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Ultra shallow P+/N junctions using plasma immersion ion implantation and laser annealing for sub 0.1#mu#m CMOS devices  

International Nuclear Information System (INIS)

Classical beam line ion implantation is limited to low energies and cannot achieve P+/N junctions requested for <45nm ITRS node. RTA (rapid thermal annealing) needs to be improved for dopants activation and damage reductions. Spike annealing process also induces a large diffusion mainly due to TED (transient enhanced diffusion). Compared to conventional beam line ion implantation limited to a minimum energy implantation of 200eV, plasma immersion ion implantation (PIII) is an emerging technique to get ultimate shallow profiles (as-implanted) due to no lower limitation of energy and high dose rate. On the another hand, laser thermal processing (LTP) allows to obtain very shallow junction with no TED, abrupt profile and activated depth control. In this paper, we show the implementation of the BF_3 PIII associated with the LTP. Ions from BF_3"+ plasma have been implanted in 200mm n-type silicon wafers with energies from 100eV to 1keV and doses from 3E14 to 5E15at/cm"2 using PULSION"(R) ...

2005-08-01

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The new industrial political tools based on the sustainable development of productive activities; Gli strumenti attuativi di una politica di sviluppo sostenibile dell'impresa  

Energy Technology Data Exchange (ETDEWEB)

The new industrial political tools based on the sustainable development of productive activities, and originating at the Rio Conference in 1992, late introduced by the European Union, the Government and voluntary organizations (ISO, CEM, UNI) are gradually entering the market, thereby underling their effect in terms of industrial competitiveness. The main tools were examined in the report and mostly refer to the voluntary ones which, in surpassing the command and control logic, increasingly tend to get close to traditional fiscal, tariff and financial ones. Voluntary agreements, environmental management systems (EMAS, ISO14000), the risk prevention systems (UNI 10617), certification (Ecolabel, ISO 14040) and environment communications tools (environment balance sheet, environmental report, environmental statement) are synthetically described. Finally, the tools regarding the incentives still under Government concern an their diffusion are examined. [Italian] I nuovi strumenti di ...

1999-07-01

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AIDS and lung infection by Mycobacterium xenopi. Role of Computed Tomography; Sindrome da immunodeficienza acquisita e malattie polmonari da Mycobacterium xenopi. Ruolo della Tomografia Computerizzata  

Energy Technology Data Exchange (ETDEWEB)

Mycobacterium xenopi is one of the most common agents responsible for nontubercolar mycobacterial pulmonary disease on AIDS patients. These lesions have been studied with conventional radiography while CT has been used in patients with aspecific mycobacterioses or non-AIDS pulmonary conditions from Mycobacterium xenopi. 12 AIDS patients were examined. They had pulmonary lesions from Mycobacterium xenopi, patients age ranged 30 to 46 years. All patients had CD4 blood levels lower than 250 cells/mL and Mycobacterium xenopi in the sputum. All patients underwent a standard chest radiograph and a CT examination. CT images were evaluated by three radiologists independently and the definitive diagnosis was made in the presence of a fourth radiologist. Chest CT showed parenchymal consolidation in 66% of cases, associated with bilateral basal bands in 16% of cases. Consolidation was unilateral in 41% of cases and most frequently involved the right lower lobe. Bilateral reticular interstitial ...

2000-06-01

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Role of Spiral and Multislice Computed Tomography in the evaluation of traumatic and spontaneous oesophageal perforation. Our experience; Ruolo della Tomografia Computerizzata Spirale e Multistrato nello studio delle lesioni traumatiche e spontanee dell'esofago: nostra esperienza  

Energy Technology Data Exchange (ETDEWEB)

Purpose: To assess the role of CT in the evaluation of traumatic and spontaneous oesophageal perforation. Materials and methods: From March 2001 to May 2003, we studied 12 patients (7 males and 5 females; age range: 25-66 years, mean age: 43.5 years) with suspected oesophageal perforation due to motor-vehicle accidents (4 cases), stab wound (one case), post-intubation (2 cases), foreign body ingestion (2 cases) and spontaneous (3 cases). Five patients underwent standard chest and cervical radiography; two patients with suspected foreign body ingestion also underwent a gastrografin swallow study; all of the 12 patients underwent CT of the neck, chest and abdomen before and after intravenous, and in four cases oral, administration of contrast material. Results: In 5 patients with cervical, thoracic and abdominal trauma, the CT examination showed the presence of pleuroparenchymal injury (pneumothorax, pleural effusion and subcutaneous emphysema) as well as findings suggestive of ...

2005-03-01