features and the inferred IR emission sources. It is found that, for the coronal regions above the stronger photospheric magnetic fields, the locations of the IR emission sources are closer to or more consistent with the bright EUV loop locations than those above weaker photospheric fields. This result suggests that the structures of the coronal magnetic fields observed at IR and EUV wavelengths may be different when weak magnetic fields present there.

EUVS Sounding Rocket Payload

Science.gov (United States)

Stern, Alan S.

1996-01-01

During the first half of this year (CY 1996), the EUVS project began preparations of the EUVS payload for the upcoming NASA sounding rocket flight 36.148CL, slated for launch on July 26, 1996 to observe and record a high-resolution (approx. 2 A FWHM) EUV spectrum of the planet Venus. These preparations were designed to improve the spectral resolution and sensitivity performance of the EUVS payload as well as prepare the payload for this upcoming mission. The following is a list of the EUVS project activities that have taken place since the beginning of this CY: (1) Applied a fresh, new SiC optical coating to our existing 2400 groove/mm grating to boost its reflectivity; (2) modified the Ranicon science detector to boost its detective quantum efficiency with the addition of a repeller grid; (3) constructed a new entrance slit plane to achieve 2 A FWHM spectral resolution; (4) prepared and held the Payload Initiation Conference (PIC) with the assigned NASA support team from Wallops Island for the upcoming 36.148CL flight (PIC held on March 8, 1996; see Attachment A); (5) began wavelength calibration activities of EUVS in the laboratory; (6) made arrangements for travel to WSMR to begin integration activities in preparation for the July 1996 launch; (7) paper detailing our previous EUVS Venus mission (NASA flight 36.117CL) published in Icarus (see Attachment B); and (8) continued data analysis of the previous EUVS mission 36.137CL (Spica occultation flight).

Atomic hydrogen cleaning of EUV multilayer optics

Science.gov (United States)

Graham, Samuel, Jr.; Steinhaus, Charles A.; Clift, W. Miles; Klebanoff, Leonard E.; Bajt, Sasa

2003-06-01

Recent studies have been conducted to investigate the use of atomic hydrogen as an in-situ contamination removal method for EUV optics. In these experiments, a commercial source was used to produce atomic hydrogen by thermal dissociation of molecular hydrogen using a hot filament. Samples for these experiments consisted of silicon wafers coated with sputtered carbon, Mo/Si optics with EUV-induced carbon, and bare Si-capped and Ru-B4C-capped Mo/Si optics. Samples were exposed to an atomic hydrogen source at a distance of 200 - 500 mm downstream and angles between 0-90° with respect to the source. Carbon removal rates and optic oxidation rates were measured using Auger electron spectroscopy depth profiling. In addition, at-wavelength peak reflectance (13.4 nm) was measured using the EUV reflectometer at the Advanced Light Source. Data from these experiments show carbon removal rates up to 20 Å/hr for sputtered carbon and 40 Å/hr for EUV deposited carbon at a distance of 200 mm downstream. The cleaning rate was also observed to be a strong function of distance and angular position. Experiments have also shown that the carbon etch rate can be increased by a factor of 4 by channeling atomic hydrogen through quartz tubes in order to direct the atomic hydrogen to the optic surface. Atomic hydrogen exposures of bare optic samples show a small risk in reflectivity degradation after extended periods. Extended exposures (up to 20 hours) of bare Si-capped Mo/Si optics show a 1.2% loss (absolute) in reflectivity while the Ru-B4C-capped Mo/Si optics show a loss on the order of 0.5%. In order to investigate the source of this reflectivity degradation, optic samples were exposed to atomic deuterium and analyzed using low energy ion scattering direct recoil spectroscopy to determine any reactions of the hydrogen with the multilayer stack. Overall, the results show that the risk of over-etching with atomic hydrogen is much less than previous studies using RF discharge cleaning

PROJECTION EFFECTS IN CORONAL DIMMINGS AND ASSOCIATED EUV WAVE EVENT

Energy Technology Data Exchange (ETDEWEB)

Dissauer, K.; Temmer, M.; Veronig, A. M.; Vanninathan, K. [IGAM/Institute of Physics, University of Graz, Universitätsplatz 5/II, A-8010 Graz (Austria); Magdalenić, J., E-mail: karin.dissauer@uni-graz.at [Solar-Terrestrial Center of Excellence-SIDC, Royal Observatory of Belgium, Av. Circulaire 3, B-1180 Brussels (Belgium)

2016-10-20

We investigate the high-speed ( v > 1000 km s{sup −1}) extreme-ultraviolet (EUV) wave associated with an X1.2 flare and coronal mass ejection (CME) from NOAA active region 11283 on 2011 September 6 (SOL2011-09-06T22:12). This EUV wave features peculiar on-disk signatures; in particular, we observe an intermittent “disappearance” of the front for 120 s in Solar Dynamics Observatory ( SDO )/AIA 171, 193, 211 Å data, whereas the 335 Å filter, sensitive to hotter plasmas ( T ∼ 2.5 MK), shows a continuous evolution of the wave front. The eruption was also accompanied by localized coronal dimming regions. We exploit the multi-point quadrature position of SDO and STEREO-A , to make a thorough analysis of the EUV wave evolution, with respect to its kinematics and amplitude evolution and reconstruct the SDO line-of-sight (LOS) direction of the identified coronal dimming regions in STEREO-A . We show that the observed intensities of the dimming regions in SDO /AIA depend on the structures that are lying along their LOS and are the combination of their individual intensities, e.g., the expanding CME body, the enhanced EUV wave, and the CME front. In this context, we conclude that the intermittent disappearance of the EUV wave in the AIA 171, 193, and 211 Å filters, which are channels sensitive to plasma with temperatures below ∼2 MK is also caused by such LOS integration effects. These observations clearly demonstrate that single-view image data provide us with limited insight to correctly interpret coronal features.

Time Variabilities of Solar Wind Ion Fluxes and of X-ray and EUV Emissions from Comet Hyakutake

Science.gov (United States)

Neugebauer, M.; Cravens, T.; Lisse, C.; Ipavich, F.; von Steiger, R.; Shah, P.; Armstrong, T.

1999-01-01

Observations of X-ray and extreme ultraviolet (EUV) emissions from comet C/Hyakutake 1996 B2 made by the Rontgen X-ray satellite (ROSAT) and the Extreme Ultraviolet Explorer (EUVE) revealed a total X-ray luminosity of about 500 MW.

Exploring EUV Spicules Using 304 Ang He II Data from SDO/AIA

Science.gov (United States)

Snyder, Ian; Sterling, Alphonse C.; Falconer, David A.; Moore, Ronald L.

2015-01-01

We present results from a statistical study of He II 304 Angstrom EUV spicules and macrospicules at the limb of the Sun. We use high-cadence (12 sec) and high-resolution (0.6 arcsec pixels) resolution data from the Atmospheric Imaging Array (AIA) instrument on the Solar Dynamic Observatory (SDO). All of the observed events occurred in quiet or coronal hole regions near the solar pole. Spicules and macrospicules are typically transient jet-like chromospheric-material features, the macrospicules are wider and have taller maximum heights than the spicules. We looked for characteristics of the populations of these two phenomena that might indicate whether they have the same or different initiation mechanisms. We examined the maximum heights, time-averaged rise velocities, and lifetimes of about two dozen EUV spicules and about five EUV macrospicules. For spicules, these quantities are, respectively, approx. 5-30 km, 5-50 km/s, and a few 100- approx. 1000 sec. Macrospicules were approx. 60,000 km, 55 km/s, and had lifetimes of approx. 1800 sec. Therefore the macrospicules were taller and longer-lived than the spicules, and had velocities comparable to that of the fastest spicules. The rise profiles of both the spicules and the macrospicules matched well a second-order ("parabolic'') trajectory, although the acceleration was generally weaker than that of solar gravity in the profiles fitted to the trajectories. The Macrospicules also had obvious brightenings at their bases at their birth, while such brightenings were not apparent for most of the spicules. Most of the spicules and several of the macrospicules remained visible during their decent back to the solar surface, although a small percentage of the spicules faded out before their fall was completed. Are findings are suggestive of the two phenomena possibly having different initiation mechanisms, but this is not yet conclusive. Qualitatively the EUV 304 Angstrom spicules match well the properties quoted for "Type I

Towards a contamination-tolerant EUV power sensor

NARCIS (Netherlands)

Veldhoven, J. van; Putten, M. van; Nieuwkoop, E.; Huijser, T.; Maas, D.J.

2015-01-01

In EUV Lithography short-, mid- and long-term control over in-band EUV power is needed for high-yield IC production. Existing sensors can be unstable over time due to contamination and/or degradation. TNO goal: to conceive a stable EUV power sensor. Sensitive to in-band EUV, negligible degradation,

A SOLAR SPECTROSCOPIC ABSOLUTE ABUNDANCE OF ARGON FROM RESIK

International Nuclear Information System (INIS)

Sylwester, J.; Sylwester, B.; Phillips, K. J. H.; Kuznetsov, V. D.

2010-01-01

Observations of He-like and H-like Ar (Ar XVII and Ar XVIII) lines at 3.949 A and 3.733 A, respectively, with the RESIK X-ray spectrometer on the CORONAS-F spacecraft, together with temperatures and emission measures from the two channels of GOES, have been analyzed to obtain the abundance of Ar in flare plasmas in the solar corona. The line fluxes per unit emission measure show a temperature dependence like that predicted from theory and lead to spectroscopically determined values for the absolute Ar abundance, A(Ar) = 6.44 ± 0.07 (Ar XVII) and 6.49 ± 0.16 (Ar XVIII), which are in agreement to within uncertainties. The weighted mean is 6.45 ± 0.06, which is between two recent compilations of the solar Ar abundance and suggests that the photospheric and coronal abundances of Ar are very similar.

Evaluating EUV mask pattern imaging with two EUV microscopes

International Nuclear Information System (INIS)

Goldberg, Kenneth A.; Takase, Kei; Naulleau, Patrick P.; Han, Hakseung; Barty, Anton; Kinoshita, Hiroo; Hamamoto, Kazuhiro

2008-01-01

Aerial image measurement plays a key role in the development of patterned reticles for each generation of lithography. Studying the field transmitted (reflected) from EUV masks provides detailed information about potential disruptions caused by mask defects, and the performance of defect repair strategies, without the complications of photoresist imaging. Furthermore, by measuring the continuously varying intensity distribution instead of a thresholded, binary resist image, aerial image measurement can be used as feedback to improve mask and lithography system modeling methods. Interest in EUV, at-wavelength, aerial image measurement lead to the creation of several research tools worldwide. These tools are used in advanced mask development work, and in the evaluation of the need for commercial at-wavelength inspection tools. They describe performance measurements of two such tools, inspecting the same EUV mask in a series of benchmarking tests that includes brightfield and darkfield patterns. One tool is the SEMATECH Berkeley Actinic Inspection Tool (AIT) operating on a bending magnet beamline at Lawrence Berkeley National Laboratory's Advanced Light Source. The AIT features an EUV Fresnel zoneplate microscope that emulates the numerical aperture of a 0.25-NA stepper, and projects the aerial image directly onto a CCD camera, with 700x magnification. The second tool is an EUV microscope (EUVM) operating at the NewSUBARU synchrotron in Hyogo, Japan. The NewSUBARU tool projects the aerial image using a reflective, 30x Schwarzschild objective lens, followed by a 10-200x x-ray zooming tube. The illumination conditions and the imaging etendue are different for the two tools. The benchmarking measurements were used to determine many imaging and performance properties of the tools, including resolution, modulation transfer function (MTF), aberration magnitude, aberration field-dependence (including focal-plane tilt), illumination uniformity, line-edge roughness, and flare

A solar tornado triggered by flares?

OpenAIRE

Panesar, N. K.; Innes, D. E.; Tiwari, S. K.; Low, B. C.

2013-01-01

Context. Solar tornados are dynamical, conspicuously helical magnetic structures that are mainly observed as a prominence activity. Aims. We investigate and propose a triggering mechanism for the solar tornado observed in a prominence cavity by SDO/AIA on September 25, 2011. Methods. High-cadence EUV images from the SDO/AIA and the Ahead spacecraft of STEREO/EUVI are used to correlate three flares in the neighbouring active-region (NOAA 11303) and their EUV waves with the dynamical de...

The absolute chronology and thermal processing of solids in the solar protoplanetary disk

DEFF Research Database (Denmark)

Connelly, James; Bizzarro, Martin; Krot, Alexander N.

2012-01-01

Transient heating events that formed calcium-aluminum - rich inclusions (CAIs) and chondrules are fundamental processes in the evolution of the solar protoplanetary disk, but their chronology is not understood. Using U-corrected Pb-Pb dating, we determined absolute ages of individual CAIs and cho...

Space Solar Patrol data and changes in weather and climate, including global warming

International Nuclear Information System (INIS)

Avakyan, S V; Leonov, N B; Voronin, N A; Baranova, L A; Savinov, E P

2010-01-01

In this paper, the results obtained during the execution of several ISTC projects are presented. The general aim of these projects has been the study of global changes in the environment, connected with solar activity. A brief description of the optical apparatus of the Space Solar Patrol (SSP) developed and built in the framework of the ISTC projects 385, 385.2, 1523 and 2500 is given. The SSP is intended for permanent monitoring of spectra and absolute fluxes of soft x-ray and extreme ultraviolet (x-ray/EUV) radiation from the full disk of the Sun which ionizes the upper atmosphere of the Earth. Permanent solar monitoring in the main part of the ionizing radiation spectra 0.8–115 (119) nm does not exist. The apparatus of the SSP was developed in the years 1996–2005 with multiyear experience of developing such apparatus in S I Vavilov State Optical Institute. The basis of this apparatus is the use of unique detectors of ionizing radiation—open secondary electron multipliers, which are 'solar blind' to near UV, visible and IR radiation from the Sun, and new methodology of these solar spectroradiometric absolute measurements. The prospects are discussed of using the SSP data for the investigation and forecast of the influence of solar variability on the weather and climate including global warming and also on the biosphere including human beings (proposal 3878)

A Long-Term Dissipation of the EUV He ii (30.4 nm) Segmentation in Full-Disk Solar Images

Science.gov (United States)

Didkovsky, Leonid

2018-06-01

Some quiet-Sun days observed by the Atmospheric Imaging Assembly (AIA) on-board the Solar Dynamics Observatory (SDO) during the time interval in 2010 - 2017 were used to continue our previous analyses reported by Didkovsky and Gurman ( Solar Phys. 289, 153, 2014a) and Didkovsky, Wieman, and Korogodina ( Solar Phys. 292, 32, 2017). The analysis consists of determining and comparing spatial spectral ratios (spectral densities over some time interval) from spatial (segmentation-cell length) power spectra. The ratios were compared using modeled compatible spatial frequencies for spectra from the Extreme ultraviolet Imaging Telescope (EIT) on-board the Solar and Heliospheric Observatory (SOHO) and from AIA images. With the new AIA data added to the EIT data we analyzed previously, the whole time interval from 1996 to 2017 reported here is approximately the length of two "standard" solar cycles (SC). The spectral ratios of segmentation-cell dimension structures show a significant and steady increase with no detected indication of SC-related returns to the values that characterize the SC minima. This increase in spatial power at high spatial frequencies is interpreted as a dissipation of medium-size EUV network structures to smaller-size structures in the transition region. Each of the latest ratio changes for 2010 through 2017 spectra calculated for a number of consecutive short-term intervals has been converted into monthly mean ratio (MMR) changes. The MMR values demonstrate variable sign and magnitudes, thus confirming the solar nature of the changes. These changes do not follow a "typical" trend of instrumental degradation or a long-term activity profile from the He ii (30.4 nm) irradiance measured by the Extreme ultraviolet Spectrophotometer (ESP) either. The ESP is a channel of the Extreme ultraviolet Variability Experiment (EVE) on-board SDO.

Fundamentals of EUV resist-inorganic hardmask interactions

Science.gov (United States)

Goldfarb, Dario L.; Glodde, Martin; De Silva, Anuja; Sheshadri, Indira; Felix, Nelson M.; Lionti, Krystelle; Magbitang, Teddie

2017-03-01

High resolution Extreme Ultraviolet (EUV) patterning is currently limited by EUV resist thickness and pattern collapse, thus impacting the faithful image transfer into the underlying stack. Such limitation requires the investigation of improved hardmasks (HMs) as etch transfer layers for EUV patterning. Ultrathin (<5nm) inorganic HMs can provide higher etch selectivity, lower post-etch LWR, decreased defectivity and wet strippability compared to spin-on hybrid HMs (e.g., SiARC), however such novel layers can induce resist adhesion failure and resist residue. Therefore, a fundamental understanding of EUV resist-inorganic HM interactions is needed in order to optimize the EUV resist interfacial behavior. In this paper, novel materials and processing techniques are introduced to characterize and improve the EUV resist-inorganic HM interface. HM surface interactions with specific EUV resist components are evaluated for open-source experimental resist formulations dissected into its individual additives using EUV contrast curves as an effective characterization method to determine post-development residue formation. Separately, an alternative adhesion promoter platform specifically tailored for a selected ultrathin inorganic HM based on amorphous silicon (aSi) is presented and the mitigation of resist delamination is exemplified for the cases of positive-tone and negative-tone development (PTD, NTD). Additionally, original wafer priming hardware for the deposition of such novel adhesion promoters is unveiled. The lessons learned in this work can be directly applied to the engineering of EUV resist materials and processes specifically designed to work on such novel HMs.

Error Budget for a Calibration Demonstration System for the Reflected Solar Instrument for the Climate Absolute Radiance and Refractivity Observatory

Science.gov (United States)

Thome, Kurtis; McCorkel, Joel; McAndrew, Brendan

2013-01-01

A goal of the Climate Absolute Radiance and Refractivity Observatory (CLARREO) mission is to observe highaccuracy, long-term climate change trends over decadal time scales. The key to such a goal is to improving the accuracy of SI traceable absolute calibration across infrared and reflected solar wavelengths allowing climate change to be separated from the limit of natural variability. The advances required to reach on-orbit absolute accuracy to allow climate change observations to survive data gaps exist at NIST in the laboratory, but still need demonstration that the advances can move successfully from to NASA and/or instrument vendor capabilities for spaceborne instruments. The current work describes the radiometric calibration error budget for the Solar, Lunar for Absolute Reflectance Imaging Spectroradiometer (SOLARIS) which is the calibration demonstration system (CDS) for the reflected solar portion of CLARREO. The goal of the CDS is to allow the testing and evaluation of calibration approaches, alternate design and/or implementation approaches and components for the CLARREO mission. SOLARIS also provides a test-bed for detector technologies, non-linearity determination and uncertainties, and application of future technology developments and suggested spacecraft instrument design modifications. The resulting SI-traceable error budget for reflectance retrieval using solar irradiance as a reference and methods for laboratory-based, absolute calibration suitable for climatequality data collections is given. Key components in the error budget are geometry differences between the solar and earth views, knowledge of attenuator behavior when viewing the sun, and sensor behavior such as detector linearity and noise behavior. Methods for demonstrating this error budget are also presented.

SOLAR SOURCES OF 3He-RICH SOLAR ENERGETIC PARTICLE EVENTS IN SOLAR CYCLE 24

International Nuclear Information System (INIS)

Nitta, Nariaki V.; Mason, Glenn M.; Wang, Linghua; Cohen, Christina M. S.; Wiedenbeck, Mark E.

2015-01-01

Using high-cadence EUV images obtained by the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamics Observatory, we investigate the solar sources of 26 3 He-rich solar energetic particle events at ≲1 MeV nucleon −1 that were well-observed by the Advanced Composition Explorer during solar cycle 24. Identification of the solar sources is based on the association of 3 He-rich events with type III radio bursts and electron events as observed by Wind. The source locations are further verified in EUV images from the Solar and Terrestrial Relations Observatory, which provides information on solar activities in the regions not visible from the Earth. Based on AIA observations, 3 He-rich events are not only associated with coronal jets as emphasized in solar cycle 23 studies, but also with more spatially extended eruptions. The properties of the 3 He-rich events do not appear to be strongly correlated with those of the source regions. As in the previous studies, the magnetic connection between the source region and the observer is not always reproduced adequately by the simple potential field source surface model combined with the Parker spiral. Instead, we find a broad longitudinal distribution of the source regions extending well beyond the west limb, with the longitude deviating significantly from that expected from the observed solar wind speed

EUV observations of the active Sun from the Havard experiment on ATM

International Nuclear Information System (INIS)

Noyes, R.W.; Foukal, P.V.; Huber, M.C.E.; Reeves, E.M.; Schmahl, E.J.; Timothy, J.G.; Vernazza, J.E.; Withbroe, G.L.

1975-01-01

The authors review some preliminary results from the Harvard College Observatory Extreme Ultraviolet Spectroheliometer on ATM that pertain to solar activity. The results reviewed are described in more detail in other papers referred to in the text. They first describe the instrument and its capabilities, and then turm to results on active regions, sunspots, flares, EUV bright points, coronal holes, and prominences. (Auth.)

CONTRIBUTION OF VELOCITY VORTICES AND FAST SHOCK REFLECTION AND REFRACTION TO THE FORMATION OF EUV WAVES IN SOLAR ERUPTIONS

Energy Technology Data Exchange (ETDEWEB)

Wang, Hongjuan; Liu, Siqing; Gong, Jiancun [Center for Space Science and Applied Research, Chinese Academy of Sciences, Beijing 100190 (China); Wu, Ning [School of Tourism and Geography, Yunnan Normal University, Kunming, Yunnan 650031 (China); Lin, Jun [Yunnan Observatories, Chinese Academy of Sciences, Kunming, Yunnan 650011 (China)

2015-06-01

We numerically study the detailed evolutionary features of the wave-like disturbance and its propagation in the eruption. This work is a follow-up to Wang et al., using significantly upgraded new simulations. We focus on the contribution of the velocity vortices and the fast shock reflection and refraction in the solar corona to the formation of the EUV waves. Following the loss of equilibrium in the coronal magnetic structure, the flux rope exhibits rapid motions and invokes the fast-mode shock at the front of the rope, which then produces a type II radio burst. The expansion of the fast shock, which is associated with outward motion, takes place in various directions, and the downward expansion shows the reflection and the refraction as a result of the non-uniform background plasma. The reflected component of the fast shock propagates upward and the refracted component propagates downward. As the refracted component reaches the boundary surface, a weak echo is excited. The Moreton wave is invoked as the fast shock touches the bottom boundary, so the Moreton wave lags the type II burst. A secondary echo occurs in the area where reflection of the fast shock encounters the slow-mode shock, and the nearby magnetic field lines are further distorted because of the interaction between the secondary echo and the velocity vortices. Our results indicate that the EUV wave may arise from various processes that are revealed in the new simulations.

NEW SOLAR EXTREME-ULTRAVIOLET IRRADIANCE OBSERVATIONS DURING FLARES

International Nuclear Information System (INIS)

Woods, Thomas N.; Hock, Rachel; Eparvier, Frank; Jones, Andrew R.; Chamberlin, Phillip C.; Klimchuk, James A.; Didkovsky, Leonid; Judge, Darrell; Mariska, John; Warren, Harry; Schrijver, Carolus J.; Webb, David F.; Bailey, Scott; Tobiska, W. Kent

2011-01-01

New solar extreme-ultraviolet (EUV) irradiance observations from the NASA Solar Dynamics Observatory (SDO) EUV Variability Experiment provide full coverage in the EUV range from 0.1 to 106 nm and continuously at a cadence of 10 s for spectra at 0.1 nm resolution and even faster, 0.25 s, for six EUV bands. These observations can be decomposed into four distinct characteristics during flares. First, the emissions that dominate during the flare's impulsive phase are the transition region emissions, such as the He II 30.4 nm. Second, the hot coronal emissions above 5 MK dominate during the gradual phase and are highly correlated with the GOES X-ray. A third flare characteristic in the EUV is coronal dimming, seen best in the cool corona, such as the Fe IX 17.1 nm. As the post-flare loops reconnect and cool, many of the EUV coronal emissions peak a few minutes after the GOES X-ray peak. One interesting variation of the post-eruptive loop reconnection is that warm coronal emissions (e.g., Fe XVI 33.5 nm) sometimes exhibit a second large peak separated from the primary flare event by many minutes to hours, with EUV emission originating not from the original flare site and its immediate vicinity, but rather from a volume of higher loops. We refer to this second peak as the EUV late phase. The characterization of many flares during the SDO mission is provided, including quantification of the spectral irradiance from the EUV late phase that cannot be inferred from GOES X-ray diagnostics.

Update on EUV radiometry at PTB

Science.gov (United States)

Laubis, Christian; Barboutis, Annett; Buchholz, Christian; Fischer, Andreas; Haase, Anton; Knorr, Florian; Mentzel, Heiko; Puls, Jana; Schönstedt, Anja; Sintschuk, Michael; Soltwisch, Victor; Stadelhoff, Christian; Scholze, Frank

2016-03-01

The development of technology infrastructure for EUV Lithography (EUVL) still requires higher levels of technology readiness in many fields. A large number of new materials will need to be introduced. For example, development of EUV compatible pellicles to adopt an approved method from optical lithography for EUVL needs completely new thin membranes which have not been available before. To support these developments, PTB with its decades of experience [1] in EUV metrology [2] provides a wide range of actinic and non actinic measurements at in-band EUV wavelengths as well as out of band. Two dedicated, complimentary EUV beamlines [3] are available for radiometric [4,5] characterizations benefiting from small divergence or from adjustable spot size respectively. The wavelength range covered reaches from below 1 nm to 45 nm [6] for the EUV beamlines [7] to longer wavelengths if in addition the VUV beamline is employed. The standard spot size is 1 mm by 1 mm with an option to go as low as 0.1 mm to 0.1 mm. A separate beamline offers an exposure setup. Exposure power levels of 20 W/cm2 have been employed in the past, lower fluencies are available by attenuation or out of focus exposure. Owing to a differential pumping stage, the sample can be held under defined gas conditions during exposure. We present an updated overview on our instrumentation and analysis capabilities for EUV metrology and provide data for illustration.

EUV polarimetry for thin film and surface characterization and EUV phase retarder reflector development.

Science.gov (United States)

Gaballah, A E H; Nicolosi, P; Ahmed, Nadeem; Jimenez, K; Pettinari, G; Gerardino, A; Zuppella, P

2018-01-01

The knowledge and the manipulation of light polarization state in the vacuum ultraviolet and extreme ultraviolet (EUV) spectral regions play a crucial role from materials science analysis to optical component improvements. In this paper, we present an EUV spectroscopic ellipsometer facility for polarimetry in the 90-160 nm spectral range. A single layer aluminum mirror to be used as a quarter wave retarder has been fully characterized by deriving the optical and structural properties from the amplitude component and phase difference δ measurements. The system can be suitable to investigate the properties of thin films and optical coatings and optics in the EUV region.

Mg IX emission lines in an active region spectrum obtained with the Solar EUV Rocket Telescope and Spectrograph (SERTS)

Science.gov (United States)

Keenan, F. P.; Thomas, R. J.; Neupert, W. M.; Conlon, E. S.

1994-01-01

Theoretical electron-temperature-sensitive Mg IX emission line ratios are presented for R(sub 1) = I(443.96 A)/I(368.06 A), R(sub 2) = I(439.17 A)/I(368.06 A), R(sub 3) = I(443.37 A)/I(368.06 A), R(sub 4) = I(441.22 A)/I(368.06 A), and R(sub 5) = I(448.28 A)/I(368.06 A). A comparison of these with observational data for a solar active region, obtained during a rocket flight by the Solar EUV Rocket Telescope and Spectrograph (SERTS), reveals excellent agreement between theory and observation for R(sub 1) through R(sub 4), with discrepancies that average only 9%. This provides experimental support for the accuracy of the atomic data adopted in the line ratio calculations, and also resolves discrepancies found previously when the theoretical results were compared with solar data from the S082A instrument on board Skylab. However in the case of R(sub 5), the theoretical and observed ratios differ by almost a factor of 2. This may be due to the measured intensity of the 448.28 A line being seriously affected by instrumental effects, as it lies very close to the long wavelength edge of the SERTS spectral coverage (235.46-448.76 A).

Analytical techniques for mechanistic characterization of EUV photoresists

Science.gov (United States)

Grzeskowiak, Steven; Narasimhan, Amrit; Murphy, Michael; Ackerman, Christian; Kaminsky, Jake; Brainard, Robert L.; Denbeaux, Greg

2017-03-01

Extreme ultraviolet (EUV, 13.5 nm) lithography is the prospective technology for high volume manufacturing by the microelectronics industry. Significant strides towards achieving adequate EUV source power and availability have been made recently, but a limited rate of improvement in photoresist performance still delays the implementation of EUV. Many fundamental questions remain to be answered about the exposure mechanisms of even the relatively well understood chemically amplified EUV photoresists. Moreover, several groups around the world are developing revolutionary metal-based resists whose EUV exposure mechanisms are even less understood. Here, we describe several evaluation techniques to help elucidate mechanistic details of EUV exposure mechanisms of chemically amplified and metal-based resists. EUV absorption coefficients are determined experimentally by measuring the transmission through a resist coated on a silicon nitride membrane. Photochemistry can be evaluated by monitoring small outgassing reaction products to provide insight into photoacid generator or metal-based resist reactivity. Spectroscopic techniques such as thin-film Fourier transform infrared (FTIR) spectroscopy can measure the chemical state of a photoresist system pre- and post-EUV exposure. Additionally, electrolysis can be used to study the interaction between photoresist components and low energy electrons. Collectively, these techniques improve our current understanding of photomechanisms for several EUV photoresist systems, which is needed to develop new, better performing materials needed for high volume manufacturing.

A novel technique to measure intensity fluctuations in EUV images and to detect coronal sound waves nearby active regions

Science.gov (United States)

Stenborg, G.; Marsch, E.; Vourlidas, A.; Howard, R.; Baldwin, K.

2011-02-01

Context. In the past years, evidence for the existence of outward-moving (Doppler blue-shifted) plasma and slow-mode magneto-acoustic propagating waves in various magnetic field structures (loops in particular) in the solar corona has been found in ultraviolet images and spectra. Yet their origin and possible connection to and importance for the mass and energy supply to the corona and solar wind is still unclear. There has been increasing interest in this problem thanks to the high-resolution observations available from the extreme ultraviolet (EUV) imagers on the Solar TErrestrial RElationships Observatory (STEREO) and the EUV spectrometer on the Hinode mission. Aims: Flows and waves exist in the corona, and their signatures appear in EUV imaging observations but are extremely difficult to analyse quantitatively because of their weak intensity. Hence, such information is currently available mostly from spectroscopic observations that are restricted in their spatial and temporal coverage. To understand the nature and origin of these fluctuations, imaging observations are essential. Here, we present measurements of the speed of intensity fluctuations observed along apparently open field lines with the Extreme UltraViolet Imagers (EUVI) onboard the STEREO mission. One aim of our paper is to demonstrate that we can make reliable kinematic measurements from these EUV images, thereby complementing and extending the spectroscopic measurements and opening up the full corona for such an analysis. Another aim is to examine the assumptions that lead to flow versus wave interpretation for these fluctuations. Methods: We have developed a novel image-processing method by fusing well established techniques for the kinematic analysis of coronal mass ejections (CME) with standard wavelet analysis. The power of our method lies with its ability to recover weak intensity fluctuations along individual magnetic structures at any orientation , anywhere within the full solar disk , and

Non-Potential Magnetic Fields and Magnetic Reconnection In Low Collisional Plasmas-Discovery of Solar EUV Mini-Sigmoids and Development of Novel In-Space Propulsion Systems

Science.gov (United States)

Chesny, David

Magnetic reconnection is the source of many of the most powerful explosions of astrophysical plasmas in the universe. Blazars, magnetars, stellar atmospheres, and planetary magnetic fields have all been shown to be primary sites of strong reconnection events. For studying the fundamental physics behind this process, the solar atmosphere is our most accessible laboratory setting. Magnetic reconnection resulting from non-potential fields leads to plasma heating and particle acceleration, often in the form of explosive activity, contributing to coronal heating and the solar wind. Large-scale non-potential (sigmoid) fields in the solar atmosphere are poorly understood due to their crowded neighborhoods. For the first time, small-scale, non-potential loop structures have been observed in quiet Sun EUV observations. Fourteen unique mini-sigmoid events and three diffuse non-potential loops have been discovered, suggesting a multi-scaled self-similarity in the sigmoid formation process. These events are on the order of 10 arcseconds in length and do not appear in X-ray emissions, where large-scale sigmoids are well documented. We have discovered the first evidence of sigmoidal structuring in EUV bright point phenomena, which are prolific events in the solar atmosphere. Observations of these mini-sigmoids suggest that they are being formed via tether-cutting reconnection, a process observed to occur at active region scales. Thus, tether-cutting is suggested to be ubiquitous throughout the solar atmosphere. These dynamics are shown to be a function of the free magnetic energy in the quiet Sun network. Recently, the reconnection process has been reproduced in Earth-based laboratory tokamaks. Easily achievable magnetic field configurations can induce reconnection and result in ion acceleration. Here, magnetic reconnection is utilized as the plasma acceleration mechanism for a theoretical propulsion system. The theory of torsional spine reconnection is shown to result in ion

SOLAR PHOTOIONIZATION RATES FOR INTERSTELLAR NEUTRALS IN THE INNER HELIOSPHERE: H, He, O, AND Ne

Energy Technology Data Exchange (ETDEWEB)

Bochsler, P.; Kucharek, H.; Möbius, E. [Space Science Center and Department of Physics, University of New Hampshire, Durham, NH 03824 (United States); Bzowski, Maciej; Sokół, Justyna M. [Space Research Center of the Polish Academy of Sciences, Ul. Bartycka 18A, 00-716 Warsaw (Poland); Didkovsky, Leonid; Wieman, Seth, E-mail: bochsler@space.unibe.ch [Space Sciences Center, University of Southern California, Los Angeles, CA 90089-1341 (United States)

2014-01-01

Extreme UV (EUV) spectra from the Thermosphere Ionosphere Mesosphere Energetics and Dynamics (TIMED)/Solar EUV Experiment are used to infer photoionization rates in the inner heliosphere. Relating these rates to various proxies describing the solar EUV radiation, we construct a multi-linear model which allows us to extrapolate ionization rates back to periods when no routine measurements of the solar EUV spectral distribution have been available. Such information is important, e.g., for comparing conditions of the interstellar neutral particles in the inner heliosphere at the time of Ulysses/GAS observations with conditions during the more recent observations of the Interstellar Boundary Explorer. From a period of 11 yr when detailed spectra from both TIMED and three proxies—Solar and Heliospheric Observatory/CELIAS/SEM-rates, F10.7 radio flux, and Mg II core-to-wing indices—have been available, we conclude that the simple model is able to reproduce the photoionization rates with an uncertainty of typically 5%.

Surface roughness control by extreme ultraviolet (EUV) radiation

Science.gov (United States)

Ahad, Inam Ul; Obeidi, Muhannad Ahmed; Budner, Bogusław; Bartnik, Andrzej; Fiedorowicz, Henryk; Brabazon, Dermot

2017-10-01

Surface roughness control of polymeric materials is often desirable in various biomedical engineering applications related to biocompatibility control, separation science and surface wettability control. In this study, Polyethylene terephthalate (PET) polymer films were irradiated with Extreme ultraviolet (EUV) photons in nitrogen environment and investigations were performed on surface roughness modification via EUV exposure. The samples were irradiated at 3 mm and 4 mm distance from the focal spot to investigate the effect of EUV fluence on topography. The topography of the EUV treated PET samples were studied by AFM. The detailed scanning was also performed on the sample irradiated at 3 mm. It was observed that the average surface roughness of PET samples was increased from 9 nm (pristine sample) to 280 nm and 253 nm for EUV irradiated samples. Detailed AFM studies confirmed the presence of 1.8 mm wide period U-shaped channels in EUV exposed PET samples. The walls of the channels were having FWHM of about 0.4 mm. The channels were created due to translatory movements of the sample in horizontal and transverse directions during the EUV exposure. The increased surface roughness is useful for many applications. The nanoscale channels fabricated by EUV exposure could be interesting for microfluidic applications based on lab-on-a-chip (LOC) devices.

Design and fabrication of advanced EUV diffractive elements

Energy Technology Data Exchange (ETDEWEB)

Naulleau, Patrick P.; Liddle, J. Alexander; Salmassi, Farhad; Anderson, Erik H.; Gullikson, Eric M.

2003-11-16

As extreme ultraviolet (EUV) lithography approaches commercial reality, the development of EUV-compatible diffractive structures becomes increasingly important. Such devices are relevant to many aspects of EUV technology including interferometry, illumination, and spectral filtering. Moreover, the current scarcity of high power EUV sources makes the optical efficiency of these diffractive structures a paramount concern. This fact has led to a strong interest in phase-enhanced diffractive structures. Here we describe recent advancements made in the fabrication of such devices.

SWAP OBSERVATIONS OF THE LONG-TERM, LARGE-SCALE EVOLUTION OF THE EXTREME-ULTRAVIOLET SOLAR CORONA

Energy Technology Data Exchange (ETDEWEB)

Seaton, Daniel B.; De Groof, Anik; Berghmans, David; Nicula, Bogdan [Royal Observatory of Belgium-SIDC, Avenue Circulaire 3, B-1180 Brussels (Belgium); Shearer, Paul [Department of Mathematics, 2074 East Hall, University of Michigan, 530 Church Street, Ann Arbor, MI 48109-1043 (United States)

2013-11-01

The Sun Watcher with Active Pixels and Image Processing (SWAP) EUV solar telescope on board the Project for On-Board Autonomy 2 spacecraft has been regularly observing the solar corona in a bandpass near 17.4 nm since 2010 February. With a field of view of 54 × 54 arcmin, SWAP provides the widest-field images of the EUV corona available from the perspective of the Earth. By carefully processing and combining multiple SWAP images, it is possible to produce low-noise composites that reveal the structure of the EUV corona to relatively large heights. A particularly important step in this processing was to remove instrumental stray light from the images by determining and deconvolving SWAP's point-spread function from the observations. In this paper, we use the resulting images to conduct the first-ever study of the evolution of the large-scale structure of the corona observed in the EUV over a three year period that includes the complete rise phase of solar cycle 24. Of particular note is the persistence over many solar rotations of bright, diffuse features composed of open magnetic fields that overlie polar crown filaments and extend to large heights above the solar surface. These features appear to be related to coronal fans, which have previously been observed in white-light coronagraph images and, at low heights, in the EUV. We also discuss the evolution of the corona at different heights above the solar surface and the evolution of the corona over the course of the solar cycle by hemisphere.

EUV mask process specifics and development challenges

Science.gov (United States)

Nesladek, Pavel

2014-07-01

EUV lithography is currently the favorite and most promising candidate among the next generation lithography (NGL) technologies. Decade ago the NGL was supposed to be used for 45 nm technology node. Due to introduction of immersion 193nm lithography, double/triple patterning and further techniques, the 193 nm lithography capabilities was greatly improved, so it is expected to be used successfully depending on business decision of the end user down to 10 nm logic. Subsequent technology node will require EUV or DSA alternative technology. Manufacturing and especially process development for EUV technology requires significant number of unique processes, in several cases performed at dedicated tools. Currently several of these tools as e.g. EUV AIMS or actinic reflectometer are not available on site yet. The process development is done using external services /tools with impact on the single unit process development timeline and the uncertainty of the process performance estimation, therefore compromises in process development, caused by assumption about similarities between optical and EUV mask made in experiment planning and omitting of tests are further reasons for challenges to unit process development. Increased defect risk and uncertainty in process qualification are just two examples, which can impact mask quality / process development. The aim of this paper is to identify critical aspects of the EUV mask manufacturing with respect to defects on the mask with focus on mask cleaning and defect repair and discuss the impact of the EUV specific requirements on the experiments needed.

Photoionization of atoms and molecules by intense EUV-FEL pulses and FEL seeded by high-order harmonic of ultrashort laser pulses

International Nuclear Information System (INIS)

Iwasaki, Atsushi; Owada, Shigeki; Yamanouchi, Kaoru; Sato, Takahiro; Nagasono, Mitsuru; Yabashi, Makina; Ishikawa, Tetsuya; Togashi, Tadashi; Takahashi, Eiji J.; Midorikawa, Katsumi; Aoyama, Makoto; Yamakawa, Koichi; Kannari, Fumihiko; Yagishita, Akira

2012-01-01

The advantages of SPring-8 Compact SASE Source as a light source for spectroscopic measurements in the extreme ultraviolet (EUV) wavelength region are introduced by referring to our recent study of non-linear photoionization processes of He, in which the absolute two-photon ionization cross sections of He at four different wavelengths in the 54 - 62 nm region were determined using intense pulses of the free-election laser (FEL). In addition, our recent effort to generate intense full-coherent EUV light pulses are introduced, in which significant amplification of the 13th harmonic of ultrashort laser pulses at 800 nm was achieved by FEL seeded with the 13th harmonic. (author)

Rocket flight of a multilayer coated high-density EUV toroidal grating

Science.gov (United States)

Keski-Kuha, Ritva A. M.; Thomas, Roger J.; Davila, Joseph M.

1992-01-01

A multilayer coated high density toroidal grating was flown on a sounding rocket experiment in the Solar EUV Rocket Telescope and Spectrograph (SERTS) instrument. To our knowledge this is the first space flight of a multilayer coated grating. Pre-flight performance evaluation showed that the application of a 10-layer Ir/Si multilayer coating to the 3600 l/mm blazed toroidal replica grating produced a factor of 9 enhancement in peak efficiency near the design wavelength around 30 nm in first order over the standard gold coating, with a measured EUV efficiency that peaked at 3.3 percent. In addition, the grating's spectral resolution of better than 5000 was maintained. The region of enhanced grating efficiency due to the multilayer coating is clearly evident in the flight data. Within the bandpass of the multilayer coating, the recorded film densities were roughly equivalent to those obtained with a factor of six longer exposure on the previous flight of the SERTS instrument.

Solar Magnetism eXplorer (Solme X)

Science.gov (United States)

Peter, Hardi; Abbo, L.; Andretta, V.; Auchere, F.; Bemporad, A.; Berrilli, F.; Bommier, V.; Cassini, R.; Curdt, W.; Davila, J.;

Destruction of Sun-Grazing Comet C-2011 N3 (SOHO) Within the Low Solar Corona

Science.gov (United States)

Schrijver, C. J.; Brown, J. C.; Battams, K.; Saint-Hilaire, P.; Liu, W.; Hudson, H.; Pesnell, W. D.

2012-01-01

Observations of comets in Sun-grazing orbits that survive solar insolation long enough to penetrate into the Suns inner corona provide information on the solar atmosphere and magnetic field as well as on the makeup of the comet. On 6 July 2011, the Solar Dynamics Observatory (SDO) observed the demise of comet C2011 N3 (SOHO) within the low solar corona in five wavelength bands in the extreme ultraviolet (EUV). The comet penetrated to within 0.146 solarradius (100,000 kilometers) of the solar surface before its EUV signal disappeared.

EUV laser produced and induced plasmas for nanolithography

Science.gov (United States)

Sizyuk, Tatyana; Hassanein, Ahmed

2017-10-01

EUV produced plasma sources are being extensively studied for the development of new technology for computer chips production. Challenging tasks include optimization of EUV source efficiency, producing powerful source in 2 percentage bandwidth around 13.5 nm for high volume manufacture (HVM), and increasing the lifetime of collecting optics. Mass-limited targets, such as small droplet, allow to reduce contamination of chamber environment and mirror surface damage. However, reducing droplet size limits EUV power output. Our analysis showed the requirement for the target parameters and chamber conditions to achieve 500 W EUV output for HVM. The HEIGHTS package was used for the simulations of laser produced plasma evolution starting from laser interaction with solid target, development and expansion of vapor/plasma plume with accurate optical data calculation, especially in narrow EUV region. Detailed 3D modeling of mix environment including evolution and interplay of plasma produced by lasers from Sn target and plasma produced by in-band and out-of-band EUV radiation in ambient gas, used for the collecting optics protection and cleaning, allowed predicting conditions in entire LPP system. Effect of these conditions on EUV photon absorption and collection was analyzed. This work is supported by the National Science Foundation, PIRE project.

Probing the Production of Extreme-ultraviolet Late-phase Solar Flares Using the Model Enthalpy-based Thermal Evolution of Loops

Science.gov (United States)

Dai, Yu; Ding, Mingde

2018-04-01

Recent observations in extreme-ultraviolet (EUV) wavelengths reveal an EUV late phase in some solar flares that is characterized by a second peak in warm coronal emissions (∼3 MK) several tens of minutes to a few hours after the soft X-ray (SXR) peak. Using the model enthalpy-based thermal evolution of loops (EBTEL), we numerically probe the production of EUV late-phase solar flares. Starting from two main mechanisms of producing the EUV late phase, i.e., long-lasting cooling and secondary heating, we carry out two groups of numerical experiments to study the effects of these two processes on the emission characteristics in late-phase loops. In either of the two processes an EUV late-phase solar flare that conforms to the observational criteria can be numerically synthesized. However, the underlying hydrodynamic and thermodynamic evolutions in late-phase loops are different between the two synthetic flare cases. The late-phase peak due to a long-lasting cooling process always occurs during the radiative cooling phase, while that powered by a secondary heating is more likely to take place in the conductive cooling phase. We then propose a new method for diagnosing the two mechanisms based on the shape of EUV late-phase light curves. Moreover, from the partition of energy input, we discuss why most solar flares are not EUV late flares. Finally, by addressing some other factors that may potentially affect the loop emissions, we also discuss why the EUV late phase is mainly observed in warm coronal emissions.

Space Solar Patrol data and changes in weather and climate, including global warming

Science.gov (United States)

Avakyan, S. V.; Baranova, L. A.; Leonov, N. B.; Savinov, E. P.; Voronin, N. A.

2010-08-01

In this paper, the results obtained during the execution of several ISTC projects are presented. The general aim of these projects has been the study of global changes in the environment, connected with solar activity. A brief description of the optical apparatus of the Space Solar Patrol (SSP) developed and built in the framework of the ISTC projects 385, 385.2, 1523 and 2500 is given. The SSP is intended for permanent monitoring of spectra and absolute fluxes of soft x-ray and extreme ultraviolet (x-ray/EUV) radiation from the full disk of the Sun which ionizes the upper atmosphere of the Earth. Permanent solar monitoring in the main part of the ionizing radiation spectra 0.8-115 (119) nm does not exist. The apparatus of the SSP was developed in the years 1996-2005 with multiyear experience of developing such apparatus in S I Vavilov State Optical Institute. The basis of this apparatus is the use of unique detectors of ionizing radiation—open secondary electron multipliers, which are 'solar blind' to near UV, visible and IR radiation from the Sun, and new methodology of these solar spectroradiometric absolute measurements. The prospects are discussed of using the SSP data for the investigation and forecast of the influence of solar variability on the weather and climate including global warming and also on the biosphere including human beings (proposal 3878). This article was originally submitted for inclusion with the papers from the 9th International Symposium on Measurement Science and Intelligent Instruments (ISMTII-2009), published in the May 2010 issue.

Multi-wavelength imaging of solar plasma. High-beta disruption model of solar flares

International Nuclear Information System (INIS)

Shibasaki, Kiyoto

2007-01-01

Solar atmosphere is filled with plasma and magnetic field. Activities in the atmosphere are due to plasma instabilities in the magnetic field. To understand the physical mechanisms of activities / instabilities, it is necessary to know the physical conditions of magnetized plasma, such as temperature, density, magnetic field, and their spatial structures and temporal developments. Multi-wavelength imaging is essential for this purpose. Imaging observations of the Sun at microwave, X-ray, EUV and optical ranges are routinely going on. Due to free exchange of original data among solar physics and related field communities, we can easily combine images covering wide range of spectrum. Even under such circumstances, we still do not understand the cause of activities in the solar atmosphere well. The current standard model of solar activities is based on magnetic reconnection: release of stored magnetic energy by reconnection is the cause of solar activities on the Sun such as solar flares. However, recent X-ray, EUV and microwave observations with high spatial and temporal resolution show that dense plasma is involved in activities from the beginning. Based on these observations, I propose a high-beta model of solar activities, which is very similar to high-beta disruptions in magnetically confined fusion experiments. (author)

ASSOCIATION OF {sup 3}He-RICH SOLAR ENERGETIC PARTICLES WITH LARGE-SCALE CORONAL WAVES

Energy Technology Data Exchange (ETDEWEB)

Bučík, Radoslav [Institut für Astrophysik, Georg-August-Universität Göttingen, D-37077, Göttingen (Germany); Innes, Davina E. [Max-Planck-Institut für Sonnensystemforschung, D-37077, Göttingen (Germany); Mason, Glenn M. [Applied Physics Laboratory, Johns Hopkins University, Laurel, MD 20723 (United States); Wiedenbeck, Mark E., E-mail: bucik@mps.mpg.de [Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109 (United States)

2016-12-10

Small, {sup 3}He-rich solar energetic particle (SEP) events have been commonly associated with extreme-ultraviolet (EUV) jets and narrow coronal mass ejections (CMEs) that are believed to be the signatures of magnetic reconnection, involving field lines open to interplanetary space. The elemental and isotopic fractionation in these events are thought to be caused by processes confined to the flare sites. In this study, we identify 32 {sup 3}He-rich SEP events observed by the Advanced Composition Explorer , near the Earth, during the solar minimum period 2007–2010, and we examine their solar sources with the high resolution Solar Terrestrial Relations Observatory ( STEREO ) EUV images. Leading the Earth, STEREO -A has provided, for the first time, a direct view on {sup 3}He-rich flares, which are generally located on the Sun’s western hemisphere. Surprisingly, we find that about half of the {sup 3}He-rich SEP events in this survey are associated with large-scale EUV coronal waves. An examination of the wave front propagation, the source-flare distribution, and the coronal magnetic field connections suggests that the EUV waves may affect the injection of {sup 3}He-rich SEPs into interplanetary space.

Analysis and characterization of contamination in EUV reticles

Science.gov (United States)

Okoroanyanwu, Uzodinma; Dittmar, Kornelia; Fahr, Torsten; Wallow, Tom; La Fontaine, Bruno; Wood, Obert; Holfeld, Christian; Bubke, Karsten; Peters, Jan-Hendrik

2010-04-01

A host of complementary imaging techniques (Scanning Electron Microscopy), surface analytical technique (Auger Electron Spectroscopy, AES), chemical analytical and speciation techniques (Grazing Incidence Reflectance Fourier-Transform Infrared Spectroscopy, GIR-FTIR; and Raman spectroscopy) have been assessed for their sensitivity and effectiveness in analyzing contamination on three EUV reticles that were contaminated to varying degrees. The first reticle was contaminated as a result of its exposure experience on the SEMATECH EUV Micro Exposure Tool (MET) at Lawrence Berkeley National Laboratories, where it was exposed to up to 80 hours of EUV radiation. The second reticle was a full-field reticle, specifically designed to monitor molecular contamination, and exposed to greater than 1600J/cm2 of EUV radiation on the ASML Alpha Demo Tool (ADT) in Albany Nanotech in New York. The third reticle was intentionally contaminated with hydrocarbons in the Microscope for Mask Imaging and Contamination Studies (MIMICS) tool at the College of Nanoscale Sciences of State University of New York at Albany. The EUV reflectivities of some of these reticles were measured on the Advanced Light Source EUV Reflectomer at Lawrence Berkeley National Laboratories and PTB Bessy in Berlin, respectively. Analysis and characterization of thin film contaminants on the two EUV reticles exposed to varying degrees of EUV radiation in both MET and ADT confirm that the two most common contamination types are carbonization and surface oxidation, mostly on the exposed areas of the reticle, and with the MET being significantly more susceptible to carbon contamination than the ADT. While AES in both surface scanning and sputter mode is sensitive and efficient in analyzing thin contaminant films (of a few nanometers), GIRFTIR is sensitive to thick films (of order of a 100 nm or more on non-infra-red reflecting substrates), Raman spectroscopy is not compatible with analyzing such contaminants because of

First environmental data from the EUV engineering test stand

Science.gov (United States)

Klebanoff, Leonard E.; Malinowski, Michael E.; Grunow, Philip A.; Clift, W. Miles; Steinhaus, Chip; Leung, Alvin H.; Haney, Steven J.

2001-08-01

The first environmental data from the Engineering Test Stand (ETS) has been collected. Excellent control of high-mass hydrocarbons has been observed. This control is a result of extensive outgas testing of components and materials, vacuum compatible design of the ETS, careful cleaning of parts and pre-baking of cables and sub assemblies where possible, and clean assembly procedures. As a result of the hydrocarbon control, the residual ETS vacuum environment is rich in water vapor. Analysis of witness plate data indicates that the ETS environment does not pose a contamination risk to the optics in the absence of EUV irradiation. However, with EUV exposure, the water rich environment can lead to EUV- induced water oxidation of the Si-terminated Mo/Si optics. Added ethanol can prevent optic oxidation, allowing carbon growth via EUV cracking of low-level residual hydrocarbons to occur. The EUV environmental issues are understood, mitigation approaches have been validated, and EUV optic contamination appears to be manageable.

Absolute photometry of the corona of July 10, 1972 total solar eclipse

Energy Technology Data Exchange (ETDEWEB)

Khetsuriani, Ts.S.; Tetruashvili, Eh.I.

1985-01-01

The observations were carried out by the Abastumani astrophysical observatory expedition at July 10.1972 total solar eclipse from a site of the Chukotka Peninsula. The photometry of the corona images is performed by the equidensity method having expressed the intensities in absolute units. The F and K components of the corona are separated on the basis of photometric and polarisation data. The variations of the electron concentration with the distance from the centre of the Sun and tempeatures at various distances are calculated.

Novel EUV photoresist for sub-7nm node (Conference Presentation)

Science.gov (United States)

Furukawa, Tsuyoshi; Naruoka, Takehiko; Nakagawa, Hisashi; Miyata, Hiromu; Shiratani, Motohiro; Hori, Masafumi; Dei, Satoshi; Ayothi, Ramakrishnan; Hishiro, Yoshi; Nagai, Tomoki

2017-04-01

Extreme ultraviolet (EUV) lithography has been recognized as a promising candidate for the manufacturing of semiconductor devices as LS and CH pattern for 7nm node and beyond. EUV lithography is ready for high volume manufacturing stage. For the high volume manufacturing of semiconductor devices, significant improvement of sensitivity and line edge roughness (LWR) and Local CD Uniformity (LCDU) is required for EUV resist. It is well-known that the key challenge for EUV resist is the simultaneous requirement of ultrahigh resolution (R), low line edge roughness (L) and high sensitivity (S). Especially high sensitivity and good roughness is important for EUV lithography high volume manufacturing. We are trying to improve sensitivity and LWR/LCDU from many directions. From material side, we found that both sensitivity and LWR/LCDU are simultaneously improved by controlling acid diffusion length and efficiency of acid generation using novel resin and PAG. And optimizing EUV integration is one of the good solution to improve sensitivity and LWR/LCDU. We are challenging to develop new multi-layer materials to improve sensitivity and LWR/LCDU. Our new multi-layer materials are designed for best performance in EUV lithography system. From process side, we found that sensitivity was substantially improved maintaining LWR applying novel type of chemical amplified resist (CAR) and process. EUV lithography evaluation results obtained for new CAR EUV interference lithography. And also metal containing resist is one possibility to break through sensitivity and LWR trade off. In this paper, we will report the recent progress of sensitivity and LWR/LCDU improvement of JSR novel EUV resist and process.

Association of 3He-rich solar energetic particles with large-scale coronal waves

Science.gov (United States)

Bucik, Radoslav; Innes, Davina; Guo, Lijia; Mason, Glenn M.; Wiedenbeck, Mark

2016-07-01

Impulsive or 3He-rich solar energetic particle (SEP) events have been typically associated with jets or small EUV brightenings. We identify 30 impulsive SEP events from ACE at L1 during the solar minimum period 2007-2010 and examine their solar sources with high resolution STEREO-A EUV images. At beginning of 2007, STEREO-A was near the Earth while at the end of the investigated period, when there were more events, STEREO-A was leading the Earth by 90°. Thus STEREO-A provided a better (more direct) view on 3He-rich flares generally located on the western Sun's hemisphere. Surprisingly, we find that about half of the events are associated with large-scale EUV coronal waves. This finding provides new insights on acceleration and transport of 3He-rich SEPs in solar corona. It is believed that elemental and isotopic fractionation in impulsive SEP events is caused by more localized processes operating in the flare sites. The EUV waves have been reported in gradual SEP events in association with fast coronal mass ejections. To examine their role on 3He-rich SEPs production the energy spectra and relative abundances are discussed. R. Bucik is supported by the Deutsche Forschungsgemeinschaft under grant BU 3115/2-1.

X-RAY AND EUV OBSERVATIONS OF SIMULTANEOUS SHORT AND LONG PERIOD OSCILLATIONS IN HOT CORONAL ARCADE LOOPS

International Nuclear Information System (INIS)

Kumar, Pankaj; Cho, Kyung-Suk; Nakariakov, Valery M.

2015-01-01

We report decaying quasi-periodic intensity oscillations in the X-ray (6–12 keV) and extreme-ultraviolet (EUV) channels (131, 94, 1600, 304 Å) observed by the Fermi Gamma-ray Burst Monitor and Solar Dynamics Observatory/Atmospheric Imaging Assembly (AIA), respectively, during a C-class flare. The estimated periods of oscillation and decay time in the X-ray channel (6–12 keV) were about 202 and 154 s, respectively. A similar oscillation period was detected at the footpoint of the arcade loops in the AIA 1600 and 304 Å channels. Simultaneously, AIA hot channels (94 and 131 Å) reveal propagating EUV disturbances bouncing back and forth between the footpoints of the arcade loops. The period of the oscillation and decay time were about 409 and 1121 s, respectively. The characteristic phase speed of the wave is about 560 km s −1 for about 115 Mm of loop length, which is roughly consistent with the sound speed at the temperature about 10–16 MK (480–608 km s −1 ). These EUV oscillations are consistent with the Solar and Heliospheric Observatory/Solar Ultraviolet Measurement of Emitted Radiation Doppler-shift oscillations interpreted as the global standing slow magnetoacoustic wave excited by a flare. The flare occurred at one of the footpoints of the arcade loops, where the magnetic topology was a 3D fan-spine with a null-point. Repetitive reconnection at this footpoint could have caused the periodic acceleration of non-thermal electrons that propagated to the opposite footpoint along the arcade and that are precipitating there, causing the observed 202 s periodicity. Other possible interpretations, e.g., the second harmonics of the slow mode, are also discussed

X-RAY AND EUV OBSERVATIONS OF SIMULTANEOUS SHORT AND LONG PERIOD OSCILLATIONS IN HOT CORONAL ARCADE LOOPS

Energy Technology Data Exchange (ETDEWEB)

Kumar, Pankaj; Cho, Kyung-Suk [Korea Astronomy and Space Science Institute (KASI), Daejeon, 305-348 (Korea, Republic of); Nakariakov, Valery M., E-mail: pankaj@kasi.re.kr [Centre for Fusion, Space and Astrophysics, Department of Physics, University of Warwick, CV4 7AL (United Kingdom)

2015-05-01

We report decaying quasi-periodic intensity oscillations in the X-ray (6–12 keV) and extreme-ultraviolet (EUV) channels (131, 94, 1600, 304 Å) observed by the Fermi Gamma-ray Burst Monitor and Solar Dynamics Observatory/Atmospheric Imaging Assembly (AIA), respectively, during a C-class flare. The estimated periods of oscillation and decay time in the X-ray channel (6–12 keV) were about 202 and 154 s, respectively. A similar oscillation period was detected at the footpoint of the arcade loops in the AIA 1600 and 304 Å channels. Simultaneously, AIA hot channels (94 and 131 Å) reveal propagating EUV disturbances bouncing back and forth between the footpoints of the arcade loops. The period of the oscillation and decay time were about 409 and 1121 s, respectively. The characteristic phase speed of the wave is about 560 km s{sup −1} for about 115 Mm of loop length, which is roughly consistent with the sound speed at the temperature about 10–16 MK (480–608 km s{sup −1}). These EUV oscillations are consistent with the Solar and Heliospheric Observatory/Solar Ultraviolet Measurement of Emitted Radiation Doppler-shift oscillations interpreted as the global standing slow magnetoacoustic wave excited by a flare. The flare occurred at one of the footpoints of the arcade loops, where the magnetic topology was a 3D fan-spine with a null-point. Repetitive reconnection at this footpoint could have caused the periodic acceleration of non-thermal electrons that propagated to the opposite footpoint along the arcade and that are precipitating there, causing the observed 202 s periodicity. Other possible interpretations, e.g., the second harmonics of the slow mode, are also discussed.

EUV mask manufacturing readiness in the merchant mask industry

Science.gov (United States)

Green, Michael; Choi, Yohan; Ham, Young; Kamberian, Henry; Progler, Chris; Tseng, Shih-En; Chiou, Tsann-Bim; Miyazaki, Junji; Lammers, Ad; Chen, Alek

2017-10-01

As nodes progress into the 7nm and below regime, extreme ultraviolet lithography (EUVL) becomes critical for all industry participants interested in remaining at the leading edge. One key cost driver for EUV in the supply chain is the reflective EUV mask. As of today, the relatively few end users of EUV consist primarily of integrated device manufactures (IDMs) and foundries that have internal (captive) mask manufacturing capability. At the same time, strong and early participation in EUV by the merchant mask industry should bring value to these chip makers, aiding the wide-scale adoption of EUV in the future. For this, merchants need access to high quality, representative test vehicles to develop and validate their own processes. This business circumstance provides the motivation for merchants to form Joint Development Partnerships (JDPs) with IDMs, foundries, Original Equipment Manufacturers (OEMs) and other members of the EUV supplier ecosystem that leverage complementary strengths. In this paper, we will show how, through a collaborative supplier JDP model between a merchant and OEM, a novel, test chip driven strategy is applied to guide and validate mask level process development. We demonstrate how an EUV test vehicle (TV) is generated for mask process characterization in advance of receiving chip maker-specific designs. We utilize the TV to carry out mask process "stress testing" to define process boundary conditions which can be used to create Mask Rule Check (MRC) rules as well as serve as baseline conditions for future process improvement. We utilize Advanced Mask Characterization (AMC) techniques to understand process capability on designs of varying complexity that include EUV OPC models with and without sub-resolution assist features (SRAFs). Through these collaborations, we demonstrate ways to develop EUV processes and reduce implementation risks for eventual mass production. By reducing these risks, we hope to expand access to EUV mask capability for

e-beam induced EUV photomask repair: a perfect match

Science.gov (United States)

Waiblinger, M.; Kornilov, K.; Hofmann, T.; Edinger, K.

2010-05-01

Due to the updated ITRS roadmap EUV might enter the market as a productive solution for the 32 nm node1. Since the EUV-photomask is used as mirror and no longer as transitive device the severity of different defect types has changed significantly. Furthermore the EUV-photomask material stack is much more complex than the conventional 193nm photomask materials which expand the field of critical defect types even further. In this paper we will show, that "classical" 193 mask repair processes cannot be applied to EUV material. We will show the performance of a new repair process based on the novel ebeam repair tool MeRiT® HR 32. Furthermore this process will be applied on real EUV mask defects and the success of these repairs confirmed by wafer prints.

Mask-induced aberration in EUV lithography

Science.gov (United States)

Nakajima, Yumi; Sato, Takashi; Inanami, Ryoichi; Nakasugi, Tetsuro; Higashiki, Tatsuhiko

2009-04-01

We estimated aberrations using Zernike sensitivity analysis. We found the difference of the tolerated aberration with line direction for illumination. The tolerated aberration of perpendicular line for illumination is much smaller than that of parallel line. We consider this difference to be attributable to the mask 3D effect. We call it mask-induced aberration. In the case of the perpendicular line for illumination, there was a difference in CD between right line and left line without aberration. In this report, we discuss the possibility of pattern formation in NA 0.25 generation EUV lithography tool. In perpendicular pattern for EUV light, the dominant part of aberration is mask-induced aberration. In EUV lithography, pattern correction based on the mask topography effect will be more important.

Solar and terrestrial physics. [effects of solar activities on earth environment

Science.gov (United States)

1975-01-01

The effects of solar radiation on the near space and biomental earth, the upper atmosphere, and the magnetosphere are discussed. Data obtained from the OSO satellites pertaining to the solar cycle variation of extreme ultraviolet (EUV) radiation are analyzed. The effects of solar cycle variation of the characteristics of the solar wind are examined. The fluid mechanics of shock waves and the specific relationship to the characteristics of solar shock waves are investigated. The solar and corpuscular heating of the upper atmosphere is reported based on the findings of the AEROS and NATE experiments. Seasonal variations of the upper atmosphere composition are plotted based on OGO-6 mass spectrometer data.

Imaging and Patterning on Nanometer Scale Using Coherent EUV Light

International Nuclear Information System (INIS)

Wachulak, P.W.; Fiedorowicz, H.; Bartnik, A.; Marconi, M.C.; Menoni, C.S.; Rocca, J.J.

2010-01-01

Extreme ultraviolet (EUV) covers wavelength range from about 5 nm to 50 nm. That is why EUV is especially applicable for imaging and patterning on nanometer scale length. In the paper periodic nanopatterning realized by interference lithography and high resolution holographic nanoimaging performed in a Gabor in-line scheme are presented. In the experiments a compact table top EUV laser was used. Preliminary studies on using a laser plasma EUV source for nanoimaging are presented as well. (author)

Automated Identification of Coronal Holes from Synoptic EUV Maps

Science.gov (United States)

Hamada, Amr; Asikainen, Timo; Virtanen, Ilpo; Mursula, Kalevi

2018-04-01

Coronal holes (CHs) are regions of open magnetic field lines in the solar corona and the source of the fast solar wind. Understanding the evolution of coronal holes is critical for solar magnetism as well as for accurate space weather forecasts. We study the extreme ultraviolet (EUV) synoptic maps at three wavelengths (195 Å/193 Å, 171 Å and 304 Å) measured by the Solar and Heliospheric Observatory/Extreme Ultraviolet Imaging Telescope (SOHO/EIT) and the Solar Dynamics Observatory/Atmospheric Imaging Assembly (SDO/AIA) instruments. The two datasets are first homogenized by scaling the SDO/AIA data to the SOHO/EIT level by means of histogram equalization. We then develop a novel automated method to identify CHs from these homogenized maps by determining the intensity threshold of CH regions separately for each synoptic map. This is done by identifying the best location and size of an image segment, which optimally contains portions of coronal holes and the surrounding quiet Sun allowing us to detect the momentary intensity threshold. Our method is thus able to adjust itself to the changing scale size of coronal holes and to temporally varying intensities. To make full use of the information in the three wavelengths we construct a composite CH distribution, which is more robust than distributions based on one wavelength. Using the composite CH dataset we discuss the temporal evolution of CHs during the Solar Cycles 23 and 24.

An Extreme-ultraviolet Wave Generating Upward Secondary Waves in a Streamer-like Solar Structure

Science.gov (United States)

Zheng, Ruisheng; Chen, Yao; Feng, Shiwei; Wang, Bing; Song, Hongqiang

2018-05-01

Extreme-ultraviolet (EUV) waves, spectacular horizontally propagating disturbances in the low solar corona, always trigger horizontal secondary waves (SWs) when they encounter the ambient coronal structure. We present the first example of upward SWs in a streamer-like structure after the passing of an EUV wave. This event occurred on 2017 June 1. The EUV wave happened during a typical solar eruption including a filament eruption, a coronal mass ejection (CME), and a C6.6 flare. The EUV wave was associated with quasi-periodic fast propagating (QFP) wave trains and a type II radio burst that represented the existence of a coronal shock. The EUV wave had a fast initial velocity of ∼1000 km s‑1, comparable to high speeds of the shock and the QFP wave trains. Intriguingly, upward SWs rose slowly (∼80 km s‑1) in the streamer-like structure after the sweeping of the EUV wave. The upward SWs seemed to originate from limb brightenings that were caused by the EUV wave. All of the results show that the EUV wave is a fast-mode magnetohydrodynamic (MHD) shock wave, likely triggered by the flare impulses. We suggest that part of the EUV wave was probably trapped in the closed magnetic fields of the streamer-like structure, and upward SWs possibly resulted from the release of slow-mode trapped waves. It is believed that the interplay of the strong compression of the coronal shock and the configuration of the streamer-like structure is crucial for the formation of upward SWs.

The inner magnetosphere ion composition and local time distribution over a solar cycle

Science.gov (United States)

Kistler, L. M.; Mouikis, C. G.

2016-03-01

Using the Cluster/Composition and Distribution Function (CODIF) analyzer data set from 2001 to 2013, a full solar cycle, we determine the ion distributions for H+, He+, and O+ in the inner magnetosphere (L < 12) over the energy range 40 eV to 40 keV as a function magnetic local time, solar EUV (F10.7), and geomagnetic activity (Kp). Concentrating on L = 6-7 for comparison with previous studies at geosynchronous orbit, we determine both the average flux at 90° pitch angle and the pitch angle anisotropy as a function of energy and magnetic local time. We clearly see the minimum in the H+ spectrum that results from the competition between eastward and westward drifts. The feature is weaker in O+ and He+, leading to higher O+/H+ and He+/H+ ratios in the affected region, and also to a higher pitch angle anisotropy, both features expected from the long-term effects of charge exchange. We also determine how the nightside L = 6-7 densities and temperatures vary with geomagnetic activity (Kp) and solar EUV (F10.7). Consistent with other studies, we find that the O+ density and relative abundance increase significantly with both Kp and F10.7. He+ density increases with F10.7, but not significantly with Kp. The temperatures of all species decrease with increasing F10.7. The O+ and He+ densities increase from L = 12 to L ~ 3-4, both absolutely and relative to H+, and then drop off sharply. The results give a comprehensive view of the inner magnetosphere using a contiguous long-term data set that supports much of the earlier work from GEOS, ISEE, Active Magnetospheric Particle Tracer Explorers, and Polar from previous solar cycles.

Instrument development for atmospheric radiation measurement (ARM): Status of the Atmospheric Emitted Radiance Interferometer - extended Resolution (AERI-X), the Solar Radiance Transmission Interferometer (SORTI), and the Absolute Solar Transmission Inferometer (ASTI)

Energy Technology Data Exchange (ETDEWEB)

Murcray, F.; Stephen, T.; Kosters, J. [Univ. of Denver, CO (United States)

1996-04-01

This paper describes three instruments currently under developemnt for the Atmospheric Radiation Measurement (ARM) Program at the University of Denver: the AERI-X (Atmospheric Emitted Radiance Interferometer-Extended Resolution) and the SORTI (Solar R adiance Transmission Interferometer), and ASTI (Absolute Solar transmission Interferometer).

Extreme Ultraviolet (EUV) induced surface chemistry on Ru

NARCIS (Netherlands)

Liu, Feng; Sturm, Jacobus Marinus; Lee, Christopher James; Bijkerk, Frederik

2013-01-01

EUV photon induced surface chemistry can damage multilayer mirrors causing reflectivity loss and faster degradation. EUV photo chemistry involves complex processes including direct photon induced surface chemistry and secondary electron radiation chemistry. Current cleaning techniques include dry

Measurements of EUV coronal holes and open magnetic flux

International Nuclear Information System (INIS)

Lowder, C.; Qiu, J.; Leamon, R.; Liu, Y.

2014-01-01

Coronal holes are regions on the Sun's surface that map the footprints of open magnetic field lines. We have developed an automated routine to detect and track boundaries of long-lived coronal holes using full-disk extreme-ultraviolet (EUV) images obtained by SOHO/EIT, SDO/AIA, and STEREO/EUVI. We measure coronal hole areas and magnetic flux in these holes, and compare the measurements with calculations by the potential field source surface (PFSS) model. It is shown that, from 1996 through 2010, the total area of coronal holes measured with EIT images varies between 5% and 17% of the total solar surface area, and the total unsigned open flux varies between (2-5)× 10 22 Mx. The solar cycle dependence of these measurements is similar to the PFSS results, but the model yields larger hole areas and greater open flux than observed by EIT. The AIA/EUVI measurements from 2010-2013 show coronal hole area coverage of 5%-10% of the total surface area, with significant contribution from low latitudes, which is under-represented by EIT. AIA/EUVI have measured much enhanced open magnetic flux in the range of (2-4)× 10 22 Mx, which is about twice the flux measured by EIT, and matches with the PFSS calculated open flux, with discrepancies in the location and strength of coronal holes. A detailed comparison between the three measurements (by EIT, AIA-EUVI, and PFSS) indicates that coronal holes in low latitudes contribute significantly to the total open magnetic flux. These low-latitude coronal holes are not well measured with either the He I 10830 line in previous studies, or EIT EUV images; neither are they well captured by the static PFSS model. The enhanced observations from AIA/EUVI allow a more accurate measure of these low-latitude coronal holes and their contribution to open magnetic flux.

Actinic inspection of multilayer defects on EUV masks

International Nuclear Information System (INIS)

Barty, A; Liu, Y; Gullikson, E; Taylor, J S; Wood, O

2005-01-01

The production of defect-free mask blanks, and the development of techniques for inspecting and qualifying EUV mask blanks, remains a key challenge for EUV lithography. In order to ensure a reliable supply of defect-free mask blanks, it is necessary to develop techniques to reliably and accurately detect defects on un-patterned mask blanks. These inspection tools must be able to accurately detect all critical defects whilst simultaneously having the minimum possible false-positive detection rate. There continues to be improvement in high-speed non-actinic mask blank inspection tools, and it is anticipated that these tools can and will be used by industry to qualify EUV mask blanks. However, the outstanding question remains one of validating that non-actinic inspection techniques are capable of detecting all printable EUV defects. To qualify the performance of non-actinic inspection tools, a unique dual-mode EUV mask inspection system has been installed at the Advanced Light Source (ALS) synchrotron at Lawrence Berkeley National Laboratory. In high-speed inspection mode, whole mask blanks are scanned for defects using 13.5-nm wavelength light to identify and map all locations on the mask that scatter a significant amount of EUV light. In imaging, or defect review mode, a zone plate is placed in the reflected beam path to image a region of interest onto a CCD detector with an effective resolution on the mask of 100-nm or better. Combining the capabilities of the two inspection tools into one system provides the unique capability to determine the coordinates of native defects that can be used to compare actinic defect inspection with visible light defect inspection tools under commercial development, and to provide data for comparing scattering models for EUV mask defects

EUV tools: hydrogen gas purification and recovery strategies

Science.gov (United States)

Landoni, Cristian; Succi, Marco; Applegarth, Chuck; Riddle Vogt, Sarah

2015-03-01

The technological challenges that have been overcome to make extreme ultraviolet lithography (EUV) a reality have been enormous1. This vacuum driven technology poses significant purity challenges for the gases employed for purging and cleaning the scanner EUV chamber and source. Hydrogen, nitrogen, argon and ultra-high purity compressed dry air (UHPCDA) are the most common gases utilized at the scanner and source level. Purity requirements are tighter than for previous technology node tools. In addition, specifically for hydrogen, EUV tool users are facing not only gas purity challenges but also the need for safe disposal of the hydrogen at the tool outlet. Recovery, reuse or recycling strategies could mitigate the disposal process and reduce the overall tool cost of operation. This paper will review the types of purification technologies that are currently available to generate high purity hydrogen suitable for EUV applications. Advantages and disadvantages of each purification technology will be presented. Guidelines on how to select the most appropriate technology for each application and experimental conditions will be presented. A discussion of the most common approaches utilized at the facility level to operate EUV tools along with possible hydrogen recovery strategies will also be reported.

Spectral calibration of filters and detectors of solar EUV telescope for 13.2 nm for the TESIS experiment

International Nuclear Information System (INIS)

Kuzin, S.V.; Shestov, S.V.; Pertsov, A.A.; Reva, A.A.; Zuev, S.Yu.; Lopatin, A.Ya.; Luchin, V.I.; Zhou, Kh.; Khuo, T.

2008-01-01

The full-sun EUV telescope for 13.2 nm spectral band for the TESIS experiment is designed to produce images of hot coronal plasma (T ∼ 10 MK). Calibration process of optical elements is presented. Spectral transmission of multilayer Zr/Si filters, sensitivity and radiation tolerance of CCD detector have been measured. Peak transmission of EUV filters in working, spectral band reaches 40-50% (filters with 50 and 55 layers are used), spectral dependence of transmission is close to calculated one. Transmission of filters in white light is equal to (1-2)x10 -6 . Sensitivity of CCD ranges from 0.01 to 0.1 ADC units per photon, radiation tolerance is better than 10 9 rad [ru

The High-Resolution Lightweight Telescope for the EUV (HiLiTE)

Energy Technology Data Exchange (ETDEWEB)

Martinez-Galarce, D S; Boerner, P; Soufli, R; De Pontieu, B; Katz, N; Title, A; Gullikson, E M; Robinson, J C; Baker, S L

2008-06-02

The High-resolution Lightweight Telescope for the EUV (HiLiTE) is a Cassegrain telescope that will be made entirely of Silicon Carbide (SiC), optical substrates and metering structure alike. Using multilayer coatings, this instrument will be tuned to operate at the 465 {angstrom} Ne VII emission line, formed in solar transition region plasma at {approx}500,000 K. HiLiTE will have an aperture of 30 cm, angular resolution of {approx}0.2 arc seconds and operate at a cadence of {approx}5 seconds or less, having a mass that is about 1/4 that of one of the 20 cm aperture telescopes on the Atmospheric Imaging Assembly (AIA) instrument aboard NASA's Solar Dynamics Observatory (SDO). This new instrument technology thus serves as a path finder to a post-AIA, Explorer-class missions.

From powerful research platform for industrial EUV photoresist development, to world record resolution by photolithography: EUV interference lithography at the Paul Scherrer Institute

Science.gov (United States)

Buitrago, Elizabeth; Fallica, Roberto; Fan, Daniel; Karim, Waiz; Vockenhuber, Michaela; van Bokhoven, Jeroen A.; Ekinci, Yasin

2016-09-01

Extreme ultraviolet interference lithography (EUV-IL, λ = 13.5 nm) has been shown to be a powerful technique not only for academic, but also for industrial research and development of EUV materials due to its relative simplicity yet record high-resolution patterning capabilities. With EUV-IL, it is possible to pattern high-resolution periodic images to create highly ordered nanostructures that are difficult or time consuming to pattern by electron beam lithography (EBL) yet interesting for a wide range of applications such as catalysis, electronic and photonic devices, and fundamental materials analysis, among others. Here, we will show state-of the-art research performed using the EUV-IL tool at the Swiss Light Source (SLS) synchrotron facility in the Paul Scherrer Institute (PSI). For example, using a grating period doubling method, a diffraction mask capable of patterning a world record in photolithography of 6 nm half-pitch (HP), was produced. In addition to the description of the method, we will give a few examples of applications of the technique. Well-ordered arrays of suspended silicon nanowires down to 6.5 nm linewidths have been fabricated and are to be studied as field effect transistors (FETs) or biosensors, for instance. EUV achromatic Talbot lithography (ATL), another interference scheme that utilizes a single grating, was shown to yield well-defined nanoparticles over large-areas with high uniformity presenting great opportunities in the field of nanocatalysis. EUV-IL is in addition, playing a key role in the future introduction of EUV lithography into high volume manufacturing (HVM) of semiconductor devices for the 7 and 5 nm logic node (16 nm and 13 nm HP, respectively) and beyond while the availability of commercial EUV-tools is still very much limited for research.

New Views of the Solar Corona from STEREO and SDO

Science.gov (United States)

Vourlidas, A.

2012-01-01

In the last few years, we have been treated to an unusual visual feast of solar observations of the corona in EUV wavelengths. The observations from the two vantage points of STEREO/SECCHI are now capturing the entire solar atmosphere simultaneously in four wavelengths. The SDO/AIA images provide us with arcsecond resolution images of the full visible disk in ten wavelengths. All these data are captured with cadences of a few seconds to a few minutes. In this talk, I review some intriguing results from our first attempts to deal with these observations which touch upon the problems of coronal mass ejection initiation and solar wind generation. I will also discuss data processing techniques that may help us recover even more information from the images. The talk will contain a generous portion of beautiful EUV images and movies of the solar corona.

Oxide Nanoparticle EUV (ONE) Photoresists: Current Understanding of the Unusual Patterning Mechanism

KAUST Repository

Jiang, Jing; Zhang, Ben; Yu, Mufei; Li, Li; Neisser, Mark; Sung Chun, Jun; Giannelis, Emmanuel P.; Ober, Christopher K.

2015-01-01

© 2015 SPST. In the past few years, industry has made significant progress to deliver a stable high power EUV scanner and a 100 W light source is now being tested on the manufacuring scale. The success of a high power EUV source demands a fast and high resolution EUV resist. However, chemcially amplied resists encounter unprecedented challenges beyond the 22 nm node due to resolution, roughness and sensitivity tradeoffs. Unless novel solutions for EUV resists are proposed and further optimzed, breakthroughs can hardly be achieved. Oxide nanoparticle EUV (ONE) resists stablized by organic ligands were originally proposed by Ober et al. Recently this work attracts more and more attention due to its extraordinanry EUV sensitivity. This new class of photoresist utilizes ligand cleavage with a ligand exchange mechanism to switch its solubilty for dual-tone patterning. Therefore, ligand selection of the nanoparticles is extremely important to its EUV performance.

MUSE, the Multi-Slit Solar Explorer

Science.gov (United States)

Lemen, J. R.; Tarbell, T. D.; De Pontieu, B.; Wuelser, J. P.

2017-12-01

The Multi-Slit Solar Explorer (MUSE) has been selected for a Phase A study for the NASA Heliophysics Small Explorer program. The science objective of MUSE is to make high spatial and temporal resolution imaging and spectral observations of the solar corona and transition region in order to probe the mechanisms responsible for energy release in the corona and understand the dynamics of the solar atmosphere. The physical processes are responsible for heating the corona, accelerating the solar wind, and the rapid release of energy in CMEs and flares. The observations will be tightly coupled to state-of-the-art numerical modeling to provide significantly improved estimates for understanding and anticipating space weather. MUSE contains two instruments: an EUV spectrograph and an EUV context imager. Both have similar spatial resolutions and leverage extensive heritage from previous high-resolution instruments such as IRIS and the HiC rocket payload. The MUSE spectrograph employs a novel multi-slit design that enables a 100x improvement in spectral scanning rates, which will reveal crucial information about the dynamics (e.g., temperature, velocities) of the physical processes that are not observable with current instruments. The MUSE investigation builds on the success of IRIS by combining numerical modeling with a uniquely capable observatory: MUSE will obtain EUV spectra and images with the highest resolution in space (1/3 arcsec) and time (1-4 s) ever achieved for the transition region and corona, along 35 slits and a large context FOV simultaneously. The MUSE consortium includes LMSAL, SAO, Stanford, ARC, HAO, GSFC, MSFC, MSU, and ITA Oslo.

MUSE: the Multi-Slit Solar Explorer

Science.gov (United States)

Tarbell, Theodore D.; De Pontieu, Bart

2017-08-01

The Multi-Slit Solar Explorer is a proposed Small Explorer mission for studying the dynamics of the corona and transition region using both conventional and novel spectral imaging techniques. The physical processes that heat the multi-million degree solar corona, accelerate the solar wind and drive solar activity (CMEs and flares) remain poorly known. A breakthrough in these areas can only come from radically innovative instrumentation and state-of-the-art numerical modeling and will lead to better understanding of space weather origins. MUSE’s multi-slit coronal spectroscopy will use a 100x improvement in spectral raster cadence to fill a crucial gap in our knowledge of Sun-Earth connections; it will reveal temperatures, velocities and non-thermal processes over a wide temperature range to diagnose physical processes that remain invisible to current or planned instruments. MUSE will contain two instruments: an EUV spectrograph (SG) and EUV context imager (CI). Both have similar spatial resolution and leverage extensive heritage from previous high-resolution instruments such as IRIS and the HiC rocket payload. The MUSE investigation will build on the success of IRIS by combining numerical modeling with a uniquely capable observatory: MUSE will obtain EUV spectra and images with the highest resolution in space (1/3 arcsec) and time (1-4 s) ever achieved for the transition region and corona, along 35 slits and a large context FOV simultaneously. The MUSE consortium includes LMSAL, SAO, Stanford, ARC, HAO, GSFC, MSFC, MSU, ITA Oslo and other institutions.

Classification and printability of EUV mask defects from SEM images

Science.gov (United States)

Cho, Wonil; Price, Daniel; Morgan, Paul A.; Rost, Daniel; Satake, Masaki; Tolani, Vikram L.

2017-10-01

Classification and Printability of EUV Mask Defects from SEM images EUV lithography is starting to show more promise for patterning some critical layers at 5nm technology node and beyond. However, there still are many key technical obstacles to overcome before bringing EUV Lithography into high volume manufacturing (HVM). One of the greatest obstacles is manufacturing defect-free masks. For pattern defect inspections in the mask-shop, cutting-edge 193nm optical inspection tools have been used so far due to lacking any e-beam mask inspection (EBMI) or EUV actinic pattern inspection (API) tools. The main issue with current 193nm inspection tools is the limited resolution for mask dimensions targeted for EUV patterning. The theoretical resolution limit for 193nm mask inspection tools is about 60nm HP on masks, which means that main feature sizes on EUV masks will be well beyond the practical resolution of 193nm inspection tools. Nevertheless, 193nm inspection tools with various illumination conditions that maximize defect sensitivity and/or main-pattern modulation are being explored for initial EUV defect detection. Due to the generally low signal-to-noise in the 193nm inspection imaging at EUV patterning dimensions, these inspections often result in hundreds and thousands of defects which then need to be accurately reviewed and dispositioned. Manually reviewing each defect is difficult due to poor resolution. In addition, the lack of a reliable aerial dispositioning system makes it very challenging to disposition for printability. In this paper, we present the use of SEM images of EUV masks for higher resolution review and disposition of defects. In this approach, most of the defects detected by the 193nm inspection tools are first imaged on a mask SEM tool. These images together with the corresponding post-OPC design clips are provided to KLA-Tencor's Reticle Decision Center (RDC) platform which provides ADC (Automated Defect Classification) and S2A (SEM

Modular EUV Source for the next generation lithography

International Nuclear Information System (INIS)

Sublemontier, O.; Rosset-Kos, M.; Ceccotti, T.; Hergott, J.F.; Auguste, Th.; Normand, D.; Schmidt, M.; Beaumont, F.; Farcage, D.; Cheymol, G.; Le Caro, J.M.; Cormont, Ph.; Mauchien, P.; Thro, P.Y.; Skrzypczak, J.; Muller, S.; Marquis, E.; Barthod, B.; Gaurand, I.; Davenet, M.; Bernard, R.

2011-01-01

The present work, performed in the frame of the EXULITE project, was dedicated to the design and characterization of a laser-plasma-produced extreme ultraviolet (EUV) source prototype at 13.5 nm for the next generation lithography. It was conducted in cooperation with two laboratories from CEA, ALCATEL and THALES. One of our approach originalities was the laser scheme modularity. Six Nd:YAG laser beams were focused at the same time on a xenon filament jet to generate the EUV emitting plasma. Multiplexing has important industrial advantages and led to interesting source performances in terms of in-band power, stability and angular emission properties with the filament jet target. A maximum conversion efficiency (CE) value of 0.44% in 2π sr and 2% bandwidth was measured, which corresponds to a maximum in band EUV mean power of 7.7 W at a repetition rate of 6 kHz. The EUV emission was found to be stable and isotropic in these conditions. (authors)

ILT optimization of EUV masks for sub-7nm lithography

Science.gov (United States)

Hooker, Kevin; Kuechler, Bernd; Kazarian, Aram; Xiao, Guangming; Lucas, Kevin

2017-06-01

The 5nm and 7nm technology nodes will continue recent scaling trends and will deliver significantly smaller minimum features, standard cell areas and SRAM cell areas vs. the 10nm node. There are tremendous economic pressures to shrink each subsequent technology, though in a cost-effective and performance enhancing manner. IC manufacturers are eagerly awaiting EUV so that they can more aggressively shrink their technology than they could by using complicated MPT. The current 0.33NA EUV tools and processes also have their patterning limitations. EUV scanner lenses, scanner sources, masks and resists are all relatively immature compared to the current lithography manufacturing baseline of 193i. For example, lens aberrations are currently several times larger (as a function of wavelength) in EUV scanners than for 193i scanners. Robustly patterning 16nm L/S fully random logic metal patterns and 40nm pitch random logic rectangular contacts with 0.33NA EUV are tough challenges that will benefit from advanced OPC/RET. For example, if an IC manufacturer can push single exposure device layer resolution 10% tighter using improved ILT to avoid using DPT, there will be a significant cost and process complexity benefit to doing so. ILT is well known to have considerable benefits in finding flexible 193i mask pattern solutions to improve process window, improve 2D CD control, improve resolution in low K1 lithography regime and help to delay the introduction of DPT. However, ILT has not previously been applied to EUV lithography. In this paper, we report on new developments which extend ILT method to EUV lithography and we characterize the benefits seen vs. traditional EUV OPC/RET methods.

Characterization of laser-produced plasma EUV light

International Nuclear Information System (INIS)

Mizoguchi, Hakaru; Endo, Akira; Takabayashi, Yuichi; Sasaki, Akira; Komori, Hiroshi; Suganuma, Takashi

2005-01-01

Resolution of optical microlithography process becomes smaller and smaller. Wavelength of the light source for these optical lithography reduced from KrF, ArF to F2 to meet the resolution requirement. Recently EUV is spotlighted as promising candidate for next generation lithography light source. This paper summarizes the requirement and studies of experiments and simulation to improve the convention efficiency of EUV light source. (author)

A very small and super strong zebra pattern burst at the beginning of a solar flare

Energy Technology Data Exchange (ETDEWEB)

Tan, Baolin; Tan, Chengming; Zhang, Yin; Huang, Jing; Yan, Yihua [Key Laboratory of Solar Activity, National Astronomical Observatories of Chinese Academy of Sciences, Beijing 100012 (China); Mészárosová, Hana; Karlický, Marian, E-mail: bltan@nao.cas.cn [Astronomical Institute of the Academy of Sciences of the Czech Republic, Ondřejov 15165 (Czech Republic)

2014-08-01

Microwave emission with spectral zebra pattern structures (ZPs) is frequently observed in solar flares and the Crab pulsar. The previous observations show that ZP is a structure only overlapped on the underlying broadband continuum with slight increments and decrements. This work reports an unusually strong ZP burst occurring at the beginning of a solar flare observed simultaneously by two radio telescopes located in China and the Czech Republic and by the EUV telescope on board NASA's satellite Solar Dynamics Observatory on 2013 April 11. It is a very short and super strong explosion whose intensity exceeds several times that of the underlying flaring broadband continuum emission, lasting for just 18 s. EUV images show that the flare starts from several small flare bursting points (FBPs). There is a sudden EUV flash with extra enhancement in one of these FBPs during the ZP burst. Analysis indicates that the ZP burst accompanying an EUV flash is an unusual explosion revealing a strong coherent process with rapid particle acceleration, violent energy release, and fast plasma heating simultaneously in a small region with a short duration just at the beginning of the flare.

At-wavelength interferometry of high-NA diffraction-limited EUV optics

International Nuclear Information System (INIS)

Goldberg, Kenneth A.; Naulleau, Patrick; Rekawa, Senajith; Denham, Paul; Liddle, J. Alexander; Anderson, Erik; Jackson, Keith; Bokor, Jeffrey; Attwood, David

2003-01-01

Recent advances in all-reflective diffraction-limited optical systems designed for extreme ultraviolet (EUV) lithography have pushed numerical aperture (NA) values from 0.1 to 0.3, providing Rayleigh resolutions of 27-nm. Worldwide, several high-NA EUV optics are being deployed to serve in the development of advanced lithographic techniques required for EUV lithography, including the creation and testing of new, high-resolution photoresists. One such system is installed on an undulator beamline at Lawrence Berkeley National Laboratory's Advanced Light Source. Sub(angstrom)-accuracy optical testing and alignment techniques, developed for use with the previous generations of EUV lithographic optical systems, are being extended for use at high NA. Considerations for interferometer design and use are discussed

The EUV chromospheric network in the quiet Sun

International Nuclear Information System (INIS)

Reeves, E.M.

1976-01-01

Investigations on the structure and intensity of the chromospheric network from quiet solar regions have been carried out with EUV data obtained from the Harvard spectroheliometer on the Apollo Telescope Mount of Skylab. The distribution of intensities within supergranulation cell interiors follows a near normal function, where the standard deviation exceeds the value expected from the counting rate, which indicates fine-scale structure below the 5 arc sec resolution of the data. The intensities from the centers of supergranulation cells appear to be the same in both quiet regions and coronal holes, although the network is significantly different in the two types of regions. The average halfwidth of the network elements was measured as 10 arc sec, and was independent of the temperature of formation of the observing line for 3.8< logTsub(e)<5.8. The contrast between the network and the centers of cells is greatest for lines with logTsub(e)approximately5.2, where the network contributes approximately 75% of the intensity of quiet solar regions. The contrast and fractional intensity contributions decrease to higher and lower temperatures characteristic of the corona and chromosphere. (Auth.)

EUV lines observed with EIS/Hinode in a solar prominence

Science.gov (United States)

Labrosse, N.; Schmieder, B.; Heinzel, P.; Watanabe, T.

2011-07-01

Context. During a multi-wavelength observation campaign with Hinode and ground-based instruments, a solar prominence was observed for three consecutive days as it crossed the western limb of the Sun in April 2007. Aims: We report on observations obtained on 26 April 2007 using EIS (Extreme ultraviolet Imaging Spectrometer) on Hinode. They are analysed to provide a qualitative diagnostic of the plasma in different parts of the prominence. Methods: After correcting for instrumental effects, the rasters at different wavelengths are presented. Several regions within the same prominence are identified for further analysis. Selected profiles for lines with formation temperatures between log (T) = 4.7 and log (T) = 6.3, as well as their integrated intensities, are given. The profiles of coronal, transition region, and He ii lines are discussed. We pay special attention to the He ii line, which is blended with coronal lines. Results: Some quantitative results are obtained by analysing the line profiles. They confirm that depression in EUV lines can be interpreted in terms of two mechanisms: absorption of coronal radiation by the hydrogen and neutral helium resonance continua, and emissivity blocking. We present estimates of the He ii line integrated intensity in different parts of the prominence according to different scenarios for the relative contribution of absorption and emissivity blocking to the coronal lines blended with the He ii line. We estimate the contribution of the He ii 256.32 Å line to the He ii raster image to vary between ~44% and 70% of the raster's total intensity in the prominence according to the different models used to take into account the blending coronal lines. The inferred integrated intensities of the He ii 256 Å line are consistent with the theoretical intensities obtained with previous 1D non-LTE radiative transfer calculations, yielding a preliminary estimate of the central temperature of 8700 K, a central pressure of 0.33 dyn cm-2, and a

Compact laser-produced plasma EUV sources for processing polymers and nanoimaging

International Nuclear Information System (INIS)

Fiedorowicz, H.; Bartnik, A.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Wachulak, P.

2010-01-01

Complete text of publication follows. Extreme ultraviolet (EUV) can be produced form a high-temperature plasma generated by interaction of high power laser pulses with matter. Laser plasma EUV sources are considered to be used in various applications in physics, material science, biomedicine, and technology. In the paper new compact laser plasma EUV sources developed for processing polymers and imaging are presented. The sources are based on a gas puff target formed by pulsed injection of a small amount of gas under high-pressure into a laser focus region. The use of the gas puff target instead of a solid target allows for efficient generation of EUV radiation without debris production. The compact laser plasma EUV source based on a gas puff target was developed for metrology applications. The EUV source developed for processing polymers is equipped with a grazing incidence axisymmetrical ellipsoidal mirror to focus EUV radiation in the relatively broad spectral range with the strong maximum near 10 nm. The size of the focal spot is about 1.3 mm in diameter with the maximum fluence up to 70 mJ/cm 2 . EUV radiation in the wavelength range of about 5 to 50 nm is produced by irradiation of xenon or krypton gas puff target with a Nd:YAG laser operating at 10 Hz and delivering 4 ns pulses of energy up to 0.8 J per pulse. The experiments on EUV irradiation of various polymers have been performed. Modification of polymer surfaces was achieved, primarily due to direct photo-etching with EUV photons and formation of micro- and nanostructures onto the surface. The mechanism of the interaction is similar to the UV laser ablation where energetic photons cause chemical bonds of the polymer chain to be broken. However, because of very low penetration depth of EUV radiation, the interaction region is limited to a very thin surface layer (<100 nm). This makes it possible to avoid degradation of bulk material caused by deeply penetrating UV radiation. The results of the studies

Benchmarking EUV mask inspection beyond 0.25 NA

International Nuclear Information System (INIS)

Goldberg, Kenneth A.; Mochi, Iacopo; Anderson, Erik H.; Rekawa, Seno B.; Kemp, Charles D.; Huh, S.; Han, H.-S.; Naulleau, P.; Gunion, R.F.

2008-01-01

The SEMATECH Berkeley Actinic Inspection Tool (AIT) is an EUV-wavelength mask inspection microscope designed for direct aerial image measurements, and pre-commercial EUV mask research. Operating on a synchrotron bending magnet beamline, the AIT uses an off-axis Fresnel zoneplate lens to project a high-magnification EUV image directly onto a CCD camera. We present the results of recent system upgrades that have improved the imaging resolution, illumination uniformity, and partial coherence. Benchmarking tests show image contrast above 75% for 100-nm mask features, and significant improvements and across the full range of measured sizes. The zoneplate lens has been replaced by an array of user-selectable zoneplates with higher magnification and NA values up to 0.0875, emulating the spatial resolution of a 0.35-NA 4 x EUV stepper. Illumination uniformity is above 90% for mask areas 2-(micro)m-wide and smaller. An angle-scanning mirror reduces the high coherence of the synchrotron beamline light source giving measured σ values of approximately 0.125 at 0.0875 NA

Metal Oxide Nanoparticle Photoresists for EUV Patterning

KAUST Repository

Jiang, Jing

2014-01-01

© 2014SPST. Previous studies of methacrylate based nanoparticle have demonstrated the excellent pattern forming capability of these hybrid materials when used as photoresists under 13.5 nm EUV exposure. HfO2 and ZrO2 methacrylate resists have achieved high resolution (∼22 nm) at a very high EUV sensitivity (4.2 mJ/cm2). Further investigations into the patterning process suggests a ligand displacement mechanism, wherein, any combination of a metal oxide with the correct ligand could generate patterns in the presence of the suitable photoactive compound. The current investigation extends this study by developing new nanoparticle compositions with transdimethylacrylic acid and o-toluic acid ligands. This study describes their synthesis and patterning performance under 248 nm KrF laser (DUV) and also under 13.5 nm EUV exposures (dimethylacrylate nanoparticles) for the new resist compositions.

At-wavelength interferometry of high-NA diffraction-limited EUV optics

Energy Technology Data Exchange (ETDEWEB)

Goldberg, Kenneth A.; Naulleau, Patrick; Rekawa, Senajith; Denham, Paul; Liddle, J. Alexander; Anderson, Erik; Jackson, Keith; Bokor, Jeffrey; Attwood, David

2003-08-01

Recent advances in all-reflective diffraction-limited optical systems designed for extreme ultraviolet (EUV) lithography have pushed numerical aperture (NA) values from 0.1 to 0.3, providing Rayleigh resolutions of 27-nm. Worldwide, several high-NA EUV optics are being deployed to serve in the development of advanced lithographic techniques required for EUV lithography, including the creation and testing of new, high-resolution photoresists. One such system is installed on an undulator beamline at Lawrence Berkeley National Laboratory's Advanced Light Source. Sub{angstrom}-accuracy optical testing and alignment techniques, developed for use with the previous generations of EUV lithographic optical systems, are being extended for use at high NA. Considerations for interferometer design and use are discussed.

Ni-Al Alloys as Alternative EUV Mask Absorber

Directory of Open Access Journals (Sweden)

Vu Luong

2018-03-01

Full Text Available Extreme ultraviolet (EUV lithography is being industrialized as the next candidate printing technique for high-volume manufacturing of scaled down integrated circuits. At mask level, the combination of EUV light at oblique incidence, absorber thickness, and non-uniform mirror reflectance through incidence angle, creates photomask-induced imaging aberrations, known as mask 3D (M3D effects. A possible mitigation for the M3D effects in the EUV binary intensity mask (BIM, is to use mask absorber materials with high extinction coefficient κ and refractive coefficient n close to unity. We propose nickel aluminide alloys as a candidate BIM absorber material, and characterize them versus a set of specifications that a novel EUV mask absorber must meet. The nickel aluminide samples have reduced crystallinity as compared to metallic nickel, and form a passivating surface oxide layer in neutral solutions. Composition and density profile are investigated to estimate the optical constants, which are then validated with EUV reflectometry. An oxidation-induced Al L2 absorption edge shift is observed, which significantly impacts the value of n at 13.5 nm wavelength and moves it closer to unity. The measured optical constants are incorporated in an accurate mask model for rigorous simulations. The M3D imaging impact of the nickel aluminide alloy mask absorbers, which predict significant M3D reduction in comparison to reference absorber materials. In this paper, we present an extensive experimental methodology flow to evaluate candidate mask absorber materials.

Analysis of Ozone (O₃ and Erythemal UV (EUV measured by TOMS in the equatorial African belt

Directory of Open Access Journals (Sweden)

Øyvind Frette

2010-03-01

Full Text Available We presented time series of total ozone column amounts (TOCAs and erythemal UV (EUV doses derived from measurements by TOMS (Total Ozone Mapping Spectrometer instruments on board the Nimbus-7 (N7 and the Earth Probe (EP satellites for three locations within the equatorial African belt for the period 1979 to 2000. The locations were Dar-es-Salaam (6.8° S, 39.26° E in Tanzania, Kampala (0.19° N, 32.34° E in Uganda, and Serrekunda (13.28° N, 16.34° W in Gambia. Equatorial Africa has high levels of UV radiation, and because ozone shields UV radiation from reaching the Earth’s surface, there is a need to monitor TOCAs and EUV doses. In this paper we investigated the trend of TOCAs and EUV doses, the effects of annual and solar cycles on TOCAs, as well as the link between lightning and ozone production in the equatorial African belt. We also compared clear-sky simulated EUV doses with the corresponding EUV doses derived from TOMS measurements. The TOCAs were found to vary in the ranges 243 DU − 289 DU, 231 DU − 286 DU, and 236 DU − 296 DU, with mean values of 266.9 DU, 260.9 DU, and 267.8 DU for Dar-es-Salaam, Kampala and Serrekunda, respectively. Daily TOCA time series indicated that Kampala had the lowest TOCA values, which we attributed to the altitude effect. There were two annual ozone peaks in Dar-es-Salaam and Kampala, and one annual ozone peak in Serrekunda. The yearly TOCA averages showed an oscillation within a five-year period. We also found that the EUV doses were stable at all three locations for the period 1979−2000, and that Kampala and Dar-es-Salaam were mostly cloudy throughout the year, whereas Serrekunda was mostly free from clouds. It was also found that clouds were among the major factors determining the level of EUV reaching the Earth´s surface. Finally, we noted that during rainy seasons, horizontal advection effects augmented by lightning activity may be responsible for enhanced ozone production in the tropics.

Measurements of EUV coronal holes and open magnetic flux

Energy Technology Data Exchange (ETDEWEB)

Lowder, C.; Qiu, J.; Leamon, R. [Department of Physics, Montana State University, Bozeman, MT 59717 (United States); Liu, Y., E-mail: clowder@solar.physics.montana.edu [W. W. Hansen Experimental Physics Laboratory, Stanford University, Stanford, CA 94305 (United States)

2014-03-10

Coronal holes are regions on the Sun's surface that map the footprints of open magnetic field lines. We have developed an automated routine to detect and track boundaries of long-lived coronal holes using full-disk extreme-ultraviolet (EUV) images obtained by SOHO/EIT, SDO/AIA, and STEREO/EUVI. We measure coronal hole areas and magnetic flux in these holes, and compare the measurements with calculations by the potential field source surface (PFSS) model. It is shown that, from 1996 through 2010, the total area of coronal holes measured with EIT images varies between 5% and 17% of the total solar surface area, and the total unsigned open flux varies between (2-5)× 10{sup 22} Mx. The solar cycle dependence of these measurements is similar to the PFSS results, but the model yields larger hole areas and greater open flux than observed by EIT. The AIA/EUVI measurements from 2010-2013 show coronal hole area coverage of 5%-10% of the total surface area, with significant contribution from low latitudes, which is under-represented by EIT. AIA/EUVI have measured much enhanced open magnetic flux in the range of (2-4)× 10{sup 22} Mx, which is about twice the flux measured by EIT, and matches with the PFSS calculated open flux, with discrepancies in the location and strength of coronal holes. A detailed comparison between the three measurements (by EIT, AIA-EUVI, and PFSS) indicates that coronal holes in low latitudes contribute significantly to the total open magnetic flux. These low-latitude coronal holes are not well measured with either the He I 10830 line in previous studies, or EIT EUV images; neither are they well captured by the static PFSS model. The enhanced observations from AIA/EUVI allow a more accurate measure of these low-latitude coronal holes and their contribution to open magnetic flux.

Statistical and observational research of solar flare for total spectra and geometrical features

Science.gov (United States)

Nishimoto, S.; Watanabe, K.; Imada, S.; Kawate, T.; Lee, K. S.

2017-12-01

Impulsive energy release phenomena such as solar flares, sometimes affect to the solar-terrestrial environment. Usually, we use soft X-ray flux (GOES class) as the index of flare scale. However, the magnitude of effect to the solar-terrestrial environment is not proportional to that scale. To identify the relationship between solar flare phenomena and influence to the solar-terrestrial environment, we need to understand the full spectrum of solar flares. There is the solar flare irradiance model named the Flare Irradiance Spectral Model (FISM) (Chamberlin et al., 2006, 2007, 2008). The FISM can estimate solar flare spectra with high wavelength resolution. However, this model can not express the time evolution of emitted plasma during the solar flare, and has low accuracy on short wavelength that strongly effects and/or controls the total flare spectra. For the purpose of obtaining the time evolution of total solar flare spectra, we are performing statistical analysis of the electromagnetic data of solar flares. In this study, we select solar flare events larger than M-class from the Hinode flare catalogue (Watanabe et al., 2012). First, we focus on the EUV emission observed by the SDO/EVE. We examined the intensities and time evolutions of five EUV lines of 55 flare events. As a result, we found positive correlation between the "soft X-ray flux" and the "EUV peak flux" for all EVU lines. Moreover, we found that hot lines peaked earlier than cool lines of the EUV light curves. We also examined the hard X-ray data obtained by RHESSI. When we analyzed 163 events, we found good correlation between the "hard X-ray intensity" and the "soft X-ray flux". Because it seems that the geometrical features of solar flares effect to those time evolutions, we also looked into flare ribbons observed by SDO/AIA. We examined 21 flare events, and found positive correlation between the "GOES duration" and the "ribbon length". We also found positive correlation between the "ribbon

Pointing stability of Hinode and requirements for the next Solar mission Solar-C

Science.gov (United States)

Katsukawa, Y.; Masada, Y.; Shimizu, T.; Sakai, S.; Ichimoto, K.

2017-11-01

It is essential to achieve fine pointing stability in a space mission aiming for high resolutional observations. In a future Japanese solar mission SOLAR-C, which is a successor of the HINODE (SOLAR-B) mission, we set targets of angular resolution better than 0.1 arcsec in the visible light and better than 0.2 - 0.5 arcsec in EUV and X-rays. These resolutions are twice to five times better than those of corresponding instruments onboard HINODE. To identify critical items to achieve the requirements of the pointing stability in SOLAR-C, we assessed in-flight performance of the pointing stability of HINODE that achieved the highest pointing stability in Japanese space missions. We realized that one of the critical items that have to be improved in SOLAR-C is performance of the attitude stability near the upper limit of the frequency range of the attitude control system. The stability of 0.1 arcsec (3σ) is required in the EUV and X-ray telescopes of SOLAR-C while the HINODE performance is slightly worse than the requirement. The visible light telescope of HINODE is equipped with an image stabilization system inside the telescope, which achieved the stability of 0.03 arcsec (3σ) by suppressing the attitude jitter in the frequency range lower than 10 Hz. For further improvement, it is expected to suppress disturbances induced by resonance between the telescope structures and disturbances of momentum wheels and mechanical gyros in the frequency range higher than 100 Hz.

Simultaneous EUV and radio observations of bidirectional plasmoids ejection during magnetic reconnection

Science.gov (United States)

Kumar, Pankaj; Cho, Kyung-Suk

2013-09-01

We present a multiwavelength study of the X-class flare, which occurred in active region (AR) NOAA 11339 on 3 November 2011. The extreme ultraviolet (EUV) images recorded by SDO/AIA show the activation of a remote filament (located north of the AR) with footpoint brightenings about 50 min prior to the flare's occurrence. The kinked filament rises up slowly, and after reaching a projected height of ~49 Mm, it bends and falls freely near the AR, where the X-class flare was triggered. Dynamic radio spectrum from the Green Bank Solar Radio Burst Spectrometer (GBSRBS) shows simultaneous detection of both positive and negative drifting pulsating structures (DPSs) in the decimetric radio frequencies (500-1200 MHz) during the impulsive phase of the flare. The global negative DPSs in solar flares are generally interpreted as a signature of electron acceleration related to the upward-moving plasmoids in the solar corona. The EUV images from AIA 94 Å reveal the ejection of multiple plasmoids, which move simultaneously upward and downward in the corona during the magnetic reconnection. The estimated speeds of the upward- and downward-moving plasmoids are ~152-362 and ~83-254 km s-1, respectively. These observations strongly support the recent numerical simulations of the formation and interaction of multiple plasmoids due to tearing of the current-sheet structure. On the basis of our analysis, we suggest that the simultaneous detection of both the negative and positive DPSs is most likely generated by the interaction or coalescence of the multiple plasmoids moving upward and downward along the current-sheet structure during the magnetic reconnection process. Moreover, the differential emission measure (DEM) analysis of the active region reveals a hot flux-rope structure (visible in AIA 131 and 94 Å) prior to the flare initiation and ejection of the multitemperature plasmoids during the flare impulsive phase. Movie is available in electronic form at http://www.aanda.org

Surface Inhomogeneities of the White Dwarf in the Binary EUVE J2013+400

Science.gov (United States)

Vennes, Stephane

We propose to study the white dwarf in the binary EUVE J2013+400. The object is paired with a dMe star and new extreme ultraviolet (EUV) observations will offer critical insights into the properties of the white dwarf. The binary behaves, in every other aspects, like its siblings EUVE J0720-317 and EUVE J1016-053 and new EUV observations will help establish their class properties; in particular, EUV photometric variations in 0720-317 and 1016-053 over a period of 11 hours and 57 minutes, respectively, are indicative of surface abundance inhomogeneities coupled with the white dwarfs rotation period. These variations and their large photospheric helium abundance are best explained by a diffusion-accretion model in which time-variable accretion and possible coupling to magnetic poles contribute to abundance variations across the surface and possibly as a function of depth. EUV spectroscopy will also enable a study of the helium abundance as a function of depth and a detailed comparison with theoretical diffusion profile.

Prospects of DUV OoB suppression techniques in EUV lithography

Science.gov (United States)

Park, Chang-Min; Kim, Insung; Kim, Sang-Hyun; Kim, Dong-Wan; Hwang, Myung-Soo; Kang, Soon-Nam; Park, Cheolhong; Kim, Hyun-Woo; Yeo, Jeong-Ho; Kim, Seong-Sue

2014-04-01

Though scaling of source power is still the biggest challenge in EUV lithography (EUVL) technology era, CD and overlay controls for transistor's requirement are also precondition of adopting EUVL in mass production. Two kinds of contributors are identified as risks for CDU and Overlay: Infrared (IR) and deep ultraviolet (DUV) out of band (OOB) radiations from laser produced plasma (LPP) EUV source. IR from plasma generating CO2 laser that causes optics heating and wafer overlay error is well suppressed by introducing grating on collector to diffract IR off the optical axis and is the effect has been confirmed by operation of pre-production tool (NXE3100). EUV and DUV OOB which are reflected from mask black boarder (BB) are root causes of EUV-specific CD error at the boundaries of exposed shots which would result in the problem of CDU out of spec unless sufficiently suppressed. Therefore, control of DUV OOB reflection from the mask BB is one of the key technologies that must be developed prior to EUV mass production. In this paper, quantitative assessment on the advantage and the disadvantage of potential OOB solutions will be discussed. EUV and DUV OOB impacts on wafer CDs are measured from NXE3100 & NXE3300 experiments. Significant increase of DUV OOB impact on CD from NXE3300 compared with NXE3100 is observed. There are three ways of technology being developed to suppress DUV OOB: spectral purity filter (SPF) as a scanner solution, multi-layer etching as a solution on mask, and resist top-coating as a process solution. PROs and CONs of on-scanner, on-mask, and on-resist solution for the mass production of EUV lithography will be discussed.

“Dandelion” Filament Eruption and Coronal Waves Associated with a Solar Flare on 2011 February 16

International Nuclear Information System (INIS)

Cabezas, Denis P.; Ishitsuka, Mutsumi; Ishitsuka, José K.; Martínez, Lurdes M.; Buleje, Yovanny J.; Morita, Satoshi; Asai, Ayumi; UeNo, Satoru; Ishii, Takako T.; Kitai, Reizaburo; Takasao, Shinsuke; Yoshinaga, Yusuke; Otsuji, Kenichi; Shibata, Kazunari

2017-01-01

Coronal disturbances associated with solar flares, such as H α Moreton waves, X-ray waves, and extreme ultraviolet (EUV) coronal waves, are discussed herein in relation to magnetohydrodynamic fast-mode waves or shocks in the corona. To understand the mechanism of coronal disturbances, full-disk solar observations with high spatial and temporal resolution over multiple wavelengths are of crucial importance. We observed a filament eruption, whose shape is like a “dandelion,” associated with the M1.6 flare that occurred on 2011 February 16 in H α images taken by the Flare Monitoring Telescope at Ica University, Peru. We derive the three-dimensional velocity field of the erupting filament. We also identify winking filaments that are located far from the flare site in the H α images, whereas no Moreton wave is observed. By comparing the temporal evolution of the winking filaments with those of the coronal wave seen in the EUV images data taken by the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory and by the Extreme Ultraviolet Imager on board the Solar Terrestrial Relations Observatory-Ahead , we confirm that the winking filaments were activated by the EUV coronal wave.

“Dandelion” Filament Eruption and Coronal Waves Associated with a Solar Flare on 2011 February 16

Energy Technology Data Exchange (ETDEWEB)

Cabezas, Denis P.; Ishitsuka, Mutsumi; Ishitsuka, José K. [Geophysical Institute of Peru, Calle Badajoz 169, Mayorazgo IV Etapa, Ate Vitarte, Lima (Peru); Martínez, Lurdes M.; Buleje, Yovanny J. [Centro de Investigación del Estudio de la Actividad Solar y sus Efectos Sobre la Tierra, Facultad de Ciencias, Universidad Nacional San Luis Gonzaga de Ica, Av. Los Maestros S/N, Ica (Peru); Morita, Satoshi [National Astronomical Observatory of Japan, Osawa, Mitaka, Tokyo, 181-8588 (Japan); Asai, Ayumi [Unit of Synergetic Studies for Space, Kyoto University, Sakyo, Kyoto, 606-8502 (Japan); UeNo, Satoru; Ishii, Takako T.; Kitai, Reizaburo; Takasao, Shinsuke; Yoshinaga, Yusuke; Otsuji, Kenichi; Shibata, Kazunari, E-mail: denis@kwasan.kyoto-u.ac.jp [Kwasan and Hida Observatories, Kyoto University, Yamashina, Kyoto, 607-8471 (Japan)

2017-02-10

Coronal disturbances associated with solar flares, such as H α Moreton waves, X-ray waves, and extreme ultraviolet (EUV) coronal waves, are discussed herein in relation to magnetohydrodynamic fast-mode waves or shocks in the corona. To understand the mechanism of coronal disturbances, full-disk solar observations with high spatial and temporal resolution over multiple wavelengths are of crucial importance. We observed a filament eruption, whose shape is like a “dandelion,” associated with the M1.6 flare that occurred on 2011 February 16 in H α images taken by the Flare Monitoring Telescope at Ica University, Peru. We derive the three-dimensional velocity field of the erupting filament. We also identify winking filaments that are located far from the flare site in the H α images, whereas no Moreton wave is observed. By comparing the temporal evolution of the winking filaments with those of the coronal wave seen in the EUV images data taken by the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory and by the Extreme Ultraviolet Imager on board the Solar Terrestrial Relations Observatory-Ahead , we confirm that the winking filaments were activated by the EUV coronal wave.

Recent perspectives in solar physics - Elemental composition, coronal structure and magnetic fields, solar activity

Science.gov (United States)

Newkirk, G., Jr.

1975-01-01

Elemental abundances in the solar corona are studied. Abundances in the corona, solar wind and solar cosmic rays are compared to those in the photosphere. The variation in silicon and iron abundance in the solar wind as compared to helium is studied. The coronal small and large scale structure is investigated, emphasizing magnetic field activity and examining cosmic ray generation mechanisms. The corona is observed in the X-ray and EUV regions. The nature of coronal transients is discussed with emphasis on solar-wind modulation of galactic cosmic rays. A schematic plan view of the interplanetary magnetic field during sunspot minimum is given showing the presence of magnetic bubbles and their concentration in the region around 4-5 AU by a fast solar wind stream.

Performance of 100-W HVM LPP-EUV source

Science.gov (United States)

Mizoguchi, Hakaru; Nakarai, Hiroaki; Abe, Tamotsu; Nowak, Krzysztof M.; Kawasuji, Yasufumi; Tanaka, Hiroshi; Watanabe, Yukio; Hori, Tsukasa; Kodama, Takeshi; Shiraishi, Yutaka; Yanagida, Tatsuya; Soumagne, Georg; Yamada, Tsuyoshi; Yamazaki, Taku; Okazaki, Shinji; Saitou, Takashi

2015-08-01

At Gigaphoton Inc., we have developed unique and original technologies for a carbon dioxide laser-produced tin plasma extreme ultraviolet (CO2-Sn-LPP EUV) light source, which is the most promising solution for high-power high-volume manufacturing (HVM) EUV lithography at 13.5 nm. Our unique technologies include the combination of a pulsed CO2 laser with Sn droplets, the application of dual-wavelength laser pulses for Sn droplet conditioning, and subsequent EUV generation and magnetic field mitigation. Theoretical and experimental data have clearly shown the advantage of our proposed strategy. Currently, we are developing the first HVM light source, `GL200E'. This HVM light source will provide 250-W EUV power based on a 20-kW level pulsed CO2 laser. The preparation of a high average-power CO2 laser (more than 20 kW output power) has been completed in cooperation with Mitsubishi Electric Corporation. Recently, we achieved 140 W at 50 kHz and 50% duty cycle operation as well as 2 h of operation at 100 W of power level. Further improvements are ongoing. We will report the latest status and the challenge to reach stable system operation of more than 100 W at about 4% conversion efficiency with 20-μm droplets and magnetic mitigation.

Contrast matching of line gratings obtained with NXE3XXX and EUV- interference lithography

Science.gov (United States)

Tasdemir, Zuhal; Mochi, Iacopo; Olvera, Karen Garrido; Meeuwissen, Marieke; Yildirim, Oktay; Custers, Rolf; Hoefnagels, Rik; Rispens, Gijsbert; Fallica, Roberto; Vockenhuber, Michaela; Ekinci, Yasin

2017-10-01

Extreme UV lithography (EUVL) has gained considerable attention for several decades as a potential technology for the semiconductor industry and it is now close to being adopted in high-volume manufacturing. At Paul Scherrer Institute (PSI), we have focused our attention on EUV resist performance issues by testing available high-performance EUV resists in the framework of a joint collaboration with ASML. For this purpose, we use the grating-based EUV-IL setup installed at the Swiss Light Source (SLS) at PSI, in which a coherent beam with 13.5 nm wavelength is used to produce a periodic aerial image with virtually 100% contrast and large depth of focus. Interference lithography is a relatively simple technique and it does not require many optical components, therefore the unintended flare is minimized and the aerial image is well-defined sinusoidal pattern. For the collaborative work between PSI and ASML, exposures are being performed on the EUV-IL exposure tool at PSI. For better quantitative comparison to the NXE scanner results, it is targeted to determine the actual NILS of the EUV-IL exposure tool at PSI. Ultimately, any resist-related metrology must be aligned and compared with the performance of EUV scanners. Moreover, EUV-IL is a powerful method for evaluating the resist performance and a resist which performs well with EUV-IL, shows, in general, also good performance with NXE scanners. However, a quantitative prediction of the performance based on EUV-IL measurements has not been possible due to the differences in aerial image formation. In this work, we aim to study the performance of EUV resists with different aerial images. For this purpose, after the real interference pattern exposure, we overlay a flat field exposure to emulate different levels of contrast. Finally, the results are compared with data obtained from EUV scanner. This study will enable not only match the data obtained from EUV- IL at PSI with the performance of NXE scanners, but also a

A self-consistent, absolute isochronal age scale for young moving groups in the solar neighbourhood

OpenAIRE

Bell, Cameron P. M.; Mamajek, Eric E.; Naylor, Tim

2015-01-01

We present a self-consistent, absolute isochronal age scale for young (< 200 Myr), nearby (< 100 pc) moving groups in the solar neighbourhood based on homogeneous fitting of semi-empirical pre-main-sequence model isochrones using the tau^2 maximum-likelihood fitting statistic of Naylor & Jeffries in the M_V, V-J colour-magnitude diagram. The final adopted ages for the groups are: 149+51-19 Myr for the AB Dor moving group, 24+/-3 Myr for the {\\beta} Pic moving group (BPMG), 45+11-7 Myr for the...

Registration performance on EUV masks using high-resolution registration metrology

Science.gov (United States)

Steinert, Steffen; Solowan, Hans-Michael; Park, Jinback; Han, Hakseung; Beyer, Dirk; Scherübl, Thomas

2016-10-01

Next-generation lithography based on EUV continues to move forward to high-volume manufacturing. Given the technical challenges and the throughput concerns a hybrid approach with 193 nm immersion lithography is expected, at least in the initial state. Due to the increasing complexity at smaller nodes a multitude of different masks, both DUV (193 nm) and EUV (13.5 nm) reticles, will then be required in the lithography process-flow. The individual registration of each mask and the resulting overlay error are of crucial importance in order to ensure proper functionality of the chips. While registration and overlay metrology on DUV masks has been the standard for decades, this has yet to be demonstrated on EUV masks. Past generations of mask registration tools were not necessarily limited in their tool stability, but in their resolution capabilities. The scope of this work is an image placement investigation of high-end EUV masks together with a registration and resolution performance qualification. For this we employ a new generation registration metrology system embedded in a production environment for full-spec EUV masks. This paper presents excellent registration performance not only on standard overlay markers but also on more sophisticated e-beam calibration patterns.

Advanced 0.3-NA EUV lithography capabilities at the ALS

International Nuclear Information System (INIS)

Naulleau, Patrick; Anderson, Erik; Dean, Kim; Denham, Paul; Goldberg, Kenneth A.; Hoef, Brian; Jackson, Keith

2005-01-01

For volume nanoelectronics production using Extreme ultraviolet (EUV) lithography [1] to become a reality around the year 2011, advanced EUV research tools are required today. Microfield exposure tools have played a vital role in the early development of EUV lithography [2-4] concentrating on numerical apertures (NA) of 0.2 and smaller. Expected to enter production at the 32-nm node with NAs of 0.25, EUV can no longer rely on these early research tools to provide relevant learning. To overcome this problem, a new generation of microfield exposure tools, operating at an NA of 0.3 have been developed [5-8]. Like their predecessors, these tools trade off field size and speed for greatly reduced complexity. One of these tools is implemented at Lawrence Berkeley National Laboratory's Advanced Light Source synchrotron radiation facility. This tool gets around the problem of the intrinsically high coherence of the synchrotron source [9,10] by using an active illuminator scheme [11]. Here we describe recent printing results obtained from the Berkeley EUV exposure tool. Limited by the availability of ultra-high resolution chemically amplified resists, present resolution limits are approximately 32 nm for equal lines and spaces and 27 nm for semi-isolated lines

Mix-and-match considerations for EUV insertion in N7 HVM

Science.gov (United States)

Chen, Xuemei; Gabor, Allen; Samudrala, Pavan; Meyers, Sheldon; Hosler, Erik; Johnson, Richard; Felix, Nelson

2017-03-01

An optimal mix-match control strategy for EUV and 193i scanners is crucial for the insertion of EUV lithography at 7nm technology node. The systematic differences between these exposure systems introduce additional cross-platform mixmatch overlay errors. In this paper, we quantify the EUV specific contributions to mix-match overlay, and explore the effectiveness of higher-order interfield and intrafield corrections on minimizing the on-product mix-match overlay errors. We also analyze the impact of intra-field sampling plans in terms of model accuracy and adequacy in capturing EUV specific intra-field signatures. Our analysis suggests that more intra-field measurements and appropriate placement of the metrology targets within the field are required to achieve the on-product overlay control goals for N7 HVM.

Integrated approach to improving local CD uniformity in EUV patterning

Science.gov (United States)

Liang, Andrew; Hermans, Jan; Tran, Timothy; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Dusa, Mircea; Singhal, Akhil; van Schravendijk, Bart; Dixit, Girish; Shamma, Nader

2017-03-01

Extreme ultraviolet (EUV) lithography is crucial to enabling technology scaling in pitch and critical dimension (CD). Currently, one of the key challenges of introducing EUV lithography to high volume manufacturing (HVM) is throughput, which requires high source power and high sensitivity chemically amplified photoresists. Important limiters of high sensitivity chemically amplified resists (CAR) are the effects of photon shot noise and resist blur on the number of photons received and of photoacids generated per feature, especially at the pitches required for 7 nm and 5 nm advanced technology nodes. These stochastic effects are reflected in via structures as hole-to-hole CD variation or local CD uniformity (LCDU). Here, we demonstrate a synergy of film stack deposition, EUV lithography, and plasma etch techniques to improve LCDU, which allows the use of high sensitivity resists required for the introduction of EUV HVM. Thus, to improve LCDU to a level required by 5 nm node and beyond, film stack deposition, EUV lithography, and plasma etch processes were combined and co-optimized to enhance LCDU reduction from synergies. Test wafers were created by depositing a pattern transfer stack on a substrate representative of a 5 nm node target layer. The pattern transfer stack consisted of an atomically smooth adhesion layer and two hardmasks and was deposited using the Lam VECTOR PECVD product family. These layers were designed to mitigate hole roughness, absorb out-of-band radiation, and provide additional outlets for etch to improve LCDU and control hole CD. These wafers were then exposed through an ASML NXE3350B EUV scanner using a variety of advanced positive tone EUV CAR. They were finally etched to the target substrate using Lam Flex dielectric etch and Kiyo conductor etch systems. Metrology methodologies to assess dimensional metrics as well as chip performance and defectivity were investigated to enable repeatable patterning process development. Illumination

AN IMAGING STUDY OF A COMPLEX SOLAR CORONAL RADIO ERUPTION

Energy Technology Data Exchange (ETDEWEB)

Feng, S. W.; Chen, Y.; Song, H. Q.; Wang, B.; Kong, X. L., E-mail: yaochen@sdu.edu.cn [Shandong Provincial Key Laboratory of Optical Astronomy and Solar-Terrestrial Environment, and Institute of Space Sciences, Shandong University, Weihai, Shandong 264209 (China)

2016-08-10

Solar coronal radio bursts are enhanced radio emission excited by energetic electrons accelerated during solar eruptions. Studying these bursts is important for investigating the origin and physical mechanism of energetic particles and further diagnosing coronal parameters. Earlier studies suffered from a lack of simultaneous high-quality imaging data of the radio burst and the eruptive structure in the inner corona. Here we present a study on a complex solar radio eruption consisting of a type II burst and three reversely drifting type III bursts, using simultaneous EUV and radio imaging data. It is found that the type II burst is closely associated with a propagating and evolving CME-driven EUV shock structure, originated initially at the northern shock flank and later transferred to the top part of the shock. This source transfer is coincident with the presence of shock decay and enhancing signatures observed at the corresponding side of the EUV front. The electron energy accelerated by the shock at the flank is estimated to be ∼0.3 c by examining the imaging data of the fast-drifting herringbone structure of the type II burst. The reverse-drifting type III sources are found to be within the ejecta and correlated with a likely reconnection event therein. The implications for further observational studies and relevant space weather forecasting techniques are discussed.

Plasma-based EUV light source

Science.gov (United States)

Shumlak, Uri; Golingo, Raymond; Nelson, Brian A.

2010-11-02

Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

The SOLAR-C Mission: Plan B Payload Concept

Science.gov (United States)

Shimizu, T.; Sakao, T.; Katsukawa, Y.; Group, J. S. W.

2012-08-01

The telescope concepts for the SOLAR-C Plan B mission as of the time of the Hinode-3 meeting were briefly presented for having comments from the international solar physics community. The telescope candidates are 1) near IR-visible-UV telescope with 1.5m aperture and enhanced spectro-polarimetric capability, 2) UV/EUV high throughput spectrometer, and 3) next generation X-ray telescope.

Relationship between resist outgassing and EUV witness sample contamination in NXE outgas qualification using electrons and EUV photons

Science.gov (United States)

Pollentier, I.; Tirumala Venkata, A.; Gronheid, R.

2014-04-01

EUV photoresists are considered as a potential source of optics contamination, since they introduce irradiation-induced outgassing in the EUV vacuum environment. Therefore, before these resists can be used on e.g. ASML NXE:3100 or NXE:3300, they need to be tested in dedicated equipment according to a well-defined procedure, which is based on exposing a witness sample (WS) in the vicinity of a simultaneously exposed resist as it outgasses. Different system infrastructures are used at multiple sites (e.g. NIST, CNSE, Sematech, EIDEC, and imec) and were calibrated to each other by a detailed test plan. Despite this detailed tool qualifications, a first round robin comparison of identical materials showed inconsistent outgas test results, and required further investigation by a second round robin. Since the resist exposure mode is different at the various locations (some sites are using EUV photons while others use E-gun electrons), this difference has always a point of concern for variability of test results. In this work we compare the outgas test results from EUV photon and electron exposure using the resist materials of the second round robin. Since the imec outgas tester allows both exposure methods on the resist, a within-system comparison is possible and showed limited variation between photon and electron exposure mode. Therefore the system-to-system variability amongst the different outgas test sites is expected to be related to other parameters than the electron/photon exposure mode. Initial work showed that the variability might be related to temperature, E-gun emission excursion, and/or residual outgassing scaled by different wafer areas at the different sites.

The comparative effect of FUV, EUV and X-ray disc photoevaporation on gas giant separations

Science.gov (United States)

Jennings, Jeff; Ercolano, Barbara; Rosotti, Giovanni P.

2018-04-01

Gas giants' early (≲ 5 Myr) orbital evolution occurs in a disc losing mass in part to photoevaporation driven by high energy irradiance from the host star. This process may ultimately overcome viscous accretion to disperse the disc and halt migrating giants by starving their orbits of gas, imprinting on giant planet separations in evolved systems. Inversion of this distribution could then give insight into whether stellar FUV, EUV or X-ray flux dominates photoevaporation, constraining planet formation and disc evolution models. We use a 1D hydrodynamic code in population syntheses for gas giants undergoing Type II migration in a viscously evolving disc subject to either a primarily FUV, EUV or X-ray flux from a pre-solar T Tauri star. The photoevaporative mass loss profile's unique peak location and width in each energetic regime produces characteristic features in the distribution of giant separations: a severe dearth of ≲ 2 MJ planets interior to 5 AU in the FUV scenario, a sharp concentration of ≲ 3 MJ planets between ≈1.5 - 2 AU in the EUV case, and a relative abundance of ≈2 - 3.5 MJ giants interior to 0.5 AU in the X-ray model. These features do not resemble the observational sample of gas giants with mass constraints, though our results do show some weaker qualitative similarities. We thus assess how the differing photoevaporative profiles interact with migrating giants and address the effects of large model uncertainties as a step to better connect disc models with trends in the exoplanet population.

The EUVE Mission at UCB: Squeezing More From Less

Science.gov (United States)

Stroozas, B. A.; Cullison, J. L.; McDonald, K. E.; Nevitt, R.; Malina, R. F.

2000-05-01

With 8 years on orbit, and over three years in an outsourced mode at U.C. Berkeley (UCB), NASA's Extreme Ultraviolet Explorer (EUVE) continues to be a highly mature and productive scientific mission. The EUVE satellite is extremely stable and exhibits little degradation in its original scientific capabilities, and science data return continues to be at the >99% level. The Project's very small, dedicated, innovative, and relatively cheap ( \\$1 million/year) support team at UCB continues to validate the success of NASA's outsourcing "experiment" while providing a very high science-per-dollar return on NASA's investment with no significant additional risk to the flight systems. The EUVE mission still has much more to offer in terms of important and exciting scientific discoveries as well as mission operations innovations. To highlight this belief the EUVE team at UCB continues to find creative ways to do more with less -- to squeeze the maximum out of available funds -- in NASA's "cheaper, better, faster" environment. This paper provides an overview of the EUVE mission's past, current, and potential future efforts toward automating and integrating its multi-functional data processing systems in proposal management, observation planning, mission operations and engineering, and the processing, archival, and delivery of raw telemetry and science data products. The paper will also discuss the creative allocation of the Project's few remaining personnel resources who support both core mission functions and new innovations, while at the same time minimizing overall risk and stretching the available budget. This work is funded through NASA/UCB Cooperative Agreement NCC5-138.

Nanoimaging using soft X-ray and EUV laser-plasma sources

Science.gov (United States)

Wachulak, Przemyslaw; Torrisi, Alfio; Ayele, Mesfin; Bartnik, Andrzej; Czwartos, Joanna; Węgrzyński, Łukasz; Fok, Tomasz; Fiedorowicz, Henryk

2018-01-01

In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the "water-window" spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Mission Concepts for High-Resolution Solar Imaging with a Photon Sieve

Science.gov (United States)

Rabin, Douglas M.; Davila, Joseph; Daw, Adrian N.; Denis, Kevin L.; Novo-Gradac, Anne-Marie; Shah, Neerav; Widmyer, Thomas R.

2017-08-01

The best EUV coronal imagers are unable to probe the expected energy dissipation scales of the solar corona (rocket, a single spacecraft with a deployed boom, and two spacecraft flying in precise formation.

EUV-angle resolved scatter (EUV-ARS): a new tool for the characterization of nanometre structures

Science.gov (United States)

Fernández Herrero, Analía.; Mentzel, Heiko; Soltwisch, Victor; Jaroslawzew, Sina; Laubis, Christian; Scholze, Frank

2018-03-01

The advance of the semiconductor industry requires new metrology methods, which can deal with smaller and more complex nanostructures. Particularly for inline metrology a rapid, sensitive and non destructive method is needed. Small angle X-ray scattering under grazing incidence has already been investigated for this application and delivers significant statistical information which tracks the profile parameters as well as their variations, i.e. roughness. However, it suffers from the elongated footprint at the sample. The advantage of EUV radiation, with its longer wavelengths, is that larger incidence angles can be used, resulting in a significant reduction of the beam footprint. Targets with field sizes of 100 μm and smaller are accessible with our experimental set-up. We present a new experimental tool for the measurement of small structures based on the capabilities of soft X-ray and EUV scatterometry at the PTB soft X-ray beamline at the electron storage ring BESSY II. PTB's soft X-ray radiometry beamline uses a plane grating monochromator, which covers the spectral range from 0.7 nm to 25 nm and was especially designed to provide highly collimated radiation. An area detector covers the scattered radiation from a grazing exit angle up to an angle of 30° above the sample horizon and the fluorescence emission can be detected with an energy dispersive X-ray silicon drift detector. In addition, the sample can be rotated and linearly moved in vacuum. This new set-up will be used to explore the capabilities of EUV-scatterometry for the characterization of nanometre-sized structures.

EUV sources for the alpha-tools

Science.gov (United States)

Pankert, Joseph; Apetz, Rolf; Bergmann, Klaus; Damen, Marcel; Derra, Günther; Franken, Oliver; Janssen, Maurice; Jonkers, Jeroen; Klein, Jürgen; Kraus, Helmar; Krücken, Thomas; List, Andreas; Loeken, Micheal; Mader, Arnaud; Metzmacher, Christof; Neff, Willi; Probst, Sven; Prümmer, Ralph; Rosier, Oliver; Schwabe, Stefan; Seiwert, Stefan; Siemons, Guido; Vaudrevange, Dominik; Wagemann, Dirk; Weber, Achim; Zink, Peter; Zitzen, Oliver

2006-03-01

In this paper, we report on the recent progress of the Philips Extreme UV source. The Philips source concept is based on a discharge plasma ignited in a Sn vapor plume that is ablated by a laser pulse. Using rotating electrodes covered with a regenerating tin surface, the problems of electrode erosion and power scaling are fundamentally solved. Most of the work of the past year has been dedicated to develop a lamp system which is operating very reliably and stable under full scanner remote control. Topics addressed were the development of the scanner interface, a dose control system, thermo-mechanical design, positional stability of the source, tin handling, and many more. The resulting EUV source-the Philips NovaTin(R) source-can operate at more than 10kW electrical input power and delivers 200W in-band EUV into 2π continuously. The source is very small, so nearly 100% of the EUV radiation can be collected within etendue limits. The lamp system is fully automated and can operate unattended under full scanner remote control. 500 Million shots of continuous operation without interruption have been realized, electrode lifetime is at least 2 Billion shots. Three sources are currently being prepared, two of them will be integrated into the first EUV Alpha Demonstration tools of ASML. The debris problem was reduced to a level which is well acceptable for scanner operation. First, a considerable reduction of the Sn emission of the source has been realized. The debris mitigation system is based on a two-step concept using a foil trap based stage and a chemical cleaning stage. Both steps were improved considerably. A collector lifetime of 1 Billion shots is achieved, after this operating time a cleaning would be applied. The cleaning step has been verified to work with tolerable Sn residues. From the experimental results, a total collector lifetime of more than 10 Billion shots can be expected.

EB and EUV lithography using inedible cellulose-based biomass resist material

Science.gov (United States)

Takei, Satoshi; Hanabata, Makoto; Oshima, Akihiro; Kashiwakura, Miki; Kozawa, Takahiro; Tagawa, Seiichi

2016-03-01

The validity of our approach of inedible cellulose-based resist material derived from woody biomass has been confirmed experimentally for the use of pure water in organic solvent-free water spin-coating and tetramethylammonium hydroxide(TMAH)-free water-developable techniques of eco-conscious electron beam (EB) and extreme-ultraviolet (EUV) lithography. The water developable, non-chemically amplified, high sensitive, and negative tone resist material in EB and EUV lithography was developed for environmental affair, safety, easiness of handling, and health of the working people. The inedible cellulose-based biomass resist material was developed by replacing the hydroxyl groups in the beta-linked disaccharides with EB and EUV sensitive groups. The 50-100 nm line and space width, and little footing profiles of cellulose-based biomass resist material on hardmask and layer were resolved at the doses of 10-30 μC/cm2. The eco-conscious lithography techniques was referred to as green EB and EUV lithography using inedible cellulose-based biomass resist material.

Thermodynamic Spectrum of Solar Flares Based on SDO/EVE Observations: Techniques and First Results

Science.gov (United States)

Wang, Yuming; Zhou, Zhenjun; Zhang, Jie; Liu, Kai; Liu, Rui; Shen, Chenglong; Chamberlin, Phillip C.

2016-01-01

The Solar Dynamics Observatory (SDO)/EUV Variability Experiment (EVE) provides rich information on the thermodynamic processes of solar activities, particularly on solar flares. Here, we develop a method to construct thermodynamic spectrum (TDS) charts based on the EVE spectral lines. This tool could potentially be useful for extreme ultraviolet (EUV) astronomy to learn about the eruptive activities on distant astronomical objects. Through several cases, we illustrate what we can learn from the TDS charts. Furthermore, we apply the TDS method to 74 flares equal to or greater than the M5.0 class, and reach the following statistical results. First, EUV peaks are always behind the soft X-ray (SXR) peaks and stronger flares tend to have faster cooling rates. There is a power-law correlation between the peak delay times and the cooling rates, suggesting a coherent cooling process of flares from SXR to EUV emissions. Second, there are two distinct temperature drift patterns, called Type I and Type II. For Type I flares, the enhanced emission drifts from high to low temperature like a quadrilateral, whereas for Type II flares the drift pattern looks like a triangle. Statistical analysis suggests that Type II flares are more impulsive than Type I flares. Third, for late-phase flares, the peak intensity ratio of the late phase to the main phase is roughly correlated with the flare class, and the flares with a strong late phase are all confined. We believe that the re-deposition of the energy carried by a flux rope, which unsuccessfully erupts out, into thermal emissions is responsible for the strong late phase found in a confined flare. Furthermore, we show the signatures of the flare thermodynamic process in the chromosphere and transition region in the TDS charts. These results provide new clues to advance our understanding of the thermodynamic processes of solar flares and associated solar eruptions, e.g., coronal mass ejections.

Neon-like Iron Ion Lines Measured in NIFS/Large Helical Device (LHD) and Hinode/EUV Imaging Spectrometer (EIS)

Science.gov (United States)

Watanabe, Tetsuya; Hara, Hirohisa; Murakami, Izumi; Kato, Daiji; Sakaue, Hiroyuki A.; Morita, Shigeru; Suzuki, Chihiro; Tamura, Naoki; Yamamoto, Norimasa; Nakamura, Nobuyuki

2017-06-01

Line intensities emerging from the Ne-sequence iron ion (Fe XVII) are measured in the laboratory, by the Large Helical Device at the National Institute for Fusion Science, and in the solar corona by the EUV Imaging Spectrometer (EIS) on board the Hinode mission. The intensity ratios of Fe XVII λ 204.6/λ 254.8 are derived in the laboratory by unblending the contributions of the Fe XIII and XII line intensities. They are consistent with theoretical predictions and solar observations, the latter of which endorses the in-flight radiometric calibrations of the EIS instrument. The still remaining temperature-dependent behavior of the line ratio suggests the contamination of lower-temperature iron lines that are blended with the λ 204.6 line.

Neon-like Iron Ion Lines Measured in NIFS/Large Helical Device (LHD) and Hinode /EUV Imaging Spectrometer (EIS)

Energy Technology Data Exchange (ETDEWEB)

Watanabe, Tetsuya; Hara, Hirohisa [National Astronomical Observatory, National Institutes of Natural Sciences 2-21-1 Osawa Mitaka Tokyo, 181-8588 (Japan); Murakami, Izumi; Kato, Daiji; Morita, Shigeru [SOKENDAI (Graduate University for Advanced Studies) Hayama, Miura-gun, Kanagawa, 240-0193 (Japan); Sakaue, Hiroyuki A.; Suzuki, Chihiro; Tamura, Naoki [National Institute for Fusion Science, National Institutes of Natural Sciences 322-6 Oroshi-cho, Toki Gifu, 509-5292 (Japan); Yamamoto, Norimasa [Chubu University 1200 Matsumoto-cho, Kasugai Aichi, 487-0027 (Japan); Nakamura, Nobuyuki, E-mail: watanabe@uvlab.mtk.nao.ac.jp [The University of Electro-Communications 1-5-1 Chofugaoka, Chofu Tokyo, 182-8585 (Japan)

2017-06-10

Line intensities emerging from the Ne-sequence iron ion (Fe xvii) are measured in the laboratory, by the Large Helical Device at the National Institute for Fusion Science, and in the solar corona by the EUV Imaging Spectrometer (EIS) on board the Hinode mission. The intensity ratios of Fe xvii λ 204.6/ λ 254.8 are derived in the laboratory by unblending the contributions of the Fe xiii and xii line intensities. They are consistent with theoretical predictions and solar observations, the latter of which endorses the in-flight radiometric calibrations of the EIS instrument. The still remaining temperature-dependent behavior of the line ratio suggests the contamination of lower-temperature iron lines that are blended with the λ 204.6 line.

Solar magnetism eXplorer (SolmeX). Exploring the magnetic field in the upper atmosphere of our closest star

Science.gov (United States)

Peter, Hardi; Abbo, L.; Andretta, V.; Auchère, F.; Bemporad, A.; Berrilli, F.; Bommier, V.; Braukhane, A.; Casini, R.; Curdt, W.; Davila, J.; Dittus, H.; Fineschi, S.; Fludra, A.; Gandorfer, A.; Griffin, D.; Inhester, B.; Lagg, A.; Landi Degl'Innocenti, E.; Maiwald, V.; Sainz, R. Manso; Martínez Pillet, V; Matthews, S.; Moses, D.; Parenti, S.; Pietarila, A.; Quantius, D.; Raouafi, N.-E.; Raymond, J.; Rochus, P.; Romberg, O.; Schlotterer, M.; Schühle, U.; Solanki, S.; Spadaro, D.; Teriaca, L.; Tomczyk, S.; Trujillo Bueno, J.; Vial, J.-C.

2012-04-01

The magnetic field plays a pivotal role in many fields of Astrophysics. This is especially true for the physics of the solar atmosphere. Measuring the magnetic field in the upper solar atmosphere is crucial to understand the nature of the underlying physical processes that drive the violent dynamics of the solar corona—that can also affect life on Earth. SolmeX, a fully equipped solar space observatory for remote-sensing observations, will provide the first comprehensive measurements of the strength and direction of the magnetic field in the upper solar atmosphere. The mission consists of two spacecraft, one carrying the instruments, and another one in formation flight at a distance of about 200 m carrying the occulter to provide an artificial total solar eclipse. This will ensure high-quality coronagraphic observations above the solar limb. SolmeX integrates two spectro-polarimetric coronagraphs for off-limb observations, one in the EUV and one in the IR, and three instruments for observations on the disk. The latter comprises one imaging polarimeter in the EUV for coronal studies, a spectro-polarimeter in the EUV to investigate the low corona, and an imaging spectro-polarimeter in the UV for chromospheric studies. SOHO and other existing missions have investigated the emission of the upper atmosphere in detail (not considering polarization), and as this will be the case also for missions planned for the near future. Therefore it is timely that SolmeX provides the final piece of the observational quest by measuring the magnetic field in the upper atmosphere through polarimetric observations.

Solar activity indices as a proxy for the variation of ionospheric Total Electron Content (TEC) over Bahir Dar, Ethiopia during the year 2010-2014

Science.gov (United States)

Kassa, Tsegaye; Tilahun, Samson; Damtie, Baylie

2017-09-01

This paper was aimed at investigating the solar variations of vTEC as a function of solar activity parameters, EUV and F10.7 radio flux. The daily values of ionospheric vertical Total Electron Content (vTEC) were observed using a dual frequency GPS receiver deployed at Bahir Dar (11.6°N and 37.36°E), Ethiopia. Measurements were taken during the period of 2010-2014 for successive five years and analysis was done on only quiet day observations. A quadratic fit was used as a model to describe the daily variation of vTEC in relation to solar parameters. Linear and non-linear coefficients of the vTEC variations were calculated in order to capture the trend of the variation. The variation of vTEC have showed good agreement with the trend of solar parameters in almost all of the days we consider during the period of our observations. We have explicitly observed days with insignificant TECU deviation (eg. modeling with respect to EUV, DOY = 49 in 2010 and modeling with respect to F10.7, DOY = 125 in 2012 and the like) and days with maximum deviation (about 50 TECU). A maximum deviation were observed, on average, during months of equinox whereas minimum during solstice months. This implies that there is a need to consider more parameters, including EUV and F10.7, that can affect the variation of vTEC during equinox seasons. Relatively, small deviations was observed in modeling vTEC as a function of EUV compared to that of the variation due to F10.7 cm flux. This may also tell us that EUV can be more suitable in modeling the solar variation of vTEC especially for longterm trends. Even though, the linear trend of solar variations of vTEC was frequently observed, significant saturation and amplification trends of the solar variations of vTEC were also observed to some extent across the months of the years we have analyzed. This mixed trend of the solar variation of vTEC implies the need for thorough investigation on the effect of solar parameters on TEC. However, based on

Strong non-radial propagation of energetic electrons in solar corona

Science.gov (United States)

Klassen, A.; Dresing, N.; Gómez-Herrero, R.; Heber, B.; Veronig, A.

2018-06-01

Analyzing the sequence of solar energetic electron events measured at both STEREO-A (STA) and STEREO-B (STB) spacecraft during 17-21 July 2014, when their orbital separation was 34°, we found evidence of a strong non-radial electron propagation in the solar corona below the solar wind source surface. The impulsive electron events were associated with recurrent flare and jet (hereafter flare/jet) activity at the border of an isolated coronal hole situated close to the solar equator. We have focused our study on the solar energetic particle (SEP) event on 17 July 2014, during which both spacecraft detected a similar impulsive and anisotropic energetic electron event suggesting optimal connection of both spacecraft to the parent particle source, despite the large angular separation between the parent flare and the nominal magnetic footpoints on the source surface of STA and STB of 68° and 90°, respectively. Combining the remote-sensing extreme ultraviolet (EUV) observations, in-situ plasma, magnetic field, and energetic particle data we investigated and discuss here the origin and the propagation trajectory of energetic electrons in the solar corona. We find that the energetic electrons in the energy range of 55-195 keV together with the associated EUV jet were injected from the flare site toward the spacecraft's magnetic footpoints and propagate along a strongly non-radial and inclined magnetic field below the source surface. From stereoscopic (EUV) observations we estimated the inclination angle of the jet trajectory and the respective magnetic field of 63° ± 11° relative to the radial direction. We show how the flare accelerated electrons reach very distant longitudes in the heliosphere, when the spacecraft are nominally not connected to the particle source. This example illustrates how ballistic backmapping can occasionally fail to characterize the magnetic connectivity during SEP events. This finding also provides an additional mechanism (one among others

Impulsive EUV bursts observed in C IV with OSO-8. [UV solar spectra

Science.gov (United States)

Athay, R. G.; White, O. R.; Lites, B. W.; Bruner, E. C., Jr.

1980-01-01

Time sequences of profiles of the 1548 A line of C IV containing 51 EUV bursts observed in or near active regions are analyzed to determine the brightness, Doppler shift and line broadening characteristics of the bursts. The bursts have mean lifetimes of approximately 150 s, and mean increases in brightness at burst maximum of four-fold as observed with a field of view of 2 x 20 arc sec. Mean burst diameters are estimated to be 3 arc sec, or smaller. All but three of the bursts show Doppler shifts with velocities sometimes exceeding 75 km/s; 31 are dominated by red shifts and 17 are dominated by blue shifts. Approximately half of the latter group have red-shifted precursors. The bursts are interpreted as prominence material, such as surges and coronal rain, moving through the field of view of the spectrometer.

High performance EUV multilayer structures insensitive to capping layer optical parameters.

Science.gov (United States)

Pelizzo, Maria Guglielmina; Suman, Michele; Monaco, Gianni; Nicolosi, Piergiorgio; Windt, David L

2008-09-15

We have designed and tested a-periodic multilayer structures containing protective capping layers in order to obtain improved stability with respect to any possible changes of the capping layer optical properties (due to oxidation and contamination, for example)-while simultaneously maximizing the EUV reflection efficiency for specific applications, and in particular for EUV lithography. Such coatings may be particularly useful in EUV lithographic apparatus, because they provide both high integrated photon flux and higher stability to the harsh operating environment, which can affect seriously the performance of the multilayer-coated projector system optics. In this work, an evolutive algorithm has been developed in order to design these a-periodic structures, which have been proven to have also the property of stable performance with respect to random layer thickness errors that might occur during coating deposition. Prototypes have been fabricated, and tested with EUV and X-ray reflectometry, and secondary electron spectroscopy. The experimental results clearly show improved performance of our new a-periodic coatings design compared with standard periodic multilayer structures.

Solar flare loops observations and interpretations

CERN Document Server

Huang, Guangli; Ji, Haisheng; Ning, Zongjun

2018-01-01

This book provides results of analysis of typical solar events, statistical analysis, the diagnostics of energetic electrons and magnetic field, as well as the global behavior of solar flaring loops such as their contraction and expansion. It pays particular attention to analyzing solar flare loops with microwave, hard X-ray, optical and EUV emissions, as well as the theories of their radiation, and electron acceleration/transport. The results concerning influence of the pitch-angle anisotropy of non-thermal electrons on their microwave and hard X-ray emissions, new spectral behaviors in X-ray and microwave bands, and results related to the contraction of flaring loops, are widely discussed in the literature of solar physics. The book is useful for graduate students and researchers in solar and space physics.

Characterization of EUV induced carbon films using laser-generated surface acoustic waves

NARCIS (Netherlands)

Chen, Juequan; Lee, Christopher James; Louis, Eric; Bijkerk, Frederik; Kunze, Reinhard; Schmidt, Hagen; Schneider, Dieter; Moors, Roel

2009-01-01

The deposition of carbon layers on the surfaces of optics exposed to extreme ultraviolet (EUV) radiation has been observed in EUV lithography. It has become of critical importance to detect the presence of the carbon layer in the order of nanometer thickness due to carbon's extremely strong

Temperature and EUV Intensity in a Coronal Prominence Cavity and Streamer

Science.gov (United States)

Kucera, T. A.; Gibson, S.E.; Schmit, D. J.; Landi, E.; Tripathi, D.

2012-01-01

We analyze the temperature and EUV line emission of a coronal cavity and surrounding streamer in terms of a morphological forward model. We use a series of iron line ratios observed with the Hinode Extreme-ultraviolet Imaging Spectrograph (EIS) on 2007 Aug. 9 to constrain temperature as a function of altitude in a morphological forward model of the streamer and cavity. We also compare model prediction of the EIS EUV line intensities and polarized brightness (pB) data from the Mauna Loa Solar Observatory (MLSO) MK4. This work builds on earlier analysis using the same model to determine geometry of and density in the same cavity and streamer. The fit to the data with altitude dependent temperature profiles indicates that both the streamer and cavity have temperatures in the range 1.4-1.7 MK. However, the cavity exhibits substantial substructure such that the altitude dependent temperature profile is not sufficient to completely model conditions in the cavity. Coronal prominence cavities are structured by magnetism so clues to this structure are to be found in their plasma properties. These temperature substructures are likely related to structures in the cavity magnetic field. Furthermore, we find that the model overestimates the line intensities by a factor of 4-10, while overestimating pB data by no more than a factor of 1.4. One possible explanation for this is that there may be a significant amount of material at temperatures outside of the range log T(K) approximately equals 5.8 - 6.7 in both the cavity and the streamer.

EUV lithography for 22nm half pitch and beyond: exploring resolution, LWR, and sensitivity tradeoffs

Science.gov (United States)

Putna, E. Steve; Younkin, Todd R.; Leeson, Michael; Caudillo, Roman; Bacuita, Terence; Shah, Uday; Chandhok, Manish

2011-04-01

The International Technology Roadmap for Semiconductors (ITRS) denotes Extreme Ultraviolet (EUV) lithography as a leading technology option for realizing the 22nm half pitch node and beyond. According to recent assessments made at the 2010 EUVL Symposium, the readiness of EUV materials remains one of the top risk items for EUV adoption. The main development issue regarding EUV resists has been how to simultaneously achieve high resolution, high sensitivity, and low line width roughness (LWR). This paper describes our strategy, the current status of EUV materials, and the integrated post-development LWR reduction efforts made at Intel Corporation. Data collected utilizing Intel's Micro- Exposure Tool (MET) is presented in order to examine the feasibility of establishing a resist process that simultaneously exhibits <=22nm half-pitch (HP) L/S resolution at <=11.3mJ/cm2 with <=3nm LWR.

High-Resolution EUV Spectroscopy of White Dwarfs

Science.gov (United States)

Kowalski, Michael P.; Wood, K. S.; Barstow, M. A.

2014-01-01

We compare results of high-resolution EUV spectroscopic measurements of the isolated white dwarf G191-B2B and the binary system Feige 24 obtained with the J-PEX (Joint Plasmadynamic Experiment), which was sponsored jointly by the U.S. Naval Research Laboratory and NASA. J-PEX delivers the world's highest resolution in EUV and does so at high effective area (e.g., more effective area in a sounding rocket than is available with Chandra at adjacent energies, but in a waveband Chandra cannot reach). The capability J-PEX represents is applicable to the astrophysics of hot plasmas in stellar coronae, white dwarfs and the ISM. G191-B2B and Feige 24 are quite distinct hot white dwarf systems having in common that they are bright in the portion of the EUV where He emission features and edges occur, hence they can be exploited to probe both the stellar atmosphere and the ISM, separating those components by model-fitting that sums over all relevant (He) spectral features in the band. There is evidence from these fits that atmospheric He is being detected but the result is more conservatively cast as a pair of upper limits. We discuss how longer duration satellite observations with the same instrumentation could increase exposure to detect atmospheric He in these and other nearby hot white dwarfs.

MASC: Magnetic Activity of the Solar Corona

Science.gov (United States)

Auchere, Frederic; Fineschi, Silvano; Gan, Weiqun; Peter, Hardi; Vial, Jean-Claude; Zhukov, Andrei; Parenti, Susanna; Li, Hui; Romoli, Marco

We present MASC, an innovative payload designed to explore the magnetic activity of the solar corona. It is composed of three complementary instruments: a Hard-X-ray spectrometer, a UV / EUV imager, and a Visible Light / UV polarimetric coronagraph able to measure the coronal magnetic field. The solar corona is structured in magnetically closed and open structures from which slow and fast solar winds are respectively released. In spite of much progress brought by two decades of almost uninterrupted observations from several space missions, the sources and acceleration mechanisms of both types are still not understood. This continuous expansion of the solar atmosphere is disturbed by sporadic but frequent and violent events. Coronal mass ejections (CMEs) are large-scale massive eruptions of magnetic structures out of the corona, while solar flares trace the sudden heating of coronal plasma and the acceleration of electrons and ions to high, sometimes relativistic, energies. Both phenomena are most probably driven by instabilities of the magnetic field in the corona. The relations between flares and CMEs are still not understood in terms of initiation and energy partition between large-scale motions, small-scale heating and particle acceleration. The initiation is probably related to magnetic reconnection which itself results magnetic topological changes due to e.g. flux emergence, footpoints motions, etc. Acceleration and heating are also strongly coupled since the atmospheric heating is thought to result from the impact of accelerated particles. The measurement of both physical processes and their outputs is consequently of major importance. However, despite its fundamental importance as a driver for the physics of the Sun and of the heliosphere, the magnetic field of our star’s outer atmosphere remains poorly understood. This is due in large part to the fact that the magnetic field is a very difficult quantity to measure. Our knowledge of its strength and

Mask characterization for CDU budget breakdown in advanced EUV lithography

Science.gov (United States)

Nikolsky, Peter; Strolenberg, Chris; Nielsen, Rasmus; Nooitgedacht, Tjitte; Davydova, Natalia; Yang, Greg; Lee, Shawn; Park, Chang-Min; Kim, Insung; Yeo, Jeong-Ho

2012-11-01

As the ITRS Critical Dimension Uniformity (CDU) specification shrinks, semiconductor companies need to maintain a high yield of good wafers per day and a high performance (and hence market value) of finished products. This cannot be achieved without continuous analysis and improvement of on-product CDU as one of the main drivers for process control and optimization with better understanding of main contributors from the litho cluster: mask, process, metrology and scanner. In this paper we will demonstrate a study of mask CDU characterization and its impact on CDU Budget Breakdown (CDU BB) performed for an advanced EUV lithography with 1D and 2D feature cases. We will show that this CDU contributor is one of the main differentiators between well-known ArFi and new EUV CDU budgeting principles. We found that reticle contribution to intrafield CDU should be characterized in a specific way: mask absorber thickness fingerprints play a role comparable with reticle CDU in the total reticle part of the CDU budget. Wafer CD fingerprints, introduced by this contributor, may or may not compensate variations of mask CD's and hence influence on total mask impact on intrafield CDU at the wafer level. This will be shown on 1D and 2D feature examples in this paper. Also mask stack reflectivity variations should be taken into account: these fingerprints have visible impact on intrafield CDs at the wafer level and should be considered as another contributor to the reticle part of EUV CDU budget. We observed also MEEF-through-field fingerprints in the studied EUV cases. Variations of MEEF may also play a role for the total intrafield CDU and may be taken into account for EUV Lithography. We characterized MEEF-through-field for the reviewed features, the results to be discussed in our paper, but further analysis of this phenomenon is required. This comprehensive approach to characterization of the mask part of EUV CDU characterization delivers an accurate and integral CDU Budget

Negative-tone imaging with EUV exposure toward 13nm hp

Science.gov (United States)

Tsubaki, Hideaki; Nihashi, Wataru; Tsuchihashi, Toru; Yamamoto, Kei; Goto, Takahiro

2016-03-01

Negative-tone imaging (NTI) with EUV exposure has major advantages with respect to line-width roughness (LWR) and resolution due in part to polymer swelling and favorable dissolution mechanics. In NTI process, both resist and organic solvents play important roles in determining lithography performances. The present study describes novel chemically amplified resist materials based on NTI technology with EUV using a specific organic solvents. Lithographic performances of NTI process were described in this paper under exposures using ASML NXE:3300 EUV scanner at imec. It is emphasized that 14 nm hp was nicely resolved under exposure dose of 37 mJ/cm2 without any bridge and collapse, which are attributed to the low swelling character of NTI process. Although 13 nm hp resolution was potentially obtained, a pattern collapse still restricts its resolution in case coating resist film thickness is 40 nm. Dark mask limitation due mainly to mask defectivity issue makes NTI with EUV favorable approach for printing block mask to produce logic circuit. A good resolution of CD-X 21 nm/CD-Y 32 nm was obtained for block mask pattern using NTI with usable process window and dose of 49 mJ/cm2. Minimum resolution now reaches CD-X 17 nm / CD-Y 23 nm for the block. A 21 nm block mask resolution was not affected by exposure dose and explored toward low dose down to 18 mJ/cm2 by reducing quencher loading. In addition, there was a negligible amount of increase in LCDU for isolated dot pattern when decreasing exposure dose from 66 mJ/cm2 to 24 mJ/cm2. On the other hand, there appeared tradeoff relationship between LCDU and dose for dense dot pattern, indicating photon-shot noise restriction, but strong dependency on patterning features. Design to improve acid generation efficiency was described based on acid generation mechanism in traditional chemically amplified materials which contains photo-acid generator (PAG) and polymer. Conventional EUV absorber comprises of organic compounds is

Physical processes in EUV sources for microlithography

International Nuclear Information System (INIS)

Banine, V Y; Swinkels, G H P M; Koshelev, K N

2011-01-01

The source is an integral part of an extreme ultraviolet lithography (EUVL) tool. Such a source, as well as the EUVL tool, has to fulfil very high demands both technical and cost oriented. The EUVL tool operates at a wavelength of 13.5 nm, which requires the following new developments. - The light production mechanism changes from conventional lamps and lasers to relatively high-temperature emitting plasmas. - The light transport, mainly refractive for deep ultraviolet (DUV), should be reflective for EUV. - The source specifications as derived from the customer requirements on wafer throughput mean that the output EUV source power has to be hundreds of watts. This in its turn means that tens to hundreds of kilowatts of dissipated power has to be managed in a relatively small volume. - In order to keep lithography costs as low as possible, the lifetime of the components should be as long as possible and at least of the order of thousands of hours. This poses a challenge for the sources, namely how to design and manufacture components robust enough to withstand the intense environment of high heat dissipation, flows of several keV ions as well as the atomic and particular debris within the source vessel. - As with all lithography tools, the imaging requirements demand a narrow illumination bandwidth. Absorption of materials at EUV wavelengths is extreme with extinguishing lengths of the order of tens of nanometres, so the balance between high transmission and spectral purity requires careful engineering. All together, EUV lithography sources present technological challenges in various fields of physics such as plasma, optics and material science. These challenges are being tackled by the source manufacturers and investigated extensively in the research facilities around the world. An overview of the published results on the topic as well as the analyses of the physical processes behind the proposed solutions will be presented in this paper. (topical review)

EUV spectrum of highly charged tungsten ions in electron beam ion trap

International Nuclear Information System (INIS)

Sakaue, H.A.; Kato, D.; Murakami, I.; Nakamura, N.

2016-01-01

We present spectra of highly charged tungsten ions in the extreme ultra-violet (EUV) by using electron beam ion traps. The electron energy dependence of spectra was investigated for electron energy from 540 to 1370 eV. Previously unreported lines were presented in the EUV range, and comparing the wavelengths with theoretical calculations identified them. (author)

EQ-10 electrodeless Z-pinch EUV source for metrology applications

Science.gov (United States)

Gustafson, Deborah; Horne, Stephen F.; Partlow, Matthew J.; Besen, Matthew M.; Smith, Donald K.; Blackborow, Paul A.

2011-11-01

With EUV Lithography systems shipping, the requirements for highly reliable EUV sources for mask inspection and resist outgassing are becoming better defined, and more urgent. The sources needed for metrology applications are very different than that needed for lithography; brightness (not power) is the key requirement. Suppliers for HVM EUV sources have all resources working on high power and have not entered the smaller market for metrology. Energetiq Technology has been shipping the EQ-10 Electrodeless Z-pinchTM light source since 19951. The source is currently being used for metrology, mask inspection, and resist development2-4. These applications require especially stable performance in both output power and plasma size and position. Over the last 6 years Energetiq has made many source modifications which have included better thermal management to increase the brightness and power of the source. We now have introduced a new source that will meet requirements of some of the mask metrology first generation tools; this source will be reviewed.

Studies of EUV contamination mitigation

Science.gov (United States)

Graham, Samual, Jr.; Malinowski, Michael E.; Steinhaus, Chip; Grunow, Philip A.; Klebanoff, Leonard E.

2002-07-01

Carbon contamination removal was investigated using remote RF-O2, RF-H2, and atomic hydrogen experiments. Samples consisted of silicon wafers coated with 100 Angstrom sputtered carbon, as well as bare Si-capped Mo/Si optics. Samples were exposed to atomic hydrogen or RF plasma discharges at 100 W, 200 W, and 300 W. Carbon removal rate, optic oxidation rate, at-wavelength (13.4 nm) peak reflectance, and optic surface roughness were characterized. Data show that RF- O2 removes carbon at a rate approximately 6 times faster RF- H2 for a given discharge power. However, both cleaning techniques induce Mo/Si optic degradation through the loss of reflectivity associated with surface oxide growth for RF-O2 and an unknown mechanism with hydrogen cleaning. Atomic hydrogen cleaning shows carbon removal rates sufficient for use as an in-situ cleaning strategy for EUVoptics with less risk of optic degradation from overexposures than RF-discharge cleaning. While hydrogen cleaning (RF and atomic) of EUV optics has proven effective in carbon removal, attempts to dissociate hydrogen in co-exposures with EUV radiation have resulted in no detectable removal of carbon contamination.

Highly Stable, Large Format EUV Imager, Phase I

Data.gov (United States)

National Aeronautics and Space Administration — Higher detection efficiency and better radiation tolerance imagers are needed for the next generation of EUV instruments. Previously, CCD technology has demonstrated...

A New Approach to Observing Coronal Dynamics: MUSE, the Multi-Slit Solar Explorer

Science.gov (United States)

Tarbell, T. D.

2017-12-01

The Multi-Slit Solar Explorer is a Small Explorer mission recently selected for a Phase A study, which could lead to a launch in 2022. It will provide unprecendented observations of the dynamics of the corona and transition region using both conventional and novel spectral imaging techniques. The physical processes that heat the multi-million degree solar corona, accelerate the solar wind and drive solar activity (CMEs and flares) remain poorly known. A breakthrough in these areas can only come from radically innovative instrumentation and state-of-the-art numerical modeling and will lead to better understanding of space weather origins. MUSE's multi-slit coronal spectroscopy will exploit a 100x improvement in spectral raster cadence to fill a crucial gap in our knowledge of Sun-Earth connections; it will reveal temperatures, velocities and non-thermal processes over a wide temperature range to diagnose physical processes that remain invisible to current or planned instruments. MUSE will contain two instruments: an EUV spectrograph (SG) and EUV context imager (CI). Both have similar spatial resolution and leverage extensive heritage from previous high-resolution instruments such as IRIS and the HiC rocket payload. The MUSE investigation will build on the success of IRIS by combining numerical modeling with a uniquely capable observatory: MUSE will obtain EUV spectra and images with the highest resolution in space (1/3 arcsec) and time (1-4 s) ever achieved for the transition region and corona, along 35 slits and a large context FOV simultaneously. The MUSE consortium includes LMSAL, SAO, Stanford, ARC, HAO, GSFC, MSFC, MSU, ITA Oslo and other institutions.

Analysis of a Failed Eclipse Plasma Ejection Using EUV Observations

Science.gov (United States)

Tavabi, E.; Koutchmy, S.; Bazin, C.

2018-03-01

The photometry of eclipse white-light (W-L) images showing a moving blob is interpreted for the first time together with observations from space with the PRoject for On Board Autonomy (PROBA-2) mission (ESA). An off-limb event seen with great details in W-L was analyzed with the SWAP imager ( Sun Watcher using Active pixel system detector and image Processing) working in the EUV near 174 Å. It is an elongated plasma blob structure of 25 Mm diameter moving above the east limb with coronal loops under. Summed and co-aligned SWAP images are evaluated using a 20-h sequence, in addition to the 11 July, 2010 eclipse W-L images taken from several sites. The Atmospheric Imaging Assembly (AIA) instrument on board the Solar Dynamics Observatory (SDO) recorded the event suggesting a magnetic reconnection near a high neutral point; accordingly, we also call it a magnetic plasmoid. The measured proper motion of the blob shows a velocity up to 12 km s^{-1}. Electron densities of the isolated condensation (cloud or blob or plasmoid) are photometrically evaluated. The typical value is 108 cm^{-3} at r=1.7 R_{⊙}, superposed on a background corona of 107 cm^{-3} density. The mass of the cloud near its maximum brightness is found to be 1.6×10^{13} g, which is typically 0.6×10^{-4} of the overall mass of the corona. From the extrapolated magnetic field the cloud evolves inside a rather broad open region but decelerates, after reaching its maximum brightness. The influence of such small events for supplying material to the ubiquitous slow wind is noticed. A precise evaluation of the EUV photometric data, after accurately removing the stray light, suggests an interpretation of the weak 174 Å radiation of the cloud as due to resonance scattering in the Fe IX/X lines.

EUV-VUV photochemistry in the upper atmospheres of Titan and the early Earth

Science.gov (United States)

Imanaka, H.; Smith, M. A.

2010-12-01

Titan, the organic-rich moon of Saturn, possesses a thick atmosphere of nitrogen, globally covered with organic haze layers. The recent Cassini’s INMS and CAPS observations clearly demonstrate the importance of complex organic chemistry in the ionosphere. EUV photon radiation is the major driving energy source there. Our previous laboratory study of the EUV-VUV photolysis of N2/CH4 gas mixtures demonstrates a unique role of nitrogen photoionization in the catalytic formation of complex hydrocarbons in Titan’s upper atmosphere (Imanaka and Smith, 2007, 2009). Such EUV photochemistry could also have played important roles in the formation of complex organic molecules in the ionosphere of the early Earth. It has been suggested that the early Earth atmosphere may have contained significant amount of reduced species (CH4, H2, and CO) (Kasting, 1990, Pavlov et al., 2001, Tian et al., 2005). Recent experimental study, using photon radiation at wavelengths longer than 110 nm, demonstrates that photochemical organic haze could have been generated from N2/CO2 atmospheres with trace amounts of CH4 or H2 (Trainer et al., 2006, Dewitt et al., 2009). However, possible EUV photochemical processes in the ionosphere are not well understood. We have investigated the effect of CO2 in the possible EUV photochemical processes in simulated reduced early Earth atmospheres. The EUV-VUV photochemistry using wavelength-tunable synchrotron light between 50 - 150 nm was investigated for gas mixtures of 13CO2/CH4 (= 96.7/3.3) and N2/13CO2/CH4 (= 90/6.7/3.3). The onsets of unsaturated hydrocarbon formation were observed at wavelengths shorter than the ionization potentials of CO2 and N2, respectively. This correlation indicates that CO2 can play a similar catalytic role to N2 in the formation of heavy organic species, which implies that EUV photochemistry might have significant impact on the photochemical generation of organic haze layers in the upper atmosphere of the early Earth.

Using the ionospheric response to the solar eclipse on 20 March 2015 to detect spatial structure in the solar corona

Science.gov (United States)

Bradford, J.; Bell, S. A.; Wilkinson, J.; Smith, D.; Tudor, S.

2016-01-01

The total solar eclipse that occurred over the Arctic region on 20 March 2015 was seen as a partial eclipse over much of Europe. Observations of this eclipse were used to investigate the high time resolution (1 min) decay and recovery of the Earth’s ionospheric E-region above the ionospheric monitoring station in Chilton, UK. At the altitude of this region (100 km), the maximum phase of the eclipse was 88.88% obscuration of the photosphere occurring at 9:29:41.5 UT. In comparison, the ionospheric response revealed a maximum obscuration of 66% (leaving a fraction, Φ, of uneclipsed radiation of 34±4%) occurring at 9:29 UT. The eclipse was re-created using data from the Solar Dynamics Observatory to estimate the fraction of radiation incident on the Earth’s atmosphere throughout the eclipse from nine different emission wavelengths in the extreme ultraviolet (EUV) and X-ray spectrum. These emissions, having varying spatial distributions, were each obscured differently during the eclipse. Those wavelengths associated with coronal emissions (94, 211 and 335 Å) most closely reproduced the time varying fraction of unobscured radiation observed in the ionosphere. These results could enable historic ionospheric eclipse measurements to be interpreted in terms of the distribution of EUV and X-ray emissions on the solar disc. This article is part of the themed issue ‘Atmospheric effects of solar eclipses stimulated by the 2015 UK eclipse’. PMID:27550766

Probing the Quiet Solar Atmosphere from the Photosphere to the Corona

Science.gov (United States)

Kontogiannis, Ioannis; Gontikakis, Costis; Tsiropoula, Georgia; Tziotziou, Kostas

2018-04-01

We investigate the morphology and temporal variability of a quiet-Sun network region in different solar layers. The emission in several extreme ultraviolet (EUV) spectral lines through both raster and slot time-series, recorded by the EUV Imaging Spectrometer (EIS) on board the Hinode spacecraft is studied along with Hα observations and high-resolution spectropolarimetric observations of the photospheric magnetic field. The photospheric magnetic field is extrapolated up to the corona, showing a multitude of large- and small-scale structures. We show for the first time that the smallest magnetic structures at both the network and internetwork contribute significantly to the emission in EUV lines, with temperatures ranging from 8× 104 K to 6× 105 K. Two components of transition region emission are present, one associated with small-scale loops that do not reach coronal temperatures, and another component that acts as an interface between coronal and chromospheric plasma. Both components are associated with persistent chromospheric structures. The temporal variability of the EUV intensity at the network region is also associated with chromospheric motions, pointing to a connection between transition region and chromospheric features. Intensity enhancements in the EUV transition region lines are preferentially produced by Hα upflows. Examination of two individual chromospheric jets shows that their evolution is associated with intensity variations in transition region and coronal temperatures.

Evaluation of spectroscopic modeling for iron ions and study on non-equilibrium ionization phenomena for solar and LHD plasmas

International Nuclear Information System (INIS)

Watanabe, Tetsuya; Hara, Hirohisa; Yamamoto, Norimasa; Kato, Daiji; Sakaue, Hiroyuki A.; Murakami, Izumi

2013-01-01

Spectroscopic observations of EUV emission lines in the transition region (TR) and the corona provide unique information on physical conditions in the outer atmosphere of the Sun. The EUV Imaging Spectrometer (EIS) on board the Hinode satellite is capable of observing, for the first time in EUV, spectra and monochromatic images of plasmas in the solar TR and corona; these plasmas could possibly be in non-ionization-equilibrium conditions. EIS observes over two-wavelength bands of 170 - 210 Å and 250 - 290 Å, with typical time-resolutions of 1 - 10 seconds. Iron line emissions emerging from these wavelengths reveal that dynamic plasma accelerations and heating take place in the solar atmosphere. On the other hand, the tracer-encapsulated-pellet (TESPEL) experiments provide spectral information of EUV emission lines from iron ions produced in the Large Helical Device (LHD). Relatively cool plasmas with electron temperatures similar to those of the solar corona can be generated by controlling the neutral beam injector (NBI) system. A time-dependent collisional radiative (CR) model for elemental iron is developed as a common tool to diagnose temperatures and densities of those plasmas in the Sun and in LHD; no systematic model yet exists for iron ions in the L- and M-shell ionization stages, which are very important for coronal plasma diagnostics. Adopting the best available theoretical calculations, as well as generating the experimental data, we improve the atomic parameters of highly charged iron ions, and these results are used to extract more accurate diagnostic information out of the EIS spectra. (author)

EPE fundamentals and impact of EUV: Will traditional design-rule calculations work in the era of EUV?

Science.gov (United States)

Gabor, Allen H.; Brendler, Andrew C.; Brunner, Timothy A.; Chen, Xuemei; Culp, James A.; Levinson, Harry J.

2018-03-01

The relationship between edge placement error, semiconductor design-rule determination and predicted yield in the era of EUV lithography is examined. This paper starts with the basics of edge placement error and then builds up to design-rule calculations. We show that edge placement error (EPE) definitions can be used as the building blocks for design-rule equations but that in the last several years the term "EPE" has been used in the literature to refer to many patterning errors that are not EPE. We then explore the concept of "Good Fields"1 and use it predict the n-sigma value needed for design-rule determination. Specifically, fundamental yield calculations based on the failure opportunities per chip are used to determine at what n-sigma "value" design-rules need to be tested to ensure high yield. The "value" can be a space between two features, an intersect area between two features, a minimum area of a feature, etc. It is shown that across chip variation of design-rule important values needs to be tested at sigma values between seven and eight which is much higher than the four-sigma values traditionally used for design-rule determination. After recommending new statistics be used for design-rule calculations the paper examines the impact of EUV lithography on sources of variation important for design-rule calculations. We show that stochastics can be treated as an effective dose variation that is fully sampled across every chip. Combining the increased within chip variation from EUV with the understanding that across chip variation of design-rule important values needs to not cause a yield loss at significantly higher sigma values than have traditionally been looked at, the conclusion is reached that across-wafer, wafer-to-wafer and lot-to-lot variation will have to overscale for any technology introducing EUV lithography where stochastic noise is a significant fraction of the effective dose variation. We will emphasize stochastic effects on edge placement

Metal Oxide Nanoparticle Photoresists for EUV Patterning

KAUST Repository

Jiang, Jing; Chakrabarty, Souvik; Yu, Mufei; Ober, Christopher K.

2014-01-01

© 2014SPST. Previous studies of methacrylate based nanoparticle have demonstrated the excellent pattern forming capability of these hybrid materials when used as photoresists under 13.5 nm EUV exposure. HfO2 and ZrO2 methacrylate resists have

EUV lithography for 30nm half pitch and beyond: exploring resolution, sensitivity, and LWR tradeoffs

Science.gov (United States)

Putna, E. Steve; Younkin, Todd R.; Chandhok, Manish; Frasure, Kent

2009-03-01

The International Technology Roadmap for Semiconductors (ITRS) denotes Extreme Ultraviolet (EUV) lithography as a leading technology option for realizing the 32nm half-pitch node and beyond. Readiness of EUV materials is currently one high risk area according to assessments made at the 2008 EUVL Symposium. The main development issue regarding EUV resist has been how to simultaneously achieve high sensitivity, high resolution, and low line width roughness (LWR). This paper describes the strategy and current status of EUV resist development at Intel Corporation. Data is presented utilizing Intel's Micro-Exposure Tool (MET) examining the feasibility of establishing a resist process that simultaneously exhibits <=30nm half-pitch (HP) L/S resolution at <=10mJ/cm2 with <=4nm LWR.

Solar radio proxies for improved satellite orbit prediction

Science.gov (United States)

Yaya, Philippe; Hecker, Louis; Dudok de Wit, Thierry; Fèvre, Clémence Le; Bruinsma, Sean

2017-12-01

Specification and forecasting of solar drivers to thermosphere density models is critical for satellite orbit prediction and debris avoidance. Satellite operators routinely forecast orbits up to 30 days into the future. This requires forecasts of the drivers to these orbit prediction models such as the solar Extreme-UV (EUV) flux and geomagnetic activity. Most density models use the 10.7 cm radio flux (F10.7 index) as a proxy for solar EUV. However, daily measurements at other centimetric wavelengths have also been performed by the Nobeyama Radio Observatory (Japan) since the 1950's, thereby offering prospects for improving orbit modeling. Here we present a pre-operational service at the Collecte Localisation Satellites company that collects these different observations in one single homogeneous dataset and provides a 30 days forecast on a daily basis. Interpolation and preprocessing algorithms were developed to fill in missing data and remove anomalous values. We compared various empirical time series prediction techniques and selected a multi-wavelength non-recursive analogue neural network. The prediction of the 30 cm flux, and to a lesser extent that of the 10.7 cm flux, performs better than NOAA's present prediction of the 10.7 cm flux, especially during periods of high solar activity. In addition, we find that the DTM-2013 density model (Drag Temperature Model) performs better with (past and predicted) values of the 30 cm radio flux than with the 10.7 flux.

Solar radio proxies for improved satellite orbit prediction

Directory of Open Access Journals (Sweden)

Yaya Philippe

2017-01-01

Full Text Available Specification and forecasting of solar drivers to thermosphere density models is critical for satellite orbit prediction and debris avoidance. Satellite operators routinely forecast orbits up to 30 days into the future. This requires forecasts of the drivers to these orbit prediction models such as the solar Extreme-UV (EUV flux and geomagnetic activity. Most density models use the 10.7 cm radio flux (F10.7 index as a proxy for solar EUV. However, daily measurements at other centimetric wavelengths have also been performed by the Nobeyama Radio Observatory (Japan since the 1950's, thereby offering prospects for improving orbit modeling. Here we present a pre-operational service at the Collecte Localisation Satellites company that collects these different observations in one single homogeneous dataset and provides a 30 days forecast on a daily basis. Interpolation and preprocessing algorithms were developed to fill in missing data and remove anomalous values. We compared various empirical time series prediction techniques and selected a multi-wavelength non-recursive analogue neural network. The prediction of the 30 cm flux, and to a lesser extent that of the 10.7 cm flux, performs better than NOAA's present prediction of the 10.7 cm flux, especially during periods of high solar activity. In addition, we find that the DTM-2013 density model (Drag Temperature Model performs better with (past and predicted values of the 30 cm radio flux than with the 10.7 flux.

Design decisions from the history of the EUVE science payload

Science.gov (United States)

Marchant, W.

1993-01-01

Some of the design issues that arose during the development of the EUVE science payload and solutions to the problems involved are examined. In particular, attention is given to the use of parallel and serial busses, the selection of the the ROM approach for software storage and execution, implementation of memory error detection and correction, and the selection of command structures. The early design decisions paid off in the timely delivery of the scientific payload and in the successful completion of the survey phase of the EUVE science mission.

Optimization of the occulter for the Solar Orbiter/METIS coronagraph

Science.gov (United States)

Landini, Federico; Vivès, Sébastien; Romoli, Marco; Guillon, Christophe; Pancrazzi, Maurizio; Escolle, Clement; Focardi, Mauro; Antonucci, Ester; Fineschi, Silvano; Naletto, Giampiero; Nicolini, Gianalfredo; Nicolosi, Piergiorgio; Spadaro, Daniele

2012-09-01

METIS (Multi Element Telescope for Imaging and Spectroscopy investigation), selected to fly aboard the Solar Orbiter ESA/NASA mission, is conceived to perform imaging (in visible, UV and EUV) and spectroscopy (in EUV) of the solar corona, by means of an integrated instrument suite located on a single optical bench and sharing the same aperture on the satellite heat shield. As every coronagraph, METIS is highly demanding in terms of stray light suppression. Coronagraphs history teaches that a particular attention must be dedicated to the occulter optimization. The METIS occulting system is of particular interest due to its innovative concept. In order to meet the strict thermal requirements of Solar Orbiter, METIS optical design has been optimized by moving the entrance pupil at the level of the external occulter on the S/C thermal shield, thus reducing the size of the external aperture. The scheme is based on an inverted external-occulter (IEO). The IEO consists of a circular aperture on the Solar Orbiter thermal shield. A spherical mirror rejects back the disk-light through the IEO. A breadboard of the occulting assembly (BOA) has been manufactured in order to perform stray light tests in front of two solar simulators (in Marseille, France and in Torino, Italy). A first measurement campaign has been carried on at the Laboratoire d'Astrophysique de Marseille. In this paper we describe the BOA design, the laboratory set-up and the preliminary results.

Detection of Quasi-Periodic Pulsations in Solar EUV Time Series

Science.gov (United States)

Dominique, M.; Zhukov, A. N.; Dolla, L.; Inglis, A.; Lapenta, G.

2018-04-01

Quasi-periodic pulsations (QPPs) are intrinsically connected to the mechanism of solar flares. They are regularly observed in the impulsive phase of flares since the 1970s. In the past years, the studies of QPPs regained interest with the advent of a new generation of soft X-ray/extreme ultraviolet radiometers that pave the way for statistical surveys. Since the amplitude of QPPs in these wavelengths is rather small, detecting them implies that the overall trend of the time series needs to be removed before applying any Fourier or wavelet transform. This detrending process is known to produce artificial detection of periods that must then be distinguished from real ones. In this paper, we propose a set of criteria to help identify real periods and discard artifacts. We apply these criteria to data taken by the Extreme Ultraviolet Variability Experiment (EVE)/ESP onboard the Solar Dynamics Observatory (SDO) and the Large Yield Radiometer (LYRA) onboard the PRoject for On-Board Autonomy 2 (PROBA2) to search for QPPs in flares stronger than M5.0 that occurred during Solar Cycle 24.

Solar Flare Physics Enlivened by TRACE and RHESSI Markus J ...

Indian Academy of Sciences (India)

the highest EUV spatial resolution and the Ramaty High Energy Solar Spec- trometric Imager ... Displaced Electron and Ion Acceleration Sources. Key words. ... 2002) and the solid-state detectors of the Soft ... new diagnostic of the flare plasma temperature and iron abundance. 3. .... from the thick-target model (Fig. 3, right ...

EUV multilayer mirrors with enhanced stability

Science.gov (United States)

Benoit, Nicolas; Yulin, Sergiy; Feigl, Torsten; Kaiser, Norbert

2006-08-01

The application of multilayer optics in EUV lithography requires not only the highest possible normal-incidence reflectivity but also a long-term thermal and radiation stability at operating temperatures. This requirement is most important in the case of the collector mirror of the illumination system close to the EUV source where a short-time decrease in reflectivity is most likely. Mo/Si multilayer mirrors, designed for high normal reflectivity at the wavelength of 13.5 nm and deposited by dc magnetron sputtering, were directly exposed to EUV radiation without mitigation system. They presented a loss of reflectivity of more than 18% after only 8 hours of irradiation by a Xe-discharge source. Another problem of Mo/Si multilayers is the instability of reflectivity and peak wavelength under high heat load. It becomes especially critical at temperatures above 200°C, where interdiffusion between the molybdenum and the silicon layers is observed. The development of high-temperature multilayers was focused on two alternative Si-based systems: MoSi II/Si and interface engineered Mo/C/Si/C multilayer mirrors. The multilayer designs as well as the deposition parameters of all systems were optimized in terms of high peak reflectivity (>= 60 %) at a wavelength of 13.5 nm and high thermal stability. Small thermally induced changes of the MoSi II/Si multilayer properties were found but they were independent of the annealing time at all temperatures examined. A wavelength shift of -1.7% and a reflectivity drop of 1.0% have been found after annealing at 500°C for 100 hours. The total degradation of optical properties above 650°C can be explained by a recrystallization process of MoSi II layers.

Nanoparticle Photoresists: Ligand Exchange as a New, Sensitive EUV Patterning Mechanism

KAUST Repository

Kryask, Marie

2013-01-01

Hybrid nanoparticle photoresists and their patterning using DUV, EUV, 193 nm lithography and e-beam lithography has been investigated and reported earlier. The nanoparticles have demonstrated very high EUV sensitivity and significant etch resistance compared to other standard photoresists. The current study aims at investigating and establishing the underlying mechanism for dual tone patterning of these nanoparticle photoresist systems. Infrared spectroscopy and UV absorbance studies supported by mass loss and dissolution studies support the current model. © 2013SPST.

Plasma sources for EUV lithography exposure tools

International Nuclear Information System (INIS)

Banine, Vadim; Moors, Roel

2004-01-01

The source is an integral part of an extreme ultraviolet lithography (EUVL) tool. Such a source, as well as the EUVL tool, has to fulfil extremely high demands both technical and cost oriented. The EUVL tool operates at a wavelength in the range 13-14 nm, which requires a major re-thinking of state-of-the-art lithography systems operating in the DUV range. The light production mechanism changes from conventional lamps and lasers to relatively high temperature emitting plasmas. The light transport, mainly refractive for DUV, should become reflective for EUV. The source specifications are derived from the customer requirements for the complete tool, which are: throughput, cost of ownership (CoO) and imaging quality. The EUVL system is considered as a follow up of the existing DUV based lithography technology and, while improving the feature resolution, it has to maintain high wafer throughput performance, which is driven by the overall CoO picture. This in turn puts quite high requirements on the collectable in-band power produced by an EUV source. Increased, due to improved feature resolution, critical dimension (CD) control requirements, together with reflective optics restrictions, necessitate pulse-to-pulse repeatability, spatial stability control and repetition rates, which are substantially better than those of current optical systems. All together the following aspects of the source specification will be addressed: the operating wavelength, the EUV power, the hot spot size, the collectable angle, the repetition rate, the pulse-to-pulse repeatability and the debris induced lifetime of components

Anti­-parallel Filament Flows and Bright Dots Observed in the EUV with Hi-­C

Science.gov (United States)

Alexander, Caroline E.; Regnier, Stephane; Walsh, Robert; Winebarger, Amy

2013-01-01

Hi-C obtained the highest spatial and temporal resolution observations ever taken in the solar EUV corona. Hi-C reveals dynamics and structure at the limit of its temporal and spatial resolution. Hi-C observed various fine-scale features that SDO/AIA could not pick out. For the first time in the corona, Hi-C revealed magnetic braiding and component reconnection consistent with coronal heating. Hi-C shows evidence of reconnection and heating in several different regions and magnetic configurations with plasma being heated to 0.3 - 8 x 10(exp 6) K temperatures. Surprisingly, many of the first results highlight plasma at temperatures that are not at the peak of the response functions.

IMPLOSION OF CORONAL LOOPS DURING THE IMPULSIVE PHASE OF A SOLAR FLARE

Energy Technology Data Exchange (ETDEWEB)

Simões, P. J. A.; Fletcher, L.; Hudson, H. S.; Russell, A. J. B., E-mail: paulo.simoes@glasgow.ac.uk, E-mail: lyndsay.fletcher@glasgow.ac.uk, E-mail: arussell@maths.dundee.ac.uk, E-mail: hhudson@ssl.berkeley.edu [SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)

2013-11-10

We study the relationship between implosive motions in a solar flare, and the energy redistribution in the form of oscillatory structures and particle acceleration. The flare SOL2012-03-09T03:53 (M6.4) shows clear evidence for an irreversible (stepwise) coronal implosion. Extreme-ultraviolet (EUV) images show at least four groups of coronal loops at different heights overlying the flaring core undergoing fast contraction during the impulsive phase of the flare. These contractions start around a minute after the flare onset, and the rate of contraction is closely associated with the intensity of the hard X-ray and microwave emissions. They also seem to have a close relationship with the dimming associated with the formation of the coronal mass ejection and a global EUV wave. Several studies now have detected contracting motions in the corona during solar flares that can be interpreted as the implosion necessary to release energy. Our results confirm this, and tighten the association with the flare impulsive phase. We add to the phenomenology by noting the presence of oscillatory variations revealed by Geostationary Operational Environmental Satellite soft X-rays (SXR) and spatially integrated EUV emission at 94 and 335 Å. We identify pulsations of ≈60 s in SXR and EUV data, which we interpret as persistent, semi-regular compressions of the flaring core region which modulate the plasma temperature and emission measure. The loop oscillations, observed over a large region, also allow us to provide rough estimates of the energy temporarily stored in the eigenmodes of the active-region structure as it approaches its new equilibrium.

Small Coronal Holes Near Active Regions as Sources of Slow Solar Wind

Energy Technology Data Exchange (ETDEWEB)

Wang, Y.-M., E-mail: yi.wang@nrl.navy.mil [Space Science Division, Naval Research Laboratory, Washington, DC 20375 (United States)

2017-06-01

We discuss the nature of the small areas of rapidly diverging, open magnetic flux that form in the strong unipolar fields at the peripheries of active regions (ARs), according to coronal extrapolations of photospheric field measurements. Because such regions usually have dark counterparts in extreme-ultraviolet (EUV) images, we refer to them as coronal holes, even when they appear as narrow lanes or contain sunspots. Revisiting previously identified “AR sources” of slow solar wind from 1998 and 1999, we find that they are all associated with EUV coronal holes; the absence of well-defined He i 1083.0 nm counterparts to some of these holes is attributed to the large flux of photoionizing radiation from neighboring AR loops. Examining a number of AR-associated EUV holes during the 2014 activity maximum, we confirm that they are characterized by wind speeds of ∼300–450 km s{sup −1}, O{sup 7+}/O{sup 6+} ratios of ∼0.05–0.4, and footpoint field strengths typically of order 30 G. The close spacing between ARs at sunspot maximum limits the widths of unipolar regions and their embedded holes, while the continual emergence of new flux leads to rapid changes in the hole boundaries. Because of the highly nonradial nature of AR fields, the smaller EUV holes are often masked by the overlying canopy of loops, and may be more visible toward one solar limb than at central meridian. As sunspot activity declines, the AR remnants merge to form much larger, weaker, and longer-lived unipolar regions, which harbor the “classical” coronal holes that produce recurrent high-speed streams.

Anomalous Temporal Behaviour of Broadband Ly Alpha Observations During Solar Flares from SDO/EVE

Science.gov (United States)

Milligan, Ryan O.; Chamberlin, Phillip C.

2016-01-01

Although it is the most prominent emission line in the solar spectrum, there has been a notable lack of studies devoted to variations in Lyman-alpha (Ly-alpha) emission during solar flares in recent years. However, the few examples that do exist have shown Ly-alpha emission to be a substantial radiator of the total energy budget of solar flares (of the order of 10 percent). It is also a known driver of fluctuations in the Earth's ionosphere. The EUV (Extreme Ultra-Violet) Variability Experiment (EVE) on board the Solar Dynamics Observatory (SDO) now provides broadband, photometric Ly-alpha data at 10-second cadence with its Multiple EUV Grating Spectrograph-Photometer (MEGS-P) component, and has observed scores of solar flares in the 5 years since it was launched. However, the MEGS-P time profiles appear to display a rise time of tens of minutes around the time of the flare onset. This is in stark contrast to the rapid, impulsive increase observed in other intrinsically chromospheric features (H-alpha, Ly-beta, LyC, C III, etc.). Furthermore, the emission detected by MEGS-P peaks around the time of the peak of thermal soft X-ray emission and not during the impulsive phase when energy deposition in the chromosphere (often assumed to be in the form of non-thermal electrons) is greatest. The time derivative of Ly-alpha lightcurves also appears to resemble that of the time derivative of soft X-rays, reminiscent of the Neupert effect. Given that spectrally-resolved Ly-alpha observations during flares from SORCE / SOLSTICE (Solar Radiation and Climate Experiment / Solar Stellar Irradiance Comparison Experiment) peak during the impulsive phase as expected, this suggests that the atypical behaviour of MEGS-P data is a manifestation of the broadband nature of the observations. This could imply that other lines andor continuum emission that becomes enhanced during flares could be contributing to the passband. Users are hereby urged to exercise caution when interpreting

Signals for invisible matter from solar-terrestrial observations

CERN Multimedia

CERN. Geneva

2016-01-01

We observe a strong correlation between the orbital position of the planets with solar phenomena like flares or the variation of EUV irradiance. Similarly, a correlation is found in the study of the ionization content of the Earth atmosphere. Planetary gravitational lensing of one (or more) streams of slow moving invisible matter is proposed as an explanation of such a behaviour.

Overcoming etch challenges related to EUV based patterning (Conference Presentation)

Science.gov (United States)

Metz, Andrew W.; Cottle, Hongyun; Honda, Masanobu; Morikita, Shinya; Kumar, Kaushik A.; Biolsi, Peter

2017-04-01

Research and development activities related to Extreme Ultra Violet [EUV] defined patterning continue to grow for cost and extreme process control challenges of Self-Aligned Quad Patterning [SAQP] with continued momentum for EUV ecosystem readiness could provide cost advantages in addition to improved intra-level overlay performance relative to multiple patterning approaches. However, Line Edge Roughness [LER] and Line Width Roughness [LWR] performance of EUV defined resist images are still far from meeting technology needs or ITRS spec performance. Furthermore, extreme resist height scaling to mitigate flop over exacerbates the plasma etch trade-offs related to traditional approaches of PR smoothing, descum implementation and maintaining 2D aspect ratios of short lines or elliptical contacts concurrent with ultra-high photo resist [PR] selectivity. In this paper we will discuss sources of LER/LWR, impact of material choice, integration, and innovative plasma process techniques and describe how TELTM VigusTM CCP Etchers can enhance PR selectivity, reduce LER/LWR, and maintain 2D aspect ratio of incoming patterns. Beyond traditional process approaches this paper will show the utility of: [1] DC Superposition in enhancing EUV resist hardening and selectivity, increasing resistance to stress induced PR line wiggle caused by CFx passivation, and mitigating organic planarizer wiggle; [2] Quasi Atomic Layer Etch [Q-ALE] for ARC open eliminating the tradeoffs between selectivity, CD, and shrink ratio control; and [3] ALD+Etch FUSION technology for feature independent CD shrink and LER reduction. Applicability of these concepts back transferred to 193i based lithography is also confirmed.

EUV source development for high-volume chip manufacturing tools

Science.gov (United States)

Stamm, Uwe; Yoshioka, Masaki; Kleinschmidt, Jürgen; Ziener, Christian; Schriever, Guido; Schürmann, Max C.; Hergenhan, Guido; Borisov, Vladimir M.

2007-03-01

Xenon-fueled gas discharge produced plasma (DPP) sources were integrated into Micro Exposure Tools already in 2004. Operation of these tools in a research environment gave early learning for the development of EUV sources for Alpha and Beta-Tools. Further experiments with these sources were performed for basic understanding on EUV source technology and limits, especially the achievable power and reliability. The intermediate focus power of Alpha-Tool sources under development is measured to values above 10 W. Debris mitigation schemes were successfully integrated into the sources leading to reasonable collector mirror lifetimes with target of 10 billion pulses due to the effective debris flux reduction. Source collector mirrors, which withstand the radiation and temperature load of Xenon-fueled sources, have been developed in cooperation with MediaLario Technologies to support intermediate focus power well above 10 W. To fulfill the requirements for High Volume chip Manufacturing (HVM) applications, a new concept for HVM EUV sources with higher efficiency has been developed at XTREME technologies. The discharge produced plasma (DPP) source concept combines the use of rotating disk electrodes (RDE) with laser exited droplet targets. The source concept is called laser assisted droplet RDE source. The fuel of these sources has been selected to be Tin. The conversion efficiency achieved with the laser assisted droplet RDE source is 2-3x higher compared to Xenon. Very high pulse energies well above 200 mJ / 2π sr have been measured with first prototypes of the laser assisted droplet RDE source. If it is possible to maintain these high pulse energies at higher repetition rates a 10 kHz EUV source could deliver 2000 W / 2π sr. According to the first experimental data the new concept is expected to be scalable to an intermediate focus power on the 300 W level.

Oxidation and metal contamination of EUV optics

NARCIS (Netherlands)

Sturm, Jacobus Marinus; Liu, Feng; Pachecka, Malgorzata; Lee, Christopher James; Bijkerk, Frederik

2013-01-01

The next generation photolithography will use 13.5 nm Extreme Ultraviolet (EUV) for printing smaller features on chips. One of the hallenges is to optimally control the contamination of the multilayer mirrors used in the imaging system. The aim of this project is generating fundamental understanding

The SOLAR-C Mission: Science Objectives and Current Status

Science.gov (United States)

Suematsu, Y.; Solar-C Working Group

2016-04-01

The SOLAR-C is a Japan-led international solar mission for mid-2020s designed to investigate the magnetic activities of the Sun, focusing on the study in heating and dynamical phenomena of the chromosphere and corona, and to advance algorithms for predicting short and long term solar magnetic activities. For these purposes, SOLAR-C will carry three dedicated instruments; the Solar UV-Vis-IR Telescope (SUVIT), the EUV Spectroscopic Telescope (EUVST) and the High Resolution Coronal Imager (HCI), to jointly observe the entire visible solar atmosphere with essentially the same high spatial resolution (0.1"-0.3"), performing high resolution spectroscopic measurements over all atmospheric regions and spectro-polarimetric measurements from the photosphere through the upper chromosphere. SOLAR-C will also contribute to understand the solar influence on the Sun-Earth environments with synergetic wide-field observations from ground-based and other space missions.

The UV-A and visible solar irradiance spectrum: inter-comparison of absolutely calibrated, spectrally medium resolution solar irradiance spectra from balloon- and satellite-borne measurements

Directory of Open Access Journals (Sweden)

W. Gurlit

2005-01-01

Full Text Available Within the framework of the ENVISAT/-SCIAMACHY satellite validation, solar irradiance spectra are absolutely measured at moderate resolution in the UV/visible spectral range (in the UV from 316.7-418 nm and the visible from 400-652 nm at a full width half maximum resolution of 0.55 nm and 1.48 nm, respectively from aboard the azimuth-controlled LPMA/DOAS balloon gondola at around 32 km balloon float altitude. After accounting for the atmospheric extinction due to Rayleigh scattering and gaseous absorption (O3 and NO2, the measured solar spectra are compared with previous observations. Our solar irradiance spectrum perfectly agrees within +0.03% with the re-calibrated Kurucz et al. (1984 solar spectrum (Fontenla et al., 1999, called MODTRAN 3.7 in the visible spectral range (415-650 nm, but it is +2.1% larger in the (370-415 nm wavelength interval, and -4% smaller in the UV-A spectral range (316.7-370 nm, when the Kurucz spectrum is convolved to the spectral resolution of our instrument. Similar comparisons of the SOLSPEC (Thuillier et al., 1997, 1998a, b and SORCE/SIM (Harder et al., 2000 solar spectra with MODTRAN 3.7 confirms our findings with the values being -0.5%, +2%, and -1.4% for SOLSPEC -0.33%, -0.47%, and -6.2% for SORCE/SIM, respectively. Comparison of the SCIAMACHY solar spectrum from channels 1 to 4 (- re-calibrated by the University of Bremen - with MODTRAN 3.7 indicates an agreement within -0.4% in the visible spectral range (415-585 nm, -1.6% within the 370-415 nm, and -5.7% within 325-370 nm wavelength interval, in agreement with the results of the other sensors. In agreement with findings of Skupin et al. (2002 our study emphasizes that the present ESA SCIAMACHY level 1 calibration is systematically +15% larger in the considered wavelength intervals when compared to all available other solar irradiance measurements.

Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments

NARCIS (Netherlands)

Wetering, van de F.M.J.H.; Nijdam, S.; Kroesen, G.M.W.

2012-01-01

In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source plays an important role. We started up a project looking at the principles of particle formation in plasmas and the interaction with EUV radiation. To this end, we study a low-pressure (10 Pa)

EUV imager and spectrometer for LYOT and solar orbiter space missions

Science.gov (United States)

Millard, Anne; Lemaire, Philippe; Vial, Jean-Claude

2017-11-01

In the 2010 horizon, solar space missions such as LYOT and Solar Orbiter will allow high cadence UV observations of the Sun at spatial and spectral resolution never obtained before. To reach these goals, the two missions could take advantage of spectro-imagers. A reflective only optical solution for such an instrument is described in this paper and the first results of the mock-up being built at IAS are shown.

GLOBAL ENERGETICS OF SOLAR FLARES. IV. CORONAL MASS EJECTION ENERGETICS

International Nuclear Information System (INIS)

Aschwanden, Markus J.

2016-01-01

This study entails the fourth part of a global flare energetics project, in which the mass m cme , kinetic energy E kin , and the gravitational potential energy E grav of coronal mass ejections (CMEs) is measured in 399 M and X-class flare events observed during the first 3.5 years of the Solar Dynamics Observatory (SDO) mission, using a new method based on the EUV dimming effect. EUV dimming is modeled in terms of a radial adiabatic expansion process, which is fitted to the observed evolution of the total emission measure of the CME source region. The model derives the evolution of the mean electron density, the emission measure, the bulk plasma expansion velocity, the mass, and the energy in the CME source region. The EUV dimming method is truly complementary to the Thomson scattering method in white light, which probes the CME evolution in the heliosphere at r ≳ 2 R ⊙ , while the EUV dimming method tracks the CME launch in the corona. We compare the CME parameters obtained in white light with the LASCO/C2 coronagraph with those obtained from EUV dimming with the Atmospheric Imaging Assembly onboard the SDO for all identical events in both data sets. We investigate correlations between CME parameters, the relative timing with flare parameters, frequency occurrence distributions, and the energy partition between magnetic, thermal, nonthermal, and CME energies. CME energies are found to be systematically lower than the dissipated magnetic energies, which is consistent with a magnetic origin of CMEs.

The First ALMA Observation of a Solar Plasmoid Ejection from an X-Ray Bright Point

Energy Technology Data Exchange (ETDEWEB)

Shimojo, Masumi [National Astronomical Observatory of Japan, Tokyo, 181-8588 (Japan); Hudson, Hugh S. [School of Physics and Astronomy, University of Glasgow, Glasgow, G12 8QQ (United Kingdom); White, Stephen M. [Space Vehicles Directorate, Air Force Research Laboratory, Kirtland AFB, NM 87117-5776 (United States); Bastian, Timothy S. [National Radio Astronomy Observatory, Charlottesville, VA 22903 (United States); Iwai, Kazumasa, E-mail: masumi.shimojo@nao.ac.jp [Institute for Space-Earth Environmental Research, Nagoya University, Nagoya, 464-8601 (Japan)

2017-05-20

Eruptive phenomena such as plasmoid ejections or jets are important features of solar activity and have the potential to improve our understanding of the dynamics of the solar atmosphere. Such ejections are often thought to be signatures of the outflows expected in regions of fast magnetic reconnection. The 304 Å EUV line of helium, formed at around 10{sup 5} K, is found to be a reliable tracer of such phenomena, but the determination of physical parameters from such observations is not straightforward. We have observed a plasmoid ejection from an X-ray bright point simultaneously at millimeter wavelengths with ALMA, at EUV wavelengths with SDO /AIA, and in soft X-rays with Hinode /XRT. This paper reports the physical parameters of the plasmoid obtained by combining the radio, EUV, and X-ray data. As a result, we conclude that the plasmoid can consist either of (approximately) isothermal ∼10{sup 5} K plasma that is optically thin at 100 GHz, or a ∼10{sup 4} K core with a hot envelope. The analysis demonstrates the value of the additional temperature and density constraints that ALMA provides, and future science observations with ALMA will be able to match the spatial resolution of space-borne and other high-resolution telescopes.

Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors

International Nuclear Information System (INIS)

Hill, S B; Ermanoski, I; Tarrio, C; Lucatorto, T B; Madey, T E; Bajt, S; Fang, M; Chandhok, M

2007-01-01

Ongoing endurance testing of Ru-capped multilayer mirrors (MLMs) at the NIST synchrotron facility has revealed that the damage resulting from EUV irradiation does not always depend on the exposure conditions in an intuitive way. Previous exposures of Ru-capped MLMs to EUV radiation in the presence of water vapor demonstrated that the mirror damage rate actually decreases with increasing water pressure. We will present results of recent exposures showing that the reduction in damage for partial pressures of water up to 5 x 10 -6 Torr is not the result of a spatially uniform decrease in damage across the Gaussian intensity distribution of the incident EUV beam. Instead we observe a drop in the damage rate in the center of the exposure spot where the intensity is greatest, while the reflectivity loss in the wings of the intensity distribution appears to be independent of water partial pressure. (See Fig. 1.) We will discuss how the overall damage rate and spatial profile can be influenced by admixtures of carbon-containing species (e.g., CO, CO 2 , C 6 H 6 ) at partial pressures one-to-two orders of magnitude lower than the water vapor partial pressure. An investigation is underway to find the cause of the non-Gaussian damage profile. Preliminary results and hypotheses will be discussed. In addition to high-resolution reflectometry of the EUV-exposure sites, the results of surface analysis such as XPS will be presented. We will also discuss how the bandwidth and time structure of incident EUV radiation may affect the rate of reflectivity degradation. Although the observations presented here are based on exposures of Ru-capped MLMs, unless novel capping layers are similarly characterized, direct application of accelerated testing results could significantly overestimate mirror lifetime in the production environment

Sensitivity enhancement of chemically amplified resists and performance study using EUV interference lithography

Science.gov (United States)

Buitrago, Elizabeth; Nagahara, Seiji; Yildirim, Oktay; Nakagawa, Hisashi; Tagawa, Seiichi; Meeuwissen, Marieke; Nagai, Tomoki; Naruoka, Takehiko; Verspaget, Coen; Hoefnagels, Rik; Rispens, Gijsbert; Shiraishi, Gosuke; Terashita, Yuichi; Minekawa, Yukie; Yoshihara, Kosuke; Oshima, Akihiro; Vockenhuber, Michaela; Ekinci, Yasin

2016-03-01

Extreme ultraviolet lithography (EUVL, λ = 13.5 nm) is the most promising candidate to manufacture electronic devices for future technology nodes in the semiconductor industry. Nonetheless, EUVL still faces many technological challenges as it moves toward high-volume manufacturing (HVM). A key bottleneck from the tool design and performance point of view has been the development of an efficient, high power EUV light source for high throughput production. Consequently, there has been extensive research on different methodologies to enhance EUV resist sensitivity. Resist performance is measured in terms of its ultimate printing resolution, line width roughness (LWR), sensitivity (S or best energy BE) and exposure latitude (EL). However, there are well-known fundamental trade-off relationships (LRS trade-off) among these parameters for chemically amplified resists (CARs). Here we present early proof-of-principle results for a multi-exposure lithography process that has the potential for high sensitivity enhancement without compromising other important performance characteristics by the use of a Photosensitized Chemically Amplified Resist (PSCAR). With this method, we seek to increase the sensitivity by combining a first EUV pattern exposure with a second UV flood exposure (λ = 365 nm) and the use of a PSCAR. In addition, we have evaluated over 50 different state-of-the-art EUV CARs. Among these, we have identified several promising candidates that simultaneously meet sensitivity, LWR and EL high performance requirements with the aim of resolving line space (L/S) features for the 7 and 5 nm logic node (16 nm and 13 nm half-pitch HP, respectively) for HVM. Several CARs were additionally found to be well resolved down to 12 nm and 11 nm HP with minimal pattern collapse and bridging, a remarkable feat for CARs. Finally, the performance of two negative tone state-of-the-art alternative resist platforms previously investigated was compared to the CAR performance at and

Breakout Reconnection Observed by the TESIS EUV Telescope

Science.gov (United States)

Reva, A. A.; Ulyanov, A. S.; Shestov, S. V.; Kuzin, S. V.

2016-01-01

We present experimental evidence of the coronal mass ejection (CME) breakout reconnection, observed by the TESIS EUV telescope. The telescope could observe solar corona up to 2 R⊙ from the Sun center in the Fe 171 Å line. Starting from 2009 April 8, TESIS observed an active region (AR) that had a quadrupolar structure with an X-point 0.5 R⊙ above photosphere. A magnetic field reconstructed from the Michelson Doppler Imager data also has a multipolar structure with an X-point above the AR. At 21:45 UT on April 9, the loops near the X-point started to move away from each other with a velocity of ≈7 km s-1. At 01:15 UT on April 10, a bright stripe appeared between the loops, and the flux in the GOES 0.5-4 Å channel increased. We interpret the loops’ sideways motion and the bright stripe as evidence of the breakout reconnection. At 01:45 UT, the loops below the X-point started to slowly move up. At 15:10 UT, the CME started to accelerate impulsively, while at the same time a flare arcade formed below the CME. After 15:50 UT, the CME moved with constant velocity. The CME evolution precisely followed the breakout model scenario.

A Restrospective and Prospective Examination of NOAA Solar Imaging

Science.gov (United States)

Hill, S. M.

2015-12-01

NOAA has provided soft X-ray imaging of the lower corona since the early 2000's. It is currently building the spacecraft and instrumentation to observe the sun in the extreme ultraviolet (EUV) through 2036. After more than 6 million calibrated images, it is appropriate to examine NOAA data as providing retrospective context for scientific missions. In particular, this presentation examines the record of GOES Solar X-ray Imager (SXI) observations, including continuity, photometric stability and comparison to other contemporary x-ray imagers. The first GOES Solar X-ray Imager was launched in 2001 and entered operations in 2003. The current SXIs will remain in operations until approximately 2020, when a new series of Solar (extreme-)Ultraviolet Imagers (SUVIs) will replace them as the current satellites reach their end of life. In the sense that the SXIs are similar to Yokoh's SXT and Hinode's XRT, the SUVI instruments will be similar to SOHO's EIT and SDO's AIA. The move to narrowband EUV imagers will better support eventual operational estimation of plasma conditions. In particular, plans are to leverage advances in automated image processing and segmentation to assist forecasters. While NOAA's principal use of these observations is real-time space weather forecasting, they will continue to provide a consistent context measurement for researchers for decades to come.

Use of molecular oxygen to reduce EUV-induced carbon contamination of optics

Science.gov (United States)

Malinowski, Michael E.; Grunow, Philip A.; Steinhaus, Chip; Clift, W. Miles; Klebanoff, Leonard E.

2001-08-01

Carbon deposition and removal experiments on Mo/Si multilayer mirror (MLM) samples were performed using extreme ultraviolet (EUV) light on Beamline 12.0.1.2 of the Advanced Light Source, Lawrence Berkeley National Laboratory (LBNL). Carbon (C) was deposited onto Mo/Si multilayer mirror (MLM) samples when hydrocarbon vapors where intentionally introduced into the MLM test chamber in the presence of EUV at 13.44 nm (92.3eV). The carbon deposits so formed were removed by molecular oxygen + EUV. The MLM reflectivities and photoemission were measured in-situ during these carbon deposition and cleaning procedures. Auger Electron Spectroscopy (AES) sputter-through profiling of the samples was performed after experimental runs to help determine C layer thickness and the near-surface compositional-depth profiles of all samples studied. EUV powers were varied from ~0.2mW/mm2 to 3mW/mm2(at 13.44 nm) during both deposition and cleaning experiments and the oxygen pressure ranged from ~5x10-5 to 5x10-4 Torr during the cleaning experiments. C deposition rates as high as ~8nm/hr were observed, while cleaning rates as high as ~5nm/hr could be achieved when the highest oxygen pressure were used. A limited set of experiments involving intentional oxygen-only exposure of the MLM samples showed that slow oxidation of the MLM surface could occur.

High-NA EUV lithography enabling Moore's law in the next decade

Science.gov (United States)

van Schoot, Jan; Troost, Kars; Bornebroek, Frank; van Ballegoij, Rob; Lok, Sjoerd; Krabbendam, Peter; Stoeldraijer, Judon; Loopstra, Erik; Benschop, Jos P.; Finders, Jo; Meiling, Hans; van Setten, Eelco; Kneer, Bernhard; Kuerz, Peter; Kaiser, Winfried; Heil, Tilmann; Migura, Sascha; Neumann, Jens Timo

2017-10-01

While EUV systems equipped with a 0.33 Numerical Aperture lenses are readying to start volume manufacturing, ASML and Zeiss are ramping up their activities on a EUV exposure tool with Numerical Aperture of 0.55. The purpose of this scanner, targeting an ultimate resolution of 8nm, is to extend Moore's law throughout the next decade. A novel, anamorphic lens design, capable of providing the required Numerical Aperture has been investigated; This lens will be paired with new, faster stages and more accurate sensors enabling Moore's law economical requirements, as well as the tight focus and overlay control needed for future process nodes. The tighter focus and overlay control budgets, as well as the anamorphic optics, will drive innovations in the imaging and OPC modelling. Furthermore, advances in resist and mask technology will be required to image lithography features with less than 10nm resolution. This paper presents an overview of the target specifications, key technology innovations and imaging simulations demonstrating the advantages as compared to 0.33NA and showing the capabilities of the next generation EUV systems.

THERMODYNAMIC SPECTRUM OF SOLAR FLARES BASED ON SDO/EVE OBSERVATIONS: TECHNIQUES AND FIRST RESULTS

Energy Technology Data Exchange (ETDEWEB)

Wang, Yuming; Zhou, Zhenjun; Liu, Kai; Liu, Rui; Shen, Chenglong [CAS Key Laboratory of Geospace Environment, Department of Geophysics and Planetary Sciences, University of Science and Technology of China, Hefei, Anhui 230026 (China); Zhang, Jie [School of Physics, Astronomy and Computational Sciences, George Mason University, 4400 University Drive, MSN 6A2, Fairfax, VA 22030 (United States); Chamberlin, Phillip C., E-mail: ymwang@ustc.edu.cn [Solar Physics Laboratory, Heliophysics Division, NASA Goddard Space Flight Center, Greenbelt, MD 20771 (United States)

2016-03-15

The Solar Dynamics Observatory (SDO)/EUV Variability Experiment (EVE) provides rich information on the thermodynamic processes of solar activities, particularly on solar flares. Here, we develop a method to construct thermodynamic spectrum (TDS) charts based on the EVE spectral lines. This tool could potentially be useful for extreme ultraviolet (EUV) astronomy to learn about the eruptive activities on distant astronomical objects. Through several cases, we illustrate what we can learn from the TDS charts. Furthermore, we apply the TDS method to 74 flares equal to or greater than the M5.0 class, and reach the following statistical results. First, EUV peaks are always behind the soft X-ray (SXR) peaks and stronger flares tend to have faster cooling rates. There is a power-law correlation between the peak delay times and the cooling rates, suggesting a coherent cooling process of flares from SXR to EUV emissions. Second, there are two distinct temperature drift patterns, called Type I and Type II. For Type I flares, the enhanced emission drifts from high to low temperature like a quadrilateral, whereas for Type II flares the drift pattern looks like a triangle. Statistical analysis suggests that Type II flares are more impulsive than Type I flares. Third, for late-phase flares, the peak intensity ratio of the late phase to the main phase is roughly correlated with the flare class, and the flares with a strong late phase are all confined. We believe that the re-deposition of the energy carried by a flux rope, which unsuccessfully erupts out, into thermal emissions is responsible for the strong late phase found in a confined flare. Furthermore, we show the signatures of the flare thermodynamic process in the chromosphere and transition region in the TDS charts. These results provide new clues to advance our understanding of the thermodynamic processes of solar flares and associated solar eruptions, e.g., coronal mass ejections.

Estimation and control of large-scale systems with an application to adaptive optics for EUV lithography

NARCIS (Netherlands)

Haber, A.

2014-01-01

Extreme UltraViolet (EUV) lithography is a new technology for production of integrated circuits. In EUV lithographic machines, optical elements are heated by absorption of exposure energy. Heating induces thermoelastic deformations of optical elements and consequently, it creates wavefront

Performance of one hundred watt HVM LPP-EUV source

Science.gov (United States)

Mizoguchi, Hakaru; Nakarai, Hiroaki; Abe, Tamotsu; Nowak, Krzysztof M.; Kawasuji, Yasufumi; Tanaka, Hiroshi; Watanabe, Yukio; Hori, Tsukasa; Kodama, Takeshi; Shiraishi, Yutaka; Yanagida, Tatsuya; Soumagne, Georg; Yamada, Tsuyoshi; Yamazaki, Taku; Okazaki, Shinji; Saitou, Takashi

2015-03-01

We have been developing CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies such as: combination of pulsed CO2 laser and Sn droplets, dual wavelength laser pulses shooting, and mitigation with magnetic field, have been developed in Gigaphoton Inc. The theoretical and experimental data have clearly showed the advantage of our proposed strategy. Based on these data we are developing first practical source for HVM - "GL200E". This data means 250W EUV power will be able to realize around 20kW level pulsed CO2 laser. We have reported engineering data from our recent test such around 43W average clean power, CE=2.0%, with 100kHz operation and other data 19). We have already finished preparation of higher average power CO2 laser more than 20kW at output power cooperate with Mitsubishi Electric Corporation 14). Recently we achieved 92W with 50kHz, 50% duty cycle operation 20). We have reported component technology progress of EUV light source system. We report promising experimental data and result of simulation of magnetic mitigation system in Proto #1 system. We demonstrated several data with Proto #2 system: (1) emission data of 140W in burst under 70kHz 50% duty cycle during 10 minutes. (2) emission data of 118W in burst under 60kHz 70% duty cycle during 10 minutes. (3) emission data of 42W in burst under 20kHz 50% duty cycle (10000pls/0.5ms OFF) during 3 hours (110Mpls). Also we report construction of Pilot #1 system. Final target is week level operation with 250W EUV power with CE=4%, more than 27kW CO2 laser power by the end of Q2 of 2015.

EUV lithographic radiation grafting of thermo-responsive hydrogel nanostructures

International Nuclear Information System (INIS)

Farquet, Patrick; Padeste, Celestino; Solak, Harun H.; Guersel, Selmiye Alkan; Scherer, Guenther G.; Wokaun, Alexander

2007-01-01

Nanostructures of the thermoresponsive poly(N-isopropyl acrylamide) (PNIPAAm) and of PNIPAAm-block-poly(acrylic acid) copolymers were produced on poly(tetrafluoroethylene-co-ethyelene) (ETFE) films using extreme ultraviolet (EUV) lithographic exposure with subsequent graft-polymerization. The phase transition of PNIPAAm nanostructures at the low critical solution temperature (LCST) at 32 deg. C was imaged by atomic force microscopy (AFM) phase contrast measurements in pure water. Results show a higher phase contrast for samples measured below the LCST temperature than for samples above the LCST, proving that the soft PNIPAAm hydrogel transforms into a much more compact conformation above the LCST. EUV lithographic exposures were combined with the reversible addition-fragment chain transfer (RAFT)-mediated polymerization using cyanoisopropyl dithiobenzoate (CPDB) as chain transfer agent to synthesize PNIPAAm block-copolymer nanostructures

The SOLAR-C Mission

Science.gov (United States)

Suematsu, Y.

2015-12-01

The Solar-C is a Japan-led international solar mission planned to be launched in mid2020. It is designed to investigate the magnetic activities of the Sun, focusing on the study in heating and dynamical phenomena of the chromosphere and corona, and also to develop an algorithm for predicting short and long term solar evolution. Since it has been revealed that the different parts of the magnetized solar atmosphere are essentially coupled, the SOLAR-C should tackle the spatial scales and temperature regimes that need to be observed in order to achieve a comprehensive physical understanding of this coupling. The science of Solar-C will greatly advance our understanding of the Sun, of basic physical processes operating throughout the universe. To dramatically improve the situation, SOLAR-C will carry three dedicated instruments; the Solar UV-Vis-IR Telescope (SUVIT), the EUV Spectroscopic Telescope (EUVST) and the High Resolution Coronal Imager (HCI), to jointly observe the entire visible solar atmosphere with essentially the same high spatial resolution (0.1-0.3 arcsec), performing high resolution spectroscopic measurements over all atmospheric regions and spectro-polarimetric measurements from the photosphere through the upper chromosphere. In addition, Solar-C will contribute to our understanding on the influence of the Sun-Earth environments with synergetic wide-field observations from ground-based and other space missions. Some leading science objectives and the mission concept, including designs of the three instruments aboard SOLAR-C will be presented.

Solar Coronal Structure Study

Science.gov (United States)

Nitta, Nariaki; Bruner, Marilyn E.; Saba, Julia; Strong, Keith; Harvey, Karen

2000-01-01

The subject of this investigation is to study the physics of the solar corona through the analysis of the EUV and UV data produced by two flights (12 May 1992 and 25 April 1994) of the Lockheed Solar Plasma Diagnostics Experiment (SPDE) sounding rocket payload, in combination with Yohkoh and ground-based data. Each rocket flight produced both spectral and imaging data. These joint datasets are useful for understanding the physical state of various features in the solar atmosphere at different heights ranging from the photosphere to the corona at the time of the, rocket flights, which took place during the declining phase of a solar cycle, 2-4 years before the minimum. The investigation is narrowly focused on comparing the physics of small- and medium-scale strong-field structures with that of large-scale, weak fields. As we close th is investigation, we have to recall that our present position in the understanding of basic solar physics problems (such as coronal heating) is much different from that in 1995 (when we proposed this investigation), due largely to the great success of SOHO and TRACE. In other words, several topics and techniques we proposed can now be better realized with data from these missions. For this reason, at some point of our work, we started concentrating on the 1992 data, which are more unique and have more supporting data. As a result, we discontinued the investigation on small-scale structures, i.e., bright points, since high-resolution TRACE images have addressed more important physics than SPDE EUV images could do. In the final year, we still spent long time calibrating the 1992 data. The work was complicated because of the old-fashioned film, which had problems not encountered with more modern CCD detectors. After our considerable effort on calibration, we were able to focus on several scientific topics, relying heavily on the SPDE UV images. They include the relation between filaments and filament channels, the identification of hot

EUV lithography

CERN Document Server

Bakshi, Vivek

2018-01-01

Extreme ultraviolet lithography (EUVL) is the principal lithography technology-beyond the current 193-nm-based optical lithography-aiming to manufacture computer chips, and recent progress has been made on several fronts: EUV light sources, scanners, optics, contamination control, masks and mask handling, and resists. This book covers the fundamental and latest status of all aspects of EUVL used in the field. Since 2008, when SPIE Press published the first edition of EUVL Lithography, much progress has taken place in the development of EUVL as the choice technology for next-generation lithography. In 2008, EUVL was a prime contender to replace 193-nm-based optical lithography in leading-edge computer chip making, but not everyone was convinced at that point. Switching from 193-nm to 13.5-nm wavelengths was a much bigger jump than the industry had attempted before. It brought several difficult challenges in all areas of lithography-light source, scanner, mask, mask handling, optics, optics metrology, resist, c...

The solar wind and the earth

International Nuclear Information System (INIS)

Akasofu, I.; Kamide, Y.

1987-01-01

The sun constantly emits an enormous amount of radiation into space. This energy emission consists of three modes. Almost all the energy is emitted in the form of familiar sunlight but sun also emits X-rays, extreme ultraviolet (EUV), and UV radiation, which is absorbed above the earth's stratosphere, as a second mode of solar energy. The sun has made another important mode of energy emission in which the energy is carried out by charged particles. These particles have a bery wide range of energies, from less than 1 keV to more than 1 GeV. Because of this wide range, it is convenient to group them into two components: particles, with energies greater than 10 keV and the lower-energy particles. The former are generally referred to as solar portions or solar cosmic rays; their emission is associated with active features on the sun. Low-energy particles constitute plasma which is called the solar wind

INTERACTION OF LASER RADIATION WITH MATTER. LASER PLASMA High-power EUV (13.5 nm) light source

Science.gov (United States)

Borisov, Vladimir M.; Borisova, Galina N.; Vinokhodov, Aleksandr Yu; Zakharov, S. V.; Ivanov, Aleksandr S.; Kiryukhin, Yurii B.; Mishchenko, Valentin A.; Prokof'ev, Aleksandr V.; Khristoforov, Oleg B.

2010-10-01

Characteristics of a discharge-produced plasma (DPP) light source in the spectral band 13.5±0.135 nm, developed for Extreme Ultra Violet (EUV) lithography, are presented. EUV light is generated by DPP in tin vapour formed between rotating disk electrodes. The discharge is ignited by a focused laser beam. The EUV power 1000 W/(2π sr) in the spectral band 13.5±0.135 nm was achieved with input power about of ~63 kW to the plasma at a pulse repetition rate ~7 kHz . The results of numerical simulation are compared with the experimental data.

Absolute magnitudes by statistical parallaxes

International Nuclear Information System (INIS)

Heck, A.

1978-01-01

The author describes an algorithm for stellar luminosity calibrations (based on the principle of maximum likelihood) which allows the calibration of relations of the type: Msub(i)=sup(N)sub(j=1)Σqsub(j)Csub(ij), i=1,...,n, where n is the size of the sample at hand, Msub(i) are the individual absolute magnitudes, Csub(ij) are observational quantities (j=1,...,N), and qsub(j) are the coefficients to be determined. If one puts N=1 and Csub(iN)=1, one has q 1 =M(mean), the mean absolute magnitude of the sample. As additional output, the algorithm provides one also with the dispersion in magnitude of the sample sigmasub(M), the mean solar motion (U,V,W) and the corresponding velocity ellipsoid (sigmasub(u), sigmasub(v), sigmasub(w). The use of this algorithm is illustrated. (Auth.)

Lyman alpha SMM/UVSP absolute calibration and geocoronal correction

Science.gov (United States)

Fontenla, Juan M.; Reichmann, Edwin J.

1987-01-01

Lyman alpha observations from the Ultraviolet Spectrometer Polarimeter (UVSP) instrument of the Solar Maximum Mission (SMM) spacecraft were analyzed and provide instrumental calibration details. Specific values of the instrument quantum efficiency, Lyman alpha absolute intensity, and correction for geocoronal absorption are presented.

Novel EUV resist materials design for 14nm half pitch and below

Science.gov (United States)

Tsubaki, Hideaki; Tarutani, Shinji; Fujimori, Toru; Takizawa, Hiroo; Goto, Takahiro

2014-04-01

Polymers with a different Tg and activation energy were prepared to clarify influences of acid diffusion on resolution at 15 nm half-pitch (hp) and 14 nm hp using a EUV micro-field exposure tool (MET) at LBNL. Resolution on such a narrow pattern was limited by collapse and pinching. Clear relationship between pinching numbers and polymer Tg indicates that acid diffusion is one of major contributors on the pinching. In addition, polymers with a low thermal activation energy (Ea) on deprotection were effective for reducing pinching. This is probably originated from its high chemically amplification character even in low post-exposure bake (PEB) temperature to obtain both large chemical contrast and short acid diffusion. On the other hand, a good correlation between a cleanable outgassing amount and Ea indicates trade-off relationship between outgassing and resolution. Advantages of n-butyl acetate (nBA) developer have been investigated in viewpoint of dissolution uniformity. Surface roughness of a non-patterned resist film at half-exposed area, which was well correlated with LWR, was measured by AFM as indicator of uniformity in development process. To avoid any differences in resist chemistry other than development process, cross linking negative tone resist was applied for this study. The surface roughness obtained by nBA, which is conventional negative-tone imaging (NTI) developer, was 32 % lower than that obtained by 2.38 % TMAH solution. NTI resist system with a nBA developer and optimized resist reduced LWR from 4.8 nm to 3.0 nm in comparison with conventional positive tone resist with a 2.38 % TMAH developer. In addition, advantage on semi-dense trench patterning was well defined. New EUV sensitizer with 1.15 times higher EUV absorption resulted in 1.15 times higher acid yield by EUV exposure. Lithography performance of the new EUV sensitizer has been investigated by MET at SEMATECH Albany. Sensitivity was indeed improved from 20 mJ/cm2 to 17 mJ/cm2 according

Latest developments on EUV reticle and pellicle research and technology at TNO

Science.gov (United States)

Verberk, Rogier; Koster, Norbert; te Sligte, Edwin; Staring, Wilbert

2017-06-01

At TNO an extensive EUV optics life time program has been running for over 15 years together with our partners ASML and Carl Zeiss. This has contributed to the upcoming introduction of EUV High Volume Manufacturing (HVM). To further help the industry with the introduction of EUV, TNO has worked on extending their facilities with a number of reticle and pellicle research infrastructure facilities. In this paper we will show some of the facilities that are available at TNO and shortly introduce their capabilities. Recently we have opened our EBL2 facility, which is an EUV Beam Line (EBL2) meant for studying the effects of high power EUV illumination on optics, reticles and pellicles up to the power roadmap of 500 W at intermediate Focus (IF). This facility is open to users from all over the world and is beneficial for the industry in helping developing alternative capping layers and contamination control strategies for optics lifetime, new absorber materials, pellicles and resists. The EBL2 system has seen first light in December 2016 and is now in the final stage of acceptance testing and qualification. It is expected that the system will be fully operational in the third quarter of 2017, and available for users. It is possible to transfer reticles to and from the EBL2 by means of the reticle handler using the dual pod interface. This secures backside cleanliness to NXE standards and thus enables wafer printing on a NXE tool in a later stage after the exposures and inspection at EBL2. Besides EBL2, a high performance and ultra-clean reticle handler is available at TNO. This handler incorporates our particle scanner Rapid Nano 4 for front side inspection of reticle blanks with a detection limit down to 20 nm particles. Attached to the handler is also an Optical Coherence Tomography (OCT) inspection tool for back-side reticle or pellicle inspection with a resolution down to 1 micron.

Performance improvement of two-dimensional EUV spectroscopy based on high frame rate CCD and signal normalization method

International Nuclear Information System (INIS)

Zhang, H.M.; Morita, S.; Ohishi, T.; Goto, M.; Huang, X.L.

2014-01-01

In the Large Helical Device (LHD), the performance of two-dimensional (2-D) extreme ultraviolet (EUV) spectroscopy with wavelength range of 30-650A has been improved by installing a high frame rate CCD and applying a signal intensity normalization method. With upgraded 2-D space-resolved EUV spectrometer, measurement of 2-D impurity emission profiles with high horizontal resolution is possible in high-density NBI discharges. The variation in intensities of EUV emission among a few discharges is significantly reduced by normalizing the signal to the spectral intensity from EUV_—Long spectrometer which works as an impurity monitor with high-time resolution. As a result, high resolution 2-D intensity distribution has been obtained from CIV (384.176A), CV(2x40.27A), CVI(2x33.73A) and HeII(303.78A). (author)

PHOTOIONIZATION IN THE SOLAR WIND

Energy Technology Data Exchange (ETDEWEB)

Landi, E.; Lepri, S. T., E-mail: elandi@umich.edu [Department of Climate and Space Sciences and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)

2015-10-20

In this work we investigate the effects of photoionization on the charge state composition of the solar wind. Using measured solar EUV and X-ray irradiance, the Michigan Ionization Code and a model for the fast and slow solar wind, we calculate the evolution of the charge state distribution of He, C, N, O, Ne, Mg, Si, S, and Fe with and without including photoionization for both types of wind. We find that the solar radiation has significant effects on the charge state distribution of C, N, and O, causing the ionization levels of these elements to be higher than without photoionization; differences are largest for oxygen. The ions commonly observed for elements heavier than O are much less affected, except in ICMEs where Fe ions more ionized than 16+ can also be affected by the solar radiation. We also show that the commonly used O{sup 7+}/O{sup 6+} density ratio is the most sensitive to photoionization; this sensitivity also causes the value of this ratio to depend on the phase of the solar cycle. We show that the O{sup 7+}/O{sup 6+} ratio needs to be used with caution for solar wind classification and coronal temperature estimates, and recommend the C{sup 6+}/C{sup 4+} ratio for these purposes.

North-south asymmetry of solar activity as a superposition of two realizations - the sign and absolute value

Science.gov (United States)

Badalyan, O. G.; Obridko, V. N.

2017-07-01

Context. Since the occurrence of north-south asymmetry (NSA) of alternating sign may be determined by different mechanisms, the frequency and amplitude characteristics of this phenomenon should be considered separately. Aims: We propose a new approach to the description of the NSA of solar activity. Methods: The asymmetry defined as A = (N-S)/(N + S) (where N and S are, respectively, the indices of activity of the northern and southern hemispheres) is treated as a superposition of two functions: the sign of asymmetry (signature) and its absolute value (modulus). This approach is applied to the analysis of the NSA of sunspot group areas for the period 1874-2013. Results: We show that the sign of asymmetry provides information on the behavior of the asymmetry. In particular, it displays quasi-periodic variation with a period of 12 yr and quasi-biennial oscillations as the asymmetry itself. The statistics of the so-called monochrome intervals (long periods of positive or negative asymmetry) are considered and it is shown that the distribution of these intervals is described by the random distribution law. This means that the dynamo mechanisms governing the cyclic variation of solar activity must involve random processes. At the same time, the asymmetry modulus has completely different statistical properties and is probably associated with processes that determine the amplitude of the cycle. One can reliably isolate an 11-yr cycle in the behavior of the asymmetry absolute value shifted by half a period with respect to the Wolf numbers. It is shown that the asymmetry modulus has a significant prognostic value: the higher the maximum of the asymmetry modulus, the lower the following Wolf number maximum. Conclusions: A fundamental nature of this concept of NSA is discussed in the context of the general methodology of cognizing the world. It is supposed that the proposed description of the NSA will help clarify the nature of this phenomenon.

Lower atmosphere of solar flares; Proceedings of the Solar Maximum Mission Symposium, Sunspot, NM, Aug. 20-24, 1985

International Nuclear Information System (INIS)

Neidig, D.F.

1986-01-01

The topics discussed by the present conference encompass the chromospheric flare phenomenon, white light flares, UV emission and the flare transition region, the flare corona and high energy emissions, stellar flares, and flare energy release and transport. Attention is given to radiative shocks and condensation in flares, impulsive brightening of H-alpha flare points, the structure and response of the chromosphere to radiation backwarming during solar flares, the interpretation of continuum emissions in white light flares, and the radiation properties of solar plasmas. Also discussed are EUV images of a solar flare and C III intensity, an active region survey in H-alpha and X-rays, dynamic thermal plasma conditions in large flares, the evolution of the flare mechanism in dwarf stars, the evidence concerning electron beams in solar flares, the energetics of the nonlinear tearing mode, macroscopic electric fields during two-ribbon flares, and the low temperature signatures of energetic particles

Catastrophic cooling and cessation of heating in the solar corona

Science.gov (United States)

Peter, H.; Bingert, S.; Kamio, S.

2012-01-01

Context. Condensations in the more than 106 K hot corona of the Sun are commonly observed in the extreme ultraviolet (EUV). While their contribution to the total solar EUV radiation is still a matter of debate, these condensations certainly provide a valuable tool for studying the dynamic response of the corona to the heating processes. Aims: We investigate different distributions of energy input in time and space to investigate which process is most relevant for understanding these coronal condensations. Methods: For a comparison to observations we synthesize EUV emission from a time-dependent, one-dimensional model for coronal loops, where we employ two heating scenarios: simply shutting down the heating and a model where the heating is very concentrated at the loop footpoints, while keeping the total heat input constant. Results: The heating off/on model does not lead to significant EUV count rates that one observes with SDO/AIA. In contrast, the concentration of the heating near the footpoints leads to thermal non-equilibrium near the loop top resulting in the well-known catastrophic cooling. This process gives a good match to observations of coronal condensations. Conclusions: This shows that the corona needs a steady supply of energy to support the coronal plasma, even during coronal condensations. Otherwise the corona would drain very fast, too fast to even form a condensation. Movies are available in electronic form at http://www.aanda.org

The future of EUV lithography: enabling Moore's Law in the next decade

Science.gov (United States)

Pirati, Alberto; van Schoot, Jan; Troost, Kars; van Ballegoij, Rob; Krabbendam, Peter; Stoeldraijer, Judon; Loopstra, Erik; Benschop, Jos; Finders, Jo; Meiling, Hans; van Setten, Eelco; Mika, Niclas; Dredonx, Jeannot; Stamm, Uwe; Kneer, Bernhard; Thuering, Bernd; Kaiser, Winfried; Heil, Tilmann; Migura, Sascha

2017-03-01

While EUV systems equipped with a 0.33 Numerical Aperture lenses are readying to start volume manufacturing, ASML and Zeiss are ramping up their development activities on a EUV exposure tool with Numerical Aperture greater than 0.5. The purpose of this scanner, targeting a resolution of 8nm, is to extend Moore's law throughout the next decade. A novel, anamorphic lens design, has been developed to provide the required Numerical Aperture; this lens will be paired with new, faster stages and more accurate sensors enabling Moore's law economical requirements, as well as the tight focus and overlay control needed for future process nodes. The tighter focus and overlay control budgets, as well as the anamorphic optics, will drive innovations in the imaging and OPC modelling, and possibly in the metrology concepts. Furthermore, advances in resist and mask technology will be required to image lithography features with less than 10nm resolution. This paper presents an overview of the key technology innovations and infrastructure requirements for the next generation EUV systems.

Diagnostic system for EUV radiation measurements from dense xenon plasma generated by MPC

International Nuclear Information System (INIS)

Petrov, Yu.V.; Garkusha, I.E.; Solyakov, D.G.; Marchenko, A.K.; Chebotarev, V.V.; Ladygina, M.S.; Staltsov, V.V.; Yelisyeyev, D.V.; Hassanein, A.

2011-01-01

Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for radiation measurements in different operation modes of MPC. The registration system was designed on the base of combination of different types of AXUV photodiodes. Possibility to minimize the influence of electrons and ions flows from dense plasma stream on AXUV detector performance and results of the measurements has been discussed.

EUV multilayer mirror, optical system including a multilayer mirror and method of manufacturing a multilayer mirror

NARCIS (Netherlands)

Huang, Qiushi; Louis, Eric; Bijkerk, Frederik; de Boer, Meint J.; von Blanckenhagen, G.

2016-01-01

A multilayer mirror (M) reflecting extreme ultraviolet (EUV) radiation from a first wave-length range in a EUV spectral region comprises a substrate (SUB) and a stack of layers (SL) on the substrate, the stack of layers comprising layers comprising a low index material and a high index material, the

Uncertainties in (E)UV model atmosphere fluxes

Science.gov (United States)

Rauch, T.

2008-04-01

Context: During the comparison of synthetic spectra calculated with two NLTE model atmosphere codes, namely TMAP and TLUSTY, we encounter systematic differences in the EUV fluxes due to the treatment of level dissolution by pressure ionization. Aims: In the case of Sirius B, we demonstrate an uncertainty in modeling the EUV flux reliably in order to challenge theoreticians to improve the theory of level dissolution. Methods: We calculated synthetic spectra for hot, compact stars using state-of-the-art NLTE model-atmosphere techniques. Results: Systematic differences may occur due to a code-specific cutoff frequency of the H I Lyman bound-free opacity. This is the case for TMAP and TLUSTY. Both codes predict the same flux level at wavelengths lower than about 1500 Å for stars with effective temperatures (T_eff) below about 30 000 K only, if the same cutoff frequency is chosen. Conclusions: The theory of level dissolution in high-density plasmas, which is available for hydrogen only should be generalized to all species. Especially, the cutoff frequencies for the bound-free opacities should be defined in order to make predictions of UV fluxes more reliable.

BREAKOUT RECONNECTION OBSERVED BY THE TESIS EUV TELESCOPE

Energy Technology Data Exchange (ETDEWEB)

Reva, A. A.; Ulyanov, A. S.; Shestov, S. V.; Kuzin, S. V., E-mail: reva.antoine@gmail.com [Lebedev Physical Institute, Russian Academy of Sciences (Russian Federation)

2016-01-10

We present experimental evidence of the coronal mass ejection (CME) breakout reconnection, observed by the TESIS EUV telescope. The telescope could observe solar corona up to 2 R{sub ⊙} from the Sun center in the Fe 171 Å line. Starting from 2009 April 8, TESIS observed an active region (AR) that had a quadrupolar structure with an X-point 0.5 R{sub ⊙} above photosphere. A magnetic field reconstructed from the Michelson Doppler Imager data also has a multipolar structure with an X-point above the AR. At 21:45 UT on April 9, the loops near the X-point started to move away from each other with a velocity of ≈7 km s{sup −1}. At 01:15 UT on April 10, a bright stripe appeared between the loops, and the flux in the GOES 0.5–4 Å channel increased. We interpret the loops’ sideways motion and the bright stripe as evidence of the breakout reconnection. At 01:45 UT, the loops below the X-point started to slowly move up. At 15:10 UT, the CME started to accelerate impulsively, while at the same time a flare arcade formed below the CME. After 15:50 UT, the CME moved with constant velocity. The CME evolution precisely followed the breakout model scenario.

BREAKOUT RECONNECTION OBSERVED BY THE TESIS EUV TELESCOPE

International Nuclear Information System (INIS)

Reva, A. A.; Ulyanov, A. S.; Shestov, S. V.; Kuzin, S. V.

2016-01-01

We present experimental evidence of the coronal mass ejection (CME) breakout reconnection, observed by the TESIS EUV telescope. The telescope could observe solar corona up to 2 R ⊙ from the Sun center in the Fe 171 Å line. Starting from 2009 April 8, TESIS observed an active region (AR) that had a quadrupolar structure with an X-point 0.5 R ⊙ above photosphere. A magnetic field reconstructed from the Michelson Doppler Imager data also has a multipolar structure with an X-point above the AR. At 21:45 UT on April 9, the loops near the X-point started to move away from each other with a velocity of ≈7 km s −1 . At 01:15 UT on April 10, a bright stripe appeared between the loops, and the flux in the GOES 0.5–4 Å channel increased. We interpret the loops’ sideways motion and the bright stripe as evidence of the breakout reconnection. At 01:45 UT, the loops below the X-point started to slowly move up. At 15:10 UT, the CME started to accelerate impulsively, while at the same time a flare arcade formed below the CME. After 15:50 UT, the CME moved with constant velocity. The CME evolution precisely followed the breakout model scenario

Negating HIO-induced metal and carbide EUV surface contamination

NARCIS (Netherlands)

Sturm, Jacobus Marinus; Gleeson, Michael; van de Kruijs, Robbert Wilhelmus Elisabeth; Lee, Christopher James; Kleyn, A.W.; Bijkerk, Frederik

2011-01-01

The next generation photolithography will use 13.5 nm Extreme Ultraviolet (EUV) light in order to reduce feature sizes in semiconductor manufactoring. Lens materials for this wavelength do not exist: image projection requires multilayer mirrors that act as an artificial Bragg crystal.

Microwave, EUV, and X-ray observations of active region loops and filaments

International Nuclear Information System (INIS)

Schmahl, E.

1980-01-01

Until the advent of X-ray and EUV observations of coronal structures, radio observers were forced to rely on eclipse and coronagraph observations in white light and forbidden coronal lines for additional diagnostics of the high temperature microwave sources. While these data provided enough material for theoretical insight into the physics of active regions, there was no way to make direct, simultaneous comparison of coronal structures on the disk as seen at microwave and optical wavelengths. This is now possible, and therefore the author summarizes the EUV and X-ray observations indicating at each point the relevance to microwaves. (Auth.)

Solar Illumination Control of the Polar Wind

Science.gov (United States)

Maes, L.; Maggiolo, R.; De Keyser, J.; André, M.; Eriksson, A. I.; Haaland, S.; Li, K.; Poedts, S.

2017-11-01

Polar wind outflow is an important process through which the ionosphere supplies plasma to the magnetosphere. The main source of energy driving the polar wind is solar illumination of the ionosphere. As a result, many studies have found a relation between polar wind flux densities and solar EUV intensity, but less is known about their relation to the solar zenith angle at the ionospheric origin, certainly at higher altitudes. The low energy of the outflowing particles and spacecraft charging means it is very difficult to measure the polar wind at high altitudes. We take advantage of an alternative method that allows estimations of the polar wind flux densities far in the lobes. We analyze measurements made by the Cluster spacecraft at altitudes from 4 up to 20 RE. We observe a strong dependence on the solar zenith angle in the ion flux density and see that both the ion velocity and density exhibit a solar zenith angle dependence as well. We also find a seasonal variation of the flux density.

Sub 20nm particle inspection on EUV mask blanks

NARCIS (Netherlands)

Bussink, P.G.W.; Volatier, J.B.; Walle, P. van der; Fritz, E.C.; Donck, J.C.J. van der

2016-01-01

The Rapid Nano is a particle inspection system developed by TNO for the qualification of EUV reticle handling equipment. The detection principle of this system is dark-field microscopy. The performance of the system has been improved via model-based design. Through our model of the scattering

Emission spectra of photoionized plasmas induced by intense EUV pulses: Experimental and theoretical investigations

Science.gov (United States)

Saber, Ismail; Bartnik, Andrzej; Skrzeczanowski, Wojciech; Wachulak, Przemysław; Jarocki, Roman; Fiedorowicz, Henryk

2017-03-01

Experimental measurements and numerical modeling of emission spectra in photoionized plasma in the ultraviolet and visible light (UV/Vis) range for noble gases have been investigated. The photoionized plasmas were created using laser-produced plasma (LPP) extreme ultraviolet (EUV) source. The source was based on a gas puff target; irradiated with 10ns/10J/10Hz Nd:YAG laser. The EUV radiation pulses were collected and focused using grazing incidence multifoil EUV collector. The laser pulses were focused on a gas stream, injected into a vacuum chamber synchronously with the EUV pulses. Irradiation of gases resulted in a formation of low temperature photoionized plasmas emitting radiation in the UV/Vis spectral range. Atomic photoionized plasmas produced this way consisted of atomic and ionic with various ionization states. The most dominated observed spectral lines originated from radiative transitions in singly charged ions. To assist in a theoretical interpretation of the measured spectra, an atomic code based on Cowan's programs and a collisional-radiative PrismSPECT code have been used to calculate the theoretical spectra. A comparison of the calculated spectral lines with experimentally obtained results is presented. Electron temperature in plasma is estimated using the Boltzmann plot method, by an assumption that a local thermodynamic equilibrium (LTE) condition in the plasma is validated in the first few ionization states. A brief discussion for the measured and computed spectra is given.

Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses

Science.gov (United States)

Higashiguchi, Takeshi; Rajyaguru, Chirag; Koga, Masato; Kawasaki, Keita; Sasaki, Wataru; Kubodera, Shoichi; Kikuchi, Takashi; Yugami, Noboru; Kawata, Shigeo; Andreev, Alexander A.

2005-03-01

Extreme ultraviolet (EUV) radiation at the wavelength of around 13nm waws observed from a laser-produced plasma using continuous water-jet. Strong dependence of the conversion efficiency (CE) on the laser focal spot size and jet diameter was observed. The EUV CE at a given laser spot size and jet diameter was further enhanced using double laser pulses, where a pre-pulse was used for initial heating of the plasma.

EUV blank defect and particle inspection with high throughput immersion AFM with 1nm 3D resolution

NARCIS (Netherlands)

Es, M.H. van; Sadeghian Marnani, H.

2016-01-01

Inspection of EUV mask substrates and blanks is demanding. We envision this is a good target application for massively parallel Atomic Force Microscopy (AFM). We envision to do a full surface characterization of EUV masks with AFM enabling 1nm true 3D resolution over the entire surface. The limiting

Performance of the Multi-Spectral Solar Telescope Array. III - Optical characteristics of the Ritchey-Chretien and Cassegrain telescopes

Science.gov (United States)

Hoover, Richard B.; Baker, Phillip C.; Hadaway, James B.; Johnson, R. B.; Peterson, Cynthia; Gabardi, David R.; Walker, Arthur B., Jr.; Lindblom, J. F.; Deforest, Craig; O'Neal, R. H.

1991-12-01

The Multi-Spectral Solar Telescope Array (MSSTA), which is a sounding-rocket-borne observatory for investigating the sun in the soft X-ray/EUV and FUV regimes of the electromagnetic spectrum, utilizes single reflection multilayer coated Herschelian telescopes for wavelengths below 100 A, and five doubly reflecting multilayer coated Ritchey-Chretien and two Cassegrain telescopes for selected wavelengths in the EUV region between 100 and 1000 A. The paper discusses the interferometric alignment, testing, focusing, visible light testing, and optical performance characteristics of the Ritchey-Chretien and Cassegrain telescopes of MSSTA. A schematic diagram of the MSSTA Ritchey-Chretien telescope is presented together with diagrams of the system autocollimation testing.

4-D modeling of CME expansion and EUV dimming observed with STEREO/EUVI

Directory of Open Access Journals (Sweden)

M. J. Aschwanden

2009-08-01

Full Text Available This is the first attempt to model the kinematics of a CME launch and the resulting EUV dimming quantitatively with a self-consistent model. Our 4-D-model assumes self-similar expansion of a spherical CME geometry that consists of a CME front with density compression and a cavity with density rarefaction, satisfying mass conservation of the total CME and swept-up corona. The model contains 14 free parameters and is fitted to the 25 March 2008 CME event observed with STEREO/A and B. Our model is able to reproduce the observed CME expansion and related EUV dimming during the initial phase from 18:30 UT to 19:00 UT. The CME kinematics can be characterized by a constant acceleration (i.e., a constant magnetic driving force. While the observations of EUVI/A are consistent with a spherical bubble geometry, we detect significant asymmetries and density inhomogeneities with EUVI/B. This new forward-modeling method demonstrates how the observed EUV dimming can be used to model physical parameters of the CME source region, the CME geometry, and CME kinematics.

Time series study of EUV spicules observed by SUMER/SoHO

Science.gov (United States)

Xia, L. D.; Popescu, M. D.; Doyle, J. G.; Giannikakis, J.

2005-08-01

Here we study the dynamic properties of EUV spicules seen at the solar limb. The selected data were obtained as time series in polar coronal holes by SUMER/SoHO. The short exposure time and the almost fixed position of the spectrometer's slit allow the analysis of spicule properties such as occurrence, lifetime and Doppler velocity. Our data reveal that spicules occur repeatedly at the same location with a birth rate of around 0.16/min as estimated at 10´´ above the limb and a lifetime ranging from 15 down to ≈3 min. We are able to see some spicules showing a process of “falling after rising” indicated by the sudden change of the Doppler velocity sign. A periodicity of ≈5 min is sometimes discernible in their occurrence. Most spicules have a height between 10´´ and 20´´ above the limb. Some can stretch up to 40´´; these “long macro-spicules” seem to be comprised of a group of high spicules. Some of them have an obvious periodicity in the radiance of ≈5 min.

Study of EUV induced defects on few-layer graphene

NARCIS (Netherlands)

Gao, An; Rizo, P.J.; Zoethout, E.; Scaccabarozzi, L.; Lee, Christopher James; Banine, V.; Bijkerk, Frederik

2012-01-01

Defects in graphene greatly affect its properties1-3. Radiation induced-defects may reduce the long-term survivability of graphene-based nano-devices. Here, we expose few-layer graphene to extreme ultraviolet (EUV, 13.5nm) radiation and show there is a power-dependent increase in defect density. We

Formation dynamics of UV and EUV induced hydrogen plasma

NARCIS (Netherlands)

Dolgov, A.A.; Lee, Christopher James; Yakushev, O.; Lopaev, D.V.; Abrikosov, A.; Krivtsun, V.M.; Zotovich, A.; Bijkerk, F.

2014-01-01

The comparative study of the dynamics of ultraviolet (UV) and extreme ultraviolet (EUV) induced hydrogen plasma was performed. It was shown that for low H2 pressures and bias voltages, the dynamics of the two plasmas are significantly different. In the case of UV radiation, the plasma above the

Response of inorganic materials to laser - plasma EUV radiation focused with a lobster eye collector

Science.gov (United States)

Bartnik, Andrzej; Fiedorowicz, Henryk; Jarocki, Roman; Kostecki, Jerzy; Szczurek, Miroslaw; Havlikova, Radka; Pína, Ladislav; Švéda, Libor; Inneman, Adolf

2007-05-01

A single photon of EUV radiation carries enough energy to break any chemical bond or excite electrons from inner atomic shells. It means that the radiation regardless of its intensity can modify chemical structure of molecules. It is the reason that the radiation even with low intensity can cause fragmentation of long chains of organic materials and desorption of small parts from their surface. In this work interaction of EUV radiation with inorganic materials was investigated. Different inorganic samples were irradiated with a 10 Hz laser - plasma EUV source based on a gas puff target. The radiation was focused on a sample surface using a lobster eye collector. Radiation fluence at the surface reached 30 mJ/cm2 within a wavelength range 7 - 20 nm. In most cases there was no surface damage even after several minutes of irradiation. In some cases there could be noticed discolouration of an irradiated surface or evidences of thermal effects. In most cases however luminescent and scattered radiation was observed. The luminescent radiation was emitted in different wavelength ranges. It was recorded in a visible range of radiation and also in a wide wavelength range including UV, VUV and EUV. The radiation was especially intense in a case of non-metallic chemical compounds.

Mode Conversion of a Solar Extreme-ultraviolet Wave over a Coronal Cavity

Energy Technology Data Exchange (ETDEWEB)

Zong, Weiguo [Key Laboratory of Space Weather, National Center for Space Weather, China Meteorological Administration, Beijing 100081 (China); Dai, Yu, E-mail: ydai@nju.edu.cn [Key Laboratory of Modern Astronomy and Astrophysics (Nanjing University), Ministry of Education, Nanjing 210023 (China)

2017-01-10

We report on observations of an extreme-ultraviolet (EUV) wave event in the Sun on 2011 January 13 by Solar Terrestrial Relations Observatory and Solar Dynamics Observatory in quadrature. Both the trailing edge and the leading edge of the EUV wave front in the north direction are reliably traced, revealing generally compatible propagation velocities in both perspectives and a velocity ratio of about 1/3. When the wave front encounters a coronal cavity near the northern polar coronal hole, the trailing edge of the front stops while its leading edge just shows a small gap and extends over the cavity, meanwhile getting significantly decelerated but intensified. We propose that the trailing edge and the leading edge of the northward propagating wave front correspond to a non-wave coronal mass ejection component and a fast-mode magnetohydrodynamic wave component, respectively. The interaction of the fast-mode wave and the coronal cavity may involve a mode conversion process, through which part of the fast-mode wave is converted to a slow-mode wave that is trapped along the magnetic field lines. This scenario can reasonably account for the unusual behavior of the wave front over the coronal cavity.

Enabling laboratory EUV research with a compact exposure tool

Science.gov (United States)

Brose, Sascha; Danylyuk, Serhiy; Tempeler, Jenny; Kim, Hyun-su; Loosen, Peter; Juschkin, Larissa

2016-03-01

In this work we present the capabilities of the designed and realized extreme ultraviolet laboratory exposure tool (EUVLET) which has been developed at the RWTH-Aachen, Chair for the Technology of Optical Systems (TOS), in cooperation with the Fraunhofer Institute for Laser Technology (ILT) and Bruker ASC GmbH. Main purpose of this laboratory setup is the direct application in research facilities and companies with small batch production, where the fabrication of high resolution periodic arrays over large areas is required. The setup can also be utilized for resist characterization and evaluation of its pre- and post-exposure processing. The tool utilizes a partially coherent discharge produced plasma (DPP) source and minimizes the number of other critical components to a transmission grating, the photoresist coated wafer and the positioning system for wafer and grating and utilizes the Talbot lithography approach. To identify the limits of this approach first each component is analyzed and optimized separately and relations between these components are identified. The EUV source has been optimized to achieve the best values for spatial and temporal coherence. Phase-shifting and amplitude transmission gratings have been fabricated and exposed. Several commercially available electron beam resists and one EUV resist have been characterized by open frame exposures to determine their contrast under EUV radiation. Cold development procedure has been performed to further increase the resist contrast. By analyzing the exposure results it can be demonstrated that only a 1:1 copy of the mask structure can be fully resolved by the utilization of amplitude masks. The utilized phase-shift masks offer higher 1st order diffraction efficiency and allow a demagnification of the mask structure in the achromatic Talbot plane.

SIMULTANEOUS OBSERVATION OF SOLAR OSCILLATIONS ASSOCIATED WITH CORONAL LOOPS FROM THE PHOTOSPHERE TO THE CORONA

Energy Technology Data Exchange (ETDEWEB)

Su, J. T.; Liu, S.; Zhang, Y. Z.; Zhao, H.; Xu, H. Q.; Xie, W. B. [Key Laboratory of Solar Activity, National Astronomical Observatories, Chinese Academy of Science, Beijing 100012 (China); Liu, Y. [National Astronomical Observatories/Yunnan Observatory, Chinese Academy of Sciences, Kunming 650011 (China)

2013-01-01

The solar oscillations along one coronal loop in AR 11504 are observed simultaneously in white light emission and Doppler velocity by SDO/HMI, and in UV and EUV emissions by SDO/AIA. The technique of the time-distance diagram is used to detect the propagating oscillations of the emission intensities along the loop. We find that although all the oscillation signals were intercorrelated, the low chromospheric oscillation correlated more closely to the oscillations of the transition region and corona than to those of the photosphere. Situated above the sunspot, the oscillation periods were {approx}3 minutes in the UV/EUV emissions; however, moving away from the sunspot and into the quiet Sun, the periods became longer, e.g., up to {approx}5 minutes or more. In addition, along another loop we observe both the high-speed outflows and oscillations, which roughly had a one-to-one corresponding relationship. This indicates that the solar periodic oscillations may modulate the magnetic reconnections between the loops of the high and low altitudes that drive the high-speed outflows along the loop.

The First ALMA Observation of a Solar Plasmoid Ejection from an X-Ray Bright Point

Science.gov (United States)

Shimojo, M.; Hudson, H. S.; White, S. M.; Bastian, T.; Iwai, K.

2017-12-01

Eruptive phenomena are important features of energy releases events, such solar flares, and have the potential to improve our understanding of the dynamics of the solar atmosphere. The 304 A EUV line of helium, formed at around 10^5 K, is found to be a reliable tracer of such phenomena, but the determination of physical parameters from such observations is not straightforward. We have observed a plasmoid ejection from an X-ray bright point simultaneously with ALMA, SDO/AIA, and Hinode/XRT. This paper reports the physical parameters of the plasmoid obtained by combining the radio, EUV, and X-ray data. As a result, we conclude that the plasmoid can consist either of (approximately) isothermal ˜10^5 K plasma that is optically thin at 100 GHz, or a ˜10^4 K core with a hot envelope. The analysis demonstrates the value of the additional temperature and density constraints that ALMA provides, and future science observations with ALMA will be able to match the spatial resolution of space-borne and other high-resolution telescopes.

Discharge plasmas as EUV Sources for Future Micro Lithography

Science.gov (United States)

Kruecken, Thomas

2007-08-01

Future extreme ultraviolet (EUV) lithography will require very high radiation intensities in a narrow wavelength range around 13.5 nm, which is most efficiently emitted as line radiation by highly ionized heavy particles. Currently the most intense EUV sources are based on xenon or tin gas discharges. After having investigated the limits of a hollow cathode triggered xenon pinch discharge Philips Extreme UV favors a laser triggered tin vacuum spark discharge. Plasma and radiation properties of these highly transient discharges will be compared. Besides simple MHD-models the ADAS software package has been used to generate important atomic and spectral data of the relevant ion stages. To compute excitation and radiation properties, collisional radiative equilibria of individual ion stages are computed. For many lines opacity effects cannot be neglected. In the xenon discharges the optical depths allow for a treatment based on escape factors. Due to the rapid change of plasma parameters the abundancies of the different ionization stages must be computed dynamically. This requires effective ionization and recombination rates, which can also be supplied by ADAS. Due to very steep gradients (up to a couple orders of magnitude per mm) the plasma of tin vacuum spark discharges is very complicated. Therefore we shall describe here only some technological aspects of our tin EUV lamp: The electrode system consists of two rotating which are pulled through baths of molten tin such that a tin film remains on their surfaces. With a laser pulse some tin is ablated from one of the wheels and travels rapidly through vacuum towards the other rotating wheel. When the tin plasma reaches the other electrodes it ignites and the high current phase starts, i.e. the capacitor bank is unloaded, the plasma is pinched and EUV is radiated. Besides the good spectral properties of tin this concept has some other advantages: Erosion of electrodes is no severe problem as the tin film is

Coronal Polarization of Pseudostreamers and the Solar Polar Field Reversal

Science.gov (United States)

Rachmeler, L. A.; Guennou, C.; Seaton, D. B.; Gibson, S. E.; Auchere, F.

2016-01-01

The reversal of the solar polar magnetic field is notoriously hard to pin down due to the extreme viewing angle of the pole. In Cycle 24, the southern polar field reversal can be pinpointed with high accuracy due to a large-scale pseudostreamer that formed over the pole and persisted for approximately a year. We tracked the size and shape of this structure with multiple observations and analysis techniques including PROBA2/SWAP EUV images, AIA EUV images, CoMP polarization data, and 3D tomographic reconstructions. We find that the heliospheric field reversed polarity in February 2014, whereas in the photosphere, the last vestiges of the previous polar field polarity remained until March 2015. We present here the evolution of the structure and describe its identification in the Fe XII 1074nm coronal emission line, sensitive to the Hanle effect in the corona.

Response of the upper atmosphere to variations in the solar soft x-ray irradiance. Ph.D. Thesis

Science.gov (United States)

Bailey, Scott Martin

1995-01-01

Terrestrial far ultraviolet (FUV) airglow emissions have been suggested as a means for remote sensing the structure of the upper atmosphere. The energy which leads to the excitation of FUV airglow emissions is solar irradiance at extreme ultraviolet (EUV) and soft x-ray wavelengths. Solar irradiance at these wavelengths is known to be highly variable; studies of nitric oxide (NO) in the lower thermosphere have suggested a variability of more than an order of magnitude in the solar soft x-ray irradiance. To properly interpret the FUV airflow, the magnitude of the solar energy deposition must be known. Previous analyses have used the electron impact excited Lyman-Birge-Hopfield (LBH) bands of N2 to infer the flux of photoelectrons in the atmosphere and thus to infer the magnitude of the solar irradiance. This dissertation presents the first simultaneous measurements of the FUV airglow, the major atmospheric constituent densities, and the solar EUV and soft x-ray irradiances. The measurements were made on three flights of an identical sounding rocket payload at different levels of solar activity. The linear response in brightness of the LBH bands to variations in solar irradiance is demonstrated. In addition to the N2 LBH bands, atomic oxygen lines at 135.6 and 130.4 nm are also studied. Unlike the LBH bands, these emissions undergo radiative transfer effects in the atmosphere. The OI emission at 135.6 nm is found to be well modeled using a radiative transfer calculation and the known excitation processes. Unfortunately, the assumed processes leading to OI 130.4 nm excitation are found to be insufficient to reproduce the observed variability of this emission. Production of NO in the atmosphere is examined; it is shown that a lower than previously reported variability in the solar soft x-ray irradiance is required to explain the variability of NO.

Improving Soft X-Ray Spectral Irradiance Models for Use Throughout the Solar System

Science.gov (United States)

Eparvier, F. G.; Thiemann, E.; Woods, T. N.

2017-12-01

Understanding the effects of solar variability on planetary atmospheres has been hindered by the lack of accurate models and measurements of the soft x-ray (SXR) spectral irradiance (0-6 nm). Most measurements of the SXR have been broadband and are difficult to interpret due to changing spectral distribution under the pass band of the instruments. Models that use reference spectra for quiet sun, active region, and flaring contributions to irradiance have been made, but with limited success. The recent Miniature X-ray Solar Spectrometer (MinXSS) CubeSat made spectral measurements in the 0.04 - 3 nm range from June 2016 to May 2017, observing the Sun at many different levels of activity. In addition, the Solar Dynamics Observatory (SDO) EUV Variability Experiment (EVE) has observed the Sun since May 2010, in both broad bands (including a band at 0-7 nm) and spectrally resolved (6-105 nm at 0.1 nm resolution). We will present an improved model of the SXR based on new reference spectra from MinXSS and SDO-EVE. The non-flaring portion of the model is driven by broadband SXR measurements for determining activity level and relative contributions of quiet and active sun. Flares are modeled using flare temperatures from the GOES X-Ray Sensors. The improved SXR model can be driven by any sensors that provide a measure of activity level and flare temperature from any vantage point in the solar system. As an example, a version of the model is using the broadband solar irradiance measurements from the MAVEN EUV Monitor at Mars will be presented.

SphinX soft X-ray spectrophotometer: Science objectives, design and performance

Science.gov (United States)

Gburek, S.; Sylwester, J.; Kowalinski, M.; Bakala, J.; Kordylewski, Z.; Podgorski, P.; Plocieniak, S.; Siarkowski, M.; Sylwester, B.; Trzebinski, W.; Kuzin, S. V.; Pertsov, A. A.; Kotov, Yu. D.; Farnik, F.; Reale, F.; Phillips, K. J. H.

2011-06-01

The goals and construction details of a new design Polish-led X-ray spectrophotometer are described. The instrument is aimed to observe emission from entire solar corona and is placed as a separate block within the Russian TESIS X- and EUV complex aboard the CORONAS-PHOTON solar orbiting observatory. SphinX uses silicon PIN diode detectors for high time resolution measurements of the solar spectra in the range 0.8-15 keV. Its spectral resolution allows for discerning more than hundred separate energy bands in this range. The instrument dynamic range extends two orders of magnitude below and above these representative for GOES. The relative and absolute accuracy of spectral measurements is expected to be better than few percent, as follows from extensive ground laboratory calibrations.

A self-consistent, absolute isochronal age scale for young moving groups in the solar neighbourhood

Science.gov (United States)

Bell, Cameron P. M.; Mamajek, Eric E.; Naylor, Tim

2015-11-01

We present a self-consistent, absolute isochronal age scale for young ( ≲ 200 Myr), nearby ( ≲ 100 pc) moving groups in the solar neighbourhood based on homogeneous fitting of semi-empirical pre-main-sequence model isochrones using the τ2 maximum-likelihood fitting statistic of Naylor & Jeffries in the MV, V - J colour-magnitude diagram. The final adopted ages for the groups are as follows: 149^{+51}_{-19} {Myr} for the AB Dor moving group, 24 ± 3 Myr for the β Pic moving group (BPMG), 45^{+11}_{-7} {Myr} for the Carina association, 42^{+6}_{-4} {Myr} for the Columba association, 11 ± 3 Myr for the η Cha cluster, 45 ± 4 Myr for the Tucana-Horologium moving group (Tuc-Hor), 10 ± 3 Myr for the TW Hya association and 22^{+4}_{-3} {Myr} for the 32 Ori group. At this stage we are uncomfortable assigning a final, unambiguous age to the Argus association as our membership list for the association appears to suffer from a high level of contamination, and therefore it remains unclear whether these stars represent a single population of coeval stars. Our isochronal ages for both the BPMG and Tuc-Hor are consistent with recent lithium depletion boundary (LDB) ages, which unlike isochronal ages, are relatively insensitive to the choice of low-mass evolutionary models. This consistency between the isochronal and LDB ages instils confidence that our self-consistent, absolute age scale for young, nearby moving groups is robust, and hence we suggest that these ages be adopted for future studies of these groups. Software implementing the methods described in this study is available from http://www.astro.ex.ac.uk/people/timn/tau-squared/.

The Solar Dynamics Observatory, Studying the Sun and Its Influence on Other Bodies in the Solar System

Science.gov (United States)

Chamberlin, P. C.

2011-01-01

The solar photon output, which was once thought to be constant, varies over all time scales from seconds during solar flares to years due to the solar cycle. These solar variations cause significant deviations in the Earth and space environments on similar time scales, such as affecting the atmospheric densities and composition of particular atoms, molecules, and ions in the atmospheres of the Earth and other planets. Presented and discussed will be examples of unprecedented observations from NASA's new solar observatory, the Solar Dynamics Observatory (SDO). Using three specialized instruments, SDO measures the origins of solar activity from inside the Sun, though its atmosphere, then accurately measuring the Sun's radiative output in X-ray and EUV wavelengths (0.1-121 nm). Along with the visually appealing observations will be discussions of what these measurements can tell us about how the plasma motions in all layers of the Sun modifies and strengthens the weak solar dipole magnetic field to drive large energy releases in solar eruptions. Also presented will be examples of how the release of the Sun's energy, in the form of photons and high energy particles, physically influence other bodies in the solar system such as Earth, Mars, and the Moon, and how these changes drive changes in the technology that we are becoming dependent upon. The presentation will continuously emphasize how SDO, the first satellite in NASA's Living with a Star program, improving our understanding of the variable Sun and its Heliospheric influence.

Modeling the solar cycle change in nitric oxide in the thermosphere and upper mesosphere

International Nuclear Information System (INIS)

Fuller-Rowell, T.J.

1993-01-01

Measurements from the Solar Mesosphere Explorer (SME) satellite have shown that low-latitude nitric oxide densities at 110 km decrease by about a factor of 8 from January 1982 to April 1985. This time period corresponds to the descending phase of the last solar cycle where the monthly smoothed sunspot number decreased from more than 150 to less than 25. In addition, nitric oxide was observed to vary by a factor of 2 over a solar rotation, during high solar activity. A one-dimensional, globally averaged model of the thermosphere and upper mesosphere has been used to study the height distribution of nitric oxide (NO) and its response to changes in the solar extreme ultraviolet radiation (EUV) through the solar cycle and over a solar rotation. The primary source of nitric oxide is the reaction of excited atomic nitrogen, N( 2 D), with molecular oxygen. The atomic nitrogen is created by a number of ion-neutral reactions and by direct dissociation of molecular nitrogen by photons and photoelectrons. The occurrence of the peak nitric oxide density at or below 115 km is a direct consequence of ionization and dissociation of molecular nitrogen by photoelectrons, which are produced by the solar flux below 30.0 nm (XUV). Nitric oxide is shown to vary over the solar cycle by a factor of 7 at low latitudes in the lower thermosphere E region, due to the estimated change in the solar EUV flux, in good agreement with the SME satellite observations. The NO density is shown to be strongly dependent on the temperature profile in the lower thermosphere and accounts for the difference between the current model and previous work. Wavelengths less than 1.8 nm have little impact on the NO profile. A factor of 3 change in solar flux below 5.0 nm at high solar activity produced a factor of 2 change in the peak NO density, consistent with SME observations over a solar rotation; this change also lowered the peak to 100 km, consistent with rocket data. 52 refs., 10 figs., 5 tabs

The EUV Spectrum of Sunspot Plumes Observed by SUMER on ...

Indian Academy of Sciences (India)

tribpo

Abstract. We present results from sunspot observations obtained by. SUMER on SOHO. In sunspot plumes the EUV spectrum differs from the quiet Sun; continua are observed with different slopes and intensities; emission lines from molecular hydrogen and many unidentified species indicate unique plasma conditions ...

On the Importance of the Flare's Late Phase for the Solar Extreme Ultraviolet Irradiance

Science.gov (United States)

Woods, Thomas N.; Eparvier, Frank; Jones, Andrew R.; Hock, Rachel; Chamberlin, Phillip C.; Klimchuk, James A.; Didkovsky, Leonid; Judge, Darrell; Mariska, John; Bailey, Scott;

Signatures of moderate (M-class) and low (C and B class) intensity solar flares on the equatorial electrojet current: Case studies

Science.gov (United States)

Chakrabarty, D.; Bagiya, Mala S.; Thampi, Smitha V.; Pathan, B. M.; Sekar, R.

2013-12-01

The present investigation brings out, in contrast to the earlier works, the changes in the equatorial electrojet (EEJ) current in response to a few moderate (M-class) and low (C and B class) intensity solar flares during 2005-2010. Special care is taken to pick these flare events in the absence of prompt electric field perturbations associated with geomagnetic storms and substorms that also affect the electrojet current. Interestingly, only the normalized (with respect to the pre-flare level) deviations of daytime EEJ (and not the deviations alone) change linearly with the increases in the EUV and X-ray fluxes. These linear relationships break down during local morning hours when the E-region electric field approaches zero before reversal of polarity. This elicits that the response of EEJ strength corresponding to less-intense flares can be appropriately gauged only when the local time variation of the quiet time E-region zonal electric field is taken into account. The flare events enhanced the EEJ strength irrespective of normal or counter electrojet (CEJ) conditions that shows that solar flares change the E-region ionization density and not the electric field. In addition, the enhancements in the X-ray and EUV fluxes, for these flares occurring during this solar minimum period, are found to be significantly correlated as opposed to the solar maximum period, indicating the differences in the solar processes in different solar epochs.

Weak ionization of the global ionosphere in solar cycle 24

Directory of Open Access Journals (Sweden)

Y. Q. Hao

2014-07-01

Full Text Available Following prolonged and extremely quiet solar activity from 2008 to 2009, the 24th solar cycle started slowly. It has been almost 5 years since then. The measurement of ionospheric critical frequency (foF2 shows the fact that solar activity has been significantly lower in the first half of cycle 24, compared to the average levels of cycles 19 to 23; the data of global average total electron content (TEC confirm that the global ionosphere around the cycle 24 peak is much more weakly ionized, in contrast to cycle 23. The weak ionization has been more notable since the year 2012, when both the ionosphere and solar activity were expected to be approaching their maximum level. The undersupply of solar extreme ultraviolet (EUV irradiance somewhat continues after the 2008–2009 minimum, and is considered to be the main cause of the weak ionization. It further implies that the thermosphere and ionosphere in the first solar cycle of this millennium would probably differ from what we have learned from the previous cycles of the space age.

The Diagnostics of the kappa-Distributions from EUV Spectra

Czech Academy of Sciences Publication Activity Database

Dzifčáková, Elena; Kulinová, Alena

2010-01-01

Roč. 263, 1-2 (2010), s. 25-41 ISSN 0038-0938 R&D Projects: GA ČR GA205/09/1705 Grant - others:VEGA(SK) 1/0069/08 Institutional research plan: CEZ:AV0Z10030501 Keywords : EUV spectra * non- thermal distributions * plasma diagnostics Subject RIV: BN - Astronomy, Celestial Mechanics, Astrophysics Impact factor: 3.386, year: 2010

EUV stimulated emission from MgO pumped by FEL pulses

Directory of Open Access Journals (Sweden)

Philippe Jonnard

2017-09-01

Full Text Available Stimulated emission is a fundamental process in nature that deserves to be investigated and understood in the extreme ultra-violet (EUV and x-ray regimes. Today, this is definitely possible through high energy density free electron laser (FEL beams. In this context, we give evidence for soft-x-ray stimulated emission from a magnesium oxide solid target pumped by EUV FEL pulses formed in the regime of travelling-wave amplified spontaneous emission in backward geometry. Our results combine two effects separately reported in previous works: emission in a privileged direction and existence of a material-dependent threshold for the stimulated emission. We develop a novel theoretical framework, based on coupled rate and transport equations taking into account the solid-density plasma state of the target. Our model accounts for both observed mechanisms that are the privileged direction for the stimulated emission of the Mg L2,3 characteristic emission and the pumping threshold.

Optical, UV, and EUV Oscillations of SS Cygni in Outburst

Science.gov (United States)

Mauche, Christopher W.

2004-07-01

I provide a review of observations in the optical, UV (HST), and EUV (EUVE and Chandra LETG) of the rapid periodic oscillations of nonmagnetic, disk-accreting, high mass-accretion rate cataclysmic variables (CVs), with particular emphasis on the dwarf nova SS Cyg in outburst. In addition, I drawn attention to a correlation, valid over nearly six orders of magnitude in frequency, between the frequencies of the quasi-periodic oscillations (QPOs) of white dwarf, neutron star, and black hole binaries. This correlation identifies the high frequency quasi-coherent oscillations (so-called ``dwarf nova oscillations'') of CVs with the kilohertz QPOs of low mass X-ray binaries (LMXBs), and the low frequency and low coherence QPOs of CVs with the horizontal branch oscillations (or the broad noise component identified as such) of LMXBs. Assuming that the same mechanisms produce the QPOs of white dwarf, neutron star, and black hole binaries, this correlation has important implications for QPO models.

Driving down defect density in composite EUV patterning film stacks

Science.gov (United States)

Meli, Luciana; Petrillo, Karen; De Silva, Anuja; Arnold, John; Felix, Nelson; Johnson, Richard; Murray, Cody; Hubbard, Alex; Durrant, Danielle; Hontake, Koichi; Huli, Lior; Lemley, Corey; Hetzer, Dave; Kawakami, Shinichiro; Matsunaga, Koichi

2017-03-01

Extreme ultraviolet lithography (EUVL) technology is one of the leading candidates for enabling the next generation devices, for 7nm node and beyond. As the technology matures, further improvement is required in the area of blanket film defectivity, pattern defectivity, CD uniformity, and LWR/LER. As EUV pitch scaling approaches sub 20 nm, new techniques and methods must be developed to reduce the overall defectivity, mitigate pattern collapse and eliminate film related defect. IBM Corporation and Tokyo Electron Limited (TELTM) are continuously collaborating to develop manufacturing quality processes for EUVL. In this paper, we review key defectivity learning required to enable 7nm node and beyond technology. We will describe ongoing progress in addressing these challenges through track-based processes (coating, developer, baking), highlighting the limitations of common defect detection strategies and outlining methodologies necessary for accurate characterization and mitigation of blanket defectivity in EUV patterning stacks. We will further discuss defects related to pattern collapse and thinning of underlayer films.

Extreme ultraviolet spectral irradiance measurements since 1946

Science.gov (United States)

Schmidtke, G.

2015-03-01

In the physics of the upper atmosphere the solar extreme ultraviolet (EUV) radiation plays a dominant role controlling most of the thermospheric/ionospheric (T/I) processes. Since this part of the solar spectrum is absorbed in the thermosphere, platforms to measure the EUV fluxes became only available with the development of rockets reaching altitude levels exceeding 80 km. With the availability of V2 rockets used in space research, recording of EUV spectra started in 1946 using photographic films. The development of pointing devices to accurately orient the spectrographs toward the sun initiated intense activities in solar-terrestrial research. The application of photoelectric recording technology enabled the scientists placing EUV spectrometers aboard satellites observing qualitatively strong variability of the solar EUV irradiance on short-, medium-, and long-term scales. However, as more measurements were performed more radiometric EUV data diverged due to the inherent degradation of the EUV instruments with time. Also, continuous recording of the EUV energy input to the T/I system was not achieved. It is only at the end of the last century that there was progress made in solving the serious problem of degradation enabling to monitore solar EUV fluxes with sufficient radiometric accuracy. The data sets available allow composing the data available to the first set of EUV data covering a period of 11 years for the first time. Based on the sophisticated instrumentation verified in space, future EUV measurements of the solar spectral irradiance (SSI) are promising accuracy levels of about 5% and less. With added low-cost equipment, real-time measurements will allow providing data needed in ionospheric modeling, e.g., for correcting propagation delays of navigation signals from space to earth. Adding EUV airglow and auroral emission monitoring by airglow cameras, the impact of space weather on the terrestrial T/I system can be studied with a spectral terrestrial

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

NARCIS (Netherlands)

Huang, Qiushi; Medvedev, Viacheslav; van de Kruijs, Robbert Wilhelmus Elisabeth; Yakshin, Andrey; Louis, Eric; Bijkerk, Frederik

2017-01-01

Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV

Material design of negative-tone polyphenol resist for EUV and EB lithography

Science.gov (United States)

Kojima, Kyoko; Mori, Shigeki; Shiono, Daiju; Hada, Hideo; Onodera, Junichi

2007-03-01

In order to enable design of a negative-tone polyphenol resist using polarity-change reaction, five resist compounds (3M6C-MBSA-BLs) with different number of functional group of γ-hydroxycarboxyl acid were prepared and evaluated by EB lithography. The resist using mono-protected compound (3M6C-MBSA-BL1a) showed 40-nm hp resolution at an improved dose of 52 μC/cm2 probably due to removal of a non-protected polyphenol while the sensitivity of the resist using a compound of protected ratio of 1.1 on average with distribution of different protected ratio was 72 μC/cm2. For evaluation of the di-protected compound based resist, a di-protected polyphenol was synthesized by a newly developed synthetic route of 3-steps reaction, which is well-suited for mass production. The resist using di-protected compound (3M6C-MBSA-BL2b) also showed 40-nm hp resolution at a dose of 40 μC/cm2, which was faster than that of mono-protected resist. Fundamental EUV lithographic evaluation of the resist using 3M6C-MBSA-BL2b by an EUV open frame exposure tool (EUVES-7000) gave its estimated optimum sensitivity of 7 mJ/cm2 and a proof of fine development behavior without any swelling.

Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

Science.gov (United States)

Trost, M.; Schröder, S.; Lin, C. C.; Duparré, A.; Tünnermann, A.

2012-09-01

Optical components for the extreme ultraviolet (EUV) face stringent requirements for surface finish, because even small amounts of surface and interface roughness can cause significant scattering losses and impair image quality. In this paper, we investigate the roughness evolution of Mo/Si multilayers by analyzing the scattering behavior at a wavelength of 13.5 nm as well as taking atomic force microscopy (AFM) measurements before and after coating. Furthermore, a new approach to measure substrate roughness is presented, which is based on light scattering measurements at 405 nm. The high robustness and sensitivity to roughness of this method are illustrated using an EUV mask blank with a highspatial frequency roughness of as low as 0.04 nm.

Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications

Science.gov (United States)

Horne, Stephen F.; Gustafson, Deborah; Partlow, Matthew J.; Besen, Matthew M.; Smith, Donald K.; Blackborow, Paul A.

2011-04-01

Now that EUV lithography systems are beginning to ship into the fabs for next generation chips it is more critical that the EUV infrastructure developments are keeping pace. Energetiq Technology has been shipping the EQ-10 Electrodeless Z-pinch™ light source since 2005. The source is currently being used for metrology, mask inspection, and resist development. These applications require especially stable performance in both power and source size. Over the last 5 years Energetiq has made many source modifications which have included better thermal management as well as high pulse rate operation6. Recently we have further increased the system power handling and electrical pulse reproducibility. The impact of these modifications on source performance will be reported.

Reflectance Tuning at Extreme Ultraviolet (EUV) Wavelengths with Active Multilayer Mirrors

NARCIS (Netherlands)

Bayraktar, Muharrem; Lee, Christopher James; van Goor, F.A.; Koster, Gertjan; Rijnders, Augustinus J.H.M.; Bijkerk, Frederik

2011-01-01

At extreme ultraviolet (EUV) wavelengths the refractive power of transmission type optical components is limited, therefore reflective components are used. Reflective optics (multilayer mirrors) usually consist of many bilayers and each bilayer is composed of a high and a low refractive index

RapidNano: towards 20nm Particle Detection on EUV Mask Blanks

NARCIS (Netherlands)

Donck, J.C.J. van der; Bussink, P.G.W.; Fritz, E.C.; Walle, P. van der

2016-01-01

Cleanliness is a prerequisite for obtaining economically feasible yield levels in the semiconductor industry. For the next generation of lithographic equipment, EUV lithography, the size of yield-loss inducing particles for the masks will be smaller than 20 nm. Consequently, equipment for handling

Systematic study of ligand structures of metal oxide EUV nanoparticle photoresists

KAUST Repository

Jiang, Jing

2015-03-19

Ligand stabilized metal oxide nanoparticle resists are promising candidates for EUV lithography due to their high sensitivity for high-resolution patterning and high etching resistance. As ligand exchange is responsible for the patterning mechanism, we systematically studied the influence of ligand structures of metal oxide EUV nanoparticles on their sensitivity and dissolution behavior. ZrO2 nanoparticles were protected with various aromatic ligands with electron withdrawing and electron donating groups. These nanoparticles have lower sensitivity compared to those with aliphatic ligands suggesting the structures of these ligands is more important than their pka on resist sensitivity. The influence of ligand structure was further studied by comparing the nanoparticles’ solubility for a single type ligand to mixtures of ligands. The mixture of nanoparticles showed improved pattern quality. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Application of Laser Plasma Sources of Soft X-rays and Extreme Ultraviolet (EUV) in Imaging, Processing Materials and Photoionization Studies

Science.gov (United States)

Fiedorowicz, H.; Bartnik, A.; Wachulak, P. W.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Ahad, I. U.; Fok, T.; Szczurek, A.; Wȩgrzyński, Ł.

In the paper we present new applications of laser plasma sources of soft X-rays and extreme ultraviolet (EUV) in various areas of plasma physics, nanotechnology and biomedical engineering. The sources are based on a gas puff target irradiated with nanosecond laser pulses from commercial Nd: YAG lasers, generating pulses with time duration from 1 to 10 ns and energies from 0.5 to 10 J at a 10 Hz repetition rate. The targets are produced with the use of a double valve system equipped with a special nozzle to form a double-stream gas puff target which allows for high conversion efficiency of laser energy into soft X-rays and EUV without degradation of the nozzle. The sources are equipped with various optical systems to collect soft X-ray and EUV radiation and form the radiation beam. New applications of these sources in imaging, including EUV tomography and soft X-ray microscopy, processing of materials and photoionization studies are presented.

Spectroscopic modeling for tungsten EUV spectra

International Nuclear Information System (INIS)

Murakami, Izumi; Kato, Daiji; Sakaue, Hiroyuki A.; Suzuki, Chihiro; Morita, Shigeru; Goto, Motoshi; Sasaki, Akira; Nakamura, Nobuyuki; Yamamoto, Norimasa; Koike, Fumihiro

2014-01-01

We have constructed an atomic model for tungsten extreme ultraviolet (EUV) spectra to reconstruct characteristic spectral feature of unresolved transition array (UTA) observed at 4-7 nm for tungsten ions. In the tungsten atomic modeling, we considered fine-structure levels with the quantum principal number n up to 6 as the atomic structure and calculated the electron-impact collision cross sections by relativistic distorted-wave method, using HULLAC atomic code. We measured tungsten EUV spectra in Large Helical Device (LHD) and Compact Electron Beam Ion Trap device (CoBIT) and compared them with the model calculation. The model successfully explain series of emission peaks at 1.5-3.5 nm as n=5-4 and 6-4 transitions of W"2"4"+ - W"3"2"+ measured in CoBIT and LHD and the charge state distributions were estimated for LHD plasma. The UTA feature observed at 4-7 nm was also successfully reconstructed with our model. The peak at ∼5 nm is produced mainly by many 4f-4d transition of W"2"2"+ - W"3"5"+ ions, and the second peak at ∼6 nm is produced by 4f-4d transition of W"2"5"+ - W"2"8"+ ions, and 4d-4p inner-shell transitions, 4p"54d"n"+"1 - 4p"64d"n, of W"2"9"+ - W"3"5"+ ions. These 4d-4p inner-shell transitions become strong since we included higher excited states such as 4p"54d"n4f state, which ADAS atomic data set does not include for spectroscopic modeling with fine structure levels. (author)

Determination of line profiles on nano-structured surfaces using EUV and x-ray scattering

Science.gov (United States)

Soltwisch, Victor; Wernecke, Jan; Haase, Anton; Probst, Jürgen; Schoengen, Max; Krumrey, Michael; Scholze, Frank; Pomplun, Jan; Burger, Sven

2014-09-01

Non-imaging techniques like X-ray scattering are supposed to play an important role in the further development of CD metrology for the semiconductor industry. Grazing Incidence Small Angle X-ray Scattering (GISAXS) provides directly assessable information on structure roughness and long-range periodic perturbations. The disadvantage of the method is the large footprint of the X-ray beam on the sample due to the extremely shallow angle of incidence. This can be overcome by using wavelengths in the extreme ultraviolet (EUV) spectral range, EUV small angle scattering (EUVSAS), which allows for much steeper angles of incidence but preserves the range of momentum transfer that can be observed. Generally, the potentially higher momentum transfer at shorter wavelengths is counterbalanced by decreasing diffraction efficiency. This results in a practical limit of about 10 nm pitch for which it is possible to observe at least the +/- 1st diffraction orders with reasonable efficiency. At the Physikalisch-Technische Bundesanstalt (PTB), the available photon energy range extends from 50 eV up to 10 keV at two adjacent beamlines. PTB commissioned a new versatile Ellipso-Scatterometer which is capable of measuring 6" square substrates in a clean, hydrocarbon-free environment with full flexibility regarding the direction of the incident light polarization. The reconstruction of line profiles using a geometrical model with six free parameters, based on a finite element method (FEM) Maxwell solver and a particle swarm based least-squares optimization yielded consistent results for EUV-SAS and GISAXS. In this contribution we present scatterometry data for line gratings and consistent reconstruction results of the line geometry for EUV-SAS and GISAXS.

Solar wind acceleration in a prescribed flow geometry

International Nuclear Information System (INIS)

Biernat, H.; Koemle, N.; Lichtenegger, H.

1985-01-01

It is known that the flow tubes above coronal holes diverge stronger than radial and that the magnetic field lines may be considerably curved near the border of the holes. The authors investigate the consequences of such a magnetic field geometry on the flow of the solar wind plasma in the vicinity of the Sun. For this purpose the one-dimensional conservation equations are solved along prescribed flow tubes. A temperature profile based on observational data (EUV rocket-observations) is used in the calculations. In an alternative approach the temperature is determined by a polytropic index, which is assumed to be variable. The authors study how both curvature and non-radial divergence of the flow tubes modify the velocity, the density, and the energy balance of the solar wind plasma. (Auth.)

Observations and predictions of EUV emission from classical novae

International Nuclear Information System (INIS)

Starrfield, S.; Truran, J.W.; Sparks, W.M.; Krautter, J.

1989-01-01

Theoretical modeling of novae in outburst predicts that they should be active emitters of radiation both in the EUV and soft X-ray wavelengths twice during the outburst. The first time is very early in the outburst when only an all sky survey can detect them. This period lasts only a few hours. They again become bright EUV and soft X-ray emitters late in the outburst when the remnant object becomes very hot and is still luminous. The predictions imply both that a nova can remain very hot for months to years and that the peak temperature at this time strongly depends upon the mass of the white dwarf. It is important to observe novae at these late times because a measurement of both the flux and temperature can provide information about the mass of the white dwarf, the tun-off time scale, and the energy budget of the outburst. We review the existing observations of novae in late stages of their outburst and present some newly obtained data for GQ Mus 1983. We then provide results of new hydrodynamic simulations of novae in outburst and compare the predictions to the observations. 43 refs., 6 figs

Study of crystalline thin films and nanofibers by means of the laser–plasma EUV-source based microscopy

International Nuclear Information System (INIS)

Wachulak, P.W.; Bartnik, A.; Baranowska-Korczyc, A.; Pánek, D.; Brůža, P.; Kostecki, J.; Węgrzyński, Ł.; Jarocki, R.; Szczurek, M.; Fronc, K.; Elbaum, D.; Fiedorowicz, H.

2013-01-01

New developments in nanoscience and nanotechnology require nanometer scale resolution imaging tools and techniques such as an extreme ultraviolet (EUV) and soft X-ray (SXR) microscopy, based on Fresnel zone plates. In this paper, we report on applications of a desk-top microscopy using a laser-plasma EUV source based on a gas-puff target for studies of morphology of thin silicon membranes coated with NaCl crystals and samples composed of ZnO nanofibers

EUV soft X-ray characterization of a FEL multilayer optics damaged by multiple shot laser beam

International Nuclear Information System (INIS)

Giglia, A.; Mahne, N.; Bianco, A.; Svetina, C.; Nannarone, S.

2011-01-01

We have investigated the damaging effects of a femtosecond pulsed laser beam with 400 nm wavelength on a Mo/Si EUV multilayer. The exposures have been done in vacuum with multiple pulses (5 pulses/mm 2 ) of 120 fs varying the laser fluence in the 38-195 mJ/cm 2 range. The analysis of the different irradiated regions has been performed ex-situ by means of different techniques, including specular and diffuse reflectivity, X-ray photoemission spectroscopy (XPS) and total electron yield (TEY) in the EUV and soft X-ray range. Surface images have been acquired by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Results clearly indicate a progressive degradation of the EUV multilayer performances with the increase of the laser fluence. Spectroscopic analysis allowed to correlate the decrease of reflectivity with the degradation of the multilayer stacking, ascribed to Mo-Si intermixing at the Mo/Si interfaces of the first layers, close to the surface of the mirror.

Efficient analysis of three dimensional EUV mask induced imaging artifacts using the waveguide decomposition method

Science.gov (United States)

Shao, Feng; Evanschitzky, Peter; Fühner, Tim; Erdmann, Andreas

2009-10-01

This paper employs the Waveguide decomposition method as an efficient rigorous electromagnetic field (EMF) solver to investigate three dimensional mask-induced imaging artifacts in EUV lithography. The major mask diffraction induced imaging artifacts are first identified by applying the Zernike analysis of the mask nearfield spectrum of 2D lines/spaces. Three dimensional mask features like 22nm semidense/dense contacts/posts, isolated elbows and line-ends are then investigated in terms of lithographic results. After that, the 3D mask-induced imaging artifacts such as feature orientation dependent best focus shift, process window asymmetries, and other aberration-like phenomena are explored for the studied mask features. The simulation results can help lithographers to understand the reasons of EUV-specific imaging artifacts and to devise illumination and feature dependent strategies for their compensation in the optical proximity correction (OPC) for EUV masks. At last, an efficient approach using the Zernike analysis together with the Waveguide decomposition technique is proposed to characterize the impact of mask properties for the future OPC process.

A serendipitous observation of the gamma-ray burst GRB 921013b field with EUVE

DEFF Research Database (Denmark)

Castro-Tirado, A.J.; Gorosabel, J.; Bowyer, S.

1999-01-01

hours after the burst is 1.8 x10(-16) erg s(-1) cm(-2) after correction for absorption by the Galactic interstellar medium. Even if we exclude an intrinsic absorption, this is well below the detection limit of the EUVE measurement. Although it is widely accepted that gamma-ray bursts are at cosmological......We report a serendipitous extreme ultraviolet observation by EUVE of the field containing GRB 921013b, similar to 11 hours after its occurrence. This burst was detected on 1992 October 13 by the WATCH and PHEBUS on Granat, and by the GRB experiment on Ulysses. The lack of any transient (or...

Absolute dimensions and evolutionary status of UW CMa

International Nuclear Information System (INIS)

Parthasarathy, M.

1978-01-01

Photoelectric B and V light curves of close binary system UW Canis Majoris (08.5 If + O-B) are analysed. Combining the photoelectric elements and the spectroscopic orbit absolute dimensions of the system are determined. The mass of the bright primary (08.5 If) component is found to be 19.3 solar masses and that of the faint secondary to be 23.2 solar masses. The primary has filled the Roche lobe and it is 1 to 2 mag over-luminous for its mass. The massive secondary component is most likely a main sequence star. Comparison with the theoretical evolutionary models of massive close binary systems undergoing case A of mass exchange indicate that UW CMa is close to the contact stage of evolution. (author)

Evaluation of EUV resist performance using interference lithography

Science.gov (United States)

Buitrago, E.; Yildirim, O.; Verspaget, C.; Tsugama, N.; Hoefnagels, R.; Rispens, G.; Ekinci, Y.

2015-03-01

Extreme ultraviolet lithography (EUVL) stands as the most promising solution for the fabrication of future technology nodes in the semiconductor industry. Nonetheless, the successful introduction of EUVL into the extremely competitive and stringent high-volume manufacturing (HVM) phase remains uncertain partly because of the still limiting performance of EUV resists below 16 nm half-pitch (HP) resolution. Particularly, there exists a trade-off relationship between resolution (half-pitch), sensitivity (dose) and line-edge roughness (LER) that can be achieved with existing materials. This trade-off ultimately hampers their performance and extendibility towards future technology nodes. Here we present a comparative study of highly promising chemically amplified resists (CARs) that have been evaluated using the EUV interference lithography (EUV-IL) tool at the Swiss Light Source (SLS) synchrotron facility in the Paul Scherrer Institute (PSI). In this study we have focused on the performance qualification of different resists mainly for 18 nm and 16 nm half-pitch line/space resolution (L/S = 1:1). Among the most promising candidates tested, there are a few choices that allow for 16 nm HP resolution to be achieved with high exposure latitude (up to ~ 33%), low LER (down to 3.3 nm or ~ 20% of critical dimension CD) and low dose-to-size (or best-energy, BE) < 41 mJ/cm2 values. Patterning was even demonstrated down to 12 nm HP with one of CARs (R1UL1) evaluated for their extendibility beyond the 16 nm HP resolution. 11 nm HP patterning with some pattern collapse and well resolved patterns down 12 nm were also demonstrated with another CAR (R15UL1) formulated for 16 nm HP resolution and below. With such resist it was possible even to obtain a small process window for 14 nm HP processing with an EL ~ 8% (BE ~ 37 mJ/cm2, LER ~ 4.5 nm). Though encouraging, fulfilling all of the requirements necessary for high volume production, such as high resolution, low LER, high photon

Feasibility of compensating for EUV field edge effects through OPC

Science.gov (United States)

Maloney, Chris; Word, James; Fenger, Germain L.; Niroomand, Ardavan; Lorusso, Gian F.; Jonckheere, Rik; Hendrickx, Eric; Smith, Bruce W.

2014-04-01

As EUV Lithography (EUVL) continues to evolve, it offers a possible solution to the problems of additional masks and lithography steps that drive up the cost and complexity of 193i multiple patterning. EUVL requires a non-telecentric reflective optical system for operation. This requirement causes EUV specific effects such as shadowing. The absorber physically shadows the reflective multilayer (ML) on an EUV reticle resulting in pattern fidelity degradation. To reduce this degradation, a thinner absorber may help. Yet, as the absorber thickness decreases, reflectivity increases in the `dark' region around the image field, resulting in a loss of contrast. The region around the edge of the die on the mask of unpatterned absorber material deposited on top of ML, known as the image border, is also susceptible to undesirable reflections in an ideally dark region. For EUVL to be enabled for high-volume manufacturing (HVM), reticle masking (REMA) blades are used to shield light from the image border to allow for the printing of densely spaced die. When die are printed densely, the image border of each neighboring die will overlap with the edge of a given die resulting in an increase of dose that overexposes features at the edge of the field. This effect is convolved with a fingerprint from the edge of the REMA blades. This phenomenon will be referred to as a field edge effect. One such mitigation strategy that has been investigated to reduce the field edge effect is to fully remove the ML along the image border to ensure that no actinic-EUV radiation can be reflected onto neighboring die. This has proven to suppress the effect, but residual out-of-band radiation still provides additional dose to features near the image border, especially in the corners where three neighboring fields overlap. Measurements of dense contact holes (CHs) have been made along the image border with and without a ML-etched border at IMEC in collaboration with Micron using the ASML NXE:3100. The

PHOTOSPHERIC PROPERTIES OF WARM EUV LOOPS AND HOT X-RAY LOOPS

Energy Technology Data Exchange (ETDEWEB)

Kano, R. [National Astronomical Observatory of Japan, 2-21-1 Osawa, Mitaka, Tokyo 181-8588 (Japan); Ueda, K. [Department of Astronomy, Graduate School of Science, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033 (Japan); Tsuneta, S., E-mail: ryouhei.kano@nao.ac.jp [Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, 3-1-1 Yoshinodai, Chuo, Sagamihara, Kanagawa 252-5210 (Japan)

2014-02-20

We investigate the photospheric properties (vector magnetic fields and horizontal velocity) of a well-developed active region, NOAA AR 10978, using the Hinode Solar Optical Telescope specifically to determine what gives rise to the temperature difference between ''warm loops'' (1-2 MK), which are coronal loops observed in EUV wavelengths, and ''hot loops'' (>3 MK), coronal loops observed in X-rays. We found that outside sunspots, the magnetic filling factor in the solar network varies with location and is anti-correlated with the horizontal random velocity. If we accept that the observed magnetic features consist of unresolved magnetic flux tubes, this anti-correlation can be explained by the ensemble average of flux-tube motion driven by small-scale random flows. The observed data are consistent with a flux tube width of ∼77 km and horizontal flow at ∼2.6 km s{sup –1} with a spatial scale of ∼120 km. We also found that outside sunspots, there is no significant difference between warm and hot loops either in the magnetic properties (except for the inclination) or in the horizontal random velocity at their footpoints, which are identified with the Hinode X-Ray Telescope and the Transition Region and Coronal Explorer. The energy flux injected into the coronal loops by the observed photospheric motion of the magnetic fields is estimated to be 2 × 10{sup 6} erg s{sup –1} cm{sup –2}, which is the same for both warm and hot loops. This suggests that coronal properties (e.g., loop length) play a more important role in giving rise to temperature differences of active-region coronal loops than photospheric parameters.

Solar activity monitoring and forecasting capabilities at Big Bear Solar Observatory

Directory of Open Access Journals (Sweden)

P. T. Gallagher

2002-07-01

Full Text Available The availability of full-disk, high-resolution Ha images from Big Bear Solar Observatory (USA, Kanzelhöhe Solar Observatory (Austria, and Yunnan Astronomical Observatory (China allows for the continual monitoring of solar activity with unprecedented spatial and temporal resolution. Typically, this Global Ha Network (GHN provides almost uninterrupted Ha images with a cadence of 1 min and an image scale of 1'' per pixel.  Every hour, GHN images are transferred to the web-based BBSO Active Region Monitor (ARM; www.bbso.njit.edu/arm, which includes the most recent EUV, continuum, and magnetogram data from the Solar and Heliospheric Observatory, together with magnetograms from the Global Oscillation Network Group. ARM also includes a variety of active region properties from the National Oceanic and Atmospheric Administration’s Space Environment Center, such as up-to-date active region positions, GOES 5-min X-ray data, and flare identification. Stokes I, V, Q, and U images are available from the recently operational BBSO Digital Vector Magnetograph and the Vector Magnetograph at the Huairou Solar Observing Station of Beijing Observatory. Vector magnetograms provide complete information on the photospheric magnetic field, and allow for magnetic flux gradients, electric currents, and shear forces to be calculated: these measurements are extremely sensitive to conditions resulting in flaring activity. Furthermore, we have developed a Flare Prediction System which estimates the probability for each region to produce C-, M-, or X-class flares based on nearly eight years of NOAA data from cycle 22. This, in addition to BBSO’s daily solar activity reports, has proven a useful resource for activity forecasting.Key words. Solar physics, astronomy and astrophysics (flares and mass ejections; instruments and techniques; photosphere and chromosphere

Variations in ion and neutral composition at Venus - Evidence of solar control of the formation of the predawn bulges in H/+/ and He1

Science.gov (United States)

Taylor, H. A., Jr.; Mayr, H.; Brinton, H.; Niemann, H.; Hartle, R.; Daniell, R. E., Jr.

1982-01-01

A comparison of ion and neutral composition measurements at Venus for periods of greatly different solar activity provides qualitative evidence of solar control of the day-to-night transport of light ion and neutral species. Concentrations of H(+) and He in the predawn bulge near solar maximum in November, 1979, exhibit a depletion signature correlated with a pronounced modulation in the solar F10.7 and EUV fluxes. This perturbation, not observed in the predawn region during an earlier period of relative quiet solar conditions, is interpreted as resulting from pronounced changes in solar heating and photoionization on the dayside, which in turn modulate the transport of ions and neutrals into the bulge region.

Characteristics of EIT Dimmings in Solar Eruptions

Science.gov (United States)

Adams, Mitzi; Sterling, A. C.

2006-01-01

Intensity "dimmings" in coronal images are a key feature of solar eruptions. Such dimmings are likely the source locations for much of the material expelled in coronal mass ejections (CMEs). Characteristics such as the timing of the dimmings with respect to the onset of other eruption signatures, and the location of the dimmings in the context of the magnetic field environment of the erupting region, are indicative of the mechanism leading to the eruption. We examine dimmings of six eruptions in images from the EUV Imaging Telescope (EIT) on SOHO, along with supplementary soft X-ray (SXR) data from GOES and the SXR Telescope (SXT) on Yohkoh. We examine the timing of the dimming onset and compare with the time of EUV and SXR brightening and determine the timescale for the recovery from dimming for each event. With line-of-sight photospheric magnetograms from the MDI instrument on SOHO, we determine the magnetic structure of the erupting regions and the locations of the dimmings in those regions. From our analysis we consider which mechanism likely triggered each eruption: internal tether cutting, external tether cutting ("breakout"), loss of equilibrium, or some other mechanism.

Temporal dynamics of sand dune bidirectional reflectance characteristics for absolute radiometric calibration of optical remote sensing data

Science.gov (United States)

Coburn, Craig A.; Logie, Gordon S. J.

2018-01-01

Attempts to use pseudoinvariant calibration sites (PICS) for establishing absolute radiometric calibration of Earth observation (EO) satellites requires high-quality information about the nature of the bidirectional reflectance distribution function (BRDF) of the surfaces used for these calibrations. Past studies have shown that the PICS method is useful for evaluating the trend of sensors over time or for the intercalibration of sensors. The PICS method was not considered until recently for deriving absolute radiometric calibration. This paper presents BRDF data collected by a high-performance portable goniometer system to develop a temporal BRDF model for the Algodones Dunes in California. By sampling the BRDF of the sand surface at similar solar zenith angles to those normally encountered by EO satellites, additional information on the changing nature of the surface can improve models used to provide absolute radiometric correction. The results demonstrated that the BRDF of a reasonably simple sand surface was complex with changes in anisotropy taking place in response to changing solar zenith angles. For the majority of observation and illumination angles, the spectral reflectance anisotropy observed varied between 1% and 5% in patterns that repeat around solar noon.

Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon

International Nuclear Information System (INIS)

Carman, R J; Kane, D M; Ward, B K

2010-01-01

The electrical and optical characteristics of a dielectric barrier discharge (DBD) based neon excimer lamp generating output in the extreme ultraviolet (EUV) spectral range (λ = 84 nm) have been investigated experimentally. We report a detailed comparison of lamp performance for both pulsed and sinusoidal voltage excitation waveforms, using otherwise identical operating conditions. The results show that pulsed voltage excitation yields a ∼50% increase in the overall electrical to EUV conversion efficiency compared with sinusoidal waveforms, when operating in the pressure range 500-900 mbar. Pulsed operation allows greater control of parameters associated with the temporal evolution of the EUV pulse shapes (risetime, instantaneous peak power). The Ne DBD based source is also found to be highly monochromatic with respect to its spectral output from the second continuum band at λ ∼ 84 nm (5 nm FWHM). This continuum band dominates the spectral emission over the wavelength range 30-550 nm. Lamp performance; as measured by the overall EUV output energy, electrical to EUV conversion efficiency and spectral purity at λ ∼ 84 nm; improves with increasing gas pressure up to p = 900 mbar.

Solar variability observed through changes in solar figure and mean diameter

International Nuclear Information System (INIS)

Hill, H.A.

1984-01-01

The objective of the project is to detect and monitor climatically significant solar variability by accurate monitoring of the associated variability in solar shape and diameter. The observing program for this project was initiated in 1981. Solar diameter measurements have been taken and data reduction programs for these measurements have been developed. Theoretical analysis of the expected change in the intensity from the solar atmosphere to a given mechanial driving has progressed to the extent that changes in the solar diameter can be related to the associated change in the solar luminosity. An absolute calibration system for the telescope has been constructed and is currently being tested. A proposal is made for the continuation of the work in each of these areas

Global Energetics of Solar Flares. VI. Refined Energetics of Coronal Mass Ejections

Science.gov (United States)

Aschwanden, Markus J.

2017-09-01

In this study, we refine the coronal mass ejection (CME) model that was presented in an earlier study of the global energetics of solar flares and associated CMEs and apply it to all (860) GOES M- and X-class flare events observed during the first seven years (2010-2016) of the Solar Dynamics Observatory (SDO) mission. The model refinements include (1) the CME geometry in terms of a 3D volume undergoing self-similar adiabatic expansion, (2) the solar gravitational deceleration during the propagation of the CME, which discriminates between eruptive and confined CMEs, (3) a self-consistent relationship between the CME center-of-mass motion detected during EUV dimming and the leading-edge motion observed in white-light coronagraphs, (4) the equipartition of the CME’s kinetic and thermal energies, and (5) the Rosner-Tucker-Vaiana scaling law. The refined CME model is entirely based on EUV-dimming observations (using Atmospheric Imager Assembly (AIA)/SDO data) and complements the traditional white-light scattering model (using Large-Angle and Spectrometric Coronagraph Experiment (LASCO)/Solar and Heliospheric Observatory data), and both models are independently capable of determining fundamental CME parameters. Comparing the two methods, we find that (1) LASCO is less sensitive than AIA in detecting CMEs (in 24% of the cases), (2) CME masses below {m}{cme}≲ {10}14 g are underestimated by LASCO, (3) AIA and LASCO masses, speeds, and energies agree closely in the statistical mean after the elimination of outliers, and (4) the CME parameters speed v, emission measure-weighted flare peak temperature T e , and length scale L are consistent with the following scaling laws: v\\propto {T}e1/2, v\\propto {({m}{cme})}1/4, and {m}{cme}\\propto {L}2.

Absolute limit on rotation of gravitationally bound stars

Science.gov (United States)

Glendenning, N. K.

1994-03-01

The authors seek an absolute limit on the rotational period for a neutron star as a function of its mass, based on the minimal constraints imposed by Einstein's theory of relativity, Le Chatelier's principle, causality, and a low-density equation of state, uncertainties which can be evaluated as to their effect on the result. This establishes a limiting curve in the mass-period plane below which no pulsar that is a neutron star can lie. For example, the minimum possible Kepler period, which is an absolute limit on rotation below which mass-shedding would occur, is 0.33 ms for a M = 1.442 solar mass neutron star (the mass of PSR1913+16). If the limit were found to be broken by any pulsar, it would signal that the confined hadronic phase of ordinary nucleons and nuclei is only metastable.

Transient flows of the solar wind associated with small-scale solar activity in solar minimum

Science.gov (United States)

Slemzin, Vladimir; Veselovsky, Igor; Kuzin, Sergey; Gburek, Szymon; Ulyanov, Artyom; Kirichenko, Alexey; Shugay, Yulia; Goryaev, Farid

The data obtained by the modern high sensitive EUV-XUV telescopes and photometers such as CORONAS-Photon/TESIS and SPHINX, STEREO/EUVI, PROBA2/SWAP, SDO/AIA provide good possibilities for studying small-scale solar activity (SSA), which is supposed to play an important role in heating of the corona and producing transient flows of the solar wind. During the recent unusually weak solar minimum, a large number of SSA events, such as week solar flares, small CMEs and CME-like flows were observed and recorded in the databases of flares (STEREO, SWAP, SPHINX) and CMEs (LASCO, CACTUS). On the other hand, the solar wind data obtained in this period by ACE, Wind, STEREO contain signatures of transient ICME-like structures which have shorter duration (<10h), weaker magnetic field strength (<10 nT) and lower proton temperature than usual ICMEs. To verify the assumption that ICME-like transients may be associated with the SSA events we investigated the number of weak flares of C-class and lower detected by SPHINX in 2009 and STEREO/EUVI in 2010. The flares were classified on temperature and emission measure using the diagnostic means of SPHINX and Hinode/EIS and were confronted with the parameters of the solar wind (velocity, density, ion composition and temperature, magnetic field, pitch angle distribution of the suprathermal electrons). The outflows of plasma associated with the flares were identified by their coronal signatures - CMEs (only in few cases) and dimmings. It was found that the mean parameters of the solar wind projected to the source surface for the times of the studied flares were typical for the ICME-like transients. The results support the suggestion that weak flares can be indicators of sources of transient plasma flows contributing to the slow solar wind at solar minimum, although these flows may be too weak to be considered as separate CMEs and ICMEs. The research leading to these results has received funding from the European Union’s Seventh Programme

Optimized qualification protocol on particle cleanliness for EUV mask infrastructure

Science.gov (United States)

van der Donck, J. C. J.; Stortelder, J. K.; Derksen, G. B.

2011-11-01

With the market introduction of the NXE:3100, Extreme Ultra Violet Lithography (EUVL) enters a new stage. Now infrastructure in the wafer fabs must be prepared for new processes and new materials. Especially the infrastructure for masks poses a challenge. Because of the absence of a pellicle reticle front sides are exceptionally vulnerable to particles. It was also shown that particles on the backside of a reticle may cause tool down time. These effects set extreme requirements to the cleanliness level of the fab infrastructure for EUV masks. The cost of EUV masks justifies the use of equipment that is qualified on particle cleanliness. Until now equipment qualification on particle cleanliness have not been carried out with statistically based qualification procedures. Since we are dealing with extreme clean equipment the number of observed particles is expected to be very low. These particle levels can only be measured by repetitively cycling a mask substrate in the equipment. Recent work in the EUV AD-tool presents data on added particles during load/unload cycles, reported as number of Particles per Reticle Pass (PRP). In the interpretation of the data, variation by deposition statistics is not taken into account. In measurements with low numbers of added particles the standard deviation in PRP number can be large. An additional issue is that particles which are added in the routing outside the equipment may have a large impact on the testing result. The number mismatch between a single handling step outside the tool and the multiple cycling in the equipment makes accuracy of measurements rather complex. The low number of expected particles, the large variation in results and the combined effect of added particles inside and outside the equipment justifies putting good effort in making a test plan. Without a proper statistical background, tests may not be suitable for proving that equipment qualifies for the limiting cleanliness levels. Other risks are that a

Embedded top-coat for reducing the effect out of band radiation in EUV lithography

Science.gov (United States)

Du, Ke; Siauw, Meiliana; Valade, David; Jasieniak, Marek; Voelcker, Nico; Trefonas, Peter; Thackeray, Jim; Blakey, Idriss; Whittaker, Andrew

2017-03-01

Out of band (OOB) radiation from the EUV source has significant implications for the performance of EUVL photoresists. Here we introduce a surface-active polymer additive, capable of partitioning to the top of the resist film during casting and annealing, to protect the underlying photoresist from OOB radiation. Copolymers were prepared using reversible addition-fragmentation chain transfer (RAFT) polymerization, and rendered surface active by chain extension with a block of fluoro-monomer. Films were prepared from the EUV resist with added surface-active Embedded Barrier Layer (EBL), and characterized using measurements of contact angles and spectroscopic ellipsometry. Finally, the lithographic performance of the resist containing the EBL was evaluated using Electron Beam Lithography exposure

TIME DELAYS IN QUASI-PERIODIC PULSATIONS OBSERVED DURING THE X2.2 SOLAR FLARE ON 2011 FEBRUARY 15

Energy Technology Data Exchange (ETDEWEB)

Dolla, L.; Marque, C.; Seaton, D. B.; Dominique, M.; Berghmans, D.; Cabanas, C.; De Groof, A.; Verdini, A.; West, M. J.; Zhukov, A. N. [Solar-Terrestrial Center of Excellence, Royal Observatory of Belgium, Avenue Circulaire 3, B-1180 Brussels (Belgium); Van Doorsselaere, T. [Centrum voor Plasma-Astrofysica, Department of Mathematics, KULeuven, Celestijnenlaan 200B bus 2400, B-3001 Leuven (Belgium); Schmutz, W. [Physikalisch-Meteorologisches Observatorium Davos, World Radiation Center, Davos Dorf (Switzerland); Zender, J., E-mail: dolla@sidc.be [European Space Agency, ESTEC, Keplerlaan 1, 2201 AZ Noordwijk (Netherlands)

2012-04-10

We report observations of quasi-periodic pulsations (QPPs) during the X2.2 flare of 2011 February 15, observed simultaneously in several wavebands. We focus on fluctuations on timescale 1-30 s and find different time lags between different wavebands. During the impulsive phase, the Reuven Ramaty High Energy Solar Spectroscopic Imager channels in the range 25-100 keV lead all the other channels. They are followed by the Nobeyama RadioPolarimeters at 9 and 17 GHz and the extreme-ultraviolet (EUV) channels of the Euv SpectroPhotometer (ESP) on board the Solar Dynamic Observatory. The zirconium and aluminum filter channels of the Large Yield Radiometer on board the Project for On-Board Autonomy satellite and the soft X-ray (SXR) channel of ESP follow. The largest lags occur in observations from the Geostationary Operational Environmental Satellite, where the channel at 1-8 A leads the 0.5-4 A channel by several seconds. The time lags between the first and last channels is up to Almost-Equal-To 9 s. We identified at least two distinct time intervals during the flare impulsive phase, during which the QPPs were associated with two different sources in the Nobeyama RadioHeliograph at 17 GHz. The radio as well as the hard X-ray channels showed different lags during these two intervals. To our knowledge, this is the first time that time lags are reported between EUV and SXR fluctuations on these timescales. We discuss possible emission mechanisms and interpretations, including flare electron trapping.

Stellar and Laboratory XUV/EUV Line Ratios in Fe XVIII and Fe XIX

Science.gov (United States)

Träbert, Elmar; Beiersdorfer, P.; Clementson, J.

2011-09-01

A so-called XUV excess has been suspected with the relative fluxes of Fe XVIII and Fe XIX lines in XUV and EUV spectra of the star Capella as observed by the Chandra spacecraft [1] when comparing the observations with simulations of stellar spectra based on APEC or FAC. We have addressed this problem by laboratory studies using the Livermore electron beam ion trap (EBIT). Our understanding of the EBIT spectrum is founded on work by Brown et al. [2]. The electron density of the electron beam in an EBIT is compatible to the density in energetic stellar flares. In our experiments, the relative detection efficiencies of two flat-field grating spectrographs operating in the EUV (near 100 Å) and XUV (near 16 Å) ranges have been determined using the calculated branching ratio of 1-3 and 2-3 transition in the H-like spectrum O VIII. FAC calculations assuming several electron beam energies and electron densities serve to correct the EBIT observations for the Maxwellian excitation in a natural plasma. In the EUV, the line intensity pattern predicted by FAC agrees reasonably well with the laboratory and Capella observations. In the XUV wavelength range, agreement of laboratory and astrophysical line intensities is patchy. The spectral simulation results from FAC are much closer to stellar and laboratory observation than those obtained by APEC. Instead of claiming an XUV excess, the XUV/EUV line intensities can be explained by a somewhat higher temperature of Capella than the previously assumed T=6 MK. This work was performed under the auspices of the USDoE by LLNL under Contract DE-AC52-07NA27344 and was supported by the NASA under work order NNH07AF81I issued by the APRA Program. E.T. acknowledges support by DFG Germany. 1. P. Desai et al., ApJ 625, L59 (2005). 2. G. V. Brown et al., ApJS 140, 589 (2002).

EUV emission stimulated by use of dual laser pulses from continus liquid microjet targets

Science.gov (United States)

Higashiguchi, Takeshi; Rajyaguru, Chirag; Sasaki, Wataru; Kubodera, Shoichi

2004-11-01

A continuous water-jet or water-jet mixed with LiF with several tens μm diameter was formed in a vacuum chamber through a small capillary nozzle. Usage of two laser pulses is an efficient way to produce EUV emission, since a density and temperature of a plasma formed by the first laser pulse are regulated by the second laser pulse. By adjusting the delay of the second pulse, one could maximize the EUV emission. A subpicosecond Ti:Sapphire laser at a wavelength of 800 nm produced a maximum energy around 30 mJ. The beam was divided by a Michelson interferometer, which produced two laser pulses with energies of 5 mJ. The pulse duration was adjusted around 300 fs (FWHM). Both beams were focused on a micro-jet using a lens with a focal length of 15 cm. The delay time between the two pulses was varied from 100 to 800 ps by use of an optical delay line. Clear enhancement of the EUV emission yield was observed when the delay between the two pulses was around 500 ps. The experimentally observed delay agrees reasonably well with that of a plasma to expand to its critical density of 10^21 cm-3.

Detection of Three-minute Oscillations in Full-disk Ly α Emission during a Solar Flare

Energy Technology Data Exchange (ETDEWEB)

Milligan, Ryan O.; Fletcher, Lyndsay [SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow, G12 8QQ (United Kingdom); Fleck, Bernhard [ESA Directorate of Science, Operations Department, c/o NASA/GSFC Code 671, Greenbelt, MD 20071 (United States); Ireland, Jack; Dennis, Brian R. [Solar Physics Laboratory (Code 671), Heliophysics Science Division, NASA Goddard Space Flight Center, Greenbelt, MD 20771 (United States)

2017-10-10

In this Letter we report the detection of chromospheric 3-minute oscillations in disk-integrated EUV irradiance observations during a solar flare. A wavelet analysis of detrended Ly α (from GOES /EUVS) and Lyman continuum (from Solar Dynamics Observatory ( SDO )/EVE) emission from the 2011 February 15 X-class flare (SOL2011-02-15T01:56) revealed a ∼3 minute period present during the flare’s main phase. The formation temperature of this emission locates this radiation at the flare’s chromospheric footpoints, and similar behavior is found in the SDO /Atmospheric Imaging Assembly 1600 and 1700 Å channels, which are dominated by chromospheric continuum. The implication is that the chromosphere responds dynamically at its acoustic cutoff frequency to an impulsive injection of energy. Since the 3-minute period was not found at hard X-ray (HXR) energies (50–100 keV) in Reuven Ramaty High Energy Solar Spectroscopic Imager data we can state that this 3-minute oscillation does not depend on the rate of energization of non-thermal electrons. However, a second period of 120 s found in both HXR and chromospheric lightcurves is consistent with episodic electron energization on 2-minute timescales. Our finding on the 3-minute oscillation suggests that chromospheric mechanical energy should be included in the flare energy budget, and the fluctuations in the Ly α line may influence the composition and dynamics of planetary atmospheres during periods of high activity.

Free electron lasers for 13nm EUV lithography: RF design strategies to minimise investment and operational costs

Science.gov (United States)

Keens, Simon; Rossa, Bernhard; Frei, Marcel

2016-03-01

As the semiconductor industry proceeds to develop ever better sources of extreme ultraviolet (EUV) light for photolithography applications, two distinct technologies have come to prominence: Tin-plasma and free electron laser (FEL) sources. Tin plasma sources have been in development within the industry for many years, and have been widely reported. Meanwhile, FELs represent the most promising alternative to create high power EUV frequencies and, while tin-plasma source development has been ongoing, such lasers have been continuously developed by academic institutions for use in fundamental research programmes in conjunction with universities and national scientific institutions. This paper follows developments in the field of academic FELs, and presents information regarding novel technologies, specifically in the area of RF design strategy, that may be incorporated into future industrial FEL systems for EUV lithography in order to minimize the necessary investment and operational costs. It goes on to try to assess the cost-benefit of an alternate RF design strategy, based upon previous studies.

Broadband transmission grating spectrometer for measuring the emission spectrum of EUV sources

NARCIS (Netherlands)

Bayraktar, Muharrem; Bastiaens, Hubertus M.J.; Bruineman, Caspar; Vratzov, Boris; Bijkerk, Frederik

2016-01-01

Extreme ultraviolet (EUV) light sources and their optimization for emission within a narrow wavelength band are essential in applications such as photolithography. Most light sources however also emit radiation outside this wavelength band and have a spectrum extending up to deep ultraviolet (DUV)

SOLAR-ISS: A new reference spectrum based on SOLAR/SOLSPEC observations

Science.gov (United States)

Meftah, M.; Damé, L.; Bolsée, D.; Hauchecorne, A.; Pereira, N.; Sluse, D.; Cessateur, G.; Irbah, A.; Bureau, J.; Weber, M.; Bramstedt, K.; Hilbig, T.; Thiéblemont, R.; Marchand, M.; Lefèvre, F.; Sarkissian, A.; Bekki, S.

2018-03-01

Context. Since April 5, 2008 and up to February 15, 2017, the SOLar SPECtrometer (SOLSPEC) instrument of the SOLAR payload on board the International Space Station (ISS) has performed accurate measurements of solar spectral irradiance (SSI) from the middle ultraviolet to the infrared (165 to 3088 nm). These measurements are of primary importance for a better understanding of solar physics and the impact of solar variability on climate. In particular, a new reference solar spectrum (SOLAR-ISS) is established in April 2008 during the solar minima of cycles 23-24 thanks to revised engineering corrections, improved calibrations, and advanced procedures to account for thermal and aging corrections of the SOLAR/SOLSPEC instrument. Aims: The main objective of this article is to present a new high-resolution solar spectrum with a mean absolute uncertainty of 1.26% at 1σ from 165 to 3000 nm. This solar spectrum is based on solar observations of the SOLAR/SOLSPEC space-based instrument. Methods: The SOLAR/SOLSPEC instrument consists of three separate double monochromators that use concave holographic gratings to cover the middle ultraviolet (UV), visible (VIS), and infrared (IR) domains. Our best ultraviolet, visible, and infrared spectra are merged into a single absolute solar spectrum covering the 165-3000 nm domain. The resulting solar spectrum has a spectral resolution varying between 0.6 and 9.5 nm in the 165-3000 nm wavelength range. We build a new solar reference spectrum (SOLAR-ISS) by constraining existing high-resolution spectra to SOLAR/SOLSPEC observed spectrum. For that purpose, we account for the difference of resolution between the two spectra using the SOLAR/SOLSPEC instrumental slit functions. Results: Using SOLAR/SOLSPEC data, a new solar spectrum covering the 165-3000 nm wavelength range is built and is representative of the 2008 solar minimum. It has a resolution better than 0.1 nm below 1000 nm and 1 nm in the 1000-3000 nm wavelength range. The new

Inner shell transitions of BrI in the EUV

Energy Technology Data Exchange (ETDEWEB)

Mazzoni, M [Florence Univ. (Italy). Ist. di Astronomia; Pettini, M [Osservatorio Astrofisico di Arcetri, Florence (Italy)

1981-10-12

The EUV line spectrum originating from transitions of the inner 3d shell of neutral atomic bromine has been observed in absorption. Fano parameters have been derived for the three autoionized resonances nd/sup 10/(n + 1)s/sup 2/(n + 1)p/sup 5/ /sup 2/P-nd/sup 9/(n + 1)s/sup 2/(n + 1)p/sup 62/D observed in both bromine (n = 3) and iodine (n = 4) spectra.

Integral characteristics of spectra of ions important for EUV lithography

International Nuclear Information System (INIS)

Karazija, R; Kucas, S; Momkauskaite, A

2006-01-01

The emission spectrum corresponding to the 4p 5 4d N+1 + 4p 6 4d N-1 4f → 4p 6 4d N transition array is concentrated in a narrow interval of wavelengths. That is due to the existence of an approximate selection rule and quenching of some lines by configuration mixing. Thus such emission of elements near Z = 50 is considered to be the main candidate for the EUV lithography source at λ = 13.5 nm. In the present work the regularities of these transition arrays are considered using their integral characteristics: average energy, total line strength, variance and interval of array containing some part of the total transition probability. Calculations for various ions of elements In, Sn, Sb, Te, I and Xe have been performed in a two-configuration pseudorelativistic approximation, which describes fairly well the main features of the spectra. The variation in the values of the main integral characteristics of the spectra with atomic number and ionization degree gives the possibility of comparing quantitatively the suitability of the emission of various ions for EUV lithography

Tomographic Validation of the AWSoM Model of the Inner Corona During Solar Minima

Science.gov (United States)

Manchester, W.; Vásquez, A. M.; Lloveras, D. G.; Mac Cormack, C.; Nuevo, F.; Lopez-Fuentes, M.; Frazin, R. A.; van der Holst, B.; Landi, E.; Gombosi, T. I.

2017-12-01

Continuous improvement of MHD three-dimensional (3D) models of the global solar corona, such as the Alfven Wave Solar Model (AWSoM) of the Space Weather Modeling Framework (SWMF), requires testing their ability to reproduce observational constraints at a global scale. To that end, solar rotational tomography based on EUV image time-series can be used to reconstruct the 3D distribution of the electron density and temperature in the inner solar corona (r used to validate steady-state 3D MHD simulations of the inner corona using the latest version of the AWSoM model. We perform the study for selected rotations representative of solar minimum conditions, when the global structure of the corona is more axisymmetric. We analyse in particular the ability of the MHD simulation to match the tomographic results across the boundary region between the equatorial streamer belt and the surrounding coronal holes. The region is of particular interest as the plasma flow from that zone is thought to be related to the origin of the slow component of the solar wind.

Solar variability observed through changes in solar figure and mean diameter

International Nuclear Information System (INIS)

1984-01-01

A program to monitor solar luminosity variations through diameter measurements has been in operation at SCLERA since 1981. The solar diameter is measured at multiple angles from the equator. Measurements at these different angles have the advantage that not only can the solar oblateness be accurately measured, but also, a systematic errors introduced by atmospheric refraction can be reduced to a minimum. An improved theoretical treatment relevant to the relationship between the solar diameter and luminosity for long period oscilations has been successfully developed, and testing is currently underway. The construction of an absolute calibration system for the telescope field has been conducted and will soon be operational. A review of this work is presented

EUV multilayer defect compensation (MDC) by absorber pattern modification: from theory to wafer validation

Science.gov (United States)

Pang, Linyong; Hu, Peter; Satake, Masaki; Tolani, Vikram; Peng, Danping; Li, Ying; Chen, Dongxue

2011-11-01

According to the ITRS roadmap, mask defects are among the top technical challenges to introduce extreme ultraviolet (EUV) lithography into production. Making a multilayer defect-free extreme ultraviolet (EUV) blank is not possible today, and is unlikely to happen in the next few years. This means that EUV must work with multilayer defects present on the mask. The method proposed by Luminescent is to compensate effects of multilayer defects on images by modifying the absorber patterns. The effect of a multilayer defect is to distort the images of adjacent absorber patterns. Although the defect cannot be repaired, the images may be restored to their desired targets by changing the absorber patterns. This method was first introduced in our paper at BACUS 2010, which described a simple pixel-based compensation algorithm using a fast multilayer model. The fast model made it possible to complete the compensation calculations in seconds, instead of days or weeks required for rigorous Finite Domain Time Difference (FDTD) simulations. Our SPIE 2011 paper introduced an advanced compensation algorithm using the Level Set Method for 2D absorber patterns. In this paper the method is extended to consider process window, and allow repair tool constraints, such as permitting etching but not deposition. The multilayer defect growth model is also enhanced so that the multilayer defect can be "inverted", or recovered from the top layer profile using a calibrated model.

EUV and radio spectrum of coronal holes

Energy Technology Data Exchange (ETDEWEB)

Chiuderi Drago, F [Osservatorio Astrofisico di Arcetri, Florence (Italy)

1980-03-01

From the intensity of 19 EUV lines whose formation temperature anti T ranges from 3 x 10/sup 4/ to 1.4 x 10/sup 6/, two different models of the transition region and corona for the cell-centre and the network are derived. It is shown that both these models give radio brightness temperatures systematically higher than the observed ones. An agreement with radio data can be found only with lines formed at low temperature (anti T < 8.5 x 10/sup 5/) by decreasing the coronal temperature and the emission measure. The possibility of resolving the discrepancy by using different ion abundances has also been investigated with negative results.

Neural network based method for conversion of solar radiation data

International Nuclear Information System (INIS)

Celik, Ali N.; Muneer, Tariq

2013-01-01

Highlights: ► Generalized regression neural network is used to predict the solar radiation on tilted surfaces. ► The above network, amongst many such as multilayer perceptron, is the most successful one. ► The present neural network returns a relative mean absolute error value of 9.1%. ► The present model leads to a mean absolute error value of estimate of 14.9 Wh/m 2 . - Abstract: The receiving ends of the solar energy conversion systems that generate heat or electricity from radiation is usually tilted at an optimum angle to increase the solar incident on the surface. Solar irradiation data measured on horizontal surfaces is readily available for many locations where such solar energy conversion systems are installed. Various equations have been developed to convert solar irradiation data measured on horizontal surface to that on tilted one. These equations constitute the conventional approach. In this article, an alternative approach, generalized regression type of neural network, is used to predict the solar irradiation on tilted surfaces, using the minimum number of variables involved in the physical process, namely the global solar irradiation on horizontal surface, declination and hour angles. Artificial neural networks have been successfully used in recent years for optimization, prediction and modeling in energy systems as alternative to conventional modeling approaches. To show the merit of the presently developed neural network, the solar irradiation data predicted from the novel model was compared to that from the conventional approach (isotropic and anisotropic models), with strict reference to the irradiation data measured in the same location. The present neural network model was found to provide closer solar irradiation values to the measured than the conventional approach, with a mean absolute error value of 14.9 Wh/m 2 . The other statistical values of coefficient of determination and relative mean absolute error also indicate the

Modeling 13.3nm Fe XXIII Flare Emissions Using the GOES-R EXIS Instrument

Science.gov (United States)

Rook, H.; Thiemann, E.

2017-12-01

The solar EUV spectrum is dominated by atomic transitions in ionized atoms in the solar atmosphere. As solar flares evolve, plasma temperatures and densities change, influencing abundances of various ions, changing intensities of different EUV wavelengths observed from the sun. Quantifying solar flare spectral irradiance is important for constraining models of Earth's atmosphere, improving communications quality, and controlling satellite navigation. However, high time cadence measurements of flare irradiance across the entire EUV spectrum were not available prior to the launch of SDO. The EVE MEGS-A instrument aboard SDO collected 0.1nm EUV spectrum data from 2010 until 2014, when the instrument failed. No current or future instrument is capable of similar high resolution and time cadence EUV observation. This necessitates a full EUV spectrum model to study EUV phenomena at Earth. It has been recently demonstrated that one hot flare EUV line, such as the 13.3nm Fe XXIII line, can be used to model cooler flare EUV line emissions, filling the role of MEGS-A. Since unblended measurements of Fe XXIII are typically unavailable, a proxy for the Fe XXIII line must be found. In this study, we construct two models of this line, first using the GOES 0.1-0.8nm soft x-ray (SXR) channel as the Fe XXIII proxy, and second using a physics-based model dependent on GOES emission measure and temperature data. We determine that the more sophisticated physics-based model shows better agreement with Fe XXIII measurements, although the simple proxy model also performs well. We also conclude that the high correlation between Fe XXIII emissions and the GOES 0.1-0.8nm band is because both emissions tend to peak near the GOES emission measure peak despite large differences in their contribution functions.

The Dependence of Solar Flare Limb Darkening on Emission Peak Formation Temperature

Science.gov (United States)

Thiemann, Edward; Epp, Luke; Eparvier, Francis; Chamberlin, Phillip C.

2017-08-01

Solar limb effects are local brightening or darkening of an emission that depend on where in the Sun's atmosphere it forms. Near the solar limb, optically thick (thin) emissions will darken (brighten) as the column of absorbers (emitters) along the line-of-sight increases. Note that in limb brightening, emission sources are re-arranged whereas in limb darkening they are obscured. Thus, only limb darkening is expected to occur in disk integrated observations. Limb darkening also results in center-to-limb variations of disk-integrated solar flare spectra, with important consequences for how planetary atmospheres are affected by flares. Flares are typically characterized by their flux in the optically thin 0.1-0.8 nm band measured by the X-ray Sensor (XRS) on board the Geostationary Operational Environmental Satellite (GOES). On the other hand, Extreme Ultraviolet (EUV) line emissions can limb darken because they are sensitive to resonant scattering, resulting in a flare's location on the solar disk controlling the amount of ionizing radiation that reaches a planet. For example, an X-class flare originating from disk center may significantly heat a planet's thermosphere, whereas the same flare originating near the limb may have no effect because much of the effective emissions are scattered in the solar corona.To advance the relatively poor understanding of flare limb darkening, we use over 300 M-class or larger flares observed by the EUV Variability Experiment (EVE) onboard the Solar Dynamics Observatory (SDO) to characterize limb darkening as a function of emission peak formation temperature, Tf. For hot coronal emissions (Tf>2 MK), these results show a linear relationship between the degree of limb darkening and Tf where lines with Tf=2 MK darken approximately 7 times more than lines with Tf=16 MK. Because the extent of limb darkening is dependent on the height of the source plasma, we use simple Beer-Lambert radiative transfer analysis to interpret these results

Modulation of dayside on and neutral distributions at Venus Evidence of direct and indirect solar energy inputs

Science.gov (United States)

Taylor, H. A., Jr.; Mayr, H. G.; Grebowsky, J. M.; Niemann, H. B.; Hartle, R. E.; Cloutier, P. A.; Barnes, A.; Daniell, R. E., Jr.

1982-01-01

The details of solar variability and its coupled effects on the Venusian dayside are examined for evidence of short-term perturbations and associated energy inputs. Ion and neutral measurements obtained from the Orbiter Ion Mass Spectrometer and Orbital Neutral mass Spectrometer are used to show that the dayside concentrations of CO2(+) and the neutral gas temperature are smoothly modulated with a 28-day cycle reasonably matching that of the solar F(10.7) and EUV fluxes. Earlier measurements show less pronounced and more irregular modulations and more conspicuous short-term day-to-day fluctuations in the ions and neutrals, as well as relatively large enhancements in the solar wind, which appear consistent with differences in solar coronal behavior during the two periods. It is suggested that the solar wind variations cause fluctuations in joule heating, producing the observed short-term ion and neutral variations.

Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: Towards applications as EUV photoresists

International Nuclear Information System (INIS)

Lawrie, Kirsten; Blakey, Idriss; Blinco, James; Gronheid, Roel; Jack, Kevin; Pollentier, Ivan; Leeson, Michael J.; Younkin, Todd R.; Whittaker, Andrew K.

2011-01-01

Poly(olefin sulfone)s, formed by the reaction of sulfur dioxide (SO 2 ) and an olefin, are known to be highly susceptible to degradation by radiation and thus have been identified as candidate materials for chain scission-based extreme ultraviolet lithography (EUVL) resist materials. In order to investigate this further, the synthesis and characterisation of two poly(olefin sulfone)s namely poly(1-pentene sulfone) (PPS) and poly(2-methyl-1-pentene sulfone) (PMPS), was achieved and the two materials were evaluated for possible chain scission EUVL resist applications. It was found that both materials possess high sensitivities to EUV photons; however; the rates of outgassing were extremely high. The only observed degradation products were found to be SO 2 and the respective olefin suggesting that depolymerisation takes place under irradiation in a vacuum environment. In addition to depolymerisation, a concurrent conversion of SO 2 moieties to a sulfide phase was observed using XPS.

A problem to be solved for tungsten diagnostics through EUV spectroscopy in fusion devices

International Nuclear Information System (INIS)

Morita, S.; Murakami, I.; Sakaue, H.A.; Dong, C.F.; Goto, M.; Kato, D.; Oishi, T.; Huang, X.L.; Wang, E.H.

2013-01-01

Tungsten spectra have been observed from Large Helical Device (LHD) in extreme ultraviolet (EUV) wavelength ranges of 10-650Å. When the electron temperature is less than 2keV, the EUV spectra from plasma core are dominated by unresolved transition array (UTA) composing of a lot of spectral lines, e.g., 6g-4f, 5g-4f, 5f-4d and 5p-4d transitions for W"+"2"4"-"+"3"3 in 15-35Å. In order to understand the UTA spectrum, the EUV spectra measured from LHD plasmas are compared to those measured from Compact electron Beam Ion Trap (CoBIT), in which the electron beam is operated with monoenergetic energy of E_e ≤ 2keV. The tungsten spectra from LHD are well analyzed based on the knowledge from CoBIT tungsten spectra. The collisional-radiative (C-R) model has been developed to explain the UTA spectra from LHD in details. Radial profiles of EUV spectra from highly ionized tungsten ions have been measured and analyzed by impurity transport simulation code with ADPAK atomic database to examine the ionization balance determined by ionization and recombination rate coefficients. If the electron temperature is higher than 2keV, Zn-like WXLV (W"4"4"+) and Cu-like WXLVI (W"4"5"+) spectra can be observed in LHD. Such ions of W"4"4"+ and W"4"5"+ can exhibit much simpler atomic configuration compared to other ionization stages of tungsten. Quantitative analysis of the tungsten density is attempted for the first time on the radial profile of Zn-like WXLV (W"4"4"+) 4p-4s transition measured at 60.9Å, based on the emission rate coefficient calculated with HULLAC code. As a result, a total tungsten ion density of 3.5x10"1"0 cm"-"3 at the plasma center of LHD is reasonably obtained. Finally, the present problem for tungsten diagnostics in fusion plasmas is summarized. (author)

Solar panel acceptance testing using a pulsed solar simulator

Science.gov (United States)

Hershey, T. L.

1977-01-01

Utilizing specific parameters as area of an individual cell, number in series and parallel, and established coefficient of current and voltage temperature dependence, a solar array irradiated with one solar constant at AMO and at ambient temperature can be characterized by a current-voltage curve for different intensities, temperatures, and even different configurations. Calibration techniques include: uniformity in area, depth and time, absolute and transfer irradiance standards, dynamic and functional check out procedures. Typical data are given for individual cell (2x2 cm) to complete flat solar array (5x5 feet) with 2660 cells and on cylindrical test items with up to 10,000 cells. The time and energy saving of such testing techniques are emphasized.

Spectroscopic Diagnostics of Solar Magnetic Flux Ropes Using Iron Forbidden Line

OpenAIRE

Cheng, X.; Ding, M. D.

2016-01-01

In this Letter, we present Interface Region Imaging Spectrograph Fe XXI 1354.08 A forbidden line emission of two magnetic flux ropes (MFRs) that caused two fast coronal mass ejections with velocities of $\\ge$1000 km s$^{-1}$ and strong flares (X1.6 and M6.5) on 2014 September 10 and 2015 June 22, respectively. The EUV images at the 131 A and 94 A passbands provided by the Atmospheric Imaging Assembly on board Solar Dynamics Observatory reveal that both MFRs initially appear as suspended hot c...

Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.

Energy Technology Data Exchange (ETDEWEB)

Sizyuk, V.; Hassanein, A.; Morozov, V.; Sizyuk, T.; Mathematics and Computer Science

2007-01-16

The HEIGHTS integrated model has been developed as an instrument for simulation and optimization of laser-produced plasma (LPP) sources relevant to extreme ultraviolet (EUV) lithography. The model combines three general parts: hydrodynamics, radiation transport, and heat conduction. The first part employs a total variation diminishing scheme in the Lax-Friedrich formulation (TVD-LF); the second part, a Monte Carlo model; and the third part, implicit schemes with sparse matrix technology. All model parts consider physical processes in three-dimensional geometry. The influence of a generated magnetic field on laser plasma behavior was estimated, and it was found that this effect could be neglected for laser intensities relevant to EUV (up to {approx}10{sup 12} W/cm{sup 2}). All applied schemes were tested on analytical problems separately. Benchmark modeling of the full EUV source problem with a planar tin target showed good correspondence with experimental and theoretical data. Preliminary results are presented for tin droplet- and planar-target LPP devices. The influence of three-dimensional effects on EUV properties of source is discussed.

Observational capabilities of solar satellite "Coronas-Photon"

Science.gov (United States)

Kotov, Yu.

Coronas-Photon mission is the third satellite of the Russian Coronas program on solar activity observation The main goal of the Coronas-Photon is the study of solar hard electromagnetic radiation in the wide energy range from UV up to high energy gamma-radiation sim 2000MeV Scientific payload for solar radiation observation consists of three type of instruments 1 monitors Natalya-2M Konus-RF RT-2 Penguin-M BRM Phoka Sphin-X Sokol for spectral and timing measurements of full solar disk radiation with timing in flare burst mode up to one msec Instruments Natalya-2M Konus-RF RT-2 will cover the wide energy range of hard X-rays and soft Gamma rays 15keV to 2000MeV and will together constitute the largest area detectors ever used for solar observations Detectors of gamma-ray monitors are based on structured inorganic scintillators with energy resolution sim 5 for nuclear gamma-line band to 35 for GeV-band PSD analysis is used for gamma neutron separation for solar neutron registration T 30MeV Penguin-M has capability to measure linear polarization of hard X-rays using azimuth are measured by Compton scattering asymmetry in case of polarization of an incident flux For X-ray and EUV monitors the scintillation phoswich detectors gas proportional counter CZT assembly and Filter-covered Si-diodes are used 2 Telescope-spectrometer TESIS for imaging solar spectroscopy in X-rays with angular resolution up to 1 in three spectral lines and RT-2 CZT assembly of CZT

The radiated energy budget of chromospheric plasma in a major solar flare deduced from multi-wavelength observations

Energy Technology Data Exchange (ETDEWEB)

Milligan, Ryan O.; Mathioudakis, Mihalis; Keenan, Francis P. [Astrophysics Research Centre, School of Mathematics and Physics, Queen' s University Belfast, University Road, Belfast BT7 1NN (United Kingdom); Kerr, Graham S.; Hudson, Hugh S.; Fletcher, Lyndsay [School of Physics and Astronomy, SUPA, University of Glasgow, Glasgow G12 8QQ (United Kingdom); Dennis, Brian R.; Allred, Joel C.; Chamberlin, Phillip C.; Ireland, Jack, E-mail: r.milligan@qub.ac.uk [Solar Physics Laboratory (Code 671), Heliophysics Science Division, NASA Goddard Space Flight Center, Greenbelt, MD 20771 (United States)

2014-10-01

This paper presents measurements of the energy radiated by the lower solar atmosphere, at optical, UV, and EUV wavelengths, during an X-class solar flare (SOL2011-02-15T01:56) in response to an injection of energy assumed to be in the form of nonthermal electrons. Hard X-ray observations from RHESSI were used to track the evolution of the parameters of the nonthermal electron distribution to reveal the total power contained in flare accelerated electrons. By integrating over the duration of the impulsive phase, the total energy contained in the nonthermal electrons was found to be >2 × 10{sup 31} erg. The response of the lower solar atmosphere was measured in the free-bound EUV continua of H I (Lyman), He I, and He II, plus the emission lines of He II at 304 Å and H I (Lyα) at 1216 Å by SDO/EVE, the UV continua at 1600 Å and 1700 Å by SDO/AIA, and the white light continuum at 4504 Å, 5550 Å, and 6684 Å, along with the Ca II H line at 3968 Å using Hinode/SOT. The summed energy detected by these instruments amounted to ∼3 × 10{sup 30} erg; about 15% of the total nonthermal energy. The Lyα line was found to dominate the measured radiative losses. Parameters of both the driving electron distribution and the resulting chromospheric response are presented in detail to encourage the numerical modeling of flare heating for this event, to determine the depth of the solar atmosphere at which these line and continuum processes originate, and the mechanism(s) responsible for their generation.

A mechanism of midlatitude noontime foE long-term variations inferred from European observations

Science.gov (United States)

Mikhailov, A. V.; Perrone, L.; Nusinov, A. A.

2017-04-01

Manually scaled June noontime monthly median foE values at three European stations Rome, Juliusruh, and Slough/Chilton were used to understand the mechanism of foE long-term variations. The 11 year running mean smoothed foE manifests long-term (for some solar cycles) variations with the rising phase at the end of 1960-1985 and the falling phase after 1985. A close relationship (even in details) between (foEave)11y and (R12)11y variations with the correlation coefficient of 0.996 (absolutely significant according to Fisher F criterion) suggests that the Sun is the source of these (foEave)11y long-term variations. After removing solar activity long-term variations the residual (foEave)11y trend is very small ( 0.029% per decade) being absolutely insignificant. This means that all (foEave)11y variations are removed with one solar activity index, (R12)11y, i.e., this means that long-term variations are fully controlled by solar activity. Theory of midlatitude daytime E region tells us that long-term variations of solar EUV in two lines λ = 977 Å (CIII) and λ = 1025.7 Å (HLyβ) and X-ray radiation with λ foE long-term variations have a natural (not anthropogenic) origin related to long-term variations of solar activity. No peculiarities in relation with the last deep solar minimum in 2008-2009 have been revealed.

Wavelength Dependence of Solar Irradiance Enhancement During X-Class Flares and Its Influence on the Upper Atmosphere

Science.gov (United States)

Huang, Yanshi; Richmond, Arthur D.; Deng, Yue; Chamberlin, Phillip C.; Qian, Liying; Solomon, Stanley C.; Roble, Raymond G.; Xiao, Zuo

2013-01-01

The wavelength dependence of solar irradiance enhancement during flare events is one of the important factors in determining how the Thermosphere-Ionosphere (T-I) system responds to flares. To investigate the wavelength dependence of flare enhancement, the Flare Irradiance Spectral Model (FISM) was run for 61 X-class flares. The absolute and the percentage increases of solar irradiance at flare peaks, compared to pre-flare conditions, have clear wavelength dependences. The 0-14 nm irradiance increases much more (approx. 680% on average) than that in the 14-25 nm waveband (approx. 65% on average), except at 24 nm (approx. 220%). The average percentage increases for the 25-105 nm and 122-190 nm wavebands are approx. 120% and approx. 35%, respectively. The influence of 6 different wavebands (0-14 nm, 14-25 nm, 25-105 nm, 105- 120 nm, 121.56 nm, and 122-175 nm) on the thermosphere was examined for the October 28th, 2003 flare (X17-class) event by coupling FISM with the National Center for Atmospheric Research (NCAR) Thermosphere-Ionosphere-Electrodynamics General Circulation Model (TIE-GCM) under geomagnetically quiet conditions (Kp=1). While the enhancement in the 0-14 nm waveband caused the largest enhancement of the globally integrated solar heating, the impact of solar irradiance enhancement on the thermosphere at 400 km is largest for the 25-105 nm waveband (EUV), which accounts for about 33 K of the total 45 K temperature enhancement, and approx. 7.4% of the total approx. 11.5% neutral density enhancement. The effect of 122-175 nm flare radiation on the thermosphere is rather small. The study also illustrates that the high-altitude thermospheric response to the flare radiation at 0-175 nm is almost a linear combination of the responses to the individual wavebands. The upper thermospheric temperature and density enhancements peaked 3-5 h after the maximum flare radiation.

Soft X-ray variability over the present minimum of solar activity as observed by SphinX

Science.gov (United States)

Gburek, S.; Siarkowski, M.; Kepa, A.; Sylwester, J.; Kowalinski, M.; Bakala, J.; Podgorski, P.; Kordylewski, Z.; Plocieniak, S.; Sylwester, B.; Trzebinski, W.; Kuzin, S.

2011-04-01

Solar Photometer in X-rays (SphinX) is an instrument designed to observe the Sun in X-rays in the energy range 0.85-15.00 keV. SphinX is incorporated within the Russian TESIS X and EUV telescope complex aboard the CORONAS-Photon satellite which was launched on January 30, 2009 at 13:30 UT from the Plesetsk Cosmodrome, northern Russia. Since February, 2009 SphinX has been measuring solar X-ray radiation nearly continuously. The principle of SphinX operation and the content of the instrument data archives is studied. Issues related to dissemination of SphinX calibration, data, repository mirrors locations, types of data and metadata are discussed. Variability of soft X-ray solar flux is studied using data collected by SphinX over entire mission duration.

Structure and sources of solar wind in the growing phase of 24th solar cycle

Science.gov (United States)

Slemzin, Vladimir; Goryaev, Farid; Shugay, Julia; Rodkin, Denis; Veselovsky, Igor

2015-04-01

We present analysis of the solar wind (SW) structure and its association with coronal sources during the minimum and rising phase of 24th solar cycle (2009-2011). The coronal sources prominent in this period - coronal holes, small areas of open magnetic fields near active regions and transient sources associated with small-scale solar activity have been investigated using EUV solar images and soft X-ray fluxes obtained by the CORONAS-Photon/TESIS/Sphinx, PROBA2/SWAP, Hinode/EIS and AIA/SDO instruments as well as the magnetograms obtained by HMI/SDO. It was found that at solar minimum (2009) velocity and magnetic field strength of high speed wind (HSW) and transient SW from small-scale flares did not differ significantly from those of the background slow speed wind (SSW). The major difference between parameters of different SW components was seen in the ion composition represented by the C6/C5, O7/O6, Fe/O ratios and the mean charge of Fe ions. With growing solar activity, the speed of HSW increased due to transformation of its sources - small-size low-latitude coronal holes into equatorial extensions of large polar holes. At that period, the ion composition of transient SW changed from low-temperature to high-temperature values, which was caused by variation of the source conditions and change of the recombination/ionization rates during passage of the plasma flow through the low corona. However, we conclude that criteria of separation of the SW components based on the ion ratios established earlier by Zhao&Fisk (2009) for higher solar activity are not applicable to the extremely weak beginning of 24th cycle. The research leading to these results has received funding from the European Commission's Seventh Framework Programme (FP7/2007-2013) under the grant agreement eHeroes (project n° 284461, www.eheroes.eu).

Solar Irradiance Variability is Caused by the Magnetic Activity on the Solar Surface.

Science.gov (United States)

Yeo, Kok Leng; Solanki, Sami K; Norris, Charlotte M; Beeck, Benjamin; Unruh, Yvonne C; Krivova, Natalie A

2017-09-01

The variation in the radiative output of the Sun, described in terms of solar irradiance, is important to climatology. A common assumption is that solar irradiance variability is driven by its surface magnetism. Verifying this assumption has, however, been hampered by the fact that models of solar irradiance variability based on solar surface magnetism have to be calibrated to observed variability. Making use of realistic three-dimensional magnetohydrodynamic simulations of the solar atmosphere and state-of-the-art solar magnetograms from the Solar Dynamics Observatory, we present a model of total solar irradiance (TSI) that does not require any such calibration. In doing so, the modeled irradiance variability is entirely independent of the observational record. (The absolute level is calibrated to the TSI record from the Total Irradiance Monitor.) The model replicates 95% of the observed variability between April 2010 and July 2016, leaving little scope for alternative drivers of solar irradiance variability at least over the time scales examined (days to years).

Dynamics of the spatial electron density distribution of EUV-induced plasmas

Science.gov (United States)

van der Horst, R. M.; Beckers, J.; Osorio, E. A.; Banine, V. Y.

2015-11-01

We studied the temporal evolution of the electron density distribution in a low pressure pulsed plasma induced by high energy extreme ultraviolet (EUV) photons using microwave cavity resonance spectroscopy (MCRS). In principle, MCRS only provides space averaged information about the electron density. However, we demonstrate here the possibility to obtain spatial information by combining multiple resonant modes. It is shown that EUV-induced plasmas, albeit being a rather exotic plasma, can be explained by known plasma physical laws and processes. Two stages of plasma behaviour are observed: first the electron density distribution contracts, after which it expands. It is shown that the contraction is due to cooling of the electrons. The moment when the density distribution starts to expand is related to the inertia of the ions. After tens of microseconds, the electrons reached the wall of the cavity. The speed of this expansion is dependent on the gas pressure and can be divided into two regimes. It is shown that the acoustic dominated regime the expansion speed is independent of the gas pressure and that in the diffusion dominated regime the expansion depends reciprocal on the gas pressure.

Dynamics of the spatial electron density distribution of EUV-induced plasmas

International Nuclear Information System (INIS)

Van der Horst, R M; Beckers, J; Banine, V Y; Osorio, E A

2015-01-01

We studied the temporal evolution of the electron density distribution in a low pressure pulsed plasma induced by high energy extreme ultraviolet (EUV) photons using microwave cavity resonance spectroscopy (MCRS). In principle, MCRS only provides space averaged information about the electron density. However, we demonstrate here the possibility to obtain spatial information by combining multiple resonant modes. It is shown that EUV-induced plasmas, albeit being a rather exotic plasma, can be explained by known plasma physical laws and processes. Two stages of plasma behaviour are observed: first the electron density distribution contracts, after which it expands. It is shown that the contraction is due to cooling of the electrons. The moment when the density distribution starts to expand is related to the inertia of the ions. After tens of microseconds, the electrons reached the wall of the cavity. The speed of this expansion is dependent on the gas pressure and can be divided into two regimes. It is shown that the acoustic dominated regime the expansion speed is independent of the gas pressure and that in the diffusion dominated regime the expansion depends reciprocal on the gas pressure. (fast track communication)

Development of amorphous silicon based EUV hardmasks through physical vapor deposition

Science.gov (United States)

De Silva, Anuja; Mignot, Yann; Meli, Luciana; DeVries, Scott; Xu, Yongan; Seshadri, Indira; Felix, Nelson M.; Zeng, Wilson; Cao, Yong; Phan, Khoi; Dai, Huixiong; Ngai, Christopher S.; Stolfi, Michael; Diehl, Daniel L.

2017-10-01

Extending extreme ultraviolet (EUV) single exposure patterning to its limits requires more than photoresist development. The hardmask film is a key contributor in the patterning stack that offers opportunities to enhance lithographic process window, increase pattern transfer efficiency, and decrease defectivity when utilizing very thin film stacks. This paper introduces the development of amorphous silicon (a-Si) deposited through physical vapor deposited (PVD) as an alternative to a silicon ARC (SiARC) or silicon-oxide-type EUV hardmasks in a typical trilayer patterning scheme. PVD offers benefits such as lower deposition temperature, and higher purity, compared to conventional chemical vapor deposition (CVD) techniques. In this work, sub-36nm pitch line-space features were resolved with a positive-tone organic chemically-amplified resist directly patterned on PVD a-Si, without an adhesion promotion layer and without pattern collapse. Pattern transfer into the underlying hardmask stack was demonstrated, allowing an evaluation of patterning metrics related to resolution, pattern transfer fidelity, and film defectivity for PVD a-Si compared to a conventional tri-layer patterning scheme. Etch selectivity and the scalability of PVD a-Si to reduce the aspect ratio of the patterning stack will also be discussed.

Equatorial Ionospheric Anomaly (EIA) and comparison with IRI model during descending phase of solar activity (2005-2009)

Science.gov (United States)

Kumar, Sanjay; Singh, A. K.; Lee, Jiyun

2014-03-01

The ionospheric variability at equatorial and low latitude region is known to be extreme as compared to mid latitude region. In this study the ionospheric total electron content (TEC), is derived by analyzing dual frequency Global Positioning System (GPS) data recorded at two stations separated by 325 km near the Indian equatorial anomaly region, Varanasi (Geog latitude 25°, 16/ N, longitude 82°, 59/ E, Geomagnetic latitude 16°, 08/ N) and Kanpur (Geog latitude 26°, 18/ N, longitude 80°, 12/ E, Geomagnetic latitude 17°, 18/ N). Specifically, we studied monthly, seasonal and annual variations as well as solar and geomagnetic effects on the equatorial ionospheric anomaly (EIA) during the descending phase of solar activity from 2005 to 2009. It is found that the maximum TEC (EIA) near equatorial anomaly crest yield their maximum values during the equinox months and their minimum values during the summer. Using monthly averaged peak magnitude of TEC, a clear semi-annual variation is seen with two maxima occurring in both spring and autumn. Results also showed the presence of winter anomaly or seasonal anomaly in the EIA crest throughout the period 2005-2009 only except during the deep solar minimum year 2007-2008. The correlation analysis indicate that the variation of EIA crest is more affected by solar activity compared to geomagnetic activity with maximum dependence on the solar EUV flux, which is attributed to direct link of EUV flux on the formation of ionosphere and main agent of the ionization. The statistical mean occurrence of EIA crest in TEC during the year from 2005 to 2009 is found to around 12:54 LT hour and at 21.12° N geographic latitude. The crest of EIA shifts towards lower latitudes and the rate of shift of the crest latitude during this period is found to be 0.87° N/per year. The comparison between IRI models with observation during this period has been made and comparison is poor with increasing solar activity with maximum difference during

Absolute risk, absolute risk reduction and relative risk

Directory of Open Access Journals (Sweden)

Jose Andres Calvache

2012-12-01

Full Text Available This article illustrates the epidemiological concepts of absolute risk, absolute risk reduction and relative risk through a clinical example. In addition, it emphasizes the usefulness of these concepts in clinical practice, clinical research and health decision-making process.

Precipitation and Release of Solar Energetic Particles from the Solar Coronal Magnetic Field

Energy Technology Data Exchange (ETDEWEB)

Zhang, Ming; Zhao, Lulu, E-mail: mzhang@fit.edu [Department of Physics and Space Sciences, Florida Institute of Technology, 150 W. University Blvd., Melbourne, FL 32901 (United States)

2017-09-10

Most solar energetic particles (SEPs) are produced in the corona. They propagate through complex coronal magnetic fields subject to scattering and diffusion across the averaged field lines by turbulence. We examine the behaviors of particle transport using a stochastic 3D focused transport simulation in a potential field source surface model of coronal magnetic field. The model is applied to an SEP event on 2010 February 7. We study three scenarios of particle injection at (i) the compact solar flare site, (ii) the coronal mass ejection (CME) shock, and (iii) the EUV wave near the surface. The majority of particles injected on open field lines are able to escape the corona. We found that none of our models can explain the observations of wide longitudinal SEP spread without perpendicular diffusion. If the perpendicular diffusion is about 10% of what is derived from the random walk of field lines at the rate of supergranular diffusion, particles injected at the compact solar flare site can spread to a wide range of longitude and latitude, very similar to the behavior of particles injected at a large CME shock. Stronger pitch-angle scattering results in a little more lateral spread by holding the particles in the corona for longer periods of time. Some injected particles eventually end up precipitating onto the solar surface. Even with a very small perpendicular diffusion, the pattern of the particle precipitation can be quite complicated depending on the detailed small-scale coronal magnetic field structures, which could be seen with future sensitive gamma-ray telescopes.

Precipitation and Release of Solar Energetic Particles from the Solar Coronal Magnetic Field

International Nuclear Information System (INIS)

Zhang, Ming; Zhao, Lulu

2017-01-01

Most solar energetic particles (SEPs) are produced in the corona. They propagate through complex coronal magnetic fields subject to scattering and diffusion across the averaged field lines by turbulence. We examine the behaviors of particle transport using a stochastic 3D focused transport simulation in a potential field source surface model of coronal magnetic field. The model is applied to an SEP event on 2010 February 7. We study three scenarios of particle injection at (i) the compact solar flare site, (ii) the coronal mass ejection (CME) shock, and (iii) the EUV wave near the surface. The majority of particles injected on open field lines are able to escape the corona. We found that none of our models can explain the observations of wide longitudinal SEP spread without perpendicular diffusion. If the perpendicular diffusion is about 10% of what is derived from the random walk of field lines at the rate of supergranular diffusion, particles injected at the compact solar flare site can spread to a wide range of longitude and latitude, very similar to the behavior of particles injected at a large CME shock. Stronger pitch-angle scattering results in a little more lateral spread by holding the particles in the corona for longer periods of time. Some injected particles eventually end up precipitating onto the solar surface. Even with a very small perpendicular diffusion, the pattern of the particle precipitation can be quite complicated depending on the detailed small-scale coronal magnetic field structures, which could be seen with future sensitive gamma-ray telescopes.

Precipitation and Release of Solar Energetic Particles from the Solar Coronal Magnetic Field

Science.gov (United States)

Zhang, Ming; Zhao, Lulu

2017-09-01

Most solar energetic particles (SEPs) are produced in the corona. They propagate through complex coronal magnetic fields subject to scattering and diffusion across the averaged field lines by turbulence. We examine the behaviors of particle transport using a stochastic 3D focused transport simulation in a potential field source surface model of coronal magnetic field. The model is applied to an SEP event on 2010 February 7. We study three scenarios of particle injection at (I) the compact solar flare site, (II) the coronal mass ejection (CME) shock, and (III) the EUV wave near the surface. The majority of particles injected on open field lines are able to escape the corona. We found that none of our models can explain the observations of wide longitudinal SEP spread without perpendicular diffusion. If the perpendicular diffusion is about 10% of what is derived from the random walk of field lines at the rate of supergranular diffusion, particles injected at the compact solar flare site can spread to a wide range of longitude and latitude, very similar to the behavior of particles injected at a large CME shock. Stronger pitch-angle scattering results in a little more lateral spread by holding the particles in the corona for longer periods of time. Some injected particles eventually end up precipitating onto the solar surface. Even with a very small perpendicular diffusion, the pattern of the particle precipitation can be quite complicated depending on the detailed small-scale coronal magnetic field structures, which could be seen with future sensitive gamma-ray telescopes.

Absolute absorption cross-section and photolysis rate of I2

Directory of Open Access Journals (Sweden)

A. Saiz-Lopez

2004-01-01

Full Text Available Following recent observations of molecular iodine (I2 in the coastal marine boundary layer (MBL (Saiz-Lopez and Plane, 2004, it has become important to determine the absolute absorption cross-section of I2 at reasonably high resolution, and also to evaluate the rate of photolysis of the molecule in the lower atmosphere. The absolute absorption cross-section (σ of gaseous I2 at room temperature and pressure (295K, 760Torr was therefore measured between 182 and 750nm using a Fourier Transform spectrometer at a resolution of 4cm-1 (0.1nm at λ=500nm. The maximum absorption cross-section in the visible region was observed at λ=533.0nm to be σ=(4.24±0.50x10-18cm2molecule-1. The spectrum is available as supplementary material accompanying this paper. The photo-dissociation rate constant (J of gaseous I2 was also measured directly in a solar simulator, yielding J(I2=0.12±0.03s-1 for the lower troposphere. This is in excellent agreement with the value of 0.12±0.015s-1 calculated using the measured absorption cross-section, terrestrial solar flux for clear sky conditions and assuming a photo-dissociation yield of unity. A two-stream radiation transfer model was then used to determine the variation in photolysis rate with solar zenith angle (SZA, from which an analytic expression is derived for use in atmospheric models. Photolysis appears to be the dominant loss process for I2 during daytime, and hence an important source of iodine atoms in the lower atmosphere.

Evaluation of Applicability of Global Solar Radiation Prediction Models for Kocaeli

Directory of Open Access Journals (Sweden)

Nurullah ARSLANOĞLU

2016-04-01

Full Text Available Design and analyses of solar energy systems needs value of global solar radiation falling on the surface of the earth. In this study,  thirty relative sunshine duration based regression models in the literature for determining the monthly average daily global solar radiation on a horizontal surface for Kocaeli were investigated. To indicate the performance of the models, the following statistical test methods are used: mean absolute bias error (MABE, mean bias error (MBE, mean absolute percent error (MAPE, mean percent error (MPE, root mean square error (RMSE. According to the statistical performance, Lewis model (Model 23, Model-18 (Jin et al. and Model 8 (Bahel et al. showed the best estimation of the global solar radiation on a horizontal surface for Kocaeli.

Enhancement of the EUV emission of a metallic capillary discharge operated with argon ambient gas

Energy Technology Data Exchange (ETDEWEB)

Chan, L. S., E-mail: lschan1982@yahoo.com; Tan, D., E-mail: lschan1982@yahoo.com; Saboohi, S., E-mail: lschan1982@yahoo.com; Yap, S. L., E-mail: lschan1982@yahoo.com; Wong, C. S., E-mail: lschan1982@yahoo.com [Plasma Technology Research Centre, Physics Department, University of Malaya, 50603 Kuala Lumpur (Malaysia)

2014-03-05

In this work, the metallic capillary discharge is operated with two different ambients: air and argon. In the experiments reported here, the chamber is first evacuated to 10{sup −5} mbar. The discharge is initiated by the transient hollow cathode effect generated electron beam, with either air ambient or argon ambient at 10{sup −4} mbar. The bombardment of electron beam at the tip of the stainless steel anode gives rise to a metallic vapor, which is injected into the capillary and initiates the main discharge through the capillary. The EUV emission is measured for different discharge voltages for both conditions and compared. It is found that the metallic capillary discharge with argon ambientis able to produce higher EUV energy compared to that with air ambient.

Rocket-borne EUV-visible emission measurements

International Nuclear Information System (INIS)

Schmidtke, G.; Baker, K.D.; Stasek, G.

1982-01-01

Two rocket-borne experiments for measuring EUV atmospheric emissions have been conducted. The first measured emissions at 391.4 nm and 557.7 nm, and the second measured emissions in the range from 50 to 650 nm. Height profiles of selected auroral emissions from atomic oxygen at 130.4 nm (exhibiting resonant radiation diffusion) and from atomic oxygen at 557.7 nm, and from neutral and ionized molecular nitrogen are shown. Some details of the recorded spectra are given. In the shorter wavelength regions, emissions from atomic oxygen and nitrogen dominate. Over 140 nm, Lyman-Birge-Hopfield bands, second positive bands and Vegard-Kaplan bands of molecular nitrogen contribute most strongly except for some atomic lines. The Lyman-Birge-Hopfield bands of molecular nitrogen are relatively weak during the auroral arc as compared to the diffuse aurora

Self-aligned blocking integration demonstration for critical sub-30nm pitch Mx level patterning with EUV self-aligned double patterning

Science.gov (United States)

Raley, Angélique; Lee, Joe; Smith, Jeffrey T.; Sun, Xinghua; Farrell, Richard A.; Shearer, Jeffrey; Xu, Yongan; Ko, Akiteru; Metz, Andrew W.; Biolsi, Peter; Devilliers, Anton; Arnold, John; Felix, Nelson

2018-04-01

We report a sub-30nm pitch self-aligned double patterning (SADP) integration scheme with EUV lithography coupled with self-aligned block technology (SAB) targeting the back end of line (BEOL) metal line patterning applications for logic nodes beyond 5nm. The integration demonstration is a validation of the scalability of a previously reported flow, which used 193nm immersion SADP targeting a 40nm pitch with the same material sets (Si3N4 mandrel, SiO2 spacer, Spin on carbon, spin on glass). The multi-color integration approach is successfully demonstrated and provides a valuable method to address overlay concerns and more generally edge placement error (EPE) as a whole for advanced process nodes. Unbiased LER/LWR analysis comparison between EUV SADP and 193nm immersion SADP shows that both integrations follow the same trend throughout the process steps. While EUV SADP shows increased LER after mandrel pull, metal hardmask open and dielectric etch compared to 193nm immersion SADP, the final process performance is matched in terms of LWR (1.08nm 3 sigma unbiased) and is only 6% higher than 193nm immersion SADP for average unbiased LER. Using EUV SADP enables almost doubling the line density while keeping most of the remaining processes and films unchanged, and provides a compelling alternative to other multipatterning integrations, which present their own sets of challenges.

ROSAT EUV and soft X-ray studies of atmospheric composition and structure in G191-B2B

Science.gov (United States)

Barstow, M. A.; Fleming, T. A.; Finley, D. S.; Koester, D.; Diamond, C. J.

1993-01-01

Previous studies of the hot DA white dwarf GI91-B2B have been unable to determine whether the observed soft X-ray and EUV opacity arises from a stratified hydrogen and helium atmosphere or from the presence of trace metals in the photosphere. New EUV and soft X-ray photometry of this star, made with the ROSAT observatory, when analyzed in conjunction with the earlier data, shows that the stratified models cannot account for the observed fluxes. Consequently, we conclude that trace metals must be a substantial source of opacity in the photosphere of G191-B2B.

Solar variability observed through changes in solar figure and mean diameter

International Nuclear Information System (INIS)

Hill, H.A.

1985-01-01

A program to monitor solar luminosity variations through diameter measurements has been operation at SCLERA since 1981. The solar diameter is currently measured at multiple angles from the equator. Measurements at these different angles have the advantage that, not only can the solar oblateness be accurately measured, but, also, systematic errors, introduced by atmospheric refraction, can be reduced to a minimum. The primary emphasis during the last year has been on data analysis and interpretation. An extension of theoretical work relevant to the relationship between the solar diameter and luminosity for long-period oscillations has been extended to include 160 min period oscillations, and several tests have been completed. An absolute calibration system for the telescope field has been constructed and is being tested. A review of this work is presented

Etch bias inversion during EUV mask ARC etch

Science.gov (United States)

Lajn, Alexander; Rolff, Haiko; Wistrom, Richard

2017-07-01

The introduction of EUV lithography to high volume manufacturing is now within reach for 7nm technology node and beyond (1), at least for some steps. The scheduling is in transition from long to mid-term. Thus, all contributors need to focus their efforts on the production requirements. For the photo mask industry, these requirements include the control of defectivity, CD performance and lifetime of their masks. The mask CD performance including CD uniformity, CD targeting, and CD linearity/ resolution, is predominantly determined by the photo resist performance and by the litho and etch processes. State-of-the-art chemically amplified resists exhibit an asymmetric resolution for directly and indirectly written features, which usually results in a similarly asymmetric resolution performance on the mask. This resolution gap may reach as high as multiple tens of nanometers on the mask level in dependence of the chosen processes. Depending on the printing requirements of the wafer process, a reduction or even an increase of this gap may be required. A potential way of tuning via the etch process, is to control the lateral CD contribution during etch. Aside from process tuning knobs like pressure, RF powers and gases, which usually also affect CD linearity and CD uniformity, the simplest knob is the etch time itself. An increased over etch time results in an increased CD contribution in the normal case. , We found that the etch CD contribution of ARC layer etch on EUV photo masks is reduced by longer over etch times. Moreover, this effect can be demonstrated to be present for different etch chambers and photo resists.

High resolution atlas of the solar spectrum 2678-2931 A

Science.gov (United States)

Allen, M. S.; Mcallister, H. C.; Jefferies, J. T.

1977-01-01

A portion of the ultraviolet solar spectrum is presented in this high resolution atlas. The data, originating from a rocket echelle spectrogram obtained on 19 June 1974 of a quiet area near the center of the solar disk, extend from 2678 to 2931 A. The instrument had a nominal resolving power of 200,000 at these wavelengths and the rms precision of the rectified wavelength scale is 15 mA. Absolute intensities are computed by calibration to the absolute measurements of Kohl and Parkinson.

High-resolution studies of the structure of the solar atmosphere using a new imaging algorithm

Science.gov (United States)

Karovska, Margarita; Habbal, Shadia Rifai

1991-01-01

The results of the application of a new image restoration algorithm developed by Ayers and Dainty (1988) to the multiwavelength EUV/Skylab observations of the solar atmosphere are presented. The application of the algorithm makes it possible to reach a resolution better than 5 arcsec, and thus study the structure of the quiet sun on that spatial scale. The results show evidence for discrete looplike structures in the network boundary, 5-10 arcsec in size, at temperatures of 100,000 K.

MULTIFRACTAL SOLAR EUV INTENSITY FLUCTUATIONS AND THEIR IMPLICATIONS FOR CORONAL HEATING MODELS

Energy Technology Data Exchange (ETDEWEB)

Cadavid, A. C.; Lawrence, J. K.; Christian, D. J. [Department of Physics and Astronomy, California State University Northridge, 18111 Nordhoff Street, Northridge, CA 91330 (United States); Rivera, Y. J. [Department of Climate and Space Sciences, University of Michigan, Ann Arbor, Michigan 48109-2143 (United States); Jennings, P. J. [5174 S. Slauson Avenue, Culver City, CA 90230 (United States); Rappazzo, A. F., E-mail: ana.cadavid@csun.edu [Department of Earth, Planetary and Space Sciences, University of California Los Angeles, Los Angeles, CA 90095 (United States)

2016-11-10

We investigate the scaling properties of the long-range temporal evolution and intermittency of Atmospheric Imaging Assembly/ Solar Dynamics Observatory intensity observations in four solar environments: an active region core, a weak emission region, and two core loops. We use two approaches: the probability distribution function (PDF) of time series increments and multifractal detrended fluctuation analysis (MF-DFA). Noise taints the results, so we focus on the 171 Å waveband, which has the highest signal-to-noise ratio. The lags between pairs of wavebands distinguish between coronal versus transition region (TR) emission. In all physical regions studied, scaling in the range of 15–45 minutes is multifractal, and the time series are anti-persistent on average. The degree of anti-correlation in the TR time series is greater than that for coronal emission. The multifractality stems from long-term correlations in the data rather than the wide distribution of intensities. Observations in the 335 Å waveband can be described in terms of a multifractal with added noise. The multiscaling of the extreme-ultraviolet data agrees qualitatively with the radiance from a phenomenological model of impulsive bursts plus noise, and also from ohmic dissipation in a reduced magnetohydrodynamic model for coronal loop heating. The parameter space must be further explored to seek quantitative agreement. Thus, the observational “signatures” obtained by the combined tests of the PDF of increments and the MF-DFA offer strong constraints that can systematically discriminate among models for coronal heating.

EUV-driven ionospheres and electron transport on extrasolar giant planets orbiting active stars

Science.gov (United States)

Chadney, J. M.; Galand, M.; Koskinen, T. T.; Miller, S.; Sanz-Forcada, J.; Unruh, Y. C.; Yelle, R. V.

2016-03-01

The composition and structure of the upper atmospheres of extrasolar giant planets (EGPs) are affected by the high-energy spectrum of their host stars from soft X-rays to the extreme ultraviolet (EUV). This emission depends on the activity level of the star, which is primarily determined by its age. In this study, we focus upon EGPs orbiting K- and M-dwarf stars of different ages - ɛ Eridani, AD Leonis, AU Microscopii - and the Sun. X-ray and EUV (XUV) spectra for these stars are constructed using a coronal model. These spectra are used to drive both a thermospheric model and an ionospheric model, providing densities of neutral and ion species. Ionisation - as a result of stellar radiation deposition - is included through photo-ionisation and electron-impact processes. The former is calculated by solving the Lambert-Beer law, while the latter is calculated from a supra-thermal electron transport model. We find that EGP ionospheres at all orbital distances considered (0.1-1 AU) and around all stars selected are dominated by the long-lived H+ ion. In addition, planets with upper atmospheres where H2 is not substantially dissociated (at large orbital distances) have a layer in which H3+ is the major ion at the base of the ionosphere. For fast-rotating planets, densities of short-lived H3+ undergo significant diurnal variations, with the maximum value being driven by the stellar X-ray flux. In contrast, densities of longer-lived H+ show very little day/night variability and the magnitude is driven by the level of stellar EUV flux. The H3+ peak in EGPs with upper atmospheres where H2 is dissociated (orbiting close to their star) under strong stellar illumination is pushed to altitudes below the homopause, where this ion is likely to be destroyed through reactions with heavy species (e.g. hydrocarbons, water). The inclusion of secondary ionisation processes produces significantly enhanced ion and electron densities at altitudes below the main EUV ionisation peak, as

EUV actinic defect inspection and defect printability at the sub-32 nm half pitch

Energy Technology Data Exchange (ETDEWEB)

Huh, Sungmin; Kearney, Patrick; Wurm, Stefan; Goodwin, Frank; Han, Hakseung; Goldberg, Kenneth; Mochi, Iacopp; Gullikson, Eric M.

2009-08-01

Extreme ultraviolet (EUV) mask blanks with embedded phase defects were inspected with a reticle actinic inspection tool (AIT) and the Lasertec M7360. The Lasertec M7360, operated at SEMA TECH's Mask Blank Development Center (MBDC) in Albany, NY, has a sensitivity to multilayer defects down to 40-45 nm, which is not likely sufficient for mask blank development below the 32 nm half-pitch node. Phase defect printability was simulated to calculate the required defect sensitivity for a next generation blank inspection tool to support reticle development for the sub-32 nm half-pitch technology node. Defect mitigation technology is proposed to take advantage of mask blanks with some defects. This technology will reduce the cost of ownership of EUV mask blanks. This paper will also discuss the kind of infrastructure that will be required for the development and mass production stages.

SphinX: The Solar Photometer in X-Rays

Science.gov (United States)

Gburek, Szymon; Sylwester, Janusz; Kowalinski, Miroslaw; Bakala, Jaroslaw; Kordylewski, Zbigniew; Podgorski, Piotr; Plocieniak, Stefan; Siarkowski, Marek; Sylwester, Barbara; Trzebinski, Witold; Kuzin, Sergey V.; Pertsov, Andrey A.; Kotov, Yurij D.; Farnik, Frantisek; Reale, Fabio; Phillips, Kenneth J. H.

2013-04-01

Solar Photometer in X-rays (SphinX) was a spectrophotometer developed to observe the Sun in soft X-rays. The instrument observed in the energy range ≈ 1 - 15 keV with resolution ≈ 0.4 keV. SphinX was flown on the Russian CORONAS-PHOTON satellite placed inside the TESIS EUV and X telescope assembly. The spacecraft launch took place on 30 January 2009 at 13:30 UT at the Plesetsk Cosmodrome in Russia. The SphinX experiment mission began a couple of weeks later on 20 February 2009 when the first telemetry dumps were received. The mission ended nine months later on 29 November 2009 when data transmission was terminated. SphinX provided an excellent set of observations during very low solar activity. This was indeed the period in which solar activity dropped to the lowest level observed in X-rays ever. The SphinX instrument design, construction, and operation principle are described. Information on SphinX data repositories, dissemination methods, format, and calibration is given together with general recommendations for data users. Scientific research areas in which SphinX data find application are reviewed.

High Quality, Low-Scatter SiC Optics Suitable for Space-based UV & EUV Applications, Phase II

Data.gov (United States)

National Aeronautics and Space Administration — SSG Precision Optronics proposes the development and demonstration of a new optical fabrication process for the production of EUV quality Silicon Carbide (SiC)...

Wavelength Dependence of Solar Flare Irradiation and its Influence on the Thermosphere

Science.gov (United States)

Huang, Yanshi; Richmond, Arthur D.; Deng, Yue; Qian, L.; Solomon, S.; Chamberlin, P.

2012-01-01

The wavelength dependence of solar flare enhancement is one of the important factors determining how the Thermosphere-Ionosphere (T-I) system response to flares. To investigate the wavelength dependence of solar flare, the Flare Irradiance Spectral Model (FISM) has been run for 34 X-class flares. The results show that the percentage increases of solar irradiance at flare peak comparing to pre-flare condition have a clear wavelength dependence. In the wavelength range between 0 - 195 nm, it can vary from 1% to 10000%. The solar irradiance enhancement is largest ( 1000%) in the XUV range (0 - 25 nm), and is about 100% in EUV range (25 - 120 nm). The influence of different wavebands on the T-I system during the October 28th, 2003 flare (X17.2-class) has also been examined using the latest version of National Center for Atmospheric Research (NCAR) Thermosphere- Ionosphere-Electrodynamics General Circulation Model (TIE-GCM). While the globally integrated solar energy deposition is largest in the 0 - 14 nm waveband, the impact of solar irradiance enhancement on the thermosphere at 400 km is largest for 25 - 105 nm waveband. The effect of 122 - 195 nm is small in magnitude, but it decays slowly.

Method for the manufacture of phase shifting masks for EUV lithography

Science.gov (United States)

Stearns, Daniel G.; Sweeney, Donald W.; Mirkarimi, Paul B.; Barty, Anton

2006-04-04

A method for fabricating an EUV phase shift mask is provided that includes a substrate upon which is deposited a thin film multilayer coating that has a complex-valued reflectance. An absorber layer or a buffer layer is attached onto the thin film multilayer, and the thickness of the thin film multilayer coating is altered to introduce a direct modulation in the complex-valued reflectance to produce phase shifting features.

STEREO OBSERVATIONS OF FAST MAGNETOSONIC WAVES IN THE EXTENDED SOLAR CORONA ASSOCIATED WITH EIT/EUV WAVES

International Nuclear Information System (INIS)

Kwon, Ryun-Young; Ofman, Leon; Kramar, Maxim; Olmedo, Oscar; Davila, Joseph M.; Thompson, Barbara J.; Cho, Kyung-Suk

2013-01-01

We report white-light observations of a fast magnetosonic wave associated with a coronal mass ejection observed by STEREO/SECCHI/COR1 inner coronagraphs on 2011 August 4. The wave front is observed in the form of density compression passing through various coronal regions such as quiet/active corona, coronal holes, and streamers. Together with measured electron densities determined with STEREO COR1 and Extreme UltraViolet Imager (EUVI) data, we use our kinematic measurements of the wave front to calculate coronal magnetic fields and find that the measured speeds are consistent with characteristic fast magnetosonic speeds in the corona. In addition, the wave front turns out to be the upper coronal counterpart of the EIT wave observed by STEREO EUVI traveling against the solar coronal disk; moreover, stationary fronts of the EIT wave are found to be located at the footpoints of deflected streamers and boundaries of coronal holes, after the wave front in the upper solar corona passes through open magnetic field lines in the streamers. Our findings suggest that the observed EIT wave should be in fact a fast magnetosonic shock/wave traveling in the inhomogeneous solar corona, as part of the fast magnetosonic wave propagating in the extended solar corona.

Atomic structure calculations and identification of EUV and SXR spectral lines in Sr XXX

International Nuclear Information System (INIS)

Goyal, Arun; Khatri, Indu; Aggarwal, Sunny; Singh, A.K.; Mohan, Man

2015-01-01

We report an extensive theoretical study of atomic data for Sr XXX in a wide range with L-shell electron excitations to the M-shell. We have calculated energy levels, wave-function compositions and lifetimes for lowest 113 fine structure levels and wavelengths of an extreme Ultraviolet (EUV) and soft X-ray (SXR) transitions. We have employed multi-configuration Dirac Fock method (MCDF) approach within the framework of Dirac–Coulomb Hamiltonian including quantum electrodynamics (QED) and Breit corrections. We have also presented the radiative data for electric and magnetic dipole (E1, M1) and quadrupole (E2, M2) transitions from the ground state. We have made comparisons with available energy levels compiled by NIST and achieve good agreement. But due to inadequate data in the literature, analogous relativistic distorted wave calculations have also been performed using flexible atomic code (FAC) to assess the reliability and accuracy of our results. Additionally, we have provided new atomic data for Sr XXX which is not published elsewhere in the literature and we believe that our results may be beneficial in fusion plasma research and astrophysical investigations and applications. - Highlights: • 113 Lowest levels for Sr XXX are calculated. • Extreme Ultraviolet (EUV) and soft-X ray (SXR) spectral lines are identified. • Wavelengths of EUV and SXR spectral lines are reported. • E1, E2, M1 and M2 transition rates, oscillator strengths and lines strengths for lowest 113 levels are presented. • Lifetimes for lowest 113 fine structure levels are provided

Coronal hole evolution from multi-viewpoint data as input for a STEREO solar wind speed persistence model

Science.gov (United States)

Temmer, Manuela; Hinterreiter, Jürgen; Reiss, Martin A.

2018-03-01

We present a concept study of a solar wind forecasting method for Earth, based on persistence modeling from STEREO in situ measurements combined with multi-viewpoint EUV observational data. By comparing the fractional areas of coronal holes (CHs) extracted from EUV data of STEREO and SoHO/SDO, we perform an uncertainty assessment derived from changes in the CHs and apply those changes to the predicted solar wind speed profile at 1 AU. We evaluate the method for the time period 2008-2012, and compare the results to a persistence model based on ACE in situ measurements and to the STEREO persistence model without implementing the information on CH evolution. Compared to an ACE based persistence model, the performance of the STEREO persistence model which takes into account the evolution of CHs, is able to increase the number of correctly predicted high-speed streams by about 12%, and to decrease the number of missed streams by about 23%, and the number of false alarms by about 19%. However, the added information on CH evolution is not able to deliver more accurate speed values for the forecast than using the STEREO persistence model without CH information which performs better than an ACE based persistence model. Investigating the CH evolution between STEREO and Earth view for varying separation angles over ˜25-140° East of Earth, we derive some relation between expanding CHs and increasing solar wind speed, but a less clear relation for decaying CHs and decreasing solar wind speed. This fact most likely prevents the method from making more precise forecasts. The obtained results support a future L5 mission and show the importance and valuable contribution using multi-viewpoint data.

Coronal hole evolution from multi-viewpoint data as input for a STEREO solar wind speed persistence model

Directory of Open Access Journals (Sweden)

Temmer Manuela

2018-01-01

Full Text Available We present a concept study of a solar wind forecasting method for Earth, based on persistence modeling from STEREO in situ measurements combined with multi-viewpoint EUV observational data. By comparing the fractional areas of coronal holes (CHs extracted from EUV data of STEREO and SoHO/SDO, we perform an uncertainty assessment derived from changes in the CHs and apply those changes to the predicted solar wind speed profile at 1 AU. We evaluate the method for the time period 2008–2012, and compare the results to a persistence model based on ACE in situ measurements and to the STEREO persistence model without implementing the information on CH evolution. Compared to an ACE based persistence model, the performance of the STEREO persistence model which takes into account the evolution of CHs, is able to increase the number of correctly predicted high-speed streams by about 12%, and to decrease the number of missed streams by about 23%, and the number of false alarms by about 19%. However, the added information on CH evolution is not able to deliver more accurate speed values for the forecast than using the STEREO persistence model without CH information which performs better than an ACE based persistence model. Investigating the CH evolution between STEREO and Earth view for varying separation angles over ∼25–140° East of Earth, we derive some relation between expanding CHs and increasing solar wind speed, but a less clear relation for decaying CHs and decreasing solar wind speed. This fact most likely prevents the method from making more precise forecasts. The obtained results support a future L5 mission and show the importance and valuable contribution using multi-viewpoint data.

Physics of the Solar Active Regions from Radio Observations

Science.gov (United States)

Gelfreikh, G. B.

1999-12-01

Localized increase of the magnetic field observed by routine methods on the photosphere result in the growth of a number of active processes in the solar atmosphere and the heliosphere. These localized regions of increased magnetic field are called active regions (AR). The main processes of transfer, accumulation and release of energy in an AR is, however, out of scope of photospheric observations being essentially a 3D-process and happening either under photosphere or up in the corona. So, to investigate these plasma structures and processes we are bound to use either extrapolation of optical observational methods or observations in EUV, X-rays and radio. In this review, we stress and illustrate the input to the problem gained from radio astronomical methods and discuss possible future development of their applicatications. Historically speaking each new step in developing radio technique of observations resulted in detecting some new physics of ARs. The most significant progress in the last few years in radio diagnostics of the plasma structures of magnetospheres of the solar ARs is connected with the developing of the 2D full disk analysis on regular basis made at Nobeyama and detailed multichannel spectral-polarization (but one-dimensional and one per day) solar observations at the RATAN-600. In this report the bulk of attention is paid to the new approach to the study of solar activity gained with the Nobeyama radioheliograph and analyzing the ways for future progress. The most important new features of the multicomponent radio sources of the ARs studied using Nobeyama radioheliograph are as follow: 1. The analysis of magnetic field structures in solar corona above sunspot with 2000 G. Their temporal evolution and fluctuations with the periods around 3 and 5 minutes, due to MHD-waves in sunspot magnetic tubes and surrounding plasma. These investigations are certainly based on an analysis of thermal cyclotron emission of lower corona and CCTR above sunspot

An extreme ultraviolet wave associated with a failed eruption observed by the Solar Dynamics Observatory

Science.gov (United States)

Zheng, R.; Jiang, Y.; Yang, J.; Bi, Y.; Hong, J.; Yang, B.; Yang, D.

2012-05-01

Aims: Taking advantage of the high temporal and spatial resolution of the Solar Dynamics Observatory (SDO) observations, we present an extreme ultraviolet (EUV) wave associated with a failed filament eruption that generated no coronal mass ejection (CME) on 2011 March 1. We aim at understanding the nature and origin of this EUV wave. Methods: Combining the high-quality observations in the photosphere, the chromosphere, and the corona, we studied the characteristics of the wave and its relations to the associated eruption. Results: The event occurred at an ephemeral region near a small active region. The continuous magnetic flux cancelation in the ephemeral region produced pre-eruption brightenings and two EUV jets, and excited the filament eruption, accompanying it with a microflare. After the eruption, the filament material appeared far from the eruption center, and the ambient loops seemed to be intact. It was evident that the filament eruption had failed and was not associated with a CME. The wave happened just after the north jet arrived, and apparently emanated ahead of the north jet, far from the eruption center. The wave propagated at nearly constant velocities in the range of 260-350 km s-1, with a slight negative acceleration in the last phase. Remarkably, the wave continued to propagate, and a loop in its passage was intact when wave and loop met. Conclusions: Our analysis confirms that the EUV wave is a true wave, which we interpret as a fast-mode wave. In addition, the close temporal and spatial relationship between the wave and the jet provides evidence that the wave was likely triggered by the jet when the CME failed to happen. Three movies are available in electronic form at http://www.aanda.org

Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics

NARCIS (Netherlands)

Nedelcu, I.; van de Kruijs, R.W.E.; Yakshin, A. E.; von Blanckenhagen, G.; F. Bijkerk,

2008-01-01

We investigated the use of separation, or substrate recovery, layers (SRLs), to enable the reuse of optical substrates after the deposition of multilayer reflective coatings, in particular Mo/Si multilayers as used for EUV lithography. An organic material (polyimide), known from other work to reduce

Sensitivity of upper atmospheric emissions calculations to solar/stellar UV flux

Directory of Open Access Journals (Sweden)

Barthelemy Mathieu

2014-01-01

Full Text Available The solar UV (UltraViolet flux, especially the EUV (Extreme UltraViolet and FUV (Far UltraViolet components, is one of the main energetic inputs for planetary upper atmospheres. It drives various processes such as ionization, or dissociation which give rise to upper atmospheric emissions, especially in the UV and visible. These emissions are one of the main ways to investigate the upper atmospheres of planets. However, the uncertainties in the flux measurement or modeling can lead to biased estimates of fundamental atmospheric parameters, such as concentrations or temperatures in the atmospheres. We explore the various problems that can be identified regarding the uncertainties in solar/stellar UV flux by considering three examples. The worst case appears when the solar reflection component is dominant in the recorded spectrum as is seen for outer solar system measurements from HST (Hubble Space Telescope. We also show that the estimation of some particular line parameters (intensity and shape, especially Lyman α, is crucial, and that both total intensity and line profile are useful. In the case of exoplanets, the problem is quite critical since the UV flux of their parent stars is often very poorly known.

Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering.

Science.gov (United States)

Haase, Anton; Soltwisch, Victor; Braun, Stefan; Laubis, Christian; Scholze, Frank

2017-06-26

We investigate the influence of the Mo-layer thickness on the EUV reflectance of Mo/Si mirrors with a set of unpolished and interface-polished Mo/Si/C multilayer mirrors. The Mo-layer thickness is varied in the range from 1.7 nm to 3.05 nm. We use a novel combination of specular and diffuse intensity measurements to determine the interface roughness throughout the multilayer stack and do not rely on scanning probe measurements at the surface only. The combination of EUV and X-ray reflectivity measurements and near-normal incidence EUV diffuse scattering allows to reconstruct the Mo layer thicknesses and to determine the interface roughness power spectral density. The data analysis is conducted by applying a matrix method for the specular reflection and the distorted-wave Born approximation for diffuse scattering. We introduce the Markov-chain Monte Carlo method into the field in order to determine the respective confidence intervals for all reconstructed parameters. We unambiguously detect a threshold thickness for Mo in both sample sets where the specular reflectance goes through a local minimum correlated with a distinct increase in diffuse scatter. We attribute that to the known appearance of an amorphous-to-crystallization transition at a certain thickness threshold which is altered in our sample system by the polishing.

The first detection of ionized helium in the local ISM - EUVE and IUE spectroscopy of the hot DA white dwarf GD 246

Science.gov (United States)

Vennes, Stephane; Dupuis, Jean; Rumph, Todd; Drake, Jeremy; Bowyer, Stuart; Chayer, Pierre; Fontaine, Gilles

1993-01-01

We report observations of the extreme ultraviolet spectrum of the hot degenerate star GD 246 obtained with the EUVE. Our initial attempt at modeling the photospheric emission from the white dwarf reveals a relatively uncontaminated pure H spectrum in the range above 200 A, allowing a study of interstellar continuum absorption features in the line of sight of GD 246. Modeling of the He I autoionization transition discussed by Rumph et al. (1993), and the EUV continuum using the white dwarf as a source of background radiation provides measurements of both neutral and, for the first time, singly ionized He column densities in the local ISM (LISM). We estimate the He ionization fraction He II/(He I + He II) at roughly 25 percent with a total He column of 1.40-1.65 x 10 exp 18/sq cm. We have measured and compared H I column densities from the saturated Ly-alpha ISM absorption in IUE high-dispersion spectroscopy and from EUV continuum absorption: the two measurements are in good agreement with a total H column of 1.2-1.6 x 10 exp 19/sq cm. We discuss some implications for the nature of the LISM, particularly in the context of current models of the EUV radiation field.

A determination of the absolute radiant energy of a Robertson-Berger meter sunburn unit

Science.gov (United States)

DeLuisi, John J.; Harris, Joyce M.

Data from a Robertson-Berger (RB) sunburn meter were compared with concurrent measurements obtained with an ultraviolet double monochromator (DM), and the absolute energy of one sunburn unit measured by the RB-meter was determined. It was found that at a solar zenith angle of 30° one sunburn unit (SU) is equivalent to 35 ± 4 mJ cm -2, and at a solar zenith angle of 69°, one SU is equivalent to 20 ± 2 mJ cm -2 (relative to a wavelength of 297 nm), where the rate of change is non-linear. The deviation is due to the different response functions of the RB-meter and the DM system used to simulate the response of human skin to the incident u.v. solar spectrum. The average growth rate of the deviation with increasing solar zenith angle was found to be 1.2% per degree between solar zenith angles 30 and 50° and 2.3% per degree between solar zenith angles 50 and 70°. The deviations of response with solar zenith angle were found to be consistent with reported RB-meter characteristics.

Detecting EUV transients in near real time with ALEXIS

Energy Technology Data Exchange (ETDEWEB)

Roussel-Dupre`, D.; Bloch, J.J.; Theiler, J.; Pfafman, T.; Beauchesne, B.

1995-12-31

The Array of Low Energy X-ray Imaging Sensors (ALEXIS) experiment consists of a mini-satellite containing six wide angle EUV/ultrasoft X-ray telescopes (Priedhorsky et al. 1989, and Bloch et al. 1994). Its scientific objective is to map out the sky in three narrow ({Delta}E/E {approx} 5%) bandpasses around 66, 71, and 93 eV. During each 50 second satellite rotation period the six telescopes, each with a 30{degrees} field, of:view and a spatial resolution of 0.25{degrees}, scan most of the antisolar hemisphere of the sky. The project is a collaborative effort between Los Alamos National Laboratory, Sandia National Laboratory, and the University of California-Berkeley Space Sciences Laboratory. It is controlled entirely from a small ground station located at Los Alamos. The mission was launched on a Pegasus Air Launched Vehicle on April 25, 1993. An incident at launch delayed our ability to properly analyze the data until November of 1994. In January of 1995, we brought on line automated software to routinely carry out the transient search. After the data is downlinked from the satellite, the software processes and transforms it into sky maps that are automatically searched for new sources. The software then sends the results of these searches by e-mail to the science team within two hours of the downlink. This system has successfully detected the Cataclysmic Variables VW Hyi, U Gem and AR UMa in outburst, and has detected at least two unidentified short duration EUV transients (Roussel-Dupre et al 1995, Roussel-Dupre 1995).

Encasing the Absolutes

Directory of Open Access Journals (Sweden)

Uroš Martinčič

2014-05-01

Full Text Available The paper explores the issue of structure and case in English absolute constructions, whose subjects are deduced by several descriptive grammars as being in the nominative case due to its supposed neutrality in terms of register. This deduction is countered by systematic accounts presented within the framework of the Minimalist Program which relate the case of absolute constructions to specific grammatical factors. Each proposal is shown as an attempt of analysing absolute constructions as basic predication structures, either full clauses or small clauses. I argue in favour of the small clause approach due to its minimal reliance on transformations and unique stipulations. Furthermore, I propose that small clauses project a singular category, and show that the use of two cases in English absolute constructions can be accounted for if they are analysed as depictive phrases, possibly selected by prepositions. The case of the subject in absolutes is shown to be a result of syntactic and non-syntactic factors. I thus argue in accordance with Minimalist goals that syntactic case does not exist, attributing its role in absolutes to other mechanisms.

High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments

International Nuclear Information System (INIS)

Voronov, Dmitriy; Ahn, Minseung; Anderson, Erik; Cambie, Rossana; Chang, Chih-Hao; Goray, Leonid; Gullikson, Eric; Heilmann, Ralf; Salmassi, Farhad; Schattenburg, Mark; Warwick, Tony; Yashchuk, Valeriy; Padmore, Howard

2011-01-01

Multilayer coated blazed gratings with high groove density are the best candidates for use in high resolution EUV and soft x-ray spectroscopy. Theoretical analysis shows that such a grating can be potentially optimized for high dispersion and spectral resolution in a desired high diffraction order without significant loss of diffraction efficiency. In order to realize this potential, the grating fabrication process should provide a perfect triangular groove profile and an extremely smooth surface of the blazed facets. Here we report on recent progress achieved at the Advanced Light Source (ALS) in fabrication of high quality multilayer coated blazed gratings. The blazed gratings were fabricated using scanning beam interference lithography followed by wet anisotropic etching of silicon. A 200 nm period grating coated with a Mo/Si multilayer composed with 30 bi-layers demonstrated an absolute efficiency of 37.6percent in the 3rd diffraction order at 13.6 nm wavelength. The groove profile of the grating was thoroughly characterized with atomic force microscopy before and after the multilayer deposition. The obtained metrology data were used for simulation of the grating efficiency with the vector electromagnetic PCGrate-6.1 code. The simulations showed that smoothing of the grating profile during the multilayer deposition is the main reason for efficiency losses compared to the theoretical maximum. Investigation of the grating with cross-sectional transmission electron microscopy revealed a complex evolution of the groove profile in the course of the multilayer deposition. Impact of the shadowing and smoothing processes on growth of the multilayer on the surface of the sawtooth substrate is discussed.

The SolarPACES strategy for the solar thermal breakthrough

Energy Technology Data Exchange (ETDEWEB)

Burch, G.D. [U.S. Department of Energy, Washington, DC (United States)

1997-12-31

Our national solar thermal research programs and our combined efforts conducted through IEA/SolarPACES have brought about many breakthroughs in the development of solar thermal technology. We have components and systems that are much more efficient, much more reliable, and can be built much more cost-efficiently than just a few years ago. As our technology development proceeds, we undoubtedly will continue to make significant progress, breakthroughs in fact, in all these areas - progress that will bring us even closer to economic parity with more conventional forms of energy. And while this progress is absolutely necessary, the question is whether it will be enough to allow solar thermal to break into the mainstream of global energy supply. Our new IEA/SolarPACES strategy, crafted and approved over the course of the past year, has recognized the changes we must face and given us license to begin to make those changes. We must begin addressing financial hurdles, work to create a more favorable regulatory and tax environment, support development of international partnerships, and expand the visibility and excitement of solar thermal technology to achieve the final breakthroughs we need to allow solar thermal energy to live up to its vast potential. (orig./AKF)

Solar activity influence on climatic variations of stratosphere and mesosphere in mid-latitudes

International Nuclear Information System (INIS)

Taubenheim, J.; Entzian, G.; Voncossart, G.

1989-01-01

The direct modulation of temperature of the mid-latitude mesosphere by the solar-cycle EUV variation, which leads to greater heat input at higher solar activity, is well established. Middle atmosphere temperature modulation by the solar cycle is independently confirmed by the variation of reflection heights of low frequency radio waves in the lower ionosphere, which are regularly monitored over about 30 years. As explained elsewhere in detail, these reflection heights depend on the geometric altitude of a certain isobaric surface (near 80 k), and on the solar ionizing Lyman-alpha radiation flux. Knowing the solar cycle variation of Lyman-alpha how much the measured reflection heights would be lowered with the transition from solar minimum to maximum can be calculated, if the vertical baric structure of the neutral atmosphere would remain unchanged. Any discrepancy between expected and observed height change must be explained by an uplifting of the isobaric level from solar minimum to maximum, caused by the temperature rise in the mesosphere. By integrating the solar cycle temperature changes over the height region of the middle atmosphere, and assuming that the lower boundary (tropopause) has no solar cycle variation, the magnitude of this uplifting can be estimated. It is given for the Lidar-derived and for the rocket-measured temperature variations. Comparison suggests that the real amplitude of the solar cycle temperature variation in the mesosphere is underestimated when using the rocket data, but probably overestimated with the Lidar data

Absolute advantage

NARCIS (Netherlands)

J.G.M. van Marrewijk (Charles)

2008-01-01

textabstractA country is said to have an absolute advantage over another country in the production of a good or service if it can produce that good or service using fewer real resources. Equivalently, using the same inputs, the country can produce more output. The concept of absolute advantage can

The Solar Connections Observatory for Planetary Environments

Science.gov (United States)

Oliversen, Ronald J.; Harris, Walter M.; Oegerle, William R. (Technical Monitor)

2002-01-01

The NASA Sun-Earth Connection theme roadmap calls for comparative study of how the planets, comets, and local interstellar medium (LISM) interact with the Sun and respond to solar variability. Through such a study we advance our understanding of basic physical plasma and gas dynamic processes, thus increasing our predictive capabilities for the terrestrial, planetary, and interplanetary environments where future remote and human exploration will occur. Because the other planets have lacked study initiatives comparable to the terrestrial ITM, LWS, and EOS programs, our understanding of the upper atmospheres and near space environments on these worlds is far less detailed than our knowledge of the Earth. To close this gap we propose a mission to study {\\it all) of the solar interacting bodies in our planetary system out to the heliopause with a single remote sensing space observatory, the Solar Connections Observatory for Planetary Environments (SCOPE). SCOPE consists of a binocular EUV/FUV telescope operating from a remote, driftaway orbit that provides sub-arcsecond imaging and broadband medium resolution spectro-imaging over the 55-290 nm bandpass, and high (R>10$^{5}$ resolution H Ly-$\\alpha$ emission line profile measurements of small scale planetary and wide field diffuse solar system structures. A key to the SCOPE approach is to include Earth as a primary science target. From its remote vantage point SCOPE will be able to observe auroral emission to and beyond the rotational pole. The other planets and comets will be monitored in long duration campaigns centered when possible on solar opposition when interleaved terrestrial-planet observations can be used to directly compare the response of both worlds to the same solar wind stream and UV radiation field. Using a combination of observations and MHD models, SCOPE will isolate the different controlling parameters in each planet system and gain insight into the underlying physical processes that define the

Diagnostics of Coronal Heating in Solar Active Regions

Science.gov (United States)

Fludra, Andrzej; Hornsey, Christopher; Nakariakov, Valery

2015-04-01

We aim to develop a diagnostic method for the coronal heating mechanism in active region loops. Observational constraints on coronal heating models have been sought using measurements in the X-ray and EUV wavelengths. Statistical analysis, using EUV emission from many active regions, was done by Fludra and Ireland (2008) who studied power-law relationships between active region integrated magnetic flux and emission line intensities. A subsequent study by Fludra and Warren (2010) for the first time compared fully resolved images in an EUV spectral line of OV 63.0 nm with the photospheric magnetic field, leading to the identification of a dominant, ubiquitous variable component of the transition region EUV emission and a discovery of a steady basal heating, and deriving the dependence of the basal heating rate on the photospheric magnetic flux density. In this study, we compare models of single coronal loops with EUV observations. We assess to what degree observations of individual coronal loops made in the EUV range are capable of providing constraints on the heating mechanism. We model the coronal magnetic field in an active region using an NLFF extrapolation code applied to a photospheric vector magnetogram from SDO/HMI and select several loops that match an SDO/AIA 171 image of the same active region. We then model the plasma in these loops using a 1D hydrostatic code capable of applying an arbitrary heating rate as a function of magnetic field strength along the loop. From the plasma parameters derived from this model, we calculate the EUV emission along the loop in AIA 171 and 335 bands, and in pure spectral lines of Fe IX 17.1 nm and Fe XVI 33.5 nm. We use different spatial distributions of the heating function: concentrated near the loop top, uniform and concentrated near the footpoints, and investigate their effect on the modelled EUV intensities. We find a diagnostics based on the dependence of the total loop intensity on the shape of the heating function

A new sounding rocket payload for solar plasma studies

Science.gov (United States)

Bruner, Marilyn E.; Brown, William A.; Appert, Kevin L.

1989-01-01

A sounding rocket payload developed for studies of high-temperature plasmas associated with solar active regions and flares is described. The payload instruments will record both spectra and images in the UV, EUV, and soft X-ray regions of the spectrum. The instruments, including the Dual Range Spectrograph, the Flat Field Soft X-ray Spectrograph, the Normal Incidence Soft X-ray Imager, the UV Filtergraph, and the H-alpha Imaging system, are described. Attention is also given to the new structural system of the payload, based on a large optical table suspended within the payload cavity, which will support the optical elements in their correct positions and orientations and will maintain these alignments throughout the rocket launch environment.

Surface modification by EUV laser beam based on capillary discharge

Czech Academy of Sciences Publication Activity Database

Frolov, Oleksandr; Koláček, Karel; Schmidt, Jiří; Štraus, Jaroslav; Prukner, Václav; Shukurov, A.

-, č. 58 (2011), s. 484-487 ISSN 2010-376X. [International Conference on Fusion and Plasma Physics. Bali, Indonésie, 26.10.2011-28.10.2011] R&D Projects: GA AV ČR KAN300100702; GA MŠk LA08024; GA MŠk(CZ) LC528 Institutional research plan: CEZ:AV0Z20430508 Keywords : soft x-ray * EUV * laser * radiation * source * capillary * discharge * plasma * ablation * surface modification Subject RIV: BL - Plasma and Gas Discharge Physics http://www.waset.org/journals/waset/v58/v58-99.pdf

Signatures of Slow Solar Wind Streams from Active Regions in the Inner Corona

Science.gov (United States)

Slemzin, V.; Harra, L.; Urnov, A.; Kuzin, S.; Goryaev, F.; Berghmans, D.

2013-08-01

The identification of solar-wind sources is an important question in solar physics. The existing solar-wind models ( e.g., the Wang-Sheeley-Arge model) provide the approximate locations of the solar wind sources based on magnetic field extrapolations. It has been suggested recently that plasma outflows observed at the edges of active regions may be a source of the slow solar wind. To explore this we analyze an isolated active region (AR) adjacent to small coronal hole (CH) in July/August 2009. On 1 August, Hinode/EUV Imaging Spectrometer observations showed two compact outflow regions in the corona. Coronal rays were observed above the active-region coronal hole (ARCH) region on the eastern limb on 31 July by STEREO-A/EUVI and at the western limb on 7 August by CORONAS- Photon/TESIS telescopes. In both cases the coronal rays were co-aligned with open magnetic-field lines given by the potential field source surface model, which expanded into the streamer. The solar-wind parameters measured by STEREO-B, ACE, Wind, and STEREO-A confirmed the identification of the ARCH as a source region of the slow solar wind. The results of the study support the suggestion that coronal rays can represent signatures of outflows from ARs propagating in the inner corona along open field lines into the heliosphere.

On the Link between the Release of Solar Energetic Particles Measured at Widespread Heliolongitudes and the Properties of the Associated Coronal Shocks

Energy Technology Data Exchange (ETDEWEB)

Lario, D.; Kwon, R.-Y.; Raouafi, N. E. [The Johns Hopkins University Applied Physics Laboratory, 11100 Johns Hopkins Road Laurel, MD 20723 (United States); Riley, P., E-mail: david.lario@jhuapl.edu, E-mail: Nour.Eddine.Raouafi@jhuapl.edu, E-mail: ryunyoung.kwon@gmail.com, E-mail: pete@predsci.com [Predictive Science, 9990 Mesa Rim Road, Suite 170 San Diego, CA 92121 (United States)

2017-10-01

Under the paradigm that the main agents in the acceleration of solar energetic particles (SEPs) are shocks initially driven by coronal mass ejections, we analyze whether the properties of the shocks in the corona inferred from combining extreme-ultraviolet (EUV) and white-light (WL) observations from multiple vantage points together with magnetohydrodynamic (MHD) simulations of the corona can be used to determine the release of SEPs into different regions of the heliosphere and hence determine the longitudinal extent of the SEP events. We analyze the SEP events observed on 2011 November 3, 2013 April 11, and 2014 February 25 over a wide range of heliolongitudes. MHD simulations provide the characteristics of the background medium where shocks propagate, in particular the Alfvén and sound speed profiles that allow us to determine both the extent of the EUV waves in the low corona and the fast magnetosonic Mach number ( M {sub FM}) of the shocks. The extent of the EUV waves in the low corona is controlled by this background medium and does not coincide with the extent of the SEP events in the heliosphere. Within the uncertainties of (i) the extent and speed of the shock inferred from EUV and WL images and (ii) the assumptions made in the MHD models, we follow the evolution of M {sub FM} at the region of the shock magnetically connected to each spacecraft. The estimated release times of the first SEPs measured by each spacecraft does not coincide with the time when the M {sub FM} at this region exceeds a given threshold.

On the Link between the Release of Solar Energetic Particles Measured at Widespread Heliolongitudes and the Properties of the Associated Coronal Shocks

Science.gov (United States)

Lario, D.; Kwon, R.-Y.; Riley, P.; Raouafi, N. E.

2017-10-01

Under the paradigm that the main agents in the acceleration of solar energetic particles (SEPs) are shocks initially driven by coronal mass ejections, we analyze whether the properties of the shocks in the corona inferred from combining extreme-ultraviolet (EUV) and white-light (WL) observations from multiple vantage points together with magnetohydrodynamic (MHD) simulations of the corona can be used to determine the release of SEPs into different regions of the heliosphere and hence determine the longitudinal extent of the SEP events. We analyze the SEP events observed on 2011 November 3, 2013 April 11, and 2014 February 25 over a wide range of heliolongitudes. MHD simulations provide the characteristics of the background medium where shocks propagate, in particular the Alfvén and sound speed profiles that allow us to determine both the extent of the EUV waves in the low corona and the fast magnetosonic Mach number (M FM) of the shocks. The extent of the EUV waves in the low corona is controlled by this background medium and does not coincide with the extent of the SEP events in the heliosphere. Within the uncertainties of (I) the extent and speed of the shock inferred from EUV and WL images and (II) the assumptions made in the MHD models, we follow the evolution of M FM at the region of the shock magnetically connected to each spacecraft. The estimated release times of the first SEPs measured by each spacecraft does not coincide with the time when the M FM at this region exceeds a given threshold.

Recommendation for a set of solar EUV lines to be monitored for aeronomy applications

Directory of Open Access Journals (Sweden)

J. Lilensten

2007-06-01

Full Text Available In two recent studies, Dudok de Wit et al. (2005 and Kretzschmar et al. (2006 have shown that the solar Ultra-Violet spectrum between 25 and 195 nm can be reconstructed from the observation of a set of 6 to 10 carefully chosen spectral lines. The best set of lines, however, is application dependent. In this study, we demonstrate that a good candidate for aeronomy applications consists of the following 6 lines: H I at 102.572 nm, C III at 97.702 nm, O V at 62.973 nm, He I at 58.433 nm, Fe XV at 28.415 nm and He II at 30.378 nm. The TRANSCAR model is used to quantify the impact of each individual line on the density, temperature and velocity profiles. Using a multidimensional scaling technique, we show how to select from this the best set of lines. Although this selection is motivated by the specification of the ionosphere, our set of lines is also found to be appropriate for reconstructing the variability of the solar spectrum between 25 and 195 nm.

Solar Extreme UV radiation and quark nugget dark matter model

Energy Technology Data Exchange (ETDEWEB)

Zhitnitsky, Ariel, E-mail: arz@phas.ubc.ca [Department of Physics and Astronomy, University of British Columbia, Vancouver, B.C. V6T 1Z1 (Canada)

2017-10-01

We advocate the idea that the surprising emission of extreme ultra violet (EUV) radiation and soft x-rays from the Sun are powered externally by incident dark matter (DM) particles. The energy and the spectral shape of this otherwise unexpected solar irradiation is estimated within the quark nugget dark matter model. This model was originally invented as a natural explanation of the observed ratio Ω{sub dark} ∼ Ω{sub visible} when the DM and visible matter densities assume the same order of magnitude values. This generic consequence of the model is a result of the common origin of both types of matter which are formed during the same QCD transition and both proportional to the same fundamental dimensional parameter Λ{sub QCD}. We also present arguments suggesting that the transient brightening-like 'nanoflares' in the Sun may be related to the annihilation events which inevitably occur in the solar atmosphere within this dark matter scenario.

Initiation of Solar Eruptions: Recent Observations and Implications for Theories

Science.gov (United States)

Sterling, A. C.

2006-01-01

Solar eruptions involve the violent disruption of a system of magnetic field. Just how the field is destabilized and explodes to produce flares and coronal mass ejections (CMEs) is still being debated in the solar community. Here I discuss recent observational work into these questions by ourselves (me and my colleagues) and others. Our work has concentrated mainly on eruptions that include filaments. We use the filament motion early in the event as a tracer of the motion of the general erupting coronal field in and around the filament, since that field itself is hard to distinguish otherwise. Our main data sources are EUV images from SOHO/EIT and TRACE, soft Xray images from Yohkoh, and magnetograms from SOHO/MDI, supplemented with coronagraph images from SOHO/LASCO, hard X-ray data, and ground-based observations. We consider the observational findings in terms of three proposed eruption-initiation mechanisms: (i) runaway internal tether-cutting reconnection, (ii) slow external tether-cutting reconnection ("breakout"), and (iii) ideal MHD instability.

Solar Extreme UV radiation and quark nugget dark matter model

Science.gov (United States)

Zhitnitsky, Ariel

2017-10-01

We advocate the idea that the surprising emission of extreme ultra violet (EUV) radiation and soft x-rays from the Sun are powered externally by incident dark matter (DM) particles. The energy and the spectral shape of this otherwise unexpected solar irradiation is estimated within the quark nugget dark matter model. This model was originally invented as a natural explanation of the observed ratio Ωdark ~ Ωvisible when the DM and visible matter densities assume the same order of magnitude values. This generic consequence of the model is a result of the common origin of both types of matter which are formed during the same QCD transition and both proportional to the same fundamental dimensional parameter ΛQCD. We also present arguments suggesting that the transient brightening-like "nanoflares" in the Sun may be related to the annihilation events which inevitably occur in the solar atmosphere within this dark matter scenario.

Experimental and theoretical study on emission spectra of a nitrogen photoionized plasma induced by intense EUV pulses

Science.gov (United States)

Saber, Ismail; Bartnik, Andrzej; Skrzeczanowski, Wojciech; Wachulak, Przemyslaw; Jarocki, Roman; Fiedorowicz, Henryk; Limpouch, Jiri

2018-01-01

Spectral lines of low-temperature nitrogen photoionized plasma were investigated. The photoionized plasma was created in the result of irradiation N2 gas using laser plasma EUV radiation pulses. The source was based on a 10J/10ns Nd:YAG (λ = 1064 nm) laser system and a gas puff target. The EUV radiation pulses were collected and focused using a grazing incidence multifoil EUV collector. The emission spectra were measured in the ultraviolet and visible (UV/Vis) range. It was found that the plasma emission lines in the lower region of the UV range are relativley weak. Nonetheless, a part of the spectra contains strong molecular band in the 300 - 430 nm originated from second positive and first negative systems band transitions of nitrogen. These molecular band transitions were identified using a code for study the diatomic molecules, LIFBASE. The vibrational band of Δv = 0 and ±1 transitions were significantly populated than of that with Δv = ±2 and 3 transitions. A comparison of the calculated and measured spectrum is presented. With an assumption of a local thermodynamic equilibrium (LTE), the vibrational temperature was determined from the integrated band intensities with the help of the Boltzmann plot method and compared to the temperature predicted by SPECAIR and LIFBASE simulations. A summary of the results and the variations in the vibrational temperatures was discussed.

Experimental and theoretical study on emission spectra of a nitrogen photoionized plasma induced by intense EUV pulses

Directory of Open Access Journals (Sweden)

Saber Ismail

2018-01-01

Full Text Available Spectral lines of low-temperature nitrogen photoionized plasma were investigated. The photoionized plasma was created in the result of irradiation N2 gas using laser plasma EUV radiation pulses. The source was based on a 10J/10ns Nd:YAG (λ = 1064 nm laser system and a gas puff target. The EUV radiation pulses were collected and focused using a grazing incidence multifoil EUV collector. The emission spectra were measured in the ultraviolet and visible (UV/Vis range. It was found that the plasma emission lines in the lower region of the UV range are relativley weak. Nonetheless, a part of the spectra contains strong molecular band in the 300 - 430 nm originated from second positive and first negative systems band transitions of nitrogen. These molecular band transitions were identified using a code for study the diatomic molecules, LIFBASE. The vibrational band of Δv = 0 and ±1 transitions were significantly populated than of that with Δv = ±2 and 3 transitions. A comparison of the calculated and measured spectrum is presented. With an assumption of a local thermodynamic equilibrium (LTE, the vibrational temperature was determined from the integrated band intensities with the help of the Boltzmann plot method and compared to the temperature predicted by SPECAIR and LIFBASE simulations. A summary of the results and the variations in the vibrational temperatures was discussed.

THE TOTAL SOLAR IRRADIANCE CLIMATE DATA RECORD

Energy Technology Data Exchange (ETDEWEB)

Dewitte, Steven; Nevens, Stijn [Royal Meteorological Institute of Belgium, Ringlaan 3, B-1180 Brussels (Belgium)

2016-10-10

We present the composite measurements of total solar irradiance (TSI) as measured by an ensemble of space instruments. The measurements of the individual instruments are put on a common absolute scale, and their quality is assessed by intercomparison. The composite time series is the average of all available measurements. From 1984 April to the present the TSI shows a variation in phase with the 11 yr solar cycle and no significant changes of the quiet-Sun level in between the three covered solar minima.

Stellar observations with the Voyager EUV objective grating spectrograph

International Nuclear Information System (INIS)

Holberg, J.B.; Polidan, R.S.; Barry, D.C.

1986-01-01

During the periods of interplanetary cruise the Voyager ultraviolet spectrometers are used to provide unique and otherwise unobtainable observations in the extreme ultraviolet (EUV, 500 to 1200) and the far ultraviolet (FUV, 912 to 1220 A). These observations include the spectra of hot stellar sources as well as emission from the interplanetary medium. Recent results of note include: (1) extensive spectrophotometric coverage of a superoutburst of the dwarf nova VW Hydri, which showed a clear 1/2 day delay in the outburst at 1000 A relative to that observed in the optical and a curious dip in the FUV light curve near maximum light. The Voyager observations were part of a comprehensive and highly successful campaign involving EXOSAT, IUE and ground based observations of this dwarf nova; (2) a comprehensive study of Be star spectra and variability. These results show the critical importance of FUV observations in the study of the effects of stellar rotation in hot stars; (3) the detection of a strong O VI absorption feature in the spectrum of the PG 1159-like object H1504+65. This detection along with the optical identification of weak O IV lines was a key to the interpretation of this object; which is of extremely high (>150,000K) temperature and appears to be a unique example of a stellar atmosphere devoid of H and He; (4) an analysis of an extremely long duration spectrum of the EUV and FUV sky background, which establishes important new upper limits on both continuum and line emission. This result also provide the first detection of interplanetary Lyman gamma

Achieving Climate Change Absolute Accuracy in Orbit

Science.gov (United States)

Wielicki, Bruce A.; Young, D. F.; Mlynczak, M. G.; Thome, K. J; Leroy, S.; Corliss, J.; Anderson, J. G.; Ao, C. O.; Bantges, R.; Best, F.;

Protocol Monitoring Passive Solar Energy. Background document

International Nuclear Information System (INIS)

Van den Ham, E.R.

1998-01-01

A method has been developed by means of which the contribution of passive solar energy to the Dutch energy balance can be quantified univocally. The monitoring will be directed at the absolute amount of used solar energy, the relative contribution of passive solar energy to the energy demand in the Netherlands, and the average efficiency of passive solar energy systems. Based on a model of the total building stock the quantities to be monitored can be determined. The most important parameters in the model are: the window surface per orientation, the average U-value (heat transfer coefficient) of windows, the average ZTA-value (incoming solar radiation factor) of windows, and the presence of sun lounges and atriums

Solar filament material oscillations and drainage before eruption

International Nuclear Information System (INIS)

Bi, Yi; Jiang, Yunchun; Yang, Jiayan; Hong, Junchao; Li, Haidong; Yang, Dan; Yang, Bo

2014-01-01

Both large-amplitude longitudinal (LAL) oscillations and material drainage in a solar filament are associated with the flow of material along the filament axis, often followed by an eruption. However, the relationship between these two motions and a subsequent eruption event is poorly understood. We analyze a filament eruption using EUV imaging data captured by the Atmospheric Imaging Array on board the Solar Dynamics Observatory and the Hα images from the Global Oscillation Network Group. Hours before the eruption, the filament was activated, with one of its legs undergoing a slow rising motion. The asymmetric activation inclined the filament relative to the solar surface. After the active phase, LAL oscillations were observed in the inclined filament. The oscillation period increased slightly over time, which may suggest that the magnetic fields supporting the filament evolve to be flatter during the slow rising phase. After the oscillations, a significant amount of filament material was drained toward one filament endpoint, followed immediately by the violent eruption of the filament. The material drainage may further support the change in magnetic topology prior to the eruption. Moreover, we suggest that the filament material drainage could play a role in the transition from a slow to a fast rise of the erupting filament.

Uncovering New Thermal and Elastic Properties of Nanostructured Materials Using Coherent EUV Light

Science.gov (United States)

Hernandez Charpak, Jorge Nicolas

Advances in nanofabrication have pushed the characteristic dimensions of nanosystems well below 100nm, where physical properties are often significantly different from their bulk counterparts, and accurate models are lacking. Critical technologies such as thermoelectrics for energy harvesting, nanoparticle-mediated thermal therapy, nano-enhanced photovoltaics, and efficient thermal management in integrated circuits depend on our increased understanding of the nanoscale. However, traditional microscopic characterization tools face fundamental limits at the nanoscale. Theoretical efforts to build a fundamental picture of nanoscale thermal dynamics lack experimental validation and still struggle to account for newly reported behaviors. Moreover, precise characterization of the elastic behavior of nanostructured systems is needed for understanding the unique physics that become apparent in small-scale systems, such as thickness-dependent or fabrication-dependent elastic properties. In essence, our ability to fabricate nanosystems has outstripped our ability to understand and characterize them. In my PhD thesis, I present the development and refinement of coherent extreme ultraviolet (EUV) nanometrology, a novel tool used to probe material properties at the intrinsic time- and length-scales of nanoscale dynamics. By extending ultrafast photoacoustic and thermal metrology techniques to very short probing wavelengths using tabletop coherent EUV beams from high-harmonic upconversion (HHG) of femtosecond lasers, coherent EUV nanometrology allows for a new window into nanoscale physics, previously unavailable with traditional techniques. Using this technique, I was able to probe both thermal and acoustic dynamics in nanostructured systems with characteristic dimensions below 50nm with high temporal (sub-ps) and spatial (size and spacing of the nanoscale heat sources with the phonon spectrum of a material. This makes our technique one of the only experimental routes to

Plasma Surface Interactions Common to Advanced Fusion Wall Materials and EUV Lithography - Lithium and Tin

Science.gov (United States)

Ruzic, D. N.; Alman, D. A.; Jurczyk, B. E.; Stubbers, R.; Coventry, M. D.; Neumann, M. J.; Olczak, W.; Qiu, H.

2004-09-01

Advanced plasma facing components (PFCs) are needed to protect walls in future high power fusion devices. In the semiconductor industry, extreme ultraviolet (EUV) sources are needed for next generation lithography. Lithium and tin are candidate materials in both areas, with liquid Li and Sn plasma material interactions being critical. The Plasma Material Interaction Group at the University of Illinois is leveraging liquid metal experimental and computational facilities to benefit both fields. The Ion surface InterAction eXperiment (IIAX) has measured liquid Li and Sn sputtering, showing an enhancement in erosion with temperature for light ion bombardment. Surface Cleaning of Optics by Plasma Exposure (SCOPE) measures erosion and damage of EUV mirror samples, and tests cleaning recipes with a helicon plasma. The Flowing LIquid surface Retention Experiment (FLIRE) measures the He and H retention in flowing liquid metals, with retention coefficients varying between 0.001 at 500 eV to 0.01 at 4000 eV.

Absolutely relative or relatively absolute: violations of value invariance in human decision making.

Science.gov (United States)

Teodorescu, Andrei R; Moran, Rani; Usher, Marius

2016-02-01

Making decisions based on relative rather than absolute information processing is tied to choice optimality via the accumulation of evidence differences and to canonical neural processing via accumulation of evidence ratios. These theoretical frameworks predict invariance of decision latencies to absolute intensities that maintain differences and ratios, respectively. While information about the absolute values of the choice alternatives is not necessary for choosing the best alternative, it may nevertheless hold valuable information about the context of the decision. To test the sensitivity of human decision making to absolute values, we manipulated the intensities of brightness stimuli pairs while preserving either their differences or their ratios. Although asked to choose the brighter alternative relative to the other, participants responded faster to higher absolute values. Thus, our results provide empirical evidence for human sensitivity to task irrelevant absolute values indicating a hard-wired mechanism that precedes executive control. Computational investigations of several modelling architectures reveal two alternative accounts for this phenomenon, which combine absolute and relative processing. One account involves accumulation of differences with activation dependent processing noise and the other emerges from accumulation of absolute values subject to the temporal dynamics of lateral inhibition. The potential adaptive role of such choice mechanisms is discussed.

New solar irradiances for use in space research

Science.gov (United States)

Tobiska, W.; Bouwer, D.; Jones, A.

Space environment research applications require solar irradiances in a variety of time scales and spectral formats We describe the development of research grade modeled solar irradiances using four models and systems that are also used for space weather operations The four models systems include SOLAR2000 S2K SOLARFLARE SFLR APEX and IDAR which are used by Space Environment Technologies SET to provide solar irradiances from the soft X-rays through the visible spectrum SFLR uses the GOES 0 1--0 8 nm X-rays in combination with a Mewe model subroutine to provide 0 1--30 0 nm irradiances at 0 1 nm spectral resolution at 1 minute time resolution and in a 6-hour XUV--EUV spectral solar flare evolution forecast with a 7 minute latency and a 2 minute cadence These irradiances have been calibrated with the SORCE XPS observations and we report on the inclusion of these irradiances in the S2K model There are additional developments with S2K that we discuss particularly the method by which S2K is emerging as a hybrid model empirical plus physics-based and real-time data integration platform Numerous new solar indices have been recently developed for the operations community and we describe their inclusion in S2K The APEX system is a real-time data retrieval system developed under contract to the University of Southern California Space Sciences Center SSC to provide SOHO SEM data processing and distribution SSC provides the updated SEM data to the research community and SET provides the operational data to the space operations community We

MAGNETIC FLUX CANCELATION AS THE TRIGGER OF SOLAR QUIET-REGION CORONAL JETS

Energy Technology Data Exchange (ETDEWEB)

Panesar, Navdeep K.; Sterling, Alphonse C.; Moore, Ronald L. [Heliophysics and Planetary Science Office, ZP13, Marshall Space Flight Center, Huntsville, AL 35812 (United States); Chakrapani, Prithi, E-mail: navdeep.k.panesar@nasa.gov [Hunter College High School, New York, NY (United States)

2016-11-20

We report observations of 10 random on-disk solar quiet-region coronal jets found in high-resolution extreme ultraviolet (EUV) images from the Solar Dynamics Observatory ( SDO )/Atmospheric Imaging Assembly and having good coverage in magnetograms from the SDO /Helioseismic and Magnetic Imager (HMI). Recent studies show that coronal jets are driven by the eruption of a small-scale filament (called a minifilament ). However, the trigger of these eruptions is still unknown. In the present study, we address the question: what leads to the jet-driving minifilament eruptions? The EUV observations show that there is a cool-transition-region-plasma minifilament present prior to each jet event and the minifilament eruption drives the jet. By examining pre-jet evolutionary changes in the line of sight photospheric magnetic field, we observe that each pre-jet minifilament resides over the neutral line between majority-polarity and minority-polarity patches of magnetic flux. In each of the 10 cases, the opposite-polarity patches approach and merge with each other (flux reduction between 21% and 57%). After several hours, continuous flux cancelation at the neutral line apparently destabilizes the field holding the cool-plasma minifilament to erupt and undergo internal reconnection, and external reconnection with the surrounding coronal field. The external reconnection opens the minifilament field allowing the minifilament material to escape outward, forming part of the jet spire. Thus, we found that each of the 10 jets resulted from eruption of a minifilament following flux cancelation at the neutral line under the minifilament. These observations establish that magnetic flux cancelation is usually the trigger of quiet-region coronal jet eruptions.

A high resolution solar atlas for fluorescence calculations

Science.gov (United States)

Hearn, M. F.; Ohlmacher, J. T.; Schleicher, D. G.

1983-01-01

The characteristics required of a solar atlas to be used for studying the fluorescence process in comets are examined. Several sources of low resolution data were combined to provide an absolutely calibrated spectrum from 2250 A to 7000A. Three different sources of high resolution data were also used to cover this same spectral range. The low resolution data were then used to put each high resolution spectrum on an absolute scale. The three high resolution spectra were then combined in their overlap regions to produce a single, absolutely calibrated high resolution spectrum over the entire spectral range.

Multi-Spacecraft 3D differential emission measure tomography of the solar corona: STEREO results.

Science.gov (United States)

Vásquez, A. M.; Frazin, R. A.

We have recently developed a novel technique (called DEMT) for the em- pirical determination of the three-dimensional (3D) distribution of the so- lar corona differential emission measure through multi-spacecraft solar ro- tational tomography of extreme-ultaviolet (EUV) image time series (like those provided by EIT/SOHO and EUVI/STEREO). The technique allows, for the first time, to develop global 3D empirical maps of the coronal elec- tron temperature and density, in the height range 1.0 to 1.25 RS . DEMT constitutes a simple and powerful 3D analysis tool that obviates the need for structure specific modeling.

10 Years of Student Questions about the Sun and Solar Physics: Preparing Graduate Students to Work with Parker Solar Probe Data

Science.gov (United States)

Gross, N. A.; Hughes, W. J.; Wiltberger, M. J.

2017-12-01

The NSF funded CISM Space Weather Summer School is designed for graduate students who are just starting in space physics. It provides comprehensive conceptual background to the field. Insights about student understanding and learning from this summer school can provide valuable information to graduate instructors and graduate student mentors. During the school, students are invited to submit questions at the end of the lecture component each day. The lecturers then take the time to respond to these questions. We have collected over 4000 student questions over the last 15 years. A significant portion of the summer school schedule is devoted to solar physics and solar observations, and the questions submitted reflect this. As researchers prepare to work with graduate students who will analyze the data from the Parker Solar Probe, they should be aware of the sorts of questions these students will have as they start in the field. Some student questions are simply about definitions: - What is a facula/prominence/ribbon structure/arcade? - What is a Type 3 radio burst? - How is a solar flare defined? How is it different from a CME/energetic particle event? - What is the difference between "soft" and "hard" X-rays?Other student questions involve associations and correlations. - Why are solar flares associated with CME's? - Are all magnetic active regions associated with sunspots? - How does a prominence eruption compare to a CME? - Why do energetic particles follow the magnetic field lines but the solar wind does not? - Why are radio burst (F10.7 flux) associated with solar flares (EUV Flux)?Others can be topics of current research. - What is the source of the slow solar wind? - Why is there a double peak in the sunspot number the solar maximum? - Why is the corona hotter than the solar surface. What is the mechanism of coronal heating? The goal of this paper is to identify and categorize these questions for the community so that graduate educators can be aware of them

Controlling contamination in Mo/Si multilayer mirrors by Si surface capping modifications

Science.gov (United States)

Malinowski, Michael E.; Steinhaus, Chip; Clift, W. Miles; Klebanoff, Leonard E.; Mrowka, Stanley; Soufli, Regina

2002-07-01

The performance of Mo/Si multilayer mirrors (MLMs) used to reflect UV (EUV) radiation in an EUV + hydrocarbon (NC) vapor environment can be improved by optimizing the silicon capping layer thickness on the MLM in order to minimize the initial buildup of carbon on MLMs. Carbon buildup is undesirable since it can absorb EUV radiation and reduce MLM reflectivity. A set of Mo/Si MLMs deposited on Si wafers was fabricated such that each MLM had a different Si capping layer thickness ranging form 2 nm to 7 nm. Samples from each MLM wafer were exposed to a combination of EUV light + (HC) vapors at the Advanced Light Source (ALS) synchrotron in order to determine if the Si capping layer thickness affected the carbon buildup on the MLMs. It was found that the capping layer thickness had a major influence on this 'carbonizing' tendency, with the 3 nm layer thickness providing the best initial resistance to carbonizing and accompanying EUV reflectivity loss in the MLM. The Si capping layer thickness deposited on a typical EUV optic is 4.3 nm. Measurements of the absolute reflectivities performed on the Calibration and Standards beamline at the ALS indicated the EUV reflectivity of the 3 nm-capped MLM was actually slightly higher than that of the normal, 4 nm Si-capped sample. These results show that he use of a 3 nm capping layer represents an improvement over the 4 nm layer since the 3 nm has both a higher absolute reflectivity and better initial resistance to carbon buildup. The results also support the general concept of minimizing the electric field intensity at the MLM surface to minimize photoelectron production and, correspondingly, carbon buildup in a EUV + HC vapor environment.

CORONAL MAGNETIC FIELDS DERIVED FROM SIMULTANEOUS MICROWAVE AND EUV OBSERVATIONS AND COMPARISON WITH THE POTENTIAL FIELD MODEL

Energy Technology Data Exchange (ETDEWEB)

Miyawaki, Shun; Nozawa, Satoshi [Department of Science, Ibaraki University, Mito, Ibaraki 310-8512 (Japan); Iwai, Kazumasa; Shibasaki, Kiyoto [Nobeyama Solar Radio Observatory, National Astronomical Observatory of Japan, Minamimaki, Nagano 384-1305 (Japan); Shiota, Daikou, E-mail: shunmi089@gmail.com [Solar-Terrestrial Environment Laboratory, Nagoya University, Nagoya, Aichi 464-8601 (Japan)

2016-02-10

We estimated the accuracy of coronal magnetic fields derived from radio observations by comparing them to potential field calculations and the differential emission measure measurements using EUV observations. We derived line-of-sight components of the coronal magnetic field from polarization observations of the thermal bremsstrahlung in the NOAA active region 11150, observed around 3:00 UT on 2011 February 3 using the Nobeyama Radioheliograph at 17 GHz. Because the thermal bremsstrahlung intensity at 17 GHz includes both chromospheric and coronal components, we extracted only the coronal component by measuring the coronal emission measure in EUV observations. In addition, we derived only the radio polarization component of the corona by selecting the region of coronal loops and weak magnetic field strength in the chromosphere along the line of sight. The upper limits of the coronal longitudinal magnetic fields were determined as 100–210 G. We also calculated the coronal longitudinal magnetic fields from the potential field extrapolation using the photospheric magnetic field obtained from the Helioseismic and Magnetic Imager. However, the calculated potential fields were certainly smaller than the observed coronal longitudinal magnetic field. This discrepancy between the potential and the observed magnetic field strengths can be explained consistently by two reasons: (1) the underestimation of the coronal emission measure resulting from the limitation of the temperature range of the EUV observations, and (2) the underestimation of the coronal magnetic field resulting from the potential field assumption.

Where does the Thermospheric Ionospheric GEospheric Research (TIGER) Program go?

Science.gov (United States)

Schmidtke, G.; Avakyan, S. V.; Berdermann, J.; Bothmer, V.; Cessateur, G.; Ciraolo, L.; Didkovsky, L.; Dudok de Wit, T.; Eparvier, F. G.; Gottwald, A.; Haberreiter, M.; Hammer, R.; Jacobi, Ch.; Jakowski, N.; Kretzschmar, M.; Lilensten, J.; Pfeifer, M.; Radicella, S. M.; Schäfer, R.; Schmidt, W.; Solomon, S. C.; Thuillier, G.; Tobiska, W. K.; Wieman, S.; Woods, T. N.

2015-10-01

At the 10th Thermospheric Ionospheric GEospheric Research (TIGER/COSPAR) symposium held in Moscow in 2014 the achievements from the start of TIGER in 1998 were summarized. During that period, great progress was made in measuring, understanding, and modeling the highly variable UV-Soft X-ray (XUV) solar spectral irradiance (SSI), and its effects on the upper atmosphere. However, after more than 50 years of work the radiometric accuracy of SSI observation is still an issue and requires further improvement. Based on the extreme ultraviolet (EUV) data from the SOLAR/SolACES, and SDO/EVE instruments, we present a combined data set for the spectral range from 16.5 to 105.5 nm covering a period of 3.5 years from 2011 through mid of 2014. This data set is used in ionospheric modeling of the global Total Electron Content (TEC), and in validating EUV SSI modeling. For further investigations the period of 3.5 years is being extended to about 12 years by including data from SOHO/SEM and TIMED/SEE instruments. Similarly, UV data are used in modeling activities. After summarizing the results, concepts are proposed for future real-time SSI measurements with in-flight calibration as experienced with the ISS SOLAR payload, for the development of a space weather camera for observing and investigating space weather phenomena in real-time, and for providing data sets for SSI and climate modeling. Other planned topics are the investigation of the relationship between solar EUV/UV and visible/near-infrared emissions, the impact of X-rays on the upper atmosphere, the development of solar EUV/UV indices for different applications, and establishing a shared TIGER data system for EUV/UV SSI data distribution and real-time streaming, also taking into account the achievements of the FP7 SOLID (First European SOLar Irradiance Data Exploitation) project. For further progress it is imperative that coordinating activities in this special field of solar-terrestrial relations and solar physics is

Martian Electron Temperatures in the Sub Solar Region.

Science.gov (United States)

Fowler, C. M.; Peterson, W. K.; Andersson, L.; Thiemann, E.; Mayyasi, M.; Yelle, R. V.; Benna, M.; Espley, J. R.

2017-12-01

Observations from Viking, and MAVEN have shown that the observed ionospheric electron temperatures are systematically higher than those predicted by many models. Because electron temperature is a balance between heating, cooling, and heat transport, we systematically compare the magnitude of electron heating from photoelectrons, electron cooling and heat transport, as a function of altitude within 30 degrees of the sub solar point. MAVEN observations of electron temperature and density, EUV irradiance, neutral and ion composition are used to evaluate terms in the heat equation following the framework of Matta et al. (Icarus, 2014, doi:10.1016/j.icarus.2013.09.006). Our analysis is restricted to inbound orbits where the magnetic field is within 30 degrees of horizontal. MAVEN sampled the sub solar region in May 2015 and again in May 2017, in near northern spring equinoctial conditions. Solar activity was higher and the spacecraft sampled altitudes down to 120 km in 2015, compared to 160 km in 2017. We find that between 160 and 200 km the Maven electron temperatures are in thermal equilibrium, in the sub solar region, on field lines inclined less than 30 degrees to the horizontal. Above 200km the data suggest that heating from other sources, such as wave heating are significant. Below 160 km some of the discrepancy comes from measurement limitations. This is because the MAVEN instrument cannot resolve the lowest electron temperatures, and because some cooling rates scale as the difference between the electron and neutral temperatures.

Negative-tone imaging with EUV exposure for 14nm hp and beyond

Science.gov (United States)

Tsubaki, Hideaki; Nihashi, Wataru; Tsuchihashi, Toru; Fujimori, Toru; Momota, Makoto; Goto, Takahiro

2015-03-01

Manipulation of dissolution properties by changing organic solvent developer and rinse material provides a novel technology to obtain fine pattern beyond the limitation of imaging system based on alkaline developer. QCM study showed no swelling character in negative-tone imaging (NTI) process even for current developer of n-butyl acetate (nBA). Actually, NTI process has shown advantages on resolution and line-width roughness (LWR) in loose pitch around 30 ~ 45 nm hp as a consequence of its non-swelling character. On the other hand, bridge and collapse limited its resolution below 20 nm hp, indicating that non-negligible amount of swelling still exists for tight pitch resolution. We investigated effects of solubility parameter of organic solvents on resolution below 20 nm hp. A bridge was reduced with a decrease in the solubility parameter dp from nBA. On the other hand, much lower dp caused film remaining due to its extremely slow Rmax. Based on these results, we newly developed FN-DP301 containing organic solvent with smaller dp than nBA. Although rinse solvent gave negligible effects on bridge, there is a clear improvement on pattern collapse only in case of using new rinse solvent of FN-RP311. Lithographic performances of NTI process using nBA and FN-DP301 together with the other organic solvents were described in this paper under exposures with an E-beam and a EUV light. It is emphasized that 14 nm hp resolution was obtained only using FN-DP301 as a developer and FN-RP311 as a rinse under E-beam exposure. NTI showed 43% faster photospeed in comparison with PTI at 16 nm hp, indicating that NTI is applicable to obtain high throughput with maintaining resolution. In addition, sub-20 nm trench was obtained using NTI without bridge under EUV exposure, all of which are attributed to the low swelling character of NTI process. Similarly, NTI was able to print 20 nm dots using NXE:3100 with only a little peeling. Conversely CH patterning was significantly worse with NTI

Estimate of the global-scale joule heating rates in the thermosphere due to time mean currents

International Nuclear Information System (INIS)

Roble, R.G.; Matsushita, S.

1975-01-01

An estimate of the global-scale joule heating rates in the thermosphere is made based on derived global equivalent overhead electric current systems in the dynamo region during geomagnetically quiet and disturbed periods. The equivalent total electric field distribution is calculated from Ohm's law. The global-scale joule heating rates are calculated for various monthly average periods in 1965. The calculated joule heating rates maximize at high latitudes in the early evening and postmidnight sectors. During geomagnetically quiet times the daytime joule heating rates are considerably lower than heating by solar EUV radiation. However, during geomagnetically disturbed periods the estimated joule heating rates increase by an order of magnitude and can locally exceed the solar EUV heating rates. The results show that joule heating is an important and at times the dominant energy source at high latitudes. However, the global mean joule heating rates calculated near solar minimum are generally small compared to the global mean solar EUV heating rates. (auth)

A hybrid system for solar irradiance specification

Science.gov (United States)

Tobiska, W.; Bouwer, S.

2006-12-01

Space environment research and space weather operations require solar irradiances in a variety of time scales and spectral formats. We describe the development of solar irradiance characterization using four models and systems that are also used for space weather operations. The four models/systems include SOLAR2000 (S2K), SOLARFLARE (SFLR), APEX, and IDAR, which are used by Space Environment Technologies (SET) to provide solar irradiances from the soft X-rays through the visible spectrum. SFLR uses the GOES 0.1 0.8 nm X-rays in combination with a Mewe model subroutine to provide 0.1 30.0 nm irradiances at 0.1 nm spectral resolution, at 1 minute time resolution, and in a 6-hour XUV EUV spectral solar flare evolution forecast with a 7 minute latency and a 2 minute cadence. These irradiances have been calibrated with the SORCE XPS observations and we report on the inclusion of these irradiances into the S2K model. The APEX system is a real-time data retrieval system developed in conjunction with the University of Southern California Space Sciences Center (SSC) to provide SOHO SEM data processing and distribution. SSC provides the updated SEM data to the research community and SET provides the operational data to the space operations community. We describe how the SOHO SEM data, and especially the new S10.7 index, is being integrated directly into the S2K model for space weather operations. The IDAR system has been developed by SET to extract coronal hole boundaries, streamers, coronal loops, active regions, plage, network, and background (internetwork) features from solar images for comparison with solar magnetic features. S2K, SFLR, APEX, and IDAR outputs are integrated through the S2K solar irradiance platform that has become a hybrid system, i.e., a system that is able to produce irradiances using different processes, including empirical and physics-based models combined with real-time data integration.

Uncooled Radiation Hard Large Area SiC X-ray and EUV Detectors and 2D Arrays, Phase II

Data.gov (United States)

National Aeronautics and Space Administration — This project seeks to design, fabricate, characterize and commercialize large area, uncooled and radiative hard 4H-SiC EUV ? soft X-ray detectors capable of ultra...

Actinic inspection of EUV reticles with arbitrary pattern design

Science.gov (United States)

Mochi, Iacopo; Helfenstein, Patrick; Rajeev, Rajendran; Fernandez, Sara; Kazazis, Dimitrios; Yoshitake, Shusuke; Ekinci, Yasin

2017-10-01

The re ective-mode EUV mask scanning lensless imaging microscope (RESCAN) is being developed to provide actinic mask inspection capabilities for defects and patterns with high resolution and high throughput, for 7 nm node and beyond. Here we, will report on our progress and present the results on programmed defect detection on random, logic-like patterns. The defects we investigated range from 200 nm to 50 nm size on the mask. We demonstrated the ability of RESCAN to detect these defects in die-to-die and die-to-database mode with a high signal to noise ratio. We also describe future plans for the upgrades to increase the resolution, the sensitivity, and the inspection speed of the demo tool.

A new sounding rocket payload for solar plasma studies

International Nuclear Information System (INIS)

Bruner, M.E.; Brown, W.A.; Appert, K.L.

1989-01-01

A sounding rocket payload developed for studies of high-temperature plasmas associated with solar active regions and flares is described. The payload instruments will record both spectra and images in the UV, EUV, and soft X-ray regions of the spectrum. The instruments, including the Dual Range Spectrograph, the Flat Field Soft X-ray Spectrograph, the Normal Incidence Soft X-ray Imager, the UV Filtergraph, and the H-alpha Imaging system, are described. Attention is also given to the new structural system of the payload, based on a large optical table suspended within the payload cavity, which will support the optical elements in their correct positions and orientations and will maintain these alignments throughout the rocket launch environment. 8 refs

Gibbsian segregating alloys driven by thermal and concentration gradients: A potential grazing collector optics used in EUV lithography

Science.gov (United States)

Qiu, Huatan

A critical issue for EUV lithography is the minimization of collector degradation from intense plasma erosion and debris deposition. Reflectivity and lifetime of the collector optics will be heavily dependent on surface chemistry interactions between fuels and various mirror materials, in addition to high-energy ion and neutral particle erosion effects. An innovative Gibbsian segregation (GS) concept has been developed for being a self-healing, erosion-resistant collector optics. A Mo-Au GS alloy is developed on silicon using a DC dual-magnetron co-sputtering system in order for enhanced surface roughness properties, erosion resistance, and self-healing characteristics to maintain reflectivity over a longer period of mirror lifetime. A thin Au segregating layer will be maintained through segregation during exposure, even though overall erosion is taking place. The reflective material, Mo, underneath the segregating layer will be protected by this sacrificial layer which is lost due to preferential sputtering. The two dominant driving forces, thermal (temperature) and surface concentration gradient (surface removal flux), are the focus of this work. Both theoretical and experimental efforts have been performed to prove the effectiveness of the GS alloy used as EUV collection optics, and to elucidate the underlying physics behind it. The segregation diffusion, surface balance, erosion, and in-situ reflectivity will be investigated both qualitatively and quantitatively. Results show strong enhancement effect of temperature on GS performance, while only a weak effect of surface removal rate on GS performance. When equilibrium between GS and erosion is reached, the surface smoothness could be self-healed and reflectivity could be maintained at an equilibrium level, instead of continuously dropping down to an unacceptable level as conventional optic mirrors behave. GS process also shows good erosion resistance. The effectiveness of GS alloy as EUV mirror is dependent on

DISTANCES TO FOUR SOLAR NEIGHBORHOOD ECLIPSING BINARIES FROM ABSOLUTE FLUXES

International Nuclear Information System (INIS)

Wilson, R. E.; Van Hamme, W.

2009-01-01

Eclipsing binary (EB)-based distances are estimated for four solar neighborhood EBs by means of the Direct Distance Estimation (DDE) algorithm. Results are part of a project to map the solar neighborhood EBs in three dimensions, independently of parallaxes, and provide statistical comparisons between EB and parallax distances. Apart from judgments on adopted temperature and interstellar extinction, DDE's simultaneous light-velocity solutions are essentially objective and work as well for semidetached (SD) and overcontact binaries as for detached systems. Here, we analyze two detached and two SD binaries, all double lined. RS Chamaeleontis is a pre-main-sequence (MS), detached EB with weak δ Scuti variations. WW Aurigae is detached and uncomplicated, except for having high metallicity. RZ Cassiopeiae is SD and has very clear δ Scuti variations and several peculiarities. R Canis Majoris (R CMa) is an apparently simple but historically problematic SD system, also with weak δ Scuti variations. Discussions include solution rules and strategies, weighting, convergence, and third light problems. So far there is no indication of systematic band dependence among the derived distances, so the adopted band-calibration ratios seem consistent. Agreement of EB-based and parallax distances is typically within the overlapped uncertainties, with minor exceptions. We also suggest an explanation for the long-standing undermassiveness problem of R CMa's hotter component, in terms of a fortuitous combination of low metallicity and evolution slightly beyond the MS.

MODELING MAGNETIC FIELD STRUCTURE OF A SOLAR ACTIVE REGION CORONA USING NONLINEAR FORCE-FREE FIELDS IN SPHERICAL GEOMETRY

International Nuclear Information System (INIS)

Guo, Y.; Ding, M. D.; Liu, Y.; Sun, X. D.; DeRosa, M. L.; Wiegelmann, T.

2012-01-01

We test a nonlinear force-free field (NLFFF) optimization code in spherical geometry using an analytical solution from Low and Lou. Several tests are run, ranging from idealized cases where exact vector field data are provided on all boundaries, to cases where noisy vector data are provided on only the lower boundary (approximating the solar problem). Analytical tests also show that the NLFFF code in the spherical geometry performs better than that in the Cartesian one when the field of view of the bottom boundary is large, say, 20° × 20°. Additionally, we apply the NLFFF model to an active region observed by the Helioseismic and Magnetic Imager on board the Solar Dynamics Observatory (SDO) both before and after an M8.7 flare. For each observation time, we initialize the models using potential field source surface (PFSS) extrapolations based on either a synoptic chart or a flux-dispersal model, and compare the resulting NLFFF models. The results show that NLFFF extrapolations using the flux-dispersal model as the boundary condition have slightly lower, therefore better, force-free, and divergence-free metrics, and contain larger free magnetic energy. By comparing the extrapolated magnetic field lines with the extreme ultraviolet (EUV) observations by the Atmospheric Imaging Assembly on board SDO, we find that the NLFFF performs better than the PFSS not only for the core field of the flare productive region, but also for large EUV loops higher than 50 Mm.

FIRST MEASUREMENTS OF THE MASS OF CORONAL MASS EJECTIONS FROM THE EUV DIMMING OBSERVED WITH STEREO EUVI A+B SPACECRAFT

International Nuclear Information System (INIS)

Aschwanden, Markus J.; Nitta, Nariaki V.; Wuelser, Jean-Pierre; Lemen, James R.; Sandman, Anne; Vourlidas, Angelos; Colaninno, Robin C.

2009-01-01

The masses of coronal mass ejections (CMEs) have traditionally been determined from white-light coronagraphs (based on Thomson scattering of electrons), as well as from extreme ultraviolet (EUV) dimming observed with one spacecraft. Here we develop an improved method of measuring CME masses based on EUV dimming observed with the dual STEREO/EUVI spacecraft in multiple temperature filters that includes three-dimensional volume and density modeling in the dimming region and background corona. As a test, we investigate eight CME events with previous mass determinations from STEREO/COR2, of which six cases are reliably detected with the Extreme Ultraviolet Imager (EUVI) using our automated multi-wavelength detection code. We find CME masses in the range of m CME = (2-7) x 10 15 g. The agreement between the two EUVI/A and B spacecraft is m A /m B = 1.3 ± 0.6 and the consistency with white-light measurements by COR2 is m EUVI /m COR2 = 1.1 ± 0.3. The consistency between EUVI and COR2 implies no significant mass backflows (or inflows) at r sun and adequate temperature coverage for the bulk of the CME mass in the range of T ∼ 0.5-3.0 MK. The temporal evolution of the EUV dimming allows us to also model the evolution of the CME density n e (t), volume V(t), height-time h(t), and propagation speed v(t) in terms of an adiabatically expanding self-similar geometry. We determine e-folding EUV dimming times of t D = 1.3 ± 1.4 hr. We test the adiabatic expansion model in terms of the predicted detection delay (Δt ∼ 0.7 hr) between EUVI and COR2 for the fastest CME event (2008 March 25) and find good agreement with the observed delay (Δt ∼ 0.8 hr).

Automatic solar image motion measurements. [electronic disk flux monitoring

Science.gov (United States)

Colgate, S. A.; Moore, E. P.

1975-01-01

The solar seeing image motion has been monitored electronically and absolutely with a 25 cm telescope at three sites along the ridge at the southern end of the Magdalena Mountains west of Socorro, New Mexico. The uncorrelated component of the variations of the optical flux from two points at opposite limbs of the solar disk was continually monitored in 3 frequencies centered at 0.3, 3 and 30 Hz. The frequency band of maximum signal centered at 3 Hz showed the average absolute value of image motion to be somewhat less than 2sec. The observer estimates of combined blurring and image motion were well correlated with electronically measured image motion, but the observer estimates gave a factor 2 larger value.

Trends in NOAA Solar X-ray Imager Performance

Science.gov (United States)

Hill, Steven M.; Darnell, John A.; Seaton, Daniel B.

2016-05-01

NOAA has provided operational soft X-ray imaging of the sun since the early 2000’s. After 15 years of observations by four different telescopes, it is appropriate to examine the data in terms of providing consistent context for scientific missions. In particular, this presentation examines over 7 million GOES Solar X-ray Imager (SXI) images for trends in performance parameters including dark current, response degradation, and inter-calibration. Because observations from the instrument have overlapped not only with each other, but also with research observations like Yohkoh SXT and Hinode XRT, relative performance comparisons can be made. The first GOES Solar X-ray Imager was launched in 2001 and entered operations in 2003. The current SXIs will remain in operations until approximately 2020, when a new series of Solar (extreme-)Ultraviolet Imagers (SUVIs) will replace them as the current satellites reach their end of life. In the sense that the SXIs are similar to Yokoh’s SXT and Hinode’s XRT, the SUVI instruments will be similar to SOHO’s EIT and SDO’s AIA. The move to narrowband EUV imagers will better support eventual operational estimation of plasma conditions. While NOAA’s principal use of these observations is real-time space weather forecasting, they will continue to provide a reliable context measurement for researchers for decades to come.

Oxide nanoparticle EUV resists: toward understanding the mechanism of positive and negative tone patterning

KAUST Repository

Chakrabarty, Souvik; Ouyang, Christine; Krysak, Marie; Trikeriotis, Markos; Cho, Kyoungyoung; Giannelis, Emmanuel P.; Ober, Christopher K.

2013-01-01

DUV, EUV and e-beam patterning of hybrid nanoparticle photoresists have been reported previously by Ober and coworkers. The present work explores the underlying mechanism that is responsible for the dual tone patterning capability of these photoresist materials. Spectroscopic results correlated with mass loss and dissolution studies suggest a ligand exchange mechanism responsible for altering the solubility between the exposed and unexposed regions. © 2013 SPIE.

Oxide nanoparticle EUV resists: toward understanding the mechanism of positive and negative tone patterning

KAUST Repository

Chakrabarty, Souvik

2013-04-01

DUV, EUV and e-beam patterning of hybrid nanoparticle photoresists have been reported previously by Ober and coworkers. The present work explores the underlying mechanism that is responsible for the dual tone patterning capability of these photoresist materials. Spectroscopic results correlated with mass loss and dissolution studies suggest a ligand exchange mechanism responsible for altering the solubility between the exposed and unexposed regions. © 2013 SPIE.

ABSOLUTE NEUTRINO MASSES

DEFF Research Database (Denmark)

Schechter, J.; Shahid, M. N.

2012-01-01

We discuss the possibility of using experiments timing the propagation of neutrino beams over large distances to help determine the absolute masses of the three neutrinos.......We discuss the possibility of using experiments timing the propagation of neutrino beams over large distances to help determine the absolute masses of the three neutrinos....

CORONAL JETS SIMULATED WITH THE GLOBAL ALFVÉN WAVE SOLAR MODEL

Energy Technology Data Exchange (ETDEWEB)

Szente, J.; Toth, G.; Manchester IV, W. B.; Holst, B. van der; Landi, E.; Gombosi, T. I. [Climate and Space Sciences and Engineering Department, University of Michigan, Ann Arbor, MI 48109 (United States); DeVore, C. R.; Antiochos, S. K., E-mail: judithsz@umich.edu [Heliophysics Science Division, NASA Goddard Space Flight Center, Greenbelt, MD 20771 (United States)

2017-01-10

This paper describes a numerical modeling study of coronal jets to understand their effects on the global corona and their contribution to the solar wind. We implement jets into a well-established three-dimensional, two-temperature magnetohydrodynamic (MHD) solar corona model employing Alfvén-wave dissipation to produce a realistic solar-wind background. The jets are produced by positioning a compact magnetic dipole under the solar surface and rotating the boundary plasma around the dipole's magnetic axis. The moving plasma drags the magnetic field lines along with it, ultimately leading to a reconnection-driven jet similar to that described by Pariat et al. We compare line-of-sight synthetic images to multiple jet observations at EUV and X-ray bands, and find very close matches in terms of physical structure, dynamics, and emission. Key contributors to this agreement are the greatly enhanced plasma density and temperature in our jets compared to previous models. These enhancements arise from the comprehensive thermodynamic model that we use and, also, our inclusion of a dense chromosphere at the base of our jet-generating regions. We further find that the large-scale corona is affected significantly by the outwardly propagating torsional Alfvén waves generated by our polar jet, across 40° in latitude and out to 24 R {sub ⊙}. We estimate that polar jets contribute only a few percent to the steady-state solar-wind energy outflow.

Extending CO2 cryogenic aerosol cleaning for advanced optical and EUV mask cleaning

Science.gov (United States)

Varghese, Ivin; Bowers, Charles W.; Balooch, Mehdi

2011-11-01

Cryogenic CO2 aerosol cleaning being a dry, chemically-inert and residue-free process is used in the production of optical lithography masks. It is an attractive cleaning option for the mask industry to achieve the requirement for removal of all printable soft defects and repair debris down to the 50nm printability specification. In the technique, CO2 clusters are formed by sudden expansion of liquid from high to almost atmospheric pressure through an optimally designed nozzle orifice. They are then directed on to the soft defects or debris for momentum transfer and subsequent damage free removal from the mask substrate. Unlike aggressive acid based wet cleaning, there is no degradation of the mask after processing with CO2, i.e., no critical dimension (CD) change, no transmission/phase losses, or chemical residue that leads to haze formation. Therefore no restriction on number of cleaning cycles is required to be imposed, unlike other cleaning methods. CO2 aerosol cleaning has been implemented for several years as full mask final clean in production environments at several state of the art mask shops. Over the last two years our group reported successful removal of all soft defects without damage to the fragile SRAF features, zero adders (from the cleaning and handling mechanisms) down to a 50nm printability specification. In addition, CO2 aerosol cleaning is being utilized to remove debris from Post-RAVE repair of hard defects in order to achieve the goal of no printable defects. It is expected that CO2 aerosol cleaning can be extended to extreme ultraviolet (EUV) masks. In this paper, we report advances being made in nozzle design qualification for optimum snow properties (size, velocity and flux) using Phase Doppler Anemometry (PDA) technique. In addition the two new areas of focus for CO2 aerosol cleaning i.e. pellicle glue residue removal on optical masks, and ruthenium (Ru) film on EUV masks are presented. Usually, the residue left over after the pellicle

Observations of Reconnection Flows in a Flare on the Solar Disk

Energy Technology Data Exchange (ETDEWEB)

Wang, Juntao; Simões, P. J. A.; Jeffrey, N. L. S.; Fletcher, L.; Wright, P. J.; Hannah, I. G., E-mail: j.wang.4@research.gla.ac.uk [SUPA, School of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)

2017-09-20

Magnetic reconnection is a well-accepted part of the theory of solar eruptive events, though the evidence is still circumstantial. Intrinsic to the reconnection picture of a solar eruptive event, particularly in the standard model for two-ribbon flares (CSHKP model), are an advective flow of magnetized plasma into the reconnection region, expansion of field above the reconnection region as a flux rope erupts, retraction of heated post-reconnection loops, and downflows of cooling plasma along those loops. We report on a unique set of Solar Dynamics Observatory /Atmospheric Imaging Assembly imaging and Hinode /EUV Imaging Spectrometer spectroscopic observations of the disk flare SOL2016-03-23T03:54 in which all four flows are present simultaneously. This includes spectroscopic evidence for a plasma upflow in association with large-scale expanding closed inflow field. The reconnection inflows are symmetric, and consistent with fast reconnection, and the post-reconnection loops show a clear cooling and deceleration as they retract. Observations of coronal reconnection flows are still rare, and most events are observed at the solar limb, obscured by complex foregrounds, making their relationship to the flare ribbons, cusp field, and arcades formed in the lower atmosphere difficult to interpret. The disk location and favorable perspective of this event have removed these ambiguities giving a clear picture of the reconnection dynamics.

Observations of Reconnection Flows in a Flare on the Solar Disk

International Nuclear Information System (INIS)

Wang, Juntao; Simões, P. J. A.; Jeffrey, N. L. S.; Fletcher, L.; Wright, P. J.; Hannah, I. G.

2017-01-01

Magnetic reconnection is a well-accepted part of the theory of solar eruptive events, though the evidence is still circumstantial. Intrinsic to the reconnection picture of a solar eruptive event, particularly in the standard model for two-ribbon flares (CSHKP model), are an advective flow of magnetized plasma into the reconnection region, expansion of field above the reconnection region as a flux rope erupts, retraction of heated post-reconnection loops, and downflows of cooling plasma along those loops. We report on a unique set of Solar Dynamics Observatory /Atmospheric Imaging Assembly imaging and Hinode /EUV Imaging Spectrometer spectroscopic observations of the disk flare SOL2016-03-23T03:54 in which all four flows are present simultaneously. This includes spectroscopic evidence for a plasma upflow in association with large-scale expanding closed inflow field. The reconnection inflows are symmetric, and consistent with fast reconnection, and the post-reconnection loops show a clear cooling and deceleration as they retract. Observations of coronal reconnection flows are still rare, and most events are observed at the solar limb, obscured by complex foregrounds, making their relationship to the flare ribbons, cusp field, and arcades formed in the lower atmosphere difficult to interpret. The disk location and favorable perspective of this event have removed these ambiguities giving a clear picture of the reconnection dynamics.

Statistical Study of Solar Dimmings Using CoDiT

International Nuclear Information System (INIS)

Krista, Larisza D.; Reinard, Alysha A.

2017-01-01

We present the results from analyzing the physical and morphological properties of 154 dimmings (transient coronal holes) and the associated flares and coronal mass ejections (CMEs). Each dimming in our 2013 catalog was processed with the semi-automated Coronal Dimming Tracker using Solar Dynamics Observatory AIA 193 Å observations and HMI magnetograms. Instead of the typically used difference images, we used our coronal hole detection algorithm to detect transient dark regions “directly” in extreme ultraviolet (EUV) images. This allowed us to study dimmings as the footpoints of CMEs—in contrast with the larger, diffuse dimmings seen in difference images that represent the projected view of the rising, expanding plasma. Studying the footpoint-dimming morphology allowed us to better understand the CME structure in the low corona. While comparing the physical properties of dimmings, flares, and CMEs we were also able to identify relationships between the different parts of this complex eruptive phenomenon. We found that larger dimmings are longer-lived, suggesting that it takes longer to “close down” large open magnetic regions. Also, during their growth phase, smaller dimmings acquire a higher magnetic flux imbalance (i. e., become more unipolar) than larger dimmings. Furthermore, we found that the EUV intensity of dimmings (indicative of local electron density) correlates with how much plasma was removed and how energetic the eruption was. Studying the morphology of dimmings (single, double, fragmented) also helped us identify different configurations of the quasi-open magnetic field.

Statistical Study of Solar Dimmings Using CoDiT

Energy Technology Data Exchange (ETDEWEB)

Krista, Larisza D.; Reinard, Alysha A., E-mail: larisza.krista@noaa.gov [University of Colorado/Cooperative Institute for Research in Environmental Sciences, Boulder, CO 80205 (United States)

2017-04-10

We present the results from analyzing the physical and morphological properties of 154 dimmings (transient coronal holes) and the associated flares and coronal mass ejections (CMEs). Each dimming in our 2013 catalog was processed with the semi-automated Coronal Dimming Tracker using Solar Dynamics Observatory AIA 193 Å observations and HMI magnetograms. Instead of the typically used difference images, we used our coronal hole detection algorithm to detect transient dark regions “directly” in extreme ultraviolet (EUV) images. This allowed us to study dimmings as the footpoints of CMEs—in contrast with the larger, diffuse dimmings seen in difference images that represent the projected view of the rising, expanding plasma. Studying the footpoint-dimming morphology allowed us to better understand the CME structure in the low corona. While comparing the physical properties of dimmings, flares, and CMEs we were also able to identify relationships between the different parts of this complex eruptive phenomenon. We found that larger dimmings are longer-lived, suggesting that it takes longer to “close down” large open magnetic regions. Also, during their growth phase, smaller dimmings acquire a higher magnetic flux imbalance (i. e., become more unipolar) than larger dimmings. Furthermore, we found that the EUV intensity of dimmings (indicative of local electron density) correlates with how much plasma was removed and how energetic the eruption was. Studying the morphology of dimmings (single, double, fragmented) also helped us identify different configurations of the quasi-open magnetic field.

Absolute nuclear material assay

Science.gov (United States)

Prasad, Manoj K [Pleasanton, CA; Snyderman, Neal J [Berkeley, CA; Rowland, Mark S [Alamo, CA

2010-07-13

A method of absolute nuclear material assay of an unknown source comprising counting neutrons from the unknown source and providing an absolute nuclear material assay utilizing a model to optimally compare to the measured count distributions. In one embodiment, the step of providing an absolute nuclear material assay comprises utilizing a random sampling of analytically computed fission chain distributions to generate a continuous time-evolving sequence of event-counts by spreading the fission chain distribution in time.

Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization

International Nuclear Information System (INIS)

Jiang, Hui; Michette, Alan G.

2013-01-01

A robust design idea for broadband EUV multilayer beam splitters is introduced that achieves the aim of decreasing the influence of layer thickness errors on optical performances. Such beam splitters can be used in interferometry to determine the quality of EUVL masks by comparing with a reference multilayer. In the optimization, particle swarm techniques were used for the first time in such designs. Compared to conventional genetic algorithms, particle swarm optimization has stronger ergodicity, simpler processing and faster convergence

Initiation and early evolution of a Coronal Mass Ejection on May 13, 2009 from EUV and white-light observations

Science.gov (United States)

Reva, Anton; Kuzin, Sergey; Bogachev, Sergey; Ulyanov, Artyom

In this talk we present results of the observations of a CME, which occurred on May 13, 2009. The most important feature of these observations is that the CME was observed from the very beginning stage (the solar surface) up to the distance of 15 solar radii (R_⊙). Below 2 R_⊙ we used the data from the TESIS EUV telescopes obtained in the Fe 171 Å and He 304 Å lines, and above 2 R_⊙ we used the observations of the LASCO C2 and C3 coronagraphs. Using data of these three instruments, we have studied the evolution of the CME in details. The CME had a curved trajectory -- its helio-latitude decreased with time. The mass ejection originated at a latitudes of about 50(°) and reached the ecliptic plane at a distance of 2.5 R_⊙ from the Sun’s center. The CME velocity and acceleration increased as the CME went away from the Sun. At the distance of 15 R_⊙ from the Sun’s center the CME had a velocity of 250 km/s and an acceleration of 5 m/s(2) . The CME was not associated with a flare, and didn’t have an impulsive acceleration phase. The mass ejection had U-shaped structure which was observed both in the 171 Å images and in white-light. The CME was formed at a distance of about 0.2 -- 0.5 R_⊙ from the Sun’s surface. Observations in the line 304 Å showed that the CME was associated with the erupting prominence, which was located in the lowest part of the U-shaped structure close to the X-point of the magnetic reconnection. The prominence disappeared at the height of 0.4 R_⊙ above the solar limb. Some aspects of these observations can’t be explained in the standard CME model, which predicts that the prominence should be located inside the U-shaped structure, and the CME should be associated with a flare and have an impulsive acceleration phase.

A Large-scale Plume in an X-class Solar Flare

Energy Technology Data Exchange (ETDEWEB)

Fleishman, Gregory D.; Nita, Gelu M.; Gary, Dale E. [Physics Department, Center for Solar-Terrestrial Research, New Jersey Institute of Technology Newark, NJ, 07102-1982 (United States)

2017-08-20

Ever-increasing multi-frequency imaging of solar observations suggests that solar flares often involve more than one magnetic fluxtube. Some of the fluxtubes are closed, while others can contain open fields. The relative proportion of nonthermal electrons among those distinct loops is highly important for understanding energy release, particle acceleration, and transport. The access of nonthermal electrons to the open field is also important because the open field facilitates the solar energetic particle (SEP) escape from the flaring site, and thus controls the SEP fluxes in the solar system, both directly and as seed particles for further acceleration. The large-scale fluxtubes are often filled with a tenuous plasma, which is difficult to detect in either EUV or X-ray wavelengths; however, they can dominate at low radio frequencies, where a modest component of nonthermal electrons can render the source optically thick and, thus, bright enough to be observed. Here we report the detection of a large-scale “plume” at the impulsive phase of an X-class solar flare, SOL2001-08-25T16:23, using multi-frequency radio data from Owens Valley Solar Array. To quantify the flare’s spatial structure, we employ 3D modeling utilizing force-free-field extrapolations from the line of sight SOHO /MDI magnetograms with our modeling tool GX-Simulator. We found that a significant fraction of the nonthermal electrons that accelerated at the flare site low in the corona escapes to the plume, which contains both closed and open fields. We propose that the proportion between the closed and open fields at the plume is what determines the SEP population escaping into interplanetary space.

TESIS experiment on study of solar corona in EUV spectral range (CORONAS-PHOTON project)

International Nuclear Information System (INIS)

Kuzin, S.V.; Zhitnik, I.A.; Ignat'ev, A.P.; Mitrofanov, A.V.; Pertsov, A.A.; Bugaenko, O.I.

2005-01-01

A new orbital station, namely: the CORONAS-PHOTON one (to be launched in 2006) equipped with systems to explore Sun at the intensification period of the solar activity 24-th cycle and at its peak is being designed within the framework of the CORONAS National Sun Space Exploration Program. The station equipment consists of systems to observe Sun within the spectral soft X-ray and vacuum ultraviolet bands. Paper lists and describes the TESIS experiment tools designed for the CORONAS-PHOTON Project to ensure the Sun atmospheric research within short-wave band [ru

Thermodynamics of negative absolute pressures

International Nuclear Information System (INIS)

Lukacs, B.; Martinas, K.

1984-03-01

The authors show that the possibility of negative absolute pressure can be incorporated into the axiomatic thermodynamics, analogously to the negative absolute temperature. There are examples for such systems (GUT, QCD) processing negative absolute pressure in such domains where it can be expected from thermodynamical considerations. (author)

EVIDENCE FOR ROTATIONAL MOTIONS IN THE FEET OF A QUIESCENT SOLAR PROMINENCE

International Nuclear Information System (INIS)

Orozco Suárez, D.; Asensio Ramos, A.; Trujillo Bueno, J.

2012-01-01

We present observational evidence of apparent plasma rotational motions in the feet of a solar prominence. Our study is based on spectroscopic observations taken in the He I 1083.0 nm multiplet with the Tenerife Infrared Polarimeter attached to the German Vacuum Tower Telescope. We recorded a time sequence of spectra with 34 s cadence placing the slit of the spectrograph almost parallel to the solar limb and crossing two feet of an intermediate size, quiescent hedgerow prominence. The data show opposite Doppler shifts, ±6 km s –1 , at the edges of the prominence feet. We argue that these shifts may be interpreted as prominence plasma rotating counterclockwise around the vertical axis to the solar surface as viewed from above. The evolution of the prominence seen in EUV images taken with the Solar Dynamics Observatory provided us with clues to interpret the results as swirling motions. Moreover, time-distance images taken far from the central wavelength show plasma structures moving parallel to the solar limb with velocities of about 10-15 km s –1 . Finally, the shapes of the observed intensity profiles suggest the presence of, at least, two components at some locations at the edges of the prominence feet. One of them is typically Doppler shifted (up to ∼20 km s –1 ) with respect to the other, thus suggesting the existence of supersonic counter-streaming flows along the line of sight.

Laser-produced plasma EUV source using a colloidal microjet target containing tin dioxide nanoparticles

Science.gov (United States)

Higashiguchi, Takeshi; Dojyo, Naoto; Sasaki, Wataru; Kubodera, Shoichi

2006-10-01

We realized a low-debris laser-produced plasma extreme ultraviolet (EUV) source by use of a colloidal microjet target, which contained low-concentration (6 wt%) tin-dioxide nanoparticles. An Nd:YAG laser was used to produce a plasma at the intensity on the order of 10^11 W/cm^2. The use of low concentration nanoparticles in a microjet target with a diameter of 50 μm regulated the neutral debris emission from a target, which was monitored by a silicon witness plate placed 30 cm apart from the source in a vacuum chamber. No XPS signals of tin and/or oxygen atoms were observed on the plate after ten thousand laser exposures. The low concentration nature of the target was compensated and the conversion efficiency (CE) was improved by introducing double pulses of two Nd:YAG lasers operated at 532 and 1064 nm as a result of controlling the micro-plasma characteristics. The EUV CE reached its maximum of 1.2% at the delay time of approximately 100 ns with the main laser intensiy of 2 x10^11 W/cm^2. The CE value was comparable to that of a tin bulk target, which, however, produced a significant amount of neutral debris.

YOHKOH Observations at the Y2K Solar Maximum

Science.gov (United States)

Aschwanden, M. J.

1999-05-01

Yohkoh will provide simultaneous co-aligned soft X-ray and hard X-ray observations of solar flares at the coming solar maximum. The Yohkoh Soft X-ray Telescope (SXT) covers the approximate temperature range of 2-20 MK with a pixel size of 2.46\\arcsec, and thus complements ideally the EUV imagers sensitive in the 1-2 MK plasma, such as SoHO/EIT and TRACE. The Yohkoh Hard X-ray Telescope (HXT) offers hard X-ray imaging at 20-100 keV at a time resolution of down to 0.5 sec for major events. In this paper we review the major SXT and HXT results from Yohkoh solar flare observations, and anticipate some of the key questions that can be addressed through joint observations with other ground and space-based observatories. This encompasses the dynamics of flare triggers (e.g. emerging flux, photospheric shear, interaction of flare loops in quadrupolar geometries, large-scale magnetic reconfigurations, eruption of twisted sigmoid structures, coronal mass ejections), the physics of particle dynamics during flares (acceleration processes, particle propagation, trapping, and precipitation), and flare plasma heating processes (chromospheric evaporation, coronal energy loss by nonthermal particles). In particular we will emphasize on how Yohkoh data analysis is progressing from a qualitative to a more quantitative science, employing 3-dimensional modeling and numerical simulations.

IAU 2015 Resolution B2 on Recommended Zero Points for the Absolute and Apparent Bolometric Magnitude Scales

DEFF Research Database (Denmark)

Mamajek, E. E.; Torres, G.; Prsa, A.

2015-01-01

The XXIXth IAU General Assembly in Honolulu adopted IAU 2015 Resolution B2 on recommended zero points for the absolute and apparent bolometric magnitude scales. The resolution was proposed by the IAU Inter-Division A-G Working Group on Nominal Units for Stellar and Planetary Astronomy after...... consulting with a broad spectrum of researchers from the astronomical community. Resolution B2 resolves the long-standing absence of an internationally-adopted zero point for the absolute and apparent bolometric magnitude scales. Resolution B2 defines the zero point of the absolute bolometric magnitude scale...... such that a radiation source with $M_{\\rm Bol}$ = 0 has luminosity L$_{\\circ}$ = 3.0128e28 W. The zero point of the apparent bolometric magnitude scale ($m_{\\rm Bol}$ = 0) corresponds to irradiance $f_{\\circ}$ = 2.518021002e-8 W/m$^2$. The zero points were chosen so that the nominal solar luminosity (3.828e26 W...

Physics of solar prominences. Proceedings of the Colloquium, Oslo, Norway, August 14-18, 1978

Energy Technology Data Exchange (ETDEWEB)

Jensen, E; Maltby, P

1979-01-01

These papers deal with recent theoretical and observational studies of the physics of solar prominences. Specific topics include reviews of prominence spectra and their interpretation, polarimetric observations and magnetic-field determination in prominences, observations of the prominence-corona interface, theories on the formation and stability of quiescent prominences, prominence classifications, observations of active prominences, observations and interpretations of coronal manifestations of eruptive prominences, and models of prominence structure and dynamics. Other contributions discuss simultaneous observations of Ca II and hydrogen Balmer lines in quiescent prominences, recent results in quiescent-prominence spectroscopy, the solar helium abundance obtained from optical spectra of quiescent prominences, and Stokes polarimetry of quiescent prominences in the He I D3 line. Magnetic-field determination based on the Hanle effect is also examined, along with the orientation of prominence microstructure relative to magnetic-field direction, radio observations of quiescent-prominence filaments at centimeter and millimeter wavelengths, EUV observations of filaments, and a magnetic-field reconnection model of quiescent prominences.

X ray and EUV spectroscopic measurements of highly charged tungsten ions relevant to fusion plasmas

International Nuclear Information System (INIS)

Radtke, R; Biedermann, C; Mandelbaum, P; Schwob, J L

2007-01-01

Using high-resolution x ray and extreme ultraviolet (EUV) spectrometry, the line emission of W 28+ - W 50+ ions was measured at the Berlin Electron Beam Ion Trap (EBIT). Our study encompasses a wide range of wavelengths (5-800 A) and includes the observation of electric and magnetic dipole lines. The results of our measurements are compared with predicted transition wavelengths from ab initioatomic structure calculations

Ultra-sensitive EUV resists based on acid-catalyzed polymer backbone breaking

Science.gov (United States)

Manouras, Theodoros; Kazazis, Dimitrios; Koufakis, Eleftherios; Ekinci, Yasin; Vamvakaki, Maria; Argitis, Panagiotis

2018-03-01

The main target of the current work was to develop new sensitive polymeric materials for lithographic applications, focusing in particular to EUV lithography, the main chain of which is cleaved under the influence of photogenerated acid. Resist materials based on the cleavage of polymer main chain are in principle capable to create very small structures, to the dimensions of the monomers that they consist of. Nevertheless, in the case of the commonly used nonchemically amplified materials of this type issues like sensitivity and poor etch resistance limit their areas of application, whereas inadequate etch resistance and non- satisfactory process reliability are the usual problems encountered in acid catalysed materials based on main chain scission. In our material design the acid catalyzed chain cleavable polymers contain very sensitive moieties in their backbone while they remain intact in alkaline ambient. These newly synthesized polymers bear in addition suitable functional groups for the achievement of desirable lithographic characteristics (thermal stability, acceptable glass transition temperature, etch resistance, proper dissolution behavior, adhesion to the substrate). Our approach for achieving acceptable etch resistance, a main drawback in other main chain cleavable resists, is based on the introduction of polyaromatic hydrocarbons in the polymeric backbone, whereas the incorporation of an inorganic component further enhances the etch resistance. Single component systems can also be designed following the proposed approach by the incorporation of suitable PAGs and base quencher molecules in the main chain. Resist formulations based on a random copolymer designed according to the described rules evaluated in EUV exhibit ultrahigh sensitivity, capability for high resolution patterning and overall processing characteristics that make them strong candidates for industrial use upon further optimization.

A BRIGHT IMPULSIVE SOLAR BURST DETECTED AT 30 THz

Energy Technology Data Exchange (ETDEWEB)

Kaufmann, P.; Fernandes, L. O. T.; Kudaka, A. S.; De Souza, R. V.; Valio, A.; Raulin, J.-P. [Center of Radio Astronomy and Astrophysics, Engineering School, Mackenzie Presbyterian University, Sao Paulo, SP (Brazil); White, S. M. [Air Force Research Laboratories, Space Vehicles Directorate, Albuquerque, NM 87117 (United States); Freeland, S. L. [Lockheed Martin Solar and Astrophysics Laboratory, Palo Alto, CA 94304 (United States); Marcon, R. [' ' Gleb Wataghin' ' Physics Institute, State University of Campinas, Campinas, SP (Brazil); Aballay, J. L.; Fernandez, G.; Godoy, R.; Marun, A.; Gimenez de Castro, C. G. [El Leoncito Astronomical Complex, CONICET, San Juan (Argentina)

2013-05-10

Ground- and space-based observations of solar flares from radio wavelengths to gamma-rays have produced considerable insights but raised several unsolved controversies. The last unexplored wavelength frontier for solar flares is in the range of submillimeter and infrared wavelengths. Here we report the detection of an intense impulsive burst at 30 THz using a new imaging system. The 30 THz emission exhibited remarkable time coincidence with peaks observed at microwave, mm/submm, visible, EUV, and hard X-ray wavelengths. The emission location coincides with a very weak white-light feature, and is consistent with heating below the temperature minimum in the atmosphere. However, there are problems in attributing the heating to accelerated electrons. The peak 30 THz flux is several times larger than the usual microwave peak near 9 GHz, attributed to non-thermal electrons in the corona. The 30 THz emission could be consistent with an optically thick spectrum increasing from low to high frequencies. It might be part of the same spectral component found at sub-THz frequencies whose nature remains mysterious. Further observations at these wavelengths will provide a new window for flare studies.

Current Sheet Structures Observed by the TESIS EUV Telescope during a Flux Rope Eruption on the Sun

Science.gov (United States)

Reva, A. A.; Ulyanov, A. S.; Kuzin, S. V.

2016-11-01

We use the TESIS EUV telescope to study the current sheet signatures observed during flux rope eruption. The special feature of the TESIS telescope was its ability to image the solar corona up to a distance of 2 {R}⊙ from the Sun’s center in the Fe 171 Å line. The Fe 171 Å line emission illuminates the magnetic field lines, and the TESIS images reveal the coronal magnetic structure at high altitudes. The analyzed coronal mass ejection (CME) had a core with a spiral—flux rope—structure. The spiral shape indicates that the flux rope radius varied along its length. The flux rope had a complex temperature structure: cold legs (70,000 K, observed in He 304 Å line) and a hotter core (0.7 MK, observed in Fe 171 Å line). Such a structure contradicts the common assumption that the CME core is a cold prominence. When the CME impulsively accelerated, a dark double Y-structure appeared below the flux rope. The Y-structure timing, location, and morphology agree with the previously performed MHD simulations of the current sheet. We interpreted the Y-structure as a hot envelope of the current sheet and hot reconnection outflows. The Y-structure had a thickness of 6.0 Mm. Its length increased over time from 79 Mm to more than 411 Mm.

First TSI observations of the new Compact Lightweight Absolute Radiometer (CLARA)

Science.gov (United States)

Walter, B.; Finsterle, W.; Koller, S.; Levesque, P. L.; Pfiffner, D.; Schmutz, W. K.

2017-12-01

Continuous and precise Total Solar Irradiance (TSI) measurements are indispensable to evaluate the influence of short- and long-term solar radiative emission variations on the Earth's energy budget. The existence of a potentially long-term trend in the suns activity and whether or not such a trend could be climate effective is still a matter of debate. The Compact Lightweight Absolute Radiometer (CLARA) is one of PMOD/WRC's future contributions to the almost seamless series of space borne TSI measurements since 1978. CLARA is one of three payloads of the Norwegian micro satellite NORSAT-1, along with Langmuir probes for space plasma research and an Automatic Identification System (AIS) receiver to monitor maritime traffic in Norwegian waters. NORSAT-1 was launched July 14th 2017 and the nominal operation of CLARA will start after the instrument commissioning beginning August 21st2017. We present the design, calibration and first TSI observations of CLARA, a new generation of active cavity Electrical Substitution Radiometers (ESR) comprising the latest radiometer developments of PMOD/WRC: i) A three-cavity design for degradation tracking and redundancy, ii) a digital control loop with feed forward system allowing for measurement cadences of 30s, iii) an aperture arrangement to reduce internal scattered light and iv) a new cavity and heatsink design to minimize non-equivalence, size and weight of the instrument. CLARA was end-to-end calibrated against the SI traceable cryogenic radiometer of the TSI Radiometer Facility (TRF) in Boulder (Colorado). The absolute measurement uncertainties for the three SI-traceable TSI detectors of CLARA are 567, 576 and 912 ppm (k = 1).

Danish Towns during Absolutism

DEFF Research Database (Denmark)

This anthology, No. 4 in the Danish Urban Studies Series, presents in English recent significant research on Denmark's urban development during the Age of Absolutism, 1660-1848, and features 13 articles written by leading Danish urban historians. The years of Absolutism were marked by a general...

Estimation of soft X-ray and EUV transition radiation power emitted from the MIRRORCLE-type tabletop synchrotron.

Science.gov (United States)

Toyosugi, N; Yamada, H; Minkov, D; Morita, M; Yamaguchi, T; Imai, S

2007-03-01

The tabletop synchrotron light sources MIRRORCLE-6X and MIRRORCLE-20SX, operating at electron energies E(el) = 6 MeV and E(el) = 20 MeV, respectively, can emit powerful transition radiation (TR) in the extreme ultraviolet (EUV) and the soft X-ray regions. To clarify the applicability of these soft X-ray and EUV sources, the total TR power has been determined. A TR experiment was performed using a 385 nm-thick Al foil target in MIRRORCLE-6X. The angular distribution of the emitted power was measured using a detector assembly based on an NE102 scintillator, an optical bundle and a photomultiplier. The maximal measured total TR power for MIRRORCLE-6X is P(max) approximately equal 2.95 mW at full power operation. Introduction of an analytical expression for the lifetime of the electron beam allows calculation of the emitted TR power by a tabletop synchrotron light source. Using the above measurement result, and the theoretically determined ratio between the TR power for MIRRORCLE-6X and MIRRORCLE-20SX, the total TR power for MIRRORCLE-20SX can be obtained. The one-foil TR target thickness is optimized for the 20 MeV electron energy. P(max) approximately equal 810 mW for MIRRORCLE-20SX is obtained with a single foil of 240 nm-thick Be target. The emitted bremsstrahlung is negligible with respect to the emitted TR for optimized TR targets. From a theoretically known TR spectrum it is concluded that MIRRORCLE-20SX can emit 150 mW of photons with E > 500 eV, which makes it applicable as a source for performing X-ray lithography. The average wavelength, \\overline\\lambda = 13.6 nm, of the TR emission of MIRRORCLE-20SX, with a 200 nm Al target, could provide of the order of 1 W EUV.

EUV beam splitter for use in the wavelength region around 6 nm

International Nuclear Information System (INIS)

Takenaka, Hisataka; Ichimaru, Satoshi; Gullikson, E.M.

2005-01-01

Extreme ultraviolet (EUV) beam splitters for use at a wavelength of around 6 nm were fabricated. The designs were optimized for Cr/C multilayers and incident angles of 45 deg. and 80 deg. . Measurements revealed the reflectivity of a Cr/C beam splitter to be 3.3% and the transmittance to be 5.6% at a wavelength of 6.36 nm and an incident angle of 45 deg. . The reflectivity of a Cr/C beam splitter was 5.8% and the transmittance was 6.6% at a wavelength of 6.15 nm and an incident angle of 80 deg.

Enhancing native defect sensitivity for EUV actinic blank inspection: optimized pupil engineering and photon noise study

Science.gov (United States)

Wang, Yow-Gwo; Neureuther, Andrew; Naulleau, Patrick

2016-03-01

In this paper, we discuss the impact of optimized pupil engineering and photon noise on native defect sensitivity in EUV actinic blank inspection. Native defects include phase-dominated defects, absorber defects, and defects with a combination of phase and absorption behavior. First, we extend the idea of the Zernike phase contrast (ZPC) method and study the impact of optimum phase shift in the pupil plane on native defect sensitivity, showing a 23% signal-to-noise ratio (SNR) enhancement compare to bright field (BF) for a phase defect with 20% absorption. We also describe the possibility to increase target defect SNR on target defect sizes at the price of losing the sensitivity on smaller (non-critical) defects. Moreover, we show the advantage of the optimized phase contrast (OZPC) method over BF EUV actinic blank inspection. A single focus scan from OZPC has better inspection efficiency over BF. Second, we make a detailed comparison between the phase contrast with apodization (AZPC) method and dark field (DF) method based on defect sensitivity in the presence of both photon shot noise and camera noise. Performance is compared for a variety of photon levels, mask roughness conditions, and combinations of defect phase and absorption.

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Science.gov (United States)

Huang, Qiushi; Medvedev, Viacheslav; van de Kruijs, Robbert; Yakshin, Andrey; Louis, Eric; Bijkerk, Fred

2017-03-01

Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement

Heating of an Erupting Prominence Associated with a Solar Coronal Mass Ejection on 2012 January 27

Energy Technology Data Exchange (ETDEWEB)

Lee, Jin-Yi; Moon, Yong-Jae; Kim, Kap-Sung [Department of Astronomy and Space Science, Kyung Hee University, Yongin-si, Gyeonggi-do, 17104 (Korea, Republic of); Raymond, John C.; Reeves, Katharine K. [Harvard-Smithsonian Center for Astrophysics, Cambridge, MA 02138 (United States)

2017-07-20

We investigate the heating of an erupting prominence and loops associated with a coronal mass ejection and X-class flare. The prominence is seen as absorption in EUV at the beginning of its eruption. Later, the prominence changes to emission, which indicates heating of the erupting plasma. We find the densities of the erupting prominence using the absorption properties of hydrogen and helium in different passbands. We estimate the temperatures and densities of the erupting prominence and loops seen as emission features using the differential emission measure method, which uses both EUV and X-ray observations from the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory and the X-ray Telescope on board Hinode . We consider synthetic spectra using both photospheric and coronal abundances in these calculations. We verify the methods for the estimation of temperatures and densities for the erupting plasmas. Then, we estimate the thermal, kinetic, radiative loss, thermal conduction, and heating energies of the erupting prominence and loops. We find that the heating of the erupting prominence and loop occurs strongly at early times in the eruption. This event shows a writhing motion of the erupting prominence, which may indicate a hot flux rope heated by thermal energy release during magnetic reconnection.

Reconstruction and analysis of erythemal UV radiation time series from Hradec Králové (Czech Republic) over the past 50 years

Science.gov (United States)

Čížková, Klára; Láska, Kamil; Metelka, Ladislav; Staněk, Martin

2018-02-01

This paper evaluates the variability of erythemal ultraviolet (EUV) radiation from Hradec Králové (Czech Republic) in the period 1964-2013. The EUV radiation time series was reconstructed using a radiative transfer model and additional empirical relationships, with the final root mean square error of 9.9 %. The reconstructed time series documented the increase in EUV radiation doses in the 1980s and the 1990s (up to 15 % per decade), which was linked to the steep decline in total ozone (10 % per decade). The changes in cloud cover were the major factor affecting the EUV radiation doses especially in the 1960s, 1970s, and at the beginning of the new millennium. The mean annual EUV radiation doses in the decade 2004-2013 declined by 5 %. The factors affecting the EUV radiation doses differed also according to the chosen integration period (daily, monthly, and annually): solar zenith angle was the most important for daily doses, cloud cover, and surface UV albedo for their monthly means, and the annual means of EUV radiation doses were most influenced by total ozone column. The number of days with very high EUV radiation doses increased by 22 % per decade, the increase was statistically significant in all seasons except autumn. The occurrence of the days with very high EUV doses was influenced mostly by low total ozone column (82 % of days), clear-sky or partly cloudy conditions (74 % of days) and by increased surface albedo (19 % of days). The principal component analysis documented that the occurrence of days with very high EUV radiation doses was much affected by the positive phase of North Atlantic Oscillation with an Azores High promontory reaching over central Europe. In the stratosphere, a strong Arctic circumpolar vortex and the meridional inflow of ozone-poor air from the southwest were favorable for the occurrence of days with very high EUV radiation doses. This is the first analysis of the relationship between the high EUV radiation doses and macroscale

The "Sigmoid Sniffer” and the "Advanced Automated Solar Filament Detection and Characterization Code” Modules

Science.gov (United States)

Raouafi, Noureddine; Bernasconi, P. N.; Georgoulis, M. K.

2010-05-01

We present two pattern recognition algorithms, the "Sigmoid Sniffer” and the "Advanced Automated Solar Filament Detection and Characterization Code,” that are among the Feature Finding modules of the Solar Dynamic Observatory: 1) Coronal sigmoids visible in X-rays and the EUV are the result of highly twisted magnetic fields. They can occur anywhere on the solar disk and are closely related to solar eruptive activity (e.g., flares, CMEs). Their appearance is typically synonym of imminent solar eruptions, so they can serve as a tool to forecast solar activity. Automatic X-ray sigmoid identification offers an unbiased way of detecting short-to-mid term CME precursors. The "Sigmoid Sniffer” module is capable of automatically detecting sigmoids in full-disk X-ray images and determining their chirality, as well as other characteristics. It uses multiple thresholds to identify persistent bright structures on a full-disk X-ray image of the Sun. We plan to apply the code to X-ray images from Hinode/XRT, as well as on SDO/AIA images. When implemented in a near real-time environment, the Sigmoid Sniffer could allow 3-7 day forecasts of CMEs and their potential to cause major geomagnetic storms. 2)The "Advanced Automated Solar Filament Detection and Characterization Code” aims to identify, classify, and track solar filaments in full-disk Hα images. The code can reliably identify filaments; determine their chirality and other relevant parameters like filament area, length, and average orientation with respect to the equator. It is also capable of tracking the day-by-day evolution of filaments as they traverse the visible disk. The code was tested by analyzing daily Hα images taken at the Big Bear Solar Observatory from mid-2000 to early-2005. It identified and established the chirality of thousands of filaments without human intervention.

PRE-FLARE CORONAL JET AND EVOLUTIONARY PHASES OF A SOLAR ERUPTIVE PROMINENCE ASSOCIATED WITH THE M1.8 FLARE: SDO AND RHESSI OBSERVATIONS

Energy Technology Data Exchange (ETDEWEB)

Joshi, Bhuwan; Kushwaha, Upendra [Udaipur Solar Observatory, Physical Research Laboratory, Udaipur 313001 (India); Veronig, Astrid M. [Kanzelhöhe Observatory/Institute of Physics, University of Graz, Universitätsplatz 5, A-8010 Graz (Austria); Cho, K.-S., E-mail: bhuwan@prl.res.in [Korea Astronomy and Space Science Institute, Daejeon 305-348 (Korea, Republic of)

2016-12-01

We investigate the triggering, activation, and ejection of a solar eruptive prominence that occurred in a multi-polar flux system of active region NOAA 11548 on 2012 August 18 by analyzing data from the Atmospheric Imaging Assembly on board the Solar Dynamics Observatory , the Reuven Ramaty High Energy Solar Spectroscopic Imager , and the Extreme Ultraviolet Imager/Sun Earth Connection Coronal and Heliospheric Investigation on board the Solar Terrestrial Relation Observatory . Prior to the prominence activation, we observed striking coronal activities in the form of a blowout jet, which is associated with the rapid eruption of a cool flux rope. Furthermore, the jet-associated flux rope eruption underwent splitting and rotation during its outward expansion. These coronal activities are followed by the prominence activation during which it slowly rises with a speed of ∼12 km s{sup −1} while the region below the prominence emits gradually varying EUV and thermal X-ray emissions. From these observations, we propose that the prominence eruption is a complex, multi-step phenomenon in which a combination of internal (tether-cutting reconnection) and external (i.e., pre-eruption coronal activities) processes are involved. The prominence underwent catastrophic loss of equilibrium with the onset of the impulsive phase of an M1.8 flare, suggesting large-scale energy release by coronal magnetic reconnection. We obtained signatures of particle acceleration in the form of power-law spectra with hard electron spectral index ( δ  ∼ 3) and strong HXR footpoint sources. During the impulsive phase, a hot EUV plasmoid was observed below the apex of the erupting prominence that ejected in the direction of the prominence with a speed of ∼177 km s{sup −1}. The temporal, spatial, and kinematic correlations between the erupting prominence and the plasmoid imply that the magnetic reconnection supported the fast ejection of prominence in the lower corona.

Reevaluation of the O(+)(2P) reaction rate coefficients derived from Atmosphere Explorer C observations

Science.gov (United States)

Chang, T.; Torr, D. G.; Richards, P. G.; Solomon, S. C.

1993-01-01

O(+)(2P) is an important species for studies of the ionosphere and thermosphere: its emission at 7320 A can be used as a diagnostic of the thermospheric atomic oxygen density. Unfortunately, there are no laboratory measurements of the O and N2 reaction rates which are needed to determine the major sinks of (O+)(2p). We have recalculated the O and N2 reaction rates for O(+) (2P) using recent improvements in the solar EUV flux, cross sections, and photoelectron fluxes. For the standard solar EUV flux, the new N2 reaction rate of 3.4 +/- 1.5 x 10 exp -10 cu cm/s is close to the value obtained by Rusch et al. (1977), but the new O reaction rate of 4.0 +/- 1.9 x 10 exp -10 cu cm/sec is about 8 times larger. These new reaction rates are derived using neutral densities, electron density, and solar EUV fluxes measured by Atmosphere Explorer C in 1974 during solar minimum. The new theoretical emission rates are in good agreement with the data for the two orbits studied by Rusch et al.

Absolute Astrometry in the next 50 Years - II

Science.gov (United States)

Høg, E.

2018-01-01

With the Gaia astrometric satellite in orbit since December 2013 it is time to look at the future of fundamental astrometry and a time frame of 50 years is needed in this matter. A space mission with Gaia-like astrometric performance is required, but not necessarily a Gaia-like satellite. A dozen science issues for a Gaia successor mission in twenty years, with launch about 2035, are presented and in this context also other possibilities for absolute astrometry with milliarcsecond (mas) or sub-mas accuracies are discussed in my report at http://arxiv.org/abs/1408.2190. In brief, the two missions (2013 and 2035) would provide an astrometric foundation for all branches of astronomy from the solar system and stellar systems, including exo-planet systems with long periods, to compact galaxies, quasars and Dark Matter substructures by data which cannot be surpassed in the next 50 years.

The Coronal Analysis of SHocks and Waves (CASHeW) framework

Science.gov (United States)

Kozarev, Kamen A.; Davey, Alisdair; Kendrick, Alexander; Hammer, Michael; Keith, Celeste

2017-11-01

Coronal bright fronts (CBF) are large-scale wavelike disturbances in the solar corona, related to solar eruptions. They are observed (mostly in extreme ultraviolet (EUV) light) as transient bright fronts of finite width, propagating away from the eruption source location. Recent studies of individual solar eruptive events have used EUV observations of CBFs and metric radio type II burst observations to show the intimate connection between waves in the low corona and coronal mass ejection (CME)-driven shocks. EUV imaging with the atmospheric imaging assembly instrument on the solar dynamics observatory has proven particularly useful for detecting large-scale short-lived CBFs, which, combined with radio and in situ observations, holds great promise for early CME-driven shock characterization capability. This characterization can further be automated, and related to models of particle acceleration to produce estimates of particle fluxes in the corona and in the near Earth environment early in events. We present a framework for the coronal analysis of shocks and waves (CASHeW). It combines analysis of NASA Heliophysics System Observatory data products and relevant data-driven models, into an automated system for the characterization of off-limb coronal waves and shocks and the evaluation of their capability to accelerate solar energetic particles (SEPs). The system utilizes EUV observations and models written in the interactive data language. In addition, it leverages analysis tools from the SolarSoft package of libraries, as well as third party libraries. We have tested the CASHeW framework on a representative list of coronal bright front events. Here we present its features, as well as initial results. With this framework, we hope to contribute to the overall understanding of coronal shock waves, their importance for energetic particle acceleration, as well as to the better ability to forecast SEP events fluxes.

Reevaluation of the O+(2P) reaction rate coefficients derived from atmosphere explorer C observations

International Nuclear Information System (INIS)

Chang, T.; Torr, D.G.; Richards, P.G.; Solomon, S.C.

1993-01-01

O + ( 2 P) is an important species for studies of the ionosphere and thermosphere: its emission at 7320 angstrom can be used as a diagnostic of the thermospheric atomic oxygen density. Unfortunately, there are no laboratory measurements of the O and N 2 reaction rates which are needed to determine the major sinks of O + ( 2 P). The reaction rates that are generally used were determined from aeronomic data by Rusch et al. but there is evidence that several important inputs that they used should be changed. The authors have recalculated the O and N 2 reaction rates for O + ( 2 P) using recent improvements in the solar EUV flux, cross sections, and photoelectron fluxes. For the standard solar EUV flux, the new N 2 reaction rate of 3.4 ± 1.5 x 10 -10 cm 3 s -1 is close to the value obtained by Rusch et al., but the new O reaction rate of 4.0 ± 1.9 x 10 -10 cm 3 s -1 is about 8 times larger. These new reaction rates are derived using neutral densities, electron density, and solar EUV fluxes measured by Atmosphere Explorer C in 1974 during solar minimum. The new theoretical emission rates are in good agreement with the data for the two orbits studied by Rusch et al. and they are in reasonable agreement with data from five additional orbits that are used in this study. The authors have also examined the effect of uncertainties in the solar EUV flux on the derived reaction rates and found that 15% uncertainties in the solar flux could cause additional uncertainties of up to a factor of 1.5 in the O quenching rate. 19 refs., 4 figs., 8 tabs

Solar-Iss a New Solar Reference Spectrum Covering the Far UV to the Infrared (165 to 3088 Nm) Based on Reanalyzed Solar/solspec Cycle 24 Observations

Science.gov (United States)

Damé, L.; Meftah, M.; Irbah, A.; Hauchecorne, A.; Bekki, S.; Bolsée, D.; Pereira, N.; Sluse, D.; Cessateur, G.

2017-12-01

Since April 5, 2008 and until February 15, 2017, the SOLSPEC (SOLar SPECtrometer) spectro-radiometer of the SOLAR facility on the International Space Station performed accurate measurements of Solar Spectral Irradiance (SSI) from the far ultraviolet to the infrared (165 nm to 3088 nm). These measurements, unique by their large spectral coverage and long time range, are of primary importance for a better understanding of solar physics and of the impact of solar variability on climate (via Earth's atmospheric photochemistry), noticeably through the "top-down" mechanism amplifying ultraviolet (UV) solar forcing effects on the climate (UV affects stratospheric dynamics and temperatures, altering interplanetary waves and weather patterns both poleward and downward to the lower stratosphere and troposphere regions). SOLAR/SOLSPEC, with almost 9 years of observations covering the essential of the unusual solar cycle 24 from minimum in 2008 to maximum, allowed to establish new reference solar spectra from UV to IR (165 to 3088 nm) at minimum (beginning of mission) and maximum of activity. The complete reanalysis was possible thanks to revised engineering corrections, improved calibrations and advanced procedures to account for thermal, aging and pointing corrections. The high quality and sensitivity of SOLSPEC data allow to follow temporal variability in UV but also in visible along the cycle. Uncertainties on these measurements are evaluated and results, absolute reference spectra and variability, are compared with other measurements (WHI, ATLAS-3, SCIAMACHY, SORCE/SOLSTICE, SORCE/SIM) and models (SATIRE-S, NRLSSI, NESSY)

Creation and investigation of powerful EUV sources (λ ∼ 13.5 nm)

International Nuclear Information System (INIS)

Borisov, V. M.; Borisova, G. N.; Vinokhodov, A. Yu.; Ivanov, A. S.; Kiryukhin, Yu. B.; Mishchenko, V. A.; Prokofiev, A. V.; Khristoforov, O. B.

2010-01-01

Results are presented from experimental studies of repetitively pulsed EUV (λ = 13.5 ± 0.135 nm) sources based on a laser-initiated discharge in tin vapor between rotating disk electrodes. Radiative characteristics of two sources with different systems of tin supply onto the electrode surface and different types of power supply have been compared. A number of new effects have been revealed at pulse repetition rates as high as ∼4000 Hz. A mean radiation power of 520 W into the 2π solid angle has been achieved in the spectral band 13.5 ± 0.135 nm at a deposited electrical power of 24 kW.

Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm)

Science.gov (United States)

Borisov, V. M.; Borisova, G. N.; Vinokhodov, A. Yu.; Ivanov, A. S.; Kiryukhin, Yu. B.; Mishchenko, V. A.; Prokofiev, A. V.; Khristoforov, O. B.

2010-03-01

Results are presented from experimental studies of repetitively pulsed EUV (λ = 13.5 ± 0.135 nm) sources based on a laser-initiated discharge in tin vapor between rotating disk electrodes. Radiative characteristics of two sources with different systems of tin supply onto the electrode surface and different types of power supply have been compared. A number of new effects have been revealed at pulse repetition rates as high as ˜4000 Hz. A mean radiation power of 520 W into the 2π solid angle has been achieved in the spectral band 13.5 ± 0.135 nm at a deposited electrical power of 24 kW.

EUV microexposures at the ALS using the 0.3-NA MET projection optics

International Nuclear Information System (INIS)

Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik; Cain, Jason P.; Denham, Paul; Hoef, Brian; Jackson, Keith; Morlens, Anne-Sophie; Rekawa, Seno; Dean, Kim

2005-01-01

The recent development of high numerical aperture (NA) EUV optics such as the 0.3-NA Micro Exposure Tool (MET) optic has given rise to a new class of ultra-high resolution microexposure stations. Once such printing station has been developed and implemented at Lawrence Berkeley National Laboratory's Advanced Light Source. This flexible printing station utilizes a programmable coherence illuminator providing real-time pupil-fill control for advanced EUV resist and mask development. The Berkeley exposure system programmable illuminator enables several unique capabilities. Using dipole illumination out to σ=1, the Berkeley tool supports equal-line-space printing down to 12 nm, well beyond the capabilities of similar tools. Using small-sigma illumination combined with the central obscuration of the MET optic enables the system to print feature sizes that are twice as small as those coded on the mask. In this configuration, the effective 10x-demagnification for equal lines and spaces reduces the mask fabrication burden for ultra-high-resolution printing. The illuminator facilitates coherence studies such as the impact of coherence on line-edge roughness (LER) and flare. Finally the illuminator enables novel print-based aberration monitoring techniques as described elsewhere in these proceedings. Here we describe the capabilities of the new MET printing station and present system characterization results. Moreover, we present the latest printing results obtained in experimental resists. Limited by the availability of high-resolution photoresists, equal line-space printing down to 25 nm has been demonstrated as well as isolated line printing down to 29 nm with an LER of approaching 3 nm

Grazing incidence EUV study of the Alcator tokamaks

International Nuclear Information System (INIS)

Castracane, J.

1982-01-01

The use of impurity radiation to examine plasma conditions is a well known technique. To gain access, however, to the hot, central portion of the plasma created in the present confinement machines it is necessary to be able to observe radiation from medium and heavy elements such as molybdenum and iron. These impurities radiate primarily in the extreme ultra violet region of the spectrum and can play a role in the power balance of the tokamak. Radiation from highly ionized molybdenum was examined on the Alcator A and C tokamaks using a photometrically calibrated one meter grazing incidence monochromator. On Alcator A, a pseudo-continuum of Mo emissions in the 60 to 100 A ranges were seen to comprise 17% of the radiative losses from the plasma. This value closely matched measurements by a broad band bolometer array. Following these preliminary measurements, the monochromator was transferred to Alcator C for a more thorough examination of EUV emissions. Deviations from predicted scaling laws for energy confinement time vs density were observed on this machine

RCI Simulation for EUV spectra from Sn ions

International Nuclear Information System (INIS)

Kagawa, T; Tanuma, H; Ohashi, H; Nishihara, K

2007-01-01

Using the relativistic-configuration-interaction atomic structure code, RCI simulations for EUV spectra from Sn 10+ , Sn 11+ and Sn 12+ ions are carried out, where it is assumed that each ion is embedded in a LTE plasma with the electron temperature of 30 eV. To make clear assignment of the measured spectra, the value of the excitation energy limit, which is introduced to limit the number of excited states in the simulation, is changed to see the excitation-energy-limit dependence of the spectral shape. The simulated spectra are obtained as a superposition of line intensities due to all possible transitions between two states whose excitation energy from the ground state is lower than the excitation energy limit assumed. The RCI simulated spectra are compared to the spectra measured with the chargeexchange- collision experiment in which a rare gas such as Xe or He as a target is bombarded by a charge-selected tin ion. Applicability of the LTE model to a decay model in the charge exchange collision experiment is also discussed

Near threshold absolute TDCS: First results

International Nuclear Information System (INIS)

Roesel, T.; Schlemmer, P.; Roeder, J.; Frost, L.; Jung, K.; Ehrhardt, H.

1992-01-01

A new method, and first results for an impact energy 2 eV above the threshold of ionisation of helium, are presented for the measurement of absolute triple differential cross sections (TDCS) in a crossed beam experiment. The method is based upon measurement of beam/target overlap densities using known absolute total ionisation cross sections and of detection efficiencies using known absolute double differential cross sections (DDCS). For the present work the necessary absolute DDCS for 1 eV electrons had also to be measured. Results are presented for several different coplanar kinematics and are compared with recent DWBA calculations. (orig.)

Absolute entropy of ions in methanol

International Nuclear Information System (INIS)