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Sample records for 2d capacitive micromachined

  1. Design and Test of Capacitive Micromachined Ultrasonic Transducer

    National Research Council Canada - National Science Library

    Hongliang Wang; Xiangjun Wang; Changde He; Chenyang Xue; Jijun Xiong; Wendong Zhang; Jing Miao; Yuping Li

    2014-01-01

      Currently, most capacitive micromachined ultrasound transducers, adopting surface sacrificial technology encounter various problems such as difficult cavity etch, low controllability of membrane thickness etc...

  2. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  3. Micromachined capacitive transducer arrays for intravascular ultrasound

    Science.gov (United States)

    Degertekin, F. Levent; Guldiken, R. Oytun; Karaman, Mustafa

    2005-01-01

    Intravascular ultrasound (IVUS) imaging has become an essential imaging modality for the effective diagnosis and treatment of cardiovascular diseases during the past decade enabled by innovative applications of piezoelectric transducer technology. The limitations in the manufacture and performance of the same piezoelectric transducers have also impeded the improvement of IVUS for emerging clinically important applications such as forward viewing arrays for guiding interventions and high resolution imaging of arterial structure such as vulnerable plaque and fibrous cap, and also implementation of techniques such as harmonic imaging of the tissue and of the contrast agents. Capacitive micromachined ultrasonic transducer (CMUT) technology shows great potential for transforming IVUS not only to satisfy these clinical needs but also to open up possibilities for low-cost imaging devices integrated to therapeutic tools. We have developed manufacturing processes with a maximum process temperature of 250°C to build CMUTs on the same silicon chip with integrated electronics. Using these processes we fabricated CMUT arrays suitable for forward viewing IVUS in the 10-20MHz range. We characterized these array elements in terms of pulse-echo response, radiation pattern measurements and demonstrated its volumetric imaging capabilities on various imaging targets.

  4. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    Micromachined capacitive pressure sensors for harsh environment together with interfacing electronic circuits have been studied in this project. Micro-electromechanical systems (MEMS) have been proposed as substitutes for macro scale sensor’s systems in many different fields and are the only...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump...

  5. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  6. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

    OpenAIRE

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wi...

  7. Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers.

    Science.gov (United States)

    Dausch, David E; Castellucci, John B; Chou, Derrick R; von Ramm, Olaf T

    2008-11-01

    Piezoelectric micromachined ultrasound transducers (pMUTs) are a new approach for the construction of 2-D arrays for forward-looking 3-D intravascular (IVUS) and intracardiac (ICE) imaging. Two-dimensional pMUT test arrays containing 25 elements (5 x 5 arrays) were bulk micromachined in silicon substrates. The devices consisted of lead zirconate titanate (PZT) thin film membranes formed by deep reactive ion etching of the silicon substrate. Element widths ranged from 50 to 200 microm with pitch from 100 to 300 mum. Acoustic transmit properties were measured in de-ionized water with a calibrated hydrophone placed at a range of 20 mm. Measured transmit frequencies for the pMUT elements ranged from 4 to 13 MHz, and mode of vibration differed for the various element sizes. Element capacitance varied from 30 to over 400 pF depending on element size and PZT thickness. Smaller element sizes generally produced higher acoustic transmit output as well as higher frequency than larger elements. Thicker PZT layers also produced higher transmit output per unit electric field applied. Due to flexure mode operation above the PZT coercive voltage, transmit output increased nonlinearly with increased drive voltage. The pMUT arrays were attached directly to the Duke University T5 Phased Array Scanner to produce real-time pulse-echo B-mode images with the 2-D pMUT arrays.

  8. A novel design of micromachined capacitive Lamb wave transducers

    Science.gov (United States)

    Ge, Lifeng

    2006-11-01

    A new design for micromachined capacitive Lamb wave transducers (mCLWT) has been developed. The design is based on a theoretical TDK model previously developed for groove ultrasonic transducers. By the investigation of the dynamic behavior of a rectangular high aspect ratio diaphragm of the mCLWTs, the second order bending mode of the diaphragm is exploited to excite and detect Lamb wave. The new exiting mechanism can minimize the energy of the acoustic radiation at the normal direction of the diaphragm so as to provide more energy coupled into the Lamb wave in the silicon substrate. Also, the natural frequencies and mode shapes of such a mCLWT can be determined accurately from its geometry and materials used, so the TDK model provides guidance for the optimal design of mCLWTs.

  9. Fabricating Capacitive Micromachined Ultrasonic Transducers with Wafer Bonding Technique

    Directory of Open Access Journals (Sweden)

    Anil ARORA

    2008-06-01

    Full Text Available We report the fabrication of capacitive micromachined ultrasonic transducer by wafer bonding technique. Membrane is transferred from SOI wafer to the prime wafer having silicon dioxide cavity. The thickness of cavity height depends on silicon dioxide grown on prime wafer by dry/wet oxidation. Thinning of device wafer of SOI by oxidation, controls membrane thickness. Two wafers are bonded in vacuum under optimized controlled parameters. Using this method, we can get single crystal silicon as membrane, whose mechanical and electrical parameters are well known. Silicon membrane is free from stress and density variation. Focused Ion Beam etching and laser Doppler Vibrometer were used to do structural and electrical characterization respectively. The measured resonance frequency of fabricated device i.e. 2.24 MHz is much closer to the designed value i.e. 2.35 MHz.

  10. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  11. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  12. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a −6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  13. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten

    2010-01-01

    is one of the key challenges nowadays. In this context, house heating is a priority for environmental issues. For this reason, the possibilities of using a low power consumption technique, such as capacitive pressure sensing, in harsh environments is a concrete market opportunity. Our aim is therefore....... A measurement setup was arranged and tested for accuracy and reliability with respect to hysteresis. Finally, designs with different radii of the top plate were characterized by a capacitance versus pressure curve at different frequencies and temperatures (Fig. 3). Industrial possibilities Energy saving systems...

  14. TOPICAL REVIEW: Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

    Science.gov (United States)

    Chen, Jingkuang

    2010-02-01

    This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer (CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate today's medical ultrasound market, the capacitive micromachined ultrasonic transducer has recently emerged as a promising alternative which delivers a comparable device performance to its piezoelectric counterparts, is compatible with front-end circuit integration, allows high-density imager integration and is relative easy in miniaturization. Utilizing MEMS technology, the substrate of CMUT arrays can be micromachined into miniature platforms with various geometrical shapes, which include needles, three-dimensional prisms, as well as other flexible-substrate configurations. These arrays are useful for reaching deep inside the tissue or an organ with a minimally invasive approach. Due to the close proximity of the transducers to the target organ/tissue, a higher resolution/accuracy of diagnostic information can be achieved. In addition to pulse-echo and photoacoustic imaging, high-power CMUT devices capable of delivering ultrasounds with a pressure greater than 1.0 MPa have been monolithically integrated with imager CMUTs for image-guided therapy (IGT). Such miniature devices would facilitate diagnostic and therapy interventions not possible with conventional piezoelectric transducers.

  15. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    DEFF Research Database (Denmark)

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sens...... bonding to create vacuum cavities. The exposed part of the sensor is perfectly flat such that it can be coated with corrosion resistant thin films. Hysteresis is an inherent problem in touch mode capacitive pressure sensors and a technique to significantly reduce it is presented....

  16. Fabrication of Capacitive Micromachined Ultrasonic Transducers Using a Boron Etch-Stop Method

    DEFF Research Database (Denmark)

    Diederichsen, Søren Elmin; Sandborg-Olsen, Filip; Engholm, Mathias

    2016-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) fabricated using Silicon-On-Insulator (SOI) wafers often have large thickness variation of the flexible plate, which causes variation in both pull-in voltage and resonant frequency across the CMUT array. This work presents a bond and boron...... wt% potassium hydroxide solution with isopropyl alcohol added to increase the etch selectivity to the highly doped boron layer. The resulting plate thickness uniformity is estimated from scanning electron micrographs to a mean value of 2.00μm±2.5%. The resonant frequency in air for a 1-D linear CMUT...

  17. A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms

    Directory of Open Access Journals (Sweden)

    Zhou Zheng

    2015-09-01

    Full Text Available A highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs with rectangular membranes under electrostatic pressure has been formulated. The rectangular diaphragms have a thickness range of 0.6–1.5 μm and a side length range of 100–1000 μm. The new deflection shape function generates deflection profiles that are in excellent agreement with finite element analysis (FEA results for a wide range of geometry dimensions and loading conditions. The deflection shape function is used to analyze membrane deformations and to calculate the capacitances between the deformed membranes and the fixed back plates. In 50 groups of random tests, compared with FEA results, the calculated capacitance values have a maximum deviation of 1.486% for rectangular membranes. The new analytical deflection function can provide designers with a simple way of gaining insight into the effects of designed parameters for CMUTs and other MEMS-based capacitive type sensors.

  18. An FPGA-based ultrasound imaging system using capacitive micromachined ultrasonic transducers.

    Science.gov (United States)

    Wong, Lawrence L P; Chen, Albert I; Logan, Andrew S; Yeow, John T W

    2012-07-01

    We report the design and experimental results of a field-programmable gate array (FPGA)-based real-time ultrasound imaging system that uses a 16-element phased-array capacitive micromachined ultrasonic transducer fabricated using a fusion bonding process. The imaging system consists of the transducer, discrete analog components situated on a custom-made circuit board, the FPGA, and a monitor. The FPGA program consists of five functional blocks: a main counter, transmit and receive beamformer, receive signal pre-processing, envelope detection, and display. No dedicated digital signal processor or personal computer is required for the imaging system. An experiment is carried out to obtain the sector B-scan of a 4-wire target. The ultrasound imaging system demonstrates the possibility of an integrated system-in-a-package solution.

  19. Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis

    Directory of Open Access Journals (Sweden)

    A Martowicz

    2016-09-01

    Full Text Available The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken into account in elaborated finite element model of one cell of described transducer in order to include significant physical phenomena present in modelled microdevice. The set of twelve input uncertain and design parameters consists of geometric, material and control properties. The amplitude of dynamic membrane deformation of the transducer has been chosen as studied parameter. The objective of performed study has been defined as the task of finding robust design configurations of the transducer, i.e. characterizing maximal value of deformation amplitude with its minimal variation.

  20. An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode.

    Science.gov (United States)

    Olcum, Selim; Yamaner, F Yalcin; Bozkurt, Ayhan; Köymen, Hayrettin; Atalar, Abdullah

    2011-07-01

    The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs.

  1. Fabrication of capacitive micromachined ultrasonic transducers based on adhesive wafer bonding technique

    Science.gov (United States)

    Li, Zhenhao; Wong, Lawrence L. P.; Chen, Albert I. H.; Na, Shuai; Sun, Jame; Yeow, John T. W.

    2016-11-01

    This paper reports the fabrication process of wafer bonded capacitive micromachined ultrasonic transducers (CMUTs) using photosensitive benzocyclobutene as a polymer adhesive. Compared with direct bonding and anodic bonding, polymer adhesive bonding provides good tolerance to wafer surface defects and contamination. In addition, the low process temperature of 250 °C is compatible with standard CMOS processes. Single-element CMUTs consisting of cells with a diameter of 46 µm and a cavity depth of 323 nm were fabricated. In-air and immersion acoustic characterizations were performed on the fabricated CMUTs, demonstrating their capability for transmitting and receiving ultrasound signals. An in-air resonance frequency of 5.47 MHz was measured by a vibrometer under a bias voltage of 300 V.

  2. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-04-01

    Full Text Available This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

  3. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  4. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Science.gov (United States)

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  5. Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Bellaredj, M.; Bourbon, G.; Walter, V.; Le Moal, P.; Berthillier, M.

    2014-02-01

    In medical ultrasound imaging, mostly piezoelectric crystals are used as ultrasonic transducers. Capacitive micromachined ultrasonic transducers (CMUTs) introduced around 1994 have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency or bandwidth. This paper focuses on a fabrication process for CMUTs using anodic bonding of a silicon on insulator wafer on a glass wafer. The processing steps are described leading to a good control of the mechanical response of the membrane. This technology makes possible the fabrication of large membranes and can extend the frequency range of CMUTs to lower frequencies of operation. Silicon membranes having radii of 50, 70, 100 and 150 µm and a 1.5 µm thickness are fabricated and electromechanically characterized using an auto-balanced bridge impedance analyzer. Resonant frequencies from 0.6 to 2.3 MHz and an electromechanical coupling coefficient around 55% are reported. The effects of residual stress in the membranes and uncontrolled clamping conditions are clearly responsible for the discrepancies between experimental and theoretical values of the first resonance frequency. The residual stress in the membranes is determined to be between 90 and 110 MPa. The actual boundary conditions are between the clamped condition and the simply supported condition and can be modeled with a torsional stiffness of 2.10-7 Nm rad-1 in the numerical model.

  6. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  7. First in vivo use of a capacitive micromachined ultrasound transducer array-based imaging and ablation catheter.

    Science.gov (United States)

    Stephens, Douglas N; Truong, Uyen T; Nikoozadeh, Amin; Oralkan, Omer; Seo, Chi Hyung; Cannata, Jonathan; Dentinger, Aaron; Thomenius, Kai; de la Rama, Alan; Nguyen, Tho; Lin, Feng; Khuri-Yakub, Pierre; Mahajan, Aman; Shivkumar, Kalyanam; O'Donnell, Matt; Sahn, David J

    2012-02-01

    The primary objective was to test in vivo for the first time the general operation of a new multifunctional intracardiac echocardiography (ICE) catheter constructed with a microlinear capacitive micromachined ultrasound transducer (ML-CMUT) imaging array. Secondarily, we examined the compatibility of this catheter with electroanatomic mapping (EAM) guidance and also as a radiofrequency ablation (RFA) catheter. Preliminary thermal strain imaging (TSI)-derived temperature data were obtained from within the endocardium simultaneously during RFA to show the feasibility of direct ablation guidance procedures. The new 9F forward-looking ICE catheter was constructed with 3 complementary technologies: a CMUT imaging array with a custom electronic array buffer, catheter surface electrodes for EAM guidance, and a special ablation tip, that permits simultaneous TSI and RFA. In vivo imaging studies of 5 anesthetized porcine models with 5 CMUT catheters were performed. The ML-CMUT ICE catheter provided high-resolution real-time wideband 2-dimensional (2D) images at greater than 8 MHz and is capable of both RFA and EAM guidance. Although the 24-element array aperture dimension is only 1.5 mm, the imaging depth of penetration is greater than 30 mm. The specially designed ultrasound-compatible metalized plastic tip allowed simultaneous imaging during ablation and direct acquisition of TSI data for tissue ablation temperatures. Postprocessing analysis showed a first-order correlation between TSI and temperature, permitting early development temperature-time relationships at specific myocardial ablation sites. Multifunctional forward-looking ML-CMUT ICE catheters, with simultaneous intracardiac guidance, ultrasound imaging, and RFA, may offer a new means to improve interventional ablation procedures.

  8. First In Vivo Use of a Capacitive Micromachined Ultrasound Transducer Array–Based Imaging and Ablation Catheter

    Science.gov (United States)

    Stephens, Douglas N.; Truong, Uyen T.; Nikoozadeh, Amin; Oralkan, Ömer; Seo, Chi Hyung; Cannata, Jonathan; Dentinger, Aaron; Thomenius, Kai; de la Rama, Alan; Nguyen, Tho; Lin, Feng; Khuri-Yakub, Pierre; Mahajan, Aman; Shivkumar, Kalyanam; O’Donnell, Matt; Sahn, David J.

    2012-01-01

    Objectives The primary objective was to test in vivo for the first time the general operation of a new multifunctional intracardiac echocardiography (ICE) catheter constructed with a microlinear capacitive micromachined ultrasound transducer (ML-CMUT) imaging array. Secondarily, we examined the compatibility of this catheter with electroanatomic mapping (EAM) guidance and also as a radiofrequency ablation (RFA) catheter. Preliminary thermal strain imaging (TSI)-derived temperature data were obtained from within the endocardium simultaneously during RFA to show the feasibility of direct ablation guidance procedures. Methods The new 9F forward-looking ICE catheter was constructed with 3 complementary technologies: a CMUT imaging array with a custom electronic array buffer, catheter surface electrodes for EAM guidance, and a special ablation tip, that permits simultaneous TSI and RFA. In vivo imaging studies of 5 anesthetized porcine models with 5 CMUT catheters were performed. Results The ML-CMUT ICE catheter provided high-resolution real-time wideband 2-dimensional (2D) images at greater than 8 MHz and is capable of both RFA and EAM guidance. Although the 24-element array aperture dimension is only 1.5 mm, the imaging depth of penetration is greater than 30 mm. The specially designed ultrasound-compatible metalized plastic tip allowed simultaneous imaging during ablation and direct acquisition of TSI data for tissue ablation temperatures. Postprocessing analysis showed a first-order correlation between TSI and temperature, permitting early development temperature-time relationships at specific myocardial ablation sites. Conclusions Multifunctional forward-looking ML-CMUT ICE catheters, with simultaneous intracardiac guidance, ultrasound imaging, and RFA, may offer a new means to improve interventional ablation procedures. PMID:22298868

  9. The effect of hydrazine intercalation on the structure and capacitance of 2D titanium carbide (MXene).

    Science.gov (United States)

    Mashtalir, O; Lukatskaya, M R; Kolesnikov, A I; Raymundo-Piñero, E; Naguib, M; Barsoum, M W; Gogotsi, Y

    2016-04-28

    Herein we show that hydrazine intercalation into 2D titanium carbide (Ti3C2-based MXene) results in changes in its surface chemistry by decreasing the amounts of fluorine, OH surface groups and intercalated water. It also creates a pillaring effect between Ti3C2Tx layers pre-opening the structure and improving the accessability to active sites. The hydrazine treated material has demonstrated a greatly improved capacitance of 250 F g(-1) in acidic electrolytes with an excellent cycling ability for electrodes as thick as 75 μm.

  10. The effect of hydrazine intercalation on the structure and capacitance of 2D titanium carbide (MXene)

    Science.gov (United States)

    Mashtalir, O.; Lukatskaya, M. R.; Kolesnikov, A. I.; Raymundo-Piñero, E.; Naguib, M.; Barsoum, M. W.; Gogotsi, Y.

    2016-04-01

    Herein we show that hydrazine intercalation into 2D titanium carbide (Ti3C2-based MXene) results in changes in its surface chemistry by decreasing the amounts of fluorine, OH surface groups and intercalated water. It also creates a pillaring effect between Ti3C2Tx layers pre-opening the structure and improving the accessability to active sites. The hydrazine treated material has demonstrated a greatly improved capacitance of 250 F g-1 in acidic electrolytes with an excellent cycling ability for electrodes as thick as 75 μm.Herein we show that hydrazine intercalation into 2D titanium carbide (Ti3C2-based MXene) results in changes in its surface chemistry by decreasing the amounts of fluorine, OH surface groups and intercalated water. It also creates a pillaring effect between Ti3C2Tx layers pre-opening the structure and improving the accessability to active sites. The hydrazine treated material has demonstrated a greatly improved capacitance of 250 F g-1 in acidic electrolytes with an excellent cycling ability for electrodes as thick as 75 μm. Electronic supplementary information (ESI) available: Characterization methods, additional XRD patterns (Fig. S1) and INS spectra (Fig. S2-S4). See DOI: 10.1039/c6nr01462c

  11. Second harmonic and subharmonic for non-linear wideband contrast imaging using a capacitive micromachined ultrasonic transducer array.

    Science.gov (United States)

    Novell, Anthony; Escoffre, Jean-Michel; Bouakaz, Ayache

    2013-08-01

    When insonified with suitable ultrasound excitation, contrast microbubbles generate various non-linear scattered components, such as the second harmonic (2H) and the subharmonic (SH). In this study, we exploit the wide frequency bandwidth of capacitive micromachined ultrasonic transducers (CMUTs) to enhance the response from ultrasound contrast agents by selective imaging of both the 2H and SH components simultaneously. To this end, contrast images using the pulse inversion method were recorded with a 64-element CMUT linear array connected to an open scanner. In comparison to imaging at 2H alone, the wideband imaging including both the 2H and SH contributions provided up to 130% and 180% increases in the signal-to-noise and contrast-to-tissue ratios, respectively. The wide-frequency band of CMUTs offers new opportunities for improved ultrasound contrast agent imaging.

  12. Fabrication of capacitive acoustic resonators combining 3D printing and 2D inkjet printing techniques.

    Science.gov (United States)

    Haque, Rubaiyet Iftekharul; Ogam, Erick; Loussert, Christophe; Benaben, Patrick; Boddaert, Xavier

    2015-10-14

    A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.

  13. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques

    Directory of Open Access Journals (Sweden)

    Rubaiyet Iftekharul Haque

    2015-10-01

    Full Text Available A capacitive acoustic resonator developed by combining three-dimensional (3D printing and two-dimensional (2D printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.

  14. Optimization Design Method for the CMOS-Type Capacitive Micro-Machined Ultrasonic Transducer

    National Research Council Canada - National Science Library

    D Y Chiou; S B Luo; H H Chen

    2011-01-01

    ...) capacitive micro-arrayed ultrasonic transducer (pCMOS-CMUT) is presented. Electromechanical finite element simulations are performed to investigate its operational characteristics, such as the collapse voltage and the resonant frequency...

  15. Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

    Directory of Open Access Journals (Sweden)

    Hongliang Wang

    2014-07-01

    Full Text Available An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity analysis, it can be found that its directivity is weak due to the small size of the designed transducer, but the directivity of the designed linear array is very strong. In order to further suppress the sidelobe interference and improve the resolution of the imaging system and imaging quality, the Dolph-Chebyshev weighting method and the Taylor weighting method are used to process −40dB sidelobe suppression, and satisfactory results are obtained, which can meet actual requirements.

  16. Optimization Design Method for the CMOS-type Capacitive Micro-Machined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    D. Y. Chiou

    2011-12-01

    Full Text Available In this study, an integrated modeling technique for characterization and optimization design of the complementary metal-oxide-semiconductor (CMOS capacitive micro-arrayed ultrasonic transducer (pCMOS-CMUT is presented. Electromechanical finite element simulations are performed to investigate its operational characteristics, such as the collapse voltage and the resonant frequency. Both the numerical and experimental results are in good agreement. In order to simultaneously customize the resonant frequency and minimize the collapse voltage, the genetic algorithm (GA is applied to optimize dimensional parameters of the transducer. From the present results, it is concluded that the FE/GA coupling approach provides another efficient numerical tool for multi-objective design of the pCMOS-CMUT.

  17. A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding.

    Science.gov (United States)

    Yamaner, F Yalçın; Zhang, Xiao; Oralkan, Ömer

    2015-05-01

    This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bondingbased CMUT fabrication processes, including process simplicity, control over plate thickness and properties, high fill factor, and ability to implement large vibrating cells. In addition to these, compared with fusion bonding, anodic bonding can be performed at lower processing temperatures, i.e., 350°C as opposed to 1100°C; surface roughness requirement for anodic bonding is more than 10 times more relaxed, i.e., 5-nm rootmean- square (RMS) roughness as opposed to 0.5 nm for fusion bonding; anodic bonding can be performed on smaller contact area and hence improves the fill factor for CMUTs. Although anodic bonding has been previously used for CMUT fabrication, a CMUT with a vacuum cavity could not have been achieved, mainly because gas is trapped inside the cavities during anodic bonding. In the approach we present in this paper, the vacuum cavity is achieved by opening a channel in the plate structure to evacuate the trapped gas and subsequently sealing this channel by conformal silicon nitride deposition in the vacuum environment. The plate structure of the fabricated CMUT consists of the single-crystal silicon device layer of a silicon-on-insulator wafer and a thin silicon nitride insulation layer. The presented fabrication approach employs only three photolithographic steps and combines the advantages of anodic bonding with the advantages of a patterned metal bottom electrode on an insulating substrate, specifically low parasitic series resistance and low parasitic shunt capacitance. In this paper, the developed fabrication scheme is described in detail, including process recipes. The fabricated transducers are characterized using electrical input impedance measurements in air and hydrophone measurements in immersion. A representative

  18. Capacitive Substrate Coupling of Row–Column-Addressed 2-D CMUT Arrays

    DEFF Research Database (Denmark)

    Engholm, Mathias; Bouzari, Hamed; Jensen, Jørgen Arendt;

    2016-01-01

    of the semiconductor substrate can be sustained for at least 10 minutes making it applicable for row–column-addressed CMUT arrays for ultrasonic imaging. Theoretically the reduced parasitic capacitance indicates that the receive sensitivity of the bottom elements can be increased by a factor of 2:1....

  19. Sub-60 mV/decade switching in 2D negative capacitance field-effect transistors with integrated ferroelectric polymer

    Science.gov (United States)

    McGuire, Felicia A.; Cheng, Zhihui; Price, Katherine; Franklin, Aaron D.

    2016-08-01

    There is a rising interest in employing the negative capacitance (NC) effect to achieve sub-60 mV/decade (below the thermal limit) switching in field-effect transistors (FETs). The NC effect, which is an effectual amplification of the applied gate potential, is realized by incorporating a ferroelectric material in series with a dielectric in the gate stack of a FET. One of the leading challenges to such NC-FETs is the variable substrate capacitance exhibited in 3D semiconductor channels (bulk, Fin, or nanowire) that minimizes the extent of sub-60 mV/decade switching. In this work, we demonstrate 2D NC-FETs that combine the NC effect with 2D MoS2 channels to extend the steep switching behavior. Using the ferroelectric polymer, poly(vinylidene difluoride-trifluoroethylene) (P(VDF-TrFE)), these 2D NC-FETs are fabricated by modification of top-gated 2D FETs through the integrated addition of P(VDF-TrFE) into the gate stack. The impact of including an interfacial metal between the ferroelectric and dielectric is studied and shown to be critical. These 2D NC-FETs exhibit a decrease in subthreshold swing from 113 mV/decade down to 11.7 mV/decade at room temperature with sub-60 mV/decade switching occurring over more than 4 decades of current. The P(VDF-TrFE) proves to be an unstable option for a device technology, yet the superb switching behavior observed herein opens the way for further exploration of nanomaterials for extremely low-voltage NC-FETs.

  20. Carriers In 2D-Semiconductor Structures: A Scanning Capacitance Microscopy Study

    Science.gov (United States)

    Anand, S.; Maknys, K.; Douhéret, O.

    2003-12-01

    In this work, cross-sectional scanning capacitance microscopy (SCM) is used to investigate electrons in InGaAs/InP (latticed matched) quantum wells. Using n-doped InP as barriers with different doping levels, different InGaAs wells structures (5,10 and 20nm) were investigated. The capability of SCM to detect electrons in the quantum wells is demonstrated. In addition, trends for the different well widths and barrier doping levels are discussed. The SCM results are qualitatively consistent with electron distribution obtained for 1D Poisson/Schrödinger simulation. Finally, resolution issues in SCM are discussed in terms of tip averaging effects.

  1. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

    Science.gov (United States)

    Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

    2016-06-01

    A fast 2D axisymmetric fluid-analytical multifrequency capacitively coupled plasma (CCP) reactor code is used to study center high nonuniformity in a low pressure electronegative chlorine discharge. In the code, a time-independent Helmholtz wave equation is used to solve for the capacitive fields in the linearized frequency domain. This eliminates the time dependence from the electromagnetic (EM) solve, greatly speeding up the simulations at the cost of neglecting higher harmonics. However, since the code allows up to three driving frequencies, we can add the two most important harmonics to the CCP simulations as the second and third input frequencies. The amplitude and phase of these harmonics are estimated by using a recently developed 1D radial nonlinear transmission line (TL) model of a highly asymmetric cylindrical discharge (Lieberman et al 2015 Plasma Sources Sci. Technol. 24 055011). We find that at higher applied frequencies, the higher harmonics contribute significantly to the center high nonuniformity due to their shorter plasma wavelengths.

  2. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  3. 2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor

    Science.gov (United States)

    Kim, Ho Jun; Lee, Hae June

    2016-06-01

    The wide applicability of capacitively coupled plasma (CCP) deposition has increased the interest in developing comprehensive numerical models, but CCP imposes a tremendous computational cost when conducting a transient analysis in a three-dimensional (3D) model which reflects the real geometry of reactors. In particular, the detailed flow features of reactive gases induced by 3D geometric effects need to be considered for the precise calculation of radical distribution of reactive species. Thus, an alternative inclusive method for the numerical simulation of CCP deposition is proposed to simulate a two-dimensional (2D) CCP model based on the 3D gas flow results by simulating flow, temperature, and species fields in a 3D space at first without calculating the plasma chemistry. A numerical study of a cylindrical showerhead-electrode CCP reactor was conducted for particular cases of SiH4/NH3/N2/He gas mixture to deposit a hydrogenated silicon nitride (SiN x H y ) film. The proposed methodology produces numerical results for a 300 mm wafer deposition reactor which agree very well with the deposition rate profile measured experimentally along the wafer radius.

  4. 静电驱动电容式微机械陀螺寄生Coriolis力的建模与分析%Modeling and Analysis of Coriolis Offset for Micromachined Gyroscope with Electrostatic Driving and Capacitive Sensing

    Institute of Scientific and Technical Information of China (English)

    莫冰; 郑琦; 刘晓为; 陈斯浩

    2011-01-01

    A micromachined gyroscope with electrostatic driving and capacitive sensing was investigated based on mechanical analysis of Coriolis offset, and an equivalent electrical model of micromachined gyroscope including Coriolis offset was established. This model was simulated and compared with the equivalent electrical model of micromachined gyroscope under ideal conditions. Results indicated that, for micromachined gyroscope with electrostatic driving and capacitive sensing, the Coriolis offset affected neither frequency nor phase of the desired signal, but it may reduce the amplitude of desired signal within 0. 2%o.%在静电驱动电容式微机械陀螺传感器结构的基础上,对寄生Coriolis力进行受力分析,建立了寄生Coriolis力的等效电学模型.比较分析了理想情况下微机械陀螺的等效电学模型以及包含寄生Coriolis力的等效电学模型,结果表明,对于静电驱动电容式微机械陀螺,寄生Coriolis力并不改变有用信号的频率及相位,对其峰峰值的衰减程度小于0.2‰.

  5. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed...

  6. Design and Test of Capacitance Micro-machined Ultrasonic Transducer%微电容超声传感器的设计与测试

    Institute of Scientific and Technical Information of China (English)

    穆林枫; 张文栋; 何常德; 张睿; 宋金龙; 薛晨阳

    2015-01-01

    Due to the problem of higher parasitic of Capacitance Micro-machined Ultrasonic Transducer ( CMUT),isolation technology was adopted to apart the vibrating membrane from top electrode,which avoided the effect of doping.The capacitance change rate was the main line of the paper,the calculation and simulation of micro transducer and detection circuit were presented, which built the road between micro transducer and detection circuit.Test system underwater was also conducted.The test results show that the actual output voltage is 0.8 V,and the theory value is 0.61 V,which demonstrates the applicability of CMUT and the feasibility of test system.%针对现有微电容超声传感器( CMUT)寄生电容大的问题,采用绝缘技术将振动薄膜与上电极金属完全隔离的方法,避免了掺杂效应的发生,从而减小了寄生电容。文中以电容变化率为主线,分别对微传感器和跨阻检测电路的电容变化率进行了计算和仿真,建立了传感器与电路检测的通道,并通过水下测试系统的搭建,对其进行实验验证。测试结果表明,实际输出电压的值为0.8 V,与理论计算值0.61 V相近,从而验证了CMUT的可用性及其测试系统的可行性。

  7. High-Performance One-Body Core/Shell Nanowire Supercapacitor Enabled by Conformal Growth of Capacitive 2D WS2 Layers.

    Science.gov (United States)

    Choudhary, Nitin; Li, Chao; Chung, Hee-Suk; Moore, Julian; Thomas, Jayan; Jung, Yeonwoong

    2016-12-27

    Two-dimensional (2D) transition-metal dichalcogenides (TMDs) have emerged as promising capacitive materials for supercapacitor devices owing to their intrinsically layered structure and large surface areas. Hierarchically integrating 2D TMDs with other functional nanomaterials has recently been pursued to improve electrochemical performances; however, it often suffers from limited cyclic stabilities and capacitance losses due to the poor structural integrity at the interfaces of randomly assembled materials. Here, we report high-performance core/shell nanowire supercapacitors based on an array of one-dimensional (1D) nanowires seamlessly integrated with conformal 2D TMD layers. The 1D and 2D supercapacitor components possess "one-body" geometry with atomically sharp and structurally robust core/shell interfaces, as they were spontaneously converted from identical metal current collectors via sequential oxidation/sulfurization. These hybrid supercapacitors outperform previously developed any stand-alone 2D TMD-based supercapacitors; particularly, exhibiting an exceptional charge-discharge retention over 30,000 cycles owing to their structural robustness, suggesting great potential for unconventional energy storage technologies.

  8. Frequency-Effects in Capacitively Coupled Radiofrequency Glow-Discharges - a Comparison between a 2-D Fluid Model and Experiments

    NARCIS (Netherlands)

    W. J. Goedheer,; Meijer, P. M.; Bezemer, J.; Passchier, J. D. P.; van Sark, Wgjhm

    1995-01-01

    The results of a 2-D fluid model for argon radiofrequency (RF) discharges in a closed cylindrical vacuum chamber are compared with experimental data from an amorphous silicon deposition reactor operated in argon. Good agreement is obtained for the relation between the DC autobias voltage and the dis

  9. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce......Real-time ultrasound imaging is a widely used technique in medical diagnostics. Recently, ultrasound systems offering real-time imaging in 3-D has emerged. However, the high complexity of the transducer probes and the considerable increase in data to be processed compared to conventional 2-D...

  10. An improved circuit noise model in a capacitive micromachined accelerometer%改进的电容式微加速度计中电路噪声模型

    Institute of Scientific and Technical Information of China (English)

    刘云涛; 王颖; 邵雷

    2012-01-01

    为了在加速度传感器设计中准确预测系统电路噪声,优化电路设计参数,建立了改进的电容式微加速度计中的电路噪声模型.详细分析了电荷积分器中的运算放大器噪声、开关热噪声、驱动信号参考电压、寄生电容电阻对系统噪声的影响,分析了相关双采样对热噪声和1/f噪声的影响,建立了微加速度计系统的输入参考噪声公式,所建立的电路噪声模型对各个电路噪声源进行综合考虑,没有忽略噪声源间的相互影响.仿真和测试结果表明:所建立的电路噪声模型能够准确的预测噪声水平,且开关热噪声在高精度微加速度计中严重影响着系统噪声水平.%In order to predict noise performance of a capacitive micromachined accelerometer as well as optimize parameters of circuits, an improved circuit noise model was established. The influences of the operational amplifier noise in the charge integrator, switch thermal noise, reference voltage of driving signals, parasitic capacitance, and dead resistance on the noise performance of the system were analyzed. The effect of correlated double sampling (CDS) on the thermal noise and 1/f noise was analyzed. An input reference noise model for a micromachined accelerometer was established, in which interaction among noise sources was considered. Simulated and tested results indicate that the noise model can predict noise level exactly, and the switch thermal noise plays an important role in high accuracy accelerometers.

  11. A micromachined surface stress sensor with electronic readout

    NARCIS (Netherlands)

    Carlen, E.T.; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

    2008-01-01

    A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filt

  12. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed...... in the frequency-wavenumber domain. The sources of cross-talk are identified and predicted theoretically. The nearest neighbor cross-talk is 23.9±3.7 dB when the array is used as a 1-D array with the rows functioning as both transmitters and receivers. In the row–column configuration, with the columns transmitting...

  13. Vacuum-sealed silicon micromachined pressure sensors

    Energy Technology Data Exchange (ETDEWEB)

    Esashi, Masayoshi [Tohoku Univ., Aobaku, Sendai (Japan); Sugiyama, Susumu [Ritsumeikan Univ., Kusatsu, Shiga (Japan); Ikeda, Kyoichi [Yokogawa Electric Corp., Nagano (Japan); Wang, Y. [Zhejian Univ., Hangzhou (China); Miyashita, Haruzo [Anelva Corp., Yamanashi (Japan)

    1998-08-01

    Considerable progress in silicon pressure sensors has been made in recent years. This paper discusses three types of vacuum-sealed silicon micromachined pressure sensors that represent the present state of the art in this important area. The devices are a capacitive vacuum sensor, a surface-micromachined microdiaphragm pressure sensor, and a resonant pressure sensor. Vacuum sealing for these devices is accomplished using anodic bonding, films deposited using low-pressure chemical vapor deposition, and thermal out-diffusion of hydrogen, respectively. These sensors emphasize high sensitivity; small size, and excellent stability, respectively. The silicon-diaphragm vacuum sensor uses electrostatic force balancing to achieve a wide pressure measurement range.

  14. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  15. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  16. Volumetric elasticity imaging with a 2-D CMUT array.

    Science.gov (United States)

    Fisher, Ted G; Hall, Timothy J; Panda, Satchi; Richards, Michael S; Barbone, Paul E; Jiang, Jingfeng; Resnick, Jeff; Barnes, Steve

    2010-06-01

    This article reports the use of a two-dimensional (2-D) capacitive micro-machined ultrasound transducer (CMUT) to acquire radio-frequency (RF) echo data from relatively large volumes of a simple ultrasound phantom to compare three-dimensional (3-D) elasticity imaging methods. Typical 2-D motion tracking for elasticity image formation was compared with three different methods of 3-D motion tracking, with sum-squared difference (SSD) used as the similarity measure. Differences among the algorithms were the degree to which they tracked elevational motion: not at all (2-D search), planar search, combination of multiple planes and plane independent guided search. The cross-correlation between the predeformation and motion-compensated postdeformation RF echo fields was used to quantify motion tracking accuracy. The lesion contrast-to-noise ratio was used to quantify image quality. Tracking accuracy and strain image quality generally improved with increased tracking sophistication. When used as input for a 3-D modulus reconstruction, high quality 3-D displacement estimates yielded accurate and low noise modulus reconstruction.

  17. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  18. Advanced 3-D Ultrasound Imaging: 3-D Synthetic Aperture Imaging using Fully Addressed and Row-Column Addressed 2-D Transducer Arrays

    DEFF Research Database (Denmark)

    Bouzari, Hamed

    with transducer arrays using this addressing scheme, when integrated into probe handles. For that reason, two in-house prototyped 62+62 row-column addressed 2-D array transducer probes were manufactured using capacitive micromachined ultrasonic transducer (CMUT) and piezoelectric transducer (PZT) technology...... in many clinical applications. Real-time 3-D ultrasound imaging is still not as widespread in use in the clinics as 2-D ultrasound imaging. Two limiting factors have traditionally been the low image quality as well as low volume rate achievable with a 2-D transducer array using the conventional 3-D...... and measurements with the ultrasound research scanner SARUS and a 3.8 MHz 1024 element 2-D transducer array. In all investigations, 3-D synthetic aperture imaging achieved a better resolution, lower side-lobes, higher contrast, and better signal to noise ratio than parallel beamforming. This is achieved partly...

  19. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  20. 具有栅结构与静电梳齿驱动的电容式微机械陀螺的仿真、设计与测试%Simulation, Design and Test of Capacitive Micromachined Gyroscope with Bar Structure and Comb-Drive Electrostatic Structure

    Institute of Scientific and Technical Information of China (English)

    谭秋林; 石云波; 张文栋; 刘俊; 张琼; 熊继军

    2011-01-01

    The capacitive gyroscope is a kind of vibratory gyroscope. Compared with the conventional gyroscope, the gyroscope has many merits because of its artffactitious particularity. The capacitive gyroscope has been widely used in many fields. In order to improve the measurement precision of the gyroscope, a design method of mieromachined gyroscope based on comb-drive electrostatic structure and capacitive detection of bar structure was presented in this paper. The operating principle of the micromachined gyroscope was analyzed in detail. The structural simulation and modal analysis of the gyroscope were developed by utilizing ANSYS soft. The simulation results are close to those of the theoretical calculation.The structure was designed and processed by technological processes. After processing and packaging, the gyroscope was tested. Experimental results show that the measured resonant frequency is 4. 06 kHz in driving mode, and the sensitivity is 0.027 9 V/(°/s).%电容式陀螺仪是一种振动式陀螺仪,由于加工的特殊性使其具有了传统的陀螺无法比拟的优点,从而拓宽了其应用领域.为了提高陀螺仪的检测精度,本文提出了一种静电梳齿驱动、栅结构的电容式检测的微机械陀螺仪的设计方法,并分析了其工作原理.运用ANSYS软件对陀螺结构进行了仿真和模态分析,仿真结果与理论计算结果相接近.所设计的陀螺结构采用体硅标准工艺方法进行了设计,并对其进行了流片加工和封装,最终得到了电容式微机械陀螺仪.实验测试的结果表明,陀螺驱动模态的固有频率为4.06kHz,灵敏度为0.027 9 v/((°)s-1).

  1. Silicon-micromachined accelerometers for space inertial systems

    Science.gov (United States)

    Saha, I.; Islam, R.; Kanakaraju, K.; Jain, Yashwant K.; Alex, T. K.

    1999-11-01

    Accelerometers are key components of various motion control systems ranging in use from inertial guidance of rockets and satellite launch vehicles to safety applications in the automotive industry. The accelerometers that are used for spare inertial systems are characterized by high resolution, small bandwidth, large working range and excellent linearity. Current advances in this field are based on silicon micromachining. Silicon bulk and surface micromachined accelerometers offer advantages of reduced size and weight, less power consumption and the use of a fabrication process derived form an already well established semiconductor fab technology. Of the various approaches to silicon micromachined accelerometers, two are in a well advanced state of development. The first is the capacitive force balanced type and the second the piezoresistive type. The capacitive approach has the advantage of higher stability and resolution and lower temperature coefficients. But it requires proximal detection circuitry to prevent parasitics to overwhelm the circuit. A new approach reported recently uses a silicon micromachined cantilever beam which acts as a Fabry Perot interferometer when light form an optical fiber is impinged on it. In this paper we overview all the approaches and try to select a suitable candidate for use in space borne inertial systems.

  2. Micromachined Fluid Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Shiqiang Liu

    2017-02-01

    Full Text Available Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.

  3. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  4. Micromachined Precision Inertial Instruments

    Science.gov (United States)

    2003-11-01

    and vacuum packaging techniques to achieve degree-per-hour inertial micro-gyroscopes. A single-wafer, all-silicon, high aspect-ratio p...Although vacuum packaging substantially reduces the mechanical noise of a surface micromachined accelerometer and lowers the output noise floor...it is desirable to operate sensors in atmosphere since vacuum packaging is not cost effective [15]. Figure 10: Performance improvements for In

  5. Micromachined Amperometric Nitrate Sensor

    OpenAIRE

    Dohyun Kim; Ira Goldberg; Jack Judy

    2003-01-01

    A nitrate-sensing system that consists of a micromachined sensor substrate, nitrate-permeable membrane, integrated microfluidic channels, and standard fluidic connectors has been designed, fabricated, assembled, and tested. Our microsensor was designed for in-situ monitoring of nitrate concentrations in ground water. A silver electrode was patterned for amperometric nitrate detection. An electrochemically oxidized silver electrode was used as a reference electrode. Microfluidic channels were ...

  6. Micromachined chemical jet dispenser

    Energy Technology Data Exchange (ETDEWEB)

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  7. Analysis of homogeneity of 2D electron gas at decreasing of electron density

    OpenAIRE

    Sherstobitov, A. A.; Minkov, G. M.; Germanenko, A. V.; Rut, O. E.; Soldatov, I. V.; Zvonkov, B. N.

    2010-01-01

    We investigate the gate voltage dependence of capacitance of a system gate - 2D electron gas (C-Vg). The abrupt drop of capacitance at decreasing concentration was found. The possible reasons of this drop, namely inhomogeneity of electron density distribution and serial resistance of 2D electron gas are discussed. Simultaneous analysis of gate voltage dependences of capacitance and resistance has shown that in heavily doped 2D systems the main role in the drop of capacitance at decreasing con...

  8. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...... project and collaboration with a lot of partners to improve medical ultrasound imaging. The focus in this part of the project is to design, fabricate and characterize 1D CMUT arrays. Two versions of 1D transducers are made, one at Stanford University and one at DTU. Electrical and acoustical...... resolution it is however necessary to develop new fabrication methods that allows fabrication of transducer elements with smaller dimensions. By using microfabrication technology it is possible to push the dimensions down and provide higher design flexibility. This project is part of a large ultrasound...

  9. Micro coriolis mass flow sensor with integrated capacitive readout

    NARCIS (Netherlands)

    Haneveld, J.; Lammerink, T.S.J.; Boer, de M.J.; Wiegerink, R.J.

    2009-01-01

    We have realized a micromachined micro Coriolis mass flow sensor with integrated capacitive readout to detect the extremely small Coriolis vibration of the sensor tube. A special comb-like detection electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods.

  10. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  11. Micromachining using femtosecond lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Ostendorf, Andreas; Nolte, Stefan; Korte, Frank; Bauer, Thorsten

    2000-11-01

    Femtosecond laser systems have been proved to be effective tools for high precision micro-machining. Almost all solid materials can be processed with high precision. The dependence on material properties like thermal conductivity, transparency, heat- or shock sensitivity is strongly reduced and no significant influence on the remaining bulk material is observed after ablation using femtosecond laser pulses. In contrast to conventional laser processing, where the achievable precision is reduced due to a formed liquid phase causing burr formation, the achievable precision using femtosecond pulses is only limited by the diffraction of the used optics. Potential applications of this technique, aincluding the structuring of biodegradable polymers for cardiovascular implants, so-called stents, as well as high precision machining of transparent materials are presented.

  12. Micromachined Resonators: A Review

    Directory of Open Access Journals (Sweden)

    Reza Abdolvand

    2016-09-01

    Full Text Available This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

  13. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  14. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    DEFF Research Database (Denmark)

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated...

  15. Analysis of small deflection touch mode behavior in capacitive pressure sensors

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas;

    2010-01-01

    mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...... such that geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...

  16. Micromachined dual input axis rate gyroscope

    Science.gov (United States)

    Juneau, Thor Nelson

    The need for inexpensive yet reliable angular rate sensors in fields ranging from automotive to consumer electronics has motivated prolific micromachined rate gyroscope research. The vast majority of research has focused on single input axis rate gyroscopes based upon either translational resonance, such as tuning forks, or structural mode resonance, such as vibrating rings. However, this work presents a novel, contrasting approach based on angular resonance of a rotating rigid rotor suspended by torsional springs. The inherent symmetry of the circular design allows angular rate measurement about two axes simultaneously, hence the name micromachined dual-axis rate gyroscope. The underlying theory of operation, mechanical structure design optimization, electrical interface circuitry, and signal processing are described in detail. Several operational versions were fabricated using two different fully integrated surface micromachining processes as proof of concept. The heart of the dual-axis rate gyroscope is a ˜2 mum thick polysilicon disk or rotor suspended above the substrate by a four beam suspension. When this rotor in driven into angular oscillation about the axis perpendicular to the substrate, a rotation rate about the two axes parallel to the substrate invokes an out of plane rotor tilting motion due to Coriolis acceleration. This tilting motion is capacitively measured and on board integrated signal processing provides two output voltages proportional to angular rate input about the two axes parallel to the substrate. The design process begins with the derivation of gyroscopic dynamics. The equations suggest that tuning sense mode frequencies to the drive oscillation frequency can vastly increase mechanical sensitivity. Hence the supporting four beam suspension is designed such that electrostatic tuning can match modes despite process variations. The electrostatic tuning range is limited only by rotor collapse to the substrate when tuning-voltage induced

  17. Micromachined vertical Hall magnetic field sensor in standard complementary metal oxide semiconductor technology

    Science.gov (United States)

    Paranjape, M.; Ristic, Lj.

    1992-06-01

    A novel 2D micromachined vertical Hall magnetic field sensor structure has been designed and fabricated using a commercially available 3 micron CMOS process. The device can detect two magnetic field components in the plane of the chip surface. The sensor exhibits a linear response and shows no cross-sensitivity between channels.

  18. Laser Micromachining of Glass, Silicon, and Ceramics

    Directory of Open Access Journals (Sweden)

    L. Rihakova

    2015-01-01

    Full Text Available A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

  19. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    Rihakova, L.; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  20. Distance effects in electrochemical micromachining

    Science.gov (United States)

    Xu, Lizhong; Pan, Yue; Zhao, Chuanjun

    2016-09-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separations. Small separations exert substantial effects on the real voltages. Accordingly, a DC-voltage small-separation electrochemical micromachining technique was proposed. The double-layer voltage drops sharply as the small separation increases. Thus, the electrochemical reactions are confined to electrode regions in very close proximity even under DC voltage. The machining precision can be significantly enhanced by reducing the voltage and separation between electrodes. With this technique, the machining of conducting materials with submicrometre precision was achieved.

  1. Micromachined magnetohydrodynamic actuators and sensors

    Science.gov (United States)

    Lee, Abraham P.; Lemoff, Asuncion V.

    2000-01-01

    A magnetohydrodynamic (MHD) micropump and microsensor which utilizes micromachining to integrate the electrodes with microchannels and includes a magnet for producing magnetic fields perpendicular to both the electrical current direction and the fluid flow direction. The magnet can also be micromachined and integrated with the micropump using existing technology. The MHD micropump, for example, can generate continuous, reversible flow, with readily controllable flow rates. The flow can be reversed by either reversing the electrical current flow or reversing the magnetic field. By mismatching the electrodes, a swirling vortex flow can be generated for potential mixing applications. No moving parts are necessary and the dead volume is minimal. The micropumps can be placed at any position in a fluidic circuit and a combination of micropumps can generate fluidic plugs and valves.

  2. Distance effects in electrochemical micromachining

    OpenAIRE

    2016-01-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separat...

  3. Magnetic micromachines for medical applications

    Science.gov (United States)

    Ishiyama, K.; Sendoh, M.; Arai, K. I.

    2002-04-01

    The spiral-type magnetic micromachine can swim in a liquid and in a gel. In addition, this machine has a function of heating. This machine is suitable for local heat treatment in the body. The active bending is obtained by attached tiny magnet at the tip of the guide-wire. This is simple and useful for inserting the catheter to the lung or to the blood tube.

  4. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  5. Micromachined microscanners for optical scanning

    Science.gov (United States)

    Kiang, Meng-Hsiung; Solgaard, Olav; Muller, Richard S.; Lau, Kam Y.

    1997-04-01

    We present the design and fabrication of surface- micromachined electrostatic-comb driven microscanners that have high angular precision over a large scan angle. When used as resonant scanners, these mirrors have fast scan rates with very low operating power. We use polysilicon microhinges, which allow the micromirrors to be lifted out of the plane of the substrate after processing is completed, to create high-aspect-ratio optical surfaces with dimensions in the hundreds of micrometers s while taking advantage of the planar surface-micromachining processing technology. Microscanners that are capable of high-speed scanning over large scan angles with high precision have been fabricated. Application of these actuated micromirrors in laser barcode scanning and optical-fiber switches have been demonstrated. These single-mirror scanners can be combined to form more complicated microscanners such as a two-mirror, two-axis raster scanner that have a wide range of applications in areas such as medicine, displays, printing, data storage, and communications.

  6. Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

    Institute of Scientific and Technical Information of China (English)

    ZHOU Bin; GAO Zhong-yu; CHEN Huai; ZHANG Rong; CHEN Zhi-yong

    2006-01-01

    A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adiustment,improve the control performance of gyroscope,and make error compensation.By digitalizing the output of the gyroscope,this system uses a floatingtype digital signal processor(DSP)to process the signal demodulation and achieve the feedback conffol of the gyroscope.Therefore.the small change of capacitance in the micromachined gyroscope Can be detected.A new demodulation algorithm of least mean square demodulation(LMSD)has been developed inside DSP Simulation and measurement results show that LMSD Can improve 29%of the noise performance compared with the typical multiplication method.In air pressure.a kind ofvibration-wheel micmmachined over the 100-Hz bandwidth by using this digital readout technology.

  7. Design, fabrication and levitation experiments of a micromachined electrostatically suspended six-axis accelerometer.

    Science.gov (United States)

    Cui, Feng; Liu, Wu; Chen, Wenyuan; Zhang, Weiping; Wu, Xiaosheng

    2011-01-01

    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated.

  8. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    Institute of Scientific and Technical Information of China (English)

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  9. Integrated mold/surface-micromachining process

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S.; Sniegowski, J.J.; Hetherington, D.L.

    1996-03-01

    We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration vehicle, is that of an accelerometer with a large proof mass and compliant suspension. The proof mass is formed by etching a mold into the silicon substrate, lining the mold with oxide, filling it with mechanical polysilicon, and then planarizing back to the level of the substrate. The resulting molded structure is recessed into the substrate, forming a planar surface ideal for subsequent processing. We then add surface-micromachined springs and sense contacts. The principal advantage of this new monolithically integrated mold/surface-micromachining process is that it decouples the design of the different sections of the device: In the case of a sensitive accelerometer, it allows us to optimize independently the proof mass, which needs to be as large, stiff, and heavy as possible, and the suspension, which needs to be as delicate and compliant as possible. The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. We anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems.

  10. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  11. Review of laser micromachining in contract manufacturing

    Science.gov (United States)

    Ogura, Glenn; Gu, Bo

    1998-06-01

    This paper explores the wide range of laser micromachining applications used in contract manufacturing. Contract manufacturing is used in several key industries such as microelectronics packaging, semiconductor, data storage, medical devices, communications, peripherals, automobiles and aerospace. Material types includes plastics, metals, ceramics, inorganics and composites. However laser micromachining is just one available technology for micromachining and other methods will be reviewed. Contract manufacturing offers two important glimpses of the future. Firstly prototype work for new applications often beings in contract manufacturing. Secondly, contract manufacturing can be an economic springboard to allow laser systems to be installed in a production environment.

  12. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  13. Design and Simulation of a New Decoupled Micromachined Gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Sharaf, Abdelhameed [NCRRT, EAEA, 3 Ahmed Elzomer Street, Nasr City, Cairo (Egypt); STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Sedky, Sherif [STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Physics Department, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Habib, S E-D [Electronics and Communication Department, Faculty of Engineering, Cairo University, 12613, Giza (Egypt)

    2006-04-01

    This paper reports on a new decoupled micromachined gyroscope. The proposed sensor is a dual mass type, electrostatically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk. Three different designs are introduced in this work. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factors and approximate bandwidths are extracted analytically and the results are confirmed using finite element analysis. The first design shows drive and sense modes resonance frequencies of 4077 Hz and 4081 Hz respectively; with a frequency mismatch lower than 0.1%. The drive and sense capacitance are 0.213 pF and 0.142 pF respectively. The mechanical and electrical sensitivities are 0.011 {mu}m/ ({sup 0}/s) and 2.75 mV/ ({sup 0}/s) respectively. The third design shows significantly improved mechanical and electrical sensitivities of 0.027 {mu}m/ ({sup 0}/s) and 6.85 mV/ ({sup 0}/s) respectively.

  14. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  15. Optical micromachines for photonic networks

    Science.gov (United States)

    Katagiri, Yoshitada

    2001-10-01

    The optical micromachines controlling the light in spatial and wavelength domains are based on the micro- optomechatronics which handles small objects in micrometers and covers the fields from monolithic fabrication and control techniques. Their advantageous features include quick response, high mechanical stability, and low driving power because of the small inertia effects. A wide variety of functions such as wavelength tuning and optical path switching has been realized. This paper describes typical applications corresponding to these functions and their possible implementations: optical manipulation for small optical components based on momentum transfer of photons, micro lenses fabricated monolithically on a substrate for optical integration circuits, tunable filters with moving mirrors driven by the electrostatic force fro pulse shaping, and optical switches based on thermo capillary for cross connect or add/drop multiplexing operations in network systems. These applications are useful for next-generation photonic reconfigurable networks.

  16. Soft micromachines with programmable motility and morphology

    Science.gov (United States)

    Huang, Hen-Wei; Sakar, Mahmut Selman; Petruska, Andrew J.; Pané, Salvador; Nelson, Bradley J.

    2016-07-01

    Nature provides a wide range of inspiration for building mobile micromachines that can navigate through confined heterogenous environments and perform minimally invasive environmental and biomedical operations. For example, microstructures fabricated in the form of bacterial or eukaryotic flagella can act as artificial microswimmers. Due to limitations in their design and material properties, these simple micromachines lack multifunctionality, effective addressability and manoeuvrability in complex environments. Here we develop an origami-inspired rapid prototyping process for building self-folding, magnetically powered micromachines with complex body plans, reconfigurable shape and controllable motility. Selective reprogramming of the mechanical design and magnetic anisotropy of body parts dynamically modulates the swimming characteristics of the micromachines. We find that tail and body morphologies together determine swimming efficiency and, unlike for rigid swimmers, the choice of magnetic field can subtly change the motility of soft microswimmers.

  17. Surface-micromachined 1MHz oscillator with low-noise Pierce configuration

    Energy Technology Data Exchange (ETDEWEB)

    Roessig, T.A.; Howe, R.T.; Pisano, A.P. [Univ. of California, Berkeley, CA (United States); Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States)

    1998-06-01

    A prototype high frequency tuning fork oscillator has been fabricated and tested in an integrated surface micromachining technology. The amplifier circuitry uses a capacitive current detection method, which offers superior noise performance over previous resistive methods. The prototype device has an output frequency of 1.022 MHz and exhibits a noise floor of {minus}88 dBc/Hz at a distance of 500 Hz from the carrier. The dominant source of frequency instability is the nonlinearity introduced by the use of parallel plate actuation.

  18. 2D semiconductor optoelectronics

    Science.gov (United States)

    Novoselov, Kostya

    The advent of graphene and related 2D materials has recently led to a new technology: heterostructures based on these atomically thin crystals. The paradigm proved itself extremely versatile and led to rapid demonstration of tunnelling diodes with negative differential resistance, tunnelling transistors, photovoltaic devices, etc. By taking the complexity and functionality of such van der Waals heterostructures to the next level we introduce quantum wells engineered with one atomic plane precision. Light emission from such quantum wells, quantum dots and polaritonic effects will be discussed.

  19. Silicon-micromachined microchannel plates

    Energy Technology Data Exchange (ETDEWEB)

    Beetz, Charles P. E-mail: NanoSystem@aol.com; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R. E-mail: winn@fair1.fairfield.edu

    2000-03-11

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of {approx}0.5 to {approx}25 {mu}m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  20. Silicon-micromachined microchannel plates

    Science.gov (United States)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-03-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ˜0.5 to ˜25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200°C, also compatible with high-temperture brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  1. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  2. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  3. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  4. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  5. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  6. Activated sludge model No. 2d, ASM2d

    DEFF Research Database (Denmark)

    Henze, M.

    1999-01-01

    The Activated Sludge Model No. 2d (ASM2d) presents a model for biological phosphorus removal with simultaneous nitrification-denitrification in activated sludge systems. ASM2d is based on ASM2 and is expanded to include the denitrifying activity of the phosphorus accumulating organisms (PAOs...

  7. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-14

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  8. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  9. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. PMID:24424468

  10. Towards a sub 15-dBA optical micromachined microphone.

    Science.gov (United States)

    Kim, Donghwan; Hall, Neal A

    2014-05-01

    Micromachined microphones with grating-based optical-interferometric readout have been demonstrated previously. These microphones are similar in construction to bottom-inlet capacitive microelectromechanical-system (MEMS) microphones, with the exception that optoelectronic emitters and detectors are placed inside the microphone's front or back cavity. A potential advantage of optical microphones in designing for low noise level is the use of highly-perforated microphone backplates to enable low-damping and low thermal-mechanical noise levels. This work presents an experimental study of a microphone diaphragm and backplate designed for optical readout and low thermal-mechanical noise. The backplate is 1 mm × 1 mm and is fabricated in a 2-μm-thick epitaxial silicon layer of a silicon-on-insulator wafer and contains a diffraction grating with 4-μm pitch etched at the center. The presented system has a measured thermal-mechanical noise level equal to 22.6 dBA. Through measurement of the electrostatic frequency response and measured noise spectra, a device model for the microphone system is verified. The model is in-turn used to identify design paths towards MEMS microphones with sub 15-dBA noise floors.

  11. Capacitive chemical sensor

    Science.gov (United States)

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  12. Piezoelectric micromachined ultrasonic transducers for fingerprint sensing

    Science.gov (United States)

    Lu, Yipeng

    phantom. Finally, a novel ultrasonic fingerprint sensor was demonstrated using a 24x8 array of 22 MHz PMUTs with 100 microm pitch, fully integrated with 180 nm CMOS circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20x8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D PDMS fingerprint phantom (10 mm by 8 mm) at a 1.2 mm distance from the array.

  13. Micromachined glass chips for ion analysis

    NARCIS (Netherlands)

    Gardeniers, Han; Mulder, Micha; Lüttge, Regina; Berg, van den Albert

    2002-01-01

    This article describes recent developments at Micronit Microfluidics B.V. and MESA+ in the field of "Lab-on-a-chip" systems for ion analysis. Glass chips with typical micromachined channel geometries for capillary electrophoresis and integrated conductivity detection were developed, with which separ

  14. High Efficiency Micromachining System Applied in Nanolithography

    Science.gov (United States)

    Chen, Xing; Lee, Dong Weon; Choi, Young Soo

    Scanning probe lithography such as direct-writing lithographic processes and nanoscratching techniques based on scanning probe microscopy have presented new micromachining methods for microelectromechanical system (MEMS). In this paper, a micromachining system for thermal scanning probe lithography is introduced, which consists of the cantilever arrays and a big stroke micro XY-stage. A large machining area and high machining speed can be realized by combining arrays of cantilevers possessing sharp tips at their top with the novel micro XY-stage which can obtain big displacements under relatively low driving voltage and in a small size. According to the above configuration, this micromachining system is provided with high throughputs and suitable for industrialization due to its MEMS-based simple fabrication process. The novel micro XY-stage applied in this system is presented in detail including the unique structure and principles, which shows an obvious improvement and distinct advantages in comparison with traditional structures. It is analyzed by mathematical model and then simulated using finite element method (FEM), it is proved to be able to practically serve the micromachining system with high capability.

  15. Biomolecular sensing using surface micromachined silicon plates

    NARCIS (Netherlands)

    Zapata, A.M.; Carlen, E.T.; Kim, E.S.; Hsiao, J.; Traviglia, D.; Weinberg, M.S.; Delapierre, G.; Puers, R.

    2007-01-01

    Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent atta

  16. Micromachined silicon plates for sensing molecular interactions

    NARCIS (Netherlands)

    Carlen, E.T.; Weinberg, M.S.; Dube, C.E.; Zapata, A.M.; Borenstein, J.T.

    2006-01-01

    A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing

  17. Pseudocapacitive Electrodes Produced by Oxidant-Free Polymerization of Pyrrole between the Layers of 2D Titanium Carbide (MXene).

    Science.gov (United States)

    Boota, Muhammad; Anasori, Babak; Voigt, Cooper; Zhao, Meng-Qiang; Barsoum, Michel W; Gogotsi, Yury

    2016-02-17

    Heterocyclic pyrrole molecules are in situ aligned and polymerized in the -absence of an oxidant between layers of the 2D Ti3C2Tx (MXene), resulting in high volumetric and gravimetric capacitances with capacitance retention of 92% after 25,000 cycles at a 100 mV s(-1) scan rate.

  18. Micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular array.

    Science.gov (United States)

    Liu, Changgeng; Djuth, Frank; Li, Xiang; Chen, Ruimin; Zhou, Qifa; Shung, K Kirk

    2012-04-01

    This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9×9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm(2) with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and -6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about -35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.

  19. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  20. Micromachined Inclinometer Based on Fluid Convection

    CERN Document Server

    Crespy, N; Combette, P; Boyer, P Temple; Giani, A; Foucaran, A

    2008-01-01

    This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numeric...

  1. Design of an electrochemical micromachining machine

    OpenAIRE

    Spieser, A; Ivanov, A.

    2014-01-01

    Electrochemical micromachining (μECM) is a non-conventional machining process based on the phenomenon of electrolysis. μECM became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro applications including microfluidics systems, stress-free drilled holes in automotive and aerospace manufacturing with complex shapes, etc. This work presents the des...

  2. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  3. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  4. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  5. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  6. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  7. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  8. Steerable Capacitive Proximity Sensor

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Steerable capacitive proximity sensor of "capaciflector" type based partly on sensing units described in GSC-13377 and GSC-13475. Position of maximum sensitivity adjusted without moving sensor. Voltage of each driven shield adjusted separately to concentrate sensing electric field more toward one side or other.

  9. Membrane capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Wal, van der A.

    2010-01-01

    Membrane capacitive deionization (MCDI) is an ion-removal process based on applying an electrical potential difference across an aqueous solution which flows in between oppositely placed porous electrodes, in front of which ion-exchange membranes are positioned. Due to the applied potential, ions ar

  10. Calculating and optimizing inter-electrode capacitances of charge division microchannel plate detectors

    Energy Technology Data Exchange (ETDEWEB)

    Xing, Yan [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); University of Chinese Academy of Sciences, Beijing 100049 (China); Chen, Bo, E-mail: chenb@ciomp.ac.cn [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); Zhang, Hong-Ji; Wang, Hai-Feng; He, Ling-Ping [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); Jin, Fang-Yuan [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); University of Chinese Academy of Sciences, Beijing 100049 (China)

    2016-04-01

    Based on the principle of charge division microchannel plate detectors, the inter-electrode capacitances of charge division anodes which are related to electronic noise of the charge sensitive amplifier and crosstalk effect of the anode are presented. Under all the requirements of charge division microchannel plate detectors such as the imaging linearity and spatial resolution, decreasing the inter-electrode capacitances is one way to improve the imaging performance. In this paper, we illustrate the simulation process of calculating the inter-electrode capacitances. Moreover, a Wedge and Strip (WSZ) anode is fabricated with the picosecond laser micromachining process. Comparing the simulated capacitances and measured capacitances, the three-dimensional finite element method is proved to be valid. Furthermore, by adjusting the design parameters of the anode, the effects of the substrate permittivity, insulation width and the size of pitch on the inter-electrode capacitances have been analysed. The structure of the charge division anode has been optimized based on the simulation data.

  11. Design and simulation of a tuning fork micromachined gyroscope with slide film damping

    Institute of Scientific and Technical Information of China (English)

    CHE Lu-feng; XIONG Bin; JIAO Ji-wei; WANG Yue-lin

    2005-01-01

    A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

  12. Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers

    Institute of Scientific and Technical Information of China (English)

    GE; LiFeng

    2007-01-01

    A theoretical model and mathematical description for silicon micromachined electrostatic or capacitive ultrasonic imaging transducers have been developed. According to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the geometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, corresponding to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respectively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal design.

  13. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Institute of Scientific and Technical Information of China (English)

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  14. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Institute of Scientific and Technical Information of China (English)

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  15. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki; Hino; Takeru; Amano; Wiganes; Janto; Fumio; Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.

  16. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki Hino; Takeru Amano; Wiganes Janto; Fumio Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 nm and a short cantilever of 45 μm, exhibiting fast response of below 3 μs.

  17. Technology and applications of micromachined silicon adaptive mirrors

    NARCIS (Netherlands)

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  18. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  19. Capacitive deionization of seawater

    Energy Technology Data Exchange (ETDEWEB)

    Farmer, J.C.; Fix, D.V.; Mack, G.V. [and others

    1995-10-01

    Capacitive deionization with carbon aerogel electrodes is an efficient and economical new process for removing salt and impurities from water. Carbon aerogel is a material that enables the successful purification of water because of its high surface area, optimum pore size, and low electrical resistivity. The electrodes are maintained at a potential difference of about one volt; ions are removed from the water by the imposed electrostatic field and retained on the electrode surface until the polarity is reversed. The capacitive deionization of water with a stack of carbon aerogel electrodes has been successfully demonstrated. The overall process offers advantages when compared to conventional water-purification methods, requiring neither pumps, membranes, distillation columns, nor thermal heaters. Consequently, the overall process is both robust and energy efficient. The current state of technology development, commercialization, and potential applications of this process are reviewed.

  20. Induced Charge Capacitive Deionization

    CERN Document Server

    Rubin, S; Biesheuvel, P M; Bercovici, M

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, which leads to rapid and significant deionization of ionic species from a volume which is on the scale of the particle. We show by theory and experiment that the transient response around a cylindrical particle results in spatially non-uniform charging and non-steady growth of depletion regions which emerge around the particle's poles. Potentially, ICCDI can be useful in applications where fast concentration changes of ionic species are required over large volumes.

  1. HypGrid2D. A 2-d mesh generator

    Energy Technology Data Exchange (ETDEWEB)

    Soerensen, N.N.

    1998-03-01

    The implementation of a hyperbolic mesh generation procedure, based on an equation for orthogonality and an equation for the cell face area is described. The method is fast, robust and gives meshes with good smoothness and orthogonality. The procedure is implemented in a program called HypGrid2D. The HypGrid2D program is capable of generating C-, O- and `H`-meshes for use in connection with the EllipSys2D Navier-Stokes solver. To illustrate the capabilities of the program, some test examples are shown. First a series of C-meshes are generated around a NACA-0012 airfoil. Secondly a series of O-meshes are generated around a NACA-65-418 airfoil. Finally `H`-meshes are generated over a Gaussian hill and a linear escarpment. (au)

  2. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  3. Micromachined permanent magnets and their MEMS applications

    Science.gov (United States)

    Cho, Hyoung Jin

    2002-01-01

    In this research, new micromachined permanent magnets have been proposed, developed and characterized for MEMS applications. In realizing micromachined permanent magnets, a new electroplating technique using external magnetic field and a bumper filling technique using a photolithographically defined mold with resin bonded magnetic particles have been developed. The newly developed micromachining techniques allow thick film-type permanent magnet components to be integrated to magnetic MEMS devices with dimensional control and alignment. Permanent magnet arrays with the dimensions ranging from 30 mum to 200 mum have been developed with an energy density up to 2.7 kJ/m3 in precisely defined forms in the micro scale. For the applications of the permanent magnets developed in this work, three novel magnetic MEMS devices such as a bi-directional magnetic actuator, a magnetically driven optical scanner, and a magnetic cell separator have been successfully realized. After design and modeling, each device has been fabricated and fully characterized. The bi-directional actuator with the electroplated permanent magnet array has achieved bi-directional motion clearly and shown good agreement with the analytical and simulated models. The optical scanner has shown linear bi-directional response under static actuation and stable bi-directional scanning performance under dynamic actuation. As a potential BioMEMS application of the developed permanent magnet, the prototype magnetic cell separator using the electroplated permanent magnet strip array has been proposed and demonstrated for magnetic bead patterning. In conclusion, new thick film-type, electroplated CoNiMnP and epoxy resin bonded Sr-ferrite permanent magnets have been developed and characterized, and then, three new magnetic MEMS devices using the permanent magnets such as a bi-directional magnetic actuator, an optical scanner and a magnetic cell separator have been realized in this research. The new micromachined

  4. Design and implementation of capacitive micromachined ultrasonic transducers for high intensity focused ultrasound

    OpenAIRE

    Yamaner, Yalçın Feysel; Yamaner, Yalcin Feysel

    2011-01-01

    High intensity focused ultrasound (HIFU) is a medical procedure for noninvasive treatment of cancers. High intensity focused ultrasound is used to heat and destroy the diseased tissue. Piezoelectricity has been the core mechanism for generation of ultrasound waves in the treatment. Focusing can be done by using spherically curved transducers or using a lens or electronically steering sound waves by using phased arrays. Current research in HIFU technology targets the development of MR-guided m...

  5. Terahertz detection using mechanical resonators based on 2D materials

    Directory of Open Access Journals (Sweden)

    Juha Hassel

    2017-06-01

    Full Text Available We have investigated a THz detection scheme based on mixing of electrical signals in a voltage-dependent capacitance made out of suspended graphene. We have analyzed both coherent and incoherent detection regimes and compared their performance with the state of the art. Using a high-amplitude local oscillator, we anticipate potential for quantum limited detection in the coherent mode. The sensitivity stems from the extraordinary mechanical and electrical properties of atomically thin graphene or graphene-related 2D materials.

  6. Optical network of silicon micromachined sensors

    Science.gov (United States)

    Wilson, Mark L.; Burns, David W.; Zook, J. David

    1996-03-01

    The Honeywell Technology Center, in collaboration with the University of Wisconsin and the Mobil Corporation, and under funding from this ARPA sponsored program, are developing a new type of `hybrid' micromachined silicon/fiber optic sensor that utilizes the best attributes of each technology. Fiber optics provide a noise free method to read out the sensor without electrical power required at the measurement point. Micromachined silicon sensor techniques provide a method to design many different types of sensors such as temperature, pressure, acceleration, or magnetic field strength and report the sensor data using FDM methods. Our polysilicon resonant microbeam structures have a built in Fabry-Perot interferometer that offers significant advantages over other configurations described in the literature. Because the interferometer is an integral part of the structure, the placement of the fiber becomes non- critical, and packaging issues become considerably simpler. The interferometer spacing are determined by the thin-film fabrication processes and therefore can be extremely well controlled. The main advantage, however, is the integral vacuum cavity that ensures high Q values. Testing results have demonstrated relaxed alignment tolerances in packaging these devices, with an excellent Signal to Noise Ratio. Networks of 16 or more sensors are currently being developed. STORM (Strain Transduction by Optomechanical Resonant Microbeams) sensors can also provide functionality and self calibration information which can be used to improve the overall system reliability. Details of the sensor and network design, as well as test results, are presented.

  7. A simple efficient model of parasitic capacitances of deep-submicron LDD MOSFETs

    Science.gov (United States)

    Prégaldiny, Fabien; Lallement, Christophe; Mathiot, Daniel

    2002-12-01

    Estimation of parasitic capacitances in a MOSFET device is very important, notably in mixed circuit simulation. For deep-submicron LDD MOSFETs, the extrinsic capacitance (overlap plus fringing capacitances) is a growing fraction of the total gate capacitance. A correct estimation of the extrinsic capacitance requires an accurate modeling of each of its constituents. However the major existing models do not correctly predict the overlap capacitance and the inner fringing capacitance (which is often ignored). In this paper a new approach to model the overlap Cov and fringing Cif+ Cof capacitances in the zero-current regime is presented. The bias dependence of the extrinsic capacitance is investigated and a detailed study of the influence of the LDD doping dose is also undertaken. Then, an efficient, simple and continuous model describing the evolution of overlap and fringing capacitances in all operating regimes of a n-channel LDD MOSFET is developed. Finally this model is incorporated in an existing compact-model for circuit simulation. It is shown that this new model leads to excellent results in comparison with full 2D numerical device simulation.

  8. Capacitance of circular patch resonator

    Energy Technology Data Exchange (ETDEWEB)

    Miano, G.; Verolino, L. [Dip. di Ingegneria Elettrica, Ist. Nazionale di Fisica Nucleare, Naples (Italy); Panariello, G. [Dip. di Ingegneria Elettronica, Naples (Italy); Vaccaro, V.G. [Ist. Nazionale di Fisica Nucleare, Naples (Italy). Dipt. di Scienze Fisiche

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants.

  9. Capacitive label reader

    Science.gov (United States)

    Arlowe, H. Duane

    1985-01-01

    A capacitive label reader includes an outer ring transmitting portion, an inner ring transmitting portion, and a plurality of insulated receiving portions. A label is the mirror-image of the reader except that identifying portions corresponding to the receiving portions are insulated from only one of two coupling elements. Positive and negative pulses applied, respectively, to the two transmitting rings biased a CMOS shift register positively to either a 1 or 0 condition. The output of the CMOS may be read as an indication of the label.

  10. Permittivity measurements up to 30 GHz using micromachined probe

    Science.gov (United States)

    Kim, Jung-Mu; Oh, Dong Hoon; Park, Jae-Hyoung; Cho, Jei-Won; Kwon, Youngwoo; Cheon, Changyul; Kim, Yong-Kweon

    2005-03-01

    We implemented a micromachined probe for the measurement of biological properties using MEMS technology, and experimentally showed the suitability of the micromachined probe in biological applications. The micromachined probe was fabricated on a silicon substrate, and to remove wave transmission through the silicon substrate, we etched the silicon substrate from beneath a lower ground and made the etched silicon surface conducting by using thermal evaporation of Cr/Au and a coating of conductive epoxy. The micromachined probe consists of a CPW and strip line between benzo cyclo butene (BCB) layers, which is known to be a material with high resistivity, low loss tangent, and low permittivity at high frequency. We measured the permittivity of a number of well-known liquids—0.5%, 0.9% and 1.3% saline, acetone, ethanol, and muscle and fat of pork—as biological samples using the micromachined probe after liquid calibration. The measured permittivity of 0.9% saline agreed well with the expected value of the Cole-Cole equation. In this paper, we first demonstrate that the micromachined probe can provide broadband measurement of measurable solid materials, such as biological samples, and also of well-known liquids at microwave frequencies. The size of the micromachined probe is 2000 µm (width) × 580 µm (thickness) × 30 000 µm (length), and the aperture size of the micromachined probe is only 650 µm × 70 µm. Therefore, we can extract the biological information from very small biological tissues and reduce radiation effects. Thus we show the feasibility of low-cost, small and portable permittivity measurement systems using a micromachined open-ended coaxial RF MEMS probe.

  11. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

    Directory of Open Access Journals (Sweden)

    Ming-Yuan Cheng

    2010-11-01

    Full Text Available In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB technologies. The sensing array consists of a polydimethlysiloxane (PDMS structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array.

  12. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  13. Extracting Impurity Locations using Scanning Capacitance Microscopy Measurements

    Directory of Open Access Journals (Sweden)

    AGHAEI, S.

    2016-08-01

    Full Text Available In this article we investigate the possibility to use scanning capacitance microscopy (SCM for the 2-D and 3-D "atomistic" dopant profiling of semiconductor materials. For this purpose, we first analyze the effects of random dopant fluctuations (RDF on SCM measurements with nanoscale probes and show that the discrete and random locations of dopant impurities significantly affect the differential capacitance measured in SCM experiments if the dimension of the probe is below 50 nm. Then, we present an algorithm to compute the x, y, and z coordinates of the ionized impurities in the semiconductor material using a set of SCM measurements. The algorithm is based on evaluating the doping sensitivity functions of the differential capacitance and uses a gradient-based iterative method to compute the locations of dopants. Finally, we discuss a standard simulation case and show that we are able to successfully retrieve the locations of the ionized impurities using the proposed algorithm.

  14. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    Institute of Scientific and Technical Information of China (English)

    Dong Linxi; Chen Jindan; Yan Haixia; Huo Weihong; Li Yongjie; Sun Lingling

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  15. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  16. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Energy Technology Data Exchange (ETDEWEB)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin [High Pressure Collaborative Access Team, Geophysical Laboratory, Carnegie Institution of Washington, Argonne, Illinois 60439 (United States)

    2015-07-15

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  17. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Science.gov (United States)

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  18. A capacitive ultrasonic transducer based on parametric resonance

    Science.gov (United States)

    Surappa, Sushruta; Satir, Sarp; Levent Degertekin, F.

    2017-07-01

    A capacitive ultrasonic transducer based on a parametric resonator structure is described and experimentally demonstrated. The transducer structure, which we call capacitive parametric ultrasonic transducer (CPUT), uses a parallel plate capacitor with a movable membrane as part of a degenerate parametric series RLC resonator circuit with a resonance frequency of fo. When the capacitor plate is driven with an incident harmonic ultrasonic wave at the pump frequency of 2fo with sufficient amplitude, the RLC circuit becomes unstable and ultrasonic energy can be efficiently converted to an electrical signal at fo frequency in the RLC circuit. An important characteristic of the CPUT is that unlike other electrostatic transducers, it does not require DC bias or permanent charging to be used as a receiver. We describe the operation of the CPUT using an analytical model and numerical simulations, which shows drive amplitude dependent operation regimes including parametric resonance when a certain threshold is exceeded. We verify these predictions by experiments with a micromachined membrane based capacitor structure in immersion where ultrasonic waves incident at 4.28 MHz parametrically drive a signal with significant amplitude in the 2.14 MHz RLC circuit. With its unique features, the CPUT can be particularly advantageous for applications such as wireless power transfer for biomedical implants and acoustic sensing.

  19. Optimal pricing of capacitated networks

    NARCIS (Netherlands)

    Grigoriev, Alexander; Loon, van Joyce; Sitters, René; Uetz, Marc

    2009-01-01

    We address the algorithmic complexity of a profit maximization problem in capacitated, undirected networks. We are asked to price a set of $m$ capacitated network links to serve a set of $n$ potential customers. Each customer is interested in purchasing a network connection that is specified by a si

  20. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Science.gov (United States)

    Wu, Xuezhong; Wang, Haoxu; Xie, Liqiang; Dong, Peitao

    2014-03-01

    Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS) technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  1. Micromachined systems-on-a-chip: Technology and applications

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.; Lemkin, M.A. [Univ. of California, Berkeley, CA (United States). Berkeley Sensor and Actuator Center

    1997-04-01

    Sacrificial polysilicon surface micromachining is emerging as a technology that enables the mass production of complex microelectromechanical systems by themselves or integrated with microelectronic systems. Early versions of these micromachined systems-on-a-chip have already found application in the commercial world as acceleration sensors for airbag deployment (for example, ADI`s ADXL50). Two technologies described here, enable systems with increasing degrees of complexity to be fabricated. The first is a three-level polysilicon micromachining process which includes a fourth polysilicon electrical interconnect level, while the other is a single-level (+ second electrical interconnect level) polysilicon surface micromachining process integrated with 1.25 micron CMOS. Samples of systems-on-a-chip built in these processes such as combination locks, pop-up mirrors, and multi-axis accelerometers are also given.

  2. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  3. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  4. Aero Fighter - 2D Gaming

    CERN Document Server

    Ahmed, Zeeshan

    2010-01-01

    Designing and developing quality based computer game is always a challenging task for developers. In this paper I briefly discuss aero fighting war game based on simple 2D gaming concepts and developed in C & C++ programming languages, using old bitmapping concepts. Going into the details of the game development, I discuss the designed strategies, flow of game and implemented prototype version of game, especially for beginners of game programming.

  5. Efficiency of Capacitively Loaded Converters

    DEFF Research Database (Denmark)

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.;

    2012-01-01

    This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters...... is introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

  6. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  7. Surface micromachined microengine as the driver for micromechanical gears

    Energy Technology Data Exchange (ETDEWEB)

    Garcia, E.J.; Sniegowski, J.J.

    1995-05-01

    The transmission of mechanical power is often accomplished through the use of gearing. The recently developed surface micromachined microengine provides us with an actuator which is suitable for driving surface micromachined geared systems. In this paper we will present aspects of the microengine as they relate to the driving of geared mechanisms, issues relating to the design of micro gear mechanisms, and details of a design of a microengine-driven geared shutter mechanism.

  8. Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Rasmussen, Morten Fischer; Jensen, Jørgen Arendt

    2014-01-01

    Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element...... ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show a reduction in edge wave energy of 8.4 dB (85 %) compared...... to the array without integrated apodization. Field II simulations yield a corresponding reduction of 13.0 dB (95 %). The simulations are able to replicate the measured pressure field, proving the predictability of the technique....

  9. Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension.

    Science.gov (United States)

    Sun, Boqian; Wang, Shunyue; Li, Haixia; He, Xiaoxia

    2016-10-20

    A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from -56.2 dB down to -102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions.

  10. Head First 2D Geometry

    CERN Document Server

    Fallow), Stray

    2009-01-01

    Having trouble with geometry? Do Pi, The Pythagorean Theorem, and angle calculations just make your head spin? Relax. With Head First 2D Geometry, you'll master everything from triangles, quads and polygons to the time-saving secrets of similar and congruent angles -- and it'll be quick, painless, and fun. Through entertaining stories and practical examples from the world around you, this book takes you beyond boring problems. You'll actually use what you learn to make real-life decisions, like using angles and parallel lines to crack a mysterious CSI case. Put geometry to work for you, and

  11. Computational 2D Materials Database

    DEFF Research Database (Denmark)

    Rasmussen, Filip Anselm; Thygesen, Kristian Sommer

    2015-01-01

    We present a comprehensive first-principles study of the electronic structure of 51 semiconducting monolayer transition-metal dichalcogenides and -oxides in the 2H and 1T hexagonal phases. The quasiparticle (QP) band structures with spin-orbit coupling are calculated in the G(0)W(0) approximation...... and used as input to a 2D hydrogenic model to estimate exciton binding energies. Throughout the paper we focus on trends and correlations in the electronic structure rather than detailed analysis of specific materials. All the computed data is available in an open database....

  12. CYP2D6 pharmacogenomics

    Directory of Open Access Journals (Sweden)

    Mohanan Geetha Gopisankar

    2017-10-01

    Full Text Available Cytochromes are proteins that catalyze electron transfer reactions of many metabolic pathways. They are involved in drug metabolism and thus determines the therapeutic safety and efficacy of drugs in patients. Cytochrome P450 in mitochondria accounts for 90% of the oxidative metabolism of clinically used drugs during phase 1 reaction. CYP2D6 is a major gene member of this superfamily as it carries out metabolism of 25% of drugs currently available in the market. Contrary to the concept of specificity of enzyme action these can metabolize substrates of different chemistry. Since its discovery, many have intensively studied this unique hemoprotein and contributed to the elucidation of its molecular properties and physiological functions and also the structure-activity relationships of its substrates and inhibitors. Its activity ranges considerably within a population due to genetic polymorphisms which lead to varied responses to drug intake. Studying such polymorphisms which cause a significant impact in the management of patients and helps to achieve the final target of personalizing medicine. This review briefs about history, structure, and function, molecular genetics, substrates, regulators and inhibitors of CYP2D6 and its clinical pharmacogenomics.

  13. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    temperature and a 25% reduction in the surface roughness value over that of the baseline semi-synthetic cutting fluid. For the thermally-reduced platelets (with 4--8 graphene layers and in-solution characteristic lateral length of 562--2780 nm), a concentration of 0.2 wt% appears to be optimal. An investigation into the impingement dynamics of the graphene-laden colloidal solutions on a heated substrate reveals that the most important criterion dictating their machining performance is their ability to form uniform, submicron thick films of the platelets upon evaporation of the carrier fluid. As such, the characterization of the residual platelet film left behind on a heated substrate may be an effective technique for evaluating different graphene colloidal solutions for cutting fluids applications in micromachining. Graphene platelets have also recently been shown to reduce the aggressive chemical wear of diamond tools during the machining of transition metal alloys. However, the specific mechanisms responsible for this improvement are currently unknown. The modeling work presented in this thesis uses molecular dynamics techniques to shed light on the wear mitigation mechanisms that are active during the diamond cutting of steel when in the presence of graphene platelets. The dual mechanisms responsible for graphene-induced chemical wear mitigation are: 1) The formation of a physical barrier between the metal and tool atoms, preventing graphitization; and 2) The preferential transfer of carbon from the graphene platelet rather than from the diamond tool. The results of the simulations also provide new insight into the behavior of the 2D graphene platelets in the cutting zone, specifically illustrating the mechanisms of cleaving and interlayer sliding in graphene platelets under the high pressures in cutting zones.

  14. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  15. Personalized 2D color maps

    KAUST Repository

    Waldin, Nicholas

    2016-06-24

    2D color maps are often used to visually encode complex data characteristics such as heat or height. The comprehension of color maps in visualization is affected by the display (e.g., a monitor) and the perceptual abilities of the viewer. In this paper we present a novel method to measure a user\\'s ability to distinguish colors of a two-dimensional color map on a given monitor. We show how to adapt the color map to the user and display to optimally compensate for the measured deficiencies. Furthermore, we improve user acceptance of the calibration procedure by transforming the calibration into a game. The user has to sort colors along a line in a 3D color space in a competitive fashion. The errors the user makes in sorting these lines are used to adapt the color map to his perceptual capabilities.

  16. 2D SIMPLIFIED SERVO VALVE

    Institute of Scientific and Technical Information of China (English)

    2003-01-01

    A novel pilot stage valve called simplified 2D valve, which utilizes both rotary and linear motions of a single spool, is presented.The rotary motion of the spool incorporating hydraulic resistance bridge, formed by a damper groove and a crescent overlap opening, is utilized as pilot to actuate linear motion of the spool.A criterion for stability is derived from the linear analysis of the valve.Special experiments are designed to acquire the mechanical stiffness, the pilot leakage and the step response.It is shown that the sectional size of the spiral groove affects the dynamic response and the stiffness contradictorily and is also very sensitive to the pilot leakage.Therefore, it is necessary to establish a balance between the static and dynamic characteristics in deciding the structural parameters.Nevertheless, it is possible to sustain the dynamic response at a fairly high level, while keeping the leakage of the pilot stage at an acceptable level.

  17. Quantum coherence selective 2D Raman-2D electronic spectroscopy.

    Science.gov (United States)

    Spencer, Austin P; Hutson, William O; Harel, Elad

    2017-03-10

    Electronic and vibrational correlations report on the dynamics and structure of molecular species, yet revealing these correlations experimentally has proved extremely challenging. Here, we demonstrate a method that probes correlations between states within the vibrational and electronic manifold with quantum coherence selectivity. Specifically, we measure a fully coherent four-dimensional spectrum which simultaneously encodes vibrational-vibrational, electronic-vibrational and electronic-electronic interactions. By combining near-impulsive resonant and non-resonant excitation, the desired fifth-order signal of a complex organic molecule in solution is measured free of unwanted lower-order contamination. A critical feature of this method is electronic and vibrational frequency resolution, enabling isolation and assignment of individual quantum coherence pathways. The vibronic structure of the system is then revealed within an otherwise broad and featureless 2D electronic spectrum. This method is suited for studying elusive quantum effects in which electronic transitions strongly couple to phonons and vibrations, such as energy transfer in photosynthetic pigment-protein complexes.

  18. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  19. Functionalised polyurethane for efficient laser micromachining

    Science.gov (United States)

    Brodie, G. W. J.; Kang, H.; MacMillan, F. J.; Jin, J.; Simpson, M. C.

    2017-02-01

    Pulsed laser ablation is a valuable tool that offers a much cleaner and more flexible etching process than conventional lithographic techniques. Although much research has been undertaken on commercially available polymers, many challenges still remain, including contamination by debris on the surface, a rough etched appearance and high ablation thresholds. Functionalizing polymers with a photosensitive group is a novel way and effective way to improve the efficiency of laser micromachining. In this study, several polyurethane films grafted with different concentrations of the chromophore anthracene have been synthesized which are specifically designed for 248 nm KrF excimer laser ablation. A series of lines etched with a changing number of pulses and fluences by the nanosecond laser were applied to each polyurethane film. The resultant ablation behaviours were studied through optical interference tomography and Scanning Electron Microscopy. The anthracene grafted polyurethanes showed a vast improvement in both edge quality and the presence of debris compared with the unmodified polyurethane. Under the same laser fluence and number of pulses the spots etched in the anthracene contained polyurethane show sharp depth profiles and smooth surfaces, whereas the spots etched in polyurethane without anthracene group grafted present rough cavities with debris according to the SEM images. The addition of a small amount of anthracene (1.47%) shows a reduction in ablation threshold from unmodified polyurethane showing that the desired effect can be achieved with very little modification to the polymer.

  20. Vibration of micromachined circular piezoelectric diaphragms.

    Science.gov (United States)

    Hong, Eunki; Trolier-McKinstry, Susan; Smith, Robert; Krishnaswamy, Silai V; Freidhoff, Carl B

    2006-04-01

    Electrically and mechanically excited resonances in micromachined circular piezoelectric diaphragms have been investigated. The diaphragm structures were piezoelectric unimorphs consisting of Pb(Zr0.52,Ti0.48)O3 (PZT) films and thermally grown silicon oxide (SiO2) layers. For electrical excitation, ring-shaped interdigitated (IDT) electrodes formed on the top of the PZT layer were used to induce strain in the diaphragms. The diaphragm structures behaved much like circular membranes in which the membrane tension was approximately 206 N/m, at the fundamental modes. For higher modes, the resonance frequencies deviated from the theoretical values due to the finite stiffness of the diaphragms. Under mechanical drive, both symmetric and asymmetric modes were excited. However, for electrical excitation, the symmetric modes were dominant due to the symmetry of the driving IDT electrodes. At a pressure of 727 Torr, the quality factor was approximately 250, and this rose to 2000 at pressures below 1 Torr. When a forward bias was applied to the diaphragm, the membrane tension decreased, but under reverse biases the tension increased. However, because of repoling under reverse biases greater than the coercive field of the PZT film, the achievable increase in the membrane tension was limited. In the diaphragm structure, the nonlinear vibration was governed by geometric nonlinearity rather than material nonlinearity. In addition, evidence of non-180 degrees domain wall motion of the PZT layer in released diaphragms was observed.

  1. Laser micromachining of semiconductors for photonics applications

    Science.gov (United States)

    Nantel, Marc; Yashkir, Yuri; Lee, Seong K.; Mugford, Chas; Hockley, Bernard S.

    2001-10-01

    For decades, precisely machining silicon has been critical for the success of the semiconductor industry. This has traditionally been done through wet chemical etching, but in the pursuit of integrating photonics devices on a single chip, other techniques are worth exploring. This quest opens up interest in finding a non-wet, non-contact, arbitrary-shape milling technique for silicon. In this paper, we present our latest work in the laser micromachining of silicon. A kilohertz-repetition-rate diode-pumped Nd:YLF laser (in infrared, green or ultraviolet modes) is focused on the surface of silicon wafers in a chlorine atmosphere for an enhanced magnitude and control of the etching rate. In the chlorine atmosphere, much less debris is deposited on the surface around the cut, sub-damage threshold machining is achieved for a better control of the etching depth, and etching rates ranging from 20-300,000 micron-cube/s have been measured. In particular, the use of an infrared laser beam is singled out, along with the advantages that it holds. Results of simulations highlight the particular characteristics of the various wavelength chosen for the machining.

  2. Critical exponents of dynamical conductivity in 2D percolative superconductor-insulator transitions: three universality classes.

    Science.gov (United States)

    Karki, Pragalv; Loh, Yen Lee

    2016-11-02

    We simulate three types of random inductor-capacitor (LC) networks on [Formula: see text] square lattices. We calculate the dynamical conductivity using an equation-of-motion method in which timestep error is eliminated and windowing error is minimized. We extract the critical exponent a such that [Formula: see text] at low frequencies. The results suggest that there are three different universality classes. The [Formula: see text] model, with capacitances from each site to ground, has a  =  0.314(4). The [Formula: see text] model, with capacitances along bonds, has a  =  0. The [Formula: see text] model, with both types of capacitances, has a  =  0.304(1). This implies that classical percolative 2D superconductor-insulator transitions (SITs) generically have [Formula: see text] as [Formula: see text]. Therefore, any experiments that give a constant conductivity as [Formula: see text] must be explained in terms of quantum effects.

  3. 2D transition metal dichalcogenides

    Science.gov (United States)

    Manzeli, Sajedeh; Ovchinnikov, Dmitry; Pasquier, Diego; Yazyev, Oleg V.; Kis, Andras

    2017-08-01

    Graphene is very popular because of its many fascinating properties, but its lack of an electronic bandgap has stimulated the search for 2D materials with semiconducting character. Transition metal dichalcogenides (TMDCs), which are semiconductors of the type MX2, where M is a transition metal atom (such as Mo or W) and X is a chalcogen atom (such as S, Se or Te), provide a promising alternative. Because of its robustness, MoS2 is the most studied material in this family. TMDCs exhibit a unique combination of atomic-scale thickness, direct bandgap, strong spin-orbit coupling and favourable electronic and mechanical properties, which make them interesting for fundamental studies and for applications in high-end electronics, spintronics, optoelectronics, energy harvesting, flexible electronics, DNA sequencing and personalized medicine. In this Review, the methods used to synthesize TMDCs are examined and their properties are discussed, with particular attention to their charge density wave, superconductive and topological phases. The use of TMCDs in nanoelectronic devices is also explored, along with strategies to improve charge carrier mobility, high frequency operation and the use of strain engineering to tailor their properties.

  4. Dual axis operation of a micromachined rate gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Juneau, T. [BSAC, Berkeley, CA (United States); Pisano, A.P. [Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering; Smith, J. [Sandia National Lab., Albuquerque, NM (United States)

    1997-04-01

    Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

  5. Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators

    Directory of Open Access Journals (Sweden)

    Giacomo Bettella

    2017-06-01

    Full Text Available In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, laser ablation technique and the mechanical micromachining technique are exploited to realise microfluidic channels in T- and cross junction configurations. The quality of both lateral and bottom surfaces of the channels are therefore compared together with a detailed study of their roughness measured by means of atomic force microscopy in order to evaluate the final performance achievable in an optofluidic device. Finally, the microfluidics performances of these water-in-oil droplets generators are investigated depending on these micromachining techniques, with particular focus on a wide range of droplet generation rates.

  6. High-performance micromachined gyroscope with a slanted suspension cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi, E-mail: Dingbangxiao@yahoo.com.c [Microsystem Laboratory, National University of Defense Technology, Changsha 410073 (China)

    2009-04-15

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of +-100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.

  7. High-performance micromachined gyroscope with a slanted suspension cantilever

    Institute of Scientific and Technical Information of China (English)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi

    2009-01-01

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h.

  8. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  9. A sub-cm micromachined electron microscope

    Science.gov (United States)

    Feinerman, A. D.; Crewe, D. A.; Perng, D. C.; Shoaf, S. E.; Crewe, A. V.

    1993-01-01

    A new approach for fabricating macroscopic (approximately 10x10x10 mm(exp 3)) structures with micron accuracy has been developed. This approach combines the precision of semiconductor processing and fiber optic technologies. A (100) silicon wafer is anisotropically etched to create four orthogonal v-grooves and an aperture on each 10x12 mm die. Precision 308 micron optical fibers are sandwiched between the die to align the v-grooves. The fiber is then anodically bonded to the die above and below it. This procedure is repeated to create thick structures and a stack of 5 or 6 die will be used to create a miniature scanning electron microscope (MSEM). Two die in the structure will have a segmented electrode to deflect the beam and correct for astigmatism. The entire structure is UHV compatible. The performance of an SEM improves as its length is reduced and a sub-cm 2 keV MSEM with a field emission source should have approximately 1 nm resolution. A low voltage high resolution MSEM would be useful for the examination of biological specimens and semiconductors with a minimum of damage. The first MSEM will be tested with existing 6 micron thermionic sources. In the future a micromachined field emission source will be used. The stacking technology presented in this paper can produce an array of MSEMs 1 to 30 mm in length with a 1 mm or larger period. A key question being addressed by this research is the optimum size for a low voltage MSEM which will be determined by the required spatial resolution, field of view, and working distance.

  10. Deep ultraviolet laser micromachining of novel fibre optic devices

    Science.gov (United States)

    Li, J.; Dou, J.; Herman, P. R.; Fricke-Begemann, T.; Ihlemann, J.; Marowsky, G.

    2007-04-01

    A deep ultraviolet F2 laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F2-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  11. Numerical simulation of inclination vibration in magnetic induction micromachines

    Energy Technology Data Exchange (ETDEWEB)

    Chen, J-Y; Zhou, J-B; Zhang, W-M; Meng, G [State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240 (China)], E-mail: jerrycc@sjtu.edu.cn

    2008-02-15

    This paper studies the inclination vibration of an axial-flux magnetic induction micromachine which is supported by hydrostatic thrust bearings. A mechanical model for the rotor and the corresponding fluid-film bearing is combined with an electromagnetic force model to study the linear and nonlinear rotordynamics of the system. Results obtained for the stability show that magnetic induction micromachine would encounter severe instability problem at high speed operations. The model developed here could serve as a useful reference for design optimization and operation scheme.

  12. Numerical simulation of inclination vibration in magnetic induction micromachines

    Science.gov (United States)

    Chen, J.-Y.; Zhou, J.-B.; Zhang, W.-M.; Meng, G.

    2008-02-01

    This paper studies the inclination vibration of an axial-flux magnetic induction micromachine which is supported by hydrostatic thrust bearings. A mechanical model for the rotor and the corresponding fluid-film bearing is combined with an electromagnetic force model to study the linear and nonlinear rotordynamics of the system. Results obtained for the stability show that magnetic induction micromachine would encounter severe instability problem at high speed operations. The model developed here could serve as a useful reference for design optimization and operation scheme.

  13. Learn Unity for 2D game development

    CERN Document Server

    Thorn, Alan

    2013-01-01

    The only Unity book specifically covering 2D game development Written by Alan Thorn, experience game developer and author of seven books on game programming Hands-on examples of all major aspects of 2D game development using Unity

  14. Bioenergetics of Mammalian Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Alessandra Ferramosca

    2014-01-01

    Full Text Available After ejaculation, the mammalian male gamete must undergo the capacitation process, which is a prerequisite for egg fertilization. The bioenergetics of sperm capacitation is poorly understood despite its fundamental role in sustaining the biochemical and molecular events occurring during gamete activation. Glycolysis and mitochondrial oxidative phosphorylation (OXPHOS are the two major metabolic pathways producing ATP which is the primary source of energy for spermatozoa. Since recent data suggest that spermatozoa have the ability to use different metabolic substrates, the main aim of this work is to present a broad overview of the current knowledge on the energy-producing metabolic pathways operating inside sperm mitochondria during capacitation in different mammalian species. Metabolism of glucose and of other energetic substrates, such as pyruvate, lactate, and citrate, is critically analyzed. Such knowledge, besides its obvious importance for basic science, could eventually translate into the development of novel strategies for treatment of male infertility, artificial reproduction, and sperm selection methods.

  15. Unified capacitance modelling of MOSFETs

    Science.gov (United States)

    Johannessen, O. G.; Fjeldly, T. A.; Ytterdal, T.

    1994-01-01

    A unified physics based capacitance model for MOSFETs suitable for implementation in circuit simulators is presented. This model is based on the charge conserving, so-called Meyer-like approach proposed by Turchetti et al., and utilizes a unified charge control model to assure a continuous description of the MOSFET capacitances both above and below threshold. The capacitances associated with the model are comparable to those of the well-known BSIM model in the above-threshold regime, but it is more precise in the description of near-threshold and subthreshold behaviour. Moreover, the discontinuities at the transitions between the various regimes of operation are removed. The present modelling scheme was implemented in our circuit simulator AIM-Spice, and simulations of the dynamic behaviour of various demanding benchmark circuits clearly reveal its superiority over simulations using the simple Meyer model.

  16. Parameter optimization of temperature field in RF-capacitive hyperthermia

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    To realize a certain target temperature distribution in tumor tissues and avoid over-heating in normal tissues in radio frequency (RF)-capacitive hyperthermia, an objective function and some weight coefficients are introduced. Then using the 2-D finite element method, the electromagnetic and bio-heat transfer equations are solved, and using the genetic algorithm the heating configurations are recursively modified to minimize the objective function. Finally an optimum solution of the expected heating field distribution in hyperthermia is achieved. And with a human heterogeneous tissue model extracted from X-ray CT images, satisfactory optimization results are obtained in the simulations on a biplate RF-capacitive hyperthermia device. This optimization technique for controlling the body temperature field has shown scientific importance and practical values in the research of hyperthermia.

  17. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Science.gov (United States)

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  18. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a microma

  19. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  20. Selective Mode Excitation And Detection Of Micromachined Resonators

    NARCIS (Netherlands)

    Prak, Albert; Elwenspoek, Miko; Fluitman, Jan H.J

    1992-01-01

    Distributed mechanical systems such as micromachined resonant strain gages possess an infinite number of modes of vibration. Mostly, one is interested in only one or a few modes. A method is described with which only the desired modes are excited and detected. This is achieved by geometrically shapi

  1. Crystallographic effects during micromachining — A finite-element model

    Science.gov (United States)

    Song, Shin-Hyung; Choi, Woo Chun

    2015-07-01

    Mechanical micromachining is a powerful and effective way for manufacturing small sized machine parts. Even though the micromachining process is similar to the traditional machining, the material behavior during the process is much different. In particular, many researchers report that the basic mechanics of the work material is affected by microstructures and their crystallographic orientations. For example, crystallographic orientations of the work material have significant influence on force response, chip formation and surface finish. In order to thoroughly understand the effect of crystallographic orientations on the micromachining process, finite-element model (FEM) simulating orthogonal cutting process of single crystallographic material was presented. For modeling the work material, rate sensitive single crystal plasticity of face-centered cubic (FCC) crystal was implemented. For the chip formation during the simulation, element deletion technique was used. The simulation model is developed using ABAQUS/explicit with user material subroutine via user material subroutine (VUMAT). Simulations showed that variation of the specific cutting energy at different crystallographic orientations of work material shows significant anisotropy. The developed FEM model can be a useful prediction tool of micromachining of crystalline materials.

  2. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  3. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a

  4. Materials Issues for Micromachines Development - ASCI Program Plan

    Energy Technology Data Exchange (ETDEWEB)

    FANG,HUEI ELIOT; BATTAILE,CORBETT C.; BENAVIDES,GILBERT L.; ENSZ,MARK T.; BUCHHEIT,THOMAS E.; LAVAN,DAVID A.; CHEN,ER-PING; CHRISTENSON,TODD R.; DE BOER,MAARTEN P.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; PRASAD,SOMURI V.; REEDY JR.,EARL DAVID; THOMPSON,AIDAN P.; WONG,CHUNGNIN C.; YANG,PIN

    2000-05-01

    This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

  5. Dynamics of micromachined vibrating gimbal and wheel gyroscope

    Institute of Scientific and Technical Information of China (English)

    TijingCAI

    2000-01-01

    We deduce dynamic equations of micromachined vibrating gimbal and wheel gyroscope and give an approximate solution of enough accuracy. The comparison between the approximate solution and the solution used often in the literature is given. According to property of the approximate solution a decoupled two-axes gyroscope will be composed of two single-axes gyroscopes.

  6. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  7. Water desalination via capacitive deionization

    NARCIS (Netherlands)

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  8. Water desalination via capacitive deionization

    NARCIS (Netherlands)

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  9. Voltage Dependence of Supercapacitor Capacitance

    Directory of Open Access Journals (Sweden)

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  10. Interfacial capacitance effects in magnetic tunneling junctions

    CERN Document Server

    Landry, G; Du, J; Xiao, J Q

    2001-01-01

    We have investigated the AC transport properties of magnetic tunnel junctions (MTJ) in order to characterize interfacial properties. One such property is interfacial charge accumulation, which leads to a voltage drop in the electrodes of the MTJ and the measured capacitance differing from the geometrical capacitance. Through measurement of capacitance spectra, we have extracted an interfacial capacitance of 16 mu F/cm sup 2 per interface and a screening length of 0.55 A for FeNi electrodes.

  11. Capacitive effects in IGBTs limiting their reliability under short circuit

    DEFF Research Database (Denmark)

    Reigosa, Paula Diaz; Iannuzzo, Francesco; Rahimo, Munaf

    2017-01-01

    The short-circuit oscillation mechanism in IGBTs is investigated in this paper by the aid of semiconductor device simulation tools. A 3.3-kV IGBT cell has been used for the simulations demonstrating that a single IGBT cell is able to oscillate together with the external circuit parasitic elements....... The work presented here through both circuit and device analysis, confirms that the oscillations can be understood with focus on the device capacitive effects coming from the interaction between carrier concentration and the electric field. The paper also shows the 2-D effects during one oscillation cycle...

  12. New Multipole Method for 3-D Capacitance Extraction

    Institute of Scientific and Technical Information of China (English)

    Zhao-Zhi Yang; Ze-Yi Wang

    2004-01-01

    This paper describes an effcient improvement of the multipole accelerated boundary element method for 3-D capacitance extraction.The overall relations between the positions of 2-D boundary elements are considered instead of only the relations between the center-points of the elements,and a new method of cube partitioning is introduced.Numerical results are presented to demonstrate that the method is accurate and has nearly linear computational growth as O(n),where n is the number of panels/boundary elements.The proposed method is more accurate and much faster than Fastcap.

  13. Perspectives for spintronics in 2D materials

    Directory of Open Access Journals (Sweden)

    Wei Han

    2016-03-01

    Full Text Available The past decade has been especially creative for spintronics since the (rediscovery of various two dimensional (2D materials. Due to the unusual physical characteristics, 2D materials have provided new platforms to probe the spin interaction with other degrees of freedom for electrons, as well as to be used for novel spintronics applications. This review briefly presents the most important recent and ongoing research for spintronics in 2D materials.

  14. Bedform characterization through 2D spectral analysis

    DEFF Research Database (Denmark)

    Lefebvre, Alice; Ernstsen, Verner Brandbyge; Winter, Christian

    2011-01-01

    characteristics using twodimensional (2D) spectral analysis is presented and tested on seabed elevation data from the Knudedyb tidal inlet in the Danish Wadden Sea, where large compound bedforms are found. The bathymetric data were divided into 20x20 m areas on which a 2D spectral analysis was applied. The most...... energetic peak of the 2D spectrum was found and its energy, frequency and direction were calculated. A power-law was fitted to the average of slices taken through the 2D spectrum; its slope and y-intercept were calculated. Using these results the test area was morphologically classified into 4 distinct...

  15. A high-frequency transimpedance amplifier for CMOS integrated 2D CMUT array towards 3D ultrasound imaging.

    Science.gov (United States)

    Huang, Xiwei; Cheong, Jia Hao; Cha, Hyouk-Kyu; Yu, Hongbin; Je, Minkyu; Yu, Hao

    2013-01-01

    One transimpedance amplifier based CMOS analog front-end (AFE) receiver is integrated with capacitive micromachined ultrasound transducers (CMUTs) towards high frequency 3D ultrasound imaging. Considering device specifications from CMUTs, the TIA is designed to amplify received signals from 17.5MHz to 52.5MHz with center frequency at 35MHz; and is fabricated in Global Foundry 0.18-µm 30-V high-voltage (HV) Bipolar/CMOS/DMOS (BCD) process. The measurement results show that the TIA with power-supply 6V can reach transimpedance gain of 61dBΩ and operating frequency from 17.5MHz to 100MHz. The measured input referred noise is 27.5pA/√Hz. Acoustic pulse-echo testing is conducted to demonstrate the receiving functionality of the designed 3D ultrasound imaging system.

  16. Simulation of 2D Brain's Potential Distribution Based on Two Electrodes ECVT Using Finite Element Method

    Science.gov (United States)

    Sirait, S. H.; Edison, R. E.; Baidillah, M. R.; Taruno, W. P.; Haryanto, F.

    2016-08-01

    The aim of this study is to simulate the potential distribution of 2D brain geometry based on two electrodes ECVT. ECVT (electrical capacitance tomography) is a tomography modality which produces dielectric distribution image of a subject from several capacitance electrodes measurements. This study begins by producing the geometry of 2D brain based on MRI image and then setting the boundary conditions on the boundaries of the geometry. The values of boundary conditions follow the potential values used in two electrodes brain ECVT, and for this reason the first boundary is set to 20 volt and 2.5 MHz signal and another boundary is set to ground. Poisson equation is implemented as the governing equation in the 2D brain geometry and finite element method is used to solve the equation. Simulated Hodgkin-Huxley action potential is applied as disturbance potential in the geometry. We divide this study into two which comprises simulation without disturbance potential and simulation with disturbance potential. From this study, each of time dependent potential distributions from non-disturbance and disturbance potential of the 2D brain geometry has been generated.

  17. Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

    Science.gov (United States)

    Eccardt; Niederer

    2000-03-01

    For medical high frequency acoustic imaging purposes the reduction in size of a single transducer element for one-dimensional and even more for two-dimensional arrays is more and more limited by fabrication and cabling technology. In the fields of industrial distance measurement and simple object recognition low cost phased arrays are lacking. Both problems can be solved with micromachined ultrasound transducers (MUTs). A single transducer is made of a large number of microscopic elements. Because of the array structure of these transducers, groups of elements can be built up and used as a phased array. By integrating parts of the sensor electronics on chip, the cabling effort for arrays can be reduced markedly. In contrast to standard ultrasonic technology, which is based on massive thickness resonators, vibrating membranes are the radiating elements of the MUTs. New micromachining technologies have emerged, allowing a highly reproducible fabrication of electrostatically driven membranes with gap heights below 500 nm. A microelectronic BiCMOS process was extended for surface micromechanics (T. Scheiter et al., Proceedings 11th European Conference on Solid-State Transducers, Warsaw, Vol. 3, 1997, pp. 1595-1598). Additional process steps were included for the realization of the membranes which form sealed cavities with the underlying substrate. Membrane and substrate are the opposite electrodes of a capacitive transducer. The transducers can be integrated monolithically on one chip together with the driving, preamplifying and multiplexing circuitry, thus reducing parasitic capacities and noise level significantly. Owing to their low mass the transducers are very well matched to fluid loads, resulting in a very high bandwidth of 50-100% (C. Eccardt et al., Proceedings Ultrasonics Symposium, San Antonio, Vol. 2, 1996, pp. 959-962; P.C. Eccardt et al., Proceedings of the 1997 Ultrasonics Symposium, Toronto, Vol. 2, 1997, pp. 1609-1618). In the following it is shown how

  18. Quantum Capacitance in Topological Insulators

    Science.gov (United States)

    Xiu, Faxian; Meyer, Nicholas; Kou, Xufeng; He, Liang; Lang, Murong; Wang, Yong; Yu, Xinxin; Fedorov, Alexei V.; Zou, Jin; Wang, Kang L.

    2012-01-01

    Topological insulators show unique properties resulting from massless, Dirac-like surface states that are protected by time-reversal symmetry. Theory predicts that the surface states exhibit a quantum spin Hall effect with counter-propagating electrons carrying opposite spins in the absence of an external magnetic field. However, to date, the revelation of these states through conventional transport measurements remains a significant challenge owing to the predominance of bulk carriers. Here, we report on an experimental observation of Shubnikov-de Haas oscillations in quantum capacitance measurements, which originate from topological helical states. Unlike the traditional transport approach, the quantum capacitance measurements are remarkably alleviated from bulk interference at high excitation frequencies, thus enabling a distinction between the surface and bulk. We also demonstrate easy access to the surface states at relatively high temperatures up to 60 K. Our approach may eventually facilitate an exciting exploration of exotic topological properties at room temperature. PMID:22993694

  19. Annotated Bibliography of EDGE2D Use

    Energy Technology Data Exchange (ETDEWEB)

    J.D. Strachan and G. Corrigan

    2005-06-24

    This annotated bibliography is intended to help EDGE2D users, and particularly new users, find existing published literature that has used EDGE2D. Our idea is that a person can find existing studies which may relate to his intended use, as well as gain ideas about other possible applications by scanning the attached tables.

  20. Port Adriano, 2D-Model Tests

    DEFF Research Database (Denmark)

    Burcharth, Hans F.; Andersen, Thomas Lykke; Jensen, Palle Meinert

    This report present the results of 2D physical model tests (length scale 1:50) carried out in a waveflume at Dept. of Civil Engineering, Aalborg University (AAU).......This report present the results of 2D physical model tests (length scale 1:50) carried out in a waveflume at Dept. of Civil Engineering, Aalborg University (AAU)....

  1. Structural Theory of 2-d Adinkras

    CERN Document Server

    Iga, Kevin

    2015-01-01

    Adinkras are combinatorial objects developed to study 1-dimensional supersymmetry representations. Recently, 2-d Adinkras have been developed to study 2-dimensional supersymmetry. In this paper, we classify all 2-d Adinkras, confirming a conjecture of T. H\\"ubsch. Along the way, we obtain other structural results, including a simple characterization of H\\"ubsch's even-split doubly even code.

  2. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  3. Capacitance variation measurement method with a continuously variable measuring range for a micro-capacitance sensor

    Science.gov (United States)

    Lü, Xiaozhou; Xie, Kai; Xue, Dongfeng; Zhang, Feng; Qi, Liang; Tao, Yebo; Li, Teng; Bao, Weimin; Wang, Songlin; Li, Xiaoping; Chen, Renjie

    2017-10-01

    Micro-capacitance sensors are widely applied in industrial applications for the measurement of mechanical variations. The measurement accuracy of micro-capacitance sensors is highly dependent on the capacitance measurement circuit. To overcome the inability of commonly used methods to directly measure capacitance variation and deal with the conflict between the measurement range and accuracy, this paper presents a capacitance variation measurement method which is able to measure the output capacitance variation (relative value) of the micro-capacitance sensor with a continuously variable measuring range. We present the principles and analyze the non-ideal factors affecting this method. To implement the method, we developed a capacitance variation measurement circuit and carried out experiments to test the circuit. The result shows that the circuit is able to measure a capacitance variation range of 0–700 pF linearly with a maximum relative accuracy of 0.05% and a capacitance range of 0–2 nF (with a baseline capacitance of 1 nF) with a constant resolution of 0.03%. The circuit is proposed as a new method to measure capacitance and is expected to have applications in micro-capacitance sensors for measuring capacitance variation with a continuously variable measuring range.

  4. Design of nanosecond pulse laser micromachining system based on PMAC

    Science.gov (United States)

    Liu, Mingyan; Fu, Xing; Xu, Linyan; Lin, Qian; Gu, Shuang

    2012-10-01

    Pulse laser micromachining technology, as a branch of laser processing technology, has been widely used in MEMS device processing, aviation, instruments fabrication, circuit board design etc.. In this paper, a novel nanosecond pulse laser micromachining system is presented, which consists of nanosecond pulse LASER, optical path mechanical structure, transmission system, motion control system. Nanosecond pulse UV laser, with 355 nm wavelength and 40ns pulse width, is chosen as the light source. Optical path mechanical structure is designed to get ideal result of laser focusing. Motion control system, combining PMAC card with the PC software, can control the 3-D motion platform and complete microstructure processing. By CCD monitoring system, researchers can get real-time detection on the effect of laser beam focusing and processing process.

  5. Deep ultraviolet laser micromachining of novel fibre optic devices

    Energy Technology Data Exchange (ETDEWEB)

    Li, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Dou, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Herman, P R [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Fricke-Begemann, T [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Ihlemann, J [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Marowsky, G [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany)

    2007-04-15

    A deep ultraviolet F{sub 2} laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F{sub 2}-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  6. Femtosecond Laser Micromachining Photonic and Microfluidic Devices in Transparent Materials

    CERN Document Server

    Cerullo, Giulio; Ramponi, Roberta

    2012-01-01

    Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

  7. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  8. Optical fiber accelerometer based on a silicon micromachined cantilever

    Science.gov (United States)

    Malki, Abdelrafik; Lecoy, Pierre; Marty, Jeanine; Renouf, Christine; Ferdinand, Pierre

    1995-12-01

    An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of +/-1.2% in the range of 0.1-22 m s-2, a frequency linearity of +/-1% in the

  9. Development of a surface micromachined spiral-channel viscous pump

    Science.gov (United States)

    Kilani, Mohammad Ibrahim

    This work introduces a new pump, called the spiral pump, which targets the surface micromachining technology. We demonstrate the possibility of realizing the spiral pump geometry in standard surface micromachining, lay out the theoretical foundation for its operation, and conduct an objective assessment for its practicality. The spiral pump is a shear-driven viscous pump, which works by rotating a disk with a spiral groove at a close proximity over a stationary plate. Fluid contained in the spiral groove between the stationary plate and the rotating disk, is subject to a net tangential viscous stress, which allows it to be transported against an imposed pressure difference. A number of spiral pumps were fabricated in 5 levels of polysilicon using Sandia's Ultraplanar Multilevel Surface Micromachining Technology, SUMMiT, and the fabricated micropump were tested in dry-run mode using electrostatic probing and optical microscopy. To achieve a more comprehensive understanding of the spiral micropump operation, an analytical model was developed for the flow field in the spiral channel of the pump using an approximation which replaces the spiral channel with an equivalent straight channel with appropriate dimensions and boundary conditions. An analytical solution for this model at the lubrication limit relates the flow rate, torque and power consumption of the spiral pump to the pressure difference and rotation rate. The model was validated using macroscale experiments conducted on a scaled up spiral pump model, which involved a quantitative characterization of the spiral pump performance. Those experiments validate the developed theory and help assess the practicality of the spiral pump concept. In addition to the spiral pump, two positive-displacement ring-gear pumps were designed and fabricated in this work. The feasibility of surface micromachined ring-gear pumps is briefly investigated in this work, and compare to that of the spiral micropump.

  10. Bimetallic Thermal Resists for Photomask, Micromachining and Microfabrication

    OpenAIRE

    Tu, Richard Yuqiang

    2004-01-01

    Photoresists and photomasks are two of the most critical materials in microfabrication and micromachining industries. As the shift towards shorter wavelength exposure continues, conventional organic photoresists and chromelquartz photomasks start to encounter problems. This thesis investigates and presents an alternative to organic photoresists and chromium photomasks which overcomes their intrinsic problems. A bimetallic thin film, such as BilIn and SnIIn, creates an inorganic thermal resist...

  11. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  12. Micromachining of a piezocomposite transducer using a copper vapor laser.

    Science.gov (United States)

    Farlow, R; Galbraith, W; Knowles, M; Hayward, G

    2001-05-01

    A 1-3 piezocomposite transducer with front face dimensions of 2 x 2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-micron pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 microns, and the transducer thickness is 170 microns, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.

  13. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging

    National Research Council Canada - National Science Library

    Qiu, Yongqiang; Gigliotti, James V; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E M; Cochran, Sandy; Trolier-McKinstry, Susan

    2015-01-01

    .... Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays...

  14. An overview of micromachined platforms for thermal sensing and gas detection

    Energy Technology Data Exchange (ETDEWEB)

    Manginell, R.P.; Smith, J.H.; Ricco, A.J.

    1997-03-01

    Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for thermal sensing and gas detection. Compared with conventional devices, micromachined sensors are characterized by low power consumption, high sensitivity, and fast response time. Much of these gains can be attributed to the size reductions achieved by micromachining. In addition, micromachining permits easy, yet precise tailoring of the heat transfer characteristics of these devices. By simple alterations in device geometry and materials used, the relative magnitudes of radiation, convection and conduction losses and Joule heat gains can be adjusted, and in this way device response can be optimized for specific applications. The free-standing design of micromachined platforms, for example, reduces heat conduction losses to the substrate, thereby making them attractive as low power, fast-response heaters suitable for a number of applications. However, while micromachining solves some of the heat transfer problems typical of conventionally produced devices, it introduces some of its own. These trade-offs will be discussed in the context of several micromachined thermal and gas sensors present in the literature. These include micromachined flow sensors, gas thermal conductivity sensors, pressure sensors, uncooled IR sensors, metal-oxide and catalytic/calorimetric gas sensors. Recent results obtained for a microbridge-based catalytic/calorimetric gas sensor will also be presented as a means of further illustrating the concepts of thermal design in micromachined sensors.

  15. 2D materials for nanophotonic devices

    Science.gov (United States)

    Xu, Renjing; Yang, Jiong; Zhang, Shuang; Pei, Jiajie; Lu, Yuerui

    2015-12-01

    Two-dimensional (2D) materials have become very important building blocks for electronic, photonic, and phononic devices. The 2D material family has four key members, including the metallic graphene, transition metal dichalcogenide (TMD) layered semiconductors, semiconducting black phosphorous, and the insulating h-BN. Owing to the strong quantum confinements and defect-free surfaces, these atomically thin layers have offered us perfect platforms to investigate the interactions among photons, electrons and phonons. The unique interactions in these 2D materials are very important for both scientific research and application engineering. In this talk, I would like to briefly summarize and highlight the key findings, opportunities and challenges in this field. Next, I will introduce/highlight our recent achievements. We demonstrated atomically thin micro-lens and gratings using 2D MoS2, which is the thinnest optical component around the world. These devices are based on our discovery that the elastic light-matter interactions in highindex 2D materials is very strong. Also, I would like to introduce a new two-dimensional material phosphorene. Phosphorene has strongly anisotropic optical response, which creates 1D excitons in a 2D system. The strong confinement in phosphorene also enables the ultra-high trion (charged exciton) binding energies, which have been successfully measured in our experiments. Finally, I will briefly talk about the potential applications of 2D materials in energy harvesting.

  16. Redox regulation of mammalian sperm capacitation

    Directory of Open Access Journals (Sweden)

    Cristian O′Flaherty

    2015-01-01

    Full Text Available Capacitation is a series of morphological and metabolic changes necessary for the spermatozoon to achieve fertilizing ability. One of the earlier happenings during mammalian sperm capacitation is the production of reactive oxygen species (ROS that will trigger and regulate a series of events including protein phosphorylation, in a time-dependent fashion. The identity of the sperm oxidase responsible for the production of ROS involved in capacitation is still elusive, and several candidates are discussed in this review. Interestingly, ROS-induced ROS formation has been described during human sperm capacitation. Redox signaling during capacitation is associated with changes in thiol groups of proteins located on the plasma membrane and subcellular compartments of the spermatozoon. Both, oxidation of thiols forming disulfide bridges and the increase on thiol content are necessary to regulate different sperm proteins associated with capacitation. Reducing equivalents such as NADH and NADPH are necessary to support capacitation in many species including humans. Lactate dehydrogenase, glucose-6-phospohate dehydrogenase, and isocitrate dehydrogenase are responsible in supplying NAD (P H for sperm capacitation. Peroxiredoxins (PRDXs are newly described enzymes with antioxidant properties that can protect mammalian spermatozoa; however, they are also candidates for assuring the regulation of redox signaling required for sperm capacitation. The dysregulation of PRDXs and of enzymes needed for their reactivation such as thioredoxin/thioredoxin reductase system and glutathione-S-transferases impairs sperm motility, capacitation, and promotes DNA damage in spermatozoa leading to male infertility.

  17. Advances of focused ion beam in micromachining technology

    Science.gov (United States)

    Zhang, S. J.; Fang, F. Z.; Hu, X. T.

    2007-12-01

    The applications of focused ion beam (FIB) technology in micromachining has advantages over other micromachining technologies, such as high feature resolution, capable markless process, rapid prototyping and adaptive for various materials and geometries. FIB direct-writing techniques are explored for their excellent abilities in micromachining. In addition to FIB technology and its principles for imaging, milling and deposition, a typical FIB system is presented. The key to FIB direct-writing technology is to operate a FIB with a proper beam size, shape, current and energy to remove or add a required amount of material from a pre-defined location in a controlled manner. In this way, high-precision and complicated three-dimensional structures with controlled profiles can be fabricated. Several examples of using milling technique for making high-quality microdevices or high-precision microcomponents for optical and other applications are given. The demonstration of milling a narrow readout gap at an oblique angle on a microaccelerometer shows a FIB's application on a small but accurate post-processing step on a micromechanical device. The diffractive optical element (DOE) with continuous relief and submicron feature size fabricated by FIB milling is also presented to prove high resolution and accurate relief control. Furthermore, FIB milling is used to shape a variety of cutting tools with extremely precise dimensions and complex tool face shapes.

  18. Hybridized Plasmons in 2D Nanoslits: From Graphene to Anisotropic 2D Materials

    DEFF Research Database (Denmark)

    Gonçalves, P. A. D.; Xiao, Sanshui; Peres, N. M. R.

    2017-01-01

    of arbitrary width, and remains valid irrespective of the 2D conductive material (e.g., doped graphene, 2D transition metal dichalcogenides, or phosphorene). We derive the dispersion relation of the hybrid modes of a 2D nanoslit along with the corresponding induced potential and electric field distributions...

  19. Impact of Nanosize on Supercapacitance: Study of 1D Nanorods and 2D Thin-Films of Nickel Oxide.

    Science.gov (United States)

    Patil, Ranjit A; Chang, Cheng-Ping; Devan, Rupesh S; Liou, Yung; Ma, Yuan-Ron

    2016-04-20

    We synthesized unique one-dimensional (1D) nanorods and two-dimensional (2D) thin-films of NiO on indium-tin-oxide thin-films using a hot-filament metal-oxide vapor deposition technique. The 1D nanorods have an average width and length of ∼100 and ∼500 nm, respectively, and the densely packed 2D thin-films have an average thickness of ∼500 nm. The 1D nanorods perform as parallel units for charge storing. However, the 2D thin-films act as one single unit for charge storing. The 2D thin-films possess a high specific capacitance of ∼746 F/g compared to 1D nanorods (∼230 F/g) using galvanostatic charge-discharge measurements at a current density of 3 A/g. Because the 1D NiO nanorods provide more plentiful surface areas than those of the 2D thin-films, they are fully active at the first few cycles. However, the capacitance retention of the 1D nanorods decays faster than that of the 2D thin-films. Also, the 1D NiO nanorods suffer from instability due to the fast electrochemical dissolution and high nanocontact resistance. Electrochemical impedance spectroscopy verifies that the low dimensionality of the 1D NiO nanorods induces the unavoidable effects that lead them to have poor supercapacitive performances. On the other hand, the slow electrochemical dissolution and small contact resistance in the 2D NiO thin-films favor to achieve high specific capacitance and great stability.

  20. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  1. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  2. 2D/3D switchable displays

    Science.gov (United States)

    Dekker, T.; de Zwart, S. T.; Willemsen, O. H.; Hiddink, M. G. H.; IJzerman, W. L.

    2006-02-01

    A prerequisite for a wide market acceptance of 3D displays is the ability to switch between 3D and full resolution 2D. In this paper we present a robust and cost effective concept for an auto-stereoscopic switchable 2D/3D display. The display is based on an LCD panel, equipped with switchable LC-filled lenticular lenses. We will discuss 3D image quality, with the focus on display uniformity. We show that slanting the lenticulars in combination with a good lens design can minimize non-uniformities in our 20" 2D/3D monitors. Furthermore, we introduce fractional viewing systems as a very robust concept to further improve uniformity in the case slanting the lenticulars and optimizing the lens design are not sufficient. We will discuss measurements and numerical simulations of the key optical characteristics of this display. Finally, we discuss 2D image quality, the switching characteristics and the residual lens effect.

  3. Matrix models of 2d gravity

    Energy Technology Data Exchange (ETDEWEB)

    Ginsparg, P.

    1991-01-01

    These are introductory lectures for a general audience that give an overview of the subject of matrix models and their application to random surfaces, 2d gravity, and string theory. They are intentionally 1.5 years out of date.

  4. Matrix models of 2d gravity

    Energy Technology Data Exchange (ETDEWEB)

    Ginsparg, P.

    1991-12-31

    These are introductory lectures for a general audience that give an overview of the subject of matrix models and their application to random surfaces, 2d gravity, and string theory. They are intentionally 1.5 years out of date.

  5. 2D Saturable Absorbers for Fibre Lasers

    Directory of Open Access Journals (Sweden)

    Robert I. Woodward

    2015-11-01

    Full Text Available Two-dimensional (2D nanomaterials are an emergent and promising platform for future photonic and optoelectronic applications. Here, we review recent progress demonstrating the application of 2D nanomaterials as versatile, wideband saturable absorbers for Q-switching and mode-locking fibre lasers. We focus specifically on the family of few-layer transition metal dichalcogenides, including MoS2, MoSe2 and WS2.

  6. Image processing of 2D crystal images.

    Science.gov (United States)

    Arheit, Marcel; Castaño-Díez, Daniel; Thierry, Raphaël; Gipson, Bryant R; Zeng, Xiangyan; Stahlberg, Henning

    2013-01-01

    Electron crystallography of membrane proteins uses cryo-transmission electron microscopy to image frozen-hydrated 2D crystals. The processing of recorded images exploits the periodic arrangement of the structures in the images to extract the amplitudes and phases of diffraction spots in Fourier space. However, image imperfections require a crystal unbending procedure to be applied to the image before evaluation in Fourier space. We here describe the process of 2D crystal image unbending, using the 2dx software system.

  7. Applications of 2D helical vortex dynamics

    DEFF Research Database (Denmark)

    Okulov, Valery; Sørensen, Jens Nørkær

    2010-01-01

    In the paper, we show how the assumption of helical symmetry in the context of 2D helical vortices can be exploited to analyse and to model various cases of rotating flows. From theory, examples of three basic applications of 2D dynamics of helical vortices embedded in flows with helical symmetry...... of the vorticity field are addressed. These included some of the problems related to vortex breakdown, instability of far wakes behind rotors and vortex theory of ideal rotors....

  8. Capacitance enhancement via electrode patterning

    Science.gov (United States)

    Ho, Tuan A.; Striolo, Alberto

    2013-11-01

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties.

  9. Capacitance enhancement via electrode patterning

    Energy Technology Data Exchange (ETDEWEB)

    Ho, Tuan A.; Striolo, Alberto, E-mail: a.striolo@ucl.ac.uk [School of Chemical, Biological and Materials Engineering, The University of Oklahoma, Norman, Oklahoma 73019 (United States); Department of Chemical Engineering, University College London, Torrington Place, London WC1E 7JE (United Kingdom)

    2013-11-28

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties.

  10. Dual Cryogenic Capacitive Density Sensor

    Science.gov (United States)

    Youngquist, Robert; Mata, Carlos; Vokrot, Peter; Cox, Robert

    2009-01-01

    A dual cryogenic capacitive density sensor has been developed. The device contains capacitive sensors that monitor two-phase cryogenic flow density to within 1% accuracy, which, if temperature were known, could be used to determine the ratio of liquid to gas in the line. Two of these density sensors, located a known distance apart, comprise the sensor, providing some information on the velocity of the flow. This sensor was constructed as a proposed mass flowmeter with high data acquisition rates. Without moving parts, this device is capable of detecting the density change within a two-phase cryogenic flow more than 100 times a second. Detection is enabled by a series of two sets of five parallel plates with stainless steel, cryogenically rated tubing. The parallel plates form the two capacitive sensors, which are measured by electrically isolated digital electronics. These capacitors monitor the dielectric of the flow essentially the density of the flow and can be used to determine (along with temperature) the ratio of cryogenic liquid to gas. Combining this information with the velocity of the flow can, with care, be used to approximate the total two-phase mass flow. The sensor can be operated at moderately high pressures and can be lowered into a cryogenic bath. The electronics have been substantially improved over the older sensors, incorporating a better microprocessor, elaborate ground loop protection and noise limiting circuitry, and reduced temperature sensitivity. At the time of this writing, this design has been bench tested at room temperature, but actual cryogenic tests are pending

  11. Glitter in a 2D monolayer.

    Science.gov (United States)

    Yang, Li-Ming; Dornfeld, Matthew; Frauenheim, Thomas; Ganz, Eric

    2015-10-21

    We predict a highly stable and robust atomically thin gold monolayer with a hexagonal close packed lattice stabilized by metallic bonding with contributions from strong relativistic effects and aurophilic interactions. We have shown that the framework of the Au monolayer can survive 10 ps MD annealing simulations up to 1400 K. The framework is also able to survive large motions out of the plane. Due to the smaller number of bonds per atom in the 2D layer compared to the 3D bulk we observe significantly enhanced energy per bond (0.94 vs. 0.52 eV per bond). This is similar to the increase in bond strength going from 3D diamond to 2D graphene. It is a non-magnetic metal, and was found to be the global minima in the 2D space. Phonon dispersion calculations demonstrate high kinetic stability with no negative modes. This 2D gold monolayer corresponds to the top monolayer of the bulk Au(111) face-centered cubic lattice. The close-packed lattice maximizes the aurophilic interactions. We find that the electrons are completely delocalized in the plane and behave as 2D nearly free electron gas. We hope that the present work can inspire the experimental fabrication of novel free standing 2D metal systems.

  12. 2d index and surface operators

    Science.gov (United States)

    Gadde, Abhijit; Gukov, Sergei

    2014-03-01

    In this paper we compute the superconformal index of 2d (2, 2) supersymmetric gauge theories. The 2d superconformal index, a.k.a. flavored elliptic genus, is computed by a unitary matrix integral much like the matrix integral that computes the 4d superconformal index. We compute the 2d index explicitly for a number of examples. In the case of abelian gauge theories we see that the index is invariant under flop transition and under CY-LG correspondence. The index also provides a powerful check of the Seiberg-type duality for non-abelian gauge theories discovered by Hori and Tong. In the later half of the paper, we study half-BPS surface operators in = 2 super-conformal gauge theories. They are engineered by coupling the 2d (2, 2) supersymmetric gauge theory living on the support of the surface operator to the 4d = 2 theory, so that different realizations of the same surface operator with a given Levi type are related by a 2d analogue of the Seiberg duality. The index of this coupled system is computed by using the tools developed in the first half of the paper. The superconformal index in the presence of surface defect is expected to be invariant under generalized S-duality. We demonstrate that it is indeed the case. In doing so the Seiberg-type duality of the 2d theory plays an important role.

  13. Flexible PVDF ferroelectric capacitive temperature sensor

    KAUST Repository

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  14. Compact monolithic capacitive discharge unit

    Science.gov (United States)

    Roesler, Alexander W.; Vernon, George E.; Hoke, Darren A.; De Marquis, Virginia K.; Harris, Steven M.

    2007-06-26

    A compact monolithic capacitive discharge unit (CDU) is disclosed in which a thyristor switch and a flyback charging circuit are both sandwiched about a ceramic energy storage capacitor. The result is a compact rugged assembly which provides a low-inductance current discharge path. The flyback charging circuit preferably includes a low-temperature co-fired ceramic transformer. The CDU can further include one or more ceramic substrates for enclosing the thyristor switch and for holding various passive components used in the flyback charging circuit. A load such as a detonator can also be attached directly to the CDU.

  15. 2-D DOA Estimation Based on 2D-MUSIC%基于2D-MUSIC算法的DOA估计

    Institute of Scientific and Technical Information of China (English)

    康亚芳; 王静; 张清泉; 行小帅

    2014-01-01

    This paper discussed the performance of classical two-dimensional DOA estimation with 2D-MUSIC, based on the mathematical model of planar array and 2D-MUSIC DOA estimation, Taking uniform planar array for example, comput-er simulation experiment was carried for the effect of three kinds of different parameters on 2-D DOA estimation, and the simulation results were analyzed. And also verification test about the corresponding algorithm performance under the differ-ent parameters was discussed.%利用经典的2D-MUSIC算法对二维阵列的DOA估计进行了研究,在平面阵列数学模型以及2D-MUSIC算法的DOA估计模型基础上,以均匀平面阵列为例,对3种不同参数的DOA估计进行了计算机仿真,分析了仿真结果。得出了在不同参数变化趋势下DOA估计的相应变化情况。

  16. Microgénérateurs à aimants permanents entraînés par des microturbines à air ou des micromachines à gaz chaud

    OpenAIRE

    Herrault, Florian

    2009-01-01

    L'énergie nécessaire au fonctionnement des systèmes électroniques est en train de surpasser les capacités des batteries actuelles. Par conséquent, l'application des technologies MEMS pour la conception de nouvelles sources de puissance à haute performance est très attractive. Cette thèse considère la fabrication de microgénérateurs entraînés par gaz froid ou chaud. Tout d'abord, nous avons développé des microgénérateurs à aimants permanents compatibles avec le fonctionnement de micromachin...

  17. Characterization of a bulk-micromachined membraneless in-plane thermopile

    NARCIS (Netherlands)

    Wang, Z.; Andel, Y. van; Jambunathan, M.; Leonov, V.; Elfrink, R.; Vullers, R.J.M.

    2011-01-01

    This paper describes the characterization method and results for bulk- micromachined in-plane thermopiles. Made of poly-Si or poly-SiGe, the thermocouple legs bridge the hot and cold side of a Si frame, which is formed by bulk micromachining. The characterization of the fabricated devices is carried

  18. Characterization of a bulk-micromachined membraneless in-plane thermopile

    NARCIS (Netherlands)

    Wang, Z.; Andel, Y. van; Jambunathan, M.; Leonov, V.; Elfrink, R.; Vullers, R.J.M.

    2011-01-01

    This paper describes the characterization method and results for bulk- micromachined in-plane thermopiles. Made of poly-Si or poly-SiGe, the thermocouple legs bridge the hot and cold side of a Si frame, which is formed by bulk micromachining. The characterization of the fabricated devices is carried

  19. 2d Index and Surface operators

    CERN Document Server

    Gadde, Abhijit

    2013-01-01

    In this paper we compute the superconformal index of 2d (2,2) supersymmetric gauge theories. The 2d superconformal index, a.k.a. flavored elliptic genus, is computed by a unitary matrix integral much like the matrix integral that computes 4d superconformal index. We compute the 2d index explicitly for a number of examples. In the case of abelian gauge theories we see that the index is invariant under flop transition and CY-LG correspondence. The index also provides a powerful check of the Seiberg-type duality for non-abelian gauge theories discovered by Hori and Tong. In the later half of the paper, we study half-BPS surface operators in N=2 superconformal gauge theories. They are engineered by coupling the 2d (2,2) supersymmetric gauge theory living on the support of the surface operator to the 4d N=2 theory, so that different realizations of the same surface operator with a given Levi type are related by a 2d analogue of the Seiberg duality. The index of this coupled system is computed by using the tools de...

  20. Optical modulators with 2D layered materials

    Science.gov (United States)

    Sun, Zhipei; Martinez, Amos; Wang, Feng

    2016-04-01

    Light modulation is an essential operation in photonics and optoelectronics. With existing and emerging technologies increasingly demanding compact, efficient, fast and broadband optical modulators, high-performance light modulation solutions are becoming indispensable. The recent realization that 2D layered materials could modulate light with superior performance has prompted intense research and significant advances, paving the way for realistic applications. In this Review, we cover the state of the art of optical modulators based on 2D materials, including graphene, transition metal dichalcogenides and black phosphorus. We discuss recent advances employing hybrid structures, such as 2D heterostructures, plasmonic structures, and silicon and fibre integrated structures. We also take a look at the future perspectives and discuss the potential of yet relatively unexplored mechanisms, such as magneto-optic and acousto-optic modulation.

  1. Automatic Contour Extraction from 2D Image

    Directory of Open Access Journals (Sweden)

    Panagiotis GIOANNIS

    2011-03-01

    Full Text Available Aim: To develop a method for automatic contour extraction from a 2D image. Material and Method: The method is divided in two basic parts where the user initially chooses the starting point and the threshold. Finally the method is applied to computed tomography of bone images. Results: An interesting method is developed which can lead to a successful boundary extraction of 2D images. Specifically data extracted from a computed tomography images can be used for 2D bone reconstruction. Conclusions: We believe that such an algorithm or part of it can be applied on several other applications for shape feature extraction in medical image analysis and generally at computer graphics.

  2. Orthotropic Piezoelectricity in 2D Nanocellulose

    Science.gov (United States)

    García, Y.; Ruiz-Blanco, Yasser B.; Marrero-Ponce, Yovani; Sotomayor-Torres, C. M.

    2016-10-01

    The control of electromechanical responses within bonding regions is essential to face frontier challenges in nanotechnologies, such as molecular electronics and biotechnology. Here, we present Iβ-nanocellulose as a potentially new orthotropic 2D piezoelectric crystal. The predicted in-layer piezoelectricity is originated on a sui-generis hydrogen bonds pattern. Upon this fact and by using a combination of ab-initio and ad-hoc models, we introduce a description of electrical profiles along chemical bonds. Such developments lead to obtain a rationale for modelling the extended piezoelectric effect originated within bond scales. The order of magnitude estimated for the 2D Iβ-nanocellulose piezoelectric response, ~pm V‑1, ranks this material at the level of currently used piezoelectric energy generators and new artificial 2D designs. Such finding would be crucial for developing alternative materials to drive emerging nanotechnologies.

  3. 2D microwave imaging reflectometer electronics

    Energy Technology Data Exchange (ETDEWEB)

    Spear, A. G.; Domier, C. W., E-mail: cwdomier@ucdavis.edu; Hu, X.; Muscatello, C. M.; Ren, X.; Luhmann, N. C. [Electrical and Computer Engineering, University of California, Davis, California 95616 (United States); Tobias, B. J. [Princeton Plasma Physics Laboratory, Princeton, New Jersey 08543 (United States)

    2014-11-15

    A 2D microwave imaging reflectometer system has been developed to visualize electron density fluctuations on the DIII-D tokamak. Simultaneously illuminated at four probe frequencies, large aperture optics image reflections from four density-dependent cutoff surfaces in the plasma over an extended region of the DIII-D plasma. Localized density fluctuations in the vicinity of the plasma cutoff surfaces modulate the plasma reflections, yielding a 2D image of electron density fluctuations. Details are presented of the receiver down conversion electronics that generate the in-phase (I) and quadrature (Q) reflectometer signals from which 2D density fluctuation data are obtained. Also presented are details on the control system and backplane used to manage the electronics as well as an introduction to the computer based control program.

  4. Assessing 2D electrophoretic mobility spectroscopy (2D MOSY) for analytical applications.

    Science.gov (United States)

    Fang, Yuan; Yushmanov, Pavel V; Furó, István

    2016-12-08

    Electrophoretic displacement of charged entity phase modulates the spectrum acquired in electrophoretic NMR experiments, and this modulation can be presented via 2D FT as 2D mobility spectroscopy (MOSY) spectra. We compare in various mixed solutions the chemical selectivity provided by 2D MOSY spectra with that provided by 2D diffusion-ordered spectroscopy (DOSY) spectra and demonstrate, under the conditions explored, a superior performance of the former method. 2D MOSY compares also favourably with closely related LC-NMR methods. The shape of 2D MOSY spectra in complex mixtures is strongly modulated by the pH of the sample, a feature that has potential for areas such as in drug discovery and metabolomics. Copyright © 2016 The Authors. Magnetic Resonance in Chemistry published by John Wiley & Sons Ltd. StartCopTextCopyright © 2016 The Authors. Magnetic Resonance in Chemistry published by John Wiley & Sons Ltd.

  5. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, H.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up capacitan

  6. The pyramidal capacitated vehicle routing problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal...

  7. Characterization of Textile-Insulated Capacitive Biosensors

    Directory of Open Access Journals (Sweden)

    Charn Loong Ng

    2017-03-01

    Full Text Available Capacitive biosensors are an emerging technology revolutionizing wearable sensing systems and personal healthcare devices. They are capable of continuously measuring bioelectrical signals from the human body while utilizing textiles as an insulator. Different textile types have their own unique properties that alter skin-electrode capacitance and the performance of capacitive biosensors. This paper aims to identify the best textile insulator to be used with capacitive biosensors by analysing the characteristics of 6 types of common textile materials (cotton, linen, rayon, nylon, polyester, and PVC-textile while evaluating their impact on the performance of a capacitive biosensor. A textile-insulated capacitive (TEX-C biosensor was developed and validated on 3 subjects. Experimental results revealed that higher skin-electrode capacitance of a TEX-C biosensor yields a lower noise floor and better signal quality. Natural fabric such as cotton and linen were the two best insulating materials to integrate with a capacitive biosensor. They yielded the lowest noise floor of 2 mV and achieved consistent electromyography (EMG signals measurements throughout the performance test.

  8. Energy-Efficient Capacitive-Sensor Interfaces

    NARCIS (Netherlands)

    Tan, Z.

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level

  9. Integrated micromachined transmission lines and endfire slotline antennas

    Science.gov (United States)

    Gearhart, Steven S.; Willke, Theodore L.; Onggosanusi, Eko N.

    1997-09-01

    An entirely new class of micromachined 3D microwave and millimeter-wave integrated circuits and antennas are being developed at the University of Wisconsin-Madison using a subset o the LIGA micromachining process. The deep x-ray lithography and metal plating portions of the LIGA process are used to precisely form tall metal structures on semiconductor and dielectric substrates. This micromachining process allows metal height to be included as a parameter in the design of integrated circuits, which will permit several important advancements in high frequency waveguiding circuits and integrated antennas. With appropriate thick- metal cross-sectional geometry, transmission line losses and dispersion may both be reduced on a given substrate. Vertical-walled metal structures allow increased control over element-to-element coupling for integrated coupled-line filters and couplers and result in very significant reductions in ohmic loss. It will be demonstrated that the first single-level coupled-line 3dB coupler can be fabricated using the LIGA process. In addition, the mechanical properties of the thick metal structures will be utilized in the fabrication of integrated antennas and transmission lines that are unsupported by a dielectric substrate. The elimination of the substrate beneath antennas reduces losses to substrate modes, and the elimination o the substrate beneath transmission line filters is necessary for extremely high Q integrated filters. This paper will present simulated loss results that demonstrate the advantages of thick metal transmission lines, measured results of a coupled-line bandpass filter, and a recently fabricated thick-metal tapered slotline antenna which extends nearly a centimeter off of the edge of a GaAs wafer.

  10. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  11. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  12. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale.

  13. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  14. A beam-membrane structure micromachined differential pressure flow sensor.

    Science.gov (United States)

    Chen, P; Zhao, Y L; Tian, B; Li, C; Li, Y Y

    2015-04-01

    A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

  15. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  16. Capacitance Measurement Methods for Integrated Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alireza Hassanzadeh

    2013-09-01

    Full Text Available In this paper different measurement methods that have been used for integrated capacitance measurement are reviewed and their advantage and disadvantages are discussed. For the designers of high accuracy on chip integrated circuits for capacitive sensors, it is important to know which method will provide the best approach for high accuracy, small chip area and power consumption especially for array sensors. These methods include on chip capacitive sensor and transducer measurement techniques that have been implemented for low value capacitance evaluations using CMOS technology. After the best structure is known the designer can optimize the chip for specific application. Voltage mode and current mode, linear and switched mode techniques are reviewed and a useful comparison table comparing all figures of merit including accuracy, range of measurement, chip area, speed and complexity is provided. The provided comparison table can be used as a reference for analog designers in the design of high accuracy integrated capacitive sensor interface

  17. Capacitively-coupled chopper amplifiers

    CERN Document Server

    Fan, Qinwen; Huijsing, Johan H

    2017-01-01

    This book describes the concept and design of the capacitively-coupled chopper technique, which can be used in precision analog amplifiers. Readers will learn to design power-efficient amplifiers employing this technique, which can be powered by regular low supply voltage such as 2V and possibly having a +\\-100V input common-mode voltage input. The authors provide both basic design concepts and detailed design examples, which cover the area of both operational and instrumentation amplifiers for multiple applications, particularly in power management and biomedical circuit designs. Discusses basic working principles and details of implementation for proven designs; Includes a diverse set of applications, along with measurement results to demonstrate the effectiveness of the technique; Explains advantages and drawbacks of the technique, given particular circumstances.

  18. Aircraft height estimation using 2-D radar

    CSIR Research Space (South Africa)

    Hakl, H

    2010-01-01

    Full Text Available A method to infer height information from an aircraft tracked with a single 2-D search radar is presented. The method assumes level flight in the target aircraft and a good estimate of the speed of the aircraft. The method yields good results...

  19. Canonical structure of 2D black holes

    CERN Document Server

    Navarro-Salas, J; Talavera, C F

    1994-01-01

    We determine the canonical structure of two-dimensional black-hole solutions arising in $2D$ dilaton gravity. By choosing the Cauchy surface appropriately we find that the canonically conjugate variable to the black hole mass is given by the difference of local (Schwarzschild) time translations at right and left spatial infinities. This can be regarded as a generalization of Birkhoff's theorem.

  20. Horns Rev II, 2-D Model Tests

    DEFF Research Database (Denmark)

    Andersen, Thomas Lykke; Frigaard, Peter

    This report present the results of 2D physical model tests carried out in the shallow wave flume at Dept. of Civil Engineering, Aalborg University (AAU), on behalf of Energy E2 A/S part of DONG Energy A/S, Denmark. The objective of the tests was: to investigate the combined influence of the pile...

  1. 2D PIM Simulation Based on COMSOL

    DEFF Research Database (Denmark)

    Wang, Xinbo; Cui, Wanzhao; Wang, Jingyu;

    2011-01-01

    Passive intermodulation (PIM) is a problematic type of nonlinear distortion en- countered in many communication systems. To analyze the PIM distortion resulting from ma- terial nonlinearity, a 2D PIM simulation method based on COMSOL is proposed in this paper. As an example, a rectangular wavegui...

  2. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    Science.gov (United States)

    Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

    2013-09-01

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

  3. Intermittent-contact scanning capacitance microscopy imaging and modeling for overlay metrology

    Science.gov (United States)

    Mayo, S.; Kopanski, J. J.; Guthrie, W. F.

    1998-11-01

    Overlay measurements of the relative alignment between sequential layers are one of the most critical issues for integrated circuit (IC) lithography. We have implemented on an AFM platform a new intermittent-contact scanning capacitance microscopy (IC-SCM) mode that is sensitive to the tip proximity to an IC interconnect, thus making it possible to image conductive structures buried under planarized dielectric layers. Such measurements can be used to measure IC metal-to-resist lithography overlay. The AFM conductive cantilever probe oscillating in a vertical plane was driven at frequency ω, below resonance. By measuring the tip-to-sample capacitance, the SCM signal is obtained as the difference in capacitance, ΔC(ω), at the amplitude extremes. Imaging of metallization structures was obtained with a bars-in-bars aluminum structure embedded in a planarized dielectric layer 1 μm thick. We have also modeled, with a two-dimensional (2D) electrostatic field simulator, IC-SCM overlay data of a metallization structure buried under a planarized dielectric having a patterned photoresist layer deposited on it. This structure, which simulates the metal-to-resist overlay between sequential IC levels, allows characterization of the technique sensitivity. The capacitance profile across identical size electrically isolated or grounded metal lines embedded in a dielectric was shown to be different. The floating line shows capacitance enhancement at the line edges, with a minimum at the line center. The grounded line shows a single capacitance maximum located at the line center, with no edge enhancement. For identical line dimensions, the capacitance is significantly larger for grounded lines making them easier to image. A nonlinear regression algorithm was developed to extract line center and overlay parameters with approximately 3 nm resolution at the 95% confidence level, showing the potential of this technique for sub-micrometer critical dimension metrology. Symmetric test

  4. Electropolymerized Star-Shaped Benzotrithiophenes Yield π-Conjugated Hierarchical Networks with High Areal Capacitance

    KAUST Repository

    Ringk, Andreas

    2016-03-30

    High-surface-area π-conjugated polymeric networks have the potential to lend outstanding capacitance to supercapacitors because of the pronounced faradaic processes that take place across the dense intimate interface between active material and electrolytes. In this report, we describe how benzo[1,2-b:3,4-b’:5,6-b’’]trithiophene (BTT) and tris-EDOT-benzo[1,2-b:3,4-b’:5,6-b’’]trithiophene (TEBTT) can serve as 2D (trivalent) building blocks in the development of electropolymerized hierarchical π-conjugated frameworks with particularly high areal capacitance. In comparing electropolymerized networks of BTT, TEBTT, and their copolymers with EDOT, we show that P(TEBTT/EDOT)-based frameworks can achieve higher areal capacitance (e.g., as high as 443.8 mF cm-2 at 1 mA cm-2) than those achieved by their respective homopolymers (PTEBTT and PEDOT) in the same experimental conditions of electrodeposition (PTEBTT: 271.1 mF cm-2 (at 1 mA cm-2) and PEDOT: 12.1 mF cm-2 (at 1 mA cm-2)). For example, P(TEBTT/EDOT)-based frameworks synthesized in a 1:1 monomer-to-comonomer ratio show a ca. 35x capacitance improvement over PEDOT. The high areal capacitance measured for P(TEBTT/EDOT) copolymers can be explained by the open, highly porous hierarchical morphologies formed during the electropolymerization step. With >70% capacitance retention over 1,000 cycles (up to 89% achieved), both PTEBTT- and P(TEBTT/EDOT)-based frameworks are resilient to repeated electrochemical cycling and can be considered promising systems for high life cycle capacitive electrode applications.

  5. Effect of pore packing defects in 2-d ordered mesoporous carbons on ionic transport.

    Science.gov (United States)

    Wang, Da-Wei; Li, Feng; Fang, Hai-Tao; Liu, Min; Lu, Gao-Qing; Cheng, Hui-Ming

    2006-05-04

    Ordered mesoporous materials show great importance in energy, environmental, and chemical engineering. The diffusion of guest species in mesoporous networks plays an important role in these applications, especially for energy storage, such as supercapacitors based on ordered mesoporous carbons (OMCs). The ion diffusion behavior in two different 2-D hexagonal OMCs was investigated by using cyclic voltametry and electrochemical impedance spectroscopy. In addition, transmission electron microscopy, small-angle X-ray diffraction, and nitrogen cryosorption methods were used to study the pore structure variations of these two OMCs. It was found that, for the OMC with defective pore channels (termed as pore packing defects), the gravimetric capacitance was greatly decayed when the voltage scan rate was increased. The experimental results suggest that, for the ion diffusion in 2-D hexagonal OMCs with similar mesopore size distribution, the pore packing defect is a dominant dynamic factor.

  6. Critical exponents of dynamical conductivity in 2D percolative superconductor-insulator transitions: three universality classes

    Science.gov (United States)

    Karki, Pragalv; Loh, Yen Lee

    2016-11-01

    We simulate three types of random inductor-capacitor (LC) networks on 6000× 6000 square lattices. We calculate the dynamical conductivity using an equation-of-motion method in which timestep error is eliminated and windowing error is minimized. We extract the critical exponent a such that σ ≤ft(ω \\right)\\propto {ω-a} at low frequencies. The results suggest that there are three different universality classes. The {{L}ij}{{C}i} model, with capacitances from each site to ground, has a  =  0.314(4). The {{L}ij}{{C}ij} model, with capacitances along bonds, has a  =  0. The {{L}ij}{{C}i}{{C}ij} model, with both types of capacitances, has a  =  0.304(1). This implies that classical percolative 2D superconductor-insulator transitions (SITs) generically have σ ≤ft(ω \\right)\\to ∞ as ω \\to 0 . Therefore, any experiments that give a constant conductivity as ω \\to 0 must be explained in terms of quantum effects.

  7. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  8. Microscopic View of Soil on a Micromachined Silicone Substrate

    Science.gov (United States)

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  9. Parametric studies on the nanosecond laser micromachining of the materials

    Science.gov (United States)

    Tański, M.; Mizeraczyk, J.

    2016-12-01

    In this paper the results of an experimental studies on nanosecond laser micromachining of selected materials are presented. Tested materials were thin plates made of aluminium, silicon, stainless steel (AISI 304) and copper. Micromachining of those materials was carried out using a solid state laser with second harmonic generation λ = 532 nm and a pulse width of τ = 45 ns. The effect of laser drilling using single laser pulse and a burst of laser pulses, as well as laser cutting was studied. The influence of laser fluence on the diameter and morphology of a post ablation holes drilled with a single laser pulse was investigated. The ablation fluence threshold (Fth) of tested materials was experimentally determined. Also the drilling rate (average depth per single laser pulse) of holes drilled with a burst of laser pulses was determined for all tested materials. The studies of laser cutting process revealed that a groove depth increases with increasing average laser power and decreasing cutting speed. It was also found that depth of the laser cut grooves is a linear function of number of repetition of a cut. The quantitative influence of those parameters on the groove depth was investigated.

  10. Laser Beam MicroMachining (LBMM) - A review

    Science.gov (United States)

    Mishra, Sanjay; Yadava, Vinod

    2015-10-01

    The use of short and ultrashort laser pulses for micromachining application is an emerging technology. Laser Beam MicroMachining (LBMM) has revolutionized many industries by providing innovative solutions in numerous industrial micro-engineering applications. High-intensity short or ultrashort laser pulses are powerful thermal energy source for creating micro-features in wide range of materials. These lasers can precisely ablate various types of materials with little or no collateral damage. An overview of LBMM is given so that we can obtain a current view of capabilities and tradeoffs associated with LBMM of sub-micron size. The fundamental understanding of ultrafast laser ablation process has been elucidated and the various research activities performed with nanosecond, picosecond and femtosecond, lasers have been discussed to understand the physical mechanisms and the critical experimental parameters involved in the LBMM. The critical analysis of various theoretical and experimental models used to describe the performance analysis of LBMM has been elaborated so that we can identify the relevant principles underlying the process.

  11. Micromachined array-type Mirau interferometer for MEMS metrology

    Science.gov (United States)

    Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U. D.

    We present the development of an array-type micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS. The system is a combination of free-space microoptical technologies and silicon micromachining, based on the vertical assembly of two glass wafers. The probing wafer is carrying an array of refractive microlenses, diffractive gratings to correct chromatic and spherical aberrations and reference micro-mirrors. The semitransparent beam splitter plate is based on the deposition of a dielectric multilayer, sandwiched between two glass wafers. The interferometer matrix is the key element of a novel inspection system aimed to perform parallel inspection of MEMS. The fabricated demonstrator, including 5x5 channels, allows consequently decreasing the measurement time by a factor of 25. In the following, the details of fabrication processes of the micro-optical components and their assembly are described. The feasibility of the LCI is demonstrated for the measurement of a wafer of MEMS sensors.

  12. Application of 2D Non-Graphene Materials and 2D Oxide Nanostructures for Biosensing Technology.

    Science.gov (United States)

    Shavanova, Kateryna; Bakakina, Yulia; Burkova, Inna; Shtepliuk, Ivan; Viter, Roman; Ubelis, Arnolds; Beni, Valerio; Starodub, Nickolaj; Yakimova, Rositsa; Khranovskyy, Volodymyr

    2016-02-06

    The discovery of graphene and its unique properties has inspired researchers to try to invent other two-dimensional (2D) materials. After considerable research effort, a distinct "beyond graphene" domain has been established, comprising the library of non-graphene 2D materials. It is significant that some 2D non-graphene materials possess solid advantages over their predecessor, such as having a direct band gap, and therefore are highly promising for a number of applications. These applications are not limited to nano- and opto-electronics, but have a strong potential in biosensing technologies, as one example. However, since most of the 2D non-graphene materials have been newly discovered, most of the research efforts are concentrated on material synthesis and the investigation of the properties of the material. Applications of 2D non-graphene materials are still at the embryonic stage, and the integration of 2D non-graphene materials into devices is scarcely reported. However, in recent years, numerous reports have blossomed about 2D material-based biosensors, evidencing the growing potential of 2D non-graphene materials for biosensing applications. This review highlights the recent progress in research on the potential of using 2D non-graphene materials and similar oxide nanostructures for different types of biosensors (optical and electrochemical). A wide range of biological targets, such as glucose, dopamine, cortisol, DNA, IgG, bisphenol, ascorbic acid, cytochrome and estradiol, has been reported to be successfully detected by biosensors with transducers made of 2D non-graphene materials.

  13. Application of 2D Non-Graphene Materials and 2D Oxide Nanostructures for Biosensing Technology

    Directory of Open Access Journals (Sweden)

    Kateryna Shavanova

    2016-02-01

    Full Text Available The discovery of graphene and its unique properties has inspired researchers to try to invent other two-dimensional (2D materials. After considerable research effort, a distinct “beyond graphene” domain has been established, comprising the library of non-graphene 2D materials. It is significant that some 2D non-graphene materials possess solid advantages over their predecessor, such as having a direct band gap, and therefore are highly promising for a number of applications. These applications are not limited to nano- and opto-electronics, but have a strong potential in biosensing technologies, as one example. However, since most of the 2D non-graphene materials have been newly discovered, most of the research efforts are concentrated on material synthesis and the investigation of the properties of the material. Applications of 2D non-graphene materials are still at the embryonic stage, and the integration of 2D non-graphene materials into devices is scarcely reported. However, in recent years, numerous reports have blossomed about 2D material-based biosensors, evidencing the growing potential of 2D non-graphene materials for biosensing applications. This review highlights the recent progress in research on the potential of using 2D non-graphene materials and similar oxide nanostructures for different types of biosensors (optical and electrochemical. A wide range of biological targets, such as glucose, dopamine, cortisol, DNA, IgG, bisphenol, ascorbic acid, cytochrome and estradiol, has been reported to be successfully detected by biosensors with transducers made of 2D non-graphene materials.

  14. Interaction phenomena in graphene seen through quantum capacitance.

    Science.gov (United States)

    Yu, G L; Jalil, R; Belle, Branson; Mayorov, Alexander S; Blake, Peter; Schedin, Frederick; Morozov, Sergey V; Ponomarenko, Leonid A; Chiappini, F; Wiedmann, S; Zeitler, Uli; Katsnelson, Mikhail I; Geim, A K; Novoselov, Kostya S; Elias, Daniel C

    2013-02-26

    Capacitance measurements provide a powerful means of probing the density of states. The technique has proved particularly successful in studying 2D electron systems, revealing a number of interesting many-body effects. Here, we use large-area high-quality graphene capacitors to study behavior of the density of states in this material in zero and high magnetic fields. Clear renormalization of the linear spectrum due to electron-electron interactions is observed in zero field. Quantizing fields lead to splitting of the spin- and valley-degenerate Landau levels into quartets separated by interaction-enhanced energy gaps. These many-body states exhibit negative compressibility but the compressibility returns to positive in ultrahigh B. The reentrant behavior is attributed to a competition between field-enhanced interactions and nascent fractional states.

  15. Sperm capacitation in the porcine oviduct.

    Science.gov (United States)

    Tienthai, P; Johannisson, A; Rodriguez-Martinez, H

    2004-01-01

    In vitro studies suggests that sperm capacitation occurs in the sperm reservoir (SR) of the pig, with spermatozoa progressing towards the ampullary-isthmic junction (AIJ) around ovulation as a consequence of capacitation/hyperactivation. In contrast, in vivo studies are scarce. Consequently, we determined the degree of capacitation in boar spermatozoa that were retrieved from the SR of sows at well-defined periods of spontaneous standing oestrus, namely pre-, peri- and post-ovulation, using flow cytometry of Merocyanine-540/Yo-Pro-1-loaded spermatozoa. SR-spermatozoa retrieved and incubated in non-capacitating medium (bicarbonate-free mBO [mBO-]) were largely viable (70-85%) and uncapacitated (69-73%), irrespective of the stage of oestrus considered. Those undergoing capacitation were a minor proportion (1-5%) during pre- and peri-ovulation, but they significantly increased (14%) in post-ovulation oestrus. To clarify whether these SR-spermatozoa were able to undergo capacitation under stimuli, sperm aliquots were challenged in vitro either by incubation in a bicarbonate-rich medium (capacitation medium, mBO+), then further in mBO+ with 20% (v/v) of in vivo collected homologous pre-ovulatory isthmic oviductal fluid (IOF), or incubation with hyaluronan (HA, 500 microg/ml). Exposure to mBO+ significantly increased the sub-population of capacitated spermatozoa from the pre- and peri-ovulation SR, indicating that the uncapacitated SR-spermatozoa were responsive to the effector/inducer bicarbonate at levels recorded in peri-ovulatory AIJ/ampulla in vivo. While addition of IOF or HA to SR-spermatozoa incubated in capacitating medium (mBO+) maintained sperm viability without obviously inducing capacitation in pre- or peri-ovulatory SR-spermatozoa, they significantly increased these percentages during post-ovulation, when compared to baseline values of control incubations (mBO-). The results suggest that massive sperm capacitation does not occur in vivo in the porcine SR

  16. Reducing the capacitance of piezoelectric film sensors

    Energy Technology Data Exchange (ETDEWEB)

    González, Martín G., E-mail: mggonza@fi.uba.ar [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina); Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), C1425FQB Buenos Aires (Argentina); Sorichetti, Patricio A.; Santiago, Guillermo D. [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina)

    2016-04-15

    We present a novel design for large area, wideband, polymer piezoelectric sensor with low capacitance. The large area allows better spatial resolution in applications such as photoacoustic tomography and the reduced capacitance eases the design of fast transimpedance amplifiers. The metalized piezoelectric polymer thin film is segmented into N sections, electrically connected in series. In this way, the total capacitance is reduced by a factor 1/N{sup 2}, whereas the mechanical response and the active area of the sensor are not modified. We show the construction details for a two-section sensor, together with the impedance spectroscopy and impulse response experimental results that validate the design.

  17. Detection of 2D phase transitions at the electrode/electrolyte interface using electrochemical impedance spectroscopy

    Science.gov (United States)

    Tymoczko, Jakub; Colic, Viktor; Bandarenka, Aliaksandr S.; Schuhmann, Wolfgang

    2015-01-01

    The capacitance of the electric double layer, CDL, formed at the electrode/electrolyte interface is generally determined by electrochemical impedance spectroscopy (EIS). However, CDL values obtained using EIS data often depend on the ac frequency of the potential perturbation used in EIS. The reasons for the observed frequency dispersions can be various, and hence extracting valuable information about the status of the electrified interface is not possible with the required certainty. In this work, using well-understood electrochemical systems, namely Pt(111) electrodes in contact with a series of acidic sulfate ions containing electrolytes, we provide strong evidence that 2D phase transitions in the adsorbate layers and, in general, structural effects at the electrode/electrolyte interface are in many cases responsible for the frequency dispersion of the double layer capacitance. These empirical findings open new opportunities for the detection and evaluation of 2D phase transition processes and other structural effects using EIS, even in presence of simultaneously occurring electrochemical processes. However, further theoretical elaboration of this effect is necessary.

  18. Schottky diodes from 2D germanane

    Science.gov (United States)

    Sahoo, Nanda Gopal; Esteves, Richard J.; Punetha, Vinay Deep; Pestov, Dmitry; Arachchige, Indika U.; McLeskey, James T.

    2016-07-01

    We report on the fabrication and characterization of a Schottky diode made using 2D germanane (hydrogenated germanene). When compared to germanium, the 2D structure has higher electron mobility, an optimal band-gap, and exceptional stability making germanane an outstanding candidate for a variety of opto-electronic devices. One-atom-thick sheets of hydrogenated puckered germanium atoms have been synthesized from a CaGe2 framework via intercalation and characterized by XRD, Raman, and FTIR techniques. The material was then used to fabricate Schottky diodes by suspending the germanane in benzonitrile and drop-casting it onto interdigitated metal electrodes. The devices demonstrate significant rectifying behavior and the outstanding potential of this material.

  19. Schottky diodes from 2D germanane

    Energy Technology Data Exchange (ETDEWEB)

    Sahoo, Nanda Gopal; Punetha, Vinay Deep [Nanoscience and Nanotechnology Centre, Department of Chemistry, Kumaun University, Nainital, 263001 Uttarakhand (India); Esteves, Richard J; Arachchige, Indika U. [Department of Chemistry, Virginia Commonwealth University, Richmond, Virginia 23284 (United States); Pestov, Dmitry [Nanomaterials Core Characterization Center, Virginia Commonwealth University, Richmond, Virginia 23284 (United States); McLeskey, James T., E-mail: JamesMcLeskey@rmc.edu [Department of Physics, Randolph-Macon College, Ashland, Virginia 23005 (United States)

    2016-07-11

    We report on the fabrication and characterization of a Schottky diode made using 2D germanane (hydrogenated germanene). When compared to germanium, the 2D structure has higher electron mobility, an optimal band-gap, and exceptional stability making germanane an outstanding candidate for a variety of opto-electronic devices. One-atom-thick sheets of hydrogenated puckered germanium atoms have been synthesized from a CaGe{sub 2} framework via intercalation and characterized by XRD, Raman, and FTIR techniques. The material was then used to fabricate Schottky diodes by suspending the germanane in benzonitrile and drop-casting it onto interdigitated metal electrodes. The devices demonstrate significant rectifying behavior and the outstanding potential of this material.

  20. 2D Metals by Repeated Size Reduction.

    Science.gov (United States)

    Liu, Hanwen; Tang, Hao; Fang, Minghao; Si, Wenjie; Zhang, Qinghua; Huang, Zhaohui; Gu, Lin; Pan, Wei; Yao, Jie; Nan, Cewen; Wu, Hui

    2016-10-01

    A general and convenient strategy for manufacturing freestanding metal nanolayers is developed on large scale. By the simple process of repeatedly folding and calendering stacked metal sheets followed by chemical etching, free-standing 2D metal (e.g., Ag, Au, Fe, Cu, and Ni) nanosheets are obtained with thicknesses as small as 1 nm and with sizes of the order of several micrometers.

  1. 2dF mechanical engineering

    Science.gov (United States)

    Smith, Greg; Lankshear, Allan

    1998-07-01

    2dF is a multi-object instrument mounted at prime focus at the AAT capable of spectroscopic analysis of 400 objects in a single 2 degree field. It also prepares a second 2 degree 400 object field while the first field is being observed. At its heart is a high precision robotic positioner that places individual fiber end magnetic buttons on one of two field plates. The button gripper is carried on orthogonal gantries powered by linear synchronous motors and contains a TV camera which precisely locates backlit buttons to allow placement in user defined locations to 10 (mu) accuracy. Fiducial points on both plates can also be observed by the camera to allow repeated checks on positioning accuracy. Field plates rotate to follow apparent sky rotation. The spectrographs both analyze light from the 200 observing fibers each and back- illuminate the 400 fibers being re-positioned during the observing run. The 2dF fiber position and spectrograph system is a large and complex instrument located at the prime focus of the Anglo Australian Telescope. The mechanical design has departed somewhat from the earlier concepts of Gray et al, but still reflects the audacity of those first ideas. The positioner is capable of positioning 400 fibers on a field plate while another 400 fibers on another plate are observing at the focus of the telescope and feeding the twin spectrographs. When first proposed it must have seemed like ingenuity unfettered by caution. Yet now it works, and works wonderfully well. 2dF is a system which functions as the result of the combined and coordinated efforts of the astronomers, the mechanical designers and tradespeople, the electronic designers, the programmers, the support staff at the telescope, and the manufacturing subcontractors. The mechanical design of the 2dF positioner and spectrographs was carried out by the mechanical engineering staff of the AAO and the majority of the manufacture was carried out in the AAO workshops.

  2. 2D-Tasks for Cognitive Rehabilitation

    OpenAIRE

    Caballero Hernandez, Ruth; Martinez Moreno, Jose Maria; García Molina, A.; Ferrer Celma, S.; Solana Sánchez, Javier; Sanchez Carrion, R.; Fernandez Casado, E.; Pérez Rodríguez, Rodrigo; Gomez Pulido, A.; Anglès Tafalla, C.; Cáceres Taladriz, César; Ferre Vergada, M.; Roig Rovira, Teresa; Garcia Lopez, P.; Tormos Muñoz, Josep M.

    2011-01-01

    Neuropsychological Rehabilitation is a complex clinic process which tries to restore or compensate cognitive and behavioral disorders in people suffering from a central nervous system injury. Information and Communication Technologies (ICTs) in Biomedical Engineering play an essential role in this field, allowing improvement and expansion of present rehabilitation programs. This paper presents a set of cognitive rehabilitation 2D-Tasks for patients with Acquired Brain Injury (ABI). These t...

  3. Quasiparticle interference in unconventional 2D systems

    Science.gov (United States)

    Chen, Lan; Cheng, Peng; Wu, Kehui

    2017-03-01

    At present, research of 2D systems mainly focuses on two kinds of materials: graphene-like materials and transition-metal dichalcogenides (TMDs). Both of them host unconventional 2D electronic properties: pseudospin and the associated chirality of electrons in graphene-like materials, and spin-valley-coupled electronic structures in the TMDs. These exotic electronic properties have attracted tremendous interest for possible applications in nanodevices in the future. Investigation on the quasiparticle interference (QPI) in 2D systems is an effective way to uncover these properties. In this review, we will begin with a brief introduction to 2D systems, including their atomic structures and electronic bands. Then, we will discuss the formation of Friedel oscillation due to QPI in constant energy contours of electron bands, and show the basic concept of Fourier-transform scanning tunneling microscopy/spectroscopy (FT-STM/STS), which can resolve Friedel oscillation patterns in real space and consequently obtain the QPI patterns in reciprocal space. In the next two parts, we will summarize some pivotal results in the investigation of QPI in graphene and silicene, in which systems the low-energy quasiparticles are described by the massless Dirac equation. The FT-STM experiments show there are two different interference channels (intervalley and intravalley scattering) and backscattering suppression, which associate with the Dirac cones and the chirality of quasiparticles. The monolayer and bilayer graphene on different substrates (SiC and metal surfaces), and the monolayer and multilayer silicene on a Ag(1 1 1) surface will be addressed. The fifth part will introduce the FT-STM research on QPI in TMDs (monolayer and bilayer of WSe2), which allow us to infer the spin texture of both conduction and valence bands, and present spin-valley coupling by tracking allowed and forbidden scattering channels.

  4. 100% foundry compatible packaging and full wafer release and die separation technique for surface micromachined devices

    Energy Technology Data Exchange (ETDEWEB)

    OLIVER,ANDREW D.; MATZKE,CAROLYN M.

    2000-04-06

    A completely foundry compatible chip-scale package for surface micromachines has been successfully demonstrated. A pyrex (Corning 7740) glass cover is placed over the released surface micromachined die and anodically bonded to a planarized polysilicon bonding ring. Electrical feedthroughs for the surface micromachine pass underneath the polysilicon sealing ring. The package has been found to be hermetic with a leak rate of less than 5 x 10{sup {minus}8} atm cm{sup {minus}3}/s. This technology has applications in the areas of hermetic encapsulation and wafer level release and die separation.

  5. Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting

    Science.gov (United States)

    Shimizu, Y.; Van Minh, L.; Kitayoshi, H.; Kuwano, H.

    2016-11-01

    This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.

  6. Engineering light outcoupling in 2D materials

    KAUST Repository

    Lien, Derhsien

    2015-02-11

    When light is incident on 2D transition metal dichalcogenides (TMDCs), it engages in multiple reflections within underlying substrates, producing interferences that lead to enhancement or attenuation of the incoming and outgoing strength of light. Here, we report a simple method to engineer the light outcoupling in semiconducting TMDCs by modulating their dielectric surroundings. We show that by modulating the thicknesses of underlying substrates and capping layers, the interference caused by substrate can significantly enhance the light absorption and emission of WSe2, resulting in a ∼11 times increase in Raman signal and a ∼30 times increase in the photoluminescence (PL) intensity of WSe2. On the basis of the interference model, we also propose a strategy to control the photonic and optoelectronic properties of thin-layer WSe2. This work demonstrates the utilization of outcoupling engineering in 2D materials and offers a new route toward the realization of novel optoelectronic devices, such as 2D LEDs and solar cells.

  7. Irreversibility-inversions in 2D turbulence

    Science.gov (United States)

    Bragg, Andrew; de Lillo, Filippo; Boffetta, Guido

    2016-11-01

    We consider a recent theoretical prediction that for inertial particles in 2D turbulence, the nature of the irreversibility of their pair dispersion inverts when the particle inertia exceeds a certain value. In particular, when the particle Stokes number, St , is below a certain value, the forward-in-time (FIT) dispersion should be faster than the backward-in-time (BIT) dispersion, but for St above this value, this should invert so that BIT becomes faster than FIT dispersion. This non-trivial behavior arises because of the competition between two physically distinct irreversibility mechanisms that operate in different regimes of St . In 3D turbulence, both mechanisms act to produce faster BIT than FIT dispersion, but in 2D, the two mechanisms have opposite effects because of the inverse energy cascade in the turbulent velocity field. We supplement the qualitative argument given by Bragg et al. by deriving quantitative predictions of this effect in the short-time dispersion limit. These predictions are then confirmed by results of inertial particle dispersion in a direct numerical simulation of 2D turbulence.

  8. Effect of surface asperities on the capacitances of capacitive RF MEMS switches

    Science.gov (United States)

    Chen, Zhiqiang; Tian, Wenchao; Zhang, Xiaotong

    2017-03-01

    The effects of surface asperities on the up- and down-state capacitances of the capacitive radio frequency (RF) micro electromechanical system (MEMS) switches were studied in this paper based on the single asperity model and statics. The research results demonstrated that surface asperities effects on the up-state capacitance could be neglected, whereas surface asperities must be taken into consideration at the down-state position in the RF MEMS switches because the surface asperities significantly affected the down-state capacitance. The down-state capacitance typically decreased as the root mean square (RMS) roughness and asperity radius increased. The down-state capacitance was approximately 26% of the theoretical value when the RMS roughness was 20 nm, and 32% of the theoretical value when the asperity radius was 100 nm. The experimental results were in good agreement with the simulation results.

  9. 2D superconductivity by ionic gating

    Science.gov (United States)

    Iwasa, Yoshi

    2D superconductivity is attracting a renewed interest due to the discoveries of new highly crystalline 2D superconductors in the past decade. Superconductivity at the oxide interfaces triggered by LaAlO3/SrTiO3 has become one of the promising routes for creation of new 2D superconductors. Also, the MBE grown metallic monolayers including FeSe are also offering a new platform of 2D superconductors. In the last two years, there appear a variety of monolayer/bilayer superconductors fabricated by CVD or mechanical exfoliation. Among these, electric field induced superconductivity by electric double layer transistor (EDLT) is a unique platform of 2D superconductivity, because of its ability of high density charge accumulation, and also because of the versatility in terms of materials, stemming from oxides to organics and layered chalcogenides. In this presentation, the following issues of electric filed induced superconductivity will be addressed; (1) Tunable carrier density, (2) Weak pinning, (3) Absence of inversion symmetry. (1) Since the sheet carrier density is quasi-continuously tunable from 0 to the order of 1014 cm-2, one is able to establish an electronic phase diagram of superconductivity, which will be compared with that of bulk superconductors. (2) The thickness of superconductivity can be estimated as 2 - 10 nm, dependent on materials, and is much smaller than the in-plane coherence length. Such a thin but low resistance at normal state results in extremely weak pinning beyond the dirty Boson model in the amorphous metallic films. (3) Due to the electric filed, the inversion symmetry is inherently broken in EDLT. This feature appears in the enhancement of Pauli limit of the upper critical field for the in-plane magnetic fields. In transition metal dichalcogenide with a substantial spin-orbit interactions, we were able to confirm the stabilization of Cooper pair due to its spin-valley locking. This work has been supported by Grant-in-Aid for Specially

  10. Complementary surface charge for enhanced capacitive deionization

    NARCIS (Netherlands)

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI cel

  11. Capacitive Cells for Dielectric Constant Measurement

    Science.gov (United States)

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  12. Capacitive Cells for Dielectric Constant Measurement

    Science.gov (United States)

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  13. 2-D Prony-Huang Transform: A New Tool for 2-D Spectral Analysis

    CERN Document Server

    Schmitt, Jérémy; Borgnat, Pierre; Flandrin, Patrick; Condat, Laurent

    2014-01-01

    This work proposes an extension of the 1-D Hilbert Huang transform for the analysis of images. The proposed method consists in (i) adaptively decomposing an image into oscillating parts called intrinsic mode functions (IMFs) using a mode decomposition procedure, and (ii) providing a local spectral analysis of the obtained IMFs in order to get the local amplitudes, frequencies, and orientations. For the decomposition step, we propose two robust 2-D mode decompositions based on non-smooth convex optimization: a "Genuine 2-D" approach, that constrains the local extrema of the IMFs, and a "Pseudo 2-D" approach, which constrains separately the extrema of lines, columns, and diagonals. The spectral analysis step is based on Prony annihilation property that is applied on small square patches of the IMFs. The resulting 2-D Prony-Huang transform is validated on simulated and real data.

  14. GBL-2D Version 1.0: a 2D geometry boolean library.

    Energy Technology Data Exchange (ETDEWEB)

    McBride, Cory L. (Elemental Technologies, American Fort, UT); Schmidt, Rodney Cannon; Yarberry, Victor R.; Meyers, Ray J. (Elemental Technologies, American Fort, UT)

    2006-11-01

    This report describes version 1.0 of GBL-2D, a geometric Boolean library for 2D objects. The library is written in C++ and consists of a set of classes and routines. The classes primarily represent geometric data and relationships. Classes are provided for 2D points, lines, arcs, edge uses, loops, surfaces and mask sets. The routines contain algorithms for geometric Boolean operations and utility functions. Routines are provided that incorporate the Boolean operations: Union(OR), XOR, Intersection and Difference. A variety of additional analytical geometry routines and routines for importing and exporting the data in various file formats are also provided. The GBL-2D library was originally developed as a geometric modeling engine for use with a separate software tool, called SummitView [1], that manipulates the 2D mask sets created by designers of Micro-Electro-Mechanical Systems (MEMS). However, many other practical applications for this type of software can be envisioned because the need to perform 2D Boolean operations can arise in many contexts.

  15. Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Smith, J. H.; Sniegowski, J. J.

    1998-10-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  16. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  17. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  18. Micromachined high-performance RF passives in CMOS substrate

    Science.gov (United States)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-11-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications.

  19. A Micro-Machined Gyroscope for Rotating Aircraft

    Science.gov (United States)

    Yan, Qingwen; Zhang, Fuxue; Zhang, Wei

    2012-01-01

    In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h. PMID:23012572

  20. Dynamical modeling and characterization of a surface micromachined microengine

    Energy Technology Data Exchange (ETDEWEB)

    Miller, S.L.; Sniegowski, J.J.; LaVigne, G.L.; McWhorter, P.J.

    1996-01-01

    The practical implementation of the surface micromachined microengine [1,2] to perform useful microactuation tasks requires a thorough understanding of the dynamics of the engine. This understanding is necessary in order to create appropriate drive signals, and to experimentally measure fundamental quantities associated with the engine system. We have developed and applied a dynamical model of the microengine and used it to accomplish three objectives: (1) drive inertial loads in a controlled fashion, i.e. specify and achieve a desired time dependent angular position of the output gear,( 2) minimize stress and frictional forces during operation, and (3) as a function of time, experimentally determine forces associated with the output gear, such as the load torque being applied to the output gear due to friction.

  1. A silicon micromachined piezoresistive accelerometer for health and condition monitoring

    Science.gov (United States)

    Walsh, Kevin M.; Henderson, H. Thurman

    1990-01-01

    Silicon micromachining etching techniques were utilized to batch-fabricate hundreds of general purpose microaccelerometers on a single silicon substrate. Piezoresistive sensing elements were aligned to the back-side patterns using an IR mask aligner and then diffused into the areas of maximum stress. Capping of the two-arm cantilever beam structure was achieved using a combination of electrostatic bonding and low temperature glass films. Overrange protection, critical damping, and overall protection from the outside environment are achieved by controlling the cavity depths of the top and bottom covers. Temperature compensation, amplification, and filtering are performed by a companion LSI chip that is interfaced to the accelerometer by conventional wire-bonding techniques.

  2. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer.

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-08-13

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  3. Micromachined hot-wire thermal conductivity probe for biomedical applications.

    Science.gov (United States)

    Yi, Ming; Panchawagh, Hrishikesh V; Podhajsky, Ronald J; Mahajan, Roop L

    2009-10-01

    This paper presents the design, fabrication, numerical simulation, and experimental validation of a micromachined probe that measures thermal conductivity of biological tissues. The probe consists of a pair of resistive line heating elements and resistance temperature detector sensors, which were fabricated by using planar photolithography on a glass substrate. The numerical analysis revealed that the thermal conductivity and diffusivity can be determined by the temperature response induced by the uniform heat flux in the heating elements. After calibrating the probe using a material (agar gel) of known thermal conductivity, the probe was deployed to calculate the thermal conductivity of Crisco. The measured value is in agreement with that determined by the macro-hot-wire probe method to within 3%. Finally, the micro thermal probe was used to investigate the change of thermal conductivity of pig liver before and after RF ablation treatment. The results show an increase in thermal conductivity of liver after the RF ablation.

  4. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  5. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  6. Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy

    Science.gov (United States)

    Merrell, Willie C., II; Aslam, Shahid; Brown, Ari D.; Chervenak, James A.; Huang, Wei-Chung; Quijada, Manuel; Wollack, Edward

    2011-01-01

    The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.

  7. Extrinsic curvature induced 2-d gravity

    CERN Document Server

    Viswanathan, K S

    1993-01-01

    Abtract: 2-dimensional fermions are coupled to extrinsic geometry of a conformally immersed surface in ${\\bf R}^3$ through gauge coupling. By integrating out the fermions, we obtain a WZNW action involving extrinsic curvature of the surface. Restricting the resulting effective action to surfaces of $h\\sqrt g=1$, an explicit form of the action invariant under Virasaro symmetry is obtained. This action is a sum of the geometric action for the Virasaro group and the light-cone action of 2-d gravity plus an interaction term. The central charges of the theory in both the left and right sectors are calculated.

  8. Instant HTMl5 2D platformer

    CERN Document Server

    Temple, Aidan

    2013-01-01

    Filled with practical, step-by-step instructions and clear explanations for the most important and useful tasks. The step-by-step approach taken by this book will show you how to develop a 2D HTML5 platformer-based game that you will be able to publish to multiple devices.This book is great for anyone who has an interest in HTML5 games development, and who already has a basic to intermediate grasp on both the HTML markup and JavaScript programming languages. Therefore, due to this requirement, the book will not discuss the inner workings of either of these languages but will instead attempt to

  9. Robust and resistant 2D shape alignment

    DEFF Research Database (Denmark)

    Larsen, Rasmus; Eiriksson, Hrafnkell

    2001-01-01

    \\_\\$\\backslash\\$infty\\$ norm alignments are formulated as linear programming problems. The linear vector function formulation along with the different norms results in alignment methods that are both resistant from influence from outliers, robust wrt. errors in the annotation and capable of handling missing datapoints......We express the alignment of 2D shapes as the minimization of the norm of a linear vector function. The minimization is done in the \\$l\\_1\\$, \\$l\\_2\\$ and the \\$l\\_\\$\\backslash\\$infty\\$ norms using well known standard numerical methods. In particular, the \\$l\\_1\\$ and the \\$l...

  10. Another solution of 2D Ising model

    Science.gov (United States)

    Vergeles, S. N.

    2009-04-01

    The partition function of the Ising model on a two-dimensional regular lattice is calculated by using the matrix representation of a Clifford algebra (the Dirac algebra), with number of generators equal to the number of lattice sites. It is shown that the partition function over all loops in a 2D lattice including self-intersecting ones is the trace of a polynomial in terms of Dirac matrices. The polynomial is an element of the rotation group in the spinor representation. Thus, the partition function is a function of a character on an orthogonal group of a high degree in the spinor representation.

  11. Target tracking using a 2D radar

    CSIR Research Space (South Africa)

    Kriel, M

    2012-08-01

    Full Text Available is omitted. This can be an important consideration as aircraft altitude limits the attack pro�les a target can��y [1]. 33.2 HEIGHT ESTIMATION The current literature regarding height estimation restricts itself to computations involving two or more 2D... is instrumental in determining the aircraft altitude. The accuracy to which these speeds are known is directly pro- portional to the accuracy to which the altitude can be determined. Knowledge of aircraft speed can be obtained in a variety of ways. For example...

  12. Scanning Capacitance Force Microscopy and Kelvin Probe Force Microscopy of Nanostructures Embedded in SiO2

    Science.gov (United States)

    Tallarida, G.; Spiga, S.; Fanciulli, M.

    Scanning capacitance force microscopy and Kelvin probe force microscopy are used to image Sn nanometer sized structures embedded in silicon oxide thin films. The capacitance variation occurring between probe and sample in presence of a metallic cluster modifies the oscillation amplitude of the AFM probe at twice the frequency of the applied voltage. The extreme localisation of the interaction due to the small geometries involved allows a lateral resolution of few nm. Issues related to the contrast mechanism and the spatial resolution are discussed with the support 2D finite element calculation of the electrostatic field distribution between probe and sample.

  13. Characterization of a new class of surface micromachined pumps.

    Energy Technology Data Exchange (ETDEWEB)

    Galambos, Paul C.

    2004-12-01

    This is the latest in a series of LDRD's that we have been conducting with Florida State University/Florida A&M University (FSU/FAMU) under the campus executive program. This research builds on the earlier projects; ''Development of Highly Integrated Magnetically and Electrostatically Actuated Micropumps'' (SAND2003-4674) and ''Development of Magnetically and Electrostatically Driven Surface Micromachined Pumps'' (SAND2002-0704P). In this year's LDRD we designed 2nd generation of surface micromachined (SMM) gear and viscous pumps. Two SUMMiT{trademark} modules full of design variations of these pumps were fabricated and one SwIFT{trademark} module is still in fabrication. The SwIFT{trademark} fabrication process results in a transparent pump housing cover that will enable visualization inside the pumps. Since the SwIFT{trademark} pumps have not been tested as they are still in fabrication, this report will focus on the 2nd generation SUMMiT{trademark} designs. Pump testing (pressure vs. flow) was conducted on several of the SUMMiT{trademark} designs resulting in the first pump curve for this class of SMM pumps. A pump curve was generated for the higher torque 2nd generation gear pump designed by Jason Hendrix of FSU. The pump maximum flow rate at zero head was 6.5 nl/s for a 30V, 30 Hz square wave signal. This level of flow rate would be more than adequate for our typical SMM SUMMiT{trademark} or SwIFT{trademark} channels which have typical volumes on the order of 50 pl.

  14. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  15. 3-D Vector Flow Using a Row-Column Addressed CMUT Array

    DEFF Research Database (Denmark)

    Holbek, Simon; Christiansen, Thomas Lehrmann; Engholm, Mathias;

    2016-01-01

    This paper presents an in-house developed 2-D capacitive micromachined ultrasonic transducer (CMUT) appliedfor 3-D blood flow estimation. The probe breaks with conventional transducers in two ways; first, the ultrasonicpressure field is generated from thousands of small vibrating micromachined...

  16. Remarks on thermalization in 2D CFT

    Science.gov (United States)

    de Boer, Jan; Engelhardt, Dalit

    2016-12-01

    We revisit certain aspects of thermalization in 2D conformal field theory (CFT). In particular, we consider similarities and differences between the time dependence of correlation functions in various states in rational and non-rational CFTs. We also consider the distinction between global and local thermalization and explain how states obtained by acting with a diffeomorphism on the ground state can appear locally thermal, and we review why the time-dependent expectation value of the energy-momentum tensor is generally a poor diagnostic of global thermalization. Since all 2D CFTs have an infinite set of commuting conserved charges, generic initial states might be expected to give rise to a generalized Gibbs ensemble rather than a pure thermal ensemble at late times. We construct the holographic dual of the generalized Gibbs ensemble and show that, to leading order, it is still described by a Banados-Teitelboim-Zanelli black hole. The extra conserved charges, while rendering c <1 theories essentially integrable, therefore seem to have little effect on large-c conformal field theories.

  17. Gas sensing in 2D materials

    Science.gov (United States)

    Yang, Shengxue; Jiang, Chengbao; Wei, Su-huai

    2017-06-01

    Two-dimensional (2D) layered inorganic nanomaterials have attracted huge attention due to their unique electronic structures, as well as extraordinary physical and chemical properties for use in electronics, optoelectronics, spintronics, catalysts, energy generation and storage, and chemical sensors. Graphene and related layered inorganic analogues have shown great potential for gas-sensing applications because of their large specific surface areas and strong surface activities. This review aims to discuss the latest advancements in the 2D layered inorganic materials for gas sensors. We first elaborate the gas-sensing mechanisms and introduce various types of gas-sensing devices. Then, we describe the basic parameters and influence factors of the gas sensors to further enhance their performance. Moreover, we systematically present the current gas-sensing applications based on graphene, graphene oxide (GO), reduced graphene oxide (rGO), functionalized GO or rGO, transition metal dichalcogenides, layered III-VI semiconductors, layered metal oxides, phosphorene, hexagonal boron nitride, etc. Finally, we conclude the future prospects of these layered inorganic materials in gas-sensing applications.

  18. Comments on Thermalization in 2D CFT

    CERN Document Server

    de Boer, Jan

    2016-01-01

    We revisit certain aspects of thermalization in 2D CFT. In particular, we consider similarities and differences between the time dependence of correlation functions in various states in rational and non-rational CFTs. We also consider the distinction between global and local thermalization and explain how states obtained by acting with a diffeomorphism on the ground state can appear locally thermal, and we review why the time-dependent expectation value of the energy-momentum tensor is generally a poor diagnostic of global thermalization. Since all 2D CFTs have an infinite set of commuting conserved charges, generic initial states might be expected to give rise to a generalized Gibbs ensemble rather than a pure thermal ensemble at late times. We construct the holographic dual of the generalized Gibbs ensemble and show that, to leading order, it is still described by a BTZ black hole. The extra conserved charges, while rendering $c < 1$ theories essentially integrable, therefore seem to have little effect o...

  19. WFR-2D: an analytical model for PWAS-generated 2D ultrasonic guided wave propagation

    Science.gov (United States)

    Shen, Yanfeng; Giurgiutiu, Victor

    2014-03-01

    This paper presents WaveFormRevealer 2-D (WFR-2D), an analytical predictive tool for the simulation of 2-D ultrasonic guided wave propagation and interaction with damage. The design of structural health monitoring (SHM) systems and self-aware smart structures requires the exploration of a wide range of parameters to achieve best detection and quantification of certain types of damage. Such need for parameter exploration on sensor dimension, location, guided wave characteristics (mode type, frequency, wavelength, etc.) can be best satisfied with analytical models which are fast and efficient. The analytical model was constructed based on the exact 2-D Lamb wave solution using Bessel and Hankel functions. Damage effects were inserted in the model by considering the damage as a secondary wave source with complex-valued directivity scattering coefficients containing both amplitude and phase information from wave-damage interaction. The analytical procedure was coded with MATLAB, and a predictive simulation tool called WaveFormRevealer 2-D was developed. The wave-damage interaction coefficients (WDICs) were extracted from harmonic analysis of local finite element model (FEM) with artificial non-reflective boundaries (NRB). The WFR-2D analytical simulation results were compared and verified with full scale multiphysics finite element models and experiments with scanning laser vibrometer. First, Lamb wave propagation in a pristine aluminum plate was simulated with WFR-2D, compared with finite element results, and verified by experiments. Then, an inhomogeneity was machined into the plate to represent damage. Analytical modeling was carried out, and verified by finite element simulation and experiments. This paper finishes with conclusions and suggestions for future work.

  20. Integrated circuits for volumetric ultrasound imaging with 2-D CMUT arrays.

    Science.gov (United States)

    Bhuyan, Anshuman; Choe, Jung Woo; Lee, Byung Chul; Wygant, Ira O; Nikoozadeh, Amin; Oralkan, Ömer; Khuri-Yakub, Butrus T

    2013-12-01

    Real-time volumetric ultrasound imaging systems require transmit and receive circuitry to generate ultrasound beams and process received echo signals. The complexity of building such a system is high due to requirement of the front-end electronics needing to be very close to the transducer. A large number of elements also need to be interfaced to the back-end system and image processing of a large dataset could affect the imaging volume rate. In this work, we present a 3-D imaging system using capacitive micromachined ultrasonic transducer (CMUT) technology that addresses many of the challenges in building such a system. We demonstrate two approaches in integrating the transducer and the front-end electronics. The transducer is a 5-MHz CMUT array with an 8 mm × 8 mm aperture size. The aperture consists of 1024 elements (32 × 32) with an element pitch of 250 μm. An integrated circuit (IC) consists of a transmit beamformer and receive circuitry to improve the noise performance of the overall system. The assembly was interfaced with an FPGA and a back-end system (comprising of a data acquisition system and PC). The FPGA provided the digital I/O signals for the IC and the back-end system was used to process the received RF echo data (from the IC) and reconstruct the volume image using a phased array imaging approach. Imaging experiments were performed using wire and spring targets, a ventricle model and a human prostrate. Real-time volumetric images were captured at 5 volumes per second and are presented in this paper.

  1. An investigation of the energy storage properties of a 2D α-MoO3-SWCNTs composite films

    Science.gov (United States)

    Mendoza-Sánchez, Beatriz; Hanlon, Damien; Coelho, João; O' Brien, Sean; Pettersson, Henrik; Coleman, Jonathan; Nicolosi, Valeria

    2017-03-01

    We recently reported on the synthesis of 2D α-MoO3 using a scalable liquid-phase exfoliation method, its characterization and preliminary studies of its potential for energy storage applications [1]. The material was examined in a LiClO4/propylene carbonate electrolyte, and in a 1.5-3.5 V versus Li+/Li electrochemical window [1]. The charge storage of 2D α-MoO3 electrodes was negligible and this was attributed to electrical limitations imposed by the semiconducting nature of 2D α-MoO3. Electrical conductivity studies of 2D α-MoO3/SWCNT electrodes, where a fraction of SWCNTs was progressively added, led to finding the SWCNT fraction for which an electrical percolation threshold was reached, i.e. a sharp increase of electrical conductivity. This SWCNT fraction also led to a sharp increase in capacitance confirming the electrical limitation of charge storage. In this work, we examined in detail the energy storage properties of 2D α-MoO3/SWCNT (85 wt%/15 wt%) electrodes. A detailed study of ion-intercalation events, as examined by cyclic voltammetry, is presented. We investigated the contributions to the overall energy storage of capacitive and diffusion-controlled processes and how the performance compares against other nanostructured materials including mesoporous α-MoO3 and α-MoO3 nanobelts. Our main findings showed that 2D α-MoO3/SWCNT (85 wt%/15 wt%) electrodes offer scope for supercapacitors and battery applications in terms of total charge storage (200 F g-1 and 195.2 mAh g-1), which is in the range or superior to that of other nanostructured metal oxides and commercial LiCoO2 cathodes. However, a main drawback is cycling stability.

  2. Cation intercalation and high volumetric capacitance of two-dimensional titanium carbide.

    Science.gov (United States)

    Lukatskaya, Maria R; Mashtalir, Olha; Ren, Chang E; Dall'Agnese, Yohan; Rozier, Patrick; Taberna, Pierre Louis; Naguib, Michael; Simon, Patrice; Barsoum, Michel W; Gogotsi, Yury

    2013-09-27

    The intercalation of ions into layered compounds has long been exploited in energy storage devices such as batteries and electrochemical capacitors. However, few host materials are known for ions much larger than lithium. We demonstrate the spontaneous intercalation of cations from aqueous salt solutions between two-dimensional (2D) Ti3C2 MXene layers. MXenes combine 2D conductive carbide layers with a hydrophilic, primarily hydroxyl-terminated surface. A variety of cations, including Na(+), K(+), NH4(+), Mg(2+), and Al(3+), can also be intercalated electrochemically, offering capacitance in excess of 300 farads per cubic centimeter (much higher than that of porous carbons). This study provides a basis for exploring a large family of 2D carbides and carbonitrides in electrochemical energy storage applications using single- and multivalent ions.

  3. Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

    NARCIS (Netherlands)

    Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

    2014-01-01

    Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view, c

  4. 2-D Model Test of Dolosse Breakwater

    DEFF Research Database (Denmark)

    Burcharth, Hans F.; Liu, Zhou

    1994-01-01

    The rational design diagram for Dolos armour should incorporate both the hydraulic stability and the structural integrity. The previous tests performed by Aalborg University (AU) made available such design diagram for the trunk of Dolos breakwater without superstructures (Burcharth et al. 1992......). To extend the design diagram to cover Dolos breakwaters with superstructure, 2-D model tests of Dolos breakwater with wave wall is included in the project Rubble Mound Breakwater Failure Modes sponsored by the Directorate General XII of the Commission of the European Communities under Contract MAS-CT92...... was on the Dolos breakwater with a high superstructure, where there was almost no overtopping. This case is believed to be the most dangerous one. The test of the Dolos breakwater with a low superstructure was also performed. The objective of the last part of the experiment is to investigate the influence...

  5. Alignment free characterization of 2D gratings

    CERN Document Server

    Madsen, Morten Hannibal; Hansen, Poul-Erik; Jørgensen, Jan Friis

    2015-01-01

    Fast characterization of 2-dimensional gratings is demonstrated using a Fourier lens optical system and a differential optimization algorithm. It is shown that both the grating specific parameters such as the basis vectors and the angle between them and the alignment of the sample, such as the rotation of the sample around the x-, y-, and z-axis, can be deduced from a single measurement. More specifically, the lattice vectors and the angle between them have been measured, while the corrections of the alignment parameters are used to improve the quality of the measurement, and hence reduce the measurement uncertainty. Alignment free characterization is demonstrated on both a 2D hexagonal grating with a period of 700 nm and a checkerboard grating with a pitch of 3000 nm. The method can also be used for both automatic alignment and in-line characterization of gratings.

  6. 2D Cooling of Magnetized Neutron Stars

    CERN Document Server

    Aguilera, Deborah N; Miralles, Juan A

    2007-01-01

    Context: Many thermally emitting isolated neutron stars have magnetic fields larger than 10^{13}G. A realistic cooling model should be reconsidered including the presence of high magnetic fields. Aims: We investigate the effects of anisotropic temperature distribution and Joule heating on the cooling of magnetized neutron stars. Methods: The 2D heat transfer equation with anisotropic thermal conductivity tensor and including all relevant neutrino emission processes is solved for realistic models of the neutron star interior and crust. Results: The presence of the magnetic field affects significantly the thermal surface distribution and the cooling history during both, the early neutrino cooling era and the late photon cooling era. Conclusions: There is a huge effect of the Joule heating on the thermal evolution of strongly magnetized neutron stars. Magnetic fields and Joule heating play a key role in maintaining magnetars warm for a long time. Moreover, this effect is also important for intermediate field neu...

  7. Lie symmetries and 2D Material Physics

    CERN Document Server

    Belhaj, Adil

    2014-01-01

    Inspired from Lie symmetry classification, we establish a correspondence between rank two Lie symmetries and 2D material physics. The material unit cell is accordingly interpreted as the geometry of a root system. The hexagonal cells, appearing in graphene like models, are analyzed in some details and are found to be associated with A_2 and G_2 Lie symmetries. This approach can be applied to Lie supersymmetries associated with fermionic degrees of freedom. It has been suggested that these extended symmetries can offer a new way to deal with doping material geometries. Motivated by Lie symmetry applications in high energy physics, we speculate on a possible connection with (p,q) brane networks used in the string theory compactification on singular Calabi-Yau manifolds.

  8. 2-d Simulations of Test Methods

    DEFF Research Database (Denmark)

    Thrane, Lars Nyholm

    2004-01-01

    approach is presented by showing initial results from 2-d simulations of the empirical test methods slump flow and L-box. This method assumes a homogeneous material, which is expected to correspond to particle suspensions e.g. concrete, when it remains stable. The simulations have been carried out when......One of the main obstacles for the further development of self-compacting concrete is to relate the fresh concrete properties to the form filling ability. Therefore, simulation of the form filling ability will provide a powerful tool in obtaining this goal. In this paper, a continuum mechanical...... using both a Newton and Bingham model for characterisation of the rheological properties of the concrete. From the results, it is expected that both the slump flow and L-box can be simulated quite accurately when the model is extended to 3-d and the concrete is characterised according to the Bingham...

  9. Full revivals in 2D quantum walks

    Energy Technology Data Exchange (ETDEWEB)

    Stefanak, M; Jex, I [Department of Physics, FJFI CVUT v Praze, Brehova 7, 115 19 Praha 1-Stare Mesto (Czech Republic); Kollar, B; Kiss, T, E-mail: martin.stefanak@fjfi.cvut.c [Department of Quantum Optics and Quantum Information, Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Konkoly-Thege M. u. 29-33, H-1121 Budapest (Hungary)

    2010-09-01

    Recurrence of a random walk is described by the Polya number. For quantum walks, recurrence is understood as the return of the walker to the origin, rather than the full revival of its quantum state. Localization for two-dimensional quantum walks is known to exist in the sense of non-vanishing probability distribution in the asymptotic limit. We show, on the example of the 2D Grover walk, that one can exploit the effect of localization to construct stationary solutions. Moreover, we find full revivals of a quantum state with a period of two steps. We prove that there cannot be longer cycles for a four-state quantum walk. Stationary states and revivals result from interference, which has no counterpart in classical random walks.

  10. 2-D Model Test of Dolosse Breakwater

    DEFF Research Database (Denmark)

    Burcharth, Hans F.; Liu, Zhou

    1994-01-01

    The rational design diagram for Dolos armour should incorporate both the hydraulic stability and the structural integrity. The previous tests performed by Aalborg University (AU) made available such design diagram for the trunk of Dolos breakwater without superstructures (Burcharth et al. 1992......). To extend the design diagram to cover Dolos breakwaters with superstructure, 2-D model tests of Dolos breakwater with wave wall is included in the project Rubble Mound Breakwater Failure Modes sponsored by the Directorate General XII of the Commission of the European Communities under Contract MAS-CT92......-0042. Furthermore, Task IA will give the design diagram for Tetrapod breakwaters without a superstructure. The more complete research results on Dolosse can certainly give some insight into the behaviour of Tetrapods armour layer of the breakwaters with superstructure. The main part of the experiment...

  11. 2D Electrostatic Actuation of Microshutter Arrays

    Science.gov (United States)

    Burns, Devin E.; Oh, Lance H.; Li, Mary J.; Jones, Justin S.; Kelly, Daniel P.; Zheng, Yun; Kutyrev, Alexander S.; Moseley, Samuel H.

    2015-01-01

    An electrostatically actuated microshutter array consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutter arrays demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.

  12. Fast 2-D Complex Gabor Filter with Kernel Decomposition

    OpenAIRE

    Um, Suhyuk; Kim, Jaeyoon; Min, Dongbo

    2017-01-01

    2-D complex Gabor filtering has found numerous applications in the fields of computer vision and image processing. Especially, in some applications, it is often needed to compute 2-D complex Gabor filter bank consisting of the 2-D complex Gabor filtering outputs at multiple orientations and frequencies. Although several approaches for fast 2-D complex Gabor filtering have been proposed, they primarily focus on reducing the runtime of performing the 2-D complex Gabor filtering once at specific...

  13. Ion channels, phosphorylation and mammalian sperm capacitation.

    Science.gov (United States)

    Visconti, Pablo E; Krapf, Dario; de la Vega-Beltrán, José Luis; Acevedo, Juan José; Darszon, Alberto

    2011-05-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  14. Ion channels, phosphorylation and mammalian sperm capacitation

    Institute of Scientific and Technical Information of China (English)

    Pablo E Visconti; Dario Krapf; José Luis de la Vega-Beltrán; Juan José Acevedo; Alberto Darszon

    2011-01-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  15. Metrology for graphene and 2D materials

    Science.gov (United States)

    Pollard, Andrew J.

    2016-09-01

    The application of graphene, a one atom-thick honeycomb lattice of carbon atoms with superlative properties, such as electrical conductivity, thermal conductivity and strength, has already shown that it can be used to benefit metrology itself as a new quantum standard for resistance. However, there are many application areas where graphene and other 2D materials, such as molybdenum disulphide (MoS2) and hexagonal boron nitride (h-BN), may be disruptive, areas such as flexible electronics, nanocomposites, sensing and energy storage. Applying metrology to the area of graphene is now critical to enable the new, emerging global graphene commercial world and bridge the gap between academia and industry. Measurement capabilities and expertise in a wide range of scientific areas are required to address this challenge. The combined and complementary approach of varied characterisation methods for structural, chemical, electrical and other properties, will allow the real-world issues of commercialising graphene and other 2D materials to be addressed. Here, examples of metrology challenges that have been overcome through a multi-technique or new approach are discussed. Firstly, the structural characterisation of defects in both graphene and MoS2 via Raman spectroscopy is described, and how nanoscale mapping of vacancy defects in graphene is also possible using tip-enhanced Raman spectroscopy (TERS). Furthermore, the chemical characterisation and removal of polymer residue on chemical vapour deposition (CVD) grown graphene via secondary ion mass spectrometry (SIMS) is detailed, as well as the chemical characterisation of iron films used to grow large domain single-layer h-BN through CVD growth, revealing how contamination of the substrate itself plays a role in the resulting h-BN layer. In addition, the role of international standardisation in this area is described, outlining the current work ongoing in both the International Organization of Standardization (ISO) and the

  16. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  17. The mouse ruby-eye 2(d) (ru2(d) /Hps5(ru2-d) ) allele inhibits eumelanin but not pheomelanin synthesis.

    Science.gov (United States)

    Hirobe, Tomohisa; Ito, Shosuke; Wakamatsu, Kazumasa

    2013-09-01

    The novel mutation named ru2(d) /Hps5(ru2-d) , characterized by light-colored coats and ruby-eyes, prohibits differentiation of melanocytes by inhibiting tyrosinase (Tyr) activity, expression of Tyr, Tyr-related protein 1 (Tyrp1), Tyrp2, and Kit. However, it is not known whether the ru2(d) allele affects pheomelanin synthesis in recessive yellow (e/Mc1r(e) ) or in pheomelanic stage in agouti (A) mice. In this study, effects of the ru2(d) allele on pheomelanin synthesis were investigated by chemical analysis of melanin present in dorsal hairs of 5-week-old mice from F2 generation between C57BL/10JHir (B10)-co-isogenic ruby-eye 2(d) and B10-congenic recessive yellow or agouti. Eumelanin content was decreased in ruby-eye 2(d) and ruby-eye 2(d) agouti mice, whereas pheomelanin content in ruby-eye 2(d) recessive yellow and ruby-eye 2(d) agouti mice did not differ from the corresponding Ru2(d) /- mice, suggesting that the ru2(d) allele inhibits eumelanin but not pheomelanin synthesis. © 2013 John Wiley & Sons A/S. Published by John Wiley & Sons Ltd.

  18. Microphonics in biopotential measurements with capacitive electrodes.

    Science.gov (United States)

    Luna-Lozano, Pablo S; Pallas-Areny, Ramon

    2010-01-01

    Biopotential measurements with capacitive electrodes do not need any direct contact between electrode and skin, which saves the time devoted to expose and prepare the contact area when measuring with conductive electrodes. However, mechanical vibrations resulting from physiological functions such as respiration and cardiac contraction can change the capacitance of the electrode and affect the recordings. This transformation of mechanical vibrations into undesired electric signals is termed microphonics. We have evaluated microphonics in capacitive ECG recordings obtained from a dressed subject seated on a common chair with electrodes placed on the front side of the backrest of the chair. Depending on the softness of the backrest, the recordings may be clearly affected by the displacement of the thorax back wall due to the respiration and to the heart's mechanical activity.

  19. Carbon nanofiber supercapacitors with large areal capacitances

    KAUST Repository

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  20. Role of the oviduct in sperm capacitation.

    Science.gov (United States)

    Rodriguez-Martinez, H

    2007-09-01

    Following insemination of spermatozoa pre-ovulation, the mammalian oviduct ensures, by the formation of a functional sperm reservoir (SR), that suitable (low) numbers of viable and potentially fertile spermatozoa are available for fertilization at the ampullary isthmic junction (AIJ). As ovulation approaches, a proportion of the SR-stored spermatozoa is continuously distributed towards the AIJ and individually activated leading to step-wise capacitation and the attainment of hyperactivated motility. This paper reviews in vivo changes in the intra-luminal milieu of the oviduct of pigs and cows, in particular the SR and the AIJ which relate to the modulation of sperm capacitation around spontaneous ovulation. In vivo, most viable spermatozoa in the pre-ovulatory SR are uncapacitated. Capacitation rates significantly increase after ovulation, apparently not massively but concurrent with the individual, continuous sperm dislocation from the SR. Bicarbonate, whose levels differ between the SR and the AIJ, appears as the common primary effector of the membrane destabilizing changes that encompasses the first stages of capacitation. Sperm activation can be delayed or even reversed by co-incubation with membrane proteins of the tubal lining, isthmic fluid or specific tubal glycosaminoglycans, such as hyaluronan. Although the pattern of response to in vitro induction of sperm activation - capacitation in particular - is similar for all spermatozoa, the capacity and speed of the response is very individual. Such diversity in responsiveness among spermatozoa insures full sperm viability before ovulation and the presence of spermatozoa at different stages of capacitation at the AIJ, thus maximizing the chances of normal fertilization.

  1. Analysis of the IEA 2D test. 2D, 3D, steady or unsteady airflow?

    DEFF Research Database (Denmark)

    Cortes, Ines Olmedo; Nielsen, Peter V.

    The “IEA Annex 20 two-dimensional test case” was defined by proffesor Peter V. Nielsen (1990) and was originally considered two-dimensional and steady flow. However, some recent works considering the case as three dimensional have shown different solutions from the 2D case as well as different so...

  2. Capacitance sensor for automatic soil retreat measurements

    Institute of Scientific and Technical Information of China (English)

    GU Jun; YANG Juan; YIN Wu-liang; WANG Chao; WANG Hua-xiang; LIU Ze; CHENG Su-sen

    2008-01-01

    To continuously monitor the soil retreat due to erosion in field, provide valuable information about the erosion processes and overcome the disadvantages of inefficiency, high time-consumption and labor-intensity of existing methods, this paper describes a novel capacitance sensor for measuring the soil retreat. A capaci-tance sensor based probe is proposed, which can measure the depth of the soil around it automatically and the data can be recorded by a data logger. Experimental results in the lab verify its usefulness.

  3. Experimental study of negative capacitance in LEDs

    Institute of Scientific and Technical Information of China (English)

    FENG Lie-feng; WANG Jun; ZHU Chuan-yun; CONG Hong-xia; CHEN Yong; WANG Cun-da

    2005-01-01

    The experimental study on negative capacitance(NC) of various light-emitting diodes(LEDs) is presented.Experimental result shows that all LEDs display the NC phenomenon.The voltage modulated electroluminescence(VMEL) experiment confirms that the reason of negative capacitance is the strong recombination of the injected carriers in the active region of luminescence.The measures also verify that the dependence of NC on voltage and frequency in different LEDs is similar: NC phenomenon is more obvious with higher voltage or lower frequency.

  4. Analysis list: Kmt2d [Chip-atlas[Archive

    Lifescience Database Archive (English)

    Full Text Available Kmt2d Adipocyte,Pluripotent stem cell + mm9 http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/target/Kmt2d....1.tsv http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/target/Kmt2d.5.tsv http://dbarchiv...e.biosciencedbc.jp/kyushu-u/mm9/target/Kmt2d.10.tsv http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/colo/Kmt2d....Adipocyte.tsv,http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/colo/Kmt2d.Pluripo

  5. Intermittency in 2D soap film turbulence

    CERN Document Server

    Cerbus, R T

    2013-01-01

    The Reynolds number dependency of intermittency for 2D turbulence is studied in a flowing soap film. The Reynolds number used here is the Taylor microscale Reynolds number R_{\\lambda}, which ranges from 20 to 800. Strong intermittency is found for both the inverse energy and direct enstrophy cascades as measured by (a) the pdf of velocity differences P(\\delta u(r)) at inertial scales r, (b) the kurtosis of P(\\partial_x u), and (c) the scaling of the so-called intermittency exponent \\mu, which is zero if intermittency is absent. Measures (b) and (c) are quantitative, while (a) is qualitative. These measurements are in disagreement with some previous results but not all. The velocity derivatives are nongaussian at all R_{\\lambda} but show signs of becoming gaussian as R_{\\lambda} increases beyond the largest values that could be reached. The kurtosis of P(\\delta u(r)) at various r indicates that the intermittency is scale dependent. The structure function scaling exponents also deviate strongly from the Kraichn...

  6. Competing coexisting phases in 2D water

    Science.gov (United States)

    Zanotti, Jean-Marc; Judeinstein, Patrick; Dalla-Bernardina, Simona; Creff, Gaëlle; Brubach, Jean-Blaise; Roy, Pascale; Bonetti, Marco; Ollivier, Jacques; Sakellariou, Dimitrios; Bellissent-Funel, Marie-Claire

    2016-05-01

    The properties of bulk water come from a delicate balance of interactions on length scales encompassing several orders of magnitudes: i) the Hydrogen Bond (HBond) at the molecular scale and ii) the extension of this HBond network up to the macroscopic level. Here, we address the physics of water when the three dimensional extension of the HBond network is frustrated, so that the water molecules are forced to organize in only two dimensions. We account for the large scale fluctuating HBond network by an analytical mean-field percolation model. This approach provides a coherent interpretation of the different events experimentally (calorimetry, neutron, NMR, near and far infra-red spectroscopies) detected in interfacial water at 160, 220 and 250 K. Starting from an amorphous state of water at low temperature, these transitions are respectively interpreted as the onset of creation of transient low density patches of 4-HBonded molecules at 160 K, the percolation of these domains at 220 K and finally the total invasion of the surface by them at 250 K. The source of this surprising behaviour in 2D is the frustration of the natural bulk tetrahedral local geometry and the underlying very significant increase in entropy of the interfacial water molecules.

  7. Ion Transport in 2-D Graphene Nanochannels

    Science.gov (United States)

    Xie, Quan; Foo, Elbert; Duan, Chuanhua

    2015-11-01

    Graphene membranes have recently attracted wide attention due to its great potential in water desalination and selective molecular sieving. Further developments of these membranes, including enhancing their mass transport rate and/or molecular selectivity, rely on the understanding of fundamental transport mechanisms through graphene membranes, which has not been studied experimentally before due to fabrication and measurement difficulties. Herein we report the fabrication of the basic constituent of graphene membranes, i.e. 2-D single graphene nanochannels (GNCs) and the study of ion transport in these channels. A modified bonding technique was developed to form GNCs with well-defined geometry and uniform channel height. Ion transport in such GNCs was studied using DC conductance measurement. Our preliminary results showed that the ion transport in GNCs is still governed by surface charge at low concentrations (10-6M to 10-4M). However, GNCs exhibits much higher ionic conductances than silica nanochannels with the same geometries in the surface-charge-governed regime. This conductance enhancement can be attributed to the pre-accumulation of charges on graphene surfaces. The work is supported by the Faculty Startup Fund (Boston University, USA).

  8. 2D DIGITAL SIMPLIFIED FLOW VALVE

    Institute of Scientific and Technical Information of China (English)

    Ruan Jian; Li Sheng; Pei Xiang; Burton R; Ukrainetz P; Bitner D

    2004-01-01

    The 2D digital simplified flow valve is composed of a pilot-operated valve designed with both rotary and linear motions of a single spool,and a stepper motor under continual control.How the structural parameters affect the static and dynamic characteristics of the valve is first clarified and a criterion for stability is presented.Experiments are designed to test the performance of the valve.It is necessary to establish a balance between the static and dynamic characteristics in deciding the structural parameters.Nevertheless,it is possible to maintain the dynamic response at a fairly high level,while keeping the leakage of the pilot stage at an acceptable level.One of the features of the digital valve is stage control.In stage control the nonlinearities,such as electromagnetic saturation and hysteresis,are greatly reduced.To a large extent the dynamic response of the valve is decided by the executing cycle of the control algorithm.

  9. Self-aligned local electrolyte gating of 2D materials with nanoscale resolution

    CERN Document Server

    Peng, Cheng; Nanot, Sebastien; Shiue, Ren-Jye; Grosso, Gabriele; Yang, Yafang; Hempel, Marek; Jarillo-Herrero, Pablo; Kong, Jing; Koppens, Frank H L; Englund, Dirk

    2016-01-01

    In the effort to make 2D materials-based devices smaller, faster, and more efficient, it is important to control charge carrier at lengths approaching the nanometer scale. Traditional gating techniques based on capacitive coupling through a gate dielectric cannot generate strong and uniform electric fields at this scale due to divergence of the fields in dielectrics. This field divergence limits the gating strength, boundary sharpness, and pitch size of periodic structures, and restricts possible geometries of local gates (due to wire packaging), precluding certain device concepts, such as plasmonics and transformation optics based on metamaterials. Here we present a new gating concept based on a dielectric-free self-aligned electrolyte technique that allows spatially modulating charges with nanometer resolution. We employ a combination of a solid-polymer electrolyte gate and an ion-impenetrable e-beam-defined resist mask to locally create excess charges on top of the gated surface. Electrostatic simulations ...

  10. Thermal Hysteresis of MEMS Packaged Capacitive Pressure Sensor (CPS) Based 3C-SiC

    Science.gov (United States)

    Marsi, N.; Majlis, B. Y.; Mohd-Yasin, F.; Hamzah, A. A.; Mohd Rus, A. Z.

    2016-11-01

    Presented herein are the effects of thermal hysteresis analyses of the MEMS packaged capacitive pressure sensor (CPS). The MEMS CPS was employed on Si-on-3C-SiC wafer that was performed using the hot wall low-pressure chemical vapour deposition (LPCVD) reactors at the Queensland Micro and Nanotechnology Center (QMNC), Griffith University and fabricated using the bulk-micromachining process. The MEMS CPS was operated at an extreme temperature up to 500°C and high external pressure at 5.0 MPa. The thermal hysteresis phenomenon that causes the deflection, strain and stress on the 3C-SiC diaphragm spontaneously influence the MEMS CPS performances. The differences of temperature, hysteresis, and repeatability test were presented to demonstrate the functionality of the MEMS packaged CPS. As expected, the output hysteresis has a low hysteresis (less than 0.05%) which has the hardness greater than the traditional silicon. By utilizing this low hysteresis, it was revealed that the MEMS packaged CPS has high repeatability and stability of the sensor.

  11. A wafer level vacuum encapsulated capacitive accelerometer fabricated in an unmodified commercial MEMS process.

    Science.gov (United States)

    Merdassi, Adel; Yang, Peng; Chodavarapu, Vamsy P

    2015-03-25

    We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs) for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1 fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g.

  12. Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization

    Directory of Open Access Journals (Sweden)

    B. D. PANT

    2009-09-01

    Full Text Available The current paper presents an optimization study for the designing of a highly sensitive inertial grade capacitive accelerometer based on comb-drive actuation and sensing. The proof mass, suspension system (beams or tethers, stators and rotors have to be realized through an HAR (high aspect ratio DRIE (deep reactive ion etching process for which process optimization has already been done at our laboratory. As the proof mass is a bulk micro-machined structure having a mass in milligram range, the optimum positioning of the tethers on the proof mass is important to have minimum sag, necessary to reduce the off-axis sensitivity. The optimization for the positioning of the tethers has been carried out using a commercial software tool ANSYSTM Multiphysics. The accelerometer has been modeled analytically to predict its characteristics. The dependency of sensitivity on the dimensions of the suspension beams (tethers has also been verified using the above FEM software tool. The present device has been designed to deliver a high sensitivity of 13.6 mV/g/V for low-g applications.

  13. Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization

    Directory of Open Access Journals (Sweden)

    B. D. PANT

    2009-10-01

    Full Text Available The current paper presents an optimization study for the designing of a highly sensitive inertial grade capacitive accelerometer based on comb-drive actuation and sensing. The proof mass, suspension system (beams or tethers, stators and rotors have to be realized through an HAR (high aspect ratio DRIE (deep reactive ion etching process for which process optimization has already been done at our laboratory. As the proof mass is a bulk micro-machined structure having a mass in milligram range, the optimum positioning of the tethers on the proof mass is important to have minimum sag, necessary to reduce the off-axis sensitivity. The optimization for the positioning of the tethers has been carried out using a commercial software tool ANSYSTM Multiphysics. The accelerometer has been modeled analytically to predict its characteristics. The dependency of sensitivity on the dimensions of the suspension beams (tethers has also been verified using the above FEM software tool. The present device has been designed to deliver a high sensitivity of 13.6 mV/g/V for low-g applications.

  14. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

    Directory of Open Access Journals (Sweden)

    Adel Merdassi

    2015-03-01

    Full Text Available We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS, introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g.

  15. Surface micromachined differential piezoelectric shear-stress sensors

    Science.gov (United States)

    Williams, Randall P.; Kim, Donghwan; Gawalt, David P.; Hall, Neal A.

    2017-01-01

    The ability to measure viscous wall shear stress in high-speed flows is important for verifying simulated results typically obtained from direct numerical simulation in the aerodynamics research community, and robust sensors are required to measure wall shear reliably under such high-speed conditions. This letter summarizes the design, fabrication, and testing of a surface micromachined piezoelectric shear-stress sensor which uses a thin piezoelectric film to generate a voltage proportional to an applied shear stress without additional moving parts. A differential-cell architecture is used to enhance selectivity to shear stress while canceling normal-stress sensitivity. The conceptual design, fabrication details, and experimental measurements of device sensitivity are presented. A finite element model is used to validate the device performance against measurements, and to provide insight into the potential and electric fields underlying the device concept. The potential for understanding device behavior and optimization through modeling is illustrated using finite element analysis results. The minimum detectable shear stress for the sensor is estimated to be 52.9 mPa  √Hz-1 at 1.5 kHz.

  16. Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing

    Science.gov (United States)

    DeBrabander, Gregory N.; Boyd, Joseph T.

    1996-01-01

    Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented.

  17. A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials

    Science.gov (United States)

    Shi, Huaduo; Shi, Weiliang; Zhang, Ran; Zhai, Junyi; Chu, Jinkui; Dong, Shuxiang

    2017-06-01

    Micro/nanomaterials and devices have attracted great interest in recent years because of their extensive application prospects in almost all kinds of fields. However, the manipulations of the material at the micro/nanoscale, such as the separation or transfer of a micro/nano-object in the process of assembling micro/nanodevices, are quite difficult. In this paper, we present a micromachined micro-gripper made of photoresist material (SU-8) and driven by piezoelectric Pb(Mg,Nb)O3-PbTiO3 single crystal pieces. In order to keep two grasping jaws of the micro-gripper operating in the same plane at the micro/nanometer scale, a fine circular flexure hinge was fabricated for elastically connecting them together. After introducing the interface effect, the relationship between the opening stroke of two jaws and the applied voltage was developed and then confirmed by finite element simulation. The micro-gripper was finally installed on a six degree of freedom stage for performing a pick-up, release, and transfer manipulation of a 2 μm ZnO micro-fiber. The presented piezoelectric micro-gripper shows a great potential for the precise manipulation of a single piece of micro/nanomaterial for micro/nanodevices' assembling.

  18. A micromachined surface acoustic wave sensor for detecting inert gases

    Energy Technology Data Exchange (ETDEWEB)

    Ahuja, S.; Hersam, M.; Ross, C.; Chien, H.T.; Raptis, A.C. [Argonne National Lab., IL (United States). Energy Technology Div.

    1996-12-31

    Surface acoustic wave (SAW) sensors must be specifically designed for each application because many variables directly affect the acoustic wave velocity. In the present work, the authors have designed, fabricated, and tested an SAW sensor for detection of metastable states of He. The sensor consists of two sets of micromachined interdigitated transducers (IDTs) and delay lines fabricated by photolithography on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the SAWs. One set is used as a reference and the other set employs a delay line coated with a titanium-based thin film sensitive to electrical conductivity changes when exposed to metastable states of He. The reference sensor is used to obtain a true frequency translation in relation to a voltage controlled oscillator. An operating frequency of 109 MHz has been used, and the IDT finger width is 8 {micro}m. Variation in electrical conductivity of the thin film at the delay line due to exposure to He is detected as a frequency shift in the assembly, which is then used as a measure of the amount of metastable He exposed to the sensing film on the SAW delay line. A variation in the He pressure versus frequency shifts indicates the extent of the metastable He interaction.

  19. A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials.

    Science.gov (United States)

    Shi, Huaduo; Shi, Weiliang; Zhang, Ran; Zhai, Junyi; Chu, Jinkui; Dong, Shuxiang

    2017-06-01

    Micro/nanomaterials and devices have attracted great interest in recent years because of their extensive application prospects in almost all kinds of fields. However, the manipulations of the material at the micro/nanoscale, such as the separation or transfer of a micro/nano-object in the process of assembling micro/nanodevices, are quite difficult. In this paper, we present a micromachined micro-gripper made of photoresist material (SU-8) and driven by piezoelectric Pb(Mg,Nb)O3-PbTiO3 single crystal pieces. In order to keep two grasping jaws of the micro-gripper operating in the same plane at the micro/nanometer scale, a fine circular flexure hinge was fabricated for elastically connecting them together. After introducing the interface effect, the relationship between the opening stroke of two jaws and the applied voltage was developed and then confirmed by finite element simulation. The micro-gripper was finally installed on a six degree of freedom stage for performing a pick-up, release, and transfer manipulation of a 2 μm ZnO micro-fiber. The presented piezoelectric micro-gripper shows a great potential for the precise manipulation of a single piece of micro/nanomaterial for micro/nanodevices' assembling.

  20. Manufacture of Radio Frequency Micromachined Switches with Annealing

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2014-01-01

    Full Text Available The fabrication and characterization of a radio frequency (RF micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  1. Manufacture of radio frequency micromachined switches with annealing.

    Science.gov (United States)

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-17

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM) software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  2. Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresist

    Science.gov (United States)

    Ganapathy Subramani, Balasubramanian; Selvaganapathy, Ponnambalam Ravi

    2009-01-01

    PDMS is a widely used material for construction of microfluidic devices. The traditional PDMS microfabrication process, although versatile, cannot be used to form microfluidic devices with embedded tall topological features, such as thick-film electrodes and porous reactor beds. This paper presents an elegant surface micromachining process for microfluidic devices that allows complete leak-proof sealing and a conformal contact of the PDMS with tall pre-existing topographical features and demonstrates this approach by embedding 6 µm thick Ag/AgCl (high capacity 1680 µA s) electrodes inside the microchannels. In this process, thin spin-cast films of the PDMS are used as the structural material and a photoresist is used as the sacrificial material. A crucial parameter, namely adhesion of the spun-cast structural layer to the substrate, was characterized for different pre-polymer ratios using a standard tensile test, and a 1:3 (curing agent:base) combination was found to be the best with a maximum adhesion strength of 7.2 MPa. The elastic property of the PDMS allowed extremely fast release times of ~1 min of the fabricated microchannels. The versatility of this process was demonstrated by the fabrication of a pneumatic microvalve with multi-layered microchannel geometry. The valve closure occurred at 6.37 kPa. Preliminary results of this paper have been presented at the Canadian Workshop on MEMS and Microfluidics, Montréal, Canada, August 2007.

  3. Thermal dependence of electrical characteristics of micromachined silica microchannel plates

    Science.gov (United States)

    Tremsin, Anton S.; Vallerga, John V.; Siegmund, Oswald H. W.; Beetz, Charles P.; Boerstler, Robert W.

    2004-04-01

    Micromachined silica microchannel plates (MCPs) under development have a number of advantages over standard glass MCPs and open completely new possibilities in detector technologies. In this article we present the results of our studies on the thermal properties of silica microchannel plates (sMCPs). Similar to standard glass microchanel plates the resistance of silica MCPs was measured to change exponentially with temperature with a negative thermal coefficient of -0.036 per °C, somewhat larger than that of standard glass MCPs. The resistance also decreases linearly with the applied voltage, with the voltage coefficient of -3.1×10-4 V-1. With the knowledge of these two coefficients, our thermal model allows the calculation of the maximum voltage, which can be applied to a given MCP without inducing a thermal runaway. A typical 25 mm diam, 240 μm thick sMCP with 6 μm pores has to have the resistance larger than ˜30 MΩ to operate safely at voltages up to 800 V. With this model we can also calculate the time required for a given silica MCP to reach the point of thermal equilibrium after a voltage increase. We hope that the ongoing efforts on a proper modification of the sMCP semiconducting layer will lead to the production of new MCPs with a small negative or even a positive thermal coefficient, reducing the possibility of thermal runaways of low-resistance MCPs required for high count rate applications.

  4. Multiplexed operation of a micromachined ultrasonic droplet ejector array.

    Science.gov (United States)

    Forbes, Thomas P; Degertekin, F Levent; Fedorov, Andrei G

    2007-10-01

    A dual-sample ultrasonic droplet ejector array is developed for use as a soft-ionization ion source for multiplexed mass spectrometry (MS). Such a multiplexed ion source aims to reduce MS analysis time for multiple analyte streams, as well as allow for the synchronized ejection of the sample(s) and an internal standard for quantitative results and mass calibration. Multiplexing is achieved at the device level by division of the fluid reservoir and separating the active electrodes of the piezoelectric transducer for isolated application of ultrasonic wave energy to each domain. The transducer is mechanically shaped to further reduce the acoustical crosstalk between the domains. Device design is performed using finite-element analysis simulations and supported by experimental characterization. Isolated ejection of approximately 5 microm diameter water droplets from individual domains in the micromachined droplet ejector array at around 1 MHz frequency is demonstrated by experiments. The proof-of-concept demonstration using a dual-sample device also shows potential for multiplexing with larger numbers of analytes.

  5. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  6. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  7. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Ling-Feng Mao

    2013-08-01

    The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement in graphene nanoribbon. Detailed studies of the capacitance oscillations demonstrate that the local channel electrostatic potential at the capacitance peak, the height and the number of the capacitance peak strongly depend on the width, especially a few nanometres, of the armchair-edge graphene nanoribbon. It implies that the capacitance oscillations observed in the experiments can be utilized to measure the width of graphene nanoribbon. The results also show that the capacitance oscillations are not seen when the width is larger than 30 nm.

  8. Investigation on a Novel Capacitive Electrode for Geophysical Surveys

    Directory of Open Access Journals (Sweden)

    Zhiyu Wang

    2016-01-01

    Full Text Available Nonpolarizable electrodes are applied widely in the electric field measurement for geophysical surveys. However, there are two major problems: (1 systematic errors caused by poor electrical contact in the high resistive terrains and (2 environmental damage associated with using nonpolarizable electrodes. A new alternative structure of capacitive electrode, which is capable of sensing surface potential through weak capacitive coupling, is presented to solve the above problems. A technique is introduced to neutralize distributed capacitance and input capacitance of the detection circuit. With the capacitance neutralization technique, the transmission coefficient of capacitive electrode remains stable when environmental conditions change. The simulation and field test results indicate that the new capacitive electrode has an operating bandwidth range from 0.1 Hz to 1 kHz. The capacitive electrodes have a good prospect of the applications in geophysical prospecting, especially in resistive terrains.

  9. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Energy Technology Data Exchange (ETDEWEB)

    Alemohammad, H; Toyserkani, E [Department of Mechanical and Mechatronics Engineering, University of Waterloo, ON N2L 3G1 (Canada); Pinkerton, A J [School of Mechanical, Aerospace and Civil Engineering, University of Manchester, PO Box 88, Manchester, M60 1QD (United Kingdom)], E-mail: etoyserk@uwaterloo.ca, E-mail: shalemoh@uwaterloo.ca, E-mail: andrew.pinkerton@manchester.ac.uk

    2008-09-21

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 {mu}m in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  10. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Science.gov (United States)

    Alemohammad, H.; Toyserkani, E.; Pinkerton, A. J.

    2008-09-01

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 µm in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  11. Inside-out electrical capacitance tomography

    DEFF Research Database (Denmark)

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    In this work we demonstrate the construction of an ‘inside-out’ sensor geometry for electrical capacitance tomography (ECT). The inside-out geometry has the electrodes placed around a tube, as usual, but measuring ‘outwards’. The flow between the electrodes and an outer tube is reconstructed...

  12. Comparison of piezoresistive and capacitive ultrasonic transducers

    Science.gov (United States)

    Neumann, John J.; Greve, David W.; Oppenheim, Irving J.

    2004-07-01

    MEMS ultrasonic transducers for flaw detection have heretofore been built as capacitive diaphragm-type devices. A diaphragm forms a moveable electrode, placed at a short gap from a stationary electrode, and diaphragm movement has been detected by capacitance change. Although several research teams have successfully demonstrated that technology, the detection of capacitance change is adversely affected by stray and parasitic capacitances, limiting the sensitivity of such transducers and typically requiring relatively large diaphragm areas. We describe the design and fabrication of what to our knowledge is the first CMOS-MEMS ultrasonic phased array transducer using piezoresistive strain sensing. Piezoresistors have been patterned within the diaphragms, and diaphragm movement creates bending strain which is detected by a bridge circuit, for which conductor losses will be less significant. The prospective advantage of such piezoresistive transducers is that sufficient sensitivity may be achieved with very small diaphragms. We compare transducer response under fluid-coupled ultrasonic excitation and report the experimental gauge factor for the piezoresistors. We also discuss the phased array performance of the transducer in sensing the direction of an incoming wave.

  13. Negative capacitance in multidomain ferroelectric superlattices

    Science.gov (United States)

    Zubko, Pavlo; Wojdeł, Jacek C.; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk'Yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-01

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric-dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  14. Constant capacitance in nanopores of carbon monoliths.

    Science.gov (United States)

    García-Gómez, Alejandra; Moreno-Fernández, Gelines; Lobato, Belén; Centeno, Teresa A

    2015-06-28

    The results obtained for binder-free electrodes made of carbon monoliths with narrow micropore size distributions confirm that the specific capacitance in the electrolyte (C2H5)4NBF4/acetonitrile does not depend significantly on the micropore size and support the foregoing constant result of 0.094 ± 0.011 F m(-2).

  15. Thermodynamic cycle analysis for capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.

    2009-01-01

    Capacitive deionization (CDI) is an ion removal technology based on temporarily storing ions in the polarization layers of two oppositely positioned electrodes. Here we present a thermodynamic model for the minimum work required for ion separation in the fully reversible case by describing the ionic

  16. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

    Energy Technology Data Exchange (ETDEWEB)

    Lu, Y.; Fung, S.; Wang, Q.; Horsley, D. A. [Berkeley Sensor and Actuator Center, University of California, Davis, 1 Shields Avenue, Davis, California 95616 (United States); Tang, H.; Boser, B. E. [Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States); Tsai, J. M.; Daneman, M. [InvenSense, Inc., 1745 Technology Drive, San Jose, California 95110 (United States)

    2015-06-29

    This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm pitch, fully integrated with 180 nm complementary metal oxide semiconductor (CMOS) circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. The array frequency response and vibration mode-shape were characterized using laser Doppler vibrometry and verified via finite element method simulation. The array's acoustic output was measured using a hydrophone to be ∼14 kPa with a 28 V input, in reasonable agreement with predication from analytical calculation. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20 × 8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D polydimethylsiloxane fingerprint phantom (10 mm × 8 mm) at a 1.2 mm distance from the array.

  17. 2-D Animation's Not Just for Mickey Mouse.

    Science.gov (United States)

    Weinman, Lynda

    1995-01-01

    Discusses characteristics of two-dimensional (2-D) animation; highlights include character animation, painting issues, and motion graphics. Sidebars present Silicon Graphics animations tools and 2-D animation programs for the desktop computer. (DGM)

  18. ``Zeptofarad'' (10-21 F) resolution capacitance sensor for scanning capacitance microscopy

    Science.gov (United States)

    Tran, T.; Oliver, D. R.; Thomson, D. J.; Bridges, G. E.

    2001-06-01

    We describe a sensor for use in a scanning capacitance microscope (SCM) that is capable of "zeptofarad" (10-21 F) capacitance measurement resolution in a 1 Hz bandwidth with a peak-to-peak sense voltage on the probe tip of no more than 300 mV. This sensitivity is based on experimental data and simulation results that are in excellent agreement. The complete sensor incorporates an oscillator (phase locked to a 10 MHz crystal oscillator), a coupled transmission line resonator, an amplifier, and a peak detector. The resonator is fabricated from copper-clad, low-loss dielectric material and its size is such that it is easily incorporated with a scanning probe microscope. The sensor's use in the SCM enables capacitance resolution that has not previously been possible while retaining the instrumental advantages of imaging at low sense voltages. The performance of this sensor is discussed and compared to alternative scanning capacitance microscopy methodologies.

  19. MOS Capacitance-Voltage Characteristics:V.Methods to Enhance the Trapping Capacitance

    Institute of Scientific and Technical Information of China (English)

    揭斌斌; 薩支唐

    2012-01-01

    Low-frequency and High-frequency Capacitance-Voltage (C-V) curves of Silicon Metal-Oxide-Semiconductor Capacitors,showing electron and hole trapping at shallow-level dopant and deep-level generationrecombination-trapping impurities,are presented to illustrate the enhancement of the giant trapping capacitances by physical means via device and circuit designs,in contrast to chemical means via impurity characteristics previously reported.Enhancement is realized by masking the electron or/and hole storage capacitances to make the trapping capacitances dominant at the terminals.Device and materials properties used in the computed CV curves are selected to illustrate experimental realizations for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  20. Electrostatic self-assembly of sandwich-like CoAl-LDH/polypyrrole/graphene nanocomposites with enhanced capacitive performance.

    Science.gov (United States)

    Zhang, Yu; Du, Dongfeng; Li, Xuejin; Sun, Hongman; Li, Li; Bai, Peng; Xing, Wei; Xue, Qingzhong; Yan, Zifeng

    2017-09-01

    A novel sandwich-like composite with ultrathin CoAl-LDH nanoplates electrostatically assembled on both sides of 2D polypyrrole/graphene (PG) substrate has been successfully fabricated using facile hydrothermal techniques. The PG not only serves as an excellent conductive and structural scaffold to enhance the transmission of electrons and prevents aggregation of CoAl-LDH nanoplates, but also contributes to the enhancement of the specific capacitance. Owing to the homogeneous dispersion of CoAl-LDH nanoplates and its intimate interaction with PG substrate, the resulting CoAl-LDH/PG nanocomposite material exhibits excellent capacitive performance, e.g. enhanced gravimetric specific capacitance (864 F g-1 at 1 A g-1 ), high rate performance (75% retention at 20 A g-1) and excellent cyclic life (almost no degradation in supercapacitor performance after 5000 cycles) in aqueous KOH solution. Furthermore, the assembled asymmetric capacitor is able to deliver superhigh energy density of 46.8 Wh kg-1 at 1.2 kW kg-1 and maintain 90.1% of its initial capacitance after 10000 cycles. These results indicate a rational assembly strategy towards a high-performance pseudocapacitive electrode material with excellent rate performance, high specific capacitance and outstanding cycle stability.

  1. Winding Capacitance Dividing Method for Powerformer

    Institute of Scientific and Technical Information of China (English)

    TIAN Qing; LIN Xiang-ning; LI Jian-jian; TAO Yong-hong

    2008-01-01

    It presents a method which can equivalently arrange the capacitance distribution along with the winding ofthe generator on the terminal and neutral respectively in a reasonable partition, particularly for a type of high-voltagegraded insulated cable wound generator, Powerformer. The winding of the Powerformer adopts graded insulation,which leads to the various cable thicknesses in different portion of the winding, and thus, the uneven capacitancedistribution. The large capacitive currents and large transient outrush currents resulting from the cable consisting ofthe stator winding of Powerformer may cause problems to the generator differential protection. Most of literatures a-vailable in the field of compensated differential protection focus on the charging current compensation for long trans-mission line, instead of for generator. The authors give a method which can be used to compensate the capacitivecurrent wholly to improve the reliability of the differential protection of Powerformer. It is proved that the distribu-ted capacitance can be equivalent as the lump circuit with a capacitance partition coefficient p, and p is proved as aconstant no matter whether the generator experiences the normal operation, external phase(s) fault or internal phase(s) fault. The formula of the partition coefficient is provided and the corresponding equivalent circuit of the Power-former cable to calculate capacitance currents is given. An analysis programming resolving the minimum value of thecoefficient p is written in MATLAB 7. 0/m according to this formula, using the function fmincon() which can workin any type of constraint condition. The program always gets the same global minimum points under the different in-itial values condition which proves our point by mathematical test. With this new approach to winding capacitancedividing method, the protection scheme used for Powerformer can be validated and improved accordingly.

  2. Capacitive Bioanodes Enable Renewable Energy Storage in Microbial Fuel Cells

    NARCIS (Netherlands)

    Deeke, A.; Sleutels, T.H.J.A.; Hamelers, H.V.M.; Buisman, C.J.N.

    2012-01-01

    We developed an integrated system for storage of renewable electricity in a microbial fuel cell (MFC). The system contained a capacitive electrode that was inserted into the anodic compartment of an MFC to form a capacitive bioanode. This capacitive bioanode was compared with a noncapacitive

  3. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  4. The use of micromachined structures for the management of mechanical properties and adhesion of thin films

    Science.gov (United States)

    Mehregamy, Mehran; Allen, Mark G.; Senturia, Stephen D.

    The application of silicon micromachining to the measurement of mechanical properties of thin films such as intrinsic stress, Young's modulus, and adhesion is presented. The measurement is based on the deflection and subsequent peeling of suspended membrane sections of the film. The goal was to make a quantitatively reproducible adhesion test by applying micromachining techniques to the blister peel test described by Hinkley. The initial measurements demonstrated the importance of residual stress in the films, which resulted in an expanded emphasis on the basic mechanical properties of the membrane as a prelude to accurate adhesion measurements. The process for micromachining suspended membranes is discussed along with the theory leading to the determination of mechanical properties of the films, the results, and the present status of the adhesion work.

  5. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  6. Characteristics of damaged layer in micro-machining of copper material

    Institute of Scientific and Technical Information of China (English)

    Dong-Hee KWON; Jeong-Suk KIM; Myung-Chang KANG; Se-Hun KWON; Jong-Hwan LEE

    2009-01-01

    The study on damaged layer is necessary for improving the machinability in micro-machining because the damaged layer affects the micro mold life and micro machine parts. This study examined the ultra-precision micro-machining characteristics, such as cutting speed, feed rate and cutting depth, of a micro-damaged layer produced by an ultra-high speed air turbine spindle. The micro cutting force, surface roughness and plastic deformation layer were investigated according to the machining conditions. The damaged layer was measured using optical microscope on samples prepared through metallographic techniques. The scale of the damaged layer depends on the cutting process parameters, particularly, the feed per tooth and axial depth of the cut. According to the experimental results, the depth of the damaged layer is increased by increasing the feed per tooth and cutting depth, also the damaged layer occurs less in down-milling compared with up-milling during the micro-machining operation.

  7. Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films

    Institute of Scientific and Technical Information of China (English)

    丁建宁; 孟永钢; 温诗铸

    2002-01-01

    The elastic modulus is a very important mechanical property in micromachined structures. Several design issues such as resonant frequencies and stiffness in the micromachined structures are related to the elastic modulus. In addition, the accuracy of results from finite element models is highly dependent upon the elastic modulus. In this study, the Young modulus of micromachined thin polysilicon films has been investigated with a new tensile test machine using a magnetic-solenoid force actuator with linear response, low hysteresis, no friction and direct electrical control. The tensile test results show that the measured average value of Young modulus for a typical sample, (164±1.2) GPa, falls within the theoretical bounds of the texture model. These results will provide more reliable design of polysilicon microelectromechanical systems (MEMS).

  8. Stability Test for 2-D Continuous-Discrete Systems

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    Models of 2-D continuous-discrete systems are introduced, which can be used to describe some complex systems. Different from classical 2-D continuous systems or 2-D discrete systems, the asymptotic stability of the continuous-discrete systems is determined by Hurwitz-Schur stability (hybrid one) of 2-D characteristic polynomials of the systems. An algebraic algorithm with simpler test procedure for Hurwitz-Schur stability test of 2-D polynomials is developed. An example to illustrate the applications of the test approach is provided.

  9. Pharm GKB: CYP2D6 [PharmGKB

    Lifescience Database Archive (English)

    Full Text Available el for vortioxetine and CYP2D6 FDA Label for acetaminophen,tramadol and CYP2D6 FDA Label for dextromethorphan... Label for vortioxetine and CYP2D6 European Medicines Agency (EMA) Label for dextromethorphan,quinidine and ...ore of this label. Read more. last updated 10/25/2013 FDA Label for dextromethorphan, quinidine and CYP2D6 O...of NUEDEXTA is a CYP2D6 inhibitor used to increase the plasma availability of dextromethorphan, which is met... 05/02/2014 European Medicines Agency (EMA) Label for dextromethorphan, quinidine

  10. 3D/2D Registration of medical images

    OpenAIRE

    Tomaževič, D.

    2008-01-01

    The topic of this doctoral dissertation is registration of 3D medical images to corresponding projective 2D images, referred to as 3D/2D registration. There are numerous possible applications of 3D/2D registration in image-aided diagnosis and treatment. In most of the applications, 3D/2D registration provides the location and orientation of the structures in a preoperative 3D CT or MR image with respect to intraoperative 2D X-ray images. The proposed doctoral dissertation tries to find origin...

  11. Analysis list: Mef2d [Chip-atlas[Archive

    Lifescience Database Archive (English)

    Full Text Available Mef2d Muscle + mm9 http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/target/Mef2d.1.ts...v http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/target/Mef2d.5.tsv http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/target/Mef2d....10.tsv http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/colo/Mef2d.Muscle.tsv http://dbarchive.biosciencedbc.jp/kyushu-u/mm9/colo/Muscle.gml ...

  12. CYP2D7 sequence variation interferes with TaqMan CYP2D6*15 and *35 genotyping

    Directory of Open Access Journals (Sweden)

    Amanda K Riffel

    2016-01-01

    Full Text Available TaqMan™ genotyping assays are widely used to genotype CYP2D6, which encodes a major drug metabolizing enzyme. Assay design for CYP2D6 can be challenging owing to the presence of two pseudogenes, CYP2D7 and CYP2D8, structural and copy number variation and numerous single nucleotide polymorphisms (SNPs some of which reflect the wild-type sequence of the CYP2D7 pseudogene. The aim of this study was to identify the mechanism causing false positive CYP2D6*15 calls and remediate those by redesigning and validating alternative TaqMan genotype assays. Among 13,866 DNA samples genotyped by the CompanionDx® lab on the OpenArray platform, 70 samples were identified as heterozygotes for 137Tins, the key SNP of CYP2D6*15. However, only 15 samples were confirmed when tested with the Luminex xTAG CYP2D6 Kit and sequencing of CYP2D6-specific long range (XL-PCR products. Genotype and gene resequencing of CYP2D6 and CYP2D7-specific XL-PCR products revealed a CC>GT dinucleotide SNP in exon 1 of CYP2D7 that reverts the sequence to CYP2D6 and allows a TaqMan assay PCR primer to bind. Because CYP2D7 also carries a Tins, a false-positive mutation signal is generated. This CYP2D7 SNP was also responsible for generating false-positive signals for rs769258 (CYP2D6*35 which is also located in exon 1. Although alternative CYP2D6*15 and *35 assays resolved the issue, we discovered a novel CYP2D6*15 subvariant in one sample that carries additional SNPs preventing detection with the alternate assay. The frequency of CYP2D6*15 was 0.1% in this ethnically diverse U.S. population sample. In addition, we also discovered linkage between the CYP2D7 CC>GT dinucleotide SNP and the 77G>A (rs28371696 SNP of CYP2D6*43. The frequency of this tentatively functional allele was 0.2%. Taken together, these findings emphasize that regardless of how careful genotyping assays are designed and evaluated before being commercially marketed, rare or unknown SNPs underneath primer and/or probe

  13. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.

  14. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  15. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  16. A micromachined ultrasonic power receiver for biomedical implants

    Science.gov (United States)

    Basaeri, Hamid; Roundy, Shad

    2017-04-01

    Bio-implantable medical devices need a reliable and stable source of power to perform effectively. Although batteries can be the first candidate to power implantable devices as they provide high energy density, they cannot supply power for long periods of time and therefore, they must be periodically replaced or recharged. Battery replacement is particularly difficult as it requires surgery. In this paper, we develop a micromachined ultrasonic power generating receiver with a size of 3.5mmx3.5mm capable of providing sufficient power for implantable medical devices. The ultrasound receiver takes the form of a unimorph diaphragm consisting of PZT on silicon. We dice bulk PZT with a thickness of 127 μm and bond the diced pieces to a silicon wafer. In order to get a 50 μm thick PZT layer, which is needed for optimal power transfer, we mechanically lap and polish the bonded PZT. We numerically investigate the performance of the fabricated receiver with inner and outer electrodes on the surface of the PZT. Using COMSOL simulations, we analyze the effect of different sizes of inner and outer electrodes under the actuation of the inner electrode in order to find the optimum electrode sizes. We show that when the transmitter is generating an input power less than Food and Drug Administration limits, the receiver can provide sufficient voltage and power for many implantable devices. Furthermore, the process developed can be used to fabricate significantly smaller devices than the one characterized, which enables further miniaturization of bio-implanted systems.

  17. Rapid prototyping of a micro pump with laser micromachining

    Science.gov (United States)

    Wong, C. Channy; Chu, Dahwey; Liu, Sally L.; Tuck, Melanie R.; Mahmud, Zahid; Amatucci, Vincent A.

    1995-09-01

    A microelectrohydrodynamic (EHD) injection pump has been developed using laser micromachining technoogy. Two desings have been fabricated, tested, and evaluated. The first design has two silicon pieces with KOH-etched wells which are stacked on the tpo of each other. The wells are etched on one side of the wafer and gold is deposited on the other side to serve as the pump electrodes. A Nd:YAG laser is used to drill an array of circular holes in the well region of both silicon parts. This creates a grid distribution with a square pattern. Next the well regions of the silicon parts are aligned, and the parts are bonded together using a Staystik thermoplastic. The pump unit is then mounted into a ceramic package with a large hole drilled in the bottom of the package to permit fluid flow. Aluminum ribbon wire bonds are used to connect the pump electrodes to the package leads. Isolation of metallization and wires is achieved by filling the package well and coating the wires with polyimide. When a voltage is applied at the electrodes, ions are injected into the working fluid, such as an organic solvent, thus inducing flow. The second design has the silicon parts oriented 'back-to-back' and bonded together with Stayform. A 'back-to-back' design will decrease the grid distance so that a smaller voltage is required for pumping. Preliminary results have demonstrated that this micropump can achieve a pressure head of about 287 Pa with an applied voltage of 120 Volt.

  18. Fiber inline Michelson interferometer fabricated by one-step femtosecond laser micromachining for sensing applications

    Science.gov (United States)

    Yuan, Lei; Wu, Hongbin; Wang, Cong; Yu, Yingyu; Wang, Sumei; Xiao, Hai

    2013-12-01

    A fiber inline Michelson interferometer fiber optic sensor was presented for sensing applications, including high temperature performance and refractive index change. The sensor was fabricated using one-step femtosecond (fs) laser micromachining technique. A step structure at the tip of a single mode optical fiber was formed during the micromachining process. The device had a loss of 16 dB and an interference visibility exceeding 18 dB. The capability of this device for temperature sensing up to 1000 °C and refractive index sensing application in various concentrations of ethanol solution were all demonstrated.

  19. Femtosecond laser micromachining of compound parabolic concentrator fiber tipped glucose sensors

    DEFF Research Database (Denmark)

    Hassan, Hafeez Ul; Lacraz, Amédée; Kalli, Kyriacos

    2017-01-01

    in fluorescence pickup efficiency of a Förster resonance energy transfer-based POF glucose sensor. A Zemax model of the CPC-tipped sensor predicts an optimal improvement of a factor of 3.96 compared to the sensor with a plane-cut fiber tip. The fs laser micromachined CPC tip showed an increase of a factor of 3......We report on highly accurate femtosecond (fs) laser micromachining of a compound parabolic concentrator (CPC) fiber tip on a polymer optical fiber (POF). The accuracy is reflected in an unprecedented correspondence between the numerically predicted and experimentally found improvement...

  20. The role of light-induced nanostructures in femtosecond laser micromachining with vector and scalar pulses.

    Science.gov (United States)

    Hnatovsky, Cyril; Shvedov, Vladlen G; Krolikowski, Wieslaw

    2013-05-20

    In this article we compare the results of micromachining of fused silica and silicon with tightly focused scalar (viz., circularly and linearly polarized) and vector (viz., azimuthally and radially polarized) femtosecond laser pulses. We show that drilling with radially polarized pulses produces holes with smoother and better-delineated walls compared with the other polarizations used, whereas linearly polarized pulses can machine 20-nm wide single grooves in fused silica when the electric field of the pulse is aligned perpendicular to the cutting direction. The observed polarization-controlled micromachining is due to the formation of sub-diffraction-limited nanostructures that are optically produced in the multi-pulse irradiation regime.

  1. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  2. Backscattering in a 2D topological insulator and the conductivity of a 2D strip

    Science.gov (United States)

    Magarill, L. I.; Entin, M. V.

    2015-01-01

    A strip of the 2D HgTe topological insulator is studied. The same-spin edge states in an ideal system propagate in opposite directions on different sides of the strip and do not mix by tunneling. Impurities, edge irregularities, and phonons produce transitions between the counterpropagating edge states on different edges. This backscattering determines the conductivity of an infinitely long strip. The conductivity at finite temperature is determined in the framework of the kinetic equation. It is found that the conductivity exponentially grows with the strip width. In the same approximation the nonlocal resistance coefficients of a four-terminal strip are found.

  3. Porous Alumina Based Capacitive MEMS RH Sensor

    CERN Document Server

    Juhasz, L; Timar-Horvath, Veronika; Desmulliez, Marc; Dhariwal, Resh

    2008-01-01

    The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS MEMS processes and the methods which were used to characterize the thin film porous alumina sensing layer. The average sensitivity is approx. 15 pF/RH% which is more than a magnitude higher than the values found in the literature. The sensor is equipped with integrated resistive heating, which can be used for maintenance to reduce drift, or for keeping the sensing layer at elevated temperature, as an alternative method for temperature-dependence cancellation.

  4. CMOS Integrated Capacitive DC-DC Converters

    CERN Document Server

    Van Breussegem, Tom

    2013-01-01

    This book provides a detailed analysis of all aspects of capacitive DC-DC converter design: topology selection, control loop design and noise mitigation. Readers will benefit from the authors’ systematic overview that starts from the ground up, in-depth circuit analysis and a thorough review of recently proposed techniques and design methodologies.  Not only design techniques are discussed, but also implementation in CMOS is shown, by pinpointing the technological opportunities of CMOS and demonstrating the implementation based on four state-of-the-art prototypes.  Provides a detailed analysis of all aspects of capacitive DC-DC converter design;  Analyzes the potential of this type of DC-DC converter and introduces a number of techniques to unleash their full potential; Combines system theory with practical implementation techniques; Includes unique analysis of CMOS technology for this application; Provides in-depth analysis of four fabricated prototypes.

  5. Automatic Power Factor Correction Using Capacitive Bank

    Directory of Open Access Journals (Sweden)

    Mr.Anant Kumar Tiwari,

    2014-02-01

    Full Text Available The power factor correction of electrical loads is a problem common to all industrial companies. Earlier the power factor correction was done by adjusting the capacitive bank manually [1]. The automated power factor corrector (APFC using capacitive load bank is helpful in providing the power factor correction. Proposed automated project involves measuring the power factor value from the load using microcontroller. The design of this auto-adjustable power factor correction is to ensure the entire power system always preserving unity power factor. The software and hardware required to implement the suggested automatic power factor correction scheme are explained and its operation is described. APFC thus helps us to decrease the time taken to correct the power factor which helps to increase the efficiency.

  6. The Pyramidal Capacitated Vehicle Routing Problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...... found in many optimal solutions to CVRP instances. An optimal solution to the PCVRP may therefore be useful in itself as a heuristic solution to the CVRP. Further, an attempt can be made to find an even better CVRP solution by solving a TSP, possibly leading to a non-pyramidal route, for each...... of the routes in the PCVRP solution. This paper develops an exact branch-and-cut-and-price (BCP) algorithm for the PCVRP. At the pricing stage, elementary routes can be computed in pseudo-polynomial time in the PCVRP, unlike in the CVRP. We have therefore implemented pricing algorithms that generate only...

  7. Locating Depots for Capacitated Vehicle Routing

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Nagarajan, Viswanath

    2016-01-01

    We study a location-routing problem in the context of capacitated vehicle routing. The input to the k-location capacitated vehicle routing problem (k-LocVRP) consists of a set of demand locations in a metric space and a fleet of k identical vehicles, each of capacity Q. The objective is to locate k...... depots, one for each vehicle, and compute routes for the vehicles so that all demands are satisfied and the total cost is minimized. Our main result is a constant-factor approximation algorithm for k-LocVRP. In obtaining this result, we introduce a common generalization of the k-median and minimum...... spanning tree problems (called k median forest), which might be of independent interest. We give a local-search based (3+ε)-approximation algorithm for k median forest, which leads to a (12+ε)-approximation algorithm for k-LocVRP, for any constant ε>0....

  8. A Versatile Prototyping System for Capacitive Sensing

    Directory of Open Access Journals (Sweden)

    Daniel HRACH

    2008-04-01

    Full Text Available This paper presents a multi-purpose and easy to handle rapid prototyping platform that has been designed for capacitive measurement systems. The core of the prototype platform is a Digital Signal Processor board that allows for the entire data acquisition, data (pre- processing and storage, and communication with any host computer. The platform is running on uCLinux operating system and features the possibility of a fast design and evaluation of capacitive sensor developments. To show the practical benefit of the prototyping platform, three exemplary applications are presented. For all applications, the platform is just plugged to the electrode structure of the sensor front-end without the need for analogue signal pre-conditioning.

  9. 2D MOF Nanoflake-Assembled Spherical Microstructures for Enhanced Supercapacitor and Electrocatalysis Performances

    Science.gov (United States)

    Xia, Huicong; Zhang, Jianan; Yang, Zhao; Guo, Shiyu; Guo, Shihui; Xu, Qun

    2017-10-01

    Metal-organic frameworks (MOFs) are of great interest as potential electrochemically active materials. However, few studies have been conducted into understanding whether control of the shape and components of MOFs can optimize their electrochemical performances due to the rational realization of their shapes. Component control of MOFs remains a significant challenge. Herein, we demonstrate a solvothermal method to realize nanostructure engineering of 2D nanoflake MOFs. The hollow structures with Ni/Co- and Ni-MOF (denoted as Ni/Co-MOF nanoflakes and Ni-MOF nanoflakes) were assembled for their electrochemical performance optimizations in supercapacitors and in the oxygen reduction reaction (ORR). As a result, the Ni/Co-MOF nanoflakes exhibited remarkably enhanced performance with a specific capacitance of 530.4 F g-1 at 0.5 A g-1 in 1 M LiOH aqueous solution, much higher than that of Ni-MOF (306.8 F g-1) and ZIF-67 (168.3 F g-1), a good rate capability, and a robust cycling performance with no capacity fading after 2000 cycles. Ni/Co-MOF nanoflakes also showed improved electrocatalytic performance for the ORR compared to Ni-MOF and ZIF-67. The present work highlights the significant role of tuning 2D nanoflake ensembles of Ni/Co-MOF in accelerating electron and charge transportation for optimizing energy storage and conversion devices. [Figure not available: see fulltext.

  10. Evaluation of a Capacitance Scaling System

    Science.gov (United States)

    2007-01-01

    2009 at 11:32 from IEEE Xplore . Restrictions apply. Report Documentation Page Form ApprovedOMB No. 0704-0188 Public reporting burden for the...Downloaded on January 30, 2009 at 11:32 from IEEE Xplore . Restrictions apply. 2162 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 56, NO. 6...30, 2009 at 11:32 from IEEE Xplore . Restrictions apply. AVRAMOV-ZAMUROVIC et al.: EVALUATION OF A CAPACITANCE SCALING SYSTEM 2163 measured to vary by

  11. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    OpenAIRE

    2016-01-01

    The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FE...

  12. Residual lens effects in 2D mode of auto-stereoscopic lenticular-based switchable 2D/3D displays

    Science.gov (United States)

    Sluijter, M.; IJzerman, W. L.; de Boer, D. K. G.; de Zwart, S. T.

    2006-04-01

    We discuss residual lens effects in multi-view switchable auto-stereoscopic lenticular-based 2D/3D displays. With the introduction of a switchable lenticular, it is possible to switch between a 2D mode and a 3D mode. The 2D mode displays conventional content, whereas the 3D mode provides the sensation of depth to the viewer. The uniformity of a display in the 2D mode is quantified by the quality parameter modulation depth. In order to reduce the modulation depth in the 2D mode, birefringent lens plates are investigated analytically and numerically, by ray tracing. We can conclude that the modulation depth in the 2D mode can be substantially decreased by using birefringent lens plates with a perfect index match between lens material and lens plate. Birefringent lens plates do not disturb the 3D performance of a switchable 2D/3D display.

  13. Evaluation of EHD films by electrical capacitance

    Science.gov (United States)

    Jablonka, Karolina; Glovnea, Romeo; Bongaerts, Jeroen

    2012-09-01

    The elastohydrodynamic (EHD) lubrication regime occurs in many machine elements where a combination of hydrodynamic effect, elastic deformation of the loaded surfaces and increase in the viscosity of the lubricant with pressure ensures the formation of a very thin, but continuous film of lubricant separating the contacting surfaces. Electrical methods to determine this film's thickness have preceded optical methods, which are widely used today. Although they generally give more qualitative thickness information, electrical methods have the main advantage that they can be applied to metallic contacts in machines, which makes them useful tools in the study of elastohydrodynamically lubricated contacts. This paper is part of a larger study on the application of electrical capacitance for the evaluation of film formation in EHD contacts. The main focus is on the quantitative measurements of film thickness using electrical capacitance. A new approach allowing the lubricant film thickness to be extracted from the measured capacitance is developed using a chromium-coated glass disc and subsequently applied to a steel-on-steel contact. The results show good agreement with optical measurements and theoretical models over a range of film thickness.

  14. Effect of Astaxanthin on Human Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Luciana Bordin

    2013-06-01

    Full Text Available In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS plays a key role in causing cells to undergo a massive acrosome reaction (AR. Astaxanthin (Asta, a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC. Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P pattern and percentages of ARC and non-viable cells (NVC. Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells.

  15. A new desalination technique using capacitive deionization

    Science.gov (United States)

    Rostamy, Mohammad Sajjad; Khashechi, Morteza; Pipelzadeh, Ehsan; desalination Team

    2016-11-01

    Capacitive deionization (CDI) is an emerging energy efficient, low pressure and low capital intensive desalination process where ions are separated by a pure electrostatic force imposed by a small bias potential as low as 1 V That funded by an external Renewable (Solar) power supply to materials with high specific surface area. The main objective of this configuration is to separate the cation and anions on oppositely charged electrodes. Various electrode materials have been developed in the past, which have suffered from instability and lack of performance. Preliminary experimental results using carbon black, graphite powder, graphene ∖graphite ∖PTFE (Active ∖Conductive ∖binder), show that the graphene reduced via urea method is a suitable method to develop CDI electrode materials with capacitance as high as 52.2 mg/g for free standing graphene electrode. The focus of these studies has been mainly on developing electrodes with high specific surface area, high capacitance, excellent electronic conductivity and fast charge discharge cycles for desalination. Although some progress has been made, production of efficient and stable carbon based electrode materials for large scale desalination has not been fully realized.

  16. Capacitive Structures for Gas and Biological Sensing

    KAUST Repository

    Sapsanis, Christos

    2015-04-01

    The semiconductor industry was benefited by the advances in technology in the last decades. This fact has an impact on the sensors field, where the simple transducer was evolved into smart miniaturized multi-functional microsystems. However, commercially available gas and biological sensors are mostly bulky, expensive, and power-hungry, which act as obstacles to mass use. The aim of this work is gas and biological sensing using capacitive structures. Capacitive sensors were selected due to its design simplicity, low fabrication cost, and no DC power consumption. In the first part, the dominant structure among interdigitated electrodes (IDEs), fractal curves (Peano and Hilbert) and Archimedean spiral was investigated from capacitance density perspective. The investigation consists of geometrical formula calculations, COMSOL Multiphysics simulations and cleanroom fabrication of the capacitors on a silicon substrate. Moreover, low-cost fabrication on flexible plastic PET substrate was conducted outside cleanroom with rapid prototyping using a maskless laser etching. The second part contains the humidity, Volatile Organic compounds (VOCs) and Ammonia sensing of polymers, Polyimide and Nafion, and metal-organic framework (MOF), Cu(bdc)2.xH2O using IDEs and tested in an automated gas setup for experiment control and data extraction. The last part includes the biological sensing of C - reactive protein (CRP) quantification, which is considered as a biomarker of being prone to cardiac diseases and Bovine serum albumin (BSA) protein quantification, which is used as a reference for quantifying unknown proteins.

  17. Direct writing on paper of foldable capacitive touch pads with silver nanowire inks.

    Science.gov (United States)

    Li, Ruo-Zhou; Hu, Anming; Zhang, Tong; Oakes, Ken D

    2014-12-10

    Paper-based capacitive touch pads can be fabricated utilizing high-concentration silver nanowire inks needle-printed directly onto paper substrates through a 2D programmable platform. Post deposition, silver nanowire tracks can be photonically sintered using a camera flash to reduce sheet resistance similar to thermal sintering approaches. Touch pad sensors on a variety of paper substrates can be achieved with optimized silver nanowire tracks. Rolling and folding trials, which yielded only modest changes in capacitance and no loss of function, coupled with touch pad functionality on curved surfaces, suggest sufficient flexibility and durability for paper substrate touch pads to be used in diverse applications. A simplified model to predict touch pad capacitance variation ranges with differing touch conditions was developed, with good agreement against experimental results. Such paper-based touch pads have the advantage of simple structure, easy fabrication, and fast sintering, which holds promise for numerous commercial applications including low-cost portable devices where ultrathin and lightweight features, coupled with reliable bending stability are desirable.

  18. Capacitance of Ti3C2Tx MXene in ionic liquid electrolyte

    Science.gov (United States)

    Lin, Zifeng; Barbara, Daffos; Taberna, Pierre-Louis; Van Aken, Katherine L.; Anasori, Babak; Gogotsi, Yury; Simon, Patrice

    2016-09-01

    Ti3C2Tx MXene, a two-dimensional (2D) early transition metal carbide, has shown an extremely high volumetric capacitance in aqueous electrolytes, but in a narrow voltage window (less than 1.23 V). The utilization of MXene materials in ionic liquid electrolytes with a large voltage window has never been addressed. Here, we report the preparation of the Ti3C2Tx MXene ionogel film by vacuum filtration for use as supercapacitor electrodes operating in 1-Ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide (EMI-TFSI) neat ionic liquid electrolyte. Due to the disordered structure of the Ti3C2Tx hydrogel film and a stable spacing after vacuum drying, achieved through ionic liquid electrolyte immersion of the Ti3C2Tx hydrogel film, the Ti3C2Tx surface became accessible to EMI+ and TFSI- ions. A capacitance of 70 F g-1 together with a large voltage window of 3 V was obtained at a scan rate of 20 mV s-1 in neat EMI-TFSI electrolyte. The electrochemical signature indicates a capacitive behavior even at a high scan rate (500 mV s-1) and a high power performance. This work opens up the possibilities of using MXene materials with various ionic liquid electrolytes.

  19. Functional characterization of a first avian cytochrome P450 of the CYP2D subfamily (CYP2D49.

    Directory of Open Access Journals (Sweden)

    Hua Cai

    Full Text Available The CYP2D family members are instrumental in the metabolism of 20-25% of commonly prescribed drugs. Although many CYP2D isoforms have been well characterized in other animal models, research concerning the chicken CYP2Ds is limited. In this study, a cDNA encoding a novel CYP2D enzyme (CYP2D49 was cloned from the chicken liver for the first time. The CYP2D49 cDNA contained an open reading frame of 502 amino acids that shared 52%-57% identities with other CYP2Ds. The gene structure and neighboring genes of CYP2D49 are conserved and similar to those of human CYP2D6. Additionally, similar to human CYP2D6, CYP2D49 is un-inducible in the liver and expressed predominantly in the liver, kidney and small intestine, with detectable levels in several other tissues. Metabolic assays of the CYP2D49 protein heterologously expressed in E. coli and Hela cells indicated that CYP2D49 metabolized the human CYP2D6 substrate, bufuralol, but not debrisoquine. Moreover, quinidine, a potent inhibitor of human CYP2D6, only inhibited the bufuralol 1'-hydroxylation activity of CYP2D49 to a negligible degree. All these results indicated that CYP2D49 had functional characteristics similar to those of human CYP2D6 but measurably differed in the debrisoquine 4'-hydroxylation and quinidine inhibitory profile. Further structure-function investigations that employed site-directed mutagenesis and circular dichroism spectroscopy identified the importance of Val-126, Glu-222, Asp-306, Phe-486 and Phe-488 in keeping the enzymatic activity of CYP2D49 toward bufuralol as well as the importance of Asp-306, Phe-486 and Phe-488 in maintaining the conformation of CYP2D49 protein. The current study is only the first step in characterizing the metabolic mechanism of CYP2D49; further studies are still required.

  20. Enhanced energy density of a supercapacitor using 2D CoMoO4 ultrathin nanosheets and asymmetric configuration

    Science.gov (United States)

    Zhao, Yunxuan; Liu, Zailun; Gu, Wenhao; Zhai, Yifei; Teng, Yiran; Teng, Fei

    2016-12-01

    Developing a high energy density micro-supercapacitor still remains a big challenge. In this paper, a two-dimensional (2D) CoMoO4 ultrathin nanosheet (NS)-based asymmetric supercapacitor (ASC) is fabricated. It is found that the CoMoO4 NS electrode processes a high specific capacitance (153.2 F g-1) at a current density of 1 mA cm-2 and this ASC can deliver an energy density of 0.313 mWh cm-3 at a power density of 80 mW cm-3, which is higher than that reported in the literature. Moreover, the ASC can drive a light emitting diode (3 mm diameter, red) to work for 6 min after being charged for 10 s. After 5000 cycles, 77.37% of capacitance still remains. We maintain that the ultrathin thickness can significantly shorten the diffusion paths for both electrons and ions, thus leading to fast electron transport and ion diffusion rates. Our results demonstrate that 2D ultrathin NSs could be a new, promising candidate for energy conversion/storage devices, which could offer more accommodating sites for ion intercalation.

  1. The No-Hair Conjecture in 2D Dilaton Supergravity

    CERN Document Server

    Gamboa-Rios, J

    1993-01-01

    We study two dimensional dilaton gravity and supergravity following hamiltonian methods. Firstly, we consider the structure of constraints of 2D dilaton gravity and then the 2D dilaton supergravity is obtained taking the squere root of the bosonic constraints. We integrate exactly the equations of motion in both cases and we show that the solutions of the equation of motion of 2D dilaton supergravity differs from the solutions of 2D dilaton gravity only by boundary conditions on the fermionic variables, i.e. the black holes of 2D dilaton supergravity theory are exactly the same black holes of 2D bosonic dilaton gravity modulo supersymmetry transformations. This result is the bidimensional analogue of the no-hair theorem for supergravity.

  2. Scalable Fabrication of 2D Semiconducting Crystals for Future Electronics

    Directory of Open Access Journals (Sweden)

    Jiantong Li

    2015-12-01

    Full Text Available Two-dimensional (2D layered materials are anticipated to be promising for future electronics. However, their electronic applications are severely restricted by the availability of such materials with high quality and at a large scale. In this review, we introduce systematically versatile scalable synthesis techniques in the literature for high-crystallinity large-area 2D semiconducting materials, especially transition metal dichalcogenides, and 2D material-based advanced structures, such as 2D alloys, 2D heterostructures and 2D material devices engineered at the wafer scale. Systematic comparison among different techniques is conducted with respect to device performance. The present status and the perspective for future electronics are discussed.

  3. Optimization and practical implementation of ultrafast 2D NMR experiments

    OpenAIRE

    Queiroz Júnior,Luiz H. K.; Antonio G. Ferreira; Patrick Giraudeau

    2013-01-01

    Ultrafast 2D NMR is a powerful methodology that allows recording of a 2D NMR spectrum in a fraction of second. However, due to the numerous non-conventional parameters involved in this methodology its implementation is no trivial task. Here, an optimized experimental protocol is carefully described to ensure efficient implementation of ultrafast NMR. The ultrafast spectra resulting from this implementation are presented based on the example of two widely used 2D NMR experiments, COSY and HSQC...

  4. High aspect ratio transmission line circuits micromachined in silicon

    Science.gov (United States)

    Todd, Shane Truman

    The performance of complimentary metal-oxide-semiconductor (CMOS) monolithic microwave integrated circuits (MMICs) fabricated on silicon has improved dramatically. The scaling down of silicon transistors has increased the maximum frequency of transistors to the point where silicon MMICs have become a viable alternative to compound semiconductor MMICs in certain applications. A fundamental problem still exists in silicon MMICs however in that transmission lines fabricated on silicon can suffer from high loss due to the finite conductivity of the silicon substrate. A novel approach for creating low-loss transmission lines on silicon is presented in this work. Low-loss transmission lines are created on low resistivity silicon by using a micromachining method that combines silicon deep reactive ion etching (DRIE), thermal oxidation, electroplating, and planarization. Two types of high aspect ratio transmission lines are created with this method including high aspect ratio coplanar waveguide (hicoplanar) and semi-rectangular coaxial (semicoaxial). Transmission lines with impedances ranging from 20--80 O have been fabricated with minimum measured loss lower than 1 dB/cm at 67 GHz. Low-loss dielectrics are created for the high aspect ratio transmission lines using the mesa merging method. The mesa merging method works by creating silicon mesa arrays using DRIE and then converting and merging the mesa arrays into a solid oxide dielectric using thermal oxidation. The transmission lines are designed so that the fields penetrate the low-loss oxide dielectric and are isolated from the lossy silicon substrate. The mesa merging method has successfully created large volume oxide with depth up to 65 microm and width up to 240 microm in short oxidation times. Other advantages of the high aspect ratio transmission lines are demonstrated including low-loss over a wide impedance range, high isolation, and high coupling for coupled-line circuits. Transmission line models have been

  5. Coupling of a CMOS Optical Sensor to a Micromachined Deformable Mirror with an Adaline Neural Method

    NARCIS (Netherlands)

    De Lima Monteiro, D.W.; Ferreira, A.I.; Teixeira, F.B.; Melo, J.G.M.; Vdovin, G.V.

    2006-01-01

    We report on the preliminary results of an Adaline neural method for the coupling of a custom CMOS wavefront sensor to a micromachined adaptive mirror. The algorithm does not rely on a fixed basis matrix -as opposed to traditional methods-, offers excellent immunity to round-off errors and admits re

  6. Coupling of a CMOS Optical Sensor to a Micromachined Deformable Mirror with an Adaline Neural Method

    NARCIS (Netherlands)

    De Lima Monteiro, D.W.; Ferreira, A.I.; Teixeira, F.B.; Melo, J.G.M.; Vdovin, G.V.

    2006-01-01

    We report on the preliminary results of an Adaline neural method for the coupling of a custom CMOS wavefront sensor to a micromachined adaptive mirror. The algorithm does not rely on a fixed basis matrix -as opposed to traditional methods-, offers excellent immunity to round-off errors and admits re

  7. Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

    NARCIS (Netherlands)

    Sarajlic, Edin; Vermeer, Rolf; Delalande, M.Y.; Siekman, Martin Herman; Huijink, R.; Fujita, H.; Abelmann, Leon

    2010-01-01

    We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon

  8. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, H.; Vermeer, C.H.; Vanapalli, S.; Holland, H.J.; Brake, ter H.J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has t

  9. Analysis of Drift Errors in the JPL/UCLA Micromachined Gyroscope

    Science.gov (United States)

    Chakraborty, I.

    1996-01-01

    The model of the JPL/UCLA micromachined vibratory gyroscope will be enhanced to include time varying effects. First, they will be shown to exist through trends in the experimental results. Causes of mechanical error will be further explained by analyzing possible perturbations to the physical model.

  10. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    NARCIS (Netherlands)

    Kleijhorst, R.A.; Offerhaus, H.L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given

  11. Deflection and maximum load of microfiltration membrane sieve made with silicon micromachining

    NARCIS (Netherlands)

    Rijn, van Cees; Wekken, van der Michiel; Nijdam, Wietze; Elwenspoek, Miko

    1997-01-01

    With the use of silicon micromachining, an inorganic membrane sieve for microfiltration has been constructed having a silicon nitride membrane layer with thickness typically 1 ¿m and perforations typically between 0.5 ¿m and 10 ¿m in diameter. As a support a ¿100¿-silicon wafer with openings of 1000

  12. Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

    Directory of Open Access Journals (Sweden)

    K. M. Tanvir Ahmmed

    2014-11-01

    Full Text Available Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.

  13. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, Haishan; Vermeer, Cristian Hendrik; Vanapalli, Srinivas; Holland, Herman J.; ter Brake, Hermanus J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has

  14. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  15. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  16. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    Science.gov (United States)

    Doraiswamy, A.; Patz, T.; Narayan, R. J.; Dinescu, M.; Modi, R.; Auyeung, R. C. Y.; Chrisey, D. B.

    2006-04-01

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 μm wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 × 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication.

  17. Chloride Is Essential for Capacitation and for the Capacitation-associated Increase in Tyrosine Phosphorylation*

    Science.gov (United States)

    Wertheimer, Eva V.; Salicioni, Ana M.; Liu, Weimin; Trevino, Claudia L.; Chavez, Julio; Hernández-González, Enrique O.; Darszon, Alberto; Visconti, Pablo E.

    2008-01-01

    After epididymal maturation, sperm capacitation, which encompasses a complex series of molecular events, endows the sperm with the ability to fertilize an egg. This process can be mimicked in vitro in defined media, the composition of which is based on the electrolyte concentration of the oviductal fluid. It is well established that capacitation requires Na+, \\documentclass[10pt]{article} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{pmc} \\usepackage[Euler]{upgreek} \\pagestyle{empty} \\oddsidemargin -1.0in \\begin{document} \\begin{equation*}{\\mathrm{HCO}}_{3}^{-}\\end{equation*}\\end{document}, Ca2+, and a cholesterol acceptor; however, little is known about the function of Cl– during this important process. To determine whether Cl–, in addition to maintaining osmolarity, actively participates in signaling pathways that regulate capacitation, Cl– was replaced by either methanesulfonate or gluconate two nonpermeable anions. The absence of Cl– did not affect sperm viability, but capacitation-associated processes such as the increase in tyrosine phosphorylation, the increase in cAMP levels, hyperactivation, the zona pellucidae-induced acrosome reaction, and most importantly, fertilization were abolished or significantly reduced. Interestingly, the addition of cyclic AMP agonists to sperm incubated in Cl–-free medium rescued the increase in tyrosine phosphorylation and hyperactivation suggesting that Cl– acts upstream of the cAMP/protein kinase A signaling pathway. To investigate Cl– transport, sperm incubated in complete capacitation medium were exposed to a battery of anion transport inhibitors. Among them, bumetanide and furosemide, two blockers of Na+/K+/Cl– cotransporters (NKCC), inhibited all capacitation-associated events, suggesting that these transporters may mediate Cl– movements in sperm. Consistent with these results, Western blots

  18. Effect of axial force on the performance of micromachined vibratory rate gyroscopes.

    Science.gov (United States)

    Hou, Zhanqiang; Xiao, Dingbang; Wu, Xuezhong; Dong, Peitao; Chen, Zhihua; Niu, Zhengyi; Zhang, Xu

    2011-01-01

    It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with slanted beams were proposed to evaluate the effect of the axial force. One type was suspended with a clamped-free (C-F) beam and the other one was suspended with a clamped-clamped (C-C) beam. Their drive modes are the bending of the slanted beam, and their sense modes are the torsion of the slanted beam. The relationships between the resonant frequencies of the two types were developed. The prototypes were packaged by vacuum under 0.1 mbar and an analytical solution for the axial force effect on the resonant frequency was obtained. The temperature dependent performances of the operated mode responses of the micromachined gyroscopes were measured. The experimental values of the temperature coefficients of resonant frequencies (TCF) due to axial force were 101.5 ppm/°C for the drive mode and 21.6 ppm/°C for the sense mode. The axial force has a great influence on the modal frequency of the micromachined gyroscopes suspended with a C-C beam, especially for the flexure mode. The quality factors of the operated modes decreased with increasing temperature, and changed drastically when the micromachined gyroscopes worked at higher temperatures.

  19. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    Directory of Open Access Journals (Sweden)

    Zhengyi Niu

    2010-12-01

    Full Text Available It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with slanted beams were proposed to evaluate the effect of the axial force. One type was suspended with a clamped-free (C-F beam and the other one was suspended with a clamped-clamped (C-C beam. Their drive modes are the bending of the slanted beam, and their sense modes are the torsion of the slanted beam. The relationships between the resonant frequencies of the two types were developed. The prototypes were packaged by vacuum under 0.1 mbar and an analytical solution for the axial force effect on the resonant frequency was obtained. The temperature dependent performances of the operated mode responses of the micromachined gyroscopes were measured. The experimental values of the temperature coefficients of resonant frequencies (TCF due to axial force were 101.5 ppm/°C for the drive mode and 21.6 ppm/°C for the sense mode. The axial force has a great influence on the modal frequency of the micromachined gyroscopes suspended with a C-C beam, especially for the flexure mode. The quality factors of the operated modes decreased with increasing temperature, and changed drastically when the micromachined gyroscopes worked at higher temperatures.

  20. 2D quasi-ordered nitrogen-enriched porous carbon nanohybrids for high energy density supercapacitors

    Science.gov (United States)

    Kan, Kan; Wang, Lei; Yu, Peng; Jiang, Baojiang; Shi, Keying; Fu, Honggang

    2016-05-01

    Two-dimensional (2D) quasi-ordered nitrogen-enriched porous carbon (QNPC) nanohybrids, with the characteristics of an ultrathin graphite nanosheet framework and thick quasi-ordered nitrogen-doped carbon cladding with a porous texture, have been synthesized via an in situ polymerization assembly method. In the synthesis, the expandable graphite (EG) is enlarged by an intermittent microwave method, and then aniline monomers are intercalated into the interlayers of the expanded EG with the assistance of a vacuum. Subsequently, the intercalated aniline monomers could assemble on the interlayer surface of the expanded EG, accompanied by the in situ polymerization from aniline monomers to polyaniline. Meanwhile, the expanded EG could be exfoliated to graphite nanosheets. By subsequent pyrolysis and activation processes, the QNPC nanohybrids could be prepared. As supercapacitor electrodes, a typical QNPC12-700 sample derived from the precursor containing an EG content of 12%, with a high level of nitrogen doping of 5.22 at%, offers a high specific capacitance of 305.7 F g-1 (1 A g-1), excellent rate-capability and long-term stability. Notably, an extremely high energy density of 95.7 Wh kg-1 at a power density of 449.7 W kg-1 in an ionic liquid electrolyte can be achieved. The unique structural features and moderate heteroatom doping of the QNPC nanohybrids combines electrochemical double layer and faradaic capacitance contributions, which make these nanohybrids ideal candidates as electrode materials for high-performance energy storage devices.Two-dimensional (2D) quasi-ordered nitrogen-enriched porous carbon (QNPC) nanohybrids, with the characteristics of an ultrathin graphite nanosheet framework and thick quasi-ordered nitrogen-doped carbon cladding with a porous texture, have been synthesized via an in situ polymerization assembly method. In the synthesis, the expandable graphite (EG) is enlarged by an intermittent microwave method, and then aniline monomers are

  1. An Incompressible 2D Didactic Model with Singularity and Explicit Solutions of the 2D Boussinesq Equations

    Science.gov (United States)

    Chae, Dongho; Constantin, Peter; Wu, Jiahong

    2014-09-01

    We give an example of a well posed, finite energy, 2D incompressible active scalar equation with the same scaling as the surface quasi-geostrophic equation and prove that it can produce finite time singularities. In spite of its simplicity, this seems to be the first such example. Further, we construct explicit solutions of the 2D Boussinesq equations whose gradients grow exponentially in time for all time. In addition, we introduce a variant of the 2D Boussinesq equations which is perhaps a more faithful companion of the 3D axisymmetric Euler equations than the usual 2D Boussinesq equations.

  2. A Active Micromachined Scalp Electrode Array for Eeg Signal Recording.

    Science.gov (United States)

    Alizadeh-Taheri, Babak

    This thesis describes the design, microfabrication, and testing of an active scalp EEG (electroencephalograph) electrode that has several distinct advantages over existing technologies. These advantages are: (1) no electrolyte used, (2) no skin preparation, (3) significantly reduced sensor size, and (4) compatibility with EEG monitoring systems. The active electrode array is an integrated system made of an array of capacitive sensors with local integrated circuitry housed in a package with batteries to power the circuitry. This level of integration was required to achieve the functional performance obtained by the electrode. The electrode consists of a silicon sensor substrate fabricated at UCD and a custom circuit substrate fabricated at Orbit Semiconductors, using a 2 μm analog CMOS technology. The circuitry was designed for low 1/f noise. One side of the sensor substrate holds four capacitive sensors with rm Si_3N _4 as the dielectric material. The opposite side holds aluminum pads for bonding to the circuit substrate. A via hole technology was developed to make electrical contact to both sides of the sensor substrate. The via holes are 200 μm square openings etched through the silicon by a reactive ion etching (RIE) process using an rm SF_6/O_2 gas mixture, oxidized, and then filled with sputtered aluminum for contacts through the substrate. The via holes have an aspect ratio of 2:1 (length of opening to depth of hole). Silicon RIE etch rates of up to 18 mu/hr were obtained under optimum conditions, using a 0.8 μm aluminum mask. The circuit and sensor substrates were bonded with silver adhesive, and wire bonding was used to make electrical contacts between the substrates. The two substrates were then integrated in a custom package for testing. The electrode was tested on an electrical test bench and on human subjects in four modalities of EEG activity, namely: (1) spontaneous EEG, (2) sensory event-related potentials, (3) brain stem potentials, and (4

  3. Stray Capacitances of an Air-Cored Eddy Current Sensor

    Directory of Open Access Journals (Sweden)

    Yi Jia

    2009-12-01

    Full Text Available Stray capacitance of an air-cored eddy current sensor is one of the most crucial issues for successful development of an eddy current based residual stress assessment technology at frequency above 50 MHz. A two dimensional finite element model and an equivalent lumped capacitance network have been developed to accurately quantify overall stray capacitances of an air-cored eddy current sensor with specimen being tested. A baseline model was used to evaluate sensor design parameters, including the effects of pitch distance, trace width, trace thickness, number of turns, inner diameter, substrate thickness, lift-off distance, and dielectric constant of shim on the stray capacitances of the sensor. The results clearly indicate that an appropriate sensor design parameters could reduce the stray capacitance and improve the sensor performance. This research opens up a new design space to minimize stray capacitance effect and improve the sensor sensitivity and its lift-off uncertainty at elevated high frequencies.

  4. Tunable Lowpass Filter with RF MEMS Capacitance and Transmission Line

    Directory of Open Access Journals (Sweden)

    Shimul C. Saha

    2012-01-01

    Full Text Available We have presented an RF MEMS tuneable lowpass filter. Both distributed transmission lines and RF MEMS capacitances were used to replace the lumped elements. The use of RF MEMS capacitances gives the flexibility of tuning the cutoff frequency of the lowpass filter. We have designed a low-pass filter at 9–12 GHz cutoff frequency using the theory of stepped impedance transmission lines. A prototype of the filter has been fabricated using parallel plate capacitances. The variable shunt capacitances are formed by a combination of a number of parallel plate RF MEMS capacitances. The cutoff frequency is tuned from C to X band by actuating different combinations of parallel capacitive bridges. The measurement results agree well with the simulation result.

  5. Numerical analysis of capacitive pressure micro-sensors

    Institute of Scientific and Technical Information of China (English)

    WANG; Xiaomin; LI; Mingxuan; WANG; Chenghao

    2005-01-01

    Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.

  6. New Type of 2-D Laser Doppler Vibrometer

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    The fundamentals and method of 2-D laser Doppler vibrometer are introduced.The factors influencing the measuring accuracy are analyzed. Moreover, the circuit for signal processing is designed. The vibrating amplitude and frequency of 2-D vibration in wider range can be measured simultaneously in non-contact means,the measuring results are accurate.

  7. Animación 2D: curriculum vitae animado

    OpenAIRE

    CANTOS BELMONTE, CONSUELO

    2015-01-01

    Trabajo Fin de Grado de animación 2D donde un personaje (alter ego de la animadora) expone, mediante la interación con una Voz en Off y su sombra, el curriclum vitae de la animadora. Cantos Belmonte, C. (2014). Animación 2D: curriculum vitae animado. http://hdl.handle.net/10251/45910. Archivo delegado

  8. Symmetries and solvable models for evaporating 2D black holes

    CERN Document Server

    Cruz, J; Navarro-Salas, J; Talavera, C F

    1997-01-01

    We study the evaporation process of a 2D black hole in thermal equilibrium when the ingoing radiation is switched off suddenly. We also introduce global symmetries of generic 2D dilaton gravity models which generalize the extra symmetry of the CGHS model.

  9. From 2D Lithography to 3D Patterning

    NARCIS (Netherlands)

    Van Zeijl, H.W.; Wei, J.; Shen, C.; Verhaar, T.M.; Sarro, P.M.

    2010-01-01

    Lithography as developed for IC device fabrication is a high volume high accuracy patterning technology with strong 2 dimensional (2D) characteristics. This 2D nature makes it a challenge to integrate this technology in a 3 dimensional (3D) manufacturing environment. This article addresses the perfo

  10. Two-Dimensional Gel Electrophoresis and 2D-DIGE.

    Science.gov (United States)

    Meleady, Paula

    2018-01-01

    Two-dimensional polyacrylamide gel electrophoresis (2D-PAGE) continues to be one of the most versatile and widely used techniques to study the proteome of a biological system. In particular, a modified version of 2D-PAGE, two-dimensional difference gel electrophoresis (2D-DIGE), which uses differential labeling of protein samples with up to three fluorescent tags, offers greater sensitivity and reproducibility over conventional 2D-PAGE gels for differential quantitative analysis of protein expression between experimental groups. Both these methods have distinct advantages in the separation and identification of thousands of individual proteins species including protein isoforms and post-translational modifications. This review will discuss the principles of 2D-PAGE and 2D-DIGE including limitations to the methods. 2D-PAGE and 2D-DIGE continue to be popular methods in bioprocessing-related research (particularly on recombinant Chinese hamster ovary cells), which will also be discussed in the review chapter.

  11. From 2D Lithography to 3D Patterning

    NARCIS (Netherlands)

    Van Zeijl, H.W.; Wei, J.; Shen, C.; Verhaar, T.M.; Sarro, P.M.

    2010-01-01

    Lithography as developed for IC device fabrication is a high volume high accuracy patterning technology with strong 2 dimensional (2D) characteristics. This 2D nature makes it a challenge to integrate this technology in a 3 dimensional (3D) manufacturing environment. This article addresses the

  12. Cascading Constrained 2-D Arrays using Periodic Merging Arrays

    DEFF Research Database (Denmark)

    Forchhammer, Søren; Laursen, Torben Vaarby

    2003-01-01

    We consider a method for designing 2-D constrained codes by cascading finite width arrays using predefined finite width periodic merging arrays. This provides a constructive lower bound on the capacity of the 2-D constrained code. Examples include symmetric RLL and density constrained codes....... Numerical results for the capacities are presented....

  13. Energy Efficiency of D2D Multi-User Cooperation.

    Science.gov (United States)

    Zhang, Zufan; Wang, Lu; Zhang, Jie

    2017-03-28

    The Device-to-Device (D2D) communication system is an important part of heterogeneous networks. It has great potential to improve spectrum efficiency, throughput and energy efficiency cooperation of multiple D2D users with the advantage of direct communication. When cooperating, D2D users expend extraordinary energy to relay data to other D2D users. Hence, the remaining energy of D2D users determines the life of the system. This paper proposes a cooperation scheme for multiple D2D users who reuse the orthogonal spectrum and are interested in the same data by aiming to solve the energy problem of D2D users. Considering both energy availability and the Signal to Noise Ratio (SNR) of each D2D user, the Kuhn-Munkres algorithm is introduced in the cooperation scheme to solve relay selection problems. Thus, the cooperation issue is transformed into a maximum weighted matching (MWM) problem. In order to enhance energy efficiency without the deterioration of Quality of Service (QoS), the link outage probability is derived according to the Shannon Equation by considering the data rate and delay. The simulation studies the relationships among the number of cooperative users, the length of shared data, the number of data packets and energy efficiency.

  14. The relation between Euclidean and Lorentzian 2D quantum gravity

    NARCIS (Netherlands)

    Ambjørn, J.; Correia, J.; Kristjansen, C.; Loll, R.

    2006-01-01

    Starting from 2D Euclidean quantum gravity, we show that one recovers 2D Lorentzian quantum gravity by removing all baby universes. Using a peeling procedure to decompose the discrete, triangulated geometries along a one-dimensional path, we explicitly associate with each Euclidean space-time a (gen

  15. CMOS MEMS capacitive absolute pressure sensor

    Science.gov (United States)

    Narducci, M.; Yu-Chia, L.; Fang, W.; Tsai, J.

    2013-05-01

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal-oxide-semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa-1 in the pressure range of 0-300 kPa.

  16. Programmable differential capacitance-to-voltage converter for MEMS accelerometers

    Science.gov (United States)

    Royo, G.; Sánchez-Azqueta, C.; Gimeno, C.; Aldea, C.; Celma, S.

    2017-05-01

    Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.

  17. Magnetic field tunable capacitive dielectric:ionic-liquid sandwich composites

    Science.gov (United States)

    Wu, Ye; Bhalla, Amar; Guo, Ruyan

    2016-03-01

    We examined the tunability of the capacitance for GaFeO3-ionic liquid-GaFeO3 composite material by external magnetic and electric field. Up to 1.6 folds of capacitance tunability could be achieved at 957 kHz with voltage 4 V and magnetic field 0.02 T applied. We show that the capacitance enhancement is due to the polarization coupling between dielectric layer and ionic liquid layer.

  18. Carrier Statistics and Quantum Capacitance Models of Graphene Nanoscroll

    Directory of Open Access Journals (Sweden)

    M. Khaledian

    2014-01-01

    schematic perfect scroll-like Archimedes spiral. The DOS model was derived at first, while it was later applied to compute the carrier concentration and quantum capacitance model. Furthermore, the carrier concentration and quantum capacitance were modeled for both degenerate and nondegenerate regimes, along with examining the effect of structural parameters and chirality number on the density of state and carrier concentration. Latterly, the temperature effect on the quantum capacitance was studied too.

  19. Capacitive tool standoff sensor for dismantlement tasks

    Energy Technology Data Exchange (ETDEWEB)

    Schmitt, D.J.; Weber, T.M. [Sandia National Labs., Albuquerque, NM (United States); Liu, J.C. [Univ. of Illinois, Urbana, IL (United States)

    1996-12-31

    A capacitive sensing technology has been applied to develop a Standoff Sensor System for control of robotically deployed tools utilized in Decontamination and Dismantlement (D and D) activities. The system combines four individual sensor elements to provide non-contact, multiple degree-of-freedom control of tools at distances up to five inches from a surface. The Standoff Sensor has been successfully integrated to a metal cutting router and a pyrometer, and utilized for real-time control of each of these tools. Experiments demonstrate that the system can locate stationary surfaces with a repeatability of 0.034 millimeters.

  20. Synthesis and chemistry of elemental 2D materials

    Energy Technology Data Exchange (ETDEWEB)

    Mannix, Andrew J.; Kiraly, Brian T.; Hersam, Mark C.; Guisinger, Nathan P.

    2017-01-25

    2D materials have attracted considerable attention in the past decade for their superlative physical properties. These materials consist of atomically thin sheets exhibiting covalent in-plane bonding and weak interlayer and layer-substrate bonding. Following the example of graphene, most emerging 2D materials are derived from structures that can be isolated from bulk phases of layered materials, which form a limited library for new materials discovery. Entirely synthetic 2D materials provide access to a greater range of properties through the choice of constituent elements and substrates. Of particular interest are elemental 2D materials, because they provide the most chemically tractable case for synthetic exploration. In this Review, we explore the progress made in the synthesis and chemistry of synthetic elemental 2D materials, and offer perspectives and challenges for the future of this emerging field.

  1. 2D materials and van der Waals heterostructures.

    Science.gov (United States)

    Novoselov, K S; Mishchenko, A; Carvalho, A; Castro Neto, A H

    2016-07-29

    The physics of two-dimensional (2D) materials and heterostructures based on such crystals has been developing extremely fast. With these new materials, truly 2D physics has begun to appear (for instance, the absence of long-range order, 2D excitons, commensurate-incommensurate transition, etc.). Novel heterostructure devices--such as tunneling transistors, resonant tunneling diodes, and light-emitting diodes--are also starting to emerge. Composed from individual 2D crystals, such devices use the properties of those materials to create functionalities that are not accessible in other heterostructures. Here we review the properties of novel 2D crystals and examine how their properties are used in new heterostructure devices.

  2. A micromachined angular-acceleration sensor for geophysical applications

    Science.gov (United States)

    Liu, Huafeng; Pike, W. T.

    2016-10-01

    This paper presents an angular-acceleration sensor that works as either an angular accelerometer or a gravity gradiometer and is based on the micro electromechanical system (MEMS) technology. The changes in the angle of the sensor mass are sensed by a rotational capacitive array transducer that is formed by electrodes on both the stator and rotor dies of the flip-chip-bonded MEMS chip (21 mm × 12.5 mm × 1 mm). The prototype was characterized, demonstrating a fundamental frequency of 27 Hz, a quality factor of 230 in air, and a sensitivity of 6 mV/(rad/s2). The demonstrated noise floor was less than 0.003 rad/s2/ √{ Hz } within a bandwidth of 0.1 Hz to 10 Hz, which is comparable with the conventional angular accelerometer and is better than the other reported MEMS sensors in low-frequency ranges. The features of small size and low cost suggest that this MEMS angular-acceleration sensor could be mounted on a drone, a satellite or even a Mars rover, and it is promising to be used for monitoring angular accelerations, aiding seismic recording, mapping gravity anomalies, and other geophysical applications for large-scale terrestrial and space deployments.

  3. Circuit analysis and simulation of an ultrahigh-frequency capacitance sensor for scanning capacitance microscopy

    Science.gov (United States)

    Yang, Jing; Postula, A.; Bialkowski, M.

    2004-03-01

    Quantitative two-dimensional dopant profiling tools are urgently needed for nowadays semiconductor industry. Scanning Capacitance Microscopy (SCM) holds most promise to become such a tool. The key component of SCM is an ultra high frequency (UHF) capacitance sensor. The output of the sensor has been approximately regarded as dC/dV, the derivative of the capacitance between the SCM tip and the sample versus the applied bias voltage. The SCM dopant profiling involves extracting the dopant profile from the SCM signal using analytic or numerical simulation models of Metal-Oxide-Semiconductor physics. To achieve a quantitative SCM dopant profiling, the operational principle of the whole SCM measurement has to be well understood and correctly included in those models. Recently, experimental evidences show the SCM signal is dramatically affected by many SCM experimental factors, including the behavior of the UHF capacitance sensor. However, till now, very little research has been reported on the behavior of the sensor in SCM measurement of semiconductors. In this paper, we derive an analytic expression of the sensor output, a circuit simulation model of the sensor is established using Advanced Design System 2003, and the dependences of the sensor output on the SCM operational factors are simulated.

  4. A capacitive biosensor based on an interdigitated electrode with nanoislands.

    Science.gov (United States)

    Jung, Ha-Wook; Chang, Young Wook; Lee, Ga-yeon; Cho, Sungbo; Kang, Min-Jung; Pyun, Jae-Chul

    2014-09-24

    A capacitive biosensor based on an interdigitated electrode (IDE) with nanoislands was developed for label-free detection of antigen-antibody interactions. To enable sensitive capacitive detection of protein adsorption, the nanoislands were fabricated between finger electrodes of the IDE. The effect of the nanoislands on the sensitive capacitive measurement was estimated using horseradish peroxidase (HRP) as a model protein. Additionally, a parylene-A film was coated on the IDE with nanoislands to improve the efficiency of protein immobilization. By using HRP and hepatitis B virus surface antigen (HBsAg) as model analytes, the effect of the parylene-A film on the capacitive detection of protein adsorption was demonstrated.

  5. Nanostructured conducting polymer based reagentless capacitive immunosensor.

    Science.gov (United States)

    Bandodkar, Amay Jairaj; Dhand, Chetna; Arya, Sunil K; Pandey, M K; Malhotra, Bansi D

    2010-02-01

    Nanostructured polyaniline (PANI) film electrophoretically fabricated onto indium-tin-oxide (ITO) coated glass plate has been utilized for development of an immunosensor based on capacitance change of a parallel plate capacitor (PPC) by covalently immobilizing anti-human IgG (Anti-HIgG) using N-ethyl-N'-(3-dimethylaminopropyl) carbodiimide and N-hydroxysuccinimide chemistry. These fabricated PANI/ITO and Anti-HIgG/PANI/ITO plates have been characterized using scanning electron microscopy, cyclic voltammetry, differential pulse voltammetry and Fourier transform infra-red studies. The capacitance measurements indicate that dielectric medium of this biologically modified PPC (Anti-HIgG/PANI/ITO) is sensitive to HIgG in 5 - 5 x 10(5) ng mL(-1) range and has lower detection limit of 1.87 ng mL(-1). The observed results reveal that this Anti-HIgG modified PPC can be used as a robust, easy-to-use, reagentless, sensitive and selective immunosensor for estimation of human IgG.

  6. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    Directory of Open Access Journals (Sweden)

    ABDELAZIZ BEDDIAF

    2016-03-01

    Full Text Available The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FEA made in COMSOL. The model solved by COMSOL environment takes into account the entire sensor and thermal effects due to the temperature considering the materials’ properties, the geometric shape and also the heat transfer mechanisms. By COMSOL we determine how the temperature affects the sensor during the manufacturing process. For that end, we calculated the thermal drift of capacitance at rest, the thermal coefficients and we compared them with experimental results to validate our model. Further, we studied the thermal drift of sensor characteristics both at rest and under constant and uniform pressure. Further, our study put emphasis on the geometric influence parameters on these characteristics to optimize the sensor performance. Finally, this study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the geometrical parameters.

  7. 2D vs. 3D mammography observer study

    Science.gov (United States)

    Fernandez, James Reza F.; Hovanessian-Larsen, Linda; Liu, Brent

    2011-03-01

    Breast cancer is the most common type of non-skin cancer in women. 2D mammography is a screening tool to aid in the early detection of breast cancer, but has diagnostic limitations of overlapping tissues, especially in dense breasts. 3D mammography has the potential to improve detection outcomes by increasing specificity, and a new 3D screening tool with a 3D display for mammography aims to improve performance and efficiency as compared to 2D mammography. An observer study using a mammography phantom was performed to compare traditional 2D mammography with this ne 3D mammography technique. In comparing 3D and 2D mammography there was no difference in calcification detection, and mass detection was better in 2D as compared to 3D. There was a significant decrease in reading time for masses, calcifications, and normals in 3D compared to 2D, however, as well as more favorable confidence levels in reading normal cases. Given the limitations of the mammography phantom used, however, a clearer picture in comparing 3D and 2D mammography may be better acquired with the incorporation of human studies in the future.

  8. An automated pipeline to screen membrane protein 2D crystallization.

    Science.gov (United States)

    Kim, Changki; Vink, Martin; Hu, Minghui; Love, James; Stokes, David L; Ubarretxena-Belandia, Iban

    2010-06-01

    Electron crystallography relies on electron cryomicroscopy of two-dimensional (2D) crystals and is particularly well suited for studying the structure of membrane proteins in their native lipid bilayer environment. To obtain 2D crystals from purified membrane proteins, the detergent in a protein-lipid-detergent ternary mixture must be removed, generally by dialysis, under conditions favoring reconstitution into proteoliposomes and formation of well-ordered lattices. To identify these conditions a wide range of parameters such as pH, lipid composition, lipid-to-protein ratio, ionic strength and ligands must be screened in a procedure involving four steps: crystallization, specimen preparation for electron microscopy, image acquisition, and evaluation. Traditionally, these steps have been carried out manually and, as a result, the scope of 2D crystallization trials has been limited. We have therefore developed an automated pipeline to screen the formation of 2D crystals. We employed a 96-well dialysis block for reconstitution of the target protein over a wide range of conditions designed to promote crystallization. A 96-position magnetic platform and a liquid handling robot were used to prepare negatively stained specimens in parallel. Robotic grid insertion into the electron microscope and computerized image acquisition ensures rapid evaluation of the crystallization screen. To date, 38 2D crystallization screens have been conducted for 15 different membrane proteins, totaling over 3000 individual crystallization experiments. Three of these proteins have yielded diffracting 2D crystals. Our automated pipeline outperforms traditional 2D crystallization methods in terms of throughput and reproducibility.

  9. Joint 2D and 3D phase processing for quantitative susceptibility mapping: application to 2D echo-planar imaging.

    Science.gov (United States)

    Wei, Hongjiang; Zhang, Yuyao; Gibbs, Eric; Chen, Nan-Kuei; Wang, Nian; Liu, Chunlei

    2017-04-01

    Quantitative susceptibility mapping (QSM) measures tissue magnetic susceptibility and typically relies on time-consuming three-dimensional (3D) gradient-echo (GRE) MRI. Recent studies have shown that two-dimensional (2D) multi-slice gradient-echo echo-planar imaging (GRE-EPI), which is commonly used in functional MRI (fMRI) and other dynamic imaging techniques, can also be used to produce data suitable for QSM with much shorter scan times. However, the production of high-quality QSM maps is difficult because data obtained by 2D multi-slice scans often have phase inconsistencies across adjacent slices and strong susceptibility field gradients near air-tissue interfaces. To address these challenges in 2D EPI-based QSM studies, we present a new data processing procedure that integrates 2D and 3D phase processing. First, 2D Laplacian-based phase unwrapping and 2D background phase removal are performed to reduce phase inconsistencies between slices and remove in-plane harmonic components of the background phase. This is followed by 3D background phase removal for the through-plane harmonic components. The proposed phase processing was evaluated with 2D EPI data obtained from healthy volunteers, and compared against conventional 3D phase processing using the same 2D EPI datasets. Our QSM results were also compared with QSM values from time-consuming 3D GRE data, which were taken as ground truth. The experimental results show that this new 2D EPI-based QSM technique can produce quantitative susceptibility measures that are comparable with those of 3D GRE-based QSM across different brain regions (e.g. subcortical iron-rich gray matter, cortical gray and white matter). This new 2D EPI QSM reconstruction method is implemented within STI Suite, which is a comprehensive shareware for susceptibility imaging and quantification. Copyright © 2016 John Wiley & Sons, Ltd. Copyright © 2016 John Wiley & Sons, Ltd.

  10. 2-D Versus 3-D Magnetotelluric Data Interpretation

    Science.gov (United States)

    Ledo, Juanjo

    2005-09-01

    In recent years, the number of publications dealing with the mathematical and physical 3-D aspects of the magnetotelluric method has increased drastically. However, field experiments on a grid are often impractical and surveys are frequently restricted to single or widely separated profiles. So, in many cases we find ourselves with the following question: is the applicability of the 2-D hypothesis valid to extract geoelectric and geological information from real 3-D environments? The aim of this paper is to explore a few instructive but general situations to understand the basics of a 2-D interpretation of 3-D magnetotelluric data and to determine which data subset (TE-mode or TM-mode) is best for obtaining the electrical conductivity distribution of the subsurface using 2-D techniques. A review of the mathematical and physical fundamentals of the electromagnetic fields generated by a simple 3-D structure allows us to prioritise the choice of modes in a 2-D interpretation of responses influenced by 3-D structures. This analysis is corroborated by numerical results from synthetic models and by real data acquired by other authors. One important result of this analysis is that the mode most unaffected by 3-D effects depends on the position of the 3-D structure with respect to the regional 2-D strike direction. When the 3-D body is normal to the regional strike, the TE-mode is affected mainly by galvanic effects, while the TM-mode is affected by galvanic and inductive effects. In this case, a 2-D interpretation of the TM-mode is prone to error. When the 3-D body is parallel to the regional 2-D strike the TE-mode is affected by galvanic and inductive effects and the TM-mode is affected mainly by galvanic effects, making it more suitable for 2-D interpretation. In general, a wise 2-D interpretation of 3-D magnetotelluric data can be a guide to a reasonable geological interpretation.

  11. Introduction to game physics with Box2D

    CERN Document Server

    Parberry, Ian

    2013-01-01

    Written by a pioneer of game development in academia, Introduction to Game Physics with Box2D covers the theory and practice of 2D game physics in a relaxed and entertaining yet instructional style. It offers a cohesive treatment of the topics and code involved in programming the physics for 2D video games. Focusing on writing elementary game physics code, the first half of the book helps you grasp the challenges of programming game physics from scratch, without libraries or outside help. It examines the mathematical foundation of game physics and illustrates how it is applied in practice thro

  12. 2D electron cyclotron emission imaging at ASDEX Upgrade (invited)

    Energy Technology Data Exchange (ETDEWEB)

    Classen, I. G. J. [Max Planck Institut fuer Plasmaphysik, 85748 Garching (Germany); FOM-Institute for Plasma Physics, Rijnhuizen, 3430 BE Nieuwegein (Netherlands); Boom, J. E.; Vries, P. C. de [FOM-Institute for Plasma Physics, Rijnhuizen, 3430 BE Nieuwegein (Netherlands); Suttrop, W.; Schmid, E.; Garcia-Munoz, M.; Schneider, P. A. [Max Planck Institut fuer Plasmaphysik, 85748 Garching (Germany); Tobias, B.; Domier, C. W.; Luhmann, N. C. Jr. [University of California at Davis, Davis, California 95616 (United States); Donne, A. J. H. [FOM-Institute for Plasma Physics, Rijnhuizen, 3430 BE Nieuwegein (Netherlands); Eindhoven University of Technology, 5600 MB Eindhoven (Netherlands); Jaspers, R. J. E. [Eindhoven University of Technology, 5600 MB Eindhoven (Netherlands); Park, H. K. [POSTECH, Pohang, Gyeongbuk, 790-784 (Korea, Republic of); Munsat, T. [University of Colorado, Boulder, Colorado 80309 (United States)

    2010-10-15

    The newly installed electron cyclotron emission imaging diagnostic on ASDEX Upgrade provides measurements of the 2D electron temperature dynamics with high spatial and temporal resolution. An overview of the technical and experimental properties of the system is presented. These properties are illustrated by the measurements of the edge localized mode and the reversed shear Alfven eigenmode, showing both the advantage of having a two-dimensional (2D) measurement, as well as some of the limitations of electron cyclotron emission measurements. Furthermore, the application of singular value decomposition as a powerful tool for analyzing and filtering 2D data is presented.

  13. Optimization and practical implementation of ultrafast 2D NMR experiments

    Directory of Open Access Journals (Sweden)

    Luiz H. K. Queiroz Júnior

    2013-01-01

    Full Text Available Ultrafast 2D NMR is a powerful methodology that allows recording of a 2D NMR spectrum in a fraction of second. However, due to the numerous non-conventional parameters involved in this methodology its implementation is no trivial task. Here, an optimized experimental protocol is carefully described to ensure efficient implementation of ultrafast NMR. The ultrafast spectra resulting from this implementation are presented based on the example of two widely used 2D NMR experiments, COSY and HSQC, obtained in 0.2 s and 41 s, respectively.

  14. Spin Waves in 2D ferromagnetic square lattice stripe

    OpenAIRE

    Ahmed, Maher Z.

    2011-01-01

    In this work, the area and edges spin wave calculations were carried out using the Heisenberg Hamiltonian and the tridiagonal method for the 2D ferromagnetic square lattice stripe, where the SW modes are characterized by a 1D in-plane wave vector $q_x$. The results show a general and an unexpected feature that the area and edge spin waves only exist as optic modes. This behavior is also seen in 2D Heisenberg antiferromagnetic square lattice. This absence of the acoustic modes in the 2D square...

  15. Optimization and practical implementation of ultrafast 2D NMR experiments

    Energy Technology Data Exchange (ETDEWEB)

    Queiroz Junior, Luiz H. K., E-mail: professorkeng@gmail.com [Universidade Federal de Sao Carlos (UFSC), SP (Brazil). Departamento de Quimica; Universidade Federal de Goias (UFGO), Goiania, GO (Brazil). Inst. de Quimica; Ferreira, Antonio G. [Universidade Federal de Sao Carlos (UFSC), SP (Brazil). Departamento de Quimica; Giraudeau, Patrick [Universite de Nantes (France). CNRS, Chimie et Interdisciplinarite: Synthese, Analyse, Modelisation

    2013-09-01

    Ultrafast 2D NMR is a powerful methodology that allows recording of a 2D NMR spectrum in a fraction of second. However, due to the numerous non-conventional parameters involved in this methodology its implementation is no trivial task. Here, an optimized experimental protocol is carefully described to ensure efficient implementation of ultrafast NMR. The ultrafast spectra resulting from this implementation are presented based on the example of two widely used 2D NMR experiments, COSY and HSQC, obtained in 0.2 s and 41 s, respectively. (author)

  16. Harvest Survive : Game Mechanics of Unity 2D Game

    OpenAIRE

    2014-01-01

    The purpose of this project was to learn how to create Games in Unity 2D, to see the work-flow and to test if the new Unity 2D feature of the Unity engine was a good alternative for developing 2D games. A further aspect was to learn the different steps and mechanics of the Unity environment. The goal was to create a survival game, in which the player would have to grow plants in order to get food and money to stay alive in a hostile environment. The player has to survive in six different...

  17. Kalman Filter for Generalized 2-D Roesser Models

    Institute of Scientific and Technical Information of China (English)

    SHENG Mei; ZOU Yun

    2007-01-01

    The design problem of the state filter for the generalized stochastic 2-D Roesser models, which appears when both the state and measurement are simultaneously subjected to the interference from white noise, is discussed. The wellknown Kalman filter design is extended to the generalized 2-D Roesser models. Based on the method of "scanning line by line", the filtering problem of generalized 2-D Roesser models with mode-energy reconstruction is solved. The formula of the optimal filtering, which minimizes the variance of the estimation error of the state vectors, is derived. The validity of the designed filter is verified by the calculation steps and the examples are introduced.

  18. Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study

    KAUST Repository

    Sapsanis, Christos

    2015-07-24

    A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH2O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH2O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.

  19. Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study.

    Science.gov (United States)

    Sapsanis, Christos; Omran, Hesham; Chernikova, Valeriya; Shekhah, Osama; Belmabkhout, Youssef; Buttner, Ulrich; Eddaoudi, Mohamed; Salama, Khaled N

    2015-07-24

    A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH2O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH2O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.

  20. Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study

    Directory of Open Access Journals (Sweden)

    Christos Sapsanis

    2015-07-01

    Full Text Available A prototypical metal-organic framework (MOF, a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc ligands (Cu(bdc·xH2O, was grown successfully as a thin film on interdigitated electrodes (IDEs. IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs. Accordingly, the resultant IDEs coated with the Cu(bdc·xH2O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.