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Sample records for 2d capacitive micromachined

  1. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  2. Acoustic lens for capacitive micromachined ultrasonic transducers

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  3. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  4. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  5. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as poly...

  6. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally ...

  7. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.

    Lani, Shane W; Wasequr Rashid, M; Hasler, Jennifer; Sabra, Karim G; Levent Degertekin, F

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range. PMID:24753623

  8. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  9. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  10. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer.

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-12-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  11. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  12. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  13. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  14. A surface-micromachined capacitive microphone with improved sensitivity

    We present a surface-micromachined capacitive microphone with a membrane center hole and back-plate supports. The proposed membrane center hole reduces air damping at the center of the membrane and increases the sensitivity and frequency response. The back-plate supports allow for a deep back-chamber and prevent deformation of the back-plate. The proposed microelectromechanical-system (MEMS) microphone is fabricated using fully CMOS-compatible processes. The fabricated MEMS microphone has a membrane 500 µm in diameter and a center hole 30 µm in diameter. A deep back-chamber with a depth of 100 µm is formed by the back-plate supporting structures. During fabrication, the residual stress of the membrane is minimized using PECVD silicon nitride inserted in the metal membrane. The measured residual stress of the sensing membrane is 14.8 MPa. Acoustic measurements show that the sensitivity of the microphone is −49.1 dBV Pa−1 @1 kHz at a 12 V dc bias voltage, which is in good agreement with the calculated value. (paper)

  15. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  16. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten;

    2010-01-01

    In the last decades, pressure sensors have been one of the greatest successes of the MEMS industry. Many companies are using them in a variety of applications from the automotive to the environmental field. Currently piezoresistive pressure sensors are the most developed, and a well established...... technology to design and fabricate these sensors has been implemented. Capacitive pressure sensing, on the other hand, is still an open and really promising field. Results Capacitive microsensors were designed and fabricated (Fig. 1) and an analytical model for touch mode regime, which fitted accurately the...... is therefore to develop new technologies based on capacitive sensing to be able to fulfil future requirements in this field....

  17. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Zhikang Li; Libo Zhao; Zhuangde Jiang; Sina Akhbari; Jianjun Ding; Yihe Zhao; Yulong Zhao; Liwei Lin

    2015-01-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency ...

  18. Probing 2D black phosphorus by quantum capacitance measurements.

    Kuiri, Manabendra; Kumar, Chandan; Chakraborty, Biswanath; Gupta, Satyendra N; Naik, Mit H; Jain, Manish; Sood, A K; Das, Anindya

    2015-12-01

    Two-dimensional materials and their heterostructures have emerged as a new class of materials, not only for fundamental physics but also for electronic and optoelectronic applications. Black phosphorus (BP) is a relatively new addition to this class of materials. Its strong in-plane anisotropy makes BP a unique material for making conceptually new types of electronic devices. However, the global density of states (DOS) of BP in device geometry has not been measured experimentally. Here, we report the quantum capacitance measurements together with the conductance measurements on an hBN-protected few-layer BP (∼six layers) in a dual-gated field effect transistor (FET) geometry. The measured DOS from our quantum capacitance is compared with density functional theory (DFT). Our results reveal that the transport gap for quantum capacitance is smaller than that in conductance measurements due to the presence of localized states near the band edge. The presence of localized states is confirmed by the variable range hopping seen in our temperature dependence conductivity. A large asymmetry is observed between the electron and hole side. This asymmetric nature is attributed to the anisotropic band dispersion of BP. Our measurements establish the uniqueness of quantum capacitance in probing the localized states near the band edge, hitherto not seen in conductance measurements. PMID:26559656

  19. Micromachined capacitive pressure sensor with signal conditioning electronics

    Fragiacomo, Giulio

    possible solution in many cases where, for example, the dimensions of the sensing element is the limiting factor. Furthermore, MEMS can significantly reduce costs and power consumption being the best candidate for consumer electronics such as mobile phones and cameras, or for the automotive industry where...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump....... This demonstrator has been characterized and presented at Grundfos Direct Sensors A/S and constitute the preliminary work for a new product which is intended target the low power or wireless pressure sensor for harsh environment market....

  20. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole;

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sensor...... with a discrete components electronics circuit for signal conditioning. Using an AC bridge electronics circuit a resolution of 8 mV/mbar is achieved. The large signal is obtained due to a novel membrane structure utilizing closely packed hexagonal elements. The sensor is fabricated in a process based...

  1. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  2. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

    Cheng-Yang Lin

    2015-11-01

    Full Text Available The study investigates the design and fabrication of a micromachined radio frequency (RF capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW lines. In order to reduce the actuation voltage of the switch, the springs are designed as low stiffness. The finite element method (FEM software CoventorWare is used to simulate the actuation voltage and displacement of the switch. The micromachined switch needs a post-CMOS process to release the springs and membrane. A wet etching is employed to etch the sacrificial silicon dioxide layer, and to release the membrane and springs of the switch. Experiments show that the pull-in voltage of the switch is 12 V. The switch has an insertion loss of 0.8 dB at 36 GHz and an isolation of 19 dB at 36 GHz.

  3. Micromachining.

    Park, Bob; Lamson, Bob; Lowell, Dave

    2002-03-01

    Components and features can be made in a number of ways. This article describes the different micromachining processes and what they can achieve in terms of precision, repeatability and cost savings. PMID:11984992

  4. Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

    Hall, Neal A; Lee, Wook; Degertekin, F Levent

    2003-11-01

    Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz. PMID:14682641

  5. Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

    Barauskas, Dovydas; Pelenis, Donatas; Virzonis, Darius; Baltrus, John P; Baltrusaitis, Jonas

    2016-07-01

    We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas. PMID:27321769

  6. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

    Nguyen Van Toan

    2016-04-01

    Full Text Available This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

  7. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  8. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  9. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  10. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s−1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa−1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  11. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques

    Rubaiyet Iftekharul Haque; Erick Ogam; Christophe Loussert; Patrick Benaben; Xavier Boddaert

    2015-01-01

    A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive ...

  12. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  13. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement.

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  14. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Akhbari, Sina; Ding, Jianjun; Zhao, Yihe; Zhao, Yulong; Lin, Liwei

    2015-12-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  15. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  16. Radiation impedance study of a capacitive micromachined ultrasonic transducer by finite element analysis.

    Bayram, Baris

    2015-08-01

    In this study, radiation impedance of a capacitive micromachined ultrasonic transducer composed of square-shaped membranes arranged in m × m configuration (m = 1 - 5) is investigated using finite element analysis (FEA) of a commercially available software package(ANSYS). Radiation impedance is calculated for immersed membranes operating in conventional and collapse modes. Individual membrane response within the multi-membrane configuration is analyzed, and excited modes and their effects on radiation impedance and the pressure spectra are reported. This FEA provides an accurate behavior of the acoustic coupling of a thin membrane in a multi-membrane configuration, and extends above the anti-resonance frequency. The first resonance frequency of the membrane is excited for m × m (m ≥ 3) configuration in conventional mode and for m × m (m ≥ 2) configuration in collapse mode. Therefore, this frequency is determined to be responsible for the adverse effects observed in radiation impedance and pressure spectrum. A membrane configuration, which is missing the central membrane from the full m × m configuration is proposed, and is investigated with the FEA. This study is beneficial for the design of precise transducers suited for biomedical applications. PMID:26328680

  17. Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

    Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

  18. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Zhikang Li

    2015-12-01

    Full Text Available Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  19. The effect of hydrazine intercalation on the structure and capacitance of 2D titanium carbide (MXene)

    Mashtalir, O.; Lukatskaya, M. R.; Kolesnikov, A. I.; Raymundo-Piñero, E.; Naguib, M.; Barsoum, M. W.; Gogotsi, Y.

    2016-04-01

    Herein we show that hydrazine intercalation into 2D titanium carbide (Ti3C2-based MXene) results in changes in its surface chemistry by decreasing the amounts of fluorine, OH surface groups and intercalated water. It also creates a pillaring effect between Ti3C2Tx layers pre-opening the structure and improving the accessability to active sites. The hydrazine treated material has demonstrated a greatly improved capacitance of 250 F g-1 in acidic electrolytes with an excellent cycling ability for electrodes as thick as 75 μm.Herein we show that hydrazine intercalation into 2D titanium carbide (Ti3C2-based MXene) results in changes in its surface chemistry by decreasing the amounts of fluorine, OH surface groups and intercalated water. It also creates a pillaring effect between Ti3C2Tx layers pre-opening the structure and improving the accessability to active sites. The hydrazine treated material has demonstrated a greatly improved capacitance of 250 F g-1 in acidic electrolytes with an excellent cycling ability for electrodes as thick as 75 μm. Electronic supplementary information (ESI) available: Characterization methods, additional XRD patterns (Fig. S1) and INS spectra (Fig. S2-S4). See DOI: 10.1039/c6nr01462c

  20. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques

    Rubaiyet Iftekharul Haque

    2015-10-01

    Full Text Available A capacitive acoustic resonator developed by combining three-dimensional (3D printing and two-dimensional (2D printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.

  1. Fabrication of capacitive acoustic resonators combining 3D printing and 2D inkjet printing techniques.

    Haque, Rubaiyet Iftekharul; Ogam, Erick; Loussert, Christophe; Benaben, Patrick; Boddaert, Xavier

    2015-01-01

    A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency. PMID:26473878

  2. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

    Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

    2016-06-01

    A fast 2D axisymmetric fluid-analytical multifrequency capacitively coupled plasma (CCP) reactor code is used to study center high nonuniformity in a low pressure electronegative chlorine discharge. In the code, a time-independent Helmholtz wave equation is used to solve for the capacitive fields in the linearized frequency domain. This eliminates the time dependence from the electromagnetic (EM) solve, greatly speeding up the simulations at the cost of neglecting higher harmonics. However, since the code allows up to three driving frequencies, we can add the two most important harmonics to the CCP simulations as the second and third input frequencies. The amplitude and phase of these harmonics are estimated by using a recently developed 1D radial nonlinear transmission line (TL) model of a highly asymmetric cylindrical discharge (Lieberman et al 2015 Plasma Sources Sci. Technol. 24 055011). We find that at higher applied frequencies, the higher harmonics contribute significantly to the center high nonuniformity due to their shorter plasma wavelengths.

  3. 2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor

    Kim, Ho Jun; Lee, Hae June

    2016-06-01

    The wide applicability of capacitively coupled plasma (CCP) deposition has increased the interest in developing comprehensive numerical models, but CCP imposes a tremendous computational cost when conducting a transient analysis in a three-dimensional (3D) model which reflects the real geometry of reactors. In particular, the detailed flow features of reactive gases induced by 3D geometric effects need to be considered for the precise calculation of radical distribution of reactive species. Thus, an alternative inclusive method for the numerical simulation of CCP deposition is proposed to simulate a two-dimensional (2D) CCP model based on the 3D gas flow results by simulating flow, temperature, and species fields in a 3D space at first without calculating the plasma chemistry. A numerical study of a cylindrical showerhead-electrode CCP reactor was conducted for particular cases of SiH4/NH3/N2/He gas mixture to deposit a hydrogenated silicon nitride (SiN x H y ) film. The proposed methodology produces numerical results for a 300 mm wafer deposition reactor which agree very well with the deposition rate profile measured experimentally along the wafer radius.

  4. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  5. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed in the...

  6. Noninvasive real-time 2D imaging of temperature distribution during the plastic pellet cooling process by using electrical capacitance tomography

    This study has launched a concept to image a real-time 2D temperature distribution noninvasively by a combination of the electrical capacitance tomography (ECT) technique and a permittivity-temperature calibration equation for the plastic pellet cooling process. The concept has two steps, which are the relative permittivity calculation from the measured capacitance among the many electrodes by the ECT technique, and the temperature distribution imaging from the relative permittivity by the permittivity-temperature calibration equation. An ECT sensor with 12 electrodes was designed to image the cross-sectional temperature distribution during the polymethyl methacrylate pellets cooling process. The images of temperature distribution were successfully reconstructed from the relative permittivity distribution at every time step during the process. The images reasonably indicate the temperature diffusion in a 2D space and time within a 0.0065 and 0.0175 time-dependent temperature deviation, as compared to an analytical thermal conductance simulation and thermocouple measurement. (paper)

  7. Noninvasive real-time 2D imaging of temperature distribution during the plastic pellet cooling process by using electrical capacitance tomography

    Hirose, Yusuke; Sapkota, Achyut; Sugawara, Michiko; Takei, Masahiro

    2016-01-01

    This study has launched a concept to image a real-time 2D temperature distribution noninvasively by a combination of the electrical capacitance tomography (ECT) technique and a permittivity-temperature calibration equation for the plastic pellet cooling process. The concept has two steps, which are the relative permittivity calculation from the measured capacitance among the many electrodes by the ECT technique, and the temperature distribution imaging from the relative permittivity by the permittivity-temperature calibration equation. An ECT sensor with 12 electrodes was designed to image the cross-sectional temperature distribution during the polymethyl methacrylate pellets cooling process. The images of temperature distribution were successfully reconstructed from the relative permittivity distribution at every time step during the process. The images reasonably indicate the temperature diffusion in a 2D space and time within a 0.0065 and 0.0175 time-dependent temperature deviation, as compared to an analytical thermal conductance simulation and thermocouple measurement.

  8. Fully parameterized model of a voltage-driven capacitive coupled micromachined ohmic contact switch for RF applications

    A comprehensive and completely parameterized model is proposed to determine the related electrical and mechanical dynamic system response of a voltage-driven capacitive coupled micromechanical switch. As an advantage over existing parameterized models, the model presented in this paper returns within few seconds all relevant system quantities necessary to design the desired switching cycle. Moreover, a sophisticated and detailed guideline is given on how to engineer a MEMS switch. An analytical approach is used throughout the modelling, providing representative coefficients in a set of two coupled time-dependent differential equations. This paper uses an equivalent mass moving along the axis of acceleration and a momentum absorption coefficient. The model describes all the energies transferred: the energy dissipated in the series resistor that models the signal attenuation of the bias line, the energy dissipated in the squeezed film, the stored energy in the series capacitor that represents a fixed separation in the bias line and stops the dc power in the event of a short circuit between the RF and dc path, the energy stored in the spring mechanism, and the energy absorbed by mechanical interaction at the switch contacts. Further, the model determines the electrical power fed back to the bias line. The calculated switching dynamics are confirmed by the electrical characterization of the developed RF switch. The fabricated RF switch performs well, in good agreement with the modelled data, showing a transition time of 7 µs followed by a sequence of bounces. Moreover, the scattering parameters exhibit an isolation in the off-state of >8 dB and an insertion loss in the on-state of <0.6 dB up to frequencies of 50 GHz. The presented model is intended to be integrated into standard circuit simulation software, allowing circuit engineers to design the switch bias line, to minimize induced currents and cross actuation, as well as to find the mechanical structure dimensions

  9. Micromachined Integrated Transducers for Ultrasound Imaging

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  10. Silicon Micromachining

    Elwenspoek, Miko; Jansen, Henri V.

    2004-08-01

    This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

  11. 微机械加工硅电容式加速度传感器%A silicon capacitive acceleration sensor made in micromachining technology

    李跃进; 杨银堂; 朱作云; 马晓华; 陈锦杜

    2001-01-01

    The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10-4 magnitude is reached under a range of 20 gn.%介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器,它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为20?gn,线性度为10-4量级。

  12. Optical Micromachining

    1998-01-01

    Under an SBIR (Small Business Innovative Research) with Marshall Space Flight Center, Potomac Photonics, Inc., constructed and demonstrated a unique tool that fills a need in the area of diffractive and refractive micro-optics. It is an integrated computer-aided design and computer-aided micro-machining workstation that will extend the benefits of diffractive and micro-optic technology to optical designers. Applications of diffractive optics include sensors and monitoring equipment, analytical instruments, and fiber optic distribution and communication. The company has been making diffractive elements with the system as a commercial service for the last year.

  13. Micromachined Silicon Cantilever Magnetometry.

    Chaparala, M. V.

    1998-03-01

    Magnetic torque measurements give us a simple and attractive method for characterizing the anisotropic properties of magnetic materials. Silicon torque and force magnetometers have many advantages over traditional torsion fiber torque magnetometers. We have fabricated micromachined silicon torque and force magnetometers employing both capacitive(``Capacitance platform magnetometer for thin film and small crystal superconductor studies'', M. Chaparala et al.), AIP Conf. Proc. (USA), AIP Conference Proceedings, no.273, p. 407 1993. and strain dependent FET detection(``Strain Dependent Characterstics of Silicon MOSFETs and their Applications'', M. Chaparala et al.), ISDRS Conf. Proc. 1997. schemes which realize some of these gains. We will present the pros and cons of each of the different detection schemes and the associated design constraints. We have developed a feedback scheme which enables null detection thus preserving the integrity of the sample orientation. We will present a method of separating out the torque and force terms in the measured signals and will discuss the errors associated with each of the designs. Finally, we present the static magnetic torque measurements on various materials with these devices, including equilibrium properties on sub microgram specimens of superconductors, and dHvA measurements near H_c2. We will also discuss their usefulness in pulsed magnetic fields(``Cantilever magnetometry in pulsed magnetic fields", M. J. Naughton et al.), Rev. of Sci. Instrum., vol.68, p. 4061 1997..

  14. Micromachined pressure sensors: Review and recent developments

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  15. Technology trends in high temperature pressure transducers: The impact of micromachining

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  16. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    Wei, J; Chen, Z.L.; Liu, Z. W.; Sarro, P. M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2 fF. A high performance measurement setup based on lock-in principle is developed to detect the capacitance variation. The maximum capacitance variatio...

  17. Wideband micromachined microphones with radio frequency detection

    Hansen, Sean Thomas

    There are many commercial, scientific, and military applications for miniature wideband acoustic sensors, including monitoring the condition or wear of equipment, collecting scientific data, and identifying and localizing military targets. The application of semiconductor micromachining techniques to sensor fabrication has the potential to transform acoustic sensing with small, reproducible, and inexpensive silicon-based microphones. However, such sensors usually suffer from limited bandwidth and from non-uniformities in their frequency response due to squeeze-film damping effects and narrow air gaps. Furthermore, they may be too fragile to be left unattended in a humid or dusty outdoor environment. Silicon microphones that incorporate capacitive micromachined ultrasonic transducer membranes overcome some of the drawbacks of conventional microphones. These micromachined membranes are small and robust enough to be vacuum-sealed, and can withstand atmospheric pressure and submersion in water. In addition, the membrane mechanical response is flat from dc up to ultrasonic frequencies, resulting in a wideband sensor for accurate spectral analysis of acoustic signals. However, a sensitive detection scheme is necessary to detect the small changes in membrane displacement that result from using smaller, stiffer membranes than do conventional microphones. We propose a radio frequency detection technique, in which the capacitive membranes are incorporated into a transmission line. Variations in membrane capacitance due to impinging sound pressure are sensed through the phase variations of a carrier signal that propagates along the line. This dissertation examines the design, fabrication, modeling, and experimental measurements of wideband micromachined microphones using sealed ultrasonic membranes and RF detection. Measurements of fabricated microphones demonstrate less than 0.5 dB variation in their output responses between 0.1 Hz to 100 kHz under electrostatic actuation of

  18. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    Wei, J.; Chen, Z.L.; Liu, Z.W.; Sarro, P.M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the

  19. Micro-machining.

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining. PMID:22802498

  20. Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers.

    Liu, Changgeng; Djuth, Frank T; Zhou, Qifa; Shung, K Kirk

    2013-12-01

    Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and assembling an electronic interconnection board for transmission and reception from the array. To establish the feasibility of the process flow, a hybrid test ultrasound array transducer consisting of a 2-D array having an 8 × 8 element pattern and a 5-element annular array was designed, fabricated, and assessed. The arrays are designed for a center frequency of ~60 MHz. The 2-D array elements are 105 × 105 μm in size with 5-μm kerfs between elements. The annular array surrounds the square 2-D array and provides the option of transmitting from the annular array and receiving with the 2-D array. Each annular array element has an area of 0.71 mm(2) with a 16-μm kerf between elements. The active piezoelectric material is (1 - x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT)/epoxy 1-3 composite with a PMN-PT pillar lateral dimension of 8 μm and an average gap width of ~4 μm, which was produced by deep reactive ion etching (DRIE) dry etching techniques. A novel electric interconnection strategy for high-density, small-size array elements was proposed. After assembly, the array transducer was tested and characterized. The capacitance, pulse-echo responses, and crosstalk were measured for each array element. The desired center frequency of ~60 MHz was achieved and the -6-dB bandwidth of the received signal was ~50%. At the center frequency, the crosstalk between adjacent 2-D array elements was about -33 dB. The techniques described herein can be used to build larger arrays containing smaller elements. PMID:24297027

  1. Micromachining for Microelectromechanical Systems

    K.N. Bhat

    1998-01-01

    Full Text Available The various micromachining processes required for micro engineering and for the successful realisation of micro eletro mechanical systems on Si are presented. The techniques presented include bulk and surface micro machining, Si fusion bonding, and the lithography, electroforming and micromoulding (LIGA process. The paper also includes discussion on the markets, applications and future trends for micro enginerated products.

  2. Micromachined Artificial Haircell

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  3. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors' measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2 fF. A high performance measurement setup based on lock-in principle is developed to detect the capacitance variation. The maximum capacitance variation of the fabricated device is 0.31 fF, and the capacitance detection limit is 0.095 aF Hz−1/2.

  4. Micromachining using focused ion beams

    Focused ion beam (FIB) systems prove to be useful precision micromachining tools for a wide variety of applications. This micromachining technique includes scanning ion microscopy (SIM), micromachining by physical sputtering, and the ion-beam induced surface chemistry for etching and deposition. This technique is applied to image and modify IC's, to micromechanical applications, to modify the tip shape of tungsten emitters, and to prepare cross sections of selected regions for inspection in a transmission electron microscope (TEM). (orig.)

  5. Micromachining and its application

    Micromachining is a useful technique for manufacturing of micrometer-dimension structures. It also has a ready-made means of mass production in wafer fabrication lines. We studied the present micromachining techniques : photo fabrication, anisotropic etching, anodic bonding and so on. Furthermore, novel process techniques using high energy ion implantation technology were developed, i.e., (1) physical property modification of monocrystalline silicon and poly-silicon, (2) formation of a monocrystalline silicon thin film structure and (3) formation of a buried resistor. In addition, we fabricated two types of mechanical sensors by way of trial ; one is a micro liquid flow sensor and the other is a vacuum sensor which contains a monocrystalline silicon resonator. (author)

  6. Micromachined chemical jet dispenser

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  7. MEMS Capacitive Pressure Sensors: A Review on Recent Development and Prospective

    Eswaran P

    2013-06-01

    Full Text Available Recently MEMS Capacitive Pressure Sensor gains more advantage over micromachined piezoresistive pressure sensor due to high sensitivity, low power consumption, free from temperature effects, IC compatibility, etc,. The spectrum of capacitive pressure sensor application is increasing, hence it is essential to review the path of technological development and further prospective of micromachinedcapacitive pressure sensor. This paper focuses on the review of various types of capacitive pressure sensor principle, MEMS materials used in fabrication, procedures adopted in microfabrication for silicon and polymer material diaphragm, bonding and packaging techniques used. Selected result on capacitive sensitivity, effect of temperature on capacitive sensitivity was also presented. Finally, the development of smart sensor was discussed.

  8. Trends in laser micromachining

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  9. 3D proton beam micromachining

    Focused high energy ion beam micromachining is the newest of the micromachining techniques. There are about 50 scanning proton microprobe facilities worldwide, but so far only few of them showed activity in this promising field. High energy ion beam micromachining using a direct-write scanning MeV ion beam is capable of producing 3D microstructures and components with well defined lateral and depth geometry. The technique has high potential in the manufacture of 3D molds, stamps, and masks for X-ray lithography (LIGA), and also in the rapid prototyping of microcomponents either for research purposes or for components testing prior to batch production. (R.P.)

  10. Micromachined capacitive pressure sensor with signal conditioning electronics

    Fragiacomo, Giulio; Hansen, Ole; Thomsen, Erik Vilain; Kjærgaard, Claus; Christensen, Carsten

    2012-01-01

    Dette projekt vedrører kapacitive mikrotryksensorer til barske omgivelser og dertil relaterede elektroniske grænseflader. Mikroeletromekaniske systemer (MEMS) er ofte benyttede, frem for makroskopiske sensorsystmer, inden for flere forskellige felter og er i mange tilfælde den eneste løsningsmodel, f.eks. i de tilfælde hvor størrelsen af sensorelementet er en begrænsende faktor. Derudover kan brugen af MEMS reducere omkostninger og energiforbrug væsentligt, hvorfor MEMS ofte anvendes til forb...

  11. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated with...... cells, can be well approximated by neglecting the cells. Further, it is demonstrated that scaling of the SIR translates into better computational efficiency....

  12. Capacitive Extensometer

    Perusek, Gail P. (Inventor)

    2003-01-01

    The present invention provides for measurements of the principal strain magnitudes and directions, and maximum shear strain that occurs in a porous specimen, such as plastic, ceramic or porous metal, when it is loaded (or subjected to a load). In one embodiment the invention includes a capacitive delta extensometer arranged with six sensors in a three piece configuration, with each sensor of each pair spaced apart from each other by a predetermined angle, such as 120 degrees.

  13. Micromachined electrode array

    Okandan, Murat (Edgewood, NM); Wessendorf, Kurt O. (Albuquerque, NM)

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  14. Micromachining with Nanostructured Cutting Tools

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  15. Micromachining with DUV lasers

    Toenshoff, Hans K.; Kappel, Heiner; Heekenjann, Peter B.

    1997-04-01

    In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

  16. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

    Weiping Zhang; Xiaosheng Wu; Wenyuan Chen; Wu Liu; Feng Cui

    2011-01-01

    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micro...

  17. Electron beam micromachining of plastics

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314. ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  18. Laser micromachining of goldblack coatings.

    Nelms, N; Dowson, J; Rizvi, N; Rohr, T

    2006-09-20

    Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors. PMID:16946774

  19. False capacitance of supercapacitors

    Ragoisha, G. A.; Aniskevich, Y. M.

    2016-01-01

    Capacitance measurements from cyclic voltammetry, galvanostatic chronopotentiometry and calculation of capacitance from imaginary part of impedance are widely used in investigations of supercapacitors. The methods assume the supercapacitor is a capacitor, while real objects correspond to different equivalent electric circuits and show various contributions of non-capacitive currents to the current which is used for calculation of capacitance. Specific capacitances which are presented in F g-1...

  20. A novel model for calculating the inter-electrode capacitance of wedge-strip anode

    Zhao, Airong; Ni, Qiliang

    2016-04-01

    The wedge strip anode (WSA) detector has been widely used in particle detection. In this work, a novel model for calculating the inter-electrode capacitance of WSA was proposed on the basis of conformal transformations and the partial capacitance method. Based on the model, the inter-electrode capacitance within a period was calculated besides the total inter-electrode capacitance. As a result, the effects of the WSA design parameters on the inter-electrode capacitance are systematically analyzed. It is found that the inter-electrode capacitance monotonically increases with insulated gap and substrate permittivity but not with the period. In order to prove the validation of the model, two round WSAs were manufactured by employing the picosecond laser micro-machining technology. It is found that 9%-15% errors between the theoretical and experimental results can be obtained, which is better than that obtained by employing ANSYS software.

  1. A Surface Micromachined CMOS MEMS Humidity Sensor

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  2. Laser Micromachining of Glass, Silicon, and Ceramics

    L. Rihakova; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  3. Acoustic generation of femtoliter to picoliter droplets using two-dimensional micromachined microdroplet ejector arrays

    Demirci, Utkan

    There is growing demand in the fields of semiconductor manufacturing and biotechnology to reliably generate repeatable, uniform, picoliter-size fluid droplets. Such droplets can be generated using MEMS (Micro-Electro-Mechanical Systems) technology. We propose 2-D micromachined microdroplet ejector arrays for environmentally benign deposition of photoresist and other spin-on materials, such as low-k and high-k dielectrics used in integrated circuit (IC) manufacturing. Direct deposition of these chemicals will reduce waste and production cost. These ejectors are chemically compatible with the materials used in IC manufacturing, and do not harm fluids that are heat or pressure sensitive. Moreover, these ejectors are attractive to biomedicine and biotechnology for droplet generation in applications such as printing of DNA or protein assays and drug testing. Two novel methods for generating millions of droplets per second using acoustically actuated 2-D micromachined microdroplet ejector arrays will be presented. First, membrane based 2-D micromachined ejector arrays will be introduced. Each element of a membrane based 2-D ejector array consists of a flexurally vibrating circular membrane on one face of a cylindrical fluid reservoir. The membrane has an orifice at the center. A piezoelectric transducer generating ultrasonic waves, located at the open face of the reservoir, actuates the membrane and droplets are ejected through the membrane orifice. The ejectors operated most efficiently at 1.2 MHz and generated 3--7 mum diameter droplets. Second, acoustic focus based 2-D micromachined ejector arrays will be demonstrated. The radiation pressure associated with the acoustic beam overcomes the surface tension force, and releases droplets into air in every actuation cycle. The ejectors operated most efficiently at 34.7 MHz, and generated 28 mum diameter droplets in both drop-on-demand and continuous modes of operation, as predicted by the finite element analysis

  4. Review of polymer MEMS micromachining

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed. (topical review)

  5. Analysis of small deflection touch mode behavior in capacitive pressure sensors

    Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas;

    2010-01-01

    Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analytical such that...... geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...... mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...

  6. Quasimetallic silicon micromachined photonic crystals

    We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

  7. Resist materials for proton micromachining

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

  8. 2D solar modeling

    Ventura, P; Li, L; Sofia, S; Basu, S; Demarque, P

    2009-01-01

    Understanding the reasons of the cyclic variation of the total solar irradiance is one of the most challenging targets of modern astrophysics. These studies prove to be essential also for a more climatologic issue, associated to the global warming. Any attempt to determine the solar components of this phenomenon must include the effects of the magnetic field, whose strength and shape in the solar interior are far from being completely known. Modelling the presence and the effects of a magnetic field requires a 2D approach, since the assumption of radial symmetry is too limiting for this topic. We present the structure of a 2D evolution code that was purposely designed for this scope; rotation, magnetic field and turbulence can be taken into account. Some preliminary results are presented and commented.

  9. Vertical 2D Heterostructures

    Lotsch, Bettina V.

    2015-07-01

    Graphene's legacy has become an integral part of today's condensed matter science and has equipped a whole generation of scientists with an armory of concepts and techniques that open up new perspectives for the postgraphene area. In particular, the judicious combination of 2D building blocks into vertical heterostructures has recently been identified as a promising route to rationally engineer complex multilayer systems and artificial solids with intriguing properties. The present review highlights recent developments in the rapidly emerging field of 2D nanoarchitectonics from a materials chemistry perspective, with a focus on the types of heterostructures available, their assembly strategies, and their emerging properties. This overview is intended to bridge the gap between two major—yet largely disjunct—developments in 2D heterostructures, which are firmly rooted in solid-state chemistry or physics. Although the underlying types of heterostructures differ with respect to their dimensions, layer alignment, and interfacial quality, there is common ground, and future synergies between the various assembly strategies are to be expected.

  10. Characterization and Modeling of Subfemtofarad Nanowire Capacitance Using the CBCM Technique

    Zhao, Hui; Kim, Raseong; Paul, Abhijeet; Luisier, Mathieu; Klimeck, Gerhard; Ma, Fa-Jun; Rustagi, Subhash; Ganesh S. Samudra; Singh, Navab; Lo, Guo-Qiang; Kwong, Dim-Lee

    2009-01-01

    The experimental characterization of gate capacitance in nanoscale devices is challenging. We report an application of the charge-based capacitance measurement (CBCM) technique to measure the gate capacitance of a single-channel nanowire transistor. The measurement results are validated by 3-D electrostatic computations for parasitic estimation and 2-D self-consistent sp(3)s*d5 tight-binding computations for intrinsic gate capacitance calculations. The device simulation domains were construct...

  11. Characterization and Modeling of Subfemotofarad Nanowire Capacitance Using the CBCM Technique

    Zhao, Hui; Kim, Raseong; Paul, Abhijeet; Luisier, Mathieu; Klimeck, Gerhard; Ma, Fa-Jun; Rustagi, Subhash C.; Ganesh S. Samudra; Singh, Navab; Lo, Guo-Qiang; Kwong, Dim-Lee

    2009-01-01

    The experimental characterization of gate capacitance in nanoscale devices is challenging. We report an application of the charge-based capacitance measurement (CBCM) technique to measure the gate capacitance of a single-channel nanowire transistor. The measurement results are validated by 3-D electrostatic computations for parasitic estimation and 2-D self-consistent sp3s∗d5 tight-binding computations for intrinsic gate capacitance calculations. The device simulation domains were constructed...

  12. Micromachining of Silicon Carbide using femtosecond lasers

    Farsari, M [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Filippidis, G [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Zoppel, S [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Reider, G A [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Fotakis, C [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece)

    2007-04-15

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude.

  13. Micromachining of Silicon Carbide using femtosecond lasers

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude

  14. Micromachining applications for ICF target fabrication

    Micromachining techniques used in Inertial Confinement Fusion (ICF) target fabrication encompass laser drilling, single point diamond turning, and plasma as well as chemical etching. These techniques have been developed by several laboratories to produce target components with tolerances and surface finishes in the micron to submicron regime. Some of the spherical target components produced by micromachining techniques include free standing hemispherical shells (diameters 50--500 mm), micron-sized holes in thin glass shells, and plastic-coated glass microballons with surfaces which have been smoothly machined to remove a mounting stalk. Planar targets and components produced by these techniques include small disks and washers of thin brittle materials. Micromachining techniques are also used to fabricate diagnostic instruments such as x-ray mirrors and zone plates. This paper will examine micromachining techniques used to produce target components and diagnostic instruments. The relationship of each micromachining technique to presently used target configurations will also be discussed

  15. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  16. Reduction of out-of-plane warpage in surface micromachined beams using corrugation

    Corrugation is proposed as a means of reducing the out-of-plane warpage in surface micromachined beams that result from an asymmetric vertical stress profile. Corrugation increases beam bending stiffness without increasing film thickness, making the beam more immune to intrinsic vertical stress gradients without requiring longer film deposition times, increased beam mass, or careful stress optimization. The technique was tested using a dual-thickness metal surface micromachining process with a photoresist sacrificial layer. Several corrugation patterns and geometries were tested, and the best performing pattern was implemented on a MEMS actuator array. The off-state to on-state capacitance delta of the array improved from 0.24 to 0.7pF and the beam curvature decreased from 180 to 50 nm compared with an uncorrugated array. Other device performance parameters, such as 30 V pull-in voltage and 5 billion cycle switching lifetime, were unaffected. (paper)

  17. Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures

    Hall, Neal A.; Okandan, Murat; Littrell, Robert; Bicen, Baris; Degertekin, F. Levent

    2008-01-01

    In many micromachined sensors the thin (2–10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low thermal noise levels. Finite-element based modeling procedures based on 2-D discretization of...

  18. Mesoscopic Capacitance Oscillations

    Buttiker, Markus; Nigg, Simon

    2006-01-01

    We examine oscillations as a function of Fermi energy in the capacitance of a mesoscopic cavity connected via a single quantum channel to a metallic contact and capacitively coupled to a back gate. The oscillations depend on the distribution of single levels in the cavity, the interaction strength and the transmission probability through the quantum channel. We use a Hartree-Fock approach to exclude self-interaction. The sample specific capacitance oscillations are in marked contrast to the c...

  19. Activated sludge model No. 2d, ASM2d

    Henze, M.

    1999-01-01

    The Activated Sludge Model No. 2d (ASM2d) presents a model for biological phosphorus removal with simultaneous nitrification-denitrification in activated sludge systems. ASM2d is based on ASM2 and is expanded to include the denitrifying activity of the phosphorus accumulating organisms (PAOs...

  20. Micromachined Thermal Flow Sensors—A Review

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  1. Micromachining process – current situation and challenges

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  2. Laser Micromachining Fabrication of THz Components

    DrouetdAubigny, C.; Walker, C.; Jones, B.; Groppi, C.; Papapolymerou, J.; Tavenier, C.

    2001-01-01

    Laser micromachining techniques can be used to fabricate high-quality waveguide structures and quasi-optical components to micrometer accuracies. Successful GHz designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once tested and characterized our system will be used to construct prototype THz lx4 focal plane mixer arrays, magic tees, AR coated silicon lenses, local oscillator source phase gratings, filters and more. Our system can micro-machine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our micromachining system, and illustrates the type, range and performance of components this exciting new technology will make accessible to the THz community.

  3. Variable Synthetic Capacitance

    Kleinberg, L. L.

    1986-01-01

    Feedback amplifier circuit synthesizes electronically variable capacitance. Variable Synthetic Capacitor is amplifier circuit with follower/feedback configuration. Effective input capacitance depends on input set current. If synthetic capacitor is connected across resonant element of oscillator, oscillator frequency controlled via input set current. Circuit especially suitable for fine frequency adjustments of piezoelectric-crystal or inductor/capacitor resonant oscillators.

  4. Silicon-micromachined microchannel plates

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  5. Micromachining with SR and FEL

    This article describes the micromachining technologies to fabricate thick and three-dimensional microstructures. Deep X-ray lithography using an 0.6 GeV compact SR source have been realized to fabricate thick structures, developing a high transparency X-ray mask and a high sensitivity resist. Moreover, a sacrificial layer process and micro electro-discharge machining have been combined with deep X-ray lithography for the fabrication of more complicated structures such as cantilever and tapered shaped structures. Also, the prospective use of an FEL is considered towards the development of true three-dimensional microstructures. (Copyright (c) 1998 Elsevier Science B.V., Amsterdam. All rights reserved.)

  6. Electrochemical micromachining of passive electrodes

    The electronic model describing the electrochemical micromachining (ECMM) of passive electrodes utilizing the transpassive dissolution is discussed. Numerical simulations are performed on a machining model circuit using measured electrochemical properties of the model system which consisted of a tungsten tool electrode, a 1 M H2SO4 electrolyte and a stainless steel work piece electrode. The results of these simulations were verified by performing machining experiments applying the same model system. For a passive stainless steel electrode it is shown that it can be treated like an actively dissolving electrode with high reaction overpotential. The efficiency of the machining process can be enhanced by polarizing the steel work piece electrode close to the transpassive potential region. Three different ways of achieving this polarization are discussed: by polarizing the work piece electrode only, by polarizing both electrodes and by adding oxidizing species to the electrolyte solution

  7. Micromachining process – current situation and challenges

    Lalakiya Meet Rajeshkumar

    2015-01-01

    The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance c...

  8. Realization of CMOS compatible micromachined chemical sensors

    Demirci, Tuğba; Demirci, Tugba

    2002-01-01

    The chemical sensors are fabricated using IC manufacturing technologies, providing a smaller size and lower weight, lower power consumption, and lower cost due to the automated and batch production. During the last two decades, largely two-dimensional Integrated Circuit (IC) fabrication technology has been extended into the third dimension by micromachining technologies [1]. Micromachining has been used to produce a growing variety of micromechanical structures, including automotive pressure ...

  9. Micromachining of electret materials, advantages and possibilities

    Voorthuyzen, J.A.; Bergveld, P.

    1988-01-01

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. ...

  10. The micromachined logo of Atomki

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  11. Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

    Christiansen, Thomas Lehrmann; Rasmussen, Morten Fischer; Jensen, Jørgen Arendt;

    2014-01-01

    Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element...... ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show a reduction in edge wave energy of 8.4 dB (85 %) compared...

  12. Micromachined electrostatically suspended gyroscope with a spinning ring-shaped rotor

    Han, F. T.; Liu, Y. F.; Wang, L.; Ma, G. Y.

    2012-10-01

    A micromachined electrostatically suspended gyroscope is described in this paper, in which a spinning ring-shaped rotor is suspended by an electric bearing in five degrees of freedom and driven by a three-phase variable-capacitance motor. The electric bearing provides contactless suspension of the spinning rotor, allowing the rotor through a torque-rebalance loop to precess about two input axes that are orthogonal to the spin axis. In this way, the micromachined spinning-rotor gyroscope can be used as a two-degree-of-freedom angular rate sensor by detecting the precession-induced torque. Design and simulation of the dual-axis torque-rebalance loop, by considering actual negative spring effect in rotor dynamics, are presented to investigate the loop stability and explain the experimental measurement. The prototype device has been fabricated by bulk micromachining technique and tested successfully with a suspended rotor spinning at a speed of 10 085 rpm. Initial measurements of the rate gyroscope shows that an input range of ±100° s-1, a noise floor of 0.015° s-1 Hz-1/2, and a bias stability of 50.95° h-1 have been achieved. The detailed results of the prototype device, electric bearing and motor spin-up are also described.

  13. System for Measuring Capacitance

    McNichol, Randal S. (Inventor)

    2001-01-01

    A system has been developed for detecting the level of a liquid in a tank wherein a capacitor positioned in the tank has spaced plates which are positioned such that the dielectric between the plates will be either air or the liquid, depending on the depth of the liquid in the tank. An oscillator supplies a sine wave current to the capacitor and a coaxial cable connects the capacitor to a measuring circuit outside the tank. If the cable is very long or the capacitance to be measured is low, the capacitance inherent in the coaxial cable will prevent an accurate reading. To avoid this problem, an inductor is connected across the cable to form with the capacitance of the cable a parallel resonant circuit. The impedance of the parallel resonant circuit is infinite, so that attenuation of the measurement signal by the stray cable capacitance is avoided.

  14. Capacitance pressure sensor

    Eaton, William P.; Staple, Bevan D.; Smith, James H.

    2000-01-01

    A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance pressure sensor includes a capacitance pressure sensor formed at least partially in a cavity etched below the surface of a silicon substrate and adjacent circuitry (CMOS, BiCMOS, or bipolar circuitry) formed on the substrate. By forming the capacitance pressure sensor in the cavity, the substrate can be planarized (e.g. by chemical-mechanical polishing) so that a standard set of integrated circuit processing steps can be used to form the electronic circuitry (e.g. using an aluminum or aluminum-alloy interconnect metallization).

  15. Capacitive chemical sensor

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  16. Physics-based signal processing algorithms for micromachined cantilever arrays

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  17. Induced Charge Capacitive Deionization

    Rubin, S.; Suss, M. E.; Biesheuvel, P. M.; Bercovici, M.

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, ...

  18. Nonlinear Quantum Capacitance

    Wang, B; Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We analyze the nonlinear voltage dependence of electrochemical capacitance for nanoscale conductors. This voltage dependence is due to the finite density of states of the conductors. Within Hartree theory we derive an exact expression for the electrochemical capacitance–voltage curve for a parallel plate system. The result suggests a quantum scanning capacitance microscopy at the nanoscale: by inverting the capacitance–voltage expression one is able to deduce the local spectral function of th...

  19. Demonstration of superconducting micromachined cavities

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing

  20. Micromachining for laser fusion pellet

    In laser nuclear fusion, the fusion reaction is induced by irradiating powerful laser beam on the pellets filled with fuel, and compressing and heating the fuel by implosion. At this time, in order to compress it up to high density, it is very important to compress as the spherical symmetry is maintained. The uniformity of the sphericity and wall thickness is required to be more than 98 %. Besides, in order to heighten the efficiency, it is necessary to limit the temperature of main fuel low, to ignite with hot sparks at the center, and to burn remaining fuel with the alpha particles which are generated by the nuclear fusion reaction there. For this purpose, various target structures have been proposed. The cryogenic target for ablative compression, the double shell target and the cannonball target are shown. In order to produce these targets, the development of the fuel spheres which have high uniformity and good sphericity in the required size, the development of the coating process with good surface finish which can do uniform coating at the rate of about 10 μm/h, the development of micromachining technology, the development of cryogenic technology and so on are necessary. Also the levitation of pellets by magnetic suspension method is explained. (K.I.)

  1. Demonstration of superconducting micromachined cavities

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  2. Demonstration of superconducting micromachined cavities

    Brecht, T.; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J.

    2015-11-01

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  3. Lectures on 2D gravity and 2D string theory

    This report the following topics: loops and states in conformal field theory; brief review of the Liouville theory; 2D Euclidean quantum gravity I: path integral approach; 2D Euclidean quantum gravity II: canonical approach; states in 2D string theory; matrix model technology I: method of orthogonal polynomials; matrix model technology II: loops on the lattice; matrix model technology III: free fermions from the lattice; loops and states in matrix model quantum gravity; loops and states in the C=1 matrix model; 6V model fermi sea dynamics and collective field theory; and string scattering in two spacetime dimensions

  4. Estimation of carrier mobility at organic semiconductor/insulator interface using an asymmetric capacitive test structure

    Rajesh Agarwal; Ashish K. Agarwal; Baquer Mazhari

    2016-01-01

    Mobility of carriers at the organic/insulator interface is crucial to the performance of organic thin film transistors. The present work describes estimation of mobility using admittance measurements performed on an asymmetric capacitive test structure. Besides the advantage of simplicity, it is shown that at low frequencies, the measured capacitance comes from a large area of channel making the capacitance-voltage characteristics insensitive to contact resistances. 2-D numerical simulation a...

  5. Quantum capacitance: a microscopic derivation

    Mukherjee, Sreemoyee; MANNINEN, M; Deo, P. Singha

    2010-01-01

    We start from microscopic approach to many body physics and show the analytical steps and approximations required to arrive at the concept of quantum capacitance. These approximations are valid only in the semi-classical limit and the quantum capacitance in that case is determined by Lindhard function. The effective capacitance is the geometrical capacitance and the quantum capacitance in series, and this too is established starting from a microscopic theory.

  6. Silicon Micromachining for Terahertz Component Development

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  7. Optical measurement of micromachine engine performance

    Holswade, S.C.; Dickey, F.M.

    1997-08-01

    Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

  8. Photolithographic surface micromachining of polydimethylsiloxane (PDMS).

    Chen, Weiqiang; Lam, Raymond H W; Fu, Jianping

    2012-01-21

    A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS. PMID:22089984

  9. Cryogenically assisted abrasive jet micromachining of polymers

    The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN2) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN2 also was found to reduce particle embedding

  10. 2D-hahmoanimaation toteuttamistekniikat

    Smolander, Aku

    2009-01-01

    Opinnäytetyössä tutkitaan erilaisia 2D-hahmoanimaation toteuttamistekniikoita. Aluksi luodaan yleiskatsaus animoinnin historiaan ja tekniikoihin piirtämisestä mallintamiseen. Alkukatsauksen jälkeen tutkitaan 2D-hahmon suunnittelua ja liikkeitä koskevia sääntöjä. Hahmoanimaation liikkeissä huomionarvoisia asioita ovat muun muassa ajastus, liioittelu, ennakointi ja painovoima. Seuraavaksi perehdytään itse 2D-hahmoanimaation toteuttamistekniikoihin. Tavoitteena on selvittää, tutkia ja vertailla ...

  11. Tribological issues of polysilicon surface-micromachining

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  12. Design and Fabrication of Micromachined Resonators

    Chaudhuri, Ritesh Ray; Bhattacharyya, Tarun Kanti

    2012-01-01

    Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.

  13. Fundamental mechanisms of micromachine reliability

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  14. Piezoelectric micromachined ultrasonic transducers for fingerprint sensing

    Lu, Yipeng

    phantom. Finally, a novel ultrasonic fingerprint sensor was demonstrated using a 24x8 array of 22 MHz PMUTs with 100 microm pitch, fully integrated with 180 nm CMOS circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20x8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D PDMS fingerprint phantom (10 mm by 8 mm) at a 1.2 mm distance from the array.

  15. Finite element analysis of underwater capacitor micromachined ultrasonic transducers.

    Roh, Yongrae; Khuri-Yakub, Butrus T

    2002-03-01

    A simple electro-mechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). Most often, cMUTs are made in silicon and glass plates that are in the 0.5 mm to 1 mm range in thickness. The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict cross-talk between elements of an array of transducers. To overcome these deficiencies, a flnite element model of the cMUT is constructed using the commercial code ANSYS. Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Cross-talk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the cross-talk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements. PMID:12322877

  16. Synthesis of Two-Dimensional Materials for Capacitive Energy Storage.

    Mendoza-Sánchez, Beatriz; Gogotsi, Yury

    2016-08-01

    The unique properties and great variety of two-dimensional (2D) nanomaterials make them highly attractive for energy storage applications. Here, an insight into the progress made towards the application of 2D nanomaterials for capacitive energy storage is provided. Synthesis methods, and electrochemical performance of various classes of 2D nanomaterials, particularly based on graphene, transition metal oxides, dichalcogenides, and carbides, are presented. The factors that directly influence capacitive performance are discussed throughout the text and include nanosheet composition, morphology and texture, electrode architecture, and device configuration. Recent progress in the fabrication of 2D-nanomaterials-based microsupercapacitors and flexible and free-standing supercapacitors is presented. The main electrode manufacturing techniques with emphasis on scalability and cost-effectiveness are discussed, and include laser scribing, printing, and roll-to-roll manufacture. Various issues that prevent the use of the full energy-storage potential of 2D nanomaterials and how they have been tackled are discussed, and include nanosheet aggregation and the low electrical conductivity of some 2D nanomaterials. Particularly, the design of hybrid and hierarchical 2D and 3D structures based on 2D nanomaterials is presented. Other challenges and opportunities are discussed and include: control of nanosheets size and thickness, chemical and electrochemical instability, and scale-up of electrode films. PMID:27254831

  17. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  18. 38 GHz Antennas on Micromachined Silicon Substrates.

    Marcelli, Romolo; Dragoman, M.; Neculoiu, Dan; Giacomozzi, Flavio; Muller, Alexandru; Nitescu, N.

    2001-01-01

    A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 µm thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.

  19. Electrostatic actuators fabricated by surface micromachining techniques

    Legtenberg, Rob

    1996-01-01

    This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.

  20. Optoelectronics with 2D semiconductors

    Mueller, Thomas

    2015-03-01

    Two-dimensional (2D) atomic crystals, such as graphene and layered transition-metal dichalcogenides, are currently receiving a lot of attention for applications in electronics and optoelectronics. In this talk, I will review our research activities on electrically driven light emission, photovoltaic energy conversion and photodetection in 2D semiconductors. In particular, WSe2 monolayer p-n junctions formed by electrostatic doping using a pair of split gate electrodes, type-II heterojunctions based on MoS2/WSe2 and MoS2/phosphorene van der Waals stacks, 2D multi-junction solar cells, and 3D/2D semiconductor interfaces will be presented. Upon optical illumination, conversion of light into electrical energy occurs in these devices. If an electrical current is driven, efficient electroluminescence is obtained. I will present measurements of the electrical characteristics, the optical properties, and the gate voltage dependence of the device response. In the second part of my talk, I will discuss photoconductivity studies of MoS2 field-effect transistors. We identify photovoltaic and photoconductive effects, which both show strong photoconductive gain. A model will be presented that reproduces our experimental findings, such as the dependence on optical power and gate voltage. We envision that the efficient photon conversion and light emission, combined with the advantages of 2D semiconductors, such as flexibility, high mechanical stability and low costs of production, could lead to new optoelectronic technologies.

  1. A Low-noise front-end circuit for 2D cMUT arrays

    Güler, Ülkühan; Guler, Ulkuhan; Bozkurt, Ayhan

    2006-01-01

    cMUT technology enables 2D array design with front-end electronic integration through flip-chip bonding or cMUT-on-CMOS process. The size of a 2D array element is constrained in both dimensions due to the aperture sampling criteria, and therefore should be less than or equal to the half of the wavelength in both dimensions. Considering large parasitic capacitances introduced by the interconnections, such small transducer elements necessitate integrated low noise frontends for achieving accept...

  2. Accretion Disks Phase Transitions 2-D or not 2-D?

    Abramowicz, M A; Igumenshchev, I V; Abramowicz, Marek Artur; Bjornsson, Gunnlaugur; Igumenshchev, Igor V.

    2000-01-01

    We argue that the proper way to treat thin-thick accretion-disk transitions should take into account the 2-D nature of the problem. We illustrate the physical inconsistency of the 1-D vertically integrated approach by discussing a particular example of the convective transport of energy.

  3. Membrane capacitive deionization

    Biesheuvel, P.M.; Wal, van der A.

    2010-01-01

    Membrane capacitive deionization (MCDI) is an ion-removal process based on applying an electrical potential difference across an aqueous solution which flows in between oppositely placed porous electrodes, in front of which ion-exchange membranes are positioned. Due to the applied potential, ions ar

  4. Steerable Capacitive Proximity Sensor

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Steerable capacitive proximity sensor of "capaciflector" type based partly on sensing units described in GSC-13377 and GSC-13475. Position of maximum sensitivity adjusted without moving sensor. Voltage of each driven shield adjusted separately to concentrate sensing electric field more toward one side or other.

  5. Digital capacitance measuring system

    1973-01-01

    The hardware phase of a digital capacitance measuring system is presented with the major emphasis placed on the electrical design and operation. Test results are included of the three units fabricated. The system's interface is applicable to existing requirements for the space shuttle vehicle.

  6. SES2D user's manual

    SES2D is an interactive graphics code designed to generate plots of equation of state data from the Los Alamos National Laboratory Group T-4 computer libraries. This manual discusses the capabilities of the code. It describes the prompts and commands and illustrates their use with a sample run

  7. 2D-Oide effect

    Blanco, O R; Bambade, P

    2015-01-01

    The Oide effect considers the synchrotron radiation in the final focusing quadrupole and it sets a lower limit on the vertical beam size at the Interaction Point, particularly relevant for high energy linear colliders. The theory of the Oide effect was derived considering only the radiation in the focusing plane of the magnet. This article addresses the theoretical calculation of the radiation effect on the beam size consider- ing both focusing and defocusing planes of the quadrupole, refered to as 2D-Oide. The CLIC 3 TeV final quadrupole (QD0) and beam parameters are used to compare the theoretical results from the Oide effect and the 2D-Oide effect with particle tracking in PLACET. The 2D-oide demonstrates to be important as it increases by 17% the contribution to the beam size. Further insight into the aberrations induced by the synchrotron radiation opens the possibility to partially correct the 2D-Oide effect with octupole magn

  8. Calculating and optimizing inter-electrode capacitances of charge division microchannel plate detectors

    Xing, Yan; Chen, Bo; Zhang, Hong-Ji; Wang, Hai-Feng; He, Ling-Ping; Jin, Fang-Yuan

    2016-04-01

    Based on the principle of charge division microchannel plate detectors, the inter-electrode capacitances of charge division anodes which are related to electronic noise of the charge sensitive amplifier and crosstalk effect of the anode are presented. Under all the requirements of charge division microchannel plate detectors such as the imaging linearity and spatial resolution, decreasing the inter-electrode capacitances is one way to improve the imaging performance. In this paper, we illustrate the simulation process of calculating the inter-electrode capacitances. Moreover, a Wedge and Strip (WSZ) anode is fabricated with the picosecond laser micromachining process. Comparing the simulated capacitances and measured capacitances, the three-dimensional finite element method is proved to be valid. Furthermore, by adjusting the design parameters of the anode, the effects of the substrate permittivity, insulation width and the size of pitch on the inter-electrode capacitances have been analysed. The structure of the charge division anode has been optimized based on the simulation data.

  9. Focused high energy proton beam micromachining: A perspective view

    Micromachining techniques utilising optical, UV and X-ray photons, as well as electrons, low energy heavy ions and high energy light ions (protons), are briefly reviewed. The advantages and disadvantages of each process are discussed. High energy ion beam micromachining (proton micromachining) is a new process which exhibits a unique feature; direct-write 3-dimensional micromachining at submicron resolutions. Although this technique may not compete with conventional mask processes for producing high volume batch production of microcomponents, high energy ion beam micromachining may have a significant role in rapid prototyping, research into the characteristics of microstructures, and the manufacture of molds, stamps and thick masks. Several examples of high energy proton micromachining are presented to illustrate the potential of the technique

  10. Femtosecond laser waveguide micromachining of PMMA films with azoaromatic chromophores.

    Mendonca, C R; Cerami, L R; Shih, T; Tilghman, R W; Baldacchini, T; Mazur, E

    2008-01-01

    We report on the femtosecond-laser micromachining of poly(methyl methacrylate) (PMMA) films doped with nonlinear azoaromatic chromophores: Disperse Red 1, Disperse Red 13 and Disperse Orange 3. We study the conditions for controlling chromophore degradation during the micromachining of PMMA doped with each chromophore. Furthermore, we successfully used fs-micromachining to fabricate optical waveguides within a bulk sample of PMMA doped with these azochromophores. PMID:18521148

  11. Micromachining – Review of Literature from 1980 to 2010

    Zdenka Keran

    2014-01-01

    Full Text Available Trend of miniaturization of products and consequently its components nowadays can be evident in almost every production field. To accomplish requirements imposed by miniaturization micromachining proved to be a satisfied manufacturing technique. Herein the term micromachining refers to mechanical micro cutting techniques where material is removed by geometrically determined cutting edges. The aim of this review article is to summarize existing knowledge and highlight current challenges, restrictions and advantages in the field of micromachining.

  12. Induced Charge Capacitive Deionization

    Rubin, S; Biesheuvel, P M; Bercovici, M

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, which leads to rapid and significant deionization of ionic species from a volume which is on the scale of the particle. We show by theory and experiment that the transient response around a cylindrical particle results in spatially non-uniform charging and non-steady growth of depletion regions which emerge around the particle's poles. Potentially, ICCDI can be useful in applications where fast concentration changes of ionic species are required over large volumes.

  13. Molecular Aspects of Capacitation

    Gulfidan Zulfikaroglu; Hulya Ozgur; Sait Polaturkey

    2010-01-01

    Male and female gamets are derived from the primordial germ cells, which migrate from the wall of the yolk sac toward the developing gonads. Following a series of mitotic divisions these cells increase in number at the gonads. The primordial germ cells differentiate into spermatogonia and take the form of mature spermatozoa after spermotogensis and spermotogenesis at puberty. Capacitation is the reaction, which includes all of the molecular and physiological events of mature sperm to gain the...

  14. Capacitance of graphene nanoribbons

    Shylau, A. A.; Klos, J. W.; Zozoulenko, I. V.

    2009-01-01

    We present an analytical theory for the gate electrostatics and the classical and quantum capacitance of the graphene nanoribbons (GNRs) and compare it with the exact self-consistent numerical calculations based on the tight-binding p-orbital Hamiltonian within the Hartree approximation. We demonstrate that the analytical theory is in a good qualitative (and in some aspects quantitative) agreement with the exact calculations. There are however some important discrepancies. In order to underst...

  15. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  16. Micromachined Inclinometer Based on Fluid Convection

    Crespy, N; Combette, P; Boyer, P Temple; Giani, A; Foucaran, A

    2008-01-01

    This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numeric...

  17. Micro benchtop optics by bulk silicon micromachining

    Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

    2000-01-01

    Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

  18. Electrical capacitance clearanceometer

    Hester, Norbert J. (Inventor); Hornbeck, Charles E. (Inventor); Young, Joseph C. (Inventor)

    1992-01-01

    A hot gas turbine engine capacitive probe clearanceometer is employed to measure the clearance gap or distance between blade tips on a rotor wheel and its confining casing under operating conditions. A braze sealed tip of the probe carries a capacitor electrode which is electrically connected to an electrical inductor within the probe which is inserted into a turbine casing to position its electrode at the inner surface of the casing. Electrical power is supplied through a voltage controlled variable frequency oscillator having a tuned circuit in which the probe is a component. The oscillator signal is modulated by a change in electrical capacitance between the probe electrode and a passing blade tip surface while an automatic feedback correction circuit corrects oscillator signal drift. A change in distance between a blade tip and the probe electrode is a change in capacitance therebetween which frequency modulates the oscillator signal. The modulated oscillator signal which is then processed through a phase detector and related circuitry to provide an electrical signal is proportional to the clearance gap.

  19. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  20. Micromachined Parts Advance Medicine, Astrophysics, and More

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  1. Micromachined Horn Antenna Operating at 75 GHz

    Grzegorczyk, Tomasz M.; Zurcher, Jean-François; Renaud, Philippe; Mosig, Juan R.

    2000-01-01

    We propose in this paper an integrated cavity-backed horn antenna, generalizing the well-known SSFIP (Strip-Slot-Foam-Inverted Patch) design, operating at 75 GHz. The antenna was optimized using a full-wave software and realized using micromachining technologies. The proposed structure can be used for high radiation ef-ficiency antennas and arrays in the millimeter-wave band, since surface waves are inherently suppressed by the use of a metallic horn and a cavity configuration.

  2. Surface micromachining of unfired ceramic sheets

    Rheaume, Jonathan M.; Pisano, Albert P.

    2011-01-01

    Conventional surface micromachining techniques including photolithography and both wet and dry etching have been directly applied to an unfired sheet of yttria-stabilized zirconia ceramic material. Reversible bonding methods were investigated for affixing unfired ceramic samples to silicon handle wafers in order to perform photolithography. Three types of photoresist were investigated. Thin film photoresist allowed a line-width feature size of 8 μm to be obtained. Thick film photoresist exhib...

  3. A Surface Micromachined CMOS MEMS Humidity Sensor

    Jian-Qiu Huang

    2015-10-01

    Full Text Available This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. According to the test results, the sensitivity of the sensor was 7 mV/%RH (relative humidity and the linearity of the sensor was 1.9% at 20 °C. Both the sensitivity and linearity were not sensitive to the temperature but the curve of the output voltage shifted with the temperature. The hysteresis of the humidity sensor decreased from 3.2% RH to 1.9% RH as the temperature increased from 10 to 40 °C. The recovery time of the sensor was 85 s at room temperature (25 °C.

  4. Design of Surface Micromachined Compliant MEMS

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  5. Design of Surface micromachined Compliant MEMS

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  6. Review of micromachining of ceramics by etching

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  7. Tool calibration system for micromachining system

    Miller, Donald M.

    1979-03-06

    A tool calibration system including a tool calibration fixture and a tool height and offset calibration insert for calibrating the position of a tool bit in a micromachining tool system. The tool calibration fixture comprises a yokelike structure having a triangular head, a cavity in the triangular head, and a port which communicates a side of the triangular head with the cavity. Yoke arms integral with the triangular head extend along each side of a tool bar and a tool head of the micromachining tool system. The yoke arms are secured to the tool bar to place the cavity around a tool bit which may be mounted to the end of the tool head. Three linear variable differential transformer's (LVDT) are adjustably mounted in the triangular head along an X axis, a Y axis, and a Z axis. The calibration insert comprises a main base which can be mounted in the tool head of the micromachining tool system in place of a tool holder and a reference projection extending from a front surface of the main base. Reference surfaces of the calibration insert and a reference surface on a tool bar standard length are used to set the three LVDT's of the calibration fixture to the tool reference position. These positions are transferred permanently to a mastering station. The tool calibration fixture is then used to transfer the tool reference position of the mastering station to the tool bit.

  8. Experimental study of a variable-capacitance micromotor with electrostatic suspension

    A variable-capacitance micromotor where the rotor is supported electrostatically in five degrees of freedom was designed, fabricated and tested in order to study the behavior of this electrostatic motor. The micromachined device is based on a glass/silicon/glass stack bonding structure, fabricated by bulk micromachining and initially operated in atmospheric environment. The analytical torque model is obtained by calculating the capacitances between different stator electrodes and the rotor. Capacitance values in the order of 10−13 pF and torque values in the order of 10−10 N m have been calculated from the motor geometry and attainable drive voltage. A dynamic model of the motor is proposed by further estimating the air-film damping effect in an effort to explain the experimental rotation measurements. Experimental results of starting voltage, continuous operation, switching response and electric bearing of the micromotor are presented and discussed. Preliminary measurements indicate that a rotor rotating speed of 73.3 r min−1 can be achieved at a drive voltage of 28.3 V, equivalent to a theoretical motive torque of 517 pN m. Starting voltage results obtained from experimental measurement are in agreement with the developed dynamic model

  9. Capacitance of Gated GaAs/AlGaAs Heterostructures Subject to In-plane Magnetic Fields

    Jungwirth, T.; Smrcka, L.

    1995-01-01

    A detailed analysis of the capacitance of gated GaAs/AlGaAs heterostructures is presented. The nonlinear dependence of the capacitance on the gate voltage and in-plane magnetic field is discussed together with the capacitance quantum steps connected with a population of higher 2D gas subbands. The results of full self-consistent numerical calculations are compared to recent experimental data.

  10. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  11. High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures

    On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application

  12. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  13. Equivalent Circuit Models for Large Arrays of Curved and Flat Piezoelectric Micromachined Ultrasonic Transducers.

    Akhbari, Sina; Sammoura, Firas; Lin, Liwei

    2016-03-01

    Equivalent circuit models of large arrays of curved (spherical shape) and flat piezoelectric micromachined ultrasonic transducers (pMUTs) have been developed for complex pMUT arrays design and analysis. The exact solutions for circuit parameters in the electromechanical domain, such as mechanical admittance, input electrical impedance, and electromechanical transformer ratio, were analytically derived. By utilizing the array solution methods previously established for the thickness-mode piezoelectric devices and capacitive micromachined ultrasonic transducers (cMUTs), the single pMUT circuit model can be extended to models for array structures. The array model includes both the self- and mutual-acoustic radiation impedances of individual transducers in the acoustic medium. Volumetric displacement, induced piezoelectric current, and pressure field can be derived with respect to the input voltage matrix, material, and geometrical properties of each individual transducer and the array structure. As such, the analytical models presented here can be used as a guideline for analyses and design evaluations of large arrays of curved and flat pMUTs efficiently and can be further generalized to evaluate other pMUT architectures in the form of single devices or arrays. PMID:26863658

  14. 2D-animaatiotuotannon optimointi

    Saturo, Reetta

    2015-01-01

    Tämän opinnäytetyön tavoitteena on tutkia 2D-animaatiotuotannon optimoinnin mahdollisuuksia tiukan tuotantoaikataulun vaatimuksissa. Tutkielmassa tarkastellaan kahta asiakasprojektia, jotka on toteutettu pienellä tuotantotiimillä. Työkaluna animaatioissa on käytetty pääosin Adoben After Effects -ohjelmistoa. Tutkielman alussa esitellään animaatiotuotannot, joiden tuloksena syntyi kaksi lyhyttä mainoselokuvaa. Sen jälkeen käydään läpi animaatioelokuvan tuotantoprosessia vaiheittain ja tark...

  15. Head First 2D Geometry

    Fallow), Stray

    2009-01-01

    Having trouble with geometry? Do Pi, The Pythagorean Theorem, and angle calculations just make your head spin? Relax. With Head First 2D Geometry, you'll master everything from triangles, quads and polygons to the time-saving secrets of similar and congruent angles -- and it'll be quick, painless, and fun. Through entertaining stories and practical examples from the world around you, this book takes you beyond boring problems. You'll actually use what you learn to make real-life decisions, like using angles and parallel lines to crack a mysterious CSI case. Put geometry to work for you, and

  16. Capacitance of circular patch resonator

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants

  17. Capacitance of circular patch resonator

    Miano, G.; Verolino, L. [Dip. di Ingegneria Elettrica, Ist. Nazionale di Fisica Nucleare, Naples (Italy); Panariello, G. [Dip. di Ingegneria Elettronica, Naples (Italy); Vaccaro, V.G. [Ist. Nazionale di Fisica Nucleare, Naples (Italy). Dipt. di Scienze Fisiche

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants.

  18. Improved Capacitive Liquid Sensor

    Waldman, Francis A.

    1992-01-01

    Improved capacitive sensor used to detect presence and/or measure thickness of layer of liquid. Electrical impedance or admittance of sensor measured at prescribed frequency, and thickness of liquid inferred from predetermined theoretical or experimental relationship between impedance and thickness. Sensor is basically a three-terminal device. Features interdigitated driving and sensing electrodes and peripheral coplanar ground electrode that reduces parasitic effects. Patent-pending because first to utilize ground plane as "shunting" electrode. System less expensive than infrared, microwave, or refractive-index systems. Sensor successfully evaluated in commercial production plants to characterize emulsions, slurries, and solutions.

  19. Technology and applications of micromachined silicon adaptive mirrors

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  20. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  1. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

    Ming-Yuan Cheng

    2010-11-01

    Full Text Available In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB technologies. The sensing array consists of a polydimethlysiloxane (PDMS structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array.

  2. Ductile mode electrochemical oxidation assisted micromachining for glassy carbon

    Recently, a new mechanical machining process using electrochemical oxidation was reported. Electrochemical oxidation assisted micromachining was applied to the machining of glassy carbon. The material removal process of the electrochemical oxidation assisted micromachining consists of repeated cycles of oxidation followed by removal of the oxide layer. In this paper, we experimentally investigate and compare the critical chip thickness for ductile mode cutting in mechanical machining and electrochemical oxidation assisted micromachining of glassy carbon. The theoretical critical chip thickness is calculated for mechanical machining of glassy carbon and experimentally verified. The effect of electrochemical oxidation on the critical chip thickness for ductile mode micromachining is also studied for glassy carbon. It is found that the critical chip thickness is increased for the electrochemical oxidation assisted micromachining. (paper)

  3. Programmable electronic synthesized capacitance

    Kleinberg, Leonard L. (Inventor)

    1987-01-01

    A predetermined and variable synthesized capacitance which may be incorporated into the resonant portion of an electronic oscillator for the purpose of tuning the oscillator comprises a programmable operational amplifier circuit. The operational amplifier circuit has its output connected to its inverting input, in a follower configuration, by a network which is low impedance at the operational frequency of the circuit. The output of the operational amplifier is also connected to the noninverting input by a capacitor. The noninverting input appears as a synthesized capacitance which may be varied with a variation in gain-bandwidth product of the operational amplifier circuit. The gain-bandwidth product may, in turn, be varied with a variation in input set current with a digital to analog converter whose output is varied with a command word. The output impedance of the circuit may also be varied by the output set current. This circuit may provide very small ranges in oscillator frequency with relatively large control voltages unaffected by noise.

  4. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    Dong Linxi; Chen Jindan; Yan Haixia; Huo Weihong; Li Yongjie; Sun Lingling

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  5. 2D SIMPLIFIED SERVO VALVE

    2003-01-01

    A novel pilot stage valve called simplified 2D valve, which utilizes both rotary and linear motions of a single spool, is presented.The rotary motion of the spool incorporating hydraulic resistance bridge, formed by a damper groove and a crescent overlap opening, is utilized as pilot to actuate linear motion of the spool.A criterion for stability is derived from the linear analysis of the valve.Special experiments are designed to acquire the mechanical stiffness, the pilot leakage and the step response.It is shown that the sectional size of the spiral groove affects the dynamic response and the stiffness contradictorily and is also very sensitive to the pilot leakage.Therefore, it is necessary to establish a balance between the static and dynamic characteristics in deciding the structural parameters.Nevertheless, it is possible to sustain the dynamic response at a fairly high level, while keeping the leakage of the pilot stage at an acceptable level.

  6. Personalized 2D color maps

    Waldin, Nicholas

    2016-06-24

    2D color maps are often used to visually encode complex data characteristics such as heat or height. The comprehension of color maps in visualization is affected by the display (e.g., a monitor) and the perceptual abilities of the viewer. In this paper we present a novel method to measure a user\\'s ability to distinguish colors of a two-dimensional color map on a given monitor. We show how to adapt the color map to the user and display to optimally compensate for the measured deficiencies. Furthermore, we improve user acceptance of the calibration procedure by transforming the calibration into a game. The user has to sort colors along a line in a 3D color space in a competitive fashion. The errors the user makes in sorting these lines are used to adapt the color map to his perceptual capabilities.

  7. Surface micromachined electrostatically actuated micro peristaltic pump

    Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu-Chong

    2004-01-01

    An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and a...

  8. Active micromachines: Microfluidics powered by mesoscale turbulence.

    Thampi, Sumesh P; Doostmohammadi, Amin; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-07-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  9. Use of chemical mechanical polishing in micromachining

    Nasby, R.D.; Hetherington, D.L.; Sniegowski, J.J.; McWhorter, P.J.; Apblett, C.A.

    1998-09-08

    A process for removing topography effects during fabrication of micromachines. A sacrificial oxide layer is deposited over a level containing functional elements with etched valleys between the elements such that the sacrificial layer has sufficient thickness to fill the valleys and extend in thickness upwards to the extent that the lowest point on the upper surface of the oxide layer is at least as high as the top surface of the functional elements in the covered level. The sacrificial oxide layer is then polished down and planarized by chemical-mechanical polishing. Another layer of functional elements is then formed upon this new planarized surface. 4 figs.

  10. Active micromachines: Microfluidics powered by mesoscale turbulence

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  11. Active micromachines: Microfluidics powered by mesoscale turbulence

    Thampi, Sumesh P.; Doostmohammadi, Amin; Shendruk, Tyler N.; Golestanian, Ramin; Yeomans, Julia M.

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  12. Optimal pricing of capacitated networks

    Grigoriev, Alexander; Loon, van Joyce; Sitters, René; Uetz, Marc

    2009-01-01

    We address the algorithmic complexity of a profit maximization problem in capacitated, undirected networks. We are asked to price a set of $m$ capacitated network links to serve a set of $n$ potential customers. Each customer is interested in purchasing a network connection that is specified by a si

  13. Efficiency of Capacitively Loaded Converters

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.;

    2012-01-01

    introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging......This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters is...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

  14. Estimation of carrier mobility at organic semiconductor/insulator interface using an asymmetric capacitive test structure

    Rajesh Agarwal

    2016-04-01

    Full Text Available Mobility of carriers at the organic/insulator interface is crucial to the performance of organic thin film transistors. The present work describes estimation of mobility using admittance measurements performed on an asymmetric capacitive test structure. Besides the advantage of simplicity, it is shown that at low frequencies, the measured capacitance comes from a large area of channel making the capacitance-voltage characteristics insensitive to contact resistances. 2-D numerical simulation and experimental results obtained with Pentacene/Poly(4-vinyphenol system are presented to illustrate the operation and advantages of the proposed technique.

  15. Estimation of carrier mobility at organic semiconductor/insulator interface using an asymmetric capacitive test structure

    Agarwal, Rajesh; Agarwal, Ashish K.; Mazhari, Baquer

    2016-04-01

    Mobility of carriers at the organic/insulator interface is crucial to the performance of organic thin film transistors. The present work describes estimation of mobility using admittance measurements performed on an asymmetric capacitive test structure. Besides the advantage of simplicity, it is shown that at low frequencies, the measured capacitance comes from a large area of channel making the capacitance-voltage characteristics insensitive to contact resistances. 2-D numerical simulation and experimental results obtained with Pentacene/Poly(4-vinyphenol) system are presented to illustrate the operation and advantages of the proposed technique.

  16. Robust micromachining of compliant mechanisms using silicides

    We introduce an innovative sacrificial surface micromachining process that enhances the mechanical robustness of freestanding microstructures and compliant mechanisms. This process facilitates the fabrication, and improves the assembly yield of the out-of-plane micro sensors and actuators. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at the structure step can easily exceed the yield strength of the material and lead to the structure failure. Our process overcomes this topographic issue by virtually eliminating the step between the structure and its anchor, and achieves planarization without using chemical mechanical polishing. The process is based on low temperature and post-CMOS compatible nickel silicide technology. We use a layer of amorphous silicon (a-Si) as a sacrificial layer, which is locally converted to nickel silicide to form the anchors. High etch selectivity between silicon and nickel silicide in the xenon difluoride gas (sacrificial layer etchant) enables us to use the silicide to anchor the structures to the substrate. The formed silicide has the same thickness as the sacrificial layer; therefore, the structure is virtually flat. The maximum measured step between the anchor and the sacrificial layer is about 10 nm on a 300 nm thick sacrificial layer. (paper)

  17. Micromachining using a focused ion beam miller

    Full text: The focused ion beam (FIB) miller is becoming well established as a machine for the structural analysis of materials and for the rapid preparation of transmission electron microscope specimens. It has also been used for some time in the semiconducting materials industry for the analysis, repair and redesign of device materials. However, one emerging technique is the use of the FIB for micromachining. The FIB software can also be used to manufacture and machine components. This process can occur through converting software, typically in the form of bitmaps or TIF files, to proprietary 'stream' files. These files allow, often complex, patterns to be generated and milled into the specimen and thus the generation of micro-electromechanical systems. Frequently, this involves largely two-dimensional patterns and structures, however, more complex patterns and file types can be generated which allow, for example, device prototyping or the preparation of three-dimensional structures such as atom probe field ion microscope (APFIM) specimens. In this presentation the protocols for creating and using these files will be described together with examples of the patterns and its application to micromachining, device prototyping and APFIM specimens. Copyright (2002) Australian Society for Electron Microscopy Inc

  18. Void fraction measurement with capacitance meter

    The void fraction in an air-water system has been measured using the capacitance meter. Various flow regimes including bubbly, slug, churn, annular and drop-annular flow have been investigated. The superficial air and water velocity have been varied in the range of 0.145 less than or equal to j /SUB f/ less than or equal to 3.62 ft/sec and 0.183 less than or equal to j /SUB g/ less than or equal to 63.7 ft/sec respectively and the void fraction has been varied from 0.04 to 0.94. The capacitance meter is calibrated by both quick closing valve method and theoretical calculation based on drift-flux model. The sensitivity of void fraction measurement on sensor shape has been investigated with sensors of different width. Using the conventional theoretical curves of void fraction vs. relative susceptance, the results show that the sensor width has strong effect on void fraction measurement especially annular flow regime. The results also show that significant discrepancy exists between the theoretical curve and the experimental results. The reason for this discrepancy has been identified due to two dimensional edge effect of the circular sensor. A 2-D model has been developed taking into account of both sensor width and flow regime which gives good prediction of the experimental results

  19. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  20. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here. PMID:26233342

  1. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

    2015-07-01

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  2. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin [High Pressure Collaborative Access Team, Geophysical Laboratory, Carnegie Institution of Washington, Argonne, Illinois 60439 (United States)

    2015-07-15

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

  3. The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

    We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

  4. Learn Unity for 2D game development

    Thorn, Alan

    2013-01-01

    The only Unity book specifically covering 2D game development Written by Alan Thorn, experience game developer and author of seven books on game programming Hands-on examples of all major aspects of 2D game development using Unity

  5. X-ray microcalorimeter arrays fabricated by surface micromachining

    Hilton, G.C. E-mail: hilton@boulder.nist.gov; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D

    2004-03-11

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors.

  6. X-ray microcalorimeter arrays fabricated by surface micromachining

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

  7. Micro Capacitance Measuring Circuit Based on AC Bridge%基于交流电桥的动态微弱电容检测电路

    廉德钦; 何常德; 苗静; 杜春晖; 宛克敬; 薛晨阳

    2012-01-01

    基于MEMS技术研制的微电容超声传感器,在超声波作用下其有效电容的变化量仅为飞法级,且变化速度非常快,检测很困难.本文提出的半桥式交流电容检测电路能把快速变化的电容信号转换为电压信号,并加载到高频正弦激励信号中,再通过放大、解调、滤波得出电容变化量.该电路能很好地抑制寄生电容的影响,有良好的线性和稳定性,在200kHz的超声波作用下灵敏度可以达到2.8mV/fF,基本满足对超声传感器电容变化量的检测.%The Capacitive Micromachined Ultrasonic Transducers based on MEMS technology has developed.Under the action of ultrasound,the change of its effective capacitance is only fF-level and changes very fast,so measuring is very difficult.The half AC bridge capacitance detection circuit presented in this paper can convert the rapidly changing capacitance signal into voltage signal,and load the voltage signal into high-frequency sinusoidal excitation signal,then obtain capacitance variation through amplification,demodulation and filtering.The circuit effectively inhibits the influence of stray capacitance,and the linearity and stability of the circuit are good.The sensitivity can achieve 2.8mV7fF with 200kHz ultrasonic wave,and basically meet the needs of the micro capacitance change detection of the Capacitive Micromachined Ultrasonic Transducers.

  8. A micromachined pressure/flow sensor

    Oosterbroek, R.E.; Lammerink, T.S.J.; Berenschot, J.W.; Krijnen, G.J.M.; Elwenspoek, M.C.; Berg, van den A.

    1999-01-01

    The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid

  9. Acoustic backscatter and effective scatterer size estimates using a 2D CMUT transducer

    Liu, W.; Zagzebski, J A; Hall, T.J.; Madsen, E L; Varghese, T.; Kliewer, M.A.; Panda, S.; Lowery, C; Barnes, S.

    2008-01-01

    Compared to conventional piezoelectric transducers, new capacitive microfabricated ultrasonic transducer (CMUT) technology is expected to offer a broader bandwidth, higher resolution and advanced 3D/4D imaging inherent in a 2D array. For ultrasound scatterer size imaging, a broader frequency range provides more information on frequency-dependent backscatter, and therefore, generally more accurate size estimates. Elevational compounding, which can significantly reduce the large statistical flu...

  10. Synthesis and structure of large single crystalline silver hexagonal microplates suitable for micromachining

    We report a simple one-step synthesis method of large single crystalline Ag (111) hexagonal microplates with sharp edges and a size of up to tens of microns. Single silver crystals were produced by reduction silver nitrate aqueous solution with 4-(methylamino)phenol sulfate. Scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, selected area electron diffraction and optical microscopy techniques were combined to characterize the crystals. It is shown that the microplates can be easily dispersed and transferred as single objects onto different substrates and subsequently used as a high quality plasmonic starting material for micromachining of future nanocomponents, using modern top-down techniques like focused-ion beam milling and gas injection deposition. - Highlights: • Synthesis of large Ag hexagonal microplates with high crystallinity. • It is shown and discussed the role of twinning for the anisotropic 2D growth. • The Ag plates are stable in water and can be dispersed onto different substrates. • Their positioning and subsequent micromachining with FIB/GIS is demonstrated. • Suitable starting material for future plasmonic nanocomponents

  11. Fabrication of microfilters using excimer laser micromachining and testing of pressure drop

    The excimer laser micromachining process has displayed numerous advantages as an efficient tool for fabricating 2D and 3D micro-components, such as a high-resolution power (up to sub-micrometer range) and ablation without thermal damage. This work investigates the suitability and limitations of the process for the fabrication of microfilters using excimer laser micromachining. Their successful fabrication requires precise control over the work parameters, and deals with a number of challenges. Three microfilters of mean pore sizes 14.4 µm, 18.3 µm and 25.6 µm but with the same opening ratio, and containing up to 14 000 holes, have been fabricated. Their performance has been assessed by measuring air flow, to capture a trend in pressure drop induced by the filter for varying flow rates. The Reynolds number based on hole diameter covered is 0.0086–0.21. The key findings include development of a successful method of fabrication, a positive correlation between pressure drop and flow rate during testing, and an increase in slope of the pressure curve with a decrease in pore size. The correlation available in the literature shows a large deviation with respect to the experimental data and a new correlation has been proposed. These results are expected to help design microfilters in the very low Reynolds number range

  12. Synthesis and structure of large single crystalline silver hexagonal microplates suitable for micromachining

    Lyutov, Dimitar L.; Genkov, Kaloyan V.; Zyapkov, Anton D.; Tsutsumanova, Gichka G.; Tzonev, Atanas N. [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria); Lyutov, Lyudmil G. [Department of General and Inorganic Chemistry, Faculty of Chemistry, University of Sofia, 1, J. Bouchier Blvd, Sofia (Bulgaria); Russev, Stoyan C., E-mail: scr@phys.uni-sofia.bg [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria)

    2014-01-15

    We report a simple one-step synthesis method of large single crystalline Ag (111) hexagonal microplates with sharp edges and a size of up to tens of microns. Single silver crystals were produced by reduction silver nitrate aqueous solution with 4-(methylamino)phenol sulfate. Scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, selected area electron diffraction and optical microscopy techniques were combined to characterize the crystals. It is shown that the microplates can be easily dispersed and transferred as single objects onto different substrates and subsequently used as a high quality plasmonic starting material for micromachining of future nanocomponents, using modern top-down techniques like focused-ion beam milling and gas injection deposition. - Highlights: • Synthesis of large Ag hexagonal microplates with high crystallinity. • It is shown and discussed the role of twinning for the anisotropic 2D growth. • The Ag plates are stable in water and can be dispersed onto different substrates. • Their positioning and subsequent micromachining with FIB/GIS is demonstrated. • Suitable starting material for future plasmonic nanocomponents.

  13. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  14. Fabrication of silicon bolometers with bulk micromachining technology

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate β-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 μm3) and links (2150x22x15 μm3) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment

  15. Surface Micromachined Arrays of Transition-Edge Detectors Project

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  16. Fabrication of silicon bolometers with bulk micromachining technology

    Faes, A. E-mail: alesfaes@itc.it; Giacomozzi, F.; Margesin, B.; Nucciotti, A

    2004-03-11

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate {beta}-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 {mu}m{sup 3}) and links (2150x22x15 {mu}m{sup 3}) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment.

  17. Capacitive Position Sensor For Accelerometer

    Vanzandt, Thomas R.; Kaiser, William J.; Kenny, Thomas W.

    1995-01-01

    Capacitive position sensor measures displacement of proof mass in prototype accelerometer described in "Single-Crystal Springs for Accelerometers" (NPO-18795). Sensor is ultrasensitive, miniature device operating at ultra-high frequency and described in more detail in "Ultra-High-Frequency Capacitive Displacement Sensor," (NPO-18675). Advances in design and fabrication of prototype accelerometer also applicable to magnetometers and other sensors in which sensed quantities measured in terms of deflections of small springs.

  18. Micromachined Tunneling Displacement Transducers for Physical Sensors

    Kenny, T. W.; Kaiser, W. J.; Podosek, J. A.; Rockstad, H. K.; Reynolds, J. K.; Vote, E. C.

    1993-01-01

    We have designed and constructed a series of tunneling sensors which take advantage of the extreme position sensitivity of electron tunneling. In these sensors, a tunneling displacement transducer, based on scanning tunneling microscopy principles, is used to detect the signal-induced motion of a sensor element. Through the use of high-resonant frequency mechanical elements for the transducer, sensors may be constructed which offer wide bandwidth, and are robust and easily operated. Silicon micromachining may be used to fabricate the transducer elements, allowing integration of sensor and control electronics. Examples of tunneling accelerometers and infrared detectors will be discussed. In each case, the use of the tunneling transducer allows miniaturization of the sensor as well as enhancement of the sensor performance.

  19. Laser micromachining of sputtered DLC films

    Fu, Y.Q. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)]. E-mail: yf229@cam.ac.uk; Luo, J.K. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Flewitt, A.J. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Ong, S.E. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Zhang, S. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Milne, W.I. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)

    2006-04-30

    DLC films with different thicknesses (from 100 nm to 1.9 {mu}m) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp{sup 2}/sp{sup 3} ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF{sub 6} plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details.

  20. Surface micromachining of UV transparent materials

    Kopitkovas, G.; Lippert, T.; David, C.; Wokaun, A.; Gobrecht, J

    2004-04-01

    A method which utilizes XeCl excimer laser and an absorbing liquid in contact with the material for precise structuring of UV transparent materials is presented. This one step micromachining process enables the fabrication of micro-optical elements with continuous profiles such as Fresnel micro-lenses in CaF{sub 2} and quartz with fluences well below the damage threshold of these materials. The roughness of the etched features varies from 10 nm to 3 {mu}m depending on the laser fluence and material. The etch rates of different UV transparent materials (such as CaF{sub 2}, BaF{sub 2}, sapphire and quartz) at various laser fluences suggest that several different parameters influence the etching process.

  1. Laser micromachining of sputtered DLC films

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  2. Performance Evaluation of Laser Micro-Machining Installations

    Daemi, Bita; Mattsson, Lars

    2013-01-01

    Laser micro-machining is a growing field for micro manufacturing in many different materials. To obtain a better understanding of the accuracy of laser micro-machining equipment, moreover machine’s specification, a precise verification test is needed to measure the absolute performance of the machine. Available capability information is usually based on specifications given for the machine installations by machine deliverers. But in practice the absolute performances of some of the micro lase...

  3. The concept of chemical capacitance, A critique.

    Trissl, H. W.

    1981-01-01

    The concept of chemical capacitance as introduced by Hong and Mauzerall (Proc. Natl. Acad. Sci. U.S.A. 1974. 71:1564) is critically reexamined. This novel capacitance was introduced to explain the time-course of flash-induced photocurrents observed in lipid bilayer membranes containing porphyrins. According to Hong and Mauzerall, the chemical capacitance results from a combination of three fundamental capacitances: the geometric membrane capacitance and the two interfacial double layer capaci...

  4. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Chu, Bryan

    temperature and a 25% reduction in the surface roughness value over that of the baseline semi-synthetic cutting fluid. For the thermally-reduced platelets (with 4--8 graphene layers and in-solution characteristic lateral length of 562--2780 nm), a concentration of 0.2 wt% appears to be optimal. An investigation into the impingement dynamics of the graphene-laden colloidal solutions on a heated substrate reveals that the most important criterion dictating their machining performance is their ability to form uniform, submicron thick films of the platelets upon evaporation of the carrier fluid. As such, the characterization of the residual platelet film left behind on a heated substrate may be an effective technique for evaluating different graphene colloidal solutions for cutting fluids applications in micromachining. Graphene platelets have also recently been shown to reduce the aggressive chemical wear of diamond tools during the machining of transition metal alloys. However, the specific mechanisms responsible for this improvement are currently unknown. The modeling work presented in this thesis uses molecular dynamics techniques to shed light on the wear mitigation mechanisms that are active during the diamond cutting of steel when in the presence of graphene platelets. The dual mechanisms responsible for graphene-induced chemical wear mitigation are: 1) The formation of a physical barrier between the metal and tool atoms, preventing graphitization; and 2) The preferential transfer of carbon from the graphene platelet rather than from the diamond tool. The results of the simulations also provide new insight into the behavior of the 2D graphene platelets in the cutting zone, specifically illustrating the mechanisms of cleaving and interlayer sliding in graphene platelets under the high pressures in cutting zones.

  5. Surface modelling for 2D imagery

    Lieng, Henrik

    2014-01-01

    Vector graphics provides powerful tools for drawing scalable 2D imagery. With the rise of mobile computers, of different types of displays and image resolutions, vector graphics is receiving an increasing amount of attention. However, vector graphics is not the leading framework for creating and manipulating 2D imagery. The reason for this reluctance of employing vector graphical frameworks is that it is difficult to handle complex behaviour of colour across the 2D domain. ...

  6. Perspectives for spintronics in 2D materials

    Han, Wei

    2016-03-01

    The past decade has been especially creative for spintronics since the (re)discovery of various two dimensional (2D) materials. Due to the unusual physical characteristics, 2D materials have provided new platforms to probe the spin interaction with other degrees of freedom for electrons, as well as to be used for novel spintronics applications. This review briefly presents the most important recent and ongoing research for spintronics in 2D materials.

  7. Perspectives for spintronics in 2D materials

    Wei Han

    2016-03-01

    Full Text Available The past decade has been especially creative for spintronics since the (rediscovery of various two dimensional (2D materials. Due to the unusual physical characteristics, 2D materials have provided new platforms to probe the spin interaction with other degrees of freedom for electrons, as well as to be used for novel spintronics applications. This review briefly presents the most important recent and ongoing research for spintronics in 2D materials.

  8. 2D Barcode for DNA Encoding

    Elena Purcaru

    2011-09-01

    Full Text Available The paper presents a solution for endcoding/decoding DNA information in 2D barcodes. First part focuses on the existing techniques and symbologies in 2D barcodes field. The 2D barcode PDF417 is presented as starting point. The adaptations and optimizations on PDF417 and on DataMatrix lead to the solution – DNA2DBC – DeoxyriboNucleic Acid Two Dimensional Barcode. The second part shows the DNA2DBC encoding/decoding process step by step. In conclusions are enumerated the most important features of 2D barcode implementation for DNA.

  9. 2D Barcode for DNA Encoding

    Purcaru, Elena

    2012-01-01

    The paper presents a solution for endcoding/decoding DNA information in 2D barcodes. First part focuses on the existing techniques and symbologies in 2D barcodes field. The 2D barcode PDF417 is presented as starting point. The adaptations and optimizations on PDF417 and on DataMatrix lead to the solution - DNA2DBC - DeoxyriboNucleic Acid Two Dimensional Barcode. The second part shows the DNA2DBC encoding/decoding process step by step. In conclusions are enumerated the most important features of 2D barcode implementation for DNA.

  10. Bedform characterization through 2D spectral analysis

    Lefebvre, Alice; Ernstsen, Verner Brandbyge; Winter, Christian

    energetic peak of the 2D spectrum was found and its energy, frequency and direction were calculated. A power-law was fitted to the average of slices taken through the 2D spectrum; its slope and y-intercept were calculated. Using these results the test area was morphologically classified into 4 distinct...... characteristics using twodimensional (2D) spectral analysis is presented and tested on seabed elevation data from the Knudedyb tidal inlet in the Danish Wadden Sea, where large compound bedforms are found. The bathymetric data were divided into 20x20 m areas on which a 2D spectral analysis was applied. The most...

  11. UNITS IN $F_2D_{2p}$

    Kaur, Kuldeep; Khan, Manju

    2012-01-01

    Let $p$ be an odd prime, $D_{2p}$ be the dihedral group of order 2p, and $F_{2}$ be the finite field with two elements. If * denotes the canonical involution of the group algebra $F_2D_{2p}$, then bicyclic units are unitary units. In this note, we investigate the structure of the group $\\mathcal{B}(F_2D_{2p})$, generated by the bicyclic units of the group algebra $F_2D_{2p}$. Further, we obtain the structure of the unit group $\\mathcal{U}(F_2D_{2p})$ and the unitary subgroup $\\mathcal{U}_*(F_...

  12. Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared

    We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study. (paper)

  13. Annotated Bibliography of EDGE2D Use

    This annotated bibliography is intended to help EDGE2D users, and particularly new users, find existing published literature that has used EDGE2D. Our idea is that a person can find existing studies which may relate to his intended use, as well as gain ideas about other possible applications by scanning the attached tables

  14. 2D NMR studies of biomolecules

    The work described in this thesis comprises two related subjects. The first part describes methods to derive high-resolution structures of proteins in solution using two-dimensional (2-D) NMR. The second part describes 2-D NMR studies on the interaction between proteins and DNA. (author). 261 refs.; 52 figs.; 23 tabs

  15. Applications of 2D helical vortex dynamics

    Okulov, Valery; Sørensen, Jens Nørkær

    In the paper, we show how the assumption of helical symmetry in the context of 2D helical vortices can be exploited to analyse and to model various cases of rotating flows. From theory, examples of three basic applications of 2D dynamics of helical vortices embedded in flows with helical symmetry...

  16. Annotated Bibliography of EDGE2D Use

    J.D. Strachan and G. Corrigan

    2005-06-24

    This annotated bibliography is intended to help EDGE2D users, and particularly new users, find existing published literature that has used EDGE2D. Our idea is that a person can find existing studies which may relate to his intended use, as well as gain ideas about other possible applications by scanning the attached tables.

  17. Improving capacitance/damping ratio in a capacitive MEMS transducer

    Damping forces play an important role in capacitive MEMS (microelectromechanical systems) behavior, and typical damper design (parallel-plates) cannot address the design conflict between increase in electrical capacitance and damping reduction. Squeeze-film damping in in-plane parallel-plate MEMS is discussed here and a novel damper geometry for gap-varying parallel-plates is introduced and used to increase the capacitance/damping ratio. The new geometry is compared with a typical parallel-plate design for an silicon-on-insulator process (25 µm thick) and experimental data shows an approximate 25% to 50% reduction for the damping coefficient in structures with 500 µm long dampers (for a gap variation between 0.75 and 3.75 µm), in agreement with computational fluid dynamics simulations, without significantly affecting the capacitance value (∼4% reduction). Preliminary simulations to study the role of the different geometric parameters involved in the improved geometry are also performed and reveal that the channel width is the most critical value for effective damping reduction. (paper)

  18. Silicon micromachined sensor for gas detection

    Moldovan, Carmen; Hinescu, Lavinia; Hinescu, Mihail; Iosub, Rodica; Nisulescu, Mihai; Firtat, Bogdan; Modreanu, Mircea; Dascalu, Dan; Voicu, Victor; Tarabasanu, Cornel

    2003-08-15

    The paper presents the layout and the technological steps for an interdigitated integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by evaporation technique under high vacuum. The phthalocyanine derivatives are obtained by the same deposition technique. Considering the different sensitivities of phthalocyanines derivatives, we obtained different gas sensors. The copper phthalocyanine (CuPc), nickel phthalocyanine (NiPc) and iron phthalocyanine (FePc) have been investigated for NO{sub x} detection. The measurement of sensors for NO{sub x} and NO{sub 2} detection will be presented as gas concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyser. The measurements were made at room temperature but a medium temperature is applied (<200 deg. C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

  19. Silicon Micromachining in RF and Photonic Applications

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  20. An Investigation of Processes for Glass Micromachining

    Nguyen Van Toan

    2016-03-01

    Full Text Available This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE, and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax glass structure with an etching depth and sides of approximately 20 μm was observed via the wet etching process. The most important aspect of this work was to develop RIE and glass reflow techniques. The current challenges of these methods are addressed here. Deep Tempax glass pillars having a smooth surface, vertical shapes, and a high aspect ratio of 10 with 1-μm-diameter glass pillars, a 2-μm pitch, and a 10-μm etched depth were achieved via the RIE technique. Through-silicon wafer interconnects, embedded inside the Tempax glass, are successfully demonstrated via the glass reflow technique. Glass reflow into large cavities (larger than 100 μm, a micro-trench (0.8-μm wide trench, and a micro-capillary (1-μm diameter are investigated. An additional optimization of process flow was performed for glass penetration into micro-scale patterns.

  1. Apparatus for precision micromachining with lasers

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  2. Method and apparatus for precision laser micromachining

    Chang, Jim; Warner, Bruce E.; Dragon, Ernest P.

    2000-05-02

    A method and apparatus for micromachining and microdrilling which results in a machined part of superior surface quality is provided. The system uses a near diffraction limited, high repetition rate, short pulse length, visible wavelength laser. The laser is combined with a high speed precision tilting mirror and suitable beam shaping optics, thus allowing a large amount of energy to be accurately positioned and scanned on the workpiece. As a result of this system, complicated, high resolution machining patterns can be achieved. A cover plate may be temporarily attached to the workpiece. Then as the workpiece material is vaporized during the machining process, the vapors condense on the cover plate rather than the surface of the workpiece. In order to eliminate cutting rate variations as the cutting direction is varied, a randomly polarized laser beam is utilized. A rotating half-wave plate is used to achieve the random polarization. In order to correctly locate the focus at the desired location within the workpiece, the position of the focus is first determined by monitoring the speckle size while varying the distance between the workpiece and the focussing optics. When the speckle size reaches a maximum, the focus is located at the first surface of the workpiece. After the location of the focus has been determined, it is repositioned to the desired location within the workpiece, thus optimizing the quality of the machined area.

  3. New Multipole Method for 3-D Capacitance Extraction

    Zhao-Zhi Yang; Ze-Yi Wang

    2004-01-01

    This paper describes an effcient improvement of the multipole accelerated boundary element method for 3-D capacitance extraction.The overall relations between the positions of 2-D boundary elements are considered instead of only the relations between the center-points of the elements,and a new method of cube partitioning is introduced.Numerical results are presented to demonstrate that the method is accurate and has nearly linear computational growth as O(n),where n is the number of panels/boundary elements.The proposed method is more accurate and much faster than Fastcap.

  4. Inertial solvation in femtosecond 2D spectra

    Hybl, John; Albrecht Ferro, Allison; Farrow, Darcie; Jonas, David

    2001-03-01

    We have used 2D Fourier transform spectroscopy to investigate polar solvation. 2D spectroscopy can reveal molecular lineshapes beneath ensemble averaged spectra and freeze molecular motions to give an undistorted picture of the microscopic dynamics of polar solvation. The transition from "inhomogeneous" to "homogeneous" 2D spectra is governed by both vibrational relaxation and solvent motion. Therefore, the time dependence of the 2D spectrum directly reflects the total response of the solvent-solute system. IR144, a cyanine dye with a dipole moment change upon electronic excitation, was used to probe inertial solvation in methanol and propylene carbonate. Since the static Stokes' shift of IR144 in each of these solvents is similar, differences in the 2D spectra result from solvation dynamics. Initial results indicate that the larger propylene carbonate responds more slowly than methanol, but appear to be inconsistent with rotational estimates of the inertial response. To disentangle intra-molecular vibrations from solvent motion, the 2D spectra of IR144 will be compared to the time-dependent 2D spectra of the structurally related nonpolar cyanine dye HDITCP.

  5. Internal Photoemission Spectroscopy of 2-D Materials

    Nguyen, Nhan; Li, Mingda; Vishwanath, Suresh; Yan, Rusen; Xiao, Shudong; Xing, Huili; Cheng, Guangjun; Hight Walker, Angela; Zhang, Qin

    Recent research has shown the great benefits of using 2-D materials in the tunnel field-effect transistor (TFET), which is considered a promising candidate for the beyond-CMOS technology. The on-state current of TFET can be enhanced by engineering the band alignment of different 2D-2D or 2D-3D heterostructures. Here we present the internal photoemission spectroscopy (IPE) approach to determine the band alignments of various 2-D materials, in particular SnSe2 and WSe2, which have been proposed for new TFET designs. The metal-oxide-2-D semiconductor test structures are fabricated and characterized by IPE, where the band offsets from the 2-D semiconductor to the oxide conduction band minimum are determined by the threshold of the cube root of IPE yields as a function of photon energy. In particular, we find that SnSe2 has a larger electron affinity than most semiconductors and can be combined with other semiconductors to form near broken-gap heterojunctions with low barrier heights which can produce a higher on-state current. The details of data analysis of IPE and the results from Raman spectroscopy and spectroscopic ellipsometry measurements will also be presented and discussed.

  6. A Novel Uniplanar Multi-Electrode Capacitive Sensor for In-Situ Weathering Damage Detection of Nonmetallic Materials

    Ensheng Dong; Yonggui Dong; Wener Lv; Huibo Jia; Jun Li

    2006-01-01

    A uniplanar capacitive sensor with 5-electrodes on one plane substrate and a large reflector electrode, was designed to get the corresponding capacitance information for weathering damage detection of non-metallic materials exposed to a service environment. A 2-D finite-element method was employed to simulate the electric potential distribution and capacitance measurements for the sensor. 2 marble slabs, one was healthy and the other was notched, were experimentally detected. Both the simulation and the preliminary experimental results show that the measured capacitances decrease after weathering damage occurs in nonmetallic material. The reflector can enlarge the sensitive depth. The weathering assessment of nonmetallic materials can be done by processing the measured capacitances. The proposed approach can effectively detect the weathering damage of nonmetallic material and can be practically used for in-situ weathering damage evaluation.

  7. 2D supergravity in p+1 dimensions

    Gustafsson, H.; Lindstrom, U.

    1998-01-01

    We describe new $N$-extended 2D supergravities on a $(p+1)$-dimensional (bosonic) space. The fundamental objects are moving frame densities that equip each $(p+1)$-dimensional point with a 2D ``tangent space''. The theory is presented in a $[p+1, 2]$ superspace. For the special case of $p=1$ we recover the 2D supergravities in an unusual form. The formalism has been developed with applications to the string-parton picture of $D$-branes at strong coupling in mind.

  8. 2D Barcode for DNA Encoding

    Elena Purcaru; Cristian Toma

    2012-01-01

    The paper presents a solution for endcoding/decoding DNA information in 2D barcodes. First part focuses on the existing techniques and symbologies in 2D barcodes field. The 2D barcode PDF417 is presented as starting point. The adaptations and optimizations on PDF417 and on DataMatrix lead to the solution – DNA2DBC – DeoxyriboNucleic Acid Two Dimensional Barcode. The second part shows the DNA2DBC encoding/decoding process step by step. In conclusions are enumerated the most important features ...

  9. Driven shielding capacitive proximity sensor

    Vranish, John M. (Inventor); McConnell, Robert L. (Inventor)

    2000-01-01

    A capacitive proximity sensing element, backed by a reflector driven at the same voltage as and in phase with the sensor, is used to reflect the field lines away from a grounded robot arm towards an intruding object, thus dramatically increasing the sensor's range and sensitivity.

  10. Water desalination via capacitive deionization

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  11. Voltage Dependence of Supercapacitor Capacitance

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  12. Micromachined cutting blade formed from {211}-oriented silicon

    Fleming, James G.; Sniegowski, Jeffry J.; Montague, Stephen

    2003-09-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  13. Micromachined cutting blade formed from {211}-oriented silicon

    Fleming, James G. (Albuquerque, NM); Fleming, legal representative, Carol (Burbank, CA); Sniegowski, Jeffry J. (Tijeras, NM); Montague, Stephen (Albuquerque, NM)

    2011-08-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  14. Development of Micromachine Gas Turbine for Portable Power Generation

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  15. A batch process micromachined thermoelectric energy harvester: fabrication and characterization

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

  16. Acoustic micromachining of three-dimensional surfaces for biological applications.

    Entcheva, Emilia; Bien, Harold

    2005-02-01

    We present the use of an accessible micromachining technique (acoustic micromachining) for manufacturing micron-feature surfaces with non-discretely varying depth. Acoustic micromachining allows for non-photolithographic production of metal templates with programmable spatial patterns and involves the use of standard acoustic, cutting and electroplating equipment for mass production of vinyl records. Simple 3D patterns were transferred from an acoustic signal into working nickel templates, from which elastic polymer molds were obtained, featuring deep surface grooves and non-discrete (smooth) variations in the z-dimension. Versatility and applicability of the method is demonstrated in obtaining microfluidics structures, manufacturing high-surface area wavy polymer fibers, assembly of cell networks on scaffolds with 3D topography, and microcontact printing of proteins and cells. PMID:15672132

  17. Capacitive Proximity Sensor Has Longer Range

    Vranish, John M.

    1992-01-01

    Capacitive proximity sensor on robot arm detects nearby object via capacitive effect of object on frequency of oscillator. Sensing element part of oscillator circuit operating at about 20 kHz. Total capacitance between sensing element and ground constitutes tuning capacitance of oscillator. Sensor circuit includes shield driven by replica of alternating voltage applied to sensing element. Driven shield concentrates sensing electrostatic field in exterior region to enhance sensitivity to object. Sensitivity and dynamic range has corresponding 12-to-1 improvement.

  18. Active Targets For Capacitive Proximity Sensors

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Lightweight, low-power active targets devised for use with improved capacitive proximity sensors described in "Capacitive Proximity Sensor Has Longer Range" (GSC-13377), and "Capacitive Proximity Sensors With Additional Driven Shields" (GSC-13475). Active targets are short-distance electrostatic beacons; they generate known alternating electro-static fields used for alignment and/or to measure distances.

  19. Matrix models of 2d gravity

    These are introductory lectures for a general audience that give an overview of the subject of matrix models and their application to random surfaces, 2d gravity, and string theory. They are intentionally 1.5 years out of date

  20. Impact of Nanosize on Supercapacitance: Study of 1D Nanorods and 2D Thin-Films of Nickel Oxide.

    Patil, Ranjit A; Chang, Cheng-Ping; Devan, Rupesh S; Liou, Yung; Ma, Yuan-Ron

    2016-04-20

    We synthesized unique one-dimensional (1D) nanorods and two-dimensional (2D) thin-films of NiO on indium-tin-oxide thin-films using a hot-filament metal-oxide vapor deposition technique. The 1D nanorods have an average width and length of ∼100 and ∼500 nm, respectively, and the densely packed 2D thin-films have an average thickness of ∼500 nm. The 1D nanorods perform as parallel units for charge storing. However, the 2D thin-films act as one single unit for charge storing. The 2D thin-films possess a high specific capacitance of ∼746 F/g compared to 1D nanorods (∼230 F/g) using galvanostatic charge-discharge measurements at a current density of 3 A/g. Because the 1D NiO nanorods provide more plentiful surface areas than those of the 2D thin-films, they are fully active at the first few cycles. However, the capacitance retention of the 1D nanorods decays faster than that of the 2D thin-films. Also, the 1D NiO nanorods suffer from instability due to the fast electrochemical dissolution and high nanocontact resistance. Electrochemical impedance spectroscopy verifies that the low dimensionality of the 1D NiO nanorods induces the unavoidable effects that lead them to have poor supercapacitive performances. On the other hand, the slow electrochemical dissolution and small contact resistance in the 2D NiO thin-films favor to achieve high specific capacitance and great stability. PMID:27028491

  1. Deep ultraviolet laser micromachining of novel fibre optic devices

    A deep ultraviolet F2 laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F2-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components

  2. UV laser micromachining of ceramic materials: formation of columnar topographies

    Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

  3. System for programmable micromachining by means of submicron ion beam

    A system with submicron ion beam is described. Very bright ion beams are generated by electrohydrodynamic source and are focused in electrostatic ion-optical column. An octupole deflector is used for astigmatism correction and beam deviation. Stabilized power supply of all elements is ensured. Lines of 0.1 μm minimum width are obtained. The micromachining process is controlled by an automated system in CAMAC standard on line with Odrenok computer. Specific features of programmable micromachining and operation of the system in the mode of scanning ion microscope are considered

  4. Micro-machining using a focused ion beam

    This paper describes the micro-machining of micron and sub-micron scale structures by focused ion beams (FIB). The general requirements for micro-machining systems and the characteristics of FIB milling are considered. A range of applications of FIB milling are also discussed. These include failure analysis and device modification, which are now finding wide use in semiconductor research. Applications in other areas (such as optics and micro-mechanics) are increasing in number, FIB milling being a very flexible and precise method for producing prototype or specialized structures. (Author)

  5. 2D Saturable Absorbers for Fibre Lasers

    Robert I. Woodward

    2015-11-01

    Full Text Available Two-dimensional (2D nanomaterials are an emergent and promising platform for future photonic and optoelectronic applications. Here, we review recent progress demonstrating the application of 2D nanomaterials as versatile, wideband saturable absorbers for Q-switching and mode-locking fibre lasers. We focus specifically on the family of few-layer transition metal dichalcogenides, including MoS2, MoSe2 and WS2.

  6. Beltrami States in 2D Electron Magnetohydrodynamics

    Shivamoggi, B. K.

    2015-01-01

    In this paper, the Hamiltonian formulations along with the Poisson brackets for two-dimensional (2D) electron magnetohydrodynamics (EMHD) flows are developed. These formulations are used to deduce the Beltrami states for 2D EMHD flows. In the massless electron limit, the EMHD Beltrami states reduce to the force-free states, though there is no force-free Beltrami state in the general EMHD case.

  7. Silicon bulk micromachined hybrid dimensional artifact.

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  8. Matrix models and 2-D gravity

    In these lectures, I shall focus on the matrix formulation of 2-d gravity. In the first one, I shall discuss the main results of the continuum formulation of 2-d gravity, starting from the first renormalization group calculations which led to the concept of the conformal anomaly, going through the Polyakov bosonic string and the Liouville action, up to the recent results on the scaling properties of conformal field theories coupled to 2-d gravity. In the second lecture, I shall discuss the discrete formulation of 2-d gravity in term of random lattices, and the mapping onto random matrix models. The occurrence of critical points in the planar limit and the scaling limit at those critical points will be described, as well as the identification of these scaling limits with continuum 2-d gravity coupled to some matter field theory. In the third lecture, the double scaling limit in the one matrix model, and its connection with continuum non perturbative 2-d gravity, will be presented. The connection with the KdV hierarchy and the general form of the string equation will be discuted. In the fourth lecture, I shall discuss the non-perturbative effects present in the non perturbative solutions, in the case of pure gravity. The Schwinger-Dyson equations for pure gravity in the double scaling limit are described and their compatibility with the solutions of the string equation for pure gravity is shown to be somewhat problematic

  9. 2d index and surface operators

    In this paper we compute the superconformal index of 2d (2,2) supersymmetric gauge theories. The 2d superconformal index, a.k.a. flavored elliptic genus, is computed by a unitary matrix integral much like the matrix integral that computes the 4d superconformal index. We compute the 2d index explicitly for a number of examples. In the case of abelian gauge theories we see that the index is invariant under flop transition and under CY-LG correspondence. The index also provides a powerful check of the Seiberg-type duality for non-abelian gauge theories discovered by Hori and Tong. In the later half of the paper, we study half-BPS surface operators in N=2 superconformal gauge theories. They are engineered by coupling the 2d (2,2) supersymmetric gauge theory living on the support of the surface operator to the 4d N=2 theory, so that different realizations of the same surface operator with a given Levi type are related by a 2d analogue of the Seiberg duality. The index of this coupled system is computed by using the tools developed in the first half of the paper. The superconformal index in the presence of surface defect is expected to be invariant under generalized S-duality. We demonstrate that it is indeed the case. In doing so the Seiberg-type duality of the 2d theory plays an important role

  10. Effects of stray capacitance to ground in bipolar water impedance measurements based on capacitive electrodes

    Pallàs Areny, Ramon; Aliau Bonet, Carles

    2015-01-01

    Liquid impedance measurements based on capacitive (or contactless) electrodes Overcome electrode polarization problems but are affected by stray capacitance from the material being measured to ground, the same as measurements with direct-contact electrodes. This study shows that the effects of that capacitance depend on the impedance being measured and for bipolar impedance measurements they increase when the ratio between that stray capacitance and lectrode capacitance increases.

  11. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  12. 2-D DOA Estimation Based on 2D-MUSIC%基于2D-MUSIC算法的DOA估计

    康亚芳; 王静; 张清泉; 行小帅

    2014-01-01

    This paper discussed the performance of classical two-dimensional DOA estimation with 2D-MUSIC, based on the mathematical model of planar array and 2D-MUSIC DOA estimation, Taking uniform planar array for example, comput-er simulation experiment was carried for the effect of three kinds of different parameters on 2-D DOA estimation, and the simulation results were analyzed. And also verification test about the corresponding algorithm performance under the differ-ent parameters was discussed.%利用经典的2D-MUSIC算法对二维阵列的DOA估计进行了研究,在平面阵列数学模型以及2D-MUSIC算法的DOA估计模型基础上,以均匀平面阵列为例,对3种不同参数的DOA估计进行了计算机仿真,分析了仿真结果。得出了在不同参数变化趋势下DOA估计的相应变化情况。

  13. Full-bridge capacitive extensometer

    Peters, Randall D.

    1993-08-01

    Capacitive transducers have proven to be very effective sensors of small displacements, because of inherent stability and noninvasive high resolution. The most versatile ones have been those of a differential type, in which two elements are altered in opposite directions in response to change of the system parameter being monitored. Oftentimes, this differential pair has been incorporated into a bridge circuit, which is a useful means for employing synchronous detection to improve signal to noise ratios. Unlike previous differential capacitive dilatometers which used only two active capacitors, the present sensor is a full-bridge type, which is well suited to measuring low-level thermal expansions. This analog sensor is capable of 0.1 μm resolution anywhere within a range of several centimeters, with a linearity of 0.1%. Its user friendly output can be put on a strip chart recorder or directed to a computer for sophisticated data analysis.

  14. Water desalination via capacitive deionization

    Suss, M. E.; Porada, S.; Sun, X.; Biesheuvel, P. M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charged electrodes, commonly composed of highly porous carbon materials. The CDI community has grown exponentially over the past decade, driving tremendous advances via new cell architectures and system de...

  15. Capacitive de-ionization electrode

    Daily, III, William D.

    2013-03-19

    An electrode "cell" for use in a capacitive deionization (CDI) reactor consists of the electrode support structure, a non-reactive conductive material, the electrode accompaniment or substrate and a flow through screen/separator. These "layers" are repeated and the electrodes are sealed together with gaskets between two end plates to create stacked sets of alternating anode and cathode electrodes in the CDI reactor.

  16. Capacitively-Heated Fluidized Bed

    Mchale, E. J.

    1982-01-01

    Fluidized-bed chamber in which particles in bed are capacitively heated produces high yields of polycrystalline silicon for semiconductor devices. Deposition of unrecoverable silicon on chamber wall is reduced, and amount of recoverable silicon depositing on seed particles in bed is increased. Particles also have a size and density suitable for direct handling without consolidation, unlike silicon dust produced in heated-wall chambers.

  17. Materials Issues for Micromachines Development - ASCI Program Plan

    FANG,HUEI ELIOT; BATTAILE,CORBETT C.; BENAVIDES,GILBERT L.; ENSZ,MARK T.; BUCHHEIT,THOMAS E.; LAVAN,DAVID A.; CHEN,ER-PING; CHRISTENSON,TODD R.; DE BOER,MAARTEN P.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; PRASAD,SOMURI V.; REEDY JR.,EARL DAVID; THOMPSON,AIDAN P.; WONG,CHUNGNIN C.; YANG,PIN

    2000-05-01

    This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

  18. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented

  19. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    Rajta, I.; Gomez-Morilla, I.; Abraham, M.H.; Kiss, A.Z. E-mail: azkiss@atomki.hu

    2003-09-01

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented.

  20. Crystallographic effects during micromachining — A finite-element model

    Song, Shin-Hyung; Choi, Woo Chun

    2015-07-01

    Mechanical micromachining is a powerful and effective way for manufacturing small sized machine parts. Even though the micromachining process is similar to the traditional machining, the material behavior during the process is much different. In particular, many researchers report that the basic mechanics of the work material is affected by microstructures and their crystallographic orientations. For example, crystallographic orientations of the work material have significant influence on force response, chip formation and surface finish. In order to thoroughly understand the effect of crystallographic orientations on the micromachining process, finite-element model (FEM) simulating orthogonal cutting process of single crystallographic material was presented. For modeling the work material, rate sensitive single crystal plasticity of face-centered cubic (FCC) crystal was implemented. For the chip formation during the simulation, element deletion technique was used. The simulation model is developed using ABAQUS/explicit with user material subroutine via user material subroutine (VUMAT). Simulations showed that variation of the specific cutting energy at different crystallographic orientations of work material shows significant anisotropy. The developed FEM model can be a useful prediction tool of micromachining of crystalline materials.

  1. Laser micromachining of glass, silicon and ceramics. A review

    Řiháková, L.; Chmelíčková, Hana

    2015-01-01

    Roč. 4, č. 7 (2015), s. 41-49 Institutional support: RVO:68378271 Keywords : micromachining * laser * ablation * manufacturing Subject RIV: BH - Optics, Masers, Laser s http://www.eijst.org.uk/images/frontImages/gallery/Vol._4_No._7/6._41-49.pdf

  2. Femtosecond laser micromachining of a single-crystal superalloy

    Feng, Q. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)]. E-mail: cqfeng@engin.umich.edu; Picard, Y.N. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Liu, H. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Yalisove, S.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Mourou, G. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Pollock, T.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)

    2005-09-15

    Femtosecond laser micromachining of a single crystal superalloy has been investigated. Laser-induced ablation and associated damage was examined by means of scanning electron microscopy and transmission electron microscopy. These studies indicate a complete absence of conventional processing defects in the vicinity of machining area. The residual roughness of the machined surface was in the sub-micron range.

  3. High-aspect-ratio bulk micromachining of titanium.

    Aimi, Marco F; Rao, Masa P; MacDonald, Noel C; Zuruzi, Abu Samah; Bothman, David P

    2004-02-01

    Recent process developments have permitted the highly anisotropic bulk micromachining of titanium microelectromechanical systems (MEMS). By using the metal anisotropic reactive ion etching with oxidation (MARIO) process, arbitrarily high-aspect-ratio structures with straight sidewalls and micrometre-scale features have been bulk micromachined into titanium substrates of various thicknesses, ranging from 0.5-mm sheet down to 10-microm free-standing titanium foils. Bulk micromachined structures are generally free of residual stresses and are preferred when large, rigid, flat and/or high-force actuators are desired. However, so far there has been a limited ability to select materials on the basis of specific application in bulk micromachining, primarily because of the predominance of MEMS processes dedicated to single-crystal silicon, such as silicon deep reactive ion etching. The MARIO process permits the creation of bulk titanium MEMS, which offers potential for the use of a set of material properties beyond those provided by traditional semiconductor-based MEMS. Consequently, the MARIO process enables the fabrication of novel devices that capitalize on these assets to yield enhanced functionalities that would not be possible with traditional micromechanical material systems. PMID:14743212

  4. Tool wear studies in fabrication of microchannels in ultrasonic micromachining.

    Cheema, Manjot S; Dvivedi, Akshay; Sharma, Apurbba K

    2015-03-01

    Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the machined component. Appropriate selection of tool material is essential to overcome this problem. The present study discusses the effect of tool material, abrasive size and step feed in fabrication of microchannels by ultrasonic machining on borosilicate glass. Development of microchannels using ultrasonic micromachining were rarely reported. It was observed that tungsten carbide tool provided a better form accuracy in comparison to the microchannel machined by stainless steel tool. The tool wear mechanism in both materials is proposed by considering scanning electron micrographs of the tool as evidence. A one factor at a time approach was used to study the effect of various process parameters. PMID:25465965

  5. Fabrication of Beam Homogenizers in Quartz by Laser Micromachining

    Kopitkovas, G.; Lippert, T.; David, C.; Gobrecht, J.; Wokaun, A.

    2004-03-01

    A one step micromachining process, which utilizes laser assisted chemical wet etching and projection of a diffractive gray tone phase masks is applied to fabricate 3 - dimensional microstructures (such as planoconvex or Fresnel microlenses) in UV transparent materials. Arrays of microlenses in quartz are tested as a beam homogenizers for quadrupled Nd:YAG laser. (author)

  6. Femtosecond laser micromachining of silicon with an external electric field

    Femtosecond (fs) lasers have been shown to be superior to long-pulse lasers in micromachining a wide range of materials. The ultrashort pulses and their extremely high peak power lead to minimum thermal energy diffusion into the material and ensure fast heating and vaporizing of materials with reduced melting. Therefore, fs laser micromachining results in a much reduced heat-affected zone of the machined surfaces. However, plasma generation is normally associated with fs laser processing due to the substrate material breakdown. The plasma cloud may fall back onto the substrate as debris on the surface. In the case of fs laser micromachining of silicon (Si), a large number of micro/nano-sized particles are observed on the Si surface. Some of the particles are loose particles that can be easily removed. The remaining particles are however bonded to the substrate that cannot be cleaned off. For microelectronics applications, such surface contaminants affect the reliability of the device and have to be avoided. In our study, we employed an external electric field during the fs laser micromachining. It was found that the external electric field strength had a significant effect on the cleanliness of the machined Si surface. (technical note)

  7. Optical modulators with 2D layered materials

    Sun, Zhipei; Martinez, Amos; Wang, Feng

    2016-04-01

    Light modulation is an essential operation in photonics and optoelectronics. With existing and emerging technologies increasingly demanding compact, efficient, fast and broadband optical modulators, high-performance light modulation solutions are becoming indispensable. The recent realization that 2D layered materials could modulate light with superior performance has prompted intense research and significant advances, paving the way for realistic applications. In this Review, we cover the state of the art of optical modulators based on 2D materials, including graphene, transition metal dichalcogenides and black phosphorus. We discuss recent advances employing hybrid structures, such as 2D heterostructures, plasmonic structures, and silicon and fibre integrated structures. We also take a look at the future perspectives and discuss the potential of yet relatively unexplored mechanisms, such as magneto-optic and acousto-optic modulation.

  8. Automatic Contour Extraction from 2D Image

    Panagiotis GIOANNIS

    2011-03-01

    Full Text Available Aim: To develop a method for automatic contour extraction from a 2D image. Material and Method: The method is divided in two basic parts where the user initially chooses the starting point and the threshold. Finally the method is applied to computed tomography of bone images. Results: An interesting method is developed which can lead to a successful boundary extraction of 2D images. Specifically data extracted from a computed tomography images can be used for 2D bone reconstruction. Conclusions: We believe that such an algorithm or part of it can be applied on several other applications for shape feature extraction in medical image analysis and generally at computer graphics.

  9. 2D microwave imaging reflectometer electronics.

    Spear, A G; Domier, C W; Hu, X; Muscatello, C M; Ren, X; Tobias, B J; Luhmann, N C

    2014-11-01

    A 2D microwave imaging reflectometer system has been developed to visualize electron density fluctuations on the DIII-D tokamak. Simultaneously illuminated at four probe frequencies, large aperture optics image reflections from four density-dependent cutoff surfaces in the plasma over an extended region of the DIII-D plasma. Localized density fluctuations in the vicinity of the plasma cutoff surfaces modulate the plasma reflections, yielding a 2D image of electron density fluctuations. Details are presented of the receiver down conversion electronics that generate the in-phase (I) and quadrature (Q) reflectometer signals from which 2D density fluctuation data are obtained. Also presented are details on the control system and backplane used to manage the electronics as well as an introduction to the computer based control program. PMID:25430247

  10. 2D microwave imaging reflectometer electronics

    Spear, A. G.; Domier, C. W., E-mail: cwdomier@ucdavis.edu; Hu, X.; Muscatello, C. M.; Ren, X.; Luhmann, N. C. [Electrical and Computer Engineering, University of California, Davis, California 95616 (United States); Tobias, B. J. [Princeton Plasma Physics Laboratory, Princeton, New Jersey 08543 (United States)

    2014-11-15

    A 2D microwave imaging reflectometer system has been developed to visualize electron density fluctuations on the DIII-D tokamak. Simultaneously illuminated at four probe frequencies, large aperture optics image reflections from four density-dependent cutoff surfaces in the plasma over an extended region of the DIII-D plasma. Localized density fluctuations in the vicinity of the plasma cutoff surfaces modulate the plasma reflections, yielding a 2D image of electron density fluctuations. Details are presented of the receiver down conversion electronics that generate the in-phase (I) and quadrature (Q) reflectometer signals from which 2D density fluctuation data are obtained. Also presented are details on the control system and backplane used to manage the electronics as well as an introduction to the computer based control program.

  11. Capacitance-based damage detection sensing for aerospace structural composites

    Bahrami, P.; Yamamoto, N.; Chen, Y.; Manohara, H.

    2014-04-01

    Damage detection technology needs improvement for aerospace engineering application because detection within complex composite structures is difficult yet critical to avoid catastrophic failure. Damage detection is challenging in aerospace structures because not all the damage detection technology can cover the various defect types (delamination, fiber fracture, matrix crack etc.), or conditions (visibility, crack length size, etc.). These defect states are expected to become even more complex with future introduction of novel composites including nano-/microparticle reinforcement. Currently, non-destructive evaluation (NDE) methods with X-ray, ultrasound, or eddy current have good resolutions (analysis currently requires excessive wiring and complex signal analysis. Here, we present a capacitance sensor-based, structural defect detection technology with improved sensing capability. Thin dielectric polymer layer is integrated as part of the structure; the defect in the structure directly alters the sensing layer's capacitance, allowing full-coverage sensing capability independent of defect size, orientation or location. In this work, capacitance-based sensing capability was experimentally demonstrated with a 2D sensing layer consisting of a dielectric layer sandwiched by electrodes. These sensing layers were applied on substrate surfaces. Surface indentation damage (~1mm diameter) and its location were detected through measured capacitance changes: 1 to 250 % depending on the substrates. The damage detection sensors are light weight, and they can be conformably coated and can be part of the composite structure. Therefore it is suitable for aerospace structures such as cryogenic tanks and rocket fairings for example. The sensors can also be operating in space and harsh environment such as high temperature and vacuum.

  12. Layer-by-Layer Assembled 2D Montmorillonite Dielectrics for Solution-Processed Electronics.

    Zhu, Jian; Liu, Xiaolong; Geier, Michael L; McMorrow, Julian J; Jariwala, Deep; Beck, Megan E; Huang, Wei; Marks, Tobin J; Hersam, Mark C

    2016-01-01

    Layer-by-layer assembled 2D montmorillonite nanosheets are shown to be high-performance, solution-processed dielectrics. These scalable and spatially uniform sub-10 nm thick dielectrics yield high areal capacitances of ≈600 nF cm(-2) and low leakage currents down to 6 × 10(-9) A cm(-2) that enable low voltage operation of p-type semiconducting single-walled carbon nanotube and n-type indium gallium zinc oxide field-effect transistors. PMID:26514248

  13. An approach to evaluate capacitance, capacitive reactance and resistance of pivoted pads of a thrust bearing

    Prashad, Har

    1992-07-01

    A theoretical approach is developed for determining the capacitance and active resistance between the interacting surfaces of pivoted pads and thrust collar, under different conditions of operation. It is shown that resistance and capacitive reactance of a thrust bearing decrease with the number of pads times the values of these parameters for an individual pad, and that capacitance increases with the number of pads times the capacitance of an individual pad. The analysis presented has a potential to diagnose the behavior of pivoted pad thrust bearings with the angle of tilt and the ratio of film thickness at the leading to trailing edge, by determining the variation of capacitance, resistance, and capacitive reactance.

  14. Path integral quantization of 2 D- gravity

    2 D- gravity is investigated using the Hamilton-Jacobi formalism. The equations of motion and the action integral are obtained as total differential equations in many variables. The integrability conditions, lead us to obtain the path integral quantization without any need to introduce any extra un-physical variables. (author)

  15. Port Adriano, 2D-Model tests

    Burcharth, Hans F.; Meinert, Palle; Andersen, Thomas Lykke

    This report present the results of 2D physical model tests (length scale 1:50) carried out in a waveflume at Dept. of Civil Engineering, Aalborg University (AAU). The objective of the tests was: To identify cross section design which restrict the overtopping to acceptable levels and to record the...

  16. Baby universes in 2d quantum gravity

    Ambjorn, J.; S. Jain; G. Thorleifsson

    1993-01-01

    We investigate the fractal structure of $2d$ quantum gravity, both for pure gravity and for gravity coupled to multiple gaussian fields and for gravity coupled to Ising spins. The roughness of the surfaces is described in terms of baby universes and using numerical simulations we measure their distribution which is related to the string susceptibility exponent $\\g_{string}$.

  17. Horns Rev II, 2-D Model Tests

    Andersen, Thomas Lykke; Frigaard, Peter

    This report present the results of 2D physical model tests carried out in the shallow wave flume at Dept. of Civil Engineering, Aalborg University (AAU), on behalf of Energy E2 A/S part of DONG Energy A/S, Denmark. The objective of the tests was: to investigate the combined influence of the pile...

  18. ORION, Post-processor for Finite Elements Program NIKE2D and DYNA2D

    Description of program or function: ORION is an interactive post- processor for the analysis programs NIKE2D (NESC 9923), DYNA2D (NESC 9910), TOPAZ, TOPAZ2D (NESC9801), GEM2D (NESC9679), and TACO2D. ORION reads the binary plot data files generated by the two- dimensional finite element programs used at LLNL. Contours and color fringe plots of a large number of quantities may be displayed on meshes consisting of triangular and quadrilateral elements. ORION can compute strain measures, interface pressures along slide lines, reaction forces along constrained boundaries, and momentum. ORION has the capability to plot color fringes, contour lines, vector plots, principal stress lines, deformed meshes and material outlines, time histories, reaction forces along constraint boundaries, interface pressures along slide lines, and user-supplied labels

  19. Capacitance enhancement via electrode patterning.

    Ho, Tuan A; Striolo, Alberto

    2013-11-28

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties. PMID:24289370

  20. Dual Cryogenic Capacitive Density Sensor

    Youngquist, Robert; Mata, Carlos; Vokrot, Peter; Cox, Robert

    2009-01-01

    A dual cryogenic capacitive density sensor has been developed. The device contains capacitive sensors that monitor two-phase cryogenic flow density to within 1% accuracy, which, if temperature were known, could be used to determine the ratio of liquid to gas in the line. Two of these density sensors, located a known distance apart, comprise the sensor, providing some information on the velocity of the flow. This sensor was constructed as a proposed mass flowmeter with high data acquisition rates. Without moving parts, this device is capable of detecting the density change within a two-phase cryogenic flow more than 100 times a second. Detection is enabled by a series of two sets of five parallel plates with stainless steel, cryogenically rated tubing. The parallel plates form the two capacitive sensors, which are measured by electrically isolated digital electronics. These capacitors monitor the dielectric of the flow essentially the density of the flow and can be used to determine (along with temperature) the ratio of cryogenic liquid to gas. Combining this information with the velocity of the flow can, with care, be used to approximate the total two-phase mass flow. The sensor can be operated at moderately high pressures and can be lowered into a cryogenic bath. The electronics have been substantially improved over the older sensors, incorporating a better microprocessor, elaborate ground loop protection and noise limiting circuitry, and reduced temperature sensitivity. At the time of this writing, this design has been bench tested at room temperature, but actual cryogenic tests are pending

  1. Nucleotide Capacitance Calculation for DNA Sequencing

    Lu, Jun-Qiang; Zhang, X.-G.

    2008-01-01

    Using a first-principles linear response theory, the capacitance of the DNA nucleotides, adenine, cytosine, guanine, and thymine, are calculated. The difference in the capacitance between the nucleotides is studied with respect to conformational distortion. The result suggests that although an alternate current capacitance measurement of a single-stranded DNA chain threaded through a nanogap electrode may not be sufficient to be used as a standalone method for rapid DNA sequencing, the capaci...

  2. Electrical Capacitance Volume Tomography: Design and Applications

    Warsito Warsito; Liang-Shih Fan; Qussai Marashdeh; Fei Wang

    2010-01-01

    This article reports recent advances and progress in the field of electrical capacitance volume tomography (ECVT). ECVT, developed from the two-dimensional electrical capacitance tomography (ECT), is a promising non-intrusive imaging technology that can provide real-time three-dimensional images of the sensing domain. Images are reconstructed from capacitance measurements acquired by electrodes placed on the outside boundary of the testing vessel. In this article, a review of progress on capa...

  3. Electrochemical capacitance of a leaky nanocapacitor

    Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We report a detailed theoretical investigation on electrochemical capacitance of a nanoscale capacitor where there is a DC coupling between the two conductors. For this ``leaky'' quantum capacitor, we have derived general analytic expressions of the linear and second order nonlinear electrochemical capacitance within a first principles quantum theory in the discrete potential approximation. Linear and nonlinear capacitance coefficients are also derived in a self-consistent manner without the ...

  4. Flexible PVDF ferroelectric capacitive temperature sensor

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  5. Capacitance variation in electrostatic energy harvester with conductive droplet moving on electret film

    This work addresses numerical finite element calculations on a droplet-based electrostatic energy harvester to reveal additional characteristics that supplement previous test results. Assumptions of 2D electrode and static droplet profile have been applied to make the simulation achievable based on the real prototype. We investigate the consequences of a uniform space charge distribution in the film. Capacitance variation and open-circuit voltage of the simulation model have been determined and display respectively maximum and minimum magnitudes when the droplet is in the middle of finger gap. The sharp variation of capacitance, during which the droplet moves from the gap centre to the finger centre, can explain the narrow peaks of output voltage seen in experiments. Additionally, the influence of droplet size on the capacitance variation is also investigated

  6. Application of 2D Non-Graphene Materials and 2D Oxide Nanostructures for Biosensing Technology.

    Shavanova, Kateryna; Bakakina, Yulia; Burkova, Inna; Shtepliuk, Ivan; Viter, Roman; Ubelis, Arnolds; Beni, Valerio; Starodub, Nickolaj; Yakimova, Rositsa; Khranovskyy, Volodymyr

    2016-01-01

    The discovery of graphene and its unique properties has inspired researchers to try to invent other two-dimensional (2D) materials. After considerable research effort, a distinct "beyond graphene" domain has been established, comprising the library of non-graphene 2D materials. It is significant that some 2D non-graphene materials possess solid advantages over their predecessor, such as having a direct band gap, and therefore are highly promising for a number of applications. These applications are not limited to nano- and opto-electronics, but have a strong potential in biosensing technologies, as one example. However, since most of the 2D non-graphene materials have been newly discovered, most of the research efforts are concentrated on material synthesis and the investigation of the properties of the material. Applications of 2D non-graphene materials are still at the embryonic stage, and the integration of 2D non-graphene materials into devices is scarcely reported. However, in recent years, numerous reports have blossomed about 2D material-based biosensors, evidencing the growing potential of 2D non-graphene materials for biosensing applications. This review highlights the recent progress in research on the potential of using 2D non-graphene materials and similar oxide nanostructures for different types of biosensors (optical and electrochemical). A wide range of biological targets, such as glucose, dopamine, cortisol, DNA, IgG, bisphenol, ascorbic acid, cytochrome and estradiol, has been reported to be successfully detected by biosensors with transducers made of 2D non-graphene materials. PMID:26861346

  7. Detection of Telomerase Activity Using Capacitance Measurements

    Kang, Bong Keun; Lee, Ri Mi; Choi, Ahmi; Jung, Hyo-Il; Yoo, Kyung-Hwa

    2007-03-01

    Telomerase activity has been found in about 85% cancer cells, while no activity observed in normal cells, so that telomerase has been proposed as a marker for cancer detection. Here, we describe electrical detection of telomerase activity using capacitance measurements. We have investigated the length dependence of capacitance on DNA solutions and found that the capacitance of DNA solutions were dependent on the DNA length. In addition, upon adding telomerase into the solution of telomeric substrate primer, the capacitance was observed to change as a function of time due to the telomeric elongation. These results suggest that this novel nanosensor may be used for rapid detection of telomerase activity.

  8. Micromachined Ultrasonic Transducers for 3-D Imaging

    Christiansen, Thomas Lehrmann

    Real-time ultrasound imaging is a widely used technique in medical diagnostics. Recently, ultrasound systems offering real-time imaging in 3-D has emerged. However, the high complexity of the transducer probes and the considerable increase in data to be processed compared to conventional 2-D...... ultrasound imaging results in expensive systems, which limits the more wide-spread use and clinical development of volumetric ultrasound. The main goal of this thesis is to demonstrate new transducer technologies that can achieve real-time volumetric ultrasound imaging without the complexity and cost...... capable of producing 62+62-element row-column addressed CMUT arrays with negligible charging issues. The arrays include an integrated apodization, which reduces the ghost echoes produced by the edge waves in such arrays by 15:8 dB. The acoustical cross-talk is measured on fabricated arrays, showing a 24 d...

  9. Module Eleven: Capacitance; Basic Electricity and Electronics Individualized Learning System.

    Bureau of Naval Personnel, Washington, DC.

    In this module the student will learn about another circuit quantity, capacitance, and discover the effects of this component on circuit current, voltage, and power. The module is divided into seven lessons: the capacitor, theory of capacitance, total capacitance, RC (resistive-capacitive circuit) time constant, capacitive reactance, phase and…

  10. Branes in the 2D black hole

    Ribault, Sylvain E-mail: ribault@mth.kcl.ac.uk; Schomerus, Volker

    2004-02-01

    We present a comprehensive analysis of branes in the Euclidean 2D black hole (cigar). In particular, exact boundary states and annulus amplitudes are provided for D0-branes which are localized at the tip of the cigar as well as for two families of extended D1 and D2-branes. Our results are based on closely related studies for the Euclidean AdS3 model and, as predicted by the conjectured duality between the 2D black hole and the sine-Liouville model, they share many features with branes in Liouville theory. New features arise here due to the presence of closed string modes which are localized near the tip of the cigar. The paper concludes with some remarks on possible applications to exact tachyon condensation and matrix models. (author)

  11. Branes in the 2D black hole

    Ribault, S; Ribault, Sylvain; Schomerus, Volker

    2004-01-01

    We present a comprehensive analysis of branes in the Euclidean 2D black hole (cigar). In particular, exact boundary states and annulus amplitudes are provided for D0-branes which are localized at the tip of the cigar as well as for two families of extended D1 and D2-branes. Our results are based on closely related studies for the Euclidean AdS3 model and, as predicted by the conjectured duality between the 2D black hole and the sine-Liouville model, they share many features with branes in Liouville theory. New features arise here due to the presence of closed string modes which are localized near the tip of the cigar. The paper concludes with some remarks on possible applications to exact tachyon condensation and matrix models.

  12. Branes in the 2D black hole

    We present a comprehensive analysis of branes in the Euclidean 2D black hole (cigar). In particular, exact boundary states and annulus amplitudes are provided for D0-branes which are localized at the tip of the cigar as well as for two families of extended D1 and D2-branes. Our results are based on closely related studies for the Euclidean AdS3 model and, as predicted by the conjectured duality between the 2D black hole and the sine-Liouville model, they share many features with branes in Liouville theory. New features arise here due to the presence of closed string modes which are localized near the tip of the cigar. The paper concludes with some remarks on possible applications to exact tachyon condensation and matrix models. (author)

  13. 2-D geometrical analysis of deformation

    Engineering structures such as dams, bridges, high rise buildings, etc. are subject to deformation. Deformation survey is therefore necessary to determine the magnitude and direction of such movements for the purpose of safety assessment. In this study, a strategy for two-step analyses for deformation survey rising the two dimensional (2-D) geodetic method has been developed, consisting of independent least squares estimation (LSE) of each epoch followed by deformation detection. Important aspects on LSE include global and local testing. In deformation detection, the following aspects were implemented; datum definition by the user. determination of stable datum points, geometrical analysis of deformation and graphic presentation. The developed strategy has been implemented in three computer programs, COMPUT, DEFORM and STRANS. Tests carried out with simulated and known data show that the developed strategy and programs are applicable for 2-D geometrical detection of deformation. (Author)

  14. Capacitance Measurement with a Sigma Delta Converter for 3D Electrical Capacitance Tomography

    Nurge, Mark

    2005-01-01

    This paper will explore suitability of a newly available capacitance to digital converter for use in a 3D Electrical Capacitance Tomography system. A switch design is presented along with circuitry needed to extend the range of the capacitance to digital converter. Results are then discussed for a 15+ hour drift and noise test.

  15. Capacitive facial movement detection for human-computer interaction to click by frowning and lifting eyebrows: assistive technology.

    Rantanen, Ville; Niemenlehto, Pekka-Henrik; Verho, Jarmo; Lekkala, Jukka

    2010-01-01

    A capacitive facial movement detection method designed for human-computer interaction is presented. Some point-and-click interfaces use facial electromyography for clicking. The presented method provides a contactless alternative. Electrodes with no galvanic coupling to the face are used to form electric fields. Changes in the electric fields due to facial movements are detected by measuring capacitances between the electrodes. A prototype device for measuring a capacitance signal affected by frowning and lifting eyebrows was constructed. A commercial integrated circuit for capacitive touch sensors is used in the measurement. The applied movement detection algorithm uses an adaptive approach to provide operation capability in noisy and dynamic environments. Experimentation with 10 test subjects proved that, under controlled circumstances, the movements are detected with good efficiency, but characterizing the movements into frowns and eyebrow lifts is more problematic. Integration with a two-dimensional (2D) pointing solution and further experiments are still required. PMID:20016948

  16. Realistic and efficient 2D crack simulation

    Yadegar, Jacob; Liu, Xiaoqing; Singh, Abhishek

    2010-04-01

    Although numerical algorithms for 2D crack simulation have been studied in Modeling and Simulation (M&S) and computer graphics for decades, realism and computational efficiency are still major challenges. In this paper, we introduce a high-fidelity, scalable, adaptive and efficient/runtime 2D crack/fracture simulation system by applying the mathematically elegant Peano-Cesaro triangular meshing/remeshing technique to model the generation of shards/fragments. The recursive fractal sweep associated with the Peano-Cesaro triangulation provides efficient local multi-resolution refinement to any level-of-detail. The generated binary decomposition tree also provides efficient neighbor retrieval mechanism used for mesh element splitting and merging with minimal memory requirements essential for realistic 2D fragment formation. Upon load impact/contact/penetration, a number of factors including impact angle, impact energy, and material properties are all taken into account to produce the criteria of crack initialization, propagation, and termination leading to realistic fractal-like rubble/fragments formation. The aforementioned parameters are used as variables of probabilistic models of cracks/shards formation, making the proposed solution highly adaptive by allowing machine learning mechanisms learn the optimal values for the variables/parameters based on prior benchmark data generated by off-line physics based simulation solutions that produce accurate fractures/shards though at highly non-real time paste. Crack/fracture simulation has been conducted on various load impacts with different initial locations at various impulse scales. The simulation results demonstrate that the proposed system has the capability to realistically and efficiently simulate 2D crack phenomena (such as window shattering and shards generation) with diverse potentials in military and civil M&S applications such as training and mission planning.

  17. 2D materials: Graphene and others

    Bansal, Suneev Anil; Singh, Amrinder Pal; Kumar, Suresh

    2016-05-01

    Present report reviews the recent advancements in new atomically thick 2D materials. Materials covered in this review are Graphene, Silicene, Germanene, Boron Nitride (BN) and Transition metal chalcogenides (TMC). These materials show extraordinary mechanical, electronic and optical properties which make them suitable candidates for future applications. Apart from unique properties, tune-ability of highly desirable properties of these materials is also an important area to be emphasized on.

  18. 2D-Tasks for Cognitive Rehabilitation

    Caballero Hernandez, Ruth; Martinez Moreno, Jose Maria; García Molina, A.; Ferrer Celma, S.; Solana Sánchez, Javier; Sanchez Carrion, R.; Fernandez Casado, E.; Pérez Rodríguez, Rodrigo; Gomez Pulido, A.; Anglès Tafalla, C.; Cáceres Taladriz, César; Ferre Vergada, M.; Roig Rovira, Teresa; Garcia Lopez, P.; Tormos Muñoz, Josep M.

    2011-01-01

    Neuropsychological Rehabilitation is a complex clinic process which tries to restore or compensate cognitive and behavioral disorders in people suffering from a central nervous system injury. Information and Communication Technologies (ICTs) in Biomedical Engineering play an essential role in this field, allowing improvement and expansion of present rehabilitation programs. This paper presents a set of cognitive rehabilitation 2D-Tasks for patients with Acquired Brain Injury (ABI). These t...

  19. Ultrahigh Temperature Capacitive Pressure Sensor

    Harsh, Kevin

    2014-01-01

    Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and track system health status and failure modes of advanced propulsion systems. Because microsensors must operate in extremely harsh environments, there are many technical challenges involved in developing reliable systems. In addition to high temperatures and pressures, sensing systems are exposed to oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. In these harsh conditions, sensors must be able to withstand high flow rates, vibration, jet fuel, and exhaust. In order for existing and future aeropropulsion turbine engines to improve safety and reduce cost and emissions while controlling engine instabilities, more accurate and complete sensor information is necessary. High-temperature (300 to 1,350 C) capacitive pressure sensors are of particular interest due to their high measurement bandwidth and inherent suitability for wireless readout schemes. The objective of this project is to develop a capacitive pressure sensor based on silicon carbon nitride (SiCN), a new class of high-temperature ceramic materials, which possesses excellent mechanical and electric properties at temperatures up to 1,600 C.

  20. Engineering light outcoupling in 2D materials

    Lien, Derhsien

    2015-02-11

    When light is incident on 2D transition metal dichalcogenides (TMDCs), it engages in multiple reflections within underlying substrates, producing interferences that lead to enhancement or attenuation of the incoming and outgoing strength of light. Here, we report a simple method to engineer the light outcoupling in semiconducting TMDCs by modulating their dielectric surroundings. We show that by modulating the thicknesses of underlying substrates and capping layers, the interference caused by substrate can significantly enhance the light absorption and emission of WSe2, resulting in a ∼11 times increase in Raman signal and a ∼30 times increase in the photoluminescence (PL) intensity of WSe2. On the basis of the interference model, we also propose a strategy to control the photonic and optoelectronic properties of thin-layer WSe2. This work demonstrates the utilization of outcoupling engineering in 2D materials and offers a new route toward the realization of novel optoelectronic devices, such as 2D LEDs and solar cells.

  1. Self-sacrificial surface micromachining using poly(methyl methacrylate)

    This paper explains the idea of self-sacrificial surface micromachining. In a self-sacrificial process, there is no distinction between structural and sacrificial layers. Instead, during patterning, an in situ chemical change converts a structural material into a sacrificial material, or vice versa. This greatly increases the design space of a self-sacrificial process when compared to a traditional process with the same number of layers, as all layers can be used simultaneously for both structural and sacrificial purposes. To show the possibility of self-sacrificial surface micromachining, a concrete implementation was developed using poly(methyl methacrylate) (PMMA) as the material. Unexposed PMMA, with a high average molecular weight, was used as the structural material. Exposed PMMA, with a lower average molecular weight, was used as the sacrificial material. The in situ chemical change was caused by deep-UV irradiation at 254 nm

  2. Cytotoxicity of implantable microelectrode arrays produced by laser micromachining.

    Green, Rylie A; Ordonez, Juan S; Schuettler, Martin; Poole-Warren, Laura A; Lovell, Nigel H; Suaning, Gregg J

    2010-02-01

    Implantable high-density microelectrode arrays have been successfully fabricated using laser micromachining of conventional implant materials, polydimethylsiloxane (PDMS) and platinum (Pt) foil. This study investigates the impact of modifying PDMS and Pt with high power laser beams and the possible toxicity of by-products that may remain on the implantable device. Materials were characterised both chemically and biologically through x-ray photoelectron spectroscopy (XPS), cell growth inhibition assays and a direct contact cell proliferation assay. It was found that laser micromachining produces oxides of silicon and platinum on the PDMS and Pt respectively. While the chemical properties of materials were altered, there was negligible change in the biological response to either extracts or cell growth directly on the composite electrode array. PMID:19833388

  3. Femtosecond Laser Micromachining Photonic and Microfluidic Devices in Transparent Materials

    Cerullo, Giulio; Ramponi, Roberta

    2012-01-01

    Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

  4. Proton beam micromachining on strippable aqueous base developable negative resist

    Rajta, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary)]. E-mail: rajta@atomki.hu; Baradacs, E. [University of Debrecen, Department of Environmental Physics, H-4026 Debrecen, Poroszlay u. 6 (Hungary); Chatzichristidi, M. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece); Valamontes, E.S. [Department of Electronics Technological Educational Institute of Athens, 12210 Aegaleo (Greece); Uzonyi, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary); Raptis, I. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece)

    2005-04-01

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 {mu}m wide lines with aspect ratio 4-6 were resolved.

  5. Proton beam micromachining on strippable aqueous base developable negative resist

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 μm wide lines with aspect ratio 4-6 were resolved

  6. Deep ultraviolet laser micromachining of novel fibre optic devices

    Li, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Dou, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Herman, P R [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Fricke-Begemann, T [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Ihlemann, J [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Marowsky, G [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany)

    2007-04-15

    A deep ultraviolet F{sub 2} laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F{sub 2}-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  7. Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

    This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 ± 6 ppm °C−1 and Young's modulus to be 5.0 ± 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties

  8. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.

    Giridhar, Malalahalli S; Seong, Kibyung; Schülzgen, Axel; Khulbe, Pramod; Peyghambarian, Nasser; Mansuripur, Masud

    2004-08-10

    We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed. PMID:15376436

  9. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  10. Terahertz antennas with silicon micromachined front-end

    Chattopadhyay, Goutam; Reck, Theodore; Jung Kubiak, Cecile; Lee, Choonsup; Siles, Jose Vicente; Chahat, Naser; Cooper, Ken; Schlecht, Erich T.; Alonso del Pino, María; Mehdi, Imran

    2014-01-01

    Increasingly, terahertz systems are being used for multi-pixel receivers for different applications from mapping the star-forming regions of galaxies to stand-off radar imaging. Since microstrip patch antennas are too lossy and corrugated horn antenna arrays are difficult to machine at terahertz frequencies, suitable antenna array designs have been one of the key area of research for this field. Moreover, silicon micromachined waveguide housing for front-end integration is becoming very popul...

  11. High-speed Laser Micromachining with Copper Bromide Laser

    Balchev, I I; Minkovski, N I; Sabotinov, N V; Balchev, Ivaylo I.; Kostadinov, Ivan K.; Minkovski, Nikolai I.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  12. High speed in situ depth profiling of ultrafast micromachining.

    Webster, Paul J L; Muller, Matthew S; Fraser, James M

    2007-11-12

    We demonstrate real-time depth profiling of ultrafast micromachining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 mum. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic. PMID:19550777

  13. Artificial intelligence: Collective behaviors of synthetic micromachines

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  14. Micromachined nanofiltration modules for lab-on-a-chip applications

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm−1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested. (paper)

  15. Micromachined nanofiltration modules for lab-on-a-chip applications

    Shen, C.; Mokkapati, V. R. S. S.; Pham, H. T. M.; Sarro, P. M.

    2012-02-01

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm-1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested.

  16. Micromachining of polydimethylsiloxane induced by laser plasma EUV light

    Torii, S.; Makimura, T.; Okazaki, K.; Nakamura, D.; Takahashi, A.; Okada, T.; Niino, H.; Murakami, K.

    2011-06-01

    Polydimethylsiloxane (PDMS) is fundamental materials in the field of biotechnology. Because of its biocompatibility, microfabricated PDMS sheets are applied to micro-reactors and microchips for cell culture. Conventionally, the microstructures were fabricated by means of cast or imprint using molds, however it is difficult to fabricate the structures at high aspect ratios such as through-holes/vertical channels. The fabrication of the high-aspect structures would enable us to stack sheets to realize 3D fluidic circuits. In order to achieve the micromachining, direct photo-ablation by short wavelength light is promising. In the previous works, we investigated ablation of transparent materials such as silica glass and poly(methyl methacrylate) induced by irradiation with laser plasma EUV light. We achieved smooth and fine nanomachining. In this work, we applied our technique to PDMS micromachining. We condensed the EUV light onto PDMS surfaces at high power density up to 108 W/cm2 using a Au coated ellipsoidal mirror. We found that PDMS sheet was ablated at a rate up to 440 nm/shot. It should be emphasized that through hole with a diameter of 1 μm was fabricated in a PDMS sheet with a thickness of 4 μm. Thus we demonstrated the micromachining of PDMS sheets using laser plasma EUV light.

  17. Micromachining of semiconductor materials by focused ion beams

    A Ga+ focused ion beam (FIB) has been used to micromachine semiconductor materials, including III-V compounds. The FIB was operated at 10 keV; (100) substrates of InP, GaAs and Si and epilayers of Ga0.46In0.54As and Ga0.2In0.8As0.4P0.6 grown by metal organic chemical vapour deposition (MOCVD) on (100) InP substrates were used for the micromachining experiments. Large area, rectangular wells with different depths were micromachined in the above, from which material removal rates have been derived using Talysurf profiling and SEM examination, and sputter yields deduced. The uniformity in removal rates with respect to depth has also been examined. In addition, results for clear end-point signals, using sample absorbed current have been established for Ga0.46In0.54As-InP and Ga0.2In0.8As0.4P0.6-InP interfaces. (author)

  18. Vascular tissue engineering by computer-aided laser micromachining.

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries. PMID:20308108

  19. Bulk micromachining of Si by metal-assisted chemical etching.

    Kim, Sang-Mi; Khang, Dahl-Young

    2014-09-24

    Bulk micromachining of Si is demonstrated by the well-known metal-assisted chemical etching (MaCE). Si microstructures, having lateral dimension from 5 μm up to millimeters, are successfully sculpted deeply into Si substrate, as deep as >100 μm. The key ingredient of this success is found to be the optimizations of catalyst metal type and its morphology. Combining the respective advantages of Ag and Au in the MaCE as a Ag/Au bilayer configuration leads to quite stable etch reaction upon a prolonged etch duration up to >5 h. Further, the permeable nature of the optimized Ag/Au bilayer metal catalyst enables the etching of pattern features having very large lateral dimension. Problems such as the generation of micro/nanostructures and chemical attacks on the top of pattern surface are successfully overcome by process optimizations such as post-partum sonication treatment and etchant formulation control. The method can also be successful to vertical micromachining of Si substrate having other crystal orientations than Si(100), such as Si(110) and Si(111). The simple, easy, and low-cost nature of present approach may be a great help in bulk micromachining of Si for various applications such as microelectromechanical system (MEMS), micro total analysis system (μTAS), and so forth. PMID:24820931

  20. Proton micromachining of substrate scaffolds for cellular and tissue engineering

    Three dimensional patterns (grooves and ridges) were micromachined in PMMA using a 600 keV proton beam from the nuclear microscopy facility at the Research Centre for Nuclear Microscopy, National University of Singapore. Swiss 3T3 fibroblasts (ATCC CCL92, Rockville, MD) have been seeded onto these patterns, and the following observations have been made: (a) Cells were not found in the grooves (depth 9 μm, width 6.6 μm); (b) Cells were highly aligned and elongated on narrow ridges (4.2 μm wide), with the degree of alignment and elongation reduced for wider ridges. The underlying mechanism responsible of this cellular behaviour is assumed to be induced by the mechanical restrictions imposed by the topographic features on cellular migration, cell adhesion and concomitant changes in the cytoskeletal. The use of topographical stimuli to regulate cell function is an area of high potential, with implications in the engineering of tissue for spare-part surgery. Proton micromachining, which has the unique advantage of being the only technique capable of direct-write 3D micromachining at sub-cellular dimensions has unique advantages in this area of research

  1. The Pyramidal Capacitated Vehicle Routing Problem

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...

  2. Dissecting graphene capacitance in electrochemical cell

    Quantum capacitance of graphene plays a significant role for graphene's applications in electrochemical devices and sensors, while the determination of these basic characters of Dirac point, Fermi energy, quantum capacitance, etc is still a subject of considerable debate in both experiments and simulations. Here, we report joint first-principles/continuum calculations (JFPCCs) on a monolayer graphene electrode immersed in an electrolyte coupled with a reference electrode under an applied potential. The JFPCCs gave the Fermi level, charge density on graphene, Dirac point energy, electrostatic potential, electric double layer etc as a function of the applied potential with respect to the reference electrode. These results revealed the strongly coupled relationship between Fermi level change and Dirac point shift in electrochemical cell. The total capacitance of the electrochemical cell was dissected into the quantum capacitance of the graphene electrode and the capacitance of the electric double layer. Furthermore, simple and analytic formulas were proposed for the three capacitances, which predicted, in sufficient accuracy, the behavior of capacitance versus potential. These findings deepen the understanding of quantum capacitance of graphene, which will stimulate novel experimental and theoretical studies and boost the applications of graphene in electrochemical and energy areas

  3. Quantum capacitance of the monolayer graphene

    Cheremisin, M. V.

    2012-01-01

    The quantum capacitance of the monolayer graphene for arbitrary carrier density, magnetic field and temperature is found. The density dependence of the quantum capacitance is analyzed for magnetic field(temperature) is fixed(varied) and vice versa. The theory is compared with the experimental data.

  4. Capacitance densitometer for flow regime identification

    Shipp, Jr., Roy L.

    1978-01-01

    This invention relates to a capacitance densitometer for determining the flow regime of a two-phase flow system. A two-element capacitance densitometer is used in conjunction with a conventional single-beam gamma densitometer to unambiguously identify the prevailing flow regime and the average density of a flowing fluid.

  5. Capacitance-coupled wiper increases potentiometer life

    Dimeff, J.

    1968-01-01

    Capacitively-coupled wiper reduces the friction between the sliding contact and the potentiometer element in conventional potentiometers. A small preamplifier employed close to the wiper reduces errors caused by output cable capacitance. The device is friction free with resultant low wear and has high speed and high resolution.

  6. The pyramidal capacitated vehicle routing problem

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal...

  7. Energy-Efficient Capacitive-Sensor Interfaces

    Z. Tan

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level.

  8. Energy-Efficient Capacitive-Sensor Interfaces

    Tan, Z.

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level

  9. Electropolymerized Star-Shaped Benzotrithiophenes Yield π-Conjugated Hierarchical Networks with High Areal Capacitance

    Ringk, Andreas

    2016-03-30

    High-surface-area π-conjugated polymeric networks have the potential to lend outstanding capacitance to supercapacitors because of the pronounced faradaic processes that take place across the dense intimate interface between active material and electrolytes. In this report, we describe how benzo[1,2-b:3,4-b’:5,6-b’’]trithiophene (BTT) and tris-EDOT-benzo[1,2-b:3,4-b’:5,6-b’’]trithiophene (TEBTT) can serve as 2D (trivalent) building blocks in the development of electropolymerized hierarchical π-conjugated frameworks with particularly high areal capacitance. In comparing electropolymerized networks of BTT, TEBTT, and their copolymers with EDOT, we show that P(TEBTT/EDOT)-based frameworks can achieve higher areal capacitance (e.g., as high as 443.8 mF cm-2 at 1 mA cm-2) than those achieved by their respective homopolymers (PTEBTT and PEDOT) in the same experimental conditions of electrodeposition (PTEBTT: 271.1 mF cm-2 (at 1 mA cm-2) and PEDOT: 12.1 mF cm-2 (at 1 mA cm-2)). For example, P(TEBTT/EDOT)-based frameworks synthesized in a 1:1 monomer-to-comonomer ratio show a ca. 35x capacitance improvement over PEDOT. The high areal capacitance measured for P(TEBTT/EDOT) copolymers can be explained by the open, highly porous hierarchical morphologies formed during the electropolymerization step. With >70% capacitance retention over 1,000 cycles (up to 89% achieved), both PTEBTT- and P(TEBTT/EDOT)-based frameworks are resilient to repeated electrochemical cycling and can be considered promising systems for high life cycle capacitive electrode applications.

  10. Conductivity Effect on the Capacitance Measurement of a Parallel-Plate Capacitive Sensor System

    Peyman Azimi

    2011-01-01

    Full Text Available In this article design and operation of a parallel-plate capacitive sensor based on the dielectric capacitance and conductance change of the gap medium is reported. The designed system was used to determine characteristics of different water liquids as a result of the capacitance variations. The air gap capacitance is measured and then by filling the gap with a liquid the capacitance is monitored for different liquids. Proposed sensor is used for the distilled, tap, boiled, and salt water measurements and the capacitance results are compared. A big difference about 45.5 :F in capacitance values for the salt and distilled water shows a high sensitivity, which can be used to recognize different water liquids. The experimental results are promising for water liquids and verify the successful operation of such a device as a liquid sensor, a useful method for checking the electrical quality of the water that is required for different applications.

  11. An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

    The design, fabrication and test results of an electromagnetic-actuated micromachined variable optical attenuator (VOA) are reported in this paper. Optical attenuation is achieved by moving a shutter into the light path between a pair of single mode fiber collimators. The shutter, consisting of a 500 µm × 1200 µm vertical micromirror, is monolithically integrated with an actuation flap. The micromirror was made by tetra-methyl ammonium hydroxide (TMAH) anisotropic wet etching with a sharp edge and a smooth reflecting surface. By arranging fiber collimators in different configurations, the reported VOA can be used as either normally-on or normally-off modes due to its relatively large shutter surface. The insertion loss of the VOA is 0.2 dB and 0.4 dB for normally-on and normally-off modes, respectively. Both optical and mechanical simulation models of the device were discussed, and the theoretical calculations based on these models offered an efficient way to predict the performance of the shutter-type VOA. The controllable attenuation range is approximately 40 dB with a driving voltage less than 0.5 V, and the driving power is less than 2 mW. A response time of 5 ms is achieved by applying proper driving waveform

  12. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  13. Interparticle attraction in 2D complex plasmas

    Kompaneets, Roman; Ivlev, Alexei V

    2015-01-01

    Complex (dusty) plasmas allow experimental studies of various physical processes occurring in classical liquids and solids by directly observing individual microparticles. A major problem is that the interaction between microparticles is generally not molecular-like. In this Letter, we propose how to achieve a molecular-like interaction potential in laboratory 2D complex plasmas. We argue that this principal aim can be achieved by using relatively small microparticles and properly adjusting discharge parameters. If experimentally confirmed, this will make it possible to employ complex plasmas as a model system with an interaction potential resembling that of conventional liquids.

  14. 2D vector-cyclic deformable templates

    Schultz, Nette; Conradsen, Knut

    1998-01-01

    In this paper the theory of deformable templates is a vector cycle in 2D is described. The deformable template model originated in (Grenander, 1983) and was further investigated in (Grenander et al., 1991). A template vector distribution is induced by parameter distribution from transformation...... matrices applied to the vector cycle. An approximation in the parameter distribution is introduced. The main advantage by using the deformable template model is the ability to simulate a wide range of objects trained by e.g. their biological variations, and thereby improve restoration, segmentation and...

  15. Limit theorems for 2D invasion percolation

    Damron, Michael

    2010-01-01

    We prove limit theorems and variance estimates for quantities related to ponds and outlets for 2D invasion percolation. We first exhibit several properties of a sequence (O(n)) of outlet variables, the n-th of which gives the number of outlets in the box centered at the origin of side length 2^n. The most important of these properties describe the sequence's renewal structure and exponentially fast mixing behavior. We use these to prove a central limit theorem and strong law of large numbers for (O(n)). We then show consequences of these limit theorems for the pond radii and outlet weights.

  16. Instant HTMl5 2D platformer

    Temple, Aidan

    2013-01-01

    Filled with practical, step-by-step instructions and clear explanations for the most important and useful tasks. The step-by-step approach taken by this book will show you how to develop a 2D HTML5 platformer-based game that you will be able to publish to multiple devices.This book is great for anyone who has an interest in HTML5 games development, and who already has a basic to intermediate grasp on both the HTML markup and JavaScript programming languages. Therefore, due to this requirement, the book will not discuss the inner workings of either of these languages but will instead attempt to

  17. Interparticle Attraction in 2D Complex Plasmas

    Kompaneets, Roman; Morfill, Gregor E.; Ivlev, Alexei V.

    2016-03-01

    Complex (dusty) plasmas allow experimental studies of various physical processes occurring in classical liquids and solids by directly observing individual microparticles. A major problem is that the interaction between microparticles is generally not molecularlike. In this Letter, we propose how to achieve a molecularlike interaction potential in laboratory 2D complex plasmas. We argue that this principal aim can be achieved by using relatively small microparticles and properly adjusting discharge parameters. If experimentally confirmed, this will make it possible to employ complex plasmas as a model system with an interaction potential resembling that of conventional liquids.

  18. Periodically sheared 2D Yukawa systems

    We present non-equilibrium molecular dynamics simulation studies on the dynamic (complex) shear viscosity of a 2D Yukawa system. We have identified a non-monotonic frequency dependence of the viscosity at high frequencies and shear rates, an energy absorption maximum (local resonance) at the Einstein frequency of the system at medium shear rates, an enhanced collective wave activity, when the excitation is near the plateau frequency of the longitudinal wave dispersion, and the emergence of significant configurational anisotropy at small frequencies and high shear rates

  19. Phase Engineering of 2D Tin Sulfides.

    Mutlu, Z; Wu, RJ; Wickramaratne, D.; Shahrezaei, S; Liu, C; Temiz, S; Patalano, A; M Ozkan; Lake, RK; Mkhoyan, KA; Ozkan, CS

    2016-01-01

    Tin sulfides can exist in a variety of phases and polytypes due to the different oxidation states of Sn. A subset of these phases and polytypes take the form of layered 2D structures that give rise to a wide host of electronic and optical properties. Hence, achieving control over the phase, polytype, and thickness of tin sulfides is necessary to utilize this wide range of properties exhibited by the compound. This study reports on phase-selective growth of both hexagonal tin (IV) sulfide SnS2...

  20. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout

    In this paper a dual-chip system for inclination measurement is presented. It consists of a MEMS (microelectromechanical system) piezoresistive accelerometer manufactured in silicon bulk micromachining and a CMOS (complementary metal oxide semiconductor) ASIC (application specific integrated circuit) interface designed for resistive-bridge sensors. The sensor is composed of a seismic mass symmetrically suspended by means of four flexure beams that integrate two piezoresistors each to detect the applied static acceleration, which is related to inclination with respect to the gravity vector. The ASIC interface is based on a relaxation oscillator where the frequency and the duty cycle of a rectangular-wave output signal are related to the fractional bridge imbalance and the overall bridge resistance of the sensor, respectively. The latter is a function of temperature; therefore the sensing element itself can be advantageously used to derive information for its own thermal compensation. DC current excitation of the sensor makes the configuration unaffected by wire resistances and parasitic capacitances. Therefore, a modular system results where the sensor can be placed remotely from the electronics without suffering accuracy degradation. The inclination measurement system has been characterized as a function of the applied inclination angle at different temperatures. At room temperature, the experimental sensitivity of the system results in about 148 Hz/g, which corresponds to an angular sensitivity around zero inclination angle of about 2.58 Hz deg−1. This is in agreement with finite element method simulations. The measured output fluctuations at constant temperature determine an equivalent resolution of about 0.1° at midrange. In the temperature range of 25–65 °C the system sensitivity decreases by about 10%, which is less than the variation due to the microsensor alone thanks to thermal compensation provided by the current excitation of the bridge and the

  1. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  2. Interaction phenomena in graphene seen through quantum capacitance.

    Yu, G L; Jalil, R; Belle, Branson; Mayorov, Alexander S; Blake, Peter; Schedin, Frederick; Morozov, Sergey V; Ponomarenko, Leonid A; Chiappini, F; Wiedmann, S; Zeitler, Uli; Katsnelson, Mikhail I; Geim, A K; Novoselov, Kostya S; Elias, Daniel C

    2013-02-26

    Capacitance measurements provide a powerful means of probing the density of states. The technique has proved particularly successful in studying 2D electron systems, revealing a number of interesting many-body effects. Here, we use large-area high-quality graphene capacitors to study behavior of the density of states in this material in zero and high magnetic fields. Clear renormalization of the linear spectrum due to electron-electron interactions is observed in zero field. Quantizing fields lead to splitting of the spin- and valley-degenerate Landau levels into quartets separated by interaction-enhanced energy gaps. These many-body states exhibit negative compressibility but the compressibility returns to positive in ultrahigh B. The reentrant behavior is attributed to a competition between field-enhanced interactions and nascent fractional states. PMID:23401538

  3. The a-c response of a 2-D electron gas on liquid helium in a magnetic field

    The low-frequency a-c response of a 2-D electron gas on liquid helium in a magnetic field is analyzed in terms of ρxx and ρxy, the components of the magnetoresistivity tensor. The electrons are screened by parallel electrodes and the system forms a 2-D transmission line. The 2-D wave equation is solved numerically for a bounded electron sheet in a rectangular geometry which is excited by one of the electrodes. For ωτ xx and ρxy. The effects of these skin depths on measurements of the magnetoresistance and a-c Hall effect are demonstrated. The relationship to the dc Hall effect and to edge magnetoplasmons is shown. The effects of incomplete screening, density inhomogeneities and edge capacitance are also discussed

  4. Photocurrent spectroscopy of 2D materials

    Cobden, David

    Confocal photocurrent measurements provide a powerful means of studying many aspects of the optoelectronic and electrical properties of a 2D device or material. At a diffraction-limited point they can provide a detailed absorption spectrum, and they can probe local symmetry, ultrafast relaxation rates and processes, electron-electron interaction strengths, and transport coefficients. We illustrate this with several examples, once being the photo-Nernst effect. In gapless 2D materials, such as graphene, in a perpendicular magnetic field a photocurrent antisymmetric in the field is generated near to the free edges, with opposite sign at opposite edges. Its origin is the transverse thermoelectric current associated with the laser-induced electron temperature gradient. This effect provides an unambiguous demonstration of the Shockley-Ramo nature of long-range photocurrent generation in gapless materials. It also provides a means of investigating quasiparticle properties. For example, in the case of graphene on hBN, it can be used to probe the Lifshitz transition that occurs due to the minibands formed by the Moire superlattice. We also observe and discuss photocurrent generated in other semimetallic (WTe2) and semiconducting (WSe2) monolayers. Work supported by DoE BES and NSF EFRI grants.

  5. Multienzyme Inkjet Printed 2D Arrays.

    Gdor, Efrat; Shemesh, Shay; Magdassi, Shlomo; Mandler, Daniel

    2015-08-19

    The use of printing to produce 2D arrays is well established, and should be relatively facile to adapt for the purpose of printing biomaterials; however, very few studies have been published using enzyme solutions as inks. Among the printing technologies, inkjet printing is highly suitable for printing biomaterials and specifically enzymes, as it offers many advantages. Formulation of the inkjet inks is relatively simple and can be adjusted to a variety of biomaterials, while providing nonharmful environment to the enzymes. Here we demonstrate the applicability of inkjet printing for patterning multiple enzymes in a predefined array in a very straightforward, noncontact method. Specifically, various arrays of the enzymes glucose oxidase (GOx), invertase (INV) and horseradish peroxidase (HP) were printed on aminated glass surfaces, followed by immobilization using glutardialdehyde after printing. Scanning electrochemical microscopy (SECM) was used for imaging the printed patterns and to ascertain the enzyme activity. The successful formation of 2D arrays consisting of enzymes was explored as a means of developing the first surface confined enzyme based logic gates. Principally, XOR and AND gates, each consisting of two enzymes as the Boolean operators, were assembled, and their operation was studied by SECM. PMID:26214072

  6. Comments on Thermalization in 2D CFT

    de Boer, Jan

    2016-01-01

    We revisit certain aspects of thermalization in 2D CFT. In particular, we consider similarities and differences between the time dependence of correlation functions in various states in rational and non-rational CFTs. We also consider the distinction between global and local thermalization and explain how states obtained by acting with a diffeomorphism on the ground state can appear locally thermal, and we review why the time-dependent expectation value of the energy-momentum tensor is generally a poor diagnostic of global thermalization. Since all 2D CFTs have an infinite set of commuting conserved charges, generic initial states might be expected to give rise to a generalized Gibbs ensemble rather than a pure thermal ensemble at late times. We construct the holographic dual of the generalized Gibbs ensemble and show that, to leading order, it is still described by a BTZ black hole. The extra conserved charges, while rendering $c < 1$ theories essentially integrable, therefore seem to have little effect o...

  7. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball. (paper)

  8. 2-D or not 2-D, that is the question: A Northern California test

    Mayeda, K; Malagnini, L; Phillips, W S; Walter, W R; Dreger, D

    2005-06-06

    Reliable estimates of the seismic source spectrum are necessary for accurate magnitude, yield, and energy estimation. In particular, how seismic radiated energy scales with increasing earthquake size has been the focus of recent debate within the community and has direct implications on earthquake source physics studies as well as hazard mitigation. The 1-D coda methodology of Mayeda et al. has provided the lowest variance estimate of the source spectrum when compared against traditional approaches that use direct S-waves, thus making it ideal for networks that have sparse station distribution. The 1-D coda methodology has been mostly confined to regions of approximately uniform complexity. For larger, more geophysically complicated regions, 2-D path corrections may be required. The complicated tectonics of the northern California region coupled with high quality broadband seismic data provides for an ideal ''apples-to-apples'' test of 1-D and 2-D path assumptions on direct waves and their coda. Using the same station and event distribution, we compared 1-D and 2-D path corrections and observed the following results: (1) 1-D coda results reduced the amplitude variance relative to direct S-waves by roughly a factor of 8 (800%); (2) Applying a 2-D correction to the coda resulted in up to 40% variance reduction from the 1-D coda results; (3) 2-D direct S-wave results, though better than 1-D direct waves, were significantly worse than the 1-D coda. We found that coda-based moment-rate source spectra derived from the 2-D approach were essentially identical to those from the 1-D approach for frequencies less than {approx}0.7-Hz, however for the high frequencies (0.7{le} f {le} 8.0-Hz), the 2-D approach resulted in inter-station scatter that was generally 10-30% smaller. For complex regions where data are plentiful, a 2-D approach can significantly improve upon the simple 1-D assumption. In regions where only 1-D coda correction is available it is

  9. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

  10. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy.

    Tong, Tao; Li, Jinggao; Longtin, Jon P

    2004-03-20

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features. PMID:15065729

  11. Locality constraints and 2D quasicrystals

    The plausible assumption that long-range interactions between atoms are negligible in a quasicrystal leaks to the study of tilings that obey constraints on the local configurations of tiles. The theory of such constraints (called matching rules) for 2D quasicrystal tilings is reviewed here. Different types of matching rules are defined and examples of tilings obeying them are given where known. The role of tile decoration is discussed and is shown to be significant in at least two cases (octagonal and dodecagonal duals of periodic 4-grids and 6-grids). A new result is introduced: a constructive procedure is described for generating weak matching rules for tilings with N-fold symmetry, for any N that is either a prime number or twice a prime number. The physics associated with weak matching rules, results on local growth rules, and the case of icosahedral symmetry are all briefly discussed. (author). 29 refs, 4 figs

  12. Numerical Evaluation of 2D Ground States

    Kolkovska, Natalia

    2016-02-01

    A ground state is defined as the positive radial solution of the multidimensional nonlinear problem \\varepsilon propto k_ bot 1 - ξ with the function f being either f(u) =a|u|p-1u or f(u) =a|u|pu+b|u|2pu. The numerical evaluation of ground states is based on the shooting method applied to an equivalent dynamical system. A combination of fourth order Runge-Kutta method and Hermite extrapolation formula is applied to solving the resulting initial value problem. The efficiency of this procedure is demonstrated in the 1D case, where the maximal difference between the exact and numerical solution is ≈ 10-11 for a discretization step 0:00025. As a major application, we evaluate numerically the critical energy constant. This constant is defined as a functional of the ground state and is used in the study of the 2D Boussinesq equations.

  13. 2-D Model Test of Dolosse Breakwater

    Burcharth, Hans F.; Liu, Zhou

    1994-01-01

    The rational design diagram for Dolos armour should incorporate both the hydraulic stability and the structural integrity. The previous tests performed by Aalborg University (AU) made available such design diagram for the trunk of Dolos breakwater without superstructures (Burcharth et al. 1992). To...... extend the design diagram to cover Dolos breakwaters with superstructure, 2-D model tests of Dolos breakwater with wave wall is included in the project Rubble Mound Breakwater Failure Modes sponsored by the Directorate General XII of the Commission of the European Communities under Contract MAS-CT92......-0042. Furthermore, Task IA will give the design diagram for Tetrapod breakwaters without a superstructure. The more complete research results on Dolosse can certainly give some insight into the behaviour of Tetrapods armour layer of the breakwaters with superstructure. The main part of the experiment was on the...

  14. Graphene suspensions for 2D printing

    Soots, R. A.; Yakimchuk, E. A.; Nebogatikova, N. A.; Kotin, I. A.; Antonova, I. V.

    2016-04-01

    It is shown that, by processing a graphite suspension in ethanol or water by ultrasound and centrifuging, it is possible to obtain particles with thicknesses within 1-6 nm and, in the most interesting cases, 1-1.5 nm. Analogous treatment of a graphite suspension in organic solvent yields eventually thicker particles (up to 6-10 nm thick) even upon long-term treatment. Using the proposed ink based on graphene and aqueous ethanol with ethylcellulose and terpineol additives for 2D printing, thin (~5 nm thick) films with sheet resistance upon annealing ~30 MΩ/□ were obtained. With the ink based on aqueous graphene suspension, the sheet resistance was ~5-12 kΩ/□ for 6- to 15-nm-thick layers with a carrier mobility of ~30-50 cm2/(V s).

  15. Area preserving diffeomorphisms and 2-d gravity

    La, H S

    1995-01-01

    Area preserving diffeomorphisms of a 2-d compact Riemannian manifold with or without boundary are studied. We find two classes of decompositions of a Riemannian metric, namely, h- and g-decomposition, that help to formulate a gravitational theory which is area preserving diffeomorphism (SDiffM-) invariant but not necessarily diffeomorphism invariant. The general covariance of equations of motion of such a theory can be achieved by incorporating proper Weyl rescaling. The h-decomposition makes the conformal factor of a metric SDiffM-invariant and the rest of the metric invariant under conformal diffeomorphisms, whilst the g-decomposition makes the conformal factor a SDiffM scalar and the rest a SDiffM tensor. Using these, we reformulate Liouville gravity in SDiffM invariant way. In this context we also further clarify the dual formulation of Liouville gravity introduced by the author before, in which the affine spin connection is dual to the Liouville field.

  16. Metrology for graphene and 2D materials

    Pollard, Andrew J.

    2016-09-01

    The application of graphene, a one atom-thick honeycomb lattice of carbon atoms with superlative properties, such as electrical conductivity, thermal conductivity and strength, has already shown that it can be used to benefit metrology itself as a new quantum standard for resistance. However, there are many application areas where graphene and other 2D materials, such as molybdenum disulphide (MoS2) and hexagonal boron nitride (h-BN), may be disruptive, areas such as flexible electronics, nanocomposites, sensing and energy storage. Applying metrology to the area of graphene is now critical to enable the new, emerging global graphene commercial world and bridge the gap between academia and industry. Measurement capabilities and expertise in a wide range of scientific areas are required to address this challenge. The combined and complementary approach of varied characterisation methods for structural, chemical, electrical and other properties, will allow the real-world issues of commercialising graphene and other 2D materials to be addressed. Here, examples of metrology challenges that have been overcome through a multi-technique or new approach are discussed. Firstly, the structural characterisation of defects in both graphene and MoS2 via Raman spectroscopy is described, and how nanoscale mapping of vacancy defects in graphene is also possible using tip-enhanced Raman spectroscopy (TERS). Furthermore, the chemical characterisation and removal of polymer residue on chemical vapour deposition (CVD) grown graphene via secondary ion mass spectrometry (SIMS) is detailed, as well as the chemical characterisation of iron films used to grow large domain single-layer h-BN through CVD growth, revealing how contamination of the substrate itself plays a role in the resulting h-BN layer. In addition, the role of international standardisation in this area is described, outlining the current work ongoing in both the International Organization of Standardization (ISO) and the

  17. Femtosecond micromachining in transparent bulk materials using an anamorphic lens.

    Desautels, G Logan; Brewer, Chris D; Walker, Mark A; Juhl, Shane B; Finet, Marc A; Powers, Peter E

    2007-10-01

    A unique anamorphic lens design was applied to a circular 780nm femtosecond laser pulse to transform it into an elliptically shaped beam at focus. This lens was developed to give an alternative method of micromachining bulk transparent materials. The challenge for femtosecond laser processing is to control the nonlinear affect of self-focusing, which can occur when using a fast f-number lens. Once the focused spot is dominated by self-focusing the predicted focused beam becomes a filament inside the bulk, which is an undesirable effect. The anamorphic lens resolves this self-focusing by increasing the numerical aperture (NA) and employing an elliptical beam shape. The anamorphic lens was designed to furnish a 2.5mum by 190mum line at focus. Provided the pulse energy is high enough, transparent bulk material will be damaged with a single femtosecond laser pulse. Damage in this text refers to visual change in the index of refraction as observed under an optical microscope. Using this elliptical shape (or line), grating structures were micro-machined on the surface of SiC bulk transparent substrate. SiC was chosen because it is known for its micromachining difficulty and its crystalline structure. From the lack of self-focusing and using energy that is just above the damage threshold the focused line beam generated from the anamorphic lens grating structures produced a line shape nearly identical to the geometrical approximation. In this paper we discuss a new method of writing gratings (or other types of structures) in bulk transparent materials using a single femtosecond laser pulse. We will investigate the grating structures visually (inspected under an optical microscope) and also by use of an atomic force microscopy (AFM). In addition, we test the grating diffraction efficiency (DE) as a function of grating spacing, d. PMID:19550582

  18. A 2D optomechanical focused laser spot scanner: analysis and experimental results for microstereolithography

    Gandhi, P. S.; Deshmukh, S.

    2010-01-01

    This paper proposes and analyzes a 2D optomechanical-focused laser spot scanning system (patent pending) which allows uniform intensity focused spot scanning with high speed and high resolution over a large range of scan. Such scanning is useful where variation of focused spot characteristics affects the performance of applications such as micro-/nano-stereolithography, laser micro-machining, scanning optical tweezers, optical scanning microscopy, and so on. Proposed scanning is achieved by using linear movement of mirrors and lens maintaining the alignment of motion and optical axis of laser. Higher speed and high resolution at the same time are achieved by use of two serial double parallelogram flexural mechanisms with mechatronics developed around them. Optical analysis is carried out to demonstrate effectiveness of the proposed system numerically and is further supported by the experimental results. Additional analysis is carried out to demonstrate robustness of the scanner in the case of small misalignment errors incurred in actual practice. Although the proposed scanner is useful in general in several applications mentioned above, discussion in this paper is focused on microstereolithography.

  19. Capacitive Cells for Dielectric Constant Measurement

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  20. Complementary surface charge for enhanced capacitive deionization

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI cel

  1. A Broadband Micro-machined Far-Infrared Absorber

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  2. Sub-band-gap laser micromachining of lithium niobate

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  3. A broadband micro-machined far-infrared absorber

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  4. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  5. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  6. Micromachined silicon acoustic delay lines for ultrasound applications

    In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay-line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel and serial) have been successfully demonstrated to create controlled time delays in multiple channels of ultrasound signals. The time-delayed ultrasound signals are received with a single-element ultrasound transducer in a time-serial manner. This unique capability could be used to merge multiple signal channels, thereby enabling new ultrasound receiver designs with potentially less complexity and lower cost. (paper)

  7. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale. PMID:24466665

  8. Synchrotron radiation direct photoetching of polymers and crystals for micromachining

    Synchrotron radiation etching of polymers and optical crystals which are transparent throughout the spectral range from visible to ultraviolet has been carried out without using any chemicals, successfully creating high-aspect-ratio microstructures for micromachining. A detailed study of the etching rates by varying the synchrotron beam current, sample temperature, beam size and aspect ratio showed that this synchrotron radiation process is essentially different from laser ablation, while an in situ mass spectrometric analysis of gaseous etching products showed that the dissociation mechanism involved with the synchrotron radiation processing, even with heating, is completely different from the thermal dissociation of the laser ablation

  9. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  10. DNA transport by a micromachined Brownian ratchet device

    Bader, J S; Henck, S A; Deem, M W; McDermott, G A; Bustillo, J M; Simpson, J W; Mulhern, G T; Rothberg, J M; Bader, Joel S; Hammond, Richard W.; Henck, Steven A.; Deem, Michael W.; Dermott, Gregory A. Mc; Bustillo, James M.; Simpson, John W.; Mulhern, Gregory T.; Rothberg, Jonathan M.

    1999-01-01

    We have micromachined a silicon-chip device that transports DNA with aBrownian ratchet that rectifies the Brownian motion of microscopic particles.Transport properties for a DNA 50mer agree with theoretical predictions, andthe DNA diffusion constant agrees with previous experiments. This type ofmicromachine could provide a generic pump or separation component for DNA orother charged species as part of a microscale lab-on-a-chip. A device withreduced feature size could produce a size-based separation of DNA molecules,with applications including the detection of single nucleotide polymorphisms.

  11. Local 2D-2D tunneling in high mobility electron systems

    Pelliccione, Matthew; Sciambi, Adam; Bartel, John; Goldhaber-Gordon, David; Pfeiffer, Loren; West, Ken; Lilly, Michael; Bank, Seth; Gossard, Arthur

    2012-02-01

    Many scanning probe techniques have been utilized in recent years to measure local properties of high mobility two-dimensional (2D) electron systems in GaAs. However, most techniques lack the ability to tunnel into the buried 2D system and measure local spectroscopic information. We report scanning gate measurements on a bilayer GaAs/AlGaAs heterostructure that allows for a local modulation of tunneling between two 2D electron layers. We call this technique Virtual Scanning Tunneling Microscopy (VSTM) [1,2] as the influence of the scanning gate is analogous to an STM tip, except at a GaAs/AlGaAs interface instead of a surface. We will discuss the spectroscopic capabilities of the technique, and show preliminary results of measurements on a high mobility 2D electron system.[1] A. Sciambi, M. Pelliccione et al., Appl. Phys. Lett. 97, 132103 (2010).[2] A. Sciambi, M. Pelliccione et al., Phys. Rev. B 84, 085301 (2011).

  12. Face recognition method based on 2D-PCA and 2D-LDA%基于2D-PCA和2D-LDA的人脸识别方法

    温福喜; 刘宏伟

    2007-01-01

    提出了基于2D-PCA、2D-LDA两种特征采用融合分类器的人脸识别方法.首先提取人脸图像的2D-PCA和2D-LDA特征,对不同特征在决策层对分类器进行融合.在ORL人脸库上的试验结果表明,分类器决策层融合方法在识别性能上优于2D-PCA和2D-LDA,更具有鲁棒性.

  13. A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure

    A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure is presented. The gyroscope is fabricated by silicon–glass bonding and deep reactive ion etching (DRIE) technology. The gyroscope's driving and sensing proof masses consist of many movable bars. As the motion of the movable proof masses is parallel to the plane of fixed driving and sensing electrodes on a glass substrate, there is mainly slide film damping in the driving and sensing directions, which enables it to achieve high-quality factors and vacuum-free packaging. The gyroscope can operate at atmospheric pressure by electrostatic driving and capacitive sensing. The performances of the gyroscope are tested and the results show that the resonant frequencies and the quality factors for driving and sensing modes are 2.873 kHz and 2.989 kHz, 804 and 789 at atmospheric pressure, respectively. The scale factor and nonlinearity of the gyroscope are 17.45 mV/°/s and 0.43%, respectively

  14. Experimental determination of dielectric barrier discharge capacitance.

    Pipa, A V; Hoder, T; Koskulics, J; Schmidt, M; Brandenburg, R

    2012-07-01

    The determination of electrical parameters (such as instantaneous power, transferred charge, and gas gap voltage) in dielectric barrier discharge (DBD) reactors relies on estimates of key capacitance values. In the classic large-scale sinusoidal-voltage driven DBD, also known as silent or ozonizer discharge, capacitance values can be determined from charge-voltage (Q-V) plot, also called Lissajous figure. For miniature laboratory reactors driven by fast pulsed voltage waveforms with sub-microsecond rise time, the capacitance of the dielectric barriers cannot be evaluated from a single Q-V plot because of the limited applicability of the classical theory. Theoretical determination can be problematic due to electrode edge effects, especially in the case of asymmetrical electrodes. The lack of reliable capacitance estimates leads to a "capacitance bottleneck" that obstructs the determination of other DBD electrical parameters in fast-pulsed reactors. It is suggested to obtain capacitance of dielectric barriers from a plot of the maximal charge versus maximal voltage amplitude (Q(max) - V(max) plot) in a manner analogous to the classical approach. The method is examined using measurements of current and voltage waveforms of a coaxial DBD reactor in argon at 100 mbar driven by square voltage pulses with a rise time of 20 ns and with different voltage amplitudes up to 10 kV. Additionally, the applicability of the method has been shown for the data reported in literature measured at 1 bar of nitrogen-oxygen gas mixtures and xenon. PMID:22852728

  15. 2D DIGITAL SIMPLIFIED FLOW VALVE

    Ruan Jian; Li Sheng; Pei Xiang; Burton R; Ukrainetz P; Bitner D

    2004-01-01

    The 2D digital simplified flow valve is composed of a pilot-operated valve designed with both rotary and linear motions of a single spool,and a stepper motor under continual control.How the structural parameters affect the static and dynamic characteristics of the valve is first clarified and a criterion for stability is presented.Experiments are designed to test the performance of the valve.It is necessary to establish a balance between the static and dynamic characteristics in deciding the structural parameters.Nevertheless,it is possible to maintain the dynamic response at a fairly high level,while keeping the leakage of the pilot stage at an acceptable level.One of the features of the digital valve is stage control.In stage control the nonlinearities,such as electromagnetic saturation and hysteresis,are greatly reduced.To a large extent the dynamic response of the valve is decided by the executing cycle of the control algorithm.

  16. Competing coexisting phases in 2D water

    Zanotti, Jean-Marc; Judeinstein, Patrick; Dalla-Bernardina, Simona; Creff, Gaëlle; Brubach, Jean-Blaise; Roy, Pascale; Bonetti, Marco; Ollivier, Jacques; Sakellariou, Dimitrios; Bellissent-Funel, Marie-Claire

    2016-05-01

    The properties of bulk water come from a delicate balance of interactions on length scales encompassing several orders of magnitudes: i) the Hydrogen Bond (HBond) at the molecular scale and ii) the extension of this HBond network up to the macroscopic level. Here, we address the physics of water when the three dimensional extension of the HBond network is frustrated, so that the water molecules are forced to organize in only two dimensions. We account for the large scale fluctuating HBond network by an analytical mean-field percolation model. This approach provides a coherent interpretation of the different events experimentally (calorimetry, neutron, NMR, near and far infra-red spectroscopies) detected in interfacial water at 160, 220 and 250 K. Starting from an amorphous state of water at low temperature, these transitions are respectively interpreted as the onset of creation of transient low density patches of 4-HBonded molecules at 160 K, the percolation of these domains at 220 K and finally the total invasion of the surface by them at 250 K. The source of this surprising behaviour in 2D is the frustration of the natural bulk tetrahedral local geometry and the underlying very significant increase in entropy of the interfacial water molecules.

  17. 2D manifold-independent spinfoam theory

    A number of background-independent quantization procedures have recently been employed in 4D nonperturbative quantum gravity. We investigate and illustrate these techniques and their relation in the context of a simple 2D topological theory. We discuss canonical quantization, loop or spin network states, path integral quantization over a discretization of the manifold, spin foam formulation and the fully background-independent definition of the theory using an auxiliary field theory on a group manifold. While several of these techniques have already been applied to this theory by Witten, the last one is novel: it allows us to give a precise meaning to the sum over topologies, and to compute background-independent and, in fact, 'manifold-independent' transition amplitudes. These transition amplitudes play the role of Wightman functions of the theory. They are physical observable quantities, and the canonical structure of the theory can be reconstructed from them via a C* algebraic GNS construction. We expect an analogous structure to be relevant in 4D quantum gravity

  18. Ion Transport in 2-D Graphene Nanochannels

    Xie, Quan; Foo, Elbert; Duan, Chuanhua

    2015-11-01

    Graphene membranes have recently attracted wide attention due to its great potential in water desalination and selective molecular sieving. Further developments of these membranes, including enhancing their mass transport rate and/or molecular selectivity, rely on the understanding of fundamental transport mechanisms through graphene membranes, which has not been studied experimentally before due to fabrication and measurement difficulties. Herein we report the fabrication of the basic constituent of graphene membranes, i.e. 2-D single graphene nanochannels (GNCs) and the study of ion transport in these channels. A modified bonding technique was developed to form GNCs with well-defined geometry and uniform channel height. Ion transport in such GNCs was studied using DC conductance measurement. Our preliminary results showed that the ion transport in GNCs is still governed by surface charge at low concentrations (10-6M to 10-4M). However, GNCs exhibits much higher ionic conductances than silica nanochannels with the same geometries in the surface-charge-governed regime. This conductance enhancement can be attributed to the pre-accumulation of charges on graphene surfaces. The work is supported by the Faculty Startup Fund (Boston University, USA).

  19. Phase Engineering of 2D Tin Sulfides.

    Mutlu, Zafer; Wu, Ryan J; Wickramaratne, Darshana; Shahrezaei, Sina; Liu, Chueh; Temiz, Selcuk; Patalano, Andrew; Ozkan, Mihrimah; Lake, Roger K; Mkhoyan, K A; Ozkan, Cengiz S

    2016-06-01

    Tin sulfides can exist in a variety of phases and polytypes due to the different oxidation states of Sn. A subset of these phases and polytypes take the form of layered 2D structures that give rise to a wide host of electronic and optical properties. Hence, achieving control over the phase, polytype, and thickness of tin sulfides is necessary to utilize this wide range of properties exhibited by the compound. This study reports on phase-selective growth of both hexagonal tin (IV) sulfide SnS2 and orthorhombic tin (II) sulfide SnS crystals with diameters of over tens of microns on SiO2 substrates through atmospheric pressure vapor-phase method in a conventional horizontal quartz tube furnace with SnO2 and S powders as the source materials. Detailed characterization of each phase of tin sulfide crystals is performed using various microscopy and spectroscopy methods, and the results are corroborated by ab initio density functional theory calculations. PMID:27099950

  20. Competing coexisting phases in 2D water.

    Zanotti, Jean-Marc; Judeinstein, Patrick; Dalla-Bernardina, Simona; Creff, Gaëlle; Brubach, Jean-Blaise; Roy, Pascale; Bonetti, Marco; Ollivier, Jacques; Sakellariou, Dimitrios; Bellissent-Funel, Marie-Claire

    2016-01-01

    The properties of bulk water come from a delicate balance of interactions on length scales encompassing several orders of magnitudes: i) the Hydrogen Bond (HBond) at the molecular scale and ii) the extension of this HBond network up to the macroscopic level. Here, we address the physics of water when the three dimensional extension of the HBond network is frustrated, so that the water molecules are forced to organize in only two dimensions. We account for the large scale fluctuating HBond network by an analytical mean-field percolation model. This approach provides a coherent interpretation of the different events experimentally (calorimetry, neutron, NMR, near and far infra-red spectroscopies) detected in interfacial water at 160, 220 and 250 K. Starting from an amorphous state of water at low temperature, these transitions are respectively interpreted as the onset of creation of transient low density patches of 4-HBonded molecules at 160 K, the percolation of these domains at 220 K and finally the total invasion of the surface by them at 250 K. The source of this surprising behaviour in 2D is the frustration of the natural bulk tetrahedral local geometry and the underlying very significant increase in entropy of the interfacial water molecules. PMID:27185018

  1. Resolution Independent 2D Cartoon Video Conversion

    MSF. Fayaza

    2016-03-01

    Full Text Available This paper describes a novel system for vectorizing 2D raster cartoon. The output videos are the resolution independent, smaller in file size. As a first step, input video is segment to scene thereafter all processes are done for each scene separately. Every scene contains foreground and background objects so in each and every scene foreground background classification is performed. Background details can occlude by foreground objects but when foreground objects move its previous position such occluded details exposed in one of the next frame so using that frame can fill the occluded area and can generate static background. Classified foreground objects are identified and the motion of the foreground objects tracked for this simple user assistance is required from those motion details of foreground object’s animation generated. Static background and foreground objects segmented using K-means clustering and each and every cluster’s vectorized using potrace. Using vectored background and foreground object animation path vector video regenerated.

  2. Capacitance of Graphene Bilayer as a Which-Layer Probe

    Young, Andrea F.; Levitov, Leonid S.

    2011-01-01

    The unique capabilities of capacitance measurements in bilayer graphene enable probing of layer-specific properties that are normally out of reach in transport measurements. Furthermore, capacitance measurements in the top-gate and penetration field geometries are sensitive to different physical quantities: the penetration field capacitance probes the two layers equally, whereas the top gate capacitance preferentially samples the near layer, resulting in the "near-layer capacitance enhancemen...

  3. Nanoscale capacitance: A classical charge-dipole approximation

    Jun-Qiang Lu; Jonathan Gonzalez; Carlos Sierra; Yang Li

    2013-01-01

    Modeling nanoscale capacitance presents particular challenge because of dynamic contribution from electrodes, which can usually be neglected in modeling macroscopic capacitance and nanoscale conductance. We present a model to calculate capacitances of nano-gap configurations and define effective capacitances of nanoscale structures. The model is implemented by using a classical atomic charge-dipole approximation and applied to calculate capacitance of a carbon nanotube nano-gap and effective ...

  4. Identification of novel CYP2D7-2D6 hybrids: non-functional and functional variants

    Andrea Gaedigk

    2010-10-01

    Full Text Available Polymorphic expression of CYP2D6 contributes to the wide range of activity observed for this clinically important drug metabolizing enzyme. In this report we describe novel CYP2D7/2D6 hybrid genes encoding non-functional and functional CYP2D6 protein and a CYP2D7 variant that mimics a CYP2D7/2D6 hybrid gene. Five kb long PCR products encompassing the novel genes were entirely sequenced. A quantitative assay probing in different gene regions was employed to determine CYP2D6 and 2D7 copy number variations and the relative position of the hybrid genes within the locus was assessed by long-range PCR. In addition to the previously known CYP2D6*13 and *66 hybrids, we describe three novel non-functional CYP2D7-2D6 hybrids with gene switching in exon 2 (CYP2D6*79, intron 2 (CYP2D6*80 and intron 5 (CYP2D6*67. A CYP2D7-specific T-ins in exon 1 causes a detrimental frame shift. One subject revealed a CYP2D7 conversion in the 5’-flanking region of a CYP2D6*35 allele, was otherwise unaffected (designated CYP2D6*35B. Finally, three DNAs revealed a CYP2D7 gene with a CYP2D6-like region downstream of exon 9 (designated CYP2D7[REP6]. Quantitative copy number determination, sequence analyses and long-range PCR mapping were in agreement and excluded the presence of additional gene units. Undetected hybrid genes may cause over-estimation of CYP2D6 activity (CYP2D6*1/*1 vs *1/hybrid, etc, but may also cause results that may interfere with the genotype determination. Detection of hybrid events, ‘single’ and tandem, will contribute to more accurate phenotype prediction from genotype data.

  5. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  6. Eye Vision Testing System and Eyewear Using Micromachines

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  7. Direct writing of microtunnels using proton beam micromachining

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

  8. Direct writing of microtunnels using proton beam micromachining

    Marot, Laurent [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)]. E-mail: laurent.marot@he-arc.ch; Munnik, Frans [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland); Mikhailov, Serguei [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)

    2006-08-15

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized.

  9. Water-soluble sacrificial layers for surface micromachining.

    Linder, Vincent; Gates, Byron D; Ryan, Declan; Parviz, Babak A; Whitesides, George M

    2005-07-01

    This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile materials, such as organic polymers, metal oxides and metals-materials that might be damaged during typical surface micromachining processes. The carboxylic acid groups of one polymer-poly(acrylic acid) (PAA)-can be transformed by reversible ion-exchange from water-soluble (Na+ counterion) to water-insoluble (Ca2+ counterion) forms. The use of PAA and dextran polymers as sacrificial materials is a useful technique for the fabrication of microstructures: Examples include metallic structures formed by the electrodeposition of nickel, and freestanding, polymeric structures formed by photolithography. PMID:17193516

  10. Laser micromachining of biofactory-on-a-chip devices

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  11. Microscopic View of Soil on a Micromachined Silicone Substrate

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  12. Comparing flat top and Gaussian focal beam shapes when micromachining steel

    Lizotte, Todd E.; Ohar, Orest

    2011-10-01

    Laser micromachining, drilling and marking is extensively used within the aerospace, automotive and firearms industries. The unique properties of lasers make them ideal tools for micromachining a wide diversity of materials, including steel alloys [1]. We describe the results of micromachining of low carbon steel and stainless steel alloys, using a high powered diode pumped solid state (DPSS) laser operating at a wavelength of 355nm. The laser was configured with beam conditioning optics to produce either a flat top beam or a Gaussian output which was then sent through a galvanometer scanner and telecentric lens beam delivery system. This paper outlines the interrelationship of process variables when micromachining fine features in steel and stainless steel alloys. Process variables measured included the optimum laser focus plane, energy density, galvanometer scan rate, and pulse overlap and focal spot diameter. Optimum process performance was evaluated based on a dimensional comparison of the micromachined features from each test coupon, including uniformity and surface roughness of the micromachined surface and the minimization of surface irregularities (stalagmite type slag / debris / corn row patterns) and taper angle of the micromachined feature side walls.

  13. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  14. Capacitance-voltage characteristics and device simulation of bias temperature stressed a-Si:H TFTs

    Tang, Z.; Wie, C. R.

    2010-03-01

    In this paper, the degradation of hydrogenated amorphous silicon thin film transistors under a self-heating stress (SHS) condition is investigated by analyzing the capacitance-voltage characteristics of gate-to-drain capacitance ( Cgd) and gate-to-source capacitance ( Cgs). The very different characteristics of Cgd- V g and Cgs- V g show different stress-induced density of states (DOS) property at the drain side and source side of channel. In a long channel device, the Cgd and Cgs characteristics could be explained by the deep states profile which corresponds to the non-uniform threshold voltage profile induced by the bias temperature stress only. The capacitance-voltage and current-voltage curves, simulated using the ATLAS 2D simulator based on the non-uniform defect states profile, agreed well with the measured data. In a short channel device, the simulation fitting of the Cgd and Cgs data required a non-uniform defect states profile, which is substantially modified from the long channel profile. This was interpreted in terms of a significant contribution of the non-uniform temperature distribution, caused by stress-induced self-heating effect in the short channel device, to the defect states density profile in the channel. A decreased density of conduction band tail states at the source end, corresponding to the increased deep Gaussian states, enabled a good simulation fit in the short channel device.

  15. Finite state models of constrained 2d data

    Justesen, Jørn

    2004-01-01

    This paper considers a class of discrete finite alphabet 2D fields that can be characterized using tools front finite state machines and Markov chains. These fields have several properties that greatly simplify the analysis of 2D coding methods.......This paper considers a class of discrete finite alphabet 2D fields that can be characterized using tools front finite state machines and Markov chains. These fields have several properties that greatly simplify the analysis of 2D coding methods....

  16. Ultrasonic 2D matrix PVDF transducer

    Ptchelintsev, A.; Maev, R. Gr.

    2000-05-01

    During the past decade a substantial amount of work has been done in the area of ultrasonic imaging technology using 2D arrays. The main problems arising for the two-dimensional matrix transducers at megahertz frequencies are small size and huge count of the elements, high electrical impedance, low sensitivity, bad SNR and slower data acquisition rate. The major technological difficulty remains the high density of the interconnect. To solve these problems numerous approaches have been suggested. In the present work, a 24×24 elements (24 transmit+24 receive) matrix and a switching board were developed. The transducer consists of two 52 μm PVDF layers each representing a linear array of 24 elements placed one on the top of the other. Electrodes in these two layers are perpendicular and form the grid of 0.5×0.5 mm pitch. The layers are bonded together with the ground electrode being monolithic and located between the layers. The matrix is backed from the rear surface with an epoxy composition. During the emission, a linear element from the emitting layer generates a longitudinal wave pulse propagating inside the test object. Reflected pulses are picked-up by the receiving layer. During one transmit-receive cycle one transmit element and one receive element are selected by corresponding multiplexers. These crossed elements emulate a small element formed by their intersection. The present design presents the following advantages: minimizes number of active channels and density of the interconnect; reduces the electrical impedance of the element improving electrical matching; enables the transmit-receive mode; due to the efficient backing provides bandwidth and good time resolution; and, significantly reduces the electronics complexity. The matrix can not be used for the beam steering and focusing. Owing to this impossibility of focusing, the penetration depth is limited as well by the diffraction phenomena.

  17. 2D quasi-ordered nitrogen-enriched porous carbon nanohybrids for high energy density supercapacitors.

    Kan, Kan; Wang, Lei; Yu, Peng; Jiang, Baojiang; Shi, Keying; Fu, Honggang

    2016-05-21

    Two-dimensional (2D) quasi-ordered nitrogen-enriched porous carbon (QNPC) nanohybrids, with the characteristics of an ultrathin graphite nanosheet framework and thick quasi-ordered nitrogen-doped carbon cladding with a porous texture, have been synthesized via an in situ polymerization assembly method. In the synthesis, the expandable graphite (EG) is enlarged by an intermittent microwave method, and then aniline monomers are intercalated into the interlayers of the expanded EG with the assistance of a vacuum. Subsequently, the intercalated aniline monomers could assemble on the interlayer surface of the expanded EG, accompanied by the in situ polymerization from aniline monomers to polyaniline. Meanwhile, the expanded EG could be exfoliated to graphite nanosheets. By subsequent pyrolysis and activation processes, the QNPC nanohybrids could be prepared. As supercapacitor electrodes, a typical QNPC12-700 sample derived from the precursor containing an EG content of 12%, with a high level of nitrogen doping of 5.22 at%, offers a high specific capacitance of 305.7 F g(-1) (1 A g(-1)), excellent rate-capability and long-term stability. Notably, an extremely high energy density of 95.7 Wh kg(-1) at a power density of 449.7 W kg(-1) in an ionic liquid electrolyte can be achieved. The unique structural features and moderate heteroatom doping of the QNPC nanohybrids combines electrochemical double layer and faradaic capacitance contributions, which make these nanohybrids ideal candidates as electrode materials for high-performance energy storage devices. PMID:27122446

  18. Polynomial solution of 2D Kalman-Bucy filtering problem

    Sebek, M.

    1992-01-01

    The 2D version of the Kalman-Bucy filtering problem is formulated and then solved via 2D polynomial methods. The optimal filter is restricted to be a linear causal system. The design procedure is shown to consist of one 2D spectral factorization equation only. In fact, it works for n-D signals (n>2)

  19. Polynomial solution of 2D Kalman-Bucy filtering problem

    Sebek, M.

    1992-01-01

    The 2D version of the Kalman-Bucy filtering problem is formulated and then solved via 2D polynomial methods. The optimal filter is restricted to be a linear causal system. The design procedure is shown to consist of one 2D spectral factorization equation only. In fact, it works for n-D signals (n>2) as well.

  20. Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

    Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

    2014-01-01

    Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view, c

  1. FEM-2D, 2-D MultiGroup Diffusion in X-Y Geometry

    1 - Nature of physical problem solved: FEM-2D solves the two-dimensional diffusion equation in x-y geometry. This is done by the finite elements method. 2 - Method of solution: FEM-2D uses triangular elements with first and second order Lagrange approximations. The systems equations are formulated in multigroup form and solved by Cholesky procedure which operates only on nonzero elements. Various acceleration techniques are available for the outer iteration. Fluxes along various lines and rates in arbitrary zones may be output. 3 - Restrictions on the complexity of the problem: The code uses variable dimensioning. Thus, the problem size is restricted by the largest array which usually is the systems matrix. Fluxes of all groups are kept in memory. This might become another restrictive data set for a large number of groups. The validity of the results is restricted by the approximations used. FEM-2D requires a finite element net which allows the approximation of fluxes by at most parabolas. The node distribution should be more dense in areas of heavy flux changes (near absorbers or the reflector)

  2. DNTM/R2D, 2-D Transport in X-Y Geometry

    1 - Description of program or function: DNTM/R2D solves the neutron transport equation in two-dimensional X-Y geometry by the discrete nodal transport method. Source and eigenvalue problems can be solved. As compared to the two-dimensional nodal transport code DNTM/2D, the following new improved features are included: - Anisotropic scattering is considered. The order of anisotropic scattering is from P0 to P3. - The cross section input format is the same as for ANISN. Multi- group cross section libraries such as DLC-37 and DLC-BUGLE-80 can be used. 2 - Method of solution: DNTM/R2D uses the discrete nodal transport method. Anisotropic scattering is treated using Legendre expansion. Order of interior flux approximation is 2. Plane leakage approximation of surface flux is used. 3 - Restrictions on the complexity of the problem: Maximum number of: anisotropic scattering order = 3; material composition = 20; energy groups = 2; angular quadrature = 8; zones = 30. When coarse-mesh re-balancing is used, the maximum number of coarse meshes is 12 in each direction. If the computer permits some arrays can be enlarged to reduce the above restrictions

  3. Stability Test for 2-D Continuous-Discrete Systems

    2002-01-01

    Models of 2-D continuous-discrete systems are introduced, which can be used to describe some complex systems. Different from classical 2-D continuous systems or 2-D discrete systems, the asymptotic stability of the continuous-discrete systems is determined by Hurwitz-Schur stability (hybrid one) of 2-D characteristic polynomials of the systems. An algebraic algorithm with simpler test procedure for Hurwitz-Schur stability test of 2-D polynomials is developed. An example to illustrate the applications of the test approach is provided.

  4. Correlated Electron Phenomena in 2D Materials

    Lambert, Joseph G.

    In this thesis, I present experimental results on coherent electron phenomena in layered two-dimensional materials: single layer graphene and van der Waals coupled 2D TiSe2. Graphene is a two-dimensional single-atom thick sheet of carbon atoms first derived from bulk graphite by the mechanical exfoliation technique in 2004. Low-energy charge carriers in graphene behave like massless Dirac fermions, and their density can be easily tuned between electron-rich and hole-rich quasiparticles with electrostatic gating techniques. The sharp interfaces between regions of different carrier densities form barriers with selective transmission, making them behave as partially reflecting mirrors. When two of these interfaces are set at a separation distance within the phase coherence length of the carriers, they form an electronic version of a Fabry-Perot cavity. I present measurements and analysis of multiple Fabry-Perot modes in graphene with parallel electrodes spaced a few hundred nanometers apart. Transition metal dichalcogenide (TMD) TiSe2 is part of the family of materials that coined the term "materials beyond graphene". It contains van der Waals coupled trilayer stacks of Se-Ti-Se. Many TMD materials exhibit a host of interesting correlated electronic phases. In particular, TiSe2 exhibits chiral charge density waves (CDW) below TCDW ˜ 200 K. Upon doping with copper, the CDW state gets suppressed with Cu concentration, and CuxTiSe2 becomes superconducting with critical temperature of T c = 4.15 K. There is still much debate over the mechanisms governing the coexistence of the two correlated electronic phases---CDW and superconductivity. I will present some of the first conductance spectroscopy measurements of proximity coupled superconductor-CDW systems. Measurements reveal a proximity-induced critical current at the Nb-TiSe2 interfaces, suggesting pair correlations in the pure TiSe2. The results indicate that superconducting order is present concurrently with CDW in

  5. Ion channels, phosphorylation and mammalian sperm capacitation

    Pablo E Visconti; Dario Krapf; José Luis de la Vega-Beltrán; Juan José Acevedo; Alberto Darszon

    2011-01-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  6. Two dimensional Unite element method simulation to determine the brain capacitance based on ECVT measurement

    Sirait, S. H.; Taruno, W. P.; Khotimah, S. N.; Haryanto, F.

    2016-03-01

    A simulation to determine capacitance of brain's electrical activity based on two electrodes ECVT was conducted in this study. This study began with construction of 2D coronal head geometry with five different layers and ECVT sensor design, and then both of these designs were merged. After that, boundary conditions were applied on two electrodes in the ECVT sensor. The first electrode was defined as a Dirichlet boundary condition with 20 V in potential and another electrode was defined as a Dirichlet boundary condition with 0 V in potential. Simulated Hodgkin-Huxley -based action potentials were applied as electrical activity of the brain and sequentially were put on 3 different cross-sectional positions. As the governing equation, the Poisson equation was implemented in the geometry. Poisson equation was solved by finite element method. The simulation showed that the simulated capacitance values were affected by action potentials and cross-sectional action potential positions.

  7. Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils

    Zhiqiu Lu

    2014-12-01

    Full Text Available We present a comprehensive experimental investigation of a micromachined inductive suspension (MIS based on 3D wire-bonded microcoils. A theoretical model has been developed to predict the levitation height of the disc-shaped proof mass (PM, which has good agreement with the experimental results. The 3D MIS consists of two coaxial wire-bonded coils, the inner coil being used for levitation, while the outer coil for the stabilization of the PM. The levitation behavior is mapped with respect to the input parameters of the excitation currents applied to the levitation and stabilization coil, respectively: amplitude and frequency. At the same time, the levitation is investigated with respect to various thickness values (12.5 to 50 μm and two materials (Al and Cu of the proof mass. An important characteristic of an MIS, which determines its suitability for various applications, such as, e.g., micro-motors, is the dynamics in the lateral direction. We experimentally study the lateral stabilization force acting on the PM as a function of the linear displacement. The analysis of this dependency allows us to define a transition between stable and unstable levitation behavior. From an energetic point of view, this transition corresponds to the local maximum of the MIS potential energy. 2D simulations of the potential energy help us predict the location of this maximum, which is proven to be in good agreement with the experiment. Additionally, we map the temperature distribution for the coils, as well as for the PM levitated at 120 μm, which confirms the significant reduction of the heat dissipation in the MIS based on 3D microcoils compared to the planar topology.

  8. CYP2D7 sequence variation interferes with TaqMan CYP2D6*15 and *35 genotyping

    Amanda K Riffel

    2016-01-01

    Full Text Available TaqMan™ genotyping assays are widely used to genotype CYP2D6, which encodes a major drug metabolizing enzyme. Assay design for CYP2D6 can be challenging owing to the presence of two pseudogenes, CYP2D7 and CYP2D8, structural and copy number variation and numerous single nucleotide polymorphisms (SNPs some of which reflect the wild-type sequence of the CYP2D7 pseudogene. The aim of this study was to identify the mechanism causing false positive CYP2D6*15 calls and remediate those by redesigning and validating alternative TaqMan genotype assays. Among 13,866 DNA samples genotyped by the CompanionDx® lab on the OpenArray platform, 70 samples were identified as heterozygotes for 137Tins, the key SNP of CYP2D6*15. However, only 15 samples were confirmed when tested with the Luminex xTAG CYP2D6 Kit and sequencing of CYP2D6-specific long range (XL-PCR products. Genotype and gene resequencing of CYP2D6 and CYP2D7-specific XL-PCR products revealed a CC>GT dinucleotide SNP in exon 1 of CYP2D7 that reverts the sequence to CYP2D6 and allows a TaqMan assay PCR primer to bind. Because CYP2D7 also carries a Tins, a false-positive mutation signal is generated. This CYP2D7 SNP was also responsible for generating false-positive signals for rs769258 (CYP2D6*35 which is also located in exon 1. Although alternative CYP2D6*15 and *35 assays resolved the issue, we discovered a novel CYP2D6*15 subvariant in one sample that carries additional SNPs preventing detection with the alternate assay. The frequency of CYP2D6*15 was 0.1% in this ethnically diverse U.S. population sample. In addition, we also discovered linkage between the CYP2D7 CC>GT dinucleotide SNP and the 77G>A (rs28371696 SNP of CYP2D6*43. The frequency of this tentatively functional allele was 0.2%. Taken together, these findings emphasize that regardless of how careful genotyping assays are designed and evaluated before being commercially marketed, rare or unknown SNPs underneath primer and/or probe

  9. Ultrafast disk technology enables next generation micromachining laser sources

    Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

    2013-02-01

    Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

  10. Capacitance measurement of magnetic specific heat

    King, A. R.; Belanger, D. P.; Nordblad, P.; Jaccarino, V.

    1984-03-01

    A new technique-low frequency capacitance (C) measurement-has been used to study the critical behavior of both isotropic and anisotropic antiferromagnets. We find that dC/dT is accurately proportional to the known magnetic specific heat Cm of FeF2. This indicates that both dɛ/dT and dl/dT scale with Cm. For cubic KNiF3, the critical exponent (Cm=At-α) has been found to be α=-0.151±.004 and A/A'=1.56±0.03. The experiments measured the capacitance of disk-shaped samples with a three-terminal capacitance technique. A ratio transformer bridge was employed, yielding a resolution in ΔC/C of about 10-8. The quality of the results is comparable to the best obtainable from conventional Cm and birefringence measurements.

  11. Carbon nanofiber supercapacitors with large areal capacitances

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  12. Signal processing electronics for a capacitive microsensor

    Amendola, Gilles; Lu, Guo N.

    2000-04-01

    An interface circuit in a 0.8-micrometers CMOS process for the on- chip integration of a capacitive micro-sensor used as a microphone is presented. In order to circumvent 1/f noise contributions and to improve the signal/noise ratio, a synchronous modulation-demodulation technique has been applied. For the implementation of this technique, we have studied and designed several functional block, such as modulator with signal conversion, low-noise amplifier, demodulator, etc. To deal with problems related to dispersion of intrinsic capacitance of the sensor, a feedback compensating solution is suggested. The designed circuit has a sensibility of 1200 V/pF, with a minimum detectable capacitance variation of 2 10-6 pF.

  13. A high performance, variable capacitance accelerometer

    Wilner, L. Bruce

    1988-12-01

    A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive acclerometer, and with extraordinary shock resistance.

  14. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  15. Design and fabrication of Electroplating Nickel Micromachined Probe with out-of-plane predeformation

    This paper present a new type of electroplating Nickel micromachined probes with out-of-plane predeformation for the next generation integrated circuit (IC) chip testing probe card application. It was fabricated using silicon bulk etching, Ti deposition and Ni electroplating process. We use the residual stress effect of thin films deposition to cause the flexible micromachined probe with a large out-of-plane predeformation and combine postelectroplating technique to further increase beam's thickness and therefore enhance its stiffness. The typical micromachined probe had a thickness 5∼10 μm, a width of 20 μm, and a length of 100 μm. The maximum deflection of the fabricated Nickel probe beam was 28 μm. This micromachined probe is capable of providing a very larger number of testing probe card, including the array pad format, and this designed also to satisfy the requirements for high frequency, high resolution and low cost wafer-level testing..

  16. Design and fabrication of an array type electron multiplier for radiation imaging by micromachining technique

    A new position sensitive array type electron multiplier using micromachining technique has been investigated. Here are described new miniature three dimensional structures for such a multichannel electron multiplies. Their design and preliminary processing are presented. (author)

  17. An integrated fluorescence activated cell sorter fabricated by femtosecond laser micromachining

    Paié P.

    2013-11-01

    Full Text Available We present here a fully integrated fluorescence activated cell sorter (FACS, able to perform analysis at single cell level. This optofluidic device is obtained on a fused silica substrate with the use of femtosecond laser micromachining.

  18. Surface micromachined counter-meshing gears discrimination device

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  19. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  20. Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics

    Poletkin, K.; Lu, Z.; Wallrabe, U.; Badilita, V.

    2015-12-01

    This paper introduces a novel design for a hybrid micromachined contactless suspension, whose operation is based on combining electromagnetic inductive and electrostatic actuation. Wirebonded microcoils provide the electromagnetic inductive actuation, while electrodes patterned on a Si wafer provide electrostatic control. The coil structure and the electrode structure are independently designed and fabricated, and are finally assembled into one device by flip-chip bonding. We demonstrate vertical linear positioning of an aluminium disk-shaped proof mass in a range from 30 to 200 μm based on the coil structure. The electrode structure is employed to dynamically adjust the stiffness components during the operation of the suspension, to control the tilting in a range from ±1° to ±4°, as well as to control the oscillation about the vertical axis with a displacement of 37° at about 1.5 Hz frequency.

  1. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  2. Electrically tuneable micromachined fabry-perot interferometer in gas analysis

    Blomberg, M.; Torkkeli, A.; Lehto, A.; Helenelund, Ch; Viitasalo, M.

    1997-01-01

    This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system.

  3. A micromachined carbon nanotube film cantilever-based energy cell.

    Gong, Zhongcheng; He, Yuan; Tseng, Yi-Hsuan; O'Neal, Chad; Que, Long

    2012-08-24

    This paper reports a new type of energy cell based on micromachined carbon nanotube film (CNF)-lead zirconate titanate cantilevers that is fabricated on silicon substrates. Measurements found that this type of micro-energy cell generates both AC voltages due to the self-reciprocation of the microcantilevers and DC voltages due to the thermoelectric effect upon exposure to light and thermal radiation, resulting from the unique optical and thermal properties of the CNF. Typically the measured power density of the micro-energy cell can be from 4 to 300 μW cm(-2) when it is exposed to sunlight under different operational conditions. It is anticipated that hundreds of integrated micro-energy cells can generate power in the range of milliwatts, paving the way for the construction of self-powered micro- or nanosystems. PMID:22842491

  4. Heavy ion beam micromachining on LiNbO3

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 1012 ions/cm2, this technique is suitable for the fabrication of different shapes of LiNbO3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  5. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  6. Femtosecond laser embedded grating micromachining of flexible PDMS plates

    Cho, Sung-Hak; Chang, Won-Seok; Kim, Kwang-Ryul; Hong, Jong Wook

    2009-04-01

    We report on the femtosecond laser micromachining of photo-induced embedded diffraction grating in flexible Poly (Dimethly Siloxane) (PDMS) plates using a high-intensity femtosecond (130 fs) Ti: sapphire laser ( λp = 800 nm). The refractive index modifications with diameters ranging from 2 μm to 5 μm were photo-induced after the irradiation with peak intensities of more than 1 × 10 11 W/cm 2. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which femtosecond laser was focused. The maximum refractive index change (Δ n) was estimated to be 2 × 10 -3. By the X- Y- Z scanning of sample, the embedded diffraction grating in PDMS plate was fabricated successfully using a femtosecond laser.

  7. A Micro-Machined Gyroscope for Rotating Aircraft

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  8. Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

    Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

    2005-11-15

    A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

  9. Deep etch of GaN by laser micromachining

    Mak, Giuseppe Y.; Lam, Edmund Y.; Choi, H.W. [Department of Electrical and Electronic Engineering, University of Hong Kong, Hong Kong (China)

    2010-07-15

    Trench formation for device isolation on GaN light-emitting diode (LED) wafers via nanosecond ultraviolet laser micromachining is demonstrated. Owing to the dissimilar ablation thresholds between GaN and sapphire, the etch process terminates automatically at the GaN/sapphire interface. It was found that optimal focus offset, optimal pulse energy and high repetition rate are essential for obtaining a trench with tapered sidewall and smooth bottom surface, which is suitable for the conformal deposition of interconnects across the trench. This technique has been successfully applied to the rapid prototyping of interconnected LED arrays on a single chip. (copyright 2010 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  10. Polymer/colloid surface micromachining: micropatterning of hybrid multilayers.

    Mohammed, Javeed Shaikh; McShane, Mike

    2008-12-01

    Fabrication of multicomponent patterned films comprising polymer/nanoparticle multilayers using conventional lithography and bottom-up layer-by-layer nanofabrication techniques is described. The work is motivated by the potential to extend polymer surface micromachining capabilities toward construction of integrated systems by connecting discrete domains of active materials containing functional nanoparticles. Modified surfaces illustrate tunability of the physical (thickness, roughness, 3D structures) and chemical (inorganic/organic material combinations) properties of the nanocomposite micropatterns. Intriguing nanoscale phenomena were observed for the structures when the order of material deposition was changed; the final multilayer thickness and surface roughness and mechanical integrity of the patterns were found to be interdependent and related to the roughness of layers deposited earlier in the process. PMID:18989945

  11. Defect engineering and micromachining of Lithium Niobate by ion implantation

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  12. Activities on plasma ion source based micromachining system at VECC

    An RF inductively coupled plasma ion source with electrostatic focusing column is developed and optimized to generate high brightness, low energy spread ion beam which suits the needs of a focused ion beam system. Current density at the target plane is ∼ 500 mA/cm2 and thus the system is proved to be an appropriate one for high rate micromachining. Micro-patterning capabilities of the system are demonstrated by creating different kinds of patterns on silicon wafer, micro-drilling in metal foils etc. Measurements show that the currents in the range of 500 nA to 1 A can be focused to spots having diameters in the range of 8-10 m resulting in a current density of 450 mA/cm2 at the focused spot. (author)

  13. Defect engineering and micromachining of Lithium Niobate by ion implantation

    Bianconi, M.; Bentini, G.G. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Chiarini, M. [Carlo Gavazzi Space S.p.A. - Sede di Bologna and Laboratory MISTER, Via Gobetti 101, 1-40129 Bologna (Italy); De Nicola, P. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)], E-mail: denicola@bo.imm.cnr.it; Montanari, G.B. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Universita di Bologna - Dipartimento DEIS, Viale del Risorgimento 2, 1-40136 Bologna (Italy); Nubile, A.; Sugliani, S. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)

    2009-09-01

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  14. Three-dimensional micromachining of silicon using a nuclear microprobe

    Teo, E.J. E-mail: phytej@nus.edu.sg; Tavernier, E.P.; Breese, M.B.H.; Bettiol, A.A.; Watt, F.; Liu, M.H.; Blackwood, D.J

    2004-08-01

    We describe a novel technique for silicon microfabrication based on energetic mega-electron-volt (MeV) helium irradiation and subsequent electrochemical etching. The ion-induced damage in the irradiated regions slows down the porous silicon formation during electrochemical etching, producing a raised microstructure after cleaning in diluted potassium hydroxide solution. The thickness of the porous silicon layer formed depends on the accumulated fluence at each scan point. A relationship between the irradiated fluence and feature height is investigated on a p-type [1 0 0] silicon with a resistivity of 0.03 {omega} cm using focused 2 MeV helium beam. We use this relationship to micromachine multilevel structures with a single focused helium beam energy.

  15. Q-Switched Nd: YAG Laser Micro-Machining System

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  16. ELECTROCHEMICAL MICROMACHINING USING VIBRATILE TUNGSTEN WIRE FOR HIGH-ASPECT-RATIO MICROSTRUCTURES

    Wang, K

    2010-01-01

    Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high-aspect-ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vibration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the...

  17. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    Debkalpa Goswami; Shankar Chakraborty

    2014-01-01

    Electrochemical micromachining (EMM) appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applicatio...

  18. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Norihisa Miki; Koichi Hishida; Reiko Kuriyama; Yohei Sato; Yosuke Koga

    2013-01-01

    Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF) is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined ...

  19. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    Zhengyi Niu; Xu Zhang; Peitao Dong; Zhihua Chen; Zhanqiang Hou; Dingbang Xiao; Xuezhong Wu

    2010-01-01

    It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with s...

  20. Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization

    Liu, Chang; Tai, Yu-Chong

    1999-01-01

    This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods. We have designed and fabricated a large number and variety of surface-micromachined test structures with different etch-channel dimensions. Each cavity is then subjected to a number of sequential CVD deposition steps with incremental thickness until the cavity is successfully sealed. At etch deposition interval, the sealing status of ev...

  1. Large enhancement of femtosecond laser micromachining speed in dye-doped hydrogel polymers.

    Ding, Li; Jani, Dharmendra; Linhardt, Jeffrey; Künzler, Jay F; Pawar, Siddhesh; Labenski, Glen; Smith, Thomas; Knox, Wayne H

    2008-12-22

    Ophthalmologic hydrogel polymers are doped with Fluorescein or Coumarin dyes prior to the femtosecond laser micromachining process. We find that the achievable micromachining writing speed can be greatly increased while maintaining large refractive index changes (up to +0.08). Compared with previous results in dye-doped polymers that do not contain water such as PMMA, we obtain much larger index changes and much faster writing speeds. PMID:19104623

  2. Development of plasma ion source based micromachining system

    A compact high performance Inductively Coupled Plasma based (ICP) RF ion source operating at 13.56 MHz frequency is developed for production of low energy beams with micron size dimensions for high speed micromachining applications. To produce fine beams with high current density, ion source must produce high current ion beams with low energy spread and low divergence. Systematic characterizations have been carried out on the ion source and the extracted ion beams. The plasma source has exhibited a reduced brightness of 1x105 A/m2-sr-eV and ion energy spread of less than 5 eV. The angular current intensity of this source is >10 mA/Sr which is about three order higher than the traditional Liquid Metal Ion Source (LMIS). Ions are extracted by two electrode extraction system with 1 mm aperture and accelerated up to 8 KeV. Initial tests with the two lens focusing column, about 20 nA beam could be focused in 1.5 μm spot at working distance of 1 mm. The ion source life time and the stability has been excellent. Several experiments have been carried out to estimate the capability of this system for high micromachining applications. Various types of micro patterns have been created on Si wafer with Ar ion beam. Milling rate of > 1 μm3 are easily possible with this system. It is expected that with few more modifications in ion source as well as focusing column, milling rates of one order more and focused spot size of submicron dimensions can easily be achieved. (author)

  3. Functional characterization of a first avian cytochrome P450 of the CYP2D subfamily (CYP2D49.

    Hua Cai

    Full Text Available The CYP2D family members are instrumental in the metabolism of 20-25% of commonly prescribed drugs. Although many CYP2D isoforms have been well characterized in other animal models, research concerning the chicken CYP2Ds is limited. In this study, a cDNA encoding a novel CYP2D enzyme (CYP2D49 was cloned from the chicken liver for the first time. The CYP2D49 cDNA contained an open reading frame of 502 amino acids that shared 52%-57% identities with other CYP2Ds. The gene structure and neighboring genes of CYP2D49 are conserved and similar to those of human CYP2D6. Additionally, similar to human CYP2D6, CYP2D49 is un-inducible in the liver and expressed predominantly in the liver, kidney and small intestine, with detectable levels in several other tissues. Metabolic assays of the CYP2D49 protein heterologously expressed in E. coli and Hela cells indicated that CYP2D49 metabolized the human CYP2D6 substrate, bufuralol, but not debrisoquine. Moreover, quinidine, a potent inhibitor of human CYP2D6, only inhibited the bufuralol 1'-hydroxylation activity of CYP2D49 to a negligible degree. All these results indicated that CYP2D49 had functional characteristics similar to those of human CYP2D6 but measurably differed in the debrisoquine 4'-hydroxylation and quinidine inhibitory profile. Further structure-function investigations that employed site-directed mutagenesis and circular dichroism spectroscopy identified the importance of Val-126, Glu-222, Asp-306, Phe-486 and Phe-488 in keeping the enzymatic activity of CYP2D49 toward bufuralol as well as the importance of Asp-306, Phe-486 and Phe-488 in maintaining the conformation of CYP2D49 protein. The current study is only the first step in characterizing the metabolic mechanism of CYP2D49; further studies are still required.

  4. MAZE, Input Generator for Program DYNA2D and NIKE2D

    Description of program or function: MAZE is an interactive input generator for two-dimensional finite element codes. MAZE has three phases. In the first phase, lines and parts are defined. The first phase is terminated by the 'ASSM' or 'PASSM' command which merges all parts. In the second phase, boundary conditions may be specified, slide-lines may be defined, parts may be merged to eliminate nodes along common interfaces, boundary nodes may be moved for graded zoning, the mesh may be smoothed, and load curves may be defined. The second phase is terminated by the 'WBCD' command which causes MAZE to write the output file as soon as the 'T' terminate command is typed. In the third phase, material properties may be defined. Commands that apply to the first phase may not be used in the second or third; likewise, commands that apply in the second may not be used in the first and third, or commands that apply in the third in the first and second. Nine commands - TV, Z, GSET, PLOTS, GRID, NOGRID, FRAME, NOFRAME, and RJET are available in all phases. Comments may be added anywhere in the input stream by prefacing the comment with 'C'. Any DYNA2D or NIKE2D material and equation-of- state model may be defined via the MAT and EOS commands respectively. Maze may be terminated after phase two; it is not necessary to define the materials

  5. Development of a 3D capacitive gyroscope with reduced parasitic capacitance

    Walther, A.; Desloges, B.; Lejuste, C.; Coster, B.; Audebert, P.; Willemin, J.

    2013-02-01

    We present the development of a technological platform dedicated to 3D capacitive inertial sensors. The proof of concept will be made on a 3D gyroscope. The mobile structure is made within a 30 µm thick Si top layer of a SOI substrate, while poly-Si deposited on top of a sacrificial PSG layer serves as suspended top electrodes and connection wires. This technology enables us to maintain low parasitic capacitance, which is of paramount significance for capacitive detection. After packaging and association with an analogue electronic board, functionality of the sensor is demonstrated.

  6. Development of a 3D capacitive gyroscope with reduced parasitic capacitance

    We present the development of a technological platform dedicated to 3D capacitive inertial sensors. The proof of concept will be made on a 3D gyroscope. The mobile structure is made within a 30 µm thick Si top layer of a SOI substrate, while poly-Si deposited on top of a sacrificial PSG layer serves as suspended top electrodes and connection wires. This technology enables us to maintain low parasitic capacitance, which is of paramount significance for capacitive detection. After packaging and association with an analogue electronic board, functionality of the sensor is demonstrated. (paper)

  7. A scanning microscopy technique based on capacitive coupling with a field-effect transistor integrated with the tip.

    Shin, Kumjae; Kang, Dae sil; Lee, Sang hoon; Moon, Wonkyu

    2015-12-01

    We propose a method for measuring the capacitance of a thin layer using a Tip-on-Gate of Field-Effect Transistor (ToGoFET) probe. A ToGoFET probe with a metal-oxide-semiconductor field-effect transistor (MOSFET) with an ion-implant channel was embedded at the end of a cantilever and a Pt tip was fabricated using micro-machining. The ToGoFET probe was used to detect an alternating electric field at the dielectric surface. A dielectric buried metal sample was prepared; a sinusoidal input signal was applied to the buried metal lines; and the ToGoFET probe detected the electric field at the tip via the dielectric. The AC signal detected by the ToGoFET probe was demodulated by a simple AC-to-DC converter. Experimentally, it was shown that an electric field could be measured at the surface of the dielectric layer above a buried metal line. This promising result shows that it is possible to measure the surface local capacitance. PMID:26231315

  8. Layout Capacitive Coupling and Structure Impacts on Integrated High Voltage Power MOSFETs

    Fan, Lin; Knott, Arnold; Jørgensen, Ivan Harald Holger

    2016-01-01

    -to-layer coupling and the comparison of the layout impacts have not been well established. This paper presents modeling of parasitic mutual coupling to analyze the parasitic capacitance directly coupled between two on-chip metal wires. The accurate 3D field solver analysis for the comparable dimensions shows that...... the layer-to-layer coupling can contribute higher impacts than the well-known side-by-side coupling. Four layout structures are then proposed and implemented in a 0.18 µm partial SOI process for 100 V integrated power MOSFETs with a die area 2.31 mm2. The post-layout comparison using an industrial 2D...

  9. Surface Approximation Using the 2D FFENN Architecture

    Panagopoulos S

    2004-01-01

    Full Text Available A new two-dimensional feed-forward functionally expanded neural network (2D FFENN used to produce surface models in two dimensions is presented. New nonlinear multilevel surface basis functions are proposed for the network's functional expansion. A network optimization technique based on an iterative function selection strategy is also described. Comparative simulation results for surface mappings generated by the 2D FFENN, multilevel 2D FFENN, multilayered perceptron (MLP, and radial basis function (RBF architectures are presented.

  10. Maximizing entropy of image models for 2-D constrained coding

    Forchhammer, Søren; Danieli, Matteo; Burini, Nino; Zamarin, Marco; Ukhanova, Ann

    2010-01-01

    This paper considers estimating and maximizing the entropy of two-dimensional (2-D) fields with application to 2-D constrained coding. We consider Markov random fields (MRF), which have a non-causal description, and the special case of Pickard random fields (PRF). The PRF are 2-D causal finite context models, which define stationary probability distributions on finite rectangles and thus allow for calculation of the entropy. We consider two binary constraints and revisit the hard square const...

  11. Quantum capacitance of the armchair-edge graphene nanoribbon

    Ling-Feng Mao

    2013-08-01

    The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement in graphene nanoribbon. Detailed studies of the capacitance oscillations demonstrate that the local channel electrostatic potential at the capacitance peak, the height and the number of the capacitance peak strongly depend on the width, especially a few nanometres, of the armchair-edge graphene nanoribbon. It implies that the capacitance oscillations observed in the experiments can be utilized to measure the width of graphene nanoribbon. The results also show that the capacitance oscillations are not seen when the width is larger than 30 nm.

  12. Analysis of mutual capacitance and inductance of printed circuit

    Ivanov, V. G.

    2014-01-01

    The article analyzes the mutual capacitance and inductance of printed circuit and introduces an evaluation technique for conductor-to-conductor capacitance under electrical connections tracing, the technique based on a multi-layer channel model.

  13. Observation of Quantum Capacitance of individual single walled carbon nanotubes

    Dai, Junfeng; Li, Jun; Zeng, Hualing; Cui, Xiaodong

    2008-01-01

    We report a measurement on quantum capacitance of individual semiconducting and small band gap SWNTs. The observed quantum capacitance is remarkably smaller than that originating from density of states and it implies a strong electron correlation in SWNTs.

  14. Fabrication of capacitively-shunted superconducting qubits

    Yoder, Jonilyn L.; Gudmundsen, Theodore J.; Bolkhovsky, Vladimir; Welander, Paul B.; Gustavsson, Simon; Hover, David; Kerman, Andrew J.; Sears, Adam P.; Oliver, William D.

    2014-03-01

    Improvements in superconducting qubit coherence times and reproducibility have been demonstrated using capacitive shunting. In this study, we present methods for the preparation of both capacitively-shunted charge qubits (transmons) and capacitively-shunted flux qubits. Hybrid fabrication techniques were employed to combine high-quality-factor aluminum capacitive shunts with shadow-evaporated Josephson junctions, and the Josephson junctions were prepared using suspended-bridge germanium masks. We also will describe process testing results that were acquired to assess wafer-to-wafer reproducibility of our fabrication protocols. This research was funded in part by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA); and by the Assistant Secretary of Defense for Research and Engineering under Air Force Contract number FA8721-05-C-0002. All statements of fact, opinion or conclusions contained herein are those of the authors and should not be construed as representing the official views or policies of IARPA, the ODNI, or the U.S. Government.

  15. Teaching of Inductive and Capacitive Reactance.

    MacInnes, I.; Jeffrey, W. S.

    1983-01-01

    Discusses how understanding mechanical systems and their graphic representation can be of value when teaching inductive and capacitive reactance, in particular, the response of inductors and capacitors to an alternating potential difference. Suggests that mechanical systems be taught, not just before introducing reactance but earlier in the…

  16. Thermodynamic cycle analysis for capacitive deionization

    Biesheuvel, P.M.

    2009-01-01

    Capacitive deionization (CDI) is an ion removal technology based on temporarily storing ions in the polarization layers of two oppositely positioned electrodes. Here we present a thermodynamic model for the minimum work required for ion separation in the fully reversible case by describing the ionic

  17. Capacitive Proximity Sensors With Additional Driven Shields

    Mcconnell, Robert L.

    1993-01-01

    Improved capacitive proximity sensors constructed by incorporating one or more additional driven shield(s). Sensitivity and range of sensor altered by adjusting driving signal(s) applied to shield(s). Includes sensing electrode and driven isolating shield that correspond to sensing electrode and driven shield.

  18. Phase-Discriminating Capacitive Sensor System

    Vranish, John M.; Rahim, Wadi

    1993-01-01

    Crosstalk eliminated by maintaining voltages on all electrodes at same amplitude, phase, and frequency. Each output feedback-derived control voltage, change of which indicates proximity-induced change in capacitance of associated sensing electrode. Sensors placed close together, enabling imaging of sort. Images and/or output voltages used to guide robots in proximity to various objects.

  19. Capacitive Displacement Sensor With Frequency Readout

    Fritsch, Klaus

    1989-01-01

    Simple displacement-measuring circuit senses capacitance between two parallel conducting plates and produces output signal, with frequency proportional to distance between plates. Principle of circuit provides advantages over other methods because of frequency-encoded output and high linearity. Used to measure displacements.

  20. Negative capacitance in multidomain ferroelectric superlattices

    Zubko, Pavlo; Wojdeł, Jacek C.; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk’Yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-01

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric–dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  1. Site Specific Evaluation of Multisensor Capacitance Probes

    Multisensor capacitance probes (MCPs) are widely used for measuring soil water content (SWC) at the field scale. Although manufacturers supply a generic MCP calibration, many researchers recognize that MCPs should be calibrated for specific field conditions. MCPs measurements are typically associa...

  2. Capacitors and Resistance-Capacitance Networks.

    Balabanian, Norman; Root, Augustin A.

    This programed textbook was developed under a contract with the United States Office of Education as Number 5 in a series of materials for use in an electrical engineering sequence. It is divided into three parts--(1) capacitors, (2) voltage-current relationships, and (3) simple resistance-capacitance networks. (DH)

  3. Inside-out electrical capacitance tomography

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    In this work we demonstrate the construction of an ‘inside-out’ sensor geometry for electrical capacitance tomography (ECT). The inside-out geometry has the electrodes placed around a tube, as usual, but measuring ‘outwards’. The flow between the electrodes and an outer tube is reconstructed; all...

  4. [Experience in developing and using capacitive electrodes].

    Grishanovich, A P; Iarmolinskiĭ, V I

    1984-01-01

    A capacitive-type electrode using titanium or tantalum oxide obtained through anodizing is described. Incorporated in the electrode is a source for a buffer amplifier. A shielding cap is used as an indifferent electrode. High performance allows using the electrodes for ECG, EEG, and other signal recording in clinical practice and researches. PMID:6708763

  5. Maximizing entropy of image models for 2-D constrained coding

    Forchhammer, Søren; Danieli, Matteo; Burini, Nino;

    2010-01-01

    This paper considers estimating and maximizing the entropy of two-dimensional (2-D) fields with application to 2-D constrained coding. We consider Markov random fields (MRF), which have a non-causal description, and the special case of Pickard random fields (PRF). The PRF are 2-D causal finite...... of the Markov random field defined by the 2-D constraint is estimated to be (upper bounded by) 0.8570 bits/symbol using the iterative technique of Belief Propagation on 2 £ 2 finite lattices. Based on combinatorial bounding techniques the maximum entropy for the constraint was determined to be 0.848....

  6. A wafer level vacuum encapsulated capacitive accelerometer fabricated in an unmodified commercial MEMS process.

    Merdassi, Adel; Yang, Peng; Chodavarapu, Vamsy P

    2015-01-01

    We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs) for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1 fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g. PMID:25815451

  7. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

    Adel Merdassi

    2015-03-01

    Full Text Available We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS, introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g.

  8. Anisotropic magneto-capacitance in ferromagnetic-plate capacitors

    Haigh, J. A.; Ciccarelli, C; Betz, A. C.; Irvine, A; Novák, V.; Jungwirth, T.; Wunderlich, J.

    2015-01-01

    The capacitance of a parallel plate capacitor can depend on applied magnetic field. Previous studies have identified capacitance changes induced via classical Lorentz force or spin-dependent Zeeman effects. Here we measure a magnetization direction dependent capacitance in parallel-plate capacitors where one plate is a ferromagnetic semiconductor, gallium manganese arsenide. This anisotropic magneto-capacitance is due to the anisotropy in the density of states dependent on the magnetization t...

  9. Membrane capacitance techniques to monitor granule exocytosis in neutrophils.

    Lollike, K; Lindau, M

    1999-01-01

    Cell membranes behave like electrical capacitors and changes in cell capacitance therefore reflect changes in the cell area. Monitoring capacitance can thus be used to study dynamic cellular phenomenon involving rapid changes in cell surface, such as exo- and/or endocytosis. In this review focus is on the use of capacitance techniques to study exocytosis in human neutrophils. We compare the whole-cell and the cell-attached capacitance techniques, and we review the complete literature dealing ...

  10. Negative Quantum Capacitance of Carbon Nanotube Field-Effect Transistors

    Latessa, L.; Pecchia, A.; Di Carlo, A.; P. Lugli

    2004-01-01

    Atomistic density functional theory (DFT) calculations of the capacitance between a metallic cylindric gate and a carbon nanotube (CNT) are reported. Results stressing the predominant effect of quantum capacitance in limiting or even enhancing screening properties of the CNT are shown. Other contributions to the quantum capacitance beyond the electronic density of state (DOS) are pointed out. Negative values of the quantum capacitance are obtained for low-density systems, which correspondingl...

  11. MOS Capacitance-Voltage Characteristics:V.Methods to Enhance the Trapping Capacitance

    揭斌斌; 薩支唐

    2012-01-01

    Low-frequency and High-frequency Capacitance-Voltage (C-V) curves of Silicon Metal-Oxide-Semiconductor Capacitors,showing electron and hole trapping at shallow-level dopant and deep-level generationrecombination-trapping impurities,are presented to illustrate the enhancement of the giant trapping capacitances by physical means via device and circuit designs,in contrast to chemical means via impurity characteristics previously reported.Enhancement is realized by masking the electron or/and hole storage capacitances to make the trapping capacitances dominant at the terminals.Device and materials properties used in the computed CV curves are selected to illustrate experimental realizations for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  12. Klassifikation von Standardebenen in der 2D-Echokardiographie mittels 2D-3D-Bildregistrierung

    Bergmeir, Christoph; Subramanian, Navneeth

    Zum Zweck der Entwicklung eines Systems, das einen unerfahrenen Anwender von Ultraschall (US) zur Aufnahme relevanter anatomischer Strukturen leitet, untersuchen wir die Machbarkeit von 2D-US zu 3D-CT Registrierung. Wir verwenden US-Aufnahmen von Standardebenen des Herzens, welche zu einem 3D-CT-Modell registriert werden. Unser Algorithmus unterzieht sowohl die US-Bilder als auch den CT-Datensatz Vorverarbeitungsschritten, welche die Daten durch Segmentierung auf wesentliche Informationen in Form von Labein für Muskel und Blut reduzieren. Anschließend werden diese Label zur Registrierung mittels der Match-Cardinality-Metrik genutzt. Durch mehrmaliges Registrieren mit verschiedenen Initialisierungen ermitteln wir die im US-Bild sichtbare Standardebene. Wir evaluierten die Methode auf sieben US-Bildern von Standardebenen. Fünf davon wurden korrekt zugeordnet.

  13. 2D Four-Channel Perfect Reconstruction Filter Bank Realized with the 2D Lattice Filter Structure

    Sezen S

    2006-01-01

    Full Text Available A novel orthogonal 2D lattice structure is incorporated into the design of a nonseparable 2D four-channel perfect reconstruction filter bank. The proposed filter bank is obtained by using the polyphase decomposition technique which requires the design of an orthogonal 2D lattice filter. Due to constraint of perfect reconstruction, each stage of this lattice filter bank is simply parameterized by two coefficients. The perfect reconstruction property is satisfied regardless of the actual values of these parameters and of the number of the lattice stages. It is also shown that a separable 2D four-channel perfect reconstruction lattice filter bank can be constructed from the 1D lattice filter and that this is a special case of the proposed 2D lattice filter bank under certain conditions. The perfect reconstruction property of the proposed 2D lattice filter approach is verified by computer simulations.

  14. Electric field theory and the fallacy of void capacitance

    McAllister, Iain Wilson

    1991-01-01

    The concept of the capacitance of a gaseous void is discussed as applied to electrical insulation science. The most pertinent aspect of the capacitance definition is that of reference to a single-valued potential difference between surfaces. This implies that these surfaces must be surfaces of equipotential. With this essential characteristics the validity of void capacitance is examined

  15. Studying the mechanism of micromachining by short pulsed laser

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  16. Quantum capacitance of an HgTe quantum well as an indicator of the topological phase

    Kernreiter, T.; Governale, M.; Zülicke, U.

    2016-06-01

    Varying the quantum-well width in an HgTe/CdTe heterostructure allows for realizing normal and inverted semiconducting band structures, making it a prototypical system to study two-dimensional (2D) topological-insulator behavior. We have calculated the zero-temperature thermodynamic density of states DT for the electron-doped situation in both regimes, treating interactions within the Hartree-Fock approximation. A distinctively different behavior for the density dependence of DT is revealed in the inverted and normal cases, making it possible to detect the system's topological phase through measurement of macroscopic observables, such as the quantum capacitance or electronic compressibility. Our results establish the 2D electron system in HgTe quantum wells as unique in terms of its collective electronic properties.

  17. An Incompressible 2D Didactic Model with Singularity and Explicit Solutions of the 2D Boussinesq Equations

    Chae, Dongho; Constantin, Peter; Wu, Jiahong

    2014-09-01

    We give an example of a well posed, finite energy, 2D incompressible active scalar equation with the same scaling as the surface quasi-geostrophic equation and prove that it can produce finite time singularities. In spite of its simplicity, this seems to be the first such example. Further, we construct explicit solutions of the 2D Boussinesq equations whose gradients grow exponentially in time for all time. In addition, we introduce a variant of the 2D Boussinesq equations which is perhaps a more faithful companion of the 3D axisymmetric Euler equations than the usual 2D Boussinesq equations.

  18. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW−1 at 8, 10 and 12 GHz, respectively. (paper)

  19. Symmetries and solvable models for evaporating 2D black holes

    Cruz Muñoz, José Luis; Navarro-Salas, José; Navarro Navarro, Miguel; Talavera, C. F.

    1997-01-01

    We study the evaporation process of a 2D black hole in thermal equilibrium when the ingoing radiation is suddenly switched off. We also introduce global symmetries of generic 2D dilaton gravity models which generalize the extra symmetry of the CGHS model. © Elsevier Science B.V

  20. Cascading Constrained 2-D Arrays using Periodic Merging Arrays

    Forchhammer, Søren; Laursen, Torben Vaarby

    2003-01-01

    We consider a method for designing 2-D constrained codes by cascading finite width arrays using predefined finite width periodic merging arrays. This provides a constructive lower bound on the capacity of the 2-D constrained code. Examples include symmetric RLL and density constrained codes....... Numerical results for the capacities are presented....