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Sample records for bimorph cantilever-actuated peristaltic

  1. Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-10-27

    The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.

  2. Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

    KAUST Repository

    Conchouso Gonzalez, David; Carreno, Armando Arpys Arevalo; Castro, D.; Foulds, Ian G.

    2015-01-01

    This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used

  3. Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

    KAUST Repository

    Conchouso Gonzalez, David

    2015-04-01

    This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.

  4. Performance Analysis of Wind-Induced Piezoelectric Vibration Bimorph Cantilever for Rotating Machinery

    Directory of Open Access Journals (Sweden)

    Gongbo Zhou

    2015-01-01

    Full Text Available Harvesting the energy contained in the running environment of rotating machinery would be a good way to supplement energy to the wireless sensor. In this paper, we take piezoelectric bimorph cantilever beam with parallel connection mode as energy collector and analyze the factors which can influence the generation performance. First, a modal response theory model is built. Second, the static analysis, modal analysis, and piezoelectric harmonic response analysis of the wind-induced piezoelectric bimorph cantilever beam are given in detail. Finally, an experiment is also conducted. The results show that wind-induced piezoelectric bimorph cantilever beam has low resonant frequency and stable output under the first modal mode and can achieve the maximum output voltage under the resonant condition. The output voltage increases with the increase of the length and width of wind-induced piezoelectric bimorph cantilever beam, but the latter increasing amplitude is relatively smaller. In addition, the output voltage decreases with the increase of the thickness and the ratio of metal substrate to piezoelectric patches thickness. The experiment showed that the voltage amplitude generated by the piezoelectric bimorph cantilever beam can reach the value simulated in ANSYS, which is suitable for actual working conditions.

  5. Optimization of piezoelectric bimorph actuators with active damping for static and dynamic loads

    DEFF Research Database (Denmark)

    Donoso, Alberto; Sigmund, Ole

    2009-01-01

    The paper considers optimal design problems in the context of active damping. More specifically, we are interested in controlling the tip-deflection of a cantilever beam subjected to static and time-harmonic loading on its free extreme. First, the thickness profile of a piezoelectric bimorph...... actuator is optimized and second, the width profile. In the thickness study, formulation and results depend on whether the electric field or the applied voltage is kept constant. For the latter case we propose a differentiable model that connects electric field and piezo-actuator thickness to include...

  6. Exploration of Piezoelectric Bimorph Deflection in Synthetic Jet Actuators

    Science.gov (United States)

    Housley, Kevin; Amitay, Michael

    2017-11-01

    The design of piezoelectric bimorphs for synthetic jet actuators could be improved by greater understanding of the deflection of the bimorphs; both their mode shapes and the resulting volume change inside the actuator. The velocity performance of synthetic jet actuators is dependent on this volume change and the associated internal pressure changes. Knowledge of these could aid in refining the geometry of the cavity to improve efficiency. Phase-locked jet velocities and maps of displacement of the surface of the bimorph were compared between actuators of varying diameter. Results from a bimorph of alternate stiffness were also compared. Bimorphs with higher stiffness exhibited a more desirable (0,1) mode shape, which produced a high volume change inside of the actuator cavity. Those with lower stiffness allowed for greater displacement of the surface, initially increasing the volume change, but exhibited higher mode shapes at certain frequency ranges. These higher node shapes sharply reduced the volume change and negatively impacted the velocity of the jet at those frequencies. Adjustments to the distribution of stiffness along the radius of the bimorph could prevent this and allow for improved deflection without the risk of reaching higher modes.

  7. An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations

    International Nuclear Information System (INIS)

    Erturk, A; Inman, D J

    2009-01-01

    Piezoelectric transduction has received great attention for vibration-to-electric energy conversion over the last five years. A typical piezoelectric energy harvester is a unimorph or a bimorph cantilever located on a vibrating host structure, to generate electrical energy from base excitations. Several authors have investigated modeling of cantilevered piezoelectric energy harvesters under base excitation. The existing mathematical modeling approaches range from elementary single-degree-of-freedom models to approximate distributed parameter solutions in the sense of Rayleigh–Ritz discretization as well as analytical solution attempts with certain simplifications. Recently, the authors have presented the closed-form analytical solution for a unimorph cantilever under base excitation based on the Euler–Bernoulli beam assumptions. In this paper, the analytical solution is applied to bimorph cantilever configurations with series and parallel connections of piezoceramic layers. The base excitation is assumed to be translation in the transverse direction with a superimposed small rotation. The closed-form steady state response expressions are obtained for harmonic excitations at arbitrary frequencies, which are then reduced to simple but accurate single-mode expressions for modal excitations. The electromechanical frequency response functions (FRFs) that relate the voltage output and vibration response to translational and rotational base accelerations are identified from the multi-mode and single-mode solutions. Experimental validation of the single-mode coupled voltage output and vibration response expressions is presented for a bimorph cantilever with a tip mass. It is observed that the closed-form single-mode FRFs obtained from the analytical solution can successfully predict the coupled system dynamics for a wide range of electrical load resistance. The performance of the bimorph device is analyzed extensively for the short circuit and open circuit resonance

  8. Piezoelectric Bimorph Cantilever for Vibration-Producing-Hydrogen

    Directory of Open Access Journals (Sweden)

    Guangming Cheng

    2012-12-01

    Full Text Available A device composed of a piezoelectric bimorph cantilever and a water electrolysis device was fabricated to realize piezoelectrochemical hydrogen production. The obvious output of the hydrogen and oxygen through application of a mechanical vibration of ~0.07 N and ~46.2 Hz was observed. This method provides a cost-effective, recyclable, environment-friendly and simple way to directly split water for hydrogen fuels by scavenging mechanical waste energy forms such as noise or traffic vibration in the environment.

  9. A spongy graphene based bimorph actuator with ultra-large displacement towards biomimetic application.

    Science.gov (United States)

    Hu, Ying; Lan, Tian; Wu, Guan; Zhu, Zicai; Chen, Wei

    2014-11-07

    Bimorph actuators, consisting of two layers with asymmetric expansion and generating bending displacement, have been widely researched. Their actuation performances greatly rely on the difference of coefficients of thermal expansion (CTE) between the two material layers. Here, by introducing a spongy graphene (sG) paper with a large negative CTE as well as high electrical-to-thermal properties, an electromechanical sG/PDMS bimorph actuator is designed and fabricated, showing an ultra-large bending displacement output under low voltage stimulation (curvature of about 1.2 cm(-1) at 10 V for 3 s), a high displacement-to-length ratio (∼0.79), and vibration motion at AC voltage (up to 10 Hz), which is much larger and faster than that of the other electromechanical bimorph actuators. Based on the sG/PDMS bimorph serving as the "finger", a mechanical gripper is constructed to realize the fast manipulation of the objects under 0.1 Hz square wave voltage stimulation (0-8 V). The designed bimorph actuator coupled with ultra-large bending displacement, low driven voltage, and the ease of fabrication may open up substantial possibilities for the utilization of electromechanical actuators in practical biomimetic device applications.

  10. Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers

    International Nuclear Information System (INIS)

    Yang, Chenye; Liu, Sanwei; Livermore, Carol; Xie, Xin

    2016-01-01

    The design, analytical modelling, finite element analysis (FEA), and experimental characterization of a microelectromechanical system (MEMS) out-of-plane (vertical) translational piezoelectric lead–zirconate–titanate (PZT) bimorph actuator supported on Archimedes’ spiral tethers are presented. Three types of bimorph actuators with different electrode patterns (with spiral tethers half actuated, fully actuated with uniform polarity, or fully actuated with reversed polarity) are designed and modelled. The two actuators with the highest predicted performance (half actuated and fully actuated with uniform polarity) are implemented and characterized. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. Analytical modelling and FEA are used to analyze and predict the actuators’ displacements and blocking forces. Experimental measurements of the deflections and blocking forces of actuators with full uniform actuation and half actuation validate the design. At an applied voltage of 110 V, the out-of-plane deflections of the actuators with half actuation and full uniform actuation are measured at about 17 µ m and 29 µ m respectively, in good agreement with analytical predictions of 17.3 µ m and 34.2 µ m and FEA predictions of 17.1 µ m and 25.8 µ m. The blocking force for devices with half-actuated tethers is predicted to be 12 mN (analytical) and 10 mN (FEA), close to the experimental value of 9 mN. The blocking force for devices with full uniform actuation is predicted to be 23 mN (analytical) and 17 mN (FEA), as compared with 15 mN in experiments. (paper)

  11. MODELLING AND OPTIMISATION OF A BIMORPH PIEZOELECTRIC CANTILEVER BEAM IN AN ENERGY HARVESTING APPLICATION

    Directory of Open Access Journals (Sweden)

    CHUNG KET THEIN

    2016-02-01

    Full Text Available Piezoelectric materials are excellent transducers in converting vibrational energy into electrical energy, and vibration-based piezoelectric generators are seen as an enabling technology for wireless sensor networks, especially in selfpowered devices. This paper proposes an alternative method for predicting the power output of a bimorph cantilever beam using a finite element method for both static and dynamic frequency analyses. Experiments are performed to validate the model and the simulation results. In addition, a novel approach is presented for optimising the structure of the bimorph cantilever beam, by which the power output is maximised and the structural volume is minimised simultaneously. Finally, the results of the optimised design are presented and compared with other designs.

  12. Energy Harvesting Characteristics from Water Flow by Piezoelectric Energy Harvester Device Using Cr/Nb Doped Pb(Zr,Ti)O3 Bimorph Cantilever

    Science.gov (United States)

    Kim, Kyoung-Bum; Kim, Chang Il; Jeong, Young Hun; Cho, Jeong-Ho; Paik, Jong-Hoo; Nahm, Sahn; Lim, Jong Bong; Seong, Tae-Hyeon

    2013-10-01

    A water flow energy harvester, which can convert water flow energy to electric energy, was fabricated for its application to rivers. This harvester can generate power from the bending and releasing motion of piezoelectric bimorph cantilevers. A Pb(Zr0.54Ti0.46)O3 + 0.2 wt % Cr2O3 + 1.0 wt % Nb2O5 (PZT-CN) thick film and a 250-µm-thick stainless steel were used as a bimorph cantilever. The electrical impedance matching was achieved across a resistive load of 1 kΩ. Four bimorph cantilevers can generate power from 5 to 105 rpm. The output powers were steadily increased by increasing the rpm. The maximum output power was 68 mW by 105 rpm. It was found that the water flow energy harvester can generate 58 mW by a flow velocity of (2 m/s) from the stream with the four bimorph cantilevers.

  13. Construction of a Fish-like Robot Based on High Performance Graphene/PVDF Bimorph Actuation Materials.

    Science.gov (United States)

    Xiao, Peishuang; Yi, Ningbo; Zhang, Tengfei; Huang, Yi; Chang, Huicong; Yang, Yang; Zhou, Ying; Chen, Yongsheng

    2016-06-01

    Smart actuators have many potential applications in various areas, so the development of novel actuation materials, with facile fabricating methods and excellent performances, are still urgent needs. In this work, a novel electromechanical bimorph actuator constituted by a graphene layer and a PVDF layer, is fabricated through a simple yet versatile solution approach. The bimorph actuator can deflect toward the graphene side under electrical stimulus, due to the differences in coefficient of thermal expansion between the two layers and the converse piezoelectric effect and electrostrictive property of the PVDF layer. Under low voltage stimulus, the actuator (length: 20 mm, width: 3 mm) can generate large actuation motion with a maximum deflection of about 14.0 mm within 0.262 s and produce high actuation stress (more than 312.7 MPa/g). The bimorph actuator also can display reversible swing behavior with long cycle life under high frequencies. on this basis, a fish-like robot that can swim at the speed of 5.02 mm/s is designed and demonstrated. The designed graphene-PVDF bimorph actuator exhibits the overall novel performance compared with many other electromechanical avtuators, and may contribute to the practical actuation applications of graphene-based materials at a macro scale.

  14. Construction of a Fish‐like Robot Based on High Performance Graphene/PVDF Bimorph Actuation Materials

    Science.gov (United States)

    Xiao, Peishuang; Yi, Ningbo; Zhang, Tengfei; Chang, Huicong; Yang, Yang; Zhou, Ying

    2016-01-01

    Smart actuators have many potential applications in various areas, so the development of novel actuation materials, with facile fabricating methods and excellent performances, are still urgent needs. In this work, a novel electromechanical bimorph actuator constituted by a graphene layer and a PVDF layer, is fabricated through a simple yet versatile solution approach. The bimorph actuator can deflect toward the graphene side under electrical stimulus, due to the differences in coefficient of thermal expansion between the two layers and the converse piezoelectric effect and electrostrictive property of the PVDF layer. Under low voltage stimulus, the actuator (length: 20 mm, width: 3 mm) can generate large actuation motion with a maximum deflection of about 14.0 mm within 0.262 s and produce high actuation stress (more than 312.7 MPa/g). The bimorph actuator also can display reversible swing behavior with long cycle life under high frequencies. on this basis, a fish‐like robot that can swim at the speed of 5.02 mm/s is designed and demonstrated. The designed graphene‐PVDF bimorph actuator exhibits the overall novel performance compared with many other electromechanical avtuators, and may contribute to the practical actuation applications of graphene‐based materials at a macro scale. PMID:27818900

  15. High-frequency performance for a spiral-shaped piezoelectric bimorph

    Science.gov (United States)

    Huang, Fang Sheng; Feng, Zhi Hua; Ma, Yu Ting; Pan, Qiao Sheng; Zhang, Lian Sheng; Liu, Yong Bin; He, Liang Guo

    2018-04-01

    Piezoelectric cantilever is suitable as an actuator for micro-flapping-wing aircraft. Higher resonant frequency brings about stronger flight energy, and the flight amplitude can be compensated by displacement-amplification mechanism, such as lever. To obtain a higher resonant frequency, straight piezoelectric bimorph was rolled into spiral-shaped piezoelectric bimorph with identical effective length in this study, which is verified in COMSOL simulations. Simulation results show that compared with the straight piezoelectric bimorph, the spiral-shaped piezoelectric bimorph with two turns has higher inherent frequencies (from 204.79 Hz to 504.84 Hz in terms of axial oscillation mode, and from 319.77 Hz to 704.48 Hz in terms of tangential torsional mode). The spiral-shaped piezoelectric bimorph is fabricated by a precise laser cutting process and consists of two turns with effective length of 60 mm, width of 2.5 mm, and thickness of 1.6 mm, respectively. With the excitation voltage of 100 Vpp applying an electric field across the thickness of the bimorph, the tip displacement of the actuator in the axial oscillation and tangential torsional modes are 85 μm and 15 μm, respectively.

  16. Uncertainty quantification for PZT bimorph actuators

    Science.gov (United States)

    Bravo, Nikolas; Smith, Ralph C.; Crews, John

    2018-03-01

    In this paper, we discuss the development of a high fidelity model for a PZT bimorph actuator used for micro-air vehicles, which includes the Robobee. We developed a high-fidelity model for the actuator using the homogenized energy model (HEM) framework, which quantifies the nonlinear, hysteretic, and rate-dependent behavior inherent to PZT in dynamic operating regimes. We then discussed an inverse problem on the model. We included local and global sensitivity analysis of the parameters in the high-fidelity model. Finally, we will discuss the results of Bayesian inference and uncertainty quantification on the HEM.

  17. Realization of cantilever arrays for parallel proximity imaging

    International Nuclear Information System (INIS)

    Sarov, Y; Ivanov, Tz; Frank, A; Zoellner, J-P; Nikolov, N; Rangelow, I W

    2010-01-01

    This paper reports on the fabrication and characterisation of self-actuating, and self-sensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.

  18. Microstructuring of piezoresistive cantilevers for gas detection and analysis

    International Nuclear Information System (INIS)

    Sarov, Y.; Sarova, V.; Bitterlich, Ch.; Richter, O.; Guliyev, E.; Zoellner, J.-P.; Rangelow, I. W.; Andok, R.; Bencurova, A.

    2011-01-01

    In this work we report on a design and fabrication of cantilevers for gas detection and analysis. The cantilevers have expanded area of interaction with the gas, while the signal transduction is realized by an integrated piezoresistive deflection sensor, placed at the narrowed cantilever base with highest stress along the cantilever. Moreover, the cantilevers have integrated bimorph micro-actuator detection in a static and dynamic mode. The cantilevers are feasible as pressure, temperature and flow sensors and under chemical functionalization - for gas recognition, tracing and composition analysis. (authors)

  19. Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

    DEFF Research Database (Denmark)

    Xu, R.; Lei, A.; Christiansen, T. L.

    2011-01-01

    We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material...

  20. Dynamic Electromechanical Coupling of Piezoelectric Bending Actuators

    Directory of Open Access Journals (Sweden)

    Mostafa R. A. Nabawy

    2016-01-01

    Full Text Available Electromechanical coupling defines the ratio of electrical and mechanical energy exchanged during a flexure cycle of a piezoelectric actuator. This paper presents an analysis of the dynamic electromechanical coupling factor (dynamic EMCF for cantilever based piezoelectric actuators and provides for the first time explicit expressions for calculation of dynamic EMCF based on arrangement of passive and active layers, layer geometry, and active and passive materials selection. Three main cantilever layer configurations are considered: unimorph, dual layer bimorph and triple layer bimorph. The actuator is modeled using standard constitutive dynamic equations that relate deflection and charge to force and voltage. A mode shape formulation is used for the cantilever dynamics that allows the generalized mass to be the actual mass at the first resonant frequency, removing the need for numerical integration in the design process. Results are presented in the form of physical insight from the model structure and also numerical evaluations of the model to provide trends in dynamic EMCF with actuator design parameters. For given material properties of the active and passive layers and given system overall damping ratio, the triple layer bimorph topology is the best in terms of theoretically achievable dynamic EMCF, followed by the dual layer bimorph. For a damping ratio of 0.035, the dynamic EMCF for an example dual layer bimorph configuration is 9% better than for a unimorph configuration. For configurations with a passive layer, the ratio of thicknesses for the passive and active layers is the primary geometric design variable. Choice of passive layer stiffness (Young’s modulus relative to the stiffness of the material in the active layer is an important materials related design choice. For unimorph configurations, it is beneficial to use the highest stiffness possible passive material, whereas for triple layer bimorph configurations, the passive

  1. Electromechanical properties of nanotube-PVA composite actuator bimorphs

    International Nuclear Information System (INIS)

    Bartholome, Christele; Derre, Alain; Roubeau, Olivier; Zakri, Cecile; Poulin, Philippe

    2008-01-01

    Oxidized multiwalled carbon nanotube (oxidized-MWNT)/polyvinyl alcohol (PVA) composite sheets have been prepared for electromechanical actuator applications. MWNT have been oxidized by nitric acid treatments. They were then dispersed in water and mixed with various amounts of PVA of high molecular weight (198 000 g mol -1 ). The composite sheets were then obtained through a membrane filtration process. The composition of the systems has been optimized to combine suitable mechanical and electrical properties. Thermogravimetric analysis, mechanical tensile tests and conductivity measurements show that the best compromise of mechanical and electrical properties was obtained for a PVA weight fraction of about 30 wt%. In addition, one face of the sheets was coated with gold to increase the conductivity of the sheets and promote uniform actuation. Pseudo-bimorph devices have been realized by subsequently coating the composite sheets with an inert layer of PVA. The devices have been tested electromechanically in a liquid electrolyte (tetrabutylammonium/tetrafluoroborate (TBA/TFB) in acetonitrile) at constant frequency and different applied voltages, from 2 to 10 V. Measurements of the bimorph deflections were used to determine the stress generated by the nanotube-PVA sheets. The results show that the stress generated increases with increasing amplitude of the applied voltage and can reach 1.8 MPa. This value compares well with and even exceeds the stress generated by recently obtained bimorphs made of gold nanoparticles

  2. Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles

    Science.gov (United States)

    Walton, John P.; Coutu, Ronald A.; Starman, LaVern

    2015-02-01

    There are numerous applications for micromirror arrays seen in our everyday lives. From flat screen televisions and computer monitors, found in nearly every home and office, to advanced military weapon systems and space vehicles, each application bringing with it a unique set of requirements. The microelectromechanical systems (MEMS) industry has researched many ways micromirror actuation can be accomplished and the different constraints on performance each design brings with it. This paper investigates a new "zipper" approach to electrostatically driven micromirrors with the intent of improving duel plane beam steering by coupling large deflection angles, over 30°, and a fast switching speed. To accomplish this, an extreme initial deflection is needed which can be reached using high stress bimorph beams. Currently this requires long beams and high voltage for the electrostatic pull in or slower electrothermal switching. The idea for this "zipper" approach is to stack multiple beams of a much shorter length and allow for the deflection of each beam to be added together in order to reach the required initial deflection height. This design requires much less pull-in voltage because the pull-in of one short beam will in turn reduce the height of the all subsequent beams, making it much easier to actuate. Using modeling and simulation software to characterize operations characteristics, different bimorph cantilever beam configurations are explored in order to optimize the design. These simulations show that this new "zipper" approach increases initial deflection as additional beams are added to the assembly without increasing the actuation voltage.

  3. Comment on 'Modeling and analysis of a bimorph piezoelectric cantilever beam for voltage generation'

    International Nuclear Information System (INIS)

    Erturk, A; Inman, D J

    2008-01-01

    In a recent paper, Ajitsaria et al (2007 Smart Mater. Struct. 16 447–54) presented a mathematical formulation for the modeling and analysis of a bimorph piezoelectric cantilever beam for voltage generation. Their motivation was the recent increasing trend in using the piezoelectric effect to harvest electrical energy from ambient vibrations. This comment addresses the modeling errors and numerous undefined and missing terms in the mentioned work. (comment)

  4. Quantitative electromechanical impedance method for nondestructive testing based on a piezoelectric bimorph cantilever

    International Nuclear Information System (INIS)

    Fu, Ji; Tan, Chi; Li, Faxin

    2015-01-01

    The electromechanical impedance (EMI) method, which holds great promise in structural health monitoring (SHM), is usually treated as a qualitative method. In this work, we proposed a quantitative EMI method based on a piezoelectric bimorph cantilever using the sample’s local contact stiffness (LCS) as the identification parameter for nondestructive testing (NDT). Firstly, the equivalent circuit of the contact vibration system was established and the analytical relationship between the cantilever’s contact resonance frequency and the LCS was obtained. As the LCS is sensitive to typical defects such as voids and delamination, the proposed EMI method can then be used for NDT. To verify the equivalent circuit model, two piezoelectric bimorph cantilevers were fabricated and their free resonance frequencies were measured and compared with theoretical predictions. It was found that the stiff cantilever’s EMI can be well predicted by the equivalent circuit model while the soft cantilever’s cannot. Then, both cantilevers were assembled into a homemade NDT system using a three-axis motorized stage for LCS scanning. Testing results on a specimen with a prefabricated defect showed that the defect could be clearly reproduced in the LCS image, indicating the validity of the quantitative EMI method for NDT. It was found that the single-frequency mode of the EMI method can also be used for NDT, which is faster but not quantitative. Finally, several issues relating to the practical application of the NDT method were discussed. The proposed EMI-based NDT method offers a simple and rapid solution for damage evaluation in engineering structures and may also shed some light on EMI-based SHM. (paper)

  5. The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever

    Science.gov (United States)

    Palosaari, Jaakko; Leinonen, Mikko; Juuti, Jari; Jantunen, Heli

    2018-06-01

    In this research four piezoelectric bimorph type cantilevers for energy harvesting were manufactured, measured and analyzed to study the effects of substrate layer thickness on energy harvesting efficiency and durability under different accelerations. The cantilevers had the same dimensions of the piezoelectric ceramic components, but had different thicknesses of the steel substrate (no steel, 30 μm, 50 μm and 75 μm). The cantilevers were tuned to the same resonance frequency with different sizes of tip mass (2.13 g, 3.84 g, 4.17 g and 5.08 g). The energy harvester voltage outputs were then measured across an electrical load near to the resonance frequency (∼40 Hz) with sinusoidal vibrations under different accelerations. The stress exhibited by the four cantilevers was compared and analyzed and their durability was tested with accelerations up to 2.5 g-forces.

  6. Lorentz force actuation of a heated atomic force microscope cantilever.

    Science.gov (United States)

    Lee, Byeonghee; Prater, Craig B; King, William P

    2012-02-10

    We report Lorentz force-induced actuation of a silicon microcantilever having an integrated resistive heater. Oscillating current through the cantilever interacts with the magnetic field around a NdFeB permanent magnet and induces a Lorentz force that deflects the cantilever. The same current induces cantilever heating. With AC currents as low as 0.2 mA, the cantilever can be oscillated as much as 80 nm at resonance with a DC temperature rise of less than 5 °C. By comparison, the AC temperature variation leads to a thermomechanical oscillation that is about 1000 times smaller than the Lorentz deflection at the cantilever resonance. The cantilever position in the nonuniform magnetic field affects the Lorentz force-induced deflection, with the magnetic field parallel to the cantilever having the largest effect on cantilever actuation. We demonstrate how the cantilever actuation can be used for imaging, and for measuring the local material softening temperature by sensing the contact resonance shift.

  7. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

    Directory of Open Access Journals (Sweden)

    Cheng-Hua Tsai

    2015-06-01

    Full Text Available Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA. A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

  8. Hysteresis-free high-temperature precise bimorph actuators produced by direct bonding of lithium niobate wafers

    Energy Technology Data Exchange (ETDEWEB)

    Shur, V. Ya.; Baturin, I. S.; Mingaliev, E. A.; Zorikhin, D. V.; Udalov, A. R.; Greshnyakov, E. D. [Ferroelectric Laboratory, Institute of Natural Sciences, Ural Federal University, 51 Lenin Ave., 620000 Ekaterinburg (Russian Federation)

    2015-02-02

    The current paper presents a piezoelectric bimorph actuator produced by direct bonding of lithium niobate wafers with the mirrored Y and Z axes. Direct bonding technology allowed to fabricate bidomain plate with precise positioning of ideally flat domain boundary. By optimizing the cutting angle (128° Y-cut), the piezoelectric constant became as large as 27.3 pC/N. Investigation of voltage dependence of bending displacement confirmed that bimorph actuator has excellent linearity and hysteresis-free. Decrease of the applied voltage down to mV range showed the perfect linearity up to the sub-nm deflection amplitude. The frequency and temperature dependences of electromechanical transmission coefficient in wide temperature range (from 300 to 900 K) were investigated.

  9. Non-linear electromechanical behaviour of piezoelectric bimorph actuators: influence on performance and lifetime

    NARCIS (Netherlands)

    Ende, D.A. van den; Bos, B.; Groen, W.A.

    2009-01-01

    Piezoelectric bimorph bender actuators find application number of areas, ranging from automotive to health care. High voltage operation in harsh environments poses ever more stringent demands on functionality and lifetime. In these high performance benders, the trade-off between functionality and

  10. Chemical gas sensors based on functionalized self-actuated piezo-resistive cantilevers

    OpenAIRE

    Filenko, Denys

    2008-01-01

    Der Schwerpunkt dieser Arbeit liegt in der Anwendung funktionalisierter Mikrocantilever mit integrierter bimorpher Aktuation und piezo-resistiver Detektion als chemische Gassensoren für den schnellen, tragbaren und preisgünstigen Nachweis verschiedener flüchtiger Substanzen. Besondere Beachtung erfährt die Verbesserung der Cantilever-Arbeitsleistung durch den Betrieb in speziellen Modi. Weiterer Schwerpunkt liegt in der Untersuchung von spezifischen Sorptionswechselwirkungen und Anwendung von...

  11. Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

    DEFF Research Database (Denmark)

    Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

    2012-01-01

    We present a microelectromechanical system (MEMS) based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. Most piezoelectric energy harvesting devices use a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric...... elements. We show experimental results from two types PZT/PZT harvesting devices, one where the Pb(ZrxTi1−x)O3 (PZT) thick films are high pressure treated during the fabrication and the other where the treatment is omitted. We find that with the high pressure treatment prior to PZT sintering, the films...

  12. Three-electrode self-actuating self-sensing quartz cantilever: design, analysis, and experimental verification.

    Science.gov (United States)

    Chen, C Julian; Schwarz, Alex; Wiesendanger, Roland; Horn, Oliver; Müller, Jörg

    2010-05-01

    We present a novel quartz cantilever for frequency-modulation atomic force microscopy (FM-AFM) which has three electrodes: an actuating electrode, a sensing electrode, and a ground electrode. By applying an ac signal on the actuating electrode, the cantilever is set to vibrate. If the frequency of actuation voltage closely matches one of the characteristic frequencies of the cantilever, a sharp resonance should be observed. The vibration of the cantilever in turn generates a current on the sensing electrode. The arrangement of the electrodes is such that the cross-talk capacitance between the actuating electrode and the sensing electrode is less than 10(-16) F, thus the direct coupling is negligible. To verify the principle, a number of samples were made. Direct measurements with a Nanosurf easyPPL controller and detector showed that for each cantilever, one or more vibrational modes can be excited and detected. Using classical theory of elasticity, it is shown that such novel cantilevers with proper dimensions can provide optimized performance and sensitivity in FM-AFM with very simple electronics.

  13. Programmable and functional electrothermal bimorph actuators based on large-area anisotropic carbon nanotube paper

    Science.gov (United States)

    Li, Qingwei; Liu, Changhong; Fan, Shoushan

    2018-04-01

    Electro-active polymer (EAP) actuators, such as electronic, ionic and electrothermal (ET) actuators, have become an important branch of next-generation soft actuators in bionic robotics. However, most reported EAP actuators could realize only simple movements, being restricted by the small area of flexible electrodes and simple designs. We prepared large-area flexible electrodes of high anisotropy, made of oriented carbon nanotube (CNT) paper, and carried out artful graphic designs and processing on the electrodes to make functional ET bimorph actuators which can realize large bending deformations (over 220°, curvature > 1.5 cm-1) and bionic movements driven by electricity. The anisotropy of CNT paper benefits electrode designs and multiform actuations for complex actuators. Based on the large-area CNT paper, more interesting and functional actuators can be designed and prepared which will have practical applications in the fields of artificial muscles, complicated actuations, and soft and bionic robotics.

  14. Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

    Energy Technology Data Exchange (ETDEWEB)

    Pandey, Vibhuti Bhushan; Parashar, Sandeep Kumar, E-mail: skparashar@rtu.ac.in [Department of Mechanical Engineering, Rajasthan Technical University, Kota (India)

    2016-04-13

    In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d{sub 15} has much higher value than coupling coefficients d{sub 31} and d{sub 33}, hence in the present work the micro cantilever beam actuated by d{sub 15} effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.

  15. Development of in-series piezoelectric bimorph bending beam actuators for active flow control applications

    Science.gov (United States)

    Chan, Wilfred K.; Clingman, Dan J.; Amitay, Michael

    2016-04-01

    Piezoelectric materials have long been used for active flow control purposes in aerospace applications to increase the effectiveness of aerodynamic surfaces on aircraft, wind turbines, and more. Piezoelectric actuators are an appropriate choice due to their low mass, small dimensions, simplistic design, and frequency response. This investigation involves the development of piezoceramic-based actuators with two bimorphs placed in series. Here, the main desired characteristic was the achievable displacement amplitude at specific driving voltages and frequencies. A parametric study was performed, in which actuators with varying dimensions were fabricated and tested. These devices were actuated with a sinusoidal waveform, resulting in an oscillating platform on which to mount active flow control devices, such as dynamic vortex generators. The main quantification method consisted of driving these devices with different voltages and frequencies to determine their free displacement, blocking force, and frequency response. It was found that resonance frequency increased with shorter and thicker actuators, while free displacement increased with longer and thinner actuators. Integration of the devices into active flow control test modules is noted. In addition to physical testing, a quasi-static analytical model was developed and compared with experimental data, which showed close correlation for both free displacement and blocking force.

  16. Design and experimental characterization of a NiTi-based, high-frequency, centripetal peristaltic actuator

    International Nuclear Information System (INIS)

    Borlandelli, E; Scarselli, D; Bettini, P; Morandini, M; Sala, G; Quadrio, M; Nespoli, A; Rigamonti, D; Villa, E

    2015-01-01

    Development and experimental testing of a peristaltic device actuated by a single shape-memory NiTi wire are described. The actuator is designed to radially shrink a compliant silicone pipe, and must work on a sustained basis at an actuation frequency that is higher than those typical of NiTi actuators. Four rigid, aluminum-made circular sectors are sitting along the pipe circumference and provide the required NiTi wire housing. The aluminum assembly acts as geometrical amplifier of the wire contraction and as heat sink required to dissipate the thermal energy of the wire during the cooling phase. We present and discuss the full experimental investigation of the actuator performance, measured in terms of its ability to reduce the pipe diameter, at a sustained frequency of 1.5 Hz. Moreover, we investigate how the diameter contraction is affected by various design parameters as well as actuation frequencies up to 4 Hz. We manage to make the NiTi wire work at 3% in strain, cyclically providing the designed pipe wall displacement. The actuator performance is found to decay approximately linearly with actuation frequencies up to 4 Hz. Also, the interface between the wire and the aluminum parts is found to be essential in defining the functional performance of the actuator. (paper)

  17. High-speed dynamic atomic force microscopy by using a Q-controlled cantilever eigenmode as an actuator

    Energy Technology Data Exchange (ETDEWEB)

    Balantekin, M., E-mail: mujdatbalantekin@iyte.edu.tr

    2015-02-15

    We present a high-speed operating method with feedback to be used in dynamic atomic force microscope (AFM) systems. In this method we do not use an actuator that has to be employed to move the tip or the sample as in conventional AFM setups. Instead, we utilize a Q-controlled eigenmode of an AFM cantilever to perform the function of the actuator. Simulations show that even with an ordinary tapping-mode cantilever, imaging speed can be increased by about 2 orders of magnitude compared to conventional dynamic AFM imaging. - Highlights: • A high-speed imaging method is developed for dynamic-AFM systems. • An eigenmode of an AFM cantilever is utilized to perform fast actuation. • Simulations show 2 orders of magnitude increase in scan speed. • The time spent for dynamic-AFM imaging experiments will be minimized.

  18. High-speed tapping-mode atomic force microscopy using a Q-controlled regular cantilever acting as the actuator: Proof-of-principle experiments

    Energy Technology Data Exchange (ETDEWEB)

    Balantekin, M., E-mail: mujdatbalantekin@iyte.edu.tr [Electrical and Electronics Engineering, İzmir Institute of Technology, Urla, İzmir 35430 (Turkey); Satır, S.; Torello, D.; Değertekin, F. L. [Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0405 (United States)

    2014-12-15

    We present the proof-of-principle experiments of a high-speed actuation method to be used in tapping-mode atomic force microscopes (AFM). In this method, we do not employ a piezotube actuator to move the tip or the sample as in conventional AFM systems, but, we utilize a Q-controlled eigenmode of a cantilever to perform the fast actuation. We show that the actuation speed can be increased even with a regular cantilever.

  19. Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems

    DEFF Research Database (Denmark)

    Kim, H.; In, C.; Yoon, Gil Ho

    2005-01-01

    In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating......, dielectric constant, and dielectric loss. Tip deflections of 12 mu m at 5 V are measured, which agreed well with the predicted value. The 18 mu l/s leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed....

  20. Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator

    International Nuclear Information System (INIS)

    Gao, Sai; Herrmann, Konrad; Zhang, Zhikai; Wu, Yong

    2010-01-01

    The calibration of the performance of an SFM (scanning force microscope) cantilever has gained more and more interest in the past years, particularly due to increasing applications of SFMs for the determination of the mechanical properties of materials, such as biological structures and organic molecules. In this paper, a MEMS-based nano-force actuator with a force resolution up to nN (10 −9 N) is presented to quantitatively determine the stiffness of an SFM cantilever. The principle, structure design and realization of the nano-force actuator are detailed. Preliminary experiments demonstrate that the long-term self-calibration stability of the actuator is better than 3.7 × 10 −3 N m −1 (1σ) over 1 h. With careful calibration of the stiffness of the actuator, the MEMS actuator has the capability to determine the stiffness of various types of cantilevers (from 100 N m −1 down to 0.1 N m −1 ) with high accuracy. In addition, thanks to the large displacement and force range (up to 8 µm and 1 mN, respectively) of the actuator, the calibration procedure with our MEMS nano-force actuator features simple and active operation, and therefore applicability for different types of quantitative SFMs

  1. Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS

    International Nuclear Information System (INIS)

    Wilson, S A; Jourdain, R P; Owens, S

    2010-01-01

    The projected force–displacement capability of piezoelectric ceramic films in the 20–50 µm thickness range suggests that they are well suited to many micro-fluidic and micro-pneumatic applications. Furthermore when they are configured as bending actuators and operated at ∼ 1 V µm −1 they do not necessarily conform to the high-voltage, very low-displacement piezoelectric stereotype. Even so they are rarely found today in commercial micro-electromechanical devices, such as micro-pumps and micro-valves, and the main barriers to making them much more widely available would appear to be processing incompatibilities rather than commercial desirability. In particular, the issues associated with integration of these devices into MEMS at the production level are highly significant and they have perhaps received less attention in the mainstream than they deserve. This paper describes a fabrication route based on ultra-precision ceramic machining and full-wafer bonding for cost-effective batch scale production of thick film PZT bimorph micro-actuators and their integration with MEMS. The resulting actuators are pre-stressed (ceramic in compression) which gives them added performance, they are true bimorphs with bi-directional capability and they exhibit full bulk piezoelectric ceramic properties. The devices are designed to integrate with ancillary systems components using transfer-bonding techniques. The work forms part of the European Framework 6 Project 'Q2M—Quality to Micro'

  2. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

    Directory of Open Access Journals (Sweden)

    Xiaoyang Zhang

    2015-12-01

    Full Text Available This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

  3. Finite Element Study on Performance of Piezoelectric Bimorph Cantilevers Using Porous/Ceramic 0-3 Polymer Composites

    Science.gov (United States)

    Kiran, Raj; Kumar, Anuruddh; Chauhan, Vishal S.; Kumar, Rajeev; Vaish, Rahul

    2018-01-01

    Finite element analysis of 0-3 composites made of piezoceramic particles and pores embedded in polyvinylidene difluoride (PVDF) has been carried out. The representative volume element (RVE) approach was used to calculate the effective elastic and piezoelectric properties of the periodic isotropic 0-3 piezoelectric composites. It was observed that the elastic and piezoelectric properties increased with the volume fraction of {K}_{0.475} {Na}_{0.475} {Li}_{0.05} ( {{Nb}_{0.92} {Ta}_{0.05} {Sb}_{0.03} } ){O}3 (KNLNTS) particles but decreased for the porous composites. These effective properties were further used to analyze the potential use of such bimorph cantilever beams in sensing and energy harvesting applications. Sensing voltage continuously increased for KNLNTS filled composites while for porous materials it increased up to 15% volume fraction porosity and then decreased. The same trend was also observed for the power produced by the harvester. However, the sensing voltage and power produced by harvesters made of porous composites were lower than for harvesters made of pure PVDF.

  4. Modeling of the Through-the-Thickness Electric Potentials of a Piezoelectric Bimorph Using the Spectral Element Method

    Directory of Open Access Journals (Sweden)

    Xingjian Dong

    2014-02-01

    Full Text Available An efficient spectral element (SE with electric potential degrees of freedom (DOF is proposed to investigate the static electromechanical responses of a piezoelectric bimorph for its actuator and sensor functions. A sublayer model based on the piecewise linear approximation for the electric potential is used to describe the nonlinear distribution of electric potential through the thickness of the piezoelectric layers. An equivalent single layer (ESL model based on first-order shear deformation theory (FSDT is used to describe the displacement field. The Legendre orthogonal polynomials of order 5 are used in the element interpolation functions. The validity and the capability of the present SE model for investigation of global and local responses of the piezoelectric bimorph are confirmed by comparing the present solutions with those obtained from coupled 3-D finite element (FE analysis. It is shown that, without introducing any higher-order electric potential assumptions, the current method can accurately describe the distribution of the electric potential across the thickness even for a rather thick bimorph. It is revealed that the effect of electric potential is significant when the bimorph is used as sensor while the effect is insignificant when the bimorph is used as actuator, and therefore, the present study may provide a better understanding of the nonlinear induced electric potential for bimorph sensor and actuator.

  5. Modeling and Tuning for Vibration Energy Harvesting using a Piezoelectric Bimorph

    Science.gov (United States)

    Cao, Yongqing

    the modeling of piezoelectric generator, different methods are employed to modeling the coupled dynamics of a piezoelectric bimorph on a vibrating beam as well as a simple piezoelectric bimorph cantilever. The modeling of piezoelectric bimorph as an alternative current (AC) source with internal capacitance and resistance is used to analyze a piezoelectric bimorph cantilever and to calculate the optimal external load resistance for maximal power output. The couple dynamics method based on Hamilton's Principle is applied in the modeling of the piezoelectric bimorph on a vibrating beam. Impulse response experiment shows this method has a better estimation of the experimental results than the curvature model. The coupled dynamics model is also applied to piezoelectric bimorph cantilever and the external load resistance is also determined by this to maximize the power output. The finite element equations for the piezoelectric materials in the element domain are theoretically derived. The procedure of modeling a piezoelectric on a vibrating beam is demonstrated base on the package of ANSYS. The frequency response of ZnO nanowires with different dimensions is derived analytically for ambient mediums with different damping ratios. With help from nano research lab of Dr. Yong Zhu and the student Feng Xu, an experiment is conducted which indentifies the first modal frequency of ZnO nanowires with different dimensions. The experimental modal frequencies are compared with the numerical results. The influence of the thickness of deposit on the modal frequency is also investigated by finite element modeling.

  6. A longitudinal thermal actuation principle for mass detection using a resonant micro -cantilever in a fluid medium

    DEFF Research Database (Denmark)

    Grigorov, Alexander; Davis, Zachary James; Rasmussen, Peter

    2004-01-01

    We propose a new thermal actuation mechanical principle, which allows dynamic actuation in most media: air, water, etc. It is used to excite a cantilever, aiming to perform mass detection using resonance shifts, in place of the electrostatic or magnetic actuation that are normally used. It differs...... configuration, subject of investigation in the following paper. (C) 2004 Elsevier B.V. All rights reserved....

  7. Simulation Study on Material Property of Cantilever Piezoelectric Vibration Generator

    Directory of Open Access Journals (Sweden)

    Yan Zhen

    2014-06-01

    Full Text Available For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, relation between output voltage, inherent frequency and material parameter of unimorph, bimorph in series type and bimorph in parallel type piezoelectric vibration generator is analyzed respectively by mechanical model and finite element modeling. The results indicate PZT-4, PZT- 5A and PZT-5H piezoelectric materials and stainless steel, nickel alloy substrate material should be firstly chosen.

  8. PDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic Systems

    International Nuclear Information System (INIS)

    Mamanee, W; Tuantranont, A; Afzulpurkar, N V; Porntheerapat, N; Rahong, S; Wisitsoraat, A

    2006-01-01

    A thermopnuematic peristaltic micropump for controlling micro litters of fluid was designed and fabricated from multi-stack PDMS structure on glass substrate. Pump structure consists of inlet and outlet, microchannel, three thermopneumatic actuation chambers, and three heaters. In microchannel, fluid is controlled and pumped by peristaltic motion of actuation diaphragm. Actuation diaphragm can bend up and down by exploiting air expansion that is induced by increasing heater temperature. The micropump characteristics were measured as a function of applied voltage and frequency. The flow rate was determined by periodically recording the motion of fluid at Nanoport output and computing flow volume from height difference between consecutive records. From the experiment, an optimum flow rate of 0.82 μl/min is obtained under 14 V three-phase input voltages at 0.033 Hz operating frequency

  9. Development and Validation of an Enhanced Coupled-Field Model for PZT Cantilever Bimorph Energy Harvester

    Directory of Open Access Journals (Sweden)

    Long Zhang

    2013-01-01

    Full Text Available The power source with the limited life span has motivated the development of the energy harvesters that can scavenge the ambient environment energy and convert it into the electrical energy. With the coupled field characteristics of structure to electricity, piezoelectric energy harvesters are under consideration as a means of converting the mechanical energy to the electrical energy, with the goal of realizing completely self-powered sensor systems. In this paper, two previous models in the literatures for predicting the open-circuit and close-circuit voltages of a piezoelectric cantilever bimorph (PCB energy harvester are first described, that is, the mechanical equivalent spring mass-damper model and the electrical equivalent circuit model. Then, the development of an enhanced coupled field model for the PCB energy harvester based on another previous model in the literature using a conservation of energy method is presented. Further, the laboratory experiments are carried out to evaluate the enhanced coupled field model and the other two previous models in the literatures. The comparison results show that the enhanced coupled field model can better predict the open-circuit and close-circuit voltages of the PCB energy harvester with a proof mass bonded at the free end of the structure in order to increase the energy-harvesting level of the system.

  10. Hydrodynamics of Peristaltic Propulsion

    Science.gov (United States)

    Athanassiadis, Athanasios; Hart, Douglas

    2014-11-01

    A curious class of animals called salps live in marine environments and self-propel by ejecting vortex rings much like jellyfish and squid. However, unlike other jetting creatures that siphon and eject water from one side of their body, salps produce vortex rings by pumping water through siphons on opposite ends of their hollow cylindrical bodies. In the simplest cases, it seems like some species of salp can successfully move by contracting just two siphons connected by an elastic body. When thought of as a chain of timed contractions, salp propulsion is reminiscent of peristaltic pumping applied to marine locomotion. Inspired by salps, we investigate the hydrodynamics of peristaltic propulsion, focusing on the scaling relationships that determine flow rate, thrust production, and energy usage in a model system. We discuss possible actuation methods for a model peristaltic vehicle, considering both the material and geometrical requirements for such a system.

  11. Active control of flow noise sources in turbulent boundary layer on a flat-plate using piezoelectric bimorph film

    International Nuclear Information System (INIS)

    Song, Woo Seog; Lee, Seung Bae; Shin, Dong Shin; Na, Yang

    2006-01-01

    The piezoelectric bimorph film, which, as an actuator, can generate more effective displacement than the usual PVDF film, is used to control the turbulent boundary-layer flow. The change of wall pressures inside the turbulent boundary layer is observed by using the multi-channel microphone array flush-mounted on the surface when actuation at the non-dimensional frequency f b + =0.008 and 0.028 is applied to the turbulent boundary layer. The wall pressure characteristics by the actuation to produce local displacement are more dominantly influenced by the size of the actuator module than the actuation frequency. The movement of large-scale turbulent structures to the upper layer is found to be the main mechanism of the reduction in the wall-pressure energy spectrum when the 700ν/u τ -long bimorph film is periodically actuated at the non-dimensional frequency f b + =0.008 and 0.028. The bimorph actuator is triggered with the time delay for the active forcing at a single frequency when a 1/8' pressure-type, pin-holed microphone sensor detects the large-amplitude pressure event by the turbulent spot. The wall-pressure energy in the late-transitional boundary layer is partially reduced near the convection wavenumber by the open-loop control based on the large amplitude event

  12. Bio-inspired aquatic robotics by untethered piezohydroelastic actuation

    International Nuclear Information System (INIS)

    Cen, L; Erturk, A

    2013-01-01

    This paper investigates fish-like aquatic robotics using flexible bimorphs made of macro-fiber composite (MFC) piezoelectric laminates for carangiform locomotion. In addition to noiseless and efficient actuation over a range of frequencies, geometric scalability, and simple design, bimorph propulsors made of MFCs offer a balance between the actuation force and velocity response for performance enhancement in bio-inspired swimming. The experimental component of the presented work focuses on the characterization of an elastically constrained MFC bimorph propulsor for thrust generation in quiescent water as well as the development of a robotic fish prototype combining a microcontroller and a printed-circuit-board amplifier to generate high actuation voltage for untethered locomotion. From the theoretical standpoint, a distributed-parameter electroelastic model including the hydrodynamic effects and actuator dynamics is coupled with the elongated-body theory for predicting the mean thrust in quiescent water. In-air and underwater experiments are performed to verify the incorporation of hydrodynamic effects in the linear actuation regime. For electroelastically nonlinear actuation levels, experimentally obtained underwater vibration response is coupled with the elongated-body theory to predict the thrust output. The measured mean thrust levels in quiescent water (on the order of ∼10 mN) compare favorably with thrust levels of biological fish. An untethered robotic fish prototype that employs a single bimorph fin (caudal fin) for straight swimming and turning motions is developed and tested in free locomotion. A swimming speed of 0.3 body-length/second (7.5 cm s −1 swimming speed for 24.3 cm body length) is achieved at 5 Hz for a non-optimized main body-propulsor bimorph combination under a moderate actuation voltage level. (paper)

  13. The use of piezoelectric bimorph transducers to measure forces in colloidal systems

    International Nuclear Information System (INIS)

    Stewart, A.M.

    1996-01-01

    The Surface Force Apparatus developed in this Department has proved useful for the measurement of colloidal forces between transparent surfaces in liquids and gases at surface separations of 1 nm up to 500 nm. The distance between the surfaces is measured by the interferometry of white light, and the force is measured from the movement of one of the surfaces that is attached to a cantilever spring which deflects under the influence of the force. In the present work an analysis is made of the effect of the errors introduced at a longer time scale by bimorph drift and decay upon accuracy of measurement. For direct measurements the errors will be small provided that the time constant of the bimorph, given by the product of its capacitance and amplifier input impedance, is much larger than the total time of measurement. With the force-feedback technique the errors will be negligible provided that, in addition the integrator time constant is much smaller than the bimorph time constant, a condition easily satisfied. In is important to use an amplifier with a very high input impedance to buffer bimorphs used for this type of measurement

  14. On developing an optimal design procedure for a bimorph piezoelectric cantilever energy harvester under a predefined volume

    Science.gov (United States)

    Aboulfotoh, Noha; Twiefel, Jens

    2018-06-01

    A typical vibration harvester is tuned to operate at resonance in order to maximize the power output. There are many design parameter sets for tuning the harvester to a specific frequency, even for simple geometries. This work studies the impact of the geometrical parameters on the harvested power while keeping the resonance frequency constant in order to find the combination of the parameters that optimizes the power under a predefined volume. A bimorph piezoelectric cantilever is considered for the study. It consists of two piezoelectric layers and a middle non-piezoelectric layer and holds a tip mass. A theoretical model was derived to obtain the system parameters and the power as functions of the design parameters. Formulas for the optimal load resistance that provide maximum power capability at resonance and anti-resonance frequency were derived. The influence of the width on the power is studied, considering a constant mass ratio (between the tip mass and the mass of the beam). This keeps the resonance frequency constant while changing the width. The influence of the ratio between the thickness of the middle layer and that of the piezoelectric layer is also studied. It is assumed that the total thickness of the cantilever is constant and the middle layer has the same mechanical properties (elasticity and density) as the piezoelectric layer. This keeps the resonance frequency constant while changing the ratio between the thicknesses. Finally, the influence of increasing the free length as well as of increasing the mass ratio on the power is investigated. This is done by first, increasing each of them individually and secondly, by increasing each of them simultaneously while increasing the total thickness under the condition of maintaining a constant resonance frequency. Based on the analysis of these influences, recommendations as to how to maximize the geometrical parameters within the available volume and mass are presented.

  15. PZT-5A4/PA and PZT-5A4/PDMS piezoelectric composite bimorphs

    International Nuclear Information System (INIS)

    Babu, I; Hendrix, M M R M; De With, G

    2014-01-01

    Disc type reinforced piezoelectric composite bimorphs with series connection were designed and the performance was investigated. The composite bimorphs (PZT/PA and PZT/PDMS (40/60 vol%)) were successfully fabricated by a compression molding and solution casting technique. The charge developed at an applied force of 150 N is 18150 pC (PZT/PA) and 2310 pC (PZT/PDMS), respectively. Electric force microscopy (EFM) is used to study the structural characterization and piezoelectric properties of the materials realized. A clear inverse piezoelectric effect was observed when the bimorphs were subjected to an electric field stepped up through 2, 6 and 10 V, indicating the net polarization direction of the different ferroelectric domains. The as-developed bimorphs have the basic structure of a sensor and actuator, and, since they do not use any bonding agent for bonding, they can provide a valuable alternative to the present bimorphs where bonding processes are required for their realization that can limit their application at high temperature. (paper)

  16. Non-linear temperature-dependent curvature of a phase change composite bimorph beam

    Science.gov (United States)

    Blonder, Greg

    2017-06-01

    Bimorph films curl in response to temperature. The degree of curvature typically varies in proportion to the difference in thermal expansion of the individual layers, and linearly with temperature. In many applications, such as controlling a thermostat, this gentle linear behavior is acceptable. In other cases, such as opening or closing a valve or latching a deployable column into place, an abrupt motion at a fixed temperature is preferred. To achieve this non-linear motion, we describe the fabrication and performance of a new bilayer structure we call a ‘phase change composite bimorph (PCBM)’. In a PCBM, one layer in the bimorph is a composite containing small inclusions of phase change materials. When the inclusions melt, their large (generally positive and  >1%) expansion coefficient induces a strong, reversible step function jump in bimorph curvature. The measured jump amplitude and thermal response is consistent with theory, and can be harnessed by a new class of actuators and sensors.

  17. Piezoelectric energy harvesting in internal fluid flow.

    Science.gov (United States)

    Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Walkemeyer, Phillip; Colonius, Tim

    2015-10-14

    We consider piezoelectric flow energy harvesting in an internal flow environment with the ultimate goal powering systems such as sensors in deep oil well applications. Fluid motion is coupled to structural vibration via a cantilever beam placed in a converging-diverging flow channel. Two designs were considered for the electromechanical coupling: first; the cantilever itself is a piezoelectric bimorph; second; the cantilever is mounted on a pair of flextensional actuators. We experimentally investigated varying the geometry of the flow passage and the flow rate. Experimental results revealed that the power generated from both designs was similar; producing as much as 20 mW at a flow rate of 20 L/min. The bimorph designs were prone to failure at the extremes of flow rates tested. Finite element analysis (FEA) showed fatigue failure was imminent due to stress concentrations near the bimorph's clamped region; and that robustness could be improved with a stepped-joint mounting design. A similar FEA model showed the flextensional-based harvester had a resonant frequency of around 375 Hz and an electromechanical coupling of 0.23 between the cantilever and flextensional actuators in a vacuum. These values; along with the power levels demonstrated; are significant steps toward building a system design that can eventually deliver power in the Watts range to devices down within a well.

  18. Piezoelectric cantilever sensors

    Science.gov (United States)

    Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

    2008-01-01

    A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

  19. Graphene-based bimorphs for micron-sized, autonomous origami machines.

    Science.gov (United States)

    Miskin, Marc Z; Dorsey, Kyle J; Bircan, Baris; Han, Yimo; Muller, David A; McEuen, Paul L; Cohen, Itai

    2018-01-16

    Origami-inspired fabrication presents an attractive platform for miniaturizing machines: thinner layers of folding material lead to smaller devices, provided that key functional aspects, such as conductivity, stiffness, and flexibility, are persevered. Here, we show origami fabrication at its ultimate limit by using 2D atomic membranes as a folding material. As a prototype, we bond graphene sheets to nanometer-thick layers of glass to make ultrathin bimorph actuators that bend to micrometer radii of curvature in response to small strain differentials. These strains are two orders of magnitude lower than the fracture threshold for the device, thus maintaining conductivity across the structure. By patterning 2-[Formula: see text]m-thick rigid panels on top of bimorphs, we localize bending to the unpatterned regions to produce folds. Although the graphene bimorphs are only nanometers thick, they can lift these panels, the weight equivalent of a 500-nm-thick silicon chip. Using panels and bimorphs, we can scale down existing origami patterns to produce a wide range of machines. These machines change shape in fractions of a second when crossing a tunable pH threshold, showing that they sense their environments, respond, and perform useful functions on time and length scales comparable with microscale biological organisms. With the incorporation of electronic, photonic, and chemical payloads, these basic elements will become a powerful platform for robotics at the micrometer scale.

  20. Design of a bimorph piezoelectric energy harvester for railway monitoring

    Energy Technology Data Exchange (ETDEWEB)

    Li, Jingcheng; Jang, Shinae; Tang, Jiong [Univ. of Connecticut, Connecticut (United States)

    2012-12-15

    Wireless sensor network is one of prospective methods for railway monitoring due to the long term operation and low maintenance performances. How to supply power to the wireless sensor nodes has drawn much attention recently. In railway monitoring, the idea of converting ambient vibration energy from vibration of railway track induced by passing trains to electric energy has made it a potential way for powering the wireless sensor nodes. In this paper, a bimorph cantilever piezoelectric energy harvester was designed based on a single degree of freedom model. Experimental test was also performed to validate the design. The first natural frequency of the bimorph piezoelectric energy harvester was decreased from 117.1 Hz to 65.2 Hz by adding 4 gram tip mass to the free end of the 8.6 gram energy harvester. In addition, the power generation of the piezoelectric energy harvester with 4 gram tip mass at resonant frequency was increased from 0.14 mW to 0.74 mW from 2.06 m/s{sup 2} base excitation compared to stand alone piezoelectric energy harvester without tip mass.

  1. Design of a bimorph piezoelectric energy harvester for railway monitoring

    International Nuclear Information System (INIS)

    Li, Jingcheng; Jang, Shinae; Tang, Jiong

    2012-01-01

    Wireless sensor network is one of prospective methods for railway monitoring due to the long term operation and low maintenance performances. How to supply power to the wireless sensor nodes has drawn much attention recently. In railway monitoring, the idea of converting ambient vibration energy from vibration of railway track induced by passing trains to electric energy has made it a potential way for powering the wireless sensor nodes. In this paper, a bimorph cantilever piezoelectric energy harvester was designed based on a single degree of freedom model. Experimental test was also performed to validate the design. The first natural frequency of the bimorph piezoelectric energy harvester was decreased from 117.1 Hz to 65.2 Hz by adding 4 gram tip mass to the free end of the 8.6 gram energy harvester. In addition, the power generation of the piezoelectric energy harvester with 4 gram tip mass at resonant frequency was increased from 0.14 mW to 0.74 mW from 2.06 m/s 2 base excitation compared to stand alone piezoelectric energy harvester without tip mass

  2. Finite Element Modelling and Analysis of Damage Detection Methodology in Piezo Electric Sensor and Actuator Integrated Sandwich Cantilever Beam

    Science.gov (United States)

    Pradeep, K. R.; Thomas, A. M.; Basker, V. T.

    2018-03-01

    Structural health monitoring (SHM) is an essential component of futuristic civil, mechanical and aerospace structures. It detects the damages in system or give warning about the degradation of structure by evaluating performance parameters. This is achieved by the integration of sensors and actuators into the structure. Study of damage detection process in piezoelectric sensor and actuator integrated sandwich cantilever beam is carried out in this paper. Possible skin-core debond at the root of the cantilever beam is simulated and compared with undamaged case. The beam is actuated using piezoelectric actuators and performance differences are evaluated using Polyvinylidene fluoride (PVDF) sensors. The methodology utilized is the voltage/strain response of the damaged versus undamaged beam against transient actuation. Finite element model of piezo-beam is simulated in ANSYSTM using 8 noded coupled field element, with nodal degrees of freedoms are translations in the x, y directions and voltage. An aluminium sandwich beam with a length of 800mm, thickness of core 22.86mm and thickness of skin 0.3mm is considered. Skin-core debond is simulated in the model as unmerged nodes. Reduction in the fundamental frequency of the damaged beam is found to be negligible. But the voltage response of the PVDF sensor under transient excitation shows significantly visible change indicating the debond. Piezo electric based damage detection system is an effective tool for the damage detection of aerospace and civil structural system having inaccessible/critical locations and enables online monitoring possibilities as the power requirement is minimal.

  3. Development and Research of Peristaltic Multiphase Piezoelectric Micro-Pump

    Science.gov (United States)

    Vinogradov, Alexander N.; Ivanikin, Igor A.; Lubchenco, Roman V.; Matveev, Yegor V.; Titov, Pavel A.

    2016-01-01

    The paper presents the results of a study of existing models and mathematical representations of a range of truly peristaltic multiphase micro-pumps with a piezoelectric actuator (piezo drive). Piezo drives with different types of substrates use vertical movements at deformation of individual piezoelectric elements, which define device…

  4. Soft Sensors and Actuators based on Nanomaterials

    Science.gov (United States)

    Yao, Shanshan

    The focus of this research is using novel bottom-up synthesized nanomaterials and structures to build up devices for wearable sensors and soft actuators. The applications of the wearable sensors towards motion detection and health monitoring are investigated. In addition, flexible heaters for bimorph actuators and stretchable patches made of microgel depots containing drug-loaded nanoparticles (NPs) for stretch-triggered wearable drug delivery are studied. Considerable efforts have been made to achieve highly sensitive and wearable sensors that can simultaneously detect multiple stimuli such as stretch, pressure, temperature or touch. Highly stretchable multifunctional sensors that can detect strain (up to 50%), pressure (up to 1 MPa) and finger touch with good sensitivity, fast response time ( 40 ms) and good pressure mapping function were developed. The sensors were demonstrated for several wearable applications including monitoring thumb movements and knee motions, illustrating the potential utilities of such sensors in robotic systems, prosthetics, healthcare and flexible touch panels. In addition to mechanical sensors, a wearable skin hydration sensor made of silver nanowires (AgNWs) in a polydimethylsiloxane (PDMS) matrix was demonstrated based on skin impedance measurement. The hydration sensors were packaged into a flexible wristband for skin hydration monitoring and a chest patch consisting of a strain sensor, three electrocardiogram (ECG) electrodes and a skin hydration sensor for multimodal sensing. The wearable wristband and chest patch may be used for low-cost, wireless and continuous sensing of skin hydration and other health parameters. Two representative applications of the nanomaterials for soft actuators were investigated. In the first application on bimorph actuation, low-voltage and extremely flexible electrothermal bimorph actuators were fabricated in a simple, efficient and scalable process. The bimorph actuators were made of flexible Ag

  5. Advanced control techniques for post-buckled precompressed (PBP) flight control actuators

    NARCIS (Netherlands)

    Groen, M.; Van Schravendijk, M.; Barrett, R.; Vos, R.

    2009-01-01

    The dynamic response of a new class of flight control actuators that rely on post-buckled recompressed (PBP) piezoelectric elements is investigated. While past research has proven that PBP actuators are capable of generating deflections three times higher than conventional bimorph actuators, this

  6. Improving tapping mode atomic force microscopy with piezoelectric cantilevers

    International Nuclear Information System (INIS)

    Rogers, B.; Manning, L.; Sulchek, T.; Adams, J.D.

    2004-01-01

    This article summarizes improvements to the speed, simplicity and versatility of tapping mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric microcantilever with a sharp silicon tip and a thin, low-stress zinc oxide (ZnO) film to both actuate and sense deflection. First, we demonstrate self-sensing tapping mode without laser detection. Similar previous work has been limited by unoptimized probe tips, cantilever thicknesses, and stress in the piezoelectric films. Tests indicate self-sensing amplitude resolution is as good or better than optical detection, with double the sensitivity, using the same type of cantilever. Second, we demonstrate self-oscillating tapping mode AFM. The cantilever's integrated piezoelectric film serves as the frequency-determining component of an oscillator circuit. The circuit oscillates the cantilever near its resonant frequency by applying positive feedback to the film. We present images and force-distance curves using both self-sensing and self-oscillating techniques. Finally, high-speed tapping mode imaging in liquid, where electric components of the cantilever require insulation, is demonstrated. Three cantilever coating schemes are tested. The insulated microactuator is used to simultaneously vibrate and actuate the cantilever over topographical features. Preliminary images in water and saline are presented, including one taken at 75.5 μm/s - a threefold improvement in bandwidth versus conventional piezotube actuators

  7. Chained Iron Microparticles for Directionally Controlled Actuation of Soft Robots.

    Science.gov (United States)

    Schmauch, Marissa M; Mishra, Sumeet R; Evans, Benjamin A; Velev, Orlin D; Tracy, Joseph B

    2017-04-05

    Magnetic field-directed self-assembly of magnetic particles in chains is useful for developing directionally responsive materials for applications in soft robotics. Using materials with greater complexity allows advanced functions, while still using simple device architectures. Elastomer films containing chained magnetic microparticles were prepared through solvent casting and formed into magnetically actuated lifters, accordions, valves, and pumps. Chaining both enhances actuation and imparts a directional response. Cantilevers used as lifters were able to lift up to 50 times the mass of the polymer film. We introduce the "specific torque", the torque per field per mass of magnetic particles, as a figure of merit for assessing and comparing the performance of lifters and related devices. Devices in this work generated specific torques of 68 Nm/kgT, which is significantly higher than in previously reported actuators. Applying magnetic fields to folded accordion structures caused extension and compression, depending on the accordion's orientation. In peristaltic pumps comprised of composite tubes containing embedded chains, magnetic fields caused a section of the tube to pinch closed where the field was applied. These results will facilitate both the further development of soft robots based on chained magnetic particles and efforts to engineer materials with higher specific torque.

  8. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud

    2012-02-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates in the line it sets an alternating current in the actuator electrodes. This flowing current drives the piezoelectric cantilever to mechanical movement, especially when the frequency of the RF signal matches the mechanical resonant frequency of the cantilever. Output voltage signals versus frequency for both mechanical vibrational and RF signal excitations have been measured using different loads.© 2011 Elsevier Ltd. All rights reserved.

  9. Cantilevered probe detector with piezoelectric element

    Science.gov (United States)

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2013-04-30

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  10. Piezoelectric Energy Harvesting in Internal Fluid Flow

    Directory of Open Access Journals (Sweden)

    Hyeong Jae Lee

    2015-10-01

    Full Text Available We consider piezoelectric flow energy harvesting in an internal flow environment with the ultimate goal powering systems such as sensors in deep oil well applications. Fluid motion is coupled to structural vibration via a cantilever beam placed in a converging-diverging flow channel. Two designs were considered for the electromechanical coupling: first; the cantilever itself is a piezoelectric bimorph; second; the cantilever is mounted on a pair of flextensional actuators. We experimentally investigated varying the geometry of the flow passage and the flow rate. Experimental results revealed that the power generated from both designs was similar; producing as much as 20 mW at a flow rate of 20 L/min. The bimorph designs were prone to failure at the extremes of flow rates tested. Finite element analysis (FEA showed fatigue failure was imminent due to stress concentrations near the bimorph’s clamped region; and that robustness could be improved with a stepped-joint mounting design. A similar FEA model showed the flextensional-based harvester had a resonant frequency of around 375 Hz and an electromechanical coupling of 0.23 between the cantilever and flextensional actuators in a vacuum. These values; along with the power levels demonstrated; are significant steps toward building a system design that can eventually deliver power in the Watts range to devices down within a well.

  11. MEMS earthworm: a thermally actuated peristaltic linear micromotor

    Science.gov (United States)

    Arthur, Craig; Ellerington, Neil; Hubbard, Ted; Kujath, Marek

    2011-03-01

    This paper examines the design, fabrication and testing of a bio-mimetic MEMS (micro-electro mechanical systems) earthworm motor with external actuators. The motor consists of a passive mobile shuttle with two flexible diamond-shaped segments; each segment is independently squeezed by a pair of stationary chevron-shaped thermal actuators. Applying a specific sequence of squeezes to the earthworm segments, the shuttle can be driven backward or forward. Unlike existing inchworm drives that use clamping and thrusting actuators, the earthworm actuators apply only clamping forces to the shuttle, and lateral thrust is produced by the shuttle's compliant geometry. The earthworm assembly is fabricated using the PolyMUMPs process with planar dimensions of 400 µm width by 800 µm length. The stationary actuators operate within the range of 4-9 V and provide a maximum shuttle range of motion of 350 µm (approximately half its size), a maximum shuttle speed of 17 mm s-1 at 10 kHz, and a maximum dc shuttle force of 80 µN. The shuttle speed was found to vary linearly with both input voltage and input frequency. The shuttle force was found to vary linearly with the actuator voltage.

  12. MEMS earthworm: a thermally actuated peristaltic linear micromotor

    International Nuclear Information System (INIS)

    Arthur, Craig; Ellerington, Neil; Hubbard, Ted; Kujath, Marek

    2011-01-01

    This paper examines the design, fabrication and testing of a bio-mimetic MEMS (micro-electro mechanical systems) earthworm motor with external actuators. The motor consists of a passive mobile shuttle with two flexible diamond-shaped segments; each segment is independently squeezed by a pair of stationary chevron-shaped thermal actuators. Applying a specific sequence of squeezes to the earthworm segments, the shuttle can be driven backward or forward. Unlike existing inchworm drives that use clamping and thrusting actuators, the earthworm actuators apply only clamping forces to the shuttle, and lateral thrust is produced by the shuttle's compliant geometry. The earthworm assembly is fabricated using the PolyMUMPs process with planar dimensions of 400 µm width by 800 µm length. The stationary actuators operate within the range of 4–9 V and provide a maximum shuttle range of motion of 350 µm (approximately half its size), a maximum shuttle speed of 17 mm s −1 at 10 kHz, and a maximum dc shuttle force of 80 µN. The shuttle speed was found to vary linearly with both input voltage and input frequency. The shuttle force was found to vary linearly with the actuator voltage.

  13. Direct torsional actuation of microcantilevers using magnetic excitation

    Energy Technology Data Exchange (ETDEWEB)

    Gosvami, Nitya Nand; Nalam, Prathima C.; Tam, Qizhan; Carpick, Robert W., E-mail: carpick@seas.upenn.edu [Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States); Exarhos, Annemarie L.; Kikkawa, James M. [Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)

    2014-09-01

    Torsional mode dynamic force microscopy can be used for a wide range of studies including mapping lateral contact stiffness, torsional frequency or amplitude modulation imaging, and dynamic friction measurements of various materials. Piezo-actuation of the cantilever is commonly used, but it introduces spurious resonances, limiting the frequency range that can be sampled, and rendering the technique particularly difficult to apply in liquid medium where the cantilever oscillations are significantly damped. Here, we demonstrate a method that enables direct torsional actuation of cantilevers with high uniformity over wide frequency ranges by attaching a micrometer-scale magnetic bead on the back side of the cantilever. We show that when beads are magnetized along the width of the cantilever, efficient torsional actuation of the cantilevers can be achieved using a magnetic field produced from a solenoid placed underneath the sample. We demonstrate the capability of this technique by imaging atomic steps on graphite surfaces in tapping mode near the first torsional resonance of the cantilever in dodecane. The technique is also applied to map the variations in the lateral contact stiffness on the surface of graphite and polydiacetylene monolayers.

  14. Cantilever surface stress sensors with single-crystalline silicon piezoresistors

    DEFF Research Database (Denmark)

    Rasmussen, Peter Andreas; Hansen, Ole; Boisen, Anja

    2005-01-01

    We present a cantilever with piezoresistive readout optimized for measuring the static deflection due to isotropic surface stress on the surface of the cantilever [Sens. Actuators B 79(2-3), 115 (2001)]. To our knowledge nobody has addressed the difference in physical regimes, and its influence o...

  15. Miniature Low-Mass Drill Actuated by Flextensional Piezo Stack

    Science.gov (United States)

    Sherrit, Stewart; Badescu, Mircea; Bar-Cohen, Yoseph

    2010-01-01

    Recent experiments with a flextensional piezoelectric actuator have led to the development of a sampler with a bit that is designed to produce and capture a full set of sample forms including volatiles, powdered cuttings, and core fragments. The flextensional piezoelectric actuator is a part of a series of devices used to amplify the generated strain from piezoelectric actuators. Other examples include stacks, bimorphs, benders, and cantilevers. These devices combine geometric and resonance amplifications to produce large stroke at high power density. The operation of this sampler/drill was demonstrated using a 3x2x1-cm actuator weighing 12 g using power of about 10-W and a preload of about 10 N. A limestone block was drilled to a depth of about 1 cm in five minutes to produce powdered cuttings. It is generally hard to collect volatiles from random surface profiles found in rocks and sediment, powdered cuttings, and core fragments. Toward the end of collecting volatiles, the actuator and the bit are covered with bellows-shaped shrouds to prevent fines and other debris from reaching the analyzer. A tube with a miniature bellows (to provide flexibility) is connected to the bit and directs the flow of the volatiles to the analyzer. Another modality was conceived where the hose is connected to the bellows wall directly to allow the capture of volatiles generated both inside and outside the bit. A wide variety of commercial bellows used in the vacuum and microwave industries can be used to design the volatiles capture mechanism. The piezoelectric drilling mechanism can potentially be operated in a broad temperature range from about-200 to less than 450 C. The actuators used here are similar to the actuators that are currently baselined to fly as part of the inlet funnel shaking mechanism design of MSL (Mars Science Laboratory). The space qualification of these parts gives this drill a higher potential for inclusion in a future mission, especially when considering its

  16. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Directory of Open Access Journals (Sweden)

    Yingxiang Liu

    Full Text Available BACKGROUND: Ultrasonic motors (USM are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS: A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. CONCLUSIONS: The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  17. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    Science.gov (United States)

    Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

    2010-04-02

    Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  18. Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities

    Energy Technology Data Exchange (ETDEWEB)

    Torello, D.; Degertekin, F. Levent, E-mail: levent.degertekin@me.gatech.edu [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332 (United States)

    2013-11-15

    A new method of actuating atomic force microscopy (AFM) cantilevers is proposed in which a high frequency (>5 MHz) wave modulated by a lower frequency (∼300 kHz) wave passes through a contact acoustic nonlinearity at the contact interface between the actuator and the cantilever chip. The nonlinearity converts the high frequency, modulated signal to a low frequency drive signal suitable for actuation of tapping-mode AFM probes. The higher harmonic content of this signal is filtered out mechanically by the cantilever transfer function, providing for clean output. A custom probe holder was designed and constructed using rapid prototyping technologies and off-the-shelf components and was interfaced with an Asylum Research MFP-3D AFM, which was then used to evaluate the performance characteristics with respect to standard hardware and linear actuation techniques. Using a carrier frequency of 14.19 MHz, it was observed that the cantilever output was cleaner with this actuation technique and added no significant noise to the system. This setup, without any optimization, was determined to have an actuation bandwidth on the order of 10 MHz, suitable for high speed imaging applications. Using this method, an image was taken that demonstrates the viability of the technique and is compared favorably to images taken with a standard AFM setup.

  19. Comparison of microtweezers based on three lateral thermal actuator configurations

    Science.gov (United States)

    Luo, J. K.; Flewitt, A. J.; Spearing, S. M.; Fleck, N. A.; Milne, W. I.

    2005-06-01

    Thermal actuator-based microtweezers with three different driving configurations have been designed, fabricated and characterized. Finite element analysis has been used to model the device performance. It was found that one configuration of microtweezer, based on two lateral bimorph thermal actuators, has a small displacement (tip opening of the tweezers) and a very limited operating power range. An alternative configuration consisting of two horizontal hot bars with separated beams as the arms can deliver a larger displacement with a much-extended operating power range. This structure can withstand a higher temperature due to the wider beams used, and has flexible arms for increased displacement. Microtweezers driven by a number of chevron structures in parallel have similar maximum displacements but at a cost of higher power consumption. The measured temperature of the devices confirms that the device with the chevron structure can deliver the largest displacement for a given working temperature, while the bimorph thermal actuator design has the highest operating temperature at the same power due to its thin hot arm, and is prone to structural failure.

  20. Piezoelectric Actuator with Frequency Characteristics for a Middle-Ear Implant.

    Science.gov (United States)

    Shin, Dong Ho; Cho, Jin-Ho

    2018-05-24

    The design and implementation of a novel piezoelectric-based actuator for an implantable middle-ear hearing aid is described in this paper. The proposed actuator has excellent low-frequency output characteristics, and can generate high output in a specific frequency band by adjusting the mechanical resonance. The actuator consists of a piezoelectric element, a miniature bellows, a cantilever membrane, a metal ring support, a ceramic tip, and titanium housing. The optimal structure of the cantilever-membrane design, which determines the frequency characteristics of the piezoelectric actuator, was derived through finite element analysis. Based on the results, the piezoelectric actuator was implemented, and its performance was verified through a cadaveric experiment. It was confirmed that the proposed actuator provides better performance than currently used actuators, in terms of frequency characteristics.

  1. Dynamic Actuation of Single-Crystal Diamond Nanobeams

    OpenAIRE

    Sohn, Young-Ik; Burek, Michael J.; Kara, Vural; Kearns, Ryan; Lončar, Marko

    2014-01-01

    We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices. Gradient radio-frequency electromagnetic forces are used to achieve actuation of both cantilever and doubly clamped beam structures, with operation frequencies ranging from a few MHz to ~50MHz. Frequency tuning and parametric actuation are also studied.

  2. Electrostatic force microscopy with a self-sensing piezoresistive cantilever

    International Nuclear Information System (INIS)

    Pi, U. H.; Kye, J. I.; Shin, S.; Khim, Z. G.; Hong, J. W.; Yoon, S.

    2003-01-01

    We present a new method for electrostatic force microscopy (EFM) using a piezoresistive cantilever instead of the conventional cantilever with an optical detector. In EFM with a piezoresistive cantilever, the electrostatic force between the tip and the sample is monitored by sensing the change in the resistance of the piezoresistive cantilever at a frequency of several tens of kHz. A large stray capacitance effect can be rejected by using an appropriate phase tuning of the phase-sensitive detection. We observed the ferroelectric domain images of a triglycine sulfate single crystal. We could also write fine patterns on a lead-zirconate-titanate (PZT) thin film through domain reversal by applying various dc voltages between the tip and the sample. We suggest that the EFM technique using a self-sensing and self-actuating piezoresistive cantilever can be applied to a high-density data storage field

  3. Structure–performance relationships for cantilever-type piezoelectric energy harvesters

    International Nuclear Information System (INIS)

    Cho, Kyung-Hoon; Park, Hwi-Yeol; Heo, Jin S.; Priya, Shashank

    2014-01-01

    This study provides comprehensive analysis of the structure–performance relationships in cantilever-type piezoelectric energy harvesters. It provides full understanding of the effect of all the practical global control variables on the harvester performance. The control variables considered for the analysis were material parameters, areal and volumetric dimensions, and configuration of the inactive and active layers. Experimentally, the output power density of the harvester was maximum when the shape of the beam was close to a square for a constant bending stiffness and a fixed beam area. Through analytical modeling of the effective stiffness for the piezoelectric bimorph, the conditions for enhancing the bending stiffness within the same beam volume as that of a conventional bimorph were identified. The harvester configuration with beam aspect ratio of 0.86 utilizing distributed inactive layers exhibited an giant output power of 52.5 mW and power density of 28.5 mW cm −3 at 30 Hz under 6.9 m s −2 excitation. The analysis further indicates that the trend in the output power with varying damping ratio is dissimilar to that of the efficiency. In order to realize best performance, the harvester should be designed with respect to maximizing the magnitude of output power.

  4. Design and fabrication of aspherical bimorph PZT optics

    CERN Document Server

    Tseng, T C; Yeh, Z C; Perng, S Y; Wang, D J; Kuan, C K; Chen, J R; Chen, C T

    2001-01-01

    Bimorph piezoelectric optics with a third-order-polynomial surface is designed and a prototype is fabricated as active optics. Two pairs of silicon (Si) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si-PZT-PZT-Si together with a multi-electrode or thin film resistor coating used as the control electrode between Si and PZT and metallic films as grounding between the interface of PZT ceramics. A linear voltage is applied to the bimorph PZT optics by probing the control electrodes from a two-channel controllable power supplier. In doing so, the optics surface can achieve a desired third-order-polynomial surface. Reducing hysteresis and creep in bimorph PZT X-ray optics is the only feasible way by inserting an appropriate capacitor in series with bimorph PZT optics to significantly reduce both effects.

  5. A closed-loop system for frequency tracking of piezoresistive cantilever sensors

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Zhang, Qing; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    A closed loop circuit capable of tracking resonant frequencies for MEMS-based piezoresistive cantilever resonators is developed in this work. The proposed closed-loop system is mainly based on a phase locked loop (PLL) circuit. In order to lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator (VCO) is locked to the phase of the input reference signal of the cantilever sensor. In addition to the PLL component, an instrumentation amplifier and an active low pass filter (LPF) are connected to the system for gaining the amplitude and reducing the noise of the cantilever output signals. The LPF can transform a rectangular signal into a sinusoidal signal with voltage amplitudes ranging from 5 to 10 V which are sufficient for a piezoactuator input (i.e., maintaining a large output signal of the cantilever sensor). To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is utilized for actuating the cantilever into resonance. Implementation of this closed loop system is used to track the resonant frequency of a silicon cantilever-based sensor resonating at 9.4 kHz under a cross-sensitivity test of ambient temperature. The changes of the resonant frequency are interpreted using a frequency counter connected to the system. From the experimental results, the temperature sensitivity and coefficient of the employed sensor are 0.3 Hz/°C and 32.8 ppm/°C, respectively. The frequency stability of the system can reach up to 0.08 Hz. The development of this system will enable real-time nanoparticle monitoring systems and provide a miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors.

  6. Hydraulically amplified PZT mems actuator

    Science.gov (United States)

    Miles, Robin R.

    2004-11-02

    A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.

  7. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad; Chappanda, Karumbaiah N.; Hafiz, Md Abdullah Al; Ramini, Abdallah; Younis, Mohammad I.

    2016-01-01

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever

  8. High-displacement spiral piezoelectric actuators

    Science.gov (United States)

    Mohammadi, F.; Kholkin, A. L.; Jadidian, B.; Safari, A.

    1999-10-01

    A high-displacement piezoelectric actuator, employing spiral geometry of a curved piezoelectric strip is described. The monolithic actuators are fabricated using a layered manufacturing technique, fused deposition of ceramics, which is capable of prototyping electroceramic components with complex shapes. The spiral actuators (2-3 cm in diameter) consisted of 4-5 turns of a lead zirconate titanate ceramic strip with an effective length up to 28 cm. The width was varied from 0.9 to 1.75 mm with a height of 3 mm. When driven by the electric field applied across the width of the spiral wall, the tip of the actuator was found to displace in both radial and tangential directions. The tangential displacement of the tip was about 210 μm under the field of 5 kV/cm. Both the displacement and resonant frequency of the spirals could be tailored by changing the effective length and wall width. The blocking force of the actuator in tangential direction was about 1 N under the field of 5 kV/cm. These properties are advantageous for high-displacement low-force applications where bimorph or monomorph actuators are currently employed.

  9. Bimorph mirrors: The Good, the Bad, and the Ugly

    Science.gov (United States)

    Alcock, Simon G.; Sutter, John P.; Sawhney, Kawal J. S.; Hall, David R.; McAuley, Katherine; Sorensen, Thomas

    2013-05-01

    Bimorph mirrors are widely used by the X-ray, Laser, Space, and Astronomy communities to focus or collimate photon beams. Applying voltages to the embedded piezo ceramics enables the user to globally bend the optical substrate to a range of figures (including cylindrical, parabolic, and elliptical), and finely correct low spatial frequency errors, thus improving optical performance. Bimorph mirrors are employed on numerous synchrotron X-ray beamlines, including several at Diamond Light Source. However, many such beamlines were not achieving the desired size and shape of the reflected X-ray beam. Metrology data from ex-situ, slope measuring profilometry (using the Diamond-NOM) and in-situ, synchrotron X-ray "pencil-beam" scans, revealed sharp defects on the optical substrate directly above the locations at which the piezo ceramics are bonded together. This so-called "junction effect" has been observed on a variety of bimorph mirrors with different numbers of piezos, substrate length, and thickness. To repair this damage, three pairs of bimorph mirrors were re-polished at Thales-SESO. We review the re-polishing process, and show that it successfully removed the junction effect, and significantly improved beamline performance. Since the internal structure of the bimorph mirrors was not modified during re-polishing, it is hoped that the mirrors will retain their surface quality, and remain operational for many years. We also highlight the combination of super-polishing techniques with bimorph technology to create the "Ultimate" mirror, and discuss a next generation, bimorph mirror which is predicted not to suffer from the junction effect.

  10. Bimorph mirrors: The Good, the Bad, and the Ugly

    International Nuclear Information System (INIS)

    Alcock, Simon G.; Sutter, John P.; Sawhney, Kawal J.S.; Hall, David R.; McAuley, Katherine; Sorensen, Thomas

    2013-01-01

    Bimorph mirrors are widely used by the X-ray, Laser, Space, and Astronomy communities to focus or collimate photon beams. Applying voltages to the embedded piezo ceramics enables the user to globally bend the optical substrate to a range of figures (including cylindrical, parabolic, and elliptical), and finely correct low spatial frequency errors, thus improving optical performance. Bimorph mirrors are employed on numerous synchrotron X-ray beamlines, including several at Diamond Light Source. However, many such beamlines were not achieving the desired size and shape of the reflected X-ray beam. Metrology data from ex-situ, slope measuring profilometry (using the Diamond-NOM) and in-situ, synchrotron X-ray “pencil-beam” scans, revealed sharp defects on the optical substrate directly above the locations at which the piezo ceramics are bonded together. This so-called “junction effect” has been observed on a variety of bimorph mirrors with different numbers of piezos, substrate length, and thickness. To repair this damage, three pairs of bimorph mirrors were re-polished at Thales-SESO. We review the re-polishing process, and show that it successfully removed the junction effect, and significantly improved beamline performance. Since the internal structure of the bimorph mirrors was not modified during re-polishing, it is hoped that the mirrors will retain their surface quality, and remain operational for many years. We also highlight the combination of super-polishing techniques with bimorph technology to create the “Ultimate” mirror, and discuss a next generation, bimorph mirror which is predicted not to suffer from the junction effect

  11. Materials selection and design of microelectrothermal bimaterial actuators

    OpenAIRE

    Prasanna, S.; Spearing, S.M.

    2007-01-01

    A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/vo...

  12. Energy harvesting from radio frequency propagation using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud; Alshareef, Husam N.

    2012-01-01

    This work reports an induced strain in a piezoelectric cantilever due to radio frequency signal propagation. The piezoelectric actuator is coupled to radio frequency (RF) line through a gap of 0.25 mm. When a voltage signal of 10 Vpp propagates

  13. Ti Ni shape memory alloy film-actuated microstructures for a MEMS probe card

    Science.gov (United States)

    Namazu, Takahiro; Tashiro, Youichi; Inoue, Shozo

    2007-01-01

    This paper describes the development of a novel silicon (Si) cantilever beam device actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. A Ti-Ni SMA film can yield high work output per unit volume, so a Ti-Ni film-actuated Si cantilever beam device is a prospective tool for use as a microelectromechanical system (MEMS) probe card that provides a relatively large contact force between the probe and electrode pad in spite of its minute size. Before fabrication of the device, the thermomechanical deformation behavior of Ti-Ni SMA films with various compositions was investigated in order to determine a sufficient constituent film for a MEMS actuator. As a result, Ti-Ni films having a Ti content of 50.2 to 52.6 atomic% (at%) were found to be usable for operation as a room temperature actuator. We have developed a Ti-Ni film-actuated Si cantilever beam device, which can produce a contact force by the cantilever bending when in contact, and also by the shape memory effect (SME) of the Ti-Ni film arising from Joule heating. The SME of the Ti-Ni film can generate an additional average contact force of 200 µN with application of 500 mW to the film. In addition to physical contact, a dependable electric contact between the Au film-coated probe tip and the Al film electrode was achieved. However, the contact resistance exhibited an average value of 25 Ω, which would have to be reduced for practical use. Reliability tests confirmed the durability of the Ti-Ni film-actuated Si cantilever-beam, in that the contact resistance was constant throughout a large number of physical contacts (>104 times).

  14. Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

    Science.gov (United States)

    Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

    2015-12-01

    A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling.

  15. Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

    International Nuclear Information System (INIS)

    Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

    2015-01-01

    A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling. (paper)

  16. Electromechanical actuator with controllable motion, fast response rate, and high-frequency resonance based on graphene and polydiacetylene.

    Science.gov (United States)

    Liang, Jiajie; Huang, Lu; Li, Na; Huang, Yi; Wu, Yingpeng; Fang, Shaoli; Oh, Jiyoung; Kozlov, Mikhail; Ma, Yanfeng; Li, Feifei; Baughman, Ray; Chen, Yongsheng

    2012-05-22

    Although widely investigated, novel electromechanical actuators with high overall actuation performance are still in urgent need for various practical and scientific applications, such as robots, prosthetic devices, sensor switches, and sonar projectors. In this work, combining the properties of unique environmental perturbations-actuated deformational isomerization of polydiacetylene (PDA) and the outstanding intrinsic features of graphene together for the first time, we design and fabricate an electromechanical bimorph actuator composed of a layer of PDA crystal and a layer of flexible graphene paper through a simple yet versatile solution approach. Under low applied direct current (dc), the graphene-PDA bimorph actuator with strong mechanical strength can generate large actuation motion (curvature is about 0.37 cm(-1) under a current density of 0.74 A/mm(2)) and produce high actuation stress (more than 160 MPa/g under an applied dc of only 0.29 A/mm(2)). When applying alternating current (ac), this actuator can display reversible swing behavior with long cycle life under high frequencies even up to 200 Hz; significantly, while the frequency and the value of applied ac and the state of the actuators reach an appropriate value, the graphene-PDA actuator can produce a strong resonance and the swing amplitude will jump to a peak value. Moreover, this stable graphene-PDA actuator also demonstrates rapidly and partially reversible electrochromatic phenomenon when applying an ac. Two mechanisms-the dominant one, electric-induced deformation, and a secondary one, thermal-induced expansion of PDA-are proposed to contribute to these interesting actuation performances of the graphene-PDA actuators. On the basis of these results, a mini-robot with controllable direction of motion based on the graphene-PDA actuator is designed to illustrate the great potential of our discoveries for practical use. Combining the unique actuation mechanism and many outstanding properties of

  17. Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

    Science.gov (United States)

    Ali, Shaikh M.; Phinney, Leslie M.

    2003-01-01

    °Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

  18. Macro-Fiber Composite actuated simply supported thin airfoils

    International Nuclear Information System (INIS)

    Bilgen, Onur; Kochersberger, Kevin B; Inman, Daniel J; Ohanian, Osgar J III

    2010-01-01

    A piezoceramic composite actuator known as Macro-Fiber Composite (MFC) is used for actuation in the design of a variable camber airfoil intended for a ducted fan aircraft. The study focuses on response characterization under aerodynamic loads for circular arc airfoils with variable pinned boundary conditions. A parametric study of fluid–structure interaction is employed to find pin locations along the chordwise direction that result in high lift generation. Wind tunnel experiments are conducted on a 1.0% thick, 127 mm chord MFC actuated bimorph airfoil that is simply supported at 5% and 50% of the chord. Aerodynamic and structural performance results are presented for a flow rate of 15 m s −1 and a Reynolds number of 127 000. Non-linear effects due to aerodynamic and piezoceramic hysteresis are identified and discussed. A lift coefficient change of 1.46 is observed, purely due to voltage actuation. A maximum 2D L/D ratio of 17.8 is recorded through voltage excitation

  19. Experimental Determination of Bending Resonances of Millimeter Size PVF2 Cantilevers

    Directory of Open Access Journals (Sweden)

    David F. Thompson

    2003-07-01

    Full Text Available The polymer piezoelectric polvinylidene fluoride has found widespread use in sensors and actuators. The bending mode of piezoelectricity offers very high sensitivities and low mechanical input impedance, but has not been studied in as much detail for sensor applications. We report the dynamic electromechanical properties of millimeter size cantilevers made from electroded films of PVF2. All devices tested had a single polymer layer. Several resonances are found below 1 kHz and the experimentally observed resonance frequency dependence on cantilever thickness and length are seen to agree well with published models which take the properties of the electrodes into account. It is found that bending resonances are also modulated by the width of the cantilever. Therefore, though the length and thickness control the resonance frequency most strongly, the actual realized value can be fine-tuned by changing cantilever width and the electrode material and its thickness. Further, all resonances display high piezoelectric coupling coefficients (keff, ranging between 0.2 - 0.35. The data presented here will be extremely useful in the design of sensors and actuators for a number of applications, since the combination of millimeter size scales and high piezoelectric sensitivities in the low audio range can be realized with this marriage of polymeric materials and cantilever geometries. Such an array of sensors can be used in cochlear implant applications, and when integrated with a resonance interrogation circuit can be used for the detection of low frequency vibrations of large structures. If appropriate mass/elasticity sensitive layers are coated on the electrodes, such a sensor can be used for the detection of a wide range of chemicals and biochemicals.

  20. Pressure-driven peristaltic flow

    International Nuclear Information System (INIS)

    Mingalev, S V; Lyubimov, D V; Lyubimova, T P

    2013-01-01

    The peristaltic motion of an incompressible fluid in two-dimensional channel is investigated. Instead of fixing the law of wall's coordinate variation, the law of pressure variation on the wall is fixed and the border's coordinate changes to provide the law of pressure variation on the wall. In case of small amplitude of pressure-variation on the wall A, expansion wave propagates along the length of channel and the wave results in the peristaltic transport of fluid. In the case of large A, the channel divides into two parts. The small pulsating part in the end of the tube creates the flow as a human heart, while the other big part loses this function. The solution of problem for the first peristaltic mode is stable, while the solution for the second 'heart' mode is unstable and depends heavily on boundary conditions.

  1. Asymmetric actuating structure generates negligible influence on the supporting base for high performance scanning probe microscopies

    Science.gov (United States)

    Yi Yan, Gang; Bin Liu, Yong; Hua Feng, Zhi

    2014-02-01

    An asymmetric actuating structure generating negligible influence on the supporting base for high performance scanning probe microscopies is proposed in this paper. The actuator structure consists of two piezostacks, one is used for actuating while the other is for counterbalancing. In contrast with balanced structure, the two piezostacks are installed at the same side of the supporting base. The effectiveness of the structure is proved by some experiments with the actuators fixed to the free end of a cantilever. Experimental results show that almost all of the vibration modes of the cantilever are suppressed effectively at a wide frequency range of 90 Hz-10 kHz.

  2. Determination of maximum power transfer conditions of bimorph piezoelectric energy harvesters

    KAUST Repository

    Ahmad, Mahmoud Al; Alshareef, Husam N.; Elshurafa, Amro M.; Salama, Khaled N.

    2012-01-01

    the bimorph based on the electromechanical, single degree of freedom, analogy. Further, by taking into account the intrinsic capacitance of the piezoelectric harvester, a more descriptive expression of the resonant frequency in piezoelectric bimorphs

  3. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    International Nuclear Information System (INIS)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-01-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials. (paper)

  4. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    Science.gov (United States)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-08-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

  5. Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

    International Nuclear Information System (INIS)

    Sierakowski, Andrzej; Janus, Paweł; Dobrowolski, Rafał; Grabiec, Piotr; Kopiec, Daniel; Majstrzyk, Wojciech; Kunicki, Piotr; Gotszalk, Teodor; Rangelow, Ivo W

    2017-01-01

    In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical source and detector are needed. When the microcantilever is deflected, the stress is transferred into a change of resistivity of piezoresistors. The integration of piezoresistive read-out provides a promising solution in realizing a compact non-contact AFM. Resolution of piezoresistive read-out is limited by three main noise sources: Johnson, 1/ f and thermomechanical noise. In the dynamic shear force mode measurement the method used for cantilever actuation will also affect the recorded noise in the piezoresistive detection circuit. This is the result of a crosstalk between an aluminium path (current loop used for actuation) and piezoresistors located near the base of the beam. In this paper authors described an elaborated in ITE (Institute of Electron Technology) technology of fabrication cantilevers with piezoresistive detection of deflection and compared efficiency of two methods used for cantilever actuation. (paper)

  6. Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure

    Directory of Open Access Journals (Sweden)

    Liying Jiang

    2011-12-01

    Full Text Available In this work, the problem of a curved functionally graded piezoelectric (FGP actuator with sandwich structure under electrical and thermal loads is investigated. The middle layer in the sandwich structure is functionally graded with the piezoelectric coefficient g31 varying continuously along the radial direction of the curved actuator. Based on the theory of linear piezoelectricity, analytical solutions are obtained by using Airy stress function to examine the effects of material gradient and heat conduction on the performance of the curved actuator. It is found that the material gradient and thermal load have significant influence on the electroelastic fields and the mechanical response of the curved FGP actuator. Without the sacrifice of actuation deflection, smaller internal stresses are generated by using the sandwich actuator with functionally graded piezoelectric layer instead of the conventional bimorph actuator. This work is very helpful for the design and application of curved piezoelectric actuators under thermal environment.

  7. Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure.

    Science.gov (United States)

    Yan, Zhi; Zaman, Mostafa; Jiang, Liying

    2011-12-12

    In this work, the problem of a curved functionally graded piezoelectric (FGP) actuator with sandwich structure under electrical and thermal loads is investigated. The middle layer in the sandwich structure is functionally graded with the piezoelectric coefficient g 31 varying continuously along the radial direction of the curved actuator. Based on the theory of linear piezoelectricity, analytical solutions are obtained by using Airy stress function to examine the effects of material gradient and heat conduction on the performance of the curved actuator. It is found that the material gradient and thermal load have significant influence on the electroelastic fields and the mechanical response of the curved FGP actuator. Without the sacrifice of actuation deflection, smaller internal stresses are generated by using the sandwich actuator with functionally graded piezoelectric layer instead of the conventional bimorph actuator. This work is very helpful for the design and application of curved piezoelectric actuators under thermal environment.

  8. Four-plate piezoelectric actuator driving a large-diameter special optical fiber for nonlinear optical microendoscopy.

    Science.gov (United States)

    Wang, Ying; Li, Zhi; Liang, Xiaobao; Fu, Ling

    2016-08-22

    In nonlinear optical microendoscope (NOME), a fiber with excellent optical characteristics and a miniature scanning mechanism at the distal end are two key components. Double-clad fibers (DCFs) and double-clad photonic crystal fibers (DCPCFs) have shown great optical characteristics but limited vibration amplitude due to large diameter. Besides reducing the damping of fiber cantilever, optimizing the structural of the actuator for lower energy dissipation also contributes to better driving capability. This paper presented an optimized actuator for driving a particular fiber cantilever in the view point of energy. Firstly, deformation energy of a bending fiber cantilever operating in resonant mode is investigated. Secondly, strain and stress analyses revealed that the four-plate actuator achieved lower energy dissipation. Then, finite-element simulations showed that the large-diameter fiber yielded an adequate vibration amplitude driven by a four-plate actuator, which was confirmed by experiments of our home-made four-plate actuator prototypes. Additionally, a NOME based on a DCPCF with a diameter of 350 μm driven by four-plate piezoelectric actuator has been developed. The NOME can excite and collect intrinsic second-harmonic and two-photon fluorescence signals with the excitation power of 10-30 mW and an adequate field of view of 200 μm, which suggest great potential applications in neuroscience and clinical diagnoses.

  9. Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

    NARCIS (Netherlands)

    Bijster, R.J.F.; Vreugd, J. de; Sadeghian Marnani, H.

    2014-01-01

    In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is

  10. Microelectromechanical systems integrating molecular spin crossover actuators

    Energy Technology Data Exchange (ETDEWEB)

    Manrique-Juarez, Maria D. [LCC, CNRS and Université de Toulouse, UPS, INP, F-31077 Toulouse (France); LAAS, CNRS and Université de Toulouse, INSA, UPS, F-31077 Toulouse (France); Rat, Sylvain; Salmon, Lionel; Molnár, Gábor; Bousseksou, Azzedine, E-mail: liviu.nicu@laas.fr, E-mail: azzedine.bousseksou@lcc-toulouse.fr [LCC, CNRS and Université de Toulouse, UPS, INP, F-31077 Toulouse (France); Mathieu, Fabrice; Saya, Daisuke; Séguy, Isabelle; Leïchlé, Thierry; Nicu, Liviu, E-mail: liviu.nicu@laas.fr, E-mail: azzedine.bousseksou@lcc-toulouse.fr [LAAS, CNRS and Université de Toulouse, INSA, UPS, F-31077 Toulouse (France)

    2016-08-08

    Silicon MEMS cantilevers coated with a 200 nm thin layer of the molecular spin crossover complex [Fe(H{sub 2}B(pz){sub 2}){sub 2}(phen)] (H{sub 2}B(pz){sub 2} = dihydrobis(pyrazolyl)borate and phen = 1,10-phenantroline) were actuated using an external magnetic field and their resonance frequency was tracked by means of integrated piezoresistive detection. The light-induced spin-state switching of the molecules from the ground low spin to the metastable high spin state at 10 K led to a well-reproducible shift of the cantilever's resonance frequency (Δf{sub r} = −0.52 Hz). Control experiments at different temperatures using coated as well as uncoated devices along with simple calculations support the assignment of this effect to the spin transition. This latter translates into changes in mechanical behavior of the cantilever due to the strong spin-state/lattice coupling. A guideline for the optimization of device parameters is proposed so as to efficiently harness molecular scale movements for large-scale mechanical work, thus paving the road for nanoelectromechanical systems (NEMS) actuators based on molecular materials.

  11. Characterization of Piezoelectric Actuators for Flow Control over a Wing

    Science.gov (United States)

    Mossi, Karla M.; Bryant, Robert G.

    2004-01-01

    During the past decade, piezoelectric actuators as the active element in synthetic jets demonstrated that they could significantly enhance the overall lift on an airfoil. However, durability, system weight, size, and power have limited their use outside a laboratory. These problems are not trivial, since piezoelectric actuators are physically brittle and display limited displacement. The objective of this study is to characterize the relevant properties for the design of a synthetic jet utilizing three types of piezoelectric actuators as mechanical diaphragms, Radial Field Diaphragms, Thunders, and Bimorphs so that the shape cavity volume does not exceed 147.5 cubic centimeters on a 7centimeter x 7centimeter aerial coverage. These piezoelectric elements were selected because of their geometry, and overall free-displacement. Each actuator was affixed about its perimeter in a cavity, and relevant parameters such as clamped displacement variations with voltage and frequency, air velocities produced through an aperture, and sound pressure levels produced by the piezoelectric diaphragms were measured.

  12. Application of a LIPCA for the structural vibration suppression of an aluminum cantilever beam with a tip mass

    International Nuclear Information System (INIS)

    Martua, Landong; Heo, Seok; Goo, Nam Seo

    2007-01-01

    Use of bare PZT as an actuator in the field of active vibration suppression may cause some drawbacks such as critical breaks in the installation process, short circuits in the host material and low fatigue performance. To alleviate these problems, we developed a new actuator called a lightweight piezocomposite actuator (LIPCA). The LIPCA has five layers: three glass-epoxy layers, a carbon-epoxy layer and a PZT layer. We implemented a LIPCA as an actuator to suppress the vibration of an aluminum cantilever beam with a tip mass. For the control algorithm in our test, we used positive position feedback. The filter frequency for this type of feedback should be tuned to the frequency of the target mode. The first three experimental natural frequencies of the aluminum cantilever beam agree well with the results of finite element methods. The effectiveness of using a LIPCA as an actuator in active vibration suppression was investigated with respect to the time and frequency domains, and the experimental results show that LIPCAs can significantly reduce the amplitude of forced vibrations as well as the settling time of free vibrations

  13. Analytical solutions of the electrostatically actuated curled beam problem

    KAUST Repository

    Younis, Mohammad I.

    2014-01-01

    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We

  14. Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Johnson, Raegan Lynn [Iowa State Univ., Ames, IA (United States)

    2005-01-01

    In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the cantilever beam. This design not only improves the speed of imaging because the piezoelectric film replaces the piezo-tube as an actuator, but the film can also act as a sensor. In addition, the piezoelectric film can excite the cantilever beam near its resonance frequency. This project aims to fabricate piezoelectric microcantilevers for use in the AFM. Prior to fabricating the cantilevers and also part of this project, a systematic study was performed to examine the effects of deposition conditions on the quality of piezoelectric ZnO thin films deposited by RF sputtering. These results will be presented. The deposition parameters that produced the highest quality ZnO film were used in the fabrication of the piezoelectric cantilevers. Unfortunately, the fabricated cantilevers warped due to the intrinsic stress of the ZnO film and were therefore not usable in the AFM. The complete fabrication process will be detailed, the results will be discussed and reasons for the warping will be examined.

  15. Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines

    Energy Technology Data Exchange (ETDEWEB)

    Alcock, Simon G., E-mail: simon.alcock@diamond.ac.uk; Nistea, Ioana; Sutter, John P.; Sawhney, Kawal [Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE (United Kingdom); Fermé, Jean-Jacques; Thellièr, Christophe; Peverini, Luca [Thales-SESO, 305 rue Louis Armand, Pôle d’Activités d’Aix les Milles, Aix-en-Provence (France)

    2015-01-01

    A next-generation bimorph mirror with piezos bonded to the side faces of a monolithic substrate was created. When replacing a first-generation bimorph mirror suffering from the junction effect, the new type of mirror significantly improved the size and shape of the reflected synchrotron X-ray beam. No evidence of the junction effect was observed even after eight months of continuous beamline usage. Piezo bimorph mirrors are versatile active optics used on many synchrotron beamlines. However, many bimorphs suffer from the ‘junction effect’: a periodic deformation of the optical surface which causes major aberrations to the reflected X-ray beam. This effect is linked to the construction of such mirrors, where piezo ceramics are glued directly below the thin optical substrate. In order to address this problem, a next-generation bimorph with piezos bonded to the side faces of a monolithic substrate was developed at Thales-SESO and optimized at Diamond Light Source. Using metrology feedback from the Diamond-NOM, the optical slope error was reduced to ∼0.5 µrad r.m.s. for a range of ellipses. To maximize usability, a novel holder was built to accommodate the substrate in any orientation. When replacing a first-generation bimorph on a synchrotron beamline, the new mirror significantly improved the size and shape of the reflected X-ray beam. Most importantly, there was no evidence of the junction effect even after eight months of continuous beamline usage. It is hoped that this new design will reinvigorate the use of active bimorph optics at synchrotron and free-electron laser facilities to manipulate and correct X-ray wavefronts.

  16. Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines

    International Nuclear Information System (INIS)

    Alcock, Simon G.; Nistea, Ioana; Sutter, John P.; Sawhney, Kawal; Fermé, Jean-Jacques; Thellièr, Christophe; Peverini, Luca

    2015-01-01

    A next-generation bimorph mirror with piezos bonded to the side faces of a monolithic substrate was created. When replacing a first-generation bimorph mirror suffering from the junction effect, the new type of mirror significantly improved the size and shape of the reflected synchrotron X-ray beam. No evidence of the junction effect was observed even after eight months of continuous beamline usage. Piezo bimorph mirrors are versatile active optics used on many synchrotron beamlines. However, many bimorphs suffer from the ‘junction effect’: a periodic deformation of the optical surface which causes major aberrations to the reflected X-ray beam. This effect is linked to the construction of such mirrors, where piezo ceramics are glued directly below the thin optical substrate. In order to address this problem, a next-generation bimorph with piezos bonded to the side faces of a monolithic substrate was developed at Thales-SESO and optimized at Diamond Light Source. Using metrology feedback from the Diamond-NOM, the optical slope error was reduced to ∼0.5 µrad r.m.s. for a range of ellipses. To maximize usability, a novel holder was built to accommodate the substrate in any orientation. When replacing a first-generation bimorph on a synchrotron beamline, the new mirror significantly improved the size and shape of the reflected X-ray beam. Most importantly, there was no evidence of the junction effect even after eight months of continuous beamline usage. It is hoped that this new design will reinvigorate the use of active bimorph optics at synchrotron and free-electron laser facilities to manipulate and correct X-ray wavefronts

  17. Energy Harvesting & Recapture from Human Subjects: Dual-Stage MEMS Cantilever Energy Harvester

    Science.gov (United States)

    2015-03-01

    beam must be anchored to a thermally insulating layer that separates the cantilever from the substrate. Thermal 52 isolation is paramount because the...34Squeeze film air damping in MEMS," Sensors and Actuators A: Physical, vol. 136, pp. 3-27, 2007. 86 [12] Y. Arakawa, "Micro Seismic Power Generator

  18. Determination of maximum power transfer conditions of bimorph piezoelectric energy harvesters

    KAUST Repository

    Ahmad, Mahmoud Al

    2012-07-23

    In this paper, a method to find the maximum power transfer conditions in bimorph piezoelectric-based harvesters is proposed. Explicitly, we derive a closed form expression that relates the load resistance to the mechanical parameters describing the bimorph based on the electromechanical, single degree of freedom, analogy. Further, by taking into account the intrinsic capacitance of the piezoelectric harvester, a more descriptive expression of the resonant frequency in piezoelectric bimorphs was derived. In interest of impartiality, we apply the proposed philosophy on previously published experimental results and compare it with other reported hypotheses. It was found that the proposed method was able to predict the actual optimum load resistance more accurately than other methods reported in the literature. © 2012 American Institute of Physics.

  19. Piezoresistive cantilever force-clamp system

    Energy Technology Data Exchange (ETDEWEB)

    Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L. [Department of Mechanical Engineering, Stanford University, Stanford, California 94305 (United States); Goodman, Miriam B. [Department of Molecular and Cellular Physiology, Stanford University, Stanford, California 94305 (United States)

    2011-04-15

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.

  20. Micro-mechanics of ionic electroactive polymer actuators

    Science.gov (United States)

    Punning, Andres; Põldsalu, Inga; Kaasik, Friedrich; Vunder, Veiko; Aabloo, Alvo

    2015-04-01

    Commonly, modeling of the bending behavior of the ionic electroactive polymer (IEAP) actuators is based on the classical mechanics of cantilever beam. It is acknowledged, that the actuation of the ionic electroactive polymer (IEAP) actuators is symmetric about the centroid - the convex side of the actuator is expanding and the concave side is contracting for exactly the same amount, while the thickness of the actuator remains invariant. Actuating the IEAP actuators and sensors under scanning electron microscope (SEM), in situ, reveals that for some types of them this approach is incorrect. Comparison of the SEM micrographs using the Digital Image Correction (DIC) method results with the precise strain distribution of the IEAP actuators in two directions: in the axial direction, and in the direction of thickness. This information, in turn, points to the physical processes taking place within the electrodes as well as membrane of the trilayer laminate of sub-millimeter thickness. Comparison of the EAP materials, engaged as an actuator as well as a sensor, reveals considerable differences between the micro-mechanics of the two modes.

  1. Multilayer laminated piezoelectric bending actuators: design and manufacturing for optimum power density and efficiency

    International Nuclear Information System (INIS)

    Jafferis, Noah T; Lok, Mario; Wei, Gu-Yeon; Wood, Robert J; Winey, Nastasia

    2016-01-01

    In previous work we presented design and manufacturing rules for optimizing the energy density of piezoelectric bimorph actuators through the use of laser-induced melting, insulating edge coating, and features for rigid ground attachments to maximize force output, as well as a pre-stacked technique to enable mass customization. Here we adapt these techniques to bending actuators with four active layers, which utilize thinner material layers. This allows the use of lower operating voltages, which is important for overall power usage optimization, as typical small-scale power supplies are low-voltage and the efficiency of boost-converter and drive circuitry increases with decreasing output voltage. We show that this optimization results in a 24%–47% reduction in the weight of the required power supply (depending on the type of drive circuit used). We also present scaling arguments to determine when multi-layer actuator are preferable to thinner actuators, and show that our techniques are capable of scaling down to sub-mg weight actuators. (paper)

  2. Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection

    International Nuclear Information System (INIS)

    Goessling, B A; Lucas, T M; Moiseeva, E V; Aebersold, J W; Harnett, C K

    2011-01-01

    In this paper, we explore microfabricated bistable actuators released as thin films from a silicon wafer. The actuators are based on a serpentine design where two cantilevers are coupled at the tips by a thin-film bar. These devices are parameterized by two lengths: cantilever length and the length of the coupling bar. These two dimensions are systematically varied to study the effect of design parameters on bistability. The three-dimensional devices have extremely large deflection (hundreds of microns rather than tens of microns for most planar microactuators of similar size) and are thermally actuated out of the plane of the wafer by applying a bias across either the left or right side of the serpentine. The bistability of these devices is evaluated using electron and optical microscopy. Potential applications include non-volatile mechanical memory, optical shutters, and reconfigurable antenna elements

  3. Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

    2017-06-01

    In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next

  4. High Bandwidth, Fine Resolution Deformable Mirror Design.

    Science.gov (United States)

    1980-03-01

    Low Temperature Solders 68 B.6 Influence Function Parameters 68 APPENDIX C 19 Capacitance Measurement 69 ACCESSION for NTIS white Sectloo ODC Buff...Multilayer actuator: Dilatation versus applied electric field 10 Figure 3 - Multilayer actuator: Influence function 11 Figure 4 - Honeycomb device...bimorph 20 Figure 8 - Bimorph device: Influence function of a bimorph device which has a glass plate 0.20 cm thick 24 Figure 9 - Bimorph device

  5. Newly designed double surface bimorph mirror for BL-15A of the photon factory

    Energy Technology Data Exchange (ETDEWEB)

    Igarashi, Noriyuki, E-mail: noriyuki.igarashi@kek.jp; Nitani, Hiroaki; Takeichi, Yasuo; Niwa, Yasuhiro; Abe, Hitoshi; Kimura, Masao; Mori, Takeharu; Nagatani, Yasuko; Kosuge, Takashi; Kamijo, Ai; Koyama, Atsushi; Shimizu, Nobutaka [Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization 1-1 Oho, Tsukuba, Ibaraki 305-0801 (Japan); Ohta, Hiromasa [Mitsubishi Electric System & Service Co., Ltd. 20F Carrot Tower 4-1-1 Taishido, Setagaya-ku, Tokyo 154-8520 (Japan)

    2016-07-27

    BL-15A is a new x-ray undulator beamline at the Photon Factory. It will be dedicated to two independent research activities, simultaneous XAFS/XRF/XRD experiments, and SAXS/WAXS/GI-SAXS studies. In order to supply a choice of micro-focus, low-divergence and collimated beams, a double surface bimorph mirror was recently developed. To achieve further mirror surface optimization, the pencil beam scanning method was applied for “in-situ” beam inspection and the Inverse Matrix method was used for determination of optimal voltages on the piezoelectric actuators. The corrected beam profiles at every focal spot gave good agreement with the theoretical values and the resultant beam performance is promising for both techniques. Quick and stable switching between highly focused and intense collimated beams was established using this new mirror with the simple motorized stages.

  6. Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines.

    Science.gov (United States)

    Alcock, Simon G; Nistea, Ioana; Sutter, John P; Sawhney, Kawal; Fermé, Jean Jacques; Thellièr, Christophe; Peverini, Luca

    2015-01-01

    Piezo bimorph mirrors are versatile active optics used on many synchrotron beamlines. However, many bimorphs suffer from the `junction effect': a periodic deformation of the optical surface which causes major aberrations to the reflected X-ray beam. This effect is linked to the construction of such mirrors, where piezo ceramics are glued directly below the thin optical substrate. In order to address this problem, a next-generation bimorph with piezos bonded to the side faces of a monolithic substrate was developed at Thales-SESO and optimized at Diamond Light Source. Using metrology feedback from the Diamond-NOM, the optical slope error was reduced to ∼ 0.5 µrad r.m.s. for a range of ellipses. To maximize usability, a novel holder was built to accommodate the substrate in any orientation. When replacing a first-generation bimorph on a synchrotron beamline, the new mirror significantly improved the size and shape of the reflected X-ray beam. Most importantly, there was no evidence of the junction effect even after eight months of continuous beamline usage. It is hoped that this new design will reinvigorate the use of active bimorph optics at synchrotron and free-electron laser facilities to manipulate and correct X-ray wavefronts.

  7. A mechanical model of a non-uniform ionomeric polymer metal composite actuator

    International Nuclear Information System (INIS)

    Anton, Mart; Aabloo, Alvo; Punning, Andres; Kruusmaa, Maarja

    2008-01-01

    This paper describes a mechanical model of an IPMC (ionomeric polymer metal composite) actuator in a cantilever beam configuration. The main contribution of our model is that it gives the most detailed description reported so far of the quasistatic mechanical behaviour of the actuator with non-uniform bending at large deflections. We also investigate a case where part of an IPMC actuator is replaced with a rigid elongation and demonstrate that this configuration would make the actuator behave more linearly. The model is experimentally validated with MuscleSheet(TM) IPMCs, purchased from BioMimetics Inc

  8. Symmetry Breaking by Surface Blocking: Synthesis of Bimorphic Silver Nanoparticles, Nanoscale Fishes and Apples

    Science.gov (United States)

    Cathcart, Nicole; Kitaev, Vladimir

    2016-09-01

    A powerful approach to augment the diversity of well-defined metal nanoparticle (MNP) morphologies, essential for MNP advanced applications, is symmetry breaking combined with seeded growth. Utilizing this approach enabled the formation of bimorphic silver nanoparticles (bi-AgNPs) consisting of two shapes linked by one regrowth point. Bi-AgNPs were formed by using an adsorbing polymer, poly(acrylic acid), PAA, to block the surface of a decahedral AgNP seed and restricting growth of new silver to a single nucleation point. First, we have realized 2-D growth of platelets attached to decahedra producing nanoscale shapes reminiscent of apples, fishes, mushrooms and kites. 1-D bimorphic growth of rods (with chloride) and 3-D bimorphic growth of cubes and bipyramids (with bromide) were achieved by using halides to induce preferential (100) stabilization over (111) of platelets. Furthermore, the universality of the formation of bimorphic nanoparticles was demonstrated by using different seeds. Bi-AgNPs exhibit strong SERS enhancement due to regular cavities at the necks. Overall, the reported approach to symmetry breaking and bimorphic nanoparticle growth offers a powerful methodology for nanoscale shape design.

  9. PZT-5A4/PA and PZT-5A4/PDMS piezoelectric composite bimorphs

    NARCIS (Netherlands)

    Babu, I.; Hendrix, M.M.R.M.; With, de G.

    2014-01-01

    Disc type reinforced piezoelectric composite bimorphs with series connection were designed and the performance was investigated. The composite bimorphs (PZT/PA and PZT/PDMS (40/60 vol%)) were successfully fabricated by a compression molding and solution casting technique. The charge developed at an

  10. Enhancement of Optical Adaptive Sensing by Using a Dual-Stage Seesaw-Swivel Actuator with a Tunable Vibration Absorber

    Directory of Open Access Journals (Sweden)

    Po-Chien Chou

    2011-05-01

    Full Text Available Technological obstacles to the use of rotary-type swing arm actuators to actuate optical pickup modules in small-form-factor (SFF disk drives stem from a hinge’s skewed actuation, subsequently inducing off-axis aberrations and deteriorating optical quality. This work describes a dual-stage seesaw-swivel actuator for optical pickup actuation. A triple-layered bimorph bender made of piezoelectric materials (PZTs is connected to the suspension of the pickup head, while the tunable vibration absorber (TVA unit is mounted on the seesaw swing arm to offer a balanced force to reduce vibrations in a focusing direction. Both PZT and TVA are designed to satisfy stable focusing operation operational requirements and compensate for the tilt angle or deformation of a disc. Finally, simulation results verify the performance of the dual-stage seesaw-swivel actuator, along with experimental procedures and parametric design optimization confirming the effectiveness of the proposed system.

  11. MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

  12. Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

    Science.gov (United States)

    Wasisto, H. S.; Merzsch, S.; Stranz, A.; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.

    2011-06-01

    A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanoparticles mass detection is presented in this work. The cantilever is actuated using a piezoactuator at the bottom end of the cantilever supporting frame. The oscillation of the microcantilever is detected by a self-sensing method utilizing an integrated full Wheatstone bridge as a piezoresistive strain gauge for signal read out. Fabricated piezoresistive cantilevers of 1.5 mm long, 30 μm wide and 25 μm thick have been employed. This self-sensing cantilever is used due to its simplicity, portability, high-sensitivity and low-cost batch microfabrication. In order to investigate air pollution sampling, a nanoparticles collection test of the piezoresistive cantilever sensor is performed in a sealed glass chamber with a stable carbon aerosol inside. The function principle of cantilever sensor is based on detecting the resonance frequency shift that is directly induced by an additional carbon nanoparticles mass deposited on it. The deposition of particles is enhanced by an electrostatic field. The frequency measurement is performed off-line under normal atmospheric conditions, before and after carbon nanoparticles sampling. The calculated equivalent mass-induced resonance frequency shift of the experiment is measured to be 11.78 +/- 0.01 ng and a mass sensitivity of 8.33 Hz/ng is obtained. The proposed sensor exhibits an effective mass of 2.63 μg, a resonance frequency of 43.92 kHz, and a quality factor of 1230.68 +/- 78.67. These results and analysis indicate that the proposed self-sensing piezoresistive silicon cantilever can offer the necessary potential for a mobile nanoparticles monitor.

  13. Environmental Effects on the Polypyrrole Tri-layer Actuator

    Directory of Open Access Journals (Sweden)

    Nirul Masurkar

    2017-04-01

    Full Text Available Electroactive polymer actuators such as polypyrrole (PPy are exciting candidates to drive autonomous devices that require low weight and low power. A simple PPy tri-layer bending type cantilever which operates in the air has been demonstrated previously, but the environmental effect on this actuator is still unknown. The major obstacle in the development of the PPy tri-layer actuator is to create proper packaging that reduces oxidation of the electrolyte and maintains constant displacement. Here, we report the variation in the displacement as well as the charge transfer at the different environmental condition. PPy trilayer actuators were fabricated by depositing polypyrrole on gold-coated porous poly(vinylidene fluoride (PVDF using the electro-synthesis method. It has been demonstrated that the charge transfer of tri-layer actuators is more in an inert environment than in open air. In addition, tri-layer actuators show constant deflection and enhancement of life due to the negligible oxidation rate of the electrolyte in an inert environment.

  14. Simple and Accurate Analytical Solutions of the Electrostatically Actuated Curled Beam Problem

    KAUST Repository

    Younis, Mohammad I.

    2014-01-01

    We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions

  15. Esophageal peristaltic defects in adults with functional dysphagia.

    Science.gov (United States)

    Ratuapli, Shiva K; Hansel, Stephanie L; Umar, Sarah B; Burdick, George E; Ramirez, Francisco C; Fleischer, David E; Harris, Lucinda A; Lacy, Brian E; DiBaise, John K; Crowell, Michael D

    2014-08-01

    Functional dysphagia (FD) is characterized by the presence of dysphagia without evidence of mechanical esophageal obstruction, GERD, and histopathology-based esophageal motor disorders. Dysphagia is common in older patients; however, there is a paucity of information regarding the type and frequency of peristaltic abnormalities compared to younger patients. Based on recently validated criteria for classification of weak peristalsis using high-resolution manometry (HRM), we hypothesized that older patients with FD would have more peristaltic defects detected by HRM compared to younger FD patients. A retrospective review of our motility database yielded 65 patients that met inclusion criteria. Patients were divided into two groups based on age (younger: dysphagia, or quality of life. Dyspeptic symptoms, including nausea (p 5 cm) (p < 0.001). The mean contraction amplitude was also lower in the older group (p < 0.05). These data support the hypothesis that older patients with FD have a higher frequency of peristaltic abnormalities on HRM compared to younger patients. Older age was associated with increased frequency of weak peristalsis with small and large peristaltic defects.

  16. Modelling of Spring Constant and Pull-down Voltage of Non-uniform RF MEMS Cantilever Incorporating Stress Gradient

    Directory of Open Access Journals (Sweden)

    Shimul Chandra SAHA

    2008-11-01

    Full Text Available We have presented a model for spring constant and pull-down voltage of a non-uniform radio frequency microelectromechanical systems (RF MEMS cantilever that works on electrostatic actuation. The residual stress gradient in the beam material that may arise during the fabrication process is also considered in the model. Using basic force deflection calculation of the suspended beam, a stand-alone model for the spring constant and pull-down voltage of the non-uniform cantilever is developed. To compare the model, simulation is performed using standard Finite Element Method (FEM analysis tolls from CoventorWare. The model matches very well with the FEM simulation results. The model will offer an efficient means of design, analysis, and optimization of RF MEMS cantilever switches.

  17. Finite element modelling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper

    International Nuclear Information System (INIS)

    Krecinic, F; Duc, T Chu; Sarro, P M; Lau, G K

    2008-01-01

    This paper presents simulation and experimental characterization of an electro-thermally actuated micro gripper. This micro actuator can conceptually be seen as a bi-morph structure of SU-8 and silicon, actuated by thermal expansion of the polymer. The polymer micro gripper with an embedded comb-like silicon skeleton is designed to reduce unwanted out-of-plane bending of the actuator, while offering a large gripper stroke. The temperature and displacement field of the micro gripper structure is determined using a two-dimensional finite element analysis. This analysis is compared to experimental data from steady-state and transient measurements of the integrated heater resistance, which depends on the average temperature of the actuator. The stability of the polymer actuator is evaluated by recording the transient behaviour of the actual jaw displacements. The maximum single jaw displacement of this micro gripper design is 34 µm at a driving voltage of 4 V and an average actuator temperature of 170 °C. The transient thermal response is modelled by a first-order system with a characteristic time constant of 11.1 ms. The simulated force capability of the device is 0.57 mN per µm jaw displacement

  18. Piezoelectric Actuator Modeling Using MSC/NASTRAN and MATLAB

    Science.gov (United States)

    Reaves, Mercedes C.; Horta, Lucas G.

    2003-01-01

    This paper presents a procedure for modeling structures containing piezoelectric actuators using MSCMASTRAN and MATLAB. The paper describes the utility and functionality of one set of validated modeling tools. The tools described herein use MSCMASTRAN to model the structure with piezoelectric actuators and a thermally induced strain to model straining of the actuators due to an applied voltage field. MATLAB scripts are used to assemble the dynamic equations and to generate frequency response functions. The application of these tools is discussed using a cantilever aluminum beam with a surface mounted piezoelectric actuator as a sample problem. Software in the form of MSCINASTRAN DMAP input commands, MATLAB scripts, and a step-by-step procedure to solve the example problem are provided. Analysis results are generated in terms of frequency response functions from deflection and strain data as a function of input voltage to the actuator.

  19. Transient peristaltic transport of grains in a liquid

    Directory of Open Access Journals (Sweden)

    Marconati Marco

    2017-01-01

    Full Text Available Pumping suspensions and pastes has always been a significant technological challenge in a number of industrial applications ranging from food processing to mining. Peristaltic pumps have become popular to pump and/or dose complex fluids, due to their robustness. During the transport of suspensions with peristaltic pumps, clogging issues may arise, particularly during transient operations. That is a matter of particular concern whenever the pumping device is used intermittently to generate flow only on demand. Further understanding of the transient dynamics of such systems and of the conditions that can lead to jamming would result in more robust peristaltic pump design. To achieve these goals, an experimental setup that simplifies the statorrotor assembly of a peristaltic hose pump was used. In this setup, a roller transfers momentum to a liquid suspension, upon application of a constant load. The evolution of the velocity of the roller was recorded for different concentrations of mono-dispersed spheres of different diameters. The flow is found not to be strongly dependent on the dispersed particle volume fraction, if the size of the suspended phase is comparable with the hose diameter. Conversely, the flow is strongly slowed down when their size is small and the particle concentration is increased. These findings could help improving the design of peristaltic pumps by a more appropriate sizing, given the diameter of the hose and that of the particles to be transported.

  20. Transient peristaltic transport of grains in a liquid

    Science.gov (United States)

    Marconati, Marco; Rault, Sharvari; Charkhi, Farshad; Burbidge, Adam; Engmann, Jan; Ramaioli, Marco

    2017-06-01

    Pumping suspensions and pastes has always been a significant technological challenge in a number of industrial applications ranging from food processing to mining. Peristaltic pumps have become popular to pump and/or dose complex fluids, due to their robustness. During the transport of suspensions with peristaltic pumps, clogging issues may arise, particularly during transient operations. That is a matter of particular concern whenever the pumping device is used intermittently to generate flow only on demand. Further understanding of the transient dynamics of such systems and of the conditions that can lead to jamming would result in more robust peristaltic pump design. To achieve these goals, an experimental setup that simplifies the statorrotor assembly of a peristaltic hose pump was used. In this setup, a roller transfers momentum to a liquid suspension, upon application of a constant load. The evolution of the velocity of the roller was recorded for different concentrations of mono-dispersed spheres of different diameters. The flow is found not to be strongly dependent on the dispersed particle volume fraction, if the size of the suspended phase is comparable with the hose diameter. Conversely, the flow is strongly slowed down when their size is small and the particle concentration is increased. These findings could help improving the design of peristaltic pumps by a more appropriate sizing, given the diameter of the hose and that of the particles to be transported.

  1. Hydrodynamic thrust generation and power consumption investigations for piezoelectric fins with different aspect ratios

    Science.gov (United States)

    Shahab, S.; Tan, D.; Erturk, A.

    2015-12-01

    Bio-inspired hydrodynamic thrust generation using piezoelectric transduction has recently been explored using Macro-Fiber Composite (MFC) actuators. The MFC technology strikes a balance between the actuation force and structural deformation levels for effective swimming performance, and additionally offers geometric scalability, silent operation, and ease of fabrication. Recently we have shown that mean thrust levels comparable to biological fish of similar size can be achieved using MFC fins. The present work investigates the effect of length-to-width (L/b) aspect ratio on the hydrodynamic thrust generation performance of MFC cantilever fins by accounting for the power consumption level. It is known that the hydrodynamic inertia and drag coefficients are controlled by the aspect ratio especially for L/bdrag coefficients from the vibration response to harmonic actuation for the first bending mode. Experiments are then conducted for various actuation voltage levels to quantify the mean thrust resultant and power consumption levels for different aspect ratios. Variation of the thrust coefficient of the MFC bimorph fins with changing aspect ratio is also semi-empirically modeled and presented.

  2. Smart film actuators using biomass plastic

    International Nuclear Information System (INIS)

    Yoneyama, Satoshi; Tanaka, Nobuo

    2011-01-01

    This paper presents a novel smart film actuator based on the use of a biomass plastic as a piezoelectric film. Conventional polymeric smart sensors and actuators have been based upon synthetic piezoelectric polymer films such as PVDF. Almost all synthetic polymers are made from nearly depleted oil resources. In addition combustion of their materials releases carbon dioxide, thereby contributing to global warming. Thus at least two important sustainability principles are violated when employing synthetic polymers: avoiding depletable resources and avoiding ecosystem destruction. To overcome such problems, industrial plastic products made from synthetic polymers were developed to replace oil-based plastics with biomass plastics. This paper applies a biomass plastic with piezoelectricity such as poly-L-lactic acid (PLLA). As a result, PLLA film becomes a distributed parameter actuator per se, hence an environmentally conscious smart film actuator is developed. Firstly, this paper overviews the fundamental properties of piezoelectric synthetic polymers and biopolymers. The concept of carbon neutrality using biopolymers is mentioned. Then a two-dimensional modal actuator for exciting a specific structural mode is proposed. Furthermore, a biomass plastic-based cantilever beam with the capability of modal actuation is developed, the validity of the proposed smart film actuator based upon a biomass plastic being analytically as well as experimentally verified

  3. Development of the Aquarius Antenna Deployment Mechanisms and Spring/Damper Actuator

    Science.gov (United States)

    Johnson, Joel A.

    2008-01-01

    The Aquarius Instrument s large radar reflector dish needed to be stowed for launch, and then deployed on-orbit. The Deployment Subsystem consisted of a cantilevered boom structure and two single-axis hinge mechanisms to accurately deploy and position the reflector dish relative to the radar feed horns. The cantilevered design demanded high stiffness and accuracy from the deployment mechanism at the root of the boom. A preload-generating end-of-travel latch was also required. To largely eliminate the need for control systems, each deployment mechanism was actuated by a passive spring motor with viscous-fluid damping. Tough requirements and adaptation of a heritage actuator to the new application resulted in numerous challenges. Fabrication, assembly, and testing encountered additional problems, though ultimately the system was demonstrated very successfully. This paper revisits the development to highlight which design concepts worked and the many important lessons learned.

  4. Higher Order Modes Excitation of Micro Cantilever Beams

    KAUST Repository

    Jaber, Nizar

    2014-05-01

    In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.

  5. 2D MEMS electrostatic cantilever waveguide scanner for potential image display application

    Directory of Open Access Journals (Sweden)

    Gu Kebin

    2015-01-01

    Full Text Available This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input. A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5μm beam diameter is observed at the focal plane. The transmission efficiency is low (~10% and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

  6. Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

    Science.gov (United States)

    Hoof, Sebastian; Nand Gosvami, Nitya; Hoogenboom, Bart W.

    2012-12-01

    Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here, we show that a high-quality resonance (Q >20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity—as expressed via the minimum detectable force gradient—is hardly affected, because of the enhanced quality factor. Through the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up that includes magnetic actuation of the cantilevers and that can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

  7. Real-time deflection and friction force imaging by bimorph-based resonance-type high-speed scanning force microscopy in the contact mode.

    Science.gov (United States)

    Cai, Wei; Fan, Haiyun; Zhao, Jianyong; Shang, Guangyi

    2014-01-01

    We report herein an alternative high-speed scanning force microscopy method in the contact mode based on a resonance-type piezoelectric bimorph scanner. The experimental setup, the modified optical beam deflection scheme suitable for smaller cantilevers, and a high-speed control program for simultaneous data capture are described in detail. The feature of the method is that the deflection and friction force images of the sample surface can be obtained simultaneously in real time. Images of various samples (e.g., a test grating, a thin gold film, and fluorine-doped tin oxide-coated glass slides) are acquired successfully. The imaging rate is 25 frames per second, and the average scan speed reaches a value of approximately 2.5 cm/s. The method combines the advantages of both observing the dynamic processes of the sample surface and monitoring the frictional properties on the nanometer scale. 07.79.Lh; 07.79.Sp; 68.37.Ps.

  8. Swarm intelligence algorithms for integrated optimization of piezoelectric actuator and sensor placement and feedback gains

    International Nuclear Information System (INIS)

    Dutta, Rajdeep; Ganguli, Ranjan; Mani, V

    2011-01-01

    Swarm intelligence algorithms are applied for optimal control of flexible smart structures bonded with piezoelectric actuators and sensors. The optimal locations of actuators/sensors and feedback gain are obtained by maximizing the energy dissipated by the feedback control system. We provide a mathematical proof that this system is uncontrollable if the actuators and sensors are placed at the nodal points of the mode shapes. The optimal locations of actuators/sensors and feedback gain represent a constrained non-linear optimization problem. This problem is converted to an unconstrained optimization problem by using penalty functions. Two swarm intelligence algorithms, namely, Artificial bee colony (ABC) and glowworm swarm optimization (GSO) algorithms, are considered to obtain the optimal solution. In earlier published research, a cantilever beam with one and two collocated actuator(s)/sensor(s) was considered and the numerical results were obtained by using genetic algorithm and gradient based optimization methods. We consider the same problem and present the results obtained by using the swarm intelligence algorithms ABC and GSO. An extension of this cantilever beam problem with five collocated actuators/sensors is considered and the numerical results obtained by using the ABC and GSO algorithms are presented. The effect of increasing the number of design variables (locations of actuators and sensors and gain) on the optimization process is investigated. It is shown that the ABC and GSO algorithms are robust and are good choices for the optimization of smart structures

  9. Control of a flexible beam actuated by macro-fiber composite patches: I. Modeling and feedforward trajectory control

    International Nuclear Information System (INIS)

    Schröck, Johannes; Meurer, Thomas; Kugi, Andreas

    2011-01-01

    This paper considers a systematic approach for motion planning and feedforward control design for a flexible cantilever actuated by piezoelectric macro-fiber composite (MFC) patches. For accurate feedforward tracking control, special attention has to be paid to the inherent nonlinear hysteresis and creep behavior of these actuators. In order to account for these effects an appropriate compensator is applied which allows us to perform the tracking controller design on the basis of a linear infinite-dimensional model. A detailed analysis of the nonlinear actuator behavior as well as the compensator design and the overall experimental validation is presented in the companion paper (Schröck et al 2011 Smart Mater. Struct. 20 015016). The governing equations of motion of the hysteresis and creep compensated cantilever are determined by means of the extended Hamilton's principle. This allows us to consider the influence of the bonded patch actuators on the mechanical properties of the underlying beam structure in a straightforward manner and results in a model with spatially varying system parameters. For the solution of the motion planning and feedforward control problem a flatness-based methodology is proposed. In a first step, the infinite-dimensional system of the MFC-actuated flexible cantilever is approximated by a finite-dimensional model, where all system variables, i.e. the states, input and output, can be parameterized in terms of a so-called flat output. In a second step, it is shown by numerical simulations that these parameterizations converge with increasing system order of the finite-dimensional model such that the feedforward control input can be directly calculated in order to realize prescribed output trajectories

  10. Nonlinear mathematical modeling of vibrating motion of nanomechanical cantilever active probe

    Directory of Open Access Journals (Sweden)

    Reza Ghaderi

    Full Text Available Nonlinear vibration response of nanomechanical cantilever (NMC active probes in atomic force microscope (AFM application has been studied in the amplitude mode. Piezoelectric layer is placed piecewise and as an actuator on NMC. Continuous beam model has been chosen for analysis with regard to the geometric discontinuities of piezoelectric layer attachment and NMC's cross section. The force between the tip and the sample surface is modeled using Leonard-Jones potential. Assuming that cantilever is inclined to the sample surface, the effect of nonlinear force on NMC is considered as a shearing force and the concentrated bending moment is regarded at the end. Nonlinear frequency response of NMC is obtained close to the sample surface using the dynamic modeling. It is then become clear that the distance and angle of NMC, the probe length, and the geometric dimensions of piezoelectric layer can affect frequency response bending of the curve.

  11. Feedback tracking control for dynamic morphing of piezocomposite actuated flexible wings

    Science.gov (United States)

    Wang, Xiaoming; Zhou, Wenya; Wu, Zhigang

    2018-03-01

    Aerodynamic properties of flexible wings can be improved via shape morphing using piezocomposite materials. Dynamic shape control of flexible wings is investigated in this study by considering the interactions between structural dynamics, unsteady aerodynamics and piezo-actuations. A novel antisymmetric angle-ply bimorph configuration of piezocomposite actuators is presented to realize coupled bending-torsional shape control. The active aeroelastic model is derived using finite element method and Theodorsen unsteady aerodynamic loads. A time-varying linear quadratic Gaussian (LQG) tracking control system is designed to enhance aerodynamic lift with pre-defined trajectories. Proof-of-concept simulations of static and dynamic shape control are presented for a scaled high-aspect-ratio wing model. Vibrations of the wing and fluctuations in aerodynamic forces are caused by using the static voltages directly in dynamic shape control. The lift response has tracked the trajectories well with favorable dynamic morphing performance via feedback tracking control.

  12. Flow energy piezoelectric bimorph nozzle harvester

    Science.gov (United States)

    Sherrit, Stewart; Lee, Hyeong Jae; Walkemeyer, Phillip; Hasenoehrl, Jennifer; Hall, Jeffrey L.; Colonius, Tim; Tosi, Luis Phillipe; Arrazola, Alvaro; Kim, Namhyo; Sun, Kai; Corbett, Gary

    2014-04-01

    There is a need for a long-life power generation scheme that could be used downhole in an oil well to produce 1 Watt average power. There are a variety of existing or proposed energy harvesting schemes that could be used in this environment but each of these has its own limitations. The vibrating piezoelectric structure is in principle capable of operating for very long lifetimes (decades) thereby possibly overcoming a principle limitation of existing technology based on rotating turbo-machinery. In order to determine the feasibility of using piezoelectrics to produce suitable flow energy harvesting, we surveyed experimentally a variety of nozzle configurations that could be used to excite a vibrating piezoelectric structure in such a way as to enable conversion of flow energy into useful amounts of electrical power. These included reed structures, spring mass-structures, drag and lift bluff bodies and a variety of nozzles with varying flow profiles. Although not an exhaustive survey we identified a spline nozzle/piezoelectric bimorph system that experimentally produced up to 3.4 mW per bimorph. This paper will discuss these results and present our initial analyses of the device using dimensional analysis and constitutive electromechanical modeling. The analysis suggests that an order-of-magnitude improvement in power generation from the current design is possible.

  13. Control of a flexible beam actuated by macro-fiber composite patches: II. Hysteresis and creep compensation, experimental results

    International Nuclear Information System (INIS)

    Schröck, Johannes; Meurer, Thomas; Kugi, Andreas

    2011-01-01

    This paper considers a flexible cantilever beam, which is actuated by piezoelectric macro-fiber composite (MFC) patch actuators. For accurate positioning tasks, special attention has to be paid to the inherent nonlinear hysteresis and creep behavior of these actuators. A detailed analysis of the MFC-actuated cantilever verifies that these nonlinearities can be efficiently captured by an operator-based model using Prandtl–Ishlinskii's theory. Based on a Hammerstein-like model with the nonlinearities at the input connected in series with a linear infinite-dimensional beam model it follows that hysteresis and creep effects can be compensated by application of the inverse operator. Experimental results prove the feasibility of this approach. With this result, the tracking accuracy of the combination of the compensator with the flatness-based feedforward control design as proposed in the companion paper (Schröck et al 2011 Smart Mater. Struct. 20 015015) can be verified. Measurements demonstrate the applicability of this approach for the realization of highly dynamic trajectories for the beam's tip deflection

  14. Mems-based pzt/pzt bimorph thick film vibration energy harvester

    DEFF Research Database (Denmark)

    Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

    2011-01-01

    We describe fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical...... support materials since only PZT is strained, and thus it has a potential for significantly higher output power. An improved process scheme for the energy harvester resulted in a robust fabrication process with a record high fabrication yield of 98.6%. Moreover, the robust fabrication process allowed...... a high pressure treatment of the screen printed PZT thick films prior to sintering, improving the PZT thick film performance and harvester power output reaches 37.1 μW at 1 g....

  15. Mechanical stretching effect on the actuator performance of cellulose electroactive paper

    International Nuclear Information System (INIS)

    Kim, Jung-Hwan; Yun, Ki-Ju; Kim, Joo-Hyung; Kim, Jaehwan

    2009-01-01

    The mechanical stretching effect on the actuating performance of electroactive cellulose paper (EAPap) was studied. A lattice elongation of cellulose fibrils due to in-plane tensile stress along the stretching direction was observed by the x-ray diffraction method. The shrinkage of the fibril diameter as a function of stretching ratio was confirmed by surface and cross-sectional images. While the actuator performance in terms of bending displacement decreased as the stretching ratio increased, the resonance frequency linearly increased as the stretching ratio increased, which was compared with the theoretical frequency data found from a cantilever beam model. The actuator efficiency was evaluated from the electrical input power consumption and the mechanical output power of an EAPap actuator. It was revealed that the stretching process increased the electro-mechanical efficiency of the EAPap actuator. The mechanism of the influence of the stretching effect on the performance of an EAPap actuator is discussed

  16. Miniaturized 3 × 3 array film vibrotactile actuator made with cellulose acetate for virtual reality simulators

    International Nuclear Information System (INIS)

    Ko, Hyun-U; Chan Kim, Hyun; Kim, Jaehwan; Kim, Sang-Youn

    2015-01-01

    This paper reports an array vibrotactile actuator which is suitable for fitting into virtual reality simulators. A 3 × 3 array actuator, of size 15 × 15 × 1 mm 3 , consists of nine cantilever structured cells of which the pillars are supported and made with cellulose acetate by a molding technique. The fabrication process and performance test along with results for the suggested vibrotactile actuator are explained. To simulate the touch force, the top mass is added on the actuator and the actuator performance is measured under actuation. When 2000 V p–p voltage is applied to the actuator, the averaged maximum acceleration for all cells is 0.44 ± 0.19 g, which is above the vibrotactile threshold. The actuation mechanism is associated with the electrostatic force between top and bottom electrodes. (paper)

  17. Design of a Compact, Bimorph Deformable Mirror-Based Adaptive Optics Scanning Laser Ophthalmoscope.

    Science.gov (United States)

    He, Yi; Deng, Guohua; Wei, Ling; Li, Xiqi; Yang, Jinsheng; Shi, Guohua; Zhang, Yudong

    2016-01-01

    We have designed, constructed and tested an adaptive optics scanning laser ophthalmoscope (AOSLO) using a bimorph mirror. The simulated AOSLO system achieves diffraction-limited criterion through all the raster scanning fields (6.4 mm pupil, 3° × 3° on pupil). The bimorph mirror-based AOSLO corrected ocular aberrations in model eyes to less than 0.1 μm RMS wavefront error with a closed-loop bandwidth of a few Hz. Facilitated with a bimorph mirror at a stroke of ±15 μm with 35 elements and an aperture of 20 mm, the new AOSLO system has a size only half that of the first-generation AOSLO system. The significant increase in stroke allows for large ocular aberrations such as defocus in the range of ±600° and astigmatism in the range of ±200°, thereby fully exploiting the AO correcting capabilities for diseased human eyes in the future.

  18. Comparison of peristaltic and Venturi pumps in bimanual microincisional cataract surgery.

    Science.gov (United States)

    Karaguzel, Hande; Karalezli, Aylin; Aslan, Bekir Sitki

    2009-12-01

    Comparison of peristaltic and Venturi pumps in bimanual microincision phacoemulsification on the success of the cataract surgery by using sleeveless phaco tip. Bimanual microincision phacoemulsification was done in 49 eyes using a 1.4-mm temporal clear corneal incision. A peristaltic pump was used in 23 eyes, and a Venturi pump was used in 26 eyes for phacoemulsification. Intraoperative complications, anterior chamber stability, and mean duration of surgery were recorded. Duration of surgery was shorter in the Venturi pump group. Anterior chamber stability could not be established in 17 eyes in the peristaltic pump group; it was established in all eyes in the Venturi pump group. Corneal burns were observed in two eyes in the peristaltic pump group and no eyes in the Venturi pump group. Use of a Venturi pump system and a vented gas-forced infusion system can significantly shorten surgery time and reduce risk of thermal burns.

  19. Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers.

    Science.gov (United States)

    An, Kun; Jin, Xuechen; Meng, Jiang; Li, Xiao; Ren, Yifeng

    2018-05-13

    Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb 0.97 La 0.02 )(Zr 0.95 Ti 0.05 )O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

  20. Pull-in behavior analysis of vibrating functionally graded micro-cantilevers under suddenly DC voltage

    Directory of Open Access Journals (Sweden)

    Jamal Zare

    2015-01-01

    Full Text Available The present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step DC voltage while the fringing-field effect is taken into account in the vibrational equation of motion. By employing modern asymptotic approach namely Homotopy Perturbation Method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the influences of material properties and actuation voltage on dynamic pull-in behavior are investigated. It is demonstrated that the auxiliary term in the homotopy perturbation method is extremely effective for higher order approximation and two terms in series expansions are sufficient to produce an acceptable solution. The strength of this analytical procedure is verified through comparison with numerical results.

  1. Chemical sensor with oscillating cantilevered probe

    Science.gov (United States)

    Adams, Jesse D

    2013-02-05

    The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

  2. Piezoceramic devices and PVDF films as sensors and actuators for intelligent structures

    Science.gov (United States)

    Hanagud, S.; Obal, M. W.; Calise, A. G.

    The use of bonded piezoceramic sensors and piezoceramic actuators to control vibrations in structural dynamic systems is discussed. Equations for developing optimum control strategies are derived. An example of a cantilever beam is considered to illustrate the development procedure for optimal vibration control of structures by the use of piezoceramic sensors, actuators, and rate feedbacks with appropriate gains. Research areas and future directions are outlined, including dynamic coupling and constitutive equations; load and energy transfer; composite structures; optimal dynamic compensation; estimation and identification; and distributed control.

  3. A combined piezoelectric composite actuator and its application to wing/blade tips

    Science.gov (United States)

    Ha, Kwangtae

    A novel combined piezoelectric-composite actuator configuration is proposed and analytically modeled in this work. The actuator is a low complexity, active compliant mechanism obtained by coupling a modified star cross sectional configuration composite beam with a helicoidal bimorph piezoelectric actuator coiled around it. This novel actuator is a good candidate as a hinge tension-torsion bar actuator for a helicopter rotor blade flap or blade tip and mirror rotational positioning. In the wing tip case, the tip deflection angle is different only according to the aerodynamic moment depending on the hinge position of the actuator along the chord and applied voltage because there is no centrifugal force. For an active blade tip subject to incompressible flow and 2D quasi steady airloads, its twist angle is related not only to aerodynamic moment and applied voltage but also to coupling terms, such as the trapeze effect and the tennis racquet effect. Results show the benefit of hinge position aft of the aerodynamic center, such that the blade tip response is amplified by airloads. Contrary to this effect, results also show that the centrifugal effects and inertial effect cause an amplitude reduction in the response. Summation of these effects determines the overall blade tip response. The results for a certain hinge position of Xh=1.5% chord aft of the quarter chord point proves that the tip deflection target design range of beta ∈ [-2,+2] can be achieved for all pitch angle configurations chosen.

  4. Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

    Science.gov (United States)

    Sökmen, Ü.; Stranz, A.; Waag, A.; Ababneh, A.; Seidel, H.; Schmid, U.; Peiner, E.

    2010-06-01

    We report on a micro-machined resonator for mass sensing applications which is based on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin film actuator. An inductively coupled plasma (ICP) cryogenic dry etching process was applied for the micro-machining of the silicon substrate. A shift in resonance frequency was observed, which was proportional to a mass deposited in an e-beam evaporation process on top. We had a mass sensing limit of 5.2 ng. The measurements from the cantilevers of the two arrays revealed a quality factor of 155-298 and a mass sensitivity of 120.34 ng Hz-1 for the first array, and a quality factor of 130-137 and a mass sensitivity of 104.38 ng Hz-1 for the second array. Furthermore, we managed to fabricate silicon cantilevers, which can be improved for the detection in the picogram range due to a reduction of the geometrical dimensions.

  5. Vibration control for precision manufacturing using piezoelectric actuators

    Energy Technology Data Exchange (ETDEWEB)

    Martinez, D.R.; Hinnerichs, T.D.; Redmond, J.M.

    1995-12-31

    Piezoelectric actuators provide high frequency, force, and stiffness capabilities along with reasonable Stroke limits, all of which can be used to increase performance levels in precision manufacturing systems. This paper describes two examples of embedding piezoelectric actuators in structural components for vibration control. One example involves suppressing the self excited chatter phenomenon in the metal cutting process of a milling machine and the other involves damping vibrations induced by rigid body stepping of a photolithography platen. Finite element modeling and analyses are essential for locating and sizing the actuators and permit further simulation studies of the response of the dynamic system. Experimental results are given for embedding piezoelectric actuators in a cantilevered bar configuration, which was used as a surrogate machine tool structure. These results are incorporated into a previously developed milling process simulation and the effect of the control on the cutting process stability diagram is quantified. Experimental results are also given for embedding three piezoelectric actuators in a surrogate photolithography platen to suppress vibrations. These results demonstrate the potential benefit that can be realized by applying advances from the field of adaptive structures to problems in precision manufacturing.

  6. Analysis of an x-ray mirror made from piezoelectric bimorph

    Science.gov (United States)

    Zhang, Yao; Li, Ming; Tang, Shanzhi; Gao, Junxiang; Zhang, Weiwei; Zhu, Peiping

    2017-07-01

    Theoretical analysis of the mechanical behavior of an x-ray mirror made from piezoelectric bimorph is presented. A complete two-dimensional relationship between the radius of curvature of the mirror and the applied voltage is derived. The accuracy of this relationship is studied by comparing the figures calculated by the relationship and Finite Element Analysis. The influences of several critical parameters in the relationship on the radius of curvature are analyzed. It is found that piezoelectric coefficient d31 is the main material property parameter that dominates the radius of curvature, and that the optimal thickness of PZT plate corresponding to largest bending range is 2.5 times of that of faceplate. It is demonstrated that the relationship is helpful for us to complete the primary design of the x-ray mirror made from piezoelectric bimorph.

  7. Augmentation of peristaltic microflows through electro-osmotic mechanisms

    International Nuclear Information System (INIS)

    Chakraborty, Suman

    2006-01-01

    The present work aims to theoretically establish that the employment of an axial electric field can substantially augment the rate of microfluidic transport occurring in peristaltic microtubes. For theoretical analysis, shape evolution of the tube is taken to be arbitrary, except for the fact that the characteristic wavelength is assumed to be significantly greater than the average radius of cross section. First, expressions for the velocity profile within the tube are derived and are subsequently utilized to obtain variations in the net flow rate across the same, as a function of the pertinent system parameters. Subsequently, the modes of interaction between the electro-osmotic and peristaltic mechanisms are established through the variations in the time-averaged flow rates for zero pressure rise and the pressure rise for zero time-averaged flow rates, as expressed in terms of the occlusion number, characteristic electro-osmotic velocity and the peristaltic wave speed. From the simulation predictions, it is suggested that a judicious combination of peristalsis and an axial electrokinetic body force can drastically enhance the time-averaged flow rate, provided that the occlusion number is relatively small

  8. Improved process for forming a three-dimensional undersurface on a printed cantilever

    Science.gov (United States)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

    2018-05-01

    An improvement in the lift-on offset printing process is reported as a means of enabling the structural customization of hollow structures used as moving parts of sensors and actuators. The improved process can add structures to the underside of a hollow structure by modifying the preparation of the pre-structure. As a demonstration, the mechanical displacement of a cantilever in a gravitational acceleration sensor was enhanced by the addition of a proof mass. The improved process can be expected to further produce functionalized hollow structures by an efficient manufacturing process.

  9. Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

    International Nuclear Information System (INIS)

    Larsen, T; Doll, J C; Loizeau, F; Pruitt, B L; Hosseini, N; Fantner, G E; Peng, A W; Ricci, A J

    2017-01-01

    Electrothermal actuators have many advantages compared to other actuators used in micro-electro-mechanical systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10–90% rise time of 85 μ s in air and 234 μ s in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10–90% rise time from 85 μ s to 3 μ s in air and from 234 μ s to 5 μ s in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate. (paper)

  10. Rise Time Reduction of Thermal Actuators Operated in Air and Water through Optimized Pre-Shaped Open-Loop Driving.

    Science.gov (United States)

    Larsen, T; Doll, J C; Loizeau, F; Hosseini, N; Peng, A W; Fantner, G; Ricci, A J; Pruitt, B L

    2017-01-01

    Electrothermal actuators have many advantages compared to other actuators used in Micro-Electro-Mechanical Systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10-90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10-90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

  11. Large electrical manipulation of permittivity in BaTiO3 and Pb(Zr,Ti)O3 bimorph heterostructure

    International Nuclear Information System (INIS)

    Ci, Penghong; Liu, Guoxi; Dong, Shuxiang; Zhang, Li

    2014-01-01

    We report a strain-mediated electric field manipulation of permittivity in BaTiO 3 (barium titanate, BT) ceramic by a Pb(Zr,Ti)O 3 (PZT) bimorph. This BT/PZT heterostructure exhibited a relatively large permittivity tunability of BT up to ±10% in a wide frequency range under an electric field of ±4 kV/cm applied to the PZT bimorph. The permittivity tunability is attributed to the strain in BT produced by the PZT bimorph. Calculations of the relationship between permittivity and applied electric field were developed, and corresponded well with measurements. The BT/PZT heterostructure has potential for applications in broadband field tunable smart electronic devices.

  12. Soft mobile robots driven by foldable dielectric elastomer actuators

    Energy Technology Data Exchange (ETDEWEB)

    Sun, Wenjie; Liu, Fan; Ma, Ziqi; Li, Chenghai; Zhou, Jinxiong, E-mail: jxzhouxx@mail.xjtu.edu.cn [State Key Laboratory for Strength and Vibration of Mechanical Structures and School of Aerospace, Xi' an Jiaotong University, Xi' an 710049 (China)

    2016-08-28

    A cantilever beam with elastic hinge pulled antagonistically by two dielectric elastomer (DE) membranes in tension forms a foldable actuator if one DE membrane is subject to a voltage and releases part of tension. Simply placing parallel rigid bars on the prestressed DE membranes results in enhanced actuators working in a pure shear state. We report design, analysis, fabrication, and experiment of soft mobile robots that are moved by such foldable DE actuators. We describe systematic measurement of the foldable actuators and perform theoretical analysis of such actuators based on minimization of total energy, and a good agreement is achieved between model prediction and measurement. We develop two versions of prototypes of soft mobile robots driven either by two sets of DE membranes or one DE membrane and elastic springs. We demonstrate locomotion of these soft mobile robots and highlight several key design parameters that influence locomotion of the robots. A 45 g soft robot driven by a cyclic triangle voltage with amplitude 7.4 kV demonstrates maximal stroke 160 mm or maximal rolling velocity 42 mm/s. The underlying mechanics and physics of foldable DE actuators can be leveraged to develop other soft machines for various applications.

  13. Theory of a peristaltic pump for fermionic quantum fluids

    Science.gov (United States)

    Romeo, F.; Citro, R.

    2018-05-01

    Motivated by the recent developments in fermionic cold atoms and in nanostructured systems, we propose the model of a peristaltic quantum pump. Differently from the Thouless paradigm, a peristaltic pump is a quantum device that generates a particle flux as the effect of a sliding finite-size microlattice. A one-dimensional tight-binding Hamiltonian model of this quantum machine is formulated and analyzed within a lattice Green's function formalism on the Keldysh contour. The pump observables, as, e.g., the pumped particles per cycle, are studied as a function of the pumping frequency, the width of the pumping potential, the particles mean free path, and system temperature. The proposed analysis applies to arbitrary peristaltic potentials acting on fermionic quantum fluids confined to one dimension. These confinement conditions can be realized in nanostructured systems or, in a more controllable way, in cold atoms experiments. In view of the validation of the theoretical results, we describe the outcomes of the model considering a fermionic cold atoms system as a paradigmatic example.

  14. Fast bender actuators for fish-like aquatic robots

    Science.gov (United States)

    McGovern, S. T.; Spinks, G. M.; Xi, B.; Alici, G.; Truong, V.; Wallace, G. G.

    2008-03-01

    Small, highly-mobile "swimming" robots are desired for underwater monitoring operations, including pollution detection, video mapping and other tasks. Actuator materials of all types are of interest for any application where space is limited. This constraint certainly applies to the small-scale swimming robot, where multiple small actuators are needed for forward/backward propulsion, steering and diving/surfacing. A number of previous studies have demonstrated propulsion of floating objects using IPMC type polymer actuators [1-3] or piezoceramic actuators [4, 5]. Here, we show how propulsion is also possible using a multi-layer polypyrrole bimorph actuator. The actuator is based on our previously published work showing very fast resonance actuation in polypyrrole bending-type actuators [6]. The bending actuator is a tri-layer structure, in which the gold-PVDF (porous poly(vinylidene fluoride) membrane) substrate was coated on both sides with polypyrrole layers to form an electrochemical cell. Polypyrrole films on gold coated PVDF were grown galvanostatically at a current density of 0.10 mA/cm2 for 12 hours from propylene carbonate (PC) solution containing 0.1 M Li+TFSI-, 0.1 M pyrrole and 1% (w/w) water. The polypyrrole deposited PVDF was thoroughly rinsed with acetone and stored in 0.1 M Li+TFSI- / PC solution. The edges of the bulk film were trimmed off and the bending actuators were prepared as rectangular strips typically 2mm wide and 25 mm long. These actuators gave fast operation in air (to 90 Hz), and were utilised as active flexural joints on the tail fin of a fishshaped floating "boat". The actuators were attached to a simple truncated shaped fin and the deflection angle was analysed in both air and liquid for excitation with +/- 1V square wave at a range of frequencies. The mechanical resonance of the fin was seen to be 4.5 Hz in air and 0.45 Hz in PC, which gave deflection angles of approximately 60° and 55° respectively. The boat contained a battery

  15. Solid electroytes for CNT-based actuators

    Science.gov (United States)

    Riemenschneider, Johannes; Geier, Sebastian; Mahrholz, Thorsten; Mosch, Jürgen; Monner, Hans Peter; Sinapius, Michael

    2009-03-01

    Actuators based on carbon nanotubes (CNT) have the potential to generate high forces at very low voltages. The density of the raw material is just 1330 kg/m3, which makes them well applicable for lightweight applications. Moreover, active strains of up to 1% can be achieved - due to the CNTs dimensional changes on charge injection. Therefore the nanotubes have to be arranged and electrically wired like electrodes of a capacitor. In previous works the system's response of the Nanotubes comprising a liquid electrolyte was studied in detail. The major challenge is to repeat such experiments with solid electrolytes, which is a prerequisite for structural integration. In this paper a method is proposed which makes sure the expansion is not based on thermal expansion. This is done by analysing the electrical system response. As thermal expansion is dominated by ohmic resistance the CNT based actuators show a strong capacitive behavior. This behavior is referable to the constitution of the electrochemical double layer around the nanotubes, which causes the tubes to expand. Also a novel test setup is described, which guarantees that the displacement which is measured will not be caused by bending of a bimorph but due to expansion of a single layer of nanotubes. This paper also presents experimental results demonstrating both, the method of electrical characterization of CNT based actuators with implemented solid electrolytes and the novel test setup which is used to measure the needed data. The actuators which were characterized are hybrids of CNT and the solid electrolyte NAFION which is supplying the ions needed to constitute the electrochemical double layer. The manufacturing, processing of these actuators and also some first experimental results are shown. Unfortunately, the results are not as clear as those for liquid electrolytes, which depend on the hybrid character of the analyzed devices. In the liquid electrolyte based case the CNTs are the only source of

  16. Cantilever sensors: Nanomechanical tools for diagnostics

    DEFF Research Database (Denmark)

    Datar, R.; Kim, S.; Jeon, S.

    2009-01-01

    Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science and microfab......Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science...... and microfabrication technology for the label-free detection of biological molecules, allowing miniaturization. Molecular adsorption, when restricted to a single side of a deformable cantilever beam, results in measurable bending of the cantilever. This nanoscale deflection is caused by a variation in the cantilever...... surface stress due to biomolecular interactions and can be measured by optical or electrical means, thereby reporting on the presence of biomolecules. Biological specificity in detection is typically achieved by immobilizing selective receptors or probe molecules on one side of the cantilever using...

  17. Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages

    Science.gov (United States)

    Luo, J. K.; He, J. H.; Fu, Y. Q.; Flewitt, A. J.; Spearing, S. M.; Fleck, N. A.; Milne, W. I.

    2005-08-01

    Normally closed microcages based on highly compressively stressed diamond-like carbon (DLC) and electroplated Ni bimorph structures have been simulated, fabricated and characterized. Finite-element and analytical models were used to simulate the device performance. It was found that the radius of curvature of the bimorph layer can be adjusted by varying the DLC film stress, the total layer thickness and the thickness ratio of the DLC to Ni layers. The angular deflection of the bimorph structures can also be adjusted by varying the finger length. The radius of curvature of the microcage was in the range of 18-50 µm, suitable for capturing and confining micro-objects with sizes of 20-100 µm. The operation of this type of device is very efficient due to the large difference in thermal expansion coefficients of the DLC and the Ni layers. Electrical tests have shown that these microcages can be opened by ~90° utilizing a power smaller than 20 mW. The operating temperatures of the devices under various pulsed currents were extracted through the change in electrical resistance of the devices. The results showed that an average temperature in the range of 400-450 °C is needed to open this type of microcage by ~90°, consistent with the results from analytical simulation and finite-element modelling.

  18. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    International Nuclear Information System (INIS)

    Osmani, Bekim; Töpper, Tino; Weiss, Florian M.; Leung, Vanessa; Müller, Bert; Deschenaux, Christian; Nohava, Jiri

    2015-01-01

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market

  19. Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

    Energy Technology Data Exchange (ETDEWEB)

    Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Leung, Vanessa, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Müller, Bert, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch [Biomaterials Science Center, University of Basel, c/o University Hospital, 4031 Basel (Switzerland); Deschenaux, Christian, E-mail: jiri.nohava@anton-paar.com; Nohava, Jiri, E-mail: jiri.nohava@anton-paar.com [Anton Paar TriTec SA, Rue de la Gare 4, Galileo Center, 2034 Peseux (Switzerland)

    2015-02-17

    Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

  20. Dielectric Actuation of Polymers

    Science.gov (United States)

    Niu, Xiaofan

    in tactile display is investigated by the prototyping of a large scale refreshable Braille display device. Braille is a critical way for the vision impaired community to learn literacy and improve life quality. Current piezoelectrics-based refreshable Braille display technologies are limited to up to 1 line of Braille text, due to the bulky size of bimorph actuators. Based on the unique actuation feature of BSEP, refreshable Braille display devices up to smartphone-size have been demonstrated by polymer sheet laminates. Dots in the devices can be individually controlled via incorporated field-driven BSEP actuators and Joule heater units. A composite material consisting of silver nanowires (AgNW) embedded in a polymer substrate is brought up as a compliant electrode candidate for BSEP application. The AgNW composite is highly conductive (Rs: 10 Ω/sq) and remains conductive at strains as high as 140% (Rs: <10 3 Ω/sq). The baseline conductivity has only small changes up to 90% strain, which makes it low enough for both field driving and stretchable Joule heating. An out-of-plane bistable area strain up to 68% under Joule heating is achieved.

  1. High-bandwidth piezoresistive force probes with integrated thermal actuation

    International Nuclear Information System (INIS)

    Doll, Joseph C; Pruitt, Beth L

    2012-01-01

    We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond timescale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN nm −1 ) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors, while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using the open-source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20-fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness. (paper)

  2. High bandwidth piezoresistive force probes with integrated thermal actuation

    Science.gov (United States)

    Doll, Joseph C.; Pruitt, Beth L.

    2012-01-01

    We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond time scale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN/nm) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using open source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20 fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness. PMID:23175616

  3. Polymeric Cantilever Arrays for Biosensing Applications

    DEFF Research Database (Denmark)

    Calleja, M.; Tamayo, J.; Johansson, Alicia

    2003-01-01

    We report the fabrication of arrays of polymeric cantilevers for biochemistry applications. The cantilevers are fabricated in the polymer SU-8. The use of a polymer as the component material for the cantilevers provides the sensors with very high sensitivity due to convenient mechanical material...... properties. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. The method allows obtaining well-controlled and uniform mechanical properties of the cantilevers. The elastic constant of the cantilevers was measured, and their dynamic response...

  4. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.

    2016-09-15

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator\\'s nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli\\'s beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  5. Multi frequency excited MEMS cantilever beam resonator for Mixer-Filter applications

    KAUST Repository

    Chandran, Akhil A.; Younis, Mohammad I.

    2016-01-01

    Wireless communication uses Radio Frequency waves to transfer information from one point to another. The modern RF front end devices are implementing MEMS in their designs so as to exploit the inherent properties of MEMS devices, such as its low mass, low power consumption, and small size. Among the components in the RF transceivers, band pass filters and mixers play a vital role in achieving the optimum RF performance. And this paper aims at utilizing an electrostatically actuated micro cantilever beam resonator's nonlinear frequency mixing property to realize a Mixer-Filter configuration through multi-frequency excitation. The paper studies about the statics and dynamics of the device. Simulations are carried out to study the added benefits of multi frequency excitation. The modelling of the cantilever beam has been done using a Reduced Order Model of the Euler-Bernoulli's beam equation by implementing the Galerkin discretization. The device is shown to be able to down-convert signals from 960 MHz of frequency to an intermediate frequency around 50 MHz and 70 MHz in Phase 1 and 2, respectively. The simulation showed promising results to take the project to the next level. © 2016 IEEE.

  6. Study of wire electrical discharge machined folded-up corner cube retroreflector with a tunable cantilever beam

    Science.gov (United States)

    Chen, Yu-Fan; Wang, Yen-Hung; Tsai, Jui-che

    2018-03-01

    This work has developed an approach to construct a corner cube retroreflector (CCR). A two-dimensional cutout pattern is first fabricated with wire electrical discharge machining process. It is then folded up into a three-dimensional CCR suspended on a cantilever beam. The folded-up CCR may be driven through external actuators for optical modulation; it can also mechanically respond to perturbation, acceleration, etc., to function as a sensor. Mechanical (static and dynamic modeling) and optical (ray tracing) analyses are also performed.

  7. Sensitivity Enhancement in Magnetic Sensors Based on Ferroelectric-Bimorphs and Multiferroic Composites

    Directory of Open Access Journals (Sweden)

    Gollapudi Sreenivasulu

    2016-02-01

    Full Text Available Multiferroic composites with ferromagnetic and ferroelectric phases have been studied in recent years for use as sensors of AC and DC magnetic fields. Their operation is based on magneto-electric (ME coupling between the electric and magnetic subsystems and is mediated by mechanical strain. Such sensors for AC magnetic fields require a bias magnetic field to achieve pT-sensitivity. Novel magnetic sensors with a permanent magnet proof mass, either on a ferroelectric bimorph or a ferromagnetic-ferroelectric composite, are discussed. In both types, the interaction between the applied AC magnetic field and remnant magnetization of the magnet results in a mechanical strain and a voltage response in the ferroelectric. Our studies have been performed on sensors with a Nd-Fe-B permanent magnet proof mass on (i a bimorph of oppositely-poled lead zirconate titanate (PZT platelets and (ii a layered multiferroic composite of PZT-Metglas-Ni. The sensors have been characterized in terms of sensitivity and equivalent magnetic noise N. Noise N in both type of sensors is on the order of 200 pT/√Hz at 1 Hz, a factor of 10 improvement compared to multiferroic sensors without a proof mass. When the AC magnetic field is applied at the bending resonance for the bimorph, the measured N ≈ 700 pT/√Hz. We discuss models based on magneto-electro-mechanical coupling at low frequency and bending resonance in the sensors and theoretical estimates of ME voltage coefficients are in very good agreement with the data.

  8. Sensitivity Enhancement in Magnetic Sensors Based on Ferroelectric-Bimorphs and Multiferroic Composites.

    Science.gov (United States)

    Sreenivasulu, Gollapudi; Qu, Peng; Petrov, Vladimir; Qu, Hongwei; Srinivasan, Gopalan

    2016-02-20

    Multiferroic composites with ferromagnetic and ferroelectric phases have been studied in recent years for use as sensors of AC and DC magnetic fields. Their operation is based on magneto-electric (ME) coupling between the electric and magnetic subsystems and is mediated by mechanical strain. Such sensors for AC magnetic fields require a bias magnetic field to achieve pT-sensitivity. Novel magnetic sensors with a permanent magnet proof mass, either on a ferroelectric bimorph or a ferromagnetic-ferroelectric composite, are discussed. In both types, the interaction between the applied AC magnetic field and remnant magnetization of the magnet results in a mechanical strain and a voltage response in the ferroelectric. Our studies have been performed on sensors with a Nd-Fe-B permanent magnet proof mass on (i) a bimorph of oppositely-poled lead zirconate titanate (PZT) platelets and (ii) a layered multiferroic composite of PZT-Metglas-Ni. The sensors have been characterized in terms of sensitivity and equivalent magnetic noise N. Noise N in both type of sensors is on the order of 200 pT/√Hz at 1 Hz, a factor of 10 improvement compared to multiferroic sensors without a proof mass. When the AC magnetic field is applied at the bending resonance for the bimorph, the measured N ≈ 700 pT/√Hz. We discuss models based on magneto-electro-mechanical coupling at low frequency and bending resonance in the sensors and theoretical estimates of ME voltage coefficients are in very good agreement with the data.

  9. A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

    Directory of Open Access Journals (Sweden)

    Yo Tanaka

    2014-05-01

    Full Text Available Lab-on-a-chip technology is promising for the miniaturization of chemistry, biochemistry, and/or biology researchers looking to exploit the advantages of a microspace. To manipulate fluid on a microchip, on-chip pumps are indispensable. To date, there have been several types of on-chip pumps including pneumatic, electroactive, and magnetically driven. However these pumps introduce polymers, metals, and/or silicon to the microchip, and these materials have several disadvantages, including chemical or physical instability, or an inherent optical detection limit. To overcome/avoid these issues, glass has been one of the most commonly utilized materials for the production of multi-purpose integrated chemical systems. However, glass is very rigid, and it is difficult to incorporate pumps onto glass microchips. This paper reports the use of a very flexible, ultra-thin glass sheet (minimum thickness of a few micrometers to realize a pump installed on an entirely glass-based microchip. The pump is a peristaltic-type, composed of four serial valves sealing a cavity with two penetrate holes using ultra-thin glass sheet. By this pump, an on-chip circulating flow was demonstrated by directly observing fluid flow, visualized via polystyrene tracking particles. The flow rate was proportional to the pumping frequency, with a maximum flow rate of approximately 0.80 μL/min. This on-chip pump could likely be utilized in a wide range of applications which require the stability of a glass microchip.

  10. Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

    Science.gov (United States)

    2015-08-01

    surface coating developed during the NiTi deposition or anneal that is relatively resistant to the wet etch. Fig. 2 SEMs after the NiTi wet -etch...SEMs of NiTi devices after the 600 °C anneal , wet -etch patterning of the NiTi. A 120-nm Au capping layer was also sputtered. Figure 3a shows a 200-nm...Ni50Ti50 Cantilever 2 3. Results and Discussion 3 3.1 Wet -Etch Patterning NiTi 3 3.2 Dry-Etch Release of NiTi Devices 5 3.3 Thermal Actuation of

  11. An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

    KAUST Repository

    Ilyas, Saad

    2016-06-16

    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.

  12. Mechanical characterization of bucky gel morphing nanocomposite for actuating/sensing applications

    International Nuclear Information System (INIS)

    Ghamsari, Ali Kadkhoda; Woldesenbet, Eyassu; Jin, Yoonyoung

    2012-01-01

    Since the demonstration of the bucky gel actuator (BGA) in 2005, a great deal of effort has been exerted to develop novel applications for this electro-active morphing nanocomposite. This three-layered bimorph nanocomposite can be easily fabricated, operated in air and driven with a few volts. The BGA with improved mechanical strength is an excellent candidate for application in macro- to micro-scale smart structures with actuating and sensing capabilities. However, developing new applications requires identifying and understanding the effective design parameters and mechanical properties, respectively. There has been limited published studies on the mechanical properties of BGA. In this study, the effect of three parameters—layer thickness, carbon nanotube type and weight fraction of components—on the mechanical properties was investigated. Samples were characterized via nano-indentation and DMA. The BGA composed of 22 wt% single-walled carbon nanotubes and 45 wt% ionic liquid exhibited the highest hardness, adhesion, viscosity, and elastic and storage moduli. This study revealed the important role of the carbon nanotube type on BGA adhesion. Samples made with multi-walled carbon nanotubes had the lowest adhesion, which is a required factor in applications such as microfluidics. (paper)

  13. Stress measurements of planar dielectric elastomer actuators

    Energy Technology Data Exchange (ETDEWEB)

    Osmani, Bekim; Aeby, Elise A.; Müller, Bert [Biomaterials Science Center, University of Basel, Gewerbestrasse 14, 4123 Allschwil (Switzerland)

    2016-05-15

    Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a voltage to the DEA electrodes generates an electrostatic pressure in the sandwiched silicone elastomer layer, which causes the underlying PEN substrate to bend. Optical beam deflection enables the detection of the bending angle vs. applied voltage. Bending radii as large as 850 m were reproducibly detected. DEA tests with electric fields of up to 80 V/μm showed limitations in electrode’s conductivity and structure failures. The actuation measurement is essential for the quantitative characterization of nanometer-thin, low-voltage, single- and multi-layer DEAs, as foreseen for artificial sphincters to efficiently treat severe urinary and fecal incontinence.

  14. Stress measurements of planar dielectric elastomer actuators

    International Nuclear Information System (INIS)

    Osmani, Bekim; Aeby, Elise A.; Müller, Bert

    2016-01-01

    Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a voltage to the DEA electrodes generates an electrostatic pressure in the sandwiched silicone elastomer layer, which causes the underlying PEN substrate to bend. Optical beam deflection enables the detection of the bending angle vs. applied voltage. Bending radii as large as 850 m were reproducibly detected. DEA tests with electric fields of up to 80 V/μm showed limitations in electrode’s conductivity and structure failures. The actuation measurement is essential for the quantitative characterization of nanometer-thin, low-voltage, single- and multi-layer DEAs, as foreseen for artificial sphincters to efficiently treat severe urinary and fecal incontinence.

  15. Monolithic micro-electro-thermal actuator integrated with a lateral displacement sensor

    International Nuclear Information System (INIS)

    Zhang, Yan; Choi, Young-Soo; Lee, Dong-Weon

    2010-01-01

    This paper presents monolithically fabricated horizontal thermal actuators integrated with piezoresistive sensors for in situ displacement sensing. The great advantage of a hybrid system is the use of closed feedback control for improving the transient response of a thermal actuator and positioning accuracy. It consists of two 'hot arms' made of doped silicon for Joule heating-induced thermal expansion when a current flow passes through them. The piezoresistor is embedded in the base of the 'cold arm' flexure for monitoring the tip deflection and for performance characterization. This 'cold arm' is not a part of the electrical circuit, which further improves the heat power efficiency and the measurement accuracy. Optimization is achieved mainly through modification of the geometry as well as the fabrication process. The fabricated micro-electro-thermal actuator with an integrated sensor is intended for use as a scanning cantilever in atomic force microscope or as a sample holder to drive the moving object through arrays configuration.

  16. A mathematical model for smart functionally graded beam integrated with shape memory alloy actuators

    International Nuclear Information System (INIS)

    Sepiani, H.; Ebrahimi, F.; Karimipour, H.

    2009-01-01

    This paper presents a theoretical study of the thermally driven behavior of a shape memory alloy (SMA)/FGM actuator under arbitrary loading and boundary conditions by developing an integrated mathematical model. The model studied is established on the geometric parameters of the three-dimensional laminated composite box beam as an actuator that consists of a functionally graded core integrated with SMA actuator layers with a uniform rectangular cross section. The constitutive equation and linear phase transformation kinetics relations of SMA layers based on Tanaka and Nagaki model are coupled with the governing equation of the actuator to predict the stress history and to model the thermo-mechanical behavior of the smart shape memory alloy/FGM beam. Based on the classical laminated beam theory, the explicit solution to the structural response of the structure, including axial and lateral deflections of the structure, is investigated. As an example, a cantilever box beam subjected to a transverse concentrated load is solved numerically. It is found that the changes in the actuator's responses during the phase transformation due to the strain recovery are significant

  17. Graphene cantilever under Casimir force

    Science.gov (United States)

    Derras-Chouk, Amel; Chudnovsky, Eugene M.; Garanin, Dmitry A.; Jaafar, Reem

    2018-05-01

    The stability of graphene cantilever under Casimir attraction to an underlying conductor is investigated. The dependence of the instability threshold on temperature and flexural rigidity is obtained. Analytical work is supplemented by numerical computation of the critical temperature above which the graphene cantilever irreversibly bends down and attaches to the conductor. The geometry of the attachment and exfoliation of the graphene sheet is discussed. It is argued that graphene cantilever can be an excellent tool for precision measurements of the Casimir force.

  18. Three-way flexible cantilever probes for static contact

    DEFF Research Database (Denmark)

    Wang, Fei; Petersen, Dirch Hjorth; Jensen, Helle Vendelbo

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze...

  19. Oscillations of end loaded cantilever beams

    International Nuclear Information System (INIS)

    Macho-Stadler, E; Elejalde-García, M J; Llanos-Vázquez, R

    2015-01-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam. (paper)

  20. Oscillations of end loaded cantilever beams

    Science.gov (United States)

    Macho-Stadler, E.; Elejalde-García, M. J.; Llanos-Vázquez, R.

    2015-09-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam.

  1. Cantilever-like micromechanical sensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest

    2011-01-01

    The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has...... increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus...... on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection....

  2. Parameters Identification for a Composite Piezoelectric Actuator Dynamics

    Directory of Open Access Journals (Sweden)

    Mohammad Saadeh

    2015-03-01

    Full Text Available This work presents an approach for identifying the model of a composite piezoelectric (PZT bimorph actuator dynamics, with the objective of creating a robust model that can be used under various operating conditions. This actuator exhibits nonlinear behavior that can be described using backlash and hysteresis. A linear dynamic model with a damping matrix that incorporates the Bouc–Wen hysteresis model and the backlash operators is developed. This work proposes identifying the actuator’s model parameters using the hybrid master-slave genetic algorithm neural network (HGANN. In this algorithm, the neural network exploits the ability of the genetic algorithm to search globally to optimize its structure, weights, biases and transfer functions to perform time series analysis efficiently. A total of nine datasets (cases representing three different voltage amplitudes excited at three different frequencies are used to train and validate the model. Four cases are considered for training the NN architecture, connection weights, bias weights and learning rules. The remaining five cases are used to validate the model, which produced results that closely match the experimental ones. The analysis shows that damping parameters are inversely proportional to the excitation frequency. This indicates that the suggested hysteresis model is too general for the PZT model in this work. It also suggests that backlash appears only when dynamic forces become dominant.

  3. Normally closed microgrippers using a highly stressed diamond-like carbon and Ni bimorph structure

    Science.gov (United States)

    Luo, J. K.; Flewitt, A. J.; Spearing, S. M.; Fleck, N. A.; Milne, W. I.

    2004-12-01

    A normally closed microgripper with a radius of curvature of 18-50 μm using a diamond-like carbon (DLC) and stress free electroplated Ni bimorph structure has been demonstrated. The large curvature in the fingers of the microgrippers is due to the high compressive stress of the DLC layer. The radius of curvature of the figures can be adjusted by the thickness ratio, and the closure of the devices can also be adjusted by varying the finger length. This device works much more efficiently than other bimorph structures due to the large difference in thermal expansion coefficients between the DLC and the Ni layers. Preliminary electrical tests have shown these microgrippers can be opened by 60°-90° at an applied power of <20mW.

  4. Understanding interferometry for micro-cantilever displacement detection

    Directory of Open Access Journals (Sweden)

    Alexander von Schmidsfeld

    2016-06-01

    Full Text Available Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM operated in ultra-high vacuum is demonstrated for the Michelson and Fabry–Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end delivering and collecting light and a highly reflective micro-cantilever, both together forming the interferometric cavity. For a precise measurement of the cantilever displacement, the relative positioning of fiber and cantilever is of critical importance. We describe a systematic approach for accurate alignment as well as the implications of deficient fiber–cantilever configurations. In the Fabry–Pérot regime, the displacement noise spectral density strongly decreases with decreasing distance between the fiber-end and the cantilever, yielding a noise floor of 24 fm/Hz0.5 under optimum conditions.

  5. Three-way flexible cantilever probes for static contact

    International Nuclear Information System (INIS)

    Wang, Fei; Petersen, Dirch H; Hansen, Christian; Mortensen, Dennis; Friis, Lars; Hansen, Ole; Jensen, Helle V

    2011-01-01

    In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze the geometrical design space that must be fulfilled for the cantilevers to obtain static contact with the test sample. The design space relates the spring constant tensor of the cantilevers to the minimal value of the static tip-to-sample friction coefficient. Using an approximate model, we provide the analytical calculation of the compliance matrix of the L-shaped cantilever. Compared to results derived from finite element model simulations, the theoretical model provides a good qualitative analysis while deviations for the absolute values are seen. From a statistical analysis, the deviation is small for cantilevers with low effective spring constants, while the deviation is significant for large spring constants where the quasi one-dimensional approximation is no longer valid

  6. Peristalticity-driven banded chemical garden

    Science.gov (United States)

    Pópity-Tóth, É.; Schuszter, G.; Horváth, D.; Tóth, Á.

    2018-05-01

    Complex structures in nature are often formed by self-assembly. In order to mimic the formation, to enhance the production, or to modify the structures, easy-to-use methods are sought to couple engineering and self-assembly. Chemical-garden-like precipitation reactions are frequently used to study such couplings because of the intrinsic chemical and hydrodynamic interplays. In this work, we present a simple method of applying periodic pressure fluctuations given by a peristaltic pump which can be used to achieve regularly banded precipitate membranes in the copper-phosphate system.

  7. Development of a microfabricated electrochemical-cantilever hybrid platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Pedersen, Christoffer; Elkjær, Karl

    2011-01-01

    The design and fabrication of a combined electrochemical-cantilever microfluidic system is described. A chip integrating cantilevers with electrodes into a microchannel is presented with the accompanying polymer flow cell. Issues such as electrical and fluid connections are addressed......, electromechanical behavior in ionic solution is investigated, and two uses of the system are demonstrated. First, all cantilevers are functionalized with cysteine, to facilitate detection of Cu2+ ions, then one cantilever is electrochemically cleaned in situ to generate a reference cantilever for differential...

  8. Polymeric cantilever-based biosensors with integrated readout

    DEFF Research Database (Denmark)

    Johansson, Alicia; Blagoi, Gabriela; Boisen, Anja

    2006-01-01

    The authors present an SU-8 cantilever chip with integrated piezoresistors for detection of surface stress changes due to adsorption of biomolecules on the cantilever surface. Mercaptohexanol is used as a model biomolecule to study molecular interactions with Au-coated SU-8 cantilevers and surfac...

  9. Strain-dependent characterization of electrode and polymer network of electrically activated polymer actuators

    Science.gov (United States)

    Töpper, Tino; Osmani, Bekim; Weiss, Florian M.; Winterhalter, Carla; Wohlfender, Fabian; Leung, Vanessa; Müller, Bert

    2015-04-01

    Fecal incontinence describes the involuntary loss of bowel content and affects about 45 % of retirement home residents and overall more than 12 % of the adult population. Artificial sphincter implants for treating incontinence are currently based on mechanical systems with failure rates resulting in revision after three to five years. To overcome this drawback, artificial muscle sphincters based on bio-mimetic electro-active polymer (EAP) actuators are under development. Such implants require polymer films that are nanometer-thin, allowing actuation below 24 V, and electrodes that are stretchable, remaining conductive at strains of about 10 %. Strain-dependent resistivity measurements reveal an enhanced conductivity of 10 nm compared to 30 nm sputtered Au on silicone for strains higher than 5 %. Thus, strain-dependent morphology characterization with optical microscopy and atomic force microscopy could demonstrate these phenomena. Cantilever bending measurements are utilized to determine elastic/viscoelastic properties of the EAP films as well as their long-term actuation behavior. Controlling these properties enables the adjustment of growth parameters of nanometer-thin EAP actuators.

  10. Simultaneous effects of Hall and convective conditions on peristaltic ...

    Indian Academy of Sciences (India)

    c Indian Academy of Sciences. Vol. 85, No. 1. — journal of ... 2Department of Electrical and Computer Engineering, Faculty of Engineering, ... inclined magnetic field on peristaltic flow of couple-stress fluid in an inclined channel, secondly to ...

  11. Design and Implementation of Output Feedback Control for Piezo Actuated Structure Using Embedded System

    Directory of Open Access Journals (Sweden)

    R.Maheswari

    2008-06-01

    Full Text Available This paper presents the design of periodic output feedback control using state feedback gain to control the vibration of piezo actuated cantilever beam. The effectiveness of the controller is evaluated through simulation and experimentally by exciting the structure at resonance. Real time implementation of the controller is done using microcontroller. The closed loop eigen values of the system with periodic output feedback and state feedback are identical.

  12. Segmented bimorph mirrors for adaptive optics: morphing strategy.

    Science.gov (United States)

    Bastaits, Renaud; Alaluf, David; Belloni, Edoardo; Rodrigues, Gonçalo; Preumont, André

    2014-08-01

    This paper discusses the concept of a light weight segmented bimorph mirror for adaptive optics. It focuses on the morphing strategy and addresses the ill-conditioning of the Jacobian of the segments, which are partly outside the optical pupil. Two options are discussed, one based on truncating the singular values and one called damped least squares, which minimizes a combined measure of the sensor error and the voltage vector. A comparison of various configurations of segmented mirrors was conducted; it is shown that segmentation sharply increases the natural frequency of the system with limited deterioration of the image quality.

  13. Computer controlled titration with piston burette or peristaltic pump - a comparison.

    Science.gov (United States)

    Hoffmann, W

    1996-09-01

    The advantages and problems of the use of piston burettes and peristaltic pumps for dosage of titrant solutions in automatic titrations are shown. For comparison, only the dosing devices were exchanged and all other components and conditions remained unchanged. The results of continuous acid base titration show good agreement and comparable reproducibility. Potentiometric sensors (glass electrodes) with different equilibration behaviour influence the results. The capability of such electrodes was tested. Conductometric measurements allow a much faster detection because there is no equilibration of electrodes. Piston burettes should be used for titration with very high precision, titration with organic solvents and slow titrations. Peristaltic pumps seem to be more suitable for continuous titrations and long time operation without service.

  14. Complaint liquid metal electrodes for dielectric elastomer actuators

    Science.gov (United States)

    Finkenauer, Lauren R.; Majidi, Carmel

    2014-03-01

    This work presents a liquid-phase metal electrode to be used with poly(dimethylsiloxane) (PDMS) for a dielectric elastomer actuator (DEA). DEAs are favorable for soft-matter applications where high efficiency and response times are desirable. A consistent challenge faced during the fabrication of these devices is the selection and deposition of electrode material. While numerous designs have been demonstrated with a variety of conductive elastomers and greases, these materials have significant and often intrinsic shortcomings, e.g. low conductivity, hysteresis, incapability of large deformations, and complex fabrication requirements. The liquid metal alloy eutectic Gallium-Indium (EGaIn) is a promising alternative to existing compliant electrodes, having both high conductivity and complete soft-matter functionality. The liquid electrode shares almost the same electrical conductivity as conventional metal wiring and provides no mechanical resistance to bending or stretching of the DEA. This research establishes a straightforward and effective method for quickly depositing EGaIn electrodes, which can be adapted for batch fabrication, and demonstrates the successful actuation of sample curved cantilever elastomer actuators using these electrodes. As with the vast majority of electrostatically actuated elastomer devices, the voltage requirements for these curved DEAs are still quite significant, though modifications to the fabrication process show some improved electrical properties. The ease and speed with which this method can be implemented suggests that the development of a more electronically efficient device is realistic and worthwhile.

  15. A low frequency piezoelectric power harvester using a spiral-shaped bimorph

    Institute of Scientific and Technical Information of China (English)

    HU; Yuantai; HU; Hongping; YANG; Jiashi

    2006-01-01

    We propose a spiral-shaped piezoelectric bimorph power harvester operating with coupled flexural and extensional vibration modes for applications to low frequency energy sources.A theoretical analysis is performed and the computational results show that the spiral structure has relatively low operating frequency compared to beam power harvesters of the same size.It is found that to optimize the performance of a piezoelectric spiral-shaped harvester careful design is needed.

  16. Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

    DEFF Research Database (Denmark)

    Jiang, Chenhui; Johansen, Tom Keinicke; Jónasson, Sævar Þór

    2011-01-01

    This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC...

  17. Vibration energy harvesting in railway tunnels with a wireless sensor node application

    Energy Technology Data Exchange (ETDEWEB)

    Wischke, Martin

    2012-07-01

    Vibration harvesting is a promising concept to prolong the lifetime of batterypowered stand-alone systems, or even to enable their energy-autonomy. This thesis focuses on ambient vibrations converted by electromechanical transducers into electricity. The final goal is energy scavenging from train-induced vibrations in railway tunnels. This is achieved via the development of a suitable harvester for this environment and the practical demonstration of a vibrationpowered wireless sensor node (WSN). At the beginning of this thesis, extensive vibration measurements were performed in several traffic tunnels. The obtained unique data set formed the basis for the design and test of several harvesters. The railway sleeper was chosen as usable harvester location. A shock-resistant double-side suspended piezoelectric cantilever was developed. Several cantilevers with different eigenfrequencies are combined in an array, creating a robust harvester with a broad bandwidth. A field test of 7 days in the Loetschbergbasis-tunnel verified that, on average the sufficient energy for powering a virtual wireless sensor node was scavenged. For application in a real WSN, the harvester array was scaled up to 10 cantilevers. The power management for the sensor node was developed concurrently. The central component is a power switch that monitors the energy level in the system's storage capacitor and only triggers the wireless interface when sufficient energy is available. Combined with a train detection circuit, the presented energy-autonomous WSN reliably reports every passing vehicle. In addition to the development of an energy-autonomous fully integrated WSN, this work investigates nonlinear properties of PZT ceramics. Consideration of the elastostriction and the electrostriction enables a more precises prediction of the tip displacement of a piezoelectric cantilever actuator. Further, the elastostriction is exploited to modify the resonance frequency of a bimorph cantilever. Basing

  18. An electrochemical-cantilever platform for hybrid sensing applications

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie; Dohn, Søren; Boisen, Anja

    2011-01-01

    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined...... mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM....

  19. Peristaltic Transport of a Rheological Fluid: Model for Movement of Food Bolus Through Esophagus

    OpenAIRE

    Misra, J. C.; Maiti, S.

    2011-01-01

    Fluid mechanical peristaltic transport through esophagus has been of concern in the paper. A mathematical model has been developed with an aim to study the peristaltic transport of a rheological fluid for arbitrary wave shapes and tube lengths. The Ostwald-de Waele power law of viscous fluid is considered here to depict the non-Newtonian behaviour of the fluid. The model is formulated and analyzed with the specific aim of exploring some important information concerning the movement of food bo...

  20. An analytical solution for the magneto-electro-elastic bimorph beam forced vibrations problem

    International Nuclear Information System (INIS)

    Milazzo, A; Orlando, C; Alaimo, A

    2009-01-01

    Based on the Timoshenko beam theory and on the assumption that the electric and magnetic fields can be treated as steady, since elastic waves propagate very slowly with respect to electromagnetic ones, a general analytical solution for the transient analysis of a magneto-electro-elastic bimorph beam is obtained. General magneto-electric boundary conditions can be applied on the top and bottom surfaces of the beam, allowing us to study the response of the bilayer structure to electromagnetic stimuli. The model reveals that the magneto-electric loads enter the solution as an equivalent external bending moment per unit length and as time-dependent mechanical boundary conditions through the definition of the bending moment. Moreover, the influences of the electro-mechanic, magneto-mechanic and electromagnetic coupling on the stiffness of the bimorph stem from the computation of the beam equivalent stiffness constants. Free and forced vibration analyses of both multiphase and laminated magneto-electro-elastic composite beams are carried out to check the effectiveness and reliability of the proposed analytic solution

  1. Pressure sensor based on MEMS nano-cantilever beam structure as a heterodielectric gate electrode of dopingless TFET

    Science.gov (United States)

    Kumar, Gagan; Raman, Ashish

    2016-12-01

    Micro-electromechanical systems (MEMS) technology has enticed numerous scientists since recent decades particularly in the field of miniaturized-sensors and actuators. Pressure sensor is pivotal component in both of the forerunning fields. The pursuance of a pressure sensor is exigently relying upon its different physical properties i.e. Piezo-resistive, Piezoelectric, Capacitive, Magnetic and Electrostatic. This article presents an outline and scrutiny of the Doping-less Cantilever Based Pressure Sensor using tunnel field effect transistor technology. The propounded pressure sensor based on the principle of capacitive gate coupling, due to which the tunneling current is modified. Additionally, to enhance the affectability of pressure sensor, the work function of metal gate electrode is amended using gas molecule diffusion. Simulation uncovers a phenomenal relationship amongst hypothetical and practical accepts of configuration. The pressure sensor is composed at Silvaco Atlas tool utilizing 40 nm technologies. The performance results exhibit that the proposed model consumes ≤1 mW power and 250 μA tunneling current per nm bending of cantilever beam structure. The inclusive length of the proposed device is 100 nm.

  2. Design and verification of a smart wing for an extreme-agility micro-air-vehicle

    International Nuclear Information System (INIS)

    Wickramasinghe, Viresh; Chen, Yong; Martinez, Marcias; Kernaghan, Robert; Wong, Franklin

    2011-01-01

    A special class of fixed-wing micro-air-vehicle (MAV) is currently being designed to fly and hover to provide range superiority as well as being able to hover through a flight maneuver known as prop-hanging to accomplish a variety of surveillance missions. The hover maneuver requires roll control of the wing through differential aileron deflection but a conventional system contributes significantly to the gross weight and complexity of a MAV. Therefore, it is advantageous to use smart structure approaches with active materials to design a lightweight, robust wing for the MAV. The proposed smart wing consists of an active trailing edge flap integrated with bimorph actuators with piezoceramic fibers. Actuation is enhanced by preloading the bimorph actuators with a compressive axial load. The preload is exerted on the actuators through a passive latex or electroactive polymer (EAP) skin that wraps around the airfoil. An EAP skin would further enhance the actuation by providing an electrostatic effect of the dielectric polymer to increase the deflection. Analytical modeling as well as finite element analysis show that the proposed concept could achieve the target bi-directional deflection of 30° in typical flight conditions. Several bimorph actuators were manufactured and an experimental setup was designed to measure the static and dynamic deflections. The experimental results validated the analytical technique and finite element models, which have been further used to predict the performance of the smart wing design for a MAV

  3. Design and verification of a smart wing for an extreme-agility micro-air-vehicle

    Science.gov (United States)

    Wickramasinghe, Viresh; Chen, Yong; Martinez, Marcias; Wong, Franklin; Kernaghan, Robert

    2011-12-01

    A special class of fixed-wing micro-air-vehicle (MAV) is currently being designed to fly and hover to provide range superiority as well as being able to hover through a flight maneuver known as prop-hanging to accomplish a variety of surveillance missions. The hover maneuver requires roll control of the wing through differential aileron deflection but a conventional system contributes significantly to the gross weight and complexity of a MAV. Therefore, it is advantageous to use smart structure approaches with active materials to design a lightweight, robust wing for the MAV. The proposed smart wing consists of an active trailing edge flap integrated with bimorph actuators with piezoceramic fibers. Actuation is enhanced by preloading the bimorph actuators with a compressive axial load. The preload is exerted on the actuators through a passive latex or electroactive polymer (EAP) skin that wraps around the airfoil. An EAP skin would further enhance the actuation by providing an electrostatic effect of the dielectric polymer to increase the deflection. Analytical modeling as well as finite element analysis show that the proposed concept could achieve the target bi-directional deflection of 30° in typical flight conditions. Several bimorph actuators were manufactured and an experimental setup was designed to measure the static and dynamic deflections. The experimental results validated the analytical technique and finite element models, which have been further used to predict the performance of the smart wing design for a MAV.

  4. Piezoelectric characterization of Pb(Zr,Ti)O3 thin films deposited on metal foil substrates by dip coating

    Science.gov (United States)

    Hida, Hirotaka; Hamamura, Tomohiro; Nishi, Takahito; Tan, Goon; Umegaki, Toshihito; Kanno, Isaku

    2017-10-01

    We fabricated the piezoelectric bimorphs composed of Pb(Zr,Ti)O3 (PZT) thin films on metal foil substrates. To efficiently inexpensively manufacture piezoelectric bimorphs with high flexibility, 1.2-µm-thick PZT thin films were directly deposited on both surfaces of 10- and 20-µm-thick bare stainless-steel (SS) foil substrates by dip coating with a sol-gel solution. We confirmed that the PZT thin films deposited on the SS foil substrates at 500 °C or above have polycrystalline perovskite structures and the measured relative dielectric constant and dielectric loss were 323-420 and 0.12-0.17, respectively. The PZT bimorphs were demonstrated by comparing the displacements of the cantilever specimens driven by single- and double-side PZT thin films on the SS foil substrates under the same applied voltage. We characterized the piezoelectric properties of the PZT bimorphs and the calculated their piezoelectric coefficient |e 31,f| to be 0.3-0.7 C/m2.

  5. Analysis of peristaltic waves and their role in migrating Physarum plasmodia

    Science.gov (United States)

    Lewis, Owen L.; Guy, Robert D.

    2017-07-01

    The true slime mold Physarum polycephalum exhibits a vast array of sophisticated manipulations of its intracellular cytoplasm. Growing microplasmodia of Physarum have been observed to adopt an elongated tadpole shape, then contract in a rhythmic, traveling wave pattern that resembles peristaltic pumping. This contraction drives a fast flow of non-gelated cytoplasm along the cell longitudinal axis. It has been hypothesized that this flow of cytoplasm is a driving factor in generating motility of the plasmodium. In this work, we use two different mathematical models to investigate how peristaltic pumping within Physarum may be used to drive cellular motility. We compare the relative phase of flow and deformation waves predicted by both models to similar phase data collected from in vivo experiments using Physarum plasmodia. The first is a PDE model based on a dimensional reduction of peristaltic pumping within a finite length chamber. The second is a more sophisticated computational model which accounts for more general shape changes, more complex cellular mechanics, and dynamically modulated adhesion to the underlying substrate. This model allows us to directly compute cell crawling speed. Both models suggest that a mechanical asymmetry in the cell is required to reproduce the experimental observations. Such a mechanical asymmetry is also shown to increase the potential for cellular migration, as measured by both stress generation and migration velocity.

  6. Analysis of peristaltic waves and their role in migrating Physarum plasmodia

    International Nuclear Information System (INIS)

    Lewis, Owen L; Guy, Robert D

    2017-01-01

    The true slime mold Physarum polycephalum exhibits a vast array of sophisticated manipulations of its intracellular cytoplasm. Growing microplasmodia of Physarum have been observed to adopt an elongated tadpole shape, then contract in a rhythmic, traveling wave pattern that resembles peristaltic pumping. This contraction drives a fast flow of non-gelated cytoplasm along the cell longitudinal axis. It has been hypothesized that this flow of cytoplasm is a driving factor in generating motility of the plasmodium. In this work, we use two different mathematical models to investigate how peristaltic pumping within Physarum may be used to drive cellular motility. We compare the relative phase of flow and deformation waves predicted by both models to similar phase data collected from in vivo experiments using Physarum plasmodia. The first is a PDE model based on a dimensional reduction of peristaltic pumping within a finite length chamber. The second is a more sophisticated computational model which accounts for more general shape changes, more complex cellular mechanics, and dynamically modulated adhesion to the underlying substrate. This model allows us to directly compute cell crawling speed. Both models suggest that a mechanical asymmetry in the cell is required to reproduce the experimental observations. Such a mechanical asymmetry is also shown to increase the potential for cellular migration, as measured by both stress generation and migration velocity. (paper)

  7. Cantilever arrays with self-aligned nanotips of uniform height

    International Nuclear Information System (INIS)

    Koelmans, W W; Peters, T; Berenschot, E; De Boer, M J; Siekman, M H; Abelmann, L

    2012-01-01

    Cantilever arrays are employed to increase the throughput of imaging and manipulation at the nanoscale. We present a fabrication process to construct cantilever arrays with nanotips that show a uniform tip–sample distance. Such uniformity is crucial, because in many applications the cantilevers do not feature individual tip–sample spacing control. Uniform cantilever arrays lead to very similar tip–sample interaction within an array, enable non-contact modes for arrays and give better control over the load force in contact modes. The developed process flow uses a single mask to define both tips and cantilevers. An additional mask is required for the back side etch. The tips are self-aligned in the convex corner at the free end of each cantilever. Although we use standard optical contact lithography, we show that the convex corner can be sharpened to a nanometre scale radius by an isotropic underetch step. The process is robust and wafer-scale. The resonance frequencies of the cantilevers within an array are shown to be highly uniform with a relative standard error of 0.26% or lower. The tip–sample distance within an array of up to ten cantilevers is measured to have a standard error around 10 nm. An imaging demonstration using the AFM shows that all cantilevers in the array have a sharp tip with a radius below 10 nm. The process flow for the cantilever arrays finds application in probe-based nanolithography, probe-based data storage, nanomanufacturing and parallel scanning probe microscopy. (paper)

  8. Vibration suppression of a rotating flexible cantilever pipe conveying fluid using piezoelectric layers

    Directory of Open Access Journals (Sweden)

    S. Khajehpour

    Full Text Available AbstractIn this study, the governing equations of a rotating cantilever pipe conveying fluid are derived and the longitudinal and lateral induced vibrations are controlled. The pipe considered as an Euler Bernoulli beam with tip mass which piezoelectric layers attached both side of it as sensors and actuators. The follower force due to the fluid discharge causes both conservative and non-conservative work. For mathematical modeling, the Lagrange-Rayleigh-Ritz technique is utilized. An adaptive-robust control scheme is applied to suppress the vibration of the pipe. The adaptive-robust control method is robust against parameter uncertainties and disturbances. Finally, the system is simulated and the effects of varying parameters are studied. The simulation results show the excellent performance of the controller.

  9. Efficient worm-like locomotion: slip and control of soft-bodied peristaltic robots

    International Nuclear Information System (INIS)

    Daltorio, Kathryn A; Horchler, Andrew D; Quinn, Roger D; Boxerbaum, Alexander S; Shaw, Kendrick M; Chiel, Hillel J

    2013-01-01

    In this work, we present a dynamic simulation of an earthworm-like robot moving in a pipe with radially symmetric Coulomb friction contact. Under these conditions, peristaltic locomotion is efficient if slip is minimized. We characterize ways to reduce slip-related losses in a constant-radius pipe. Using these principles, we can design controllers that can navigate pipes even with a narrowing in radius. We propose a stable heteroclinic channel controller that takes advantage of contact force feedback on each segment. In an example narrowing pipe, this controller loses 40% less energy to slip compared to the best-fit sine wave controller. The peristaltic locomotion with feedback also has greater speed and more consistent forward progress. (paper)

  10. Efficient worm-like locomotion: slip and control of soft-bodied peristaltic robots.

    Science.gov (United States)

    Daltorio, Kathryn A; Boxerbaum, Alexander S; Horchler, Andrew D; Shaw, Kendrick M; Chiel, Hillel J; Quinn, Roger D

    2013-09-01

    In this work, we present a dynamic simulation of an earthworm-like robot moving in a pipe with radially symmetric Coulomb friction contact. Under these conditions, peristaltic locomotion is efficient if slip is minimized. We characterize ways to reduce slip-related losses in a constant-radius pipe. Using these principles, we can design controllers that can navigate pipes even with a narrowing in radius. We propose a stable heteroclinic channel controller that takes advantage of contact force feedback on each segment. In an example narrowing pipe, this controller loses 40% less energy to slip compared to the best-fit sine wave controller. The peristaltic locomotion with feedback also has greater speed and more consistent forward progress

  11. Calibration of higher eigenmodes of cantilevers

    International Nuclear Information System (INIS)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger; Lysy, Martin

    2016-01-01

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  12. Calibration of higher eigenmodes of cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Labuda, Aleksander; Kocun, Marta; Walsh, Tim; Meinhold, Jieh; Proksch, Tania; Meinhold, Waiman; Anderson, Caleb; Proksch, Roger [Asylum Research, an Oxford Instruments Company, Santa Barbara, California 93117 (United States); Lysy, Martin [Department of Statistics and Actuarial Science, University of Waterloo, Waterloo, Ontario N2L 3G1 (Canada)

    2016-07-15

    A method is presented for calibrating the higher eigenmodes (resonant modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine a power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonant frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for several cantilever models. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem.

  13. Microstructure actuation and gas sensing by the Knudsen thermal force

    Energy Technology Data Exchange (ETDEWEB)

    Strongrich, Andrew; Alexeenko, Alina, E-mail: alexeenk@purdue.edu [School of Aeronautics and Astronautics and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907 (United States)

    2015-11-09

    The generation of forces and moments on structures immersed in rarefied non-isothermal gas flows has received limited practical implementation since first being discovered over a century ago. The formation of significant thermal stresses requires both large thermal gradients and characteristic dimensions which are comparable to the gas molecular mean free path. For macroscopic geometries, this necessitates impractically high temperatures and very low pressures. At the microscale, however, these conditions are easily achieved, allowing the effects to be exploited, namely, for gas-property sensing and microstructure actuation. In this letter, we introduce and experimentally evaluate performance of a microelectromechanical in-plane Knudsen radiometric actuator, a self-contained device having Knudsen thermal force generation, sensing, and tuning mechanisms integrated onto the same platform. Sensitivity to ambient pressure, temperature gradient, as well as gas composition is demonstrated. Results are presented in terms of a non-dimensional force coefficient, allowing measurements to be directly compared to the previous experimental and computational data on out-of-plane cantilevered configurations.

  14. Acquisition of earthworm-like movement patterns of many-segmented peristaltic crawling robots

    Directory of Open Access Journals (Sweden)

    Norihiko Saga

    2016-09-01

    Full Text Available In recent years, attention has been increasingly devoted to the development of rescue robots that can protect humans from the inherent risks of rescue work. Particularly, anticipated is the development of a robot that can move deeply through small spaces. We have devoted our attention to peristalsis, the movement mechanism used by earthworms. A reinforcement learning technique used for the derivation of the robot movement pattern, Q-learning, was used to develop a three-segmented peristaltic crawling robot with a motor drive. Characteristically, peristalsis can provide movement capability if at least three segments work, even if a segmented part does not function. Therefore, we had intended to derive the movement pattern of many-segmented peristaltic crawling robots using Q-learning. However, because of the necessary increase in calculations, in the case of many segments, Q-learning cannot be used because of insufficient memory. Therefore, we devoted our attention to a learning method called Actor–Critic, which can be implemented with low memory. Because Actor-Critic methods are TD methods that have a separate memory structure to explicitly represent the policy independent of the value function. Using it, we examined the movement patterns of six-segmented peristaltic crawling robots.

  15. A more comprehensive modeling of atomic force microscope cantilever

    International Nuclear Information System (INIS)

    Mahdavi, M.H.; Farshidianfar, A.; Tahani, M.; Mahdavi, S.; Dalir, H.

    2008-01-01

    This paper focuses on the development of a complete model of an atomic force microscope (AFM) micro-cantilever beam, based on considering the effects of four major factors in modeling the cantilever. They are: rotary inertia and shear deformation of the beam and mass and rotary inertia of the tip. A method based on distributed-parameter modeling approach is proposed to solve the governing equations. The comparisons generally show a very good agreement between the present results and the results of other investigators. As expected, rotary inertia and shear deformation of the beam decrease resonance frequency especially at high ratio of cantilever thickness to its length, and it is relatively more pronounced for higher-order frequencies, than lower ones. Mass and rotary inertia of the tip have similar effects when the mass-ratio of the tip to the cantilever is high. Moreover, the influence of each of these four factors, thickness of the cantilever, density of the tip and inclination of the cantilever on the resonance frequencies has been investigated, separately. It is felt that this work might help the engineers in reducing AFM micro-cantilever design time, by providing insight into the effects of various parameters with the micro-cantilever.

  16. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al; Jabbour, Ghassan E.

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films

  17. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  18. Application of hydrogel-coated microcantilevers as sensing elements for pH

    International Nuclear Information System (INIS)

    Gonska, Julian; Schelling, Christoph; Urban, Gerald

    2009-01-01

    This note reports on cantilever-based sensor elements coated with a hydrogel. The hydrogel responds with a volume change on varying the pH value of surrounding liquids. The change in volume leads to a static deflection of the cantilevers, which is detected using integrated piezoresistors. To increase deflection sensitivity of the sensor elements, sub-micron, multilayered cantilevers consisting of polycrystalline silicon and silicon oxide are used. A new cantilever design is developed, which decreases the cantilever sensitivity to in situ stresses and thermal bimorph effects. A theoretical model for the sensor elements is introduced providing the output signal of multiple cantilevers connected in a full Wheatstone bridge. Measurements of deflection sensitivity prove the theoretical model. Finally, the cantilevers are coated with a 2-hydroxyethyl methacrylate and 2-(dimethylamino) ethyl methacrylate copolymer-based hydrogel, and changes in the pH value from pH 4 to pH 10 are measured. (technical note)

  19. Measurement of Mechanical Properties of Cantilever Shaped Materials

    Directory of Open Access Journals (Sweden)

    Thomas Thundat

    2008-05-01

    Full Text Available Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young’s modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature

  20. Analysis of Peristaltic Waves & their Role in Migrating Physarum Plasmodia

    Science.gov (United States)

    Lewis, Owen; Guy, Robert

    2017-11-01

    The true slime mold Physarum polycephalum exhibits a vast array of sophisticated manipulations of its intracellular cytoplasm. Growing microplasmodia of physarum have been observed to adopt an elongated tadpole shape, then contract in a rhythmic, traveling wave pattern that resembles peristaltic pumping. This contraction drives a fast flow of non-gelated cytoplasm along the cell longitudinal axis. It has been hypothesized that this flow of cytoplasm is a driving factor in generating motility of the plasmodium. In this work, we use two different mathematical models to investigate how peristaltic pumping within physarum may be used to drive cellular motility. We compare the relative phase of flow and deformation waves predicted by both models to similar phase data collected from in vivo experiments using physarum plasmodia. Both models suggest that a mechanical asymmetry in the cell is required to reproduce the experimental observations. Such a mechanical asymmetry is also shown to increase the potential for cellular migration, as measured by both stress generation and migration velocity.

  1. Theoretical analysis of dynamic property for piezoelectric cantilever triple-layer benders with large piezoelectric and electromechanical coupling coefficients

    Directory of Open Access Journals (Sweden)

    Li Jiao Gong

    2016-09-01

    Full Text Available Ferroelectric single crystals, such as PZN-PT, provide novel prospects in piezoelectric bending devices such as actuators, sensors or energy harvesters because of their extraordinarily large piezoelectric coefficients. However, large errors may occur in some analyses on electromechanical behaviors using the conventional models. We find the bending rigidity of piezoelectric composited bender is affected not only by thickness, width and the modulus of elasticity of the different layers but also electromechanical coupling coefficients (EMCCs of the piezoelectric material and the larger EMCCs mean more marked effect. This paper focuses on the derivation of the applied input excitation and output response characteristics in the circular frequency domain for piezoelectric cantilever triple-layer benders (PCTBs, taking into account the secondary piezoelectric effect. Analytic dynamic descriptions of such actuators and transducers are obtained. Based on the presented models dynamic features of PCTB composed of PZN-8%PT are calculated, and numerical results coincide with simulations using the finite element method (FEM.

  2. Application of EAP materials toward a refreshable Braille display

    Science.gov (United States)

    Di Spigna, N.; Chakraborti, P.; Yang, P.; Ghosh, T.; Franzon, P.

    2009-03-01

    The development of a multiline, refreshable Braille display will assist with the full inclusion and integration of blind people into society. The use of both polyvinylidene fluoride (PVDF) film planar bending mode actuators and silicone dielectric elastomer cylindrical tube actuators have been investigated for their potential use in a Braille cell. A liftoff process that allows for aggressive scaling of miniature bimorph actuators has been developed using standard semiconductor lithography techniques. The PVDF bimorphs have been demonstrated to provide enough displacement to raise a Braille dot using biases less than 1000V and operating at 10Hz. In addition, silicone tube actuators have also been demonstrated to achieve the necessary displacement, though requiring higher voltages. The choice of electrodes and prestrain conditions aimed at maximizing axial strain in tube actuators are discussed. Characterization techniques measuring actuation displacement and blocking forces appropriate for standard Braille cell specifications are presented. Finally, the integration of these materials into novel cell designs and the fabrication of a prototype Braille cell are discussed.

  3. Infusion of iloprost without a peristaltic pump: Safety and tolerability

    Directory of Open Access Journals (Sweden)

    Paola Faggioli

    2013-04-01

    Full Text Available Introduction: Iloprost is a potent prostacyclin (PGI2 analogue that is effective in the treatment of peripheral arterial disease, vasculitis, pulmonary hypertension, and secondary Raynaud’s phenomenon. Intravenous infusions are generally administered with the aid of a peristaltic pump to reduce the risk of adverse reactions caused by unintentional increases in the infusion rate. This increases the cost of care in terms of equipment and personnel and may limit the use of this drug. Materials and methods: We retrospectively analyzed 18,432 iloprost infusions administered between 1999 and 2009 to 272 patients with systemic sclerosis (n = 253 and 19 with peripheral arterial disease (n = 19. All infusions were administered in the day hospital over 6 h with a normal IV set-up with a roller flow regulator. Flow rates were set to deliver iloprost at 1-2 ng/kg/min. Rates were verified by direct drop counts during the first 15-20 minutes of the infusion and at each subsequent check. Results: There were no adverse events that were fatal, life-threatening, or associated with prolongation of hospitalization and very few events requiring intensive care or continuous monitoring. The latter included 4 cases of tachycardia/arrhythmia (extrasystoles in most cases, 3 cases of hypotension (systolic pressure < 80 mmHg, and 2 cases of hypertension (BP > 170/100 mmHg. All other adverse reactions were mild, reversible, and similar to those seen with iloprost infusion with peristaltic pump. Only one patient had to be switched to another prostanoid (due to intolerance. Discussion: Iloprost infusion administered with a normal IV flow regulator appears to be as safe, well tolerated, and effective as traditional infusion with a peristaltic pump.

  4. Nonlinear Dynamics of Cantilever-Sample Interactions in Atomic Force Microscopy

    Science.gov (United States)

    Cantrell, John H.; Cantrell, Sean A.

    2010-01-01

    The interaction of the cantilever tip of an atomic force microscope (AFM) with the sample surface is obtained by treating the cantilever and sample as independent systems coupled by a nonlinear force acting between the cantilever tip and a volume element of the sample surface. The volume element is subjected to a restoring force from the remainder of the sample that provides dynamical equilibrium for the combined systems. The model accounts for the positions on the cantilever of the cantilever tip, laser probe, and excitation force (if any) via a basis set of set of orthogonal functions that may be generalized to account for arbitrary cantilever shapes. The basis set is extended to include nonlinear cantilever modes. The model leads to a pair of coupled nonlinear differential equations that are solved analytically using a matrix iteration procedure. The effects of oscillatory excitation forces applied either to the cantilever or to the sample surface (or to both) are obtained from the solution set and applied to the to the assessment of phase and amplitude signals generated by various acoustic-atomic force microscope (A-AFM) modalities. The influence of bistable cantilever modes of on AFM signal generation is discussed. The effects on the cantilever-sample surface dynamics of subsurface features embedded in the sample that are perturbed by surface-generated oscillatory excitation forces and carried to the cantilever via wave propagation are accounted by the Bolef-Miller propagating wave model. Expressions pertaining to signal generation and image contrast in A-AFM are obtained and applied to amplitude modulation (intermittent contact) atomic force microscopy and resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM). The influence of phase accumulation in A-AFM on image contrast is discussed, as is the effect of hard contact and maximum nonlinearity regimes of A-AFM operation.

  5. In-situ piezoresponse force microscopy cantilever mode shape profiling

    International Nuclear Information System (INIS)

    Proksch, R.

    2015-01-01

    The frequency-dependent amplitude and phase in piezoresponse force microscopy (PFM) measurements are shown to be a consequence of the Euler-Bernoulli (EB) dynamics of atomic force microscope (AFM) cantilever beams used to make the measurements. Changes in the cantilever mode shape as a function of changes in the boundary conditions determine the sensitivity of cantilevers to forces between the tip and the sample. Conventional PFM and AFM measurements are made with the motion of the cantilever measured at one optical beam detector (OBD) spot location. A single OBD spot location provides a limited picture of the total cantilever motion, and in fact, experimentally observed cantilever amplitude and phase are shown to be strongly dependent on the OBD spot position for many measurements. In this work, the commonly observed frequency dependence of PFM response is explained through experimental measurements and analytic theoretical EB modeling of the PFM response as a function of both frequency and OBD spot location on a periodically poled lithium niobate sample. One notable conclusion is that a common choice of OBD spot location—at or near the tip of the cantilever—is particularly vulnerable to frequency dependent amplitude and phase variations stemming from dynamics of the cantilever sensor rather than from the piezoresponse of the sample

  6. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Grutzik, Scott J.; Zehnder, Alan T. [Field of Theoretical and Applied Mechanics, Cornell University, Ithaca, New York 14853 (United States); Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F. [Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)

    2013-11-15

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included.

  7. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Grutzik, Scott J.; Zehnder, Alan T.; Gates, Richard S.; Gerbig, Yvonne B.; Smith, Douglas T.; Cook, Robert F.

    2013-01-01

    There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is required. In most cases, the forces of interest are very small, thus compliant cantilevers are used. A number of methods have been developed that are well suited to measuring low stiffness values. However, in some cases a cantilever with much greater stiffness is required. Thus, a direct, traceable method for calibrating very stiff (approximately 200 N/m) cantilevers is presented here. The method uses an instrumented and calibrated nanoindenter to determine the stiffness of a reference cantilever. This reference cantilever is then used to measure the stiffness of a number of AFM test cantilevers. This method is shown to have much smaller uncertainty than previously proposed methods. An example application to fracture testing of nanoscale silicon beam specimens is included

  8. Magnetic force driven magnetoelectric effect in bi-cantilever composites

    Science.gov (United States)

    Zhang, Ru; Wu, Gaojian; Zhang, Ning

    2017-12-01

    The magnetic force driven magnetoelectric (ME) effect in bi-cantilever Mn-Zn-Ferrite /PZT composites is presented. Compared with single cantilever, the ME voltage coefficient in bi-cantilever composite is a little lower and the resonance frequency is higher, but the bi-cantilever structure is advantageous for integration. When the magnetic gap is 3 mm, the ME voltage coefficient can achieve 6.2 Vcm-1Oe-1 at resonance under optimum bias field Hm=1030 Oe; when the magnetic gap is 1.5 mm, the ME voltage coefficient can get the value as high as 4.4 Vcm-1Oe-1 under much lower bias field H=340 Oe. The stable ME effect in bi-cantilever composites has important potential application in the design of new type ME device.

  9. Drift study of SU8 cantilevers in liquid and gaseous environments.

    Science.gov (United States)

    Tenje, Maria; Keller, Stephan; Dohn, Søren; Davis, Zachary J; Boisen, Anja

    2010-05-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

  10. Drift study of SU8 cantilevers in liquid and gaseous environments

    DEFF Research Database (Denmark)

    Tenje, Maria; Keller, Stephan Sylvest; Dohn, Søren

    2010-01-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1 mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe...... coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum....... this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we...

  11. Micro‑cantilevers for optical sensing of biogenic amines

    DEFF Research Database (Denmark)

    Wang, Ying; Bravo Costa, Carlos André; Sobolewska, Elżbieta Karolina

    2017-01-01

    molecules in the gas phase. Different functionalization conditions were investigated by immersing gold coated AFM cantilevers in cyclam solutions at different concentrations, for different functionalization times, and for different post-annealing treatments. The optimum morphology for high capture...... micro-cantilever based mass detection. We demonstrate that besides conventional AFM systems a MEMS cantilever in combination with an optical read out is a powerful analytic system which is highly attractive for widespread use in diagnostic applications, with optimized functionalization conditions...

  12. Fabrication of resonant micro cantilevers with integrated transparent fluidic channel

    DEFF Research Database (Denmark)

    Khan, Faheem; Schmid, Silvan; Davis, Zachary James

    2011-01-01

    Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density...

  13. A study of unsteady physiological magneto-fluid flow and heat transfer through a finite length channel by peristaltic pumping.

    Science.gov (United States)

    Tripathi, Dharmendra; Bég, O Anwar

    2012-08-01

    Magnetohydrodynamic peristaltic flows arise in controlled magnetic drug targeting, hybrid haemodynamic pumps and biomagnetic phenomena interacting with the human digestive system. Motivated by the objective of improving an understanding of the complex fluid dynamics in such flows, we consider in the present article the transient magneto-fluid flow and heat transfer through a finite length channel by peristaltic pumping. Reynolds number is small enough and the wavelength to diameter ratio is large enough to negate inertial effects. Analytical solutions for temperature field, axial velocity, transverse velocity, pressure gradient, local wall shear stress, volume flowrate and averaged volume flowrate are obtained. The effects of the transverse magnetic field, Grashof number and thermal conductivity on the flow patterns induced by peristaltic waves (sinusoidal propagation along the length of channel) are studied using graphical plots. The present study identifies that greater pressure is required to propel the magneto-fluid by peristaltic pumping in comparison to a non-conducting Newtonian fluid, whereas, a lower pressure is required if heat transfer is effective. The analytical solutions further provide an important benchmark for future numerical simulations.

  14. Self-heating in piezoresistive cantilevers.

    Science.gov (United States)

    Doll, Joseph C; Corbin, Elise A; King, William P; Pruitt, Beth L

    2011-05-30

    We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

  15. Numerical Simulation of Output Response of PVDF Sensor Attached on a Cantilever Beam Subjected to Impact Loading

    Directory of Open Access Journals (Sweden)

    Cao Vu Dung

    2016-04-01

    Full Text Available Polyvinylidene Flouride (PVDF is a film-type polymer that has been used as sensors and actuators in various applications due to its mechanical toughness, flexibility, and low density. A PVDF sensor typically covers an area of the host structure over which mechanical stress/strain is averaged and converted to electrical energy. This study investigates the fundamental “stress-averaging” mechanism for dynamic strain sensing in the in-plane mode. A numerical simulation was conducted to simulate the “stress-averaging” mechanism of a PVDF sensor attached on a cantilever beam subjected to an impact loading, taking into account the contribution of piezoelectricity, the cantilever beam’s modal properties, and electronic signal conditioning. Impact tests and FEM analysis were also carried out to verify the numerical simulation results. The results of impact tests indicate the excellent capability of the attached PVDF sensor in capturing the fundamental natural frequencies of the cantilever beam. There is a good agreement between the PVDF sensor’s output voltage predicted by the numerical simulation and that obtained in the impact tests. Parametric studies were conducted to investigate the effects of sensor size and sensor position and it is shown that a larger sensor tends to generate higher output voltage than a smaller one at the same location. However, the effect of sensor location seems to be more significant for larger sensors due to the cancelling problem. Overall, PVDF sensors exhibit excellent sensing capability for in-plane dynamic strain induced by impact loading.

  16. Integrated optical readout for miniaturization of cantilever-based sensor system

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts...

  17. Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

    Directory of Open Access Journals (Sweden)

    Hing Wah LEE

    2009-03-01

    Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

  18. Cantilevers orthodontics forces measured by fiber sensors

    Science.gov (United States)

    Schneider, Neblyssa; Milczewski, Maura S.; de Oliveira, Valmir; Guariza Filho, Odilon; Lopes, Stephani C. P. S.; Kalinowski, Hypolito J.

    2015-09-01

    Fibers Bragg Gratings were used to evaluate the transmission of the forces generates by orthodontic mechanic based one and two cantilevers used to move molars to the upright position. The results showed levels forces of approximately 0,14N near to the root of the molar with one and two cantilevers.

  19. Development of an Electrochemical-Cantilever Hybrid Platform

    DEFF Research Database (Denmark)

    Fischer, Lee MacKenzie

    . For at binde kobber (II) ioner blev rækker af cantilevere funktionaliseret med aminosyre L-cysteine(Cys) og tetrapeptid Cys-Gly-Gly-His (CGGH). Dette funktionelle lag blev fjernet fra en enkelt cantilever, ved selektivt at anvende et voltammetrisk signal til at generere en ren reference cantilever til brug...

  20. The small length scale effect for a non-local cantilever beam: a paradox solved.

    Science.gov (United States)

    Challamel, N; Wang, C M

    2008-08-27

    Non-local continuum mechanics allows one to account for the small length scale effect that becomes significant when dealing with microstructures or nanostructures. This paper presents some simplified non-local elastic beam models, for the bending analyses of small scale rods. Integral-type or gradient non-local models abandon the classical assumption of locality, and admit that stress depends not only on the strain value at that point but also on the strain values of all points on the body. There is a paradox still unresolved at this stage: some bending solutions of integral-based non-local elastic beams have been found to be identical to the classical (local) solution, i.e. the small scale effect is not present at all. One example is the Euler-Bernoulli cantilever nanobeam model with a point load which has application in microelectromechanical systems and nanoelectromechanical systems as an actuator. In this paper, it will be shown that this paradox may be overcome with a gradient elastic model as well as an integral non-local elastic model that is based on combining the local and the non-local curvatures in the constitutive elastic relation. The latter model comprises the classical gradient model and Eringen's integral model, and its application produces small length scale terms in the non-local elastic cantilever beam solution.

  1. Non-steady peristaltic propulsion with exponential variable viscosity: a study of transport through the digestive system.

    Science.gov (United States)

    Tripathi, Dharmendra; Pandey, S K; Siddiqui, Abdul; Bég, O Anwar

    2014-01-01

    A theoretical study is presented for transient peristaltic flow of an incompressible fluid with variable viscosity in a finite length cylindrical tube as a simulation of transport in physiological vessels and biomimetic peristaltic pumps. The current axisymmetric analysis is qualitatively similar to two-dimensional analysis but exhibits quantitative variations. The current analysis is motivated towards further elucidating the physiological migration of gastric suspensions (food bolus) in the human digestive system. It also applies to variable viscosity industrial fluid (waste) peristaltic pumping systems. First, an axisymmetric model is analysed in the limit of large wavelength ([Formula: see text]) and low Reynolds number ([Formula: see text]) for axial velocity, radial velocity, pressure, hydromechanical efficiency and stream function in terms of radial vibration of the wall ([Formula: see text]), amplitude of the wave ([Formula: see text]), averaged flow rate ([Formula: see text]) and variable viscosity ([Formula: see text]). Subsequently, the peristaltic flow of a fluid with an exponential viscosity model is examined, which is based on the analytical solutions for pressure, wall shear stress, hydromechanical efficiency and streamline patterns in the finite length tube. The results are found to correlate well with earlier studies using a constant viscosity formulation. This study reveals some important features in the flow characteristics including the observation that pressure as well as both number and size of lower trapped bolus increases. Furthermore, the study indicates that hydromechanical efficiency reduces with increasing magnitude of viscosity parameter.

  2. Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop

    International Nuclear Information System (INIS)

    Kucera, M; Bittner, A; Schmid, U; Manzaneque, T; Sánchez-Rojas, J L

    2013-01-01

    This paper presents a robust Q-control approach based on an all-electrical feedback loop enhancing the quality factor of a resonant microstructure by using the self-sensing capability of a piezoelectric thin film actuator made of aluminium nitride. A lock-in amplifier is used to extract the feedback signal which is proportional to the piezoelectric current. The measured real part is used to replace the originally low-quality and noisy feedback signal to modulate the driving voltage of the piezoelectric thin-film actuator. Since the lock-in amplifier reduces the noise in the feedback signal substantially, the proposed enhancement loop avoids the disadvantage of a constant signal-to-noise ratio, which an analogue feedback circuit usually suffers from. The quality factor was increased from the intrinsic value of 1766 to a maximum of 34 840 in air. These promising results facilitate precise measurements for self-actuated and self-sensing MEMS cantilevers even when operated in static viscous media. (paper)

  3. Effect of hydrodynamic action in peristaltic pump of blood gases analyzer ABL 555

    Directory of Open Access Journals (Sweden)

    Ali K. Mohammed

    2018-01-01

    Full Text Available In this research, we studied the effect of hydrodynamic action in peristaltic pump of blood gases analyzer ABL 555 which made by (Radiometer-Copenhagen, by using theories of tribology and Reynolds equation on performance of blood film convergence area, we analyzing the influence of theoretical model for peristaltic pump (consist of steeper motor and 4 cylindrical bearings distributed on circular disc rotating around capillary tube, by using (MATLAB R 2012b programing with numerical solution of finite difference method in 5 nodes element , we fined the blood film thickness and the pressure on contact area grid ( consist from annual and axial lines , then influence of viscosity of blood on pressure generated in limited temperature of ambient and velocity of motor , and flow rate of blood in tube. The important conclusions appear that the rotating sliding movement of motor cause low pressure (positive while the rolling cylindrical rollers of bearings cause high pressure (negative which lead to push the blood in tube, that mean the direction of rotating blood opposite the direction of rotating motor of peristaltic pump, also the viscosity of blood effect on velocity of flow and the speed of motor with bearings, and the effect of blood film thickness effect on pressure generated in tube. DOI: http://dx.doi.org/10.25130/tjes.24.2017.18

  4. Optimization of sensitivity and noise in piezoresistive cantilevers

    DEFF Research Database (Denmark)

    Yu, Xiaomei; Thaysen, Jacob; Hansen, Ole

    2002-01-01

    In this article, the sensitivity and the noise of piezoresistive cantilevers were systematically investigated with respect to the piezoresistor geometry, the piezoresistive materials, the doping dose, the annealing temperature, and the operating biased voltage. With the noise optimization results......(-6), the biggest gauge factors was 95, and the minimum detectable deflection (MDD) at 6 V and 200 Hz-measurement bandwidth was 0.3 nm for a single-crystal silicon cantilever. Of the two LPCVD silicon piezoresistive cantilevers, amorphous silicon piezoresistors had relatively lower 1/f noise. The MDD for a LPCVD...

  5. Comparative performance study of smart structure for thermal microactuators

    Science.gov (United States)

    Yahya, Zulkarnain; Johar, Muhammad Akmal

    2017-04-01

    Thermal microactuator is one of earliest types of microactuators. Typical thermal actuators are in the form of Bimorph and Chevron structures. A bimorph thermal actuator has a complex movement direction, in arc motion and thus it is not feasible in the most MEMS designs. While Chevron actuator has a tendency to produce an off-plane movement which lead to low precision in lateral movement. A new thermal actuator design in the form of serpentine structures shows promising feature to have better performances in terms of more predictive lateral movement with smaller off-plane displacement. In MEMS chip design, areas play a critical role as it will impact with the cost of the final product. In this study, four different structures of thermal actuator were simulated using ANSYS v15. Three different set of area sizes which are 240 µm x 1000 µm, 240 µm x 1500 µm and 240 µm x 2000 µm have been analyzed. All four structures were named as Serpentine01, Serpentine02, Bimorph and Chevron. The data with regards to temperature produced by the structure and z-axis directional deformation were collected and analyzed. This paper reported the investigation result of comparison between these three types of thermal actuator structures design with a given area. From all of the result obtained, it is shown that the area 240 µm x 1500 µm showed a well balance performance in term of huge deformations and low power consumption. The Serpentine01 structure produced 16.7 µm deformation at 4mA of current. The results shows the potential of Serpentine01 structure as a new candidate for thermal microactuator for MEMS applications.

  6. Effect of shear strain on the deflection of a clamped magnetostrictive film-substrate system

    International Nuclear Information System (INIS)

    Ming Zhenghui; Ming Li; Bo Zou; Xia Luo

    2011-01-01

    The effect of in-plane shear strain of a clamped bimorph on the deflection produced by magnetization of the film is investigated. The deflection is found by minimizing the Gibbs free energy with respect to four parameters, strains and curvatures along x and y directions at the interface, by assuming that the curvature in the y direction varies as a function of aspect ratio w/l along x. A set of standard linear equations of four parameters are obtained and the deflection is expressed in terms of the four parameters by solving the equations using Cramer rules. The inconsistencies pointed out by previous authors are also reviewed. For actuators made of thick and short clamped film-substrate system, the in-plane shear deformation should not be omitted. The present calculation model can give a relatively simple and accurate prediction of deflection for thick and short specimens of aspect ratio w/l<10, which supports the results obtained by finite element modeling. - Highlights: → We model the deflection of a thick magnetostrictive film-substrate cantilever plate. → Total stress along z from magnetic field is not zero without external force. → Effect of in-plane shear strain in calculating deflection examined. → Analytical solution of deflection obtained by assuming a curvature function. → Shear strain for short cantilever film-substrate plate considered.

  7. Enhanced actuation performance of piezoelectric fiber composites induced by incorporated BaTiO3 nanoparticles in epoxy resin

    International Nuclear Information System (INIS)

    Wu, Mingliang; Yuan, Xi; Luo, Hang; Chen, Haiyan; Chen, Chao; Zhou, Kechao; Zhang, Dou

    2017-01-01

    Piezoelectric fiber composites (PFCs) have attracted much interest owing to their flexibility and toughness compared with conventional monolithic piezoceramic wafers. The free strain values and actuation property of PFCs strongly depend on the active electric field applied in Pb(Zr 1−x Ti x )O 3 (PZT) fibers. Reducing the dielectric constant mismatch between PZT fiber and the assembling epoxy resin would greatly increase the active electric field in PZT fiber. Therefore, BaTiO 3 (BT) nanoparticles were introduced into the epoxy resin to enhance the dielectric constant. Homogeneous dispersion of BT nanoparticles and tight adhesion with the epoxy resin were achieved through a surface modification by dopamine. The maximum dielectric constant of dopamine modified BT/epoxy (BT@Dop/epoxy) nanocomposites was 10.38 with 12 wt% BT@Dop content at 1 kHz. The maximum free strain of PFCs reached 1820 ppm with 6 wt% BT@Dop content, while PFCs assembled by pure epoxy showed 790 ppm at the same processing condition. The tip displacement of cantilever beam actuated by PFCs reached the peak of 19 mm at the resonance frequency with 6 wt% BT@Dop, which was improved by 90% comparing to PFCs with pure epoxy. - Highlights: • The effect of dielectric mismatch on effective electric field in piezoceramic fibers was explained by a model. • The dispersibility and adhesion of BaTiO 3 nanoparticles in epoxy was improved by the dopamine modification. • The actuation performance increased firstly and then decreased with adding BaTiO 3 nanoparticles. • The maximum free strain and displacement of cantilever beam were up to 1820 ppm and 19 mm, respectively.

  8. Active vibration reduction by optimally placed sensors and actuators with application to stiffened plates by beams

    International Nuclear Information System (INIS)

    Daraji, A H; Hale, J M

    2014-01-01

    This study concerns new investigation of active vibration reduction of a stiffened plate bonded with discrete sensor/actuator pairs located optimally using genetic algorithms based on a developed finite element modeling. An isotropic plate element stiffened by a number of beam elements on its edges and having a piezoelectric sensor and actuator pair bonded to its surfaces is modeled using the finite element method and Hamilton’s principle, taking into account the effects of piezoelectric mass, stiffness and electromechanical coupling. The modeling is based on the first order shear deformation theory taking into account the effects of bending, membrane and shear deformation for the plate, the stiffening beam and the piezoelectric patches. A Matlab finite element program has been built for the stiffened plate model and verified with ANSYS and also experimentally. Optimal placement of ten piezoelectric sensor/actuator pairs and optimal feedback gain for active vibration reduction are investigated for a plate stiffened by two beams arranged in the form of a cross. The genetic algorithm was set up for optimization of sensor/actuator placement and feedback gain based on the minimization of the optimal linear quadratic index as an objective function to suppress the first six modes of vibration. Comparison study is presented for active vibration reduction of a square cantilever plate stiffened by crossed beams with two sensor/actuator configurations: firstly, ten piezoelectric sensor/actuator pairs are located in optimal positions; secondly, a piezoelectric layer of single sensor/actuator pair covering the whole of the stiffened plate as a SISO system. (paper)

  9. Adaptive Model Predictive Vibration Control of a Cantilever Beam with Real-Time Parameter Estimation

    Directory of Open Access Journals (Sweden)

    Gergely Takács

    2014-01-01

    Full Text Available This paper presents an adaptive-predictive vibration control system using extended Kalman filtering for the joint estimation of system states and model parameters. A fixed-free cantilever beam equipped with piezoceramic actuators serves as a test platform to validate the proposed control strategy. Deflection readings taken at the end of the beam have been used to reconstruct the position and velocity information for a second-order state-space model. In addition to the states, the dynamic system has been augmented by the unknown model parameters: stiffness, damping constant, and a voltage/force conversion constant, characterizing the actuating effect of the piezoceramic transducers. The states and parameters of this augmented system have been estimated in real time, using the hybrid extended Kalman filter. The estimated model parameters have been applied to define the continuous state-space model of the vibrating system, which in turn is discretized for the predictive controller. The model predictive control algorithm generates state predictions and dual-mode quadratic cost prediction matrices based on the updated discrete state-space models. The resulting cost function is then minimized using quadratic programming to find the sequence of optimal but constrained control inputs. The proposed active vibration control system is implemented and evaluated experimentally to investigate the viability of the control method.

  10. Resonance frequencies of AFM cantilevers in contact with a surface

    Energy Technology Data Exchange (ETDEWEB)

    Verbiest, G.J., E-mail: Verbiest@physik.rwth-aachen.de [JARA-FIT and II. Institute of Physics, RWTH Aachen University, 52074 Aachen (Germany); Rost, M.J., E-mail: Rost@physics.leidenuniv.nl [Huygens-Kamerlingh Onnes Laboratory, Leiden University, P.O. Box 9504, 2300 RA Leiden (Netherlands)

    2016-12-15

    To make the forces in an Atomic Force Microscope that operates in a dynamic mode with one or multiple vibrations applied to the cantilever, quantitative, one needs to relate a change in resonance frequency of the cantilever to a specific tip–sample interaction. Due to the time dependence of the force between the tip and sample caused by the vibrations, this task is not only difficult, but in fact only possible to solve for certain limiting cases, if one follows common theoretical approaches with a Taylor expansion around the deflection point. Here, we present an analytical method for calculating the resonance frequencies of the cantilever that is valid for any tip–sample interaction. Instead of linearizing the tip–sample interaction locally, we calculate an averaged, weighted linearization taking into account all positions of the tip while vibrating. Our method bridges, therefore, the difficult gap between a free oscillating cantilever and a cantilever that is pushed infinitely hard into contact with a surface, which describes a clamped-pinned boundary condition. For a correct description of the cantilever dynamics, we take into account both the tip mass and the tip moment of inertia. Applying our model, we show that it is possible to calculate the modal response of a cantilever as a function of the tip–sample interaction strength. Based on these modal vibration characteristics, we show that the higher resonance frequencies of a cantilever are completely insensitive to the strength of the tip–sample interaction. - Highlights: • A method to calculate the resonances of AFM cantilevers under any force is proposed. • The analytical model is based on Euler-beam theory. • The shift in resonance frequency due to forces decrease with increasing mode number. • The proposed method enables quantitative ultrasound AFM experiments. • Our results explain also the applicability of the higher modes in SubSurface-AFM.

  11. Numerical and analytical treatment on peristaltic flow of Williamson fluid in the occurrence of induced magnetic field

    Energy Technology Data Exchange (ETDEWEB)

    Akram, Safia, E-mail: safia_akram@yahoomail.com [Department of Basic Sciences, Military College of Signals, National University of Sciences and Technology (Pakistan); Nadeem, S. [Department of Mathematics, Quaid-i-Azam University 45320, Islamabad 44000 (Pakistan); Hanif, M. [Department of Basic Sciences, Military College of Signals, National University of Sciences and Technology (Pakistan)

    2013-11-15

    In this paper the effects of induced magnetic field on the peristaltic transport of a Williamson fluid model in an asymmetric channel has been investigated. The problem is simplified by using long wave length and low Reynolds number approximations. The perturbation and numerical solutions have been presented. The expressions for pressure rise, pressure gradient, stream function, magnetic force function, current density distribution have been computed. The results of pertinent parameters have been discussed graphically. The trapping phenomena for different wave forms have been also discussed. - highlights: • The main motivation of this work is that we want to see the behavior of peristaltic flow of Williamson fluid in the occurrence of induced magnetic field. In literature no attempt is taken to discuss the lateral Numerical and analytical treatment on peristaltic flow of Williamson fluid in the occurrence of induced magnetic field. • We do not want to fill the gap in literature after studying this.

  12. Numerical and analytical treatment on peristaltic flow of Williamson fluid in the occurrence of induced magnetic field

    International Nuclear Information System (INIS)

    Akram, Safia; Nadeem, S.; Hanif, M.

    2013-01-01

    In this paper the effects of induced magnetic field on the peristaltic transport of a Williamson fluid model in an asymmetric channel has been investigated. The problem is simplified by using long wave length and low Reynolds number approximations. The perturbation and numerical solutions have been presented. The expressions for pressure rise, pressure gradient, stream function, magnetic force function, current density distribution have been computed. The results of pertinent parameters have been discussed graphically. The trapping phenomena for different wave forms have been also discussed. - highlights: • The main motivation of this work is that we want to see the behavior of peristaltic flow of Williamson fluid in the occurrence of induced magnetic field. In literature no attempt is taken to discuss the lateral Numerical and analytical treatment on peristaltic flow of Williamson fluid in the occurrence of induced magnetic field. • We do not want to fill the gap in literature after studying this

  13. Micromechanical testing of SU-8 cantilevers

    OpenAIRE

    Hopcroft, M; Kramer, T; Kim, G; Takashima, K; Higo, Y; Moore, D; Brugger, J

    2005-01-01

    SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

  14. Development of multilayer piezoelectric actuator valve for JT-60

    International Nuclear Information System (INIS)

    Miyo, Yasuhiko; Hiratsuka, Hajime; Masui, Hiroshi; Hosogane, Nobuyuki; Miya, Naoyuki

    2001-11-01

    In order to improve the gas injection valve used for the operation of JT-60, a new type of valve (multilayer piezoelectric actuator valve) was developed. The conventional valve (bimorph piezoelectric valve) has been used for 15 years since the beginning of experimental operation in April, 1985. However, it came to be hard to keep the performance of the valve because of the deterioration of the driving source, i.e. piezoelectric element. Developments of the new valve were carried out based on experiences through experimental operations in JT-60. Requirements for the design are: (1) to be hard structure for making a sheet leak, (2) to allow a repair work at atmosphere side without an air vent of the vacuum vessel, (3) to be more smaller and lighter compared with the conventional one, and (4) to have a high maintenance efficiency by utilizing of the commercial piezoelectric elements and power supplies. The newly developed valve was examined with various tests such as gas flow characteristic test, high magnetic field proof test, high temperature proof test and gas flow rate test for aged deterioration. Results, confirm that the performance of the valve is applicable for JT-60 operations. (author)

  15. Cantilever-based micro-particle filter with simultaneous single particle detection

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2011-01-01

    Currently, separation of whole blood samples on lab-on-a-chip systems is achieved via filters followed by analysis of the filtered matter such as counting of blood cells. Here, a micro-chip based on cantilever technology is developed, which enables simultaneous filtration and counting of micro-particles...... from a liquid. A hole-array is integrated into a micro-cantilever, which is inserted into a microfluidic channel perpendicular to the flow. A metal pad at the apex of the cantilever enables an optical read-out of the deflection of the cantilever. When a micro-particle is too large to pass a hole...

  16. 3D Printing of Cantilever-Type Microstructures by Stereolithography of Ferromagnetic Photopolymers.

    Science.gov (United States)

    Credi, Caterina; Fiorese, Alessandro; Tironi, Marco; Bernasconi, Roberto; Magagnin, Luca; Levi, Marinella; Turri, Stefano

    2016-10-05

    In the present work, prototypes of polymeric cantilever-based magnetic microstructures were fabricated by means of stereolithography (SL). To this end, a UV-curable system suitable for high-resolution SL-processing was formulated by blending a bifunctional acrylic monomer with photoinitiator and visible dye whose content was tuned to tailor resin SL sensitivity. Subsequently, to confer ferromagnetic properties to the photopolymer, two different strategies were implemented. A two-step approach involved selective deposition of a metal layer on photopolymer SL-cured surfaces through an electroless plating process. On the other hand, SL-processable ferromagnetically responsive nanocomposites (FRCs) were obtained by directly loading magnetite nanoparticles within the photopolymer matrix. In order to achieve high-printing resolution, resin SL sensitivities were studied as a function of the various additives contents. Photocalorimetric analyses were also performed to investigate the photopolymer conversion efficiency upon light exposure. High-performing formulations were characterized by reduced penetration depth (printing of micrometric structures. Finally, the self-standing characteristics of the resin combined with the layered-fashion deposition typical of the 3D printing technologies were exploited for the fabrication of cantilever (CL)-based beams presented as possible magnetic sensors. As a demonstration of the feasibility of the two approaches, the magnetic beams were successfully actuated and their sensing performances in terms of static deflection vs applied magnetic field applied were qualitatively studied. Being not restricted to CL-based geometries, the combination of SL-printing with the formulation of novel smart photopolymers open the way toward the fabrication of high-customized complex 3D models integrating functional microstructures.

  17. Homotopy Analysis Method for Nonlinear Dynamical System of an Electrostatically Actuated Microcantilever

    Directory of Open Access Journals (Sweden)

    Y. M. Chen

    2011-01-01

    Full Text Available The homotopy analysis method (HAM is employed to propose an approach for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. There are two relative merits of the presented HAM compared with some usual procedures of the HAM. First, a new auxiliary linear operator is constructed. This operator makes it unnecessary to eliminate any secular terms. Furthermore, all the deformation equations are purely linear. Numerical examples show the excellent agreement of the attained solutions with numerical ones. The respective effects of applied voltage, cubic nonlinear stiffness, gap distance, and squeeze film damping on vibration responses are analyzed detailedly.

  18. Design & fabrication of cantilever array biosensors

    DEFF Research Database (Denmark)

    Boisen, Anja; Thundat, T

    2009-01-01

    Surface immobilization of functional receptors on microfabricated cantilever arrays offers a new paradigm for the development of biosensors based on nanomechanics. Microcantilever-based systems are capable of real-time, multiplexed detection of unlabeled disease markers in extremely small volumes......, electronic processing, and even local telemetry on a single chip have the potential of satisfying the need for highly sensitive and selective multiple-target detection in very small samples. Here we will review the design and fabrication process of cantilever-based biosensors....

  19. Enhanced actuation performance of piezoelectric fiber composites induced by incorporated BaTiO{sub 3} nanoparticles in epoxy resin

    Energy Technology Data Exchange (ETDEWEB)

    Wu, Mingliang; Yuan, Xi [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); Luo, Hang, E-mail: xtluohang@163.com [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); College of Chemistry and Chemical Engineering, Central South University, Changsha, Hunan 410083 (China); Chen, Haiyan; Chen, Chao; Zhou, Kechao [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China); Zhang, Dou, E-mail: dzhang@csu.edu.cn [State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan 410083 (China)

    2017-05-18

    Piezoelectric fiber composites (PFCs) have attracted much interest owing to their flexibility and toughness compared with conventional monolithic piezoceramic wafers. The free strain values and actuation property of PFCs strongly depend on the active electric field applied in Pb(Zr{sub 1−x}Ti{sub x})O{sub 3} (PZT) fibers. Reducing the dielectric constant mismatch between PZT fiber and the assembling epoxy resin would greatly increase the active electric field in PZT fiber. Therefore, BaTiO{sub 3} (BT) nanoparticles were introduced into the epoxy resin to enhance the dielectric constant. Homogeneous dispersion of BT nanoparticles and tight adhesion with the epoxy resin were achieved through a surface modification by dopamine. The maximum dielectric constant of dopamine modified BT/epoxy (BT@Dop/epoxy) nanocomposites was 10.38 with 12 wt% BT@Dop content at 1 kHz. The maximum free strain of PFCs reached 1820 ppm with 6 wt% BT@Dop content, while PFCs assembled by pure epoxy showed 790 ppm at the same processing condition. The tip displacement of cantilever beam actuated by PFCs reached the peak of 19 mm at the resonance frequency with 6 wt% BT@Dop, which was improved by 90% comparing to PFCs with pure epoxy. - Highlights: • The effect of dielectric mismatch on effective electric field in piezoceramic fibers was explained by a model. • The dispersibility and adhesion of BaTiO{sub 3} nanoparticles in epoxy was improved by the dopamine modification. • The actuation performance increased firstly and then decreased with adding BaTiO{sub 3} nanoparticles. • The maximum free strain and displacement of cantilever beam were up to 1820 ppm and 19 mm, respectively.

  20. Pembuatan Cantilever Bridge Anterior Rahang Atas sebagai Koreksi Estetik

    Directory of Open Access Journals (Sweden)

    Yusrina Sumartati

    2012-12-01

    Full Text Available Latar belakang. Kehilangan gigi anterior rahang atas mengakibatkan gangguan fungsi fonetik dan estetik. Gangguan fungsi estetik menyebabkan pasie menjadi rendah diri. Kondisi ini dapat diatasi oleh dokter gigi, salah satunya dengan pembuatan cantilever bridge. Tujuan. Penulisan ini yaitu untuk memberi informasi bahwa pada kasus kehilangan gigi-gigi anterior rahang atas dengan space yang telah menyempit dan malposisi gigi dapat dibuatkan protesa berupa gigi tiruan cekat dengan desain cantilever bridge. Kasus dan perawatan. Laporan kasus ini membahas tentang pasien perempuan umur 39 tahun yang datang ke Rumah Sakit Gigi dan Mulut Prof. Soedomo, dengan keluhan merasa kurang percaya diri karena gigi depan rahang atas hilang sejak 5 tahun yang lalu akibat kecelakaan. Gigi-gigi anterior rahang atas yang masih ada mengalami malposisi akibat pemakaian gigi tiruan sebagian lepasan yang tidak baik. Perawatan yang dilakukan adalah dengan pembuatan cantilever bridge pada gigi 11, 12, 13 dan 21, 22, 23. Kesimpulan. Gangguan fungsi estetik pada gigi anterior rahang atas dapat diatasi dengan pembuatan cantilever bridge.   Background. Maxillary anteriortooth loss resulting in impaired function of phonetic and aesthetic. Impaired function of aesthetic cause patients to become self conscious. This condition can be treated by a dentist, one with a cantilever bridge. Purpose. To inform that in case of missing anterior teeth of the upper jaw with a space that has been narrowed, and malposition of teeth can be made prosthesis denture fixed bridge with a cantilever design. Case and treatment. This case report discusses the 39 years old female patient who came to he Dental Hospital Prof. Soedomo, with complaints of feeling less confident due to the maxillary front teeth missing since 5 years ago due to an accident. Anterior teeth of the upper jaw are still experiencing malposition due to the use of removable partial dentures are not good. The treatment is done is by

  1. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

    Science.gov (United States)

    Mathew, Ribu; Ravi Sankar, A.

    2018-06-01

    In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.[Figure not available: see fulltext.

  2. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    International Nuclear Information System (INIS)

    Joyce, Bryan S; Tarazaga, Pablo A

    2014-01-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity. (papers)

  3. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control

    Science.gov (United States)

    Joyce, Bryan S.; Tarazaga, Pablo A.

    2014-07-01

    The mammalian cochlea exhibits a nonlinear amplification which allows mammals to detect a large range of sound pressure levels while maintaining high frequency sensitivity. This work seeks to mimic the cochlea’s nonlinear amplification in a mechanical system. A nonlinear, velocity-based feedback control law is applied to a cantilever beam with piezoelectric actuators. The control law reduces the linear viscous damping of the system while introducing a cubic damping term. The result is a system which is positioned close to a Hopf bifurcation. Modelling and experimental results show that the beam with this control law undergoes a one-third amplitude scaling near the resonance frequency and an amplitude-dependent bandwidth. Both behaviors are characteristic of data obtained from the mammalian cochlea. This work could provide insight on the biological cochlea while producing bio-inspired sensors with a large dynamic range and sharp frequency sensitivity.

  4. SU-8 Cantilever Sensor with Integrated Read-Out

    DEFF Research Database (Denmark)

    Johansson, Alicia Charlotte

    2007-01-01

    Cantilever baserede biosensorer kan bruges til så kaldet label-free detektion af små koncentrationer af molekyler i en opløsning. Når et specifikt molekyle binder til overfladen af en cantilever induceres et overfladestress som resulterer i en udbøjning af cantileveren. Cantileverens udbøjningen ...

  5. Microstructure cantilever beam for current measurement

    Directory of Open Access Journals (Sweden)

    M.T.E. Khan

    2010-01-01

    Full Text Available Most microelectromechanical systems (MEMS sensors are based on the microcantilever technology, which uses a broad range of design materials and structures. The benefit ofMEMStechnology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. A free-end cantilever beam with a magnetic material mass has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever beam to an externally-applied magnetic field. The cantilever was designed to form a capacitance transducer, which consisted of variable capacitance where electrical and mechanical energies were exchanged. The aim of this paper was to analyse the system design of the microcantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency, was applied, the cantilever beam exhibited a vibration motion along the vertical axis when placed closer to the line current. This motion created corresponding capacitance changes and generated a voltage output proportional to the capacitive change in the signal-processing circuitry attached to the microcantilever. The equivalent massspring system theory was used to describe and analyse the effect of the natural frequency of the system vibrations and motion due to the applied magnetic field, in a single-degree of freedom. The main application of this microcantilever is in current measurements to develop a non-contact current sensor mote.

  6. SU-8 hollow cantilevers for AFM cell adhesion studies

    Science.gov (United States)

    Martinez, Vincent; Behr, Pascal; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva; Vörös, Janos; Zambelli, Tomaso

    2016-05-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m-1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification.

  7. SU-8 hollow cantilevers for AFM cell adhesion studies

    International Nuclear Information System (INIS)

    Martinez, Vincent; Behr, Pascal; Vörös, Janos; Zambelli, Tomaso; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva

    2016-01-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m −1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification. (paper)

  8. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    Energy Technology Data Exchange (ETDEWEB)

    Xu, J.; Tang, J., E-mail: jtang@engr.uconn.edu [Department of Mechanical Engineering, The University of Connecticut, Storrs, Connecticut 06269 (United States)

    2015-11-23

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined.

  9. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    International Nuclear Information System (INIS)

    Xu, J.; Tang, J.

    2015-01-01

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined

  10. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    Energy Technology Data Exchange (ETDEWEB)

    Sader, John E. [Department of Mathematics and Statistics, University of Melbourne, Victoria 3010 (Australia); Kavli Nanoscience Institute and Department of Physics, California Institute of Technology, Pasadena, California 91125 (United States); Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J. [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Monty, Jason P.; Marusic, Ivan [Department of Mechanical Engineering, University of Melbourne, Victoria 3010 (Australia); Wei Xingzhan; Mulvaney, Paul [School of Chemistry, University of Melbourne, Victoria 3010 (Australia); Bio21 Institute, University of Melbourne, Victoria 3010 (Australia); Crawford, Simon A. [School of Botany, University of Melbourne, Victoria 3010 (Australia); Friend, James R. [Melbourne Centre for Nanofabrication, Clayton, Victoria 3800 (Australia); MicroNanophysics Research Laboratory, RMIT University, Melbourne, Victoria 3001 (Australia)

    2012-10-15

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  11. Spring constant calibration of atomic force microscope cantilevers of arbitrary shape

    International Nuclear Information System (INIS)

    Sader, John E.; Sanelli, Julian A.; Adamson, Brian D.; Bieske, Evan J.; Monty, Jason P.; Marusic, Ivan; Wei Xingzhan; Mulvaney, Paul; Crawford, Simon A.; Friend, James R.

    2012-01-01

    The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function for a cantilever of rectangular plan view geometry. Here, we present hydrodynamic functions for a series of irregular and non-rectangular atomic force microscope cantilevers that are commonly used in practice. Cantilever geometries of arrow shape, small aspect ratio rectangular, quasi-rectangular, irregular rectangular, non-ideal trapezoidal cross sections, and V-shape are all studied. This enables the spring constants of all these cantilevers to be accurately and routinely determined through measurement of their resonant frequency and quality factor in fluid (such as air). An approximate formulation of the hydrodynamic function for microcantilevers of arbitrary geometry is also proposed. Implementation of the method and its performance in the presence of uncertainties and non-idealities is discussed, together with conversion factors for the static and dynamic spring constants of these cantilevers. These results are expected to be of particular value to the design and application of micro- and nanomechanical systems in general.

  12. Polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes

    DEFF Research Database (Denmark)

    Johansson, Alicia; Calleja, M.; Dimaki, Maria

    2004-01-01

    A polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes has been designed and realized. Multi-walled carbon nanotubes from aqueous solution have been assembled between two metal electrodes that are separated by 2 mu m and embedded in the polymer cantilever. The entire chip......, except for the metallic electrodes and wiring, was fabricated in the photoresist SU-8. SU-8 allows for an inexpensive, flexible and fast fabrication method, and the cantilever platform provides a hydrophobic surface that should be well suited for nanotube assembly. The device can be integrated in a micro...

  13. Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

    International Nuclear Information System (INIS)

    Yeh, M.-K.; Tai, N.-Ha; Chen, B.-Y.

    2008-01-01

    Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 deg. and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1 μN landing force and decrease 18.60% for the V-shaped cantilever with 50 nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy

  14. Innovative multi-cantilever array sensor system with MOEMS read-out

    Science.gov (United States)

    Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

    2016-11-01

    Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

  15. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

    Directory of Open Access Journals (Sweden)

    Xinxin Li

    2009-01-01

    Full Text Available The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.

  16. Deployable large aperture optics system for remote sensing applications

    International Nuclear Information System (INIS)

    Sumali, Anton Hartono; Martin, Jeffrey W.; Main, John A.; Macke, Benjamin T.; Massad, Jordan Elias; Chaplya, Pavel Mikhail

    2004-01-01

    This report summarizes research into effects of electron gun control on piezoelectric polyvinylidene fluoride (PVDF) structures. The experimental apparatus specific to the electron gun control of this structure is detailed, and the equipment developed for the remote examination of the bimorph surface profile is outlined. Experiments conducted to determine the optimum electron beam characteristics for control are summarized. Clearer boundaries on the bimorphs control output capabilities were determined, as was the closed loop response. Further controllability analysis of the bimorph is outlined, and the results are examined. In this research, the bimorph response was tested through a matrix of control inputs of varying current, frequency, and amplitude. Experiments also studied the response to electron gun actuation of piezoelectric bimorph thin film covered with multiple spatial regions of control. Parameter ranges that yielded predictable control under certain circumstances were determined. Research has shown that electron gun control can be used to make macrocontrol and nanocontrol adjustments for PVDF structures. The control response and hysteresis are more linear for a small range of energy levels. Current levels needed for optimum control are established, and the generalized controllability of a PVDF bimorph structure is shown

  17. Efficiency Enhancement of a Cantilever-Based Vibration Energy Harvester

    Directory of Open Access Journals (Sweden)

    Ali E. Kubba

    2013-12-01

    Full Text Available Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA was used as an initial tool to compare the three geometries’ stiffness (K, output open-circuit voltage (Vave, and average normal strain in the piezoelectric transducer (εave that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3, has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle.

  18. Particle shedding from peristaltic pump tubing in biopharmaceutical drug product manufacturing.

    Science.gov (United States)

    Saller, Verena; Matilainen, Julia; Grauschopf, Ulla; Bechtold-Peters, Karoline; Mahler, Hanns-Christian; Friess, Wolfgang

    2015-04-01

    In a typical manufacturing setup for biopharmaceutical drug products, the fill and dosing pump is placed after the final sterile filtration unit in order to ensure adequate dispensing accuracy and avoid backpressure peaks. Given the sensitivity of protein molecules, peristaltic pumps are often preferred over piston pumps. However, particles may be shed from the silicone tubing employed. In this study, particle shedding and a potential turbidity increase during peristaltic pumping of water and buffer were investigated using three types of commercially available silicone tubing. In the recirculates, mainly particles of around 200 nm next to a very small fraction of particles in the lower micrometer range were found. Using 3D laser scanning microscopy, surface roughness of the inner tubing surface was found to be a determining factor for particle shedding from silicone tubing. As the propensity toward particle shedding varied between tubing types and also cannot be concluded from manufacturer's specifications, individual testing with the presented methods is recommended during tubing qualification. Choosing low abrasive tubing can help to further minimize the very low particle counts to be expected in pharmaceutical drug products. © 2015 Wiley Periodicals, Inc. and the American Pharmacists Association.

  19. Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles

    Science.gov (United States)

    Korayem, M. H.; Taheri, M.; Ghahnaviyeh, S. D.

    2015-08-01

    Due to the more delicate nature of biological micro/nanoparticles, it is necessary to compute the critical force of manipulation. The modeling and simulation of reactions and nanomanipulator dynamics in a precise manipulation process require an exact modeling of cantilevers stiffness, especially the stiffness of dagger cantilevers because the previous model is not useful for this investigation. The stiffness values for V-shaped cantilevers can be obtained through several methods. One of them is the PBA method. In another approach, the cantilever is divided into two sections: a triangular head section and two slanted rectangular beams. Then, deformations along different directions are computed and used to obtain the stiffness values in different directions. The stiffness formulations of dagger cantilever are needed for this sensitivity analyses so the formulations have been driven first and then sensitivity analyses has been started. In examining the stiffness of the dagger-shaped cantilever, the micro-beam has been divided into two triangular and rectangular sections and by computing the displacements along different directions and using the existing relations, the stiffness values for dagger cantilever have been obtained. In this paper, after investigating the stiffness of common types of cantilevers, Sobol sensitivity analyses of the effects of various geometric parameters on the stiffness of these types of cantilevers have been carried out. Also, the effects of different cantilevers on the dynamic behavior of nanoparticles have been studied and the dagger-shaped cantilever has been deemed more suitable for the manipulation of biological particles.

  20. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Loganathan, Muthukumaran; Bristow, Douglas A., E-mail: dbristow@mst.edu [Department of Mechanical and Aerospace Engineering, Missouri University of Science and Technology, Rolla, Missouri 65401 (United States)

    2014-04-15

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  1. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy.

    Science.gov (United States)

    Loganathan, Muthukumaran; Bristow, Douglas A

    2014-04-01

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  2. On the calibration of rectangular atomic force microscope cantilevers modified by particle attachment and lamination

    International Nuclear Information System (INIS)

    Bowen, James; Zhang, Zhibing; Adams, Michael J; Cheneler, David; Ward, Michael C L; Walliman, Dominic; Arkless, Stuart G

    2010-01-01

    A simple but effective method for estimating the spring constant of commercially available atomic force microscope (AFM) cantilevers is presented, based on estimating the cantilever thickness from knowledge of its length, width, resonant frequency and the presence or absence of an added mass, such as a colloid probe at the cantilever apex, or a thin film of deposited material. The spring constant of the cantilever can then be estimated using standard equations for cantilever beams. The results are compared to spring constant calibration measurements performed using reference cantilevers. Additionally, the effect of the deposition of Cr and Ti thin films onto rectangular Si cantilevers is investigated

  3. Stepped piezoresistive microcantilever designs for biosensors

    International Nuclear Information System (INIS)

    Ansari, Mohd Zahid; Cho, Chongdu; Urban, Gerald

    2012-01-01

    The sensitivity of a piezoresistive microcantilever biosensor strongly depends on its ability to convert the surface stress-induced deflections into large resistance change. To improve the sensitivity, we present stepped microcantilever biosensor designs that show significant resistance change compared with commonly used rectangular designs. The cantilever is made of silicon dioxide with a u-shaped silicon piezoresistor. The surface stress-induced deflections, bimorph deflection, fundamental resonant frequency and self-heating properties of the cantilever are studied using the FEM software. The surface stress-induced deflections are compared against the analytical model derived in this work. Results show that stepped designs have better signal-to-noise ratio than the rectangular ones and cantilevers with l/L between 0.5 and 0.75 are better designs for improving sensitivity. (paper)

  4. 5-HT3 and 5-HT4 antagonists inhibit peristaltic contractions in guinea-pig distal colon by mechanisms independent of endogenous 5-HT

    Directory of Open Access Journals (Sweden)

    Tiong Cheng Sia

    2013-08-01

    Full Text Available Recent studies have shown that endogenous serotonin is not required for colonic peristalsis in vitro, nor gastrointestinal (GI transit in vivo. However, antagonists of 5-Hydroxytryptamine (5-HT receptors can inhibit peristalsis and GI-transit in mammals, including humans. This raises the question of how these antagonists inhibit GI-motility and transit, if depletion of endogenous 5-HT does not cause any significant inhibitory changes to either GI-motility or transit ? We investigated the mechanism by which 5-HT3 and 5-HT4 antagonists inhibit distension-evoked peristaltic contractions in guinea-pig distal colon. In control animals, repetitive peristaltic contractions of the circular muscle were evoked in response to fixed fecal pellet distension. Distension-evoked peristaltic contractions were unaffected in animals with mucosa and submucosal plexus removed, that were also treated with reserpine (to deplete neuronal 5-HT. In control animals, peristaltic contractions were blocked temporarily by ondansetron (1-10µM and SDZ-205-557 (1-10µM in many animals. Interestingly, after this temporary blockade, and whilst in the continued presence of these antagonists, peristaltic contractions recovered, with characteristics no different from controls. Surprisingly, similar effects were seen in mucosa-free preparations, which had no detectable 5-HT, as detected by mass spectrometry. In summary, distension-evoked peristaltic reflex contractions of the circular muscle layer of the guinea-pig colon can be inhibited temporarily, or permanently, in the same preparation by selective 5-HT3 and 5-HT4 antagonists, depending on the concentration of the antagonists applied. These effects also occur in preparations that lack any detectable 5-HT. We suggest caution should be exercised when interpreting the effects of 5-HT3 and 5-HT4 antagonists; and the role of endogenous 5-HT, in the generation of distension-evoked colonic peristalsis.

  5. Conductive oxide cantilever for cryogenic nano-potentiometry

    International Nuclear Information System (INIS)

    Hiroya, Tsutomu; Inagaki, Katsuhiko; Tanda, Satoshi; Tsuneta, Taku; Yamaya, Kazuhiko

    2003-01-01

    Nanoscale electrical transport properties have attracted attentions because of new phenomena such as ballistic transport, quantized resistance, and Coulomb blockade. For measurement of nanoscale resistance, we have been developing a cryogenic atomic force microscope that can operate at 1.8 K. To use it as an electrode, we coated the cantilever with conductive oxides of TiO and indium tin oxide (ITO). We verified that TiO and ITO thin films remain conductive even at 4.2 K. Also we measured I-V characteristics of the tip-sample contact with a standard sample of NbSe 2 single crystal, and found that the conductive coats were not lost under large stresses due to the tip-sample contact. Moreover, we succeeded in obtaining a room temperature nano-potentiometry of a gold thin film with the ITO coated cantilever. In conclusion, the TiO and ITO coated cantilevers are applicable to cryogenic nano-potentiometry

  6. Cantilever piezoelectric energy harvester with multiple cavities

    International Nuclear Information System (INIS)

    S Srinivasulu Raju; M Umapathy; G Uma

    2015-01-01

    Energy harvesting employing piezoelectric materials in mechanical structures such as cantilever beams, plates, diaphragms, etc, has been an emerging area of research in recent years. The research in this area is also focused on structural tailoring to improve the harvested power from the energy harvesters. Towards this aim, this paper presents a method for improving the harvested power from a cantilever piezoelectric energy harvester by introducing multiple rectangular cavities. A generalized model for a piezoelectric energy harvester with multiple rectangular cavities at a single section and two sections is developed. A method is suggested to optimize the thickness of the cavities and the number of cavities required to generate a higher output voltage for a given cantilever beam structure. The performance of the optimized energy harvesters is evaluated analytically and through experimentation. The simulation and experimental results show that the performance of the energy harvester can be increased with multiple cavities compared to the harvester with a single cavity. (paper)

  7. Dynamic state switching in nonlinear multiferroic cantilevers

    Science.gov (United States)

    Wang, Yi; Onuta, Tiberiu-Dan; Long, Christian J.; Lofland, Samuel E.; Takeuchi, Ichiro

    2013-03-01

    We demonstrate read-write-read-erase cyclical mechanical-memory properties of all-thin-film multiferroic heterostructured Pb(Zr0.52Ti0.48) O3 / Fe0.7Ga0.3 cantilevers when a high enough voltage around the resonant frequency of the device is applied on the Pb(Zr0.52Ti0.48) O3 piezo-film. The device state switching process occurs due to the presence of a hysteresis loop in the piezo-film frequency response, which comes from the nonlinear behavior of the cantilever. The reference frequency at which the strain-mediated Fe0.7Ga0.3 based multiferroic device switches can also be tuned by applying a DC magnetic field bias that contributes to the increase of the cantilever effective stiffness. The switching dynamics is mapped in the phase space of the device measured transfer function characteristic for such high piezo-film voltage excitation, providing additional information on the dynamical stability of the devices.

  8. The Correlated Dynamics of Micron-Scale Cantilevers in a Viscous Fluid

    Science.gov (United States)

    Robbins, Brian A.

    A number of microcantilever systems of fundamental importance are explored using theoretical and numerical methods to quantify and provide physical insights into the dynamics of experimentally accessible systems that include a variety of configurations and viscous fluids. It is first shown that the correlated dynamics of both a laterally and vertically offset cantilever pair can be accurately predicted by numerical simulations. This is verified by comparing the correlated dynamics yielded by numerical simulations with experimental measurement. It is also demonstrated that in order to obtain these accurate predictions, geometric details of the cantilever must be included in the numerical simulation to directly reflect the experimental cantilever. A microrheology technique that utilizes the fluctuation-dissipation theorem is proposed. It is shown that by including the frequency dependence of the fluid damping, improvements in accuracy of the predictions of the rheological properties of the surrounding fluid are observed over current techniques. The amplitude spectrum of a 2-D cantilever in a power-law fluid is studied. The resulting amplitude spectrum yielded a curve similar to an overdamped system. It is observed that the amplitude and noise spectrum yield the same qualitative response for a 2-D cantilever in a shear-thinning, power-law fluid. The correlated dynamics of a tethered vertically offset cantilever pair is investigated. It is shown that for a range of stiffness ratios, which is the ratio of the spring constant of the tethering relative to the cantilever spring constant, the change in the correlated dynamics of a Hookean spring tethered cantilever pair can be seen in the presence of fluid coupling. The dynamics of a spring-mass tethered, vertically offset cantilever pair is qualitatively studied by simplifying the model to an array of springs and masses. The resulting study found that the correlated dynamics of the displacement of mass of the tethered

  9. Tolerability, safety and efficacy of Iloprost infusion without peristaltic pump in systemic sclerosis

    Directory of Open Access Journals (Sweden)

    S. Tosi

    2011-09-01

    Full Text Available Objective. To evaluate safety, tolerability and efficacy on Raynaud’s phenomenon (Rp of iloprost infusion without peristaltic pump in patients with systemic sclerosis (SSc. Patients and methods. The inclusion criteria were diagnosis of SSc, age between 18 and 65 years, presence of Rp, and absence of any controindication to the use of iloprost. The treatment was carried out in a day hospital setting and consisted first of 5 consecutive days of iloprost infusion (from an initial dose of 1.0 ng/Kg/min up to 2 ng/kg/min, and then of 2 days of infusions at the maximum possible dose every 45 days for one year. All of the adverse events were carefully recorded and the changes in the Rp were measured by a 5 grade scale (worsened, unmodified, slightly improved, very improved, disappeared. Results. Thirty-eight SSc patients (all females, mean age 49 years (range 18.5-65, disease duration 1.5 years (range 0.5-10.8 were enrolled in the study. During the first cycle of therapy, 14 avderse events occurred in 11 (28.9% patients and during the next cycles, 3 adverse events were seen in 3 (7.9% patients. In all of the cases they were mild and transient. Rp was considered very improved in 15 (39.5% patients, slightly improved in 13 (34.2%, unmodified in 8 (21% and worse in 2 (5.2%. Discussion. In this study intravenous iloprost without peristaltic pump proved to be safe, well tolerated, and as effective as traditional infusion through peristaltic pump in improving Rp in patients with SSc.

  10. Effect of wall compliance on peristaltic transport of a Newtonian fluid in an asymmetric channel

    Directory of Open Access Journals (Sweden)

    Mohamed H. Haroun

    2006-01-01

    Full Text Available Peristaltic transport of an incompressible viscous fluid in an asymmetric compliant channel is studied. The channel asymmetry is produced by choosing the peristaltic wave train on the walls to have different amplitudes and phases. The fluid-solid interaction problem is investigated by considering equations of motion of both the fluid and the deformable boundaries. The driving mechanism of the muscle is represented by assuming the channel walls to be compliant. The phenomenon of the “mean flow reversal” is discussed. The effect of wave amplitude ratio, width of the channel, phase difference, wall elastance, wall tension, and wall damping on mean-velocity and reversal flow has been investigated. The results reveal that the reversal flow occurs near the boundaries which is not possible in the elastic symmetric channel case.

  11. Fabrication Effects on Polysilicon-based Micro cantilever Piezo resistivity for Biological Sensing Application

    International Nuclear Information System (INIS)

    Nina Korlina Madzhi; Balkish Natra; Mastura Sidek; Khuan, L.Y.; Anuar Ahmad

    2011-01-01

    In principle, adsorption of biological molecules on a functionalized surface of a micro fabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezo resistive micro cantilever sensors were designed to increase the sensitivity of the micro cantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezo resistors as a function of the cantilever vertical displacements. The resistivity of the piezo resistivity micro cantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezo resistor length. The results show that although the thickness of piezo resistor was the same at 0.5 μm the resistance value was varied. (author)

  12. Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

    Science.gov (United States)

    Wasisto, Hutomo Suryo; Wu, Wenze; Uhde, Erik; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%.

  13. An in vivo endoluminal ultrasonographic study of peristaltic activity in the distal porcine ureter

    NARCIS (Netherlands)

    Roshani, H.; Dabhoiwala, N. F.; Dijkhuis, T.; Kurth, K. H.; Lamers, W. H.

    2000-01-01

    PURPOSE: Experiments were performed to quantify the duration and frequency of ureteric peristaltic activity in the laparotomized and non-laparotomized pig in its virgin and postinstrumented states. MATERIALS AND METHODS: Pigs (n = 10) in a steady state of hydration were studied under halothane

  14. On the electromechanical modelling of a resonating nano-cantilever-based transducer

    DEFF Research Database (Denmark)

    Teva, J.; Abadal, G.; Davis, Zachary James

    2004-01-01

    deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real deflection shape of the cantilever and the contribution to the cantilever-driver capacitance of the fringing field....... Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope. (C) 2004 Elsevier B.V. All rights reserved....

  15. Peristaltic pumping in an elastic tube: feeding the hungry python

    Science.gov (United States)

    Takagi, Daisuke; Balmforth, Neil

    2010-11-01

    Biological ducts convey contents like food in the digestive system by peristaltic action, propagating waves of muscular contraction and relaxation. The motion is investigated theoretically by considering a radial force of sinusoidal or Gaussian form moving steadily down a fluid-filled axisymmetric tube. Effects of the prescribed force on the resultant fluid flow and elastic deformation of the tube wall are presented. The flow can induce a rigid object suspended in the fluid to propel in different ways, as demonstrated in numerous examples.

  16. Determination of young's modulus of PZT-influence of cantilever orientation

    NARCIS (Netherlands)

    Nazeer, H.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

    Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This

  17. Electronically droplet energy harvesting using piezoelectric cantilevers

    KAUST Repository

    Al Ahmad, Mahmoud Al

    2012-01-01

    A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films. During the impact, the droplet kinetic energy is transferred into the form of mechanical stress forcing the piezoelectric structure to vibrate. Experimental results show energy of 0.3 μJ per droplet. The scenario of moderate falling drop intensity, i.e. 230 drops per second, yields a total energy of 400 μJ. © 2012 The Institution of Engineering and Technology.

  18. Theoretical modeling and equivalent electric circuit of a bimorph piezoelectric micromachined ultrasonic transducer.

    Science.gov (United States)

    Sammoura, Firas; Kim, Sang-Gook

    2012-05-01

    An electric circuit model for a circular bimorph piezoelectric micromachined ultrasonic transducer (PMUT) was developed for the first time. The model was made up of an electric mesh, which was coupled to a mechanical mesh via a transformer element. The bimorph PMUT consisted of two piezoelectric layers of the same material, having equal thicknesses, and sandwiched between three thin electrodes. The piezoelectric layers, having the same poling axis, were biased with electric potentials of the same magnitude but opposite polarity. The strain mismatches between the two layers created by the converse piezoelectric effect caused the membrane to vibrate and, hence, transmit a pressure wave. Upon receiving the echo of the acoustic wave, the membrane deformation led to the generation of electric charges as a result of the direct piezoelectric phenomenon. The membrane angular velocity and electric current were related to the applied electric field, the impinging acoustic pressure, and the moment at the edge of the membrane using two canonical equations. The transduction coefficients from the electrical to the mechanical domain and vice-versa were shown to be bilateral and the system was shown to be reversible. The circuit parameters of the derived model were extracted, including the transformer ratio, the clamped electric impedance, the spring-softening impedance, and the open-circuit mechanical impedance. The theoretical model was fully examined by generating the electrical input impedance and average plate displacement curves versus frequency under both air and water loading conditions. A PMUT composed of piezoelectric material with a lossy dielectric was also investigated and the maximum possible electroacoustical conversion efficiency was calculated.

  19. A distributed parameter electromechanical model for bimorph piezoelectric energy harvesters based on the refined zigzag theory

    Science.gov (United States)

    Chen, Chung-De

    2018-04-01

    In this paper, a distributed parameter electromechanical model for bimorph piezoelectric energy harvesters based on the refined zigzag theory (RZT) is developed. In this model, the zigzag function is incorporated into the axial displacement, and the zigzag distribution of the displacement between the adjacent layers of the bimorph structure can be considered. The governing equations, including three equations of motions and one equation of circuit, are derived using Hamilton’s principle. The natural frequency, its corresponding modal function and the steady state response of the base excitation motion are given in exact forms. The presented results are benchmarked with the finite element method and two beam theories, the first-order shear deformation theory and the classical beam theory. Comparing examples shows that the RZT provides predictions of output voltage and generated power at high accuracy, especially for the case of a soft middle layer. Variation of the parameters, such as the beam thickness, excitation frequencies and the external electrical loads, is investigated and its effects on the performance of the energy harvesters are studied by using the RZT developed in this paper. Based on this refined theory, analysts and engineers can capture more details on the electromechanical behavior of piezoelectric harvesters.

  20. A new approach for elasto-plastic finite strain analysis of cantilever ...

    Indian Academy of Sciences (India)

    A new approach for elasto-plastic finite strain analysis of cantilever beams subjected to uniform bending moment ... Curvature; deflection curve; cantilever beam; elasto-plastic analysis; tapered beam subjected to tipmoment; ... Sadhana | News.

  1. Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

    International Nuclear Information System (INIS)

    Sathishkumar, P.; Punyabrahma, P.; Sri Muthu Mrinalini, R.; Jayanth, G. R.

    2015-01-01

    A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array

  2. Aeroelastic performance evaluation of a flexure box morphing airfoil concept

    Science.gov (United States)

    Pankonien, Alexander M.; Inman, Daniel J.

    2014-04-01

    The flexure-box morphing aileron concept utilizes Macro-Fiber Composites (MFCs) and a compliant box to create a conformal morphing aileron. This work evaluates the impact of the number of MFCs on the performance, power and mass of the aileron by experimentally investigating two different actuator configurations: unimorph and bimorph. Implemented in a NACA 0012 airfoil with 304.8 mm chord, the unimorph and bimorph configurations are experimentally tested over a range of flow speeds from 5 to 20 m/s and angles of attack from -20 to 20 degrees under aerodynamic loads in a wind tunnel. An embedded flexible sensor is installed in the aileron to evaluate the effect of aerodynamic loading on tip position. For both design choices, the effect of actuation on lift, drag and pitching moment coefficients are measured. Finally, the impact on aileron mass and average power consumption due to the added MFCs is considered. The results showed the unimorph exhibiting superior ability to influence flow up to 15 m/s, with equivalent power consumption and lower overall mass. At 20 m/s, the bimorph exhibited superior control over aerodynamic forces and the unimorph experienced significant deformation due to aerodynamic loading.

  3. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    Energy Technology Data Exchange (ETDEWEB)

    Schmidsfeld, A. von, E-mail: avonschm@uos.de; Reichling, M., E-mail: reichling@uos.de [Fachbereich Physik, Universität Osnabrück, Barbarastraße 7, 49076 Osnabrück (Germany)

    2015-09-21

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavity via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.

  4. Study of the Behavior of a Bell-Shaped Colonic Self-Expandable NiTi Stent under Peristaltic Movements

    Directory of Open Access Journals (Sweden)

    Sergio Puértolas

    2013-01-01

    Full Text Available Managing bowel obstruction produced by colon cancer requires an emergency intervention to patients usually in poor conditions, and it requires creating an intestinal stoma in most cases. Regardless of that the tumor may be resectable, a two-stage surgery is mandatory. To avoid these disadvantages, endoscopic placement of self-expanding stents has been introduced more than 10 years ago, as an alternative to relieve colonic obstruction. It can be used as a bridge to elective single-stage surgery avoiding a stoma or as a definitive palliative solution in patients with irresectable tumor or poor estimated survival. Stents must be capable of exerting an adequate radial pressure on the stenosed wall, keeping in mind that stent must not move or be crushed, guaranteeing an adequate lumen when affected by peristaltic waves. A finite element simulation of bell-shaped nitinol stent functionality has been done. Catheter introduction, releasing at position, and the effect of peristaltic wave were simulated. To check the reliability of the simulation, a clinical experimentation with porcine specimens was carried out. The stent presented a good deployment and flexibility. Stent behavior was excellent, expanding from the very narrow lumen corresponding to the maximum peristaltic pressure to the complete recovery of operative lumen when the pressure disappears.

  5. Computer aided design of Langasite resonant cantilevers: analytical models and simulations

    Science.gov (United States)

    Tellier, C. R.; Leblois, T. G.; Durand, S.

    2010-05-01

    Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.

  6. A membrane actuator based on an ionic polymer network and carbon nanotubes: the synergy of ionic transport and mechanical properties

    International Nuclear Information System (INIS)

    Dai, Chi-An; Hsiao, Chih-Chun; Weng, Shih-Chun; Kao, An-Cheng; Liu, Chien-Pan; Tsai, Wei-Bor; Chen, Wen-Shiang; Liu, Wei-Ming; Shih, Wen-Pin; Ma, Chien-Ching

    2009-01-01

    There is a growing interest in the development of ionic polymer–metal composites (IPMC) as sensors and actuators for biomedical applications due to their large deformation under low driving voltage. In this study, we employed poly(vinyl alcohol)/poly(2-acrylamido-2-methyl-1-propanesulfonic acid) (PVA/PAMPS) blend membranes as semi-interpenetrating polymer networks for ion exchange in IPMC construction. To improve the mechanical and electrical properties of the IPMC, multi-walled carbon nanotubes (MWNT) were added into PVA/PAMPS membranes. The actuator performance of the membranes was measured as a function of their water uptake, ion exchange capacity, ionic conductivity and the amount of MWNT in the membrane. The dispersion quality of the modified MWNT in the PVA/PAMPS membrane was measured using transmission electron microscopy. The cantilever-type IPMC actuator bends under applied voltage and its bending angle and the generative tip force were measured. Under an applied voltage, IPMC with ∼1 wt% MWNT showed the largest deflection and generated the largest blocking tip force compared with those of IPMC with other various amounts of MWNT. These results show that a small addition of MWNT can optimize the actuation performance of IPMC. The result indicates that IPMC with MWNT shows potential for use as biomimetic artificial muscle

  7. Anterior Cantilever Resin-Bonded Fixed Dental Prostheses: A Review of the Literature.

    Science.gov (United States)

    Mourshed, Bilal; Samran, Abdulaziz; Alfagih, Amal; Samran, Ahalm; Abdulrab, Saleem; Kern, Matthias

    2018-03-01

    This review evaluated the survival rate of single retainer anterior resin-bonded fixed dental prostheses (RBFDPs) to determine whether the choice of material affects their clinical outcome. An electronic search of the English peer-reviewed dental literature in PubMed was conducted to identify all publications reporting on cantilever RBFDPs until May 2016. Study information extraction and methodological quality assessments were accomplished by two reviewers independently. The searched keywords were as follows: "resin-bonded, single retainer, all-ceramic resin-bonded fixed dental prostheses (RBFDPs), all-ceramic RBFDPs, cantilever resin, RBFDPs, cantilever resin-bonded bridge, two units cantilevered, two-unit cantilevered, metal-ceramic cantilever, and metal-ceramic." Furthermore, the ''Related Articles'' feature of PubMed was used to identify further references of interest within the primary search. The bibliographies of the obtained references were used to identify pertinent secondary references. Review articles were also used to identify relevant articles. After the application of exclusion criteria, the definitive list of articles was screened to extract the qualitative data, and the results were analyzed. Overall 2588 articles were dedicated at the first review phase; however, only 311 studies were left after the elimination of duplicates and unrelated studies. Seventeen studies passed the second review phase. Five studies were excluded because they were follow-up studies of the same study cohort. Twelve studies were finally selected. The use of cantilever RBFDPs showed promising results and high survival rates. © 2016 by the American College of Prosthodontists.

  8. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    International Nuclear Information System (INIS)

    Hoogenboom, B W; Frederix, P L T M; Engel, A; Fotiadis, D; Hug, H J

    2008-01-01

    We have developed an optical cantilever deflection detector with a spot size -1/2 sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes

  9. Dynamic response of an electrostatically actuated microbeam to drop-table test

    International Nuclear Information System (INIS)

    Ouakad, Hassen M; Younis, Mohammad I; Alsaleem, Fadi

    2012-01-01

    In this paper, we present a theoretical and experimental investigation into the dynamic response of an electrostatically actuated microbeam when subjected to drop-table test. For the theoretical part, a reduced-order model based on an Euler–Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and the shock pulse of the drop-table test. Simulation results are presented showing the combined effect of electrostatic force and mechanical shock in triggering early pull-in instability of the cantilever microbeams. The analytical simulation results are validated by finite-element results for the static response. Dynamic pull-in threshold as a function of the mechanical shock amplitude is shown over a wide range of shock spanning hundreds of thousands of g up to zero g. For the experimental part, a micromachined cantilever beam made of gold of length 50 µm is subjected to drop-table tests while being biased by electrostatic loads. Several experimental data are shown demonstrating the phenomenon of collapse due to the combined shock and electrostatic forces. It is also demonstrated that by biasing short and too stiff microbeams with electrostatic voltages, their stiffness is weakened. This lowers their threshold of collapse considerably to the range of acceleration that enables testing them with in-house shock testing equipments, such as drop-table tests. (paper)

  10. Size-dependent effective Young’s modulus of silicon nitride cantilevers

    NARCIS (Netherlands)

    Babaei Gavan, K.; Westra, H.J.R.; Van der Drift, E.W.J.M.; Venstra, W.J.; Van der Zant, H.S.J.

    2009-01-01

    The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations

  11. Biosensors based on cantilevers.

    Science.gov (United States)

    Alvarez, Mar; Carrascosa, Laura G; Zinoviev, Kiril; Plaza, Jose A; Lechuga, Laura M

    2009-01-01

    Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in diverse fields, such as genomic or proteomic, because of the biosensor flexibility, the low sample consumption, and the non-pretreated samples required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an example. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.

  12. The importance of cantilever dynamics in the interpretation of Kelvin probe force microscopy.

    Science.gov (United States)

    Satzinger, Kevin J; Brown, Keith A; Westervelt, Robert M

    2012-09-15

    A realistic interpretation of the measured contact potential difference (CPD) in Kelvin probe force microscopy (KPFM) is crucial in order to extract meaningful information about the sample. Central to this interpretation is a method to include contributions from the macroscopic cantilever arm, as well as the cone and sharp tip of a KPFM probe. Here, three models of the electrostatic interaction between a KPFM probe and a sample are tested through an electrostatic simulation and compared with experiment. In contrast with previous studies that treat the KPFM cantilever as a rigid object, we allow the cantilever to bend and rotate; accounting for cantilever bending provides the closest agreement between theory and experiment. We demonstrate that cantilever dynamics play a major role in CPD measurements and provide a simulation technique to explore this phenomenon.

  13. Piezoelectric micromotor based on the structure of serial bending arms.

    Science.gov (United States)

    Tong, Jianhua; Cui, Tianhong; Shao, Peige; Wang, Liding

    2003-09-01

    This paper presents a new piezoelectric micromotor based on the structure of serial bending arms. Serial bending arms are composed of two piezoelectric bimorphs with one end fixed and the other end free, driven by two signals of a biased square wave with a phase difference of pi/2. The free end of a cantilever arm will move along an elliptic orbit so that the cantilever is used to drive a cylinder rotor. The rotor's end surface contacts the free end of the cantilever, resulting in the rotor's rotation. There are six serial bending arms anchored on the base. The driving mechanism of the micromotor is proposed and analyzed. A new micromotor prototype, 5 mm in diameter, has been fabricated and characterized. The maximum rotational speed reaches 325 rpm, and the output torque is about 36.5 microNm.

  14. Cancelation of thermally induced frequency shifts in bimaterial cantilevers by nonlinear optomechanical interactions

    Energy Technology Data Exchange (ETDEWEB)

    Vy, Nguyen Duy, E-mail: nguyenduyvy@tdt.edu.vn [Theoretical Physics Research Group, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City 756636 (Viet Nam); Tri Dat, Le [Faculty of Physics and Engineering Physics, University of Science, Ho Chi Minh City 748355 (Viet Nam); Iida, Takuya [Department of Physical Science, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531 (Japan)

    2016-08-01

    Bimaterial cantilevers have recently been used in, for example, the calorimetric analysis with picowatt resolution in microscopic space based on state-of-the-art atomic force microscopes. However, thermally induced effects usually change physical properties of the cantilevers, such as the resonance frequency, which reduce the accuracy of the measurements. Here, we propose an approach to circumvent this problem that uses an optical microcavity formed between a metallic layer coated on the back of the cantilever and one coated at the end of an optical fiber irradiating the cantilever. In addition to increasing the sensitivity, the optical rigidity of this system diminishes the thermally induced frequency shift. For a coating thickness of several tens of nanometers, the input power is 5–10 μW. These values can be evaluated from parameters derived by directly irradiating the cantilever in the absence of the microcavity. The system has the potential of using the cantilever both as a thermometer without frequency shifting and as a sensor with nanometer-controlled accuracy.

  15. MicroCantilever (MC) based nanomechanical sensor for detection of molecular interactions

    Energy Technology Data Exchange (ETDEWEB)

    Kang, Kyung [Iowa State Univ., Ames, IA (United States)

    2011-01-01

    Specific aims of this study are to investigate the mechanism governing surface stress generation associated with chemical or molecular binding on functionalized microcantilevers. Formation of affinity complexes on cantilever surfaces leads to charge redistribution, configurational change and steric hindrance between neighboring molecules resulting in surface stress change and measureable cantilever deformation. A novel interferometry technique employing two adjacent micromachined cantilevers (a sensing/reference pair) was utilized to measure the cantilever deformation. The sensing principle is that binding/reaction of specific chemical or biological species on the sensing cantilever transduces to mechanical deformation. The differential bending of the sensing cantilever respect to the reference cantilever ensures that measured response is insensitive to environmental disturbances. As a proof of principle for the measurement technique, surface stress changes associated with: self-assembly of alkanethiol, hybridization of ssDNA, and the formation of cocaine-aptamer complexes were measured. Dissociation constant (Kd) for each molecular reaction was utilized to estimate the surface coverage of affinity complexes. In the cases of DNA hybridization and cocaine-aptamer binding, measured surface stress was found to be dependent on the surface coverage of the affinity complexes. In order to achieve a better sensitivity for DNA hybridization, immobilization of receptor molecules was modified to enhance the deformation of underlying surface. Single-stranded DNA (ssDNA) strands with thiol-modification on both 3-foot and 5-foot ends were immobilized on the gold surface such that both ends are attached to the gold surface. Immobilization condition was controlled to obtain similar receptor density as single-thiolated DNA strands. Hybridization of double-thiolated DNA strands leads to an almost two orders of magnitude increase in cantilever deformation. In both DNA

  16. Actuators of 3-element unimorph deformable mirror

    Science.gov (United States)

    Fu, Tianyang; Ning, Yu; Du, Shaojun

    2016-10-01

    Kinds of wavefront aberrations exist among optical systems because of atmosphere disturbance, device displacement and a variety of thermal effects, which disturb the information of transmitting beam and restrain its energy. Deformable mirror(DM) is designed to adjust these wavefront aberrations. Bimorph DM becomes more popular and more applicable among adaptive optical(AO) systems with advantages in simple structure, low cost and flexible design compared to traditional discrete driving DM. The defocus aberration accounted for a large proportion of all wavefront aberrations, with a simpler surface and larger amplitude than others, so it is very useful to correct the defocus aberration effectively for beam controlling and aberration adjusting of AO system. In this study, we desired on correcting the 3rd and 10th Zernike modes, analyze the characteristic of the 3rd and 10th defocus aberration surface distribution, design 3-element actuators unimorph DM model study on its structure and deformation principle theoretically, design finite element models of different electrode configuration with different ring diameters, analyze and compare effects of different electrode configuration and different fixing mode to DM deformation capacity through COMSOL finite element software, compare fitting efficiency of DM models to the 3rd and 10th Zernike modes. We choose the inhomogeneous electrode distribution model with better result, get the influence function of every electrode and the voltage-PV relationship of the model. This unimorph DM is suitable for the AO system with a mainly defocus aberration.

  17. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    Directory of Open Access Journals (Sweden)

    Aamand Jens

    2011-01-01

    Full Text Available Abstract The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide immobilized on a cantilever surface to anti-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system.

  18. Feedback cooling of cantilever motion using a quantum point contact transducer

    International Nuclear Information System (INIS)

    Montinaro, M.; Mehlin, A.; Solanki, H. S.; Peddibhotla, P.; Poggio, M.; Mack, S.; Awschalom, D. D.

    2012-01-01

    We use a quantum point contact (QPC) as a displacement transducer to measure and control the low-temperature thermal motion of a nearby micromechanical cantilever. The QPC is included in an active feedback loop designed to cool the cantilever's fundamental mechanical mode, achieving a squashing of the QPC noise at high gain. The minimum achieved effective mode temperature of 0.2 K and the displacement resolution of 10 -11 m/√(Hz) are limited by the performance of the QPC as a one-dimensional conductor and by the cantilever-QPC capacitive coupling.

  19. Improved Noninterferometric Test of Collapse Models Using Ultracold Cantilevers

    Science.gov (United States)

    Vinante, A.; Mezzena, R.; Falferi, P.; Carlesso, M.; Bassi, A.

    2017-09-01

    Spontaneous collapse models predict that a weak force noise acts on any mechanical system, as a consequence of the collapse of the wave function. Significant upper limits on the collapse rate have been recently inferred from precision mechanical experiments, such as ultracold cantilevers and the space mission LISA Pathfinder. Here, we report new results from an experiment based on a high-Q cantilever cooled to millikelvin temperatures, which is potentially able to improve the current bounds on the continuous spontaneous localization (CSL) model by 1 order of magnitude. High accuracy measurements of the cantilever thermal fluctuations reveal a nonthermal force noise of unknown origin. This excess noise is compatible with the CSL heating predicted by Adler. Several physical mechanisms able to explain the observed noise have been ruled out.

  20. Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

    Energy Technology Data Exchange (ETDEWEB)

    Hoogenboom, B W [London Centre for Nanotechnology and Department of Physics and Astronomy, University College London, 17-19 Gordon Street, London WC1H 0AH (United Kingdom); Frederix, P L T M; Engel, A [M E Mueller Institute, Biozentrum, University of Basel, Klingelbergstrasse 70, 4056 Basel (Switzerland); Fotiadis, D [Institute of Biochemistry and Molecular Medicine, University of Berne, Buehlstrasse 28, 3012 Berne (Switzerland); Hug, H J [Swiss Federal Laboratories for Materials Testing and Research, EMPA, Ueberlandstrasse 129, 8600 Duebendorf (Switzerland)], E-mail: b.hoogenboom@ucl.ac.uk

    2008-09-24

    We have developed an optical cantilever deflection detector with a spot size <3 {mu}m and fm Hz{sup -1/2} sensitivity over a>10 MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes.

  1. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    International Nuclear Information System (INIS)

    Keller, Stephan; Boisen, Anja; Haefliger, Daniel

    2010-01-01

    SU-8 cantilevers with a thickness of 2 µm were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T PEB = 50 °C followed by a hard bake at T HB = 90 °C proved to be optimal to ensure low cantilever bending and low rotational deformation due to excellent device release and low change of these properties with time. With the optimized process, the reproducible fabrication of arrays with 2 µm thick cantilevers with a length of 500 µm and an initial bending of less than 20 µm was possible. The theoretical spring constant of these cantilevers is k = 4.8 ± 2.5 mN m −1 , which is comparable to the value for Si cantilevers with identical dimensions and a thickness of 500 nm.

  2. Peristaltic transport of Johnson-Segalman fluid under effect of a magnetic field

    Directory of Open Access Journals (Sweden)

    Moustafa Elshahed

    2005-01-01

    Full Text Available The peristaltic transport of Johnson-Segalman fluid by means of an infinite train of sinusoidal waves traveling along the walls of a two-dimensional flexible channel is investigated. The fluid is electrically conducted by a transverse magnetic field. A perturbation solution is obtained for the case in which amplitude ratio is small. Numerical results are reported for various values of the physical parameters of interest.

  3. Supinator Extender (SUE): a pneumatically actuated robot for forearm/wrist rehabilitation after stroke.

    Science.gov (United States)

    Allington, James; Spencer, Steven J; Klein, Julius; Buell, Meghan; Reinkensmeyer, David J; Bobrow, James

    2011-01-01

    The robot described in this paper, SUE (Supinator Extender), adds forearm/wrist rehabilitation functionality to the UCI BONES exoskeleton robot and to the ArmeoSpring rehabilitation device. SUE is a 2-DOF serial chain that can measure and assist forearm supination-pronation and wrist flexion-extension. The large power to weight ratio of pneumatic actuators allows SUE to achieve the forces needed for rehabilitation therapy while remaining lightweight enough to be carried by BONES and ArmeoSpring. Each degree of freedom has a range of 90 degrees, and a nominal torque of 2 ft-lbs. The cylinders are mounted away from the patient's body on the lateral aspect of the arm. This is to prevent the danger of a collision and maximize the workspace of the arm robot. The rotation axis used for supination-pronation is a small bearing just below the subject's wrist. The flexion-extension motion is actuated by a cantilevered pneumatic cylinder, which allows the palm of the hand to remain open. Data are presented that demonstrate the ability of SUE to measure and cancel forearm/wrist passive tone, thereby extending the active range of motion for people with stroke.

  4. Calibration of atomic force microscope cantilevers using standard and inverted static methods assisted by FIB-milled spatial markers

    International Nuclear Information System (INIS)

    Slattery, Ashley D; Blanch, Adam J; Quinton, Jamie S; Gibson, Christopher T

    2013-01-01

    Static methods to determine the spring constant of AFM cantilevers have been widely used in the scientific community since the importance of such calibration techniques was established nearly 20 years ago. The most commonly used static techniques involve loading a trial cantilever with a known force by pressing it against a pre-calibrated standard or reference cantilever. These reference cantilever methods have a number of sources of uncertainty, which include the uncertainty in the measured spring constant of the standard cantilever, the exact position of the loading point on the reference cantilever and how closely the spring constant of the trial and reference cantilever match. We present a technique that enables users to minimize these uncertainties by creating spatial markers on reference cantilevers using a focused ion beam (FIB). We demonstrate that by combining FIB spatial markers with an inverted reference cantilever method, AFM cantilevers can be accurately calibrated without the tip of the test cantilever contacting a surface. This work also demonstrates that for V-shaped cantilevers it is possible to determine the precise loading position by AFM imaging the section of the cantilever where the two arms join. Removing tip-to-surface contact in both the reference cantilever method and sensitivity calibration is a significant improvement, since this is an important consideration for AFM users that require the imaging tip to remain in pristine condition before commencing measurements. Uncertainties of between 5 and 10% are routinely achievable with these methods. (paper)

  5. Accurate measurement of Atomic Force Microscope cantilever deflection excluding tip-surface contact with application to force calibration

    Energy Technology Data Exchange (ETDEWEB)

    Slattery, Ashley D.; Blanch, Adam J.; Quinton, Jamie S.; Gibson, Christopher T., E-mail: christopher.gibson@flinders.edu.au

    2013-08-15

    Considerable attention has been given to the calibration of AFM cantilever spring constants in the last 20 years. Techniques that do not require tip-sample contact are considered advantageous since the imaging tip is not at risk of being damaged. Far less attention has been directed toward measuring the cantilever deflection or sensitivity, despite the fact that the primary means of determining this factor relies on the AFM tip being pressed against a hard surface, such as silicon or sapphire; which has the potential to significantly damage the tip. A recent method developed by Tourek et al. in 2010 involves deflecting the AFM cantilever a known distance from the imaging tip by pressing the cantilever against a sharpened tungsten wire. In this work a similar yet more precise method is described, whereby the deflection of the cantilever is achieved using an AFM probe with a spring constant much larger than the test cantilever, essentially a rigid cantilever. The exact position of loading on the test cantilever was determined by reverse AFM imaging small spatial markers that are milled into the test cantilever using a focussed ion beam. For V shaped cantilevers it is possible to reverse image the arm intersection in order to determine the exact loading point without necessarily requiring FIB milled spatial markers, albeit at the potential cost of additional uncertainty. The technique is applied to tip-less, beam shaped and V shaped cantilevers and compared to the hard surface contact technique with very good agreement (on average less than 5% difference). While the agreement with the hard surface contact technique was very good the error on the technique is dependent upon the assumptions inherent in the method, such as cantilever shape, loading point distance and ratio of test to rigid cantilever spring constants. The average error ranged between 2 to 5% for the majority of test cantilevers studied. The sensitivity derived with this technique can then be used to

  6. Research on fiber-optic cantilever-enhanced photoacoustic spectroscopy for trace gas detection

    Science.gov (United States)

    Chen, Ke; Zhou, Xinlei; Gong, Zhenfeng; Yu, Shaochen; Qu, Chao; Guo, Min; Yu, Qingxu

    2018-01-01

    We demonstrate a new scheme of cantilever-enhanced photoacoustic spectroscopy, combining a sensitivity-improved fiber-optic cantilever acoustic sensor with a tunable high-power fiber laser, for trace gas detection. The Fabry-Perot interferometer based cantilever acoustic sensor has advantages such as high sensitivity, small size, easy to install and immune to electromagnetic. Tunable erbium-doped fiber ring laser with an erbium-doped fiber amplifier is used as the light source for acoustic excitation. In order to improve the sensitivity for photoacoustic signal detection, a first-order longitudinal resonant photoacoustic cell with the resonant frequency of 1624 Hz and a large size cantilever with the first resonant frequency of 1687 Hz are designed. The size of the cantilever is 2.1 mm×1 mm, and the thickness is 10 μm. With the wavelength modulation spectrum and second-harmonic detection methods, trace ammonia (NH3) has been measured. The gas detection limits (signal-to-noise ratio = 1) near the wavelength of 1522.5 nm is achieved to be 3 ppb.

  7. A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process

    International Nuclear Information System (INIS)

    Ji Xu; Li Zhihong; Li Juan; Wang Yangyuan; Xi Jianzhong

    2008-01-01

    This paper presents a post-CMOS process to monolithically integrate a piezoresistive cantilever for lateral force detection and signal processing circuitry. The fabrication process includes a standard CMOS process and one more lithography step to micromachine the cantilever structure in the post-CMOS process. The piezoresistors are doped in the CMOS process but defined in the post-CMOS micromachining process without any extra process required. A partially split cantilever configuration is developed for the lateral force detection. The piezoresistors are self-aligned to the split cantilever, and therefore the width of the beam is only limited by lithography. Consequently, this kind of cantilever potentially has a high resolution. The preliminary experimental results show expected performances of the fabricated piezoresistors and electronic circuits

  8. Modified cantilevers to probe unambiguously out-of-plane piezoresponse

    Science.gov (United States)

    Alyabyeva, Natalia; Ouvrard, Aimeric; Lindfors-Vrejoiu, Ionela; Kolomiytsev, Alexey; Solodovnik, Maxim; Ageev, Oleg; McGrouther, Damien

    2018-06-01

    We demonstrate and investigate the coupling of contributions from both in-plane (IP) polarization and out-of-plane (OP) components in BiFeO3 (BFO) thin-film polarization probed by piezoresponse force microscopy (PFM). Such coupling leads to image artifacts which prevent the correct determination of OP polarization vector directions and the corresponding piezoelectric coefficient d33. Using material strength theory with a one-dimensional modeling of the cantilever oscillation amplitude under electrostatic and elastic forces as a function of the tip length, we have evidenced the impact of IP piezoresponse to the OP signal for tip length longer than 4 μm. The IP polarization vector induces a significant longitudinal bending of the cantilever, due to the small spring constant of long tips, which provokes a normal deviation superimposed to the OP piezoresponse. These artifacts can be reduced by increasing the longitudinal spring constant of the cantilever by shortening the tip length. Standard cantilevers with 15-μm-long tips were modified to reach the desired tip length, using focused ion-beam techniques and tested using PFM on the same BFO thin film. Tip length shortening has strongly reduced IP artifacts as expected, while the impact of nonlocal electrostatic forces, becoming predominant for tips shorter than 1 μm, has led to a non-negligible deflection offset. For shorter tips, a strong electric field from a cantilever beam can induce polarization switching as observed for a 0.5-μm-long tip. Tip length ranging from 1 to 4 μm allowed minimizing both artifacts to probe unambiguously OP piezoresponse and quantify the d33 piezoelectric coefficient.

  9. Piezoresistive Cantilever Performance-Part I: Analytical Model for Sensitivity.

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C; Pruitt, Beth L

    2010-02-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.

  10. Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

    Science.gov (United States)

    Park, Sung-Jin; Doll, Joseph C.; Pruitt, Beth L.

    2010-01-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors. PMID:20336183

  11. Highly sensitive polymer-based cantilever-sensors for DNA detection

    International Nuclear Information System (INIS)

    Calleja, M.; Nordstroem, M.; Alvarez, M.; Tamayo, J.; Lechuga, L.M.; Boisen, A.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers

  12. Williamson Fluid Model for the Peristaltic Flow of Chyme in Small Intestine

    Directory of Open Access Journals (Sweden)

    Sohail Nadeem

    2012-01-01

    Full Text Available Mathematical model for the peristaltic flow of chyme in small intestine along with inserted endoscope is considered. Here, chyme is treated as Williamson fluid, and the flow is considered between the annular region formed by two concentric tubes (i.e., outer tube as small intestine and inner tube as endoscope. Flow is induced by two sinusoidal peristaltic waves of different wave lengths, traveling down the intestinal wall with the same speed. The governing equations of Williamson fluid in cylindrical coordinates have been modeled. The resulting nonlinear momentum equations are simplified using long wavelength and low Reynolds number approximations. The resulting problem is solved using regular perturbation method in terms of a variant of Weissenberg number We. The numerical solution of the problem is also computed by using shooting method, and comparison of results of both solutions for velocity field is presented. The expressions for axial velocity, frictional force, pressure rise, stream function, and axial pressure gradient are obtained, and the effects of various emerging parameters on the flow characteristics are illustrated graphically. Furthermore, the streamlines pattern is plotted, and it is observed that trapping occurs, and the size of the trapped bolus varies with varying embedded flow parameters.

  13. Method for driving an actuator, actuator drive, and apparatus comprising an actuator

    OpenAIRE

    2010-01-01

    An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a drive signal source output to a driver circuit output, in order to selectively change the electrical damping of an actuator. For example, the electrical damping of a radial actuator or a focus actuat...

  14. Accurate Calibration and Uncertainty Estimation of the Normal Spring Constant of Various AFM Cantilevers

    Directory of Open Access Journals (Sweden)

    Yunpeng Song

    2015-03-01

    Full Text Available Measurement of force on a micro- or nano-Newton scale is important when exploring the mechanical properties of materials in the biophysics and nanomechanical fields. The atomic force microscope (AFM is widely used in microforce measurement. The cantilever probe works as an AFM force sensor, and the spring constant of the cantilever is of great significance to the accuracy of the measurement results. This paper presents a normal spring constant calibration method with the combined use of an electromagnetic balance and a homemade AFM head. When the cantilever presses the balance, its deflection is detected through an optical lever integrated in the AFM head. Meanwhile, the corresponding bending force is recorded by the balance. Then the spring constant can be simply calculated using Hooke’s law. During the calibration, a feedback loop is applied to control the deflection of the cantilever. Errors that may affect the stability of the cantilever could be compensated rapidly. Five types of commercial cantilevers with different shapes, stiffness, and operating modes were chosen to evaluate the performance of our system. Based on the uncertainty analysis, the expanded relative standard uncertainties of the normal spring constant of most measured cantilevers are believed to be better than 2%.

  15. A new approach to integrate PLZT thin films with micro-cantilevers

    Indian Academy of Sciences (India)

    Home; Journals; Sadhana; Volume 34; Issue 4. A new approach to integrate PLZT thin films with micro-cantilevers ... Different types of cantilever beams incorporating PLZT films have been successfully fabricated using 'lift-off' process and bulk micromachining technology. The proposed process can be advantageously ...

  16. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    DEFF Research Database (Denmark)

    Nordström, M.; Calleja, M.; Hübner, Jörg

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever...

  17. The static actuation of dielectric elastomer actuators: how does pre-stretch improve actuation?

    International Nuclear Information System (INIS)

    Kofod, Guggi

    2008-01-01

    It has previously been shown that providing dielectric elastomer actuators with a level of pre-stretch can improve properties such as breakdown strength, actuation strain and efficiency. The actuation in such actuators depends on an interplay between the highly nonlinear hyperelastic stress-strain behaviour with the electrostatic Maxwell's stress; however, the direct effects of pre-stretch on the electromechanical coupling have still not been investigated in detail. We compare several experimental results found in the literature on the hyperelastic parameters of the Ogden model for the commonly used material VHB 4910, and introduce a more detailed and thus more accurate fit to a previous uniaxial stress-strain experiment. Electrostatic actuation models for a pure shear cuboid dielectric elastomer actuator with pre-stretch are introduced, for both intensive and extensive variables. For both intensive and extensive variables the constant strain (blocked stress or force) as well as the actuation strain is presented. It is shown how in the particular case of isotropic amorphous elastomers the pre-stretch does not affect the electromechanical coupling directly, and that the enhancement in actuation strain due to pre-stretch occurs through the alteration of the geometrical dimensions of the actuator. Also, the presence of the optimum load is explained as being due to the plateau region in the force-stretch curve, and it is shown that pre-stretch is not able to affect its position. Finally, it is shown how the simplified Ogden fit leads to entirely different conclusions for actuation strain in terms of extensive variables as does the detailed fit, emphasizing the importance of employing accurate hyperelastic models for the stress-stretch behaviour of the elastomer.

  18. Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications

    NARCIS (Netherlands)

    Iannuzzi, D.; Deladi, S.; Schreuders, H.; Slaman, M.; Rector, J.H.; Elwenspoek, Michael Curt

    2006-01-01

    Fiber-top cantilevers are new monolithic devices obtained by carving a cantilever out of the edge of a single-mode optical fiber. Here we report evidences of their potential impact as sensing devices for multipurpose applications.

  19. Design and Fabrication of Piezoresistive Based Encapsulated Poly-Si Cantilevers for Bio/chemical Sensing

    Science.gov (United States)

    Krishna, N. P. Vamsi; Murthy, T. R. Srinivasa; Reddy, K. Jayaprakash; Sangeeth, K.; Hegde, G. M.

    Cantilever-based sensing is a growing research field not only within micro regime but also in nano technology. The technology offers a method for rapid, on-line and in-situ monitoring of specific bio/chemical substances by detecting the nanomechanical responses of a cantilever sensor. Cantilever with piezoresistive based detection scheme is more attractive because of its electronics compatibility. Majority of commercially available micromachined piezoresistive sensors are bulk micromachined devices and are fabricated using single crystal silicon wafers. As substrate properties are not important in surface micromachining, the expensive silicon wafers can be replaced by cheaper substrates, such as poly-silicon, glass or plastic. Here we have designed SU-8 based bio/chemical compatible micro electro mechanical device that includes an encapsulated polysilicon piezoresistor for bio/chemical sensing. In this paper we report the design, fabrication and analysis of the encapsulated poly-Si cantilevers. Design and theoretical analysis are carried out using Finite Element Analysis software. For fabrication of poly-silicon piezoresistive cantilevers we followed the surface micromachining process steps. Preliminary characterization of the cantilevers is presented.

  20. Finite-Element Simulation of Cantilever Vibrations in Atomic Force Acoustic Microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Beltran, F J Espinoza [Centro de Investigacion y Estudios Avanzados del IPN. Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico); Scholz, T [Hamburg University of Technology, Institute of Advanced Ceramics, Denickestrasse 15, D-21073 Hamburg (Germany); Schneider, G A [Hamburg University of Technology, Institute of Advanced Ceramics, Denickestrasse 15, D-21073 Hamburg (Germany); Munoz-Saldana, J [Centro de Investigacion y Estudios Avanzados del IPN. Unidad Queretaro, Apdo. Postal 1-798, 76001 Queretaro, Qro. (Mexico); Rabe, U [Fraunhofer Institute for Non-Destructive Testing (IZFP), Bldg. E3.1, University, D-66123 Saarbruecken (Germany); Arnold, W [Fraunhofer Institute for Non-Destructive Testing (IZFP), Bldg. E3.1, University, D-66123 Saarbruecken (Germany)

    2007-03-15

    Atomic Force Acoustic Microscopy has been proven to be a powerful technique for materials characterization with nanoscale lateral resolution. This technique allows one to obtain images of elastic properties of materials. By means of spectroscopic measurements of the tip-sample contact-resonance frequencies, it is possible to obtain quantitative values of the mechanical stiffness of the sample surface. For quantitative analysis a reliable relation between the spectroscopic data and the contact stiffness is required based on a correct geometrical model of the cantilever vibrations. This model must be precise enough for predicting the resonance frequencies of the tip-sample interaction when excited over a wide range of frequencies. Analytical models have served as a good reference for understanding the vibrational behavior of the AFM cantilever. They have certain limits, however, for reproducing the tip-sample contact-resonances due to the cantilever geometries used. For obtaining the local elastic modulus of samples, it is necessary to know the tip-sample contact area which is usually obtained by a calibration procedure with a reference sample. In this work we show that finiteelement modeling may be used to replace the analytical inversion procedure for AFAM data. First, the three first bending modes of cantilever resonances were used for finding the geometrical dimension of the cantilever employed. Then the normal and in-plane stiffness of the sample were obtained for each measurement on the surface to be measured. A calibration was needed to obtain the tip position of the cantilever by making measurements on a sample with known surface elasticity, here crystalline silicon. The method developed in this work was applied to AFAM measurements on silicon, zerodur, and strontium titanate.

  1. Highly sensitive polymer-based cantilever-sensors for DNA detection

    Energy Technology Data Exchange (ETDEWEB)

    Calleja, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain) and Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)]. E-mail: mcalleja@imm.cnm.csic.es; Nordstroem, M. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark); Alvarez, M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Tamayo, J. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Lechuga, L.M. [Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid (Spain); Boisen, A. [Mikroelektronics Centret, Technical University of Denmark, 345E, DK-2800, Lyngby (Denmark)

    2005-11-15

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.

  2. A DVD-ROM based high-throughput cantilever sensing platform

    DEFF Research Database (Denmark)

    Bosco, Filippo

    and October 2011. The project was part of the Xsense research network, funded by the Strategic Danish Research Council, and supervised by Prof. Anja Boisen. The goal of the Xsense project is to design and fabricate a compact and cheap device for explosive sensing in air and liquid. Four different technologies...... of a high-throughput label-free sensor platform utilizing cantilever based sensors. These sensors have often been acclaimed to facilitate highly parallelized operation. Unfortunately, so far no concept has been presented which offers large data sets as well as easy liquid sample handling. We use optics...... and mechanics from a DVD player to handle liquid samples and to read-out cantilever deflection and resonant frequency. In a few minutes, several liquid samples can be analyzed in parallel, measuring over several hundreds of individual cantilevers. Three generations of systems have been developed and tested...

  3. Analytical solutions of the electrostatically actuated curled beam problem

    KAUST Repository

    Younis, Mohammad I.

    2014-07-24

    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximation. In such cases, multi-mode reduced order models are shown to yield accurate results. © 2014 Springer-Verlag Berlin Heidelberg.

  4. Modeling and control of sound radiation by simply supported and cantilever beam coupled with smart material

    Directory of Open Access Journals (Sweden)

    Vitaly Makarenko

    2007-03-01

    Full Text Available  In this paper forced vibration of the beam due to bonded piezoelectric patch is considered. When an external excitation is applied to the beam, it starts to vibrate, and the resulting acoustic response is predicted from the analytical model, which is based on Bernoulli-Euler theory of beam vibration. Analytical research of the sound radiation by a finite elastic beam is done for criteria based on minimal total sound power level. Helmholtz equation and inhomogeneous differential equation for beam transverse motion defines the solution to this problem. Such solutions were found for boundary conditions of simply supported and cantilever beams. In order to solve the task two analytical methods were used for simply supported beam. The solutions received by Fourier transform and Green functions approach give the very similar results, thus, proving methods reliability. At the case studies the exerted voltage, phase, location and piezoelectric actuator length are varied in order to establish their influence on noise attenuation.

  5. Magnetic Field and Gravity Effects on Peristaltic Transport of a Jeffrey Fluid in an Asymmetric Channel

    Directory of Open Access Journals (Sweden)

    A. M. Abd-Alla

    2014-01-01

    Full Text Available In this paper, the peristaltic flow of a Jeffrey fluid in an asymmetric channel has been investigated. Mathematical modeling is carried out by utilizing long wavelength and low Reynolds number assumptions. Closed form expressions for the pressure gradient, pressure rise, stream function, axial velocity, and shear stress on the channel walls have been computed numerically. Effects of the Hartmann number, the ratio of relaxation to retardation times, time-mean flow, the phase angle and the gravity field on the pressure gradient, pressure rise, streamline, axial velocity, and shear stress are discussed in detail and shown graphically. The results indicate that the effect of Hartmann number, ratio of relaxation to retardation times, time-mean flow, phase angle, and gravity field are very pronounced in the peristaltic transport phenomena. Comparison was made with the results obtained in the presence and absence of magnetic field and gravity field.

  6. Multifrequency Piezoelectric Energy Harvester Based on Polygon-Shaped Cantilever Array

    Directory of Open Access Journals (Sweden)

    Dalius Mažeika

    2018-01-01

    Full Text Available This paper focuses on numerical and experimental investigations of a novel design piezoelectric energy harvester. Investigated harvester is based on polygon-shaped cantilever array and employs multifrequency operating principle. It consists of eight cantilevers with irregular design of cross-sectional area. Cantilevers are connected to each other by specific angle to form polygon-shaped structure. Moreover, seven seismic masses with additional lever arms are added in order to create additional rotation moment. Numerical investigation showed that piezoelectric polygon-shaped energy harvester has five natural frequencies in the frequency range from 10 Hz to 240 Hz, where the first and the second bending modes of the cantilevers are dominating. Maximum output voltage density and energy density equal to 50.03 mV/mm3 and 604 μJ/mm3, respectively, were obtained during numerical simulation. Prototype of piezoelectric harvester was made and experimental investigation was performed. Experimental measurements of the electrical characteristics showed that maximum output voltage density, energy density, and output power are 37.5 mV/mm3, 815.16 μJ/mm3, and 65.24 μW, respectively.

  7. A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

    International Nuclear Information System (INIS)

    Nordström, Maria; Hübner, Jörg; Boisen, Anja; Calleja, Montserrat

    2008-01-01

    We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps

  8. Experimental investigations of the large deflection capabilities of a compliant parallel mechanism actuated by shape memory alloy wires

    International Nuclear Information System (INIS)

    Sreekumar, M; Nagarajan, T; Singaperumal, M

    2008-01-01

    This experimental study investigates the coupled effect of the force developed by the shape memory alloy (SMA) actuators and the force required for the large deflection of an elastica member in a compliant parallel mechanism. The compliant mechanism developed in house consists of a moving platform mounted on a superelastic pillar and three SMA wire actuators to manipulate the platform. A three-axis MEMS accelerometer has been mounted on the moving platform to measure its tilt angle. Three miniature force sensors have been designed and fabricated out of cantilever beams, each mounted with a pair of strain gauges, to measure the force developed by the respective actuators. The force sensors are highly sensitive and cost effective compared to commercially available miniature force sensors. Calibration of the force sensors has been accomplished with known weights, and for the three-axis MEMS accelerometer a rotary base has been considered which is usually used in optical applications. The calibration curves obtained, with R-squared values between 0.9997 and 1.0, show that both the tilt and force sensors considered are most appropriate for the respective applications. The mechanism fixed with the sensors and the drivers for the SMA actuators is integrated with a National Instrument's data acquisition system. The experimental results have been compared with the analytical results and it was found that the relative error is less than 2%. This is a preliminary study in the development of a mechanism for eye prosthesis and similar applications

  9. Vibration attenuation and shape control of surface mounted, embedded smart beam

    Directory of Open Access Journals (Sweden)

    Vivek Rathi

    Full Text Available Active Vibration Control (AVC using smart structure is used to reduce the vibration of a system by automatic modification of the system structural response. AVC is widely used, because of its wide and broad frequency response range, low additional mass, high adaptability and good efficiency. A lot of research has been done on Finite Element (FE models for AVC based on Euler Bernoulli Beam Theory (EBT. In the present work Timoshenko Beam Theory (TBT is used to model a smart cantilever beam with surface mounted sensors / actuators. A Periodic Output Feedback (POF Controller has been designed and applied to control the first three modes of vibration of a flexible smart cantilever beam. The difficulties encountered in the usage of surface mounted piezoelectric patches in practical situations can be overcome by the use of embedded shear sensors / actuators. A mathematical model of a smart cantilever beam with embedded shear sensors and actuators is developed. A POF Controller has been designed and applied to control of vibration of a flexible smart cantilever beam and effect of actuator location on the performance of the controller is investigated. The mathematical modeling and control of a Multiple Input multiple Output (MIMO systems with two sensors and two actuators have also been considered.

  10. Peristaltic modes of a single vortex in the Abelian Higgs model

    International Nuclear Information System (INIS)

    Kojo, Toru; Suganuma, Hideo; Tsumura, Kyosuke

    2007-01-01

    Using the Abelian Higgs model, we study the radial excitations of single vortex and their propagation modes along the vortex line. We call such beyond-stringy modes peristaltic modes of single vortex. With the profile of the static vortex, we derive the vortex-induced potential, i.e., single-particle potential for the Higgs and the photon field fluctuations around the static vortex, and investigate the coherently propagating fluctuations which correspond to the vibration of the vortex. We derive, analyze, and numerically solve the field equations of the Higgs and the photon field fluctuations around the static vortex with various Ginzburg-Landau parameter κ and topological charge n. Around the Bogomol'nyi-Prasad-Sommerfield value or critical coupling κ 2 =1/2, there appears a significant correlation between the Higgs and the photon field fluctuations mediated by the static vortex. As a result, for κ 2 =1/2, we find the characteristic new-type discrete pole of the peristaltic mode corresponding to the quasibound state of coherently fluctuating fields and the static vortex. We investigate its excitation energy, correlation energy of coherent fluctuations, spatial distributions, and the resulting magnetic flux behavior in detail. Our investigation covers not only usual type-II vortices with n=1 but also type-I and type-II vortices with n set-membership sign Z for the application to various general systems where the vortexlike objects behave as the essential degrees of freedom

  11. Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

    Energy Technology Data Exchange (ETDEWEB)

    Siwak, N. P. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States); Fan, X. Z.; Ghodssi, R. [Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742 (United States); Kanakaraju, S.; Richardson, C. J. K. [Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740 (United States)

    2014-10-06

    An integrated photodiode displacement readout scheme for a microelectromechanical cantilever waveguide resonator sensing platform is presented. III-V semiconductors are used to enable the monolithic integration of passive waveguides with active optical components. This work builds upon previously demonstrated results by measuring the displacement of cantilever waveguide resonators with on-chip waveguide PIN photodiodes. The on-chip integration of the readout provides an additional 70% improvement in mass sensitivity compared to off-chip photodetector designs due to measurement stability and minimized coupling loss. In addition to increased measurement stability, reduced packaging complexity is achieved due to the simplicity of the readout design. We have fabricated cantilever waveguides with integrated photodetectors and experimentally characterized these cantilever sensors with monolithically integrated PIN photodiodes.

  12. Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

    Science.gov (United States)

    2015-11-01

    necessary anneal . Following this, a thin film of NiTi was blanket sputtered at 600 °C. This NiTi blanket layer was then wet -etch patterned using a...varying the sputter parameters during NiTi deposition, such as thickness, substrate temperature during deposition and anneal , and argon pressure during...6 Fig. 4 Surface texture comparison between NiTi sputtered at RT, then annealed at 600 °C, and NiTi

  13. Cantilever contribution to the total electrostatic force measured with the atomic force microscope

    International Nuclear Information System (INIS)

    Guriyanova, Svetlana; Golovko, Dmytro S; Bonaccurso, Elmar

    2010-01-01

    The atomic force microscope (AFM) is a powerful tool for surface imaging at the nanometer scale and surface force measurements in the piconewton range. Among long-range surface forces, the electrostatic forces play a predominant role. They originate if the electric potentials of the substrate and of the tip of the AFM cantilever are different. A quantitative interpretation of the AFM signal is often difficult because it depends in a complicated fashion on the cantilever–tip–surface geometry. Since the electrostatic interaction is a long-range interaction, the cantilever, which is many microns from the surface, contributes to the total electrostatic force along with the tip. Here we present results of the electrostatic interaction between a conducting flat surface and horizontal or tilted cantilevers, with and without tips, at various distances from the surface. As addressed in a previous work, we show that the contribution of the cantilever to the overall force cannot be neglected. Based on a predictive model and on 3D confocal measurements, we discuss the influence of the tilting angle of the cantilever

  14. Electromechanical actuation of buckypaper actuator: Material properties and performance relationships

    International Nuclear Information System (INIS)

    Cottinet, P.-J.; Souders, C.; Tsai, S.-Y.; Liang, R.; Wang, B.; Zhang, C.

    2012-01-01

    Carbon nanotubes can be assembled into macroscopic thin film materials called buckypapers. To incorporate buckypaper actuators into engineering systems, it is of high importance to understand their material property-actuation performance relationships in order to model and predict the behavior of these actuators. The electromechanical actuation of macroscopic buckypaper structures and their actuators, including single and multi-walled carbon nanotube buckypapers and aligned single-walled nanotube buckypapers, were analyzed and compared. From the experimental evidence, this Letter discusses the effects of the fundamental material properties, including Young modulus and electrical double layer properties, on actuation performance of the resultant actuators. -- Highlights: ► In this study we identified the figure of merit of the electromechanical conversion. ► Different type of buckypaper was realized and characterized for actuation properties. ► The results demonstrated the potential of Buckypapers/Nafion for actuation

  15. Molecular Weiss domain polarization in piezoceramics to diaphragm, cantilever and channel construction in low-temperature-cofired ceramics for micro-fluidic applications

    International Nuclear Information System (INIS)

    Khanna, P.K.; Ahmad, S.; Grimme, R.

    2005-01-01

    This paper presents the efforts made to study the process of comminution to Weiss domain polarization and phase transition in piezoceramics together with the versatility of low-temperature-cofired ceramics-based devices and components for their ready adoption for typical applications in the area of micro-fluidics. A conceptual micro-fluidic module has been presented and few unit entities necessary for its realization have been described. The purpose of these entities is to position the sensors and actuators by using piezoelectric materials. Investigations are performed to make useful constructions like diaphragms and cantilevers for laying the sensing elements, cavities for burying the electronic chip devices, and channels for fluid transportation. In order to realize these constructions, the basic step involves machining of circular, straight line, rectangular and square-shaped structure in the green ceramic tapes followed by lamination and firing with post-machining in some cases. The diaphragm and cavity includes one or more un-machined layer stacked together with several machined layers with rectangular or square slits. The cantilever is an extension of the diaphragm creation process with inclusion of a post-machining step. The channel essentially consists of a machined green ceramic layer sandwiched between an un-machined and a partially machined layer. The fabrication for all the above constructions has been exemplified and the details have been discussed

  16. Peristaltic pumps for waste disposal

    International Nuclear Information System (INIS)

    Griffith, G.W.

    1992-09-01

    Laboratory robots are capable of generating large volumes of hazardous liquid wastes when they are used to perform chemical analyses of metal finishing solutions. A robot at Allied-Signal Inc., Kansas City Division, generates 30 gallons of acid waste each month. This waste contains mineral acids, heavy metals, metal fluorides, and other materials. The waste must be contained in special drums that are closed to the atmosphere. The initial disposal method was to have the robot pour the waste into a collecting funnel, which contained a liquid-sensing valve to admit the waste into the drum. Spills were inevitable, splashing occurred, and the special valve often didn't work well. The device also occupied a large amount of premium bench space. Peristaltic pumps are made to handle hazardous liquids quickly and efficiently. A variable-speed pump, equipped with a quick-loading pump head, was mounted below the robot bench near the waste barrel. The pump inlet tube was mounted above the bench within easy reach of the robot, while the outlet tube was connected directly to the barrel. During operation, the robot brings the waste liquid up to the pump inlet tube and activates the pump. When the waste has been removed, the pump stops. The procedure is quick, simple, inexpensive, safe, and reliable

  17. Vibrational fatigue failures in short cantilevered piping with socket-welding fittings

    International Nuclear Information System (INIS)

    Smith, J.K.

    1996-01-01

    Approximately 80% of the vibrational fatigue failures in nuclear power plants have been caused by high cycle vibrational fatigue. Many of these failures have occurred in short, small bore (2 in. nominal diameter and smaller), unbraced, cantilevered piping with socket-welding fittings. The fatigue failures initiated in the socket welds. These failures have been unexpected, and have caused costly, unscheduled outages in some cases. In order to reduce the number of vibrational fatigue failures in these short cantilevered pipes, an acceleration based vibrational fatigue screening criteria was developed under Electric Power Research Institute (EPRI) sponsorship. In this paper, the acceleration based criteria will be compared to the results obtained from detailed dynamic modeling of a short, cantilevered pipe

  18. A new detection system for extremely small vertically mounted cantilevers

    International Nuclear Information System (INIS)

    Antognozzi, M; Ulcinas, A; Picco, L; Simpson, S H; Miles, M J; Heard, P J; Szczelkun, M D; Brenner, B

    2008-01-01

    Detection techniques currently used in scanning force microscopy impose limitations on the geometrical dimensions of the probes and, as a consequence, on their force sensitivity and temporal response. A new technique, based on scattered evanescent electromagnetic waves (SEW), is presented here that can detect the displacement of the extreme end of a vertically mounted cantilever. The resolution of this method is tested using different cantilever sizes and a theoretical model is developed to maximize the detection sensitivity. The applications presented here clearly show that the SEW detection system enables the use of force sensors with sub-micron size, opening new possibilities in the investigation of biomolecular systems and high speed imaging. Two types of cantilevers were successfully tested: a high force sensitivity lever with a spring constant of 0.17 pN nm -1 and a resonant frequency of 32 kHz; and a high speed lever with a spring constant of 50 pN nm -1 and a resonant frequency of 1.8 MHz. Both these force sensors were fabricated by modifying commercial microcantilevers in a focused ion beam system. It is important to emphasize that these modified cantilevers could not be detected by the conventional optical detection system used in commercial atomic force microscopes

  19. Actuator with Multi Degrees of Freedom(Actuator)

    OpenAIRE

    矢野, 智昭; Tomoaki, YANO; 産業技術総合研究所

    2006-01-01

    The advantages, problems and the recent developments of the actuator with multi degrees of freedom are presented. At first, the advantages of the actuator with multi degrees of freedom are described. Next, the problems needed to solve for practical use are presented. The recent applications of the actuator with multi degrees of freedom are also reviewed.

  20. Laser micromachining of sputtered DLC films

    International Nuclear Information System (INIS)

    Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Ong, S.E.; Zhang, S.; Milne, W.I.

    2006-01-01

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp 2 /sp 3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF 6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  1. Optimization of transversal phacoemulsification settings in peristaltic mode using a new transversal ultrasound machine.

    Science.gov (United States)

    Wright, Dannen D; Wright, Alex J; Boulter, Tyler D; Bernhisel, Ashlie A; Stagg, Brian C; Zaugg, Brian; Pettey, Jeff H; Ha, Larry; Ta, Brian T; Olson, Randall J

    2017-09-01

    To determine the optimum bottle height, vacuum, aspiration rate, and power settings in the peristaltic mode of the Whitestar Signature Pro machine with Ellips FX tip action (transversal). John A. Moran Eye Center Laboratories, University of Utah, Salt Lake City, Utah, USA. Experimental study. Porcine lens nuclei were hardened with formalin and cut into 2.0 mm cubes. Lens cubes were emulsified using transversal and fragment removal time (efficiency), and fragment bounces off the tip (chatter) were measured to determine optimum aspiration rate, bottle height, vacuum, and power settings in the peristaltic mode. Efficiency increased in a linear fashion with increasing bottle height and vacuum. The most efficient aspiration rate was 50 mL/min, with 60 mL/min statistically similar. Increasing power increased efficiency up to 90% with increased chatter at 100%. The most efficient values for the settings tested were bottle height at 100 cm, vacuum at 600 mm Hg, aspiration rate of 50 or 60 mL/min, and power at 90%. Copyright © 2017 ASCRS and ESCRS. Published by Elsevier Inc. All rights reserved.

  2. Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

    International Nuclear Information System (INIS)

    Ghatnekar-Nilsson, S; Graham, J; Hull, R; Montelius, L

    2006-01-01

    We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Δf/f 0 for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection

  3. Highly Sensitive Polymer-based Cantilever-sensors for DNA Detection

    DEFF Research Database (Denmark)

    Gomez, Montserrat; Nordström, Maria; Alvarez, M.

    2005-01-01

    We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel...... polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized...

  4. Squeeze-film damping characteristics of cantilever microresonators ...

    African Journals Online (AJOL)

    user

    perturbation approach does not apply to cantilever plates because of ...... Direct coupling of electrostatic and structural domain has been achieved using ... forces are computed to obtain the modal squeeze stiffness and damping parameters.

  5. 〈c + a〉 Dislocations in deformed Ti–6Al–4V micro-cantilevers

    International Nuclear Information System (INIS)

    Ding, Rengen; Gong, Jicheng; Wilkinson, Angus J.; Jones, Ian P.

    2014-01-01

    Single α–β colony micro-cantilevers with an equilateral triangular cross-section and an apex at the bottom were machined from a polycrystalline commercial Ti–6Al–4V sample using a focused ion beam (FIB). Each cantilever contained several α lamellae separated by thin fillets of β. A nano-indenter was used to perform micro-bending tests (Ding et al., 2012) [1]. 〈c + a〉 Slip systems were selectively activated in the cantilevers by controlling the crystal direction along the micro-cantilever to be [0 0 0 1]. Specimens for transmission electron microscopy were prepared from the deformed micro-cantilevers using a dual-beam FIB. Bright field scanning transmission electron microscopy was used to investigate the processes of slip nucleation, propagation and transmission through the α/β interface. Dislocations initiate first near the bottom of the cantilever and subsequently from the top. Both sets of dislocations move inward toward the neutral axis. Planar pyramidal {101 ¯ 1} slip was observed at the top (tension) but cross-slip was observed at the bottom (compression). All the 〈c + a〉 slip systems are equally stressed, but only a limited number is activated. This is tentatively interpreted in terms of dislocation transmission through the β fillets

  6. Could the peristaltic transition zone be caused by non-uniform esophageal muscle fiber architecture? A simulation study.

    Science.gov (United States)

    Kou, W; Pandolfino, J E; Kahrilas, P J; Patankar, N A

    2017-06-01

    Based on a fully coupled computational model of esophageal transport, we analyzed how varied esophageal muscle fiber architecture and/or dual contraction waves (CWs) affect bolus transport. Specifically, we studied the luminal pressure profile in those cases to better understand possible origins of the peristaltic transition zone. Two groups of studies were conducted using a computational model. The first studied esophageal transport with circumferential-longitudinal fiber architecture, helical fiber architecture and various combinations of the two. In the second group, cases with dual CWs and varied muscle fiber architecture were simulated. Overall transport characteristics were examined and the space-time profiles of luminal pressure were plotted and compared. Helical muscle fiber architecture featured reduced circumferential wall stress, greater esophageal distensibility, and greater axial shortening. Non-uniform fiber architecture featured a peristaltic pressure trough between two high-pressure segments. The distal pressure segment showed greater amplitude than the proximal segment, consistent with experimental data. Dual CWs also featured a pressure trough between two high-pressure segments. However, the minimum pressure in the region of overlap was much lower, and the amplitudes of the two high-pressure segments were similar. The efficacy of esophageal transport is greatly affected by muscle fiber architecture. The peristaltic transition zone may be attributable to non-uniform architecture of muscle fibers along the length of the esophagus and/or dual CWs. The difference in amplitude between the proximal and distal pressure segments may be attributable to non-uniform muscle fiber architecture. © 2017 John Wiley & Sons Ltd.

  7. Integrated MOSFET-Embedded-Cantilever-Based Biosensor Characteristic for Detection of Anthrax Simulant

    Energy Technology Data Exchange (ETDEWEB)

    Mostafa, Salwa [University of Tennessee, Knoxville (UTK); Lee, Ida [ORNL; Islam, Syed K [University of Tennessee, Knoxville (UTK); Eliza, Sazia A. [University of Tennessee, Knoxville (UTK); Shekhawat, Gajendra [Northwestern University, Evanston; Dravid, Vinayak [Northwestern University, Evanston; Tulip, Fahmida S [ORNL

    2011-01-01

    In this work, MOSFET-embedded cantilevers are configured as microbial sensors for detection of anthrax simulants, Bacillus thuringiensis. Anthrax simulants attached to the chemically treated gold-coated cantilever cause changes in the MOSFET drain current due to the bending of the cantilever which indicates the detection of anthrax simulant. Electrical properties of the anthrax simulant are also responsible for the change in the drain current. The test results suggest a detection range of 10 L of stimulant test solution (a suspension population of 1.3 107 colony-forming units/mL diluted in 40% ethanol and 60% deionized water) with a linear response of 31 A/ L.

  8. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    DEFF Research Database (Denmark)

    Larsson, David; Greve, Anders; Hvam, Jørn Märcher

    2009-01-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power...... and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was 60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed....

  9. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2008-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  10. Optical device comprising a cantilever and method of fabrication and use thereof

    NARCIS (Netherlands)

    Iannuzzi, Davide; Deladi, S.; Elwenspoek, Michael Curt

    2011-01-01

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber.

  11. Calibration of optical cantilever deflection readers

    International Nuclear Information System (INIS)

    Hu Zhiyu; Seeley, Tim; Kossek, Sebastian; Thundat, Thomas

    2004-01-01

    Because of its ultrahigh sensitivity, the optical lever detection method similar to that used in the atomic force microscope (AFM) has been widely employed as a standard technique for measuring microcantilever deflection. Along with the increasing interest in using the microcantilever as a sensing platform, there is also a requirement for a reliable calibration technique. Many researchers have used the concept of optical lever detection to construct microcantilever deflection readout instruments for chemical, physical, and biological detection. However, without an AFM piezo z scanner, it is very difficult to precisely calibrate these instruments. Here, we present a step-by-step method to conveniently calibrate an instrument using commercially available piezoresistive cantilevers. The experimental results closely match the theoretical calculation. Following this procedure, one can easily calibrate any optical cantilever deflection detection system with high reproducibility, precision, and reliability. A detailed discussion of the optical lever readout system design has been addressed in this article

  12. Optimization of Q-factor of AFM cantilevers using genetic algorithms

    Energy Technology Data Exchange (ETDEWEB)

    Perez-Cruz, Angel, E-mail: elapc27@gmail.com [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico); Dominguez-Gonzalez, Aurelio [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico); Stiharu, Ion [Department of Mechanical and Industrial Engineering, Concordia University, Montreal (Canada); Osornio-Rios, Roque A. [Faculty of Engineering, Universidad Autonoma de Queretaro, Queretaro (Mexico)

    2012-04-15

    Micro cantilever beams have been intensively used in sensing applications including to scanning profiles and surfaces where there resolution and imaging speed are critical. Force resolution is related to the Q-factor. When the micro-cantilever operates in air with small separation gaps, the Q-factor is even more reduced due to the squeeze-film damping effect. Thus, the optimization of the configuration of an AFM micro-cantilever is presented in this work with the objective of improving its Q-factor. To accomplish this task, we propose the inclusion of holes as breathing chimneys in the initial design to reduce the squeeze-film damping effect. The evaluation of the Q-factor was carried out using finite element model, which is implemented to work together with the squeeze-film damping model. The methodology applied in the optimization process was genetic algorithms, which considers as constraints the maximum allowable stress, fundamental frequency and spring constant with respect to the initial design. The results show that the optimum design, which includes holes with an optimal location, increases the Q-factor almost five times compared to the initial design. -- Highlights: Black-Right-Pointing-Pointer It was optimized the Q-factor of a cantilever, which operates near to the surface in air. Black-Right-Pointing-Pointer It was proposed the inclusion of holes as breathing chimneys in the cantilever's surface. Black-Right-Pointing-Pointer Genetic algorithms and finite element analysis were applied to find the optimum configuration for the Q-factor. Black-Right-Pointing-Pointer Optimum design keeps first frequency and the spring constant very close to the original and has a better force resolution. Black-Right-Pointing-Pointer Final design can be easily manufactured through a mask.

  13. Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing

    Directory of Open Access Journals (Sweden)

    Bernhard Jakoby

    2008-10-01

    Full Text Available Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers. Miniaturized cantilever-based devices are interesting alternatives for such applications, but here the interaction between the liquid and the oscillating beam is more involved. In our contribution, we describe a measurement setup, which allows the investigation of this interaction for different beam cross-sections. We present an analytical model based on an approximation of the immersed cantilever as an oscillating sphere comprising the effective mass and the intrinsic damping of the cantilever and additional mass and damping due to the liquid loading. The model parameters are obtained from measurements with well-known sample liquids by a curve fitting procedure. Finally, we present the measurement of viscosity and density of an unknown sample liquid, demonstrating the feasibility of the model.

  14. Scanning probe microscopy with vertically oriented cantilevers made easy

    International Nuclear Information System (INIS)

    Valdrè, G; Moro, D; Ulian, G

    2012-01-01

    Non-contact imaging in scanning probe microscopy (SPM) is becoming of great importance in particular for imaging biological matter and in general soft materials. Transverse dynamic force microscopy (TDFM) is an SPM-based methodology that exploiting a cantilever oriented in a vertical configuration with respect to the sample surface may work with very low tip to sample interaction forces. The probe is oscillated parallel to the sample surface, usually by a piezoelectric element. However, this methodology often requires complex microscope setups and detection systems, so it is usually developed in specific laboratories as a prototype microscope. Here, we present a very simple device that easily enables a commercial SPM head to be oriented in such a way to have the cantilever long axis perpendicular to the sample surface. No modifications of the SPM hardware and software are required and commercial available cantilevers can be used as probes. Performance tests using polystyrene spheres, muscovite crystallographic steps and DNA single molecules were successful and all resulted in agreement with other TDFM and SPM observations demonstrating the reliability of the device. (paper)

  15. GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs

    International Nuclear Information System (INIS)

    Gregušová, Dagmar; Kúdela, Róbert; Eliáš, Peter; Šoltýs, Ján; Cambel, Vladimír; Kostič, Ivan

    2010-01-01

    We report on the design, fabrication and initial mechanical testing of cantilevers with tips based on a GaAs/In 0.485 Ga 0.515 P/AlAs heterostructure grown by metal organic chemical vapor deposition. They were produced using a dedicated technological process based on (1) the formation of integrated tips through an AlAs-assisted surface sacrificial wet-etching process and (2) the GaAs cantilever release fully protected between two InGaP etch-stop layers. 2 µm thick InGaP/GaAs/InGaP cantilevers had integrated pyramidal tips with the sides at ∼45° to (1 0 0). Metallic elements were processed close to the tip apexes using non-standard optical lithography. The cantilever release was accomplished using photolithography, Ar ion milling of InGaP and wet chemical etching of GaAs via resist layers deposited by a draping technique. A tip–cantilever prototype with length, width and thickness of 150, 35 and 2 µm, respectively, exhibited a resonance frequency of 66.2 kHz, which correlated well with a theoretical value of 57 kHz for a GaAs cantilever of identical dimensions. (technical note)

  16. An AlN cantilever for a wake-up switch triggered by air pressure change

    International Nuclear Information System (INIS)

    Kaiho, Y; Itoh, T; Maeda, R; Takahashi, H; Matsumoto, K; Shimoyama, I; Tomimatsu, Y; Kobayashi, T

    2013-01-01

    This research reports an AlN cantilever with an air chamber for a wake-up switch triggered by air pressure change. The proposed sensor is designed to fulfil both high sensitivity and low power consumption. By combining an air chamber to the one side of the AlN cantilever surface, the barometric pressure change generates a piezoelectric voltage. Thus, a wake-up switch triggered by air pressure change can be achieved using an AlN cantilever. The size of the fabricated AlN cantilever was 2000 μm × 1000 μm × 2 μm. The sensitivity to static differential pressure was 11.5 mV/Pa at the range of −20 Pa to 20 Pa. We evaluated the response of the sensor, which was composed of the AlN cantilever and the chamber of 60 ml in volume, when air pressure change was applied. The output voltage increased with increasing the applied air pressure change. It was observed that the maximum output voltage of 50 mV was generated when the air pressure change was 13 Pa

  17. Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters

    DEFF Research Database (Denmark)

    Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

    2012-01-01

    We describe the fabrication and characterization of a significantly improved version of a microelectromechanical system-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass; the harvester is fabricated in a fully monolithic process. The main advantage...... yield of 98%. The robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering. The high pressure treatment improved the PZT thick film performance and increased the harvester power output to 37.1 μW at 1 g root mean square acceleration. We also...... characterize the harvester performance when only one of the PZT layers is used while the other is left open or short circuit....

  18. Cantilever-based bio-chemical sensor integrated in a microliquid handling system

    DEFF Research Database (Denmark)

    Thaysen, Jacob; Marie, Rodolphe; Boisen, Anja

    2001-01-01

    The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication...... based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been...... monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system....

  19. MHD peristaltic transport of spherical and cylindrical magneto-nanoparticles suspended in water

    Directory of Open Access Journals (Sweden)

    F. M. Abbasi

    2015-07-01

    Full Text Available Advancements in the biomedical engineering have enhanced the usage of magnto-nanoparticles in improving the precision and efficiency of the magneto-drug delivery systems. Such systems make use of the externally applied magnetic fields to direct the drug towards a specific target in the human body. Peristalsis of magneto-nanofluids is of significant importance in such considerations. Hence peristaltic transport of Fe3O4-water nanofluid through a two-dimensional symmetric channel is analyzed in the presence of an externally applied constant magnetic field. Hamilton-Crosser’s model of the thermal conductivity is utilized in the problem development. The nanofluid saturates a non-uniform porous medium in which the porosity of the porous medium varies with the distance from the channel walls. Analysis is performed for the spherical and the cylindrical nanoparticles. Resulting system of equations is numerically solved. Impacts of sundry parameters on the axial velocity, temperature, pressure gradient and heat transfer rate at the boundary are examined. Comparison between the results for spherical and cylindrical nanoparticles is also presented. Results show that the nanoparticles volume fraction and the Hartman number have increasing effect on the pressure gradient throughout the peristaltic tract. Effective heat transfer rate at the boundary tends to enhance with an increase in the nanoparticles volume fraction. Use of spherical nanoparticles results in a higher value of axial velocity and the temperature at the center of channel when compared with the case of cylindrical nanoparticles.

  20. Investigation of polymer derived ceramics cantilevers for application of high speed atomic force microscopy

    Science.gov (United States)

    Wu, Chia-Yun

    High speed Atomic Force Microscopy (AFM) has a wide variety of applications ranging from nanomanufacturing to biophysics. In order to have higher scanning speed of certain AFM modes, high resonant frequency cantilevers are needed; therefore, the goal of this research is to investigate using polymer derived ceramics for possible applications in making high resonant frequency AFM cantilevers using complex cross sections. The polymer derived ceramic that will be studied, is silicon carbide. Polymer derived ceramics offer a potentially more economic fabrication approach for MEMS due to their relatively low processing temperatures and ease of complex shape design. Photolithography was used to make the desired cantilever shapes with micron scale size followed by a wet etching process to release the cantilevers from the substrates. The whole manufacturing process we use borrow well-developed techniques from the semiconducting industry, and as such this project also could offer the opportunity to reduce the fabrication cost of AFM cantilevers and MEMS in general. The characteristics of silicon carbide made from the precursor polymer, SMP-10 (Starfire Systems), were studied. In order to produce high qualities of silicon carbide cantilevers, where the major concern is defects, proper process parameters needed to be determined. Films of polymer derived ceramics often have defects due to shrinkage during the conversion process. Thus control of defects was a central issue in this study. A second, related concern was preventing oxidation; the polymer derived ceramics we chose is easily oxidized during processing. Establishing an environment without oxygen in the whole process was a significant challenge in the project. The optimization of the parameters for using photolithography and wet etching process was the final and central goal of the project; well established techniques used in microfabrication were modified for use in making the cantilever in the project. The techniques

  1. The endocannabinoid anandamide regulates the peristaltic reflex by reducing neuro-neuronal and neuro-muscular neurotransmission in ascending myenteric reflex pathways in rats.

    Science.gov (United States)

    Sibaev, Andrei; Yuece, Birol; Allescher, Hans Dieter; Saur, Dieter; Storr, Martin; Kurjak, Manfred

    2014-04-01

    Endocannabinoids (EC) and the cannabinoid-1 (CB1) receptor are involved in the regulation of motility in the gastrointestinal (GI) tract. However, the underlying physiological mechanisms are not completely resolved. The purpose of this work was to study the physiological influence of the endocannabinoid anandamide, the putative endogenous CB1 active cannabinoid, and of the CB1 receptor on ascending peristaltic activity and to identify the involved neuro-neuronal, neuro-muscular and electrophysiological mechanisms. The effects of anandamide and the CB1 receptor antagonist SR141716A were investigated on contractions of the circular smooth muscle of rat ileum and in longitudinal rat ileum segments where the ascending myenteric part of the peristaltic reflex was studied in a newly designed organ bath. Additionally intracellular recordings were performed in ileum and colon. Anandamide significantly reduced cholinergic twitch contractions of ileum smooth muscle whereas SR141716A caused an increase. Anandamide reduced the ascending peristaltic contraction by affecting neuro-neuronal and neuro-muscular neurotransmission. SR141716A showed opposite effects and all anandamide effects were antagonized by SR141716A (1 μM). Anandamide reduced excitatory junction potentials (EJP) and inhibitory junction potentials (IJP), whereas intestinal slow waves were not affected. CB1 receptors regulate force and timing of the intestinal peristaltic reflex and these actions involve interneurons and motor-neurons. The endogenous cannabinoid anandamide mediates these effects by activation of CB1 receptors. The endogenous cannabinoid system is permanently active, suggesting the CB1 receptor being a possible target for the treatment of motility related disorders. Copyright © 2014 Institute of Pharmacology, Polish Academy of Sciences. Published by Elsevier Urban & Partner Sp. z o.o. All rights reserved.

  2. Note: A novel rotary actuator driven by only one piezoelectric actuator.

    Science.gov (United States)

    Huang, Hu; Fu, Lu; Zhao, Hongwei; Shi, Chengli; Ren, Luquan; Li, Jianping; Qu, Han

    2013-09-01

    This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20,097 μrad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 μrad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.

  3. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    Science.gov (United States)

    Larsson, David; Greve, Anders; Hvam, Jørn M.; Boisen, Anja; Yvind, Kresten

    2009-03-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was ˜60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.

  4. Numerical investigation of band gaps in 3D printed cantilever-in-mass metamaterials

    Science.gov (United States)

    Qureshi, Awais; Li, Bing; Tan, K. T.

    2016-06-01

    In this research, the negative effective mass behavior of elastic/mechanical metamaterials is exhibited by a cantilever-in-mass structure as a proposed design for creating frequency stopping band gaps, based on local resonance of the internal structure. The mass-in-mass unit cell model is transformed into a cantilever-in-mass model using the Bernoulli-Euler beam theory. An analytical model of the cantilever-in-mass structure is derived and the effects of geometrical dimensions and material parameters to create frequency band gaps are examined. A two-dimensional finite element model is created to validate the analytical results, and excellent agreement is achieved. The analytical model establishes an easily tunable metamaterial design to realize wave attenuation based on locally resonant frequency. To demonstrate feasibility for 3D printing, the analytical model is employed to design and fabricate 3D printable mechanical metamaterial. A three-dimensional numerical experiment is performed using COMSOL Multiphysics to validate the wave attenuation performance. Results show that the cantilever-in-mass metamaterial is capable of mitigating stress waves at the desired resonance frequency. Our study successfully presents the use of one constituent material to create a 3D printed cantilever-in-mass metamaterial with negative effective mass density for stress wave mitigation purposes.

  5. Experimental design and analysis for piezoelectric circular actuators in flow control applications

    International Nuclear Information System (INIS)

    Mane, Poorna; Mossi, Karla; Bryant, Robert

    2008-01-01

    Flow control can lead to saving millions of dollars in fuel costs each year by making an aircraft more efficient. Synthetic jets, a device for active flow control, operate by introducing small amounts of energy locally to achieve non-local changes in the flow field with large performance gains. These devices consist of a cavity with an oscillating diaphragm that divides it into active and passive sides. The active side has a small opening where a jet is formed, while the passive side does not directly participate in the fluidic jet. Over the years, research has shown that synthetic jet behavior is dependent on the active diaphragm and the cavity design; hence, the focus of this work. The performance of the synthetic jet is studied under various factors related to the diaphragm and the cavity geometry. Three diaphragms, manufactured from piezoelectric composites, were selected for this study: Bimorph, Thunder ® and Lipca. The overall factors considered are the driving signals, voltage, frequency, cavity height, orifice size, and passive cavity pressure. Using the average maximum jet velocity as the response variable, these factors are individually studied for each actuator, and statistical analysis tools are used to select the relevant factors in the response variable. The factors are divided into two experimental fractional factorial design matrices, with five and four factors, respectively. Both experiments are chosen to be of resolution V, where main factors are confounded with three-factor interactions. In the first experimental design, the results show that frequency is not a significant factor, while waveform is significant for all the actuators. In addition, the magnitude of the regression coefficients suggests that a model that includes the diaphragm as a factor may be possible. These results are valid within the ranges tested, that is low frequencies and sawtooth and sine waveform as driving signals. In the second experimental design, cavity dimensions are

  6. Magnetic field and rotation effects on peristaltic transport of a Jeffrey fluid in an asymmetric channel

    International Nuclear Information System (INIS)

    Abd-Alla, A.M.; Abo-Dahab, S.M.

    2015-01-01

    In this paper, the peristaltic flow of a Jeffrey fluid in an asymmetric rotating channel is studied. Mathematical modeling is carried out by utilizing long wavelength and low Reynolds number assumptions. Closed form expressions for the pressure gradient, pressure rise, streamlines, axial velocity and shear stress on the channel walls have been computed numerically. Effects of Hartmann number, the ratio of relaxation to retardation times, time-mean flow, rotation and the phase angle on the pressure gradient, pressure rise, streamline, axial velocity and shear stress are discussed in detail and shown graphically. The results indicate that the effect of the Hartmann number, the ratio of relaxation to retardation times, time-mean flow, rotation and the phase angle are very pronounced in the phenomena. Comparison was made with the results obtained in the asymmetric channel and symmetric channel. - Highlights: • The peristaltic flow of a Jeffrey fluid in an asymmetric rotating channel with magnetic field. • Mathematical modeling for long wavelength and low Reynolds number assumptions. • Closed form expressions for the pressure gradient, pressure rise, stream function, axial velocity and shear stress

  7. Analysis of dynamic cantilever behavior in tapping mode atomic force microscopy.

    Science.gov (United States)

    Deng, Wenqi; Zhang, Guang-Ming; Murphy, Mark F; Lilley, Francis; Harvey, David M; Burton, David R

    2015-10-01

    Tapping mode atomic force microscopy (AFM) provides phase images in addition to height and amplitude images. Although the behavior of tapping mode AFM has been investigated using mathematical modeling, comprehensive understanding of the behavior of tapping mode AFM still poses a significant challenge to the AFM community, involving issues such as the correct interpretation of the phase images. In this paper, the cantilever's dynamic behavior in tapping mode AFM is studied through a three dimensional finite element method. The cantilever's dynamic displacement responses are firstly obtained via simulation under different tip-sample separations, and for different tip-sample interaction forces, such as elastic force, adhesion force, viscosity force, and the van der Waals force, which correspond to the cantilever's action upon various different representative computer-generated test samples. Simulated results show that the dynamic cantilever displacement response can be divided into three zones: a free vibration zone, a transition zone, and a contact vibration zone. Phase trajectory, phase shift, transition time, pseudo stable amplitude, and frequency changes are then analyzed from the dynamic displacement responses that are obtained. Finally, experiments are carried out on a real AFM system to support the findings of the simulations. © 2015 Wiley Periodicals, Inc.

  8. Flight control actuation system

    Science.gov (United States)

    Wingett, Paul T. (Inventor); Gaines, Louie T. (Inventor); Evans, Paul S. (Inventor); Kern, James I. (Inventor)

    2006-01-01

    A flight control actuation system comprises a controller, electromechanical actuator and a pneumatic actuator. During normal operation, only the electromechanical actuator is needed to operate a flight control surface. When the electromechanical actuator load level exceeds 40 amps positive, the controller activates the pneumatic actuator to offset electromechanical actuator loads to assist the manipulation of flight control surfaces. The assistance from the pneumatic load assist actuator enables the use of an electromechanical actuator that is smaller in size and mass, requires less power, needs less cooling processes, achieves high output forces and adapts to electrical current variations. The flight control actuation system is adapted for aircraft, spacecraft, missiles, and other flight vehicles, especially flight vehicles that are large in size and travel at high velocities.

  9. Coupled analysis of multi-impact energy harvesting from low-frequency wind induced vibrations

    Science.gov (United States)

    Zhu, Jin; Zhang, Wei

    2015-04-01

    Energy need from off-grid locations has been critical for effective real-time monitoring and control to ensure structural safety and reliability. To harvest energy from ambient environments, the piezoelectric-based energy-harvesting system has been proven very efficient to convert high frequency vibrations into usable electrical energy. However, due to the low frequency nature of the vibrations of civil infrastructures, such as those induced from vehicle impacts, wind, and waves, the application of a traditional piezoelectric-based energy-harvesting system is greatly restrained since the output power drops dramatically with the reduction of vibration frequencies. This paper focuses on the coupled analysis of a proposed piezoelectric multi-impact wind-energy-harvesting device that can effectively up-convert low frequency wind-induced vibrations into high frequency ones. The device consists of an H-shape beam and four bimorph piezoelectric cantilever beams. The H-shape beam, which can be easily triggered to vibrate at a low wind speed, is originated from the first Tacoma Narrows Bridge, which failed at wind speeds of 18.8 m s-1 in 1940. The multi-impact mechanism between the H-shape beam and the bimorph piezoelectric cantilever beams is incorporated to improve the harvesting performance at lower frequencies. During the multi-impact process, a series of sequential impacts between the H-shape beam and the cantilever beams can trigger high frequency vibrations of the cantilever beams and result in high output power with a considerably high efficiency. In the coupled analysis, the coupled structural, aerodynamic, and electrical equations are solved to obtain the dynamic response and the power output of the proposed harvesting device. A parametric study for several parameters in the coupled analysis framework is carried out including the external resistance, wind speed, and the configuration of the H-shape beam. The average harvested power for the piezoelectric cantilever

  10. Use of magnetic micro-cantilevers to study the dynamics of 3D engineered smooth muscle constructs

    Science.gov (United States)

    Liu, Alan; Zhao, Ruogang; Copeland, Craig; Chen, Christopher; Reich, Daniel

    2013-03-01

    The normal and pathological response of arterial tissue to mechanical stimulus sheds important light on such conditions as atherosclerosis and hypertension. While most previous methods of determining the biomechanical properties of arteries have relied on excised tissue, we have devised a system that enables the growth and in situ application of forces to arrays of stable suspended microtissues consisting of arterial smooth muscle cells (SMCs). Briefly, this magnetic microtissue tester system consists of arrays of pairs of elastomeric magnetically actuated micro-cantilevers between which SMC-infused 3D collagen gels self-assemble and remodel into aligned microtissue constructs. These devices allow us to simultaneously apply force and track stress-strain relationships of multiple microtissues per substrate. We have studied the dilatory capacity and subsequent response of the tissues and find that the resulting stress-strain curves show viscoelastic behavior as well as a linear dynamic recovery. These results provide a foundation for elucidating the mechanical behavior of this novel model system as well as further experiments that simulate pathological conditions. Supported in part by NIH grant HL090747.

  11. Piezoelectric composite morphing control surfaces for unmanned aerial vehicles

    Science.gov (United States)

    Ohanian, Osgar J., III; Karni, Etan D.; Olien, Chris C.; Gustafson, Eric A.; Kochersberger, Kevin B.; Gelhausen, Paul A.; Brown, Bridget L.

    2011-04-01

    The authors have explored the use of morphing control surfaces to replace traditional servo-actuated control surfaces in UAV applications. The morphing actuation is accomplished using Macro Fiber Composite (MFC) piezoelectric actuators in a bimorph configuration to deflect the aft section of a control surface cross section. The resulting camber change produces forces and moments for vehicle control. The flexible piezoelectric actuators are damage tolerant and provide excellent bandwidth. The large amplitude morphing deflections attained in bench-top experiments demonstrate the potential for excellent control authority. Aerodynamic performance calculations using experimentally measured morphed geometries indicate changes in sectional lift coefficients that are superior to a servo-actuated hinged flap airfoil. This morphing flight control actuation technology could eliminate the need for servos and mechanical linkages in small UAVs and thereby increase reliability and reduce drag.

  12. Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning.

    Science.gov (United States)

    Kan, Tetsuo; Matsumoto, Kiyoshi; Shimoyama, Isao

    2007-08-01

    Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-microm-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1 x 10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300 x 300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices.

  13. Modeling and Analysis of a Piezoelectric Energy Harvester with Varying Cross-Sectional Area

    Directory of Open Access Journals (Sweden)

    Maiara Rosa

    2014-01-01

    Full Text Available This paper reports on the modeling and on the experimental verification of electromechanically coupled beams with varying cross-sectional area for piezoelectric energy harvesting. The governing equations are formulated using the Rayleigh-Ritz method and Euler-Bernoulli assumptions. A load resistance is considered in the electrical domain for the estimate of the electric power output of each geometric configuration. The model is first verified against the analytical results for a rectangular bimorph with tip mass reported in the literature. The experimental verification of the model is also reported for a tapered bimorph cantilever with tip mass. The effects of varying cross-sectional area and tip mass on the electromechanical behavior of piezoelectric energy harvesters are also discussed. An issue related to the estimation of the optimal load resistance (that gives the maximum power output on beam shape optimization problems is also discussed.

  14. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

    Directory of Open Access Journals (Sweden)

    Jian Yang

    2018-02-01

    Full Text Available A novel design of piezoelectric aluminum nitride (AlN-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.

  15. Soft Robotic Actuators

    Science.gov (United States)

    Godfrey, Juleon Taylor

    In this thesis a survey on soft robotic actuators is conducted. The actuators are classified into three main categories: Pneumatic Artificial Muscles (PAM), Electronic Electroactive Polymers (Electric EAP), and Ionic Electroactive Polymers (Ionic EAP). Soft robots can have many degrees and are more compliant than hard robots. This makes them suitable for applications that are difficult for hard robots. For each actuator background history, build materials, how they operate, and modeling are presented. Multiple actuators in each class are reviewed highlighting both their use and their mathematical formulation. In addition to the survey the McKibben actuator was chosen for fabrication and in-depth experimental analysis. Four McKibben actuators were fabricated using mesh sleeve, barbed hose fittings, and different elastic bladders. All were actuated using compressed air. Tensile tests were performed for each actuator to measure the tension force as air pressure increased from 20 to 100 psi in 10 psi increments. To account for material relaxation properties eleven trials for each actuator were run for 2-3 days. In conclusion, the smallest outer diameter elastic bladder was capable of producing the highest force due to the larger gap between the bladder and the sleeve.

  16. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    Directory of Open Access Journals (Sweden)

    Felix Ströer

    2018-02-01

    Full Text Available Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective description of the stylus cantilever dynamics with system-theoretical techniques and show a simple iterative approach to optimize closed-loop control parameters with boundary conditions.

  17. Segmentation of a Vibro-Shock Cantilever-Type Piezoelectric Energy Harvester Operating in Higher Transverse Vibration Modes

    Directory of Open Access Journals (Sweden)

    Darius Zizys

    2015-12-01

    Full Text Available The piezoelectric transduction mechanism is a common vibration-to-electric energy harvesting approach. Piezoelectric energy harvesters are typically mounted on a vibrating host structure, whereby alternating voltage output is generated by a dynamic strain field. A design target in this case is to match the natural frequency of the harvester to the ambient excitation frequency for the device to operate in resonance mode, thus significantly increasing vibration amplitudes and, as a result, energy output. Other fundamental vibration modes have strain nodes, where the dynamic strain field changes sign in the direction of the cantilever length. The paper reports on a dimensionless numerical transient analysis of a cantilever of a constant cross-section and an optimally-shaped cantilever with the objective to accurately predict the position of a strain node. Total effective strain produced by both cantilevers segmented at the strain node is calculated via transient analysis and compared to the strain output produced by the cantilevers segmented at strain nodes obtained from modal analysis, demonstrating a 7% increase in energy output. Theoretical results were experimentally verified by using open-circuit voltage values measured for the cantilevers segmented at optimal and suboptimal segmentation lines.

  18. Peristaltic Wave Locomotion and Shape Morphing with a Millipede Inspired System

    Science.gov (United States)

    Spinello, Davide; Fattahi, Javad S.

    2017-08-01

    We present the mechanical model of a bio-inspired deformable system, modeled as a Timoshenko beam, which is coupled to a substrate by a system of distributed elements. The locomotion action is inspired by the coordinated motion of coupling elements that mimic the legs of millipedes and centipedes, whose leg-to-ground contact can be described as a peristaltic displacement wave. The multi-legged structure is crucial in providing redundancy and robustness in the interaction with unstructured environments and terrains. A Lagrangian approach is used to derive the governing equations of the system that couple locomotion and shape morphing. Features and limitations of the model are illustrated with numerical simulations.

  19. Nonlinear dynamic response of cantilever beam tip during atomic force microscopy (AFM) nanolithography of copper surface

    International Nuclear Information System (INIS)

    Yeh, Y-L; Jang, M-J; Wang, C-C; Lin, Y-P; Chen, K-S

    2008-01-01

    This paper investigates the nonlinear dynamic response of an atomic force microscope (AFM) cantilever beam tip during the nanolithography of a copper (Cu) surface using a high-depth feed. The dynamic motion of the tip is modeled using a combined approach based on Newton's law and empirical observations. The cutting force is determined from experimental observations of the piling height on the Cu surface and the rotation angle of the cantilever beam tip. It is found that the piling height increases linearly with the cantilever beam carrier velocity. Furthermore, the cantilever beam tip is found to execute a saw tooth motion. Both this motion and the shear cutting force are nonlinear. The elastic modulus in the y direction is variable. Finally, the velocity of the cantilever beam tip as it traverses the specimen surface has a discrete characteristic rather than a smooth, continuous profile

  20. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

    Directory of Open Access Journals (Sweden)

    Anja Boisen

    2008-03-01

    Full Text Available Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.

  1. Geometrical nonlinear deformation model and its experimental study on bimorph giant magnetostrictive thin film

    Institute of Scientific and Technical Information of China (English)

    Wei LIU; Zhenyuan JIA; Fuji WANG; Yongshun ZHANG; Dongming GUO

    2008-01-01

    The geometrical nonlinearity of a giant magne-tostrictive thin film (GMF) can be clearly detected under the magnetostriction effect. Thus, using geometrical linear elastic theory to describe the strain, stress, and constitutive relationship of GMF is inaccurate. According to nonlinear elastic theory, a nonlinear deformation model of the bimorph GMF is established based on assumptions that the magnetostriction effect is equivalent to the effect of body force loaded on the GMF. With Taylor series method, the numerical solution is deduced. Experiments on TbDyFe/Polyimide (PI)/SmFe and TbDyFe/Cu/SmFe are then conducted to verify the proposed model, respectively. Results indicate that the nonlinear deflection curve model is in good conformity with the experimental data.

  2. Fabrication and characterization of large arrays of mesoscopic gold rings on large-aspect-ratio cantilevers

    Energy Technology Data Exchange (ETDEWEB)

    Ngo, D. Q.; Petković, I., E-mail: ivana.petkovic@yale.edu; Lollo, A. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Castellanos-Beltran, M. A. [National Institute for Standards and Technology, Boulder, Colorado 80305 (United States); Harris, J. G. E. [Department of Physics, Yale University, New Haven, Connecticut 06520 (United States); Department of Applied Physics, Yale University, New Haven, Connecticut 06520 (United States)

    2014-10-15

    We have fabricated large arrays of mesoscopic metal rings on ultrasensitive cantilevers. The arrays are defined by electron beam lithography and contain up to 10{sup 5} rings. The rings have a circumference of 1 μm, and are made of ultrapure (6N) Au that is deposited onto a silicon-on-insulator wafer without an adhesion layer. Subsequent processing of the SOI wafer results in each array being supported at the end of a free-standing cantilever. To accommodate the large arrays while maintaining a low spring constant, the cantilevers are nearly 1 mm in both lateral dimensions and 100 nm thick. The extreme aspect ratio of the cantilevers, the large array size, and the absence of a sticking layer are intended to enable measurements of the rings' average persistent current in the presence of relatively small magnetic fields. We describe the motivation for these measurements, the fabrication of the devices, and the characterization of the cantilevers' mechanical properties. We also discuss the devices' expected performance in measurements of .

  3. Search for the optimally suited cantilever type for high-frequency MFM

    International Nuclear Information System (INIS)

    Koblischka, M R; Wei, J D; Kirsch, M; Lessel, M; Pfeifer, R; Brust, M; Hartmann, U; Richter, C; Sulzbach, T

    2007-01-01

    To optimize the performance of the high-frequency MFM (HF-MFM) technique [1-4], we performed a search for the best suited cantilever type and magnetic material coating. Using a HF-MFM setup with hard disk writer poles as test samples, we carried out HF-MFM imaging at frequencies up to 2 GHz. For HF-MFM, it is an essential ingredient that the tip material can follow the fast switching of the high-frequency fields. In this contribution, we investigated 6 different types of cantilevers (i) the 'standard' MFM tip (Nanoworld Pointprobe) with 30 nm CoCr coating, (ii) a 'SSS' (Nanoworld SuperSharpSilicon TM ) cantilever with a 10 nm CoCr coating, (iii) a (Ni, Zn)-ferrite coated pointprobe tip (iv) a Ba 3 Co 2 Fe 23 O 41 (BCFO) coated pointprobe tip, (v) a low-coercivity NiCo alloy coated tip, and (vi) a permalloy-coated tip

  4. A wall shear stress sensor using a pair of sidewall doped cantilevers

    Science.gov (United States)

    Nguyen, Thanh-Vinh; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi; Shimoyama, Isao

    2017-07-01

    In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µm thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µm  ×  400 µm plate supported by two 150 µm long, 4 µm wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  -10 and 10 m s-1 is demonstrated.

  5. A wall shear stress sensor using a pair of sidewall doped cantilevers

    International Nuclear Information System (INIS)

    Nguyen, Thanh-Vinh; Shimoyama, Isao; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi

    2017-01-01

    In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µ m thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µ m  ×  400 µ m plate supported by two 150 µ m long, 4 µ m wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  −10 and 10 m s −1 is demonstrated. (paper)

  6. Mixed convection peristaltic flow of third order nanofluid with an induced magnetic field.

    Science.gov (United States)

    Noreen, Saima

    2013-01-01

    This research is concerned with the peristaltic flow of third order nanofluid in an asymmetric channel. The governing equations of third order nanofluid are modelled in wave frame of reference. Effect of induced magnetic field is considered. Long wavelength and low Reynolds number situation is tackled. Numerical solutions of the governing problem are computed and analyzed. The effects of Brownian motion and thermophoretic diffusion of nano particles are particularly emphasized. Physical quantities such as velocity, pressure rise, temperature, induced magnetic field and concentration distributions are discussed.

  7. Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

    International Nuclear Information System (INIS)

    Yang, Yongliang; Ma, Eric Yue; Cui, Yong-Tao; Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael; Shen, Zhi-Xun; Haemmerli, Alexandre; Harjee, Nahid; Pruitt, Beth L

    2014-01-01

    This paper presents the design and fabrication of piezoresistive cantilever probes for microwave impedance microscopy (MIM) to enable simultaneous topographic and electrical imaging. Plasma enhanced chemical vapor deposited Si 3 N 4  cantilevers with a shielded center conductor line and nanoscale conductive tip apex are batch fabricated on silicon-on-insulator wafers. Doped silicon piezoresistors are integrated at the root of the cantilevers to sense their deformation. The piezoresistive sensitivity is 2 nm for a bandwidth of 10 kHz, enabling topographical imaging with reasonable speed. The aluminum center conductor has a low resistance (less than 5 Ω) and small capacitance (∼1.7 pF) to ground; these parameters are critical for high sensitivity MIM imaging. High quality piezoresistive topography and MIM images are simultaneously obtained with the fabricated probes at ambient and cryogenic temperatures. These new piezoresistive probes remarkably broaden the horizon of MIM for scientific applications by operating with an integrated feedback mechanism at low temperature and for photosensitive samples. (paper)

  8. Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

    Energy Technology Data Exchange (ETDEWEB)

    Soltani Bozchalooi, I.; Careaga Houck, A. [Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (United States); AlGhamdi, J. [Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (United States); Department of Chemistry, College of Science, University of Dammam, Dammam (Saudi Arabia); Youcef-Toumi, K. [Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139 (United States)

    2016-01-15

    This paper presents the design and control of a high-speed and large-range atomic force microscopy (AFM). A multi-actuation scheme is proposed where several nano-positioners cooperate to achieve the range and speed requirements. A simple data-based control design methodology is presented to effectively operate the AFM scanner components. The proposed controllers compensate for the coupled dynamics and divide the positioning responsibilities between the scanner components. As a result, the multi-actuated scanner behavior is equivalent to that of a single X–Y–Z positioner with large range and high speed. The scanner of the designed AFM is composed of five nano-positioners, features 6 μm out-of-plane and 120 μm lateral ranges and is capable of high-speed operation. The presented AFM has a modular design with laser spot size of 3.5 μm suitable for small cantilever, an optical view of the sample and probe, a conveniently large waterproof sample stage and a 20 MHz data throughput for high resolution image acquisition at high imaging speeds. This AFM is used to visualize etching of calcite in a solution of sulfuric acid. Layer-by-layer dissolution and pit formation along the crystalline lines in a low pH environment is observed in real time. - Highlights: • High-speed AFM imaging is extended to large lateral and vertical scan ranges. • A general multi-actuation approach to atomic force microscopy is presented. • A high-speed AFM is designed and implemented based on the proposed method. • Multi-actuator control is designed auxiliary to a PID unit to maintain flexibility. • Influence of calcite crystal structure on dissolution is visualized in video form.

  9. Monolithic Concrete vs Precast Concrete for the Construction of Bridge by Th Cantilever Method

    Directory of Open Access Journals (Sweden)

    Morlova Dumitru Daniel

    2015-07-01

    Full Text Available In the article "Monolithic Concrete vs Precast Concrete for the Construction of Bridges by the Cantilever Method", there are approached a number of issues that come out in the design and execution of prestressed concrete bridge structures using the cantilever method.

  10. MEMS fluidic actuator

    Science.gov (United States)

    Kholwadwala, Deepesh K [Albuquerque, NM; Johnston, Gabriel A [Trophy Club, TX; Rohrer, Brandon R [Albuquerque, NM; Galambos, Paul C [Albuquerque, NM; Okandan, Murat [Albuquerque, NM

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  11. Frequency Shifts of Micro and Nano Cantilever Beam Resonators Due to Added Masses

    KAUST Repository

    Bouchaala, Adam M.

    2016-03-21

    We present analytical and numerical techniques to accurately calculate the shifts in the natural frequencies of electrically actuated micro and nano (carbon nanotubes (CNTs)) cantilever beams implemented as resonant sensors for mass detection of biological entities, particularly Escherichia coli (E. coli) and prostate specific antigen (PSA) cells. The beams are modeled as Euler-Bernoulli beams, including the nonlinear electrostatic forces and the added biological cells, which are modeled as discrete point masses. The frequency shifts due to the added masses of the cells are calculated for the fundamental and higher-order modes of vibrations. Analytical expressions of the natural frequency shifts under a direct current (DC) voltage and an added mass have been developed using perturbation techniques and the Galerkin approximation. Numerical techniques are also used to calculate the frequency shifts and compared with the analytical technique. We found that a hybrid approach that relies on the analytical perturbation expression and the Galerkin procedure for calculating accurately the static behavior presents the most computationally efficient approach. We found that using higher-order modes of vibration of micro-electro-mechanical-system (MEMS) beams or miniaturizing the sizes of the beams to nanoscale leads to significant improved frequency shifts, and thus increased sensitivities. © 2016 by ASME.

  12. Optimised cantilever biosensor with piezoresistive read-out

    DEFF Research Database (Denmark)

    Rasmussen, Peter; Thaysen, J.; Hansen, Ole

    2003-01-01

    We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well sui...

  13. Bi-directional series-parallel elastic actuator and overlap of the actuation layers.

    Science.gov (United States)

    Furnémont, Raphaël; Mathijssen, Glenn; Verstraten, Tom; Lefeber, Dirk; Vanderborght, Bram

    2016-01-27

    Several robotics applications require high torque-to-weight ratio and energy efficient actuators. Progress in that direction was made by introducing compliant elements into the actuation. A large variety of actuators were developed such as series elastic actuators (SEAs), variable stiffness actuators and parallel elastic actuators (PEAs). SEAs can reduce the peak power while PEAs can reduce the torque requirement on the motor. Nonetheless, these actuators still cannot meet performances close to humans. To combine both advantages, the series parallel elastic actuator (SPEA) was developed. The principle is inspired from biological muscles. Muscles are composed of motor units, placed in parallel, which are variably recruited as the required effort increases. This biological principle is exploited in the SPEA, where springs (layers), placed in parallel, can be recruited one by one. This recruitment is performed by an intermittent mechanism. This paper presents the development of a SPEA using the MACCEPA principle with a self-closing mechanism. This actuator can deliver a bi-directional output torque, variable stiffness and reduced friction. The load on the motor can also be reduced, leading to a lower power consumption. The variable recruitment of the parallel springs can also be tuned in order to further decrease the consumption of the actuator for a given task. First, an explanation of the concept and a brief description of the prior work done will be given. Next, the design and the model of one of the layers will be presented. The working principle of the full actuator will then be given. At the end of this paper, experiments showing the electric consumption of the actuator will display the advantage of the SPEA over an equivalent stiff actuator.

  14. Environmental sensors based on micromachined cantilevers with integrated read-out

    DEFF Research Database (Denmark)

    Boisen, Anja; Thaysen, Jacob; Jensenius, Henriette

    2000-01-01

    -out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C......An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read...

  15. Soft, Rotating Pneumatic Actuator.

    Science.gov (United States)

    Ainla, Alar; Verma, Mohit S; Yang, Dian; Whitesides, George M

    2017-09-01

    This article describes a soft pneumatic actuator that generates cyclical motion. The actuator consists of several (three, four, or five) chambers (arranged around the circumference of a circle surrounding a central rod) that can be actuated independently using negative pressure (or partial vacuum). Sequential actuation of the four-chamber device using reduced pressure moves the central rod cyclically in an approximately square path. We characterize the trajectory of the actuator and the force exerted by it, as we vary the material used for fabrication, the number of chambers, and the size of the actuator. We demonstrate two applications of this actuator: to deliver fluid while stirring (by replacing the central rod with a needle) and for locomotion that mimics a reptilian gait (by combining four actuators together).

  16. Simple and Accurate Analytical Solutions of the Electrostatically Actuated Curled Beam Problem

    KAUST Repository

    Younis, Mohammad I.

    2014-08-17

    We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data in the literature and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximations they are based on. In such cases, multi-mode reduced order models need to be utilized.

  17. Soft buckling actuators

    Energy Technology Data Exchange (ETDEWEB)

    Yang, Dian; Whitesides, George M.

    2017-12-26

    A soft actuator is described, including: a rotation center having a center of mass; a plurality of bucklable, elastic structural components each comprising a wall defining an axis along its longest dimension, the wall connected to the rotation center in a way that the axis is offset from the center of mass in a predetermined direction; and a plurality of cells each disposed between two adjacent bucklable, elastic structural components and configured for connection with a fluid inflation or deflation source; wherein upon the deflation of the cell, the bucklable, elastic structural components are configured to buckle in the predetermined direction. A soft actuating device including a plurality of the soft actuators and methods of actuation using the soft actuator or soft actuating device disclosed herein are also described.

  18. Peristaltic Flow of Carreau Fluid in a Rectangular Duct through a Porous Medium

    Directory of Open Access Journals (Sweden)

    R. Ellahi

    2012-01-01

    Full Text Available We have examined the peristaltic flow of Carreau fluid in a rectangular channel through a porous medium. The governing equations of motion are simplified by applying the long wavelength and low Reynolds number approximations. The reduced highly nonlinear partial differential equations are solved jointly by homotopy perturbation and Eigen function expansion methods. The expression for pressure rise is computed numerically by evaluating the numerical integration. The physical features of pertinent parameters have been discussed by plotting graphs of velocity, pressure rise, pressure gradient, and stream functions.

  19. Peristaltic flow of Johnson-Segalman fluid in asymmetric channel with convective boundary conditions

    Institute of Scientific and Technical Information of China (English)

    H YASMIN; T HAYAT; A ALSAEDI; HH ALSULAMI

    2014-01-01

    This work is concerned with the peristaltic transport of the Johnson-Segalman fluid in an asymmetric channel with convective boundary conditions. The mathematical modeling is based upon the conservation laws of mass, linear momentum, and energy. The resulting equations are solved after long wavelength and low Reynolds number are used. The results for the axial pressure gradient, velocity, and temperature profiles are obtained for small Weissenberg number. The expressions of the pressure gra-dient, velocity, and temperature are analyzed for various embedded parameters. Pumping and trapping phenomena are also explored.

  20. Mixed convection peristaltic flow of third order nanofluid with an induced magnetic field.

    Directory of Open Access Journals (Sweden)

    Saima Noreen

    Full Text Available This research is concerned with the peristaltic flow of third order nanofluid in an asymmetric channel. The governing equations of third order nanofluid are modelled in wave frame of reference. Effect of induced magnetic field is considered. Long wavelength and low Reynolds number situation is tackled. Numerical solutions of the governing problem are computed and analyzed. The effects of Brownian motion and thermophoretic diffusion of nano particles are particularly emphasized. Physical quantities such as velocity, pressure rise, temperature, induced magnetic field and concentration distributions are discussed.

  1. Peristaltic transport of Bingham plastic fluid considering magnetic field, Soret and Dufour effects

    Science.gov (United States)

    Hayat, T.; Farooq, S.; Mustafa, M.; Ahmad, B.

    Current attempt addresses the peristaltic transport of Bingham plastic fluid under the influence of magnetic force. Space dependent viscosity is considered. Novel Soret and Dufour effects are retained in the mathematical model. Problem formulation is presented through the conventional lubrication approach. Series solutions of the arising non-linear problem are developed via regular perturbation approach. Special attention is given to the role of embedded parameters on the axial velocity, temperature, concentration and pressure distributions. Furthermore the numerical solution of pressure rise per wavelength is obtained through numerical integration because its analytical solution seems impossible.

  2. Analysis the effect of different geometries of AFM's cantilever on the dynamic behavior and the critical forces of three-dimensional manipulation

    International Nuclear Information System (INIS)

    Korayem, Moharam Habibnejad; Saraie, Maniya B.; Saraee, Mahdieh B.

    2017-01-01

    An important challenge when using an atomic force microscope (AFM) is to be able to control the force exerted by the AFM for performing various tasks. Nevertheless, the exerted force is proportional to the deflection of the AFM cantilever, which itself is affected by a cantilever's stiffness coefficient. Many papers have been published so far on the methods of obtaining the stiffness coefficients of AFM cantilevers in 2D; however, a comprehensive model is yet to be presented on 3D cantilever motion. The discrepancies between the equations of the 2D and 3D analysis are due to the number and direction of forces and moments that are applied to a cantilever. Moreover, in the 3D analysis, contrary to the 2D analysis, due to the interaction between the forces and moments applied on a cantilever, its stiffness values cannot be separately expressed for each direction; and instead, a stiffness matrix should be used to correctly derive the relevant equations. In this paper, 3D stiffness coefficient matrices have been obtained for three common cantilever geometries including the rectangular, V-shape and dagger-shape cantilevers. The obtained equations are validated by two methods. In the first approach, the Finite Element Method is combined with the cantilever deflection values computed by using the obtained stiffness matrices. In the second approach, by reducing the problem's parameters, the forces applied on a cantilever along different directions are compared with each other in 2D and 3D cases. Then the 3D manipulation of a stiff nanoparticle is modeled and simulated by using the stiffness matrices obtained for the three cantilever geometries. The obtained results indicate that during the manipulation process, the dagger-shaped and rectangular cantilevers exert the maximum and minimum amounts of forces on the stiff nanoparticle, respectively. Also, by examining the effects of different probe tip geometries, it is realized that a probe tip of cylindrical geometry exerts the

  3. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue

    DEFF Research Database (Denmark)

    Bache, Michael; Taboryski, Rafael Jozef; Schmid, Silvan

    2011-01-01

    -BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending...

  4. Development of blood extraction system designed by female mosquito's blood sampling mechanism for bio-MEMS

    Science.gov (United States)

    Tsuchiya, Kazuyoshi; Nakanishi, Naoyuki; Nakamachi, Eiji

    2005-02-01

    A compact and wearable wristwatch type Bio-MEMS such as a health monitoring system (HMS) to detect blood sugar level for diabetic patient, was newly developed. The HMS consists of (1) a indentation unit with a microneedle to generate the skin penetration force using a shape memory alloy(SMA) actuator, (2) a pumping unit using a bimorph PZT piezoelectric actuator to extract the blood and (3) a gold (Au) electrode as a biosensor immobilized GOx and attached to the gate electrode of MOSFET to detect the amount of Glucose in extracted blood. GOx was immobilized on a self assembled spacer combined with an Au electrode by the cross-link method using BSA as an additional bonding material. The device can extract blood in a few microliter through a painless microneedle with the negative pressure by deflection of the bimorph PZT piezoelectric actuator produced in the blood chamber, by the similar way the female mosquito extracts human blood with muscle motion to flex or relax. The performances of the liquid sampling ability of the pumping unit through a microneedle (3.8mm length, 100μm internal diameter) using the bimorph PZT piezoelectric microactuator were measured. The blood extraction micro device could extract human blood at the speed of 2μl/min, and it is enough volume to measure a glucose level, compared to the amount of commercial based glucose level monitor. The electrode embedded in the blood extraction device chamber could detect electrons generated by the hydrolysis of hydrogen peroxide produced by the reaction between GOx and glucose in a few microliter extracted blood, using the constant electric current measurement system of the MOSFET type hybrid biosensor. The output voltage for the glucose diluted in the chamber was increased lineally with increase of the glucose concentration.

  5. Effect of cantilever geometry on the optical lever sensitivities and thermal noise method of the atomic force microscope.

    Science.gov (United States)

    Sader, John E; Lu, Jianing; Mulvaney, Paul

    2014-11-01

    Calibration of the optical lever sensitivities of atomic force microscope (AFM) cantilevers is especially important for determining the force in AFM measurements. These sensitivities depend critically on the cantilever mode used and are known to differ for static and dynamic measurements. Here, we calculate the ratio of the dynamic and static sensitivities for several common AFM cantilevers, whose shapes vary considerably, and experimentally verify these results. The dynamic-to-static optical lever sensitivity ratio is found to range from 1.09 to 1.41 for the cantilevers studied - in stark contrast to the constant value of 1.09 used widely in current calibration studies. This analysis shows that accuracy of the thermal noise method for the static spring constant is strongly dependent on cantilever geometry - neglect of these dynamic-to-static factors can induce errors exceeding 100%. We also discuss a simple experimental approach to non-invasively and simultaneously determine the dynamic and static spring constants and optical lever sensitivities of cantilevers of arbitrary shape, which is applicable to all AFM platforms that have the thermal noise method for spring constant calibration.

  6. Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

    Science.gov (United States)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Suryo Wasisto, Hutomo; Peiner, Erwin

    2016-10-01

    The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor (Q) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 × 10-6. This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor.

  7. Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

    International Nuclear Information System (INIS)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Wasisto, Hutomo Suryo; Peiner, Erwin

    2016-01-01

    The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor ( Q ) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 × 10 -6 . This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor. (paper)

  8. SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

    OpenAIRE

    Anja Boisen; Mogens Havsteen-Jakobsen; Gabriela Blagoi; Daniel Haefliger; Søren Dohn; Alicia Johansson; Michael Lillemose; Stephan Keller; Maria Nordström

    2008-01-01

    Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young's modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the bu...

  9. A model of electrostatically actuated MEMS and carbon nanotubes resonators for biological mass detection

    KAUST Repository

    Bouchaala, Adam M.

    2015-01-01

    We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity. © Springer International Publishing Switzerland 2015.

  10. Integrated cantilever-based flow sensors with tunable sensitivity for in-line monitoring of flow fluctuations in microfluidic systems

    DEFF Research Database (Denmark)

    Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja

    2014-01-01

    For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different...... is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external...

  11. Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

    DEFF Research Database (Denmark)

    Keller, Stephan Urs; Haefliger, D.; Boisen, Anja

    2010-01-01

    SU-8 cantilevers with a thickness of 2 mu m were fabricated using a dry release method and two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the cantilevers was experimentally optimized to achieve low initial bending due to residual stress gradients. In parallel......, the rotational deformation at the clamping point allowed a qualitative assessment of the device release from the fluorocarbon-coated substrate. The change of these parameters during several months of storage at ambient temperature was investigated in detail. The introduction of a long hard bake in an oven after...... development of the thin SU-8 film resulted in reduced cantilever bending due to removal of residual stress gradients. Further, improved time-stability of the devices was achieved due to the enhanced cross-linking of the polymer. A post-exposure bake at a temperature T-PEB = 50 degrees C followed by a hard...

  12. Discussion of the Improved Methods for Analyzing a Cantilever Beam Carrying a Tip-Mass under Base Excitation

    Directory of Open Access Journals (Sweden)

    Wang Hongjin

    2014-01-01

    Full Text Available Two improved analytical methods of calculations for natural frequencies and mode shapes of a uniform cantilever beam carrying a tip-mass under base excitation are presented based on forced vibration theory and the method of separation of variables, respectively. The cantilever model is simplified in detail by replacing the tip-mass with an equivalent inertial force and inertial moment acting at the free end of the cantilever based on D’Alembert’s principle. The concentrated equivalent inertial force and inertial moment are further represented as distributed loads using Dirac Delta Function. In this case, some typical natural frequencies and mode shapes of the cantilever model are calculated by the improved and unimproved analytical methods. The comparing results show that, after improvement, these two methods are in extremely good agreement with each other even the offset distance between the gravity center of the tip-mass and the attachment point is large. As further verification, the transient and steady displacement responses of the cantilever system under a sine base excitation are presented in which two improved methods are separately utilized. Finally, an experimental cantilever system is fabricated and the theoretical displacement responses are validated by the experimental measurements successfully.

  13. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  14. Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers

    International Nuclear Information System (INIS)

    Fu, Y Q; Milne, S B; Luo, J K; Flewitt, A J; Wang, L; Miao, J M; Milne, W I

    2006-01-01

    A variable RF capacitor with a-Si:H (doped with phosphine) cantilevers as the top electrode were designed and fabricated. Because the top multi-cantilever electrodes have different lengths, increasing the applied voltage pulled down the cantilever beams sequentially, thus realizing a gradual increase of the capacitance with the applied voltage. A high-k material, H f O 2 , was used as an insulating layer to increase the tuning range of the capacitance. The measured capacitance from the fabricated capacitor was much lower and the pull-in voltage was much higher than those from theoretical analysis because of incomplete contact of the two electrodes, existence of film differential stresses and charge injection effect. Increase of sweeping voltage rate could significantly shift the pull-in voltage to higher values due to the charge injection mechanisms

  15. Orthodontic Traction of Impacted Canine Using Cantilever

    Directory of Open Access Journals (Sweden)

    Cláudia Nakandakari

    2016-01-01

    Full Text Available The impaction of the maxillary canines causes relevant aesthetic and functional problems. The multidisciplinary approach to the proper planning and execution of orthodontic traction of the element in question is essential. Many strategies are cited in the literature; among them is the good biomechanical control in order to avoid possible side effects. The aim of this paper is to present a case report in which a superior canine impacted by palatine was pulled out with the aid of the cantilever on the Segmented Arch Technique (SAT concept. A 14.7-year-old female patient appeared at clinic complaining about the absence of the upper right permanent canine. The proposed treatment prioritized the traction of the upper right canine without changing the occlusion and aesthetics. For this, it only installed the upper fixed appliance (Roth with slot 0.018, opting for SAT in order to minimize unwanted side effects. The use of cantilever to the traction of the upper right canine has enabled an efficient and predictable outcome, because it is of statically determined mechanics.

  16. Method of mechanical holding of cantilever chip for tip-scan high-speed atomic force microscope

    Energy Technology Data Exchange (ETDEWEB)

    Fukuda, Shingo [Department of Physics, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Uchihashi, Takayuki; Ando, Toshio [Department of Physics, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Bio-AFM Frontier Research Center, College of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192 (Japan); Core Research for Evolutional Science and Technology of the Japan Science and Technology Agency, 7 Goban-cho, Chiyoda-ku, Tokyo 102-0076 (Japan)

    2015-06-15

    In tip-scan atomic force microscopy (AFM) that scans a cantilever chip in the three dimensions, the chip body is held on the Z-scanner with a holder. However, this holding is not easy for high-speed (HS) AFM because the holder that should have a small mass has to be able to clamp the cantilever chip firmly without deteriorating the Z-scanner’s fast performance, and because repeated exchange of cantilever chips should not damage the Z-scanner. This is one of the reasons that tip-scan HS-AFM has not been established, despite its advantages over sample stage-scan HS-AFM. Here, we present a novel method of cantilever chip holding which meets all conditions required for tip-scan HS-AFM. The superior performance of this novel chip holding mechanism is demonstrated by imaging of the α{sub 3}β{sub 3} subcomplex of F{sub 1}-ATPase in dynamic action at ∼7 frames/s.

  17. Characterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuators

    KAUST Repository

    Rawashdeh, E.; Karam, A.; Foulds, Ian G.

    2012-01-01

    This paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs were tested using a probe station connected to a National Instruments (NI) controller that uses LabVIEW to extract the displacement results via image processing. The displacement results were then used to validate the thermal-electric-structural simulations produced by COMSOL. These results, in turn, were used to extract the stiffness for both actuator types. The data extracted show that chevron actuators can have larger stiffness values with increasing offsets, but at the cost of lower amplification factors. In contrast, kink actuators showed a constant stiffness value equivalent to the chevron actuator with the highest amplification factor. The kink actuator also had larger amplification factors than chevrons at all designs tested. Therefore, kink actuators are capable of longer throws at lower power levels than the standard chevron designs.

  18. Characterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuators

    KAUST Repository

    Rawashdeh, E.

    2012-07-06

    This paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs were tested using a probe station connected to a National Instruments (NI) controller that uses LabVIEW to extract the displacement results via image processing. The displacement results were then used to validate the thermal-electric-structural simulations produced by COMSOL. These results, in turn, were used to extract the stiffness for both actuator types. The data extracted show that chevron actuators can have larger stiffness values with increasing offsets, but at the cost of lower amplification factors. In contrast, kink actuators showed a constant stiffness value equivalent to the chevron actuator with the highest amplification factor. The kink actuator also had larger amplification factors than chevrons at all designs tested. Therefore, kink actuators are capable of longer throws at lower power levels than the standard chevron designs.

  19. Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

    International Nuclear Information System (INIS)

    Cheng, Chao-Lin; Fang, Weileun; Tsai, Ming-Han

    2015-01-01

    Many standard CMOS processes, provided by existing foundries, are available. These standard CMOS processes, with stacking of various metal and dielectric layers, have been extensively applied in integrated circuits as well as micro-electromechanical systems (MEMS). It is of importance to determine the material properties of the metal and dielectric films to predict the performance and reliability of micro devices. This study employs an existing approach to determine the coefficients of thermal expansion (CTEs) of metal and dielectric films for standard CMOS processes. Test cantilevers with different stacking of metal and dielectric layers for standard CMOS processes have been designed and implemented. The CTEs of standard CMOS films can be determined from measurements of the out-of-plane thermal deformations of the test cantilevers. To demonstrate the feasibility of the present approach, thin films prepared by the Taiwan Semiconductor Manufacture Company 0.35 μm 2P4M CMOS process are characterized. Eight test cantilevers with different stacking of CMOS layers and an auxiliary Si cantilever on a SOI wafer are fabricated. The equivalent elastic moduli and CTEs of the CMOS thin films including the metal and dielectric layers are determined, respectively, from the resonant frequency and static thermal deformation of the test cantilevers. Moreover, thermal deformations of cantilevers with stacked layers different to those of the test beams have been employed to verify the measured CTEs and elastic moduli. (paper)

  20. Aluminum nano-cantilevers for high sensitivity mass sensors

    DEFF Research Database (Denmark)

    Davis, Zachary James; Boisen, Anja

    2005-01-01

    We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Further...

  1. PACS—Realization of an adaptive concept using pressure actuated cellular structures

    Science.gov (United States)

    Gramüller, B.; Boblenz, J.; Hühne, C.

    2014-10-01

    A biologically inspired concept is investigated which can be utilized to develop energy efficient, lightweight and applicational flexible adaptive structures. Building a real life morphing unit is an ambitious task as the numerous works in the particular field show. Summarizing fundamental demands and barriers regarding shape changing structures, the basic challenges of designing morphing structures are listed. The concept of Pressure Actuated Cellular Structures (PACS) is arranged within the recent morphing activities and it is shown that it complies with the underlying demands. Systematically divided into energy-related and structural subcomponents the working principle is illuminated and relationships between basic design parameters are expressed. The analytical background describing the physical mechanisms of PACS is presented in concentrated manner. This work focuses on the procedure of dimensioning, realizing and experimental testing of a single cell and a single row cantilever made of PACS. The experimental outcomes as well as the results from the FEM computations are used for evaluating the analytical methods. The functionality of the basic principle is thus validated and open issues are determined pointing the way ahead.

  2. PACS—Realization of an adaptive concept using pressure actuated cellular structures

    International Nuclear Information System (INIS)

    Gramüller, B; Boblenz, J; Hühne, C

    2014-01-01

    A biologically inspired concept is investigated which can be utilized to develop energy efficient, lightweight and applicational flexible adaptive structures. Building a real life morphing unit is an ambitious task as the numerous works in the particular field show. Summarizing fundamental demands and barriers regarding shape changing structures, the basic challenges of designing morphing structures are listed. The concept of Pressure Actuated Cellular Structures (PACS) is arranged within the recent morphing activities and it is shown that it complies with the underlying demands. Systematically divided into energy-related and structural subcomponents the working principle is illuminated and relationships between basic design parameters are expressed. The analytical background describing the physical mechanisms of PACS is presented in concentrated manner. This work focuses on the procedure of dimensioning, realizing and experimental testing of a single cell and a single row cantilever made of PACS. The experimental outcomes as well as the results from the FEM computations are used for evaluating the analytical methods. The functionality of the basic principle is thus validated and open issues are determined pointing the way ahead. (paper)

  3. Design optimization of piezoresistive cantilevers for force sensing in air and water

    Science.gov (United States)

    Doll, Joseph C.; Park, Sung-Jin; Pruitt, Beth L.

    2009-01-01

    Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrated noise over the bandwidth of interest. Existing analytical design methods are insufficient for modeling complex dopant profiles, design constraints, and nonlinear phenomena such as damping in fluid. Here we present an optimization method based on an analytical piezoresistive cantilever model. We use an existing iterative optimizer to minimimize a performance goal, such as minimum detectable force. The design tool is available as open source software. Optimal cantilever design and performance are found to strongly depend on the measurement bandwidth and the constraints applied. We discuss results for silicon piezoresistors fabricated by epitaxy and diffusion, but the method can be applied to any dopant profile or material which can be modeled in a similar fashion or extended to other microelectromechanical systems. PMID:19865512

  4. Development of Robust and Standardized Cantilever Sensors Based on Biotin/Neutravidin Coupling for Antibody Detection

    Directory of Open Access Journals (Sweden)

    Christoph Gerber

    2013-04-01

    Full Text Available A cantilever-based protein biosensor has been developed providing a customizable multilayer platform for the detection of antibodies. It consists of a biotin-terminated PEG layer pre-functionalized on the gold-coated cantilever surface, onto which NeutrAvidin is adsorbed through biotin/NeutrAvidin specific binding. NeutrAvidin is used as a bridge layer between the biotin-coated surface and the biotinylated biomolecules, such as biotinylated bovine serum albumin (biotinylated BSA, forming a multilayer sensor for direct antibody capture. The cantilever biosensor has been successfully applied to the detection of mouse anti-BSA (m-IgG and sheep anti-BSA(s-IgG antibodies. As expected, the average differential surface stress signals of about 5.7 ± 0.8 ´ 10−3 N/m are very similar for BSA/m-IgG and BSA/s-IgG binding, i.e., they are independent of the origin of the antibody. A statistic evaluation of 112 response curves confirms that the multilayer protein cantilever biosensor shows high reproducibility. As a control test, a biotinylated maltose binding protein was used for detecting specificity of IgG, the result shows a signal of bBSA layer in response to antibody is 5.8 ´ 10−3 N/m compared to bMBP. The pre-functionalized biotin/PEG cantilever surface is found to show a long shelf-life of at least 40 days and retains its responsivity of above 70% of the signal when stored in PBS buffer at 4 °C. The protein cantilever biosensor represents a rapid, label-free, sensitive and reliable detection technique for a real-time protein assay.

  5. A novel magnetorheological actuator for micro-motion control: identification of actuating characteristics

    International Nuclear Information System (INIS)

    Kaluvan, Suresh; Kim, Soomin; Choi, Seung-Bok; Thirumavalavan, Vinopraba

    2015-01-01

    A novel actuator using magnetorheological (MR) fluid sandwiched between two electrode type coils is proposed in this research work. The key enabling concept of the proposed actuator is to enhance the force due to the magnetic field produced by the electrode coil using the magnetorheological fluid. The direction and amount of current input to the top and bottom electrode coils decide the characteristics such as contraction, extension and the force generated by the actuator, respectively. To obtain the required displacement and actuation force, the viscosity of the MR fluid sandwiched between the two electrode coils is precisely varied by the input current. In this work, the MR fluid is operated in one of the most powerful modes, called squeeze mode, and hence the designed magnetorheological actuator is more powerful and precise. The experimental results shown in this paper show that it has a great advantage in micron-level displacement and vibration control applications. The main contribution of this innovative magnetorheological actuator design is that it can also behave like a damper. This technology will lead to a new dimension in the design of self-actuation and damping devices. In addition, the proposed magnetorheological actuator has additional advantages such as cost effectiveness and easy implementation. (paper)

  6. Influence of cantilevered sheet pile deflection on adjacent roadways.

    Science.gov (United States)

    2009-06-01

    Cantilevered sheet pile walls are often used adjacent roadways as temporary support during construction. Excess movement of these walls has led to excessive roadway distress causing additional repairs to be necessary. This study assessed the effects ...

  7. Dynamic modelling and experimental study of cantilever beam with clearance

    International Nuclear Information System (INIS)

    Li, B; Jin, W; Han, L; He, Z

    2012-01-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  8. Dynamic modelling and experimental study of cantilever beam with clearance

    Science.gov (United States)

    Li, B.; Jin, W.; Han, L.; He, Z.

    2012-05-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  9. Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems

    Directory of Open Access Journals (Sweden)

    Nadine Noeth

    2013-12-01

    Full Text Available For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN and with different thicknesses. The integration of arrays of holes with different hole size and number of holes allows the modification of device sensitivity, theoretical detection limit and measurement range. For an average flow in the microliter range, the cantilever deflection is directly proportional to the flow rate fluctuations in the microfluidic channel. The SiN cantilevers show a detection limit below 1 nL/min and the thinnest SU-8 cantilevers a detection limit below 5 nL/min. Finally, the sensor is applied for in-line monitoring of flow fluctuations generated by external pumps connected to the microfluidic system.

  10. Consequence of nanofluid on peristaltic transport of a hyperbolic tangent fluid model in the occurrence of apt (tending) magnetic field

    International Nuclear Information System (INIS)

    Akram, Safia; Nadeem, S.

    2014-01-01

    In the current study, sway of nanofluid on peristaltic transport of a hyperbolic tangent fluid model in the incidence of tending magnetic field has been argued. The governing equations of a nanofluid are first modeled and then simplified under lubrication approach. The coupled nonlinear equations of temperature and nano particle volume fraction are solved analytically using a homotopy perturbation technique. The analytical solution of the stream function and pressure gradient are carried out using perturbation technique. The graphical results of the problem under discussion are also being brought under consideration to see the behavior of various physical parameters. - Highlights: • The main motivation of this work is that we want to see the behavior of nanofluids in peristaltic flows. • In literature few articles are available on this, but no article is available in asymmetric channel on the new fluid model hyperbolic tangent fluid. • So we want to fill the gap in literature studying this

  11. Consequence of nanofluid on peristaltic transport of a hyperbolic tangent fluid model in the occurrence of apt (tending) magnetic field

    Energy Technology Data Exchange (ETDEWEB)

    Akram, Safia, E-mail: safia_akram@yahoo.com [Department of Basic Sciences, MCS, National University of Sciences and Technology, Rawalpindi 46000 (Pakistan); Nadeem, S. [Department of Mathematics, Quaid-i-Azam University 45320, Islamabad 44000 (Pakistan)

    2014-05-01

    In the current study, sway of nanofluid on peristaltic transport of a hyperbolic tangent fluid model in the incidence of tending magnetic field has been argued. The governing equations of a nanofluid are first modeled and then simplified under lubrication approach. The coupled nonlinear equations of temperature and nano particle volume fraction are solved analytically using a homotopy perturbation technique. The analytical solution of the stream function and pressure gradient are carried out using perturbation technique. The graphical results of the problem under discussion are also being brought under consideration to see the behavior of various physical parameters. - Highlights: • The main motivation of this work is that we want to see the behavior of nanofluids in peristaltic flows. • In literature few articles are available on this, but no article is available in asymmetric channel on the new fluid model hyperbolic tangent fluid. • So we want to fill the gap in literature studying this.

  12. Self-Latching Piezocomposite Actuator

    Science.gov (United States)

    Wilkie, William K. (Inventor); Bryant, Robert G. (Inventor); Lynch, Christopher S. (Inventor)

    2017-01-01

    A self-latching piezocomposite actuator includes a plurality of shape memory ceramic fibers. The actuator can be latched by applying an electrical field to the shape memory ceramic fibers. The actuator remains in a latched state/shape after the electrical field is no longer present. A reverse polarity electric field may be applied to reset the actuator to its unlatched state/shape. Applied electric fields may be utilized to provide a plurality of latch states between the latched and unlatched states of the actuator. The self-latching piezocomposite actuator can be used for active/adaptive airfoils having variable camber, trim tabs, active/deformable engine inlets, adaptive or adjustable vortex generators, active optical components such as mirrors that change shapes, and other morphing structures.

  13. Atomic force microscope characterization of a resonating nanocantilever

    DEFF Research Database (Denmark)

    Abadal, G.; Davis, Zachary James; Borrise, X.

    2003-01-01

    An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely...

  14. Engineering feasibility evaluation of a peristaltic pinch

    International Nuclear Information System (INIS)

    Boicourt, G.P.

    1977-04-01

    A recent proposal for reducing the end loss of a linear theta pinch is to produce moving magnetic mirrors at the coil ends. The concept entails the sequential pulsing of an axially arranged series of two-turn coaxial coils. The electrical design of such a system presents some unique problems. Ideally, the individual pulse circuits should be completely independent. This would facilitate the design by eliminating interactive effects. In practice, the circuits must be interconnected through isolating inductors to enable the production of a uniform biasing magnetic field. Moreover, the coils must be located physically close together. This produces strong magnetic coupling between the pulse circuits, which can seriously affect the shape and speed of the inward-moving magnetic-mirror field. Possible systems were modeled for the NET-2 circuit analysis code. The models took account of the inductive coupling between the individual circuits in the model. The results show that an increasing magnetic mirror can be produced provided the radius of the theta pinch is not too great compared to the intercoil spacing. The peristaltic field can be maintained for several cycles in the inner coils. The voltage hold-off requirements on the pulse circuit switches are found to be severe, but not impossible to meet

  15. Analysis the effect of different geometries of AFM's cantilever on the dynamic behavior and the critical forces of three-dimensional manipulation

    Energy Technology Data Exchange (ETDEWEB)

    Korayem, Moharam Habibnejad, E-mail: hkorayem@iust.ac.ir; Saraie, Maniya B.; Saraee, Mahdieh B.

    2017-04-15

    An important challenge when using an atomic force microscope (AFM) is to be able to control the force exerted by the AFM for performing various tasks. Nevertheless, the exerted force is proportional to the deflection of the AFM cantilever, which itself is affected by a cantilever's stiffness coefficient. Many papers have been published so far on the methods of obtaining the stiffness coefficients of AFM cantilevers in 2D; however, a comprehensive model is yet to be presented on 3D cantilever motion. The discrepancies between the equations of the 2D and 3D analysis are due to the number and direction of forces and moments that are applied to a cantilever. Moreover, in the 3D analysis, contrary to the 2D analysis, due to the interaction between the forces and moments applied on a cantilever, its stiffness values cannot be separately expressed for each direction; and instead, a stiffness matrix should be used to correctly derive the relevant equations. In this paper, 3D stiffness coefficient matrices have been obtained for three common cantilever geometries including the rectangular, V-shape and dagger-shape cantilevers. The obtained equations are validated by two methods. In the first approach, the Finite Element Method is combined with the cantilever deflection values computed by using the obtained stiffness matrices. In the second approach, by reducing the problem's parameters, the forces applied on a cantilever along different directions are compared with each other in 2D and 3D cases. Then the 3D manipulation of a stiff nanoparticle is modeled and simulated by using the stiffness matrices obtained for the three cantilever geometries. The obtained results indicate that during the manipulation process, the dagger-shaped and rectangular cantilevers exert the maximum and minimum amounts of forces on the stiff nanoparticle, respectively. Also, by examining the effects of different probe tip geometries, it is realized that a probe tip of cylindrical geometry

  16. Difficulties in fitting the thermal response of atomic force microscope cantilevers for stiffness calibration

    International Nuclear Information System (INIS)

    Cole, D G

    2008-01-01

    This paper discusses the difficulties of calibrating atomic force microscope (AFM) cantilevers, in particular the effect calibrating under light fluid-loading (in air) and under heavy fluid-loading (in water) has on the ability to use thermal motion response to fit model parameters that are used to determine cantilever stiffness. For the light fluid-loading case, the resonant frequency and quality factor can easily be used to determine stiffness. The extension of this approach to the heavy fluid-loading case is troublesome due to the low quality factor (high damping) caused by fluid-loading. Simple calibration formulae are difficult to realize, and the best approach is often to curve-fit the thermal response, using the parameters of natural frequency and mass ratio so that the curve-fit's response is within some acceptable tolerance of the actual thermal response. The parameters can then be used to calculate the cantilever stiffness. However, the process of curve-fitting can lead to erroneous results unless suitable care is taken. A feedback model of the fluid–structure interaction between the unloaded cantilever and the hydrodynamic drag provides a framework for fitting a modeled thermal response to a measured response and for evaluating the parametric uncertainty of the fit. The cases of uncertainty in the natural frequency, the mass ratio, and combined uncertainty are presented and the implications for system identification and stiffness calibration using curve-fitting techniques are discussed. Finally, considerations and recommendations for the calibration of AFM cantilevers are given in light of the results of this paper

  17. Cantilever-based sensor with integrated optical read-out using single mode waveguides

    DEFF Research Database (Denmark)

    Nordström, Maria; Zauner, Dan; Calleja, Montserrat

    2007-01-01

    This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its...... surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication...

  18. DESIGN of MICRO CANTILEVER BEAM for VAPOUR DETECTION USING COMSOL MULTI PHYSICS SOFTWARE

    OpenAIRE

    Sivacoumar R; Parvathy JM; Pratishtha Deep

    2015-01-01

    This paper gives an overview of micro cantilever beam of various shapes and materials for vapour detection. The design of micro cantilever beam, analysis and simulation is done for each shape. The simulation is done using COMSOL Multi physics software using structural mechanics and chemical module. The simulation results of applied force and resulting Eigen frequencies will be analyzed for different beam structures. The vapour analysis is done using flow cell that consists of chemical pill...

  19. Fast electrochemical actuator

    International Nuclear Information System (INIS)

    Uvarov, I V; Postnikov, A V; Svetovoy, V B

    2016-01-01

    Lack of fast and strong microactuators is a well-recognized problem in MEMS community. Electrochemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination. Here we demonstrate an actuation regime, for which the gas pressure is relaxed just for 10 μs or so. The actuator consists of a microchamber filled with the electrolyte and covered with a flexible membrane. The membrane bends outward when the pressure in the chamber increases. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed so as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics. (paper)

  20. Electro-actuation characteristics of Cl2 and SF6 plasma-treated IPMC actuators

    International Nuclear Information System (INIS)

    Saher, Saim; Kim, Woojin; Moon, Sungwon; Jin Kim, H; Kim, Yong Hyup

    2010-01-01

    This paper describes plasma treatments that improve the actuation properties by modifying the surface morphology of ionic polymer metal composites (IPMC). The proposed Cl 2 and SF 6 plasmas change the surface appearance of the electroactive polymer, and scanning electron microscopy (SEM) of the plasma-treated surfaces reveals the development of round and cone-shaped microstructures. After electroless chemical metal plating, these microstructures significantly alter the characteristics of the IPMC electrode. In plasma-treated IPMCs, the densely packed platinum nanoparticles have produced a relatively thick electrode layer. This configuration has led to the improvement in the electrical properties of the IPMC: surface resistance is noticeably decreased, whereas electrical capacitance is increased. These changes in the electrical properties have considerably enhanced the actuation parameters: displacement, force and operational life are increased by more than three times relative to the conventional IPMC. Our experimental data suggest a relationship between the IPMC actuator's electrical properties and actuation parameters: actuators with lower surface resistance generate large deflection and actuators with higher capacitance generate large actuation force. The actuation tests including coin lifting suggests the potential of the modified IPMC for artificial muscle applications

  1. Measurement of contractile stress generated by cultured rat muscle on silicon cantilevers for toxin detection and muscle performance enhancement.

    Directory of Open Access Journals (Sweden)

    Kerry Wilson

    2010-06-01

    Full Text Available To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications.We have demonstrated a biological microelectromechanical system (BioMEMS based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT, the time to half relaxation ((1/2RT were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and (1/2RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine.The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery applications.

  2. Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

    Science.gov (United States)

    Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

    2018-04-01

    This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

  3. Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes

    Science.gov (United States)

    Hsu, Wei-Chun; Tong, Jonathan Kien-Kwok; Liao, Bolin; Chen, Gang

    2015-04-21

    A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.

  4. Digital Actuator Technology

    Energy Technology Data Exchange (ETDEWEB)

    Ken Thomas; Ted Quinn; Jerry Mauck; Richard Bockhorst

    2014-09-01

    There are significant developments underway in new types of actuators for power plant active components. Many of these make use of digital technology to provide a wide array of benefits in performance of the actuators and in reduced burden to maintain them. These new product offerings have gained considerable acceptance in use in process plants. In addition, they have been used in conventional power generation very successfully. This technology has been proven to deliver the benefits promised and substantiate the claims of improved performance. The nuclear industry has been reluctant to incorporate digital actuator technology into nuclear plant designs due to concerns due to a number of concerns. These could be summarized as cost, regulatory uncertainty, and a certain comfort factor with legacy analog technology. The replacement opportunity for these types of components represents a decision point for whether to invest in more modern technology that would provide superior operational and maintenance benefits. Yet, the application of digital technology has been problematic for the nuclear industry, due to qualification and regulatory issues. With some notable exceptions, the result has been a continuing reluctance to undertake the risks and uncertainties of implementing digital actuator technology when replacement opportunities present themselves. Rather, utilities would typically prefer to accept the performance limitations of the legacy analog actuator technologies to avoid impacts to project costs and schedules. The purpose of this report is to demonstrate that the benefits of digital actuator technology can be significant in terms of plant performance and that it is worthwhile to address the barriers currently holding back the widespread development and use of this technology. It addresses two important objectives in pursuit of the beneficial use of digital actuator technology for nuclear power plants: 1. To demonstrate the benefits of digital actuator

  5. Study on Vibration of Heavy-Precision Robot Cantilever Based on Time-varying Glowworm Swarm Optimization Algorithm

    Science.gov (United States)

    Luo, T. H.; Liang, S.; Miao, C. B.

    2017-12-01

    A method of terminal vibration analysis based on Time-varying Glowworm Swarm Optimization algorithm is proposed in order to solve the problem that terminal vibration of the large flexible robot cantilever under heavy load precision.The robot cantilever of the ballastless track is used as the research target and the natural parameters of the flexible cantilever such as the natural frequency, the load impact and the axial deformation is considered. Taking into account the change of the minimum distance between the glowworm individuals, the terminal vibration response and adaptability could meet. According to the Boltzmann selection mechanism, the dynamic parameters in the motion simulation process are determined, while the influence of the natural frequency and the load impact as well as the axial deformation on the terminal vibration is studied. The method is effective and stable, which is of great theoretical basis for the study of vibration control of flexible cantilever terminal.

  6. Determination of Fluid Density and Viscosity by Analyzing Flexural Wave Propagations on the Vibrating Micro-Cantilever

    Directory of Open Access Journals (Sweden)

    Deokman Kim

    2017-10-01

    Full Text Available The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone, and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases.

  7. A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

    Directory of Open Access Journals (Sweden)

    Tobias Meier

    2015-02-01

    Full Text Available We describe an atomic force microscope (AFM for the characterization of self-sensing tunneling magnetoresistive (TMR cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm3 is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm3. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the deflection of the cantilevers independently. The instrument is based on a commercial AFM controller and capable to perform large-area scanning directly without stitching of images. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.

  8. Cantilever steel post damaged by wind

    Directory of Open Access Journals (Sweden)

    Wei Sha

    2014-10-01

    Full Text Available An analysis for the cause of fracture failure of a cantilever steel sign post damaged by wind has been carried out. An unusual cause of failure has been identified, which is the subject of this paper. Microscopy and microanalysis of the fracture surface showed that the failure was due to pre-existing cracks, from the fabrication of the post. This conclusion was reached after detecting and analysing a galvanised layer on the fracture surfaces.

  9. Cylindrical Piezoelectric Fiber Composite Actuators

    Science.gov (United States)

    Allison, Sidney G.; Shams, Qamar A.; Fox, Robert L.

    2008-01-01

    The use of piezoelectric devices has become widespread since Pierre and Jacques Curie discovered the piezoelectric effect in 1880. Examples of current applications of piezoelectric devices include ultrasonic transducers, micro-positioning devices, buzzers, strain sensors, and clocks. The invention of such lightweight, relatively inexpensive piezoceramic-fiber-composite actuators as macro fiber composite (MFC) actuators has made it possible to obtain strains and displacements greater than those that could be generated by prior actuators based on monolithic piezoceramic sheet materials. MFC actuators are flat, flexible actuators designed for bonding to structures to apply or detect strains. Bonding multiple layers of MFC actuators together could increase force capability, but not strain or displacement capability. Cylindrical piezoelectric fiber composite (CPFC) actuators have been invented as alternatives to MFC actuators for applications in which greater forces and/or strains or displacements may be required. In essence, a CPFC actuator is an MFC or other piezoceramic fiber composite actuator fabricated in a cylindrical instead of its conventional flat shape. Cylindrical is used here in the general sense, encompassing shapes that can have circular, elliptical, rectangular or other cross-sectional shapes in the planes perpendicular to their longitudinal axes.

  10. Actuators for smart applications

    NARCIS (Netherlands)

    Paternoster, Alexandre; de Boer, Andries; Loendersloot, Richard; Akkerman, Remko; D. Brei,; M. Frecker,

    2010-01-01

    Actuator manufacturers are developing promising technologies which meet high requirements in performance, weight and power consumption. Conventionally, actuators are characterized by their displacement and load performance. This hides the dynamic aspects of those actuation solutions. Work per weight

  11. Energy harvesting from the interaction of a Lamb dipole with a flexible cantilever

    Science.gov (United States)

    Tang, Hui; Wang, Chenglei

    2017-11-01

    Energy harvesting from interactions of coherent flow structures with flexible solid structures can be used for powering miniature electronic devices. Although effective, the fundamental mechanism of such an energy extraction process has not been fully understood. Therefore, this study aims to provide more physical insights into this problem. The coherent flow structure is represented by a Lamb dipole, and the solid structure is assumed as a two-dimensional flexible cantilever. The cantilever is placed along the propagation direction of the dipole, with its fixed end initially towards or away from the dipole and its lateral distance from the dipole center varied. As the dipole passes through the cantilever, the latter can extract energy from the former through effective interactions. Such a two-dimensional fluid-structure interaction problem is numerically studied at a low Reynolds number of 200 using a lattice Boltzmann method (LBM) based numerical framework. The simulation results reveal that the flexible cantilever with a moderate stiffness is more beneficial to the energy harvesting, and it can scavenge more energy from the ambient vortices when its fixed end is initially away from the dipole with a relatively small lateral distance. The authors gratefully acknowledge the financial support for this study from the Research Grants Council of Hong Kong under General Research Fund (Project No. PolyU 152493/16E).

  12. Dynamic actuation of a novel laser-processed NiTi linear actuator

    International Nuclear Information System (INIS)

    Pequegnat, A; Daly, M; Wang, J; Zhou, Y; Khan, M I

    2012-01-01

    A novel laser processing technique, capable of locally modifying the shape memory effect, was applied to enhance the functionality of a NiTi linear actuator. By altering local transformation temperatures, an additional memory was imparted into a monolithic NiTi wire to enable dynamic actuation via controlled resistive heating. Characterizations of the actuator load, displacement and cyclic properties were conducted using a custom-built spring-biased test set-up. Monotonic tensile testing was also implemented to characterize the deformation behaviour of the martensite phase. Observed differences in the deformation behaviour of laser-processed material were found to affect the magnitude of the active strain. Furthermore, residual strain during cyclic actuation testing was found to stabilize after 150 cycles while the recoverable strain remained constant. This laser-processed actuator will allow for the realization of new applications and improved control methods for shape memory alloys. (paper)

  13. Peristaltic transport of Bingham plastic fluid considering magnetic field, Soret and Dufour effects

    Directory of Open Access Journals (Sweden)

    T. Hayat

    Full Text Available Current attempt addresses the peristaltic transport of Bingham plastic fluid under the influence of magnetic force. Space dependent viscosity is considered. Novel Soret and Dufour effects are retained in the mathematical model. Problem formulation is presented through the conventional lubrication approach. Series solutions of the arising non-linear problem are developed via regular perturbation approach. Special attention is given to the role of embedded parameters on the axial velocity, temperature, concentration and pressure distributions. Furthermore the numerical solution of pressure rise per wavelength is obtained through numerical integration because its analytical solution seems impossible. Keywords: Bingham fluid, Variable viscosity, MHD and Joule heating, Soret and Dufour effects

  14. Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

    Science.gov (United States)

    Cho, Hyunok; Park, Jongcheol; Park, Jae Yeong

    2017-12-01

    This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it with ICs. The d33 piezoelectric mode was applied to achieve a large output voltage by using inter-digitated electrodes, and the PZT thin film on polyimide layer has a remnant polarization and coercive filed of approximately 2 P r = 47.9 μC/cm2 and 2 E c = 78.8 kV/cm, respectively. The relative dielectric constant was 900. The fabricated micro-electromechanical systems energy harvester generated output voltages of 1.2 V and output power of 117 nW at its optimal resistive load of 6.6 MΩ from its resonant frequency of 97.8 Hz with an acceleration of 5 m/s2.

  15. System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

    OpenAIRE

    Felix Ströer; Katharina Trinkaus; Indek Raid; Jörg Seewig

    2018-01-01

    Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective de...

  16. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    Science.gov (United States)

    Yi, Zhenxiang; Liao, Xiaoping

    2013-03-01

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

  17. Fabrication and actuation of electro-active polymer actuator based on PSMI-incorporated PVDF

    Science.gov (United States)

    Lu, Jun; Kim, Sang-Gyun; Lee, Sunwoo; Oh, Il-Kwon

    2008-08-01

    In this study, an ionic networking membrane (INM) of poly(styrene-alt-maleimide) (PSMI)-incorporated poly(vinylidene fluoride) (PVDF) was applied to fabricate electro-active polymer. Based on the same original membrane of PSMI-incorporated PVDF, various samples of INM actuator were prepared for different reduction times with the electroless-plating technique. The as-prepared INM actuators were tested in terms of surface resistance, platinum morphology, resonance frequency, tip displacement, current and blocked force, and their performances were compared to those of the widely used traditional Nafion actuator. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) revealed that much smaller and more uniform platinum particles were formed on the surfaces of the INM actuators as well as within their polymer matrix. Although excellent harmonic responses were observed for the newly developed INM actuators, they were found to be sensitive to the applied reduction times during the fabrication. The mechanical displacement of the INM actuator fabricated after the optimum reduction times was much larger than that of its Nafion counterpart of comparable thickness under the stimulus of constant and alternating current voltage. The PSMI-incorporated PVDF actuator can become a promising smart material to be used in the fields of biomimetic robots, biomedical devices, sensors and actuator, haptic interfaces, energy harvesting and so on.

  18. Fabrication and actuation of electro-active polymer actuator based on PSMI-incorporated PVDF

    International Nuclear Information System (INIS)

    Lu, Jun; Oh, Il-Kwon; Kim, Sang-Gyun; Lee, Sunwoo

    2008-01-01

    In this study, an ionic networking membrane (INM) of poly(styrene-alt-maleimide) (PSMI)-incorporated poly(vinylidene fluoride) (PVDF) was applied to fabricate electro-active polymer. Based on the same original membrane of PSMI-incorporated PVDF, various samples of INM actuator were prepared for different reduction times with the electroless-plating technique. The as-prepared INM actuators were tested in terms of surface resistance, platinum morphology, resonance frequency, tip displacement, current and blocked force, and their performances were compared to those of the widely used traditional Nafion actuator. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) revealed that much smaller and more uniform platinum particles were formed on the surfaces of the INM actuators as well as within their polymer matrix. Although excellent harmonic responses were observed for the newly developed INM actuators, they were found to be sensitive to the applied reduction times during the fabrication. The mechanical displacement of the INM actuator fabricated after the optimum reduction times was much larger than that of its Nafion counterpart of comparable thickness under the stimulus of constant and alternating current voltage. The PSMI-incorporated PVDF actuator can become a promising smart material to be used in the fields of biomimetic robots, biomedical devices, sensors and actuator, haptic interfaces, energy harvesting and so on

  19. Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement

    International Nuclear Information System (INIS)

    Yu Haitao; Li Xinxin; Gan Xiaohua; Liu Yongjing; Liu Xiang; Xu Pengcheng; Li Jungang; Liu Min

    2009-01-01

    With an integrated resonance exciting heater and a self-sensing piezoresistor, resonant micro-cantilever bio/chemical sensors are optimally designed and fabricated by micromachining techniques. This study is emphasized on the optimization of the integrated heating resistor. Previous research has put the heater at either the cantilever clamp end, the midpoint or the free end. Aiming at sufficiently high and stable resonant amplitude, our research indicates that the optimized location of the thermal-electric exciting resistor is the clamp end instead of other positions. By both theoretical analysis and resonance experiments where three heating resistors are placed at the three locations of the fabricated cantilever, it is clarified that the clamp end heating provides the most efficient resonance excitation in terms of resonant amplitude, Q-factor and resonance stability. Besides, the optimized combination of dc bias and ac voltage is determined by both analysis and experimental verification. With the optimized heating excitation, the resonant cantilever is used for biotin–avidin-specific detection, resulting in a ±0.1 Hz ultra-low noise floor of the frequency signal and a 130 fg mass resolution. In addition to resonance excitation, the heater is used to heat up the cantilever for speed-up desorption after detection that helps rapid and repeated sensing to chemical vapor. The clamp end is determined (by simulation) as the optimal heating location for uniform temperature distribution on the cantilever. Using the resonant cantilever, a rapid and repeated sensing experiment on dimethyl methylphosphonate (DMMP) vapor shows that a short-period heating at the detection interval significantly quickens the signal recovery and enhances the sensing repeatability

  20. Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

    Directory of Open Access Journals (Sweden)

    Rui Zhao

    2018-02-01

    Full Text Available In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene/poly (styrene sulfonate (PEDOT/PSS was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10−7 nm−1, respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG. The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.