About the EDF formation in a capacitively coupled argon plasma

Energy Technology Data Exchange (ETDEWEB)

Tatanova, M [Institute of Physics, Saint-Petersburg State University, ul. Ulianovskaja 1, 198504 Saint-Petersburg (Russian Federation); Thieme, G [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Basner, R [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Hannemann, M [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Golubovskii, Yu B [Institute of Physics, Saint-Petersburg State University, ul. Ulianovskaja 1, 198504 Saint-Petersburg (Russian Federation); Kersten, H [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany)

2006-08-01

The formation of the electron distribution function (EDF) in the bulk plasma of a capacitively coupled radio-frequency (rf) discharge in argon generated in the plasma-chemical reactor PULVA-INP is investigated experimentally and theoretically. Measurements of the EDF and internal plasma parameters were performed by means of a Langmuir probe at pressures of 0.5-100 Pa and discharge powers of 5-100 W. The observed EDFs have revealed a two-temperature behaviour at low pressures and evolved into a Maxwellian distribution at high gas pressures and large discharge powers. Theoretical determination of the EDF is based on the numerical solution of the Boltzmann kinetic equation in the local and non-local approaches under experimental conditions. The model includes elastic and inelastic electron-atom collisions and electron-electron interactions. Low electron temperatures and relatively high ionization degrees are the features of the PULVA-INP rf discharge. This leads to significant influence of the electron-electron collisions on the EDF formation. The modelled and measured distributions show good agreement in a wide range of discharge parameters, except for a range of low gas pressures, where the stochastic electron heating is intense. Additionally, mechanisms of the EDF formation in the dc and rf discharge were compared under similar discharge conditions.

Influence of driving frequency on oxygen atom density in O2 radio frequency capacitively coupled plasma

International Nuclear Information System (INIS)

Kitajima, Takeshi; Noro, Kouichi; Nakano, Toshiki; Makabe, Toshiaki

2004-01-01

The influence of the driving frequency on the absolute oxygen atom density in an O 2 radio frequency (RF) capacitively coupled plasma (CCP) was investigated using vacuum ultraviolet absorption spectroscopy with pulse modulation of the main plasma. A low-power operation of a compact inductively coupled plasma light source was enabled to avoid the significant measurement errors caused by self-absorption in the light source. The pulse modulation of the main plasma enabled accurate absorption measurement for high plasma density conditions by eliminating background signals due to light emission from the main plasma. As for the effects of the driving frequency, the effect of VHF (100 MHz) drive on oxygen atom production was small because of the modest increase in plasma density of electronegative O 2 in contrast to the significant increase in electron density previously observed for electropositive Ar. The recombination coefficient of oxygen atoms on the electrode surface was obtained from a decay rate in the afterglow by comparison with a diffusion model, and it showed agreement with previously reported values for several electrode materials

Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

International Nuclear Information System (INIS)

Tawidian, H; Mikikian, M.; Couedel, L.; Lecas, T.

2011-01-01

Dusty plasmas can be found in fusion devices. In this paper we analyse a new phenomenon occurring during dust particle growth instabilities and consisting of the appearance of small plasma spheroids in the vicinity of discharge electrodes. Small plasma spheroids are evidenced and analyzed in front of the electrodes of a capacitively-coupled radio-frequency discharge in which dust particles are growing. These regions are characterized by a spherical shape, a slightly enhanced luminosity and are related to instabilities induced by the presence of dust particles. Several types of behaviors are identified and particularly their chaotic appearance or disappearance and their rotational motion along the electrode periphery. Correlations with the unstable behavior of the global plasma glow are performed. These analyses are obtained thanks to high-speed imaging which is the only diagnostics able to evidence these plasma spheroids

Diagnostic of capacitively coupled radio frequency plasma from electrical discharge characteristics: comparison with optical emission spectroscopy and fluid model simulation

Science.gov (United States)

Xiang, HE; Chong, LIU; Yachun, ZHANG; Jianping, CHEN; Yudong, CHEN; Xiaojun, ZENG; Bingyan, CHEN; Jiaxin, PANG; Yibing, WANG

2018-02-01

The capacitively coupled radio frequency (CCRF) plasma has been widely used in various fields. In some cases, it requires us to estimate the range of key plasma parameters simpler and quicker in order to understand the behavior in plasma. In this paper, a glass vacuum chamber and a pair of plate electrodes were designed and fabricated, using 13.56 MHz radio frequency (RF) discharge technology to ionize the working gas of Ar. This discharge was mathematically described with equivalent circuit model. The discharge voltage and current of the plasma were measured at different pressures and different powers. Based on the capacitively coupled homogeneous discharge model, the equivalent circuit and the analytical formula were established. The plasma density and temperature were calculated by using the equivalent impedance principle and energy balance equation. The experimental results show that when RF discharge power is 50-300 W and pressure is 25-250 Pa, the average electron temperature is about 1.7-2.1 eV and the average electron density is about 0.5 × 1017-3.6 × 1017 m-3. Agreement was found when the results were compared to those given by optical emission spectroscopy and COMSOL simulation.

Pyrolysis treatment of waste tire powder in a capacitively coupled RF plasma reactor

Energy Technology Data Exchange (ETDEWEB)

Huang, H. [Department of Environmental Engineering, Guangdong University of Technology, Waihuanxi Road, Guangzhou 510006 (China); Tang, L. [Department of Civil Engineering, Guangzhou University, Waihuanxi Road, Guangzhou 510006 (China)

2009-03-15

A capacitively coupled radio-frequency (RF) plasma reactor was tested mainly for the purpose of solid waste treatment. It was found that using a RF input power between 1600 and 2000 W and a reactor pressure between 3000 and 8000 Pa (absolute pressure), a reactive plasma environment with a gas temperature between 1200 and 1800 K can be reached in this lab scale reactor. Under these conditions, pyrolysis of tire powder gave two product streams: a combustible gas and a pyrolytic char. The major components of the gas product are H{sub 2}, CO, CH{sub 4}, and CO{sub 2} The physical properties (surface area, porosity, and particle morphology) as well as chemical properties (elemental composition, heating value, and surface functional groups) of the pyrolytic char has also been examined. (author)

Application of capacitively coupled rf discharge plasma for sterilization of polymer materials used in ophthalmology

International Nuclear Information System (INIS)

Abdullin, I.Sh.; Avetisov, S.E.; Lipatov, D.V.; Rybakova, E.G.; Bragin, V.E.; Bykanov, A.N.; Kamarentsev, E.N.

1996-01-01

The sterilization effect of capacitively coupled rf discharge plasma treatment of contact lenses was investigated. There were used two types of polymer: highly hydrophilic polymer with water content 76% (Navelen-76) and poly-methylmethacrylate (PMMA). There was demonstrated the possibility of effective sterilization by RF discharge plasma of a set of polymer materials used in ophthalmology. The best results were obtained for hard contact lenses. There was perfect sterilization in this case. There were not perfect sterilization in some cases of soft contact lenses treatment. It may be caused by porous structure of the external layers of this material and limited thickness of the sterilization layer. (author)

Simulation of Main Plasma Parameters of a Cylindrical Asymmetric Capacitively Coupled Plasma Micro-Thruster using Computational Fluid Dynamics

Directory of Open Access Journals (Sweden)

Amelia eGreig

2015-01-01

Full Text Available Computational fluid dynamics (CFD simulations of a radio-frequency (13.56 MHz electro-thermal capacitively coupled plasma (CCP micro-thruster have been performed using the commercial CFD-ACE+ package. Standard operating conditions of a 10 W, 1.5 Torr argon discharge were used to compare with previously obtained experimental results for validation. Results show that the driving force behind plasma production within the thruster is ion-induced secondary electrons ejected from the surface of the discharge tube, accelerated through the sheath to electron temperatures up to 33.5 eV. The secondary electron coefficient was varied to determine the effect on the discharge, with results showing that full breakdown of the discharge did not occur for coefficients coefficients less than or equal to 0.01.

Investigation of Capacitively Coupled Argon Plasma Driven by Dual-Frequency with Different Frequency Configurations

International Nuclear Information System (INIS)

Yu Yiqing; Xin Yu; Ning Zhaoyuan; Lu Wenqi

2011-01-01

Low pressure argon dual-frequency (DF) capacitively coupled plasma (CCP) is generated by using different frequency configurations, such as 13.56/2, 27/2, 41/2, and 60/2 MHz. Characteristics of the plasma are investigated by using a floating double electrical probe and optical emission spectroscopy (OES). It is shown that in the DF-CCPs, the electron temperature T e decreases with the increase in exciting frequency, while the onset of 2 MHz induces a sudden increase in T e and the electron density increases basically with the increase in low frequency (LF) power. The intensity of 750.4 nm emission line increases with the LF power in the case of 13.56/2 MHz, while different tendencies of line intensity with the LF power appear for other configurations. The reason for this is also discussed.

Plasma Treated Active Carbon for Capacitive Deionization of Saline Water

Directory of Open Access Journals (Sweden)

Aiping Zeng

2017-01-01

Full Text Available The plasma treatment on commercial active carbon (AC was carried out in a capacitively coupled plasma system using Ar + 10% O2 at pressure of 4.0 Torr. The RF plasma power ranged from 50 W to 100 W and the processing time was 10 min. The carbon film electrode was fabricated by electrophoretic deposition. Micro-Raman spectroscopy revealed the highly increased disorder of sp2 C lattice for the AC treated at 75 W. An electrosorption capacity of 6.15 mg/g was recorded for the carbon treated at 75 W in a 0.1 mM NaCl solution when 1.5 V was applied for 5 hours, while the capacity of the untreated AC was 1.01 mg/g. The plasma treatment led to 5.09 times increase in the absorption capacity. The jump of electrosorption capacity by plasma treatment was consistent with the Raman spectra and electrochemical double layer capacitance. This work demonstrated that plasma treatment was a potentially efficient approach to activating biochar to serve as electrode material for capacitive deionization (CDI.

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

International Nuclear Information System (INIS)

Donko, Z.; Schulze, J.; Czarnetzki, U.; Luggenhoelscher, D.

2009-01-01

At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency discharges by nonlinear electron resonance heating (NERH). Here we demonstrate via particle-in-cell simulations that high-frequency PSR oscillations can also be excited in geometrically symmetric discharges if the driving voltage waveform makes the discharge electrically asymmetric. This can be achieved by a dual-frequency (f+2f) excitation, when PSR oscillations and NERH are turned on and off depending on the electrical discharge asymmetry, controlled by the phase difference of the driving frequencies

Plasma breakdown in a capacitively-coupled radiofrequency argon discharge

Science.gov (United States)

Smith, H. B.; Charles, C.; Boswell, R. W.

1998-10-01

Low pressure, capacitively-coupled rf discharges are widely used in research and commercial ventures. Understanding of the non-equilibrium processes which occur in these discharges during breakdown is of interest, both for industrial applications and for a deeper understanding of fundamental plasma behaviour. The voltage required to breakdown the discharge V_brk has long been known to be a strong function of the product of the neutral gas pressure and the electrode seperation (pd). This paper investigates the dependence of V_brk on pd in rf systems using experimental, computational and analytic techniques. Experimental measurements of V_brk are made for pressures in the range 1 -- 500 mTorr and electrode separations of 2 -- 20 cm. A Paschen-style curve for breakdown in rf systems is developed which has the minimum breakdown voltage at a much smaller pd value, and breakdown voltages which are significantly lower overall, than for Paschen curves obtained from dc discharges. The differences between the two systems are explained using a simple analytic model. A Particle-in-Cell simulation is used to investigate a similar pd range and examine the effect of the secondary emission coefficient on the rf breakdown curve, particularly at low pd values. Analytic curves are fitted to both experimental and simulation results.

A current driven capacitively coupled chlorine discharge

International Nuclear Information System (INIS)

Huang, Shuo; Gudmundsson, J T

2014-01-01

The effect of driving current, driving frequency and secondary electrons on capacitively coupled chlorine discharge is systematically investigated using a hybrid approach consisting of a particle-in-cell/Monte Carlo simulation and a volume-averaged global model. The driving current is varied from 20 to 80 A m −2 , the driving frequency is varied from 13.56 to 60 MHz and the secondary electron emission coefficient is varied from 0.0 to 0.4. Key plasma parameters including electron energy probability function, electron heating rate, ion energy and angular distributions are explored and their variations with control parameters are analyzed and compared with other discharges. Furthermore, we extend our study to dual-frequency (DF) capacitively coupled chlorine discharge by adding a low-frequency current source and explore the effect of the low-frequency source on the discharge. The low-frequency current density is increased from 0 to 4 A m −2 . The flux of Cl 2 + ions to the surface increases only slightly while the average energy of Cl 2 + ions to the surface increases almost linearly with increasing low-frequency current, which shows possible independent control of the flux and energy of Cl 2 + ions by varying the low-frequency current in a DF capacitively coupled chlorine discharge. However, the increase in the flux of Cl + ions with increasing low-frequency current, which is mainly due to the increased dissociation fraction of the background gas caused by extra power supplied by the low-frequency source, is undesirable. (paper)

Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency capacitively coupled plasma reactor: Two dimensional simulations

Institute of Scientific and Technical Information of China (English)

Xiang Xu; Hao Ge; Shuai Wang; Zhongling Dai; Younian Wang; Aimin Zhu

2009-01-01

A two-dimensional (2D) fluid model is presented to study the discharge of argon in a dual frequency capacitively coupled plasma (CCP) reactor. We are interested in the influence of low-frequency (LF) source parameters such as applied voltage amplitudes and low frequencies on the plasma characteristics. In this paper, the high frequency is set to 60 MHz with voltage 50 V. The simulations were carried out for low frequencies of 1, 2 and 6 MHz with LF voltage 100 V, and for LF voltages of 60, 90 and 120 V with low frequency 2 MHz. The results of 2D distributions of electric field and ion density, the ion flux impinging on the substrate and the ion energy on the powered electrode are shown. As the low frequency increases, two sources become from uncoupling to coupling, When two sources are uncoupling, the increase in LF has little impact on the plasma characteristics, but when two sources are coupling, the increase in LF decreases the uniformities of ion density and ion flux noticeably. It is also found that with the increase in LF voltage, the uniformities in the radial direction of ion density distribution and ion flux at the powered electrode decreases significantly, and the energy of ions bombarding on the powered electrode increases significantly.

Effect of power modulation on properties of pulsed capacitively coupled radiofrequency discharges

International Nuclear Information System (INIS)

Samara, V; Bowden, M D; Braithwaite, N St J

2010-01-01

We describe measurements of plasma properties of pulsed, low pressure, capacitively coupled discharges operated in argon. The study aims to determine the effect of modulating the radiofrequency power during the discharge part of the pulse cycle. Measurements of local electron density and optical emission were made in capacitively coupled rf discharges generated in a Gaseous Electronics Conference (GEC) reference reactor. Gas pressure was in the range 7-70 Pa, rf power in the range 1-100 W and pulse durations in the range 10 μs-100 ms. The results indicate that the ignition and afterglow decay processes in pulsed discharges can be controlled by modulating the shape of applied radiofrequency pulse.

Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

International Nuclear Information System (INIS)

Lee, Soo-Jin; Lee, Hyo-Chang; Bang, Jin-young; Oh, Seung-Ju; Chung, Chin-Wook

2013-01-01

Electrical characteristics and plasma parameters were experimentally investigated in asymmetric capacitively coupled plasma with various argon gas pressures. At a low discharge current region, the transferred power to the plasma was proportional to the current, while the transferred power increased proportionally to square of the current at a high discharge current region. The mode transition of power dissipation occurred at the lower discharge current region with the high gas pressure. At the low radio-frequency power or low discharge current, the plasma density increased linearly with the discharge current, while at the high power or high discharge current, the rate of an increase in the plasma density depended on the gas pressures. A transition of the discharge resistance was also found when the mode transition of the power dissipation occurred. These changes in the electrical characteristics and the plasma parameters were mainly caused by the power dissipation mode transition from the plasma bulk to the sheath in the capacitive discharge with the asymmetric electrode, which has extremely high self-bias voltages. - Highlights: • Mode transition of the power dissipation in an asymmetrical capacitive discharge • Evolution of the discharge power, electrode voltage, and discharge impedance • Electron temperature and plasma density on the power dissipation mode transition

Simulation of cold plasma in a chamber under high- and low-frequency voltage conditions for a capacitively coupled plasma

Institute of Scientific and Technical Information of China (English)

Hao Daoxin; Cheng Jia; Ji Linhong; Sun Yuchun

2012-01-01

The characteristics of cold plasma,especially for a dual-frequency capacitively coupled plasma (CCP),play an important role for plasma enhanced chemical vapor deposition,which stimulates further studies using different methods.In this paper,a 2D fluid model was constructed for N2 gas plasma simulations with CFD-ACE+,a commercial multi-physical software package.First,the distributions of electric potential (Epot),electron number density (Ne),N number density (N) and electron temperature (Te) are described under the condition of high frequency (HF),13.56 MHz,HF voltage,300 V,and low-frequency (LF) voltage,0 V,particularly in the sheath.Based on this,the influence of HF on Ne is further discussed under different HF voltages of 200 V,300 V,400 V,separately,along with the influence of LF,0.3 MHz,and various LF voltages of 500 V,600 V,700 V.The results show that sheaths of about 3 mm are formed near the two electrodes,in which Epot and Te vary extensively with time and space,while in the plasma bulk Epot changes synchronously with an electric potential of about 70 V and Te varies only in a small range.N is also modulated by the radio frequency,but the relative change in N is small.Ne varies only in the sheath,while in the bulk it is steady at different time steps.So,by comparing Ne in the plasma bulk at the steady state,we can see that Ne will increase when HF voltage increases.Yet,Ne will slightly decrease with the increase of LF voltage.At the same time,the homogeneity will change in both x and y directions.So both HF and LF voltages should be carefully considered in order to obtain a high-density,homogeneous plasma.

Electrical method for the measurements of volume averaged electron density and effective coupled power to the plasma bulk

Science.gov (United States)

Henault, M.; Wattieaux, G.; Lecas, T.; Renouard, J. P.; Boufendi, L.

2016-02-01

Nanoparticles growing or injected in a low pressure cold plasma generated by a radiofrequency capacitively coupled capacitive discharge induce strong modifications in the electrical parameters of both plasma and discharge. In this paper, a non-intrusive method, based on the measurement of the plasma impedance, is used to determine the volume averaged electron density and effective coupled power to the plasma bulk. Good agreements are found when the results are compared to those given by other well-known and established methods.

Finite-element simulations of coupling capacitances in capacitively coupled pixel detectors

CERN Document Server

AUTHOR|(SzGeCERN)755510

2017-01-01

Capacitively coupled hybrid silicon pixel-detector assemblies are under study for the vertex detector at the proposed future CLIC linear electron-positron collider. The assemblies consist of active CCPDv3 sensors, with 25 μm pixel pitch implemented in a 180 nm High- Voltage CMOS process, which are glued to the CLICpix readout ASIC, with the same pixel pitch and processed in a commercial 65 nm CMOS technology. The signal created in the silicon bulk of the active sensors passes a two-stage amplifier, in each pixel, and gets transferred as a voltage pulse to metal pads facing the readout chip (ROC). The coupling of the signal to the metal pads on the ROC side proceeds through the capacitors formed between the two chips by a thin layer of epoxy glue. The coupling strength and the amount of unwanted cross coupling to neighbouring pixels depends critically on the uniformity of the glue layer, its thickness and on the alignment precision during the flip-chip assembly process. Finite-element calculations of the coup...

Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

International Nuclear Information System (INIS)

Xu Lin; Chen, Lee; Funk, Merritt; Ranjan, Alok; Hummel, Mike; Bravenec, Ron; Sundararajan, Radha; Economou, Demetre J.; Donnelly, Vincent M.

2008-01-01

The energy distribution of ballistic electrons in a dc/rf hybrid parallel-plate capacitively coupled plasma reactor was measured. Ballistic electrons originated as secondaries produced by ion and electron bombardment of the electrodes. The energy distribution of ballistic electrons peaked at the value of the negative bias applied to the dc electrode. As that bias became more negative, the ballistic electron current on the rf substrate electrode increased dramatically. The ion current on the dc electrode also increased

Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model

International Nuclear Information System (INIS)

Xu Hui-Jing; Shu-Xia Zhao; Gao Fei; Zhang Yu-Ru; Li Xue-Chun; Wang You-Nian

2015-01-01

A new type of two-dimensional self-consistent fluid model that couples an equivalent circuit module is used to investigate the mode transition characteristics and hysteresis in hydrogen inductively coupled plasmas at different pressures, by varying the series capacitance of the matching box. The variations of the electron density, temperature, and the circuit electrical properties are presented. As cycling the matching capacitance, at high pressure both the discontinuity and hysteresis appear for the plasma parameters and the transferred impedances of both the inductive and capacitive discharge components, while at low pressure only the discontinuity is seen. The simulations predict that the sheath plays a determinative role on the presence of discontinuity and hysteresis at high pressure, by influencing the inductive coupling efficiency of applied power. Moreover, the values of the plasma transferred impedances at different pressures are compared, and the larger plasma inductance at low pressure due to less collision frequency, as analyzed, is the reason why the hysteresis is not seen at low pressure, even with a wider sheath. Besides, the behaviors of the coil voltage and current parameters during the mode transitions are investigated. They both increase (decrease) at the E to H (H to E) mode transition, indicating an improved (worsened) inductive power coupling efficiency. (paper)

Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

Energy Technology Data Exchange (ETDEWEB)

Sharma, S.; Turner, M. M. [National Centre for Plasma Science and Technology, School of Physical Sciences, Dublin City University, Dublin 9 (Ireland)

2013-07-15

Capacitively coupled radio-frequency (RF) discharges have great significance for industrial applications. Collisionless electron heating in such discharges is important, and sometimes is the dominant mechanism. This heating is usually understood to originate in a stochastic interaction between electrons and the electric fields. However, other mechanisms may also be important. There is evidence of wave emission with a frequency near the electron plasma frequency, i.e., ω{sub pe}, from the sheath region in collisionless capacitive RF discharges. This is the result of a progressive breakdown of quasi-neutrality close to the electron sheath edge. These waves are damped in a few centimeters during their propagation from the sheath towards the bulk plasma. The damping occurs because of the Landau damping or some related mechanism. This research work reports that the emission of waves is associated with a field reversal during the expanding phase of the sheath. Trapping of electrons near to this field reversal region is observed. The amplitude of the wave increases with increasing RF current density amplitude J(tilde sign){sub 0} until some maximum is reached, beyond which the wave diminishes and a new regime appears. In this new regime, the density of the bulk plasma suddenly increases because of ion reflection, which occurs due to the presence of strong field reversal near sheath region. Our calculation shows that these waves are electron plasma waves. These phenomena occur under extreme conditions (i.e., higher J(tilde sign){sub 0} than in typical experiments) for sinusoidal current waveforms, but similar effects may occur with non-sinusoidal pulsed waveforms for conditions of experimental interest, because the rate of change of current is a relevant parameter. The effect of electron elastic collisions on plasma waves is also investigated.

Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: II. Radial uniformity of the plasma characteristics

International Nuclear Information System (INIS)

Zhang Yuru; Xu Xiang; Wang Younian; Bogaerts, Annemie

2012-01-01

A two-dimensional fluid model, including the full set of Maxwell equations, has been developed and applied to investigate the effect of a phase shift between two power sources on the radial uniformity of several plasma characteristics in a hydrogen capacitively coupled plasma. This study was carried out at various frequencies in the range 13.56-200 MHz. When the frequency is low, at 13.56 MHz, the plasma density is characterized by an off-axis peak when both power sources are in-phase (φ = 0), and the best radial uniformity is obtained at φ = π. This trend can be explained because the radial nonuniformity caused by the electrostatic edge effect can be effectively suppressed by the phase-shift effect at a phase difference equal to π. When the frequency rises to 60 MHz, the plasma density profiles shift smoothly from edge-peaked over uniform to centre-peaked as the phase difference increases, due to the pronounced standing-wave effect, and the best radial uniformity is reached at φ = 0.3π. At a frequency of 100 MHz, a similar behaviour is observed, except that the maximum of the plasma density moves again towards the radial edge at the reverse-phase case (φ = π), because of the dominant skin effect. When the frequency is 200 MHz, the bulk plasma density increases significantly with increasing phase-shift values, and a better uniformity is obtained at φ = 0.4π. This is because the density in the centre increases faster than at the radial edge as the phase difference rises, due to the increasing power deposition P z in the centre and the decreasing power density P r at the radial edge. As the phase difference increases to π, the maximum near the radial edge becomes obvious again. This is because the skin effect has a predominant influence on the plasma density under this condition, resulting in a high density at the radial edge. Moreover, the axial ion flux increases monotonically with phase difference, and exhibits similar profiles to the plasma density

Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas

Energy Technology Data Exchange (ETDEWEB)

Zhang, Yiting; Kushner, Mark J. [Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122 (United States); Moore, Nathaniel; Pribyl, Patrick; Gekelman, Walter [Department of Physics, University of California, Los Angeles, California 90095 (United States)

2013-11-15

The control of ion energy and angular distributions (IEADs) is critically important for anisotropic etching or deposition in microelectronic fabrication processes. With single frequency capacitively coupled plasmas (CCPs), the narrowing in angle and spread in energy of ions as they cross the sheath are definable functions of frequency, sheath width, and mean free path. With increases in wafer size, single frequency CCPs are finding difficulty in meeting the requirement of simultaneously controlling plasma densities, ion fluxes, and ion energies. Dual-frequency CCPs are being investigated to provide this flexible control. The high frequency (HF) is intended to control the plasma density and ion fluxes, while the ion energies are intended to be controlled by the low frequency (LF). However, recent research has shown that the LF can also influence the magnitude of ion fluxes and that IEADs are determined by both frequencies. Hence, separate control of fluxes and IEADs is complex. In this paper, results from a two-dimensional computational investigation of Ar/O{sub 2} plasma properties in an industrial reactor are discussed. The IEADs are tracked as a function of height above the substrate and phase within the rf cycles from the bulk plasma to the presheath and through the sheath with the goal of providing insights to this complexity. Comparison is made to laser-induced fluorescence experiments. The authors found that the ratios of HF/LF voltage and driving frequency are critical parameters in determining the shape of the IEADs, both during the transit of the ion through the sheath and when ions are incident onto the substrate. To the degree that contributions from the HF can modify plasma density, sheath potential, and sheath thickness, this may provide additional control for the IEADs.

Layout Capacitive Coupling and Structure Impacts on Integrated High Voltage Power MOSFETs

DEFF Research Database (Denmark)

Fan, Lin; Knott, Arnold; Jørgensen, Ivan Harald Holger

2016-01-01

The switching performances of the integrated high voltage power MOSFETs that have prevailing interconnection matrices are being heavily influenced by the parasitic capacitive coupling of on-chip metal wires. The mechanism of the side-byside coupling is generally known, however, the layer-to-layer......The switching performances of the integrated high voltage power MOSFETs that have prevailing interconnection matrices are being heavily influenced by the parasitic capacitive coupling of on-chip metal wires. The mechanism of the side-byside coupling is generally known, however, the layer...... extraction tool shows that the side-by-side coupling dominated structure can perform better than the layer-to-layer coupling dominated structure, in terms of on-resistance times input or output capacitance, by 9.2% and 4.9%, respectively....

Overview of capacitive couplings in windings

NARCIS (Netherlands)

Djukic, N.; Encica, L.; Paulides, J.J.H.

2015-01-01

The use of electrical machines (EMs) with variable-frequency drives (VFDs) results in electromagnetic interference (EMI). At high frequencies (HFs) of conducted EMI, the impedance of an EM insulation system fed from a VFD is small due to the parasitic capacitive couplings. Thus, the conducted EMI

Mercury determination in non- and biodegradable materials by cold vapor capacitively coupled plasma microtorch atomic emission spectrometry

International Nuclear Information System (INIS)

Frentiu, Tiberiu; Mihaltan, Alin I.; Ponta, Michaela; Darvasi, Eugen; Frentiu, Maria; Cordos, Emil

2011-01-01

Highlights: → Use of a miniaturized analytical system with microtorch plasma for Hg determination. → Determination of Hg in non- and biodegradable materials using cold vapor generation. → Figures of merit and advantages of the miniaturized system for Hg determination. - Abstract: A new analytical system consisting of a low power capacitively coupled plasma microtorch (20 W, 13.56 MHz, 150 ml min -1 Ar) and a microspectrometer was investigated for the Hg determination in non- and biodegradable materials by cold-vapor generation, using SnCl 2 reductant, and atomic emission spectrometry. The investigated miniaturized system was used for Hg determination in recyclable plastics from electronic equipments and biodegradable materials (shopping bags of 98% biodegradable polyethylene and corn starch) with the advantages of easy operation and low analysis costs. Samples were mineralized in HNO 3 -H 2 SO 4 mixture in a high-pressure microwave system. The detection limits of 0.05 ng ml -1 or 0.08 μg g -1 in solid sample were compared with those reported for other analytical systems. The method precision was 1.5-9.4% for Hg levels of 1.37-13.9 mg kg -1 , while recovery in two polyethylene certified reference materials in the range 98.7 ± 4.5% (95% confidence level).

Precise measurements of neutral gas temperature using Fiber Bragg Grating sensor in Argon capacitively coupled plasmas

Science.gov (United States)

Han, Daoman; Liu, Zigeng; Liu, Yongxin; Peng, Wei; Wang, Younian

2016-09-01

Neutral gas temperature was measured using Fiber Bragg Grating sensor (FBGs) in capacitively coupled argon plasmas. Thermometry is based on the thermal equilibrium between the sensor and neutral gases, which is found to become faster with increasing pressure. It is also observed that the neutral gas temperature is higher than the room temperature by 10 120 °depending on the experiental conditions, and gas temperature shows significant non-uniformity in space. In addition, radial profiles of neutral temperature at different pressures, resemble these of ion density, obtained by a floating double probe. Specifically, at low pressure, neutral gas temperature and ion density peak at the center of the reactor, while the peak appears at the edge of the electrode at higher pressure. The neutral gas heating is mainly caused by the elastic collisions of Ar + with neutral gas atoms in the sheath region after Ar + gaining a certain energy. This work was supported by the National Natural Science Foundation of China (NSFC) (Grants No. 11335004, 11405018, and 61137005).

Effects of electron inertia in capacitively coupled radio frequency discharges

International Nuclear Information System (INIS)

Xiang Nong

2004-01-01

The effects of the electron inertia on the plasma and sheath dynamics in capacitively coupled rf discharges with frequency ωω pi are investigated (here, ω and ω pi are the rf frequency and bulk ion plasma frequency, respectively). It is found that the effects of the electron inertia on the plasma density and ion velocity in the quasi-neutral region depend on the ratio of the amplitudes of the discharge current I rf and ion current I B =en 0 C s (here, e is the unit charge, n 0 is the plasma density at center, and C s is the ion sound speed). If the ratio is small so that I rf /I B √(m i /m e ) (here, m i and m e are ion and electron masses, respectively), the ion and time-averaged electron densities, ion velocity, and electric fields are little affected by the electron inertia. Otherwise, the effects of the electron inertia are significant. It is also shown that the assumption that the electrons obey the Boltzmann distribution in the sheath is invalid when the electron flux flowing to the electrode is significant

Mercury determination in non- and biodegradable materials by cold vapor capacitively coupled plasma microtorch atomic emission spectrometry

Energy Technology Data Exchange (ETDEWEB)

Frentiu, Tiberiu, E-mail: ftibi@chem.ubbcluj.ro [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Mihaltan, Alin I., E-mail: alinblaj2005@yahoo.com [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania); Ponta, Michaela, E-mail: mponta@chem.ubbcluj.ro [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Darvasi, Eugen, E-mail: edarvasi@chem.ubbcluj.ro [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Frentiu, Maria, E-mail: frentiu.maria@yahoo.com [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania); Cordos, Emil, E-mail: emilcordos@gmail.com [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania)

2011-10-15

Highlights: {yields} Use of a miniaturized analytical system with microtorch plasma for Hg determination. {yields} Determination of Hg in non- and biodegradable materials using cold vapor generation. {yields} Figures of merit and advantages of the miniaturized system for Hg determination. - Abstract: A new analytical system consisting of a low power capacitively coupled plasma microtorch (20 W, 13.56 MHz, 150 ml min{sup -1} Ar) and a microspectrometer was investigated for the Hg determination in non- and biodegradable materials by cold-vapor generation, using SnCl{sub 2} reductant, and atomic emission spectrometry. The investigated miniaturized system was used for Hg determination in recyclable plastics from electronic equipments and biodegradable materials (shopping bags of 98% biodegradable polyethylene and corn starch) with the advantages of easy operation and low analysis costs. Samples were mineralized in HNO{sub 3}-H{sub 2}SO{sub 4} mixture in a high-pressure microwave system. The detection limits of 0.05 ng ml{sup -1} or 0.08 {mu}g g{sup -1} in solid sample were compared with those reported for other analytical systems. The method precision was 1.5-9.4% for Hg levels of 1.37-13.9 mg kg{sup -1}, while recovery in two polyethylene certified reference materials in the range 98.7 {+-} 4.5% (95% confidence level).

Mercury determination in non- and biodegradable materials by cold vapor capacitively coupled plasma microtorch atomic emission spectrometry.

Science.gov (United States)

Frentiu, Tiberiu; Mihaltan, Alin I; Ponta, Michaela; Darvasi, Eugen; Frentiu, Maria; Cordos, Emil

2011-10-15

A new analytical system consisting of a low power capacitively coupled plasma microtorch (20 W, 13.56 MHz, 150 ml min(-1) Ar) and a microspectrometer was investigated for the Hg determination in non- and biodegradable materials by cold-vapor generation, using SnCl(2) reductant, and atomic emission spectrometry. The investigated miniaturized system was used for Hg determination in recyclable plastics from electronic equipments and biodegradable materials (shopping bags of 98% biodegradable polyethylene and corn starch) with the advantages of easy operation and low analysis costs. Samples were mineralized in HNO(3)-H(2)SO(4) mixture in a high-pressure microwave system. The detection limits of 0.05 ng ml(-1) or 0.08 μg g(-1) in solid sample were compared with those reported for other analytical systems. The method precision was 1.5-9.4% for Hg levels of 1.37-13.9 mg kg(-1), while recovery in two polyethylene certified reference materials in the range 98.7 ± 4.5% (95% confidence level). Copyright © 2011 Elsevier B.V. All rights reserved.

Energy coupling to the plasma in repetitive nanosecond pulse discharges

International Nuclear Information System (INIS)

Adamovich, Igor V.; Nishihara, Munetake; Choi, Inchul; Uddi, Mruthunjaya; Lempert, Walter R.

2009-01-01

A new analytic quasi-one-dimensional model of energy coupling to nanosecond pulse discharge plasmas in plane-to-plane geometry has been developed. The use of a one-dimensional approach is based on images of repetitively pulsed nanosecond discharge plasmas in dry air demonstrating that the plasma remains diffuse and uniform on a nanosecond time scale over a wide range of pressures. The model provides analytic expressions for the time-dependent electric field and electron density in the plasma, electric field in the sheath, sheath boundary location, and coupled pulse energy. The analytic model predictions are in very good agreement with numerical calculations. The model demonstrates that (i) the energy coupled to the plasma during an individual nanosecond discharge pulse is controlled primarily by the capacitance of the dielectric layers and by the breakdown voltage and (ii) the pulse energy coupled to the plasma during a burst of nanosecond pulses decreases as a function of the pulse number in the burst. This occurs primarily because of plasma temperature rise and resultant reduction in breakdown voltage, such that the coupled pulse energy varies approximately proportionally to the number density. Analytic expression for coupled pulse energy scaling has been incorporated into the air plasma chemistry model, validated previously by comparing with atomic oxygen number density measurements in nanosecond pulse discharges. The results of kinetic modeling using the modified air plasma chemistry model are compared with time-resolved temperature measurements in a repetitively pulsed nanosecond discharge in air, by emission spectroscopy, and purely rotational coherent anti-Stokes Raman spectroscopy showing good agreement.

Capacitively coupled radio-frequency discharges in nitrogen at low pressures

KAUST Repository

Alves, Luís Lemos

2012-07-06

This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.11 mbar pressures and 230W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applied and the direct-current-self-bias voltages, the effective power coupled to the plasma and the average electron density. OES diagnostics measure the intensities of radiative transitions with the nitrogen second-positive and first-negative systems, and with the 811.5 nm atomic line of argon (present as an actinometer). Simulations use a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles (electrons and positive ions N 2 + and N 4 + ), and a zero-dimensional kinetic module, describing the production and destruction of nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define spacetime-dependent electron parameters for the fluid module and to work out spacetime-averaged rates for the kinetic module. The model gives general good predictions for the self-bias voltage and for the intensities of radiative transitions (both average and spatially resolved), underestimating the electron density by a factor of 34. © 2012 IOP Publishing Ltd.

Capacitively coupled radio-frequency discharges in nitrogen at low pressures

KAUST Repository

Alves, Luí s Lemos; Marques, Luí s S A; Pintassilgo, Carlos D.; Wattieaux, Gaë tan; Es-sebbar, Et-touhami; Berndt, Johannes; Kovačević, Eva; Carrasco, Nathalie; Boufendi, Laï fa; Cernogora, Guy

2012-01-01

This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.11 mbar pressures and 230W coupled powers. Experiments performed on two similar (not twin) setups

Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges

International Nuclear Information System (INIS)

Kawamura, E; Lieberman, M A; Graves, D B

2011-01-01

A fast two-dimensional (2D) hybrid fluid-analytical transform coupled plasma reactor model was developed using the finite elements simulation tool COMSOL. Both inductive and capacitive coupling of the source coils to the plasma are included in the model, as well as a capacitive bias option for the wafer electrode. A bulk fluid plasma model, which solves the time-dependent plasma fluid equations for the ion continuity and electron energy balance, is coupled with an analytical sheath model. The vacuum sheath of variable thickness is modeled with a fixed-width sheath of variable dielectric constant. The sheath heating is treated as an incoming heat flux at the plasma-sheath boundary, and a dissipative term is added to the sheath dielectric constant. A gas flow model solves for the steady-state pressure, temperature and velocity of the neutrals. The simulation results, over a range of input powers, are in good agreement with a chlorine reactor experimental study.

Effect of driving voltages in dual capacitively coupled radio frequency plasma: A study by nonlinear global model

International Nuclear Information System (INIS)

Bora, B.

2015-01-01

On the basis of nonlinear global model, a dual frequency capacitively coupled radio frequency plasma driven by 13.56 MHz and 27.12 MHz has been studied to investigate the influences of driving voltages on the generation of dc self-bias and plasma heating. Fluid equations for the ions inside the plasma sheath have been considered to determine the voltage-charge relations of the plasma sheath. Geometrically symmetric as well as asymmetric cases with finite geometrical asymmetry of 1.2 (ratio of electrodes area) have been considered to make the study more reasonable to experiment. The electrical asymmetry effect (EAE) and finite geometrical asymmetry is found to work differently in controlling the dc self-bias. The amount of EAE has been primarily controlled by the phase angle between the two consecutive harmonics waveforms. The incorporation of the finite geometrical asymmetry in the calculations shift the dc self-bias towards negative polarity direction while increasing the amount of EAE is found to increase the dc self-bias in either direction. For phase angle between the two waveforms ϕ = 0 and ϕ = π/2, the amount of EAE increases significantly with increasing the low frequency voltage, whereas no such increase in the amount of EAE is found with increasing high frequency voltage. In contrast to the geometrically symmetric case, where the variation of the dc self-bias with driving voltages for phase angle ϕ = 0 and π/2 are just opposite in polarity, the variation for the geometrically asymmetric case is different for ϕ = 0 and π/2. In asymmetric case, for ϕ = 0, the dc self-bias increases towards the negative direction with increasing both the low and high frequency voltages, but for the ϕ = π/2, the dc-self bias is increased towards positive direction with increasing low frequency voltage while dc self-bias increases towards negative direction with increasing high frequency voltage

An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas

International Nuclear Information System (INIS)

Liu, Wen-Yao; Xu, Yong; Peng, Fei; Guo, Qian; Li, Xiao-Song; Zhu, Ai-Min; Liu, Yong-Xin; Wang, You-Nian

2015-01-01

An tunable diode laser absorption spectroscopy has been used to determine the Ar*( 3 P 2 ) and Ar*( 3 P 0 ) metastable atoms densities in dual-frequency capacitively coupled plasmas. The effects of different control parameters, such as high-frequency power, gas pressure and content of Ar, on the densities of two metastable atoms and electron density were discussed in single-frequency and dual-frequency Ar discharges, respectively. Particularly, the effects of the pressure on the axial profile of the electron and Ar metastable state densities were also discussed. Furthermore, a simple rate model was employed and its results were compared with experiments to analyze the main production and loss processes of Ar metastable states. It is found that Ar metastable state is mainly produced by electron impact excitation from the ground state, and decayed by diffusion and collision quenching with electrons and neutral molecules. Besides, the addition of CF 4 was found to significantly increase the metastable destruction rate by the CF 4 quenching, especially for large CF 4 content and high pressure, it becomes the dominant depopulation process

Effect of Plasma Membrane Semipermeability in Making the Membrane Electric Double Layer Capacitances Significant.

Science.gov (United States)

Sinha, Shayandev; Sachar, Harnoor Singh; Das, Siddhartha

2018-01-30

Electric double layers (or EDLs) formed at the membrane-electrolyte interface (MEI) and membrane-cytosol interface (MCI) of a charged lipid bilayer plasma membrane develop finitely large capacitances. However, these EDL capacitances are often much larger than the intrinsic capacitance of the membrane, and all of these capacitances are in series. Consequently, the effect of these EDL capacitances in dictating the overall membrane-EDL effective capacitance C eff becomes negligible. In this paper, we challenge this conventional notion pertaining to the membrane-EDL capacitances. We demonstrate that, on the basis of the system parameters, the EDL capacitance for both the permeable and semipermeable membranes can be small enough to influence C eff . For the semipermeable membranes, however, this lowering of the EDL capacitance can be much larger, ensuring a reduction of C eff by more than 20-25%. Furthermore, for the semipermeable membranes, the reduction in C eff is witnessed over a much larger range of system parameters. We attribute such an occurrence to the highly nonintuitive electrostatic potential distribution associated with the recently discovered phenomena of charge-inversion-like electrostatics and the attainment of a positive zeta potential at the MCI for charged semipermeable membranes. We anticipate that our findings will impact the quantification and the identification of a large number of biophysical phenomena that are probed by measuring the plasma membrane capacitance.

Correlated Coulomb drag in capacitively coupled quantum-dot structures

DEFF Research Database (Denmark)

Kaasbjerg, Kristen; Jauho, Antti-Pekka

2016-01-01

We study theoretically Coulomb drag in capacitively coupled quantum dots (CQDs) -- a biasdriven dot coupled to an unbiased dot where transport is due to Coulomb mediated energy transfer drag. To this end, we introduce a master-equation approach which accounts for higher-order tunneling (cotunneling......) processes as well as energy-dependent lead couplings, and identify a mesoscopic Coulomb drag mechanism driven by nonlocal multi-electron cotunneling processes. Our theory establishes the conditions for a nonzero drag as well as the direction of the drag current in terms of microscopic system parameters...... on Coulomb drag in CQD systems....

Si-compatible cleaning process for graphene using low-density inductively coupled plasma.

Science.gov (United States)

Lim, Yeong-Dae; Lee, Dae-Yeong; Shen, Tian-Zi; Ra, Chang-Ho; Choi, Jae-Young; Yoo, Won Jong

2012-05-22

We report a novel cleaning technique for few-layer graphene (FLG) by using inductively coupled plasma (ICP) of Ar with an extremely low plasma density of 3.5 × 10(8) cm(-3). It is known that conventional capacitively coupled plasma (CCP) treatments destroy the planar symmetry of FLG, giving rise to the generation of defects. However, ICP treatment with extremely low plasma density is able to remove polymer resist residues from FLG within 3 min at a room temperature of 300 K while retaining the carbon sp(2)-bonding of FLG. It is found that the carrier mobility and charge neutrality point of FLG are restored to their pristine defect-free state after the ICP treatment. Considering the application of graphene to silicon-based electronic devices, such a cleaning method can replace thermal vacuum annealing, electrical current annealing, and wet-chemical treatment due to its advantages of being a low-temperature, large-area, high-throughput, and Si-compatible process.

Asymmetric flows over symmetric surfaces: capacitive coupling in induced-charge electro-osmosis

Energy Technology Data Exchange (ETDEWEB)

Mansuripur, T S [Department of Physics, University of California, Santa Barbara, CA 93106 (United States); Pascall, A J; Squires, T M [Department of Chemical Engineering, University of California, Santa Barbara, CA 93106 (United States)], E-mail: squires@engineering.ucsb.edu

2009-07-15

We report curious asymmetric induced-charge electro-osmotic (ICEO) flows over a symmetric, planar gate electrode under applied ac electric fields, whereas symmetric, counter-rotating rolls are expected. Furthermore, the asymmetric component of the flow is consistently directed towards the grounded electrode. We propose that capacitive coupling of the gate electrode to the microscope stage-a comparatively large equipotential surface that acts effectively as a ground-is responsible for this symmetry breaking. This stray capacitance drives the formation of a double layer whose zeta potential is proportional to the potential drop from the electrolyte directly above the gate electrode to the external stage. Therefore, the charge in this 'stray' double layer varies in phase with the driving field, resulting in a rectified, steady flow as with standard ICEO. We experimentally vary the stray capacitance, the electric potential of the stage and the location of the gate electrode, and find that the effect on the stray flow is qualitatively consistent with the predictions of the proposed mechanism. In the process, we demonstrate that capacitive coupling offers an additional means of manipulating fluid flow over a polarizable surface.

Asymmetric flows over symmetric surfaces: capacitive coupling in induced-charge electro-osmosis

International Nuclear Information System (INIS)

Mansuripur, T S; Pascall, A J; Squires, T M

2009-01-01

We report curious asymmetric induced-charge electro-osmotic (ICEO) flows over a symmetric, planar gate electrode under applied ac electric fields, whereas symmetric, counter-rotating rolls are expected. Furthermore, the asymmetric component of the flow is consistently directed towards the grounded electrode. We propose that capacitive coupling of the gate electrode to the microscope stage-a comparatively large equipotential surface that acts effectively as a ground-is responsible for this symmetry breaking. This stray capacitance drives the formation of a double layer whose zeta potential is proportional to the potential drop from the electrolyte directly above the gate electrode to the external stage. Therefore, the charge in this 'stray' double layer varies in phase with the driving field, resulting in a rectified, steady flow as with standard ICEO. We experimentally vary the stray capacitance, the electric potential of the stage and the location of the gate electrode, and find that the effect on the stray flow is qualitatively consistent with the predictions of the proposed mechanism. In the process, we demonstrate that capacitive coupling offers an additional means of manipulating fluid flow over a polarizable surface.

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

International Nuclear Information System (INIS)

Kaganovich, Igor D.; Polomarov, Oleg V.; Theodosiou, Constantine E.

2005-01-01

Radio-frequency [rf] waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, non-local theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma

Power consumption, discharge capacitance and light emission as measures for thrust production of dielectric barrier discharge plasma actuators

International Nuclear Information System (INIS)

Kriegseis, J.; Grundmann, S.; Tropea, C.

2011-01-01

A new procedure of determining the time resolved capacitance of a plasma actuator during operation is introduced, representing a simple diagnostic tool that provides insight into the phenomenological behavior of plasma actuators. The procedure is demonstrated by presenting example correlations between consumed electrical energy, size of the plasma region, and the operating voltage. It is shown that the capacitance of a plasma actuator is considerably increased by the presence of the plasma; hence a system that has previously been impedance matched can be considerably de-tuned when varying the operating voltage of the actuator. Such information is fundamental for any attempts to increase the energy efficiency of plasma-actuator systems. A combined analysis of the capacitance, light emission, size of the plasma region, force production, and power consumption is presented.

Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge

International Nuclear Information System (INIS)

Ahn, S. K.; Chang, H. Y.

2008-01-01

To elucidate plasma nonuniformity in high frequency capacitive discharges, Langmuir probe and B-dot probe measurements were carried out in the radial direction in a cylindrical capacitive discharge driven at 90 MHz with argon pressures of 50 and 400 mTorr. Through the measurements, a significant inductive electric field (i.e., time-varying magnetic field) was observed at the radial edge, and it was found that the inductive electric field creates strong plasma nonuniformity at high pressure operation. The plasma nonuniformity at high pressure operation is physically similar to the E-H mode transition typically observed in inductive discharges. This result agrees well with the theories of electromagnetic effects in large area and/or high frequency capacitive discharges

Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source

Science.gov (United States)

Zhao, Kai; Liu, Yong-Xin; Kawamura, E.; Wen, De-Qi; Lieberman, M. A.; Wang, You-Nian

2018-05-01

It is well known that the plasma non-uniformity caused by the standing wave effect has brought about great challenges for plasma material processing. To improve the plasma uniformity, a low-frequency (LF) power source is introduced into a 100 MHz very-high-frequency (VHF) capacitively coupled argon plasma reactor. The effect of the LF parameters (LF voltage amplitude ϕ L and LF source f L) on the radial profile of plasma density has been investigated by utilizing a hairpin probe. The result at a low pressure (1 Pa) is compared to the one obtained by a 2D fluid-analytical capacitively coupled plasma model, showing good agreement in the plasma density radial profile. The experimental results show that the plasma density profile exhibits different dependences on ϕ L and f L at different gas pressures/electrode driven types (i.e., the two rf sources are applied on one electrode (case I) and separate electrodes (case II)). At low pressures (e.g., 8 Pa), the pronounced standing wave effect revealed in a VHF discharge can be suppressed at a relatively high ϕ L or a low f L in case I, because the HF sheath heating is largely weakened due to strong modulation by the LF source. By contrast, ϕ L and f L play insignificant roles in suppressing the standing wave effect in case II. At high pressures (e.g., 20 Pa), the opposite is true. The plasma density radial profile is more sensitive to ϕ L and f L in case II than in case I. In case II, the standing wave effect is surprisingly enhanced with increasing ϕ L at higher pressures; however, the center-high density profile caused by the standing wave effect can be compensated by increasing f L due to the enhanced electrostatic edge effect dominated by the LF source. In contrast, the density radial profile shows a much weaker dependence on ϕ L and f L in case I at higher pressures. To understand the different roles of ϕ L and f L, the electron excitation dynamics in each case are analyzed based on the measured spatio

Simulation of dust particles in dual-frequency capacitively coupled silane discharges

International Nuclear Information System (INIS)

Liu Xiangmei; Song Yuanhong; Xu Xiang; Wang Younian

2010-01-01

The behavior of nanoparticles in dual-frequency capacitively coupled silane discharges is investigated by employing a one-dimensional self-consistent fluid model. The numerical simulation tries to trace the formation, charging, growth, and transport of dust particles during the discharge, under the influences of the high- and low-frequency electric sources, as well as the gas pressure. The effects of the presence of the nanoparticles and larger anions on the plasma properties are also discussed, especially, for the bulk potential, electron temperature, and densities of various particles. The calculation results show that the nanoparticle density and charge distribution are mainly influenced by the voltage and frequency of the high-frequency source, while the voltage of the low-frequency source can also exert an effect on the nanoparticle formation, compared with the frequency. As the discharge lasts, the electric potential and electron density keep decreasing, while the electron temperature gets increasing after a sudden drop.

Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge

International Nuclear Information System (INIS)

Sirse, N; Ellingboe, A R; Jeon, M H; Yeom, G Y

2014-01-01

Time-resolved electron density, n e , is measured in a low pressure pulsed two-frequency capacitively coupled plasma discharge sustained in Ar and in Ar/CF 4 /O 2 (80 : 10 : 10) gas mixture using a floating resonance hairpin probe. The top electrode is powered by 60 MHz in pulse mode and the bottom electrode is powered by 2 MHz in continuous wave mode. The dependence of time-resolved n e on the low frequency (LF) and high frequency (HF) power levels, operating gas pressure, pulse repetition frequency (PRF) and duty cycle are investigated. It is found that the steady state n e in the long on-phase is greatly influenced by the HF power level and slightly affected by the LF power level in both Ar and Ar/CF 4 /O 2 plasma. The decay time of n e is slow (∼30–90 µs) in the case of Ar plasma and strongly depends on the LF power level, whereas in the case of Ar/CF 4 /O 2 gas mixture it is very fast (∼15 µs) and marginally dependent on LF power level. In Ar plasma the steady state n e is increasing with a rise in operating gas pressure, however, in Ar/CF 4 /O 2 plasma it first increases with gas pressure reaching to the maximum (at 20 mTorr) value and then decreases. The pressure dependence of decay time constant mimics the pressure variation of steady state n e . Furthermore, it is observed that the on-phase electron density is greatly affected by changing the PRF and duty cycle. This effect is more prominent in Ar/CF 4 /O 2 plasma when compared to Ar discharge. In addition, n e is observed to overshoot the steady state densities in the beginning of the on-phase in Ar/CF 4 /O 2 gas mixture, but this effect is either small or absent in the case of Ar plasma. (paper)

Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

International Nuclear Information System (INIS)

Schüngel, E; Brandt, S; Schulze, J; Donkó, Z; Korolov, I; Derzsi, A

2015-01-01

The self-excitation of plasma series resonance (PSR) oscillations plays an important role in the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a theoretical model based on an equivalent circuit, we investigate the self-excitation of PSR oscillations and their effect on the electron heating in geometrically symmetric CCRF plasmas driven by multiple consecutive harmonics. The discharge symmetry is controlled via the electrical asymmetry effect (EAE), i.e. by varying the total number of harmonics and tuning the phase shifts between them. It is demonstrated that PSR oscillations will be self-excited under both symmetric and asymmetric conditions, if (i) the charge–voltage relation of the plasma sheaths deviates from a simple quadratic behavior and (ii) the inductance of the plasma bulk exhibits a temporal modulation. These two effects have been neglected up to now, but we show that they must be included in the model in order to properly describe the nonlinear series resonance circuit and reproduce the self-excitation of PSR oscillations, which are observed in the electron current density resulting from simulations of geometrically symmetric CCRF plasmas. Furthermore, the effect of PSR self-excitation on the discharge current and the plasma properties, such as the potential profile, is illustrated by applying Fourier analysis. High-frequency oscillations in the entire spectrum between the applied frequencies and the local electron plasma frequency are observed. As a consequence, the electron heating is strongly enhanced by the presence of PSR oscillations. A complex electron heating dynamics is found during the expansion phase of the sheath, which is fully collapsed, when the PSR is initially self-excited. The nonlinear electron resonance heating (NERH) associated with the PSR oscillations causes a spatial asymmetry in the electron heating. By discussing the resulting ionization

Characterisation of capacitively coupled HV/HR-CMOS sensor chips for the CLIC vertex detector

Science.gov (United States)

Kremastiotis, I.

2017-12-01

The capacitive coupling between an active sensor and a readout ASIC has been considered in the framework of the CLIC vertex detector study. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is a High-Voltage CMOS sensor chip produced in a commercial 180 nm HV-CMOS process for this purpose. The sensor was designed to be connected to the CLICpix2 readout chip. It therefore matches the dimensions of the readout chip, featuring a matrix of 128×128 square pixels with 25μm pitch. The sensor chip has been produced with the standard value for the substrate resistivity (~20 Ωcm) and it has been characterised in standalone testing mode, before receiving and testing capacitively coupled assemblies. The standalone measurement results show a rise time of ~20 ns for a power consumption of 5μW/pixel. Production of the C3PD HV-CMOS sensor chip with higher substrate resistivity wafers (~20, 80, 200 and 1000 Ωcm) is foreseen. The expected benefits of the higher substrate resistivity will be studied using future assemblies with the readout chip.

Characterisation of capacitively coupled HV/HR-CMOS sensor chips for the CLIC vertex detector

CERN Document Server

AUTHOR|(SzGeCERN)756402

2017-01-01

The capacitive coupling between an active sensor and a readout ASIC has been considered in the framework of the CLIC vertex detector study. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is a High-Voltage CMOS sensor chip produced in a commercial 180 nm HV-CMOS process for this purpose. The sensor was designed to be connected to the CLICpix2 readout chip. It therefore matches the dimensions of the readout chip, featuring a matrix of 128 × 128 square pixels with 25 μm pitch. The sensor chip has been produced with the standard value for the substrate resistivity (∼ 20 Ωcm) and it has been characterised in standalone testing mode, before receiving and testing capacitively coupled assemblies. The standalone measurement results show a rise time of ∼ 20 ns for a power consumption of 5 μW/pixel. Production of the C3PD HV-CMOS sensor chip with higher substrate resistivity wafers (∼ 20, 80, 200 and 1000 Ωcm) is foreseen. The expected benefits of the higher substrate resistivity will be studied using...

Electromagnetic effects in high-frequency capacitive discharges used for plasma processing

International Nuclear Information System (INIS)

Chabert, P

2007-01-01

In plasma processing, capacitive discharges have classically been operated in the electrostatic regime, for which the excitation wavelength λ is much greater than the electrode radius, and the plasma skin depth δ is much greater than the electrode spacing. However, contemporary reactors are larger and excited at higher frequencies which leads to strong electromagnetic effects. This paper gives a review of the work that has recently been carried out to carefully model and diagnose these effects, which cause major uniformity problems in plasma processing for microelectronics and flat panel displays industries. (topical review)

Correlated Coulomb Drag in Capacitively Coupled Quantum-Dot Structures.

Science.gov (United States)

Kaasbjerg, Kristen; Jauho, Antti-Pekka

2016-05-13

We study theoretically Coulomb drag in capacitively coupled quantum dots (CQDs)-a bias-driven dot coupled to an unbiased dot where transport is due to Coulomb mediated energy transfer drag. To this end, we introduce a master-equation approach that accounts for higher-order tunneling (cotunneling) processes as well as energy-dependent lead couplings, and identify a mesoscopic Coulomb drag mechanism driven by nonlocal multielectron cotunneling processes. Our theory establishes the conditions for a nonzero drag as well as the direction of the drag current in terms of microscopic system parameters. Interestingly, the direction of the drag current is not determined by the drive current, but by an interplay between the energy-dependent lead couplings. Studying the drag mechanism in a graphene-based CQD heterostructure, we show that the predictions of our theory are consistent with recent experiments on Coulomb drag in CQD systems.

''SensArray'' voltage sensor analysis in an inductively coupled plasma

International Nuclear Information System (INIS)

Titus, M. J.; Hsu, C. C.; Graves, D. B.

2010-01-01

A commercially manufactured PlasmaVolt sensor wafer was studied in an inductively coupled plasma reactor in an effort to validate sensor measurements. A pure Ar plasma at various powers (25-420 W), for a range of pressures (10-80 mT), and bias voltages (0-250 V) was utilized. A numerical sheath simulation was simultaneously developed in order to interpret experimental results. It was found that PlasmaVolt sensor measurements are proportional to the rf-current through the sheath. Under conditions such that the sheath impedance is dominantly capacitive, sensor measurements follow a scaling law derived from the inhomogeneous sheath model of Lieberman and Lichtenberg, [Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005)]. Under these conditions, sensor measurements are proportional to the square root of the plasma density at the plasma-sheath interface, the one-fourth root of the electron temperature, and the one-fourth root of the rf bias voltage. When the sheath impedance becomes increasingly resistive, the sensor measurements deviate from the scaling law and tend to be directly proportional to the plasma density. The measurements and numerical sheath simulation demonstrate the scaling behavior as a function of changing sheath impedance for various plasma conditions.

The RF voltage dependence of the electron sheath heating in low pressure capacitively coupled rf discharges

International Nuclear Information System (INIS)

Buddemeier, U.; Kortshagen, U.; Pukropski, I.

1995-01-01

In low pressure capacitively coupled RF discharges two competitive electron heating mechanisms have been discussed for some time now. At low pressures the stochastic sheath heating and for somewhat higher pressures the Joule heating in the bulk plasma have been proposed. When the pressure is increased at constant RF current density a transition from concave electron distribution functions (EDF) with a pronounced cold electron group to convex EDFs with a missing strong population of cold electrons is found. This transition was interpreted as the transition from dominant stochastic to dominant Joule heating. However, a different interpretation has been given by Kaganovich and Tsendin, who attributed the concave shaped EDFs to the spatially inhomogeneous RF field in combination with the nonlocality of the EDF

Dry Etch Black Silicon with Low Surface Damage: Effect of Low Capacitively Coupled Plasma Power

DEFF Research Database (Denmark)

Iandolo, Beniamino; Plakhotnyuk, Maksym; Gaudig, Maria

2017-01-01

Black silicon fabricated by reactive ion etch (RIE) is promising for integration into silicon solar cells thanks to its excellent light trapping ability. However, intensive ion bombardment during the RIE induces surface damage, which results in enhanced surface recombination velocity. Here, we pr...... carrier lifetime thanks to reduced ion energy. Surface passivation using atomic layer deposition of Al2O3 improves the effective lifetime to 7.5 ms and 0.8 ms for black silicon n- and p-type wafers, respectively.......Black silicon fabricated by reactive ion etch (RIE) is promising for integration into silicon solar cells thanks to its excellent light trapping ability. However, intensive ion bombardment during the RIE induces surface damage, which results in enhanced surface recombination velocity. Here, we...... present a RIE optimization leading to reduced surface damage while retaining excellent light trapping and low reflectivity. In particular, we demonstrate that the reduction of the capacitively coupled power during reactive ion etching preserves a reflectance below 1% and improves the effective minority...

A capacitively coupled dose-rate-dependent transient upset mechanism in a bipolar memory

International Nuclear Information System (INIS)

Turfler, R.M.; Pease, R.L.; Dinger, G.; Armstrong, B.

1992-01-01

This paper reports on a pattern sensitivity that was observed in the threshold dose rate response of a bipolar 16K PROM for radiation pulse widths of 20-100 ns. For the worst case pattern, the upset threshold was a factor of three lower than for the commonly used checkerboard pattern. The mechanism for this pattern sensitivity was found to be a capacitively coupled voltage transient on a sensitive node which caused a low-to-high transition at the output. A design fix was implemented to significantly alter the ratio of the two parasitic capacitances in a capacitive divider which reduced the amplitude of the voltage transient at the sensitive node. It was demonstrated that in the redesign, the pattern sensitivity was eliminated

Research on the Plasma Anemometer Based on AC Glow Discharge

Directory of Open Access Journals (Sweden)

Bing Yu

2017-01-01

Full Text Available A new plasma anemometer based on AC glow discharge is designed in this article. Firstly, theoretical analysis of plasma anemometer working principle is introduced to prove the feasibility of the experimental measurement method. Then the experiments are carried out to study the effects of different parameters on the static discharge characteristics of the plasma anemometer system, by which the system optimization methods are obtained. Finally, several groups of appropriate parameters are selected to build the plasma anemometer system based on resistance capacitance coupling negative feedback AC glow discharge, and different airflow speeds are applied to obtain the achievable velocity measurement range. The results show that there is a linear relationship between airflow velocity and discharge current in an allowable error range, which can be applied for airflow velocity measurement. Negative feedback coupling module, which is composed of the coupling resistance and the coupling capacitance, has good effects on improving the system stability. The measurement range of the airflow velocity is significantly increased when the electrode gap is 3 mm, coupling resistance is 470 Ω, and coupling capacitance is 220 pF.

Formation Of Carbon Oxides In CH4/O2 Plasmas Produced By Inductively Coupled RF Discharges At Low Pressure

International Nuclear Information System (INIS)

Moeller, Ivonne; Soltwisch, Henning

2003-01-01

The formation of CO and CO2 has been studied in inductively coupled rf (13.56 MHz) discharges with varied mixtures of CH4 and O2 as feed gases at a total pressure of 10 Pa, flow rates of <10 sccm, and input powers of <500 W. The primary diagnostic tool has been TDLAS (tunable diode laser absorption spectroscopy) to measure absolute concentrations of molecular species as well as their kinetic and rovibrational temperatures. Of particular interest is the sudden transition between different modes of power coupling (capacitive and inductive mode, resp.) and the related changes of the plasma composition. We have found that the power threshold for this transition exhibits a clear hysteresis and depends on the oxygen content. Comparing the ratio of the CO- and CO2-concentrations in capacitive mode with corresponding data from a parallel-plate discharge, clear differences have been observed. The findings can partly be explained on the basis of plasma-chemical reaction chains using tabulated cross-sections in combination with estimations of the electron energy distribution function. Some observations (as, e.g. the presence of CO in inductively coupled plasmas that are fed by pure oxygen) cannot be understood from volume reactions only but point to an important role of surface processes, which depend on the materials of the discharge chamber and on its history and cleaning method

Design and standalone characterisation of a capacitively coupled HV-CMOS sensor chip for the CLIC vertex detector

Science.gov (United States)

Kremastiotis, I.; Ballabriga, R.; Campbell, M.; Dannheim, D.; Fiergolski, A.; Hynds, D.; Kulis, S.; Peric, I.

2017-09-01

The concept of capacitive coupling between sensors and readout chips is under study for the vertex detector at the proposed high-energy CLIC electron positron collider. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is an active High-Voltage CMOS sensor, designed to be capacitively coupled to the CLICpix2 readout chip. The chip is implemented in a commercial 180 nm HV-CMOS process and contains a matrix of 128×128 square pixels with 25μm pitch. First prototypes have been produced with a standard resistivity of ~20 Ωcm for the substrate and tested in standalone mode. The results show a rise time of ~20 ns, charge gain of 190 mV/ke- and ~40 e- RMS noise for a power consumption of 4.8μW/pixel. The main design aspects, as well as standalone measurement results, are presented.

Electrical description of a magnetic pole enhanced inductively coupled plasma source: Refinement of the transformer model by reverse electromagnetic modeling

International Nuclear Information System (INIS)

Meziani, T.; Colpo, P.; Rossi, F.

2006-01-01

The magnetic pole enhanced inductively coupled source (MaPE-ICP) is an innovative low-pressure plasma source that allows for high plasma density and high plasma uniformity, as well as large-area plasma generation. This article presents an electrical characterization of this source, and the experimental measurements are compared to the results obtained after modeling the source by the equivalent circuit of the transformer. In particular, the method applied consists in performing a reverse electromagnetic modeling of the source by providing the measured plasma parameters such as plasma density and electron temperature as an input, and computing the total impedance seen at the primary of the transformer. The impedance results given by the model are compared to the experimental results. This approach allows for a more comprehensive refinement of the electrical model in order to obtain a better fitting of the results. The electrical characteristics of the system, and in particular the total impedance, were measured at the inductive coil antenna (primary of the transformer). The source was modeled electrically by a finite element method, treating the plasma as a conductive load and taking into account the complex plasma conductivity, the value of which was calculated from the electron density and electron temperature measurements carried out previously. The electrical characterization of the inductive excitation source itself versus frequency showed that the source cannot be treated as purely inductive and that the effect of parasitic capacitances must be taken into account in the model. Finally, considerations on the effect of the magnetic core addition on the capacitive component of the coupling are made

Passive inference of collision frequency in magnetized capacitive argon discharge

Science.gov (United States)

Binwal, S.; Joshi, J. K.; Karkari, S. K.; Kaw, P. K.; Nair, L.

2018-03-01

A non-invasive method of determining the collision frequency νm by measuring the net plasma impendence in a magnetized, capacitive-coupled, radio-frequency (rf) discharge circuit is developed. The collision frequency has been analytically expressed in terms of bulk plasma reactance, wherein standard sheath models have been used to estimate the reactance offered due to the capacitive rf sheaths at the discharge plates. The experimental observations suggest that in the un-magnetized case, νm remains constant over a range of rf current but steadily increases as the background pressure reduces. In the magnetized case, the collision frequency has been observed to decay with the increase in rf current while it remains unaffected by the background pressure. A qualitative discussion has been presented to explain these characteristics.

Nanocellulose coupled flexible polypyrrole@graphene oxide composite paper electrodes with high volumetric capacitance

Science.gov (United States)

Wang, Zhaohui; Tammela, Petter; Strømme, Maria; Nyholm, Leif

2015-02-01

A robust and compact freestanding conducting polymer-based electrode material based on nanocellulose coupled polypyrrole@graphene oxide paper is straightforwardly prepared via in situ polymerization for use in high-performance paper-based charge storage devices, exhibiting stable cycling over 16 000 cycles at 5 A g-1 as well as the largest specific volumetric capacitance (198 F cm-3) so far reported for flexible polymer-based electrodes.A robust and compact freestanding conducting polymer-based electrode material based on nanocellulose coupled polypyrrole@graphene oxide paper is straightforwardly prepared via in situ polymerization for use in high-performance paper-based charge storage devices, exhibiting stable cycling over 16 000 cycles at 5 A g-1 as well as the largest specific volumetric capacitance (198 F cm-3) so far reported for flexible polymer-based electrodes. Electronic supplementary information (ESI) available. See DOI: 10.1039/c4nr07251k

TOPICAL REVIEW: Electromagnetic effects in high-frequency capacitive discharges used for plasma processing

Science.gov (United States)

Chabert, P.

2007-02-01

In plasma processing, capacitive discharges have classically been operated in the electrostatic regime, for which the excitation wavelength λ is much greater than the electrode radius, and the plasma skin depth δ is much greater than the electrode spacing. However, contemporary reactors are larger and excited at higher frequencies which leads to strong electromagnetic effects. This paper gives a review of the work that has recently been carried out to carefully model and diagnose these effects, which cause major uniformity problems in plasma processing for microelectronics and flat panel displays industries.

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Science.gov (United States)

Liu, Yue; Booth, Jean-Paul; Chabert, Pascal

2018-02-01

A Cartesian-coordinate two-dimensional electrostatic particle-in-cell/Monte Carlo collision (PIC/MCC) plasma simulation code is presented, including a new treatment of charge balance at dielectric boundaries. It is used to simulate an Ar plasma in a symmetric radiofrequency capacitively-coupled parallel-plate reactor with a thick (3.5 cm) dielectric side-wall. The reactor size (12 cm electrode width, 2.5 cm electrode spacing) and frequency (15 MHz) are such that electromagnetic effects can be ignored. The dielectric side-wall effectively shields the plasma from the enhanced electric field at the powered-grounded electrode junction, which has previously been shown to produce locally enhanced plasma density (Dalvie et al 1993 Appl. Phys. Lett. 62 3207-9 Overzet and Hopkins 1993 Appl. Phys. Lett. 63 2484-6 Boeuf and Pitchford 1995 Phys. Rev. E 51 1376-90). Nevertheless, enhanced electron heating is observed in a region adjacent to the dielectric boundary, leading to maxima in ionization rate, plasma density and ion flux to the electrodes in this region, and not at the reactor centre as would otherwise be expected. The axially-integrated electron power deposition peaks closer to the dielectric edge than the electron density. The electron heating components are derived from the PIC/MCC simulations and show that this enhanced electron heating results from increased Ohmic heating in the axial direction as the electron density decreases towards the side-wall. We investigated the validity of different analytical formulas to estimate the Ohmic heating by comparing them to the PIC results. The widespread assumption that a time-averaged momentum transfer frequency, v m , can be used to estimate the momentum change can cause large errors, since it neglects both phase and amplitude information. Furthermore, the classical relationship between the total electron current and the electric field must be used with caution, particularly close to the dielectric edge where the (neglected

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

International Nuclear Information System (INIS)

Donkó, Z; Derzsi, A; Hartmann, P; Korolov, I; Schulze, J; Czarnetzki, U; Schüngel, E

2012-01-01

Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (e.g. chip and solar cell manufacturing, realization of biocompatible surfaces) for several years. Nonetheless, their complex modes of operation are not fully understood and represent topics of high interest. The understanding of these phenomena is aided by modern diagnostic techniques and computer simulations. From the industrial point of view the control of ion properties is of particular interest; possibilities of independent control of the ion flux and the ion energy have been utilized via excitation of the discharges with multiple frequencies. ‘Classical’ dual-frequency (DF) discharges (where two significantly different driving frequencies are used), as well as discharges driven by a base frequency and its higher harmonic(s) have been analyzed thoroughly. It has been recognized that the second solution results in an electrically induced asymmetry (electrical asymmetry effect), which provides the basis for the control of the mean ion energy. This paper reviews recent advances on studies of the different electron heating mechanisms, on the possibilities of the separate control of ion energy and ion flux in DF discharges, on the effects of secondary electrons, as well as on the non-linear behavior (self-generated resonant current oscillations) of capacitive RF plasmas. The work is based on a synergistic approach of theoretical modeling, experiments and kinetic simulations based on the particle-in-cell approach. (paper)

Battery-powered pulsed high density inductively coupled plasma source for pre-ionization in laboratory astrophysics experiments.

Science.gov (United States)

Chaplin, Vernon H; Bellan, Paul M

2015-07-01

An electrically floating radiofrequency (RF) pre-ionization plasma source has been developed to enable neutral gas breakdown at lower pressures and to access new experimental regimes in the Caltech laboratory astrophysics experiments. The source uses a customized 13.56 MHz class D RF power amplifier that is powered by AA batteries, allowing it to safely float at 3-6 kV with the electrodes of the high voltage pulsed power experiments. The amplifier, which is capable of 3 kW output power in pulsed (<1 ms) operation, couples electrical energy to the plasma through an antenna external to the 1.1 cm radius discharge tube. By comparing the predictions of a global equilibrium discharge model with the measured scalings of plasma density with RF power input and axial magnetic field strength, we demonstrate that inductive coupling (rather than capacitive coupling or wave damping) is the dominant energy transfer mechanism. Peak ion densities exceeding 5 × 10(19) m(-3) in argon gas at 30 mTorr have been achieved with and without a background field. Installation of the pre-ionization source on a magnetohydrodynamically driven jet experiment reduced the breakdown time and jitter and allowed for the creation of hotter, faster argon plasma jets than was previously possible.

Effect of capacitive feedback on the characteristics of direct current superconducting quantum interference device coupled to a multiturn input coil

International Nuclear Information System (INIS)

Minotani, T.; Enpuku, K.; Kuroki, Y.

1997-01-01

Distortion of voltage versus flux (V endash Φ) relation of a dc superconducting quantum interference device (SQUID) coupled to a multiturn input coil is studied. First, resonant behavior of the coupled SQUID due to the so-called input coil resonance is clarified. It is shown that large rf noise flux is produced by the input coil resonance. This rf flux is added to the SQUID, and results in large rf voltage across the SQUID. In the case where parasitic capacitance exists between the input coil and the ground of the SQUID, this rf voltage produces the rf flux again, i.e., a feedback loop for the rf flux is formed. Taking into account this capacitive feedback, we study the V endash Φ relation of the coupled SQUID. Numerical simulation shows that the V endash Φ relation is distorted considerably by the feedback mechanism. The simulation result explains well the experimental V endash Φ relation of the coupled SQUID. The combination of the input coil resonance with the capacitive feedback is the most likely mechanism for the distorted V endash Φ curve of the coupled SQUID. The condition for occurrence of the distorted V endash Φ curve due to the capacitive feedback is also obtained, and methods to prevent degradation are discussed. copyright 1997 American Institute of Physics

Quenching of the OH and nitrogen molecular emission by methane addition in an Ar capacitively coupled plasma to remove spectral interference in lead determination by atomic fluorescence spectrometry

Energy Technology Data Exchange (ETDEWEB)

Frentiu, T., E-mail: ftibi@chem.ubbcluj.r [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Ponta, M., E-mail: mponta@chem.ubbcluj.r [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Mihaltan, A.I., E-mail: alinblaj2005@yahoo.co [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania); Darvasi, E., E-mail: edarvasi@chem.ubbcluj.r [Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Arany Janos 11, 400028 Cluj-Napoca (Romania); Frentiu, M., E-mail: frentiu.maria@yahoo.co [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania); Cordos, E., E-mail: emilcordos@gmail.co [National Institute for Research and Development of Optoelectronics Bucharest - Research Institute for Analytical Instrumentation, Donath 67, 400293 Cluj-Napoca (Romania)

2010-07-15

A new method is proposed to remove the spectral interference on elements in atomic fluorescence spectrometry by quenching of the molecular emission of the OH radical (A{sup 2{Sigma}+} {yields} X{sup 2{Pi}}) and N{sub 2} second positive system (C{sup 3{Pi}}{sub u} {yields} B{sup 3{Sigma}}{sub g}) in the background spectrum of medium power Ar plasmas. The experiments were carried out in a radiofrequency capacitively coupled plasma (275 W, 27.12 MHz) by CH{sub 4} addition. The quenching is the result of the high affinity of OH radical for a hydrogen atom from the CH{sub 4} molecule and the collisions of the second kind between nitrogen excited molecules and CH{sub 4}, respectively. The decrease of the emission of N{sub 2} second positive system in the presence of CH{sub 4} is also the result of the deactivation of the metastable argon atoms that could excite the nitrogen molecules. For flow rates of 0.7 l min{sup -1} Ar with addition of 7.5 ml min{sup -1} CH{sub 4}, the molecular emission of OH and N{sub 2} was completely removed from the plasma jet spectrum at viewing heights above 60 mm. The molecular emission associated to CH and CH{sub 2} species was not observed in the emission spectrum of Ar/CH{sub 4} plasma in the ultraviolet range. The method was experimented for the determination of Pb at 283.31 nm by atomic fluorescence spectrometry with electrodeless discharge lamp and a multichannel microspectrometer. The detection limit was 35 ng ml{sup -1}, 2-3 times better than in atomic emission spectrometry using the same plasma source, and similar to that in hollow cathode lamp microwave plasma torch atomic fluorescence spectrometry.

Instabilities in strongly coupled plasmas

CERN Document Server

Kalman, G J

2003-01-01

The conventional Vlasov treatment of beam-plasma instabilities is inappropriate when the plasma is strongly coupled. In the strongly coupled liquid state, the strong correlations between the dust grains fundamentally affect the conditions for instability. In the crystalline state, the inherent anisotropy couples the longitudinal and transverse polarizations, and results in unstable excitations in both polarizations. We summarize analyses of resonant and non-resonant, as well as resistive instabilities. We consider both ion-dust streaming and dust beam-plasma instabilities. Strong coupling, in general, leads to an enhancement of the growth rates. In the crystalline phase, a resonant transverse instability can be excited.

Highly selective etching of silicon nitride to physical-vapor-deposited a-C mask in dual-frequency capacitively coupled CH2F2/H2 plasmas

International Nuclear Information System (INIS)

Kim, J. S.; Kwon, B. S.; Heo, W.; Jung, C. R.; Park, J. S.; Shon, J. W.; Lee, N.-E.

2010-01-01

A multilevel resist (MLR) structure can be fabricated based on a very thin amorphous carbon (a-C) layer ( congruent with 80 nm) and Si 3 N 4 hard-mask layer ( congruent with 300 nm). The authors investigated the selective etching of the Si 3 N 4 layer using a physical-vapor-deposited (PVD) a-C mask in a dual-frequency superimposed capacitively coupled plasma etcher by varying the process parameters in the CH 2 F 2 /H 2 /Ar plasmas, viz., the etch gas flow ratio, high-frequency source power (P HF ), and low-frequency source power (P LF ). They found that under certain etch conditions they obtain infinitely high etch selectivities of the Si 3 N 4 layers to the PVD a-C on both the blanket and patterned wafers. The etch gas flow ratio played a critical role in determining the process window for infinitely high Si 3 N 4 /PVD a-C etch selectivity because of the change in the degree of polymerization. The etch results of a patterned ArF photoresisit/bottom antireflective coating/SiO x /PVD a-C/Si 3 N 4 MLR structure supported the idea of using a very thin PVD a-C layer as an etch-mask layer for the Si 3 N 4 hard-mask pattern with a pattern width of congruent with 80 nm and high aspect ratio of congruent with 5.

Electron heating in low pressure capacitive discharges revisited

Energy Technology Data Exchange (ETDEWEB)

Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J. [Department of Electrical Engineering and Computer Sciences University of California, Berkeley, California 94720 (United States)

2014-12-15

The electrons in capacitively coupled plasmas (CCPs) absorb energy via ohmic heating due to electron-neutral collisions and stochastic heating due to momentum transfer from high voltage moving sheaths. We use Particle-in-Cell (PIC) simulations to explore these heating mechanisms and to compare the PIC results with available theories on ohmic and stochastic heating. The PIC results for ohmic heating show good agreement with the ohmic heating calculation of Lafleur et al. [Phys. Plasmas 20, 124503 (2013)]. The PIC results for stochastic heating in low pressure CCPs with collisionless sheaths show good agreement with the stochastic heating model of Kaganovich et al. [IEEE Trans. Plasma Sci. 34, 696 (2006)], which revises the hard wall asymptotic model of Lieberman [IEEE Trans. Plasma Sci. 16, 638 (1988)] by taking current continuity and bulk oscillation into account.

Electron heating in low pressure capacitive discharges revisited

International Nuclear Information System (INIS)

Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.

2014-01-01

The electrons in capacitively coupled plasmas (CCPs) absorb energy via ohmic heating due to electron-neutral collisions and stochastic heating due to momentum transfer from high voltage moving sheaths. We use Particle-in-Cell (PIC) simulations to explore these heating mechanisms and to compare the PIC results with available theories on ohmic and stochastic heating. The PIC results for ohmic heating show good agreement with the ohmic heating calculation of Lafleur et al. [Phys. Plasmas 20, 124503 (2013)]. The PIC results for stochastic heating in low pressure CCPs with collisionless sheaths show good agreement with the stochastic heating model of Kaganovich et al. [IEEE Trans. Plasma Sci. 34, 696 (2006)], which revises the hard wall asymptotic model of Lieberman [IEEE Trans. Plasma Sci. 16, 638 (1988)] by taking current continuity and bulk oscillation into account

Electron heating in low pressure capacitive discharges revisited

Science.gov (United States)

Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.

2014-12-01

The electrons in capacitively coupled plasmas (CCPs) absorb energy via ohmic heating due to electron-neutral collisions and stochastic heating due to momentum transfer from high voltage moving sheaths. We use Particle-in-Cell (PIC) simulations to explore these heating mechanisms and to compare the PIC results with available theories on ohmic and stochastic heating. The PIC results for ohmic heating show good agreement with the ohmic heating calculation of Lafleur et al. [Phys. Plasmas 20, 124503 (2013)]. The PIC results for stochastic heating in low pressure CCPs with collisionless sheaths show good agreement with the stochastic heating model of Kaganovich et al. [IEEE Trans. Plasma Sci. 34, 696 (2006)], which revises the hard wall asymptotic model of Lieberman [IEEE Trans. Plasma Sci. 16, 638 (1988)] by taking current continuity and bulk oscillation into account.

Tuning the ITO work function by capacitively coupled plasma and its application in inverted organic solar cells

International Nuclear Information System (INIS)

Fang, Ming; Zhang, Chunmei; Chen, Qiang

2016-01-01

Highlights: • The work function of ITO was reduced by plasma treatment. • The reduction of the work function was attributed to the variation in chemical component of ITO surface. • The inverted solar cell without electron transport layer was fabricated using plasma-treated ITO. • Optimal power conversion efficiency of 3.22% was achieved. - Abstract: In this paper, we investigated the performance of inverted organic solar cells (OSCs) with plasma-treated indium tin oxide (ITO) as the cathode for omitting an electron transport layer. The Ar plasma was produced by capcitively coupled plasma setup under 20 Pa chamber pressure. For the device with the structure of plasma-treated ITO/P3HT:PCBM/MoO_3/Ag, a power conversion efficiency (PCE) of 3.22% was achieved, whereas PCE of 1.13% was recorded from the device fabricated with the pristine ITO. The photovoltaic performance was found to be dependent on the applied power of plasma. After analyzing by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), we concluded that the chemical component variation of ITOs surface resulted in the decrease of ITO work function, which meant that the ITO Fermi level became shallow relative to the vacuum level. The low work function of ITO should be responsible for the improvement of inverted OSCs because of the better energy level alignment between ITO and the photoactive layer.

Tuning the ITO work function by capacitively coupled plasma and its application in inverted organic solar cells

Energy Technology Data Exchange (ETDEWEB)

Fang, Ming [Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing (China); Zhang, Chunmei, E-mail: zhangchunmei@bigc.edu.cn [Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing (China); Chen, Qiang [Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing (China); State Key Laboratory of Electrical Insulation and Power Equipment, Xi’an Jiaotong University, Xi’an (China)

2016-11-01

Highlights: • The work function of ITO was reduced by plasma treatment. • The reduction of the work function was attributed to the variation in chemical component of ITO surface. • The inverted solar cell without electron transport layer was fabricated using plasma-treated ITO. • Optimal power conversion efficiency of 3.22% was achieved. - Abstract: In this paper, we investigated the performance of inverted organic solar cells (OSCs) with plasma-treated indium tin oxide (ITO) as the cathode for omitting an electron transport layer. The Ar plasma was produced by capcitively coupled plasma setup under 20 Pa chamber pressure. For the device with the structure of plasma-treated ITO/P3HT:PCBM/MoO{sub 3}/Ag, a power conversion efficiency (PCE) of 3.22% was achieved, whereas PCE of 1.13% was recorded from the device fabricated with the pristine ITO. The photovoltaic performance was found to be dependent on the applied power of plasma. After analyzing by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), we concluded that the chemical component variation of ITOs surface resulted in the decrease of ITO work function, which meant that the ITO Fermi level became shallow relative to the vacuum level. The low work function of ITO should be responsible for the improvement of inverted OSCs because of the better energy level alignment between ITO and the photoactive layer.

Plasma Etching of superconducting radio frequency cavity by Ar/Cl2 capacitively coupled Plasma

Science.gov (United States)

Upadhyay, Janardan; Popovic, Svetozar; Valente-Feliciano, Anne-Marie; Phillips, Larry; Vuskovic, Lepsha

2016-09-01

We are developing plasma processing technology of superconducting radio frequency (SRF) cavities. The formation of dc self-biases due to surface area asymmetry in this type of plasma and its variation on the pressure, rf power and gas composition was measured. Enhancing the surface area of the inner electrode to reduce the asymmetry was studied by changing the contour of the inner electrode. The optimized contour of the electrode based on these measurements was chosen for SRF cavity processing. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity is used, which previously mechanically polished, buffer chemically etched afterwards and rf tested at cryogenic temperatures for a baseline test. Plasma processing was accomplished by moving axially the inner electrode and the gas flow inlet in a step-wise manner to establish segmented plasma processing. The cavity is rf tested afterwards at cryogenic temperatures. The rf test and surface condition results are presented.

Verification of high voltage rf capacitive sheath models with particle-in-cell simulations

Science.gov (United States)

Wang, Ying; Lieberman, Michael; Verboncoeur, John

2009-10-01

Collisionless and collisional high voltage rf capacitive sheath models were developed in the late 1980's [1]. Given the external parameters of a single-frequency capacitively coupled discharge, plasma parameters including sheath width, electron and ion temperature, plasma density, power, and ion bombarding energy can be estimated. One-dimensional electrostatic PIC codes XPDP1 [2] and OOPD1 [3] are used to investigate plasma behaviors within rf sheaths and bulk plasma. Electron-neutral collisions only are considered for collisionless sheaths, while ion-neutral collisions are taken into account for collisional sheaths. The collisionless sheath model is verified very well by PIC simulations for the rf current-driven and voltage-driven cases. Results will be reported for collisional sheaths also. [1] M. A. Lieberman, IEEE Trans. Plasma Sci. 16 (1988) 638; 17 (1989) 338 [2] J. P. Verboncoeur, M. V. Alves, V. Vahedi, and C. K. Birdsall, J. Comp. Phys. 104 (1993) 321 [3] J. P. Verboncoeur, A. B. Langdon and N. T. Gladd, Comp. Phys. Comm. 87 (1995) 199

Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

International Nuclear Information System (INIS)

Eremin, Denis; Hemke, Torben; Brinkmann, Ralf Peter; Mussenbrock, Thomas

2013-01-01

The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high-frequency capacitively coupled discharges. The approximation is utilized within the framework of two different fluid models which are applied to typical cases showing pronounced standing wave and skin effects. With the first model it is demonstrated that the Darwin approximation is valid for treatment of such effects in the range of parameters under consideration. The second approach, a reduced nonlinear Darwin approximation-based model, shows that the electromagnetic phenomena persist in a more realistic setting. The Darwin approximation offers a simple and efficient way of carrying out electromagnetic simulations as it removes the Courant condition plaguing explicit electromagnetic algorithms and can be implemented as a straightforward modification of electrostatic algorithms. The algorithm described here avoids iterative schemes needed for the divergence cleaning and represents a fast and efficient solver, which can be used in fluid and kinetic models for self-consistent description of technical plasmas exhibiting certain electromagnetic activity. (paper)

Correlation-induced suppression of decoherence in capacitively coupled Cooper-pair boxes

Science.gov (United States)

Hu, Xuedong; You, J. Q.; Nori, Franco

2005-03-01

Charge fluctuations from gate bias and background traps severely limit the performance of a charge qubit in a Cooper-pair box (CPB). Here we discuss an encoding approachootnotetextJ.Q. You, X.Hu, and F. Nori, cond-mat/0407423. to control the decoherence effects of these charge fluctuations using two strongly capacitively coupled CPBs. This coupled-box system has a low-decoherence subspace of two states, for which we calculate the dephasing and relaxation rates using a master equation approach. Our results show that the inter-box Coulomb correlation can significantly suppress decoherence of this two-level system by reducing the strength of the system-environment interaction, making it a promising candidate as a logical qubit, encoded using two CPBs.

Inductively and capacitively coupled plasmas at interface: A comparative study towards highly efficient amorphous-crystalline Si solar cells

Science.gov (United States)

Guo, Yingnan; Ong, Thiam Min Brian; Levchenko, I.; Xu, Shuyan

2018-01-01

A comparative study on the application of two quite different plasma-based techniques to the preparation of amorphous/crystalline silicon (a-Si:H/c-Si) interfaces for solar cells is presented. The interfaces were fabricated and processed by hydrogen plasma treatment using the conventional plasma-enhanced chemical vacuum deposition (PECVD) and inductively coupled plasma chemical vapour deposition (ICP-CVD) methods The influence of processing temperature, radio-frequency power, treatment duration and other parameters on interface properties and degree of surface passivation were studied. It was found that passivation could be improved by post-deposition treatment using both ICP-CVD and PECVD, but PECVD treatment is more efficient for the improvement on passivation quality, whereas the minority carrier lifetime increased from 1.65 × 10-4 to 2.25 × 10-4 and 3.35 × 10-4 s after the hydrogen plasma treatment by ICP-CVD and PECVD, respectively. In addition to the improvement of carrier lifetimes at low temperatures, low RF powers and short processing times, both techniques are efficient in band gap adjustment at sophisticated interfaces.

Capacitively coupled hybrid pixel assemblies for the CLIC vertex detector

CERN Document Server

AUTHOR|(SzGeCERN)734627; Benoit, Mathieu; Dannheim, Dominik; Dette, Karola; Hynds, Daniel; Kulis, Szymon; Peric, Ivan; Petric, Marko; Redford, Sophie; Sicking, Eva; Valerio, Pierpaolo

2016-01-01

The vertex detector at the proposed CLIC multi-TeV linear e+e- collider must have minimal material content and high spatial resolution, combined with accurate time-stamping to cope with the expected high rate of beam-induced backgrounds. One of the options being considered is the use of active sensors implemented in a commercial high-voltage CMOS process, capacitively coupled to hybrid pixel ASICs. A prototype of such an assembly, using two custom designed chips (CCPDv3 as active sensor glued to a CLICpix readout chip), has been characterised both in the lab and in beam tests at the CERN SPS using 120 GeV/c positively charged hadrons. Results of these characterisation studies are presented both for single and dual amplification stages in the active sensor. Pixel cross-coupling results are also presented, showing the sensitivity to placement precision and planarity of the glue layer.

The effect of electrode contact resistance and capacitive coupling on Complex Resistivity measurements

DEFF Research Database (Denmark)

Ingeman-Nielsen, Thomas

2006-01-01

The effect of electrode contact resistance and capacitive coupling on complex resistivity (CR) measurements is studied in this paper. An equivalent circuit model for the receiver is developed to describe the effects. The model shows that CR measurements are severely affected even at relatively lo...... with the contact resistance artificially increased by resistors. The results emphasize the importance of keeping contact resistance low in CR measurements....

Coupled Langmuir oscillations in 2-dimensional quantum plasmas

International Nuclear Information System (INIS)

Akbari-Moghanjoughi, M.

2014-01-01

In this work, we present a hydrodynamic model to study the coupled quantum electron plasma oscillations (QEPO) for two dimensional (2D) degenerate plasmas, which incorporates all the essential quantum ingredients such as the statistical degeneracy pressure, electron-exchange, and electron quantum diffraction effect. Effects of diverse physical aspects like the electronic band-dispersion effect, the electron exchange-correlations and the quantum Bohm-potential as well as other important plasma parameters such as the coupling parameter (plasma separation) and the plasma electron number-densities on the linear response of the coupled system are investigated. By studying three different 2D plasma coupling types, namely, graphene-graphene, graphene-metalfilm, and metalfilm-metalfilm coupling configurations, it is remarked that the collective quantum effects can influence the coupled modes quite differently, depending on the type of the plasma configuration. It is also found that the slow and fast QEPO frequency modes respond very differently to the change in plasma parameters. Current findings can help in understanding of the coupled density oscillations in multilayer graphene, graphene-based heterojunctions, or nanofabricated integrated circuits

Limitations of the electromagnetic isolation for multi-antenna systems on small terminals with capacitive coupling elements

DEFF Research Database (Denmark)

Pelosi, Mauro; Alrabadi, Osama; Franek, Ondrej

2012-01-01

Recently, there has been a growing interest for evaluating the performance potential of multiple antenna systems on small terminals. This work focuses on Capacitive Coupling Elements (CCEs), which are expected to perform differently with respect to self-resonating elements. Several CCEs...

Transient performance estimation of charge plasma based negative capacitance junctionless tunnel FET

International Nuclear Information System (INIS)

Singh, Sangeeta; Kondekar, P. N.; Pal, Pawan

2016-01-01

We investigate the transient behavior of an n-type double gate negative capacitance junctionless tunnel field effect transistor (NC-JLTFET). The structure is realized by using the work-function engineering of metal electrodes over a heavily doped n + silicon channel and a ferroelectric gate stack to get negative capacitance behavior. The positive feedback in the electric dipoles of ferroelectric materials results in applied gate bias boosting. Various device transient parameters viz. transconductance, output resistance, output conductance, intrinsic gain, intrinsic gate delay, transconductance generation factor and unity gain frequency are analyzed using ac analysis of the device. To study the impact of the work-function variation of control and source gate on device performance, sensitivity analysis of the device has been carried out by varying these parameters. Simulation study reveals that it preserves inherent advantages of charge-plasma junctionless structure and exhibits improved transient behavior as well. (paper)

Capacitively coupled EMG detection via ultra-low-power microcontroller STFT.

Science.gov (United States)

Roland, Theresa; Baumgartner, Werner; Amsuess, Sebastian; Russold, Michael F

2017-07-01

As motion artefacts are a major problem with electromyography sensors, a new algorithm is developed to differentiate artefacts to contraction EMG. The performance of myoelectric prosthesis is increased with this algorithm. The implementation is done for an ultra-low-power microcontroller with limited calculation resources and memory. Short Time Fourier Transformation is used to enable real-time application. The sum of the differences (SOD) of the currently measured EMG to a reference contraction EMG is calculated. The SOD is a new parameter introduced for EMG classification. The satisfactory error rates are determined by measurements done with the capacitively coupling EMG prototype, recently developed by the research group.

Modeling of low temperature plasma for surface and Airborne decontamination

NARCIS (Netherlands)

Mihailova, D.; van Dijk, J.; Hagelaar, G.; Belenguer, P.; Guillot, P.

2014-01-01

This paper aims to study and develop new plasma-based technology for the next generation of molecular decontamination systems. A capacitively coupled plasma is considered for cleaning using the plasma fluxes directed to the walls. The model used for this purpose is the PLASIMO fluid module applied

Capacitive Coupling in Double-Circuit Transmission Lines

Directory of Open Access Journals (Sweden)

Zdenka Benesova

2004-01-01

Full Text Available The paper describes an algorithm for calculation of capacitances and charges on conductors in systems with earth wires and in double-circuit overhead lines with respect to phase arrangement. A balanced voltage system is considered. A suitable transposition of individual conductors enables to reduce the electric and magnetic fields in vicinity of overhead lines and to limit the inductive and capacitive linkage. The procedure is illustrated on examples the results of which lead to particular recommendations for designers.

Using oxygen plasma treatment to improve the performance of electrodes for capacitive water deionization

International Nuclear Information System (INIS)

Hojati-Talemi, Pejman; Zou, Linda; Fabretto, Manrico; Short, Robert D.

2013-01-01

An oxygen plasma treatment was employed to modify the surface of carbon electrodes used in capacitive deionization (CDI). X-ray photoelectron spectroscopy analysis of samples showed that oxygen plasma is mainly attaching oxygenated groups on the PTFE binder used in these electrodes. By functionalizing the binder it can increase the hydrophilicity of the electrode surface and increase the available specific surface area. 2.5 min of plasma treatment resulted in the largest improvement of CDI performance of electrodes. Thermodynamic study of CDI performance showed that the modified electrodes followed Langmuir and Freundlich isotherms resulting from the increased interaction between the enhanced electrodes and water. The kinetic study showed that the CDI process followed a pseudo-first order adsorption kinetics. The calculated adsorption rate constants suggested that plasma modification can accelerate ion adsorption of electrodes

Modelling of the dual frequency capacitive sheath in the intermediate pressure range

International Nuclear Information System (INIS)

Boyle, P C; Robiche, J; Turner, M M

2004-01-01

The nonlinearity of the plasma sheath in dual frequency capacitively coupled reactors is investigated for frequencies well above the ion plasma frequency. This work focuses on the behaviour of the voltage and the sheath width with respect to the driving current source and the collisionality regime. For typical plasma processing applications, the gas pressure ranges from a few milliTorrs to hundreds of milliTorrs, and the ion dynamics span different collisional regimes. To describe these different ion dynamics, we have used a collisionless model and a variable mobility model. The sheath widths and the voltages obtained from these two models have then been compared

A Tightly Coupled Non-Equilibrium Magneto-Hydrodynamic Model for Inductively Coupled RF Plasmas

Science.gov (United States)

2016-02-29

development a tightly coupled magneto-hydrodynamic model for Inductively Coupled Radio- Frequency (RF) Plasmas. Non Local Thermodynamic Equilibrium (NLTE...for Inductively Coupled Radio-Frequency (RF) Plasmas. Non Local Thermodynamic Equilibrium (NLTE) effects are described based on a hybrid State-to-State...Inductively Coupled Plasma (ICP) torches have wide range of possible applications which include deposition of metal coatings, synthesis of ultra-fine powders

Predictive of the quantum capacitance effect on the excitation of plasma waves in graphene transistors with scaling limit.

Science.gov (United States)

Wang, Lin; Chen, Xiaoshuang; Hu, Yibin; Wang, Shao-Wei; Lu, Wei

2015-04-28

Plasma waves in graphene field-effect transistors (FETs) and nano-patterned graphene sheets have emerged as very promising candidates for potential terahertz and infrared applications in myriad areas including remote sensing, biomedical science, military, and many other fields with their electrical tunability and strong interaction with light. In this work, we study the excitations and propagation properties of plasma waves in nanometric graphene FETs down to the scaling limit. Due to the quantum-capacitance effect, the plasma wave exhibits strong correlation with the distribution of density of states (DOS). It is indicated that the electrically tunable plasma resonance has a power-dependent V0.8 TG relation on the gate voltage, which originates from the linear dependence of density of states (DOS) on the energy in pristine graphene, in striking difference to those dominated by classical capacitance with only V0.5 TG dependence. The results of different transistor sizes indicate the potential application of nanometric graphene FETs in highly-efficient electro-optic modulation or detection of terahertz or infrared radiation. In addition, we highlight the perspectives of plasma resonance excitation in probing the many-body interaction and quantum matter state in strong correlation electron systems. This study reveals the key feature of plasma waves in decorated/nanometric graphene FETs, and paves the way to tailor plasma band-engineering and expand its application in both terahertz and mid-infrared regions.

Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma

International Nuclear Information System (INIS)

Bora, B.; Bhuyan, H.; Favre, M.; Wyndham, E.; Chuaqui, H.

2012-01-01

Plasma series resonance (PSR) effect is well known in geometrically asymmetric capacitively couple radio frequency plasma. However, plasma series resonance effect in geometrically symmetric plasma has not been properly investigated. In this work, a theoretical approach is made to investigate the plasma series resonance effect and its influence on Ohmic and stochastic heating in geometrically symmetric discharge. Electrical asymmetry effect by means of dual frequency voltage waveform is applied to excite the plasma series resonance. The results show considerable variation in heating with phase difference between the voltage waveforms, which may be applicable in controlling the plasma parameters in such plasma.

Interaction of UV laser pulses with reactive dusty plasmas

NARCIS (Netherlands)

van de Wetering, F.M.J.H.; Beckers, J.; Nijdam, S.; Oosterbeek, W.; Kovacevic, E.; Berndt, J.

2016-01-01

This contribution deals with the effects of UV photons on the synthesis and transport of nanoparticles in reactive complex plasmas (capacitively coupled RF discharge). First measurements showed that the irradiation of a reactive acetylene-argon plasma with high-energy, ns UV laser pulses (355 nm, 75

Transition of RF internal antenna plasma by gas control

Energy Technology Data Exchange (ETDEWEB)

Hamajima, Takafumi; Yamauchi, Toshihiko; Kobayashi, Seiji; Hiruta, Toshihito; Kanno, Yoshinori [Advanced Institute of Industrial Technology, 1-10-40 HigashiOhi, Shinagawa-ku, Tokyo, 140-0011 (Japan); Japan Atomic Energy Agency, 2-4 Tokai-mura, Naka-gun, Ibaraki-ken, 319-1195 (Japan)

2012-07-11

The transition between the capacitively coupled plasma (CCP) and the inductively coupled plasma (ICP) was investigated with the internal radio frequency (RF) multi-turn antenna. The transition between them showed the hysteresis curve. The radiation power and the period of the self-pulse mode became small in proportion to the gas pressure. It was found that the ICP transition occurred by decreasing the gas pressure from 400 Pa.

Analysis of ecstasy tablets using capillary electrophoresis with capacitively coupled contactless conductivity detection.

Science.gov (United States)

Porto, Suely K S S; Nogueira, Thiago; Blanes, Lucas; Doble, Philip; Sabino, Bruno D; do Lago, Claudimir L; Angnes, Lúcio

2014-11-01

A method for the identification of 3,4-methylenedioxymethamphetamine (MDMA) and meta-chlorophenylpiperazine (mCPP) was developed employing capillary electrophoresis (CE) with capacitively coupled contactless conductivity detection (C(4) D). Sample extraction, separation, and detection of "Ecstasy" tablets were performed in fenproporex, caffeine, lidocaine, and cocaine. Separation was performed in <90 sec. The advantages of using C(4) D instead of traditional CE-UV methods for in-field analysis are also discussed. © 2014 American Academy of Forensic Sciences.

2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

International Nuclear Information System (INIS)

Kawamura, E; Lichtenberg, A J; Lieberman, M A; Marakhtanov, A M

2016-01-01

A fast 2D axisymmetric fluid-analytical multifrequency capacitively coupled plasma (CCP) reactor code is used to study center high nonuniformity in a low pressure electronegative chlorine discharge. In the code, a time-independent Helmholtz wave equation is used to solve for the capacitive fields in the linearized frequency domain. This eliminates the time dependence from the electromagnetic (EM) solve, greatly speeding up the simulations at the cost of neglecting higher harmonics. However, since the code allows up to three driving frequencies, we can add the two most important harmonics to the CCP simulations as the second and third input frequencies. The amplitude and phase of these harmonics are estimated by using a recently developed 1D radial nonlinear transmission line (TL) model of a highly asymmetric cylindrical discharge (Lieberman et al 2015 Plasma Sources Sci. Technol. 24 055011). We find that at higher applied frequencies, the higher harmonics contribute significantly to the center high nonuniformity due to their shorter plasma wavelengths. (paper)

Plasma ignition and steady state simulations of the Linac4 H$^{-}$ ion source

CERN Document Server

Mattei, S; Yasumoto, M; Hatayama, A; Lettry, J; Grudiev, A

2014-01-01

The RF heating of the plasma in the Linac4 H- ion source has been simulated using an Particle-in-Cell Monte Carlo Collision method (PIC-MCC). This model is applied to investigate the plasma formation starting from an initial low electron density of 1012 m-3 and its stabilization at 1018 m-3. The plasma discharge at low electron density is driven by the capacitive coupling with the electric field generated by the antenna, and as the electron density increases the capacitive electric field is shielded by the plasma and induction drives the plasma heating process. Plasma properties such as e-/ion densities and energies, sheath formation and shielding effect are presented and provide insight to the plasma properties of the hydrogen plasma.

Modeling, fabrication and plasma actuator coupling of flexible pressure sensors for flow separation detection and control in aeronautical applications

Science.gov (United States)

Francioso, L.; De Pascali, C.; Pescini, E.; De Giorgi, M. G.; Siciliano, P.

2016-06-01

Preventing the flow separation could enhance the performance of propulsion systems and future civil aircraft. To this end, a fast detection of boundary layer separation is mandatory for a sustainable and successful application of active flow control devices, such as plasma actuators. The present work reports on the design, fabrication and functional tests of low-cost capacitive pressure sensors coupled with dielectric barrier discharge (DBD) plasma actuators to detect and then control flow separation. Finite element method (FEM) simulations were used to obtain information on the deflection and the stress distribution in different-shaped floating membranes. The sensor sensitivity as a function of the pressure load was also calculated by experimental tests. The results of the calibration of different capacitive pressure sensors are reported in this work, together with functional tests in a wind tunnel equipped with a curved wall plate on which a DBD plasma actuator was mounted to control the flow separation. The flow behavior was experimentally investigated by particle image velocimetry (PIV) measurements. Statistical and spectral analysis, applied to the output signals of the pressure sensor placed downstream of the profile leading edge, demonstrated that the sensor is able to discriminate different ionic wind velocity and turbulence conditions. The sensor sensitivity in the 0-100 Pa range was experimentally measured and it ranged between 0.0030 and 0.0046 pF Pa-1 for the best devices.

Low pressure plasmas and microstructuring technology

CERN Document Server

Franz, Gerhard

2009-01-01

A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams.

Design of a Short/Open-Ended Slot Antenna with Capacitive Coupling Feed Strips for Hepta-Band Mobile Application

Directory of Open Access Journals (Sweden)

Kyoseung Keum

2018-01-01

Full Text Available In this paper, a planar printed hybrid short/open-ended slot antenna with capacitive coupling feed strips is proposed for hepta-band mobile applications. The proposed antenna is comprised of a slotted ground plane on the top plane and two capacitive coupling feed strips with a chip inductor on the bottom plane. At the low frequency band, the short-ended long slot fed by strip 1 generates its half-wavelength resonance mode, whereas the T-shaped open ended slot fed by strip 2 generates its quarter-wavelength resonance mode for the high frequency band. The antenna provides a wide bandwidth covering GSM850/GSM900/DCS/PCS/UMTS/LTE2300/LTE2500 operation bands. Moreover, the antenna occupies a small volume of 15 mm × 50 mm × 1 mm. The operating principle of the proposed antenna and the simulation/measurement results are presented and discussed.

Modeling of low pressure plasma sources for microelectronics fabrication

International Nuclear Information System (INIS)

Agarwal, Ankur; Bera, Kallol; Kenney, Jason; Rauf, Shahid; Likhanskii, Alexandre

2017-01-01

Chemically reactive plasmas operating in the 1 mTorr–10 Torr pressure range are widely used for thin film processing in the semiconductor industry. Plasma modeling has come to play an important role in the design of these plasma processing systems. A number of 3-dimensional (3D) fluid and hybrid plasma modeling examples are used to illustrate the role of computational investigations in design of plasma processing hardware for applications such as ion implantation, deposition, and etching. A model for a rectangular inductively coupled plasma (ICP) source is described, which is employed as an ion source for ion implantation. It is shown that gas pressure strongly influences ion flux uniformity, which is determined by the balance between the location of plasma production and diffusion. The effect of chamber dimensions on plasma uniformity in a rectangular capacitively coupled plasma (CCP) is examined using an electromagnetic plasma model. Due to high pressure and small gap in this system, plasma uniformity is found to be primarily determined by the electric field profile in the sheath/pre-sheath region. A 3D model is utilized to investigate the confinement properties of a mesh in a cylindrical CCP. Results highlight the role of hole topology and size on the formation of localized hot-spots. A 3D electromagnetic plasma model for a cylindrical ICP is used to study inductive versus capacitive power coupling and how placement of ground return wires influences it. Finally, a 3D hybrid plasma model for an electron beam generated magnetized plasma is used to understand the role of reactor geometry on plasma uniformity in the presence of E  ×  B drift. (paper)

Modeling of low pressure plasma sources for microelectronics fabrication

Science.gov (United States)

Agarwal, Ankur; Bera, Kallol; Kenney, Jason; Likhanskii, Alexandre; Rauf, Shahid

2017-10-01

Chemically reactive plasmas operating in the 1 mTorr-10 Torr pressure range are widely used for thin film processing in the semiconductor industry. Plasma modeling has come to play an important role in the design of these plasma processing systems. A number of 3-dimensional (3D) fluid and hybrid plasma modeling examples are used to illustrate the role of computational investigations in design of plasma processing hardware for applications such as ion implantation, deposition, and etching. A model for a rectangular inductively coupled plasma (ICP) source is described, which is employed as an ion source for ion implantation. It is shown that gas pressure strongly influences ion flux uniformity, which is determined by the balance between the location of plasma production and diffusion. The effect of chamber dimensions on plasma uniformity in a rectangular capacitively coupled plasma (CCP) is examined using an electromagnetic plasma model. Due to high pressure and small gap in this system, plasma uniformity is found to be primarily determined by the electric field profile in the sheath/pre-sheath region. A 3D model is utilized to investigate the confinement properties of a mesh in a cylindrical CCP. Results highlight the role of hole topology and size on the formation of localized hot-spots. A 3D electromagnetic plasma model for a cylindrical ICP is used to study inductive versus capacitive power coupling and how placement of ground return wires influences it. Finally, a 3D hybrid plasma model for an electron beam generated magnetized plasma is used to understand the role of reactor geometry on plasma uniformity in the presence of E  ×  B drift.

Double plasma system with inductively coupled source plasma and quasi-quiescent target plasma

International Nuclear Information System (INIS)

Massi, M.; Maciel, H.S.

1995-01-01

Cold plasmas have successfully been used in the plasma-assisted material processing industry. An understanding of the physicochemical mechanisms involved in the plasma-surface interaction is needed for a proper description of deposition and etching processes at material surfaces. Since these mechanisms are dependent on the plasma properties, the development of diagnostic techniques is strongly desirable for determination of the plasma parameters as well as the characterization of the electromagnetic behaviour of the discharge. In this work a dual discharge chamber, was specially designed to study the deposition of thin films via plasma polymerization process. In the Pyrex chamber an inductively coupled plasma can be excited either in the diffuse low density E-mode or in the high density H-mode. This plasma diffuses into the cylindrical stainless steel chamber which is covered with permanent magnets to produce a multidipole magnetic field configuration at the surface. By that means a double plasma is established consisting of a RF source plasma coupled to a quasi-quiescent target plasma. The preliminary results presented here refer to measurements of the profiles of plasma parameters along the central axis of the double plasma apparatus. Additionally a spectrum analysis performed by means of a Rogowski coil probe immersed into the source plasma is also presented. The discharge is made in argon with pressure varying from 10 -2 to 1 torr, and the rf from 10 to 150 W

Multi-Channel Capacitive Sensor Arrays

Directory of Open Access Journals (Sweden)

Bingnan Wang

2016-01-01

Full Text Available In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved.

Modeling, fabrication and plasma actuator coupling of flexible pressure sensors for flow separation detection and control in aeronautical applications

International Nuclear Information System (INIS)

Francioso, L; De Pascali, C; Siciliano, P; Pescini, E; De Giorgi, M G

2016-01-01

Preventing the flow separation could enhance the performance of propulsion systems and future civil aircraft. To this end, a fast detection of boundary layer separation is mandatory for a sustainable and successful application of active flow control devices, such as plasma actuators. The present work reports on the design, fabrication and functional tests of low-cost capacitive pressure sensors coupled with dielectric barrier discharge (DBD) plasma actuators to detect and then control flow separation. Finite element method (FEM) simulations were used to obtain information on the deflection and the stress distribution in different-shaped floating membranes. The sensor sensitivity as a function of the pressure load was also calculated by experimental tests. The results of the calibration of different capacitive pressure sensors are reported in this work, together with functional tests in a wind tunnel equipped with a curved wall plate on which a DBD plasma actuator was mounted to control the flow separation. The flow behavior was experimentally investigated by particle image velocimetry (PIV) measurements. Statistical and spectral analysis, applied to the output signals of the pressure sensor placed downstream of the profile leading edge, demonstrated that the sensor is able to discriminate different ionic wind velocity and turbulence conditions. The sensor sensitivity in the 0–100 Pa range was experimentally measured and it ranged between 0.0030 and 0.0046 pF Pa −1 for the best devices. (paper)

Conjugate Image Theory Applied on Capacitive Wireless Power Transfer

Directory of Open Access Journals (Sweden)

Ben Minnaert

2017-01-01

Full Text Available Wireless power transfer using a magnetic field through inductive coupling is steadily entering the market in a broad range of applications. However, for certain applications, capacitive wireless power transfer using electric coupling might be preferable. In order to obtain a maximum power transfer efficiency, an optimal compensation network must be designed at the input and output ports of the capacitive wireless link. In this work, the conjugate image theory is applied to determine this optimal network as a function of the characteristics of the capacitive wireless link, as well for the series as for the parallel topology. The results are compared with the inductive power transfer system. Introduction of a new concept, the coupling function, enables the description of the compensation network of both an inductive and a capacitive system in two elegant equations, valid for the series and the parallel topology. This approach allows better understanding of the fundamentals of the wireless power transfer link, necessary for the design of an efficient system.

Plasma atomic layer etching using conventional plasma equipment

International Nuclear Information System (INIS)

Agarwal, Ankur; Kushner, Mark J.

2009-01-01

The decrease in feature sizes in microelectronics fabrication will soon require plasma etching processes having atomic layer resolution. The basis of plasma atomic layer etching (PALE) is forming a layer of passivation that allows the underlying substrate material to be etched with lower activation energy than in the absence of the passivation. The subsequent removal of the passivation with carefully tailored activation energy then removes a single layer of the underlying material. If these goals are met, the process is self-limiting. A challenge of PALE is the high cost of specialized equipment and slow processing speed. In this work, results from a computational investigation of PALE will be discussed with the goal of demonstrating the potential of using conventional plasma etching equipment having acceptable processing speeds. Results will be discussed using inductively coupled and magnetically enhanced capacitively coupled plasmas in which nonsinusoidal waveforms are used to regulate ion energies to optimize the passivation and etch steps. This strategy may also enable the use of a single gas mixture, as opposed to changing gas mixtures between steps

Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

Science.gov (United States)

Warren, Oden L.; Asif, S. A. Syed; Cyrankowski, Edward; Kounev, Kalin

2010-09-21

An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.-

Shear viscosities of photons in strongly coupled plasmas

Directory of Open Access Journals (Sweden)

Di-Lun Yang

2016-09-01

Full Text Available We investigate the shear viscosity of thermalized photons in the quark gluon plasma (QGP at weak coupling and N=4 super Yang–Mills plasma (SYMP at both strong and weak couplings. We find that the shear viscosity due to the photon–parton scattering up to the leading order of electromagnetic coupling is suppressed when the coupling of the QGP/SYMP is increased, which stems from the blue-shift of the thermal-photon spectrum at strong coupling. In addition, the shear viscosity rapidly increases near the deconfinement transition in a phenomenological model analogous to the QGP.

Energy coupling in the plasma focus

International Nuclear Information System (INIS)

Wainwright, T.E.; Pickles, W.L.; Sahlin, H.L.; Price, D.F.

1979-01-01

Experiments have been performed with a 125-kJ plasma focus to investigate mechanisms for rapid coupling of inductively-stored energy into plasmas. The coupling can take place through the formation of an electron or ion beam that deposits its energy in a target or directly by the penetration of the magnetic field into a resistive plasma. Some preliminary results from experiments of both types are described. The experiments use a replaceable conical anode tip that is intended to guide the focus to within a few millimeters of the axis, where it can suddenly deliver energy either to a small target or to particles that are accelerated. X-ray and fast-ion diagnostics have been used to study the effects

Analysis, Design and Implementation of a Quasi-Proportional-Resonant Controller for a Multifunctional Capacitive-Coupling Grid-Connected Inverter

DEFF Research Database (Denmark)

Ye, Tao; Dai, Ning-Yi; Lam, Chi-Seng

2016-01-01

to compensate reactive power and transfer active power simultaneously. It is a promising solution for micro-grid and building-integrated distributed generator systems. A quasiproportional- resonant (quasi-PR) controller is applied to reduce steady-state current tracking errors of the CGCI in this paper......The capacitive-coupling grid-connected inverter (CGCI) is coupled to the point of common coupling via a second-order LC branch. Its operational voltage is much lower than that of a conventional inductive-coupling grid-connected inverter (IGCI) when it serves as a multifunctional inverter...... tracking errors are greatly reduced when the quasi-PR controller rather than the proportional-integration controller is applied. Experimental results are also provided to validate the CGCI as a multifunctional grid-connected inverter....

Characterization of active CMOS sensors for capacitively coupled pixel detectors

Energy Technology Data Exchange (ETDEWEB)

Hirono, Toko; Gonella, Laura; Janssen, Jens; Hemperek, Tomasz; Huegging, Fabian; Krueger, Hans; Wermes, Norbert [Institute of Physics, University of Bonn (Germany); Peric, Ivan [Institut fuer Prozessdatenverarbeitung und Elektronik, Karlsruher Institut fuer Technologie, Karlsruhe (Germany)

2015-07-01

Active CMOS pixel sensor is one of the most attractive candidates for detectors of upcoming particle physics experiments. In contrast to conventional sensors of hybrid detectors, signal processing circuit can be integrated in the active CMOS sensor. The characterization and optimization of the pixel circuit are indispensable to obtain a good performance from the sensors. The prototype chips of the active CMOS sensor were fabricated in the AMS 180nm and L-Foundry 150 nm CMOS processes, respectively a high voltage and high resistivity technology. Both chips have a charge sensitive amplifier and a comparator in each pixel. The chips are designed to be glued to the FEI4 pixel readout chip. The signals from 3 pixels of the prototype chips are capacitively coupled to the FEI4 input pads. We have performed lab tests and test beams to characterize the prototypes. In this presentation, the measurement results of the active CMOS prototype sensors are shown.

Fast 2D fluid-analytical simulation of ion energy distributions and electromagnetic effects in multi-frequency capacitive discharges

Science.gov (United States)

Kawamura, E.; Lieberman, M. A.; Graves, D. B.

2014-12-01

A fast 2D axisymmetric fluid-analytical plasma reactor model using the finite elements simulation tool COMSOL is interfaced with a 1D particle-in-cell (PIC) code to study ion energy distributions (IEDs) in multi-frequency capacitive argon discharges. A bulk fluid plasma model, which solves the time-dependent plasma fluid equations for the ion continuity and electron energy balance, is coupled with an analytical sheath model, which solves for the sheath parameters. The time-independent Helmholtz equation is used to solve for the fields and a gas flow model solves for the steady-state pressure, temperature and velocity of the neutrals. The results of the fluid-analytical model are used as inputs to a PIC simulation of the sheath region of the discharge to obtain the IEDs at the target electrode. Each 2D fluid-analytical-PIC simulation on a moderate 2.2 GHz CPU workstation with 8 GB of memory took about 15-20 min. The multi-frequency 2D fluid-analytical model was compared to 1D PIC simulations of a symmetric parallel-plate discharge, showing good agreement. We also conducted fluid-analytical simulations of a multi-frequency argon capacitively coupled plasma (CCP) with a typical asymmetric reactor geometry at 2/60/162 MHz. The low frequency 2 MHz power controlled the sheath width and sheath voltage while the high frequencies controlled the plasma production. A standing wave was observable at the highest frequency of 162 MHz. We noticed that adding 2 MHz power to a 60 MHz discharge or 162 MHz to a dual frequency 2 MHz/60 MHz discharge can enhance the plasma uniformity. We found that multiple frequencies were not only useful for controlling IEDs but also plasma uniformity in CCP reactors.

Coupling of RF antennas to large volume helicon plasma

Directory of Open Access Journals (Sweden)

Lei Chang

2018-04-01

Full Text Available Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under fusion conditions. This work is devoted to studying the coupling of four typical RF antennas to helicon plasma with infinite length and diameter of 0.5 m, and exploring its frequency dependence in the range of 13.56-70 MHz for coupling optimization. It is found that loop antenna is more efficient than half helix, Boswell and Nagoya III antennas for power absorption; radially parabolic density profile overwhelms Gaussian density profile in terms of antenna coupling for low-density plasma, but the superiority reverses for high-density plasma. Increasing the driving frequency results in power absorption more near plasma edge, but the overall power absorption increases with frequency. Perpendicular stream plots of wave magnetic field, wave electric field and perturbed current are also presented. This work can serve as an important reference for the experimental design of large volume helicon plasma source with high RF power.

Coupling of laser energy into plasma channels

International Nuclear Information System (INIS)

Dimitrov, D. A.; Giacone, R. E.; Bruhwiler, D. L.; Busby, R.; Cary, J. R.; Geddes, C. G. R.; Esarey, E.; Leemans, W. P.

2007-01-01

Diffractive spreading of a laser pulse imposes severe limitations on the acceleration length and maximum electron energy in the laser wake field accelerator (LWFA). Optical guiding of a laser pulse via plasma channels can extend the laser-plasma interaction distance over many Rayleigh lengths. Energy efficient coupling of laser pulses into and through plasma channels is very important for optimal LWFA performance. Results from simulation parameter studies on channel guiding using the particle-in-cell (PIC) code VORPAL [C. Nieter and J. R. Cary, J. Comput. Phys. 196, 448 (2004)] are presented and discussed. The effects that density ramp length and the position of the laser pulse focus have on coupling into channels are considered. Moreover, the effect of laser energy leakage out of the channel domain and the effects of tunneling ionization of a neutral gas on the guided laser pulse are also investigated. Power spectral diagnostics were developed and used to separate pump depletion from energy leakage. The results of these simulations show that increasing the density ramp length decreases the efficiency of coupling a laser pulse to a channel and increases the energy loss when the pulse is vacuum focused at the channel entrance. Then, large spot size oscillations result in increased energy leakage. To further analyze the coupling, a differential equation is derived for the laser spot size evolution in the plasma density ramp and channel profiles are simulated. From the numerical solution of this equation, the optimal spot size and location for coupling into a plasma channel with a density ramp are determined. This result is confirmed by the PIC simulations. They show that specifying a vacuum focus location of the pulse in front of the top of the density ramp leads to an actual focus at the top of the ramp due to plasma focusing, resulting in reduced spot size oscillations. In this case, the leakage is significantly reduced and is negligibly affected by ramp length

Mode coupling of electron plasma waves

International Nuclear Information System (INIS)

Harte, J.A.

1975-01-01

The driven coupled mode equations are derived for a two fluid, unequal temperature (T/sub e/ much greater than T/sub i/) plasma in the one-dimensional, electrostatic model and applied to the coupling of electron plasma waves. It is assumed that the electron to ion mass ratio identical with m/sub e/M/sub i// much less than 1 and eta 2 /sub ko/k lambda/sub De/ less than 1 where eta 2 /sub ko/ is the pump wave's power normalized to the plasma thermal energy, k the mode wave number and lambda/sub De/ the electron Debye length. Terms up to quadratic in pump power are retained. The equations describe the linear plasma modes oscillating at the wave number k and at ω/sub ek/, the Bohn Gross frequency, and at Ω/sub k/, the ion acoustic frequency, subject to the damping rates ν/sub ek/ and ν/sub ik/ for electrons and ions and their interactions due to intense high frequency waves E/sub k//sup l/. n/sub o/ is the background density, n/sub ik/ the fluctuating ion density, ω/sub pe/ the plasma frequency

Conjugate Image Theory Applied on Capacitive Wireless Power Transfer

OpenAIRE

Ben Minnaert; Nobby Stevens

2017-01-01

Wireless power transfer using a magnetic field through inductive coupling is steadily entering the market in a broad range of applications. However, for certain applications, capacitive wireless power transfer using electric coupling might be preferable. In order to obtain a maximum power transfer efficiency, an optimal compensation network must be designed at the input and output ports of the capacitive wireless link. In this work, the conjugate image theory is applied to determine this opti...

Effects of exposure of epididymal boar spermatozoa to seminal plasma on the binding of zona pellucida proteins during in vitro capacitation

NARCIS (Netherlands)

Harkema, W.; Colenbrander, B.; Engel, B.; Woelders, H.

2004-01-01

The purpose of the investigation was to determine whether seminal plasma plays a role in the increase during in vitro capacitation of the number of boar spermatozoa with enhanced binding of zona pellucida proteins. Ejaculated spermatozoa and spermatozoa collected from the caudae epididymides of

Performance of human body communication-based wearable ECG with capacitive coupling electrodes.

Science.gov (United States)

Sakuma, Jun; Anzai, Daisuke; Wang, Jianqing

2016-09-01

Wearable electrocardiogram (ECG) is attracting much attention in daily healthcare applications, and human body communication (HBC) technology provides an evident advantage in making the sensing electrodes of ECG also working for transmission through the human body. In view of actual usage in daily life, however, non-contact electrodes to the human body are desirable. In this Letter, the authors discussed the ECG circuit structure in the HBC-based wearable ECG for removing the common mode noise when employing non-contact capacitive coupling electrodes. Through the comparison of experimental results, they have shown that the authors' proposed circuit structure with the third electrode directly connected to signal ground can provide an effect on common mode noise reduction similar to the usual drive-right-leg circuit, and a sufficiently good acquisition performance of ECG signals.

Nonlinear charge reduction effect in strongly coupled plasmas

International Nuclear Information System (INIS)

Sarmah, D; Tessarotto, M; Salimullah, M

2006-01-01

The charge reduction effect, produced by the nonlinear Debye screening of high-Z charges occurring in strongly coupled plasmas, is investigated. An analytic asymptotic expression is obtained for the charge reduction factor (f c ) which determines the Debye-Hueckel potential generated by a charged test particle. Its relevant parametric dependencies are analysed and shown to predict a strong charge reduction effect in strongly coupled plasmas

Collisional Thermalization in Strongly Coupled Ultracold Neutral Plasmas

Science.gov (United States)

2017-01-25

calculated collisions rates in a strongly coupled plasma. From Bannasch et al., PRL 109, 185008 (2012). DISTRIBUTION A: Distribution approved for public...applicability to other plasmas.) We use a Green- Kubo relation to extract the diffusion constant from our measurements of the relaxation towards...strongly coupled systems. Our measurements (data symbols) agree with numerical calculations (solid lines) from J. Daligault, PRL 108, 225004 (2012

Training course on inductively coupled plasma spectrometry - Note

Digital Repository Service at National Institute of Oceanography (India)

Valsangkar, A.B.

TRAINING COURSE ON INDUCTIVELY COUPLED PLASMA SPECTROMETRY In the present day geological, chemical, environmental and archaeological research activities, the Inductively Coupled Plasma (ICP) Spectrometry is established as a cost-effective multi... the knowledge and advances in the analytical tools and methodologies for the benefit of the research scholars as well as professionals. National Institute of Oceanography, A.B. VALSANGKAR Dona Paula - 403 004 slip tectonics playing a major role...

Experimental measurements of Helicon wave coupling in KSTAR plasmas

Energy Technology Data Exchange (ETDEWEB)

Kim, H. J.; Wi, H. H.; Wang, S. J.; Park, S. Y.; Jeong, J. H.; Han, J. W.; Kwak, J. G.; Oh, Y. K. [National Fusion Research Institute, Daejeon (Korea, Republic of); Chun, M. H.; Yu, I. H. [Pohang Accelerator Laboratory, Pohang (Korea, Republic of)

2016-05-15

KSTAR tokamak can be a good platform to test this current drive concept because it has adequate machine parameters. Furthermore, KSTAR will have high electron beta plasmas in near future with additional ECH power. In 2015 KSTAR experiments, low-power traveling wave antenna has been designed, fabricated and installed for helicon wave coupling tests in KSTAT plasmas. In 2016 KSTAR campaign, 200 kW klystron power will be combined using three coaxial hybrid couplers and three dummy loads. High power RF will be fed into the traveling wave antenna with two coaxial feeders through two dual disk windows and 6 inch coaxial transmission line system. Current status and plan for high power helicon wave current drive system in KSTAR will be presented. Mock-up TWA antenna installed at the KSTAR reveals high couplings in both L- and H-mode plasmas. The coupling can be easily controlled by radial outer gap without degradation of plasma confinement or local gas puffing with slight decrease of plasma confinement.

Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

Energy Technology Data Exchange (ETDEWEB)

Navratil, Z; Dvorak, P; Trunec, D [Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno (Czech Republic); Brzobohaty, O, E-mail: zdenek@physics.muni.c [Institute of Scientific Instruments of the ASCR, v.v.i., Academy of Sciences of the Czech Republic, Kralovopolska 147, 612 64 Brno (Czech Republic)

2010-12-22

A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional-radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional-radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional particle-in-cell/Monte Carlo (PIC/MC) simulation. The results of OES/CRM and PIC/MC method were in close agreement in the case of electron temperature in the vicinity of a driven electrode. The determined value of electron temperature was about 8 eV. In bulk plasma, the measured spectra were not satisfactorily fitted. In the case of electron density only relative agreement was obtained between OES/CRM and Langmuir probe measurement; the absolute values differed by a factor of 5. The axial dependence of electron density calculated by PIC/MC was distinct from them, reaching the maximum values between the results of the other two methods. The investigation of power dependence of plasma parameters close to the driven electrode showed a decrease in electron temperature and an increase in electron density together with increasing incoming RF power. The calculated spectra fitted very well the measured spectra in this discharge region.

Stirring Strongly Coupled Plasma

CERN Document Server

Fadafan, Kazem Bitaghsir; Rajagopal, Krishna; Wiedemann, Urs Achim

2009-01-01

We determine the energy it takes to move a test quark along a circle of radius L with angular frequency w through the strongly coupled plasma of N=4 supersymmetric Yang-Mills (SYM) theory. We find that for most values of L and w the energy deposited by stirring the plasma in this way is governed either by the drag force acting on a test quark moving through the plasma in a straight line with speed v=Lw or by the energy radiated by a quark in circular motion in the absence of any plasma, whichever is larger. There is a continuous crossover from the drag-dominated regime to the radiation-dominated regime. In the crossover regime we find evidence for significant destructive interference between energy loss due to drag and that due to radiation as if in vacuum. The rotating quark thus serves as a model system in which the relative strength of, and interplay between, two different mechanisms of parton energy loss is accessible via a controlled classical gravity calculation. We close by speculating on the implicati...

Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Cheong, Hee-Woon; Lee, Woohyun; Kim, Ji-Won; Whang, Ki-Woong, E-mail: kwhang@snu.ac.kr [Plasma Laboratory, Inter-University Semiconductor Research Center, Department of Electrical and Computer Engineering, Seoul National University, Seoul 151-742 (Korea, Republic of); Kim, Hyuk [Samsung Electronics Co., Banwol-dong, Hwaseong 445-701 (Korea, Republic of); Park, Wanjae [Tokyo Electron Miyagi Ltd., Taiwa-cho, Kurokawa-gun, Miyagi 981-3629 (Japan)

2015-07-15

Spatial distributions of various plasma parameters such as plasma density, electron temperature, and radical density in an inductively coupled plasma (ICP) and a magnetized inductively coupled plasma (M-ICP) were investigated and compared. Electron temperature in between the rf window and the substrate holder of M-ICP was higher than that of ICP, whereas the one just above the substrate holder of M-ICP was similar to that of ICP when a weak (<8 G) magnetic field was employed. As a result, radical densities in M-ICP were higher than those in ICP and the etch rate of oxide in M-ICP was faster than that in ICP without severe electron charging in 90 nm high aspect ratio contact hole etch.

Radial Distribution Functions of Strongly Coupled Two-Temperature Plasmas

Science.gov (United States)

Shaffer, Nathaniel R.; Tiwari, Sanat Kumar; Baalrud, Scott D.

2017-10-01

We present tests of three theoretical models for the radial distribution functions (RDFs) in two-temperature strongly coupled plasmas. RDFs are useful in extending plasma thermodynamics and kinetic theory to strong coupling, but they are usually known only for thermal equilibrium or for approximate one-component model plasmas. Accurate two-component modeling is necessary to understand the impact of strong coupling on inter-species transport, e.g., ambipolar diffusion and electron-ion temperature relaxation. We demonstrate that the Seuferling-Vogel-Toeppfer (SVT) extension of the hypernetted chain equations not only gives accurate RDFs (as compared with classical molecular dynamics simulations), but also has a simple connection with the Yukawa OCP model. This connection gives a practical means to recover the structure of the electron background from knowledge of the ion-ion RDF alone. Using the model RDFs in Effective Potential Theory, we report the first predictions of inter-species transport coefficients of strongly coupled plasmas far from equilibrium. This work is supported by NSF Grant No. PHY-1453736, AFSOR Award No. FA9550-16-1-0221, and used XSEDE computational resources.

Renovations to a plasma teaching laboratory

International Nuclear Information System (INIS)

Brake, M.L.; Lee, M.; Ventzek, P.; Passow, M.

1991-01-01

With the aid of a National Science Foundation teaching equipment grant, replacement of dated equipment and the implementation of new experiments have upgraded the University of Michigan Department of Nuclear Engineering's 25-yr-old plasma laboratory course. The course teaches seniors and first-year graduate students methods of plasma production as well as plasma diagnostics. This paper describes four new experiments as well as the highlights of some of the equipment upgrades. The plasma lab course has introduced three new diagnostic techniques and one new plasma generation experiment in the past two years. They are (a) probe measurements of the electron energy distribution function, (b) laser/Schlieren photos of shock waves produced by a pulsed plasma, (c) a laser deflection technique for determining hot gas densities, and (d) capacitively coupled radio-frequency plasma generation

Optoelectronic properties of Black-Silicon generated through inductively coupled plasma (ICP) processing for crystalline silicon solar cells

Energy Technology Data Exchange (ETDEWEB)

Hirsch, Jens, E-mail: J.Hirsch@emw.hs-anhalt.de [Anhalt University of Applied Sciences, Faculty EMW, Bernburger Str. 55, DE-06366 Köthen (Germany); Fraunhofer Center for Silicon Photovoltaics CSP, Otto-Eißfeldt-Str. 12, DE-06120 Halle (Saale) (Germany); Gaudig, Maria; Bernhard, Norbert [Anhalt University of Applied Sciences, Faculty EMW, Bernburger Str. 55, DE-06366 Köthen (Germany); Lausch, Dominik [Fraunhofer Center for Silicon Photovoltaics CSP, Otto-Eißfeldt-Str. 12, DE-06120 Halle (Saale) (Germany)

2016-06-30

Highlights: • Fabrication of black silicon through inductively coupled plasma (ICP) processing. • Suppressed formation a self-bias and therefore a reduced ion bombardment of the silicon sample. • Reduction of the average hemispherical reflection between 300 and 1120 nm up to 8% within 5 min ICP process time. • Reflection is almost independent of the angle of incidence up to 60°. • 2.5 ms effective lifetime at 10{sup 15} cm{sup −3} MCD after ALD Al{sub 2}O{sub 3} surface passivation. - Abstract: The optoelectronic properties of maskless inductively coupled plasma (ICP) generated black silicon through SF{sub 6} and O{sub 2} are analyzed by using reflection measurements, scanning electron microscopy (SEM) and quasi steady state photoconductivity (QSSPC). The results are discussed and compared to capacitively coupled plasma (CCP) and industrial standard wet chemical textures. The ICP process forms parabolic like surface structures in a scale of 500 nm. This surface structure reduces the average hemispherical reflection between 300 and 1120 nm up to 8%. Additionally, the ICP texture shows a weak increase of the hemispherical reflection under tilted angles of incidence up to 60°. Furthermore, we report that the ICP process is independent of the crystal orientation and the surface roughness. This allows the texturing of monocrystalline, multicrystalline and kerf-less wafers using the same parameter set. The ICP generation of black silicon does not apply a self-bias on the silicon sample. Therefore, the silicon sample is exposed to a reduced ion bombardment, which reduces the plasma induced surface damage. This leads to an enhancement of the effective charge carrier lifetime up to 2.5 ms at 10{sup 15} cm{sup −3} minority carrier density (MCD) after an atomic layer deposition (ALD) with Al{sub 2}O{sub 3}. Since excellent etch results were obtained already after 4 min process time, we conclude that the ICP generation of black silicon is a promising technique

Mechanism for heating of nitrogen plasmas in an electrodeless rf capacitive discharge at medium pressures

International Nuclear Information System (INIS)

Berdichevskii, M.G.; Marusin, V.V.

1979-01-01

The possible contributions of several processes to the experimentally observed heating of nitrogen plasmas in an electarodeless rf capacitive discharge at pressures of p=2.7-67 kPa are discussed. These processes are electron-rotational, vibrational--translational (V--T), and nonresonance vibrational--vibrational (V--V) energy exchange and effects due to O 2 , H 2 O, and NO impurities in the gas. It is shown that as the pressure is decreased the heating mechanism changes from quasiequilibrium to nonequilibrium V--T heating caused by overpopulation of high vibrational levels in the ground state of the nitrogen molecule

Helicon wave coupling to a chiral-plasma column

International Nuclear Information System (INIS)

Torres-Silva, H.; Reggiani, N.; Sakanaka, P.H.

1995-01-01

Inductive helicon wave coupling to a chiro-plasma column is studied numerically. In our theoretical model, the RF current distribution of the chiro-plasma is taken into account using the constitutive relations of a chiral-plasma. Computational results based on the data of present-day helicon devices are show. In particular, we discuss the role of magnetic-field-aligned electron landau damping for the helicon wave absorption. In many a see, the numerical findings can be understood reasonably in terms of the wavenumber spectra of the helicon wave dispersion relation for slow and fast wave of a chiral-plasma. In general however, the full electromagnetic treatment is necessary in order to describe and to understand the inductive coupling in the helicon wave regime. (author). 9 refs., 1 fig

Effect of single aerosol droplets on plasma impedance in the inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Chan, George C.-Y., E-mail: gcchan@indiana.edu; Zhu, Zhenli; Hieftje, Gary M.

2012-10-15

The impedance of an inductively coupled plasma was indirectly monitored by two different means-through a RF-probe coil placed inside the torch housing and from tapping the phase-detector signal of the impedance-matching network. During single-droplet introduction, temporal spikes in both the RF-probe coil and the phase-detector signals were readily observed, indicating a momentary change in plasma impedance. The changes in plasma impedance were found to be due solely to plasma perturbation by droplet introduction, and not to an artifact caused by imperfect automatic impedance matching. The temporal changes in plasma impedance were found to be directly proportional to the temporally integrated atomic emission of hydrogen, which is assumed in turn to be directly proportional to the volume of the introduced droplet. A small satellite droplet, with an estimated diameter of 27 {mu}m (i.e., {approx} 10 pL in volume), caused a readily measurable change in plasma impedance. By assuming that the change in RF-probe voltage is directly proportional to the variation in RF power delivered by the load coil, the instantaneous power change coupled to the plasma during single-droplet introduction was estimated. Typical increases in peak RF power and total energy coupled to the plasma, for a single 50-{mu}m droplet introduction, were thereby estimated to be around 8 to 11 W and 0.03 to 0.04 J, respectively. This impedance change was also exploited as a trigger to signal the droplet-introduction event into the plasma. This trigger signal was obtained through a combination of the RF-probe and the phase-detector signals and offered typical jitter from 1 to 2 ms. With the proper choice of a trigger threshold, no trigger misfire resulted and the achievable efficiencies of the trigger signal were 99.95, 97.18 and 74.33% for plasma forward power levels of 900, 1200, and 1500 W, respectively. The baseline noise on the RF-probe coil and the phase-detector signals, which increase with plasma

Supramolecular organization of the sperm plasma membrane during maturation and capacitation.

Science.gov (United States)

Jones, Roy; James, Peter S; Howes, Liz; Bruckbauer, Andreas; Klenerman, David

2007-07-01

In the present study, a variety of high resolution microscopy techniques were used to visualize the organization and motion of lipids and proteins in the sperm's plasma membrane. We have addressed questions such as the presence of diffusion barriers, confinement of molecules to specific surface domains, polarized diffusion and the role of cholesterol in regulating lipid rafts and signal transduction during capacitation. Atomic force microscopy identified a novel region (EqSS) within the equatorial segment of bovine, porcine and ovine spermatozoa that was enriched in constitutively phosphorylated proteins. The EqSS was assembled during epididymal maturation. Fluorescence imaging techniques were then used to follow molecular diffusion on the sperm head. Single lipid molecules were freely exchangeable throughout the plasma membrane and showed no evidence for confinement within domains. Large lipid aggregates, however, did not cross over the boundary between the post-acrosome and equatorial segment suggesting the presence of a molecular filter between these two domains. A small reduction in membrane cholesterol enlarges or increases lipid rafts concomitant with phosphorylation of intracellular proteins. Excessive removal of cholesterol, however, disorganizes rafts with a cessation of phosphorylation. These techniques are forcing a revision of long-held views on how lipids and proteins in sperm membranes are assembled into larger complexes that mediate recognition and fusion with the egg.

A Method to Construct Plasma with Nonlinear Density Enhancement Effect in Multiple Internal Inductively Coupled Plasmas

International Nuclear Information System (INIS)

Chen Zhipeng; Li Hong; Liu Qiuyan; Luo Chen; Xie Jinlin; Liu Wandong

2011-01-01

A method is proposed to built up plasma based on a nonlinear enhancement phenomenon of plasma density with discharge by multiple internal antennas simultaneously. It turns out that the plasma density under multiple sources is higher than the linear summation of the density under each source. This effect is helpful to reduce the fast exponential decay of plasma density in single internal inductively coupled plasma source and generating a larger-area plasma with multiple internal inductively coupled plasma sources. After a careful study on the balance between the enhancement and the decay of plasma density in experiments, a plasma is built up by four sources, which proves the feasibility of this method. According to the method, more sources and more intensive enhancement effect can be employed to further build up a high-density, large-area plasma for different applications. (low temperature plasma)

Hyperpolarizabilities of one and two electron ions under strongly coupled plasma

International Nuclear Information System (INIS)

Sen, Subhrangsu; Mandal, Puspajit; Kumar Mukherjee, Prasanta; Fricke, Burkhard

2013-01-01

Systematic investigations on the hyperpolarizabilities of hydrogen and helium like ions up to nuclear charge Z = 7 under strongly coupled plasma environment have been performed. Variation perturbation theory has been adopted to evaluate such properties for the one and two electron systems. For the two electron systems coupled Hartree-Fock theory, which takes care of partial electron correlation effects, has been utilised. Ion sphere model of the strongly coupled plasma, valid for ionic systems only, has been adopted for estimating the effect of plasma environment on the hyperpolarizability. The calculated free ion hyperpolarizability for all the systems is in good agreement with the existing data. Under confinement hyperpolarizabilities of one and two electron ions show interesting trend with respect to plasma coupling strength.

A robust parasitic-insensitive successive approximation capacitance-to-digital converter

KAUST Repository

Omran, Hesham

2014-09-01

In this paper, we present a capacitive sensor digital interface circuit using true capacitance-domain successive approximation that is independent of supply voltage. Robust operation is achieved by using a charge amplifier stage and multiple comparison technique. The interface circuit is insensitive to parasitic capacitances, offset voltages, and charge injection, and is not prone to noise coupling. The proposed design achieves very low temperature sensitivity of 25ppm/oC. A coarse-fine programmable capacitance array allows digitizing a wide capacitance range of 16pF with 12.5-bit quantization limited resolution in a compact area of 0.07mm2. The fabricated prototype is experimentally verified using on-chip sensor and off-chip MEMS capacitive pressure sensor. © 2014 IEEE.

A robust parasitic-insensitive successive approximation capacitance-to-digital converter

KAUST Repository

Omran, Hesham; Arsalan, Muhammad; Salama, Khaled N.

2014-01-01

In this paper, we present a capacitive sensor digital interface circuit using true capacitance-domain successive approximation that is independent of supply voltage. Robust operation is achieved by using a charge amplifier stage and multiple comparison technique. The interface circuit is insensitive to parasitic capacitances, offset voltages, and charge injection, and is not prone to noise coupling. The proposed design achieves very low temperature sensitivity of 25ppm/oC. A coarse-fine programmable capacitance array allows digitizing a wide capacitance range of 16pF with 12.5-bit quantization limited resolution in a compact area of 0.07mm2. The fabricated prototype is experimentally verified using on-chip sensor and off-chip MEMS capacitive pressure sensor. © 2014 IEEE.

Analysis of plasma coupling with the prototype DIII-D ICRF antenna

International Nuclear Information System (INIS)

Ryan, P.M.; Hoffman, D.J.; Bigelow, T.S.; Baity, F.W.; Gardner, W.L.; Mayberry, M.J.; Rothe, K.E.

1988-01-01

Coupling to plasma in the H-mode is essential to the success of future ignited machines such as CIT. To ascertain voltage and current requirements for high-power second harmonic heating (2 MW in a 35- by 50-cm port), coupling to the DIII-D tokamak with a prototype compact loop antenna has been measured. The results show good loading for L-mode and limiter plasmas, but coupling 2 MW to an H-mode plasma demands voltages and currents near the limit of present technology. We report the technological analysis and progress that allow coupling of these power densities. 5 refs., 4 figs

Analysis of plasma coupling with the prototype DIII-D ICRF antenna

Energy Technology Data Exchange (ETDEWEB)

Ryan, P.M.; Hoffman, D.J.; Bigelow, T.S.; Baity, F.W.; Gardner, W.L.; Mayberry, M.J.; Rothe, K.E.

1988-01-01

Coupling to plasma in the H-mode is essential to the success of future ignited machines such as CIT. To ascertain voltage and current requirements for high-power second harmonic heating (2 MW in a 35- by 50-cm port), coupling to the DIII-D tokamak with a prototype compact loop antenna has been measured. The results show good loading for L-mode and limiter plasmas, but coupling 2 MW to an H-mode plasma demands voltages and currents near the limit of present technology. We report the technological analysis and progress that allow coupling of these power densities. 5 refs., 4 figs.

Influence of the ion bombardment of O{sub 2} plasmas on low-k materials

Energy Technology Data Exchange (ETDEWEB)

Verdonck, Patrick, E-mail: verdonck@imec.be [IMEC, Kapeldreef 75, 3001 Leuven (Belgium); Samara, Vladimir [IMEC, Kapeldreef 75, 3001 Leuven (Belgium); Open University, Materials Engineering, Walton Hall, Milton Keynes MK7 6AA (United Kingdom); Goodyear, Alec [Open University, Materials Engineering, Walton Hall, Milton Keynes MK7 6AA (United Kingdom); Ferchichi, Abdelkarim; Van Besien, Els; Baklanov, Mikhail R. [IMEC, Kapeldreef 75, 3001 Leuven (Belgium); Braithwaite, Nicholas [Open University, Department of Physics and Astronomy, Walton Hall, Milton Keynes MK7 6AA (United Kingdom)

2011-10-31

In this study, special tests were devised in order to investigate the influence of ion bombardment on the damage induced in low-k dielectrics by oxygen plasmas. By placing a sample that suffered a lot of ion bombardment and one which suffered little ion bombardment simultaneously in the same plasma, it was possible to verify that ion bombardment in fact helped to protect the low-k film against oxygen plasma induced damage. Exhaustive analyses (ellipsometry, X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, porosimetry, capacitance-voltage (C-V) measurements, water contact angle analysis) show that ion bombardment induced the formation of a denser top layer in the film, which then hampered further penetration of active oxygen species deeper into the bulk. This was further confirmed by other tests combining capacitively and inductively coupled plasmas. Therefore, it was possible to conclude that, at least for these plasmas, ion bombardment may help to reduce plasma induced damage to low-k materials.

Electromagnetic modes in cold magnetized strongly coupled plasmas

OpenAIRE

Tkachenko, I. M.; Ortner, J.; Rylyuk, V. M.

1999-01-01

The spectrum of electromagnetic waves propagating in a strongly coupled magnetized fully ionized hydrogen plasma is found. The ion motion and damping being neglected, the influence of the Coulomb coupling on the electromagnetic spectrum is analyzed.

ICRH antenna S-matrix measurements and plasma coupling characterisation at JET

Science.gov (United States)

Monakhov, I.; Jacquet, P.; Blackman, T.; Bobkov, V.; Dumortier, P.; Helou, W.; Lerche, E.; Kirov, K.; Milanesio, D.; Maggiora, R.; Noble, C.; Contributors, JET

2018-04-01

The paper is dedicated to the characterisation of multi-strap ICRH antenna coupling to plasma. Relevance of traditional concept of coupling resistance to antennas with mutually coupled straps is revised and the importance of antenna port excitation consistency for application of the concept is highlighted. A method of antenna S-matrix measurement in presence of plasma is discussed allowing deeper insight into the problem of antenna-plasma coupling. The method is based entirely on the RF plant hardware and control facilities available at JET and it involves application of variable phasing between the antenna straps during the RF plant operations at  >100 kW. Unlike traditional techniques relying on low-power (~10 mW) network analysers, the applied antenna voltage amplitudes are relevant to practical conditions of ICRH operations; crucially, they are high enough to minimise possible effects of antenna loading non-linearity due to the RF sheath effects and other phenomena which could affect low-power measurements. The method has been successfully applied at JET to conventional 4-port ICRH antennas energised at frequencies of 33 MHz, 42 MHz and 51 MHz during L-mode plasma discharges while different gas injection modules (GIMs) were used to maintain comparable plasma densities during the pulses. The S-matrix assessment and its subsequent processing yielding ‘global’ antenna coupling resistances in conditions of equalised port maximum voltages allowed consistent description of antenna coupling to plasma at different strap phasing, operational frequencies and applied GIMs. Comprehensive experimental characterisation of mutually coupled antenna straps in presence of plasma also provided a unique opportunity for in-depth verification of TOPICA computer simulations.

Numerical simulation of electromagnetic fields and impedance of CERN LINAC4 H(-) source taking into account the effect of the plasma.

Science.gov (United States)

Grudiev, A; Lettry, J; Mattei, S; Paoluzzi, M; Scrivens, R

2014-02-01

Numerical simulation of the CERN LINAC4 H(-) source 2 MHz RF system has been performed taking into account a realistic geometry from 3D Computer Aided Design model using commercial FEM high frequency simulation code. The effect of the plasma has been added to the model by the approximation of a homogenous electrically conducting medium. Electric and magnetic fields, RF power losses, and impedance of the circuit have been calculated for different values of the plasma conductivity. Three different regimes have been found depending on the plasma conductivity: (1) Zero or low plasma conductivity results in RF electric field induced by the RF antenna being mainly capacitive and has axial direction; (2) Intermediate conductivity results in the expulsion of capacitive electric field from plasma and the RF power coupling, which is increasing linearly with the plasma conductivity, is mainly dominated by the inductive azimuthal electric field; (3) High conductivity results in the shielding of both the electric and magnetic fields from plasma due to the skin effect, which reduces RF power coupling to plasma. From these simulations and measurements of the RF power coupling on the CERN source, a value of the plasma conductivity has been derived. It agrees well with an analytical estimate calculated from the measured plasma parameters. In addition, the simulated and measured impedances with and without plasma show very good agreement as well demonstrating validity of the plasma model used in the RF simulations.

Study on characteristics of coupled cavity chain filled with plasma

International Nuclear Information System (INIS)

Li Jianqing; Xiao Shu; Mo Yuanlong

2003-01-01

In this paper, by using rigorous field analysis, a coupled-cavity (CC) chain filled with plasma has been analyzed. How the hybrid wave between the cavity mode and plasma mode is formed has been studied. The periodical CC chain filled with plasma demonstrates periodical TG modes with a cutoff frequency of zero. When the plasma density increase to a large scale, the cavity mode of the CC chain overlaps the TG mode, these two modes couple with each other and form the hybrid modes. In the case of hybrid modes, the 'cold' bandwidth and the 'warm' bandwidth expand, and the coupled impedance increases about 5 times larger than that of the vacuum. As a whole, the slow wave characteristics are improved substantially due to the formation of the hybrid mode

Jeans instability of self-gravitating magnetized strongly coupled plasma

International Nuclear Information System (INIS)

Prajapati, R P; Sharma, P K; Sanghvi, R K; Chhajlani, R K

2012-01-01

We investigate the Jeans instability of self-gravitating magnetized strongly coupled plasma. The equations of the problem are formulated using the generalized hydrodynamic model and a general dispersion relation is obtained using the normal mode analysis. This dispersion relation is discussed for transverse and longitudinal mode of propagations. The modified condition of Jeans instability is obtained for magnetized strongly coupled plasma. We find that strong coupling of plasma particles modify the fundamental criterion of Jeans gravitational instability. In transverse mode it is found that Jeans instability criterion gets modified due to the presence of magnetic field, shear viscosity and fluid viscosity but in longitudinal mode it is unaffected due to the presence of magnetic field. From the curves we found that all these parameters have stabilizing influence on the growth rate of Jeans instability.

Plasma Immersion Ion Implantation in Radio Frequency Plasma

International Nuclear Information System (INIS)

Bora, B.; Bhuyan, H.; Wyndham, E.

2013-01-01

Plasma immersion ion implantation (PIII) has attracted wide interests since it emulates conventional ion-beam ion implantation (IBII) in niche applications. For instance, the technique has very high throughput, the implantation time is independent of the sample size, and samples with an irregular shape can be implanted without complex beam scanning or sample manipulation. For uniform ion implantation and deposition on to different substrates, like silicon, stainless steel etc., a capacitive coupled Radio frequency (RF), 13.6 MHz, plasma is used. During the PIII process, the physical parameters which are expected to play crucial rule in the deposition process like RF power, Negative pulse voltage and pulse duration, gas type and gas mixture, gas flow rates and the implantation dose are studied. The ion dose is calculated by dynamic sheath model and the plasma parameters are calculated from the V-I characteristic and power balance equation by homogeneous model of rf plasma discharge considering Ohmic as well as Stochastic heating. The correlations between the yield of the implantation process and the physical parameters as well as plasma parameters are discussed. (author)

Measuring the Plasma Density of a Ferroelectric Plasma Source in an Expanding Plasma

International Nuclear Information System (INIS)

Dunaevsky, A.; Fisch, N.J.

2003-01-01

The initial density and electron temperature at the surface of a ferroelectric plasma source were deduced from floating probe measurements in an expanding plasma. The method exploits negative charging of the floating probe capacitance by fast flows before the expanding plasma reaches the probe. The temporal profiles of the plasma density can be obtained from the voltage traces of the discharge of the charged probe capacitance by the ion current from the expanding plasma. The temporal profiles of the plasma density, at two different distances from the surface of the ferroelectric plasma source, could be further fitted by using the density profiles for the expanding plasma. This gives the initial values of the plasma density and electron temperature at the surface. The method could be useful for any pulsed discharge, which is accompanied by considerable electromagnetic noise, if the initial plasma parameters might be deduced from measurements in expanding plasma

Coupling of Plasmas and Liquids

Science.gov (United States)

Lindsay, Alexander David

Plasma-liquids have exciting applications to several important socioeconomic areas, including agriculture, water treatment, and medicine. To realize their application potential, the basic physical and chemical phenomena of plasma-liquid systems must be better understood. Additionally, system designs must be optimized in order to maximize fluxes of critical plasma species to the liquid phase. With objectives to increase understanding of these systems and optimize their applications, we have performed both comprehensive modeling and experimental work. To date, models of plasma-liquids have focused on configurations where diffusion is the dominant transport process in both gas and liquid phases. However, convection plays a key role in many popular plasma source designs, including jets, corona discharges, and torches. In this dissertation, we model momentum, heat, and neutral species mass transfer in a convection-dominated system based on a corona discharge. We show that evaporative cooling produced by gas-phase convection can lead to a significant difference between gas and liquid phase bulk temperatures. Additionally, convection induced in the liquid phase by the gas phase flow substantially increases interfacial mass transfer of hydrophobic species like NO and NO2. Finally, liquid kinetic modeling suggests that concentrations of highly reactive species like OH and ONOOH are several orders of magnitude higher at the interface than in the solution bulk. Subsequent modeling has focused on coupling discharge physics with species transport at and through the interface. An assumption commonly seen in the literature is that interfacial loss coefficients of charged species like electrons are equal to unity. However, there is no experimental evidence to either deny or support this assumption. Without knowing the true interfacial behavior of electrons, we have explored the effects on key plasma-liquid variables of varying interfacial parameters like the electron and energy

Plasma edge modelling with ICRF coupling

Directory of Open Access Journals (Sweden)

Zhang Wei

2017-01-01

Full Text Available The physics of Radio-Frequency (RF wave heating in the Ion Cyclotron Range of Frequencies (ICRF in the core plasmas of fusion devices are relatively well understood while those in the Scrape-Off Layer (SOL remain still unresolved. This paper is dedicated to study the ICRF interactions with the plasma edge, mainly from the theoretical and numerical point of view, in particular with the 3D edge plasma fluid and neutral transport code EMC3-EIRENE and various wave codes. Here emphasis is given to the improvement of ICRF coupling with local gas puffing and to the ICRF induced density convection in the SOL.

Theory and simulation of laser plasma coupling

International Nuclear Information System (INIS)

Kruer, W.L.

1979-01-01

The theory and simulation of these coupling processes are considered. Particular emphasis is given to their nonlinear evolution. First a brief introduction to computer simulation of plasmas using particle codes is given. Then the absorption of light via the generation of plasma waves is considered, followed by a discussion of stimulated scattering of intense light. Finally these calculations are compared with experimental results

Changes in exposed membrane proteins during in vitro capacitation of boar sperm

International Nuclear Information System (INIS)

Berger, T.

1990-01-01

Exposed plasma membrane proteins were labeled with 125 I before and after incubation of boar sperm under capacitating conditions. Labeled protein profiles were compared to the ability of the sperm to penetrate zona-free hamster ova. Quantitatively, the labeled sperm membrane proteins were primarily low Mr prior to capacitation. The majority of the labeled seminal plasma protein was also low Mr. After capacitation, two new proteins (64,000 Mr and 78,000 Mr) were labeled. Sperm did not exhibit these exposed membrane proteins when incubated under noncapacitating conditions. Appearance of these proteins was not correlated to the percentage of acrosome-reacted sperm. Although the 64,000 Mr protein was not consistently observed, the relative labeling of the 78,000 Mr protein was highly correlated with the ability of sperm to fuse with zona-free hamster ova. The 78,000 Mr protein may be a sperm protein involved in fusion with the egg plasma membrane

Characteristics of SiO{sub 2} etching with a C{sub 4}F{sub 8}/Ar/CHF{sub 3}/O{sub 2} gas mixture in 60-MHz/2-MHz dual-frequency capacitively coupled plasmas

Energy Technology Data Exchange (ETDEWEB)

Jeon, M. H.; Kang, S. K.; Park, J. Y.; Yeom, G. Y. [Sungkyunkwan University, Suwon (Korea, Republic of)

2011-11-15

Nanoscale SiO{sub 2} contact holes were etched by using C{sub 4}F{sub 8}/CHF{sub 3}/O{sub 2}/Ar gas mixtures in dual frequency capacitively coupled plasmas (DF-CCPs) where a 60-MHz source power was applied to the top electrode while a 2-MHz bias power was applied to the bottom electrode. The initial increase in the CHF{sub 3} gas flow rate at a fixed CHF{sub 3}+O{sub 2} flow rate increased the SiO{sub 2} etch rate as well as SiO{sub 2} etch selectivity over that of the amorphous carbon layer (ACL). When the high-frequency (HF) power was increased both SiO{sub 2} etch rate and the etch selectivity over ACL were increased. For a 300 W/500 W power ratio of 60-MHz HF power/ 2-MHz low-freqeuncy (LF) and a gas mixture of Ar (140 sccm) /C{sub 4}F{sub 8} (30 sccm) /CHF{sub 3} (25 sccm) /O{sub 2} (5 sccm) while maintaining 20 mTorr, an anisotropic etch profile with an SiO{sub 2} etch rate of 3350 A/min and an etch selectivity of higher than 6 over ACL could be obtained.

The segmented non-uniform dielectric module design for uniformity control of plasma profile in a capacitively coupled plasma chamber

International Nuclear Information System (INIS)

Xia, Huanxiong; Xiang, Dong; Yang, Wang; Mou, Peng

2014-01-01

Low-temperature plasma technique is one of the critical techniques in IC manufacturing process, such as etching and thin-film deposition, and the uniformity greatly impacts the process quality, so the design for the plasma uniformity control is very important but difficult. It is hard to finely and flexibly regulate the spatial distribution of the plasma in the chamber via controlling the discharge parameters or modifying the structure in zero-dimensional space, and it just can adjust the overall level of the process factors. In the view of this problem, a segmented non-uniform dielectric module design solution is proposed for the regulation of the plasma profile in a CCP chamber. The solution achieves refined and flexible regulation of the plasma profile in the radial direction via configuring the relative permittivity and the width of each segment. In order to solve this design problem, a novel simulation-based auto-design approach is proposed, which can automatically design the positional sequence with multi independent variables to make the output target profile in the parameterized simulation model approximate the one that users preset. This approach employs an idea of quasi-closed-loop control system, and works in an iterative mode. It starts from initial values of the design variable sequences, and predicts better sequences via the feedback of the profile error between the output target profile and the expected one. It never stops until the profile error is narrowed in the preset tolerance

Crosstalk error correction through dynamical decoupling of single-qubit gates in capacitively coupled singlet-triplet semiconductor spin qubits

Science.gov (United States)

Buterakos, Donovan; Throckmorton, Robert E.; Das Sarma, S.

2018-01-01

In addition to magnetic field and electric charge noise adversely affecting spin-qubit operations, performing single-qubit gates on one of multiple coupled singlet-triplet qubits presents a new challenge: crosstalk, which is inevitable (and must be minimized) in any multiqubit quantum computing architecture. We develop a set of dynamically corrected pulse sequences that are designed to cancel the effects of both types of noise (i.e., field and charge) as well as crosstalk to leading order, and provide parameters for these corrected sequences for all 24 of the single-qubit Clifford gates. We then provide an estimate of the error as a function of the noise and capacitive coupling to compare the fidelity of our corrected gates to their uncorrected versions. Dynamical error correction protocols presented in this work are important for the next generation of singlet-triplet qubit devices where coupling among many qubits will become relevant.

Plasma Generator Using Spiral Conductors

Science.gov (United States)

Szatkowski, George N. (Inventor); Dudley, Kenneth L. (Inventor); Ticatch, Larry A. (Inventor); Smith, Laura J. (Inventor); Koppen, Sandra V. (Inventor); Nguyen, Truong X. (Inventor); Ely, Jay J. (Inventor)

2016-01-01

A plasma generator includes a pair of identical spiraled electrical conductors separated by dielectric material. Both spiraled conductors have inductance and capacitance wherein, in the presence of a time-varying electromagnetic field, the spiraled conductors resonate to generate a harmonic electromagnetic field response. The spiraled conductors lie in parallel planes and partially overlap one another in a direction perpendicular to the parallel planes. The geometric centers of the spiraled conductors define endpoints of a line that is non-perpendicular with respect to the parallel planes. A voltage source coupled across the spiraled conductors applies a voltage sufficient to generate a plasma in at least a portion of the dielectric material.

Experimental test of models of radio-frequency plasma sheaths

International Nuclear Information System (INIS)

Sobolewski, M.A.

1997-01-01

The ion current and sheath impedance were measured at the radio-frequency-powered electrode of an asymmetric, capacitively coupled plasma reactor, for discharges in argon at 1.33 endash 133 Pa. The measurements were used to test the models of the radio frequency sheath derived by Lieberman [IEEE Trans. Plasma Sci. 17, 338 (1989)] and Godyak and Sternberg [Phys. Rev. A 42, 2299 (1990)], and establish the range of pressure and sheath voltage in which they are valid. copyright 1997 American Institute of Physics

Collisionless coupling of a high- β expansion to an ambient, magnetized plasma. II. Experimental fields and measured momentum coupling

Science.gov (United States)

Bonde, Jeffrey; Vincena, Stephen; Gekelman, Walter

2018-04-01

The momentum coupled to a magnetized, ambient argon plasma from a high- β, laser-produced carbon plasma is examined in a collisionless, weakly coupled limit. The total electric field was measured by separately examining the induced component associated with the rapidly changing magnetic field of the high- β (kinetic β˜106), expanding plasma and the electrostatic component due to polarization of the expansion. Their temporal and spatial structures are discussed and their effect on the ambient argon plasma (thermal β˜10-2) is confirmed with a laser-induced fluorescence diagnostic, which directly probed the argon ion velocity distribution function. For the given experimental conditions, the electrostatic field is shown to dominate the interaction between the high- β expansion and the ambient plasma. Specifically, the expanding plasma couples energy and momentum into the ambient plasma by pulling ions inward against the flow direction.

Capacitively coupled pickup in MCP-based photodetectors using a conductive metallic anode

Energy Technology Data Exchange (ETDEWEB)

Angelico, E.; Seiss, T. [Enrico Fermi Institute, University of Chicago, 5640 S Ellis Ave, Chicago, IL 60637 (United States); Adams, B. [Incom, Inc., 294 SouthBridge Rd, Charlton, Massachusetts 01507 (United States); Elagin, A.; Frisch, H.; Spieglan, E. [Enrico Fermi Institute, University of Chicago, 5640 S Ellis Ave, Chicago, IL 60637 (United States)

2017-02-21

We have designed and tested a robust 20×20 cm{sup 2} thin metal film internal anode capacitively coupled to an external array of signal pads or micro-strips for use in fast microchannel plate photodetectors. The internal anode, in this case a 10 nm-thick NiCr film deposited on a 96% pure Al{sub 2}O{sub 3} 3 mm-thick ceramic plate and connected to HV ground, provides the return path for the electron cascade charge. The multi-channel pickup array consists of a printed-circuit card or glass plate with metal signal pickups on one side and the signal ground plane on the other. The pickup can be put in close proximity to the bottom outer surface of the sealed photodetector, with no electrical connections through the photodetector hermetic vacuum package other than a single ground connection to the internal anode. Two pickup patterns were tested using a small commercial MCP-PMT as the signal source: 1) parallel 50 Ω 25-cm-long micro-strips with an analog bandwidth of 1.5 GHz, and 2) a 20×20 cm{sup 2} array of 2-dimensional square ‘pads’ with sides of 1.27 cm or 2.54 cm. The rise-time of the fast input pulse is maintained for both pickup patterns. For the pad pattern, we observe 80% of the directly coupled amplitude. For the strip pattern we measure 34% of the directly coupled amplitude on the central strip of a broadened signal. The physical decoupling of the photodetector from the pickup pattern allows easy customization for different applications while maintaining high analog bandwidth.

Reduction of parasitic capacitance in 10 kV SiC MOSFET power modules using 3D FEM

DEFF Research Database (Denmark)

Jørgensen, Asger Bjørn; Christensen, Nicklas; Dalal, Dipen Narendrabhai

2017-01-01

The benefits of emerging wide-band gap semiconductors can only be utilized if the semiconductor is properly packaged. Capacitive coupling in the package causes electromagnetic interference during high dv/dt switching. This paper investigates the current flowing in the parasitic capacitance between...... the output node and the grounded heat sink for a custom silicon carbide power module. A circuit model of the capacitive coupling path is presented, using parasitic capacitances extracted from ANSYS Q3D. Simulated values are compared with experimental results. A new iteration of the silicon carbide power...

In situ x-ray photoelectron spectroscopy and capacitance voltage characterization of plasma treatments for Al{sub 2}O{sub 3}/AlGaN/GaN stacks

Energy Technology Data Exchange (ETDEWEB)

Qin, Xiaoye; Lucero, Antonio; Azcatl, Angelica; Kim, Jiyoung; Wallace, Robert M. [Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080 (United States)

2014-07-07

We investigate the Al{sub 2}O{sub 3}/AlGaN/GaN metal-oxide-semiconductor structure pretreated by O{sub 2} anneals, N{sub 2} remote plasma, and forming gas remote plasma prior to atomic layer deposition of Al{sub 2}O{sub 3} using in situ X-ray photoelectron spectroscopy, low energy electron diffraction, and capacitance- voltage measurements. Plasma pretreatments reduce the Ga-oxide/oxynitride formation and the interface state density, while inducing a threshold voltage instability.

Bright branes for strongly coupled plasmas

International Nuclear Information System (INIS)

Mateos, David; Patino, Leonardo

2007-01-01

We use holographic techniques to study photon production in a class of finite temperature, strongly coupled, large-N c SU(N c ) quark-gluon plasmas with N f c quark flavours. Our results are valid to leading order in the electromagnetic coupling constant but non-perturbatively in the SU(N c ) interactions. The spectral function of electromagnetic currents and other related observables exhibit an interesting structure as a function of the photon frequency and the quark mass. We discuss possible implications for heavy ion collision experiments

Simulation of the influence high-frequency (2 MHz) capacitive gas discharge and magnetic field on the plasma sheath near a surface in hypersonic gas flow

International Nuclear Information System (INIS)

Schweigert, I. V.

2012-01-01

The plasma sheath near the surface of a hypersonic aircraft formed under associative ionization behind the shock front shields the transmission and reception of radio signals. Using two-dimensional kinetic particle-in-cell simulations, we consider the change in plasma-sheath parameters near a flat surface in a hypersonic flow under the action of electrical and magnetic fields. The combined action of a high-frequency 2-MHz capacitive discharge, a constant voltage, and a magnetic field on the plasma sheath allows the local electron density to be reduced manyfold.

The strongly coupled quark-gluon plasma created at RHIC

International Nuclear Information System (INIS)

Heinz, Ulrich

2009-01-01

The relativistic heavy-ion collider (RHIC) was built to re-create and study in the laboratory the extremely hot and dense matter that filled our entire universe during its first few microseconds. Its operation since June 2000 has been extremely successful, and the four large RHIC experiments have produced an impressive body of data which indeed provide compelling evidence for the formation of thermally equilibrated matter at unprecedented temperatures and energy densities-a 'quark-gluon plasma (QGP)'. A surprise has been the discovery that this plasma behaves like an almost perfect fluid, with extremely low viscosity. Theorists had expected a weakly interacting gas of quarks and gluons, but instead we seem to have created a strongly coupled plasma liquid. The experimental evidence strongly relies on a feature called 'elliptic flow' in off-central collisions, with additional support from other observations. This paper explains how we probe the strongly coupled QGP, describes the ideas and measurements which led to the conclusion that the QGP is an almost perfect liquid, and shows how they tie relativistic heavy-ion physics into other burgeoning fields of modern physics, such as strongly coupled Coulomb plasmas, ultracold systems of trapped atoms and superstring theory

Momentum Broadening in Weakly Coupled Quark-Gluon Plasma (with a view to finding the quasiparticles within liquid quark-gluon plasma)

CERN Document Server

D'Eramo, Francesco; Liu, Hong; Rajagopal, Krishna

2013-01-01

We calculate P(k_\\perp), the probability distribution for an energetic parton that propagates for a distance L through a medium without radiating to pick up transverse momentum k_\\perp, for a medium consisting of weakly coupled quark-gluon plasma. We use full or HTL self-energies in appropriate regimes, resumming each in order to find the leading large-L behavior. The jet quenching parameter \\hat q is the second moment of P(k_\\perp), and we compare our results to other determinations of this quantity in the literature, although we emphasize the importance of looking at P(k_\\perp) in its entirety. We compare our results for P(k_\\perp) in weakly coupled quark-gluon plasma to expectations from holographic calculations that assume a plasma that is strongly coupled at all length scales. We find that the shape of P(k_\\perp) at modest k_\\perp may not be very different in weakly coupled and strongly coupled plasmas, but we find that P(k_\\perp) must be parametrically larger in a weakly coupled plasma than in a strongl...

DC plasma ion implantation in an inductively coupled RF plasma

International Nuclear Information System (INIS)

Silawatshananai, C.; Matan, N.; Pakpum, C.; Pussadee, N.; Srisantitam, P.; Davynov, S.; Vilaithong, T.

2004-01-01

Various modes of plasma ion implantation have been investigated in a small inductively coupled 13.6 MHz RF plasma source. Plasma ion implantation with HVDC(up to -10 kV bias) has been investigated in order to incorporate with the conventional implantation of diamond like carbon. In this preliminary work, nitrogen ions are implanted into the stainless steel sample with a dose of 5.5 x 10 -2 cm for a short implanting time of 7 minutes without target cooling. Surface properties such as microhardness, wear rate and the friction coefficient have been improved. X-ray and SEM analyses show distinct structural changes on the surface. A combination of sheath assisted implantation and thermal diffusion may be responsible for improvement in surface properties. (orig.)

Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor

International Nuclear Information System (INIS)

Lazović, Saša; Puač, Nevena; Spasić, Kosta; Malović, Gordana; Petrović, Zoran Lj; Cvelbar, Uroš; Mozetič, Miran; Radetić, Maja

2013-01-01

We have developed a large-volume low-pressure cylindrical plasma reactor with a size that matches industrial reactors for treatment of textiles. It was shown that it efficiently produces plasmas with only a small increase in power as compared with a similar reactor with 50 times smaller volume. Plasma generated at 13.56 MHz was stable from transition to streamers and capable of long-term continuous operation. An industrial-scale asymmetric cylindrical reactor of simple design and construction enabled good control over a wide range of active plasma species and ion concentrations. Detailed characterization of the discharge was performed using derivative, Langmuir and catalytic probes which enabled determination of the optimal sets of plasma parameters necessary for successful industry implementation and process control. Since neutral atomic oxygen plays a major role in many of the material processing applications, its spatial profile was measured using nickel catalytic probe over a wide range of plasma parameters. The spatial profiles show diffusion profiles with particle production close to the powered electrode and significant wall losses due to surface recombination. Oxygen atom densities range from 10 19 m −3 near the powered electrode to 10 17 m −3 near the wall. The concentrations of ions at the same time are changing from 10 16 to the 10 15 m −3 at the grounded chamber wall. (paper)

A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

International Nuclear Information System (INIS)

Dong Linxi; Chen Jindan; Huo Weihong; Li Yongjie; Sun Lingling; Yan Haixia

2009-01-01

The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30: 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

Ideal gas behavior of a strongly coupled complex (dusty) plasma.

Science.gov (United States)

Oxtoby, Neil P; Griffith, Elias J; Durniak, Céline; Ralph, Jason F; Samsonov, Dmitry

2013-07-05

In a laboratory, a two-dimensional complex (dusty) plasma consists of a low-density ionized gas containing a confined suspension of Yukawa-coupled plastic microspheres. For an initial crystal-like form, we report ideal gas behavior in this strongly coupled system during shock-wave experiments. This evidence supports the use of the ideal gas law as the equation of state for soft crystals such as those formed by dusty plasmas.

Ideal gas behavior of a strongly-coupled complex (dusty) plasma

OpenAIRE

Oxtoby, Neil P.; Griffith, Elias J.; Durniak, Céline; Ralph, Jason F.; Samsonov, Dmitry

2012-01-01

In a laboratory, a two-dimensional complex (dusty) plasma consists of a low-density ionized gas containing a confined suspension of Yukawa-coupled plastic microspheres. For an initial crystal-like form, we report ideal gas behavior in this strongly-coupled system during shock-wave experiments. This evidence supports the use of the ideal gas law as the equation of state for soft crystals such as those formed by dusty plasmas.

Development of a low-cost inductively coupled argon plasma

International Nuclear Information System (INIS)

Ripson, P.A.M.

1983-01-01

The aim of this investigation is to drastically reduce running costs of an inductively coupled plasma. This is done by reducing the argon consumption from 20 l/min to about 1 l/min. First, a sample introduction system operating on 0.1 l/min of carrier argon is described. This system ensures a high ratio of plasma argon and carrier argon even at the low total argon consumptions intended. Next, the developed low consumption plasma is presented. In the proposed design, air is blown perpendicularly against the outside of the torch. A different coil has been developed to make air-cooling efficient. Preliminary data on coupling efficiency for the air-cooled plasma are presented. A similarly low argon consumption has been achieved with water as an external coolant medium. It is concluded that a cheaper alternative to the current ICP has become available. (Auth.)

Investigation of radiofrequency plasma sources for space travel

International Nuclear Information System (INIS)

Charles, C; Boswell, R W; Takahashi, K

2012-01-01

Optimization of radiofrequency (RF) plasma sources for the development of space thrusters differs from other applications such as plasma processing of materials since power efficiency, propellant usage, particle acceleration or heating become driving parameters. The development of two RF (13.56 MHz) plasma sources, the high-pressure (∼1 Torr) capacitively coupled ‘pocket rocket’ plasma micro-thruster and the low-pressure (∼1 mTorr) inductively coupled helicon double layer thruster (HDLT), is discussed within the context of mature and emerging electric propulsion devices. The density gradient in low-pressure expanding RF plasmas creates an electric field that accelerates positive ions out of the plasma. Generally, the total potential drop is similar to that of a wall sheath allowing the plasma electrons to neutralize the ion beam. A high-pressure expansion with no applied magnetic field can result in large dissociation rates and/or a collimated beam of ions of small area and a flowing heated neutral beam (‘pocket rocket’). A low-pressure expansion dominated by a magnetic field can result in the formation of electric double layers which produce a very directed neutralized beam of ions of large area (HDLT). (paper)

Investigation of radiofrequency plasma sources for space travel

Science.gov (United States)

Charles, C.; Boswell, R. W.; Takahashi, K.

2012-12-01

Optimization of radiofrequency (RF) plasma sources for the development of space thrusters differs from other applications such as plasma processing of materials since power efficiency, propellant usage, particle acceleration or heating become driving parameters. The development of two RF (13.56 MHz) plasma sources, the high-pressure (˜1 Torr) capacitively coupled ‘pocket rocket’ plasma micro-thruster and the low-pressure (˜1 mTorr) inductively coupled helicon double layer thruster (HDLT), is discussed within the context of mature and emerging electric propulsion devices. The density gradient in low-pressure expanding RF plasmas creates an electric field that accelerates positive ions out of the plasma. Generally, the total potential drop is similar to that of a wall sheath allowing the plasma electrons to neutralize the ion beam. A high-pressure expansion with no applied magnetic field can result in large dissociation rates and/or a collimated beam of ions of small area and a flowing heated neutral beam (‘pocket rocket’). A low-pressure expansion dominated by a magnetic field can result in the formation of electric double layers which produce a very directed neutralized beam of ions of large area (HDLT).

Enhanced laser beam coupling to a plasma

International Nuclear Information System (INIS)

Steiger, A.D.; Woods, C.H.

1976-01-01

Density perturbations are induced in a heated plasma by means of a pair of oppositely directed, polarized laser beams of the same frequency. The wavelength of the density perturbations is equal to one half the wavelength of the laser beams. A third laser beam is linearly polarized and directed at the perturbed plasma along a line that is perpendicular to the direction of the two opposed beams. The electric field of the third beam is oriented to lie in the plane containing the three beams. The frequency of the third beam is chosen to cause it to interact resonantly with the plasma density perturbations, thereby efficiently coupling the energy of the third beam to the plasma. 10 claims, 2 figures

Micromachined capacitive ultrasonic immersion transducer array

Science.gov (United States)

Jin, Xuecheng

Capacitive micromachined ultrasonic transducers (cMUTs) have emerged as an attractive alternative to conventional piezoelectric ultrasonic transducers. They offer performance advantages of wide bandwidth and sensitivity that have heretofore been attainable. In addition, micromachining technology, which has benefited from the fast-growing microelectronics industry, enables cMUT array fabrication and electronics integration. This thesis describes the design and fabrication of micromachined capacitive ultrasonic immersion transducer arrays. The basic transducer electrical equivalent circuit is derived from Mason's theory. The effects of Lamb waves and Stoneley waves on cross coupling and acoustic losses are discussed. Electrical parasitics such as series resistance and shunt capacitance are also included in the model of the transducer. Transducer fabrication technology is systematically studied. Device dimension control in both vertical and horizontal directions, process alternatives and variations in membrane formation, via etch and cavity sealing, and metalization as well as their impact on transducer performance are summarized. Both 64 and 128 element 1-D array transducers are fabricated. Transducers are characterized in terms of electrical input impedance, bandwidth, sensitivity, dynamic range, impulse response and angular response, and their performance is compared with theoretical simulation. Various schemes for cross coupling reduction is analyzed, implemented, and verified with both experiments and theory. Preliminary results of immersion imaging are presented using 64 elements 1-D array transducers for active source imaging.

Wavelength scaling of laser plasma coupling

International Nuclear Information System (INIS)

Kruer, W.L.

1983-01-01

The use of shorter wavelength laser light both enhances collisional absorption and reduces deleterious collective plasma effects. Coupling processes which can be important in reactor-size targets are briefly reviewed. Simple estimates are presented for the intensity-wavelength regime in which collisional absorption is high and collective effects are minimized

SU-8 etching in inductively coupled oxygen plasma

DEFF Research Database (Denmark)

Rasmussen, Kristian Hagsted; Keller, Stephan Sylvest; Jensen, Flemming

2013-01-01

Structuring or removal of the epoxy based, photo sensitive polymer SU-8 by inductively coupled plasma reactive ion etching (ICP-RIE) was investigated as a function of plasma chemistry, bias power, temperature, and pressure. In a pure oxygen plasma, surface accumulation of antimony from the photo......-initiator introduced severe roughness and reduced etch rate significantly. Addition of SF6 to the plasma chemistry reduced the antimony surface concentration with lower roughness and higher etch rate as an outcome. Furthermore the etch anisotropy could be tuned by controlling the bias power. Etch rates up to 800 nm...

A 45.8fJ/Step, energy-efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing

KAUST Repository

Alhoshany, Abdulaziz

2016-05-03

An energy-efficient readout circuit for a capacitive sensor is presented. The capacitive sensor is digitized by a 12-bit energy efficient capacitance-to-digital converter (CDC) that is based on a differential successive-approximation architecture. This CDC meets extremely low power requirements by using an operational transconductance amplifier (OTA) that is based on a current-starved inverter. It uses a charge-redistribution DAC that involves coarse-fine architecture. We split the DAC into a coarse-DAC and a fine-DAC to allow a wide capacitance range in a compact area. It covers a wide range of capacitance of 16.14 pF with a 4.5 fF absolute resolution. An analog comparator is implemented by cross-coupling two 3-input NAND gates to enable power and area efficient operation. The prototype CDC was fabricated using a standard 180 nm CMOS technology. The 12-bit CDC has a measurement time of 42.5 μs, and consumes 3.54 μW and 0.29 μW from analog and digital supplies, respectively. This corresponds to a state-of-the-art figure-of-merit (FoM) of 45.8 fJ/conversion-step. © 2016 Elsevier B.V. All rights reserved.

A 45.8fJ/Step, energy-efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing

KAUST Repository

Alhoshany, Abdulaziz; Omran, Hesham; Salama, Khaled N.

2016-01-01

An energy-efficient readout circuit for a capacitive sensor is presented. The capacitive sensor is digitized by a 12-bit energy efficient capacitance-to-digital converter (CDC) that is based on a differential successive-approximation architecture. This CDC meets extremely low power requirements by using an operational transconductance amplifier (OTA) that is based on a current-starved inverter. It uses a charge-redistribution DAC that involves coarse-fine architecture. We split the DAC into a coarse-DAC and a fine-DAC to allow a wide capacitance range in a compact area. It covers a wide range of capacitance of 16.14 pF with a 4.5 fF absolute resolution. An analog comparator is implemented by cross-coupling two 3-input NAND gates to enable power and area efficient operation. The prototype CDC was fabricated using a standard 180 nm CMOS technology. The 12-bit CDC has a measurement time of 42.5 μs, and consumes 3.54 μW and 0.29 μW from analog and digital supplies, respectively. This corresponds to a state-of-the-art figure-of-merit (FoM) of 45.8 fJ/conversion-step. © 2016 Elsevier B.V. All rights reserved.

Surface functional groups in capacitive deionization with porous carbon electrodes

Science.gov (United States)

Hemmatifar, Ali; Oyarzun, Diego I.; Palko, James W.; Hawks, Steven A.; Stadermann, Michael; Santiago, Juan G.; Stanford Microfluidics Lab Team; Lawrence Livermore National Lab Team

2017-11-01

Capacitive deionization (CDI) is a promising technology for removal of toxic ions and salt from water. In CDI, an applied potential of about 1 V to pairs of porous electrodes (e.g. activated carbon) induces ion electromigration and electrostatic adsorption at electrode surfaces. Immobile surface functional groups play a critical role in the type and capacity of ion adsorption, and this can dramatically change desalination performance. We here use models and experiments to study weak electrolyte surface groups which protonate and/or depropotante based on their acid/base dissociation constants and local pore pH. Net chemical surface charge and differential capacitance can thus vary during CDI operation. In this work, we present a CDI model based on weak electrolyte acid/base equilibria theory. Our model incorporates preferential cation (anion) adsorption for activated carbon with acidic (basic) surface groups. We validated our model with experiments on custom built CDI cells with a variety of functionalizations. To this end, we varied electrolyte pH and measured adsorption of individual anionic and cationic ions using inductively coupled plasma mass spectrometry (ICP-MS) and ion chromatography (IC) techniques. Our model shows good agreement with experiments and provides a framework useful in the design of CDI control schemes.

Production of pulsed electric fields using capacitively coupled electrodes

Science.gov (United States)

Kendall, B. R. F.; Schwab, F. A. S.

1980-01-01

It is shown that pulsed electric fields can be produced over extended volumes by taking advantage of the internal capacitances in a stacked array of electrodes. The design, construction, and performance of practical arrays are discussed. The prototype arrays involved fields of 100-1000 V/cm extending over several centimeters. Scaling to larger physical dimensions is straightforward.

Effects of Reentry Plasma Sheath on Mutual-Coupling Property of Array Antenna

Directory of Open Access Journals (Sweden)

B. W. Bai

2015-01-01

Full Text Available A plasma sheath enveloping a reentry vehicle would cause the failure of on-board antennas, which is an important effect that contributes to the “blackout” problem. The method of replacing the on-board single antenna with the array antennas and using beamforming technology has been proposed to mitigate “blackout” problem by many other researchers. Because the plasma sheath is a reflective medium, plasma will alter the mutual coupling between array elements and degrade the beamforming performance of array antenna. In this paper, the effects of the plasma sheath on the mutual coupling properties between adjacent array elements are studied utilizing the algorithm of finite integration technique. Results show that mutual coupling coefficients of array elements are deteriorating more seriously with the decrease of collision frequency. Moreover, when electron density and collision frequency are both large, plasma sheath improves the mutual coupling property of array elements; this conclusion suggests that replacing the on-board single antenna with the array antennas and using beamforming technology can be adopted to mitigate the blackout problem in this condition.

Enhancement of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: a theoretical approach.

Science.gov (United States)

Mussenbrock, T; Brinkmann, R P; Lieberman, M A; Lichtenberg, A J; Kawamura, E

2008-08-22

In low-pressure capacitive radio frequency discharges, two mechanisms of electron heating are dominant: (i) Ohmic heating due to collisions of electrons with neutrals of the background gas and (ii) stochastic heating due to momentum transfer from the oscillating boundary sheath. In this work we show by means of a nonlinear global model that the self-excitation of the plasma series resonance which arises in asymmetric capacitive discharges due to nonlinear interaction of plasma bulk and sheath significantly affects both Ohmic heating and stochastic heating. We observe that the series resonance effect increases the dissipation by factors of 2-5. We conclude that the nonlinear plasma dynamics should be taken into account in order to describe quantitatively correct electron heating in asymmetric capacitive radio frequency discharges.

Nonlinear wave coupling in a warm plasma in the fluid

International Nuclear Information System (INIS)

Malara, F.; Veltri, P.

1984-01-01

The general expression for nonlinear coupling between plasma modes is obtained. The nonlinear conductivity tensor is then calculated by means of the two-fluid plasma description taking into account the thermal pressure effects

A new class of strongly coupled plasmas inspired by sonoluminescence

Science.gov (United States)

Bataller, Alexander; Plateau, Guillaume; Kappus, Brian; Putterman, Seth

2014-10-01

Sonoluminescence originates in a strongly coupled plasma with a near liquid density and a temperature of ~10,000 K. This plasma is in LTE and therefore, it should be a general thermodynamic state. To test the universality of sonoluminescence, similar plasma conditions were generated using femtosecond laser breakdown in high pressure gases. Calibrated streak spectroscopy reveals both transport and thermodynamic properties of a strongly coupled plasma. A blackbody spectrum, which persists long after the exciting laser has turned off, indicates the presence of a highly ionized LTE microplasma. In parallel with sonoluminescence, this thermodynamic state is achieved via a considerable reduction in the ionization potential. We gratefully acknowledge support from DARPA MTO for research on microplasmas. We thank Brian Naranjo, Keith Weninger, Carlos Camara, Gary Williams, and John Koulakis for valuable discussions.

Effects of assistant anode on planar inductively coupled magnetized argon plasma in plasma immersion ion implantation

International Nuclear Information System (INIS)

Tang, Deli; Chu, Paul K.

2003-01-01

The enhancement of planar radio frequency (RF) inductively coupled argon plasma is studied in the presence of an assistant anode and an external magnetic field at low pressure. The influence of the assistant anode and magnetic field on the efficiency of RF power absorption and plasma parameters is investigated. An external axial magnetic field is coupled into the plasma discharge region by an external electromagnetic coil outside the discharge chamber and an assistant cylindrical anode is inserted into the discharge chamber to enhance the plasma discharge. The plasma parameters and density profile are measured by an electrostatic Langmuir probe at different magnetic fields and anode voltages. The RF power absorption by the plasma can be effectively enhanced by the external magnetic field compared with the nonmagnetized discharge. The plasma density can be further increased by the application of a voltage to the assistant anode. Owing to the effective power absorption and enhanced plasma discharge by the assistant anode in a longitudinal magnetic field, the plasma density can be enhanced by more than a factor of two. Meanwhile, the nonuniformity of the plasma density is less than 10% and it can be achieved in a process chamber with a diameter of 600 mm

High efficiency nebulization for helium inductively coupled plasma mass spectrometry

International Nuclear Information System (INIS)

Jorabchi, Kaveh; McCormick, Ryan; Levine, Jonathan A.; Liu Huiying; Nam, S.-H.; Montaser, Akbar

2006-01-01

A pneumatically-driven, high efficiency nebulizer is explored for helium inductively coupled plasma mass spectrometry. The aerosol characteristics and analyte transport efficiencies of the high efficiency nebulizer for nebulization with helium are measured and compared to the results obtained with argon. Analytical performance indices of the helium inductively coupled plasma mass spectrometry are evaluated in terms of detection limits and precision. The helium inductively coupled plasma mass spectrometry detection limits obtained with the high efficiency nebulizer at 200 μL/min are higher than those achieved with the ultrasonic nebulizer consuming 2 mL/min solution, however, precision is generally better with high efficiency nebulizer (1-4% vs. 3-8% with ultrasonic nebulizer). Detection limits with the high efficiency nebulizer at 200 μL/min solution uptake rate approach those using ultrasonic nebulizer upon efficient desolvation with a heated spray chamber followed by a Peltier-cooled multipass condenser

Impact of plasma tube wall thickness on power coupling in ICP sources

International Nuclear Information System (INIS)

Nawaz, Anuscheh; Herdrich, Georg

2009-01-01

The inductively heated plasma source at the Institute of Space Systems was investigated with respect to the wall thickness of the plasma tube using an air plasma. For this, the wall thickness of the quartz tube was reduced in steps from 2.5 to 1.25 mm. The significance of reducing the wall thickness was analyzed with respect to both the maximum allowable tube cooling power and the coupling efficiency. While the former results from thermal stresses in the tube's wall, the latter results from a minimization of magnetic field losses near the coil turns of the inductively coupled plasma (ICP) source. Analysis of the thermal stress could be validated by experimental data, i.e. the measurement of the tube cooling power when the respective tube structure failed. The coupling efficiency could be assessed qualitatively by simplified models, and the experimental data recorded show that coupling was improved far more than predicted.

Self-organization observed in either fusion or strongly coupled plasmas

International Nuclear Information System (INIS)

Himura, Haruhiko; Sanpei, Akio

2011-01-01

If self-organization happens in the fusion plasma, the plasma alters its shape by weakening the confining magnetic field. The self-organized plasma is stable and robust, so its configuration is conserved even during transport in asymmetric magnetic fields. The self-organization of the plasma is driven by an electrostatic potential. Examples of the plasma that has such strong potential are non-neutral plasmas of pure ions or electrons and dusty plasmas. In the present paper, characteristic phenomena of strongly coupled plasmas such as particle aggregation and formation of the ordered structure are discussed. (T.I.)

Ion flux nonuniformities in large-area high-frequency capacitive discharges

International Nuclear Information System (INIS)

Perret, A.; Chabert, P.; Booth, J.-P.; Jolly, J.; Guillon, J.; Auvray, Ph.

2003-01-01

Strong nonuniformities of plasma production are expected in capacitive discharges if the excitation wavelength becomes comparable to the reactor size (standing-wave effect) and/or if the plasma skin depth becomes comparable to the plate separation (skin effect) [M. A. Lieberman et al., Plasma Sources Sci. Technol. 11, 283 (2002)]. Ion flux uniformity measurements were carried out in a large-area square (40 cmx40 cm) capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz in argon gas at 150 mTorr. At 13.56 MHz, the ion flux was uniform to ±5%. At 60 MHz (and above) and at low rf power, the standing-wave effect was seen (maximum of the ion flux at the center), in good quantitative agreement with theory. At higher rf power, maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects

Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

OpenAIRE

van Essen, M.C.

2009-01-01

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently matured and is widely employed in industry. A voltage across the electrodes will attract the movable part. This relation between electric field and separation (or capacitance) can be conveniently em...

Capacity-coupled multidischarge for atmospheric plasma production

International Nuclear Information System (INIS)

Mase, Hiroshi; Fujiwara, Tamiya; Sato, Noriyoshi

2003-01-01

We propose a method of plasma production by capacity-coupled multidischarge (CCMD) at atmospheric pressure. The discharge gaps in the CCMD consist of a common electrode and a number of compact electrodes (CCE) which are directly coupled with small capacitors for quenching the discharge. A simple CCE structure is provided by a cylindrical capacitor, the inner conductor of which is used as a gap electrode. A short pulse discharge is observed to appear homogeneously at each CCE. A charge transfer for the single-pulsed discharge is 10-100 times as large as that of the conventional dielectric barrier discharge. A high efficiency of ozone production has been confirmed in the CCMD using O 2 gas. A device configuration of the CCMD is quite flexible with respect to its geometrical shape and size. The CCMD could be used to produce plasmas for various kinds of industrial applications at atmospheric pressure

Multistage Coupling of Laser-Wakefield Accelerators with Curved Plasma Channels

Science.gov (United States)

Luo, J.; Chen, M.; Wu, W. Y.; Weng, S. M.; Sheng, Z. M.; Schroeder, C. B.; Jaroszynski, D. A.; Esarey, E.; Leemans, W. P.; Mori, W. B.; Zhang, J.

2018-04-01

Multistage coupling of laser-wakefield accelerators is essential to overcome laser energy depletion for high-energy applications such as TeV-level electron-positron colliders. Current staging schemes feed subsequent laser pulses into stages using plasma mirrors while controlling electron beam focusing with plasma lenses. Here a more compact and efficient scheme is proposed to realize the simultaneous coupling of the electron beam and the laser pulse into a second stage. A partly curved channel, integrating a straight acceleration stage with a curved transition segment, is used to guide a fresh laser pulse into a subsequent straight channel, while the electrons continue straight. This scheme benefits from a shorter coupling distance and continuous guiding of the electrons in plasma while suppressing transverse beam dispersion. Particle-in-cell simulations demonstrate that the electron beam from a previous stage can be efficiently injected into a subsequent stage for further acceleration while maintaining high capture efficiency, stability, and beam quality.

Study of novel plasma devices generated by high power lasers coupled with a micro-pulse power technology

International Nuclear Information System (INIS)

Nishida, A; Chen, Z L; Jin, Z; Kondo, K; Nakagawa, M; Kodama, R; Arima, H; Yoneda, H

2008-01-01

The authors have proposed introducing a micro pulse power technology in high power laser plasma experiments to boost up the return current, resulting in efficiently guiding of energetic electrons. High current pulse power generators with a pulse laser trigger system generate high-density plasma that is well conductor. To efficiently guiding by using a micro pulse power, we estimated parameter of a micro pulse power system that is voltage of rise time, current, charging voltage and capacitance

Inductively coupled plasma- mass spectrometry. Chapter 13

International Nuclear Information System (INIS)

Mahalingam, T.R.

1997-01-01

Inductively Coupled Plasma - Mass Spectrometry (ICP-MS) is a new technique for elemental and isotopic analysis which is currently attracting a great deal of interest. This relatively new technique has found wide applications in different fields of research viz., nuclear, geological, biological and environmental sciences

3D capacitive tactile sensor using DRIE micromachining

Science.gov (United States)

Chuang, Chiehtang; Chen, Rongshun

2005-07-01

This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

LH-power coupling in advanced tokamak plasmas in JET

International Nuclear Information System (INIS)

Joffrin, E.; Erents, K.; Gormezano, C.

2000-02-01

Lower Hybrid Current Drive (LHCD) is the most efficient tool to generate non-inductive current in tokamak plasmas. In JET, significant modifications of the current profile have been recently achieved in coupling up to 3MW of LH power in optimised shear discharges. However, the improved particle confinement during optimised shear plasmas results in a sharp decrease of the electron density in front the launcher close or below the cut-off density (ne=1.7.10 17 m -3 for f LH =37GHz) and makes difficult the coupling of the LH power. Deuterium gas near the launcher can help to improve the coupling, but has also the effect of increasing the ELM activity leading to the erosion of the internal transport barrier (ITB). Future development of lower hybrid launcher should include the constraints imposed by scenario such as the optimised shear. (author)

Diamond deposition using a planar radio frequency inductively coupled plasma

Science.gov (United States)

Bozeman, S. P.; Tucker, D. A.; Stoner, B. R.; Glass, J. T.; Hooke, W. M.

1995-06-01

A planar radio frequency inductively coupled plasma has been used to deposit diamond onto scratched silicon. This plasma source has been developed recently for use in large area semiconductor processing and holds promise as a method for scale up of diamond growth reactors. Deposition occurs in an annulus which coincides with the area of most intense optical emission from the plasma. Well-faceted diamond particles are produced when the substrate is immersed in the plasma.

Study of density jump in helicon-wave induced H2 plasma

International Nuclear Information System (INIS)

Jiang Fan; Cheng Xinlu; Xiong Zhenwei; Wu Weidong; Wang Yuying; Gao Yingxue; Dai Yang

2012-01-01

Hydrogen plasmas electron density and electron energy distribution function EEDF were studied with Langmuir probe. Two jumps were observed in the variation of the electron density with the radio frequency power. The relative intensity ratio of hydrogen plasmas spectrum line H α , H β and H γ validated this phenomenon. Two density jumps illuminated the transition of discharge mode,which labeled as capacitive, inductive and helicon-wave mode. In this work, the density jumps are explained from two sides, one is the interaction between electrons and hydrogen molecules, the other is Nagoya type III (N-type) antenna-plasma coupling. With the increase of radiofrequency power, the interaction between electron and hydrogen molecule has been enhanced which causes the electron density jumps. The antenna couples well to plasmas when transverse field E y is maximum, and the wave vector of k z locates at π/l a or 3π/l a , corresponding to the first and second density jump. (authors)

Ion sampling and transport in Inductively Coupled Plasma Mass Spectrometry

Science.gov (United States)

Farnsworth, Paul B.; Spencer, Ross L.

2017-08-01

Quantitative accuracy and high sensitivity in inductively coupled plasma mass spectrometry (ICP-MS) depend on consistent and efficient extraction and transport of analyte ions from an inductively coupled plasma to a mass analyzer, where they are sorted and detected. In this review we examine the fundamental physical processes that control ion sampling and transport in ICP-MS and compare the results of theory and computerized models with experimental efforts to characterize the flow of ions through plasma mass spectrometers' vacuum interfaces. We trace the flow of ions from their generation in the plasma, into the sampling cone, through the supersonic expansion in the first vacuum stage, through the skimmer, and into the ion optics that deliver the ions to the mass analyzer. At each stage we consider idealized behavior and departures from ideal behavior that affect the performance of ICP-MS as an analytical tool.

Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams

Science.gov (United States)

Hershkowitz, Noah [Madison, WI; Longmier, Benjamin [Madison, WI; Baalrud, Scott [Madison, WI

2009-03-03

An electron generating device extracts electrons, through an electron sheath, from plasma produced using RF fields. The electron sheath is located near a grounded ring at one end of a negatively biased conducting surface, which is normally a cylinder. Extracted electrons pass through the grounded ring in the presence of a steady state axial magnetic field. Sufficiently large magnetic fields and/or RF power into the plasma allow for helicon plasma generation. The ion loss area is sufficiently large compared to the electron loss area to allow for total non-ambipolar extraction of all electrons leaving the plasma. Voids in the negatively-biased conducting surface allow the time-varying magnetic fields provided by the antenna to inductively couple to the plasma within the conducting surface. The conducting surface acts as a Faraday shield, which reduces any time-varying electric fields from entering the conductive surface, i.e. blocks capacitive coupling between the antenna and the plasma.

Plasma diagnostics using laser-excited coupled and transmission ring resonators

International Nuclear Information System (INIS)

Haas, R.A.

1976-01-01

In this paper a simple two-level laser model is used to investigate the frequency response of coupled-cavity laser interferometers. It is found that under certain circumstances, often satisfied by molecular gas lasers, the frequency response exhibits a resonant behavior. This behavior severely complicates the interpretation of coupled-cavity laser interferometer measurements of rapidly varying plasmas. To circumvent this limitation a new type of laser interferometer plasma diagnostic with significantly improved time response was developed. In this interferometer the plasma is located in one arm of a transmission ring resonator cavity that is excited by an externally positioned laser. Thus, the laser is decoupled from the interferometer cavity and the time response of the interferometer is then limited by the Q of the ring resonator cavity. This improved time response is acquired without loss of spatial resolution, but requires a more sensitive signal detector since the laser is no longer used as a detector as it is in conventional coupled-cavity laser interferometers. Thus, the new technique incorporates the speed of the Mach--Zender interferometer and the sensitivity of the coupled-cavity laser interferometer. The basic operating principles of this type of interferometer have been verified using a CO 2 laser

The effect of radio-frequency self bias on ion acceleration in expanding argon plasmas in helicon sources

Science.gov (United States)

Wiebold, Matthew D.

Time-averaged plasma potential differences up to ˜ 165 V over several hundred Debye lengths are observed in low pressure (pn floating potential for argon (Vp ≈ 5kTe/e). In the capacitive mode, the ion acceleration is not well described by an ambipolar relation. The accelerated population decay is consistent with that predicted by charge-exchange collisions. Grounding the upstream endplate increases the self-bias voltage compared to a floating endplate. In the inductive and helicon modes, the ion acceleration more closely follows an ambipolar relation, a result of decreased capacitive coupling due to the decreased RF skin depth. The scaling of the potential gradient with the argon flow rate, magnetic field and RF power are investigated, with the highest potential gradients observed for the lowest flow rates in the capacitive mode. The magnitude of the self-bias voltage agrees well with that predicted for RF sheaths. Use of the self-bias effect in a plasma thruster is explored, possibly for a low thrust, high specific impulse mode in a multi-mode helicon thruster. This work could also explain similar potential gradients in expanding helicon plasmas that are ascribed to double layer formation in the literature.

Controlled elaboration of large-area plasmonic substrates by plasma process

International Nuclear Information System (INIS)

Pugliara, A; Despax, B; Makasheva, K; Bonafos, C; Carles, R

2015-01-01

Elaboration in a controlled way of large-area and efficient plasmonic substrates is achieved by combining sputtering of silver nanoparticles (AgNPs) and plasma polymerization of the embedding dielectric matrix in an axially asymmetric, capacitively coupled RF discharge maintained at low gas pressure. The plasma parameters and deposition conditions were optimized according to the optical response of these substrates. Structural and optical characterizations of the samples confirm the process efficiency. The obtained results indicate that to deposit a single layer of large and closely situated AgNPs, a high injected power and short sputtering times must be privileged. The plasma-elaborated plasmonic substrates appear to be very sensitive to any stimuli that affect their plasmonic response. (paper)

Equation of state of strongly coupled plasma mixtures

International Nuclear Information System (INIS)

DeWitt, H.E.

1984-01-01

Thermodynamic properties of strongly coupled (high density) plasmas of mixtures of light elements have been obtained by Monte Carlo simulations. For an assumed uniform charge background the equation of state of ionic mixtures is a simple extension of the one-component plasma EOS. More realistic electron screening effects are treated in linear response theory and with an appropriate electron dielectric function. Results have been obtained for the ionic pair distribution functions, and for the electric microfield distribution

Non-Equilibrium Modeling of Inductively Coupled RF Plasmas

Science.gov (United States)

2015-01-01

wall can be approximated with the expression for an infinite solenoid , B(r = R) = µ0NIc, where quan- tities N and Ic are the number of turns per unit...Modeling of non-equilibrium plasmas in an induc- tively coupled plasma facility. AIAA Paper 2014– 2235, 2014. 45th AIAA Plasmadynamics and Lasers ...1993. 24th Plas- madynamics and Laser Conference, Orlando, FL. [22] M. Capitelli, I. Armenise, D. Bruno, M. Caccia- tore, R. Celiberto, G. Colonna, O

Electron screening and kinetic-energy oscillations in a strongly coupled plasma

International Nuclear Information System (INIS)

Chen, Y.C.; Simien, C.E.; Laha, S.; Gupta, P.; Martinez, Y.N.; Mickelson, P.G.; Nagel, S.B.; Killian, T.C.

2004-01-01

We study equilibration of strongly coupled ions in an ultracold neutral plasma produced by photoionizing laser-cooled and trapped atoms. By varying the electron temperature, we show that electron screening modifies the equilibrium ion temperature. Even with few electrons in a Debye sphere, the screening is well described by a model using a Yukawa ion-ion potential. We also observe damped oscillations of the ion kinetic energy that are a unique feature of equilibration of a strongly coupled plasma

The strongly coupled quark-gluon plasma created at RHIC

CERN Document Server

Heinz, Ulrich W

2009-01-01

The Relativistic Heavy Ion Collider (RHIC) was built to re-create and study in the laboratory the extremely hot and dense matter that filled our entire universe during its first few microseconds. Its operation since June 2000 has been extremely successful, and the four large RHIC experiments have produced an impressive body of data which indeed provide compelling evidence for the formation of thermally equilibrated matter at unprecedented temperatures and energy densities -- a "quark-gluon plasma (QGP)". A surprise has been the discovery that this plasma behaves like an almost perfect fluid, with extremely low viscosity. Theorists had expected a weakly interacting gas of quarks and gluons, but instead we seem to have created a strongly coupled plasma liquid. The experimental evidence strongly relies on a feature called "elliptic flow" in off-central collisions, with additional support from other observations. This article explains how we probe the strongly coupled QGP, describes the ideas and measurements whi...

A simple, low-cost and robust capillary zone electrophoresis Method with capacitively coupled contactless conductivity detection for the routine determination of four selected penicillins in Money-constrained laboratories

NARCIS (Netherlands)

Paul, Prasanta; Sänger-van de Griend, Cari; Adams, Erwin; Van Schepdael, Ann

2018-01-01

A simple and robust capillary zone electrophoresis Method was developed and validated for the determination of amoxicillin and clavulanate, ampicillin, phenoxymethyl penicillin (Pen V) as well as flucloxacillin. Capacitively coupled contactless conductivity detection was employed as detection Mode

Some remarks on coherent nonlinear coupling of waves in plasmas

International Nuclear Information System (INIS)

Wilhelmsson, H.

1976-01-01

The analysis of nonlinear processes in plasma physics has given rise to a basic set of coupled equations. These equations describe the coherent nonlinear evolution of plasma waves. In this paper various possibilities of analysing these equations are discussed and inherent difficulties in the description of nonlinear interactions between different types of waves are pointed out. Specific examples of stimulated excitation of waves are considered. These are the parametric excitation of hybrid resonances in hot magnetized multi-ion component plasma and laser-plasma interactions. (B.D.)

Na/K-ATPase regulates bovine sperm capacitation through raft- and non-raft-mediated signaling mechanisms.

Science.gov (United States)

Rajamanickam, Gayathri D; Kastelic, John P; Thundathil, Jacob C

2017-11-01

Highly dynamic lipid microdomains (rafts) in the sperm plasma membrane contain several signaling proteins that regulate sperm capacitation. Na/K-ATPase isoforms (testis-specific isoform ATP1A4 and ubiquitous isoform ATP1A1) are abundant in bovine sperm plasma membrane. We previously reported that incubation of bovine sperm with ouabain, a specific Na/K-ATPase ligand, induced tyrosine phosphorylation of several sperm proteins during capacitation. The objective of this study was to investigate the roles of lipid rafts and non-rafts in Na/K-ATPase enzyme activity and signaling during bovine sperm capacitation. Content of ATP1A4 and, to a lesser extent, ATP1A1 was increased in raft and non-raft fractions of capacitated sperm, although non-raft enzyme activities of both isoforms were higher than the corresponding activities in rafts from capacitated sperm. Yet, ATP1A4 was the predominant isoform responsible for total Na/K-ATPase activity in both rafts and non-rafts. A comparative increase in phosphorylation of signaling molecules was observed in both raft (CAV1) and non-raft (EGFR and ERK1/2) membrane fractions during capacitation. Although SRC was phosphorylated in both membrane fractions, the non-raft fraction possessed more of this activated form. We also inferred, by immunoprecipitation, that ATP1A4 interacted with CAV1 and EGFR in the raft fraction, whereas interactions of ATP1A4 with SRC, EGFR, and ERK1/2 occurred in the non-raft fraction of ouabain-capacitated sperm; conversely, ATP1A1 interacted only with CAV1 in both fractions of uncapacitated and capacitated sperm. In conclusion, both raft and non-raft cohorts of Na/K-ATPase isoforms contributed to phosphorylation of signaling molecules during bovine sperm capacitation. © 2017 Wiley Periodicals, Inc.

Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation

International Nuclear Information System (INIS)

Tang, D.L.; Fu, R.K.Y.; Tian, X.B.; Chu, P.K.

2003-01-01

Plasmas with higher density and better uniformity are produced using an improved planar radio frequency (rf) inductively coupled plasma configuration in plasma immersion ion implantation (PIII). An axial magnetic field is produced by external electromagnetic coils outside the discharge chamber. The rf power can be effectively absorbed by the plasma in the vicinity of the electron gyrofrequency due to the enhanced resonant absorption of electromagnetic waves in the whistler wave range, which can propagate nearly along the magnetic field lines thus greatly increases the plasma density. The plasma is confined by a longitudinal multipolar cusp magnetic field made of permanent magnets outside the process chamber. It can improve the plasma uniformity without significantly affecting the ion density. The plasma density can be increased from 3x10 9 to 1x10 10 cm -3 employing an axial magnetic field of several Gauss at 1000 W rf power and 5x10 -4 Torr gas pressure. The nonuniformity of the plasma density is less than 10% and can be achieved in a process chamber with a diameter of 600 mm. Since the plasma generation and process chambers are separate, plasma extinction due to the plasma sheath touching the chamber wall in high-energy PIII can be avoided. Hence, low-pressure, high-energy, and high-uniformity ion implantation can be accomplished using this setup

Approximation scheme for strongly coupled plasmas: Dynamical theory

International Nuclear Information System (INIS)

Golden, K.I.; Kalman, G.

1979-01-01

The authors present a self-consistent approximation scheme for the calculation of the dynamical polarizability α (k, ω) at long wavelengths in strongly coupled one-component plasmas. Development of the scheme is carried out in two stages. The first stage follows the earlier Golden-Kalman-Silevitch (GKS) velocity-average approximation approach, but goes much further in its application of the nonlinear fluctuation-dissipation theorem to dynamical calculations. The result is the simple expression for α (k, ω), αatsub GKSat(k, ω) 4 moment sum rule. In the second stage, the above dynamical expression is made self-consistent at long wavelengths by postulating that a decomposition of the quadratic polarizabilities in terms of linear ones, which prevails in the k → 0 limit for weak coupling, can be relied upon as a paradigm for arbitrary coupling. The result is a relatively simple quadratic integral equation for α. Its evaluation in the weak-coupling limit and its comparison with known exact results in that limit reveal that almost all important correlational and long-time effects are reproduced by our theory with very good numerical accuracy over the entire frequency range; the only significant defect of the approximation seems to be the absence of the ''dominant'' γ ln γ -1 (γ is the plasma parameter) contribution to Im α

Atomic fluorescence spectrometry with the inductively coupled plasma

International Nuclear Information System (INIS)

Omenetto, N.; Winefordner, J.D.

1987-01-01

Atomic fluorescence spectrometry (AFS) is based on the radiational activation of atoms and ions produced in a suitable atomizer (ionizer) and the subsequent measurement of the resulting radiational deactivation, called fluorescence. Atomic fluorescence spectrometry has been of considerable interest to researchers in atomic spectrometry because of its use for both analytical and diagnostic purposes. Unfortunately, the analytical applications of AFS have suffered from the lack of commercial instrumentation until the recent marketing of the Baird multiple-element, hollow cathode lamp-excited inductively coupled plasma system. This chapter is concerned strictly with the use of the inductively coupled plasma (ICP) as a cell and as a source for AFS. Many of the major references concerning the ICP in analytical AFS are categorized in Table 9.1, along with several reviews and diagnostical studies. For more detailed discussions of the fundamental aspects of AFS, the reader is referred to previous reviews

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

Science.gov (United States)

Schulze, J.; Donkó, Z.; Lafleur, T.; Wilczek, S.; Brinkmann, R. P.

2018-05-01

Power absorption by electrons from the space- and time-dependent electric field represents the basic sustaining mechanism of all radio-frequency driven plasmas. This complex phenomenon has attracted significant attention. However, most theories and models are, so far, only able to account for part of the relevant mechanisms. The aim of this work is to present an in-depth analysis of the power absorption by electrons, via the use of a moment analysis of the Boltzmann equation without any ad-hoc assumptions. This analysis, for which the input quantities are taken from kinetic, particle based simulations, allows the identification of all physical mechanisms involved and an accurate quantification of their contributions. The perfect agreement between the sum of these contributions and the simulation results verifies the completeness of the model. We study the relative importance of these mechanisms as a function of pressure, with high spatial and temporal resolution, in an electropositive argon discharge. In contrast to some widely accepted previous models we find that high space- and time-dependent ambipolar electric fields outside the sheaths play a key role for electron power absorption. This ambipolar field is time-dependent within the RF period and temporally asymmetric, i.e., the sheath expansion is not a ‘mirror image’ of the sheath collapse. We demonstrate that this time-dependence is mainly caused by a time modulation of the electron temperature resulting from the energy transfer to electrons by the ambipolar field itself during sheath expansion. We provide a theoretical proof that this ambipolar electron power absorption would vanish completely, if the electron temperature was constant in time. This mechanism of electron power absorption is based on a time modulated electron temperature, markedly different from the Hard Wall Model, of key importance for energy transfer to electrons on time average and, thus, essential for the generation of capacitively

Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching

Czech Academy of Sciences Publication Activity Database

Domonkos, Mária; Ižák, Tibor; Babchenko, Oleg; Varga, Marián; Hruška, Karel; Kromka, Alexander

2014-01-01

Roč. 6, č. 7 (2014), s. 780-784 ISSN 2164-6627 R&D Projects: GA ČR GAP108/12/0910; GA ČR GAP108/12/0996; GA MPO FR-TI2/736 Institutional support: RVO:68378271 Keywords : micro- and nanocrystalline diamond * capacitively coupled plasma * reactive ion etching * nanostructuring * scanning electron microscopy Subject RIV: BM - Solid Matter Physics ; Magnetism

Equilibrium statistical mechanics of strongly coupled plasmas by numerical simulation

International Nuclear Information System (INIS)

DeWitt, H.E.

1977-01-01

Numerical experiments using the Monte Carlo method have led to systematic and accurate results for the thermodynamic properties of strongly coupled one-component plasmas and mixtures of two nuclear components. These talks are intended to summarize the results of Monte Carlo simulations from Paris and from Livermore. Simple analytic expressions for the equation of state and other thermodynamic functions have been obtained in which there is a clear distinction between a lattice-like static portion and a thermal portion. The thermal energy for the one-component plasma has a simple power dependence on temperature, (kT)/sup 3 / 4 /, that is identical to Monte Carlo results obtained for strongly coupled fluids governed by repulsive l/r/sup n/ potentials. For two-component plasmas the ion-sphere model is shown to accurately represent the static portion of the energy. Electron screening is included in the Monte Carlo simulations using linear response theory and the Lindhard dielectric function. Free energy expressions have been constructed for one and two component plasmas that allow easy computation of all thermodynamic functions

Study of optical emission spectroscopy with inductively coupled plasma torch

International Nuclear Information System (INIS)

Bauer, M.

1982-01-01

Inductively coupled plasma optical emission spectroscopy is an excellent tool for quantitative multielement trace analysis. This paper describes the performance of a computer-controlled sequential measurement system. Chemical and ionization interferences are shown to be negligible due to the characteristics of the inductively coupled plasma, spectral interferences are eliminated by using a high-resolution monochromator and computer data handling. Good accuracy is achieved for most of the interesting elements, as is shown from both an interlaboratory test and from comparison of the results of water samples from the rivers Elbe and Weser with those achieved with neutron activation and X-ray fluorescence analysis. (orig.) [de

Linear coupling of electromagnetic and Jeans modes in self-gravitating plasma streams

International Nuclear Information System (INIS)

Yaroshenko, Victoria V.; Voitenko, Yuriy; Goossens, Marcel

2002-01-01

A new mechanism of linear coupling between electromagnetic (nonpotential) and gravitational disturbances is found for oblique propagation relatively to particle streams. The general dispersion law is derived and applied to the case of two countersteaming dust beams of equal strength and quiasiperpendicular propagation. It reveals a strong linear coupling between the low-frequency aperiodically unstable electromagnetic (AEM) and the Jeans (JM) modes. The coupling is of a mode conversion type, resulting in a frequency gap in the dispersion, and thus significantly modifies the instability criteria. It is shown that, in contrast to the electrostatic case, AEM and JM coupling in streaming self-gravitating plasmas can actually appear even if the plasma frequencies of the dust species greatly exceed the corresponding Jeans frequencies

Electrical characteristics for capacitively coupled radio frequency ...

Indian Academy of Sciences (India)

MURAT TANISLI

2017-08-16

Aug 16, 2017 ... b; 52.80.Pi. 1. Introduction. It is interesting to study the behaviour of plasma. There are many ... and then the model is described in §3. Graphs and ... inductor (Lbp) occur in the bulk plasma circuit. The ... the parallel plate, the electron density, the mass of the ... The electron neutral collision frequency may be.

Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

International Nuclear Information System (INIS)

Lee, Hee-Jin; Lee, Hyo-Chang; Kim, Young-Cheol; Chung, Chin-Wook

2013-01-01

With an enlargement of the wafer size, development of large-area plasma sources and control of plasma density distribution are required. To control the spatial distribution of the plasma density, wireless power transfer is applied to an inductively coupled plasma for the first time. An inner powered antenna and an outer resonant coil connected to a variable capacitor are placed on the top of the chamber. As the self-resonance frequency ω r of the resonant coil is adjusted, the power transfer rate from the inner powered coil to the outer resonant coil is changed and the dramatic evolution of the plasma density profile is measured. As ω r of the outer resonant coil changes from the non-resonant condition (where ω r is not the driving angular frequency ω rf ) to the resonant condition (where ω r = ω rf ), the plasma density profile evolves from a convex shape with maximal plasma density at the radial center into a concave shape with maximal plasma density in the vicinity of the resonant antenna coil. This result shows that the plasma density distribution can be successfully controlled via wireless resonance power transfer. (fast track communication)

Experiment on dust acoustic solitons in strongly coupled dusty plasma

International Nuclear Information System (INIS)

Boruah, Abhijit; Sharma, Sumita Kumari; Bailung, Heremba

2015-01-01

Dusty plasma, which contains nanometer to micrometer sized dust particles along with electrons and ions, supports a low frequency wave called Dust Acoustic wave, analogous to ion acoustic wave in normal plasma. Due to high charge and low temperature of the dust particles, dusty plasma can easily transform into a strongly coupled state when the Coulomb interaction potential energy exceeds the dust kinetic energy. Dust acoustic perturbations are excited in such strongly coupled dusty plasma by applying a short negative pulse (100 ms) of amplitude 5 - 20 V to an exciter. The perturbation steepens due to nonlinear effect and forms a solitary structure by balancing dispersion present in the medium. For specific discharge conditions, excitation amplitude above a critical value, the perturbation is found to evolve into a number of solitons. The experimental results on the excitation of multiple dust acoustic solitons in the strongly coupled regime are presented in this work. The experiment is carried out in radio frequency discharged plasma produced in a glass chamber at a pressure 0.01 - 0.1 mbar. Few layers of dust particles (∼ 5 μm in diameter) are levitated above a grounded electrode inside the chamber. Wave evolution is observed with the help of green laser sheet and recorded in a high resolution camera at high frame rate. The high amplitude soliton propagates ahead followed by smaller amplitude solitons with lower velocity. The separation between the solitons increases as time passes by. The characteristics of the observed dust acoustic solitons such as amplitude-velocity and amplitude- Mach number relationship are compared with the solutions of Korteweg-de Vries (KdV) equation. (author)

Jet quenching in a strongly coupled anisotropic plasma

Science.gov (United States)

Chernicoff, Mariano; Fernández, Daniel; Mateos, David; Trancanelli, Diego

2012-08-01

The jet quenching parameter of an anisotropic plasma depends on the relative orientation between the anisotropic direction, the direction of motion of the parton, and the direction along which the momentum broadening is measured. We calculate the jet quenching parameter of an anisotropic, strongly coupled {N} = 4 plasma by means of its gravity dual. We present the results for arbitrary orientations and arbitrary values of the anisotropy. The anisotropic value can be larger or smaller than the isotropic one, and this depends on whether the comparison is made at equal temperatures or at equal entropy densities. We compare our results to analogous calculations for the real-world quark-gluon plasma and find agreement in some cases and disagreement in others.

Mass spectrometric evidence for suprathermal ionization in an inductively coupled argon plasma

International Nuclear Information System (INIS)

Houk, R.S.; Svec, H.J.; Fassel, V.A.

1981-01-01

Mass spectra have been obtained of species in the axial channel of an inductively coupled argon plasma by extracting ions from the inductively coupled plasma into a vacuum system housing a quadrupole mass spectrometer. Ionization temperatures (T/sub ion/) are obtained from relative count rates of m/z-resolved ions according to two general types of ionization equilibrium considerations: (a) the radio of doubly/singly charged ions of the same element, and (b) the ratio of singly charged ions from two elements of different ionization energy. The T/sub ion/ values derived from measurement of Ar +2 /Ar + , Ba +2 /Ba + , Sr +2 /Sr + , and Cd + /I + are all greater than those expected from excitation temperatures measured by other workers. The latter three values for T/sub ion/ are in reasonable agreement with values obtained by optical spectrometry for a variety of argon inductively coupled plasmas

Modelling of Argon Cold Atmospheric Plasmas for Biomedical Applications

Science.gov (United States)

Atanasova, M.; Benova, E.; Degrez, G.; van der Mullen, J. A. M.

2018-02-01

Plasmas for biomedical applications are one of the newest fields of plasma utilization. Especially high is the interest toward plasma usage in medicine. Promising results are achieved in blood coagulation, wound healing, treatment of some forms of cancer, diabetic complications, etc. However, the investigations of the biomedical applications from biological and medical viewpoint are much more advanced than the studies on the dynamics of the plasma. In this work we aim to address some specific challenges in the field of plasma modelling, arising from biomedical applications - what are the plasma reactive species’ and electrical fields’ spatial distributions as well as their production mechanisms; what are the fluxes and energies of the various components of the plasma delivers to the treated surfaces; what is the gas flow pattern? The focus is on two devices, namely the capacitive coupled plasma jet and the microwave surface wave sustained discharge. The devices are representatives of the so called cold atmospheric plasmas (CAPs). These are discharges characterized by low gas temperature - less than 40°C at the point of application - and non-equilibrium chemistry.

Capillary electrophoresis - inductively coupled plasma mass spectrometry (CE-ICPMS) coupling to assess pentavalent actinides thermodynamic constants

International Nuclear Information System (INIS)

Topin, S.; Baglan, N.; Aupiais, J.

2009-01-01

Full text: Aiming to investigate plutonium speciation at trace levels, we coupled capillary electrophoresis, a high resolution separation technique with inductively coupled plasma mass spectrometry, a detector with high sensitivity for plutonium. The research work performed to optimize the coupling is discussed based on the following criteria: the migration time, the resolution and the detection limit. The capabilities of the analytical tool are demonstrated by determining thermodynamic constants for pentavalent plutonium, and neptunium as a reference, in the presence of inorganic ligands. (author)

Purification of the gas after pyrolysis in coupled plasma-catalytic system

Directory of Open Access Journals (Sweden)

Młotek Michał

2017-12-01

Full Text Available Gliding discharge and coupled plasma-catalytic system were used for toluene conversion in a gas composition such as the one obtained during pyrolysis of biomass. The chosen catalyst was G-0117, which is an industrial catalyst for methane conversion manufactured by INS Pulawy (Poland. The effects of discharge power, initial concentration of toluene, gas flow rate and the presence of the bed of the G-0117 catalyst on the conversion of C7H8, a model tars compounds were investigated. Conversion of coluene increases with discharge power and the highest one was noted in the coupled plasma-catalytic system. It was higher than that in the homogeneous system of gliding discharge. When applying a reactor with reduced G-0117 and CO (0.15 mol%, CO2 (0.15 mol%, H2 (0.30 mol%, N2 (0.40 mol%, 4000 ppm of toluene and gas flow rate of 1.5 Nm3/h, the conversion of toluene was higher than 99%. In the coupled plasma-catalytic system with G-0117 methanation of carbon oxides was observed.

LLNL large-area inductively coupled plasma (ICP) source: Experiments

International Nuclear Information System (INIS)

Richardson, R.A.; Egan, P.O.; Benjamin, R.D.

1995-05-01

We describe initial experiments with a large (76-cm diameter) plasma source chamber to explore the problems associated with large-area inductively coupled plasma (ICP) sources to produce high density plasmas useful for processing 400-mm semiconductor wafers. Our experiments typically use a 640-nun diameter planar ICP coil driven at 13.56 MHz. Plasma and system data are taken in Ar and N 2 over the pressure range 3-50 mtorr. RF inductive power was run up to 2000W, but typically data were taken over the range 100-1000W. Diagnostics include optical emission spectroscopy, Langmuir probes, and B probes as well as electrical circuit measurements. The B and E-M measurements are compared with models based on commercial E-M codes. Initial indications are that uniform plasmas suitable for 400-mm processing are attainable

Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates

Energy Technology Data Exchange (ETDEWEB)

Brennan, Christopher J.; Neumann, Christopher M.; Vitale, Steven A., E-mail: steven.vitale@ll.mit.edu [Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02420 (United States)

2015-07-28

Fully depleted silicon-on-insulator transistors were fabricated using two different metal gate deposition mechanisms to compare plasma damage effects on gate oxide quality. Devices fabricated with both plasma-enhanced atomic-layer-deposited (PE-ALD) TiN gates and magnetron plasma sputtered TiN gates showed very good electrostatics and short-channel characteristics. However, the gate oxide quality was markedly better for PE-ALD TiN. A significant reduction in interface state density was inferred from capacitance-voltage measurements as well as a 1200× reduction in gate leakage current. A high-power magnetron plasma source produces a much higher energetic ion and vacuum ultra-violet (VUV) photon flux to the wafer compared to a low-power inductively coupled PE-ALD source. The ion and VUV photons produce defect states in the bulk of the gate oxide as well as at the oxide-silicon interface, causing higher leakage and potential reliability degradation.

Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

NARCIS (Netherlands)

van Essen, M.C.

2009-01-01

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently

Continuum Lowering and Fermi-Surface Rising in Strongly Coupled and Degenerate Plasmas

International Nuclear Information System (INIS)

Hu, S. X.

2017-01-01

Here, continuum lowering is a well-known and important physics concept that describes the ionization potential depression (IPD) in plasmas caused by thermal-/pressure-induced ionization of outer-shell electrons. The existing IPD models are often used to characterize plasma conditions and to gauge opacity calculations. Recent precision measurements have revealed deficits in our understanding of continuum lowering in dense hot plasmas. However, these investigations have so far been limited to IPD in strongly coupled but nondegenerate plasmas. Here, we report a first-principles study of the K-edge shifting in both strongly coupled and fully degenerate carbon plasmas, with quantum molecular dynamics (QMD) calculations based on the all-electron density-functional theory (DFT). The resulted K-edge shifting versus plasma density, as a probe to the continuum lowering and the Fermi-surface rising, is found to be significantly different from predictions of existing IPD models. In contrast, a simple model of “single atom in box” (SAIB), developed in this work, accurately predicts K-edge locations as what ab-initio calculations provide.

Study of the linear and non-linear coupling of the LH wave to the tokamak plasmas

International Nuclear Information System (INIS)

Preynas, M.

2012-10-01

In order to achieve long pulse operation with a tokamak, additional heating and current drive systems are necessary. High frequency antennas, which deliver several megawatts of power to the plasma, are currently used in several tokamaks. Moreover, a good control of the coupling of the wave launched by the antenna to the edge plasma is required to optimize the efficiency of heating and current drive LH systems. However, non-linear effects which depend on the level of injected power in the plasma strongly damage the coupling of the LH wave at particular edge parameters (density and temperature profiles). Results presented in the manuscript deal with the study of the linear and non-linear coupling of the LH wave to the plasma. In the framework of the commissioning of the Passive Active Multijunction antenna in 2009 on the Tore Supra tokamak aiming at validating the LH system suggested for ITER, the characterisation of its coupling properties was realized from low power experiments. The experimental results, which are compared with the linear coupling code ALOHA, have validated the theoretical predictions of good coupling at edge plasma density around the cut-off density. Besides, the ponderomotive effect is clearly identified as responsible for the deterioration in the coupling of the wave, which is measured under particular edge plasma conditions. A theoretical model combining the coupling of the LH wave with the ponderomotive force is suggested to explain the experimental observations. Thus, a new full wave code (named PICCOLO-2D) was developed and results from simulations validate the working hypothesis of the contribution of the ponderomotive effect in the non-linear observations of LHCD coupling on Tore Supra. (author)

Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge

International Nuclear Information System (INIS)

Chabert, P.; Raimbault, J.L.; Rax, J.M.; Lieberman, M.A.

2004-01-01

It has been shown previously [Lieberman et al., Plasma Sources Sci. Technol. 11, 283 (2002)], using a non-self-consistent model based on solutions of Maxwell's equations, that several electromagnetic effects may compromise capacitive discharge uniformity. Among these, the standing wave effect dominates at low and moderate electron densities when the driving frequency is significantly greater than the usual 13.56 MHz. In the present work, two different global discharge models have been coupled to a transmission line model and used to obtain the self-consistent characteristics of the standing wave effect. An analytical solution for the wavelength λ was derived for the lossless case and compared to the numerical results. For typical plasma etching conditions (pressure 10-100 mTorr), a good approximation of the wavelength is λ/λ 0 ≅40 V 0 1/10 l -1/2 f -2/5 , where λ 0 is the wavelength in vacuum, V 0 is the rf voltage magnitude in volts at the discharge center, l is the electrode spacing in meters, and f the driving frequency in hertz

Jets in a strongly coupled anisotropic plasma

Energy Technology Data Exchange (ETDEWEB)

Fadafan, Kazem Bitaghsir [Shahrood University of Technology, Faculty of Physics, Shahrood (Iran, Islamic Republic of); University of Southampton, STAG Research Centre Physics and Astronomy, Southampton (United Kingdom); Morad, Razieh [University of Cape Town, Department of Physics, Rondebosch (South Africa)

2018-01-15

In this paper, we study the dynamics of the light quark jet moving through the static, strongly coupled N = 4, anisotropic plasma with and without charge. The light quark is presented by a 2-parameters point-like initial condition falling string in the context of the AdS/CFT. We calculate the stopping distance of the light quark in the anisotropic medium and compare it with its isotropic value. We study the dependency of the stopping distance to the both string initial conditions and background parameters such as anisotropy parameter or chemical potential. Although the typical behavior of the string in the anisotropic medium is similar to the one in the isotropic AdS-Sch background, the string falls faster to the horizon depending on the direction of moving. Particularly, the enhancement of quenching is larger in the beam direction. We find that the suppression of stopping distance is more prominent when the anisotropic plasma have the same temperature as the isotropic plasma. (orig.)

On coupling fluid plasma and kinetic neutral physics models

Directory of Open Access Journals (Sweden)

I. Joseph

2017-08-01

Full Text Available The coupled fluid plasma and kinetic neutral physics equations are analyzed through theory and simulation of benchmark cases. It is shown that coupling methods that do not treat the coupling rates implicitly are restricted to short time steps for stability. Fast charge exchange, ionization and recombination coupling rates exist, even after constraining the solution by requiring that the neutrals are at equilibrium. For explicit coupling, the present implementation of Monte Carlo correlated sampling techniques does not allow for complete convergence in slab geometry. For the benchmark case, residuals decay with particle number and increase with grid size, indicating that they scale in a manner that is similar to the theoretical prediction for nonlinear bias error. Progress is reported on implementation of a fully implicit Jacobian-free Newton–Krylov coupling scheme. The present block Jacobi preconditioning method is still sensitive to time step and methods that better precondition the coupled system are under investigation.

Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

International Nuclear Information System (INIS)

Chang, M W; Gwo, T J; Deng, T M; Chang, H C

2006-01-01

A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

Effective potential kinetic theory for strongly coupled plasmas

Science.gov (United States)

Baalrud, Scott D.; Daligault, Jérôme

2016-11-01

The effective potential theory (EPT) is a recently proposed method for extending traditional plasma kinetic and transport theory into the strongly coupled regime. Validation from experiments and molecular dynamics simulations have shown it to be accurate up to the onset of liquid-like correlation parameters (corresponding to Γ ≃ 10-50 for the one-component plasma, depending on the process of interest). Here, this theory is briefly reviewed along with comparisons between the theory and molecular dynamics simulations for self-diffusivity and viscosity of the one-component plasma. A number of new results are also provided, including calculations of friction coefficients, energy exchange rates, stopping power, and mobility. The theory is also cast in the Landau and Fokker-Planck kinetic forms, which may prove useful for enabling efficient kinetic computations.

Closed-Loop Control of Humidification for Artifact Reduction in Capacitive ECG Measurements.

Science.gov (United States)

Leicht, Lennart; Eilebrecht, Benjamin; Weyer, Soren; Leonhardt, Steffen; Teichmann, Daniel

2017-04-01

Recording biosignals without the need for direct skin contact offers new opportunities for ubiquitous health monitoring. Electrodes with capacitive coupling have been shown to be suitable for the monitoring of electrical potentials on the body surface, in particular ECG. However, due to triboelectric charge generation and motion artifacts, signal and thus diagnostic quality is inferior to galvanic coupling. Active closed-loop humidification of capacitive electrodes is proposed in this work as a new concept to improve signal quality. A capacitive ECG recording system integrated into a common car seat is presented. It can regulate the micro climate at the interface of electrode and patient by actively dispensing water vapour and monitoring humidity in a closed-loop approach. As a regenerative water reservoir, silica gel is used. The system was evaluated with respect to subjective and objective ECG signal quality. Active humidification was found to have a significant positive effect in case of previously poor quality. Also, it had no diminishing effect in case of already good signal quality.

High-throughput anisotropic plasma etching of polyimide for MEMS

International Nuclear Information System (INIS)

Bliznetsov, Vladimir; Manickam, Anbumalar; Ranganathan, Nagarajan; Chen, Junwei

2011-01-01

This note describes a new high-throughput process of polyimide etching for the fabrication of MEMS devices with an organic sacrificial layer approach. Using dual frequency superimposed capacitively coupled plasma we achieved a vertical profile of polyimide with an etching rate as high as 3.5 µm min −1 . After the fabrication of vertical structures in a polyimide material, additional steps were performed to fabricate structural elements of MEMS by deposition of a SiO 2 layer and performing release etching of polyimide. (technical note)

False capacitance of supercapacitors

OpenAIRE

Ragoisha, G. A.; Aniskevich, Y. M.

2016-01-01

Capacitance measurements from cyclic voltammetry, galvanostatic chronopotentiometry and calculation of capacitance from imaginary part of impedance are widely used in investigations of supercapacitors. The methods assume the supercapacitor is a capacitor, while real objects correspond to different equivalent electric circuits and show various contributions of non-capacitive currents to the current which is used for calculation of capacitance. Specific capacitances which are presented in F g-1...

Powder processing and spheroidizing with thermal inductively coupled plasma

International Nuclear Information System (INIS)

Nutsch, G.; Linke, P.; Zakharian, S.; Dzur, B.; Weiss, K.-H.

2001-01-01

Processing of advanced powder materials for the spraying industry is one of the most promising applications of the thermal RF inductively coupled plasma. By selecting the feedstock carefully and adjusting the RF plasma parameters, unique materials with high quality can be achieved. Powders injected in the hot plasma core emerge with modified shapes, morphology, crystal structure and chemical composition. Ceramic oxide powders such as Al 2 O 3 , ZrO 2 , SiO 2 are spheroidized with a high spheroidization rate. By using the RF induction plasma spheroidizing process tungsten melt carbide powders are obtained with a high spheroidization rate at high feeding rates by densification of agglomerated powders consisting of di-tungsten carbide and monocarbide with a definite composition. This kind of ball-like powders is particularly suited for wear resistant applications. (author)

A New Wide Frequency Band Capacitance Transducer with Application to Measuring Metal Fill Time

Directory of Open Access Journals (Sweden)

Wael DEABES

2009-01-01

Full Text Available A novel low cost, high frequency circuit for measuring capacitance is proposed in this paper. This new capacitance measuring circuit is able to measure small coupling capacitance variations with high stray-immunity. Hence, it could be used in many potential applications such as measuring the metal fill time in the Lost Foam Casting (LFC process and Electrical Capacitive Tomography (ECT system. The proposed circuit is based on differential charging/discharging method using current feedback amplifier and a synchronous demodulation stage. The circuit has a wide high frequency operating range with zero phase shift; hence multiple circuits can work at different frequencies simultaneously to measure the capacitance. The non-ideal characteristic of the circuit has been analyzed and the results verified through LTSpice simulation. Results from the tests on a prototype and a simulation elucidate the practicality of the proposed circuit.

Modelling of plasma-antenna coupling and non-linear radio frequency wave-plasma-wall interactions in the magnetized plasma device under ion cyclotron range of frequencies

International Nuclear Information System (INIS)

Lu, LingFeng

2016-01-01

Ion Cyclotron Resonant Heating (ICRH) by waves in 30-80 MHz range is currently used in magnetic fusion plasmas. Excited by phased arrays of current straps at the plasma periphery, these waves exist under two polarizations. The Fast Wave tunnels through the tenuous plasma edge and propagates to its center where it is absorbed. The parasitically emitted Slow Wave only exists close to the launchers. How much power can be coupled to the center with 1 A current on the straps? How do the emitted radiofrequency (RF) near and far fields interact parasitically with the edge plasma via RF sheath rectification at plasma-wall interfaces? To address these two issues simultaneously, in realistic geometry over the size of ICRH antennas, this thesis upgraded and tested the Self-consistent Sheaths and Waves for ICH (SSWICH) code. SSWICH couples self-consistently RF wave propagation and Direct Current (DC) plasma biasing via non-linear RF and DC sheath boundary conditions (SBCs) at plasma/wall interfaces. Its upgrade is full wave and was implemented in two dimensions (toroidal/radial). New SBCs coupling the two polarizations were derived and implemented along shaped walls tilted with respect to the confinement magnetic field. Using this new tool in the absence of SBCs, we studied the impact of a density decaying continuously inside the antenna box and across the Lower Hybrid (LH) resonance. Up to the memory limits of our workstation, the RF fields below the LH resonance changed with the grid size. However the coupled power spectrum hardly evolved and was only weakly affected by the density inside the box. In presence of SBCs, SSWICH-FW simulations have identified the role of the fast wave on RF sheath excitation and reproduced some key experimental observations. SSWICH-FW was finally adapted to conduct the first electromagnetic and RF-sheath 2D simulations of the cylindrical magnetized plasma device ALINE. (author) [fr

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

International Nuclear Information System (INIS)

Schüngel, E.; Schulze, J.; Czarnetzki, U.; Eremin, D.; Mussenbrock, T.

2012-01-01

The electrical asymmetry effect (EAE) allows an almost ideal separate control of the mean ion energy, i >, and flux, Γ i , at the electrodes in capacitive radio frequency discharges with identical electrode areas driven at two consecutive harmonics with adjustable phase shift, θ. In such geometrically symmetric discharges, a DC self bias is generated as a function of θ. Consequently, i > can be controlled separately from Γ i by adjusting the phase shift. Here, we systematically study the EAE in low pressure dual-frequency discharges with different electrode areas operated in argon at 13.56 MHz and 27.12 MHz by experiments, kinetic simulations, and analytical modeling. We find that the functional dependence of the DC self bias on θ is similar, but its absolute value is strongly affected by the electrode area ratio. Consequently, the ion energy distributions change and i > can be controlled by adjusting θ, but its control range is different at both electrodes and determined by the area ratio. Under distinct conditions, the geometric asymmetry can be compensated electrically. In contrast to geometrically symmetric discharges, we find the ratio of the maximum sheath voltages to remain constant as a function of θ at low pressures and Γ i to depend on θ at the smaller electrode. These observations are understood by the model. Finally, we study the self-excitation of non-linear plasma series resonance oscillations and its effect on the electron heating.

Strongly capacitively coupled double quantum dots in GaAs-AlGaAs heterostructures. Preparation and electrical transport; Kapazitativ stark gekoppelte Doppelquantenpunkte in GaAs-AlGaAs-Heterostrukturen. Herstellung und elektrischer Transport

Energy Technology Data Exchange (ETDEWEB)

Huebel, A.

2007-11-22

In this work, a double quantum dot system is studied whose two dots are electrically insulated from one another and contacted independently with two leads. The geometry is optimized to maximize the capacitive interaction between the dots. The samples are characterized by electrical transport measurements in a dilution refrigerator. It is then studied at different tunnel couplings how the capacitive interaction influences the electrical transport in equilibrium. Under certain conditions correlated tunnel processes can be observed. A simple model is derived that serves to understand these processes. The double quantum dot system is defined in lateral arrangement by reactive ion etching of a two-dimensional electron system located only 50 nm below the surface of a GaAs-AlGaAs heterostructure. The samples are characterized in a dilution refrigerator at 25 mK near the common pinch-off point of all four tunnel barriers. A measurement of the differential equilibrium conductances of both quantum dots as a function of two gate voltages yields a honeycomb-like charge stability diagram. The most important sample characteristic is the ratio between the interaction capacitance and the total capacitance of a single quantum dot. For the optimized sample, this ratio turns out to be larger than one third near the common pinch-off point, with a single-dot charging energy of up to 800 {mu}eV. At more positive gate voltages, the capacitances between the quantum dots and their leads increase more and more, thereby diminishing the charging energy. It is shown for the optimized sample that all capacitance coefficients except the dot-lead capacitances are constant to within considerable accuracy over several Coulomb blockade oscillations. In order to measure correlated electrical transport in equilibrium, special parameter regions are examined in which the charges of both quantum dots cannot fluctuate independently of each other. An analytical formula is derived that describes the

Low temperature synthesis of silicon quantum dots with plasma chemistry control in dual frequency non-thermal plasmas.

Science.gov (United States)

Sahu, Bibhuti Bhusan; Yin, Yongyi; Han, Jeon Geon; Shiratani, Masaharu

2016-06-21

The advanced materials process by non-thermal plasmas with a high plasma density allows the synthesis of small-to-big sized Si quantum dots by combining low-temperature deposition with superior crystalline quality in the background of an amorphous hydrogenated silicon nitride matrix. Here, we make quantum dot thin films in a reactive mixture of ammonia/silane/hydrogen utilizing dual-frequency capacitively coupled plasmas with high atomic hydrogen and nitrogen radical densities. Systematic data analysis using different film and plasma characterization tools reveals that the quantum dots with different sizes exhibit size dependent film properties, which are sensitively dependent on plasma characteristics. These films exhibit intense photoluminescence in the visible range with violet to orange colors and with narrow to broad widths (∼0.3-0.9 eV). The observed luminescence behavior can come from the quantum confinement effect, quasi-direct band-to-band recombination, and variation of atomic hydrogen and nitrogen radicals in the film growth network. The high luminescence yields in the visible range of the spectrum and size-tunable low-temperature synthesis with plasma and radical control make these quantum dot films good candidates for light emitting applications.

Serum/plasma methylmercury determination by isotope dilution gas chromatography-inductively coupled plasma mass spectrometry

Energy Technology Data Exchange (ETDEWEB)

Baxter, Douglas C., E-mail: douglas.baxter@alsglobal.com [ALS Scandinavia AB, Aurorum 10, 977 75 Lulea (Sweden); Faarinen, Mikko [ALS Scandinavia AB, Aurorum 10, 977 75 Lulea (Sweden); Osterlund, Helene; Rodushkin, Ilia [ALS Scandinavia AB, Aurorum 10, 977 75 Lulea (Sweden); Division of Geosciences, Lulea University of Technology, 977 87 Lulea (Sweden); Christensen, Morten [ALS Scandinavia AB, Maskinvaegen 2, 183 53 Taeby (Sweden)

2011-09-09

Highlights: {center_dot} We determine methylmercury in serum and plasma using isotope dilution calibration. {center_dot} Separation by gas chromatography and detection by inductively coupled plasma mass spectrometry. {center_dot} Data for 50 specimens provides first reference range for methylmercury in serum. {center_dot} Serum samples shown to be stable for 11 months in refrigerator. - Abstract: A method for the determination of methylmercury in plasma and serum samples was developed. The method uses isotope dilution with {sup 198}Hg-labeled methylmercury, extraction into dichloromethane, back-extraction into water, aqueous-phase ethylation, purge and trap collection, thermal desorption, separation by gas chromatography, and mercury isotope specific detection by inductively coupled plasma mass spectrometry. By spiking 2 mL sample with 1.2 ng tracer, measurements in a concentration interval of (0.007-2.9) {mu}g L{sup -1} could be performed with uncertainty amplification factors <2. A limit of quantification of 0.03 {mu}g L{sup -1} was estimated at 10 times the standard deviation of concentrations measured in preparation blanks. Within- and between-run relative standard deviations were <10% at added concentration levels of 0.14 {mu}g L{sup -1}, 0.35 {mu}g L{sup -1} and 2.8 {mu}g L{sup -1}, with recoveries in the range 82-110%. Application of the method to 50 plasma/serum samples yielded a median (mean; range) concentration of methylmercury of 0.081 (0.091; <0.03-0.19) {mu}g L{sup -1}. This is the first time methylmercury has been directly measured in this kind of specimen, and is therefore the first estimate of a reference range.

Antenna coupling study for ICWC plasma characterization in TEXTOR

Indian Academy of Sciences (India)

2015-11-27

Home; Journals; Pramana – Journal of Physics; Volume 80; Issue 1. Antenna coupling study for ICWC plasma characterization in ... Proceedings of the International Workshop/Conference on Computational Condensed Matter Physics and Materials Science (IWCCMP-2015). Posted on November 27, 2015. Guest Editors: ...

Numerical experiments on 2D strongly coupled complex plasmas

International Nuclear Information System (INIS)

Hou Lujing; Ivlev, A V; Thomas, H M; Morfill, G E

2010-01-01

The Brownian Dynamics simulation method is briefly reviewed at first and then applied to study some non-equilibrium phenomena in strongly coupled complex plasmas, such as heat transfer processes, shock wave excitation/propagation and particle trapping, by directly mimicking the real experiments.

Slow wave antenna coupling to ion Bernstein waves for plasma heating in ICRF

International Nuclear Information System (INIS)

Sy, W.N-C.; Amano, T.; Ando, R.; Fukuyama, A.; Watari, T.

1984-10-01

The coupling of ICRF power from a slow wave antenna to a plasma with finite temperature is examined theoretically and compared to an independent computer calculation. It is shown that such antennas can be highly efficient in trasferring most of the antenna power directly to ion Bernstein waves, with only a very small fraction going into fast waves. The potentiality of this coupling scheme for plasma heating in ICRF is briefly discussed. (author)

A new interface weak-capacitance detection ASIC of capacitive liquid level sensor in the rocket

Science.gov (United States)

Yin, Liang; Qin, Yao; Liu, Xiao-Wei

2017-11-01

A new capacitive liquid level sensing interface weak-capacitance detection ASIC has been designed. This ASIC realized the detection of the output capacitance of the capacitive liquid level sensor, which converts the output capacitance of the capacitive liquid level sensor to voltage. The chip is fabricated in a standard 0.5μm CMOS process. The test results show that the linearity of capacitance detection of the ASIC is 0.05%, output noise is 3.7aF/Hz (when the capacitance which will be detected is 40 pF), the stability of capacitance detection is 7.4 × 10-5pF (1σ, 1h), the output zero position temperature coefficient is 4.5 uV/∘C. The test results prove that this interface ASIC can meet the requirement of high accuracy capacitance detection. Therefore, this interface ASIC can be applied in capacitive liquid level sensing and capacitive humidity sensing field.

Radiation from nonlinear coupling of plasma waves

International Nuclear Information System (INIS)

Fung, S.F.

1986-01-01

The author examines the generation of electromagnetic radiation by nonlinear resonant interactions of plasma waves in a cold, uniformly magnetized plasma. In particular, he considers the up-conversion of two electrostatic wave packets colliding to produce high frequency electromagnetic radiation. Efficient conversion of electrostatic to electromagnetic wave energy occurs when the pump amplitudes approach and exceed the pump depletion threshold. Results from the inverse scattering transform analysis of the three-wave interaction equations are applied. When the wave packets are initially separated, the fully nonlinear set of coupling equations, which describe the evolution of the wave packets, can be reduced to three separate eigenvalue problems; each can be considered as a scattering problem, analogous to eh Schroedinger equation. In the scattering space, the wave packet profiles act as the scattering potentials. When the wavepacket areas approach (or exceed) π/2, the wave functions are localized (bound states) and the scattering potentials are said to contain solitons. Exchange of solitons occurs during the interaction. The transfer of solitons from the pump waves to the electromagnetic wave leads to pump depletion and the production of strong radiation. The emission of radio waves is considered by the coupling of two upper-hybrid branch wave packets, and an upper-hybrid and a lower hybrid branch wave packet

AETHER: A simulation platform for inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Turkoz, Emre, E-mail: emre.turkoz@boun.edu.tr; Celik, Murat

2015-04-01

An in-house code is developed to simulate the inductively coupled plasma (ICP). The model comprises the fluid, electromagnetic and transformer submodels. Fluid equations are solved to evaluate the plasma flow parameters, including the plasma and neutral densities, ion and neutral velocities, electron flux, electron temperature, and electric potential. The model relies on the ambipolar approximation and offers the evaluation of plasma parameters without solving the sheath region. The electromagnetic model handles the calculation of the electric and magnetic fields using the magnetic vector potential. The transformer model captures the effect of the matching circuit utilized in laboratory experiments for RF power deposition. The continuity and momentum equations are solved using finite volume method. The energy, electric potential, and magnetic vector potential equations are solved using finite difference method. The resulting linear systems of equations are solved with iterative solvers including Jacobi and GMRES. The code is written using the C++ programming language, it works in parallel and has graphical user interface. The model is applied to study ICP characteristics of a plasma confined within a cylindrical chamber with dielectric walls for two different power deposition cases. The results obtained from the developed model are verified using the plasma module of COMSOL Multiphysics. The model is also applied to a plasma source configuration, and it is demonstrated that there is an overall increase in the plasma potential when current is extracted from ICP with a biased wall electrode.

Spin-orbit controlled capacitance of a polar heterostructure

Energy Technology Data Exchange (ETDEWEB)

Steffen, Kevin; Kopp, Thilo [Center for Electronic Correlations and Magnetism, EP VI, Institute of Physics, University of Augsburg, 86135 Augsburg (Germany); Loder, Florian [Center for Electronic Correlations and Magnetism, EP VI and TP III, Institute of Physics, University of Augsburg, 86135 Augsburg (Germany)

2015-07-01

Oxide heterostructures with polar films display special electronic properties, such as the electronic reconstruction at their internal interfaces with the formation of two-dimensional metallic states. Moreover, the electrical field from the polar layers is inversion-symmetry breaking and may generate a strong Rashba spin-orbit coupling (RSOC) in the interfacial electronic system. We investigate the capacitance of a heterostructure in which a strong RSOC at a metallic interface is controlled by the electric field of a surface electrode. Such a structure is for example given by a LaAlO{sub 3} film on a SrTiO{sub 3} substrate which is gated by a top electrode. We find that due to a strong RSOC the capacitance can be larger than the classical geometric value.

2-D Temperature Mapping in Fluorocarbon Plasmas

Science.gov (United States)

Steffens, Kristen L.; Sobolewski, Mark A.

2005-09-01

Two-dimensional maps of rotational temperature in CF4 plasmas were determined using planar laser-induced fluorescence measurements of CF A2Σ+ - X2Π (1,0). Rotational temperatures are expected to be in equilibrium with gas temperatures under the present conditions. Experiments were performed in a capacitively-coupled, parallel-plate reactor at pressures from 27 Pa to 107 Pa and powers of 10 W to 30 W. The effects of electrode cooling and having a wafer present were also examined. Measured temperatures ranged between 273 K±15 K and 480 K±15 K. The strong temperature gradients found in these plasmas can have serious effects on density measurements that probe a single rotational level, as well as on reaction rate constants and interpretation of density gradients.

Capacitive Feedthroughs for Medical Implants.

Science.gov (United States)

Grob, Sven; Tass, Peter A; Hauptmann, Christian

2016-01-01

Important technological advances in the last decades paved the road to a great success story for electrically stimulating medical implants, including cochlear implants or implants for deep brain stimulation. However, there are still many challenges in reducing side effects and improving functionality and comfort for the patient. Two of the main challenges are the wish for smaller implants on one hand, and the demand for more stimulation channels on the other hand. But these two aims lead to a conflict of interests. This paper presents a novel design for an electrical feedthrough, the so called capacitive feedthrough, which allows both reducing the size, and increasing the number of included channels. Capacitive feedthroughs combine the functionality of a coupling capacitor and an electrical feedthrough within one and the same structure. The paper also discusses the progress and the challenges of the first produced demonstrators. The concept bears a high potential in improving current feedthrough technology, and could be applied on all kinds of electrical medical implants, even if its implementation might be challenging.

Agglomeration of microparticles in complex plasmas

International Nuclear Information System (INIS)

Du, Cheng-Ran; Thomas, Hubertus M.; Ivlev, Alexei V.; Konopka, Uwe; Morfill, Gregor E.

2010-01-01

Agglomeration of highly charged microparticles was observed and studied in complex plasma experiments carried out in a capacitively coupled rf discharge. The agglomeration was caused by strong waves triggered in a particle cloud by decreasing neutral gas pressure. Using a high-speed camera during this unstable regime, it was possible to resolve the motion of individual microparticles and to show that the relative velocities of some particles were sufficiently high to overcome the mutual Coulomb repulsion and hence to result in agglomeration. After stabilizing the cloud again through the increase of the pressure, we were able to observe the aggregates directly with a long-distance microscope. We show that the agglomeration rate deduced from our experiments is in good agreement with theoretical estimates. In addition, we briefly discuss the mechanisms that can provide binding of highly charged microparticles in a plasma.

The Integrated Plasma Simulator: A Flexible Python Framework for Coupled Multiphysics Simulation

Energy Technology Data Exchange (ETDEWEB)

Foley, Samantha S [ORNL; Elwasif, Wael R [ORNL; Bernholdt, David E [ORNL

2011-11-01

High-fidelity coupled multiphysics simulations are an increasingly important aspect of computational science. In many domains, however, there has been very limited experience with simulations of this sort, therefore research in coupled multiphysics often requires computational frameworks with significant flexibility to respond to the changing directions of the physics and mathematics. This paper presents the Integrated Plasma Simulator (IPS), a framework designed for loosely coupled simulations of fusion plasmas. The IPS provides users with a simple component architecture into which a wide range of existing plasma physics codes can be inserted as components. Simulations can take advantage of multiple levels of parallelism supported in the IPS, and can be controlled by a high-level ``driver'' component, or by other coordination mechanisms, such as an asynchronous event service. We describe the requirements and design of the framework, and how they were implemented in the Python language. We also illustrate the flexibility of the framework by providing examples of different types of simulations that utilize various features of the IPS.

Functional speciation of metal-dissolved organic matter complexes by size exclusion chromatography coupled to inductively coupled plasma mass spectrometry and deconvolution analysis

International Nuclear Information System (INIS)

Laborda, Francisco; Ruiz-Begueria, Sergio; Bolea, Eduardo; Castillo, Juan R.

2009-01-01

High performance size exclusion chromatography coupled to inductively coupled plasma mass spectrometry (HP-SEC-ICP-MS), in combination with deconvolution analysis, has been used to obtain multielemental qualitative and quantitative information about the distributions of metal complexes with different forms of natural dissolved organic matter (DOM). High performance size exclusion chromatography coupled to inductively coupled plasma mass spectrometry chromatograms only provide continuous distributions of metals with respect to molecular masses, due to the high heterogeneity of dissolved organic matter, which consists of humic substances as well as biomolecules and other organic compounds. A functional speciation approach, based on the determination of the metals associated to different groups of homologous compounds, has been followed. Dissolved organic matter groups of homologous compounds are isolated from the aqueous samples under study and their high performance size exclusion chromatography coupled to inductively coupled plasma mass spectrometry elution profiles fitted to model Gaussian peaks, characterized by their respective retention times and peak widths. High performance size exclusion chromatography coupled to inductively coupled plasma mass spectrometry chromatograms of the samples are deconvoluted with respect to these model Gaussian peaks. This methodology has been applied to the characterization of metal-dissolved organic matter complexes in compost leachates. The most significant groups of homologous compounds involved in the complexation of metals in the compost leachates studied have been hydrophobic acids (humic and fulvic acids) and low molecular mass hydrophilic compounds. The environmental significance of these compounds is related to the higher biodegradability of the low molecular mass hydrophilic compounds and the lower mobility of humic acids. In general, the hydrophilic compounds accounted for the complexation of around 50% of the leached

Coupling between chip based isotachophoresis and multi-collector inductively coupled plasma mass spectrometry for separation and measurement of lanthanides

International Nuclear Information System (INIS)

Vio, Laurent; Cretier, Gerard; Rocca, Jean-Louis; Chartier, Frederic; Geertsen, Valerie; Gourgiotis, Alkiviadis; Isnard, Helene; Morin, Pierre

2012-01-01

This paper presents the conception and fabrication of a micro-system for lanthanides separation and its coupling with a multi-collector inductively coupled plasma mass spectrometer for isotope ratio measurements. The lanthanides separation is based on the isotachophoresis technique and the micro-system conception has been adapted in order to fit with glove box limitations in view of future spent nuclear fuels analysis. The micro-device was tested by using a mixture of standard solutions of natural elements and the separation of 13 lanthanides was successfully performed. The micro-device was then coupled to a multi-collector inductively coupled plasma mass spectrometer for the on-line measurements of Nd and Sm isotope ratios. The isotopes of Nd and Sm were acquired online in multi-collection mode after separation of the two elements with an injection amount of 5 ng. Results obtained on the Nd and Sm isotope ratio measurements on transient signals are presented and discussed. (authors)

Styrene and methyl methacrylate copolymer synthesized by RF inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Li, Z; Gillon, X; Diallo, M; Houssiau, L; Pireaux, J-J, E-mail: zhiling.li@fundp.ac.be [University of Namur (FUNDP) Research Centre in Physics of Matter and Radiation (PMR), 61, Rue de Bruxelles, 5000 Namur (Belgium)

2011-01-01

A series of random copolymers of styrene and methyl methacrylate was prepared on a silicon substrate by RF pulsed inductively coupled plasma. The plasma gas phase was investigated by optical emission spectroscopy (OES). The physico-chemical characteristics of the deposited copolymer films were analyzed by several surface techniques: X-ray photoelectron spectroscopy (XPS), Fourier-Transform infrared absorption (FT-IR), Time-of-flight secondary ion mass spectrometry (ToF-SIMS), etc. OES of the plasma and FT-IR spectra of the films are predictive: plasma emitting a higher relative benzyl radical signal results in the deposition of a more aromatic plasma polymer. The functional thin films can be deposited by selection of the co-monomers.

Opening of K+ channels by capacitive stimulation from silicon chip

Science.gov (United States)

Ulbrich, M. H.; Fromherz, P.

2005-10-01

The development of stable neuroelectronic systems requires a stimulation of nerve cells from semiconductor devices without electrochemical effects at the electrolyte/solid interface and without damage of the cell membrane. The interaction must rely on a reversible opening of voltage-gated ion channels by capacitive coupling. In a proof-of-principle experiment, we demonstrate that Kv1.3 potassium channels expressed in HEK293 cells can be opened from an electrolyte/oxide/silicon (EOS) capacitor. A sufficient strength of electrical coupling is achieved by insulating silicon with a thin film of TiO2 to achieve a high capacitance and by removing NaCl from the electrolyte to enhance the resistance of the cell-chip contact. When a decaying voltage ramp is applied to the EOS capacitor, an outward current through the attached cell membrane is observed that is specific for Kv1.3 channels. An open probability up to fifty percent is estimated by comparison with a numerical simulation of the cell-chip contact.

Lightweight linear alternators with and without capacitive tuning

Science.gov (United States)

Niedra, Janis M.

1993-06-01

Permanent magnet excited linear alternators rated tens of kW and coupled to free-piston Stirling engines are presently viewed as promising candidates for long term generation of electric power in both space and terrestrial applications. Series capacitive cancellation of the internal inductive reactance of such alternators was considered a viable way to both increase power extraction and to suppress unstable modes of the thermodynamic oscillation. Idealized toroidal and cylindrical alternator geometries are used for a comparative study of the issues of specific mass and capacitive tuning, subject to stability criteria. The analysis shows that the stator mass of an alternator designed to be capacitively tuned is always greater than the minimum achievable stator mass of an alternator designed with no capacitors, assuming equal utilization of materials ratings and the same frequency and power to a resistive load. This conclusion is not substantially altered when the usually lesser masses of the magnets and of any capacitors are added. Within the reported stability requirements and under circumstances of normal materials ratings, this study finds no clear advantage to capacitive tuning. Comparative plots of the various constituent masses are presented versus the internal power factor taken as a design degree of freedom. The explicit formulas developed for stator core, coil, capacitor, and magnet masses and for the degree of magnet utilization provide useful estimates of scaling effects.

Inductively coupled plasma--atomic emission spectroscopy: an evaluation of the use of nitrogen--argon admixtures as plasma discharge atmospheres

International Nuclear Information System (INIS)

Zalewski, J.C.

1979-01-01

The effects of the use of nitrogen in either the plasma coolant or aerosol carrier gas flows on the physical and spectrochemical properties of the inductively coupled plasma (ICP) were examined. While the plasma operated with nitrogen in the coolant flow exhibited a stability comparable to that of the argon plasma, the use of nitrogen in the aerosol carrier gas flow resulted in a plasma that was less stable. The detection limits obtained for the three plasmas exhibited a similar trend. In addition, the use of nitrogen--argon admixtures in the plasma coolant gas flow yielded an increase in both the net analyte and the background emission intensities when the corresponding argon and nitrogen--argon plasmas were operated under various conditions. Furthermore, the effect of aluminum on the Ca II (393.4 nm) spectral line was reported for the 1000/1 Al/Ca molar ratio. At an observation height of 15 mm, the signal depressions were 4 and 14% for the nitrogen--argon and the argon plasmas, respectively. The above experimental evidence suggested that the operation of the ICP with an Ar--N 2 coolant gas might be hotter than the argon plasma currently in use in this laboratory. The demountable plasma torch designed in collaboration with K. Olson yielded detection limits for 15 elements and 19 spectral lines that were approximately within a factor of two of those obtained with the torch of fused quartz design. The design also appeared to offer a more readily initiated plasma discharge. The experimental evidence presented supports the utilization of nitrogen--argon admixtures in the plasma coolant gas flow as alternate discharge atmospheres for inductively coupled plasma--atomic emission spectroscopy. In contrast, the experimental evidence shows that there is a deterioration in both physical and spectrochemical properties of plasmas operated with a nitrogen aerosol carrier gas

Interstellar turbulence model : A self-consistent coupling of plasma and neutral fluids

International Nuclear Information System (INIS)

Shaikh, Dastgeer; Zank, Gary P.; Pogorelov, Nikolai

2006-01-01

We present results of a preliminary investigation of interstellar turbulence based on a self-consistent two-dimensional fluid simulation model. Our model describes a partially ionized magnetofluid interstellar medium (ISM) that couples a neutral hydrogen fluid to a plasma through charge exchange interactions and assumes that the ISM turbulent correlation scales are much bigger than the shock characteristic length-scales, but smaller than the charge exchange mean free path length-scales. The shocks have no influence on the ISM turbulent fluctuations. We find that nonlinear interactions in coupled plasma-neutral ISM turbulence are influenced substantially by charge exchange processes

On plasma coupling and turbulence effects in low velocity stopping

Energy Technology Data Exchange (ETDEWEB)

Kurilenkov, Yu K [Unified Institute for High Temperatures of Russian Academy of Sciences, 13/19 Izhorskaya Str., 125412 Moscow (Russian Federation); Maynard, G [Laboratoire de Physique des Gaz et des Plasmas, UMR-8578, Bat. 210, Universite Paris XI, F-91405 Orsay (France); Barriga-Carrasco, M D [Laboratoire de Physique des Gaz et des Plasmas, UMR-8578, Bat. 210, Universite Paris XI, F-91405 Orsay (France); Valuev, A A [Unified Institute for High Temperatures of Russian Academy of Sciences, 13/19 Izhorskaya Str., 125412 Moscow (Russian Federation)

2006-04-28

The problem of stopping power (SP) for projectile ions is analysed in terms of the dielectric function and effective collision frequency for moderately dense and strongly coupled plasmas (SCP). We consider several issues regarding the calculation of stopping power for correlated ensembles of particles and oscillators. In particular, effects of group (few particle) modes, transition from positive to negative dispersion and excitation of collective modes up to suprathermal level at plasma targets are addressed. Linear SP of dense suprathermal (nonlinear) plasma targets at different levels of target plasma turbulence is estimated. The force of suprathermal plasma oscillations on the projectile ions is mostly in the nature of increased frictional drag. The results obtained show the possibility of increasing low velocity stopping (up to 'turbulent' values) in comparison with losses in equilibrium dense plasma targets. Experimental conditions to create specific turbulent targets as well as some connection between stopping phenomena and SCP transport properties are discussed briefly.

On plasma coupling and turbulence effects in low velocity stopping

International Nuclear Information System (INIS)

Kurilenkov, Yu K; Maynard, G; Barriga-Carrasco, M D; Valuev, A A

2006-01-01

The problem of stopping power (SP) for projectile ions is analysed in terms of the dielectric function and effective collision frequency for moderately dense and strongly coupled plasmas (SCP). We consider several issues regarding the calculation of stopping power for correlated ensembles of particles and oscillators. In particular, effects of group (few particle) modes, transition from positive to negative dispersion and excitation of collective modes up to suprathermal level at plasma targets are addressed. Linear SP of dense suprathermal (nonlinear) plasma targets at different levels of target plasma turbulence is estimated. The force of suprathermal plasma oscillations on the projectile ions is mostly in the nature of increased frictional drag. The results obtained show the possibility of increasing low velocity stopping (up to 'turbulent' values) in comparison with losses in equilibrium dense plasma targets. Experimental conditions to create specific turbulent targets as well as some connection between stopping phenomena and SCP transport properties are discussed briefly

HAIFA: A modular, fiber-optic coupled, spectroscopic diagnostic for plasmas

International Nuclear Information System (INIS)

Ramsey, A.T.; Turner, S.L.

1987-01-01

HAIFA is a modular, multichannel, fiber optically coupled spectroscopy diagnostic for tokamak plasmas. It operates in the visible, measuring H/sub α/ radiation, the visible continuum from thermal bremsstrahlung, and selected impurity lines. HAIFA is characterized by high modularity and flexibility, good radiation resistance, high noise immunity, and low cost. Details of design, construction, and calibration are given. The analysis of visible bremsstrahlung radiation measurements to deduce the effective ionic charge in a plasma is discussed

Development of a versatile readout and test system and characterization of a capacitively coupled active pixel sensor

Energy Technology Data Exchange (ETDEWEB)

Janssen, Jens; Gonella, Laura; Hemperek, Tomasz; Hirono, Toko; Huegging, Fabian; Krueger, Hans; Wermes, Norbert [Institute of Physics, University of Bonn, Bonn (Germany); Peric, Ivan [Karlsruher Institut fuer Technologie, Karlsruhe (Germany); Collaboration: ATLAS-Collaboration

2015-07-01

With the availability of high voltage and high resistivity CMOS processes, active pixel sensors are becoming increasingly interesting for radiation detection in high energy physics experiments. Although the pixel signal-to-noise ratio and the sensor radiation tolerance were improved, active pixel sensors cannot yet compete with state-of-the-art hybrid pixel detector in a high radiation environment. Hence, active pixel sensors are possible candidates for the outer tracking detector in HEP experiments where production cost plays a role. The investigation of numerous prototyping steps and different technologies is still ongoing and requires a versatile test and readout system, which will be presented in this talk. A capacitively coupled active pixel sensor fabricated in AMS 180 nm high voltage CMOS process is investigated. The sensor is designed to be glued to existing front-end pixel readout chips. Results from the characterization are presented in this talk.

A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance

Directory of Open Access Journals (Sweden)

Lun Kong

2013-02-01

Full Text Available This paper presents a novel micro dynamically tuned gyroscope (MDTG with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values.

Non linear excitation of waves at the vicinity of plasma resonance

International Nuclear Information System (INIS)

Chiron, Arnaud

1992-01-01

This research thesis reports the study of the non linear evolution of ionic acoustic and plasma waves excited by resonant absorption of an electromagnetic wave, in a non collisional plasma, without external magnetic field, and with a parabolic density profile. The plasma resonance occurs about the density profile peak. The numerical resolution of the Zakharov equation system is performed to describe the coupled evolution of the plasma wave electric field envelope, and low frequency density disturbances. Experiments performed in the microwave domain show the existence of a new effect related to the modification of the electromagnetic wave propagation under the influence of plasma density disturbances created by the ponderomotive force. This effect which results in a collisional relaxation of plasma waves trapped in the cavity formed at resonance, cannot be taken into account by a numerical simulation using a capacitive pump field. Measurements showed that plasma waves were trapped and relaxing in a cavity with characteristic dimensions of some thousands of Debye lengths, and that the plasma wave in the cavity was stationary. A new turbulence regime is thus highlighted [fr

Nonlinear dynamics of capacitive charging and desalination by porous electrodes

Science.gov (United States)

Biesheuvel, P. M.; Bazant, M. Z.

2010-03-01

The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by supercapacitors, water desalination and purification by capacitive deionization, and capacitive extraction of renewable energy from a salinity difference. Here, we present a unified mean-field theory for capacitive charging and desalination by ideally polarizable porous electrodes (without Faradaic reactions or specific adsorption of ions) valid in the limit of thin double layers (compared to typical pore dimensions). We illustrate the theory for the case of a dilute, symmetric, binary electrolyte using the Gouy-Chapman-Stern (GCS) model of the double layer, for which simple formulae are available for salt adsorption and capacitive charging of the diffuse part of the double layer. We solve the full GCS mean-field theory numerically for realistic parameters in capacitive deionization, and we derive reduced models for two limiting regimes with different time scales: (i) in the “supercapacitor regime” of small voltages and/or early times, the porous electrode acts like a transmission line, governed by a linear diffusion equation for the electrostatic potential, scaled to the RC time of a single pore, and (ii) in the “desalination regime” of large voltages and long times, the porous electrode slowly absorbs counterions, governed by coupled, nonlinear diffusion equations for the pore-averaged potential and salt concentration.

Inductively coupled plasma mass spectrometry (ICP-MS)

International Nuclear Information System (INIS)

Shimamura, Tadashi

1997-01-01

The period of investigation for the previous general remarks on the progress of ICP-MS was from January, 1991 to September, 1993. In the investigation of this time, for the object of the Chemical Abstracts from January, 1994 to September, 1996, retrieval was carried out by using the STN International. As the key words, ICP-MS, Inductively Coupled Plasma Mass Spectrometry or Inductively Coupled Plasma Mass Spectrometer was used. The number of hit was 373 in 1994, 462 in 1995, and 356 as of September, 1996, 1191 in total. The cumulative number of the papers from 1980 to 1996 is shown. It is known how rapidly the ICP-MS has pervaded as the means of analysis. In order to cope with the enormous number of papers, this time, it was decided to do the review by limiting to the papers which were published in the main journals deeply related to analytical chemistry. As to the tendency in the last three years, it is summarized as how to overcome the spectrum interference and matrix effect in the ICP-MS and the trend of using the ICP-MS as the high sensitivity detector for separation techniques. The technical basic research of the ICP-MS on spectrum interference, sample introduction method and others and the analysis of living body samples are reported. (K.I.)

Energy exchange in strongly coupled plasmas with electron drift

International Nuclear Information System (INIS)

Akbari-Moghanjoughi, M.; Ghorbanalilu, M.

2015-01-01

In this paper, the generalized viscoelastic collisional quantum hydrodynamic model is employed in order to investigate the linear dielectric response of a quantum plasma in the presence of strong electron-beam plasma interactions. The generalized Chandrasekhar's relativistic degeneracy pressure together with the electron-exchange and Coulomb interaction effects are taken into account in order to extend current research to a wide range of plasma number density relevant to big planetary cores and astrophysical compact objects. The previously calculated shear viscosity and the electron-ion collision frequencies are used for strongly coupled ion fluid. The effect of the electron-beam velocity on complex linear dielectric function is found to be profound. This effect is clearly interpreted in terms of the wave-particle interactions and their energy-exchange according to the sign of the imaginary dielectric function, which is closely related to the wave attenuation coefficient in plasmas. Such kinetic effect is also shown to be in close connection with the stopping power of a charged-particle beam in a quantum plasma. The effect of many independent plasma parameters, such as the ion charge-state, electron beam-velocity, and relativistic degeneracy, is shown to be significant on the growing/damping of plasma instability or energy loss/gain of the electron-beam

Effect of vapor plasma on the coupling of laser radiation with aluminum targets

Energy Technology Data Exchange (ETDEWEB)

Shui, V H; Kivel, B; Weyl, G M

1978-12-01

The effect of vapor plasma on thermal and impulse coupling of laser radiation with aluminum targets is studied to understand and explain experimental data showing anomalously high coupling to 10.6-micron laser radiation. Heating of vapor by inverse bremsstrahlung absorption of laser radiation, subsequent reradiation in the uv and deep uv by ionized species, and vapor layer growth are modeled. A computer code has been developed to solve the governing equations. Major conclusions include the following: (1) vapor plasma radiative transport can be an important mechanism for laser/target coupling, (2) aluminum vapor (density times thickness) approximately equal to 10 to the 17th power/sq cm (corresponding to about 0.01 micron of target material) can result in thermal coupling coefficients of 20% or more, and (3) too much vapor reduces the net flux at the target.

Laser pulse propagation and enhanced energy coupling to fast electrons in dense plasma gradients

International Nuclear Information System (INIS)

Gray, R J; Carroll, D C; Yuan, X H; Brenner, C M; Coury, M; Quinn, M N; Tresca, O; McKenna, P; Burza, M; Wahlström, C-G; Lancaster, K L; Neely, D; Lin, X X; Li, Y T

2014-01-01

Laser energy absorption to fast electrons during the interaction of an ultra-intense (10 20 W cm −2 ), picosecond laser pulse with a solid is investigated, experimentally and numerically, as a function of the plasma density scale length at the irradiated surface. It is shown that there is an optimum density gradient for efficient energy coupling to electrons and that this arises due to strong self-focusing and channeling driving energy absorption over an extended length in the preformed plasma. At longer density gradients the laser filaments, resulting in significantly lower overall energy coupling. As the scale length is further increased, a transition to a second laser energy absorption process is observed experimentally via multiple diagnostics. The results demonstrate that it is possible to significantly enhance laser energy absorption and coupling to fast electrons by dynamically controlling the plasma density gradient. (paper)

Plasma polymerization at different positions in an asymmetric ethylene discharge

International Nuclear Information System (INIS)

Trieschmann, Jan; Hegemann, Dirk

2011-01-01

The characteristics of plasma polymerization are investigated in an asymmetric, capacitively coupled plasma discharge. Here, the deposition in different plasma zones, i.e. on the driven electrode, within the plasma bulk and the plasma sheath as well as approximately at the plasma-sheath edge, is investigated. Principal expectations are perfectly met, though new interesting dependences of the obtained a-C : H coatings with respect to film properties and deposition rates are also found. That is, the deposition rates as measured on thin, small glass slides placed directly on the electrode are considerably higher than everywhere else in the plasma, yet only single-sided. In contrast, the deposition rates on the samples within the plasma are lowered depending on the exact placement, while a double-sided coating is obtained. Furthermore, film properties, such as the film density, are highly dependent on the sample placement in the plasma, which can even be higher under floating conditions. With simple physical arguments we are able to show the relations between the deposition rate and the energy input into the plasma as well as between the energy density during film growth and the film density itself.

Characterization of plasma etching damage on p-type GaN using Schottky diodes

International Nuclear Information System (INIS)

Kato, M.; Mikamo, K.; Ichimura, M.; Kanechika, M.; Ishiguro, O.; Kachi, T.

2008-01-01

The plasma etching damage in p-type GaN has been characterized. From current-voltage and capacitance-voltage characteristics of Schottky diodes, it was revealed that inductively coupled plasma (ICP) etching causes an increase in series resistance of the Schottky diodes and compensation of acceptors in p-type GaN. We investigated deep levels near the valence band of p-type GaN using current deep level transient spectroscopy (DLTS), and no deep level originating from the ICP etching damage was observed. On the other hand, by capacitance DLTS measurements for n-type GaN, we observed an increase in concentration of a donor-type defect with an activation energy of 0.25 eV after the ICP etching. The origin of this defect would be due to nitrogen vacancies. We also observed this defect by photocapacitance measurements for ICP-etched p-type GaN. For both n- and p-type GaN, we found that the low bias power ICP etching is effective to reduce the concentration of this defect introduced by the high bias power ICP etching

Low-pressure water-cooled inductively coupled plasma torch

Science.gov (United States)

Seliskar, Carl J.; Warner, David K.

1988-12-27

An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an r.f. induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the r.f. heating coil is disposed around the outer tube above and adjacent to the water inlet.

A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas

International Nuclear Information System (INIS)

Munafò, A.; Alfuhaid, S. A.; Panesi, M.; Cambier, J.-L.

2015-01-01

The objective of the present work is the development of a tightly coupled magneto-hydrodynamic model for inductively coupled radio-frequency plasmas. Non Local Thermodynamic Equilibrium (NLTE) effects are described based on a hybrid State-to-State approach. A multi-temperature formulation is used to account for thermal non-equilibrium between translation of heavy-particles and vibration of molecules. Excited electronic states of atoms are instead treated as separate pseudo-species, allowing for non-Boltzmann distributions of their populations. Free-electrons are assumed Maxwellian at their own temperature. The governing equations for the electro-magnetic field and the gas properties (e.g., chemical composition and temperatures) are written as a coupled system of time-dependent conservation laws. Steady-state solutions are obtained by means of an implicit Finite Volume method. The results obtained in both LTE and NLTE conditions over a broad spectrum of operating conditions demonstrate the robustness of the proposed coupled numerical method. The analysis of chemical composition and temperature distributions along the torch radius shows that: (i) the use of the LTE assumption may lead to an inaccurate prediction of the thermo-chemical state of the gas, and (ii) non-equilibrium phenomena play a significant role close the walls, due to the combined effects of Ohmic heating and macroscopic gradients

Coupled two-dimensional edge-plasma and neutral gas modelling of the DIII-D scrape-off-layer

International Nuclear Information System (INIS)

Maingi, R.; Gilligan, J.; Hankins, O.; Rensink, M.; Owen, L.; Klepper, C.; Mioduszewski, P.

1992-01-01

This paper reports that in order to do consistent scrape-off-layer plasma and neutral transport calculations, the 2-D fluid code, B2 has been externally coupled to the neutral transport code, DEGAS, for Dlll-D. The coupling procedure is similar to recent simulations done for TFTR, Tore Supra, and ClT. An averaged source approach is utilized to allow convergence between the two codes. Initial comparison of plasma quantities between the coupled code set and the B2 code alone shows that a colder, denser plasma may exist at the divertor targets than predicted by the B2 code with its internal recycling model

Titanium oxidation by rf inductively coupled plasma

International Nuclear Information System (INIS)

Valencia-Alvarado, R; López-Callejas, R; Barocio, S R; Mercado-Cabrera, A; Peña-Eguiluz, R; Muñoz-Castro, A E; Rodríguez-Méndez, B G; De la Piedad-Beneitez, A; De la Rosa-Vázquez, J M

2014-01-01

The development of titanium dioxide (TiO 2 ) films in the rutile and anatase phases is reported. The films have been obtained from an implantation/diffusion and sputtering process of commercially pure titanium targets, carried out in up to 500 W plasmas. The experimental outcome is of particular interest, in the case of anatase, for atmospheric pollution degradation by photocatalysis and, as to the rutile phase, for the production of biomaterials required by prosthesis and implants. The reactor employed consists in a cylindrical pyrex-like glass vessel inductively coupled to a 13.56 MHz RF source. The process takes place at a 5×10 −2 mbar pressure with the target samples being biased from 0 to -3000 V DC. The anatase phase films were obtained from sputtering the titanium targets over glass and silicon electrically floated substrates placed 2 cm away from the target. The rutile phase was obtained by implantation/diffusion on targets at about 700 °C. The plasma was developed from a 4:1 argon/oxygen mixture for ∼5 hour processing periods. The target temperature was controlled by means of the bias voltage and the plasma source power. The obtained anatase phases did not require annealing after the plasma oxidation process. The characterization of the film samples was conducted by means of x-ray diffraction, scanning electron microscopy, x-ray photoelectron spectroscopy and Raman spectroscopy

DNA Nucleotides Detection via capacitance properties of Graphene

Science.gov (United States)

Khadempar, Nahid; Berahman, Masoud; Yazdanpanah, Arash

2016-05-01

In the present paper a new method is suggested to detect the DNA nucleotides on a first-principles calculation of the electronic features of DNA bases which chemisorbed to a graphene sheet placed between two gold electrodes in a contact-channel-contact system. The capacitance properties of graphene in the channel are surveyed using non-equilibrium Green's function coupled with the Density Functional Theory. Thus, the capacitance properties of graphene are theoretically investigated in a biological environment, and, using a novel method, the effect of the chemisorbed DNA nucleotides on electrical charges on the surface of graphene is deciphered. Several parameters in this method are also extracted including Electrostatic energy, Induced density, induced electrostatic potential, Electron difference potential and Electron difference density. The qualitative and quantitative differences among these parameters can be used to identify DNA nucleotides. Some of the advantages of this approach include its ease and high accuracy. What distinguishes the current research is that it is the first experiment to investigate the capacitance properties of gaphene changes in the biological environment and the effect of chemisorbed DNA nucleotides on the surface of graphene on the charge.

Screening of self-assembled monolayer for aflatoxin B1 detection using immune-capacitive sensor

Directory of Open Access Journals (Sweden)

Alvaro V. Gutierrez R

2015-12-01

Full Text Available A capacitive biosensor was used for detection of aflatoxin B1. Two different methods for cleaning gold electrodes were evaluated using cyclic voltammetry in the presence of ferricyanide as redox couple. The methods involve use of a sequence of cleaning steps avoiding the use of Piranha solution and plasma cleaner. Anti-aflatoxin B1 was immobilized on self-assembled monolayers (SAM. The immune-capacitive biosensor is able to detect aflatoxin B1 concentrations in a linear range of 3.2 × 10−12 M to 3.2 × 10−9 M when thiourea was used to form the SAM; 3.2 × 10−9 M to 3.2 × 10−7 M when thioctic acid was used. When the gold surface was isolated with tyramine-electropolymerization linear ranges of 3.2 × 10−13 M to 3.2 × 10−7 M and 3.2 × 10−9 M to 3.2 × 10−7 M where obtained, respectively. The results obtained show the difference in linear range, limit of detection, and limit of quantification when different self-assembled monolayers are used for aflatoxin B1 detection.

Ratio of bulk to shear viscosity in a quasigluon plasma: from weak to strong coupling

CERN Document Server

Bluhm, M; Redlich, K

2012-01-01

The ratio of bulk to shear viscosity is expected to exhibit a different behaviour in weakly and in strongly coupled systems. This can be expressed by the dependence of the ratio on the squared sound velocity. In the high temperature QCD plasma at small running coupling, the viscosity ratio is uniquely determined by a quadratic dependence on the conformality measure, whereas in certain strongly coupled and nearly conformal theories this dependence is linear. Employing an effective kinetic theory of quasiparticle excitations with medium-modified dispersion relation, we analyze the ratio of bulk to shear viscosity of the gluon plasma. We show that in this approach the viscosity ratio comprises both dependencies found by means of weak coupling perturbative and strong coupling holographic techniques.

Investigation of coupling between chemistry and discharge dynamics in radio frequency hydrogen plasmas in the Torr regime

International Nuclear Information System (INIS)

Kalache, B; Novikova, T; Morral, A Fontcuberta i; Cabarrocas, P Roca i; Morscheidt, W; Hassouni, K

2004-01-01

We present the results of a study of a capacitively coupled hydrogen discharge by means of a one-dimensional numerical fluid model and experiments. The model includes a detailed description of the gas-phase chemistry taking into account the production of H - ions by dissociative attachment of H 2 vibrational levels. The population of these levels is described by a Boltzmann vibrational distribution function characterized by a vibrational temperature T V . The effect of the dissociative-attachment reaction on the discharge dynamics was investigated by varying the vibrational temperature, which was used as a model input parameter. Increasing the vibrational temperature from 1000 to 6000 K affects both the chemistry and the dynamics of the electrical discharge. Because of dissociative attachment, the H - ion density increases by seven orders of magnitude and the H - ion density to electron density ratio varies from 10 -7 to 6, while the positive ion density increases slightly. As a consequence, the atomic hydrogen density increases by a factor of three, and the sheath voltage drops from 95 to 75 V. Therefore, clear evidence of a strong coupling between chemistry and electrical dynamics through the production of H - ions is demonstrated. Moreover, satisfactory agreement between computed and measured values of atomic hydrogen and H - ion densities gives further support to the requirement of a detailed description of the hydrogen vibrational kinetics for capacitively coupled radio frequency discharge models in the Torr regime

Study of plasma parameters influencing fractionation in laser ablation-inductively coupled plasma-mass spectrometry

Science.gov (United States)

Gäckle, M.; Merten, D.

2010-12-01

Methods permitting to test the influence of the matrix as well as of its local and temporal distribution on the plasma conditions in laser ablation-inductively coupled plasma mass spectrometry (LA-ICP-MS) are developed. For this purpose, the MS interface is used as plasma probe allowing to investigate the average plasma condition within the ICP zone observed in terms of temporal and spatial distribution of the matrix. Inserted matrix particles, particularly when being atomized and ionized, can cause considerable changes in both electron density and plasma temperature thus influencing the ionization equilibrium of the individual analytes. In this context, the plasma probe covers a region of the plasma for which no local thermodynamic equilibrium can be assumed. The differences in temperature, identified within the region of the plasma observed, amounted up to 3000 K. While in the central region conditions were detected that would not allow efficient atomization and ionization of the matrix, these conditions improve considerably towards the margin of the area observed. Depending on the nature as well as on the temporally and locally variable density of the matrix, this can lead to varying intensity ratios of the analytes and explain fractionation effects. By means of a derived equation it is shown that the deviation of the intensity ratio from the concentration ratio turns out to be more serious the higher the difference of the ionization potential of the analytes observed, the lower the plasma temperature and the higher the matrix concentration within the area observed.

Collaborative project: research on strongly coupled plasmas. Final technical report for period July 15, 1998--July 14, 2002

International Nuclear Information System (INIS)

Golden, Kenneth I.

2002-01-01

The main research accomplishments/findings of the project were the following: (1) Publication of an in-depth review article in Physics of Plasmas on the quasilocalized charge approximation (QLCA) in strongly coupled plasma physics and its application to a variety of Coulomb systems: the model one-component plasma in three and two dimensions, binary ionic mixtures, charged particle bilayers, and laboratory dusty plasmas. (2) In the strongly coupled Coulomb liquid phase, the physical basis of the QLCA, namely, the caging of particles trapped in slowly fluctuating local potential minima, is supported by molecular dynamics simulation of the classical three-dimensional one-component plasma. (3) The QLCA theory, when applied to the analysis of the collective modes in strongly coupled charged particle bilayers, predicts the existence of a remarkable long-wavelength energy gap in the out-of-phase excitation spectrum. More recent theoretical calculations based on the three principal frequency-moment sum rules reveal that the gap persists for arbitrary coupling strengths and over the entire classical to quantum domain all the way down to zero temperature. The existence of the energy gap has now been confirmed in a molecular dynamics simulation of the charged particle bilayer. (4) New compressibility and third-frequency-moment sum rules for multilayer plasmas were formulated and applied to the analysis of the dynamical structure function of charged particle bilayers and superlattices. (5) An equivalent of the Debye-Huckel weak coupling equilibrium theory for classical charged particle bilayer and superlattice plasmas was formulated. (6) The quadratic fluctuation-dissipation theorem (QFDT) for layered classical plasmas was formulated. (7) The QFDT was applied to a powerful kinetic theory-based description of the density-density response function and long-wavelength plasma mode behavior in strongly coupled two-dimensional Coulomb fluids in the weakly degenerate quantum domain

Resonances and surface waves in bounded plasmas

International Nuclear Information System (INIS)

Bowers, K.J.; Qui, D.W.; Smith, H.B.; Birdsall, C.K.

1999-01-01

Surface waves provide a promising means of creating large, area plasmas. These waves can uniformly distribute the excitation energy and while presenting a small resistance and zero reactance to the driving source. Experimentally and in the simulations, the electron temperature is low (like 1--3 eV) as is the plasma potential (like 10 Te). The use of surface waves experimentally, and now industrially, to sustain large area plasma sources with device size is comparable to free space wavelength have motivated the authors to refine the theories of [1] and [2] to be fully electromagnetic. The wave dispersion predicted by the electromagnetic theory differs from the predictions of the prior theories and the results illuminate limitations of the electrostatic model. The use of surface waves have also motivated them to explore the mechanisms by which surface waves heat the plasma. In the 1d electrostatic simulations high velocity electron bunches are formed in the sheaths and are alternatively accelerated from each sheath into the bulk plasma each RF cycle. They speculate similar mechanisms provide the ionization in surface wave discharges. They also see in these simulations the plasma makes an abrupt transition from capacitively coupled to resistively coupled and the series resonance locks onto the drive frequency; these abrupt transitions resemble mode-jumping seen experimentally in large area sources. Furthermore, the density profile of the plasma tracks the drive frequency while in the resonant mode giving a new mechanism by which the plasma parameters can be controlled. They are currently investigating the effect of the driving electrode shape has on these resonances and conducting 2d simulations of a large area surface wave source to explore the ignition of surface wave devices and how the plasma fills in the device

Gluon Bremsstrahlung in Weakly-Coupled Plasmas

International Nuclear Information System (INIS)

Arnold, Peter

2009-01-01

I report on some theoretical progress concerning the calculation of gluon bremsstrahlung for very high energy particles crossing a weakly-coupled quark-gluon plasma. (i) I advertise that two of the several formalisms used to study this problem, the BDMPS-Zakharov formalism and the AMY formalism (the latter used only for infinite, uniform media), can be made equivalent when appropriately formulated. (ii) A standard technique to simplify calculations is to expand in inverse powers of logarithms ln(E/T). I give an example where such expansions are found to work well for ω/T≥10 where ω is the bremsstrahlung gluon energy. (iii) Finally, I report on perturbative calculations of q.

Radionuclide determination in environmental samples by inductively coupled plasma mass spectrometry

International Nuclear Information System (INIS)

Lariviere, Dominic; Taylor, Vivien F.; Evans, R. Douglas; Cornett, R. Jack

2006-01-01

The determination of naturally occurring and anthropogenic radionuclides in the environment by inductively coupled plasma mass spectrometry has gained recognition over the last fifteen years, relative to radiometric techniques, as the result of improvement in instrumental performance, sample introduction equipment, and sample preparation. With the increase in instrumental sensitivity, it is now possible to measure ultratrace levels (fg range) of many radioisotopes, including those with half-lives between 1 and 1000 years, without requiring very complex sample pre-concentration schemes. However, the identification and quantification of radioisotopes in environmental matrices is still hampered by a variety of analytical issues such as spectral (both atomic and molecular ions) and non-spectral (matrix effect) interferences and instrumental limitations (e.g., abundance sensitivity). The scope of this review is to highlight recent analytical progress and issues associated with the determination of radionuclides by inductively coupled plasma mass spectrometry. The impact of interferences, instrumental limitations (e.g., degree of ionization, abundance sensitivity, detection limits) and low sample-to-plasma transfer efficiency on the measurement of radionuclides by inductively coupled plasma mass spectrometry will be described. Solutions that overcome these issues will be discussed, highlighting their pros and cons and assessing their impact on the measurement of environmental radioactivity. Among the solutions proposed, mass and chemical resolution through the use of sector-field instruments and chemical reactions/collisions in a pressurized cell, respectively, will be described. Other methods, such as unique sample introduction equipment (e.g., laser ablation, electrothermal vaporisation, high efficiency nebulization) and instrumental modifications/optimizations (e.g., instrumental vacuum, radiofrequency power, guard electrode) that improve sensitivity and performance

Heart Rate Variability Monitoring during Sleep Based on Capacitively Coupled Textile Electrodes on a Bed

Directory of Open Access Journals (Sweden)

Hong Ji Lee

2015-05-01

Full Text Available In this study, we developed and tested a capacitively coupled electrocardiogram (ECG measurement system using conductive textiles on a bed, for long-term healthcare monitoring. The system, which was designed to measure ECG in a bed with no constraints of sleep position and posture, included a foam layer to increase the contact region with the curvature of the body and a cover to ensure durability and easy installation. Nine healthy subjects participated in the experiment during polysomnography (PSG, and the heart rate (HR coverage and heart rate variability (HRV parameters were analyzed to evaluate the system. The experimental results showed that the mean of R-peak coverage was 98.0% (95.5%–99.7%, and the normalized errors of HRV time and spectral measures between the Ag/AgCl system and our system ranged from 0.15% to 4.20%. The root mean square errors for inter-beat (RR intervals and HR were 1.36 ms and 0.09 bpm, respectively. We also showed the potential of our developed system for rapid eye movement (REM sleep and wake detection as well as for recording of abnormal states.

High density plasma via hole etching in SiC

International Nuclear Information System (INIS)

Cho, H.; Lee, K.P.; Leerungnawarat, P.; Chu, S.N.G.; Ren, F.; Pearton, S.J.; Zetterling, C.-M.

2001-01-01

Throughwafer vias up to 100 μm deep were formed in 4H-SiC substrates by inductively coupled plasma etching with SF 6 /O 2 at a controlled rate of ∼0.6 μm min-1 and use of Al masks. Selectivities of >50 for SiC over Al were achieved. Electrical (capacitance-voltage: current-voltage) and chemical (Auger electron spectroscopy) analysis techniques showed that the etching produced only minor changes in reverse breakdown voltage, Schottky barrier height, and near surface stoichiometry of the SiC and had high selectivity over common frontside metallization. The SiC etch rate was a strong function of the incident ion energy during plasma exposure. This process is attractive for power SiC transistors intended for high current, high temperature applications and also for SiC micromachining

Harmonic emission due to the nonlinear coupling of a Gaussian laser and a plasma wave

Energy Technology Data Exchange (ETDEWEB)

Pathak, R; Jain, R K [Department of Mathematics, SSL Jain College, Vidisha, MP, 464001 (India); Parashar, J [Department of Physics, Samrat Ashok Technological Institute, Vidisha, MP, 464001 (India)

2010-04-15

A high-power Gaussian laser propagating through a plasma couples with a large-amplitude plasma wave and undergoes scattering to produce harmonics. The process is sensitive to the phase matching angle between the laser and plasma wave numbers and the plasma wave frequency. For larger harmonics, the phase matching angle is high. The efficiency of the process is comparatively high at higher plasma wave frequencies.

Inductively Coupled Plasma-Induced Etch Damage of GaN p-n Junctions

International Nuclear Information System (INIS)

SHUL, RANDY J.; ZHANG, LEI; BACA, ALBERT G.; WILLISON, CHRISTI LEE; HAN, JUNG; PEARTON, S.J.; REN, F.

1999-01-01

Plasma-induced etch damage can degrade the electrical and optical performance of III-V nitride electronic and photonic devices. We have investigated the etch-induced damage of an Inductively Coupled Plasma (ICP) etch system on the electrical performance of mesa-isolated GaN pn-junction diodes. GaN p-i-n mesa diodes were formed by Cl 2 /BCl 3 /Ar ICP etching under different plasma conditions. The reverse leakage current in the mesa diodes showed a strong relationship to chamber pressure, ion energy, and plasma flux. Plasma induced damage was minimized at moderate flux conditions (≤ 500 W), pressures ≥2 mTorr, and at ion energies below approximately -275 V

Capacitive mixing power production from salinity gradient energy enhanced through exoelectrogen-generated ionic currents

KAUST Repository

Hatzell, Marta C.; Cusick, Roland D.; Logan, Bruce E.

2014-01-01

Several approaches to generate electrical power directly from salinity gradient energy using capacitive electrodes have recently been developed, but power densities have remained low. By immersing the capacitive electrodes in ionic fields generated by exoelectrogenic microorganisms in bioelectrochemical reactors, we found that energy capture using synthetic river and seawater could be increased ∼65 times, and power generation ∼46 times. Favorable electrochemical reactions due to microbial oxidation of organic matter, coupled to oxygen reduction at the cathode, created an ionic flow field that enabled more effective passive charging of the capacitive electrodes and higher energy capture. This ionic-based approach is not limited to the use of river water-seawater solutions. It can also be applied in industrial settings, as demonstrated using thermolytic solutions that can be used to capture waste heat energy as salinity gradient energy. Forced charging of the capacitive electrodes, using energy generated by the bioelectrochemical system and a thermolytic solution, further increased the maximum power density to 7 W m -2 (capacitive electrode). © 2014 The Royal Society of Chemistry.

Simulation and optimization of a dc SQUID with finite capacitance

Energy Technology Data Exchange (ETDEWEB)

de Waal, V.J.; Schrijner, P.; Llurba, R.

1984-02-01

This paper deals with the calculations of the noise an the optimization of the energy resolution of a dc SQUID with finite junction capacitance. Up to now noise calculations of dc SQUIDs were performed using a model without parasitic capacitances across the Josephson junctions. As the capacitances limit the performance of the SQUID, for a good optimization one must take them into account. The model consists of two coupled nonlinear second-order differential equations. The equations are very suitable for simulation with an analog circuit. We implemented the model on a hybrid computer. The noise spectrum from the model is calculated with a fast Fourier transform. A calculation of the energy resolution for one set of parameters takes about 6 min of computer time. Detailed results of the optimization are given for products of inductance and temperature of LT = 1.2 and 5 nHK. Within a range of ..beta.. and ..beta../sub c/ between 1 and 2, which is optimum, the energy resolution is nearly independent of these variables. In this region the energy resolution is near the value calculated without parasitic capacitances. Results of the optimized energy resolution are given as a function of LT between 1.2 and 10 nHK.

Simulation and optimization of a dc SQUID with finite capacitance

Science.gov (United States)

de Waal, V. J.; Schrijner, P.; Llurba, R.

1984-02-01

This paper deals with the calculations of the noise and the optimization of the energy resolution of a dc SQUID with finite junction capacitance. Up to now noise calculations of dc SQUIDs were performed using a model without parasitic capacitances across the Josephson junctions. As the capacitances limit the performance of the SQUID, for a good optimization one must take them into account. The model consists of two coupled nonlinear second-order differential equations. The equations are very suitable for simulation with an analog circuit. We implemented the model on a hybrid computer. The noise spectrum from the model is calculated with a fast Fourier transform. A calculation of the energy resolution for one set of parameters takes about 6 min of computer time. Detailed results of the optimization are given for products of inductance and temperature of LT=1.2 and 5 nH K. Within a range of β and β c between 1 and 2, which is optimum, the energy resolution is nearly independent of these variables. In this region the energy resolution is near the value calculated without parasitic capacitances. Results of the optimized energy resolution are given as a function of LT between 1.2 and 10 mH K.

Transfer coefficients in ultracold strongly coupled plasma

Science.gov (United States)

Bobrov, A. A.; Vorob'ev, V. S.; Zelener, B. V.

2018-03-01

We use both analytical and molecular dynamic methods for electron transfer coefficients in an ultracold plasma when its temperature is small and the coupling parameter characterizing the interaction of electrons and ions exceeds unity. For these conditions, we use the approach of nearest neighbor to determine the average electron (ion) diffusion coefficient and to calculate other electron transfer coefficients (viscosity and electrical and thermal conductivities). Molecular dynamics simulations produce electronic and ionic diffusion coefficients, confirming the reliability of these results. The results compare favorably with experimental and numerical data from earlier studies.

High-current electron beam coupling to hybrid waveguide and plasma modes in a dielectric Cherenkov maser with a plasma layer

International Nuclear Information System (INIS)

Shlapakovski, Anatoli S.

2002-01-01

The linear theory of a dielectric Cherenkov maser with a plasma layer has been developed. The dispersion relation has been derived for the model of infinitely thin, fully magnetized, monoenergetic hollow electron beam, in the axisymmetric case. The results of the numerical solution of the dispersion relation and the analysis of the beam coupling to hybrid waves, both hybrid waveguide and hybrid plasma modes, are presented. For the hybrid waveguide mode, spatial growth rate dependences on frequency at different plasma densities demonstrate improvement in gain for moderate densities, but strong shifting the amplification band and narrowing the bandwidth. For the hybrid plasma mode, the case of mildly relativistic, 200-250 keV beams is of interest, so that the wave phase velocity is just slightly greater than the speed of light in a dielectric medium. It has been shown that depending on beam and plasma parameters, the hybrid plasma mode can be separated from the hybrid waveguide mode, or be coupled to it through the beam resulting in strong gain increase, or exhibit a flat gain vs frequency dependence over a very broad band. The parameters, at which the -3 dB bandwidth calculated for 30 dB peak gain exceeds an octave, have been found

Matrix effects in inductively coupled plasma mass spectrometry

International Nuclear Information System (INIS)

Chen, Xiaoshan.

1995-01-01

The inductively coupled plasma is an electrodeless discharge in a gas (usually Ar) at atmospheric pressure. Radio frequency energy generated by a RF power source is inductively coupled to the plasma gas through a water cooled load coil. In ICP-MS the open-quotes Fasselclose quotes TAX quartz torch commonly used in emission is mounted horizontally. The sample aerosol is introduced into the central flow, where the gas kinetic temperature is about 5000 K. The aerosol is vaporized, atomized, excited and ionized in the plasma, and the ions are subsequently extracted through two metal apertures (sampler and skimmer) into the mass spectrometer. In ICP-MS, the matrix effects, or non-spectroscopic interferences, can be defined as the type of interferences caused by dissolved concomitant salt ions in the solution. Matrix effects can be divided into two categories: (1) signal drift due to the deposition of solids on the sampling apertures; and/or (2) signal suppression or enhancement by the presence of the dissolved salts. The first category is now reasonably understood. The dissolved salts, especially refractory oxides, tend to deposit on the cool tip of the sampling cone. The clogging of the orifices reduces the ion flow into the ICP-MS, lowers the pressure in the first stage of ICP-MS, and enhances the level of metal oxide ions. Because the extent of the clogging increases with the time, the signal drifts down. Even at the very early stage of the development of ICP-MS, matrix effects had been observed. Houk et al. found out that the ICP-MS was not tolerant to solutions containing significant amounts of dissolved solids

CMOS MEMS capacitive absolute pressure sensor

International Nuclear Information System (INIS)

Narducci, M; Tsai, J; Yu-Chia, L; Fang, W

2013-01-01

This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal–oxide–semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO 2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO 2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa −1 in the pressure range of 0–300 kPa. (paper)

Improvement of ITO properties in green-light-emitting devices by using N2:O2 plasma treatment

Science.gov (United States)

Jeon, Hyeonseong; Kang, Seongjong; Oh, Hwansool

2016-01-01

Plasma treatment reduces the roughness of the indium-tin-oxide (ITO) interface in organic light emitting diodes (OLEDs). Oxygen gas is typically used in the plasma treatment of conventional OLED devices. However, in this study, nitrogen and oxygen gases were used for surface treatment to improve the properties of ITO. To investigate the improvements resulting from the use of nitrogen and oxygen plasma treatment, fabricated green OLED devices. The device's structure was ITO (600 Å) / α-NPD (500 Å) / Alq3:NKX1595 (400 Å:20 Å,5%) / LiF / Al:Li (10 Å:1000 Å). The plasma treatment was performed in a capacitive coupled plasma (CCP) type plasma treatment chamber similar to that used in the traditional oxygen plasma treatment. The results of this study show that the combined nitrogen/oxygen plasma treatment increases the lifetime, current density, and brightness of the fabricated OLED while decreasing the operating voltage relative to those of OLEDs fabricated using oxygen plasma treatment.

Inductively coupled plasma and ion sources: History and state-of-the-art

International Nuclear Information System (INIS)

Hopwood, J.

1994-01-01

Over 100 years ago Hittorf first generated an electrodeless ''ring'' discharge by electromagnetic induction and began a 40 year controversy as to the true physical origin of such a discharge. Even Tesla advocated that these plasmas were merely the result of large electrostatic potential differences rather than electric fields induced by high frequency currents. Through clever experiments using crude spark gaps and leyden jars, the inductive nature of the discharge was confirmed in the late 1920's by MacKinnon, thus supporting the theories and experiments of Sir J.J. Thomson, perhaps the most staunch advocate of the induction mechanism. Today the authors routinely exploit the intense plasmas which are generated by induction. In this talk, the characteristics of inductively coupled plasma (ICP) and ion sources will be reviewed and future applications of intense plasma sources will be discussed. The inductively coupled plasma is Joule heated at moderate gas pressures, but the electromagnetic field penetration of these dense plasmas is limited by the plasma skin depth, typically a few millimeters to a few centimeters. The induction plasma is thus edge heated, a fact that constrains uniformity over large areas if helical induction coils are used. Flat, spiral coils may be used to improve uniformity by driving the plasma using a planar geometry. Issues of dimensional and frequency scaling will be discussed as they apply to large diameter sources. Ion beams extracted from ICPs are used for many applications including space propulsion, high power neutral beams, and materials processing. Broad ion beam (∼10 cm) current densities in excess of 100 mA-cm 2 at 100 keV are obtained in pulsed mode operation. Recently, however, more consumer-oriented applications of less intense ICPs are emerging

Non-inductive plasma initiation and plasma current ramp-up on the TST-2 spherical tokamak

International Nuclear Information System (INIS)

Takase, Y.; Ejiri, A.; Oosako, T.; Shinya, T.; Ambo, T.; Furui, H.; Kato, K.; Nakanishi, A.; Sakamoto, T.; Kakuda, H.; Wakatsuki, T.; Hashimoto, T.; Hiratsuka, J.; Kasahara, H.; Kumazawa, R.; Mutoh, T.; Saito, K.; Seki, T.; Moeller, C.P.; Nagashima, Y.

2013-01-01

Plasma current (I p ) start-up in a spherical tokamak (ST) by waves in the lower-hybrid (LH) frequency range was investigated on TST-2. A low current (∼1 kA) ST configuration can be formed by waves over a broad frequency range (21 MHz–8.2 GHz in TST-2), but further I p ramp-up (to ∼10 kA) is most efficient with waves in the LH frequency range. I p ramp-up to 15 kA was achieved with 60 kW of net RF power P RF in the fast wave (FW) polarization at 200 MHz excited by the inductively coupled combline antenna. X-ray measurements showed that the photon flux and temperature are higher in the direction opposite to I p , consistent with acceleration of electrons by a uni-directional RF wave. There is evidence that the LH wave is excited nonlinearly by the FW, based on the frequency spectra measured by magnetic probes. Similar efficiencies of I p ramp-up were obtained with the inductive combline antenna and the dielectric-loaded waveguide array (‘grill’) antenna, and tendencies for the current drive efficiency to increase with plasma current and toroidal field were observed. During operation of the grill antenna, wavevector components were measured by an array of magnetic probes. Results were qualitatively consistent with expectations based on dispersion relations for the FW and the LH wave. A capacitively coupled combline antenna has been developed to improve coupling to the plasma and the wavenumber spectrum of the excited LH wave, and will be tested in 2013. (paper)

Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C5F10O Plasma

Science.gov (United States)

Miyawaki, Yudai; Shibata, Emi; Kondo, Yusuke; Takeda, Keigo; Kondo, Hiroki; Ishikawa, Kenji; Okamoto, Hidekazu; Sekine, Makoto; Hori, Masaru

2013-02-01

The etching rates of low-dielectric-constant (low-k), porous SiOCH (p-SiOCH) films were increased by nitrogen-added Ar/C5F10O plasma etching in dual-frequency (60 MHz/2 MHz)-excited parallel plate capacitively coupled plasma. Previously, perfluoropropyl vinyl ether [C5F10O] provided a very high density of CF3+ ions [Nagai et al.: Jpn. J. Appl. Phys. 45 (2006) 7100]. Surface nitridation on the p-SiOCH surface exposed to Ar/N2 plasma led to the etching of larger amounts of p-SiOCH in Ar/C5F10O plasma, which depended on the formation of bonds such as =C(sp2)=N(sp2)- and -C(sp)≡N(sp).

Capacitive chemical sensor

Science.gov (United States)

Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

2014-05-27

A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

Rf probe technology for the next generation of technological plasmas

International Nuclear Information System (INIS)

Law, V.J.; Kenyon, A.J.; Thornhill, N.F.; Seeds, A.J.; Batty, I.

2001-01-01

We describe radio frequency (rf) analysis of technological plasmas at the 13.56 MHz fundamental drive frequency and integer narrow-band harmonics up to n = 9. In particular, we demonstrate the use of harmonic amplitude information as a process end-point diagnostic. Using very high frequency (vhf) techniques, we construct non-invasive ex situ remote-coupled probes: a diplexer, an equal-ratio-arm bridge, and a dual directional coupler used as a single directional device. These probes bolt into the plasma-tool 50 Ω transmission-line between the rf generator and matching network, and hence do not require modification of the plasma tool. The 50 Ω probe environment produces repeatable measurements of the chamber capacitance and narrow-band harmonic amplitude with an end-point detection sensitivity corresponding to a 2 dB change in the harmonic amplitude with the removal of 1 cm 2 of photoresist. The methodology and design of an instrument for the measurement of the plasma-tool frequency response, and the plasma harmonic amplitude and phase response are examined. The instrument allows the monitoring of the plasma phase delay, plasma-tool short- and long-term ageing, and process end-point prediction. (author)

Characteristics of dust voids in a strongly coupled laboratory dusty plasma

Science.gov (United States)

Bailung, Yoshiko; Deka, T.; Boruah, A.; Sharma, S. K.; Pal, A. R.; Chutia, Joyanti; Bailung, H.

2018-05-01

A void is produced in a strongly coupled dusty plasma by inserting a cylindrical pin (˜0.1 mm diameter) into a radiofrequency discharge argon plasma. The pin is biased externally below the plasma potential to generate the dust void. The Debye sheath model is used to obtain the sheath potential profile and hence to estimate the electric field around the pin. The electric field force and the ion drag force on the dust particles are estimated and their balance accounts well for the maintenance of the size of the void. The effects of neutral density as well as dust density on the void size are studied.

An amplitude modulated radio frequency plasma generator

Science.gov (United States)

Lei, Fan; Li, Xiaoping; Liu, Yanming; Liu, Donglin; Yang, Min; Xie, Kai; Yao, Bo

2017-04-01

A glow discharge plasma generator and diagnostic system has been developed to study the effects of rapidly variable plasmas on electromagnetic wave propagation, mimicking the plasma sheath conditions encountered in space vehicle reentry. The plasma chamber is 400 mm in diameter and 240 mm in length, with a 300-mm-diameter unobstructed clear aperture. Electron densities produced are in the mid 1010 electrons/cm3. An 800 W radio frequency (RF) generator is capacitively coupled through an RF matcher to an internally cooled stainless steel electrode to form the plasma. The RF power is amplitude modulated by a waveform generator that operates at different frequencies. The resulting plasma contains electron density modulations caused by the varying power levels. A 10 GHz microwave horn antenna pair situated on opposite sides of the chamber serves as the source and detector of probe radiation. The microwave power feed to the source horn is split and one portion is sent directly to a high-speed recording oscilloscope. On mixing this with the signal from the pickup horn antenna, the plasma-induced phase shift between the two signals gives the path-integrated electron density with its complete time dependent variation. Care is taken to avoid microwave reflections and extensive shielding is in place to minimize electronic pickup. Data clearly show the low frequency modulation of the electron density as well as higher harmonics and plasma fluctuations.

A model for plasma evolution in Filipov type plasma focus facilities

International Nuclear Information System (INIS)

Siahpoush, V.; Sobhanian, S.; Tafreshi, M. A.; Lamehi, M.

2003-01-01

A model is presented in this paper for the evolution of plasma in Filipov type plasma focus facilities. With the help of this model, one can predict some of the main parameters of the produced plasma and obtain the optimized geometrical an physical properties (anode radius and length, gas pressure, capacitance, bank energy etc) for the primary design purposes. The results obtained by this model will be compared with the experimental data obtained from the 90 kJ plasma focus facility D ena

Fluid simulation of species concentrations in capacitively coupled N2/Ar plasmas: Effect of gas proportion

Science.gov (United States)

Liang, Ying-Shuang; Liu, Gang-Hu; Xue, Chan; Liu, Yong-Xin; Wang, You-Nian

2017-05-01

A two-dimensional self-consistent fluid model and the experimental diagnostic are employed to investigate the dependencies of species concentrations on the gas proportion in the capacitive N2/Ar discharges operated at 60 MHz, 50 Pa, and 140 W. The results indicate that the N2/Ar proportion has a considerable impact on the species densities. As the N2 fraction increases, the electron density, as well as the Ar+ and Arm densities, decreases remarkably. On the contrary, the N2 + density is demonstrated to increase monotonically with the N2 fraction. Moreover, the N density is observed to increase significantly with the N2 fraction at the N2 fractions below 40%, beyond which it decreases slightly. The electrons are primarily generated via the electron impact ionization of the feed gases. The electron impact ionization of Ar essentially determines the Ar+ density. For the N2 + production, the charge transition process between the Ar+ ions and the feed gas N2 dominates at low N2 fraction, while the electron impact ionization of N2 plays the more important role at high N2 fraction. At any gas mixtures, more than 60% Arm atoms are generated through the radiative decay process from Ar(4p). The dissociation of the feed gas N2 by the excited Ar atoms and by the electrons is responsible for the N formation at low N2 fraction and high N2 fraction, respectively. To validate the simulation results, the floating double probe and the optical emission spectroscopy are employed to measure the total positive ion density and the emission intensity originating from Ar(4p) transitions, respectively. The results from the simulation show a qualitative agreement with that from the experiment, which indicates the reliable model.

Statics and thermodynamics of strongly coupled multicomponent plasmas

International Nuclear Information System (INIS)

Rosenfeld, Y.

1980-01-01

A description of strongly coupled plasmas, in which the direct correlation functions, c/sub i/j(r), are obtained by simple scaling from a universal function, is derived and found to be in full agreement with available computer simulation data, which it thus extends for arbitrary mixtures. It is thermodynamically consistent with the ''ion-sphere'' charge-averaging prediction for the enhancement factors for nuclear reaction rates, the results for which confirm the universality of the bridge functions for mixtures

Coupling nanoliter high-performance liquid chromatography to inductively coupled plasma mass spectrometry for arsenic speciation.

Science.gov (United States)

Cheng, Heyong; Shen, Lihuan; Liu, Jinhua; Xu, Zigang; Wang, Yuanchao

2018-04-01

Nanoliter high-performance liquid chromatography shows low consumption of solvents and samples, offering one of the best choices for arsenic speciation in precious samples in combination with inuctively coupled plasma mass spectrometry. A systematic investigation on coupling nanoliter high-performance liquid chromatography to inductively coupled plasma mass spectrometry from instrument design to injected sample volume and mobile phase was performed in this study. Nanoflow mobile phase was delivered by flow splitting using a conventional high-pressure pump with reuse of mobile phase waste. Dead volume was minimized to 60 nL for the sheathless interface based on the previously developed nanonebulizer. Capillary columns for nanoliter high-performance liquid chromatography were found to be sensitive to sample loading volume. An apparent difference was also found between the mobile phases for nanoliter and conventional high-performance liquid chromatography. Baseline separation of arsenite, arsenate, monomethylarsenic, and dimethylarsenic was achieved within 11 min on a 15 cm C 18 capillary column and within 12 min on a 25 cm strong anion exchange column. Detection limits of 0.9-1.8 μg/L were obtained with precisions variable in the range of 1.6-4.2%. A good agreement between determined and certified values of a certified reference material of human urine (GBW 09115) validated its accuracy along with good recoveries (87-102%). © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

ICRF plasma production in Tore Supra: analysis of antenna coupling and plasma properties

International Nuclear Information System (INIS)

Beaumont, B.; Becoulet, A.; Lyssoivan, A.

1999-01-01

A study of RF plasma production frequency range ω. 2ω ci has been undertaken on Tore Supra taking into account antenna coupling predictions of theory and the TEXTOR-94 database. Two scenarios for RF discharges have been tested (fixed frequency of the RF generator): operation with pure toroidal magnetic field, at standard and lower B T and operation in the magnetic configuration with a small vertical (B V ) field superimposed on B T (B V T ). (authors)

Selective virtual capacitive impedance loop for harmonics voltage compensation in islanded microgrids

DEFF Research Database (Denmark)

Micallef, Alexander; Apap, Maurice; Spiteri-Staines, Cyril

2013-01-01

Parallel inverters having LCL output filters cause voltage distortions at the point of common coupling (PCC) in islanded microgrids when non-linear loads are present. A capacitive virtual impedance loop could be used to provide selective harmonic compensation in islanded microgrids, instead of in...... resistance for selective harmonic compensation in islanded microgrids. Simulation results were given to show the suitability of the proposed algorithms in reducing the voltage harmonics at the PCC.......Parallel inverters having LCL output filters cause voltage distortions at the point of common coupling (PCC) in islanded microgrids when non-linear loads are present. A capacitive virtual impedance loop could be used to provide selective harmonic compensation in islanded microgrids, instead...... of introducing additional active or passive filters into the system that could compromise the stability of the microgrid. However, the performance of these compensation loops becomes degraded when a virtual resistance is introduced with the aim to improve the overall stability of the parallel inverters...

Diagnostic studies of ion beam formation in inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Jacobs, Jenee L. [Iowa State Univ., Ames, IA (United States)

2015-01-01

This dissertation describes a variety of studies focused on the plasma and the ion beam in inductively coupled plasma mass spectrometry (ICP-MS). The ability to use ICP-MS for measurements of trace elements in samples requires the analytes to be efficiently ionized. Updated ionization efficiency tables are discussed for ionization temperatures of 6500 K and 7000 K with an electron density of 1 x 10¹⁵ cm^-3. These values are reflective of the current operating parameters of ICP-MS instruments. Calculations are also discussed for doubly charged (M²⁺) ion formation, neutral metal oxide (MO) ionization, and metal oxide (MO⁺) ion dissociation for similar plasma temperature values. Ionization efficiency results for neutral MO molecules in the ICP have not been reported previously.

Design of a UHV-compatible rf plasma source and its application to self-assembled layers of CoPt3 nanoparticles

International Nuclear Information System (INIS)

Gehl, B.; Leist, U.; Aleksandrovic, V.; Nickut, P.; Zielasek, V.; Weller, H.; Al-Shamery, K.; Baeumer, M.

2006-01-01

A compact, versatile, and simple rf plasma source with capacitive coupling compatible to ultrahigh vacuum (UHV) requirements was designed and built to allow sequences of sample surface modification in plasma and surface preparation and analysis in vacuum without breaking the vacuum. The plasma source was operated at working pressures of less than 1 to a few millibars. Sample transfer to UHV was performed at pressures around 10 -9 mbar. For easy integration into an existing UHV setup, the sample recipient and transfer system were made to accept standard commercial sample holders. Preliminary experiments were performed by exposing monolayers of colloidal CoPt 3 nanoparticles to oxygen and hydrogen plasmas. The structural and chemical effects of the plasma treatments were analyzed with scanning electron microscopy and x-ray photoelectron spectroscopy

Surface chemistry and fundamental limitations on the plasma cleaning of metals

Energy Technology Data Exchange (ETDEWEB)

Dong, Bin, E-mail: bindong@my.unt.edu [Department of Chemistry, University of North Texas, 1155 Union Circle 305070, Denton, TX, 76203 (United States); Driver, M. Sky, E-mail: Marcus.Driver@unt.edu [Department of Chemistry, University of North Texas, 1155 Union Circle 305070, Denton, TX, 76203 (United States); Emesh, Ismail, E-mail: Ismail_Emesh@amat.com [Applied Materials Inc., 3050 Bowers Ave, Santa Clara, CA, 95054 (United States); Shaviv, Roey, E-mail: Roey_Shaviv@amat.com [Applied Materials Inc., 3050 Bowers Ave, Santa Clara, CA, 95054 (United States); Kelber, Jeffry A., E-mail: Jeffry.Kelber@unt.edu [Department of Chemistry, University of North Texas, 1155 Union Circle 305070, Denton, TX, 76203 (United States)

2016-10-30

Highlights: • O{sub 2}-free plasma treatment of air-exposed Co or Cu surfaces yields remnant C layers inert to further plasma cleaning. • The formation of the remnant C layer is graphitic (Cu) or carbidic (Co). • The formation of a remnant C layer is linked to plasma cleaning of a metal surface. - Abstract: In-situ X-ray photoelectron spectroscopy (XPS) studies reveal that plasma cleaning of air-exposed Co or Cu transition metal surfaces results in the formation of a remnant C film 1–3 monolayers thick, which is not reduced upon extensive further plasma exposure. This effect is observed for H{sub 2} or NH{sub 3} plasma cleaning of Co, and He or NH{sub 3} plasma cleaning of Cu, and is observed with both inductively coupled (ICP) and capacitively-coupled plasma (CCP). Changes in C 1 s XPS spectra indicate that this remnant film formation is accompanied by the formation of carbidic C on Co and of graphitic C on Cu. This is in contrast to published work showing no such remnant carbidic/carbon layer after similar treatments of Si oxynitride surfaces. The observation of the remnant carbidic C film on Co and graphitic film on Cu, but not on silicon oxynitride (SiO{sub x}N{sub y}), regardless of plasma chemistry or type, indicates that this effect is due to plasma induced secondary electron emission from the metal surface, resulting in transformation of sp{sup 3} adventitious C to either a metal carbide or graphite. These results suggest fundamental limitations to plasma-based surface cleaning procedures on metal surfaces.

Nanoparticle formation in a low pressure argon/aniline RF plasma

Science.gov (United States)

Pattyn, C.; Kovacevic, E.; Hussain, S.; Dias, A.; Lecas, T.; Berndt, J.

2018-01-01

The formation of nanoparticles in low temperature plasmas is of high importance for different fields: from astrophysics to microelectronics. The plasma based synthesis of nanoparticles is a complex multi-scale process that involves a great variety of different species and comprises timescales ranging from milliseconds to several minutes. This contribution focuses on the synthesis of nanoparticles in a low temperature, low pressure capacitively coupled plasma containing mixtures of argon and aniline. Aniline is commonly used for the production of polyaniline, a material that belongs to the family of conductive polymers, which has attracted increasing interest in the last few years due to the large number of potential applications. The nanoparticles which are formed in the plasma volume and levitate there due to the collection of negative charges are investigated in this contribution by means of in-situ FTIR spectroscopy. In addition, the plasma is analyzed by means of plasma (ion) mass spectroscopy. The experiments reveal the possibility to synthesize nanoparticles both in continuous wave and in pulsed discharges. The formation of particles in the plasma volume can be suppressed by pulsing the plasma in a specific frequency range. The in-situ FTIR analysis also reveals the influence of the argon plasma on the characteristics of the nanoparticles.

A capacitive bioelectrode for recording electrophysiological signals

International Nuclear Information System (INIS)

Moreno Garcia, E.; Mujica Ascencio, S.; Rosa Vazquez, J. M.de la; Stolik Isakina, S.

2012-01-01

In this paper we describe a gel-free sensor with on-board electrode design, which capacitive couples to the skin to detect the electrical activity in the body. The integrated sensor is manufactured on a standard printed circuit board within 2.2 cm diameter enclosure that can operate through fabric or other insulation. The electrode includes amplification (60db gain) and passive band pass filtering (0.5 to 100 Hz). Active shielding surrounding the sensor plate is used to reduce noise pickup. The input referred noise, measured over the electrode bandwidth is 4 μV rms at 0.2 mm sensor distance, and 16 μV rms at 1.2 mm distance trough two cotton cloths. The bioelectrodes were coupled to the scalp trough hair for EEG signals (with 80 db gain), and coupled to the chest through clothing for ECG signals. The recorded signals show well performance of the designed bielectrode. (Author)

On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

Energy Technology Data Exchange (ETDEWEB)

Lee, Jin-Won; Lee, Yun-Seong, E-mail: leeeeys@kaist.ac.kr; Chang, Hong-Young [Low-temperature Plasma Laboratory, Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701 (Korea, Republic of); An, Sang-Hyuk [Agency of Defense Development, Yuseong-gu, Daejeon 305-151 (Korea, Republic of)

2014-08-15

In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

Effect of antenna size on electron kinetics in inductively coupled plasmas

Energy Technology Data Exchange (ETDEWEB)

Lee, Hyo-Chang; Chung, Chin-Wook [Department of Electrical Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)

2013-10-15

Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented.

Analytical solution for a coaxial plasma gun: Weak coupling limit

International Nuclear Information System (INIS)

Dietz, D.

1987-01-01

The analytical solution of the system of coupled ODE's which describes the time evolution of an ideal (i.e., zero resistance) coaxial plasma gun operating in the snowplow mode is obtained in the weak coupling limit, i.e, when the gun is fully influenced by the driving (RLC) circuit in which it resides but the circuit is negligibly influenced by the gun. Criteria for the validity of this limit are derived and numerical examples are presented. Although others have obtained approximate, asymptotic and numerical solutions of the equations, the present analytical results seem not to have appeared previously in the literature

The determination of transition probabilities with an inductively-coupled plasma discharge

International Nuclear Information System (INIS)

Nieuwoudt, G.

1984-03-01

The 27 MHz inductively-coupled plasma discharge (ICP) is used for the determination of relative transition probabilities of the 451, 459 and 470 nm argon spectral lines. The temperature of the argon plasma is determined with hydrogen as thermometric specie, because of the accurate transition probabilities ( approximately 1% uncertainty) there of. The relative transition probabilities of the specific argon spectral lines were determined by substitution of the measured spectral radiances thereof, together with the hydrogen temperature, in the two-line equation of temperature measurement

Energy Conservation Tests of a Coupled Kinetic-kinetic Plasma-neutral Transport Code

Energy Technology Data Exchange (ETDEWEB)

Stotler, D. P.; Chang, C. S.; Ku, S. H.; Lang, J.; Park, G.

2012-08-29

A Monte Carlo neutral transport routine, based on DEGAS2, has been coupled to the guiding center ion-electron-neutral neoclassical PIC code XGC0 to provide a realistic treatment of neutral atoms and molecules in the tokamak edge plasma. The DEGAS2 routine allows detailed atomic physics and plasma-material interaction processes to be incorporated into these simulations. The spatial pro le of the neutral particle source used in the DEGAS2 routine is determined from the uxes of XGC0 ions to the material surfaces. The kinetic-kinetic plasma-neutral transport capability is demonstrated with example pedestal fueling simulations.

State-space modeling of the radio frequency inductively-coupled plasma generator

International Nuclear Information System (INIS)

Dewangan, Rakesh Kumar; Punjabi, Sangeeta B; Mangalvedekar, H A; Lande, B K; Joshi, N K; Barve, D N

2010-01-01

Computational fluid dynamics models of RF-ICP are useful in understanding the basic transport phenomenon in an ICP torch under a wide variety of operating conditions. However, these models lack the ability to evaluate the effects of the plasma condition on the RF generator. In this paper, simulation of an induction plasma generator has been done using state space modelling by considering inductively coupled plasma as a part of RF network .The time dependent response of the RF-ICP generator circuit to given input excitation has been computed by extracting the circuit's state-space variables and their constraint matrices. MATLAB 7.1 software has been used to solve the state equations. The values of RF coil current, frequency and plasma power has been measured experimentally also at different plate bias voltage. The simulated model is able to predict RF coil current, frequency, plasma power, overall efficiency of the generator. The simulated and measured values are in agreement with each other. This model can prove useful as a design tool for the Induction plasma generator.

An approach to evaluate capacitance, capacitive reactance and resistance of pivoted pads of a thrust bearing

Science.gov (United States)

Prashad, Har

1992-07-01

A theoretical approach is developed for determining the capacitance and active resistance between the interacting surfaces of pivoted pads and thrust collar, under different conditions of operation. It is shown that resistance and capacitive reactance of a thrust bearing decrease with the number of pads times the values of these parameters for an individual pad, and that capacitance increases with the number of pads times the capacitance of an individual pad. The analysis presented has a potential to diagnose the behavior of pivoted pad thrust bearings with the angle of tilt and the ratio of film thickness at the leading to trailing edge, by determining the variation of capacitance, resistance, and capacitive reactance.

Diagnostics and biomedical applications of radiofrequency plasmas

International Nuclear Information System (INIS)

Lazović, Saša

2012-01-01

In this paper we present spatial profiles of ion and atomic oxygen concentrations in a large scale cylindrical 13.56 MHz capacitively coupled plasma low pressure reactor suitable for indirect biomedical applications (like treatment of textile to increase antibacterial properties) and direct (treatment of seeds of rare and protected species). Such reactor can easily be used for the sterilization of medical instruments by removing bacteria, spores, prions and fungi as well. We also discuss electrical properties of the system based on the signals obtained by the derivative probes and show the light emission profiles close to the sample platform. In the case of seeds treatment, the desired effect is to plasma etch the outer shell of the seed which will lead to the easier nutrition and therefore increase of the germination. In the case of textile treatment the functionalization is done by bounding atomic oxygen to the surface. It appears that antibacterial properties of the textile are increased by incorporating nanoparticles to the fibres which can successfully be done after the plasma treatment. From these two examples it is obvious that the balance of ion and atomic oxygen concentrations as well as proper choice of ion energy and power delivered to the plasma direct the nature of the plasma treatment.

HEMOFILTRATION AND COUPLED PLASMA FILTRATION ADSORPTION IMPACT ON TACROLIMUS BLOOD CONCENTRATION IN RENAL TRANSPLANT RECIPIENTS

Directory of Open Access Journals (Sweden)

A.V. Vatazin

2014-01-01

Full Text Available Aim. To study the effect of hemofi ltration and coupled plasma fi ltration adsorption on tacrolimus blood concentration in renal transplant recipients.Methods and results. The study included 8 renal transplant recipients. In these patients immediately after the operation was performed the coupled plasma fi ltration adsorption with hemofiltration using a cartridge Mediasorb to reduce the severity of reperfusion injury. We have found that during this extracorporeal blood correction procedure there was statistically not signifi cant decrease of tacrolimus blood concentration. However, concentration of tacrolimus remained in the therapeutic range even after the procedure and it was not signifi cantly different from the control point С0.Conclusion. Coupled plasma fi ltration adsorption is safe in renal transplant recipients and has no signifi cant impact on tacrolimus blood concentration. However, the downward trend in the concentration of tacrolimus in the course of these procedures, especially in continuous or semicontinuous mode, as well as in patients with low hematocrit and hypoalbuminemia, requires individual monitoring.

Boltzmann-equation simulations of radio-frequency-driven, low-temperature plasmas

International Nuclear Information System (INIS)

Drallos, P.J.; Riley, M.E.

1995-01-01

We present a method for the numerical solution of the Boltzmann equation (BE) describing plasma electrons. We apply the method to a capacitively-coupled, radio-frequency-driven He discharge in parallel-plate (quasi-1D) geometry which contains time scales for physical processes spanning six orders of magnitude. Our BE solution procedure uses the method of characteristics for the Vlasov operator with interpolation in phase space at early time, allowing storage of the distribution function on a fixed phase-space grid. By alternating this BE method with a fluid description of the electrons, or with a novel time-cycle-average equation method, we compute the periodic steady state of a He plasma by time evolution from startup conditions. We find that the results compare favorably with measured current-voltage, plasma density, and ''cited state densities in the ''GEC'' Reference Cell. Our atomic He model includes five levels (some are summed composites), 15 electronic transitions, radiation trapping, and metastable-metastable collisions

Boltzmann-equation simulations of radio-frequency-driven, low-temperature plasmas

Energy Technology Data Exchange (ETDEWEB)

Drallos, P.J.; Riley, M.E.

1995-01-01

We present a method for the numerical solution of the Boltzmann equation (BE) describing plasma electrons. We apply the method to a capacitively-coupled, radio-frequency-driven He discharge in parallel-plate (quasi-1D) geometry which contains time scales for physical processes spanning six orders of magnitude. Our BE solution procedure uses the method of characteristics for the Vlasov operator with interpolation in phase space at early time, allowing storage of the distribution function on a fixed phase-space grid. By alternating this BE method with a fluid description of the electrons, or with a novel time-cycle-average equation method, we compute the periodic steady state of a He plasma by time evolution from startup conditions. We find that the results compare favorably with measured current-voltage, plasma density, and ``cited state densities in the ``GEC`` Reference Cell. Our atomic He model includes five levels (some are summed composites), 15 electronic transitions, radiation trapping, and metastable-metastable collisions.

Torque magnetometry by use of capacitance type transducer

International Nuclear Information System (INIS)

Braught, M.C.; Pechan, M.J.

1992-01-01

Interfacial anisotropy in magnetic multilayered samples comprised of nanometer thick magnetic layers alternating with non-magnetic layers is investigated by torque magnetometry in the temperature regime of 4 to 300K. The design, construction and use of a capacitance type transducer wherein the sample is mounted directly on with the plate of the capacitor, will be described. As a result the sample and transducer spatially coexist at the sample temperature in an applied external field, eliminating mechanical coupling from the cryogenic region to a remote room temperature transducer. The capacitor measuring the torque of the sample is paired with a reference capacitor. The difference between torque influenced capacitance and the reference is then determined by a differential transimpedance amplifier. Since both capacitors are physically identical variables such as temperature, vibration, orientation and external devices are minimized. Torques up to 300 dyne-cm can be measured with a sensitivity of 0.010 dyne-cm

Ferroelectric negative capacitance domain dynamics

Science.gov (United States)

Hoffmann, Michael; Khan, Asif Islam; Serrao, Claudy; Lu, Zhongyuan; Salahuddin, Sayeef; Pešić, Milan; Slesazeck, Stefan; Schroeder, Uwe; Mikolajick, Thomas

2018-05-01

Transient negative capacitance effects in epitaxial ferroelectric Pb(Zr0.2Ti0.8)O3 capacitors are investigated with a focus on the dynamical switching behavior governed by domain nucleation and growth. Voltage pulses are applied to a series connection of the ferroelectric capacitor and a resistor to directly measure the ferroelectric negative capacitance during switching. A time-dependent Ginzburg-Landau approach is used to investigate the underlying domain dynamics. The transient negative capacitance is shown to originate from reverse domain nucleation and unrestricted domain growth. However, with the onset of domain coalescence, the capacitance becomes positive again. The persistence of the negative capacitance state is therefore limited by the speed of domain wall motion. By changing the applied electric field, capacitor area or external resistance, this domain wall velocity can be varied predictably over several orders of magnitude. Additionally, detailed insights into the intrinsic material properties of the ferroelectric are obtainable through these measurements. A new method for reliable extraction of the average negative capacitance of the ferroelectric is presented. Furthermore, a simple analytical model is developed, which accurately describes the negative capacitance transient time as a function of the material properties and the experimental boundary conditions.

Multi-chord fiber-coupled interferometry of supersonic plasma jets (invited)

International Nuclear Information System (INIS)

Merritt, Elizabeth C.; Lynn, Alan G.; Gilmore, Mark A.; Thoma, Carsten; Loverich, John; Hsu, Scott C.

2012-01-01

A multi-chord fiber-coupled interferometer is being used to make time-resolved density measurements of supersonic argon plasma jets on the Plasma Liner Experiment. The long coherence length of the laser (>10 m) allows signal and reference path lengths to be mismatched by many meters without signal degradation, making for a greatly simplified optical layout. Measured interferometry phase shifts are consistent with a partially ionized plasma in which both positive and negative phase shift values are observed depending on the ionization fraction. In this case, both free electrons and bound electrons in ions and neutral atoms contribute to the index of refraction. This paper illustrates how the interferometry data, aided by numerical modeling, are used to derive total jet density, jet propagation velocity (∼15–50 km/s), jet length (∼20–100 cm), and 3D expansion.

Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime

Science.gov (United States)

Zhang, Yu-Ru; Hu, Yan-Ting; Gao, Fei; Song, Yuan-Hong; Wang, You-Nian

2018-05-01

A novel method, the so-called electrical asymmetry effect (EAE), is gaining increasing interest for realizing the separate control of the ion flux and ion energy. In this paper, a two-dimensional fluid model combined with the full set of Maxwell equations is used to investigate the plasma properties in an electrically asymmetric capacitive discharge sustained by multiple consecutive harmonics operating in the very high frequency regime. The results indicate that by increasing the total number of consecutive harmonics k, the modulation of the dc self-bias induced by changing {θ }1 (the relative phase of the fundamental frequency) becomes different, especially for k ≤slant 6. In a discharge driven by eight consecutive harmonics, the dc self-bias varies with a period 2π, and the most positive value appears at {θ }1 = 3π/2. In addition, with the electromagnetic effects taken into account, the plasma density shifts from edge-high to uniform when {θ }1 increases from 0 to π, and the maximum moves again towards the radial wall at {θ }1 = 3π/2. Moreover, the transient behavior of electrodynamics is also important for a better understanding of the EAE. Within a period, three positive peaks of {P}z are observed, which cause substantial ionization at similar places. {P}r is characterized by a pronounced peak at the end of the period, and the lowest peak value appears at {θ }1 = π. The results obtained in this work are important for improving the plasma processes by utilizing the EAE, especially when the higher order harmonics are included.

Inductively coupled hydrogen plasma processing of AZO thin films for heterojunction solar cell applications

International Nuclear Information System (INIS)

Zhou, H.P.; Xu, S.; Zhao, Z.; Xiang, Y.

2014-01-01

Highlights: • A high-density plasma reactor of inductively coupled plasma source is used in this work. • The conductivity and transmittance can be enhanced simultaneously in the hydrogen process. • The formation of additional donors and passivation due to the hydrogen plasma processing. • The photovoltaic improvement due to the improved AZO layer and hetero-interface quality in the solar cells. - Abstract: Al-doped ZnO (AZO) thin films deposited by means of RF magnetron sputtering were processed in a low frequency inductively coupled plasma of H 2 , aiming at heterojunction (HJ) solar cell applications. A variety of characterization results show that the hydrogen plasma processing exerts a significant influence on the microstructures, electrical and optical properties of the AZO films. The incorporation of hydrogen under the optimum treatment simultaneously promoted the transmittance and conductivity due to the hydrogen associated passivation effect on the native defects and the formation of shallow donors in the films, respectively. A p-type c-Si based HJ solar cell with a front AZO contact was also treated in as-generated non-equilibrium hydrogen plasma and the photovoltaic performance of the solar cell was prominently improved. The underlying mechanism was discussed in terms of the beneficial impacts of high-density hydrogen plasma on the properties of AZO itself and the hetero-interfaces involved in the HJ structure (interface defect and energy band configuration)

Surface modification of argon/oxygen plasma treated vulcanized ethylene propylene diene polymethylene surfaces for improved adhesion with natural rubber

International Nuclear Information System (INIS)

Basak, Ganesh C.; Bandyopadhyay, Abhijit; Neogi, Sudarsan; Bhowmick, Anil K.

2011-01-01

Vulcanized ethylene propylene diene polymethylene (EPDM) rubber surface was treated in a radio frequency capacitatively coupled low pressure argon/oxygen plasma to improve adhesion with compounded natural rubber (NR) during co-vulcanization. The plasma modified surfaces were analyzed by means of contact angle measurement, surface energy, attenuated total reflection-infrared spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy, energy dispersive X-ray sulfur mapping and atomic force microscopy. Several experimental variables such as plasma power, length of exposure time and composition of the argon-oxygen gas mixture were considered. It was delineated that plasma treatment changed both surface composition and roughness, and consequently increased peel strength. The change in surface composition was mainly ascribed to the formation of C-O and -C=O functional groups on the vulcanized surfaces. A maximum of 98% improvement in peel strength was observed after plasma treatment.

Surface modification of argon/oxygen plasma treated vulcanized ethylene propylene diene polymethylene surfaces for improved adhesion with natural rubber

Energy Technology Data Exchange (ETDEWEB)

Basak, Ganesh C. [Rubber Technology Centre, Indian Institute of Technology, Kharagpur 721302 (India); Bandyopadhyay, Abhijit [Department of Polymer Science and Technology, University of Calcutta, Calcutta 700 009 (India); Neogi, Sudarsan [Department of Chemical Engineering, Indian Institute of Technology, Kharagpur 721302 (India); Bhowmick, Anil K., E-mail: anilkb@rtc.iitkgp.ernet.in [Rubber Technology Centre, Indian Institute of Technology, Kharagpur 721302 (India)

2011-01-15

Vulcanized ethylene propylene diene polymethylene (EPDM) rubber surface was treated in a radio frequency capacitatively coupled low pressure argon/oxygen plasma to improve adhesion with compounded natural rubber (NR) during co-vulcanization. The plasma modified surfaces were analyzed by means of contact angle measurement, surface energy, attenuated total reflection-infrared spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy, energy dispersive X-ray sulfur mapping and atomic force microscopy. Several experimental variables such as plasma power, length of exposure time and composition of the argon-oxygen gas mixture were considered. It was delineated that plasma treatment changed both surface composition and roughness, and consequently increased peel strength. The change in surface composition was mainly ascribed to the formation of C-O and -C=O functional groups on the vulcanized surfaces. A maximum of 98% improvement in peel strength was observed after plasma treatment.

Online Coupling of Flow-Field Flow Fractionation and Single Particle Inductively Coupled Plasma-Mass Spectrometry: Characterization of Nanoparticle Surface Coating Thickness and Aggregation State

Science.gov (United States)

Surface coating thickness and aggregation state have strong influence on the environmental fate, transport, and toxicity of engineered nanomaterials. In this study, flow-field flow fractionation coupled on-line with single particle inductively coupled plasma-mass spectrometry i...

Electromagneto-mechanical coupling analysis of a test module in J-TEXT Tokamak during plasma disruption

Energy Technology Data Exchange (ETDEWEB)

Dong, Haijie; Yuan, Zhensheng; Yuan, Hongwei; Pei, Cuixiang [State Key Laboratory for Strength and Vibration of Mechanical Structures, Shanxi Engineering Research Center for NDT and Structural Integrity Evaluation Xi’an Jiaotong University, Xi’an 710049 (China); Chen, Zhenmao, E-mail: chenzm@mail.xjtu.edu.cn [State Key Laboratory for Strength and Vibration of Mechanical Structures, Shanxi Engineering Research Center for NDT and Structural Integrity Evaluation Xi’an Jiaotong University, Xi’an 710049 (China); Yang, Jinhong; Wang, Weihua [Institute of Applied Physics of AOA, Hefei 230031 (China)

2016-11-01

In this paper, the dynamic response during plasma disruption of a test blanket module in vacuum vessel (VV) of the Joint TEXT (J-TEXT), which is an experimental Tokamak device with iron core, was simulated by applying a program developed by authors on the ANSYS platform using its parametric design language (APDL). The moving coordinate method as well as the load transfer and sequential coupling strategy were adopted to cope with the electromagneto-mechanical coupling effect. To establish the numerical model, the influence of the iron core on the eddy current and electromagnetic (EM) force during disruption was numerically investigated at first and the influence was found not significant. Together with the geometrical features of the J-TEXT Tokamak structure, 180° sector models without magnetic core were finally established for the EM field and the structural response simulations. To obtain the source plasma current, the plasma current evolution during disruption was simulated by using the Tokamak Simulation Code (TSC). With the numerical models and the source plasma current, the dynamic response of both the VV structure and the test module were calculated. The numerical results show that the maximum stress of the test module is in safe range, and the magnetic damping effect can weaken vibration of the test module. In addition, simulation without considering the coupling effect was carried out, which shows that the influence of coupling effect is not significant for the peak stress of the J-TEXT disruption problem.

Trace determination of Pu by LIF in an inductively coupled plasma

International Nuclear Information System (INIS)

Mauchien, P.; Briand, A.; Moulin, C.

1989-01-01

Inductively Coupled Plasma/Emission Spectrometry (ICP/ES) technique is largely used in the nuclear industry as an elementary analytical technique. Nevertheless, when the sample to analyse presents elements with a lot of emission spectral lines, spectral interferences lead to limited sensitivity. This is the case for Pu determination in presence of large U concentration. In pure aqueous solution, the limit of detection (LOD) for Pu is 10 μg/1. In presence of U, the LOD is determined by a ratio U/Pu = 1000. Pulsed Laser Induced Fluorescence (LIF) spectrometry is known to be a very selective technique when associated with an Inductively Coupled Plasma source. The absolute sensitivity is better by 2 or 3 orders of magnitude; its principle is based on selective excitation of the ionic species in the plasma followed by fluorescence radiation detection of these species; this radiation being practically free from spectral interferences, it is possible to improve the relative LOD. In this presentation, experimental results performed at Cogema/Marcoule laboratory are presented. After the experimental set-up description, first results of LIF are shown: - very good selectivity is effectively obtained, - a series of analytical results obtained with excitation scanning from the visible to the U.V. show that sensitivity of LIF technique is strictly related to the spectroscopic scheme

Aspheric surface measurement using capacitive probes

Science.gov (United States)

Tao, Xin; Yuan, Daocheng; Li, Shaobo

2017-02-01

With the application of aspheres in optical fields, high precision and high efficiency aspheric surface metrology becomes a hot research topic. We describe a novel method of non-contact measurement of aspheric surface with capacitive probe. Taking an eccentric spherical surface as the object of study, the averaging effect of capacitive probe measurement and the influence of tilting the capacitive probe on the measurement results are investigated. By comparing measurement results from simultaneous measurement of the capacitive probe and contact probe of roundness instrument, this paper indicates the feasibility of using capacitive probes to test aspheric surface and proposes the compensation method of measurement error caused by averaging effect and the tilting of the capacitive probe.

Fluid model of inductively coupled plasma etcher based on COMSOL

International Nuclear Information System (INIS)

Cheng Jia; Ji Linhong; Zhu Yu; Shi Yixiang

2010-01-01

Fluid dynamic models are generally appropriate for the investigation of inductively coupled plasmas. A commercial ICP etcher filled with argon plasma is simulated in this study. The simulation is based on a multiphysical software, COMSOL(TM), which is a partial differential equation solver. Just as with other plasma fluid models, there are drift-diffusion approximations for ions, the quasi-neutrality assumption for electrons movements, reduced Maxwell equations for electromagnetic fields, electron energy equations for electron temperatures and the Navier-Stokes equation for neutral background gas. The two-dimensional distribution of plasma parameters are shown at 200 W of power and 1.33 Pa (10 mTorr) of pressure. Then the profile comparison of the electron number density and temperature with respect to power is illustrated. Finally we believe that there might be some disagreement between the predicted values and the real ones, and the reasons for this difference would be the Maxwellian eedf assumption and the lack of the cross sections of collisions and the reaction rates. (semiconductor physics)

Similarity analysis for the high-pressure inductively coupled plasma source

International Nuclear Information System (INIS)

Vanden-Abeele, D; Degrez, G

2004-01-01

It is well known that the optimal operating parameters of an inductively coupled plasma (ICP) torch strongly depend upon its dimensions. To understand this relationship better, we derive a dimensionless form of the equations governing the behaviour of high-pressure ICPs. The requirement of similarity then naturally leads to expressions for the operating parameters as a function of the plasma radius. In addition to the well-known scaling law for frequency, surprising results appear for the dependence of the mass flow rate, dissipated power and operating pressure upon the plasma radius. While the obtained laws do not appear to be in good agreement with empirical results in the literature, their correctness is supported by detailed numerical calculations of ICP sources of varying diameters. The approximations of local thermodynamic equilibrium and negligible radiative losses restrict the validity of our results and can be responsible for the disagreement with empirical data. The derived scaling laws are useful for the design of new plasma torches and may provide explanations for the unsteadiness observed in certain existing ICP sources

"Negative capacitance" in resistor-ferroelectric and ferroelectric-dielectric networks: Apparent or intrinsic?

Science.gov (United States)

Saha, Atanu K.; Datta, Suman; Gupta, Sumeet K.

2018-03-01

In this paper, we describe and analytically substantiate an alternate explanation for the negative capacitance (NC) effect in ferroelectrics (FE). We claim that the NC effect previously demonstrated in resistance-ferroelectric (R-FE) networks does not necessarily validate the existence of "S" shaped relation between polarization and voltage (according to Landau theory). In fact, the NC effect can be explained without invoking the "S"-shaped behavior of FE. We employ an analytical model for FE (Miller model) in which the steady state polarization strictly increases with the voltage across the FE and show that despite the inherent positive FE capacitance, reduction in FE voltage with the increase in its charge is possible in a R-FE network as well as in a ferroelectric-dielectric (FE-DE) stack. This can be attributed to a large increase in FE capacitance near the coercive voltage coupled with the polarization lag with respect to the electric field. Under certain conditions, these two factors yield transient NC effect. We analytically derive conditions for NC effect in R-FE and FE-DE networks. We couple our analysis with extensive simulations to explain the evolution of NC effect. We also compare the trends predicted by the aforementioned Miller model with Landau-Khalatnikov (L-K) model (static negative capacitance due to "S"-shape behaviour) and highlight the differences between the two approaches. First, with an increase in external resistance in the R-FE network, NC effect shows a non-monotonic behavior according to Miller model but increases according to L-K model. Second, with the increase in ramp-rate of applied voltage in the FE-DE stack, NC effect increases according to Miller model but decreases according to L-K model. These results unveil a possible way to experimentally validate the actual reason of NC effect in FE.

Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices

International Nuclear Information System (INIS)

Boyle, P C; Ellingboe, A R; Turner, M M

2004-01-01

Dual frequency capacitive discharges are designed to offer independent control of the flux and energy of ions impacting on an object immersed in a plasma. This is desirable in applications such as the processing of silicon wafers for microelectronics manufacturing. In such discharges, a low frequency component couples predominantly to the ions, while a high frequency component couples predominantly to electrons. Thus, the low frequency component controls the ion energy, while the high frequency component controls the plasma density. Clearly, this desired behaviour is not achieved for arbitrary configurations of the discharge, and in general one expects some unwanted coupling of ion flux and energy. In this paper we use computer simulations with the particle-in-cell method to show that the most important governing parameter is the ratio of the driving frequencies. If the ratio of the high and low frequencies is great enough, essentially independent control of the ion energy and flux is possible by manipulation of the high and low frequency power sources. Other operating parameters, such as pressure, discharge geometry, and absolute power, are of much less significance

Ion deposition by inductively coupled plasma mass spectrometry

International Nuclear Information System (INIS)

Hu, K.; Houk, R.S.

1996-01-01

An atmospheric pressure inductively coupled plasma (ICP) is used with a quadrupole mass spectrometer (MS) for ion deposition. The deposited element is introduced as a nebulized aqueous solution. Modifications to the ICP-MS device allow generation and deposition of a mass-resolved beam of 165 Ho + at 5x10 12 ions s -1 . The ICP is a universal, multielement ion source that can potentially be used for applications such as deposition of mixtures of widely varying stoichiometry or of alternating layers of different elements. copyright 1996 American Vacuum Society

Thermodynamics of strongly coupled repulsive Yukawa particles in ambient neutralizing plasma: Thermodynamic instability and the possibility of observation in fine particle plasmas

International Nuclear Information System (INIS)

Totsuji, Hiroo

2008-01-01

The thermodynamics is analyzed for a system composed of particles with hard cores, interacting via the repulsive Yukawa potential (Yukawa particulates), and neutralizing ambient (background) plasma. An approximate equation of state is given with proper account of the contribution of ambient plasma and it is shown that there exists a possibility for the total isothermal compressibility of Yukawa particulates and ambient plasma to diverge when the coupling between Yukawa particulates is sufficiently strong. In this case, the system undergoes a transition into separated phases with different densities and we have a critical point for this phase separation. Examples of approximate phase diagrams related to this transition are given. It is emphasized that the critical point can be in the solid phase and we have the possibility to observe a solid-solid phase separation. The applicability of these results to fine particle plasmas is investigated. It is shown that, though the values of the characteristic parameters are semiquantitative due to the effects not described by this model, these phenomena are expected to be observed in fine particle plasmas, when approximately isotropic bulk systems are realized with a very strong coupling between fine particles.

Thermodynamics of strongly coupled repulsive Yukawa particles in ambient neutralizing plasma: Thermodynamic instability and the possibility of observation in fine particle plasmas

Science.gov (United States)

Totsuji, Hiroo

2008-07-01

The thermodynamics is analyzed for a system composed of particles with hard cores, interacting via the repulsive Yukawa potential (Yukawa particulates), and neutralizing ambient (background) plasma. An approximate equation of state is given with proper account of the contribution of ambient plasma and it is shown that there exists a possibility for the total isothermal compressibility of Yukawa particulates and ambient plasma to diverge when the coupling between Yukawa particulates is sufficiently strong. In this case, the system undergoes a transition into separated phases with different densities and we have a critical point for this phase separation. Examples of approximate phase diagrams related to this transition are given. It is emphasized that the critical point can be in the solid phase and we have the possibility to observe a solid-solid phase separation. The applicability of these results to fine particle plasmas is investigated. It is shown that, though the values of the characteristic parameters are semiquantitative due to the effects not described by this model, these phenomena are expected to be observed in fine particle plasmas, when approximately isotropic bulk systems are realized with a very strong coupling between fine particles.

Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

DEFF Research Database (Denmark)

Ostrikov, K.N.; Tsakadze, E.L.; Xu, S.

2003-01-01

Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (similar to500 kHz) inductively coupled plasmas have been measured using miniature magnetic probes. In the low-power (similar to170 W) E-mode, the magnetic field pattern is purely linear......, with the fundamental frequency harmonics only. After transition to higher-power (similar to1130 W) H-mode, the second-harmonic nonlinear azimuthal magnetic field B-phi(2omega) that is in 4-6 times larger than the fundamental frequency component B-phi(omega), has been observed. A simplified plasma fluid model...... explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source is proposed. The nonlinear second harmonic poloidal (r-z) rf current generating the azimuthal magnetic field B-phi(2omega) is attributed to nonlinear interactions between the fundamental frequency radial...

Chemical modeling of a high-density inductively-coupled plasma reactor containing silane

NARCIS (Netherlands)

Kovalgin, Alexeij Y.; Boogaard, A.; Brunets, I.; Holleman, J.; Schmitz, Jurriaan

We carried out the modeling of chemical reactions in a silane-containing remote Inductively Coupled Plasma Enhanced Chemical Vapor Deposition (ICPECVD) system, intended for deposition of silicon, silicon oxide, and silicon nitride layers. The required electron densities and Electron Energy

Holey nickel-cobalt layered double hydroxide thin sheets with ultrahigh areal capacitance

Science.gov (United States)

Zhi, Lei; Zhang, Wenliang; Dang, Liqin; Sun, Jie; Shi, Feng; Xu, Hua; Liu, Zonghuai; Lei, Zhibin

2018-05-01

Strong coupling of electroactive components on conductive carbonaceous matrix to fabricate flexible hybrid electrodes represents a promising approach towards high performance supercapacitors. This work reports the fabrication of holey nickel cobalt layered double hydroxide (NiCo-LDH) nanosheets that are vertically grown on the cotton cloth-derived activated textile carbon (aTC). The abundant nanoholes on the thin-sheet NiCo-LDH not only enhance the electrode efficiency for efficient Faradaic redox reactions but also facilitate access of electrolyte to the electrode surface, thus giving rise to 70% capacitance arising from their outer surface. As a result, the aTC-NiCo hybrid electrode is capable of simultaneously achieving extremely high areal capacitance (6.37 F cm-2), mass capacitance (525 F g-1) and volumetric capacitance (249 F cm-3) at a practical level of mass loading (6.72 mg cm-2). Moreover, a solid-state asymmetric capacitor built with aTC-NiCo as positive electrode and active carbon-coated on aTC as negative electrode can deliver a volumetric energy density of 7.4 mWh cm-3 at a power density of 103 mW cm-3, while preserving a superior power performance, satisfying cycling stability and good mechanical flexibility.

Global (volume-averaged) model of inductively coupled chlorine plasma : influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

NARCIS (Netherlands)

Kemaneci, E.H.; Carbone, E.A.D.; Booth, J.P.; Graef, W.A.A.D.; Dijk, van J.; Kroesen, G.M.W.

An inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion–ion plasma appears. In order to model this phenomenon, a novel

Capacitive coupling in hybrid graphene/GaAs nanostructures

Energy Technology Data Exchange (ETDEWEB)

Simonet, Pauline, E-mail: psimonet@phys.ethz.ch; Rössler, Clemens; Krähenmann, Tobias; Varlet, Anastasia; Ihn, Thomas; Ensslin, Klaus; Reichl, Christian; Wegscheider, Werner [Solid State Physics Laboratory, ETH Zürich, 8093 Zürich (Switzerland)

2015-07-13

Coupled hybrid nanostructures are demonstrated using the combination of lithographically patterned graphene on top of a two-dimensional electron gas (2DEG) buried in a GaAs/AlGaAs heterostructure. The graphene forms Schottky barriers at the surface of the heterostructure and therefore allows tuning the electronic density of the 2DEG. Conversely, the 2DEG potential can tune the graphene Fermi energy. Graphene-defined quantum point contacts in the 2DEG show half-plateaus of quantized conductance in finite bias spectroscopy and display the 0.7 anomaly for a large range of densities in the constriction, testifying to their good electronic properties. Finally, we demonstrate that the GaAs nanostructure can detect charges in the vicinity of the heterostructure's surface. This confirms the strong coupling of the hybrid device: localized states in the graphene ribbon could, in principle, be probed by the underlying confined channel. The present hybrid graphene/GaAs nanostructures are promising for the investigation of strong interactions and coherent coupling between the two fundamentally different materials.

Capacitive coupling in hybrid graphene/GaAs nanostructures

International Nuclear Information System (INIS)

Simonet, Pauline; Rössler, Clemens; Krähenmann, Tobias; Varlet, Anastasia; Ihn, Thomas; Ensslin, Klaus; Reichl, Christian; Wegscheider, Werner

2015-01-01

Coupled hybrid nanostructures are demonstrated using the combination of lithographically patterned graphene on top of a two-dimensional electron gas (2DEG) buried in a GaAs/AlGaAs heterostructure. The graphene forms Schottky barriers at the surface of the heterostructure and therefore allows tuning the electronic density of the 2DEG. Conversely, the 2DEG potential can tune the graphene Fermi energy. Graphene-defined quantum point contacts in the 2DEG show half-plateaus of quantized conductance in finite bias spectroscopy and display the 0.7 anomaly for a large range of densities in the constriction, testifying to their good electronic properties. Finally, we demonstrate that the GaAs nanostructure can detect charges in the vicinity of the heterostructure's surface. This confirms the strong coupling of the hybrid device: localized states in the graphene ribbon could, in principle, be probed by the underlying confined channel. The present hybrid graphene/GaAs nanostructures are promising for the investigation of strong interactions and coherent coupling between the two fundamentally different materials

New approach to the determination phosphorothioate oligonucleotides by ultra high performance liquid chromatography coupled with inductively coupled plasma mass spectrometry.

Science.gov (United States)

Studzińska, Sylwia; Mounicou, Sandra; Szpunar, Joanna; Łobiński, Ryszard; Buszewski, Bogusław

2015-01-15

This text presents a novel method for the separation and detection of phosphorothioate oligonucleotides with the use of ion pair ultra high performance liquid chromatography coupled with inductively coupled plasma mass spectrometry The research showed that hexafluoroisopropanol/triethylamine based mobile phases may be successfully used when liquid chromatography is coupled with such elemental detection. However, the concentration of both HFIP and TEA influences the final result. The lower concentration of HFIP, the lower the background in ICP-MS and the greater the sensitivity. The method applied for the analysis of serum samples was based on high resolution inductively coupled plasma mass spectrometry. Utilization of this method allows determination of fifty times lower quantity of phosphorothioate oligonucleotides than in the case of quadrupole mass analyzer. Monitoring of (31)P may be used to quantify these compounds at the level of 80 μg L(-1), while simultaneous determination of sulfur is very useful for qualitative analysis. Moreover, the results presented in this paper demonstrate the practical applicability of coupling LC with ICP-MS in determining phosphorothioate oligonucleotides and their metabolites in serum within 7 min with a very good sensitivity. The method was linear in the concentration range between 0.2 and 3 mg L(-1). The limit of detection was in the range of 0.07 and 0.13 mg L(-1). Accuracy varied with concentration, but was in the range of 3%. Copyright © 2014 Elsevier B.V. All rights reserved.

Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition

International Nuclear Information System (INIS)

Tinck, S; Bogaerts, A

2011-01-01

In this paper, an O 2 inductively coupled plasma used for plasma enhanced atomic layer deposition of Al 2 O 3 thin films is investigated by means of modeling. This work intends to provide more information about basic plasma properties such as species densities and species fluxes to the substrate as a function of power and pressure, which might be hard to measure experimentally. For this purpose, a hybrid model developed by Kushner et al is applied to calculate the plasma characteristics in the reactor volume for different chamber pressures ranging from 1 to 10 mTorr and different coil powers ranging from 50 to 500 W. Density profiles of the various oxygen containing plasma species are reported as well as fluxes to the substrate under various operating conditions. Furthermore, different orientations of the substrate, which can be placed vertically or horizontally in the reactor, are taken into account. In addition, special attention is paid to the recombination process of atomic oxygen on the different reactor walls under the stated operating conditions. From this work it can be concluded that the plasma properties change significantly in different locations of the reactor. The plasma density near the cylindrical coil is high, while it is almost negligible in the neighborhood of the substrate. Ion and excited species fluxes to the substrate are found to be very low and negligible. Finally, the orientation of the substrate has a minor effect on the flux of O 2 , while it has a significant effect on the flux of O. In the horizontal configuration, the flux of atomic oxygen can be up to one order of magnitude lower than in the vertical configuration.

Plasma density measurement with ring-type cutoff probe

International Nuclear Information System (INIS)

Kim, D.W.; You, S.J.; Na, B.K.; Kim, J.H.; Shin, Y.H.; Chang, H.Y.; Oh, W.Y.

2013-01-01

We proposed a cutoff probe with a ring-type detection tip enclosing a bar-type radiation tip. A comparative study between a proposed ring-type cutoff (RTC) probe and a conventional bar-type cutoff (BTC) probe showed that the RTC probe solved the problem of the BTC probe, the large measurement uncertainty of the electron density in a capacitively coupled plasma source. This improved characteristics of the RTC probe might have originated from the geometrical structure of the RTC probe concerning the monopole antennae radiation. This proposed cutoff probe can be expected to expand the applicable diagnostic range and to enhance the sensitivity of the cutoff probe. - Highlights: ► A cutoff probe with a ring type detection tip is proposed. ► Comparative experiment and simulation were conducted. ► The proposed probe showed a small uncertainty of measured plasma density. ► Improved characteristics might be originated from the geometrical structure

Efficiency of Capacitively Loaded Converters

DEFF Research Database (Denmark)

Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.

2012-01-01

This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters...... is introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

Capacitance of circular patch resonator

International Nuclear Information System (INIS)

Miano, G.; Verolino, L.; Naples Univ.; Panariello, G.; Vaccaro, V.G.; Naples Univ.

1995-11-01

In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants

Surface reactions during low-k etching using H2/N2 plasma

International Nuclear Information System (INIS)

Fukasawa, Masanaga; Tatsumi, Tetsuya; Oshima, Keiji; Nagahata, Kazunori; Uchida, Saburo; Takashima, Seigo; Hori, Masaru; Kamide, Yukihiro

2008-01-01

We investigated the relationship between the hard mask faceting that occurs during organic low-k etching and the ion energy distribution function of a capacitively coupled plasma reactor. We minimized the hard mask faceting by precisely controlling the ion energy. This precise control was obtained by selecting the optimum bottom frequency and bias power. We measured the amount of damage done to a SiOCH film exposed to H 2 /N 2 plasma in order to find the H 2 /N 2 ratio at which the plasma caused the least damage. The amount of moisture uptake by the damaged SiOCH film is the dominant factor controlling the dielectric constant increase (Δk). To suppress Δk, the incident ion species and ion energies have to be precisely controlled. This reduces the number of adsorption sites in the bulk SiOCH and maintains the hydrophobic surface that suppresses water permeation during air exposure

A radio-frequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen

International Nuclear Information System (INIS)

Moravej, M.; Yang, X.; Hicks, R.F.; Penelon, J.; Babayan, S.E.

2006-01-01

A capacitively coupled, atmospheric pressure plasma has been developed that produces a high concentration of reactive species at a gas temperature below 300 deg. C. The concentration of ground-state oxygen atoms produced by the discharge was measured by NO titration, and found to equal 1.2 vol %, or 1.2±0.4x10 17 cm -3 , using 6.0 vol % O 2 in argon at 150 W/cm 3 . The ozone concentration determined at the same conditions was 4.3±0.5x10 14 cm -3 . A model of the gas phase reactions was developed and yielded O atom and O 3 concentrations in agreement with experiment. This plasma source etched Kapton registered at 5.0 μm/s at 280 deg. C and an electrode-to-sample spacing of 1.5 cm. This fast etch rate is attributed to the high O atom flux generated by the plasma source

Inductively coupled plasma source mass spectrometry

International Nuclear Information System (INIS)

Price Russ, G. III

1993-01-01

Inductively coupled plasma source mass spectrometry (ICP-MS) is a relatively new (5 y commercial availability) technique for simultaneously determining the concentration and isotopic composition of a large number of elements at trace levels. The principle advantages of ICP-MS are the ability to measure essentially all the metallic elements at concentrations as low as 1 part in 10 12 by weight, to analyse aqueous samples directly, to determine the isotopic composition of essentially all the metallic elements, and to analyse samples rapidly (minutes). The history of the development of ICP-MS and discussions of a variety of applications have been discussed in detail in Date and Gray (1988). Koppenaal (1988, 1990) has reviewed the ICP-MS literature. In that ICP-MS is a relatively new and still evolving technique, this chapter will discuss potential capability more than proven performance. (author). 24 refs

Interfacing capillary electrophoresis with inductively coupled plasma mass spectrometry by direct injection nebulization for selenium speciation

DEFF Research Database (Denmark)

Bendahl, Lars; Gammelgaard, Bente; Jons, O.

2001-01-01

A demountable direct injection high efficiency nebulizer operating at low sample uptake rates was developed and used for coupling of capillary electrophoresis (CE) with inductively coupled plasma mass spectrometry (ICP-MS). When the nebulizer was used for continuous sample introduction, detection...

Improvement of NiMoNb to polyimide adhesion by inductively coupled nitrogen plasma treatment

Energy Technology Data Exchange (ETDEWEB)

Bang, S.-H., E-mail: zxclucy@snu.ac.kr

2016-01-01

Graphical abstract: - Highlights: • NiMoNb was introduced as the adhesion layer for flexible Cu-clad laminate structure. • The effect of sputtering and plasma power on the peel strength was studied. • Plasma pretreatment in inductively coupled plasma greatly affects the peel strength. • FCCL with NiMoNb adhesion layer show outstanding peel strength. - Abstract: In this study, the effect of sputtering power on the peel strength of the flexible copper clad laminate (FCCL) was evaluated before and after heat treatment using 180° peel test. An increase in the sputtering powers from 200 W to 600 W increased film density and improved peel strength. To enhance peel strength much more, an inductively coupled plasma (ICP) was treated on the PI surface using N{sub 2} gas with Ar as a function of RF power. A dramatic enhancement of the peel strength, 923 N/m was achieved, especially after heat treatment by changing ICP power from 200 W to 900 W. The reduction ratio of the peel strength for the 900 W plasma-treated FCCL was only 12%, whereas that for the 200 W plasma-treated FCCL was 43%. The root mean square (RMS) surface roughness with PIs exposed to both 200 W and 900 W plasma treatments was rarely changed, while X-ray photoelectron spectroscopy (XPS) showed the substantial increase of C–N functional groups. To obtain insight the film characteristics, the NiMoNb/PI interfaces were investigated by a high resolution transmission electron microscopy (HR-TEM).

Diagnostics of capacitively-coupled hydrocarbon plasmas for deposition of diamond-like carbon films using quadrupole mass spectrometry and Langmuir probe

Science.gov (United States)

Oda, Akinori; Fukai, Shun; Kousaka, Hiroyuki; Ohta, Takayuki

2015-09-01

Diamond-like carbon (DLC) films are the hydrogenated amorphous carbon films, which contains a mixture of sp2- and sp3-bonded carbon. The DLC films have been widely used for various applications, such as automotive, semiconductors, medical devices, since have excellent material properties in lower friction, higher chemical stability, higher hardness, higher wear resistance. Until now, numerous investigations on the DLC films using plasma assisted chemical vapor deposition have been done. For precise control of coating technique of DLC films, it is enormously important to clarify the fundamental properties in hydrocarbon plasmas, as a source of hydrocarbon ions and radicals. In this paper, the fundamental properties in a low pressure radio-frequency hydrocarbon (Ar/CH4 (1 %) gas mixture) plasmas have been diagnosed using a quadrupole mass spectrometer (HIDEN ANARYTICAL Ltd., EQP-300) and Langmuir probe system (HIDEN ANARYTICAL Ltd., ESPion). This work was partly supported by KAKENHI (No.26420247), and a ``Grant for Advanced Industrial Technology Development (No.11B06004d)'' in 2011 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan.

Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

DEFF Research Database (Denmark)

Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole

2009-01-01

This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sensor...... bonding to create vacuum cavities. The exposed part of the sensor is perfectly flat such that it can be coated with corrosion resistant thin films. Hysteresis is an inherent problem in touch mode capacitive pressure sensors and a technique to significantly reduce it is presented....... with a discrete components electronics circuit for signal conditioning. Using an AC bridge electronics circuit a resolution of 8 mV/mbar is achieved. The large signal is obtained due to a novel membrane structure utilizing closely packed hexagonal elements. The sensor is fabricated in a process based on fusion...

Stable explicit coupling of the Yee scheme with a linear current model in fluctuating magnetized plasmas

International Nuclear Information System (INIS)

Silva, Filipe da; Pinto, Martin Campos; Després, Bruno; Heuraux, Stéphane

2015-01-01

This work analyzes the stability of the Yee scheme for non-stationary Maxwell's equations coupled with a linear current model with density fluctuations. We show that the usual procedure may yield unstable scheme for physical situations that correspond to strongly magnetized plasmas in X-mode (TE) polarization. We propose to use first order clustered discretization of the vectorial product that gives back a stable coupling. We validate the schemes on some test cases representative of direct numerical simulations of X-mode in a magnetic fusion plasma including turbulence

Line photon transport in a non-homogeneous plasma using radiative coupling coefficients

International Nuclear Information System (INIS)

Florido, R.; Gil, J.M.; Rodriguez, R.; Rubiano, J.G.; Martel, P.; Florido, R.; Gil, J.M.; Rodriguez, R.; Rubiano, J.G.; Martel, P.; Minguez, E.

2006-01-01

We present a steady-state collisional-radiative model for the calculation of level populations in non-homogeneous plasmas with planar geometry. The line photon transport is taken into account following an angle- and frequency-averaged escape probability model. Several models where the same approach has been used can be found in the literature, but the main difference between our model and those ones is that the details of geometry are exactly treated in the definition of coupling coefficients and a local profile is taken into account in each plasma cell. (authors)

Capacitive Biosensors and Molecularly Imprinted Electrodes.

Science.gov (United States)

Ertürk, Gizem; Mattiasson, Bo

2017-02-17

Capacitive biosensors belong to the group of affinity biosensors that operate by registering direct binding between the sensor surface and the target molecule. This type of biosensors measures the changes in dielectric properties and/or thickness of the dielectric layer at the electrolyte/electrode interface. Capacitive biosensors have so far been successfully used for detection of proteins, nucleotides, heavy metals, saccharides, small organic molecules and microbial cells. In recent years, the microcontact imprinting method has been used to create very sensitive and selective biorecognition cavities on surfaces of capacitive electrodes. This chapter summarizes the principle and different applications of capacitive biosensors with an emphasis on microcontact imprinting method with its recent capacitive biosensor applications.

A microfabricated fringing field capacitive pH sensor with an integrated readout circuit

International Nuclear Information System (INIS)

Arefin, Md Shamsul; Redoute, Jean-Michel; Rasit Yuce, Mehmet; Bulut Coskun, M.; Alan, Tuncay; Neild, Adrian

2014-01-01

This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0–5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.

A microfabricated fringing field capacitive pH sensor with an integrated readout circuit

Energy Technology Data Exchange (ETDEWEB)

Arefin, Md Shamsul, E-mail: md.arefin@monash.edu; Redoute, Jean-Michel; Rasit Yuce, Mehmet [Electrical and Computer Systems Engineering, Monash University, Melbourne (Australia); Bulut Coskun, M.; Alan, Tuncay; Neild, Adrian [Mechanical and Aerospace Engineering, Monash University, Melbourne (Australia)

2014-06-02

This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0–5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.

Sterilization of beehive material with a double inductively coupled low pressure plasma

International Nuclear Information System (INIS)

Priehn, M; Leichert, L I; Denis, B; Awakowicz, P; Aumeier, P; Kirchner, W H

2016-01-01

American Foulbrood is a severe, notifiable disease of the honey bee. It is caused by infection of bee larvae with spores of the gram-positive bacterium Paenibacillus larvae . Spores of this organism are found in high numbers in an infected hive and are highly resistant to physical and chemical inactivation methods. The procedures to rehabilitate affected apiaries often result in the destruction of beehive material. In this study we assess the suitability of a double inductively coupled low pressure plasma as a non-destructive, yet effective alternative inactivation method for bacterial spores of the model organism Bacillus subtilis on beehive material. Plasma treatment was able to effectively remove spores from wax, which, under protocols currently established in veterinary practice, normally is destroyed by ignition or autoclaved for sterilization. Spores were removed from wooden surfaces with efficacies significantly higher than methods currently used in veterinary practice, such as scorching by flame treatment. In addition, we were able to non-destructively remove spores from the highly delicate honeycomb wax structures, potentially making treatment of beehive material with double inductively coupled low pressure plasma part of a fast and reliable method to rehabilitate infected bee colonies with the potential to re-use honeycombs. (paper)

Initial design for an experimental investigation of strongly coupled plasma behavior in the ATLAS facility

CERN Document Server

Munson, C P; Taylor, A J; Trainor, R J; Wood, B P; Wysocki, F J

1999-01-01

Summary form only given. Atlas is a high current (~30 MA peak, with a current risetime ~4.5 mu sec), high energy (E/sub stored/=24 MJ, E /sub load/=3-6 MJ), pulsed power facility which is being constructed at Los Alamos National Laboratory with a scheduled completion date in the year 2000. When operational, this facility will provide a platform for experiments in high pressure shocks (>20 Mbar), adiabatic compression ( rho / rho /sub 0/>5, P>10 Mbar), high magnetic fields (~2000 T), high strain and strain rates ( epsilon >200, d epsilon /dt~10/sup 4/ to 10/sup 6/ s/sup -1/), hydrodynamic instabilities of materials in turbulent regimes, magnetized target fusion, equation of state, and strongly coupled plasmas. For the strongly coupled plasma experiments, an auxiliary capacitor bank will be used to generate a moderate density (<0.1 solid), relatively cold (~1 eV) plasma by ohmic heating of a conducting material of interest such as titanium. This target plasma will be compressed against a central column conta...

Atlas of atomic spectral lines of plutonium emitted by an inductively coupled plasma

Energy Technology Data Exchange (ETDEWEB)

Edelson, M.C.; DeKalb, E.L.; Winge, R.K.; Fassel, V.A.

1986-09-01

Optical emission spectra from high-purity Pu-242 were generated with a glovebox-enclosed inductively coupled plasma (ICP) source. Spectra covering the 2280 to 7008 Angstrom wavelength range are presented along with general commentary on ICP-Pu spectroscopy.

Separation and analysis of lanthanides by isotachophoresis coupled with inductively coupled plasma mass spectrometry

International Nuclear Information System (INIS)

Vio, Laurent; Cretier, Gerard; Rocca, Jean-Louis; Chartier, Frederic; Geertsen, Valerie; Gourgiotis, Alkiviadis; Isnard, Helene

2012-01-01

This study is a large project initiated by the French Nuclear Agency, and concerns the development of a new electrolyte system for the separation of lanthanides by isotachophoresis. This new system is based on a leading electrolyte that incorporates 2-hydroxy-2-methylbutyric acid as complexing agent. The optimization of separation conditions (complexing agent concentration, pH, capillary dimensions, injection conditions, and current intensity) performed by experiments on a commercial capillary instrument with contactless conductivity detection, which allows to improve the separation of 13 lanthanides (La to Lu, except Pm and Ho). We have also directly coupled the isotachophoresis to an inductively coupled plasma mass spectrometer to visualize the mono-elementary elution bands and demonstrate the potentiality of the method for isotope ratio measurements. The application to a simulated solution representative of a fraction of fission products present in a MOX spent fuel is presented in this paper to demonstrate the possible application in future on nuclear fuel samples. (authors)

Nanoscale capacitance: A quantum tight-binding model

Science.gov (United States)

Zhai, Feng; Wu, Jian; Li, Yang; Lu, Jun-Qiang

2017-01-01

Landauer-Buttiker formalism with the assumption of semi-infinite electrodes as reservoirs has been the standard approach in modeling steady electron transport through nanoscale devices. However, modeling dynamic electron transport properties, especially nanoscale capacitance, is a challenging problem because of dynamic contributions from electrodes, which is neglectable in modeling macroscopic capacitance and mesoscopic conductance. We implement a self-consistent quantum tight-binding model to calculate capacitance of a nano-gap system consisting of an electrode capacitance C‧ and an effective capacitance Cd of the middle device. From the calculations on a nano-gap made of carbon nanotube with a buckyball therein, we show that when the electrode length increases, the electrode capacitance C‧ moves up while the effective capacitance Cd converges to a value which is much smaller than the electrode capacitance C‧. Our results reveal the importance of electrodes in modeling nanoscale ac circuits, and indicate that the concepts of semi-infinite electrodes and reservoirs well-accepted in the steady electron transport theory may be not applicable in modeling dynamic transport properties.

Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development

International Nuclear Information System (INIS)

Guermat, N.; Bellel, A.; Sahli, S.; Segui, Y.; Raynaud, P.

2009-01-01

The response of resistive-type sensors based on thin hexamethyldisiloxane layers to relative humidity (RH) was evaluated. Humidity sensitive layers were plasma polymerized at low frequency glow discharge using a capacitively coupled parallel plate reactor. The sensor design comprises the absorbing layer deposited on clean glass substrate with comb-shape aluminum electrodes (interdigitated structure). The change in electrical impedance of the sensing film was monitored as the device was exposed to humidity. The variation of the plasma-polymerization parameters resulted in different humidity sensing properties which could be correlated to the results of Fourier transform infrared spectroscopy (FTIR). The deposited films exhibited a detectable response to RH ranging from 30 to 95% with low hysteresis, good reproducibility and stability in long-term use. Films with a greater thickness showed a significant decrease in the humidity sensing capability. FTIR analysis revealed the presence of SiH bonding groups, which are frequently linked to the film density. The increase in the plasma discharge power induced also a significant decrease in the diffusion process of water vapor inside the sensitive layer bulk.

The collisional capacitive RF sheath and the assumption of a sharp electron edge

Science.gov (United States)

Brinkmann, Ralf Peter

2008-10-01

The transition from quasi-neutrality to charge depletion is one of the characteristic features of the plasma boundary sheath. It is often described in terms of the so-called step model which assumes a transition point (electron step) where the electron density drops from a value equal to the ion density (in the bulk) to a value of zero (in the sheath). Inserted into Poisson's equation, the step model yields an expression for the field which is realistic deep in the sheath but fails to merge correctly into the ambipolar field of the bulk. This work studies the consequences of that approximation for the example of the collision-dominated, capacitive RF sheath by Lieberman [1]. First, the model is solved exactly, using a relaxation scheme. Then, the step approximation is applied which recovers Lieberman's semi-analytical solution. It is demonstrated that the step approximation induces a spurious divergence of the ion density at the sheath edge and prevents a matching of the sheath model to a bulk model. Integral sheath quantities, on the other hand, like the capacitance or the overall voltage drop, are faithfully reproduced. [1] M. A. Lieberman, IEEE Trans. Plasma Sci. 16, pp. 638-644 (1988).

Capacitive Sensing of Glucose in Electrolytes Using Graphene Quantum Capacitance Varactors.

Science.gov (United States)

Zhang, Yao; Ma, Rui; Zhen, Xue V; Kudva, Yogish C; Bühlmann, Philippe; Koester, Steven J

2017-11-08

A novel graphene-based variable capacitor (varactor) that senses glucose based on the quantum capacitance effect was successfully developed. The sensor utilizes a metal-oxide-graphene varactor device structure that is inherently compatible with passive wireless sensing, a key advantage for in vivo glucose sensing. The graphene varactors were functionalized with pyrene-1-boronic acid (PBA) by self-assembly driven by π-π interactions. Successful surface functionalization was confirmed by both Raman spectroscopy and capacitance-voltage characterization of the devices. Through glucose binding to the PBA, the glucose concentration in the buffer solutions modulates the level of electrostatic doping of the graphene surface to different degrees, which leads to capacitance changes and Dirac voltage shifts. These responses to the glucose concentration were shown to be reproducible and reversible over multiple measurement cycles, suggesting promise for eventual use in wireless glucose monitoring.

Morphological, elemental, and optical characterization of plasma polymerized n-butyl methacrylate thin films

Science.gov (United States)

Nasrin, Rahima; Hossain, Khandker S.; Bhuiyan, A. H.

2018-05-01

Plasma polymerized n-butyl methacrylate (PPnBMA) thin films of varying thicknesses were prepared at room temperature by AC plasma polymerization system using a capacitively coupled parallel plate reactor. Field-emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), energy-dispersive X-ray (EDX) analysis, and ultraviolet-visible (UV-Vis) spectroscopic investigation have been performed to study the morphological, elemental, and optical properties of the PPnBMA thin films, respectively. The flat and defect-free nature of thin films were confirmed by FESEM and AFM images. With declining plasma power, average roughness and root mean square roughness increase. Allowed direct transition ( E gd) and indirect transition ( E gi) energy gaps were found to be 3.64-3.80 and 3.38-3.45 eV, respectively, for PPnBMA thin films of different thicknesses. Values of E gd as well as E gi increase with the increase of thickness. The extinction coefficient, Urbach energy, and steepness parameter were also determined for these thin films.

Effect of wettability and surface roughness on the adhesion properties of collagen on PDMS films treated by capacitively coupled oxygen plasma

Energy Technology Data Exchange (ETDEWEB)

Juárez-Moreno, J.A. [Centro de Investigación Científica de Yucatán, Calle 43 No. 130, Col. Chuburna de Hidalgo C.P., 97200 Mérida, Yucatán (Mexico); Ávila-Ortega, A. [Facultad de Ingeniería Química—UADY, Periférico Norte Kilómetro 33.5, Col. Chuburna de Hidalgo Inn, C.P. , 97203 Mérida, Yucatán (Mexico); Oliva, A.I. [Centro de Investigación y de Estudios Avanzados del IPN–Unidad Mérida, Km. 6 Antigua carretera a Progreso Apdo. Postal 73, Cordemex, 97310 Mérida, Yucatán (Mexico); Avilés, F. [Centro de Investigación Científica de Yucatán, Calle 43 No. 130, Col. Chuburna de Hidalgo C.P., 97200 Mérida, Yucatán (Mexico); Cauich-Rodríguez, J.V., E-mail: jvcr@cicy.mx [Centro de Investigación Científica de Yucatán, Calle 43 No. 130, Col. Chuburna de Hidalgo C.P., 97200 Mérida, Yucatán (Mexico)

2015-09-15

Highlights: • Plasma treatment was used as an adhesive tool for PDMS/collagen composite preparation. • Response surface methodology was used for statistical optimization. • A microscopic roughness can also lead to a mechanical interlocking between materials. • Hydroxyl groups on the PDMS surface contribute to the enhanced chemical interactions. • PDMS/collagen composite obtained by plasma treatment exhibited higher peel strength. - Abstract: Direct chemical bonding of biomolecules to the surface of chemically inert polymers such as polydimethylsiloxane (PDMS) is not easily achieved. Therefore, pre-activation of such materials, followed by attachment of the biomolecule is necessary. This paper describes a procedure to functionalize a PDMS surface by oxygen-based plasma followed by the adhesion of collagen type I for the preparation of adhesive-free bilayer composite intended as skin substitute. Plasma treatments between 40 and 120 W for 5 to 15 min were used and the extent of surface modification was followed by contact angle, Fourier transform infrared (FTIR) spectroscopy, atomic force microscopy (AFM), scanning electron microscopy (SEM) and adhesion test. It was found that as the plasma power and time were increased, PDMS contact angle decreased while surface roughness increased as revealed by SEM and AFM. The formation of oxygen-containing functional groups at the surface was detected by FTIR. T-peel tests, performed on PDMS treated at 80 W/13 min and covered with collagen showed maximum peel strength of 0.1 N/mm which was 3 times higher than that measured for the untreated bilayer composite. The observed enhancement in the adhesion strength was attributed to the increased mechanical interlocking driven by the increased roughness and the formation of hydrophilic functional groups.

Effect of wettability and surface roughness on the adhesion properties of collagen on PDMS films treated by capacitively coupled oxygen plasma

International Nuclear Information System (INIS)

Juárez-Moreno, J.A.; Ávila-Ortega, A.; Oliva, A.I.; Avilés, F.; Cauich-Rodríguez, J.V.

2015-01-01

Highlights: • Plasma treatment was used as an adhesive tool for PDMS/collagen composite preparation. • Response surface methodology was used for statistical optimization. • A microscopic roughness can also lead to a mechanical interlocking between materials. • Hydroxyl groups on the PDMS surface contribute to the enhanced chemical interactions. • PDMS/collagen composite obtained by plasma treatment exhibited higher peel strength. - Abstract: Direct chemical bonding of biomolecules to the surface of chemically inert polymers such as polydimethylsiloxane (PDMS) is not easily achieved. Therefore, pre-activation of such materials, followed by attachment of the biomolecule is necessary. This paper describes a procedure to functionalize a PDMS surface by oxygen-based plasma followed by the adhesion of collagen type I for the preparation of adhesive-free bilayer composite intended as skin substitute. Plasma treatments between 40 and 120 W for 5 to 15 min were used and the extent of surface modification was followed by contact angle, Fourier transform infrared (FTIR) spectroscopy, atomic force microscopy (AFM), scanning electron microscopy (SEM) and adhesion test. It was found that as the plasma power and time were increased, PDMS contact angle decreased while surface roughness increased as revealed by SEM and AFM. The formation of oxygen-containing functional groups at the surface was detected by FTIR. T-peel tests, performed on PDMS treated at 80 W/13 min and covered with collagen showed maximum peel strength of 0.1 N/mm which was 3 times higher than that measured for the untreated bilayer composite. The observed enhancement in the adhesion strength was attributed to the increased mechanical interlocking driven by the increased roughness and the formation of hydrophilic functional groups

Sheath heating in low-pressure capacitive radio frequency discharges

International Nuclear Information System (INIS)

Wood, B.P.

1991-01-01

Capacitively coupled, parallel plate, r.f. discharges are commonly used for materials processing. The electrons in such a discharge gain and lose energy by reflection from the oscillating sheaths which form at the electrodes. Previous models of the electron heating by this mechanism have assumed that the sheath motion is slow compared to the electron thermal velocity, so that the electron energy change from each reflection is small. Here, the heating rate, density, and sheath width relations are derived analytically in the limit of very fast sheath motion. Numerical results are presented spanning the slow and fast limits. Results from particle-in-cell simulations show that in the large-energy-change regime, an electron beam is produced on each sheath expansion. At low pressure, this beam can traverse the plasma and interact with the sheath at the opposite electrode, producing a beam energy and density dependence on the length of the discharge. The beam produces a time and space varying warm tail on the electron energy distribution. Two revised heating models are derived, assuming power-law and two-temperature electron energy distributions, with temporal variation in electron temperature. These revised models yield new predictions for the variation of the power, density, and sheath thickness with applied r.f. voltage. These predictions are compared with simulation results and laboratory experiment. The electron sheath motion is investigated experimentally by observing the signal on a floating probe in the sheath region. This is compared to the signal product by a non-linear circuit model which accounts for the perturbation of the sheath potential by the probe and includes various forms of sheath motion. The experimental observations are consistent with the analytical predictions. Experimental observations of plasma-sheath resonance oscillations are presented which agree with analytical predictions

Quantum screening effects on the electron-ion occurrence scattering time advance in strongly coupled semiclassical plasmas

International Nuclear Information System (INIS)

Song, Mi-Young; Jung, Young-Dae

2003-01-01

Quantum screening effects on the occurrence scattering time advance for elastic electron-ion collisions in strongly coupled semiclassical plasmas are investigated using the second-order eikonal analysis. The electron-ion interaction in strongly coupled semiclassical plasmas is obtained by the pseudopotential model taking into account the plasma screening and quantum effects. It is found that the quantum-mechanical effects significantly reduce the occurrence scattering time advance. It is also found that the occurrence scattering time advance increases with increasing Debye length. It is quite interesting to note that the domain of the maximum occurrence time advance is localized for the forward scattering case. The region of the scaled thermal de Broglie wave length (λ-bar) for the maximum occurrence time advance is found to be 0.4≤λ-bar≤1.4

Assessment of high precision, high accuracy Inductively Coupled Plasma-Optical Emission Spectroscopy to obtain concentration uncertainties less than 0.2% with variable matrix concentrations

International Nuclear Information System (INIS)

Rabb, Savelas A.; Olesik, John W.

2008-01-01

The ability to obtain high precision, high accuracy measurements in samples with complex matrices using High Performance Inductively Coupled Plasma-Optical Emission Spectroscopy (HP-ICP-OES) was investigated. The Common Analyte Internal Standard (CAIS) procedure was incorporated into the High Performance Inductively Coupled Plasma-Optical Emission Spectroscopy method to correct for matrix-induced changes in emission intensity ratios. Matrix matching and standard addition approaches to minimize matrix-induced errors when using High Performance Inductively Coupled Plasma-Optical Emission Spectroscopy were also assessed. The High Performance Inductively Coupled Plasma-Optical Emission Spectroscopy method was tested with synthetic solutions in a variety of matrices, alloy standard reference materials and geological reference materials

Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations

International Nuclear Information System (INIS)

Vahedi, V.; Birdsall, C.K.; Lieberman, M.A.; DiPeso, G.; Rognlien, T.D.

1993-01-01

Weakly ionized processing plasmas are studied in two dimensions using a bounded particle-in-cell (PIC) simulation code with a Monte Carlo collision (MCC) package. The MCC package models the collisions between charged and neutral particles, which are needed to obtain a self-sustained plasma and the proper electron and ion energy loss mechanisms. A two-dimensional capacitive radio-frequency (rf) discharge is investigated in detail. Simple frequency scaling laws for predicting the behavior of some plasma parameters are derived and then compared with simulation results, finding good agreements. It is found that as the drive frequency increases, the sheath width decreases, and the bulk plasma becomes more uniform, leading to a reduction of the ion angular spread at the target and an improvement of ion dose uniformity at the driven electrode

Inductively coupled plasma emission spectroscopy. Part II: applications and fundamentals. Volume 2

International Nuclear Information System (INIS)

Boumans, P.W.J.M.

1987-01-01

This is the second part of the two-volume treatise by this well-known and respected author. This volume reviews applications of inductively coupled plasma atomic emission spectroscopy (ICP-AES), summarizes fundamental studies, and compares ICP-AES methods with other methods of analysis. The first six chapters are devoted to specific fields of application, including the following: metals and other industrial materials, geology, the environment, agriculture and food, biology and clinical analysis, and organic materials. The chapter on the analysis of organic materials also covers the special instrumental considerations required when organic solvents are introduced into an inductively coupled plasma. A chapter on the direct analysis of solids completes the first part of this volume. Each of the applications chapters begins with a summary of the types of samples that are encountered in that field, and the kinds of problems that an elemental analysis can help to solve. This is followed by a tutorial approach covering applicability, advantages, and limitations of the methods. The coverage is thorough, including sample handling, storage, and preparation, acid, and fusion dissolution, avoiding contamination, methods of preconcentration, the types of interferences that can be expected and ways to reduce them, and the types of ICP plasmas that are used. The second half of the volume covers fundamental studies of ICP-AES: basic processes of aerosol generation, plasma modeling and computer simulation, spectroscopic diagnostics, excitation mechanisms, and discharge characteristics. This section introduces the experimental and modeling methods that have been used to obtain fundamental information about ICPs

Determination of trace elements in petroleum products by inductively coupled plasma techniques: A critical review

International Nuclear Information System (INIS)

Sánchez, Raquel; Todolí, José Luis; Lienemann, Charles-Philippe; Mermet, Jean-Michel

2013-01-01

The fundamentals, applications and latter developments of petroleum products analysis through inductively coupled plasma optical emission spectrometry (ICP-OES) and mass spectrometry (ICP-MS) are revisited in the present bibliographic survey. Sample preparation procedures for the direct analysis of fuels by using liquid sample introduction systems are critically reviewed and compared. The most employed methods are sample dilution, emulsion or micro-emulsion preparation and sample decomposition. The first one is the most widely employed due to its simplicity. Once the sample has been prepared, an organic matrix is usually present. The performance of the sample introduction system (i.e., nebulizer and spray chamber) depends strongly upon the nature and properties of the solution finally obtained. Many different devices have been assayed and the obtained results are shown. Additionally, samples can be introduced into the plasma by using an electrothermal vaporization (ETV) device or a laser ablation system (LA). The recent results published in the literature showing the feasibility, advantages and drawbacks of latter alternatives are also described. Therefore, the main goal of the review is the discussion of the different approaches developed for the analysis of crude oil and its derivates by inductively coupled plasma (ICP) techniques. - Highlights: • Analysis of petroleum products by inductively coupled plasma techniques is revisited. • Fundamental studies are included together with reports dealing with applications. • Conventional and non-conventional sample introduction methods are considered. • Sample preparation methods are critically compared and described

Room temperature inductively coupled plasma etching of InAs/InSb in BCl 3/Cl 2/Ar

KAUST Repository

Sun, Jian; Kosel, Jü rgen

2012-01-01

Inductively coupled plasma (ICP) etching of InAs and InSb at room temperature has been investigated using BCl 3/Cl 2/Ar plasma. Specifically, the etch rate and post-etching surface morphology were investigated as functions of the gas composition

Flow injection analysis in inductively coupled plasma spectrometry

International Nuclear Information System (INIS)

Rosias, Maria F.G.G.

1995-10-01

The main features of flow injection analysis (FIA) as contribution to the inductively coupled plasma (Icp) spectrometry are described. A systematic review of researches using the combined FIA-Icp and the benefits of this association are presented. Flow systems were proposed to perform on-line Icp solution management for multielemental determination by atomic emission spectrometry (Icp-AES) or mass spectrometry. The inclusion of on-line ion exchangers in flow systems for matrix separation and/or analyte preconcentration are presented. Together with those applications the new advent of instruments with facilities for multielement detection on flow injection signals are described. (author). 75 refs., 19 figs

Drag force in a strongly coupled anisotropic plasma

Science.gov (United States)

Chernicoff, Mariano; Fernández, Daniel; Mateos, David; Trancanelli, Diego

2012-08-01

We calculate the drag force experienced by an infinitely massive quark propagating at constant velocity through an anisotropic, strongly coupled {N} = 4 plasma by means of its gravity dual. We find that the gluon cloud trailing behind the quark is generally misaligned with the quark velocity, and that the latter is also misaligned with the force. The drag coefficient μ can be larger or smaller than the corresponding isotropic value depending on the velocity and the direction of motion. In the ultra-relativistic limit we find that generically μ ∝ p. We discuss the conditions under which this behaviour may extend to more general situations.

A method for studies on interactions between a gold-based drug and plasma proteins based on capillary electrophoresis with inductively coupled plasma mass spectrometry detection

DEFF Research Database (Denmark)

Nguyen, Tam T T N; Østergaard, Jesper; Gammelgaard, Bente

2015-01-01

An analytical method based on capillary electrophoresis (CE) and inductively coupled plasma mass spectrometry (ICP-MS) detection was developed for studies on the interaction of gold-containing drugs and plasma proteins using auranofin as example. A detection limit of 18 ng/mL of auranofin corresp...

Viscosity calculated in simulations of strongly coupled dusty plasmas with gas friction

International Nuclear Information System (INIS)

Feng Yan; Goree, J.; Liu Bin

2011-01-01

A two-dimensional strongly coupled dusty plasma is modeled using Langevin and frictionless molecular dynamical simulations. The static viscosity η and the wave-number-dependent viscosity η(k) are calculated from the microscopic shear in the random motion of particles. A recently developed method of calculating the wave-number-dependent viscosity η(k) is validated by comparing the results of η(k) from the two simulations. It is also verified that the Green-Kubo relation can still yield an accurate measure of the static viscosity η in the presence of a modest level of friction as in dusty plasma experiments.

Characterization of a rotating nanoparticle cloud in an inductively coupled plasma

International Nuclear Information System (INIS)

Schulze, M; Keudell, A von; Awakowicz, P

2006-01-01

Carbon clusters with diameters in the range of 10 to 50 nm are produced by injecting pulses of acetylene into an inductively coupled plasma in argon and helium. The injection causes plasma instability, which becomes visible as an oscillation of the emission intensity. The frequency of this oscillation can be uniquely correlated to the particle diameter. Consequently, the measurement of the oscillation frequency represents a method to determine particle diameters in situ. The oscillation corresponds to the rotation of a localized plasmoid and a particle cloud around the symmetry axis of the reactor. It is assumed that this rotation is driven by the ion wind crossing the interface between the plasmoid and the particle cloud

Aerosol Vacuum-Assisted Plasma Ionization (Aero-VaPI) Coupled to Ion Mobility-Mass Spectrometry

Science.gov (United States)

Blair, Sandra L.; Ng, Nga L.; Zambrzycki, Stephen C.; Li, Anyin; Fernández, Facundo M.

2018-02-01

In this communication, we report on the real-time analysis of organic aerosol particles by Vacuum-assisted Plasma Ionization-Mass Spectrometry (Aero-VaPI-MS) using a home-built VaPI ion source coupled to a Synapt G2-S HDMS ion mobility-mass spectrometry (IM-MS) system. Standards of organic molecules of interest in prebiotic chemistry were used to generate aerosols. Monocaprin and decanoic acid aerosol particles were successfully detected in both the positive and negative ion modes, respectively. A complex aerosol mixture of different sizes of polymers of L-malic acid was also examined through ion mobility (IM) separations, resulting in the detection of polymers of up to eight monomeric units. This noncommercial plasma ion source is proposed as a low cost alternative to other plasma ionization platforms used for aerosol analysis, and a higher-performance alternative to more traditional aerosol mass spectrometers. VaPI provides robust online ionization of organics in aerosols without extensive ion activation, with the coupling to IM-MS providing higher peak capacity and excellent mass accuracy. [Figure not available: see fulltext.

Response to capacitating stimuli indicates extender-related differences in boar sperm function.

Science.gov (United States)

Schmid, S; Henning, H; Petrunkina, A M; Weitze, K F; Waberski, D

2013-10-01

Spermatozoa, especially those of the porcine species, are highly susceptible to in vitro chilling and ageing. Extenders are continuously developed to protect boar spermatozoa from chilling injury. New semen extenders and other modified preservation strategies require sensitive testing for essential sperm functions. The key process on the pathway of fertilization is capacitation. The aim of the present study was to examine whether the specific response to capacitating stimuli is sensitive enough to indicate different preservation capacities of extenders during hypothermic storage of boar spermatozoa. Semen was diluted in Beltsville Thawing Solution (BTS) and Androstar Plus and kept for 3 h at 22°C or stored at 17°C, 10°C, and 5°C. Semen was analyzed at 24 and 96 h of storage. Motility and membrane integrity remained at high levels, except for lower values when stored in BTS at 5°C. Washed subsamples were incubated in capacitating medium (Tyrode) and control medium and were assessed for intracellular calcium concentration and integrity of plasma membranes using a flow cytometer. On the basis of the loss of low-calcium live cells in a kinetic approach, the specific response to capacitation stimuli was determined. There was a higher loss of response in semen stored hypothermically in the standard extender BTS compared to Androstar Plus. Assessment of the extent of phospholipid disorder under capacitating and control conditions by use of merocyanine staining did not reveal any significant extender-related differences. A field insemination trial with 778 sows was performed to relate in vitro results to fertility. Fertility parameters did not differ in semen stored up to 48 h at 10°C in Androstar Plus compared to controls stored at 17°C in BTS. In conclusion, assessment of specific reactivity to capacitating stimuli appears to be a sensitive tool for detection of extender-dependent alterations in functionality of chilled boar spermatozoa.

The concept of coupling impedance in the self-consistent plasma wake field excitation

International Nuclear Information System (INIS)

Fedele, R.; Akhter, T.; De Nicola, S.; Migliorati, M.; Marocchino, A.; Massimo, F.; Palumbo, L.

2016-01-01

Within the framework of the Vlasov–Maxwell system of equations, we describe the self-consistent interaction of a relativistic charged-particle beam with the surroundings while propagating through a plasma-based acceleration device. This is done in terms of the concept of coupling (longitudinal) impedance in full analogy with the conventional accelerators. It is shown that also here the coupling impedance is a very useful tool for the Nyquist-type stability analysis. Examples of specific physical situations are finally illustrated.

Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

NARCIS (Netherlands)

Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

2014-01-01

Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view,

Overview of plasma technology used in medicine

Science.gov (United States)

Ryan, Thomas P.; Stalder, Kenneth R.; Woloszko, Jean

2013-02-01

Plasma Medicine is a growing field that is having an impact in several important areas in therapeutic patient care, combining plasma physics, biology, and clinical medicine. Historically, plasmas in medicine were used in electrosurgery for cautery and non-contact hemostasis. Presently, non-thermal plasmas have attained widespread use in medicine due to their effectiveness and compatibility with biological systems. The paper will give a general overview of how low temperature, non-equilibrium, gas plasmas operate, both from physics and biology perspectives. Plasma is commonly described as the fourth state of matter and is typically comprised of charged species, active molecules and atoms, as well as a source of UV and photons. The most active areas of plasma technology applications are in wound treatment; tissue regeneration; inactivation of pathogens, including biofilms; treating skin diseases; and sterilization. There are several means of generating plasmas for use in medical applications, including plasma jets, dielectric barrier discharges, capacitively or inductively coupled discharges, or microplasmas. These systems overcome the former constraints of high vacuum, high power requirements and bulky systems, into systems that use room air and other gases and liquids at low temperature, low power, and hand-held operation at atmospheric pressure. Systems will be discussed using a variety of energy sources: pulsed DC, AC, microwave and radiofrequency, as well as the range of frequency, pulse duration, and gas combinations in an air environment. The ionic clouds and reactive species will be covered in terms of effects on biological systems. Lastly, several commercial products will be overviewed in light of the technology utilized, health care problems being solved, and clinical trial results.